<SEC-DOCUMENT>0001558370-23-001744.txt : 20230222
<SEC-HEADER>0001558370-23-001744.hdr.sgml : 20230222
<ACCEPTANCE-DATETIME>20230222160408
ACCESSION NUMBER:		0001558370-23-001744
CONFORMED SUBMISSION TYPE:	10-K
PUBLIC DOCUMENT COUNT:		126
CONFORMED PERIOD OF REPORT:	20221231
FILED AS OF DATE:		20230222
DATE AS OF CHANGE:		20230222

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			VEECO INSTRUMENTS INC
		CENTRAL INDEX KEY:			0000103145
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		IRS NUMBER:				112989601
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	FILING VALUES:
		FORM TYPE:		10-K
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-16244
		FILM NUMBER:		23653031

	BUSINESS ADDRESS:	
		STREET 1:		TERMINAL DRIVE
		CITY:			PLAINVIEW
		STATE:			NY
		ZIP:			11803
		BUSINESS PHONE:		516 677-0200

	MAIL ADDRESS:	
		STREET 1:		TERMINAL DRIVE
		CITY:			PLAINVIEW
		STATE:			NY
		ZIP:			11803

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	VACUUM ELECTRONIC MANUFACTURING CORP
		DATE OF NAME CHANGE:	19700408
</SEC-HEADER>
<DOCUMENT>
<TYPE>10-K
<SEQUENCE>1
<FILENAME>veco-20221231x10k.htm
<DESCRIPTION>10-K
<TEXT>
<XBRL>
<?xml version='1.0' encoding='UTF-8'?>

      <!-- iXBRL document created with: Toppan Merrill Bridge iXBRL 10.2.0.4 -->
      <!-- Based on: iXBRL 1.1 -->
      <!-- Created on: 2/22/2023 6:58:30 PM -->
      <!-- iXBRL Library version: 1.0.8405.27969 -->
      <!-- iXBRL Service Job ID: e9268ea8-fb4d-4e32-a1b9-44114b56fc1e -->

  <html xmlns:us-gaap="http://fasb.org/us-gaap/2022" xmlns:link="http://www.xbrl.org/2003/linkbase" xmlns:country="http://xbrl.sec.gov/country/2022" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xbrldt="http://xbrl.org/2005/xbrldt" xmlns:ixt-sec="http://www.sec.gov/inlineXBRL/transformation/2015-08-31" xmlns:srt="http://fasb.org/srt/2022" xmlns:ix="http://www.xbrl.org/2013/inlineXBRL" xmlns:ref="http://www.xbrl.org/2006/ref" xmlns:xbrli="http://www.xbrl.org/2003/instance" xmlns:dei="http://xbrl.sec.gov/dei/2022" xmlns:iso4217="http://www.xbrl.org/2003/iso4217" xmlns="http://www.w3.org/1999/xhtml" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:veco="http://www.veeco.com/20221231" xmlns:xs="http://www.w3.org/2001/XMLSchema-instance" xmlns:ixt="http://www.xbrl.org/inlineXBRL/transformation/2015-02-26" xmlns:xbrldi="http://xbrl.org/2006/xbrldi"><head><meta content="text/html" http-equiv="content-type" /><title></title></head><body><div style="margin-top:30pt;"></div><div style="display:none;"><ix:header><ix:hidden><ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" xs:nil="true" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" name="us-gaap:PreferredStockValue" id="Hidden_rvjYzexRXUOQR20Zl1nBWw"></ix:nonFraction><ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" xs:nil="true" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" name="us-gaap:PreferredStockValue" id="Hidden_9P31eLujM0aTyQUmYP2zmw"></ix:nonFraction><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="veco:IrrevocableLettersOfCreditMaturityPeriodMinimum" id="Hidden_X77IvS7lk0evd8U-l6qM4w">P0D</ix:nonNumeric><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_srt_RangeAxis_srt_MinimumMember_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_C24Z8a4FqkeFDK2d2d9hYg" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1" id="Hidden_mYtq0YB12kmZB5r9hVizow">P1Y</ix:nonNumeric><ix:nonNumeric contextRef="Duration_1_1_2013_To_12_31_2013_srt_RangeAxis_srt_MinimumMember_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_us-gaap_PlanNameAxis_veco_InducementStockIncentivePlan2013Member_PEuA9XZyfU-Z-u_scIxdGQ" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1" id="Hidden_GYTb4cpfHkKMyAjEn-joig">P2Y</ix:nonNumeric><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_srt_RangeAxis_srt_MinimumMember_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsAndRestrictedStockUnitsMember_us-gaap_PlanNameAxis_veco_StockIncentivePlan2010Member_8EaDxBLlOEKvfMX15uUWaw" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1" id="Hidden_lv-KmzIXvUmFz5KZwCediA">P1Y</ix:nonNumeric><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="veco:NumberOfTradingDaysConsideredToCalculateMarketCapitalization" id="Hidden_lu4ZbA0J8kKBzBR2b7i9TA">P10D</ix:nonNumeric><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_srt_RangeAxis_srt_MinimumMember_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember_us-gaap_PlanNameAxis_veco_StockIncentivePlan2010Member_xoqmI5-NBU2aLrJgxZ3q3g" name="us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod" id="Hidden_geqmoAoR4E-cxxENNB5XWw">P7Y</ix:nonNumeric><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_DebtInstrumentAxis_us-gaap_ConvertibleDebtMember_XQJwNQGip0-4rSyYMzx-Zw" name="veco:DebtInstrumentNumberOfConsecutiveBusinessDays" id="Hidden_ni2iafIMQEWlcjh9n4sB8Q">P5D</ix:nonNumeric><ix:nonFraction unitRef="Unit_Standard_segment_RlYNACzID0m6O5VHI3M3nA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="INF" name="us-gaap:NumberOfOperatingSegments" id="Hidden_Q4WTJDpvMEebo8fh1Cmpvw">1</ix:nonFraction><ix:nonNumeric contextRef="As_Of_12_31_2022_srt_RangeAxis_srt_MinimumMember_us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionStartDateAxis_veco_cnst_2024-01-01_3OL-sQzaTEOOG3d6jcbkGg" name="us-gaap:RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionPeriod1" id="Hidden_lMHLKbK2aECnPZnMvM5qZg">P1Y</ix:nonNumeric><ix:nonNumeric contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" name="us-gaap:OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList" id="Hidden_eoIrvRLA5kWv8kXlN_7lSg">http://www.veeco.com/20221231#AccruedAndOtherLiabilitiesCurrent</ix:nonNumeric><ix:nonNumeric contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" name="us-gaap:OperatingLeaseLiabilityStatementOfFinancialPositionExtensibleList" id="Hidden_sGkRBjQQs0yUxZ2hF_23sA">http://fasb.org/us-gaap/2022#OperatingLeaseLiabilityNoncurrent http://www.veeco.com/20221231#AccruedAndOtherLiabilitiesCurrent</ix:nonNumeric><ix:nonNumeric contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" name="us-gaap:OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList" id="Hidden_EGVCh5E7LkOiByzYXsbm8w">http://www.veeco.com/20221231#AccruedAndOtherLiabilitiesCurrent</ix:nonNumeric><ix:nonNumeric contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" name="us-gaap:OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList" id="Hidden_Hgo4tMDiIkiIx-7JwDKL-Q">http://www.veeco.com/20221231#AccruedAndOtherLiabilitiesCurrent</ix:nonNumeric><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="dei:EntityCentralIndexKey" id="Tc_KESy8eqBJEisTMGf4adqBA_2_1">0000103145</ix:nonNumeric><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="dei:DocumentFiscalYearFocus" id="Tc_VFO3OMGIukOxOF7pvA5ERA_4_1">2022</ix:nonNumeric><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="dei:DocumentFiscalPeriodFocus" id="Tc_rP_W-_sBZU6iMZNxmnUrnw_5_1">FY</ix:nonNumeric><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="dei:AmendmentFlag" id="Tc_sMxbz_WpaUKtHgWmgdnSug_6_1">false</ix:nonNumeric><ix:nonNumeric contextRef="As_Of_12_31_2022_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_wzCRDkFhQEa0Q4hGaj9ADA" name="us-gaap:ConvertibleDebtFairValueByFairValueHierarchyLevelExtensibleList" id="Hidden_6pZXc4yN8UGzliGoc7Xcfw">http://fasb.org/us-gaap/2022#FairValueInputsLevel2Member</ix:nonNumeric><ix:nonNumeric contextRef="As_Of_12_31_2022_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_ZetZSnUIu0SKEy9vSz2DrA" name="us-gaap:ConvertibleDebtFairValueByFairValueHierarchyLevelExtensibleList" id="Hidden_j8h4rOm8lUqa-Aq9yQNl0g">http://fasb.org/us-gaap/2022#FairValueInputsLevel2Member</ix:nonNumeric><ix:nonNumeric contextRef="As_Of_12_31_2022_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_rMWc7QQ050epRT-cmk3YDQ" name="us-gaap:ConvertibleDebtFairValueByFairValueHierarchyLevelExtensibleList" id="Hidden_7AsSvO4WhUmmbzAO1MAR1w">http://fasb.org/us-gaap/2022#FairValueInputsLevel2Member</ix:nonNumeric><ix:nonNumeric contextRef="As_Of_1_10_2017_mE_NZqLn50uO237u-S13xA" name="us-gaap:LongTermDebtMeasurementInputExtensibleList" id="Hidden_oLp6BWq4j0SmMOsjNERVHg">http://fasb.org/us-gaap/2022#MeasurementInputDiscountRateMember</ix:nonNumeric><ix:nonNumeric contextRef="As_Of_11_17_2020_jAUfBON7oEmWBbqJUWrC9A" name="us-gaap:LongTermDebtMeasurementInputExtensibleList" id="Hidden_JIHuoDj1xk2Lu7ABrLHNxA">http://fasb.org/us-gaap/2022#MeasurementInputDiscountRateMember</ix:nonNumeric><ix:nonNumeric contextRef="As_Of_5_18_2020_QRmcZr2GXU2znfxw1ngsUg" name="us-gaap:LongTermDebtMeasurementInputExtensibleList" id="Hidden_Zok5uByMkkuRQp9J7Ofx9g">http://fasb.org/us-gaap/2022#MeasurementInputDiscountRateMember</ix:nonNumeric><ix:nonNumeric contextRef="Duration_1_1_2022_To_1_1_2022_us-gaap_AdjustmentsForNewAccountingPronouncementsAxis_us-gaap_AccountingStandardsUpdate202006Member_kuhpVblHeESHna3s4yVELw" name="us-gaap:ChangeInAccountingPrincipleAccountingStandardsUpdateTransitionOptionElectedExtensibleList" id="Hidden_kuYE2HfeWkSfBndNPXMkng">http://fasb.org/us-gaap/2022#AccountingStandardsUpdate201602CumulativeEffectPeriodOfAdoptionMember</ix:nonNumeric></ix:hidden><ix:references><link:schemaRef xlink:type="simple" xlink:href="veco-20221231.xsd"></link:schemaRef></ix:references><ix:resources><xbrli:context id="Duration_1_1_2021_To_12_31_2021_srt_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_veco_OtherNonMarketableInvestmentMember_us-gaap_IncomeStatementLocationAxis_us-gaap_OtherNonoperatingIncomeExpenseMember_tTSp4c_SCkqj73Uc-NYwIQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis">veco:OtherNonMarketableInvestmentMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:OtherNonoperatingIncomeExpenseMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_16_2021_srt_RangeAxis_srt_MaximumMember_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021Member_RxUGPsRTL0ajQ-_tTuLXIg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:RangeAxis">srt:MaximumMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:RevolvingCreditFacilityDecember2021Member</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-12-16</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_16_2021_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021Member_us-gaap_VariableRateAxis_us-gaap_SecuredOvernightFinancingRateSofrOvernightIndexSwapRateMember_yH5_YTWqjEuoxhZjlqLJyw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:RevolvingCreditFacilityDecember2021Member</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:VariableRateAxis">us-gaap:SecuredOvernightFinancingRateSofrOvernightIndexSwapRateMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-12-16</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_srt_RangeAxis_srt_MaximumMember_srt_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_veco_OtherNonMarketableInvestmentMember_rtkF_4iUZ0eg_uHUJbylvA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:RangeAxis">srt:MaximumMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="srt:ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis">veco:OtherNonMarketableInvestmentMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2021_srt_RangeAxis_srt_MaximumMember_srt_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_veco_OtherNonMarketableInvestmentMember_H7Pvmz13_kqx4gfV2pbg4g"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:RangeAxis">srt:MaximumMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="srt:ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis">veco:OtherNonMarketableInvestmentMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_CashAndCashEquivalentsAxis_veco_MoneyMarketFundsExcludingGovernmentFundsMember_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_zBQP3bFx00C_j5nPe2GU_g"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:CashAndCashEquivalentsAxis">veco:MoneyMarketFundsExcludingGovernmentFundsMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:FairValueByFairValueHierarchyLevelAxis">us-gaap:FairValueInputsLevel1Member</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_CashAndCashEquivalentsAxis_veco_CertificateOfDepositsAndTimeDepositsMember_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_kb7en8Al0UeyY-BwVRymSQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:CashAndCashEquivalentsAxis">veco:CertificateOfDepositsAndTimeDepositsMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:FairValueByFairValueHierarchyLevelAxis">us-gaap:FairValueInputsLevel1Member</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_CashAndCashEquivalentsAxis_veco_MoneyMarketFundsExcludingGovernmentFundsMember_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_1N68aHrwUEeEnGG3xkF-PA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:CashAndCashEquivalentsAxis">veco:MoneyMarketFundsExcludingGovernmentFundsMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_CashAndCashEquivalentsAxis_veco_CertificateOfDepositsAndTimeDepositsMember_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_Tl2Z9QaK_katKWTLd_NfjQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:CashAndCashEquivalentsAxis">veco:CertificateOfDepositsAndTimeDepositsMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2021_us-gaap_CashAndCashEquivalentsAxis_veco_MoneyMarketFundsExcludingGovernmentFundsMember_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_BYRwCfp1Q0WYuXQEj6V_jg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:CashAndCashEquivalentsAxis">veco:MoneyMarketFundsExcludingGovernmentFundsMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:FairValueByFairValueHierarchyLevelAxis">us-gaap:FairValueInputsLevel1Member</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2021_us-gaap_CashAndCashEquivalentsAxis_veco_CertificateOfDepositsAndTimeDepositsMember_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_JiqTPtimWUGvvaKkaAWYdQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:CashAndCashEquivalentsAxis">veco:CertificateOfDepositsAndTimeDepositsMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:FairValueByFairValueHierarchyLevelAxis">us-gaap:FairValueInputsLevel1Member</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2021_us-gaap_CashAndCashEquivalentsAxis_veco_MoneyMarketFundsExcludingGovernmentFundsMember_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_suw4EE81r06AU6N-K20ykg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:CashAndCashEquivalentsAxis">veco:MoneyMarketFundsExcludingGovernmentFundsMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2021_us-gaap_CashAndCashEquivalentsAxis_veco_CertificateOfDepositsAndTimeDepositsMember_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_ytqgmgI0iU2Mff9bwHjo2A"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:CashAndCashEquivalentsAxis">veco:CertificateOfDepositsAndTimeDepositsMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_5_13_2020_us-gaap_DerivativeInstrumentRiskAxis_veco_DerivativeContractCappedCallMember_AmsPhVzUq0WxhxYxtgccOg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:DerivativeInstrumentRiskAxis">veco:DerivativeContractCappedCallMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2020-05-13</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="Duration_5_13_2020_To_5_13_2020_us-gaap_DerivativeInstrumentRiskAxis_veco_DerivativeContractCappedCallMember_oCl303Xdc0ax8mKHo-S8gQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:DerivativeInstrumentRiskAxis">veco:DerivativeContractCappedCallMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-05-13</xbrli:startDate><xbrli:endDate>2020-05-13</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_srt_RangeAxis_srt_MinimumMember_srt_StatementGeographicalAxis_veco_GeographicLocationOneMember_urfkXneJaEms9Cl65M7_dg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:RangeAxis">srt:MinimumMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">veco:GeographicLocationOneMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_srt_RangeAxis_srt_MaximumMember_srt_StatementGeographicalAxis_veco_GeographicLocationTwoMember_qfHak3I2j02E3uJNzquhHA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:RangeAxis">srt:MaximumMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">veco:GeographicLocationTwoMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_srt_RangeAxis_srt_MaximumMember_srt_StatementGeographicalAxis_veco_GeographicLocationOneMember_g1TJdhFHIkaAVeEKqXBbew"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:RangeAxis">srt:MaximumMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">veco:GeographicLocationOneMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_12_31_2021_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_BWpjmM2iLkSahHEVu-gtSg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:ValuationAllowancesAndReservesTypeAxis">us-gaap:ValuationAllowanceOfDeferredTaxAssetsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_ubkTZuWsAkO4w1IFkEt5FQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:ValuationAllowancesAndReservesTypeAxis">us-gaap:ValuationAllowanceOfDeferredTaxAssetsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2020_To_12_31_2020_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_-SPpBK_xNkmb5q-qwksjxA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:ValuationAllowancesAndReservesTypeAxis">us-gaap:ValuationAllowanceOfDeferredTaxAssetsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-01-01</xbrli:startDate><xbrli:endDate>2020-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2020_To_12_31_2020_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_AllowanceForCreditLossMember_SWG0SSmFeEqQkQieCJR1-A"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:ValuationAllowancesAndReservesTypeAxis">us-gaap:AllowanceForCreditLossMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-01-01</xbrli:startDate><xbrli:endDate>2020-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_ruzo5a8GZk2xJncEnDVyGA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:ValuationAllowancesAndReservesTypeAxis">us-gaap:ValuationAllowanceOfDeferredTaxAssetsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_AllowanceForCreditLossMember_9CuZ9qQkQkyZhNVg12vbmA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:ValuationAllowancesAndReservesTypeAxis">us-gaap:AllowanceForCreditLossMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2021_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_ubRsuDLW0kKOOU1kwiqmyQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:ValuationAllowancesAndReservesTypeAxis">us-gaap:ValuationAllowanceOfDeferredTaxAssetsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2021_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_AllowanceForCreditLossMember_3P4puSHlZ0-MKV1ZgEpVLw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:ValuationAllowancesAndReservesTypeAxis">us-gaap:AllowanceForCreditLossMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2020_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_cKBh7RwrYkiyqOF1CpqALQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:ValuationAllowancesAndReservesTypeAxis">us-gaap:ValuationAllowanceOfDeferredTaxAssetsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2020-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2020_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_AllowanceForCreditLossMember_QQ0VBL7qRE2YRwey-lG_eg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:ValuationAllowancesAndReservesTypeAxis">us-gaap:AllowanceForCreditLossMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2020-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2019_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_kWzc0bkOvES0Cb3erCEi_A"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:ValuationAllowancesAndReservesTypeAxis">us-gaap:ValuationAllowanceOfDeferredTaxAssetsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2019-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2019_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_AllowanceForCreditLossMember_b9cISaouPUKueqwRlspRcw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:ValuationAllowancesAndReservesTypeAxis">us-gaap:AllowanceForCreditLossMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2019-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_IncomeTaxAuthorityAxis_us-gaap_DomesticCountryMember_us-gaap_TaxCreditCarryforwardAxis_us-gaap_ResearchMember_JSK4sVm52Uad8MbRS3Hinw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:IncomeTaxAuthorityAxis">us-gaap:DomesticCountryMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:TaxCreditCarryforwardAxis">us-gaap:ResearchMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_IncomeTaxAuthorityAxis_us-gaap_ForeignCountryMember_LZNCNc3oqkaYk0GD8cCD-Q"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:IncomeTaxAuthorityAxis">us-gaap:ForeignCountryMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_lH4wNtbzakqPcd6ckinJqQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:CommonStockMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_EsdRKrqD4k-3NlElNbOJzw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:CommonStockMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2020_To_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_b3_MyPjPJEuMPgmth1uxkg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:CommonStockMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-01-01</xbrli:startDate><xbrli:endDate>2020-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_AjFsWLZVwUSPAFzzrfVXXA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:RetainedEarningsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_c49gXsTVI0-hQUvNBpS1BA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AdditionalPaidInCapitalMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedTranslationAdjustmentMember_0I3e07cQjke7GCQzAtl5VA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedTranslationAdjustmentMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_W3Ea7PTEU0qeOccl5h-Srw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedOtherComprehensiveIncomeMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedNetUnrealizedInvestmentGainLossMember_zDMfp5ATokeUuBj2WfXGIw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedNetUnrealizedInvestmentGainLossMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2021_srt_CumulativeEffectPeriodOfAdoptionAxis_srt_CumulativeEffectPeriodOfAdoptionAdjustmentMember_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_yZM7DSF3z0K-i64XpySzBw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:CumulativeEffectPeriodOfAdoptionAxis">srt:CumulativeEffectPeriodOfAdoptionAdjustmentMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:RetainedEarningsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2021_srt_CumulativeEffectPeriodOfAdoptionAxis_srt_CumulativeEffectPeriodOfAdoptionAdjustmentMember_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_kNjVzlQSg0uzfUcwSQuPow"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:CumulativeEffectPeriodOfAdoptionAxis">srt:CumulativeEffectPeriodOfAdoptionAdjustmentMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AdditionalPaidInCapitalMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_AAuYcTUfMEqGriZQdvFnlA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:RetainedEarningsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_R2aUd4k_kkmjiEC4UStAuQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AdditionalPaidInCapitalMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedTranslationAdjustmentMember_M2qUOBZtoUGAvnzy-b8yrg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedTranslationAdjustmentMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_XMi8hyEBWUaztLhyei_Ajw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedOtherComprehensiveIncomeMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedNetUnrealizedInvestmentGainLossMember_owXYuMxjnkaLDITLeHQMFw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedNetUnrealizedInvestmentGainLossMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2021_srt_CumulativeEffectPeriodOfAdoptionAxis_srt_CumulativeEffectPeriodOfAdoptionAdjustmentMember_olZlxpGXwkeNK-H39adOaQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:CumulativeEffectPeriodOfAdoptionAxis">srt:CumulativeEffectPeriodOfAdoptionAdjustmentMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_0x6mjJDzwkeVrCrlQkEmCQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:RetainedEarningsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2020-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_S2MHmP-MGkydd4GudaNU8w"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AdditionalPaidInCapitalMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2020-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedTranslationAdjustmentMember_Gkvk-v_CWEK1-pmx4K0LPQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedTranslationAdjustmentMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2020-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_gKPjwCmvOEeoy03lBe0YKg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedOtherComprehensiveIncomeMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2020-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedNetUnrealizedInvestmentGainLossMember_pEhKOgUXxEqXMO3PxGIyPg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedNetUnrealizedInvestmentGainLossMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2020-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2019_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_xa9r4bxjU0e7LxknEMtNmw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:RetainedEarningsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2019-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2019_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_hM4dV8KvL0uccrphKnYC9g"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AdditionalPaidInCapitalMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2019-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2019_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedTranslationAdjustmentMember_GAP5ncKi9kmzPvjWaKXagA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedTranslationAdjustmentMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2019-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2019_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_ZFKrEu3jd0CjuFXPNSSC8w"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedOtherComprehensiveIncomeMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2019-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2019_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedNetUnrealizedInvestmentGainLossMember_sFc0HafvrE2TNhcLUDaltg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedNetUnrealizedInvestmentGainLossMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2019-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_PCxiZFdafEavDRCUIhislQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:CommonStockMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_d0Nvoz2UTkSF8oUdDQFNnA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:CommonStockMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_df8hXeatnEeovE4A6pJyuw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:CommonStockMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2020-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2019_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_FsmAawc2DEOmzDOqP6upWw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:CommonStockMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2019-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis_veco_RangeOfExercisePricesRangeTwoMember_kUyaaMwSLUahJa3avR2z4g"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis">veco:RangeOfExercisePricesRangeTwoMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis_veco_RangeOfExercisePricesRangeOneMember_tsyWffx4okuNJ8gZKbNjkA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis">veco:RangeOfExercisePricesRangeOneMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis_veco_RangeOfExercisePricesRangeTwoMember_tOsQF6qFH0-wtgbEWVpMWA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis">veco:RangeOfExercisePricesRangeTwoMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis_veco_RangeOfExercisePricesRangeOneMember_Z8mabksjVk62od0X5bnV1A"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis">veco:RangeOfExercisePricesRangeOneMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2016_To_12_31_2016_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_M491c-YOEUaCGZ8wIQXStA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:PlanNameAxis">veco:EmployeeStockPurchasePlan2016Member</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2016-01-01</xbrli:startDate><xbrli:endDate>2016-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember_us-gaap_PlanNameAxis_veco_StockIncentivePlan2010Member_umNhgs6SGESOzePloVCePA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:EmployeeStockOptionMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:PlanNameAxis">veco:StockIncentivePlan2010Member</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember_us-gaap_PlanNameAxis_veco_InducementStockIncentivePlan2013Member_Dy-7OenGQEq3eD3mafXOSg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:EmployeeStockOptionMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:PlanNameAxis">veco:InducementStockIncentivePlan2013Member</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2013_us-gaap_PlanNameAxis_veco_InducementStockIncentivePlan2013Member_3P6TBIDpNUGgRvFNIHqw5A"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:PlanNameAxis">veco:InducementStockIncentivePlan2013Member</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2013-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2016_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_aYWHgq11KEuoBBNEV64pyQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:PlanNameAxis">veco:EmployeeStockPurchasePlan2016Member</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2016-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_AwardTypeAxis_veco_RsuAndPsuAwardsMember_us-gaap_PlanNameAxis_veco_StockIncentivePlan2010Member_d6-JRODi8Ee6TSSKS1-eFQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">veco:RsuAndPsuAwardsMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:PlanNameAxis">veco:StockIncentivePlan2010Member</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_us-gaap_PlanNameAxis_veco_InducementStockIncentivePlan2013Member_wX7fHqCCNUmtAt7fofhKzQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:RestrictedStockUnitsRSUMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:PlanNameAxis">veco:InducementStockIncentivePlan2013Member</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_srt_RangeAxis_srt_MinimumMember_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember_us-gaap_PlanNameAxis_veco_StockIncentivePlan2010Member_xoqmI5-NBU2aLrJgxZ3q3g"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:RangeAxis">srt:MinimumMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:EmployeeStockOptionMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:PlanNameAxis">veco:StockIncentivePlan2010Member</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_srt_RangeAxis_srt_MaximumMember_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember_us-gaap_PlanNameAxis_veco_StockIncentivePlan2010Member_7iPX9cDEzUW57ygkUGNNOA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:RangeAxis">srt:MaximumMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:EmployeeStockOptionMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:PlanNameAxis">veco:StockIncentivePlan2010Member</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_ZGrU6273SEWauTYHKq94ow"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">veco:RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2021_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_90kQ0UAU_kCEBzwtbQLOCw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">veco:RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2020_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_043gFp_PqUWzlpLJIf2xsg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">veco:RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2020-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2019_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_BAc3dgLAJEiIVBNN2-jYYA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">veco:RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2019-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_us-gaap_AwardTypeAxis_veco_PerformanceShareUnitsMarketConditionsMember_2WTDqDHGgEGxwUPxh_rK1w"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">veco:PerformanceShareUnitsMarketConditionsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_12_31_2021_us-gaap_AwardTypeAxis_veco_PerformanceShareUnitsMarketConditionsMember_31uAlkHF1UGSOQxqujb7zQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">veco:PerformanceShareUnitsMarketConditionsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2020_To_12_31_2020_us-gaap_AwardTypeAxis_veco_PerformanceShareUnitsMarketConditionsMember_VTNsOTcWBEmsOsvPaWiQTg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">veco:PerformanceShareUnitsMarketConditionsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-01-01</xbrli:startDate><xbrli:endDate>2020-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2013_To_12_31_2013_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_us-gaap_PlanNameAxis_veco_InducementStockIncentivePlan2013Member_UacULr7ikES2tUIYrk0hFQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:RestrictedStockUnitsRSUMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:PlanNameAxis">veco:InducementStockIncentivePlan2013Member</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2013-01-01</xbrli:startDate><xbrli:endDate>2013-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_4KQ7EGE5pECpx0QANzsn2w"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">veco:RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_12_31_2021_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_eoq0ExuN80uwK4EJucyneQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">veco:RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2020_To_12_31_2020_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_5_DVb1GcQUG45VQebdvm7w"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">veco:RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-01-01</xbrli:startDate><xbrli:endDate>2020-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_srt_RangeAxis_srt_MinimumMember_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsAndRestrictedStockUnitsMember_us-gaap_PlanNameAxis_veco_StockIncentivePlan2010Member_8EaDxBLlOEKvfMX15uUWaw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:RangeAxis">srt:MinimumMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">veco:RestrictedStockAwardsAndRestrictedStockUnitsMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:PlanNameAxis">veco:StockIncentivePlan2010Member</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_srt_RangeAxis_srt_MaximumMember_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsAndRestrictedStockUnitsMember_us-gaap_PlanNameAxis_veco_StockIncentivePlan2010Member_ZhJJnDp8d0OLVtHUE1soLw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:RangeAxis">srt:MaximumMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">veco:RestrictedStockAwardsAndRestrictedStockUnitsMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:PlanNameAxis">veco:StockIncentivePlan2010Member</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember_us-gaap_PlanNameAxis_veco_StockIncentivePlan2010Member_EIavdaQ05k2CdP7S8ASlEQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:EmployeeStockOptionMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:PlanNameAxis">veco:StockIncentivePlan2010Member</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_srt_RangeAxis_srt_MinimumMember_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_C24Z8a4FqkeFDK2d2d9hYg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:RangeAxis">srt:MinimumMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">veco:RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_srt_RangeAxis_srt_MaximumMember_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_03Onf4LpQEe7Cc3IYJdxLg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:RangeAxis">srt:MaximumMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">veco:RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2013_To_12_31_2013_srt_RangeAxis_srt_MinimumMember_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_us-gaap_PlanNameAxis_veco_InducementStockIncentivePlan2013Member_PEuA9XZyfU-Z-u_scIxdGQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:RangeAxis">srt:MinimumMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:RestrictedStockUnitsRSUMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:PlanNameAxis">veco:InducementStockIncentivePlan2013Member</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2013-01-01</xbrli:startDate><xbrli:endDate>2013-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2013_To_12_31_2013_srt_RangeAxis_srt_MaximumMember_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_us-gaap_PlanNameAxis_veco_InducementStockIncentivePlan2013Member_QVXVwOJ3fUqZMdTJZ0TtAg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:RangeAxis">srt:MaximumMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:RestrictedStockUnitsRSUMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:PlanNameAxis">veco:InducementStockIncentivePlan2013Member</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2013-01-01</xbrli:startDate><xbrli:endDate>2013-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2013_To_12_31_2013_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember_us-gaap_PlanNameAxis_veco_InducementStockIncentivePlan2013Member_sLxW-wtGPkeJVSB0u2dLjg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:EmployeeStockOptionMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:PlanNameAxis">veco:InducementStockIncentivePlan2013Member</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2013-01-01</xbrli:startDate><xbrli:endDate>2013-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_srt_RangeAxis_srt_MinimumMember_us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionStartDateAxis_veco_cnst_2024-01-01_3OL-sQzaTEOOG3d6jcbkGg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:RangeAxis">srt:MinimumMember</xbrldi:explicitMember><xbrldi:typedMember dimension="us-gaap:RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionStartDateAxis"><us-gaap:RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionStartDateAxis.domain>2024-01-01</us-gaap:RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionStartDateAxis.domain></xbrldi:typedMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_srt_RangeAxis_srt_MaximumMember_us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionStartDateAxis_veco_cnst_2024-01-01_BZqaswuaTU6Gg2uzA8NeVw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:RangeAxis">srt:MaximumMember</xbrldi:explicitMember><xbrldi:typedMember dimension="us-gaap:RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionStartDateAxis"><us-gaap:RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionStartDateAxis.domain>2024-01-01</us-gaap:RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionStartDateAxis.domain></xbrldi:typedMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionStartDateAxis_veco_cnst_2023-01-01_x-uik2mTUUOaGbc3btd01g"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:typedMember dimension="us-gaap:RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionStartDateAxis"><us-gaap:RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionStartDateAxis.domain>2023-01-01</us-gaap:RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionStartDateAxis.domain></xbrldi:typedMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_srt_RangeAxis_srt_MinimumMember_iF5wa-z6u0mt0pln3ZRKEw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:RangeAxis">srt:MinimumMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_srt_ProductOrServiceAxis_veco_SemiconductorMember_9PJiZcYx8keIpEVWmTevwA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">veco:SemiconductorMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_srt_ProductOrServiceAxis_veco_ScientificAndOtherMember_R82epki4m0O2R4lYzbFB9A"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">veco:ScientificAndOtherMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_srt_StatementGeographicalAxis_veco_RestOfWorldMember_VAzisHSCx0-DlDvmloB2xw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">veco:RestOfWorldMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_srt_ProductOrServiceAxis_veco_DataStorageMember_ohlZC8GlDkOKwTiD8wpwUw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">veco:DataStorageMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_srt_ProductOrServiceAxis_veco_CompoundSemiconductorMember_LdTGFm08V0K1-4URhxYb-w"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">veco:CompoundSemiconductorMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_srt_StatementGeographicalAxis_veco_AsiaPacificExcludingChinaMember_7p5vq41yVkK3tUpkfkCrQA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">veco:AsiaPacificExcludingChinaMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_srt_StatementGeographicalAxis_us-gaap_EMEAMember_Xd-c8lKXMkGwam6POJvgSQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">us-gaap:EMEAMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_srt_StatementGeographicalAxis_country_US_Iqq-3Yh3o0KOcOsQuuWFnw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">country:US</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_srt_StatementGeographicalAxis_country_CN_QBoqba6p3E65LEV6R7MTsQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">country:CN</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_12_31_2021_srt_ProductOrServiceAxis_veco_SemiconductorMember_YkhDbPkawEiyjB3fK4wRQw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">veco:SemiconductorMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_12_31_2021_srt_ProductOrServiceAxis_veco_ScientificAndOtherMember_Dooe7CVpc0a8KYAWnA2ecw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">veco:ScientificAndOtherMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_12_31_2021_srt_StatementGeographicalAxis_veco_RestOfWorldMember_z2CDDUi9cEmCQUu5NwxCRg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">veco:RestOfWorldMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_12_31_2021_srt_ProductOrServiceAxis_veco_DataStorageMember_WuQRBW8HokiCULZhKHrZDg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">veco:DataStorageMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_12_31_2021_srt_ProductOrServiceAxis_veco_CompoundSemiconductorMember_IAiei5YbJEyH8DppQEM5_w"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">veco:CompoundSemiconductorMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_12_31_2021_srt_StatementGeographicalAxis_veco_AsiaPacificExcludingChinaMember_W3DfwYqTJUid6go4WOTUwQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">veco:AsiaPacificExcludingChinaMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_12_31_2021_srt_StatementGeographicalAxis_us-gaap_EMEAMember_VfxBGC5wCkm5_qWrjZmgPA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">us-gaap:EMEAMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_12_31_2021_srt_StatementGeographicalAxis_country_US_Qk0pMUh3A0imrH2rqxssEg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">country:US</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_12_31_2021_srt_StatementGeographicalAxis_country_CN_ZvsRp4BDo06Ko490CiqQIg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">country:CN</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2020_To_12_31_2020_srt_ProductOrServiceAxis_veco_SemiconductorMember_GKacZn4rvEyU0M6kjYWAOA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">veco:SemiconductorMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-01-01</xbrli:startDate><xbrli:endDate>2020-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2020_To_12_31_2020_srt_ProductOrServiceAxis_veco_ScientificAndOtherMember_-7m243SMR0udkXGnjcwNSg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">veco:ScientificAndOtherMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-01-01</xbrli:startDate><xbrli:endDate>2020-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2020_To_12_31_2020_srt_StatementGeographicalAxis_veco_RestOfWorldMember_igromS0r10qJ0F2D-OutxA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">veco:RestOfWorldMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-01-01</xbrli:startDate><xbrli:endDate>2020-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2020_To_12_31_2020_srt_ProductOrServiceAxis_veco_DataStorageMember_drFJLf9L9kq6PLGRMBLwHQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">veco:DataStorageMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-01-01</xbrli:startDate><xbrli:endDate>2020-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2020_To_12_31_2020_srt_ProductOrServiceAxis_veco_CompoundSemiconductorMember_19iFaF75yECz3rBkCfAGpg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">veco:CompoundSemiconductorMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-01-01</xbrli:startDate><xbrli:endDate>2020-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2020_To_12_31_2020_srt_StatementGeographicalAxis_veco_AsiaPacificExcludingChinaMember_Jr8Bxw0HLkeseR2GeImE0A"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">veco:AsiaPacificExcludingChinaMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-01-01</xbrli:startDate><xbrli:endDate>2020-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2020_To_12_31_2020_srt_StatementGeographicalAxis_us-gaap_EMEAMember_cNbtUrMBU02kQ3oY3LZf_Q"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">us-gaap:EMEAMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-01-01</xbrli:startDate><xbrli:endDate>2020-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2020_To_12_31_2020_srt_StatementGeographicalAxis_country_US_nlfJOecro0qR-ydQH9T88Q"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">country:US</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-01-01</xbrli:startDate><xbrli:endDate>2020-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2020_To_12_31_2020_srt_StatementGeographicalAxis_country_CN_mjQ--ouO8Eq8LXzJRXoKMA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">country:CN</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-01-01</xbrli:startDate><xbrli:endDate>2020-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_srt_RangeAxis_srt_MinimumMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_MachineryAndEquipmentMember_kMBqjcmbAUWhgDS4eqCZSg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:RangeAxis">srt:MinimumMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:MachineryAndEquipmentMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_srt_RangeAxis_srt_MinimumMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_LeaseholdImprovementsMember_-_qnf0UG4EOBjZTK_lw7vg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:RangeAxis">srt:MinimumMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:LeaseholdImprovementsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_srt_RangeAxis_srt_MinimumMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_BuildingAndBuildingImprovementsMember_sH6SXLqfs0K0vPSkiEYXcw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:RangeAxis">srt:MinimumMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:BuildingAndBuildingImprovementsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_srt_RangeAxis_srt_MaximumMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_MachineryAndEquipmentMember_r-HNrvY-bUGV71aKV5fymw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:RangeAxis">srt:MaximumMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:MachineryAndEquipmentMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_srt_RangeAxis_srt_MaximumMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_LeaseholdImprovementsMember_IfXaVPWhgUKzN7Eq2Wfp1A"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:RangeAxis">srt:MaximumMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:LeaseholdImprovementsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_srt_RangeAxis_srt_MaximumMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_BuildingAndBuildingImprovementsMember_qBmASH3-q0uEyi5qE_Tsqw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:RangeAxis">srt:MaximumMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:BuildingAndBuildingImprovementsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_12_31_2021_srt_RangeAxis_srt_MinimumMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_MachineryAndEquipmentMember_G3uFA259L0mcqn0fc993rQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:RangeAxis">srt:MinimumMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:MachineryAndEquipmentMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_12_31_2021_srt_RangeAxis_srt_MinimumMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_LeaseholdImprovementsMember_9k5QUqwNeE2-rhO-SIBHOg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:RangeAxis">srt:MinimumMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:LeaseholdImprovementsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_12_31_2021_srt_RangeAxis_srt_MinimumMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_BuildingAndBuildingImprovementsMember_Gidmj6LUsky3lImrGRLu6Q"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:RangeAxis">srt:MinimumMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:BuildingAndBuildingImprovementsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_12_31_2021_srt_RangeAxis_srt_MaximumMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_MachineryAndEquipmentMember_nLISzPEN7Ey7mFYy9KVbUA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:RangeAxis">srt:MaximumMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:MachineryAndEquipmentMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_12_31_2021_srt_RangeAxis_srt_MaximumMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_LeaseholdImprovementsMember_AMkmoruyOku0FoWmUcFIog"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:RangeAxis">srt:MaximumMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:LeaseholdImprovementsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_12_31_2021_srt_RangeAxis_srt_MaximumMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_BuildingAndBuildingImprovementsMember_MElevU13P0uYWw7IL8VnOA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:RangeAxis">srt:MaximumMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:BuildingAndBuildingImprovementsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_srt_StatementGeographicalAxis_veco_AsiaPacificExcludingChinaMember_UvfACFZGrUypPpEdHOipMQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">veco:AsiaPacificExcludingChinaMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_srt_StatementGeographicalAxis_us-gaap_EMEAMember_haoOD1W3VEefYffMIxwz_w"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">us-gaap:EMEAMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_srt_StatementGeographicalAxis_country_US_9rx8lXGp-UePPYpikE4BwQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">country:US</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_srt_StatementGeographicalAxis_country_CN_qymy7_UBkEC6VBQbt2XEbw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">country:CN</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2021_srt_StatementGeographicalAxis_veco_AsiaPacificExcludingChinaMember_HXJxHtMkW0aGxszM6SJ1uw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">veco:AsiaPacificExcludingChinaMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2021_srt_StatementGeographicalAxis_us-gaap_EMEAMember_-2eMs00UmU-xtabNFZCl8Q"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">us-gaap:EMEAMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2021_srt_StatementGeographicalAxis_country_US_T55RSt3DbUW94GG58r4txw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">country:US</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2021_srt_StatementGeographicalAxis_country_CN_tdldCDp8U0SPe2xlhi8Pdg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">country:CN</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2020_srt_StatementGeographicalAxis_veco_AsiaPacificExcludingChinaMember_aAB8ukG5VEimziKhX1v34w"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">veco:AsiaPacificExcludingChinaMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2020-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2020_srt_StatementGeographicalAxis_us-gaap_EMEAMember_GvpCorI590OKQRjAeF3GNg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">us-gaap:EMEAMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2020-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2020_srt_StatementGeographicalAxis_country_US_IFBHHJD4ZEekIQ5l9IjVqw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">country:US</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2020-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2020_srt_StatementGeographicalAxis_country_CN_YpEyHYcZokyQEdtnzsqn2g"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">country:CN</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2020-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_MachineryAndEquipmentMember_gBku79yeSkSj40YSYM5HsA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:MachineryAndEquipmentMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_LeaseholdImprovementsMember_l9lhAAr_XU-dsDhEzU-wsg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:LeaseholdImprovementsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_LandMember_aU5K4QzUQU6kgnHxkhVOVg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:LandMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_BuildingAndBuildingImprovementsMember_fnnxFZqggEeKD96T_6ie3w"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:BuildingAndBuildingImprovementsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2021_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_MachineryAndEquipmentMember_0wMvYMJgs0WxqMD1vbmumg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:MachineryAndEquipmentMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2021_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_LeaseholdImprovementsMember_A0KFx0NQCUamYDFD5ZwOIA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:LeaseholdImprovementsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2021_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_LandMember_A8AKF2WQ9kC4PFl5qoLOBQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:LandMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2021_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_BuildingAndBuildingImprovementsMember_7HTS-zmtz06SZpVZiNT4Aw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:BuildingAndBuildingImprovementsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_36M02lVMMkqklha7FYtN3w"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:PlanNameAxis">veco:EmployeeStockPurchasePlan2016Member</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_12_31_2021_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_RBotXgElPUCGCmWLRr8SCg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:PlanNameAxis">veco:EmployeeStockPurchasePlan2016Member</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2020_To_12_31_2020_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_vYzL5bBxa0O1wNbTJcZO6Q"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:PlanNameAxis">veco:EmployeeStockPurchasePlan2016Member</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-01-01</xbrli:startDate><xbrli:endDate>2020-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_31_2023_To_1_31_2023_us-gaap_BusinessAcquisitionAxis_veco_EpiluvacAbMember_us-gaap_SubsequentEventTypeAxis_us-gaap_SubsequentEventMember_azBhPTo7jkCpUE7FbJTfEg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:BusinessAcquisitionAxis">veco:EpiluvacAbMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:SubsequentEventTypeAxis">us-gaap:SubsequentEventMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2023-01-31</xbrli:startDate><xbrli:endDate>2023-01-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_5_18_2020_To_5_18_2020_82r_aymnikqSCiP3vs1ZlA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier></xbrli:entity><xbrli:period><xbrli:startDate>2020-05-18</xbrli:startDate><xbrli:endDate>2020-05-18</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedTranslationAdjustmentMember_lCvs1WPXXECT-J60wmaSsw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedTranslationAdjustmentMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_6zlsan7E70SaZfNDKUZFwQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedOtherComprehensiveIncomeMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedNetUnrealizedInvestmentGainLossMember_xCEQi8wJlEmZsaR5Kh6uTA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedNetUnrealizedInvestmentGainLossMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedTranslationAdjustmentMember_EalXQOx570OxsR04zKZb-A"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedTranslationAdjustmentMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_WIAntBTv5kumJYPuwFnHEA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedOtherComprehensiveIncomeMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedNetUnrealizedInvestmentGainLossMember_ZWPV2F-CdUyFpf6zSDJ9Rg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedNetUnrealizedInvestmentGainLossMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2020_To_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedTranslationAdjustmentMember_stjnN33fGU-wMsLEDFoL4w"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedTranslationAdjustmentMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-01-01</xbrli:startDate><xbrli:endDate>2020-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2020_To_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_iUgMnC3EVk2SSaJC7ml4hA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedOtherComprehensiveIncomeMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-01-01</xbrli:startDate><xbrli:endDate>2020-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2020_To_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedNetUnrealizedInvestmentGainLossMember_EwwqNhH-8km-3wAI-bkLQA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedNetUnrealizedInvestmentGainLossMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-01-01</xbrli:startDate><xbrli:endDate>2020-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_-AC2PNT3C02sUwYL2KHt_A"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:RetainedEarningsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_NlKiDl7K_kWxshosVGTXvQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:RetainedEarningsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2020_To_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_JAI5BnxJn0yyDx_dSs8J2A"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:RetainedEarningsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-01-01</xbrli:startDate><xbrli:endDate>2020-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_8_1_2018_To_8_31_2018_srt_LitigationCaseAxis_veco_UltratechAcquisitionLitigationMember_dwYL9J2gC0Oab_FWaninlw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:LitigationCaseAxis">veco:UltratechAcquisitionLitigationMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2018-08-01</xbrli:startDate><xbrli:endDate>2018-08-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="As_Of_11_17_2020_jAUfBON7oEmWBbqJUWrC9A"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier></xbrli:entity><xbrli:period><xbrli:instant>2020-11-17</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_5_18_2020_QRmcZr2GXU2znfxw1ngsUg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier></xbrli:entity><xbrli:period><xbrli:instant>2020-05-18</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_1_10_2017_mE_NZqLn50uO237u-S13xA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier></xbrli:entity><xbrli:period><xbrli:instant>2017-01-10</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="Duration_11_1_2022_To_11_30_2022_srt_LitigationCaseAxis_veco_DerivativeActionMember_dS7_yQ62XkKzCXHyd6iZNQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:LitigationCaseAxis">veco:DerivativeActionMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-11-01</xbrli:startDate><xbrli:endDate>2022-11-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_10_1_2021_To_10_31_2021_srt_LitigationCaseAxis_veco_WoltherActionMember_G9mmKKuHJUKEDOgkWSO47Q"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:LitigationCaseAxis">veco:WoltherActionMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-10-01</xbrli:startDate><xbrli:endDate>2021-10-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_12_16_2021_To_12_16_2021_srt_RangeAxis_srt_MinimumMember_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021Member_Sn3H0cYnKEqQh6tKahzz0A"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:RangeAxis">srt:MinimumMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:RevolvingCreditFacilityDecember2021Member</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-12-16</xbrli:startDate><xbrli:endDate>2021-12-16</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_12_16_2021_To_12_16_2021_srt_RangeAxis_srt_MaximumMember_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021Member_UhYqivVxpkm2yqOX6N-eQw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:RangeAxis">srt:MaximumMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:RevolvingCreditFacilityDecember2021Member</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-12-16</xbrli:startDate><xbrli:endDate>2021-12-16</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_16_2021_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021Member_ddwT9iX1z0adI_mlFlsfeg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:RevolvingCreditFacilityDecember2021Member</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-12-16</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_16_2021_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021LetterOfCreditMember_QSDuY2Ej4keYjyFiaLxdzA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:RevolvingCreditFacilityDecember2021LetterOfCreditMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-12-16</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021Member_D1zUCvzuukuCwXIz58-u7A"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:RevolvingCreditFacilityDecember2021Member</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_12_31_2021_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021Member_zEz5_eyHg06Zrt2D76rTpw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:RevolvingCreditFacilityDecember2021Member</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel2Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_USGovernmentAgenciesDebtSecuritiesMember_xxaAnx1Ji0KImuzsRiQSeQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:FairValueByFairValueHierarchyLevelAxis">us-gaap:FairValueInputsLevel2Member</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:FinancialInstrumentAxis">us-gaap:USGovernmentAgenciesDebtSecuritiesMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel2Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_CorporateDebtSecuritiesMember_pCHXtSXunUCFoLNO295FNQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:FairValueByFairValueHierarchyLevelAxis">us-gaap:FairValueInputsLevel2Member</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:FinancialInstrumentAxis">us-gaap:CorporateDebtSecuritiesMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel2Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_CommercialPaperMember_E2AAQ-0KTE6yl5sLci37yw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:FairValueByFairValueHierarchyLevelAxis">us-gaap:FairValueInputsLevel2Member</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:FinancialInstrumentAxis">us-gaap:CommercialPaperMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_USTreasurySecuritiesMember_gqJUY0xQBEKj-8bR__2AhA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:FairValueByFairValueHierarchyLevelAxis">us-gaap:FairValueInputsLevel1Member</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:FinancialInstrumentAxis">us-gaap:USTreasurySecuritiesMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_USTreasurySecuritiesMember_9ZKAp20askai2yy7kwBjQA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:FinancialInstrumentAxis">us-gaap:USTreasurySecuritiesMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_USGovernmentAgenciesDebtSecuritiesMember_UBRtR4MHAE6IwJXU-LOpsg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:FinancialInstrumentAxis">us-gaap:USGovernmentAgenciesDebtSecuritiesMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_CorporateDebtSecuritiesMember_tOjwouEBSkebr7L2IwFAlg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:FinancialInstrumentAxis">us-gaap:CorporateDebtSecuritiesMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_CommercialPaperMember_aCCI2RshmE-lyrQdT3Mkkw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:FinancialInstrumentAxis">us-gaap:CommercialPaperMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel2Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_MpQSvERYmk2F8LCAdvsJeQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:FairValueByFairValueHierarchyLevelAxis">us-gaap:FairValueInputsLevel2Member</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_slQOe3zyMUymTHQU819sJQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:FairValueByFairValueHierarchyLevelAxis">us-gaap:FairValueInputsLevel1Member</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_S6bYObjavkCTbU5xddLx7g"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2021_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel2Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_USGovernmentAgenciesDebtSecuritiesMember_0qo4lngQLE67OuHA6y1wdw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:FairValueByFairValueHierarchyLevelAxis">us-gaap:FairValueInputsLevel2Member</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:FinancialInstrumentAxis">us-gaap:USGovernmentAgenciesDebtSecuritiesMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2021_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel2Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_CorporateDebtSecuritiesMember_GL57sZXyr0aGVeV1asM5mg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:FairValueByFairValueHierarchyLevelAxis">us-gaap:FairValueInputsLevel2Member</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:FinancialInstrumentAxis">us-gaap:CorporateDebtSecuritiesMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2021_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel2Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_CommercialPaperMember_E29zWH3490-7kJgvF-1hDg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:FairValueByFairValueHierarchyLevelAxis">us-gaap:FairValueInputsLevel2Member</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:FinancialInstrumentAxis">us-gaap:CommercialPaperMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2021_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_USTreasurySecuritiesMember_Gjv_stk2ZEqEp1eNGnsQ3w"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:FairValueByFairValueHierarchyLevelAxis">us-gaap:FairValueInputsLevel1Member</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:FinancialInstrumentAxis">us-gaap:USTreasurySecuritiesMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2021_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_USTreasurySecuritiesMember_YW8DFld3rUeEJWklgEoDkQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:FinancialInstrumentAxis">us-gaap:USTreasurySecuritiesMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2021_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_USGovernmentAgenciesDebtSecuritiesMember_6yQv3e_ka0i1bTkFTYicJg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:FinancialInstrumentAxis">us-gaap:USGovernmentAgenciesDebtSecuritiesMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2021_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_CorporateDebtSecuritiesMember_eczwLoIqY06OGH6ptbktWg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:FinancialInstrumentAxis">us-gaap:CorporateDebtSecuritiesMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2021_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_CommercialPaperMember_i5JJkpgtSk6kLg_SGNah8A"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:FinancialInstrumentAxis">us-gaap:CommercialPaperMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2021_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel2Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_Fx3H_ZpdrUmlZhkBxxb4ow"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:FairValueByFairValueHierarchyLevelAxis">us-gaap:FairValueInputsLevel2Member</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2021_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_XRUs_X2KUEOrNQc5SrQvag"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:FairValueByFairValueHierarchyLevelAxis">us-gaap:FairValueInputsLevel1Member</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2021_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_8Y4uZzPOeUWzAGMaSM_zrg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_11_5_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_ovfhrTec7EC_2sSmeCBK7w"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:ConvertibleSeniorUnsecuredNotesDue2023Member</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-11-05</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_12_31_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_us-gaap_IncomeStatementLocationAxis_us-gaap_OtherNonoperatingIncomeExpenseMember_aatANL4WzE-Jl_REorgp7g"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:ConvertibleSeniorUnsecuredNotesDue2023Member</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:OtherNonoperatingIncomeExpenseMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_11_11_2020_To_11_11_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_us-gaap_IncomeStatementLocationAxis_us-gaap_OtherNonoperatingIncomeExpenseMember_DYB3CDbyX0u3Uq0DQh2dDg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:ConvertibleSeniorUnsecuredNotesDue2023Member</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:OtherNonoperatingIncomeExpenseMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-11-11</xbrli:startDate><xbrli:endDate>2020-11-11</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_5_18_2020_To_5_18_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_us-gaap_IncomeStatementLocationAxis_us-gaap_OtherNonoperatingIncomeExpenseMember_00m-x6_WfkKT5olXftmhcQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:ConvertibleSeniorUnsecuredNotesDue2023Member</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:OtherNonoperatingIncomeExpenseMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-05-18</xbrli:startDate><xbrli:endDate>2020-05-18</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_10_1_2022_To_12_31_2022_uExZe-pG7kOQct7OU2J4Dg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier></xbrli:entity><xbrli:period><xbrli:startDate>2022-10-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_7_1_2022_To_9_30_2022__p_V5234s0incEWW09mArQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier></xbrli:entity><xbrli:period><xbrli:startDate>2022-07-01</xbrli:startDate><xbrli:endDate>2022-09-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_4_1_2022_To_6_30_2022_4jkIrP3p20amdiLLzhoJbQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier></xbrli:entity><xbrli:period><xbrli:startDate>2022-04-01</xbrli:startDate><xbrli:endDate>2022-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_3_31_2022_0YPX1UiA70qTsEBum79vEw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-03-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TrademarksAndTradeNamesMember_GGXDJQsEwUWFPkGXDENgHA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:FiniteLivedIntangibleAssetsByMajorClassAxis">us-gaap:TrademarksAndTradeNamesMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TechnologyBasedIntangibleAssetsMember_c_0gAxKnfECDwazop899FQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:FiniteLivedIntangibleAssetsByMajorClassAxis">us-gaap:TechnologyBasedIntangibleAssetsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_CustomerRelationshipsMember_yVD0ya2vVk2nYytNKf5htQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:FiniteLivedIntangibleAssetsByMajorClassAxis">us-gaap:CustomerRelationshipsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TrademarksAndTradeNamesMember_K82mRsCyb0GBUN-LnYfN8Q"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:FiniteLivedIntangibleAssetsByMajorClassAxis">us-gaap:TrademarksAndTradeNamesMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TechnologyBasedIntangibleAssetsMember_PHfPLb4yx0-K74vdVH6uRg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:FiniteLivedIntangibleAssetsByMajorClassAxis">us-gaap:TechnologyBasedIntangibleAssetsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_OtherIntangibleAssetsMember_OSD-9IgK00iI_MRgFr83eg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:FiniteLivedIntangibleAssetsByMajorClassAxis">us-gaap:OtherIntangibleAssetsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_CustomerRelationshipsMember_dwE4sMbj40KrNc4QqruMbQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:FiniteLivedIntangibleAssetsByMajorClassAxis">us-gaap:CustomerRelationshipsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2021_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TrademarksAndTradeNamesMember_as4jILWK1k2E1dfNQhh-Hw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:FiniteLivedIntangibleAssetsByMajorClassAxis">us-gaap:TrademarksAndTradeNamesMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2021_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TechnologyBasedIntangibleAssetsMember_lmu-TREvc0aWZRgdlyu2XA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:FiniteLivedIntangibleAssetsByMajorClassAxis">us-gaap:TechnologyBasedIntangibleAssetsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2021_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_OtherIntangibleAssetsMember_Wq5eHdCnDUSHppKmNim6Mg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:FiniteLivedIntangibleAssetsByMajorClassAxis">us-gaap:OtherIntangibleAssetsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2021_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_CustomerRelationshipsMember_h7b9anFZuE2SoSFkMvCcXQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:FiniteLivedIntangibleAssetsByMajorClassAxis">us-gaap:CustomerRelationshipsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="Duration_11_5_2021_To_11_5_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_gRCscxrjLkmeVdBuAV6ddA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:ConvertibleSeniorUnsecuredNotesDue2023Member</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-11-05</xbrli:startDate><xbrli:endDate>2021-11-05</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_11_11_2020_To_11_11_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_YDagF4J520ede_9zdqDMmg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:ConvertibleSeniorUnsecuredNotesDue2023Member</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-11-11</xbrli:startDate><xbrli:endDate>2020-11-11</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_5_18_2020_To_5_18_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_5zzHqMvYcEu0fv8z6RanBg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:ConvertibleSeniorUnsecuredNotesDue2023Member</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-05-18</xbrli:startDate><xbrli:endDate>2020-05-18</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_srt_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_veco_OtherNonMarketableInvestmentMember_2yVI4D-Nv0Oahbko0Rcd7w"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis">veco:OtherNonMarketableInvestmentMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2021_srt_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_veco_OtherNonMarketableInvestmentMember_x1RDLI5eNkKRCAhimMtNXg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis">veco:OtherNonMarketableInvestmentMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardMember_bM7k1MJbA06-xsn2pQgBrA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">veco:RestrictedStockAwardMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_us-gaap_AwardTypeAxis_veco_PerformanceShareUnitsMember_nrpb8S7W7E6vrWAnnBvCPQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">veco:PerformanceShareUnitsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_g4-6bRHU_UGEBnDrz3qD9A"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:RestrictedStockUnitsRSUMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardMember_sMXHOamcIkWEmJhAjaFhWw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">veco:RestrictedStockAwardMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_AwardTypeAxis_veco_PerformanceShareUnitsMember_efDAc13uhkKFYLYN7MeLnw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">veco:PerformanceShareUnitsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_q9Ip_ln4dEC9Vz5OiwByQg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:RestrictedStockUnitsRSUMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_srt_StatementScenarioAxis_veco_DifferenceBetweenGuidanceInEffectBeforeAndAfterAccountingStandardsUpdate202006Member_us-gaap_AdjustmentsForNewAccountingPronouncementsAxis_us-gaap_AccountingStandardsUpdate202006Member_QPnJy7taY0e2YR7TvUMS8g"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:StatementScenarioAxis">veco:DifferenceBetweenGuidanceInEffectBeforeAndAfterAccountingStandardsUpdate202006Member</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:AdjustmentsForNewAccountingPronouncementsAxis">us-gaap:AccountingStandardsUpdate202006Member</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_srt_CumulativeEffectPeriodOfAdoptionAxis_srt_CumulativeEffectPeriodOfAdoptionAdjustedBalanceMember_us-gaap_AdjustmentsForNewAccountingPronouncementsAxis_us-gaap_AccountingStandardsUpdate202006Member_2gUZyYVNDkWsrP9u9uAsPg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:CumulativeEffectPeriodOfAdoptionAxis">srt:CumulativeEffectPeriodOfAdoptionAdjustedBalanceMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:AdjustmentsForNewAccountingPronouncementsAxis">us-gaap:AccountingStandardsUpdate202006Member</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_srt_StatementScenarioAxis_veco_CalculatedUnderGuidanceInEffectBeforeAdoptionOfAccountingStandardsUpdate202006Member_7ScKuEZlbkunzacsANYvKA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:StatementScenarioAxis">veco:CalculatedUnderGuidanceInEffectBeforeAdoptionOfAccountingStandardsUpdate202006Member</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2020_us-gaap_DisposalGroupClassificationAxis_us-gaap_DisposalGroupDisposedOfBySaleNotDiscontinuedOperationsMember_us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsAxis_veco_OneNonCoreProductLineMember_ImUrGQxTIkCP31DP-sVs-Q"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:DisposalGroupClassificationAxis">us-gaap:DisposalGroupDisposedOfBySaleNotDiscontinuedOperationsMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsAxis">veco:OneNonCoreProductLineMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2020-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_srt_RangeAxis_srt_MaximumMember_-IcZsPRCskCthhwH_ZdlKw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:RangeAxis">srt:MaximumMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_IncomeTaxAuthorityAxis_us-gaap_StateAndLocalJurisdictionMember_FJTorzE9E0O2-5w2lG7XTQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:IncomeTaxAuthorityAxis">us-gaap:StateAndLocalJurisdictionMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="Duration_12_16_2021_To_12_16_2021_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021Member_-KOL_4BIDE-MqJoWpDzBfg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:RevolvingCreditFacilityDecember2021Member</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-12-16</xbrli:startDate><xbrli:endDate>2021-12-16</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_e6zIPCidbESUll-ecgx8RA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:ConvertibleSeniorUnsecuredNotesDue2027Member</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_tIX8Lasv8E2B1ACI65359Q"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:ConvertibleSeniorUnsecuredNotesDue2025Member</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_R6ZH9u7Tf0ijR-shdVpjow"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:ConvertibleSeniorUnsecuredNotesDue2023Member</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_srt_RangeAxis_srt_MinimumMember_us-gaap_DebtInstrumentAxis_us-gaap_ConvertibleDebtMember_ABdcmH9T60iabiMQNHpnMw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:RangeAxis">srt:MinimumMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">us-gaap:ConvertibleDebtMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_us-gaap_DebtInstrumentAxis_us-gaap_ConvertibleDebtMember_XQJwNQGip0-4rSyYMzx-Zw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">us-gaap:ConvertibleDebtMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_11_17_2020_To_11_17_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_40oKyNrK80KsJh3vH1tMzQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:ConvertibleSeniorUnsecuredNotesDue2025Member</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-11-17</xbrli:startDate><xbrli:endDate>2020-11-17</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_5_18_2020_To_5_18_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_5Ecfm1aP80Ow_u3X86TuUQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:ConvertibleSeniorUnsecuredNotesDue2027Member</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-05-18</xbrli:startDate><xbrli:endDate>2020-05-18</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_10_2017_To_1_10_2017_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_uuco5aSWq0uhuvDldQHNrg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:ConvertibleSeniorUnsecuredNotesDue2023Member</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2017-01-10</xbrli:startDate><xbrli:endDate>2017-01-10</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="As_Of_11_17_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_zF8UnsN0JEqzHyuktvH1rA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:ConvertibleSeniorUnsecuredNotesDue2025Member</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2020-11-17</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_5_18_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_u4UJ5lnrc0eivAfoRYyQng"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:ConvertibleSeniorUnsecuredNotesDue2027Member</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2020-05-18</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_1_10_2017_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_IWFhTEer-0CSeVpfpU13Ng"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:ConvertibleSeniorUnsecuredNotesDue2023Member</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2017-01-10</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="Duration_12_16_2021_To_12_16_2021_srt_RangeAxis_srt_MinimumMember_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021Member_us-gaap_VariableRateAxis_us-gaap_SecuredOvernightFinancingRateSofrOvernightIndexSwapRateMember_W06gA2KxG0SepRz9gRIbeA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:RangeAxis">srt:MinimumMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:RevolvingCreditFacilityDecember2021Member</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:VariableRateAxis">us-gaap:SecuredOvernightFinancingRateSofrOvernightIndexSwapRateMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-12-16</xbrli:startDate><xbrli:endDate>2021-12-16</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_12_16_2021_To_12_16_2021_srt_RangeAxis_srt_MinimumMember_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021Member_us-gaap_VariableRateAxis_us-gaap_BaseRateMember_9l_m7cLDiECMDSisLkqkyg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:RangeAxis">srt:MinimumMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:RevolvingCreditFacilityDecember2021Member</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:VariableRateAxis">us-gaap:BaseRateMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-12-16</xbrli:startDate><xbrli:endDate>2021-12-16</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_12_16_2021_To_12_16_2021_srt_RangeAxis_srt_MaximumMember_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021Member_us-gaap_VariableRateAxis_us-gaap_SecuredOvernightFinancingRateSofrOvernightIndexSwapRateMember_R5S-gMQe8keYrNuq6wDVag"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:RangeAxis">srt:MaximumMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:RevolvingCreditFacilityDecember2021Member</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:VariableRateAxis">us-gaap:SecuredOvernightFinancingRateSofrOvernightIndexSwapRateMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-12-16</xbrli:startDate><xbrli:endDate>2021-12-16</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_12_16_2021_To_12_16_2021_srt_RangeAxis_srt_MaximumMember_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021Member_us-gaap_VariableRateAxis_us-gaap_BaseRateMember_5s2HMN4pxUOnshOrqA3jAw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:RangeAxis">srt:MaximumMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:RevolvingCreditFacilityDecember2021Member</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:VariableRateAxis">us-gaap:BaseRateMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-12-16</xbrli:startDate><xbrli:endDate>2021-12-16</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_rMWc7QQ050epRT-cmk3YDQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:ConvertibleSeniorUnsecuredNotesDue2027Member</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_ZetZSnUIu0SKEy9vSz2DrA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:ConvertibleSeniorUnsecuredNotesDue2025Member</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_wzCRDkFhQEa0Q4hGaj9ADA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:ConvertibleSeniorUnsecuredNotesDue2023Member</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_srt_MajorCustomersAxis_veco_TopTenCustomersMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_S-7J6nBA20enuSmeS4u47A"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:MajorCustomersAxis">veco:TopTenCustomersMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:AccountsReceivableMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CreditConcentrationRiskMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_srt_MajorCustomersAxis_veco_CustomerFMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_4dGT7A_R9UydroMwKOR-uA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:MajorCustomersAxis">veco:CustomerFMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:AccountsReceivableMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CreditConcentrationRiskMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_12_31_2021_srt_MajorCustomersAxis_veco_TopTenCustomersMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_STb5nYXm7USe8k9Ls-HfDg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:MajorCustomersAxis">veco:TopTenCustomersMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:AccountsReceivableMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CreditConcentrationRiskMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_12_31_2021_srt_MajorCustomersAxis_veco_CustomerDMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_yP78NPy8K0O09X8fBKRsyQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:MajorCustomersAxis">veco:CustomerDMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:AccountsReceivableMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CreditConcentrationRiskMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_12_31_2021_srt_MajorCustomersAxis_veco_CustomerCMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_NXdZ-M0690aCSuYO9gmOnw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:MajorCustomersAxis">veco:CustomerCMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:AccountsReceivableMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CreditConcentrationRiskMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_12_31_2021_srt_MajorCustomersAxis_veco_CustomerBMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_Hivl-4H1CUSQ5oS73bRBSg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:MajorCustomersAxis">veco:CustomerBMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CustomerConcentrationRiskMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_12_31_2021_srt_MajorCustomersAxis_veco_CustomerAMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_xncv0g_nvkqEqtTOvac8gA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:MajorCustomersAxis">veco:CustomerAMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CustomerConcentrationRiskMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_12_31_2021_srt_MajorCustomersAxis_veco_CustomerAMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_KB9uqMrKw0yowdxGLskIdw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:MajorCustomersAxis">veco:CustomerAMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:AccountsReceivableMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CreditConcentrationRiskMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2020_To_12_31_2020_srt_MajorCustomersAxis_veco_CustomerEMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_8a3DkbfigE-Y0KZYUOHMMA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:MajorCustomersAxis">veco:CustomerEMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CustomerConcentrationRiskMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-01-01</xbrli:startDate><xbrli:endDate>2020-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_PlanNameAxis_veco_StockIncentivePlan2010Member_kkhgLAR_vUO7juC-JnEbpw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:PlanNameAxis">veco:StockIncentivePlan2010Member</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_9spIHk5Lj0mk0Fhq0uyLew"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:PlanNameAxis">veco:EmployeeStockPurchasePlan2016Member</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_1_1_2022_us-gaap_AdjustmentsForNewAccountingPronouncementsAxis_us-gaap_AccountingStandardsUpdate202006Member_kuhpVblHeESHna3s4yVELw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:AdjustmentsForNewAccountingPronouncementsAxis">us-gaap:AccountingStandardsUpdate202006Member</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-01-01</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="As_Of_1_1_2022_us-gaap_AdjustmentsForNewAccountingPronouncementsAxis_us-gaap_AccountingStandardsUpdate202006Member_YriApdcwvUG3B-95OCDPfg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:AdjustmentsForNewAccountingPronouncementsAxis">us-gaap:AccountingStandardsUpdate202006Member</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-01-01</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_4_1_2020_us-gaap_AdjustmentsForNewAccountingPronouncementsAxis_us-gaap_AccountingStandardsUpdate201912Member_pNbALjFiLEiNFwxB8zN-cA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:AdjustmentsForNewAccountingPronouncementsAxis">us-gaap:AccountingStandardsUpdate201912Member</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2020-04-01</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2020_JUGLvBeldEeSTj1WqQBVdQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier></xbrli:entity><xbrli:period><xbrli:instant>2020-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2019_dyqJ8hTIuEW6V2L_RveF0A"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier></xbrli:entity><xbrli:period><xbrli:instant>2019-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_1_31_2023_us-gaap_BusinessAcquisitionAxis_veco_EpiluvacAbMember_us-gaap_SubsequentEventTypeAxis_us-gaap_SubsequentEventMember_bd9hW5CYR0a5e-Lpq61haA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:BusinessAcquisitionAxis">veco:EpiluvacAbMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:SubsequentEventTypeAxis">us-gaap:SubsequentEventMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2023-01-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_FinancialInstrumentAxis_us-gaap_CommercialPaperMember_v9BAMIwwwk2Oy_ebY3ejrw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:FinancialInstrumentAxis">us-gaap:CommercialPaperMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2021_us-gaap_FinancialInstrumentAxis_us-gaap_CommercialPaperMember_Q4aGVM4lLEKYgbV0sPLsVg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:FinancialInstrumentAxis">us-gaap:CommercialPaperMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_FinancialInstrumentAxis_us-gaap_USTreasurySecuritiesMember_LradD4ylt0uzAESlET9k1A"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:FinancialInstrumentAxis">us-gaap:USTreasurySecuritiesMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_FinancialInstrumentAxis_us-gaap_USGovernmentAgenciesDebtSecuritiesMember_nuwqJ_OpWE6z8iWOh2BzFg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:FinancialInstrumentAxis">us-gaap:USGovernmentAgenciesDebtSecuritiesMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_FinancialInstrumentAxis_us-gaap_CorporateDebtSecuritiesMember_W6dvtbJBXEa50pS4c58icg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:FinancialInstrumentAxis">us-gaap:CorporateDebtSecuritiesMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2021_us-gaap_FinancialInstrumentAxis_us-gaap_USTreasurySecuritiesMember_gJhgKG5MIk-r_VdVxod5_g"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:FinancialInstrumentAxis">us-gaap:USTreasurySecuritiesMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2021_us-gaap_FinancialInstrumentAxis_us-gaap_USGovernmentAgenciesDebtSecuritiesMember_qSaUfSjFAk-Go6t8v7C5Vg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:FinancialInstrumentAxis">us-gaap:USGovernmentAgenciesDebtSecuritiesMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2021_us-gaap_FinancialInstrumentAxis_us-gaap_CorporateDebtSecuritiesMember_IXDRtarETEeWv9xq-DPEYw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:FinancialInstrumentAxis">us-gaap:CorporateDebtSecuritiesMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2021_us-gaap_BalanceSheetLocationAxis_us-gaap_OtherLiabilitiesMember_8L6qodKhvEqd88yeBiGHBg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:BalanceSheetLocationAxis">us-gaap:OtherLiabilitiesMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2020_To_12_31_2020_us-gaap_DisposalGroupClassificationAxis_us-gaap_DisposalGroupDisposedOfBySaleNotDiscontinuedOperationsMember_us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsAxis_veco_OneNonCoreProductLineMember_juSBtzD8xUGaHzoP0bEdzA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:DisposalGroupClassificationAxis">us-gaap:DisposalGroupDisposedOfBySaleNotDiscontinuedOperationsMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsAxis">veco:OneNonCoreProductLineMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-01-01</xbrli:startDate><xbrli:endDate>2020-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_veco_PotentiallyDilutiveSharesMember_Xh0mJGtCjkizBLR7chyGyg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis">veco:PotentiallyDilutiveSharesMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_12_31_2021_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_veco_PotentiallyDilutiveSharesMember_TpPdreQLc0uaUnxJXzBvZA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis">veco:PotentiallyDilutiveSharesMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_12_31_2021_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_us-gaap_ConvertibleDebtMember_B4QzNEW5AEKairiU-IKfGw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis">us-gaap:ConvertibleDebtMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2020_To_12_31_2020_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_veco_PotentiallyDilutiveSharesMember_rTgo9ZGu6EWujc23LmjRcw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis">veco:PotentiallyDilutiveSharesMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-01-01</xbrli:startDate><xbrli:endDate>2020-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2020_To_12_31_2020_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_veco_CommonStockEquivalentsMember_GgBN3cvDTE-byDYqs9wG7A"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis">veco:CommonStockEquivalentsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-01-01</xbrli:startDate><xbrli:endDate>2020-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2020_To_12_31_2020_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_us-gaap_ConvertibleDebtMember_MuNBTSuoqkKGYpc0H0iPXw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis">us-gaap:ConvertibleDebtMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-01-01</xbrli:startDate><xbrli:endDate>2020-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_x6bwc1aoykiu0j_LFZBhYg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:ConvertibleSeniorUnsecuredNotesDue2027Member</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_hWxJVXpeukyYZRjXd7vFsw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:ConvertibleSeniorUnsecuredNotesDue2025Member</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_IlL1-aoOz0muNy23d_GMOw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:ConvertibleSeniorUnsecuredNotesDue2023Member</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_12_31_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_oRqSXBIKh0eX4ExySYWF8w"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:ConvertibleSeniorUnsecuredNotesDue2027Member</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_12_31_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_Fq2asOdn_kqiVzufwpVwKw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:ConvertibleSeniorUnsecuredNotesDue2025Member</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_12_31_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_sUmtKlw7GU2Z1jCoNlH0mQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:ConvertibleSeniorUnsecuredNotesDue2023Member</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2020_To_12_31_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_EG9sy8Hb-0ezbGiM3IJ64w"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:ConvertibleSeniorUnsecuredNotesDue2023Member</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-01-01</xbrli:startDate><xbrli:endDate>2020-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_us-gaap_IncomeStatementLocationAxis_us-gaap_SellingGeneralAndAdministrativeExpensesMember_9myQ9Uv9wE6pMR5CtJ_ICQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:SellingGeneralAndAdministrativeExpensesMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_us-gaap_IncomeStatementLocationAxis_us-gaap_ResearchAndDevelopmentExpenseMember_xC5nU-WYOkm4dMh6YP-Ebw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:ResearchAndDevelopmentExpenseMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_us-gaap_IncomeStatementLocationAxis_us-gaap_CostOfSalesMember_6jlqOW9pV0m43w7beGI5eQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:CostOfSalesMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_12_31_2021_us-gaap_IncomeStatementLocationAxis_us-gaap_SellingGeneralAndAdministrativeExpensesMember_rhJjBZUOoUWCeAi4MtyMAA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:SellingGeneralAndAdministrativeExpensesMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_12_31_2021_us-gaap_IncomeStatementLocationAxis_us-gaap_ResearchAndDevelopmentExpenseMember_0YA8SwGFkkuMLELC1j-hSA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:ResearchAndDevelopmentExpenseMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_12_31_2021_us-gaap_IncomeStatementLocationAxis_us-gaap_CostOfSalesMember_6abGMq9QDEeOCipvBcXctA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:CostOfSalesMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2020_To_12_31_2020_us-gaap_IncomeStatementLocationAxis_us-gaap_SellingGeneralAndAdministrativeExpensesMember_fLK1Qhy09Ee_xMlMC5PRcg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:SellingGeneralAndAdministrativeExpensesMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-01-01</xbrli:startDate><xbrli:endDate>2020-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2020_To_12_31_2020_us-gaap_IncomeStatementLocationAxis_us-gaap_ResearchAndDevelopmentExpenseMember_h4OfLfI-aUWU3289IhriMQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:ResearchAndDevelopmentExpenseMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-01-01</xbrli:startDate><xbrli:endDate>2020-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2020_To_12_31_2020_us-gaap_IncomeStatementLocationAxis_us-gaap_CostOfSalesMember_ygktSsgTfUyjEVIS_GKOzA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:CostOfSalesMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-01-01</xbrli:startDate><xbrli:endDate>2020-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_QZRsqkKY70-vQJ-kuKgfnA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AdditionalPaidInCapitalMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_9gz_RG3i3EuWCc_uyao52w"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AdditionalPaidInCapitalMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2020_To_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_31RxRwAXMUOBUYXDlssrkQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AdditionalPaidInCapitalMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-01-01</xbrli:startDate><xbrli:endDate>2020-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier></xbrli:entity><xbrli:period><xbrli:startDate>2020-01-01</xbrli:startDate><xbrli:endDate>2020-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2020_To_12_31_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_DEAAn-NWvkmZVHFd6j4MOg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:ConvertibleSeniorUnsecuredNotesDue2027Member</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AdditionalPaidInCapitalMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-01-01</xbrli:startDate><xbrli:endDate>2020-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2020_To_12_31_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_8j1zlyr4AU2z9_9awGfNwQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:ConvertibleSeniorUnsecuredNotesDue2025Member</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AdditionalPaidInCapitalMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-01-01</xbrli:startDate><xbrli:endDate>2020-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2020_To_12_31_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_NdHMAvtl7EiuDr6tIOXilw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:ConvertibleSeniorUnsecuredNotesDue2027Member</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-01-01</xbrli:startDate><xbrli:endDate>2020-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2020_To_12_31_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_B52uU2Mlw0iaAElsoUnx3Q"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:ConvertibleSeniorUnsecuredNotesDue2025Member</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-01-01</xbrli:startDate><xbrli:endDate>2020-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2021_srt_CumulativeEffectPeriodOfAdoptionAxis_srt_CumulativeEffectPeriodOfAdoptionAdjustmentMember_us-gaap_AdjustmentsForNewAccountingPronouncementsAxis_us-gaap_AccountingStandardsUpdate202006Member_uQc4nJTxR0OEJlucArTKOA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:CumulativeEffectPeriodOfAdoptionAxis">srt:CumulativeEffectPeriodOfAdoptionAdjustmentMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:AdjustmentsForNewAccountingPronouncementsAxis">us-gaap:AccountingStandardsUpdate202006Member</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2021_srt_CumulativeEffectPeriodOfAdoptionAxis_srt_CumulativeEffectPeriodOfAdoptionAdjustedBalanceMember_us-gaap_AdjustmentsForNewAccountingPronouncementsAxis_us-gaap_AccountingStandardsUpdate202006Member_LzmwhGpHdUa1ilaCnrJETw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:CumulativeEffectPeriodOfAdoptionAxis">srt:CumulativeEffectPeriodOfAdoptionAdjustedBalanceMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:AdjustmentsForNewAccountingPronouncementsAxis">us-gaap:AccountingStandardsUpdate202006Member</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_BalanceSheetLocationAxis_us-gaap_OtherLiabilitiesMember_79zlpumRSUyxTgOHdVLA_Q"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:BalanceSheetLocationAxis">us-gaap:OtherLiabilitiesMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier></xbrli:entity><xbrli:period><xbrli:instant>2021-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_7_1_2022_QpEKXeY9BUGD8AT7Wk8OMQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier></xbrli:entity><xbrli:period><xbrli:instant>2022-07-01</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_1_31_2023_dei_LegalEntityAxis_veco_EpiluvacAbMember_us-gaap_SubsequentEventTypeAxis_us-gaap_SubsequentEventMember_bGwG6YtVWESCjdQzt4z_DA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="dei:LegalEntityAxis">veco:EpiluvacAbMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:SubsequentEventTypeAxis">us-gaap:SubsequentEventMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2023-01-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_2_13_2023_k6obUYDuoUWdkjMxZbrZsw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier></xbrli:entity><xbrli:period><xbrli:instant>2023-02-13</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000103145</xbrli:identifier></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:unit id="Unit_Standard_item_aj1ZEHofC0agSXOi_C6c5A"><xbrli:measure>veco:item</xbrli:measure></xbrli:unit><xbrli:unit id="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ"><xbrli:measure>xbrli:shares</xbrli:measure></xbrli:unit><xbrli:unit id="Unit_Standard_employee_W_mzWhkhIEKoXUFE8oNQVg"><xbrli:measure>veco:employee</xbrli:measure></xbrli:unit><xbrli:unit id="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA"><xbrli:measure>iso4217:USD</xbrli:measure></xbrli:unit><xbrli:unit id="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg"><xbrli:divide><xbrli:unitNumerator><xbrli:measure>iso4217:USD</xbrli:measure></xbrli:unitNumerator><xbrli:unitDenominator><xbrli:measure>xbrli:shares</xbrli:measure></xbrli:unitDenominator></xbrli:divide></xbrli:unit><xbrli:unit id="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w"><xbrli:measure>xbrli:pure</xbrli:measure></xbrli:unit><xbrli:unit id="Unit_Standard_D_LRKZsttWxECdvF14i5EoQg"><xbrli:measure>veco:D</xbrli:measure></xbrli:unit><xbrli:unit id="Unit_Standard_case_gtF5dJF030CdqF2FGWQ9yA"><xbrli:measure>veco:case</xbrli:measure></xbrli:unit><xbrli:unit id="Unit_Standard_segment_RlYNACzID0m6O5VHI3M3nA"><xbrli:measure>veco:segment</xbrli:measure></xbrli:unit><xbrli:unit id="Unit_Standard_customer_ewo2DglECUO5n4nvx82_SQ"><xbrli:measure>veco:customer</xbrli:measure></xbrli:unit></ix:resources></ix:header></div><div style="max-width:100%;padding-left:5.88%;padding-right:5.88%;position:relative;"><div style="margin-top:21.6pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;min-height:9.2pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:1pt;padding-bottom:1pt;padding-top:1pt;border-bottom:1.0pt solid #000000;border-top:3.0pt solid #000000;margin:0pt;">f</p><a id="_17f836dd_fa29_4bfc_b77b_2160590c388e"></a><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:4pt;font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><b style="font-size:13pt;font-weight:bold;">UNITED STATES</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><b style="font-size:13pt;font-weight:bold;">SECURITIES AND EXCHANGE COMMISSION</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Washington, D.C. 20549</b></p><div style="font-family:'Times New Roman','Times','serif';font-size:8.0pt;margin-bottom:2pt;margin-top:2pt;min-height:1.19em;position:relative;width:100%;"><div style="background-color:#000000;height:1pt;position:relative;top:0.6em;width:25.0%;border:none;margin:0 auto;"></div></div><p style="font-family:'Times New Roman','Times','serif';font-size:13pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">FORM&#160;</b><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="dei:DocumentType" id="Narr_yMU5W-g8gkOowHrtHa2lVw"><b style="font-weight:bold;">10-K</b></ix:nonNumeric></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">(Mark One)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:4pt;visibility:hidden;">&#8203;</span></p><a id="_1cf6a3de_7495_4508_99a3_e8a1a051ed08"></a><a id="Tc_AVq1ENCCj0u41dOtsv2KPQ_1_1"></a><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:top;width:6%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:6pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:top;width:94%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:top;width:6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><ix:nonNumeric format="ixt-sec:boolballotbox" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="dei:DocumentAnnualReport" id="Tc_Q13lE8U41UKL3wzENbD4OQ_1_0"><b style="font-family:'Segoe UI Symbol';font-size:9pt;font-weight:bold;">&#9746;</b></ix:nonNumeric></p></td><td style="vertical-align:top;width:94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><b style="font-weight:bold;">ANNUAL REPORT PURSUANT TO SECTION&#160;13 OR 15(d)&#160;OF THE SECURITIES EXCHANGE ACT OF 1934</b></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:4pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><b style="font-size:8pt;font-weight:bold;">For the fiscal year ended </b><ix:nonNumeric format="ixt:datemonthdayyearen" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="dei:DocumentPeriodEndDate" id="Narr_sQyOG1MDcUqsnYrMDL3Syw"><ix:nonNumeric format="ixt:datemonthdayen" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="dei:CurrentFiscalYearEndDate" id="Narr_Z-TSr1hrMkKdFEtMFFGcPw"><b style="font-size:8pt;font-weight:bold;">December 31</b></ix:nonNumeric><b style="font-size:8pt;font-weight:bold;">, 2022</b></ix:nonNumeric></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:4pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">OR</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:4pt;visibility:hidden;">&#8203;</span></p><a id="_515478d6_fbb1_4388_b243_cb96a85e2831"></a><a id="Tc_iTn-VaAlS06OjEvKp3NIHw_1_1"></a><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:top;width:6%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:top;width:94%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:top;width:6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><ix:nonNumeric format="ixt-sec:boolballotbox" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="dei:DocumentTransitionReport" id="Tc_ksy8BK_ZG0eR7zJPntNDbg_1_0"><b style="font-family:'Segoe UI Symbol';font-size:9pt;font-weight:bold;">&#9744;</b></ix:nonNumeric></p></td><td style="vertical-align:top;width:94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><b style="font-weight:bold;">TRANSITION REPORT PURSUANT TO SECTION&#160;13 OR 15(d)&#160;OF THE SECURITIES EXCHANGE ACT OF 1934</b></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:4pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><b style="font-size:8pt;font-weight:bold;">Commission file number </b><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="dei:EntityFileNumber" id="Narr_Kq0tR7H3A0iIsHWThnR56A"><b style="font-size:8pt;font-weight:bold;">0-16244</b></ix:nonNumeric></p><div style="font-family:'Times New Roman','Times','serif';font-size:8.0pt;margin-bottom:2pt;margin-top:2pt;min-height:1.19em;position:relative;width:100%;"><div style="background-color:#000000;height:1pt;position:relative;top:0.6em;width:25.0%;border:none;margin:0 auto;"></div></div><p style="font-family:'Times New Roman','Times','serif';font-size:13pt;text-align:center;margin:0pt;"><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="dei:EntityRegistrantName" id="Narr_WgJfJXMHeEKHIsDw5jIEng"><b style="font-weight:bold;">VEECO INSTRUMENTS&#160;INC</b></ix:nonNumeric><b style="font-weight:bold;">.</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;">(Exact Name of Registrant as Specified in Its Charter)</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:4pt;visibility:hidden;">&#8203;</span></p><a id="_d854ecd2_a5b3_481b_903c_298bd14d5eb1"></a><a id="Tc_LXGjjiwWWEO0NBbqAYQLZA_2_0"></a><a id="Tc_kHTZzD1Oik2OFt4n8OLHig_2_1"></a><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><ix:nonNumeric format="ixt-sec:stateprovnameen" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="dei:EntityIncorporationStateCountryCode" id="Tc_YiDORqBw502pYCfPf9EAuw_1_0"><b style="font-size:8pt;font-weight:bold;">Delaware</b></ix:nonNumeric></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="dei:EntityTaxIdentificationNumber" id="Tc_4W1_qqluUEiCtFnTnf1mCw_1_1"><b style="font-size:8pt;font-weight:bold;">11-2989601</b></ix:nonNumeric></p></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;">(State or Other Jurisdiction of Incorporation or Organization)</p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;">(I.R.S. Employer Identification No.)</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:4pt;visibility:hidden;">&#8203;</span></p><a id="_5233e20e_0254_4102_8d82_236ab0ff8fb0"></a><a id="Tc_YIaXjBNvuE62AnhaDk0cJw_2_0"></a><a id="Tc_661zGw0-pkC3Odm-GGVHjQ_3_0"></a><a id="Tc_8BEeqqXSiEK8tXik3d-p-g_3_1"></a><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="dei:EntityAddressAddressLine1" id="Tc_dMX9RZJEs0iXIQmcH_t0hg_1_0"><b style="font-size:8pt;font-weight:bold;">Terminal Drive</b></ix:nonNumeric></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="dei:EntityAddressCityOrTown" id="Narr_2FFBcbN7tky0FbUsGDkg_w"><b style="font-size:8pt;font-weight:bold;">Plainview</b></ix:nonNumeric><b style="font-size:8pt;font-weight:bold;">, </b><ix:nonNumeric format="ixt-sec:stateprovnameen" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="dei:EntityAddressStateOrProvince" id="Narr_xA4qiscu7Eq2jgHzZIo3KA"><b style="font-size:8pt;font-weight:bold;">New York</b></ix:nonNumeric></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="dei:EntityAddressPostalZipCode" id="Tc_MdcFpHsrL0S3R85KBjARxA_2_1"><b style="font-size:8pt;font-weight:bold;">11803</b></ix:nonNumeric></p></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;">(Address of Principal Executive Offices)</p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;">(Zip Code)</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:4pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;">Registrant&#8217;s telephone number, including area code: </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><b style="font-size:8pt;font-weight:bold;">(</b><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="dei:CityAreaCode" id="Narr_SHZCk4hOmUihl0REzz7Cfg"><b style="font-size:8pt;font-weight:bold;">516</b></ix:nonNumeric><b style="font-size:8pt;font-weight:bold;">)&#160;</b><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="dei:LocalPhoneNumber" id="Narr_xbQ-0KoMAE6RERMiL1LJBw"><b style="font-size:8pt;font-weight:bold;">677-0200</b></ix:nonNumeric></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:4pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Securities registered pursuant to Section&#160;12(b)&#160;of the Act:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:5pt;visibility:hidden;">&#8203;</span></p><a id="_198c47f4_b42f_4ed4_8e3f_a346d6ab431d"></a><a id="Tc_m1E9RVcMa0O6tReuR8Z5og_0_0"></a><a id="Tc_Nafu3dC3yU6tYtO-jdO-yg_0_1"></a><a id="Tc_-Bb4bL3HR02rd6MKVf4FSg_0_2"></a><a id="Tc_Q3RJFQ28EE-tG4V9u44Pzw_1_0"></a><a id="Tc_SfafXff8W0i2C1xejiKvHA_1_2"></a><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:84.92%;"><tr><td style="vertical-align:top;width:35.83%;border-bottom:1px solid #000000;border-left:1px solid #000000;border-right:1px solid #000000;border-top:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Title of each class</b></p></td><td style="vertical-align:bottom;width:28.06%;border-bottom:1px solid #000000;border-left:1px solid #000000;border-right:1px solid #000000;border-top:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Trading Symbol(s)</b></p></td><td style="vertical-align:top;width:36.09%;border-bottom:1px solid #000000;border-left:1px solid #000000;border-right:1px solid #000000;border-top:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Name of each exchange on which registered</b></p></td></tr><tr><td style="vertical-align:top;width:35.83%;border-bottom:1px solid #000000;border-left:1px solid #000000;border-right:1px solid #000000;border-top:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="dei:Security12bTitle" id="Narr_jLkWgxR1JUOu-iCwlp8Qcg"><b style="font-size:8pt;font-weight:bold;">Common Stock</b></ix:nonNumeric><b style="font-size:8pt;font-weight:bold;">, par value $0.01 per share</b></p></td><td style="vertical-align:bottom;width:28.06%;border-bottom:1px solid #000000;border-left:1px solid #000000;border-right:1px solid #000000;border-top:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="dei:TradingSymbol" id="Tc_srtrAWxKTUCMvVNAwR2D0A_1_1"><b style="font-size:8pt;font-weight:bold;">VECO</b></ix:nonNumeric></p></td><td style="vertical-align:top;width:36.09%;border-bottom:1px solid #000000;border-left:1px solid #000000;border-right:1px solid #000000;border-top:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><b style="font-size:8pt;font-weight:bold;">The </b><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="dei:SecurityExchangeName" id="Narr_fZ1jyIBxCEOJIW2KzmcAMA"><b style="font-size:8pt;font-weight:bold;">NASDAQ</b></ix:nonNumeric><b style="font-size:8pt;font-weight:bold;"> Global Select Market</b></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:4pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;">Securities registered pursuant to Section&#160;12(g)&#160;of the Act: <b style="font-weight:bold;">None</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:4pt;font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-indent:18pt;margin:0pt;"><span style="font-size:8pt;white-space:pre-wrap;">Indicate by check mark if the registrant is a well-known seasoned issuer, as defined in Rule 405 of the Securities Act.  </span><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="dei:EntityWellKnownSeasonedIssuer" id="Narr_xLqxJprSuEKtNb8hAXJzCA"><span style="font-size:8pt;">Yes</span></ix:nonNumeric><span style="font-size:8pt;"> </span><span style="font-family:'Segoe UI Symbol';font-size:8pt;">&#9746;</span><span style="font-size:8pt;"> No </span><span style="font-family:'Segoe UI Symbol';font-size:8pt;">&#9744;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-indent:18pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-indent:18pt;margin:0pt;"><span style="font-size:8pt;white-space:pre-wrap;">Indicate by check mark if the registrant is not required to file reports pursuant to Section 13 or Section 15(d) of the Act.  Yes </span><span style="font-family:'Segoe UI Symbol';font-size:8pt;">&#9744;</span><span style="font-size:8pt;white-space:pre-wrap;">  </span><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="dei:EntityVoluntaryFilers" id="Narr_avbE4GTFKEmEVlPLARWWlA"><span style="font-size:8pt;">No</span></ix:nonNumeric><span style="font-size:8pt;"> </span><span style="font-family:'Segoe UI Symbol';font-size:8pt;">&#9746;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-indent:18pt;margin:0pt;"><span style="font-size:2pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-indent:18pt;margin:0pt;"><span style="font-size:8pt;">Indicate by check mark whether the registrant (1) has filed all reports required to be filed by Section 13 or 15(d) of the Securities Exchange Act of 1934 during the preceding 12 months (or for such shorter period that the registrant was required to file such reports), and (2) has been subject to such filing requirements for the past 90 days. </span><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="dei:EntityCurrentReportingStatus" id="Narr_1JJ0ZiI6LkClAkIJex2nqg"><span style="font-size:8pt;">Yes</span></ix:nonNumeric><span style="font-size:8pt;"> </span><span style="font-family:'Segoe UI Symbol';font-size:8pt;">&#9746;</span><span style="font-size:8pt;white-space:pre-wrap;">  No </span><span style="font-family:'Segoe UI Symbol';font-size:8pt;">&#9744;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-indent:18pt;margin:0pt;"><span style="font-size:4pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-indent:18pt;margin:0pt;"><span style="font-size:8pt;">Indicate by check mark whether the registrant has submitted electronically every Interactive Data File required to be submitted pursuant to Rule 405 of Regulation S-T (&#167;232.405 of this chapter) during the preceding 12 months (or for such shorter period that the registrant was required to submit such files). </span><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="dei:EntityInteractiveDataCurrent" id="Narr_MwpptUmZv02IOjP-BFeBlA"><span style="font-size:8pt;">Yes</span></ix:nonNumeric><span style="font-size:8pt;"> </span><span style="font-family:'Segoe UI Symbol';font-size:8pt;">&#9746;</span><span style="font-size:8pt;white-space:pre-wrap;">  No </span><span style="font-family:'Segoe UI Symbol';font-size:8pt;">&#9744;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-indent:18pt;margin:0pt;"><span style="font-size:4pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-indent:18pt;margin:0pt;">Indicate by check mark whether the Registrant is a large accelerated filer, an accelerated filer, a non-accelerated filer, smaller reporting company, or an emerging growth company. See the definitions of &#8220;large accelerated filer,&#8221; &#8220;accelerated filer,&#8221; &#8220;smaller reporting company,&#8221; and &#8220;emerging growth company&#8221; in Rule 12b-2 of the Exchange Act.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:4pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:88.75%;"><tr style="height:1pt;"><td style="vertical-align:top;width:34.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:26.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:9.85%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:13.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:15.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:34.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><ix:nonNumeric format="ixt-sec:entityfilercategoryen" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="dei:EntityFilerCategory" id="Narr_voocYeij9UacxPZ-PtG9IA"><span style="font-size:8pt;">Large accelerated filer</span></ix:nonNumeric><span style="font-size:8pt;">&#160;</span><span style="font-family:'Segoe UI Symbol';font-size:7pt;letter-spacing:-0.1pt;">&#9746;</span></p></td><td style="vertical-align:top;width:26.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Accelerated filer <span style="font-family:'Segoe UI Symbol';">&#9744;</span></p></td><td style="vertical-align:top;width:9.85%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:top;width:28.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;">Emerging growth company </span><ix:nonNumeric format="ixt-sec:boolballotbox" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="dei:EntityEmergingGrowthCompany" id="Narr_SzIJUL0bOk6kphYPvlimKg"><span style="font-family:'Segoe UI Symbol';font-size:8pt;">&#9744;</span></ix:nonNumeric></p></td></tr><tr><td style="vertical-align:top;width:34.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;padding-left:10pt;text-indent:-10pt;margin:0pt;">Non-accelerated filer&#160;<span style="font-family:'Segoe UI Symbol';">&#9744;</span> </p></td><td style="vertical-align:top;width:26.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt;"><span style="font-size:8pt;">Smaller reporting company </span><ix:nonNumeric format="ixt-sec:boolballotbox" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="dei:EntitySmallBusiness" id="Narr_ywNPiNTsx0yInCwxesLkFg"><span style="font-family:'Segoe UI Symbol';font-size:8pt;">&#9744;</span></ix:nonNumeric></p></td><td style="vertical-align:top;width:9.85%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:top;width:28.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-family:'Segoe UI Symbol';font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:4pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-indent:18pt;margin:0pt;">If an emerging growth company, indicate by check mark if the registrant has elected not to use the extended transition period for complying with any new or revised financial accounting standards provided pursuant to Section 13(a) of the Exchange Act. <span style="font-family:'Segoe UI Symbol';">&#9744;</span> </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-indent:18pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-indent:18pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-indent:18pt;margin:0pt;"><span style="font-size:8pt;">Indicate by check mark whether the Registrant is a shell company (as defined in Rule&#160;12b-2 of the Act). </span><ix:nonNumeric format="ixt-sec:boolballotbox" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="dei:EntityShellCompany" id="Narr_8bsFApSOQEO3XQrCnydUyw"><span style="font-family:'Segoe UI Symbol';font-size:8pt;">&#9744;</span></ix:nonNumeric><span style="font-size:8pt;"> Yes </span><span style="font-family:'Segoe UI Symbol';font-size:8pt;">&#9746;</span><span style="font-size:8pt;"> No</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:justify;text-indent:18pt;margin:4pt 0pt 0pt 0pt;"><span style="font-size:8pt;">Indicate by check mark whether the registrant has filed a report on and attestation to its management&#8217;s assessment of the effectiveness of its internal control over financial reporting under Section 404(b) of the Sarbanes-Oxley Act (15 U.S.C. 7262(b)) by the registered public accounting firm that prepared or issued its audit report.&#160;&#160;</span><ix:nonNumeric format="ixt-sec:boolballotbox" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="dei:IcfrAuditorAttestationFlag" id="Narr_WuFHBwQKvU2HEcIxqT3WWA"><span style="font-family:'Segoe UI Symbol';font-size:8pt;">&#9746;</span></ix:nonNumeric></p><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:justify;text-indent:18pt;margin:4pt 0pt 0pt 0pt;">If securities are registered pursuant to Section 12(b) of the Act, indicate by check mark whether the financial statements of the registrant included in the filing reflect the correction of an error to previously issued financial statements. <span style="font-family:'Segoe UI Symbol';">&#9744;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:justify;text-indent:18pt;margin:4pt 0pt 0pt 0pt;">Indicate by check mark whether any of those error corrections are restatements that required a recovery analysis of incentive-based compensation received by any of the registrant&#8217;s executive officers during the relevant recovery period pursuant to &#167;240.10D-1(b). <span style="font-family:'Segoe UI Symbol';">&#9744;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:4pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-indent:18pt;margin:0pt;">The aggregate market value of the common stock held by non-affiliates of the registrant at July 1, 2022 (the last business day of the registrant&#8217;s most recently completed second quarter) was $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" format="ixt:numdotdecimal" scale="0" contextRef="As_Of_7_1_2022_QpEKXeY9BUGD8AT7Wk8OMQ" decimals="0" name="dei:EntityPublicFloat" id="Narr_veWoouotWUaYwL_v7FklOQ">906,413,355</ix:nonFraction> based on the closing price of $18.08 on the NASDAQ Global Select Market on that date.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-indent:18pt;margin:0pt;"><span style="font-size:4pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-indent:18pt;margin:0pt;">As of February 13, 2023, there were <ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" format="ixt:numdotdecimal" scale="0" contextRef="As_Of_2_13_2023_k6obUYDuoUWdkjMxZbrZsw" decimals="INF" name="dei:EntityCommonStockSharesOutstanding" id="Narr_f-nu3RhPkUCx73XujBDWPg">51,661,429</ix:nonFraction> shares of the registrant&#8217;s common stock, par value $0.01 per share, outstanding.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:4pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">DOCUMENTS INCORPORATED BY REFERENCE</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:4pt;font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Certain portions of the definitive Proxy Statement to be used in connection with the Registrant&#8217;s 2023 Annual Meeting of Stockholders are incorporated by reference into Part III of this Form 10-K.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:4pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;line-height:1pt;padding-bottom:1pt;padding-top:1pt;border-bottom:3.0pt solid #000000;border-top:1.0pt solid #000000;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:2pt;font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="display:none;font-size:12pt;line-height:0pt;text-align:center;margin:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:0pt;visibility:hidden;">&#8203;</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:88.24%;border:0;margin:30pt 5.88% 30pt 5.88%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="_ad7ac2f2_7c08_4cdd_b427_f379e64be1be"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">VEECO INSTRUMENTS INC.</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p><a id="TOC"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">INDEX</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"></div></div></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"></div></div></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;"><a style="font-size:10pt;" href="#PARTI_328685"><span style="font-style:normal;font-weight:normal;">PART&#160;I</span></a></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;">4</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><a style="font-size:10pt;" href="#Item1Business_998801"><span style="font-style:normal;font-weight:normal;">Item 1. Business</span></a></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;">4</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><span style="font-size:8pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><a style="font-size:10pt;" href="#Item1A_RiskFactors"><span style="font-style:normal;font-weight:normal;">Item 1A. Risk Factors</span></a></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;">12</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><span style="font-size:8pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><a style="font-size:10pt;" href="#Item1BUnresolvedStaffComments_176632"><span style="font-style:normal;font-weight:normal;">Item 1B. Unresolved Staff Comments</span></a></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;">27</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><span style="font-size:8pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><a style="font-size:10pt;" href="#Item2Properties_244056"><span style="font-style:normal;font-weight:normal;">Item 2. Properties</span></a></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;">28</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><span style="font-size:8pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><a style="font-size:10pt;" href="#Item3LegalProceedings_521596"><span style="font-style:normal;font-weight:normal;">Item 3. Legal Proceedings</span></a></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;">28</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><span style="font-size:8pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><a style="font-size:10pt;" href="#Item4MineSafetyDisclosures_174326"><span style="font-style:normal;font-weight:normal;">Item 4. Mine Safety Disclosures</span></a></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;">28</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="font-size:10pt;" href="#PARTII_53402"><span style="font-style:normal;font-weight:normal;">PART&#160;II</span></a></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;">29</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><a style="font-size:10pt;" href="#Item5MarketforRegistrantsCommonEquity_72"><span style="font-style:normal;font-weight:normal;">Item 5. Market for Registrant&#8217;s Common Equity, Related Stockholder Matters and Issuer Purchases of Equity Securities</span></a></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;">29</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><span style="font-size:8pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><a style="font-size:10pt;" href="#StockPerformanceGraph_401970"><span style="font-style:normal;font-weight:normal;">Stock Performance Graph</span></a></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;">30</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><span style="font-size:8pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><a style="font-size:10pt;" href="#Item6SelectedFinancialData_237384"><span style="font-style:normal;font-weight:normal;">Item 6. [Reserved]</span></a></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;">30</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><span style="font-size:8pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><a style="font-size:10pt;" href="#Item7ManagementsDiscussionandAnalysis_31"><span style="font-style:normal;font-weight:normal;">Item 7. Management&#8217;s Discussion and Analysis of Financial Condition and Results of Operations</span></a></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;">31</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><span style="font-size:8pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><a style="font-size:10pt;" href="#Item7AQuantitativeandQualitative_966516"><span style="font-style:normal;font-weight:normal;">Item 7A. Quantitative and Qualitative Disclosures about Market Risk</span></a></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;">41</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><span style="font-size:8pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><a style="font-size:10pt;" href="#Item8FinancialStatements_672804"><span style="font-style:normal;font-weight:normal;">Item 8. Financial Statements and Supplementary Data</span></a></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;">41</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><span style="font-size:8pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><a style="font-size:10pt;" href="#Item9ChangesinandDisagreements_657227"><span style="font-style:normal;font-weight:normal;">Item 9. Changes in and Disagreements with Accountants on Accounting and Financial Disclosure</span></a></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;">41</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><span style="font-size:8pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><a style="font-size:10pt;" href="#Item9AControlsandProcedures_188790"><span style="font-style:normal;font-weight:normal;">Item 9A. Controls and Procedures</span></a></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;">41</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><span style="font-size:8pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><a style="font-size:10pt;" href="#Item9BOtherInformation_74067"><span style="font-style:normal;font-weight:normal;">Item 9B. Other Information</span></a></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;">44</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="font-size:10pt;" href="#PARTIII_80757"><span style="font-style:normal;font-weight:normal;">PART&#160;III</span></a></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;">44</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><a style="font-size:10pt;" href="#Item10DirectorsExecutiveOfficers_819063"><span style="font-style:normal;font-weight:normal;">Item 10. Directors, Executive Officers and Corporate Governance</span></a></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;">44</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><span style="font-size:8pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><a style="font-size:10pt;" href="#Item11ExecutiveCompensation_872731"><span style="font-style:normal;font-weight:normal;">Item 11. Executive Compensation</span></a></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;">44</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><span style="font-size:8pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><a style="font-size:10pt;" href="#Item12SecurityOwnershipofCertain_4330"><span style="font-style:normal;font-weight:normal;">Item 12. Security Ownership of Certain Beneficial Owners and Management and Related Stockholder Matters</span></a></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;">44</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><span style="font-size:8pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><a style="font-size:10pt;" href="#Item13CertainRelationships_454398"><span style="font-style:normal;font-weight:normal;">Item 13. Certain Relationships and Related Transactions, and Director Independence</span></a></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;">44</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><span style="font-size:8pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><a style="font-size:10pt;" href="#Item14PrincipalAccounting_254066"><span style="font-style:normal;font-weight:normal;">Item 14. Principal Accounting Fees and Services</span></a></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;">44</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="font-size:10pt;" href="#PARTIV_984349"><span style="font-style:normal;font-weight:normal;">PART&#160;IV</span></a></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;">45</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 0pt 10pt;"><a style="font-size:10pt;" href="#Item15ExhibitsFinancialStatement_74184"><span style="font-style:normal;font-weight:normal;">Item 15. Exhibits, Financial Statement Schedules</span></a></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;">45</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="font-size:10pt;" href="#SIGNATURES_944298"><span style="font-style:normal;font-weight:normal;">SIGNATURES</span></a></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;">49</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">2</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="_e3e65cdb_e0af_4b12_8f9a_87edac79786e"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">This Annual Report on Form&#160;10-K (&#8220;Form&#160;10-K&#8221;) contains certain forward-looking statements within the meaning of the safe harbor provisions of the U.S. Private Securities Litigation Reform Act of 1995, as amended, relating to Veeco Instruments Inc. (together with its consolidated subsidiaries, &#8220;Veeco,&#8221; the &#8220;Company,&#8221; &#8220;Registrant,&#8221; &#8220;we,&#8221; &#8220;our,&#8221; or &#8220;us,&#8221; unless the context indicates otherwise) that are based on management&#8217;s expectations, estimates, projections, and assumptions. When used in this Form&#160;10-K, words such as &#8220;expects,&#8221; &#8220;anticipates,&#8221; &#8220;plans,&#8221; &#8220;believes,&#8221; &#8220;scheduled,&#8221; &#8220;estimates,&#8221; and variations of these words and similar expressions are intended to identify forward-looking statements. Discussions containing such forward-looking statements may be found in Part&#160;I,&#160;Items 1 and 3, Part&#160;II,&#160;Items 7 and 7A hereof, as well as within this Form&#160;10-K generally. Forward-looking statements in this discussion include, but are not limited to, those regarding anticipated growth and trends in our businesses and markets, industry outlooks and demand drivers, our investment and growth strategies, our development of new products and technologies, our business outlook for the current and future periods, the impact of the COVID-19 pandemic, our ongoing transformation initiative and the effects thereof on our operations and financial results, and other statements that are not historical facts. These statements and their underlying assumptions are subject to risks and uncertainties and are not guarantees of future performance. Factors that could cause actual results to differ materially from those expressed or implied by such statements include, without limitation: </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:4pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">the level of demand for our products; </span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 36pt;"><span style="font-size:10pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">industry and global economic conditions, including without limitation ongoing recessionary concerns, inflationary pressures and supply chain challenges;</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> <span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">the effects of regional or global health epidemics, including the effects of the COVID-19 pandemic on the Company&#8217;s operations and on those of our customers and suppliers; </span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">global trade issues, including the ongoing trade disputes between the U.S. and China, and changes in trade and export license policies; </span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">our dependency on third-party suppliers and outsourcing partners; </span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">the timing of customer orders; </span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 36pt;"><span style="font-size:10pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">our ability to develop, deliver and support new products and technologies; </span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 36pt;"><span style="font-size:10pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">data security incidents, cyberattacks, and other disruptions in our information technology systems and/or those of our third party vendors and other partners;</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">our ability to expand our current markets, increase market share and develop new markets; </span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">the concentrated nature of our customer base; </span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">our ability to obtain and protect intellectual property rights in key technologies; </span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">our ability to achieve the objectives of operational and strategic initiatives and attract, motivate and retain key employees; </span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">the variability of results among products and end-markets, and our ability to accurately forecast future results, market conditions, and customer requirements; </span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">the impact of our indebtedness, including our convertible senior notes and our capped call transactions; and</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">other risks and uncertainties described in our SEC filings on Forms 10-K, 10-Q, and 8-K, including those included in Item 1A, &quot;Risk Factors&quot; of this Form 10-K, and from time-to-time in our other SEC reports. </span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">3</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">All forward-looking statements speak only to management&#8217;s expectations, estimates, projections and assumptions as of the date of this filing or, in the case of any document referenced herein or incorporated by reference, the date of that document. The Company does not undertake any obligation to update or publicly revise any forward-looking statements to reflect events, circumstances or changes in expectations after the date of this filing. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p><a id="PARTI_328685"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">PART&#160;I</b></p><a id="_Hlk31378240"></a><a id="Item1Business_998801"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Item 1. Business</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Business Description and Overview</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Headquartered in Plainview, New York, we were organized as a Delaware corporation in 1989. We are a manufacturer of advanced semiconductor process equipment that solves an array of challenging materials engineering problems for our customers. Our comprehensive collection of ion beam, laser annealing, metal organic chemical vapor deposition (&#8220;MOCVD&#8221;), advanced packaging lithography, single wafer wet processing, molecular beam epitaxy (&#8220;MBE&#8221;), and atomic layer deposition (&#8220;ALD&#8221;) technologies play an integral role in the fabrication of key devices that are enabling the 4th industrial revolution of all things connected. Such devices include leading advanced node application processors for mobile devices, thin film magnetic heads for hard disk drives in data storage, photonics devices for 3D sensing, advanced displays and high-speed data communications, and radio frequency (&#8220;RF&#8221;) filters and power amplifiers for fifth generation (&#8220;5G&#8221;) networks and mobile electronics. In close partnership with our customers, we combine decades of applications and materials know-how with leading-edge systems engineering to deliver high-volume manufacturing solutions with competitive cost of ownership. Serving a global and highly interconnected customer base, we have comprehensive sales and service operations across the Asia-Pacific, Europe, and North America regions to ensure real-time close collaboration and responsiveness.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Our 2023 priorities are:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Protect: Safety is one of Veeco&#8217;s core values. We have taken steps to keep employees safe throughout the COVID-19 pandemic and we continue to maintain focus on traditional workplace health and safety matters. We understand that the culture of the Company can have a direct impact on our performance. We made significant improvements to our culture as measured by an initial culture survey performed in 2019, a follow-up in 2021 and a planned survey in 2023, and we remain committed to working with employees to continue to strengthen our culture; </span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 36pt;"> <span style="margin-left:0pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Execute: We believe that our success depends on our ability to successfully execute in challenging environments, recognizing that our customers have high expectations. The Veeco United team worked through material shortages, lead time increases, and labor shortages in our factories as well as those of our suppliers in 2022. We are focused on continued execution throughout our entire supply chain, including our internal manufacturing activities, in order to meet customer demand. Additionally, we are focused on multiple customer satisfaction initiatives, including on-time deliveries and improving customer service performance metrics;</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Innovate: We plan to continue our efforts in product innovation. We have exciting new solutions in our semiconductor and compound semiconductor product development pipeline, which we believe will solve our customers&#8217; difficult materials challenges and enable sustainable growth in the long term. In 2022, we heavily invested in our manufacturing capabilities through our San Jose expansion, and made significant investments in our service capabilities to meet the requirements of our tier one semiconductor customers, and had a successful year of evaluation acceptances with our customers. Additionally, we acquired Epiluvac AB, a privately held Swedish company, in January 2023, accelerating our penetration into the emerging, high-growth Silicon Carbide (&#8220;SiC&#8221;) epitaxy equipment market. In 2023 we plan to maintain our emphasis on placing strategic evaluation systems with customers in the semiconductor and compound semiconductor markets, consistent with our growth plans. These systems are provided to customers after significant time spent demonstrating their capabilities in our factory and represent one of the final stages in our customers&#8217; selection process. We are focused on successful outcomes for these evaluations and in continuing the elevated level of evaluation system activity with existing and potential customers; and</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 36pt;"><span style="font-size:10pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">4</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;white-space:pre-wrap;">Growth and Profitability: We are focused on maintaining profitability through near-term macroeconomic challenges and growing in our Data Storage market, as well as in our Semiconductor market despite an expected decline in wafer fab equipment (&#8220;WFE&#8221;) spending. We are in a mixed demand environment, with strong recent order activity in the Semiconductor and Data Storage markets, offset by near term weakness in the Compound Semiconductor market. However, we are investing for and expect long-term growth in the Semiconductor and Compound Semiconductor markets. We are focused on executing our backlog, and also winning additional business to drive meaningful long-term growth. We are also focused on responsible management of our cost structure, including an emphasis on gross margins.  </span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="_Hlk125372116"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Markets</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Our products are purchased by customers in the following four end-markets: 1) Semiconductor; 2) Compound Semiconductor; 3) Data Storage; and 4) Scientific&#160;&amp; Other.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Our array of process equipment systems are used in the production of a broad range of microelectronic components, including logic, dynamic random-access memory (&#8220;DRAM&#8221;), photonics devices (including laser diodes and micro-LEDs), power electronics, RF filters and amplifiers, magnetic heads for hard disk drives, and other semiconductor devices. Many of our systems are used to deposit advanced materials critical to the operation of the device and some of our systems are used in cleaning and surface preparation as well as the precise removal of critical materials. We are also a leader in systems used in the advanced packaging process flow of microelectronic components such as flip chip, fan-out wafer level packaging (&#8220;FOWLP&#8221;), and other wafer level packaging approaches used in the modern integration of diverse semiconductor products, especially in consumer electronics. In general, our customers purchase our systems to both produce current-generation devices in volume and to develop next-generation products which deliver more efficient, cost-effective, and advanced technological solutions. We operate in several highly cyclical business environments, and our customers&#8217; buying patterns are dependent upon industry trends and buying patterns for consumer electronics. As our products are sold into multiple markets, the following table describes these markets and the applicable Veeco technologies.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><div style="margin-left:0pt;"><a id="_Hlk95405229"></a><a id="_Hlk62467166"></a><table style="border-collapse:collapse;font-size:16pt;height:max-content;width:100%;"><tr style="height:1pt;"><td style="vertical-align:top;width:16.08%;background:#ffffff;margin:0pt;padding:0pt 5.4pt 0pt 5.4pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"></div></div></td><td style="vertical-align:top;width:57.21%;background:#ffffff;margin:0pt;padding:0pt 5.4pt 0pt 5.4pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"></div></div></td><td style="vertical-align:top;width:26.7%;background:#ffffff;margin:0pt;padding:0pt 5.4pt 0pt 5.4pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"></div></div></td></tr><tr style="height:34.6pt;"><td style="vertical-align:top;width:16.08%;background:#dae3f3;border-bottom:1px solid #8faadc;border-right:1px solid #8faadc;border-top:1px solid #8faadc;margin:0pt;padding:0pt 5.27pt 0pt 5.4pt;"><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:10pt;font-weight:bold;text-align:center;margin:0pt;">Markets</p></td><td style="vertical-align:top;width:57.21%;background:#dae3f3;border-bottom:1px solid #8faadc;border-left:1px solid #8faadc;border-right:1px solid #8faadc;border-top:1px solid #8faadc;margin:0pt;padding:0pt 5.27pt 0pt 5.27pt;"><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Description</b></p></td><td style="vertical-align:top;width:26.7%;background:#dae3f3;border-bottom:1px solid #8faadc;border-left:1px solid #8faadc;border-top:1px solid #8faadc;margin:0pt;padding:0pt 5.4pt 0pt 5.27pt;"><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Applicable Veeco Technologies</b></p></td></tr><tr><td style="vertical-align:middle;width:16.08%;border-bottom:1px solid #8faadc;border-right:1px solid #8faadc;border-top:1px solid #8faadc;margin:0pt;padding:0pt 5.27pt 0pt 5.4pt;"><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:10pt;font-weight:bold;margin:0pt;">Semiconductor</p></td><td style="vertical-align:top;width:57.21%;border-bottom:1px solid #8faadc;border-left:1px solid #8faadc;border-right:1px solid #8faadc;border-top:1px solid #8faadc;margin:0pt;padding:0pt 5.27pt 0pt 5.27pt;"><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">The Semiconductor market refers to early process steps in logic and memory applications where silicon wafers are processed. There are many different process steps in forming patterned wafers, such as depositioning, etching, masking, and doping, where the microchips are created but remain on the silicon wafer. As device architectures continue to shrink with advanced nodes, more precise process control is paramount to achieving high yields and competitive cost. One such process step is called Laser Annealing, which uses a very precise method to activate dopants, reduce contact resistance and modify material grain structure. The Veeco laser annealing technology enables our customers to have a lower thermal budget by annealing at higher temperatures over a shorter period of time. This market also includes mask blank production for extreme ultraviolet (&#8220;EUV&#8221;) lithography with Veeco&#8217;s Ion Beam Deposition technology.  </span></p><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:10pt;margin:0pt;">This market also includes Advanced Packaging which refers to a portfolio of wafer-level assembly technologies that enable improved performance of electronic products, such as smartphones, high-end servers, and graphical processors. Demand for higher performance, smaller form factors, and lower power consumption in applications such as artificial intelligence, </p></td><td style="vertical-align:top;width:26.7%;border-bottom:1px solid #8faadc;border-left:1px solid #8faadc;border-top:1px solid #8faadc;margin:0pt;padding:0pt 5.4pt 0pt 5.27pt;"><div style="border-collapse:collapse;display:table;font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><div style="display:table-row;"><div style="width:18pt;display:table-cell;"></div><div style="display:table-cell;font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</div><div style="display:table-cell;padding:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:10pt;font-style:normal;font-weight:normal;">Laser Annealing</span></div></div></div><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin:0pt 0pt 0pt 18pt;"><span style="font-size:10pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p><div style="border-collapse:collapse;display:table;font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><div style="display:table-row;"><div style="width:18pt;display:table-cell;"></div><div style="display:table-cell;font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</div><div style="display:table-cell;padding:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:10pt;font-style:normal;font-weight:normal;">Ion Beam Deposition (&#8220;IBD&#8221;)</span></div></div></div><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:10pt;margin:0pt;"> <span style="visibility:hidden;">&#8203;</span></p><div style="border-collapse:collapse;display:table;font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><div style="display:table-row;"><div style="width:18pt;display:table-cell;"></div><div style="display:table-cell;font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</div><div style="display:table-cell;padding:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:10pt;font-style:normal;font-weight:normal;">Ion Beam Etch (&#8220;IBE&#8221;)</span></div></div></div><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin:0pt 0pt 0pt 36pt;"><span style="font-size:10pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p><div style="border-collapse:collapse;display:table;font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><div style="display:table-row;"><div style="width:18pt;display:table-cell;"></div><div style="display:table-cell;font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</div><div style="display:table-cell;padding:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:10pt;font-style:normal;font-weight:normal;">Wet Processing </span></div></div></div><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><div style="border-collapse:collapse;display:table;font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><div style="display:table-row;"><div style="width:18pt;display:table-cell;"></div><div style="display:table-cell;font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</div><div style="display:table-cell;padding:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:10pt;font-style:normal;font-weight:normal;">Advanced Packaging Lithography</span></div></div></div></td></tr></table></div></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">5</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><div style="margin-left:0pt;"><a id="_Hlk95404858"></a><table style="border-collapse:collapse;font-size:16pt;height:max-content;width:100%;"><tr><td style="vertical-align:middle;width:16.08%;border-bottom:1px solid #8faadc;border-right:1px solid #8faadc;border-top:1px solid #8faadc;margin:0pt;padding:0pt 5.27pt 0pt 5.4pt;"></td><td style="vertical-align:top;width:57.21%;border-bottom:1px solid #8faadc;border-left:1px solid #8faadc;border-right:1px solid #8faadc;border-top:1px solid #8faadc;margin:0pt;padding:0pt 5.27pt 0pt 5.27pt;"><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:10pt;margin:0pt;">mobile devices, consumer electronics, and high-performance computing is driving the adoption of advanced packaging technologies.<span style="font-size:12pt;"> </span>Veeco serves the advanced packaging market with lithography as well as wet processing equipment.</p><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:26.7%;border-bottom:1px solid #8faadc;border-left:1px solid #8faadc;border-top:1px solid #8faadc;margin:0pt;padding:0pt 5.4pt 0pt 5.27pt;"></td></tr><tr><td style="vertical-align:middle;width:16.08%;background:#dae3f3;border-bottom:1px solid #8faadc;border-right:1px solid #8faadc;border-top:1px solid #8faadc;margin:0pt;padding:0pt 5.27pt 0pt 5.4pt;"><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:10pt;font-weight:bold;margin:0pt;">Compound Semiconductor</p></td><td style="vertical-align:top;width:57.21%;background:#dae3f3;border-bottom:1px solid #8faadc;border-left:1px solid #8faadc;border-right:1px solid #8faadc;border-top:1px solid #8faadc;margin:0pt;padding:0pt 5.27pt 0pt 5.27pt;"><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:10pt;margin:0pt;">The Compound Semiconductor market includes Photonics, Power Electronics, RF Filters and Amplifiers, and Solar applications.</p><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:10pt;margin:0pt;">Photonics refers to light source technologies and laser-based solutions for 3D sensing, datacom and telecom applications. This includes micro-LED, laser diodes, edge emitting lasers and vertical cavity surface emitting lasers (&#8220;VCSELs&#8221;).</p><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">Micro-LEDs may be used for next generation advanced displays. A micro-LED display is a new approach which uses an array of red, blue, and green micro-LEDs to directly display an image without motion blur or image retention, and with improved brightness, darker blacks, and wider viewing angles.  </span></p><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:10pt;margin:0pt;">Power Electronics refers to semiconductor devices such as rectifiers, inverters and converters for the control and conversion of electric power in growing applications such as fast or wireless charging of consumer electronics and automotive applications. The power electronics market has historically been dominated by silicon devices. However, demand has been rapidly growing for applications in automotive, energy and industrial end-markets which require compound semiconductor devices such as those made from gallium nitride and silicon carbide to address higher voltages and higher power requirements.</p><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">RF power amplifiers and filters (including surface acoustic wave (&#8220;SAW&#8221;) and bulk acoustic wave (&#8220;BAW&#8221;) filters) are used in 5G communications infrastructure, smartphones, tablets, and mobile devices. They make use of radio waves for wireless broadcasting and/or communications.  </span></p><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:10pt;margin:0pt;">Solar refers to power obtained by harnessing the energy of the sun through the use of compound semiconductor devices such as photovoltaics. </p></td><td style="vertical-align:top;width:26.7%;background:#dae3f3;border-bottom:1px solid #8faadc;border-left:1px solid #8faadc;border-top:1px solid #8faadc;margin:0pt;padding:0pt 5.4pt 0pt 5.27pt;"><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><div style="border-collapse:collapse;display:table;font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><div style="display:table-row;"><div style="width:18pt;display:table-cell;"></div><div style="display:table-cell;font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</div><div style="display:table-cell;padding:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:10pt;font-style:normal;font-weight:normal;">Gallium Nitride (&#8220;GaN&#8221;) MOCVD</span></div></div></div><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin:0pt 0pt 0pt 36pt;"><span style="font-size:10pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p><div style="border-collapse:collapse;display:table;font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><div style="display:table-row;"><div style="width:18pt;display:table-cell;"></div><div style="display:table-cell;font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</div><div style="display:table-cell;padding:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:10pt;font-style:normal;font-weight:normal;">Arsenides/ Phosphides (&#8220;As/P&#8221;) MOCVD</span></div></div></div><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><div style="border-collapse:collapse;display:table;font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><div style="display:table-row;"><div style="width:18pt;display:table-cell;"></div><div style="display:table-cell;font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</div><div style="display:table-cell;padding:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:10pt;font-style:normal;font-weight:normal;">Wet Processing</span></div></div></div><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><div style="border-collapse:collapse;display:table;font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><div style="display:table-row;"><div style="width:18pt;display:table-cell;"></div><div style="display:table-cell;font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</div><div style="display:table-cell;padding:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:10pt;font-style:normal;font-weight:normal;">MBE</span></div></div></div><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><div style="border-collapse:collapse;display:table;font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><div style="display:table-row;"><div style="width:18pt;display:table-cell;"></div><div style="display:table-cell;font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</div><div style="display:table-cell;padding:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:10pt;font-style:normal;font-weight:normal;">ALD</span></div></div></div><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><div style="border-collapse:collapse;display:table;font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><div style="display:table-row;"><div style="width:18pt;display:table-cell;"></div><div style="display:table-cell;font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</div><div style="display:table-cell;padding:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:10pt;font-style:normal;font-weight:normal;">IBE</span></div></div></div><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin:0pt 0pt 0pt 36pt;"><span style="font-size:10pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p><div style="border-collapse:collapse;display:table;font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><div style="display:table-row;"><div style="width:18pt;display:table-cell;"></div><div style="display:table-cell;font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</div><div style="display:table-cell;padding:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:10pt;font-style:normal;font-weight:normal;">SiC Chemical Vapor Deposition (&#8220;CVD&#8221;)</span></div></div></div><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin:0pt 0pt 0pt 36pt;"><span style="font-size:10pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:middle;width:16.08%;border-bottom:1px solid #8faadc;border-right:1px solid #8faadc;border-top:1px solid #8faadc;margin:0pt;padding:0pt 5.27pt 0pt 5.4pt;"><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:10pt;font-weight:bold;margin:0pt;">Data Storage</p></td><td style="vertical-align:top;width:57.21%;border-bottom:1px solid #8faadc;border-left:1px solid #8faadc;border-right:1px solid #8faadc;border-top:1px solid #8faadc;margin:0pt;padding:0pt 5.27pt 0pt 5.27pt;"><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:10pt;margin:0pt;">Data Storage refers to the HDD market which provides significant value for mass storage and is an important part of large capacity storage applications. Our systems enable customers to manufacture the magnetic heads for hard disk drives.</p><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:26.7%;border-bottom:1px solid #8faadc;border-left:1px solid #8faadc;border-top:1px solid #8faadc;margin:0pt;padding:0pt 5.4pt 0pt 5.27pt;"><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><div style="border-collapse:collapse;display:table;font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><div style="display:table-row;"><div style="width:18pt;display:table-cell;"></div><div style="display:table-cell;font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</div><div style="display:table-cell;padding:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:10pt;font-style:normal;font-weight:normal;">IBD</span></div></div></div><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><div style="border-collapse:collapse;display:table;font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><div style="display:table-row;"><div style="width:18pt;display:table-cell;"></div><div style="display:table-cell;font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</div><div style="display:table-cell;padding:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:10pt;font-style:normal;font-weight:normal;">IBE</span></div></div></div><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><div style="border-collapse:collapse;display:table;font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><div style="display:table-row;"><div style="width:18pt;display:table-cell;"></div><div style="display:table-cell;font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</div><div style="display:table-cell;padding:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:10pt;font-style:normal;font-weight:normal;">Physical Vapor Deposition</span></div></div></div><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><div style="border-collapse:collapse;display:table;font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><div style="display:table-row;"><div style="width:18pt;display:table-cell;"></div><div style="display:table-cell;font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</div><div style="display:table-cell;padding:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:10pt;font-style:normal;font-weight:normal;">Mechanical (Lapping and Dicing)</span></div></div></div><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin:0pt 0pt 0pt 36pt;"><span style="font-size:10pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td></tr></table></div></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">6</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><div style="margin-left:0pt;"><table style="border-collapse:collapse;font-size:16pt;height:max-content;width:100%;"><tr><td style="vertical-align:middle;width:16.08%;border-bottom:1px solid #8faadc;border-right:1px solid #8faadc;border-top:1px solid #8faadc;margin:0pt;padding:0pt 5.27pt 0pt 5.4pt;"></td><td style="vertical-align:top;width:57.21%;border-bottom:1px solid #8faadc;border-left:1px solid #8faadc;border-right:1px solid #8faadc;border-top:1px solid #8faadc;margin:0pt;padding:0pt 5.27pt 0pt 5.27pt;"></td><td style="vertical-align:top;width:26.7%;border-bottom:1px solid #8faadc;border-left:1px solid #8faadc;border-top:1px solid #8faadc;margin:0pt;padding:0pt 5.4pt 0pt 5.27pt;"><div style="border-collapse:collapse;display:table;font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><div style="display:table-row;"><div style="width:18pt;display:table-cell;"></div><div style="display:table-cell;font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</div><div style="display:table-cell;padding:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:10pt;font-style:normal;font-weight:normal;">Diamond Like Carbon Deposition</span></div></div></div><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin:0pt 0pt 0pt 36pt;"><span style="font-size:10pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p><div style="border-collapse:collapse;display:table;font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><div style="display:table-row;"><div style="width:18pt;display:table-cell;"></div><div style="display:table-cell;font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</div><div style="display:table-cell;padding:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:10pt;font-style:normal;font-weight:normal;">Wet Processing</span></div></div></div><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:middle;width:16.08%;background:#dae3f3;border-bottom:1px solid #8faadc;border-right:1px solid #8faadc;border-top:1px solid #8faadc;margin:0pt;padding:0pt 5.27pt 0pt 5.4pt;"><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:10pt;font-weight:bold;margin:0pt;">Scientific &amp; Other</p></td><td style="vertical-align:top;width:57.21%;background:#dae3f3;border-bottom:1px solid #8faadc;border-left:1px solid #8faadc;border-right:1px solid #8faadc;border-top:1px solid #8faadc;margin:0pt;padding:0pt 5.27pt 0pt 5.27pt;"><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:10pt;margin:0pt;">Scientific &amp; Other refers to advanced materials research and a range of manufacturing applications including optical coatings (laser mirrors, optical filters, and anti-reflective coatings).</p><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:26.7%;background:#dae3f3;border-bottom:1px solid #8faadc;border-left:1px solid #8faadc;border-top:1px solid #8faadc;margin:0pt;padding:0pt 5.4pt 0pt 5.27pt;"><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><div style="border-collapse:collapse;display:table;font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><div style="display:table-row;"><div style="width:18pt;display:table-cell;"></div><div style="display:table-cell;font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</div><div style="display:table-cell;padding:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:10pt;font-style:normal;font-weight:normal;">Ion Beam Sputtering for optical coatings</span></div></div></div><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><div style="border-collapse:collapse;display:table;font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><div style="display:table-row;"><div style="width:18pt;display:table-cell;"></div><div style="display:table-cell;font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</div><div style="display:table-cell;padding:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:10pt;font-style:normal;font-weight:normal;">MBE for specialized laser and sensor devices</span></div></div></div><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin:0pt 0pt 0pt 36pt;"><span style="font-size:10pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p><div style="border-collapse:collapse;display:table;font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><div style="display:table-row;"><div style="width:18pt;display:table-cell;"></div><div style="display:table-cell;font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</div><div style="display:table-cell;padding:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:10pt;font-style:normal;font-weight:normal;">Wet Processing for sensors</span></div></div></div><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin:0pt 0pt 0pt 36pt;"><span style="font-size:10pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p><div style="border-collapse:collapse;display:table;font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><div style="display:table-row;"><div style="width:18pt;display:table-cell;"></div><div style="display:table-cell;font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</div><div style="display:table-cell;padding:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:10pt;font-style:normal;font-weight:normal;">ALD for a variety of applications </span></div></div></div><p style="font-family:'Calibri','Helvetica','sans-serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr></table></div><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">System Products</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Laser Annealing Systems</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Our laser annealing systems meet the industry demand for ultra-short time-scale annealing, heating the wafer up to temperatures just below the silicon melting point over a range of timeframes (hundreds of microseconds), enabling thermal annealing solutions at the most advanced semiconductor process nodes.&#160;This unique annealing technology provides a solution to the difficult challenge of fabricating ultra-shallow junctions and highly activated source/drain contacts at advanced logic nodes. In addition, our proprietary hardware design enables outstanding temperature uniformity across the wafer and die, by minimizing the pattern-density effect, thus reducing absorption variations.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We are also continuing to develop next generation melt anneal technology targeted for memory devices and annealing advanced logic devices at advanced nodes.&#160;As devices scale, achieving performance targets has become a challenge. To continue the roadmap, the industry is looking at new materials and the use of thermal processes that require nanosecond time-scale thermal annealing with temperatures exceeding the melting point. It is believed that nanosecond annealing will be required to meet the device targets at future nodes.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Ion Beam Deposition and Etch Systems</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Our NEXUS<sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;">&#174;</sup> Ion Beam systems are used to deposit and etch thin film layers for multiple end applications in the Semiconductor, Data Storage, RF and other various emerging markets. These systems utilize Veeco&#8217;s proven gridded ion source technology which delivers a charged ion beam directed at a substrate for the etch application and at a sputter target for the deposition application. Our NEXUS<sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;">&#174;</sup> IBD system has a leading position in multiple markets including EUV mask blank manufacturing in which it enables our customers to deposit multilayers with high precision and ultra-low defects which is essential for EUV lithography. Our ion sources and grid technology are incorporated into etch systems used to pattern magnetic materials for the 300mm Semiconductor STT-MRAM market. The IBD systems are also critical in the manufacture of hard disk drive magnetic heads where they are used to deposit various magnetic and oxide layers and deliver best-in-class film properties. Our NEXUS<sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;">&#174;</sup> IBE systems are used to precisely etch complex features on materials which are challenging to pattern by traditional reactive ion etching techniques. These systems are widely used in the data storage industry for patterning of magnetic and oxide materials and are essential for forming the precise shape of the magnetic head. The NEXUS<sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;">&#174;</sup> systems may be included on our cluster system platform to allow either parallel or sequential deposition/etch processes.</p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">7</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Our Lancer<sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;">TM</sup> IBE system is used for etching of SAW and BAW devices in the RF filter market and various waveguide patterning steps for AR/VR markets where their best-in-class film uniformity is a key advantage.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Our SPECTOR<sup style="font-size:8.25pt;line-height:100%;top:0pt;vertical-align:top;">&#174;</sup> Ion Beam Sputtering system was developed for high precision optical coatings and offers manufacturers state of the art optical thickness monitoring, improved productivity, and target material utilization, for cutting-edge optical interference coating applications. We also provide a broad array of ion beam sources. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Advanced Packaging Lithography</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We have a leading position in the Advanced Packaging lithography equipment market for applications such as FOWLP, Flip Chip (including Copper Pillar), Fan In Wafer Lever Packaging, 3D stacking, interposers and embedded die. The Advanced Packaging market is driven by the need for improved performance, reduced power consumption, and the ability to image smaller geometries for mobile and automotive applications.&#160;These applications continue to demand increasingly complex packaging techniques and heterogeneous device integration from integrated device manufacturers (&#8220;IDMs,&#8221;), Foundries, and outsourced semiconductor assembly and test (&#8220;OSAT&#8221;) companies. Our Advanced Packaging tools are designed to optimize productivity for leading-edge 200mm and 300mm Advanced Packaging applications by delivering proven reliability and low cost of ownership in high-volume manufacturing environments. Our products are known for best-in-class yield coupled with outstanding resolution and depth of focus.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Single Wafer Wet Processing</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We offer single wafer wet processing, and surface preparation systems which target growth opportunities in RF filters and amplifiers in the Compound Semiconductor market, as well as advanced packaging applications in the Semiconductor market. The WaferStorm<sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;">&#174;</sup> platform is based on our unique ImmJET&#8482; technology, which provides improved performance at a lower cost of ownership than conventional wet bench-only or spray-only approaches. This highly flexible platform targets solvent-based cleaning applications that require a significant level of process control and flexibility. The WaferEtch<sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;">&#174;</sup> platform provides highly uniform, selective etching with onboard end-point detection for improved process control and yield in bumping applications. In addition, we have developed a state-of-the-art solution with the WaferEtch<sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;">&#174;</sup> platform to address the requirements of wafer thinning. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Metal Organic Chemical Vapor Deposition Systems</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">MOCVD production systems are used to make GaN and As/P-based devices for applications including power electronics, RF devices, specialty LED, display, and many other photonics applications. Our proven TurboDisc<sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;">&#174;</sup> technology is at the heart of our MOCVD systems and is the key to enabling best-in-class deposition uniformity, yield performance and cost per wafer savings for our customers with a combined advantage of high operating uptime and low maintenance costs. Our Lumina<sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;">&#174;</sup> platform is used for As/P deposition, and features long campaigns and low defectivity for exceptional yield and flexibility. Our Propel<sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;">&#174;</sup> series enables the development of highly-efficient GaN-based power electronics, RF devices and advanced GaN-on-silicon micro-LEDs. The Propel<sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;">&#174;</sup> system offers 200mm and fully-automated 300mm technology and incorporates single-wafer reactor technology for outstanding film uniformity, yield, and device performance.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;background:#ffff00;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Molecular Beam Epitaxy Systems</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">MBE is the process of precisely depositing epitaxially-aligned atomically-thin crystalline layers, or epilayers, of elemental materials onto a substrate in an ultra-high vacuum environment. We are a leading supplier of MBE systems worldwide.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Our MBE systems, sources, and components are used to develop and manufacture compound semiconductor devices in a wide variety of applications such as high-power fiber lasers, infrared detectors, mobile phones, radar systems, high efficiency solar cells, and basic materials science research. The GENxplor<sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;">&#174;</sup> MBE system creates high quality epitaxial layers and is ideal for cutting-edge research on a wide variety of materials including GaAs, antimonides, nitrides, and oxides on 3&#8221; diameter substrates. </p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">8</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Atomic Layer Deposition Systems</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">ALD is a thin-film deposition method in which a film is deposited on a substrate uniformly with precise control down to the atomic scale. Veeco offers a full suite of ALD systems for non-semiconductor front-end production applications across a wide range of markets and applications such as energy, optical, electronics, micro-electro mechanical systems (&#8220;MEMS&#8221;), nanostructures, and biomedical. We have recently developed the Firebird<sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;">&#174;</sup> ALD system, a fully automated tool capable of managing fragile wafers in a continuous operational sequence. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Other Systems</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We have other deposition systems including Physical Vapor Deposition, Diamond-Like Carbon Deposition, and Chemical Vapor Deposition Systems primarily sold to the data storage market. In addition, we have mechanical systems such as saws and lappers for the data storage industry as well as the power semiconductor market. Finally, we have Gas-mixing systems primarily sold to the semiconductor market. <span style="white-space:pre-wrap;">We also continue to focus on penetrating adjacent markets with organically developed and acquired technology, including Ion Beam Deposition for low resistance metals and SiC CVD systems for power electronics applications.  </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Sales and Service</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="_Hlk30583633"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We sell our products and services worldwide through various strategically located facilities in the United States, Europe, and the Asia-Pacific region. We believe that our customer service organization is a significant factor in our success. We provide service and support on a warranty, service contract, and an individual service-call basis. We believe that offering timely support creates stronger relationships with customers. Revenue from the sales of parts, upgrades, service, and support represented approximately 24%, 28%, and 30% of our net sales for the years ended December&#160;31, 2022, 2021, and 2020, respectively. Parts and upgrade sales represented approximately 18%, 21%, and 23% of our net sales for those years, respectively, and service and support sales were 6%, 7%, and 7% respectively.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Customers</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="_Hlk30583647"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We sell our products to many of the world&#8217;s semiconductor IDMs and Foundries, OSAT, HDD, and photonics manufacturers, as well as research centers and universities. We rely on certain principal customers for a significant portion of our sales. Sales to Western Digital and TDK Headway each separately accounted for more than 10% of our total net sales in 2021; and sales to Seagate Technology accounted for more than 10% of our total net sales in 2020. No customer accounted for more than 10% of our total net sales in 2022. If any principal customer discontinues its relationship with us or suffers economic difficulties, our business prospects, financial condition, and operating results could be materially and adversely affected.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Research and Development</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Our research and development functions are focused on the timely creation of new products and enhancements to existing products, both of which are necessary to maintain our competitive position. We collaborate with our customers to align our technology and product roadmaps to customer requirements. Our research and development activities take place at our facilities in San Jose, California; Plainview, New York; Horsham, Pennsylvania; Somerset, New Jersey; St. Paul, Minnesota; and Waltham, Massachusetts.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Suppliers</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We outsource certain functions to third parties, including the manufacture of several of our systems. While we rely on our outsourcing partners to perform their contracted functions, we maintain some level of internal manufacturing capability for these systems. Refer to Item 1A, &#8220;Risk Factors,&#8221; for a description of risks associated with our reliance on suppliers and outsourcing partners.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">9</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Backlog</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="_Hlk30583662"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Our backlog consists of orders for which we received a firm purchase order, a customer-confirmed shipment date generally within twelve months, and a deposit, when required. Our backlog increased to $499.9 million at December&#160;31, 2022 from $440.2 million at December&#160;31, 2021. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Competition</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">In each of the markets that we serve, we face competition from established competitors, some of which have greater financial, engineering, and marketing resources than we do, as well as from smaller competitors. In addition, many of our products face competition from alternative technologies, some of which are more established than those used in our products. Significant factors for customer selection of our tools include system performance, accuracy, repeatability, ease of use, reliability, cost of ownership, and technical service and support. None of our competitors compete with us across all of our product lines.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Our principal competitors include: Aixtron; Applied Materials; Canon; Grand Plastics Technology; Mattson; Screen Semiconductor Solutions; Shanghai Micro Electronics Equipment; and Suss MicroTec.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="_Hlk535835733"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Intellectual Property</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="_Hlk30583674"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Our success depends, in part, on our proprietary technology, and we have over 400 patents in the United States and other countries.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We have patents and exclusive and non-exclusive licenses to patents owned by others covering certain of our products, which we believe provide us with a competitive advantage. We have a policy of seeking patents on inventions concerning new products and improvements as part of our ongoing research, development, and manufacturing activities. We believe that there is no single patent or exclusive or non-exclusive license to patents owned by others that is critical to our operations, as the success of our business depends primarily on the technical expertise, innovation, customer satisfaction, and experience of our employees. Refer to Item 1A, &#8220;Risk Factors,&#8221; for a description of risks associated with intellectual property.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="_Hlk535835920"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Human Capital Resources</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="_Hlk63162046"></a><a id="_Hlk62803284"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Veeco&#8217;s global workforce spans twelve countries around the world. At the end of 2022, we had 1,221 employees with 265 located in the Asia-Pacific region, 42 in the EMEA region, and 914 in the United States. Approximately 25% of our employees are involved in research and development; 55% are involved in operations, manufacturing, service, and quality assurance; and 20% are involved in sales, order administration, marketing, finance, information technology, general management, and other administrative functions. Our success depends on our ability to attract, retain, and motivate employees. We compete for talent with other companies and organizations. We consider our relations with the Veeco United Team to be favorable. We are subject to various federal, state, and local regulations, and regularly monitor all key employment activities, such as hiring, termination, pay and working practices to ensure compliance with such regulations. In addition, we may supplement the Veeco United Team with contractors and other temporary workers. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Our Core Values</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">All Veeco employees are expected to honor our Core Values, which define the way we conduct our business in everyday actions and choices and form the foundation of our culture:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">We will always put our CUSTOMERS first</span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">We will never compromise on SAFETY</span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">We will always demonstrate RESPECT</span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">We will never stop IMPROVING</span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">We will always be ACCOUNTABLE</span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">We will never forget that DIVERSITY and INCLUSION makes us stronger</span></td></tr></table></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">10</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Employment, Recruitment and Development</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Our recruitment programs are regionally focused. Hiring is done at a local level to ensure compliance with applicable regulations. We advertise job openings and source candidates broadly to attract a diverse candidate pool. As a leader in our industry, we are able to attract a strong candidate pool and have been successful in filling vacancies. In fiscal 2022, we hired 254 employees, 197 of whom were within the United States, 49 of whom were in the Asia-Pacific region, and 8 of whom were in the EMEA region. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We track and report key talent metrics including workforce demographics, talent pipeline and diversity. We invest in professional development programs to provide opportunities for individuals to advance their careers in either technical/individual contributor or leadership tracks. Many of our training and development programs are offered on-line for the benefit of employees located around the world. Additional focus is placed on the development of future leaders and we utilize a talent review process through which high-potential and high-performing employees are assessed for future leadership roles as part of our succession management process. We monitor turnover statistics carefully, since turnover is an important indicator of employee satisfaction. Our 12-month rolling average for voluntary turnover at December 31, 2022 was approximately 9.4%. Our employee average tenure is more than 7 years.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Employee Engagement</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="_Hlk93657622"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The engagement and satisfaction of the Veeco United Team is critical to our culture and our success. In 2019, we conducted a formal employee survey designed to assess global employee engagement, leadership, work environment and culture. Over 90% of our employees participated in the survey, itself an indicator of a high level of employee engagement. Participants provided over 2,000 responses to open-ended questions. The findings from this survey established an agenda for various initiatives designed to strengthen our Company. In 2021, we conducted a second formal employee survey, using the same survey instrument. Approximately 90% of employees again participated in the survey and, again, nearly 2,000 responses were provided to open-ended questions. We saw significant improvements across all survey areas, and we remain committed to working with employees to strengthen the Company&#8217;s culture. Our executives conduct regular meetings with our global workforce providing employees with opportunities to engage with senior leaders and ask questions in open Q&amp;A sessions. Finally, we maintain and regularly remind our employees about our confidential third-party hotline service that can be utilized to share their concerns. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> <span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Compensation Philosophy</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Our compensation philosophy is targeted to support our employees&#8217; financial, physical, and mental health and well-being. We utilize independent surveys to ensure that our total compensation packages are competitive. We help employees share in the success of the Company through various programs including profit sharing and bonus plans, equity awards, and an Employee Stock Purchase Plan (&#8220;ESPP&#8221;). In addition to providing our employees with competitive compensation packages, we offer benefits designed to meet the needs of employees and their families, including paid time off, medical, dental and vision coverage, disability income protection, life insurance, retirement savings contributions, and more.<span style="font-size:12pt;"> </span>Veeco pays the majority or all of the costs for many of these benefits.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Diversity and Inclusion</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We are committed to building and sustaining a culture of diversity and inclusion where our people can be their authentic selves and are encouraged to reach their full potential. Our Veeco team, like the technologies we enable, is a rich combination of diverse individuals coming together as Veeco United to make a material difference for our people, our customers, and the world. As a global technology company, we recognize that a diverse employee population makes Veeco stronger, more innovative, and a more engaging place to work. We are always striving to attract talented individuals from a global candidate pool. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">In the second quarter of 2021, Veeco established a Diversity and Inclusion Council. The Council, composed of Veeco colleagues from many different parts of the Company, represents Veeco&#8217;s ongoing commitment to inclusion of all genders, sexual orientations, races, ethnic origins, religions, and diversity of thought. The team has recently established </p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">11</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Veeco&#8217;s Diversity and Inclusion Mission Statement and Charter. The charter affirms our commitment to building awareness, enhancing community partnerships, addressing diversity in our recruiting and hiring practices, empowering employees to promote D&amp;I initiatives, and identifying opportunities to have meaningful engagements with peers and the leadership team. We are excited to continue developing initiatives to promote and celebrate diversity at Veeco.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Employee Health and Safety, Pandemic Response</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We are committed to providing a safe and healthy workplace for all employees. We accomplish this through strict compliance with applicable laws and regulations regarding workplace safety, including recognition and control of workplace hazards, tracking injury and illness rates, utilizing a global travel health program, and maintaining detailed emergency and disaster recovery plans.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Our highest priorities throughout the pandemic were, and continue to be, the health and well-being of our employees, customers, suppliers, and stakeholders. From the beginning of the pandemic, through the recent challenges posed by the acceleration of coronavirus variants, we have taken precautions to protect employees, visitors, and customers while minimizing disruption to our business. Our facilities remained operational as an &#8220;essential business&#8221; throughout the pandemic. However, we implemented rigorous health and safety protocols at our manufacturing facilities, including extensively and frequently disinfecting our facilities, limiting access to our facilities, checking temperatures of individuals entering our facilities, staggering shifts to minimize employee overlap in gowning areas, and providing protective equipment in order to minimize the risks to our employees. In addition, we required many of our employees to work from home wherever possible. We protected employees, customers, and stakeholders by providing remote meetings, demos, and service, whenever possible. Our Veeco United team was committed to remaining flexible and responsive throughout the pandemic. We carefully monitored and responded to local, state, and federal guidance related to the pandemic. We developed our COVID-19 Pledge to describe all the measures we implemented in our facilities to keep employees working on-site safe throughout the pandemic.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Available Information</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Our corporate website address is www.veeco.com. All filings we make with the Securities and Exchange Commission (&#8220;SEC&#8221;), including our Annual Report on Form&#160;10-K, our Quarterly Reports on Form&#160;10-Q, our Current Reports on Form&#160;8-K, our proxy statements and any amendments thereto filed or furnished pursuant to Section&#160;13(a)&#160;or 15(d)&#160;of the Securities Exchange Act of 1934, as amended, are available for free in the Investor Relations section of our website as soon as reasonably practicable after they are filed with or furnished to the SEC. The reference to our website address does not constitute inclusion or incorporation by reference of the information contained on our website in this Form&#160;10-K or other filings with the SEC, and the information contained on our website is not part of this document.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="_11ade9a3_48ad_4484_84a5_3f23a977beaf"></a><a id="_Hlk125375364"></a><a id="Item1A_RiskFactors"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Item 1A. Risk Factors</b><b style="font-weight:bold;"> </b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Key Risk Factors That May Impact Future Results </b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0.05pt 0pt 0pt 0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Stockholders should carefully consider the risk factors described below when evaluating the Company. Any of these factors, many of which are beyond our control, could materially and adversely affect our business, financial condition, operating results, cash flow, and stock price.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;text-decoration-color:#000000;text-decoration-line:underline;text-decoration-style:solid;">Risks Related to Our Business and Industry</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;">Unfavorable market conditions have adversely affected, and may continue to adversely affect, our operating results.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Conditions of the markets in which we operate are volatile and may experience significant deterioration. Changing market conditions require that we continuously monitor and reassess our strategic resource allocation decisions. If we fail to properly adapt to changing business environments, we may lack the infrastructure and resources necessary to scale up our businesses to successfully compete during periods of growth, or we may incur excess fixed costs during periods of decreasing demand. Adverse market conditions relative to our products may result in:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">12</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">reduced demand for our products, or the rescheduling or cancellation of orders for our products which may result in negative backlog adjustments; </span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">asset impairments, including the impairment of goodwill and other intangible assets;</span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">unfavorable changes in customer mix and product mix; </span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">increased price competition for our products, or increased competition from sellers of used equipment or lower-priced alternatives to our products, which could lead to lower profit margins for our products; </span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">increased inventory obsolescence; </span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">disruptions in our supply chain; </span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">higher operating costs, caused by matters such as rising inflation and interest rates in various regions, which the Company is currently experiencing; and</span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">an increase in uncollectable amounts due from our customers resulting in increased reserves for doubtful accounts and write-offs of accounts receivable. </span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">If the markets in which we participate experience deteriorations or downturns, this could negatively impact our sales and revenue generation, margins, operating expenses, and profitability. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;">We face significant competition.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We face significant competition throughout the world, which may increase as certain markets in which we operate continue to evolve. Some of our competitors have greater financial, engineering, manufacturing, and marketing resources than us. Other competitors are located in regions with lower labor costs and other reduced costs of operation. In addition, our ability to compete in foreign countries against local manufacturers may be hampered by nationalism, social attitudes, laws, regulations, and policies within such countries that favor local companies over U.S. companies or that are otherwise designed to promote the development and growth of local competitors. Furthermore, we face competition from smaller emerging equipment companies whose strategy is to provide a portion of the products and services we offer, with a focused approach on innovative technology for specialized markets. New product introductions or enhancements by us or our competitors could cause a decline in sales or loss of market acceptance of our existing or prior generation products. Increased competitive pressure could also lead to intensified price competition resulting in lower profit margins. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;">We operate in industries characterized by rapid technological change. </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Each of the industries in which we operate is subject to rapid technological change. Our ability to remain competitive depends on our ability to enhance existing products and develop and manufacture new products in a timely and cost effective manner and to accurately predict technology transitions. Our performance may be adversely affected if we are unable to accurately predict evolving market trends and related customer needs and to effectively allocate our resources among new and existing products and technologies.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The semiconductor industry, characterized by a high frequency and complexity of technology transitions and inflections (commonly referred to as &#8220;Moore&#8217;s Law&#8221;), poses unique risks and challenges. Our ability to successfully compete in this market will depend on our ability to address and manage a number of industry-specific risks, including and without limitation to the following:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">the heightened cost of research and development, associated with matters such as shrinking geometries, complex device structures, multiple applications and process steps, and the use of new materials; </span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">customer demands for shorter cycle times between order placements and product shipments, which will necessitate accurate forecasting of customer investment;</span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">customer demands for continuous reductions in the total cost of manufacturing system ownership, together with challenging equipment service demands and the resulting need for us to properly allocate our service resources;</span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">the number of types and varieties of semiconductors and number of applications across multiple substrate sizes;</span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">the need to reduce product development time, despite increasingly difficult technical challenges; </span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">our customers&#8217; ability to reconfigure and re-use our equipment, resulting in reduced demand for new equipment or services from us; and</span></td></tr></table></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">13</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">the importance of establishing market positions in segments with growing demand.</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">If we fail to properly allocate appropriate resources, successfully develop and commercialize products to meet customer demand, and effectively anticipate industry trends, our business and results of operations may be adversely impacted.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">In addition, the semiconductor industry has experienced, and may continue to experience, significant consolidation, among both semiconductor manufacturers and manufacturing equipment suppliers.  Larger competitors resulting from consolidations may have certain advantages over us, including but not limited to more efficient cost structures, substantially greater financial and other resources, greater presence in key markets, and greater name recognition.  Consolidation among our competitors and integration among our customers could erode our market share, negatively impact our ability to compete, and have a material adverse effect on our business.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Whether in connection with the semiconductor industry or otherwise, we are also exposed to potential risks associated with unexpected product performance issues. Our product designs and manufacturing processes are complex and could contain unexpected product defects, especially when products are first introduced. Unexpected product performance issues could result in significant costs and damages, including increased service and warranty expenses, the need to provide product replacements or modifications, reimbursement for damages caused by our products, product recalls, related litigation, product write-offs, and disposal costs. Product defects could also result in personal injury or property damage, claims for which may exceed our existing insurance coverages. These and other costs could be substantial and our reputation could be harmed, resulting in a reduced demand for our products and a negative effect on our business, financial condition, and results of operations.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;">Certain of our sales are dependent on the demand for consumer electronic products and automobiles, which can experience significant volatility. </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The demand for semiconductors, HDDs and other devices is highly dependent on sales of consumer electronic products, such as tablets, smartphones, laptops and wearable devices. In addition, as a result of the growing automotive semiconductor market, semiconductor demand is also heavily influenced by the demand for automobiles. Factors that could affect the levels of spending on consumer electronic products and automobiles include consumer confidence, access to credit, volatility in fuel and other energy costs, conditions in the residential real estate and mortgage markets, labor and healthcare costs, and other macroeconomic factors affecting consumer spending behavior. The emergence of new or competing technologies may also affect demand for consumer electronic products. These and other factors have had and could continue to have an adverse effect on the demand for our customers&#8217; products and, in turn, on our customers&#8217; demand for our products and services. Furthermore, in the past, some of our customers have overestimated their potential for market share growth. If this growth is overestimated, we may experience cancellations of orders in backlog, rescheduling of customer deliveries, obsolete inventory, and liabilities to our suppliers for products no longer needed. Alternatively, changes that result in sudden increases in demand for consumer electronic products and automobiles may result in a shortage of parts and materials needed to manufacture our products, and attendant shipping delays (both to us and to our customers) and/or the cancellation of orders placed by our customers.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;">The effects of the COVID-19 pandemic have strained and have negatively impacted our businesses and operations, and the duration and extent to which COVID-19 may impact our future results of operations and overall financial performance remains uncertain.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The outbreak and continuing spread of COVID-19 and its variants have resulted in a substantial curtailment of business activities worldwide and has caused and is likely to continue to cause weakened economic conditions, both domestically and abroad, including in markets in Asia and Europe from which we derive the majority of our revenue. Government restrictions (such as the China government lockdowns in 2022 of Shenzhen and Shanghai), quarantines and worker absenteeism as a result of COVID-19 have led to a significant number of business closures and other slowdowns. These slowdowns have adversely impacted and will likely continue to adversely impact Veeco directly, as well as our customers, suppliers and other partners.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Although there has been recent improvement in the global economy since the most severe effects of COVID-19, many macroeconomic variables remain dynamic. While all of our global sites are currently operational, any local pandemic </p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">14</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">outbreaks could require us to temporarily curtail production levels or temporarily cease operations based on government mandates. Furthermore, the COVID-19 conditions have adversely impacted, and may continue to adversely impact, our ability to timely source critical parts and materials and to provide on-site services to our customers. Supply chain shortages, which have been and may continue to be exacerbated by shipping delays caused by transportation interruptions (associated with matters such as reduced availability of air transport, port closures, and increased border controls), could require us to purchase excess inventory with longer lead times, which could increase inventory obsolescence risk while negatively impacting our working capital. Shortages of critical parts have strained and may continue to strain our manufacturing capacity, threatening to adversely impact our ability to meet customer needs, which may negatively impact our revenues, results of operations and financial condition. While we have been able to successfully mitigate these risks thus far, without material negative impact to our financial performance, our continued ability to do so remains uncertain.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">In addition, the conditions caused by COVID-19 could adversely affect our customers&#8217; ability or willingness to purchase our products or services or otherwise delay prospective customers&#8217; purchasing decisions. These conditions may delay the provisioning of our offerings, or lengthen payment terms, all of which could adversely affect our future sales, operating results and overall financial performance. In addition, adverse impacts on the creditworthiness of our customers and other counterparties may negatively affect their ability to pay amounts owed to us, which could materially and adversely affect our results of operations and financial condition.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The COVID-19 pandemic has resulted in significant disruption of global financial markets and could negatively impact our stock price, our access to capital, and our business and results of operations in the near and long-term. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;">We have a concentrated customer base, located primarily in a limited number of regions, which operates in highly concentrated industries. </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Our customer base continues to be highly concentrated. Orders from a relatively limited number of customers have accounted for, and likely will continue to account for, a substantial portion of our net sales, which may allow customers to demand pricing and other terms less favorable to us (including extended warranties, indemnification commitments, and the obligation to continue production of older products). Customer consolidation activity involving some of our largest customers could result in an even greater concentration of our sales in the future. Management changes at key customer accounts could result in a loss of future sales due to vendor preferences or other reasons and may introduce new challenges in managing customer relationships. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">If a principal customer discontinues its relationship with us or suffers economic setbacks, our business, financial condition, and operating results could be materially and adversely affected. Our ability to increase sales in the future will depend in part upon our ability to obtain orders from new customers and we cannot be certain that we will be successful in these efforts. In addition, because a relatively small number of large manufacturers, many of whom are our customers, dominate the industries in which they operate, it may be especially difficult for us to replace these customers if we lose their business. A significant portion of orders in our backlog are orders from our principal customers. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">In addition, a substantial investment is required by customers to install and integrate capital equipment into a production line. As a result, once a manufacturer has selected a particular vendor to supply capital equipment, the manufacturer will often attempt to consolidate its other capital equipment requirements with the same vendor. Accordingly, if a customer selects a competitor&#8217;s product over ours, we could experience difficulty selling to that customer for a significant period of time. Furthermore, we typically do not have long-term contracts with our customers. As a result, our agreements with our customers do not provide assurance of future sales, and we are exposed to competitive price pressures on new orders we attempt to obtain. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Our customer base is also highly concentrated in terms of geography, and the majority of our sales are to customers located in a limited number of countries. Dependence upon sales emanating from a limited number of regions increases our risk of exposure to local difficulties and challenges, such as those associated with regional economic downturns, political instability, trade wars and other trade disruptions, fluctuating currency exchange rates, natural disasters, social unrest, pandemics, terrorism, and acts of war. Our reliance upon customer demand arising primarily from a limited number of countries could materially and adversely impact our future results of operations. </p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">15</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;">The cyclicality of the industries we serve directly affects our business. </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Our business depends in large part upon the capital expenditures of manufacturers in our four end-markets: Semiconductor; Compound Semiconductor; Data Storage; and Scientific&#160;&amp; Other. We are subject to the business cycles of these industries, the timing, length, and volatility of which are difficult to predict. These industries have historically been highly cyclical and have experienced significant economic downturns in the last decade. As a capital equipment provider, our revenue depends in large part on the spending patterns of these customers, who often delay expenditures or cancel or reschedule orders in reaction to variations in their businesses or general economic conditions. In downturns, we must be able to quickly and effectively align our costs with prevailing market conditions, as well as motivate and retain key employees. However, because a portion of our costs are fixed, our ability to reduce expenses quickly in response to revenue shortfalls may be limited. Downturns in one or more of these industries have had, and will likely have, a material adverse effect on our business, financial condition, and operating results. Alternatively, during periods of rapid growth, we must be able to acquire and develop sufficient manufacturing capacity to meet customer demand and attract, hire, assimilate, and retain a sufficient number of qualified people. Our net sales and operating results may be negatively affected if we fail to predict and effectively respond. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;">Our failure to estimate customer demand accurately could result in inventory obsolescence, liabilities to our suppliers for products no longer needed, and manufacturing interruptions or delays which could affect our ability to meet customer demand. </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The success of our business depends in part on our ability to accurately forecast and supply equipment and services that meet the rapidly changing technical and volume requirements of our customers. To meet these demands, we depend on the timely delivery of parts, components, and subassemblies from our suppliers. Uncertain worldwide economic conditions and market instabilities make it difficult for us (and our customers) to accurately forecast future product demand. If actual demand for our products is different than expected, we may purchase more or fewer parts than necessary or incur costs for canceling, postponing, or expediting delivery of parts. If we overestimate the demand for our products, excess inventory could result which could be subject to heavy price discounting, which could become obsolete, and which could subject us to liabilities to our suppliers for products no longer needed. Similarly, we may be harmed in the event that our competitors overestimate the demand for their products and engage in heavy price discounting practices as a result. In addition, the volatility of demand for capital equipment poses risks for companies in our supply chain, including challenges associated with inventory management and fluctuating working capital requirements. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="_Hlk92814387"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Furthermore, certain key parts may be subject to long lead-times or may be obtainable only from a single supplier or limited group of suppliers, and some sourcing and assembly is provided by suppliers located in countries other than the United States. We may experience significant interruptions in our manufacturing operations, delays in our ability to timely deliver products or services, increased costs, or customer order cancellations as a result of:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">the failure or inability of our suppliers to timely deliver quality parts; </span></td></tr></table><a id="_Hlk92814261"></a><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">volatility in the availability </span><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">and cost of materials; </span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">difficulties or delays in obtaining required import or export approvals; </span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">information technology or infrastructure failures; </span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">natural disasters such as earthquakes, tsunamis, fires, floods, or storms; or </span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">other causes such as regional or global economic downturns or recessions, international trade disruptions, pandemics, political instability, terrorism, or acts of war, which could result in delayed deliveries, manufacturing inefficiencies, increased costs, or order cancellations. </span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">In addition, in the event of an unanticipated increase in demand for our products, our need to rapidly increase our business and manufacturing capacity may be limited by our working capital constraints and those of our suppliers, which may cause or exacerbate interruptions in our manufacturing and supply chain operations. Any or all of these factors could materially and adversely affect our business, financial condition, and results of operations. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">16</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;">We rely on a limited number of suppliers, some of whom are our sole source for particular components. </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="_Hlk29565854"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Certain of the parts, components, and sub-assemblies included in our products are obtained from a single source or a limited group of suppliers. Our inability to develop alternative sources, as necessary, could result in a prolonged interruption in our ability to supply related products, a failure on our part to meet the demands our customers, and a significant increase in the price of related products, which could adversely affect our business, financial condition, and results of operations. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;">Our failure to successfully manage our outsourcing activities or failure of our outsourcing partners to perform as anticipated could adversely affect our results of operations. </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">To better align our costs with market conditions, increase the percentage of variable costs relative to total costs, and to increase productivity and operational efficiency, we have outsourced certain functions to third parties, including the manufacture of several of our systems. While we maintain some level of internal manufacturing capability for these systems, we rely on our outsourcing partners to perform their contracted functions to allow us flexibility to adapt to changing market conditions, including periods of significantly diminished order volumes. If our outsourcing partners do not perform as required, or if our outsourcing efforts do not allow us to realize the intended cost savings and flexibility, our results of operations (and those of our third-party providers) may be adversely affected. Disputes and possibly litigation involving third party providers could result and we could suffer damage to our reputation. Dependence on contract manufacturing and outsourcing may also adversely affect our ability to bring new products to market. Although we attempt to select reputable providers, one or more of these providers could fail to perform as we expect. If we do not effectively manage our outsourcing efforts or if third party providers do not perform as anticipated, we may not realize the benefits of productivity improvements and we may experience operational difficulties, increased costs, manufacturing and installation interruptions or delays, inefficiencies in the structure and operation of our supply chain, loss of intellectual property rights, quality issues, increased product time-to-market, and an inefficient allocation of our human resources, any or all of which could materially and adversely affect our business, financial condition, and results of operations. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;letter-spacing:-0.1pt;">The timing of our orders, shipments, and revenue recognition may cause our quarterly operating results to fluctuate significantly. </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We derive a substantial portion of our net sales in any fiscal period from the sale of a relatively small number of high-priced systems. As a result, the timing for the recognition of revenue for a single transaction could have a material effect on our sales and operating results for a particular fiscal period. As is typical in our industry, orders and shipments often occur during the last few weeks of a quarter. As a result, a delay of only a week or two can impact which period revenue is reported and can cause volatility in our revenue for a given reporting period. Our quarterly results have fluctuated significantly in the past and we expect this trend to continue. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;letter-spacing:-0.1pt;">Our sales cycle is long and unpredictable. </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Historically, we have experienced long and unpredictable sales cycles (the period between our initial contact with a potential customer and the time that we recognize revenue from resulting sales to that customer). It is not uncommon for our sales cycle to exceed twelve months. The timing of an order often depends on our customer&#8217;s capital expenditure budget, over which we have no control. In addition, the time it takes us to procure and build a product to customer specifications typically ranges from three to twelve months. When coupled with the fluctuating amount of time required for shipment and installation, our sales cycles often vary widely, and these variations can cause fluctuations in our operating results. As a result of our lengthy sales cycles, we may incur significant research and development, selling, general, and administrative expenses before we generate revenue for these products. We may never generate the anticipated revenue if a customer cancels or otherwise changes its purchase plans, or if our evaluation systems do not satisfy customer requirements (which could result in working capital constraints, excess inventory or inventory obsolescence, and other harm to the Company). These risks are particularly prevalent in the semiconductor market, which is often characterized by long customer qualification times, typically twelve to eighteen months. Once qualified, the ramp to volume production can take an additional extended period of time, often twelve to twenty-four months. During these periods, little to no revenue will be recognized by us, while we will continue to incur research and </p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">17</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">development costs. Despite our efforts, our products may never be qualified and may never achieve design-tool-of-record (&#8220;DTOR&#8221;) or production-tool-of-record (&#8220;PTOR&#8221;) status, and our financial condition and results of operations may be materially and adversely affected.     </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;letter-spacing:-0.1pt;">Our backlog is subject to customer cancellation or modification which could result in decreased sales, increased inventory obsolescence, and liabilities to our suppliers for products no longer needed.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Customer purchase orders may be cancelled or rescheduled by the customer, sometimes with limited or no penalties, which may result in increased or unrecoverable costs for the Company. We adjust our backlog for such cancellations and contract modifications, among other items. A downturn in one or more of our businesses could result in an increase in order cancellations and postponements. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We write-off excess and obsolete inventory based on historical trends, future usage forecasts, and other factors including the amount of backlog we have on hand. If our backlog is canceled or modified, our estimates of future product demand may prove to be inaccurate, in which case we may have understated the write-off required for excess and obsolete inventory. In the future, if we determine that our inventory is overvalued, we will be required to recognize associated costs in our financial statements at the time of such determination. In addition, we place orders with our suppliers based on our customers&#8217; orders. If our customers cancel their orders with us, we may not be able to cancel our orders with our suppliers. Resulting charges could have a material adverse effect on our results of operations and financial condition. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;letter-spacing:-0.1pt;">We are exposed to risks associated with business combinations, acquisitions, strategic investments and divestitures. </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="letter-spacing:-0.1pt;">We have completed several significant acquisitions and investments in the past, including our recent acquisition of Epiluvac AB, and we will consider new opportunities in the future. Acquisitions and investments involve numerous risks, many of which are unpredictable and beyond our control, including the following:</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;letter-spacing:-0.1pt;">the failure to realize expected synergies and difficulties and costs, including the diversion of management&#8217;s attention, in integrating the personnel, operations, technologies, and products of acquired companies;</span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;letter-spacing:-0.1pt;">the inability to complete proposed transactions as anticipated, resulting in obligations to pay professional and other expenses, including any applicable termination fees; </span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;letter-spacing:-0.1pt;">unknown, underestimated, and undisclosed commitments or liabilities; </span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;letter-spacing:-0.1pt;">increased amortization expenses relating to intangible assets; and </span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;letter-spacing:-0.1pt;">other adverse effects on our business, including the potential impairment and write-down of amounts capitalized as intangible assets and goodwill as part of the acquisition, as a result of such matters as technological advancements or worse-than-expected performance by the acquired company. </span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="letter-spacing:-0.1pt;">If we issue equity securities to pay for an acquisition or investment, the ownership percentage of our then-current shareholders would be reduced and the value of the shares held by these shareholders could be diluted, which could adversely affect the price of our stock. If we use cash to pay for an acquisition or investment, the payment could significantly reduce the cash that would be available to fund our operations, pay our indebtedness, or be used for other purposes, which could have a negative effect on our business. </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="letter-spacing:-0.1pt;">In addition, we continually assess the strategic fit of our businesses and may from time to time seek to divest portions of our Company that no longer fit our strategic plan. Divestitures involve significant risks and uncertainties, including the ability to sell such businesses at satisfactory prices, on acceptable terms, and in a timely manner. Divestitures may also disrupt other parts of our businesses, distract the attention of our management, result in a loss of key employees or customers, and require that we allocate internal resources that would otherwise be devoted to operating our existing businesses. Divestitures may expose us to unanticipated liabilities (including those arising from representations and warranties made to a buyer regarding the businesses) and to ongoing obligations to support the businesses following such divestitures, any and all of which could adversely affect our financial condition and results of operations.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">18</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;background:#ffffff;margin:0pt;"><b style="font-weight:bold;text-decoration-color:#000000;text-decoration-line:underline;text-decoration-style:solid;">Risks Associated with Operating a Global Business</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;">We are exposed to risks of operating businesses outside the United States.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">A majority of our sales are to customers, and significant elements of our supply chain are from suppliers, who are located outside of the United States, which we expect to continue. Our non-U.S. sales and operations are subject to risks inherent in conducting business outside the United States, many of which are beyond our control including:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">political and social attitudes, laws, rules, regulations, and policies within countries that favor local companies over U.S. companies, including government-supported efforts to promote local competitors;</span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">global trade issues and uncertainties with respect to trade policies, including tariffs, trade sanctions, and international trade disputes, and the ability to obtain required import and export licenses;</span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">differing legal systems and standards of trade which may not honor our intellectual property rights and which may place us at a competitive disadvantage;</span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">pressures from foreign customers and foreign governments for us to increase our operations and sourcing in the foreign country, which may necessitate the sharing of sensitive information and intellectual property rights;</span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">multiple conflicting and changing governmental laws and regulations, including varying labor laws and tax regulations;</span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">reliance on various information systems and information technology to conduct our business, making us vulnerable to cyberattacks by third parties or breaches due to employee error, misuse, or other causes, that could result in business disruptions, loss of or damage to our intellectual property and confidential information (and that of our customers and other business partners), reputational harm, transaction errors, processing inefficiencies, or other adverse consequences;</span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">regional or global economic downturns or recessions, varying foreign government support, unstable political environments, and other changes in foreign economic conditions; </span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">the impact of public health epidemics, such as the COVID-19 pandemic, on employees, suppliers, customers and the global economy;</span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">difficulties in managing a global enterprise, including staffing, managing distributors and representatives, and repatriating cash;</span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">longer sales cycles and difficulties in collecting accounts receivable; and</span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">different customs and ways of doing business.</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Global conditions and other factors, such as the COVID-19 pandemic, the current conflict in Ukraine, and attendant transportation and freight cost challenges, have resulted in, and may continue to result in, a shortage of parts, materials and services needed to manufacture and timely deliver our products.&#160; These conditions have negatively impacted our suppliers&#8217; ability to meet our demand requirements and, in turn, our ability to satisfy our customer demand.&#160; Parts shortages have required, and may continue to require, that we plan ahead further than usual, and increase our purchase commitments to secure critical components in a timely manner.&#160; These challenges, together with other challenges associated with operating an international business, may adversely affect our ability to recognize revenue, our gross margins on the revenue we do recognize, and our other operating results.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;letter-spacing:-0.1pt;">Changes in U.S. trade policy and export controls and ongoing trade disputes between the U.S. and China have adversely affected, and may continue to adversely affect, our business, results of operations, and financial condition.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="letter-spacing:-0.1pt;">The U.S. government has implemented, and may continue to implement, several changes in trade policy which have adversely affected and could continue to adversely affect the Company&#8217;s ability to sell and service its products to and for customers located in China and in certain other countries.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="letter-spacing:-0.1pt;">On October 7, 2022, the U.S. Commerce Department, Bureau of Industry and Security (&#8220;BIS&#8221;) announced new rules aimed in part at restricting China&#8217;s ability to obtain advanced computing chips and manufacture advanced semiconductors. Previous changes in trade policy by BIS have included, without limitation, the elimination of license exception CIV, the implementation of new regulations governing the sale of equipment to defined &#8220;Military End Users&#8221; and for defined &#8220;Military End Uses&#8221;, the addition of several companies to the U.S. Commerce Department&#8217;s Unverified List and Entity List (including Semiconductor Manufacturing International Corporation and certain related entities), and the expansion of the </span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">19</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="letter-spacing:-0.1pt;">&#8220;foreign direct product rule&#8221; to restrict the sale of certain products if Huawei Technologies Co., Ltd. or its affiliates are parties to a transaction involving the products.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="letter-spacing:-0.1pt;">The effect of these changes, among others, is that U.S. companies are now required to obtain export licenses &#8211; now at times with a presumption of denial -- before providing commodities, software, and technology (which are&#160;subject to the regulations) to customers for whom licensing requirements did not previously apply. These changes have had, and will likely continue to have, a negative effect on our ability to sell and service certain equipment in China. The heightened export restrictions may also result in shipping delays, as the new regulations are interpreted and applied, and may inhibit technical discussions with existing or prospective customers, negatively impacting our ability to pursue sales opportunities. The administrative processing, attendant delays and risk of ultimately not obtaining required export approvals pose a particular disadvantage to the Company relative to our non-U.S. competitors who are not required to comply with U.S. export controls. This difficulty and uncertainty has adversely affected our ability to compete for and win business from customers in China. Foreign customers affected by these and future U.S. government sanctions or threats of sanctions may respond by developing their own solutions to replace our products or by utilizing our foreign competitors&#8217; products. This &#8220;trade war&#8221; with China, together with the prospect of additional governmental action related to export controls restrictions, international sanctions, and/or tariffs, has adversely affected, and is likely to continue to adversely affect, demand for our products and the results of our operations.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="letter-spacing:-0.1pt;">The changes in U.S. trade policy and export controls, as well as sanctions imposed by the U.S. against certain Chinese companies, have triggered retaliatory action by China and could trigger further retaliation (including the possible escalation of geopolitical tensions between China and Taiwan). In addition, China has provided, and is expected to continue to provide, significant assistance, financial and otherwise, to its domestic industries, including some of our competitors. We face increasing competition as a result of significant investment in the semiconductor industry by the Chinese government and various state-owned or affiliated entities that is intended to advance China&#8217;s stated national policy objectives. In addition, the Chinese government may restrict us from participating in the China market or may prevent us from competing effectively with Chinese companies.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="letter-spacing:-0.1pt;">Further, we hold inventory of products that may be affected by the recent U.S. government actions, including potential order cancellations. While we continue to take steps to mitigate our exposure to this developing situation, if the sale of these products is delayed or we are unable to return or dispose of our inventory on favorable economic terms, we may incur additional carrying costs for the inventory or otherwise record charges associated with this inventory.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;letter-spacing:-0.1pt;">We may be unable to obtain required export licenses for the sale of our products.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;font-weight:bold;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Whether with respect to sales to customers located in China or otherwise, products which (i) are manufactured in the United States, (ii) incorporate controlled U.S. origin parts, technology, or software, or (iii) are based on U.S. technology, are subject to the U.S. Export Administration Regulations (&#8220;EAR&#8221;) when exported to and re-exported from international jurisdictions, in addition to the local jurisdiction&#8217;s export regulations applicable to individual shipments. Currently, our laser annealing, MOCVD, MBE and certain other systems and products are controlled for export under the EAR. Licenses or proper license exceptions may be required for the shipment of our products to certain customers or countries. Obtaining an export license or determining whether an export license exception exists often requires considerable effort by us and cooperation from the customer, which can add time to the order fulfillment process. We may be unable to obtain required export licenses or qualify for export license exceptions and, as a result, we may be unable to export products to our customers and/or meet their servicing needs (requiring us to refund customer prepayments for products we are unable to ship). Non-compliance with the EAR or other applicable export regulations could result in a wide range of penalties including the denial of export privileges, fines, criminal penalties, and the seizure of commodities. In the event that an export regulatory body determines that any of our shipments violate applicable export regulations, we could be fined significant sums and our export capabilities could be restricted, which could have a material adverse impact on our business. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;letter-spacing:-0.1pt;">We are exposed to various risks associated with global regulatory requirements.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">As a public company with global operations, we are subject to the laws of the United States and multiple foreign jurisdictions, and the rules and regulations of various governing bodies, which may differ among jurisdictions. We are </p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">20</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">required to comply with legal and regulatory requirements pertaining to such matters as data privacy (including the European Union General Data Protection Regulation and similar laws), anti-corruption (such as the Foreign Corrupt Practices Act and other local laws prohibiting improper payments to governmental officials), labor laws, immigration, customs, trade, taxes, corporate governance, conflict minerals, and antitrust regulations, among others. In addition, we are required to comply with laws and regulations pertaining to carbon emissions, and other regulatory requirements addressing climate change concerns. These laws and regulations, which are ever-evolving and at times complex and inconsistent, impose costs on our business and divert management time and attention from revenue-generating activities. Changes to or ambiguities in these laws and regulations may create uncertainty regarding our compliance requirements. While we intend to comply with these regulatory requirements, if we are found by a court or regulatory agency to have failed in these efforts, our business, financial condition, and results of operations could be adversely affected.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;text-decoration-color:#000000;text-decoration-line:underline;text-decoration-style:solid;background:#ffffff;">Risks Related to Intellectual Property and Cybersecurity</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;letter-spacing:-0.1pt;">Disruptions in our information technology systems or data security incidents could result in significant financial, legal, regulatory, business, and reputational harm to us.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We are increasingly dependent on information technology systems and infrastructure, including mobile technologies, to operate our business. In the ordinary course of our business, we collect, store, process and transmit significant amounts of sensitive information, including intellectual property, proprietary business information, personally-identifiable information of individuals, and other confidential information, including that of our customers and other business partners. It is critical that we do so in a secure manner to maintain the confidentiality, integrity, and availability of this sensitive information. We have also outsourced elements of our operations (including elements of our information technology infrastructure) to third parties, and as a result, we manage a number of third-party vendors who have access to our computer networks and our confidential information. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">All information systems are subject to breach and disruption. Potential vulnerabilities can be exploited from inadvertent or intentional actions of our employees, third-party vendors, business partners, or by malicious third parties. Attacks of this nature are increasing in their frequency, levels of persistence, sophistication, and intensity, and are being conducted by sophisticated and organized groups and individuals with a wide range of expertise and motives (including industrial espionage), including organized criminal groups, nation states, and others. In addition to the extraction of<span style="letter-spacing:-0.1pt;"> </span>sensitive information, attacks could include the deployment of harmful malware, ransomware, or other means which could affect service reliability and threaten the confidentiality, integrity, and availability of information. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We have experienced, and our third-party providers have experienced, cybersecurity attacks, some of which have been, and may continue to be, successful. Significant disruptions in our information technology systems (or those of our key suppliers, contract manufacturers, distributors, sales agents and other partners) or other data security incidents could adversely affect our business operations and result in the loss or misappropriation of, and unauthorized access to, sensitive information. Future or ongoing disruptions or incidents, whether from attacks on our technology environment or from computer viruses, natural disasters, terrorism, war or other causes, could result in a material disruption in our business operations, force us to incur significant costs and engage in litigation, harm our reputation, and subject us to liability under laws, regulations, and contractual obligations.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;">We may be unable to effectively enforce and protect our intellectual property rights.</span><span style="font-style:italic;font-weight:bold;letter-spacing:-0.1pt;"> </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0.05pt 0pt 0pt 0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Our success as a company depends in part upon the protection of our intellectual property rights. We rely primarily on patent, copyright, trademark, and trade secret laws, as well as nondisclosure and confidentiality agreements and other methods, to protect our proprietary information, technologies, processes, and brand identity. We own various U.S. and international patents and have additional pending patent applications relating to certain of our products and technologies. The process of seeking patent protection is lengthy and expensive, and we cannot be certain that pending or future applications will result in issued patents or in patents which provide meaningful protection or commercial advantage. In addition, our intellectual property rights may be circumvented, invalidated, or rendered obsolete by the rapid pace of technological change, or through efforts by others to reverse engineer our products or design around patents that we own. Policing unauthorized use of our products and technologies is difficult and time consuming and the laws of other countries may not protect our proprietary rights as fully or as readily as U.S. laws. Given these limitations, our success </p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">21</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">will depend in part upon our ability to innovate ahead of our competitors. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">In addition, our outsourcing efforts require that we share certain portions of our technology with our outsourcing partners, which poses additional risks of infringement and trade secret misappropriation. Infringement of our rights by a third party, possibly for purposes of developing and selling competing products, could result in uncompensated lost market and revenue opportunities. Similar exposure could result in the event that former employees seek to compete with us through their unauthorized use of our intellectual property and proprietary information. We cannot be certain that the protective steps and measures we have taken will prevent the misappropriation or unauthorized use of our proprietary information and technologies, nor can we be certain that applicable intellectual property laws, regulations, and policies will not be changed in a manner detrimental to the sale or use of our products.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Litigation has been required in the past, is currently ongoing, and may be required in the future, to enforce our intellectual property rights, protect our trade secrets, and to determine the validity and scope of proprietary rights of others. As a result of any such litigation, we could lose our ability to enforce one or more patents, incur substantial costs, and jeopardize relationships with current or prospective customers or suppliers. Any action we take to enforce or defend our intellectual property rights could absorb significant management time and attention, and could otherwise negatively impact our operating results. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;">We may be subject to claims of intellectual property infringement by others. </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0.05pt 0pt 0pt 0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We receive communications from time to time from other parties asserting the existence of patent or other rights which they believe cover certain of our products. We also periodically receive notices from customers who believe that we are required to indemnify them for damages they may incur related to infringement claims made against these customers by third parties. Our customary practice is to evaluate such assertions and to consider the available alternatives, including whether to seek a license, if appropriate. However, we cannot ensure that licenses can be obtained or, if obtained, will be on acceptable terms or that costly litigation or other administrative proceedings will not occur. If we are not able to resolve a claim, negotiate a settlement of the matter, obtain necessary licenses on commercially reasonable terms, or successfully prosecute and defend our position, our business, financial condition, and results of operations could be materially and adversely affected. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;text-decoration-line:underline;text-decoration-style:solid;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;text-decoration-color:#000000;text-decoration-line:underline;text-decoration-style:solid;">Financial, Accounting and Capital Market Risks</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;letter-spacing:-0.1pt;">Our operating results may be adversely affected by tightening credit markets. </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">As a global company with worldwide operations, we are subject to volatility and adverse consequences associated with economic downturns and recessions in different parts of the world. In the event of a downturn, many of our customers may delay or reduce their purchases of our products and services. If negative conditions in the credit markets, including continued increases in interest rates, prevent our customers from obtaining credit or necessary financing, product orders in these channels may decrease, which could result in lower revenue. In addition, we may experience cancellations of orders in backlog, rescheduling of customer deliveries, and attendant pricing pressures. If our suppliers face challenges in obtaining credit, in selling their products, or otherwise in operating their businesses, their ability to continue to supply materials to us may be negatively affected. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">In addition, we finance some of our sales through trade credit. In addition to ongoing credit evaluations of our customers&#8217; financial condition, we seek to mitigate our credit risk by obtaining deposits and letters of credit on certain of our sales arrangements. We could suffer significant losses if a customer whose accounts receivable we have not secured fails or is otherwise unable to pay us, or if financial institutions providing letters of credit become insolvent. A loss in collections on our accounts receivable would have a negative impact on our financial condition and results of operations. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;letter-spacing:-0.1pt;">We are subject to foreign currency exchange risks. </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We are exposed to foreign currency exchange rate risks that are inherent in our anticipated sales, purchase commitments, and assets and liabilities that are denominated in currencies other than the U.S. dollar. Although we attempt to mitigate our exposure to fluctuations in currency exchange rates, hedging activities may not always be available or adequate to </p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">22</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">mitigate the impact of our exchange rate exposure. Failure to sufficiently hedge or otherwise manage foreign currency risks properly could materially and adversely affect our financial condition, results of operations, and liquidity.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;">We may be required to take impairment charges on assets. </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We are required to assess goodwill and indefinite-lived intangible assets annually for impairment, or on an interim basis whenever certain events occur or circumstances change, such as an adverse change in business climate or a decline in the overall industry, that would more likely than not reduce the fair value below its carrying amount. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">As part of our long term strategy, we may pursue future acquisitions of, or investments in, other companies or assets which could potentially increase our assets. We are required to test certain of our assets, including acquired intangible assets, property, plant, and equipment, and equity investments without readily observable market prices, for recoverability and impairment whenever there are indicators of impairment such as an adverse change in business climate. Adverse changes in business conditions or worse-than-expected performance by these acquired companies could negatively impact our estimates of future operations and result in impairment charges to these assets. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;">Changes in accounting pronouncements or taxation rules, practices, or rates may adversely affect our financial results. </span><span style="white-space:pre-wrap;">  </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Changes in, or newly enacted, accounting pronouncements or taxation rules, practices or rates can materially affect our revenue recognition practices, effective tax rates, results of operations, and our financial condition. In addition, varying interpretations of accounting pronouncements or taxation practices, and the questioning of our current or past practices, may adversely affect our reported financial results. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Beginning in 2022, the U.S. Tax Cuts and Jobs Act of 2017 eliminated the option to deduct research and development expenditures currently and requires taxpayers to capitalize and amortize them over five years for research performed in the U.S. and fifteen years for research performed outside the U.S. Additionally, on August 16, 2022, the Inflation Reduction Act (the &#8220;IRA&#8221;) was signed into law. The IRA includes a new 15% corporate alternative minimum tax on corporations whose average annual adjusted financial statement income during the most recently completed three-year period exceeds $1 billion and a 1% excise tax on stock repurchases made by certain publicly traded U.S. corporations, and is effective for tax years beginning after December 31, 2022. Finally, recommendations made by the Organization for Economic Cooperation and Development&#8217;s (the &#8220;OECD&#8221;) Base Erosion and Profit Shifting project have the potential to lead to changes in tax laws in numerous countries and could increase our tax obligations in countries where we do business. The OECD has released several components of its comprehensive plan to create an agreed set of international rules for addressing base erosion and profit shifting, and governmental authorities from various jurisdictions (including the United States) continue to discuss potential legislation and other reforms, including proposals for global minimum tax rates. Any of these developments or changes in federal or international tax laws, rules, practices or rates (including future changes or modifications to existing practices) could have an adverse material impact on our ability to utilize our deferred tax attributes, our effective tax rate and results of operations including cash flows and financial position.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">In addition, as of each reporting date, we evaluate the realizability of our deferred tax assets which may result in the recognition and/or release of a valuation allowance. In 2022, we recognized a net decrease of $104.9 million of our valuation allowance, primarily related to the reversal of valuation allowances on domestic deferred tax assets. Any changes in the valuation allowance will have a direct impact on our effective tax rate.<span style="font-family:'Calibri','Helvetica','sans-serif';"> </span>The realization of net deferred tax assets relies on our ability to generate future taxable income, and, as such, if the Company is unable to generate sufficient future taxable income, we may not obtain the full benefit of these deferred tax assets.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Finally, we are subject to income tax on a jurisdictional or legal entity basis and significant judgment is required in certain instances to allocate our taxable income to a jurisdiction and to determine the related income tax expense and benefits. Losses in one jurisdiction generally may not be used to offset profits in other jurisdictions. As a result, changes in the mix of our earnings (or losses) between jurisdictions, among other factors, could alter our overall effective income tax rate, possibly resulting in significant tax rate increases. Furthermore, we are regularly audited by various tax authorities, and these audits may result in increased tax provisions which could negatively affect our operating results in the periods in which such determinations are made or changes occur.</p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">23</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;">Our current debt facilities, including our 2.70% Convertible Senior Notes due 2023 (the &#8220;2023 Notes&#8221;), our 3.50% Convertible Senior Notes due 2025 (the &#8220;2025 Notes&#8221;), or our 3.75% Convertible Senior Notes due 2027 (the &#8220;2027 Notes&#8221;) (the 2023 Notes, 2025 Notes, and 2027 Notes, together, the &#8220;Notes&#8221;), and our revolving credit facility (the &#8220;Credit Facility&#8221;), may contain certain restrictions, covenants and repurchase provisions that may limit our ability to raise the funds necessary to meet our working capital needs, which may include the cash conversion of the Notes or repurchase of the Notes for cash upon a fundamental change.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">As of December 31, 2022, we had $20.2 million in principal amounts outstanding in 2023 Notes, $132.5 million in principal amounts outstanding in 2025 Notes, and $125.0 million in principal amounts outstanding in 2027 Notes. The 2023 Notes matured on January 15, 2023 and were paid in cash and settled at that time. In addition, as of December 31, 2022, we had an undrawn senior secured revolving credit facility in an aggregate principal amount of $150.0 million, including a $15.0 million letter of credit sublimit. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">These debt facilities contain certain covenant and other restrictions that may limit our ability to, among other things, incur additional debt or create liens, sell certain assets, and merge or consolidate with third parties, which may, in turn, preclude us from responding to changes in business and economic conditions, engaging in transactions that might otherwise be beneficial to us, or obtaining additional financing. Our ability to comply with some of these covenants is dependent on our future performance, which will be subject to many factors, some of which are beyond our control such as prevailing economic conditions. In addition, our failure to comply with these covenants could result in a default under the Notes or Credit Facility, which could accelerate the debt.  If any of our debt is accelerated, we may not have sufficient funds available to repay such debt, which could materially and negatively affect our financial condition and results of operation.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">In addition, our ability to repurchase or to pay cash upon conversion of the Notes, or maturity of the Credit Facility, may be limited by law, by regulatory authority or by agreements governing our indebtedness that exist at the time of repurchase, conversion, or maturity. Our failure to settle the debt as required would constitute a default under the applicable debt facility and could also lead to a default under the other debt facilities. If the payment of the related indebtedness were to be accelerated after any applicable notice or grace periods, we may not have sufficient funds to repay the indebtedness.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Finally, holders of the Notes will have the right to require us to repurchase all or any portion of their Notes upon the occurrence of a fundamental change before the maturity date. Additionally, in the event the conditional conversion features of the 2023 Notes, 2025 Notes, and 2027 Notes are triggered (as is currently the case for the 2027 Notes through March 31, 2023), holders of Notes will be entitled to convert the Notes at any time during specified periods at their option. If one or more holders elect to convert the Notes, or if a fundamental change occurs before maturity, unless we elect to deliver solely shares of our common stock to settle such conversion (other than paying cash in lieu of delivering any fractional share), we will be required to make cash payments in respect of the Notes being converted, which could adversely impact our liquidity. Additionally, we may not have enough available cash or be able to obtain financing at the time we are required to make repurchases of the Notes surrendered therefor or pay cash with respect to the Notes being converted. In addition, even if holders do not elect to convert the Notes, we could be required under applicable accounting rules to reclassify all or a portion of the outstanding principal of the Notes as a current rather than long-term liability, which could result in a material reduction of our net working capital.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;">Issuance of our common stock, if any, upon conversion of the Notes, as well as the capped call transactions and the hedging activities of the option counterparties, may impair or reduce our ability to utilize our foreign tax credits or our research and development credits carryforwards in the future.</span><span style="white-space:pre-wrap;">  </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Pursuant to U.S. federal and state tax rules, a corporation is generally permitted to deduct from taxable income in any year net operating losses (&#8220;NOLs&#8221;) carried forward from prior years and to reduce from tax liabilities in any year foreign tax credits and R&amp;D credits carried forward from prior years.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">As of December 31, 2022, we had U.S. federal foreign tax credits carryforwards of approximately $8.7 million expiring in 2027, and R&amp;D credits carryforwards of approximately $36.5 million expiring in varying amounts between 2023 and </p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">24</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">2042. If we were to experience a &#8220;change in ownership&#8221; under Section 382 of the Internal Revenue Code (&#8220;Section 382&#8221;), the federal credits carry forward limitation under Section 383 of the Internal Revenue Code would impose an annual limit on the amount of tax liabilities that may be offset by foreign tax credits and R&amp;D credits generated prior to the change in ownership. If an ownership change were to occur, we may be unable to use a significant portion of our foreign tax credits and R&amp;D credit carryforwards to offset future tax liabilities.  </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The shares of common stock, if any, issued upon conversion of the Notes will, upon such issuance, be taken into account when determining the cumulative change in our ownership for Section 382 purposes. As a result, any conversion of the Notes that we elect to settle in shares may materially increase the risk that we could experience an ownership change for these purposes in the future.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;">The capped call transactions may affect the value of the 2027 Notes and our common stock.</span> </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">With respect to the 2027 Notes, we have entered into capped call transactions with certain option counterparties. The capped call transactions were expected generally to reduce the potential dilution upon conversion of the 2027 Notes and/or offset any cash payments we are required to make in excess of the principal amount of converted 2027 Notes, as the case may be, with such reduction and/or offset subject to a cap.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The option counterparties or their affiliates may enter into or modify hedge positions by entering into or unwinding various derivatives with respect to our common stock and/or purchasing or selling our common stock or other securities of ours in secondary market transactions prior to the maturity of the 2027 Notes (and are likely to do so during any observation period related to a conversion of the 2027 Notes). This activity could also cause fluctuations in the market price of our common stock and the 2027 Notes, which could affect the ability of the noteholders to convert the 2027 Notes and, to the extent the activity occurs during any observation period related to a conversion of the 2027 Notes, it could affect the number of shares and value of the consideration that noteholders will receive upon conversion of the 2027 Notes.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;text-decoration-color:#000000;text-decoration-line:underline;text-decoration-style:solid;">General Risk Factors</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;font-weight:bold;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;letter-spacing:-0.1pt;">The price of our common shares is volatile and could decrease. </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 6pt 0pt;">The stock market in general and the market for technology stocks in particular has experienced significant volatility. The trading price of our common shares has fluctuated significantly and could decline independent of the overall market, and shareholders could lose all or a substantial part of their investment. The market price of our common shares could continue to fluctuate in response to several factors, including among others:</p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:6pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;letter-spacing:-0.1pt;">difficult macroeconomic conditions, economic recessions, international trade disputes, unfavorable geopolitical events, and general stock market uncertainties, such as those occasioned by a global liquidity crisis and a failure of large financial institutions; </span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:6pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;letter-spacing:-0.1pt;">actual or anticipated variations in our results of operations;</span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:6pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;letter-spacing:-0.1pt;">issues associated with the performance of our products, or the performance of our internal systems such as our customer relationship management (&#8220;CRM&#8221;) system or our enterprise resource planning (&#8220;ERP&#8221;) system;</span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:6pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;letter-spacing:-0.1pt;">announcements of financial developments or technological innovations; </span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:6pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;letter-spacing:-0.1pt;">our failure to meet the performance estimates of investment research analysts; </span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:6pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;letter-spacing:-0.1pt;">changes in recommendations and financial estimates by investment research analysts, and decisions by investment research analysts to cease coverage of our Company;</span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:6pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;letter-spacing:-0.1pt;">margin trading, short sales, hedging and derivative transactions involving our common stock;</span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:6pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;letter-spacing:-0.1pt;">our failure to successfully implement cost reduction initiatives and restructuring activities, if and when required;</span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:6pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;letter-spacing:-0.1pt;">delays or difficulties in satisfying internal control evaluations and attestation requirements of Section 404 of the Sarbanes Oxley Act of 2002;</span></td></tr></table></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">25</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:6pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;letter-spacing:-0.1pt;">the commencement of, and rulings on, litigation and legal proceedings; and</span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;letter-spacing:-0.1pt;">the occurrence of major catastrophic events.</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Securities class action litigation is often brought against a company following periods of volatility in the market price of its securities. These lawsuits, if and when brought, can result in substantial costs and a diversion of management&#8217;s attention and resources, which can adversely affect our financial condition, results of operations, and liquidity. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;letter-spacing:-0.1pt;">Our inability to attract, retain, and motivate employees could have a material adverse effect on our business. </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="letter-spacing:-0.1pt;">Our success depends largely on our ability to attract, retain, and motivate employees, including those in executive, managerial, engineering and marketing positions, as well as highly skilled and qualified technical personnel. Competition for qualified design and technical personnel is intense, particularly in the semiconductor industry and especially when business cycles are improving. Competitors may try to recruit, and may succeed in recruiting, our most valuable technical employees. To attract and retain key employees, we must provide competitive compensation packages, including cash and stock-based compensation, among other benefits. If the value of our stock-based incentive awards decreases, or if our total compensation packages are not viewed as competitive, our ability to attract and retain key employees could suffer. We do not have key person life insurance on any of our executives, and we may not be able to readily replace key departed employees. Our inability to attract, retain, and motivate key personnel could have a significant negative effect on our business, financial condition, and results of operations.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;letter-spacing:-0.1pt;">We are subject to risks of non-compliance with environmental, health, and safety regulations. </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="letter-spacing:-0.1pt;">We are subject to environmental, health, and safety regulations in connection with our business operations, including but not limited to regulations relating to the development, manufacture and use of our products, recycling and disposal of related materials, and the operation and use of our facilities and real property. Failure or inability to comply with existing or future environmental, health and safety regulations, including those relating to carbon emissions and climate change, could result in significant remediation liabilities, the imposition of fines, the suspension or termination of research, development, or use of certain of our products, and other harm to the Company, which could have a material adverse effect on our business, financial condition, and results of operations.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="letter-spacing:-0.1pt;">In addition, changes in environmental laws and regulations, including those relating to greenhouse gas emissions and other climate change matters, could require us (and/or our key suppliers, contract manufacturers and other partners) to install new equipment, alter operations to incorporate new technologies, or implement new processes, among other measures, which may cause us to incur significant costs and divert management attention.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="letter-spacing:-0.1pt;">We are committed to ensuring safe working conditions, treating our employees with dignity and respect, and sourcing, manufacturing, and distributing our products in a responsible and environmentally friendly manner, and any failure on our part to do so may cause reputational and other harm for the Company. Furthermore, some of our operations involve the storage, handling, and use of hazardous materials that may pose a risk of fire, explosion, or environmental release. Such events could result from acts of terrorism, natural disasters, or operational failures and may result in injury or loss of life to our employees and others, local environmental contamination, and property damage. These events may cause a temporary shutdown of an affected facility, or portion thereof, and we could be subject to penalties or claims as a result. Each of these events could have a material adverse effect on our business, financial condition, and results of operations. </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;letter-spacing:-0.1pt;">We are exposed to risks associated with the increased attention by our stakeholders to environmental, social and governance (&#8220;ESG&#8221;) matters.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="letter-spacing:-0.1pt;">Our stakeholders, including customers, investors, advisory firms, employees, and suppliers, among others, have increasingly focused on our ESG initiatives, including those regarding climate change, human rights, inclusion and diversity, among others. These expectations can extend, and have extended, to our corporate practices, initiatives, and disclosures, as well as stakeholder standards or preferences for investments or doing business. Third-party rating agencies have also established standards for a range of ESG-related factors, which may be inconsistent and are subject to change. These expectations and stakeholder requirements may impact the attractiveness of our business, the manner in which we do business, our reputation, the costs of doing business, and the willingness of our stakeholders to engage with, invest in, or </span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">26</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="letter-spacing:-0.1pt;">retain us. We may be further impacted by the adoption of ESG-related regulation and legislation in the jurisdictions in which we do business, which could result in increased compliance, operational, and other costs.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="letter-spacing:-0.1pt;">From time to time the Company communicates its strategies, commitments and targets relating to ESG matters. These strategies, commitments and targets reflect our current plans and aspirations, and we may be unable to achieve them. In addition, the standards for measuring and reporting sustainability metrics may change over time and could result in significant revisions to our strategies, commitments and targets, or our ability to achieve them. Any failure to satisfy or achieve ESG-related requirements or targets could adversely impact the demand for our products, subject us to significant costs and liabilities, cause our stock price to decline, and result in reputational harm.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;letter-spacing:-0.1pt;">We have adopted certain measures that may have anti-takeover effects which may make an acquisition of our Company by another company more difficult. </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="letter-spacing:-0.1pt;">We have adopted, and may in the future adopt, certain measures that may have the effect of delaying, deferring, or preventing a takeover or other change in control of our Company, which a holder of our common stock may not consider to be in the holder&#8217;s best interest. For example, our board of directors has the authority to issue up to 500,000 shares of preferred stock and to fix the rights (including voting rights), preferences and privileges of these shares (&#8220;blank check&#8221; preferred stock). Such preferred stock may have rights, including economic rights, senior to our common stock. As a result, the issuance of the preferred stock could have a material adverse effect on the price of our common stock and could make it more difficult for a third party to acquire a majority of our outstanding common stock. </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="letter-spacing:-0.1pt;">In addition, our board of directors is divided into three classes with each class serving a staggered three-year term. The existence of a classified board makes it more difficult for our shareholders to change the composition of our board of directors, and therefore the Company&#8217;s policies, in a relatively short period of time. </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="letter-spacing:-0.1pt;">Furthermore, we have adopted certain certificate of incorporation and bylaws provisions which have anti-takeover effects. These include: (a) requiring certain actions to be taken at a meeting of shareholders rather than by written consent, (b) requiring a super-majority of shareholders to approve certain amendments to our bylaws, (c) limiting the maximum number of directors, and (d) providing that directors may be removed only for cause. These measures and those described above may have the effect of delaying, deferring, or preventing a takeover or other change in control of our Company that a holder of our common stock may not consider to be in the holder&#8217;s best interest. </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="letter-spacing:-0.1pt;">In addition, we are subject to the provisions of Section 203 of the General Corporation Law of the State of Delaware, which prohibits a Delaware corporation from engaging in any business combination, including mergers and asset sales, with an interested stockholder (generally, a 15% or greater stockholder) for a period of three years after the date of the transaction in which the person became an interested stockholder, unless the business combination is approved in a prescribed manner. The operation of Section 203 may have anti-takeover effects, which could delay, defer, or prevent a takeover attempt that a holder of our common stock may not consider to be in the holder&#8217;s best interest.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;letter-spacing:-0.1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="letter-spacing:-0.1pt;">Despite the above measures, an activist shareholder could undertake action to implement governance, strategic, or other changes to the Company which a holder of our common stock may not consider to be in the holder&#8217;s best interest. Such activities could interfere with our ability to execute our strategic plans, be costly and time consuming, disrupt our operations, and divert the attention of management and our employees.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="_a28d396d_022a_47cb_ada1_20f54705272f"></a><a id="Item1BUnresolvedStaffComments_176632"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Item 1B. Unresolved Staff Comments</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">None.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">27</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;min-height:11.5pt;"><a id="_f73bee35_3ca4_46f0_8fa3_f111da0e33c1"></a><a id="Item2Properties_244056"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Item 2. Properties</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Our corporate headquarters and principal research and development, manufacturing, and sales and service facilities as of December 31, 2022 are as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:26.66%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.66%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.02%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.66%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:56.98%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:26.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Approximate</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:56.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:26.66%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Owned&#160;Facilities&#160;Location</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.02%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Size&#160;(sq.&#160;ft.)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:56.98%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Use</b></p></td></tr><tr><td style="vertical-align:bottom;width:26.66%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Plainview, NY</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.66%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 80,000</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.66%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:56.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Corporate Headquarters; R&amp;D; Sales&#160;&amp; Service; Administration</p></td></tr><tr><td style="vertical-align:bottom;width:26.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Somerset, NJ</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 80,000</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:56.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">R&amp;D; Manufacturing; Sales&#160;&amp; Service; Administration</p></td></tr><tr><td style="vertical-align:bottom;width:26.66%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">St. Paul, MN</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.66%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 43,000</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.66%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:56.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">R&amp;D; Manufacturing; Sales&#160;&amp; Service; Administration</p></td></tr><tr><td style="vertical-align:bottom;width:26.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Somerset, NJ</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 38,000</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:56.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">R&amp;D; Sales&#160;&amp; Service; Administration</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:26.5%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:10.89%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:47.35%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.55%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.6%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:26.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Approximate</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:47.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Lease</b></p></td></tr><tr><td style="vertical-align:bottom;width:26.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Leased&#160;Facilities&#160;Location</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Size&#160;(sq.&#160;ft.)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:47.35%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Use</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.6%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Expiration</b></p></td></tr><tr><td style="vertical-align:bottom;width:26.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">San Jose, CA</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.89%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 100,000</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:47.35%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">R&amp;D; Manufacturing; Sales&#160;&amp; Service; Administration</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.55%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">2023</p></td></tr><tr><td style="vertical-align:bottom;width:26.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">San Jose, CA</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 100,000</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:47.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">R&amp;D; Manufacturing; Sales&#160;&amp; Service; Administration</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">2037</p></td></tr><tr><td style="vertical-align:bottom;width:26.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Somerset, NJ</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.89%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 57,000</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:47.35%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Warehouse</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.55%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">2027</p></td></tr><tr><td style="vertical-align:bottom;width:26.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Horsham, PA</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 49,000</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:47.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">R&amp;D; Manufacturing; Sales&#160;&amp; Service; Administration</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">2024</p></td></tr><tr><td style="vertical-align:bottom;width:26.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Waltham, MA</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.89%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 17,000</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:47.35%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">R&amp;D; Sales&#160;&amp; Service; Administration</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.55%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">2030</p></td></tr></table><div style="font-family:'Times New Roman','Times','serif';font-size:10.0pt;margin-bottom:0pt;margin-top:0pt;min-height:1.19em;position:relative;width:100%;"><div style="background-color:#000000;height:1pt;position:relative;top:0.6em;width:25.0%;border:none;margin:0 auto 0 0;"></div></div><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">In addition to the above, our foreign sales and service subsidiaries lease office space in China, Germany, Japan, Malaysia, Philippines, Singapore, South Korea, Thailand, Taiwan and the United Kingdom. Additionally, we have substantially completed our transition from our previous San Jose facility, whose lease expired in January 2023, to a newly leased facility in San Jose, both of which are reflected in the table above. The new facility has approximately the same square footage as our existing San Jose, California facility, but expanded manufacturing capabilities for our laser annealing and lithography technologies. We believe our facilities are adequate to meet our current needs.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p><a id="_4f8a2526_011a_4d35_84bc_cd23d66bff61"></a><a id="Item3LegalProceedings_521596"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Item 3. Legal Proceedings</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;background:#ffff00;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The discussion under the heading <i style="font-style:italic;">Legal Proceedings</i> within Note 9, &#8220;Commitments and Contingencies&#8221; to the Consolidated Financial Statements is incorporated herein by reference.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="_8f14a086_1842_4f98_aacf_2c5faa8f99c3"></a><a id="Item4MineSafetyDisclosures_174326"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Item 4. Mine Safety Disclosures</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Not Applicable.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">28</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="_2756f232_9c73_41c1_b617_6a46be766e3b"></a><a id="_Hlk535855197"></a><a id="PARTII_53402"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">PART&#160;II</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="Item5MarketforRegistrantsCommonEquity_72"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"><b style="font-weight:bold;">Item 5. Market for Registrant&#8217;s Common Equity, Related Stockholder Matters and Issuer Purchases of Equity Securities</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Our common stock is quoted on The NASDAQ Global Select Market under the symbol &#8220;VECO.&#8221; As of February 13, 2023, there were approximately 130 stockholders of record of our common stock.<span style="font-family:'Arial','Helvetica','sans-serif';font-size:12pt;"> </span>Because many of our shares of common stock are held by brokers and other institutions on behalf of stockholders, we are unable to estimate the total number of stockholders represented by these record holders. We have not paid dividends on our common stock. The Board of Directors will determine future dividend policy based on our consolidated results of operations, financial condition, capital requirements, and other circumstances.</p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">29</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;min-height:403.5pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p><a id="StockPerformanceGraph_401970"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Stock Performance Graph</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><img src="veco-20221231x10k004.jpg" alt="Graphic" style="display:inline-block;height:403.05pt;left:0%;padding-bottom:0.45pt;position:relative;top:0pt;width:485.3pt;" /></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">ASSUMES $100 INVESTED ON DEC. 31, 2017</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">ASSUMES DIVIDENDS REINVESTED</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">FISCAL YEAR ENDING DEC. 31</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:78%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:35.01%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:35.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2017</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2018</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2019</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td></tr><tr><td style="vertical-align:bottom;width:35.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Veeco Instruments Inc.</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 100.00</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 49.90</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 98.89</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 116.90</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 191.72</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 125.12</span></p></td></tr><tr><td style="vertical-align:bottom;width:35.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">S&amp;P Smallcap 600</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 100.00</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 91.52</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 112.37</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 125.05</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 158.59</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 133.06</span></p></td></tr><tr><td style="vertical-align:bottom;width:35.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">RDG MidCap Technology</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 100.00</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 115.75</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 128.69</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 170.85</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 105.29</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 46.44</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><a id="_f338ff44_612e_42ea_a7bf_710039bb2337"></a><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p><a id="Item6SelectedFinancialData_237384"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Item 6. </b><b style="font-weight:bold;">[Reserved]</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:justify;margin:0pt 0pt 0pt 18pt;"><span style="font-size:8pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">30</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="_e3804b79_eea4_469e_be26_da6d920fc81e"></a><a id="Item7ManagementsDiscussionandAnalysis_31"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Item 7. Management&#8217;s Discussion and Analysis of Financial Condition and Results of Operations</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="_Hlk93058082"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Executive Summary</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;">We are an innovative manufacturer of semiconductor process equipment. Our proven ion beam, laser annealing, lithography, MOCVD and single wafer wet processing technologies play an integral role in the fabrication and packaging of advanced semiconductor devices. With equipment designed to optimize performance, yield and cost of ownership, Veeco holds leading technology positions in the markets we serve. To learn more about Veeco&#8217;s systems and service offerings, visit&#160;www.veeco.com.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">The Veeco United team executed well in a challenging environment during 2022, accomplishing a number of milestones, including:  </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Solidly executing our multi-year growth strategy, with progress advancing our product roadmaps for the Semiconductor and Compound Semiconductor markets, execution of our robust evaluation program with high customer acceptance rates, and completing our San Jose expansion </span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Achieved 11% year-on-year revenue growth for the Company, including record revenue in the Semiconductor market, which grew 50% year-on-year</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Developed silicon carbide market strategy, culminating in the acquisition of Epiluvac, accelerating our SiC epitaxy equipment market penetration</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Reinforced our commitment to culture and corporate responsibility, including appointing an additional female Board member, publishing our third sustainability report, and implementing a leadership training program</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Positioned the Company for a solid performance expected in 2023, with an ending 2022 backlog of $500 million, and robust cash flow from operations of $108 million, strengthening our balance sheet</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">These accomplishments enabled us to exit 2022 well positioned to execute on our growth plans for 2023.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;">Business Update</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Macroeconomic challenges across the industry have been well publicized, including supply chain constraints, an inflationary environment with a potential recession ahead, new China-export regulations, and a forecasted decline in the semiconductor and related markets due to softness in consumer, smartphone and PC applications, all of which are contributing to a difficult environment with increased uncertainty.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Longer lead times and parts shortages and allocations have required that we plan further ahead than usual, and we have undertaken efforts to increase our purchase commitments to secure critical components in a timely manner. Material lead times continue to be a challenge with respect to our supply chain, limiting our ability to fulfill some of our customers&#8217; demands in a timely manner, as many of our peers have also been experiencing. We are also experiencing increasing labor, logistics, and material costs, creating additional gross margin pressures. We expect supply shortages and related challenges to persist into 2023, and we continue to monitor our supply chain and work with our suppliers to identify and mitigate potential gaps in an effort to ensure continuity of supply. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Additionally, we have seen a slow-down in certain shorter lead time products such as wet processing, advanced packaging lithography, and spare parts and upgrades, as well as instances where customers have requested order cancellations, delayed shipments, or delayed payments. Consequently, we are monitoring the situation very closely and have been taking early actions to limit the pace at which we increase spending while maintaining our growth trajectory.&#160;</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Furthermore, the US Department of Commerce, Bureau of Industry and Security (&#8220;BIS&#8221;), issued additional China-export regulations on October 7, 2022, which broadened the requirements under which export licenses will be required, with a presumption of denial as to their issuance. In addition, certain China-based companies were added to the BIS Unverified </p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">31</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">List, and changes have been made to the BIS Entity List, further restricting sales to the named entities. Recent order activity has led to significant backlog in China, some of which may be subject to these regulations. While the export regulation landscape is fluid and evolving, we believe at this time that the substantial majority of this backlog will not be negatively affected by the new regulations.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Finally, like many in our industry, we continue to manage through the effects of the COVID-19 pandemic. While new variants of COVID-19 have emerged and additional variants may emerge in the future, we continue to proactively implement precautionary measures if and when necessary to keep our workplaces healthy and safe. Our top priority steadfastly remains protecting the health and safety of our employees, customers, suppliers and community.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">While our actions have been effective so far, there could be additional challenges ahead that may impact either our operations or those of our customers, which could have a negative effect on our financial performance, including productivity and capacity impacts as a result of the ongoing pandemic. We expect these measures to continue until we determine that the COVID-19 pandemic is adequately contained for purposes of our operations, and we may take further actions as government authorities require or as we determine to be in the best interests of our employees, customers, suppliers and community. We may incur additional expenses in future periods in response to the pandemic, which could adversely affect our operations and financial condition.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">While we work to overcome these macroeconomic challenges, we continue to serve our customers in the following four end-markets: Semiconductor; Compound Semiconductor; Data Storage; and Scientific&#160;&amp; Other.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">Sales in the Semiconductor market grew 50% in 2022 and were driven by our laser annealing systems for both advanced and trailing node logic devices, ion beam deposition systems for EUV mask blank production, and lithography systems for Advanced Packaging. We continue to build momentum for our laser annealing solutions with advanced node logic customers by winning application steps with leading manufacturers. We have also been receiving orders and shipping systems for trailing node applications in China and other regions. In addition to logic, we introduced laser annealing to the memory market and received an acceptance for an evaluation system at a DRAM manufacturer. Our lithography systems for Advanced Packaging are aligned with packaging approaches such as fan out wafer level packaging and other advanced packaging applications. Additionally, the ongoing adoption of EUV Lithography for advanced node semiconductor manufacturing continues to drive demand for our Ion Beam mask blank systems. Overall, our technology and market strategy are well aligned with trends such as artificial intelligence, mobile connectivity and high-performance computing that drive the Semiconductor market.  Given recent order activity and current backlog in the Semiconductor market, we expect revenue in 2023 to outpace (&#8220;WFE&#8221;) spending growth, which is forecasted to be down 20% or more. Finally, we have completed our new San Jose leased facility buildout, and have fully transitioned to this new location.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We address the Compound Semiconductor market with a broad portfolio of technologies, including Wet Processing and MOCVD, along with MBE and Ion Beam, all of which have been developed to support emerging applications such as 5G driven RF device/filter manufacturing, GaN power electronics, and photonics applications including edge-emitting lasers, specialty LEDs and micro-LEDs. Sales in the Compound Semiconductor market grew 13% in 2022. We experienced growth in system shipments for photonics applications. We continue to invest for future growth in the Compound Semiconductor market in areas like power electronics and Micro-LEDs. Power electronics markets are served by GaN equipment, and also by SiC epitaxy equipment. We are working to penetrate the GaN power market, which is driven by applications such as wireless charging in consumer electronics. In addition to our GaN system offerings, on January 31<sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;">st</sup><span style="white-space:pre-wrap;">, 2023 Veeco acquired SiC technology to address the high-growth SiC power epitaxy equipment market, which is driven by electric vehicles. With this acquisition, Veeco is accelerating its entry into this market, and expects revenue in 2024. The purchase price for the transaction, all payable in cash, was $30 million paid at the time of closing with a potential additional $35 million in performance based earn-outs.  </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">After several years of growth, sales in the Data Storage market were down 48% in 2022. Demand for our Ion Beam products is driven by cloud-based storage. Hard disk drive manufacturers are manufacturing drives with an increasing number of magnetic heads and they are introducing advanced technologies which require increased capital intensity. With data proliferation forecasted to continue to grow, and based on orders we received in 2022, we feel optimistic about the long-term prospects of our data storage business.</p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">32</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;min-height:11.5pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="_Hlk62483458"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Sales in the Scientific &amp; Other market are largely driven by sales to governments, universities, and research institutions. Revenue was up 12% in 2022 compared to 2021, and we expect sales in this market to grow modestly in the long run, in line with GDP. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Overall, given our strong backlog in the semiconductor, data storage and scientific markets, offset by near-term weakness in compound semiconductor, we expect total 2023 revenue to be in the range of $630 million to $670 million.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Results of Operations</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Years Ended December&#160;31, 2022 and 2021</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The following table presents revenue and expense line items reported in our Consolidated Statements of Operations for 2022 and 2021 and the period-over-period dollar and percentage changes for those line items. Our results of operations are reported as one business segment, represented by our single operating segment. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:49.93%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:49.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="7" style="vertical-align:bottom;white-space:nowrap;width:29.68%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">For&#160;the year ended&#160;December&#160;31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="3" style="vertical-align:bottom;white-space:nowrap;width:13.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Change</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;">&#160;</p></td></tr><tr><td style="vertical-align:bottom;width:49.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="3" style="vertical-align:bottom;white-space:nowrap;width:13.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="3" style="vertical-align:bottom;white-space:nowrap;width:13.08%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="3" style="vertical-align:bottom;white-space:nowrap;width:13.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Period&#160;to&#160;Period</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;">&#160;</p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="14" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:49.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:46.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(dollars&#160;in&#160;thousands)</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;">&#160;</p></td></tr><tr><td style="vertical-align:bottom;width:49.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Net sales</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 646,137</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 100</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 583,277</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 100</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 62,860</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 11</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%</p></td></tr><tr><td style="vertical-align:bottom;width:49.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Cost of sales</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 382,989</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 59</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 341,003</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 58</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 41,986</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 12</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%</p></td></tr><tr><td style="vertical-align:bottom;width:49.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Gross profit</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 263,148</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 41</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 242,274</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 42</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 20,874</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 9</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%</p></td></tr><tr><td style="vertical-align:bottom;width:49.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Operating expenses, net:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:49.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Research and development</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 103,565</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 16</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 88,680</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 15</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 14,885</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 17</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%</p></td></tr><tr><td style="vertical-align:bottom;width:49.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Selling, general, and administrative</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 88,952</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 14</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 84,536</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 14</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 4,416</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 5</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%</p></td></tr><tr><td style="vertical-align:bottom;width:49.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Amortization of intangible assets</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 10,018</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 2</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 12,280</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 2</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (2,262)</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (18)</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%</p></td></tr><tr><td style="vertical-align:bottom;width:49.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Other operating expense (income), net</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 317</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> &#8212;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 68</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> &#8212;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 249</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 366</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%</p></td></tr><tr><td style="vertical-align:bottom;width:49.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Total operating expenses, net</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 202,852</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 31</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 185,564</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 32</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 17,288</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 9</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%</p></td></tr><tr><td style="vertical-align:bottom;width:49.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Operating income</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 60,296</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 9</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 56,710</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 10</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 3,586</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 6</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%</p></td></tr><tr><td style="vertical-align:bottom;width:49.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Interest income (expense), net</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (9,311)</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (1)</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (26,020)</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (4)</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 16,709</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (64)</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%</p></td></tr><tr><td style="vertical-align:bottom;width:49.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Other income (expense), net</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> &#8212;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> &#8212;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (5,010)</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (1)</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 5,010</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:49.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Income before income taxes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 50,985</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 8</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 25,680</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 4</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 25,305</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 99</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%</p></td></tr><tr><td style="vertical-align:bottom;width:49.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Income tax expense (benefit)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (115,957)</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> &#8212;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (358)</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> &#8212;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (115,599)</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:49.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Net income</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 166,942</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 26</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 26,038</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 4</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.59%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 140,904</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 541</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%</p></td></tr></table><div style="font-family:'Times New Roman','Times','serif';font-size:10.0pt;margin-bottom:0pt;margin-top:0pt;min-height:1.19em;position:relative;width:100%;"><div style="background-color:#000000;height:1pt;position:relative;top:0.6em;width:25.0%;border:none;margin:0 auto 0 0;"></div></div><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Symbol';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">*</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Not meaningful</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">33</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Net Sales</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The following is an analysis of sales by end-market and by region:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:51.87%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:51.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="7" style="vertical-align:bottom;white-space:nowrap;width:28.92%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended December&#160;31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="3" style="vertical-align:bottom;white-space:nowrap;width:13.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Change</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;">&#160;</p></td></tr><tr><td style="vertical-align:bottom;width:51.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="3" style="vertical-align:bottom;white-space:nowrap;width:13.08%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="3" style="vertical-align:bottom;white-space:nowrap;width:13.08%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="3" style="vertical-align:bottom;white-space:nowrap;width:13.08%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Period&#160;to&#160;Period</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;">&#160;</p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="14" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:51.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:44.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(dollars&#160;in&#160;thousands)</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;">&#160;</p></td></tr><tr><td style="vertical-align:bottom;width:51.87%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Sales by end-market</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:51.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Semiconductor</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 369,369</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 57</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 247,051</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 43</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 122,318</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 50</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%</p></td></tr><tr><td style="vertical-align:bottom;width:51.87%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Compound Semiconductor</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 121,194</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 19</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 106,972</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 18</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 14,222</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 13</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%</p></td></tr><tr><td style="vertical-align:bottom;width:51.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Data Storage</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 87,544</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 13</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 168,760</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 29</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (81,216)</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (48)</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%</p></td></tr><tr><td style="vertical-align:bottom;width:51.87%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Scientific &amp; Other</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 68,030</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 11</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 60,494</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 10</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 7,536</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 12</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%</p></td></tr><tr><td style="vertical-align:bottom;width:51.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 646,137</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 100</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 583,277</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 100</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 62,860</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 11</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%</p></td></tr><tr><td style="vertical-align:bottom;width:51.87%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Sales by geographic region</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:51.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">United States</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 197,433</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 31</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 217,209</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 38</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (19,776)</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (9)</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%</p></td></tr><tr><td style="vertical-align:bottom;width:51.87%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">EMEA</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 87,837</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 14</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 55,129</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 9</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 32,708</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 59</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%</p></td></tr><tr><td style="vertical-align:bottom;width:51.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">China</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 123,703</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 19</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 105,998</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 18</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 17,705</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 17</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%</p></td></tr><tr><td style="vertical-align:bottom;width:51.87%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Rest of APAC</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 235,735</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 36</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 204,633</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 35</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 31,102</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 15</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%</p></td></tr><tr><td style="vertical-align:bottom;width:51.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Rest of World</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 1,429</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> &#8212;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 308</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> &#8212;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 1,121</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 364</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%</p></td></tr><tr><td style="vertical-align:bottom;width:51.87%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 646,137</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 100</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 583,277</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 100</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 62,860</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 11</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%</p></td></tr></table><a id="_Hlk62556127"></a><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="_Hlk93412998"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Total sales increased for the year ended December&#160;31, 2022 against the comparable prior year period in the Semiconductor, Compound Semiconductor, and Scientific &amp; Other markets, partially offset by a decline in the Data Storage market.&#160;By geography, sales increased in the EMEA, China, and Rest of APAC regions, partially offset by a decrease in the United States. Included within the Rest of APAC region for the year ended December 31, 2022 were sales in Taiwan, South Korea, Singapore, and Japan of $105.0 million, $40.3 million, $38.4 million, and $30.8 million, respectively, while sales within Rest of APAC region for the year ended December 31, 2021 included sales in Taiwan and South Korea of $65.2 million and $50.4 million, respectively.&#160;We expect there will continue to be year-to-year variations in our future sales distribution across markets and geographies. In light of the global nature of our business, we are impacted by conditions in the various countries in which we and our customers operate. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Gross Profit</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">In 2022, gross profit increased compared to 2021 primarily due to an increase in sales volume, partially offset by decreased gross margins. Gross margins decreased principally due to increased logistics costs, as well as an increase in spending as we invested in service infrastructure and capacity expansion to meet the growing demands for our semiconductor product lines. <span style="white-space:pre-wrap;">We expect our gross margins to fluctuate each period due to product mix and other factors.  </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Research and Development</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The markets we serve are characterized by continuous technological development and product innovation, and we invest in various research and development initiatives to maintain our competitive advantage and achieve our growth objectives. Research and development expenses increased in 2022 compared to 2021 primarily due to <span style="background:#ffffff;">personnel-related expenses as we invest in new research and development and additional applications for our technology in order to be well positioned to capitalize on emerging global megatrends and support longer term growth in Semiconductor and Compound Semiconductor markets. </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Selling, General, and Administrative</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Selling, general, and administrative expenses increased in 2022 compared to 2021 primarily due to higher variable expenses associated with the increase in revenue, profitability, and order in-take. <span style="background:#ffffff;">Given the uncertainty regarding the impacts on our business resulting from the COVID-19 pandemic, we are focused on the proactive management of expenses. In future periods, we may incur additional selling, general and administrative expenses to support our </span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">34</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="background:#ffffff;">responses to the COVID-19 pandemic. In addition, we experienced some duplicate operating expenses for the transition from our existing facility in San Jose, California to our new leased facility, which is substantially complete at this time.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Amortization Expense</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Amortization expense decreased in 2022 compared to 2021 <span style="background:#ffffff;">primarily due to changes in amortization expense to reflect expected cash flows of certain intangible assets, as well as certain other intangible assets becoming fully amortized in 2022.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p><a id="_Hlk31619107"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Interest Income (Expense)</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">For the year ended December&#160;31, 2022, we recorded net interest expense of $9.3 million, compared to $26.0 million for the comparable prior period. <span style="background:#ffffff;">The decrease in interest expense was primarily related to the adoption of ASU 2020-06, as non-cash charges related to the amortization of debt discount and transaction costs of the 2023 Notes, 2025 Notes, and 2027 Notes decreased approximately $12.9 million for 2022 compared to 2021. Additionally, cash interest expense on the Notes decreased approximately $2.6 million from the comparable prior year due to the partial repurchase of the 2023 Notes in November 2021. </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Other Income (Expense)</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;background:#ffffff;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;">On November 5, 2021, we entered into a privately negotiated note purchase agreement with a holder of our outstanding 2023 Notes, under which we agreed to repurchase and retire approximately $111.5 million in aggregate original principal amount of the 2023 Notes, with a carrying amount of $105.5 million, for cash consideration of approximately $115.6 million, and approximately $1.0 million of accrued and unpaid interest. We accounted for the partial settlement of the 2023 Notes as an extinguishment, and as such, recorded a loss on extinguishment of approximately $4.0&#160;million for the year ended December 31, 2021. In addition, we recorded a non-cash impairment charge of approximately $1.0 million related to an equity investment without a readily observable market price.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;background:#ffffff;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Income Taxes</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">At each reporting date, we consider new evidence, both positive and negative, that could affect our view of the future realization of our deferred tax assets.&#160;As of December 31, 2022, we achieved three years of cumulative pretax income for our United States (&#8220;domestic&#8221;) operations.&#160;In addition, we evaluated additional positive evidence and concluded that it is more likely than not our deferred tax assets are realizable on a more likely than not basis with the exception of certain state tax attributes. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The 2022 income tax benefit of $116.0 million was primarily comprised of a $117.0 million domestic tax benefit primarily in connection with release of $105.5 million valuation allowance, partially offset by a $1.0 million income tax expense related to our foreign operations.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="_Hlk94881629"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The 2021 income tax benefit of $0.4 million is comprised of a $0.7 million income tax benefit related to the reduction of uncertain tax positions based upon settlements with tax authorities, partially offset by a $0.3 million income tax expense attributable to the foreign income taxes and foreign withholding taxes.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Years Ended December&#160;31, 2021 and 2020</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">See Part II, Item 7 of our Annual Report on Form 10-K for the fiscal year ended&#160;December 31, 2021, filed with the SEC on February 18, 2022, for Management&#8217;s Discussions and Analysis of Financial Condition and Results of Operations for the fiscal year ended&#160;December 31, 2020. </p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">35</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Liquidity and Capital Resources</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Our cash and cash equivalents, restricted cash, and short-term investments are as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:67.88%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:12.69%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:12.69%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:67.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.99%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.99%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:67.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.99%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.99%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="7" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:67.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:30.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:67.88%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Cash and cash equivalents</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 154,925</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 119,747</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Restricted cash</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 547</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 725</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.88%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Short-term investments</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.69%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 147,488</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.69%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 104,181</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.69%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 302,960</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.69%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 224,653</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="_Hlk1126737"></a><a id="_Hlk30593248"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">A portion of our cash and cash equivalents is held by our subsidiaries throughout the world, frequently in each subsidiary&#8217;s respective functional currency, which is typically the U.S. dollar. At December&#160;31, 2022 and 2021, cash and cash equivalents of $28.4 million and $38.3 million, respectively, were held outside the United States. As of December&#160;31, 2022, we had $17.8 million of accumulated undistributed earnings generated by our non-U.S. subsidiaries for which the U.S. repatriation tax has been provided. Approximately $7.8 million of undistributed earnings would be subject to foreign withholding taxes if distributed back to the United States. We believe that our projected cash flow from operations, combined with our cash and short-term investments, will be sufficient to meet our projected working capital requirements, contractual obligations, and other cash flow needs for the next twelve months, including scheduled interest payments on our convertible senior notes.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">A summary of the cash flow activity for the year ended December&#160;31, 2022 and 2021 is as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Cash Flows from Operating Activities</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:68.75%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.71%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.5%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.78%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.48%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:68.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:29.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">For&#160;the year ended&#160;December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:68.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="7" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:68.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:29.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:68.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Net income</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 166,942</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 26,038</span></p></td></tr><tr><td style="vertical-align:bottom;width:68.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Non-cash items:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:68.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Depreciation and amortization</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 25,645</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 26,058</span></p></td></tr><tr><td style="vertical-align:bottom;width:68.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Non-cash interest expense</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 962</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 13,819</span></p></td></tr><tr><td style="vertical-align:bottom;width:68.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Deferred income taxes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (118,040)</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (651)</span></p></td></tr><tr><td style="vertical-align:bottom;width:68.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Share-based compensation expense</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 22,994</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 15,249</span></p></td></tr><tr><td style="vertical-align:bottom;width:68.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Loss on extinguishment of debt</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"><span style="white-space:pre-wrap;"> &#8212;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 4,029</span></p></td></tr><tr><td style="vertical-align:bottom;width:68.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Impairment of equity investment</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"><span style="white-space:pre-wrap;"> &#8212;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 980</span></p></td></tr><tr><td style="vertical-align:bottom;width:68.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Changes in operating assets and liabilities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.71%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.5%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 9,980</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.48%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (17,780)</span></p></td></tr><tr><td style="vertical-align:bottom;width:68.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"><b style="font-weight:bold;">Net cash provided by (used in) operating activities</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.71%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.5%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 108,483</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.48%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 67,742</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Net cash provided by operating activities was $108.5 million for the year ended December 31, 2022 and was due to net income of $166.9 million and an increase in cash flow from operating activities due to changes in operating assets and liabilities of $10.0 million, partially offset by adjustments for non-cash items of $68.5 million. The changes in operating assets and liabilities was largely attributable to an increase in customer deposits, partially offset by an increase in inventories and accounts receivables. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Net cash provided by operating activities was $67.7 million for the year ended December 31, 2021 and was due to net income of $26.0 million and adjustments for non-cash items of $59.5 million, partially offset by a decline in cash flow from operating activities due to changes in operating assets and liabilities of $17.8 million. The changes in operating assets and liabilities was largely attributable to increases in accounts receivable and inventories and decreases in deferred revenue, partially offset by increases in accounts payable and cash received for landlord reimbursements for leasehold improvements.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">36</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Cash Flows from Investing Activities</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:68.75%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:3.01%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.8%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.26%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:68.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:29.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">For&#160;the year ended&#160;December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:68.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.07%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="7" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:68.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:29.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:68.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Capital expenditures</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (24,604)</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (40,643)</span></p></td></tr><tr><td style="vertical-align:bottom;width:68.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Changes in investments, net</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (44,276)</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 83,446</span></p></td></tr><tr><td style="vertical-align:bottom;width:68.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Proceeds from held for sale assets, net of costs to sell</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> &#8212;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.8%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.26%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 1,725</span></p></td></tr><tr><td style="vertical-align:bottom;width:68.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"><b style="font-weight:bold;">Net cash provided by (used in) investing activities</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (68,880)</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.8%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.26%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 44,528</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The net cash used in investing activities during the year ended December&#160;31, 2022 was attributable to the net change in investments, as well as capital expenditures. The net cash provided by investing activities during the year ended December 31, 2021 was attributable to the net change in investments, partially offset by capital expenditures. We experienced a high level of capital expenditures during 2021 associated with the continued build-out of our newly leased facility in San Jose, California, which is substantially complete at this time.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Cash Flows from Financing Activities</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:89.99%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:72.22%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.83%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:10%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.66%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:10.02%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:72.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:25.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">For&#160;the year ended&#160;December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:72.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.63%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.64%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="7" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:72.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:25.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:72.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Repurchase of 2023 Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> &#8212;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.66%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (115,604)</span></p></td></tr><tr><td style="vertical-align:bottom;width:72.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Debt issuance costs</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> &#8212;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (835)</span></p></td></tr><tr><td style="vertical-align:bottom;width:72.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Settlement of equity awards, net of withholding taxes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (4,550)</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.66%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.02%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (5,590)</span></p></td></tr><tr><td style="vertical-align:bottom;width:72.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"><b style="font-weight:bold;">Net cash provided by (used in) financing activities</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (4,550)</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.02%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (122,029)</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The net cash used in financing activities for the year ended December 31, 2022 was primarily related to the settlement of equity awards. The net cash used in financing activities for the year ended December 31, 2021 was primarily related to the cash used to repurchase $111.5 million principal amount of our 2023 Notes as well as the settlement of equity awards.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Convertible Senior Notes and Revolving Credit Facility</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We have $20.2 million outstanding principal balance of 2.70% convertible senior notes that bear interest at a rate of 2.70% per year, payable semiannually in arrears on January&#160;15 and July&#160;15 of each year, and mature on January&#160;15, 2023, unless earlier purchased by the Company, redeemed, or converted. These notes matured on January 15, 2023 and were paid in cash and settled by the Company at that time. In addition, we have $132.5 million outstanding principal balance of 3.50% convertible senior notes that bear interest at a rate of 3.50% per year, payable semiannually in arrears on January&#160;15 and July&#160;15 of each year, and mature on January&#160;15, 2025, unless earlier purchased by the Company, redeemed, or converted. Finally, we have $125.0 million outstanding principal balance of 3.75% convertible senior notes that bear interest at a rate of 3.75% per year, payable semiannually in arrears on June&#160;1 and December&#160;1 of each year, and mature on June&#160;1, 2027, unless earlier purchased by the Company, redeemed, or converted. The 2027 Notes are currently convertible by shareholders until March 31, 2023.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We believe that we have sufficient capital resources and cash flows from operations to support scheduled interest payments on these debts. In addition, we have access to a $150.0 million revolving credit facility (including an ability to request an additional $75.0 million, for a total commitment of no more than $225.0 million) to provide for our working capital needs and reimburse drawings under letters of credit and for other general corporate purposes. The Company has no immediate plans to draw down on the facility, which expires in December of 2026.<span style="font-size:12pt;"> </span>Interest under the Facility is variable based on the Company&#8217;s secured net leverage ratio and is expected to bear interest based on SOFR plus a range of 150 to 225 basis points, if drawn. There is a yearly commitment fee of 25 to 35 basis points, based on the Company&#8217;s secured net leverage ratio, charged on the unused portion of the Facility.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">37</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;min-height:11.5pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Contractual Obligations and Commitments</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We have commitments under certain contractual arrangements to make future payments for goods and services. These contractual arrangements secure the rights to various assets and services to be used in the future in the normal course of business. We expect to fund these contractual arrangements with cash generated from operations in the normal course of business, as well as existing cash and cash equivalents and short-term investments. In addition, we have bank guarantees and letters of credit issued by a financial institution on our behalf as needed. At December 31, 2022, outstanding bank guarantees and letters of credit totaled $8.2 million and unused bank guarantees and letters of credit of $14.1 million were available to be drawn upon.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The following table summarizes our contractual arrangements at December&#160;31, 2022 and the timing and effect that those commitments are expected to have on our liquidity and cash flow in future periods.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:48.48%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:48.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="14" style="vertical-align:bottom;white-space:nowrap;width:49.86%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Payments&#160;due&#160;by&#160;period</b></p></td></tr><tr><td style="vertical-align:bottom;width:48.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Less&#160;than</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">1&#160;&#8211;&#160;3</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">3&#160;&#8211;&#160;5</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">More</b><b style="font-family:'Calibri','Helvetica','sans-serif';font-weight:bold;">&#160;</b><b style="font-weight:bold;">than</b></p></td></tr><tr><td style="vertical-align:bottom;width:48.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.86%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.86%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">1&#160;year</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.86%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">years</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.86%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">years</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.83%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">5&#160;years</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="16" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:48.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="14" style="vertical-align:bottom;white-space:nowrap;width:49.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">&#160;&#160;(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:48.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Principal payments on long-term debt</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 277,673</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 20,173</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 132,500</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 125,000</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> &#8212;</span></p></td></tr><tr><td style="vertical-align:bottom;width:48.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Cash interest on debt</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 32,959</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 9,597</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 16,331</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 7,031</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> &#8212;</span></p></td></tr><tr><td style="vertical-align:bottom;width:48.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Operating leases</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 53,792</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 3,757</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 8,159</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 7,632</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 34,244</span></p></td></tr><tr><td style="vertical-align:bottom;width:48.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Purchase commitments<sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;">(1)</sup></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 289,168</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 250,119</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 39,049</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> &#8212;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> &#8212;</span></p></td></tr><tr><td style="vertical-align:bottom;width:48.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Total</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 653,592</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 283,646</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 196,039</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 139,663</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 34,244</span></p></td></tr></table><div style="font-family:'Times New Roman','Times','serif';font-size:10.0pt;margin-bottom:0pt;margin-top:0pt;min-height:1.19em;position:relative;width:100%;"><div style="background-color:#000000;height:1pt;position:relative;top:0.6em;width:25.0%;border:none;margin:0 auto 0 0;"></div></div><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:9pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(1)</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:9pt;font-style:normal;font-weight:normal;">Purchase commitments are generally for inventory used in the manufacturing of our products, as well as equipment and project materials used to support research and development activities. We generally do not enter into purchase commitments extending beyond one year. However, material shortages and supply chain challenges have caused some of these commitments to extend beyond one year. At December 31, 2022, we have $9.4 million of offsetting supplier deposits that will be applied against these purchase commitments.</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Critical Accounting Policies and Estimates</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Our discussion and analysis of our financial condition and results of operations are based upon our Consolidated Financial Statements, which have been prepared in accordance with accounting principles generally accepted in the United States. The preparation of these financial statements requires a high degree of judgment, either in the application and interpretation of existing accounting literature or in the development of estimates that affect the reported amounts of assets, liabilities, revenues, and expenses. We continuously evaluate our estimates and judgments based on historical experience, as well as other factors that we believe to be reasonable under the circumstances. The results of our evaluation form the basis for making judgments about the carrying values of assets and liabilities that are not readily apparent from other sources. These estimates may change in the future if underlying assumptions or factors change, and actual results may differ from these estimates.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We consider the following significant accounting policies to be critical because of their complexity and the high degree of judgment involved in maintaining them.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Revenue Recognition</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We recognize revenue upon the transfer of control of the promised product or service to the customer in an amount that reflects the consideration we expect to receive in exchange for such product or service. We perform the following five steps to determine when to recognize revenue: (1) identification of the contract(s) with customers, (2) identification of the performance obligations in the contract, (3) determination of the transaction price, (4) allocation of the transaction price to the performance obligations in the contract, and (5) recognition of revenue when, or as, a performance obligation is satisfied. Judgment is used in the following areas in the determination of when to recognize revenue:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><i style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:italic;font-weight:normal;">Identification of performance obligations and allocation of contract price:</i><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"> Our contracts with customers frequently contain multiple deliverables, such as systems, upgrades, components, spare parts, installation, </span></td></tr></table></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">38</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;"></td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">maintenance, and service plans. We allocate revenue to each performance obligation on a relative stand-alone selling price basis. The stand-alone selling prices are determined based on the prices at which we separately sell the systems, upgrades, components, spare parts, installation, maintenance, and service plans. For items that are not sold separately, we estimate stand-alone selling prices generally using an expected cost plus margin approach. Judgment is required to properly identify the performance obligations within a contract and to determine how the revenue should be allocated among the performance obligations. </span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><i style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:italic;font-weight:normal;">Combination of contracts:</i><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"> Judgment is required when evaluating whether multiple transactions with the same customer or related parties should be considered part of a single contract. This evaluation includes an assessment of whether the contracts or agreements are negotiated or executed within a short time frame of each other or if there are indicators that the contracts are negotiated in contemplation of one another. </span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><i style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:italic;font-weight:normal;">Variable consideration:</i><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"> Our contracts with customers generally do not contain variable consideration. In the rare instances where variable consideration is included, we estimate the amount of variable consideration and determine what portion of that, if any, has a high probability of significant subsequent revenue reversal, and if so, that amount is excluded from the transaction price. </span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><i style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:italic;font-weight:normal;">Transfer of control:</i><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"> Judgment may be required in the determination of when transfer of control occurs. This judgment may include the interpretation of commercial terms and consideration of the customer&#8217;s post-delivery acceptance provisions. Our system sales arrangements, including certain upgrades, generally include field acceptance provisions that may include functional or mechanical test procedures. When we objectively demonstrate that the criteria specified in the contractual acceptance provisions are achieved prior to delivery either through customer testing or our historical experience of our tools meeting specifications, transfer of control of the product to the customer is considered to have occurred and revenue is recognized upon system delivery since there is no substantive contingency remaining related to the acceptance provisions at that date. For new products, new applications of existing products, or for products with substantive customer acceptance provisions where we cannot objectively demonstrate that the criteria specified in the contractual acceptance provisions have been achieved prior to delivery, revenue and the associated costs are deferred. We recognize such revenue and costs upon obtaining objective evidence that the acceptance provisions can be achieved, assuming all other revenue recognition criteria have been met.</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Any material changes in the identification of performance obligations, determination and allocation of the transaction price to performance obligations, and determination of when transfer of control occurs to the customer, could impact the timing and amount of revenue recognition, which could have a material effect on our financial condition and results of operations.&#160; </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Inventory Valuation</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Inventories are stated at the lower of cost or net realizable value, with cost determined on a first-in, first-out basis. Each quarter we assess the valuation and recoverability of all inventories: materials (raw materials, spare parts, and service inventory); work-in-process; and finished goods. Obsolete inventory or inventory in excess of our estimated usage requirements is written down to its estimated net realizable value if less than cost. We evaluate usage requirements by analyzing historical usage, anticipated demand, alternative uses of materials, and other qualitative factors. Unanticipated changes in demand for our products may require a write down of inventory that could materially affect our operating results.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Goodwill and Intangible Assets</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Goodwill is tested for impairment at least annually in the beginning of the fourth quarter of our fiscal year, which may require significant judgment. We may first perform a qualitative assessment of whether it is more likely than not that the reporting unit&#8217;s fair value is less than its carrying amount, and, if so, we then quantitatively compare the fair value of our reporting unit to its carrying amount. If the fair value of the reporting unit exceeds its carrying amount, goodwill is not impaired. If the carrying amount of the reporting unit exceeds its fair value, we then record an impairment loss equal to the difference, up to the carrying value of goodwill.</p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">39</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We determine the fair value of our reporting unit based on a reconciliation of the aggregate fair value of our reporting unit to our adjusted market capitalization. The adjusted market capitalization is calculated by multiplying the average share price of our common stock for the last ten trading days prior to the measurement date by the number of outstanding common shares and adding a control premium. The determination of a reasonable control premium may require significant judgment and is estimated using historical transactions in similar industries.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The carrying values of long-lived assets, including identifiable intangible assets, are reviewed for impairment whenever events or changes in circumstances indicate that the carrying amount of an asset may not be recoverable. If circumstances require a long-lived asset or asset group be tested for possible impairment, a recoverability test is performed utilizing undiscounted cash flows expected to be generated by that asset or asset group compared to its carrying amount. If the carrying amount of the long-lived asset or asset group is not recoverable on an undiscounted cash flow basis, impairment is recognized to the extent the carrying amount exceeds its fair value. Fair value is determined through various valuation techniques including discounted cash flow models or, when available, quoted market values and third-party appraisals. It is not possible for us to predict the likelihood of any possible future impairments or, if such an impairment were to occur, the magnitude of any impairment.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Intangible assets with finite useful lives, including purchased technology, customer-related intangible assets, patents, trademarks, backlog, and software licenses, are subject to amortization over the expected period of economic benefit to us. We evaluate whether events or circumstances have occurred that warrant a revision to the remaining useful lives of intangible assets. In cases where a revision is deemed appropriate, the remaining carrying amounts of the intangible assets are amortized over the revised remaining useful life. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Intangible assets related to in-process research and development (&#8220;IPR&amp;D&#8221;) projects are considered to be indefinite-lived until the completion or abandonment of the associated R&amp;D efforts. If and when development is complete, the associated assets would be deemed long-lived and would then be amortized based on their respective estimated useful lives at that point in time. Indefinite-lived intangible assets are tested for impairment at least annually in the beginning of the fourth quarter of our fiscal year. In testing indefinite-lived intangible assets for impairment, we may first perform a qualitative assessment of whether it is more likely than not that the fair value of the indefinite-lived intangible asset is less than its carrying amount, and, if so, we then quantitatively compare the fair value of the indefinite-lived intangible asset to its carrying amount. We determine the fair value of our indefinite-lived intangible assets using a discounted cash flow method.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="_Hlk126084940"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Income Taxes</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We estimate our income taxes in each of the jurisdictions in which we operate. Deferred income taxes reflect the net tax effect of temporary differences between the asset and liability balances recognized for financial reporting purposes and the balances used for income tax purposes, as well as the tax effect of carry forwards. We record a valuation allowance to reduce our deferred tax assets to the amount that is more likely than not to be realized. Realization of our net deferred tax assets is dependent on future taxable income.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We recognize the effect of income tax positions for only those positions which are estimated to more likely than not be sustained if challenged. We reflect changes in recognition or measurement in the period in which our change in judgment occurs. We record interest and penalties related to uncertain tax positions in income tax expense. Income taxes related to the global intangible low-taxed income (&#8220;GILTI&#8221;) rules are expensed as incurred.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Recent Accounting Pronouncements</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;background:#ffff00;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We adopted ASU 2019-12 in the second quarter of 2020. We have also adopted ASU 2020-06 effective January 1, 2022. Refer to Note 1, &#8220;Significant Accounting Policies,&#8221; for additional information.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;background:#ffff00;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We are also evaluating other pronouncements recently issued but not yet adopted. The adoption of these pronouncements is not expected to have a material impact on our consolidated financial statements.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">40</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="Item7AQuantitativeandQualitative_966516"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Item 7A. Quantitative and Qualitative Disclosures about Market Risk</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Interest Rate Risk</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Our exposure to market rate risk for changes in interest rates primarily relates to our investment portfolio. We centrally manage our investment portfolios considering investment opportunities and risks, tax consequences, and overall financing strategies. Our investment portfolio includes fixed-income securities with a fair value of approximately $147.5 million at December&#160;31, 2022. These securities are subject to interest rate risk and, based on our investment portfolio at December&#160;31, 2022, a 100 basis point increase in interest rates would result in a decrease in the fair value of the portfolio of $0.6 million. While an increase in interest rates may reduce the fair value of the investment portfolio, we will not realize the losses in the Consolidated Statements of Operations unless the individual fixed-income securities are sold prior to recovery or the loss is determined to be other-than-temporary.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Currency Exchange Risk</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We conduct business on a worldwide basis and, as such, a portion of our revenues, earnings, and net investments in foreign affiliates is exposed to changes in currency exchange rates. The economic impact of currency exchange rate movements is complex because such changes are often linked to variability in real growth, inflation, interest rates, governmental actions, and other factors. These changes, if material, could cause us to adjust our financing and operating strategies. Consequently, isolating the effect of changes in currency does not incorporate these other important economic factors.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Changes in currency exchange rates could affect our foreign currency denominated monetary assets and liabilities and forecasted cash flows. We may enter into&#160;monthly forward derivative contracts with the intent of mitigating a portion of this risk. We only use derivative financial instruments in the context of hedging and not for speculative purposes and have not designated our foreign exchange derivatives as hedges. Accordingly, changes in fair value from these contracts are included in &#8220;Other operating expense (income), net&#8221; in our Consolidated Statements of Operations. We execute derivative transactions with highly rated financial institutions to mitigate counterparty risk.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Our net sales to customers located outside of the United States represented approximately 69%, 62%, and 68% of our total net sales in 2022, 2021, and 2020, respectively. We expect that net sales to customers outside the United States will continue to represent a large percentage of our total net sales. Our net sales denominated in currencies other than the U.S. dollar represented approximately 3%, 3%, and 5% of total net sales in 2022, 2021, and 2020, respectively.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">A 10% change in foreign exchange rates would have an immaterial impact on the consolidated results of operations since most of our sales outside the United States are denominated in U.S. dollars.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="_1d47be6e_2978_419d_b73b_b28c48834ea7"></a><a id="Item8FinancialStatements_672804"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Item 8. Financial Statements and Supplementary Data</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Our Consolidated Financial Statements are listed in the Index to Consolidated Financial Statements and Financial Statement Schedule filed as part of this Form&#160;10-K.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="_0bf4fe4e_2c99_4ee5_a404_fd512d65faaf"></a><a id="Item9ChangesinandDisagreements_657227"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Item 9. Changes in and Disagreements with Accountants on Accounting and Financial Disclosure</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">None.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="_7ec55780_9370_4854_bed4_7bc33ee04aa9"></a><a id="Item9AControlsandProcedures_188790"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Item 9A. Controls and Procedures</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Management&#8217;s Report on Internal Control over Financial Reporting</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Our principal executive and financial officers have evaluated and concluded that our disclosure controls and procedures are effective as of December&#160;31, 2022. The disclosure controls and procedures are designed to ensure that the information required to be disclosed in this report filed under the Securities Exchange Act of 1934 is recorded, processed, summarized, and reported within the time periods specified in the Securities and Exchange Commission&#8217;s </p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">41</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">rules&#160;and forms and is accumulated and communicated to our principal executive and financial officers as appropriate to allow timely decisions regarding required disclosure.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Our principal executive and financial officers are responsible for establishing and maintaining adequate internal control over financial reporting, which is a process designed and put into effect to provide reasonable assurance regarding the reliability of financial reporting and the preparation of financial statements for external purposes in accordance with generally accepted accounting principles. Using the criteria established in the Internal Control &#8212; Integrated Framework (2013) published by the Committee of Sponsoring Organizations of the Treadway Commission (&#8220;COSO&#8221;), Management has evaluated, assessed, and concluded that internal control over financial reporting is effective as of December&#160;31, 2022.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">KPMG LLP, an independent registered public accounting firm, has audited the consolidated financial statements included in this Annual Report on Form&#160;10-K and, as part of their audit, has issued their report, included herein, on the effectiveness of our internal control over financial reporting.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Changes in Internal Control over Financial Reporting</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">During the quarter ended December&#160;31, 2022, there were no changes in internal control that have materially affected or are reasonably likely to materially affect internal control over financial reporting.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">42</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="_3836bf73_4f6b_4892_aca2_563b7ee80d95"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Report of Independent Registered Public Accounting Firm</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">To the Stockholders and Board of Directors</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Veeco Instruments Inc.:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:3pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:11pt;margin:0pt;"><i style="font-style:italic;">Opinion on Internal Control Over Financial Reporting</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:5pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:11pt;margin:0pt;">We have audited Veeco Instruments Inc. and subsidiaries&#39;&#160;the (Company) internal control over financial reporting as of December&#160;31,&#160;2022, based on criteria established in Internal Control &#8211; Integrated Framework (2013) issued by the Committee of Sponsoring Organizations of the Treadway Commission. In our opinion,&#160;the Company maintained, in all material respects, effective internal control over financial reporting as of December&#160;31,&#160;2022, based on criteria established in Internal Control &#8211; Integrated Framework (2013) issued by the Committee of Sponsoring Organizations of the Treadway Commission.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;line-height:11pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:11pt;margin:0pt;">We also have audited, in accordance with the standards of the Public Company Accounting Oversight Board (United States) (PCAOB), the consolidated balance sheets of the Company as of December&#160;31,&#160;2022 and December 31, 2021, the related consolidated statements of operations, comprehensive income (loss), stockholders&#8217; equity, and cash flows for each of the years in the three-year period ended December&#160;31,&#160;2022, and the related notes and financial statement schedule II - valuation and qualifying accounts (collectively, the consolidated financial statements), and our report dated February&#160;22,&#160;2023 expressed an unqualified opinion on those consolidated financial statements.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;line-height:11pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:11pt;margin:0pt;"><i style="font-style:italic;">Basis for Opinion</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:5pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:11pt;margin:0pt;">The Company&#8217;s management is responsible for maintaining effective internal control over financial reporting and for its assessment of the effectiveness of internal control over financial reporting, included in the accompanying Management&#8217;s Report on Internal Control over Financial Reporting. Our responsibility is to express an opinion on the Company&#8217;s internal control over financial reporting based on our audit. We are a public accounting firm registered with the PCAOB and are required to be independent with respect to the Company in accordance with the U.S. federal securities laws and the applicable rules and regulations of the Securities and Exchange Commission and the PCAOB.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;line-height:11pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:11pt;margin:0pt;">We conducted our audit in accordance with the standards of the PCAOB. Those standards require that we plan and perform the audit to obtain reasonable assurance about whether effective internal control over financial reporting was maintained in all material respects. Our audit of internal control over financial reporting included obtaining an understanding of internal control over financial reporting, assessing the risk that a material weakness exists, and testing and evaluating the design and operating effectiveness of internal control based on the assessed risk. Our audit also included performing such other procedures as we considered necessary in the circumstances. We believe that our audit provides a reasonable basis for our opinion.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;line-height:10pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:11pt;margin:0pt;"><i style="font-style:italic;">Definition and Limitations of Internal Control Over Financial Reporting</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:6pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:11pt;margin:0pt;">A company&#8217;s internal control over financial reporting is a process designed to provide reasonable assurance regarding the reliability of financial reporting and the preparation of financial statements for external purposes in accordance with generally accepted accounting principles. A company&#8217;s internal control over financial reporting includes those policies and procedures that (1) pertain to the maintenance of records that, in reasonable detail, accurately and fairly reflect the transactions and dispositions of the assets of the company; (2) provide reasonable assurance that transactions are recorded as necessary to permit preparation of financial statements in accordance with generally accepted accounting principles, and that receipts and expenditures of the company are being made only in accordance with authorizations of management and directors of the company; and (3) provide reasonable assurance regarding prevention or timely detection of unauthorized acquisition, use, or disposition of the company&#8217;s assets that could have a material effect on the financial statements.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;line-height:10pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:11pt;margin:0pt;">Because of its inherent limitations, internal control over financial reporting may not prevent or detect misstatements. Also, projections of any evaluation of effectiveness to future periods are subject to the risk that controls may become inadequate because of changes in conditions, or that the degree of compliance with the policies or procedures may deteriorate.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;line-height:11pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:11pt;margin:0pt;">/s/ KPMG LLP</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:5pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:11pt;margin:0pt;">Santa Clara, California<br />February&#160;22, 2023</p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">43</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="_ecf9beb1_9164_44ab_854d_ccbeac8c20ef"></a><a id="Item9BOtherInformation_74067"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Item 9B. Other Information</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">None.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="PARTIII_80757"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">PART&#160;III</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="_b38025a5_d7b7_4836_a36a_b6f6576534f5"></a><a id="Item10DirectorsExecutiveOfficers_819063"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Item 10. Directors, Executive Officers and Corporate Governance</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Information required by this Item that will appear under the headings &#8220;Governance,&#8221; &#8220;Executive Officers,&#8221; and &#8220;Delinquent Section&#160;16(a)&#160;Reports&#8221; in the definitive proxy statement to be filed with the SEC relating to our 2023 Annual Meeting of Stockholders is incorporated herein by reference.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We have adopted a Code of Ethics for Senior Officers (the &#8220;Code&#8221;) which applies to our principal executive officer, principal financial officer, principal accounting officer or controller, or persons performing similar functions. A copy of the Code can be found on our website (www.veeco.com). We intend to disclose on our website the nature of any future amendments to and waivers of the Code that apply to the chief executive officer, principal financial officer, principal accounting officer, or persons performing similar functions. We have also adopted a Code of Conduct which applies to all of our employees, including those listed above, as well as to our directors. A copy of the Code of Conduct can be found on our website (www.veeco.com). The website address above is intended to be an inactive, textual reference only. None of the material on this website is part of this report.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="_171fb321_93bd_4ef5_b8b2_f354a363ea5b"></a><a id="Item11ExecutiveCompensation_872731"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Item 11. Executive Compensation</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Information required by this Item that will appear under the heading &#8220;Compensation&#8221; in the definitive proxy statement to be filed with the SEC relating to our 2023 Annual Meeting of Stockholders is incorporated herein by reference.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="_7568734c_bf33_4b7a_a455_6436d3abcf43"></a><a id="Item12SecurityOwnershipofCertain_4330"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Item 12. Security Ownership of Certain Beneficial Owners and Management and Related Stockholder Matters</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Information required by this Item that will appear under the headings &#8220;Security Ownership of Certain Beneficial Owners and Management&#8221; and &#8220;Equity Compensation Plan Information&#8221; in the definitive proxy statement to be filed with the SEC relating to our 2023 Annual Meeting of Stockholders is incorporated herein by reference.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="_2775dbd6_aad9_4bb6_87a8_d14520730031"></a><a id="Item13CertainRelationships_454398"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Item 13. Certain Relationships and Related Transactions, and Director Independence</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Information required by this Item that will appear under the headings &#8220;Certain Relationships and Related Transactions&#8221; and &#8220;Independence of Board&#8221; in the definitive proxy statement to be filed with the SEC relating to our 2023 Annual Meeting of Stockholders is incorporated herein by reference.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="_2273d79b_51ff_462f_be22_327cb60963e5"></a><a id="Item14PrincipalAccounting_254066"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Item 14. Principal Accounting Fees and Services</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Information required by this Item that will appear under the heading &#8220;Independent Auditor Fees and Other Matters&#8221; in the definitive proxy statement to be filed with the SEC relating to our 2023 Annual Meeting of Stockholders is incorporated herein by reference.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">44</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="_f155b6a3_7b00_4e01_bcd6_a425842fc607"></a><a id="PARTIV_984349"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">PART&#160;IV</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="_Hlk63110965"></a><a id="Item15ExhibitsFinancialStatement_74184"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Item 15. Exhibits, Financial Statement Schedules</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;margin:0pt;">(a)&#160;&#160;&#160;(1)&#160;&#160;The Registrant&#8217;s financial statements together with a separate table of contents are annexed hereto</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;text-indent:18pt;margin:0pt;">(2)&#160;&#160;Financial Statement Schedules are listed in the separate table of contents annexed hereto.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;text-indent:18pt;margin:0pt;">(3)&#160;&#160;Exhibits</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;margin:0pt;">Unless otherwise indicated, each of the following exhibits has been previously filed with the Securities and Exchange Commission by the Company under File No.&#160;0-16244.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:-0.0978775%;padding-left:0pt;padding-right:0pt;table-layout:auto;width:100%;"><tr style="height:1pt;"><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:8.47%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.69%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:43.44%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.65%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:8.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.63%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:10.22%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.96%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:10.36%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.86%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:9.92%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"></div></div></th></tr><tr><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Filed&#160;or</b></p></th></tr><tr><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Exhibit</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th colspan="5" style="font-weight:normal;text-align:left;vertical-align:bottom;width:32.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Incorporated&#160;by&#160;Reference</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.86%;border-bottom:1px solid transparent;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:9.92%;border-bottom:1px solid transparent;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Furnished</b></p></th></tr><tr><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:8.47%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Number</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.69%;border-bottom:1px solid transparent;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:43.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Exhibit&#160;Description</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.65%;border-bottom:1px solid transparent;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:8.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Form</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.63%;border-bottom:1px solid transparent;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:10.22%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Exhibit</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.96%;border-bottom:1px solid transparent;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:10.36%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Filing&#160;Date</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.86%;border-bottom:1px solid transparent;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:9.92%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Herewith</b></p></th></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">1.1</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="https://www.sec.gov/Archives/edgar/data/0000103145/000110465921074134/tm2117800d1_ex1-01.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Conflict Minerals Report of Veeco Instruments Inc.</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:1pt;margin:0pt;">&#160;</p></td><td style="vertical-align:top;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:1pt;text-align:center;margin:0pt;">&#160;<span style="font-size:10pt;">SD</span></p></td><td style="vertical-align:top;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:1pt;text-align:center;margin:0pt;">&#160;</p></td><td style="vertical-align:top;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">1.01</p></td><td style="vertical-align:top;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:1pt;text-align:center;margin:0pt;">&#160;</p></td><td style="vertical-align:top;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">5/27/2022</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">3.1</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="http://www.sec.gov/Archives/edgar/data/103145/0000912057-97-028036-index.html"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Amended and Restated Certificate of Incorporation of Veeco dated December&#160;1, 1994, as amended June&#160;2, 1997 and July&#160;25, 1997.</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10-Q</p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">3.1</p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">8/14/1997</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">3.2</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="http://www.sec.gov/Archives/edgar/data/103145/000091205701007608/a2041225zex-3_2.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Amendment to Certificate of Incorporation of Veeco dated May&#160;29, 1998.</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10-K</p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">3.2</p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">3/14/2001</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">3.3</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="http://www.sec.gov/Archives/edgar/data/103145/000091205700037406/ex-3_1.txt"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Amendment to Certificate of Incorporation of Veeco dated May&#160;5, 2000.</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10-Q</p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">3.1</p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">8/14/2000</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">3.4</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;" href="http://www.sec.gov/Archives/edgar/data/103145/000110465909060352/a09-31211_1ex3d1.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Amendment to Certificate of Incorporation of Veeco dated May&#160;16, 2002</span></a>.</p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10-Q</p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">3.1</p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10/26/2009</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">3.5</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="http://www.sec.gov/Archives/edgar/data/103145/000104746911001284/a2202112zex-3_8.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Amendment to Certificate of Incorporation of Veeco dated May&#160;18, 2010.</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10-K</p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">3.8</p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">2/24/2011</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">3.6</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="https://www.sec.gov/Archives/edgar/data/103145/000110465923002726/tm232710d1_ex3-1.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Seventh Amended and Restated Bylaws of Veeco effective January 9, 2023.</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">8-K</p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">3.1</p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">1/10/2023</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">3.7</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="http://www.sec.gov/Archives/edgar/data/103145/000100547701003069/0001005477-01-003069-0002.txt"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Certificate of Designation, Preferences, and Rights of Series&#160;A Junior Participating Preferred Stock of Veeco dated March 14, 2001.</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10-Q</p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">3.1</p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">5/9/2001</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">4.1</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="http://www.sec.gov/Archives/edgar/data/103145/000110465917002827/a17-2524_1ex4d1.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Indenture, dated as of January&#160;18, 2017, by and between Veeco Instruments Inc. and U.S. Bank National Association, as Trustee (relating to the 2.70% Convertible Notes due 2023).</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">8-K</p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">4.1</p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">1/18/2017</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">4.2</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="http://www.sec.gov/Archives/edgar/data/103145/000110465917002827/a17-2524_1ex4d2.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">First Supplemental Indenture, dated as of January&#160;18, 2017, by and between Veeco Instruments Inc. and U.S. Bank National Association, as Trustee (relating to the 2.70% Convertible Notes due 2023).</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">8-K</p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">4.2</p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">1/18/2017</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">4.3</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="https://www.sec.gov/Archives/edgar/data/103145/000110465920063205/tm2020001d1_ex4-1.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Indenture, dated as of May 18, 2020, between Veeco Instruments Inc. and U.S. Bank National Association, as trustee.</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">8-K</p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">4.1</p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">5/18/2020</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">4.4</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;" href="https://www.sec.gov/Archives/edgar/data/103145/000110465920063205/tm2020001d1_ex4-1.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Form of 3.75% Convertible Senior Notes due 2027</span></a>.</p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">8-K</p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">4.1</p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">5/18/2020</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">4.5</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;" href="https://www.sec.gov/Archives/edgar/data/103145/000110465920126397/tm2036203d1_ex4-1.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Indenture, dated as of November 17, 2020, between Veeco Instruments Inc. and U.S. Bank National Association, as trustee</span></a>.</p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">8-K</p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">4.1</p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">11/17/2020</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">4.6</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;" href="https://www.sec.gov/Archives/edgar/data/103145/000110465920126397/tm2036203d1_ex4-1.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Form of 3.50% Convertible Senior Notes due 2025</span></a>.</p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">8-K</p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">4.1</p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">11/17/2020</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">4.7</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;" href="https://www.sec.gov/Archives/edgar/data/103145/000155837020001167/ex-4d3.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Description of the Registrant&#8217;s Securities Registered Pursuant to Section 12 of the Securities Exchange Act of 1934</span></a>.</p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10-K</p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">4.3</p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">2/21/2020</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.1</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="https://www.sec.gov/Archives/edgar/data/0000103145/000110465921027481/tm217343d1_ex10-1.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Lease dated February 18, 2021 between Veeco Instruments Inc. and Trimble-Junction Ventures LLC.</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">8-K</p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10.1</p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">2/24/2021</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr></table></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">45</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:-0.0978775%;padding-left:0pt;padding-right:0pt;table-layout:auto;width:100%;"><tr style="height:1pt;"><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:8.47%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.69%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:43.44%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.65%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:8.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.63%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:10.22%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.96%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:10.36%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.86%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:9.92%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"></div></div></th></tr><tr><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Filed&#160;or</b></p></th></tr><tr><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Exhibit</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th colspan="5" style="font-weight:normal;text-align:left;vertical-align:bottom;width:32.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Incorporated&#160;by&#160;Reference</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.86%;border-bottom:1px solid transparent;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:9.92%;border-bottom:1px solid transparent;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Furnished</b></p></th></tr><tr><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:8.47%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Number</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.69%;border-bottom:1px solid transparent;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:43.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Exhibit&#160;Description</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.65%;border-bottom:1px solid transparent;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:8.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Form</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.63%;border-bottom:1px solid transparent;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:10.22%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Exhibit</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.96%;border-bottom:1px solid transparent;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:10.36%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Filing&#160;Date</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.86%;border-bottom:1px solid transparent;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:9.92%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Herewith</b></p></th></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.2*</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="https://www.sec.gov/Archives/edgar/data/103145/000155837021001358/veco-20201231xex10d1.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Veeco Severance Benefits Policy, effective May 1, 2009.</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10-K</p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10.1</p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">2/22/2021</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.3*</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="http://www.sec.gov/Archives/edgar/data/103145/000110465916125106/a16-12597_1ex10d1.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Veeco Amended and Restated 2010 Stock Incentive Plan, effective May&#160;5, 2016.</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">S-8</p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10.1</p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">6/2/2016</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.4*</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="http://www.sec.gov/Archives/edgar/data/103145/000110465917066095/a17-20621_1ex10d1.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Veeco Amended and Restated 2010 Stock Incentive Plan, effective March&#160;3, 2017.</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10-Q</p></td><td style="vertical-align:top;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10.1</p></td><td style="vertical-align:top;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">11/3/2017</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.5*</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"> <span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;" href="https://www.sec.gov/Archives/edgar/data/0000103145/000155837019004295/ex-10d10.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Veeco Instruments Inc. 2019 Stock Incentive Plan</span></a>.</p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"> <span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"><span style="white-space:pre-wrap;"> S-8</span></p></td><td style="vertical-align:top;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"> <span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.1</p></td><td style="vertical-align:top;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"> <span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">5/7/2019</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"> <span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.6*</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="https://www.sec.gov/Archives/edgar/data/103145/000110465922063395/tm2216198d1_s8.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Amendment No. 1 to the Veeco Instruments Inc.2019 Stock Incentive Plan.</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">S-8</p></td><td style="vertical-align:top;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">4.8</p></td><td style="vertical-align:top;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">5/20/2022</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.7</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;" href="https://www.sec.gov/Archives/edgar/data/103145/000110465917035571/a17-13884_1s8.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Ultratech, Inc. 1993 Stock Option/Stock Issuance Plan (as Amended and Restated as of May 31, 2011</span></a>)</p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">S-8</p></td><td style="vertical-align:top;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10.1</p></td><td style="vertical-align:top;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">5/26/2017</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.8</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="https://www.sec.gov/Archives/edgar/data/103145/000110465920063205/tm2020001d1_ex10-1.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Form of Capped Call Confirmation.</span></a><a style="-sec-extract:exhibit;" href="http://www.sec.gov/Archives/edgar/data/103145/000141057815000433/a15-11903_1ex10d1.htm"></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">8-K</p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10.1</p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">5/18/2020</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.9</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;" href="https://www.sec.gov/Archives/edgar/data/103145/000110465920126397/tm2036203d1_ex10-1.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Exchange Agreement</span></a>.</p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">8-K</p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10.1</p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">11/17/2020</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.10</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="https://www.sec.gov/Archives/edgar/data/103145/000110465921135409/tm2132183d1_ex10-1.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Note Purchase Agreement, dated as of November 5, 2021, by and between Veeco Instruments Inc. and Lynrock Lake LLP.</span></a> </p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">8-K</p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10.1</p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">11/8/2021</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.11</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="https://www.sec.gov/Archives/edgar/data/103145/000110465921151696/tm2135782d1_ex10-1.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Loan and Security Agreement, dated as of December 16, 2021, by and among Veeco Instruments Inc., as borrower, the guarantors party thereto, the lenders from time to time party thereto, HSBC Bank USA, National Association, as administrative agent, collateral agent, joint lead arranger, and joint bookrunner, Barclays bank PLC, as joint lead arranger and joint bookrunner, and Santander Bank, N.A.</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">8-K</p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10.1</p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">12/20/2021</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.12</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;" href="https://www.sec.gov/Archives/edgar/data/103145/000110465921151696/tm2135782d1_ex10-2.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Guaranty, dated as of December 16, 2021, by the guarantors, identified therin in favor of HSBC Bank USA, National Association, as agent.</span></a> </p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">8-K</p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10.2</p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">12/20/2021</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.13*</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="http://www.sec.gov/Archives/edgar/data/103145/000110465918030941/a18-8649_1ex10d1.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Form of Notice of Performance Share Award and related terms and conditions pursuant to the Veeco 2010 Stock Incentive Plan, effective March 2018.</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10-Q</p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10.1</p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">5/7/2018</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.14*</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="http://www.sec.gov/Archives/edgar/data/103145/000110465918030941/a18-8649_1ex10d2.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Form of Notice of Restricted Stock Award and related terms and conditions pursuant to the Veeco 2010 Stock Incentive Plan, effective March 2018.</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10-Q</p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10.2</p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">5/7/2018</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.15*</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="http://www.sec.gov/Archives/edgar/data/103145/000155837019004101/veco-20190331ex101629dff.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Form of Notice of Performance Restricted Stock Unit Award and related terms and conditions pursuant to the Veeco 2010 Stock Incentive Plan, effective March 2019</span></a>.</p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10-Q</p></td><td style="vertical-align:top;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">&#160;</p></td><td style="vertical-align:top;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.1</p></td><td style="vertical-align:top;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">&#160;</p></td><td style="vertical-align:top;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">5/7/2019</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.16*</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;" href="http://www.sec.gov/Archives/edgar/data/103145/000155837019004101/veco-20190331ex102789a41.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Form of Notice of Restricted Stock Award and related terms and conditions pursuant to the Veeco 2010 Stock Incentive Plan, effective March 2019 (time-based version A)</span></a>.</p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10-Q</p></td><td style="vertical-align:top;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">&#160;</p></td><td style="vertical-align:top;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.2</p></td><td style="vertical-align:top;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">&#160;</p></td><td style="vertical-align:top;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">5/7/2019</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.17*</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;" href="http://www.sec.gov/Archives/edgar/data/103145/000155837019004101/veco-20190331ex1038a7c7b.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Form of Notice of Restricted Stock Award and related terms and conditions pursuant to the Veeco 2010 Stock Incentive Plan, effective March 2019 (time-based version B)</span></a>.</p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10-Q</p></td><td style="vertical-align:top;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">&#160;</p></td><td style="vertical-align:top;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.3</p></td><td style="vertical-align:top;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">&#160;</p></td><td style="vertical-align:top;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">5/7/2019</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.18*</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="https://www.sec.gov/Archives/edgar/data/103145/000155837021001358/veco-20201231xex10d16.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Form of Notice of Performance Restricted Stock Unit Award and related terms and conditions pursuant to the Veeco 2019 Stock Incentive Plan, effective March 2020.</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10-K</p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10.16</p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">2/22/2021</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr></table></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">46</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:-0.0978775%;padding-left:0pt;padding-right:0pt;table-layout:auto;width:100%;"><tr style="height:1pt;"><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:8.47%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.69%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:43.44%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.65%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:8.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.63%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:10.22%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.96%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:10.36%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.86%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:9.92%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"></div></div></th></tr><tr><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Filed&#160;or</b></p></th></tr><tr><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Exhibit</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th colspan="5" style="font-weight:normal;text-align:left;vertical-align:bottom;width:32.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Incorporated&#160;by&#160;Reference</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.86%;border-bottom:1px solid transparent;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:9.92%;border-bottom:1px solid transparent;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Furnished</b></p></th></tr><tr><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:8.47%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Number</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.69%;border-bottom:1px solid transparent;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:43.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Exhibit&#160;Description</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.65%;border-bottom:1px solid transparent;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:8.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Form</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.63%;border-bottom:1px solid transparent;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:10.22%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Exhibit</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.96%;border-bottom:1px solid transparent;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:10.36%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Filing&#160;Date</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.86%;border-bottom:1px solid transparent;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:9.92%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Herewith</b></p></th></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.19*</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="https://www.sec.gov/Archives/edgar/data/103145/000155837021001358/veco-20201231xex10d17.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Form of Notice of Restricted Stock Award and related terms and conditions pursuant to the Veeco 2019 Stock Incentive Plan, effective March 2020.</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10-K</p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10.17</p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">2/22/2021</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.20*</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;" href="https://www.sec.gov/Archives/edgar/data/103145/000155837021005719/veco-20210331xex10d1.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Form of Notice of Performance Restricted Stock Unit Award and related terms and conditions pursuant to the Veeco 2019 Stock Incentive Plan, effective March 2021.</span></a> </p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10-Q</p></td><td style="vertical-align:top;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10.1</p></td><td style="vertical-align:top;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">5/4/2021</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.21*</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;" href="https://www.sec.gov/Archives/edgar/data/103145/000155837021005719/veco-20210331xex10d2.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Form of Notice of Restricted Stock Award and related terms and conditions pursuant to the Veeco 2019 Stock Incentive Plan, effective March 2021</span></a>.</p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10-Q</p></td><td style="vertical-align:top;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10.2</p></td><td style="vertical-align:top;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">5/4/2021</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.22*</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="https://www.sec.gov/Archives/edgar/data/103145/000155837022007845/veco-20220331xex10d1.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Form&#160;of Notice of Performance Restricted Stock Unit Award and related terms and conditions pursuant to the Veeco 2019 Stock Incentive Plan, effective March&#160;2022.</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10-Q</p></td><td style="vertical-align:top;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10.1</p></td><td style="vertical-align:top;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">5/9/2022</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.23*</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="https://www.sec.gov/Archives/edgar/data/103145/000155837022007845/veco-20220331xex10d2.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Form&#160;of Notice of Restricted Stock Award and related terms and conditions pursuant to the Veeco 2019 Stock Incentive Plan, effective March&#160;2022.</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10-Q</p></td><td style="vertical-align:top;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10.2</p></td><td style="vertical-align:top;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">5/9/2022</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.24*</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;" href="https://www.sec.gov/Archives/edgar/data/103145/000110465913080263/a13-21652_1ex10d1.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Veeco 2013 Inducement Stock Incentive Plan, effective September 26, 2013</span></a>.</p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10-Q</p></td><td style="vertical-align:top;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10.1</p></td><td style="vertical-align:top;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">11/4/2013</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.25*</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;" href="https://www.sec.gov/Archives/edgar/data/103145/000110465916125106/a16-12597_1ex10d9.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Veeco Instruments Inc. 2016 Employee Stock Purchase Plan</span></a>.</p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">S-8</p></td><td style="vertical-align:top;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10.9</p></td><td style="vertical-align:top;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">6/2/2016</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.26*</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="https://www.sec.gov/Archives/edgar/data/0000103145/000155837019004295/ex-10d11.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">First Amendment to Veeco Instruments Inc. 2016 Employee Stock Purchase Plan.</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">S-8</p></td><td style="vertical-align:top;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10.11</p></td><td style="vertical-align:top;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">5/7/2019</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.27*</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;" href="https://www.sec.gov/Archives/edgar/data/0000103145/000110465921064525/tm2115964d1_ex10-1.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Second Amendment to Veeco Instruments Inc. 2016 Employee Stock Purchase Plan</span></a>.</p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">S-8</p></td><td style="vertical-align:top;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10.1</p></td><td style="vertical-align:top;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">5/11/2021</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.28*</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="http://www.sec.gov/Archives/edgar/data/103145/000110465917049341/a17-13339_1ex10d2.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Form&#160;of Amended and Restated Indemnification Agreement entered into between Veeco and each of its directors and executive officers (August&#160;2017).</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10-Q</p></td><td style="vertical-align:top;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.2</p></td><td style="vertical-align:top;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">8/3/2017</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.29*</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="http://www.sec.gov/Archives/edgar/data/103145/000110465914014824/a14-4581_1ex10d22.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Veeco Amended and Restated Senior Executive Change in Control Policy, effective as of January&#160;1, 2014.</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10-K</p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.22</p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">2/28/2014</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.30*</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="http://www.sec.gov/Archives/edgar/data/103145/000104746912001286/a2207410zex-10_30.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Letter Agreement dated January 30, 2012 between Veeco and Dr. William J. Miller.</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10-K</p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10.30</p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">2/22/2012</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.31*</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;" href="http://www.sec.gov/Archives/edgar/data/103145/000110465918055060/a18-24158_1ex10d2.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Letter Agreement dated August 29, 2018 between Veeco and Dr. William J. Miller.</span></a> </p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">8-K</p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10.2</p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">9/4/2018</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.32*</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"> <span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="http://www.sec.gov/Archives/edgar/data/103145/000155837019004101/veco-20190331ex104d337f0.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Amendment dated March 22, 2019 to the Letter Agreement between Veeco and William J. Miller, Ph.D.</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10-Q</p></td><td style="vertical-align:top;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.4</p></td><td style="vertical-align:top;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"> <span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">5/7/2019</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.33*</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="http://www.sec.gov/Archives/edgar/data/103145/000104746904007698/a2130460zex-10_38.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Letter Agreement dated January&#160;21, 2004 between Veeco and John P. Kiernan.</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10-K</p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10.38</p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">3/12/2004</p></td><td style="vertical-align:middle;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.34*</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="http://www.sec.gov/Archives/edgar/data/103145/000110465906051519/a06-15642_1ex10d3.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Amendment effective June&#160;9, 2006 to Letter Agreement between Veeco and John P. Kiernan.</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10-Q</p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10.3</p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">8/4/2006</p></td><td style="vertical-align:middle;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.35*</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="http://www.sec.gov/Archives/edgar/data/103145/000104746909002094/a2191098zex-10_40.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Amendment effective December&#160;31, 2008 to Letter Agreement between Veeco and John P. Kiernan.</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10-K</p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10.40</p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">3/2/2009</p></td><td style="vertical-align:middle;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.36*</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"> <span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;" href="http://www.sec.gov/Archives/edgar/data/103145/000110465920000110/tm1928325d1_ex99-2.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Letter dated January 1, 2020 from Veeco to John P. Kiernan.</span></a><span style="white-space:pre-wrap;">   </span></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">8-K</p></td><td style="vertical-align:top;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">99.2</p></td><td style="vertical-align:top;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">1/2/2020</p></td><td style="vertical-align:top;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;"> <span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.37*</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="https://www.sec.gov/Archives/edgar/data/103145/000155837021001358/veco-20201231xex10d30.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Letter Agreement dated March 20, 2019 between Veeco and Adrian Devasahayam.</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10-K</p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10.30</p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">2/22/2021</p></td><td style="vertical-align:middle;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.38*</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="https://www.sec.gov/Archives/edgar/data/103145/000155837021001358/veco-20201231xex10d31.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Letter Agreement dated August 4, 2017 between Veeco and Peter Porshnev.</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10-K</p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10.31</p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">2/22/2021</p></td><td style="vertical-align:middle;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr></table></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">47</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;min-height:12.65pt;"><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:-0.0978775%;padding-left:0pt;padding-right:0pt;table-layout:auto;width:100%;"><tr style="height:1pt;"><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:8.47%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.69%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:43.44%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.65%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:8.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.63%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:10.22%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.96%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:10.36%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.86%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:9.92%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"></div></div></th></tr><tr><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Filed&#160;or</b></p></th></tr><tr><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Exhibit</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th colspan="5" style="font-weight:normal;text-align:left;vertical-align:bottom;width:32.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Incorporated&#160;by&#160;Reference</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.86%;border-bottom:1px solid transparent;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:9.92%;border-bottom:1px solid transparent;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Furnished</b></p></th></tr><tr><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:8.47%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Number</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.69%;border-bottom:1px solid transparent;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:43.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Exhibit&#160;Description</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.65%;border-bottom:1px solid transparent;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:8.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Form</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.63%;border-bottom:1px solid transparent;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:10.22%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Exhibit</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.96%;border-bottom:1px solid transparent;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:10.36%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Filing&#160;Date</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:1.86%;border-bottom:1px solid transparent;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:9.92%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Herewith</b></p></th></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">10.39*</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="https://www.sec.gov/Archives/edgar/data/103145/000155837021001358/veco-20201231xex10d32.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Letter Agreement dated March 9, 2020 between Veeco and Susan Wilkerson.</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10-K</p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">10.32</p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">2/22/2021</p></td><td style="vertical-align:middle;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">21.1</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="veco-20221231xex21d1.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Subsidiaries of the Registrant.</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">X</p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">23.1</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="veco-20221231xex23d1.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Consent of KPMG LLP.</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">X</p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">31.1</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="veco-20221231xex31d1.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Certification of Chief Executive Officer pursuant to Rule&#160;13a&#8212;14(a)&#160;or Rule&#160;15d&#8212;14(a)&#160;of the Securities and Exchange Act of 1934.</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">X</p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">31.2</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;" href="veco-20221231xex31d2.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Certification of Chief Financial Officer pursuant to Rule&#160;13a&#8212;14(a)&#160;or Rule&#160;15d&#8212;14(a)&#160;of the</span></a> <a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;" href="veco-20221231xex31d2.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Securities and Exchange Act of 1934.</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">X</p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">32.1</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="veco-20221231xex32d1.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Certification of Chief Executive Officer pursuant to 18 U.S.C. Section&#160;1350, as adopted pursuant to Section&#160;906 of the Sarbanes - Oxley Act of 2002.</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">X</p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">32.2</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;font-size:10pt;" href="veco-20221231xex32d2.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Certification of Chief Financial Officer pursuant to 18 U.S.C. Section&#160;1350, as adopted pursuant to Section&#160;906 of the Sarbanes - Oxley Act of 2002.</span></a></p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">X</p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">101.INS</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">XBRL Instance Document &#8211; the instance document does not appear in the Interactive Data File because its XBRL tags are embedded within the Inline. XBRL document.</p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">**</p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">101.XSD</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">XBRL Schema.</p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">**</p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">101.PRE</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">XBRL Presentation.</p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">**</p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">101.CAL</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">XBRL Calculation.</p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">**</p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">101.DEF</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">XBRL Definition.</p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">**</p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">101.LAB</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">XBRL Label.</p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">**</p></td></tr><tr><td style="vertical-align:top;width:8.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-align:center;text-indent:-7.2pt;margin:0pt;">104</p></td><td style="vertical-align:top;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:43.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Cover Page Interactive Data File (formatted as Inline XBRL and contained in Exhibit 101).</p></td><td style="vertical-align:top;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:8.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:10.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:1.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:9.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">**</p></td></tr></table><div style="font-family:'Times New Roman','Times','serif';font-size:11.0pt;margin-bottom:0pt;margin-top:0pt;min-height:1.19em;position:relative;width:100%;"><div style="background-color:#000000;height:1pt;position:relative;top:0.6em;width:25.0%;border:none;margin:0 auto 0 0;"></div></div><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:18pt;text-indent:-18pt;margin:0pt;">*&#160;&#160;&#160;&#160;Indicates a management contract or compensatory plan or arrangement, as required by Item 15(a)&#160;(3)&#160;of Form&#160;10-K.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:18pt;text-indent:-18pt;margin:0pt;">**&#160;&#160;Filed herewith electronically</p><a id="_f174e37f_e7b8_4107_8135_9cdea0e2ad63"></a><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">48</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="SIGNATURES_944298"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">SIGNATURES</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Pursuant to the requirements of Section&#160;13 or 15(d)&#160;of the Securities Exchange Act of 1934, as amended, the Registrant has duly caused this report to be signed on its behalf by the undersigned, thereunto duly authorized, on February&#160;22, 2023.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:top;width:4.16%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:top;width:45.83%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Veeco Instruments Inc.</p></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:4.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:45.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:4.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">By:</p></td><td style="vertical-align:top;width:45.83%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">/s/ WILLIAM J. MILLER, Ph.D.</p></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:4.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:45.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">William J. Miller, Ph.D.</p></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:4.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:45.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><i style="font-style:italic;">Chief Executive Officer</i></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Pursuant to the requirements of the Securities Exchange Act of 1934, as amended, this report has been signed below by the following persons on behalf of the Registrant and in the capacities indicated, on February&#160;22, 2023.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:top;width:47.3%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"></div></div></td><td style="vertical-align:top;width:2.69%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"></div></div></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"></div></div></td></tr><tr><td style="vertical-align:top;width:47.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Signature</b></p></td><td style="vertical-align:top;width:2.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:top;width:50%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Title</b></p></td></tr><tr><td style="vertical-align:top;width:47.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:2.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:47.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;">/s/ WILLIAM J. MILLER, Ph.D.</p></td><td style="vertical-align:top;width:2.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Chief Executive Officer and Director</p></td></tr><tr><td style="vertical-align:top;width:47.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt 0pt 0pt 12.25pt;">William J. Miller, Ph.D.</p></td><td style="vertical-align:top;width:2.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">(principal executive officer)</p></td></tr><tr><td style="vertical-align:top;width:47.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:2.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr style="height:12.25pt;"><td style="vertical-align:bottom;width:47.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;">/s/ JOHN P. KIERNAN</p></td><td style="vertical-align:top;width:2.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Senior Vice President and Chief Financial Officer</p></td></tr><tr><td style="vertical-align:top;width:47.3%;border-top:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt 0pt 0pt 12.25pt;">John P. Kiernan</p></td><td style="vertical-align:top;width:2.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">(principal financial &amp; accounting officer)</p></td></tr><tr><td style="vertical-align:top;width:47.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt 0pt 0pt 12.25pt;"><span style="font-size:10pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:2.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:47.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;">/s/ RICHARD A. D&#8217;AMORE</p></td><td style="vertical-align:top;width:2.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Chairman</p></td></tr><tr><td style="vertical-align:top;width:47.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt 0pt 0pt 12.25pt;">Richard A. D&#8217;Amore</p></td><td style="vertical-align:top;width:2.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:47.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:2.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:47.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;">/s/ KATHLEEN A. BAYLESS</p></td><td style="vertical-align:top;width:2.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Director</p></td></tr><tr><td style="vertical-align:top;width:47.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt 0pt 0pt 12.25pt;">Kathleen A. Bayless</p></td><td style="vertical-align:top;width:2.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:47.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-bottom:1pt;border-bottom:1px solid #000000;margin:0pt;"><span style="white-space:pre-wrap;">/s/ SUJEET CHAND, Ph.D.                                                         </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">     Sujeet Chand, Ph.D.</span></p></td><td style="vertical-align:top;width:2.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Director</p></td></tr><tr><td style="vertical-align:top;width:47.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:2.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:47.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;">/s/ GORDON HUNTER</p></td><td style="vertical-align:top;width:2.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Director</p></td></tr><tr><td style="vertical-align:top;width:47.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt 0pt 0pt 12.25pt;">Gordon Hunter</p></td><td style="vertical-align:top;width:2.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:47.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:2.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:47.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;">/s/ KEITH D. JACKSON</p></td><td style="vertical-align:top;width:2.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Director</p></td></tr><tr><td style="vertical-align:top;width:47.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt 0pt 0pt 12.25pt;">Keith D. Jackson</p></td><td style="vertical-align:top;width:2.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:47.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:2.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:47.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;">/s/ LENA NICOLAIDES, Ph.D.</p></td><td style="vertical-align:top;width:2.69%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Director</p></td></tr><tr><td style="vertical-align:top;width:47.3%;border-top:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;"><span style="white-space:pre-wrap;">     Lena Nicolaides, Ph.D.</span></p></td><td style="vertical-align:top;width:2.69%;border-top:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:47.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:2.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:47.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;">/s/ MARY JANE RAYMOND</p></td><td style="vertical-align:top;width:2.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Director</p></td></tr><tr><td style="vertical-align:top;width:47.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt 0pt 0pt 12.25pt;">Mary Jane Raymond</p></td><td style="vertical-align:top;width:2.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:47.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:2.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:47.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;">/s/ PETER J. SIMONE</p></td><td style="vertical-align:top;width:2.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Director</p></td></tr><tr><td style="vertical-align:top;width:47.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt 0pt 0pt 12.25pt;">Peter J. Simone</p></td><td style="vertical-align:top;width:2.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:47.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:2.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:47.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;">/s/ THOMAS ST. DENNIS</p></td><td style="vertical-align:top;width:2.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Director</p></td></tr><tr><td style="vertical-align:top;width:47.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt 0pt 0pt 12.25pt;">Thomas St. Dennis</p></td><td style="vertical-align:top;width:2.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 10pt 0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="display:none;font-size:12pt;line-height:0pt;margin:0pt 0pt 10pt 0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:0pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:24pt 0pt 0pt 0pt;"><span style="font-size:10pt;">49</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="_5e8d2498_e628_49be_8ca8_7017eff0e4b8"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Veeco Instruments Inc. and Subsidiaries</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Index to Consolidated Financial Statements and Financial Statement Schedule</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr><td style="vertical-align:bottom;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:4.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Page</b></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;"><a style="font-size:10pt;" href="#REPORTOFINDEPENDENT_45553"><span style="font-style:normal;font-weight:normal;">Report of Independent Registered Public Accounting Firm</span></a><span style="font-size:10pt;"> (PCAOB ID</span><span style="font-size:8pt;"> </span><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="dei:AuditorFirmId" id="Narr_PPtrbdjtY0Kx4WA1ojtL4A"><span style="font-size:10pt;">185</span></ix:nonNumeric><span style="font-size:10pt;">)</span></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">F-2</p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;"><a style="font-size:10pt;" href="#ConsolidatedBalanceSheets_50095"><span style="font-style:normal;font-weight:normal;">Consolidated Balance Sheets at December 31, 2022 and 2021</span></a></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">F-4</p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;"><a style="font-size:10pt;" href="#StatementsofOperations_198983"><span style="font-style:normal;font-weight:normal;">Consolidated Statements of Operations for the years ended December&#160;31, 2022, 2021, and 2020</span></a></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">F-5</p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;"><a style="font-size:10pt;" href="#ComprehensiveIncomeLoss_794066"><span style="font-style:normal;font-weight:normal;">Consolidated Statements of Comprehensive Income (Loss) for the years ended December&#160;31, 2022, 2021, and 2020</span></a></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">F-6</p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;"><a style="font-size:10pt;" href="#StockholdersEquity_323287"><span style="font-style:normal;font-weight:normal;">Consolidated Statements of Stockholders&#8217; Equity for the years ended December&#160;31, 2022, 2021, and 2020</span></a></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">F-7</p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;"><a style="font-size:10pt;" href="#CashFlows_488340"><span style="font-style:normal;font-weight:normal;">Consolidated Statements of Cash Flows for the years ended December&#160;31, 2022, 2021, and 2020</span></a></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">F-8</p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;"><a style="font-size:10pt;" href="#Note1SignificantAccountingPolicies_23831"><span style="font-style:normal;font-weight:normal;">Notes to Consolidated Financial Statements</span></a></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">F-9</p></td></tr><tr><td style="vertical-align:top;width:95.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;"><a style="font-size:10pt;" href="#ScheduleiivaluationAndQualifyingA_003634"><span style="font-style:normal;font-weight:normal;">Schedule II&#8212;Valuation and Qualifying Accounts</span></a></p></td><td style="vertical-align:bottom;width:4.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">S-1</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-1</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="_1bb33c0b_1181_48aa_b06a_dae2fecd761f"></a><a id="REPORTOFINDEPENDENT_45553"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Report of Independent Registered Public Accounting F</b><b style="font-weight:bold;">irm</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:6pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">To the Stockholders and Board of Directors</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Veeco Instruments Inc.:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:6pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Opinion on the Consolidated Financial Statements</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;visibility:hidden;">&#8203;</span></p><a id="_0"></a><a id="_1"></a><a id="_2"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We have audited the accompanying consolidated balance sheets of Veeco Instruments Inc.&#160;and subsidiaries (the Company) as of December&#160;31,&#160;2022 and December 31, 2021, the related consolidated statements of operations, comprehensive income (loss), stockholders&#8217; equity, and cash flows for each of the years in the three-year period ended December&#160;31,&#160;2022, and the related notes and financial statement schedule II - valuation and qualifying accounts (collectively, the consolidated financial statements).&#160;In our opinion, the consolidated financial statements present fairly, in all material respects, the financial position of the Company as of December&#160;31,&#160;2022 and December 31, 2021, and the results of its operations and its cash flows for each of the years in the three-year period ended December&#160;31,&#160;2022, in conformity with U.S. generally accepted accounting principles.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;visibility:hidden;">&#8203;</span></p><a id="_3"></a><a id="_4"></a><a id="_5"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We also have audited, in accordance with the standards of the Public Company Accounting Oversight Board (United States) (PCAOB), the Company&#8217;s internal control over financial reporting as of December&#160;31,&#160;2022, based on&#160;criteria established in Internal Control &#8211; Integrated Framework (2013) issued by the Committee of Sponsoring Organizations of the Treadway Commission, and our report dated February&#160;22,&#160;2023 expressed an unqualified opinion on the effectiveness of the Company&#8217;s internal control over financial reporting.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:6pt;font-style:italic;visibility:hidden;">&#8203;</span></p><div style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-left:0pt;margin-top:0pt;text-indent:0pt;"><i style="font-size:10pt;font-style:italic;">Change in Accounting Principle</i></div><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-style:italic;visibility:hidden;">&#8203;</span></p><a id="_6"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">As discussed in Note 1 to the consolidated financial statements, the Company has changed its method of accounting for the covertible senior notes as of January 1, 2022 due to the adoption of Accounting Standards Update No. 2020-06: Debt &#8211; Debt with Conversion and Other Options (Subtopic 470-20) and Derivatives and Hedging &#8211; Contracts in Entity&#8217;s Own Equity (Subtopic 815-40): Accounting for Convertible Instruments and Contracts in an Entity&#8217;s Own Equity, using the modified retrospective method.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-style:italic;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Basis for Opinion</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">These consolidated financial statements are the responsibility of the Company&#8217;s management. Our responsibility is to express an opinion on these consolidated financial statements based on our audits. We are a public accounting firm registered with the PCAOB and are required to be independent with respect to the Company in accordance with the U.S. federal securities laws and the applicable rules and regulations of the Securities and Exchange Commission and the PCAOB.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We conducted our audits in accordance with the standards of the PCAOB. Those standards require that we plan and perform the audit to obtain reasonable assurance about whether the consolidated financial statements are free of material misstatement, whether due to error or fraud. Our audits included performing procedures to assess the risks of material misstatement of the consolidated financial statements, whether due to error or fraud, and performing procedures that respond to those risks. Such procedures included examining, on a test basis, evidence regarding the amounts and disclosures in the consolidated financial statements. Our audits also included evaluating the accounting principles used and significant estimates made by management, as well as evaluating the overall presentation of the consolidated financial statements. We believe that our audits provide a reasonable basis for our opinion.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-style:italic;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Critical Audit Matters</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The critical audit matters communicated below are matters arising from the current period audit of the consolidated financial statements that were communicated or required to be communicated to the audit committee and that: (1) relate to accounts or disclosures that are material to the consolidated financial statements and (2) involved our especially challenging, subjective, or complex judgments. The communication of critical audit matters does not alter in any way our opinion on the consolidated financial statements, taken as a whole, and we are not, by communicating the critical audit matters below, providing separate opinions on the critical audit matters or on the accounts or disclosures to which they relate.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-2</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Assessment of the value of excess and obsolete inventory</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">As discussed in Note 1 of the consolidated financial statements, the Company assesses the valuation of its inventories, including materials, work-in-process, and finished goods, each reporting period. Obsolete inventory or inventory in excess of the Company&#8217;s estimated usage requirement is written down to its estimated net realizable value if less than cost. Estimates of usage include the Company&#8217;s analysis of anticipated demand, possible alternative uses of its inventory, as well as other qualitative factors. As of December 31, 2022, the Company&#8217;s inventories totaled $206.9 million.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We identified the assessment of the value of excess and obsolete inventory as a critical audit matter. Subjective auditor judgement was required to evaluate the Company&#8217;s estimates of anticipated demand, which can be affected by market and economic conditions outside the Company&#8217;s control.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The following are the primary procedures we performed to address this critical audit matter. We evaluated the design and tested the operating effectiveness of certain internal controls related to the Company&#8217;s inventory valuation process. This included controls related to the development of estimates of anticipated demand of inventory. We evaluated current year estimates of anticipated demand used to assess the value of excess and obsolete inventory when they differed significantly from historical sales volumes. For certain inventory items, we compared the prior year estimate of anticipated demand to actual results to assess the Company&#8217;s ability to accurately forecast.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Evaluation of the realizability of domestic deferred tax assets</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-indent:9pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">As discussed in Note 1 and 15 to the consolidated financial statements, deferred tax assets and liabilities are recognized for the future tax consequences attributable to differences between the financial statement carrying amounts of existing assets and liabilities and their respective tax bases and operating loss and tax credit carryforwards. A valuation allowance is provided for deferred tax assets if it is more likely than not that these items will not be realized, which is dependent upon the generation of future taxable income. As of December 31, 2022, the Company had deferred tax assets before valuation allowances of $143.2 million.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We identified the evaluation of the realizability of the domestic deferred tax assets as a critical audit matter. The evaluation of the realizability of domestic deferred tax assets required subjective auditor judgment to assess the projections of future taxable income, including projected revenue growth rates, over the periods in which those deferred tax assets will be utilized. We performed a sensitivity analysis to determine&#160;the assumptions used in the Company&#8217;s forecast of projected future taxable income, including projected revenue growth rates, that have a significant impact on utilization of the domestic deferred tax assets.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The following are the primary procedures we performed to address this critical audit matter. We evaluated the design and tested the operating effectiveness of certain internal controls related to assessing the realizability of domestic deferred tax assets, which included controls related to the Company&#39;s evaluation of assumptions used to estimate projected revenue growth rates and projected future taxable income. We evaluated management&#8217;s projections of revenue growth rates by comparing them to (i) historical growth for certain product lines, (ii) industry data and economic trends, and (iii) known customer orders. We also assessed the Company&#8217;s ability to project future revenue growth rates by comparing previous annual projections to actual results. We evaluated management&#8217;s projections of future taxable income by comparing them to (i) recent financial profitability trends of the Company and (ii) industry data and economic trends. We assessed the Company&#8217;s ability to project future taxable income by comparing previous annual projections to actual results. We also performed a sensitivity analysis over the amount and timing of future taxable income to assess the impact on utilization of the domestic deferred tax assets.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">/s/ </span><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="dei:AuditorName" id="Narr_ubP-CNJIdEiechOdqkJm0A"><span style="font-size:10pt;">KPMG LLP</span></ix:nonNumeric></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We have served as the Company&#8217;s auditor since 2015.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="dei:AuditorLocation" id="Narr_HrcdDJRTQ0Cv71GvTkRh4Q"><span style="font-size:10pt;">Santa Clara, California</span></ix:nonNumeric></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">February&#160;22, 2023</p><p style="display:none;font-size:12pt;line-height:0pt;margin:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:0pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-3</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="_0bcc6717_ecd5_41f6_9b96_cc466bcee679"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Veeco Instruments Inc. and Subsidiaries</b></p><a id="ConsolidatedBalanceSheets_50095"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Consolidated Balance Sheets </b></p><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in thousands, except share amounts)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="_b85bde41_9d4e_44ff_8b01_492828f70e84"></a><a id="Tc_s8JFe5jTuU-Xz-ra1TFljg_1_2"></a><a id="Tc__Hz5AutkMUa7ObIXwyYjXA_1_5"></a><a id="Tc_hz7xJmeYSkCB-bL-T-VzQw_2_2"></a><a id="Tc_BZYfi6yzSkeYMl3Kr3cJqg_2_5"></a><a id="Tc_76icVZMC50GP1LAGh0e7Zg_3_0"></a><a id="Tc_C1kF7jZS50a6nknTmx1HdQ_4_0"></a><a id="Tc_bdYyOi9UGEODSK57EIXgDw_5_0"></a><a id="Tc_HILqWeJQk0GQ8o5ztzaN-Q_5_2"></a><a id="Tc_dAcFODbfHUWtqbY_cSa7PA_5_5"></a><a id="Tc_K1irmuStKkCvJFeXb-zgkQ_6_0"></a><a id="Tc_DiC2vWwg-kyR82bMzTwE2g_7_0"></a><a id="Tc__HP7L-T9wEm4OLfeBUykHw_8_0"></a><a id="Tc_SZ-EC3lNLESZJHntAjsjUQ_9_0"></a><a id="Tc_wS2bC32mZ0O-OMgzjH9sHw_10_0"></a><a id="Tc_7sUF48FNREW5BOKliCfM2g_11_0"></a><a id="Tc_-PMWDSQU20eeYEUtyCxxzg_12_0"></a><a id="Tc_oMJ9c8ychESBIIVQ3Fmbcw_13_0"></a><a id="Tc_6OQD9EN9HkOLEITfohOKOw_14_0"></a><a id="Tc_T6C5jALHZUG0_4Jyv0_aOw_15_0"></a><a id="Tc_irEB2VVBXkipU39deXQCiQ_16_0"></a><a id="Tc_bmFo3SMKVUuan3GlPHEn-Q_17_0"></a><a id="Tc_5kWSsVGkFU6jgzMe69jP6g_18_0"></a><a id="Tc_-fax4oqdAk6Fm1CUjoNoew_19_0"></a><a id="Tc_j0YP0ob_s0uHsFZXfyGQPA_19_2"></a><a id="Tc_DbguT8fnBEmtDn2t73l_Gw_19_5"></a><a id="Tc_lg6-QqBXZE2guxcBq4szkg_21_0"></a><a id="Tc_01R8v5uODEOIUEnZHB4EGg_22_0"></a><a id="Tc_MEtzxSeldkCRPpOiTLD0NQ_23_0"></a><a id="Tc_DclJVrCjU0mC6GAUFrgGCw_23_2"></a><a id="Tc_Ba0E5S8DV0CwWRvKzZ-Ecw_23_5"></a><a id="Tc_xrKj5ircWUOgL_vab4-jEw_24_0"></a><a id="Tc_jwRWANumxkyoRRg9LFlPRQ_25_0"></a><a id="Tc__N0fNIsTdkipHjXpvQ1C-A_26_0"></a><a id="Tc_FO4uhIbus0OFyTbVvEOYRw_27_0"></a><a id="Tc_h5U0bm8Ew02SAjUeE4AIUg_27_6"></a><a id="Tc_MXVZhM5NBUWk8EaserdLpw_28_0"></a><a id="Tc_FcswLdpjSEObxRAPl4Eq9Q_29_0"></a><a id="Tc_PFflRnSYg0GdhEenhIUjhg_30_0"></a><a id="Tc_h1r7_2VJ6Ue0IGSHgyiNxw_31_0"></a><a id="Tc_L9IWF8Cw_0aDJHid421y8Q_32_0"></a><a id="Tc_ERY3e8i3E06PbJQyjp6_Bg_33_0"></a><a id="Tc_tCY_v9XBIEC0FsGbOmCcSg_34_0"></a><a id="Tc_6uOVzd-95Eix6r8mSU1WwQ_35_0"></a><a id="Tc_nNQYXD-x1UGln5vpWqzMqw_36_0"></a><a id="Tc_cxILKDp9cUmdNcXXYRCejQ_37_0"></a><a id="Tc_qz_y7pXJwUmWuN1WTQZRUQ_38_0"></a><a id="Tc_0XQRR7eu2EiI99GhZCEk_A_39_0"></a><a id="Tc_pOLUK5_vC0Gn5sv6PjKFaw_40_0"></a><a id="Tc_3O5vk6XgkEuyWIDV8G1Y1A_41_0"></a><a id="Tc_AzF3E6qbqUCSqqmgchEoqw_41_2"></a><a id="Tc_Ji6qcAuR9ECzE1ABLZNp_w_41_5"></a><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:74.46%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:74.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:74.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.7%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.7%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td></tr><tr><td style="vertical-align:bottom;width:74.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Assets</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:74.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Current assets:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:74.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Cash and cash equivalents</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CashAndCashEquivalentsAtCarryingValue" scale="3" id="Tc_eX_mOG7s7kydIv2jYjEo2g_5_3">154,925</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CashAndCashEquivalentsAtCarryingValue" scale="3" id="Tc_gcIQcsUwcUG5JCD70RI-0Q_5_6">119,747</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:74.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Restricted cash</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RestrictedCashAndCashEquivalentsAtCarryingValue" scale="3" id="Tc_bcNozRIU6UCTDDe5TfLF6Q_6_3">547</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RestrictedCashAndCashEquivalentsAtCarryingValue" scale="3" id="Tc_IYVRPdasX0GDR0W6lA1hJQ_6_6">725</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:74.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Short-term investments</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AvailableForSaleSecuritiesDebtSecuritiesCurrent" scale="3" id="Tc_6RWNSqZWmEyHw8mVRnTtVA_7_3">147,488</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AvailableForSaleSecuritiesDebtSecuritiesCurrent" scale="3" id="Tc__WATZVEOcU6tS3gf5AC8RA_7_6">104,181</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:74.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Accounts receivable, net</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AccountsReceivableNetCurrent" scale="3" id="Tc_R1uC6O0_YU-0qOX1gROFSQ_8_3">124,221</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AccountsReceivableNetCurrent" scale="3" id="Tc_2FWqhRlG40aH4cg8iwbwYQ_8_6">109,609</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:74.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Contract assets</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:UnbilledContractsReceivable" scale="3" id="Tc_diHt74WANUqPmfyh5MJbTw_9_3">16,507</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:UnbilledContractsReceivable" scale="3" id="Tc_vXtvFJ5Bakq1z0-bL5MuFg_9_6">18,293</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:74.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Inventories</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InventoryNet" scale="3" id="Tc_Jg2YgeyRHEOGHiN6jETZAg_10_3">206,908</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InventoryNet" scale="3" id="Tc_R9JNLKMEbEOBPeZ5Ne0XdA_10_6">170,858</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:74.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Prepaid expenses and other current assets</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PrepaidExpenseAndOtherAssetsCurrent" scale="3" id="Tc_amol9U51EUe8CulMbbcOVA_11_3">18,305</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PrepaidExpenseAndOtherAssetsCurrent" scale="3" id="Tc_LFDI4S6GukeM02QcT16IJQ_11_6">25,974</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:74.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Total current assets</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AssetsCurrent" scale="3" id="Tc_SU6g0pGwTEuGs6coFZM4VQ_12_3">668,901</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AssetsCurrent" scale="3" id="Tc_RCrf6Y_0YkGGpE9pN_hU3A_12_6">549,387</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:74.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Property, plant, and equipment, net</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentNet" scale="3" id="Tc_X8BpAiwN506pZcqYD-u8Vg_13_3">107,281</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentNet" scale="3" id="Tc_eCL1GiO7G0upd0U3NvDUsQ_13_6">99,743</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:74.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Operating lease right-of-use assets</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseRightOfUseAsset" scale="3" id="Tc_Id6TdEryQEme6CJFsXEY4A_14_3">26,467</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseRightOfUseAsset" scale="3" id="Tc_TRPOOof9lkqDOi6uPoJWEQ_14_6">28,813</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:74.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Intangible assets, net</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FiniteLivedIntangibleAssetsNet" scale="3" id="Tc_fjBGhe40RECB6R6jwatKUw_15_3">23,887</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FiniteLivedIntangibleAssetsNet" scale="3" id="Tc_gdXhLv6PK02HEuHfqk2fHw_15_6">33,905</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:74.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Goodwill</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:Goodwill" scale="3" id="Tc_oMzvkaw6D0CApwOK75LCHw_16_3">181,943</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:Goodwill" scale="3" id="Tc_zj5alwVNv0asZ9GBez9hGg_16_6">181,943</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:74.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Deferred income taxes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredIncomeTaxAssetsNet" scale="3" id="Tc_5qHd_wmzRUSSk7QD2GN1yA_17_3">116,349</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredIncomeTaxAssetsNet" scale="3" id="Tc_Lo3WyGF5sU2b8q3rcKP3Nw_17_6">1,639</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:74.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Other assets</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherAssetsNoncurrent" scale="3" id="Tc_AG17VqxF2kS0c2c-tOKFDQ_18_3">3,355</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherAssetsNoncurrent" scale="3" id="Tc_hfuPKmzCEkebMofXmCdQxQ_18_6">3,546</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:74.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total assets</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:Assets" scale="3" id="Tc_5IM3NqG-OEeZyUp_Sl3GTQ_19_3">1,128,183</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:Assets" scale="3" id="Tc_9QQ2eAUIV0qFfYw6-m-NgA_19_6">898,976</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:74.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 18pt;"><span style="font-size:10pt;font-weight:bold;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:74.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Liabilities and stockholders&#39; equity</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:74.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Current liabilities:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:74.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Accounts payable</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AccountsPayableCurrent" scale="3" id="Tc_tR2IzBa2CU-pR_ecbK8w-w_23_3">52,049</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AccountsPayableCurrent" scale="3" id="Tc_Mb51UPyFEEClS05XQ3GI_Q_23_6">44,456</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:74.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Accrued expenses and other current liabilities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="veco:AccruedAndOtherLiabilitiesCurrent" scale="3" id="Tc_dBx6zWR_GkaeD7p_QDHgPA_24_3">56,031</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="veco:AccruedAndOtherLiabilitiesCurrent" scale="3" id="Tc_vXjGUH5gdUKySL8SZzZ1Hg_24_6">79,752</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:74.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Customer deposits and deferred revenue</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="veco:ContractWithCustomerLiabilityAndRefundLiabilityCurrent" scale="3" id="Tc_4j_os5IlJ0Sjmpnw1kJGpg_25_3">127,223</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="veco:ContractWithCustomerLiabilityAndRefundLiabilityCurrent" scale="3" id="Tc_NtKMamwCF0aJe5w0XRK19Q_25_6">63,136</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:74.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Income taxes payable</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AccruedIncomeTaxesCurrent" scale="3" id="Tc_AXWicZ1_7k663mbHcvcwNw_26_3">2,432</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AccruedIncomeTaxesCurrent" scale="3" id="Tc_SGNO55WtZUeq8zdZQdMyKg_26_6">1,860</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:74.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Current portion of long-term debt</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LongTermDebtCurrent" scale="3" id="Tc_10wukoszGEW3D0DRMo_AOw_27_3">20,169</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;width:74.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Total current liabilities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LiabilitiesCurrent" scale="3" id="Tc_Hbf2l0OlmEqG39c6kvf1Mg_28_3">257,904</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LiabilitiesCurrent" scale="3" id="Tc_VcY4y8bbrki2Twl2l8KdGA_28_6">189,204</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:74.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Deferred income taxes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredIncomeTaxLiabilitiesNet" scale="3" id="Tc_n6s5wQr-qEObvQjxX-AdMw_29_3">1,285</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredIncomeTaxLiabilitiesNet" scale="3" id="Tc_1lok153u_UiDfmvd-xvVVw_29_6">4,792</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:74.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Long-term debt</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LongTermDebtNoncurrent" scale="3" id="Tc_jJAknrM61kyLZbWvecpNEQ_30_3">254,491</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LongTermDebtNoncurrent" scale="3" id="Tc_yiH-NXLSHUyzzmSlm7zrWw_30_6">229,438</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:74.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Long-term operating lease liabilities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseLiabilityNoncurrent" scale="3" id="Tc_90tVmzQBTkmWmdZ4PODNlw_31_3">33,581</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseLiabilityNoncurrent" scale="3" id="Tc_MbkU_xjiBUCPoZZ5-mKtgA_31_6">32,834</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:74.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Other liabilities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherLiabilitiesNoncurrent" scale="3" id="Tc_phc96gRq2k6mjQyMfUKNSg_32_3">3,098</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherLiabilitiesNoncurrent" scale="3" id="Tc_x8OcWr6zVUSlPT3axkrLvA_32_6">5,080</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:74.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total liabilities</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:Liabilities" scale="3" id="Tc_r1sj_qQG6UuRI0uprGXryA_33_3">550,359</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:Liabilities" scale="3" id="Tc_hCTCjy9V7UG2_t4bEKCvjQ_33_6">461,348</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:74.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Stockholders&#39; equity:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:74.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Preferred stock, $<ix:nonFraction unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="INF" format="ixt:numdotdecimal" name="us-gaap:PreferredStockParOrStatedValuePerShare" scale="0" id="Narr_dBxijIApNE-ICeVXed8ZWw"><ix:nonFraction unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="INF" format="ixt:numdotdecimal" name="us-gaap:PreferredStockParOrStatedValuePerShare" scale="0" id="Narr_CZOQoC32dkOSITspGyy-2w">0.01</ix:nonFraction></ix:nonFraction> par value; <ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="INF" format="ixt:numdotdecimal" name="us-gaap:PreferredStockSharesAuthorized" scale="0" id="Narr_h2OkAakHfkmSVXqqc6WTLA"><ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="INF" format="ixt:numdotdecimal" name="us-gaap:PreferredStockSharesAuthorized" scale="0" id="Narr_EOE3t9ndpkaAHPPWYXuNGg">500,000</ix:nonFraction></ix:nonFraction> shares authorized; <ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="INF" format="ixt-sec:numwordsen" name="us-gaap:PreferredStockSharesOutstanding" scale="0" id="Narr_Huoq4Js_c0GcCEtPsnReUA"><ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="INF" format="ixt-sec:numwordsen" name="us-gaap:PreferredStockSharesOutstanding" scale="0" id="Narr_EAioLvn9n0GWq43znLdxbw"><ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="INF" format="ixt-sec:numwordsen" name="us-gaap:PreferredStockSharesIssued" scale="0" id="Narr_9J3wRFMvakyTnWfyuAjYUA"><ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="INF" format="ixt-sec:numwordsen" name="us-gaap:PreferredStockSharesIssued" scale="0" id="Narr_4TEpFVdpN027pa8F-VyiZQ">no</ix:nonFraction></ix:nonFraction></ix:nonFraction></ix:nonFraction> shares issued and outstanding.</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="-sec-ix-hidden:Hidden_rvjYzexRXUOQR20Zl1nBWw;"><span style="font-family:'Times New Roman','Times','serif';font-size:9pt;font-style:normal;font-weight:normal;"> &#8212;</span></span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="-sec-ix-hidden:Hidden_9P31eLujM0aTyQUmYP2zmw;"><span style="font-family:'Times New Roman','Times','serif';font-size:9pt;font-style:normal;font-weight:normal;"> &#8212;</span></span></p></td></tr><tr><td style="vertical-align:bottom;width:74.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Common stock, $<ix:nonFraction unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="INF" format="ixt:numdotdecimal" name="us-gaap:CommonStockParOrStatedValuePerShare" scale="0" id="Narr_ebvtvTrDSku4gNZ8MJojTg"><ix:nonFraction unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="INF" format="ixt:numdotdecimal" name="us-gaap:CommonStockParOrStatedValuePerShare" scale="0" id="Narr_g1oxDZ-jR0CHUO8SNVjIlQ">0.01</ix:nonFraction></ix:nonFraction> par value; <ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="INF" format="ixt:numdotdecimal" name="us-gaap:CommonStockSharesAuthorized" scale="0" id="Narr_E63OecbntUSmjQu6xDoZOA"><ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="INF" format="ixt:numdotdecimal" name="us-gaap:CommonStockSharesAuthorized" scale="0" id="Narr_2bd-kqVNikCalKZviQRaVg">120,000,000</ix:nonFraction></ix:nonFraction> shares authorized; <ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="INF" format="ixt:numdotdecimal" name="us-gaap:CommonStockSharesOutstanding" scale="0" id="Narr_1W6gmoPMy0y_UVhBoG_kaw"><ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="INF" format="ixt:numdotdecimal" name="us-gaap:CommonStockSharesIssued" scale="0" id="Narr_Z1WLyTI-v0utL_GI3zasyA">51,660,409</ix:nonFraction></ix:nonFraction> shares issued and outstanding at December&#160;31, 2022 and <ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="INF" format="ixt:numdotdecimal" name="us-gaap:CommonStockSharesOutstanding" scale="0" id="Narr_8zAItXFmAEqu9GwHc4HBoA"><ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="INF" format="ixt:numdotdecimal" name="us-gaap:CommonStockSharesIssued" scale="0" id="Narr_CXCkEHMFhkyF0ge-8bGv3A">50,652,864</ix:nonFraction></ix:nonFraction> shares issued and outstanding at December&#160;31, 2021</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CommonStockValue" scale="3" id="Tc_fAvy3WJ9ek-ZUQaHQ2VY0w_36_3">517</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CommonStockValue" scale="3" id="Tc_N-y6A4g-6U-mrIWh2oF3Zw_36_6">507</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:74.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Additional paid-in capital</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AdditionalPaidInCapitalCommonStock" scale="3" id="Tc_Q0IgV6_F_ky_ZvnQX3oMXA_37_3">1,078,180</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AdditionalPaidInCapitalCommonStock" scale="3" id="Tc_Rh8ZfOa69E6bB2NkfKxsXg_37_6">1,116,921</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:74.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Accumulated deficit</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RetainedEarningsAccumulatedDeficit" sign="-" scale="3" id="Tc_hWn4zc_HZUSTDgL0FSYhOw_38_3">501,801</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RetainedEarningsAccumulatedDeficit" sign="-" scale="3" id="Tc_qdDOJf4ZAUSE5A10dxhrtg_38_6">681,283</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:74.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Accumulated other comprehensive income</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AccumulatedOtherComprehensiveIncomeLossNetOfTax" scale="3" id="Tc_3chdTZWRPEOOHBhPleVY8Q_39_3">928</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AccumulatedOtherComprehensiveIncomeLossNetOfTax" scale="3" id="Tc_uk-wTpZTMU2_iVOqDXMHWA_39_6">1,483</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:74.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total stockholders&#39; equity</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_x4M9MKAzd0airFa25fX2iA_40_3">577,824</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_77ChyG0kJU2e0HWOvykVaw_40_6">437,628</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:74.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"><b style="font-weight:bold;">Total liabilities and stockholders&#39; equity</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LiabilitiesAndStockholdersEquity" scale="3" id="Tc_mCe-IwSbeU23MVNopdu8RQ_41_3">1,128,183</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.5%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LiabilitiesAndStockholdersEquity" scale="3" id="Tc_jUTTvgD0jUO19r2s7OBkKg_41_6">898,976</ix:nonFraction></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">See accompanying Notes to the Consolidated Financial Statements.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-4</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="_09eba5da_333b_4ce1_befa_f95549e8e46b"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Veeco Instruments&#160;Inc. and Subsidiaries</b></p><a id="StatementsofOperations_198983"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Consolidated Statements of Operations</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in thousands, except per share amounts)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="_b2aa4534_afa7_48c1_a68e_48db4338c75f"></a><a id="Tc_RsJfBsH_wk-wKasVSkNjJg_1_3"></a><a id="Tc_nWDYq6y1Xku-1xjSh5gL5g_2_3"></a><a id="Tc_gZ8cRkpumE6c1kcMPezc6Q_2_6"></a><a id="Tc_6Z9P8-dscEWrnSwwK-eXLQ_2_9"></a><a id="Tc_PhDYQSIF9kCUyjPYjLU1wA_3_0"></a><a id="Tc_Np9D4TF66k2A90YKcZzgew_3_3"></a><a id="Tc_oV5nhhvm_UueTlFUG7VjCg_3_6"></a><a id="Tc_NDcZDLPe50K0Q-fsy1egXg_3_9"></a><a id="Tc_1Wvw8nxwwEaKeudLuXAFAw_4_0"></a><a id="Tc_Szaf3b7DXEG3SIg_qwQ7Jg_5_0"></a><a id="Tc_bohUtt3xT0-w4gSrI-kdcQ_6_0"></a><a id="Tc_nNY42BHPa069U0iR5pV_qA_7_0"></a><a id="Tc_FWlAZaORTEiXqCdq85CA-w_8_0"></a><a id="Tc_71yP_cgaWU2KKH9NL_edRg_9_0"></a><a id="Tc_ws1vA806mUyor5tsrbfPeg_10_0"></a><a id="Tc_bRZlSLWgcEixnmgwbJZnNQ_10_4"></a><a id="Tc_CESosOW7_0yR2u7KyUnsDQ_10_7"></a><a id="Tc_146ZRyKFv0q92zvBYkuI-w_11_0"></a><a id="Tc_Rdx3h0U91kuYvNovi83Gqw_11_4"></a><a id="Tc_4SjybEiEtkmJHQMK_g8-fw_11_7"></a><a id="Tc_nhJiFJTyxkaQN10ISVW6vQ_12_0"></a><a id="Tc_zJIsjDUqHkyFdPdPIzNFMg_13_0"></a><a id="Tc_AUD9OsE4zk-1V-Hv5k9oag_14_0"></a><a id="Tc_p-_tsFDcqUi0cXJJVLaB-A_15_0"></a><a id="Tc_jBCT_IyCKEyuyvb0MguojA_16_0"></a><a id="Tc_Ya1Ll1CCl0CinPLisxM1AQ_17_0"></a><a id="Tc_Bu7fR0p0xEqtPWRcDPdgfw_17_4"></a><a id="Tc_x0N1vL4vjU2YA8F50Rwetg_18_0"></a><a id="Tc_K52U5CfnZ0-rjhG6rIYRFg_19_0"></a><a id="Tc_CB4Yq5oEKEO0-KLnD2RDZw_20_0"></a><a id="Tc_eXoaNN5CKUSAcVXlM3NF6A_20_3"></a><a id="Tc_fQN8j4iJFE2S9_MxpQt3nA_20_6"></a><a id="Tc_BlNHs_jeN06t5OdfylSoLw_20_9"></a><a id="Tc_j-GPDU2G4EiISK9gVAlgIQ_22_0"></a><a id="Tc_KT2eglCeA0CsRzCOkDxK3w_23_0"></a><a id="Tc_BFU50HIjP0K7RlHS4uJDsA_23_3"></a><a id="Tc_SHlUh5opyUy7DBj3_MQYVA_23_6"></a><a id="Tc_QoJwWLiokkS7A_qLB1TUTA_23_9"></a><a id="Tc_OrcWccpU_kiwYH7LI6yUFA_24_0"></a><a id="Tc_uooJuD2vdEmfTY7Zo22nBA_24_3"></a><a id="Tc_fcJak8jVpUKqvUhOsdkV5A_24_6"></a><a id="Tc_hpJfPA_GmkG9YSMai8oR_A_24_9"></a><a id="Tc_ja785yk_z06nCFu3W_Gj_w_26_0"></a><a id="Tc_evToJYhd8Eu2zYNEDZI_Tg_27_0"></a><a id="Tc_K-Mh0b6SKUmWwxOy3cNH3A_28_0"></a><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:54.24%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.87%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.69%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:54.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:39.99%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">For the year ended December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:54.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.38%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.38%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td></tr><tr><td style="vertical-align:bottom;width:54.24%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Net sales </p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.87%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax" scale="3" id="Tc_6uRSw3L4UUyUBns-m1Y0KA_3_4">646,137</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax" scale="3" id="Tc_BPKHITTyfku62Q7FiJpoeQ_3_7">583,277</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax" scale="3" id="Tc_SwhT_jPBMkqkMNUQ13vquA_3_10">454,163</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:54.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Cost of sales</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CostOfGoodsAndServicesSold" scale="3" id="Tc_wOgz7UsUREKgjI_hP3RmgA_4_4">382,989</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CostOfGoodsAndServicesSold" scale="3" id="Tc_NxC-GFVWdE2uyffw2ReQkA_4_7">341,003</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.69%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CostOfGoodsAndServicesSold" scale="3" id="Tc_Sy5JrPdsWEaI1rbL8IQ7dg_4_10">259,863</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:54.24%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Gross profit</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.87%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:GrossProfit" scale="3" id="Tc_gpdsEuuXrEC3WcbxUxenrw_5_4">263,148</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:GrossProfit" scale="3" id="Tc_kIjhpc8Hm0Kuy7sUPncWwg_5_7">242,274</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:GrossProfit" scale="3" id="Tc_7W3rsGFvJEq0aP6TCmJWhA_5_10">194,300</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:54.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Operating expenses, net:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:54.24%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Research and development</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.87%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ResearchAndDevelopmentExpense" scale="3" id="Tc_9TmEQM9d0UaXaUJyX97B5Q_7_4">103,565</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ResearchAndDevelopmentExpense" scale="3" id="Tc_iRhmuowoOEyhQJ02z6ocyQ_7_7">88,680</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ResearchAndDevelopmentExpense" scale="3" id="Tc_ZTwNefcZVUiHI1oCAQCL6Q_7_10">78,994</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:54.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Selling, general, and administrative</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:SellingGeneralAndAdministrativeExpense" scale="3" id="Tc_j3UfeKTcbEWfgr9j06hR9g_8_4">88,952</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:SellingGeneralAndAdministrativeExpense" scale="3" id="Tc_dMK6wy0PPUucMSbWeTUKDw_8_7">84,536</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:SellingGeneralAndAdministrativeExpense" scale="3" id="Tc_v7rZOrnx2EisM-tlxDeGfw_8_10">76,251</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:54.24%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Amortization of intangible assets</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.87%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AmortizationOfIntangibleAssets" scale="3" id="Tc_omP5jAQGrEWQyUGTv3JtyA_9_4">10,018</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AmortizationOfIntangibleAssets" scale="3" id="Tc_OAScWGdTg0KGjJigK-7cdA_9_7">12,280</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AmortizationOfIntangibleAssets" scale="3" id="Tc_dnS2grQFy02_c_zlZZin5w_9_10">15,333</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:54.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Restructuring</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RestructuringCharges" scale="3" id="Tc_ei1rOBh6Kk-ooRQ0Byvf9g_10_10">1,097</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:54.24%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Asset impairment</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.87%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AssetImpairmentCharges" scale="3" id="Tc_pRHrxMzm8kiwX67VTfmLZQ_11_10">281</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:54.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Other operating expense (income), net</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherOperatingIncomeExpenseNet" sign="-" scale="3" id="Tc_43KX_Y9TcEibJIkNyeWg-g_12_4">317</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherOperatingIncomeExpenseNet" sign="-" scale="3" id="Tc_UM72Mq9AiUm6BZgWA7dc0A_12_7">68</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.69%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherOperatingIncomeExpenseNet" scale="3" id="Tc_2QIz5wRykkeoIws0348T2A_12_10">221</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:54.24%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Total operating expenses, net</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.87%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingExpenses" scale="3" id="Tc_qCyj3-gyGEyVu5y957yQ2A_13_4">202,852</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingExpenses" scale="3" id="Tc_n1bNP1_lL0Svr30UBrVrdQ_13_7">185,564</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.69%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingExpenses" scale="3" id="Tc_PLPi6VrfQE-rKm05TzuZlg_13_10">171,735</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:54.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Operating income</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingIncomeLoss" scale="3" id="Tc_UfKr5JkXIUGzihpVez0IQw_14_4">60,296</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingIncomeLoss" scale="3" id="Tc_mn_orAb_c0mIRBJJMYKfEg_14_7">56,710</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingIncomeLoss" scale="3" id="Tc_Z2OpwO9UxEWoUbvbD7Z-9Q_14_10">22,565</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:54.24%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Interest income</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.87%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InvestmentIncomeInterest" scale="3" id="Tc_ZvB_Ax4ae06jxQfVJblCmQ_15_4">2,199</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InvestmentIncomeInterest" scale="3" id="Tc_D_UDnJpyl023NVSCAu_OZw_15_7">2,340</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InvestmentIncomeInterest" scale="3" id="Tc_lOcIji5iU0adA6yNk4SW_w_15_10">1,551</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:54.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Interest expense</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InterestExpense" scale="3" id="Tc_7EoC8WHvLkmWBzpctRrDdQ_16_4">11,510</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InterestExpense" scale="3" id="Tc_DxH37CwwU0-gAIABgmxZsg_16_7">28,360</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InterestExpense" scale="3" id="Tc_v7jFnO4qB0ySOHVDfSx14w_16_10">24,739</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:54.24%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Other income (expense), net</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.87%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherNonoperatingIncomeExpense" sign="-" scale="3" id="Tc_msSLhGNwC0aWBwzYDD7H_Q_17_7">5,010</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.69%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherNonoperatingIncomeExpense" sign="-" scale="3" id="Tc_ZyMk4xrLj0Gyk-k8L4Vb0Q_17_10">7,841</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:54.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Income before income taxes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" scale="3" id="Tc_YKZ2eQh_KkicgF8FLjVm1g_18_4">50,985</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" scale="3" id="Tc_ssj5iTNkOEynt5mt2sFbVA_18_7">25,680</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" sign="-" scale="3" id="Tc_dG1Gxosv7UOJuMgH1qYluw_18_10">8,464</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:54.24%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Income tax expense (benefit)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.87%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxExpenseBenefit" sign="-" scale="3" id="Tc_xCpcM5uB1k2p9hEBJ1JtkA_19_4">115,957</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxExpenseBenefit" sign="-" scale="3" id="Tc_q89TnMu83kmGOSps2j9XsQ_19_7">358</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.69%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxExpenseBenefit" sign="-" scale="3" id="Tc_sYyXlzf_XkKTu_8qx9v77Q_19_10">73</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:54.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Net income </p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetIncomeLoss" scale="3" id="Tc_rXpbYdrnMk28ya1MoUCYjg_20_4">166,942</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetIncomeLoss" scale="3" id="Tc_MgVyPYqW20Wc79IlGCHHqw_20_7">26,038</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.69%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetIncomeLoss" sign="-" scale="3" id="Tc_2BFqpqni0Empt5hik7biaQ_20_10">8,391</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:54.24%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.87%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:54.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Income per common share:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:54.24%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Basic</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.87%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="2" format="ixt:numdotdecimal" name="us-gaap:EarningsPerShareBasic" scale="0" id="Tc_B9retRyK8kqJhFGKStNuZg_23_4">3.35</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="2" format="ixt:numdotdecimal" name="us-gaap:EarningsPerShareBasic" scale="0" id="Tc_r7Hf75Jez02gUpw26P7Vlw_23_7">0.53</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="2" format="ixt:numdotdecimal" name="us-gaap:EarningsPerShareBasic" sign="-" scale="0" id="Tc_KNrMFq83xkSx_kz9F4anKQ_23_10">0.17</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:54.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Diluted </p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="2" format="ixt:numdotdecimal" name="us-gaap:EarningsPerShareDiluted" scale="0" id="Tc_W6nWqGT3TE-1wsGU-aQluw_24_4">2.71</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="2" format="ixt:numdotdecimal" name="us-gaap:EarningsPerShareDiluted" scale="0" id="Tc_MEC-COUA9E-khBoOqK5R-Q_24_7">0.49</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="2" format="ixt:numdotdecimal" name="us-gaap:EarningsPerShareDiluted" sign="-" scale="0" id="Tc_qtpSbqEGl06JRju5z1C4wA_24_10">0.17</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:54.24%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.87%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:54.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Weighted average number of shares:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:54.24%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Basic</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.87%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:WeightedAverageNumberOfSharesOutstandingBasic" scale="3" id="Tc_qF02g65knUy_VJsPPYihqQ_27_4">49,906</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:WeightedAverageNumberOfSharesOutstandingBasic" scale="3" id="Tc_OMs-ErZ1H0mnUuTblj5_HA_27_7">49,073</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:WeightedAverageNumberOfSharesOutstandingBasic" scale="3" id="Tc_yD5-MVoncEWOW67pz7tM7A_27_10">48,362</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:54.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Diluted</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding" scale="3" id="Tc_3yA5nEadqk-0mHbHViSkaQ_28_4">65,607</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding" scale="3" id="Tc_4EUH7brcHEK5leGWp94GDA_28_7">53,643</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding" scale="3" id="Tc_7d_mcvhWdUymN4IywBqwwg_28_10">48,362</ix:nonFraction></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">See accompanying Notes to the Consolidated Financial Statements.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-5</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="_cac10bae_29a0_440a_acca_ce1b860ebafa"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Veeco Instruments&#160;Inc. and Subsidiaries</b></p><a id="ComprehensiveIncomeLoss_794066"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Consolidated Statements of Comprehensive Income (Loss)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in thousands)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="_58530e19_509a_4185_988a_9a3c63b01696"></a><a id="Tc_kLgsBxygA0-tKQufsJrJfg_1_3"></a><a id="Tc_cnqor54uHUWi2FylKvGTJQ_2_3"></a><a id="Tc_F4r2d_WdkUy_Sm2Hbi9Ytg_2_6"></a><a id="Tc_gIK1YrYoDEeWD69pPkrh3Q_2_9"></a><a id="Tc_XLNzZyxu40S1Mpt_wbF-tg_3_0"></a><a id="Tc_ULLKC0na3UOCv0hkYbJPKA_3_3"></a><a id="Tc_8SiiUhXFeUSungihQx2QiA_3_6"></a><a id="Tc_QMmCA2WdBEarw4gihV6lmQ_3_9"></a><a id="Tc_wYggqzf_nEmhYB1IAEqNrw_4_0"></a><a id="Tc_rzGCWTaz3k6e6RXk2UGFDg_5_0"></a><a id="Tc_feEESV1HHUyFEu7tS5Z4AA_6_0"></a><a id="Tc_XmUbFRvjyEWY4QjGKSpORg_7_0"></a><a id="Tc_pTePndNieEKdp30kdFA9Ng_8_0"></a><a id="Tc_nc6ItC37lkqYb1m-NJwSMQ_9_0"></a><a id="Tc_RD9HOa-iwUCr-wDkFMT-4A_10_0"></a><a id="Tc_zYAX1eJJgkahqzQ8gqXFKw_12_0"></a><a id="Tc_mt8XxK9vskOzNNVMqnprXQ_14_0"></a><a id="Tc_Llj1gpVlpkKOYYQHkJs36A_14_3"></a><a id="Tc_myO5pnAf8E-ZHFVx-62cqQ_14_6"></a><a id="Tc_F_69i_gE7USpaC7TCXIMEQ_14_9"></a><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:middle;width:63.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:32.88%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">For the year ended December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:63.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.35%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td></tr><tr><td style="vertical-align:middle;width:63.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Net income</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetIncomeLoss" scale="3" id="Tc_QQwy1wr-h0ynwJswgT5ABw_3_4">166,942</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetIncomeLoss" scale="3" id="Tc_38539_WInkOXgrvw-wvK4A_3_7">26,038</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetIncomeLoss" sign="-" scale="3" id="Tc_ocre_a3ojU6a9lUemvVHng_3_10">8,391</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:middle;width:63.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Other comprehensive income (loss), net of tax:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:middle;width:63.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Available-for-sale securities:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:63.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 24pt;">Change in net unrealized gains or losses</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeUnrealizedHoldingGainLossOnSecuritiesArisingDuringPeriodNetOfTax" sign="-" scale="3" id="Tc_rfo_-sYzo0WKu993zmEDdA_6_4">514</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeUnrealizedHoldingGainLossOnSecuritiesArisingDuringPeriodNetOfTax" sign="-" scale="3" id="Tc_0ZstLTRMDE-8HpOfE7uZbg_6_7">311</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.22%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeUnrealizedHoldingGainLossOnSecuritiesArisingDuringPeriodNetOfTax" sign="-" scale="3" id="Tc_lcNrTbGmrU2OYPbfI3sBPQ_6_10">53</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:middle;width:63.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 24pt;">Unrealized gain (loss) on available-for-sale securities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.13%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeAvailableforsaleSecuritiesAdjustmentNetOfTaxPortionAttributableToParent" sign="-" scale="3" id="Tc_2VDVu0KoeEmv_rdNF0cy8Q_7_4">514</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeAvailableforsaleSecuritiesAdjustmentNetOfTaxPortionAttributableToParent" sign="-" scale="3" id="Tc_DCQniDJSqk-RuKRQgcVGTg_7_7">311</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.22%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeAvailableforsaleSecuritiesAdjustmentNetOfTaxPortionAttributableToParent" sign="-" scale="3" id="Tc_A4f3xg8JT0e0Wx1WhKxXrA_7_10">53</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:middle;width:63.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Currency translation adjustments:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:middle;width:63.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 24pt;">Change in currency translation adjustments</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.13%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationGainLossArisingDuringPeriodNetOfTax" sign="-" scale="3" id="Tc_o0cMErfrEkOgxsKPkhlPMA_9_4">41</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationGainLossArisingDuringPeriodNetOfTax" sign="-" scale="3" id="Tc_x9zm3-L4U06a9noOjhemMw_9_7">52</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.22%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationGainLossArisingDuringPeriodNetOfTax" scale="3" id="Tc_KS9mL5kCikeDMiofbc3dkw_9_10">5</ix:nonFraction></p></td></tr><tr><td style="vertical-align:middle;width:63.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 30pt;">Net changes related to currency translation adjustments</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent" sign="-" scale="3" id="Tc_pwiVhFKGEEKXyo4V5WNy5g_10_4">41</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent" sign="-" scale="3" id="Tc_fhlZBDv5akO-U4u2qQhXig_10_7">52</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.22%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent" scale="3" id="Tc_Nr00zFhJZk6ozbVfpVzUzA_10_10">5</ix:nonFraction></p></td></tr><tr><td style="vertical-align:middle;width:63.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 24pt;"><span style="font-size:10pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:middle;width:63.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Total other comprehensive income (loss), net of tax</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent" sign="-" scale="3" id="Tc_r0IcWSbScUCziSWGOtL3gQ_12_4">555</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent" sign="-" scale="3" id="Tc_TXMQMwSmp06K78GqiCsO2g_12_7">363</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.22%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent" sign="-" scale="3" id="Tc_Bx4z-35akk6sXCf7fIioCA_12_10">48</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:middle;width:63.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 6pt;"><span style="font-size:10pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.13%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.22%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:middle;width:63.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Total comprehensive income</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.13%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ComprehensiveIncomeNetOfTax" scale="3" id="Tc_onUymihwb0eJh6OBtyhVAw_14_4">166,387</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ComprehensiveIncomeNetOfTax" scale="3" id="Tc_xnAXwYFNKkulF89XccIYyw_14_7">25,675</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.22%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ComprehensiveIncomeNetOfTax" sign="-" scale="3" id="Tc_aD7Lb4qn6UayvNFq0TZzeQ_14_10">8,439</ix:nonFraction>)</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">See accompanying Notes to the Consolidated Financial Statements.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-6</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="_587bfadf_4824_4816_ba40_723ac19b373f"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Veeco Instruments&#160;Inc. and Subsidiaries</b></p><a id="StockholdersEquity_323287"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Consolidated Statements of Stockholders&#39; Equity</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in thousands)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="_8712fd10_d26a_494e_85ed_9cc8f427e501"></a><a id="Tc_RSmkqBNyWkms_CeEvGfsmQ_1_13"></a><a id="Tc_u8iRQVws8E2RWC9z2e6YGg_2_7"></a><a id="Tc_vm56n14ZJ06oIwLqYLRrlg_2_13"></a><a id="Tc_hmASZ6mL8Ees-MiWMPWiEQ_3_2"></a><a id="Tc_K2DgB0FbdECBk8bVrRHFEw_3_7"></a><a id="Tc_YFQFptUpK0Ow2pub6ujIAg_3_10"></a><a id="Tc_4ZTsX9kx6EC9F2HxZQ5IFA_3_13"></a><a id="Tc_o8BHflXFiESSKY7RIiutiw_4_2"></a><a id="Tc_eCtEozc0X0maL7FsZaFH6g_4_4"></a><a id="Tc_B40VFoeRJUuMhBPqbXcKMw_4_7"></a><a id="Tc___gAmokqEkmOOU9g9NnX1g_4_10"></a><a id="Tc_YPk2LJOn1UWFhnldSQyjWg_4_13"></a><a id="Tc_XFYuz17fakG14P-1TV5wOw_4_16"></a><a id="Tc_cl1iVPZndE6vbaTJlcke_g_5_0"></a><a id="Tc_MnTVME3TXUicIc__HWMFNg_5_4"></a><a id="Tc_J-3yRgBR-Ui9DLfsVFjGtA_5_7"></a><a id="Tc_hedq0IRdPka9yWHGyZ5PLQ_5_10"></a><a id="Tc_SF6UcRFScES3gsa76u2Suw_5_13"></a><a id="Tc_iPgHA_Fcykqw6f5uU_40Xw_5_16"></a><a id="Tc_u2zVzDJ5z0-tbQkrj3ryMg_6_0"></a><a id="Tc_Jo9aZA0t_UycyB_fFx1IPQ_6_2"></a><a id="Tc_OcWzbaKxoU-BUqrVhvB3-g_6_5"></a><a id="Tc_bIxehHxy3EOtZblFZtvFew_6_8"></a><a id="Tc_qURydTs5gkqQ-jYs9Gqfig_6_14"></a><a id="Tc_ZaDSDfzl4EGeEQfFhW641w_7_0"></a><a id="Tc_CvjPDIpgf0m05UxfuAgWaw_7_2"></a><a id="Tc_6hWx1-MIK0aNHIqv9Vlz_w_7_5"></a><a id="Tc_sKlg8m1yF0maCNLyEn_kYg_7_8"></a><a id="Tc_lkuRZhSXPkKpnun4zuXlCQ_7_11"></a><a id="Tc_KQF99JabGUCnASDfm0v1Qg_8_0"></a><a id="Tc_us2R1RBIXkq9M66oBj3vtw_8_2"></a><a id="Tc_Qove0SlkYUyLHAb5-mTJxw_8_5"></a><a id="Tc_Ig7IXYVrzke6zrg28fxrPA_8_11"></a><a id="Tc_sejvNr0Oxk2vY5kEpgV7jw_8_14"></a><a id="Tc_uhzrqzqp_0mZ0AAfmFGG5A_9_0"></a><a id="Tc_zwzcb4wwqEi4SeYlnGw_lg_9_11"></a><a id="Tc_QDzbkIIsr0mowjovMxVW8w_9_14"></a><a id="Tc_zPeCVnEhj0ePHXaHD361SQ_10_0"></a><a id="Tc_Cn3wXvIB60uupT8rat2U2Q_10_2"></a><a id="Tc_wcMz5ucGTUOPVVMTPT8ubg_10_5"></a><a id="Tc_9WLCOXAdfUW16-HbYTNqZw_10_11"></a><a id="Tc_w4UljGpkIUO3nwIBx0VlSg_10_14"></a><a id="Tc_tTUl_fLqZ0itPmEIqIZH3w_11_0"></a><a id="Tc_brBNY6zb0k2t7tTS_8bYHQ_11_2"></a><a id="Tc_79bq99n-Y0u_pAdSB9YkqQ_11_5"></a><a id="Tc_YPyH5kOk8U6mduihVqOrNQ_11_11"></a><a id="Tc_29_udLMlkE-mFSU3xryjEA_11_14"></a><a id="Tc_9fo8SxpcKUq-rZb8pfUeXA_12_0"></a><a id="Tc_y5GKie9UVkeJh0GaYSbpMA_12_2"></a><a id="Tc_jinoyUTy4UOo8fmMjDA3Mg_12_5"></a><a id="Tc_dSIt1AelxkiX8jXfJ031ig_12_11"></a><a id="Tc_MZ0zO4OdyEmJpIkqpOM6XQ_12_14"></a><a id="Tc_6bMFQ7LxC0K7J_rm7lg4PQ_13_0"></a><a id="Tc_JuS3oisQVk-RM-yzAJPpmQ_13_2"></a><a id="Tc_swI0x_6sJUqi_0mJVOdFTw_13_5"></a><a id="Tc_8iuE1UMiQEqkpJf28zj8xg_13_11"></a><a id="Tc__h3CDKRY9USvGOIahSdOvQ_13_14"></a><a id="Tc_Dqq0wU5V5ECdpgk1DIKSzw_14_0"></a><a id="Tc_lnNkeFoJqEajgcUeQVSgNA_15_0"></a><a id="Tc_weE5s8nIVUa3nSac9xomgg_15_2"></a><a id="Tc_UF7GUmxsAEKREtj2B-Mu9w_15_5"></a><a id="Tc_mCYyvSoLlUuPP7rU019Zjg_15_8"></a><a id="Tc_FTD3CkRGikyWYGqJwoT7kQ_15_14"></a><a id="Tc_xeY-6ZOufU-JwDSxzQnvww_16_0"></a><a id="Tc_1ZP1xKHRkku5ovhdqYPgKQ_16_2"></a><a id="Tc_KpjiIELsGEmV0YA1I58ghQ_16_5"></a><a id="Tc_1hvezfIy1kiwYmtCyRMS6w_16_8"></a><a id="Tc_VsT-nCzHI0y2HNUbPcqhqw_16_11"></a><a id="Tc_cxHHaFPrZkGDAXpYeL9SvA_17_0"></a><a id="Tc_CVe1bcDFIkm7wfykEY2OOA_17_2"></a><a id="Tc_ouSxiOSggUimY9QcFaLuGg_17_5"></a><a id="Tc_BXY84LMngE6-lRoSSYVQ0w_17_11"></a><a id="Tc_c8a_81R7c0C5GnF-erVUsg_17_14"></a><a id="Tc_6F-jupfe1UW0wgyDBvzdAQ_18_0"></a><a id="Tc_GOz13OgZK0izyyW65qR6nQ_18_11"></a><a id="Tc_iSFcnC29Kkqa8irD2faD-Q_18_14"></a><a id="Tc_W0pXOXKGnUCgPYgLrYgQeg_19_0"></a><a id="Tc_1W6eJOj75kully8M_zpdoA_19_2"></a><a id="Tc_JxltoihumkSRihyyLVIJNw_19_5"></a><a id="Tc_kaMrwnhZdUmMimfXucZ35A_19_11"></a><a id="Tc_YSBDdGt6WUeSnBLAEALGcw_19_14"></a><a id="Tc_zfYPaZBEK0eFhPzZbq8Lww_20_0"></a><a id="Tc__CN1jn784ECOrdMMVTnFNw_21_0"></a><a id="Tc_lm61V2sa30aCeZU58QeirQ_21_2"></a><a id="Tc_HVVLJZNN_kWvmfXPWdypBA_21_5"></a><a id="Tc_TUPnXjT4NkaKDZOTYOgwAg_21_14"></a><a id="Tc_G0OcAQJep0y4X_PDu-eZZw_22_0"></a><a id="Tc_kp10wmZKlUSQLMjI3L81Hg_22_2"></a><a id="Tc_1rB0zDsLO0iaxnZzIzlF-w_22_5"></a><a id="Tc_3pYtd1iHVUywWyDEKhIpnQ_22_8"></a><a id="Tc_SM1gU0TT-0iDp9IcOSpf3A_22_14"></a><a id="Tc_5tHB0zFY20-fp3jlR4oO2w_23_0"></a><a id="Tc_XA1nonHvEkO5D0Vgv5k6_Q_23_2"></a><a id="Tc_57dZ0IuiAEaedqY2UGPIeg_23_5"></a><a id="Tc_qAAAkYVmHEChB-yM7tXNdQ_23_8"></a><a id="Tc_NqRY78-e70CsrhZYE5v3hA_23_11"></a><a id="Tc_Rvw9Rebi2Ue18-2VjSUoZA_24_0"></a><a id="Tc_nBA36RRnDECXOa974eQTqw_24_2"></a><a id="Tc_eJAnOJHIqU-H9nxcx5INdA_24_5"></a><a id="Tc_eidPMwR9mEKNFEmfOME4Zg_24_11"></a><a id="Tc_vWp27AR8VEylVyACpZ6L2Q_24_14"></a><a id="Tc_KMEdqKPNYkGHQD2a45xVew_25_0"></a><a id="Tc_tArcvSapdEaf52HQjW9kmQ_25_11"></a><a id="Tc_FBvm85qFU0GUErbvRYTQxA_25_14"></a><a id="Tc_yLGFaoxDI0i8nsWyNyyp4Q_26_0"></a><a 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style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.34%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.83%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.37%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.01%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.58%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:40.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Accumulated</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:40.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Additional</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Other</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:40.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="4" style="vertical-align:bottom;white-space:nowrap;width:15.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Common&#160;Stock</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Paid-in</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Accumulated </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Comprehensive</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:40.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.34%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Shares</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amount</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.32%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Capital</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.34%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Deficit</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Income</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.08%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Total</b></p></td></tr><tr><td style="vertical-align:bottom;width:40.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Balance at December&#160;31, 2019</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="As_Of_12_31_2019_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_FsmAawc2DEOmzDOqP6upWw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:SharesOutstanding" scale="3" id="Tc_aenQfPgX10yTPpOaExoCQw_5_2">48,994</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2019_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_FsmAawc2DEOmzDOqP6upWw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_P8u0_4J9pkGKCN4-czFZbg_5_5">490</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2019_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_hM4dV8KvL0uccrphKnYC9g" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_HCuemZ1haUCpxEGz4yLM8g_5_8">1,071,058</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2019_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_xa9r4bxjU0e7LxknEMtNmw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" sign="-" scale="3" id="Tc_9ZCq-fgmEEieaRh956FP3w_5_11">698,930</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.58%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2019_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_ZFKrEu3jd0CjuFXPNSSC8w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_itENZDA_5U6bn8i-74qF8g_5_14">1,894</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2019_dyqJ8hTIuEW6V2L_RveF0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_O4wONq1eBUGEIboub078-g_5_17">374,512</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:40.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Net income (loss)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_JAI5BnxJn0yyDx_dSs8J2A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetIncomeLoss" sign="-" scale="3" id="Tc_Ze2yGhAyL0ejC2I333ZCZw_6_11">8,391</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetIncomeLoss" sign="-" scale="3" id="Tc_ruhdZqYazkeAy-wg-kEwIw_6_17">8,391</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:40.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Other comprehensive income (loss), net of tax</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.58%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_iUgMnC3EVk2SSaJC7ml4hA" decimals="-3" format="ixt:numdotdecimal" name="veco:OtherComprehensiveIncomeLossIncludingForeignCurrencyGainsLossesOnTransactionsIncludedInOperatingResultsNetOfTax" sign="-" scale="3" id="Tc_mCs266vZVkOQtJOQqffnrg_7_14">48</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="veco:OtherComprehensiveIncomeLossIncludingForeignCurrencyGainsLossesOnTransactionsIncludedInOperatingResultsNetOfTax" sign="-" scale="3" id="Tc_H4mKZW2fREOiL4nNKMWwaQ_7_17">48</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:40.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Share-based compensation expense</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_31RxRwAXMUOBUYXDlssrkQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue" scale="3" id="Tc_J9miJz_ah06LfktnFk0raA_8_8">12,703</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue" scale="3" id="Tc_jK4QWPZ0Fkq1BxUDjfQwpA_8_17">12,703</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:40.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Net issuance under employee stock plans</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_b3_MyPjPJEuMPgmth1uxkg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodSharesShareBasedCompensation" scale="3" id="Tc_Gm36HFHqk0SWDYOb7XA7CA_9_2">730</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_b3_MyPjPJEuMPgmth1uxkg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodValueShareBasedCompensation" scale="3" id="Tc_XG0O13CGu0u_lVMATDYdGA_9_5">7</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_31RxRwAXMUOBUYXDlssrkQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodValueShareBasedCompensation" scale="3" id="Tc_PUvXQU9Uf0ipLv-IeySgMA_9_8">549</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.58%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodValueShareBasedCompensation" scale="3" id="Tc_ffF14QUoMku9N6DgePcvvA_9_17">556</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:40.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Extinguishment of equity component of repurchased/exchanged 2023 Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_31RxRwAXMUOBUYXDlssrkQ" decimals="-3" format="ixt:numdotdecimal" name="veco:AdjustmentsToAdditionalPaidInCapitalExtinguishmentEquityComponentOfNotesRepurchased" scale="3" id="Tc_FfltlUIdb0CAjbWDKvKrRA_10_8">14,714</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="veco:AdjustmentsToAdditionalPaidInCapitalExtinguishmentEquityComponentOfNotesRepurchased" scale="3" id="Tc_ovdA2vNfK06l8_DorFsn7A_10_17">14,714</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:40.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Equity component of 2025 Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_8j1zlyr4AU2z9_9awGfNwQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AdjustmentsToAdditionalPaidInCapitalEquityComponentOfConvertibleDebt" scale="3" id="Tc_aRgdkj24KEKWLRRhkfMF_A_11_8">20,706</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.58%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_B52uU2Mlw0iaAElsoUnx3Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AdjustmentsToAdditionalPaidInCapitalEquityComponentOfConvertibleDebt" scale="3" id="Tc_Db6dZXA5QE2ls1dG4EydQQ_11_17">20,706</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:40.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Equity component of 2027 Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_DEAAn-NWvkmZVHFd6j4MOg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AdjustmentsToAdditionalPaidInCapitalEquityComponentOfConvertibleDebt" scale="3" id="Tc_wxgGA17_TkS3xsoh6yG-UQ_12_8">33,363</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_NdHMAvtl7EiuDr6tIOXilw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AdjustmentsToAdditionalPaidInCapitalEquityComponentOfConvertibleDebt" scale="3" id="Tc_hvx3db7p10a6xkUHRXPI4A_12_17">33,363</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:40.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Purchase of capped calls</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.34%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.83%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.37%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_31RxRwAXMUOBUYXDlssrkQ" decimals="-3" format="ixt:numdotdecimal" name="veco:AdjustmentsToAdditionalPaidInCapitalPurchaseOfDerivativeInstrument" scale="3" id="Tc_tH01PTd590Ogap7JTJ99Aw_13_8">10,313</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.01%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.58%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="veco:AdjustmentsToAdditionalPaidInCapitalPurchaseOfDerivativeInstrument" scale="3" id="Tc_QUAGn7ICoE2wtN5YNpHyFQ_13_17">10,313</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:40.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Balance at December&#160;31, 2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.34%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_df8hXeatnEeovE4A6pJyuw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:SharesOutstanding" scale="3" id="Tc_ipuyhvveiEGBsfb7HGmNag_14_2">49,724</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.83%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.37%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_df8hXeatnEeovE4A6pJyuw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_c52PBePsfkWkkYSM7zxzWA_14_5">497</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_S2MHmP-MGkydd4GudaNU8w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_ZPpNz4DvI0imXNdZm79kog_14_8">1,113,352</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.01%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_0x6mjJDzwkeVrCrlQkEmCQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" sign="-" scale="3" id="Tc_cozyh6If1Uq4pcm62kNkqA_14_11">707,321</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.58%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_gKPjwCmvOEeoy03lBe0YKg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_TMfb7yOFeEaYdzFKy533jQ_14_14">1,846</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2020_JUGLvBeldEeSTj1WqQBVdQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_rJtQyV1U1E-xy3jxVzHkbg_14_17">408,374</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:40.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Net income (loss)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_NlKiDl7K_kWxshosVGTXvQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetIncomeLoss" scale="3" id="Tc_GvnF_2D4_UacNIyiCoJk-g_15_11">26,038</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.58%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetIncomeLoss" scale="3" id="Tc_oDYSIYAQs06WYu68HAKxRA_15_17">26,038</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:40.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Other comprehensive income (loss), net of tax</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_WIAntBTv5kumJYPuwFnHEA" decimals="-3" format="ixt:numdotdecimal" name="veco:OtherComprehensiveIncomeLossIncludingForeignCurrencyGainsLossesOnTransactionsIncludedInOperatingResultsNetOfTax" sign="-" scale="3" id="Tc_WGwwx5mM7Ui4-bX2IzlOgw_16_14">363</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="veco:OtherComprehensiveIncomeLossIncludingForeignCurrencyGainsLossesOnTransactionsIncludedInOperatingResultsNetOfTax" sign="-" scale="3" id="Tc_Mbi1ts4wR0awoiTGuQ5jug_16_17">363</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:40.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Share-based compensation expense</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_9gz_RG3i3EuWCc_uyao52w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue" scale="3" id="Tc_0KYl-PmJlkudkLrf_kmhsQ_17_8">15,249</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.58%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue" scale="3" id="Tc_WMDqQWNHHEKkHGJKOmIaJQ_17_17">15,249</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:40.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Net issuance under employee stock plans</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_EsdRKrqD4k-3NlElNbOJzw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodSharesShareBasedCompensation" scale="3" id="Tc_upx-W9KNhkKcQhgAGdgRrg_18_2">929</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_EsdRKrqD4k-3NlElNbOJzw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodValueShareBasedCompensation" scale="3" id="Tc_zTIDk4kInUmlFAVuxwvQgQ_18_5">10</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_9gz_RG3i3EuWCc_uyao52w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodValueShareBasedCompensation" sign="-" scale="3" id="Tc_tJz0wO-LOES3khT6DGD_WQ_18_8">5,600</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodValueShareBasedCompensation" sign="-" scale="3" id="Tc_9gqFPjPwX02segOxEj-yPg_18_17">5,590</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:40.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Extinguishment of equity component of repurchased 2023 Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.34%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.83%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.37%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_9gz_RG3i3EuWCc_uyao52w" decimals="-3" format="ixt:numdotdecimal" name="veco:AdjustmentsToAdditionalPaidInCapitalExtinguishmentEquityComponentOfNotesRepurchased" scale="3" id="Tc_kf0KAIdC-0uBss52axgtpg_19_8">6,080</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.01%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.58%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="veco:AdjustmentsToAdditionalPaidInCapitalExtinguishmentEquityComponentOfNotesRepurchased" scale="3" id="Tc_9a57zv4mz02sNTsziIFlkQ_19_17">6,080</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:40.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Balance at December&#160;31, 2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.34%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="As_Of_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_d0Nvoz2UTkSF8oUdDQFNnA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:SharesOutstanding" scale="3" id="Tc_xCNJyQrhdkaoB_FF2iJ-VA_20_2">50,653</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.83%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.37%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_d0Nvoz2UTkSF8oUdDQFNnA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_ZSKU3pcQi0OFgWi86YzMzA_20_5">507</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_R2aUd4k_kkmjiEC4UStAuQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_DOhD73E_p0OGkSGizjVSVg_20_8">1,116,921</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.01%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_AAuYcTUfMEqGriZQdvFnlA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" sign="-" scale="3" id="Tc_jRbs2HXyAkq4MP21ZKD4Fw_20_11">681,283</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.58%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_XMi8hyEBWUaztLhyei_Ajw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_XEamWbU8Y0SNyzIlSMp-CQ_20_14">1,483</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_o2lGsU3_KEq1cJsKwbgJ2g_20_17">437,628</ix:nonFraction></p></td></tr><tr><td style="vertical-align:middle;width:40.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Cumulative effect of change in accounting principle - adoption of ASU 2020-06</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_srt_CumulativeEffectPeriodOfAdoptionAxis_srt_CumulativeEffectPeriodOfAdoptionAdjustmentMember_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_kNjVzlQSg0uzfUcwSQuPow" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" sign="-" scale="3" id="Tc_LTqfbOcqhUmzlm9GX3BcHQ_21_8">56,800</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_srt_CumulativeEffectPeriodOfAdoptionAxis_srt_CumulativeEffectPeriodOfAdoptionAdjustmentMember_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_yZM7DSF3z0K-i64XpySzBw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_R1wgWt1M-UiNR6O_hQm3hA_21_11">12,540</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.58%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_srt_CumulativeEffectPeriodOfAdoptionAxis_srt_CumulativeEffectPeriodOfAdoptionAdjustmentMember_olZlxpGXwkeNK-H39adOaQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" sign="-" scale="3" id="Tc_oync29q3d02UGkxGtfMnPQ_21_17">44,260</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:40.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Net income (loss)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_-AC2PNT3C02sUwYL2KHt_A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetIncomeLoss" scale="3" id="Tc_IgwXHUZcTEuVOkHDNtiJlQ_22_11">166,942</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetIncomeLoss" scale="3" id="Tc_uxXrp1KkUkq9_tknuUvi0Q_22_17">166,942</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:40.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Other comprehensive income (loss), net of tax</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.58%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_6zlsan7E70SaZfNDKUZFwQ" decimals="-3" format="ixt:numdotdecimal" name="veco:OtherComprehensiveIncomeLossIncludingForeignCurrencyGainsLossesOnTransactionsIncludedInOperatingResultsNetOfTax" sign="-" scale="3" id="Tc_KWIIyyUwFEityTlM0VK0qg_23_14">555</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="veco:OtherComprehensiveIncomeLossIncludingForeignCurrencyGainsLossesOnTransactionsIncludedInOperatingResultsNetOfTax" sign="-" scale="3" id="Tc_fWWd5EuDQkWl2haH7G0vmg_23_17">555</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:40.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Share-based compensation expense</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_QZRsqkKY70-vQJ-kuKgfnA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue" scale="3" id="Tc_V9s7AgrIaUaj-6FsGBsPIg_24_8">22,994</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue" scale="3" id="Tc_II9-Ue7Zl0SQ7H9pvqbOng_24_17">22,994</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:40.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Net issuance under employee stock plans</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.34%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_lH4wNtbzakqPcd6ckinJqQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodSharesShareBasedCompensation" scale="3" id="Tc_f4qsQvQuW0GlOOLmGEUR7g_25_2">1,007</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.83%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.37%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_lH4wNtbzakqPcd6ckinJqQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodValueShareBasedCompensation" scale="3" id="Tc_dEA8ZltwkU2W3r8R1BUnbA_25_5">10</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_QZRsqkKY70-vQJ-kuKgfnA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodValueShareBasedCompensation" sign="-" scale="3" id="Tc_AYu7OXmsU0yJgTEM1zD2EQ_25_8">4,935</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.01%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.58%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodValueShareBasedCompensation" sign="-" scale="3" id="Tc_1sE9EWeayES75nN4SF4fDQ_25_17">4,925</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:40.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Balance at December&#160;31, 2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.34%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="As_Of_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_PCxiZFdafEavDRCUIhislQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:SharesOutstanding" scale="3" id="Tc_Bb83UlSYn0-jSwZUyDRrnQ_26_2">51,660</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.83%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.37%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_PCxiZFdafEavDRCUIhislQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_crQPJny5WkOjzc5n9R8gwg_26_5">517</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.5%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_c49gXsTVI0-hQUvNBpS1BA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_IEDQqLcmW06HcWVSknShuQ_26_8">1,078,180</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.01%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_AjFsWLZVwUSPAFzzrfVXXA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" sign="-" scale="3" id="Tc_lct2Zb5CR0OyGgCsVB1R4Q_26_11">501,801</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.58%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_W3Ea7PTEU0qeOccl5h-Srw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_ctrRXx-IJEy08lJfxQ3Tkw_26_14">928</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.82%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.4pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_Mf43BxEaXkq81nj9usHXYA_26_17">577,824</ix:nonFraction></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">See accompanying Notes to the Consolidated Financial Statements.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-7</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="_a8fda253_764e_4111_94aa_d42eb2fa20fb"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Veeco Instruments&#160;Inc. and Subsidiaries</b></p><a id="CashFlows_488340"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Consolidated Statements of Cash Flows</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in thousands)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="_d3155a60_bd77_440a_80ac_39f78b40d0ce"></a><a id="Tc_KagYdywKe0SVn6ND-XHjvQ_1_2"></a><a id="Tc_RLxHS6ssg0W_HGNTwAoqnw_2_2"></a><a id="Tc_4GXbuBhPMUeo7dP6rrausw_2_5"></a><a id="Tc_m7wpX4azwkOxu_aEo_rQgA_2_8"></a><a id="Tc_6NCwZDR5O0CmGYtUaGrPYg_3_0"></a><a id="Tc_Jm4mH6L7Gkq-bsXIJjTXOw_4_0"></a><a id="Tc__snAlx4nEkmo6v788Wv3Kg_4_2"></a><a id="Tc_ovgxCvhfbkis0c7m9H_Vow_4_5"></a><a id="Tc_acdQRo-2LUeV7j_-hZo8nA_4_8"></a><a id="Tc_IZ6kigSBuUmD2lncuQYR6Q_5_0"></a><a id="Tc_QD0BfgLLGUiQsDnX8E-lCw_6_0"></a><a id="Tc_OHAN7YTjr0Wsyfuu-pI3nQ_7_0"></a><a id="Tc_qgrhXj3TYUmpXbEfDAnYlg_8_0"></a><a id="Tc_43mL4ppUoUyX3o4i2iIt1A_9_0"></a><a id="Tc_0po924ruCEyT4rAj2U4oQg_10_0"></a><a id="Tc_6FCT0dg97UuwzgTKszAJfw_10_3"></a><a id="Tc_ew3Zc1xvpE-6mfObcuYUlw_11_0"></a><a id="Tc_MffWRjWQ-0SaKbcEsUk0Rg_11_3"></a><a id="Tc_gT-QGhhhSE2AgSHF4J4w9A_11_6"></a><a id="Tc_7VBziLlYxEataeiFInjLVg_12_0"></a><a id="Tc_6WplcqppzE-val8eoDqWLA_12_3"></a><a id="Tc_uXVjmCbzBEuIvJZDswYUSA_12_9"></a><a id="Tc_C6rYaiqbUkKgKOvmOQOwkA_13_0"></a><a id="Tc_5alnXYRzKkC3qrwnBEBnpg_13_3"></a><a id="Tc_-TpTkBpp00uIadiVvKYcLA_13_6"></a><a id="Tc_T2-xS6gRXEuWOMBlKmlMXQ_14_0"></a><a id="Tc_Cev50s-rHEuvmdxIHGr7cA_15_0"></a><a id="Tc_dL4qu6UNH0qc3BveC_ZHdA_16_0"></a><a id="Tc_vGKoHuzasEeYMhF8YrZTAA_17_0"></a><a id="Tc_Za6Ni6r-6UCWHMtgYpyWcA_18_0"></a><a id="Tc_jYhl9dpKIkSK9m1Ctg2MHQ_19_0"></a><a id="Tc_sGF8cwT11ki8EoICbUCbaQ_20_0"></a><a id="Tc_FbBYMZ9H90qQO4_pAuG_qQ_21_0"></a><a id="Tc_ElorMWE0BEKzIH_M8guoHQ_22_0"></a><a id="Tc_1oLcEXDvakGrf7wFZ3I1MA_24_0"></a><a id="Tc_5mUzl6Mhikqtp6gYRMUREw_25_0"></a><a id="Tc_Elki0LNf9EqxuETe7nNlJg_26_0"></a><a id="Tc_F_QsV3MldUid-pzmxQRwww_27_0"></a><a id="Tc_69eQyESYxEKdmjcCP4jQ8w_28_0"></a><a id="Tc_w1bbUF5YTkimq10qQ4RgeA_28_3"></a><a id="Tc_FyIfxC_4WEOlMuKO4VfARQ_29_0"></a><a id="Tc_VF8ivXUyeEyHvOxosv8yyg_31_0"></a><a id="Tc_VfXLb8tHZUuT1P1mYvvSaw_32_0"></a><a id="Tc_aA2graTHaEqiU7yw3wrJSQ_32_3"></a><a id="Tc_SLsXw-HYNUGzFZfqVa7f9w_32_6"></a><a id="Tc_aLjHzK3im0SlJGaacmM1SA_33_0"></a><a id="Tc_PPyegiieWESDVVJ4d6eBNg_33_3"></a><a id="Tc_0pB9YSvOUU6unPb-fcA_Sw_33_6"></a><a id="Tc_z3SUOLP7ZE-aWt8GzYoDaw_34_0"></a><a id="Tc_SGe-v-JcEkK-vb9rkjMzuA_34_3"></a><a id="Tc_wzEsVApWmEqDgNMDvHae7w_35_0"></a><a id="Tc_FJ9olcAEr0OAzwf5nAQe0A_35_3"></a><a id="Tc_myLAJTE3wEecDMjB727B0Q_35_9"></a><a id="Tc_FNgkRrkXLUusFUK-aUFPsA_36_0"></a><a id="Tc_UFqNi9RswUuJqHgl406gGQ_37_0"></a><a id="Tc_Tb8dmrZ5z0-0moUMWg_0pw_38_0"></a><a id="Tc_LluUsVE8GUa3TykgY-3D-w_39_0"></a><a id="Tc_INz_COUrAkyFJ5RWPUMxlw_40_0"></a><a id="Tc_k9g2uxcyGE--4cGxKX4GpA_41_0"></a><a id="Tc_TRWVOPf05EGiCXTSWG2Uhw_42_0"></a><a id="Tc_AkXbI72KrkKKIBIQGN8Dsg_42_2"></a><a id="Tc_yfiBJ9dxuEK84eBmVoCEiw_42_5"></a><a id="Tc_4nvmHk6AJkGUqIJSIdNLHw_42_8"></a><a id="Tc_14SAODE5X0aL7jMWDky_jQ_44_0"></a><a id="Tc_7bD0OrliSEqwO_Uerc37SA_45_0"></a><a id="Tc_GBJG5bXdV0mbx1ySPWhWIQ_45_2"></a><a id="Tc_YzJC3u4G00Osyfs6tmIctw_45_5"></a><a id="Tc_Em5UaCPH2UeLW7oQfqPvmA_45_8"></a><a id="Tc_ZjLu1z-sdkutXeWajipFLA_46_0"></a><a id="Tc_erUSiM9UY0GoYwziAnCDFg_47_0"></a><a id="Tc_MPJYOqKTK0SASjPso4TuNg_48_0"></a><a id="Tc__fISQBz280iWR0UupvFQGQ_49_0"></a><a id="Tc_Z48kxaUD6Uu_OHl7Uu0GMQ_50_0"></a><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:63.31%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:63.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:34.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">For the year ended December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.78%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><b style="font-weight:bold;">Cash Flows from Operating Activities</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Net income</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProfitLoss" scale="3" id="Tc_JBVatNrvsUmAw8XhvOUdkg_4_3">166,942</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProfitLoss" scale="3" id="Tc_YA7daoiHak-7rWEQaAVUSQ_4_6">26,038</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProfitLoss" sign="-" scale="3" id="Tc_qDS3K-35OEqjJknyGxLjqw_4_9">8,391</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Adjustments to reconcile net income to net cash provided by (used in) operating activities:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 6pt;">Depreciation and amortization</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DepreciationDepletionAndAmortization" scale="3" id="Tc_EHoaBPgEYE-DgxbmS8v0Qw_6_3">25,645</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DepreciationDepletionAndAmortization" scale="3" id="Tc_Na5TuCwinEC84Phx7uDVnw_6_6">26,058</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DepreciationDepletionAndAmortization" scale="3" id="Tc_xn6E-EPRiEqMiCB05W4i6g_6_9">30,697</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 6pt;">Non-cash interest expense</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AmortizationOfFinancingCostsAndDiscounts" scale="3" id="Tc_US58gnt09Uqh9mEkiRZVbg_7_3">962</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AmortizationOfFinancingCostsAndDiscounts" scale="3" id="Tc_r2ZGqYqcyUOyw-k3iZcDvg_7_6">13,819</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AmortizationOfFinancingCostsAndDiscounts" scale="3" id="Tc_mCd0dwkRWEKqpesU-lMXdg_7_9">13,792</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 6pt;">Deferred income taxes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredIncomeTaxExpenseBenefit" sign="-" scale="3" id="Tc_LL9_1wHWR0uaeirzH5H-Ng_8_3">118,040</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredIncomeTaxExpenseBenefit" sign="-" scale="3" id="Tc_1n4utm6wP0ii3zxn3hpyBg_8_6">651</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredIncomeTaxExpenseBenefit" sign="-" scale="3" id="Tc_xlGAVTsvq0uaalWTK4r-hg_8_9">299</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 6pt;">Share-based compensation expense</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensation" scale="3" id="Tc_BrYTISq7MkWHJ8ifliWtNQ_9_3">22,994</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensation" scale="3" id="Tc_3cwhfhm5gEad5UOgOnJuRw_9_6">15,249</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensation" scale="3" id="Tc_x5H5RIKwQ02B4diEdjnbQw_9_9">12,703</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 6pt;">Loss on extinguishment of debt</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:GainsLossesOnExtinguishmentOfDebt" sign="-" scale="3" id="Tc_GzOUCAQDxE24jKq5VBEhfw_10_6">4,029</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:GainsLossesOnExtinguishmentOfDebt" sign="-" scale="3" id="Tc_A09BIovhh0-RibryTAdMtw_10_9">7,841</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 6pt;">Asset impairment</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AssetImpairmentCharges" scale="3" id="Tc_SirzM4Ii9Ea6Z7aIo9mOtw_11_9">281</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 6pt;">Impairment of equity investments</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="veco:ImpairmentLossesInvestmentsNonCash" scale="3" id="Tc_HbZPknHx90Kz68uz7s77Qg_12_6">980</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 6pt;">Provision for bad debts</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProvisionForDoubtfulAccounts" scale="3" id="Tc_Gg8Ifce2lEmVq-gV41vYNA_13_9">140</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Changes in operating assets and liabilities:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 6pt;">Accounts receivable and contract assets</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="veco:IncreaseDecreaseInAccountsReceivableAndContractAssets" scale="3" id="Tc_hlom21610E6KrRGG8i1l6w_15_3">12,826</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="veco:IncreaseDecreaseInAccountsReceivableAndContractAssets" scale="3" id="Tc_7dUy7vlk_0WvINDIbs3j0g_15_6">26,664</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="veco:IncreaseDecreaseInAccountsReceivableAndContractAssets" scale="3" id="Tc_-No4RtsCQUmPZBlFiDG1Aw_15_9">30,361</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 6pt;">Inventories </p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncreaseDecreaseInInventories" scale="3" id="Tc_n_sBUxM2eUKy1bPJoqi_ag_16_3">37,288</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncreaseDecreaseInInventories" scale="3" id="Tc_3V3AljZGaEegQc9tv1Hwig_16_6">24,803</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncreaseDecreaseInInventories" scale="3" id="Tc_WDGP9eaJi0iNCcDPyHXI7g_16_9">11,528</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 6pt;">Prepaid expenses and other current assets</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets" sign="-" scale="3" id="Tc_AKT37xpZW0qzhA5HhZIWZg_17_3">7,668</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets" sign="-" scale="3" id="Tc_4FSwbq7-xEeI2fEo1arOJA_17_6">7,621</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets" scale="3" id="Tc_d4ueYSsiqECeJSOEm74Mkg_17_9">2,610</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 6pt;">Accounts payable and accrued expenses</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncreaseDecreaseInAccountsPayableAndAccruedLiabilities" sign="-" scale="3" id="Tc_VIZG1OHaSEKdMJ05EokDoA_18_3">13,115</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncreaseDecreaseInAccountsPayableAndAccruedLiabilities" scale="3" id="Tc_W9DOQLKH4EOfophHE947-w_18_6">20,225</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncreaseDecreaseInAccountsPayableAndAccruedLiabilities" scale="3" id="Tc_WbbNy2ovQ0-DuE09z_iLRg_18_9">15,959</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 6pt;">Customer deposits and deferred revenue</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="veco:IncreaseDecreaseInCustomerDepositsAndDeferredRevenue" scale="3" id="Tc_SXD7z9fs-0656JImxo70zw_19_3">64,087</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="veco:IncreaseDecreaseInCustomerDepositsAndDeferredRevenue" sign="-" scale="3" id="Tc_1wOgB4ZOq0m1wpO0sJ9lJg_19_6">4,099</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="veco:IncreaseDecreaseInCustomerDepositsAndDeferredRevenue" scale="3" id="Tc_myDBYtJIkUaV196LSxXdkA_19_9">12,424</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 6pt;">Income taxes receivable and payable, net</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncreaseDecreaseInIncomeTaxesPayableNetOfIncomeTaxesReceivable" scale="3" id="Tc_Aerhuiz2vU-d-cN9h2rStw_20_3">557</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncreaseDecreaseInIncomeTaxesPayableNetOfIncomeTaxesReceivable" scale="3" id="Tc_IyiCZwvMrESXLZYgQJQU1A_20_6">947</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncreaseDecreaseInIncomeTaxesPayableNetOfIncomeTaxesReceivable" scale="3" id="Tc_GTR_-cZFXU2e1OMQAYd-Lg_20_9">86</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 6pt;">Other, net</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncreaseDecreaseInOtherOperatingCapitalNet" sign="-" scale="3" id="Tc_Cg7niJZnOE-Z6Jf8-6ZAig_21_3">897</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncreaseDecreaseInOtherOperatingCapitalNet" sign="-" scale="3" id="Tc_ILXrjT7Umk-r8QrzwuQ5rw_21_6">8,993</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncreaseDecreaseInOtherOperatingCapitalNet" sign="-" scale="3" id="Tc_lc3t-60wiUC4FujW8fWqeQ_21_9">2,287</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Net cash provided by (used in) operating activities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetCashProvidedByUsedInOperatingActivities" scale="3" id="Tc_XRIpErDVd0C4L98U9Kvr2g_22_3">108,483</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetCashProvidedByUsedInOperatingActivities" scale="3" id="Tc_bjR0E-6G9UOfjc2O0NhJYQ_22_6">67,742</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetCashProvidedByUsedInOperatingActivities" scale="3" id="Tc_ZMZahfl3OUy8zu_F0XM1Wg_22_9">43,021</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><b style="font-weight:bold;">Cash Flows from Investing Activities</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Capital expenditures</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PaymentsToAcquirePropertyPlantAndEquipment" scale="3" id="Tc_wLef7Rad7UmbQQDiQB8KEw_25_3">24,604</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PaymentsToAcquirePropertyPlantAndEquipment" scale="3" id="Tc_IRUbS3N5OEa3Mc-7U0tSNQ_25_6">40,643</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PaymentsToAcquirePropertyPlantAndEquipment" scale="3" id="Tc_h8ZWy8MbkEeP5d_kKKqO_Q_25_9">6,802</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Proceeds from the sale of investments</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProceedsFromSaleAndMaturityOfAvailableForSaleSecurities" scale="3" id="Tc_pyjDqmbVEE6EuDG3w4UQCQ_26_3">59,738</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProceedsFromSaleAndMaturityOfAvailableForSaleSecurities" scale="3" id="Tc_QLkSqDKJhE287zBPd-PAyg_26_6">330,702</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProceedsFromSaleAndMaturityOfAvailableForSaleSecurities" scale="3" id="Tc_bR2KyjXrYUuhaWPk85p3AQ_26_9">173,530</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Payments for purchases of investments</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PaymentsToAcquireAvailableForSaleSecuritiesDebt" scale="3" id="Tc_sXQAXCFbaUyNJzpGXZU8og_27_3">104,014</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PaymentsToAcquireAvailableForSaleSecuritiesDebt" scale="3" id="Tc_m__YC2Y_3USN8W7Gu8XCow_27_6">247,256</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PaymentsToAcquireAvailableForSaleSecuritiesDebt" scale="3" id="Tc_GaCnSIVXaket71ouppToNQ_27_9">248,023</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Proceeds from held for sale assets, net of costs to sell</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProceedsFromSaleOfPropertyPlantAndEquipment" scale="3" id="Tc_HfuNyT3CP0irDemtiXpzkg_28_6">1,725</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProceedsFromSaleOfPropertyPlantAndEquipment" scale="3" id="Tc_Lor-6twi1UGWmGCBZETxQg_28_9">9,503</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Net cash provided by (used in) investing activities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetCashProvidedByUsedInInvestingActivities" sign="-" scale="3" id="Tc_e5mjTK9cPUCDPyqHStGLUA_29_3">68,880</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetCashProvidedByUsedInInvestingActivities" scale="3" id="Tc_HKV_jJxf_EOj-8YYRvisgA_29_6">44,528</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetCashProvidedByUsedInInvestingActivities" sign="-" scale="3" id="Tc_vJJoX7_m-02F7_MayecrZg_29_9">71,792</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><b style="font-weight:bold;">Cash Flows from Financing Activities</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Proceeds from issuance of 2027 Notes, net of issuance costs</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProceedsFromConvertibleDebt" scale="3" id="Tc_gyKyp5YDq02OlYlOxci4og_32_9">120,095</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Purchase of capped calls</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PaymentsForDerivativeInstrumentFinancingActivities" scale="3" id="Tc_xp7iRPKR5UCu1AMGFfwG6A_33_9">10,313</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Repurchase of 2023 Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RepaymentsOfUnsecuredDebt" scale="3" id="Tc_n7fo-RfvS0KKY1FnjBlRHQ_34_6">115,604</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RepaymentsOfUnsecuredDebt" scale="3" id="Tc_catOzoD4B0O7e1Is0bCOMg_34_9">81,240</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Debt issuance costs </p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PaymentsOfDebtIssuanceCosts" scale="3" id="Tc_9qQw7lcKtUSAeawZC95Nlw_35_6">835</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Proceeds (net of tax withholdings) from option exercises and employee stock purchase plan</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProceedsFromIssuanceOrSaleOfEquity" scale="3" id="Tc_ui4QFiLMYkuSFBmOSPwJeQ_36_3">3,698</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProceedsFromIssuanceOrSaleOfEquity" scale="3" id="Tc_Mg1DcUEfrk6B_ZBcQdzkbQ_36_6">3,402</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProceedsFromIssuanceOrSaleOfEquity" scale="3" id="Tc_oYLPbIdB8kSuQTkDZM_qIg_36_9">2,878</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Restricted stock tax withholdings</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PaymentsRelatedToTaxWithholdingForShareBasedCompensation" scale="3" id="Tc_4HEwar3fI0alZUU4Q2rXgA_37_3">8,248</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PaymentsRelatedToTaxWithholdingForShareBasedCompensation" scale="3" id="Tc_9IchV-TsgUmH2JWSqSiFVA_37_6">8,992</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PaymentsRelatedToTaxWithholdingForShareBasedCompensation" scale="3" id="Tc_90e2Q4xeNEGePE5UiJ6MYQ_37_9">2,322</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Net cash provided by (used in) financing activities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetCashProvidedByUsedInFinancingActivities" sign="-" scale="3" id="Tc_lz9FG3E6v0abw4BRBR3seg_38_3">4,550</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetCashProvidedByUsedInFinancingActivities" sign="-" scale="3" id="Tc_Yg6-L44mk0WwXJ7YhjmTfQ_38_6">122,029</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetCashProvidedByUsedInFinancingActivities" scale="3" id="Tc_iyauxQPUTEu1Npd7Pkx2Xg_38_9">29,098</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Effect of exchange rate changes on cash and cash equivalents</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations" sign="-" scale="3" id="Tc_tABMCnNlRk-wgryzXRcBsA_39_3">53</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations" sign="-" scale="3" id="Tc_6eGwJwMGA0Ggb0S9Sb3rjA_39_6">52</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations" scale="3" id="Tc_mOrtPHU_V0CWHZiNq0AB6A_39_9">5</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Net increase (decrease) in cash, cash equivalents, and restricted cash</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect" scale="3" id="Tc_T8k3P50bf06GdV3EaENlMg_40_3">35,000</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect" sign="-" scale="3" id="Tc_6M0gq36YlEaIEl2AM_bcBw_40_6">9,811</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect" scale="3" id="Tc_aqhP-jg1tE2dQpM_IBQDcg_40_9">332</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Cash, cash equivalents, and restricted cash - beginning of period</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" scale="3" id="Tc_0X2VKT3MNEyc9zC3F-2Guw_41_3">120,472</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2020_JUGLvBeldEeSTj1WqQBVdQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" scale="3" id="Tc_OurPsPtmIUqyiyeX6s2yDQ_41_6">130,283</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2019_dyqJ8hTIuEW6V2L_RveF0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" scale="3" id="Tc_zOqTTpUjo0SNRLLipeooZw_41_9">129,951</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Cash, cash equivalents, and restricted cash - end of period</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" scale="3" id="Tc_EUDxg7yr_kGWihUlX89jng_42_3">155,472</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" scale="3" id="Tc_rVXm5L-iI0iLrbwK25lpyQ_42_6">120,472</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2020_JUGLvBeldEeSTj1WqQBVdQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" scale="3" id="Tc_QBJVqWD4_UaeOkPUHHqNzw_42_9">130,283</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><b style="font-weight:bold;">Supplemental Disclosure of Cash Flow Information</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 6pt;">Interest paid</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InterestPaidNet" scale="3" id="Tc_6Nd3vGBoIkSnbN-WJTSIWA_45_3">10,139</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InterestPaidNet" scale="3" id="Tc_mLrlsGuidUSeBmtP4kb-tQ_45_6">12,551</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InterestPaidNet" scale="3" id="Tc_8seG9G2ymUCenfvI9v8pVA_45_9">12,700</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 6pt;">Income taxes paid (refunds received)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxesPaidNet" scale="3" id="Tc_s0HPq19luUWKE_fFjewQhQ_46_3">1,434</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxesPaidNet" sign="-" scale="3" id="Tc_Xu5FBzCRzUi6plTKbQ61VQ_46_6">139</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxesPaidNet" scale="3" id="Tc_sGHvzyUxw0GTJrYQ7xO6rA_46_9">329</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><b style="font-weight:bold;">Non-cash activities</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 6pt;">Capital expenditures included in accounts payable and accrued expenses</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CapitalExpendituresIncurredButNotYetPaid" scale="3" id="Tc_ZMOZAmoRY0mY0H27OtvzyQ_48_3">2,285</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CapitalExpendituresIncurredButNotYetPaid" scale="3" id="Tc_KMh9-PpynkyC0ptTG2u-Zw_48_6">9,096</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CapitalExpendituresIncurredButNotYetPaid" scale="3" id="Tc_tjAbRN0GvkaYBJDdEGVzkw_48_9">687</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 6pt;">Net transfer of inventory to property, plant and equipment</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="veco:TransferFromInventories" scale="3" id="Tc_IxyVKra7UE-OoI4U_JzGBw_49_3">1,235</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="veco:TransferFromInventories" sign="-" scale="3" id="Tc__XnfF4xK1kOgEY94A1S5Ug_49_6">63</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="veco:TransferFromInventories" sign="-" scale="3" id="Tc_2rhHrGUAI0i-t-vZ6yuItg_49_9">1,624</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:63.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 6pt;">Right-of-use assets obtained in exchange for lease obligations</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability" scale="3" id="Tc_lCeDWhRaRUCgWgR__IgqLw_50_3">2,938</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability" scale="3" id="Tc_C2ssZjkCHkKPB1e9VroAlw_50_6">23,777</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability" scale="3" id="Tc_Z48Xkgm1Q0Cscn5GpA-11g_50_9">1,741</ix:nonFraction></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">See accompanying Notes to the Consolidated Financial Statements.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="display:none;font-size:12pt;line-height:0pt;margin:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:0pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-8</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 10pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Veeco Instruments Inc. and Subsidiaries</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Notes to Consolidated Financial Statements</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="Note1SignificantAccountingPolicies_23831"></a><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="us-gaap:OrganizationConsolidationBasisOfPresentationBusinessDescriptionAndAccountingPoliciesTextBlock" id="Tb_5PVCQs_i1EyV_1wkOc5PVQ" continuedAt="Tb_5PVCQs_i1EyV_1wkOc5PVQ_cont1" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 1 &#8212; Significant Accounting Policies</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(a) Description of Business</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">Veeco Instruments Inc. (together with its consolidated subsidiaries, &#8220;Veeco,&#8221; or the &#8220;Company&#8221;) operates in a </span><span style="-sec-ix-hidden:Hidden_Q4WTJDpvMEebo8fh1Cmpvw;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">single</span></span><span style="font-size:10pt;"> segment: the development, manufacture, sales, and support of semiconductor and thin film process equipment primarily sold to make electronic devices.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="us-gaap:FiscalPeriod" id="Tb_EuF29X1WMUa8sYQ5HVV5bg" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(b) Basis of Presentation</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">The accompanying audited Consolidated Financial Statements of the Company have been prepared in accordance with United States generally accepted accounting principles (&#8220;GAAP&#8221;). The Company reports interim quarters on a </span><ix:nonNumeric contextRef="Duration_1_1_2022_To_3_31_2022_0YPX1UiA70qTsEBum79vEw" format="ixt-sec:durweek" name="us-gaap:FiscalPeriodDuration" id="Narr_whb30qtGw0KyySS6KqUPig"><ix:nonNumeric contextRef="Duration_4_1_2022_To_6_30_2022_4jkIrP3p20amdiLLzhoJbQ" format="ixt-sec:durweek" name="us-gaap:FiscalPeriodDuration" id="Narr_VMgcZto4fU6BrNwMFJ6htw"><ix:nonNumeric contextRef="Duration_7_1_2022_To_9_30_2022__p_V5234s0incEWW09mArQ" format="ixt-sec:durweek" name="us-gaap:FiscalPeriodDuration" id="Narr_rn0QF3LM-0-mKgSeeEbTHw"><ix:nonNumeric contextRef="Duration_10_1_2022_To_12_31_2022_uExZe-pG7kOQct7OU2J4Dg" format="ixt-sec:durweek" name="us-gaap:FiscalPeriodDuration" id="Narr_I4sLxjrd4E2vqp8E59ddnQ"><span style="font-size:10pt;">13</span></ix:nonNumeric></ix:nonNumeric></ix:nonNumeric></ix:nonNumeric><span style="font-size:10pt;">-week basis ending on the last Sunday of each period, which is determined at the start of each year. The Company&#8217;s fourth quarter always ends on the last day of the calendar year, December 31. During 2022 the interim quarters ended on April 3, July 3, and October 2, and during 2021 the interim quarters ended on April 4, July 4, and October 3. The Company reports these interim quarters as March 31, June 30, and September 30 in its interim consolidated financial statements.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></ix:nonNumeric><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="us-gaap:UseOfEstimates" id="Tb_c_K4iyUXL0OENVMl7f04Ug" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(c) Use of Estimates</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The preparation of financial statements in conformity with GAAP requires management to make estimates and assumptions that affect the amounts reported in the financial statements and accompanying notes. Although these estimates are based on management&#8217;s knowledge of current events and actions it may undertake in the future, these estimates may ultimately differ from actual results. Significant items subject to such estimates and assumptions include: (i) stand-alone selling prices for the Company&#8217;s products and services; (ii) allowances for doubtful accounts; (iii) inventory obsolescence; (iv) the useful lives and expected future cash flows of property, plant, and equipment and identifiable intangible assets; (v) the fair value of the Company&#8217;s reporting unit and related goodwill; (vi) investment valuations and the valuation of derivatives, deferred tax assets, and assets acquired in business combinations; (vii) the recoverability of long-lived assets; (viii) liabilities for product warranty and legal contingencies; (ix) share-based compensation; (x) lease term and incremental borrowing rates used in determining operating lease assets and liabilities; and (xi) income tax uncertainties.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></ix:nonNumeric><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="us-gaap:ConsolidationPolicyTextBlock" id="Tb_3IaUCzpF_E-ZptCXD2LYDQ" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(d) Principles of Consolidation</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Consolidated Financial Statements include the accounts of the Company and its subsidiaries. Intercompany balances and transactions have been eliminated in consolidation. Companies acquired during each reporting period are reflected in the results of the Company effective from their respective dates of acquisition through the end of the reporting period.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></ix:nonNumeric><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="us-gaap:ForeignCurrencyTransactionsAndTranslationsPolicyTextBlock" id="Tb_rn8M8MnSrEyRibLvPEPudg" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(e) Foreign Currencies</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Assets and liabilities of the Company&#8217;s foreign subsidiaries that operate using functional currencies other than the U.S. dollar are translated using the exchange rates in effect at the balance sheet date. Results of operations are translated using monthly average exchange rates. Adjustments arising from the translation of the foreign currency financial statements of the Company&#8217;s subsidiaries into U.S. dollars, including intercompany transactions of a long-term nature, are reported as currency translation adjustments in &#8220;Accumulated other comprehensive income&#8221; in the Consolidated Balance Sheets. Foreign currency transaction gains or losses are included in &#8220;Other operating expense (income), net&#8221; in the Consolidated Statements of Operations.</p></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="us-gaap:RevenueFromContractWithCustomerPolicyTextBlock" id="Tb_kTCO7ywdPke62MmitI6A4g" continuedAt="Tb_kTCO7ywdPke62MmitI6A4g_cont1" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(f) Revenue Recognition</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Revenue is recognized upon the transfer of control of the promised product or service to the customer in an amount that reflects the consideration the Company expects to receive in exchange for such product or service. The Company&#8217;s contracts with customers generally do not contain variable consideration. In the rare instances where variable consideration is included, the Company estimates the amount of variable consideration and determines what portion of </p></ix:nonNumeric></ix:nonNumeric></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-9</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Veeco Instruments&#160;Inc. and Subsidiaries</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Notes to Consolidated Financial Statements (Continued)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;max-width:100%;position:relative;"><ix:continuation id="Tb_5PVCQs_i1EyV_1wkOc5PVQ_cont1" continuedAt="Tb_5PVCQs_i1EyV_1wkOc5PVQ_cont2"><ix:continuation id="Tb_kTCO7ywdPke62MmitI6A4g_cont1" continuedAt="Tb_kTCO7ywdPke62MmitI6A4g_cont2"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">that, if any, has a high probability of significant subsequent revenue reversal, and if so, that amount is excluded from the transaction price. The Company&#8217;s contracts with customers frequently contain multiple deliverables, such as systems, upgrades, components, spare parts, installation, maintenance, and service plans. Judgment is required to properly identify the performance obligations within a contract and to determine how the revenue should be allocated among the performance obligations. The Company also evaluates whether multiple transactions with the same customer or related parties should be considered part of a single contract based on an assessment of whether the contracts or agreements are negotiated or executed within a short time frame of each other or if there are indicators that the contracts are negotiated in contemplation of one another. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160; </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">When there are separate units of accounting, the Company allocates revenue to each performance obligation on a relative stand-alone selling price basis. The stand-alone selling prices are determined based on the prices at which the Company separately sells the systems, upgrades, components, spare parts, installation, maintenance, and service plans. For items that are not sold separately, the Company estimates stand-alone selling prices generally using an expected cost plus margin approach. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160; </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Most of the Company&#8217;s revenue is recognized at a point in time when the performance obligation is satisfied. The Company considers many facts when evaluating each of its sales arrangements to determine the timing of revenue recognition, including its contractual obligations and the nature of the customer&#8217;s post-delivery acceptance provisions. The Company&#8217;s system sales arrangements, including certain upgrades, generally include field acceptance provisions that may include functional or mechanical test procedures. For many of these arrangements, a customer source inspection of the system is performed in the Company&#8217;s facility, test data is sent to the customer documenting that the system is functioning to the agreed upon specifications prior to delivery, or other quality assurance testing is performed internally to ensure system functionality prior to shipment. Historically, such source inspection or test data replicates the field acceptance provisions that are performed at the customer&#8217;s site prior to final acceptance of the system. When the Company objectively demonstrates that the criteria specified in the contractual acceptance provisions are achieved prior to delivery either through customer testing or the Company&#8217;s historical experience of its tools meeting specifications, transfer of control of the product to the customer is considered to have occurred and revenue is recognized upon system delivery since there is no substantive contingency remaining related to the acceptance provisions at that date. For new products, new applications of existing products, or for products with substantive customer acceptance provisions where the Company cannot objectively demonstrate that the criteria specified in the contractual acceptance provisions have been achieved prior to delivery, revenue and the associated costs are deferred. The Company recognizes such revenue and costs upon obtaining objective evidence that the acceptance provisions can be achieved, assuming all other revenue recognition criteria have been met. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160; </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">In certain cases, the Company&#8217;s contracts with customers contain a billing retention, which is billed by the Company and payable by the customer when field acceptance provisions are completed. Revenue recognized in advance of the amount that has been billed is recorded as a contract asset on the Consolidated Balance Sheets. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160; </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company recognizes revenue related to maintenance and service contracts over time based upon the respective contract term. Installation revenue is recognized over time as the installation services are performed. The Company recognizes revenue from the sales of components, spare parts, and specified service engagements at a point in time, which is typically consistent with the time of delivery in accordance with the terms of the applicable sales arrangement. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160; </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">The Company may receive customer deposits on system transactions. The timing of the transfer of goods or services related to the deposits is either at the discretion of the customer or expected to be within one year from the deposit receipt. As such, the Company does not adjust transaction prices for the time value of money. Incremental direct costs incurred related to the acquisition of a customer contract, such as sales commissions, are expensed as incurred since the expected performance period is </span><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" format="ixt:booleantrue" name="us-gaap:RevenuePracticalExpedientIncrementalCostOfObtainingContract" id="Narr_fgJS1jRFjECK9sOKsiF2ig"><span style="font-size:10pt;">one</span></ix:nonNumeric><span style="font-size:10pt;"> year or less. </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160; </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company has elected to treat shipping and handling costs, including those costs incurred to move, package, and prepare the Company&#8217;s products for shipment and to move the products to a customer&#8217;s designated location, as a </p></ix:continuation></ix:continuation></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-10</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Veeco Instruments&#160;Inc. and Subsidiaries</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Notes to Consolidated Financial Statements (Continued)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;max-width:100%;position:relative;"><ix:continuation id="Tb_5PVCQs_i1EyV_1wkOc5PVQ_cont2" continuedAt="Tb_5PVCQs_i1EyV_1wkOc5PVQ_cont3"><ix:continuation id="Tb_kTCO7ywdPke62MmitI6A4g_cont2"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">fulfillment activity, and the Company includes such costs in &#8220;Cost of sales&#8221; in the Consolidated Statements of Operations as incurred. These costs are generally comprised of payments to third-party shippers. Taxes assessed by governmental authorities that are collected by the Company from a customer are excluded from revenue. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></ix:continuation><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="us-gaap:StandardProductWarrantyPolicy" id="Tb_E6a-pGzjBEyeLoyUtz-lAg" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(g) Warranty Costs</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">The Company typically provides standard warranty coverage on its systems for </span><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" format="ixt-sec:durwordsen" name="veco:ProductWarrantyPeriod" id="Narr_q3jajAIXEkOIb0p6YNLVQA"><span style="font-size:10pt;">one year</span></ix:nonNumeric><span style="font-size:10pt;"> from the date of final acceptance by providing labor and parts necessary to repair the systems during the warranty period. The Company records the estimated warranty cost when revenue is recognized on the related system. Warranty cost is included in &#8220;Cost of sales&#8221; in the Consolidated Statements of Operations. The estimated warranty cost is based on the Company&#8217;s historical experience with its systems and regional labor costs. The Company calculates the average service hours by region and parts expense per system utilizing actual service records to determine the estimated warranty charge. The Company updates its warranty estimates on a quarterly basis when the actual product performance or field expense differs from original estimates.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></ix:nonNumeric><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="us-gaap:ResearchAndDevelopmentExpensePolicy" id="Tb_neLegiqu906FDsvTLe_RCQ" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(h) Research and Development Costs</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Research and development costs are expensed as incurred and include charges for the development of new technology and the transition of existing technology into new products or services.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></ix:nonNumeric><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="us-gaap:AdvertisingCostsPolicyTextBlock" id="Tb_n1tCniTHUkyfTQt30jYaQA" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(i) Advertising Expense</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The cost of advertising is expensed as incurred and totaled $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:AdvertisingExpense" scale="6" id="Narr_W7MCsC1QgUaZ-3YPoYevDw">0.3</ix:nonFraction> million, $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:AdvertisingExpense" scale="6" id="Narr_vUacBBCfIU-n8rzAsUiR6w">0.3</ix:nonFraction> million, and $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:AdvertisingExpense" scale="6" id="Narr_32QD8RPZukm3us2DE-BIyQ">0.4</ix:nonFraction> million for the years ended December 31, 2022, 2021, and 2020, respectively.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></ix:nonNumeric><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="us-gaap:ShareBasedCompensationOptionAndIncentivePlansPolicy" id="Tb_Md0g_N4rwka5UClTp3gZKA" continuedAt="Tb_Md0g_N4rwka5UClTp3gZKA_cont1" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(j) Accounting for Share-based Compensation</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Share-based awards exchanged for employee services are accounted for under the fair value method. Accordingly, share-based compensation cost is measured at the grant date based on the estimated fair value of the award. The expense for awards is recognized over the employee&#8217;s requisite service period (generally the vesting period of the award). The Company has elected to treat awards with only service conditions and with graded vesting as <ix:nonFraction unitRef="Unit_Standard_item_aj1ZEHofC0agSXOi_C6c5A" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="INF" format="ixt-sec:numwordsen" name="veco:ShareBasedCompensationArrangementByShareBasedPaymentAwardServiceConditionsAndGradedVestingNumberOfAwards" scale="0" id="Narr_Dop9sRHEGU6s47_W3v7Dmw">one</ix:nonFraction> award. Consequently, the total compensation expense is recognized straight-line over the entire vesting period, so long as the compensation cost recognized at any date at least equals the portion of the grant date fair value of the award that is vested at that date.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">In addition to stock options, restricted share awards (&#8220;RSAs&#8221;) and restricted stock units (&#8220;RSUs&#8221;) with time-based vesting, the Company grants performance share units and awards (&#8220;PSUs&#8221; and &#8220;PSAs&#8221;) that have either performance or market conditions. Compensation cost for PSUs and PSAs with performance conditions is recognized over the requisite service period based on the timing and expected level of achievement of the performance targets. A change in the assessment of performance attainment prior to the conclusion of the performance period is recognized in the period of the change in estimate. Compensation cost for PSUs and PSAs with market conditions is recognized over the requisite service period regardless of the expected level of achievement. For all PSUs and PSAs, the number of shares issued to the employee at the conclusion of the service period may vary from the original target based upon the level of attainment of the performance or market conditions.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company uses the Black-Scholes option-pricing model to compute the estimated fair value of option awards and purchase rights under the Employee Stock Purchase Plan. The Company uses a Monte Carlo simulation to compute the estimated fair value of awards with market conditions. The Black-Scholes model and Monte Carlo simulation include assumptions regarding dividend yields, expected volatility, expected option term, and risk-free interest rates. See Note 12, &#8220;Stock Plans,&#8221; for additional information. </p></ix:nonNumeric></ix:continuation></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-11</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Veeco Instruments&#160;Inc. and Subsidiaries</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Notes to Consolidated Financial Statements (Continued)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;max-width:100%;position:relative;"><ix:continuation id="Tb_5PVCQs_i1EyV_1wkOc5PVQ_cont3" continuedAt="Tb_5PVCQs_i1EyV_1wkOc5PVQ_cont4"><ix:continuation id="Tb_Md0g_N4rwka5UClTp3gZKA_cont1"></ix:continuation><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="us-gaap:IncomeTaxPolicyTextBlock" id="Tb_bg71ARZAcUGigGBow0ySVA" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(k) Income Taxes</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Income taxes are accounted for under the asset and liability method. Deferred tax assets and liabilities are recognized for the future tax consequences attributable to differences between the financial statement carrying amounts of existing assets and liabilities and their respective tax bases and operating loss and tax credit carryforwards. Deferred tax assets and liabilities are measured using enacted tax rates expected to apply to taxable income in the years in which those temporary differences are expected to be recovered or settled. The effect on deferred tax assets and liabilities from a change in tax rate is recognized in income in the period that includes the enactment date. A valuation allowance is provided for deferred tax assets if it is more likely than not that these items will not be realized, which is dependent upon the generation of future taxable income.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></ix:nonNumeric><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="us-gaap:ConcentrationRiskCreditRisk" id="Tb_st5Rna0Tv06B1zmUwItAYg" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(l) Concentration of Credit Risk</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Financial instruments that potentially subject the Company to concentrations of credit risk consist primarily of cash and cash equivalents, investments, derivative financial instruments used in hedging activities, and accounts receivable. The Company invests in a variety of financial instruments and, by policy, limits the amount of credit exposure with any one financial institution or commercial issuer. Historically, the Company has not experienced any material credit losses on its investments. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company maintains an allowance reserve for potentially uncollectible accounts for estimated losses resulting from the inability of its customers to make required payments. The Company evaluates its allowance for doubtful accounts based on a combination of factors. In circumstances where specific invoices are deemed to be uncollectible, the Company provides a specific allowance for bad debt against the amount due to reduce the net recognized receivable to the amount reasonably expected to be collected. The Company also provides allowances based on its write-off history. Finally, the Company also considers its current expectations of future economic conditions, including the impact of COVID-19, when estimating its allowance for doubtful accounts. The allowance for doubtful accounts totaled $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:AllowanceForDoubtfulAccountsReceivableCurrent" scale="6" id="Narr_f5VvQiKbXEi0bL3OQYqn6g"><ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:AllowanceForDoubtfulAccountsReceivableCurrent" scale="6" id="Narr_8mCi4OjlGkSwlCZf7N_hTA">0.7</ix:nonFraction></ix:nonFraction> million at both December 31, 2022 and 2021.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">To further mitigate the Company&#8217;s exposure to uncollectable accounts, the Company may request certain customers provide a negotiable irrevocable letter of credit drawn on a reputable financial institution. These irrevocable letters of credit are typically issued to mature between </span><span style="-sec-ix-hidden:Hidden_X77IvS7lk0evd8U-l6qM4w;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">zero</span></span><span style="font-size:10pt;"> and </span><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" format="ixt-sec:durwordsen" name="veco:IrrevocableLettersOfCreditMaturityPeriodMaximum" id="Narr_9HHScDwOuUKW0jC7y5pSgg"><span style="font-size:10pt;">90 days</span></ix:nonNumeric><span style="font-size:10pt;"> from the date the documentation requirements are met, typically when a system ships or upon receipt of final acceptance from the customer. The Company, at its discretion, may monetize these letters of credit on a non-recourse basis after they become negotiable but before maturity. The fees associated with the monetization are included in &#8220;Selling, general, and administrative&#8221; in the Consolidated Statements of Operations and were immaterial for the years ended December 31, 2022, 2021, and 2020.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></ix:nonNumeric><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="us-gaap:FairValueOfFinancialInstrumentsPolicy" id="Tb_hGOnRvqZ7kmX6E81qtU3PA" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(m) Fair Value of Financial Instruments</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The carrying amounts of financial instruments, including cash equivalents, accounts receivable, accounts payable, and accrued expenses reflected in the consolidated financial statements approximate fair value due to their short-term maturities. The fair value of debt for footnote disclosure purposes, including current maturities, if any, is estimated using recently quoted market prices of the instrument, or if not available, a discounted cash flow analysis based on the estimated current incremental borrowing rates for similar types of instruments.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></ix:nonNumeric><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="veco:CashCashEquivalentsAndShortTermInvestmentsPolicyTextBlock" id="Tb_oHHjapgke0K4AT5E6orrHA" continuedAt="Tb_oHHjapgke0K4AT5E6orrHA_cont1" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(n) Cash, Cash Equivalents, and Short-term Investments</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">All financial instruments purchased with an original maturity of three months or less at the time of purchase are considered cash equivalents. Such items may include liquid money market funds, certificate of deposit and time deposit accounts, U.S. treasuries, government agency securities, and corporate debt. Investments that are classified as cash equivalents are carried at cost, which approximates fair value. The Company&#8217;s cash and cash equivalents includes $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:CashEquivalentsAtCarryingValue" scale="6" id="Narr_LCmpXcK5BUi0ebMtvjXxpg">61.5</ix:nonFraction> million and $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:CashEquivalentsAtCarryingValue" scale="6" id="Narr_LA3B974vPUOCqLkwrgY4sw">41.7</ix:nonFraction> million of cash equivalents at December 31, 2022 and 2021, respectively.</p></ix:nonNumeric></ix:continuation></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-12</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Veeco Instruments&#160;Inc. and Subsidiaries</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Notes to Consolidated Financial Statements (Continued)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="_Hlk533770"></a><ix:continuation id="Tb_5PVCQs_i1EyV_1wkOc5PVQ_cont4" continuedAt="Tb_5PVCQs_i1EyV_1wkOc5PVQ_cont5"><ix:continuation id="Tb_oHHjapgke0K4AT5E6orrHA_cont1"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">A portion of the Company&#8217;s cash and cash equivalents is held by its subsidiaries throughout the world, frequently in each subsidiary&#8217;s respective functional currency, which is typically the U.S. dollar. Approximately <ix:nonFraction unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="2" format="ixt:numdotdecimal" name="veco:CashAndCashEquivalentsMaintainedOutsideBySubsidiariesAsPercent" scale="-2" id="Narr_3Orn6IzIlk-a-iyUkEgalQ">18</ix:nonFraction>% and <ix:nonFraction unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="2" format="ixt:numdotdecimal" name="veco:CashAndCashEquivalentsMaintainedOutsideBySubsidiariesAsPercent" scale="-2" id="Narr_ghlvh9im2UuDKT8kbC4orw">32</ix:nonFraction>% of cash and cash equivalents were maintained outside the United States at December 31, 2022 and 2021, respectively.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Short-term investments consist of marketable debt securities, and are generally classified as available-for-sale for use in current operations, if required, and are reported at fair value, with unrealized gains and losses, net of tax, presented as a separate component of stockholders&#8217; equity under the caption &#8220;Accumulated other comprehensive income&#8221; on the Consolidated Balance Sheets. These securities can include U.S. treasuries, government agency securities, corporate debt, and commercial paper, all with maturities of greater than three months when purchased. All realized gains and losses and unrealized losses resulting from declines in fair value that are other than temporary are included in &#8220;Other operating expense (income), net&#8221; in the Consolidated Statements of Operations. The specific identification method is used to determine the realized gains and losses on investments. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Non-marketable equity securities are equity securities without readily observable market prices and are included in &#8220;Other assets&#8221; in the Consolidated Balance Sheets. Non-marketable securities are measured at cost, adjusted for changes in observable prices minus impairment. Changes in fair value and impairment charges are included in &#8220;Other income (expense), net&#8221; in the Consolidated Statements of Operations.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></ix:continuation><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="us-gaap:InventoryPolicyTextBlock" id="Tb_RpT2fxhtGk63JPOO_r8f0Q" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(o) Inventories</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Inventories are stated at the lower of cost or net realizable value, with cost determined on a first-in, first-out basis. Each quarter the Company assesses the valuation and recoverability of all inventories: materials (raw materials, spare parts, and service inventory); work-in-process; and finished goods. Obsolete inventory or inventory in excess of management&#8217;s estimated usage requirement is written down to its estimated net realizable value if less than cost. The Company evaluates usage requirements by analyzing historical usage, anticipated demand, alternative uses of materials, and other qualitative factors. Unanticipated changes in demand for the Company&#8217;s products may require a write down of inventory, which would be reflected in cost of sales in the period the revision is made. Inventory acquired as part of a business combination is recorded at fair value on the date of acquisition.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></ix:nonNumeric><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="us-gaap:BusinessCombinationsPolicy" id="Tb_pErflwA9G0WS8ZeHT5sliQ" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(p) Business Combinations</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company allocates the fair value of the purchase consideration of the Company&#8217;s acquisitions to the tangible assets, intangible assets, including in-process research and development (&#8220;IPR&amp;D&#8221;), if any, and liabilities assumed, based on estimated fair values. The excess of the fair value of purchase consideration over the fair values of these identifiable assets and liabilities is recorded as goodwill. Acquisition-related expenses are recognized separately from the business combination and are expensed as incurred. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></ix:nonNumeric><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="us-gaap:GoodwillAndIntangibleAssetsIntangibleAssetsIndefiniteLivedPolicy" id="Tb_UuHw7PoEoEGwf4Dwngg2Rw" continuedAt="Tb_UuHw7PoEoEGwf4Dwngg2Rw_cont1" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(q) Goodwill and Indefinite-Lived Intangible Assets</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Goodwill is an asset representing the future economic benefits arising from assets acquired in a business combination that are not individually identified and separately recognized. Goodwill is measured as the excess of the consideration transferred over the net fair value of identifiable assets acquired and liabilities assumed. Intangible assets with indefinite useful lives are measured at their respective fair values on the acquisition date. Intangible assets related to IPR&amp;D projects are considered to be indefinite-lived until the completion or abandonment of the associated research and development (&#8220;R&amp;D&#8221;) efforts. If and when development is complete, the associated assets would be deemed long-lived and would then be amortized based on their respective estimated useful lives at that point in time. Goodwill and indefinite-lived intangibles are not amortized into results of operations but instead are evaluated for impairment. The Company performs the evaluation in the beginning of the fourth quarter of each year or more frequently if impairment indicators arise.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></ix:nonNumeric></ix:continuation></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-13</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Veeco Instruments&#160;Inc. and Subsidiaries</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Notes to Consolidated Financial Statements (Continued)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;max-width:100%;position:relative;"><ix:continuation id="Tb_5PVCQs_i1EyV_1wkOc5PVQ_cont5" continuedAt="Tb_5PVCQs_i1EyV_1wkOc5PVQ_cont6"><ix:continuation id="Tb_UuHw7PoEoEGwf4Dwngg2Rw_cont1"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">In testing goodwill for impairment, the Company may first perform a qualitative assessment of whether it is more likely than not that the reporting unit&#8217;s fair value is less than its carrying amount, and, if so, the Company then quantitatively compares the fair value of the reporting unit to its carrying amount. If the fair value exceeds the carrying amount, goodwill is not impaired. If the carrying amount exceeds fair value, the Company then records an impairment loss equal to the difference, up to the carrying value of goodwill.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">The Company determines the fair value of its reporting unit based on a reconciliation of the fair value of the reporting unit to the Company&#8217;s adjusted market capitalization. The adjusted market capitalization is calculated by multiplying the average share price of the Company&#8217;s common stock for the last </span><span style="-sec-ix-hidden:Hidden_lu4ZbA0J8kKBzBR2b7i9TA;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">ten</span></span><span style="font-size:10pt;"> trading days prior to the measurement date by the number of outstanding common shares and adding a control premium. The control premium is estimated using historical transactions in similar industries.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">In testing indefinite-lived intangible assets for impairment, the Company may first perform a qualitative assessment of whether it is more likely than not that the fair value of the indefinite-lived intangible asset is less than its carrying amount, and, if so, the Company then quantitatively compares the fair value of the indefinite-lived intangible asset to its carrying amount. The Company determines the fair value of its indefinite-lived intangible assets using a discounted cash flow method.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></ix:continuation><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="veco:LongLivedAssetsAndCostMethodInvestmentsPolicyTextBlock" id="Tb_rbFI7ZnyQ0maZCTvLYVR5g" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(r) Long-lived Assets</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Long-lived intangible assets consist of purchased technology, customer relationships, patents, trademarks and tradenames, and backlog and are initially recorded at fair value. Long-lived intangible assets are amortized over their estimated useful lives in a method reflecting the pattern in which the economic benefits are consumed or straight-lined if such pattern cannot be reliably determined.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Property, plant, and equipment are recorded at cost. Depreciation expense is calculated based on the estimated useful lives of the assets by using the straight-line method. Amortization of leasehold improvements is recognized using the straight-line method over the shorter of the remaining lease term or the estimated useful lives of the improvements.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Long-lived assets are reviewed for impairment whenever events or changes in circumstances indicate that the carrying amount of an asset may not be recoverable. If circumstances require a long-lived asset or asset group be tested for possible impairment, a recoverability test is performed utilizing undiscounted cash flows expected to be generated by that asset or asset group compared to its carrying amount. If the carrying amount of the long-lived asset or asset group is not recoverable on an undiscounted cash flow basis, impairment is recognized to the extent the carrying amount exceeds its fair value. Fair value is determined through various valuation techniques including discounted cash flow models or, when available, quoted market values and third-party appraisals.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></ix:nonNumeric><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="us-gaap:LesseeLeasesPolicyTextBlock" id="Tb_GvpqQS9lrEuXKwWMgguhvQ" continuedAt="Tb_GvpqQS9lrEuXKwWMgguhvQ_cont1" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(s) Leases</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company determines at contract inception if an arrangement is a lease, or contains a lease, of an identified asset for which the Company has the right to obtain substantially all of the economic benefits from its use and the right to direct its use. Right-of-use (&#8220;ROU&#8221;) assets represent the Company&#8217;s right to use an underlying asset for the lease term, while lease liabilities represent the Company&#8217;s obligation to make lease payments arising from the lease. Operating lease ROU assets and liabilities are recognized at lease commencement date based on the present value of lease payments over the lease term. The implicit discount rate in the Company&#8217;s leases generally cannot readily be determined, and therefore the Company uses its incremental borrowing rate based on information available at lease commencement date in determining the present value of future payments. The Company has options to renew or terminate certain leases. These options are included in the determination of lease term when it is reasonably certain that the Company will exercise such options. The Company does not separate lease and non-lease components in determining ROU assets or lease liabilities for real estate leases. Additionally, the Company does not recognize ROU assets or lease liabilities for leases with original terms or renewals of one year or less.</p></ix:nonNumeric></ix:continuation></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-14</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Veeco Instruments&#160;Inc. and Subsidiaries</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Notes to Consolidated Financial Statements (Continued)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="_e2455100_8f5d_4133_abd4_81e0cc59ddfa"></a><a id="Tc_cJOo8WXew06sbg8EYNyAsA_1_2"></a><a id="Tc_WCmH638F60-AUD7VPwiGhw_1_5"></a><a id="Tc_6zXPQeMyiUaxv2BIVvDQrQ_1_8"></a><a id="Tc_S5Rje_8cZkKmAWdDwolG3g_2_2"></a><a id="Tc_3_LA3NSLkE-xY6OfP_P7rA_3_0"></a><a id="Tc_2ZhVCcuqp0Sq0YxCRywwjQ_4_0"></a><a id="Tc_lJAII_SaO0qTO1GEpENQlg_4_2"></a><a id="Tc_-pjMVjMpp0ey_SO3j2Ff_A_4_5"></a><a id="Tc_Pk6GteTLf0-2wX_NpRcD_Q_4_8"></a><a id="Tc_NaygOnveW0mQHCRKq9pzsA_5_0"></a><a id="Tc_dRvzgVsUuUSH5BUy0V2Wrw_6_0"></a><a id="_6d0bf8d2_db40_452a_bb97_dedef6c16a41"></a><a id="Tc_c-WeI0_1IEOyQtfxzr9Ywg_1_1"></a><a id="Tc_0szzXE7nw0ysEDf9wghgBA_2_1"></a><a id="Tc_lSKtxSOwGEOq1FKv0IAt2w_2_4"></a><a id="Tc_aMEfSIAORU6wp0oOKiifHA_3_1"></a><a id="Tc_-E9FQlO6d02LX-KZlDfFSQ_3_4"></a><a id="Tc_akqD5k62Z0GNAX5GDAbIrw_3_7"></a><a id="Tc__MJZ3Z9HT0etv6CZywUPjw_4_0"></a><a id="Tc_s7ix1IHEC0GJhc45v-X1xg_5_0"></a><a id="Tc_Iefp2pNtokS48cA9NhQg1w_5_1"></a><a id="Tc_rzJbnykB8kiDXeKQ3Nns8g_5_4"></a><a id="Tc__lYjaaz4JUKYlVyNxBp_MQ_5_7"></a><a id="Tc_xYhu9j1LYEGd0QHndbNxvA_6_0"></a><ix:continuation id="Tb_5PVCQs_i1EyV_1wkOc5PVQ_cont6"><ix:continuation id="Tb_GvpqQS9lrEuXKwWMgguhvQ_cont1"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></ix:continuation><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="us-gaap:NewAccountingPronouncementsPolicyPolicyTextBlock" id="Tb_O26VRqkueE-HiRRQwqFU4Q" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(t) Recently Adopted Accounting Standards</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">The Company </span><ix:nonNumeric contextRef="As_Of_4_1_2020_us-gaap_AdjustmentsForNewAccountingPronouncementsAxis_us-gaap_AccountingStandardsUpdate201912Member_pNbALjFiLEiNFwxB8zN-cA" format="ixt:booleantrue" name="us-gaap:ChangeInAccountingPrincipleAccountingStandardsUpdateAdopted" id="Narr_19yUcShxj0GzpGBhaJw24g"><span style="font-size:10pt;">adopted</span></ix:nonNumeric><span style="font-size:10pt;"> ASU 2019-12:&#160;</span><i style="font-size:10pt;font-style:italic;">Income Taxes (Topic 740): Simplifying the Accounting for Income Taxes </i><span style="font-size:10pt;">in the second quarter of 2020, effective as of the beginning of fiscal year 2020. This ASU simplifies the accounting for income taxes by eliminating certain exceptions to the general principles and simplifying several aspects of ASC 740,&#160;</span><i style="font-size:10pt;font-style:italic;">Income Taxes,&#160;</i><span style="font-size:10pt;">including, but not limited to, requirements related to the following: a) exception to the incremental approach for intraperiod tax allocation; b) the tax basis step-up in goodwill obtained in a transaction that is not a business combination; c) ownership changes in investments - changes from a subsidiary to an equity method investment; d) separate financial statements of entities not subject to tax; e) interim-period accounting for enacted changes in tax law; and f) the year-to-date loss limitation in interim-period tax accounting. The adoption did not have a material impact on the Company&#8217;s consolidated financial statements as of the date of adoption.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">The Company </span><ix:nonNumeric contextRef="As_Of_1_1_2022_us-gaap_AdjustmentsForNewAccountingPronouncementsAxis_us-gaap_AccountingStandardsUpdate202006Member_YriApdcwvUG3B-95OCDPfg" format="ixt:booleantrue" name="us-gaap:ChangeInAccountingPrincipleAccountingStandardsUpdateAdopted" id="Narr_F5cFL8Pw0EW3FaIzX9Fe1A"><span style="font-size:10pt;">adopted</span></ix:nonNumeric><span style="font-size:10pt;"> ASU 2020-06: </span><i style="font-size:10pt;font-style:italic;">Debt &#8211; Debt with Conversion and Other Options (Subtopic 470-20) and Derivatives and Hedging &#8211; Contracts in Entity&#8217;s Own Equity (Subtopic 815-40): Accounting for Convertible Instruments and Contracts in an Entity&#8217;s Own Equity</i><span style="font-size:10pt;"> on January 1, 2022, using the </span><span style="-sec-ix-hidden:Hidden_kuYE2HfeWkSfBndNPXMkng;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">modified retrospective method</span></span><span style="font-size:10pt;"> for all financial instruments that were outstanding as of the adoption date. This standard simplifies the accounting for convertible debt instruments by removing the separation models for convertible debt with a cash conversion feature, as well as convertible instruments with a beneficial conversion feature. As a result, entities will account for a convertible debt instrument wholly as debt, unless certain other conditions are met. The elimination of these models reduces non-cash interest expense for entities that have issued a convertible instrument that was within the scope of those models before the adoption of ASU 2020-06, such as the Company&#8217;s 2023 Notes, 2025 Notes, and 2027 Notes. Additionally, ASU 2020-06 requires the application of the if-converted method for calculating diluted earnings per share, and precludes the use of the treasury stock method for certain debt instruments, such as the Company&#8217;s 2023 Notes, 2025 Notes, and 2027 Notes.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="us-gaap:ScheduleOfNewAccountingPronouncementsAndChangesInAccountingPrinciplesTextBlock" id="Tb_HUByP5em4UGlAH1HcT7eJQ" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The adoption of ASU 2020-06 resulted in the following adjustments to the Consolidated Balance Sheets:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:61.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:1.44%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:12.04%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.11%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:10.13%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:61.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.33%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, 2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:10.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Adoption of </b><b style="font-weight:bold;"><br /></b><b style="font-weight:bold;">ASU 2020-06</b></p></td><td style="vertical-align:bottom;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">January 1, 2022</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="10" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:61.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:36.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">&#160;(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:61.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Balance Sheet line item:</b></p></td><td style="vertical-align:bottom;width:1.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:61.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Long-term debt</p></td><td style="vertical-align:bottom;width:1.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LongTermDebtNoncurrent" scale="3" id="Tc_qCsZJez2HkeN1BZTHwRgRw_4_3">229,438</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_srt_CumulativeEffectPeriodOfAdoptionAxis_srt_CumulativeEffectPeriodOfAdoptionAdjustmentMember_us-gaap_AdjustmentsForNewAccountingPronouncementsAxis_us-gaap_AccountingStandardsUpdate202006Member_uQc4nJTxR0OEJlucArTKOA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LongTermDebtNoncurrent" scale="3" id="Tc_EYDoZ_CvAUCteT1f3HgRbw_4_6">44,260</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_srt_CumulativeEffectPeriodOfAdoptionAxis_srt_CumulativeEffectPeriodOfAdoptionAdjustedBalanceMember_us-gaap_AdjustmentsForNewAccountingPronouncementsAxis_us-gaap_AccountingStandardsUpdate202006Member_LzmwhGpHdUa1ilaCnrJETw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LongTermDebtNoncurrent" scale="3" id="Tc_gZGO_q6LEk6aRXjKIuzySw_4_9">273,698</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:61.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Additional paid-in capital</p></td><td style="vertical-align:bottom;width:1.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AdditionalPaidInCapitalCommonStock" scale="3" id="Tc_IlZcNPshpkyDCrdranspNA_5_3">1,116,921</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_srt_CumulativeEffectPeriodOfAdoptionAxis_srt_CumulativeEffectPeriodOfAdoptionAdjustmentMember_us-gaap_AdjustmentsForNewAccountingPronouncementsAxis_us-gaap_AccountingStandardsUpdate202006Member_uQc4nJTxR0OEJlucArTKOA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AdditionalPaidInCapitalCommonStock" sign="-" scale="3" id="Tc_aAaT1Qq66UqFlpPCGZQe6Q_5_6">56,800</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_srt_CumulativeEffectPeriodOfAdoptionAxis_srt_CumulativeEffectPeriodOfAdoptionAdjustedBalanceMember_us-gaap_AdjustmentsForNewAccountingPronouncementsAxis_us-gaap_AccountingStandardsUpdate202006Member_LzmwhGpHdUa1ilaCnrJETw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AdditionalPaidInCapitalCommonStock" scale="3" id="Tc_3TZVE_i7Y0OGHh2_cN2zIA_5_9">1,060,121</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:61.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Accumulated deficit</p></td><td style="vertical-align:bottom;width:1.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RetainedEarningsAccumulatedDeficit" sign="-" scale="3" id="Tc_oWmpWhr-YE2XsiZ_10nJ5Q_6_3">681,283</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_srt_CumulativeEffectPeriodOfAdoptionAxis_srt_CumulativeEffectPeriodOfAdoptionAdjustmentMember_us-gaap_AdjustmentsForNewAccountingPronouncementsAxis_us-gaap_AccountingStandardsUpdate202006Member_uQc4nJTxR0OEJlucArTKOA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RetainedEarningsAccumulatedDeficit" scale="3" id="Tc_0901heCH6EumfpCIDMP-ZA_6_6">12,540</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_srt_CumulativeEffectPeriodOfAdoptionAxis_srt_CumulativeEffectPeriodOfAdoptionAdjustedBalanceMember_us-gaap_AdjustmentsForNewAccountingPronouncementsAxis_us-gaap_AccountingStandardsUpdate202006Member_LzmwhGpHdUa1ilaCnrJETw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RetainedEarningsAccumulatedDeficit" sign="-" scale="3" id="Tc_B18wAxOxY06aT1vlPUQzwg_6_9">668,743</ix:nonFraction>)</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The adoption of ASU 2020-06 resulted in the following adjustments to the Company&#8217;s calculations of basic and diluted income per share for the year ended December 31, 2022:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:63.07%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.22%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.32%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.65%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:10.85%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.12%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:63.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:36.92%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended December&#160;31, 2022</b></p></td></tr><tr><td style="vertical-align:bottom;width:63.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Under</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Under</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.55%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">ASU 2020-06</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">legacy accounting</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Difference</b></p></td></tr><tr><td style="vertical-align:bottom;width:63.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Income per common share:</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.65%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.85%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Basic income per common share</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg" contextRef="Duration_1_1_2022_To_12_31_2022_srt_CumulativeEffectPeriodOfAdoptionAxis_srt_CumulativeEffectPeriodOfAdoptionAdjustedBalanceMember_us-gaap_AdjustmentsForNewAccountingPronouncementsAxis_us-gaap_AccountingStandardsUpdate202006Member_2gUZyYVNDkWsrP9u9uAsPg" decimals="2" format="ixt:numdotdecimal" name="us-gaap:EarningsPerShareBasic" scale="0" id="Tc_9I6egmGsXUW2Inpmv36OIA_5_2">3.35</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.85%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg" contextRef="Duration_1_1_2022_To_12_31_2022_srt_StatementScenarioAxis_veco_CalculatedUnderGuidanceInEffectBeforeAdoptionOfAccountingStandardsUpdate202006Member_7ScKuEZlbkunzacsANYvKA" decimals="2" format="ixt:numdotdecimal" name="us-gaap:EarningsPerShareBasic" scale="0" id="Tc_24Hn5gwa40mayv4YC4Kb_g_5_5">3.15</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg" contextRef="Duration_1_1_2022_To_12_31_2022_srt_StatementScenarioAxis_veco_DifferenceBetweenGuidanceInEffectBeforeAndAfterAccountingStandardsUpdate202006Member_us-gaap_AdjustmentsForNewAccountingPronouncementsAxis_us-gaap_AccountingStandardsUpdate202006Member_QPnJy7taY0e2YR7TvUMS8g" decimals="2" format="ixt:numdotdecimal" name="us-gaap:EarningsPerShareBasic" scale="0" id="Tc_J806UkIMCkmKJEjMHtwJiA_5_8">0.20</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:63.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Diluted income per common share</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg" contextRef="Duration_1_1_2022_To_12_31_2022_srt_CumulativeEffectPeriodOfAdoptionAxis_srt_CumulativeEffectPeriodOfAdoptionAdjustedBalanceMember_us-gaap_AdjustmentsForNewAccountingPronouncementsAxis_us-gaap_AccountingStandardsUpdate202006Member_2gUZyYVNDkWsrP9u9uAsPg" decimals="2" format="ixt:numdotdecimal" name="us-gaap:EarningsPerShareDiluted" scale="0" id="Tc_aFonCwiF90mm6tScAswWrg_6_2">2.71</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.65%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.85%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg" contextRef="Duration_1_1_2022_To_12_31_2022_srt_StatementScenarioAxis_veco_CalculatedUnderGuidanceInEffectBeforeAdoptionOfAccountingStandardsUpdate202006Member_7ScKuEZlbkunzacsANYvKA" decimals="2" format="ixt:numdotdecimal" name="us-gaap:EarningsPerShareDiluted" scale="0" id="Tc_HoTb5PFlvk6JaA7e1UwH7Q_6_5">2.91</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg" contextRef="Duration_1_1_2022_To_12_31_2022_srt_StatementScenarioAxis_veco_DifferenceBetweenGuidanceInEffectBeforeAndAfterAccountingStandardsUpdate202006Member_us-gaap_AdjustmentsForNewAccountingPronouncementsAxis_us-gaap_AccountingStandardsUpdate202006Member_QPnJy7taY0e2YR7TvUMS8g" decimals="2" format="ixt:numdotdecimal" name="us-gaap:EarningsPerShareDiluted" sign="-" scale="0" id="Tc_GsWFsZ7Z8EKBUfhiJUcoKg_6_8">0.20</ix:nonFraction>)</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(u) Recent Accounting Pronouncements Not Yet Adopted</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company is evaluating other pronouncements recently issued but not yet adopted. The adoption of these pronouncements is not expected to have a material impact on our consolidated financial statements.</p></ix:nonNumeric></ix:continuation><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:3pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-15</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Veeco Instruments&#160;Inc. and Subsidiaries</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Notes to Consolidated Financial Statements (Continued)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="Tc_Gf13zN-5oEmjJwROviq3dw_1_3"></a><a id="Tc_TaBUAlOiFkW9AND56W34lw_2_3"></a><a id="Tc_BQe7WwUj4kmqlQMR3cJDsA_2_6"></a><a id="Tc_M1trSV2gI0epc3syGo4xfQ_2_9"></a><a id="Tc_BODS0P9nTEyB2JOvHmFWLw_3_3"></a><a id="Tc_nlGDqsUfzU2L6Q2s8nCFyA_4_0"></a><a id="Tc_V8O6YmIVF0yy03H01xxefQ_5_0"></a><a id="Tc_IeUGO5z2akiTIhECIgrGTA_5_3"></a><a id="Tc_2EUYBrtSrEWvipddoJwKnQ_5_6"></a><a id="Tc_tUZF1WiN60eOmUHIDVyLwg_5_9"></a><a id="Tc_H2sw1Lnss0iCouw42yAUfg_6_0"></a><a id="Tc__FDtiXV2Y0WfUun6TtKcrQ_6_7"></a><a id="Tc_10IIEVgTKkOhfRppch673g_6_10"></a><a id="Tc_faj6uq6Pz0CwPT7NJT2row_7_0"></a><a id="Tc_b1-SXToZGEuOOHC-Od0s1A_7_3"></a><a id="Tc_yHdrkI72BEmgmKMPRcTpsg_7_6"></a><a id="Tc_jZS81tOnV0-9MUpLMOdCxA_7_9"></a><a id="Tc_gpvwOnmLnEO3JfTlUkYJjg_9_0"></a><a id="Tc_KdHT1jYLP0K4QrMOR4rIGA_10_0"></a><a id="Tc_DOVPwjIFwkmLa5ulA2OzDg_11_0"></a><a id="Tc_ir2Z6Sc63UyyYX1vgBm0sA_11_10"></a><a id="Tc_NXMACr7Hz0qIqC9EWn4HTw_12_0"></a><a id="Tc_NESvi9lvIkuJCDoMGlSL8w_12_10"></a><a id="Tc_SACmppbCZE-5X4MD9zqc-g_13_0"></a><a id="Tc_gVvLtaIKb0CVYrz19HenMw_15_0"></a><a id="Tc_nALYHPiPfUSMbbt90wvzqg_16_0"></a><a id="Tc_uUSse4NWVUGf7rUj-qAbUg_16_3"></a><a id="Tc_s3eemomuWESqrTKfbWsX8A_16_6"></a><a id="Tc_iFMPDz3r0kqmsOkDn7lj0w_16_9"></a><a id="Tc_mnsmNfs5UUCqC1ylf-T5UQ_17_0"></a><a id="Tc_LSYt8sRzpEq75BGhBCb8nA_17_3"></a><a id="Tc_pLTiKbgpw0usAtQDbAHopA_17_6"></a><a id="Tc_ygjm8v64uUK1zia8TEl9hg_17_9"></a><a id="Tc_HiRWFRZLJUqmUFCUVOGywA_19_0"></a><a id="Tc_2vfdB13TbUa1n2CaJuMuoQ_19_4"></a><a id="Tc__fUddZQtsEGMt_bD1hgi-A_20_0"></a><a id="Tc_bBvv184J006O1orh0e1d-g_20_4"></a><a id="Tc_fVqyxRG_skakd9qWDg9a3Q_20_7"></a><a id="Tc_dwQjbwrgRkWiOAfGlpXSxA_21_0"></a><a id="Tc_f9u1Ncgb6UCC6bxIy31-tQ_22_0"></a><a id="Tc_O2LMm6sy00SEfq6GTXDCNA_22_4"></a><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="us-gaap:EarningsPerShareTextBlock" id="Tb_9zGW_6YnRky2K8mnjHp5vg" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 2 &#8212; Income (Loss) Per Share</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Basic income (loss) per share is calculated by dividing net income (loss) by the weighted average number of shares outstanding during the period. Diluted income per share is calculated by dividing net income by the weighted average number of shares used to calculate basic income per share plus the weighted average number of common share equivalents outstanding during the period. The dilutive effect of outstanding options to purchase common stock and non-participating share-based awards is considered in diluted income per share by application of the treasury stock method. The dilutive effect of performance share units is included in diluted income per common share in the periods the performance targets have been achieved, or would have been achieved if the reporting date was the end of the contingency period. Upon the adoption of ASU 2020-06 on January 1, 2022, the Company includes the dilutive effect of shares issuable upon conversion of its Notes in the calculation of diluted income per share using the if-converted method. Prior to the adoption of ASU 2020-06, based on the Company&#8217;s ability and intent to settle the principal amount of its convertible senior notes in cash, and the excess of the principal portion in shares of its common stock, the Company accounted for the conversion spread using the treasury stock method, and the shares issuable upon conversion of the Notes were not included in the calculation of diluted earnings per share except to the extent that the conversion value of the Notes exceeds their principal amount and if the effect would be dilutive. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The computations of basic and diluted income (loss) per share for the years ended December 31, 2022, 2021, and 2020 are as follows:</p><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="us-gaap:ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock" id="Tb_oW41jNDYR0WCkb5kev8Cuw" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:61.69%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:61.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:33.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">For the year ended December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:61.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.54%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.54%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.54%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="11" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:61.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:33.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands, except per share amounts)</i></p></td></tr><tr><td style="vertical-align:bottom;width:61.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Numerator: </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:61.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Net income</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic" scale="3" id="Tc_KxJZ60pjjUyjbP7OSHoLrw_5_4">166,942</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic" scale="3" id="Tc_eP6JURry4UescdG3wxwAHA_5_7">26,038</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic" sign="-" scale="3" id="Tc_ayRy7wTmokem1VwMesdbQQ_5_10">8,391</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:61.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Interest expense associated with convertible notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InterestOnConvertibleDebtNetOfTax" scale="3" id="Tc_U4eGKWgjwEKUN4q6_GWoBQ_6_4">10,832</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;width:61.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Net income available to common shareholders</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetIncomeLossAvailableToCommonStockholdersDiluted" scale="3" id="Tc__9lLVynr2UOYOORO_r37EA_7_4">177,774</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetIncomeLossAvailableToCommonStockholdersDiluted" scale="3" id="Tc_OYtxWLSjf0uqm49Yd0W9iA_7_7">26,038</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetIncomeLossAvailableToCommonStockholdersDiluted" sign="-" scale="3" id="Tc_1CSzqFTaQ0OwRIlrRI4z4w_7_10">8,391</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:61.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:61.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Denominator:</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:61.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Basic weighted average shares outstanding</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:WeightedAverageNumberOfSharesOutstandingBasic" scale="3" id="Tc_-c5hgI8cp0KbYWIQ3YJIYQ_10_4">49,906</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:WeightedAverageNumberOfSharesOutstandingBasic" scale="3" id="Tc_a6OwfCH6GEqwRo2tBSk_7w_10_7">49,073</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:WeightedAverageNumberOfSharesOutstandingBasic" scale="3" id="Tc_NbzaG2vf10KiQadMcy_CuA_10_10">48,362</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:61.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Effect of potentially dilutive share-based awards</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:WeightedAverageNumberDilutedSharesOutstandingAdjustment" scale="3" id="Tc_JRDcJX00AEWhy5gOz4aydA_11_4">734</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:WeightedAverageNumberDilutedSharesOutstandingAdjustment" scale="3" id="Tc_I60jGTQ8FU2eBwZKjGTxng_11_7">1,090</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;width:61.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Dilutive effect of convertible notes </p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncrementalCommonSharesAttributableToConversionOfDebtSecurities" scale="3" id="Tc_tRQ1vxqZa0mwdj1JZSdB3Q_12_4">14,967</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncrementalCommonSharesAttributableToConversionOfDebtSecurities" scale="3" id="Tc_ZJtgFpUTXEqyGIOvLA-J9Q_12_7">3,480</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;width:61.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Diluted weighted average shares outstanding</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding" scale="3" id="Tc_WNaVogVaNUqKWLqvvvpwbg_13_4">65,607</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding" scale="3" id="Tc_koXO92L580Oh-tPFEvPkbg_13_7">53,643</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding" scale="3" id="Tc_Ii1X4TZg3UiNKGbGz07Fyw_13_10">48,362</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:61.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:61.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Net income per common share:</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:61.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Basic</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="2" format="ixt:numdotdecimal" name="us-gaap:EarningsPerShareBasic" scale="0" id="Tc_P1w5NkcF0kORYx0E4l2yHw_16_4">3.35</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="2" format="ixt:numdotdecimal" name="us-gaap:EarningsPerShareBasic" scale="0" id="Tc_JzzRGPixGkyZM78bZas7qg_16_7">0.53</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="2" format="ixt:numdotdecimal" name="us-gaap:EarningsPerShareBasic" sign="-" scale="0" id="Tc_uunGbfCZt02_MO7aSUe_yQ_16_10">0.17</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:61.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Diluted</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="2" format="ixt:numdotdecimal" name="us-gaap:EarningsPerShareDiluted" scale="0" id="Tc_t1m4Nfot4EWtXroW1YiGYQ_17_4">2.71</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="2" format="ixt:numdotdecimal" name="us-gaap:EarningsPerShareDiluted" scale="0" id="Tc_QigCxvTatUWlfqMgSefktQ_17_7">0.49</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="2" format="ixt:numdotdecimal" name="us-gaap:EarningsPerShareDiluted" sign="-" scale="0" id="Tc_40o_1ViWIkm8GF1Y8lrvoA_17_10">0.17</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:61.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:61.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Unvested participating shares excluded from basic weighted average shares outstanding since the securityholders are not obligated to fund losses</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="veco:SecuritiesExcludedFromComputationOfBasicEarningsPerShareAmount" scale="3" id="Tc_Qw-aanRFukykIHcj7sNtqg_19_7">6</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="veco:SecuritiesExcludedFromComputationOfBasicEarningsPerShareAmount" scale="3" id="Tc_Pe5cozVrgEmKqHIkKTuvCg_19_10">20</ix:nonFraction></p></td></tr><tr><td style="vertical-align:middle;width:61.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Common share equivalents excluded from the diluted weighted average shares outstanding since the Company incurred a net loss and their effect would be antidilutive</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_veco_CommonStockEquivalentsMember_GgBN3cvDTE-byDYqs9wG7A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount" scale="3" id="Tc_FArN-J3zlEuU6r3_Q-_QSg_20_10">947</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:61.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Potentially dilutive shares excluded from the diluted calculation as their effect would be antidilutive</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_veco_PotentiallyDilutiveSharesMember_Xh0mJGtCjkizBLR7chyGyg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount" scale="3" id="Tc_Mi9p7nLWoEiAffng4bquBw_21_4">815</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_veco_PotentiallyDilutiveSharesMember_TpPdreQLc0uaUnxJXzBvZA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount" scale="3" id="Tc_w5sRqScseEWgcPFIxnwRZA_21_7">456</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_veco_PotentiallyDilutiveSharesMember_rTgo9ZGu6EWujc23LmjRcw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount" scale="3" id="Tc_9GVanpUHH0SSrYxQmGww2Q_21_10">923</ix:nonFraction></p></td></tr><tr><td style="vertical-align:middle;width:61.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Maximum potential shares to be issued for settlement of the convertible notes excluded from the diluted calculation as their effect would be antidilutive </p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_us-gaap_ConvertibleDebtMember_B4QzNEW5AEKairiU-IKfGw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount" scale="3" id="Tc_OGX2d2ALlUS6SVKCWdCeag_22_7">8,421</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_us-gaap_ConvertibleDebtMember_MuNBTSuoqkKGYpc0H0iPXw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount" scale="3" id="Tc_eux-LrEl9kWGyDy70CMjfA_22_10">17,753</ix:nonFraction></p></td></tr></table></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-16</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Veeco Instruments&#160;Inc. and Subsidiaries</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Notes to Consolidated Financial Statements (Continued)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="_Hlk125993243"></a><a id="Tc_aeWIfjt6NkO22dTKK2GG_w_1_2"></a><a id="Tc_TsdhOb6vAESi3OvnLWIaVA_1_5"></a><a id="Tc_U5KK4y2OAUeC_mljWOXsxQ_1_8"></a><a id="Tc_KlU0uDDP10KUO8QpEQkmQQ_1_11"></a><a id="Tc_Ld9VwrVumkWO6sk3UgojOQ_2_2"></a><a id="Tc_Jq80aQO5w0u77jwXpi3vtA_3_0"></a><a id="Tc_cYUkNe9b60St-lYUMIsZ4w_4_0"></a><a id="Tc_YMINFD7mMUSHYJPG6a3k2Q_5_0"></a><a id="Tc_A_I0CdV_yEavOvMtjukGtg_5_2"></a><a id="Tc_tL4VhijQt0-MlaQ_X77Y2w_5_5"></a><a id="Tc_d6CmEv9ZMEmk3owJZntIVQ_5_6"></a><a id="Tc_2YNzTxpHhEiM45GbdQhGcQ_5_8"></a><a id="Tc_fvkgNHKvyUqrqazAtwweRA_5_9"></a><a id="Tc_-ixd7mtnY0WD04rxsPnU4Q_5_11"></a><a id="Tc_gSbOJiMJxkqz5gBYMz8zTQ_6_0"></a><a id="Tc_dDbBqoS3yE6r8QcmB226Fg_6_6"></a><a id="Tc_5jJKtGKzRkmE1xxEEM-cQA_6_9"></a><a id="Tc_EmoDDsgBRE6unh_fzam0uQ_7_0"></a><a id="Tc_7cMrBpUFuk2j9zCZulkImQ_7_2"></a><a id="Tc_BzT-Fs8-e0W97P9MllJbrQ_7_5"></a><a id="Tc_NlR4zFxz6kSxijHO-bmIkg_7_6"></a><a id="Tc_ny0bF40bIEyTK1NUq9wxCw_7_8"></a><a id="Tc_2g7i2uyQSkKzNU-rJbiuTw_7_9"></a><a id="Tc_tGY-xdCQokKwHbWpsP0ZqQ_7_11"></a><a id="Tc_mC-_sx8bzU6MUDt-JFJUuQ_8_0"></a><a id="Tc_6MLzDAymkkis7gOhRRN4GQ_9_0"></a><a id="Tc_kxjjSv-3rUGLJCq6BJRcxg_9_2"></a><a id="Tc__3-wbwxtukCNvGN11ABu5Q_9_5"></a><a id="Tc_f1Wcq7BTDEalNn2rE6EyZA_9_6"></a><a id="Tc_8hhehVlNT0ubJmz2m6zVKg_9_8"></a><a id="Tc_iTQ1gIFInkq8tuZane6a5w_9_9"></a><a id="Tc_qEwGy-oPLkWZOB58VklC_A_9_11"></a><a id="Tc_0n6-QzMewUyeLIDGPD6cxQ_10_0"></a><a id="Tc_tRigE_Lcv0ubQjPt6q4coQ_10_3"></a><a id="Tc_zuBpxz56TUCxbyrR-PLC4A_10_9"></a><a id="Tc_9xsjkiOhG0Gxc3MzBg8aTA_11_0"></a><a id="Tc_ZRNbvrv980qOIU8TUV5VrQ_11_3"></a><a id="Tc_JKxQ_xdxjUOWzWUmESAzqw_11_9"></a><a id="Tc_CHePxp1SdkaLz4RQLoDtFw_12_0"></a><a id="Tc_ZUViF8RHpEapwZF7uVckjA_12_3"></a><a id="Tc_FL6MgSYcBkq4NWRrKykA2A_12_9"></a><a id="Tc_x9V679heX0S0jFC7RNfgFA_13_0"></a><a id="Tc_kiHTSs7xUkWM29bcwf6OEw_13_2"></a><a id="Tc_1r4oHh0_wUepBHLr9xG-Fg_13_5"></a><a id="Tc_uu6FRPC7f0SPI-_DOO9FWw_13_8"></a><a id="Tc_ZROtMpL_C0S3roq9nm5sqg_13_9"></a><a id="Tc_iV_vE8vXd0mh-eAnsVeUjQ_13_11"></a><a id="Tc_yFvxOHYx-UOXSMH4pqzhMw_15_0"></a><a id="Tc_7LLsKHppwkGlg7gSrFScFQ_16_0"></a><a id="Tc_Qhs-H_ADJkuO0vUdaiTxFw_17_0"></a><a id="Tc_g-lkmdF3pU6mut68KAxv7A_17_2"></a><a id="Tc_Ed39pE4OoUuRWg5r6-PBog_17_5"></a><a id="Tc_Xzecz_ZuDkmW3OstclmqvA_17_6"></a><a id="Tc_XkLwRWf1h0mnsahJGnqQWw_17_8"></a><a id="Tc_LJcRL8GVd02f8dIGRSYVPQ_17_9"></a><a id="Tc_FPPmsGbCuUep4KLah1jIqg_17_11"></a><a id="Tc_nZb_oh68VE-O6SYEaFH5Sg_18_0"></a><a id="Tc_H7VnoIXeo0az-aQg8fo6bA_18_6"></a><a id="Tc_uFzmnthw7Um0l7bd4iUPEQ_18_9"></a><a id="Tc_MGMhSWt0ZkyddyJX7Iz7QQ_19_0"></a><a id="Tc_c0wHiBosME2ZXrZOq48HNw_19_2"></a><a id="Tc_SI5OPhP8UUuCXa7CILk_LQ_19_5"></a><a id="Tc_AMXVdi5KAkqOXqgzSdtfiQ_19_6"></a><a id="Tc_RtHo0r5XIEOAoYqp-ew9vw_19_8"></a><a id="Tc_-6E0a2V2UU-o3ZuylL0Tbg_19_9"></a><a id="Tc_YdXUNP5gfkKV540xU4iE5A_19_11"></a><a id="Tc_a51RIBFiF0OE_4AEwVKQwg_20_0"></a><a id="Tc_GnCd2YW8DEWOAGHi1QboSQ_21_0"></a><a id="Tc_XoD2akoXEU69InpnOh0WFg_21_2"></a><a id="Tc_S7xyhv9E1UiYrDv6btvB0w_21_5"></a><a id="Tc___aAxBh_d0S42oFKKDvLBQ_21_6"></a><a id="Tc_Bebkt6RZ0UGl5hGyh3Qyfw_21_8"></a><a id="Tc_mTRzhrInEkGFoEBKgc321w_21_9"></a><a id="Tc_87O1g1ez2kC1Jb3Vp2xHDw_21_11"></a><a id="Tc_2gqGIFPQ80OmgWRoCiDDUQ_22_0"></a><a id="Tc_Qg12jskjW0Oi9poZRdjRIg_22_3"></a><a id="Tc_2UZ3TRvePUaNXNh9gMy_9g_22_9"></a><a id="Tc_zn5Iy0SL-EyluV6rQleOQw_23_0"></a><a id="Tc_EOIuw2NUNUCld7WMqMiqWQ_23_3"></a><a id="Tc_a-f90PF_CkeLBT_B8e7E6A_23_9"></a><a id="Tc_J2dQG3Z6LkWT9INM6x__-w_24_0"></a><a id="Tc_zy_qXdHM5Ua-HNYL1VijjA_24_3"></a><a id="Tc_APngMONbCEq52_DCtsJr7g_24_9"></a><a id="Tc_g8hrgA8bzk2tJ3f5dVf_Lw_25_0"></a><a id="Tc_l6qxA1Q7QkSmKjHWo3mAdQ_25_2"></a><a id="Tc_CZT9vKXABkWsr-KL1s6JRw_25_5"></a><a id="Tc_zbdtSZqdRUKiV2aCzN7_SA_25_8"></a><a id="Tc_-78Zh2YJJUuAIUrDcCo7zw_25_9"></a><a id="Tc_h3zQMlge2k6LlJgQ5qtCTg_25_11"></a><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="us-gaap:FairValueDisclosuresTextBlock" id="Tb_t15Q6w-RSkOctWUc-YL4sw" continuedAt="Tb_t15Q6w-RSkOctWUc-YL4sw_cont1" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 3 &#8212; Fair Value Measurements</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Fair value is the price that would be received for an asset or the amount paid to transfer a liability in an orderly transaction between market participants. The Company is required to classify certain assets and liabilities based on the following fair value hierarchy:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Level 1: Quoted prices in active markets that are unadjusted and accessible at the measurement date for identical, unrestricted assets or liabilities;</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Level 2: Quoted prices for identical assets and liabilities in markets that are not active, quoted prices for similar assets and liabilities in active markets or financial instruments for which significant inputs are observable, either directly or indirectly; and</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Level 3: Prices or valuations that require inputs that are both significant to the fair value measurement and unobservable.</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">A financial instrument&#8217;s level within the fair value hierarchy is based on the lowest level of any input that is significant to the fair value measurement. The Company has evaluated the estimated fair value of financial instruments using available market information and valuations as provided by third-party sources. The use of different market assumptions or estimation methodologies could have a significant effect on the estimated fair value amounts.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The following table presents the Company&#8217;s assets that were measured at fair value on a recurring basis at December 31, 2022 and 2021:</p><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="us-gaap:FairValueAssetsMeasuredOnRecurringBasisTextBlock" id="Tb_nNC4AERNpEK0fG4Ujm4qcg" continuedAt="Tb_nNC4AERNpEK0fG4Ujm4qcg_cont1" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:57.19%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.56%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.56%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.2%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.84%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:57.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;width:8.88%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Level&#160;1</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.11%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Level&#160;2</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.88%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Level&#160;3</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.17%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Total</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="13" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:57.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:40.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:57.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">December&#160;31, 2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.56%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.56%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:57.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"><b style="font-weight:bold;">Cash equivalents</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:57.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Certificate of deposits and time deposits</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.56%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_CashAndCashEquivalentsAxis_veco_CertificateOfDepositsAndTimeDepositsMember_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_kb7en8Al0UeyY-BwVRymSQ" decimals="-3" format="ixt:numdotdecimal" name="veco:CashEquivalentsFairValueDisclosure" scale="3" id="Tc_DsJ3-eKTM0mbEw69wS9mKQ_5_3">61,135</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.56%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_CashAndCashEquivalentsAxis_veco_CertificateOfDepositsAndTimeDepositsMember_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_Tl2Z9QaK_katKWTLd_NfjQ" decimals="-3" format="ixt:numdotdecimal" name="veco:CashEquivalentsFairValueDisclosure" scale="3" id="Tc_zCgFUmoXrkWWMGHANDF17w_5_12">61,135</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:57.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Money market cash</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_CashAndCashEquivalentsAxis_veco_MoneyMarketFundsExcludingGovernmentFundsMember_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_zBQP3bFx00C_j5nPe2GU_g" decimals="-3" format="ixt:numdotdecimal" name="veco:CashEquivalentsFairValueDisclosure" scale="3" id="Tc_ehZYYa0JT0eTOfNL-i-RNA_6_3">405</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_CashAndCashEquivalentsAxis_veco_MoneyMarketFundsExcludingGovernmentFundsMember_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_1N68aHrwUEeEnGG3xkF-PA" decimals="-3" format="ixt:numdotdecimal" name="veco:CashEquivalentsFairValueDisclosure" scale="3" id="Tc_ZCJzf55c9kek4TIWNS9XKw_6_12">405</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:57.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.56%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_slQOe3zyMUymTHQU819sJQ" decimals="-3" format="ixt:numdotdecimal" name="veco:CashEquivalentsFairValueDisclosure" scale="3" id="Tc_hYJHoFqL1UONPIumXC_25w_7_3">61,540</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.56%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.84%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_S6bYObjavkCTbU5xddLx7g" decimals="-3" format="ixt:numdotdecimal" name="veco:CashEquivalentsFairValueDisclosure" scale="3" id="Tc_K9fc2iAYe06IVeVlaSQOOQ_7_12">61,540</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:57.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"><b style="font-weight:bold;">Short-term investments</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:57.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">U.S. treasuries</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.56%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_USTreasurySecuritiesMember_gqJUY0xQBEKj-8bR__2AhA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InvestmentsFairValueDisclosure" scale="3" id="Tc_QGBEozWv5kqhXjlEo4-MMQ_9_3">62,849</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.56%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_USTreasurySecuritiesMember_9ZKAp20askai2yy7kwBjQA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InvestmentsFairValueDisclosure" scale="3" id="Tc_OBdtIupn0U6kh7wI1-iC7w_9_12">62,849</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:57.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Government agency securities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel2Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_USGovernmentAgenciesDebtSecuritiesMember_xxaAnx1Ji0KImuzsRiQSeQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InvestmentsFairValueDisclosure" scale="3" id="Tc_IyZv3VoR4kWO17Kj_cbWMQ_10_6">27,366</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_USGovernmentAgenciesDebtSecuritiesMember_UBRtR4MHAE6IwJXU-LOpsg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InvestmentsFairValueDisclosure" scale="3" id="Tc_axCO32FUAEyaHc_AfJ8JxA_10_12">27,366</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:57.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Corporate debt</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.56%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel2Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_CorporateDebtSecuritiesMember_pCHXtSXunUCFoLNO295FNQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InvestmentsFairValueDisclosure" scale="3" id="Tc_Ngvp3820okev1PCgjXHM-A_11_6">41,591</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.56%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_CorporateDebtSecuritiesMember_tOjwouEBSkebr7L2IwFAlg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InvestmentsFairValueDisclosure" scale="3" id="Tc_SXoB4jOKXEmGSlMnlxVk6g_11_12">41,591</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:57.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Commercial paper</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel2Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_CommercialPaperMember_E2AAQ-0KTE6yl5sLci37yw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InvestmentsFairValueDisclosure" scale="3" id="Tc_S4uP_Iy-tUKou4bMOiCj7A_12_6">15,682</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_CommercialPaperMember_aCCI2RshmE-lyrQdT3Mkkw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InvestmentsFairValueDisclosure" scale="3" id="Tc_Bu9egti_9E-T7eDZk8dn1g_12_12">15,682</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:57.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.56%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_slQOe3zyMUymTHQU819sJQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InvestmentsFairValueDisclosure" scale="3" id="Tc_j7oOWraTrk--TImPJQk-Dw_13_3">62,849</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel2Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_MpQSvERYmk2F8LCAdvsJeQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InvestmentsFairValueDisclosure" scale="3" id="Tc_Ipkv0XLY3kCd4bGlpKczLQ_13_6">84,639</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.56%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.84%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_S6bYObjavkCTbU5xddLx7g" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InvestmentsFairValueDisclosure" scale="3" id="Tc_zg_Z4kJkzEmoc1hwMjfXrQ_13_12">147,488</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:57.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 18pt;"><span style="font-size:10pt;font-weight:bold;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:57.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">December&#160;31, 2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.56%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.56%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:57.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"><b style="font-weight:bold;">Cash equivalents</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:57.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Certificate of deposits and time deposits</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.56%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_us-gaap_CashAndCashEquivalentsAxis_veco_CertificateOfDepositsAndTimeDepositsMember_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_JiqTPtimWUGvvaKkaAWYdQ" decimals="-3" format="ixt:numdotdecimal" name="veco:CashEquivalentsFairValueDisclosure" scale="3" id="Tc_XkAw3VqtZUCi6dX1bfesOg_17_3">41,544</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.56%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_us-gaap_CashAndCashEquivalentsAxis_veco_CertificateOfDepositsAndTimeDepositsMember_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_ytqgmgI0iU2Mff9bwHjo2A" decimals="-3" format="ixt:numdotdecimal" name="veco:CashEquivalentsFairValueDisclosure" scale="3" id="Tc_gCUTK4SsgkmI1JWFgM92Kw_17_12">41,544</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:57.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Money market cash</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_us-gaap_CashAndCashEquivalentsAxis_veco_MoneyMarketFundsExcludingGovernmentFundsMember_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_BYRwCfp1Q0WYuXQEj6V_jg" decimals="-3" format="ixt:numdotdecimal" name="veco:CashEquivalentsFairValueDisclosure" scale="3" id="Tc_co8OsxDgPU6Qvcel4tbxXw_18_3">121</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_us-gaap_CashAndCashEquivalentsAxis_veco_MoneyMarketFundsExcludingGovernmentFundsMember_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_suw4EE81r06AU6N-K20ykg" decimals="-3" format="ixt:numdotdecimal" name="veco:CashEquivalentsFairValueDisclosure" scale="3" id="Tc_wxD8T3Qs9UeiEZxFQMYEvA_18_12">121</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:57.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.56%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_XRUs_X2KUEOrNQc5SrQvag" decimals="-3" format="ixt:numdotdecimal" name="veco:CashEquivalentsFairValueDisclosure" scale="3" id="Tc_6DxBDFpb_EeO1n4ptCCQlQ_19_3">41,665</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.56%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.84%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_8Y4uZzPOeUWzAGMaSM_zrg" decimals="-3" format="ixt:numdotdecimal" name="veco:CashEquivalentsFairValueDisclosure" scale="3" id="Tc_eKsKyfXeuECMWLJ3Hk87XQ_19_12">41,665</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:57.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"><b style="font-weight:bold;">Short-term investments</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:57.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">U.S. treasuries</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.56%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_USTreasurySecuritiesMember_Gjv_stk2ZEqEp1eNGnsQ3w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InvestmentsFairValueDisclosure" scale="3" id="Tc_4nC4X-mK8U-C6fK09uEx6w_21_3">51,095</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.56%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_USTreasurySecuritiesMember_YW8DFld3rUeEJWklgEoDkQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InvestmentsFairValueDisclosure" scale="3" id="Tc_qW0PlOcMlE2gyLB9EcPG9A_21_12">51,095</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:57.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Government agency securities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel2Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_USGovernmentAgenciesDebtSecuritiesMember_0qo4lngQLE67OuHA6y1wdw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InvestmentsFairValueDisclosure" scale="3" id="Tc__ppnGYYxKk2kSmAGYp7upg_22_6">12,052</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_USGovernmentAgenciesDebtSecuritiesMember_6yQv3e_ka0i1bTkFTYicJg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InvestmentsFairValueDisclosure" scale="3" id="Tc_zAcBk5VX8EaxrkUhb65cWg_22_12">12,052</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:57.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Corporate debt</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.56%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel2Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_CorporateDebtSecuritiesMember_GL57sZXyr0aGVeV1asM5mg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InvestmentsFairValueDisclosure" scale="3" id="Tc_KuHix0u1qUu1lIvsj1F6JQ_23_6">40,035</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.56%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_CorporateDebtSecuritiesMember_eczwLoIqY06OGH6ptbktWg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InvestmentsFairValueDisclosure" scale="3" id="Tc_c0oF52EcMUC8JtNZZV3aGQ_23_12">40,035</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:57.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Commercial paper</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel2Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_CommercialPaperMember_E29zWH3490-7kJgvF-1hDg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InvestmentsFairValueDisclosure" scale="3" id="Tc_W--o8k86pk2dZm9DOY91zw_24_6">999</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_CommercialPaperMember_i5JJkpgtSk6kLg_SGNah8A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InvestmentsFairValueDisclosure" scale="3" id="Tc_fcxTzI_m_EuV89mgBiNtZQ_24_12">999</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:57.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.56%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_XRUs_X2KUEOrNQc5SrQvag" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InvestmentsFairValueDisclosure" scale="3" id="Tc_5IAXIxWWskiMKybia-OVgw_25_3">51,095</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel2Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_Fx3H_ZpdrUmlZhkBxxb4ow" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InvestmentsFairValueDisclosure" scale="3" id="Tc_dtaD-kxHdUu-R-d7itrMtg_25_6">53,086</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.56%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.84%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_8Y4uZzPOeUWzAGMaSM_zrg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InvestmentsFairValueDisclosure" scale="3" id="Tc_t_yoQaOvGEmWsEsILHTjvA_25_12">104,181</ix:nonFraction></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></ix:nonNumeric></ix:nonNumeric></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-17</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Veeco Instruments&#160;Inc. and Subsidiaries</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Notes to Consolidated Financial Statements (Continued)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;max-width:100%;position:relative;"><ix:continuation id="Tb_t15Q6w-RSkOctWUc-YL4sw_cont1"><ix:continuation id="Tb_nNC4AERNpEK0fG4Ujm4qcg_cont1"></ix:continuation><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company&#8217;s investments classified as Level 1 are based on quoted prices that are available in active markets, as well as certificates of deposits and time deposits that are classified as Level 1 due to their short-term nature. The Company&#8217;s investments classified as Level 2 are valued using observable inputs to quoted market prices, benchmark yields, reported trades, broker/dealer quotes, or alternative pricing sources with reasonable levels of price transparency.</p></ix:continuation><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="Tc_SxhjJXDeXkWN3JTKMgbZYA_1_5"></a><a id="Tc_nH-dOBm9bUyHZv8bbex49g_1_8"></a><a id="Tc_30XyU1hBtkKEco8ugN6Cbw_2_2"></a><a id="Tc_k31gAXkLpkOxoLB_bIM-dA_2_5"></a><a id="Tc_xd5wDwztG0ybGX-4D_u-RQ_2_8"></a><a id="Tc_Amr5dhq3Ok2_YArXLzQs8A_2_11"></a><a id="Tc_88An7ELgBk-CvxXNJZtziw_3_2"></a><a id="Tc_NUiqPr79LECQG99wb5V0IA_3_5"></a><a id="Tc_VV-CxjvJqkGA8FIM8QLfEA_3_8"></a><a id="Tc_OdHasmkbPUydZ2a-bUaAaQ_3_11"></a><a id="Tc_kHa6QrdG60--YaOH63VEgA_4_2"></a><a id="Tc_FMA9HuaHb0iyL3qOzRyyxg_5_0"></a><a id="Tc_Q185CxUdkUSvdlpUnzb9kQ_6_0"></a><a id="Tc_kj_eW735Dkm8J2tx6TzhfA_6_2"></a><a id="Tc_6io9bPhLYUygTVTdX6C7WQ_6_5"></a><a id="Tc_1grrcAhsSEeBIVKJPrNZAg_6_6"></a><a id="Tc_Xortqvy2GU6BxzzwT-24bg_6_8"></a><a id="Tc_Z279jKh5vUiNAgS2oKFK2A_6_11"></a><a id="Tc_c-zC_nd-PU6odfv3ckfqCg_7_0"></a><a id="Tc_5tqOlSkNa0WvNx1SORcvkA_7_6"></a><a id="Tc_j0BAPob56k-OHh-RzjENFg_8_0"></a><a id="Tc_3L8uSh6AXkywJQjY9ywAVA_8_6"></a><a id="Tc_EOXVdI6mZ06m4zGwb_13-w_9_0"></a><a id="Tc_cYEXIDP5hkqxUohl9v89wA_9_6"></a><a id="Tc_C5cReT4enUe13_LipKelZw_9_9"></a><a id="Tc_MzE7E6QXPEuPpwwFR2PlVQ_10_0"></a><a id="Tc_GU4pHBS_BUmPDXLRpYAN0g_10_2"></a><a id="Tc_9JnrcDyapUOHesx-FbBRzg_10_5"></a><a id="Tc_m6kwP6P6XECU3PFwhxLfxg_10_6"></a><a id="Tc_t4V3LzD2uEechDEDVqQuoA_10_8"></a><a id="Tc_k7819MiiREiw4GEBpxOblg_10_11"></a><a id="Tc_9RrRthct3EGybCv33erOwA_12_0"></a><a id="Tc_R4IdpvB2UkagpmdA_fyvHQ_13_0"></a><a id="Tc_nV3hJEUauUWngbIX2_9k9Q_13_2"></a><a id="Tc_UGJ08mlHhEy38AbzLkvMgw_13_5"></a><a id="Tc_Y2NfqEMy1Uq_1F-x7jMCRA_13_6"></a><a id="Tc_NtQX_z3qnUathpZ_rTjjLg_13_8"></a><a id="Tc_tazXlmhzPEaQqM5QiLa4Sw_13_11"></a><a id="Tc_3D196l0rskm-ciMOIKVvvQ_14_0"></a><a id="Tc_J9yY7guemkq_1Fb-jScaEA_14_6"></a><a id="Tc_iCY675a560efSSWP6-UyBA_15_0"></a><a id="Tc_iLySAVoOu0iWrqi3yRkD4A_15_6"></a><a id="Tc_r2YMJ1aWsEy7PrlMzIEuBA_16_0"></a><a id="Tc_kGJvMyCWbU-LgYKs5Tp03w_16_6"></a><a id="Tc_yh65cDKTXEKvoKMbUnxicw_16_9"></a><a id="Tc_9ZvDO_C1lUmvm-Fdzp49sQ_17_0"></a><a id="Tc_3ZSix81c80KVBA9f-cmc0g_17_2"></a><a id="Tc_K32lwgRfu0mzjrJ-CHHM_w_17_5"></a><a id="Tc_fCBeakgu8kmdVwBCIA0FOg_17_6"></a><a id="Tc_UUtbq4IWCk6KOK0AgSAZxA_17_8"></a><a id="Tc_l4amQ-rj-0igvGkbUXHJpA_17_11"></a><a id="Tc__rj7eGojWEGgTCN7aHYfCw_1_2"></a><a id="Tc_yZroMYf3ikOgybHne8Kbqg_1_14"></a><a id="Tc_Oyno2Hcno0quhrPE7IXjmw_2_2"></a><a id="Tc_92cHbP3PxU6K8JveLCEdJg_2_8"></a><a id="Tc_WpiRzIYzQkW5f9m6fVbZRw_2_14"></a><a id="Tc_4I_c76wqaUeCpDAxsxFqnQ_3_2"></a><a id="Tc_sElHRtScb0SSi-hmfnZdAg_3_8"></a><a id="Tc_KF44qk36zkC8qpiEycigGQ_3_14"></a><a id="Tc_6Vs3AvRvv0-1SAiqKZBXsg_4_5"></a><a id="Tc_HPeK4OheTUOQm07r6XuWZQ_4_11"></a><a id="Tc_5LwAiVeIfEmbodsDwHHHLw_4_17"></a><a id="Tc_pIsFnsTaXEOvkr8y3CqX7w_5_2"></a><a id="Tc_L0SygT1k8UWXbWURrpZSqg_5_5"></a><a id="Tc_I0-wO-FIkEWho6aRtJjcAg_5_8"></a><a id="Tc_jQEoCnPFLUCvsS-TFMdG6A_5_11"></a><a id="Tc_fIRMOOpH3EWbfBfVmQ6aMg_5_14"></a><a id="Tc_gRaqTkDxh06GD-AqHGl1hg_5_17"></a><a id="Tc_HvqGbnVyeU-bhZ0y65WaTQ_6_2"></a><a id="Tc_hbCTpK0fpk6GJW6llPm5ow_6_5"></a><a id="Tc_lSBH8IqKr0ih1holzpEHHw_6_8"></a><a id="Tc_Cm19BT2O_EG2ZDSXzqekdQ_6_11"></a><a id="Tc_u7KrRIHv6UGh1nYkPqEWGA_6_14"></a><a id="Tc_4LsKeQZ7Bk-sngaCBzrQrA_6_17"></a><a id="Tc_36hneuBV-kecXcpvjyZg3A_7_3"></a><a id="Tc_mkaKFT1qR02J3cLh388sOQ_8_0"></a><a id="Tc_fAJfJhLhT06TvHqveMF52g_8_2"></a><a id="Tc_1jEMJk0t_U6sT8AZOu43Nw_8_5"></a><a id="Tc_Zn9dxP3QdUayXKD2JIm5rw_8_8"></a><a id="Tc_bajBcJSeuke3MUi21rIFaA_8_11"></a><a id="Tc_KrcTJ87cOk6qAR3SapdQhQ_8_14"></a><a id="Tc_dOek3N502Uuk_PZYUDON1w_8_17"></a><a id="Tc_JICJcVng-EeMg3AZqXpKWw_9_0"></a><a id="Tc_bos_yG87n06BzJR9xnSvMA_10_0"></a><a id="Tc_wFnO5Tq-Wk6mlVHn_j9KQw_11_0"></a><a id="Tc_sKqtcWKJGESu-OjdwpsXnA_11_2"></a><a id="Tc_V_L_MutjBkiy6RMdz-Epvg_11_5"></a><a id="Tc_gip9RULFQk2GgZw45OO-ow_11_8"></a><a id="Tc_QrI2Q2JNUkeY48ZxU6TZ2g_11_11"></a><a id="Tc_yf4968sUok2AAoDxZ51Ojg_11_14"></a><a id="Tc_6pU2EWS1PEmW0a4CBpaQtQ_11_17"></a><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="us-gaap:InvestmentsInDebtAndMarketableEquitySecuritiesAndCertainTradingAssetsDisclosureTextBlock" id="Tb_vS98dDZ_vU28KmzY-2ArGQ" continuedAt="Tb_vS98dDZ_vU28KmzY-2ArGQ_cont1" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 4 &#8212; Investments</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">At December 31, 2022 and 2021 the amortized cost and fair value of marketable securities, which are included in &#8220;Short-term investments&#8221; on the Consolidated Balance Sheets, were as follows:</p><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="us-gaap:ScheduleOfAvailableForSaleSecuritiesReconciliationTableTextBlock" id="Tb_qplgaLQswU6NMFrHfplUBQ" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Gross</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Gross</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amortized</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Unrealized</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Unrealized</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Estimated</b></p></td></tr><tr><td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Cost</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Gains</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Losses</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Fair&#160;Value</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="13" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:41.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:55.91%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">December&#160;31, 2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">U.S. treasuries</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_FinancialInstrumentAxis_us-gaap_USTreasurySecuritiesMember_LradD4ylt0uzAESlET9k1A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AvailableForSaleDebtSecuritiesAmortizedCostBasis" scale="3" id="Tc_2z-9eESlAEO_Yz6iMzC3Gw_6_3">63,331</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_FinancialInstrumentAxis_us-gaap_USTreasurySecuritiesMember_LradD4ylt0uzAESlET9k1A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AvailableForSaleDebtSecuritiesAccumulatedGrossUnrealizedLossBeforeTax" scale="3" id="Tc_KN1oex8jTUyC1wNLC8AbKw_6_9">482</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_FinancialInstrumentAxis_us-gaap_USTreasurySecuritiesMember_LradD4ylt0uzAESlET9k1A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AvailableForSaleSecuritiesDebtSecurities" scale="3" id="Tc_mestZeVKF0qc9klXmy1I9A_6_12">62,849</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:55.91%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Government agency securities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_FinancialInstrumentAxis_us-gaap_USGovernmentAgenciesDebtSecuritiesMember_nuwqJ_OpWE6z8iWOh2BzFg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AvailableForSaleDebtSecuritiesAmortizedCostBasis" scale="3" id="Tc_zMQCY8xtMUSV90zrK0Ehdw_7_3">27,464</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_FinancialInstrumentAxis_us-gaap_USGovernmentAgenciesDebtSecuritiesMember_nuwqJ_OpWE6z8iWOh2BzFg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AvailableForSaleDebtSecuritiesAccumulatedGrossUnrealizedLossBeforeTax" scale="3" id="Tc_-cuGD-sSWkKiaVktBc-5Nw_7_9">98</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_FinancialInstrumentAxis_us-gaap_USGovernmentAgenciesDebtSecuritiesMember_nuwqJ_OpWE6z8iWOh2BzFg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AvailableForSaleSecuritiesDebtSecurities" scale="3" id="Tc_0cAn9x7owU2CBmf76ridbg_7_12">27,366</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Corporate debt</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_FinancialInstrumentAxis_us-gaap_CorporateDebtSecuritiesMember_W6dvtbJBXEa50pS4c58icg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AvailableForSaleDebtSecuritiesAmortizedCostBasis" scale="3" id="Tc_McNzooOTPUS5wkrOvQIKwA_8_3">42,006</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_FinancialInstrumentAxis_us-gaap_CorporateDebtSecuritiesMember_W6dvtbJBXEa50pS4c58icg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AvailableForSaleDebtSecuritiesAccumulatedGrossUnrealizedLossBeforeTax" scale="3" id="Tc_xoKaOuoXS02n-1B5VFAhRg_8_9">415</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_FinancialInstrumentAxis_us-gaap_CorporateDebtSecuritiesMember_W6dvtbJBXEa50pS4c58icg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AvailableForSaleSecuritiesDebtSecurities" scale="3" id="Tc_OG4zQTnOHUWJR126wufP8A_8_12">41,591</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:55.91%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Commercial paper</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_FinancialInstrumentAxis_us-gaap_CommercialPaperMember_v9BAMIwwwk2Oy_ebY3ejrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AvailableForSaleDebtSecuritiesAmortizedCostBasis" scale="3" id="Tc_LgGOpNRyAkStM3Te_4bzjQ_9_3">15,682</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_FinancialInstrumentAxis_us-gaap_CommercialPaperMember_v9BAMIwwwk2Oy_ebY3ejrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AvailableForSaleSecuritiesDebtSecurities" scale="3" id="Tc_mHQdVTy29Uaw9vK_Rklu6Q_9_12">15,682</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:55.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AvailableForSaleDebtSecuritiesAmortizedCostBasis" scale="3" id="Tc_BxVcIVvc2UaMBzSplpQI2A_10_3">148,483</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AvailableForSaleDebtSecuritiesAccumulatedGrossUnrealizedLossBeforeTax" scale="3" id="Tc_9rZU9Lcf0kC4QQRSs3uhsQ_10_9">995</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AvailableForSaleSecuritiesDebtSecurities" scale="3" id="Tc_arEfRKgZgEeHY33MezkJBA_10_12">147,488</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:55.91%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 12pt;"><span style="font-size:10pt;font-weight:bold;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">December&#160;31, 2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:55.91%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">U.S. treasuries</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_us-gaap_FinancialInstrumentAxis_us-gaap_USTreasurySecuritiesMember_gJhgKG5MIk-r_VdVxod5_g" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AvailableForSaleDebtSecuritiesAmortizedCostBasis" scale="3" id="Tc_e3bidCjdCUyIJQHPJ0wuvA_13_3">51,269</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_us-gaap_FinancialInstrumentAxis_us-gaap_USTreasurySecuritiesMember_gJhgKG5MIk-r_VdVxod5_g" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AvailableForSaleDebtSecuritiesAccumulatedGrossUnrealizedLossBeforeTax" scale="3" id="Tc_mbmR_Pw1qkeWIZRTh7kBfA_13_9">174</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_us-gaap_FinancialInstrumentAxis_us-gaap_USTreasurySecuritiesMember_gJhgKG5MIk-r_VdVxod5_g" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AvailableForSaleSecuritiesDebtSecurities" scale="3" id="Tc_m42o3dMnBkantpqbNEzQRQ_13_12">51,095</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Government agency securities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_us-gaap_FinancialInstrumentAxis_us-gaap_USGovernmentAgenciesDebtSecuritiesMember_qSaUfSjFAk-Go6t8v7C5Vg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AvailableForSaleDebtSecuritiesAmortizedCostBasis" scale="3" id="Tc_csqwbVLYEEuHLnrSEGQ_6Q_14_3">12,075</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_us-gaap_FinancialInstrumentAxis_us-gaap_USGovernmentAgenciesDebtSecuritiesMember_qSaUfSjFAk-Go6t8v7C5Vg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AvailableForSaleDebtSecuritiesAccumulatedGrossUnrealizedLossBeforeTax" scale="3" id="Tc_xdASMSjXOUugqKkxovHtRQ_14_9">23</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_us-gaap_FinancialInstrumentAxis_us-gaap_USGovernmentAgenciesDebtSecuritiesMember_qSaUfSjFAk-Go6t8v7C5Vg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AvailableForSaleSecuritiesDebtSecurities" scale="3" id="Tc__Zp4uqJ3j0iQ_igGt_n85A_14_12">12,052</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:55.91%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Corporate debt</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_us-gaap_FinancialInstrumentAxis_us-gaap_CorporateDebtSecuritiesMember_IXDRtarETEeWv9xq-DPEYw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AvailableForSaleDebtSecuritiesAmortizedCostBasis" scale="3" id="Tc_wFsMOGZPHEyJ4oi8nD1Ukg_15_3">40,169</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_us-gaap_FinancialInstrumentAxis_us-gaap_CorporateDebtSecuritiesMember_IXDRtarETEeWv9xq-DPEYw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AvailableForSaleDebtSecuritiesAccumulatedGrossUnrealizedLossBeforeTax" scale="3" id="Tc_2cqE2-8ugkObGzhWzJUZKQ_15_9">134</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_us-gaap_FinancialInstrumentAxis_us-gaap_CorporateDebtSecuritiesMember_IXDRtarETEeWv9xq-DPEYw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AvailableForSaleSecuritiesDebtSecurities" scale="3" id="Tc_LWnQgBex9k2LvqVMCzUdrg_15_12">40,035</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Commercial paper</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_us-gaap_FinancialInstrumentAxis_us-gaap_CommercialPaperMember_Q4aGVM4lLEKYgbV0sPLsVg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AvailableForSaleDebtSecuritiesAmortizedCostBasis" scale="3" id="Tc_0q1niAWsmUm4bEc9yC3Qww_16_3">999</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_us-gaap_FinancialInstrumentAxis_us-gaap_CommercialPaperMember_Q4aGVM4lLEKYgbV0sPLsVg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AvailableForSaleSecuritiesDebtSecurities" scale="3" id="Tc_lc4SBe_w-k6V5pwYB6uhHg_16_12">999</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:55.91%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AvailableForSaleDebtSecuritiesAmortizedCostBasis" scale="3" id="Tc_uLTitWyFxU2epjrXcnJw8g_17_3">104,512</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AvailableForSaleDebtSecuritiesAccumulatedGrossUnrealizedLossBeforeTax" scale="3" id="Tc_QFB_8xheKka2_cp4pBPhHQ_17_9">331</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AvailableForSaleSecuritiesDebtSecurities" scale="3" id="Tc_9vUg_OdQyk-Zv0Y_Mkai1w_17_12">104,181</ix:nonFraction></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Available-for-sale securities in a loss position at December 31, 2022 and 2021 were as follows:</p><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="us-gaap:DebtSecuritiesAvailableForSaleUnrealizedLossPositionFairValueTableTextBlock" id="Tb_wnqG3QewE0ifpYTMV5Dh8g" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:39.84%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.69%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.71%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.71%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:39.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:37.77%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, 2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:19.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, 2021</b></p></td></tr><tr><td style="vertical-align:bottom;width:39.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:18.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Continuous Loss Position </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:18.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Continuous Loss Position </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:19.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Continuous Loss Position </b></p></td></tr><tr><td style="vertical-align:bottom;width:39.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:18.05%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">for Less than 12 Months</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:18.07%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">for 12 Months or More</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:19.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">for Less than 12 Months</b></p></td></tr><tr><td style="vertical-align:bottom;width:39.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Gross</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Gross</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Gross</b></p></td></tr><tr><td style="vertical-align:bottom;width:39.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Estimated</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Unrealized</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Estimated</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Unrealized</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Estimated</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Unrealized</b></p></td></tr><tr><td style="vertical-align:bottom;width:39.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Fair&#160;Value</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.91%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Losses</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Fair&#160;Value</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Losses</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Fair Value</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Losses</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="19" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:39.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="16" style="vertical-align:bottom;white-space:nowrap;width:57.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:39.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">U.S. treasuries</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_FinancialInstrumentAxis_us-gaap_USTreasurySecuritiesMember_LradD4ylt0uzAESlET9k1A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12Months" scale="3" id="Tc_QKivdgVbk0KQV1GN-jCz6Q_8_3">39,791</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_FinancialInstrumentAxis_us-gaap_USTreasurySecuritiesMember_LradD4ylt0uzAESlET9k1A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12MonthsAccumulatedLoss" scale="3" id="Tc_byw-baNeo064gwOYE9VItg_8_6">84</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_FinancialInstrumentAxis_us-gaap_USTreasurySecuritiesMember_LradD4ylt0uzAESlET9k1A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLonger" scale="3" id="Tc_w7DePxcVMUuXjFAldJcWXQ_8_9">23,057</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_FinancialInstrumentAxis_us-gaap_USTreasurySecuritiesMember_LradD4ylt0uzAESlET9k1A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLongerAccumulatedLoss" scale="3" id="Tc_KmgcV0ww_UyZpNb_I9F08A_8_12">398</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_us-gaap_FinancialInstrumentAxis_us-gaap_USTreasurySecuritiesMember_gJhgKG5MIk-r_VdVxod5_g" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12Months" scale="3" id="Tc_2arw5SpZokK-5Qs1kxw-lg_8_15">51,095</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_us-gaap_FinancialInstrumentAxis_us-gaap_USTreasurySecuritiesMember_gJhgKG5MIk-r_VdVxod5_g" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12MonthsAccumulatedLoss" scale="3" id="Tc_MFAoDoSi9Ey-XfNrqwcEng_8_18">174</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:39.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Government agency securities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_FinancialInstrumentAxis_us-gaap_USGovernmentAgenciesDebtSecuritiesMember_nuwqJ_OpWE6z8iWOh2BzFg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12Months" scale="3" id="Tc_8w2ZnGFTFEeLszL44m9fQA_9_3">22,528</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_FinancialInstrumentAxis_us-gaap_USGovernmentAgenciesDebtSecuritiesMember_nuwqJ_OpWE6z8iWOh2BzFg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12MonthsAccumulatedLoss" scale="3" id="Tc_uFnlcR_JD0W9pNk-yX91eQ_9_6">86</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_FinancialInstrumentAxis_us-gaap_USGovernmentAgenciesDebtSecuritiesMember_nuwqJ_OpWE6z8iWOh2BzFg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLonger" scale="3" id="Tc_jBYousu3ekmzenGuhkJvVA_9_9">4,838</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_FinancialInstrumentAxis_us-gaap_USGovernmentAgenciesDebtSecuritiesMember_nuwqJ_OpWE6z8iWOh2BzFg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLongerAccumulatedLoss" scale="3" id="Tc_YxMUlJYEvEi-7AYtweDRlQ_9_12">12</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_us-gaap_FinancialInstrumentAxis_us-gaap_USGovernmentAgenciesDebtSecuritiesMember_qSaUfSjFAk-Go6t8v7C5Vg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12Months" scale="3" id="Tc_BDcILCm_PEuVlUBOkeqY_g_9_15">12,052</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_us-gaap_FinancialInstrumentAxis_us-gaap_USGovernmentAgenciesDebtSecuritiesMember_qSaUfSjFAk-Go6t8v7C5Vg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12MonthsAccumulatedLoss" scale="3" id="Tc_uEgj74LzSkewkUNKZH63fQ_9_18">23</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:39.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Corporate debt</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_FinancialInstrumentAxis_us-gaap_CorporateDebtSecuritiesMember_W6dvtbJBXEa50pS4c58icg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12Months" scale="3" id="Tc_VFHPXxILXUSvTHAuLGfB3g_10_3">19,693</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.69%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_FinancialInstrumentAxis_us-gaap_CorporateDebtSecuritiesMember_W6dvtbJBXEa50pS4c58icg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12MonthsAccumulatedLoss" scale="3" id="Tc_VixDEwNYf0uIUUJcxFvCUw_10_6">138</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_FinancialInstrumentAxis_us-gaap_CorporateDebtSecuritiesMember_W6dvtbJBXEa50pS4c58icg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLonger" scale="3" id="Tc_pPO19TVB70-N90cUVEFZnA_10_9">21,898</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.71%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_FinancialInstrumentAxis_us-gaap_CorporateDebtSecuritiesMember_W6dvtbJBXEa50pS4c58icg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLongerAccumulatedLoss" scale="3" id="Tc_1hGBZ5tfwEOt_lPQlVy5Ow_10_12">277</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_us-gaap_FinancialInstrumentAxis_us-gaap_CorporateDebtSecuritiesMember_IXDRtarETEeWv9xq-DPEYw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12Months" scale="3" id="Tc_kOUq21XzzE-bK7Uy3hJUTg_10_15">40,035</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.71%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_us-gaap_FinancialInstrumentAxis_us-gaap_CorporateDebtSecuritiesMember_IXDRtarETEeWv9xq-DPEYw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12MonthsAccumulatedLoss" scale="3" id="Tc_u9yDIWaMoUObJCzvbzRmJw_10_18">134</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:39.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12Months" scale="3" id="Tc_PagYlVhNSEufNWMzGu8Rxg_11_3">82,012</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.69%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12MonthsAccumulatedLoss" scale="3" id="Tc_bCs3gKXGBkC7TJKJufFcoQ_11_6">308</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLonger" scale="3" id="Tc_lXK_ZchjsEKuOyqkzsZ9UA_11_9">49,793</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.71%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLongerAccumulatedLoss" scale="3" id="Tc_ThHATprVHke5aonySQilIA_11_12">687</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12Months" scale="3" id="Tc_xVPQJXEF1k67-Sn4uYta2A_11_15">103,182</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.71%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12MonthsAccumulatedLoss" scale="3" id="Tc_RufUGueb0k6l3X9l2Qn7ow_11_18">331</ix:nonFraction>)</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">At December 31, 2021, there were <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-5" format="ixt-sec:numwordsen" name="us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLonger" scale="6" id="Narr_oA891pEWYEiW7PgUtpgDIQ">no</ix:nonFraction> short-term investments that had been in a continuous loss position for more than 12 months.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;background:#ffff00;">&#8203;</span></p></ix:nonNumeric></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-18</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Veeco Instruments&#160;Inc. and Subsidiaries</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Notes to Consolidated Financial Statements (Continued)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="Tc_PS88GbStWU2qbb9jI3lHjw_1_2"></a><a id="Tc_hHcLUUwnn0KxdBL--iP1nw_2_2"></a><a id="Tc_SfINPMK1ZUWnEEmvmznCag_2_5"></a><a id="Tc_752cxyZcHUCG0GF_jDyrfg_3_2"></a><a id="Tc_EXxbwGrN5EWKNxzX1cMEZw_3_5"></a><a id="Tc_IG40lRNJFU2Ww6ihjEJ0hg_4_3"></a><a id="Tc_q3WOW13Pm0mlGP972GYy9A_5_0"></a><a id="Tc_EB7px2g240uVHQh_9tlNhA_5_2"></a><a id="Tc_lMTBRwtrBk6HD2oQ3LVJJw_5_5"></a><a id="Tc_ht681fSGxkCE9LRYO6nT3A_6_0"></a><a id="Tc_IDJPj9bM3Uect-JKV5Ff4g_7_0"></a><a id="Tc_cnvPg01kfE-antbtNWo0FA_7_2"></a><a id="Tc_FqwsdTcqfUSq0urpKvVWYg_7_5"></a><ix:continuation id="Tb_vS98dDZ_vU28KmzY-2ArGQ_cont1"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="background:#ffffff;">The contractual maturities of securities classified as available-for-sale at December 31, 2022 were as follows:</span></p><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="us-gaap:InvestmentsClassifiedByContractualMaturityDateTableTextBlock" id="Tb_LnpcD-NWj06RiOUvwBL4UA" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;background:#ffffff;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:72.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.41%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.39%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:72.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:25.01%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, 2022</b></p></td></tr><tr><td style="vertical-align:bottom;width:72.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amortized</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Estimated</b></p></td></tr><tr><td style="vertical-align:bottom;width:72.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.11%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Cost</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Fair&#160;Value</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="7" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:72.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="4" style="vertical-align:bottom;white-space:nowrap;width:23.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:72.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Due in one year or less</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.41%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AvailableForSaleSecuritiesDebtMaturitiesNextRollingTwelveMonthsAmortizedCostBasis" scale="3" id="Tc_wUrZJAQnD0qth5EiX0fj2A_5_3">145,885</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.39%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AvailableForSaleSecuritiesDebtMaturitiesNextRollingTwelveMonthsFairValue" scale="3" id="Tc_cf6RuEm3R0yy7k2fMFcJ_Q_5_6">144,959</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:72.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Due after one year through two years</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.41%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="veco:DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterOneThroughTwoYearsAmortizedCost" scale="3" id="Tc_noi_44UOFEekKtr8rVQPZg_6_3">2,598</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.39%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="veco:DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterOneThroughTwoYearsFairValue" scale="3" id="Tc_SFkXmRrPREypR7jeC8-6UQ_6_6">2,529</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:72.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.41%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AvailableForSaleDebtSecuritiesAmortizedCostBasis" scale="3" id="Tc_43MeKXDVT0u-KJu2-kewPg_7_3">148,483</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.39%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AvailableForSaleSecuritiesDebtSecurities" scale="3" id="Tc_FWQwSpJk30S9VFHfhxOz9Q_7_6">147,488</ix:nonFraction></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;background:#ffffff;">&#8203;</span></p></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Actual maturities may differ from contractual maturities because borrowers may have the right to call or prepay obligations with or without call or prepayment penalties. The realized gains or losses for the years ended December 31, 2022, 2021, and 2020 were immaterial.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Other Investments</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Veeco has an ownership interest of less than <ix:nonFraction unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w" contextRef="As_Of_12_31_2021_srt_RangeAxis_srt_MaximumMember_srt_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_veco_OtherNonMarketableInvestmentMember_H7Pvmz13_kqx4gfV2pbg4g" decimals="2" format="ixt:numdotdecimal" name="veco:CostMethodInvestmentsOwnershipPercentage" scale="-2" id="Narr_oplRonmAYU2esu4hn3EKow"><ix:nonFraction unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w" contextRef="As_Of_12_31_2022_srt_RangeAxis_srt_MaximumMember_srt_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_veco_OtherNonMarketableInvestmentMember_rtkF_4iUZ0eg_uHUJbylvA" decimals="2" format="ixt:numdotdecimal" name="veco:CostMethodInvestmentsOwnershipPercentage" scale="-2" id="Narr_UEC1vWj0CUmTBqqZP6rfZg">20</ix:nonFraction></ix:nonFraction>% in a non-marketable investment in a separate entity, with a carrying value of $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_srt_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_veco_OtherNonMarketableInvestmentMember_x1RDLI5eNkKRCAhimMtNXg" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:EquitySecuritiesWithoutReadilyDeterminableFairValueAmount" scale="6" id="Narr_Ra_oU1JJH024nA1Y8VwTug"><ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_srt_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_veco_OtherNonMarketableInvestmentMember_2yVI4D-Nv0Oahbko0Rcd7w" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:EquitySecuritiesWithoutReadilyDeterminableFairValueAmount" scale="6" id="Narr_iybSVjvX2Uu8JKt8pYdi2Q">2.0</ix:nonFraction></ix:nonFraction> million at December 31, 2022 and 2021. The Company does not exert significant influence over this entity. This equity investment does not have a readily observable market price, and therefore the Company has elected to measure this investment at cost, adjusted for changes in observable market prices minus impairment. The investment is included in &#8220;Other assets&#8221; on the Consolidated Balance Sheets. The investment is subject to periodic impairment reviews which require judgment. The analyses include assessments of the companies&#8217; financial condition, the business outlooks for their products and technologies, their projected results and cash flows, business valuation indications from recent rounds of financing, the likelihood of obtaining subsequent rounds of financing, and the impact of equity preferences held by Veeco relative to other investors. During the year ended December 31, 2021, the Company identified impairment indicators on the Company&#8217;s investment, and recorded a non-cash impairment charge of $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_srt_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_veco_OtherNonMarketableInvestmentMember_us-gaap_IncomeStatementLocationAxis_us-gaap_OtherNonoperatingIncomeExpenseMember_tTSp4c_SCkqj73Uc-NYwIQ" decimals="-5" format="ixt:numdotdecimal" name="veco:ImpairmentLossesInvestmentsNonCash" scale="6" id="Narr_NaGj8ucwHUe7za6bGZeIEA">1.0</ix:nonFraction> million. This impairment charge was included in &#8220;Other income (expense), net&#8221; in the Consolidated Statement of Operations. </p></ix:continuation><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="Tc_LmHGtzvaTUuexf2UttmbDQ_1_2"></a><a id="Tc_IkB3vdJupUKgUKHRHaY0gg_1_5"></a><a id="Tc_t97JMvRchUq8Z5oAh0JqJw_2_2"></a><a id="Tc_mb6GfdLz5kKFTE0_CHCWow_2_5"></a><a id="Tc_V1u0fDdGwUS2uXVmeGFjPQ_3_2"></a><a id="Tc_kUphQxmxUU--8i8VG5HNPg_4_0"></a><a id="Tc_ETBArL4SlkGX9MB9_qu5xQ_4_2"></a><a id="Tc_ydoICMEGIUaDEQIgm8Dy4w_4_5"></a><a id="Tc_X2yjpkIntUqJC0Q5KBb9aw_5_0"></a><a id="Tc_qOR3THN190uONpWRQbVjog_6_0"></a><a id="Tc_A8wv4OaOCkOPAO7zNBhJHQ_7_0"></a><a id="Tc_s5YeElIzG0qHUt74a7XO4w_7_2"></a><a id="Tc_ehc-W2IkwUW92iFpLs494Q_7_5"></a><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="us-gaap:InventoryDisclosureTextBlock" id="Tb_Q5MHCVBvw0W7H1gw2fET5g" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 5 &#8212; Inventories</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Inventories are stated at the lower of cost or net realizable value, with cost determined on a first-in, first-out basis. Inventories consist of the following:</p><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="us-gaap:ScheduleOfInventoryCurrentTableTextBlock" id="Tb_VE-mqmo4nU-iaTmwqmY6pg" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:82%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:65.09%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.56%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:13.34%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.56%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:13.31%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:65.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.87%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:65.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.87%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="7" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:65.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:32.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:65.09%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Materials</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.56%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InventoryRawMaterialsNetOfReserves" scale="3" id="Tc_U8ry-I4kKEG8VsgeRstp8g_4_3">134,940</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.56%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InventoryRawMaterialsNetOfReserves" scale="3" id="Tc_qA5tDYV5wkmw3a4iglWRtg_4_6">96,027</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:65.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Work-in-process</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InventoryWorkInProcessNetOfReserves" scale="3" id="Tc_JXyBbITkbEiQQAI9aFFUlQ_5_3">68,765</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InventoryWorkInProcessNetOfReserves" scale="3" id="Tc_sTbrcJjmSU2vIPVurLgvMg_5_6">54,128</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:65.09%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Finished goods</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.56%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.34%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InventoryFinishedGoodsNetOfReserves" scale="3" id="Tc_Jruq3lwwDEiHlThwtIxC7Q_6_3">3,203</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.56%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.31%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InventoryFinishedGoodsNetOfReserves" scale="3" id="Tc_JN7XD9BBMEehd1BxUDAp8g_6_6">20,703</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:65.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.34%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InventoryNet" scale="3" id="Tc_4gCPCLfHzEmS84ivmqe25A_7_3">206,908</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.31%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InventoryNet" scale="3" id="Tc_mOTXvJY4AESmS_IDuas5Dg_7_6">170,858</ix:nonFraction></p></td></tr></table></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-19</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Veeco Instruments&#160;Inc. and Subsidiaries</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Notes to Consolidated Financial Statements (Continued)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;max-width:100%;position:relative;min-height:10.35pt;"><a id="_10fda21b_be82_4303_8880_09f4646f7036"></a><a id="Tc_Q44H-yBdfEudyaFVMx6MKA_1_2"></a><a id="Tc_fTY8VC6-TECjxhX8w92rLw_1_5"></a><a id="Tc_KzWPb1SaJ0yma4YzxJOe8Q_2_2"></a><a id="Tc_XKIwOGeswUyyxVfaRMjtkg_2_5"></a><a id="Tc_DBin7BeEdEaRCOSeJe6UsA_2_8"></a><a id="Tc_niDiw-i3CEGoRElOpj-ErA_3_2"></a><a id="Tc_RbnlVUuTZUyulk6G8Bs8LA_4_0"></a><a id="Tc_gxT_a7ai6E2sa_ge5yXF3A_4_2"></a><a id="Tc_R9Cr6EsBBEatb7dus4gd-w_4_5"></a><a id="Tc_fcs9NNMrhUGWKa6jdupuOA_4_8"></a><a id="Tc_rO8sZwZGLUSeSRXfccVZoA_5_0"></a><a id="Tc_tzkhuzyBQUurohWKWXVsTQ_5_8"></a><a id="Tc_dek1wy_gRkaZFT_0qLHUAA_6_0"></a><a id="Tc_sSHKWHy0LUO47r_Rt0PzDA_6_8"></a><a id="Tc_4QmvZVVPB0GstcZ_HK412g_7_0"></a><a id="Tc_MtILEw_WAkyUn9uKqwgqhA_7_8"></a><a id="Tc_1lD8KhKYQE-IEqgD6IER0g_8_0"></a><a id="Tc_zf-pJsdVvEy4fSLklVpSJw_9_0"></a><a id="Tc_lZQLLfdrZ0WNdqWQv0I2Fw_10_0"></a><a id="Tc_kbCP8kADFEqZ9ffJPgaYEQ_10_2"></a><a id="Tc_MWVJ0h6W8Umn8O186z3_vA_10_5"></a><a id="_Hlk126065808"></a><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="us-gaap:PropertyPlantAndEquipmentDisclosureTextBlock" id="Tb_v0Ovxq2XwE6N_tENG0NgwA" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 6 &#8212; Property, Plant, and Equipment</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Property, plant, and equipment, net, consist of the following:</p><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="us-gaap:PropertyPlantAndEquipmentTextBlock" id="Tb_H5olaMnAW0uMo8dwFOZ-3w" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:55.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.17%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:middle;width:14.02%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:50%;transform:translate(0,-50%);width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:55.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.36%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.4%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:55.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.36%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.4%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.02%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Average&#160;Useful&#160;Life</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="9" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:55.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:26.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:55.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Land</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_LandMember_aU5K4QzUQU6kgnHxkhVOVg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentGross" scale="3" id="Tc_iXgfohB5AE24Ar6dELRIOw_4_3">5,061</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_LandMember_A8AKF2WQ9kC4PFl5qoLOBQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentGross" scale="3" id="Tc_FyIu57n4zEOVh4nfszGm8w_4_6">5,061</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:14.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">N/A</p></td></tr><tr><td style="vertical-align:bottom;width:55.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Building and improvements</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_BuildingAndBuildingImprovementsMember_fnnxFZqggEeKD96T_6ie3w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentGross" scale="3" id="Tc_swHpzFvI2E2KSjbVcYcg2w_5_3">64,198</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_BuildingAndBuildingImprovementsMember_7HTS-zmtz06SZpVZiNT4Aw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentGross" scale="3" id="Tc_a0LbSPfgwE-j5olMg7sRkA_5_6">63,946</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:14.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_srt_RangeAxis_srt_MinimumMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_BuildingAndBuildingImprovementsMember_Gidmj6LUsky3lImrGRLu6Q" format="ixt-sec:duryear" name="us-gaap:PropertyPlantAndEquipmentUsefulLife" id="Narr_PFuuuG_H5kiYJCvgP0HFfQ"><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_srt_RangeAxis_srt_MinimumMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_BuildingAndBuildingImprovementsMember_sH6SXLqfs0K0vPSkiEYXcw" format="ixt-sec:duryear" name="us-gaap:PropertyPlantAndEquipmentUsefulLife" id="Narr_kKyk1l9ZGUuCWNQFXsA0LA"><span style="font-size:10pt;">10</span></ix:nonNumeric></ix:nonNumeric><span style="font-size:10pt;"> &#8211; </span><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_srt_RangeAxis_srt_MaximumMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_BuildingAndBuildingImprovementsMember_MElevU13P0uYWw7IL8VnOA" format="ixt-sec:durwordsen" name="us-gaap:PropertyPlantAndEquipmentUsefulLife" id="Narr_1wF07W0OXUSkN04uFMU1Ag"><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_srt_RangeAxis_srt_MaximumMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_BuildingAndBuildingImprovementsMember_qBmASH3-q0uEyi5qE_Tsqw" format="ixt-sec:durwordsen" name="us-gaap:PropertyPlantAndEquipmentUsefulLife" id="Narr_BrWkTcs1kkaUeR14Y54iBg"><span style="font-size:10pt;">40 years</span></ix:nonNumeric></ix:nonNumeric></p></td></tr><tr><td style="vertical-align:bottom;width:55.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Machinery and equipment <sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;">(1)</sup></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_MachineryAndEquipmentMember_gBku79yeSkSj40YSYM5HsA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentGross" scale="3" id="Tc_RpMQO9xswEKExneR1inI9w_6_3">155,533</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_MachineryAndEquipmentMember_0wMvYMJgs0WxqMD1vbmumg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentGross" scale="3" id="Tc_4ADYA-s0GkG0B9jPK3J9Qw_6_6">145,656</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:14.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_srt_RangeAxis_srt_MinimumMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_MachineryAndEquipmentMember_G3uFA259L0mcqn0fc993rQ" format="ixt-sec:duryear" name="us-gaap:PropertyPlantAndEquipmentUsefulLife" id="Narr_VqGb2HQw-0OXMKJQd9Kg3Q"><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_srt_RangeAxis_srt_MinimumMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_MachineryAndEquipmentMember_kMBqjcmbAUWhgDS4eqCZSg" format="ixt-sec:duryear" name="us-gaap:PropertyPlantAndEquipmentUsefulLife" id="Narr_MtvJqheTVEerZw9-fwRE0Q"><span style="font-size:10pt;">3</span></ix:nonNumeric></ix:nonNumeric><span style="font-size:10pt;"> &#8211; </span><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_srt_RangeAxis_srt_MaximumMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_MachineryAndEquipmentMember_nLISzPEN7Ey7mFYy9KVbUA" format="ixt-sec:durwordsen" name="us-gaap:PropertyPlantAndEquipmentUsefulLife" id="Narr_tZ6iiBwayUmNKRsXj-3_aw"><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_srt_RangeAxis_srt_MaximumMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_MachineryAndEquipmentMember_r-HNrvY-bUGV71aKV5fymw" format="ixt-sec:durwordsen" name="us-gaap:PropertyPlantAndEquipmentUsefulLife" id="Narr_ve6oXgLdZESbScz7tVFErg"><span style="font-size:10pt;">10 years</span></ix:nonNumeric></ix:nonNumeric></p></td></tr><tr><td style="vertical-align:bottom;width:55.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Leasehold improvements</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.17%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_LeaseholdImprovementsMember_l9lhAAr_XU-dsDhEzU-wsg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentGross" scale="3" id="Tc_mq03WXcqC0iSivYYpyn_8A_7_3">54,764</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_LeaseholdImprovementsMember_A0KFx0NQCUamYDFD5ZwOIA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentGross" scale="3" id="Tc_uRWYZjeypkiS6MdK1D1PBg_7_6">45,979</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:14.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_srt_RangeAxis_srt_MinimumMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_LeaseholdImprovementsMember_9k5QUqwNeE2-rhO-SIBHOg" format="ixt-sec:duryear" name="us-gaap:PropertyPlantAndEquipmentUsefulLife" id="Narr_G6GH64BVTEmDEDNM80mfsQ"><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_srt_RangeAxis_srt_MinimumMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_LeaseholdImprovementsMember_-_qnf0UG4EOBjZTK_lw7vg" format="ixt-sec:duryear" name="us-gaap:PropertyPlantAndEquipmentUsefulLife" id="Narr_aIqScPyIEkiR_e_lSvel8w"><span style="font-size:10pt;">3</span></ix:nonNumeric></ix:nonNumeric><span style="font-size:10pt;"> &#8211; </span><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_srt_RangeAxis_srt_MaximumMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_LeaseholdImprovementsMember_AMkmoruyOku0FoWmUcFIog" format="ixt-sec:durwordsen" name="us-gaap:PropertyPlantAndEquipmentUsefulLife" id="Narr_agrH5VoCokebreFPFq1Fhw"><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_srt_RangeAxis_srt_MaximumMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_LeaseholdImprovementsMember_IfXaVPWhgUKzN7Eq2Wfp1A" format="ixt-sec:durwordsen" name="us-gaap:PropertyPlantAndEquipmentUsefulLife" id="Narr_7jEvfqdceUi5i5xD-QP2EA"><span style="font-size:10pt;">17 years</span></ix:nonNumeric></ix:nonNumeric></p></td></tr><tr><td style="vertical-align:bottom;width:55.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Gross property, plant, and equipment</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentGross" scale="3" id="Tc_ymXUaVGISEGirIgTE_YFkQ_8_3">279,556</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentGross" scale="3" id="Tc_t536JZB9YUKWjIImyOiFLw_8_6">260,642</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:55.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Less: accumulated depreciation and amortization</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.17%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment" scale="3" id="Tc_g5EpG0hx8EiuEmvjng0MfQ_9_3">172,275</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment" scale="3" id="Tc_bjkRlozRGEiv_cDc5np3vw_9_6">160,899</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:55.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"><b style="font-weight:bold;">Net property, plant, and equipment</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.17%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentNet" scale="3" id="Tc_8SXqAoZmYk-9AhQX9CQymA_10_3">107,281</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentNet" scale="3" id="Tc_ITLxrM0PmE-MqHLcfkC6IQ_10_6">99,743</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr></table><div style="font-family:'Times New Roman','Times','serif';font-size:9.0pt;margin-bottom:0pt;margin-top:0pt;min-height:1.19em;position:relative;width:100%;"><div style="background-color:#000000;height:1pt;position:relative;top:0.6em;width:25.0%;border:none;margin:0 auto 0 0;"></div></div><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:9pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(1)</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:9pt;font-style:normal;font-weight:normal;">Machinery and equipment also includes software, furniture, and fixtures</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Depreciation expense was $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:Depreciation" scale="6" id="Narr_7lwADgCSP0eUw5T-SH9ExQ"><ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:Depreciation" scale="6" id="Narr_zRjA2gqfVUSofaxpVETUuA">15.6</ix:nonFraction></ix:nonFraction> million, $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:Depreciation" scale="6" id="Narr_38HKWWb3dEKXyqaPqsw3mA">13.8</ix:nonFraction> million, and $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:Depreciation" scale="6" id="Narr_bVKapL9yjkK-6pzzxsh7lw">15.4</ix:nonFraction> million for the years ended December 31, 2022, 2021, and 2020, respectively. </p></ix:nonNumeric><a id="Tc_4G2RnoDMYkujSCbVfe7soA_1_2"></a><a id="Tc_SBJZvJ_MpUy7r2E8lOnimw_1_5"></a><a id="Tc_1IhDn5_qMUmzn5ddokjXRw_2_2"></a><a id="Tc_OWJjgskabUCe0GAJB-mJKw_2_5"></a><a id="Tc_KvDFgNlCtEiMm49kcrBVgA_2_8"></a><a id="Tc_dk2IuHCHQESsGqdtCtECkw_3_2"></a><a id="Tc_GCz9Fl4clUixIS4A3C84IA_4_0"></a><a id="Tc_DyX5FloVxkWuaLbIn8-skw_4_2"></a><a id="Tc_dNjpXNuWZEm9i4IYifBTMQ_4_5"></a><a id="Tc_k1wPYLp78k6ORC316SXi9w_4_8"></a><a id="_Hlk337494"></a><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="us-gaap:GoodwillAndIntangibleAssetsDisclosureTextBlock" id="Tb_sMDKbsPCTkyFivDSfpixjg" continuedAt="Tb_sMDKbsPCTkyFivDSfpixjg_cont1" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 7 &#8212; Goodwill and Intangible Assets</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Goodwill represents the future economic benefits arising from assets acquired in a business combination that are not individually identified and separately recognized. There were <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-5" format="ixt-sec:numwordsen" name="us-gaap:GoodwillPeriodIncreaseDecrease" scale="6" id="Narr_tozg1weZG0W1c3R-B-VNiw"><ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-5" format="ixt-sec:numwordsen" name="us-gaap:GoodwillPeriodIncreaseDecrease" scale="6" id="Narr_vjTWs5BLxEaFXwOPU9wvTw">no</ix:nonFraction></ix:nonFraction> changes in goodwill balances during the years ended December 31, 2022 or 2021, while the below table reflects the gross carrying amounts and accumulated impairments as of the respective periods:</p><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="us-gaap:ScheduleOfGoodwillTextBlock" id="Tb_iOCRUorcZ0SS4IV8_U8otw" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:52.19%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:2.43%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.96%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:2.44%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.96%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:2.44%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:12.11%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:52.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Gross&#160;carrying</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;width:13.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Accumulated</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;width:13.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:52.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">amount</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">impairment</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.59%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Net amount</b></p></td></tr><tr><td style="vertical-align:bottom;width:52.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:45.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:52.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Balance at December&#160;31, 2022 and 2021</p></td><td style="vertical-align:bottom;width:2.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:GoodwillGross" scale="3" id="Tc_zyh1sKv2nECw4N-ObapGOg_4_3"><ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:GoodwillGross" scale="3" id="Tc_zyh1sKv2nECw4N-ObapGOg_4_3_2">430,331</ix:nonFraction></ix:nonFraction></p></td><td style="vertical-align:bottom;width:2.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:GoodwillImpairedAccumulatedImpairmentLoss" scale="3" id="Tc_1y1OJXRJa02q2kORbjUoCg_4_6"><ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:GoodwillImpairedAccumulatedImpairmentLoss" scale="3" id="Tc_1y1OJXRJa02q2kORbjUoCg_4_6_2">248,388</ix:nonFraction></ix:nonFraction></p></td><td style="vertical-align:bottom;width:2.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:Goodwill" scale="3" id="Tc_pGRQKHAxv0O_waMhnfTKVA_4_9"><ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:Goodwill" scale="3" id="Tc_pGRQKHAxv0O_waMhnfTKVA_4_9_2">181,943</ix:nonFraction></ix:nonFraction></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company performs its annual goodwill impairment test at the beginning of the fourth quarter each year. As the Company maintains a single goodwill reporting unit, it determines the fair value of its reporting unit based upon the Company&#8217;s adjusted market capitalization. The annual test performed at the beginning of the fourth quarter of fiscal 2022, 2021, and 2020 did not result in any potential impairment as the fair value of the reporting unit was determined to exceed the carrying amount of the reporting unit.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The valuation of goodwill will continue to be subject to changes in the Company&#8217;s market capitalization and observable market control premiums. This analysis is sensitive to changes in the Company&#8217;s stock price and absent other qualitative factors, the Company may be required to record goodwill impairment charges in future periods if the stock price declines and remains depressed for an extended period of time.&#160; </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></ix:nonNumeric></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-20</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Veeco Instruments&#160;Inc. and Subsidiaries</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Notes to Consolidated Financial Statements (Continued)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="Tc_pvnnL8VHPkKHzoXvH3MeMg_1_4"></a><a id="Tc_YpupppNx5ES3cqgynAJrMg_1_13"></a><a id="Tc_Ft7dr2fhZ0OJhCmoAJn4Dg_2_2"></a><a id="Tc_jINvBXCZ7EivkV6noE77VQ_2_7"></a><a id="Tc_whZOxbn2WUuf5PtKGzXsfA_2_16"></a><a id="Tc_p7mn-vYwEEGm_Tst06zdRw_3_2"></a><a id="Tc_c8iNA8xIL0KesLKUYQd-ZQ_3_4"></a><a id="Tc_4nZCqEYXtky562e62UQKCA_3_7"></a><a id="Tc_G1t_1GNPcUq9WsUtv_JEZA_3_13"></a><a id="Tc_Cv50vi7cZEGVq0PUXJP01Q_3_16"></a><a id="Tc_RmkKZuAgCkem_u5EgTuFMg_4_2"></a><a id="Tc_uS96kSnwPkGNKS1s9YBoxg_4_4"></a><a id="Tc_a9X_eeiMg0eMrDJtCylxkA_4_7"></a><a id="Tc_ILamX7Dy4Eao1dqSB5xr9w_4_10"></a><a id="Tc__YbG2bji2EG4hIVhhKnGmA_4_13"></a><a id="Tc_a_LR1iOBt0qk1yl-I5uQog_4_16"></a><a id="Tc_-DyhdRDCIEWLWI6xPJd37w_4_19"></a><a id="Tc_Glz6e0ZJtkeCPxOiN0kC2g_5_2"></a><a id="Tc_TW9b5V_dK0qCs7b5lxTn-g_5_4"></a><a id="Tc_RhD0cMda-0ep1iJe5tab6A_5_7"></a><a id="Tc_DBUAvrHuikGTLYlYEkNquA_5_10"></a><a id="Tc_ZdppTqKtlUO5omclKoovZg_5_13"></a><a id="Tc_s9LRqXkmzE-GR5hWAnxhCA_5_16"></a><a id="Tc_fdeWxM-F7EmMXtFSNpH6uQ_5_19"></a><a id="Tc_2BqwIjmkdEWsPGX9Ie_2yw_6_2"></a><a id="Tc_YVCE_aiFzkmi9sfcVLTJ1A_6_4"></a><a id="Tc_kbF2bBnCMkaHVIjFtJtRNg_7_0"></a><a id="Tc_XnpunHJLJE689YRCEom9Aw_7_4"></a><a id="Tc_LLechvdM80CfZPO2mXYAOg_7_7"></a><a id="Tc_O-XerYUtaU-sw7X-wRtLcw_7_10"></a><a id="Tc_XQ0cvNKm2ka-KGrK8QSbsQ_7_13"></a><a id="Tc_8-1nVXlExESGzlVcOvuuGA_7_16"></a><a id="Tc_KgORBLYxqU-bFtaLTQHzNA_7_19"></a><a id="Tc_o3BVD7rdSUuLt17ra4PONA_8_0"></a><a id="Tc_PepAaLOVaUuJ4hV51sw_mA_9_0"></a><a id="Tc_leguHzz7HEC6C9x8r6_Piw_10_0"></a><a id="Tc_GvIoLz2NJEKNP2U2X7fzhA_10_2"></a><a id="Tc_f1XQjHafvkGGw81FB1HLDw_10_11"></a><a id="Tc_Ldwjv8qXDkiVpe63mLzuPw_10_20"></a><a id="Tc_j2ZDbQvdyECAo6-zRa25ig_11_0"></a><a id="Tc_1rtIuXUgFUKtwz96GpCjhA_11_4"></a><a id="Tc_F7h2mpNP_EGtFRjkLMntMQ_11_7"></a><a id="Tc_GAkR8_VSX0ueEPWdN2QbyA_11_10"></a><a id="Tc_BJ5vBq50Bkqs7AneDLY_Aw_11_13"></a><a id="Tc_KgloXsGQwEGJ5skfvujWRQ_11_16"></a><a id="Tc_tvqRvtRTxUiv8rp5Qtkb5w_11_19"></a><a id="Tc_iwznJKCbX0u9GqDNxoxE3Q_1_2"></a><a id="Tc_zPhJ9qjhyES1xfbHDpz9Ow_2_2"></a><a id="Tc_mGI-xe8OyEO5kUKd9HlumA_3_0"></a><a id="Tc_CUOxP1jZVEy-RdRYdt7_Iw_3_2"></a><a id="Tc_O4vjKKlF6UiRS4-UMxyWRg_4_0"></a><a id="Tc_rAjQXg_1bUODUCJe3a9zXg_5_0"></a><a id="Tc_LRjKy1mvck2QM1aJmNiN2A_6_0"></a><a id="Tc_WQL0RGOUaEWypOdVD4x8nw_7_0"></a><a id="Tc_F2Wi12tLi0S6kb7N_sSXCA_8_0"></a><a id="Tc_EnASiqDl5k2AEJl7d_Wbzw_9_0"></a><a id="Tc_zvAD2vti7Uu1yzlGdsQeKw_9_2"></a><ix:continuation id="Tb_sMDKbsPCTkyFivDSfpixjg_cont1"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The components of purchased intangible assets were as follows:</p><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="veco:ScheduleOfIntangibleAssetsExcludingGoodwillTableTextBlock" id="Tb_zzqIUxyLUEmb3xiu_SuVow" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:26.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span 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style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:26.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:29.42%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, 2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:29.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, 2021</b></p></td></tr><tr><td style="vertical-align:bottom;width:26.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Average</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Accumulated</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Accumulated</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:26.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Remaining</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Gross</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amortization</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Gross</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amortization</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:26.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amortization</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Carrying</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">and</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Net </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Carrying</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">and</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Net</b></p></td></tr><tr><td style="vertical-align:bottom;width:26.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:9.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Period</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.86%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amount</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:9.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Impairment</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.83%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amount</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.86%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amount</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:9.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Impairment</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amount</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="21" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:26.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in years)</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="17" style="vertical-align:bottom;white-space:nowrap;width:60.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:26.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Technology</p></td><td style="vertical-align:middle;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;white-space:nowrap;width:9.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TechnologyBasedIntangibleAssetsMember_c_0gAxKnfECDwazop899FQ" format="ixt-sec:duryear" name="us-gaap:FiniteLivedIntangibleAssetsRemainingAmortizationPeriod1" id="Tc_-ut4gvFTZkyjzskXQIQjcA_7_2"><span style="font-size:10pt;"> 2.6</span></ix:nonNumeric></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TechnologyBasedIntangibleAssetsMember_PHfPLb4yx0-K74vdVH6uRg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FiniteLivedIntangibleAssetsGross" scale="3" id="Tc_26S_uQYjp0K4CyKX76xdYA_7_5">327,908</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TechnologyBasedIntangibleAssetsMember_PHfPLb4yx0-K74vdVH6uRg" decimals="-3" format="ixt:numdotdecimal" name="veco:FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment" scale="3" id="Tc_t-cERPjOxEyJOkiVScZtKQ_7_8">316,918</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TechnologyBasedIntangibleAssetsMember_PHfPLb4yx0-K74vdVH6uRg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FiniteLivedIntangibleAssetsNet" scale="3" id="Tc_mQw5kouuv0-HVLwcocyi4Q_7_11">10,990</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TechnologyBasedIntangibleAssetsMember_lmu-TREvc0aWZRgdlyu2XA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FiniteLivedIntangibleAssetsGross" scale="3" id="Tc_McEAQAaUH06bDZDbzVpe-g_7_14">327,908</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TechnologyBasedIntangibleAssetsMember_lmu-TREvc0aWZRgdlyu2XA" decimals="-3" format="ixt:numdotdecimal" name="veco:FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment" scale="3" id="Tc_BGWYf5qf-EmBpVXRVwAbsw_7_17">310,551</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.86%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TechnologyBasedIntangibleAssetsMember_lmu-TREvc0aWZRgdlyu2XA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FiniteLivedIntangibleAssetsNet" scale="3" id="Tc_9R8wN_GcQkaqX0g7KUqbew_7_20">17,357</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:26.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Customer relationships</p></td><td style="vertical-align:bottom;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_CustomerRelationshipsMember_yVD0ya2vVk2nYytNKf5htQ" format="ixt-sec:duryear" name="us-gaap:FiniteLivedIntangibleAssetsRemainingAmortizationPeriod1" id="Tc_PEcUkl3cUEqDUzg9858x5Q_8_2"><span style="font-size:10pt;"> 6.3</span></ix:nonNumeric></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_CustomerRelationshipsMember_dwE4sMbj40KrNc4QqruMbQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FiniteLivedIntangibleAssetsGross" scale="3" id="Tc_GaWssk2RXE66DbUVMVjEbA_8_5">146,465</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_CustomerRelationshipsMember_dwE4sMbj40KrNc4QqruMbQ" decimals="-3" format="ixt:numdotdecimal" name="veco:FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment" scale="3" id="Tc_ddAiVEBXYkGiUoQHF7RT6A_8_8">135,415</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_CustomerRelationshipsMember_dwE4sMbj40KrNc4QqruMbQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FiniteLivedIntangibleAssetsNet" scale="3" id="Tc_qCoXvNuj7EqsXVyfDxOa5g_8_11">11,050</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_CustomerRelationshipsMember_h7b9anFZuE2SoSFkMvCcXQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FiniteLivedIntangibleAssetsGross" scale="3" id="Tc_aH3wMCNF4EWJSSQ4DeBLWg_8_14">146,465</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_CustomerRelationshipsMember_h7b9anFZuE2SoSFkMvCcXQ" decimals="-3" format="ixt:numdotdecimal" name="veco:FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment" scale="3" id="Tc_lGXs2o4Y3E6VokTwX6NOZA_8_17">132,970</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_CustomerRelationshipsMember_h7b9anFZuE2SoSFkMvCcXQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FiniteLivedIntangibleAssetsNet" scale="3" id="Tc_cdUjr8LCNkSDeZofOvCg-Q_8_20">13,495</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:26.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Trademarks and tradenames</p></td><td style="vertical-align:bottom;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;white-space:nowrap;width:9.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TrademarksAndTradeNamesMember_GGXDJQsEwUWFPkGXDENgHA" format="ixt-sec:duryear" name="us-gaap:FiniteLivedIntangibleAssetsRemainingAmortizationPeriod1" id="Tc_qZ7Oi-5RVEOFMcOa50GpDw_9_2"><span style="font-size:10pt;"> 1.5</span></ix:nonNumeric></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TrademarksAndTradeNamesMember_K82mRsCyb0GBUN-LnYfN8Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FiniteLivedIntangibleAssetsGross" scale="3" id="Tc_1ITfxtah80yF4LCbcES0hw_9_5">30,910</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TrademarksAndTradeNamesMember_K82mRsCyb0GBUN-LnYfN8Q" decimals="-3" format="ixt:numdotdecimal" name="veco:FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment" scale="3" id="Tc_YXRhgjvrmE6W38Nvr9NTZg_9_8">29,063</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TrademarksAndTradeNamesMember_K82mRsCyb0GBUN-LnYfN8Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FiniteLivedIntangibleAssetsNet" scale="3" id="Tc_hXh4QVKTVE2lkPgI_Ibm1A_9_11">1,847</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TrademarksAndTradeNamesMember_as4jILWK1k2E1dfNQhh-Hw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FiniteLivedIntangibleAssetsGross" scale="3" id="Tc_tljlhhIoJE2wIAt_nEvpiw_9_14">30,910</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TrademarksAndTradeNamesMember_as4jILWK1k2E1dfNQhh-Hw" decimals="-3" format="ixt:numdotdecimal" name="veco:FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment" scale="3" id="Tc_427KZQyjnkuFT46CeWVt7w_9_17">27,857</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.86%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TrademarksAndTradeNamesMember_as4jILWK1k2E1dfNQhh-Hw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FiniteLivedIntangibleAssetsNet" scale="3" id="Tc_ncQCyR1juUukJC5n2KIj4A_9_20">3,053</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:26.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Other</p></td><td style="vertical-align:bottom;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"> -</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_OtherIntangibleAssetsMember_OSD-9IgK00iI_MRgFr83eg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FiniteLivedIntangibleAssetsGross" scale="3" id="Tc_fRgOMHtN4USEfKy8U81ZSw_10_5">3,686</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.34%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.08%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_OtherIntangibleAssetsMember_OSD-9IgK00iI_MRgFr83eg" decimals="-3" format="ixt:numdotdecimal" name="veco:FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment" scale="3" id="Tc_403Vg561gEWzdRmWHyAWzw_10_8">3,686</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_OtherIntangibleAssetsMember_Wq5eHdCnDUSHppKmNim6Mg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FiniteLivedIntangibleAssetsGross" scale="3" id="Tc_2nRtYdqCY0qbUtmrDbPagg_10_14">3,686</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.34%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.08%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_OtherIntangibleAssetsMember_Wq5eHdCnDUSHppKmNim6Mg" decimals="-3" format="ixt:numdotdecimal" name="veco:FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment" scale="3" id="Tc_845OBOniX0GfxNQdfswZBA_10_17">3,686</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.86%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;width:26.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 12pt;"><span style="font-size:10pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;white-space:nowrap;width:9.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" format="ixt-sec:duryear" name="us-gaap:FiniteLivedIntangibleAssetsRemainingAmortizationPeriod1" id="Tc_rw81Mwibz0uel2CLldR7kQ_11_2"><span style="font-size:10pt;"> 4.2</span></ix:nonNumeric></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FiniteLivedIntangibleAssetsGross" scale="3" id="Tc_PpFTgvb95USq_ZiDGGizKw_11_5">508,969</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.34%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.08%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="veco:FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment" scale="3" id="Tc_AHNiAPFWR0O9kwCcTlE4iw_11_8">485,082</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FiniteLivedIntangibleAssetsNet" scale="3" id="Tc_q8bph2Gig0aq0iJa1sUeqQ_11_11">23,887</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FiniteLivedIntangibleAssetsGross" scale="3" id="Tc_0Av7DglC6UmgpInfKvqjUg_11_14">508,969</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.34%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.08%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="veco:FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment" scale="3" id="Tc_5vrAL-QKQEaaolv_tzN8Iw_11_17">475,064</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.86%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FiniteLivedIntangibleAssetsNet" scale="3" id="Tc_OxAcsgi4zkuQxjp3_y0YTg_11_20">33,905</ix:nonFraction></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Other intangible assets primarily consist of patents, licenses, and backlog.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Based on the intangible assets recorded at December 31, 2022, and assuming no subsequent additions to or impairment of the underlying assets, the remaining estimated annual amortization expense, is expected to be as follows:</p><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="us-gaap:ScheduleofFiniteLivedIntangibleAssetsFutureAmortizationExpenseTableTextBlock" id="Tb_FJ_bgedPrk27HlBseZqJVg" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:46%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:75.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:17.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:75.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:20.82%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amortization</b></p></td></tr><tr><td style="vertical-align:bottom;width:75.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:20.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:75.58%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2023</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.58%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.67%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:17.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FiniteLivedIntangibleAssetsAmortizationExpenseNextTwelveMonths" scale="3" id="Tc_HcTu_QeF_UKiG_Y1_GGC6Q_3_3">8,347</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:75.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2024</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:17.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FiniteLivedIntangibleAssetsAmortizationExpenseYearTwo" scale="3" id="Tc_vc-g976A80qIuNMB4nRT3Q_4_3">6,708</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:75.58%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2025</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.58%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.67%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:17.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FiniteLivedIntangibleAssetsAmortizationExpenseYearThree" scale="3" id="Tc_4XRg1UMAEEy6AtGVGhMmig_5_3">3,136</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:75.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2026</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:17.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FiniteLivedIntangibleAssetsAmortizationExpenseYearFour" scale="3" id="Tc_72Aye-LIs0SYcXrR5o1mcg_6_3">2,134</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:75.58%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2027</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.58%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.67%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:17.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FiniteLivedIntangibleAssetsAmortizationExpenseYearFive" scale="3" id="Tc_DVlHrzZbA0yEUj_BI9dm2A_7_3">1,550</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:75.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Thereafter</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.67%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:17.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FiniteLivedIntangibleAssetsAmortizationExpenseAfterYearFive" scale="3" id="Tc_SUUaNKU8_02sDBjRDOEzBw_8_3">2,012</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:75.58%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Total</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.58%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.67%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:17.15%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FiniteLivedIntangibleAssetsNet" scale="3" id="Tc_elqwu6Py60G3rzSxeJfL2g_9_3">23,887</ix:nonFraction></p></td></tr></table></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></ix:continuation><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="Tc_U2URKiEFukmj3BAkYfunEw_1_2"></a><a id="Tc_ua3IJRb32E6jNMl1XDsK4g_1_5"></a><a id="Tc_K36GbgApOESQ2yaJNH0eWg_2_2"></a><a id="Tc_ub8MlpkWH0ay9KIW4eMS4Q_2_5"></a><a id="Tc_Jr8SQ4SXa06NKprH_AZECA_3_2"></a><a id="Tc_FFoZvqTioEKKaeCaiY2nsw_4_0"></a><a id="Tc_lSBSjVAam0-EyuPqsmLYDQ_4_2"></a><a id="Tc_MSp6mfhHnkmMT1WbYIC_Qg_4_5"></a><a id="Tc_fKRMs1csrkWvombGbuYeoQ_5_0"></a><a id="Tc_CXXL3CoI9kGFsU_kkQrWnw_7_0"></a><a id="Tc_hSjb6Z4vNkOfNpSEuI5lPw_8_0"></a><a id="Tc_SM6kCcEJTESROZK1K3W6GQ_9_0"></a><a id="Tc_6G7gusn5uEOFXwUen1hMNg_9_3"></a><a id="Tc_cTuMLT_ukE-2SoV8z5Q_Og_10_0"></a><a id="Tc_G5xz5keQVUKu5Ejl8VC0Aw_11_0"></a><a id="Tc_T-FgCXt6UUODZSxjtqREoA_12_0"></a><a id="Tc_OzGS0pwtL0u7AJiGahwD7A_12_2"></a><a id="Tc_axfDCXOAO0yBEEuHiwm-rA_12_5"></a><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="us-gaap:AccountsPayableAndAccruedLiabilitiesDisclosureTextBlock" id="Tb_RU_-FXs4-Uy38OcD_7npbA" continuedAt="Tb_RU_-FXs4-Uy38OcD_7npbA_cont1" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 8 &#8212; Accrued Expenses and Other Liabilities</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The components of accrued expenses and other current liabilities were as follows:</p><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="us-gaap:ScheduleOfAccruedLiabilitiesTableTextBlock" id="Tb_PkTcv213Ykayxm-darKYaA" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:70.71%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:70.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.51%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.51%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:70.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.51%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.51%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="7" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:70.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:27.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:70.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Payroll and related benefits</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:EmployeeRelatedLiabilitiesCurrent" scale="3" id="Tc_5FoleVUvXEaPE966TACHJw_4_3">30,044</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:EmployeeRelatedLiabilitiesCurrent" scale="3" id="Tc_h6geJRjLKECamXrK9fDCkQ_4_6">35,712</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:70.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Warranty</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrualClassifiedCurrent" scale="3" id="Tc_rbAFSomWfEiPovsPUgXicQ_5_3">8,601</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrualClassifiedCurrent" scale="3" id="Tc_TaW8N3yUj0Kqp61frSfJ9g_5_6">7,878</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:70.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="-sec-ix-hidden:Hidden_EGVCh5E7LkOiByzYXsbm8w;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Operating lease liabilities</span></span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseLiabilityCurrent" scale="3" id="Tc_CnZgp5sW5Em0OfmMR_UKLQ_6_3">3,333</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseLiabilityCurrent" scale="3" id="Tc_qnvCejdEt0K-vKBmCKAB9A_6_6">4,437</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:70.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Interest</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InterestPayableCurrent" scale="3" id="Tc_vVki01XhXkCxPKzou4C5pg_7_3">2,853</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InterestPayableCurrent" scale="3" id="Tc_PInBoTmXcU2ts5X-YAxCEw_7_6">2,757</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:70.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Professional fees</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AccruedProfessionalFeesCurrent" scale="3" id="Tc_Uvj0pU2aXECUS-ENikzflA_8_3">2,102</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AccruedProfessionalFeesCurrent" scale="3" id="Tc_74zEXYfgCUCiglAOx4r4eA_8_6">1,467</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:70.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Legal settlement</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LossContingencyAccrualCarryingValueCurrent" scale="3" id="Tc_IVWcJu4dV0CpXaX0IvUwBw_9_6">15,000</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:70.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Sales, use, and other taxes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:TaxesPayableCurrent" scale="3" id="Tc_LshXSubE0ka2FAggEF9DEQ_10_3">2,027</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:TaxesPayableCurrent" scale="3" id="Tc_nGVjPfGQl0yRlo2Gp9cRew_10_6">4,889</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:70.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Other</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherAccruedLiabilitiesCurrent" scale="3" id="Tc_KY8xQW65e0qwrH5nEeVXTQ_11_3">7,071</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherAccruedLiabilitiesCurrent" scale="3" id="Tc_Aa6tV17C8kmaDW8uco2eLA_11_6">7,612</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:70.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="veco:AccruedAndOtherLiabilitiesCurrent" scale="3" id="Tc_3jXSd88d-ESapH7UHZIIbg_12_3">56,031</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="veco:AccruedAndOtherLiabilitiesCurrent" scale="3" id="Tc_-zrcaf4rx0e05oj8Q8GLuQ_12_6">79,752</ix:nonFraction></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Customer deposits and deferred revenue</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Customer deposits totaled $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:ContractWithCustomerRefundLiabilityCurrent" scale="6" id="Narr_3izLVVaSVUyUAx2KHE1mcw">110.2</ix:nonFraction> million and $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:ContractWithCustomerRefundLiabilityCurrent" scale="6" id="Narr_kA4mSw82Xk2fkjLHuhWbRw">46.9</ix:nonFraction> million at December 31, 2022 and 2021, respectively, which are included in &#8220;Customer deposits and deferred revenue&#8221; in the Consolidated Balance Sheets. Deferred revenue represents amounts billed, other than deposits, in excess of the revenue that can be recognized on a particular contract at the balance sheet date. Changes in deferred revenue were as follows:</p></ix:nonNumeric></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-21</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Veeco Instruments&#160;Inc. and Subsidiaries</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Notes to Consolidated Financial Statements (Continued)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="Tc_Fmx4TunvQUydfnzrSjcYgg_1_2"></a><a id="Tc_K4PtkCGWzkuYHL1_1hGWsw_2_0"></a><a id="Tc_VOxy_F5Ia0-ZiJ2lCIAMyA_2_2"></a><a id="Tc_7GI0k4xeIEOilKHwF2gHHg_3_0"></a><a id="Tc_ZGaldKlBx0iivt13KNFiUg_4_0"></a><a id="Tc_ncTEXdMNy0Cw4-l90TiEdw_5_0"></a><a id="Tc_YHnuhurKFUO391Si05B_1A_5_2"></a><ix:continuation id="Tb_RU_-FXs4-Uy38OcD_7npbA_cont1"><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="veco:ScheduleOfDeferredRevenueTableTextBlock" id="Tb_WFrDnXupAEKs1kVrVyY7kw" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:80.44%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.55%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.55%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:14.44%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:80.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:16.99%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:80.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Balance - December&#160;31, 2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.55%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.55%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ContractWithCustomerLiability" scale="3" id="Tc_tiS-_E_goU68m8_pCdow4g_2_3">16,276</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:80.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Deferral of revenue</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncreaseDecreaseInContractWithCustomerLiability" sign="-" scale="3" id="Tc_koRWNEgMaECrNTvJ2SXscQ_3_3">8,081</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:80.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Recognition of unearned revenue</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.55%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.55%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.44%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ContractWithCustomerLiabilityRevenueRecognized" sign="-" scale="3" id="Tc_0ZyMWhetWUyku4OZYSHqFw_4_3">7,367</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:80.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Balance - December&#160;31, 2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.55%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.44%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ContractWithCustomerLiability" scale="3" id="Tc_5Lcds9lo50mPYw_NyMfckg_5_3">16,990</ix:nonFraction></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">As of December&#160;31, 2022, the Company has approximately </span><span style="font-size:10pt;">$<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:RevenueRemainingPerformanceObligation" scale="6" id="Narr_RdRVoXGNyU2vjDST4QTCEg">192.0</ix:nonFraction></span><span style="font-size:10pt;"> million of remaining performance obligations on contracts with an original estimated duration of </span><ix:nonNumeric contextRef="As_Of_12_31_2022_srt_RangeAxis_srt_MinimumMember_iF5wa-z6u0mt0pln3ZRKEw" format="ixt-sec:durwordsen" name="us-gaap:RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionPeriod1" id="Narr_fkvWRU0qyEqN1-9hHE6CpA"><span style="font-size:10pt;">one year</span></ix:nonNumeric><span style="font-size:10pt;"> or more, of which approximately </span><span style="font-size:10pt;"><ix:nonFraction unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w" contextRef="As_Of_12_31_2022_us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionStartDateAxis_veco_cnst_2023-01-01_x-uik2mTUUOaGbc3btd01g" decimals="2" format="ixt:numdotdecimal" name="veco:RevenueRemainingPerformanceObligationExpectedTimingPercentage" scale="-2" id="Narr_PpArc0jqYUaalzSKpyldNw">37</ix:nonFraction>%</span><span style="font-size:10pt;"> is expected to be recognized within </span><ix:nonNumeric contextRef="As_Of_12_31_2022_us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionStartDateAxis_veco_cnst_2023-01-01_x-uik2mTUUOaGbc3btd01g" format="ixt-sec:durwordsen" name="us-gaap:RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionPeriod1" id="Narr_0_N32A_LiUW_2Upg6hrEQQ"><span style="font-size:10pt;">one year</span></ix:nonNumeric><span style="font-size:10pt;">, with the remaining amounts expected to be recognized between </span><span style="-sec-ix-hidden:Hidden_lMHLKbK2aECnPZnMvM5qZg;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">one</span></span><span style="font-size:10pt;"> to </span><ix:nonNumeric contextRef="As_Of_12_31_2022_srt_RangeAxis_srt_MaximumMember_us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionStartDateAxis_veco_cnst_2024-01-01_BZqaswuaTU6Gg2uzA8NeVw" format="ixt-sec:durwordsen" name="us-gaap:RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionPeriod1" id="Narr_obrpUxm3yk6atNpo6pwPvQ"><span style="font-size:10pt;">three years</span></ix:nonNumeric><span style="font-size:10pt;">. The Company has elected to exclude disclosures regarding remaining performance obligations that have an original expected duration of </span><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" format="ixt:booleantrue" name="us-gaap:RevenuePracticalExpedientRemainingPerformanceObligation" id="Narr_8JwCFR4qbka-IbdNRlZVDg"><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" format="ixt:booleantrue" name="us-gaap:RevenuePracticalExpedientRemainingPerformanceObligation" id="Narr_fky0Sq01Hk-llWBR4oaGTQ"><span style="font-size:10pt;">one</span></ix:nonNumeric><span style="font-size:10pt;"> year</span></ix:nonNumeric><span style="font-size:10pt;"> or less.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Other liabilities</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">At December 31, 2022 and 2021, other liabilities included (i) asset retirement obligations of $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_BalanceSheetLocationAxis_us-gaap_OtherLiabilitiesMember_79zlpumRSUyxTgOHdVLA_Q" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:AssetRetirementObligationsNoncurrent" scale="6" id="Narr_voiuh1LTOkaORl2UkaSj3Q">0.7</ix:nonFraction> million and $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_us-gaap_BalanceSheetLocationAxis_us-gaap_OtherLiabilitiesMember_8L6qodKhvEqd88yeBiGHBg" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:AssetRetirementObligationsNoncurrent" scale="6" id="Narr_7lGYA7AtB0iYWmP_SN9yJA">2.8</ix:nonFraction> million, respectively; (ii) income tax payables of $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_BalanceSheetLocationAxis_us-gaap_OtherLiabilitiesMember_79zlpumRSUyxTgOHdVLA_Q" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:AccruedIncomeTaxesNoncurrent" scale="6" id="Narr_KzhVOm9IZUSTe5_1In3Ohw">0.4</ix:nonFraction> million for both periods, and (iii) medical and dental benefits for former executives of $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_BalanceSheetLocationAxis_us-gaap_OtherLiabilitiesMember_79zlpumRSUyxTgOHdVLA_Q" decimals="-5" format="ixt:numdotdecimal" name="veco:MedicalAndDentalBenefitLiabilitiesNoncurrent" scale="6" id="Narr_vyu8RDUMtUKN5f8tnhNaLQ">2.0</ix:nonFraction> million and $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_us-gaap_BalanceSheetLocationAxis_us-gaap_OtherLiabilitiesMember_8L6qodKhvEqd88yeBiGHBg" decimals="-5" format="ixt:numdotdecimal" name="veco:MedicalAndDentalBenefitLiabilitiesNoncurrent" scale="6" id="Narr_gPd1B6cOIUGXURMFW2ovcg"><ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_us-gaap_BalanceSheetLocationAxis_us-gaap_OtherLiabilitiesMember_8L6qodKhvEqd88yeBiGHBg" decimals="-5" format="ixt:numdotdecimal" name="veco:MedicalAndDentalBenefitLiabilitiesNoncurrent" scale="6" id="Narr_-7W2jCTmF0ae72C_QTn-Gw">1.8</ix:nonFraction></ix:nonFraction> million, respectively. </p></ix:continuation><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p><a id="_Hlk126075501"></a><a id="Tc_ZjxjbqZE0Uihj-h8XwatDg_1_2"></a><a id="Tc_9BcMyqSD9Ea4nkow4AZI7g_2_2"></a><a id="Tc_mVoqRHKEsEaUfY2mGhQbGA_2_5"></a><a id="Tc_n3_FGvqwG0ecAV0EHunPqg_2_8"></a><a id="Tc_IllUsqpxhkygkXe8olVYwQ_3_3"></a><a id="Tc_wnVTUwPH7kSykoiZoSHq6g_4_0"></a><a id="Tc_I8yPEPU_TEKXa3op2F-nCg_4_2"></a><a id="Tc_TBri08ahEE6Ocu1-mb4Mvg_4_5"></a><a id="Tc_LKBZy2kzA06SwQO09Duljg_4_8"></a><a id="Tc_5tyXJu24u0Gr8I0yWXpxQQ_5_0"></a><a id="Tc_ijIZt_dPGkaotjbqQNpQgw_6_0"></a><a id="Tc_Zp0BfyjgXk6eMQ3luVvU0g_7_0"></a><a id="Tc_cAuzV_YySkGBtyKkU3yFWw_8_0"></a><a id="Tc_zwJq12fVm021yxe-hxjA_A_8_2"></a><a id="Tc_fxKVUSeV60CjA_sE5uLgfA_8_5"></a><a id="Tc_rXb3-xxNlE2RIiTP0KxsTg_8_8"></a><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="us-gaap:CommitmentsAndContingenciesDisclosureTextBlock" id="Tb_HeAfaC_D2UaSxgZNSmm1nA" continuedAt="Tb_HeAfaC_D2UaSxgZNSmm1nA_cont1" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 9 &#8212; Commitments and Contingencies</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Warranty</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Changes in the Company&#8217;s product warranty reserves were as follows:</p><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="us-gaap:ScheduleOfProductWarrantyLiabilityTableTextBlock" id="Tb_DB66krn77ES2RjFYTc0-mQ" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:61.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:61.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:36.36%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:61.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.71%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="10" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:61.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="7" style="vertical-align:bottom;white-space:nowrap;width:35.08%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:61.57%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Balance - beginning of the year</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrual" scale="3" id="Tc_e21FuWQjBUmVlVTAyKyl8w_4_3">7,878</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2020_JUGLvBeldEeSTj1WqQBVdQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrual" scale="3" id="Tc_AZYGXPgUakiGHA-KskK6IQ_4_6">5,058</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2019_dyqJ8hTIuEW6V2L_RveF0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrual" scale="3" id="Tc_enR72LC0xEKbv8GLrozSAw_4_9">7,067</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:61.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Warranties issued</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrualWarrantiesIssued" scale="3" id="Tc_GCdw-ERKuU2NIvc2LtxDeg_5_3">8,304</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrualWarrantiesIssued" scale="3" id="Tc_7culDbiQxUiobuGe6JAoGw_5_6">7,102</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrualWarrantiesIssued" scale="3" id="Tc_t6UA93JLdUGytiKd-rGFig_5_9">4,626</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:61.57%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Consumption of reserves</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrualPayments" scale="3" id="Tc_p4alXKl0MkypyZ4EIdBLog_6_3">7,527</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrualPayments" scale="3" id="Tc_U7nJQC3cG0mYAMfEPd5QiA_6_6">5,784</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrualPayments" scale="3" id="Tc_61ivf8G6SECRS3w4X3ZwTA_6_9">6,691</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:61.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Changes in estimate</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.42%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrualPreexistingIncreaseDecrease" sign="-" scale="3" id="Tc_kJemgHGlxkiIazI9RukIPQ_7_3">54</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrualPreexistingIncreaseDecrease" scale="3" id="Tc_djsLLbaX7kCISVVenQ45BQ_7_6">1,502</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrualPreexistingIncreaseDecrease" scale="3" id="Tc_aJgcm_eaK0yPS6kuDgQQzA_7_9">56</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:61.57%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Balance - end of the year</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.42%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrual" scale="3" id="Tc_KpEATuXtWkyAPblQmSI8jw_8_3">8,601</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrual" scale="3" id="Tc_tKPxLGfyrk-mcITlclU0XA_8_6">7,878</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2020_JUGLvBeldEeSTj1WqQBVdQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrual" scale="3" id="Tc_65JlomEtBUKtwvruJNT5MA_8_9">5,058</ix:nonFraction></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Minimum Lease Commitments</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">The Company&#8217;s operating leases primarily include real estate leases for properties used for manufacturing, R&amp;D activities, sales and service, and administration, as well as certain equipment leases. Some leases may include options to renew for a period of up to&#160;</span><ix:nonNumeric contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" format="ixt-sec:durwordsen" name="us-gaap:LesseeOperatingLeaseRenewalTerm" id="Narr_zIZLm5Mke0qFMyAl-rDrqw"><span style="font-size:10pt;">5 years</span></ix:nonNumeric><span style="font-size:10pt;">, while others may include options to terminate the lease. The weighted average remaining lease term of the Company&#8217;s operating leases as of December 31, 2022 was&#160;</span><ix:nonNumeric contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" format="ixt-sec:durwordsen" name="us-gaap:OperatingLeaseWeightedAverageRemainingLeaseTerm1" id="Narr_33GUqPkPIkKKdto-eWqgGw"><span style="font-size:10pt;">12 years</span></ix:nonNumeric><span style="font-size:10pt;">, and the weighted average discount rate used in determining the present value of future lease payments was&#160;</span><span style="font-size:10pt;"><ix:nonFraction unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="3" format="ixt:numdotdecimal" name="us-gaap:LesseeOperatingLeaseDiscountRate" scale="-2" id="Narr_LWkanpevcUuPMWaj3PQxgw">5.6</ix:nonFraction>%</span><span style="font-size:10pt;">.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></ix:nonNumeric></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-22</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Veeco Instruments&#160;Inc. and Subsidiaries</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Notes to Consolidated Financial Statements (Continued)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="Tc_FpQYEMnqx0OxWw5FQoYuMA_1_2"></a><a id="Tc_MDrU7mYS7kOVgyzBIfBoqg_2_2"></a><a id="Tc_k-l4ZxqcfEuov4s464BMbg_3_2"></a><a id="Tc_6J8cVYzqXkK_hdSWyFNYxw_4_0"></a><a id="Tc_-ruLcA9zHEeNLNGJg67ASg_5_0"></a><a id="Tc_0u5tw3QnJUeRmDglyImxRQ_5_2"></a><a id="Tc_uDeUbgnXJ02IIKkHAK9-Jw_6_0"></a><a id="Tc_M_9i5z-6AEqyvqWZjPw5uQ_7_0"></a><a id="Tc_tUeAVm7kmUeOKweX441GIQ_8_0"></a><a id="Tc__rc6RBZIukODej0Db-s5Ng_9_0"></a><a id="Tc_FDfgQpJHpUWNz9eUOiKN1w_10_0"></a><a id="Tc_Yz9g36bdgEGuK79xRA6geg_11_0"></a><a id="Tc_ARw2848WY0qIUOncZZtXrg_12_0"></a><a id="Tc__d_vaXXU80enGZYaVTsDyw_13_0"></a><a id="Tc_1K-yzfeBMEK98SQgtdwqVQ_13_2"></a><a id="Tc_3pK39fPaWUSLyLJOXcjaDQ_15_0"></a><a id="Tc_FLRFg40azEexT9ln1X9uSg_16_2"></a><a id="Tc_5EPDgXBXvkqVMVagVbd-Cg_17_0"></a><a id="Tc_vzEnMz4tRUejtyqojTRCGA_18_2"></a><ix:continuation id="Tb_HeAfaC_D2UaSxgZNSmm1nA_cont1" continuedAt="Tb_HeAfaC_D2UaSxgZNSmm1nA_cont2"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The following table provides the maturities of lease liabilities at December 31, 2022: </p><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="us-gaap:LesseeOperatingLeaseLiabilityMaturityTableTextBlock" id="Tb_B2f6K5Oz20Gd09zBjJxH7Q" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Operating</b></p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Leases</b></p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Payments due by period:</b></p></td><td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2023</p></td><td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths" scale="3" id="Tc_FnYIHjgcQUOcBVd1e6h88w_5_3">3,757</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2024</p></td><td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueYearTwo" scale="3" id="Tc_WK7sybLVPE2FhE3esY3eeg_6_3">4,347</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2025</p></td><td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueYearThree" scale="3" id="Tc_zwBNyVH3REC3d8FwbBJoAA_7_3">3,812</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2026</p></td><td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueYearFour" scale="3" id="Tc_mpH3GNzOw0qFoNQ_sZGkiA_8_3">4,012</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2027</p></td><td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueYearFive" scale="3" id="Tc_iiEqiq5aZU6_ill8DXyQ7Q_9_3">3,620</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Thereafter</p></td><td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive" scale="3" id="Tc_InsDzXKARUSIM6Wl2loQoA_10_3">34,244</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Total future minimum lease payments</p></td><td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LesseeOperatingLeaseLiabilityPaymentsDue" scale="3" id="Tc_HU1kK2i9U0uxFenv9mMDvA_11_3">53,792</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Less: Imputed interest</p></td><td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LesseeOperatingLeaseLiabilityUndiscountedExcessAmount" scale="3" id="Tc_hKaVf2p2G0ewYHCRmS3T8Q_12_3">16,878</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Total</p></td><td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseLiability" scale="3" id="Tc_uBQRUci_-kSyRspR7J1dSw_13_3">36,914</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:82.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Reported as of December&#160;31, 2022</b></p></td><td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="-sec-ix-hidden:Hidden_eoIrvRLA5kWv8kXlN_7lSg;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Accrued expenses and other current liabilities</span></span></p></td><td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseLiabilityCurrent" scale="3" id="Tc_nc0LzQ7410mdyrmKNNHstw_16_3">3,333</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Long-term operating lease liabilities</p></td><td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseLiabilityNoncurrent" scale="3" id="Tc_3dDu3zIk706S9RF4KiKlWQ_17_3">33,581</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 12pt;"><span style="-sec-ix-hidden:Hidden_sGkRBjQQs0yUxZ2hF_23sA;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Total</span></span></p></td><td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseLiability" scale="3" id="Tc_MYzWRNmGc0uX7lCCX3NNig_18_3">36,914</ix:nonFraction></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Operating lease cost for the years ended December 31, 2022, 2021, and 2020 was $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseCost" scale="6" id="Narr_x_lRAVJMP0-L6cw4ZthGMQ">7.4</ix:nonFraction> million, $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseCost" scale="6" id="Narr_R8dgHV8ANkiTHMLity5yZw">6.6</ix:nonFraction> million, and $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseCost" scale="6" id="Narr_dPx5YAvpSkOWTYL4gcaQvw">5.4</ix:nonFraction> million, respectively. Variable lease cost was $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:VariableLeaseCost" scale="6" id="Narr_7dQFtUE8ykOY-nT5bOKmUw">2.0</ix:nonFraction> million for the year ended December 31, 2022, and $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:VariableLeaseCost" scale="6" id="Narr__86TFpvvckq6DP1Z-FUhGw"><ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:VariableLeaseCost" scale="6" id="Narr_VsfUTFPpfUKbF87fJ3kvGw">1.7</ix:nonFraction></ix:nonFraction> million for the years ended December 31, 2021, and 2020. Additionally, the Company has an immaterial amount of short-term leases. Lease expense, which includes operating lease costs and variable lease costs, was $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:LeaseCost" scale="6" id="Narr_Qa64130ZRUyBZWvfTVmjgg">9.4</ix:nonFraction>&#160;million, $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:LeaseCost" scale="6" id="Narr_ylzP_tWR00SPaFAUpoe85w">8.4</ix:nonFraction>&#160;million, and $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:LeaseCost" scale="6" id="Narr_Pp0X8fMjREyipHbz-G1Dxg">7.1</ix:nonFraction>&#160;million for the years ended December 31, 2022, 2021, and 2020, respectively. In addition, the Company is obligated under such leases for certain other expenses, including real estate taxes and insurance. Operating cash outflows from operating leases for the year ended December 31, 2022, 2021, and 2020 were $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:OperatingLeasePayments" scale="6" id="Narr_0u8AOjTMV0OFQ6eY11uhqw">7.5</ix:nonFraction>&#160;million, $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:OperatingLeasePayments" scale="6" id="Narr_1MUAf766u061lQI-1QMA5g">6.6</ix:nonFraction> million (excluding landlord reimbursements for leasehold improvements of $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-5" format="ixt:numdotdecimal" name="veco:ReimbursementForLeaseholdImprovements" scale="6" id="Narr_tq0xwVmqIUK5CpWx92pOow">6.1</ix:nonFraction> million included within &#8220;Other, net&#8221; in the Consolidated Statements of Cash Flows), and $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:OperatingLeasePayments" scale="6" id="Narr_K3ThZl1mAUSjB4Sn4Nge3g">6.9</ix:nonFraction> million, respectively.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Legal Proceedings</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">On June 8, 2018, an Ultratech shareholder who received Veeco stock as part of the consideration for the Ultratech acquisition filed a purported class action complaint in the Superior Court of the State of California, County of Santa Clara, captioned Wolther v. Maheshwari et al., Case No. 18CV329690, on behalf of himself and others who purchased or acquired shares of Veeco pursuant to the registration statement and prospectus which Veeco filed with the SEC in connection with the Ultratech acquisition (the &#8220;Wolther Action&#8221;). On August 2 and August 8, 2018, <ix:nonFraction unitRef="Unit_Standard_case_gtF5dJF030CdqF2FGWQ9yA" contextRef="Duration_8_1_2018_To_8_31_2018_srt_LitigationCaseAxis_veco_UltratechAcquisitionLitigationMember_dwYL9J2gC0Oab_FWaninlw" decimals="INF" format="ixt-sec:numwordsen" name="us-gaap:LossContingencyNewClaimsFiledNumber" scale="0" id="Narr_GStgOZ9wbkyrostufC3x9A">two</ix:nonFraction> purported class action complaints substantially similar to the Wolther Action were filed on behalf of different plaintiffs in the same court as the Wolther Action. These cases were consolidated with the Wolther Action, and a consolidated complaint was filed on December 11, 2018. The consolidated complaint sought to recover damages and fees under Sections 11, 12, and 15 of the Securities Act of 1933 for, among other things, alleged false/misleading statements in the registration statement and prospectus relating to the Ultratech acquisition, relating primarily to the alleged failure to disclose delays in the advanced packaging business, increased MOCVD competition in China, and an intellectual property dispute. In October 2021, Veeco and the court-appointed class representatives signed an agreement to settle the Wolther Action on a class-wide basis for $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_10_1_2021_To_10_31_2021_srt_LitigationCaseAxis_veco_WoltherActionMember_G9mmKKuHJUKEDOgkWSO47Q" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:LitigationSettlementAmountAwardedToOtherParty" scale="6" id="Narr_tPNh_5dI90ytCt-i4pbOuA">15.0</ix:nonFraction> million, subject to court approval and class members&#8217; opportunity to object and opt-out. On June 27, 2022, the court granted final approval to the class action settlement. The settlement amount was funded by insurance carriers. The corresponding receivable and liability had been included within &#8220;Prepaid expenses and other current assets&#8221; and &#8220;Accrued expenses and other current liabilities&#8221;, respectively, in the Consolidated Balance Sheets as of December 31, 2021.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></ix:continuation></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-23</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Veeco Instruments&#160;Inc. and Subsidiaries</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Notes to Consolidated Financial Statements (Continued)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;max-width:100%;position:relative;min-height:10.35pt;"><a id="_Hlk93568433"></a><a id="_134dc9fb_e564_406c_97fa_9b319b158e8b"></a><a id="Tc_ghWY7CqfA0KREbVmp0sLjg_1_2"></a><a id="Tc_PAc_Q8kQBUimC39g7ahCRg_1_6"></a><a id="Tc_DFQqS9fvRUudU4ynj7bMXg_2_2"></a><a id="Tc_3Db_ExLBJEWP--VxtvQDFg_2_6"></a><a id="Tc_9sng8wQtXk6q06T_O6uNKg_3_0"></a><a id="Tc_mYxnMtRFPkm2oGZWPjvDwA_3_2"></a><a id="Tc_eRA73VZo4UCA0YYr8MG0Gg_3_4"></a><a id="Tc_qhAwMW_CLkaFTIBZa-Oipg_3_6"></a><a id="Tc_56bZjlz6E06OD946FqScMw_3_8"></a><a id="Tc_QqTqil_ALku0z8u60eSpfQ_3_10"></a><a id="Tc_H9UtWrFQUUC0TprU6bjYGw_4_0"></a><a id="Tc_EyH1OL_WIE-ZpfHzE2nvYg_4_2"></a><a id="Tc_b3eM1gtN8E2XjiCHSn4eEg_4_5"></a><a id="Tc_Q6oOaZdv4EmMLYyPJFMS4A_4_6"></a><a id="Tc_h1awl8DEFEGI1B2GvBjdkg_4_9"></a><a id="Tc_JBlxS6JrsEaXkBhckK7Kxg_4_10"></a><a id="Tc_ubn6B-avT0C6okrcbswQZg_5_0"></a><a id="Tc_1hu5qgyp-UKhDUNMDuAzKw_5_2"></a><a id="Tc_mJ8SDFVFtUuIYZep-O9VSw_5_4"></a><a id="Tc_3OS-iUOKfEOXe18CYqn4Nw_5_6"></a><a id="Tc_J-gZBioJ0USHHvUa0wOWug_5_9"></a><a id="Tc_jyhGud8dYkmy2uFthti4gA_5_10"></a><a id="Tc_4wP8GBEFcEWFJvGMM7nRnw_6_0"></a><a id="Tc_X5fT7MmNQ0Srubs_zhpcuA_6_2"></a><a id="Tc_HuV0xRpPkEOGjJ17sZCucQ_6_5"></a><a id="Tc_uwm8hO-WrESVW3LKk07abw_6_6"></a><a id="Tc_D1UNYUyORUqE8mUcynrJUg_6_8"></a><a id="Tc_3CI0gld8t0WgdyzX2399Ng_6_10"></a><a id="Tc_c_Az9kw3LkqnOul8-D3QOA_7_0"></a><a id="Tc_cTthj7jokE2zExjiVVu2kQ_7_2"></a><a id="Tc_l4d344atdUi08HWJPRaYDQ_7_5"></a><a id="Tc_gVCl-MvbSEyMEQyHAMQJmw_7_6"></a><a id="Tc_9ywu1lwGPUKnG1PjHIa32g_7_8"></a><a id="Tc_wuqiDGlnT02DA8M7rKP1vw_7_10"></a><a id="Tc_U9Tb_j-0P0az9I0g53tcuQ_8_0"></a><a id="Tc_O_b-DB67UEuHT5lSTqfHXg_8_2"></a><a id="Tc_MZpUlPROtEqNR07sWn-udA_8_4"></a><a id="Tc_Kfho4cSkxEGY7pR42NyXLw_8_6"></a><a id="Tc_xVkqwC5JHEOm5x3SoVo-uA_8_8"></a><a id="Tc_0xi0mOHW9E676nLBxu4kaA_8_11"></a><a id="Tc_6MiXdohPHUCfAEEZULDEfw_9_0"></a><a id="Tc_h6GL4NOJhkO7eFHSrBDpWQ_9_3"></a><a id="Tc_yU4kAmmqSU6OKKHgMaKhmA_9_4"></a><a id="Tc_J3ydcppBME6Hk66_64WpNw_9_6"></a><a id="Tc_mSJe2KDhyUyQzaqgVEm0Lg_9_8"></a><a id="Tc_J83YgpaVukiXQEpT0_Rrlg_9_10"></a><a id="_Hlk126307592"></a><ix:continuation id="Tb_HeAfaC_D2UaSxgZNSmm1nA_cont2" continuedAt="Tb_HeAfaC_D2UaSxgZNSmm1nA_cont3"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">On December 21, 2018, a purported Veeco stockholder filed a derivative action in the Superior Court of the State of California, County of Santa Clara, captioned Vladimir Gusinsky Revocable Trust v. Peeler, et al., Case No. 18CV339925, on behalf of nominal defendant Veeco (the &#8220;Derivative Action&#8221;). The complaint seeks to assert claims for breach of fiduciary duty, waste of corporate assets, and unjust enrichment against current and former Veeco directors premised on purported misstatements and omissions in the registration statement relating to the Ultratech acquisition. On January 25, 2021, the court granted the defendants&#8217; demurrer without leave to amend effecting the dismissal of the case. On March 26, 2021, plaintiff filed its notice of appeal of the trial court&#8217;s order granting defendants&#8217; demurrer without leave to amend. In April 2022, Veeco and plaintiff reached an agreement to settle the Derivative Action subject to court approval. As part of the settlement and subject to court approval, Veeco agreed to make certain revisions to its internal Disclosure Committee Charter and its director education program. After the court gave final approval in November 2022 to the Derivative Action settlement and the request for fees and costs made by plaintiff&#8217;s counsel, $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_11_1_2022_To_11_30_2022_srt_LitigationCaseAxis_veco_DerivativeActionMember_dS7_yQ62XkKzCXHyd6iZNQ" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:LitigationSettlementAmountAwardedToOtherParty" scale="6" id="Narr_8NiHt5kAmkO4bsmGuwvgIA">0.3</ix:nonFraction><span style="white-space:pre-wrap;"> million was paid to plaintiff&#8217;s counsel for fees and expenses. The amount was funded by insurance that Veeco maintains in the normal course of its business.  </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company is involved in various other legal proceedings arising in the normal course of business. The Company does not believe that the ultimate resolution of these matters will have a material adverse effect on its consolidated financial position, results of operations, or cash flows.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Concentrations of Credit Risk</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company depends on purchases from its <ix:nonFraction unitRef="Unit_Standard_customer_ewo2DglECUO5n4nvx82_SQ" contextRef="Duration_1_1_2021_To_12_31_2021_srt_MajorCustomersAxis_veco_TopTenCustomersMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_STb5nYXm7USe8k9Ls-HfDg" decimals="INF" format="ixt-sec:numwordsen" name="veco:NumberOfCustomers" scale="0" id="Narr_XVnftxzMMkqCv9ewSAq4Iw"><ix:nonFraction unitRef="Unit_Standard_customer_ewo2DglECUO5n4nvx82_SQ" contextRef="Duration_1_1_2022_To_12_31_2022_srt_MajorCustomersAxis_veco_TopTenCustomersMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_S-7J6nBA20enuSmeS4u47A" decimals="INF" format="ixt-sec:numwordsen" name="veco:NumberOfCustomers" scale="0" id="Narr_BbHn2NcEEEixeas7_rL4uQ">ten</ix:nonFraction></ix:nonFraction> largest customers, which accounted for <ix:nonFraction unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w" contextRef="Duration_1_1_2022_To_12_31_2022_srt_MajorCustomersAxis_veco_TopTenCustomersMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_S-7J6nBA20enuSmeS4u47A" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ConcentrationRiskPercentage1" scale="-2" id="Narr_vJGrlVw4YUW85aFLqMVeyg">63</ix:nonFraction>% and <ix:nonFraction unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w" contextRef="Duration_1_1_2021_To_12_31_2021_srt_MajorCustomersAxis_veco_TopTenCustomersMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_STb5nYXm7USe8k9Ls-HfDg" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ConcentrationRiskPercentage1" scale="-2" id="Narr_JbKcQheT5kmOzD5wBX0Rdg">65</ix:nonFraction>% of net accounts receivable at December 31, 2022 and 2021, respectively.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Customers who accounted for more than 10% of net accounts receivable or net sales are as follows:</p><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="us-gaap:ScheduleOfRevenueByMajorCustomersByReportingSegmentsTableTextBlock" id="Tb_N_tm0Aeb_02uMcGcdC21Nw" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:40.97%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.53%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.61%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.53%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.63%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.61%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.62%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:40.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="3" style="vertical-align:bottom;white-space:nowrap;width:19.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Accounts&#160;Receivable</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:31.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Net&#160;Sales&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:40.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="3" style="vertical-align:bottom;white-space:nowrap;width:19.78%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:31.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">For the Year Ended December&#160;31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:40.97%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Customer</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.61%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.63%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.61%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.62%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:40.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Customer A</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.63%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w" contextRef="Duration_1_1_2021_To_12_31_2021_srt_MajorCustomersAxis_veco_CustomerAMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_KB9uqMrKw0yowdxGLskIdw" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ConcentrationRiskPercentage1" scale="-2" id="Tc_EEQiiblPJEKFHIoYTSlvTg_4_4">14</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w" contextRef="Duration_1_1_2021_To_12_31_2021_srt_MajorCustomersAxis_veco_CustomerAMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_xncv0g_nvkqEqtTOvac8gA" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ConcentrationRiskPercentage1" scale="-2" id="Tc_rQXNQbT5uEazaMcNr0_RsQ_4_8">15</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:40.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Customer B</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w" contextRef="Duration_1_1_2021_To_12_31_2021_srt_MajorCustomersAxis_veco_CustomerBMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_Hivl-4H1CUSQ5oS73bRBSg" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ConcentrationRiskPercentage1" scale="-2" id="Tc__UjwFKA-IUSnyNjRFT-EBg_5_8">10</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:40.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Customer C</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.63%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w" contextRef="Duration_1_1_2021_To_12_31_2021_srt_MajorCustomersAxis_veco_CustomerCMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_NXdZ-M0690aCSuYO9gmOnw" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ConcentrationRiskPercentage1" scale="-2" id="Tc_MdFjow1WE0eJWnPyhDDNBw_6_4">12</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:40.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Customer D</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w" contextRef="Duration_1_1_2021_To_12_31_2021_srt_MajorCustomersAxis_veco_CustomerDMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_yP78NPy8K0O09X8fBKRsyQ" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ConcentrationRiskPercentage1" scale="-2" id="Tc_w6ggeya1A0SPvOei6BVO2w_7_4">10</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:40.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Customer E</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.63%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w" contextRef="Duration_1_1_2020_To_12_31_2020_srt_MajorCustomersAxis_veco_CustomerEMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_8a3DkbfigE-Y0KZYUOHMMA" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ConcentrationRiskPercentage1" scale="-2" id="Tc_j7KeQL5e5kCMdH8yXf6JHQ_8_10">13</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td></tr><tr><td style="vertical-align:bottom;width:40.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Customer F</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w" contextRef="Duration_1_1_2022_To_12_31_2022_srt_MajorCustomersAxis_veco_CustomerFMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_4dGT7A_R9UydroMwKOR-uA" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ConcentrationRiskPercentage1" scale="-2" id="Tc_OTNLhHTDAUKtym9Z-2t_wA_9_2">10</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr></table><div style="font-family:'Times New Roman','Times','serif';font-size:9.0pt;margin-bottom:0pt;margin-top:0pt;min-height:1.19em;position:relative;width:100%;"><div style="background-color:#000000;height:1pt;position:relative;top:0.6em;width:25.0%;border:none;margin:0 auto 0 0;"></div></div><table style="border-collapse:collapse;border:0;"><tr><td style="vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;"><span style="font-size:10pt;">*</span></p></td><td style="padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;"><span style="font-size:9pt;">Less than 10% of aggregate accounts receivable or net sales</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">The Company manufactures and sells its products to companies in different geographic locations. Refer to Note 16, &#8220;Segment Reporting and Geographic Information,&#8221; for additional information. In certain instances, the Company requires deposits from its customers for a portion of the sales price in advance of shipment and performs periodic credit evaluations on its customers. Where appropriate, the Company requires letters of credit on certain non-U.S. sales arrangements. Receivables generally are due within </span><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_srt_RangeAxis_srt_MinimumMember_srt_StatementGeographicalAxis_veco_GeographicLocationOneMember_urfkXneJaEms9Cl65M7_dg" format="ixt-sec:durday" name="veco:AccountsReceivableCreditPeriod" id="Narr_u5DHfVPDokCSKKPAj9uqNQ"><span style="font-size:10pt;">30</span></ix:nonNumeric><span style="font-size:10pt;"> to </span><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_srt_RangeAxis_srt_MaximumMember_srt_StatementGeographicalAxis_veco_GeographicLocationOneMember_g1TJdhFHIkaAVeEKqXBbew" format="ixt-sec:durwordsen" name="veco:AccountsReceivableCreditPeriod" id="Narr_X5sos-hbtkuSDfuM6XT1SQ"><span style="font-size:10pt;">90 days</span></ix:nonNumeric><span style="font-size:10pt;"> from the date of invoice.</span><span style="font-size:10pt;"> </span><span style="font-size:10pt;">In some geographies, receivables may be payable up to </span><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_srt_RangeAxis_srt_MaximumMember_srt_StatementGeographicalAxis_veco_GeographicLocationTwoMember_qfHak3I2j02E3uJNzquhHA" format="ixt-sec:durwordsen" name="veco:AccountsReceivableCreditPeriod" id="Narr_wbYr8Wt1YkuLou72NXEwkQ"><span style="font-size:10pt;">150 days</span></ix:nonNumeric><span style="font-size:10pt;"> from the date of the invoice.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Receivable Purchase Agreement</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">In December&#160;2020, the Company entered into a receivable purchase agreement with a financial institution to sell certain of its trade receivables from customers without recourse, up to $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2020_JUGLvBeldEeSTj1WqQBVdQ" decimals="-5" format="ixt:numdotdecimal" name="veco:ReceivablePurchaseAgreementMaximumAmount" scale="6" id="Narr__Sz-7KD3sk25vsgMLwDnVg">15.0</ix:nonFraction> million at any point in time. Pursuant to this agreement, the Company sold $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-5" format="ixt:numdotdecimal" name="veco:TradeReceivablesSoldUnderReceivablePurchaseAgreement" scale="6" id="Narr_NgkfnUAnkky-EhbVcK4Q2Q">13.2</ix:nonFraction>&#160;million of receivables during the year ended December&#160;31, 2022, of which $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-5" format="ixt:numdotdecimal" name="veco:TradeReceivablesUnderReceivablePurchaseAgreementOutstanding" scale="6" id="Narr_3eLh9WK_fE6XrG2HyZA7aw">5.4</ix:nonFraction> million remained outstanding as of December 31, 2022 as defined in the receivable purchase agreement, and $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-5" format="ixt:numdotdecimal" name="veco:ReceivablePurchaseAgreementAmountAvailable" scale="6" id="Narr_4rFN6JBRPEaABswUX13Kew">9.6</ix:nonFraction> million was available under the agreement for additional sales of receivables. There were <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-5" format="ixt-sec:numwordsen" name="veco:TradeReceivablesSoldUnderReceivablePurchaseAgreement" scale="6" id="Narr_j5EJnWyJ0UGMTuqmDwQ9Fg">no</ix:nonFraction> sales of receivables under this agreement during 2021. The net sale of accounts receivable under the agreement is reflected as a reduction of </p></ix:continuation></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-24</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Veeco Instruments&#160;Inc. and Subsidiaries</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Notes to Consolidated Financial Statements (Continued)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;max-width:100%;position:relative;"><ix:continuation id="Tb_HeAfaC_D2UaSxgZNSmm1nA_cont3"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">accounts receivable in the Company&#8217;s Consolidated Balance Sheet at the time of sale and any fees for the sale of trade receivables were not material for the periods presented.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Suppliers</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company outsources certain functions to third parties, including the manufacture of several of its systems. While the Company relies on its outsourcing partners to perform their contracted functions, the Company maintains some level of internal manufacturing capability for these systems. In addition, certain of the components and sub-assemblies included in the Company&#8217;s products are obtained from a single source or a limited group of suppliers. The failure of the Company&#8217;s present outsourcing partners and suppliers to meet their contractual obligations and the Company&#8217;s inability to make alternative arrangements or resume the manufacture of these systems could have a material adverse effect on the Company&#8217;s revenues, profitability, cash flows, and relationships with its customers.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company had deposits with its suppliers of $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:DepositAssets" scale="6" id="Narr_zpho64SabUGJvezOuhwIWw">9.4</ix:nonFraction> million and $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:DepositAssets" scale="6" id="Narr_8y0z7meCGkyhVu75Z3A-Yg">3.9</ix:nonFraction> million at December 31, 2022 and 2021, respectively, that were included in &#8220;Prepaid expenses and other current assets&#8221; on the Consolidated Balance Sheets.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Purchase Commitments</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company had purchase commitments of $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:UnrecordedUnconditionalPurchaseObligationDueInNextRollingTwelveMonths" scale="6" id="Narr_JG1iiBYm-0i6jdFmaL33DQ">289.2</ix:nonFraction> million at December 31, 2022, the majority of which will come due within one year. Purchase commitments are primarily for inventory used in manufacturing products, as well as equipment and project materials used to support research and development activities, and are partially offset by existing deposits with suppliers. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Bank Guarantees</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company has bank guarantees and letters of credit issued by a financial institution on its behalf as needed. At December 31, 2022, outstanding bank guarantees and letters of credit totaled $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:GuaranteeObligationsCurrentCarryingValue" scale="6" id="Narr_cZxt9FBrbESyIsvJ-ivxcg">8.2</ix:nonFraction>&#160;million and unused bank guarantees and letters of credit of $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:LineOfCreditFacilityRemainingBorrowingCapacity" scale="6" id="Narr_hDKzmDWW5E2E9Stko0X2-g">14.1</ix:nonFraction><span style="font-size:12pt;"> </span>million were available to be drawn upon.</p></ix:continuation><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="us-gaap:DebtDisclosureTextBlock" id="Tb_Ko6sZltk-02gqeZhfdSDwg" continuedAt="Tb_Ko6sZltk-02gqeZhfdSDwg_cont1" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 10 &#8212; Debt</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Convertible Senior Notes</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">2023 Notes</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">On January 10, 2017, the Company issued $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_1_10_2017_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_IWFhTEer-0CSeVpfpU13Ng" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentFaceAmount" scale="6" id="Narr_9TQ-u4-yoU6sY1t2pi6Yig">345.0</ix:nonFraction> million of <ix:nonFraction unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w" contextRef="As_Of_1_10_2017_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_IWFhTEer-0CSeVpfpU13Ng" decimals="INF" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentInterestRateStatedPercentage" scale="-2" id="Narr_4exPvFAcMEeEqpySPj4aBA">2.70</ix:nonFraction>% convertible senior unsecured notes due 2023 (the &#8220;2023 Notes&#8221;). The Company received net proceeds, after deducting underwriting discounts and fees and expenses payable by the Company, of approximately $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_10_2017_To_1_10_2017_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_uuco5aSWq0uhuvDldQHNrg" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:ProceedsFromConvertibleDebt" scale="6" id="Narr_Ukb36PN9HkOsBJ8XJocE0A">335.8</ix:nonFraction> million. The 2023 Notes bear interest at a rate of <ix:nonFraction unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w" contextRef="As_Of_1_10_2017_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_IWFhTEer-0CSeVpfpU13Ng" decimals="INF" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentInterestRateStatedPercentage" scale="-2" id="Narr_NTmYw2LGjE2crrSL490Nrw">2.70</ix:nonFraction>% per year, payable semiannually in arrears on January 15 and July 15 of each year, commencing on July 15, 2017. The 2023 Notes mature on January 15, 2023, unless earlier purchased by the Company, redeemed, or converted.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;">On May 18, 2020, in connection with the completion of a private offering of $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_5_18_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_u4UJ5lnrc0eivAfoRYyQng" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentFaceAmount" scale="6" id="Narr_VSAHh87L3kaxHoxnXDlItw">125.0</ix:nonFraction>&#160;million aggregate principal amount of&#160;<ix:nonFraction unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w" contextRef="As_Of_5_18_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_u4UJ5lnrc0eivAfoRYyQng" decimals="INF" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentInterestRateStatedPercentage" scale="-2" id="Narr_161UKrfAe0GC5v1__JLfww">3.75</ix:nonFraction>% convertible senior notes due 2027 described below, the Company repurchased and retired approximately $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_5_18_2020_To_5_18_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_5zzHqMvYcEu0fv8z6RanBg" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:ExtinguishmentOfDebtAmount" scale="6" id="Narr_dpZV93e70UqZmdwJbuwE1A">88.3</ix:nonFraction>&#160;million in aggregate principal amount of its outstanding 2023 Notes, with a carrying amount of $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_5_18_2020_To_5_18_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_5zzHqMvYcEu0fv8z6RanBg" decimals="-5" format="ixt:numdotdecimal" name="veco:DebtInstrumentCarryingAmountDebtExtinguished" scale="6" id="Narr_kmhD5Kog5EiMOAf6XIeLRg">78.1</ix:nonFraction>&#160;million, for approximately $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_5_18_2020_To_5_18_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_5zzHqMvYcEu0fv8z6RanBg" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:RepaymentsOfUnsecuredDebt" scale="6" id="Narr_A8qrhR7Vp0GSuNauEIaeNg">81.2</ix:nonFraction>&#160;million of cash. The Company accounted for the partial settlement of the 2023 Notes as an extinguishment, and as such, recorded a loss on extinguishment of approximately $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_5_18_2020_To_5_18_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_us-gaap_IncomeStatementLocationAxis_us-gaap_OtherNonoperatingIncomeExpenseMember_00m-x6_WfkKT5olXftmhcQ" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:GainsLossesOnExtinguishmentOfDebt" scale="6" id="Narr_UJX3yJkpYEmnxNgyO1Csvg">3.0</ix:nonFraction>&#160;million for the year ended December 31, 2020, which is included in &#8220;Other income (expense), net&#8221; in the Consolidated Statements of Operations, as well as a reduction of additional paid-in capital of $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_5_18_2020_To_5_18_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_5zzHqMvYcEu0fv8z6RanBg" decimals="-5" format="ixt:numdotdecimal" name="veco:AdjustmentsToAdditionalPaidInCapitalExtinguishmentEquityComponentOfNotesRepurchased" scale="6" id="Narr_NWBXYGDSNU2_MOc1Iv_QAg">0.1</ix:nonFraction> million for the repurchase of the conversion feature.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;">Additionally, on November 11, 2020, the Company entered into a privately negotiated exchange agreement with a holder of its outstanding 2023 Notes, under which the Company agreed to retire $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_11_11_2020_To_11_11_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_YDagF4J520ede_9zdqDMmg" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:ExtinguishmentOfDebtAmount" scale="6" id="Narr_xhqYHv0xukyTxgSAhcnNSA">125.0</ix:nonFraction> million in aggregate original principal </p></ix:nonNumeric></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-25</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Veeco Instruments&#160;Inc. and Subsidiaries</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Notes to Consolidated Financial Statements (Continued)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;max-width:100%;position:relative;"><ix:continuation id="Tb_Ko6sZltk-02gqeZhfdSDwg_cont1" continuedAt="Tb_Ko6sZltk-02gqeZhfdSDwg_cont2"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;">amount of the 2023 Notes, with a carrying amount of $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_11_11_2020_To_11_11_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_YDagF4J520ede_9zdqDMmg" decimals="-5" format="ixt:numdotdecimal" name="veco:DebtInstrumentCarryingAmountDebtExtinguished" scale="6" id="Narr_bBxsRCrNPESM9n1nXOSgzg">113.1</ix:nonFraction> million, in exchange for the issuance of $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_11_17_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_zF8UnsN0JEqzHyuktvH1rA" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentFaceAmount" scale="6" id="Narr_oNLw5WTdqUy3xls3uOBpvA">132.5</ix:nonFraction> million in aggregate principal amount of new <ix:nonFraction unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w" contextRef="As_Of_11_17_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_zF8UnsN0JEqzHyuktvH1rA" decimals="INF" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentInterestRateStatedPercentage" scale="-2" id="Narr_rdSM_XALgUuIUsNcO2qUew">3.50</ix:nonFraction>% convertible senior notes due 2025 described below, which had a fair value that approximated the principal amount of notes issued. The Company accounted for the partial settlement of the 2023 Notes as an extinguishment, and as such, recorded a loss on extinguishment of approximately $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_11_11_2020_To_11_11_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_us-gaap_IncomeStatementLocationAxis_us-gaap_OtherNonoperatingIncomeExpenseMember_DYB3CDbyX0u3Uq0DQh2dDg" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:GainsLossesOnExtinguishmentOfDebt" scale="6" id="Narr_tNWBGWGXoESe9ekeK4rxFw">4.8</ix:nonFraction>&#160;million for the year ended December 31, 2020, which is included in &#8220;Other income (expense), net&#8221; in the Consolidated Statements of Operations, as well as a reduction of additional paid-in capital of $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_11_11_2020_To_11_11_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_YDagF4J520ede_9zdqDMmg" decimals="-5" format="ixt:numdotdecimal" name="veco:AdjustmentsToAdditionalPaidInCapitalExtinguishmentEquityComponentOfNotesRepurchased" scale="6" id="Narr_EvzHqOiBqEe_31Pwg_PCUw">14.6</ix:nonFraction> million for the exchange of the conversion feature.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;background:#ffffff;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;">Finally, on November 5, 2021, the Company entered into a privately negotiated note purchase agreement with a holder of its outstanding 2023 Notes, under which the Company agreed to repurchase and retire approximately $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_11_5_2021_To_11_5_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_gRCscxrjLkmeVdBuAV6ddA" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:ExtinguishmentOfDebtAmount" scale="6" id="Narr_Et2FHKd7bk-vmCKIkKMY7Q">111.5</ix:nonFraction> million in aggregate original principal amount of the 2023 Notes, with a carrying amount of $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_11_5_2021_To_11_5_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_gRCscxrjLkmeVdBuAV6ddA" decimals="-5" format="ixt:numdotdecimal" name="veco:DebtInstrumentCarryingAmountDebtExtinguished" scale="6" id="Narr_CqX6DUCIsUedK4TMEA61_A">105.5</ix:nonFraction> million, for cash consideration of approximately $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_11_5_2021_To_11_5_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_gRCscxrjLkmeVdBuAV6ddA" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:RepaymentsOfUnsecuredDebt" scale="6" id="Narr_wYLIgjzQckqWUvBjNuWdlQ">115.6</ix:nonFraction> million, and approximately $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_11_5_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_ovfhrTec7EC_2sSmeCBK7w" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:InterestPayableCurrentAndNoncurrent" scale="6" id="Narr_Nk7Hxn5aVkW06Kr85EEP4g">1.0</ix:nonFraction> million of accrued and unpaid interest. The Company accounted for the partial settlement of the 2023 Notes as an extinguishment, and as such, recorded a loss on extinguishment of approximately $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_us-gaap_IncomeStatementLocationAxis_us-gaap_OtherNonoperatingIncomeExpenseMember_aatANL4WzE-Jl_REorgp7g" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:GainsLossesOnExtinguishmentOfDebt" scale="6" id="Narr_xUnkPFp-f0OoFFaQ2vsI8w">4.0</ix:nonFraction>&#160;million for the year ended December 31, 2021, which is included in &#8220;Other income (expense), net&#8221; in the Consolidated Statements of Operations, as well as a reduction of additional paid-in capital of $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_11_5_2021_To_11_5_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_gRCscxrjLkmeVdBuAV6ddA" decimals="-5" format="ixt:numdotdecimal" name="veco:AdjustmentsToAdditionalPaidInCapitalExtinguishmentEquityComponentOfNotesRepurchased" scale="6" id="Narr_gUyE3EZ3MkClvC7MdJH1AQ">6.1</ix:nonFraction> million for the repurchase of the conversion feature.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;background:#ffffff;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;">The 2023 Notes matured on January 15, 2023 and were paid in cash and settled by the Company at that time.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">2025 Notes</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;">On November 17, 2020, as part of the privately negotiated exchange agreement described above, the Company issued $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_11_17_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_zF8UnsN0JEqzHyuktvH1rA" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentFaceAmount" scale="6" id="Narr_2pl5iiquLEiEak6lJH6hRA">132.5</ix:nonFraction> million of <ix:nonFraction unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w" contextRef="As_Of_11_17_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_zF8UnsN0JEqzHyuktvH1rA" decimals="INF" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentInterestRateStatedPercentage" scale="-2" id="Narr_54MtMYTO_kKe_xoMJ88THQ">3.50</ix:nonFraction>% convertible senior notes due 2025 (the &#8220;2025 Notes&#8221;). The 2025 Notes bear interest at a rate of&#160;<ix:nonFraction unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w" contextRef="As_Of_11_17_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_zF8UnsN0JEqzHyuktvH1rA" decimals="INF" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentInterestRateStatedPercentage" scale="-2" id="Narr_n95qV7xjFkK8r0jHuLD8eA">3.50</ix:nonFraction>% per year, payable semiannually in arrears on January 15 and July 15 of each year, commencing on July 15, 2021. The 2025 Notes mature on January 15, 2025, unless earlier purchased by the Company, redeemed, or converted.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;"><i style="font-style:italic;">2027 Notes</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;background:#ffffff;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;">On May 18, 2020, the Company completed a private offering of $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_5_18_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_u4UJ5lnrc0eivAfoRYyQng" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentFaceAmount" scale="6" id="Narr_eEsarZLjpEmqjrgKqQy4dA">125.0</ix:nonFraction>&#160;million of&#160;<ix:nonFraction unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w" contextRef="As_Of_5_18_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_u4UJ5lnrc0eivAfoRYyQng" decimals="INF" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentInterestRateStatedPercentage" scale="-2" id="Narr_IpV_kURREEG27DAm8G6UmQ">3.75</ix:nonFraction>% convertible senior notes due 2027 (the &#8220;2027 Notes&#8221;). The Company received net proceeds of approximately $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_5_18_2020_To_5_18_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_5Ecfm1aP80Ow_u3X86TuUQ" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:ProceedsFromConvertibleDebt" scale="6" id="Narr_FkMervw4MUSkyRQXzj1t6A">121.9</ix:nonFraction>&#160;million, after deducting underwriting discounts and fees and expenses payable by the Company. Additionally, the Company used approximately $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_5_18_2020_To_5_18_2020_82r_aymnikqSCiP3vs1ZlA" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:PaymentsForDerivativeInstrumentFinancingActivities" scale="6" id="Narr_-Gp-qCNxKUKB_onp0EYf7g">10.3</ix:nonFraction>&#160;million of cash to purchase capped calls, discussed below. The 2027 Notes bear interest at a rate of&#160;<ix:nonFraction unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w" contextRef="As_Of_5_18_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_u4UJ5lnrc0eivAfoRYyQng" decimals="INF" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentInterestRateStatedPercentage" scale="-2" id="Narr_7vjJwnEKRUCthzsq9IPDkg">3.75</ix:nonFraction>% per year, payable semiannually in arrears on June 1 and December 1 of each year, commencing on December 1, 2020. The 2027 Notes mature on June 1, 2027, unless earlier purchased by the Company, redeemed, or converted.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The 2023 Notes, 2025 Notes, and 2027 Notes (collectively, the &#8220;Notes&#8221;) are unsecured obligations of Veeco and rank senior in right of payment to any of Veeco&#8217;s subordinated indebtedness; equal in right of payment to all of Veeco&#8217;s unsecured indebtedness that is not subordinated; effectively subordinated in right of payment to any of Veeco&#8217;s secured indebtedness to the extent of the value of the assets securing such indebtedness; and structurally subordinated to all indebtedness and other liabilities (including trade payables) of Veeco&#8217;s subsidiaries.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Notes are convertible into cash, shares of the Company&#8217;s common stock, or a combination thereof, at the Company&#8217;s election, upon the satisfaction of specified conditions and during certain periods as described below. The initial conversion rates are <ix:nonFraction unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w" contextRef="Duration_1_10_2017_To_1_10_2017_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_uuco5aSWq0uhuvDldQHNrg" decimals="7" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentConvertibleConversionRatio1" scale="-3" id="Narr_MbVxxEjP3EeVYyBy6Xvxmw">24.9800</ix:nonFraction>, <ix:nonFraction unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w" contextRef="Duration_11_17_2020_To_11_17_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_40oKyNrK80KsJh3vH1tMzQ" decimals="7" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentConvertibleConversionRatio1" scale="-3" id="Narr_e2B1zX2jmUqHoXW7KX47Gw">41.6667</ix:nonFraction>, and <ix:nonFraction unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w" contextRef="Duration_5_18_2020_To_5_18_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_5Ecfm1aP80Ow_u3X86TuUQ" decimals="7" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentConvertibleConversionRatio1" scale="-3" id="Narr_1mKVE0bgAEuZn0pkm3bLLw">71.5372</ix:nonFraction> shares of the Company&#8217;s common stock per $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_DebtInstrumentAxis_us-gaap_ConvertibleDebtMember_XQJwNQGip0-4rSyYMzx-Zw" decimals="-3" format="ixt:numdotdecimal" name="veco:DebtInstrumentPrincipalAmountDenominationForConversionIntoCommonStock" scale="0" id="Narr_67N4bD6gek-iLffjyOK7Gw">1,000</ix:nonFraction> principal amount of the 2023 Notes, 2025 Notes, and 2027 Notes, respectively, representing initial effective conversion prices of $<ix:nonFraction unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg" contextRef="As_Of_1_10_2017_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_IWFhTEer-0CSeVpfpU13Ng" decimals="2" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentConvertibleConversionPrice1" scale="0" id="Narr_Zt3eOUddg06k7ycKcBnt6w">40.03</ix:nonFraction>, $<ix:nonFraction unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg" contextRef="As_Of_11_17_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_zF8UnsN0JEqzHyuktvH1rA" decimals="2" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentConvertibleConversionPrice1" scale="0" id="Narr_Fv7agAjL1U26Szi4qnUnPg">24.00</ix:nonFraction>, and $<ix:nonFraction unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg" contextRef="As_Of_5_18_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_u4UJ5lnrc0eivAfoRYyQng" decimals="2" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentConvertibleConversionPrice1" scale="0" id="Narr_jCxKD6maD0ycDAsUNHUdXQ">13.98</ix:nonFraction> per share of common stock, respectively. The conversion rates may be subject to adjustment upon the occurrence of certain specified events.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Holders may convert all or any portion of their notes, in multiples of <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_DebtInstrumentAxis_us-gaap_ConvertibleDebtMember_XQJwNQGip0-4rSyYMzx-Zw" decimals="-3" format="ixt-sec:numwordsen" name="veco:DebtInstrumentPrincipalAmountDenominationForConversionIntoCommonStock" scale="3" id="Narr_A8EbOZYOKEufnJ0sg3JWtw">one</ix:nonFraction> thousand dollar principal amount, at their option at any time prior to the close of business on the business day immediately preceding October 15, 2022 with </p></ix:continuation></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-26</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Veeco Instruments&#160;Inc. and Subsidiaries</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Notes to Consolidated Financial Statements (Continued)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;max-width:100%;position:relative;"><ix:continuation id="Tb_Ko6sZltk-02gqeZhfdSDwg_cont2" continuedAt="Tb_Ko6sZltk-02gqeZhfdSDwg_cont3"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">respect to the 2023 Notes, October 15, 2024 with respect to the 2025 Notes, and October 1, 2027 with respect to the 2027 Notes, only under the following circumstances: </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:36pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:25.2pt;padding:0pt;">(i)</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">During any calendar quarter (and only during such calendar quarter), if the last reported sale price of the common stock for at least </span><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"><ix:nonFraction unitRef="Unit_Standard_D_LRKZsttWxECdvF14i5EoQg" contextRef="Duration_1_1_2022_To_12_31_2022_srt_RangeAxis_srt_MinimumMember_us-gaap_DebtInstrumentAxis_us-gaap_ConvertibleDebtMember_ABdcmH9T60iabiMQNHpnMw" decimals="INF" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentConvertibleThresholdTradingDays" scale="0" id="Narr_kFaYQ3nmuE6ud5DDn9YnKw">20</ix:nonFraction></span><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"> trading days (whether or not consecutive) during a period of </span><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"><ix:nonFraction unitRef="Unit_Standard_D_LRKZsttWxECdvF14i5EoQg" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_DebtInstrumentAxis_us-gaap_ConvertibleDebtMember_XQJwNQGip0-4rSyYMzx-Zw" decimals="INF" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentConvertibleThresholdConsecutiveTradingDays1" scale="0" id="Narr_u-FVaQCwA0SgwA6_miDU9w">30</ix:nonFraction></span><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"> consecutive trading days ending on the last trading day of the immediately preceding calendar quarter is greater than or equal to </span><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"><ix:nonFraction unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_DebtInstrumentAxis_us-gaap_ConvertibleDebtMember_XQJwNQGip0-4rSyYMzx-Zw" decimals="2" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentConvertibleThresholdPercentageOfStockPriceTrigger" scale="-2" id="Narr_PYYzPoXZdkanN895q1rovA">130</ix:nonFraction>%</span><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"> of the conversion price on each applicable trading day;</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:25.2pt;text-indent:-25.2pt;margin:0pt 0pt 0pt 36pt;"><span style="font-size:10pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:36pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:25.2pt;padding:0pt;">(ii)</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">During the </span><span style="-sec-ix-hidden:Hidden_ni2iafIMQEWlcjh9n4sB8Q;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">five</span></span><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"> consecutive business day period after any </span><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"><ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_DebtInstrumentAxis_us-gaap_ConvertibleDebtMember_XQJwNQGip0-4rSyYMzx-Zw" decimals="INF" format="ixt-sec:numwordsen" name="us-gaap:DebtInstrumentConvertibleThresholdTradingDays" scale="0" id="Narr_vJMqDT0oP0av9yGK4nwGCg">five</ix:nonFraction></span><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"> consecutive trading day period (the &#8220;measurement period&#8221;) in which the trading price per </span><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"><ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_DebtInstrumentAxis_us-gaap_ConvertibleDebtMember_XQJwNQGip0-4rSyYMzx-Zw" decimals="-3" format="ixt-sec:numwordsen" name="veco:DebtInstrumentPrincipalAmountDenominationForConversionIntoCommonStock" scale="3" id="Narr_4v7-s3SbH02tMi_00FVG3g">one</ix:nonFraction></span><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"> thousand dollar principal amount of Notes for each trading day of the measurement period was less than </span><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"><ix:nonFraction unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_DebtInstrumentAxis_us-gaap_ConvertibleDebtMember_XQJwNQGip0-4rSyYMzx-Zw" decimals="2" format="ixt:numdotdecimal" name="veco:DebtInstrumentsConvertibleFeaturesMaximumPercentageOfCommonStockCouldBeConverted" scale="-2" id="Narr_amygPt2lzUm14KLSUe3hpA">98</ix:nonFraction>%</span><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"> of the product of the last reported sale price of Veeco&#8217;s common stock and the conversion rate on each such trading day;</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:25.2pt;text-indent:-25.2pt;margin:0pt 0pt 0pt 36pt;"><span style="font-size:10pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:36pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:25.2pt;padding:0pt;">(iii)</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">If the Company calls any or all of applicable series of the Notes for redemption at any time prior to the close of business on the scheduled trading day immediately preceding the redemption date; or</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:25.2pt;text-indent:-25.2pt;margin:0pt 0pt 0pt 36pt;"><span style="font-size:10pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:36pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:25.2pt;padding:0pt;">(iv)</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Upon the occurrence of specified corporate events. </span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">For the calendar quarter ended December 31, 2022, the last reported sales price of common stock during the <ix:nonFraction unitRef="Unit_Standard_D_LRKZsttWxECdvF14i5EoQg" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_DebtInstrumentAxis_us-gaap_ConvertibleDebtMember_XQJwNQGip0-4rSyYMzx-Zw" decimals="INF" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentConvertibleThresholdConsecutiveTradingDays1" scale="0" id="Narr_n50KYA3XLkKdpeM_9tHK7g">30</ix:nonFraction> consecutive trading days, based on the criteria outlined in (i) above, was greater than <ix:nonFraction unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_DebtInstrumentAxis_us-gaap_ConvertibleDebtMember_XQJwNQGip0-4rSyYMzx-Zw" decimals="2" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentConvertibleThresholdPercentageOfStockPriceTrigger" scale="-2" id="Narr_OLpiN0eXb0GPICk55Ez-8Q">130</ix:nonFraction>% of the conversion price of the 2027 Notes, and as such the 2027 Notes are convertible by the holders until March 31, 2023.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Holders may convert their notes at any time, regardless of the foregoing circumstances, on or after October 15, 2022 with respect to the 2023 Notes, October 15, 2024 with respect to the 2025 Notes, and October 1, 2026 with respect to the 2027 Notes, until the close of business on the business day immediately preceding the respective maturity date. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Accounting for the Notes after the adoption of ASU 2020-06</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company adopted ASU 2020-06 on January 1, 2022 as further described in Note 1, &#8220;Basis of Presentation&#8221;. Following the adoption of ASU 2020-06, the Notes are recorded as a single unit within liabilities in the consolidated balance sheets as the conversion features within the Notes are not derivatives that require bifurcation and the Notes do not involve a substantial premium. Transaction costs of $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_10_2017_To_1_10_2017_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_uuco5aSWq0uhuvDldQHNrg" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:PaymentsOfDebtIssuanceCosts" scale="6" id="Narr_02URXEV4UkukuCNQhVdYSQ">9.2</ix:nonFraction> million, $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_11_17_2020_To_11_17_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_40oKyNrK80KsJh3vH1tMzQ" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:PaymentsOfDebtIssuanceCosts" scale="6" id="Narr_tbfMghcIgUiZjKcwO-xqhw">1.9</ix:nonFraction> million, and $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_5_18_2020_To_5_18_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_5Ecfm1aP80Ow_u3X86TuUQ" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:PaymentsOfDebtIssuanceCosts" scale="6" id="Narr_50TI-UE7R0ugYtebbqruXA">3.1</ix:nonFraction> million incurred in connection with the issuance of the 2023 Notes, 2025 Notes, and 2027 Notes, respectively, were recorded as direct deductions from the related debt liabilities and recognized as non-cash interest expense using the effective interest method over the expected terms of the Notes.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Accounting for the Notes prior to the adoption of ASU 2020-06</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">Upon conversion by the holders, the Company may elect to settle such conversion in shares of its common stock, cash, or a combination thereof. As a result of its cash conversion options, prior to the adoption of ASU 2020-06, the Company segregated the liability component of the instruments from the equity components. The liability components were measured by estimating the fair value of a non-convertible debt instrument that is similar in its terms to the Notes. The calculation of the fair value of the debt components required the use of Level 3 inputs, including utilization of convertible investors&#8217; credit assumptions and high yield bond indices. Fair value was estimated through discounting future interest and principal payments, an income approach, due under the Notes at a discount rate equal to the estimated borrowing rate for similar non-convertible debt, or </span><span style="font-size:10pt;"><ix:nonFraction unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w" contextRef="As_Of_1_10_2017_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_IWFhTEer-0CSeVpfpU13Ng" decimals="1" format="ixt:numdotdecimal" name="us-gaap:LongTermDebtMeasurementInput" scale="0" id="Narr_UpJj3ddLI06qEFE5QBCKWg">7.0</ix:nonFraction>%</span><span style="font-size:10pt;">, </span><span style="font-size:10pt;"><ix:nonFraction unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w" contextRef="As_Of_11_17_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_zF8UnsN0JEqzHyuktvH1rA" decimals="1" format="ixt:numdotdecimal" name="us-gaap:LongTermDebtMeasurementInput" scale="0" id="Narr_S6Q83VKjy0KnwHMk9YNB5w">8.0</ix:nonFraction>%</span><span style="font-size:10pt;">, and </span><span style="font-size:10pt;"><ix:nonFraction unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w" contextRef="As_Of_5_18_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_u4UJ5lnrc0eivAfoRYyQng" decimals="1" format="ixt:numdotdecimal" name="us-gaap:LongTermDebtMeasurementInput" scale="0" id="Narr_TacIJ05iWk-WzZ45UflRMQ">9.1</ix:nonFraction>%</span><span style="font-size:10pt;"> with respect to the </span><span style="-sec-ix-hidden:Hidden_oLp6BWq4j0SmMOsjNERVHg;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">2023</span></span><span style="font-size:10pt;"> Notes, </span><span style="-sec-ix-hidden:Hidden_JIHuoDj1xk2Lu7ABrLHNxA;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">2025</span></span><span style="font-size:10pt;"> Notes, and </span><span style="-sec-ix-hidden:Hidden_Zok5uByMkkuRQp9J7Ofx9g;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">2027</span></span><span style="font-size:10pt;"> Notes, respectively. The excess of the aggregate face values of the Notes over the estimated fair values of the liability components of </span><span style="font-size:10pt;">$<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_1_10_2017_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_IWFhTEer-0CSeVpfpU13Ng" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentUnamortizedDiscount" scale="6" id="Narr_xlwGB_Yp-kSF72mLzPMOxw">72.5</ix:nonFraction></span><span style="font-size:10pt;"> million, </span><span style="font-size:10pt;">$<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_11_17_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_zF8UnsN0JEqzHyuktvH1rA" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentUnamortizedDiscount" scale="6" id="Narr_NbexTZOYYE6LuRJX6OBG1A">21.0</ix:nonFraction></span><span style="font-size:10pt;"> million, and </span><span style="font-size:10pt;">$<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_5_18_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_u4UJ5lnrc0eivAfoRYyQng" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentUnamortizedDiscount" scale="6" id="Narr_SlgE8vSY202oDdv3RreHtw">34.2</ix:nonFraction></span><span style="font-size:10pt;"> million with respect to the 2023 Notes, 2025 Notes, and 2027 Notes, respectively, were recognized as debt discounts and recorded as an increase to additional paid-in capital and were to be amortized over the expected lives of the Notes using the effective interest rate method. Amortization of the debt discounts were recognized as non-cash interest expense.</span></p></ix:continuation></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-27</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Veeco Instruments&#160;Inc. and Subsidiaries</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Notes to Consolidated Financial Statements (Continued)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="Tc_niH6aelyM0GpF5hor14wIw_1_3"></a><a id="Tc_hVCUHhq9I0a5Tzp_Jvalog_1_12"></a><a id="Tc_UNHEAau6eEWnoA_EUBofyA_2_3"></a><a id="Tc_6Gh2qJG-t0-cCgAwsIipoQ_2_6"></a><a id="Tc_R9S1po5mK0m-L3WfpT9S_A_2_9"></a><a id="Tc_CbpWYWhjJUmjjFKJa82GvQ_2_12"></a><a id="Tc_DqAJ5OYVf06RqpGJvoi52Q_2_15"></a><a id="Tc_fQCntABR30G2R5lr8QGEjQ_2_18"></a><a id="Tc_VBmlOtkpTE-PktssZ1FHaQ_3_3"></a><a id="Tc_HUT2fGFXcE6rzqLBOYvvFA_4_0"></a><a id="Tc_HnowVm2wgE2ixtN4iCf54Q_4_2"></a><a id="Tc_dE7HVKqwPU-U9SXyfegYag_4_5"></a><a id="Tc_6W3PY6x_fE-NhCAisp0l4g_4_8"></a><a id="Tc_4IDzEMsCS0-loWejpL2jzw_4_11"></a><a id="Tc__qtbzvAgH0CDqyQzKvbEyQ_4_14"></a><a id="Tc_LYJVm72-JEmVREwj6_tvdg_4_17"></a><a id="Tc_tAvuu9JXTUyR7lbzEcEa8w_5_0"></a><a id="Tc_PV-ZdwfSnUqubfPEoEfC0A_6_0"></a><a id="Tc_cWztbH6liki1bio37ITzeg_7_0"></a><a id="Tc_9i3tzb71nEGP4oPSeFmyPg_7_2"></a><a id="Tc_bRmuehXelkSB7Sg4_mezOg_7_5"></a><a id="Tc_m6Lq9JuT-0eAuEWj7OeEdg_7_8"></a><a id="Tc_1vvMmnpiM0iuoM9Cnp9x1A_7_11"></a><a id="Tc_e1YP-9JfyE2PMGZQpLn9ag_7_14"></a><a id="Tc_8vfkVkuh_k-_4rLKQ-J_IA_7_17"></a><a id="Tc_ej2yEjv6OkOivncIgyvHKw_1_2"></a><a id="Tc_9BmfHmGl50WVRDJa0qiuxQ_2_2"></a><a id="Tc_JvYMadcqg0iB80KcyeQCRA_2_5"></a><a id="Tc_v_4CkxxTQUqxGz8hojakiw_2_8"></a><a id="Tc_duFnmIUuQUWMW8iMifqtbg_3_2"></a><a id="Tc_CFr2GMQeoUKeP5DBW-wO3A_4_0"></a><a id="Tc_367x56_GwUuxno_T8Pg9xQ_5_0"></a><a id="Tc_zS5-4gphmkaEZAI7oVQQ6Q_5_2"></a><a id="Tc_iZa5GA1kWk-Kx7VHDHiorg_5_5"></a><a id="Tc_vG6pEeu9eUGMaUH7h-mu1A_5_8"></a><a id="Tc_P-xLDk8Hm0SKCds9D0ek7Q_6_0"></a><a id="Tc_NEQEIpEwKk2awtlbx0mUMA_7_0"></a><a id="Tc_K9kuW1G9YkGR3bEaAsCMfA_8_0"></a><a id="Tc_fSG5V9JNCkOG1LH6cEVA1Q_9_0"></a><a id="Tc_EuezKGhtjk2_ql6uG3Un_g_10_0"></a><a id="Tc_jxKoK9QRQEyy9Lamv-jWIw_11_0"></a><a id="Tc_mKj1A1rCz0KoYdvAzf4a3A_12_0"></a><a id="Tc_Sw_wli0UE0WWRIZvAX_QEQ_12_2"></a><a id="Tc_LT4uQYwDOESlK1-VV6NNvA_12_5"></a><a id="Tc_qY5XQDDAOEu715IP8P-tHA_12_8"></a><ix:continuation id="Tb_Ko6sZltk-02gqeZhfdSDwg_cont3" continuedAt="Tb_Ko6sZltk-02gqeZhfdSDwg_cont4"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The transaction costs of $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_10_2017_To_1_10_2017_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_uuco5aSWq0uhuvDldQHNrg" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:PaymentsOfDebtIssuanceCosts" scale="6" id="Narr__aKCRHeRUkynDBnanjAsuw">9.2</ix:nonFraction> million, $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_11_17_2020_To_11_17_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_40oKyNrK80KsJh3vH1tMzQ" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:PaymentsOfDebtIssuanceCosts" scale="6" id="Narr_jiTZZRKVt0uYHUhyA8USWQ">1.9</ix:nonFraction> million, and $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_5_18_2020_To_5_18_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_5Ecfm1aP80Ow_u3X86TuUQ" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:PaymentsOfDebtIssuanceCosts" scale="6" id="Narr_pu92ZQsJA0uKFJU2UviZsQ">3.1</ix:nonFraction> million incurred in connection with the issuance of the 2023 Notes, 2025 Notes, and 2027 Notes, respectively, were allocated to the liability and equity components based on their relative values. Transaction costs allocated to the liability component were being amortized using the effective interest rate method and recognized as non-cash interest expense over the expected terms of the Notes. Transaction costs allocated to the equity component of $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_10_2017_To_1_10_2017_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_uuco5aSWq0uhuvDldQHNrg" decimals="-5" format="ixt:numdotdecimal" name="veco:DebtIssuanceCostsTransactionCostsAllocatedToEquityComponent" scale="6" id="Narr_sS9XkppTlkeWaci70EgM-A">1.9</ix:nonFraction> million, $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_11_17_2020_To_11_17_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_40oKyNrK80KsJh3vH1tMzQ" decimals="-5" format="ixt:numdotdecimal" name="veco:DebtIssuanceCostsTransactionCostsAllocatedToEquityComponent" scale="6" id="Narr_DQ3au84-AUK8zUru4fZj4g">0.3</ix:nonFraction> million, and $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_5_18_2020_To_5_18_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_5Ecfm1aP80Ow_u3X86TuUQ" decimals="-5" format="ixt:numdotdecimal" name="veco:DebtIssuanceCostsTransactionCostsAllocatedToEquityComponent" scale="6" id="Narr__7J2BJE3J0CDHcUXENAgog">0.8</ix:nonFraction> million with respect to the 2023 Notes, 2025 Notes, and 2027 Notes, respectively, reduced the value of the equity components recognized in stockholders&#39; equity.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The carrying values of the Notes are as follows:</p><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="us-gaap:ConvertibleDebtTableTextBlock" id="Tb_bAVuTEXo4k2St1xT5XtRPQ" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:21.23%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:1.15%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:1.07%;margin:0pt;padding:0pt;"><div 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style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:10.85%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><div 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style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:10.85%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:10.85%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:10.83%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:21.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.07%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="7" style="vertical-align:bottom;white-space:nowrap;width:37.16%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, 2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="7" style="vertical-align:bottom;white-space:nowrap;width:37.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, 2021</b></p></td></tr><tr><td style="vertical-align:bottom;width:21.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-family:'Calibri','Helvetica','sans-serif';font-weight:bold;">&#160;&#160;</b></p></td><td style="vertical-align:bottom;width:1.07%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:10.78%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Principal Amount</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:10.85%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Unamortized </b><b style="font-weight:bold;"><br /></b><b style="font-weight:bold;">transaction costs</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:10.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Net carrying value</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:10.85%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Principal Amount</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:10.85%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Unamortized </b><b style="font-weight:bold;"><br /></b><b style="font-weight:bold;">debt discount/</b><b style="font-weight:bold;"><br /></b><b style="font-weight:bold;">transaction costs</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:10.83%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Net carrying value</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="19" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:21.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="16" style="vertical-align:bottom;white-space:nowrap;width:76.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:21.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2023 Notes</p></td><td style="vertical-align:bottom;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_wzCRDkFhQEa0Q4hGaj9ADA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentFaceAmount" scale="3" id="Tc_8_TK98ssC0ae3wyhMzKEug_4_3">20,173</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.85%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_wzCRDkFhQEa0Q4hGaj9ADA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentUnamortizedDiscountPremiumAndDebtIssuanceCostsNet" scale="3" id="Tc_4I5Az0AcnkmX9HiFjNr0mA_4_6">4</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_wzCRDkFhQEa0Q4hGaj9ADA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LongTermDebt" scale="3" id="Tc_Ecd81vnboUGDDQbSqqpiqQ_4_9">20,169</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.85%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_R6ZH9u7Tf0ijR-shdVpjow" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentFaceAmount" scale="3" id="Tc_dErBP_I1iECgh2ePKGcVXA_4_12">20,173</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.85%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_R6ZH9u7Tf0ijR-shdVpjow" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentUnamortizedDiscountPremiumAndDebtIssuanceCostsNet" scale="3" id="Tc_Ln48ag2HVkWblzTInA6sFQ_4_15">967</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_R6ZH9u7Tf0ijR-shdVpjow" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LongTermDebt" scale="3" id="Tc_H3LNVEVa9k-YJFdZiYcfMg_4_18">19,206</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:21.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2025 Notes</p></td><td style="vertical-align:bottom;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_ZetZSnUIu0SKEy9vSz2DrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentFaceAmount" scale="3" id="Tc_5O_B6H2iC0GE0j5yfCUM5g_5_3">132,500</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.85%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_ZetZSnUIu0SKEy9vSz2DrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentUnamortizedDiscountPremiumAndDebtIssuanceCostsNet" scale="3" id="Tc_2UJbwl7ifEuAmGIvIgLIfA_5_6">990</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_ZetZSnUIu0SKEy9vSz2DrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LongTermDebt" scale="3" id="Tc_A7teuNinxECbMnYDUtidVw_5_9">131,510</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.85%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_tIX8Lasv8E2B1ACI65359Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentFaceAmount" scale="3" id="Tc_DhaILqRhJkaZUm3tpsx-rg_5_12">132,500</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.85%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_tIX8Lasv8E2B1ACI65359Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentUnamortizedDiscountPremiumAndDebtIssuanceCostsNet" scale="3" id="Tc_0seZB3cnQEyIfugYQjSDNQ_5_15">17,302</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_tIX8Lasv8E2B1ACI65359Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LongTermDebt" scale="3" id="Tc_f_BqlIgWxkySzBf5pGRCEA_5_18">115,198</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:21.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2027 Notes</p></td><td style="vertical-align:bottom;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.78%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_rMWc7QQ050epRT-cmk3YDQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentFaceAmount" scale="3" id="Tc_eRrztvoRjEWTGOMzRhOqnA_6_3">125,000</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.85%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_rMWc7QQ050epRT-cmk3YDQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentUnamortizedDiscountPremiumAndDebtIssuanceCostsNet" scale="3" id="Tc_t9ZUO7YHMUO3DmIHqzisKA_6_6">2,019</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.94%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_rMWc7QQ050epRT-cmk3YDQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LongTermDebt" scale="3" id="Tc_uPepqdEwpkyGV5kgDWrEBw_6_9">122,981</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.85%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_e6zIPCidbESUll-ecgx8RA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentFaceAmount" scale="3" id="Tc_t9whUzIMQkiPhRorDkHgPQ_6_12">125,000</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.85%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_e6zIPCidbESUll-ecgx8RA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentUnamortizedDiscountPremiumAndDebtIssuanceCostsNet" scale="3" id="Tc_XxD6OfxkWkWFG75X2ipRaw_6_15">29,966</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.83%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_e6zIPCidbESUll-ecgx8RA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LongTermDebt" scale="3" id="Tc_tYzTgmTJiEmSdaMw9iSRSQ_6_18">95,034</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:21.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Net carrying value</b></p></td><td style="vertical-align:bottom;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 12pt;"><span style="font-size:10pt;font-weight:bold;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.78%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentFaceAmount" scale="3" id="Tc_1gMieIzkl0-F7-FVGe2s8A_7_3">277,673</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.85%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentUnamortizedDiscountPremiumAndDebtIssuanceCostsNet" scale="3" id="Tc_Gyt4sF8Ex0qqbbwxcI_-RA_7_6">3,013</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.94%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LongTermDebt" scale="3" id="Tc_MUin1mbgUUmgNLazOOczTQ_7_9">274,660</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.85%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentFaceAmount" scale="3" id="Tc_YuFoV_GsTkShQMC4rukc0Q_7_12">277,673</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.85%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentUnamortizedDiscountPremiumAndDebtIssuanceCostsNet" scale="3" id="Tc_Ki8klreATUamZyaabBYwlw_7_15">48,235</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.83%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LongTermDebt" scale="3" id="Tc_8y3KKURrzkushJLG1ohP4Q_7_18">229,438</ix:nonFraction></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Total interest expense related to the Notes is as follows:</p><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="us-gaap:InterestIncomeAndInterestExpenseDisclosureTableTextBlock" id="Tb_g3cxqOCYt0q53T2hWijmlw" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:53.82%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.57%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:12.89%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:12.89%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:12.83%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:53.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:44.6%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">For&#160;the year ended&#160;December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:53.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.87%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="10" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:53.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:44.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:53.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Cash Interest Expense</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.57%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.89%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.89%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:53.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Coupon interest expense - 2023 Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_IlL1-aoOz0muNy23d_GMOw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InterestExpenseDebtExcludingAmortization" scale="3" id="Tc_tSGtL1zBR0uRJ9ey2p3png_5_3">545</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_sUmtKlw7GU2Z1jCoNlH0mQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InterestExpenseDebtExcludingAmortization" scale="3" id="Tc_AhXELX1ElEa0aGFZShZBcQ_5_6">3,138</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_EG9sy8Hb-0ezbGiM3IJ64w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InterestExpenseDebtExcludingAmortization" scale="3" id="Tc_-SjUH34B0k2C2nrbgMmesA_5_9">7,390</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:53.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Coupon interest expense - 2025 Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.57%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.89%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_hWxJVXpeukyYZRjXd7vFsw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InterestExpenseDebtExcludingAmortization" scale="3" id="Tc_JOoN_jP-FE28xl80RN6JKw_6_3">4,637</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.89%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_Fq2asOdn_kqiVzufwpVwKw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InterestExpenseDebtExcludingAmortization" scale="3" id="Tc_egPThiM9kUmKCbO0zQ-Ycg_6_6">4,637</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_B52uU2Mlw0iaAElsoUnx3Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InterestExpenseDebtExcludingAmortization" scale="3" id="Tc_C5YKtgp1d0uWK97pnf8QWw_6_9">554</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:53.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Coupon interest expense - 2027 Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_x6bwc1aoykiu0j_LFZBhYg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InterestExpenseDebtExcludingAmortization" scale="3" id="Tc_5c5zWGFLo0e1amBdWcPCqw_7_3">4,688</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_oRqSXBIKh0eX4ExySYWF8w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InterestExpenseDebtExcludingAmortization" scale="3" id="Tc_gN-ZZ1Zb-02EzLnSG56PsA_7_6">4,688</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_NdHMAvtl7EiuDr6tIOXilw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InterestExpenseDebtExcludingAmortization" scale="3" id="Tc_Bmtd_Izd30S-udiIB5Vzgg_7_9">2,904</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:53.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Non-cash Interest Expense</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.57%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.89%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.89%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:53.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Amortization of debt discount/transaction costs- 2023 Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_IlL1-aoOz0muNy23d_GMOw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AmortizationOfFinancingCostsAndDiscounts" scale="3" id="Tc_wt1h6O-2a0KB7Vhx68dSSQ_9_3">97</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_sUmtKlw7GU2Z1jCoNlH0mQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AmortizationOfFinancingCostsAndDiscounts" scale="3" id="Tc_SENP5zR0nU2Ef0NtAdlXVA_9_6">4,932</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_EG9sy8Hb-0ezbGiM3IJ64w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AmortizationOfFinancingCostsAndDiscounts" scale="3" id="Tc_sZs9wU45okqI5qhM6n42Vg_9_9">10,887</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:53.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Amortization of debt discount/transaction costs- 2025 Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.57%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.89%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_hWxJVXpeukyYZRjXd7vFsw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AmortizationOfFinancingCostsAndDiscounts" scale="3" id="Tc_j7kNfOCQX0G08MqRLFQsog_10_3">457</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.89%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_Fq2asOdn_kqiVzufwpVwKw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AmortizationOfFinancingCostsAndDiscounts" scale="3" id="Tc_icoAmA14BEGrxkAYBNOSlg_10_6">4,795</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_B52uU2Mlw0iaAElsoUnx3Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AmortizationOfFinancingCostsAndDiscounts" scale="3" id="Tc_ZRVX4bxF806MEmae3j4hyg_10_9">546</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:53.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Amortization of debt discount/transaction costs- 2027 Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_x6bwc1aoykiu0j_LFZBhYg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AmortizationOfFinancingCostsAndDiscounts" scale="3" id="Tc_nHm-0zZYnkG69-DjAFdD5g_11_3">408</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_oRqSXBIKh0eX4ExySYWF8w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AmortizationOfFinancingCostsAndDiscounts" scale="3" id="Tc_T9C-aa5pfk6Ln1PxN7id-A_11_6">4,092</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.83%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_NdHMAvtl7EiuDr6tIOXilw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AmortizationOfFinancingCostsAndDiscounts" scale="3" id="Tc_5Oi4C_eh_Uir_Elfo9VRkw_11_9">2,359</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:53.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total Interest Expense</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.57%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.89%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InterestExpenseDebt" scale="3" id="Tc_7iqFdRQekkqlCwPEkSLQuA_12_3">10,832</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.89%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InterestExpenseDebt" scale="3" id="Tc_uMlqmmJsiUyslc96wqcF_w_12_6">26,282</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.83%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InterestExpenseDebt" scale="3" id="Tc_1UgROWMI5k-am1JUjKFrDA_12_9">24,640</ix:nonFraction></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">The Company determined the Notes are Level 2 liabilities in the fair value hierarchy and estimated their fair values as </span><span style="font-size:10pt;">$<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_wzCRDkFhQEa0Q4hGaj9ADA" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:ConvertibleDebtFairValueDisclosures" scale="6" id="Narr_vyJ8qmOJ7kOVu9o_pz0GuA">19.5</ix:nonFraction></span><span style="font-size:10pt;"> million, </span><span style="font-size:10pt;">$<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_ZetZSnUIu0SKEy9vSz2DrA" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:ConvertibleDebtFairValueDisclosures" scale="6" id="Narr_W-k8KUCBI0ms1ErkcVMtWg">143.6</ix:nonFraction></span><span style="font-size:10pt;"> million, and </span><span style="font-size:10pt;">$<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_rMWc7QQ050epRT-cmk3YDQ" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:ConvertibleDebtFairValueDisclosures" scale="6" id="Narr_udhE6jB5pEiHdiQov3LGpQ">192.0</ix:nonFraction></span><span style="font-size:10pt;"> million at December 31, 2022 for the </span><span style="-sec-ix-hidden:Hidden_6pZXc4yN8UGzliGoc7Xcfw;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">2023</span></span><span style="font-size:10pt;"> Notes, </span><span style="-sec-ix-hidden:Hidden_j8h4rOm8lUqa-Aq9yQNl0g;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">2025</span></span><span style="font-size:10pt;"> Notes, and </span><span style="-sec-ix-hidden:Hidden_7AsSvO4WhUmmbzAO1MAR1w;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">2027</span></span><span style="font-size:10pt;"> Notes, respectively.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;"><i style="font-style:italic;">Capped Call Transactions</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;background:#ffffff;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;">In connection with the offering of the 2027 Notes, on May&#160;13, 2020, the Company entered into privately negotiated capped call transactions (the &#8220;Capped Call Transactions&#8221;), pursuant to capped call confirmations, covering the total principal amount of the 2027 Notes for an aggregate premium of $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_5_13_2020_us-gaap_DerivativeInstrumentRiskAxis_veco_DerivativeContractCappedCallMember_AmsPhVzUq0WxhxYxtgccOg" decimals="-5" format="ixt:numdotdecimal" name="veco:CappedCallTransactionsPrice" scale="6" id="Narr_O4fZZQBFAka2vywMDfv65g">10.3</ix:nonFraction>&#160;million. The Capped Call Transactions are expected generally to reduce the potential dilution to the Company&#8217;s common stock upon any conversion of the 2027 Notes and/or offset any cash payments the Company is required to make in excess of the aggregate principal amount of converted 2027 Notes, as the case may be, with such reduction and/or offset subject to a cap based on the capped price of the Capped Call Transactions. The Capped Call Transactions exercise price is equal to the initial conversion price of the 2027 Notes, and the capped price of the Capped Call Transactions is approximately $<ix:nonFraction unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg" contextRef="Duration_5_13_2020_To_5_13_2020_us-gaap_DerivativeInstrumentRiskAxis_veco_DerivativeContractCappedCallMember_oCl303Xdc0ax8mKHo-S8gQ" decimals="2" format="ixt:numdotdecimal" name="veco:CappedCallTransactionsCapPrice" scale="0" id="Narr_eXELh0csu0KLrskaA_uiuQ">18.46</ix:nonFraction>&#160;per share and is subject to certain adjustments under the terms of the capped call confirmations.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;background:#ffffff;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></ix:continuation></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-28</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Veeco Instruments&#160;Inc. and Subsidiaries</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Notes to Consolidated Financial Statements (Continued)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="_Hlk94797112"></a><a id="_Hlk94797365"></a><ix:continuation id="Tb_Ko6sZltk-02gqeZhfdSDwg_cont4"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;">The Capped Call Transactions are separate transactions entered into by the Company with the capped call counterparties, are not part of the terms of the 2027 Notes and do not change the holders&#8217; rights under the 2027 Notes. Holders of the 2027 Notes do not have any rights with respect to the Capped Call Transactions. The cost of the Capped Call Transactions is not expected to be tax-deductible as the Company did not elect to integrate the Capped Call Transactions into the 2027 Notes for tax purposes. The Company used a portion of the net proceeds from the offering of the 2027 Notes to pay for the Capped Call Transactions, and the cost of the Capped Call Transactions was recorded as a reduction of the Company&#8217;s additional paid-in capital in the accompanying consolidated financial statements.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Revolving Credit Facility</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">On December 16, 2021, the Company entered into a loan and security agreement providing for a senior secured revolving credit facility in an aggregate principal amount of </span><span style="font-size:10pt;">$<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_16_2021_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021Member_ddwT9iX1z0adI_mlFlsfeg" decimals="-6" format="ixt:numdotdecimal" name="us-gaap:LineOfCreditFacilityMaximumBorrowingCapacity" scale="6" id="Narr_I4wX7sGyEESB5-5lRfxmeQ">150</ix:nonFraction></span><span style="font-size:10pt;"> million (the &#8220;Credit Facility&#8221;), including a </span><span style="font-size:10pt;">$<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_16_2021_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021LetterOfCreditMember_QSDuY2Ej4keYjyFiaLxdzA" decimals="-6" format="ixt:numdotdecimal" name="us-gaap:LineOfCreditFacilityMaximumBorrowingCapacity" scale="6" id="Narr_qpSR5CYwKEynYNNjhKwyRg">15</ix:nonFraction></span><span style="font-size:10pt;"> million letter of credit sublimit. The Credit Facility is guaranteed by the Company&#8217;s direct material U.S. subsidiaries, subject to customary exceptions. Borrowings under the Credit Facility are secured by a first-priority lien on substantially all of the assets of the Company, subject to customary exceptions. </span><span style="font-size:10pt;">The Credit Facility has a term of </span><ix:nonNumeric contextRef="Duration_12_16_2021_To_12_16_2021_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021Member_-KOL_4BIDE-MqJoWpDzBfg" format="ixt-sec:durwordsen" name="us-gaap:DebtInstrumentTerm" id="Narr_hzOMeT_TMEeYiFO9gTreVg"><span style="font-size:10pt;">five years</span></ix:nonNumeric><span style="font-size:10pt;">, maturing on December 16, 2026, or earlier if certain liquidity measures are not met prior to the 2025 Notes maturing. </span><span style="font-size:10pt;">Subject to certain conditions and the receipt of commitments from the lenders, the Loan and Security Agreement allows for revolving commitments under the Credit Facility to be increased by up to </span><span style="font-size:10pt;">$<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_12_16_2021_To_12_16_2021_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021Member_-KOL_4BIDE-MqJoWpDzBfg" decimals="-6" format="ixt:numdotdecimal" name="veco:LineOfCreditFacilityContingentIncreaseAdditionalBorrowingCapacity" scale="6" id="Narr_0TAYsab7pUi-rHnWPuVHMA">75</ix:nonFraction></span><span style="font-size:10pt;"> million. The existing lenders under the Credit Facility are entitled, but not obligated, to provide such incremental commitments.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Borrowings will bear interest at a floating rate which can be, at the Company&#8217;s option, either (a) an alternate base rate plus an applicable rate ranging from <ix:nonFraction unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w" contextRef="Duration_12_16_2021_To_12_16_2021_srt_RangeAxis_srt_MinimumMember_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021Member_us-gaap_VariableRateAxis_us-gaap_BaseRateMember_9l_m7cLDiECMDSisLkqkyg" decimals="4" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentBasisSpreadOnVariableRate1" scale="-2" id="Narr_xfGSQgOYq06Sf8DgA5gJ6g">0.50</ix:nonFraction>% to <ix:nonFraction unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w" contextRef="Duration_12_16_2021_To_12_16_2021_srt_RangeAxis_srt_MaximumMember_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021Member_us-gaap_VariableRateAxis_us-gaap_BaseRateMember_5s2HMN4pxUOnshOrqA3jAw" decimals="4" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentBasisSpreadOnVariableRate1" scale="-2" id="Narr_POd53agzXUaWbPfKFgLM5Q">1.25</ix:nonFraction>% or (b) a SOFR rate (with a floor of <ix:nonFraction unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w" contextRef="As_Of_12_16_2021_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021Member_us-gaap_VariableRateAxis_us-gaap_SecuredOvernightFinancingRateSofrOvernightIndexSwapRateMember_yH5_YTWqjEuoxhZjlqLJyw" decimals="4" format="ixt:numdotdecimal" name="veco:DebtInstrumentFloorRate" scale="-2" id="Narr_YSnChEdorkaQT-g7sh9yAQ">0.00</ix:nonFraction>%) for the specified interest period plus an applicable rate ranging from <ix:nonFraction unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w" contextRef="Duration_12_16_2021_To_12_16_2021_srt_RangeAxis_srt_MinimumMember_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021Member_us-gaap_VariableRateAxis_us-gaap_SecuredOvernightFinancingRateSofrOvernightIndexSwapRateMember_W06gA2KxG0SepRz9gRIbeA" decimals="4" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentBasisSpreadOnVariableRate1" scale="-2" id="Narr_ycuzrYYglUCwOUR1kwV-xw">1.50</ix:nonFraction>% to <ix:nonFraction unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w" contextRef="Duration_12_16_2021_To_12_16_2021_srt_RangeAxis_srt_MaximumMember_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021Member_us-gaap_VariableRateAxis_us-gaap_SecuredOvernightFinancingRateSofrOvernightIndexSwapRateMember_R5S-gMQe8keYrNuq6wDVag" decimals="4" format="ixt:numdotdecimal" name="us-gaap:DebtInstrumentBasisSpreadOnVariableRate1" scale="-2" id="Narr_2MAIp5CsPkyga2eTwMXnFg">2.25</ix:nonFraction>%, in each case, depending on the Company&#8217;s Secured Net Leverage Ratio (as defined in the Loan and Security Agreement). The Company will pay an unused commitment fee ranging from <ix:nonFraction unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w" contextRef="Duration_12_16_2021_To_12_16_2021_srt_RangeAxis_srt_MinimumMember_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021Member_Sn3H0cYnKEqQh6tKahzz0A" decimals="4" format="ixt:numdotdecimal" name="us-gaap:LineOfCreditFacilityUnusedCapacityCommitmentFeePercentage" scale="-2" id="Narr_R8XkxHl4vEu3WEXNIZwq4A">0.25</ix:nonFraction>% to <ix:nonFraction unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w" contextRef="Duration_12_16_2021_To_12_16_2021_srt_RangeAxis_srt_MaximumMember_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021Member_UhYqivVxpkm2yqOX6N-eQw" decimals="4" format="ixt:numdotdecimal" name="us-gaap:LineOfCreditFacilityUnusedCapacityCommitmentFeePercentage" scale="-2" id="Narr_sQDTHP8sAUqyz_YWZWfBrw">0.35</ix:nonFraction>% based on unused capacity under the Credit Facility and the Company&#8217;s Secured Net Leverage Ratio. The Company may use the proceeds of borrowings under the Credit Facility to pay transaction fees and expenses, provide for its working capital needs and reimburse drawings under letters of credit and for other general corporate purposes.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Loan and Security Agreement contains customary affirmative covenants for transactions of this type, including, among others, the provision of financial and other information to the administrative agent, notice to the administrative agent upon the occurrence of certain material events, preservation of existence, maintenance of properties and insurance, compliance with laws, including environmental laws, the provision of additional guarantees, and an affiliate transactions covenant, subject to certain exceptions. The Loan and Security Agreement contains customary negative covenants, including, among others, restrictions on the ability to merge and consolidate with other companies, incur indebtedness, refinance our existing convertible notes, grant liens or security interests on assets, make investments, acquisitions, loans, or advances, pay dividends, and sell or otherwise transfer assets.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Loan and Security Agreement contains financial maintenance covenants that require the Borrower to maintain an Interest Coverage Ratio (as defined in the Loan and Security Agreement) of not less than <ix:nonFraction unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w" contextRef="Duration_12_16_2021_To_12_16_2021_srt_RangeAxis_srt_MinimumMember_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021Member_Sn3H0cYnKEqQh6tKahzz0A" decimals="INF" format="ixt:numdotdecimal" name="veco:DebtInstrumentInterestCoverageRatio" scale="0" id="Narr_qe3pxZ-2cUSY3yFKbW9a8w">3.00</ix:nonFraction> to 1.00, a Total Net Leverage Ratio (as defined in the Loan and Security Agreement) of not more than <ix:nonFraction unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w" contextRef="As_Of_12_16_2021_srt_RangeAxis_srt_MaximumMember_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021Member_RxUGPsRTL0ajQ-_tTuLXIg" decimals="INF" format="ixt:numdotdecimal" name="veco:DebtInstrumentTotalNetLeverageRatio" scale="0" id="Narr_ozc73APWNUe52CBMiKrf4A">4.50</ix:nonFraction> to 1.00, and a Secured Net Leverage Ratio (as defined in the Loan and Security Agreement) of not more than <ix:nonFraction unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w" contextRef="As_Of_12_16_2021_srt_RangeAxis_srt_MaximumMember_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021Member_RxUGPsRTL0ajQ-_tTuLXIg" decimals="INF" format="ixt:numdotdecimal" name="veco:DebtInstrumentSecuredNetLeverageRatio" scale="0" id="Narr_ZR-SX2Hg8kmfoUp_cmBVSg">2.50</ix:nonFraction> to 1.00, in each case, tested at the end of each fiscal quarter commencing with the fiscal quarter ending March 31, 2022. The Loan and Security Agreement also provides for a number of customary events of default, including, among others: payment defaults to the lenders&#894; voluntary and involuntary bankruptcy proceedings&#894; covenant defaults&#894; material inaccuracies of representations and warranties&#894; certain change of control events&#894; material money judgments&#894; and other customary events of default. The occurrence of an event of default could result in the acceleration of obligations and the termination of lending commitments under the Loan and Security Agreement.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021Member_zEz5_eyHg06Zrt2D76rTpw" decimals="-3" format="ixt-sec:numwordsen" name="us-gaap:LineOfCreditFacilityMaximumAmountOutstandingDuringPeriod" scale="3" id="Narr_ZPpgYM0950-GyD6-clcrqw"><ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021Member_D1zUCvzuukuCwXIz58-u7A" decimals="-3" format="ixt-sec:numwordsen" name="us-gaap:LineOfCreditFacilityMaximumAmountOutstandingDuringPeriod" scale="3" id="Narr_et7ho_Hjc0yG7O08H3lD6Q">No</ix:nonFraction></ix:nonFraction> amounts were outstanding under the Credit Facility as of December 31, 2022 or December 31, 2021.</p></ix:continuation><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-29</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Veeco Instruments&#160;Inc. and Subsidiaries</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Notes to Consolidated Financial Statements (Continued)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="_Hlk126076637"></a><a id="Tc_JAGGj9VrVkidzru1r_I_iw_1_5"></a><a id="Tc_TvnM_Xegek-YsNnS4_29DQ_2_5"></a><a id="Tc_akrLaZ9aJk2mfbRrVJ6e9A_3_2"></a><a id="Tc_ybwMzUAkH0eNOtTsTRdShg_3_5"></a><a id="Tc_REb_qE33rEGPw7ON8KDInA_4_2"></a><a id="Tc_p8ARDUsre0qPR60qpAllSA_4_5"></a><a id="Tc_7VFXeQEdjUaPQ53zN7WkZg_5_2"></a><a id="Tc_VJFKORhZLkGRavlr7jDuiw_5_5"></a><a id="Tc_THicDq-7GkquxiP1c7hMrA_5_8"></a><a id="Tc_mdlGgaNsTUOM4G4XYXyiBQ_6_2"></a><a id="Tc_prl9SFY0RkeNXkE8ImNw4w_7_0"></a><a id="Tc_7NeKjfCb3kOIX5maOcuX9Q_7_2"></a><a id="Tc_f4ypRN3v9Eaa82xGUuK8xw_7_5"></a><a id="Tc_IuGeHlaX0Um65f-auAYjRw_7_8"></a><a id="Tc_vPE-RgTvfk6nDvIT_Sud_Q_8_0"></a><a id="Tc_y25JT8l8uk20LSmN6gaaIg_9_0"></a><a id="Tc_bIdDMgIXQEqS8j70yIRUEA_10_0"></a><a id="Tc_cxQTlr1uEEO5thWVfRPUJg_11_0"></a><a id="Tc_vn2KGKv820aZ4wlZ8FJw8Q_11_2"></a><a id="Tc_YTDtixRzeEOKpAJtY6ADog_11_5"></a><a id="Tc_Lx-UMbaEk0qNiFHuyhMLYw_11_8"></a><a id="Tc_zAwU1-RwIkirm0ucsqtQxw_12_0"></a><a id="Tc_Dgnhgp6-4EKzEhJN6c2H0g_13_0"></a><a id="Tc_2JAFVRGX-Uq4Z0vSLegx8g_13_2"></a><a id="Tc_0WsIQxOXCUqf2Xk_Ov_AiA_13_5"></a><a id="Tc_3HGxwX0tG0u_lSYUFqwsoQ_13_8"></a><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="us-gaap:StockholdersEquityNoteDisclosureTextBlock" id="Tb_R-2Yze0AGEaWwokKNATh9g" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 11 &#8212; Stockholders&#8217; Equity</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Accumulated Other Comprehensive Income (&#8220;AOCI&#8221;)</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The following table presents the changes in the balances of each component of AOCI, net of tax:</p><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="us-gaap:ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock" id="Tb_Gvu-BxipnUudwa1jKmtLmw" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:62.69%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.01%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:62.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Unrealized</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:62.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Gains&#160;(Losses)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:62.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Foreign</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">on Available</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:62.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Currency</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">for&#160;Sale&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:62.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.7%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Translation</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.51%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Securities</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.7%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Total</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="10" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:62.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:34.85%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:62.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Balance - December&#160;31, 2019</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2019_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedTranslationAdjustmentMember_GAP5ncKi9kmzPvjWaKXagA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_8PGTyLmSZESLG32nKHbVOQ_7_3">1,861</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2019_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedNetUnrealizedInvestmentGainLossMember_sFc0HafvrE2TNhcLUDaltg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_divwMkymikulEAP_LzOsfg_7_6">33</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2019_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_ZFKrEu3jd0CjuFXPNSSC8w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_66t_mT1ky0iqq39ioenAfw_7_9">1,894</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:62.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Other comprehensive income (loss)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedTranslationAdjustmentMember_stjnN33fGU-wMsLEDFoL4w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent" scale="3" id="Tc_rFjzhUorn0eHiTlxTCql-Q_8_3">5</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.01%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedNetUnrealizedInvestmentGainLossMember_EwwqNhH-8km-3wAI-bkLQA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent" sign="-" scale="3" id="Tc_oLLP_rWz10m6iYqFP0EFiw_8_6">53</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_iUgMnC3EVk2SSaJC7ml4hA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent" sign="-" scale="3" id="Tc_L5zGsenGskO5ONf3gsPing_8_9">48</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:62.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Balance - December&#160;31, 2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedTranslationAdjustmentMember_Gkvk-v_CWEK1-pmx4K0LPQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_iP6oGGMcTEClrykJU6j3Fw_9_3">1,866</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedNetUnrealizedInvestmentGainLossMember_pEhKOgUXxEqXMO3PxGIyPg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" sign="-" scale="3" id="Tc_UOJcODjn_k-bQLTP2Q4lKA_9_6">20</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_gKPjwCmvOEeoy03lBe0YKg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_csOxy7Ekmk-spLGdGMPthA_9_9">1,846</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:62.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Other comprehensive income (loss)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedTranslationAdjustmentMember_EalXQOx570OxsR04zKZb-A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent" sign="-" scale="3" id="Tc_qWhxQKlWDUmNbTPpzJmbMQ_10_3">52</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.01%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedNetUnrealizedInvestmentGainLossMember_ZWPV2F-CdUyFpf6zSDJ9Rg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent" sign="-" scale="3" id="Tc_P7ECvKgNE0K7SY4AU90kxg_10_6">311</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_WIAntBTv5kumJYPuwFnHEA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent" sign="-" scale="3" id="Tc_VuQDZHOJLUqvIUuQ911BZw_10_9">363</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:62.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Balance - December&#160;31, 2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedTranslationAdjustmentMember_M2qUOBZtoUGAvnzy-b8yrg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_gSiWuqBdtkqDmhV-r0XQGA_11_3">1,814</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedNetUnrealizedInvestmentGainLossMember_owXYuMxjnkaLDITLeHQMFw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" sign="-" scale="3" id="Tc_RV36k7wG3EK50ska-hxG4g_11_6">331</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_XMi8hyEBWUaztLhyei_Ajw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_oDvVOooq4EiRX3-JNOEw_A_11_9">1,483</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:62.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Other comprehensive income (loss)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedTranslationAdjustmentMember_lCvs1WPXXECT-J60wmaSsw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent" sign="-" scale="3" id="Tc_usZ4n3fIyEeqB6YuCzRIIw_12_3">41</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.01%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedNetUnrealizedInvestmentGainLossMember_xCEQi8wJlEmZsaR5Kh6uTA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent" sign="-" scale="3" id="Tc_9ys6XG8T_USdCrkfe25q_A_12_6">514</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_6zlsan7E70SaZfNDKUZFwQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent" sign="-" scale="3" id="Tc_A77UdDg2XUKpV-KJTZmaDg_12_9">555</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:62.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Balance - December&#160;31, 2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedTranslationAdjustmentMember_0I3e07cQjke7GCQzAtl5VA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_oPkx2pyfy0OED5wSVdQEiw_13_3">1,773</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.01%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedNetUnrealizedInvestmentGainLossMember_zDMfp5ATokeUuBj2WfXGIw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" sign="-" scale="3" id="Tc_4r60RUgLKUuVNmUVUR3Tbw_13_6">845</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_W3Ea7PTEU0qeOccl5h-Srw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_TfUHZH6N8kGy0e-2ayOSEQ_13_9">928</ix:nonFraction></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company did not allocate additional tax expense (benefit) to other comprehensive income (loss) for the years ended December 31, 2021 and 2020, as the Company was in a full valuation allowance position such that a deferred tax asset related to amounts recognized in other comprehensive income was not regarded as realizable on a more-likely-than-not basis. The Company allocated an immaterial amount of additional tax benefit to other comprehensive income (loss) for the year ended December 31, 2022, as the Company is no longer in a full valuation allowance position.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Preferred Stock</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Board of Directors has authority under the Company&#8217;s Certificate of Incorporation to issue shares of preferred stock, par value $<ix:nonFraction unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="INF" format="ixt:numdotdecimal" name="us-gaap:PreferredStockParOrStatedValuePerShare" scale="0" id="Narr_al5bvZXfUE6GojsnXrDbmA">0.01</ix:nonFraction>, with voting and economic rights to be determined by the Board of Directors. As of December 31, 2022, <ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="INF" format="ixt-sec:numwordsen" name="us-gaap:PreferredStockSharesIssued" scale="0" id="Narr_R1_eDJirOkWIAgAp-hVJIA">no</ix:nonFraction> preferred shares have been issued.</p></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;background:#ffff00;">&#8203;</span></p><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="us-gaap:DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock" id="Tb_19aSJXmUvUyNwHXvJ3tAIw" continuedAt="Tb_19aSJXmUvUyNwHXvJ3tAIw_cont1" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 12 &#8212; Stock Plans</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Share-based incentive awards are provided to employees under the terms of the Company&#8217;s equity incentive compensation plans (the &#8220;Plans&#8221;), which are administered by the Compensation Committee of the Board of Directors. The 2019 Plan originated as the 2010 Stock Incentive Plan and was originally approved by the Company&#8217;s shareholders in May 2010. This Plan was subsequently amended, as approved by shareholders, in 2013, 2016, 2019 (at which time the Plan was renamed the 2019 Stock Incentive Plan), and 2022 (as amended to date, the &#8220;2019 Plan&#8221;). The Company&#8217;s employees, non-employee directors, and consultants are eligible to receive awards under the 2019 Plan, which can include non-qualified stock options, incentive stock options, RSAs, RSUs, PSAs, PSUs, share appreciation rights, dividend equivalent rights, or any combination thereof. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">In 2013, the Board of Directors granted equity awards to certain employees under the Company&#8217;s 2013 Inducement Stock Incentive Plan (the &#8220;Inducement Plan&#8221;). The Company issued </span><span style="font-size:10pt;"><ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="Duration_1_1_2013_To_12_31_2013_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember_us-gaap_PlanNameAxis_veco_InducementStockIncentivePlan2013Member_sLxW-wtGPkeJVSB0u2dLjg" decimals="INF" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriod" scale="0" id="Narr_iPa6j6nLL0yT545XT0bEfw">124,500</ix:nonFraction></span><span style="font-size:10pt;"> stock option shares and </span><span style="font-size:10pt;"><ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="Duration_1_1_2013_To_12_31_2013_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_us-gaap_PlanNameAxis_veco_InducementStockIncentivePlan2013Member_UacULr7ikES2tUIYrk0hFQ" decimals="INF" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod" scale="0" id="Narr_Mp4lKsfrtEubDRn66gkRFw">87,000</ix:nonFraction></span><span style="font-size:10pt;"> RSUs under this plan. Stock options under this plan vest over a </span><ix:nonNumeric contextRef="Duration_1_1_2013_To_12_31_2013_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember_us-gaap_PlanNameAxis_veco_InducementStockIncentivePlan2013Member_sLxW-wtGPkeJVSB0u2dLjg" format="ixt-sec:durwordsen" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1" id="Narr_2B6EL4zgMUGZzWzATI-9Rw"><span style="font-size:10pt;">three year</span></ix:nonNumeric><span style="font-size:10pt;"> period and have a </span><ix:nonNumeric contextRef="Duration_1_1_2013_To_12_31_2013_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember_us-gaap_PlanNameAxis_veco_InducementStockIncentivePlan2013Member_sLxW-wtGPkeJVSB0u2dLjg" format="ixt-sec:durwordsen" name="us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod" id="Narr_Z4KFNXndR0-HnW_kg6vhzg"><span style="font-size:10pt;">10-year</span></ix:nonNumeric><span style="font-size:10pt;"> term, and RSUs under this plan vest over a </span><span style="-sec-ix-hidden:Hidden_GYTb4cpfHkKMyAjEn-joig;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">two</span></span><span style="font-size:10pt;"> or </span><ix:nonNumeric contextRef="Duration_1_1_2013_To_12_31_2013_srt_RangeAxis_srt_MaximumMember_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_us-gaap_PlanNameAxis_veco_InducementStockIncentivePlan2013Member_QVXVwOJ3fUqZMdTJZ0TtAg" format="ixt-sec:durwordsen" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1" id="Narr_SJam0Dc4ZUGwsDX5WVUvhQ"><span style="font-size:10pt;">four year</span></ix:nonNumeric><span style="font-size:10pt;"> period. At December 31, 2013, the Inducement Plan was merged into the 2019 Plan and is considered an inactive plan with </span><span style="font-size:10pt;"><ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="As_Of_12_31_2013_us-gaap_PlanNameAxis_veco_InducementStockIncentivePlan2013Member_3P6TBIDpNUGgRvFNIHqw5A" decimals="INF" format="ixt-sec:numwordsen" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant" scale="0" id="Narr_RABg_CsLQEKKCs4JdhBeUQ">no</ix:nonFraction></span><span style="font-size:10pt;"> further shares available for grant. At December 31, 2022, there are </span><span style="font-size:10pt;"><ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="As_Of_12_31_2022_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember_us-gaap_PlanNameAxis_veco_InducementStockIncentivePlan2013Member_Dy-7OenGQEq3eD3mafXOSg" decimals="INF" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber" scale="0" id="Narr_hIYZF1CNBU2H4FkxSTD3GA">2,000</ix:nonFraction></span><span style="font-size:10pt;"> option shares and </span><span style="font-size:10pt;"><ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="As_Of_12_31_2022_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_us-gaap_PlanNameAxis_veco_InducementStockIncentivePlan2013Member_wX7fHqCCNUmtAt7fofhKzQ" decimals="INF" format="ixt-sec:numwordsen" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardNonOptionEquityInstrumentsOutstandingNumber" scale="0" id="Narr_JHjloMgSYUmbtOC3nswuug">no</ix:nonFraction></span><span style="font-size:10pt;"> RSUs outstanding under the Inducement Plan.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></ix:nonNumeric></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-30</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Veeco Instruments&#160;Inc. and Subsidiaries</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Notes to Consolidated Financial Statements (Continued)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="Tc_zHeVQha3ZU2TexFR0R5Nxg_1_2"></a><a id="Tc_2-IE6tH7KE-DBw8B6TqYtQ_2_2"></a><a id="Tc_arWFUvVNokyThADGoSYDJA_2_5"></a><a id="Tc_x2zVhcdpbEuyL-065aeUEA_2_8"></a><a id="Tc_dHflJ0KDw0mrk7AAZkZA4A_3_2"></a><a id="Tc_Dj64IS8Iu0Sa-VTiK0-eQA_4_0"></a><a id="Tc_H9y8rf1a6k25TyVhdu4wtg_4_2"></a><a id="Tc_-f2jPGide0KGu5RU9C5O5Q_4_5"></a><a id="Tc_-ZnV0JQVIkew-1iRoMy8nQ_4_8"></a><a id="Tc_a4Wjr63L8k6bLYE1HqvcLQ_5_0"></a><a id="Tc_CJku5QwInUOg-hB_2rbqFQ_6_0"></a><a id="Tc_dLARfZOM40a9HjlC4RRsow_7_0"></a><a id="Tc_8yL2CGwb30uxNk0x9XaZXQ_7_2"></a><a id="Tc_3DjBY_SfUUGmKmUY73XhOg_7_5"></a><a id="Tc_KBZ7N7j4ekyh0pUyYuJmpQ_7_8"></a><a id="Tc_CrqUXz_a6Ue4weZae9v-vg_1_2"></a><a id="Tc_cd21YlgfI0CoQLCO52zTjQ_1_5"></a><a id="Tc_VQUe_wWX7EmWvLesDEH2qQ_2_2"></a><a id="Tc_IWicGUi0v0CN5VZ-G1dnRg_2_5"></a><a id="Tc_2cMFrUfZz0-NsKTrppNLAA_3_2"></a><a id="Tc__jc26uunDkahJru5dIu-7w_3_5"></a><a id="Tc_gloNbbzEY06sV6-xskbMmw_4_2"></a><a id="Tc_YFZgbKAe4EiDdrtlBnvjaw_4_5"></a><a id="Tc_UNatb2XBGkmXXk_rELcA_Q_5_2"></a><a id="Tc_ZeCN0QSTKU6WWZQLCfkJXw_5_5"></a><a id="Tc_RwFsqod3qUuDuGwC0Ftnjw_6_0"></a><a id="Tc_5toa74pRK0S5SjeIe_b07Q_6_2"></a><a id="Tc_gpm4mp3KK0qn7LQWlR-yfQ_7_0"></a><a id="Tc_KSI6Pdjbl0WJ7v16XNUtWg_8_0"></a><a id="Tc_cVAE2AUDDUqxQu0vluicwg_9_0"></a><a id="Tc_xaV20TWWNE2dusMZZCAs7A_9_2"></a><ix:continuation id="Tb_19aSJXmUvUyNwHXvJ3tAIw_cont1" continuedAt="Tb_19aSJXmUvUyNwHXvJ3tAIw_cont2"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">The Company is authorized to issue up to </span><span style="font-size:10pt;"><ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="As_Of_12_31_2022_us-gaap_PlanNameAxis_veco_StockIncentivePlan2010Member_kkhgLAR_vUO7juC-JnEbpw" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized" scale="6" id="Narr_mXw9enfgvka-Mkcylz9LnQ">17.8</ix:nonFraction></span><span style="font-size:10pt;"> million shares under the 2019 Plan. Option awards are granted with an exercise price equal to the closing price of the Company&#8217;s common stock on the trading day prior to the date of grant; option awards generally vest over a </span><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember_us-gaap_PlanNameAxis_veco_StockIncentivePlan2010Member_EIavdaQ05k2CdP7S8ASlEQ" format="ixt-sec:durwordsen" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1" id="Narr_UGSPg8u_60W6TIAcOVgg1g"><span style="font-size:10pt;">three year</span></ix:nonNumeric><span style="font-size:10pt;"> period and have a </span><span style="-sec-ix-hidden:Hidden_geqmoAoR4E-cxxENNB5XWw;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">seven</span></span><span style="font-size:10pt;"> or </span><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_srt_RangeAxis_srt_MaximumMember_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember_us-gaap_PlanNameAxis_veco_StockIncentivePlan2010Member_7iPX9cDEzUW57ygkUGNNOA" format="ixt-sec:durwordsen" name="us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod" id="Narr_cPlqqWInaUuDNJqrsbz2XA"><span style="font-size:10pt;">ten year</span></ix:nonNumeric><span style="font-size:10pt;"> term. RSAs and RSUs generally vest over </span><span style="-sec-ix-hidden:Hidden_lv-KmzIXvUmFz5KZwCediA;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">one</span></span><span style="font-size:10pt;"> to </span><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_srt_RangeAxis_srt_MaximumMember_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsAndRestrictedStockUnitsMember_us-gaap_PlanNameAxis_veco_StockIncentivePlan2010Member_ZhJJnDp8d0OLVtHUE1soLw" format="ixt-sec:durwordsen" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1" id="Narr_rI-QIfthcEeg6dCq35FCaQ"><span style="font-size:10pt;">five years</span></ix:nonNumeric><span style="font-size:10pt;">. Certain option and share awards provide for accelerated vesting if there is a change in control, as defined in the 2019 Plan. At December 31, 2022, there are </span><span style="font-size:10pt;"><ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="As_Of_12_31_2022_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember_us-gaap_PlanNameAxis_veco_StockIncentivePlan2010Member_umNhgs6SGESOzePloVCePA" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber" scale="6" id="Narr_LofjvLxT2U-2zgwyuT8XDw">0.2</ix:nonFraction></span><span style="font-size:10pt;"> million option shares and </span><span style="font-size:10pt;"><ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="As_Of_12_31_2022_us-gaap_AwardTypeAxis_veco_RsuAndPsuAwardsMember_us-gaap_PlanNameAxis_veco_StockIncentivePlan2010Member_d6-JRODi8Ee6TSSKS1-eFQ" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardNonOptionEquityInstrumentsOutstandingNumber" scale="6" id="Narr_J3Irmwyz0kOyn7byxwh6vA">0.8</ix:nonFraction></span><span style="font-size:10pt;"> million RSUs and PSUs outstanding under the 2019 Plan.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">The Company is authorized to issue up to </span><span style="font-size:10pt;"><ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="As_Of_12_31_2016_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_aYWHgq11KEuoBBNEV64pyQ" decimals="-4" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized" scale="6" id="Narr_1sZMIx7A7kW0Du-Dp0Bnwg">2.25</ix:nonFraction></span><span style="font-size:10pt;"> million shares under the approved 2016 employee stock purchase plan (&#8220;ESPP&#8221;), including additional shares authorized under plan amendments approved by shareholders in 2019 and 2021. Under the ESPP, substantially all employees in the U.S. may purchase the Company&#8217;s common stock through payroll deductions at a price equal to </span><span style="font-size:10pt;"><ix:nonFraction unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w" contextRef="Duration_1_1_2016_To_12_31_2016_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_M491c-YOEUaCGZ8wIQXStA" decimals="INF" format="ixt:numdotdecimal" name="us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardPurchasePriceOfCommonStockPercent" scale="-2" id="Narr_hcVuWoVZ9U2Hl5uwwXKiWQ">85</ix:nonFraction></span><span style="font-size:10pt;"> percent of the lower of the fair market value of the Company&#8217;s common stock at the beginning or end of each </span><ix:nonNumeric contextRef="Duration_1_1_2016_To_12_31_2016_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_M491c-YOEUaCGZ8wIQXStA" format="ixt-sec:durwordsen" name="veco:ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferPeriod" id="Narr_CoTUV38jn0ytwYGt3L_tGw"><span style="font-size:10pt;">six-month</span></ix:nonNumeric><span style="font-size:10pt;"> offer period, as defined in the ESPP, and subject to certain limits. The ESPP was approved by the Company&#8217;s shareholders. </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Shares Reserved for Future Issuance</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">At December 31, 2022, the Company has <ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="As_Of_12_31_2022_us-gaap_PlanNameAxis_veco_StockIncentivePlan2010Member_kkhgLAR_vUO7juC-JnEbpw" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:CommonStockCapitalSharesReservedForFutureIssuance" scale="6" id="Narr_Tflf5uglPUODN1uRmvtf6g">6.1</ix:nonFraction> million shares reserved to cover exercises of outstanding stock options, vesting of RSUs, and additional grants under the 2019 Plan.<span style="font-size:12pt;"> </span>At December 31, 2022, the Company has <ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="As_Of_12_31_2022_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_9spIHk5Lj0mk0Fhq0uyLew" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:CommonStockCapitalSharesReservedForFutureIssuance" scale="6" id="Narr_Cn1bz6yeA0KpVkZXwynJ9Q">0.6</ix:nonFraction> million shares reserved to cover future issuances under the ESPP Plan.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Share-Based Compensation</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company recognized share-based compensation in the following line items in the Consolidated Statements of Operations for the periods indicated:</p><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="us-gaap:ScheduleOfEmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsTextBlock" id="Tb_6sQbZMov4Uirc6qG3XRD5g" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:64.43%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.52%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:64.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:33.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">For the year ended December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:64.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.78%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.78%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.81%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="10" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:64.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:33.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:64.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Cost of sales</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_IncomeStatementLocationAxis_us-gaap_CostOfSalesMember_6jlqOW9pV0m43w7beGI5eQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AllocatedShareBasedCompensationExpense" scale="3" id="Tc_yafD_TrPcE6wPmkacSu7Gg_4_3">4,551</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_IncomeStatementLocationAxis_us-gaap_CostOfSalesMember_6abGMq9QDEeOCipvBcXctA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AllocatedShareBasedCompensationExpense" scale="3" id="Tc_KKnCajKW3UaPjFXZTl0wjA_4_6">2,373</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_IncomeStatementLocationAxis_us-gaap_CostOfSalesMember_ygktSsgTfUyjEVIS_GKOzA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AllocatedShareBasedCompensationExpense" scale="3" id="Tc_3R7Z8XB0MEqm1EnFS-8jaw_4_9">1,870</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:64.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Research and development</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_IncomeStatementLocationAxis_us-gaap_ResearchAndDevelopmentExpenseMember_xC5nU-WYOkm4dMh6YP-Ebw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AllocatedShareBasedCompensationExpense" scale="3" id="Tc_PePEZ87cIky26lPDLbEsYA_5_3">6,682</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_IncomeStatementLocationAxis_us-gaap_ResearchAndDevelopmentExpenseMember_0YA8SwGFkkuMLELC1j-hSA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AllocatedShareBasedCompensationExpense" scale="3" id="Tc_wkfVuIzO60yrXxpu0e3-rQ_5_6">3,850</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_IncomeStatementLocationAxis_us-gaap_ResearchAndDevelopmentExpenseMember_h4OfLfI-aUWU3289IhriMQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AllocatedShareBasedCompensationExpense" scale="3" id="Tc_wiLxqNlHXESKw92pwYZL6A_5_9">2,900</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:64.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Selling, general, and administrative</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_IncomeStatementLocationAxis_us-gaap_SellingGeneralAndAdministrativeExpensesMember_9myQ9Uv9wE6pMR5CtJ_ICQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AllocatedShareBasedCompensationExpense" scale="3" id="Tc_i3DRlBtPKk2jkFgOQ5TIbg_6_3">11,761</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_IncomeStatementLocationAxis_us-gaap_SellingGeneralAndAdministrativeExpensesMember_rhJjBZUOoUWCeAi4MtyMAA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AllocatedShareBasedCompensationExpense" scale="3" id="Tc_DCEmGjweOECtAZwVNNACZw_6_6">9,026</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.52%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_IncomeStatementLocationAxis_us-gaap_SellingGeneralAndAdministrativeExpensesMember_fLK1Qhy09Ee_xMlMC5PRcg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AllocatedShareBasedCompensationExpense" scale="3" id="Tc_Rhn5gDSZsEyfIhaGCIk6sw_6_9">7,933</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:64.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AllocatedShareBasedCompensationExpense" scale="3" id="Tc_Ny-s76we2kGT35DgnP1pwA_7_3">22,994</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AllocatedShareBasedCompensationExpense" scale="3" id="Tc_3g4y8DZn9028gNRUptUv0w_7_6">15,249</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.52%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AllocatedShareBasedCompensationExpense" scale="3" id="Tc_-BONQhFjEUiySKmUmTNa8A_7_9">12,703</ix:nonFraction></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company did not realize any tax benefits associated with share-based compensation for the years ended December 31, 2021 and 2020 due to the full valuation allowance on its U.S. deferred tax assets. See Note 15, &#8220;Income Taxes&#8221; for additional information. The Company recognized a tax benefit of approximately $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense" scale="6" id="Narr_kT3GQbaGY0ezjAtkePhNxg">4.5</ix:nonFraction> million associated with share-based compensation for the year ended December 31, 2022. The Company capitalized an immaterial amount of share-based compensation into inventory for the years ended December 31, 2022, 2021, and 2020.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Unrecognized share-based compensation costs at December 31, 2022 are summarized below:</p><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="us-gaap:ScheduleOfUnrecognizedCompensationCostNonvestedAwardsTableTextBlock" id="Tb_L1Mp5tlXbEiFJBvbBxikmA" continuedAt="Tb_L1Mp5tlXbEiFJBvbBxikmA_cont1" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.3%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:13.67%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Unrecognized</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Weighted</b></p></td></tr><tr><td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Share-Based</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Average&#160;Period</b></p></td></tr><tr><td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Compensation</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Expected&#160;to&#160;be</b></p></td></tr><tr><td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.71%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Costs</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.67%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Recognized</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="6" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="3" style="vertical-align:bottom;white-space:nowrap;width:14.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in years)</i></p></td></tr><tr><td style="vertical-align:bottom;width:69.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Restricted stock units</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_q9Ip_ln4dEC9Vz5OiwByQg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized" scale="3" id="Tc_IUYg1CBiSUu99kEZXsTQlw_6_3">9,468</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.67%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_g4-6bRHU_UGEBnDrz3qD9A" format="ixt-sec:duryear" name="us-gaap:EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1" id="Tc_jMFdVkzt-E2Fn0wVG1zI3A_6_5"><span style="font-size:10pt;"> 1.9</span></ix:nonNumeric></p></td></tr><tr><td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Restricted stock awards</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardMember_sMXHOamcIkWEmJhAjaFhWw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized" scale="3" id="Tc_F8kWgs01P0-JdlBljz1pjQ_7_3">24,610</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardMember_bM7k1MJbA06-xsn2pQgBrA" format="ixt-sec:duryear" name="us-gaap:EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1" id="Tc_PvMX89zG4UeAMZrMe1RZsA_7_5"><span style="font-size:10pt;"> 1.9</span></ix:nonNumeric></p></td></tr><tr><td style="vertical-align:bottom;width:69.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Performance share units</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.3%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_AwardTypeAxis_veco_PerformanceShareUnitsMember_efDAc13uhkKFYLYN7MeLnw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized" scale="3" id="Tc_D88mUtTjTUWXoUIDyXCg5g_8_3">3,310</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.67%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_AwardTypeAxis_veco_PerformanceShareUnitsMember_nrpb8S7W7E6vrWAnnBvCPQ" format="ixt-sec:duryear" name="us-gaap:EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1" id="Tc_NQ7QS9tz40yfoIHfKIpJMA_8_5"><span style="font-size:10pt;"> 2.0</span></ix:nonNumeric></p></td></tr><tr><td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Total unrecognized share-based compensation cost</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.3%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized" scale="3" id="Tc_8sw4o-nAOk6bcibY8APgug_9_3">37,388</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" format="ixt-sec:duryear" name="us-gaap:EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1" id="Tc_PofGZkomUUqFmvvEbft5IA_9_5"><span style="font-size:10pt;"> 1.9</span></ix:nonNumeric></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></ix:nonNumeric></ix:continuation></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-31</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Veeco Instruments&#160;Inc. and Subsidiaries</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Notes to Consolidated Financial Statements (Continued)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="Tc_wq0_ay6lMU-CKtC3Mf3QNQ_1_4"></a><a id="Tc_PthQUuSRJkixPi2KUaiiSA_2_2"></a><a id="Tc_cATHngdip0iXKYGMiA-qXw_2_4"></a><a id="Tc_mhWuH_3KXkehgU6_vOiafw_3_2"></a><a id="Tc_XzbJ7a_7w0KCliLkhUPfAQ_3_4"></a><a id="Tc_85xWnbS9OkC1-BAx-rRhBw_4_2"></a><a id="Tc_iUQaVSC010u2oimbc13CLg_5_0"></a><a id="Tc_FmDrjUuIU0iMpwOFu1utQA_5_4"></a><a id="Tc_uV9b8vuO6UKjSMRf8-YRYQ_6_0"></a><a id="Tc_Kqi5O_UVJkSP13Uh4Gy8XQ_7_0"></a><a id="Tc_kueycu1gPEqPcyQ0duExvw_8_0"></a><a id="Tc_JPCiKeQnAEaau0Ne1UYueQ_9_0"></a><a id="Tc_q9kjpE8w9kKzNZCd5B3IXw_10_0"></a><a id="Tc_If2oXHgQc0C05dER0Yyp-A_11_0"></a><a id="Tc_xn3bFgNVjEaKm0LFOsw5Vw_12_0"></a><a id="_648a873c_3ae1_4178_aabb_b8a79c763fd0"></a><a id="_b55aeed9_ccaf_481b_8237_f99e4f627a16"></a><a id="Tc_WmO-YaP3oEqfg_NOS8S-yg_1_2"></a><a id="Tc_VsbD5Sh8ZkCnxe50FPCq7Q_2_7"></a><a id="Tc_u--ssuWDs0664t5SOQ8xdQ_3_4"></a><a id="Tc_tK_9rq5Ec0iVZwCnhX1aYw_3_7"></a><a id="Tc_6jDJ03K6H0-6Ac9y3ZPMbQ_3_9"></a><a id="Tc_Buatcpvr7kimrr6UIY6IsA_4_4"></a><a id="Tc_PxaLAtBgjki0ZFNGt_Gd5g_4_7"></a><a id="Tc_34bkTpstv0Kzoz72KVe2Fg_4_9"></a><a id="Tc_bUaC7pCzA0GwCHem2Ma6Zg_5_0"></a><a id="Tc_5HfRX8jBcky2PpGa3fAOLw_5_2"></a><a id="Tc_y0dDNCl6wEifmCAwZamobg_5_4"></a><a id="Tc_2SpHC_stFEe2XfE4gVXL2w_5_7"></a><a id="Tc_cKuykq9JOEOT-ExwnOsviw_5_9"></a><a id="Tc_ctJJd_NEAk2DDtuNS-zJcQ_6_2"></a><a id="Tc_mRe4JxVEdUeVownRblT7HA_6_4"></a><a id="Tc_gb0xHIm3UE2dktgpitGsqQ_6_7"></a><a id="Tc_xlaGViy8KkSiaEVkn9UsiQ_7_0"></a><a id="Tc_yD9mFJTwU0az0rv1mPQWdw_7_4"></a><a id="Tc_J_R6B6ABJEuq_xaeIpDKQw_7_5"></a><a id="Tc_EgwZCuh3_Eaoku6KwVttbg_7_9"></a><a id="Tc_DuwHesBp4EyRqviIScbblw_8_0"></a><a id="Tc_JK9kGhX130SzmIBuQ7ZZlg_8_5"></a><a id="Tc_CAS9F6xFpkS_dNGQ9ktNPg_9_4"></a><a id="Tc_oI3MyeuRJkO23a7wS-3-kg_9_5"></a><a id="Tc_oN6y4PrCqUyFiOJQWUPL_A_1_2"></a><a id="Tc_5UB4GiPvF0-E4Dyp2cmGPw_2_2"></a><a id="Tc_RsYa-DH7lEqHi1HJ38hnng_2_5"></a><a id="Tc_Bmk44ubRb06ZswQcSIG4UA_2_8"></a><a id="Tc_m6MxoA8ZykmiLwDdLna7ig_3_2"></a><a id="Tc_9CgePkkKTE-NVhIEe6_muw_4_0"></a><a id="Tc_BIBjjSinqUGTibX762sqyQ_4_2"></a><a id="Tc_rKLOzZnvw0CsESN3Y7DKQg_4_3"></a><a id="Tc_mnoS7p6AsEW-GTiETs3KMA_4_5"></a><a id="Tc_FtwL_C5JAUCHH71BJfP1mA_4_8"></a><a id="Tc_HM_1dup-iE6OVo-Rc2KAuw_4_9"></a><a id="Tc_ialfa_dJnkyRhtBR4W6phA_5_0"></a><a id="Tc_pGs9ZMqsTEGiEXNFk_k_TQ_5_2"></a><a id="Tc_zKhB60kpfEW00YqWjJBxYQ_5_3"></a><a id="Tc_2ia7RsagyUiU69Y3OzXCGw_5_5"></a><a id="Tc_S-tReF7i8UOEG2zk6yt-VQ_5_8"></a><a id="Tc_TVZoYhiBG0yg4F89dtmaJA_5_9"></a><ix:continuation id="Tb_19aSJXmUvUyNwHXvJ3tAIw_cont2" continuedAt="Tb_19aSJXmUvUyNwHXvJ3tAIw_cont3"><ix:continuation id="Tb_L1Mp5tlXbEiFJBvbBxikmA_cont1"></ix:continuation><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Stock Option Awards</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Stock options are awards issued to employees that entitle the holder to purchase shares of the Company&#8217;s stock at a fixed price. The following table summarizes the equity activity related to stock options:</p><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="us-gaap:ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock" id="Tb_zygM0R49U0yl74jFkN95Vw" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:71.48%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:10.93%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:71.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Weighted&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:71.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Number&#160;of</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Average</b></p></td></tr><tr><td style="vertical-align:bottom;width:71.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Shares</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.54%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Exercise&#160;Price</b></p></td></tr><tr><td style="vertical-align:bottom;width:71.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:71.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;">Balance -  December&#160;31, 2019</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="As_Of_12_31_2019_dyqJ8hTIuEW6V2L_RveF0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber" scale="3" id="Tc_1eSJuvvFskO3PBo_PePxyA_5_2">1,119</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg" contextRef="As_Of_12_31_2019_dyqJ8hTIuEW6V2L_RveF0A" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice" scale="0" id="Tc_vUK6ZN_nk0eGxxjmD8VQbQ_5_5">34.88</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:71.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Expired</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresAndExpirationsInPeriod" scale="3" id="Tc_uhiRzt_35k2WPI5UavD_pg_6_2">389</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresAndExpirationsInPeriodWeightedAverageExercisePrice" scale="0" id="Tc_k2X2clBA20a8DJuoTn8gaA_6_5">34.15</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:71.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;">Balance -  December&#160;31, 2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="As_Of_12_31_2020_JUGLvBeldEeSTj1WqQBVdQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber" scale="3" id="Tc_NCnWsnB7T0W87h9x6zdUVg_7_2">730</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg" contextRef="As_Of_12_31_2020_JUGLvBeldEeSTj1WqQBVdQ" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice" scale="0" id="Tc_B4onplxHqkW6N9hZq-yDSw_7_5">35.26</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:71.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Exercised</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodSharesStockOptionsExercised" scale="3" id="Tc_etfWJQShaEKZFrHcmKaIkg_8_2">2</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice" scale="0" id="Tc_jyxXcRT9YkmWmNtxnU55CQ_8_5">23.36</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:71.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Expired</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresAndExpirationsInPeriod" scale="3" id="Tc_A5BhGWIJVk-ZeNfmVyy0rw_9_2">285</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresAndExpirationsInPeriodWeightedAverageExercisePrice" scale="0" id="Tc_j-XqSdz7hUyug1SZ0Q1PhA_9_5">40.16</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:71.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;">Balance -  December&#160;31, 2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber" scale="3" id="Tc_eHEgipVV9UG8WFLsL0qqQw_10_2">443</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice" scale="0" id="Tc_PwGIFcb_uEGLfFG5eMiOBA_10_5">32.15</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:71.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Expired</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresAndExpirationsInPeriod" scale="3" id="Tc_UQEYuLgDbkauFDwREAuI4w_11_2">266</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresAndExpirationsInPeriodWeightedAverageExercisePrice" scale="0" id="Tc_hQK4OvATh0e32MU4_jqIiw_11_5">32.95</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:71.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;">Balance -  December&#160;31, 2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber" scale="3" id="Tc_RWQLRD1bGEaw6ycU5CWbbQ_12_2">177</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice" scale="0" id="Tc_5wrq2yTsIUGOLUttyMSqhw_12_5">30.94</ix:nonFraction></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The following table summarizes stock option information at December 31, 2022:</p><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="us-gaap:ScheduleOfShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeTextBlock" id="Tb_DeIZLVyqvU6eYgvArLJTSQ" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:25.48%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:14.13%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:12.79%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:16.7%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:13.4%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:25.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="9" style="vertical-align:bottom;white-space:nowrap;width:71.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Options&#160;Outstanding and Exercisable</b></p></td></tr><tr><td style="vertical-align:bottom;width:25.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:16.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Weighted</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:25.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Aggregate</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:16.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Average</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Weighted</b></p></td></tr><tr><td style="vertical-align:bottom;width:25.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Intrinsic</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:16.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Remaining</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Average</b></p></td></tr><tr><td style="vertical-align:bottom;width:25.48%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;margin:0pt;"><b style="font-weight:bold;">Range&#160;of&#160;Exercise&#160;Prices</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Shares</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.87%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Value</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:16.7%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Contractual&#160;Life</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.48%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Exercise&#160;Price</b></p></td></tr><tr><td style="vertical-align:bottom;width:25.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:16.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;years)</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:25.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$<ix:nonFraction unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis_veco_RangeOfExercisePricesRangeOneMember_tsyWffx4okuNJ8gZKbNjkA" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLowerRangeLimit" scale="0" id="Narr_c1qpVftSBUWfavh6OTwaCA">20.00</ix:nonFraction> - $<ix:nonFraction unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis_veco_RangeOfExercisePricesRangeOneMember_tsyWffx4okuNJ8gZKbNjkA" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeUpperRangeLimit" scale="0" id="Narr_Hj7YW0zt_EK3XUnAkhOaqg">30.00</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="As_Of_12_31_2022_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis_veco_RangeOfExercisePricesRangeOneMember_Z8mabksjVk62od0X5bnV1A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfOutstandingOptions" scale="3" id="Tc_AtX8flrvvEaI5cNovCPZxQ_7_2"><ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="As_Of_12_31_2022_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis_veco_RangeOfExercisePricesRangeOneMember_Z8mabksjVk62od0X5bnV1A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfExercisableOptions" scale="3" id="Tc_AtX8flrvvEaI5cNovCPZxQ_7_2_2">10</ix:nonFraction></ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.79%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:16.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis_veco_RangeOfExercisePricesRangeOneMember_tsyWffx4okuNJ8gZKbNjkA" format="ixt-sec:duryear" name="us-gaap:SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageRemainingContractualTerm2" id="Tc_qmKx1jg-BUmupPMVFCwQtQ_7_7"><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis_veco_RangeOfExercisePricesRangeOneMember_tsyWffx4okuNJ8gZKbNjkA" format="ixt-sec:duryear" name="us-gaap:SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageRemainingContractualTerm2" id="Tc_qmKx1jg-BUmupPMVFCwQtQ_7_7_2"><span style="font-size:8pt;"> 0.8</span></ix:nonNumeric></ix:nonNumeric></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg" contextRef="As_Of_12_31_2022_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis_veco_RangeOfExercisePricesRangeOneMember_Z8mabksjVk62od0X5bnV1A" decimals="2" format="ixt:numdotdecimal" name="us-gaap:SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageExercisePriceBeginningBalance1" scale="0" id="Tc_PEpkPstNVECLIOjFfXyS-w_7_10"><ix:nonFraction unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg" contextRef="As_Of_12_31_2022_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis_veco_RangeOfExercisePricesRangeOneMember_Z8mabksjVk62od0X5bnV1A" decimals="2" format="ixt:numdotdecimal" name="us-gaap:SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageExercisePrice1" scale="0" id="Tc_PEpkPstNVECLIOjFfXyS-w_7_10_2">29.21</ix:nonFraction></ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:25.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$<ix:nonFraction unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis_veco_RangeOfExercisePricesRangeTwoMember_kUyaaMwSLUahJa3avR2z4g" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLowerRangeLimit" scale="0" id="Narr_hBvvbHwXiUSZbbR5JK0O9Q">30.01</ix:nonFraction> - $<ix:nonFraction unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis_veco_RangeOfExercisePricesRangeTwoMember_kUyaaMwSLUahJa3avR2z4g" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeUpperRangeLimit" scale="0" id="Narr_cxufJWYHvkSS3pe2xfl1sQ">40.00</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="As_Of_12_31_2022_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis_veco_RangeOfExercisePricesRangeTwoMember_tOsQF6qFH0-wtgbEWVpMWA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfOutstandingOptions" scale="3" id="Tc_H8GhTfE03EmlHcRfNhAvsg_8_2"><ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="As_Of_12_31_2022_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis_veco_RangeOfExercisePricesRangeTwoMember_tOsQF6qFH0-wtgbEWVpMWA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfExercisableOptions" scale="3" id="Tc_H8GhTfE03EmlHcRfNhAvsg_8_2_2">167</ix:nonFraction></ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.79%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:16.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis_veco_RangeOfExercisePricesRangeTwoMember_kUyaaMwSLUahJa3avR2z4g" format="ixt-sec:duryear" name="us-gaap:SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageRemainingContractualTerm2" id="Tc_PTMNvD1c6U6zGh9gn5OLsA_8_7"><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis_veco_RangeOfExercisePricesRangeTwoMember_kUyaaMwSLUahJa3avR2z4g" format="ixt-sec:duryear" name="us-gaap:SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageRemainingContractualTerm2" id="Tc_PTMNvD1c6U6zGh9gn5OLsA_8_7_2"><span style="font-size:8pt;"> 0.8</span></ix:nonNumeric></ix:nonNumeric></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg" contextRef="As_Of_12_31_2022_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis_veco_RangeOfExercisePricesRangeTwoMember_tOsQF6qFH0-wtgbEWVpMWA" decimals="2" format="ixt:numdotdecimal" name="us-gaap:SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageExercisePriceBeginningBalance1" scale="0" id="Tc_hfkE8Ufeyk-fQ3gIHMPiBg_8_10"><ix:nonFraction unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg" contextRef="As_Of_12_31_2022_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis_veco_RangeOfExercisePricesRangeTwoMember_tOsQF6qFH0-wtgbEWVpMWA" decimals="2" format="ixt:numdotdecimal" name="us-gaap:SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageExercisePrice1" scale="0" id="Tc_hfkE8Ufeyk-fQ3gIHMPiBg_8_10_2">31.02</ix:nonFraction></ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:25.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.13%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfOutstandingOptions" scale="3" id="Tc_GrAflLj9JkyEuMer7mYj6Q_9_2"><ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfExercisableOptions" scale="3" id="Tc_GrAflLj9JkyEuMer7mYj6Q_9_2_2">177</ix:nonFraction></ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.79%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:16.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" format="ixt-sec:duryear" name="us-gaap:SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageRemainingContractualTerm2" id="Tc_700Vwn7Wgk6nZfOyyS7yNw_9_7"><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" format="ixt-sec:duryear" name="us-gaap:SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageRemainingContractualTerm2" id="Tc_700Vwn7Wgk6nZfOyyS7yNw_9_7_2"><span style="font-size:8pt;"> 0.8</span></ix:nonNumeric></ix:nonNumeric></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="2" format="ixt:numdotdecimal" name="us-gaap:SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageExercisePriceBeginningBalance1" scale="0" id="Tc_Ai-VnI4QAkqt2JP10uIN5Q_9_10"><ix:nonFraction unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="2" format="ixt:numdotdecimal" name="us-gaap:SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageExercisePrice1" scale="0" id="Tc_Ai-VnI4QAkqt2JP10uIN5Q_9_10_2">30.94</ix:nonFraction></ix:nonFraction></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="background:#ffffff;">There were&#160;</span><span style="background:#ffffff;"><ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt-sec:numwordsen" name="us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsNonvestedNumberOfShares" scale="3" id="Narr_36gs7znkkk2z2aqV50ILZg">no</ix:nonFraction></span><span style="background:#ffffff;">&#160;unvested options outstanding as of December 31, 2022.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;background:#ffffff;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The following table summarizes information on options exercised for the periods indicated:</p><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="veco:ScheduleOfStockOptionExercisedTableTextBlock" id="Tb_3ijJCXpDTk2cKAWBUZ5BdA" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:69.29%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:69.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:28.64%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:69.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="10" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:69.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:28.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:69.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Cash received from options exercised</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProceedsFromStockOptionsExercised" scale="3" id="Tc_wZhmMUEZik6Vm-Xrq_fV4Q_4_6">37</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;width:69.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Intrinsic value of options exercised</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue" scale="3" id="Tc_p-5NO_cdkkOgi8RAkybLBg_5_6">6</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">RSAs, RSUs, PSAs, PSUs</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">RSAs are stock awards issued to employees and directors that are subject to specified restrictions and a risk of forfeiture. RSUs are stock awards issued to employees that entitle the holder to receive shares of common stock as the awards vest. PSAs and PSUs are awards that result in an issuance of shares of common stock to employees if certain performance or market conditions are achieved. All of these awards typically vest over </span><span style="-sec-ix-hidden:Hidden_mYtq0YB12kmZB5r9hVizow;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">one</span></span><span style="font-size:10pt;"> to </span><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_srt_RangeAxis_srt_MaximumMember_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_03Onf4LpQEe7Cc3IYJdxLg" format="ixt-sec:durwordsen" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1" id="Narr_2yPYAFTgw0G08IhWmyXmMQ"><span style="font-size:10pt;">four years</span></ix:nonNumeric><span style="font-size:10pt;"> and vesting is subject to the employee&#39;s continued service with the Company and, in the case of performance awards, meeting certain performance or market conditions. The fair value of the awards is determined and fixed based on the closing price of the Company&#8217;s common stock on the trading day prior to the date of grant, or, in the case of performance awards with market conditions, fair value is determined using a Monte Carlo simulation. </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></ix:continuation></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-32</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Veeco Instruments&#160;Inc. and Subsidiaries</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Notes to Consolidated Financial Statements (Continued)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;max-width:100%;position:relative;min-height:10.35pt;"><a id="_Hlk356917"></a><a id="Tc__3fFuqK2Q0S3hvnP0wDg5w_1_4"></a><a id="Tc_goS0FpVYx0iNslz4PKUx5g_2_4"></a><a id="Tc_KthwVy35AkWpWppgaRqxpQ_3_2"></a><a id="Tc_qOA4brBK80uNC_KdDUxodQ_3_4"></a><a id="Tc_hQ1CdBXKH0i44I04fPLR5g_4_2"></a><a id="Tc_aLx5wSm2pUC7lYiQulowog_4_4"></a><a id="Tc_R2bhShf2BEq8zy1SuVisxA_5_2"></a><a id="Tc_Jae69zSSzkuZyHG7o-4W_w_6_0"></a><a id="Tc_Y42EdKzbXkiU_MXLX8IdtA_6_4"></a><a id="Tc_PWBnt39AUkWEZCkkFH8uWQ_7_0"></a><a id="Tc_pDbf4m8MAEKOI8_8qmQX7w_8_0"></a><a id="Tc_zayCXl4nJ0qg5a6ZLxY5Gw_9_0"></a><a id="Tc_hWTVEB_aVkeNXB-jpdgnjQ_10_0"></a><a id="Tc_jHJljM3Jp0i6wmEt5LM69A_11_0"></a><a id="Tc_NtTU0jWGBkacqkSNxfGv7w_12_0"></a><a id="Tc_YCtzUMrtC06tvY-2aFEjwg_13_0"></a><a id="Tc_zOiZBmM3SEqF4oIqmZAhRA_14_0"></a><a id="Tc_U-4KUZRThUCLW1HcK1YZ4g_15_0"></a><a id="Tc_PyRBctX_D0uXHPDzwyQQ_g_16_0"></a><a id="Tc_jrUvVn0IbUSSLW8bgq7ayA_17_0"></a><a id="Tc_W-iK6VWCFUiTUit9F-xocA_18_0"></a><a id="Tc_TezFY1IalU2Fh-GJOvyAag_19_0"></a><a id="Tc_8FrTaIQbW0mPkPIXjPhZrQ_20_0"></a><a id="Tc_dXm5rlSGU027HFgBDVYkSw_21_0"></a><a id="_fcb603da_f288_4ee0_b34d_33a0693fae28"></a><a id="Tc_mrPU2cyctkG74hsxg3BrWA_1_2"></a><a id="Tc_DNkp7k444k6fNPq9EGBjxw_2_2"></a><a id="Tc_Hymxvwc070i4H8l5R3wi2w_2_5"></a><a id="Tc_G9nB_d78Lkyu7TqQKfgBkg_2_8"></a><a id="Tc_w2P4lkWgGkqMomSyH7nOJg_3_0"></a><a id="Tc_A1wjdL-rtEy15HV6lwxIRQ_3_2"></a><a id="Tc_HAZKZv0tiUKmUA7n60DtkA_3_5"></a><a id="Tc_zNY93dr0akmjisCZ2f4eCw_3_8"></a><a id="Tc_tjULUdaI0EO9Q20YRNBwrg_4_0"></a><a id="Tc__YEATRW2fkSEaES-Jx0MMw_4_4"></a><a id="Tc_pootW-P9ykKSfo_E8vwjJw_4_7"></a><a id="Tc_8mtwdthClU6SddI-mvRDyw_4_10"></a><a id="Tc_VwNhrcv0R0OrdPzXMZTE_w_5_0"></a><a id="Tc_rZjoD_qPOUO5yW2jV7plxQ_5_4"></a><a id="Tc_-oPNSVU3xUG1uO3QsjmPow_5_7"></a><a id="Tc_kfMT4j5y_0CqESAhAf7-1Q_5_10"></a><a id="Tc_8kQBAF8bmE2bRAFiMS7qAw_6_0"></a><a id="Tc_1Y5tzVn4XUCkZJYZEb08eQ_6_4"></a><a id="Tc_3legiwgEw0qI5aRIgVb49g_6_7"></a><a id="Tc_8mI4UbEj7k2UJo7Um8e5Qg_6_10"></a><a id="Tc_K6zHTeK62EifxRJy74eRyw_7_0"></a><ix:continuation id="Tb_19aSJXmUvUyNwHXvJ3tAIw_cont3" continuedAt="Tb_19aSJXmUvUyNwHXvJ3tAIw_cont4"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The following table summarizes the equity activity of non-vested restricted shares and performance shares:</p><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="us-gaap:ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock" id="Tb_jBue5NjnrkmObKOT5PhK3w" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:73.98%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.74%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:73.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Weighted</b></p></td></tr><tr><td style="vertical-align:bottom;width:73.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Average</b></p></td></tr><tr><td style="vertical-align:bottom;width:73.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Number&#160;of</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Grant&#160;Date</b></p></td></tr><tr><td style="vertical-align:bottom;width:73.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Shares</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.04%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Fair&#160;Value</b></p></td></tr><tr><td style="vertical-align:bottom;width:73.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;">Balance -  December&#160;31, 2019</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="As_Of_12_31_2019_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_BAc3dgLAJEiIVBNN2-jYYA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber" scale="3" id="Tc_IevISva5x02QSfH_tpHLSA_6_2">2,257</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg" contextRef="As_Of_12_31_2019_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_BAc3dgLAJEiIVBNN2-jYYA" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue" scale="0" id="Tc_HJ587JRYhUqo8WGEHiSShw_6_5">16.20</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:73.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Granted</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_5_DVb1GcQUG45VQebdvm7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod" scale="3" id="Tc_mt-Nb34SN0WneqJFWJepWg_7_2">1,054</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_5_DVb1GcQUG45VQebdvm7w" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue" scale="0" id="Tc_JARou2UsRka5f5LicIsb0g_7_5">9.53</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:73.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Performance award adjustments</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_5_DVb1GcQUG45VQebdvm7w" decimals="-3" format="ixt:numdotdecimal" name="veco:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsPerformanceAwardAdjustmentsInPeriod" scale="3" id="Tc_QPOqBAjNFEqeLYEw97EFWQ_8_2">51</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_5_DVb1GcQUG45VQebdvm7w" decimals="2" format="ixt:numdotdecimal" name="veco:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsPerformanceAwardAdjustmentsWeightedAverageGrantDateFairValue" scale="0" id="Tc_3x5CUQYT10u0fv-14djhUA_8_5">30.94</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:73.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Vested</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_5_DVb1GcQUG45VQebdvm7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod" scale="3" id="Tc_FRleTejVmUudHwonX5hkFg_9_2">798</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_5_DVb1GcQUG45VQebdvm7w" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue" scale="0" id="Tc_ALkMgYInsUmVpRbqKza5oQ_9_5">16.01</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:73.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Forfeited</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_5_DVb1GcQUG45VQebdvm7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeitedInPeriod" scale="3" id="Tc_7SI-bSagZEuCP2oKV4ZSEg_10_2">422</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_5_DVb1GcQUG45VQebdvm7w" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue" scale="0" id="Tc_SL5WQQCYAE2vqsO7I1BCaQ_10_5">14.87</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:73.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;">Balance -  December&#160;31, 2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="As_Of_12_31_2020_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_043gFp_PqUWzlpLJIf2xsg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber" scale="3" id="Tc_LnxQbmYDaEa5oKH3OzPMCw_11_2">2,040</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg" contextRef="As_Of_12_31_2020_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_043gFp_PqUWzlpLJIf2xsg" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue" scale="0" id="Tc_ZmqY9Jzbc0yJ3bBP5lGN5A_11_5">12.73</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:73.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Granted</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_eoq0ExuN80uwK4EJucyneQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod" scale="3" id="Tc_9pshHAYI0EeE2Eg4ob8_dw_12_2">1,031</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_eoq0ExuN80uwK4EJucyneQ" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue" scale="0" id="Tc_CV6Fyhy1LkGOsE8EEl9hAQ_12_5">24.26</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:73.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Performance award adjustments</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_eoq0ExuN80uwK4EJucyneQ" decimals="-3" format="ixt:numdotdecimal" name="veco:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsPerformanceAwardAdjustmentsInPeriod" sign="-" scale="3" id="Tc_XHuwzwh_U0Wvv9eOSFzleQ_13_2">159</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_eoq0ExuN80uwK4EJucyneQ" decimals="2" format="ixt:numdotdecimal" name="veco:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsPerformanceAwardAdjustmentsWeightedAverageGrantDateFairValue" scale="0" id="Tc_brwo-WEvJ0aQrObf-WaQ1A_13_5">18.38</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:73.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Vested</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_eoq0ExuN80uwK4EJucyneQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod" scale="3" id="Tc_XxJceQl8qEWfuqmLiG5ydA_14_2">1,014</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_eoq0ExuN80uwK4EJucyneQ" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue" scale="0" id="Tc_nOlH1OD__ki6F6qggoMj7A_14_5">15.50</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:73.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Forfeited</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_eoq0ExuN80uwK4EJucyneQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeitedInPeriod" scale="3" id="Tc_3YYkkUS8Mk69FUZRf0MNYw_15_2">133</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_eoq0ExuN80uwK4EJucyneQ" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue" scale="0" id="Tc_fOlstYohM0CfhziF3Ik7Wg_15_5">15.08</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:73.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;">Balance -  December&#160;31, 2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="As_Of_12_31_2021_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_90kQ0UAU_kCEBzwtbQLOCw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber" scale="3" id="Tc_IE6uAQt0OUWLwrOUU6ejvw_16_2">2,083</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg" contextRef="As_Of_12_31_2021_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_90kQ0UAU_kCEBzwtbQLOCw" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue" scale="0" id="Tc_P1G9vyFkK0Ki4Gf-0e6zqg_16_5">17.33</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:73.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Granted</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_4KQ7EGE5pECpx0QANzsn2w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod" scale="3" id="Tc_nY7OYWZTjkKmQ_boDZsfbA_17_2">1,253</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_4KQ7EGE5pECpx0QANzsn2w" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue" scale="0" id="Tc_hXXGYbTxbEujG01lcgdblA_17_5">29.12</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:73.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Performance award adjustments</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_4KQ7EGE5pECpx0QANzsn2w" decimals="-3" format="ixt:numdotdecimal" name="veco:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsPerformanceAwardAdjustmentsInPeriod" sign="-" scale="3" id="Tc_WweU4-mcz0eFqw5m7eUUTQ_18_2">85</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_4KQ7EGE5pECpx0QANzsn2w" decimals="2" format="ixt:numdotdecimal" name="veco:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsPerformanceAwardAdjustmentsWeightedAverageGrantDateFairValue" scale="0" id="Tc_ssimc5aD2kGgBFw9RiCWYw_18_5">14.03</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:73.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Vested</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_4KQ7EGE5pECpx0QANzsn2w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod" scale="3" id="Tc_-YafJUOMLkCH5TmvLgbGgg_19_2">844</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_4KQ7EGE5pECpx0QANzsn2w" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue" scale="0" id="Tc_NBk836igrkiw5Ey22r6Yzg_19_5">15.00</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:73.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Forfeited</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_4KQ7EGE5pECpx0QANzsn2w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeitedInPeriod" scale="3" id="Tc_eAXrgQUD3ke2sO1XWXgHvA_20_2">81</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_4KQ7EGE5pECpx0QANzsn2w" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue" scale="0" id="Tc_koSbigQfjUOauxwlEdxWmA_20_5">20.18</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:73.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;">Balance -  December&#160;31, 2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="As_Of_12_31_2022_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_ZGrU6273SEWauTYHKq94ow" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber" scale="3" id="Tc_MHqL65NW6U-8KG9WeZ16vQ_21_2">2,496</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg" contextRef="As_Of_12_31_2022_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_ZGrU6273SEWauTYHKq94ow" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue" scale="0" id="Tc_G2rmdRVCe0GTPfaNsdfOQQ_21_5">23.83</ix:nonFraction></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The total fair value of shares that vested during the years ended December 31, 2022, 2021, and 2020 was $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_4KQ7EGE5pECpx0QANzsn2w" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodTotalFairValue" scale="6" id="Narr_JGp7Tzn85ES4PCxcu4icMQ">22.1</ix:nonFraction> million, $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_eoq0ExuN80uwK4EJucyneQ" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodTotalFairValue" scale="6" id="Narr_vJdPs8qmXUCrtVgtPnD2ng">22.8</ix:nonFraction> million, and $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_5_DVb1GcQUG45VQebdvm7w" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodTotalFairValue" scale="6" id="Narr_N_Qp_6baxESKbDfiAlK3yQ">9.0</ix:nonFraction> million, respectively. For performance awards, the final number of shares earned will vary depending on the achievement of the actual results relative to the performance or market conditions. Each performance award is included in the table above at the grant date target share amount until the end of the performance period if not previously forfeited. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The fair value of performance awards with market conditions is estimated on the date of grant using a Monte Carlo simulation. Estimates of fair value are not intended to predict actual future events or the value ultimately realized by employees who receive these awards. The weighted average fair value and the assumptions used in calculating such values during fiscal years 2022, 2021, and 2020 for performance awards with market conditions were based on estimates at the date of grant as follows:</p><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="veco:ScheduleOfShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsValuationAssumptionsTableTextBlock" id="Tb_KqiKRAk2v0e42rZycq1jpw" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:67.07%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.71%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:6.33%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:6.33%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:6.48%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:67.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:28.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended December&#160;31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:7.36%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;width:7.37%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;width:8.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Weighted average fair value</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;width:6.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_AwardTypeAxis_veco_PerformanceShareUnitsMarketConditionsMember_2WTDqDHGgEGxwUPxh_rK1w" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue" scale="0" id="Tc_6kA0xayFUk-xO9VUtZlJXQ_3_3">45.28</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;width:6.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_AwardTypeAxis_veco_PerformanceShareUnitsMarketConditionsMember_31uAlkHF1UGSOQxqujb7zQ" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue" scale="0" id="Tc_GRLyORMGmUyMWmHk77AsSQ_3_6">27.81</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;width:6.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_AwardTypeAxis_veco_PerformanceShareUnitsMarketConditionsMember_VTNsOTcWBEmsOsvPaWiQTg" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue" scale="0" id="Tc_Z_0Ss-3EC0eN_5Wz7PFapQ_3_9">10.59</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Dividend yield</p></td><td style="vertical-align:bottom;width:1.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_AwardTypeAxis_veco_PerformanceShareUnitsMarketConditionsMember_2WTDqDHGgEGxwUPxh_rK1w" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate" scale="-2" id="Tc__iD_tn5IMUWvU5c6kNL0lQ_4_3">0</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_AwardTypeAxis_veco_PerformanceShareUnitsMarketConditionsMember_31uAlkHF1UGSOQxqujb7zQ" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate" scale="-2" id="Tc_TJJrQbXp60WB2w9298v2Kw_4_6">0</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_AwardTypeAxis_veco_PerformanceShareUnitsMarketConditionsMember_VTNsOTcWBEmsOsvPaWiQTg" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate" scale="-2" id="Tc_v05Nq0KRz0upQZy2WnD0LA_4_9">0</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td></tr><tr><td style="vertical-align:bottom;width:67.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Expected volatility factor<sup style="font-family:'Calibri','Helvetica','sans-serif';font-size:8.25pt;line-height:100%;top:0pt;vertical-align:top;">(1)</sup></p></td><td style="vertical-align:bottom;width:1.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_AwardTypeAxis_veco_PerformanceShareUnitsMarketConditionsMember_2WTDqDHGgEGxwUPxh_rK1w" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsWeightedAverageVolatilityRate" scale="-2" id="Tc_FcxQfO-FJ0qXjG6uKg-siA_5_3">58</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_AwardTypeAxis_veco_PerformanceShareUnitsMarketConditionsMember_31uAlkHF1UGSOQxqujb7zQ" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsWeightedAverageVolatilityRate" scale="-2" id="Tc_yYjzttpsxkirfwYhpFBVqg_5_6">63</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;width:1.72%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_AwardTypeAxis_veco_PerformanceShareUnitsMarketConditionsMember_VTNsOTcWBEmsOsvPaWiQTg" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsWeightedAverageVolatilityRate" scale="-2" id="Tc_XfRhm76sFkinpPkyI3sXUw_5_9">60</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td></tr><tr><td style="vertical-align:bottom;width:67.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Risk-free interest rate<sup style="font-family:'Calibri','Helvetica','sans-serif';font-size:8.25pt;line-height:100%;top:0pt;vertical-align:top;">(2)</sup></p></td><td style="vertical-align:bottom;width:1.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_AwardTypeAxis_veco_PerformanceShareUnitsMarketConditionsMember_2WTDqDHGgEGxwUPxh_rK1w" decimals="4" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate" scale="-2" id="Tc_IiXqD7OElkGiqRj0ILGVyQ_6_3">2.13</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_AwardTypeAxis_veco_PerformanceShareUnitsMarketConditionsMember_31uAlkHF1UGSOQxqujb7zQ" decimals="4" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate" scale="-2" id="Tc_3Ei5poBJWU6Z8sk-dJj84g_6_6">0.34</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_AwardTypeAxis_veco_PerformanceShareUnitsMarketConditionsMember_VTNsOTcWBEmsOsvPaWiQTg" decimals="4" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate" scale="-2" id="Tc_zuEdPxGcIEqlrJdpjj2oBg_6_9">0.54</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td></tr><tr><td style="vertical-align:bottom;width:67.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Expected life (in years)<sup style="font-family:'Calibri','Helvetica','sans-serif';font-size:8.25pt;line-height:100%;top:0pt;vertical-align:top;">(3)</sup></p></td><td style="vertical-align:bottom;width:1.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_AwardTypeAxis_veco_PerformanceShareUnitsMarketConditionsMember_2WTDqDHGgEGxwUPxh_rK1w" format="ixt-sec:duryear" name="us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1" id="Tc_rVr20_7MvECFleA32wbs1g_7_3"><span style="font-size:10pt;"> 3.0</span></ix:nonNumeric></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_AwardTypeAxis_veco_PerformanceShareUnitsMarketConditionsMember_31uAlkHF1UGSOQxqujb7zQ" format="ixt-sec:duryear" name="us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1" id="Tc_C03hMbVHo02n1XU2_o3D9Q_7_6"><span style="font-size:10pt;"> 3.0</span></ix:nonNumeric></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;width:1.72%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><ix:nonNumeric contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_AwardTypeAxis_veco_PerformanceShareUnitsMarketConditionsMember_VTNsOTcWBEmsOsvPaWiQTg" format="ixt-sec:duryear" name="us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1" id="Tc_uVuw5U10Ekq16y8pMMDB-A_7_9"><span style="font-size:10pt;"> 3.0</span></ix:nonNumeric></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr></table><div style="font-family:'Times New Roman','Times','serif';font-size:9.0pt;margin-bottom:0pt;margin-top:0pt;min-height:1.19em;position:relative;width:100%;"><div style="background-color:#000000;height:1pt;position:relative;top:0.6em;width:25.0%;border:none;margin:0 auto 0 0;"></div></div><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:9pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(1)</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:9pt;font-style:normal;font-weight:normal;">Expected volatility is measured using historical daily price changes of the Company&#8217;s stock over the respective expected term.</span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:9pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(2)</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:9pt;font-style:normal;font-weight:normal;">The risk-free rate for periods within the contractual term is based on the U.S. Treasury yield curve in effect at the time of grant.</span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:9pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(3)</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:9pt;font-style:normal;font-weight:normal;">The expected life is the number of years the Company estimates that the awards will be outstanding prior to exercise. </span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Employee Stock Purchase Plan</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">For the years ended December 31, 2022, 2021, and 2020 the Company received cash proceeds of $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_36M02lVMMkqklha7FYtN3w" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:ProceedsFromIssuanceOfSharesUnderIncentiveAndShareBasedCompensationPlans" scale="6" id="Narr_IW8ozUlf2kK8oQh_H2gIsw">3.7</ix:nonFraction> million, $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_RBotXgElPUCGCmWLRr8SCg" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:ProceedsFromIssuanceOfSharesUnderIncentiveAndShareBasedCompensationPlans" scale="6" id="Narr_34eRBUTd102lLPtsDws92A">3.4</ix:nonFraction> million, and $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_vYzL5bBxa0O1wNbTJcZO6Q" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:ProceedsFromIssuanceOfSharesUnderIncentiveAndShareBasedCompensationPlans" scale="6" id="Narr_wyYQHVXSPES9YYTuaX596Q">2.9</ix:nonFraction> million, and issued shares of <ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_36M02lVMMkqklha7FYtN3w" decimals="INF" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans" scale="0" id="Narr_mbVwjjU3XE2TgPelZhFdeQ">208,140</ix:nonFraction>, <ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_RBotXgElPUCGCmWLRr8SCg" decimals="INF" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans" scale="0" id="Narr_qGjiay1GE0CdP9ZAr8jlxg">196,024</ix:nonFraction>, and <ix:nonFraction unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_vYzL5bBxa0O1wNbTJcZO6Q" decimals="INF" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans" scale="0" id="Narr_WIgy7FIKIEKQM7hI9l1vtQ">254,703</ix:nonFraction>, respectively, under the ESPP Plan. The </p></ix:continuation></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-33</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Veeco Instruments&#160;Inc. and Subsidiaries</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Notes to Consolidated Financial Statements (Continued)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;max-width:100%;position:relative;min-height:10.35pt;"><a id="_687af5c6_dc66_411e_864e_74b20ee06796"></a><a id="Tc_QzxyRUsbIEO8p2a5f0Mj8Q_1_2"></a><a id="Tc_k1VUk1nlv0-OW715u6cWDQ_2_2"></a><a id="Tc_MlBccH1xO0KwOJBikzJlLQ_2_5"></a><a id="Tc_Xb5iXhsYKkiiLVye5fBXwA_2_8"></a><a id="Tc_JXM3HFnkqEe7REagFZzNjw_3_0"></a><a id="Tc_ycZzHeCN0k20bJamhq4foA_3_2"></a><a id="Tc_XVcsA9cvOke4oQvnisdy3A_3_5"></a><a id="Tc_2CNzQrTOw06872ou85Gzew_3_8"></a><a id="Tc_2Kziy83WP0WTDLMb5w4aQw_4_0"></a><a id="Tc_VdF1AUqIkEuUU2cx09-bdw_4_4"></a><a id="Tc_x5t5-KFFE0Sxq4iI633Mpw_4_7"></a><a id="Tc_Fa0GUFPU2Um1zI_Ub6O3Yg_4_10"></a><a id="Tc_M_AdyINP50im7-ialQZ-_A_5_0"></a><a id="Tc_F5M2r452j0GDLYj0q-fkeQ_5_4"></a><a id="Tc_nJTHxxa8zUGNLQLXDRX98g_5_7"></a><a id="Tc_7WLyywTJdUevQvjLhmLSSw_5_10"></a><a id="Tc_kQDuI-PNBUKr3IYM4Tb3xg_6_0"></a><a id="Tc_VaFGeldU1EeFSWoXonQ8pw_6_4"></a><a id="Tc_PXdi5psB70mqXnuuzniOqA_6_7"></a><a id="Tc_qZbDFXsUs0OccIa8nCJVfA_6_10"></a><a id="Tc_k763_qfO2E-IvjqZjx0-GQ_7_0"></a><ix:continuation id="Tb_19aSJXmUvUyNwHXvJ3tAIw_cont4"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">weighted average estimated values of employee purchase rights as well as the weighted average assumptions that were used in calculating such values during fiscal years 2022, 2021, and 2020 were based on estimates at the date of grant as follows:</p><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="us-gaap:ScheduleOfShareBasedPaymentAwardEmployeeStockPurchasePlanValuationAssumptionsTableTextBlock" id="Tb_Ccu8TiIyS0GfR84HNvN8IA" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;min-height:0.0pt;margin:0pt;"><span style="font-size:0pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:67.21%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.35%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div 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style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:6.15%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:6.15%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:67.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:29.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended December&#160;31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:67.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:7.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;width:7.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;width:7.53%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:67.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Weighted average fair value</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.35%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;width:6.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_36M02lVMMkqklha7FYtN3w" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue" scale="0" id="Tc_6IMkeXcEk0iZHFSB70FlgA_3_3">6.00</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;width:6.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_RBotXgElPUCGCmWLRr8SCg" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue" scale="0" id="Tc_tmo-b77ZoEey18GvGIn5Yw_3_6">5.90</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;width:6.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_vYzL5bBxa0O1wNbTJcZO6Q" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue" scale="0" id="Tc_dhb0mI7djU2AuGz97YQ2OA_3_9">4.81</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Dividend yield</p></td><td style="vertical-align:bottom;width:1.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_36M02lVMMkqklha7FYtN3w" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate" scale="-2" id="Tc_USMjr-IAN0-8rjthBZYI5Q_4_3">0</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_RBotXgElPUCGCmWLRr8SCg" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate" scale="-2" id="Tc_1I-V4Zi8xE6GXhvxVYRhBg_4_6">0</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_vYzL5bBxa0O1wNbTJcZO6Q" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate" scale="-2" id="Tc_NYYmnHerkUaXMvfPEL0IxA_4_9">0</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%</p></td></tr><tr><td style="vertical-align:bottom;width:67.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Expected volatility factor<sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;">(1)</sup></p></td><td style="vertical-align:bottom;width:1.35%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_36M02lVMMkqklha7FYtN3w" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsWeightedAverageVolatilityRate" scale="-2" id="Tc_4XRbGcB6TUGhdnkq5SWM1w_5_3">43</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_RBotXgElPUCGCmWLRr8SCg" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsWeightedAverageVolatilityRate" scale="-2" id="Tc_Rr8x1IKBZ0S19MgjEJz10A_5_6">52</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;width:1.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_vYzL5bBxa0O1wNbTJcZO6Q" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsWeightedAverageVolatilityRate" scale="-2" id="Tc_kSxADYfsPkKPoCK9S5THmg_5_9">70</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%</p></td></tr><tr><td style="vertical-align:bottom;width:67.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Risk-free interest rate<sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;">(2)</sup></p></td><td style="vertical-align:bottom;width:1.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_36M02lVMMkqklha7FYtN3w" decimals="4" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate" scale="-2" id="Tc_yIZCFpRRBUi-tkwGmcAmug_6_3">1.73</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_RBotXgElPUCGCmWLRr8SCg" decimals="4" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate" scale="-2" id="Tc_3VQqMNTX10aK-JBXrKjxrg_6_6">0.07</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_vYzL5bBxa0O1wNbTJcZO6Q" decimals="4" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate" scale="-2" id="Tc_0tdlQs2rJk2l4Xff4mGeLw_6_9">0.95</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%</p></td></tr><tr><td style="vertical-align:bottom;width:67.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Expected life (in years)<sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;">(3)</sup></p></td><td style="vertical-align:bottom;width:1.35%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_36M02lVMMkqklha7FYtN3w" format="ixt-sec:duryear" name="us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1" id="Tc_vcN4hAhF6EuL1UK3dv2HNQ_7_3"><span style="font-size:10pt;"> 0.5</span></ix:nonNumeric></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><ix:nonNumeric contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_RBotXgElPUCGCmWLRr8SCg" format="ixt-sec:duryear" name="us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1" id="Tc_NOTJ5EhXZEeu3PdoPop6Ew_7_6"><span style="font-size:10pt;"> 0.5</span></ix:nonNumeric></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;width:1.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><ix:nonNumeric contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_vYzL5bBxa0O1wNbTJcZO6Q" format="ixt-sec:duryear" name="us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1" id="Tc_fXq11P57wUilO-pIrwHyDA_7_9"><span style="font-size:10pt;"> 0.5</span></ix:nonNumeric></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr></table><div style="font-family:'Times New Roman','Times','serif';font-size:9.0pt;margin-bottom:0pt;margin-top:0pt;min-height:1.19em;position:relative;width:100%;"><div style="background-color:#000000;height:1pt;position:relative;top:0.6em;width:25.0%;border:none;margin:0 auto 0 0;"></div></div><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:9pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(1)</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:9pt;font-style:normal;font-weight:normal;">Expected volatility is measured using historical daily price changes of the Company&#8217;s stock over the respective expected term.</span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:9pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(2)</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:9pt;font-style:normal;font-weight:normal;">The risk-free rate for periods within the contractual term is based on the U.S. Treasury yield curve in effect at the time of grant.</span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:9pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(3)</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:9pt;font-style:normal;font-weight:normal;">The expected life is the number of years the Company estimates that the purchase rights will be outstanding prior to exercise. </span></td></tr></table></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 18pt;"><span style="font-size:3pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></ix:continuation><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="us-gaap:PensionAndOtherPostretirementBenefitsDisclosureTextBlock" id="Tb_W3Kg-gEwe0-p0D9EDUQ0Xg" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 13 &#8212; Retirement Plans</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">The Company maintains a defined contribution plan for the benefit of its U.S. employees. The plan is intended to be tax qualified and contains a qualified cash or deferred arrangement as described under Section 401(k) of the Internal Revenue Code. Eligible participants may elect to contribute a percentage of their base compensation, and the Company may make matching contributions, generally equal to </span><span style="font-size:10pt;"><ix:nonFraction unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="2" format="ixt-sec:numwordsen" name="us-gaap:DefinedContributionPlanEmployerMatchingContributionPercentOfMatch" scale="-2" id="Narr_gu4xyh9NTEq5zaSnBWQCeg">fifty</ix:nonFraction></span><span style="font-size:10pt;"> </span><span style="font-size:10pt;">cents for every dollar employees contribute, up to </span><span style="font-size:10pt;"><ix:nonFraction unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w" contextRef="Duration_1_1_2022_To_12_31_2022_srt_RangeAxis_srt_MaximumMember_-IcZsPRCskCthhwH_ZdlKw" decimals="2" format="ixt-sec:numwordsen" name="us-gaap:DefinedContributionPlanEmployerMatchingContributionPercent" scale="-2" id="Narr_xj14GNGQgE-196ojBFdYtw">three</ix:nonFraction></span><span style="font-size:10pt;"> percent of the employee&#8217;s eligible compensation, as limited by current Internal Revenue Code regulations. Generally, the plan calls for vesting in the Company contributions over the initial </span><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" format="ixt-sec:durwordsen" name="veco:DefinedContributionPlanEmployerMatchingContributionVestingPeriod" id="Narr_xnqL9i0yQkmJJXj0G_0fKQ"><span style="font-size:10pt;">five years</span></ix:nonNumeric><span style="font-size:10pt;"> of a participant&#8217;s employment. The Company provided employer contributions associated with this plan of approximately </span><span style="font-size:10pt;">$<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:DefinedContributionPlanCostRecognized" scale="6" id="Narr_xWhIOj9CKEulwvdJ7C87wQ">3.0</ix:nonFraction></span><span style="font-size:10pt;"> million, </span><span style="font-size:10pt;">$<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:DefinedContributionPlanCostRecognized" scale="6" id="Narr_3O5c609FzUSmrcbS-3dE8w">2.6</ix:nonFraction></span><span style="font-size:10pt;"> million, and </span><span style="font-size:10pt;">$<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:DefinedContributionPlanCostRecognized" scale="6" id="Narr_Jnn9I0bfhEuEEPuKXVm-3g">2.4</ix:nonFraction></span><span style="font-size:10pt;">&#160;million for the years ended December 31, 2022, 2021, and 2020, respectively.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></ix:nonNumeric><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="us-gaap:DisposalGroupsIncludingDiscontinuedOperationsDisclosureTextBlock" id="Tb_VaE5HeCzYUeXmyz_3MI20g" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 14 &#8212; Dispositions</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">In 2019, the Company determined that one of its non-core product lines (the &#8220;disposal group&#8221;) met the held for sale criteria. During 2020, the Company completed the sale of this product line for approximately </span><span style="font-size:10pt;">$<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2020_us-gaap_DisposalGroupClassificationAxis_us-gaap_DisposalGroupDisposedOfBySaleNotDiscontinuedOperationsMember_us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsAxis_veco_OneNonCoreProductLineMember_ImUrGQxTIkCP31DP-sVs-Q" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:DisposalGroupIncludingDiscontinuedOperationConsideration" scale="6" id="Narr_JevurXcHUEC-4F4fNd6gxQ">11.4</ix:nonFraction></span><span style="font-size:10pt;"> million, with approximately </span><span style="font-size:10pt;"><ix:nonFraction unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_DisposalGroupClassificationAxis_us-gaap_DisposalGroupDisposedOfBySaleNotDiscontinuedOperationsMember_us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsAxis_veco_OneNonCoreProductLineMember_juSBtzD8xUGaHzoP0bEdzA" decimals="2" format="ixt:numdotdecimal" name="veco:PercentageOfTransactionPrice" scale="-2" id="Narr_N3dp7GJcY06cAO779wtKGA">85</ix:nonFraction>%</span><span style="font-size:10pt;"> of the transaction price received upon closing, and </span><span style="font-size:10pt;"><ix:nonFraction unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_DisposalGroupClassificationAxis_us-gaap_DisposalGroupDisposedOfBySaleNotDiscontinuedOperationsMember_us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsAxis_veco_OneNonCoreProductLineMember_juSBtzD8xUGaHzoP0bEdzA" decimals="2" format="ixt:numdotdecimal" name="veco:PercentageOfAmountHeldInEscrow" scale="-2" id="Narr_Oc03hmfdck-tbmFO076XpQ">15</ix:nonFraction>%</span><span style="font-size:10pt;"> held in escrow for a period of </span><ix:nonNumeric contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_DisposalGroupClassificationAxis_us-gaap_DisposalGroupDisposedOfBySaleNotDiscontinuedOperationsMember_us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsAxis_veco_OneNonCoreProductLineMember_juSBtzD8xUGaHzoP0bEdzA" format="ixt-sec:durwordsen" name="veco:TermOfAmountToBeHeldInEscrow" id="Narr_hKCN0KSD3kep1v_9cEOgSw"><span style="font-size:10pt;">18 months</span></ix:nonNumeric><span style="font-size:10pt;"> and subsequently collected in 2021. Long-lived assets and definite-lived intangible assets were not depreciated or amortized while classified as held for sale. The sale of this disposal group did not represent a strategic shift that will have a material effect on the Company&#8217;s operations and financial results, nor is it considered a component of the Company, and as such it did not meet the criteria to be reported as discontinued operations. During 2020, the Company recorded additional impairment charges of </span><span style="font-size:10pt;">$<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_DisposalGroupClassificationAxis_us-gaap_DisposalGroupDisposedOfBySaleNotDiscontinuedOperationsMember_us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsAxis_veco_OneNonCoreProductLineMember_juSBtzD8xUGaHzoP0bEdzA" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:AssetImpairmentCharges" scale="6" id="Narr_dzFFmQ37qEeaiVc8t0nKMA">0.3</ix:nonFraction></span><span style="font-size:10pt;">&#160;million related to the finalization of the sale of this disposal group.&#160;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="Tc_DCvXZZbY3kyUHP9IJqE7iw_1_2"></a><a id="Tc_f4HNsgYpA0WfICEHzgxW1A_2_2"></a><a id="Tc__FI3I36bvkSrhRMJz4avGg_2_5"></a><a id="Tc_lRgpGyZX8U2O8_e-BXsFcw_2_8"></a><a id="Tc_EA4nKqPSuUCcB7SOcYEP3A_3_2"></a><a id="Tc_U4zt8QX0k0SQFaqU-52LSw_4_0"></a><a id="Tc_5OY6NkcajU6R_b9A2pRwYQ_4_2"></a><a id="Tc_jv9FgMoQhk2XaY7mpFNgUQ_4_5"></a><a id="Tc_kcnri5f7z0q0tk-OOtHF7Q_4_8"></a><a id="Tc_qujPb9xKEUG8uYPxc1fCSQ_5_0"></a><a id="Tc_BW73XV21UE-EE16OPil5rQ_6_0"></a><a id="Tc_QL0XhwBfw06Ru0oxb5dgXw_6_2"></a><a id="Tc_yM0pdoTYjE2OWVkQKi_I9A_6_5"></a><a id="Tc_w0RCYqhlEU-cumSn8sxhrg_6_8"></a><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="us-gaap:IncomeTaxDisclosureTextBlock" id="Tb_OdvTaPQWBke6Dlk5WtcDSw" continuedAt="Tb_OdvTaPQWBke6Dlk5WtcDSw_cont1" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 15 &#8212; Income Taxes </b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The amounts of income (loss) before income taxes attributable to domestic and foreign operations were as follows:</p><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="us-gaap:ScheduleOfIncomeBeforeIncomeTaxDomesticAndForeignTableTextBlock" id="Tb_kSxAlfY7yUyh_S-S_M5q2A" continuedAt="Tb_kSxAlfY7yUyh_S-S_M5q2A_cont1" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:63.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:34.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:63.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.78%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.78%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="10" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:63.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:34.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:63.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Domestic</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic" scale="3" id="Tc_OuVbLIEEA0mlJPk0A7B3jw_4_3">47,368</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic" scale="3" id="Tc_x30xl6qip0CI1VMrsOFzvQ_4_6">23,561</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic" sign="-" scale="3" id="Tc_X_qxEOeqq02G8bLqihGBwg_4_9">10,292</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:63.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Foreign</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign" scale="3" id="Tc_xXj2wv7o9kO3VRC3DLe5WQ_5_3">3,617</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign" scale="3" id="Tc_wpzD9fkUHU6IVBhd28m7dw_5_6">2,119</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign" scale="3" id="Tc_PwrmOkNVfECPXyA58x9t9g_5_9">1,828</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:63.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Total</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" scale="3" id="Tc_VBciEcIjeEyawA4y9OwMfw_6_3">50,985</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" scale="3" id="Tc_hCX0mX8SLUqNAPpKADBECQ_6_6">25,680</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.46%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" sign="-" scale="3" id="Tc__G2Bx1pDk027x8zesnhW3w_6_9">8,464</ix:nonFraction>)</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></ix:nonNumeric></ix:nonNumeric></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-34</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Veeco Instruments&#160;Inc. and Subsidiaries</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Notes to Consolidated Financial Statements (Continued)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="Tc_Z9eepNcuy0-R68CL1I54Ug_1_2"></a><a id="Tc_qjQg3vc1WEy1k-qhDG0q0w_2_2"></a><a id="Tc_QIYH2AjxkkyjWVAJFbuUQg_2_5"></a><a id="Tc_Tk1P03Ti2Eq2-timUUPlfQ_2_8"></a><a id="Tc_Nfd64ze21UGRIZvbZ5Kd3g_3_2"></a><a id="Tc_-QtsB3peJE2VeL8x1J-O4w_4_0"></a><a id="Tc_DpGZmlPhikaSh8WLDAMpwQ_5_0"></a><a id="Tc_98lfdzQ3XUqN9bMGsPD4fg_5_2"></a><a id="Tc_E6PhEuP9BU-VUgvJDlNabA_5_3"></a><a id="Tc_O6lTtZxR7ES6XZuvnOhRHQ_5_5"></a><a id="Tc_O7ZRA1EcCUi62kvgR6vksg_5_6"></a><a id="Tc_9i_h5g4QvEi6UDw8QnNx9w_5_8"></a><a id="Tc_DiGzLS6zB0q8glgPM_QbNQ_5_9"></a><a id="Tc_ousUt3QU1EOVQ_iMp0sjAw_6_0"></a><a id="Tc_mXGE7vfxY0CW4waxr8ewoQ_7_0"></a><a id="Tc_-SpxQXc73kGmvnLtcd7U6A_8_0"></a><a id="Tc_VlptdKzNUEWi1VO0xanIWQ_9_0"></a><a id="Tc_E3yC3flEM0-_U-IJi1C-nA_10_0"></a><a id="Tc_eVVX-Xi9bEq4sDw0uJ8kWw_11_0"></a><a id="Tc_Ab_679vHF0uzlcJ4lXPo7w_12_0"></a><a id="Tc_4zlGRWOVlUul_5CdcQluuA_13_0"></a><a id="Tc_vC-CUd4CiUqAmtcHzEsFSA_14_0"></a><a id="Tc_tyrPyGEm8EaPcLF0jkL6UQ_14_2"></a><a id="Tc_CPgHxlwndUelsCQ5sdvIIg_14_5"></a><a id="Tc_-uAa8lAPRE2_QI87wB7FMg_14_8"></a><a id="Tc_uZBIOUKd9ESLkfWO9Jc81A_1_2"></a><a id="Tc_3aByQflICU-tAX1_nk8KqQ_2_2"></a><a id="Tc_sgJIRDpXRkitlTCg5-lofg_2_5"></a><a id="Tc_psqR_CGGakm-j1SNAkcouA_2_8"></a><a id="Tc_PUfEh_8BUU2Z8vKzKX0wMg_3_2"></a><a id="Tc_jgDt49Sgj0iAIo_jx1ct7g_4_0"></a><a id="Tc_-Zz3D76EuU6YtAlA2Vaw8Q_4_2"></a><a id="Tc_PZfOGkxax0GA6DBjdIhK8w_4_5"></a><a id="Tc__jLBG23bGkCm_0ly8SC9yg_4_8"></a><a id="Tc_RaA8RBBdak63lJNrKjrqPQ_5_0"></a><a id="Tc_jxhLZVGYZkiq7oy1_227Lw_6_0"></a><a id="Tc_8yXoG-9lMUit_zYQomlVIQ_7_0"></a><a id="Tc_OS-xd5QqDUeR1IGdPSDxcg_8_0"></a><a id="Tc_dpzh-djhfUuDYU76l7H1uQ_9_0"></a><a id="Tc_OJCqX8NmVkut4sUMfndEHQ_10_0"></a><a id="Tc_aRwwJiChdkShYaarapjHwQ_11_0"></a><a id="Tc_s17qGMzZ2E-FqKnPSEl53g_11_3"></a><a id="Tc_7NuWBEgJm0Oqj7ZbY7RnZA_11_6"></a><a id="Tc_ZYBYmSOcGkK3U3RqOcasZg_12_0"></a><a id="Tc_5BbFiTvfyUGeN5Iqsdcz9Q_12_3"></a><a id="Tc_FpsS-IY_2kKkQXYTvGn5gg_13_0"></a><a id="Tc_tX-UAFYkjkOfiUAegehqBg_13_6"></a><a id="Tc_LSr3AMfTzUiqspktguNMQA_13_9"></a><a id="Tc_FK5ExF7dXkiK4a4kWok-iQ_14_0"></a><a id="Tc_09j5QWpCMEyWVBBnuJwLkQ_15_0"></a><a id="Tc_6U_ARrJbEU-NRaqh-UaUGQ_15_2"></a><a id="Tc_vxjKzZnGrk2AKmBo1ytH0g_15_5"></a><a id="Tc_3lfIsYq-ZEebGkYsEEZLSA_15_8"></a><ix:continuation id="Tb_OdvTaPQWBke6Dlk5WtcDSw_cont1" continuedAt="Tb_OdvTaPQWBke6Dlk5WtcDSw_cont2"><ix:continuation id="Tb_kSxAlfY7yUyh_S-S_M5q2A_cont1"></ix:continuation><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Significant components of the expense (benefit) for income taxes consisted of the following:</p><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="us-gaap:ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock" id="Tb_V0Wf08AwHkiiyxqNcoo4Xw" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:66.7%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.23%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.27%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:66.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:31.22%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:66.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.02%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.55%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="10" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:66.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:31.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:66.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Current:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:66.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Federal</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;width:66.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Foreign</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CurrentForeignTaxExpenseBenefit" scale="3" id="Tc_jB6uPuNRaUaFHZd-ZDcUoA_6_3">1,506</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CurrentForeignTaxExpenseBenefit" scale="3" id="Tc_y_yVPkrdT02Wk6fpjq82iQ_6_6">183</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CurrentForeignTaxExpenseBenefit" scale="3" id="Tc_fawm3vTSo0C18f6KztNUXw_6_9">22</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:66.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">State and local</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CurrentStateAndLocalTaxExpenseBenefit" scale="3" id="Tc_4m8NSUL3HkmcOZ4dLGeYWw_7_3">577</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CurrentStateAndLocalTaxExpenseBenefit" scale="3" id="Tc_9ctiZ_D7mUu2aoRVLmMlCQ_7_6">110</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.27%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CurrentStateAndLocalTaxExpenseBenefit" scale="3" id="Tc_JTiSUqJ-v0qqGsKa86MLpA_7_9">204</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:66.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;">Total current expense (benefit) for income taxes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CurrentIncomeTaxExpenseBenefit" scale="3" id="Tc_JSO0M63RDEaCuKueigonCQ_8_3">2,083</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CurrentIncomeTaxExpenseBenefit" scale="3" id="Tc_II_r1TQNSUSeFV5TSnMlJA_8_6">293</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.27%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CurrentIncomeTaxExpenseBenefit" scale="3" id="Tc_yuws42OofE274niE3GcN-A_8_9">226</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:66.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Deferred:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:66.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Federal</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredFederalIncomeTaxExpenseBenefit" sign="-" scale="3" id="Tc_1I_LXF4dV0eUHd4EwFSZBQ_10_3">96,811</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredFederalIncomeTaxExpenseBenefit" scale="3" id="Tc_YIvetz3dF0et9_j7RcDbXw_10_6">119</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredFederalIncomeTaxExpenseBenefit" scale="3" id="Tc_dx1UFrlbt0uVueIOEihRQA_10_9">136</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:66.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Foreign</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredForeignIncomeTaxExpenseBenefit" sign="-" scale="3" id="Tc_kR9Tj_as7EKpWNsOasSKHw_11_3">484</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredForeignIncomeTaxExpenseBenefit" sign="-" scale="3" id="Tc_d9264UWlzUu3f5s5MgeU9A_11_6">507</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredForeignIncomeTaxExpenseBenefit" sign="-" scale="3" id="Tc_vkSfwvJapkehUJNKPuKqnA_11_9">320</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:66.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">State and local</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredStateAndLocalIncomeTaxExpenseBenefit" sign="-" scale="3" id="Tc_oCY1ZuK7xkup9BUqP4g1Gg_12_3">20,745</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredStateAndLocalIncomeTaxExpenseBenefit" sign="-" scale="3" id="Tc_HMPBdaqvBEaLxyyGjoUvmA_12_6">263</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.27%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredStateAndLocalIncomeTaxExpenseBenefit" sign="-" scale="3" id="Tc_Afk1adjKckK1Fl6dwMEBaQ_12_9">115</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:66.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;">Total deferred expense (benefit) for income taxes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredIncomeTaxExpenseBenefit" sign="-" scale="3" id="Tc_Sqyj0MNMkkWvGj_hLcPoVw_13_3">118,040</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredIncomeTaxExpenseBenefit" sign="-" scale="3" id="Tc_khTgl5NaE06jWnlLaM-wDw_13_6">651</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.27%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredIncomeTaxExpenseBenefit" sign="-" scale="3" id="Tc_9W0rt3Wp-EyBraT85QgiJg_13_9">299</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:66.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Total expense (benefit) for income taxes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxExpenseBenefit" sign="-" scale="3" id="Tc_3FaGSgRoiEacAlgYMv2rIw_14_3">115,957</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxExpenseBenefit" sign="-" scale="3" id="Tc_NFZP7IPYIEKH4QugC1CQOw_14_6">358</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.27%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxExpenseBenefit" sign="-" scale="3" id="Tc_zwdw64vj5km12P3IMr_moA_14_9">73</ix:nonFraction>)</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The income tax expense (benefit) was reconciled to the tax expense computed at the U.S. federal statutory tax rate as follows:</p><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="us-gaap:ScheduleOfEffectiveIncomeTaxRateReconciliationTableTextBlock" id="Tb_BX2gbqE5c06VZFAn8xvpkA" continuedAt="Tb_BX2gbqE5c06VZFAn8xvpkA_cont1" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;min-height:0.0pt;margin:0pt;"><span style="font-size:0pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:middle;width:62.87%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:50%;transform:translate(0,-50%);width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.17%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:62.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:35.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:62.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.02%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="10" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:62.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:35.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:middle;width:62.87%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Income tax expense (benefit) at U.S. statutory rates</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate" scale="3" id="Tc_LdTxggY5j0iUBoRCFnn9cQ_4_3">10,706</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate" scale="3" id="Tc_YPwqgEPfXkSfZGc8uy0lUw_4_6">5,393</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate" sign="-" scale="3" id="Tc_q4ut5_MEkEaW6FnvSFGCsw_4_9">1,777</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:middle;width:62.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">State taxes, net of U.S. federal impact</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxReconciliationStateAndLocalIncomeTaxes" scale="3" id="Tc_0huHYzfXjkCBZ1odP0zbyg_5_3">1,101</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxReconciliationStateAndLocalIncomeTaxes" sign="-" scale="3" id="Tc_T4Ztoe0f8EylewHrSaVwKA_5_6">607</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxReconciliationStateAndLocalIncomeTaxes" sign="-" scale="3" id="Tc_WXmfPIDur0CJrHOaIQYBbw_5_9">121</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:middle;width:62.87%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Effect of international operations</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxReconciliationForeignIncomeTaxRateDifferential" sign="-" scale="3" id="Tc_hwzF_LiY20SCDKOxPpu6Yw_6_3">11,149</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxReconciliationForeignIncomeTaxRateDifferential" scale="3" id="Tc_zBi8JpOV80avJ13yL1jP0w_6_6">609</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxReconciliationForeignIncomeTaxRateDifferential" sign="-" scale="3" id="Tc_t8AkvYV_RUOk4BeXiG3Log_6_9">131</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:middle;width:62.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Research and development tax credit</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxReconciliationTaxCreditsResearch" scale="3" id="Tc_4UMdq-1k5Ei5AmfvIXpVvA_7_3">6,470</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxReconciliationTaxCreditsResearch" scale="3" id="Tc_gkEt_vfrf0ygWrVFoupYLg_7_6">3,964</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxReconciliationTaxCreditsResearch" sign="-" scale="3" id="Tc_BT50y-kuqUKhw5TJZ-SAbA_7_9">726</ix:nonFraction></p></td></tr><tr><td style="vertical-align:middle;width:62.87%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Net change in valuation allowance</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance" sign="-" scale="3" id="Tc_70PUWCmVlE6YYmFIbigwOg_8_3">104,972</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance" sign="-" scale="3" id="Tc_6H64PVHti0W3FK1ZovNGlw_8_6">2,389</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance" scale="3" id="Tc_s7QqyBchM0qk-B8hHz5sGw_8_9">388</ix:nonFraction></p></td></tr><tr><td style="vertical-align:middle;width:62.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Change in accrual for unrecognized tax benefits</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="veco:IncomeTaxReconciliationChangeInAccrualForUnrecognizedTaxBenefits" sign="-" scale="3" id="Tc_zFwHjvTdmUKtRrUqVh5-2Q_9_3">3,349</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="veco:IncomeTaxReconciliationChangeInAccrualForUnrecognizedTaxBenefits" sign="-" scale="3" id="Tc_vyG3J-fALEWr-5KCM9UO_w_9_6">398</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="veco:IncomeTaxReconciliationChangeInAccrualForUnrecognizedTaxBenefits" scale="3" id="Tc_yISPmyS6x0u5LpJWEul3pw_9_9">6</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:middle;width:62.87%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Share-based compensation</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost" scale="3" id="Tc_aLmUyb0WG0-4tpr69F2_mg_10_3">606</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost" scale="3" id="Tc_sHr5cgHAzUKXPGKtbnd8oQ_10_6">1,208</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost" scale="3" id="Tc_gykbgx_tdE2idaoDO76Ytg_10_9">2,248</ix:nonFraction></p></td></tr><tr><td style="vertical-align:middle;width:62.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Asset impairment</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxReconciliationNondeductibleExpenseImpairmentLosses" scale="3" id="Tc_Pq8UoKW400KWU4Mn-sRR9g_11_9">728</ix:nonFraction></p></td></tr><tr><td style="vertical-align:middle;width:62.87%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Partial extinguishment of 2023 Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="veco:EffectiveIncomeTaxRateReconciliationPartialExtinguishmentOfDebtAmount" sign="-" scale="3" id="Tc_7i__MFtpd0ybNlHqrMt2uQ_12_6">1,090</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="veco:EffectiveIncomeTaxRateReconciliationPartialExtinguishmentOfDebtAmount" sign="-" scale="3" id="Tc_2MaNvoLvxEaBFOMtcumULQ_12_9">2,292</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:middle;width:62.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Adoption of new accounting standard</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxEffectsAllocatedDirectlyToEquityCumulativeEffectOfChangeInAccountingPrinciple" sign="-" scale="3" id="Tc_VisWig_gr0609gnh_-Feyg_13_3">9,295</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:middle;width:62.87%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Other</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxReconciliationOtherAdjustments" scale="3" id="Tc_PdCPG0sWZ0aMcZqdiLEQiw_14_3">167</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxReconciliationOtherAdjustments" scale="3" id="Tc_zkLuafNz8E-E0RiCBBpr9w_14_6">84</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.17%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxReconciliationOtherAdjustments" scale="3" id="Tc_gTePZpVfN0iu4nswZcotOA_14_9">164</ix:nonFraction></p></td></tr><tr><td style="vertical-align:middle;width:62.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Total expense (benefit) for income taxes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxExpenseBenefit" sign="-" scale="3" id="Tc_rpMBL-kUrECqBsEiQ-HwEg_15_3">115,957</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxExpenseBenefit" sign="-" scale="3" id="Tc_s5MwWxKNnU26JDdbr2bDIw_15_6">358</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.17%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxExpenseBenefit" sign="-" scale="3" id="Tc_yD2rsSSDCkOUFOyrEz7-Bg_15_9">73</ix:nonFraction>)</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></ix:nonNumeric></ix:continuation></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-35</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Veeco Instruments&#160;Inc. and Subsidiaries</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Notes to Consolidated Financial Statements (Continued)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="Tc_uuo-jTzEG0udzygTSwYIvA_1_2"></a><a id="Tc_xbFabe9u0E6jaSBQvlUCDQ_2_2"></a><a id="Tc_iD3W8IiA5EWihvEA7vqLBw_2_5"></a><a id="Tc_KWuYNspltUCPlTWrhKkakQ_3_2"></a><a id="Tc_c21GpWKXm0Sw9d06xJUcpA_4_0"></a><a id="Tc_ecfulhFOoEWUa06y4xE26Q_5_0"></a><a id="Tc_GjPIZOObkk25oyp1wxL_fQ_5_2"></a><a id="Tc_OAUcufKcPEOb4yvy_sgEPA_5_5"></a><a id="Tc_KokiDux7GECoi6Ki-92bsg_6_0"></a><a id="Tc_5OQOy9FOxUuWfYIwHGhbpg_7_0"></a><a id="Tc_Ic1UpHBvLEy3ModNsN_5Jg_8_0"></a><a id="Tc_Y6Z-zykLXkyBUgrnhCiF0w_9_0"></a><a id="Tc_fxlhZ03ZJ0-8qmeoLehmtQ_10_0"></a><a id="Tc_baX6uZuookeJQN5BULREew_11_0"></a><a id="Tc_YQ_DZOa8kkO_8hQU7Q7dHQ_12_0"></a><a id="Tc_kziga6MobEKEAg_2z-weuQ_12_6"></a><a id="Tc_WdO7vmkCF0aIwI5xluYu0g_13_0"></a><a id="Tc_UvaMjAPd9ESTGMrVO02cFg_14_0"></a><a id="Tc_r5FZUYpJNE2rEiO2ahEOtQ_15_0"></a><a id="Tc_vyqT09O0LEavn1pmlzBotg_16_0"></a><a id="Tc_N5svg_vI60KaPDfczRevkw_18_0"></a><a id="Tc_ZtmjfmW-pkmIpICm9t7Fpw_19_0"></a><a id="Tc_hHfoJCoNPUKR3-jJTJkXlQ_20_0"></a><a id="Tc_RKg5DI090k2pJMCVevKTWg_21_0"></a><a id="Tc_ZPSP0quc2Ui_kFGJMFw2Fg_22_0"></a><a id="Tc_r2uUmpgq3kCrkyQu00CtEA_23_0"></a><a id="Tc_lFlHgWIit061Xg1XCcC7UQ_24_0"></a><a id="Tc_cL4RdvwkmUS2TfBjXhE1NQ_24_2"></a><a id="Tc_dXnBPAsis0m0mdEoA5w04Q_24_5"></a><ix:continuation id="Tb_OdvTaPQWBke6Dlk5WtcDSw_cont2" continuedAt="Tb_OdvTaPQWBke6Dlk5WtcDSw_cont3"><ix:continuation id="Tb_BX2gbqE5c06VZFAn8xvpkA_cont1"></ix:continuation><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Deferred income taxes reflect the effect of temporary differences between the carrying amounts of assets and liabilities recognized for financial reporting purposes and the amounts recognized for tax purposes. The tax effects of the temporary differences were as follows:</p><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="us-gaap:ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock" id="Tb__JgilsfYu0OdoiJy_YpUQA" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;min-height:0.0pt;margin:0pt;"><span style="font-size:0pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:middle;width:72.6%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:50%;transform:translate(0,-50%);width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:72.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:25.33%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:72.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.24%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.02%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="7" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:72.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:25.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:middle;width:72.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Deferred tax assets:&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:middle;width:72.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Inventory valuation</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxAssetsInventory" scale="3" id="Tc_0w0sbAujOEeF7UrIwKsmzA_5_3">11,931</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxAssetsInventory" scale="3" id="Tc_eIyU2ghwzkGsYPHrSJISTg_5_6">11,822</ix:nonFraction></p></td></tr><tr><td style="vertical-align:middle;width:72.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Net operating losses</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxAssetsOperatingLossCarryforwards" scale="3" id="Tc_ut3BlgukYEO710zIw5QHXg_6_3">5,647</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxAssetsOperatingLossCarryforwards" scale="3" id="Tc_M7q6YsDXz0eKa1lY4urz1Q_6_6">38,816</ix:nonFraction></p></td></tr><tr><td style="vertical-align:middle;width:72.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Credit carry forwards</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxAssetsTaxCreditCarryforwards" scale="3" id="Tc_JHST9nFQAU-GeCcS3EUk7Q_7_3">59,988</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxAssetsTaxCreditCarryforwards" scale="3" id="Tc_mSk-FsPhCEazRI8p6yeB_A_7_6">57,810</ix:nonFraction></p></td></tr><tr><td style="vertical-align:middle;width:72.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Warranty and installation accruals</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReserves" scale="3" id="Tc_mXasVrpTOECkW5IeV4SpDg_8_3">1,862</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReserves" scale="3" id="Tc_Jq9sQA1dp0yxw3t73g2WqQ_8_6">1,730</ix:nonFraction></p></td></tr><tr><td style="vertical-align:middle;width:72.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Share-based compensation</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost" scale="3" id="Tc_B_QviyE_iE-wuBFx_VLrpQ_9_3">5,267</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost" scale="3" id="Tc_kS_MR7tHPkO9wKSMenxfMQ_9_6">4,033</ix:nonFraction></p></td></tr><tr><td style="vertical-align:middle;width:72.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Customer deposits and deferred revenue</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxAssetsDeferredIncome" scale="3" id="Tc_eq0JVDnN6k-8L56SQx2z1g_10_3">24,504</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxAssetsDeferredIncome" scale="3" id="Tc_0tqAwM7_rkut37T14-GZNA_10_6">9,908</ix:nonFraction></p></td></tr><tr><td style="vertical-align:middle;width:72.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Operating leases</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="veco:DeferredTaxAssetsOperatingLeases" scale="3" id="Tc_FyKLwRa9LEumsCIa9SjnYQ_11_3">8,349</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="veco:DeferredTaxAssetsOperatingLeases" scale="3" id="Tc_RIy5u3fLX0OivffPk9PB4A_11_6">8,464</ix:nonFraction></p></td></tr><tr><td style="vertical-align:middle;width:72.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Research and experimental (&quot;R&amp;E&quot;) capitalization</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxAssetsInProcessResearchAndDevelopment" scale="3" id="Tc_rrxNMMD3aUihOkfcDau3SA_12_3">19,071</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:middle;width:72.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Other</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxAssetsOther" scale="3" id="Tc_6ZLJFEoHdEW9C4z54iBKpQ_13_3">6,553</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxAssetsOther" scale="3" id="Tc_lW-OcviRqkWK-llefKPcDw_13_6">5,880</ix:nonFraction></p></td></tr><tr><td style="vertical-align:middle;width:72.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Total deferred tax assets</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxAssetsGross" scale="3" id="Tc_v7tgKxUcVEa-DU5uQieULQ_14_3">143,172</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxAssetsGross" scale="3" id="Tc_ggaQeXO4C0yclGe8j-WEtw_14_6">138,463</ix:nonFraction></p></td></tr><tr><td style="vertical-align:middle;width:72.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Valuation allowance</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxAssetsValuationAllowance" scale="3" id="Tc_j7G6-b7AaEynTojZMFNpJg_15_3">11,083</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxAssetsValuationAllowance" scale="3" id="Tc_wgjM0MjrXE6ZJ4Dqfja0kQ_15_6">116,054</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:middle;width:72.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Net deferred tax assets</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxAssetsNet" scale="3" id="Tc_r9rmEGQjQkGaWCMqsvqCTQ_16_3">132,089</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxAssetsNet" scale="3" id="Tc_C55HEWCNpkGD9XQ7FjW7UA_16_6">22,409</ix:nonFraction></p></td></tr><tr><td style="vertical-align:middle;width:72.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:middle;width:72.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Deferred tax liabilities:&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:middle;width:72.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Purchased intangible assets</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxLiabilitiesGoodwillAndIntangibleAssetsIntangibleAssets" scale="3" id="Tc_624MhxQDiUiO5AVX6kghYA_19_3">8,724</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxLiabilitiesGoodwillAndIntangibleAssetsIntangibleAssets" scale="3" id="Tc_G4-YPT3snE-eegsc58mRuA_19_6">6,633</ix:nonFraction></p></td></tr><tr><td style="vertical-align:middle;width:72.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Convertible Senior Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="veco:DeferredTaxLiabilitiesFinancingArrangementsNet" sign="-" scale="3" id="Tc_aypzeqf1zUq4llTCgQuBfA_20_3">39</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="veco:DeferredTaxLiabilitiesFinancingArrangementsNet" scale="3" id="Tc_ku-jaq0dh0G4u1r61_7kIw_20_6">10,018</ix:nonFraction></p></td></tr><tr><td style="vertical-align:middle;width:72.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Operating leases</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxLiabilitiesLeasingArrangements" scale="3" id="Tc_IeDYk4Eak0a0wF3EbcII3Q_21_3">5,994</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxLiabilitiesLeasingArrangements" scale="3" id="Tc_rCs9iLMCukKfA2MdEpnZpw_21_6">6,539</ix:nonFraction></p></td></tr><tr><td style="vertical-align:middle;width:72.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Depreciation</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxLiabilitiesPropertyPlantAndEquipment" scale="3" id="Tc_yyYsF0pB1EON177sIuyQcQ_22_3">2,346</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxLiabilitiesPropertyPlantAndEquipment" scale="3" id="Tc_ZUVguzTLW0KLYWmw82pRkQ_22_6">2,372</ix:nonFraction></p></td></tr><tr><td style="vertical-align:middle;width:72.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Total deferred tax liabilities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredIncomeTaxLiabilities" scale="3" id="Tc_Rh1xvIZqO0Sl5dHxAOzgFQ_23_3">17,025</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredIncomeTaxLiabilities" scale="3" id="Tc_P49HCu6aUEeDD5jC_b5hsQ_23_6">25,562</ix:nonFraction></p></td></tr><tr><td style="vertical-align:middle;width:72.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Net deferred taxes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxAssetsLiabilitiesNet" scale="3" id="Tc_hxRAZpjdEkmevioa_l2B9g_24_3">115,064</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxLiabilities" scale="3" id="Tc_Nga6gpNWik-n2aYYx7Xb4g_24_6">3,153</ix:nonFraction>)</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company does not permanently reinvest its earnings from certain foreign jurisdictions and has accrued for foreign tax withholdings of $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxLiabilitiesUndistributedForeignEarnings" scale="6" id="Narr_Cx7P2v7NcEOye5_8_S46jw">0.9</ix:nonFraction> million on its unremitted earnings as of December 31, 2022.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">During the year ended December 31, 2022, the Company recognized a net decrease of $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:ValuationAllowanceDeferredTaxAssetChangeInAmount" sign="-" scale="6" id="Narr_48NruU64q0WkcPTc66JAkA">104.9</ix:nonFraction> million of its valuation allowance. This decrease was primarily related to the reversal of valuation allowances on domestic deferred tax assets. After considering recent significant positive evidence, including a consistent pattern of earnings in the past three years, as well as forecasted future earnings, it was determined that a valuation allowance was no longer required for certain deferred tax assets primarily recorded on tax credits and net operating losses in U.S. jurisdictions. The Company&#8217;s remaining valuation allowance of approximately $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxAssetsValuationAllowance" scale="6" id="Narr_KFBFkQSJOkCkjaYp5GgEqA">11.1</ix:nonFraction> million relates primarily to state and local, and certain foreign jurisdiction tax attributes for which the Company could not conclude were realizable on a more-likely-than-not basis.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">At December 31, 2022, the Company had U.S. federal research and development credits of $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_IncomeTaxAuthorityAxis_us-gaap_DomesticCountryMember_us-gaap_TaxCreditCarryforwardAxis_us-gaap_ResearchMember_JSK4sVm52Uad8MbRS3Hinw" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:TaxCreditCarryforwardAmount" scale="6" id="Narr_gOjFPIAueEu35nUeRzC8Jw">36.5</ix:nonFraction> million that will expire between 2023 and 2042. The Company also has $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_IncomeTaxAuthorityAxis_us-gaap_ForeignCountryMember_LZNCNc3oqkaYk0GD8cCD-Q" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:TaxCreditCarryforwardAmount" scale="6" id="Narr_gSXfDKeDLkud4t2bQEt0qw">8.7</ix:nonFraction> million of foreign tax credits that expire in 2027. Additionally, the Company has state and local NOL carryforwards of approximately $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_IncomeTaxAuthorityAxis_us-gaap_StateAndLocalJurisdictionMember_FJTorzE9E0O2-5w2lG7XTQ" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:OperatingLossCarryforwards" scale="6" id="Narr_xqqklKfb5025PmJo813iCQ">59.3</ix:nonFraction> million (a net deferred tax asset of $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_IncomeTaxAuthorityAxis_us-gaap_StateAndLocalJurisdictionMember_FJTorzE9E0O2-5w2lG7XTQ" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxAssetsOperatingLossCarryforwards" scale="6" id="Narr_HjHERth7vEaC_hkgnpjeVQ">4.1</ix:nonFraction> million, net of federal tax benefits and before the valuation allowance) that will expire between 2023 and 2041. Finally, the Company has state credits of $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_IncomeTaxAuthorityAxis_us-gaap_StateAndLocalJurisdictionMember_FJTorzE9E0O2-5w2lG7XTQ" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:TaxCreditCarryforwardAmount" scale="6" id="Narr_uAZlvLq0Y0GUM_9o-bqECQ">32.6</ix:nonFraction> million, some of which are indefinite and others that will expire between 2024 and 2037.</p></ix:continuation></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-36</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Veeco Instruments&#160;Inc. and Subsidiaries</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Notes to Consolidated Financial Statements (Continued)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="Tc_GJ5oEehlOE-Xs8zEc1tmLA_1_2"></a><a id="Tc_MOH01TXQaEis-EfEOkOXzw_2_2"></a><a id="Tc_vW_ntH1im0SJSwwMC6o4PA_2_5"></a><a id="Tc_nCEY2LiMJEGcnPKG6FJg5w_2_8"></a><a id="Tc_ooeIU0CpJ0m8ZjGIiqHDgg_3_2"></a><a id="Tc_9dfcpisgc0C2z_BpkvuLXw_4_0"></a><a id="Tc_rFJH5SnI9Eeq3jYlDIoR9g_4_2"></a><a id="Tc_om-IDg02PEmmoOfA1USmCg_4_5"></a><a id="Tc_atV--nyua0CtAAKW8A1i_Q_4_8"></a><a id="Tc_HXOGV5cJTki98SUMkb3OrQ_5_0"></a><a id="Tc_L2V7Tves80uQbTltpRU1dw_6_0"></a><a id="Tc_H-slJ2NadU2x0r2b1hVTZg_6_3"></a><a id="Tc_ermAD_YkWE2wu05VPLg8iw_7_0"></a><a id="Tc_-mOjoMOgE06DkqWjvlHufw_8_0"></a><a id="Tc_jSSzjE0X90CcykBUELpqPw_8_3"></a><a id="Tc_Sr81Wptj0UiXtym_qM6Zbw_8_6"></a><a id="Tc_wPX1Dy6nD0iAJYSmgh3PMg_8_9"></a><a id="Tc_kNyVu8iOdki-WsJtJOgMyQ_9_0"></a><a id="Tc_829kvyApKEuanwEFgGumIQ_10_0"></a><a id="Tc_UeNbTIfctUq0HsVG64Jr9A_10_2"></a><a id="Tc_0s48D7THFkaLbzXi9N9k1Q_10_5"></a><a id="Tc_ZUt99gynw0-p2eCf0WylBg_10_8"></a><ix:continuation id="Tb_OdvTaPQWBke6Dlk5WtcDSw_cont3"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">A roll-forward of the Company&#8217;s uncertain tax positions for all U.S. federal, state, and foreign tax jurisdictions was as follows:</p><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="us-gaap:SummaryOfIncomeTaxContingenciesTextBlock" id="Tb_DQ5d26FAlk28480CAyBXWg" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;min-height:0.0pt;margin:0pt;"><span style="font-size:0pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:64.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:64.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:33.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:64.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.78%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.78%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.81%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="10" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:64.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:33.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:64.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Balance at beginning of year</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:UnrecognizedTaxBenefits" scale="3" id="Tc_8BiYf0YajUSayv3Ic6TkvQ_4_3">12,761</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2020_JUGLvBeldEeSTj1WqQBVdQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:UnrecognizedTaxBenefits" scale="3" id="Tc_6bWHVXzA3kuaxbK7SVxwpA_4_6">12,363</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2019_dyqJ8hTIuEW6V2L_RveF0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:UnrecognizedTaxBenefits" scale="3" id="Tc_S6DcnN6O9Ue1wm1h4FdHpA_4_9">12,369</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:64.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Additions for tax positions related to current year</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:UnrecognizedTaxBenefitsIncreasesResultingFromCurrentPeriodTaxPositions" scale="3" id="Tc_NzwyNH2ENke-RxfpwYxZeQ_5_3">4,180</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:UnrecognizedTaxBenefitsIncreasesResultingFromCurrentPeriodTaxPositions" scale="3" id="Tc_NgiXAM9lO0yAi6Hvzo8O6A_5_6">2,642</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:UnrecognizedTaxBenefitsIncreasesResultingFromCurrentPeriodTaxPositions" scale="3" id="Tc_S4QWPPiwcEyQNnRCP-nw9A_5_9">1,217</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:64.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Additions for tax positions related to prior years</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:UnrecognizedTaxBenefitsIncreasesResultingFromPriorPeriodTaxPositions" scale="3" id="Tc_0MOQLDbDJEWHJsZB_fpsOw_6_6">50</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:UnrecognizedTaxBenefitsIncreasesResultingFromPriorPeriodTaxPositions" scale="3" id="Tc_60XCoevLekG3fwsb89v7JQ_6_9">47</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:64.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Reductions for tax positions related to prior years</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:UnrecognizedTaxBenefitsDecreasesResultingFromPriorPeriodTaxPositions" scale="3" id="Tc_4zLOr-FFZkCdP0gR7WIiiA_7_3">731</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:UnrecognizedTaxBenefitsDecreasesResultingFromPriorPeriodTaxPositions" scale="3" id="Tc_iyjMQw33SEareHSci1t4Nw_7_6">1,196</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:UnrecognizedTaxBenefitsDecreasesResultingFromPriorPeriodTaxPositions" scale="3" id="Tc_jpqU9Dq73EG_MhVXx9mw1w_7_9">1,166</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:64.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Reductions due to the lapse of the statute of limitations</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;width:64.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Settlements</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:UnrecognizedTaxBenefitsDecreasesResultingFromSettlementsWithTaxingAuthorities" scale="3" id="Tc_paqGaxu3yUGFPApWklBgzg_9_3">100</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:UnrecognizedTaxBenefitsDecreasesResultingFromSettlementsWithTaxingAuthorities" scale="3" id="Tc_yegIrqhEcEuW_ibGm9NLCA_9_6">1,098</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:UnrecognizedTaxBenefitsDecreasesResultingFromSettlementsWithTaxingAuthorities" scale="3" id="Tc_I2LF3IOyZUOi20EdGj_lbA_9_9">104</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:64.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Balance at end of year</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:UnrecognizedTaxBenefits" scale="3" id="Tc_KDYh8WtUgkmstfzA1MwkRg_10_3">16,110</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:UnrecognizedTaxBenefits" scale="3" id="Tc_p6DV_Fp7j02yQuKWvC9kPw_10_6">12,761</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.52%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2020_JUGLvBeldEeSTj1WqQBVdQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:UnrecognizedTaxBenefits" scale="3" id="Tc_8Nyei4Vv_kOxl56YPAaYLQ_10_9">12,363</ix:nonFraction></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">If the amount of unrecognized tax benefits at December 31, 2022 were recognized, the Company&#8217;s income tax provision would decrease by $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:UnrecognizedTaxBenefitsThatWouldImpactEffectiveTaxRate" scale="6" id="Narr_vxFotMnehUm5rnOTKw77NQ">13.5</ix:nonFraction> million. The gross amount of interest and penalties accrued in income tax payable in the Consolidated Balance Sheets was approximately $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued" scale="6" id="Narr_M4MLsvGR20K0tf33DuL5yg">0.5</ix:nonFraction> million and $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued" scale="6" id="Narr_MHG4NKjsKE2bxX0EboxFEA">0.4</ix:nonFraction> million at December 31, 2022 and 2021, respectively.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company, or one of its subsidiaries, files income tax returns in the United States federal jurisdiction, and various state, local, and foreign jurisdictions. All material consolidated federal income tax matters have been concluded for years through 2017 subject to subsequent utilization of NOLs generated in such years. All material state and local income tax matters have been reviewed through 2012. The majority of the Company&#8217;s foreign jurisdictions have been reviewed through 2015. The Company&#8217;s major foreign jurisdictions&#8217; statutes of limitation remain open with respect to the tax years 2015 through 2021 for Germany, 2017 through 2021 for China, 2021 for Taiwan, and 2020 and 2021 for Singapore. The Company does not anticipate that its uncertain tax position will change significantly within the next twelve months subject to the completion of the ongoing tax audits and any resultant settlement. </p></ix:continuation><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><a id="_Hlk535574252"></a><a id="_Hlk535418796"></a><a id="_Hlk535418683"></a><a id="Tc_coUHdpr2lUqeNcZHKOnHHg_1_2"></a><a id="Tc_dZdx_sJTH0SK206TvvkINA_2_2"></a><a id="Tc_mZFt_FtiCk6hEx8XnCfHjg_2_5"></a><a id="Tc_Dfu7YFlpKk6RaGQIYckt7Q_2_8"></a><a id="Tc_T49yJRQRN0iZ4pUBooAJnQ_3_2"></a><a id="Tc__Hb9RbJtTkuBxbQfFDzlyg_4_0"></a><a id="Tc_a1gGGDrELUWfj6k58lq_nQ_5_0"></a><a id="Tc_OmpEsoMqnkiggQCuyuHQCA_5_2"></a><a id="Tc_yd2KlKGxJ065RtP7BIhhkw_5_5"></a><a id="Tc_-3qKW4QEU0-MIIYSceDSGQ_5_8"></a><a id="Tc_QDoy53gfjEqE5Ng88IdSow_6_0"></a><a id="Tc_64LAmBRvaE2NFiOF1aZbwQ_7_0"></a><a id="Tc_E5gvBe8XLEW0qk7QqEVdRA_8_0"></a><a id="Tc_SNrPADMlwkO57fVaXVwoUQ_9_0"></a><a id="Tc_DejhY_Db9kSGP3HO1XRr1Q_9_2"></a><a id="Tc_HD6TBwB8U0GbttAnQnJ1ag_9_5"></a><a id="Tc_L-mzfFcqFEajMt3nTlvL1Q_9_8"></a><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="us-gaap:SegmentReportingDisclosureTextBlock" id="Tb_nDImJV-SBUGFUEIT8psggA" continuedAt="Tb_nDImJV-SBUGFUEIT8psggA_cont1" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 16 &#8212; Segment Reporting and Geographic Information</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company operates and measures its results in <ix:nonFraction unitRef="Unit_Standard_segment_RlYNACzID0m6O5VHI3M3nA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="INF" format="ixt-sec:numwordsen" name="us-gaap:NumberOfOperatingSegments" scale="0" id="Narr_LKnzheuMtEGOZZhi8w7fgw">one</ix:nonFraction> operating segment and therefore has <ix:nonFraction unitRef="Unit_Standard_segment_RlYNACzID0m6O5VHI3M3nA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="INF" format="ixt-sec:numwordsen" name="us-gaap:NumberOfReportableSegments" scale="0" id="Narr_339CvcWHS0y2SUQUv2m9-A">one</ix:nonFraction> reportable segment: the development, manufacture, sales, and support of semiconductor and thin film process equipment primarily sold to make electronic devices. The Company&#8217;s Chief Operating Decision Maker, the Chief Executive Officer, evaluates performance of the Company and makes decisions regarding the allocation of resources based on total Company results.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Sales by end-market is as follows:</p><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="us-gaap:ScheduleOfEntityWideInformationRevenueFromExternalCustomersByProductsAndServicesTextBlock" id="Tb_aKI39jwhsk6fz4jUTIMcsQ" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;min-height:0.0pt;margin:0pt;"><span style="font-size:0pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80.72%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:60.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:60.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:37.01%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">For&#160;the year ended December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:60.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.97%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.97%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.97%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="10" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:60.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:37.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:60.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Sales by end-market</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:60.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Semiconductor</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_srt_ProductOrServiceAxis_veco_SemiconductorMember_9PJiZcYx8keIpEVWmTevwA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax" scale="3" id="Tc_Or1CyYIQeUOy-LQs7CUV2w_5_3">369,369</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_srt_ProductOrServiceAxis_veco_SemiconductorMember_YkhDbPkawEiyjB3fK4wRQw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax" scale="3" id="Tc_WFcH0iAGgkiC-rAnTU_EFw_5_6">247,051</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_srt_ProductOrServiceAxis_veco_SemiconductorMember_GKacZn4rvEyU0M6kjYWAOA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax" scale="3" id="Tc_Xog3AgOOxU2U_g2ew4OF9w_5_9">165,909</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:60.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Compound Semiconductor</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_srt_ProductOrServiceAxis_veco_CompoundSemiconductorMember_LdTGFm08V0K1-4URhxYb-w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax" scale="3" id="Tc_TywcgrQOjEOSwRd0LnWKng_6_3">121,194</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_srt_ProductOrServiceAxis_veco_CompoundSemiconductorMember_IAiei5YbJEyH8DppQEM5_w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax" scale="3" id="Tc_vvX5wbvcOU2jHDxO9mS1xg_6_6">106,972</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_srt_ProductOrServiceAxis_veco_CompoundSemiconductorMember_19iFaF75yECz3rBkCfAGpg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax" scale="3" id="Tc_ETw0RyT3IkOKd-R-CLFoiA_6_9">107,922</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:60.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Data Storage</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_srt_ProductOrServiceAxis_veco_DataStorageMember_ohlZC8GlDkOKwTiD8wpwUw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax" scale="3" id="Tc_HuaaYjRxfk-_aUnax4Caew_7_3">87,544</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_srt_ProductOrServiceAxis_veco_DataStorageMember_WuQRBW8HokiCULZhKHrZDg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax" scale="3" id="Tc_-CY-I_97D0iy2PPVCAlFNA_7_6">168,760</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_srt_ProductOrServiceAxis_veco_DataStorageMember_drFJLf9L9kq6PLGRMBLwHQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax" scale="3" id="Tc_uY_kZiWoKEGhT_VqJv1VuQ_7_9">123,288</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:60.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Scientific &amp; Other</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.7%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_srt_ProductOrServiceAxis_veco_ScientificAndOtherMember_R82epki4m0O2R4lYzbFB9A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax" scale="3" id="Tc_v6EbWSLJjkWNbLJaDU3dZw_8_3">68,030</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.7%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_srt_ProductOrServiceAxis_veco_ScientificAndOtherMember_Dooe7CVpc0a8KYAWnA2ecw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax" scale="3" id="Tc_ovd9WM4mGUS-mXsGYwmiUA_8_6">60,494</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.7%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_srt_ProductOrServiceAxis_veco_ScientificAndOtherMember_-7m243SMR0udkXGnjcwNSg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax" scale="3" id="Tc_F3QFGIWrJEKznb0-NgjL9A_8_9">57,044</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:60.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.7%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax" scale="3" id="Tc_L6Ax6_IYVEaLMXdxpWcF6Q_9_3">646,137</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.7%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax" scale="3" id="Tc_b9ajbjO8uEG2l3owQUXP9Q_9_6">583,277</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.7%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax" scale="3" id="Tc_Hirmv9SNeE2702cmfnPCHg_9_9">454,163</ix:nonFraction></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company&#8217;s significant operations outside the United States include sales and service offices in China, Europe, and Rest of APAC. For geographic reporting, sales are attributed to the location in which the customer facility is located. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></ix:nonNumeric></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-37</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Veeco Instruments&#160;Inc. and Subsidiaries</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Notes to Consolidated Financial Statements (Continued)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;max-width:100%;position:relative;min-height:10.35pt;"><a id="_2c930715_33c1_42ba_ac2b_20dd66adfc50"></a><a id="Tc_HtqstFTMf06SqynZVQVicA_1_2"></a><a id="Tc_Kt7W5-H47ESt9XfQzo3jUw_1_11"></a><a id="Tc_KX3Mukna4EKeOs7ROODrdw_2_2"></a><a id="Tc_d8-93if4sUOq-RwJowU8wA_2_5"></a><a id="Tc_b9mQNMk0sUu_HP4Xge48Yw_2_8"></a><a id="Tc_UX2hnLumVU-8DyGx131huA_2_11"></a><a id="Tc_8NJYR4cWQkS4eyIaX8IbjA_2_14"></a><a id="Tc_l-puj1QuCUOLJRKgbTqJ7Q_2_17"></a><a id="Tc_UwFFJtgitUa0sWe6o5ymqQ_3_2"></a><a id="Tc_k3k9k4MypUOEzNm7kCSioA_4_0"></a><a id="Tc_e8Lubn4jVUqEF7Y9maOvfA_4_2"></a><a id="Tc_BGLlsCU2jk2_nSrIZiwwVQ_4_5"></a><a id="Tc_2r3JpkXiZ0-y8SUN0tTfGg_4_8"></a><a id="Tc_q83Udp1Tv0agwdiKntxfDg_4_11"></a><a id="Tc_b-8vn2Nwok-6dLE4Bqhixg_4_14"></a><a id="Tc_bQsI5wbn50m_z51RL8g1-A_4_17"></a><a id="Tc_2UJFGlmOskqXayPl1V3efw_5_0"></a><a id="Tc_66ur185BREWmA1syQtSmzw_6_0"></a><a id="Tc_13bAVWsJVUGam7RGWmzkVA_7_0"></a><a id="Tc_RryyvZJBjU2o2JdmnrJyCw_8_0"></a><a id="Tc_aYFT5zUpHUWvroU_iykqCQ_8_12"></a><a id="Tc_fpbW64yhBEu251AJ0W4w9Q_8_15"></a><a id="Tc_tQpBHmUtNUKSZU4J-y1Nzw_8_18"></a><a id="Tc_Q8Xo36cSAEaYLlSUKnL8vA_9_0"></a><a id="Tc_7lovg3he6UeavSuc_nkbXQ_9_2"></a><a id="Tc_dCqSJXn6KUmL4qmtW9dSiQ_9_5"></a><a id="Tc_v_RhXmcfCUGeUOsU2XL0bg_9_8"></a><a id="Tc_YqrH5_WzAUiXNh7BRN478w_9_11"></a><a id="Tc_R_PYhtzYr02SxKKP6PAy4A_9_14"></a><a id="Tc_gdSX65LsZECCnHdNYusqGg_9_17"></a><ix:continuation id="Tb_nDImJV-SBUGFUEIT8psggA_cont1"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Sales and long-lived tangible assets by geographic region are as follows:</p><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="us-gaap:ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsByGeographicalAreasTableTextBlock" id="Tb_0LZe1v6rbk-Yq0y4qcvy1g" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:38.26%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New 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style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.97%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:38.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:30.19%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Net&#160;Sales&#160;to&#160;Unaffiliated Customers</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:28.24%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Long-lived&#160;Tangible&#160;Assets</b></p></td></tr><tr><td style="vertical-align:bottom;width:38.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.97%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.98%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.01%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="19" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:38.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="17" style="vertical-align:bottom;white-space:nowrap;width:60.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:38.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">United States</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_srt_StatementGeographicalAxis_country_US_Iqq-3Yh3o0KOcOsQuuWFnw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax" scale="3" id="Tc_k1WCfwIvVEmaEuCeGBnbhQ_4_3">197,433</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_srt_StatementGeographicalAxis_country_US_Qk0pMUh3A0imrH2rqxssEg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax" scale="3" id="Tc_zTLCqvW0-Ee6-zz-JQW4KA_4_6">217,209</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_srt_StatementGeographicalAxis_country_US_nlfJOecro0qR-ydQH9T88Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax" scale="3" id="Tc_33wyehVLF0CWY0eR0n4mgw_4_9">145,353</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_srt_StatementGeographicalAxis_country_US_9rx8lXGp-UePPYpikE4BwQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentNet" scale="3" id="Tc_c13JSmcAQEWTUT2b2XQWXg_4_12">106,550</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_srt_StatementGeographicalAxis_country_US_T55RSt3DbUW94GG58r4txw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentNet" scale="3" id="Tc_2tY0DSEcp0SmMWn8t5-IAQ_4_15">99,220</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2020_srt_StatementGeographicalAxis_country_US_IFBHHJD4ZEekIQ5l9IjVqw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentNet" scale="3" id="Tc_elZ6cfKj8EyXIEkz99vflQ_4_18">64,967</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:38.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">EMEA<sup style="font-family:'Calibri','Helvetica','sans-serif';font-size:8.25pt;line-height:100%;top:0pt;vertical-align:top;">(1)</sup></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_srt_StatementGeographicalAxis_us-gaap_EMEAMember_Xd-c8lKXMkGwam6POJvgSQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax" scale="3" id="Tc_OfAE3F64zU2vG1Lkq0vT_w_5_3">87,837</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_srt_StatementGeographicalAxis_us-gaap_EMEAMember_VfxBGC5wCkm5_qWrjZmgPA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax" scale="3" id="Tc_x3gNETyVmEGe3VMLx6yyVQ_5_6">55,129</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_srt_StatementGeographicalAxis_us-gaap_EMEAMember_cNbtUrMBU02kQ3oY3LZf_Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax" scale="3" id="Tc_5iORdqI_R0iCf9a94RSgAA_5_9">73,124</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_srt_StatementGeographicalAxis_us-gaap_EMEAMember_haoOD1W3VEefYffMIxwz_w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentNet" scale="3" id="Tc_a42lbhFKKEi_gLNz2nHhbA_5_12">60</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_srt_StatementGeographicalAxis_us-gaap_EMEAMember_-2eMs00UmU-xtabNFZCl8Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentNet" scale="3" id="Tc_fWhqtXTbmUSYOxsNmyp5PQ_5_15">94</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2020_srt_StatementGeographicalAxis_us-gaap_EMEAMember_GvpCorI590OKQRjAeF3GNg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentNet" scale="3" id="Tc_f6RuSAW-dkeOJdTZWwx0bg_5_18">120</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:38.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">China</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_srt_StatementGeographicalAxis_country_CN_QBoqba6p3E65LEV6R7MTsQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax" scale="3" id="Tc_2HdMt9jO6EOMpF3zVFvm6Q_6_3">123,703</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_srt_StatementGeographicalAxis_country_CN_ZvsRp4BDo06Ko490CiqQIg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax" scale="3" id="Tc_rtQtXvut7UWcHbj59Z_yhQ_6_6">105,998</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_srt_StatementGeographicalAxis_country_CN_mjQ--ouO8Eq8LXzJRXoKMA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax" scale="3" id="Tc_locqquIpTUOG-N1cX_4Vtg_6_9">57,589</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_srt_StatementGeographicalAxis_country_CN_qymy7_UBkEC6VBQbt2XEbw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentNet" scale="3" id="Tc_Vz-OzZfV8kuLqUfu7f8ROg_6_12">70</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_srt_StatementGeographicalAxis_country_CN_tdldCDp8U0SPe2xlhi8Pdg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentNet" scale="3" id="Tc_BVFrAZGnLUKolpABdIhwnQ_6_15">67</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2020_srt_StatementGeographicalAxis_country_CN_YpEyHYcZokyQEdtnzsqn2g" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentNet" scale="3" id="Tc_2VbaEgdRD0mWnsLNBTaOGA_6_18">84</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:38.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Rest of APAC</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_srt_StatementGeographicalAxis_veco_AsiaPacificExcludingChinaMember_7p5vq41yVkK3tUpkfkCrQA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax" scale="3" id="Tc_y5tszcsnaUK5AbI9dNrMVg_7_3">235,735</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_srt_StatementGeographicalAxis_veco_AsiaPacificExcludingChinaMember_W3DfwYqTJUid6go4WOTUwQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax" scale="3" id="Tc_9JGWMAT2N0CjGW_mi9rrig_7_6">204,633</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_srt_StatementGeographicalAxis_veco_AsiaPacificExcludingChinaMember_Jr8Bxw0HLkeseR2GeImE0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax" scale="3" id="Tc_zwpHnPT3hEeW1_a-0RZ4aQ_7_9">177,569</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_srt_StatementGeographicalAxis_veco_AsiaPacificExcludingChinaMember_UvfACFZGrUypPpEdHOipMQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentNet" scale="3" id="Tc_rFCJBCqS4Uu4-H3ZvYu20w_7_12">601</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_srt_StatementGeographicalAxis_veco_AsiaPacificExcludingChinaMember_HXJxHtMkW0aGxszM6SJ1uw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentNet" scale="3" id="Tc_VRnOERKkzk2Yd81smWWojg_7_15">362</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2020_srt_StatementGeographicalAxis_veco_AsiaPacificExcludingChinaMember_aAB8ukG5VEimziKhX1v34w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentNet" scale="3" id="Tc_sCKhmH3zMES8mdrbg88z3w_7_18">100</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:38.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Rest of World</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_srt_StatementGeographicalAxis_veco_RestOfWorldMember_VAzisHSCx0-DlDvmloB2xw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax" scale="3" id="Tc_Hb1z5FQqOUmaJPcZVk9yYg_8_3">1,429</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_srt_StatementGeographicalAxis_veco_RestOfWorldMember_z2CDDUi9cEmCQUu5NwxCRg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax" scale="3" id="Tc__HsP38JJT0WkceI1ndfqPA_8_6">308</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_srt_StatementGeographicalAxis_veco_RestOfWorldMember_igromS0r10qJ0F2D-OutxA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax" scale="3" id="Tc_fLIfJ6NUmEymHGDEhi3FvQ_8_9">528</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.97%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;width:38.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Total </p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax" scale="3" id="Tc_hzWpg6XVIkOs13kbtyT8LQ_9_3">646,137</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax" scale="3" id="Tc_rNHr0vlp4kigKdNgj6HCBw_9_6">583,277</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax" scale="3" id="Tc_h75Y4bnhR06KDDs-9V9TXQ_9_9">454,163</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentNet" scale="3" id="Tc_HL9Gop_6ykKFILy2TxhN1A_9_12">107,281</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentNet" scale="3" id="Tc_Tf5hijKZlUueQ3YC8l3B7w_9_15">99,743</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.97%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2020_JUGLvBeldEeSTj1WqQBVdQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentNet" scale="3" id="Tc_o30j6pLBLkC9C-7xXOUJHw_9_18">65,271</ix:nonFraction></p></td></tr></table><div style="font-family:'Times New Roman','Times','serif';font-size:9.0pt;margin-bottom:0pt;margin-top:0pt;min-height:1.19em;position:relative;width:100%;"><div style="background-color:#000000;height:1pt;position:relative;top:0.6em;width:25.0%;border:none;margin:0 auto 0 0;"></div></div><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:9pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(1)</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:9pt;font-style:normal;font-weight:normal;">EMEA consists of Europe, the Middle East, and Africa</span></td></tr></table></ix:nonNumeric></ix:continuation><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 18pt;"><span style="font-size:9pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="us-gaap:SubsequentEventsTextBlock" id="Tb_t2i9X32PlUWBWPAA0vLwXg" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 17 &#8212; Subseqent Events</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">On January 31, 2023, the Company acquired Epiluvac AB, a privately held manufacturer of chemical vapor deposition  epitaxy systems that enable advanced silicon carbide applications in the electric vehicle market.</span><span style="font-size:11pt;"> </span>Epiluvac is an early-stage revenue company with <ix:nonFraction unitRef="Unit_Standard_employee_W_mzWhkhIEKoXUFE8oNQVg" contextRef="As_Of_1_31_2023_dei_LegalEntityAxis_veco_EpiluvacAbMember_us-gaap_SubsequentEventTypeAxis_us-gaap_SubsequentEventMember_bGwG6YtVWESCjdQzt4z_DA" decimals="INF" format="ixt:numdotdecimal" name="dei:EntityNumberOfEmployees" scale="0" id="Narr_0Skz92wVQUC_Ey19PtFFxw">11</ix:nonFraction><span style="white-space:pre-wrap;"> employees.  The purchase price for the transaction, all payable in cash, was </span>$<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_31_2023_To_1_31_2023_us-gaap_BusinessAcquisitionAxis_veco_EpiluvacAbMember_us-gaap_SubsequentEventTypeAxis_us-gaap_SubsequentEventMember_azBhPTo7jkCpUE7FbJTfEg" decimals="-6" format="ixt:numdotdecimal" name="us-gaap:PaymentsToAcquireBusinessesGross" scale="6" id="Narr_q2AGYc4YU0Od9tzL2k8VFw">30</ix:nonFraction> million paid at the time of closing with a potential additional $<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_1_31_2023_us-gaap_BusinessAcquisitionAxis_veco_EpiluvacAbMember_us-gaap_SubsequentEventTypeAxis_us-gaap_SubsequentEventMember_bd9hW5CYR0a5e-Lpq61haA" decimals="-6" format="ixt:numdotdecimal" name="us-gaap:BusinessCombinationContingentConsiderationArrangementsRangeOfOutcomesValueHigh" scale="6" id="Narr_9ifjGOQMoU2RNrkVJ9kg4w">35</ix:nonFraction><span style="white-space:pre-wrap;"> million in performance based earn-outs.  </span></p></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 18pt;"><span style="font-size:1pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 18pt;"><span style="font-size:1pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;background:#ffffff;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> <span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="display:none;font-size:12pt;line-height:0pt;margin:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:0pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">F-38</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:79.3%;border:0;margin:30pt 10.35% 30pt 10.35%;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;min-height:41.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 30pt 0pt;"><a style="font-size:10pt;" href="#TOC"><span style="font-style:normal;font-weight:normal;">Table of Contents</span></a></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="ScheduleiivaluationAndQualifyingA_003634"></a><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;"> </b><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p><a id="_094e1ba0_44a9_4492_b686_6ca9690e22dd"></a><a id="Tc_lJ156RQLIUat-Bwl94Xd5A_1_5"></a><a id="Tc_5hFy3J46Uk6mu1NFgES3BA_2_5"></a><a id="Tc_MT32Wv0d10mlVJ-pz9_TSg_3_2"></a><a id="Tc_cMtQ1GcCRk-GJlJseweDKA_3_5"></a><a id="Tc_KikAGJgGREap83OioFhHXQ_3_8"></a><a id="Tc_2Z0VCzR0aU-MqmTIPLpYnA_3_14"></a><a id="Tc_mOAqSdzlMEmrNViRC_bJ_w_4_2"></a><a id="Tc_TSguE-DAkUC9rFqQQFx-Rw_4_5"></a><a id="Tc_WNp4gDUAjUSksHPqlo6TAg_4_8"></a><a id="Tc_Xr-bdOFjTES_oDqlV8ysLQ_4_14"></a><a id="Tc_sNQ3s_QclkuNADP8MaUo0A_5_0"></a><a id="Tc_nyt_J_yy0UOBEmcneJqkrA_5_2"></a><a id="Tc_T_0c8KelyUKNJ80Dg79_1A_5_5"></a><a id="Tc_RN1uzAggLEWElu5gGGCHAQ_5_8"></a><a id="Tc_cWl5LchDnU2QFlWXTWV-lg_5_11"></a><a id="Tc_ZZpbVjZE40mSGmNPeyh7Zg_5_14"></a><a id="Tc_ttxLlK5vDE-WjrfrUqYVMQ_6_2"></a><a id="Tc_CujEix08BkejfjDh9HiXdw_7_0"></a><a id="Tc_Tknrqf35JUWvUk2fZyu-4A_8_0"></a><a id="Tc_u1FxHQkqUEuUp8OkpGMdWA_8_2"></a><a id="Tc_BAxMaWt1Z0KrYItqV0mXsA_8_5"></a><a id="Tc_uTt5hmMj5U2uHKHnbcHdng_8_6"></a><a id="Tc_qwnwJWRW_0qrhk-F7QFvOw_8_8"></a><a id="Tc_PvjSHnalj0qKUovanRVrdA_8_9"></a><a id="Tc_MF11Dk4VsE28IKixPwQxuA_8_11"></a><a id="Tc_rSS851GsREWDejQfQ1zKeA_8_12"></a><a id="Tc_6rejFN-PY0K8EEIUEnEJBg_8_14"></a><a id="Tc_e7fNGkdi2kG8CT7bzselNA_9_0"></a><a id="Tc_vzMpD4TKq06ekZNksgw9gQ_9_9"></a><a id="Tc_3rLkDXRunkGgc659j3FJmg_9_12"></a><a id="Tc_ySiJWoKzjUOm--ZGhdSbHg_10_2"></a><a id="Tc_-_Q-vbzZzkuqTjeVA1RjxQ_10_5"></a><a id="Tc_OmxsD00zkkeOZzCyau3GKQ_10_8"></a><a id="Tc_KNTrXUE6TUWzxNWGIh4YQg_10_9"></a><a id="Tc_-irox74cq0uFJxWFT2hpbA_10_11"></a><a id="Tc_3L0GUP3sB0uq06P5cAxdjw_10_12"></a><a id="Tc_O6HleOeRCEqWVeCXFY1SpA_10_14"></a><a id="Tc_6I8typRm2keSKzUehv-9jg_12_0"></a><a id="Tc_jZuBoYiCyEiEqueeC85ZeQ_13_0"></a><a id="Tc_QH6clx9FFEKiOEkzLXj-zg_13_2"></a><a id="Tc_JOs8yqujGEmcDThfSRfOBw_13_5"></a><a id="Tc_cWPLBGksGUmPwCMjAhw-JA_13_6"></a><a id="Tc_Day146KzckqhIlAJL2tT9Q_13_8"></a><a id="Tc_r_R9kzjbsE-UBb2kndt4NQ_13_9"></a><a id="Tc_KcG12zknSUOPAKRudo7Tgw_13_11"></a><a id="Tc_l8UlnR7wvk6rtfOTrwpL-g_13_12"></a><a id="Tc_7iRBFt7jM0aNQC67c43cXw_13_14"></a><a id="Tc_KvuaG1ua8Ui78j9muuf8lQ_14_0"></a><a id="Tc_G0nXkX0uN0quQlsaE3UGuw_14_6"></a><a id="Tc_7TBOEsezTEO5dwOgpm1WZw_14_9"></a><a id="Tc_OWeCB80czky3YAHrkD6L2A_15_2"></a><a id="Tc_KzWPtVs6ME-Et8UgE4dLeA_15_5"></a><a id="Tc_fMvIlg7iZUCdCpKo_08aiw_15_6"></a><a id="Tc_30cTIyVwiEOv3Qls0EBN5w_15_8"></a><a id="Tc_S2oH8GgZRk-geodJPf8H_g_15_9"></a><a id="Tc_Y7Py8Cv44U-dsxsBpNwIPw_15_11"></a><a id="Tc_fSFyVDFvhUmAgm8PcC3g0A_15_14"></a><a id="Tc_0K-J_I9sZEyLYBPmyaxHqw_17_0"></a><a id="Tc_zsi19Dg2xEqz1illr3rPvw_18_0"></a><a id="Tc_nW_tUoyQL02-GG6j7cQSvg_18_2"></a><a id="Tc_9-NJON2ZCEW2P94FBiu9sA_18_5"></a><a id="Tc_uuA9SSWlaEOPIeDzHAeTWw_18_8"></a><a id="Tc_lUsg6G_IGEiBoRZmnbIarA_18_9"></a><a id="Tc_wo1XWabYe0Ct-4xZ0JjhEA_18_11"></a><a id="Tc_Ojx_kz8Yp0-NrBVwG0JkrQ_18_14"></a><a id="Tc_cY9LsDowi0WzJ3iOrzbWiw_19_0"></a><a id="Tc_3Uhc_Ee6lE-F3Gf_ss4qqQ_19_9"></a><a id="Tc_Wk3MYf1vNkqDOl_vtdJlFA_20_2"></a><a id="Tc_KoTqTR94VU-bsFATOe8SDw_20_5"></a><a id="Tc_3uMMBOLHPEWdvoAUbCpzGQ_20_8"></a><a id="Tc_V2MUzvcDdEG99R2Q_fOGWw_20_9"></a><a id="Tc_XnKZKl6tjkWzri9SAmljlg_20_11"></a><a id="Tc_ZKk4argkbEqzauwKQxYwmQ_20_14"></a><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" name="srt:ScheduleOfValuationAndQualifyingAccountsDisclosureTextBlock" id="Tb_v6bXovipEUG2DxDDBYre_w" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Schedule II &#8212; Valuation and Qualifying Accounts</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:45.27%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.93%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New 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style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.6%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.73%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.62%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.99%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:45.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:19.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Additions</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:45.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Charged </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.73%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:45.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Balance&#160;at</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(Credited)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Charged&#160;to</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Balance&#160;at</b></p></td></tr><tr><td style="vertical-align:bottom;width:45.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Beginning</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;to&#160;Costs&#160;and</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Other</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">End&#160;of</b></p></td></tr><tr><td style="vertical-align:bottom;width:45.27%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Deducted from asset accounts:</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.14%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">of&#160;Period</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.78%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Expenses</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.97%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Accounts</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.8%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Deductions</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.17%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Period</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="16" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:45.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="14" style="vertical-align:bottom;white-space:nowrap;width:52.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:45.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Year ended December&#160;31, 2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.73%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:45.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Allowance for doubtful accounts</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_AllowanceForCreditLossMember_3P4puSHlZ0-MKV1ZgEpVLw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ValuationAllowancesAndReservesBalance" scale="3" id="Tc_4lFCc6zSe0OqvQVUMUtJKw_8_3">736</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.73%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_AllowanceForCreditLossMember_9CuZ9qQkQkyZhNVg12vbmA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ValuationAllowancesAndReservesBalance" scale="3" id="Tc_2Jiy9uK9DkSq6lRNfT48dA_8_15">736</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:45.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Valuation allowance in net deferred tax assets</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_ubRsuDLW0kKOOU1kwiqmyQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ValuationAllowancesAndReservesBalance" scale="3" id="Tc__GjWqmJAhUe6yrPeTJ2MUQ_9_3">116,054</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.6%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_ubkTZuWsAkO4w1IFkEt5FQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ValuationAllowancesAndReservesChargedToCostAndExpense" sign="-" scale="3" id="Tc_-_S4R38xNUiAK2Skz_4tDw_9_6">104,971</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.73%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.62%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.99%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_ruzo5a8GZk2xJncEnDVyGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ValuationAllowancesAndReservesBalance" scale="3" id="Tc__2okkcR72UOnXWKJ64k6WQ_9_15">11,083</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:45.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ValuationAllowancesAndReservesBalance" scale="3" id="Tc_Wib_ICOEoUysgFGHmuaX4Q_10_3">116,790</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.6%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ValuationAllowancesAndReservesChargedToCostAndExpense" sign="-" scale="3" id="Tc_Jg40DJ8uC0GZcZ_XJ7vIKg_10_6">104,971</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.73%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.62%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.99%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ValuationAllowancesAndReservesBalance" scale="3" id="Tc_jMjU6cIshUWEopsjKWGBkQ_10_15">11,819</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:45.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.73%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:45.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Year ended December&#160;31, 2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.73%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:45.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Allowance for doubtful accounts</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2020_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_AllowanceForCreditLossMember_QQ0VBL7qRE2YRwey-lG_eg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ValuationAllowancesAndReservesBalance" scale="3" id="Tc_qOtZA00ttEaf1BL_WLFesA_13_3">736</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.73%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_AllowanceForCreditLossMember_3P4puSHlZ0-MKV1ZgEpVLw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ValuationAllowancesAndReservesBalance" scale="3" id="Tc_hkDdQjIIdEiWAqXaLY64EQ_13_15">736</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:45.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Valuation allowance in net deferred tax assets</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2020_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_cKBh7RwrYkiyqOF1CpqALQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ValuationAllowancesAndReservesBalance" scale="3" id="Tc_2WvmUo2Dy0mKw-j0VhBxNw_14_3">118,443</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.73%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.62%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_BWpjmM2iLkSahHEVu-gtSg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ValuationAllowancesAndReservesDeductions" scale="3" id="Tc_aJXooF9dKE-vKizLoNfsiA_14_12">2,389</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.99%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_ubRsuDLW0kKOOU1kwiqmyQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ValuationAllowancesAndReservesBalance" scale="3" id="Tc_fMA-yUI26UmwZYJS1gQ1fQ_14_15">116,054</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:45.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2020_JUGLvBeldEeSTj1WqQBVdQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ValuationAllowancesAndReservesBalance" scale="3" id="Tc_AqLGf-Wh6E2l4Lnx35Omvw_15_3">119,179</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.6%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.73%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.62%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ValuationAllowancesAndReservesDeductions" scale="3" id="Tc_PQuoktLkAEm7zChLXqTpDg_15_12">2,389</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.99%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ValuationAllowancesAndReservesBalance" scale="3" id="Tc_iAgcH3YxwUeYHntNaBmC8Q_15_15">116,790</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:45.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.73%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:45.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Year ended December&#160;31, 2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.73%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:45.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Allowance for doubtful accounts</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2019_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_AllowanceForCreditLossMember_b9cISaouPUKueqwRlspRcw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ValuationAllowancesAndReservesBalance" scale="3" id="Tc_8btBerVWX0GkYZcYXDcBKw_18_3">602</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_AllowanceForCreditLossMember_SWG0SSmFeEqQkQieCJR1-A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ValuationAllowancesAndReservesChargedToCostAndExpense" scale="3" id="Tc_sur6OfyDxUSf0Urhv80L1g_18_6">140</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.73%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_AllowanceForCreditLossMember_SWG0SSmFeEqQkQieCJR1-A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ValuationAllowancesAndReservesDeductions" scale="3" id="Tc_rbGCjs1_8UC5y9bc4Uc2oQ_18_12">6</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2020_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_AllowanceForCreditLossMember_QQ0VBL7qRE2YRwey-lG_eg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ValuationAllowancesAndReservesBalance" scale="3" id="Tc_DlvkkPx7ckiEWPmZa0ml4w_18_15">736</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:45.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Valuation allowance in net deferred tax assets</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2019_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_kWzc0bkOvES0Cb3erCEi_A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ValuationAllowancesAndReservesBalance" scale="3" id="Tc_2YzsuM2PakGU1o_KDy1r5A_19_3">130,053</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.6%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_-SPpBK_xNkmb5q-qwksjxA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ValuationAllowancesAndReservesChargedToCostAndExpense" scale="3" id="Tc_CdKZmGtle0y3fSL5mrg5ow_19_6">513</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.73%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.62%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_-SPpBK_xNkmb5q-qwksjxA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ValuationAllowancesAndReservesDeductions" scale="3" id="Tc_dChJXKtseESMXMH34-PDjw_19_12">12,123</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.99%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2020_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_cKBh7RwrYkiyqOF1CpqALQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ValuationAllowancesAndReservesBalance" scale="3" id="Tc_5ptQMRQb70m7q8Ww5OqZKg_19_15">118,443</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:45.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2019_dyqJ8hTIuEW6V2L_RveF0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ValuationAllowancesAndReservesBalance" scale="3" id="Tc_azTbXUP9BEyG5FydUsznMg_20_3">130,655</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.6%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ValuationAllowancesAndReservesChargedToCostAndExpense" scale="3" id="Tc_uqvbdCavaU2iys2h6-7PUg_20_6">653</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.73%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.62%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ValuationAllowancesAndReservesDeductions" scale="3" id="Tc_NHU0l6SgwkuS9TcloY0i6g_20_12">12,129</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.99%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA" contextRef="As_Of_12_31_2020_JUGLvBeldEeSTj1WqQBVdQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ValuationAllowancesAndReservesBalance" scale="3" id="Tc_tcSv2-is7kCApAYRTwHn-g_20_15">119,179</ix:nonFraction></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">S-1</p></div></div>
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</XBRL>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EX-21.1
<SEQUENCE>2
<FILENAME>veco-20221231xex21d1.htm
<DESCRIPTION>EX-21.1
<TEXT>
<!--Enhanced HTML document created with Toppan Merrill Bridge  9.14.0.96--><!--Created on: 2/22/2023 06:58:29 PM (UTC)--><!DOCTYPE HTML PUBLIC "-//W3C//DTD HTML 4.01 Transitional//EN" "http://www.w3.org/TR/html4/loose.dtd"><html><head><meta charset="UTF-8"><title></title></head><body><div style="margin-top:30pt;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><a name="_Hlk127265309"></a><b style="font-weight:bold;">Exhibit&#160;21.1</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;text-decoration-color:#000000;text-decoration-line:underline;text-decoration-style:solid;">Subsidiaries of the Registrant</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;text-decoration-color:#000000;text-decoration-line:underline;text-decoration-style:solid;">As of December 31, 2022</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><div><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;background:#ffffff;" align="center"><tr style="height:1pt;"><td style="vertical-align:bottom;width:54.71%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="font-size:1pt;visibility:hidden;">&#8203;</font></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.8%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="font-size:1pt;visibility:hidden;">&#8203;</font></p></div></div></td><td style="vertical-align:bottom;width:21.78%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="font-size:1pt;visibility:hidden;">&#8203;</font></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.8%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="font-size:1pt;visibility:hidden;">&#8203;</font></p></div></div></td><td style="vertical-align:bottom;width:19.89%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="font-size:1pt;visibility:hidden;">&#8203;</font></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:54.71%;background:#ffffff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;"><b style="font-weight:bold;">Subsidiary</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.8%;background:#ffffff;border-bottom:1px solid transparent;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;width:21.78%;background:#ffffff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Jurisdiction&#160;of&#160;Organization</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.8%;background:#ffffff;border-bottom:1px solid transparent;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;width:19.89%;background:#ffffff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Percentage&#160;Ownership(A)</b></p></td></tr><tr><td style="vertical-align:top;width:54.71%;background:#ffffff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:10.1pt;text-indent:-10.1pt;margin:0pt;"><font style="text-decoration-line:underline;text-decoration-style:solid;visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:bottom;width:1.8%;background:#ffffff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:bottom;width:21.78%;background:#ffffff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:bottom;width:1.8%;background:#ffffff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:bottom;width:19.89%;background:#ffffff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td></tr><tr><td style="vertical-align:top;width:54.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:10.1pt;text-indent:-10.1pt;margin:0pt;"><u style="text-decoration-color:#000000;text-decoration-line:underline;text-decoration-style:solid;">U.S. Subsidiaries</u></p></td><td style="vertical-align:bottom;width:1.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:bottom;width:21.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:bottom;width:1.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:bottom;width:19.89%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td></tr><tr><td style="vertical-align:top;width:54.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:10pt;text-indent:-10pt;margin:0pt;">Ultratech International&#160;Inc.</p></td><td style="vertical-align:bottom;width:1.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:bottom;width:21.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">DE</p></td><td style="vertical-align:bottom;width:1.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:bottom;width:19.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">100%</p></td></tr><tr><td style="vertical-align:top;width:54.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:10pt;text-indent:-10pt;margin:0pt;">Veeco APAC LLC</p></td><td style="vertical-align:bottom;width:1.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:bottom;width:21.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">DE</p></td><td style="vertical-align:bottom;width:1.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:bottom;width:19.89%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">100%</p></td></tr><tr><td style="vertical-align:top;width:54.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:10pt;text-indent:-10pt;margin:0pt;">Veeco Process Equipment Inc.</p></td><td style="vertical-align:bottom;width:1.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:bottom;width:21.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">DE</p></td><td style="vertical-align:bottom;width:1.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:bottom;width:19.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">100%</p></td></tr><tr><td style="vertical-align:top;width:54.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:10pt;text-indent:-10pt;margin:0pt;"><font style="text-decoration-line:underline;text-decoration-style:solid;visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:bottom;width:1.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:bottom;width:21.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:bottom;width:1.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:bottom;width:19.89%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td></tr><tr><td style="vertical-align:top;width:54.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:10pt;text-indent:-10pt;margin:0pt;"><u style="text-decoration-color:#000000;text-decoration-line:underline;text-decoration-style:solid;">Foreign Subsidiaries</u></p></td><td style="vertical-align:bottom;width:1.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:bottom;width:21.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:bottom;width:1.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:bottom;width:19.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td></tr><tr><td style="vertical-align:top;width:54.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:10pt;text-indent:-10pt;margin:0pt;">Veeco Asia Pte. Ltd.</p></td><td style="vertical-align:bottom;width:1.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:bottom;width:21.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">Singapore</p></td><td style="vertical-align:bottom;width:1.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:bottom;width:19.89%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">100%</p></td></tr><tr><td style="vertical-align:top;width:54.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:10pt;text-indent:-10pt;margin:0pt;">Veeco GmbH</p></td><td style="vertical-align:bottom;width:1.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:bottom;width:21.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">Germany</p></td><td style="vertical-align:bottom;width:1.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:bottom;width:19.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">100%</p></td></tr><tr><td style="vertical-align:top;width:54.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:10pt;text-indent:-10pt;margin:0pt;">Veeco Instruments Limited</p></td><td style="vertical-align:bottom;width:1.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:bottom;width:21.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">England</p></td><td style="vertical-align:bottom;width:1.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:bottom;width:19.89%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">100%</p></td></tr><tr><td style="vertical-align:top;width:54.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:10pt;text-indent:-10pt;margin:0pt;">Veeco Instruments (Shanghai) Co. Ltd.</p></td><td style="vertical-align:bottom;width:1.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:bottom;width:21.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">China</p></td><td style="vertical-align:bottom;width:1.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:bottom;width:19.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">100%</p></td></tr><tr><td style="vertical-align:top;width:54.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:10pt;text-indent:-10pt;margin:0pt;">Veeco Japan Ltd.</p></td><td style="vertical-align:bottom;width:1.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:bottom;width:21.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">Japan</p></td><td style="vertical-align:bottom;width:1.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:bottom;width:19.89%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">100%</p></td></tr><tr><td style="vertical-align:top;width:54.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:10pt;text-indent:-10pt;margin:0pt;">Veeco Korea LLC</p></td><td style="vertical-align:bottom;width:1.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:bottom;width:21.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">South Korea</p></td><td style="vertical-align:bottom;width:1.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:bottom;width:19.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">100%</p></td></tr><tr><td style="vertical-align:top;width:54.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:10pt;text-indent:-10pt;margin:0pt;">Veeco Malaysia Sdn. Bhd.</p></td><td style="vertical-align:bottom;width:1.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:bottom;width:21.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">Malaysia</p></td><td style="vertical-align:bottom;width:1.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:bottom;width:19.89%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">100%</p></td></tr><tr><td style="vertical-align:top;width:54.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:10pt;text-indent:-10pt;margin:0pt;">Veeco Netherlands BV</p></td><td style="vertical-align:bottom;width:1.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:bottom;width:21.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">Netherlands</p></td><td style="vertical-align:bottom;width:1.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:bottom;width:19.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">100%</p></td></tr><tr><td style="vertical-align:top;width:54.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:10pt;text-indent:-10pt;margin:0pt;">Veeco Taiwan Inc.</p></td><td style="vertical-align:bottom;width:1.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:bottom;width:21.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">Taiwan</p></td><td style="vertical-align:bottom;width:1.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:bottom;width:19.89%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">100%</p></td></tr><tr><td style="vertical-align:top;width:54.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:10pt;text-indent:-10pt;margin:0pt;">Ultra-Tech Technologies Israel Ltd.</p></td><td style="vertical-align:bottom;width:1.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:bottom;width:21.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">Israel</p></td><td style="vertical-align:bottom;width:1.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:bottom;width:19.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">100%</p></td></tr></table></div><div style="font-family:'Times New Roman','Times','serif';font-size:10.0pt;margin-bottom:0pt;margin-top:0pt;min-height:1.19em;position:relative;width:100%;"><hr noshade="true" color="#000000" size="1" width="25.0%" style="background-color:#000000;color:#000000;height:1pt;position:relative;top:0.6em;border:none;margin:0pt;" align="left"></div><table border="0" cellpadding="0" cellspacing="0" style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(A)</td><td style="padding:0pt;"><font style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Includes direct and indirect ownership.</font></td></tr></table></div></div><hr style="background-color:#000000;clear:both;color:#000000;height:2pt;line-height:0;margin-left:10.35%;margin-right:10.35%;margin-top:30pt;page-break-after:avoid;width:79.3%;border-width:0;"></body></html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EX-23.1
<SEQUENCE>3
<FILENAME>veco-20221231xex23d1.htm
<DESCRIPTION>EX-23.1
<TEXT>
<!--Enhanced HTML document created with Toppan Merrill Bridge  9.14.0.96--><!--Created on: 2/22/2023 06:58:28 PM (UTC)--><!DOCTYPE HTML PUBLIC "-//W3C//DTD HTML 4.01 Transitional//EN" "http://www.w3.org/TR/html4/loose.dtd"><html><head><meta charset="UTF-8"><title></title></head><body><div style="margin-top:30pt;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><b style="font-weight:bold;">Exhibit&#160;23.1</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><a name="_Hlk127266141"></a><b style="font-weight:bold;">Consent of Independent Registered Public Accounting Firm</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Board of Directors<br>Veeco Instruments Inc.:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">We consent to the incorporation by reference in the registration statements listed below of our reports, dated February 22, 2023, with respect to the consolidated financial statements and financial statement schedule II &#8211; valuation and qualifying accounts of Veeco Instruments Inc. and the effectiveness of internal control over financial reporting.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><div><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:-0.010307312%;padding-left:0pt;padding-right:0pt;width:100%;background:#ffffff;" align="center"><tr style="height:1pt;"><td style="vertical-align:bottom;width:12.01%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="font-size:1pt;visibility:hidden;">&#8203;</font></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="font-size:1pt;visibility:hidden;">&#8203;</font></p></div></div></td><td style="vertical-align:bottom;width:7.71%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="font-size:1pt;visibility:hidden;">&#8203;</font></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.8%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="font-size:1pt;visibility:hidden;">&#8203;</font></p></div></div></td><td style="vertical-align:bottom;width:76.82%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="font-size:1pt;visibility:hidden;">&#8203;</font></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:12.01%;background:#ffffff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Registration No.</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#ffffff;border-bottom:1px solid transparent;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;width:7.71%;background:#ffffff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Form</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.8%;background:#ffffff;border-bottom:1px solid transparent;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;width:76.82%;background:#ffffff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Plan</b></p></td></tr><tr><td style="vertical-align:top;width:12.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;">333-166852</p></td><td style="vertical-align:top;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:top;width:7.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">S-8</p></td><td style="vertical-align:top;width:1.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:top;width:76.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Veeco Instruments Inc. 2010 Stock Incentive Plan</p></td></tr><tr><td style="vertical-align:top;width:12.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;">333-194737</p></td><td style="vertical-align:top;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:top;width:7.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">S-8</p></td><td style="vertical-align:top;width:1.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:top;width:76.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Veeco Instruments Inc. 2010 Stock Incentive Plan, Veeco Instruments Inc. 2013 Inducement Stock Incentive Plan</p></td></tr><tr><td style="vertical-align:top;width:12.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;">333-211781</p></td><td style="vertical-align:top;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:top;width:7.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">S-8</p></td><td style="vertical-align:top;width:1.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:top;width:76.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Veeco Instruments Inc. Amended and Restated 2010 Stock Incentive Plan, Veeco Instruments Inc. 2016 Employee Stock Purchase Plan</p></td></tr><tr><td style="vertical-align:top;width:12.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;">333-218256</p></td><td style="vertical-align:top;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:top;width:7.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">S-8</p></td><td style="vertical-align:top;width:1.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:top;width:76.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Ultratech, Inc. 1993 Stock Option/Stock Issuance Plan as amended and restated May 31, 2017</p></td></tr><tr><td style="vertical-align:top;width:12.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;">333-231266</p></td><td style="vertical-align:top;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:top;width:7.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">S-8</p></td><td style="vertical-align:top;width:1.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:top;width:76.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Veeco Instruments Inc. 2019 Stock Incentive Plan; First Amendment to Veeco Instruments Inc. 2016 Employee Stock Purchase Plan</p></td></tr><tr><td style="vertical-align:top;width:12.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;">333-242450</p></td><td style="vertical-align:top;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:top;width:7.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">S-3</p></td><td style="vertical-align:top;width:1.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:top;width:76.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Veeco Instruments Inc. Shelf Registration Statement</p></td></tr><tr><td style="vertical-align:top;width:12.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;">333-256004</p></td><td style="vertical-align:top;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:top;width:7.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">S-8</p></td><td style="vertical-align:top;width:1.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:top;width:76.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Second Amendment to Veeco Instruments Inc. 2016 Employee Stock Purchase Plan</p></td></tr><tr><td style="vertical-align:top;width:12.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;">333-265117</p></td><td style="vertical-align:top;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:top;width:7.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">S-8</p></td><td style="vertical-align:top;width:1.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:top;width:76.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Amendment No. 1 to the Veeco Instruments Inc. 2019 Stock Incentive Plan</p></td></tr></table></div><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">/s/ KPMG LLP</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Santa Clara, California <br>February&#160;22, 2023</p></div></div><hr style="background-color:#000000;clear:both;color:#000000;height:2pt;line-height:0;margin-left:10.35%;margin-right:10.35%;margin-top:30pt;page-break-after:avoid;width:79.3%;border-width:0;"></body></html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EX-31.1
<SEQUENCE>4
<FILENAME>veco-20221231xex31d1.htm
<DESCRIPTION>EX-31.1
<TEXT>
<!--Enhanced HTML document created with Toppan Merrill Bridge  9.14.0.96--><!--Created on: 2/22/2023 06:58:28 PM (UTC)--><!DOCTYPE HTML PUBLIC "-//W3C//DTD HTML 4.01 Transitional//EN" "http://www.w3.org/TR/html4/loose.dtd"><html><head><meta charset="UTF-8"><title></title></head><body><div style="margin-top:30pt;"></div><div style="max-width:100%;padding-left:4.47%;padding-right:4.47%;position:relative;"><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><b style="font-weight:bold;">Exhibit&#160;31.1</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">CERTIFICATION PURSUANT TO</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">RULE 13a&#8212;14(a)&#160;or RULE 15d&#8212;14(a)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">OF THE SECURITIES EXCHANGE ACT OF 1934</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:18pt;margin:0pt;">I, William J. Miller, Ph.D., certify that:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><table border="0" cellpadding="0" cellspacing="0" style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">1.</td><td style="padding:0pt;"><font style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">I have reviewed this annual report on Form&#160;10-K for the year ended December&#160;31, 2022 (the &#8220;Report&#8221;) of the Company;</font></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:18pt;text-indent:-18pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><table border="0" cellpadding="0" cellspacing="0" style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">2.</td><td style="padding:0pt;"><font style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Based on my knowledge, this report does not contain any untrue statement of a material fact or omit to state a material fact necessary to make the statements made, in light of the circumstances under which such statements were made, not misleading with respect to the period covered by this report;</font></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:18pt;text-indent:-18pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><table border="0" cellpadding="0" cellspacing="0" style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">3.</td><td style="padding:0pt;"><font style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Based on my knowledge, the financial statements, and other financial information included in this report, fairly present in all material respects the financial condition, results of operations and cash flows of the registrant as of, and for, the periods presented in this report;</font></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:18pt;text-indent:-18pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><table border="0" cellpadding="0" cellspacing="0" style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">4.</td><td style="padding:0pt;"><font style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">The registrant&#8217;s other certifying officer and I are responsible for establishing and maintaining disclosure controls and procedures (as defined in Exchange Act Rules&#160;13a-15(e)&#160;and 15d-15(e)) and internal control over financial reporting (as defined in Exchange Act Rules&#160;13a-15(f)&#160;and 15d-15(f)) for the registrant and have:</font></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><table border="0" cellpadding="0" cellspacing="0" style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(a)</td><td style="padding:0pt;"><font style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">designed such disclosure controls and procedures, or caused such disclosure controls and procedures to be designed under our supervision, to ensure that material information relating to the registrant, including its consolidated subsidiaries, is made known to us by others within those entities, particularly during the period in which this report is being prepared;</font></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><table border="0" cellpadding="0" cellspacing="0" style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(b)</td><td style="padding:0pt;"><font style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">designed such internal control over financial reporting, or caused such internal control over financial reporting to be designed under our supervision, to provide reasonable assurance regarding the reliability of financial reporting and the preparation of financial statements for external purposes in accordance with generally accepted accounting principles;</font></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><table border="0" cellpadding="0" cellspacing="0" style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(c)</td><td style="padding:0pt;"><font style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">evaluated the effectiveness of the registrant&#8217;s disclosure controls and procedures and presented in this report our conclusions about the effectiveness of the disclosure controls and procedures, as of the end of the period covered by this report based on such evaluation; and</font></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><table border="0" cellpadding="0" cellspacing="0" style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(d)</td><td style="padding:0pt;"><font style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">disclosed in this report any change in the registrant&#8217;s internal control over financial reporting that occurred during the registrant&#8217;s most recent fiscal quarter (the registrant&#8217;s fourth fiscal quarter in the case of an annual report) that has materially affected, or is reasonably likely to materially affect, the registrant&#8217;s internal control over financial reporting; and</font></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><table border="0" cellpadding="0" cellspacing="0" style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">5.</td><td style="padding:0pt;"><font style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">The registrant&#8217;s other certifying officer and I have disclosed, based on our most recent evaluation of internal control over financial reporting, to the registrant&#8217;s auditors and the audit committee of the registrant&#8217;s board of directors (or persons performing the equivalent functions):</font></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><table border="0" cellpadding="0" cellspacing="0" style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(a)</td><td style="padding:0pt;"><font style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">all significant deficiencies and material weaknesses in the design or operation of internal control over financial reporting which are reasonably likely to adversely affect the registrant&#8217;s ability to record, process, summarize and report financial information; and</font></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><table border="0" cellpadding="0" cellspacing="0" style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(b)</td><td style="padding:0pt;"><font style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">any fraud, whether or not material, that involves management or other employees who have a significant role in the registrant&#8217;s internal control over financial reporting.</font></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><div><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;table-layout:auto;width:100%;" align="center"><tr style="height:1pt;"><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="font-size:1pt;visibility:hidden;">&#8203;</font></p></div></div></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="font-size:1pt;visibility:hidden;">&#8203;</font></p></div></div></td></tr><tr><td style="vertical-align:top;width:50%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;">/s/ WILLIAM J. MILLER, Ph.D.</p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;">William J. Miller, Ph.D.</p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;">Chief Executive Officer and Director</p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;">Veeco Instruments Inc.</p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;">February&#160;22, 2023</p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td></tr></table></div><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></div></div><hr style="background-color:#000000;clear:both;color:#000000;height:2pt;line-height:0;margin-left:4.47%;margin-right:4.47%;margin-top:30pt;page-break-after:avoid;width:91.06%;border-width:0;"></body></html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EX-31.2
<SEQUENCE>5
<FILENAME>veco-20221231xex31d2.htm
<DESCRIPTION>EX-31.2
<TEXT>
<!--Enhanced HTML document created with Toppan Merrill Bridge  9.14.0.96--><!--Created on: 2/22/2023 06:58:29 PM (UTC)--><!DOCTYPE HTML PUBLIC "-//W3C//DTD HTML 4.01 Transitional//EN" "http://www.w3.org/TR/html4/loose.dtd"><html><head><meta charset="UTF-8"><title></title></head><body><div style="margin-top:30pt;"></div><div style="max-width:100%;padding-left:4.47%;padding-right:4.47%;position:relative;"><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><b style="font-weight:bold;">Exhibit&#160;31.2</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">CERTIFICATION PURSUANT TO</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">RULE 13a&#8212;14(a)&#160;or RULE 15d&#8212;14(a)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">OF THE SECURITIES EXCHANGE ACT OF 1934</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:18pt;margin:0pt;">I, John P. Kiernan, certify that:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><table border="0" cellpadding="0" cellspacing="0" style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">1.</td><td style="padding:0pt;"><font style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">I have reviewed this annual report on Form&#160;10-K for the year ended December&#160;31, 2022 (the &#8220;Report&#8221;) of the Company;</font></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:18pt;text-indent:-18pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><table border="0" cellpadding="0" cellspacing="0" style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">2.</td><td style="padding:0pt;"><font style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Based on my knowledge, this report does not contain any untrue statement of a material fact or omit to state a material fact necessary to make the statements made, in light of the circumstances under which such statements were made, not misleading with respect to the period covered by this report;</font></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:18pt;text-indent:-18pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><table border="0" cellpadding="0" cellspacing="0" style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">3.</td><td style="padding:0pt;"><font style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Based on my knowledge, the financial statements, and other financial information included in this report, fairly present in all material respects the financial condition, results of operations and cash flows of the registrant as of, and for, the periods presented in this report;</font></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:18pt;text-indent:-18pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><table border="0" cellpadding="0" cellspacing="0" style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">4.</td><td style="padding:0pt;"><font style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">The registrant&#8217;s other certifying officer and I are responsible for establishing and maintaining disclosure controls and procedures (as defined in Exchange Act Rules&#160;13a-15(e)&#160;and 15d-15(e)) and internal control over financial reporting (as defined in Exchange Act Rules&#160;13a-15(f)&#160;and 15d-15(f)) for the registrant and have:</font></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><table border="0" cellpadding="0" cellspacing="0" style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(a)</td><td style="padding:0pt;"><font style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">designed such disclosure controls and procedures, or caused such disclosure controls and procedures to be designed under our supervision, to ensure that material information relating to the registrant, including its consolidated subsidiaries, is made known to us by others within those entities, particularly during the period in which this report is being prepared;</font></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><table border="0" cellpadding="0" cellspacing="0" style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(b)</td><td style="padding:0pt;"><font style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">designed such internal control over financial reporting, or caused such internal control over financial reporting to be designed under our supervision, to provide reasonable assurance regarding the reliability of financial reporting and the preparation of financial statements for external purposes in accordance with generally accepted accounting principles;</font></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><table border="0" cellpadding="0" cellspacing="0" style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(c)</td><td style="padding:0pt;"><font style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">evaluated the effectiveness of the registrant&#8217;s disclosure controls and procedures and presented in this report our conclusions about the effectiveness of the disclosure controls and procedures, as of the end of the period covered by this report based on such evaluation; and</font></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><table border="0" cellpadding="0" cellspacing="0" style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(d)</td><td style="padding:0pt;"><font style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">disclosed in this report any change in the registrant&#8217;s internal control over financial reporting that occurred during the registrant&#8217;s most recent fiscal quarter (the registrant&#8217;s fourth fiscal quarter in the case of an annual report) that has materially affected, or is reasonably likely to materially affect, the registrant&#8217;s internal control over financial reporting; and</font></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><table border="0" cellpadding="0" cellspacing="0" style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">5.</td><td style="padding:0pt;"><font style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">The registrant&#8217;s other certifying officer and I have disclosed, based on our most recent evaluation of internal control over financial reporting, to the registrant&#8217;s auditors and the audit committee of the registrant&#8217;s board of directors (or persons performing the equivalent functions):</font></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><table border="0" cellpadding="0" cellspacing="0" style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(a)</td><td style="padding:0pt;"><font style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">all significant deficiencies and material weaknesses in the design or operation of internal control over financial reporting which are reasonably likely to adversely affect the registrant&#8217;s ability to record, process, summarize and report financial information; and</font></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><table border="0" cellpadding="0" cellspacing="0" style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(b)</td><td style="padding:0pt;"><font style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">any fraud, whether or not material, that involves management or other employees who have a significant role in the registrant&#8217;s internal control over financial reporting.</font></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><div><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;table-layout:auto;width:100%;" align="center"><tr style="height:1pt;"><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="font-size:1pt;visibility:hidden;">&#8203;</font></p></div></div></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="font-size:1pt;visibility:hidden;">&#8203;</font></p></div></div></td></tr><tr><td style="vertical-align:top;width:50%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">/s/ John P. Kiernan</p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;">John P. Kiernan</p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;">Senior Vice President and Chief Financial Officer</p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;">Veeco Instruments Inc.</p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;">February&#160;22, 2023</p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td></tr></table></div><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></div></div><hr style="background-color:#000000;clear:both;color:#000000;height:2pt;line-height:0;margin-left:4.47%;margin-right:4.47%;margin-top:30pt;page-break-after:avoid;width:91.06%;border-width:0;"></body></html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EX-32.1
<SEQUENCE>6
<FILENAME>veco-20221231xex32d1.htm
<DESCRIPTION>EX-32.1
<TEXT>
<!--Enhanced HTML document created with Toppan Merrill Bridge  9.14.0.96--><!--Created on: 2/22/2023 06:58:50 PM (UTC)--><!DOCTYPE HTML PUBLIC "-//W3C//DTD HTML 4.01 Transitional//EN" "http://www.w3.org/TR/html4/loose.dtd"><html><head><meta charset="UTF-8"><title></title></head><body><div style="margin-top:30pt;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><b style="font-weight:bold;">Exhibit&#160;32.1</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">CERTIFICATION PURSUANT TO</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">18 U.S.C. SECTION&#160;1350,</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">AS ADOPTED PURSUANT TO</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">SECTION&#160;906 OF THE SARBANES-OXLEY ACT OF 2002</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:18pt;margin:0pt;">In connection with the Annual Report of Veeco Instruments Inc. (the &#8220;Company&#8221;) on Form&#160;10-K for the year ended December&#160;31, 2022 as filed with the Securities and Exchange Commission on the date hereof (the &#8220;Report&#8221;),&#160;I, William J. Miller, Ph.D., Chief Executive Officer of the Company, certify, pursuant to 18 U.S.C. Section&#160;1350, as adopted pursuant to Section&#160;906 of the Sarbanes-Oxley Act of 2002, that:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><table border="0" cellpadding="0" cellspacing="0" style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(1)</td><td style="padding:0pt;"><font style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">The Report fully complies with the requirements of Section&#160;13(a)&#160;or 15(d)&#160;of the Securities Exchange Act of 1934; and</font></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:18pt;text-indent:-18pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><table border="0" cellpadding="0" cellspacing="0" style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(2)</td><td style="padding:0pt;"><font style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">The information contained in the Report fairly presents, in all material respects, the financial condition and results of operations of the Company.</font></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><div><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;table-layout:auto;width:100%;" align="center"><tr style="height:1pt;"><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="font-size:1pt;visibility:hidden;">&#8203;</font></p></div></div></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="font-size:1pt;visibility:hidden;">&#8203;</font></p></div></div></td></tr><tr><td style="vertical-align:top;width:50%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">/s/ WILLIAM J. MILLER, Ph.D.</p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;">William J. Miller, Ph.D.</p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;">Chief Executive Officer and Director</p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;">Veeco Instruments Inc.</p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;">February&#160;22, 2023</p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td></tr></table></div><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">A signed original of this written statement required by Section&#160;906 has been provided to Veeco Instruments Inc. and will be retained by Veeco Instruments Inc. and furnished to the Securities and Exchange Commission or its staff upon request.</p></div></div><hr style="background-color:#000000;clear:both;color:#000000;height:2pt;line-height:0;margin-left:10.35%;margin-right:10.35%;margin-top:30pt;page-break-after:avoid;width:79.3%;border-width:0;"></body></html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EX-32.2
<SEQUENCE>7
<FILENAME>veco-20221231xex32d2.htm
<DESCRIPTION>EX-32.2
<TEXT>
<!--Enhanced HTML document created with Toppan Merrill Bridge  9.14.0.96--><!--Created on: 2/22/2023 06:58:50 PM (UTC)--><!DOCTYPE HTML PUBLIC "-//W3C//DTD HTML 4.01 Transitional//EN" "http://www.w3.org/TR/html4/loose.dtd"><html><head><meta charset="UTF-8"><title></title></head><body><div style="margin-top:30pt;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><b style="font-weight:bold;">Exhibit&#160;32.2</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">CERTIFICATION PURSUANT TO</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">18 U.S.C. SECTION&#160;1350,</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">AS ADOPTED PURSUANT TO</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">SECTION&#160;906 OF THE SARBANES-OXLEY ACT OF 2002</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:18pt;margin:0pt;">In connection with the Annual Report of Veeco Instruments Inc. (the &#8220;Company&#8221;) on Form&#160;10-K for the year ended December&#160;31, 2022 as filed with the Securities and Exchange Commission on the date hereof (the &#8220;Report&#8221;),&#160;I, John P. Kiernan, Senior Vice President and Chief Financial Officer of the Company, certify, pursuant to 18 U.S.C. Section&#160;1350, as adopted pursuant to Section&#160;906 of the Sarbanes-Oxley Act of 2002, that:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><table border="0" cellpadding="0" cellspacing="0" style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(1)</td><td style="padding:0pt;"><font style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">The Report fully complies with the requirements of Section&#160;13(a)&#160;or 15(d)&#160;of the Securities Exchange Act of 1934; and</font></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:18pt;text-indent:-18pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><table border="0" cellpadding="0" cellspacing="0" style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(2)</td><td style="padding:0pt;"><font style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">The information contained in the Report fairly presents, in all material respects, the financial condition and results of operations of the Company.</font></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><div><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;table-layout:auto;width:100%;" align="center"><tr style="height:1pt;"><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="font-size:1pt;visibility:hidden;">&#8203;</font></p></div></div></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="font-size:1pt;visibility:hidden;">&#8203;</font></p></div></div></td></tr><tr><td style="vertical-align:top;width:50%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">/s/ John P. Kiernan</p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;">John P. Kiernan</p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;">Senior Vice President and Chief Financial Officer</p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;">Veeco Instruments Inc.</p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:7.2pt;text-indent:-7.2pt;margin:0pt;">February&#160;22, 2023</p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td></tr></table></div><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">A signed original of this written statement required by Section&#160;906 has been provided to Veeco Instruments Inc. and will be retained by Veeco Instruments Inc. and furnished to the Securities and Exchange Commission or its staff upon request.</p></div></div><hr style="background-color:#000000;clear:both;color:#000000;height:2pt;line-height:0;margin-left:10.35%;margin-right:10.35%;margin-top:30pt;page-break-after:avoid;width:79.3%;border-width:0;"></body></html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>8
<FILENAME>veco-20221231x10k004.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
begin 644 veco-20221231x10k004.jpg
M_]C_X  02D9)1@ ! @   0 !  #_VP!#  ," @," @,# P,$ P,$!0@%!00$
M!0H'!P8(# H,# L*"PL-#A(0#0X1#@L+$!80$1,4%145# \7&!84&!(4%13_
MVP!# 0,$! 4$!0D%!0D4#0L-%!04%!04%!04%!04%!04%!04%!04%!04%!04
M%!04%!04%!04%!04%!04%!04%!04%!3_P  1" ,G \L# 2(  A$! Q$!_\0
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M **** "BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH **** "BBB@
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MXB<'@5J_!C]M?X@Z'\;K+X0?'[P98>$O$^IKG2=7TB4M979[+@LPY[,&X/!
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M01Z5\2_LK?#?X[^)? WQ>\0?!SXE/X7_ ++UN<S>'TME9M0D&]LK*RMM;:,
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M6[6MR;201R[#UVL0<'\*H?!GX0:%\"_AWI7@OPVUV^C::K) ;Z42RX)R=S
M'D^E<_X2_:H^%GCC6YM)T?Q?:SWD<<DRF>":VAG2/_6/#-*BQS*N#DQLP&*3
MP?\ M4_"_P >^*(/#^B>*5NM3N5=[426-S!#=A?O&":2-8YL?],V:@#@_CS_
M ,$_/A1^T!XJ_P"$HU6WU7P[XG( DU?PW>"UFFQT+@JRL<<;L9]ZU?V>/V'O
MA?\ LU:G<ZQX:L;W4O$5PI237-<N?M-WM/4*0JJN>^U03ZUNZ7^U[\(M9\06
MVC6?C.VFO+BY-FDGV6X6W%P&*^2TYC$229! 1F#'L*O_ +0'QAN/A-X;TO\
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MQ5W4O#OQ!MM4G_X2#P-J/]J^)/AF-&/_  CUAYEA:WZ,7:%_+.V+(( 'W<Y
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MIX9N?$/QS^(]CX?\:^,=0TNWT[P;::MM\'ZVUK;WEW*Q62Y\ZW8>:BX! #;
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M %%%% !1110 4444 %%%% !1110 4444 %%%% !1110 4444 %%%% !1110
M4444 %%%% !1110 4444 %%%% !1110 4444 %%%% !1110 4444 %%%% !1
M110 4444 %%%% !1110 4444 %%%% !1110 4444 %%%% !1110 4444 %%%
M% !1110 4444 %%%% !1110 4444 %%%% !1110 4444 %%%% !1110 4444
M %%%% !1110 4444 %%%% !1110 4444 %%%% !1110 4444 %%%% !1110
M4444 %%%% !1110 4444 %%%% !1110 4444 %%%% !1110 4444 %%%% !1
M110 4444 %%%% !1110 4444 %%%% !1110 4444 %%%% !1110 4444 %%%
M% !1110 4444 %%%% !1110 4444 %%%% !1110 4444 %%%% !1110 4444
M %%%% !1110 4444 %%%% !1110 4444 %%%% !1110 4444 %%%% !1110
M4444 %%%% !1110 4444 %%%% !1110 4444 %%%% !1110 4444 %%%% !1
M110 4444 %%%% !1110 4444 %%%% !1110 4444 %%%% !1110 4444 %%%
M% !1110 4444 %%%% !1110 4444 %%%% !1110 4444 %%%% !1110 4444
M %%%% !1110 4444 %%%% !1110 4444 %%%% !1110 4444 %%%% !1110
M4444 %%%% !1110 4444 %%%% !1110 4444 %%%% !1110 4444 %%%% !1
M110 4444 %%%% !1110 4444 %%%% !1110 4444 %%%% !1110 4444 %%%
M% !1110 4444 %%%% !1110 4444 %%%% !1110 444FX'O0 M%)FC(H 6BD
MS2T %%%% !1110 4444 %%%% !1110 4444 %%%% !1110 4444 %%%% !11
M10 4444 %%%% !1110 4444 %%%% !1110 4444 %%%% !1110 4444 %%%%
M !1110 4444 %%%% !1110 4444 %%%% !1110 4444 %%%% !1110 4444
M%%%% !1110 4444 %%%% !1110 4444 %%%% !1110 4444 %%%% !1110 4
M444 %%%% !1110 4444 %%%% !1110 4444 %%%% !1110 4444 %%%% !11
M10 4444 %%%% 'GO[0'CO6OAC\&/&/BKP]I8UG6=(TR:[M;-D9U=U7(W*O+
M?>(') (KY;_93^/?QG^*'PI\<:_IWB+P;\6-0C28Z):6[#3KNVNC,RI'<1'
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M "BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH
M**** "BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH **** "BBB@ H
MHHH **** "BBB@ HHHH **** "BBB@!*,8I:* "BBB@ I#TI:0]* ,#0/^1@
M\1?]=XO_ $4M=!7/Z!_R,'B+_KO%_P"BEKH* "BBB@ HHHH **** "BBB@ H
MHHH **** "BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH **** "BB
MB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH ****
M "BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH
M**** "BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH **** "BBB@ H
MHHH **** "BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH *0]*6D/2
M@# T#_D8/$7_ %WB_P#12UT%<_H'_(P>(O\ KO%_Z*6N@H **** "BBB@ HH
MHH **** "BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH **** "BBB
M@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH ****
M"BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH *
M*** "BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HH
MHH **** "BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH **** "BBB
M@ I#TI:0]* ,#0/^1@\1?]=XO_12UT%<_H'_ ",'B+_KO%_Z*6N@H **** "
MBBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH **
M** "BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHH
MH **** "BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH **** "BBB@
M HHHH **** "BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH **** "
MBBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH 0G
M%9^C^(-,\06\L^F:A;:C!#-);226LJR*DJ-M="5)PRD$$=0:X/\ :6\.WWBW
MX$^-M%TWQ!;^%K_4-+FMH-5N[C[/#"[C WR9&P'[N1R-W%?!W[''A3PFEC\2
M_A=K5AK_ ,(O%VHZ7?\ V_4]$U7.ESV4%VT4LUN[%E5XCF,R'DINYH _3J*X
MBF!,<BR $J2AS@CJ..]"3QR9V.K[6VG:<X/H?>OS#\,:9'X(\*?'CXE?!#3-
M2\)_">P\#S:1IMT\DJKKNIQD[]5B5R2!&H9?,XW')_O 8-Y$?V;K*TF^'%Q=
M:2WB;X)3Z[JQBN7<3WXB5Q?$,3B7+M\P[<4 ?JVDR29V.&P=IVG.#Z?6G'I7
MY^_LS^$-,^#7[27PJTGP@)[+3?&7PT75M>MS<O*EW> )(+M@Q/[PLS#<.QQ7
MWU?W@T^REN##-.(UW>7 A=V]@HZF@#(T#_D8/$7_ %WB_P#12UT%<IX,U :I
MJOB"X6WN+8&XB'EW41C<8B7^$]JZN@ HHHH **** "BBB@ HHHH **** "BB
MB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH ****
M "BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH
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MQ;(R,5SGP6_;%^%6A^/_ !+X F^)]O/IEC,JZ7<>)IY+:>)LE9+0R7(5I0C
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M9[_:AT'XY17FDSVL_A7Q[I/[O6/"FJ#9=VCC@LH/^LC)Z./QKVK(KPO]H?\
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MOJVWMHK6"."&-8X8U"(BC 50, #Z"I ,4M "4M%% !1110 4444 %(1FEHH
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M@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH ****
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M@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH ****
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M (36[^(&CS>%OM7V'^T["5KR(SXSY?[D,<X]JQI?VT?AO=_#%/'OAY]>\8Z
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MU@M(([6!?NQP($4?@,"IMBYSCGU- 'E7QSG^,@@TN'X2VO@]Y)BZWUUXKEN
M(!QM:-(A\W?.3Z5\D^#/#WQJT.YU?PAXM_:.\.?"2YMKVXNI;&V\.VR->QS2
MF4W%M=7++O5BY&1ED*[6 P"?T,QQ6=K'AO2?$,21:IIEGJ4<;;D2\MTF"GU
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M %%%% !1110 4444 %%%% !1110 4444 %%%% !1110 4444 %%%% !1110
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M\3_:60=C)';#.?85T^H?!KQ=XX\;P^.O!O[0?B&R\,ZA-%>)H]O!::AITD0
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MQE@JC)QFW )_$5\N?%']H#XL_$3QIX*UG3M"T[X!>'&>Z33_ !3\2)D\^4-
MP8_9!Q&VWE0Y()Q6/\0?A-\(/$_@;7-5^(G[14OQB\6+9N]M9W/B2*WL!,!\
M@BLH'QG/;)SZ4 ?2WB']O_X'>%K&U:[\<V5]J=Q%')_9.B*^I72LRAMA6 ,
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M0 4444 %%%% !1110 4444 %(>E+2'I0!@:!_P C!XB_Z[Q?^BEKH*Y_0/\
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M0 4444 %%%% !1110 4444 %%%% !1110 4444 %%%% !2'I2TAZ4 8&@?\
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M^?.2\T[?,Q)YP,+[4 >+^'_V6O&G[0&KVGBG]HW5HKRRB<7&G_#;192NDV3
MY4W+@YN9!WR=N?4<5]7Z9I5GHUA!8V%M#965N@CAMK>,1QQH.BJH   ]!5K%
M+0 4444 %%%% !1110 4444 %%%% !1110 4444 %%%% !1110 4444 %%%%
M !1110 4444 %%%% !1110 4444 %%%% !1110 4444 %%%% !1110 4444
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MXIU?GAX _:3\/>"_C7J,OPW^ 7Q(2VO-"2)]&L_#GV)VD$^1,ZR2;0N,KO\
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M/$7_ %WB_P#12UT% !1110 4444 %%%% !1110 4444 %%%% !1110 4444
M%%%% !1110 4444 %%%% !1110 4444 %%%% !1110 4444 %%%% !1110 4
M444 %%%% !1110 4444 %%%% !1110 4444 %%%% !1110 4444 %%%% !11
M10 4444 %%%% !1110 4444 %%%% !1110 4444 %%%% !1110 4444 %%%%
M !1110 4444 %%%% !1110 4444 %%%% !1110 4444 %%%% !1110 4444
M%%%% !1110 4444 %%%% !1110 4444 %(>E+2'I0!@:!_R,'B+_ *[Q?^BE
MKH*Y_0/^1@\1?]=XO_12UT% !1110 4444 %%%% !1110 4444 %%%% !111
M0 4444 %%%% !1110 4444 %%%% !1110 4444 %%%% !1110 4444 %%%%
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M(NR3T'E;MV3Z8S6ROC'17\1W.@#4[4ZU;6JWLUCY@\V. G:)&7LI/&: *?\
M9GBK_H/:=_X*V_\ CU']F>*O^@]IW_@K;_X]4,'Q8\&W/A*Z\4Q^*-(_X1NU
M=XY]6-[&MK&R-M<-(3M!!X/-:'@_QOX?^(.B1:QX9UJP\0:3*2$O=-N4GA8C
MJ RDC(]* *O]F>*O^@]IW_@K;_X]1_9GBK_H/:=_X*V_^/5TU% ',_V9XJ_Z
M#VG?^"MO_CU']F>*O^@]IW_@K;_X]7344 <S_9GBK_H/:=_X*V_^/4?V9XJ_
MZ#VG?^"MO_CU=-10!S/]F>*O^@]IW_@K;_X]1_9GBK_H/:=_X*V_^/5TU% '
M,_V9XJ_Z#VG?^"MO_CU']F>*O^@]IW_@K;_X]7344 <S_9GBK_H/:=_X*V_^
M/4?V9XJ_Z#VG?^"MO_CU=-10!S/]F>*O^@]IW_@K;_X]1_9GBK_H/:=_X*V_
M^/5T%U=PV-M+<3R+#!$I=Y'.%50,DD]@!7*R?&#P1#X'3QE+XLT:'PFXRNM2
MWT:6C<[>)"0IY!% #-6\*^)-8MTAG\06"JDBRC9I; Y4Y'_+:KO]E^*O^@]I
MW_@J;_X]4=G\5/!^H^"I?%]IXGTF\\+Q(9'UBVO$DM54=29%)'%4&^.7P]3Q
M19^&F\;^'T\0WB+);Z4^IPK<RJPRNV,MN.000,<T :?]F>*O^@]IW_@K;_X]
M1_9GBK_H/:=_X*V_^/5#<_%CP79^,X?",_BO18?%,R[H]%DOXEO'';$1;<?R
MKJP<B@#FO[,\5?\ 0>T[_P %;?\ QZC^S/%7_0>T[_P5M_\ 'JZ:B@#F?[,\
M5?\ 0>T[_P %;?\ QZC^S/%7_0>T[_P5M_\ 'JZ:B@#F?[,\5?\ 0>T[_P %
M;?\ QZC^S/%7_0>T[_P5M_\ 'JZ:B@#F?[,\5?\ 0>T[_P %;?\ QZC^S/%7
M_0>T[_P5M_\ 'JZ:B@#F?[,\5?\ 0>T[_P %;?\ QZC^S/%7_0>T[_P5M_\
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MF>*O^@]IW_@K;_X]6AX6\6:-XVT6#5] U.UUC2Y\^5>64HEB?!P<,.#R*UJ
M.9_LSQ5_T'M._P#!6W_QZC^S/%7_ $'M._\ !6W_ ,>KIJ* .9_LSQ5_T'M.
M_P#!6W_QZC^S/%7_ $'M._\ !6W_ ,>KIJ* .9_LSQ5_T'M._P#!6W_QZC^S
M/%7_ $'M._\ !6W_ ,>KIJ* .9_LSQ5_T'M._P#!6W_QZC^S/%7_ $'M._\
M!6W_ ,>KIJ* .9_LSQ5_T'M._P#!6W_QZC^S/%7_ $'M._\ !6W_ ,>KIJ*
M.9_LSQ5_T'M._P#!6W_QZC^S/%7_ $'M._\ !6W_ ,>KIJJ:GJEIHNGW-]?W
M,5G9VT;2S7$[A$C11DLQ/  '>@#$_LSQ5_T'M._\%;?_ !ZHCX:UJ\U+3[C4
MM8M;B"SE\X16]@8F9L$<L9&XY]*CU7XN^"="\'6WBS4_%>C:=X9N55X-7N[Z
M.*VE#?=*R,0&S[5*?BGX0/@X>+$\2Z7-X9(4C5X;M)+8Y8*,2*2#DD#ZF@#J
M1TI:XF'XV^ +CQ@OA./QIH#^)V&5T8:E#]K/&<>5NW9QSC&:?_PN?P&?&O\
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M##X<:7HVF:A;Z[;:YXO\9W]TGF63QL"EM;R2-O:1L!=B':H-?8WA']F?X7^
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M<>,&.BZ8KMF\EM1Y,$03.V3+9X8%1UJ?X3_LY?\ "7?L^_$>_P!?U3_A&?\
MA*+V;7[GPSX/U%8HK.)86,=I*T1X#  NJXR>*^I=>_9J^&'BGPKIWAO6/!&D
M:GH6G3/<6MA=PF2.*1R2[@$]3DY)K3\ ? SP!\*](U+2_"/A+2O#VG:E_P ?
MEM86XC2?Y=OS =>"10!Y+_P3LB6#]D?P/&@VHD4J@>@$C5]*5B^#_!NB> -
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M1>3IMG=6P>.U3^Z@["IO!?[._P -_AU<64WACP;I6A269E:W^PQ&,1F4 2$
M'&6  )]J /C'Q-X0^&_Q-^.]CX ^&FF:5H]GX=\2)KOBCQM=W:_:GO0VX6EM
M+(QDD9C@, =H' I?$7@_X:_$OXZZ=X ^&6FZ/H]CX;\2IKWB?QK=7:_:7O0V
M[[';2R,9)"QX;!*@<"OJV/\ 8T^"$6MKK"_"_P -C5%G%T+O[$/,$N[=OSZY
MYSZTL7[&WP2@UU-:C^&'AM=52X%VMW]B'F"8-N#Y]<\Y]: /9%X6G4@&!BEH
M **** "BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH **** "BBB@
MHHHH **** "BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH **** "B
MBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH ***
M* "BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH
M **** "BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH **** "BBB@
MHHHH **** "BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH **** "B
MBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH ***
M* "BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH
M **** "BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH **** "BBB@
MHHHH **** "BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH **** "B
MBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH ***
M* "BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH
M **** "BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH **** "BBB@
MHHHH **** "BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH **** "B
MBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH ***
M* "BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH
M **** "BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH **** "BBB@
MHHHH **** "BBB@ HHHH **** "BBB@ HHHH ***3/- "T4F1G&>:6@ HHHH
M **** "BD!S2T %%%)0 M%%% !1110 4444 %%)2T %%)FEH **** "BBB@
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M$A\&_P#@FA_^)H [GPW\8O 7C'5$TS0/&WAS6]1=2RVFG:M;W$S #)(1')(
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MFU6XU@Z98QV.GQQ1ZG-)*XBAM<R!3L"X=G(P>YKZ2^#7QKD^+0U>"\\$^*O
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M>W&: /4**** "BBB@ HHHH IZOK-AX?TV?4-4OK;3;"W7?-=7<RQ11KZL[$
M#W)KG]*^+7@C7=)O]4TWQCH&H:98#==WMKJD$L-N/61U<JGXD5J^+/".B>.M
M!N]$\0Z5::UI%VNR>QOH5EAE'HRG@UQ&B_LR?"?P[HNKZ1I?PY\,V&EZO&(M
M0M+?3(DCND!R%D4## 'UH Z+2OBSX(UW2;[5=-\8Z!J&F6 S=WMKJD$L-N/^
MFCJY5/Q(KRWXC?M:>'_#]UI[>$KS1_&FFVY-YXAO=.U6*2/2M.4A7F+(Q!?+
M+A"02,^E=?I/[,OPF\.Z%J^CZ9\.?#-CI6KHL=_9P:9$D5TJG*B10,, ?6O$
MO"W[,]_X&7Q]I5E\%_AWJ'A[Q/>Y>T35FM8#:( (8S +-@&'S,3D_,WL* /H
M_2/BYX'U[1[[5M-\9:!J&EV*AKN]M=4@DAMP>09'5R$_X$12Z9\6_ ^MZ3?Z
MIIWC+P_?Z98 -=WMKJD$D-N#T,CJY5/Q(KR/]G_]E?PSX+^%.I^&/$WP[\'V
MG]HW$B75IIT2W45W;!RT N':)/,= Q7)7^$'.2:[O1_V9/A-X?T+5M%TWX<^
M&K'2=654O[*#3(EBNE4Y42*!AL'IF@#K?"GQ!\+^/(IY?#7B32/$,<!"S/I5
M]%=+&3T#&-C@GWKY&_;Q^-/C#X;>._ ^EMXQU?X8_#/44F.K>+]$T<7\T<XQ
MY<))!\M3R<@9^N,5]1?#OX)> ?A(]XW@OP=HOA9KP*+@Z39);F4#INV@9Q7E
M/[1'@OXU?\)YH?BKX97ND^(]$AMI+35O OB.<P6=X&^[*K!2-X_VN.GTH P_
MV2_B%XK\0> /&=[?_%?PS\5M$LB7T3Q';NL%U&FPG9?Q!%$1! Z\X!Y]/GO]
MBO\ :6^)OQA^.=E8OXRU3Q/;VOVT^,+6]2R&DV:ARMLU@\8#D$X'4Y[UV/@S
M]AWQ[KG@SXVW.O-X<^'VN?$&U6WM- \+EFT^RV\YE( R6(P=O8MZXKR_QS^P
MI\;?B<WABX3P9X$\"WGA738;"5M.UF8IXC6)E*+(L:*$4E2<MSDGF@#N/BY\
M6O&6H_M=>//",G[1*_!CPWI&E6]Y9&\M[.6"65@-R 3;23WX)/'2O<?^"?WQ
MJ\7_ !J^%6M7?BW58?$LVE:Q/IUIXCM[7[,FIP)]V7: %_$ =17/>$OV/)?$
M?[3GB?QY\3/!_A37=!U'0K.VMK6X1;Y;>[0+YFQ)4R%&" QY(KZST30--\,Z
M5!INCZ?:Z7IUNNR&TLH5ABC7T5%  _"@#\\?VC/V@O&&D?M*^)O"OBSXPZM\
M"?#EK;1MX8N;311<V>I.0,R3S%&. W!7H .W?W'3OVLI/@A\"_ &N_%34K3Q
MSJ>OWQTR'6? :B\M[PX+1R[?DY(&"JC@]NM9?Q7^'/[0>F^.O%XT*Q\*?%[P
M!XC53:Z+XRN!$=&DV[2$!0JT?? .3[8KS_3OV$O'F@?!WX4>&HKG1KS4]%\:
MMXFU6&"=HK6UB<',-ON7+!>,# H ]"F_X*1>';<^([.3X8?$5=?\._OM6T8Z
M5%Y]E:X!^T2MYNQ5P1QG=DCBN]\5_MAZ9I>@>%]5\,^!/&GCZ/7]/_M2)= T
ML,EM;@9)FED98U8<C:&)X-<3??LS^,KCXD_M#ZXL>G_8_'&D)9:.3<_,9!&
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M(3PC_94,D-]!NVRO),W[P-UQM/ITK]$/"VM)XC\-:5JT:E([^TBNE0]5#H&
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MR4 &3E@,CI7Z2?#_ ,'V7@#P5HGAS3HUBLM+LXK2-%Z850* .AHHHH ****
M"BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH **** "BBB@ I*6B@
MHHHH **** $Q2T44 %%%% "4M%% !1110 F**6B@!*,4M% !1110 4444 )1
M2T4 )BEHHH 3%+110 4444 %%%% !1110 4444 %%%% !1110 4F*6B@!*,4
MM% "8I:** "BBB@!*6BB@ HHHH *:Z+(C*RAE88((R"*=10!1TC1-.T"T-KI
MEA;:=;%B_DVD*Q)N/4[5 &3ZU>HHH 3%+110 F*6BB@ HHHH **** "BBB@
MHHHH **** "BBB@ HHHH **** "BBB@ HHHH 3%+110 4A&:6B@"CIFAZ=HO
MG_V?86UCY\AEE^S0K'YCGJS;0,GW/-7J** "BBB@ I*6B@ HHHH **** $Q7
M*W_PH\%:KXEC\17OA'0KOQ!&04U6?3(7NE(Z$2E=P_.NKHH P?\ A _#?_"3
MGQ)_8&ECQ$8Q"=7^QQ_:R@Z+YNW?CVS6Z!BEHH **** "BBB@ HHHH ****
M"BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH *
M*** "BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HH
MHH **** "BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH **** "BBB
M@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH ****
M"BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH *
M*** "BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HH
MHH **** "BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH **** "BBB
M@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH ****
M"BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH *
M*** "BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HH
MHH **** "BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH **** "BBB
M@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH ****
M"BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH *
M*** "BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HH
MHH **** "BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH **** "BBB
M@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH ****
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ME_BGX\^'^O:/'HADT/PJ]M+/>^(XO#<^OB&=2/+AFA@D5X8F&XF7:V,8XZT
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M=/\ "SXF>._BS\7O$0M=2TG2O NB"RD%C)IS2WUV+FV$NTS>8%CV$CD*<YH
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M "BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH
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M-P.IK*^(GP2\*_%'4(+S7[2>XGAL+O34,5R\0$%PH6484]2%&#U':O'/A/\
MM"^*O#OA?X>0?$;PTFGV&O: MS9:W;ZL;V:26&T$SB[1HTV/(B.X*L_/#'-9
MO@+]N[3_ !9K.A1SV_ADV7B..5M+M])\417VI6S+$TJ)>VRH/*+JO56?8Q"M
MS0!]#_\ "M-"'B?P_P"(/(E_M+0[&73K*3SFVI#($# KT8_NUY//%8GQ#^!^
M@_$;7+36I[[6]$UFWMWL_M^@ZI+8R2V[D%H9-APZD@'D9!Y!%9GP"^*'BKXR
M>!X_%&L>&+7PEI^IP1W&DI'J7VV=XV4Y:5?+4(00" "V0><5X]CQ%\+/VA?
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M2-8LTJW3JN;28S0?*#CAR2?7H:3Q;\!/!OCB?Q+-K&G2W4GB""W@O6%S(AQ
M6:%XRI'ENK,2&7!SCTKT2B@#Q_2_V6/ ]G#XC745U?Q-/XALDT_4[K7]5FO)
MIX4)*#<Q^0J2<%,$'GKS5>#]D[P6UEJL&I7GB/7I-2M4T^:ZU;7;BXG%HK!O
MLZ.6RL;$#<!RP'S$U[110!Y'KG[/.DIJ-QJ'A.ZN_"%[?7-C+?-IEU+##,EL
MPVCRD8+DH-A[%>#D"NV^('P\T;XG>&WT/7H)+C3VFBG*13-$V^-PZ'<O/4"N
MFHH \XC^ '@Z+PG'X<6RN!I4>L'75C^U/N^U&?SRV[.<;SG;T[5DWG[+G@>^
M\4S:N\>J+:W&H)JUQH::G,NESWJX*W#VV=A?*J?0D D$BO7:* /&]6_92\$Z
MC_9\EM+KNBW=E+=O'>:1K,]K,RW+^9/&SJV61FYVGIVQ2C]E+P+:>'O#NDZ4
MNKZ#_8!F&G7^EZM/#>0I,Q:6,S;BS(Y)R&S^?->QT4 >-Z;^R;\.])T2STJW
MTZ]^QVGVWRQ)J,TC_P"EJ5G+.S%F+ GDDD$YKH-=^"V@WO\ 8MY;V,<^IZ!I
M<^EZ6M[+(]NL4D7E%94!^<%0 2>:]$HH ^0O@W^S=XJTSXL>%/$&M>'H_#-A
MX6AN$B!\676LQRF2,IY5G#* +6W&=VTY88"]!7TQ?_#[1]2\;Z9XLGAD;6M.
MM)K*WE$K!%BE(+@IT).T<GI724M 'C\'[+/@JW\0KJ$;:TFGKJ']JC0!K$XT
ML7>[=YWV;=MSN^;;]W/.,UL^$?@#X/\ !&O?VQI5G<17WDW4&^2Z=QMN)1++
MP3W<9'IT%>CT4 >5ZU^S/X!\1?#6S\!ZCI,MSX<M+P7\,#74F]9O-,N=X.XC
M<3QTQQTI?'/[./A3QQK;:LT^LZ!?S6BZ?=R^'M5FL/MELOW8IA&0'4#(!X(!
M."*]3HH \9UW]D[P+K+[(?[:T:PDL8M,N].TG6)[:VO;:(82.:-6P^ 2-W#$
M$Y)S5FY_9;\"3Z[=:E':ZA:+<BS\VPMM2FCLV:UQY#^2#MW* !GKCBO7:* .
M!U/X(^%=7N/&4US:3M)XN@BM]5(N7'FI&I"A<'Y.">E<YXD_99\%^(K][I9=
M<T;[3:0V.H0:-K,]I%J,,2[46X1& <A>-W#$$C.*]AHH X*T^"/A.QL?$ME;
M6$D%KX@MHK2]B2X?!BCC\M%3GY,*<<5%HWP-\->'O&>E^)]-_M"SU*PTN/1U
M2*_E$$]M& (UECSMD*XX8C(KT*B@#@/B/\%M"^)>H:;J=Y<ZKI&MZ<KQVNKZ
M'J$EE=1QO]^/>A^9&[J01WZU5\/?L^>"O"R^%AING30-X<FFN;*1KJ1W::8$
M2R2LQ)E9LDDMGFO2:* .%^(_P=T+XF3Z7=W\NHZ;JVENSV6JZ-?26=W!N&'4
M2(<E6'!4Y!K&\)_LU^!_!:Z -,L[T-HFH7.J6CW-_+._VB==LKNSDE]W^T>M
M>IT4 >56W[,GP_LM'\3:9;:0]O:>(M074]02*Y=2\RL&!4@_(N1G:..3ZUE7
M_P"R1X#U#6'O&_MJ&R;4EUC^Q;?6)X].6]4AO/%N#M#$@$CH3SC->U44 >0:
MY^RWX*U[Q%>ZG*VLVUKJ%VE_?Z+9ZO/#IU[<*01)+;JP4DX&0,!L#(-:]W^S
M]X-O?#?B#0I;*X.FZYJ7]JWL:W3J6GRIRI!RHRB\#BO2** /&/&?[)O@3QSJ
MFKW5\=:M;;6&CEU/3-.UB>VL[V5,;998D8 N,#GC..<U)K_[*O@GQ#JU[=S2
M:W;6>HF$ZEI-GK$\-CJ!B "&>$'#'Y1G&-V.<U['10!A^'O"5KX:NM2FM;B^
ME%],)FANKN2:*'"A0L*,2(DP/NK@5N444 %%%% !1110 4444 %%%% !1110
M 4444 %%%% !1110 4444 %%%% !1110 4444 %%%% !1110 4444 %%%% !
M1110 4444 %%%% !1110 4444 %%%% !1110 4444 %%%% !1110 4444 <7
M\5_AI;_%3P]9:3=7LMC%;:I8ZH)84#,S6US'.J8/9C& 3Z&I?BQ\.[?XK_#7
MQ)X/NKN2PM];L9;*2Y@4,\0=2"P!X)&>]=?10!\]>*/V4+CQGK5HNL^-[O4O
M#-KJ=OJEOIUWI=M)>6KPLCB*WOC^\BA+)G:HW ,RA@#6CH?[->H>']3MK&S^
M(&L6W@2TU675[?PU;0QPNDDDC2F!KI2':W$KLWE$?[)8KQ7NE% 'R]X6_8D7
MPY;^#].;QM<S:'X3UF/6-.LX-'M8)9Y%=R/MDZY:=L2.-_RDD[B":]H^%/PY
MM_@S\--/\+VEW<:K;Z<;B19I(U$LGF3R3$;5XR#(0/H*[FD(!ZT ?)/PJ_9E
MTWX@V?Q>U3Q-H6L:!I'CB[>#3-*U,+%>:=:Y\UY57+>4TETTDP4YQM4D<XKK
M]7_93U;QIX7\0Z+XO^).I:Q!J6EG3(5L=+M;"*+YU<SR1H")Y"44'<0A4L-H
MW&OH<*!T&*6@#YCU/]B^3Q)_;$NN>-Y9IM2\.3>&3#IFBVUC:06[R1R!HX4)
MPX:,$DL0<X  %?21L4DL/LLH\R,Q^6P/\0Q@_I5JB@#P'P3^RY?>![K1].LO
M'NH)X+T:Y>>QT.'3K>*8(2Q2WEN@-\L*%N%P"0%!8@5>T7]EO2]'\"?#GPQ_
M;EY<6W@S6FUJ&9X4#73&2=S&X' 7]^1D<_**]PHH ^<8/V1+BS;0-)MO'VI0
M>!] \01>(=,\.K80?N9$N//$#7'WWA#EBHP",CYC@"NI\&?LW6'@WQW8^)X=
M9N[F>UFUB86\D2!&.H31RN"1S\AC 'KGFO9:* /D;X@?!B\^#\/A*]\+KXNO
M-2L=0U><>(/#NG6^H36J7TIFDMY;)_\ 61,Q #J<JR*3P37HW[(G@+Q!X)^&
M&ICQ)'?0:AK.NW^L+'JIC^VK%,X*&X$?R+(0NXHO"[@O:O<2@/4 _6E  Z4
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M@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH **** "BBB@ HHHH ****
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M0 4444 %%%% !1110 4444 %%%% !1110 4444 %%%% !1110 4444 %%%%
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M_$EWJ]V]P+B*023W,R?,"$884<=\YX]H\??#3QIHOQCN/'O@JQTG7/[6T)=
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M0 4444 %%%% !1110 4444 %%%% !1110 4444 %%%% !1110 4444 %%%%
M!1110 4444 %%%% !1110 4444 %%%% !1110 4444 %%%% !1110 4444 %
M%%% !1110 4444 %%%% !1110 4444 %%%% !1110 4444 %%%% !1110 44
M44 %%%% !1110 4444 %%%% !1110 4444 %%%% !1110 4444 %%%% !111
M0 4444 %%%% !1110 4444 %%%% !1110 4444 %%%% !1110 4444 %%%%
M!1110 4444 %%%% !1110 4444 %%%% !1110 4444 %%%% !1110 4444 %
M%%% !1110 4444 %%%% !1110 4444 %%%% !1110 4444 %%%% !1110 44
M44 %%%% !1110 4444 %%%% !1110 4444 %%%% !1110 4444 %%%% !111
M0 4444 %%%% !1110 4444 %%%% !1110 4444 %%%% !1110 4444 %%%%
M!1110 4444 %%%% !1110 4444 %%%% !1110 4444 %%%% !1110 4444 %
M%%% !1110 4444 %%%% !1110 4444 %%%% !1110 4444 %%%% !1110 44
M44 %%%% !1110 4444 %%%% !1110 4444 %%%% !1110 4444 %%%% !111
M0 4444 %%%% !1110 4444 %%%% !1110 4444 %%%% !1110 4444 %%%%
M!1110 4444 %%%% !1110 4444 %%%% !1110 4444 %%%% !1110 4444 %
M%%% !1110 4444 %%%% !1110 4444 %%%% !1110 4444 %%%% !1110 44
M44 %%%% !1110 4444 %%%% !1110 4444 %%%% !1110 4444 %%%% !111
M0 4444 %%%% !1110 4444 %%%% !1110 4444 %%%% !1110 4444 %%%%
M!1110 4444 %%%% !1110 4444 %%%% !1110 4444 %%%% !1110 4444 %
M%%% !1110 4444 %%%% !1110 4444 %%%% !1110 4444 %%%% !1110 44
M44 %%%% !1110 4444 %%%% !1110 4444 %%%% !1110 4444 %%%% !111
M0 4444 %%%% !1110 4444 %%%% !1110 4444 %%%% !1110 4444 %%%%
?!1110 4444 %%%% !1110 4444 %%%% !1110!__V0$!

end
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EX-101.SCH
<SEQUENCE>9
<FILENAME>veco-20221231.xsd
<DESCRIPTION>EX-101.SCH
<TEXT>
<XBRL>
<?xml version="1.0" encoding="us-ascii"?>
<!--XBRL document created with Toppan Merrill Bridge  10.2.0.4 -->
<!--Based on XBRL 2.1-->
<!--Created on: 2/22/2023 6:58:56 PM-->
<!--Modified on: 2/22/2023 6:58:56 PM-->
<xsd:schema xmlns:xbrldt="http://xbrl.org/2005/xbrldt" xmlns:link="http://www.xbrl.org/2003/linkbase" xmlns:xl="http://www.xbrl.org/2003/XLink" xmlns:xbrli="http://www.xbrl.org/2003/instance" xmlns:xsd="http://www.w3.org/2001/XMLSchema" xmlns:attributeFormDefault="unqualified" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:ref="http://www.xbrl.org/2006/ref" targetNamespace="http://www.veeco.com/20221231" attributeFormDefault="unqualified" elementFormDefault="qualified" xmlns:country="http://xbrl.sec.gov/country/2022" xmlns:us-gaap="http://fasb.org/us-gaap/2022" xmlns:stpr="http://xbrl.sec.gov/stpr/2022" xmlns:negated="http://www.xbrl.org/2009/role/negated" xmlns:srt-types="http://fasb.org/srt-types/2022" xmlns:veco="http://www.veeco.com/20221231" xmlns:enum2="http://xbrl.org/2020/extensible-enumerations-2.0" xmlns:dtr-types="http://www.xbrl.org/dtr/type/2020-01-21" xmlns:currency="http://xbrl.sec.gov/currency/2022" xmlns:us-roles="http://fasb.org/us-roles/2022" xmlns:sic="http://xbrl.sec.gov/sic/2022" xmlns:us-types="http://fasb.org/us-types/2022" xmlns:srt-roles="http://fasb.org/srt-roles/2022" xmlns:utr="http://www.xbrl.org/2009/utr" xmlns:exch="http://xbrl.sec.gov/exch/2022" xmlns:naics="http://xbrl.sec.gov/naics/2022" xmlns:srt="http://fasb.org/srt/2022" xmlns:deprecated="http://www.xbrl.org/2009/role/deprecated" xmlns:net="http://www.xbrl.org/2009/role/net" xmlns:dei="http://xbrl.sec.gov/dei/2022" xmlns:dtr="http://www.xbrl.org/2009/dtr" xmlns:cef="http://xbrl.sec.gov/cef/2022" xmlns:xbrldi="http://xbrl.org/2006/xbrldi">
  <xsd:annotation>
    <xsd:appinfo>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureStandardAndCustomAxisDomainDefaults" id="DisclosureStandardAndCustomAxisDomainDefaults">
        <link:definition>99900 - Disclosure - Standard And Custom Axis Domain Defaults</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/StatementConsolidatedBalanceSheets" id="StatementConsolidatedBalanceSheets">
        <link:definition>00100 - Statement - Consolidated Balance Sheets</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations" id="StatementConsolidatedStatementsOfOperations">
        <link:definition>00200 - Statement - Consolidated Statements of Operations</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/StatementConsolidatedStatementsOfComprehensiveIncomeLoss" id="StatementConsolidatedStatementsOfComprehensiveIncomeLoss">
        <link:definition>00300 - Statement - Consolidated Statements of Comprehensive Income (Loss)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows" id="StatementConsolidatedStatementsOfCashFlows">
        <link:definition>00500 - Statement - Consolidated Statements of Cash Flows</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureIncomePerCommonShareBasicAndDilutedDetails" id="DisclosureIncomePerCommonShareBasicAndDilutedDetails">
        <link:definition>40201 - Disclosure - Income Per Common Share - Basic and Diluted (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureInvestmentsAvailableForSaleSecuritiesDetails" id="DisclosureInvestmentsAvailableForSaleSecuritiesDetails">
        <link:definition>40401 - Disclosure - Investments - Available-For-Sale Securities (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureInventoriesDetails" id="DisclosureInventoriesDetails">
        <link:definition>40501 - Disclosure - Inventories (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosurePropertyPlantAndEquipmentPropertyAndEquipmentDetails" id="DisclosurePropertyPlantAndEquipmentPropertyAndEquipmentDetails">
        <link:definition>40601 - Disclosure - Property, Plant, and Equipment - Property and Equipment (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssetsGoodwillDetails" id="DisclosureGoodwillAndIntangibleAssetsGoodwillDetails">
        <link:definition>40701 - Disclosure - Goodwill and Intangible Assets - Goodwill (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssetsIntangibleAssetsDetails" id="DisclosureGoodwillAndIntangibleAssetsIntangibleAssetsDetails">
        <link:definition>40702 - Disclosure - Goodwill and Intangible Assets - Intangible Assets (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssetsAmortizationDetails" id="DisclosureGoodwillAndIntangibleAssetsAmortizationDetails">
        <link:definition>40703 - Disclosure - Goodwill and Intangible Assets - Amortization (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesComponentsDetails" id="DisclosureAccruedExpensesAndOtherLiabilitiesComponentsDetails">
        <link:definition>40801 - Disclosure - Accrued Expenses and Other Liabilities - Components (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesMinimumLeaseCommitmentsDetails" id="DisclosureCommitmentsAndContingenciesMinimumLeaseCommitmentsDetails">
        <link:definition>40903 - Disclosure - Commitments and Contingencies - Minimum lease commitments (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesMinimumLeaseCommitmentsDetailsCalc2" id="DisclosureCommitmentsAndContingenciesMinimumLeaseCommitmentsDetailsCalc2">
        <link:definition>40903 - Disclosure - Commitments and Contingencies - Minimum lease commitments (Details) (calc 2)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureDebtCarryingValueDetails" id="DisclosureDebtCarryingValueDetails">
        <link:definition>41003 - Disclosure - Debt - Carrying Value (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureDebtInterestExpenseDetails" id="DisclosureDebtInterestExpenseDetails">
        <link:definition>41004 - Disclosure - Debt - Interest Expense (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureIncomeTaxesIncomeAttributableToDomesticAndForeignOperationsDetails" id="DisclosureIncomeTaxesIncomeAttributableToDomesticAndForeignOperationsDetails">
        <link:definition>41501 - Disclosure - Income Taxes - Income Attributable to Domestic and Foreign Operations (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureIncomeTaxesComponentsOfExpenseBenefitDetails" id="DisclosureIncomeTaxesComponentsOfExpenseBenefitDetails">
        <link:definition>41502 - Disclosure - Income Taxes - Components of Expense (Benefit) (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureIncomeTaxesReconciliationToStatutoryTaxExpenseDetails" id="DisclosureIncomeTaxesReconciliationToStatutoryTaxExpenseDetails">
        <link:definition>41503 - Disclosure - Income Taxes - Reconciliation to Statutory Tax Expense (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureIncomeTaxesDeferredTaxesDetails" id="DisclosureIncomeTaxesDeferredTaxesDetails">
        <link:definition>41504 - Disclosure - Income Taxes - Deferred Taxes (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/StatementConsolidatedStatementsOfStockholdersEquity" id="StatementConsolidatedStatementsOfStockholdersEquity">
        <link:definition>00400 - Statement - Consolidated Statements of Stockholders' Equity</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesRecentlyAdoptedAccountingStandardsDetails" id="DisclosureSignificantAccountingPoliciesRecentlyAdoptedAccountingStandardsDetails">
        <link:definition>40109 - Disclosure - Significant Accounting Policies - Recently Adopted Accounting Standards (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureIncomePerCommonShareSharesExcludedFromEpsDetails" id="DisclosureIncomePerCommonShareSharesExcludedFromEpsDetails">
        <link:definition>40202 - Disclosure - Income Per Common Share - Shares Excluded from EPS (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureFairValueMeasurementsDetails" id="DisclosureFairValueMeasurementsDetails">
        <link:definition>40301 - Disclosure - Fair Value Measurements (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureInvestmentsOtherInvestmentDetails" id="DisclosureInvestmentsOtherInvestmentDetails">
        <link:definition>40402 - Disclosure - Investments - Other Investment (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesCustomerDepositsAndDeferredRevenueDetails" id="DisclosureAccruedExpensesAndOtherLiabilitiesCustomerDepositsAndDeferredRevenueDetails">
        <link:definition>40802 - Disclosure - Accrued Expenses and Other Liabilities - Customer deposits and deferred revenue (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesPerformanceObligationAmountDetails" id="DisclosureAccruedExpensesAndOtherLiabilitiesPerformanceObligationAmountDetails">
        <link:definition>40803 - Disclosure - Accrued Expenses and Other Liabilities - Performance Obligation Amount (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesPerformanceObligationAmountDefaultDetails" id="DisclosureAccruedExpensesAndOtherLiabilitiesPerformanceObligationAmountDefaultDetails">
        <link:definition>40803 - Disclosure - Accrued Expenses and Other Liabilities - Performance Obligation Amount Default (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesPerformanceObligationTimingDetails" id="DisclosureAccruedExpensesAndOtherLiabilitiesPerformanceObligationTimingDetails">
        <link:definition>40804 - Disclosure - Accrued Expenses and Other Liabilities - Performance Obligation Timing (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesPerformanceObligationTimingDefaultDetails" id="DisclosureAccruedExpensesAndOtherLiabilitiesPerformanceObligationTimingDefaultDetails">
        <link:definition>40804 - Disclosure - Accrued Expenses and Other Liabilities - Performance Obligation Timing Default (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesOtherLiabilitiesDetails" id="DisclosureAccruedExpensesAndOtherLiabilitiesOtherLiabilitiesDetails">
        <link:definition>40805 - Disclosure - Accrued Expenses and Other Liabilities - Other liabilities (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesWarrantyDetails" id="DisclosureCommitmentsAndContingenciesWarrantyDetails">
        <link:definition>40901 - Disclosure - Commitments and Contingencies - Warranty (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesLegalProceedingsDetails" id="DisclosureCommitmentsAndContingenciesLegalProceedingsDetails">
        <link:definition>40905 - Disclosure - Commitments and Contingencies - Legal Proceedings (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesConcentrationOfCreditRiskDetails" id="DisclosureCommitmentsAndContingenciesConcentrationOfCreditRiskDetails">
        <link:definition>40906 - Disclosure - Commitments and Contingencies - Concentration of Credit Risk (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesReceivablesDetails" id="DisclosureCommitmentsAndContingenciesReceivablesDetails">
        <link:definition>40907 - Disclosure - Commitments and Contingencies - Receivables (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesSuppliersDetails" id="DisclosureCommitmentsAndContingenciesSuppliersDetails">
        <link:definition>40909 - Disclosure - Commitments and Contingencies - Suppliers (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureDebt20232025And2027NotesDetails" id="DisclosureDebt20232025And2027NotesDetails">
        <link:definition>41001 - Disclosure - Debt - 2023. 2025 and 2027 Notes (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureDebtConvertibleSeniorNotesDetails" id="DisclosureDebtConvertibleSeniorNotesDetails">
        <link:definition>41002 - Disclosure - Debt - Convertible Senior Notes (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureDebtCappedCallTransactionsDetails" id="DisclosureDebtCappedCallTransactionsDetails">
        <link:definition>41005 - Disclosure - Debt - Capped Call Transactions (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureDebtRevolvingCreditFacilityDetails" id="DisclosureDebtRevolvingCreditFacilityDetails">
        <link:definition>41006 - Disclosure - Debt - Revolving Credit Facility (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureStockholdersEquityAociRollforwardDetails" id="DisclosureStockholdersEquityAociRollforwardDetails">
        <link:definition>41101 - Disclosure - Stockholders' Equity - AOCI Rollforward (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureStockholdersEquityPreferredStockDetails" id="DisclosureStockholdersEquityPreferredStockDetails">
        <link:definition>41102 - Disclosure - Stockholders' Equity - Preferred Stock (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureStockPlans2019PlanDetails" id="DisclosureStockPlans2019PlanDetails">
        <link:definition>41201 - Disclosure - Stock Plans - 2019 Plan (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureStockPlansEsppDetails" id="DisclosureStockPlansEsppDetails">
        <link:definition>41202 - Disclosure - Stock Plans - ESPP (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureStockPlansSharesReservedForFutureIssuanceDetails" id="DisclosureStockPlansSharesReservedForFutureIssuanceDetails">
        <link:definition>41203 - Disclosure - Stock Plans - Shares Reserved for Future Issuance (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureStockPlansRecognizedShareBasedCompensationDetails" id="DisclosureStockPlansRecognizedShareBasedCompensationDetails">
        <link:definition>41204 - Disclosure - Stock Plans - Recognized Share-based Compensation (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureStockPlansUnrecognizedShareBasedCompensationCostsDetails" id="DisclosureStockPlansUnrecognizedShareBasedCompensationCostsDetails">
        <link:definition>41205 - Disclosure - Stock Plans - Unrecognized Share-based Compensation Costs (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureStockPlansStockOptionActivityDetails" id="DisclosureStockPlansStockOptionActivityDetails">
        <link:definition>41206 - Disclosure - Stock Plans - Stock Option Activity (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureStockPlansOptionExerciseRangesDetails" id="DisclosureStockPlansOptionExerciseRangesDetails">
        <link:definition>41207 - Disclosure - Stock Plans - Option Exercise Ranges (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureShareBasedCompensationRestrictedSharesAndPerformanceSharesDetails" id="DisclosureShareBasedCompensationRestrictedSharesAndPerformanceSharesDetails">
        <link:definition>41209 - Disclosure - Share-based Compensation - Restricted shares and performance shares (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureStockPlansPerformanceAwardsAssumptionsDetails" id="DisclosureStockPlansPerformanceAwardsAssumptionsDetails">
        <link:definition>41210 - Disclosure - Stock Plans - Performance Awards Assumptions (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureStockPlansEsppFvAssumptionsDetails" id="DisclosureStockPlansEsppFvAssumptionsDetails">
        <link:definition>41211 - Disclosure - Stock Plans - ESPP FV Assumptions (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureRetirementPlansDefinedContributionPlanDetails" id="DisclosureRetirementPlansDefinedContributionPlanDetails">
        <link:definition>41301 - Disclosure - Retirement Plans - Defined Contribution Plan (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureDispositionsDetails" id="DisclosureDispositionsDetails">
        <link:definition>41401 - Disclosure - Dispositions (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureIncomeTaxesOperatingLossCarryforwardsDetails" id="DisclosureIncomeTaxesOperatingLossCarryforwardsDetails">
        <link:definition>41505 - Disclosure - Income Taxes - Operating Loss Carryforwards (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureIncomeTaxesTaxCreditCarryforwardsDetails" id="DisclosureIncomeTaxesTaxCreditCarryforwardsDetails">
        <link:definition>41506 - Disclosure - Income Taxes - Tax Credit Carryforwards (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureIncomeTaxesUncertainTaxPositionsDetails" id="DisclosureIncomeTaxesUncertainTaxPositionsDetails">
        <link:definition>41507 - Disclosure - Income Taxes - Uncertain Tax Positions (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformationSegmentDetails" id="DisclosureSegmentReportingAndGeographicInformationSegmentDetails">
        <link:definition>41601 - Disclosure - Segment Reporting and Geographic Information - Segment (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformationGeographicDetails" id="DisclosureSegmentReportingAndGeographicInformationGeographicDetails">
        <link:definition>41602 - Disclosure - Segment Reporting and Geographic Information - Geographic (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureSubsequentEventsDetails" id="DisclosureSubsequentEventsDetails">
        <link:definition>41701 - Disclosure - Subsequent Events (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureScheduleIiValuationAndQualifyingAccountsDetails" id="DisclosureScheduleIiValuationAndQualifyingAccountsDetails">
        <link:definition>41801 - Disclosure - Schedule II - Valuation and Qualifying Accounts (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DocumentDocumentAndEntityInformation" id="DocumentDocumentAndEntityInformation">
        <link:definition>00090 - Document - Document and Entity Information</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/StatementConsolidatedBalanceSheetsParenthetical" id="StatementConsolidatedBalanceSheetsParenthetical">
        <link:definition>00105 - Statement - Consolidated Balance Sheets (Parenthetical)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureSignificantAccountingPolicies" id="DisclosureSignificantAccountingPolicies">
        <link:definition>10101 - Disclosure - Significant Accounting Policies</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureIncomePerCommonShare" id="DisclosureIncomePerCommonShare">
        <link:definition>10201 - Disclosure - Income Per Common Share</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureFairValueMeasurements" id="DisclosureFairValueMeasurements">
        <link:definition>10301 - Disclosure - Fair Value Measurements</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureInvestments" id="DisclosureInvestments">
        <link:definition>10401 - Disclosure - Investments</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureInventories" id="DisclosureInventories">
        <link:definition>10501 - Disclosure - Inventories</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosurePropertyPlantAndEquipment" id="DisclosurePropertyPlantAndEquipment">
        <link:definition>10601 - Disclosure - Property, Plant, and Equipment</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssets" id="DisclosureGoodwillAndIntangibleAssets">
        <link:definition>10701 - Disclosure - Goodwill and Intangible Assets</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilities" id="DisclosureAccruedExpensesAndOtherLiabilities">
        <link:definition>10801 - Disclosure - Accrued Expenses and Other Liabilities</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureCommitmentsAndContingencies" id="DisclosureCommitmentsAndContingencies">
        <link:definition>10901 - Disclosure - Commitments and Contingencies</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureDebt" id="DisclosureDebt">
        <link:definition>11001 - Disclosure - Debt</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureStockholdersEquity" id="DisclosureStockholdersEquity">
        <link:definition>11101 - Disclosure - Stockholders' Equity</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureStockPlans" id="DisclosureStockPlans">
        <link:definition>11201 - Disclosure - Stock Plans</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureRetirementPlans" id="DisclosureRetirementPlans">
        <link:definition>11301 - Disclosure - Retirement Plans</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureDispositions" id="DisclosureDispositions">
        <link:definition>11401 - Disclosure - Dispositions</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureIncomeTaxes" id="DisclosureIncomeTaxes">
        <link:definition>11501 - Disclosure - Income Taxes</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformation" id="DisclosureSegmentReportingAndGeographicInformation">
        <link:definition>11601 - Disclosure - Segment Reporting and Geographic Information</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureSubsequentEvents" id="DisclosureSubsequentEvents">
        <link:definition>11701 - Disclosure - Subsequent Events</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureScheduleIiValuationAndQualifyingAccounts" id="DisclosureScheduleIiValuationAndQualifyingAccounts">
        <link:definition>11801 - Disclosure - Schedule II - Valuation and Qualifying Accounts</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesPolicies" id="DisclosureSignificantAccountingPoliciesPolicies">
        <link:definition>20102 - Disclosure - Significant Accounting Policies (Policies)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesTables" id="DisclosureSignificantAccountingPoliciesTables">
        <link:definition>30103 - Disclosure - Significant Accounting Policies (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureIncomePerCommonShareTables" id="DisclosureIncomePerCommonShareTables">
        <link:definition>30203 - Disclosure - Income Per Common Share (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureFairValueMeasurementsTables" id="DisclosureFairValueMeasurementsTables">
        <link:definition>30303 - Disclosure - Fair Value Measurements (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureInvestmentsTables" id="DisclosureInvestmentsTables">
        <link:definition>30403 - Disclosure - Investments (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureInventoriesTables" id="DisclosureInventoriesTables">
        <link:definition>30503 - Disclosure - Inventories (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosurePropertyPlantAndEquipmentTables" id="DisclosurePropertyPlantAndEquipmentTables">
        <link:definition>30603 - Disclosure - Property, Plant, and Equipment (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssetsTables" id="DisclosureGoodwillAndIntangibleAssetsTables">
        <link:definition>30703 - Disclosure - Goodwill and Intangible Assets (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesTables" id="DisclosureAccruedExpensesAndOtherLiabilitiesTables">
        <link:definition>30803 - Disclosure - Accrued Expenses and Other Liabilities (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesTables" id="DisclosureCommitmentsAndContingenciesTables">
        <link:definition>30903 - Disclosure - Commitments and Contingencies (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureDebtTables" id="DisclosureDebtTables">
        <link:definition>31003 - Disclosure - Debt (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureStockholdersEquityTables" id="DisclosureStockholdersEquityTables">
        <link:definition>31103 - Disclosure - Stockholders' Equity (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureStockPlansTables" id="DisclosureStockPlansTables">
        <link:definition>31203 - Disclosure - Stock Plans (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureIncomeTaxesTables" id="DisclosureIncomeTaxesTables">
        <link:definition>31503 - Disclosure - Income Taxes (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformationTables" id="DisclosureSegmentReportingAndGeographicInformationTables">
        <link:definition>31603 - Disclosure - Segment Reporting and Geographic Information (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesDescriptionOfBusinessAndBasisOfPresentationDetails" id="DisclosureSignificantAccountingPoliciesDescriptionOfBusinessAndBasisOfPresentationDetails">
        <link:definition>40101 - Disclosure - Significant Accounting Policies - Description of Business and Basis of Presentation (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesRevenueRecognitionDetails" id="DisclosureSignificantAccountingPoliciesRevenueRecognitionDetails">
        <link:definition>40102 - Disclosure - Significant Accounting Policies - Revenue Recognition (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesWarrantyCostsDetails" id="DisclosureSignificantAccountingPoliciesWarrantyCostsDetails">
        <link:definition>40103 - Disclosure - Significant Accounting Policies - Warranty Costs (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesAdvertisingExpenseDetails" id="DisclosureSignificantAccountingPoliciesAdvertisingExpenseDetails">
        <link:definition>40104 - Disclosure - Significant Accounting Policies - Advertising Expense (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesAccountingForShareBasedCompensationDetails" id="DisclosureSignificantAccountingPoliciesAccountingForShareBasedCompensationDetails">
        <link:definition>40105 - Disclosure - Significant Accounting Policies - Accounting for Share-Based Compensation (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesConcentrationOfCreditRiskDetails" id="DisclosureSignificantAccountingPoliciesConcentrationOfCreditRiskDetails">
        <link:definition>40106 - Disclosure - Significant Accounting Policies - Concentration of Credit Risk (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesCashCashEquivalentsAndShortTermInvestmentsDetails" id="DisclosureSignificantAccountingPoliciesCashCashEquivalentsAndShortTermInvestmentsDetails">
        <link:definition>40107 - Disclosure - Significant Accounting Policies - Cash, Cash Equivalents, and Short-term Investments (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesGoodwillAndIndefiniteLivedIntangiblesDetails" id="DisclosureSignificantAccountingPoliciesGoodwillAndIndefiniteLivedIntangiblesDetails">
        <link:definition>40108 - Disclosure - Significant Accounting Policies - Goodwill and Indefinite-Lived Intangibles (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesLeaseTermsDetails" id="DisclosureCommitmentsAndContingenciesLeaseTermsDetails">
        <link:definition>40902 - Disclosure - Commitments and Contingencies - Lease terms (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesLeaseCostsDetails" id="DisclosureCommitmentsAndContingenciesLeaseCostsDetails">
        <link:definition>40904 - Disclosure - Commitments and Contingencies - Lease costs (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesReceivablePurchaseAgreementDetails" id="DisclosureCommitmentsAndContingenciesReceivablePurchaseAgreementDetails">
        <link:definition>40908 - Disclosure - Commitments and Contingencies - Receivable Purchase Agreement (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesPurchaseCommitmentsAndBankGuaranteesDetails" id="DisclosureCommitmentsAndContingenciesPurchaseCommitmentsAndBankGuaranteesDetails">
        <link:definition>40910 - Disclosure - Commitments and Contingencies - Purchase Commitments and Bank Guarantees (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.veeco.com/role/DisclosureStockPlansStockOptionsExercisedDetails" id="DisclosureStockPlansStockOptionsExercisedDetails">
        <link:definition>41208 - Disclosure - Stock Plans - Stock options exercised (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:linkbaseRef xlink:type="simple" xlink:href="veco-20221231_pre.xml" xlink:role="http://www.xbrl.org/2003/role/presentationLinkbaseRef" xlink:arcrole="http://www.w3.org/1999/xlink/properties/linkbase" />
      <link:linkbaseRef xlink:type="simple" xlink:href="veco-20221231_cal.xml" xlink:role="http://www.xbrl.org/2003/role/calculationLinkbaseRef" xlink:arcrole="http://www.w3.org/1999/xlink/properties/linkbase" />
      <link:linkbaseRef xlink:type="simple" xlink:href="veco-20221231_def.xml" xlink:role="http://www.xbrl.org/2003/role/definitionLinkbaseRef" xlink:arcrole="http://www.w3.org/1999/xlink/properties/linkbase" />
      <link:linkbaseRef xlink:type="simple" xlink:href="veco-20221231_lab.xml" xlink:role="http://www.xbrl.org/2003/role/labelLinkbaseRef" xlink:arcrole="http://www.w3.org/1999/xlink/properties/linkbase" />
    </xsd:appinfo>
  </xsd:annotation>
  <xsd:import namespace="http://xbrl.sec.gov/dei/2022" schemaLocation="https://xbrl.sec.gov/dei/2022/dei-2022.xsd" />
  <xsd:import namespace="http://www.xbrl.org/dtr/type/2020-01-21" schemaLocation="https://www.xbrl.org/dtr/type/2020-01-21/types.xsd" />
  <xsd:import namespace="http://www.xbrl.org/2009/role/negated" schemaLocation="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd" />
  <xsd:import namespace="http://www.xbrl.org/2003/instance" schemaLocation="http://www.xbrl.org/2003/xbrl-instance-2003-12-31.xsd" />
  <xsd:import namespace="http://xbrl.org/2005/xbrldt" schemaLocation="http://www.xbrl.org/2005/xbrldt-2005.xsd" />
  <xsd:import namespace="http://fasb.org/us-roles/2022" schemaLocation="https://xbrl.fasb.org/us-gaap/2022/elts/us-roles-2022.xsd" />
  <xsd:import namespace="http://fasb.org/us-gaap/2022" schemaLocation="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd" />
  <xsd:import namespace="http://fasb.org/srt/2022" schemaLocation="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd" />
  <xsd:import namespace="http://xbrl.sec.gov/country/2022" schemaLocation="https://xbrl.sec.gov/country/2022/country-2022.xsd" />
  <xsd:element name="AccountsReceivableCreditPeriod" id="veco_AccountsReceivableCreditPeriod" type="xbrli:durationItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="duration" />
  <xsd:element name="CostMethodInvestmentsOwnershipPercentage" id="veco_CostMethodInvestmentsOwnershipPercentage" type="dtr-types:percentItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="instant" />
  <xsd:element id="veco_ProductWarrantyPeriod" name="ProductWarrantyPeriod" nillable="true" type="xbrli:durationItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <xsd:element id="veco_RestrictedStockAwardMember" name="RestrictedStockAwardMember" nillable="true" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="veco_FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment" name="FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="credit" />
  <xsd:element id="veco_RestOfWorldMember" name="RestOfWorldMember" nillable="true" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="veco_ScheduleOfIntangibleAssetsExcludingGoodwillTableTextBlock" name="ScheduleOfIntangibleAssetsExcludingGoodwillTableTextBlock" nillable="true" type="dtr-types:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <xsd:element id="veco_SecuritiesExcludedFromComputationOfBasicEarningsPerShareAmount" name="SecuritiesExcludedFromComputationOfBasicEarningsPerShareAmount" nillable="true" type="xbrli:sharesItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <xsd:element id="veco_OtherComprehensiveIncomeLossIncludingForeignCurrencyGainsLossesOnTransactionsIncludedInOperatingResultsNetOfTax" name="OtherComprehensiveIncomeLossIncludingForeignCurrencyGainsLossesOnTransactionsIncludedInOperatingResultsNetOfTax" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xbrli:balance="credit" />
  <xsd:element id="veco_CashCashEquivalentsAndShortTermInvestmentsPolicyTextBlock" name="CashCashEquivalentsAndShortTermInvestmentsPolicyTextBlock" nillable="true" type="dtr-types:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <xsd:element id="veco_LongLivedAssetsAndCostMethodInvestmentsPolicyTextBlock" name="LongLivedAssetsAndCostMethodInvestmentsPolicyTextBlock" nillable="true" type="dtr-types:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <xsd:element id="veco_TopTenCustomersMember" name="TopTenCustomersMember" nillable="true" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="veco_CustomerAMember" name="CustomerAMember" nillable="true" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="veco_CustomerBMember" name="CustomerBMember" nillable="true" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="veco_CustomerCMember" name="CustomerCMember" nillable="true" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="veco_CustomerDMember" name="CustomerDMember" nillable="true" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="veco_CustomerEMember" name="CustomerEMember" nillable="true" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="veco_RestrictedStockAwardsAndRestrictedStockUnitsMember" name="RestrictedStockAwardsAndRestrictedStockUnitsMember" nillable="true" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="veco_PerformanceShareUnitsMember" name="PerformanceShareUnitsMember" nillable="true" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="veco_InducementStockIncentivePlan2013Member" name="InducementStockIncentivePlan2013Member" nillable="true" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="veco_StockIncentivePlan2010Member" name="StockIncentivePlan2010Member" nillable="true" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="veco_SharesReservedForFutureIssuanceAbstract" name="SharesReservedForFutureIssuanceAbstract" nillable="true" type="xbrli:stringItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="veco_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsAbstract" name="ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsAbstract" nillable="true" type="xbrli:stringItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="veco_RangeOfExercisePricesRangeOneMember" name="RangeOfExercisePricesRangeOneMember" nillable="true" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="veco_RangeOfExercisePricesRangeTwoMember" name="RangeOfExercisePricesRangeTwoMember" nillable="true" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember" name="RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember" nillable="true" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="veco_DefinedContributionPlanEmployerMatchingContributionVestingPeriod" name="DefinedContributionPlanEmployerMatchingContributionVestingPeriod" nillable="true" type="xbrli:durationItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <xsd:element id="veco_IncomeTaxReconciliationChangeInAccrualForUnrecognizedTaxBenefits" name="IncomeTaxReconciliationChangeInAccrualForUnrecognizedTaxBenefits" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xbrli:balance="credit" />
  <xsd:element id="veco_FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassTable" name="FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassTable" nillable="true" type="xbrli:stringItemType" substitutionGroup="xbrldt:hypercubeItem" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="veco_FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassLineItems" name="FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassLineItems" nillable="true" type="xbrli:stringItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="veco_DataStorageMember" name="DataStorageMember" nillable="true" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="veco_DebtInstrumentPrincipalAmountDenominationForConversionIntoCommonStock" name="DebtInstrumentPrincipalAmountDenominationForConversionIntoCommonStock" nillable="true" type="xbrli:decimalItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <xsd:element id="veco_EmployeeStockPurchasePlan2016Member" name="EmployeeStockPurchasePlan2016Member" nillable="true" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="veco_CustomerFMember" name="CustomerFMember" nillable="true" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="veco_TransferFromInventories" name="TransferFromInventories" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xbrli:balance="debit" abstract="false" />
  <xsd:element id="veco_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsAbstract" name="ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsAbstract" nillable="true" type="xbrli:stringItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="veco_RsuAndPsuAwardsMember" name="RsuAndPsuAwardsMember" nillable="true" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="veco_NonCashInterestExpenseAbstract" name="NonCashInterestExpenseAbstract" nillable="true" type="xbrli:stringItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsPerformanceAwardAdjustmentsInPeriod" name="ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsPerformanceAwardAdjustmentsInPeriod" nillable="true" type="xbrli:sharesItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <xsd:element id="veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsPerformanceAwardAdjustmentsWeightedAverageGrantDateFairValue" name="ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsPerformanceAwardAdjustmentsWeightedAverageGrantDateFairValue" nillable="true" type="dtr-types:perShareItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <xsd:element id="veco_TradeReceivablesSoldUnderReceivablePurchaseAgreement" name="TradeReceivablesSoldUnderReceivablePurchaseAgreement" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xbrli:balance="debit" />
  <xsd:element id="veco_IncreaseDecreaseInAccountsReceivableAndContractAssets" name="IncreaseDecreaseInAccountsReceivableAndContractAssets" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xbrli:balance="credit" />
  <xsd:element id="veco_IncreaseDecreaseInCustomerDepositsAndDeferredRevenue" name="IncreaseDecreaseInCustomerDepositsAndDeferredRevenue" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xbrli:balance="debit" />
  <xsd:element id="veco_ScheduleOfDeferredRevenueTableTextBlock" name="ScheduleOfDeferredRevenueTableTextBlock" nillable="true" type="dtr-types:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <xsd:element id="veco_CashInterestExpenseAbstract" name="CashInterestExpenseAbstract" nillable="true" type="xbrli:stringItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="veco_RevenueRemainingPerformanceObligationExpectedTimingPercentage" name="RevenueRemainingPerformanceObligationExpectedTimingPercentage" nillable="true" type="dtr-types:percentItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" />
  <xsd:element id="veco_IrrevocableLettersOfCreditMaturityPeriodMinimum" name="IrrevocableLettersOfCreditMaturityPeriodMinimum" nillable="true" type="xbrli:durationItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <xsd:element id="veco_IrrevocableLettersOfCreditMaturityPeriodMaximum" name="IrrevocableLettersOfCreditMaturityPeriodMaximum" nillable="true" type="xbrli:durationItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <xsd:element id="veco_CashAndCashEquivalentsMaintainedOutsideBySubsidiariesAsPercent" name="CashAndCashEquivalentsMaintainedOutsideBySubsidiariesAsPercent" nillable="true" type="dtr-types:percentItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" />
  <xsd:element id="veco_NumberOfTradingDaysConsideredToCalculateMarketCapitalization" name="NumberOfTradingDaysConsideredToCalculateMarketCapitalization" nillable="true" type="xbrli:durationItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <xsd:element id="veco_DebtInstrumentNumberOfConsecutiveBusinessDays" name="DebtInstrumentNumberOfConsecutiveBusinessDays" nillable="true" type="xbrli:durationItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <xsd:element id="veco_DebtInstrumentsConvertibleFeaturesMaximumPercentageOfCommonStockCouldBeConverted" name="DebtInstrumentsConvertibleFeaturesMaximumPercentageOfCommonStockCouldBeConverted" nillable="true" type="dtr-types:percentItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <xsd:element id="veco_DebtIssuanceCostsTransactionCostsAllocatedToEquityComponent" name="DebtIssuanceCostsTransactionCostsAllocatedToEquityComponent" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xbrli:balance="debit" />
  <xsd:element id="veco_UltratechAcquisitionLitigationMember" name="UltratechAcquisitionLitigationMember" nillable="true" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="veco_OtherNonMarketableInvestmentMember" name="OtherNonMarketableInvestmentMember" nillable="true" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="veco_MedicalAndDentalBenefitLiabilitiesNoncurrent" name="MedicalAndDentalBenefitLiabilitiesNoncurrent" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="credit" />
  <xsd:element id="veco_ContractWithCustomerLiabilityAndRefundLiabilityCurrent" name="ContractWithCustomerLiabilityAndRefundLiabilityCurrent" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="credit" />
  <xsd:element id="veco_LiabilitiesTable" name="LiabilitiesTable" nillable="true" type="xbrli:stringItemType" substitutionGroup="xbrldt:hypercubeItem" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="veco_LiabilitiesLineItems" name="LiabilitiesLineItems" nillable="true" type="xbrli:stringItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="veco_AccruedAndOtherLiabilitiesCurrent" name="AccruedAndOtherLiabilitiesCurrent" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="credit" />
  <xsd:element id="veco_CommonStockEquivalentsMember" name="CommonStockEquivalentsMember" nillable="true" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="veco_NumberOfCustomers" name="NumberOfCustomers" nillable="true" type="xbrli:integerItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <xsd:element id="veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferPeriod" name="ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferPeriod" nillable="true" type="xbrli:durationItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <xsd:element id="veco_CashEquivalentsFairValueDisclosure" name="CashEquivalentsFairValueDisclosure" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="debit" />
  <xsd:element id="veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardServiceConditionsAndGradedVestingNumberOfAwards" name="ShareBasedCompensationArrangementByShareBasedPaymentAwardServiceConditionsAndGradedVestingNumberOfAwards" nillable="true" type="xbrli:integerItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" />
  <xsd:element id="veco_CertificateOfDepositsAndTimeDepositsMember" name="CertificateOfDepositsAndTimeDepositsMember" nillable="true" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="veco_PotentiallyDilutiveSharesMember" name="PotentiallyDilutiveSharesMember" nillable="true" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="veco_OneNonCoreProductLineMember" name="OneNonCoreProductLineMember" nillable="true" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="veco_GeographicLocationOneMember" name="GeographicLocationOneMember" nillable="true" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="veco_GeographicLocationTwoMember" name="GeographicLocationTwoMember" nillable="true" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="veco_PercentageOfTransactionPrice" name="PercentageOfTransactionPrice" nillable="true" type="dtr-types:percentItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <xsd:element id="veco_PercentageOfAmountHeldInEscrow" name="PercentageOfAmountHeldInEscrow" nillable="true" type="dtr-types:percentItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <xsd:element id="veco_TermOfAmountToBeHeldInEscrow" name="TermOfAmountToBeHeldInEscrow" nillable="true" type="xbrli:durationItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <xsd:element id="veco_ConvertibleSeniorUnsecuredNotesDue2023Member" name="ConvertibleSeniorUnsecuredNotesDue2023Member" nillable="true" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="veco_ConvertibleSeniorUnsecuredNotesDue2027Member" name="ConvertibleSeniorUnsecuredNotesDue2027Member" nillable="true" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="veco_CappedCallTransactionsPrice" name="CappedCallTransactionsPrice" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="credit" />
  <xsd:element id="veco_AdjustmentsToAdditionalPaidInCapitalExtinguishmentEquityComponentOfNotesRepurchased" name="AdjustmentsToAdditionalPaidInCapitalExtinguishmentEquityComponentOfNotesRepurchased" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xbrli:balance="debit" />
  <xsd:element id="veco_AdjustmentsToAdditionalPaidInCapitalPurchaseOfDerivativeInstrument" name="AdjustmentsToAdditionalPaidInCapitalPurchaseOfDerivativeInstrument" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xbrli:balance="debit" />
  <xsd:element id="veco_CappedCallTransactionsCapPrice" name="CappedCallTransactionsCapPrice" nillable="true" type="dtr-types:perShareItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <xsd:element id="veco_DerivativeContractCappedCallMember" name="DerivativeContractCappedCallMember" nillable="true" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="veco_NonCashOperatingAndFinancingActivitiesAbstract" name="NonCashOperatingAndFinancingActivitiesAbstract" nillable="true" type="xbrli:stringItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="veco_ConvertibleSeniorUnsecuredNotesDue2025Member" name="ConvertibleSeniorUnsecuredNotesDue2025Member" nillable="true" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="veco_SemiconductorMember" name="SemiconductorMember" nillable="true" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="veco_CompoundSemiconductorMember" name="CompoundSemiconductorMember" nillable="true" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="veco_ScientificAndOtherMember" name="ScientificAndOtherMember" nillable="true" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="veco_PerformanceShareUnitsMarketConditionsMember" name="PerformanceShareUnitsMarketConditionsMember" nillable="true" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="veco_DebtInstrumentCarryingAmountDebtExtinguished" name="DebtInstrumentCarryingAmountDebtExtinguished" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xbrli:balance="debit" />
  <xsd:element id="veco_TradeReceivablesUnderReceivablePurchaseAgreementOutstanding" name="TradeReceivablesUnderReceivablePurchaseAgreementOutstanding" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="debit" />
  <xsd:element id="veco_EffectiveIncomeTaxRateReconciliationPartialExtinguishmentOfDebtAmount" name="EffectiveIncomeTaxRateReconciliationPartialExtinguishmentOfDebtAmount" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xbrli:balance="debit" />
  <xsd:element id="veco_DeferredTaxAssetsOperatingLeases" name="DeferredTaxAssetsOperatingLeases" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="debit" />
  <xsd:element id="veco_AsiaPacificExcludingChinaMember" name="AsiaPacificExcludingChinaMember" nillable="true" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="veco_DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterOneThroughTwoYearsAmortizedCost" name="DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterOneThroughTwoYearsAmortizedCost" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="debit" />
  <xsd:element id="veco_DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterOneThroughTwoYearsFairValue" name="DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterOneThroughTwoYearsFairValue" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="debit" />
  <xsd:element id="veco_ScheduleOfShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsValuationAssumptionsTableTextBlock" name="ScheduleOfShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsValuationAssumptionsTableTextBlock" nillable="true" type="dtr-types:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <xsd:element name="WoltherActionMember" id="veco_WoltherActionMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="duration" abstract="true" />
  <xsd:element name="RevolvingCreditFacilityDecember2021Member" id="veco_RevolvingCreditFacilityDecember2021Member" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="duration" abstract="true" />
  <xsd:element name="RevolvingCreditFacilityDecember2021LetterOfCreditMember" id="veco_RevolvingCreditFacilityDecember2021LetterOfCreditMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="duration" abstract="true" />
  <xsd:element name="LineOfCreditFacilityContingentIncreaseAdditionalBorrowingCapacity" id="veco_LineOfCreditFacilityContingentIncreaseAdditionalBorrowingCapacity" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="duration" abstract="false" xbrli:balance="credit" />
  <xsd:element name="DebtInstrumentFloorRate" id="veco_DebtInstrumentFloorRate" type="dtr-types:percentItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="instant" abstract="false" />
  <xsd:element name="ScheduleOfStockOptionExercisedTableTextBlock" id="veco_ScheduleOfStockOptionExercisedTableTextBlock" type="dtr-types:textBlockItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="duration" abstract="false" />
  <xsd:element name="ReceivablePurchaseAgreementMaximumAmount" id="veco_ReceivablePurchaseAgreementMaximumAmount" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="instant" abstract="false" xbrli:balance="debit" />
  <xsd:element name="ReceivablePurchaseAgreementAmountAvailable" id="veco_ReceivablePurchaseAgreementAmountAvailable" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="instant" abstract="false" xbrli:balance="debit" />
  <xsd:element name="ReimbursementForLeaseholdImprovements" id="veco_ReimbursementForLeaseholdImprovements" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="duration" abstract="false" xbrli:balance="debit" />
  <xsd:element name="DebtInstrumentInterestCoverageRatio" id="veco_DebtInstrumentInterestCoverageRatio" type="xbrli:pureItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="duration" abstract="false" />
  <xsd:element name="DebtInstrumentTotalNetLeverageRatio" id="veco_DebtInstrumentTotalNetLeverageRatio" type="xbrli:pureItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="instant" abstract="false" />
  <xsd:element name="DebtInstrumentSecuredNetLeverageRatio" id="veco_DebtInstrumentSecuredNetLeverageRatio" type="xbrli:pureItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="instant" abstract="false" />
  <xsd:element name="BalanceSheetLineItemAbstract" id="veco_BalanceSheetLineItemAbstract" type="xbrli:stringItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="duration" abstract="true" />
  <xsd:element name="DifferenceBetweenGuidanceInEffectBeforeAndAfterAccountingStandardsUpdate202006Member" id="veco_DifferenceBetweenGuidanceInEffectBeforeAndAfterAccountingStandardsUpdate202006Member" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="duration" abstract="true" />
  <xsd:element name="CalculatedUnderGuidanceInEffectBeforeAdoptionOfAccountingStandardsUpdate202006Member" id="veco_CalculatedUnderGuidanceInEffectBeforeAdoptionOfAccountingStandardsUpdate202006Member" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="duration" abstract="true" />
  <xsd:element name="NetIncomeLossAvailableToCommonStockholdersAbstract" id="veco_NetIncomeLossAvailableToCommonStockholdersAbstract" type="xbrli:stringItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="duration" abstract="true" />
  <xsd:element name="EarningsPerShareDisclosureAbstract" id="veco_EarningsPerShareDisclosureAbstract" type="xbrli:stringItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="duration" abstract="true" />
  <xsd:element name="ImpairmentLossesInvestmentsNonCash" id="veco_ImpairmentLossesInvestmentsNonCash" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="duration" abstract="false" xbrli:balance="debit" />
  <xsd:element name="MoneyMarketFundsExcludingGovernmentFundsMember" id="veco_MoneyMarketFundsExcludingGovernmentFundsMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="duration" abstract="true" />
  <xsd:element name="DerivativeActionMember" id="veco_DerivativeActionMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="duration" abstract="true" />
  <xsd:element name="EpiluvacAbMember" id="veco_EpiluvacAbMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="duration" abstract="true" />
  <xsd:element name="DeferredTaxLiabilitiesFinancingArrangementsNet" id="veco_DeferredTaxLiabilitiesFinancingArrangementsNet" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="instant" abstract="false" xbrli:balance="credit" />
</xsd:schema>
</XBRL>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EX-101.CAL
<SEQUENCE>10
<FILENAME>veco-20221231_cal.xml
<DESCRIPTION>EX-101.CAL
<TEXT>
<XBRL>
<?xml version="1.0" encoding="us-ascii"?>
<!--XBRL document created with Toppan Merrill Bridge  10.2.0.4 -->
<!--Based on XBRL 2.1-->
<!--Created on: 2/22/2023 6:58:56 PM-->
<!--Modified on: 2/22/2023 6:58:56 PM-->
<link:linkbase xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:link="http://www.xbrl.org/2003/linkbase" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xbrli="http://www.xbrl.org/2003/instance" xsi:schemaLocation="http://www.xbrl.org/2003/linkbase http://www.xbrl.org/2003/xbrl-linkbase-2003-12-31.xsd">
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#StatementConsolidatedBalanceSheets" roleURI="http://www.veeco.com/role/StatementConsolidatedBalanceSheets" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#StatementConsolidatedStatementsOfOperations" roleURI="http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#StatementConsolidatedStatementsOfComprehensiveIncomeLoss" roleURI="http://www.veeco.com/role/StatementConsolidatedStatementsOfComprehensiveIncomeLoss" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#StatementConsolidatedStatementsOfCashFlows" roleURI="http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureIncomePerCommonShareBasicAndDilutedDetails" roleURI="http://www.veeco.com/role/DisclosureIncomePerCommonShareBasicAndDilutedDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureInvestmentsAvailableForSaleSecuritiesDetails" roleURI="http://www.veeco.com/role/DisclosureInvestmentsAvailableForSaleSecuritiesDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureInventoriesDetails" roleURI="http://www.veeco.com/role/DisclosureInventoriesDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosurePropertyPlantAndEquipmentPropertyAndEquipmentDetails" roleURI="http://www.veeco.com/role/DisclosurePropertyPlantAndEquipmentPropertyAndEquipmentDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureGoodwillAndIntangibleAssetsGoodwillDetails" roleURI="http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssetsGoodwillDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureGoodwillAndIntangibleAssetsIntangibleAssetsDetails" roleURI="http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssetsIntangibleAssetsDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureGoodwillAndIntangibleAssetsAmortizationDetails" roleURI="http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssetsAmortizationDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureAccruedExpensesAndOtherLiabilitiesComponentsDetails" roleURI="http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesComponentsDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureCommitmentsAndContingenciesMinimumLeaseCommitmentsDetails" roleURI="http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesMinimumLeaseCommitmentsDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureCommitmentsAndContingenciesMinimumLeaseCommitmentsDetailsCalc2" roleURI="http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesMinimumLeaseCommitmentsDetailsCalc2" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureDebtCarryingValueDetails" roleURI="http://www.veeco.com/role/DisclosureDebtCarryingValueDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureDebtInterestExpenseDetails" roleURI="http://www.veeco.com/role/DisclosureDebtInterestExpenseDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureIncomeTaxesIncomeAttributableToDomesticAndForeignOperationsDetails" roleURI="http://www.veeco.com/role/DisclosureIncomeTaxesIncomeAttributableToDomesticAndForeignOperationsDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureIncomeTaxesComponentsOfExpenseBenefitDetails" roleURI="http://www.veeco.com/role/DisclosureIncomeTaxesComponentsOfExpenseBenefitDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureIncomeTaxesReconciliationToStatutoryTaxExpenseDetails" roleURI="http://www.veeco.com/role/DisclosureIncomeTaxesReconciliationToStatutoryTaxExpenseDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureIncomeTaxesDeferredTaxesDetails" roleURI="http://www.veeco.com/role/DisclosureIncomeTaxesDeferredTaxesDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <calculationLink xlink:role="http://www.veeco.com/role/StatementConsolidatedBalanceSheets" xlink:type="extended" xlink:title="00100 - Statement - Consolidated Balance Sheets" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_Assets" xlink:label="Assets" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AssetsCurrent" xlink:label="us-gaap_AssetsCurrent_638126891320456907" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="Assets" xlink:to="us-gaap_AssetsCurrent_638126891320456907" order="1" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CashAndCashEquivalentsAtCarryingValue" xlink:label="us-gaap_CashAndCashEquivalentsAtCarryingValue_638126891320456907" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_AssetsCurrent_638126891320456907" xlink:to="us-gaap_CashAndCashEquivalentsAtCarryingValue_638126891320456907" order="1" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AvailableForSaleSecuritiesDebtSecuritiesCurrent" xlink:label="us-gaap_AvailableForSaleSecuritiesDebtSecuritiesCurrent_638126891320456907" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_AssetsCurrent_638126891320456907" xlink:to="us-gaap_AvailableForSaleSecuritiesDebtSecuritiesCurrent_638126891320456907" order="2" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue" xlink:label="us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue_638126891320456907" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_AssetsCurrent_638126891320456907" xlink:to="us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue_638126891320456907" order="3" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AccountsReceivableNetCurrent" xlink:label="us-gaap_AccountsReceivableNetCurrent_638126891320456907" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_AssetsCurrent_638126891320456907" xlink:to="us-gaap_AccountsReceivableNetCurrent_638126891320456907" order="4" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_UnbilledContractsReceivable" xlink:label="us-gaap_UnbilledContractsReceivable_638126891320467135" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_AssetsCurrent_638126891320456907" xlink:to="us-gaap_UnbilledContractsReceivable_638126891320467135" order="5" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_InventoryNet" xlink:label="us-gaap_InventoryNet_638126891320467135" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_AssetsCurrent_638126891320456907" xlink:to="us-gaap_InventoryNet_638126891320467135" order="6" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PrepaidExpenseAndOtherAssetsCurrent" xlink:label="us-gaap_PrepaidExpenseAndOtherAssetsCurrent_638126891320467135" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_AssetsCurrent_638126891320456907" xlink:to="us-gaap_PrepaidExpenseAndOtherAssetsCurrent_638126891320467135" order="7" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PropertyPlantAndEquipmentNet" xlink:label="us-gaap_PropertyPlantAndEquipmentNet_638126891320467135" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="Assets" xlink:to="us-gaap_PropertyPlantAndEquipmentNet_638126891320467135" order="2" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OperatingLeaseRightOfUseAsset" xlink:label="us-gaap_OperatingLeaseRightOfUseAsset_638126891320467135" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="Assets" xlink:to="us-gaap_OperatingLeaseRightOfUseAsset_638126891320467135" order="3" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FiniteLivedIntangibleAssetsNet" xlink:label="us-gaap_FiniteLivedIntangibleAssetsNet_638126891320467135" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="Assets" xlink:to="us-gaap_FiniteLivedIntangibleAssetsNet_638126891320467135" order="4" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_Goodwill" xlink:label="us-gaap_Goodwill_638126891320467135" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="Assets" xlink:to="us-gaap_Goodwill_638126891320467135" order="5" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredIncomeTaxAssetsNet" xlink:label="us-gaap_DeferredIncomeTaxAssetsNet_638126891320477160" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="Assets" xlink:to="us-gaap_DeferredIncomeTaxAssetsNet_638126891320477160" order="6" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OtherAssetsNoncurrent" xlink:label="us-gaap_OtherAssetsNoncurrent_638126891320477160" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="Assets" xlink:to="us-gaap_OtherAssetsNoncurrent_638126891320477160" order="7" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LiabilitiesAndStockholdersEquity" xlink:label="LiabilitiesAndStockholdersEquity" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_Liabilities" xlink:label="us-gaap_Liabilities_638126891320477160" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="LiabilitiesAndStockholdersEquity" xlink:to="us-gaap_Liabilities_638126891320477160" order="1" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LiabilitiesCurrent" xlink:label="us-gaap_LiabilitiesCurrent_638126891320477160" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_Liabilities_638126891320477160" xlink:to="us-gaap_LiabilitiesCurrent_638126891320477160" order="1" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AccountsPayableCurrent" xlink:label="us-gaap_AccountsPayableCurrent_638126891320477160" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_LiabilitiesCurrent_638126891320477160" xlink:to="us-gaap_AccountsPayableCurrent_638126891320477160" order="1" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_AccruedAndOtherLiabilitiesCurrent" xlink:label="veco_AccruedAndOtherLiabilitiesCurrent_638126891320477160" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_LiabilitiesCurrent_638126891320477160" xlink:to="veco_AccruedAndOtherLiabilitiesCurrent_638126891320477160" order="2" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_ContractWithCustomerLiabilityAndRefundLiabilityCurrent" xlink:label="veco_ContractWithCustomerLiabilityAndRefundLiabilityCurrent_638126891320487144" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_LiabilitiesCurrent_638126891320477160" xlink:to="veco_ContractWithCustomerLiabilityAndRefundLiabilityCurrent_638126891320487144" order="3" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AccruedIncomeTaxesCurrent" xlink:label="us-gaap_AccruedIncomeTaxesCurrent_638126891320487144" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_LiabilitiesCurrent_638126891320477160" xlink:to="us-gaap_AccruedIncomeTaxesCurrent_638126891320487144" order="4" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LongTermDebtCurrent" xlink:label="us-gaap_LongTermDebtCurrent_638126891320487144" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_LiabilitiesCurrent_638126891320477160" xlink:to="us-gaap_LongTermDebtCurrent_638126891320487144" order="5" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredIncomeTaxLiabilitiesNet" xlink:label="us-gaap_DeferredIncomeTaxLiabilitiesNet_638126891320487144" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_Liabilities_638126891320477160" xlink:to="us-gaap_DeferredIncomeTaxLiabilitiesNet_638126891320487144" order="2" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LongTermDebtNoncurrent" xlink:label="us-gaap_LongTermDebtNoncurrent_638126891320487144" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_Liabilities_638126891320477160" xlink:to="us-gaap_LongTermDebtNoncurrent_638126891320487144" order="3" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OperatingLeaseLiabilityNoncurrent" xlink:label="us-gaap_OperatingLeaseLiabilityNoncurrent_638126891320487144" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_Liabilities_638126891320477160" xlink:to="us-gaap_OperatingLeaseLiabilityNoncurrent_638126891320487144" order="4" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OtherLiabilitiesNoncurrent" xlink:label="us-gaap_OtherLiabilitiesNoncurrent_638126891320497146" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_Liabilities_638126891320477160" xlink:to="us-gaap_OtherLiabilitiesNoncurrent_638126891320497146" order="5" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_StockholdersEquity" xlink:label="us-gaap_StockholdersEquity_638126891320497146" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="LiabilitiesAndStockholdersEquity" xlink:to="us-gaap_StockholdersEquity_638126891320497146" order="2" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PreferredStockValue" xlink:label="us-gaap_PreferredStockValue_638126891320497146" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_StockholdersEquity_638126891320497146" xlink:to="us-gaap_PreferredStockValue_638126891320497146" order="1" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CommonStockValue" xlink:label="us-gaap_CommonStockValue_638126891320497146" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_StockholdersEquity_638126891320497146" xlink:to="us-gaap_CommonStockValue_638126891320497146" order="2" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AdditionalPaidInCapitalCommonStock" xlink:label="us-gaap_AdditionalPaidInCapitalCommonStock_638126891320497146" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_StockholdersEquity_638126891320497146" xlink:to="us-gaap_AdditionalPaidInCapitalCommonStock_638126891320497146" order="3" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_RetainedEarningsAccumulatedDeficit" xlink:label="us-gaap_RetainedEarningsAccumulatedDeficit_638126891320507124" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_StockholdersEquity_638126891320497146" xlink:to="us-gaap_RetainedEarningsAccumulatedDeficit_638126891320507124" order="4" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax_638126891320507124" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_StockholdersEquity_638126891320497146" xlink:to="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax_638126891320507124" order="5" use="optional" weight="1" />
  </calculationLink>
  <calculationLink xlink:role="http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations" xlink:type="extended" xlink:title="00200 - Statement - Consolidated Statements of Operations" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_NetIncomeLoss" xlink:label="us-gaap_NetIncomeLoss" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest_638126891320517211" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetIncomeLoss" xlink:to="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest_638126891320517211" order="1" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OperatingIncomeLoss" xlink:label="us-gaap_OperatingIncomeLoss_638126891320517211" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest_638126891320517211" xlink:to="us-gaap_OperatingIncomeLoss_638126891320517211" order="1" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_GrossProfit" xlink:label="us-gaap_GrossProfit_638126891320517211" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_OperatingIncomeLoss_638126891320517211" xlink:to="us-gaap_GrossProfit_638126891320517211" order="1" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_RevenueFromContractWithCustomerIncludingAssessedTax" xlink:label="us-gaap_RevenueFromContractWithCustomerIncludingAssessedTax_638126891320517211" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_GrossProfit_638126891320517211" xlink:to="us-gaap_RevenueFromContractWithCustomerIncludingAssessedTax_638126891320517211" order="1" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CostOfGoodsAndServicesSold" xlink:label="us-gaap_CostOfGoodsAndServicesSold_638126891320517211" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_GrossProfit_638126891320517211" xlink:to="us-gaap_CostOfGoodsAndServicesSold_638126891320517211" order="2" use="optional" weight="-1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OperatingExpenses" xlink:label="us-gaap_OperatingExpenses_638126891320517211" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_OperatingIncomeLoss_638126891320517211" xlink:to="us-gaap_OperatingExpenses_638126891320517211" order="2" use="optional" weight="-1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ResearchAndDevelopmentExpense" xlink:label="us-gaap_ResearchAndDevelopmentExpense_638126891320526903" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_OperatingExpenses_638126891320517211" xlink:to="us-gaap_ResearchAndDevelopmentExpense_638126891320526903" order="1" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SellingGeneralAndAdministrativeExpense" xlink:label="us-gaap_SellingGeneralAndAdministrativeExpense_638126891320526903" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_OperatingExpenses_638126891320517211" xlink:to="us-gaap_SellingGeneralAndAdministrativeExpense_638126891320526903" order="2" use="optional" weight="1" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AmortizationOfIntangibleAssets" xlink:label="us-gaap_AmortizationOfIntangibleAssets_638126891320526903" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_OperatingExpenses_638126891320517211" xlink:to="us-gaap_AmortizationOfIntangibleAssets_638126891320526903" order="3" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_RestructuringCharges" xlink:label="us-gaap_RestructuringCharges_638126891320526903" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_OperatingExpenses_638126891320517211" xlink:to="us-gaap_RestructuringCharges_638126891320526903" order="4" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AssetImpairmentCharges" xlink:label="us-gaap_AssetImpairmentCharges_638126891320526903" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_OperatingExpenses_638126891320517211" xlink:to="us-gaap_AssetImpairmentCharges_638126891320526903" order="5" use="optional" weight="1" priority="3" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OtherOperatingIncomeExpenseNet" xlink:label="us-gaap_OtherOperatingIncomeExpenseNet_638126891320526903" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_OperatingExpenses_638126891320517211" xlink:to="us-gaap_OtherOperatingIncomeExpenseNet_638126891320526903" order="6" use="optional" weight="-1" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_InvestmentIncomeInterest" xlink:label="us-gaap_InvestmentIncomeInterest_638126891320526903" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest_638126891320517211" xlink:to="us-gaap_InvestmentIncomeInterest_638126891320526903" order="2" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_InterestExpense" xlink:label="us-gaap_InterestExpense_638126891320526903" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest_638126891320517211" xlink:to="us-gaap_InterestExpense_638126891320526903" order="3" use="optional" weight="-1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OtherNonoperatingIncomeExpense" xlink:label="us-gaap_OtherNonoperatingIncomeExpense_638126891320537141" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest_638126891320517211" xlink:to="us-gaap_OtherNonoperatingIncomeExpense_638126891320537141" order="4" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeTaxExpenseBenefit" xlink:label="us-gaap_IncomeTaxExpenseBenefit_638126891320537141" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetIncomeLoss" xlink:to="us-gaap_IncomeTaxExpenseBenefit_638126891320537141" order="2" use="optional" weight="-1" />
  </calculationLink>
  <calculationLink xlink:role="http://www.veeco.com/role/StatementConsolidatedStatementsOfComprehensiveIncomeLoss" xlink:type="extended" xlink:title="00300 - Statement - Consolidated Statements of Comprehensive Income (Loss)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ComprehensiveIncomeNetOfTax" xlink:label="us-gaap_ComprehensiveIncomeNetOfTax_637426774405686634" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_NetIncomeLoss" xlink:label="us-gaap_NetIncomeLoss_638126891320537141" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_ComprehensiveIncomeNetOfTax_637426774405686634" xlink:to="us-gaap_NetIncomeLoss_638126891320537141" order="1" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent" xlink:label="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent_638126891320537141" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_ComprehensiveIncomeNetOfTax_637426774405686634" xlink:to="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent_638126891320537141" order="2" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OtherComprehensiveIncomeAvailableforsaleSecuritiesAdjustmentNetOfTaxPortionAttributableToParent" xlink:label="us-gaap_OtherComprehensiveIncomeAvailableforsaleSecuritiesAdjustmentNetOfTaxPortionAttributableToParent_638126891320537141" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent_638126891320537141" xlink:to="us-gaap_OtherComprehensiveIncomeAvailableforsaleSecuritiesAdjustmentNetOfTaxPortionAttributableToParent_638126891320537141" order="1" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OtherComprehensiveIncomeUnrealizedHoldingGainLossOnSecuritiesArisingDuringPeriodNetOfTax" xlink:label="us-gaap_OtherComprehensiveIncomeUnrealizedHoldingGainLossOnSecuritiesArisingDuringPeriodNetOfTax_638126891320547177" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_OtherComprehensiveIncomeAvailableforsaleSecuritiesAdjustmentNetOfTaxPortionAttributableToParent_638126891320537141" xlink:to="us-gaap_OtherComprehensiveIncomeUnrealizedHoldingGainLossOnSecuritiesArisingDuringPeriodNetOfTax_638126891320547177" order="1" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent" xlink:label="us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent_638126891320547177" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent_638126891320537141" xlink:to="us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent_638126891320547177" order="2" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationGainLossArisingDuringPeriodNetOfTax" xlink:label="us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationGainLossArisingDuringPeriodNetOfTax_638126891320547177" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent_638126891320547177" xlink:to="us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationGainLossArisingDuringPeriodNetOfTax_638126891320547177" order="1" use="optional" weight="1" />
  </calculationLink>
  <calculationLink xlink:role="http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows" xlink:type="extended" xlink:title="00500 - Statement - Consolidated Statements of Cash Flows" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_NetCashProvidedByUsedInOperatingActivities" xlink:label="us-gaap_NetCashProvidedByUsedInOperatingActivities_638126891320547177" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect" xlink:to="us-gaap_NetCashProvidedByUsedInOperatingActivities_638126891320547177" order="1" use="optional" weight="1" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ProfitLoss" xlink:label="us-gaap_ProfitLoss_638126891320547177" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities_638126891320547177" xlink:to="us-gaap_ProfitLoss_638126891320547177" order="1" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DepreciationDepletionAndAmortization" xlink:label="us-gaap_DepreciationDepletionAndAmortization_638126891320547177" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities_638126891320547177" xlink:to="us-gaap_DepreciationDepletionAndAmortization_638126891320547177" order="2" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AmortizationOfFinancingCostsAndDiscounts" xlink:label="us-gaap_AmortizationOfFinancingCostsAndDiscounts_638126891320556896" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities_638126891320547177" xlink:to="us-gaap_AmortizationOfFinancingCostsAndDiscounts_638126891320556896" order="3" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredIncomeTaxExpenseBenefit" xlink:label="us-gaap_DeferredIncomeTaxExpenseBenefit_638126891320556896" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities_638126891320547177" xlink:to="us-gaap_DeferredIncomeTaxExpenseBenefit_638126891320556896" order="4" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensation" xlink:label="us-gaap_ShareBasedCompensation_638126891320556896" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities_638126891320547177" xlink:to="us-gaap_ShareBasedCompensation_638126891320556896" order="5" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_GainsLossesOnExtinguishmentOfDebt" xlink:label="us-gaap_GainsLossesOnExtinguishmentOfDebt_638126891320556896" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities_638126891320547177" xlink:to="us-gaap_GainsLossesOnExtinguishmentOfDebt_638126891320556896" order="6" use="optional" weight="-1" priority="3" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AssetImpairmentCharges" xlink:label="us-gaap_AssetImpairmentCharges_638126891320556896" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities_638126891320547177" xlink:to="us-gaap_AssetImpairmentCharges_638126891320556896" order="7" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_ImpairmentLossesInvestmentsNonCash" xlink:label="veco_ImpairmentLossesInvestmentsNonCash_638126891320556896" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities_638126891320547177" xlink:to="veco_ImpairmentLossesInvestmentsNonCash_638126891320556896" order="8" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ProvisionForDoubtfulAccounts" xlink:label="us-gaap_ProvisionForDoubtfulAccounts_638126891320556896" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities_638126891320547177" xlink:to="us-gaap_ProvisionForDoubtfulAccounts_638126891320556896" order="9" use="optional" weight="1" priority="1" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_IncreaseDecreaseInAccountsReceivableAndContractAssets" xlink:label="veco_IncreaseDecreaseInAccountsReceivableAndContractAssets_638126891320566901" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities_638126891320547177" xlink:to="veco_IncreaseDecreaseInAccountsReceivableAndContractAssets_638126891320566901" order="10" use="optional" weight="-1" priority="3" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncreaseDecreaseInInventories" xlink:label="us-gaap_IncreaseDecreaseInInventories_638126891320566901" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities_638126891320547177" xlink:to="us-gaap_IncreaseDecreaseInInventories_638126891320566901" order="11" use="optional" weight="-1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets" xlink:label="us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets_638126891320566901" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities_638126891320547177" xlink:to="us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets_638126891320566901" order="12" use="optional" weight="-1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncreaseDecreaseInAccountsPayableAndAccruedLiabilities" xlink:label="us-gaap_IncreaseDecreaseInAccountsPayableAndAccruedLiabilities_638126891320566901" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities_638126891320547177" xlink:to="us-gaap_IncreaseDecreaseInAccountsPayableAndAccruedLiabilities_638126891320566901" order="13" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_IncreaseDecreaseInCustomerDepositsAndDeferredRevenue" xlink:label="veco_IncreaseDecreaseInCustomerDepositsAndDeferredRevenue_638126891320566901" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities_638126891320547177" xlink:to="veco_IncreaseDecreaseInCustomerDepositsAndDeferredRevenue_638126891320566901" order="14" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncreaseDecreaseInIncomeTaxesPayableNetOfIncomeTaxesReceivable" xlink:label="us-gaap_IncreaseDecreaseInIncomeTaxesPayableNetOfIncomeTaxesReceivable_638126891320566901" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities_638126891320547177" xlink:to="us-gaap_IncreaseDecreaseInIncomeTaxesPayableNetOfIncomeTaxesReceivable_638126891320566901" order="15" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncreaseDecreaseInOtherOperatingCapitalNet" xlink:label="us-gaap_IncreaseDecreaseInOtherOperatingCapitalNet_638126891320576956" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities_638126891320547177" xlink:to="us-gaap_IncreaseDecreaseInOtherOperatingCapitalNet_638126891320576956" order="16" use="optional" weight="-1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_NetCashProvidedByUsedInInvestingActivities" xlink:label="us-gaap_NetCashProvidedByUsedInInvestingActivities_638126891320576956" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect" xlink:to="us-gaap_NetCashProvidedByUsedInInvestingActivities_638126891320576956" order="2" use="optional" weight="1" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PaymentsToAcquirePropertyPlantAndEquipment" xlink:label="us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_638126891320576956" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInInvestingActivities_638126891320576956" xlink:to="us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_638126891320576956" order="1" use="optional" weight="-1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ProceedsFromSaleAndMaturityOfAvailableForSaleSecurities" xlink:label="us-gaap_ProceedsFromSaleAndMaturityOfAvailableForSaleSecurities_638126891320576956" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInInvestingActivities_638126891320576956" xlink:to="us-gaap_ProceedsFromSaleAndMaturityOfAvailableForSaleSecurities_638126891320576956" order="2" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PaymentsToAcquireAvailableForSaleSecuritiesDebt" xlink:label="us-gaap_PaymentsToAcquireAvailableForSaleSecuritiesDebt_638126891320576956" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInInvestingActivities_638126891320576956" xlink:to="us-gaap_PaymentsToAcquireAvailableForSaleSecuritiesDebt_638126891320576956" order="3" use="optional" weight="-1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ProceedsFromSaleOfPropertyPlantAndEquipment" xlink:label="us-gaap_ProceedsFromSaleOfPropertyPlantAndEquipment_638126891320576956" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInInvestingActivities_638126891320576956" xlink:to="us-gaap_ProceedsFromSaleOfPropertyPlantAndEquipment_638126891320576956" order="4" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_NetCashProvidedByUsedInFinancingActivities" xlink:label="us-gaap_NetCashProvidedByUsedInFinancingActivities_638126891320587317" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect" xlink:to="us-gaap_NetCashProvidedByUsedInFinancingActivities_638126891320587317" order="3" use="optional" weight="1" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ProceedsFromConvertibleDebt" xlink:label="us-gaap_ProceedsFromConvertibleDebt_638126891320587317" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInFinancingActivities_638126891320587317" xlink:to="us-gaap_ProceedsFromConvertibleDebt_638126891320587317" order="1" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PaymentsForDerivativeInstrumentFinancingActivities" xlink:label="us-gaap_PaymentsForDerivativeInstrumentFinancingActivities_638126891320587317" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInFinancingActivities_638126891320587317" xlink:to="us-gaap_PaymentsForDerivativeInstrumentFinancingActivities_638126891320587317" order="2" use="optional" weight="-1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_RepaymentsOfUnsecuredDebt" xlink:label="us-gaap_RepaymentsOfUnsecuredDebt_638126891320587317" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInFinancingActivities_638126891320587317" xlink:to="us-gaap_RepaymentsOfUnsecuredDebt_638126891320587317" order="3" use="optional" weight="-1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ProceedsFromIssuanceOrSaleOfEquity" xlink:label="us-gaap_ProceedsFromIssuanceOrSaleOfEquity_638126891320587317" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInFinancingActivities_638126891320587317" xlink:to="us-gaap_ProceedsFromIssuanceOrSaleOfEquity_638126891320587317" order="4" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PaymentsRelatedToTaxWithholdingForShareBasedCompensation" xlink:label="us-gaap_PaymentsRelatedToTaxWithholdingForShareBasedCompensation_638126891320587317" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInFinancingActivities_638126891320587317" xlink:to="us-gaap_PaymentsRelatedToTaxWithholdingForShareBasedCompensation_638126891320587317" order="5" use="optional" weight="-1" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PaymentsOfDebtIssuanceCosts" xlink:label="us-gaap_PaymentsOfDebtIssuanceCosts_638126891320596911" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInFinancingActivities_638126891320587317" xlink:to="us-gaap_PaymentsOfDebtIssuanceCosts_638126891320596911" order="6" use="optional" weight="-1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations" xlink:label="us-gaap_EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations_638126891320596911" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect" xlink:to="us-gaap_EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations_638126891320596911" order="4" use="optional" weight="1" priority="2" />
  </calculationLink>
  <calculationLink xlink:role="http://www.veeco.com/role/DisclosureIncomePerCommonShareBasicAndDilutedDetails" xlink:type="extended" xlink:title="40201 - Disclosure - Income Per Common Share - Basic and Diluted (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_NetIncomeLossAvailableToCommonStockholdersDiluted" xlink:label="us-gaap_NetIncomeLossAvailableToCommonStockholdersDiluted" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic" xlink:label="us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic_638126891320596911" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetIncomeLossAvailableToCommonStockholdersDiluted" xlink:to="us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic_638126891320596911" order="1" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_InterestOnConvertibleDebtNetOfTax" xlink:label="us-gaap_InterestOnConvertibleDebtNetOfTax_638126891320596911" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetIncomeLossAvailableToCommonStockholdersDiluted" xlink:to="us-gaap_InterestOnConvertibleDebtNetOfTax_638126891320596911" order="2" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding" xlink:label="us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_WeightedAverageNumberOfSharesOutstandingBasic" xlink:label="us-gaap_WeightedAverageNumberOfSharesOutstandingBasic_638126891320607125" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding" xlink:to="us-gaap_WeightedAverageNumberOfSharesOutstandingBasic_638126891320607125" order="1" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncrementalCommonSharesAttributableToConversionOfDebtSecurities" xlink:label="us-gaap_IncrementalCommonSharesAttributableToConversionOfDebtSecurities_638126891320607125" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding" xlink:to="us-gaap_IncrementalCommonSharesAttributableToConversionOfDebtSecurities_638126891320607125" order="2" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_WeightedAverageNumberDilutedSharesOutstandingAdjustment" xlink:label="us-gaap_WeightedAverageNumberDilutedSharesOutstandingAdjustment_638126891320607125" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding" xlink:to="us-gaap_WeightedAverageNumberDilutedSharesOutstandingAdjustment_638126891320607125" order="3" use="optional" weight="1" priority="2" />
  </calculationLink>
  <calculationLink xlink:role="http://www.veeco.com/role/DisclosureInvestmentsAvailableForSaleSecuritiesDetails" xlink:type="extended" xlink:title="40401 - Disclosure - Investments - Available-For-Sale Securities (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AvailableForSaleDebtSecuritiesAmortizedCostBasis" xlink:label="us-gaap_AvailableForSaleDebtSecuritiesAmortizedCostBasis_1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AvailableForSaleSecuritiesDebtMaturitiesNextRollingTwelveMonthsAmortizedCostBasis" xlink:label="us-gaap_AvailableForSaleSecuritiesDebtMaturitiesNextRollingTwelveMonthsAmortizedCostBasis_638126891320607125" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_AvailableForSaleDebtSecuritiesAmortizedCostBasis_1" xlink:to="us-gaap_AvailableForSaleSecuritiesDebtMaturitiesNextRollingTwelveMonthsAmortizedCostBasis_638126891320607125" order="1" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterOneThroughTwoYearsAmortizedCost" xlink:label="veco_DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterOneThroughTwoYearsAmortizedCost_638126891320607125" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_AvailableForSaleDebtSecuritiesAmortizedCostBasis_1" xlink:to="veco_DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterOneThroughTwoYearsAmortizedCost_638126891320607125" order="2" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AvailableForSaleSecuritiesDebtSecurities" xlink:label="us-gaap_AvailableForSaleSecuritiesDebtSecurities_1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AvailableForSaleSecuritiesDebtMaturitiesNextRollingTwelveMonthsFairValue" xlink:label="us-gaap_AvailableForSaleSecuritiesDebtMaturitiesNextRollingTwelveMonthsFairValue_638126891320617083" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_AvailableForSaleSecuritiesDebtSecurities_1" xlink:to="us-gaap_AvailableForSaleSecuritiesDebtMaturitiesNextRollingTwelveMonthsFairValue_638126891320617083" order="1" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterOneThroughTwoYearsFairValue" xlink:label="veco_DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterOneThroughTwoYearsFairValue_638126891320617083" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_AvailableForSaleSecuritiesDebtSecurities_1" xlink:to="veco_DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterOneThroughTwoYearsFairValue_638126891320617083" order="2" use="optional" weight="1" />
  </calculationLink>
  <calculationLink xlink:role="http://www.veeco.com/role/DisclosureInventoriesDetails" xlink:type="extended" xlink:title="40501 - Disclosure - Inventories (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_InventoryNet" xlink:label="us-gaap_InventoryNet_636077277925183360" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_InventoryRawMaterialsNetOfReserves" xlink:label="us-gaap_InventoryRawMaterialsNetOfReserves_638126891320617083" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_InventoryNet_636077277925183360" xlink:to="us-gaap_InventoryRawMaterialsNetOfReserves_638126891320617083" order="1" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_InventoryWorkInProcessNetOfReserves" xlink:label="us-gaap_InventoryWorkInProcessNetOfReserves_638126891320617083" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_InventoryNet_636077277925183360" xlink:to="us-gaap_InventoryWorkInProcessNetOfReserves_638126891320617083" order="2" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_InventoryFinishedGoodsNetOfReserves" xlink:label="us-gaap_InventoryFinishedGoodsNetOfReserves_638126891320627158" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_InventoryNet_636077277925183360" xlink:to="us-gaap_InventoryFinishedGoodsNetOfReserves_638126891320627158" order="3" use="optional" weight="1" />
  </calculationLink>
  <calculationLink xlink:role="http://www.veeco.com/role/DisclosurePropertyPlantAndEquipmentPropertyAndEquipmentDetails" xlink:type="extended" xlink:title="40601 - Disclosure - Property, Plant, and Equipment - Property and Equipment (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PropertyPlantAndEquipmentNet" xlink:label="us-gaap_PropertyPlantAndEquipmentNet_636077277925183360" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment" xlink:label="us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment_638126891320627158" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_PropertyPlantAndEquipmentNet_636077277925183360" xlink:to="us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment_638126891320627158" order="1" use="optional" weight="-1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PropertyPlantAndEquipmentGross" xlink:label="us-gaap_PropertyPlantAndEquipmentGross_638126891320627158" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_PropertyPlantAndEquipmentNet_636077277925183360" xlink:to="us-gaap_PropertyPlantAndEquipmentGross_638126891320627158" order="2" use="optional" weight="1" priority="2" />
  </calculationLink>
  <calculationLink xlink:role="http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssetsGoodwillDetails" xlink:type="extended" xlink:title="40701 - Disclosure - Goodwill and Intangible Assets - Goodwill (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_Goodwill" xlink:label="us-gaap_Goodwill" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_GoodwillGross" xlink:label="us-gaap_GoodwillGross_638126891320627158" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_Goodwill" xlink:to="us-gaap_GoodwillGross_638126891320627158" order="1" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_GoodwillImpairedAccumulatedImpairmentLoss" xlink:label="us-gaap_GoodwillImpairedAccumulatedImpairmentLoss_638126891320627158" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_Goodwill" xlink:to="us-gaap_GoodwillImpairedAccumulatedImpairmentLoss_638126891320627158" order="2" use="optional" weight="-1" priority="2" />
  </calculationLink>
  <calculationLink xlink:role="http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssetsIntangibleAssetsDetails" xlink:type="extended" xlink:title="40702 - Disclosure - Goodwill and Intangible Assets - Intangible Assets (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FiniteLivedIntangibleAssetsNet" xlink:label="us-gaap_FiniteLivedIntangibleAssetsNet" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment" xlink:label="veco_FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment_638126891320637119" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_FiniteLivedIntangibleAssetsNet" xlink:to="veco_FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment_638126891320637119" order="1" use="optional" weight="-1" priority="3" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FiniteLivedIntangibleAssetsGross" xlink:label="us-gaap_FiniteLivedIntangibleAssetsGross_638126891320637119" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_FiniteLivedIntangibleAssetsNet" xlink:to="us-gaap_FiniteLivedIntangibleAssetsGross_638126891320637119" order="2" use="optional" weight="1" priority="2" />
  </calculationLink>
  <calculationLink xlink:role="http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssetsAmortizationDetails" xlink:type="extended" xlink:title="40703 - Disclosure - Goodwill and Intangible Assets - Amortization (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FiniteLivedIntangibleAssetsNet" xlink:label="us-gaap_FiniteLivedIntangibleAssetsNet" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseNextTwelveMonths" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseNextTwelveMonths_638126891320637119" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_FiniteLivedIntangibleAssetsNet" xlink:to="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseNextTwelveMonths_638126891320637119" order="1" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearTwo" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearTwo_638126891320637119" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_FiniteLivedIntangibleAssetsNet" xlink:to="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearTwo_638126891320637119" order="2" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearThree" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearThree_638126891320637119" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_FiniteLivedIntangibleAssetsNet" xlink:to="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearThree_638126891320637119" order="3" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFour" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFour_638126891320646903" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_FiniteLivedIntangibleAssetsNet" xlink:to="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFour_638126891320646903" order="4" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFive" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFive_638126891320646903" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_FiniteLivedIntangibleAssetsNet" xlink:to="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFive_638126891320646903" order="5" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseAfterYearFive" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseAfterYearFive_638126891320646903" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_FiniteLivedIntangibleAssetsNet" xlink:to="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseAfterYearFive_638126891320646903" order="6" use="optional" weight="1" priority="2" />
  </calculationLink>
  <calculationLink xlink:role="http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesComponentsDetails" xlink:type="extended" xlink:title="40801 - Disclosure - Accrued Expenses and Other Liabilities - Components (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_AccruedAndOtherLiabilitiesCurrent" xlink:label="veco_AccruedAndOtherLiabilitiesCurrent" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_EmployeeRelatedLiabilitiesCurrent" xlink:label="us-gaap_EmployeeRelatedLiabilitiesCurrent_638126891320646903" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="veco_AccruedAndOtherLiabilitiesCurrent" xlink:to="us-gaap_EmployeeRelatedLiabilitiesCurrent_638126891320646903" order="1" use="optional" weight="1" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ProductWarrantyAccrualClassifiedCurrent" xlink:label="us-gaap_ProductWarrantyAccrualClassifiedCurrent_638126891320646903" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="veco_AccruedAndOtherLiabilitiesCurrent" xlink:to="us-gaap_ProductWarrantyAccrualClassifiedCurrent_638126891320646903" order="2" use="optional" weight="1" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OperatingLeaseLiabilityCurrent" xlink:label="us-gaap_OperatingLeaseLiabilityCurrent_638126891320646903" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="veco_AccruedAndOtherLiabilitiesCurrent" xlink:to="us-gaap_OperatingLeaseLiabilityCurrent_638126891320646903" order="3" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_InterestPayableCurrent" xlink:label="us-gaap_InterestPayableCurrent_638126891320646903" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="veco_AccruedAndOtherLiabilitiesCurrent" xlink:to="us-gaap_InterestPayableCurrent_638126891320646903" order="4" use="optional" weight="1" priority="3" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AccruedProfessionalFeesCurrent" xlink:label="us-gaap_AccruedProfessionalFeesCurrent_638126891320657129" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="veco_AccruedAndOtherLiabilitiesCurrent" xlink:to="us-gaap_AccruedProfessionalFeesCurrent_638126891320657129" order="5" use="optional" weight="1" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LossContingencyAccrualCarryingValueCurrent" xlink:label="us-gaap_LossContingencyAccrualCarryingValueCurrent_638126891320657129" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="veco_AccruedAndOtherLiabilitiesCurrent" xlink:to="us-gaap_LossContingencyAccrualCarryingValueCurrent_638126891320657129" order="6" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_TaxesPayableCurrent" xlink:label="us-gaap_TaxesPayableCurrent_638126891320657129" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="veco_AccruedAndOtherLiabilitiesCurrent" xlink:to="us-gaap_TaxesPayableCurrent_638126891320657129" order="7" use="optional" weight="1" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OtherAccruedLiabilitiesCurrent" xlink:label="us-gaap_OtherAccruedLiabilitiesCurrent_638126891320657129" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="veco_AccruedAndOtherLiabilitiesCurrent" xlink:to="us-gaap_OtherAccruedLiabilitiesCurrent_638126891320657129" order="8" use="optional" weight="1" priority="4" />
  </calculationLink>
  <calculationLink xlink:role="http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesMinimumLeaseCommitmentsDetails" xlink:type="extended" xlink:title="40903 - Disclosure - Commitments and Contingencies - Minimum lease commitments (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths_638126891320657129" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths_638126891320657129" order="1" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo_638126891320657129" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo_638126891320657129" order="2" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree_638126891320667166" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree_638126891320667166" order="3" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour_638126891320667166" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour_638126891320667166" order="4" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFive" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFive_638126891320667166" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFive_638126891320667166" order="5" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive_638126891320667166" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive_638126891320667166" order="6" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OperatingLeaseLiability" xlink:label="us-gaap_OperatingLeaseLiability" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OperatingLeaseLiabilityCurrent" xlink:label="us-gaap_OperatingLeaseLiabilityCurrent_638126891320667166" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_OperatingLeaseLiability" xlink:to="us-gaap_OperatingLeaseLiabilityCurrent_638126891320667166" order="1" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OperatingLeaseLiabilityNoncurrent" xlink:label="us-gaap_OperatingLeaseLiabilityNoncurrent_638126891320667166" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_OperatingLeaseLiability" xlink:to="us-gaap_OperatingLeaseLiabilityNoncurrent_638126891320667166" order="2" use="optional" weight="1" priority="2" />
  </calculationLink>
  <calculationLink xlink:role="http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesMinimumLeaseCommitmentsDetailsCalc2" xlink:type="extended" xlink:title="40903 - Disclosure - Commitments and Contingencies - Minimum lease commitments (Details) (calc 2)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue_1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount_638126891320677143" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue_1" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount_638126891320677143" order="1" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OperatingLeaseLiability" xlink:label="us-gaap_OperatingLeaseLiability_638126891320677143" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue_1" xlink:to="us-gaap_OperatingLeaseLiability_638126891320677143" order="2" use="optional" weight="1" />
  </calculationLink>
  <calculationLink xlink:role="http://www.veeco.com/role/DisclosureDebtCarryingValueDetails" xlink:type="extended" xlink:title="41003 - Disclosure - Debt - Carrying Value (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LongTermDebt" xlink:label="us-gaap_LongTermDebt" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentFaceAmount" xlink:label="us-gaap_DebtInstrumentFaceAmount_638126891320677143" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_LongTermDebt" xlink:to="us-gaap_DebtInstrumentFaceAmount_638126891320677143" order="1" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentUnamortizedDiscountPremiumAndDebtIssuanceCostsNet" xlink:label="us-gaap_DebtInstrumentUnamortizedDiscountPremiumAndDebtIssuanceCostsNet_638126891320677143" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_LongTermDebt" xlink:to="us-gaap_DebtInstrumentUnamortizedDiscountPremiumAndDebtIssuanceCostsNet_638126891320677143" order="2" use="optional" weight="-1" priority="2" />
  </calculationLink>
  <calculationLink xlink:role="http://www.veeco.com/role/DisclosureDebtInterestExpenseDetails" xlink:type="extended" xlink:title="41004 - Disclosure - Debt - Interest Expense (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_InterestExpenseDebt" xlink:label="us-gaap_InterestExpenseDebt" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_InterestExpenseDebtExcludingAmortization" xlink:label="us-gaap_InterestExpenseDebtExcludingAmortization_638126891320687166" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_InterestExpenseDebt" xlink:to="us-gaap_InterestExpenseDebtExcludingAmortization_638126891320687166" order="1" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AmortizationOfFinancingCostsAndDiscounts" xlink:label="us-gaap_AmortizationOfFinancingCostsAndDiscounts_638126891320687166" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_InterestExpenseDebt" xlink:to="us-gaap_AmortizationOfFinancingCostsAndDiscounts_638126891320687166" order="2" use="optional" weight="1" priority="2" />
  </calculationLink>
  <calculationLink xlink:role="http://www.veeco.com/role/DisclosureIncomeTaxesIncomeAttributableToDomesticAndForeignOperationsDetails" xlink:type="extended" xlink:title="41501 - Disclosure - Income Taxes - Income Attributable to Domestic and Foreign Operations (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic_638126891320687166" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" xlink:to="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic_638126891320687166" order="1" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign_638126891320687166" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" xlink:to="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign_638126891320687166" order="2" use="optional" weight="1" priority="2" />
  </calculationLink>
  <calculationLink xlink:role="http://www.veeco.com/role/DisclosureIncomeTaxesComponentsOfExpenseBenefitDetails" xlink:type="extended" xlink:title="41502 - Disclosure - Income Taxes - Components of Expense (Benefit) (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeTaxExpenseBenefit" xlink:label="us-gaap_IncomeTaxExpenseBenefit" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CurrentIncomeTaxExpenseBenefit" xlink:label="us-gaap_CurrentIncomeTaxExpenseBenefit_638126891320697138" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_IncomeTaxExpenseBenefit" xlink:to="us-gaap_CurrentIncomeTaxExpenseBenefit_638126891320697138" order="1" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CurrentForeignTaxExpenseBenefit" xlink:label="us-gaap_CurrentForeignTaxExpenseBenefit_638126891320697138" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_CurrentIncomeTaxExpenseBenefit_638126891320697138" xlink:to="us-gaap_CurrentForeignTaxExpenseBenefit_638126891320697138" order="1" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CurrentStateAndLocalTaxExpenseBenefit" xlink:label="us-gaap_CurrentStateAndLocalTaxExpenseBenefit_638126891320697138" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_CurrentIncomeTaxExpenseBenefit_638126891320697138" xlink:to="us-gaap_CurrentStateAndLocalTaxExpenseBenefit_638126891320697138" order="2" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredIncomeTaxExpenseBenefit" xlink:label="us-gaap_DeferredIncomeTaxExpenseBenefit_638126891320697138" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_IncomeTaxExpenseBenefit" xlink:to="us-gaap_DeferredIncomeTaxExpenseBenefit_638126891320697138" order="2" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredFederalIncomeTaxExpenseBenefit" xlink:label="us-gaap_DeferredFederalIncomeTaxExpenseBenefit_638126891320697138" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_DeferredIncomeTaxExpenseBenefit_638126891320697138" xlink:to="us-gaap_DeferredFederalIncomeTaxExpenseBenefit_638126891320697138" order="1" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredForeignIncomeTaxExpenseBenefit" xlink:label="us-gaap_DeferredForeignIncomeTaxExpenseBenefit_638126891320697138" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_DeferredIncomeTaxExpenseBenefit_638126891320697138" xlink:to="us-gaap_DeferredForeignIncomeTaxExpenseBenefit_638126891320697138" order="2" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredStateAndLocalIncomeTaxExpenseBenefit" xlink:label="us-gaap_DeferredStateAndLocalIncomeTaxExpenseBenefit_638126891320697138" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_DeferredIncomeTaxExpenseBenefit_638126891320697138" xlink:to="us-gaap_DeferredStateAndLocalIncomeTaxExpenseBenefit_638126891320697138" order="3" use="optional" weight="1" priority="2" />
  </calculationLink>
  <calculationLink xlink:role="http://www.veeco.com/role/DisclosureIncomeTaxesReconciliationToStatutoryTaxExpenseDetails" xlink:type="extended" xlink:title="41503 - Disclosure - Income Taxes - Reconciliation to Statutory Tax Expense (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeTaxExpenseBenefit" xlink:label="us-gaap_IncomeTaxExpenseBenefit" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate" xlink:label="us-gaap_IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate_638126891320707160" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_IncomeTaxExpenseBenefit" xlink:to="us-gaap_IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate_638126891320707160" order="1" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeTaxReconciliationStateAndLocalIncomeTaxes" xlink:label="us-gaap_IncomeTaxReconciliationStateAndLocalIncomeTaxes_638126891320707160" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_IncomeTaxExpenseBenefit" xlink:to="us-gaap_IncomeTaxReconciliationStateAndLocalIncomeTaxes_638126891320707160" order="2" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeTaxReconciliationForeignIncomeTaxRateDifferential" xlink:label="us-gaap_IncomeTaxReconciliationForeignIncomeTaxRateDifferential_638126891320707160" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_IncomeTaxExpenseBenefit" xlink:to="us-gaap_IncomeTaxReconciliationForeignIncomeTaxRateDifferential_638126891320707160" order="3" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeTaxReconciliationTaxCreditsResearch" xlink:label="us-gaap_IncomeTaxReconciliationTaxCreditsResearch_638126891320707160" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_IncomeTaxExpenseBenefit" xlink:to="us-gaap_IncomeTaxReconciliationTaxCreditsResearch_638126891320707160" order="4" use="optional" weight="-1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance" xlink:label="us-gaap_IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance_638126891320716904" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_IncomeTaxExpenseBenefit" xlink:to="us-gaap_IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance_638126891320716904" order="5" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_IncomeTaxReconciliationChangeInAccrualForUnrecognizedTaxBenefits" xlink:label="veco_IncomeTaxReconciliationChangeInAccrualForUnrecognizedTaxBenefits_638126891320716904" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_IncomeTaxExpenseBenefit" xlink:to="veco_IncomeTaxReconciliationChangeInAccrualForUnrecognizedTaxBenefits_638126891320716904" order="6" use="optional" weight="-1" priority="3" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost" xlink:label="us-gaap_IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost_638126891320716904" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_IncomeTaxExpenseBenefit" xlink:to="us-gaap_IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost_638126891320716904" order="7" use="optional" weight="1" priority="3" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeTaxReconciliationNondeductibleExpenseImpairmentLosses" xlink:label="us-gaap_IncomeTaxReconciliationNondeductibleExpenseImpairmentLosses_638126891320716904" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_IncomeTaxExpenseBenefit" xlink:to="us-gaap_IncomeTaxReconciliationNondeductibleExpenseImpairmentLosses_638126891320716904" order="8" use="optional" weight="1" priority="3" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeTaxEffectsAllocatedDirectlyToEquityCumulativeEffectOfChangeInAccountingPrinciple" xlink:label="us-gaap_IncomeTaxEffectsAllocatedDirectlyToEquityCumulativeEffectOfChangeInAccountingPrinciple_638126891320716904" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_IncomeTaxExpenseBenefit" xlink:to="us-gaap_IncomeTaxEffectsAllocatedDirectlyToEquityCumulativeEffectOfChangeInAccountingPrinciple_638126891320716904" order="9" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_EffectiveIncomeTaxRateReconciliationPartialExtinguishmentOfDebtAmount" xlink:label="veco_EffectiveIncomeTaxRateReconciliationPartialExtinguishmentOfDebtAmount_638126891320716904" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_IncomeTaxExpenseBenefit" xlink:to="veco_EffectiveIncomeTaxRateReconciliationPartialExtinguishmentOfDebtAmount_638126891320716904" order="10" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeTaxReconciliationOtherAdjustments" xlink:label="us-gaap_IncomeTaxReconciliationOtherAdjustments_638126891320716904" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_IncomeTaxExpenseBenefit" xlink:to="us-gaap_IncomeTaxReconciliationOtherAdjustments_638126891320716904" order="11" use="optional" weight="1" priority="4" />
  </calculationLink>
  <calculationLink xlink:role="http://www.veeco.com/role/DisclosureIncomeTaxesDeferredTaxesDetails" xlink:type="extended" xlink:title="41504 - Disclosure - Income Taxes - Deferred Taxes (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredTaxAssetsLiabilitiesNet" xlink:label="us-gaap_DeferredTaxAssetsLiabilitiesNet" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredIncomeTaxLiabilities" xlink:label="us-gaap_DeferredIncomeTaxLiabilities_638126891320726895" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_DeferredTaxAssetsLiabilitiesNet" xlink:to="us-gaap_DeferredIncomeTaxLiabilities_638126891320726895" order="1" use="optional" weight="-1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredTaxAssetsNet" xlink:label="us-gaap_DeferredTaxAssetsNet_638126891320726895" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_DeferredTaxAssetsLiabilitiesNet" xlink:to="us-gaap_DeferredTaxAssetsNet_638126891320726895" order="2" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredTaxLiabilities" xlink:label="us-gaap_DeferredTaxLiabilities" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredIncomeTaxLiabilities" xlink:label="us-gaap_DeferredIncomeTaxLiabilities_638126891320747151" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_DeferredTaxLiabilities" xlink:to="us-gaap_DeferredIncomeTaxLiabilities_638126891320747151" order="1" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredTaxLiabilitiesGoodwillAndIntangibleAssetsIntangibleAssets" xlink:label="us-gaap_DeferredTaxLiabilitiesGoodwillAndIntangibleAssetsIntangibleAssets_638126891320757155" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_DeferredIncomeTaxLiabilities_638126891320747151" xlink:to="us-gaap_DeferredTaxLiabilitiesGoodwillAndIntangibleAssetsIntangibleAssets_638126891320757155" order="1" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_DeferredTaxLiabilitiesFinancingArrangementsNet" xlink:label="veco_DeferredTaxLiabilitiesFinancingArrangementsNet_638126891320757155" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_DeferredIncomeTaxLiabilities_638126891320747151" xlink:to="veco_DeferredTaxLiabilitiesFinancingArrangementsNet_638126891320757155" order="2" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredTaxLiabilitiesLeasingArrangements" xlink:label="us-gaap_DeferredTaxLiabilitiesLeasingArrangements_638126891320757155" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_DeferredIncomeTaxLiabilities_638126891320747151" xlink:to="us-gaap_DeferredTaxLiabilitiesLeasingArrangements_638126891320757155" order="3" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredTaxLiabilitiesPropertyPlantAndEquipment" xlink:label="us-gaap_DeferredTaxLiabilitiesPropertyPlantAndEquipment_638126891320757155" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_DeferredIncomeTaxLiabilities_638126891320747151" xlink:to="us-gaap_DeferredTaxLiabilitiesPropertyPlantAndEquipment_638126891320757155" order="4" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredTaxAssetsNet" xlink:label="us-gaap_DeferredTaxAssetsNet_638126891320757155" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_DeferredTaxLiabilities" xlink:to="us-gaap_DeferredTaxAssetsNet_638126891320757155" order="2" use="optional" weight="-1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredTaxAssetsGross" xlink:label="us-gaap_DeferredTaxAssetsGross_638126891320757155" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_DeferredTaxAssetsNet_638126891320757155" xlink:to="us-gaap_DeferredTaxAssetsGross_638126891320757155" order="1" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredTaxAssetsInventory" xlink:label="us-gaap_DeferredTaxAssetsInventory_638126891320766895" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_DeferredTaxAssetsGross_638126891320757155" xlink:to="us-gaap_DeferredTaxAssetsInventory_638126891320766895" order="1" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredTaxAssetsOperatingLossCarryforwards" xlink:label="us-gaap_DeferredTaxAssetsOperatingLossCarryforwards_638126891320766895" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_DeferredTaxAssetsGross_638126891320757155" xlink:to="us-gaap_DeferredTaxAssetsOperatingLossCarryforwards_638126891320766895" order="2" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredTaxAssetsTaxCreditCarryforwards" xlink:label="us-gaap_DeferredTaxAssetsTaxCreditCarryforwards_638126891320766895" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_DeferredTaxAssetsGross_638126891320757155" xlink:to="us-gaap_DeferredTaxAssetsTaxCreditCarryforwards_638126891320766895" order="3" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReserves" xlink:label="us-gaap_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReserves_638126891320766895" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_DeferredTaxAssetsGross_638126891320757155" xlink:to="us-gaap_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReserves_638126891320766895" order="4" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost" xlink:label="us-gaap_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost_638126891320766895" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_DeferredTaxAssetsGross_638126891320757155" xlink:to="us-gaap_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost_638126891320766895" order="5" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredTaxAssetsDeferredIncome" xlink:label="us-gaap_DeferredTaxAssetsDeferredIncome_638126891320776898" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_DeferredTaxAssetsGross_638126891320757155" xlink:to="us-gaap_DeferredTaxAssetsDeferredIncome_638126891320776898" order="6" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_DeferredTaxAssetsOperatingLeases" xlink:label="veco_DeferredTaxAssetsOperatingLeases_638126891320776898" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_DeferredTaxAssetsGross_638126891320757155" xlink:to="veco_DeferredTaxAssetsOperatingLeases_638126891320776898" order="7" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredTaxAssetsInProcessResearchAndDevelopment" xlink:label="us-gaap_DeferredTaxAssetsInProcessResearchAndDevelopment_638126891320776898" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_DeferredTaxAssetsGross_638126891320757155" xlink:to="us-gaap_DeferredTaxAssetsInProcessResearchAndDevelopment_638126891320776898" order="8" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredTaxAssetsOther" xlink:label="us-gaap_DeferredTaxAssetsOther_638126891320776898" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_DeferredTaxAssetsGross_638126891320757155" xlink:to="us-gaap_DeferredTaxAssetsOther_638126891320776898" order="9" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredTaxAssetsValuationAllowance" xlink:label="us-gaap_DeferredTaxAssetsValuationAllowance_638126891320776898" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_DeferredTaxAssetsNet_638126891320757155" xlink:to="us-gaap_DeferredTaxAssetsValuationAllowance_638126891320776898" order="2" use="optional" weight="-1" />
  </calculationLink>
</link:linkbase>
</XBRL>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EX-101.DEF
<SEQUENCE>11
<FILENAME>veco-20221231_def.xml
<DESCRIPTION>EX-101.DEF
<TEXT>
<XBRL>
<?xml version="1.0" encoding="us-ascii"?>
<!--XBRL document created with Toppan Merrill Bridge  10.2.0.4 -->
<!--Based on XBRL 2.1-->
<!--Created on: 2/22/2023 6:58:56 PM-->
<!--Modified on: 2/22/2023 6:58:56 PM-->
<link:linkbase xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:link="http://www.xbrl.org/2003/linkbase" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xbrli="http://www.xbrl.org/2003/instance" xmlns:xbrldt="http://xbrl.org/2005/xbrldt" xsi:schemaLocation="http://www.xbrl.org/2003/linkbase http://www.xbrl.org/2003/xbrl-linkbase-2003-12-31.xsd">
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#StatementConsolidatedStatementsOfStockholdersEquity" roleURI="http://www.veeco.com/role/StatementConsolidatedStatementsOfStockholdersEquity" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureSignificantAccountingPoliciesRecentlyAdoptedAccountingStandardsDetails" roleURI="http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesRecentlyAdoptedAccountingStandardsDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureIncomePerCommonShareSharesExcludedFromEpsDetails" roleURI="http://www.veeco.com/role/DisclosureIncomePerCommonShareSharesExcludedFromEpsDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureFairValueMeasurementsDetails" roleURI="http://www.veeco.com/role/DisclosureFairValueMeasurementsDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureInvestmentsAvailableForSaleSecuritiesDetails" roleURI="http://www.veeco.com/role/DisclosureInvestmentsAvailableForSaleSecuritiesDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureInvestmentsOtherInvestmentDetails" roleURI="http://www.veeco.com/role/DisclosureInvestmentsOtherInvestmentDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosurePropertyPlantAndEquipmentPropertyAndEquipmentDetails" roleURI="http://www.veeco.com/role/DisclosurePropertyPlantAndEquipmentPropertyAndEquipmentDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureGoodwillAndIntangibleAssetsIntangibleAssetsDetails" roleURI="http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssetsIntangibleAssetsDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureAccruedExpensesAndOtherLiabilitiesPerformanceObligationAmountDetails" roleURI="http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesPerformanceObligationAmountDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureAccruedExpensesAndOtherLiabilitiesPerformanceObligationAmountDefaultDetails" roleURI="http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesPerformanceObligationAmountDefaultDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureAccruedExpensesAndOtherLiabilitiesPerformanceObligationTimingDetails" roleURI="http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesPerformanceObligationTimingDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureAccruedExpensesAndOtherLiabilitiesPerformanceObligationTimingDefaultDetails" roleURI="http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesPerformanceObligationTimingDefaultDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureAccruedExpensesAndOtherLiabilitiesOtherLiabilitiesDetails" roleURI="http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesOtherLiabilitiesDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureCommitmentsAndContingenciesLegalProceedingsDetails" roleURI="http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesLegalProceedingsDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureCommitmentsAndContingenciesConcentrationOfCreditRiskDetails" roleURI="http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesConcentrationOfCreditRiskDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureCommitmentsAndContingenciesReceivablesDetails" roleURI="http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesReceivablesDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureDebt20232025And2027NotesDetails" roleURI="http://www.veeco.com/role/DisclosureDebt20232025And2027NotesDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureDebtConvertibleSeniorNotesDetails" roleURI="http://www.veeco.com/role/DisclosureDebtConvertibleSeniorNotesDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureDebtCarryingValueDetails" roleURI="http://www.veeco.com/role/DisclosureDebtCarryingValueDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureDebtInterestExpenseDetails" roleURI="http://www.veeco.com/role/DisclosureDebtInterestExpenseDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureDebtCappedCallTransactionsDetails" roleURI="http://www.veeco.com/role/DisclosureDebtCappedCallTransactionsDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureDebtRevolvingCreditFacilityDetails" roleURI="http://www.veeco.com/role/DisclosureDebtRevolvingCreditFacilityDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureStockholdersEquityAociRollforwardDetails" roleURI="http://www.veeco.com/role/DisclosureStockholdersEquityAociRollforwardDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureStockPlans2019PlanDetails" roleURI="http://www.veeco.com/role/DisclosureStockPlans2019PlanDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureStockPlansEsppDetails" roleURI="http://www.veeco.com/role/DisclosureStockPlansEsppDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureStockPlansSharesReservedForFutureIssuanceDetails" roleURI="http://www.veeco.com/role/DisclosureStockPlansSharesReservedForFutureIssuanceDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureStockPlansRecognizedShareBasedCompensationDetails" roleURI="http://www.veeco.com/role/DisclosureStockPlansRecognizedShareBasedCompensationDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureStockPlansUnrecognizedShareBasedCompensationCostsDetails" roleURI="http://www.veeco.com/role/DisclosureStockPlansUnrecognizedShareBasedCompensationCostsDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureStockPlansOptionExerciseRangesDetails" roleURI="http://www.veeco.com/role/DisclosureStockPlansOptionExerciseRangesDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureShareBasedCompensationRestrictedSharesAndPerformanceSharesDetails" roleURI="http://www.veeco.com/role/DisclosureShareBasedCompensationRestrictedSharesAndPerformanceSharesDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureStockPlansPerformanceAwardsAssumptionsDetails" roleURI="http://www.veeco.com/role/DisclosureStockPlansPerformanceAwardsAssumptionsDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureStockPlansEsppFvAssumptionsDetails" roleURI="http://www.veeco.com/role/DisclosureStockPlansEsppFvAssumptionsDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureRetirementPlansDefinedContributionPlanDetails" roleURI="http://www.veeco.com/role/DisclosureRetirementPlansDefinedContributionPlanDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureDispositionsDetails" roleURI="http://www.veeco.com/role/DisclosureDispositionsDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureIncomeTaxesOperatingLossCarryforwardsDetails" roleURI="http://www.veeco.com/role/DisclosureIncomeTaxesOperatingLossCarryforwardsDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureIncomeTaxesTaxCreditCarryforwardsDetails" roleURI="http://www.veeco.com/role/DisclosureIncomeTaxesTaxCreditCarryforwardsDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureSegmentReportingAndGeographicInformationSegmentDetails" roleURI="http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformationSegmentDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureSegmentReportingAndGeographicInformationGeographicDetails" roleURI="http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformationGeographicDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureSubsequentEventsDetails" roleURI="http://www.veeco.com/role/DisclosureSubsequentEventsDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureScheduleIiValuationAndQualifyingAccountsDetails" roleURI="http://www.veeco.com/role/DisclosureScheduleIiValuationAndQualifyingAccountsDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <link:arcroleRef arcroleURI="http://www.esma.europa.eu/xbrl/esef/arcrole/wider-narrower" xlink:type="simple" xlink:href="http://www.xbrl.org/lrr/arcrole/esma-arcrole-2018-11-21.xsd#wider-narrower" />
  <link:roleRef roleURI="http://www.veeco.com/role/DisclosureStandardAndCustomAxisDomainDefaults" xlink:href="veco-20221231.xsd#DisclosureStandardAndCustomAxisDomainDefaults" xlink:type="simple" />
  <roleRef xlink:type="simple" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-roles-2022.xsd#eedm" roleURI="http://fasb.org/us-gaap/role/eedm/ExtensibleEnumerationLists" xmlns="http://www.xbrl.org/2003/linkbase" />
  <link:arcroleRef arcroleURI="http://xbrl.org/int/dim/arcrole/all" xlink:type="simple" xlink:href="http://www.xbrl.org/2005/xbrldt-2005.xsd#all" />
  <link:arcroleRef arcroleURI="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:type="simple" xlink:href="http://www.xbrl.org/2005/xbrldt-2005.xsd#dimension-default" />
  <link:arcroleRef arcroleURI="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:type="simple" xlink:href="http://www.xbrl.org/2005/xbrldt-2005.xsd#dimension-domain" />
  <link:arcroleRef arcroleURI="http://xbrl.org/int/dim/arcrole/domain-member" xlink:type="simple" xlink:href="http://www.xbrl.org/2005/xbrldt-2005.xsd#domain-member" />
  <link:arcroleRef arcroleURI="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:type="simple" xlink:href="http://www.xbrl.org/2005/xbrldt-2005.xsd#hypercube-dimension" />
  <definitionLink xlink:role="http://fasb.org/us-gaap/role/eedm/ExtensibleEnumerationLists" xlink:type="extended" xlink:title="Extensible Enumeration Domain Members" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LiabilitiesAbstract" xlink:label="us-gaap_LiabilitiesAbstract" xlink:title="us-gaap_LiabilitiesAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OperatingLeaseLiabilityNoncurrent" xlink:label="us-gaap_OperatingLeaseLiabilityNoncurrent" xlink:title="us-gaap_OperatingLeaseLiabilityNoncurrent" />
    <definitionArc xlink:type="arc" xlink:from="us-gaap_LiabilitiesAbstract" xlink:to="us-gaap_OperatingLeaseLiabilityNoncurrent" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:title="definition:us-gaap_LiabilitiesAbstract To us-gaap_OperatingLeaseLiabilityNoncurrent" order="1" priority="0" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_AccruedAndOtherLiabilitiesCurrent" xlink:label="veco_AccruedAndOtherLiabilitiesCurrent_1" xlink:title="veco_AccruedAndOtherLiabilitiesCurrent_1" />
    <definitionArc xlink:type="arc" xlink:from="us-gaap_LiabilitiesAbstract" xlink:to="veco_AccruedAndOtherLiabilitiesCurrent_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:title="definition:us-gaap_LiabilitiesAbstract To veco_AccruedAndOtherLiabilitiesCurrent_1" order="2" priority="0" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LiabilitiesCurrentAbstract" xlink:label="us-gaap_LiabilitiesCurrentAbstract" xlink:title="us-gaap_LiabilitiesCurrentAbstract" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_AccruedAndOtherLiabilitiesCurrent" xlink:label="veco_AccruedAndOtherLiabilitiesCurrent_2" xlink:title="veco_AccruedAndOtherLiabilitiesCurrent_2" />
    <definitionArc xlink:type="arc" xlink:from="us-gaap_LiabilitiesCurrentAbstract" xlink:to="veco_AccruedAndOtherLiabilitiesCurrent_2" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:title="definition:us-gaap_LiabilitiesCurrentAbstract To veco_AccruedAndOtherLiabilitiesCurrent_2" order="1" priority="0" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_TypeOfAdoptionMember" xlink:label="us-gaap_TypeOfAdoptionMember_3" xlink:title="us-gaap_TypeOfAdoptionMember_3" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AccountingStandardsUpdate202006Member" xlink:label="us-gaap_AccountingStandardsUpdate202006Member_2" xlink:title="us-gaap_AccountingStandardsUpdate202006Member_2" />
    <definitionArc xlink:type="arc" xlink:from="us-gaap_TypeOfAdoptionMember_3" xlink:to="us-gaap_AccountingStandardsUpdate202006Member_2" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:title="definition:us-gaap_TypeOfAdoptionMember_3 To us-gaap_AccountingStandardsUpdate202006Member_2" order="1" priority="0" />
  </definitionLink>
  <link:definitionLink xlink:role="http://www.veeco.com/role/DisclosureStandardAndCustomAxisDomainDefaults" xlink:type="extended" xlink:title="99900 - Disclosure - Standard And Custom Axis Domain Defaults">
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AdjustmentsForNewAccountingPronouncementsAxis" xlink:label="us-gaap_AdjustmentsForNewAccountingPronouncementsAxis_1" xlink:title="us-gaap_AdjustmentsForNewAccountingPronouncementsAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_TypeOfAdoptionMember" xlink:label="us-gaap_TypeOfAdoptionMember_1" xlink:title="us-gaap_TypeOfAdoptionMember_1" />
    <link:definitionArc xlink:type="arc" xlink:from="us-gaap_AdjustmentsForNewAccountingPronouncementsAxis_1" xlink:to="us-gaap_TypeOfAdoptionMember_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:us-gaap_AdjustmentsForNewAccountingPronouncementsAxis_1 To us-gaap_TypeOfAdoptionMember_1" order="1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis" xlink:label="us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_1" xlink:title="us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AntidilutiveSecuritiesNameDomain" xlink:label="us-gaap_AntidilutiveSecuritiesNameDomain_1" xlink:title="us-gaap_AntidilutiveSecuritiesNameDomain_1" />
    <link:definitionArc xlink:type="arc" xlink:from="us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_1" xlink:to="us-gaap_AntidilutiveSecuritiesNameDomain_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_1 To us-gaap_AntidilutiveSecuritiesNameDomain_1" order="1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FairValueByMeasurementFrequencyAxis" xlink:label="us-gaap_FairValueByMeasurementFrequencyAxis_1" xlink:title="us-gaap_FairValueByMeasurementFrequencyAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FairValueMeasurementFrequencyDomain" xlink:label="us-gaap_FairValueMeasurementFrequencyDomain_1" xlink:title="us-gaap_FairValueMeasurementFrequencyDomain_1" />
    <link:definitionArc xlink:type="arc" xlink:from="us-gaap_FairValueByMeasurementFrequencyAxis_1" xlink:to="us-gaap_FairValueMeasurementFrequencyDomain_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:us-gaap_FairValueByMeasurementFrequencyAxis_1 To us-gaap_FairValueMeasurementFrequencyDomain_1" order="1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FairValueByFairValueHierarchyLevelAxis" xlink:label="us-gaap_FairValueByFairValueHierarchyLevelAxis_1" xlink:title="us-gaap_FairValueByFairValueHierarchyLevelAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FairValueMeasurementsFairValueHierarchyDomain" xlink:label="us-gaap_FairValueMeasurementsFairValueHierarchyDomain_1" xlink:title="us-gaap_FairValueMeasurementsFairValueHierarchyDomain_1" />
    <link:definitionArc xlink:type="arc" xlink:from="us-gaap_FairValueByFairValueHierarchyLevelAxis_1" xlink:to="us-gaap_FairValueMeasurementsFairValueHierarchyDomain_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:us-gaap_FairValueByFairValueHierarchyLevelAxis_1 To us-gaap_FairValueMeasurementsFairValueHierarchyDomain_1" order="1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CashAndCashEquivalentsAxis" xlink:label="us-gaap_CashAndCashEquivalentsAxis_1" xlink:title="us-gaap_CashAndCashEquivalentsAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_RestrictedCashAndCashEquivalentsCashAndCashEquivalentsMember" xlink:label="us-gaap_RestrictedCashAndCashEquivalentsCashAndCashEquivalentsMember_1" xlink:title="us-gaap_RestrictedCashAndCashEquivalentsCashAndCashEquivalentsMember_1" />
    <link:definitionArc xlink:type="arc" xlink:from="us-gaap_CashAndCashEquivalentsAxis_1" xlink:to="us-gaap_RestrictedCashAndCashEquivalentsCashAndCashEquivalentsMember_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:us-gaap_CashAndCashEquivalentsAxis_1 To us-gaap_RestrictedCashAndCashEquivalentsCashAndCashEquivalentsMember_1" order="1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FinancialInstrumentAxis" xlink:label="us-gaap_FinancialInstrumentAxis_1" xlink:title="us-gaap_FinancialInstrumentAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_TransfersAndServicingOfFinancialInstrumentsTypesOfFinancialInstrumentsDomain" xlink:label="us-gaap_TransfersAndServicingOfFinancialInstrumentsTypesOfFinancialInstrumentsDomain_1" xlink:title="us-gaap_TransfersAndServicingOfFinancialInstrumentsTypesOfFinancialInstrumentsDomain_1" />
    <link:definitionArc xlink:type="arc" xlink:from="us-gaap_FinancialInstrumentAxis_1" xlink:to="us-gaap_TransfersAndServicingOfFinancialInstrumentsTypesOfFinancialInstrumentsDomain_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:us-gaap_FinancialInstrumentAxis_1 To us-gaap_TransfersAndServicingOfFinancialInstrumentsTypesOfFinancialInstrumentsDomain_1" order="1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_RangeAxis" xlink:label="srt_RangeAxis_1" xlink:title="srt_RangeAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_RangeMember" xlink:label="srt_RangeMember_1" xlink:title="srt_RangeMember_1" />
    <link:definitionArc xlink:type="arc" xlink:from="srt_RangeAxis_1" xlink:to="srt_RangeMember_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:srt_RangeAxis_1 To srt_RangeMember_1" order="1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LossContingenciesByNatureOfContingencyAxis" xlink:label="us-gaap_LossContingenciesByNatureOfContingencyAxis_1" xlink:title="us-gaap_LossContingenciesByNatureOfContingencyAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LossContingencyNatureDomain" xlink:label="us-gaap_LossContingencyNatureDomain_1" xlink:title="us-gaap_LossContingencyNatureDomain_1" />
    <link:definitionArc xlink:type="arc" xlink:from="us-gaap_LossContingenciesByNatureOfContingencyAxis_1" xlink:to="us-gaap_LossContingencyNatureDomain_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:us-gaap_LossContingenciesByNatureOfContingencyAxis_1 To us-gaap_LossContingencyNatureDomain_1" order="1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PropertyPlantAndEquipmentByTypeAxis" xlink:label="us-gaap_PropertyPlantAndEquipmentByTypeAxis_1" xlink:title="us-gaap_PropertyPlantAndEquipmentByTypeAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PropertyPlantAndEquipmentTypeDomain" xlink:label="us-gaap_PropertyPlantAndEquipmentTypeDomain_1" xlink:title="us-gaap_PropertyPlantAndEquipmentTypeDomain_1" />
    <link:definitionArc xlink:type="arc" xlink:from="us-gaap_PropertyPlantAndEquipmentByTypeAxis_1" xlink:to="us-gaap_PropertyPlantAndEquipmentTypeDomain_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:us-gaap_PropertyPlantAndEquipmentByTypeAxis_1 To us-gaap_PropertyPlantAndEquipmentTypeDomain_1" order="1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis" xlink:label="us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_1" xlink:title="us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain" xlink:label="us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_1" xlink:title="us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_1" />
    <link:definitionArc xlink:type="arc" xlink:from="us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_1" xlink:to="us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_1 To us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_1" order="1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IndefiniteLivedIntangibleAssetsByMajorClassAxis" xlink:label="us-gaap_IndefiniteLivedIntangibleAssetsByMajorClassAxis_1" xlink:title="us-gaap_IndefiniteLivedIntangibleAssetsByMajorClassAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IndefiniteLivedIntangibleAssetsMajorClassNameDomain" xlink:label="us-gaap_IndefiniteLivedIntangibleAssetsMajorClassNameDomain_1" xlink:title="us-gaap_IndefiniteLivedIntangibleAssetsMajorClassNameDomain_1" />
    <link:definitionArc xlink:type="arc" xlink:from="us-gaap_IndefiniteLivedIntangibleAssetsByMajorClassAxis_1" xlink:to="us-gaap_IndefiniteLivedIntangibleAssetsMajorClassNameDomain_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:us-gaap_IndefiniteLivedIntangibleAssetsByMajorClassAxis_1 To us-gaap_IndefiniteLivedIntangibleAssetsMajorClassNameDomain_1" order="1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentAxis" xlink:label="us-gaap_DebtInstrumentAxis_1" xlink:title="us-gaap_DebtInstrumentAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentNameDomain" xlink:label="us-gaap_DebtInstrumentNameDomain_1" xlink:title="us-gaap_DebtInstrumentNameDomain_1" />
    <link:definitionArc xlink:type="arc" xlink:from="us-gaap_DebtInstrumentAxis_1" xlink:to="us-gaap_DebtInstrumentNameDomain_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:us-gaap_DebtInstrumentAxis_1 To us-gaap_DebtInstrumentNameDomain_1" order="1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DerivativeInstrumentRiskAxis" xlink:label="us-gaap_DerivativeInstrumentRiskAxis_1" xlink:title="us-gaap_DerivativeInstrumentRiskAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DerivativeContractTypeDomain" xlink:label="us-gaap_DerivativeContractTypeDomain_1" xlink:title="us-gaap_DerivativeContractTypeDomain_1" />
    <link:definitionArc xlink:type="arc" xlink:from="us-gaap_DerivativeInstrumentRiskAxis_1" xlink:to="us-gaap_DerivativeContractTypeDomain_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:us-gaap_DerivativeInstrumentRiskAxis_1 To us-gaap_DerivativeContractTypeDomain_1" order="1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_BalanceSheetLocationAxis" xlink:label="us-gaap_BalanceSheetLocationAxis_1" xlink:title="us-gaap_BalanceSheetLocationAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_BalanceSheetLocationDomain" xlink:label="us-gaap_BalanceSheetLocationDomain_1" xlink:title="us-gaap_BalanceSheetLocationDomain_1" />
    <link:definitionArc xlink:type="arc" xlink:from="us-gaap_BalanceSheetLocationAxis_1" xlink:to="us-gaap_BalanceSheetLocationDomain_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:us-gaap_BalanceSheetLocationAxis_1 To us-gaap_BalanceSheetLocationDomain_1" order="1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_StatementEquityComponentsAxis" xlink:label="us-gaap_StatementEquityComponentsAxis_1" xlink:title="us-gaap_StatementEquityComponentsAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_EquityComponentDomain" xlink:label="us-gaap_EquityComponentDomain_1" xlink:title="us-gaap_EquityComponentDomain_1" />
    <link:definitionArc xlink:type="arc" xlink:from="us-gaap_StatementEquityComponentsAxis_1" xlink:to="us-gaap_EquityComponentDomain_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:us-gaap_StatementEquityComponentsAxis_1 To us-gaap_EquityComponentDomain_1" order="1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AwardTypeAxis" xlink:label="us-gaap_AwardTypeAxis_1" xlink:title="us-gaap_AwardTypeAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xlink:label="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_1" xlink:title="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_1" />
    <link:definitionArc xlink:type="arc" xlink:from="us-gaap_AwardTypeAxis_1" xlink:to="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:us-gaap_AwardTypeAxis_1 To us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_1" order="1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeStatementLocationAxis" xlink:label="us-gaap_IncomeStatementLocationAxis_1" xlink:title="us-gaap_IncomeStatementLocationAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeStatementLocationDomain" xlink:label="us-gaap_IncomeStatementLocationDomain_1" xlink:title="us-gaap_IncomeStatementLocationDomain_1" />
    <link:definitionArc xlink:type="arc" xlink:from="us-gaap_IncomeStatementLocationAxis_1" xlink:to="us-gaap_IncomeStatementLocationDomain_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:us-gaap_IncomeStatementLocationAxis_1 To us-gaap_IncomeStatementLocationDomain_1" order="1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeTaxAuthorityAxis" xlink:label="us-gaap_IncomeTaxAuthorityAxis_1" xlink:title="us-gaap_IncomeTaxAuthorityAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeTaxAuthorityDomain" xlink:label="us-gaap_IncomeTaxAuthorityDomain_1" xlink:title="us-gaap_IncomeTaxAuthorityDomain_1" />
    <link:definitionArc xlink:type="arc" xlink:from="us-gaap_IncomeTaxAuthorityAxis_1" xlink:to="us-gaap_IncomeTaxAuthorityDomain_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:us-gaap_IncomeTaxAuthorityAxis_1 To us-gaap_IncomeTaxAuthorityDomain_1" order="1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_ProductOrServiceAxis" xlink:label="srt_ProductOrServiceAxis_1" xlink:title="srt_ProductOrServiceAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_ProductsAndServicesDomain" xlink:label="srt_ProductsAndServicesDomain_1" xlink:title="srt_ProductsAndServicesDomain_1" />
    <link:definitionArc xlink:type="arc" xlink:from="srt_ProductOrServiceAxis_1" xlink:to="srt_ProductsAndServicesDomain_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:srt_ProductOrServiceAxis_1 To srt_ProductsAndServicesDomain_1" order="1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_StatementGeographicalAxis" xlink:label="srt_StatementGeographicalAxis_1" xlink:title="srt_StatementGeographicalAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_SegmentGeographicalDomain" xlink:label="srt_SegmentGeographicalDomain_1" xlink:title="srt_SegmentGeographicalDomain_1" />
    <link:definitionArc xlink:type="arc" xlink:from="srt_StatementGeographicalAxis_1" xlink:to="srt_SegmentGeographicalDomain_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:srt_StatementGeographicalAxis_1 To srt_SegmentGeographicalDomain_1" order="1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_StatementScenarioAxis" xlink:label="srt_StatementScenarioAxis_1" xlink:title="srt_StatementScenarioAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_ScenarioUnspecifiedDomain" xlink:label="srt_ScenarioUnspecifiedDomain_1" xlink:title="srt_ScenarioUnspecifiedDomain_1" />
    <link:definitionArc xlink:type="arc" xlink:from="srt_StatementScenarioAxis_1" xlink:to="srt_ScenarioUnspecifiedDomain_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:srt_StatementScenarioAxis_1 To srt_ScenarioUnspecifiedDomain_1" order="1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_RestatementAxis" xlink:label="srt_RestatementAxis_1" xlink:title="srt_RestatementAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_RestatementDomain" xlink:label="srt_RestatementDomain_1" xlink:title="srt_RestatementDomain_1" />
    <link:definitionArc xlink:type="arc" xlink:from="srt_RestatementAxis_1" xlink:to="srt_RestatementDomain_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:srt_RestatementAxis_1 To srt_RestatementDomain_1" order="1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis" xlink:label="srt_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_1" xlink:title="srt_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_EquityMethodInvesteeNameDomain" xlink:label="srt_EquityMethodInvesteeNameDomain_1" xlink:title="srt_EquityMethodInvesteeNameDomain_1" />
    <link:definitionArc xlink:type="arc" xlink:from="srt_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_1" xlink:to="srt_EquityMethodInvesteeNameDomain_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:srt_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_1 To srt_EquityMethodInvesteeNameDomain_1" order="1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LeaseContractualTermAxis" xlink:label="us-gaap_LeaseContractualTermAxis_1" xlink:title="us-gaap_LeaseContractualTermAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LeaseContractualTermDomain" xlink:label="us-gaap_LeaseContractualTermDomain_1" xlink:title="us-gaap_LeaseContractualTermDomain_1" />
    <link:definitionArc xlink:type="arc" xlink:from="us-gaap_LeaseContractualTermAxis_1" xlink:to="us-gaap_LeaseContractualTermDomain_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:us-gaap_LeaseContractualTermAxis_1 To us-gaap_LeaseContractualTermDomain_1" order="1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_LegalEntityAxis" xlink:label="dei_LegalEntityAxis_1" xlink:title="dei_LegalEntityAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_EntityDomain" xlink:label="dei_EntityDomain_1" xlink:title="dei_EntityDomain_1" />
    <link:definitionArc xlink:type="arc" xlink:from="dei_LegalEntityAxis_1" xlink:to="dei_EntityDomain_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:dei_LegalEntityAxis_1 To dei_EntityDomain_1" order="1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_RestructuringCostAndReserveAxis" xlink:label="us-gaap_RestructuringCostAndReserveAxis_1" xlink:title="us-gaap_RestructuringCostAndReserveAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_TypeOfRestructuringDomain" xlink:label="us-gaap_TypeOfRestructuringDomain_1" xlink:title="us-gaap_TypeOfRestructuringDomain_1" />
    <link:definitionArc xlink:type="arc" xlink:from="us-gaap_RestructuringCostAndReserveAxis_1" xlink:to="us-gaap_TypeOfRestructuringDomain_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:us-gaap_RestructuringCostAndReserveAxis_1 To us-gaap_TypeOfRestructuringDomain_1" order="1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_RestructuringPlanAxis" xlink:label="us-gaap_RestructuringPlanAxis_1" xlink:title="us-gaap_RestructuringPlanAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_RestructuringPlanDomain" xlink:label="us-gaap_RestructuringPlanDomain_1" xlink:title="us-gaap_RestructuringPlanDomain_1" />
    <link:definitionArc xlink:type="arc" xlink:from="us-gaap_RestructuringPlanAxis_1" xlink:to="us-gaap_RestructuringPlanDomain_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:us-gaap_RestructuringPlanAxis_1 To us-gaap_RestructuringPlanDomain_1" order="1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ConcentrationRiskByBenchmarkAxis" xlink:label="us-gaap_ConcentrationRiskByBenchmarkAxis_1" xlink:title="us-gaap_ConcentrationRiskByBenchmarkAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ConcentrationRiskBenchmarkDomain" xlink:label="us-gaap_ConcentrationRiskBenchmarkDomain_1" xlink:title="us-gaap_ConcentrationRiskBenchmarkDomain_1" />
    <link:definitionArc xlink:type="arc" xlink:from="us-gaap_ConcentrationRiskByBenchmarkAxis_1" xlink:to="us-gaap_ConcentrationRiskBenchmarkDomain_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:us-gaap_ConcentrationRiskByBenchmarkAxis_1 To us-gaap_ConcentrationRiskBenchmarkDomain_1" order="1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ConcentrationRiskByTypeAxis" xlink:label="us-gaap_ConcentrationRiskByTypeAxis_1" xlink:title="us-gaap_ConcentrationRiskByTypeAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ConcentrationRiskTypeDomain" xlink:label="us-gaap_ConcentrationRiskTypeDomain_1" xlink:title="us-gaap_ConcentrationRiskTypeDomain_1" />
    <link:definitionArc xlink:type="arc" xlink:from="us-gaap_ConcentrationRiskByTypeAxis_1" xlink:to="us-gaap_ConcentrationRiskTypeDomain_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:us-gaap_ConcentrationRiskByTypeAxis_1 To us-gaap_ConcentrationRiskTypeDomain_1" order="1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_MajorCustomersAxis" xlink:label="srt_MajorCustomersAxis_1" xlink:title="srt_MajorCustomersAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_NameOfMajorCustomerDomain" xlink:label="srt_NameOfMajorCustomerDomain_1" xlink:title="srt_NameOfMajorCustomerDomain_1" />
    <link:definitionArc xlink:type="arc" xlink:from="srt_MajorCustomersAxis_1" xlink:to="srt_NameOfMajorCustomerDomain_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:srt_MajorCustomersAxis_1 To srt_NameOfMajorCustomerDomain_1" order="1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SubsequentEventTypeAxis" xlink:label="us-gaap_SubsequentEventTypeAxis_1" xlink:title="us-gaap_SubsequentEventTypeAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SubsequentEventTypeDomain" xlink:label="us-gaap_SubsequentEventTypeDomain_1" xlink:title="us-gaap_SubsequentEventTypeDomain_1" />
    <link:definitionArc xlink:type="arc" xlink:from="us-gaap_SubsequentEventTypeAxis_1" xlink:to="us-gaap_SubsequentEventTypeDomain_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:us-gaap_SubsequentEventTypeAxis_1 To us-gaap_SubsequentEventTypeDomain_1" order="1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_HedgingDesignationAxis" xlink:label="us-gaap_HedgingDesignationAxis_1" xlink:title="us-gaap_HedgingDesignationAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_HedgingDesignationDomain" xlink:label="us-gaap_HedgingDesignationDomain_1" xlink:title="us-gaap_HedgingDesignationDomain_1" />
    <link:definitionArc xlink:type="arc" xlink:from="us-gaap_HedgingDesignationAxis_1" xlink:to="us-gaap_HedgingDesignationDomain_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:us-gaap_HedgingDesignationAxis_1 To us-gaap_HedgingDesignationDomain_1" order="1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PlanNameAxis" xlink:label="us-gaap_PlanNameAxis_1" xlink:title="us-gaap_PlanNameAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PlanNameDomain" xlink:label="us-gaap_PlanNameDomain_1" xlink:title="us-gaap_PlanNameDomain_1" />
    <link:definitionArc xlink:type="arc" xlink:from="us-gaap_PlanNameAxis_1" xlink:to="us-gaap_PlanNameDomain_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:us-gaap_PlanNameAxis_1 To us-gaap_PlanNameDomain_1" order="1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis" xlink:label="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis_1" xlink:title="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeDomain" xlink:label="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeDomain_1" xlink:title="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeDomain_1" />
    <link:definitionArc xlink:type="arc" xlink:from="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis_1" xlink:to="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeDomain_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis_1 To us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeDomain_1" order="1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsAxis" xlink:label="us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsAxis_1" xlink:title="us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DisposalGroupsIncludingDiscontinuedOperationsNameDomain" xlink:label="us-gaap_DisposalGroupsIncludingDiscontinuedOperationsNameDomain_1" xlink:title="us-gaap_DisposalGroupsIncludingDiscontinuedOperationsNameDomain_1" />
    <link:definitionArc xlink:type="arc" xlink:from="us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsAxis_1" xlink:to="us-gaap_DisposalGroupsIncludingDiscontinuedOperationsNameDomain_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsAxis_1 To us-gaap_DisposalGroupsIncludingDiscontinuedOperationsNameDomain_1" order="1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DisposalGroupClassificationAxis" xlink:label="us-gaap_DisposalGroupClassificationAxis_1" xlink:title="us-gaap_DisposalGroupClassificationAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DisposalGroupClassificationDomain" xlink:label="us-gaap_DisposalGroupClassificationDomain_1" xlink:title="us-gaap_DisposalGroupClassificationDomain_1" />
    <link:definitionArc xlink:type="arc" xlink:from="us-gaap_DisposalGroupClassificationAxis_1" xlink:to="us-gaap_DisposalGroupClassificationDomain_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:us-gaap_DisposalGroupClassificationAxis_1 To us-gaap_DisposalGroupClassificationDomain_1" order="1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_TaxCreditCarryforwardAxis" xlink:label="us-gaap_TaxCreditCarryforwardAxis_1" xlink:title="us-gaap_TaxCreditCarryforwardAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_TaxCreditCarryforwardNameDomain" xlink:label="us-gaap_TaxCreditCarryforwardNameDomain_1" xlink:title="us-gaap_TaxCreditCarryforwardNameDomain_1" />
    <link:definitionArc xlink:type="arc" xlink:from="us-gaap_TaxCreditCarryforwardAxis_1" xlink:to="us-gaap_TaxCreditCarryforwardNameDomain_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:us-gaap_TaxCreditCarryforwardAxis_1 To us-gaap_TaxCreditCarryforwardNameDomain_1" order="1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ValuationAllowancesAndReservesTypeAxis" xlink:label="us-gaap_ValuationAllowancesAndReservesTypeAxis_1" xlink:title="us-gaap_ValuationAllowancesAndReservesTypeAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ValuationAllowancesAndReservesDomain" xlink:label="us-gaap_ValuationAllowancesAndReservesDomain_1" xlink:title="us-gaap_ValuationAllowancesAndReservesDomain_1" />
    <link:definitionArc xlink:type="arc" xlink:from="us-gaap_ValuationAllowancesAndReservesTypeAxis_1" xlink:to="us-gaap_ValuationAllowancesAndReservesDomain_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:us-gaap_ValuationAllowancesAndReservesTypeAxis_1 To us-gaap_ValuationAllowancesAndReservesDomain_1" order="1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_LitigationCaseAxis" xlink:label="srt_LitigationCaseAxis_1" xlink:title="srt_LitigationCaseAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_LitigationCaseTypeDomain" xlink:label="srt_LitigationCaseTypeDomain_1" xlink:title="srt_LitigationCaseTypeDomain_1" />
    <link:definitionArc xlink:type="arc" xlink:from="srt_LitigationCaseAxis_1" xlink:to="srt_LitigationCaseTypeDomain_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:srt_LitigationCaseAxis_1 To srt_LitigationCaseTypeDomain_1" order="1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_VariableRateAxis" xlink:label="us-gaap_VariableRateAxis_1" xlink:title="us-gaap_VariableRateAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_VariableRateDomain" xlink:label="us-gaap_VariableRateDomain_1" xlink:title="us-gaap_VariableRateDomain_1" />
    <link:definitionArc xlink:type="arc" xlink:from="us-gaap_VariableRateAxis_1" xlink:to="us-gaap_VariableRateDomain_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:us-gaap_VariableRateAxis_1 To us-gaap_VariableRateDomain_1" order="1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_CumulativeEffectPeriodOfAdoptionAxis" xlink:label="srt_CumulativeEffectPeriodOfAdoptionAxis_1" xlink:title="srt_CumulativeEffectPeriodOfAdoptionAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_CumulativeEffectPeriodOfAdoptionDomain" xlink:label="srt_CumulativeEffectPeriodOfAdoptionDomain_1" xlink:title="srt_CumulativeEffectPeriodOfAdoptionDomain_1" />
    <link:definitionArc xlink:type="arc" xlink:from="srt_CumulativeEffectPeriodOfAdoptionAxis_1" xlink:to="srt_CumulativeEffectPeriodOfAdoptionDomain_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:srt_CumulativeEffectPeriodOfAdoptionAxis_1 To srt_CumulativeEffectPeriodOfAdoptionDomain_1" order="1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_BusinessAcquisitionAxis" xlink:label="us-gaap_BusinessAcquisitionAxis_1" xlink:title="us-gaap_BusinessAcquisitionAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_BusinessAcquisitionAcquireeDomain" xlink:label="us-gaap_BusinessAcquisitionAcquireeDomain_1" xlink:title="us-gaap_BusinessAcquisitionAcquireeDomain_1" />
    <link:definitionArc xlink:type="arc" xlink:from="us-gaap_BusinessAcquisitionAxis_1" xlink:to="us-gaap_BusinessAcquisitionAcquireeDomain_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:us-gaap_BusinessAcquisitionAxis_1 To us-gaap_BusinessAcquisitionAcquireeDomain_1" order="1" />
  </link:definitionLink>
  <definitionLink xlink:role="http://www.veeco.com/role/StatementConsolidatedStatementsOfStockholdersEquity" xlink:type="extended" xlink:title="00400 - Statement - Consolidated Statements of Stockholders' Equity" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_StatementTable" xlink:label="us-gaap_StatementTable" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_StatementEquityComponentsAxis" xlink:label="us-gaap_StatementEquityComponentsAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="us-gaap_StatementTable" xlink:to="us-gaap_StatementEquityComponentsAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_EquityComponentDomain" xlink:label="us-gaap_EquityComponentDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_StatementEquityComponentsAxis" xlink:to="us-gaap_EquityComponentDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CommonStockMember" xlink:label="us-gaap_CommonStockMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_EquityComponentDomain" xlink:to="us-gaap_CommonStockMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AdditionalPaidInCapitalMember" xlink:label="us-gaap_AdditionalPaidInCapitalMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_EquityComponentDomain" xlink:to="us-gaap_AdditionalPaidInCapitalMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_RetainedEarningsMember" xlink:label="us-gaap_RetainedEarningsMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_EquityComponentDomain" xlink:to="us-gaap_RetainedEarningsMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeMember" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="us-gaap_EquityComponentDomain" xlink:to="us-gaap_AccumulatedOtherComprehensiveIncomeMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentAxis" xlink:label="us-gaap_DebtInstrumentAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="2" xlink:from="us-gaap_StatementTable" xlink:to="us-gaap_DebtInstrumentAxis" priority="2" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentNameDomain" xlink:label="us-gaap_DebtInstrumentNameDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_DebtInstrumentAxis" xlink:to="us-gaap_DebtInstrumentNameDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_ConvertibleSeniorUnsecuredNotesDue2025Member" xlink:label="veco_ConvertibleSeniorUnsecuredNotesDue2025Member" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_DebtInstrumentNameDomain" xlink:to="veco_ConvertibleSeniorUnsecuredNotesDue2025Member" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_ConvertibleSeniorUnsecuredNotesDue2027Member" xlink:label="veco_ConvertibleSeniorUnsecuredNotesDue2027Member" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_DebtInstrumentNameDomain" xlink:to="veco_ConvertibleSeniorUnsecuredNotesDue2027Member" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_CumulativeEffectPeriodOfAdoptionAxis" xlink:label="srt_CumulativeEffectPeriodOfAdoptionAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="3" xlink:from="us-gaap_StatementTable" xlink:to="srt_CumulativeEffectPeriodOfAdoptionAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_CumulativeEffectPeriodOfAdoptionDomain" xlink:label="srt_CumulativeEffectPeriodOfAdoptionDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="srt_CumulativeEffectPeriodOfAdoptionAxis" xlink:to="srt_CumulativeEffectPeriodOfAdoptionDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_CumulativeEffectPeriodOfAdoptionAdjustmentMember" xlink:label="srt_CumulativeEffectPeriodOfAdoptionAdjustmentMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="srt_CumulativeEffectPeriodOfAdoptionDomain" xlink:to="srt_CumulativeEffectPeriodOfAdoptionAdjustmentMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_StatementLineItems" xlink:label="us-gaap_StatementLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_StatementTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncreaseDecreaseInStockholdersEquityRollForward" xlink:label="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_StockholdersEquity" xlink:label="us-gaap_StockholdersEquity" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward" xlink:to="us-gaap_StockholdersEquity" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SharesOutstanding" xlink:label="us-gaap_SharesOutstanding" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward" xlink:to="us-gaap_SharesOutstanding" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_NetIncomeLoss" xlink:label="us-gaap_NetIncomeLoss" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward" xlink:to="us-gaap_NetIncomeLoss" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_OtherComprehensiveIncomeLossIncludingForeignCurrencyGainsLossesOnTransactionsIncludedInOperatingResultsNetOfTax" xlink:label="veco_OtherComprehensiveIncomeLossIncludingForeignCurrencyGainsLossesOnTransactionsIncludedInOperatingResultsNetOfTax" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward" xlink:to="veco_OtherComprehensiveIncomeLossIncludingForeignCurrencyGainsLossesOnTransactionsIncludedInOperatingResultsNetOfTax" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue" xlink:label="us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="5" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward" xlink:to="us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_StockIssuedDuringPeriodValueShareBasedCompensation" xlink:label="us-gaap_StockIssuedDuringPeriodValueShareBasedCompensation" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="6" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward" xlink:to="us-gaap_StockIssuedDuringPeriodValueShareBasedCompensation" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_StockIssuedDuringPeriodSharesShareBasedCompensation" xlink:label="us-gaap_StockIssuedDuringPeriodSharesShareBasedCompensation" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="7" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward" xlink:to="us-gaap_StockIssuedDuringPeriodSharesShareBasedCompensation" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_AdjustmentsToAdditionalPaidInCapitalExtinguishmentEquityComponentOfNotesRepurchased" xlink:label="veco_AdjustmentsToAdditionalPaidInCapitalExtinguishmentEquityComponentOfNotesRepurchased" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="8" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward" xlink:to="veco_AdjustmentsToAdditionalPaidInCapitalExtinguishmentEquityComponentOfNotesRepurchased" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AdjustmentsToAdditionalPaidInCapitalEquityComponentOfConvertibleDebt" xlink:label="us-gaap_AdjustmentsToAdditionalPaidInCapitalEquityComponentOfConvertibleDebt" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="9" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward" xlink:to="us-gaap_AdjustmentsToAdditionalPaidInCapitalEquityComponentOfConvertibleDebt" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_AdjustmentsToAdditionalPaidInCapitalPurchaseOfDerivativeInstrument" xlink:label="veco_AdjustmentsToAdditionalPaidInCapitalPurchaseOfDerivativeInstrument" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="10" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward" xlink:to="veco_AdjustmentsToAdditionalPaidInCapitalPurchaseOfDerivativeInstrument" priority="1" use="optional" />
  </definitionLink>
  <definitionLink xlink:role="http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesRecentlyAdoptedAccountingStandardsDetails" xlink:type="extended" xlink:title="40109 - Disclosure - Significant Accounting Policies - Recently Adopted Accounting Standards (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_NewAccountingPronouncementsOrChangeInAccountingPrincipleTable" xlink:label="us-gaap_NewAccountingPronouncementsOrChangeInAccountingPrincipleTable" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_StatementScenarioAxis" xlink:label="srt_StatementScenarioAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="us-gaap_NewAccountingPronouncementsOrChangeInAccountingPrincipleTable" xlink:to="srt_StatementScenarioAxis" priority="3" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_ScenarioUnspecifiedDomain" xlink:label="srt_ScenarioUnspecifiedDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="srt_StatementScenarioAxis" xlink:to="srt_ScenarioUnspecifiedDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_CalculatedUnderGuidanceInEffectBeforeAdoptionOfAccountingStandardsUpdate202006Member" xlink:label="veco_CalculatedUnderGuidanceInEffectBeforeAdoptionOfAccountingStandardsUpdate202006Member" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="srt_ScenarioUnspecifiedDomain" xlink:to="veco_CalculatedUnderGuidanceInEffectBeforeAdoptionOfAccountingStandardsUpdate202006Member" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_DifferenceBetweenGuidanceInEffectBeforeAndAfterAccountingStandardsUpdate202006Member" xlink:label="veco_DifferenceBetweenGuidanceInEffectBeforeAndAfterAccountingStandardsUpdate202006Member" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="srt_ScenarioUnspecifiedDomain" xlink:to="veco_DifferenceBetweenGuidanceInEffectBeforeAndAfterAccountingStandardsUpdate202006Member" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AdjustmentsForNewAccountingPronouncementsAxis" xlink:label="us-gaap_AdjustmentsForNewAccountingPronouncementsAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="2" xlink:from="us-gaap_NewAccountingPronouncementsOrChangeInAccountingPrincipleTable" xlink:to="us-gaap_AdjustmentsForNewAccountingPronouncementsAxis" priority="2" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_TypeOfAdoptionMember" xlink:label="us-gaap_TypeOfAdoptionMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_AdjustmentsForNewAccountingPronouncementsAxis" xlink:to="us-gaap_TypeOfAdoptionMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AccountingStandardsUpdate201912Member" xlink:label="us-gaap_AccountingStandardsUpdate201912Member" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_TypeOfAdoptionMember" xlink:to="us-gaap_AccountingStandardsUpdate201912Member" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AccountingStandardsUpdate202006Member" xlink:label="us-gaap_AccountingStandardsUpdate202006Member" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_TypeOfAdoptionMember" xlink:to="us-gaap_AccountingStandardsUpdate202006Member" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_CumulativeEffectPeriodOfAdoptionAxis" xlink:label="srt_CumulativeEffectPeriodOfAdoptionAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="3" xlink:from="us-gaap_NewAccountingPronouncementsOrChangeInAccountingPrincipleTable" xlink:to="srt_CumulativeEffectPeriodOfAdoptionAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_CumulativeEffectPeriodOfAdoptionDomain" xlink:label="srt_CumulativeEffectPeriodOfAdoptionDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="srt_CumulativeEffectPeriodOfAdoptionAxis" xlink:to="srt_CumulativeEffectPeriodOfAdoptionDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_CumulativeEffectPeriodOfAdoptionAdjustmentMember" xlink:label="srt_CumulativeEffectPeriodOfAdoptionAdjustmentMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="srt_CumulativeEffectPeriodOfAdoptionDomain" xlink:to="srt_CumulativeEffectPeriodOfAdoptionAdjustmentMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_CumulativeEffectPeriodOfAdoptionAdjustedBalanceMember" xlink:label="srt_CumulativeEffectPeriodOfAdoptionAdjustedBalanceMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="srt_CumulativeEffectPeriodOfAdoptionDomain" xlink:to="srt_CumulativeEffectPeriodOfAdoptionAdjustedBalanceMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_NewAccountingPronouncementsOrChangeInAccountingPrincipleLineItems" xlink:label="us-gaap_NewAccountingPronouncementsOrChangeInAccountingPrincipleLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="us-gaap_NewAccountingPronouncementsOrChangeInAccountingPrincipleLineItems" xlink:to="us-gaap_NewAccountingPronouncementsOrChangeInAccountingPrincipleTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ChangeInAccountingPrincipleAccountingStandardsUpdateAdopted" xlink:label="us-gaap_ChangeInAccountingPrincipleAccountingStandardsUpdateAdopted" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_NewAccountingPronouncementsOrChangeInAccountingPrincipleLineItems" xlink:to="us-gaap_ChangeInAccountingPrincipleAccountingStandardsUpdateAdopted" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ChangeInAccountingPrincipleAccountingStandardsUpdateTransitionOptionElectedExtensibleList" xlink:label="us-gaap_ChangeInAccountingPrincipleAccountingStandardsUpdateTransitionOptionElectedExtensibleList" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_NewAccountingPronouncementsOrChangeInAccountingPrincipleLineItems" xlink:to="us-gaap_ChangeInAccountingPrincipleAccountingStandardsUpdateTransitionOptionElectedExtensibleList" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_BalanceSheetLineItemAbstract" xlink:label="veco_BalanceSheetLineItemAbstract" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="us-gaap_NewAccountingPronouncementsOrChangeInAccountingPrincipleLineItems" xlink:to="veco_BalanceSheetLineItemAbstract" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LongTermDebtNoncurrent" xlink:label="us-gaap_LongTermDebtNoncurrent" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="veco_BalanceSheetLineItemAbstract" xlink:to="us-gaap_LongTermDebtNoncurrent" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AdditionalPaidInCapitalCommonStock" xlink:label="us-gaap_AdditionalPaidInCapitalCommonStock" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="veco_BalanceSheetLineItemAbstract" xlink:to="us-gaap_AdditionalPaidInCapitalCommonStock" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_RetainedEarningsAccumulatedDeficit" xlink:label="us-gaap_RetainedEarningsAccumulatedDeficit" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="veco_BalanceSheetLineItemAbstract" xlink:to="us-gaap_RetainedEarningsAccumulatedDeficit" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_EarningsPerShareDisclosureAbstract" xlink:label="veco_EarningsPerShareDisclosureAbstract" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="5" xlink:from="us-gaap_NewAccountingPronouncementsOrChangeInAccountingPrincipleLineItems" xlink:to="veco_EarningsPerShareDisclosureAbstract" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_EarningsPerShareBasic" xlink:label="us-gaap_EarningsPerShareBasic" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="veco_EarningsPerShareDisclosureAbstract" xlink:to="us-gaap_EarningsPerShareBasic" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_EarningsPerShareDiluted" xlink:label="us-gaap_EarningsPerShareDiluted" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="veco_EarningsPerShareDisclosureAbstract" xlink:to="us-gaap_EarningsPerShareDiluted" priority="1" use="optional" />
  </definitionLink>
  <definitionLink xlink:role="http://www.veeco.com/role/DisclosureIncomePerCommonShareSharesExcludedFromEpsDetails" xlink:type="extended" xlink:title="40202 - Disclosure - Income Per Common Share - Shares Excluded from EPS (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfAntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareTable" xlink:label="us-gaap_ScheduleOfAntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareTable" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis" xlink:label="us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="us-gaap_ScheduleOfAntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareTable" xlink:to="us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AntidilutiveSecuritiesNameDomain" xlink:label="us-gaap_AntidilutiveSecuritiesNameDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis" xlink:to="us-gaap_AntidilutiveSecuritiesNameDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_CommonStockEquivalentsMember" xlink:label="veco_CommonStockEquivalentsMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_AntidilutiveSecuritiesNameDomain" xlink:to="veco_CommonStockEquivalentsMember" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_PotentiallyDilutiveSharesMember" xlink:label="veco_PotentiallyDilutiveSharesMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_AntidilutiveSecuritiesNameDomain" xlink:to="veco_PotentiallyDilutiveSharesMember" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ConvertibleDebtMember" xlink:label="us-gaap_ConvertibleDebtMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_AntidilutiveSecuritiesNameDomain" xlink:to="us-gaap_ConvertibleDebtMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareLineItems" xlink:label="us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareLineItems" xlink:to="us-gaap_ScheduleOfAntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_EarningsPerShareBasicOtherDisclosuresAbstract" xlink:label="us-gaap_EarningsPerShareBasicOtherDisclosuresAbstract" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareLineItems" xlink:to="us-gaap_EarningsPerShareBasicOtherDisclosuresAbstract" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_SecuritiesExcludedFromComputationOfBasicEarningsPerShareAmount" xlink:label="veco_SecuritiesExcludedFromComputationOfBasicEarningsPerShareAmount" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_EarningsPerShareBasicOtherDisclosuresAbstract" xlink:to="veco_SecuritiesExcludedFromComputationOfBasicEarningsPerShareAmount" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_EarningsPerShareDilutedOtherDisclosuresAbstract" xlink:label="us-gaap_EarningsPerShareDilutedOtherDisclosuresAbstract" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareLineItems" xlink:to="us-gaap_EarningsPerShareDilutedOtherDisclosuresAbstract" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount" xlink:label="us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_EarningsPerShareDilutedOtherDisclosuresAbstract" xlink:to="us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount" priority="1" use="optional" />
  </definitionLink>
  <definitionLink xlink:role="http://www.veeco.com/role/DisclosureFairValueMeasurementsDetails" xlink:type="extended" xlink:title="40301 - Disclosure - Fair Value Measurements (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable" xlink:label="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FairValueByMeasurementFrequencyAxis" xlink:label="us-gaap_FairValueByMeasurementFrequencyAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable" xlink:to="us-gaap_FairValueByMeasurementFrequencyAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FairValueMeasurementFrequencyDomain" xlink:label="us-gaap_FairValueMeasurementFrequencyDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_FairValueByMeasurementFrequencyAxis" xlink:to="us-gaap_FairValueMeasurementFrequencyDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FairValueMeasurementsRecurringMember" xlink:label="us-gaap_FairValueMeasurementsRecurringMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_FairValueMeasurementFrequencyDomain" xlink:to="us-gaap_FairValueMeasurementsRecurringMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FairValueByFairValueHierarchyLevelAxis" xlink:label="us-gaap_FairValueByFairValueHierarchyLevelAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="2" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable" xlink:to="us-gaap_FairValueByFairValueHierarchyLevelAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FairValueMeasurementsFairValueHierarchyDomain" xlink:label="us-gaap_FairValueMeasurementsFairValueHierarchyDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_FairValueByFairValueHierarchyLevelAxis" xlink:to="us-gaap_FairValueMeasurementsFairValueHierarchyDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FairValueInputsLevel1Member" xlink:label="us-gaap_FairValueInputsLevel1Member" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_FairValueMeasurementsFairValueHierarchyDomain" xlink:to="us-gaap_FairValueInputsLevel1Member" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FairValueInputsLevel2Member" xlink:label="us-gaap_FairValueInputsLevel2Member" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_FairValueMeasurementsFairValueHierarchyDomain" xlink:to="us-gaap_FairValueInputsLevel2Member" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CashAndCashEquivalentsAxis" xlink:label="us-gaap_CashAndCashEquivalentsAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="3" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable" xlink:to="us-gaap_CashAndCashEquivalentsAxis" priority="4" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_RestrictedCashAndCashEquivalentsCashAndCashEquivalentsMember" xlink:label="us-gaap_RestrictedCashAndCashEquivalentsCashAndCashEquivalentsMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_CashAndCashEquivalentsAxis" xlink:to="us-gaap_RestrictedCashAndCashEquivalentsCashAndCashEquivalentsMember" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_CertificateOfDepositsAndTimeDepositsMember" xlink:label="veco_CertificateOfDepositsAndTimeDepositsMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_RestrictedCashAndCashEquivalentsCashAndCashEquivalentsMember" xlink:to="veco_CertificateOfDepositsAndTimeDepositsMember" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_MoneyMarketFundsExcludingGovernmentFundsMember" xlink:label="veco_MoneyMarketFundsExcludingGovernmentFundsMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_RestrictedCashAndCashEquivalentsCashAndCashEquivalentsMember" xlink:to="veco_MoneyMarketFundsExcludingGovernmentFundsMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FinancialInstrumentAxis" xlink:label="us-gaap_FinancialInstrumentAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="4" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable" xlink:to="us-gaap_FinancialInstrumentAxis" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_TransfersAndServicingOfFinancialInstrumentsTypesOfFinancialInstrumentsDomain" xlink:label="us-gaap_TransfersAndServicingOfFinancialInstrumentsTypesOfFinancialInstrumentsDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_FinancialInstrumentAxis" xlink:to="us-gaap_TransfersAndServicingOfFinancialInstrumentsTypesOfFinancialInstrumentsDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_USTreasurySecuritiesMember" xlink:label="us-gaap_USTreasurySecuritiesMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_TransfersAndServicingOfFinancialInstrumentsTypesOfFinancialInstrumentsDomain" xlink:to="us-gaap_USTreasurySecuritiesMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_USGovernmentAgenciesDebtSecuritiesMember" xlink:label="us-gaap_USGovernmentAgenciesDebtSecuritiesMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_TransfersAndServicingOfFinancialInstrumentsTypesOfFinancialInstrumentsDomain" xlink:to="us-gaap_USGovernmentAgenciesDebtSecuritiesMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CorporateDebtSecuritiesMember" xlink:label="us-gaap_CorporateDebtSecuritiesMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_TransfersAndServicingOfFinancialInstrumentsTypesOfFinancialInstrumentsDomain" xlink:to="us-gaap_CorporateDebtSecuritiesMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CommercialPaperMember" xlink:label="us-gaap_CommercialPaperMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="us-gaap_TransfersAndServicingOfFinancialInstrumentsTypesOfFinancialInstrumentsDomain" xlink:to="us-gaap_CommercialPaperMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:label="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:to="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CashAndCashEquivalentsAbstract" xlink:label="us-gaap_CashAndCashEquivalentsAbstract" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:to="us-gaap_CashAndCashEquivalentsAbstract" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_CashEquivalentsFairValueDisclosure" xlink:label="veco_CashEquivalentsFairValueDisclosure" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_CashAndCashEquivalentsAbstract" xlink:to="veco_CashEquivalentsFairValueDisclosure" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShortTermInvestmentsAbstract" xlink:label="us-gaap_ShortTermInvestmentsAbstract" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:to="us-gaap_ShortTermInvestmentsAbstract" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_InvestmentsFairValueDisclosure" xlink:label="us-gaap_InvestmentsFairValueDisclosure" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_ShortTermInvestmentsAbstract" xlink:to="us-gaap_InvestmentsFairValueDisclosure" priority="1" use="optional" />
  </definitionLink>
  <definitionLink xlink:role="http://www.veeco.com/role/DisclosureInvestmentsAvailableForSaleSecuritiesDetails" xlink:type="extended" xlink:title="40401 - Disclosure - Investments - Available-For-Sale Securities (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtSecuritiesAvailableForSaleTable" xlink:label="us-gaap_DebtSecuritiesAvailableForSaleTable" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FinancialInstrumentAxis" xlink:label="us-gaap_FinancialInstrumentAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="us-gaap_DebtSecuritiesAvailableForSaleTable" xlink:to="us-gaap_FinancialInstrumentAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_TransfersAndServicingOfFinancialInstrumentsTypesOfFinancialInstrumentsDomain" xlink:label="us-gaap_TransfersAndServicingOfFinancialInstrumentsTypesOfFinancialInstrumentsDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_FinancialInstrumentAxis" xlink:to="us-gaap_TransfersAndServicingOfFinancialInstrumentsTypesOfFinancialInstrumentsDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_USTreasurySecuritiesMember" xlink:label="us-gaap_USTreasurySecuritiesMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_TransfersAndServicingOfFinancialInstrumentsTypesOfFinancialInstrumentsDomain" xlink:to="us-gaap_USTreasurySecuritiesMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_USGovernmentAgenciesDebtSecuritiesMember" xlink:label="us-gaap_USGovernmentAgenciesDebtSecuritiesMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_TransfersAndServicingOfFinancialInstrumentsTypesOfFinancialInstrumentsDomain" xlink:to="us-gaap_USGovernmentAgenciesDebtSecuritiesMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CorporateDebtSecuritiesMember" xlink:label="us-gaap_CorporateDebtSecuritiesMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_TransfersAndServicingOfFinancialInstrumentsTypesOfFinancialInstrumentsDomain" xlink:to="us-gaap_CorporateDebtSecuritiesMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CommercialPaperMember" xlink:label="us-gaap_CommercialPaperMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="us-gaap_TransfersAndServicingOfFinancialInstrumentsTypesOfFinancialInstrumentsDomain" xlink:to="us-gaap_CommercialPaperMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfAvailableForSaleSecuritiesLineItems" xlink:label="us-gaap_ScheduleOfAvailableForSaleSecuritiesLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="us-gaap_ScheduleOfAvailableForSaleSecuritiesLineItems" xlink:to="us-gaap_DebtSecuritiesAvailableForSaleTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AvailableForSaleDebtSecuritiesAmortizedCostBasis" xlink:label="us-gaap_AvailableForSaleDebtSecuritiesAmortizedCostBasis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_ScheduleOfAvailableForSaleSecuritiesLineItems" xlink:to="us-gaap_AvailableForSaleDebtSecuritiesAmortizedCostBasis" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AvailableForSaleDebtSecuritiesAccumulatedGrossUnrealizedLossBeforeTax" xlink:label="us-gaap_AvailableForSaleDebtSecuritiesAccumulatedGrossUnrealizedLossBeforeTax" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_ScheduleOfAvailableForSaleSecuritiesLineItems" xlink:to="us-gaap_AvailableForSaleDebtSecuritiesAccumulatedGrossUnrealizedLossBeforeTax" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AvailableForSaleSecuritiesDebtSecurities" xlink:label="us-gaap_AvailableForSaleSecuritiesDebtSecurities" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="us-gaap_ScheduleOfAvailableForSaleSecuritiesLineItems" xlink:to="us-gaap_AvailableForSaleSecuritiesDebtSecurities" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtSecuritiesAvailableforSaleUnrealizedLossPositionAbstract" xlink:label="us-gaap_DebtSecuritiesAvailableforSaleUnrealizedLossPositionAbstract" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="5" xlink:from="us-gaap_ScheduleOfAvailableForSaleSecuritiesLineItems" xlink:to="us-gaap_DebtSecuritiesAvailableforSaleUnrealizedLossPositionAbstract" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12Months" xlink:label="us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12Months" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_DebtSecuritiesAvailableforSaleUnrealizedLossPositionAbstract" xlink:to="us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12Months" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12MonthsAccumulatedLoss" xlink:label="us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12MonthsAccumulatedLoss" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_DebtSecuritiesAvailableforSaleUnrealizedLossPositionAbstract" xlink:to="us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12MonthsAccumulatedLoss" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLonger" xlink:label="us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLonger" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_DebtSecuritiesAvailableforSaleUnrealizedLossPositionAbstract" xlink:to="us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLonger" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLongerAccumulatedLoss" xlink:label="us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLongerAccumulatedLoss" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="us-gaap_DebtSecuritiesAvailableforSaleUnrealizedLossPositionAbstract" xlink:to="us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLongerAccumulatedLoss" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AvailableForSaleSecuritiesDebtMaturitiesSingleMaturityDateAmortizedCostBasisRollingMaturityAbstract" xlink:label="us-gaap_AvailableForSaleSecuritiesDebtMaturitiesSingleMaturityDateAmortizedCostBasisRollingMaturityAbstract" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="6" xlink:from="us-gaap_ScheduleOfAvailableForSaleSecuritiesLineItems" xlink:to="us-gaap_AvailableForSaleSecuritiesDebtMaturitiesSingleMaturityDateAmortizedCostBasisRollingMaturityAbstract" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AvailableForSaleSecuritiesDebtMaturitiesNextRollingTwelveMonthsAmortizedCostBasis" xlink:label="us-gaap_AvailableForSaleSecuritiesDebtMaturitiesNextRollingTwelveMonthsAmortizedCostBasis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_AvailableForSaleSecuritiesDebtMaturitiesSingleMaturityDateAmortizedCostBasisRollingMaturityAbstract" xlink:to="us-gaap_AvailableForSaleSecuritiesDebtMaturitiesNextRollingTwelveMonthsAmortizedCostBasis" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterOneThroughTwoYearsAmortizedCost" xlink:label="veco_DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterOneThroughTwoYearsAmortizedCost" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_AvailableForSaleSecuritiesDebtMaturitiesSingleMaturityDateAmortizedCostBasisRollingMaturityAbstract" xlink:to="veco_DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterOneThroughTwoYearsAmortizedCost" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AvailableForSaleSecuritiesDebtMaturitiesSingleMaturityDateRollingMaturityAbstract" xlink:label="us-gaap_AvailableForSaleSecuritiesDebtMaturitiesSingleMaturityDateRollingMaturityAbstract" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="7" xlink:from="us-gaap_ScheduleOfAvailableForSaleSecuritiesLineItems" xlink:to="us-gaap_AvailableForSaleSecuritiesDebtMaturitiesSingleMaturityDateRollingMaturityAbstract" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AvailableForSaleSecuritiesDebtMaturitiesNextRollingTwelveMonthsFairValue" xlink:label="us-gaap_AvailableForSaleSecuritiesDebtMaturitiesNextRollingTwelveMonthsFairValue" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_AvailableForSaleSecuritiesDebtMaturitiesSingleMaturityDateRollingMaturityAbstract" xlink:to="us-gaap_AvailableForSaleSecuritiesDebtMaturitiesNextRollingTwelveMonthsFairValue" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterOneThroughTwoYearsFairValue" xlink:label="veco_DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterOneThroughTwoYearsFairValue" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_AvailableForSaleSecuritiesDebtMaturitiesSingleMaturityDateRollingMaturityAbstract" xlink:to="veco_DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterOneThroughTwoYearsFairValue" priority="1" use="optional" />
  </definitionLink>
  <definitionLink xlink:role="http://www.veeco.com/role/DisclosureInvestmentsOtherInvestmentDetails" xlink:type="extended" xlink:title="40402 - Disclosure - Investments - Other Investment (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_EquitySecuritiesWithoutReadilyDeterminableFairValueTable" xlink:label="us-gaap_EquitySecuritiesWithoutReadilyDeterminableFairValueTable" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis" xlink:label="srt_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="us-gaap_EquitySecuritiesWithoutReadilyDeterminableFairValueTable" xlink:to="srt_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_EquityMethodInvesteeNameDomain" xlink:label="srt_EquityMethodInvesteeNameDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="srt_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis" xlink:to="srt_EquityMethodInvesteeNameDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_OtherNonMarketableInvestmentMember" xlink:label="veco_OtherNonMarketableInvestmentMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="srt_EquityMethodInvesteeNameDomain" xlink:to="veco_OtherNonMarketableInvestmentMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_RangeAxis" xlink:label="srt_RangeAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="2" xlink:from="us-gaap_EquitySecuritiesWithoutReadilyDeterminableFairValueTable" xlink:to="srt_RangeAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_RangeMember" xlink:label="srt_RangeMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="srt_RangeAxis" xlink:to="srt_RangeMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_MaximumMember" xlink:label="srt_MaximumMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="srt_RangeMember" xlink:to="srt_MaximumMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeStatementLocationAxis" xlink:label="us-gaap_IncomeStatementLocationAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="3" xlink:from="us-gaap_EquitySecuritiesWithoutReadilyDeterminableFairValueTable" xlink:to="us-gaap_IncomeStatementLocationAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeStatementLocationDomain" xlink:label="us-gaap_IncomeStatementLocationDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_IncomeStatementLocationAxis" xlink:to="us-gaap_IncomeStatementLocationDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OtherNonoperatingIncomeExpenseMember" xlink:label="us-gaap_OtherNonoperatingIncomeExpenseMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_IncomeStatementLocationDomain" xlink:to="us-gaap_OtherNonoperatingIncomeExpenseMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_EquitySecuritiesWithoutReadilyDeterminableFairValueLineItems" xlink:label="us-gaap_EquitySecuritiesWithoutReadilyDeterminableFairValueLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="us-gaap_EquitySecuritiesWithoutReadilyDeterminableFairValueLineItems" xlink:to="us-gaap_EquitySecuritiesWithoutReadilyDeterminableFairValueTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_CostMethodInvestmentsOwnershipPercentage" xlink:label="veco_CostMethodInvestmentsOwnershipPercentage" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_EquitySecuritiesWithoutReadilyDeterminableFairValueLineItems" xlink:to="veco_CostMethodInvestmentsOwnershipPercentage" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_EquitySecuritiesWithoutReadilyDeterminableFairValueAmount" xlink:label="us-gaap_EquitySecuritiesWithoutReadilyDeterminableFairValueAmount" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_EquitySecuritiesWithoutReadilyDeterminableFairValueLineItems" xlink:to="us-gaap_EquitySecuritiesWithoutReadilyDeterminableFairValueAmount" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_ImpairmentLossesInvestmentsNonCash" xlink:label="veco_ImpairmentLossesInvestmentsNonCash" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="us-gaap_EquitySecuritiesWithoutReadilyDeterminableFairValueLineItems" xlink:to="veco_ImpairmentLossesInvestmentsNonCash" priority="1" use="optional" />
  </definitionLink>
  <definitionLink xlink:role="http://www.veeco.com/role/DisclosurePropertyPlantAndEquipmentPropertyAndEquipmentDetails" xlink:type="extended" xlink:title="40601 - Disclosure - Property, Plant, and Equipment - Property and Equipment (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfPropertyPlantAndEquipmentTable" xlink:label="us-gaap_ScheduleOfPropertyPlantAndEquipmentTable" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PropertyPlantAndEquipmentByTypeAxis" xlink:label="us-gaap_PropertyPlantAndEquipmentByTypeAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="us-gaap_ScheduleOfPropertyPlantAndEquipmentTable" xlink:to="us-gaap_PropertyPlantAndEquipmentByTypeAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PropertyPlantAndEquipmentTypeDomain" xlink:label="us-gaap_PropertyPlantAndEquipmentTypeDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_PropertyPlantAndEquipmentByTypeAxis" xlink:to="us-gaap_PropertyPlantAndEquipmentTypeDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LandMember" xlink:label="us-gaap_LandMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_PropertyPlantAndEquipmentTypeDomain" xlink:to="us-gaap_LandMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_BuildingAndBuildingImprovementsMember" xlink:label="us-gaap_BuildingAndBuildingImprovementsMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_PropertyPlantAndEquipmentTypeDomain" xlink:to="us-gaap_BuildingAndBuildingImprovementsMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_MachineryAndEquipmentMember" xlink:label="us-gaap_MachineryAndEquipmentMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_PropertyPlantAndEquipmentTypeDomain" xlink:to="us-gaap_MachineryAndEquipmentMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LeaseholdImprovementsMember" xlink:label="us-gaap_LeaseholdImprovementsMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="us-gaap_PropertyPlantAndEquipmentTypeDomain" xlink:to="us-gaap_LeaseholdImprovementsMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_RangeAxis" xlink:label="srt_RangeAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="2" xlink:from="us-gaap_ScheduleOfPropertyPlantAndEquipmentTable" xlink:to="srt_RangeAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_RangeMember" xlink:label="srt_RangeMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="srt_RangeAxis" xlink:to="srt_RangeMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_MinimumMember" xlink:label="srt_MinimumMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="srt_RangeMember" xlink:to="srt_MinimumMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_MaximumMember" xlink:label="srt_MaximumMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="srt_RangeMember" xlink:to="srt_MaximumMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PropertyPlantAndEquipmentLineItems" xlink:label="us-gaap_PropertyPlantAndEquipmentLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="us-gaap_PropertyPlantAndEquipmentLineItems" xlink:to="us-gaap_ScheduleOfPropertyPlantAndEquipmentTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PropertyPlantAndEquipmentGross" xlink:label="us-gaap_PropertyPlantAndEquipmentGross" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_PropertyPlantAndEquipmentLineItems" xlink:to="us-gaap_PropertyPlantAndEquipmentGross" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment" xlink:label="us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_PropertyPlantAndEquipmentLineItems" xlink:to="us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PropertyPlantAndEquipmentNet" xlink:label="us-gaap_PropertyPlantAndEquipmentNet" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="us-gaap_PropertyPlantAndEquipmentLineItems" xlink:to="us-gaap_PropertyPlantAndEquipmentNet" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PropertyPlantAndEquipmentUsefulLife" xlink:label="us-gaap_PropertyPlantAndEquipmentUsefulLife" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="5" xlink:from="us-gaap_PropertyPlantAndEquipmentLineItems" xlink:to="us-gaap_PropertyPlantAndEquipmentUsefulLife" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_Depreciation" xlink:label="us-gaap_Depreciation" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="6" xlink:from="us-gaap_PropertyPlantAndEquipmentLineItems" xlink:to="us-gaap_Depreciation" priority="1" use="optional" />
  </definitionLink>
  <definitionLink xlink:role="http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssetsIntangibleAssetsDetails" xlink:type="extended" xlink:title="40702 - Disclosure - Goodwill and Intangible Assets - Intangible Assets (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassTable" xlink:label="veco_FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassTable" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis" xlink:label="us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="veco_FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassTable" xlink:to="us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain" xlink:label="us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis" xlink:to="us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_TechnologyBasedIntangibleAssetsMember" xlink:label="us-gaap_TechnologyBasedIntangibleAssetsMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain" xlink:to="us-gaap_TechnologyBasedIntangibleAssetsMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CustomerRelationshipsMember" xlink:label="us-gaap_CustomerRelationshipsMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain" xlink:to="us-gaap_CustomerRelationshipsMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_TrademarksAndTradeNamesMember" xlink:label="us-gaap_TrademarksAndTradeNamesMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain" xlink:to="us-gaap_TrademarksAndTradeNamesMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OtherIntangibleAssetsMember" xlink:label="us-gaap_OtherIntangibleAssetsMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain" xlink:to="us-gaap_OtherIntangibleAssetsMember" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassLineItems" xlink:label="veco_FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="veco_FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassLineItems" xlink:to="veco_FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FiniteLivedIntangibleAssetsRemainingAmortizationPeriod1" xlink:label="us-gaap_FiniteLivedIntangibleAssetsRemainingAmortizationPeriod1" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="veco_FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassLineItems" xlink:to="us-gaap_FiniteLivedIntangibleAssetsRemainingAmortizationPeriod1" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FiniteLivedIntangibleAssetsGross" xlink:label="us-gaap_FiniteLivedIntangibleAssetsGross" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="veco_FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassLineItems" xlink:to="us-gaap_FiniteLivedIntangibleAssetsGross" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment" xlink:label="veco_FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="veco_FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassLineItems" xlink:to="veco_FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FiniteLivedIntangibleAssetsNet" xlink:label="us-gaap_FiniteLivedIntangibleAssetsNet" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="5" xlink:from="veco_FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassLineItems" xlink:to="us-gaap_FiniteLivedIntangibleAssetsNet" priority="1" use="optional" />
  </definitionLink>
  <definitionLink xlink:role="http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesPerformanceObligationAmountDetails" xlink:type="extended" xlink:title="40803 - Disclosure - Accrued Expenses and Other Liabilities - Performance Obligation Amount (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionTable" xlink:label="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionTable" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionStartDateAxis" xlink:label="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionStartDateAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionTable" xlink:to="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionStartDateAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionLineItems" xlink:label="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionLineItems" xlink:to="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_RevenueRemainingPerformanceObligationExpectedTimingPercentage" xlink:label="veco_RevenueRemainingPerformanceObligationExpectedTimingPercentage" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionLineItems" xlink:to="veco_RevenueRemainingPerformanceObligationExpectedTimingPercentage" priority="1" use="optional" />
  </definitionLink>
  <definitionLink xlink:role="http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesPerformanceObligationAmountDefaultDetails" xlink:type="extended" xlink:title="40803 - Disclosure - Accrued Expenses and Other Liabilities - Performance Obligation Amount Default (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionTable" xlink:label="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionTable" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionLineItems" xlink:label="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionLineItems" xlink:to="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_RevenueRemainingPerformanceObligationExpectedTimingPercentage" xlink:label="veco_RevenueRemainingPerformanceObligationExpectedTimingPercentage" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionLineItems" xlink:to="veco_RevenueRemainingPerformanceObligationExpectedTimingPercentage" priority="1" use="optional" />
  </definitionLink>
  <definitionLink xlink:role="http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesPerformanceObligationTimingDetails" xlink:type="extended" xlink:title="40804 - Disclosure - Accrued Expenses and Other Liabilities - Performance Obligation Timing (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionTable" xlink:label="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionTable" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionStartDateAxis" xlink:label="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionStartDateAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionTable" xlink:to="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionStartDateAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_RangeAxis" xlink:label="srt_RangeAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="2" xlink:from="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionTable" xlink:to="srt_RangeAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_RangeMember" xlink:label="srt_RangeMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="srt_RangeAxis" xlink:to="srt_RangeMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_MinimumMember" xlink:label="srt_MinimumMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="srt_RangeMember" xlink:to="srt_MinimumMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_MaximumMember" xlink:label="srt_MaximumMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="srt_RangeMember" xlink:to="srt_MaximumMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionLineItems" xlink:label="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionLineItems" xlink:to="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionPeriod1" xlink:label="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionPeriod1" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionLineItems" xlink:to="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionPeriod1" priority="1" use="optional" />
  </definitionLink>
  <definitionLink xlink:role="http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesPerformanceObligationTimingDefaultDetails" xlink:type="extended" xlink:title="40804 - Disclosure - Accrued Expenses and Other Liabilities - Performance Obligation Timing Default (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionTable" xlink:label="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionTable" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_RangeAxis" xlink:label="srt_RangeAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="2" xlink:from="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionTable" xlink:to="srt_RangeAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_RangeMember" xlink:label="srt_RangeMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="srt_RangeAxis" xlink:to="srt_RangeMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_MinimumMember" xlink:label="srt_MinimumMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="srt_RangeMember" xlink:to="srt_MinimumMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_MaximumMember" xlink:label="srt_MaximumMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="srt_RangeMember" xlink:to="srt_MaximumMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionLineItems" xlink:label="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionLineItems" xlink:to="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionPeriod1" xlink:label="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionPeriod1" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionLineItems" xlink:to="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionPeriod1" priority="1" use="optional" />
  </definitionLink>
  <definitionLink xlink:role="http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesOtherLiabilitiesDetails" xlink:type="extended" xlink:title="40805 - Disclosure - Accrued Expenses and Other Liabilities - Other liabilities (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_LiabilitiesTable" xlink:label="veco_LiabilitiesTable" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_BalanceSheetLocationAxis" xlink:label="us-gaap_BalanceSheetLocationAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="veco_LiabilitiesTable" xlink:to="us-gaap_BalanceSheetLocationAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_BalanceSheetLocationDomain" xlink:label="us-gaap_BalanceSheetLocationDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_BalanceSheetLocationAxis" xlink:to="us-gaap_BalanceSheetLocationDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OtherLiabilitiesMember" xlink:label="us-gaap_OtherLiabilitiesMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_BalanceSheetLocationDomain" xlink:to="us-gaap_OtherLiabilitiesMember" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_LiabilitiesLineItems" xlink:label="veco_LiabilitiesLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="veco_LiabilitiesLineItems" xlink:to="veco_LiabilitiesTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OtherLiabilitiesAbstract" xlink:label="us-gaap_OtherLiabilitiesAbstract" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="veco_LiabilitiesLineItems" xlink:to="us-gaap_OtherLiabilitiesAbstract" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AssetRetirementObligationsNoncurrent" xlink:label="us-gaap_AssetRetirementObligationsNoncurrent" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_OtherLiabilitiesAbstract" xlink:to="us-gaap_AssetRetirementObligationsNoncurrent" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AccruedIncomeTaxesNoncurrent" xlink:label="us-gaap_AccruedIncomeTaxesNoncurrent" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_OtherLiabilitiesAbstract" xlink:to="us-gaap_AccruedIncomeTaxesNoncurrent" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_MedicalAndDentalBenefitLiabilitiesNoncurrent" xlink:label="veco_MedicalAndDentalBenefitLiabilitiesNoncurrent" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_OtherLiabilitiesAbstract" xlink:to="veco_MedicalAndDentalBenefitLiabilitiesNoncurrent" priority="1" use="optional" />
  </definitionLink>
  <definitionLink xlink:role="http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesLegalProceedingsDetails" xlink:type="extended" xlink:title="40905 - Disclosure - Commitments and Contingencies - Legal Proceedings (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LossContingenciesTable" xlink:label="us-gaap_LossContingenciesTable" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_LitigationCaseAxis" xlink:label="srt_LitigationCaseAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="us-gaap_LossContingenciesTable" xlink:to="srt_LitigationCaseAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_LitigationCaseTypeDomain" xlink:label="srt_LitigationCaseTypeDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="srt_LitigationCaseAxis" xlink:to="srt_LitigationCaseTypeDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_UltratechAcquisitionLitigationMember" xlink:label="veco_UltratechAcquisitionLitigationMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="srt_LitigationCaseTypeDomain" xlink:to="veco_UltratechAcquisitionLitigationMember" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_WoltherActionMember" xlink:label="veco_WoltherActionMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="srt_LitigationCaseTypeDomain" xlink:to="veco_WoltherActionMember" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_DerivativeActionMember" xlink:label="veco_DerivativeActionMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="srt_LitigationCaseTypeDomain" xlink:to="veco_DerivativeActionMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LossContingenciesLineItems" xlink:label="us-gaap_LossContingenciesLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="us-gaap_LossContingenciesLineItems" xlink:to="us-gaap_LossContingenciesTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LossContingencyNewClaimsFiledNumber" xlink:label="us-gaap_LossContingencyNewClaimsFiledNumber" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_LossContingenciesLineItems" xlink:to="us-gaap_LossContingencyNewClaimsFiledNumber" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LitigationSettlementAmountAwardedToOtherParty" xlink:label="us-gaap_LitigationSettlementAmountAwardedToOtherParty" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_LossContingenciesLineItems" xlink:to="us-gaap_LitigationSettlementAmountAwardedToOtherParty" priority="1" use="optional" />
  </definitionLink>
  <definitionLink xlink:role="http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesConcentrationOfCreditRiskDetails" xlink:type="extended" xlink:title="40906 - Disclosure - Commitments and Contingencies - Concentration of Credit Risk (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ConcentrationRiskTable" xlink:label="us-gaap_ConcentrationRiskTable" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ConcentrationRiskByBenchmarkAxis" xlink:label="us-gaap_ConcentrationRiskByBenchmarkAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="us-gaap_ConcentrationRiskTable" xlink:to="us-gaap_ConcentrationRiskByBenchmarkAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ConcentrationRiskBenchmarkDomain" xlink:label="us-gaap_ConcentrationRiskBenchmarkDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_ConcentrationRiskByBenchmarkAxis" xlink:to="us-gaap_ConcentrationRiskBenchmarkDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AccountsReceivableMember" xlink:label="us-gaap_AccountsReceivableMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_ConcentrationRiskBenchmarkDomain" xlink:to="us-gaap_AccountsReceivableMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SalesMember" xlink:label="us-gaap_SalesMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_ConcentrationRiskBenchmarkDomain" xlink:to="us-gaap_SalesMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ConcentrationRiskByTypeAxis" xlink:label="us-gaap_ConcentrationRiskByTypeAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="2" xlink:from="us-gaap_ConcentrationRiskTable" xlink:to="us-gaap_ConcentrationRiskByTypeAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ConcentrationRiskTypeDomain" xlink:label="us-gaap_ConcentrationRiskTypeDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_ConcentrationRiskByTypeAxis" xlink:to="us-gaap_ConcentrationRiskTypeDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CreditConcentrationRiskMember" xlink:label="us-gaap_CreditConcentrationRiskMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_ConcentrationRiskTypeDomain" xlink:to="us-gaap_CreditConcentrationRiskMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CustomerConcentrationRiskMember" xlink:label="us-gaap_CustomerConcentrationRiskMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_ConcentrationRiskTypeDomain" xlink:to="us-gaap_CustomerConcentrationRiskMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_MajorCustomersAxis" xlink:label="srt_MajorCustomersAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="3" xlink:from="us-gaap_ConcentrationRiskTable" xlink:to="srt_MajorCustomersAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_NameOfMajorCustomerDomain" xlink:label="srt_NameOfMajorCustomerDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="srt_MajorCustomersAxis" xlink:to="srt_NameOfMajorCustomerDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_TopTenCustomersMember" xlink:label="veco_TopTenCustomersMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="srt_NameOfMajorCustomerDomain" xlink:to="veco_TopTenCustomersMember" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_CustomerAMember" xlink:label="veco_CustomerAMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="srt_NameOfMajorCustomerDomain" xlink:to="veco_CustomerAMember" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_CustomerBMember" xlink:label="veco_CustomerBMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="srt_NameOfMajorCustomerDomain" xlink:to="veco_CustomerBMember" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_CustomerCMember" xlink:label="veco_CustomerCMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="srt_NameOfMajorCustomerDomain" xlink:to="veco_CustomerCMember" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_CustomerDMember" xlink:label="veco_CustomerDMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="5" xlink:from="srt_NameOfMajorCustomerDomain" xlink:to="veco_CustomerDMember" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_CustomerEMember" xlink:label="veco_CustomerEMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="6" xlink:from="srt_NameOfMajorCustomerDomain" xlink:to="veco_CustomerEMember" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_CustomerFMember" xlink:label="veco_CustomerFMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="7" xlink:from="srt_NameOfMajorCustomerDomain" xlink:to="veco_CustomerFMember" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ConcentrationRiskLineItems" xlink:label="us-gaap_ConcentrationRiskLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="us-gaap_ConcentrationRiskLineItems" xlink:to="us-gaap_ConcentrationRiskTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_NumberOfCustomers" xlink:label="veco_NumberOfCustomers" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_ConcentrationRiskLineItems" xlink:to="veco_NumberOfCustomers" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ConcentrationRiskPercentage1" xlink:label="us-gaap_ConcentrationRiskPercentage1" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_ConcentrationRiskLineItems" xlink:to="us-gaap_ConcentrationRiskPercentage1" priority="1" use="optional" />
  </definitionLink>
  <definitionLink xlink:role="http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesReceivablesDetails" xlink:type="extended" xlink:title="40907 - Disclosure - Commitments and Contingencies - Receivables (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ConcentrationRiskTable" xlink:label="us-gaap_ConcentrationRiskTable" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_RangeAxis" xlink:label="srt_RangeAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="us-gaap_ConcentrationRiskTable" xlink:to="srt_RangeAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_RangeMember" xlink:label="srt_RangeMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="srt_RangeAxis" xlink:to="srt_RangeMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_MinimumMember" xlink:label="srt_MinimumMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="srt_RangeMember" xlink:to="srt_MinimumMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_MaximumMember" xlink:label="srt_MaximumMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="srt_RangeMember" xlink:to="srt_MaximumMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_StatementGeographicalAxis" xlink:label="srt_StatementGeographicalAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="2" xlink:from="us-gaap_ConcentrationRiskTable" xlink:to="srt_StatementGeographicalAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_SegmentGeographicalDomain" xlink:label="srt_SegmentGeographicalDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="srt_StatementGeographicalAxis" xlink:to="srt_SegmentGeographicalDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_GeographicLocationOneMember" xlink:label="veco_GeographicLocationOneMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="srt_SegmentGeographicalDomain" xlink:to="veco_GeographicLocationOneMember" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_GeographicLocationTwoMember" xlink:label="veco_GeographicLocationTwoMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="srt_SegmentGeographicalDomain" xlink:to="veco_GeographicLocationTwoMember" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ConcentrationRiskLineItems" xlink:label="us-gaap_ConcentrationRiskLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="us-gaap_ConcentrationRiskLineItems" xlink:to="us-gaap_ConcentrationRiskTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_AccountsReceivableCreditPeriod" xlink:label="veco_AccountsReceivableCreditPeriod" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_ConcentrationRiskLineItems" xlink:to="veco_AccountsReceivableCreditPeriod" priority="1" use="optional" />
  </definitionLink>
  <definitionLink xlink:role="http://www.veeco.com/role/DisclosureDebt20232025And2027NotesDetails" xlink:type="extended" xlink:title="41001 - Disclosure - Debt - 2023. 2025 and 2027 Notes (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentTable" xlink:label="us-gaap_DebtInstrumentTable" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentAxis" xlink:label="us-gaap_DebtInstrumentAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="us-gaap_DebtInstrumentTable" xlink:to="us-gaap_DebtInstrumentAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentNameDomain" xlink:label="us-gaap_DebtInstrumentNameDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_DebtInstrumentAxis" xlink:to="us-gaap_DebtInstrumentNameDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ConvertibleDebtMember" xlink:label="us-gaap_ConvertibleDebtMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_DebtInstrumentNameDomain" xlink:to="us-gaap_ConvertibleDebtMember" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_ConvertibleSeniorUnsecuredNotesDue2023Member" xlink:label="veco_ConvertibleSeniorUnsecuredNotesDue2023Member" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_ConvertibleDebtMember" xlink:to="veco_ConvertibleSeniorUnsecuredNotesDue2023Member" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_ConvertibleSeniorUnsecuredNotesDue2025Member" xlink:label="veco_ConvertibleSeniorUnsecuredNotesDue2025Member" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_ConvertibleDebtMember" xlink:to="veco_ConvertibleSeniorUnsecuredNotesDue2025Member" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_ConvertibleSeniorUnsecuredNotesDue2027Member" xlink:label="veco_ConvertibleSeniorUnsecuredNotesDue2027Member" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_ConvertibleDebtMember" xlink:to="veco_ConvertibleSeniorUnsecuredNotesDue2027Member" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeStatementLocationAxis" xlink:label="us-gaap_IncomeStatementLocationAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="2" xlink:from="us-gaap_DebtInstrumentTable" xlink:to="us-gaap_IncomeStatementLocationAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeStatementLocationDomain" xlink:label="us-gaap_IncomeStatementLocationDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_IncomeStatementLocationAxis" xlink:to="us-gaap_IncomeStatementLocationDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OtherNonoperatingIncomeExpenseMember" xlink:label="us-gaap_OtherNonoperatingIncomeExpenseMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_IncomeStatementLocationDomain" xlink:to="us-gaap_OtherNonoperatingIncomeExpenseMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentLineItems" xlink:label="us-gaap_DebtInstrumentLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_DebtInstrumentTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentFaceAmount" xlink:label="us-gaap_DebtInstrumentFaceAmount" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_DebtInstrumentFaceAmount" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentInterestRateStatedPercentage" xlink:label="us-gaap_DebtInstrumentInterestRateStatedPercentage" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_DebtInstrumentInterestRateStatedPercentage" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ProceedsFromConvertibleDebt" xlink:label="us-gaap_ProceedsFromConvertibleDebt" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_ProceedsFromConvertibleDebt" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ExtinguishmentOfDebtAmount" xlink:label="us-gaap_ExtinguishmentOfDebtAmount" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="5" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_ExtinguishmentOfDebtAmount" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_DebtInstrumentCarryingAmountDebtExtinguished" xlink:label="veco_DebtInstrumentCarryingAmountDebtExtinguished" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="6" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="veco_DebtInstrumentCarryingAmountDebtExtinguished" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_RepaymentsOfUnsecuredDebt" xlink:label="us-gaap_RepaymentsOfUnsecuredDebt" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="7" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_RepaymentsOfUnsecuredDebt" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_GainsLossesOnExtinguishmentOfDebt" xlink:label="us-gaap_GainsLossesOnExtinguishmentOfDebt" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="8" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_GainsLossesOnExtinguishmentOfDebt" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PaymentsForDerivativeInstrumentFinancingActivities" xlink:label="us-gaap_PaymentsForDerivativeInstrumentFinancingActivities" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="9" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_PaymentsForDerivativeInstrumentFinancingActivities" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_AdjustmentsToAdditionalPaidInCapitalExtinguishmentEquityComponentOfNotesRepurchased" xlink:label="veco_AdjustmentsToAdditionalPaidInCapitalExtinguishmentEquityComponentOfNotesRepurchased" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="10" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="veco_AdjustmentsToAdditionalPaidInCapitalExtinguishmentEquityComponentOfNotesRepurchased" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_InterestPayableCurrentAndNoncurrent" xlink:label="us-gaap_InterestPayableCurrentAndNoncurrent" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="11" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_InterestPayableCurrentAndNoncurrent" priority="1" use="optional" />
  </definitionLink>
  <definitionLink xlink:role="http://www.veeco.com/role/DisclosureDebtConvertibleSeniorNotesDetails" xlink:type="extended" xlink:title="41002 - Disclosure - Debt - Convertible Senior Notes (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentTable" xlink:label="us-gaap_DebtInstrumentTable" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentAxis" xlink:label="us-gaap_DebtInstrumentAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="us-gaap_DebtInstrumentTable" xlink:to="us-gaap_DebtInstrumentAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentNameDomain" xlink:label="us-gaap_DebtInstrumentNameDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_DebtInstrumentAxis" xlink:to="us-gaap_DebtInstrumentNameDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ConvertibleDebtMember" xlink:label="us-gaap_ConvertibleDebtMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_DebtInstrumentNameDomain" xlink:to="us-gaap_ConvertibleDebtMember" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_ConvertibleSeniorUnsecuredNotesDue2023Member" xlink:label="veco_ConvertibleSeniorUnsecuredNotesDue2023Member" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_ConvertibleDebtMember" xlink:to="veco_ConvertibleSeniorUnsecuredNotesDue2023Member" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_ConvertibleSeniorUnsecuredNotesDue2025Member" xlink:label="veco_ConvertibleSeniorUnsecuredNotesDue2025Member" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_ConvertibleDebtMember" xlink:to="veco_ConvertibleSeniorUnsecuredNotesDue2025Member" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_ConvertibleSeniorUnsecuredNotesDue2027Member" xlink:label="veco_ConvertibleSeniorUnsecuredNotesDue2027Member" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_ConvertibleDebtMember" xlink:to="veco_ConvertibleSeniorUnsecuredNotesDue2027Member" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_RangeAxis" xlink:label="srt_RangeAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="2" xlink:from="us-gaap_DebtInstrumentTable" xlink:to="srt_RangeAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_RangeMember" xlink:label="srt_RangeMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="srt_RangeAxis" xlink:to="srt_RangeMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_MinimumMember" xlink:label="srt_MinimumMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="srt_RangeMember" xlink:to="srt_MinimumMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentLineItems" xlink:label="us-gaap_DebtInstrumentLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_DebtInstrumentTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentConvertibleConversionRatio1" xlink:label="us-gaap_DebtInstrumentConvertibleConversionRatio1" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_DebtInstrumentConvertibleConversionRatio1" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_DebtInstrumentPrincipalAmountDenominationForConversionIntoCommonStock" xlink:label="veco_DebtInstrumentPrincipalAmountDenominationForConversionIntoCommonStock" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="veco_DebtInstrumentPrincipalAmountDenominationForConversionIntoCommonStock" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentConvertibleConversionPrice1" xlink:label="us-gaap_DebtInstrumentConvertibleConversionPrice1" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_DebtInstrumentConvertibleConversionPrice1" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentConvertibleThresholdTradingDays" xlink:label="us-gaap_DebtInstrumentConvertibleThresholdTradingDays" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="5" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_DebtInstrumentConvertibleThresholdTradingDays" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentConvertibleThresholdConsecutiveTradingDays1" xlink:label="us-gaap_DebtInstrumentConvertibleThresholdConsecutiveTradingDays1" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="6" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_DebtInstrumentConvertibleThresholdConsecutiveTradingDays1" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentConvertibleThresholdPercentageOfStockPriceTrigger" xlink:label="us-gaap_DebtInstrumentConvertibleThresholdPercentageOfStockPriceTrigger" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="7" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_DebtInstrumentConvertibleThresholdPercentageOfStockPriceTrigger" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_DebtInstrumentNumberOfConsecutiveBusinessDays" xlink:label="veco_DebtInstrumentNumberOfConsecutiveBusinessDays" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="8" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="veco_DebtInstrumentNumberOfConsecutiveBusinessDays" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_DebtInstrumentsConvertibleFeaturesMaximumPercentageOfCommonStockCouldBeConverted" xlink:label="veco_DebtInstrumentsConvertibleFeaturesMaximumPercentageOfCommonStockCouldBeConverted" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="9" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="veco_DebtInstrumentsConvertibleFeaturesMaximumPercentageOfCommonStockCouldBeConverted" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PaymentsOfDebtIssuanceCosts" xlink:label="us-gaap_PaymentsOfDebtIssuanceCosts" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="10" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_PaymentsOfDebtIssuanceCosts" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LongTermDebtMeasurementInput" xlink:label="us-gaap_LongTermDebtMeasurementInput" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="11" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_LongTermDebtMeasurementInput" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LongTermDebtMeasurementInputExtensibleList" xlink:label="us-gaap_LongTermDebtMeasurementInputExtensibleList" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="12" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_LongTermDebtMeasurementInputExtensibleList" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentUnamortizedDiscount" xlink:label="us-gaap_DebtInstrumentUnamortizedDiscount" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="13" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_DebtInstrumentUnamortizedDiscount" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_DebtIssuanceCostsTransactionCostsAllocatedToEquityComponent" xlink:label="veco_DebtIssuanceCostsTransactionCostsAllocatedToEquityComponent" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="14" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="veco_DebtIssuanceCostsTransactionCostsAllocatedToEquityComponent" priority="1" use="optional" />
  </definitionLink>
  <definitionLink xlink:role="http://www.veeco.com/role/DisclosureDebtCarryingValueDetails" xlink:type="extended" xlink:title="41003 - Disclosure - Debt - Carrying Value (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentTable" xlink:label="us-gaap_DebtInstrumentTable" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentAxis" xlink:label="us-gaap_DebtInstrumentAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="us-gaap_DebtInstrumentTable" xlink:to="us-gaap_DebtInstrumentAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentNameDomain" xlink:label="us-gaap_DebtInstrumentNameDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_DebtInstrumentAxis" xlink:to="us-gaap_DebtInstrumentNameDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_ConvertibleSeniorUnsecuredNotesDue2023Member" xlink:label="veco_ConvertibleSeniorUnsecuredNotesDue2023Member" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_DebtInstrumentNameDomain" xlink:to="veco_ConvertibleSeniorUnsecuredNotesDue2023Member" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_ConvertibleSeniorUnsecuredNotesDue2025Member" xlink:label="veco_ConvertibleSeniorUnsecuredNotesDue2025Member" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_DebtInstrumentNameDomain" xlink:to="veco_ConvertibleSeniorUnsecuredNotesDue2025Member" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_ConvertibleSeniorUnsecuredNotesDue2027Member" xlink:label="veco_ConvertibleSeniorUnsecuredNotesDue2027Member" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_DebtInstrumentNameDomain" xlink:to="veco_ConvertibleSeniorUnsecuredNotesDue2027Member" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentLineItems" xlink:label="us-gaap_DebtInstrumentLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_DebtInstrumentTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentFaceAmount" xlink:label="us-gaap_DebtInstrumentFaceAmount" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_DebtInstrumentFaceAmount" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentUnamortizedDiscountPremiumAndDebtIssuanceCostsNet" xlink:label="us-gaap_DebtInstrumentUnamortizedDiscountPremiumAndDebtIssuanceCostsNet" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_DebtInstrumentUnamortizedDiscountPremiumAndDebtIssuanceCostsNet" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LongTermDebt" xlink:label="us-gaap_LongTermDebt" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_LongTermDebt" priority="1" use="optional" />
  </definitionLink>
  <definitionLink xlink:role="http://www.veeco.com/role/DisclosureDebtInterestExpenseDetails" xlink:type="extended" xlink:title="41004 - Disclosure - Debt - Interest Expense (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentTable" xlink:label="us-gaap_DebtInstrumentTable" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentAxis" xlink:label="us-gaap_DebtInstrumentAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="us-gaap_DebtInstrumentTable" xlink:to="us-gaap_DebtInstrumentAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentNameDomain" xlink:label="us-gaap_DebtInstrumentNameDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_DebtInstrumentAxis" xlink:to="us-gaap_DebtInstrumentNameDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_ConvertibleSeniorUnsecuredNotesDue2023Member" xlink:label="veco_ConvertibleSeniorUnsecuredNotesDue2023Member" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_DebtInstrumentNameDomain" xlink:to="veco_ConvertibleSeniorUnsecuredNotesDue2023Member" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_ConvertibleSeniorUnsecuredNotesDue2025Member" xlink:label="veco_ConvertibleSeniorUnsecuredNotesDue2025Member" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_DebtInstrumentNameDomain" xlink:to="veco_ConvertibleSeniorUnsecuredNotesDue2025Member" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_ConvertibleSeniorUnsecuredNotesDue2027Member" xlink:label="veco_ConvertibleSeniorUnsecuredNotesDue2027Member" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_DebtInstrumentNameDomain" xlink:to="veco_ConvertibleSeniorUnsecuredNotesDue2027Member" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentLineItems" xlink:label="us-gaap_DebtInstrumentLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_DebtInstrumentTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_CashInterestExpenseAbstract" xlink:label="veco_CashInterestExpenseAbstract" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="veco_CashInterestExpenseAbstract" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_InterestExpenseDebtExcludingAmortization" xlink:label="us-gaap_InterestExpenseDebtExcludingAmortization" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="veco_CashInterestExpenseAbstract" xlink:to="us-gaap_InterestExpenseDebtExcludingAmortization" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_NonCashInterestExpenseAbstract" xlink:label="veco_NonCashInterestExpenseAbstract" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="veco_NonCashInterestExpenseAbstract" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AmortizationOfFinancingCostsAndDiscounts" xlink:label="us-gaap_AmortizationOfFinancingCostsAndDiscounts" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="veco_NonCashInterestExpenseAbstract" xlink:to="us-gaap_AmortizationOfFinancingCostsAndDiscounts" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_InterestExpenseDebt" xlink:label="us-gaap_InterestExpenseDebt" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="veco_NonCashInterestExpenseAbstract" xlink:to="us-gaap_InterestExpenseDebt" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ConvertibleDebtFairValueDisclosures" xlink:label="us-gaap_ConvertibleDebtFairValueDisclosures" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="veco_NonCashInterestExpenseAbstract" xlink:to="us-gaap_ConvertibleDebtFairValueDisclosures" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ConvertibleDebtFairValueByFairValueHierarchyLevelExtensibleList" xlink:label="us-gaap_ConvertibleDebtFairValueByFairValueHierarchyLevelExtensibleList" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="veco_NonCashInterestExpenseAbstract" xlink:to="us-gaap_ConvertibleDebtFairValueByFairValueHierarchyLevelExtensibleList" priority="1" use="optional" />
  </definitionLink>
  <definitionLink xlink:role="http://www.veeco.com/role/DisclosureDebtCappedCallTransactionsDetails" xlink:type="extended" xlink:title="41005 - Disclosure - Debt - Capped Call Transactions (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentTable" xlink:label="us-gaap_DebtInstrumentTable" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DerivativeInstrumentRiskAxis" xlink:label="us-gaap_DerivativeInstrumentRiskAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="us-gaap_DebtInstrumentTable" xlink:to="us-gaap_DerivativeInstrumentRiskAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DerivativeContractTypeDomain" xlink:label="us-gaap_DerivativeContractTypeDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_DerivativeInstrumentRiskAxis" xlink:to="us-gaap_DerivativeContractTypeDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_DerivativeContractCappedCallMember" xlink:label="veco_DerivativeContractCappedCallMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_DerivativeContractTypeDomain" xlink:to="veco_DerivativeContractCappedCallMember" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentLineItems" xlink:label="us-gaap_DebtInstrumentLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_DebtInstrumentTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_CappedCallTransactionsPrice" xlink:label="veco_CappedCallTransactionsPrice" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="veco_CappedCallTransactionsPrice" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_CappedCallTransactionsCapPrice" xlink:label="veco_CappedCallTransactionsCapPrice" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="veco_CappedCallTransactionsCapPrice" priority="1" use="optional" />
  </definitionLink>
  <definitionLink xlink:role="http://www.veeco.com/role/DisclosureDebtRevolvingCreditFacilityDetails" xlink:type="extended" xlink:title="41006 - Disclosure - Debt - Revolving Credit Facility (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentTable" xlink:label="us-gaap_DebtInstrumentTable" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentAxis" xlink:label="us-gaap_DebtInstrumentAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="us-gaap_DebtInstrumentTable" xlink:to="us-gaap_DebtInstrumentAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentNameDomain" xlink:label="us-gaap_DebtInstrumentNameDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_DebtInstrumentAxis" xlink:to="us-gaap_DebtInstrumentNameDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_RevolvingCreditFacilityDecember2021Member" xlink:label="veco_RevolvingCreditFacilityDecember2021Member" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_DebtInstrumentNameDomain" xlink:to="veco_RevolvingCreditFacilityDecember2021Member" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_RevolvingCreditFacilityDecember2021LetterOfCreditMember" xlink:label="veco_RevolvingCreditFacilityDecember2021LetterOfCreditMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="veco_RevolvingCreditFacilityDecember2021Member" xlink:to="veco_RevolvingCreditFacilityDecember2021LetterOfCreditMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_VariableRateAxis" xlink:label="us-gaap_VariableRateAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="2" xlink:from="us-gaap_DebtInstrumentTable" xlink:to="us-gaap_VariableRateAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_VariableRateDomain" xlink:label="us-gaap_VariableRateDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_VariableRateAxis" xlink:to="us-gaap_VariableRateDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_BaseRateMember" xlink:label="us-gaap_BaseRateMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_VariableRateDomain" xlink:to="us-gaap_BaseRateMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SecuredOvernightFinancingRateSofrOvernightIndexSwapRateMember" xlink:label="us-gaap_SecuredOvernightFinancingRateSofrOvernightIndexSwapRateMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_VariableRateDomain" xlink:to="us-gaap_SecuredOvernightFinancingRateSofrOvernightIndexSwapRateMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_RangeAxis" xlink:label="srt_RangeAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="3" xlink:from="us-gaap_DebtInstrumentTable" xlink:to="srt_RangeAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_RangeMember" xlink:label="srt_RangeMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="srt_RangeAxis" xlink:to="srt_RangeMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_MinimumMember" xlink:label="srt_MinimumMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="srt_RangeMember" xlink:to="srt_MinimumMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_MaximumMember" xlink:label="srt_MaximumMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="srt_RangeMember" xlink:to="srt_MaximumMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentLineItems" xlink:label="us-gaap_DebtInstrumentLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_DebtInstrumentTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity" xlink:label="us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentTerm" xlink:label="us-gaap_DebtInstrumentTerm" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_DebtInstrumentTerm" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_LineOfCreditFacilityContingentIncreaseAdditionalBorrowingCapacity" xlink:label="veco_LineOfCreditFacilityContingentIncreaseAdditionalBorrowingCapacity" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="veco_LineOfCreditFacilityContingentIncreaseAdditionalBorrowingCapacity" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentBasisSpreadOnVariableRate1" xlink:label="us-gaap_DebtInstrumentBasisSpreadOnVariableRate1" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="5" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_DebtInstrumentBasisSpreadOnVariableRate1" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_DebtInstrumentFloorRate" xlink:label="veco_DebtInstrumentFloorRate" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="6" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="veco_DebtInstrumentFloorRate" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LineOfCreditFacilityUnusedCapacityCommitmentFeePercentage" xlink:label="us-gaap_LineOfCreditFacilityUnusedCapacityCommitmentFeePercentage" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="7" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_LineOfCreditFacilityUnusedCapacityCommitmentFeePercentage" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_DebtInstrumentInterestCoverageRatio" xlink:label="veco_DebtInstrumentInterestCoverageRatio" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="8" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="veco_DebtInstrumentInterestCoverageRatio" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_DebtInstrumentTotalNetLeverageRatio" xlink:label="veco_DebtInstrumentTotalNetLeverageRatio" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="9" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="veco_DebtInstrumentTotalNetLeverageRatio" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_DebtInstrumentSecuredNetLeverageRatio" xlink:label="veco_DebtInstrumentSecuredNetLeverageRatio" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="10" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="veco_DebtInstrumentSecuredNetLeverageRatio" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LineOfCreditFacilityMaximumAmountOutstandingDuringPeriod" xlink:label="us-gaap_LineOfCreditFacilityMaximumAmountOutstandingDuringPeriod" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="11" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_LineOfCreditFacilityMaximumAmountOutstandingDuringPeriod" priority="1" use="optional" />
  </definitionLink>
  <definitionLink xlink:role="http://www.veeco.com/role/DisclosureStockholdersEquityAociRollforwardDetails" xlink:type="extended" xlink:title="41101 - Disclosure - Stockholders' Equity - AOCI Rollforward (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeLossTable" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossTable" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_StatementEquityComponentsAxis" xlink:label="us-gaap_StatementEquityComponentsAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="us-gaap_AccumulatedOtherComprehensiveIncomeLossTable" xlink:to="us-gaap_StatementEquityComponentsAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_EquityComponentDomain" xlink:label="us-gaap_EquityComponentDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_StatementEquityComponentsAxis" xlink:to="us-gaap_EquityComponentDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeMember" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_EquityComponentDomain" xlink:to="us-gaap_AccumulatedOtherComprehensiveIncomeMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AccumulatedTranslationAdjustmentMember" xlink:label="us-gaap_AccumulatedTranslationAdjustmentMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_EquityComponentDomain" xlink:to="us-gaap_AccumulatedTranslationAdjustmentMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AccumulatedNetUnrealizedInvestmentGainLossMember" xlink:label="us-gaap_AccumulatedNetUnrealizedInvestmentGainLossMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_EquityComponentDomain" xlink:to="us-gaap_AccumulatedNetUnrealizedInvestmentGainLossMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeLossLineItems" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="us-gaap_AccumulatedOtherComprehensiveIncomeLossLineItems" xlink:to="us-gaap_AccumulatedOtherComprehensiveIncomeLossTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AOCIAttributableToParentNetOfTaxRollForward" xlink:label="us-gaap_AOCIAttributableToParentNetOfTaxRollForward" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_AccumulatedOtherComprehensiveIncomeLossLineItems" xlink:to="us-gaap_AOCIAttributableToParentNetOfTaxRollForward" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_StockholdersEquity" xlink:label="us-gaap_StockholdersEquity" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_AOCIAttributableToParentNetOfTaxRollForward" xlink:to="us-gaap_StockholdersEquity" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent" xlink:label="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_AOCIAttributableToParentNetOfTaxRollForward" xlink:to="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent" priority="1" use="optional" />
  </definitionLink>
  <definitionLink xlink:role="http://www.veeco.com/role/DisclosureStockPlans2019PlanDetails" xlink:type="extended" xlink:title="41201 - Disclosure - Stock Plans - 2019 Plan (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:label="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AwardTypeAxis" xlink:label="us-gaap_AwardTypeAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:to="us-gaap_AwardTypeAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xlink:label="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_AwardTypeAxis" xlink:to="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_EmployeeStockOptionMember" xlink:label="us-gaap_EmployeeStockOptionMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xlink:to="us-gaap_EmployeeStockOptionMember" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_RestrictedStockAwardsAndRestrictedStockUnitsMember" xlink:label="veco_RestrictedStockAwardsAndRestrictedStockUnitsMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xlink:to="veco_RestrictedStockAwardsAndRestrictedStockUnitsMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_RestrictedStockUnitsRSUMember" xlink:label="us-gaap_RestrictedStockUnitsRSUMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="veco_RestrictedStockAwardsAndRestrictedStockUnitsMember" xlink:to="us-gaap_RestrictedStockUnitsRSUMember" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_RsuAndPsuAwardsMember" xlink:label="veco_RsuAndPsuAwardsMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xlink:to="veco_RsuAndPsuAwardsMember" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PlanNameAxis" xlink:label="us-gaap_PlanNameAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="2" xlink:from="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:to="us-gaap_PlanNameAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PlanNameDomain" xlink:label="us-gaap_PlanNameDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_PlanNameAxis" xlink:to="us-gaap_PlanNameDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_InducementStockIncentivePlan2013Member" xlink:label="veco_InducementStockIncentivePlan2013Member" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_PlanNameDomain" xlink:to="veco_InducementStockIncentivePlan2013Member" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_StockIncentivePlan2010Member" xlink:label="veco_StockIncentivePlan2010Member" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_PlanNameDomain" xlink:to="veco_StockIncentivePlan2010Member" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_RangeAxis" xlink:label="srt_RangeAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="3" xlink:from="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:to="srt_RangeAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_RangeMember" xlink:label="srt_RangeMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="srt_RangeAxis" xlink:to="srt_RangeMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_MinimumMember" xlink:label="srt_MinimumMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="srt_RangeMember" xlink:to="srt_MinimumMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_MaximumMember" xlink:label="srt_MaximumMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="srt_RangeMember" xlink:to="srt_MaximumMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriod" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriod" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriod" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="5" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="6" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="7" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNonOptionEquityInstrumentsOutstandingNumber" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNonOptionEquityInstrumentsOutstandingNumber" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="8" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNonOptionEquityInstrumentsOutstandingNumber" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="9" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized" priority="1" use="optional" />
  </definitionLink>
  <definitionLink xlink:role="http://www.veeco.com/role/DisclosureStockPlansEsppDetails" xlink:type="extended" xlink:title="41202 - Disclosure - Stock Plans - ESPP (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:label="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PlanNameAxis" xlink:label="us-gaap_PlanNameAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:to="us-gaap_PlanNameAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PlanNameDomain" xlink:label="us-gaap_PlanNameDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_PlanNameAxis" xlink:to="us-gaap_PlanNameDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_EmployeeStockPurchasePlan2016Member" xlink:label="veco_EmployeeStockPurchasePlan2016Member" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_PlanNameDomain" xlink:to="veco_EmployeeStockPurchasePlan2016Member" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardPurchasePriceOfCommonStockPercent" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardPurchasePriceOfCommonStockPercent" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardPurchasePriceOfCommonStockPercent" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferPeriod" xlink:label="veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferPeriod" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferPeriod" priority="1" use="optional" />
  </definitionLink>
  <definitionLink xlink:role="http://www.veeco.com/role/DisclosureStockPlansSharesReservedForFutureIssuanceDetails" xlink:type="extended" xlink:title="41203 - Disclosure - Stock Plans - Shares Reserved for Future Issuance (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:label="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PlanNameAxis" xlink:label="us-gaap_PlanNameAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:to="us-gaap_PlanNameAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PlanNameDomain" xlink:label="us-gaap_PlanNameDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_PlanNameAxis" xlink:to="us-gaap_PlanNameDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_StockIncentivePlan2010Member" xlink:label="veco_StockIncentivePlan2010Member" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_PlanNameDomain" xlink:to="veco_StockIncentivePlan2010Member" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_EmployeeStockPurchasePlan2016Member" xlink:label="veco_EmployeeStockPurchasePlan2016Member" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_PlanNameDomain" xlink:to="veco_EmployeeStockPurchasePlan2016Member" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_SharesReservedForFutureIssuanceAbstract" xlink:label="veco_SharesReservedForFutureIssuanceAbstract" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="veco_SharesReservedForFutureIssuanceAbstract" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CommonStockCapitalSharesReservedForFutureIssuance" xlink:label="us-gaap_CommonStockCapitalSharesReservedForFutureIssuance" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="veco_SharesReservedForFutureIssuanceAbstract" xlink:to="us-gaap_CommonStockCapitalSharesReservedForFutureIssuance" priority="1" use="optional" />
  </definitionLink>
  <definitionLink xlink:role="http://www.veeco.com/role/DisclosureStockPlansRecognizedShareBasedCompensationDetails" xlink:type="extended" xlink:title="41204 - Disclosure - Stock Plans - Recognized Share-based Compensation (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:label="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeStatementLocationAxis" xlink:label="us-gaap_IncomeStatementLocationAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:to="us-gaap_IncomeStatementLocationAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeStatementLocationDomain" xlink:label="us-gaap_IncomeStatementLocationDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_IncomeStatementLocationAxis" xlink:to="us-gaap_IncomeStatementLocationDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CostOfSalesMember" xlink:label="us-gaap_CostOfSalesMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_IncomeStatementLocationDomain" xlink:to="us-gaap_CostOfSalesMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ResearchAndDevelopmentExpenseMember" xlink:label="us-gaap_ResearchAndDevelopmentExpenseMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_IncomeStatementLocationDomain" xlink:to="us-gaap_ResearchAndDevelopmentExpenseMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SellingGeneralAndAdministrativeExpensesMember" xlink:label="us-gaap_SellingGeneralAndAdministrativeExpensesMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_IncomeStatementLocationDomain" xlink:to="us-gaap_SellingGeneralAndAdministrativeExpensesMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AllocatedShareBasedCompensationExpense" xlink:label="us-gaap_AllocatedShareBasedCompensationExpense" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract" xlink:to="us-gaap_AllocatedShareBasedCompensationExpense" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract" xlink:to="us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense" priority="1" use="optional" />
  </definitionLink>
  <definitionLink xlink:role="http://www.veeco.com/role/DisclosureStockPlansUnrecognizedShareBasedCompensationCostsDetails" xlink:type="extended" xlink:title="41205 - Disclosure - Stock Plans - Unrecognized Share-based Compensation Costs (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:label="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AwardTypeAxis" xlink:label="us-gaap_AwardTypeAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:to="us-gaap_AwardTypeAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xlink:label="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_AwardTypeAxis" xlink:to="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_RestrictedStockAwardsAndRestrictedStockUnitsMember" xlink:label="veco_RestrictedStockAwardsAndRestrictedStockUnitsMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xlink:to="veco_RestrictedStockAwardsAndRestrictedStockUnitsMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_RestrictedStockUnitsRSUMember" xlink:label="us-gaap_RestrictedStockUnitsRSUMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="veco_RestrictedStockAwardsAndRestrictedStockUnitsMember" xlink:to="us-gaap_RestrictedStockUnitsRSUMember" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_RestrictedStockAwardMember" xlink:label="veco_RestrictedStockAwardMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="veco_RestrictedStockAwardsAndRestrictedStockUnitsMember" xlink:to="veco_RestrictedStockAwardMember" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_PerformanceShareUnitsMember" xlink:label="veco_PerformanceShareUnitsMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xlink:to="veco_PerformanceShareUnitsMember" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedAbstract" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedAbstract" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedAbstract" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedAbstract" xlink:to="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedAbstract" xlink:to="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1" priority="1" use="optional" />
  </definitionLink>
  <definitionLink xlink:role="http://www.veeco.com/role/DisclosureStockPlansOptionExerciseRangesDetails" xlink:type="extended" xlink:title="41207 - Disclosure - Stock Plans - Option Exercise Ranges (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeTable" xlink:label="us-gaap_ScheduleOfShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeTable" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis" xlink:label="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="us-gaap_ScheduleOfShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeTable" xlink:to="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeDomain" xlink:label="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis" xlink:to="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_RangeOfExercisePricesRangeOneMember" xlink:label="veco_RangeOfExercisePricesRangeOneMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeDomain" xlink:to="veco_RangeOfExercisePricesRangeOneMember" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_RangeOfExercisePricesRangeTwoMember" xlink:label="veco_RangeOfExercisePricesRangeTwoMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeDomain" xlink:to="veco_RangeOfExercisePricesRangeTwoMember" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLineItems" xlink:label="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLineItems" xlink:to="us-gaap_ScheduleOfShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLowerRangeLimit" xlink:label="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLowerRangeLimit" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLineItems" xlink:to="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLowerRangeLimit" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeUpperRangeLimit" xlink:label="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeUpperRangeLimit" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLineItems" xlink:to="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeUpperRangeLimit" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsAbstract" xlink:label="veco_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsAbstract" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLineItems" xlink:to="veco_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsAbstract" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfOutstandingOptions" xlink:label="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfOutstandingOptions" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="veco_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsAbstract" xlink:to="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfOutstandingOptions" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageRemainingContractualTerm2" xlink:label="us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageRemainingContractualTerm2" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="veco_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsAbstract" xlink:to="us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageRemainingContractualTerm2" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageExercisePriceBeginningBalance1" xlink:label="us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageExercisePriceBeginningBalance1" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="veco_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsAbstract" xlink:to="us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageExercisePriceBeginningBalance1" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsAbstract" xlink:label="veco_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsAbstract" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="5" xlink:from="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLineItems" xlink:to="veco_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsAbstract" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfExercisableOptions" xlink:label="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfExercisableOptions" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="veco_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsAbstract" xlink:to="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfExercisableOptions" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageRemainingContractualTerm2" xlink:label="us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageRemainingContractualTerm2" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="veco_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsAbstract" xlink:to="us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageRemainingContractualTerm2" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageExercisePrice1" xlink:label="us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageExercisePrice1" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="veco_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsAbstract" xlink:to="us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageExercisePrice1" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsNonvestedNumberOfShares" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsNonvestedNumberOfShares" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="6" xlink:from="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLineItems" xlink:to="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsNonvestedNumberOfShares" priority="1" use="optional" />
  </definitionLink>
  <definitionLink xlink:role="http://www.veeco.com/role/DisclosureShareBasedCompensationRestrictedSharesAndPerformanceSharesDetails" xlink:type="extended" xlink:title="41209 - Disclosure - Share-based Compensation - Restricted shares and performance shares (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:label="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AwardTypeAxis" xlink:label="us-gaap_AwardTypeAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:to="us-gaap_AwardTypeAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xlink:label="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_AwardTypeAxis" xlink:to="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember" xlink:label="veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xlink:to="veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_RestrictedStockAwardsAndRestrictedStockUnitsMember" xlink:label="veco_RestrictedStockAwardsAndRestrictedStockUnitsMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember" xlink:to="veco_RestrictedStockAwardsAndRestrictedStockUnitsMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_RestrictedStockUnitsRSUMember" xlink:label="us-gaap_RestrictedStockUnitsRSUMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="veco_RestrictedStockAwardsAndRestrictedStockUnitsMember" xlink:to="us-gaap_RestrictedStockUnitsRSUMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_RangeAxis" xlink:label="srt_RangeAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="2" xlink:from="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:to="srt_RangeAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_RangeMember" xlink:label="srt_RangeMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="srt_RangeAxis" xlink:to="srt_RangeMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_MinimumMember" xlink:label="srt_MinimumMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="srt_RangeMember" xlink:to="srt_MinimumMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_MaximumMember" xlink:label="srt_MaximumMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="srt_RangeMember" xlink:to="srt_MaximumMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsPerformanceAwardAdjustmentsInPeriod" xlink:label="veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsPerformanceAwardAdjustmentsInPeriod" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward" xlink:to="veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsPerformanceAwardAdjustmentsInPeriod" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeitedInPeriod" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeitedInPeriod" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="5" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeitedInPeriod" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsAdditionalDisclosuresAbstract" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsAdditionalDisclosuresAbstract" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsAdditionalDisclosuresAbstract" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsAdditionalDisclosuresAbstract" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsAdditionalDisclosuresAbstract" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsPerformanceAwardAdjustmentsWeightedAverageGrantDateFairValue" xlink:label="veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsPerformanceAwardAdjustmentsWeightedAverageGrantDateFairValue" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsAdditionalDisclosuresAbstract" xlink:to="veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsPerformanceAwardAdjustmentsWeightedAverageGrantDateFairValue" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsAdditionalDisclosuresAbstract" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="5" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsAdditionalDisclosuresAbstract" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodTotalFairValue" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodTotalFairValue" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="5" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodTotalFairValue" priority="1" use="optional" />
  </definitionLink>
  <definitionLink xlink:role="http://www.veeco.com/role/DisclosureStockPlansPerformanceAwardsAssumptionsDetails" xlink:type="extended" xlink:title="41210 - Disclosure - Stock Plans - Performance Awards Assumptions (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:label="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AwardTypeAxis" xlink:label="us-gaap_AwardTypeAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:to="us-gaap_AwardTypeAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xlink:label="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_AwardTypeAxis" xlink:to="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_PerformanceShareUnitsMarketConditionsMember" xlink:label="veco_PerformanceShareUnitsMarketConditionsMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xlink:to="veco_PerformanceShareUnitsMarketConditionsMember" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsWeightedAverageVolatilityRate" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsWeightedAverageVolatilityRate" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsWeightedAverageVolatilityRate" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="5" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract" xlink:to="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1" priority="1" use="optional" />
  </definitionLink>
  <definitionLink xlink:role="http://www.veeco.com/role/DisclosureStockPlansEsppFvAssumptionsDetails" xlink:type="extended" xlink:title="41211 - Disclosure - Stock Plans - ESPP FV Assumptions (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:label="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PlanNameAxis" xlink:label="us-gaap_PlanNameAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:to="us-gaap_PlanNameAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PlanNameDomain" xlink:label="us-gaap_PlanNameDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_PlanNameAxis" xlink:to="us-gaap_PlanNameDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_EmployeeStockPurchasePlan2016Member" xlink:label="veco_EmployeeStockPurchasePlan2016Member" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_PlanNameDomain" xlink:to="veco_EmployeeStockPurchasePlan2016Member" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ProceedsFromIssuanceOfSharesUnderIncentiveAndShareBasedCompensationPlans" xlink:label="us-gaap_ProceedsFromIssuanceOfSharesUnderIncentiveAndShareBasedCompensationPlans" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_ProceedsFromIssuanceOfSharesUnderIncentiveAndShareBasedCompensationPlans" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans" xlink:label="us-gaap_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsWeightedAverageVolatilityRate" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsWeightedAverageVolatilityRate" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsWeightedAverageVolatilityRate" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="5" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract" xlink:to="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1" priority="1" use="optional" />
  </definitionLink>
  <definitionLink xlink:role="http://www.veeco.com/role/DisclosureRetirementPlansDefinedContributionPlanDetails" xlink:type="extended" xlink:title="41301 - Disclosure - Retirement Plans - Defined Contribution Plan (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DefinedContributionPlanTable" xlink:label="us-gaap_DefinedContributionPlanTable" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_RangeAxis" xlink:label="srt_RangeAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="us-gaap_DefinedContributionPlanTable" xlink:to="srt_RangeAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_RangeMember" xlink:label="srt_RangeMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="srt_RangeAxis" xlink:to="srt_RangeMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_MaximumMember" xlink:label="srt_MaximumMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="srt_RangeMember" xlink:to="srt_MaximumMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DefinedContributionPlanDisclosureLineItems" xlink:label="us-gaap_DefinedContributionPlanDisclosureLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="us-gaap_DefinedContributionPlanDisclosureLineItems" xlink:to="us-gaap_DefinedContributionPlanTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DefinedContributionPlanEmployerMatchingContributionPercentOfMatch" xlink:label="us-gaap_DefinedContributionPlanEmployerMatchingContributionPercentOfMatch" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_DefinedContributionPlanDisclosureLineItems" xlink:to="us-gaap_DefinedContributionPlanEmployerMatchingContributionPercentOfMatch" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DefinedContributionPlanEmployerMatchingContributionPercent" xlink:label="us-gaap_DefinedContributionPlanEmployerMatchingContributionPercent" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_DefinedContributionPlanDisclosureLineItems" xlink:to="us-gaap_DefinedContributionPlanEmployerMatchingContributionPercent" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_DefinedContributionPlanEmployerMatchingContributionVestingPeriod" xlink:label="veco_DefinedContributionPlanEmployerMatchingContributionVestingPeriod" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="us-gaap_DefinedContributionPlanDisclosureLineItems" xlink:to="veco_DefinedContributionPlanEmployerMatchingContributionVestingPeriod" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DefinedContributionPlanCostRecognized" xlink:label="us-gaap_DefinedContributionPlanCostRecognized" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="5" xlink:from="us-gaap_DefinedContributionPlanDisclosureLineItems" xlink:to="us-gaap_DefinedContributionPlanCostRecognized" priority="1" use="optional" />
  </definitionLink>
  <definitionLink xlink:role="http://www.veeco.com/role/DisclosureDispositionsDetails" xlink:type="extended" xlink:title="41401 - Disclosure - Dispositions (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsTable" xlink:label="us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsTable" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsAxis" xlink:label="us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsTable" xlink:to="us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DisposalGroupsIncludingDiscontinuedOperationsNameDomain" xlink:label="us-gaap_DisposalGroupsIncludingDiscontinuedOperationsNameDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsAxis" xlink:to="us-gaap_DisposalGroupsIncludingDiscontinuedOperationsNameDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_OneNonCoreProductLineMember" xlink:label="veco_OneNonCoreProductLineMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_DisposalGroupsIncludingDiscontinuedOperationsNameDomain" xlink:to="veco_OneNonCoreProductLineMember" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DisposalGroupClassificationAxis" xlink:label="us-gaap_DisposalGroupClassificationAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="2" xlink:from="us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsTable" xlink:to="us-gaap_DisposalGroupClassificationAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DisposalGroupClassificationDomain" xlink:label="us-gaap_DisposalGroupClassificationDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_DisposalGroupClassificationAxis" xlink:to="us-gaap_DisposalGroupClassificationDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DisposalGroupDisposedOfBySaleNotDiscontinuedOperationsMember" xlink:label="us-gaap_DisposalGroupDisposedOfBySaleNotDiscontinuedOperationsMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_DisposalGroupClassificationDomain" xlink:to="us-gaap_DisposalGroupDisposedOfBySaleNotDiscontinuedOperationsMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsLineItems" xlink:label="us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsLineItems" xlink:to="us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DisposalGroupIncludingDiscontinuedOperationConsideration" xlink:label="us-gaap_DisposalGroupIncludingDiscontinuedOperationConsideration" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsLineItems" xlink:to="us-gaap_DisposalGroupIncludingDiscontinuedOperationConsideration" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_PercentageOfTransactionPrice" xlink:label="veco_PercentageOfTransactionPrice" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsLineItems" xlink:to="veco_PercentageOfTransactionPrice" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_PercentageOfAmountHeldInEscrow" xlink:label="veco_PercentageOfAmountHeldInEscrow" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsLineItems" xlink:to="veco_PercentageOfAmountHeldInEscrow" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_TermOfAmountToBeHeldInEscrow" xlink:label="veco_TermOfAmountToBeHeldInEscrow" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="5" xlink:from="us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsLineItems" xlink:to="veco_TermOfAmountToBeHeldInEscrow" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AssetImpairmentCharges" xlink:label="us-gaap_AssetImpairmentCharges" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="6" xlink:from="us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsLineItems" xlink:to="us-gaap_AssetImpairmentCharges" priority="1" use="optional" />
  </definitionLink>
  <definitionLink xlink:role="http://www.veeco.com/role/DisclosureIncomeTaxesOperatingLossCarryforwardsDetails" xlink:type="extended" xlink:title="41505 - Disclosure - Income Taxes - Operating Loss Carryforwards (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OperatingLossCarryforwardsTable" xlink:label="us-gaap_OperatingLossCarryforwardsTable" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeTaxAuthorityAxis" xlink:label="us-gaap_IncomeTaxAuthorityAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="us-gaap_OperatingLossCarryforwardsTable" xlink:to="us-gaap_IncomeTaxAuthorityAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeTaxAuthorityDomain" xlink:label="us-gaap_IncomeTaxAuthorityDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_IncomeTaxAuthorityAxis" xlink:to="us-gaap_IncomeTaxAuthorityDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_StateAndLocalJurisdictionMember" xlink:label="us-gaap_StateAndLocalJurisdictionMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_IncomeTaxAuthorityDomain" xlink:to="us-gaap_StateAndLocalJurisdictionMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OperatingLossCarryforwardsLineItems" xlink:label="us-gaap_OperatingLossCarryforwardsLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="us-gaap_OperatingLossCarryforwardsLineItems" xlink:to="us-gaap_OperatingLossCarryforwardsTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OperatingLossCarryforwards" xlink:label="us-gaap_OperatingLossCarryforwards" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_OperatingLossCarryforwardsLineItems" xlink:to="us-gaap_OperatingLossCarryforwards" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredTaxAssetsOperatingLossCarryforwards" xlink:label="us-gaap_DeferredTaxAssetsOperatingLossCarryforwards" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_OperatingLossCarryforwardsLineItems" xlink:to="us-gaap_DeferredTaxAssetsOperatingLossCarryforwards" priority="1" use="optional" />
  </definitionLink>
  <definitionLink xlink:role="http://www.veeco.com/role/DisclosureIncomeTaxesTaxCreditCarryforwardsDetails" xlink:type="extended" xlink:title="41506 - Disclosure - Income Taxes - Tax Credit Carryforwards (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_TaxCreditCarryforwardTable" xlink:label="us-gaap_TaxCreditCarryforwardTable" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeTaxAuthorityAxis" xlink:label="us-gaap_IncomeTaxAuthorityAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="us-gaap_TaxCreditCarryforwardTable" xlink:to="us-gaap_IncomeTaxAuthorityAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeTaxAuthorityDomain" xlink:label="us-gaap_IncomeTaxAuthorityDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_IncomeTaxAuthorityAxis" xlink:to="us-gaap_IncomeTaxAuthorityDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DomesticCountryMember" xlink:label="us-gaap_DomesticCountryMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_IncomeTaxAuthorityDomain" xlink:to="us-gaap_DomesticCountryMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_StateAndLocalJurisdictionMember" xlink:label="us-gaap_StateAndLocalJurisdictionMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_IncomeTaxAuthorityDomain" xlink:to="us-gaap_StateAndLocalJurisdictionMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ForeignCountryMember" xlink:label="us-gaap_ForeignCountryMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_IncomeTaxAuthorityDomain" xlink:to="us-gaap_ForeignCountryMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_TaxCreditCarryforwardAxis" xlink:label="us-gaap_TaxCreditCarryforwardAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="2" xlink:from="us-gaap_TaxCreditCarryforwardTable" xlink:to="us-gaap_TaxCreditCarryforwardAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_TaxCreditCarryforwardNameDomain" xlink:label="us-gaap_TaxCreditCarryforwardNameDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_TaxCreditCarryforwardAxis" xlink:to="us-gaap_TaxCreditCarryforwardNameDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ResearchMember" xlink:label="us-gaap_ResearchMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_TaxCreditCarryforwardNameDomain" xlink:to="us-gaap_ResearchMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_TaxCreditCarryforwardLineItems" xlink:label="us-gaap_TaxCreditCarryforwardLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="us-gaap_TaxCreditCarryforwardLineItems" xlink:to="us-gaap_TaxCreditCarryforwardTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_TaxCreditCarryforwardAmount" xlink:label="us-gaap_TaxCreditCarryforwardAmount" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_TaxCreditCarryforwardLineItems" xlink:to="us-gaap_TaxCreditCarryforwardAmount" priority="1" use="optional" />
  </definitionLink>
  <definitionLink xlink:role="http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformationSegmentDetails" xlink:type="extended" xlink:title="41601 - Disclosure - Segment Reporting and Geographic Information - Segment (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" xlink:label="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_ProductOrServiceAxis" xlink:label="srt_ProductOrServiceAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" xlink:to="srt_ProductOrServiceAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_ProductsAndServicesDomain" xlink:label="srt_ProductsAndServicesDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="srt_ProductOrServiceAxis" xlink:to="srt_ProductsAndServicesDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_SemiconductorMember" xlink:label="veco_SemiconductorMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="srt_ProductsAndServicesDomain" xlink:to="veco_SemiconductorMember" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_CompoundSemiconductorMember" xlink:label="veco_CompoundSemiconductorMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="srt_ProductsAndServicesDomain" xlink:to="veco_CompoundSemiconductorMember" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_DataStorageMember" xlink:label="veco_DataStorageMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="srt_ProductsAndServicesDomain" xlink:to="veco_DataStorageMember" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_ScientificAndOtherMember" xlink:label="veco_ScientificAndOtherMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="srt_ProductsAndServicesDomain" xlink:to="veco_ScientificAndOtherMember" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SegmentReportingInformationLineItems" xlink:label="us-gaap_SegmentReportingInformationLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_NumberOfOperatingSegments" xlink:label="us-gaap_NumberOfOperatingSegments" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_NumberOfOperatingSegments" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_NumberOfReportableSegments" xlink:label="us-gaap_NumberOfReportableSegments" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_NumberOfReportableSegments" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_RevenueFromContractWithCustomerIncludingAssessedTax" xlink:label="us-gaap_RevenueFromContractWithCustomerIncludingAssessedTax" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_RevenueFromContractWithCustomerIncludingAssessedTax" priority="1" use="optional" />
  </definitionLink>
  <definitionLink xlink:role="http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformationGeographicDetails" xlink:type="extended" xlink:title="41602 - Disclosure - Segment Reporting and Geographic Information - Geographic (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" xlink:label="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_StatementGeographicalAxis" xlink:label="srt_StatementGeographicalAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" xlink:to="srt_StatementGeographicalAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_SegmentGeographicalDomain" xlink:label="srt_SegmentGeographicalDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="srt_StatementGeographicalAxis" xlink:to="srt_SegmentGeographicalDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/country/2022/country-2022.xsd#country_US" xlink:label="country_US" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="srt_SegmentGeographicalDomain" xlink:to="country_US" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_EMEAMember" xlink:label="us-gaap_EMEAMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="srt_SegmentGeographicalDomain" xlink:to="us-gaap_EMEAMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/country/2022/country-2022.xsd#country_CN" xlink:label="country_CN" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="srt_SegmentGeographicalDomain" xlink:to="country_CN" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_AsiaPacificExcludingChinaMember" xlink:label="veco_AsiaPacificExcludingChinaMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="srt_SegmentGeographicalDomain" xlink:to="veco_AsiaPacificExcludingChinaMember" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_RestOfWorldMember" xlink:label="veco_RestOfWorldMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="5" xlink:from="srt_SegmentGeographicalDomain" xlink:to="veco_RestOfWorldMember" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SegmentReportingInformationLineItems" xlink:label="us-gaap_SegmentReportingInformationLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_RevenueFromContractWithCustomerIncludingAssessedTax" xlink:label="us-gaap_RevenueFromContractWithCustomerIncludingAssessedTax" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_RevenueFromContractWithCustomerIncludingAssessedTax" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PropertyPlantAndEquipmentNet" xlink:label="us-gaap_PropertyPlantAndEquipmentNet" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_PropertyPlantAndEquipmentNet" priority="1" use="optional" />
  </definitionLink>
  <definitionLink xlink:role="http://www.veeco.com/role/DisclosureSubsequentEventsDetails" xlink:type="extended" xlink:title="41701 - Disclosure - Subsequent Events (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SubsequentEventTable" xlink:label="us-gaap_SubsequentEventTable" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SubsequentEventTypeAxis" xlink:label="us-gaap_SubsequentEventTypeAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="us-gaap_SubsequentEventTable" xlink:to="us-gaap_SubsequentEventTypeAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SubsequentEventTypeDomain" xlink:label="us-gaap_SubsequentEventTypeDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_SubsequentEventTypeAxis" xlink:to="us-gaap_SubsequentEventTypeDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SubsequentEventMember" xlink:label="us-gaap_SubsequentEventMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_SubsequentEventTypeDomain" xlink:to="us-gaap_SubsequentEventMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_BusinessAcquisitionAxis" xlink:label="us-gaap_BusinessAcquisitionAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="2" xlink:from="us-gaap_SubsequentEventTable" xlink:to="us-gaap_BusinessAcquisitionAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_BusinessAcquisitionAcquireeDomain" xlink:label="us-gaap_BusinessAcquisitionAcquireeDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_BusinessAcquisitionAxis" xlink:to="us-gaap_BusinessAcquisitionAcquireeDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_EpiluvacAbMember" xlink:label="veco_EpiluvacAbMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_BusinessAcquisitionAcquireeDomain" xlink:to="veco_EpiluvacAbMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_LegalEntityAxis" xlink:label="dei_LegalEntityAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="3" xlink:from="us-gaap_SubsequentEventTable" xlink:to="dei_LegalEntityAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_EntityDomain" xlink:label="dei_EntityDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="dei_LegalEntityAxis" xlink:to="dei_EntityDomain" use="optional" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="dei_EntityDomain" xlink:to="veco_EpiluvacAbMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SubsequentEventLineItems" xlink:label="us-gaap_SubsequentEventLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="us-gaap_SubsequentEventLineItems" xlink:to="us-gaap_SubsequentEventTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_EntityNumberOfEmployees" xlink:label="dei_EntityNumberOfEmployees" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_SubsequentEventLineItems" xlink:to="dei_EntityNumberOfEmployees" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PaymentsToAcquireBusinessesGross" xlink:label="us-gaap_PaymentsToAcquireBusinessesGross" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_SubsequentEventLineItems" xlink:to="us-gaap_PaymentsToAcquireBusinessesGross" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_BusinessCombinationContingentConsiderationArrangementsRangeOfOutcomesValueHigh" xlink:label="us-gaap_BusinessCombinationContingentConsiderationArrangementsRangeOfOutcomesValueHigh" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="us-gaap_SubsequentEventLineItems" xlink:to="us-gaap_BusinessCombinationContingentConsiderationArrangementsRangeOfOutcomesValueHigh" priority="1" use="optional" />
  </definitionLink>
  <definitionLink xlink:role="http://www.veeco.com/role/DisclosureScheduleIiValuationAndQualifyingAccountsDetails" xlink:type="extended" xlink:title="41801 - Disclosure - Schedule II - Valuation and Qualifying Accounts (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_ValuationAndQualifyingAccountsDisclosureTable" xlink:label="srt_ValuationAndQualifyingAccountsDisclosureTable" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ValuationAllowancesAndReservesTypeAxis" xlink:label="us-gaap_ValuationAllowancesAndReservesTypeAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="srt_ValuationAndQualifyingAccountsDisclosureTable" xlink:to="us-gaap_ValuationAllowancesAndReservesTypeAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ValuationAllowancesAndReservesDomain" xlink:label="us-gaap_ValuationAllowancesAndReservesDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_ValuationAllowancesAndReservesTypeAxis" xlink:to="us-gaap_ValuationAllowancesAndReservesDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AllowanceForCreditLossMember" xlink:label="us-gaap_AllowanceForCreditLossMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_ValuationAllowancesAndReservesDomain" xlink:to="us-gaap_AllowanceForCreditLossMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember" xlink:label="us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_ValuationAllowancesAndReservesDomain" xlink:to="us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_ValuationAndQualifyingAccountsDisclosureLineItems" xlink:label="srt_ValuationAndQualifyingAccountsDisclosureLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="srt_ValuationAndQualifyingAccountsDisclosureLineItems" xlink:to="srt_ValuationAndQualifyingAccountsDisclosureTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ValuationAllowancesAndReservesBalance" xlink:label="us-gaap_ValuationAllowancesAndReservesBalance" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="srt_ValuationAndQualifyingAccountsDisclosureLineItems" xlink:to="us-gaap_ValuationAllowancesAndReservesBalance" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ValuationAllowancesAndReservesChargedToCostAndExpense" xlink:label="us-gaap_ValuationAllowancesAndReservesChargedToCostAndExpense" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="srt_ValuationAndQualifyingAccountsDisclosureLineItems" xlink:to="us-gaap_ValuationAllowancesAndReservesChargedToCostAndExpense" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ValuationAllowancesAndReservesDeductions" xlink:label="us-gaap_ValuationAllowancesAndReservesDeductions" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="srt_ValuationAndQualifyingAccountsDisclosureLineItems" xlink:to="us-gaap_ValuationAllowancesAndReservesDeductions" priority="1" use="optional" />
  </definitionLink>
</link:linkbase>
</XBRL>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EX-101.LAB
<SEQUENCE>12
<FILENAME>veco-20221231_lab.xml
<DESCRIPTION>EX-101.LAB
<TEXT>
<XBRL>
<?xml version="1.0" encoding="us-ascii"?>
<!--XBRL document created with Toppan Merrill Bridge  10.2.0.4 -->
<!--Based on XBRL 2.1-->
<!--Created on: 2/22/2023 6:58:56 PM-->
<!--Modified on: 2/22/2023 6:58:56 PM-->
<link:linkbase xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:link="http://www.xbrl.org/2003/linkbase" xmlns:xlink="http://www.w3.org/1999/xlink" xsi:schemaLocation="http://www.xbrl.org/2003/linkbase http://www.xbrl.org/2003/xbrl-linkbase-2003-12-31.xsd" xmlns:xbrldt="http://xbrl.org/2005/xbrldt">
  <roleRef xlink:type="simple" xlink:href="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd#negatedLabel" roleURI="http://www.xbrl.org/2009/role/negatedLabel" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd#negatedTerseLabel" roleURI="http://www.xbrl.org/2009/role/negatedTerseLabel" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd#negatedTotalLabel" roleURI="http://www.xbrl.org/2009/role/negatedTotalLabel" xmlns="http://www.xbrl.org/2003/linkbase" />
  <link:labelLink xlink:type="extended" xlink:role="http://www.xbrl.org/2003/role/link">
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_CoverAbstract" xlink:label="dei_CoverAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_CoverAbstract" xlink:to="dei_CoverAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_CoverAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cover [Abstract]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_DocumentType" xlink:label="dei_DocumentType" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_DocumentType" xlink:to="dei_DocumentType_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_DocumentType_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Document Type</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_DocumentAnnualReport" xlink:label="dei_DocumentAnnualReport" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_DocumentAnnualReport" xlink:to="dei_DocumentAnnualReport_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_DocumentAnnualReport_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Document Annual Report</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_DocumentPeriodEndDate" xlink:label="dei_DocumentPeriodEndDate" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_DocumentPeriodEndDate" xlink:to="dei_DocumentPeriodEndDate_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_DocumentPeriodEndDate_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Document Period End Date</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_DocumentTransitionReport" xlink:label="dei_DocumentTransitionReport" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_DocumentTransitionReport" xlink:to="dei_DocumentTransitionReport_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_DocumentTransitionReport_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Document Transition Report</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_EntityFileNumber" xlink:label="dei_EntityFileNumber" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityFileNumber" xlink:to="dei_EntityFileNumber_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityFileNumber_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Entity File Number</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_EntityRegistrantName" xlink:label="dei_EntityRegistrantName" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityRegistrantName" xlink:to="dei_EntityRegistrantName_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityRegistrantName_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Entity Registrant Name</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_EntityIncorporationStateCountryCode" xlink:label="dei_EntityIncorporationStateCountryCode" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityIncorporationStateCountryCode" xlink:to="dei_EntityIncorporationStateCountryCode_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityIncorporationStateCountryCode_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Entity Incorporation, State or Country Code</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_EntityTaxIdentificationNumber" xlink:label="dei_EntityTaxIdentificationNumber" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityTaxIdentificationNumber" xlink:to="dei_EntityTaxIdentificationNumber_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityTaxIdentificationNumber_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Entity Tax Identification Number</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_EntityAddressAddressLine1" xlink:label="dei_EntityAddressAddressLine1" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityAddressAddressLine1" xlink:to="dei_EntityAddressAddressLine1_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityAddressAddressLine1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Entity Address, Address Line One</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_EntityAddressCityOrTown" xlink:label="dei_EntityAddressCityOrTown" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityAddressCityOrTown" xlink:to="dei_EntityAddressCityOrTown_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityAddressCityOrTown_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Entity Address, City or Town</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_EntityAddressStateOrProvince" xlink:label="dei_EntityAddressStateOrProvince" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityAddressStateOrProvince" xlink:to="dei_EntityAddressStateOrProvince_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityAddressStateOrProvince_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Entity Address, State or Province</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_EntityAddressPostalZipCode" xlink:label="dei_EntityAddressPostalZipCode" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityAddressPostalZipCode" xlink:to="dei_EntityAddressPostalZipCode_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityAddressPostalZipCode_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Entity Address, Postal Zip Code</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_CityAreaCode" xlink:label="dei_CityAreaCode" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_CityAreaCode" xlink:to="dei_CityAreaCode_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_CityAreaCode_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">City Area Code</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_LocalPhoneNumber" xlink:label="dei_LocalPhoneNumber" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_LocalPhoneNumber" xlink:to="dei_LocalPhoneNumber_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_LocalPhoneNumber_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Local Phone Number</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_Security12bTitle" xlink:label="dei_Security12bTitle" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_Security12bTitle" xlink:to="dei_Security12bTitle_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_Security12bTitle_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Title of 12(b) Security</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_TradingSymbol" xlink:label="dei_TradingSymbol" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_TradingSymbol" xlink:to="dei_TradingSymbol_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_TradingSymbol_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Trading Symbol</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_SecurityExchangeName" xlink:label="dei_SecurityExchangeName" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_SecurityExchangeName" xlink:to="dei_SecurityExchangeName_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_SecurityExchangeName_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Security Exchange Name</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_EntityWellKnownSeasonedIssuer" xlink:label="dei_EntityWellKnownSeasonedIssuer" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityWellKnownSeasonedIssuer" xlink:to="dei_EntityWellKnownSeasonedIssuer_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityWellKnownSeasonedIssuer_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Entity Well-known Seasoned Issuer</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_EntityVoluntaryFilers" xlink:label="dei_EntityVoluntaryFilers" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityVoluntaryFilers" xlink:to="dei_EntityVoluntaryFilers_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityVoluntaryFilers_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Entity Voluntary Filers</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_EntityCurrentReportingStatus" xlink:label="dei_EntityCurrentReportingStatus" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityCurrentReportingStatus" xlink:to="dei_EntityCurrentReportingStatus_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityCurrentReportingStatus_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Entity Current Reporting Status</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_EntityInteractiveDataCurrent" xlink:label="dei_EntityInteractiveDataCurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityInteractiveDataCurrent" xlink:to="dei_EntityInteractiveDataCurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityInteractiveDataCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Entity Interactive Data Current</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_EntityFilerCategory" xlink:label="dei_EntityFilerCategory" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityFilerCategory" xlink:to="dei_EntityFilerCategory_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityFilerCategory_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Entity Filer Category</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_EntitySmallBusiness" xlink:label="dei_EntitySmallBusiness" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntitySmallBusiness" xlink:to="dei_EntitySmallBusiness_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntitySmallBusiness_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Entity Small Business</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_EntityEmergingGrowthCompany" xlink:label="dei_EntityEmergingGrowthCompany" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityEmergingGrowthCompany" xlink:to="dei_EntityEmergingGrowthCompany_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityEmergingGrowthCompany_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Entity Emerging Growth Company</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_EntityShellCompany" xlink:label="dei_EntityShellCompany" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityShellCompany" xlink:to="dei_EntityShellCompany_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityShellCompany_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Entity Shell Company</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_IcfrAuditorAttestationFlag" xlink:label="dei_IcfrAuditorAttestationFlag" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_IcfrAuditorAttestationFlag" xlink:to="dei_IcfrAuditorAttestationFlag_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_IcfrAuditorAttestationFlag_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">ICFR Auditor Attestation Flag</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_EntityPublicFloat" xlink:label="dei_EntityPublicFloat" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityPublicFloat" xlink:to="dei_EntityPublicFloat_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityPublicFloat_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Entity Public Float</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_EntityCommonStockSharesOutstanding" xlink:label="dei_EntityCommonStockSharesOutstanding" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityCommonStockSharesOutstanding" xlink:to="dei_EntityCommonStockSharesOutstanding_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityCommonStockSharesOutstanding_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Entity Common Stock, Shares Outstanding</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_AuditorName" xlink:label="dei_AuditorName" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_AuditorName" xlink:to="dei_AuditorName_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_AuditorName_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Auditor Name</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_AuditorFirmId" xlink:label="dei_AuditorFirmId" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_AuditorFirmId" xlink:to="dei_AuditorFirmId_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_AuditorFirmId_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Auditor Firm ID</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_AuditorLocation" xlink:label="dei_AuditorLocation" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_AuditorLocation" xlink:to="dei_AuditorLocation_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_AuditorLocation_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Auditor Location</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_EntityCentralIndexKey" xlink:label="dei_EntityCentralIndexKey" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityCentralIndexKey" xlink:to="dei_EntityCentralIndexKey_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityCentralIndexKey_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Entity Central Index Key</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_CurrentFiscalYearEndDate" xlink:label="dei_CurrentFiscalYearEndDate" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_CurrentFiscalYearEndDate" xlink:to="dei_CurrentFiscalYearEndDate_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_CurrentFiscalYearEndDate_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Current Fiscal Year End Date</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_DocumentFiscalYearFocus" xlink:label="dei_DocumentFiscalYearFocus" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_DocumentFiscalYearFocus" xlink:to="dei_DocumentFiscalYearFocus_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_DocumentFiscalYearFocus_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Document Fiscal Year Focus</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_DocumentFiscalPeriodFocus" xlink:label="dei_DocumentFiscalPeriodFocus" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_DocumentFiscalPeriodFocus" xlink:to="dei_DocumentFiscalPeriodFocus_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_DocumentFiscalPeriodFocus_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Document Fiscal Period Focus</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_AmendmentFlag" xlink:label="dei_AmendmentFlag" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_AmendmentFlag" xlink:to="dei_AmendmentFlag_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_AmendmentFlag_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amendment Flag</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_StatementOfFinancialPositionAbstract" xlink:label="us-gaap_StatementOfFinancialPositionAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StatementOfFinancialPositionAbstract" xlink:to="us-gaap_StatementOfFinancialPositionAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_StatementOfFinancialPositionAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Consolidated Balance Sheets</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AssetsAbstract" xlink:label="us-gaap_AssetsAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AssetsAbstract" xlink:to="us-gaap_AssetsAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AssetsAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Assets [ Abstract ]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AssetsAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Assets</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AssetsCurrentAbstract" xlink:label="us-gaap_AssetsCurrentAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AssetsCurrentAbstract" xlink:to="us-gaap_AssetsCurrentAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AssetsCurrentAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Assets, Current [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AssetsCurrentAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Current assets:</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CashAndCashEquivalentsAtCarryingValue" xlink:label="us-gaap_CashAndCashEquivalentsAtCarryingValue" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CashAndCashEquivalentsAtCarryingValue" xlink:to="us-gaap_CashAndCashEquivalentsAtCarryingValue_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CashAndCashEquivalentsAtCarryingValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cash and Cash Equivalents, at Carrying Value</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_CashAndCashEquivalentsAtCarryingValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cash and cash equivalents</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue" xlink:label="us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue" xlink:to="us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Restricted Cash and Cash Equivalents, Current</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Restricted cash</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AvailableForSaleSecuritiesDebtSecuritiesCurrent" xlink:label="us-gaap_AvailableForSaleSecuritiesDebtSecuritiesCurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AvailableForSaleSecuritiesDebtSecuritiesCurrent" xlink:to="us-gaap_AvailableForSaleSecuritiesDebtSecuritiesCurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AvailableForSaleSecuritiesDebtSecuritiesCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Available-for-sale Securities, Debt Securities, Current</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AvailableForSaleSecuritiesDebtSecuritiesCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Short-term investments</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AccountsReceivableNetCurrent" xlink:label="us-gaap_AccountsReceivableNetCurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AccountsReceivableNetCurrent" xlink:to="us-gaap_AccountsReceivableNetCurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AccountsReceivableNetCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accounts Receivable, Net, Current</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AccountsReceivableNetCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accounts receivable, net</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_UnbilledContractsReceivable" xlink:label="us-gaap_UnbilledContractsReceivable" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_UnbilledContractsReceivable" xlink:to="us-gaap_UnbilledContractsReceivable_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_UnbilledContractsReceivable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Unbilled Contracts Receivable</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_UnbilledContractsReceivable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Contract assets</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_InventoryNet" xlink:label="us-gaap_InventoryNet" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InventoryNet" xlink:to="us-gaap_InventoryNet_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_InventoryNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Inventory, Net</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_InventoryNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Inventories</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_InventoryNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PrepaidExpenseAndOtherAssetsCurrent" xlink:label="us-gaap_PrepaidExpenseAndOtherAssetsCurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PrepaidExpenseAndOtherAssetsCurrent" xlink:to="us-gaap_PrepaidExpenseAndOtherAssetsCurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PrepaidExpenseAndOtherAssetsCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Prepaid Expense and Other Assets, Current</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_PrepaidExpenseAndOtherAssetsCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Prepaid expenses and other current assets</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AssetsCurrent" xlink:label="us-gaap_AssetsCurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AssetsCurrent" xlink:to="us-gaap_AssetsCurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AssetsCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Assets, Current</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_AssetsCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total current assets</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PropertyPlantAndEquipmentNet" xlink:label="us-gaap_PropertyPlantAndEquipmentNet" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PropertyPlantAndEquipmentNet" xlink:to="us-gaap_PropertyPlantAndEquipmentNet_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PropertyPlantAndEquipmentNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Property, Plant and Equipment, Net</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_PropertyPlantAndEquipmentNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Property, plant, and equipment, net</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_PropertyPlantAndEquipmentNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net property, plant, and equipment</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_PropertyPlantAndEquipmentNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Long-lived tangible assets</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OperatingLeaseRightOfUseAsset" xlink:label="us-gaap_OperatingLeaseRightOfUseAsset" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OperatingLeaseRightOfUseAsset" xlink:to="us-gaap_OperatingLeaseRightOfUseAsset_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OperatingLeaseRightOfUseAsset_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating Lease, Right-of-Use Asset</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_OperatingLeaseRightOfUseAsset_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating lease right-of-use assets</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FiniteLivedIntangibleAssetsNet" xlink:label="us-gaap_FiniteLivedIntangibleAssetsNet" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FiniteLivedIntangibleAssetsNet" xlink:to="us-gaap_FiniteLivedIntangibleAssetsNet_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FiniteLivedIntangibleAssetsNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finite-Lived Intangible Assets, Net</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_FiniteLivedIntangibleAssetsNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total Net Intangible Assets</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_FiniteLivedIntangibleAssetsNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Intangible assets, net</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_Goodwill" xlink:label="us-gaap_Goodwill" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_Goodwill" xlink:to="us-gaap_Goodwill_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_Goodwill_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Goodwill</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_Goodwill_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Goodwill</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_Goodwill_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net amount</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredIncomeTaxAssetsNet" xlink:label="us-gaap_DeferredIncomeTaxAssetsNet" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredIncomeTaxAssetsNet" xlink:to="us-gaap_DeferredIncomeTaxAssetsNet_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DeferredIncomeTaxAssetsNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred Income Tax Assets, Net</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DeferredIncomeTaxAssetsNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred income taxes</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OtherAssetsNoncurrent" xlink:label="us-gaap_OtherAssetsNoncurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OtherAssetsNoncurrent" xlink:to="us-gaap_OtherAssetsNoncurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OtherAssetsNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other Assets, Noncurrent</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_OtherAssetsNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other assets</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_Assets" xlink:label="us-gaap_Assets" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_Assets" xlink:to="us-gaap_Assets_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_Assets_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Assets.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_Assets_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total assets</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LiabilitiesAndStockholdersEquityAbstract" xlink:label="us-gaap_LiabilitiesAndStockholdersEquityAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LiabilitiesAndStockholdersEquityAbstract" xlink:to="us-gaap_LiabilitiesAndStockholdersEquityAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LiabilitiesAndStockholdersEquityAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Liabilities and Equity [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LiabilitiesAndStockholdersEquityAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Liabilities and stockholders' equity</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LiabilitiesCurrentAbstract" xlink:label="us-gaap_LiabilitiesCurrentAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LiabilitiesCurrentAbstract" xlink:to="us-gaap_LiabilitiesCurrentAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LiabilitiesCurrentAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Liabilities, Current [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LiabilitiesCurrentAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Current liabilities:</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AccountsPayableCurrent" xlink:label="us-gaap_AccountsPayableCurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AccountsPayableCurrent" xlink:to="us-gaap_AccountsPayableCurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AccountsPayableCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accounts Payable, Current</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AccountsPayableCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accounts payable</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_AccruedAndOtherLiabilitiesCurrent" xlink:label="veco_AccruedAndOtherLiabilitiesCurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_AccruedAndOtherLiabilitiesCurrent" xlink:to="veco_AccruedAndOtherLiabilitiesCurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_AccruedAndOtherLiabilitiesCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Carrying value as of the balance sheet date of obligations incurred and payable, pertaining to costs that are statutory in nature, are incurred on contractual obligations, or accumulate over time and for which invoices have not yet been received or will not be rendered. Examples include taxes, interest, rent and utilities. Used to reflect the current portion of the liabilities (due within one year or within the normal operating cycle if longer). Also includes amount of liabilities classified as other, due within one year or the normal operating cycle, if longer.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_AccruedAndOtherLiabilitiesCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accrued and Other Liabilities, Current</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_AccruedAndOtherLiabilitiesCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accrued expenses and other current liabilities</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="veco_AccruedAndOtherLiabilitiesCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total Accrued and Other Liabilities, Current</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_ContractWithCustomerLiabilityAndRefundLiabilityCurrent" xlink:label="veco_ContractWithCustomerLiabilityAndRefundLiabilityCurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_ContractWithCustomerLiabilityAndRefundLiabilityCurrent" xlink:to="veco_ContractWithCustomerLiabilityAndRefundLiabilityCurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_ContractWithCustomerLiabilityAndRefundLiabilityCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amount of obligation to transfer good or service to customer for which consideration has been received or is receivable. Also includes amount of liability for consideration received or receivable from customer which is not included in transaction price, when consideration is expected to be refunded to customer, classified as current.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_ContractWithCustomerLiabilityAndRefundLiabilityCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Contract with Customer, Liability and Refund Liability, Current</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_ContractWithCustomerLiabilityAndRefundLiabilityCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Customer deposits and deferred revenue</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AccruedIncomeTaxesCurrent" xlink:label="us-gaap_AccruedIncomeTaxesCurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AccruedIncomeTaxesCurrent" xlink:to="us-gaap_AccruedIncomeTaxesCurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AccruedIncomeTaxesCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accrued Income Taxes, Current</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AccruedIncomeTaxesCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Income taxes payable</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LongTermDebtCurrent" xlink:label="us-gaap_LongTermDebtCurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LongTermDebtCurrent" xlink:to="us-gaap_LongTermDebtCurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LongTermDebtCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Long-term Debt, Current Maturities</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LongTermDebtCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Current portion of long-term debt</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LiabilitiesCurrent" xlink:label="us-gaap_LiabilitiesCurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LiabilitiesCurrent" xlink:to="us-gaap_LiabilitiesCurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LiabilitiesCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Liabilities, Current</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_LiabilitiesCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total current liabilities</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredIncomeTaxLiabilitiesNet" xlink:label="us-gaap_DeferredIncomeTaxLiabilitiesNet" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredIncomeTaxLiabilitiesNet" xlink:to="us-gaap_DeferredIncomeTaxLiabilitiesNet_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DeferredIncomeTaxLiabilitiesNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred Income Tax Liabilities, Net</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DeferredIncomeTaxLiabilitiesNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred income taxes</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LongTermDebtNoncurrent" xlink:label="us-gaap_LongTermDebtNoncurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LongTermDebtNoncurrent" xlink:to="us-gaap_LongTermDebtNoncurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LongTermDebtNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Long-term Debt, Excluding Current Maturities</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LongTermDebtNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Long-term debt</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OperatingLeaseLiabilityNoncurrent" xlink:label="us-gaap_OperatingLeaseLiabilityNoncurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OperatingLeaseLiabilityNoncurrent" xlink:to="us-gaap_OperatingLeaseLiabilityNoncurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OperatingLeaseLiabilityNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating Lease, Liability, Noncurrent</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_OperatingLeaseLiabilityNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Long-term operating lease liabilities</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OtherLiabilitiesNoncurrent" xlink:label="us-gaap_OtherLiabilitiesNoncurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OtherLiabilitiesNoncurrent" xlink:to="us-gaap_OtherLiabilitiesNoncurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OtherLiabilitiesNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other Liabilities, Noncurrent</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_OtherLiabilitiesNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other liabilities</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_Liabilities" xlink:label="us-gaap_Liabilities" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_Liabilities" xlink:to="us-gaap_Liabilities_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_Liabilities_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Liabilities.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_Liabilities_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total liabilities</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_StockholdersEquityAbstract" xlink:label="us-gaap_StockholdersEquityAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StockholdersEquityAbstract" xlink:to="us-gaap_StockholdersEquityAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_StockholdersEquityAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Stockholders' Equity Attributable to Parent [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_StockholdersEquityAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Stockholders' equity:</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PreferredStockValue" xlink:label="us-gaap_PreferredStockValue" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PreferredStockValue" xlink:to="us-gaap_PreferredStockValue_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PreferredStockValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Preferred Stock, Value, Issued</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_PreferredStockValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Preferred stock, $0.01 par value; 500,000 shares authorized; no shares issued and outstanding.</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CommonStockValue" xlink:label="us-gaap_CommonStockValue" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CommonStockValue" xlink:to="us-gaap_CommonStockValue_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CommonStockValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Common Stock, Value, Issued</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_CommonStockValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Common stock, $0.01 par value; 120,000,000 shares authorized; 51,660,409 shares issued and outstanding at December 31, 2022 and 50,652,864 shares issued and outstanding at December 31, 2021</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AdditionalPaidInCapitalCommonStock" xlink:label="us-gaap_AdditionalPaidInCapitalCommonStock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AdditionalPaidInCapitalCommonStock" xlink:to="us-gaap_AdditionalPaidInCapitalCommonStock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AdditionalPaidInCapitalCommonStock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Additional Paid in Capital, Common Stock</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AdditionalPaidInCapitalCommonStock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Additional paid-in capital</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_RetainedEarningsAccumulatedDeficit" xlink:label="us-gaap_RetainedEarningsAccumulatedDeficit" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RetainedEarningsAccumulatedDeficit" xlink:to="us-gaap_RetainedEarningsAccumulatedDeficit_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_RetainedEarningsAccumulatedDeficit_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Retained Earnings (Accumulated Deficit).</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_RetainedEarningsAccumulatedDeficit_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accumulated deficit</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_RetainedEarningsAccumulatedDeficit_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accumulated deficit</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax" xlink:to="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accumulated Other Comprehensive Income (Loss), Net of Tax</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accumulated other comprehensive income</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_StockholdersEquity" xlink:label="us-gaap_StockholdersEquity" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StockholdersEquity" xlink:to="us-gaap_StockholdersEquity_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_StockholdersEquity_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Stockholders' Equity Attributable to Parent</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel" xlink:label="us-gaap_StockholdersEquity_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Balance at the end of the period</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel" xlink:label="us-gaap_StockholdersEquity_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Balance at the beginning of the period</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_StockholdersEquity_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total stockholders' equity</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LiabilitiesAndStockholdersEquity" xlink:label="us-gaap_LiabilitiesAndStockholdersEquity" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LiabilitiesAndStockholdersEquity" xlink:to="us-gaap_LiabilitiesAndStockholdersEquity_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LiabilitiesAndStockholdersEquity_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Liabilities and Equity</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_LiabilitiesAndStockholdersEquity_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total liabilities and stockholders' equity</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PreferredStockParOrStatedValuePerShare" xlink:label="us-gaap_PreferredStockParOrStatedValuePerShare" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PreferredStockParOrStatedValuePerShare" xlink:to="us-gaap_PreferredStockParOrStatedValuePerShare_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PreferredStockParOrStatedValuePerShare_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Preferred Stock, Par or Stated Value Per Share</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_PreferredStockParOrStatedValuePerShare_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Preferred stock, par value (in dollars per share)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PreferredStockSharesAuthorized" xlink:label="us-gaap_PreferredStockSharesAuthorized" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PreferredStockSharesAuthorized" xlink:to="us-gaap_PreferredStockSharesAuthorized_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PreferredStockSharesAuthorized_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Preferred Stock, Shares Authorized</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_PreferredStockSharesAuthorized_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Preferred stock, shares authorized</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PreferredStockSharesIssued" xlink:label="us-gaap_PreferredStockSharesIssued" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PreferredStockSharesIssued" xlink:to="us-gaap_PreferredStockSharesIssued_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PreferredStockSharesIssued_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Preferred Stock, Shares Issued</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_PreferredStockSharesIssued_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Preferred stock, shares issued</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PreferredStockSharesOutstanding" xlink:label="us-gaap_PreferredStockSharesOutstanding" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PreferredStockSharesOutstanding" xlink:to="us-gaap_PreferredStockSharesOutstanding_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PreferredStockSharesOutstanding_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Preferred Stock, Shares Outstanding</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_PreferredStockSharesOutstanding_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Preferred stock, shares outstanding</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CommonStockParOrStatedValuePerShare" xlink:label="us-gaap_CommonStockParOrStatedValuePerShare" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CommonStockParOrStatedValuePerShare" xlink:to="us-gaap_CommonStockParOrStatedValuePerShare_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CommonStockParOrStatedValuePerShare_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Common Stock, Par or Stated Value Per Share</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_CommonStockParOrStatedValuePerShare_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Common stock, par value (in dollars per share)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CommonStockSharesAuthorized" xlink:label="us-gaap_CommonStockSharesAuthorized" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CommonStockSharesAuthorized" xlink:to="us-gaap_CommonStockSharesAuthorized_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CommonStockSharesAuthorized_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Common Stock, Shares Authorized</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_CommonStockSharesAuthorized_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Common stock, authorized shares</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CommonStockSharesIssued" xlink:label="us-gaap_CommonStockSharesIssued" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CommonStockSharesIssued" xlink:to="us-gaap_CommonStockSharesIssued_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CommonStockSharesIssued_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Common Stock, Shares, Issued</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_CommonStockSharesIssued_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Common stock, shares issued</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CommonStockSharesOutstanding" xlink:label="us-gaap_CommonStockSharesOutstanding" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CommonStockSharesOutstanding" xlink:to="us-gaap_CommonStockSharesOutstanding_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CommonStockSharesOutstanding_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Common Stock, Shares, Outstanding</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_CommonStockSharesOutstanding_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Common stock, shares outstanding</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeStatementAbstract" xlink:label="us-gaap_IncomeStatementAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeStatementAbstract" xlink:to="us-gaap_IncomeStatementAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncomeStatementAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Consolidated Statements of Operations</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_RevenueFromContractWithCustomerIncludingAssessedTax" xlink:label="us-gaap_RevenueFromContractWithCustomerIncludingAssessedTax" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RevenueFromContractWithCustomerIncludingAssessedTax" xlink:to="us-gaap_RevenueFromContractWithCustomerIncludingAssessedTax_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_RevenueFromContractWithCustomerIncludingAssessedTax_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Revenue from Contract with Customer, Including Assessed Tax</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_RevenueFromContractWithCustomerIncludingAssessedTax_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net sales</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CostOfGoodsAndServicesSold" xlink:label="us-gaap_CostOfGoodsAndServicesSold" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CostOfGoodsAndServicesSold" xlink:to="us-gaap_CostOfGoodsAndServicesSold_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CostOfGoodsAndServicesSold_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cost of Goods and Services Sold</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_CostOfGoodsAndServicesSold_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cost of sales</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_GrossProfit" xlink:label="us-gaap_GrossProfit" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_GrossProfit" xlink:to="us-gaap_GrossProfit_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_GrossProfit_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Gross Profit</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_GrossProfit_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Gross profit</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OperatingExpensesAbstract" xlink:label="us-gaap_OperatingExpensesAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OperatingExpensesAbstract" xlink:to="us-gaap_OperatingExpensesAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OperatingExpensesAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating Expenses [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_OperatingExpensesAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating expenses, net:</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ResearchAndDevelopmentExpense" xlink:label="us-gaap_ResearchAndDevelopmentExpense" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ResearchAndDevelopmentExpense" xlink:to="us-gaap_ResearchAndDevelopmentExpense_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ResearchAndDevelopmentExpense_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Research and Development Expense.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ResearchAndDevelopmentExpense_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Research and development</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SellingGeneralAndAdministrativeExpense" xlink:label="us-gaap_SellingGeneralAndAdministrativeExpense" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SellingGeneralAndAdministrativeExpense" xlink:to="us-gaap_SellingGeneralAndAdministrativeExpense_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_SellingGeneralAndAdministrativeExpense_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Selling, General and Administrative Expense</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_SellingGeneralAndAdministrativeExpense_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Selling, general, and administrative</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AmortizationOfIntangibleAssets" xlink:label="us-gaap_AmortizationOfIntangibleAssets" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AmortizationOfIntangibleAssets" xlink:to="us-gaap_AmortizationOfIntangibleAssets_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AmortizationOfIntangibleAssets_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amortization of Intangible Assets</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AmortizationOfIntangibleAssets_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amortization of intangible assets</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_RestructuringCharges" xlink:label="us-gaap_RestructuringCharges" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RestructuringCharges" xlink:to="us-gaap_RestructuringCharges_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_RestructuringCharges_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Restructuring Charges.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_RestructuringCharges_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Restructuring</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AssetImpairmentCharges" xlink:label="us-gaap_AssetImpairmentCharges" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AssetImpairmentCharges" xlink:to="us-gaap_AssetImpairmentCharges_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AssetImpairmentCharges_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Asset Impairment Charges</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AssetImpairmentCharges_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Asset impairment</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OtherOperatingIncomeExpenseNet" xlink:label="us-gaap_OtherOperatingIncomeExpenseNet" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OtherOperatingIncomeExpenseNet" xlink:to="us-gaap_OtherOperatingIncomeExpenseNet_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OtherOperatingIncomeExpenseNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other Operating Income (Expense), Net</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_OtherOperatingIncomeExpenseNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other operating expense (income), net</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OperatingExpenses" xlink:label="us-gaap_OperatingExpenses" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OperatingExpenses" xlink:to="us-gaap_OperatingExpenses_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OperatingExpenses_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating Expenses</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_OperatingExpenses_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total operating expenses, net</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OperatingIncomeLoss" xlink:label="us-gaap_OperatingIncomeLoss" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OperatingIncomeLoss" xlink:to="us-gaap_OperatingIncomeLoss_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OperatingIncomeLoss_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating Income (Loss)</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_OperatingIncomeLoss_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating income</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_InvestmentIncomeInterest" xlink:label="us-gaap_InvestmentIncomeInterest" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InvestmentIncomeInterest" xlink:to="us-gaap_InvestmentIncomeInterest_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_InvestmentIncomeInterest_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Investment Income, Interest</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_InvestmentIncomeInterest_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Interest income</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_InterestExpense" xlink:label="us-gaap_InterestExpense" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InterestExpense" xlink:to="us-gaap_InterestExpense_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_InterestExpense_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Interest Expense</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_InterestExpense_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Interest expense</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OtherNonoperatingIncomeExpense" xlink:label="us-gaap_OtherNonoperatingIncomeExpense" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OtherNonoperatingIncomeExpense" xlink:to="us-gaap_OtherNonoperatingIncomeExpense_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OtherNonoperatingIncomeExpense_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other Nonoperating Income (Expense)</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_OtherNonoperatingIncomeExpense_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other income (expense), net</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" xlink:to="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Income (Loss) from Continuing Operations before Income Taxes, Noncontrolling Interest</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Income before income taxes</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeTaxExpenseBenefit" xlink:label="us-gaap_IncomeTaxExpenseBenefit" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeTaxExpenseBenefit" xlink:to="us-gaap_IncomeTaxExpenseBenefit_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncomeTaxExpenseBenefit_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Income Tax Expense (Benefit)</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_IncomeTaxExpenseBenefit_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Income tax expense (benefit)</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_IncomeTaxExpenseBenefit_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total expense (benefit) for income taxes</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_NetIncomeLoss" xlink:label="us-gaap_NetIncomeLoss" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_NetIncomeLoss" xlink:to="us-gaap_NetIncomeLoss_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_NetIncomeLoss_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net Income (Loss) Attributable to Parent</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_NetIncomeLoss_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net income</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_NetIncomeLoss_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net income</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_NetIncomeLoss_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net income (loss)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_EarningsPerShareAbstract" xlink:label="us-gaap_EarningsPerShareAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EarningsPerShareAbstract" xlink:to="us-gaap_EarningsPerShareAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_EarningsPerShareAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Income Per Common Share</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_EarningsPerShareAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Income per common share:</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_EarningsPerShareBasic" xlink:label="us-gaap_EarningsPerShareBasic" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EarningsPerShareBasic" xlink:to="us-gaap_EarningsPerShareBasic_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_EarningsPerShareBasic_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Earnings Per Share, Basic</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_EarningsPerShareBasic_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Basic (in dollars per share)</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_EarningsPerShareBasic_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Basic income per common share (in dollars per share)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_EarningsPerShareDiluted" xlink:label="us-gaap_EarningsPerShareDiluted" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EarningsPerShareDiluted" xlink:to="us-gaap_EarningsPerShareDiluted_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_EarningsPerShareDiluted_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Earnings Per Share, Diluted</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_EarningsPerShareDiluted_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Diluted (in dollars per share)</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_EarningsPerShareDiluted_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Diluted earnings per share (in dollars per share)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract" xlink:label="us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract" xlink:to="us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Weighted Average Number of Shares Outstanding, Diluted [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Weighted average number of shares:</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_WeightedAverageNumberOfSharesOutstandingBasic" xlink:label="us-gaap_WeightedAverageNumberOfSharesOutstandingBasic" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_WeightedAverageNumberOfSharesOutstandingBasic" xlink:to="us-gaap_WeightedAverageNumberOfSharesOutstandingBasic_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_WeightedAverageNumberOfSharesOutstandingBasic_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Weighted Average Number of Shares Outstanding, Basic</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_WeightedAverageNumberOfSharesOutstandingBasic_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Basic (in shares)</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_WeightedAverageNumberOfSharesOutstandingBasic_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Basic weighted average shares outstanding</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding" xlink:label="us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding" xlink:to="us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Weighted Average Number of Shares Outstanding, Diluted</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Diluted (in shares)</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Diluted weighted average shares outstanding</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract" xlink:label="us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract" xlink:to="us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Consolidated Statements of Comprehensive Income</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParentAbstract" xlink:label="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParentAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParentAbstract" xlink:to="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParentAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParentAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other Comprehensive Income (Loss), Net of Tax [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParentAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other comprehensive income (loss), net of tax:</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OtherComprehensiveIncomeAvailableforsaleSecuritiesAdjustmentNetOfTaxPortionAttributableToParentAbstract" xlink:label="us-gaap_OtherComprehensiveIncomeAvailableforsaleSecuritiesAdjustmentNetOfTaxPortionAttributableToParentAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OtherComprehensiveIncomeAvailableforsaleSecuritiesAdjustmentNetOfTaxPortionAttributableToParentAbstract" xlink:to="us-gaap_OtherComprehensiveIncomeAvailableforsaleSecuritiesAdjustmentNetOfTaxPortionAttributableToParentAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OtherComprehensiveIncomeAvailableforsaleSecuritiesAdjustmentNetOfTaxPortionAttributableToParentAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other Comprehensive Income (Loss), Available-for-sale Securities Adjustment, Net of Tax, Portion Attributable to Parent [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_OtherComprehensiveIncomeAvailableforsaleSecuritiesAdjustmentNetOfTaxPortionAttributableToParentAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Available-for-sale securities:</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OtherComprehensiveIncomeUnrealizedHoldingGainLossOnSecuritiesArisingDuringPeriodNetOfTax" xlink:label="us-gaap_OtherComprehensiveIncomeUnrealizedHoldingGainLossOnSecuritiesArisingDuringPeriodNetOfTax" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OtherComprehensiveIncomeUnrealizedHoldingGainLossOnSecuritiesArisingDuringPeriodNetOfTax" xlink:to="us-gaap_OtherComprehensiveIncomeUnrealizedHoldingGainLossOnSecuritiesArisingDuringPeriodNetOfTax_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OtherComprehensiveIncomeUnrealizedHoldingGainLossOnSecuritiesArisingDuringPeriodNetOfTax_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other Comprehensive Income (Loss), Securities, Available-for-Sale, Unrealized Holding Gain (Loss) Arising During Period, after Tax</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_OtherComprehensiveIncomeUnrealizedHoldingGainLossOnSecuritiesArisingDuringPeriodNetOfTax_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Change in net unrealized gains or losses</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OtherComprehensiveIncomeAvailableforsaleSecuritiesAdjustmentNetOfTaxPortionAttributableToParent" xlink:label="us-gaap_OtherComprehensiveIncomeAvailableforsaleSecuritiesAdjustmentNetOfTaxPortionAttributableToParent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OtherComprehensiveIncomeAvailableforsaleSecuritiesAdjustmentNetOfTaxPortionAttributableToParent" xlink:to="us-gaap_OtherComprehensiveIncomeAvailableforsaleSecuritiesAdjustmentNetOfTaxPortionAttributableToParent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OtherComprehensiveIncomeAvailableforsaleSecuritiesAdjustmentNetOfTaxPortionAttributableToParent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other Comprehensive Income (Loss), Available-for-sale Securities Adjustment, Net of Tax, Portion Attributable to Parent</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_OtherComprehensiveIncomeAvailableforsaleSecuritiesAdjustmentNetOfTaxPortionAttributableToParent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Unrealized gain (loss) on available-for-sale securities</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParentAbstract" xlink:label="us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParentAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParentAbstract" xlink:to="us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParentAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParentAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other Comprehensive Income (Loss), Foreign Currency Transaction and Translation Adjustment, Net of Tax, Portion Attributable to Parent [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParentAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Currency translation adjustments:</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationGainLossArisingDuringPeriodNetOfTax" xlink:label="us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationGainLossArisingDuringPeriodNetOfTax" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationGainLossArisingDuringPeriodNetOfTax" xlink:to="us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationGainLossArisingDuringPeriodNetOfTax_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationGainLossArisingDuringPeriodNetOfTax_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other Comprehensive Income (Loss), Foreign Currency Transaction and Translation Gain (Loss) Arising During Period, Net of Tax</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationGainLossArisingDuringPeriodNetOfTax_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Change in currency translation adjustments</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent" xlink:label="us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent" xlink:to="us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other Comprehensive Income (Loss), Foreign Currency Transaction and Translation Adjustment, Net of Tax, Portion Attributable to Parent</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net changes related to currency translation adjustments</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent" xlink:label="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent" xlink:to="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other Comprehensive Income (Loss), Net of Tax, Portion Attributable to Parent</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other comprehensive income (loss)</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total other comprehensive income (loss), net of tax</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ComprehensiveIncomeNetOfTax" xlink:label="us-gaap_ComprehensiveIncomeNetOfTax" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ComprehensiveIncomeNetOfTax" xlink:to="us-gaap_ComprehensiveIncomeNetOfTax_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ComprehensiveIncomeNetOfTax_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Comprehensive Income (Loss), Net of Tax, Attributable to Parent</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_ComprehensiveIncomeNetOfTax_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total comprehensive income</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_StatementOfStockholdersEquityAbstract" xlink:label="us-gaap_StatementOfStockholdersEquityAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StatementOfStockholdersEquityAbstract" xlink:to="us-gaap_StatementOfStockholdersEquityAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_StatementOfStockholdersEquityAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Consolidated Statements of Stockholders' Equity</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_StatementTable" xlink:label="us-gaap_StatementTable" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StatementTable" xlink:to="us-gaap_StatementTable_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_StatementTable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Statement [Table]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_StatementEquityComponentsAxis" xlink:label="us-gaap_StatementEquityComponentsAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StatementEquityComponentsAxis" xlink:to="us-gaap_StatementEquityComponentsAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_StatementEquityComponentsAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Equity Components [Axis]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_EquityComponentDomain" xlink:label="us-gaap_EquityComponentDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EquityComponentDomain" xlink:to="us-gaap_EquityComponentDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_EquityComponentDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Equity Component [Domain]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CommonStockMember" xlink:label="us-gaap_CommonStockMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CommonStockMember" xlink:to="us-gaap_CommonStockMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CommonStockMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Common Stock</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AdditionalPaidInCapitalMember" xlink:label="us-gaap_AdditionalPaidInCapitalMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AdditionalPaidInCapitalMember" xlink:to="us-gaap_AdditionalPaidInCapitalMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AdditionalPaidInCapitalMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Additional Paid-in Capital</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_RetainedEarningsMember" xlink:label="us-gaap_RetainedEarningsMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RetainedEarningsMember" xlink:to="us-gaap_RetainedEarningsMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_RetainedEarningsMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accumulated Deficit</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeMember" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AccumulatedOtherComprehensiveIncomeMember" xlink:to="us-gaap_AccumulatedOtherComprehensiveIncomeMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accumulated Other Comprehensive Income</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accumulated Other Comprehensive Income</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentAxis" xlink:label="us-gaap_DebtInstrumentAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DebtInstrumentAxis" xlink:to="us-gaap_DebtInstrumentAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DebtInstrumentAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt Instrument [Axis]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentNameDomain" xlink:label="us-gaap_DebtInstrumentNameDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DebtInstrumentNameDomain" xlink:to="us-gaap_DebtInstrumentNameDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DebtInstrumentNameDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt Instrument, Name [Domain]</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_ConvertibleSeniorUnsecuredNotesDue2025Member" xlink:label="veco_ConvertibleSeniorUnsecuredNotesDue2025Member" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_ConvertibleSeniorUnsecuredNotesDue2025Member" xlink:to="veco_ConvertibleSeniorUnsecuredNotesDue2025Member_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_ConvertibleSeniorUnsecuredNotesDue2025Member_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Convertible Senior Unsecured Notes, Due 2025 (2025 Notes).</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_ConvertibleSeniorUnsecuredNotesDue2025Member_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">2025 Notes</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_ConvertibleSeniorUnsecuredNotesDue2027Member" xlink:label="veco_ConvertibleSeniorUnsecuredNotesDue2027Member" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_ConvertibleSeniorUnsecuredNotesDue2027Member" xlink:to="veco_ConvertibleSeniorUnsecuredNotesDue2027Member_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_ConvertibleSeniorUnsecuredNotesDue2027Member_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Convertible Senior Unsecured Notes, Due 2027 (2027 Notes).</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_ConvertibleSeniorUnsecuredNotesDue2027Member_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">2027 Notes</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_CumulativeEffectPeriodOfAdoptionAxis" xlink:label="srt_CumulativeEffectPeriodOfAdoptionAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_CumulativeEffectPeriodOfAdoptionAxis" xlink:to="srt_CumulativeEffectPeriodOfAdoptionAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="srt_CumulativeEffectPeriodOfAdoptionAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cumulative Effect, Period of Adoption [Axis]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_CumulativeEffectPeriodOfAdoptionDomain" xlink:label="srt_CumulativeEffectPeriodOfAdoptionDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_CumulativeEffectPeriodOfAdoptionDomain" xlink:to="srt_CumulativeEffectPeriodOfAdoptionDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="srt_CumulativeEffectPeriodOfAdoptionDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cumulative Effect, Period of Adoption [Domain]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_CumulativeEffectPeriodOfAdoptionAdjustmentMember" xlink:label="srt_CumulativeEffectPeriodOfAdoptionAdjustmentMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_CumulativeEffectPeriodOfAdoptionAdjustmentMember" xlink:to="srt_CumulativeEffectPeriodOfAdoptionAdjustmentMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="srt_CumulativeEffectPeriodOfAdoptionAdjustmentMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cumulative Effect, Period of Adoption, Adjustment</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_StatementLineItems" xlink:label="us-gaap_StatementLineItems" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_StatementLineItems_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_StatementLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Statement [Line Items]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_StatementLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Statement</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncreaseDecreaseInStockholdersEquityRollForward" xlink:label="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward" xlink:to="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Increase (Decrease) in Stockholders' Equity [Roll Forward]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Increase (Decrease) in Stockholders' Equity</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SharesOutstanding" xlink:label="us-gaap_SharesOutstanding" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SharesOutstanding" xlink:to="us-gaap_SharesOutstanding_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_SharesOutstanding_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Shares, Outstanding</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel" xlink:label="us-gaap_SharesOutstanding_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Balance (in shares)</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel" xlink:label="us-gaap_SharesOutstanding_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Balance (in shares)</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_OtherComprehensiveIncomeLossIncludingForeignCurrencyGainsLossesOnTransactionsIncludedInOperatingResultsNetOfTax" xlink:label="veco_OtherComprehensiveIncomeLossIncludingForeignCurrencyGainsLossesOnTransactionsIncludedInOperatingResultsNetOfTax" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_OtherComprehensiveIncomeLossIncludingForeignCurrencyGainsLossesOnTransactionsIncludedInOperatingResultsNetOfTax" xlink:to="veco_OtherComprehensiveIncomeLossIncludingForeignCurrencyGainsLossesOnTransactionsIncludedInOperatingResultsNetOfTax_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_OtherComprehensiveIncomeLossIncludingForeignCurrencyGainsLossesOnTransactionsIncludedInOperatingResultsNetOfTax_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amount after tax and reclassification adjustments of other comprehensive income (loss). Includes foreign currency gains (losses) on transactions included in operating results.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_OtherComprehensiveIncomeLossIncludingForeignCurrencyGainsLossesOnTransactionsIncludedInOperatingResultsNetOfTax_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other Comprehensive Income (Loss) Including Foreign Currency Gains (Losses) on Transactions Included in Operating Results, Net of Tax</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="veco_OtherComprehensiveIncomeLossIncludingForeignCurrencyGainsLossesOnTransactionsIncludedInOperatingResultsNetOfTax_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other comprehensive income (loss), net of tax</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue" xlink:label="us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue" xlink:to="us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Adjustments to Additional Paid in Capital, Share-based Compensation, Requisite Service Period Recognition</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based compensation expense</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_StockIssuedDuringPeriodValueShareBasedCompensation" xlink:label="us-gaap_StockIssuedDuringPeriodValueShareBasedCompensation" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StockIssuedDuringPeriodValueShareBasedCompensation" xlink:to="us-gaap_StockIssuedDuringPeriodValueShareBasedCompensation_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_StockIssuedDuringPeriodValueShareBasedCompensation_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Stock Issued During Period, Value, Share-based Compensation, Net of Forfeitures</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_StockIssuedDuringPeriodValueShareBasedCompensation_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net issuance under employee stock plans</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_StockIssuedDuringPeriodSharesShareBasedCompensation" xlink:label="us-gaap_StockIssuedDuringPeriodSharesShareBasedCompensation" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StockIssuedDuringPeriodSharesShareBasedCompensation" xlink:to="us-gaap_StockIssuedDuringPeriodSharesShareBasedCompensation_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_StockIssuedDuringPeriodSharesShareBasedCompensation_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Stock Issued During Period, Shares, Share-based Compensation, Net of Forfeitures</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_StockIssuedDuringPeriodSharesShareBasedCompensation_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net issuance under employee stock plans (in shares)</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_AdjustmentsToAdditionalPaidInCapitalExtinguishmentEquityComponentOfNotesRepurchased" xlink:label="veco_AdjustmentsToAdditionalPaidInCapitalExtinguishmentEquityComponentOfNotesRepurchased" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_AdjustmentsToAdditionalPaidInCapitalExtinguishmentEquityComponentOfNotesRepurchased" xlink:to="veco_AdjustmentsToAdditionalPaidInCapitalExtinguishmentEquityComponentOfNotesRepurchased_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_AdjustmentsToAdditionalPaidInCapitalExtinguishmentEquityComponentOfNotesRepurchased_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amount of adjustment to additional paid in capital (APIC) resulting from extinguishment of equity component of repurchased or exchanged notes.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_AdjustmentsToAdditionalPaidInCapitalExtinguishmentEquityComponentOfNotesRepurchased_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Adjustments To Additional Paid In Capital Extinguishment Equity Component Of Notes Repurchased</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="veco_AdjustmentsToAdditionalPaidInCapitalExtinguishmentEquityComponentOfNotesRepurchased_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Extinguishment of equity component of repurchased/exchanged 2023 Notes</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="veco_AdjustmentsToAdditionalPaidInCapitalExtinguishmentEquityComponentOfNotesRepurchased_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Reduction of additional paid-in capital for extinguishment of equity component of note repurchased/exchanged</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AdjustmentsToAdditionalPaidInCapitalEquityComponentOfConvertibleDebt" xlink:label="us-gaap_AdjustmentsToAdditionalPaidInCapitalEquityComponentOfConvertibleDebt" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AdjustmentsToAdditionalPaidInCapitalEquityComponentOfConvertibleDebt" xlink:to="us-gaap_AdjustmentsToAdditionalPaidInCapitalEquityComponentOfConvertibleDebt_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AdjustmentsToAdditionalPaidInCapitalEquityComponentOfConvertibleDebt_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Adjustments to Additional Paid in Capital, Equity Component of Convertible Debt</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_AdjustmentsToAdditionalPaidInCapitalEquityComponentOfConvertibleDebt_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Equity component of Notes</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_AdjustmentsToAdditionalPaidInCapitalPurchaseOfDerivativeInstrument" xlink:label="veco_AdjustmentsToAdditionalPaidInCapitalPurchaseOfDerivativeInstrument" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_AdjustmentsToAdditionalPaidInCapitalPurchaseOfDerivativeInstrument" xlink:to="veco_AdjustmentsToAdditionalPaidInCapitalPurchaseOfDerivativeInstrument_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_AdjustmentsToAdditionalPaidInCapitalPurchaseOfDerivativeInstrument_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amount of adjustment to additional paid in capital (APIC) resulting from purchase of derivative instruments.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_AdjustmentsToAdditionalPaidInCapitalPurchaseOfDerivativeInstrument_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Adjustments To Additional Paid In Capital Purchase of Derivative Instrument</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="veco_AdjustmentsToAdditionalPaidInCapitalPurchaseOfDerivativeInstrument_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Purchase of capped calls</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_StatementOfCashFlowsAbstract" xlink:label="us-gaap_StatementOfCashFlowsAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StatementOfCashFlowsAbstract" xlink:to="us-gaap_StatementOfCashFlowsAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_StatementOfCashFlowsAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Consolidated Statements of Cash Flows</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_NetCashProvidedByUsedInOperatingActivitiesContinuingOperationsAbstract" xlink:label="us-gaap_NetCashProvidedByUsedInOperatingActivitiesContinuingOperationsAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivitiesContinuingOperationsAbstract" xlink:to="us-gaap_NetCashProvidedByUsedInOperatingActivitiesContinuingOperationsAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_NetCashProvidedByUsedInOperatingActivitiesContinuingOperationsAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net Cash Provided by (Used in) Operating Activities, Continuing Operations [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_NetCashProvidedByUsedInOperatingActivitiesContinuingOperationsAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cash Flows from Operating Activities</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ProfitLoss" xlink:label="us-gaap_ProfitLoss" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ProfitLoss" xlink:to="us-gaap_ProfitLoss_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ProfitLoss_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net Income (Loss), Including Portion Attributable to Noncontrolling Interest</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_ProfitLoss_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net income</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract" xlink:label="us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract" xlink:to="us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Adjustments to Reconcile Net Income (Loss) to Cash Provided by (Used in) Operating Activities [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Adjustments to reconcile net income to net cash provided by (used in) operating activities:</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DepreciationDepletionAndAmortization" xlink:label="us-gaap_DepreciationDepletionAndAmortization" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DepreciationDepletionAndAmortization" xlink:to="us-gaap_DepreciationDepletionAndAmortization_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DepreciationDepletionAndAmortization_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Depreciation, Depletion and Amortization</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DepreciationDepletionAndAmortization_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Depreciation and amortization</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AmortizationOfFinancingCostsAndDiscounts" xlink:label="us-gaap_AmortizationOfFinancingCostsAndDiscounts" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AmortizationOfFinancingCostsAndDiscounts" xlink:to="us-gaap_AmortizationOfFinancingCostsAndDiscounts_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AmortizationOfFinancingCostsAndDiscounts_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amortization of Debt Issuance Costs and Discounts</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AmortizationOfFinancingCostsAndDiscounts_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amortization of debt discount/transaction costs</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_AmortizationOfFinancingCostsAndDiscounts_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Non-cash interest expense</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredIncomeTaxExpenseBenefit" xlink:label="us-gaap_DeferredIncomeTaxExpenseBenefit" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredIncomeTaxExpenseBenefit" xlink:to="us-gaap_DeferredIncomeTaxExpenseBenefit_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DeferredIncomeTaxExpenseBenefit_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred Income Tax Expense (Benefit)</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_DeferredIncomeTaxExpenseBenefit_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total deferred expense (benefit) for income taxes</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_DeferredIncomeTaxExpenseBenefit_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred income taxes</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensation" xlink:label="us-gaap_ShareBasedCompensation" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensation" xlink:to="us-gaap_ShareBasedCompensation_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensation_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share based Compensation</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ShareBasedCompensation_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based compensation expense</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_GainsLossesOnExtinguishmentOfDebt" xlink:label="us-gaap_GainsLossesOnExtinguishmentOfDebt" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_GainsLossesOnExtinguishmentOfDebt" xlink:to="us-gaap_GainsLossesOnExtinguishmentOfDebt_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_GainsLossesOnExtinguishmentOfDebt_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Gain (Loss) on Extinguishment of Debt</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_GainsLossesOnExtinguishmentOfDebt_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Loss on extinguishment of debt</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_GainsLossesOnExtinguishmentOfDebt_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Loss on extinguishment of debt</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_ImpairmentLossesInvestmentsNonCash" xlink:label="veco_ImpairmentLossesInvestmentsNonCash" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_ImpairmentLossesInvestmentsNonCash" xlink:to="veco_ImpairmentLossesInvestmentsNonCash_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_ImpairmentLossesInvestmentsNonCash_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">The amount of non-cash impairment charge on investments.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_ImpairmentLossesInvestmentsNonCash_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Impairment Losses, Investments, Non-cash</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_ImpairmentLossesInvestmentsNonCash_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Impairment of equity investments</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ProvisionForDoubtfulAccounts" xlink:label="us-gaap_ProvisionForDoubtfulAccounts" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ProvisionForDoubtfulAccounts" xlink:to="us-gaap_ProvisionForDoubtfulAccounts_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ProvisionForDoubtfulAccounts_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Provision for Doubtful Accounts</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ProvisionForDoubtfulAccounts_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Provision for bad debts</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncreaseDecreaseInOperatingCapitalAbstract" xlink:label="us-gaap_IncreaseDecreaseInOperatingCapitalAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncreaseDecreaseInOperatingCapitalAbstract" xlink:to="us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Increase (Decrease) in Operating Capital [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Changes in operating assets and liabilities:</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_IncreaseDecreaseInAccountsReceivableAndContractAssets" xlink:label="veco_IncreaseDecreaseInAccountsReceivableAndContractAssets" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_IncreaseDecreaseInAccountsReceivableAndContractAssets" xlink:to="veco_IncreaseDecreaseInAccountsReceivableAndContractAssets_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_IncreaseDecreaseInAccountsReceivableAndContractAssets_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">The increase (decrease) during the reporting period in amount due within one year (or one business cycle) from customers for the credit sale of goods and services and contract assets.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_IncreaseDecreaseInAccountsReceivableAndContractAssets_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Increase Decrease in Accounts Receivable and Contract Assets</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="veco_IncreaseDecreaseInAccountsReceivableAndContractAssets_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accounts receivable and contract assets</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncreaseDecreaseInInventories" xlink:label="us-gaap_IncreaseDecreaseInInventories" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncreaseDecreaseInInventories" xlink:to="us-gaap_IncreaseDecreaseInInventories_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncreaseDecreaseInInventories_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Increase (Decrease) in Inventories</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_IncreaseDecreaseInInventories_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Inventories</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets" xlink:label="us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets" xlink:to="us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Increase (Decrease) in Prepaid Expense and Other Assets</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Prepaid expenses and other current assets</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncreaseDecreaseInAccountsPayableAndAccruedLiabilities" xlink:label="us-gaap_IncreaseDecreaseInAccountsPayableAndAccruedLiabilities" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncreaseDecreaseInAccountsPayableAndAccruedLiabilities" xlink:to="us-gaap_IncreaseDecreaseInAccountsPayableAndAccruedLiabilities_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncreaseDecreaseInAccountsPayableAndAccruedLiabilities_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Increase (Decrease) in Accounts Payable and Accrued Liabilities</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_IncreaseDecreaseInAccountsPayableAndAccruedLiabilities_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accounts payable and accrued expenses</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_IncreaseDecreaseInCustomerDepositsAndDeferredRevenue" xlink:label="veco_IncreaseDecreaseInCustomerDepositsAndDeferredRevenue" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_IncreaseDecreaseInCustomerDepositsAndDeferredRevenue" xlink:to="veco_IncreaseDecreaseInCustomerDepositsAndDeferredRevenue_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_IncreaseDecreaseInCustomerDepositsAndDeferredRevenue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amount of increase decrease in customer deposits and deferred revenue.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_IncreaseDecreaseInCustomerDepositsAndDeferredRevenue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Increase Decrease In Customer Deposits And Deferred Revenue</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_IncreaseDecreaseInCustomerDepositsAndDeferredRevenue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Customer deposits and deferred revenue</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncreaseDecreaseInIncomeTaxesPayableNetOfIncomeTaxesReceivable" xlink:label="us-gaap_IncreaseDecreaseInIncomeTaxesPayableNetOfIncomeTaxesReceivable" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncreaseDecreaseInIncomeTaxesPayableNetOfIncomeTaxesReceivable" xlink:to="us-gaap_IncreaseDecreaseInIncomeTaxesPayableNetOfIncomeTaxesReceivable_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncreaseDecreaseInIncomeTaxesPayableNetOfIncomeTaxesReceivable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Increase (Decrease) in Income Taxes Payable, Net of Income Taxes Receivable</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_IncreaseDecreaseInIncomeTaxesPayableNetOfIncomeTaxesReceivable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Income taxes receivable and payable, net</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncreaseDecreaseInOtherOperatingCapitalNet" xlink:label="us-gaap_IncreaseDecreaseInOtherOperatingCapitalNet" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncreaseDecreaseInOtherOperatingCapitalNet" xlink:to="us-gaap_IncreaseDecreaseInOtherOperatingCapitalNet_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncreaseDecreaseInOtherOperatingCapitalNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Increase (Decrease) in Other Operating Assets and Liabilities, Net</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_IncreaseDecreaseInOtherOperatingCapitalNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other, net</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_NetCashProvidedByUsedInOperatingActivities" xlink:label="us-gaap_NetCashProvidedByUsedInOperatingActivities" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities" xlink:to="us-gaap_NetCashProvidedByUsedInOperatingActivities_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_NetCashProvidedByUsedInOperatingActivities_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net Cash Provided by (Used in) Operating Activities, Continuing Operations</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_NetCashProvidedByUsedInOperatingActivities_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net cash provided by (used in) operating activities</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_NetCashProvidedByUsedInInvestingActivitiesContinuingOperationsAbstract" xlink:label="us-gaap_NetCashProvidedByUsedInInvestingActivitiesContinuingOperationsAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_NetCashProvidedByUsedInInvestingActivitiesContinuingOperationsAbstract" xlink:to="us-gaap_NetCashProvidedByUsedInInvestingActivitiesContinuingOperationsAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_NetCashProvidedByUsedInInvestingActivitiesContinuingOperationsAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net Cash Provided by (Used in) Investing Activities, Continuing Operations [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_NetCashProvidedByUsedInInvestingActivitiesContinuingOperationsAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cash Flows from Investing Activities</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PaymentsToAcquirePropertyPlantAndEquipment" xlink:label="us-gaap_PaymentsToAcquirePropertyPlantAndEquipment" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PaymentsToAcquirePropertyPlantAndEquipment" xlink:to="us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Payments to Acquire Property, Plant, and Equipment</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Capital expenditures</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ProceedsFromSaleAndMaturityOfAvailableForSaleSecurities" xlink:label="us-gaap_ProceedsFromSaleAndMaturityOfAvailableForSaleSecurities" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ProceedsFromSaleAndMaturityOfAvailableForSaleSecurities" xlink:to="us-gaap_ProceedsFromSaleAndMaturityOfAvailableForSaleSecurities_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ProceedsFromSaleAndMaturityOfAvailableForSaleSecurities_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Proceeds from Sale and Maturity of Available-for-sale Securities</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ProceedsFromSaleAndMaturityOfAvailableForSaleSecurities_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Proceeds from the sale of investments</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PaymentsToAcquireAvailableForSaleSecuritiesDebt" xlink:label="us-gaap_PaymentsToAcquireAvailableForSaleSecuritiesDebt" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PaymentsToAcquireAvailableForSaleSecuritiesDebt" xlink:to="us-gaap_PaymentsToAcquireAvailableForSaleSecuritiesDebt_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PaymentsToAcquireAvailableForSaleSecuritiesDebt_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Payments to Acquire Available-for-sale Securities, Debt</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_PaymentsToAcquireAvailableForSaleSecuritiesDebt_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Payments for purchases of investments</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ProceedsFromSaleOfPropertyPlantAndEquipment" xlink:label="us-gaap_ProceedsFromSaleOfPropertyPlantAndEquipment" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ProceedsFromSaleOfPropertyPlantAndEquipment" xlink:to="us-gaap_ProceedsFromSaleOfPropertyPlantAndEquipment_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ProceedsFromSaleOfPropertyPlantAndEquipment_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Proceeds from Sale of Property, Plant, and Equipment</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ProceedsFromSaleOfPropertyPlantAndEquipment_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Proceeds from held for sale assets, net of costs to sell</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_NetCashProvidedByUsedInInvestingActivities" xlink:label="us-gaap_NetCashProvidedByUsedInInvestingActivities" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_NetCashProvidedByUsedInInvestingActivities" xlink:to="us-gaap_NetCashProvidedByUsedInInvestingActivities_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_NetCashProvidedByUsedInInvestingActivities_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net Cash Provided by (Used in) Investing Activities, Continuing Operations</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_NetCashProvidedByUsedInInvestingActivities_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net cash provided by (used in) investing activities</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_NetCashProvidedByUsedInFinancingActivitiesContinuingOperationsAbstract" xlink:label="us-gaap_NetCashProvidedByUsedInFinancingActivitiesContinuingOperationsAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_NetCashProvidedByUsedInFinancingActivitiesContinuingOperationsAbstract" xlink:to="us-gaap_NetCashProvidedByUsedInFinancingActivitiesContinuingOperationsAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_NetCashProvidedByUsedInFinancingActivitiesContinuingOperationsAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net Cash Provided by (Used in) Financing Activities, Continuing Operations [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_NetCashProvidedByUsedInFinancingActivitiesContinuingOperationsAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cash Flows from Financing Activities</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ProceedsFromConvertibleDebt" xlink:label="us-gaap_ProceedsFromConvertibleDebt" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ProceedsFromConvertibleDebt" xlink:to="us-gaap_ProceedsFromConvertibleDebt_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ProceedsFromConvertibleDebt_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Proceeds from Convertible Debt</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ProceedsFromConvertibleDebt_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Proceeds, net of issuance costs</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_ProceedsFromConvertibleDebt_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Proceeds from issuance of 2027 Notes, net of issuance costs</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PaymentsForDerivativeInstrumentFinancingActivities" xlink:label="us-gaap_PaymentsForDerivativeInstrumentFinancingActivities" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PaymentsForDerivativeInstrumentFinancingActivities" xlink:to="us-gaap_PaymentsForDerivativeInstrumentFinancingActivities_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PaymentsForDerivativeInstrumentFinancingActivities_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Payments for Derivative Instrument, Financing Activities</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_PaymentsForDerivativeInstrumentFinancingActivities_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Purchase of capped calls</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_PaymentsForDerivativeInstrumentFinancingActivities_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Purchase of capped calls</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_RepaymentsOfUnsecuredDebt" xlink:label="us-gaap_RepaymentsOfUnsecuredDebt" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RepaymentsOfUnsecuredDebt" xlink:to="us-gaap_RepaymentsOfUnsecuredDebt_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_RepaymentsOfUnsecuredDebt_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Repayments of Unsecured Debt</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_RepaymentsOfUnsecuredDebt_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Repurchase of 2023 Notes</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_RepaymentsOfUnsecuredDebt_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cash paid for repurchase of notes</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PaymentsOfDebtIssuanceCosts" xlink:label="us-gaap_PaymentsOfDebtIssuanceCosts" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PaymentsOfDebtIssuanceCosts" xlink:to="us-gaap_PaymentsOfDebtIssuanceCosts_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PaymentsOfDebtIssuanceCosts_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Payments of Debt Issuance Costs</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_PaymentsOfDebtIssuanceCosts_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt issuance costs</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_PaymentsOfDebtIssuanceCosts_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Transaction costs</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ProceedsFromIssuanceOrSaleOfEquity" xlink:label="us-gaap_ProceedsFromIssuanceOrSaleOfEquity" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ProceedsFromIssuanceOrSaleOfEquity" xlink:to="us-gaap_ProceedsFromIssuanceOrSaleOfEquity_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ProceedsFromIssuanceOrSaleOfEquity_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Proceeds from Issuance or Sale of Equity</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ProceedsFromIssuanceOrSaleOfEquity_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Proceeds (net of tax withholdings) from option exercises and employee stock purchase plan</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PaymentsRelatedToTaxWithholdingForShareBasedCompensation" xlink:label="us-gaap_PaymentsRelatedToTaxWithholdingForShareBasedCompensation" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PaymentsRelatedToTaxWithholdingForShareBasedCompensation" xlink:to="us-gaap_PaymentsRelatedToTaxWithholdingForShareBasedCompensation_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PaymentsRelatedToTaxWithholdingForShareBasedCompensation_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Payments Related to Tax Withholding for Share-based Compensation</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:label="us-gaap_PaymentsRelatedToTaxWithholdingForShareBasedCompensation_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Restricted stock tax withholdings</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_NetCashProvidedByUsedInFinancingActivities" xlink:label="us-gaap_NetCashProvidedByUsedInFinancingActivities" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_NetCashProvidedByUsedInFinancingActivities" xlink:to="us-gaap_NetCashProvidedByUsedInFinancingActivities_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_NetCashProvidedByUsedInFinancingActivities_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net Cash Provided by (Used in) Financing Activities, Continuing Operations</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_NetCashProvidedByUsedInFinancingActivities_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net cash provided by (used in) financing activities</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations" xlink:label="us-gaap_EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations" xlink:to="us-gaap_EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Effect of Exchange Rate on Cash, Cash Equivalents, Restricted Cash and Restricted Cash Equivalents, Including Disposal Group and Discontinued Operations</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Effect of exchange rate changes on cash and cash equivalents</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect" xlink:to="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cash, Cash Equivalents, Restricted Cash and Restricted Cash Equivalents, Period Increase (Decrease), Including Exchange Rate Effect</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net increase (decrease) in cash, cash equivalents, and restricted cash</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" xlink:to="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cash, Cash Equivalents, Restricted Cash and Restricted Cash Equivalents</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cash, cash equivalents, and restricted cash - end of period</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cash, cash equivalents, and restricted cash - beginning of period</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SupplementalCashFlowInformationAbstract" xlink:label="us-gaap_SupplementalCashFlowInformationAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SupplementalCashFlowInformationAbstract" xlink:to="us-gaap_SupplementalCashFlowInformationAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_SupplementalCashFlowInformationAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Supplemental Cash Flow Information [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_SupplementalCashFlowInformationAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Supplemental Disclosure of Cash Flow Information</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_InterestPaidNet" xlink:label="us-gaap_InterestPaidNet" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InterestPaidNet" xlink:to="us-gaap_InterestPaidNet_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_InterestPaidNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Interest Paid</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_InterestPaidNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Interest paid</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeTaxesPaidNet" xlink:label="us-gaap_IncomeTaxesPaidNet" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeTaxesPaidNet" xlink:to="us-gaap_IncomeTaxesPaidNet_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncomeTaxesPaidNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Income Taxes Paid, Net</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_IncomeTaxesPaidNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Income taxes paid (refunds received)</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_NonCashOperatingAndFinancingActivitiesAbstract" xlink:label="veco_NonCashOperatingAndFinancingActivitiesAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_NonCashOperatingAndFinancingActivitiesAbstract" xlink:to="veco_NonCashOperatingAndFinancingActivitiesAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_NonCashOperatingAndFinancingActivitiesAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">No definition available.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_NonCashOperatingAndFinancingActivitiesAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Non Cash Operating and Financing Activities [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="veco_NonCashOperatingAndFinancingActivitiesAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Non-cash activities</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CapitalExpendituresIncurredButNotYetPaid" xlink:label="us-gaap_CapitalExpendituresIncurredButNotYetPaid" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CapitalExpendituresIncurredButNotYetPaid" xlink:to="us-gaap_CapitalExpendituresIncurredButNotYetPaid_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CapitalExpendituresIncurredButNotYetPaid_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Capital Expenditures Incurred but Not yet Paid</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_CapitalExpendituresIncurredButNotYetPaid_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Capital expenditures included in accounts payable and accrued expenses</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_TransferFromInventories" xlink:label="veco_TransferFromInventories" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_TransferFromInventories" xlink:to="veco_TransferFromInventories_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_TransferFromInventories_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net transfer of inventory to property, plant and equipment  in non-cash transactions.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_TransferFromInventories_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Transfer From Inventories</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_TransferFromInventories_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net transfer of inventory to property, plant and equipment</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability" xlink:label="us-gaap_RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability" xlink:to="us-gaap_RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Right-of-Use Asset Obtained in Exchange for Operating Lease Liability</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Right-of-use assets obtained in exchange for lease obligations</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:label="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:to="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Significant Accounting Policies</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OrganizationConsolidationBasisOfPresentationBusinessDescriptionAndAccountingPoliciesTextBlock" xlink:label="us-gaap_OrganizationConsolidationBasisOfPresentationBusinessDescriptionAndAccountingPoliciesTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OrganizationConsolidationBasisOfPresentationBusinessDescriptionAndAccountingPoliciesTextBlock" xlink:to="us-gaap_OrganizationConsolidationBasisOfPresentationBusinessDescriptionAndAccountingPoliciesTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OrganizationConsolidationBasisOfPresentationBusinessDescriptionAndAccountingPoliciesTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Organization, Consolidation, Basis of Presentation, Business Description and Accounting Policies [Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_OrganizationConsolidationBasisOfPresentationBusinessDescriptionAndAccountingPoliciesTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Significant Accounting Policies</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_EarningsPerShareTextBlock" xlink:label="us-gaap_EarningsPerShareTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EarningsPerShareTextBlock" xlink:to="us-gaap_EarningsPerShareTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_EarningsPerShareTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Earnings Per Share [Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_EarningsPerShareTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Income Per Common Share</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FairValueDisclosuresAbstract" xlink:label="us-gaap_FairValueDisclosuresAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FairValueDisclosuresAbstract" xlink:to="us-gaap_FairValueDisclosuresAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FairValueDisclosuresAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Fair Value Measurements</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FairValueDisclosuresTextBlock" xlink:label="us-gaap_FairValueDisclosuresTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FairValueDisclosuresTextBlock" xlink:to="us-gaap_FairValueDisclosuresTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FairValueDisclosuresTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Fair Value Disclosures [Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_FairValueDisclosuresTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Fair Value Measurements</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_InvestmentsDebtAndEquitySecuritiesAbstract" xlink:label="us-gaap_InvestmentsDebtAndEquitySecuritiesAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InvestmentsDebtAndEquitySecuritiesAbstract" xlink:to="us-gaap_InvestmentsDebtAndEquitySecuritiesAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_InvestmentsDebtAndEquitySecuritiesAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Investments</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_InvestmentsInDebtAndMarketableEquitySecuritiesAndCertainTradingAssetsDisclosureTextBlock" xlink:label="us-gaap_InvestmentsInDebtAndMarketableEquitySecuritiesAndCertainTradingAssetsDisclosureTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InvestmentsInDebtAndMarketableEquitySecuritiesAndCertainTradingAssetsDisclosureTextBlock" xlink:to="us-gaap_InvestmentsInDebtAndMarketableEquitySecuritiesAndCertainTradingAssetsDisclosureTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_InvestmentsInDebtAndMarketableEquitySecuritiesAndCertainTradingAssetsDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Investments in Debt and Marketable Equity Securities (and Certain Trading Assets) Disclosure [Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_InvestmentsInDebtAndMarketableEquitySecuritiesAndCertainTradingAssetsDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Investments</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_InventoryDisclosureAbstract" xlink:label="us-gaap_InventoryDisclosureAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InventoryDisclosureAbstract" xlink:to="us-gaap_InventoryDisclosureAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_InventoryDisclosureAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Inventories</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_InventoryDisclosureTextBlock" xlink:label="us-gaap_InventoryDisclosureTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InventoryDisclosureTextBlock" xlink:to="us-gaap_InventoryDisclosureTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_InventoryDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Inventory Disclosure [Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_InventoryDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Inventories</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PropertyPlantAndEquipmentAbstract" xlink:label="us-gaap_PropertyPlantAndEquipmentAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PropertyPlantAndEquipmentAbstract" xlink:to="us-gaap_PropertyPlantAndEquipmentAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PropertyPlantAndEquipmentAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Property, Plant, and Equipment</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PropertyPlantAndEquipmentDisclosureTextBlock" xlink:label="us-gaap_PropertyPlantAndEquipmentDisclosureTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PropertyPlantAndEquipmentDisclosureTextBlock" xlink:to="us-gaap_PropertyPlantAndEquipmentDisclosureTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PropertyPlantAndEquipmentDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Property, Plant and Equipment Disclosure [Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_PropertyPlantAndEquipmentDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Property, Plant, and Equipment</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_GoodwillAndIntangibleAssetsDisclosureAbstract" xlink:label="us-gaap_GoodwillAndIntangibleAssetsDisclosureAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_GoodwillAndIntangibleAssetsDisclosureAbstract" xlink:to="us-gaap_GoodwillAndIntangibleAssetsDisclosureAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_GoodwillAndIntangibleAssetsDisclosureAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Goodwill and Intangible Assets</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_GoodwillAndIntangibleAssetsDisclosureTextBlock" xlink:label="us-gaap_GoodwillAndIntangibleAssetsDisclosureTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_GoodwillAndIntangibleAssetsDisclosureTextBlock" xlink:to="us-gaap_GoodwillAndIntangibleAssetsDisclosureTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_GoodwillAndIntangibleAssetsDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Goodwill and Intangible Assets Disclosure [Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_GoodwillAndIntangibleAssetsDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Goodwill and Intangible Assets</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PayablesAndAccrualsAbstract" xlink:label="us-gaap_PayablesAndAccrualsAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PayablesAndAccrualsAbstract" xlink:to="us-gaap_PayablesAndAccrualsAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PayablesAndAccrualsAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accrued Expenses and Other Liabilities</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AccountsPayableAndAccruedLiabilitiesDisclosureTextBlock" xlink:label="us-gaap_AccountsPayableAndAccruedLiabilitiesDisclosureTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AccountsPayableAndAccruedLiabilitiesDisclosureTextBlock" xlink:to="us-gaap_AccountsPayableAndAccruedLiabilitiesDisclosureTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AccountsPayableAndAccruedLiabilitiesDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accounts Payable and Accrued Liabilities Disclosure [Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AccountsPayableAndAccruedLiabilitiesDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accrued Expenses and Other Liabilities</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CommitmentsAndContingenciesDisclosureAbstract" xlink:label="us-gaap_CommitmentsAndContingenciesDisclosureAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CommitmentsAndContingenciesDisclosureAbstract" xlink:to="us-gaap_CommitmentsAndContingenciesDisclosureAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CommitmentsAndContingenciesDisclosureAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Commitments and Contingencies</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CommitmentsAndContingenciesDisclosureTextBlock" xlink:label="us-gaap_CommitmentsAndContingenciesDisclosureTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CommitmentsAndContingenciesDisclosureTextBlock" xlink:to="us-gaap_CommitmentsAndContingenciesDisclosureTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CommitmentsAndContingenciesDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Commitments and Contingencies Disclosure [Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_CommitmentsAndContingenciesDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Commitments and Contingencies</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtDisclosureAbstract" xlink:label="us-gaap_DebtDisclosureAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DebtDisclosureAbstract" xlink:to="us-gaap_DebtDisclosureAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DebtDisclosureAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtDisclosureTextBlock" xlink:label="us-gaap_DebtDisclosureTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DebtDisclosureTextBlock" xlink:to="us-gaap_DebtDisclosureTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DebtDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt Disclosure [Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DebtDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_StockholdersEquityNoteAbstract" xlink:label="us-gaap_StockholdersEquityNoteAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StockholdersEquityNoteAbstract" xlink:to="us-gaap_StockholdersEquityNoteAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_StockholdersEquityNoteAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Stockholders' Equity</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_StockholdersEquityNoteDisclosureTextBlock" xlink:label="us-gaap_StockholdersEquityNoteDisclosureTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StockholdersEquityNoteDisclosureTextBlock" xlink:to="us-gaap_StockholdersEquityNoteDisclosureTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_StockholdersEquityNoteDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Stockholders' Equity Note Disclosure [Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_StockholdersEquityNoteDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Stockholders' Equity</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xlink:label="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xlink:to="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Stock Plans</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock" xlink:label="us-gaap_DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock" xlink:to="us-gaap_DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Disclosure of Compensation Related Costs, Share-based Payments [Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Stock Plans</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CompensationAndRetirementDisclosureAbstract" xlink:label="us-gaap_CompensationAndRetirementDisclosureAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CompensationAndRetirementDisclosureAbstract" xlink:to="us-gaap_CompensationAndRetirementDisclosureAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CompensationAndRetirementDisclosureAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Retirement Plans</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PensionAndOtherPostretirementBenefitsDisclosureTextBlock" xlink:label="us-gaap_PensionAndOtherPostretirementBenefitsDisclosureTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PensionAndOtherPostretirementBenefitsDisclosureTextBlock" xlink:to="us-gaap_PensionAndOtherPostretirementBenefitsDisclosureTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PensionAndOtherPostretirementBenefitsDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Pension and Other Postretirement Benefits Disclosure [Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_PensionAndOtherPostretirementBenefitsDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Retirement Plans</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DiscontinuedOperationsAndDisposalGroupsAbstract" xlink:label="us-gaap_DiscontinuedOperationsAndDisposalGroupsAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DiscontinuedOperationsAndDisposalGroupsAbstract" xlink:to="us-gaap_DiscontinuedOperationsAndDisposalGroupsAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DiscontinuedOperationsAndDisposalGroupsAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Dispositions</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DisposalGroupsIncludingDiscontinuedOperationsDisclosureTextBlock" xlink:label="us-gaap_DisposalGroupsIncludingDiscontinuedOperationsDisclosureTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DisposalGroupsIncludingDiscontinuedOperationsDisclosureTextBlock" xlink:to="us-gaap_DisposalGroupsIncludingDiscontinuedOperationsDisclosureTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DisposalGroupsIncludingDiscontinuedOperationsDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Disposal Groups, Including Discontinued Operations, Disclosure [Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DisposalGroupsIncludingDiscontinuedOperationsDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Dispositions</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeTaxDisclosureAbstract" xlink:label="us-gaap_IncomeTaxDisclosureAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeTaxDisclosureAbstract" xlink:to="us-gaap_IncomeTaxDisclosureAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncomeTaxDisclosureAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Income Taxes</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeTaxDisclosureTextBlock" xlink:label="us-gaap_IncomeTaxDisclosureTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeTaxDisclosureTextBlock" xlink:to="us-gaap_IncomeTaxDisclosureTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncomeTaxDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Income Tax Disclosure [Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_IncomeTaxDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Income Taxes</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SegmentReportingAbstract" xlink:label="us-gaap_SegmentReportingAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SegmentReportingAbstract" xlink:to="us-gaap_SegmentReportingAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_SegmentReportingAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Segment Reporting and Geographic Information</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SegmentReportingDisclosureTextBlock" xlink:label="us-gaap_SegmentReportingDisclosureTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SegmentReportingDisclosureTextBlock" xlink:to="us-gaap_SegmentReportingDisclosureTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_SegmentReportingDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Segment Reporting Disclosure [Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_SegmentReportingDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Segment Reporting and Geographic Information</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SubsequentEventsAbstract" xlink:label="us-gaap_SubsequentEventsAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SubsequentEventsAbstract" xlink:to="us-gaap_SubsequentEventsAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_SubsequentEventsAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Subsequent Events</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SubsequentEventsTextBlock" xlink:label="us-gaap_SubsequentEventsTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SubsequentEventsTextBlock" xlink:to="us-gaap_SubsequentEventsTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_SubsequentEventsTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Subsequent Events [Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_SubsequentEventsTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Subsequent Events</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_ValuationAndQualifyingAccountsAbstract" xlink:label="srt_ValuationAndQualifyingAccountsAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_ValuationAndQualifyingAccountsAbstract" xlink:to="srt_ValuationAndQualifyingAccountsAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="srt_ValuationAndQualifyingAccountsAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule II - Valuation and Qualifying Accounts</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_ScheduleOfValuationAndQualifyingAccountsDisclosureTextBlock" xlink:label="srt_ScheduleOfValuationAndQualifyingAccountsDisclosureTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_ScheduleOfValuationAndQualifyingAccountsDisclosureTextBlock" xlink:to="srt_ScheduleOfValuationAndQualifyingAccountsDisclosureTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="srt_ScheduleOfValuationAndQualifyingAccountsDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Valuation and Qualifying Accounts Disclosure [Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="srt_ScheduleOfValuationAndQualifyingAccountsDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule II - Valuation and Qualifying Accounts</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FiscalPeriod" xlink:label="us-gaap_FiscalPeriod" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FiscalPeriod" xlink:to="us-gaap_FiscalPeriod_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FiscalPeriod_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Fiscal Period, Policy [Policy Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_FiscalPeriod_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Basis of Presentation</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_UseOfEstimates" xlink:label="us-gaap_UseOfEstimates" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_UseOfEstimates" xlink:to="us-gaap_UseOfEstimates_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_UseOfEstimates_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Use of Estimates, Policy [Policy Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_UseOfEstimates_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Use of Estimates</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ConsolidationPolicyTextBlock" xlink:label="us-gaap_ConsolidationPolicyTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ConsolidationPolicyTextBlock" xlink:to="us-gaap_ConsolidationPolicyTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ConsolidationPolicyTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Consolidation, Policy [Policy Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ConsolidationPolicyTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Principles of Consolidation</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ForeignCurrencyTransactionsAndTranslationsPolicyTextBlock" xlink:label="us-gaap_ForeignCurrencyTransactionsAndTranslationsPolicyTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ForeignCurrencyTransactionsAndTranslationsPolicyTextBlock" xlink:to="us-gaap_ForeignCurrencyTransactionsAndTranslationsPolicyTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ForeignCurrencyTransactionsAndTranslationsPolicyTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Foreign Currency Transactions and Translations Policy [Policy Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ForeignCurrencyTransactionsAndTranslationsPolicyTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Foreign Currencies</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_RevenueFromContractWithCustomerPolicyTextBlock" xlink:label="us-gaap_RevenueFromContractWithCustomerPolicyTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RevenueFromContractWithCustomerPolicyTextBlock" xlink:to="us-gaap_RevenueFromContractWithCustomerPolicyTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_RevenueFromContractWithCustomerPolicyTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Revenue from Contract with Customer [Policy Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_RevenueFromContractWithCustomerPolicyTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Revenue Recognition</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_StandardProductWarrantyPolicy" xlink:label="us-gaap_StandardProductWarrantyPolicy" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StandardProductWarrantyPolicy" xlink:to="us-gaap_StandardProductWarrantyPolicy_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_StandardProductWarrantyPolicy_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Standard Product Warranty, Policy [Policy Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_StandardProductWarrantyPolicy_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Warranty Costs</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ResearchAndDevelopmentExpensePolicy" xlink:label="us-gaap_ResearchAndDevelopmentExpensePolicy" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ResearchAndDevelopmentExpensePolicy" xlink:to="us-gaap_ResearchAndDevelopmentExpensePolicy_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ResearchAndDevelopmentExpensePolicy_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Research and Development Expense, Policy [Policy Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ResearchAndDevelopmentExpensePolicy_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Research and Development Costs</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AdvertisingCostsPolicyTextBlock" xlink:label="us-gaap_AdvertisingCostsPolicyTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AdvertisingCostsPolicyTextBlock" xlink:to="us-gaap_AdvertisingCostsPolicyTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AdvertisingCostsPolicyTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Advertising Costs, Policy [Policy Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AdvertisingCostsPolicyTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Advertising Expense</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationOptionAndIncentivePlansPolicy" xlink:label="us-gaap_ShareBasedCompensationOptionAndIncentivePlansPolicy" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationOptionAndIncentivePlansPolicy" xlink:to="us-gaap_ShareBasedCompensationOptionAndIncentivePlansPolicy_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationOptionAndIncentivePlansPolicy_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation, Option and Incentive Plans Policy [Policy Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ShareBasedCompensationOptionAndIncentivePlansPolicy_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accounting for Share-Based Compensation</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeTaxPolicyTextBlock" xlink:label="us-gaap_IncomeTaxPolicyTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeTaxPolicyTextBlock" xlink:to="us-gaap_IncomeTaxPolicyTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncomeTaxPolicyTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Income Tax, Policy [Policy Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_IncomeTaxPolicyTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Income Taxes</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ConcentrationRiskCreditRisk" xlink:label="us-gaap_ConcentrationRiskCreditRisk" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ConcentrationRiskCreditRisk" xlink:to="us-gaap_ConcentrationRiskCreditRisk_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ConcentrationRiskCreditRisk_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Concentration Risk, Credit Risk, Policy [Policy Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ConcentrationRiskCreditRisk_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Concentration of Credit Risk</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FairValueOfFinancialInstrumentsPolicy" xlink:label="us-gaap_FairValueOfFinancialInstrumentsPolicy" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FairValueOfFinancialInstrumentsPolicy" xlink:to="us-gaap_FairValueOfFinancialInstrumentsPolicy_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FairValueOfFinancialInstrumentsPolicy_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Fair Value of Financial Instruments, Policy [Policy Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_FairValueOfFinancialInstrumentsPolicy_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Fair Value of Financial Instruments</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_CashCashEquivalentsAndShortTermInvestmentsPolicyTextBlock" xlink:label="veco_CashCashEquivalentsAndShortTermInvestmentsPolicyTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_CashCashEquivalentsAndShortTermInvestmentsPolicyTextBlock" xlink:to="veco_CashCashEquivalentsAndShortTermInvestmentsPolicyTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_CashCashEquivalentsAndShortTermInvestmentsPolicyTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Disclosure of accounting policy for cash and cash equivalents, including the policy for determining which items are treated as cash equivalents. Other information that may be disclosed includes (1) the nature of any restrictions on the entity's use of its cash and cash equivalents, (2) whether the entity's cash and cash equivalents are insured or expose the entity to credit risk, (3) the classification of any negative balance accounts (overdrafts), and (4) the carrying basis of cash equivalents (for example, at cost) and whether the carrying amount of cash equivalents approximates fair value. Disclosure of accounting policy for investments in debt and equity securities that are classified as available-for-sale. This policy also may describe the entity's accounting treatment for transfers between investment categories, how the entity determines whether impairments of available-for-sale securities are other than temporary, and how the fair values of such securities are determined.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_CashCashEquivalentsAndShortTermInvestmentsPolicyTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cash Cash Equivalents And Short Term Investments [Policy Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_CashCashEquivalentsAndShortTermInvestmentsPolicyTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cash, Cash Equivalents, and Short-term Investments</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_InventoryPolicyTextBlock" xlink:label="us-gaap_InventoryPolicyTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InventoryPolicyTextBlock" xlink:to="us-gaap_InventoryPolicyTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_InventoryPolicyTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Inventory, Policy [Policy Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_InventoryPolicyTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Inventories</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_BusinessCombinationsPolicy" xlink:label="us-gaap_BusinessCombinationsPolicy" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_BusinessCombinationsPolicy" xlink:to="us-gaap_BusinessCombinationsPolicy_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_BusinessCombinationsPolicy_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Business Combinations Policy [Policy Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_BusinessCombinationsPolicy_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Business Combinations</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_GoodwillAndIntangibleAssetsIntangibleAssetsIndefiniteLivedPolicy" xlink:label="us-gaap_GoodwillAndIntangibleAssetsIntangibleAssetsIndefiniteLivedPolicy" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_GoodwillAndIntangibleAssetsIntangibleAssetsIndefiniteLivedPolicy" xlink:to="us-gaap_GoodwillAndIntangibleAssetsIntangibleAssetsIndefiniteLivedPolicy_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_GoodwillAndIntangibleAssetsIntangibleAssetsIndefiniteLivedPolicy_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Goodwill and Intangible Assets, Intangible Assets, Indefinite-Lived, Policy [Policy Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_GoodwillAndIntangibleAssetsIntangibleAssetsIndefiniteLivedPolicy_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Goodwill and Indefinite-Lived Intangible Assets</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_LongLivedAssetsAndCostMethodInvestmentsPolicyTextBlock" xlink:label="veco_LongLivedAssetsAndCostMethodInvestmentsPolicyTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_LongLivedAssetsAndCostMethodInvestmentsPolicyTextBlock" xlink:to="veco_LongLivedAssetsAndCostMethodInvestmentsPolicyTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_LongLivedAssetsAndCostMethodInvestmentsPolicyTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Disclosure of the accounting policy for long-lived assets (those subject to amortization or depreciation) and cost method investments.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_LongLivedAssetsAndCostMethodInvestmentsPolicyTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Long-Lived Assets and Cost Method Investments [Policy Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_LongLivedAssetsAndCostMethodInvestmentsPolicyTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Long-lived Assets</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LesseeLeasesPolicyTextBlock" xlink:label="us-gaap_LesseeLeasesPolicyTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LesseeLeasesPolicyTextBlock" xlink:to="us-gaap_LesseeLeasesPolicyTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LesseeLeasesPolicyTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lessee, Leases [Policy Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LesseeLeasesPolicyTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Leases</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_NewAccountingPronouncementsPolicyPolicyTextBlock" xlink:label="us-gaap_NewAccountingPronouncementsPolicyPolicyTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_NewAccountingPronouncementsPolicyPolicyTextBlock" xlink:to="us-gaap_NewAccountingPronouncementsPolicyPolicyTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_NewAccountingPronouncementsPolicyPolicyTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">New Accounting Pronouncements, Policy [Policy Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_NewAccountingPronouncementsPolicyPolicyTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Recently Adopted Accounting Standards and Recent Accounting Pronouncements Not Yet Adopted</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfNewAccountingPronouncementsAndChangesInAccountingPrinciplesTextBlock" xlink:label="us-gaap_ScheduleOfNewAccountingPronouncementsAndChangesInAccountingPrinciplesTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfNewAccountingPronouncementsAndChangesInAccountingPrinciplesTextBlock" xlink:to="us-gaap_ScheduleOfNewAccountingPronouncementsAndChangesInAccountingPrinciplesTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ScheduleOfNewAccountingPronouncementsAndChangesInAccountingPrinciplesTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accounting Standards Update and Change in Accounting Principle [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ScheduleOfNewAccountingPronouncementsAndChangesInAccountingPrinciplesTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of adjustments to Consolidated Balance Sheets and adjustments to calculations of basic and diluted income per share</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock" xlink:label="us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock" xlink:to="us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Earnings Per Share, Basic and Diluted [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of computations of basic and diluted income per share</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FairValueAssetsMeasuredOnRecurringBasisTextBlock" xlink:label="us-gaap_FairValueAssetsMeasuredOnRecurringBasisTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FairValueAssetsMeasuredOnRecurringBasisTextBlock" xlink:to="us-gaap_FairValueAssetsMeasuredOnRecurringBasisTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FairValueAssetsMeasuredOnRecurringBasisTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Fair Value, Assets Measured on Recurring Basis [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_FairValueAssetsMeasuredOnRecurringBasisTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of assets measured on a recurring basis at fair value</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfAvailableForSaleSecuritiesReconciliationTableTextBlock" xlink:label="us-gaap_ScheduleOfAvailableForSaleSecuritiesReconciliationTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfAvailableForSaleSecuritiesReconciliationTableTextBlock" xlink:to="us-gaap_ScheduleOfAvailableForSaleSecuritiesReconciliationTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ScheduleOfAvailableForSaleSecuritiesReconciliationTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Available-for-sale Securities Reconciliation [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ScheduleOfAvailableForSaleSecuritiesReconciliationTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of amortized cost and fair value of available-for-sale securities</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtSecuritiesAvailableForSaleUnrealizedLossPositionFairValueTableTextBlock" xlink:label="us-gaap_DebtSecuritiesAvailableForSaleUnrealizedLossPositionFairValueTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DebtSecuritiesAvailableForSaleUnrealizedLossPositionFairValueTableTextBlock" xlink:to="us-gaap_DebtSecuritiesAvailableForSaleUnrealizedLossPositionFairValueTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DebtSecuritiesAvailableForSaleUnrealizedLossPositionFairValueTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt Securities Available For Sale Unrealized Loss Position Fair Value Table Text Block</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DebtSecuritiesAvailableForSaleUnrealizedLossPositionFairValueTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of fair value and unrealized losses of available-for-sale securities in a loss position</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_InvestmentsClassifiedByContractualMaturityDateTableTextBlock" xlink:label="us-gaap_InvestmentsClassifiedByContractualMaturityDateTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InvestmentsClassifiedByContractualMaturityDateTableTextBlock" xlink:to="us-gaap_InvestmentsClassifiedByContractualMaturityDateTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_InvestmentsClassifiedByContractualMaturityDateTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Investments Classified by Contractual Maturity Date [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_InvestmentsClassifiedByContractualMaturityDateTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of contractual maturities of securities classified as available-for-sale</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfInventoryCurrentTableTextBlock" xlink:label="us-gaap_ScheduleOfInventoryCurrentTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfInventoryCurrentTableTextBlock" xlink:to="us-gaap_ScheduleOfInventoryCurrentTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ScheduleOfInventoryCurrentTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Inventory, Current [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ScheduleOfInventoryCurrentTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of inventories</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PropertyPlantAndEquipmentTextBlock" xlink:label="us-gaap_PropertyPlantAndEquipmentTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PropertyPlantAndEquipmentTextBlock" xlink:to="us-gaap_PropertyPlantAndEquipmentTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PropertyPlantAndEquipmentTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Property, Plant and Equipment [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_PropertyPlantAndEquipmentTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of property, plant, and equipment</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfGoodwillTextBlock" xlink:label="us-gaap_ScheduleOfGoodwillTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfGoodwillTextBlock" xlink:to="us-gaap_ScheduleOfGoodwillTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ScheduleOfGoodwillTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Goodwill [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ScheduleOfGoodwillTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of changes in goodwill</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_ScheduleOfIntangibleAssetsExcludingGoodwillTableTextBlock" xlink:label="veco_ScheduleOfIntangibleAssetsExcludingGoodwillTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_ScheduleOfIntangibleAssetsExcludingGoodwillTableTextBlock" xlink:to="veco_ScheduleOfIntangibleAssetsExcludingGoodwillTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_ScheduleOfIntangibleAssetsExcludingGoodwillTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Tabular disclosure of assets, excluding financial assets and goodwill, which lack physical substance with a finite life or exist in perpetuity, by major class.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_ScheduleOfIntangibleAssetsExcludingGoodwillTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Intangible Assets, Excluding Goodwill [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="veco_ScheduleOfIntangibleAssetsExcludingGoodwillTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of intangible assets excluding goodwill</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleofFiniteLivedIntangibleAssetsFutureAmortizationExpenseTableTextBlock" xlink:label="us-gaap_ScheduleofFiniteLivedIntangibleAssetsFutureAmortizationExpenseTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleofFiniteLivedIntangibleAssetsFutureAmortizationExpenseTableTextBlock" xlink:to="us-gaap_ScheduleofFiniteLivedIntangibleAssetsFutureAmortizationExpenseTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ScheduleofFiniteLivedIntangibleAssetsFutureAmortizationExpenseTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Finite-Lived Intangible Assets, Future Amortization Expense [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ScheduleofFiniteLivedIntangibleAssetsFutureAmortizationExpenseTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of estimated annual amortization expense, excluding in-process R&amp;D for intangible assets with definite useful lives</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfAccruedLiabilitiesTableTextBlock" xlink:label="us-gaap_ScheduleOfAccruedLiabilitiesTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfAccruedLiabilitiesTableTextBlock" xlink:to="us-gaap_ScheduleOfAccruedLiabilitiesTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ScheduleOfAccruedLiabilitiesTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Accrued Liabilities [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ScheduleOfAccruedLiabilitiesTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of accrued expenses and other current liabilities</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_ScheduleOfDeferredRevenueTableTextBlock" xlink:label="veco_ScheduleOfDeferredRevenueTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_ScheduleOfDeferredRevenueTableTextBlock" xlink:to="veco_ScheduleOfDeferredRevenueTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_ScheduleOfDeferredRevenueTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">The Tabular disclosure for deferred revenues at the end of the reporting period, and description and amounts of significant changes that occurred during the reporting period. Deferred revenue is a liability as of the balance sheet date related to a revenue producing activity for which revenue has not yet been recognized. Generally, an entity records deferred revenue when it receives consideration from a customer before achieving certain criteria that must be met for revenue to be recognized in conformity with GAAP.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_ScheduleOfDeferredRevenueTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule Of Deferred Revenue [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_ScheduleOfDeferredRevenueTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of changes in deferred revenue</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock" xlink:label="us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock" xlink:to="us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Product Warranty Liability [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of changes in product warranty reserves</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LesseeOperatingLeaseLiabilityMaturityTableTextBlock" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityMaturityTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LesseeOperatingLeaseLiabilityMaturityTableTextBlock" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityMaturityTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityMaturityTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lessee, Operating Lease, Liability, Maturity [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityMaturityTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of maturities of lease liabilities 2020</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfRevenueByMajorCustomersByReportingSegmentsTableTextBlock" xlink:label="us-gaap_ScheduleOfRevenueByMajorCustomersByReportingSegmentsTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfRevenueByMajorCustomersByReportingSegmentsTableTextBlock" xlink:to="us-gaap_ScheduleOfRevenueByMajorCustomersByReportingSegmentsTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ScheduleOfRevenueByMajorCustomersByReportingSegmentsTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Revenue by Major Customers by Reporting Segments [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ScheduleOfRevenueByMajorCustomersByReportingSegmentsTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of customers who accounted for more than 10% of our aggregate accounts receivable or net sales</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ConvertibleDebtTableTextBlock" xlink:label="us-gaap_ConvertibleDebtTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ConvertibleDebtTableTextBlock" xlink:to="us-gaap_ConvertibleDebtTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ConvertibleDebtTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Convertible Debt [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ConvertibleDebtTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of carrying value of Convertible Senior Notes</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_InterestIncomeAndInterestExpenseDisclosureTableTextBlock" xlink:label="us-gaap_InterestIncomeAndInterestExpenseDisclosureTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InterestIncomeAndInterestExpenseDisclosureTableTextBlock" xlink:to="us-gaap_InterestIncomeAndInterestExpenseDisclosureTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_InterestIncomeAndInterestExpenseDisclosureTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Interest Income and Interest Expense Disclosure [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_InterestIncomeAndInterestExpenseDisclosureTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of interest expense related to Convertible Senior Notes</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock" xlink:label="us-gaap_ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock" xlink:to="us-gaap_ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Accumulated Other Comprehensive Income (Loss) [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of the changes in the balances of each component of AOCI, net of tax</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfEmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsTextBlock" xlink:label="us-gaap_ScheduleOfEmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfEmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsTextBlock" xlink:to="us-gaap_ScheduleOfEmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ScheduleOfEmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Employee Service Share-based Compensation, Allocation of Recognized Period Costs [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ScheduleOfEmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of share-based compensation expense</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfUnrecognizedCompensationCostNonvestedAwardsTableTextBlock" xlink:label="us-gaap_ScheduleOfUnrecognizedCompensationCostNonvestedAwardsTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfUnrecognizedCompensationCostNonvestedAwardsTableTextBlock" xlink:to="us-gaap_ScheduleOfUnrecognizedCompensationCostNonvestedAwardsTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ScheduleOfUnrecognizedCompensationCostNonvestedAwardsTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Unrecognized Compensation Cost, Nonvested Awards [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ScheduleOfUnrecognizedCompensationCostNonvestedAwardsTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Summary of unrecognized share-based compensation costs</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock" xlink:label="us-gaap_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock" xlink:to="us-gaap_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Share-based Compensation, Stock Options, Activity [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Summary of stock option activity</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeTextBlock" xlink:label="us-gaap_ScheduleOfShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeTextBlock" xlink:to="us-gaap_ScheduleOfShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ScheduleOfShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Share-based Compensation, Shares Authorized under Stock Option Plans, by Exercise Price Range [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ScheduleOfShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Summary of information about stock option information</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_ScheduleOfStockOptionExercisedTableTextBlock" xlink:label="veco_ScheduleOfStockOptionExercisedTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_ScheduleOfStockOptionExercisedTableTextBlock" xlink:to="veco_ScheduleOfStockOptionExercisedTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_ScheduleOfStockOptionExercisedTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Tabular disclosure of stock option exercised.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_ScheduleOfStockOptionExercisedTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Stock Option Exercised [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_ScheduleOfStockOptionExercisedTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Summary of stock options exercised</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock" xlink:label="us-gaap_ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock" xlink:to="us-gaap_ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Share-based Compensation, Restricted Stock and Restricted Stock Units Activity [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Summary of non-vested restricted and performance shares activity</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_ScheduleOfShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsValuationAssumptionsTableTextBlock" xlink:label="veco_ScheduleOfShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsValuationAssumptionsTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_ScheduleOfShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsValuationAssumptionsTableTextBlock" xlink:to="veco_ScheduleOfShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsValuationAssumptionsTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_ScheduleOfShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsValuationAssumptionsTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Tabular disclosure of the significant assumptions used during the year to estimate the fair value of equity instruments other than options, including, but not limited to: (a) expected term, (b) expected volatility of the entity's shares, (c) expected dividends, (d) risk-free rate(s), and (e) discount for post-vesting restrictions.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_ScheduleOfShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsValuationAssumptionsTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Share-based Payment Award, Equity Instruments Other Than Options, Valuation Assumptions [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_ScheduleOfShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsValuationAssumptionsTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Summary of valuation assumptions for performance awards</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfShareBasedPaymentAwardEmployeeStockPurchasePlanValuationAssumptionsTableTextBlock" xlink:label="us-gaap_ScheduleOfShareBasedPaymentAwardEmployeeStockPurchasePlanValuationAssumptionsTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfShareBasedPaymentAwardEmployeeStockPurchasePlanValuationAssumptionsTableTextBlock" xlink:to="us-gaap_ScheduleOfShareBasedPaymentAwardEmployeeStockPurchasePlanValuationAssumptionsTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ScheduleOfShareBasedPaymentAwardEmployeeStockPurchasePlanValuationAssumptionsTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Share-based Payment Award, Employee Stock Purchase Plan, Valuation Assumptions [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ScheduleOfShareBasedPaymentAwardEmployeeStockPurchasePlanValuationAssumptionsTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Summary of valuation assumptions for employee stock purchase plan</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfIncomeBeforeIncomeTaxDomesticAndForeignTableTextBlock" xlink:label="us-gaap_ScheduleOfIncomeBeforeIncomeTaxDomesticAndForeignTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfIncomeBeforeIncomeTaxDomesticAndForeignTableTextBlock" xlink:to="us-gaap_ScheduleOfIncomeBeforeIncomeTaxDomesticAndForeignTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ScheduleOfIncomeBeforeIncomeTaxDomesticAndForeignTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Income before Income Tax, Domestic and Foreign [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ScheduleOfIncomeBeforeIncomeTaxDomesticAndForeignTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of income (loss) from continuing operations before income taxes</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock" xlink:label="us-gaap_ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock" xlink:to="us-gaap_ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Components of Income Tax Expense (Benefit) [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of components of the expense (benefit) for income taxes</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfEffectiveIncomeTaxRateReconciliationTableTextBlock" xlink:label="us-gaap_ScheduleOfEffectiveIncomeTaxRateReconciliationTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfEffectiveIncomeTaxRateReconciliationTableTextBlock" xlink:to="us-gaap_ScheduleOfEffectiveIncomeTaxRateReconciliationTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ScheduleOfEffectiveIncomeTaxRateReconciliationTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Effective Income Tax Rate Reconciliation [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ScheduleOfEffectiveIncomeTaxRateReconciliationTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of reconciliation of the income tax expense computed using the Federal statutory rate to actual income tax provision</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock" xlink:label="us-gaap_ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock" xlink:to="us-gaap_ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Deferred Tax Assets and Liabilities [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of deferred tax assets and liabilities</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SummaryOfIncomeTaxContingenciesTextBlock" xlink:label="us-gaap_SummaryOfIncomeTaxContingenciesTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SummaryOfIncomeTaxContingenciesTextBlock" xlink:to="us-gaap_SummaryOfIncomeTaxContingenciesTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_SummaryOfIncomeTaxContingenciesTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Summary of Income Tax Contingencies [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_SummaryOfIncomeTaxContingenciesTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of reconciliation of beginning and ending amount of uncertain tax positions</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfEntityWideInformationRevenueFromExternalCustomersByProductsAndServicesTextBlock" xlink:label="us-gaap_ScheduleOfEntityWideInformationRevenueFromExternalCustomersByProductsAndServicesTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfEntityWideInformationRevenueFromExternalCustomersByProductsAndServicesTextBlock" xlink:to="us-gaap_ScheduleOfEntityWideInformationRevenueFromExternalCustomersByProductsAndServicesTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ScheduleOfEntityWideInformationRevenueFromExternalCustomersByProductsAndServicesTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Revenue from External Customers by Products and Services [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_ScheduleOfEntityWideInformationRevenueFromExternalCustomersByProductsAndServicesTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of sales by end-market</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsByGeographicalAreasTableTextBlock" xlink:label="us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsByGeographicalAreasTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsByGeographicalAreasTableTextBlock" xlink:to="us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsByGeographicalAreasTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsByGeographicalAreasTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Revenue from External Customers and Long-Lived Assets, by Geographical Areas [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsByGeographicalAreasTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of sales by geographic region</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_NumberOfOperatingSegments" xlink:label="us-gaap_NumberOfOperatingSegments" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_NumberOfOperatingSegments" xlink:to="us-gaap_NumberOfOperatingSegments_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_NumberOfOperatingSegments_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Number of Operating Segments</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_NumberOfOperatingSegments_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Number of operating segments</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FiscalPeriodDuration" xlink:label="us-gaap_FiscalPeriodDuration" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FiscalPeriodDuration" xlink:to="us-gaap_FiscalPeriodDuration_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FiscalPeriodDuration_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Fiscal Period Duration</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_FiscalPeriodDuration_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Fiscal period duration (in days)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_RevenuePracticalExpedientIncrementalCostOfObtainingContract" xlink:label="us-gaap_RevenuePracticalExpedientIncrementalCostOfObtainingContract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RevenuePracticalExpedientIncrementalCostOfObtainingContract" xlink:to="us-gaap_RevenuePracticalExpedientIncrementalCostOfObtainingContract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_RevenuePracticalExpedientIncrementalCostOfObtainingContract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Revenue, Practical Expedient, Incremental Cost of Obtaining Contract [true false]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_RevenuePracticalExpedientIncrementalCostOfObtainingContract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Revenue, practical expedient, incremental cost of obtaining contract</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_ProductWarrantyPeriod" xlink:label="veco_ProductWarrantyPeriod" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_ProductWarrantyPeriod" xlink:to="veco_ProductWarrantyPeriod_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_ProductWarrantyPeriod_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents the warranty period from the date of final acceptance on the products purchased by customers.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_ProductWarrantyPeriod_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Product Warranty Period</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_ProductWarrantyPeriod_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Warranty period</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AdvertisingExpense" xlink:label="us-gaap_AdvertisingExpense" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AdvertisingExpense" xlink:to="us-gaap_AdvertisingExpense_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AdvertisingExpense_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Advertising Expense</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AdvertisingExpense_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Advertising expense</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardServiceConditionsAndGradedVestingNumberOfAwards" xlink:label="veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardServiceConditionsAndGradedVestingNumberOfAwards" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardServiceConditionsAndGradedVestingNumberOfAwards" xlink:to="veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardServiceConditionsAndGradedVestingNumberOfAwards_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardServiceConditionsAndGradedVestingNumberOfAwards_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Number of awards with which entity has elected to treat awards with only service conditions and with graded vesting.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardServiceConditionsAndGradedVestingNumberOfAwards_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Service Conditions and Graded Vesting, Number of Awards</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardServiceConditionsAndGradedVestingNumberOfAwards_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Number of awards with which entity has elected to treat awards with only service conditions and with graded vesting</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent" xlink:label="us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent" xlink:to="us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Allowance for Doubtful Accounts Receivable, Current</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Allowance for doubtful accounts receivable</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_IrrevocableLettersOfCreditMaturityPeriodMinimum" xlink:label="veco_IrrevocableLettersOfCreditMaturityPeriodMinimum" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_IrrevocableLettersOfCreditMaturityPeriodMinimum" xlink:to="veco_IrrevocableLettersOfCreditMaturityPeriodMinimum_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_IrrevocableLettersOfCreditMaturityPeriodMinimum_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents the minimum period over which irrevocable letters of credit mature.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_IrrevocableLettersOfCreditMaturityPeriodMinimum_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Irrevocable Letters of Credit Maturity Period Minimum</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_IrrevocableLettersOfCreditMaturityPeriodMinimum_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Maturity period of irrevocable letters of credit, minimum</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_IrrevocableLettersOfCreditMaturityPeriodMaximum" xlink:label="veco_IrrevocableLettersOfCreditMaturityPeriodMaximum" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_IrrevocableLettersOfCreditMaturityPeriodMaximum" xlink:to="veco_IrrevocableLettersOfCreditMaturityPeriodMaximum_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_IrrevocableLettersOfCreditMaturityPeriodMaximum_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents the maximum period over which irrevocable letters of credit mature.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_IrrevocableLettersOfCreditMaturityPeriodMaximum_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Irrevocable Letters of Credit Maturity Period Maximum</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_IrrevocableLettersOfCreditMaturityPeriodMaximum_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Maturity period of irrevocable letters of credit, maximum</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CashEquivalentsAtCarryingValue" xlink:label="us-gaap_CashEquivalentsAtCarryingValue" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CashEquivalentsAtCarryingValue" xlink:to="us-gaap_CashEquivalentsAtCarryingValue_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CashEquivalentsAtCarryingValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cash Equivalents, at Carrying Value</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_CashEquivalentsAtCarryingValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cash equivalents</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_CashAndCashEquivalentsMaintainedOutsideBySubsidiariesAsPercent" xlink:label="veco_CashAndCashEquivalentsMaintainedOutsideBySubsidiariesAsPercent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_CashAndCashEquivalentsMaintainedOutsideBySubsidiariesAsPercent" xlink:to="veco_CashAndCashEquivalentsMaintainedOutsideBySubsidiariesAsPercent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_CashAndCashEquivalentsMaintainedOutsideBySubsidiariesAsPercent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents the percentage of cash and cash equivalents maintained outside of the United States by subsidiaries.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_CashAndCashEquivalentsMaintainedOutsideBySubsidiariesAsPercent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cash and cash equivalents maintained outside by subsidiaries (as a percent)</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_CashAndCashEquivalentsMaintainedOutsideBySubsidiariesAsPercent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cash and cash equivalents maintained outside the United States (as a percent)</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_NumberOfTradingDaysConsideredToCalculateMarketCapitalization" xlink:label="veco_NumberOfTradingDaysConsideredToCalculateMarketCapitalization" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_NumberOfTradingDaysConsideredToCalculateMarketCapitalization" xlink:to="veco_NumberOfTradingDaysConsideredToCalculateMarketCapitalization_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_NumberOfTradingDaysConsideredToCalculateMarketCapitalization_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Number of trading days for calculating the average share price of the Company's common stock prior to the measurement date used in adjusted market capitalization calculation.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_NumberOfTradingDaysConsideredToCalculateMarketCapitalization_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Number of Trading Days Considered To Calculate Market Capitalization</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_NumberOfTradingDaysConsideredToCalculateMarketCapitalization_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Number of trading days used in adjusted market capitalization calculation</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_NewAccountingPronouncementsOrChangeInAccountingPrincipleTable" xlink:label="us-gaap_NewAccountingPronouncementsOrChangeInAccountingPrincipleTable" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_NewAccountingPronouncementsOrChangeInAccountingPrincipleTable" xlink:to="us-gaap_NewAccountingPronouncementsOrChangeInAccountingPrincipleTable_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_NewAccountingPronouncementsOrChangeInAccountingPrincipleTable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">New Accounting Pronouncements or Change in Accounting Principle [Table]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_StatementScenarioAxis" xlink:label="srt_StatementScenarioAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_StatementScenarioAxis" xlink:to="srt_StatementScenarioAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="srt_StatementScenarioAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Scenario [Axis]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_ScenarioUnspecifiedDomain" xlink:label="srt_ScenarioUnspecifiedDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_ScenarioUnspecifiedDomain" xlink:to="srt_ScenarioUnspecifiedDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="srt_ScenarioUnspecifiedDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Scenario, Unspecified [Domain]</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_CalculatedUnderGuidanceInEffectBeforeAdoptionOfAccountingStandardsUpdate202006Member" xlink:label="veco_CalculatedUnderGuidanceInEffectBeforeAdoptionOfAccountingStandardsUpdate202006Member" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_CalculatedUnderGuidanceInEffectBeforeAdoptionOfAccountingStandardsUpdate202006Member" xlink:to="veco_CalculatedUnderGuidanceInEffectBeforeAdoptionOfAccountingStandardsUpdate202006Member_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_CalculatedUnderGuidanceInEffectBeforeAdoptionOfAccountingStandardsUpdate202006Member_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Calculated under guidance in effect prior to Adoption of Accounting Standards Update 2020-06.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_CalculatedUnderGuidanceInEffectBeforeAdoptionOfAccountingStandardsUpdate202006Member_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Under legacy accounting</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_DifferenceBetweenGuidanceInEffectBeforeAndAfterAccountingStandardsUpdate202006Member" xlink:label="veco_DifferenceBetweenGuidanceInEffectBeforeAndAfterAccountingStandardsUpdate202006Member" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_DifferenceBetweenGuidanceInEffectBeforeAndAfterAccountingStandardsUpdate202006Member" xlink:to="veco_DifferenceBetweenGuidanceInEffectBeforeAndAfterAccountingStandardsUpdate202006Member_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_DifferenceBetweenGuidanceInEffectBeforeAndAfterAccountingStandardsUpdate202006Member_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Effect in current period from application of guidance for Accounting Standards Update 2020-06 compared with guidance prior to adoption of Accounting Standards Update 2020-06.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_DifferenceBetweenGuidanceInEffectBeforeAndAfterAccountingStandardsUpdate202006Member_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Difference between adoption of ASU 2020-06 and legacy accounting</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AdjustmentsForNewAccountingPronouncementsAxis" xlink:label="us-gaap_AdjustmentsForNewAccountingPronouncementsAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AdjustmentsForNewAccountingPronouncementsAxis" xlink:to="us-gaap_AdjustmentsForNewAccountingPronouncementsAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AdjustmentsForNewAccountingPronouncementsAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Adjustments for New Accounting Pronouncements [Axis]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_TypeOfAdoptionMember" xlink:label="us-gaap_TypeOfAdoptionMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_TypeOfAdoptionMember" xlink:to="us-gaap_TypeOfAdoptionMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_TypeOfAdoptionMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Type of Adoption [Domain]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AccountingStandardsUpdate201912Member" xlink:label="us-gaap_AccountingStandardsUpdate201912Member" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AccountingStandardsUpdate201912Member" xlink:to="us-gaap_AccountingStandardsUpdate201912Member_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AccountingStandardsUpdate201912Member_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">ASU 2019-12, Simplifying the Accounting for Income Taxes</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AccountingStandardsUpdate202006Member" xlink:label="us-gaap_AccountingStandardsUpdate202006Member" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AccountingStandardsUpdate202006Member" xlink:to="us-gaap_AccountingStandardsUpdate202006Member_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AccountingStandardsUpdate202006Member_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">ASU 2020-06: Debt</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_CumulativeEffectPeriodOfAdoptionAdjustedBalanceMember" xlink:label="srt_CumulativeEffectPeriodOfAdoptionAdjustedBalanceMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_CumulativeEffectPeriodOfAdoptionAdjustedBalanceMember" xlink:to="srt_CumulativeEffectPeriodOfAdoptionAdjustedBalanceMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="srt_CumulativeEffectPeriodOfAdoptionAdjustedBalanceMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cumulative Effect, Period of Adoption, Adjusted Balance</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_NewAccountingPronouncementsOrChangeInAccountingPrincipleLineItems" xlink:label="us-gaap_NewAccountingPronouncementsOrChangeInAccountingPrincipleLineItems" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_NewAccountingPronouncementsOrChangeInAccountingPrincipleLineItems" xlink:to="us-gaap_NewAccountingPronouncementsOrChangeInAccountingPrincipleLineItems_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_NewAccountingPronouncementsOrChangeInAccountingPrincipleLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">New Accounting Pronouncements or Change in Accounting Principle [Line Items]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_NewAccountingPronouncementsOrChangeInAccountingPrincipleLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accounting Changes</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ChangeInAccountingPrincipleAccountingStandardsUpdateAdopted" xlink:label="us-gaap_ChangeInAccountingPrincipleAccountingStandardsUpdateAdopted" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ChangeInAccountingPrincipleAccountingStandardsUpdateAdopted" xlink:to="us-gaap_ChangeInAccountingPrincipleAccountingStandardsUpdateAdopted_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ChangeInAccountingPrincipleAccountingStandardsUpdateAdopted_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Change in Accounting Principle, Accounting Standards Update, Adopted [true false]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ChangeInAccountingPrincipleAccountingStandardsUpdateAdopted_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Change in Accounting Principle, Accounting Standards Update, Adopted</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ChangeInAccountingPrincipleAccountingStandardsUpdateTransitionOptionElectedExtensibleList" xlink:label="us-gaap_ChangeInAccountingPrincipleAccountingStandardsUpdateTransitionOptionElectedExtensibleList" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ChangeInAccountingPrincipleAccountingStandardsUpdateTransitionOptionElectedExtensibleList" xlink:to="us-gaap_ChangeInAccountingPrincipleAccountingStandardsUpdateTransitionOptionElectedExtensibleList_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ChangeInAccountingPrincipleAccountingStandardsUpdateTransitionOptionElectedExtensibleList_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Change in Accounting Principle, Accounting Standards Update, Transition Option Elected [Extensible Enumeration]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ChangeInAccountingPrincipleAccountingStandardsUpdateTransitionOptionElectedExtensibleList_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Change in Accounting Principle, Accounting Standards Update, Transition Option Elected</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_BalanceSheetLineItemAbstract" xlink:label="veco_BalanceSheetLineItemAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_BalanceSheetLineItemAbstract" xlink:to="veco_BalanceSheetLineItemAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_BalanceSheetLineItemAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">No definition available.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_BalanceSheetLineItemAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Balance Sheet Line Item [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_BalanceSheetLineItemAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Balance Sheet line item:</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_EarningsPerShareDisclosureAbstract" xlink:label="veco_EarningsPerShareDisclosureAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_EarningsPerShareDisclosureAbstract" xlink:to="veco_EarningsPerShareDisclosureAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_EarningsPerShareDisclosureAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">No definition available.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_EarningsPerShareDisclosureAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Earnings Per Share, Disclosure [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_EarningsPerShareDisclosureAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net income (loss) per common share:</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="veco_EarningsPerShareDisclosureAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Income per common share:</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_NetIncomeLossAvailableToCommonStockholdersAbstract" xlink:label="veco_NetIncomeLossAvailableToCommonStockholdersAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_NetIncomeLossAvailableToCommonStockholdersAbstract" xlink:to="veco_NetIncomeLossAvailableToCommonStockholdersAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_NetIncomeLossAvailableToCommonStockholdersAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">No definition available.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_NetIncomeLossAvailableToCommonStockholdersAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net Income (Loss) Available to Common Stockholders [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_NetIncomeLossAvailableToCommonStockholdersAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Numerator:</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic" xlink:label="us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic" xlink:to="us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net Income (Loss) Available to Common Stockholders, Basic</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net income</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_InterestOnConvertibleDebtNetOfTax" xlink:label="us-gaap_InterestOnConvertibleDebtNetOfTax" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InterestOnConvertibleDebtNetOfTax" xlink:to="us-gaap_InterestOnConvertibleDebtNetOfTax_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_InterestOnConvertibleDebtNetOfTax_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Interest on Convertible Debt, Net of Tax</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_InterestOnConvertibleDebtNetOfTax_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Interest expense associated with convertible notes</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_NetIncomeLossAvailableToCommonStockholdersDiluted" xlink:label="us-gaap_NetIncomeLossAvailableToCommonStockholdersDiluted" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_NetIncomeLossAvailableToCommonStockholdersDiluted" xlink:to="us-gaap_NetIncomeLossAvailableToCommonStockholdersDiluted_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_NetIncomeLossAvailableToCommonStockholdersDiluted_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net Income (Loss) Available to Common Stockholders, Diluted</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_NetIncomeLossAvailableToCommonStockholdersDiluted_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net income available to common shareholders</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_WeightedAverageNumberOfSharesOutstandingDilutedDisclosureItemsAbstract" xlink:label="us-gaap_WeightedAverageNumberOfSharesOutstandingDilutedDisclosureItemsAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_WeightedAverageNumberOfSharesOutstandingDilutedDisclosureItemsAbstract" xlink:to="us-gaap_WeightedAverageNumberOfSharesOutstandingDilutedDisclosureItemsAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_WeightedAverageNumberOfSharesOutstandingDilutedDisclosureItemsAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Weighted Average Number of Shares Outstanding Reconciliation [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_WeightedAverageNumberOfSharesOutstandingDilutedDisclosureItemsAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Denominator:</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_WeightedAverageNumberDilutedSharesOutstandingAdjustment" xlink:label="us-gaap_WeightedAverageNumberDilutedSharesOutstandingAdjustment" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_WeightedAverageNumberDilutedSharesOutstandingAdjustment" xlink:to="us-gaap_WeightedAverageNumberDilutedSharesOutstandingAdjustment_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_WeightedAverageNumberDilutedSharesOutstandingAdjustment_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Weighted Average Number Diluted Shares Outstanding Adjustment</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_WeightedAverageNumberDilutedSharesOutstandingAdjustment_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Effect of potentially dilutive share-based awards</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncrementalCommonSharesAttributableToConversionOfDebtSecurities" xlink:label="us-gaap_IncrementalCommonSharesAttributableToConversionOfDebtSecurities" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncrementalCommonSharesAttributableToConversionOfDebtSecurities" xlink:to="us-gaap_IncrementalCommonSharesAttributableToConversionOfDebtSecurities_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncrementalCommonSharesAttributableToConversionOfDebtSecurities_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Incremental Common Shares Attributable to Dilutive Effect of Conversion of Debt Securities</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_IncrementalCommonSharesAttributableToConversionOfDebtSecurities_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Dilutive effect of convertible notes</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfAntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareTable" xlink:label="us-gaap_ScheduleOfAntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareTable" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfAntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareTable" xlink:to="us-gaap_ScheduleOfAntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareTable_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ScheduleOfAntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareTable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Antidilutive Securities Excluded from Computation of Earnings Per Share [Table]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis" xlink:label="us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis" xlink:to="us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Antidilutive Securities [Axis]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AntidilutiveSecuritiesNameDomain" xlink:label="us-gaap_AntidilutiveSecuritiesNameDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AntidilutiveSecuritiesNameDomain" xlink:to="us-gaap_AntidilutiveSecuritiesNameDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AntidilutiveSecuritiesNameDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Antidilutive Securities, Name [Domain]</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_CommonStockEquivalentsMember" xlink:label="veco_CommonStockEquivalentsMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_CommonStockEquivalentsMember" xlink:to="veco_CommonStockEquivalentsMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_CommonStockEquivalentsMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">A security that can be converted into common stock. May include stock options, warrants, convertible bonds, preferred bonds, two-class common stock and contingent shares.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_CommonStockEquivalentsMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Common share equivalents</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_PotentiallyDilutiveSharesMember" xlink:label="veco_PotentiallyDilutiveSharesMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_PotentiallyDilutiveSharesMember" xlink:to="veco_PotentiallyDilutiveSharesMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_PotentiallyDilutiveSharesMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents information pertaining to potentially dilutive shares not otherwise specified.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_PotentiallyDilutiveSharesMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Potentially dilutive shares</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ConvertibleDebtMember" xlink:label="us-gaap_ConvertibleDebtMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ConvertibleDebtMember" xlink:to="us-gaap_ConvertibleDebtMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ConvertibleDebtMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Convertible Notes</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareLineItems" xlink:label="us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareLineItems" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareLineItems" xlink:to="us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareLineItems_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Antidilutive Securities Excluded from Computation of Earnings Per Share [Line Items]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Antidilutive securities</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_EarningsPerShareBasicOtherDisclosuresAbstract" xlink:label="us-gaap_EarningsPerShareBasicOtherDisclosuresAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EarningsPerShareBasicOtherDisclosuresAbstract" xlink:to="us-gaap_EarningsPerShareBasicOtherDisclosuresAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_EarningsPerShareBasicOtherDisclosuresAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Earnings Per Share, Basic, Other Disclosures [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_EarningsPerShareBasicOtherDisclosuresAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Basic income (loss) per share</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_SecuritiesExcludedFromComputationOfBasicEarningsPerShareAmount" xlink:label="veco_SecuritiesExcludedFromComputationOfBasicEarningsPerShareAmount" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_SecuritiesExcludedFromComputationOfBasicEarningsPerShareAmount" xlink:to="veco_SecuritiesExcludedFromComputationOfBasicEarningsPerShareAmount_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_SecuritiesExcludedFromComputationOfBasicEarningsPerShareAmount_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Securities excluded from the computation of basic net loss per share since securities' holders are not obligated to fund those losses.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_SecuritiesExcludedFromComputationOfBasicEarningsPerShareAmount_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Securities Excluded from Computation of Basic Earnings Per Share, Amount</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_SecuritiesExcludedFromComputationOfBasicEarningsPerShareAmount_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Unvested participating shares excluded from basic weighted average shares outstanding since the securityholders are not obligated to fund losses</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_EarningsPerShareDilutedOtherDisclosuresAbstract" xlink:label="us-gaap_EarningsPerShareDilutedOtherDisclosuresAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EarningsPerShareDilutedOtherDisclosuresAbstract" xlink:to="us-gaap_EarningsPerShareDilutedOtherDisclosuresAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_EarningsPerShareDilutedOtherDisclosuresAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Earnings Per Share, Diluted, Other Disclosures [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_EarningsPerShareDilutedOtherDisclosuresAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Diluted income (loss) per share</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount" xlink:label="us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount" xlink:to="us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Antidilutive Securities Excluded from Computation of Earnings Per Share, Amount</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Securities excluded from the diluted calculation as their effect would be antidilutive</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable" xlink:label="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable" xlink:to="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Fair Value Measurements, Recurring and Nonrecurring [Table]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FairValueByMeasurementFrequencyAxis" xlink:label="us-gaap_FairValueByMeasurementFrequencyAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FairValueByMeasurementFrequencyAxis" xlink:to="us-gaap_FairValueByMeasurementFrequencyAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FairValueByMeasurementFrequencyAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Measurement Frequency [Axis]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FairValueMeasurementFrequencyDomain" xlink:label="us-gaap_FairValueMeasurementFrequencyDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FairValueMeasurementFrequencyDomain" xlink:to="us-gaap_FairValueMeasurementFrequencyDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FairValueMeasurementFrequencyDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Fair Value, Measurement Frequency [Domain]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FairValueMeasurementsRecurringMember" xlink:label="us-gaap_FairValueMeasurementsRecurringMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FairValueMeasurementsRecurringMember" xlink:to="us-gaap_FairValueMeasurementsRecurringMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FairValueMeasurementsRecurringMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Measured on a recurring basis</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FairValueByFairValueHierarchyLevelAxis" xlink:label="us-gaap_FairValueByFairValueHierarchyLevelAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FairValueByFairValueHierarchyLevelAxis" xlink:to="us-gaap_FairValueByFairValueHierarchyLevelAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FairValueByFairValueHierarchyLevelAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Fair Value, Hierarchy [Axis]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FairValueMeasurementsFairValueHierarchyDomain" xlink:label="us-gaap_FairValueMeasurementsFairValueHierarchyDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FairValueMeasurementsFairValueHierarchyDomain" xlink:to="us-gaap_FairValueMeasurementsFairValueHierarchyDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FairValueMeasurementsFairValueHierarchyDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Fair Value Hierarchy [Domain]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FairValueInputsLevel1Member" xlink:label="us-gaap_FairValueInputsLevel1Member" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FairValueInputsLevel1Member" xlink:to="us-gaap_FairValueInputsLevel1Member_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FairValueInputsLevel1Member_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Level 1</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FairValueInputsLevel2Member" xlink:label="us-gaap_FairValueInputsLevel2Member" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FairValueInputsLevel2Member" xlink:to="us-gaap_FairValueInputsLevel2Member_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FairValueInputsLevel2Member_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Level 2</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CashAndCashEquivalentsAxis" xlink:label="us-gaap_CashAndCashEquivalentsAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CashAndCashEquivalentsAxis" xlink:to="us-gaap_CashAndCashEquivalentsAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CashAndCashEquivalentsAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cash and Cash Equivalents [Axis]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_RestrictedCashAndCashEquivalentsCashAndCashEquivalentsMember" xlink:label="us-gaap_RestrictedCashAndCashEquivalentsCashAndCashEquivalentsMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RestrictedCashAndCashEquivalentsCashAndCashEquivalentsMember" xlink:to="us-gaap_RestrictedCashAndCashEquivalentsCashAndCashEquivalentsMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_RestrictedCashAndCashEquivalentsCashAndCashEquivalentsMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cash and Cash Equivalents [Domain]</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_CertificateOfDepositsAndTimeDepositsMember" xlink:label="veco_CertificateOfDepositsAndTimeDepositsMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_CertificateOfDepositsAndTimeDepositsMember" xlink:to="veco_CertificateOfDepositsAndTimeDepositsMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_CertificateOfDepositsAndTimeDepositsMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents the information pertaining to certificate of deposits and time deposits.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_CertificateOfDepositsAndTimeDepositsMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Certificate of deposits and time deposits</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_MoneyMarketFundsExcludingGovernmentFundsMember" xlink:label="veco_MoneyMarketFundsExcludingGovernmentFundsMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_MoneyMarketFundsExcludingGovernmentFundsMember" xlink:to="veco_MoneyMarketFundsExcludingGovernmentFundsMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_MoneyMarketFundsExcludingGovernmentFundsMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Fund that invests in short-term money-market instruments. Excludes government funds.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_MoneyMarketFundsExcludingGovernmentFundsMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Money market cash</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FinancialInstrumentAxis" xlink:label="us-gaap_FinancialInstrumentAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FinancialInstrumentAxis" xlink:to="us-gaap_FinancialInstrumentAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FinancialInstrumentAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Financial Instrument [Axis]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_TransfersAndServicingOfFinancialInstrumentsTypesOfFinancialInstrumentsDomain" xlink:label="us-gaap_TransfersAndServicingOfFinancialInstrumentsTypesOfFinancialInstrumentsDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_TransfersAndServicingOfFinancialInstrumentsTypesOfFinancialInstrumentsDomain" xlink:to="us-gaap_TransfersAndServicingOfFinancialInstrumentsTypesOfFinancialInstrumentsDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_TransfersAndServicingOfFinancialInstrumentsTypesOfFinancialInstrumentsDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Financial Instruments [Domain]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_USTreasurySecuritiesMember" xlink:label="us-gaap_USTreasurySecuritiesMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_USTreasurySecuritiesMember" xlink:to="us-gaap_USTreasurySecuritiesMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_USTreasurySecuritiesMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">U.S. treasuries</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_USGovernmentAgenciesDebtSecuritiesMember" xlink:label="us-gaap_USGovernmentAgenciesDebtSecuritiesMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_USGovernmentAgenciesDebtSecuritiesMember" xlink:to="us-gaap_USGovernmentAgenciesDebtSecuritiesMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_USGovernmentAgenciesDebtSecuritiesMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Government agency securities, Short-term investments</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CorporateDebtSecuritiesMember" xlink:label="us-gaap_CorporateDebtSecuritiesMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CorporateDebtSecuritiesMember" xlink:to="us-gaap_CorporateDebtSecuritiesMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CorporateDebtSecuritiesMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Corporate debt</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CommercialPaperMember" xlink:label="us-gaap_CommercialPaperMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CommercialPaperMember" xlink:to="us-gaap_CommercialPaperMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CommercialPaperMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Commercial paper</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:label="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:to="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Major categories of assets and liabilities measured on a recurring basis, at fair value</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CashAndCashEquivalentsAbstract" xlink:label="us-gaap_CashAndCashEquivalentsAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CashAndCashEquivalentsAbstract" xlink:to="us-gaap_CashAndCashEquivalentsAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CashAndCashEquivalentsAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cash and Cash Equivalents [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_CashAndCashEquivalentsAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cash equivalents</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_CashEquivalentsFairValueDisclosure" xlink:label="veco_CashEquivalentsFairValueDisclosure" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_CashEquivalentsFairValueDisclosure" xlink:to="veco_CashEquivalentsFairValueDisclosure_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_CashEquivalentsFairValueDisclosure_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Fair value portion of short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_CashEquivalentsFairValueDisclosure_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cash Equivalents, Fair Value Disclosure</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_CashEquivalentsFairValueDisclosure_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total Cash equivalents</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShortTermInvestmentsAbstract" xlink:label="us-gaap_ShortTermInvestmentsAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShortTermInvestmentsAbstract" xlink:to="us-gaap_ShortTermInvestmentsAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShortTermInvestmentsAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Short-term Investments [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_ShortTermInvestmentsAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Short-term investments</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_InvestmentsFairValueDisclosure" xlink:label="us-gaap_InvestmentsFairValueDisclosure" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InvestmentsFairValueDisclosure" xlink:to="us-gaap_InvestmentsFairValueDisclosure_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_InvestmentsFairValueDisclosure_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Investments, Fair Value Disclosure</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_InvestmentsFairValueDisclosure_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total Short-term investments</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtSecuritiesAvailableForSaleTable" xlink:label="us-gaap_DebtSecuritiesAvailableForSaleTable" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DebtSecuritiesAvailableForSaleTable" xlink:to="us-gaap_DebtSecuritiesAvailableForSaleTable_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DebtSecuritiesAvailableForSaleTable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt Securities, Available-for-sale [Table]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfAvailableForSaleSecuritiesLineItems" xlink:label="us-gaap_ScheduleOfAvailableForSaleSecuritiesLineItems" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfAvailableForSaleSecuritiesLineItems" xlink:to="us-gaap_ScheduleOfAvailableForSaleSecuritiesLineItems_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ScheduleOfAvailableForSaleSecuritiesLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Available-for-sale Securities [Line Items]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ScheduleOfAvailableForSaleSecuritiesLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total available-for-sale securities</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AvailableForSaleDebtSecuritiesAmortizedCostBasis" xlink:label="us-gaap_AvailableForSaleDebtSecuritiesAmortizedCostBasis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AvailableForSaleDebtSecuritiesAmortizedCostBasis" xlink:to="us-gaap_AvailableForSaleDebtSecuritiesAmortizedCostBasis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AvailableForSaleDebtSecuritiesAmortizedCostBasis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Available-for-sale Debt Securities, Amortized Cost Basis</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AvailableForSaleDebtSecuritiesAmortizedCostBasis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amortized Cost</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_AvailableForSaleDebtSecuritiesAmortizedCostBasis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amortized Cost</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AvailableForSaleDebtSecuritiesAccumulatedGrossUnrealizedLossBeforeTax" xlink:label="us-gaap_AvailableForSaleDebtSecuritiesAccumulatedGrossUnrealizedLossBeforeTax" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AvailableForSaleDebtSecuritiesAccumulatedGrossUnrealizedLossBeforeTax" xlink:to="us-gaap_AvailableForSaleDebtSecuritiesAccumulatedGrossUnrealizedLossBeforeTax_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AvailableForSaleDebtSecuritiesAccumulatedGrossUnrealizedLossBeforeTax_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Available-for-sale Debt Securities, Accumulated Gross Unrealized Loss, before Tax</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_AvailableForSaleDebtSecuritiesAccumulatedGrossUnrealizedLossBeforeTax_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Gross Unrealized Losses</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AvailableForSaleSecuritiesDebtSecurities" xlink:label="us-gaap_AvailableForSaleSecuritiesDebtSecurities" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AvailableForSaleSecuritiesDebtSecurities" xlink:to="us-gaap_AvailableForSaleSecuritiesDebtSecurities_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AvailableForSaleSecuritiesDebtSecurities_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Available-for-sale Securities, Debt Securities</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AvailableForSaleSecuritiesDebtSecurities_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Estimated Fair Value</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_AvailableForSaleSecuritiesDebtSecurities_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Available-for-sale Securities, Debt Securities, Total</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtSecuritiesAvailableforSaleUnrealizedLossPositionAbstract" xlink:label="us-gaap_DebtSecuritiesAvailableforSaleUnrealizedLossPositionAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DebtSecuritiesAvailableforSaleUnrealizedLossPositionAbstract" xlink:to="us-gaap_DebtSecuritiesAvailableforSaleUnrealizedLossPositionAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DebtSecuritiesAvailableforSaleUnrealizedLossPositionAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt Securities, Available-for-Sale, Unrealized Loss Position [Abstract]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12Months" xlink:label="us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12Months" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12Months" xlink:to="us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12Months_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12Months_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt Securities, Available-for-Sale, Continuous Unrealized Loss Position, Less than 12 Months</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12Months_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Investments, Continuous loss position for less than 12 months, Estimated Fair Value</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12MonthsAccumulatedLoss" xlink:label="us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12MonthsAccumulatedLoss" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12MonthsAccumulatedLoss" xlink:to="us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12MonthsAccumulatedLoss_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12MonthsAccumulatedLoss_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt Securities, Available-for-Sale, Continuous Unrealized Loss Position, Less than 12 Months, Accumulated Loss</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12MonthsAccumulatedLoss_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Investments, Continuous loss position for less than 12 months, Gross Unrealized Losses</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLonger" xlink:label="us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLonger" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLonger" xlink:to="us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLonger_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLonger_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt Securities Available For Sale Continuous Unrealized Loss Position 12 Months Or Longer</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLonger_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Investments, Continuous loss position for 12 months or more, Estimated Fair Value</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLongerAccumulatedLoss" xlink:label="us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLongerAccumulatedLoss" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLongerAccumulatedLoss" xlink:to="us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLongerAccumulatedLoss_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLongerAccumulatedLoss_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt Securities, Available-for-Sale, Continuous Unrealized Loss Position, 12 Months or Longer, Accumulated Loss</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLongerAccumulatedLoss_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Investments, Continuous loss position for 12 months or more, Gross Unrealized Losses</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AvailableForSaleSecuritiesDebtMaturitiesSingleMaturityDateAmortizedCostBasisRollingMaturityAbstract" xlink:label="us-gaap_AvailableForSaleSecuritiesDebtMaturitiesSingleMaturityDateAmortizedCostBasisRollingMaturityAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AvailableForSaleSecuritiesDebtMaturitiesSingleMaturityDateAmortizedCostBasisRollingMaturityAbstract" xlink:to="us-gaap_AvailableForSaleSecuritiesDebtMaturitiesSingleMaturityDateAmortizedCostBasisRollingMaturityAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AvailableForSaleSecuritiesDebtMaturitiesSingleMaturityDateAmortizedCostBasisRollingMaturityAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt Securities, Available-for-sale, Maturity, Allocated and Single Maturity Date, Amortized Cost, Rolling Maturity [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AvailableForSaleSecuritiesDebtMaturitiesSingleMaturityDateAmortizedCostBasisRollingMaturityAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Contractual maturities - Amortized Cost</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AvailableForSaleSecuritiesDebtMaturitiesNextRollingTwelveMonthsAmortizedCostBasis" xlink:label="us-gaap_AvailableForSaleSecuritiesDebtMaturitiesNextRollingTwelveMonthsAmortizedCostBasis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AvailableForSaleSecuritiesDebtMaturitiesNextRollingTwelveMonthsAmortizedCostBasis" xlink:to="us-gaap_AvailableForSaleSecuritiesDebtMaturitiesNextRollingTwelveMonthsAmortizedCostBasis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AvailableForSaleSecuritiesDebtMaturitiesNextRollingTwelveMonthsAmortizedCostBasis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt Securities, Available-for-sale, Maturity, Allocated and Single Maturity Date, Rolling within One Year, Amortized Cost</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AvailableForSaleSecuritiesDebtMaturitiesNextRollingTwelveMonthsAmortizedCostBasis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amortized Cost, Due in one year or less</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterOneThroughTwoYearsAmortizedCost" xlink:label="veco_DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterOneThroughTwoYearsAmortizedCost" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterOneThroughTwoYearsAmortizedCost" xlink:to="veco_DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterOneThroughTwoYearsAmortizedCost_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterOneThroughTwoYearsAmortizedCost_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amortized cost of investment in debt security measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale), with single maturity date and allocated without single maturity date, maturing in next rolling fiscal year through second year following latest fiscal year. For interim and annual periods when interim period is reported on rolling approach, from latest statement of financial position date.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterOneThroughTwoYearsAmortizedCost_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt Securities, Available-for-sale, Maturity, Allocated and Single Maturity Date, Rolling after One Through Two Years, Amortized Cost</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterOneThroughTwoYearsAmortizedCost_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amortized Cost, Due after one year through two years</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AvailableForSaleSecuritiesDebtMaturitiesSingleMaturityDateRollingMaturityAbstract" xlink:label="us-gaap_AvailableForSaleSecuritiesDebtMaturitiesSingleMaturityDateRollingMaturityAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AvailableForSaleSecuritiesDebtMaturitiesSingleMaturityDateRollingMaturityAbstract" xlink:to="us-gaap_AvailableForSaleSecuritiesDebtMaturitiesSingleMaturityDateRollingMaturityAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AvailableForSaleSecuritiesDebtMaturitiesSingleMaturityDateRollingMaturityAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt Securities, Available-for-sale, Maturity, Allocated and Single Maturity Date, Rolling Maturity, Fair Value [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AvailableForSaleSecuritiesDebtMaturitiesSingleMaturityDateRollingMaturityAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Contractual maturities - Estimated Fair Value</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AvailableForSaleSecuritiesDebtMaturitiesNextRollingTwelveMonthsFairValue" xlink:label="us-gaap_AvailableForSaleSecuritiesDebtMaturitiesNextRollingTwelveMonthsFairValue" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AvailableForSaleSecuritiesDebtMaturitiesNextRollingTwelveMonthsFairValue" xlink:to="us-gaap_AvailableForSaleSecuritiesDebtMaturitiesNextRollingTwelveMonthsFairValue_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AvailableForSaleSecuritiesDebtMaturitiesNextRollingTwelveMonthsFairValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt Securities, Available-for-sale, Maturity, Allocated and Single Maturity Date, Rolling within One Year, Fair Value</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AvailableForSaleSecuritiesDebtMaturitiesNextRollingTwelveMonthsFairValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Estimated Fair Value, Due in one year or less</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterOneThroughTwoYearsFairValue" xlink:label="veco_DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterOneThroughTwoYearsFairValue" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterOneThroughTwoYearsFairValue" xlink:to="veco_DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterOneThroughTwoYearsFairValue_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterOneThroughTwoYearsFairValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Fair value of investment in debt security, measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale), with single maturity date and allocated without single maturity date, maturing in rolling second through third year following latest fiscal year. For interim and annual periods when interim period is reported on rolling approach, from latest statement of financial position date.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterOneThroughTwoYearsFairValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt Securities, Available-for-sale, Maturity, Allocated and Single Maturity Date, Rolling after One Through Two Years, Fair Value</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterOneThroughTwoYearsFairValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Estimated Fair Value, Due after one year through two years</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_EquitySecuritiesWithoutReadilyDeterminableFairValueTable" xlink:label="us-gaap_EquitySecuritiesWithoutReadilyDeterminableFairValueTable" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EquitySecuritiesWithoutReadilyDeterminableFairValueTable" xlink:to="us-gaap_EquitySecuritiesWithoutReadilyDeterminableFairValueTable_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_EquitySecuritiesWithoutReadilyDeterminableFairValueTable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Equity Securities without Readily Determinable Fair Value [Table]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis" xlink:label="srt_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis" xlink:to="srt_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="srt_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Investment, Name [Axis]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_EquityMethodInvesteeNameDomain" xlink:label="srt_EquityMethodInvesteeNameDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_EquityMethodInvesteeNameDomain" xlink:to="srt_EquityMethodInvesteeNameDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="srt_EquityMethodInvesteeNameDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Investment, Name [Domain]</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_OtherNonMarketableInvestmentMember" xlink:label="veco_OtherNonMarketableInvestmentMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_OtherNonMarketableInvestmentMember" xlink:to="veco_OtherNonMarketableInvestmentMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_OtherNonMarketableInvestmentMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other non-marketable investment.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_OtherNonMarketableInvestmentMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Separate non-marketable investment</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_RangeAxis" xlink:label="srt_RangeAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_RangeAxis" xlink:to="srt_RangeAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="srt_RangeAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Range [Axis]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_RangeMember" xlink:label="srt_RangeMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_RangeMember" xlink:to="srt_RangeMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="srt_RangeMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Range [Domain]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_MaximumMember" xlink:label="srt_MaximumMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_MaximumMember" xlink:to="srt_MaximumMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="srt_MaximumMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Maximum</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeStatementLocationAxis" xlink:label="us-gaap_IncomeStatementLocationAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeStatementLocationAxis" xlink:to="us-gaap_IncomeStatementLocationAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncomeStatementLocationAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Income Statement Location [Axis]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeStatementLocationDomain" xlink:label="us-gaap_IncomeStatementLocationDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeStatementLocationDomain" xlink:to="us-gaap_IncomeStatementLocationDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncomeStatementLocationDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Income Statement Location [Domain]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OtherNonoperatingIncomeExpenseMember" xlink:label="us-gaap_OtherNonoperatingIncomeExpenseMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OtherNonoperatingIncomeExpenseMember" xlink:to="us-gaap_OtherNonoperatingIncomeExpenseMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OtherNonoperatingIncomeExpenseMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other income (expense), net</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_EquitySecuritiesWithoutReadilyDeterminableFairValueLineItems" xlink:label="us-gaap_EquitySecuritiesWithoutReadilyDeterminableFairValueLineItems" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EquitySecuritiesWithoutReadilyDeterminableFairValueLineItems" xlink:to="us-gaap_EquitySecuritiesWithoutReadilyDeterminableFairValueLineItems_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_EquitySecuritiesWithoutReadilyDeterminableFairValueLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Equity Securities without Readily Determinable Fair Value [Line Items]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_EquitySecuritiesWithoutReadilyDeterminableFairValueLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other Investment</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_CostMethodInvestmentsOwnershipPercentage" xlink:label="veco_CostMethodInvestmentsOwnershipPercentage" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_CostMethodInvestmentsOwnershipPercentage" xlink:to="veco_CostMethodInvestmentsOwnershipPercentage_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_CostMethodInvestmentsOwnershipPercentage_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">The percentage of ownership in the investee accounted for under the cost method of accounting.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_CostMethodInvestmentsOwnershipPercentage_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cost Method Investments, Ownership Percentage</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_CostMethodInvestmentsOwnershipPercentage_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Percentage ownership of cost method investee</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_EquitySecuritiesWithoutReadilyDeterminableFairValueAmount" xlink:label="us-gaap_EquitySecuritiesWithoutReadilyDeterminableFairValueAmount" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EquitySecuritiesWithoutReadilyDeterminableFairValueAmount" xlink:to="us-gaap_EquitySecuritiesWithoutReadilyDeterminableFairValueAmount_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_EquitySecuritiesWithoutReadilyDeterminableFairValueAmount_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Equity Securities without Readily Determinable Fair Value, Amount</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_EquitySecuritiesWithoutReadilyDeterminableFairValueAmount_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Carrying value of investment</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_InventoryNetAbstract" xlink:label="us-gaap_InventoryNetAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InventoryNetAbstract" xlink:to="us-gaap_InventoryNetAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_InventoryNetAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Inventory, Net [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_InventoryNetAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Inventories</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_InventoryRawMaterialsNetOfReserves" xlink:label="us-gaap_InventoryRawMaterialsNetOfReserves" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InventoryRawMaterialsNetOfReserves" xlink:to="us-gaap_InventoryRawMaterialsNetOfReserves_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_InventoryRawMaterialsNetOfReserves_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Inventory, Raw Materials, Net of Reserves</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_InventoryRawMaterialsNetOfReserves_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Materials</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_InventoryWorkInProcessNetOfReserves" xlink:label="us-gaap_InventoryWorkInProcessNetOfReserves" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InventoryWorkInProcessNetOfReserves" xlink:to="us-gaap_InventoryWorkInProcessNetOfReserves_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_InventoryWorkInProcessNetOfReserves_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Inventory, Work in Process, Net of Reserves</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_InventoryWorkInProcessNetOfReserves_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Work-in-process</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_InventoryFinishedGoodsNetOfReserves" xlink:label="us-gaap_InventoryFinishedGoodsNetOfReserves" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InventoryFinishedGoodsNetOfReserves" xlink:to="us-gaap_InventoryFinishedGoodsNetOfReserves_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_InventoryFinishedGoodsNetOfReserves_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Inventory, Finished Goods, Net of Reserves</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_InventoryFinishedGoodsNetOfReserves_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finished goods</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfPropertyPlantAndEquipmentTable" xlink:label="us-gaap_ScheduleOfPropertyPlantAndEquipmentTable" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfPropertyPlantAndEquipmentTable" xlink:to="us-gaap_ScheduleOfPropertyPlantAndEquipmentTable_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ScheduleOfPropertyPlantAndEquipmentTable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Property, Plant and Equipment [Table]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PropertyPlantAndEquipmentByTypeAxis" xlink:label="us-gaap_PropertyPlantAndEquipmentByTypeAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PropertyPlantAndEquipmentByTypeAxis" xlink:to="us-gaap_PropertyPlantAndEquipmentByTypeAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PropertyPlantAndEquipmentByTypeAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Property, Plant and Equipment, Type [Axis]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PropertyPlantAndEquipmentTypeDomain" xlink:label="us-gaap_PropertyPlantAndEquipmentTypeDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PropertyPlantAndEquipmentTypeDomain" xlink:to="us-gaap_PropertyPlantAndEquipmentTypeDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PropertyPlantAndEquipmentTypeDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Property, Plant and Equipment, Type [Domain]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LandMember" xlink:label="us-gaap_LandMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LandMember" xlink:to="us-gaap_LandMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LandMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Land</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_BuildingAndBuildingImprovementsMember" xlink:label="us-gaap_BuildingAndBuildingImprovementsMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_BuildingAndBuildingImprovementsMember" xlink:to="us-gaap_BuildingAndBuildingImprovementsMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_BuildingAndBuildingImprovementsMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Building and improvements</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_MachineryAndEquipmentMember" xlink:label="us-gaap_MachineryAndEquipmentMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_MachineryAndEquipmentMember" xlink:to="us-gaap_MachineryAndEquipmentMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_MachineryAndEquipmentMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Machinery and equipment</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LeaseholdImprovementsMember" xlink:label="us-gaap_LeaseholdImprovementsMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LeaseholdImprovementsMember" xlink:to="us-gaap_LeaseholdImprovementsMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LeaseholdImprovementsMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Leaseholds improvements</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_MinimumMember" xlink:label="srt_MinimumMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_MinimumMember" xlink:to="srt_MinimumMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="srt_MinimumMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Minimum</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PropertyPlantAndEquipmentLineItems" xlink:label="us-gaap_PropertyPlantAndEquipmentLineItems" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PropertyPlantAndEquipmentLineItems" xlink:to="us-gaap_PropertyPlantAndEquipmentLineItems_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PropertyPlantAndEquipmentLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Property, Plant and Equipment [Line Items]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_PropertyPlantAndEquipmentLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Property, plant, and equipment</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PropertyPlantAndEquipmentGross" xlink:label="us-gaap_PropertyPlantAndEquipmentGross" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PropertyPlantAndEquipmentGross" xlink:to="us-gaap_PropertyPlantAndEquipmentGross_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PropertyPlantAndEquipmentGross_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Property, Plant and Equipment, Gross</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_PropertyPlantAndEquipmentGross_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Gross property, plant and equipment</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment" xlink:label="us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment" xlink:to="us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accumulated Depreciation, Depletion and Amortization, Property, Plant, and Equipment</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Less: accumulated depreciation and amortization</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PropertyPlantAndEquipmentUsefulLife" xlink:label="us-gaap_PropertyPlantAndEquipmentUsefulLife" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PropertyPlantAndEquipmentUsefulLife" xlink:to="us-gaap_PropertyPlantAndEquipmentUsefulLife_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PropertyPlantAndEquipmentUsefulLife_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Property, Plant and Equipment, Useful Life</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_PropertyPlantAndEquipmentUsefulLife_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Average Useful Life</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_Depreciation" xlink:label="us-gaap_Depreciation" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_Depreciation" xlink:to="us-gaap_Depreciation_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_Depreciation_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Depreciation</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_Depreciation_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Depreciation expense</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfGoodwillTable" xlink:label="us-gaap_ScheduleOfGoodwillTable" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfGoodwillTable" xlink:to="us-gaap_ScheduleOfGoodwillTable_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ScheduleOfGoodwillTable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Goodwill [Table]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_GoodwillLineItems" xlink:label="us-gaap_GoodwillLineItems" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_GoodwillLineItems" xlink:to="us-gaap_GoodwillLineItems_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_GoodwillLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Goodwill [Line Items]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_GoodwillLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Goodwill disclosures</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_GoodwillRollForward" xlink:label="us-gaap_GoodwillRollForward" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_GoodwillRollForward" xlink:to="us-gaap_GoodwillRollForward_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_GoodwillRollForward_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Goodwill [Roll Forward]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_GoodwillRollForward_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Goodwill</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_GoodwillPeriodIncreaseDecrease" xlink:label="us-gaap_GoodwillPeriodIncreaseDecrease" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_GoodwillPeriodIncreaseDecrease" xlink:to="us-gaap_GoodwillPeriodIncreaseDecrease_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_GoodwillPeriodIncreaseDecrease_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Goodwill, Period Increase (Decrease)</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_GoodwillPeriodIncreaseDecrease_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Change in goodwill</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_GoodwillGross" xlink:label="us-gaap_GoodwillGross" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_GoodwillGross" xlink:to="us-gaap_GoodwillGross_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_GoodwillGross_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Goodwill, Gross</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_GoodwillGross_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Gross carrying amount</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_GoodwillImpairedAccumulatedImpairmentLoss" xlink:label="us-gaap_GoodwillImpairedAccumulatedImpairmentLoss" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_GoodwillImpairedAccumulatedImpairmentLoss" xlink:to="us-gaap_GoodwillImpairedAccumulatedImpairmentLoss_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_GoodwillImpairedAccumulatedImpairmentLoss_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Goodwill, Impaired, Accumulated Impairment Loss</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_GoodwillImpairedAccumulatedImpairmentLoss_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accumulated impairment</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassTable" xlink:label="veco_FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassTable" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassTable" xlink:to="veco_FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassTable_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassTable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Disclosure of finite-lived and indefinite-lived intangible assets, excluding goodwill, in total and by major class.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassTable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finite Lived and Indefinite Lived Intangible Assets by Major Class [Table]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis" xlink:label="us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis" xlink:to="us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finite-Lived Intangible Assets by Major Class [Axis]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain" xlink:label="us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain" xlink:to="us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finite-Lived Intangible Assets, Major Class Name [Domain]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_TechnologyBasedIntangibleAssetsMember" xlink:label="us-gaap_TechnologyBasedIntangibleAssetsMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_TechnologyBasedIntangibleAssetsMember" xlink:to="us-gaap_TechnologyBasedIntangibleAssetsMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_TechnologyBasedIntangibleAssetsMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Technology</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CustomerRelationshipsMember" xlink:label="us-gaap_CustomerRelationshipsMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CustomerRelationshipsMember" xlink:to="us-gaap_CustomerRelationshipsMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CustomerRelationshipsMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Customer relationship</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_TrademarksAndTradeNamesMember" xlink:label="us-gaap_TrademarksAndTradeNamesMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_TrademarksAndTradeNamesMember" xlink:to="us-gaap_TrademarksAndTradeNamesMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_TrademarksAndTradeNamesMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Trademarks and tradenames</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OtherIntangibleAssetsMember" xlink:label="us-gaap_OtherIntangibleAssetsMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OtherIntangibleAssetsMember" xlink:to="us-gaap_OtherIntangibleAssetsMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OtherIntangibleAssetsMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other Intangible Assets</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassLineItems" xlink:label="veco_FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassLineItems" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassLineItems" xlink:to="veco_FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassLineItems_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">No definition available.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finite Lived and Indefinite Lived Intangible Assets By Major Class [Line Items]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Intangible assets</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FiniteLivedIntangibleAssetsRemainingAmortizationPeriod1" xlink:label="us-gaap_FiniteLivedIntangibleAssetsRemainingAmortizationPeriod1" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FiniteLivedIntangibleAssetsRemainingAmortizationPeriod1" xlink:to="us-gaap_FiniteLivedIntangibleAssetsRemainingAmortizationPeriod1_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FiniteLivedIntangibleAssetsRemainingAmortizationPeriod1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finite-Lived Intangible Assets, Remaining Amortization Period</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_FiniteLivedIntangibleAssetsRemainingAmortizationPeriod1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Average Remaining Amortization Period</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FiniteLivedIntangibleAssetsGross" xlink:label="us-gaap_FiniteLivedIntangibleAssetsGross" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FiniteLivedIntangibleAssetsGross" xlink:to="us-gaap_FiniteLivedIntangibleAssetsGross_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FiniteLivedIntangibleAssetsGross_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finite-Lived Intangible Assets, Gross</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_FiniteLivedIntangibleAssetsGross_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Gross Carrying Amount, Intangible assets</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment" xlink:label="veco_FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment" xlink:to="veco_FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accumulated amount of amortization and impairment of assets, excluding financial assets and goodwill, lacking physical substance with a finite life.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finite-Lived Intangible Assets, Accumulated Amortization and Impairment</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accumulated Amortization and Impairment, Intangible assets</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FiniteLivedIntangibleAssetsFutureAmortizationExpenseAbstract" xlink:label="us-gaap_FiniteLivedIntangibleAssetsFutureAmortizationExpenseAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FiniteLivedIntangibleAssetsFutureAmortizationExpenseAbstract" xlink:to="us-gaap_FiniteLivedIntangibleAssetsFutureAmortizationExpenseAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FiniteLivedIntangibleAssetsFutureAmortizationExpenseAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Estimated annual amortization expense</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_FiniteLivedIntangibleAssetsFutureAmortizationExpenseAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Estimated aggregate amortization expense</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseNextTwelveMonths" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseNextTwelveMonths" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseNextTwelveMonths" xlink:to="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseNextTwelveMonths_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseNextTwelveMonths_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finite-Lived Intangible Assets, Amortization Expense, Next Twelve Months</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseNextTwelveMonths_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">2023</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearTwo" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearTwo" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearTwo" xlink:to="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearTwo_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearTwo_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finite-Lived Intangible Assets, Amortization Expense, Year Two</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearTwo_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">2024</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearThree" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearThree" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearThree" xlink:to="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearThree_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearThree_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finite-Lived Intangible Assets, Amortization Expense, Year Three</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearThree_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">2025</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFour" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFour" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFour" xlink:to="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFour_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFour_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finite-Lived Intangible Assets, Amortization Expense, Year Four</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFour_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">2026</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFive" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFive" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFive" xlink:to="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFive_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFive_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finite-Lived Intangible Assets, Amortization Expense, Year Five</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFive_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">2027</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseAfterYearFive" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseAfterYearFive" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseAfterYearFive" xlink:to="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseAfterYearFive_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseAfterYearFive_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finite-Lived Intangible Assets, Amortization Expense, after Year Five</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseAfterYearFive_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Thereafter</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AccruedLiabilitiesCurrentAbstract" xlink:label="us-gaap_AccruedLiabilitiesCurrentAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AccruedLiabilitiesCurrentAbstract" xlink:to="us-gaap_AccruedLiabilitiesCurrentAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AccruedLiabilitiesCurrentAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accrued Liabilities, Current [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AccruedLiabilitiesCurrentAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accrued expenses and other current liabilities</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_EmployeeRelatedLiabilitiesCurrent" xlink:label="us-gaap_EmployeeRelatedLiabilitiesCurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EmployeeRelatedLiabilitiesCurrent" xlink:to="us-gaap_EmployeeRelatedLiabilitiesCurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_EmployeeRelatedLiabilitiesCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Employee-related Liabilities, Current</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_EmployeeRelatedLiabilitiesCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Payroll and related benefits</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ProductWarrantyAccrualClassifiedCurrent" xlink:label="us-gaap_ProductWarrantyAccrualClassifiedCurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ProductWarrantyAccrualClassifiedCurrent" xlink:to="us-gaap_ProductWarrantyAccrualClassifiedCurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ProductWarrantyAccrualClassifiedCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Product Warranty Accrual, Current</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ProductWarrantyAccrualClassifiedCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Warranty</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OperatingLeaseLiabilityCurrent" xlink:label="us-gaap_OperatingLeaseLiabilityCurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OperatingLeaseLiabilityCurrent" xlink:to="us-gaap_OperatingLeaseLiabilityCurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OperatingLeaseLiabilityCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating Lease, Liability, Current</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_OperatingLeaseLiabilityCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating lease liability, current</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_OperatingLeaseLiabilityCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating lease liabilities</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_InterestPayableCurrent" xlink:label="us-gaap_InterestPayableCurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InterestPayableCurrent" xlink:to="us-gaap_InterestPayableCurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_InterestPayableCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Interest Payable, Current</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_InterestPayableCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Interest</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AccruedProfessionalFeesCurrent" xlink:label="us-gaap_AccruedProfessionalFeesCurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AccruedProfessionalFeesCurrent" xlink:to="us-gaap_AccruedProfessionalFeesCurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AccruedProfessionalFeesCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accrued Professional Fees, Current</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AccruedProfessionalFeesCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Professional fees</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LossContingencyAccrualCarryingValueCurrent" xlink:label="us-gaap_LossContingencyAccrualCarryingValueCurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LossContingencyAccrualCarryingValueCurrent" xlink:to="us-gaap_LossContingencyAccrualCarryingValueCurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LossContingencyAccrualCarryingValueCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Loss Contingency, Accrual, Current</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LossContingencyAccrualCarryingValueCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Legal settlement</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_TaxesPayableCurrent" xlink:label="us-gaap_TaxesPayableCurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_TaxesPayableCurrent" xlink:to="us-gaap_TaxesPayableCurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_TaxesPayableCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Taxes Payable, Current</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_TaxesPayableCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Sales, use, and other taxes</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OtherAccruedLiabilitiesCurrent" xlink:label="us-gaap_OtherAccruedLiabilitiesCurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OtherAccruedLiabilitiesCurrent" xlink:to="us-gaap_OtherAccruedLiabilitiesCurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OtherAccruedLiabilitiesCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other Accrued Liabilities, Current</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_OtherAccruedLiabilitiesCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList" xlink:label="us-gaap_OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList" xlink:to="us-gaap_OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating Lease, Liability, Current, Statement of Financial Position [Extensible Enumeration]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating Lease, Liability, Current, Statement of Financial Position</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ContractWithCustomerRefundLiabilityAbstract" xlink:label="us-gaap_ContractWithCustomerRefundLiabilityAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ContractWithCustomerRefundLiabilityAbstract" xlink:to="us-gaap_ContractWithCustomerRefundLiabilityAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ContractWithCustomerRefundLiabilityAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Contract with Customer, Refund Liability [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ContractWithCustomerRefundLiabilityAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Customer deposits and deferred revenue</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ContractWithCustomerRefundLiabilityCurrent" xlink:label="us-gaap_ContractWithCustomerRefundLiabilityCurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ContractWithCustomerRefundLiabilityCurrent" xlink:to="us-gaap_ContractWithCustomerRefundLiabilityCurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ContractWithCustomerRefundLiabilityCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Contract with Customer, Refund Liability, Current</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ContractWithCustomerRefundLiabilityCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Customer deposits and deferred revenue</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_MovementInDeferredRevenueRollForward" xlink:label="us-gaap_MovementInDeferredRevenueRollForward" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_MovementInDeferredRevenueRollForward" xlink:to="us-gaap_MovementInDeferredRevenueRollForward_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_MovementInDeferredRevenueRollForward_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Movement in Deferred Revenue [Roll Forward]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_MovementInDeferredRevenueRollForward_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Changes in deferred revenue</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ContractWithCustomerLiability" xlink:label="us-gaap_ContractWithCustomerLiability" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ContractWithCustomerLiability" xlink:to="us-gaap_ContractWithCustomerLiability_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ContractWithCustomerLiability_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Contract with Customer, Liability</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel" xlink:label="us-gaap_ContractWithCustomerLiability_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Ending balance</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel" xlink:label="us-gaap_ContractWithCustomerLiability_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Beginning balance</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncreaseDecreaseInContractWithCustomerLiability" xlink:label="us-gaap_IncreaseDecreaseInContractWithCustomerLiability" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncreaseDecreaseInContractWithCustomerLiability" xlink:to="us-gaap_IncreaseDecreaseInContractWithCustomerLiability_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncreaseDecreaseInContractWithCustomerLiability_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Increase Decrease in Contract with Customer Liability</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_IncreaseDecreaseInContractWithCustomerLiability_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferral of revenue</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ContractWithCustomerLiabilityRevenueRecognized" xlink:label="us-gaap_ContractWithCustomerLiabilityRevenueRecognized" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ContractWithCustomerLiabilityRevenueRecognized" xlink:to="us-gaap_ContractWithCustomerLiabilityRevenueRecognized_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ContractWithCustomerLiabilityRevenueRecognized_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Contract with Customer, Liability, Revenue Recognized</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ContractWithCustomerLiabilityRevenueRecognized_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Recognition of previously deferred revenue</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_RevenueRemainingPerformanceObligation" xlink:label="us-gaap_RevenueRemainingPerformanceObligation" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RevenueRemainingPerformanceObligation" xlink:to="us-gaap_RevenueRemainingPerformanceObligation_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_RevenueRemainingPerformanceObligation_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Revenue, Remaining Performance Obligation</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_RevenueRemainingPerformanceObligation_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Remaining performance obligations</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionTable" xlink:label="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionTable" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionTable" xlink:to="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionTable_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionTable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Revenue, Remaining Performance Obligation, Expected Timing of Satisfaction [Table]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionStartDateAxis" xlink:label="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionStartDateAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionStartDateAxis" xlink:to="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionStartDateAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionStartDateAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Revenue, Remaining Performance Obligation, Expected Timing of Satisfaction, Start Date [Axis]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionLineItems" xlink:label="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionLineItems" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionLineItems" xlink:to="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionLineItems_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Revenue, Remaining Performance Obligation, Expected Timing of Satisfaction</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Performance obligations</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_RevenueRemainingPerformanceObligationExpectedTimingPercentage" xlink:label="veco_RevenueRemainingPerformanceObligationExpectedTimingPercentage" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_RevenueRemainingPerformanceObligationExpectedTimingPercentage" xlink:to="veco_RevenueRemainingPerformanceObligationExpectedTimingPercentage_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_RevenueRemainingPerformanceObligationExpectedTimingPercentage_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Percentage of remaining performance obligation expected to be recognized.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_RevenueRemainingPerformanceObligationExpectedTimingPercentage_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Revenue Remaining Performance Obligation Expected Timing Percentage</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_RevenueRemainingPerformanceObligationExpectedTimingPercentage_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Percentage of remaining performance obligation expected to be recognized</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_RevenuePracticalExpedientRemainingPerformanceObligation" xlink:label="us-gaap_RevenuePracticalExpedientRemainingPerformanceObligation" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RevenuePracticalExpedientRemainingPerformanceObligation" xlink:to="us-gaap_RevenuePracticalExpedientRemainingPerformanceObligation_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_RevenuePracticalExpedientRemainingPerformanceObligation_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Revenue, Practical Expedient, Remaining Performance Obligation [true/false]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_RevenuePracticalExpedientRemainingPerformanceObligation_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Revenue, Practical Expedient, Remaining Performance Obligation</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionPeriod1" xlink:label="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionPeriod1" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionPeriod1" xlink:to="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionPeriod1_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionPeriod1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Revenue, Remaining Performance Obligation, Expected Timing of Satisfaction, Period</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionPeriod1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Remaining performance obligations, expected timing of satisfaction</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_LiabilitiesTable" xlink:label="veco_LiabilitiesTable" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_LiabilitiesTable" xlink:to="veco_LiabilitiesTable_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_LiabilitiesTable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Table presenting the description of liabilities.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_LiabilitiesTable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Liabilities [Table]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_BalanceSheetLocationAxis" xlink:label="us-gaap_BalanceSheetLocationAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_BalanceSheetLocationAxis" xlink:to="us-gaap_BalanceSheetLocationAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_BalanceSheetLocationAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Balance Sheet Location [Axis]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_BalanceSheetLocationDomain" xlink:label="us-gaap_BalanceSheetLocationDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_BalanceSheetLocationDomain" xlink:to="us-gaap_BalanceSheetLocationDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_BalanceSheetLocationDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Balance Sheet Location [Domain]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OtherLiabilitiesMember" xlink:label="us-gaap_OtherLiabilitiesMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OtherLiabilitiesMember" xlink:to="us-gaap_OtherLiabilitiesMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OtherLiabilitiesMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other Liabilities</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_LiabilitiesLineItems" xlink:label="veco_LiabilitiesLineItems" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_LiabilitiesLineItems" xlink:to="veco_LiabilitiesLineItems_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_LiabilitiesLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_LiabilitiesLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Liabilities [Line Items]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OtherLiabilitiesAbstract" xlink:label="us-gaap_OtherLiabilitiesAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OtherLiabilitiesAbstract" xlink:to="us-gaap_OtherLiabilitiesAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OtherLiabilitiesAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other Liabilities [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_OtherLiabilitiesAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other liabilities</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AssetRetirementObligationsNoncurrent" xlink:label="us-gaap_AssetRetirementObligationsNoncurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AssetRetirementObligationsNoncurrent" xlink:to="us-gaap_AssetRetirementObligationsNoncurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AssetRetirementObligationsNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Asset Retirement Obligations, Noncurrent</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AssetRetirementObligationsNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Asset retirement obligations</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AccruedIncomeTaxesNoncurrent" xlink:label="us-gaap_AccruedIncomeTaxesNoncurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AccruedIncomeTaxesNoncurrent" xlink:to="us-gaap_AccruedIncomeTaxesNoncurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AccruedIncomeTaxesNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accrued Income Taxes, Noncurrent</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AccruedIncomeTaxesNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Income taxes payable</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_MedicalAndDentalBenefitLiabilitiesNoncurrent" xlink:label="veco_MedicalAndDentalBenefitLiabilitiesNoncurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_MedicalAndDentalBenefitLiabilitiesNoncurrent" xlink:to="veco_MedicalAndDentalBenefitLiabilitiesNoncurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_MedicalAndDentalBenefitLiabilitiesNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amount of liabilities for medical and dental benefits classified as other, due after one year or the normal operating cycle, if longer</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_MedicalAndDentalBenefitLiabilitiesNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Medical and Dental Benefit Liabilities, Noncurrent</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_MedicalAndDentalBenefitLiabilitiesNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Medical and dental benefits</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ProductWarrantiesDisclosuresAbstract" xlink:label="us-gaap_ProductWarrantiesDisclosuresAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ProductWarrantiesDisclosuresAbstract" xlink:to="us-gaap_ProductWarrantiesDisclosuresAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ProductWarrantiesDisclosuresAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Product Warranties Disclosures [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ProductWarrantiesDisclosuresAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Warranty</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ProductWarrantyAccrual" xlink:label="us-gaap_ProductWarrantyAccrual" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ProductWarrantyAccrual" xlink:to="us-gaap_ProductWarrantyAccrual_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ProductWarrantyAccrual_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Product Warranty Accrual</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel" xlink:label="us-gaap_ProductWarrantyAccrual_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Balance, end of the period</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel" xlink:label="us-gaap_ProductWarrantyAccrual_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Balance, beginning of the period</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ProductWarrantyAccrualWarrantiesIssued" xlink:label="us-gaap_ProductWarrantyAccrualWarrantiesIssued" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ProductWarrantyAccrualWarrantiesIssued" xlink:to="us-gaap_ProductWarrantyAccrualWarrantiesIssued_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ProductWarrantyAccrualWarrantiesIssued_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Product Warranty Accrual, Warranties Issued</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ProductWarrantyAccrualWarrantiesIssued_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Warranties issued</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ProductWarrantyAccrualPayments" xlink:label="us-gaap_ProductWarrantyAccrualPayments" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ProductWarrantyAccrualPayments" xlink:to="us-gaap_ProductWarrantyAccrualPayments_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ProductWarrantyAccrualPayments_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Product Warranty Accrual, Payments</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_ProductWarrantyAccrualPayments_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Consumption of reserves</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ProductWarrantyAccrualPreexistingIncreaseDecrease" xlink:label="us-gaap_ProductWarrantyAccrualPreexistingIncreaseDecrease" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ProductWarrantyAccrualPreexistingIncreaseDecrease" xlink:to="us-gaap_ProductWarrantyAccrualPreexistingIncreaseDecrease_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ProductWarrantyAccrualPreexistingIncreaseDecrease_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Product Warranty Accrual, Preexisting, Increase (Decrease)</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ProductWarrantyAccrualPreexistingIncreaseDecrease_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Changes in estimate</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LesseeOperatingLeaseDescriptionAbstract" xlink:label="us-gaap_LesseeOperatingLeaseDescriptionAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LesseeOperatingLeaseDescriptionAbstract" xlink:to="us-gaap_LesseeOperatingLeaseDescriptionAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LesseeOperatingLeaseDescriptionAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lessee, Operating Lease, Description [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LesseeOperatingLeaseDescriptionAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Leases</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LesseeOperatingLeaseRenewalTerm" xlink:label="us-gaap_LesseeOperatingLeaseRenewalTerm" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LesseeOperatingLeaseRenewalTerm" xlink:to="us-gaap_LesseeOperatingLeaseRenewalTerm_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LesseeOperatingLeaseRenewalTerm_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lessee, Operating Lease, Renewal Term</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LesseeOperatingLeaseRenewalTerm_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lease renewal term</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OperatingLeaseWeightedAverageRemainingLeaseTerm1" xlink:label="us-gaap_OperatingLeaseWeightedAverageRemainingLeaseTerm1" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OperatingLeaseWeightedAverageRemainingLeaseTerm1" xlink:to="us-gaap_OperatingLeaseWeightedAverageRemainingLeaseTerm1_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OperatingLeaseWeightedAverageRemainingLeaseTerm1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating Lease, Weighted Average Remaining Lease Term</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_OperatingLeaseWeightedAverageRemainingLeaseTerm1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Remaining lease term</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LesseeOperatingLeaseDiscountRate" xlink:label="us-gaap_LesseeOperatingLeaseDiscountRate" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LesseeOperatingLeaseDiscountRate" xlink:to="us-gaap_LesseeOperatingLeaseDiscountRate_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LesseeOperatingLeaseDiscountRate_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lessee, Operating Lease, Discount Rate</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LesseeOperatingLeaseDiscountRate_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Weighted average discount rate (as a percent)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract" xlink:label="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract" xlink:to="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating Lease Liabilities, Payments Due [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Minimum lease commitments, Payments due by period:</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lessee, Operating Lease, Liability, Payments, Due Next Twelve Months</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">2023</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lessee, Operating Lease, Liability, Payments, Due Year Two</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">2024</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lessee, Operating Lease, Liability, Payments, Due Year Three</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">2025</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lessee, Operating Lease, Liability, Payments, Due Year Four</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">2026</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFive" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFive" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFive" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFive_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFive_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lessee, Operating Lease, Liability, Payments, Due Year Five</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFive_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">2027</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lessee, Operating Lease, Liability, Payments, Due after Year Five</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Thereafter</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lessee, Operating Lease, Liability, Payments, Due</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total future minimum lease payments</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lessee, Operating Lease, Liability, Undiscounted Excess Amount</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Less: Imputed interest</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OperatingLeaseLiability" xlink:label="us-gaap_OperatingLeaseLiability" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OperatingLeaseLiability" xlink:to="us-gaap_OperatingLeaseLiability_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OperatingLeaseLiability_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating Lease, Liability</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_OperatingLeaseLiability_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total operating lease liabilities</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_OperatingLeaseLiability_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total operating lease liabilities</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OperatingLeaseLiabilityStatementOfFinancialPositionExtensibleList" xlink:label="us-gaap_OperatingLeaseLiabilityStatementOfFinancialPositionExtensibleList" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OperatingLeaseLiabilityStatementOfFinancialPositionExtensibleList" xlink:to="us-gaap_OperatingLeaseLiabilityStatementOfFinancialPositionExtensibleList_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OperatingLeaseLiabilityStatementOfFinancialPositionExtensibleList_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating Lease, Liability, Statement of Financial Position [Extensible Enumeration]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_OperatingLeaseLiabilityStatementOfFinancialPositionExtensibleList_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating Lease, Liability, Statement of Financial Position</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LeaseCostAbstract" xlink:label="us-gaap_LeaseCostAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LeaseCostAbstract" xlink:to="us-gaap_LeaseCostAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LeaseCostAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lease, Cost [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LeaseCostAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lease cost</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OperatingLeaseCost" xlink:label="us-gaap_OperatingLeaseCost" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OperatingLeaseCost" xlink:to="us-gaap_OperatingLeaseCost_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OperatingLeaseCost_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating Lease, Cost</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_OperatingLeaseCost_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating lease cost</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_VariableLeaseCost" xlink:label="us-gaap_VariableLeaseCost" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_VariableLeaseCost" xlink:to="us-gaap_VariableLeaseCost_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_VariableLeaseCost_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Variable Lease, Cost</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_VariableLeaseCost_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Variable lease cost</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LeaseCost" xlink:label="us-gaap_LeaseCost" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LeaseCost" xlink:to="us-gaap_LeaseCost_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LeaseCost_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lease, Cost</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LeaseCost_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lease expense</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OperatingLeasePayments" xlink:label="us-gaap_OperatingLeasePayments" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OperatingLeasePayments" xlink:to="us-gaap_OperatingLeasePayments_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OperatingLeasePayments_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating Lease, Payments</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_OperatingLeasePayments_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating cash flows from operating leases</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_ReimbursementForLeaseholdImprovements" xlink:label="veco_ReimbursementForLeaseholdImprovements" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_ReimbursementForLeaseholdImprovements" xlink:to="veco_ReimbursementForLeaseholdImprovements_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_ReimbursementForLeaseholdImprovements_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amount of reimbursement from landlord for leasehold improvements as a reduction to cash outflow,</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_ReimbursementForLeaseholdImprovements_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Reimbursement for Leasehold Improvements</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_ReimbursementForLeaseholdImprovements_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amount of reimbursement for leasehold improvements</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LossContingenciesTable" xlink:label="us-gaap_LossContingenciesTable" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LossContingenciesTable" xlink:to="us-gaap_LossContingenciesTable_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LossContingenciesTable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Loss Contingencies [Table]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_LitigationCaseAxis" xlink:label="srt_LitigationCaseAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_LitigationCaseAxis" xlink:to="srt_LitigationCaseAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="srt_LitigationCaseAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Litigation Case [Axis]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_LitigationCaseTypeDomain" xlink:label="srt_LitigationCaseTypeDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_LitigationCaseTypeDomain" xlink:to="srt_LitigationCaseTypeDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="srt_LitigationCaseTypeDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Litigation Case [Domain]</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_UltratechAcquisitionLitigationMember" xlink:label="veco_UltratechAcquisitionLitigationMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_UltratechAcquisitionLitigationMember" xlink:to="veco_UltratechAcquisitionLitigationMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_UltratechAcquisitionLitigationMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Litigation alleging, among other things, false/misleading statements in the registration statement and prospectus relating to the Ultratech acquisition. Class action complaints substantially similar to the Wolther Action.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_UltratechAcquisitionLitigationMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Ultratech acquisition litigation</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_WoltherActionMember" xlink:label="veco_WoltherActionMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_WoltherActionMember" xlink:to="veco_WoltherActionMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_WoltherActionMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Litigation consolidating class action complaints alleging, among other things, false/misleading statements in the registration statement and prospectus relating to the Ultratech acquisition, relating primarily to the alleged failure to disclose delays in the advanced packaging business, increased MOCVD competition in China, and an intellectual property dispute.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_WoltherActionMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Wolther Action</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_DerivativeActionMember" xlink:label="veco_DerivativeActionMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_DerivativeActionMember" xlink:to="veco_DerivativeActionMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_DerivativeActionMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Litigation asserting claims for breach of fiduciary duty, waste of corporate assets, and unjust enrichment against current and former Veeco directors premised on purported misstatements and omissions in the registration statement relating to the Ultratech acquisition.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_DerivativeActionMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Derivative Action</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LossContingenciesLineItems" xlink:label="us-gaap_LossContingenciesLineItems" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LossContingenciesLineItems" xlink:to="us-gaap_LossContingenciesLineItems_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LossContingenciesLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Loss Contingencies [Line Items]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LossContingenciesLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Legal Proceedings</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LossContingencyNewClaimsFiledNumber" xlink:label="us-gaap_LossContingencyNewClaimsFiledNumber" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LossContingencyNewClaimsFiledNumber" xlink:to="us-gaap_LossContingencyNewClaimsFiledNumber_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LossContingencyNewClaimsFiledNumber_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Loss Contingency, New Claims Filed, Number</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LossContingencyNewClaimsFiledNumber_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Number of purported class action complaints filed</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LitigationSettlementAmountAwardedToOtherParty" xlink:label="us-gaap_LitigationSettlementAmountAwardedToOtherParty" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LitigationSettlementAmountAwardedToOtherParty" xlink:to="us-gaap_LitigationSettlementAmountAwardedToOtherParty_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LitigationSettlementAmountAwardedToOtherParty_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Litigation Settlement, Amount Awarded to Other Party</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LitigationSettlementAmountAwardedToOtherParty_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Settlement amount</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ConcentrationRiskTable" xlink:label="us-gaap_ConcentrationRiskTable" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ConcentrationRiskTable" xlink:to="us-gaap_ConcentrationRiskTable_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ConcentrationRiskTable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Concentration Risk [Table]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ConcentrationRiskByBenchmarkAxis" xlink:label="us-gaap_ConcentrationRiskByBenchmarkAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ConcentrationRiskByBenchmarkAxis" xlink:to="us-gaap_ConcentrationRiskByBenchmarkAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ConcentrationRiskByBenchmarkAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Concentration Risk Benchmark [Axis]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ConcentrationRiskBenchmarkDomain" xlink:label="us-gaap_ConcentrationRiskBenchmarkDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ConcentrationRiskBenchmarkDomain" xlink:to="us-gaap_ConcentrationRiskBenchmarkDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ConcentrationRiskBenchmarkDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Concentration Risk Benchmark [Domain]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AccountsReceivableMember" xlink:label="us-gaap_AccountsReceivableMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AccountsReceivableMember" xlink:to="us-gaap_AccountsReceivableMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AccountsReceivableMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accounts Receivable</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SalesMember" xlink:label="us-gaap_SalesMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SalesMember" xlink:to="us-gaap_SalesMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_SalesMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net Sales</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ConcentrationRiskByTypeAxis" xlink:label="us-gaap_ConcentrationRiskByTypeAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ConcentrationRiskByTypeAxis" xlink:to="us-gaap_ConcentrationRiskByTypeAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ConcentrationRiskByTypeAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Concentration Risk Type [Axis]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ConcentrationRiskTypeDomain" xlink:label="us-gaap_ConcentrationRiskTypeDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ConcentrationRiskTypeDomain" xlink:to="us-gaap_ConcentrationRiskTypeDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ConcentrationRiskTypeDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Concentration Risk Type [Domain]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CreditConcentrationRiskMember" xlink:label="us-gaap_CreditConcentrationRiskMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CreditConcentrationRiskMember" xlink:to="us-gaap_CreditConcentrationRiskMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CreditConcentrationRiskMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Credit Concentration Risk</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CustomerConcentrationRiskMember" xlink:label="us-gaap_CustomerConcentrationRiskMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CustomerConcentrationRiskMember" xlink:to="us-gaap_CustomerConcentrationRiskMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CustomerConcentrationRiskMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Customer Concentration Risk</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_MajorCustomersAxis" xlink:label="srt_MajorCustomersAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_MajorCustomersAxis" xlink:to="srt_MajorCustomersAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="srt_MajorCustomersAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Customer [Axis]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_NameOfMajorCustomerDomain" xlink:label="srt_NameOfMajorCustomerDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_NameOfMajorCustomerDomain" xlink:to="srt_NameOfMajorCustomerDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="srt_NameOfMajorCustomerDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Customer [Domain]</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_TopTenCustomersMember" xlink:label="veco_TopTenCustomersMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_TopTenCustomersMember" xlink:to="veco_TopTenCustomersMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_TopTenCustomersMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents the top ten customers of the entity for that respective year in terms of percentage of total accounts receivable.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_TopTenCustomersMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Top Ten Customers</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_CustomerAMember" xlink:label="veco_CustomerAMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_CustomerAMember" xlink:to="veco_CustomerAMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_CustomerAMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents the customer A.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_CustomerAMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Customer A</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_CustomerBMember" xlink:label="veco_CustomerBMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_CustomerBMember" xlink:to="veco_CustomerBMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_CustomerBMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents the customer B.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_CustomerBMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Customer B</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_CustomerCMember" xlink:label="veco_CustomerCMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_CustomerCMember" xlink:to="veco_CustomerCMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_CustomerCMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents the customer C.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_CustomerCMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Customer C</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_CustomerDMember" xlink:label="veco_CustomerDMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_CustomerDMember" xlink:to="veco_CustomerDMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_CustomerDMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents the customer D.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_CustomerDMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Customer D</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_CustomerEMember" xlink:label="veco_CustomerEMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_CustomerEMember" xlink:to="veco_CustomerEMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_CustomerEMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents the customer E.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_CustomerEMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Customer E</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_CustomerFMember" xlink:label="veco_CustomerFMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_CustomerFMember" xlink:to="veco_CustomerFMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_CustomerFMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents the customer F.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_CustomerFMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Customer F</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ConcentrationRiskLineItems" xlink:label="us-gaap_ConcentrationRiskLineItems" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ConcentrationRiskLineItems" xlink:to="us-gaap_ConcentrationRiskLineItems_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ConcentrationRiskLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Concentration Risk [Line Items]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ConcentrationRiskLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Concentration of Credit Risk</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_NumberOfCustomers" xlink:label="veco_NumberOfCustomers" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_NumberOfCustomers" xlink:to="veco_NumberOfCustomers_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_NumberOfCustomers_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Number of customers.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_NumberOfCustomers_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Number of Customers</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_NumberOfCustomers_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Number of customers</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ConcentrationRiskPercentage1" xlink:label="us-gaap_ConcentrationRiskPercentage1" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ConcentrationRiskPercentage1" xlink:to="us-gaap_ConcentrationRiskPercentage1_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ConcentrationRiskPercentage1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Concentration Risk, Percentage</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ConcentrationRiskPercentage1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Concentration Risk (as a percent)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_StatementGeographicalAxis" xlink:label="srt_StatementGeographicalAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_StatementGeographicalAxis" xlink:to="srt_StatementGeographicalAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="srt_StatementGeographicalAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Geographical [Axis]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_SegmentGeographicalDomain" xlink:label="srt_SegmentGeographicalDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_SegmentGeographicalDomain" xlink:to="srt_SegmentGeographicalDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="srt_SegmentGeographicalDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Geographical [Domain]</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_GeographicLocationOneMember" xlink:label="veco_GeographicLocationOneMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_GeographicLocationOneMember" xlink:to="veco_GeographicLocationOneMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_GeographicLocationOneMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Geographic location with specified receivable payments periods, one.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_GeographicLocationOneMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Geographic location, One</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_GeographicLocationTwoMember" xlink:label="veco_GeographicLocationTwoMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_GeographicLocationTwoMember" xlink:to="veco_GeographicLocationTwoMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_GeographicLocationTwoMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Geographic location with specified receivable payments periods, two.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_GeographicLocationTwoMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Geographic location, Two</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_AccountsReceivableCreditPeriod" xlink:label="veco_AccountsReceivableCreditPeriod" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_AccountsReceivableCreditPeriod" xlink:to="veco_AccountsReceivableCreditPeriod_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_AccountsReceivableCreditPeriod_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">The credit period for accounts receivable.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_AccountsReceivableCreditPeriod_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accounts Receivable Credit Period</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_AccountsReceivableCreditPeriod_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Credit period for accounts receivable</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_ReceivablePurchaseAgreementMaximumAmount" xlink:label="veco_ReceivablePurchaseAgreementMaximumAmount" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_ReceivablePurchaseAgreementMaximumAmount" xlink:to="veco_ReceivablePurchaseAgreementMaximumAmount_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_ReceivablePurchaseAgreementMaximumAmount_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Maximum amount of trade receivables from customers to be sold without recourse under the terms of the receivable purchase agreement.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_ReceivablePurchaseAgreementMaximumAmount_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Receivable Purchase Agreement, Maximum Amount</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_ReceivablePurchaseAgreementMaximumAmount_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Maximum amount of trade receivables to be sold under agreement</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_TradeReceivablesSoldUnderReceivablePurchaseAgreement" xlink:label="veco_TradeReceivablesSoldUnderReceivablePurchaseAgreement" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_TradeReceivablesSoldUnderReceivablePurchaseAgreement" xlink:to="veco_TradeReceivablesSoldUnderReceivablePurchaseAgreement_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_TradeReceivablesSoldUnderReceivablePurchaseAgreement_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amount of accounts receivable that has been sold to other entities.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_TradeReceivablesSoldUnderReceivablePurchaseAgreement_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Trade Receivables Sold Under Receivable Purchase Agreement</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_TradeReceivablesSoldUnderReceivablePurchaseAgreement_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Receivables sold</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_TradeReceivablesUnderReceivablePurchaseAgreementOutstanding" xlink:label="veco_TradeReceivablesUnderReceivablePurchaseAgreementOutstanding" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_TradeReceivablesUnderReceivablePurchaseAgreementOutstanding" xlink:to="veco_TradeReceivablesUnderReceivablePurchaseAgreementOutstanding_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_TradeReceivablesUnderReceivablePurchaseAgreementOutstanding_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amount of accounts receivable sold under receivable purchase agreement that remains outstanding.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_TradeReceivablesUnderReceivablePurchaseAgreementOutstanding_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Trade Receivables Under Receivable Purchase Agreement, Outstanding</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_TradeReceivablesUnderReceivablePurchaseAgreementOutstanding_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Receivables sold remaining outstanding</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_ReceivablePurchaseAgreementAmountAvailable" xlink:label="veco_ReceivablePurchaseAgreementAmountAvailable" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_ReceivablePurchaseAgreementAmountAvailable" xlink:to="veco_ReceivablePurchaseAgreementAmountAvailable_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_ReceivablePurchaseAgreementAmountAvailable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amount of trade receivables available to be sold from customers without recourse under the terms of the receivable purchase agreement.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_ReceivablePurchaseAgreementAmountAvailable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Receivable Purchase Agreement, Amount Available</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_ReceivablePurchaseAgreementAmountAvailable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amount of trade receivables available to be sold under agreement</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PurchaseObligationFiscalYearMaturityAbstract" xlink:label="us-gaap_PurchaseObligationFiscalYearMaturityAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PurchaseObligationFiscalYearMaturityAbstract" xlink:to="us-gaap_PurchaseObligationFiscalYearMaturityAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PurchaseObligationFiscalYearMaturityAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Purchase Obligation, Fiscal Year Maturity [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_PurchaseObligationFiscalYearMaturityAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Purchase Commitments</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_PurchaseObligationFiscalYearMaturityAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Purchase commitments</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DepositAssets" xlink:label="us-gaap_DepositAssets" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DepositAssets" xlink:to="us-gaap_DepositAssets_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DepositAssets_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deposit Assets</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DepositAssets_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deposits with suppliers</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_UnrecordedUnconditionalPurchaseObligationDueInNextRollingTwelveMonths" xlink:label="us-gaap_UnrecordedUnconditionalPurchaseObligationDueInNextRollingTwelveMonths" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_UnrecordedUnconditionalPurchaseObligationDueInNextRollingTwelveMonths" xlink:to="us-gaap_UnrecordedUnconditionalPurchaseObligationDueInNextRollingTwelveMonths_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_UnrecordedUnconditionalPurchaseObligationDueInNextRollingTwelveMonths_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Unrecorded Unconditional Purchase Obligation, Due in Next Rolling Twelve Months</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_UnrecordedUnconditionalPurchaseObligationDueInNextRollingTwelveMonths_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Purchase commitments due within one year</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_GuaranteesAbstract" xlink:label="us-gaap_GuaranteesAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_GuaranteesAbstract" xlink:to="us-gaap_GuaranteesAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_GuaranteesAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Guarantees [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_GuaranteesAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Bank guarantees</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_GuaranteeObligationsCurrentCarryingValue" xlink:label="us-gaap_GuaranteeObligationsCurrentCarryingValue" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_GuaranteeObligationsCurrentCarryingValue" xlink:to="us-gaap_GuaranteeObligationsCurrentCarryingValue_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_GuaranteeObligationsCurrentCarryingValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Guarantor Obligations, Current Carrying Value</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_GuaranteeObligationsCurrentCarryingValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Bank guarantees and letters of credit outstanding</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LineOfCreditFacilityRemainingBorrowingCapacity" xlink:label="us-gaap_LineOfCreditFacilityRemainingBorrowingCapacity" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LineOfCreditFacilityRemainingBorrowingCapacity" xlink:to="us-gaap_LineOfCreditFacilityRemainingBorrowingCapacity_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LineOfCreditFacilityRemainingBorrowingCapacity_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Line of Credit Facility, Remaining Borrowing Capacity</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_LineOfCreditFacilityRemainingBorrowingCapacity_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Unused bank guarantees and letters of credit</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentTable" xlink:label="us-gaap_DebtInstrumentTable" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DebtInstrumentTable" xlink:to="us-gaap_DebtInstrumentTable_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DebtInstrumentTable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Long-term Debt Instruments [Table]</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_ConvertibleSeniorUnsecuredNotesDue2023Member" xlink:label="veco_ConvertibleSeniorUnsecuredNotesDue2023Member" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_ConvertibleSeniorUnsecuredNotesDue2023Member" xlink:to="veco_ConvertibleSeniorUnsecuredNotesDue2023Member_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_ConvertibleSeniorUnsecuredNotesDue2023Member_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Convertible Senior Unsecured Notes, Due 2023 (2023 Notes).</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_ConvertibleSeniorUnsecuredNotesDue2023Member_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">2023 Notes</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentLineItems" xlink:label="us-gaap_DebtInstrumentLineItems" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_DebtInstrumentLineItems_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DebtInstrumentLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt Instrument [Line Items]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DebtInstrumentLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentFaceAmount" xlink:label="us-gaap_DebtInstrumentFaceAmount" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DebtInstrumentFaceAmount" xlink:to="us-gaap_DebtInstrumentFaceAmount_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DebtInstrumentFaceAmount_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt Instrument, Face Amount</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DebtInstrumentFaceAmount_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Principal amount</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentInterestRateStatedPercentage" xlink:label="us-gaap_DebtInstrumentInterestRateStatedPercentage" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DebtInstrumentInterestRateStatedPercentage" xlink:to="us-gaap_DebtInstrumentInterestRateStatedPercentage_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DebtInstrumentInterestRateStatedPercentage_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt Instrument, Interest Rate, Stated Percentage</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DebtInstrumentInterestRateStatedPercentage_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Interest rate (as a percent)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ExtinguishmentOfDebtAmount" xlink:label="us-gaap_ExtinguishmentOfDebtAmount" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ExtinguishmentOfDebtAmount" xlink:to="us-gaap_ExtinguishmentOfDebtAmount_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ExtinguishmentOfDebtAmount_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Extinguishment of Debt, Amount</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ExtinguishmentOfDebtAmount_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Repurchased and retired amount</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_DebtInstrumentCarryingAmountDebtExtinguished" xlink:label="veco_DebtInstrumentCarryingAmountDebtExtinguished" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_DebtInstrumentCarryingAmountDebtExtinguished" xlink:to="veco_DebtInstrumentCarryingAmountDebtExtinguished_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_DebtInstrumentCarryingAmountDebtExtinguished_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Carrying amount of debt extinguished (decrease in carrying amount of debt).</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_DebtInstrumentCarryingAmountDebtExtinguished_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt Instrument Carrying Amount, Debt Extinguished</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_DebtInstrumentCarryingAmountDebtExtinguished_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Carrying amount of debt extinguished</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_InterestPayableCurrentAndNoncurrent" xlink:label="us-gaap_InterestPayableCurrentAndNoncurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InterestPayableCurrentAndNoncurrent" xlink:to="us-gaap_InterestPayableCurrentAndNoncurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_InterestPayableCurrentAndNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Interest Payable</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_InterestPayableCurrentAndNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accrued and unpaid interest</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentConvertibleConversionRatio1" xlink:label="us-gaap_DebtInstrumentConvertibleConversionRatio1" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DebtInstrumentConvertibleConversionRatio1" xlink:to="us-gaap_DebtInstrumentConvertibleConversionRatio1_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DebtInstrumentConvertibleConversionRatio1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt Instrument, Convertible, Conversion Ratio</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_DebtInstrumentConvertibleConversionRatio1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Conversion rate</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_DebtInstrumentPrincipalAmountDenominationForConversionIntoCommonStock" xlink:label="veco_DebtInstrumentPrincipalAmountDenominationForConversionIntoCommonStock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_DebtInstrumentPrincipalAmountDenominationForConversionIntoCommonStock" xlink:to="veco_DebtInstrumentPrincipalAmountDenominationForConversionIntoCommonStock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_DebtInstrumentPrincipalAmountDenominationForConversionIntoCommonStock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents the multiples of the principal amount of debt that holders may convert at their option under circumstances specified under the agreement.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_DebtInstrumentPrincipalAmountDenominationForConversionIntoCommonStock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt Instrument Principal Amount Denomination For Conversion Into Common Stock</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_DebtInstrumentPrincipalAmountDenominationForConversionIntoCommonStock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Multiples of principal holders may convert</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentConvertibleConversionPrice1" xlink:label="us-gaap_DebtInstrumentConvertibleConversionPrice1" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DebtInstrumentConvertibleConversionPrice1" xlink:to="us-gaap_DebtInstrumentConvertibleConversionPrice1_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DebtInstrumentConvertibleConversionPrice1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt Instrument, Convertible, Conversion Price</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_DebtInstrumentConvertibleConversionPrice1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Conversion price (in dollars per share)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentConvertibleThresholdTradingDays" xlink:label="us-gaap_DebtInstrumentConvertibleThresholdTradingDays" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DebtInstrumentConvertibleThresholdTradingDays" xlink:to="us-gaap_DebtInstrumentConvertibleThresholdTradingDays_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DebtInstrumentConvertibleThresholdTradingDays_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt Instrument, Convertible, Threshold Trading Days</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_DebtInstrumentConvertibleThresholdTradingDays_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Trading days</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentConvertibleThresholdConsecutiveTradingDays1" xlink:label="us-gaap_DebtInstrumentConvertibleThresholdConsecutiveTradingDays1" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DebtInstrumentConvertibleThresholdConsecutiveTradingDays1" xlink:to="us-gaap_DebtInstrumentConvertibleThresholdConsecutiveTradingDays1_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DebtInstrumentConvertibleThresholdConsecutiveTradingDays1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt Instrument, Convertible, Threshold Consecutive Trading Days</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_DebtInstrumentConvertibleThresholdConsecutiveTradingDays1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Consecutive trading days</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentConvertibleThresholdPercentageOfStockPriceTrigger" xlink:label="us-gaap_DebtInstrumentConvertibleThresholdPercentageOfStockPriceTrigger" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DebtInstrumentConvertibleThresholdPercentageOfStockPriceTrigger" xlink:to="us-gaap_DebtInstrumentConvertibleThresholdPercentageOfStockPriceTrigger_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DebtInstrumentConvertibleThresholdPercentageOfStockPriceTrigger_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt Instrument, Convertible, Threshold Percentage of Stock Price Trigger</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DebtInstrumentConvertibleThresholdPercentageOfStockPriceTrigger_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Stock price trigger (as a percent)</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_DebtInstrumentNumberOfConsecutiveBusinessDays" xlink:label="veco_DebtInstrumentNumberOfConsecutiveBusinessDays" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_DebtInstrumentNumberOfConsecutiveBusinessDays" xlink:to="veco_DebtInstrumentNumberOfConsecutiveBusinessDays_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_DebtInstrumentNumberOfConsecutiveBusinessDays_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Period of time between issuance and maturity of debt instrument, in PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_DebtInstrumentNumberOfConsecutiveBusinessDays_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt Instrument, Number of Consecutive Business Days</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_DebtInstrumentNumberOfConsecutiveBusinessDays_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Number of consecutive business days</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_DebtInstrumentsConvertibleFeaturesMaximumPercentageOfCommonStockCouldBeConverted" xlink:label="veco_DebtInstrumentsConvertibleFeaturesMaximumPercentageOfCommonStockCouldBeConverted" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_DebtInstrumentsConvertibleFeaturesMaximumPercentageOfCommonStockCouldBeConverted" xlink:to="veco_DebtInstrumentsConvertibleFeaturesMaximumPercentageOfCommonStockCouldBeConverted_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_DebtInstrumentsConvertibleFeaturesMaximumPercentageOfCommonStockCouldBeConverted_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Maximum percentage of common stock converted.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_DebtInstrumentsConvertibleFeaturesMaximumPercentageOfCommonStockCouldBeConverted_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt Instruments, Convertible Features , Maximum Percentage of Common Stock could be Converted</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_DebtInstrumentsConvertibleFeaturesMaximumPercentageOfCommonStockCouldBeConverted_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Maximum percentage of common stock conversion</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LongTermDebtMeasurementInput" xlink:label="us-gaap_LongTermDebtMeasurementInput" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LongTermDebtMeasurementInput" xlink:to="us-gaap_LongTermDebtMeasurementInput_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LongTermDebtMeasurementInput_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Long-Term Debt, Measurement Input [Extensible Enumeration]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LongTermDebtMeasurementInput_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Measurement input</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LongTermDebtMeasurementInputExtensibleList" xlink:label="us-gaap_LongTermDebtMeasurementInputExtensibleList" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LongTermDebtMeasurementInputExtensibleList" xlink:to="us-gaap_LongTermDebtMeasurementInputExtensibleList_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LongTermDebtMeasurementInputExtensibleList_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Long-term Debt, Measurement Input [Extensible List]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LongTermDebtMeasurementInputExtensibleList_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Long-term Debt, Measurement Input</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentUnamortizedDiscount" xlink:label="us-gaap_DebtInstrumentUnamortizedDiscount" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DebtInstrumentUnamortizedDiscount" xlink:to="us-gaap_DebtInstrumentUnamortizedDiscount_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DebtInstrumentUnamortizedDiscount_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt Instrument, Unamortized Discount</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_DebtInstrumentUnamortizedDiscount_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt discount</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_DebtIssuanceCostsTransactionCostsAllocatedToEquityComponent" xlink:label="veco_DebtIssuanceCostsTransactionCostsAllocatedToEquityComponent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_DebtIssuanceCostsTransactionCostsAllocatedToEquityComponent" xlink:to="veco_DebtIssuanceCostsTransactionCostsAllocatedToEquityComponent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_DebtIssuanceCostsTransactionCostsAllocatedToEquityComponent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">The amount of Transaction costs allocated to the equity component .</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_DebtIssuanceCostsTransactionCostsAllocatedToEquityComponent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt Issuance Costs , Transaction Costs Allocated to The Equity Component</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_DebtIssuanceCostsTransactionCostsAllocatedToEquityComponent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Transaction costs allocated to the equity component</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentUnamortizedDiscountPremiumAndDebtIssuanceCostsNet" xlink:label="us-gaap_DebtInstrumentUnamortizedDiscountPremiumAndDebtIssuanceCostsNet" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DebtInstrumentUnamortizedDiscountPremiumAndDebtIssuanceCostsNet" xlink:to="us-gaap_DebtInstrumentUnamortizedDiscountPremiumAndDebtIssuanceCostsNet_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DebtInstrumentUnamortizedDiscountPremiumAndDebtIssuanceCostsNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt Instrument, Unamortized Discount (Premium) and Debt Issuance Costs, Net</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_DebtInstrumentUnamortizedDiscountPremiumAndDebtIssuanceCostsNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Unamortized debt discount/transaction costs</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LongTermDebt" xlink:label="us-gaap_LongTermDebt" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LongTermDebt" xlink:to="us-gaap_LongTermDebt_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LongTermDebt_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Long-term Debt</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_LongTermDebt_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net carrying value</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_CashInterestExpenseAbstract" xlink:label="veco_CashInterestExpenseAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_CashInterestExpenseAbstract" xlink:to="veco_CashInterestExpenseAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_CashInterestExpenseAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">No definition available.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_CashInterestExpenseAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cash Interest Expense</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_InterestExpenseDebtExcludingAmortization" xlink:label="us-gaap_InterestExpenseDebtExcludingAmortization" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InterestExpenseDebtExcludingAmortization" xlink:to="us-gaap_InterestExpenseDebtExcludingAmortization_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_InterestExpenseDebtExcludingAmortization_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Interest Expense, Debt, Excluding Amortization</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_InterestExpenseDebtExcludingAmortization_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Coupon interest expense</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_NonCashInterestExpenseAbstract" xlink:label="veco_NonCashInterestExpenseAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_NonCashInterestExpenseAbstract" xlink:to="veco_NonCashInterestExpenseAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_NonCashInterestExpenseAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">No definition available.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_NonCashInterestExpenseAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Non-Cash Interest Expense</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_InterestExpenseDebt" xlink:label="us-gaap_InterestExpenseDebt" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InterestExpenseDebt" xlink:to="us-gaap_InterestExpenseDebt_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_InterestExpenseDebt_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Interest Expense, Debt</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_InterestExpenseDebt_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total Interest Expense</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ConvertibleDebtFairValueDisclosures" xlink:label="us-gaap_ConvertibleDebtFairValueDisclosures" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ConvertibleDebtFairValueDisclosures" xlink:to="us-gaap_ConvertibleDebtFairValueDisclosures_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ConvertibleDebtFairValueDisclosures_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Convertible Debt, Fair Value Disclosures</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ConvertibleDebtFairValueDisclosures_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Estimated fair value</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ConvertibleDebtFairValueByFairValueHierarchyLevelExtensibleList" xlink:label="us-gaap_ConvertibleDebtFairValueByFairValueHierarchyLevelExtensibleList" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ConvertibleDebtFairValueByFairValueHierarchyLevelExtensibleList" xlink:to="us-gaap_ConvertibleDebtFairValueByFairValueHierarchyLevelExtensibleList_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ConvertibleDebtFairValueByFairValueHierarchyLevelExtensibleList_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt Instrument, Convertible, Fair Value by Fair Value Hierarchy Level [Extensible Enumeration]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ConvertibleDebtFairValueByFairValueHierarchyLevelExtensibleList_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Convertible Debt, Fair Value by Fair Value Hierarchy Level</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DerivativeInstrumentRiskAxis" xlink:label="us-gaap_DerivativeInstrumentRiskAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DerivativeInstrumentRiskAxis" xlink:to="us-gaap_DerivativeInstrumentRiskAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DerivativeInstrumentRiskAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Derivative Instrument [Axis]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DerivativeContractTypeDomain" xlink:label="us-gaap_DerivativeContractTypeDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DerivativeContractTypeDomain" xlink:to="us-gaap_DerivativeContractTypeDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DerivativeContractTypeDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Derivative Contract [Domain]</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_DerivativeContractCappedCallMember" xlink:label="veco_DerivativeContractCappedCallMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_DerivativeContractCappedCallMember" xlink:to="veco_DerivativeContractCappedCallMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_DerivativeContractCappedCallMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Capped call contract.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_DerivativeContractCappedCallMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Capped Call Transactions</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_CappedCallTransactionsPrice" xlink:label="veco_CappedCallTransactionsPrice" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_CappedCallTransactionsPrice" xlink:to="veco_CappedCallTransactionsPrice_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_CappedCallTransactionsPrice_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Aggregate price of capped call transaction.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_CappedCallTransactionsPrice_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Capped Call Transactions, Price</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_CappedCallTransactionsPrice_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Aggregate price of capped call transaction</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_CappedCallTransactionsCapPrice" xlink:label="veco_CappedCallTransactionsCapPrice" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_CappedCallTransactionsCapPrice" xlink:to="veco_CappedCallTransactionsCapPrice_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_CappedCallTransactionsCapPrice_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cap price of the capped call transactions.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_CappedCallTransactionsCapPrice_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Capped Call Transactions, Cap Price</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_CappedCallTransactionsCapPrice_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cap price of the capped call transactions (in dollars per share)</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_RevolvingCreditFacilityDecember2021Member" xlink:label="veco_RevolvingCreditFacilityDecember2021Member" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_RevolvingCreditFacilityDecember2021Member" xlink:to="veco_RevolvingCreditFacilityDecember2021Member_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_RevolvingCreditFacilityDecember2021Member_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Revolving Credit Facility, entered into December 16, 2021.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_RevolvingCreditFacilityDecember2021Member_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Credit Facility</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_RevolvingCreditFacilityDecember2021LetterOfCreditMember" xlink:label="veco_RevolvingCreditFacilityDecember2021LetterOfCreditMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_RevolvingCreditFacilityDecember2021LetterOfCreditMember" xlink:to="veco_RevolvingCreditFacilityDecember2021LetterOfCreditMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_RevolvingCreditFacilityDecember2021LetterOfCreditMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Revolving Credit Facility Letter of Credit, entered into December 16, 2021.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_RevolvingCreditFacilityDecember2021LetterOfCreditMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Credit Facility, Letter of Credit</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_VariableRateAxis" xlink:label="us-gaap_VariableRateAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_VariableRateAxis" xlink:to="us-gaap_VariableRateAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_VariableRateAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Variable Rate [Axis]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_VariableRateDomain" xlink:label="us-gaap_VariableRateDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_VariableRateDomain" xlink:to="us-gaap_VariableRateDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_VariableRateDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Variable Rate [Domain]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_BaseRateMember" xlink:label="us-gaap_BaseRateMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_BaseRateMember" xlink:to="us-gaap_BaseRateMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_BaseRateMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Base rate</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SecuredOvernightFinancingRateSofrOvernightIndexSwapRateMember" xlink:label="us-gaap_SecuredOvernightFinancingRateSofrOvernightIndexSwapRateMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SecuredOvernightFinancingRateSofrOvernightIndexSwapRateMember" xlink:to="us-gaap_SecuredOvernightFinancingRateSofrOvernightIndexSwapRateMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_SecuredOvernightFinancingRateSofrOvernightIndexSwapRateMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">SOFR</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity" xlink:label="us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity" xlink:to="us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Line of Credit Facility, Maximum Borrowing Capacity</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Borrowing capacity</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentTerm" xlink:label="us-gaap_DebtInstrumentTerm" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DebtInstrumentTerm" xlink:to="us-gaap_DebtInstrumentTerm_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DebtInstrumentTerm_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt Instrument, Term</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DebtInstrumentTerm_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt instrument term</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_LineOfCreditFacilityContingentIncreaseAdditionalBorrowingCapacity" xlink:label="veco_LineOfCreditFacilityContingentIncreaseAdditionalBorrowingCapacity" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_LineOfCreditFacilityContingentIncreaseAdditionalBorrowingCapacity" xlink:to="veco_LineOfCreditFacilityContingentIncreaseAdditionalBorrowingCapacity_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_LineOfCreditFacilityContingentIncreaseAdditionalBorrowingCapacity_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">The contingent increase above the maximum borrowing capacity under the credit facility, if any one or more of the existing banks or new banks agree to provide such increased commitment amount.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_LineOfCreditFacilityContingentIncreaseAdditionalBorrowingCapacity_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Line of Credit Facility Contingent Increase, Additional Borrowing Capacity</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_LineOfCreditFacilityContingentIncreaseAdditionalBorrowingCapacity_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Additional increase in borrowing subject to certain conditions</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentBasisSpreadOnVariableRate1" xlink:label="us-gaap_DebtInstrumentBasisSpreadOnVariableRate1" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DebtInstrumentBasisSpreadOnVariableRate1" xlink:to="us-gaap_DebtInstrumentBasisSpreadOnVariableRate1_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DebtInstrumentBasisSpreadOnVariableRate1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt Instrument, Basis Spread on Variable Rate</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DebtInstrumentBasisSpreadOnVariableRate1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Basis spread on base rate (as a percent)</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_DebtInstrumentFloorRate" xlink:label="veco_DebtInstrumentFloorRate" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_DebtInstrumentFloorRate" xlink:to="veco_DebtInstrumentFloorRate_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_DebtInstrumentFloorRate_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Floor rate on debt instrument.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_DebtInstrumentFloorRate_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt Instrument Floor Rate</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_DebtInstrumentFloorRate_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Floor rate on debt instrument (as a percent)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LineOfCreditFacilityUnusedCapacityCommitmentFeePercentage" xlink:label="us-gaap_LineOfCreditFacilityUnusedCapacityCommitmentFeePercentage" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LineOfCreditFacilityUnusedCapacityCommitmentFeePercentage" xlink:to="us-gaap_LineOfCreditFacilityUnusedCapacityCommitmentFeePercentage_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LineOfCreditFacilityUnusedCapacityCommitmentFeePercentage_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Line of Credit Facility, Unused Capacity, Commitment Fee Percentage</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LineOfCreditFacilityUnusedCapacityCommitmentFeePercentage_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Unused commitment fee percentage (as a percent)</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_DebtInstrumentInterestCoverageRatio" xlink:label="veco_DebtInstrumentInterestCoverageRatio" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_DebtInstrumentInterestCoverageRatio" xlink:to="veco_DebtInstrumentInterestCoverageRatio_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_DebtInstrumentInterestCoverageRatio_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Interest coverage ratio, as defined by the agreement.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_DebtInstrumentInterestCoverageRatio_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt Instrument, Interest Coverage Ratio</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_DebtInstrumentInterestCoverageRatio_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Interest coverage ratio</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_DebtInstrumentTotalNetLeverageRatio" xlink:label="veco_DebtInstrumentTotalNetLeverageRatio" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_DebtInstrumentTotalNetLeverageRatio" xlink:to="veco_DebtInstrumentTotalNetLeverageRatio_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_DebtInstrumentTotalNetLeverageRatio_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total net leverage ratio, as defined by the agreement.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_DebtInstrumentTotalNetLeverageRatio_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt Instrument, Total Net Leverage Ratio</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_DebtInstrumentTotalNetLeverageRatio_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total net leverage ratio</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_DebtInstrumentSecuredNetLeverageRatio" xlink:label="veco_DebtInstrumentSecuredNetLeverageRatio" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_DebtInstrumentSecuredNetLeverageRatio" xlink:to="veco_DebtInstrumentSecuredNetLeverageRatio_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_DebtInstrumentSecuredNetLeverageRatio_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Secured net leverage ratio, as defined by the agreement.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_DebtInstrumentSecuredNetLeverageRatio_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt Instrument, Secured Net Leverage Ratio</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_DebtInstrumentSecuredNetLeverageRatio_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Secured net leverage ratio</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LineOfCreditFacilityMaximumAmountOutstandingDuringPeriod" xlink:label="us-gaap_LineOfCreditFacilityMaximumAmountOutstandingDuringPeriod" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LineOfCreditFacilityMaximumAmountOutstandingDuringPeriod" xlink:to="us-gaap_LineOfCreditFacilityMaximumAmountOutstandingDuringPeriod_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LineOfCreditFacilityMaximumAmountOutstandingDuringPeriod_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Line of Credit Facility, Maximum Amount Outstanding During Period</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LineOfCreditFacilityMaximumAmountOutstandingDuringPeriod_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Outstanding amount</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeLossTable" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossTable" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AccumulatedOtherComprehensiveIncomeLossTable" xlink:to="us-gaap_AccumulatedOtherComprehensiveIncomeLossTable_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossTable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accumulated Other Comprehensive Income (Loss) [Table]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AccumulatedTranslationAdjustmentMember" xlink:label="us-gaap_AccumulatedTranslationAdjustmentMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AccumulatedTranslationAdjustmentMember" xlink:to="us-gaap_AccumulatedTranslationAdjustmentMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AccumulatedTranslationAdjustmentMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Foreign Currency Translation</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AccumulatedTranslationAdjustmentMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Foreign Currency Translation</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AccumulatedNetUnrealizedInvestmentGainLossMember" xlink:label="us-gaap_AccumulatedNetUnrealizedInvestmentGainLossMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AccumulatedNetUnrealizedInvestmentGainLossMember" xlink:to="us-gaap_AccumulatedNetUnrealizedInvestmentGainLossMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AccumulatedNetUnrealizedInvestmentGainLossMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Unrealized gain on available for sale securities</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AccumulatedNetUnrealizedInvestmentGainLossMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Unrealized Gains (Losses) on Available for Sale Securities</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeLossLineItems" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossLineItems" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AccumulatedOtherComprehensiveIncomeLossLineItems" xlink:to="us-gaap_AccumulatedOtherComprehensiveIncomeLossLineItems_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accumulated Other Comprehensive Income (Loss) [Line Items]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accumulated Other Comprehensive Income</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AOCIAttributableToParentNetOfTaxRollForward" xlink:label="us-gaap_AOCIAttributableToParentNetOfTaxRollForward" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AOCIAttributableToParentNetOfTaxRollForward" xlink:to="us-gaap_AOCIAttributableToParentNetOfTaxRollForward_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AOCIAttributableToParentNetOfTaxRollForward_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accumulated Other Comprehensive Income (Loss), Net of Tax [Roll Forward]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AOCIAttributableToParentNetOfTaxRollForward_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Changes in the balances of each component of AOCI</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:label="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:to="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Share-based Compensation Arrangements by Share-based Payment Award [Table]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AwardTypeAxis" xlink:label="us-gaap_AwardTypeAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AwardTypeAxis" xlink:to="us-gaap_AwardTypeAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AwardTypeAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Award Type [Axis]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xlink:label="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xlink:to="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Equity Award [Domain]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_EmployeeStockOptionMember" xlink:label="us-gaap_EmployeeStockOptionMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EmployeeStockOptionMember" xlink:to="us-gaap_EmployeeStockOptionMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_EmployeeStockOptionMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Stock options</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_RestrictedStockAwardsAndRestrictedStockUnitsMember" xlink:label="veco_RestrictedStockAwardsAndRestrictedStockUnitsMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_RestrictedStockAwardsAndRestrictedStockUnitsMember" xlink:to="veco_RestrictedStockAwardsAndRestrictedStockUnitsMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_RestrictedStockAwardsAndRestrictedStockUnitsMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Restricted stock awards and restricted stock units awarded by a company to their employees as a form of incentive compensation.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_RestrictedStockAwardsAndRestrictedStockUnitsMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Restricted Stock Awards and Restricted Stock Units</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_RestrictedStockUnitsRSUMember" xlink:label="us-gaap_RestrictedStockUnitsRSUMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RestrictedStockUnitsRSUMember" xlink:to="us-gaap_RestrictedStockUnitsRSUMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_RestrictedStockUnitsRSUMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Restricted stock units</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_RsuAndPsuAwardsMember" xlink:label="veco_RsuAndPsuAwardsMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_RsuAndPsuAwardsMember" xlink:to="veco_RsuAndPsuAwardsMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_RsuAndPsuAwardsMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">RSU and PSU awards.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_RsuAndPsuAwardsMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">RSUs and PSUs</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PlanNameAxis" xlink:label="us-gaap_PlanNameAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PlanNameAxis" xlink:to="us-gaap_PlanNameAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PlanNameAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Plan Name [Axis]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PlanNameDomain" xlink:label="us-gaap_PlanNameDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PlanNameDomain" xlink:to="us-gaap_PlanNameDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PlanNameDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Plan Name [Domain]</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_InducementStockIncentivePlan2013Member" xlink:label="veco_InducementStockIncentivePlan2013Member" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_InducementStockIncentivePlan2013Member" xlink:to="veco_InducementStockIncentivePlan2013Member_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_InducementStockIncentivePlan2013Member_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents the details pertaining to the entity's 2013 Inducement Stock Incentive Plan.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_InducementStockIncentivePlan2013Member_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Inducement Plan</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_StockIncentivePlan2010Member" xlink:label="veco_StockIncentivePlan2010Member" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_StockIncentivePlan2010Member" xlink:to="veco_StockIncentivePlan2010Member_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_StockIncentivePlan2010Member_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents the details pertaining to the entity's 2010 stock incentive plan that replaced the 2000 stock incentive plan, as the entity's active stock plan which, following the 2019 amendment, was renamed the 2019 Stock Incentive Plan.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_StockIncentivePlan2010Member_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">2019 Plan</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award [Line Items]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based compensation</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriod" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriod" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriod" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriod_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriod_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Options, Grants in Period, Net of Forfeitures</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriod_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Awards granted (in shares)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Grants in Period</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Granted (in shares)</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Awards granted (in shares)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Award Vesting Period</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Vesting period</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod" xlink:to="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Expiration Period</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Expiration term</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Number of Shares Available for Grant</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Awards available for grant (in shares)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Number</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Outstanding at the end of the period (in shares)</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Outstanding at the beginning of the period (in shares)</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Number of options outstanding (in shares)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNonOptionEquityInstrumentsOutstandingNumber" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNonOptionEquityInstrumentsOutstandingNumber" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNonOptionEquityInstrumentsOutstandingNumber" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNonOptionEquityInstrumentsOutstandingNumber_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNonOptionEquityInstrumentsOutstandingNumber_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Non-Option Equity Instruments, Outstanding, Number</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNonOptionEquityInstrumentsOutstandingNumber_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Number of awards outstanding (in shares)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Number of Shares Authorized</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Number of shares authorized</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_EmployeeStockPurchasePlan2016Member" xlink:label="veco_EmployeeStockPurchasePlan2016Member" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_EmployeeStockPurchasePlan2016Member" xlink:to="veco_EmployeeStockPurchasePlan2016Member_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_EmployeeStockPurchasePlan2016Member_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents the details pertaining the entity's 2016 employee stock purchase plan.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_EmployeeStockPurchasePlan2016Member_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">ESPP</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardPurchasePriceOfCommonStockPercent" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardPurchasePriceOfCommonStockPercent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardPurchasePriceOfCommonStockPercent" xlink:to="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardPurchasePriceOfCommonStockPercent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardPurchasePriceOfCommonStockPercent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Purchase Price of Common Stock, Percent</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardPurchasePriceOfCommonStockPercent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share price (as a percent)</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferPeriod" xlink:label="veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferPeriod" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferPeriod" xlink:to="veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferPeriod_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferPeriod_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Duration of offer period under the plan, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days. Includes, but not limited to, weeks in a year or quarter.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferPeriod_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Offer Period</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferPeriod_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Offer period</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_SharesReservedForFutureIssuanceAbstract" xlink:label="veco_SharesReservedForFutureIssuanceAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_SharesReservedForFutureIssuanceAbstract" xlink:to="veco_SharesReservedForFutureIssuanceAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_SharesReservedForFutureIssuanceAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Shares Reserved For Future Issuance</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_SharesReservedForFutureIssuanceAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Shares Reserved For Future Issuance Abstract</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_SharesReservedForFutureIssuanceAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Shares reserved for future issuance</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CommonStockCapitalSharesReservedForFutureIssuance" xlink:label="us-gaap_CommonStockCapitalSharesReservedForFutureIssuance" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CommonStockCapitalSharesReservedForFutureIssuance" xlink:to="us-gaap_CommonStockCapitalSharesReservedForFutureIssuance_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CommonStockCapitalSharesReservedForFutureIssuance_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Common Stock, Capital Shares Reserved for Future Issuance</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_CommonStockCapitalSharesReservedForFutureIssuance_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total shares reserved</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CostOfSalesMember" xlink:label="us-gaap_CostOfSalesMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CostOfSalesMember" xlink:to="us-gaap_CostOfSalesMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CostOfSalesMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cost of sales</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ResearchAndDevelopmentExpenseMember" xlink:label="us-gaap_ResearchAndDevelopmentExpenseMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ResearchAndDevelopmentExpenseMember" xlink:to="us-gaap_ResearchAndDevelopmentExpenseMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ResearchAndDevelopmentExpenseMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Research and development</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SellingGeneralAndAdministrativeExpensesMember" xlink:label="us-gaap_SellingGeneralAndAdministrativeExpensesMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SellingGeneralAndAdministrativeExpensesMember" xlink:to="us-gaap_SellingGeneralAndAdministrativeExpensesMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_SellingGeneralAndAdministrativeExpensesMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Selling, general and administrative</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract" xlink:to="us-gaap_EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Employee Service Share-based Compensation, Aggregate Disclosures [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Recognized share-based compensation</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AllocatedShareBasedCompensationExpense" xlink:label="us-gaap_AllocatedShareBasedCompensationExpense" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AllocatedShareBasedCompensationExpense" xlink:to="us-gaap_AllocatedShareBasedCompensationExpense_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AllocatedShareBasedCompensationExpense_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Allocated Share-based Compensation Expense</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_AllocatedShareBasedCompensationExpense_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total share-based compensation expense</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense" xlink:to="us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-Based Payment Arrangement, Expense, Tax Benefit</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based compensation tax benefit</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_RestrictedStockAwardMember" xlink:label="veco_RestrictedStockAwardMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_RestrictedStockAwardMember" xlink:to="veco_RestrictedStockAwardMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_RestrictedStockAwardMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents the information pertaining to restricted stock awards member.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_RestrictedStockAwardMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Restricted Stock Awards</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_PerformanceShareUnitsMember" xlink:label="veco_PerformanceShareUnitsMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_PerformanceShareUnitsMember" xlink:to="veco_PerformanceShareUnitsMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_PerformanceShareUnitsMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents the information pertaining to performance share units member.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_PerformanceShareUnitsMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Performance Share Units</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedAbstract" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedAbstract" xlink:to="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Employee Service Share-based Compensation, Nonvested Awards, Compensation Cost Not yet Recognized [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Unrecognized share-based compensation costs</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized" xlink:to="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Employee Service Share-based Compensation, Nonvested Awards, Compensation Cost Not yet Recognized</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Unrecognized Share-Based Compensation Costs</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1" xlink:to="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Employee Service Share-based Compensation, Nonvested Awards, Compensation Cost Not yet Recognized, Period for Recognition</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Weighted Average Period Expected to be Recognized</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding [Roll Forward]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Number of Shares</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised" xlink:label="us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised" xlink:to="us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Options, Exercises in Period</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Exercised (in shares)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresAndExpirationsInPeriod" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresAndExpirationsInPeriod" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresAndExpirationsInPeriod" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresAndExpirationsInPeriod_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresAndExpirationsInPeriod_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Options, Forfeitures and Expirations in Period</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresAndExpirationsInPeriod_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Expired (in shares)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAdditionalDisclosuresAbstract" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAdditionalDisclosuresAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAdditionalDisclosuresAbstract" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAdditionalDisclosuresAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAdditionalDisclosuresAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Options, Additional Disclosures [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAdditionalDisclosuresAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Weighted Average Exercise Price</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Weighted Average Exercise Price</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Outstanding at the end of the period (in dollars per share)</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Outstanding at the beginning of the period (in dollars per share)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice" xlink:label="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice" xlink:to="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangements by Share-based Payment Award, Options, Exercises in Period, Weighted Average Exercise Price</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Exercised (in dollars per share)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresAndExpirationsInPeriodWeightedAverageExercisePrice" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresAndExpirationsInPeriodWeightedAverageExercisePrice" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresAndExpirationsInPeriodWeightedAverageExercisePrice" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresAndExpirationsInPeriodWeightedAverageExercisePrice_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresAndExpirationsInPeriodWeightedAverageExercisePrice_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Options, Forfeitures and Expirations in Period, Weighted Average Exercise Price</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresAndExpirationsInPeriodWeightedAverageExercisePrice_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Expired (in dollars per share)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeTable" xlink:label="us-gaap_ScheduleOfShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeTable" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeTable" xlink:to="us-gaap_ScheduleOfShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeTable_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ScheduleOfShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeTable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Share-based Compensation, Shares Authorized under Stock Option Plans, by Exercise Price Range [Table]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis" xlink:label="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis" xlink:to="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Exercise Price Range [Axis]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeDomain" xlink:label="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeDomain" xlink:to="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range [Domain]</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_RangeOfExercisePricesRangeOneMember" xlink:label="veco_RangeOfExercisePricesRangeOneMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_RangeOfExercisePricesRangeOneMember" xlink:to="veco_RangeOfExercisePricesRangeOneMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_RangeOfExercisePricesRangeOneMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents information pertaining to the first range of stock option exercise prices.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_RangeOfExercisePricesRangeOneMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">$20.00 - $30.00</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_RangeOfExercisePricesRangeTwoMember" xlink:label="veco_RangeOfExercisePricesRangeTwoMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_RangeOfExercisePricesRangeTwoMember" xlink:to="veco_RangeOfExercisePricesRangeTwoMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_RangeOfExercisePricesRangeTwoMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents information pertaining to the second range of stock option exercise prices.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_RangeOfExercisePricesRangeTwoMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">$30.01 - $40.00</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLineItems" xlink:label="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLineItems" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLineItems" xlink:to="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLineItems_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range [Line Items]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Stock plans</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLowerRangeLimit" xlink:label="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLowerRangeLimit" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLowerRangeLimit" xlink:to="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLowerRangeLimit_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLowerRangeLimit_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range, Lower Range Limit</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLowerRangeLimit_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Exercise price, low end of range (in dollars per share)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeUpperRangeLimit" xlink:label="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeUpperRangeLimit" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeUpperRangeLimit" xlink:to="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeUpperRangeLimit_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeUpperRangeLimit_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range, Upper Range Limit</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeUpperRangeLimit_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Exercise price, high end of range (in dollars per share)</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsAbstract" xlink:label="veco_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsAbstract" xlink:to="veco_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">No definition available.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-Based Compensation, Shares Authorized under Stock Option Plans Exercise, Price Range Outstanding Options [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Options Outstanding</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfOutstandingOptions" xlink:label="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfOutstandingOptions" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfOutstandingOptions" xlink:to="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfOutstandingOptions_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfOutstandingOptions_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range, Number of Outstanding Options</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfOutstandingOptions_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Outstanding (in shares)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageRemainingContractualTerm2" xlink:label="us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageRemainingContractualTerm2" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageRemainingContractualTerm2" xlink:to="us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageRemainingContractualTerm2_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageRemainingContractualTerm2_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range, Outstanding Options, Weighted Average Remaining Contractual Term</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageRemainingContractualTerm2_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Weighted Average Remaining Contractual Life</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageExercisePriceBeginningBalance1" xlink:label="us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageExercisePriceBeginningBalance1" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageExercisePriceBeginningBalance1" xlink:to="us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageExercisePriceBeginningBalance1_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageExercisePriceBeginningBalance1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range, Outstanding Options, Weighted Average Exercise Price</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageExercisePriceBeginningBalance1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Weighted-Average Exercise Price (in dollars per share)</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsAbstract" xlink:label="veco_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsAbstract" xlink:to="veco_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share Based Compensation, Shares Authorized under Stock Option Plans Exercise, Price Range Exercisable Options [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Options Exercisable</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfExercisableOptions" xlink:label="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfExercisableOptions" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfExercisableOptions" xlink:to="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfExercisableOptions_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfExercisableOptions_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range, Number of Exercisable Options</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfExercisableOptions_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Outstanding (in shares)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageRemainingContractualTerm2" xlink:label="us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageRemainingContractualTerm2" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageRemainingContractualTerm2" xlink:to="us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageRemainingContractualTerm2_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageRemainingContractualTerm2_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range, Exercisable Options, Weighted Average Remaining Contractual Term</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageRemainingContractualTerm2_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Weighted Average Remaining Contractual life</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageExercisePrice1" xlink:label="us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageExercisePrice1" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageExercisePrice1" xlink:to="us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageExercisePrice1_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageExercisePrice1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range, Exercisable Options, Weighted Average Exercise Price</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageExercisePrice1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Weighted Average Exercise Price (in dollars per share)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsNonvestedNumberOfShares" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsNonvestedNumberOfShares" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsNonvestedNumberOfShares" xlink:to="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsNonvestedNumberOfShares_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsNonvestedNumberOfShares_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Options, Nonvested, Number of Shares</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsNonvestedNumberOfShares_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Unvested options outstanding (in shares)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ProceedsFromStockOptionsExercised" xlink:label="us-gaap_ProceedsFromStockOptionsExercised" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ProceedsFromStockOptionsExercised" xlink:to="us-gaap_ProceedsFromStockOptionsExercised_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ProceedsFromStockOptionsExercised_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Proceeds from Stock Options Exercised</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ProceedsFromStockOptionsExercised_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cash received from options exercised</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Options, Exercises in Period, Intrinsic Value</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Intrinsic value of options exercised</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember" xlink:label="veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember" xlink:to="veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Restricted stock awards, restricted stock units, performance stock awards and performance stock units awarded by a company to their employees as a form of incentive compensation.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">RSAs, RSUs, PSAs and PSUs</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Nonvested, Number of Shares [Roll Forward]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Number of Shares</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Nonvested, Number</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Outstanding at the end of the period (in shares)</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Outstanding at the beginning of the period (in shares)</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsPerformanceAwardAdjustmentsInPeriod" xlink:label="veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsPerformanceAwardAdjustmentsInPeriod" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsPerformanceAwardAdjustmentsInPeriod" xlink:to="veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsPerformanceAwardAdjustmentsInPeriod_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsPerformanceAwardAdjustmentsInPeriod_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">The number of performance award adjustments made during the period on other than stock (or unit) option plans resulting in decrease in awards outstanding.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsPerformanceAwardAdjustmentsInPeriod_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share Based Compensation Arrangement By Share Based Payment Award Equity Instruments Other Than Options Performance Award Adjustments In Period</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsPerformanceAwardAdjustmentsInPeriod_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Performance award adjustments (in shares)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Vested in Period</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Vested (in shares)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeitedInPeriod" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeitedInPeriod" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeitedInPeriod" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeitedInPeriod_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeitedInPeriod_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Forfeited in Period</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeitedInPeriod_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Forfeited (in shares)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsAdditionalDisclosuresAbstract" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsAdditionalDisclosuresAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsAdditionalDisclosuresAbstract" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsAdditionalDisclosuresAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsAdditionalDisclosuresAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Additional Disclosures [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsAdditionalDisclosuresAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Weighted Average Grant Date Fair Value</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Nonvested, Weighted Average Grant Date Fair Value</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Outstanding at the end of the period (in dollars per share)</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Outstanding at the beginning of the period (in dollars per share)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Grants in Period, Weighted Average Grant Date Fair Value</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Granted (in dollars per share)</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Weighted average fair value (in dollars per share)</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsPerformanceAwardAdjustmentsWeightedAverageGrantDateFairValue" xlink:label="veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsPerformanceAwardAdjustmentsWeightedAverageGrantDateFairValue" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsPerformanceAwardAdjustmentsWeightedAverageGrantDateFairValue" xlink:to="veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsPerformanceAwardAdjustmentsWeightedAverageGrantDateFairValue_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsPerformanceAwardAdjustmentsWeightedAverageGrantDateFairValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">The weighted average fair value of performance award adjustments during the period for nonvested equity-based awards other than stock (or unit) option plans.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsPerformanceAwardAdjustmentsWeightedAverageGrantDateFairValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share Based Compensation Arrangement By Share Based Payment Award Equity Instruments Other Than Options Performance Award Adjustments Weighted Average Grant Date Fair Value</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsPerformanceAwardAdjustmentsWeightedAverageGrantDateFairValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Performance award adjustments (in dollars per share)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Vested in Period, Weighted Average Grant Date Fair Value</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Vested (in dollars per share)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Forfeitures, Weighted Average Grant Date Fair Value</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Forfeited (in dollars per share)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodTotalFairValue" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodTotalFairValue" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodTotalFairValue" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodTotalFairValue_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodTotalFairValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Vested in Period, Fair Value</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodTotalFairValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total fair value of shares vested</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_PerformanceShareUnitsMarketConditionsMember" xlink:label="veco_PerformanceShareUnitsMarketConditionsMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_PerformanceShareUnitsMarketConditionsMember" xlink:to="veco_PerformanceShareUnitsMarketConditionsMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_PerformanceShareUnitsMarketConditionsMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Performance share awards with market conditions.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_PerformanceShareUnitsMarketConditionsMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Performance awards with market conditions</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Fair Value Assumptions and Methodology [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Assumptions</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Fair Value Assumptions, Expected Dividend Rate</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Dividend yield (as a percent)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsWeightedAverageVolatilityRate" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsWeightedAverageVolatilityRate" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsWeightedAverageVolatilityRate" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsWeightedAverageVolatilityRate_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsWeightedAverageVolatilityRate_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Fair Value Assumptions, Weighted Average Volatility Rate</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsWeightedAverageVolatilityRate_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Expected volatility factor (as a percent)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Fair Value Assumptions, Risk Free Interest Rate</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Risk-free interest rate (as a percent)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1" xlink:to="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Fair Value Assumptions, Expected Term</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Expected life (in years)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ProceedsFromIssuanceOfSharesUnderIncentiveAndShareBasedCompensationPlans" xlink:label="us-gaap_ProceedsFromIssuanceOfSharesUnderIncentiveAndShareBasedCompensationPlans" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ProceedsFromIssuanceOfSharesUnderIncentiveAndShareBasedCompensationPlans" xlink:to="us-gaap_ProceedsFromIssuanceOfSharesUnderIncentiveAndShareBasedCompensationPlans_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ProceedsFromIssuanceOfSharesUnderIncentiveAndShareBasedCompensationPlans_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Proceeds from Issuance of Shares under Incentive and Share-based Compensation Plans, Excluding Stock Options</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ProceedsFromIssuanceOfSharesUnderIncentiveAndShareBasedCompensationPlans_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cash proceeds</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans" xlink:label="us-gaap_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans" xlink:to="us-gaap_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Stock Issued During Period, Shares, Employee Stock Purchase Plans</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Number of shares issued</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DefinedContributionPlanTable" xlink:label="us-gaap_DefinedContributionPlanTable" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DefinedContributionPlanTable" xlink:to="us-gaap_DefinedContributionPlanTable_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DefinedContributionPlanTable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Defined Contribution Plan [Table]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DefinedContributionPlanDisclosureLineItems" xlink:label="us-gaap_DefinedContributionPlanDisclosureLineItems" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DefinedContributionPlanDisclosureLineItems" xlink:to="us-gaap_DefinedContributionPlanDisclosureLineItems_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DefinedContributionPlanDisclosureLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Defined Contribution Plan Disclosure [Line Items]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DefinedContributionPlanDisclosureLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Defined contribution plan disclosures</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DefinedContributionPlanEmployerMatchingContributionPercentOfMatch" xlink:label="us-gaap_DefinedContributionPlanEmployerMatchingContributionPercentOfMatch" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DefinedContributionPlanEmployerMatchingContributionPercentOfMatch" xlink:to="us-gaap_DefinedContributionPlanEmployerMatchingContributionPercentOfMatch_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DefinedContributionPlanEmployerMatchingContributionPercentOfMatch_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Defined Contribution Plan, Employer Matching Contribution, Percent of Match</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DefinedContributionPlanEmployerMatchingContributionPercentOfMatch_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Employer's matching contribution for every dollar the employees contribute (as a percent)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DefinedContributionPlanEmployerMatchingContributionPercent" xlink:label="us-gaap_DefinedContributionPlanEmployerMatchingContributionPercent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DefinedContributionPlanEmployerMatchingContributionPercent" xlink:to="us-gaap_DefinedContributionPlanEmployerMatchingContributionPercent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DefinedContributionPlanEmployerMatchingContributionPercent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Defined Contribution Plan, Employer Matching Contribution, Percent of Employees' Gross Pay</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_DefinedContributionPlanEmployerMatchingContributionPercent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Employer's contribution as a percentage of employee's eligible compensation</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_DefinedContributionPlanEmployerMatchingContributionVestingPeriod" xlink:label="veco_DefinedContributionPlanEmployerMatchingContributionVestingPeriod" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_DefinedContributionPlanEmployerMatchingContributionVestingPeriod" xlink:to="veco_DefinedContributionPlanEmployerMatchingContributionVestingPeriod_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_DefinedContributionPlanEmployerMatchingContributionVestingPeriod_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents the vesting period for employer's matching contribution.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_DefinedContributionPlanEmployerMatchingContributionVestingPeriod_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Defined Contribution Plan, Employer Matching Contribution, Vesting Period</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_DefinedContributionPlanEmployerMatchingContributionVestingPeriod_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Employer's matching contribution, vesting period (in years)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DefinedContributionPlanCostRecognized" xlink:label="us-gaap_DefinedContributionPlanCostRecognized" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DefinedContributionPlanCostRecognized" xlink:to="us-gaap_DefinedContributionPlanCostRecognized_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DefinedContributionPlanCostRecognized_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Defined Contribution Plan, Cost Recognized</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DefinedContributionPlanCostRecognized_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Aggregate employer's contribution to pension plans</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsTable" xlink:label="us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsTable" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsTable" xlink:to="us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsTable_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsTable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Disposal Groups, Including Discontinued Operations [Table]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsAxis" xlink:label="us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsAxis" xlink:to="us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Disposal Group Name [Axis]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DisposalGroupsIncludingDiscontinuedOperationsNameDomain" xlink:label="us-gaap_DisposalGroupsIncludingDiscontinuedOperationsNameDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DisposalGroupsIncludingDiscontinuedOperationsNameDomain" xlink:to="us-gaap_DisposalGroupsIncludingDiscontinuedOperationsNameDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DisposalGroupsIncludingDiscontinuedOperationsNameDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Disposal Group Name [Domain]</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_OneNonCoreProductLineMember" xlink:label="veco_OneNonCoreProductLineMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_OneNonCoreProductLineMember" xlink:to="veco_OneNonCoreProductLineMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_OneNonCoreProductLineMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">One Non-core product line of the entity.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_OneNonCoreProductLineMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">One non-core product line</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DisposalGroupClassificationAxis" xlink:label="us-gaap_DisposalGroupClassificationAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DisposalGroupClassificationAxis" xlink:to="us-gaap_DisposalGroupClassificationAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DisposalGroupClassificationAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Disposal Group Classification [Axis]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DisposalGroupClassificationDomain" xlink:label="us-gaap_DisposalGroupClassificationDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DisposalGroupClassificationDomain" xlink:to="us-gaap_DisposalGroupClassificationDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DisposalGroupClassificationDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Disposal Group Classification [Domain]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DisposalGroupDisposedOfBySaleNotDiscontinuedOperationsMember" xlink:label="us-gaap_DisposalGroupDisposedOfBySaleNotDiscontinuedOperationsMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DisposalGroupDisposedOfBySaleNotDiscontinuedOperationsMember" xlink:to="us-gaap_DisposalGroupDisposedOfBySaleNotDiscontinuedOperationsMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DisposalGroupDisposedOfBySaleNotDiscontinuedOperationsMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Assets sold</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsLineItems" xlink:label="us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsLineItems" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsLineItems" xlink:to="us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsLineItems_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Income Statement, Balance Sheet and Additional Disclosures by Disposal Groups, Including Discontinued Operations [Line Items]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Dispositions</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DisposalGroupIncludingDiscontinuedOperationConsideration" xlink:label="us-gaap_DisposalGroupIncludingDiscontinuedOperationConsideration" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DisposalGroupIncludingDiscontinuedOperationConsideration" xlink:to="us-gaap_DisposalGroupIncludingDiscontinuedOperationConsideration_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DisposalGroupIncludingDiscontinuedOperationConsideration_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Disposal Group, Including Discontinued Operation, Consideration</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DisposalGroupIncludingDiscontinuedOperationConsideration_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Consideration</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_PercentageOfTransactionPrice" xlink:label="veco_PercentageOfTransactionPrice" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_PercentageOfTransactionPrice" xlink:to="veco_PercentageOfTransactionPrice_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_PercentageOfTransactionPrice_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Percentage of transaction price due upon closing.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_PercentageOfTransactionPrice_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Percentage Of Transaction Price</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_PercentageOfTransactionPrice_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Transaction price due upon closing (as a percent)</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_PercentageOfAmountHeldInEscrow" xlink:label="veco_PercentageOfAmountHeldInEscrow" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_PercentageOfAmountHeldInEscrow" xlink:to="veco_PercentageOfAmountHeldInEscrow_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_PercentageOfAmountHeldInEscrow_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Percentage of amount held in escrow.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_PercentageOfAmountHeldInEscrow_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Percentage Of Amount Held In Escrow</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_PercentageOfAmountHeldInEscrow_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amount held in escrow (as a percent)</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_TermOfAmountToBeHeldInEscrow" xlink:label="veco_TermOfAmountToBeHeldInEscrow" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_TermOfAmountToBeHeldInEscrow" xlink:to="veco_TermOfAmountToBeHeldInEscrow_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_TermOfAmountToBeHeldInEscrow_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Period over which portion of transaction price is held in escrow.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_TermOfAmountToBeHeldInEscrow_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Term Of Amount To Be Held In Escrow</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_TermOfAmountToBeHeldInEscrow_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Period over which portion of transaction price is held in escrow</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestmentsAbstract" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestmentsAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestmentsAbstract" xlink:to="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestmentsAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestmentsAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Income (Loss) from Continuing Operations before Equity Method Investments, Income Taxes, Extraordinary Items, Noncontrolling Interest [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestmentsAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Income (loss) from continuing operations before income taxes</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic" xlink:to="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Income (Loss) from Continuing Operations before Income Taxes, Domestic</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Domestic</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign" xlink:to="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Income (Loss) from Continuing Operations before Income Taxes, Foreign</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Foreign</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CurrentIncomeTaxExpenseBenefitContinuingOperationsAbstract" xlink:label="us-gaap_CurrentIncomeTaxExpenseBenefitContinuingOperationsAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CurrentIncomeTaxExpenseBenefitContinuingOperationsAbstract" xlink:to="us-gaap_CurrentIncomeTaxExpenseBenefitContinuingOperationsAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CurrentIncomeTaxExpenseBenefitContinuingOperationsAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Current Income Tax Expense (Benefit), Continuing Operations [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_CurrentIncomeTaxExpenseBenefitContinuingOperationsAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Current:</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CurrentForeignTaxExpenseBenefit" xlink:label="us-gaap_CurrentForeignTaxExpenseBenefit" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CurrentForeignTaxExpenseBenefit" xlink:to="us-gaap_CurrentForeignTaxExpenseBenefit_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CurrentForeignTaxExpenseBenefit_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Current Foreign Tax Expense (Benefit)</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_CurrentForeignTaxExpenseBenefit_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Foreign</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CurrentStateAndLocalTaxExpenseBenefit" xlink:label="us-gaap_CurrentStateAndLocalTaxExpenseBenefit" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CurrentStateAndLocalTaxExpenseBenefit" xlink:to="us-gaap_CurrentStateAndLocalTaxExpenseBenefit_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CurrentStateAndLocalTaxExpenseBenefit_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Current State and Local Tax Expense (Benefit)</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_CurrentStateAndLocalTaxExpenseBenefit_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">State and local</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CurrentIncomeTaxExpenseBenefit" xlink:label="us-gaap_CurrentIncomeTaxExpenseBenefit" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CurrentIncomeTaxExpenseBenefit" xlink:to="us-gaap_CurrentIncomeTaxExpenseBenefit_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CurrentIncomeTaxExpenseBenefit_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Current Income Tax Expense (Benefit)</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_CurrentIncomeTaxExpenseBenefit_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total current expense (benefit) for income taxes</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredIncomeTaxExpenseBenefitContinuingOperationsAbstract" xlink:label="us-gaap_DeferredIncomeTaxExpenseBenefitContinuingOperationsAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredIncomeTaxExpenseBenefitContinuingOperationsAbstract" xlink:to="us-gaap_DeferredIncomeTaxExpenseBenefitContinuingOperationsAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DeferredIncomeTaxExpenseBenefitContinuingOperationsAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred Income Tax Expense (Benefit), Continuing Operations [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DeferredIncomeTaxExpenseBenefitContinuingOperationsAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred:</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredFederalIncomeTaxExpenseBenefit" xlink:label="us-gaap_DeferredFederalIncomeTaxExpenseBenefit" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredFederalIncomeTaxExpenseBenefit" xlink:to="us-gaap_DeferredFederalIncomeTaxExpenseBenefit_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DeferredFederalIncomeTaxExpenseBenefit_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred Federal Income Tax Expense (Benefit)</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DeferredFederalIncomeTaxExpenseBenefit_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Federal</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredForeignIncomeTaxExpenseBenefit" xlink:label="us-gaap_DeferredForeignIncomeTaxExpenseBenefit" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredForeignIncomeTaxExpenseBenefit" xlink:to="us-gaap_DeferredForeignIncomeTaxExpenseBenefit_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DeferredForeignIncomeTaxExpenseBenefit_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred Foreign Income Tax Expense (Benefit)</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DeferredForeignIncomeTaxExpenseBenefit_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Foreign</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredStateAndLocalIncomeTaxExpenseBenefit" xlink:label="us-gaap_DeferredStateAndLocalIncomeTaxExpenseBenefit" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredStateAndLocalIncomeTaxExpenseBenefit" xlink:to="us-gaap_DeferredStateAndLocalIncomeTaxExpenseBenefit_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DeferredStateAndLocalIncomeTaxExpenseBenefit_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred State and Local Income Tax Expense (Benefit)</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DeferredStateAndLocalIncomeTaxExpenseBenefit_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">State and local</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate" xlink:label="us-gaap_IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate" xlink:to="us-gaap_IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Effective Income Tax Rate Reconciliation at Federal Statutory Income Tax Rate, Amount</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Income tax expense (benefit) at U.S. statutory rates</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeTaxReconciliationStateAndLocalIncomeTaxes" xlink:label="us-gaap_IncomeTaxReconciliationStateAndLocalIncomeTaxes" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeTaxReconciliationStateAndLocalIncomeTaxes" xlink:to="us-gaap_IncomeTaxReconciliationStateAndLocalIncomeTaxes_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncomeTaxReconciliationStateAndLocalIncomeTaxes_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Effective Income Tax Rate Reconciliation, State and Local Income Taxes, Amount</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_IncomeTaxReconciliationStateAndLocalIncomeTaxes_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">State taxes, net of U.S. federal impact</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeTaxReconciliationForeignIncomeTaxRateDifferential" xlink:label="us-gaap_IncomeTaxReconciliationForeignIncomeTaxRateDifferential" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeTaxReconciliationForeignIncomeTaxRateDifferential" xlink:to="us-gaap_IncomeTaxReconciliationForeignIncomeTaxRateDifferential_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncomeTaxReconciliationForeignIncomeTaxRateDifferential_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Effective Income Tax Rate Reconciliation, Foreign Income Tax Rate Differential, Amount</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_IncomeTaxReconciliationForeignIncomeTaxRateDifferential_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Effect of international operations</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeTaxReconciliationTaxCreditsResearch" xlink:label="us-gaap_IncomeTaxReconciliationTaxCreditsResearch" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeTaxReconciliationTaxCreditsResearch" xlink:to="us-gaap_IncomeTaxReconciliationTaxCreditsResearch_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncomeTaxReconciliationTaxCreditsResearch_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Effective Income Tax Rate Reconciliation, Tax Credit, Research, Amount</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_IncomeTaxReconciliationTaxCreditsResearch_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Research and development tax credit</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance" xlink:label="us-gaap_IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance" xlink:to="us-gaap_IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Effective Income Tax Rate Reconciliation, Change in Deferred Tax Assets Valuation Allowance, Amount</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net change in valuation allowance</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_IncomeTaxReconciliationChangeInAccrualForUnrecognizedTaxBenefits" xlink:label="veco_IncomeTaxReconciliationChangeInAccrualForUnrecognizedTaxBenefits" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_IncomeTaxReconciliationChangeInAccrualForUnrecognizedTaxBenefits" xlink:to="veco_IncomeTaxReconciliationChangeInAccrualForUnrecognizedTaxBenefits_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_IncomeTaxReconciliationChangeInAccrualForUnrecognizedTaxBenefits_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents the change in accrual for unrecognized tax benefits.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_IncomeTaxReconciliationChangeInAccrualForUnrecognizedTaxBenefits_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Income Tax Reconciliation, Change in Accrual for Unrecognized Tax Benefits</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="veco_IncomeTaxReconciliationChangeInAccrualForUnrecognizedTaxBenefits_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Change in accrual for unrecognized tax benefits</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost" xlink:label="us-gaap_IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost" xlink:to="us-gaap_IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Effective Income Tax Rate Reconciliation, Nondeductible Expense, Share-based Compensation Cost, Amount</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based compensation</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeTaxReconciliationNondeductibleExpenseImpairmentLosses" xlink:label="us-gaap_IncomeTaxReconciliationNondeductibleExpenseImpairmentLosses" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeTaxReconciliationNondeductibleExpenseImpairmentLosses" xlink:to="us-gaap_IncomeTaxReconciliationNondeductibleExpenseImpairmentLosses_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncomeTaxReconciliationNondeductibleExpenseImpairmentLosses_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Effective Income Tax Rate Reconciliation, Nondeductible Expense, Impairment Losses, Amount</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_IncomeTaxReconciliationNondeductibleExpenseImpairmentLosses_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Asset impairment</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_EffectiveIncomeTaxRateReconciliationPartialExtinguishmentOfDebtAmount" xlink:label="veco_EffectiveIncomeTaxRateReconciliationPartialExtinguishmentOfDebtAmount" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_EffectiveIncomeTaxRateReconciliationPartialExtinguishmentOfDebtAmount" xlink:to="veco_EffectiveIncomeTaxRateReconciliationPartialExtinguishmentOfDebtAmount_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_EffectiveIncomeTaxRateReconciliationPartialExtinguishmentOfDebtAmount_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amount of the difference between reported income tax expense (benefit) and expected income tax expense (benefit) computed by applying the domestic federal statutory income tax rates to pretax income (loss) from continuing operations attributable to partial extinguishment of debt.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_EffectiveIncomeTaxRateReconciliationPartialExtinguishmentOfDebtAmount_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Effective Income Tax Rate Reconciliation, Partial Extinguishment of Debt, Amount</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_EffectiveIncomeTaxRateReconciliationPartialExtinguishmentOfDebtAmount_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Partial extinguishment of 2023 Notes</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeTaxEffectsAllocatedDirectlyToEquityCumulativeEffectOfChangeInAccountingPrinciple" xlink:label="us-gaap_IncomeTaxEffectsAllocatedDirectlyToEquityCumulativeEffectOfChangeInAccountingPrinciple" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeTaxEffectsAllocatedDirectlyToEquityCumulativeEffectOfChangeInAccountingPrinciple" xlink:to="us-gaap_IncomeTaxEffectsAllocatedDirectlyToEquityCumulativeEffectOfChangeInAccountingPrinciple_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncomeTaxEffectsAllocatedDirectlyToEquityCumulativeEffectOfChangeInAccountingPrinciple_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Income Tax Effects Allocated Directly to Equity, Cumulative Effect of Change in Accounting Principle</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_IncomeTaxEffectsAllocatedDirectlyToEquityCumulativeEffectOfChangeInAccountingPrinciple_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Adoption of new accounting standard</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeTaxReconciliationOtherAdjustments" xlink:label="us-gaap_IncomeTaxReconciliationOtherAdjustments" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeTaxReconciliationOtherAdjustments" xlink:to="us-gaap_IncomeTaxReconciliationOtherAdjustments_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncomeTaxReconciliationOtherAdjustments_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Effective Income Tax Rate Reconciliation, Other Adjustments, Amount</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_IncomeTaxReconciliationOtherAdjustments_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ComponentsOfDeferredTaxAssetsAndLiabilitiesAbstract" xlink:label="us-gaap_ComponentsOfDeferredTaxAssetsAndLiabilitiesAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ComponentsOfDeferredTaxAssetsAndLiabilitiesAbstract" xlink:to="us-gaap_ComponentsOfDeferredTaxAssetsAndLiabilitiesAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ComponentsOfDeferredTaxAssetsAndLiabilitiesAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Components of Deferred Tax Assets and Liabilities [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ComponentsOfDeferredTaxAssetsAndLiabilitiesAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Components of the entity's deferred tax assets and liabilities</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ComponentsOfDeferredTaxAssetsAbstract" xlink:label="us-gaap_ComponentsOfDeferredTaxAssetsAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ComponentsOfDeferredTaxAssetsAbstract" xlink:to="us-gaap_ComponentsOfDeferredTaxAssetsAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ComponentsOfDeferredTaxAssetsAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Components of Deferred Tax Assets [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ComponentsOfDeferredTaxAssetsAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred tax assets:</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredTaxAssetsInventory" xlink:label="us-gaap_DeferredTaxAssetsInventory" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredTaxAssetsInventory" xlink:to="us-gaap_DeferredTaxAssetsInventory_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DeferredTaxAssetsInventory_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred Tax Assets, Inventory</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DeferredTaxAssetsInventory_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Inventory valuation</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredTaxAssetsOperatingLossCarryforwards" xlink:label="us-gaap_DeferredTaxAssetsOperatingLossCarryforwards" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredTaxAssetsOperatingLossCarryforwards" xlink:to="us-gaap_DeferredTaxAssetsOperatingLossCarryforwards_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DeferredTaxAssetsOperatingLossCarryforwards_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred Tax Assets, Operating Loss Carryforwards</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DeferredTaxAssetsOperatingLossCarryforwards_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net operating losses</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_DeferredTaxAssetsOperatingLossCarryforwards_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net deferred tax asset</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredTaxAssetsTaxCreditCarryforwards" xlink:label="us-gaap_DeferredTaxAssetsTaxCreditCarryforwards" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredTaxAssetsTaxCreditCarryforwards" xlink:to="us-gaap_DeferredTaxAssetsTaxCreditCarryforwards_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DeferredTaxAssetsTaxCreditCarryforwards_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred Tax Assets, Tax Credit Carryforwards</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DeferredTaxAssetsTaxCreditCarryforwards_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Credit carry forwards</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReserves" xlink:label="us-gaap_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReserves" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReserves" xlink:to="us-gaap_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReserves_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReserves_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred Tax Assets, Tax Deferred Expense, Reserves and Accruals, Warranty Reserves</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReserves_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Warranty and installation accruals</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost" xlink:label="us-gaap_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost" xlink:to="us-gaap_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred Tax Assets, Tax Deferred Expense, Compensation and Benefits, Share-based Compensation Cost</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based compensation</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredTaxAssetsDeferredIncome" xlink:label="us-gaap_DeferredTaxAssetsDeferredIncome" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredTaxAssetsDeferredIncome" xlink:to="us-gaap_DeferredTaxAssetsDeferredIncome_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DeferredTaxAssetsDeferredIncome_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred Tax Assets, Deferred Income</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DeferredTaxAssetsDeferredIncome_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Customer deposits and deferred revenue</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_DeferredTaxAssetsOperatingLeases" xlink:label="veco_DeferredTaxAssetsOperatingLeases" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_DeferredTaxAssetsOperatingLeases" xlink:to="veco_DeferredTaxAssetsOperatingLeases_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_DeferredTaxAssetsOperatingLeases_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">a</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_DeferredTaxAssetsOperatingLeases_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred Tax Assets, Operating Leases</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_DeferredTaxAssetsOperatingLeases_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating leases</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredTaxAssetsInProcessResearchAndDevelopment" xlink:label="us-gaap_DeferredTaxAssetsInProcessResearchAndDevelopment" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredTaxAssetsInProcessResearchAndDevelopment" xlink:to="us-gaap_DeferredTaxAssetsInProcessResearchAndDevelopment_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DeferredTaxAssetsInProcessResearchAndDevelopment_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred Tax Assets, in Process Research and Development</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DeferredTaxAssetsInProcessResearchAndDevelopment_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Research and experimental ("R&amp;E") capitalization</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredTaxAssetsOther" xlink:label="us-gaap_DeferredTaxAssetsOther" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredTaxAssetsOther" xlink:to="us-gaap_DeferredTaxAssetsOther_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DeferredTaxAssetsOther_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred Tax Assets, Other</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DeferredTaxAssetsOther_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredTaxAssetsGross" xlink:label="us-gaap_DeferredTaxAssetsGross" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredTaxAssetsGross" xlink:to="us-gaap_DeferredTaxAssetsGross_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DeferredTaxAssetsGross_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred Tax Assets, Gross</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_DeferredTaxAssetsGross_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total deferred tax assets</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredTaxAssetsValuationAllowance" xlink:label="us-gaap_DeferredTaxAssetsValuationAllowance" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredTaxAssetsValuationAllowance" xlink:to="us-gaap_DeferredTaxAssetsValuationAllowance_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DeferredTaxAssetsValuationAllowance_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred Tax Assets, Valuation Allowance</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_DeferredTaxAssetsValuationAllowance_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Valuation allowance</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredTaxAssetsNet" xlink:label="us-gaap_DeferredTaxAssetsNet" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredTaxAssetsNet" xlink:to="us-gaap_DeferredTaxAssetsNet_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DeferredTaxAssetsNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred Tax Assets, Net of Valuation Allowance</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_DeferredTaxAssetsNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net deferred tax assets</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ComponentsOfDeferredTaxLiabilitiesAbstract" xlink:label="us-gaap_ComponentsOfDeferredTaxLiabilitiesAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ComponentsOfDeferredTaxLiabilitiesAbstract" xlink:to="us-gaap_ComponentsOfDeferredTaxLiabilitiesAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ComponentsOfDeferredTaxLiabilitiesAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Components of Deferred Tax Liabilities [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ComponentsOfDeferredTaxLiabilitiesAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred tax liabilities:</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredTaxLiabilitiesGoodwillAndIntangibleAssetsIntangibleAssets" xlink:label="us-gaap_DeferredTaxLiabilitiesGoodwillAndIntangibleAssetsIntangibleAssets" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredTaxLiabilitiesGoodwillAndIntangibleAssetsIntangibleAssets" xlink:to="us-gaap_DeferredTaxLiabilitiesGoodwillAndIntangibleAssetsIntangibleAssets_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DeferredTaxLiabilitiesGoodwillAndIntangibleAssetsIntangibleAssets_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred Tax Liabilities, Intangible Assets</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DeferredTaxLiabilitiesGoodwillAndIntangibleAssetsIntangibleAssets_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Purchased intangible assets</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_DeferredTaxLiabilitiesFinancingArrangementsNet" xlink:label="veco_DeferredTaxLiabilitiesFinancingArrangementsNet" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_DeferredTaxLiabilitiesFinancingArrangementsNet" xlink:to="veco_DeferredTaxLiabilitiesFinancingArrangementsNet_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_DeferredTaxLiabilitiesFinancingArrangementsNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net amount of deferred tax liability attributable to taxable temporary differences from financing arrangements.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_DeferredTaxLiabilitiesFinancingArrangementsNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred Tax Liabilities, Financing Arrangements, Net</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="veco_DeferredTaxLiabilitiesFinancingArrangementsNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Convertible Senior Notes</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredTaxLiabilitiesLeasingArrangements" xlink:label="us-gaap_DeferredTaxLiabilitiesLeasingArrangements" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredTaxLiabilitiesLeasingArrangements" xlink:to="us-gaap_DeferredTaxLiabilitiesLeasingArrangements_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DeferredTaxLiabilitiesLeasingArrangements_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred Tax Liabilities, Leasing Arrangements</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DeferredTaxLiabilitiesLeasingArrangements_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating leases</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredTaxLiabilitiesPropertyPlantAndEquipment" xlink:label="us-gaap_DeferredTaxLiabilitiesPropertyPlantAndEquipment" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredTaxLiabilitiesPropertyPlantAndEquipment" xlink:to="us-gaap_DeferredTaxLiabilitiesPropertyPlantAndEquipment_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DeferredTaxLiabilitiesPropertyPlantAndEquipment_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred Tax Liabilities, Property, Plant and Equipment</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DeferredTaxLiabilitiesPropertyPlantAndEquipment_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Depreciation</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredIncomeTaxLiabilities" xlink:label="us-gaap_DeferredIncomeTaxLiabilities" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredIncomeTaxLiabilities" xlink:to="us-gaap_DeferredIncomeTaxLiabilities_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DeferredIncomeTaxLiabilities_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred Tax Liabilities, Gross</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_DeferredIncomeTaxLiabilities_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total deferred tax liabilities</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredTaxAssetsLiabilitiesNet" xlink:label="us-gaap_DeferredTaxAssetsLiabilitiesNet" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredTaxAssetsLiabilitiesNet" xlink:to="us-gaap_DeferredTaxAssetsLiabilitiesNet_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DeferredTaxAssetsLiabilitiesNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred Tax Assets, Net</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_DeferredTaxAssetsLiabilitiesNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net deferred taxes, asset</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredTaxLiabilities" xlink:label="us-gaap_DeferredTaxLiabilities" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredTaxLiabilities" xlink:to="us-gaap_DeferredTaxLiabilities_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DeferredTaxLiabilities_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred Tax Liabilities, Net</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedTotalLabel" xlink:label="us-gaap_DeferredTaxLiabilities_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net deferred taxes, liability</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredTaxLiabilitiesUndistributedForeignEarnings" xlink:label="us-gaap_DeferredTaxLiabilitiesUndistributedForeignEarnings" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredTaxLiabilitiesUndistributedForeignEarnings" xlink:to="us-gaap_DeferredTaxLiabilitiesUndistributedForeignEarnings_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DeferredTaxLiabilitiesUndistributedForeignEarnings_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred Tax Liabilities, Undistributed Foreign Earnings</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_DeferredTaxLiabilitiesUndistributedForeignEarnings_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accrual for foreign tax withholdings on unremitted earnings</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ValuationAllowanceAbstract" xlink:label="us-gaap_ValuationAllowanceAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ValuationAllowanceAbstract" xlink:to="us-gaap_ValuationAllowanceAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ValuationAllowanceAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Valuation Allowance [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ValuationAllowanceAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Valuation allowance</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ValuationAllowanceDeferredTaxAssetChangeInAmount" xlink:label="us-gaap_ValuationAllowanceDeferredTaxAssetChangeInAmount" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ValuationAllowanceDeferredTaxAssetChangeInAmount" xlink:to="us-gaap_ValuationAllowanceDeferredTaxAssetChangeInAmount_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ValuationAllowanceDeferredTaxAssetChangeInAmount_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Valuation Allowance, Deferred Tax Asset, Change in Amount</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ValuationAllowanceDeferredTaxAssetChangeInAmount_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Increase (decrease) in valuation allowance</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OperatingLossCarryforwardsTable" xlink:label="us-gaap_OperatingLossCarryforwardsTable" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OperatingLossCarryforwardsTable" xlink:to="us-gaap_OperatingLossCarryforwardsTable_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OperatingLossCarryforwardsTable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating Loss Carryforwards [Table]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeTaxAuthorityAxis" xlink:label="us-gaap_IncomeTaxAuthorityAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeTaxAuthorityAxis" xlink:to="us-gaap_IncomeTaxAuthorityAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncomeTaxAuthorityAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Income Tax Authority [Axis]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeTaxAuthorityDomain" xlink:label="us-gaap_IncomeTaxAuthorityDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeTaxAuthorityDomain" xlink:to="us-gaap_IncomeTaxAuthorityDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncomeTaxAuthorityDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Income Tax Authority [Domain]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_StateAndLocalJurisdictionMember" xlink:label="us-gaap_StateAndLocalJurisdictionMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StateAndLocalJurisdictionMember" xlink:to="us-gaap_StateAndLocalJurisdictionMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_StateAndLocalJurisdictionMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">State and local</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OperatingLossCarryforwardsLineItems" xlink:label="us-gaap_OperatingLossCarryforwardsLineItems" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OperatingLossCarryforwardsLineItems" xlink:to="us-gaap_OperatingLossCarryforwardsLineItems_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OperatingLossCarryforwardsLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating Loss Carryforwards [Line Items]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_OperatingLossCarryforwardsLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating loss carryforwards disclosures</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OperatingLossCarryforwards" xlink:label="us-gaap_OperatingLossCarryforwards" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OperatingLossCarryforwards" xlink:to="us-gaap_OperatingLossCarryforwards_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OperatingLossCarryforwards_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating Loss Carryforwards</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_OperatingLossCarryforwards_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net operating loss carryforwards</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_TaxCreditCarryforwardTable" xlink:label="us-gaap_TaxCreditCarryforwardTable" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_TaxCreditCarryforwardTable" xlink:to="us-gaap_TaxCreditCarryforwardTable_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_TaxCreditCarryforwardTable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Tax Credit Carryforward [Table]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DomesticCountryMember" xlink:label="us-gaap_DomesticCountryMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DomesticCountryMember" xlink:to="us-gaap_DomesticCountryMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DomesticCountryMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Federal</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ForeignCountryMember" xlink:label="us-gaap_ForeignCountryMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ForeignCountryMember" xlink:to="us-gaap_ForeignCountryMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ForeignCountryMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Foreign tax</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_TaxCreditCarryforwardAxis" xlink:label="us-gaap_TaxCreditCarryforwardAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_TaxCreditCarryforwardAxis" xlink:to="us-gaap_TaxCreditCarryforwardAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_TaxCreditCarryforwardAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Tax Credit Carryforward [Axis]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_TaxCreditCarryforwardNameDomain" xlink:label="us-gaap_TaxCreditCarryforwardNameDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_TaxCreditCarryforwardNameDomain" xlink:to="us-gaap_TaxCreditCarryforwardNameDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_TaxCreditCarryforwardNameDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Tax Credit Carryforward, Name [Domain]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ResearchMember" xlink:label="us-gaap_ResearchMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ResearchMember" xlink:to="us-gaap_ResearchMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ResearchMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Research and development tax credit carryforward</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_TaxCreditCarryforwardLineItems" xlink:label="us-gaap_TaxCreditCarryforwardLineItems" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_TaxCreditCarryforwardLineItems" xlink:to="us-gaap_TaxCreditCarryforwardLineItems_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_TaxCreditCarryforwardLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Tax Credit Carryforward [Line Items]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_TaxCreditCarryforwardLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Tax credit carryforward</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_TaxCreditCarryforwardAmount" xlink:label="us-gaap_TaxCreditCarryforwardAmount" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_TaxCreditCarryforwardAmount" xlink:to="us-gaap_TaxCreditCarryforwardAmount_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_TaxCreditCarryforwardAmount_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Tax Credit Carryforward, Amount</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_TaxCreditCarryforwardAmount_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Tax credit carry forwards</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ReconciliationOfUnrecognizedTaxBenefitsExcludingAmountsPertainingToExaminedTaxReturnsRollForward" xlink:label="us-gaap_ReconciliationOfUnrecognizedTaxBenefitsExcludingAmountsPertainingToExaminedTaxReturnsRollForward" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ReconciliationOfUnrecognizedTaxBenefitsExcludingAmountsPertainingToExaminedTaxReturnsRollForward" xlink:to="us-gaap_ReconciliationOfUnrecognizedTaxBenefitsExcludingAmountsPertainingToExaminedTaxReturnsRollForward_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ReconciliationOfUnrecognizedTaxBenefitsExcludingAmountsPertainingToExaminedTaxReturnsRollForward_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Reconciliation of Unrecognized Tax Benefits, Excluding Amounts Pertaining to Examined Tax Returns [Roll Forward]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ReconciliationOfUnrecognizedTaxBenefitsExcludingAmountsPertainingToExaminedTaxReturnsRollForward_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Change in unrecognized tax benefits</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_UnrecognizedTaxBenefits" xlink:label="us-gaap_UnrecognizedTaxBenefits" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_UnrecognizedTaxBenefits" xlink:to="us-gaap_UnrecognizedTaxBenefits_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_UnrecognizedTaxBenefits_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Unrecognized Tax Benefits</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel" xlink:label="us-gaap_UnrecognizedTaxBenefits_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Balance at end of year</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel" xlink:label="us-gaap_UnrecognizedTaxBenefits_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Balance at beginning of year</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromCurrentPeriodTaxPositions" xlink:label="us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromCurrentPeriodTaxPositions" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromCurrentPeriodTaxPositions" xlink:to="us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromCurrentPeriodTaxPositions_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromCurrentPeriodTaxPositions_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Unrecognized Tax Benefits, Increase Resulting from Current Period Tax Positions</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromCurrentPeriodTaxPositions_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Additions for tax positions related to current year</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromPriorPeriodTaxPositions" xlink:label="us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromPriorPeriodTaxPositions" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromPriorPeriodTaxPositions" xlink:to="us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromPriorPeriodTaxPositions_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromPriorPeriodTaxPositions_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Unrecognized Tax Benefits, Increase Resulting from Prior Period Tax Positions</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromPriorPeriodTaxPositions_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Additions for tax positions relating to prior years</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_UnrecognizedTaxBenefitsDecreasesResultingFromPriorPeriodTaxPositions" xlink:label="us-gaap_UnrecognizedTaxBenefitsDecreasesResultingFromPriorPeriodTaxPositions" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_UnrecognizedTaxBenefitsDecreasesResultingFromPriorPeriodTaxPositions" xlink:to="us-gaap_UnrecognizedTaxBenefitsDecreasesResultingFromPriorPeriodTaxPositions_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_UnrecognizedTaxBenefitsDecreasesResultingFromPriorPeriodTaxPositions_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Unrecognized Tax Benefits, Decrease Resulting from Prior Period Tax Positions</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_UnrecognizedTaxBenefitsDecreasesResultingFromPriorPeriodTaxPositions_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Reductions for tax positions relating to prior years</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_UnrecognizedTaxBenefitsDecreasesResultingFromSettlementsWithTaxingAuthorities" xlink:label="us-gaap_UnrecognizedTaxBenefitsDecreasesResultingFromSettlementsWithTaxingAuthorities" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_UnrecognizedTaxBenefitsDecreasesResultingFromSettlementsWithTaxingAuthorities" xlink:to="us-gaap_UnrecognizedTaxBenefitsDecreasesResultingFromSettlementsWithTaxingAuthorities_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_UnrecognizedTaxBenefitsDecreasesResultingFromSettlementsWithTaxingAuthorities_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Unrecognized Tax Benefits, Decrease Resulting from Settlements with Taxing Authorities</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_UnrecognizedTaxBenefitsDecreasesResultingFromSettlementsWithTaxingAuthorities_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Settlements</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_UnrecognizedTaxBenefitsThatWouldImpactEffectiveTaxRate" xlink:label="us-gaap_UnrecognizedTaxBenefitsThatWouldImpactEffectiveTaxRate" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_UnrecognizedTaxBenefitsThatWouldImpactEffectiveTaxRate" xlink:to="us-gaap_UnrecognizedTaxBenefitsThatWouldImpactEffectiveTaxRate_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_UnrecognizedTaxBenefitsThatWouldImpactEffectiveTaxRate_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Unrecognized Tax Benefits that Would Impact Effective Tax Rate</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_UnrecognizedTaxBenefitsThatWouldImpactEffectiveTaxRate_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Unrecognized tax benefits that would impact effective tax rate if recognized</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued" xlink:label="us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued" xlink:to="us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Unrecognized Tax Benefits, Income Tax Penalties and Interest Accrued</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accrued interest and penalties</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" xlink:label="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" xlink:to="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Segment Reporting Information, by Segment [Table]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_ProductOrServiceAxis" xlink:label="srt_ProductOrServiceAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_ProductOrServiceAxis" xlink:to="srt_ProductOrServiceAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="srt_ProductOrServiceAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Products and Services [Axis]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_ProductsAndServicesDomain" xlink:label="srt_ProductsAndServicesDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_ProductsAndServicesDomain" xlink:to="srt_ProductsAndServicesDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="srt_ProductsAndServicesDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Products and Services [Domain]</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_SemiconductorMember" xlink:label="veco_SemiconductorMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_SemiconductorMember" xlink:to="veco_SemiconductorMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_SemiconductorMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents the entity's Semiconductor reporting segment.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_SemiconductorMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Semiconductor</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_CompoundSemiconductorMember" xlink:label="veco_CompoundSemiconductorMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_CompoundSemiconductorMember" xlink:to="veco_CompoundSemiconductorMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_CompoundSemiconductorMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents the entity's Compound Semiconductor reporting segment.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_CompoundSemiconductorMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Compound Semiconductor</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_DataStorageMember" xlink:label="veco_DataStorageMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_DataStorageMember" xlink:to="veco_DataStorageMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_DataStorageMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents the entity's Data Storage reporting segment. Data Storage segment consists of ion beam etch, ion beam deposition, diamond-like carbon, physical vapor deposition and dicing and slicing products sold primarily to customers in the data storage industry.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_DataStorageMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Data Storage</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_ScientificAndOtherMember" xlink:label="veco_ScientificAndOtherMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_ScientificAndOtherMember" xlink:to="veco_ScientificAndOtherMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_ScientificAndOtherMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents the entity's Scientific &amp; Other reporting segment.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_ScientificAndOtherMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Scientific &amp; Other</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SegmentReportingInformationLineItems" xlink:label="us-gaap_SegmentReportingInformationLineItems" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_SegmentReportingInformationLineItems_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_SegmentReportingInformationLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Segment Reporting Information [Line Items]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_SegmentReportingInformationLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Revenue reporting by end-market and geographic region</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_NumberOfReportableSegments" xlink:label="us-gaap_NumberOfReportableSegments" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_NumberOfReportableSegments" xlink:to="us-gaap_NumberOfReportableSegments_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_NumberOfReportableSegments_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Number of Reportable Segments</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_NumberOfReportableSegments_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Number of reportable segments</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/country/2022/country-2022.xsd#country_US" xlink:label="country_US" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="country_US" xlink:to="country_US_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="country_US_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">United States</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_EMEAMember" xlink:label="us-gaap_EMEAMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EMEAMember" xlink:to="us-gaap_EMEAMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_EMEAMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">EMEA</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/country/2022/country-2022.xsd#country_CN" xlink:label="country_CN" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="country_CN" xlink:to="country_CN_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="country_CN_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">China</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_AsiaPacificExcludingChinaMember" xlink:label="veco_AsiaPacificExcludingChinaMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_AsiaPacificExcludingChinaMember" xlink:to="veco_AsiaPacificExcludingChinaMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_AsiaPacificExcludingChinaMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Region of Asia Pacific, excluding China.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_AsiaPacificExcludingChinaMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Rest of APAC</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_RestOfWorldMember" xlink:label="veco_RestOfWorldMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_RestOfWorldMember" xlink:to="veco_RestOfWorldMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_RestOfWorldMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Remaining regions of the world not specifically identified.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_RestOfWorldMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Rest Of World</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SubsequentEventTable" xlink:label="us-gaap_SubsequentEventTable" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SubsequentEventTable" xlink:to="us-gaap_SubsequentEventTable_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_SubsequentEventTable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Subsequent Event [Table]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SubsequentEventTypeAxis" xlink:label="us-gaap_SubsequentEventTypeAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SubsequentEventTypeAxis" xlink:to="us-gaap_SubsequentEventTypeAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_SubsequentEventTypeAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Subsequent Event Type [Axis]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SubsequentEventTypeDomain" xlink:label="us-gaap_SubsequentEventTypeDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SubsequentEventTypeDomain" xlink:to="us-gaap_SubsequentEventTypeDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_SubsequentEventTypeDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Subsequent Event Type [Domain]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SubsequentEventMember" xlink:label="us-gaap_SubsequentEventMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SubsequentEventMember" xlink:to="us-gaap_SubsequentEventMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_SubsequentEventMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Subsequent event</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_BusinessAcquisitionAxis" xlink:label="us-gaap_BusinessAcquisitionAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_BusinessAcquisitionAxis" xlink:to="us-gaap_BusinessAcquisitionAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_BusinessAcquisitionAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Business Acquisition [Axis]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_BusinessAcquisitionAcquireeDomain" xlink:label="us-gaap_BusinessAcquisitionAcquireeDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_BusinessAcquisitionAcquireeDomain" xlink:to="us-gaap_BusinessAcquisitionAcquireeDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_BusinessAcquisitionAcquireeDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Business Acquisition, Acquiree [Domain]</label>
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_EpiluvacAbMember" xlink:label="veco_EpiluvacAbMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="veco_EpiluvacAbMember" xlink:to="veco_EpiluvacAbMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="veco_EpiluvacAbMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents the information pertaining to Epiluvac AB.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="veco_EpiluvacAbMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Epiluvac AB</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_LegalEntityAxis" xlink:label="dei_LegalEntityAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_LegalEntityAxis" xlink:to="dei_LegalEntityAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_LegalEntityAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Legal Entity [Axis]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_EntityDomain" xlink:label="dei_EntityDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityDomain" xlink:to="dei_EntityDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Entity [Domain]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SubsequentEventLineItems" xlink:label="us-gaap_SubsequentEventLineItems" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SubsequentEventLineItems" xlink:to="us-gaap_SubsequentEventLineItems_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_SubsequentEventLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Subsequent Event [Line Items]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_SubsequentEventLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Subsequent Events</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_EntityNumberOfEmployees" xlink:label="dei_EntityNumberOfEmployees" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityNumberOfEmployees" xlink:to="dei_EntityNumberOfEmployees_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityNumberOfEmployees_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Entity Number of Employees</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="dei_EntityNumberOfEmployees_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Number of employees</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PaymentsToAcquireBusinessesGross" xlink:label="us-gaap_PaymentsToAcquireBusinessesGross" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PaymentsToAcquireBusinessesGross" xlink:to="us-gaap_PaymentsToAcquireBusinessesGross_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PaymentsToAcquireBusinessesGross_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Payments to Acquire Businesses, Gross</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_PaymentsToAcquireBusinessesGross_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Payment to acquire business gross</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_BusinessCombinationContingentConsiderationArrangementsRangeOfOutcomesValueHigh" xlink:label="us-gaap_BusinessCombinationContingentConsiderationArrangementsRangeOfOutcomesValueHigh" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_BusinessCombinationContingentConsiderationArrangementsRangeOfOutcomesValueHigh" xlink:to="us-gaap_BusinessCombinationContingentConsiderationArrangementsRangeOfOutcomesValueHigh_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_BusinessCombinationContingentConsiderationArrangementsRangeOfOutcomesValueHigh_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Business Combination, Contingent Consideration Arrangements, Range of Outcomes, Value, High</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_BusinessCombinationContingentConsiderationArrangementsRangeOfOutcomesValueHigh_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Potential additional performance based earn-outs</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_ValuationAndQualifyingAccountsDisclosureTable" xlink:label="srt_ValuationAndQualifyingAccountsDisclosureTable" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_ValuationAndQualifyingAccountsDisclosureTable" xlink:to="srt_ValuationAndQualifyingAccountsDisclosureTable_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="srt_ValuationAndQualifyingAccountsDisclosureTable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Valuation and Qualifying Accounts Disclosure [Table]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ValuationAllowancesAndReservesTypeAxis" xlink:label="us-gaap_ValuationAllowancesAndReservesTypeAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ValuationAllowancesAndReservesTypeAxis" xlink:to="us-gaap_ValuationAllowancesAndReservesTypeAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ValuationAllowancesAndReservesTypeAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Valuation Allowances and Reserves Type [Axis]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ValuationAllowancesAndReservesDomain" xlink:label="us-gaap_ValuationAllowancesAndReservesDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ValuationAllowancesAndReservesDomain" xlink:to="us-gaap_ValuationAllowancesAndReservesDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ValuationAllowancesAndReservesDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Valuation Allowances and Reserves [Domain]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AllowanceForCreditLossMember" xlink:label="us-gaap_AllowanceForCreditLossMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AllowanceForCreditLossMember" xlink:to="us-gaap_AllowanceForCreditLossMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AllowanceForCreditLossMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Allowance for doubtful accounts</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember" xlink:label="us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember" xlink:to="us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Valuation allowance in net deferred tax assets</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_ValuationAndQualifyingAccountsDisclosureLineItems" xlink:label="srt_ValuationAndQualifyingAccountsDisclosureLineItems" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_ValuationAndQualifyingAccountsDisclosureLineItems" xlink:to="srt_ValuationAndQualifyingAccountsDisclosureLineItems_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="srt_ValuationAndQualifyingAccountsDisclosureLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Valuation and Qualifying Accounts Disclosure [Line Items]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="srt_ValuationAndQualifyingAccountsDisclosureLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Valuation and Qualifying Accounts</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ValuationAllowancesAndReservesBalance" xlink:label="us-gaap_ValuationAllowancesAndReservesBalance" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ValuationAllowancesAndReservesBalance" xlink:to="us-gaap_ValuationAllowancesAndReservesBalance_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ValuationAllowancesAndReservesBalance_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Valuation Allowances and Reserves, Balance</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel" xlink:label="us-gaap_ValuationAllowancesAndReservesBalance_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Balance at End of Period</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel" xlink:label="us-gaap_ValuationAllowancesAndReservesBalance_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Balance at Beginning of Period</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ValuationAllowancesAndReservesChargedToCostAndExpense" xlink:label="us-gaap_ValuationAllowancesAndReservesChargedToCostAndExpense" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ValuationAllowancesAndReservesChargedToCostAndExpense" xlink:to="us-gaap_ValuationAllowancesAndReservesChargedToCostAndExpense_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ValuationAllowancesAndReservesChargedToCostAndExpense_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Valuation Allowances and Reserves, Charged to Cost and Expense</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ValuationAllowancesAndReservesChargedToCostAndExpense_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Charged (Credited) to Costs and Expenses</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ValuationAllowancesAndReservesDeductions" xlink:label="us-gaap_ValuationAllowancesAndReservesDeductions" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ValuationAllowancesAndReservesDeductions" xlink:to="us-gaap_ValuationAllowancesAndReservesDeductions_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ValuationAllowancesAndReservesDeductions_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Valuation Allowances and Reserves, Deductions</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_ValuationAllowancesAndReservesDeductions_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deductions</label>
  </link:labelLink>
</link:linkbase>
</XBRL>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EX-101.PRE
<SEQUENCE>13
<FILENAME>veco-20221231_pre.xml
<DESCRIPTION>EX-101.PRE
<TEXT>
<XBRL>
<?xml version="1.0" encoding="us-ascii"?>
<!--XBRL document created with Toppan Merrill Bridge  10.2.0.4 -->
<!--Based on XBRL 2.1-->
<!--Created on: 2/22/2023 6:58:56 PM-->
<!--Modified on: 2/22/2023 6:58:56 PM-->
<link:linkbase xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:link="http://www.xbrl.org/2003/linkbase" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xbrli="http://www.xbrl.org/2003/instance" xsi:schemaLocation="http://www.xbrl.org/2003/linkbase http://www.xbrl.org/2003/xbrl-linkbase-2003-12-31.xsd">
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DocumentDocumentAndEntityInformation" roleURI="http://www.veeco.com/role/DocumentDocumentAndEntityInformation" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#StatementConsolidatedBalanceSheets" roleURI="http://www.veeco.com/role/StatementConsolidatedBalanceSheets" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#StatementConsolidatedBalanceSheetsParenthetical" roleURI="http://www.veeco.com/role/StatementConsolidatedBalanceSheetsParenthetical" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#StatementConsolidatedStatementsOfOperations" roleURI="http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#StatementConsolidatedStatementsOfComprehensiveIncomeLoss" roleURI="http://www.veeco.com/role/StatementConsolidatedStatementsOfComprehensiveIncomeLoss" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#StatementConsolidatedStatementsOfStockholdersEquity" roleURI="http://www.veeco.com/role/StatementConsolidatedStatementsOfStockholdersEquity" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#StatementConsolidatedStatementsOfCashFlows" roleURI="http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureSignificantAccountingPolicies" roleURI="http://www.veeco.com/role/DisclosureSignificantAccountingPolicies" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureIncomePerCommonShare" roleURI="http://www.veeco.com/role/DisclosureIncomePerCommonShare" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureFairValueMeasurements" roleURI="http://www.veeco.com/role/DisclosureFairValueMeasurements" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureInvestments" roleURI="http://www.veeco.com/role/DisclosureInvestments" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureInventories" roleURI="http://www.veeco.com/role/DisclosureInventories" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosurePropertyPlantAndEquipment" roleURI="http://www.veeco.com/role/DisclosurePropertyPlantAndEquipment" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureGoodwillAndIntangibleAssets" roleURI="http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssets" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureAccruedExpensesAndOtherLiabilities" roleURI="http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilities" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureCommitmentsAndContingencies" roleURI="http://www.veeco.com/role/DisclosureCommitmentsAndContingencies" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureDebt" roleURI="http://www.veeco.com/role/DisclosureDebt" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureStockholdersEquity" roleURI="http://www.veeco.com/role/DisclosureStockholdersEquity" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureStockPlans" roleURI="http://www.veeco.com/role/DisclosureStockPlans" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureRetirementPlans" roleURI="http://www.veeco.com/role/DisclosureRetirementPlans" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureDispositions" roleURI="http://www.veeco.com/role/DisclosureDispositions" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureIncomeTaxes" roleURI="http://www.veeco.com/role/DisclosureIncomeTaxes" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureSegmentReportingAndGeographicInformation" roleURI="http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformation" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureSubsequentEvents" roleURI="http://www.veeco.com/role/DisclosureSubsequentEvents" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureScheduleIiValuationAndQualifyingAccounts" roleURI="http://www.veeco.com/role/DisclosureScheduleIiValuationAndQualifyingAccounts" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureSignificantAccountingPoliciesPolicies" roleURI="http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesPolicies" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureSignificantAccountingPoliciesTables" roleURI="http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesTables" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureIncomePerCommonShareTables" roleURI="http://www.veeco.com/role/DisclosureIncomePerCommonShareTables" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureFairValueMeasurementsTables" roleURI="http://www.veeco.com/role/DisclosureFairValueMeasurementsTables" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureInvestmentsTables" roleURI="http://www.veeco.com/role/DisclosureInvestmentsTables" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureInventoriesTables" roleURI="http://www.veeco.com/role/DisclosureInventoriesTables" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosurePropertyPlantAndEquipmentTables" roleURI="http://www.veeco.com/role/DisclosurePropertyPlantAndEquipmentTables" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureGoodwillAndIntangibleAssetsTables" roleURI="http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssetsTables" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureAccruedExpensesAndOtherLiabilitiesTables" roleURI="http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesTables" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureCommitmentsAndContingenciesTables" roleURI="http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesTables" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureDebtTables" roleURI="http://www.veeco.com/role/DisclosureDebtTables" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureStockholdersEquityTables" roleURI="http://www.veeco.com/role/DisclosureStockholdersEquityTables" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureStockPlansTables" roleURI="http://www.veeco.com/role/DisclosureStockPlansTables" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureIncomeTaxesTables" roleURI="http://www.veeco.com/role/DisclosureIncomeTaxesTables" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureSegmentReportingAndGeographicInformationTables" roleURI="http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformationTables" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureSignificantAccountingPoliciesDescriptionOfBusinessAndBasisOfPresentationDetails" roleURI="http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesDescriptionOfBusinessAndBasisOfPresentationDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureSignificantAccountingPoliciesRevenueRecognitionDetails" roleURI="http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesRevenueRecognitionDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureSignificantAccountingPoliciesWarrantyCostsDetails" roleURI="http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesWarrantyCostsDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureSignificantAccountingPoliciesAdvertisingExpenseDetails" roleURI="http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesAdvertisingExpenseDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureSignificantAccountingPoliciesAccountingForShareBasedCompensationDetails" roleURI="http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesAccountingForShareBasedCompensationDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureSignificantAccountingPoliciesConcentrationOfCreditRiskDetails" roleURI="http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesConcentrationOfCreditRiskDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureSignificantAccountingPoliciesCashCashEquivalentsAndShortTermInvestmentsDetails" roleURI="http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesCashCashEquivalentsAndShortTermInvestmentsDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureSignificantAccountingPoliciesGoodwillAndIndefiniteLivedIntangiblesDetails" roleURI="http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesGoodwillAndIndefiniteLivedIntangiblesDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureSignificantAccountingPoliciesRecentlyAdoptedAccountingStandardsDetails" roleURI="http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesRecentlyAdoptedAccountingStandardsDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureIncomePerCommonShareBasicAndDilutedDetails" roleURI="http://www.veeco.com/role/DisclosureIncomePerCommonShareBasicAndDilutedDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureIncomePerCommonShareSharesExcludedFromEpsDetails" roleURI="http://www.veeco.com/role/DisclosureIncomePerCommonShareSharesExcludedFromEpsDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureFairValueMeasurementsDetails" roleURI="http://www.veeco.com/role/DisclosureFairValueMeasurementsDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureInvestmentsAvailableForSaleSecuritiesDetails" roleURI="http://www.veeco.com/role/DisclosureInvestmentsAvailableForSaleSecuritiesDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureInvestmentsOtherInvestmentDetails" roleURI="http://www.veeco.com/role/DisclosureInvestmentsOtherInvestmentDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureInventoriesDetails" roleURI="http://www.veeco.com/role/DisclosureInventoriesDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosurePropertyPlantAndEquipmentPropertyAndEquipmentDetails" roleURI="http://www.veeco.com/role/DisclosurePropertyPlantAndEquipmentPropertyAndEquipmentDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureGoodwillAndIntangibleAssetsGoodwillDetails" roleURI="http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssetsGoodwillDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureGoodwillAndIntangibleAssetsIntangibleAssetsDetails" roleURI="http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssetsIntangibleAssetsDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureGoodwillAndIntangibleAssetsAmortizationDetails" roleURI="http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssetsAmortizationDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureAccruedExpensesAndOtherLiabilitiesComponentsDetails" roleURI="http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesComponentsDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureAccruedExpensesAndOtherLiabilitiesCustomerDepositsAndDeferredRevenueDetails" roleURI="http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesCustomerDepositsAndDeferredRevenueDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureAccruedExpensesAndOtherLiabilitiesPerformanceObligationAmountDetails" roleURI="http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesPerformanceObligationAmountDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureAccruedExpensesAndOtherLiabilitiesPerformanceObligationTimingDetails" roleURI="http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesPerformanceObligationTimingDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureAccruedExpensesAndOtherLiabilitiesOtherLiabilitiesDetails" roleURI="http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesOtherLiabilitiesDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureCommitmentsAndContingenciesWarrantyDetails" roleURI="http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesWarrantyDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureCommitmentsAndContingenciesLeaseTermsDetails" roleURI="http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesLeaseTermsDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureCommitmentsAndContingenciesMinimumLeaseCommitmentsDetails" roleURI="http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesMinimumLeaseCommitmentsDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureCommitmentsAndContingenciesLeaseCostsDetails" roleURI="http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesLeaseCostsDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureCommitmentsAndContingenciesLegalProceedingsDetails" roleURI="http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesLegalProceedingsDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureCommitmentsAndContingenciesConcentrationOfCreditRiskDetails" roleURI="http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesConcentrationOfCreditRiskDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureCommitmentsAndContingenciesReceivablesDetails" roleURI="http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesReceivablesDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureCommitmentsAndContingenciesReceivablePurchaseAgreementDetails" roleURI="http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesReceivablePurchaseAgreementDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureCommitmentsAndContingenciesSuppliersDetails" roleURI="http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesSuppliersDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureCommitmentsAndContingenciesPurchaseCommitmentsAndBankGuaranteesDetails" roleURI="http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesPurchaseCommitmentsAndBankGuaranteesDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureDebt20232025And2027NotesDetails" roleURI="http://www.veeco.com/role/DisclosureDebt20232025And2027NotesDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureDebtConvertibleSeniorNotesDetails" roleURI="http://www.veeco.com/role/DisclosureDebtConvertibleSeniorNotesDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureDebtCarryingValueDetails" roleURI="http://www.veeco.com/role/DisclosureDebtCarryingValueDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureDebtInterestExpenseDetails" roleURI="http://www.veeco.com/role/DisclosureDebtInterestExpenseDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureDebtCappedCallTransactionsDetails" roleURI="http://www.veeco.com/role/DisclosureDebtCappedCallTransactionsDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureDebtRevolvingCreditFacilityDetails" roleURI="http://www.veeco.com/role/DisclosureDebtRevolvingCreditFacilityDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureStockholdersEquityAociRollforwardDetails" roleURI="http://www.veeco.com/role/DisclosureStockholdersEquityAociRollforwardDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureStockholdersEquityPreferredStockDetails" roleURI="http://www.veeco.com/role/DisclosureStockholdersEquityPreferredStockDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureStockPlans2019PlanDetails" roleURI="http://www.veeco.com/role/DisclosureStockPlans2019PlanDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureStockPlansEsppDetails" roleURI="http://www.veeco.com/role/DisclosureStockPlansEsppDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureStockPlansSharesReservedForFutureIssuanceDetails" roleURI="http://www.veeco.com/role/DisclosureStockPlansSharesReservedForFutureIssuanceDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureStockPlansRecognizedShareBasedCompensationDetails" roleURI="http://www.veeco.com/role/DisclosureStockPlansRecognizedShareBasedCompensationDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureStockPlansUnrecognizedShareBasedCompensationCostsDetails" roleURI="http://www.veeco.com/role/DisclosureStockPlansUnrecognizedShareBasedCompensationCostsDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureStockPlansStockOptionActivityDetails" roleURI="http://www.veeco.com/role/DisclosureStockPlansStockOptionActivityDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureStockPlansOptionExerciseRangesDetails" roleURI="http://www.veeco.com/role/DisclosureStockPlansOptionExerciseRangesDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureStockPlansStockOptionsExercisedDetails" roleURI="http://www.veeco.com/role/DisclosureStockPlansStockOptionsExercisedDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureShareBasedCompensationRestrictedSharesAndPerformanceSharesDetails" roleURI="http://www.veeco.com/role/DisclosureShareBasedCompensationRestrictedSharesAndPerformanceSharesDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureStockPlansPerformanceAwardsAssumptionsDetails" roleURI="http://www.veeco.com/role/DisclosureStockPlansPerformanceAwardsAssumptionsDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureStockPlansEsppFvAssumptionsDetails" roleURI="http://www.veeco.com/role/DisclosureStockPlansEsppFvAssumptionsDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureRetirementPlansDefinedContributionPlanDetails" roleURI="http://www.veeco.com/role/DisclosureRetirementPlansDefinedContributionPlanDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureDispositionsDetails" roleURI="http://www.veeco.com/role/DisclosureDispositionsDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureIncomeTaxesIncomeAttributableToDomesticAndForeignOperationsDetails" roleURI="http://www.veeco.com/role/DisclosureIncomeTaxesIncomeAttributableToDomesticAndForeignOperationsDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureIncomeTaxesComponentsOfExpenseBenefitDetails" roleURI="http://www.veeco.com/role/DisclosureIncomeTaxesComponentsOfExpenseBenefitDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureIncomeTaxesReconciliationToStatutoryTaxExpenseDetails" roleURI="http://www.veeco.com/role/DisclosureIncomeTaxesReconciliationToStatutoryTaxExpenseDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureIncomeTaxesDeferredTaxesDetails" roleURI="http://www.veeco.com/role/DisclosureIncomeTaxesDeferredTaxesDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureIncomeTaxesOperatingLossCarryforwardsDetails" roleURI="http://www.veeco.com/role/DisclosureIncomeTaxesOperatingLossCarryforwardsDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureIncomeTaxesTaxCreditCarryforwardsDetails" roleURI="http://www.veeco.com/role/DisclosureIncomeTaxesTaxCreditCarryforwardsDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureIncomeTaxesUncertainTaxPositionsDetails" roleURI="http://www.veeco.com/role/DisclosureIncomeTaxesUncertainTaxPositionsDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureSegmentReportingAndGeographicInformationSegmentDetails" roleURI="http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformationSegmentDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureSegmentReportingAndGeographicInformationGeographicDetails" roleURI="http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformationGeographicDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureSubsequentEventsDetails" roleURI="http://www.veeco.com/role/DisclosureSubsequentEventsDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="veco-20221231.xsd#DisclosureScheduleIiValuationAndQualifyingAccountsDetails" roleURI="http://www.veeco.com/role/DisclosureScheduleIiValuationAndQualifyingAccountsDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <presentationLink xlink:role="http://www.veeco.com/role/DocumentDocumentAndEntityInformation" xlink:type="extended" xlink:title="00090 - Document - Document and Entity Information" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_CoverAbstract" xlink:label="dei_CoverAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_DocumentType" xlink:label="dei_DocumentType_638126891321966911" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_DocumentType_638126891321966911" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_DocumentAnnualReport" xlink:label="dei_DocumentAnnualReport_638126891321977138" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_DocumentAnnualReport_638126891321977138" order="2" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_DocumentPeriodEndDate" xlink:label="dei_DocumentPeriodEndDate_638126891321977138" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_DocumentPeriodEndDate_638126891321977138" order="3" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_DocumentTransitionReport" xlink:label="dei_DocumentTransitionReport_638126891321977138" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_DocumentTransitionReport_638126891321977138" order="4" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_EntityFileNumber" xlink:label="dei_EntityFileNumber_638126891321977138" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityFileNumber_638126891321977138" order="5" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_EntityRegistrantName" xlink:label="dei_EntityRegistrantName_638126891321977138" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityRegistrantName_638126891321977138" order="6" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_EntityIncorporationStateCountryCode" xlink:label="dei_EntityIncorporationStateCountryCode_638126891321977138" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityIncorporationStateCountryCode_638126891321977138" order="7" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_EntityTaxIdentificationNumber" xlink:label="dei_EntityTaxIdentificationNumber_638126891321977138" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityTaxIdentificationNumber_638126891321977138" order="8" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_EntityAddressAddressLine1" xlink:label="dei_EntityAddressAddressLine1_638126891321977138" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityAddressAddressLine1_638126891321977138" order="9" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_EntityAddressCityOrTown" xlink:label="dei_EntityAddressCityOrTown_638126891321977138" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityAddressCityOrTown_638126891321977138" order="10" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_EntityAddressStateOrProvince" xlink:label="dei_EntityAddressStateOrProvince_638126891321977138" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityAddressStateOrProvince_638126891321977138" order="11" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_EntityAddressPostalZipCode" xlink:label="dei_EntityAddressPostalZipCode_638126891321977138" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityAddressPostalZipCode_638126891321977138" order="12" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_CityAreaCode" xlink:label="dei_CityAreaCode_638126891321977138" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_CityAreaCode_638126891321977138" order="13" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_LocalPhoneNumber" xlink:label="dei_LocalPhoneNumber_638126891321987132" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_LocalPhoneNumber_638126891321987132" order="14" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_Security12bTitle" xlink:label="dei_Security12bTitle_638126891321987132" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_Security12bTitle_638126891321987132" order="15" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_TradingSymbol" xlink:label="dei_TradingSymbol_638126891321987132" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_TradingSymbol_638126891321987132" order="16" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_SecurityExchangeName" xlink:label="dei_SecurityExchangeName_638126891321987132" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_SecurityExchangeName_638126891321987132" order="17" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_EntityWellKnownSeasonedIssuer" xlink:label="dei_EntityWellKnownSeasonedIssuer_638126891321987132" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityWellKnownSeasonedIssuer_638126891321987132" order="18" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_EntityVoluntaryFilers" xlink:label="dei_EntityVoluntaryFilers_638126891321987132" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityVoluntaryFilers_638126891321987132" order="19" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_EntityCurrentReportingStatus" xlink:label="dei_EntityCurrentReportingStatus_638126891321987132" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityCurrentReportingStatus_638126891321987132" order="20" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_EntityInteractiveDataCurrent" xlink:label="dei_EntityInteractiveDataCurrent_638126891321987132" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityInteractiveDataCurrent_638126891321987132" order="21" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_EntityFilerCategory" xlink:label="dei_EntityFilerCategory_638126891321987132" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityFilerCategory_638126891321987132" order="22" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_EntitySmallBusiness" xlink:label="dei_EntitySmallBusiness_638126891321997303" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntitySmallBusiness_638126891321997303" order="23" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_EntityEmergingGrowthCompany" xlink:label="dei_EntityEmergingGrowthCompany_638126891321997303" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityEmergingGrowthCompany_638126891321997303" order="24" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_EntityShellCompany" xlink:label="dei_EntityShellCompany_638126891321997303" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityShellCompany_638126891321997303" order="25" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_IcfrAuditorAttestationFlag" xlink:label="dei_IcfrAuditorAttestationFlag_638126891321997303" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_IcfrAuditorAttestationFlag_638126891321997303" order="26" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_EntityPublicFloat" xlink:label="dei_EntityPublicFloat_638126891321997303" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityPublicFloat_638126891321997303" order="27" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_EntityCommonStockSharesOutstanding" xlink:label="dei_EntityCommonStockSharesOutstanding_638126891321997303" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityCommonStockSharesOutstanding_638126891321997303" order="28" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_AuditorName" xlink:label="dei_AuditorName_638126891321997303" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_AuditorName_638126891321997303" order="29" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_AuditorFirmId" xlink:label="dei_AuditorFirmId_638126891322006911" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_AuditorFirmId_638126891322006911" order="30" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_AuditorLocation" xlink:label="dei_AuditorLocation_638126891322006911" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_AuditorLocation_638126891322006911" order="31" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_EntityCentralIndexKey" xlink:label="dei_EntityCentralIndexKey_638126891322006911" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityCentralIndexKey_638126891322006911" order="32" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_CurrentFiscalYearEndDate" xlink:label="dei_CurrentFiscalYearEndDate_638126891322006911" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_CurrentFiscalYearEndDate_638126891322006911" order="33" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_DocumentFiscalYearFocus" xlink:label="dei_DocumentFiscalYearFocus_638126891322006911" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_DocumentFiscalYearFocus_638126891322006911" order="34" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_DocumentFiscalPeriodFocus" xlink:label="dei_DocumentFiscalPeriodFocus_638126891322016904" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_DocumentFiscalPeriodFocus_638126891322016904" order="35" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_AmendmentFlag" xlink:label="dei_AmendmentFlag_638126891322016904" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_AmendmentFlag_638126891322016904" order="36" use="optional" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/StatementConsolidatedBalanceSheets" xlink:type="extended" xlink:title="00100 - Statement - Consolidated Balance Sheets" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_StatementOfFinancialPositionAbstract" xlink:label="StatementOfFinancialPositionAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AssetsAbstract" xlink:label="us-gaap_AssetsAbstract_638126891322016904" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="StatementOfFinancialPositionAbstract" xlink:to="us-gaap_AssetsAbstract_638126891322016904" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AssetsCurrentAbstract" xlink:label="us-gaap_AssetsCurrentAbstract_638126891322016904" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AssetsAbstract_638126891322016904" xlink:to="us-gaap_AssetsCurrentAbstract_638126891322016904" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CashAndCashEquivalentsAtCarryingValue" xlink:label="us-gaap_CashAndCashEquivalentsAtCarryingValue_638126891322016904" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AssetsCurrentAbstract_638126891322016904" xlink:to="us-gaap_CashAndCashEquivalentsAtCarryingValue_638126891322016904" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue" xlink:label="us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue_638126891322016904" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AssetsCurrentAbstract_638126891322016904" xlink:to="us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue_638126891322016904" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AvailableForSaleSecuritiesDebtSecuritiesCurrent" xlink:label="us-gaap_AvailableForSaleSecuritiesDebtSecuritiesCurrent_638126891322027184" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AssetsCurrentAbstract_638126891322016904" xlink:to="us-gaap_AvailableForSaleSecuritiesDebtSecuritiesCurrent_638126891322027184" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AccountsReceivableNetCurrent" xlink:label="us-gaap_AccountsReceivableNetCurrent_638126891322027184" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AssetsCurrentAbstract_638126891322016904" xlink:to="us-gaap_AccountsReceivableNetCurrent_638126891322027184" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_UnbilledContractsReceivable" xlink:label="us-gaap_UnbilledContractsReceivable_638126891322027184" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AssetsCurrentAbstract_638126891322016904" xlink:to="us-gaap_UnbilledContractsReceivable_638126891322027184" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_InventoryNet" xlink:label="us-gaap_InventoryNet_638126891322027184" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AssetsCurrentAbstract_638126891322016904" xlink:to="us-gaap_InventoryNet_638126891322027184" order="6" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PrepaidExpenseAndOtherAssetsCurrent" xlink:label="us-gaap_PrepaidExpenseAndOtherAssetsCurrent_638126891322027184" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AssetsCurrentAbstract_638126891322016904" xlink:to="us-gaap_PrepaidExpenseAndOtherAssetsCurrent_638126891322027184" order="7" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AssetsCurrent" xlink:label="us-gaap_AssetsCurrent_638126891322027184" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AssetsCurrentAbstract_638126891322016904" xlink:to="us-gaap_AssetsCurrent_638126891322027184" order="8" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PropertyPlantAndEquipmentNet" xlink:label="us-gaap_PropertyPlantAndEquipmentNet_638126891322027184" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AssetsAbstract_638126891322016904" xlink:to="us-gaap_PropertyPlantAndEquipmentNet_638126891322027184" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OperatingLeaseRightOfUseAsset" xlink:label="us-gaap_OperatingLeaseRightOfUseAsset_638126891322027184" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AssetsAbstract_638126891322016904" xlink:to="us-gaap_OperatingLeaseRightOfUseAsset_638126891322027184" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FiniteLivedIntangibleAssetsNet" xlink:label="us-gaap_FiniteLivedIntangibleAssetsNet_638126891322027184" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AssetsAbstract_638126891322016904" xlink:to="us-gaap_FiniteLivedIntangibleAssetsNet_638126891322027184" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_Goodwill" xlink:label="us-gaap_Goodwill_638126891322027184" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AssetsAbstract_638126891322016904" xlink:to="us-gaap_Goodwill_638126891322027184" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredIncomeTaxAssetsNet" xlink:label="us-gaap_DeferredIncomeTaxAssetsNet_638126891322036900" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AssetsAbstract_638126891322016904" xlink:to="us-gaap_DeferredIncomeTaxAssetsNet_638126891322036900" order="6" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OtherAssetsNoncurrent" xlink:label="us-gaap_OtherAssetsNoncurrent_638126891322036900" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AssetsAbstract_638126891322016904" xlink:to="us-gaap_OtherAssetsNoncurrent_638126891322036900" order="7" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_Assets" xlink:label="us-gaap_Assets_638126891322036900" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AssetsAbstract_638126891322016904" xlink:to="us-gaap_Assets_638126891322036900" order="8" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LiabilitiesAndStockholdersEquityAbstract" xlink:label="us-gaap_LiabilitiesAndStockholdersEquityAbstract_638126891322036900" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="StatementOfFinancialPositionAbstract" xlink:to="us-gaap_LiabilitiesAndStockholdersEquityAbstract_638126891322036900" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LiabilitiesCurrentAbstract" xlink:label="us-gaap_LiabilitiesCurrentAbstract_638126891322036900" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LiabilitiesAndStockholdersEquityAbstract_638126891322036900" xlink:to="us-gaap_LiabilitiesCurrentAbstract_638126891322036900" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AccountsPayableCurrent" xlink:label="us-gaap_AccountsPayableCurrent_638126891322036900" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LiabilitiesCurrentAbstract_638126891322036900" xlink:to="us-gaap_AccountsPayableCurrent_638126891322036900" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_AccruedAndOtherLiabilitiesCurrent" xlink:label="veco_AccruedAndOtherLiabilitiesCurrent_638126891322036900" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LiabilitiesCurrentAbstract_638126891322036900" xlink:to="veco_AccruedAndOtherLiabilitiesCurrent_638126891322036900" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_ContractWithCustomerLiabilityAndRefundLiabilityCurrent" xlink:label="veco_ContractWithCustomerLiabilityAndRefundLiabilityCurrent_638126891322036900" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LiabilitiesCurrentAbstract_638126891322036900" xlink:to="veco_ContractWithCustomerLiabilityAndRefundLiabilityCurrent_638126891322036900" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AccruedIncomeTaxesCurrent" xlink:label="us-gaap_AccruedIncomeTaxesCurrent_638126891322036900" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LiabilitiesCurrentAbstract_638126891322036900" xlink:to="us-gaap_AccruedIncomeTaxesCurrent_638126891322036900" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LongTermDebtCurrent" xlink:label="us-gaap_LongTermDebtCurrent_638126891322047148" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LiabilitiesCurrentAbstract_638126891322036900" xlink:to="us-gaap_LongTermDebtCurrent_638126891322047148" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LiabilitiesCurrent" xlink:label="us-gaap_LiabilitiesCurrent_638126891322047148" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LiabilitiesCurrentAbstract_638126891322036900" xlink:to="us-gaap_LiabilitiesCurrent_638126891322047148" order="6" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredIncomeTaxLiabilitiesNet" xlink:label="us-gaap_DeferredIncomeTaxLiabilitiesNet_638126891322047148" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LiabilitiesAndStockholdersEquityAbstract_638126891322036900" xlink:to="us-gaap_DeferredIncomeTaxLiabilitiesNet_638126891322047148" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LongTermDebtNoncurrent" xlink:label="us-gaap_LongTermDebtNoncurrent_638126891322047148" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LiabilitiesAndStockholdersEquityAbstract_638126891322036900" xlink:to="us-gaap_LongTermDebtNoncurrent_638126891322047148" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OperatingLeaseLiabilityNoncurrent" xlink:label="us-gaap_OperatingLeaseLiabilityNoncurrent_638126891322047148" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LiabilitiesAndStockholdersEquityAbstract_638126891322036900" xlink:to="us-gaap_OperatingLeaseLiabilityNoncurrent_638126891322047148" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OtherLiabilitiesNoncurrent" xlink:label="us-gaap_OtherLiabilitiesNoncurrent_638126891322047148" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LiabilitiesAndStockholdersEquityAbstract_638126891322036900" xlink:to="us-gaap_OtherLiabilitiesNoncurrent_638126891322047148" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_Liabilities" xlink:label="us-gaap_Liabilities_638126891322047148" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LiabilitiesAndStockholdersEquityAbstract_638126891322036900" xlink:to="us-gaap_Liabilities_638126891322047148" order="6" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_StockholdersEquityAbstract" xlink:label="us-gaap_StockholdersEquityAbstract_638126891322047148" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LiabilitiesAndStockholdersEquityAbstract_638126891322036900" xlink:to="us-gaap_StockholdersEquityAbstract_638126891322047148" order="7" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PreferredStockValue" xlink:label="us-gaap_PreferredStockValue_638126891322127101" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StockholdersEquityAbstract_638126891322047148" xlink:to="us-gaap_PreferredStockValue_638126891322127101" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CommonStockValue" xlink:label="us-gaap_CommonStockValue_638126891322127101" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StockholdersEquityAbstract_638126891322047148" xlink:to="us-gaap_CommonStockValue_638126891322127101" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AdditionalPaidInCapitalCommonStock" xlink:label="us-gaap_AdditionalPaidInCapitalCommonStock_638126891322127101" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StockholdersEquityAbstract_638126891322047148" xlink:to="us-gaap_AdditionalPaidInCapitalCommonStock_638126891322127101" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_RetainedEarningsAccumulatedDeficit" xlink:label="us-gaap_RetainedEarningsAccumulatedDeficit_638126891322127101" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StockholdersEquityAbstract_638126891322047148" xlink:to="us-gaap_RetainedEarningsAccumulatedDeficit_638126891322127101" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax_638126891322136906" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StockholdersEquityAbstract_638126891322047148" xlink:to="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax_638126891322136906" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_StockholdersEquity" xlink:label="us-gaap_StockholdersEquity_638126891322136906" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StockholdersEquityAbstract_638126891322047148" xlink:to="us-gaap_StockholdersEquity_638126891322136906" order="6" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LiabilitiesAndStockholdersEquity" xlink:label="us-gaap_LiabilitiesAndStockholdersEquity_638126891322136906" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LiabilitiesAndStockholdersEquityAbstract_638126891322036900" xlink:to="us-gaap_LiabilitiesAndStockholdersEquity_638126891322136906" order="8" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/StatementConsolidatedBalanceSheetsParenthetical" xlink:type="extended" xlink:title="00105 - Statement - Consolidated Balance Sheets (Parenthetical)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_StatementOfFinancialPositionAbstract" xlink:label="StatementOfFinancialPositionAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PreferredStockParOrStatedValuePerShare" xlink:label="us-gaap_PreferredStockParOrStatedValuePerShare_638126891322147182" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="StatementOfFinancialPositionAbstract" xlink:to="us-gaap_PreferredStockParOrStatedValuePerShare_638126891322147182" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PreferredStockSharesAuthorized" xlink:label="us-gaap_PreferredStockSharesAuthorized_638126891322147182" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="StatementOfFinancialPositionAbstract" xlink:to="us-gaap_PreferredStockSharesAuthorized_638126891322147182" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PreferredStockSharesIssued" xlink:label="us-gaap_PreferredStockSharesIssued_638126891322147182" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="StatementOfFinancialPositionAbstract" xlink:to="us-gaap_PreferredStockSharesIssued_638126891322147182" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PreferredStockSharesOutstanding" xlink:label="us-gaap_PreferredStockSharesOutstanding_638126891322147182" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="StatementOfFinancialPositionAbstract" xlink:to="us-gaap_PreferredStockSharesOutstanding_638126891322147182" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CommonStockParOrStatedValuePerShare" xlink:label="us-gaap_CommonStockParOrStatedValuePerShare_638126891322147182" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="StatementOfFinancialPositionAbstract" xlink:to="us-gaap_CommonStockParOrStatedValuePerShare_638126891322147182" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CommonStockSharesAuthorized" xlink:label="us-gaap_CommonStockSharesAuthorized_638126891322147182" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="StatementOfFinancialPositionAbstract" xlink:to="us-gaap_CommonStockSharesAuthorized_638126891322147182" order="6" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CommonStockSharesIssued" xlink:label="us-gaap_CommonStockSharesIssued_638126891322147182" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="StatementOfFinancialPositionAbstract" xlink:to="us-gaap_CommonStockSharesIssued_638126891322147182" order="7" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CommonStockSharesOutstanding" xlink:label="us-gaap_CommonStockSharesOutstanding_638126891322147182" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="StatementOfFinancialPositionAbstract" xlink:to="us-gaap_CommonStockSharesOutstanding_638126891322147182" order="8" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations" xlink:type="extended" xlink:title="00200 - Statement - Consolidated Statements of Operations" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeStatementAbstract" xlink:label="IncomeStatementAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_RevenueFromContractWithCustomerIncludingAssessedTax" xlink:label="us-gaap_RevenueFromContractWithCustomerIncludingAssessedTax_638126891322147182" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="IncomeStatementAbstract" xlink:to="us-gaap_RevenueFromContractWithCustomerIncludingAssessedTax_638126891322147182" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CostOfGoodsAndServicesSold" xlink:label="us-gaap_CostOfGoodsAndServicesSold_638126891322156897" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="IncomeStatementAbstract" xlink:to="us-gaap_CostOfGoodsAndServicesSold_638126891322156897" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_GrossProfit" xlink:label="us-gaap_GrossProfit_638126891322156897" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="IncomeStatementAbstract" xlink:to="us-gaap_GrossProfit_638126891322156897" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OperatingExpensesAbstract" xlink:label="us-gaap_OperatingExpensesAbstract_638126891322156897" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="IncomeStatementAbstract" xlink:to="us-gaap_OperatingExpensesAbstract_638126891322156897" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ResearchAndDevelopmentExpense" xlink:label="us-gaap_ResearchAndDevelopmentExpense_638126891322156897" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OperatingExpensesAbstract_638126891322156897" xlink:to="us-gaap_ResearchAndDevelopmentExpense_638126891322156897" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SellingGeneralAndAdministrativeExpense" xlink:label="us-gaap_SellingGeneralAndAdministrativeExpense_638126891322156897" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OperatingExpensesAbstract_638126891322156897" xlink:to="us-gaap_SellingGeneralAndAdministrativeExpense_638126891322156897" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AmortizationOfIntangibleAssets" xlink:label="us-gaap_AmortizationOfIntangibleAssets_638126891322156897" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OperatingExpensesAbstract_638126891322156897" xlink:to="us-gaap_AmortizationOfIntangibleAssets_638126891322156897" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_RestructuringCharges" xlink:label="us-gaap_RestructuringCharges_638126891322156897" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OperatingExpensesAbstract_638126891322156897" xlink:to="us-gaap_RestructuringCharges_638126891322156897" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AssetImpairmentCharges" xlink:label="us-gaap_AssetImpairmentCharges_638126891322156897" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OperatingExpensesAbstract_638126891322156897" xlink:to="us-gaap_AssetImpairmentCharges_638126891322156897" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="3" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OtherOperatingIncomeExpenseNet" xlink:label="us-gaap_OtherOperatingIncomeExpenseNet_638126891322156897" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OperatingExpensesAbstract_638126891322156897" xlink:to="us-gaap_OtherOperatingIncomeExpenseNet_638126891322156897" order="6" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OperatingExpenses" xlink:label="us-gaap_OperatingExpenses_638126891322156897" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OperatingExpensesAbstract_638126891322156897" xlink:to="us-gaap_OperatingExpenses_638126891322156897" order="7" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OperatingIncomeLoss" xlink:label="us-gaap_OperatingIncomeLoss_638126891322156897" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="IncomeStatementAbstract" xlink:to="us-gaap_OperatingIncomeLoss_638126891322156897" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_InvestmentIncomeInterest" xlink:label="us-gaap_InvestmentIncomeInterest_638126891322166902" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="IncomeStatementAbstract" xlink:to="us-gaap_InvestmentIncomeInterest_638126891322166902" order="6" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_InterestExpense" xlink:label="us-gaap_InterestExpense_638126891322166902" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="IncomeStatementAbstract" xlink:to="us-gaap_InterestExpense_638126891322166902" order="7" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OtherNonoperatingIncomeExpense" xlink:label="us-gaap_OtherNonoperatingIncomeExpense_638126891322166902" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="IncomeStatementAbstract" xlink:to="us-gaap_OtherNonoperatingIncomeExpense_638126891322166902" order="8" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest_638126891322166902" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="IncomeStatementAbstract" xlink:to="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest_638126891322166902" order="9" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeTaxExpenseBenefit" xlink:label="us-gaap_IncomeTaxExpenseBenefit_638126891322166902" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="IncomeStatementAbstract" xlink:to="us-gaap_IncomeTaxExpenseBenefit_638126891322166902" order="10" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_NetIncomeLoss" xlink:label="us-gaap_NetIncomeLoss_638126891322166902" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="IncomeStatementAbstract" xlink:to="us-gaap_NetIncomeLoss_638126891322166902" order="11" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_EarningsPerShareAbstract" xlink:label="us-gaap_EarningsPerShareAbstract_638126891322166902" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="IncomeStatementAbstract" xlink:to="us-gaap_EarningsPerShareAbstract_638126891322166902" order="12" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_EarningsPerShareBasic" xlink:label="us-gaap_EarningsPerShareBasic_638126891322166902" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EarningsPerShareAbstract_638126891322166902" xlink:to="us-gaap_EarningsPerShareBasic_638126891322166902" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="3" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_EarningsPerShareDiluted" xlink:label="us-gaap_EarningsPerShareDiluted_638126891322166902" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EarningsPerShareAbstract_638126891322166902" xlink:to="us-gaap_EarningsPerShareDiluted_638126891322166902" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="3" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract" xlink:label="us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract_638126891322177135" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="IncomeStatementAbstract" xlink:to="us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract_638126891322177135" order="13" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_WeightedAverageNumberOfSharesOutstandingBasic" xlink:label="us-gaap_WeightedAverageNumberOfSharesOutstandingBasic_638126891322177135" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract_638126891322177135" xlink:to="us-gaap_WeightedAverageNumberOfSharesOutstandingBasic_638126891322177135" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding" xlink:label="us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding_638126891322177135" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract_638126891322177135" xlink:to="us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding_638126891322177135" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/StatementConsolidatedStatementsOfComprehensiveIncomeLoss" xlink:type="extended" xlink:title="00300 - Statement - Consolidated Statements of Comprehensive Income (Loss)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract" xlink:label="us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract_637426774404739175" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_NetIncomeLoss" xlink:label="us-gaap_NetIncomeLoss_638126891322177135" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract_637426774404739175" xlink:to="us-gaap_NetIncomeLoss_638126891322177135" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParentAbstract" xlink:label="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParentAbstract_638126891322177135" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract_637426774404739175" xlink:to="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParentAbstract_638126891322177135" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OtherComprehensiveIncomeAvailableforsaleSecuritiesAdjustmentNetOfTaxPortionAttributableToParentAbstract" xlink:label="us-gaap_OtherComprehensiveIncomeAvailableforsaleSecuritiesAdjustmentNetOfTaxPortionAttributableToParentAbstract_638126891322177135" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParentAbstract_638126891322177135" xlink:to="us-gaap_OtherComprehensiveIncomeAvailableforsaleSecuritiesAdjustmentNetOfTaxPortionAttributableToParentAbstract_638126891322177135" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="3" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OtherComprehensiveIncomeUnrealizedHoldingGainLossOnSecuritiesArisingDuringPeriodNetOfTax" xlink:label="us-gaap_OtherComprehensiveIncomeUnrealizedHoldingGainLossOnSecuritiesArisingDuringPeriodNetOfTax_638126891322177135" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OtherComprehensiveIncomeAvailableforsaleSecuritiesAdjustmentNetOfTaxPortionAttributableToParentAbstract_638126891322177135" xlink:to="us-gaap_OtherComprehensiveIncomeUnrealizedHoldingGainLossOnSecuritiesArisingDuringPeriodNetOfTax_638126891322177135" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="3" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OtherComprehensiveIncomeAvailableforsaleSecuritiesAdjustmentNetOfTaxPortionAttributableToParent" xlink:label="us-gaap_OtherComprehensiveIncomeAvailableforsaleSecuritiesAdjustmentNetOfTaxPortionAttributableToParent_638126891322187149" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OtherComprehensiveIncomeAvailableforsaleSecuritiesAdjustmentNetOfTaxPortionAttributableToParentAbstract_638126891322177135" xlink:to="us-gaap_OtherComprehensiveIncomeAvailableforsaleSecuritiesAdjustmentNetOfTaxPortionAttributableToParent_638126891322187149" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" priority="9" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParentAbstract" xlink:label="us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParentAbstract_638126891322187149" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract_637426774404739175" xlink:to="us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParentAbstract_638126891322187149" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationGainLossArisingDuringPeriodNetOfTax" xlink:label="us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationGainLossArisingDuringPeriodNetOfTax_638126891322187149" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParentAbstract_638126891322187149" xlink:to="us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationGainLossArisingDuringPeriodNetOfTax_638126891322187149" order="1" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" priority="6" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent" xlink:label="us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent_638126891322187149" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParentAbstract_638126891322187149" xlink:to="us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent_638126891322187149" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent" xlink:label="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent_638126891322187149" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParentAbstract_638126891322187149" xlink:to="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent_638126891322187149" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" priority="6" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ComprehensiveIncomeNetOfTax" xlink:label="us-gaap_ComprehensiveIncomeNetOfTax_638126891322187149" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract_637426774404739175" xlink:to="us-gaap_ComprehensiveIncomeNetOfTax_638126891322187149" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/StatementConsolidatedStatementsOfStockholdersEquity" xlink:type="extended" xlink:title="00400 - Statement - Consolidated Statements of Stockholders' Equity" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_StatementOfStockholdersEquityAbstract" xlink:label="us-gaap_StatementOfStockholdersEquityAbstract_636010828310222591" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_StatementTable" xlink:label="us-gaap_StatementTable_638126891322187149" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementOfStockholdersEquityAbstract_636010828310222591" xlink:to="us-gaap_StatementTable_638126891322187149" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_StatementEquityComponentsAxis" xlink:label="us-gaap_StatementEquityComponentsAxis_638126891322187149" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementTable_638126891322187149" xlink:to="us-gaap_StatementEquityComponentsAxis_638126891322187149" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CommonStockMember" xlink:label="us-gaap_CommonStockMember_638126891322197107" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementEquityComponentsAxis_638126891322187149" xlink:to="us-gaap_CommonStockMember_638126891322197107" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AdditionalPaidInCapitalMember" xlink:label="us-gaap_AdditionalPaidInCapitalMember_638126891322197107" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementEquityComponentsAxis_638126891322187149" xlink:to="us-gaap_AdditionalPaidInCapitalMember_638126891322197107" order="2" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_RetainedEarningsMember" xlink:label="us-gaap_RetainedEarningsMember_638126891322197107" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementEquityComponentsAxis_638126891322187149" xlink:to="us-gaap_RetainedEarningsMember_638126891322197107" order="3" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeMember" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeMember_638126891322197107" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementEquityComponentsAxis_638126891322187149" xlink:to="us-gaap_AccumulatedOtherComprehensiveIncomeMember_638126891322197107" order="4" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_EquityComponentDomain" xlink:label="us-gaap_EquityComponentDomain_638126891322197107" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementEquityComponentsAxis_638126891322187149" xlink:to="us-gaap_EquityComponentDomain_638126891322197107" order="5" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentAxis" xlink:label="us-gaap_DebtInstrumentAxis_638126891322197107" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementTable_638126891322187149" xlink:to="us-gaap_DebtInstrumentAxis_638126891322197107" order="2" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_ConvertibleSeniorUnsecuredNotesDue2025Member" xlink:label="veco_ConvertibleSeniorUnsecuredNotesDue2025Member_638126891322197107" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentAxis_638126891322197107" xlink:to="veco_ConvertibleSeniorUnsecuredNotesDue2025Member_638126891322197107" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_ConvertibleSeniorUnsecuredNotesDue2027Member" xlink:label="veco_ConvertibleSeniorUnsecuredNotesDue2027Member_638126891322197107" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentAxis_638126891322197107" xlink:to="veco_ConvertibleSeniorUnsecuredNotesDue2027Member_638126891322197107" order="2" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentNameDomain" xlink:label="us-gaap_DebtInstrumentNameDomain_638126891322197107" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentAxis_638126891322197107" xlink:to="us-gaap_DebtInstrumentNameDomain_638126891322197107" order="3" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_CumulativeEffectPeriodOfAdoptionAxis" xlink:label="srt_CumulativeEffectPeriodOfAdoptionAxis_638126891322197107" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementTable_638126891322187149" xlink:to="srt_CumulativeEffectPeriodOfAdoptionAxis_638126891322197107" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_CumulativeEffectPeriodOfAdoptionAdjustmentMember" xlink:label="srt_CumulativeEffectPeriodOfAdoptionAdjustmentMember_638126891322197107" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_CumulativeEffectPeriodOfAdoptionAxis_638126891322197107" xlink:to="srt_CumulativeEffectPeriodOfAdoptionAdjustmentMember_638126891322197107" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_CumulativeEffectPeriodOfAdoptionDomain" xlink:label="srt_CumulativeEffectPeriodOfAdoptionDomain_638126891322197107" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_CumulativeEffectPeriodOfAdoptionAxis_638126891322197107" xlink:to="srt_CumulativeEffectPeriodOfAdoptionDomain_638126891322197107" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_StatementLineItems" xlink:label="us-gaap_StatementLineItems_638126891322207143" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementTable_638126891322187149" xlink:to="us-gaap_StatementLineItems_638126891322207143" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncreaseDecreaseInStockholdersEquityRollForward" xlink:label="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward_638126891322207143" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementLineItems_638126891322207143" xlink:to="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward_638126891322207143" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_StockholdersEquity" xlink:label="us-gaap_StockholdersEquity_638126891322207143" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward_638126891322207143" xlink:to="us-gaap_StockholdersEquity_638126891322207143" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodStartLabel" priority="7" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SharesOutstanding" xlink:label="us-gaap_SharesOutstanding_638126891322207143" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward_638126891322207143" xlink:to="us-gaap_SharesOutstanding_638126891322207143" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodStartLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_NetIncomeLoss" xlink:label="us-gaap_NetIncomeLoss_638126891322207143" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward_638126891322207143" xlink:to="us-gaap_NetIncomeLoss_638126891322207143" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="7" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_OtherComprehensiveIncomeLossIncludingForeignCurrencyGainsLossesOnTransactionsIncludedInOperatingResultsNetOfTax" xlink:label="veco_OtherComprehensiveIncomeLossIncludingForeignCurrencyGainsLossesOnTransactionsIncludedInOperatingResultsNetOfTax_638126891322207143" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward_638126891322207143" xlink:to="veco_OtherComprehensiveIncomeLossIncludingForeignCurrencyGainsLossesOnTransactionsIncludedInOperatingResultsNetOfTax_638126891322207143" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="3" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue" xlink:label="us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue_638126891322207143" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward_638126891322207143" xlink:to="us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue_638126891322207143" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_StockIssuedDuringPeriodValueShareBasedCompensation" xlink:label="us-gaap_StockIssuedDuringPeriodValueShareBasedCompensation_638126891322207143" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward_638126891322207143" xlink:to="us-gaap_StockIssuedDuringPeriodValueShareBasedCompensation_638126891322207143" order="6" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="5" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_StockIssuedDuringPeriodSharesShareBasedCompensation" xlink:label="us-gaap_StockIssuedDuringPeriodSharesShareBasedCompensation_638126891322217134" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward_638126891322207143" xlink:to="us-gaap_StockIssuedDuringPeriodSharesShareBasedCompensation_638126891322217134" order="7" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="5" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_AdjustmentsToAdditionalPaidInCapitalExtinguishmentEquityComponentOfNotesRepurchased" xlink:label="veco_AdjustmentsToAdditionalPaidInCapitalExtinguishmentEquityComponentOfNotesRepurchased_638126891322217134" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward_638126891322207143" xlink:to="veco_AdjustmentsToAdditionalPaidInCapitalExtinguishmentEquityComponentOfNotesRepurchased_638126891322217134" order="8" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AdjustmentsToAdditionalPaidInCapitalEquityComponentOfConvertibleDebt" xlink:label="us-gaap_AdjustmentsToAdditionalPaidInCapitalEquityComponentOfConvertibleDebt_638126891322217134" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward_638126891322207143" xlink:to="us-gaap_AdjustmentsToAdditionalPaidInCapitalEquityComponentOfConvertibleDebt_638126891322217134" order="9" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="7" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_AdjustmentsToAdditionalPaidInCapitalPurchaseOfDerivativeInstrument" xlink:label="veco_AdjustmentsToAdditionalPaidInCapitalPurchaseOfDerivativeInstrument_638126891322217134" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward_638126891322207143" xlink:to="veco_AdjustmentsToAdditionalPaidInCapitalPurchaseOfDerivativeInstrument_638126891322217134" order="10" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_StockholdersEquity" xlink:label="us-gaap_StockholdersEquity_638126891322217134" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward_638126891322207143" xlink:to="us-gaap_StockholdersEquity_638126891322217134" order="11" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel" priority="7" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SharesOutstanding" xlink:label="us-gaap_SharesOutstanding_638126891322217134" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward_638126891322207143" xlink:to="us-gaap_SharesOutstanding_638126891322217134" order="12" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows" xlink:type="extended" xlink:title="00500 - Statement - Consolidated Statements of Cash Flows" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_StatementOfCashFlowsAbstract" xlink:label="StatementOfCashFlowsAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_NetCashProvidedByUsedInOperatingActivitiesContinuingOperationsAbstract" xlink:label="us-gaap_NetCashProvidedByUsedInOperatingActivitiesContinuingOperationsAbstract_638126891322227234" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="StatementOfCashFlowsAbstract" xlink:to="us-gaap_NetCashProvidedByUsedInOperatingActivitiesContinuingOperationsAbstract_638126891322227234" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ProfitLoss" xlink:label="us-gaap_ProfitLoss_638126891322227234" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivitiesContinuingOperationsAbstract_638126891322227234" xlink:to="us-gaap_ProfitLoss_638126891322227234" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract" xlink:label="us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_638126891322227234" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivitiesContinuingOperationsAbstract_638126891322227234" xlink:to="us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_638126891322227234" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DepreciationDepletionAndAmortization" xlink:label="us-gaap_DepreciationDepletionAndAmortization_638126891322227234" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_638126891322227234" xlink:to="us-gaap_DepreciationDepletionAndAmortization_638126891322227234" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AmortizationOfFinancingCostsAndDiscounts" xlink:label="us-gaap_AmortizationOfFinancingCostsAndDiscounts_638126891322227234" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_638126891322227234" xlink:to="us-gaap_AmortizationOfFinancingCostsAndDiscounts_638126891322227234" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="6" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredIncomeTaxExpenseBenefit" xlink:label="us-gaap_DeferredIncomeTaxExpenseBenefit_638126891322227234" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_638126891322227234" xlink:to="us-gaap_DeferredIncomeTaxExpenseBenefit_638126891322227234" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensation" xlink:label="us-gaap_ShareBasedCompensation_638126891322227234" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_638126891322227234" xlink:to="us-gaap_ShareBasedCompensation_638126891322227234" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_GainsLossesOnExtinguishmentOfDebt" xlink:label="us-gaap_GainsLossesOnExtinguishmentOfDebt_638126891322227234" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_638126891322227234" xlink:to="us-gaap_GainsLossesOnExtinguishmentOfDebt_638126891322227234" order="5" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AssetImpairmentCharges" xlink:label="us-gaap_AssetImpairmentCharges_638126891322227234" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_638126891322227234" xlink:to="us-gaap_AssetImpairmentCharges_638126891322227234" order="6" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_ImpairmentLossesInvestmentsNonCash" xlink:label="veco_ImpairmentLossesInvestmentsNonCash_638126891322236915" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_638126891322227234" xlink:to="veco_ImpairmentLossesInvestmentsNonCash_638126891322236915" order="7" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ProvisionForDoubtfulAccounts" xlink:label="us-gaap_ProvisionForDoubtfulAccounts_638126891322236915" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_638126891322227234" xlink:to="us-gaap_ProvisionForDoubtfulAccounts_638126891322236915" order="8" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncreaseDecreaseInOperatingCapitalAbstract" xlink:label="us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_638126891322236915" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_638126891322227234" xlink:to="us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_638126891322236915" order="9" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_IncreaseDecreaseInAccountsReceivableAndContractAssets" xlink:label="veco_IncreaseDecreaseInAccountsReceivableAndContractAssets_638126891322236915" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_638126891322236915" xlink:to="veco_IncreaseDecreaseInAccountsReceivableAndContractAssets_638126891322236915" order="1" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" priority="8" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncreaseDecreaseInInventories" xlink:label="us-gaap_IncreaseDecreaseInInventories_638126891322236915" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_638126891322236915" xlink:to="us-gaap_IncreaseDecreaseInInventories_638126891322236915" order="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets" xlink:label="us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets_638126891322236915" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_638126891322236915" xlink:to="us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets_638126891322236915" order="3" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncreaseDecreaseInAccountsPayableAndAccruedLiabilities" xlink:label="us-gaap_IncreaseDecreaseInAccountsPayableAndAccruedLiabilities_638126891322236915" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_638126891322236915" xlink:to="us-gaap_IncreaseDecreaseInAccountsPayableAndAccruedLiabilities_638126891322236915" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_IncreaseDecreaseInCustomerDepositsAndDeferredRevenue" xlink:label="veco_IncreaseDecreaseInCustomerDepositsAndDeferredRevenue_638126891322236915" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_638126891322236915" xlink:to="veco_IncreaseDecreaseInCustomerDepositsAndDeferredRevenue_638126891322236915" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="3" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncreaseDecreaseInIncomeTaxesPayableNetOfIncomeTaxesReceivable" xlink:label="us-gaap_IncreaseDecreaseInIncomeTaxesPayableNetOfIncomeTaxesReceivable_638126891322236915" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_638126891322236915" xlink:to="us-gaap_IncreaseDecreaseInIncomeTaxesPayableNetOfIncomeTaxesReceivable_638126891322236915" order="6" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncreaseDecreaseInOtherOperatingCapitalNet" xlink:label="us-gaap_IncreaseDecreaseInOtherOperatingCapitalNet_638126891322246911" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_638126891322236915" xlink:to="us-gaap_IncreaseDecreaseInOtherOperatingCapitalNet_638126891322246911" order="7" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_NetCashProvidedByUsedInOperatingActivities" xlink:label="us-gaap_NetCashProvidedByUsedInOperatingActivities_638126891322246911" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivitiesContinuingOperationsAbstract_638126891322227234" xlink:to="us-gaap_NetCashProvidedByUsedInOperatingActivities_638126891322246911" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_NetCashProvidedByUsedInInvestingActivitiesContinuingOperationsAbstract" xlink:label="us-gaap_NetCashProvidedByUsedInInvestingActivitiesContinuingOperationsAbstract_638126891322246911" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="StatementOfCashFlowsAbstract" xlink:to="us-gaap_NetCashProvidedByUsedInInvestingActivitiesContinuingOperationsAbstract_638126891322246911" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PaymentsToAcquirePropertyPlantAndEquipment" xlink:label="us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_638126891322246911" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NetCashProvidedByUsedInInvestingActivitiesContinuingOperationsAbstract_638126891322246911" xlink:to="us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_638126891322246911" order="1" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ProceedsFromSaleAndMaturityOfAvailableForSaleSecurities" xlink:label="us-gaap_ProceedsFromSaleAndMaturityOfAvailableForSaleSecurities_638126891322246911" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NetCashProvidedByUsedInInvestingActivitiesContinuingOperationsAbstract_638126891322246911" xlink:to="us-gaap_ProceedsFromSaleAndMaturityOfAvailableForSaleSecurities_638126891322246911" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PaymentsToAcquireAvailableForSaleSecuritiesDebt" xlink:label="us-gaap_PaymentsToAcquireAvailableForSaleSecuritiesDebt_638126891322246911" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NetCashProvidedByUsedInInvestingActivitiesContinuingOperationsAbstract_638126891322246911" xlink:to="us-gaap_PaymentsToAcquireAvailableForSaleSecuritiesDebt_638126891322246911" order="3" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ProceedsFromSaleOfPropertyPlantAndEquipment" xlink:label="us-gaap_ProceedsFromSaleOfPropertyPlantAndEquipment_638126891322246911" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NetCashProvidedByUsedInInvestingActivitiesContinuingOperationsAbstract_638126891322246911" xlink:to="us-gaap_ProceedsFromSaleOfPropertyPlantAndEquipment_638126891322246911" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_NetCashProvidedByUsedInInvestingActivities" xlink:label="us-gaap_NetCashProvidedByUsedInInvestingActivities_638126891322246911" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NetCashProvidedByUsedInInvestingActivitiesContinuingOperationsAbstract_638126891322246911" xlink:to="us-gaap_NetCashProvidedByUsedInInvestingActivities_638126891322246911" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_NetCashProvidedByUsedInFinancingActivitiesContinuingOperationsAbstract" xlink:label="us-gaap_NetCashProvidedByUsedInFinancingActivitiesContinuingOperationsAbstract_638126891322246911" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="StatementOfCashFlowsAbstract" xlink:to="us-gaap_NetCashProvidedByUsedInFinancingActivitiesContinuingOperationsAbstract_638126891322246911" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ProceedsFromConvertibleDebt" xlink:label="us-gaap_ProceedsFromConvertibleDebt_638126891322258528" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NetCashProvidedByUsedInFinancingActivitiesContinuingOperationsAbstract_638126891322246911" xlink:to="us-gaap_ProceedsFromConvertibleDebt_638126891322258528" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="6" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PaymentsForDerivativeInstrumentFinancingActivities" xlink:label="us-gaap_PaymentsForDerivativeInstrumentFinancingActivities_638126891322258528" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NetCashProvidedByUsedInFinancingActivitiesContinuingOperationsAbstract_638126891322246911" xlink:to="us-gaap_PaymentsForDerivativeInstrumentFinancingActivities_638126891322258528" order="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_RepaymentsOfUnsecuredDebt" xlink:label="us-gaap_RepaymentsOfUnsecuredDebt_638126891322258528" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NetCashProvidedByUsedInFinancingActivitiesContinuingOperationsAbstract_638126891322246911" xlink:to="us-gaap_RepaymentsOfUnsecuredDebt_638126891322258528" order="3" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" priority="6" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PaymentsOfDebtIssuanceCosts" xlink:label="us-gaap_PaymentsOfDebtIssuanceCosts_638126891322258528" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NetCashProvidedByUsedInFinancingActivitiesContinuingOperationsAbstract_638126891322246911" xlink:to="us-gaap_PaymentsOfDebtIssuanceCosts_638126891322258528" order="4" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ProceedsFromIssuanceOrSaleOfEquity" xlink:label="us-gaap_ProceedsFromIssuanceOrSaleOfEquity_638126891322258528" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NetCashProvidedByUsedInFinancingActivitiesContinuingOperationsAbstract_638126891322246911" xlink:to="us-gaap_ProceedsFromIssuanceOrSaleOfEquity_638126891322258528" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PaymentsRelatedToTaxWithholdingForShareBasedCompensation" xlink:label="us-gaap_PaymentsRelatedToTaxWithholdingForShareBasedCompensation_638126891322258528" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NetCashProvidedByUsedInFinancingActivitiesContinuingOperationsAbstract_638126891322246911" xlink:to="us-gaap_PaymentsRelatedToTaxWithholdingForShareBasedCompensation_638126891322258528" order="6" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedTerseLabel" priority="3" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_NetCashProvidedByUsedInFinancingActivities" xlink:label="us-gaap_NetCashProvidedByUsedInFinancingActivities_638126891322267168" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NetCashProvidedByUsedInFinancingActivitiesContinuingOperationsAbstract_638126891322246911" xlink:to="us-gaap_NetCashProvidedByUsedInFinancingActivities_638126891322267168" order="7" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations" xlink:label="us-gaap_EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations_638126891322267168" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="StatementOfCashFlowsAbstract" xlink:to="us-gaap_EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations_638126891322267168" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect_638126891322267168" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="StatementOfCashFlowsAbstract" xlink:to="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect_638126891322267168" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents_638126891322267168" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="StatementOfCashFlowsAbstract" xlink:to="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents_638126891322267168" order="6" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodStartLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents_6381268913222671681" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="StatementOfCashFlowsAbstract" xlink:to="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents_6381268913222671681" order="7" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SupplementalCashFlowInformationAbstract" xlink:label="us-gaap_SupplementalCashFlowInformationAbstract_638126891322267168" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="StatementOfCashFlowsAbstract" xlink:to="us-gaap_SupplementalCashFlowInformationAbstract_638126891322267168" order="8" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_InterestPaidNet" xlink:label="us-gaap_InterestPaidNet_638126891322267168" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SupplementalCashFlowInformationAbstract_638126891322267168" xlink:to="us-gaap_InterestPaidNet_638126891322267168" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeTaxesPaidNet" xlink:label="us-gaap_IncomeTaxesPaidNet_638126891322277370" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SupplementalCashFlowInformationAbstract_638126891322267168" xlink:to="us-gaap_IncomeTaxesPaidNet_638126891322277370" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_NonCashOperatingAndFinancingActivitiesAbstract" xlink:label="veco_NonCashOperatingAndFinancingActivitiesAbstract_638126891322277370" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="StatementOfCashFlowsAbstract" xlink:to="veco_NonCashOperatingAndFinancingActivitiesAbstract_638126891322277370" order="9" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CapitalExpendituresIncurredButNotYetPaid" xlink:label="us-gaap_CapitalExpendituresIncurredButNotYetPaid_638126891322277370" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="veco_NonCashOperatingAndFinancingActivitiesAbstract_638126891322277370" xlink:to="us-gaap_CapitalExpendituresIncurredButNotYetPaid_638126891322277370" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_TransferFromInventories" xlink:label="veco_TransferFromInventories_638126891322277370" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="veco_NonCashOperatingAndFinancingActivitiesAbstract_638126891322277370" xlink:to="veco_TransferFromInventories_638126891322277370" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="7" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability" xlink:label="us-gaap_RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability_638126891322277370" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="veco_NonCashOperatingAndFinancingActivitiesAbstract_638126891322277370" xlink:to="us-gaap_RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability_638126891322277370" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="8" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureSignificantAccountingPolicies" xlink:type="extended" xlink:title="10101 - Disclosure - Significant Accounting Policies" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:label="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_636077277923779333" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OrganizationConsolidationBasisOfPresentationBusinessDescriptionAndAccountingPoliciesTextBlock" xlink:label="us-gaap_OrganizationConsolidationBasisOfPresentationBusinessDescriptionAndAccountingPoliciesTextBlock_638126891322286897" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_636077277923779333" xlink:to="us-gaap_OrganizationConsolidationBasisOfPresentationBusinessDescriptionAndAccountingPoliciesTextBlock_638126891322286897" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureIncomePerCommonShare" xlink:type="extended" xlink:title="10201 - Disclosure - Income Per Common Share" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_EarningsPerShareAbstract" xlink:label="EarningsPerShareAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_EarningsPerShareTextBlock" xlink:label="us-gaap_EarningsPerShareTextBlock_638126891322286897" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="EarningsPerShareAbstract" xlink:to="us-gaap_EarningsPerShareTextBlock_638126891322286897" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureFairValueMeasurements" xlink:type="extended" xlink:title="10301 - Disclosure - Fair Value Measurements" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FairValueDisclosuresAbstract" xlink:label="FairValueDisclosuresAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FairValueDisclosuresTextBlock" xlink:label="us-gaap_FairValueDisclosuresTextBlock_638126891322296913" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="FairValueDisclosuresAbstract" xlink:to="us-gaap_FairValueDisclosuresTextBlock_638126891322296913" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureInvestments" xlink:type="extended" xlink:title="10401 - Disclosure - Investments" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_InvestmentsDebtAndEquitySecuritiesAbstract" xlink:label="us-gaap_InvestmentsDebtAndEquitySecuritiesAbstract_636077277923779333" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_InvestmentsInDebtAndMarketableEquitySecuritiesAndCertainTradingAssetsDisclosureTextBlock" xlink:label="us-gaap_InvestmentsInDebtAndMarketableEquitySecuritiesAndCertainTradingAssetsDisclosureTextBlock_638126891322296913" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_InvestmentsDebtAndEquitySecuritiesAbstract_636077277923779333" xlink:to="us-gaap_InvestmentsInDebtAndMarketableEquitySecuritiesAndCertainTradingAssetsDisclosureTextBlock_638126891322296913" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureInventories" xlink:type="extended" xlink:title="10501 - Disclosure - Inventories" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_InventoryDisclosureAbstract" xlink:label="us-gaap_InventoryDisclosureAbstract_636077277923935336" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_InventoryDisclosureTextBlock" xlink:label="us-gaap_InventoryDisclosureTextBlock_638126891322296913" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_InventoryDisclosureAbstract_636077277923935336" xlink:to="us-gaap_InventoryDisclosureTextBlock_638126891322296913" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosurePropertyPlantAndEquipment" xlink:type="extended" xlink:title="10601 - Disclosure - Property, Plant, and Equipment" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PropertyPlantAndEquipmentAbstract" xlink:label="us-gaap_PropertyPlantAndEquipmentAbstract_636077277923935336" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PropertyPlantAndEquipmentDisclosureTextBlock" xlink:label="us-gaap_PropertyPlantAndEquipmentDisclosureTextBlock_638126891322307163" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PropertyPlantAndEquipmentAbstract_636077277923935336" xlink:to="us-gaap_PropertyPlantAndEquipmentDisclosureTextBlock_638126891322307163" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssets" xlink:type="extended" xlink:title="10701 - Disclosure - Goodwill and Intangible Assets" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_GoodwillAndIntangibleAssetsDisclosureAbstract" xlink:label="us-gaap_GoodwillAndIntangibleAssetsDisclosureAbstract_636077277923935336" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_GoodwillAndIntangibleAssetsDisclosureTextBlock" xlink:label="us-gaap_GoodwillAndIntangibleAssetsDisclosureTextBlock_638126891322307163" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_GoodwillAndIntangibleAssetsDisclosureAbstract_636077277923935336" xlink:to="us-gaap_GoodwillAndIntangibleAssetsDisclosureTextBlock_638126891322307163" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilities" xlink:type="extended" xlink:title="10801 - Disclosure - Accrued Expenses and Other Liabilities" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PayablesAndAccrualsAbstract" xlink:label="us-gaap_PayablesAndAccrualsAbstract_636077277923935336" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AccountsPayableAndAccruedLiabilitiesDisclosureTextBlock" xlink:label="us-gaap_AccountsPayableAndAccruedLiabilitiesDisclosureTextBlock_638126891322317168" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PayablesAndAccrualsAbstract_636077277923935336" xlink:to="us-gaap_AccountsPayableAndAccruedLiabilitiesDisclosureTextBlock_638126891322317168" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureCommitmentsAndContingencies" xlink:type="extended" xlink:title="10901 - Disclosure - Commitments and Contingencies" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CommitmentsAndContingenciesDisclosureAbstract" xlink:label="us-gaap_CommitmentsAndContingenciesDisclosureAbstract_636077277923935336" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CommitmentsAndContingenciesDisclosureTextBlock" xlink:label="us-gaap_CommitmentsAndContingenciesDisclosureTextBlock_638126891322317168" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CommitmentsAndContingenciesDisclosureAbstract_636077277923935336" xlink:to="us-gaap_CommitmentsAndContingenciesDisclosureTextBlock_638126891322317168" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureDebt" xlink:type="extended" xlink:title="11001 - Disclosure - Debt" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtDisclosureAbstract" xlink:label="us-gaap_DebtDisclosureAbstract_636077277923935336" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtDisclosureTextBlock" xlink:label="us-gaap_DebtDisclosureTextBlock_638126891322326976" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtDisclosureAbstract_636077277923935336" xlink:to="us-gaap_DebtDisclosureTextBlock_638126891322326976" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureStockholdersEquity" xlink:type="extended" xlink:title="11101 - Disclosure - Stockholders' Equity" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_StockholdersEquityNoteAbstract" xlink:label="us-gaap_StockholdersEquityNoteAbstract_636077277923935336" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_StockholdersEquityNoteDisclosureTextBlock" xlink:label="us-gaap_StockholdersEquityNoteDisclosureTextBlock_638126891322326976" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StockholdersEquityNoteAbstract_636077277923935336" xlink:to="us-gaap_StockholdersEquityNoteDisclosureTextBlock_638126891322326976" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureStockPlans" xlink:type="extended" xlink:title="11201 - Disclosure - Stock Plans" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xlink:label="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock" xlink:label="us-gaap_DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock_638126891322337200" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xlink:to="us-gaap_DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock_638126891322337200" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="6" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureRetirementPlans" xlink:type="extended" xlink:title="11301 - Disclosure - Retirement Plans" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CompensationAndRetirementDisclosureAbstract" xlink:label="us-gaap_CompensationAndRetirementDisclosureAbstract_636077277923935336" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PensionAndOtherPostretirementBenefitsDisclosureTextBlock" xlink:label="us-gaap_PensionAndOtherPostretirementBenefitsDisclosureTextBlock_638126891322337200" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CompensationAndRetirementDisclosureAbstract_636077277923935336" xlink:to="us-gaap_PensionAndOtherPostretirementBenefitsDisclosureTextBlock_638126891322337200" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureDispositions" xlink:type="extended" xlink:title="11401 - Disclosure - Dispositions" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DiscontinuedOperationsAndDisposalGroupsAbstract" xlink:label="us-gaap_DiscontinuedOperationsAndDisposalGroupsAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DisposalGroupsIncludingDiscontinuedOperationsDisclosureTextBlock" xlink:label="us-gaap_DisposalGroupsIncludingDiscontinuedOperationsDisclosureTextBlock_638126891322346913" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DiscontinuedOperationsAndDisposalGroupsAbstract" xlink:to="us-gaap_DisposalGroupsIncludingDiscontinuedOperationsDisclosureTextBlock_638126891322346913" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="3" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureIncomeTaxes" xlink:type="extended" xlink:title="11501 - Disclosure - Income Taxes" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeTaxDisclosureAbstract" xlink:label="us-gaap_IncomeTaxDisclosureAbstract_636077277923935336" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeTaxDisclosureTextBlock" xlink:label="us-gaap_IncomeTaxDisclosureTextBlock_638126891322346913" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxDisclosureAbstract_636077277923935336" xlink:to="us-gaap_IncomeTaxDisclosureTextBlock_638126891322346913" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformation" xlink:type="extended" xlink:title="11601 - Disclosure - Segment Reporting and Geographic Information" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SegmentReportingAbstract" xlink:label="us-gaap_SegmentReportingAbstract_636083302131801385" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SegmentReportingDisclosureTextBlock" xlink:label="us-gaap_SegmentReportingDisclosureTextBlock_638126891322346913" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingAbstract_636083302131801385" xlink:to="us-gaap_SegmentReportingDisclosureTextBlock_638126891322346913" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureSubsequentEvents" xlink:type="extended" xlink:title="11701 - Disclosure - Subsequent Events" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SubsequentEventsAbstract" xlink:label="us-gaap_SubsequentEventsAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SubsequentEventsTextBlock" xlink:label="us-gaap_SubsequentEventsTextBlock_638126891322356895" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SubsequentEventsAbstract" xlink:to="us-gaap_SubsequentEventsTextBlock_638126891322356895" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureScheduleIiValuationAndQualifyingAccounts" xlink:type="extended" xlink:title="11801 - Disclosure - Schedule II - Valuation and Qualifying Accounts" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_ValuationAndQualifyingAccountsAbstract" xlink:label="srt_ValuationAndQualifyingAccountsAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_ScheduleOfValuationAndQualifyingAccountsDisclosureTextBlock" xlink:label="srt_ScheduleOfValuationAndQualifyingAccountsDisclosureTextBlock_638126891322356895" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_ValuationAndQualifyingAccountsAbstract" xlink:to="srt_ScheduleOfValuationAndQualifyingAccountsDisclosureTextBlock_638126891322356895" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesPolicies" xlink:type="extended" xlink:title="20102 - Disclosure - Significant Accounting Policies (Policies)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:label="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_636077277923935336" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FiscalPeriod" xlink:label="us-gaap_FiscalPeriod_638126891322366901" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_636077277923935336" xlink:to="us-gaap_FiscalPeriod_638126891322366901" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_UseOfEstimates" xlink:label="us-gaap_UseOfEstimates_638126891322366901" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_636077277923935336" xlink:to="us-gaap_UseOfEstimates_638126891322366901" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ConsolidationPolicyTextBlock" xlink:label="us-gaap_ConsolidationPolicyTextBlock_638126891322366901" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_636077277923935336" xlink:to="us-gaap_ConsolidationPolicyTextBlock_638126891322366901" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ForeignCurrencyTransactionsAndTranslationsPolicyTextBlock" xlink:label="us-gaap_ForeignCurrencyTransactionsAndTranslationsPolicyTextBlock_638126891322366901" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_636077277923935336" xlink:to="us-gaap_ForeignCurrencyTransactionsAndTranslationsPolicyTextBlock_638126891322366901" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_RevenueFromContractWithCustomerPolicyTextBlock" xlink:label="us-gaap_RevenueFromContractWithCustomerPolicyTextBlock_638126891322366901" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_636077277923935336" xlink:to="us-gaap_RevenueFromContractWithCustomerPolicyTextBlock_638126891322366901" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_StandardProductWarrantyPolicy" xlink:label="us-gaap_StandardProductWarrantyPolicy_638126891322366901" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_636077277923935336" xlink:to="us-gaap_StandardProductWarrantyPolicy_638126891322366901" order="6" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ResearchAndDevelopmentExpensePolicy" xlink:label="us-gaap_ResearchAndDevelopmentExpensePolicy_638126891322366901" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_636077277923935336" xlink:to="us-gaap_ResearchAndDevelopmentExpensePolicy_638126891322366901" order="7" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AdvertisingCostsPolicyTextBlock" xlink:label="us-gaap_AdvertisingCostsPolicyTextBlock_638126891322366901" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_636077277923935336" xlink:to="us-gaap_AdvertisingCostsPolicyTextBlock_638126891322366901" order="8" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationOptionAndIncentivePlansPolicy" xlink:label="us-gaap_ShareBasedCompensationOptionAndIncentivePlansPolicy_638126891322366901" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_636077277923935336" xlink:to="us-gaap_ShareBasedCompensationOptionAndIncentivePlansPolicy_638126891322366901" order="9" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeTaxPolicyTextBlock" xlink:label="us-gaap_IncomeTaxPolicyTextBlock_638126891322366901" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_636077277923935336" xlink:to="us-gaap_IncomeTaxPolicyTextBlock_638126891322366901" order="10" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ConcentrationRiskCreditRisk" xlink:label="us-gaap_ConcentrationRiskCreditRisk_638126891322366901" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_636077277923935336" xlink:to="us-gaap_ConcentrationRiskCreditRisk_638126891322366901" order="11" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FairValueOfFinancialInstrumentsPolicy" xlink:label="us-gaap_FairValueOfFinancialInstrumentsPolicy_638126891322366901" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_636077277923935336" xlink:to="us-gaap_FairValueOfFinancialInstrumentsPolicy_638126891322366901" order="12" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_CashCashEquivalentsAndShortTermInvestmentsPolicyTextBlock" xlink:label="veco_CashCashEquivalentsAndShortTermInvestmentsPolicyTextBlock_638126891322377136" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_636077277923935336" xlink:to="veco_CashCashEquivalentsAndShortTermInvestmentsPolicyTextBlock_638126891322377136" order="13" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_InventoryPolicyTextBlock" xlink:label="us-gaap_InventoryPolicyTextBlock_638126891322377136" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_636077277923935336" xlink:to="us-gaap_InventoryPolicyTextBlock_638126891322377136" order="14" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_BusinessCombinationsPolicy" xlink:label="us-gaap_BusinessCombinationsPolicy_638126891322377136" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_636077277923935336" xlink:to="us-gaap_BusinessCombinationsPolicy_638126891322377136" order="15" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_GoodwillAndIntangibleAssetsIntangibleAssetsIndefiniteLivedPolicy" xlink:label="us-gaap_GoodwillAndIntangibleAssetsIntangibleAssetsIndefiniteLivedPolicy_638126891322377136" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_636077277923935336" xlink:to="us-gaap_GoodwillAndIntangibleAssetsIntangibleAssetsIndefiniteLivedPolicy_638126891322377136" order="16" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_LongLivedAssetsAndCostMethodInvestmentsPolicyTextBlock" xlink:label="veco_LongLivedAssetsAndCostMethodInvestmentsPolicyTextBlock_638126891322377136" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_636077277923935336" xlink:to="veco_LongLivedAssetsAndCostMethodInvestmentsPolicyTextBlock_638126891322377136" order="17" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LesseeLeasesPolicyTextBlock" xlink:label="us-gaap_LesseeLeasesPolicyTextBlock_638126891322377136" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_636077277923935336" xlink:to="us-gaap_LesseeLeasesPolicyTextBlock_638126891322377136" order="18" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_NewAccountingPronouncementsPolicyPolicyTextBlock" xlink:label="us-gaap_NewAccountingPronouncementsPolicyPolicyTextBlock_638126891322377136" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_636077277923935336" xlink:to="us-gaap_NewAccountingPronouncementsPolicyPolicyTextBlock_638126891322377136" order="19" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesTables" xlink:type="extended" xlink:title="30103 - Disclosure - Significant Accounting Policies (Tables)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:label="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfNewAccountingPronouncementsAndChangesInAccountingPrinciplesTextBlock" xlink:label="us-gaap_ScheduleOfNewAccountingPronouncementsAndChangesInAccountingPrinciplesTextBlock_638126891322387189" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_1" xlink:to="us-gaap_ScheduleOfNewAccountingPronouncementsAndChangesInAccountingPrinciplesTextBlock_638126891322387189" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureIncomePerCommonShareTables" xlink:type="extended" xlink:title="30203 - Disclosure - Income Per Common Share (Tables)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_EarningsPerShareAbstract" xlink:label="EarningsPerShareAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock" xlink:label="us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock_638126891322387189" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="EarningsPerShareAbstract" xlink:to="us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock_638126891322387189" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureFairValueMeasurementsTables" xlink:type="extended" xlink:title="30303 - Disclosure - Fair Value Measurements (Tables)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FairValueDisclosuresAbstract" xlink:label="us-gaap_FairValueDisclosuresAbstract_636077277924091339" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FairValueAssetsMeasuredOnRecurringBasisTextBlock" xlink:label="us-gaap_FairValueAssetsMeasuredOnRecurringBasisTextBlock_638126891322397189" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueDisclosuresAbstract_636077277924091339" xlink:to="us-gaap_FairValueAssetsMeasuredOnRecurringBasisTextBlock_638126891322397189" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureInvestmentsTables" xlink:type="extended" xlink:title="30403 - Disclosure - Investments (Tables)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_InvestmentsDebtAndEquitySecuritiesAbstract" xlink:label="us-gaap_InvestmentsDebtAndEquitySecuritiesAbstract_636077277924091339" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfAvailableForSaleSecuritiesReconciliationTableTextBlock" xlink:label="us-gaap_ScheduleOfAvailableForSaleSecuritiesReconciliationTableTextBlock_638126891322397189" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_InvestmentsDebtAndEquitySecuritiesAbstract_636077277924091339" xlink:to="us-gaap_ScheduleOfAvailableForSaleSecuritiesReconciliationTableTextBlock_638126891322397189" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtSecuritiesAvailableForSaleUnrealizedLossPositionFairValueTableTextBlock" xlink:label="us-gaap_DebtSecuritiesAvailableForSaleUnrealizedLossPositionFairValueTableTextBlock_638126891322397189" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_InvestmentsDebtAndEquitySecuritiesAbstract_636077277924091339" xlink:to="us-gaap_DebtSecuritiesAvailableForSaleUnrealizedLossPositionFairValueTableTextBlock_638126891322397189" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_InvestmentsClassifiedByContractualMaturityDateTableTextBlock" xlink:label="us-gaap_InvestmentsClassifiedByContractualMaturityDateTableTextBlock_638126891322397189" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_InvestmentsDebtAndEquitySecuritiesAbstract_636077277924091339" xlink:to="us-gaap_InvestmentsClassifiedByContractualMaturityDateTableTextBlock_638126891322397189" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureInventoriesTables" xlink:type="extended" xlink:title="30503 - Disclosure - Inventories (Tables)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_InventoryDisclosureAbstract" xlink:label="us-gaap_InventoryDisclosureAbstract_636077277924247342" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfInventoryCurrentTableTextBlock" xlink:label="us-gaap_ScheduleOfInventoryCurrentTableTextBlock_638126891322406895" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_InventoryDisclosureAbstract_636077277924247342" xlink:to="us-gaap_ScheduleOfInventoryCurrentTableTextBlock_638126891322406895" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosurePropertyPlantAndEquipmentTables" xlink:type="extended" xlink:title="30603 - Disclosure - Property, Plant, and Equipment (Tables)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PropertyPlantAndEquipmentAbstract" xlink:label="us-gaap_PropertyPlantAndEquipmentAbstract_636077277924247342" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PropertyPlantAndEquipmentTextBlock" xlink:label="us-gaap_PropertyPlantAndEquipmentTextBlock_638126891322406895" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PropertyPlantAndEquipmentAbstract_636077277924247342" xlink:to="us-gaap_PropertyPlantAndEquipmentTextBlock_638126891322406895" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssetsTables" xlink:type="extended" xlink:title="30703 - Disclosure - Goodwill and Intangible Assets (Tables)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_GoodwillAndIntangibleAssetsDisclosureAbstract" xlink:label="us-gaap_GoodwillAndIntangibleAssetsDisclosureAbstract_636077277924247342" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfGoodwillTextBlock" xlink:label="us-gaap_ScheduleOfGoodwillTextBlock_638126891322406895" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_GoodwillAndIntangibleAssetsDisclosureAbstract_636077277924247342" xlink:to="us-gaap_ScheduleOfGoodwillTextBlock_638126891322406895" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_ScheduleOfIntangibleAssetsExcludingGoodwillTableTextBlock" xlink:label="veco_ScheduleOfIntangibleAssetsExcludingGoodwillTableTextBlock_638126891322406895" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_GoodwillAndIntangibleAssetsDisclosureAbstract_636077277924247342" xlink:to="veco_ScheduleOfIntangibleAssetsExcludingGoodwillTableTextBlock_638126891322406895" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleofFiniteLivedIntangibleAssetsFutureAmortizationExpenseTableTextBlock" xlink:label="us-gaap_ScheduleofFiniteLivedIntangibleAssetsFutureAmortizationExpenseTableTextBlock_638126891322417140" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_GoodwillAndIntangibleAssetsDisclosureAbstract_636077277924247342" xlink:to="us-gaap_ScheduleofFiniteLivedIntangibleAssetsFutureAmortizationExpenseTableTextBlock_638126891322417140" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesTables" xlink:type="extended" xlink:title="30803 - Disclosure - Accrued Expenses and Other Liabilities (Tables)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PayablesAndAccrualsAbstract" xlink:label="us-gaap_PayablesAndAccrualsAbstract_636077277924247342" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfAccruedLiabilitiesTableTextBlock" xlink:label="us-gaap_ScheduleOfAccruedLiabilitiesTableTextBlock_638126891322467193" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PayablesAndAccrualsAbstract_636077277924247342" xlink:to="us-gaap_ScheduleOfAccruedLiabilitiesTableTextBlock_638126891322467193" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_ScheduleOfDeferredRevenueTableTextBlock" xlink:label="veco_ScheduleOfDeferredRevenueTableTextBlock_638126891322467193" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PayablesAndAccrualsAbstract_636077277924247342" xlink:to="veco_ScheduleOfDeferredRevenueTableTextBlock_638126891322467193" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesTables" xlink:type="extended" xlink:title="30903 - Disclosure - Commitments and Contingencies (Tables)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CommitmentsAndContingenciesDisclosureAbstract" xlink:label="us-gaap_CommitmentsAndContingenciesDisclosureAbstract_636077277924247342" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock" xlink:label="us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock_638126891322476907" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CommitmentsAndContingenciesDisclosureAbstract_636077277924247342" xlink:to="us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock_638126891322476907" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LesseeOperatingLeaseLiabilityMaturityTableTextBlock" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityMaturityTableTextBlock_638126891322476907" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CommitmentsAndContingenciesDisclosureAbstract_636077277924247342" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityMaturityTableTextBlock_638126891322476907" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfRevenueByMajorCustomersByReportingSegmentsTableTextBlock" xlink:label="us-gaap_ScheduleOfRevenueByMajorCustomersByReportingSegmentsTableTextBlock_638126891322476907" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CommitmentsAndContingenciesDisclosureAbstract_636077277924247342" xlink:to="us-gaap_ScheduleOfRevenueByMajorCustomersByReportingSegmentsTableTextBlock_638126891322476907" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureDebtTables" xlink:type="extended" xlink:title="31003 - Disclosure - Debt (Tables)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtDisclosureAbstract" xlink:label="us-gaap_DebtDisclosureAbstract_636077277924247342" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ConvertibleDebtTableTextBlock" xlink:label="us-gaap_ConvertibleDebtTableTextBlock_638126891322476907" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtDisclosureAbstract_636077277924247342" xlink:to="us-gaap_ConvertibleDebtTableTextBlock_638126891322476907" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_InterestIncomeAndInterestExpenseDisclosureTableTextBlock" xlink:label="us-gaap_InterestIncomeAndInterestExpenseDisclosureTableTextBlock_638126891322476907" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtDisclosureAbstract_636077277924247342" xlink:to="us-gaap_InterestIncomeAndInterestExpenseDisclosureTableTextBlock_638126891322476907" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureStockholdersEquityTables" xlink:type="extended" xlink:title="31103 - Disclosure - Stockholders' Equity (Tables)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_StockholdersEquityNoteAbstract" xlink:label="us-gaap_StockholdersEquityNoteAbstract_636077277924247342" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock" xlink:label="us-gaap_ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock_638126891322487122" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StockholdersEquityNoteAbstract_636077277924247342" xlink:to="us-gaap_ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock_638126891322487122" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureStockPlansTables" xlink:type="extended" xlink:title="31203 - Disclosure - Stock Plans (Tables)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xlink:label="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfEmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsTextBlock" xlink:label="us-gaap_ScheduleOfEmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsTextBlock_638126891322487122" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xlink:to="us-gaap_ScheduleOfEmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsTextBlock_638126891322487122" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfUnrecognizedCompensationCostNonvestedAwardsTableTextBlock" xlink:label="us-gaap_ScheduleOfUnrecognizedCompensationCostNonvestedAwardsTableTextBlock_638126891322487122" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xlink:to="us-gaap_ScheduleOfUnrecognizedCompensationCostNonvestedAwardsTableTextBlock_638126891322487122" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock" xlink:label="us-gaap_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock_638126891322487122" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xlink:to="us-gaap_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock_638126891322487122" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeTextBlock" xlink:label="us-gaap_ScheduleOfShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeTextBlock_638126891322487122" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xlink:to="us-gaap_ScheduleOfShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeTextBlock_638126891322487122" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="2" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_ScheduleOfStockOptionExercisedTableTextBlock" xlink:label="veco_ScheduleOfStockOptionExercisedTableTextBlock_638126891322497118" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xlink:to="veco_ScheduleOfStockOptionExercisedTableTextBlock_638126891322497118" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock" xlink:label="us-gaap_ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock_638126891322497118" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xlink:to="us-gaap_ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock_638126891322497118" order="6" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_ScheduleOfShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsValuationAssumptionsTableTextBlock" xlink:label="veco_ScheduleOfShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsValuationAssumptionsTableTextBlock_638126891322497118" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xlink:to="veco_ScheduleOfShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsValuationAssumptionsTableTextBlock_638126891322497118" order="7" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfShareBasedPaymentAwardEmployeeStockPurchasePlanValuationAssumptionsTableTextBlock" xlink:label="us-gaap_ScheduleOfShareBasedPaymentAwardEmployeeStockPurchasePlanValuationAssumptionsTableTextBlock_638126891322497118" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xlink:to="us-gaap_ScheduleOfShareBasedPaymentAwardEmployeeStockPurchasePlanValuationAssumptionsTableTextBlock_638126891322497118" order="8" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureIncomeTaxesTables" xlink:type="extended" xlink:title="31503 - Disclosure - Income Taxes (Tables)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeTaxDisclosureAbstract" xlink:label="us-gaap_IncomeTaxDisclosureAbstract_636077277924247342" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfIncomeBeforeIncomeTaxDomesticAndForeignTableTextBlock" xlink:label="us-gaap_ScheduleOfIncomeBeforeIncomeTaxDomesticAndForeignTableTextBlock_638126891322497118" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxDisclosureAbstract_636077277924247342" xlink:to="us-gaap_ScheduleOfIncomeBeforeIncomeTaxDomesticAndForeignTableTextBlock_638126891322497118" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock" xlink:label="us-gaap_ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock_638126891322497118" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxDisclosureAbstract_636077277924247342" xlink:to="us-gaap_ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock_638126891322497118" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfEffectiveIncomeTaxRateReconciliationTableTextBlock" xlink:label="us-gaap_ScheduleOfEffectiveIncomeTaxRateReconciliationTableTextBlock_638126891322497118" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxDisclosureAbstract_636077277924247342" xlink:to="us-gaap_ScheduleOfEffectiveIncomeTaxRateReconciliationTableTextBlock_638126891322497118" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock" xlink:label="us-gaap_ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock_638126891322497118" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxDisclosureAbstract_636077277924247342" xlink:to="us-gaap_ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock_638126891322497118" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SummaryOfIncomeTaxContingenciesTextBlock" xlink:label="us-gaap_SummaryOfIncomeTaxContingenciesTextBlock_638126891322507201" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxDisclosureAbstract_636077277924247342" xlink:to="us-gaap_SummaryOfIncomeTaxContingenciesTextBlock_638126891322507201" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformationTables" xlink:type="extended" xlink:title="31603 - Disclosure - Segment Reporting and Geographic Information (Tables)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SegmentReportingAbstract" xlink:label="SegmentReportingAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfEntityWideInformationRevenueFromExternalCustomersByProductsAndServicesTextBlock" xlink:label="us-gaap_ScheduleOfEntityWideInformationRevenueFromExternalCustomersByProductsAndServicesTextBlock_638126891322507201" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="SegmentReportingAbstract" xlink:to="us-gaap_ScheduleOfEntityWideInformationRevenueFromExternalCustomersByProductsAndServicesTextBlock_638126891322507201" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsByGeographicalAreasTableTextBlock" xlink:label="us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsByGeographicalAreasTableTextBlock_638126891322507201" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="SegmentReportingAbstract" xlink:to="us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsByGeographicalAreasTableTextBlock_638126891322507201" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesDescriptionOfBusinessAndBasisOfPresentationDetails" xlink:type="extended" xlink:title="40101 - Disclosure - Significant Accounting Policies - Description of Business and Basis of Presentation (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:label="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_NumberOfOperatingSegments" xlink:label="us-gaap_NumberOfOperatingSegments_638126891322517186" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:to="us-gaap_NumberOfOperatingSegments_638126891322517186" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="5" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FiscalPeriodDuration" xlink:label="us-gaap_FiscalPeriodDuration_638126891322517186" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:to="us-gaap_FiscalPeriodDuration_638126891322517186" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesRevenueRecognitionDetails" xlink:type="extended" xlink:title="40102 - Disclosure - Significant Accounting Policies - Revenue Recognition (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:label="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_RevenuePracticalExpedientIncrementalCostOfObtainingContract" xlink:label="us-gaap_RevenuePracticalExpedientIncrementalCostOfObtainingContract_638126891322517186" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:to="us-gaap_RevenuePracticalExpedientIncrementalCostOfObtainingContract_638126891322517186" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesWarrantyCostsDetails" xlink:type="extended" xlink:title="40103 - Disclosure - Significant Accounting Policies - Warranty Costs (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:label="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_ProductWarrantyPeriod" xlink:label="veco_ProductWarrantyPeriod_638126891322526981" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:to="veco_ProductWarrantyPeriod_638126891322526981" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesAdvertisingExpenseDetails" xlink:type="extended" xlink:title="40104 - Disclosure - Significant Accounting Policies - Advertising Expense (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:label="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AdvertisingExpense" xlink:label="us-gaap_AdvertisingExpense_638126891322526981" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:to="us-gaap_AdvertisingExpense_638126891322526981" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="3" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesAccountingForShareBasedCompensationDetails" xlink:type="extended" xlink:title="40105 - Disclosure - Significant Accounting Policies - Accounting for Share-Based Compensation (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:label="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_636850781835218735" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardServiceConditionsAndGradedVestingNumberOfAwards" xlink:label="veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardServiceConditionsAndGradedVestingNumberOfAwards_638126891322537151" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_636850781835218735" xlink:to="veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardServiceConditionsAndGradedVestingNumberOfAwards_638126891322537151" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesConcentrationOfCreditRiskDetails" xlink:type="extended" xlink:title="40106 - Disclosure - Significant Accounting Policies - Concentration of Credit Risk (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:label="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent" xlink:label="us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent_638126891322537151" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:to="us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent_638126891322537151" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_IrrevocableLettersOfCreditMaturityPeriodMinimum" xlink:label="veco_IrrevocableLettersOfCreditMaturityPeriodMinimum_638126891322537151" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:to="veco_IrrevocableLettersOfCreditMaturityPeriodMinimum_638126891322537151" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_IrrevocableLettersOfCreditMaturityPeriodMaximum" xlink:label="veco_IrrevocableLettersOfCreditMaturityPeriodMaximum_638126891322537151" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:to="veco_IrrevocableLettersOfCreditMaturityPeriodMaximum_638126891322537151" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesCashCashEquivalentsAndShortTermInvestmentsDetails" xlink:type="extended" xlink:title="40107 - Disclosure - Significant Accounting Policies - Cash, Cash Equivalents, and Short-term Investments (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:label="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CashEquivalentsAtCarryingValue" xlink:label="us-gaap_CashEquivalentsAtCarryingValue_638126891322547169" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:to="us-gaap_CashEquivalentsAtCarryingValue_638126891322547169" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_CashAndCashEquivalentsMaintainedOutsideBySubsidiariesAsPercent" xlink:label="veco_CashAndCashEquivalentsMaintainedOutsideBySubsidiariesAsPercent_638126891322547169" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:to="veco_CashAndCashEquivalentsMaintainedOutsideBySubsidiariesAsPercent_638126891322547169" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesGoodwillAndIndefiniteLivedIntangiblesDetails" xlink:type="extended" xlink:title="40108 - Disclosure - Significant Accounting Policies - Goodwill and Indefinite-Lived Intangibles (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:label="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_NumberOfTradingDaysConsideredToCalculateMarketCapitalization" xlink:label="veco_NumberOfTradingDaysConsideredToCalculateMarketCapitalization_638126891322547169" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:to="veco_NumberOfTradingDaysConsideredToCalculateMarketCapitalization_638126891322547169" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesRecentlyAdoptedAccountingStandardsDetails" xlink:type="extended" xlink:title="40109 - Disclosure - Significant Accounting Policies - Recently Adopted Accounting Standards (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:label="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_NewAccountingPronouncementsOrChangeInAccountingPrincipleTable" xlink:label="us-gaap_NewAccountingPronouncementsOrChangeInAccountingPrincipleTable_638126891322556893" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:to="us-gaap_NewAccountingPronouncementsOrChangeInAccountingPrincipleTable_638126891322556893" order="1" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_StatementScenarioAxis" xlink:label="srt_StatementScenarioAxis_638126891322556893" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NewAccountingPronouncementsOrChangeInAccountingPrincipleTable_638126891322556893" xlink:to="srt_StatementScenarioAxis_638126891322556893" order="1" use="optional" priority="3" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_ScenarioUnspecifiedDomain" xlink:label="srt_ScenarioUnspecifiedDomain_638126891322556893" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_StatementScenarioAxis_638126891322556893" xlink:to="srt_ScenarioUnspecifiedDomain_638126891322556893" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_CalculatedUnderGuidanceInEffectBeforeAdoptionOfAccountingStandardsUpdate202006Member" xlink:label="veco_CalculatedUnderGuidanceInEffectBeforeAdoptionOfAccountingStandardsUpdate202006Member_638126891322556893" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_ScenarioUnspecifiedDomain_638126891322556893" xlink:to="veco_CalculatedUnderGuidanceInEffectBeforeAdoptionOfAccountingStandardsUpdate202006Member_638126891322556893" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_DifferenceBetweenGuidanceInEffectBeforeAndAfterAccountingStandardsUpdate202006Member" xlink:label="veco_DifferenceBetweenGuidanceInEffectBeforeAndAfterAccountingStandardsUpdate202006Member_638126891322556893" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_ScenarioUnspecifiedDomain_638126891322556893" xlink:to="veco_DifferenceBetweenGuidanceInEffectBeforeAndAfterAccountingStandardsUpdate202006Member_638126891322556893" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AdjustmentsForNewAccountingPronouncementsAxis" xlink:label="us-gaap_AdjustmentsForNewAccountingPronouncementsAxis_638126891322556893" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NewAccountingPronouncementsOrChangeInAccountingPrincipleTable_638126891322556893" xlink:to="us-gaap_AdjustmentsForNewAccountingPronouncementsAxis_638126891322556893" order="2" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_TypeOfAdoptionMember" xlink:label="us-gaap_TypeOfAdoptionMember_638126891322556893" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AdjustmentsForNewAccountingPronouncementsAxis_638126891322556893" xlink:to="us-gaap_TypeOfAdoptionMember_638126891322556893" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AccountingStandardsUpdate201912Member" xlink:label="us-gaap_AccountingStandardsUpdate201912Member_638126891322556893" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_TypeOfAdoptionMember_638126891322556893" xlink:to="us-gaap_AccountingStandardsUpdate201912Member_638126891322556893" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AccountingStandardsUpdate202006Member" xlink:label="us-gaap_AccountingStandardsUpdate202006Member_638126891322556893" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_TypeOfAdoptionMember_638126891322556893" xlink:to="us-gaap_AccountingStandardsUpdate202006Member_638126891322556893" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_CumulativeEffectPeriodOfAdoptionAxis" xlink:label="srt_CumulativeEffectPeriodOfAdoptionAxis_638126891322566922" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NewAccountingPronouncementsOrChangeInAccountingPrincipleTable_638126891322556893" xlink:to="srt_CumulativeEffectPeriodOfAdoptionAxis_638126891322566922" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_CumulativeEffectPeriodOfAdoptionDomain" xlink:label="srt_CumulativeEffectPeriodOfAdoptionDomain_638126891322566922" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_CumulativeEffectPeriodOfAdoptionAxis_638126891322566922" xlink:to="srt_CumulativeEffectPeriodOfAdoptionDomain_638126891322566922" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_CumulativeEffectPeriodOfAdoptionAdjustmentMember" xlink:label="srt_CumulativeEffectPeriodOfAdoptionAdjustmentMember_638126891322566922" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_CumulativeEffectPeriodOfAdoptionDomain_638126891322566922" xlink:to="srt_CumulativeEffectPeriodOfAdoptionAdjustmentMember_638126891322566922" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_CumulativeEffectPeriodOfAdoptionAdjustedBalanceMember" xlink:label="srt_CumulativeEffectPeriodOfAdoptionAdjustedBalanceMember_638126891322566922" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_CumulativeEffectPeriodOfAdoptionDomain_638126891322566922" xlink:to="srt_CumulativeEffectPeriodOfAdoptionAdjustedBalanceMember_638126891322566922" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_NewAccountingPronouncementsOrChangeInAccountingPrincipleLineItems" xlink:label="us-gaap_NewAccountingPronouncementsOrChangeInAccountingPrincipleLineItems_638126891322566922" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NewAccountingPronouncementsOrChangeInAccountingPrincipleTable_638126891322556893" xlink:to="us-gaap_NewAccountingPronouncementsOrChangeInAccountingPrincipleLineItems_638126891322566922" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="6" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ChangeInAccountingPrincipleAccountingStandardsUpdateAdopted" xlink:label="us-gaap_ChangeInAccountingPrincipleAccountingStandardsUpdateAdopted_638126891322566922" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NewAccountingPronouncementsOrChangeInAccountingPrincipleLineItems_638126891322566922" xlink:to="us-gaap_ChangeInAccountingPrincipleAccountingStandardsUpdateAdopted_638126891322566922" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ChangeInAccountingPrincipleAccountingStandardsUpdateTransitionOptionElectedExtensibleList" xlink:label="us-gaap_ChangeInAccountingPrincipleAccountingStandardsUpdateTransitionOptionElectedExtensibleList_638126891322566922" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NewAccountingPronouncementsOrChangeInAccountingPrincipleLineItems_638126891322566922" xlink:to="us-gaap_ChangeInAccountingPrincipleAccountingStandardsUpdateTransitionOptionElectedExtensibleList_638126891322566922" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="2" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_BalanceSheetLineItemAbstract" xlink:label="veco_BalanceSheetLineItemAbstract_638126891322566922" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NewAccountingPronouncementsOrChangeInAccountingPrincipleLineItems_638126891322566922" xlink:to="veco_BalanceSheetLineItemAbstract_638126891322566922" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LongTermDebtNoncurrent" xlink:label="us-gaap_LongTermDebtNoncurrent_638126891322566922" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="veco_BalanceSheetLineItemAbstract_638126891322566922" xlink:to="us-gaap_LongTermDebtNoncurrent_638126891322566922" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AdditionalPaidInCapitalCommonStock" xlink:label="us-gaap_AdditionalPaidInCapitalCommonStock_638126891322566922" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="veco_BalanceSheetLineItemAbstract_638126891322566922" xlink:to="us-gaap_AdditionalPaidInCapitalCommonStock_638126891322566922" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_RetainedEarningsAccumulatedDeficit" xlink:label="us-gaap_RetainedEarningsAccumulatedDeficit_638126891322576904" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="veco_BalanceSheetLineItemAbstract_638126891322566922" xlink:to="us-gaap_RetainedEarningsAccumulatedDeficit_638126891322576904" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_EarningsPerShareDisclosureAbstract" xlink:label="veco_EarningsPerShareDisclosureAbstract_638126891322576904" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NewAccountingPronouncementsOrChangeInAccountingPrincipleLineItems_638126891322566922" xlink:to="veco_EarningsPerShareDisclosureAbstract_638126891322576904" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_EarningsPerShareBasic" xlink:label="us-gaap_EarningsPerShareBasic_638126891322576904" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="veco_EarningsPerShareDisclosureAbstract_638126891322576904" xlink:to="us-gaap_EarningsPerShareBasic_638126891322576904" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_EarningsPerShareDiluted" xlink:label="us-gaap_EarningsPerShareDiluted_638126891322576904" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="veco_EarningsPerShareDisclosureAbstract_638126891322576904" xlink:to="us-gaap_EarningsPerShareDiluted_638126891322576904" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="1" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureIncomePerCommonShareBasicAndDilutedDetails" xlink:type="extended" xlink:title="40201 - Disclosure - Income Per Common Share - Basic and Diluted (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_EarningsPerShareAbstract" xlink:label="us-gaap_EarningsPerShareAbstract" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_NetIncomeLossAvailableToCommonStockholdersAbstract" xlink:label="veco_NetIncomeLossAvailableToCommonStockholdersAbstract_638126891322576904" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EarningsPerShareAbstract" xlink:to="veco_NetIncomeLossAvailableToCommonStockholdersAbstract_638126891322576904" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic" xlink:label="us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic_638126891322576904" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="veco_NetIncomeLossAvailableToCommonStockholdersAbstract_638126891322576904" xlink:to="us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic_638126891322576904" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_InterestOnConvertibleDebtNetOfTax" xlink:label="us-gaap_InterestOnConvertibleDebtNetOfTax_638126891322576904" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="veco_NetIncomeLossAvailableToCommonStockholdersAbstract_638126891322576904" xlink:to="us-gaap_InterestOnConvertibleDebtNetOfTax_638126891322576904" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_NetIncomeLossAvailableToCommonStockholdersDiluted" xlink:label="us-gaap_NetIncomeLossAvailableToCommonStockholdersDiluted_638126891322587183" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="veco_NetIncomeLossAvailableToCommonStockholdersAbstract_638126891322576904" xlink:to="us-gaap_NetIncomeLossAvailableToCommonStockholdersDiluted_638126891322587183" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_WeightedAverageNumberOfSharesOutstandingDilutedDisclosureItemsAbstract" xlink:label="us-gaap_WeightedAverageNumberOfSharesOutstandingDilutedDisclosureItemsAbstract_638126891322587183" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EarningsPerShareAbstract" xlink:to="us-gaap_WeightedAverageNumberOfSharesOutstandingDilutedDisclosureItemsAbstract_638126891322587183" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_WeightedAverageNumberOfSharesOutstandingBasic" xlink:label="us-gaap_WeightedAverageNumberOfSharesOutstandingBasic_638126891322587183" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_WeightedAverageNumberOfSharesOutstandingDilutedDisclosureItemsAbstract_638126891322587183" xlink:to="us-gaap_WeightedAverageNumberOfSharesOutstandingBasic_638126891322587183" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="5" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_WeightedAverageNumberDilutedSharesOutstandingAdjustment" xlink:label="us-gaap_WeightedAverageNumberDilutedSharesOutstandingAdjustment_638126891322587183" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_WeightedAverageNumberOfSharesOutstandingDilutedDisclosureItemsAbstract_638126891322587183" xlink:to="us-gaap_WeightedAverageNumberDilutedSharesOutstandingAdjustment_638126891322587183" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="3" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncrementalCommonSharesAttributableToConversionOfDebtSecurities" xlink:label="us-gaap_IncrementalCommonSharesAttributableToConversionOfDebtSecurities_638126891322587183" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_WeightedAverageNumberOfSharesOutstandingDilutedDisclosureItemsAbstract_638126891322587183" xlink:to="us-gaap_IncrementalCommonSharesAttributableToConversionOfDebtSecurities_638126891322587183" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding" xlink:label="us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding_638126891322587183" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_WeightedAverageNumberOfSharesOutstandingDilutedDisclosureItemsAbstract_638126891322587183" xlink:to="us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding_638126891322587183" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" priority="8" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_EarningsPerShareDisclosureAbstract" xlink:label="veco_EarningsPerShareDisclosureAbstract_638126891322587183" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EarningsPerShareAbstract" xlink:to="veco_EarningsPerShareDisclosureAbstract_638126891322587183" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_EarningsPerShareBasic" xlink:label="us-gaap_EarningsPerShareBasic_638126891322587183" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="veco_EarningsPerShareDisclosureAbstract_638126891322587183" xlink:to="us-gaap_EarningsPerShareBasic_638126891322587183" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_EarningsPerShareDiluted" xlink:label="us-gaap_EarningsPerShareDiluted_638126891322587183" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="veco_EarningsPerShareDisclosureAbstract_638126891322587183" xlink:to="us-gaap_EarningsPerShareDiluted_638126891322587183" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureIncomePerCommonShareSharesExcludedFromEpsDetails" xlink:type="extended" xlink:title="40202 - Disclosure - Income Per Common Share - Shares Excluded from EPS (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_EarningsPerShareAbstract" xlink:label="EarningsPerShareAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfAntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareTable" xlink:label="us-gaap_ScheduleOfAntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareTable_638126891322597121" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="EarningsPerShareAbstract" xlink:to="us-gaap_ScheduleOfAntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareTable_638126891322597121" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis" xlink:label="us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_638126891322597121" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfAntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareTable_638126891322597121" xlink:to="us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_638126891322597121" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AntidilutiveSecuritiesNameDomain" xlink:label="us-gaap_AntidilutiveSecuritiesNameDomain_638126891322597121" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_638126891322597121" xlink:to="us-gaap_AntidilutiveSecuritiesNameDomain_638126891322597121" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_CommonStockEquivalentsMember" xlink:label="veco_CommonStockEquivalentsMember_638126891322597121" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AntidilutiveSecuritiesNameDomain_638126891322597121" xlink:to="veco_CommonStockEquivalentsMember_638126891322597121" order="1" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_PotentiallyDilutiveSharesMember" xlink:label="veco_PotentiallyDilutiveSharesMember_638126891322597121" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AntidilutiveSecuritiesNameDomain_638126891322597121" xlink:to="veco_PotentiallyDilutiveSharesMember_638126891322597121" order="2" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ConvertibleDebtMember" xlink:label="us-gaap_ConvertibleDebtMember_638126891322597121" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AntidilutiveSecuritiesNameDomain_638126891322597121" xlink:to="us-gaap_ConvertibleDebtMember_638126891322597121" order="3" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareLineItems" xlink:label="us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareLineItems_638126891322597121" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfAntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareTable_638126891322597121" xlink:to="us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareLineItems_638126891322597121" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_EarningsPerShareBasicOtherDisclosuresAbstract" xlink:label="us-gaap_EarningsPerShareBasicOtherDisclosuresAbstract_638126891322597121" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareLineItems_638126891322597121" xlink:to="us-gaap_EarningsPerShareBasicOtherDisclosuresAbstract_638126891322597121" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_SecuritiesExcludedFromComputationOfBasicEarningsPerShareAmount" xlink:label="veco_SecuritiesExcludedFromComputationOfBasicEarningsPerShareAmount_638126891322597121" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EarningsPerShareBasicOtherDisclosuresAbstract_638126891322597121" xlink:to="veco_SecuritiesExcludedFromComputationOfBasicEarningsPerShareAmount_638126891322597121" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_EarningsPerShareDilutedOtherDisclosuresAbstract" xlink:label="us-gaap_EarningsPerShareDilutedOtherDisclosuresAbstract_638126891322597121" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareLineItems_638126891322597121" xlink:to="us-gaap_EarningsPerShareDilutedOtherDisclosuresAbstract_638126891322597121" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount" xlink:label="us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount_638126891322597121" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EarningsPerShareDilutedOtherDisclosuresAbstract_638126891322597121" xlink:to="us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount_638126891322597121" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureFairValueMeasurementsDetails" xlink:type="extended" xlink:title="40301 - Disclosure - Fair Value Measurements (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FairValueDisclosuresAbstract" xlink:label="us-gaap_FairValueDisclosuresAbstract_636077277924403345" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable" xlink:label="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable_638126891322606945" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueDisclosuresAbstract_636077277924403345" xlink:to="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable_638126891322606945" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FairValueByMeasurementFrequencyAxis" xlink:label="us-gaap_FairValueByMeasurementFrequencyAxis_638126891322606945" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable_638126891322606945" xlink:to="us-gaap_FairValueByMeasurementFrequencyAxis_638126891322606945" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FairValueMeasurementFrequencyDomain" xlink:label="us-gaap_FairValueMeasurementFrequencyDomain_638126891322606945" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueByMeasurementFrequencyAxis_638126891322606945" xlink:to="us-gaap_FairValueMeasurementFrequencyDomain_638126891322606945" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FairValueMeasurementsRecurringMember" xlink:label="us-gaap_FairValueMeasurementsRecurringMember_638126891322606945" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueMeasurementFrequencyDomain_638126891322606945" xlink:to="us-gaap_FairValueMeasurementsRecurringMember_638126891322606945" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FairValueByFairValueHierarchyLevelAxis" xlink:label="us-gaap_FairValueByFairValueHierarchyLevelAxis_638126891322606945" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable_638126891322606945" xlink:to="us-gaap_FairValueByFairValueHierarchyLevelAxis_638126891322606945" order="2" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FairValueMeasurementsFairValueHierarchyDomain" xlink:label="us-gaap_FairValueMeasurementsFairValueHierarchyDomain_638126891322606945" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueByFairValueHierarchyLevelAxis_638126891322606945" xlink:to="us-gaap_FairValueMeasurementsFairValueHierarchyDomain_638126891322606945" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FairValueInputsLevel1Member" xlink:label="us-gaap_FairValueInputsLevel1Member_638126891322606945" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueMeasurementsFairValueHierarchyDomain_638126891322606945" xlink:to="us-gaap_FairValueInputsLevel1Member_638126891322606945" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FairValueInputsLevel2Member" xlink:label="us-gaap_FairValueInputsLevel2Member_638126891322606945" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueMeasurementsFairValueHierarchyDomain_638126891322606945" xlink:to="us-gaap_FairValueInputsLevel2Member_638126891322606945" order="2" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CashAndCashEquivalentsAxis" xlink:label="us-gaap_CashAndCashEquivalentsAxis_638126891322606945" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable_638126891322606945" xlink:to="us-gaap_CashAndCashEquivalentsAxis_638126891322606945" order="3" use="optional" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_RestrictedCashAndCashEquivalentsCashAndCashEquivalentsMember" xlink:label="us-gaap_RestrictedCashAndCashEquivalentsCashAndCashEquivalentsMember_638126891322617299" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CashAndCashEquivalentsAxis_638126891322606945" xlink:to="us-gaap_RestrictedCashAndCashEquivalentsCashAndCashEquivalentsMember_638126891322617299" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_CertificateOfDepositsAndTimeDepositsMember" xlink:label="veco_CertificateOfDepositsAndTimeDepositsMember_638126891322617299" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_RestrictedCashAndCashEquivalentsCashAndCashEquivalentsMember_638126891322617299" xlink:to="veco_CertificateOfDepositsAndTimeDepositsMember_638126891322617299" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_MoneyMarketFundsExcludingGovernmentFundsMember" xlink:label="veco_MoneyMarketFundsExcludingGovernmentFundsMember_638126891322617299" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_RestrictedCashAndCashEquivalentsCashAndCashEquivalentsMember_638126891322617299" xlink:to="veco_MoneyMarketFundsExcludingGovernmentFundsMember_638126891322617299" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FinancialInstrumentAxis" xlink:label="us-gaap_FinancialInstrumentAxis_638126891322617299" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable_638126891322606945" xlink:to="us-gaap_FinancialInstrumentAxis_638126891322617299" order="4" use="optional" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_TransfersAndServicingOfFinancialInstrumentsTypesOfFinancialInstrumentsDomain" xlink:label="us-gaap_TransfersAndServicingOfFinancialInstrumentsTypesOfFinancialInstrumentsDomain_638126891322617299" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FinancialInstrumentAxis_638126891322617299" xlink:to="us-gaap_TransfersAndServicingOfFinancialInstrumentsTypesOfFinancialInstrumentsDomain_638126891322617299" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_USTreasurySecuritiesMember" xlink:label="us-gaap_USTreasurySecuritiesMember_638126891322617299" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_TransfersAndServicingOfFinancialInstrumentsTypesOfFinancialInstrumentsDomain_638126891322617299" xlink:to="us-gaap_USTreasurySecuritiesMember_638126891322617299" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_USGovernmentAgenciesDebtSecuritiesMember" xlink:label="us-gaap_USGovernmentAgenciesDebtSecuritiesMember_638126891322617299" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_TransfersAndServicingOfFinancialInstrumentsTypesOfFinancialInstrumentsDomain_638126891322617299" xlink:to="us-gaap_USGovernmentAgenciesDebtSecuritiesMember_638126891322617299" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CorporateDebtSecuritiesMember" xlink:label="us-gaap_CorporateDebtSecuritiesMember_638126891322617299" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_TransfersAndServicingOfFinancialInstrumentsTypesOfFinancialInstrumentsDomain_638126891322617299" xlink:to="us-gaap_CorporateDebtSecuritiesMember_638126891322617299" order="3" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CommercialPaperMember" xlink:label="us-gaap_CommercialPaperMember_638126891322617299" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_TransfersAndServicingOfFinancialInstrumentsTypesOfFinancialInstrumentsDomain_638126891322617299" xlink:to="us-gaap_CommercialPaperMember_638126891322617299" order="4" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:label="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems_638126891322626963" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable_638126891322606945" xlink:to="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems_638126891322626963" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CashAndCashEquivalentsAbstract" xlink:label="us-gaap_CashAndCashEquivalentsAbstract_638126891322626963" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems_638126891322626963" xlink:to="us-gaap_CashAndCashEquivalentsAbstract_638126891322626963" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="5" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_CashEquivalentsFairValueDisclosure" xlink:label="veco_CashEquivalentsFairValueDisclosure_638126891322626963" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CashAndCashEquivalentsAbstract_638126891322626963" xlink:to="veco_CashEquivalentsFairValueDisclosure_638126891322626963" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShortTermInvestmentsAbstract" xlink:label="us-gaap_ShortTermInvestmentsAbstract_638126891322626963" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems_638126891322626963" xlink:to="us-gaap_ShortTermInvestmentsAbstract_638126891322626963" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="5" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_InvestmentsFairValueDisclosure" xlink:label="us-gaap_InvestmentsFairValueDisclosure_638126891322626963" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShortTermInvestmentsAbstract_638126891322626963" xlink:to="us-gaap_InvestmentsFairValueDisclosure_638126891322626963" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureInvestmentsAvailableForSaleSecuritiesDetails" xlink:type="extended" xlink:title="40401 - Disclosure - Investments - Available-For-Sale Securities (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_InvestmentsDebtAndEquitySecuritiesAbstract" xlink:label="us-gaap_InvestmentsDebtAndEquitySecuritiesAbstract_636077277924559348" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtSecuritiesAvailableForSaleTable" xlink:label="us-gaap_DebtSecuritiesAvailableForSaleTable_638126891322626963" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_InvestmentsDebtAndEquitySecuritiesAbstract_636077277924559348" xlink:to="us-gaap_DebtSecuritiesAvailableForSaleTable_638126891322626963" order="1" use="optional" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FinancialInstrumentAxis" xlink:label="us-gaap_FinancialInstrumentAxis_638126891322637162" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtSecuritiesAvailableForSaleTable_638126891322626963" xlink:to="us-gaap_FinancialInstrumentAxis_638126891322637162" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_TransfersAndServicingOfFinancialInstrumentsTypesOfFinancialInstrumentsDomain" xlink:label="us-gaap_TransfersAndServicingOfFinancialInstrumentsTypesOfFinancialInstrumentsDomain_638126891322637162" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FinancialInstrumentAxis_638126891322637162" xlink:to="us-gaap_TransfersAndServicingOfFinancialInstrumentsTypesOfFinancialInstrumentsDomain_638126891322637162" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_USTreasurySecuritiesMember" xlink:label="us-gaap_USTreasurySecuritiesMember_638126891322637162" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_TransfersAndServicingOfFinancialInstrumentsTypesOfFinancialInstrumentsDomain_638126891322637162" xlink:to="us-gaap_USTreasurySecuritiesMember_638126891322637162" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_USGovernmentAgenciesDebtSecuritiesMember" xlink:label="us-gaap_USGovernmentAgenciesDebtSecuritiesMember_638126891322637162" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_TransfersAndServicingOfFinancialInstrumentsTypesOfFinancialInstrumentsDomain_638126891322637162" xlink:to="us-gaap_USGovernmentAgenciesDebtSecuritiesMember_638126891322637162" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CorporateDebtSecuritiesMember" xlink:label="us-gaap_CorporateDebtSecuritiesMember_638126891322637162" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_TransfersAndServicingOfFinancialInstrumentsTypesOfFinancialInstrumentsDomain_638126891322637162" xlink:to="us-gaap_CorporateDebtSecuritiesMember_638126891322637162" order="3" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CommercialPaperMember" xlink:label="us-gaap_CommercialPaperMember_638126891322637162" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_TransfersAndServicingOfFinancialInstrumentsTypesOfFinancialInstrumentsDomain_638126891322637162" xlink:to="us-gaap_CommercialPaperMember_638126891322637162" order="4" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfAvailableForSaleSecuritiesLineItems" xlink:label="us-gaap_ScheduleOfAvailableForSaleSecuritiesLineItems_638126891322637162" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtSecuritiesAvailableForSaleTable_638126891322626963" xlink:to="us-gaap_ScheduleOfAvailableForSaleSecuritiesLineItems_638126891322637162" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AvailableForSaleDebtSecuritiesAmortizedCostBasis" xlink:label="us-gaap_AvailableForSaleDebtSecuritiesAmortizedCostBasis_638126891322637162" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfAvailableForSaleSecuritiesLineItems_638126891322637162" xlink:to="us-gaap_AvailableForSaleDebtSecuritiesAmortizedCostBasis_638126891322637162" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AvailableForSaleDebtSecuritiesAccumulatedGrossUnrealizedLossBeforeTax" xlink:label="us-gaap_AvailableForSaleDebtSecuritiesAccumulatedGrossUnrealizedLossBeforeTax_638126891322637162" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfAvailableForSaleSecuritiesLineItems_638126891322637162" xlink:to="us-gaap_AvailableForSaleDebtSecuritiesAccumulatedGrossUnrealizedLossBeforeTax_638126891322637162" order="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AvailableForSaleSecuritiesDebtSecurities" xlink:label="us-gaap_AvailableForSaleSecuritiesDebtSecurities_638126891322637162" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfAvailableForSaleSecuritiesLineItems_638126891322637162" xlink:to="us-gaap_AvailableForSaleSecuritiesDebtSecurities_638126891322637162" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtSecuritiesAvailableforSaleUnrealizedLossPositionAbstract" xlink:label="us-gaap_DebtSecuritiesAvailableforSaleUnrealizedLossPositionAbstract_638126891322637162" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfAvailableForSaleSecuritiesLineItems_638126891322637162" xlink:to="us-gaap_DebtSecuritiesAvailableforSaleUnrealizedLossPositionAbstract_638126891322637162" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12Months" xlink:label="us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12Months_638126891322646905" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtSecuritiesAvailableforSaleUnrealizedLossPositionAbstract_638126891322637162" xlink:to="us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12Months_638126891322646905" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12MonthsAccumulatedLoss" xlink:label="us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12MonthsAccumulatedLoss_638126891322646905" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtSecuritiesAvailableforSaleUnrealizedLossPositionAbstract_638126891322637162" xlink:to="us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12MonthsAccumulatedLoss_638126891322646905" order="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLonger" xlink:label="us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLonger_638126891322646905" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtSecuritiesAvailableforSaleUnrealizedLossPositionAbstract_638126891322637162" xlink:to="us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLonger_638126891322646905" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLongerAccumulatedLoss" xlink:label="us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLongerAccumulatedLoss_638126891322646905" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtSecuritiesAvailableforSaleUnrealizedLossPositionAbstract_638126891322637162" xlink:to="us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLongerAccumulatedLoss_638126891322646905" order="4" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AvailableForSaleSecuritiesDebtMaturitiesSingleMaturityDateAmortizedCostBasisRollingMaturityAbstract" xlink:label="us-gaap_AvailableForSaleSecuritiesDebtMaturitiesSingleMaturityDateAmortizedCostBasisRollingMaturityAbstract_638126891322646905" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfAvailableForSaleSecuritiesLineItems_638126891322637162" xlink:to="us-gaap_AvailableForSaleSecuritiesDebtMaturitiesSingleMaturityDateAmortizedCostBasisRollingMaturityAbstract_638126891322646905" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AvailableForSaleSecuritiesDebtMaturitiesNextRollingTwelveMonthsAmortizedCostBasis" xlink:label="us-gaap_AvailableForSaleSecuritiesDebtMaturitiesNextRollingTwelveMonthsAmortizedCostBasis_638126891322646905" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AvailableForSaleSecuritiesDebtMaturitiesSingleMaturityDateAmortizedCostBasisRollingMaturityAbstract_638126891322646905" xlink:to="us-gaap_AvailableForSaleSecuritiesDebtMaturitiesNextRollingTwelveMonthsAmortizedCostBasis_638126891322646905" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterOneThroughTwoYearsAmortizedCost" xlink:label="veco_DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterOneThroughTwoYearsAmortizedCost_638126891322646905" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AvailableForSaleSecuritiesDebtMaturitiesSingleMaturityDateAmortizedCostBasisRollingMaturityAbstract_638126891322646905" xlink:to="veco_DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterOneThroughTwoYearsAmortizedCost_638126891322646905" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AvailableForSaleDebtSecuritiesAmortizedCostBasis" xlink:label="us-gaap_AvailableForSaleDebtSecuritiesAmortizedCostBasis_638126891322646905" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AvailableForSaleSecuritiesDebtMaturitiesSingleMaturityDateAmortizedCostBasisRollingMaturityAbstract_638126891322646905" xlink:to="us-gaap_AvailableForSaleDebtSecuritiesAmortizedCostBasis_638126891322646905" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AvailableForSaleSecuritiesDebtMaturitiesSingleMaturityDateRollingMaturityAbstract" xlink:label="us-gaap_AvailableForSaleSecuritiesDebtMaturitiesSingleMaturityDateRollingMaturityAbstract_638126891322646905" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfAvailableForSaleSecuritiesLineItems_638126891322637162" xlink:to="us-gaap_AvailableForSaleSecuritiesDebtMaturitiesSingleMaturityDateRollingMaturityAbstract_638126891322646905" order="6" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AvailableForSaleSecuritiesDebtMaturitiesNextRollingTwelveMonthsFairValue" xlink:label="us-gaap_AvailableForSaleSecuritiesDebtMaturitiesNextRollingTwelveMonthsFairValue_638126891322657160" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AvailableForSaleSecuritiesDebtMaturitiesSingleMaturityDateRollingMaturityAbstract_638126891322646905" xlink:to="us-gaap_AvailableForSaleSecuritiesDebtMaturitiesNextRollingTwelveMonthsFairValue_638126891322657160" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterOneThroughTwoYearsFairValue" xlink:label="veco_DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterOneThroughTwoYearsFairValue_638126891322657160" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AvailableForSaleSecuritiesDebtMaturitiesSingleMaturityDateRollingMaturityAbstract_638126891322646905" xlink:to="veco_DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterOneThroughTwoYearsFairValue_638126891322657160" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AvailableForSaleSecuritiesDebtSecurities" xlink:label="us-gaap_AvailableForSaleSecuritiesDebtSecurities_638126891322657160" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AvailableForSaleSecuritiesDebtMaturitiesSingleMaturityDateRollingMaturityAbstract_638126891322646905" xlink:to="us-gaap_AvailableForSaleSecuritiesDebtSecurities_638126891322657160" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" priority="1" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureInvestmentsOtherInvestmentDetails" xlink:type="extended" xlink:title="40402 - Disclosure - Investments - Other Investment (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_InvestmentsDebtAndEquitySecuritiesAbstract" xlink:label="us-gaap_InvestmentsDebtAndEquitySecuritiesAbstract_636077277924715351" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_EquitySecuritiesWithoutReadilyDeterminableFairValueTable" xlink:label="us-gaap_EquitySecuritiesWithoutReadilyDeterminableFairValueTable_638126891322657160" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_InvestmentsDebtAndEquitySecuritiesAbstract_636077277924715351" xlink:to="us-gaap_EquitySecuritiesWithoutReadilyDeterminableFairValueTable_638126891322657160" order="1" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis" xlink:label="srt_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_638126891322657160" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EquitySecuritiesWithoutReadilyDeterminableFairValueTable_638126891322657160" xlink:to="srt_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_638126891322657160" order="1" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_EquityMethodInvesteeNameDomain" xlink:label="srt_EquityMethodInvesteeNameDomain_638126891322657160" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_638126891322657160" xlink:to="srt_EquityMethodInvesteeNameDomain_638126891322657160" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_OtherNonMarketableInvestmentMember" xlink:label="veco_OtherNonMarketableInvestmentMember_638126891322657160" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_EquityMethodInvesteeNameDomain_638126891322657160" xlink:to="veco_OtherNonMarketableInvestmentMember_638126891322657160" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_RangeAxis" xlink:label="srt_RangeAxis_638126891322666892" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EquitySecuritiesWithoutReadilyDeterminableFairValueTable_638126891322657160" xlink:to="srt_RangeAxis_638126891322666892" order="2" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_RangeMember" xlink:label="srt_RangeMember_638126891322666892" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RangeAxis_638126891322666892" xlink:to="srt_RangeMember_638126891322666892" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_MaximumMember" xlink:label="srt_MaximumMember_638126891322666892" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RangeMember_638126891322666892" xlink:to="srt_MaximumMember_638126891322666892" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeStatementLocationAxis" xlink:label="us-gaap_IncomeStatementLocationAxis_638126891322666892" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EquitySecuritiesWithoutReadilyDeterminableFairValueTable_638126891322657160" xlink:to="us-gaap_IncomeStatementLocationAxis_638126891322666892" order="3" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeStatementLocationDomain" xlink:label="us-gaap_IncomeStatementLocationDomain_638126891322666892" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeStatementLocationAxis_638126891322666892" xlink:to="us-gaap_IncomeStatementLocationDomain_638126891322666892" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OtherNonoperatingIncomeExpenseMember" xlink:label="us-gaap_OtherNonoperatingIncomeExpenseMember_638126891322666892" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeStatementLocationDomain_638126891322666892" xlink:to="us-gaap_OtherNonoperatingIncomeExpenseMember_638126891322666892" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_EquitySecuritiesWithoutReadilyDeterminableFairValueLineItems" xlink:label="us-gaap_EquitySecuritiesWithoutReadilyDeterminableFairValueLineItems_638126891322666892" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EquitySecuritiesWithoutReadilyDeterminableFairValueTable_638126891322657160" xlink:to="us-gaap_EquitySecuritiesWithoutReadilyDeterminableFairValueLineItems_638126891322666892" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_CostMethodInvestmentsOwnershipPercentage" xlink:label="veco_CostMethodInvestmentsOwnershipPercentage_638126891322666892" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EquitySecuritiesWithoutReadilyDeterminableFairValueLineItems_638126891322666892" xlink:to="veco_CostMethodInvestmentsOwnershipPercentage_638126891322666892" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="5" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_EquitySecuritiesWithoutReadilyDeterminableFairValueAmount" xlink:label="us-gaap_EquitySecuritiesWithoutReadilyDeterminableFairValueAmount_638126891322666892" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EquitySecuritiesWithoutReadilyDeterminableFairValueLineItems_638126891322666892" xlink:to="us-gaap_EquitySecuritiesWithoutReadilyDeterminableFairValueAmount_638126891322666892" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_ImpairmentLossesInvestmentsNonCash" xlink:label="veco_ImpairmentLossesInvestmentsNonCash_638126891322666892" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EquitySecuritiesWithoutReadilyDeterminableFairValueLineItems_638126891322666892" xlink:to="veco_ImpairmentLossesInvestmentsNonCash_638126891322666892" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureInventoriesDetails" xlink:type="extended" xlink:title="40501 - Disclosure - Inventories (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_InventoryDisclosureAbstract" xlink:label="us-gaap_InventoryDisclosureAbstract_636077277925027357" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_InventoryNetAbstract" xlink:label="us-gaap_InventoryNetAbstract_638126891322677170" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_InventoryDisclosureAbstract_636077277925027357" xlink:to="us-gaap_InventoryNetAbstract_638126891322677170" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_InventoryRawMaterialsNetOfReserves" xlink:label="us-gaap_InventoryRawMaterialsNetOfReserves_638126891322677170" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_InventoryNetAbstract_638126891322677170" xlink:to="us-gaap_InventoryRawMaterialsNetOfReserves_638126891322677170" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_InventoryWorkInProcessNetOfReserves" xlink:label="us-gaap_InventoryWorkInProcessNetOfReserves_638126891322677170" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_InventoryNetAbstract_638126891322677170" xlink:to="us-gaap_InventoryWorkInProcessNetOfReserves_638126891322677170" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_InventoryFinishedGoodsNetOfReserves" xlink:label="us-gaap_InventoryFinishedGoodsNetOfReserves_638126891322677170" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_InventoryNetAbstract_638126891322677170" xlink:to="us-gaap_InventoryFinishedGoodsNetOfReserves_638126891322677170" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_InventoryNet" xlink:label="us-gaap_InventoryNet_638126891322677170" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_InventoryNetAbstract_638126891322677170" xlink:to="us-gaap_InventoryNet_638126891322677170" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosurePropertyPlantAndEquipmentPropertyAndEquipmentDetails" xlink:type="extended" xlink:title="40601 - Disclosure - Property, Plant, and Equipment - Property and Equipment (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PropertyPlantAndEquipmentAbstract" xlink:label="us-gaap_PropertyPlantAndEquipmentAbstract_636077277925183360" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfPropertyPlantAndEquipmentTable" xlink:label="us-gaap_ScheduleOfPropertyPlantAndEquipmentTable_638126891322677170" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PropertyPlantAndEquipmentAbstract_636077277925183360" xlink:to="us-gaap_ScheduleOfPropertyPlantAndEquipmentTable_638126891322677170" order="1" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PropertyPlantAndEquipmentByTypeAxis" xlink:label="us-gaap_PropertyPlantAndEquipmentByTypeAxis_638126891322677170" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfPropertyPlantAndEquipmentTable_638126891322677170" xlink:to="us-gaap_PropertyPlantAndEquipmentByTypeAxis_638126891322677170" order="1" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PropertyPlantAndEquipmentTypeDomain" xlink:label="us-gaap_PropertyPlantAndEquipmentTypeDomain_638126891322677170" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PropertyPlantAndEquipmentByTypeAxis_638126891322677170" xlink:to="us-gaap_PropertyPlantAndEquipmentTypeDomain_638126891322677170" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LandMember" xlink:label="us-gaap_LandMember_638126891322686985" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PropertyPlantAndEquipmentTypeDomain_638126891322677170" xlink:to="us-gaap_LandMember_638126891322686985" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_BuildingAndBuildingImprovementsMember" xlink:label="us-gaap_BuildingAndBuildingImprovementsMember_638126891322686985" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PropertyPlantAndEquipmentTypeDomain_638126891322677170" xlink:to="us-gaap_BuildingAndBuildingImprovementsMember_638126891322686985" order="2" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_MachineryAndEquipmentMember" xlink:label="us-gaap_MachineryAndEquipmentMember_638126891322686985" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PropertyPlantAndEquipmentTypeDomain_638126891322677170" xlink:to="us-gaap_MachineryAndEquipmentMember_638126891322686985" order="3" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LeaseholdImprovementsMember" xlink:label="us-gaap_LeaseholdImprovementsMember_638126891322686985" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PropertyPlantAndEquipmentTypeDomain_638126891322677170" xlink:to="us-gaap_LeaseholdImprovementsMember_638126891322686985" order="4" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_RangeAxis" xlink:label="srt_RangeAxis_638126891322686985" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfPropertyPlantAndEquipmentTable_638126891322677170" xlink:to="srt_RangeAxis_638126891322686985" order="2" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_RangeMember" xlink:label="srt_RangeMember_638126891322686985" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RangeAxis_638126891322686985" xlink:to="srt_RangeMember_638126891322686985" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_MinimumMember" xlink:label="srt_MinimumMember_638126891322686985" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RangeMember_638126891322686985" xlink:to="srt_MinimumMember_638126891322686985" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_MaximumMember" xlink:label="srt_MaximumMember_638126891322686985" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RangeMember_638126891322686985" xlink:to="srt_MaximumMember_638126891322686985" order="2" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PropertyPlantAndEquipmentLineItems" xlink:label="us-gaap_PropertyPlantAndEquipmentLineItems_638126891322686985" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfPropertyPlantAndEquipmentTable_638126891322677170" xlink:to="us-gaap_PropertyPlantAndEquipmentLineItems_638126891322686985" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PropertyPlantAndEquipmentGross" xlink:label="us-gaap_PropertyPlantAndEquipmentGross_638126891322686985" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PropertyPlantAndEquipmentLineItems_638126891322686985" xlink:to="us-gaap_PropertyPlantAndEquipmentGross_638126891322686985" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="3" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment" xlink:label="us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment_638126891322686985" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PropertyPlantAndEquipmentLineItems_638126891322686985" xlink:to="us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment_638126891322686985" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PropertyPlantAndEquipmentNet" xlink:label="us-gaap_PropertyPlantAndEquipmentNet_638126891322697162" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PropertyPlantAndEquipmentLineItems_638126891322686985" xlink:to="us-gaap_PropertyPlantAndEquipmentNet_638126891322697162" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" priority="5" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PropertyPlantAndEquipmentUsefulLife" xlink:label="us-gaap_PropertyPlantAndEquipmentUsefulLife_638126891322697162" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PropertyPlantAndEquipmentLineItems_638126891322686985" xlink:to="us-gaap_PropertyPlantAndEquipmentUsefulLife_638126891322697162" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_Depreciation" xlink:label="us-gaap_Depreciation_638126891322697162" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PropertyPlantAndEquipmentLineItems_638126891322686985" xlink:to="us-gaap_Depreciation_638126891322697162" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssetsGoodwillDetails" xlink:type="extended" xlink:title="40701 - Disclosure - Goodwill and Intangible Assets - Goodwill (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_GoodwillAndIntangibleAssetsDisclosureAbstract" xlink:label="us-gaap_GoodwillAndIntangibleAssetsDisclosureAbstract_636844374741041753" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_GoodwillRollForward" xlink:label="us-gaap_GoodwillRollForward_638126891322697162" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_GoodwillAndIntangibleAssetsDisclosureAbstract_636844374741041753" xlink:to="us-gaap_GoodwillRollForward_638126891322697162" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_GoodwillPeriodIncreaseDecrease" xlink:label="us-gaap_GoodwillPeriodIncreaseDecrease_638126891322697162" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_GoodwillRollForward_638126891322697162" xlink:to="us-gaap_GoodwillPeriodIncreaseDecrease_638126891322697162" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_GoodwillGross" xlink:label="us-gaap_GoodwillGross_638126891322697162" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_GoodwillRollForward_638126891322697162" xlink:to="us-gaap_GoodwillGross_638126891322697162" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="8" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_GoodwillImpairedAccumulatedImpairmentLoss" xlink:label="us-gaap_GoodwillImpairedAccumulatedImpairmentLoss_638126891322697162" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_GoodwillRollForward_638126891322697162" xlink:to="us-gaap_GoodwillImpairedAccumulatedImpairmentLoss_638126891322697162" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="9" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_Goodwill" xlink:label="us-gaap_Goodwill_638126891322697162" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_GoodwillRollForward_638126891322697162" xlink:to="us-gaap_Goodwill_638126891322697162" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" priority="6" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssetsIntangibleAssetsDetails" xlink:type="extended" xlink:title="40702 - Disclosure - Goodwill and Intangible Assets - Intangible Assets (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_GoodwillAndIntangibleAssetsDisclosureAbstract" xlink:label="us-gaap_GoodwillAndIntangibleAssetsDisclosureAbstract_636077277925027357" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassTable" xlink:label="veco_FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassTable_638126891322707210" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_GoodwillAndIntangibleAssetsDisclosureAbstract_636077277925027357" xlink:to="veco_FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassTable_638126891322707210" order="1" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis" xlink:label="us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_638126891322707210" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="veco_FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassTable_638126891322707210" xlink:to="us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_638126891322707210" order="1" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain" xlink:label="us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_638126891322707210" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_638126891322707210" xlink:to="us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_638126891322707210" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_TechnologyBasedIntangibleAssetsMember" xlink:label="us-gaap_TechnologyBasedIntangibleAssetsMember_638126891322707210" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_638126891322707210" xlink:to="us-gaap_TechnologyBasedIntangibleAssetsMember_638126891322707210" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CustomerRelationshipsMember" xlink:label="us-gaap_CustomerRelationshipsMember_638126891322707210" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_638126891322707210" xlink:to="us-gaap_CustomerRelationshipsMember_638126891322707210" order="2" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_TrademarksAndTradeNamesMember" xlink:label="us-gaap_TrademarksAndTradeNamesMember_638126891322707210" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_638126891322707210" xlink:to="us-gaap_TrademarksAndTradeNamesMember_638126891322707210" order="3" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OtherIntangibleAssetsMember" xlink:label="us-gaap_OtherIntangibleAssetsMember_638126891322707210" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_638126891322707210" xlink:to="us-gaap_OtherIntangibleAssetsMember_638126891322707210" order="4" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassLineItems" xlink:label="veco_FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassLineItems_638126891322707210" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="veco_FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassTable_638126891322707210" xlink:to="veco_FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassLineItems_638126891322707210" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FiniteLivedIntangibleAssetsRemainingAmortizationPeriod1" xlink:label="us-gaap_FiniteLivedIntangibleAssetsRemainingAmortizationPeriod1_638126891322707210" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="veco_FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassLineItems_638126891322707210" xlink:to="us-gaap_FiniteLivedIntangibleAssetsRemainingAmortizationPeriod1_638126891322707210" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FiniteLivedIntangibleAssetsGross" xlink:label="us-gaap_FiniteLivedIntangibleAssetsGross_638126891322716893" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="veco_FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassLineItems_638126891322707210" xlink:to="us-gaap_FiniteLivedIntangibleAssetsGross_638126891322716893" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="7" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment" xlink:label="veco_FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment_638126891322716893" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="veco_FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassLineItems_638126891322707210" xlink:to="veco_FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment_638126891322716893" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FiniteLivedIntangibleAssetsNet" xlink:label="us-gaap_FiniteLivedIntangibleAssetsNet_638126891322716893" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="veco_FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassLineItems_638126891322707210" xlink:to="us-gaap_FiniteLivedIntangibleAssetsNet_638126891322716893" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" priority="4" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssetsAmortizationDetails" xlink:type="extended" xlink:title="40703 - Disclosure - Goodwill and Intangible Assets - Amortization (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_GoodwillAndIntangibleAssetsDisclosureAbstract" xlink:label="us-gaap_GoodwillAndIntangibleAssetsDisclosureAbstract_636797628678213325" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FiniteLivedIntangibleAssetsFutureAmortizationExpenseAbstract" xlink:label="us-gaap_FiniteLivedIntangibleAssetsFutureAmortizationExpenseAbstract_638126891322716893" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_GoodwillAndIntangibleAssetsDisclosureAbstract_636797628678213325" xlink:to="us-gaap_FiniteLivedIntangibleAssetsFutureAmortizationExpenseAbstract_638126891322716893" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseNextTwelveMonths" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseNextTwelveMonths_638126891322716893" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FiniteLivedIntangibleAssetsFutureAmortizationExpenseAbstract_638126891322716893" xlink:to="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseNextTwelveMonths_638126891322716893" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearTwo" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearTwo_638126891322716893" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FiniteLivedIntangibleAssetsFutureAmortizationExpenseAbstract_638126891322716893" xlink:to="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearTwo_638126891322716893" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearThree" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearThree_638126891322716893" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FiniteLivedIntangibleAssetsFutureAmortizationExpenseAbstract_638126891322716893" xlink:to="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearThree_638126891322716893" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFour" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFour_638126891322726969" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FiniteLivedIntangibleAssetsFutureAmortizationExpenseAbstract_638126891322716893" xlink:to="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFour_638126891322726969" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFive" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFive_638126891322726969" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FiniteLivedIntangibleAssetsFutureAmortizationExpenseAbstract_638126891322716893" xlink:to="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFive_638126891322726969" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseAfterYearFive" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseAfterYearFive_638126891322726969" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FiniteLivedIntangibleAssetsFutureAmortizationExpenseAbstract_638126891322716893" xlink:to="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseAfterYearFive_638126891322726969" order="6" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_FiniteLivedIntangibleAssetsNet" xlink:label="us-gaap_FiniteLivedIntangibleAssetsNet_638126891322726969" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FiniteLivedIntangibleAssetsFutureAmortizationExpenseAbstract_638126891322716893" xlink:to="us-gaap_FiniteLivedIntangibleAssetsNet_638126891322726969" order="7" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" priority="4" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesComponentsDetails" xlink:type="extended" xlink:title="40801 - Disclosure - Accrued Expenses and Other Liabilities - Components (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PayablesAndAccrualsAbstract" xlink:label="us-gaap_PayablesAndAccrualsAbstract_636077277925183360" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AccruedLiabilitiesCurrentAbstract" xlink:label="us-gaap_AccruedLiabilitiesCurrentAbstract_638126891322726969" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PayablesAndAccrualsAbstract_636077277925183360" xlink:to="us-gaap_AccruedLiabilitiesCurrentAbstract_638126891322726969" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_EmployeeRelatedLiabilitiesCurrent" xlink:label="us-gaap_EmployeeRelatedLiabilitiesCurrent_638126891322726969" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AccruedLiabilitiesCurrentAbstract_638126891322726969" xlink:to="us-gaap_EmployeeRelatedLiabilitiesCurrent_638126891322726969" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ProductWarrantyAccrualClassifiedCurrent" xlink:label="us-gaap_ProductWarrantyAccrualClassifiedCurrent_638126891322726969" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AccruedLiabilitiesCurrentAbstract_638126891322726969" xlink:to="us-gaap_ProductWarrantyAccrualClassifiedCurrent_638126891322726969" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OperatingLeaseLiabilityCurrent" xlink:label="us-gaap_OperatingLeaseLiabilityCurrent_638126891322726969" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AccruedLiabilitiesCurrentAbstract_638126891322726969" xlink:to="us-gaap_OperatingLeaseLiabilityCurrent_638126891322726969" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_InterestPayableCurrent" xlink:label="us-gaap_InterestPayableCurrent_638126891322736883" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AccruedLiabilitiesCurrentAbstract_638126891322726969" xlink:to="us-gaap_InterestPayableCurrent_638126891322736883" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AccruedProfessionalFeesCurrent" xlink:label="us-gaap_AccruedProfessionalFeesCurrent_638126891322736883" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AccruedLiabilitiesCurrentAbstract_638126891322726969" xlink:to="us-gaap_AccruedProfessionalFeesCurrent_638126891322736883" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="3" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LossContingencyAccrualCarryingValueCurrent" xlink:label="us-gaap_LossContingencyAccrualCarryingValueCurrent_638126891322736883" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AccruedLiabilitiesCurrentAbstract_638126891322726969" xlink:to="us-gaap_LossContingencyAccrualCarryingValueCurrent_638126891322736883" order="6" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_TaxesPayableCurrent" xlink:label="us-gaap_TaxesPayableCurrent_638126891322736883" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AccruedLiabilitiesCurrentAbstract_638126891322726969" xlink:to="us-gaap_TaxesPayableCurrent_638126891322736883" order="7" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OtherAccruedLiabilitiesCurrent" xlink:label="us-gaap_OtherAccruedLiabilitiesCurrent_638126891322736883" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AccruedLiabilitiesCurrentAbstract_638126891322726969" xlink:to="us-gaap_OtherAccruedLiabilitiesCurrent_638126891322736883" order="8" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_AccruedAndOtherLiabilitiesCurrent" xlink:label="veco_AccruedAndOtherLiabilitiesCurrent_638126891322736883" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AccruedLiabilitiesCurrentAbstract_638126891322726969" xlink:to="veco_AccruedAndOtherLiabilitiesCurrent_638126891322736883" order="9" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList" xlink:label="us-gaap_OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList_638126891322736883" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AccruedLiabilitiesCurrentAbstract_638126891322726969" xlink:to="us-gaap_OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList_638126891322736883" order="10" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesCustomerDepositsAndDeferredRevenueDetails" xlink:type="extended" xlink:title="40802 - Disclosure - Accrued Expenses and Other Liabilities - Customer deposits and deferred revenue (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PayablesAndAccrualsAbstract" xlink:label="us-gaap_PayablesAndAccrualsAbstract_636797650105949029" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ContractWithCustomerRefundLiabilityAbstract" xlink:label="us-gaap_ContractWithCustomerRefundLiabilityAbstract_638126891322746879" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PayablesAndAccrualsAbstract_636797650105949029" xlink:to="us-gaap_ContractWithCustomerRefundLiabilityAbstract_638126891322746879" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ContractWithCustomerRefundLiabilityCurrent" xlink:label="us-gaap_ContractWithCustomerRefundLiabilityCurrent_638126891322746879" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ContractWithCustomerRefundLiabilityAbstract_638126891322746879" xlink:to="us-gaap_ContractWithCustomerRefundLiabilityCurrent_638126891322746879" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_MovementInDeferredRevenueRollForward" xlink:label="us-gaap_MovementInDeferredRevenueRollForward_638126891322746879" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PayablesAndAccrualsAbstract_636797650105949029" xlink:to="us-gaap_MovementInDeferredRevenueRollForward_638126891322746879" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ContractWithCustomerLiability" xlink:label="us-gaap_ContractWithCustomerLiability_638126891322746879" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_MovementInDeferredRevenueRollForward_638126891322746879" xlink:to="us-gaap_ContractWithCustomerLiability_638126891322746879" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodStartLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncreaseDecreaseInContractWithCustomerLiability" xlink:label="us-gaap_IncreaseDecreaseInContractWithCustomerLiability_638126891322746879" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_MovementInDeferredRevenueRollForward_638126891322746879" xlink:to="us-gaap_IncreaseDecreaseInContractWithCustomerLiability_638126891322746879" order="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" priority="3" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ContractWithCustomerLiabilityRevenueRecognized" xlink:label="us-gaap_ContractWithCustomerLiabilityRevenueRecognized_638126891322746879" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_MovementInDeferredRevenueRollForward_638126891322746879" xlink:to="us-gaap_ContractWithCustomerLiabilityRevenueRecognized_638126891322746879" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ContractWithCustomerLiability" xlink:label="us-gaap_ContractWithCustomerLiability_6381268913227468791" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_MovementInDeferredRevenueRollForward_638126891322746879" xlink:to="us-gaap_ContractWithCustomerLiability_6381268913227468791" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel" priority="4" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesPerformanceObligationAmountDetails" xlink:type="extended" xlink:title="40803 - Disclosure - Accrued Expenses and Other Liabilities - Performance Obligation Amount (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PayablesAndAccrualsAbstract" xlink:label="us-gaap_PayablesAndAccrualsAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_RevenueRemainingPerformanceObligation" xlink:label="us-gaap_RevenueRemainingPerformanceObligation_638126891322746879" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PayablesAndAccrualsAbstract" xlink:to="us-gaap_RevenueRemainingPerformanceObligation_638126891322746879" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionTable" xlink:label="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionTable_638126891322746879" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PayablesAndAccrualsAbstract" xlink:to="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionTable_638126891322746879" order="2" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionStartDateAxis" xlink:label="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionStartDateAxis_638126891322756842" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionTable_638126891322746879" xlink:to="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionStartDateAxis_638126891322756842" order="1" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionLineItems" xlink:label="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionLineItems_638126891322756842" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionTable_638126891322746879" xlink:to="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionLineItems_638126891322756842" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_RevenueRemainingPerformanceObligationExpectedTimingPercentage" xlink:label="veco_RevenueRemainingPerformanceObligationExpectedTimingPercentage_638126891322756842" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionLineItems_638126891322756842" xlink:to="veco_RevenueRemainingPerformanceObligationExpectedTimingPercentage_638126891322756842" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="3" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesPerformanceObligationTimingDetails" xlink:type="extended" xlink:title="40804 - Disclosure - Accrued Expenses and Other Liabilities - Performance Obligation Timing (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PayablesAndAccrualsAbstract" xlink:label="us-gaap_PayablesAndAccrualsAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_RevenuePracticalExpedientRemainingPerformanceObligation" xlink:label="us-gaap_RevenuePracticalExpedientRemainingPerformanceObligation_638126891322756842" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PayablesAndAccrualsAbstract" xlink:to="us-gaap_RevenuePracticalExpedientRemainingPerformanceObligation_638126891322756842" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionTable" xlink:label="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionTable_638126891322756842" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PayablesAndAccrualsAbstract" xlink:to="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionTable_638126891322756842" order="2" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionStartDateAxis" xlink:label="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionStartDateAxis_638126891322756842" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionTable_638126891322756842" xlink:to="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionStartDateAxis_638126891322756842" order="1" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_RangeAxis" xlink:label="srt_RangeAxis_638126891322756842" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionTable_638126891322756842" xlink:to="srt_RangeAxis_638126891322756842" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_RangeMember" xlink:label="srt_RangeMember_638126891322756842" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RangeAxis_638126891322756842" xlink:to="srt_RangeMember_638126891322756842" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_MinimumMember" xlink:label="srt_MinimumMember_638126891322756842" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RangeMember_638126891322756842" xlink:to="srt_MinimumMember_638126891322756842" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_MaximumMember" xlink:label="srt_MaximumMember_638126891322766851" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RangeMember_638126891322756842" xlink:to="srt_MaximumMember_638126891322766851" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionLineItems" xlink:label="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionLineItems_638126891322766851" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionTable_638126891322756842" xlink:to="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionLineItems_638126891322766851" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionPeriod1" xlink:label="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionPeriod1_638126891322766851" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionLineItems_638126891322766851" xlink:to="us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionPeriod1_638126891322766851" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="3" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesOtherLiabilitiesDetails" xlink:type="extended" xlink:title="40805 - Disclosure - Accrued Expenses and Other Liabilities - Other liabilities (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PayablesAndAccrualsAbstract" xlink:label="us-gaap_PayablesAndAccrualsAbstract_636797658399878339" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_LiabilitiesTable" xlink:label="veco_LiabilitiesTable_638126891322766851" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PayablesAndAccrualsAbstract_636797658399878339" xlink:to="veco_LiabilitiesTable_638126891322766851" order="1" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_BalanceSheetLocationAxis" xlink:label="us-gaap_BalanceSheetLocationAxis_638126891322766851" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="veco_LiabilitiesTable_638126891322766851" xlink:to="us-gaap_BalanceSheetLocationAxis_638126891322766851" order="1" use="optional" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_BalanceSheetLocationDomain" xlink:label="us-gaap_BalanceSheetLocationDomain_638126891322766851" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_BalanceSheetLocationAxis_638126891322766851" xlink:to="us-gaap_BalanceSheetLocationDomain_638126891322766851" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OtherLiabilitiesMember" xlink:label="us-gaap_OtherLiabilitiesMember_638126891322766851" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_BalanceSheetLocationDomain_638126891322766851" xlink:to="us-gaap_OtherLiabilitiesMember_638126891322766851" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_LiabilitiesLineItems" xlink:label="veco_LiabilitiesLineItems_638126891322766851" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="veco_LiabilitiesTable_638126891322766851" xlink:to="veco_LiabilitiesLineItems_638126891322766851" order="2" use="optional" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OtherLiabilitiesAbstract" xlink:label="us-gaap_OtherLiabilitiesAbstract_638126891322776820" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="veco_LiabilitiesLineItems_638126891322766851" xlink:to="us-gaap_OtherLiabilitiesAbstract_638126891322776820" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="6" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AssetRetirementObligationsNoncurrent" xlink:label="us-gaap_AssetRetirementObligationsNoncurrent_638126891322776820" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OtherLiabilitiesAbstract_638126891322776820" xlink:to="us-gaap_AssetRetirementObligationsNoncurrent_638126891322776820" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AccruedIncomeTaxesNoncurrent" xlink:label="us-gaap_AccruedIncomeTaxesNoncurrent_638126891322776820" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OtherLiabilitiesAbstract_638126891322776820" xlink:to="us-gaap_AccruedIncomeTaxesNoncurrent_638126891322776820" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="8" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_MedicalAndDentalBenefitLiabilitiesNoncurrent" xlink:label="veco_MedicalAndDentalBenefitLiabilitiesNoncurrent_638126891322776820" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OtherLiabilitiesAbstract_638126891322776820" xlink:to="veco_MedicalAndDentalBenefitLiabilitiesNoncurrent_638126891322776820" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesWarrantyDetails" xlink:type="extended" xlink:title="40901 - Disclosure - Commitments and Contingencies - Warranty (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CommitmentsAndContingenciesDisclosureAbstract" xlink:label="us-gaap_CommitmentsAndContingenciesDisclosureAbstract_636077277925339363" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ProductWarrantiesDisclosuresAbstract" xlink:label="us-gaap_ProductWarrantiesDisclosuresAbstract_638126891322776820" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CommitmentsAndContingenciesDisclosureAbstract_636077277925339363" xlink:to="us-gaap_ProductWarrantiesDisclosuresAbstract_638126891322776820" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ProductWarrantyAccrual" xlink:label="us-gaap_ProductWarrantyAccrual_638126891322776820" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ProductWarrantiesDisclosuresAbstract_638126891322776820" xlink:to="us-gaap_ProductWarrantyAccrual_638126891322776820" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodStartLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ProductWarrantyAccrualWarrantiesIssued" xlink:label="us-gaap_ProductWarrantyAccrualWarrantiesIssued_638126891322776820" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ProductWarrantiesDisclosuresAbstract_638126891322776820" xlink:to="us-gaap_ProductWarrantyAccrualWarrantiesIssued_638126891322776820" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ProductWarrantyAccrualPayments" xlink:label="us-gaap_ProductWarrantyAccrualPayments_638126891322776820" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ProductWarrantiesDisclosuresAbstract_638126891322776820" xlink:to="us-gaap_ProductWarrantyAccrualPayments_638126891322776820" order="3" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ProductWarrantyAccrualPreexistingIncreaseDecrease" xlink:label="us-gaap_ProductWarrantyAccrualPreexistingIncreaseDecrease_638126891322776820" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ProductWarrantiesDisclosuresAbstract_638126891322776820" xlink:to="us-gaap_ProductWarrantyAccrualPreexistingIncreaseDecrease_638126891322776820" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ProductWarrantyAccrual" xlink:label="us-gaap_ProductWarrantyAccrual_638126891322786833" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ProductWarrantiesDisclosuresAbstract_638126891322776820" xlink:to="us-gaap_ProductWarrantyAccrual_638126891322786833" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel" priority="4" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesLeaseTermsDetails" xlink:type="extended" xlink:title="40902 - Disclosure - Commitments and Contingencies - Lease terms (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CommitmentsAndContingenciesDisclosureAbstract" xlink:label="us-gaap_CommitmentsAndContingenciesDisclosureAbstract_636924976339913452" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LesseeOperatingLeaseDescriptionAbstract" xlink:label="us-gaap_LesseeOperatingLeaseDescriptionAbstract_638126891322786833" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CommitmentsAndContingenciesDisclosureAbstract_636924976339913452" xlink:to="us-gaap_LesseeOperatingLeaseDescriptionAbstract_638126891322786833" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LesseeOperatingLeaseRenewalTerm" xlink:label="us-gaap_LesseeOperatingLeaseRenewalTerm_638126891322786833" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LesseeOperatingLeaseDescriptionAbstract_638126891322786833" xlink:to="us-gaap_LesseeOperatingLeaseRenewalTerm_638126891322786833" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="3" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OperatingLeaseWeightedAverageRemainingLeaseTerm1" xlink:label="us-gaap_OperatingLeaseWeightedAverageRemainingLeaseTerm1_638126891322786833" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LesseeOperatingLeaseDescriptionAbstract_638126891322786833" xlink:to="us-gaap_OperatingLeaseWeightedAverageRemainingLeaseTerm1_638126891322786833" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LesseeOperatingLeaseDiscountRate" xlink:label="us-gaap_LesseeOperatingLeaseDiscountRate_638126891322786833" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LesseeOperatingLeaseDescriptionAbstract_638126891322786833" xlink:to="us-gaap_LesseeOperatingLeaseDiscountRate_638126891322786833" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesMinimumLeaseCommitmentsDetails" xlink:type="extended" xlink:title="40903 - Disclosure - Commitments and Contingencies - Minimum lease commitments (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CommitmentsAndContingenciesDisclosureAbstract" xlink:label="us-gaap_CommitmentsAndContingenciesDisclosureAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract" xlink:label="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract_638126891322796819" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CommitmentsAndContingenciesDisclosureAbstract" xlink:to="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract_638126891322796819" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths_638126891322796819" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract_638126891322796819" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths_638126891322796819" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="7" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo_638126891322796819" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract_638126891322796819" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo_638126891322796819" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree_638126891322796819" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract_638126891322796819" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree_638126891322796819" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour_638126891322796819" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract_638126891322796819" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour_638126891322796819" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFive" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFive_638126891322796819" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract_638126891322796819" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFive_638126891322796819" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="5" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive_638126891322796819" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract_638126891322796819" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive_638126891322796819" order="6" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue_638126891322796819" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract_638126891322796819" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue_638126891322796819" order="7" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount_638126891322796819" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract_638126891322796819" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount_638126891322796819" order="8" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OperatingLeaseLiability" xlink:label="us-gaap_OperatingLeaseLiability_638126891322796819" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract_638126891322796819" xlink:to="us-gaap_OperatingLeaseLiability_638126891322796819" order="9" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OperatingLeaseLiabilityCurrent" xlink:label="us-gaap_OperatingLeaseLiabilityCurrent_638126891322796819" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract_638126891322796819" xlink:to="us-gaap_OperatingLeaseLiabilityCurrent_638126891322796819" order="10" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList" xlink:label="us-gaap_OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList_638126891322806819" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract_638126891322796819" xlink:to="us-gaap_OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList_638126891322806819" order="11" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OperatingLeaseLiabilityNoncurrent" xlink:label="us-gaap_OperatingLeaseLiabilityNoncurrent_638126891322806819" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract_638126891322796819" xlink:to="us-gaap_OperatingLeaseLiabilityNoncurrent_638126891322806819" order="12" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="6" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OperatingLeaseLiability" xlink:label="us-gaap_OperatingLeaseLiability_638126891322806819" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract_638126891322796819" xlink:to="us-gaap_OperatingLeaseLiability_638126891322806819" order="13" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OperatingLeaseLiabilityStatementOfFinancialPositionExtensibleList" xlink:label="us-gaap_OperatingLeaseLiabilityStatementOfFinancialPositionExtensibleList_638126891322806819" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract_638126891322796819" xlink:to="us-gaap_OperatingLeaseLiabilityStatementOfFinancialPositionExtensibleList_638126891322806819" order="14" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="6" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesLeaseCostsDetails" xlink:type="extended" xlink:title="40904 - Disclosure - Commitments and Contingencies - Lease costs (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CommitmentsAndContingenciesDisclosureAbstract" xlink:label="us-gaap_CommitmentsAndContingenciesDisclosureAbstract_636924978101769620" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LeaseCostAbstract" xlink:label="us-gaap_LeaseCostAbstract_638126891322806819" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CommitmentsAndContingenciesDisclosureAbstract_636924978101769620" xlink:to="us-gaap_LeaseCostAbstract_638126891322806819" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OperatingLeaseCost" xlink:label="us-gaap_OperatingLeaseCost_638126891322816824" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeaseCostAbstract_638126891322806819" xlink:to="us-gaap_OperatingLeaseCost_638126891322816824" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_VariableLeaseCost" xlink:label="us-gaap_VariableLeaseCost_638126891322816824" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeaseCostAbstract_638126891322806819" xlink:to="us-gaap_VariableLeaseCost_638126891322816824" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LeaseCost" xlink:label="us-gaap_LeaseCost_638126891322816824" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeaseCostAbstract_638126891322806819" xlink:to="us-gaap_LeaseCost_638126891322816824" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="5" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OperatingLeasePayments" xlink:label="us-gaap_OperatingLeasePayments_638126891322816824" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeaseCostAbstract_638126891322806819" xlink:to="us-gaap_OperatingLeasePayments_638126891322816824" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_ReimbursementForLeaseholdImprovements" xlink:label="veco_ReimbursementForLeaseholdImprovements_638126891322816824" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeaseCostAbstract_638126891322806819" xlink:to="veco_ReimbursementForLeaseholdImprovements_638126891322816824" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesLegalProceedingsDetails" xlink:type="extended" xlink:title="40905 - Disclosure - Commitments and Contingencies - Legal Proceedings (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CommitmentsAndContingenciesDisclosureAbstract" xlink:label="us-gaap_CommitmentsAndContingenciesDisclosureAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LossContingenciesTable" xlink:label="us-gaap_LossContingenciesTable_638126891322816824" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CommitmentsAndContingenciesDisclosureAbstract" xlink:to="us-gaap_LossContingenciesTable_638126891322816824" order="1" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_LitigationCaseAxis" xlink:label="srt_LitigationCaseAxis_638126891322816824" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LossContingenciesTable_638126891322816824" xlink:to="srt_LitigationCaseAxis_638126891322816824" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_LitigationCaseTypeDomain" xlink:label="srt_LitigationCaseTypeDomain_638126891322816824" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_LitigationCaseAxis_638126891322816824" xlink:to="srt_LitigationCaseTypeDomain_638126891322816824" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_UltratechAcquisitionLitigationMember" xlink:label="veco_UltratechAcquisitionLitigationMember_638126891322816824" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_LitigationCaseTypeDomain_638126891322816824" xlink:to="veco_UltratechAcquisitionLitigationMember_638126891322816824" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_WoltherActionMember" xlink:label="veco_WoltherActionMember_638126891322826821" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_LitigationCaseTypeDomain_638126891322816824" xlink:to="veco_WoltherActionMember_638126891322826821" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_DerivativeActionMember" xlink:label="veco_DerivativeActionMember_638126891322826821" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_LitigationCaseTypeDomain_638126891322816824" xlink:to="veco_DerivativeActionMember_638126891322826821" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LossContingenciesLineItems" xlink:label="us-gaap_LossContingenciesLineItems_638126891322826821" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LossContingenciesTable_638126891322816824" xlink:to="us-gaap_LossContingenciesLineItems_638126891322826821" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LossContingencyNewClaimsFiledNumber" xlink:label="us-gaap_LossContingencyNewClaimsFiledNumber_638126891322826821" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LossContingenciesLineItems_638126891322826821" xlink:to="us-gaap_LossContingencyNewClaimsFiledNumber_638126891322826821" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="3" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LitigationSettlementAmountAwardedToOtherParty" xlink:label="us-gaap_LitigationSettlementAmountAwardedToOtherParty_638126891322826821" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LossContingenciesLineItems_638126891322826821" xlink:to="us-gaap_LitigationSettlementAmountAwardedToOtherParty_638126891322826821" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesConcentrationOfCreditRiskDetails" xlink:type="extended" xlink:title="40906 - Disclosure - Commitments and Contingencies - Concentration of Credit Risk (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CommitmentsAndContingenciesDisclosureAbstract" xlink:label="us-gaap_CommitmentsAndContingenciesDisclosureAbstract_636077277925339363" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ConcentrationRiskTable" xlink:label="us-gaap_ConcentrationRiskTable_638126891322826821" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CommitmentsAndContingenciesDisclosureAbstract_636077277925339363" xlink:to="us-gaap_ConcentrationRiskTable_638126891322826821" order="1" use="optional" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ConcentrationRiskByBenchmarkAxis" xlink:label="us-gaap_ConcentrationRiskByBenchmarkAxis_638126891322826821" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ConcentrationRiskTable_638126891322826821" xlink:to="us-gaap_ConcentrationRiskByBenchmarkAxis_638126891322826821" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ConcentrationRiskBenchmarkDomain" xlink:label="us-gaap_ConcentrationRiskBenchmarkDomain_638126891322826821" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ConcentrationRiskByBenchmarkAxis_638126891322826821" xlink:to="us-gaap_ConcentrationRiskBenchmarkDomain_638126891322826821" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AccountsReceivableMember" xlink:label="us-gaap_AccountsReceivableMember_638126891322836829" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ConcentrationRiskBenchmarkDomain_638126891322826821" xlink:to="us-gaap_AccountsReceivableMember_638126891322836829" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SalesMember" xlink:label="us-gaap_SalesMember_638126891322836829" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ConcentrationRiskBenchmarkDomain_638126891322826821" xlink:to="us-gaap_SalesMember_638126891322836829" order="2" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ConcentrationRiskByTypeAxis" xlink:label="us-gaap_ConcentrationRiskByTypeAxis_638126891322836829" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ConcentrationRiskTable_638126891322826821" xlink:to="us-gaap_ConcentrationRiskByTypeAxis_638126891322836829" order="2" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ConcentrationRiskTypeDomain" xlink:label="us-gaap_ConcentrationRiskTypeDomain_638126891322836829" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ConcentrationRiskByTypeAxis_638126891322836829" xlink:to="us-gaap_ConcentrationRiskTypeDomain_638126891322836829" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CreditConcentrationRiskMember" xlink:label="us-gaap_CreditConcentrationRiskMember_638126891322836829" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ConcentrationRiskTypeDomain_638126891322836829" xlink:to="us-gaap_CreditConcentrationRiskMember_638126891322836829" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CustomerConcentrationRiskMember" xlink:label="us-gaap_CustomerConcentrationRiskMember_638126891322836829" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ConcentrationRiskTypeDomain_638126891322836829" xlink:to="us-gaap_CustomerConcentrationRiskMember_638126891322836829" order="2" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_MajorCustomersAxis" xlink:label="srt_MajorCustomersAxis_638126891322836829" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ConcentrationRiskTable_638126891322826821" xlink:to="srt_MajorCustomersAxis_638126891322836829" order="3" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_NameOfMajorCustomerDomain" xlink:label="srt_NameOfMajorCustomerDomain_638126891322836829" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_MajorCustomersAxis_638126891322836829" xlink:to="srt_NameOfMajorCustomerDomain_638126891322836829" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_TopTenCustomersMember" xlink:label="veco_TopTenCustomersMember_638126891322836829" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_NameOfMajorCustomerDomain_638126891322836829" xlink:to="veco_TopTenCustomersMember_638126891322836829" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_CustomerAMember" xlink:label="veco_CustomerAMember_638126891322836829" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_NameOfMajorCustomerDomain_638126891322836829" xlink:to="veco_CustomerAMember_638126891322836829" order="2" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_CustomerBMember" xlink:label="veco_CustomerBMember_638126891322836829" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_NameOfMajorCustomerDomain_638126891322836829" xlink:to="veco_CustomerBMember_638126891322836829" order="3" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_CustomerCMember" xlink:label="veco_CustomerCMember_638126891322836829" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_NameOfMajorCustomerDomain_638126891322836829" xlink:to="veco_CustomerCMember_638126891322836829" order="4" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_CustomerDMember" xlink:label="veco_CustomerDMember_638126891322846829" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_NameOfMajorCustomerDomain_638126891322836829" xlink:to="veco_CustomerDMember_638126891322846829" order="5" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_CustomerEMember" xlink:label="veco_CustomerEMember_638126891322846829" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_NameOfMajorCustomerDomain_638126891322836829" xlink:to="veco_CustomerEMember_638126891322846829" order="6" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_CustomerFMember" xlink:label="veco_CustomerFMember_638126891322846829" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_NameOfMajorCustomerDomain_638126891322836829" xlink:to="veco_CustomerFMember_638126891322846829" order="7" use="optional" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ConcentrationRiskLineItems" xlink:label="us-gaap_ConcentrationRiskLineItems_638126891322846829" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ConcentrationRiskTable_638126891322826821" xlink:to="us-gaap_ConcentrationRiskLineItems_638126891322846829" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_NumberOfCustomers" xlink:label="veco_NumberOfCustomers_638126891322846829" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ConcentrationRiskLineItems_638126891322846829" xlink:to="veco_NumberOfCustomers_638126891322846829" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ConcentrationRiskPercentage1" xlink:label="us-gaap_ConcentrationRiskPercentage1_638126891322846829" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ConcentrationRiskLineItems_638126891322846829" xlink:to="us-gaap_ConcentrationRiskPercentage1_638126891322846829" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesReceivablesDetails" xlink:type="extended" xlink:title="40907 - Disclosure - Commitments and Contingencies - Receivables (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CommitmentsAndContingenciesDisclosureAbstract" xlink:label="us-gaap_CommitmentsAndContingenciesDisclosureAbstract_636077277925495366" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ConcentrationRiskTable" xlink:label="us-gaap_ConcentrationRiskTable_638126891322856814" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CommitmentsAndContingenciesDisclosureAbstract_636077277925495366" xlink:to="us-gaap_ConcentrationRiskTable_638126891322856814" order="1" use="optional" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_RangeAxis" xlink:label="srt_RangeAxis_638126891322856814" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ConcentrationRiskTable_638126891322856814" xlink:to="srt_RangeAxis_638126891322856814" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_RangeMember" xlink:label="srt_RangeMember_638126891322856814" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RangeAxis_638126891322856814" xlink:to="srt_RangeMember_638126891322856814" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_MinimumMember" xlink:label="srt_MinimumMember_638126891322856814" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RangeMember_638126891322856814" xlink:to="srt_MinimumMember_638126891322856814" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_MaximumMember" xlink:label="srt_MaximumMember_638126891322856814" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RangeMember_638126891322856814" xlink:to="srt_MaximumMember_638126891322856814" order="2" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_StatementGeographicalAxis" xlink:label="srt_StatementGeographicalAxis_638126891322856814" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ConcentrationRiskTable_638126891322856814" xlink:to="srt_StatementGeographicalAxis_638126891322856814" order="2" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_SegmentGeographicalDomain" xlink:label="srt_SegmentGeographicalDomain_638126891322856814" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_StatementGeographicalAxis_638126891322856814" xlink:to="srt_SegmentGeographicalDomain_638126891322856814" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_GeographicLocationOneMember" xlink:label="veco_GeographicLocationOneMember_638126891322856814" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_SegmentGeographicalDomain_638126891322856814" xlink:to="veco_GeographicLocationOneMember_638126891322856814" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_GeographicLocationTwoMember" xlink:label="veco_GeographicLocationTwoMember_638126891322856814" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_SegmentGeographicalDomain_638126891322856814" xlink:to="veco_GeographicLocationTwoMember_638126891322856814" order="2" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ConcentrationRiskLineItems" xlink:label="us-gaap_ConcentrationRiskLineItems_638126891322856814" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ConcentrationRiskTable_638126891322856814" xlink:to="us-gaap_ConcentrationRiskLineItems_638126891322856814" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_AccountsReceivableCreditPeriod" xlink:label="veco_AccountsReceivableCreditPeriod_638126891322856814" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ConcentrationRiskLineItems_638126891322856814" xlink:to="veco_AccountsReceivableCreditPeriod_638126891322856814" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="2" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesReceivablePurchaseAgreementDetails" xlink:type="extended" xlink:title="40908 - Disclosure - Commitments and Contingencies - Receivable Purchase Agreement (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CommitmentsAndContingenciesDisclosureAbstract" xlink:label="us-gaap_CommitmentsAndContingenciesDisclosureAbstract" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_ReceivablePurchaseAgreementMaximumAmount" xlink:label="veco_ReceivablePurchaseAgreementMaximumAmount_638126891322866832" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CommitmentsAndContingenciesDisclosureAbstract" xlink:to="veco_ReceivablePurchaseAgreementMaximumAmount_638126891322866832" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_TradeReceivablesSoldUnderReceivablePurchaseAgreement" xlink:label="veco_TradeReceivablesSoldUnderReceivablePurchaseAgreement_638126891322866832" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CommitmentsAndContingenciesDisclosureAbstract" xlink:to="veco_TradeReceivablesSoldUnderReceivablePurchaseAgreement_638126891322866832" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="3" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_TradeReceivablesUnderReceivablePurchaseAgreementOutstanding" xlink:label="veco_TradeReceivablesUnderReceivablePurchaseAgreementOutstanding_638126891322866832" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CommitmentsAndContingenciesDisclosureAbstract" xlink:to="veco_TradeReceivablesUnderReceivablePurchaseAgreementOutstanding_638126891322866832" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_ReceivablePurchaseAgreementAmountAvailable" xlink:label="veco_ReceivablePurchaseAgreementAmountAvailable_638126891322866832" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CommitmentsAndContingenciesDisclosureAbstract" xlink:to="veco_ReceivablePurchaseAgreementAmountAvailable_638126891322866832" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesSuppliersDetails" xlink:type="extended" xlink:title="40909 - Disclosure - Commitments and Contingencies - Suppliers (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CommitmentsAndContingenciesDisclosureAbstract" xlink:label="us-gaap_CommitmentsAndContingenciesDisclosureAbstract_636082558899197443" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PurchaseObligationFiscalYearMaturityAbstract" xlink:label="us-gaap_PurchaseObligationFiscalYearMaturityAbstract_638126891322866832" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CommitmentsAndContingenciesDisclosureAbstract_636082558899197443" xlink:to="us-gaap_PurchaseObligationFiscalYearMaturityAbstract_638126891322866832" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DepositAssets" xlink:label="us-gaap_DepositAssets_638126891322866832" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PurchaseObligationFiscalYearMaturityAbstract_638126891322866832" xlink:to="us-gaap_DepositAssets_638126891322866832" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="2" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesPurchaseCommitmentsAndBankGuaranteesDetails" xlink:type="extended" xlink:title="40910 - Disclosure - Commitments and Contingencies - Purchase Commitments and Bank Guarantees (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CommitmentsAndContingenciesDisclosureAbstract" xlink:label="us-gaap_CommitmentsAndContingenciesDisclosureAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PurchaseObligationFiscalYearMaturityAbstract" xlink:label="us-gaap_PurchaseObligationFiscalYearMaturityAbstract_638126891322876822" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CommitmentsAndContingenciesDisclosureAbstract" xlink:to="us-gaap_PurchaseObligationFiscalYearMaturityAbstract_638126891322876822" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_UnrecordedUnconditionalPurchaseObligationDueInNextRollingTwelveMonths" xlink:label="us-gaap_UnrecordedUnconditionalPurchaseObligationDueInNextRollingTwelveMonths_638126891322876822" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PurchaseObligationFiscalYearMaturityAbstract_638126891322876822" xlink:to="us-gaap_UnrecordedUnconditionalPurchaseObligationDueInNextRollingTwelveMonths_638126891322876822" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_GuaranteesAbstract" xlink:label="us-gaap_GuaranteesAbstract_638126891322876822" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CommitmentsAndContingenciesDisclosureAbstract" xlink:to="us-gaap_GuaranteesAbstract_638126891322876822" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_GuaranteeObligationsCurrentCarryingValue" xlink:label="us-gaap_GuaranteeObligationsCurrentCarryingValue_638126891322876822" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_GuaranteesAbstract_638126891322876822" xlink:to="us-gaap_GuaranteeObligationsCurrentCarryingValue_638126891322876822" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="5" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LineOfCreditFacilityRemainingBorrowingCapacity" xlink:label="us-gaap_LineOfCreditFacilityRemainingBorrowingCapacity_638126891322876822" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_GuaranteesAbstract_638126891322876822" xlink:to="us-gaap_LineOfCreditFacilityRemainingBorrowingCapacity_638126891322876822" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="7" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureDebt20232025And2027NotesDetails" xlink:type="extended" xlink:title="41001 - Disclosure - Debt - 2023. 2025 and 2027 Notes (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtDisclosureAbstract" xlink:label="us-gaap_DebtDisclosureAbstract_637468948649770528" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentTable" xlink:label="us-gaap_DebtInstrumentTable_638126891322886817" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtDisclosureAbstract_637468948649770528" xlink:to="us-gaap_DebtInstrumentTable_638126891322886817" order="1" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentAxis" xlink:label="us-gaap_DebtInstrumentAxis_638126891322886817" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentTable_638126891322886817" xlink:to="us-gaap_DebtInstrumentAxis_638126891322886817" order="1" use="optional" priority="5" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentNameDomain" xlink:label="us-gaap_DebtInstrumentNameDomain_638126891322886817" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentAxis_638126891322886817" xlink:to="us-gaap_DebtInstrumentNameDomain_638126891322886817" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ConvertibleDebtMember" xlink:label="us-gaap_ConvertibleDebtMember_638126891322886817" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentNameDomain_638126891322886817" xlink:to="us-gaap_ConvertibleDebtMember_638126891322886817" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_ConvertibleSeniorUnsecuredNotesDue2023Member" xlink:label="veco_ConvertibleSeniorUnsecuredNotesDue2023Member_638126891322886817" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ConvertibleDebtMember_638126891322886817" xlink:to="veco_ConvertibleSeniorUnsecuredNotesDue2023Member_638126891322886817" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_ConvertibleSeniorUnsecuredNotesDue2025Member" xlink:label="veco_ConvertibleSeniorUnsecuredNotesDue2025Member_638126891322886817" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ConvertibleDebtMember_638126891322886817" xlink:to="veco_ConvertibleSeniorUnsecuredNotesDue2025Member_638126891322886817" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_ConvertibleSeniorUnsecuredNotesDue2027Member" xlink:label="veco_ConvertibleSeniorUnsecuredNotesDue2027Member_638126891322886817" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ConvertibleDebtMember_638126891322886817" xlink:to="veco_ConvertibleSeniorUnsecuredNotesDue2027Member_638126891322886817" order="3" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeStatementLocationAxis" xlink:label="us-gaap_IncomeStatementLocationAxis_638126891322886817" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentTable_638126891322886817" xlink:to="us-gaap_IncomeStatementLocationAxis_638126891322886817" order="2" use="optional" priority="3" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeStatementLocationDomain" xlink:label="us-gaap_IncomeStatementLocationDomain_638126891322886817" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeStatementLocationAxis_638126891322886817" xlink:to="us-gaap_IncomeStatementLocationDomain_638126891322886817" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OtherNonoperatingIncomeExpenseMember" xlink:label="us-gaap_OtherNonoperatingIncomeExpenseMember_638126891322886817" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeStatementLocationDomain_638126891322886817" xlink:to="us-gaap_OtherNonoperatingIncomeExpenseMember_638126891322886817" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentLineItems" xlink:label="us-gaap_DebtInstrumentLineItems_638126891322896820" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentTable_638126891322886817" xlink:to="us-gaap_DebtInstrumentLineItems_638126891322896820" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentFaceAmount" xlink:label="us-gaap_DebtInstrumentFaceAmount_638126891322896820" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems_638126891322896820" xlink:to="us-gaap_DebtInstrumentFaceAmount_638126891322896820" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentInterestRateStatedPercentage" xlink:label="us-gaap_DebtInstrumentInterestRateStatedPercentage_638126891322896820" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems_638126891322896820" xlink:to="us-gaap_DebtInstrumentInterestRateStatedPercentage_638126891322896820" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ProceedsFromConvertibleDebt" xlink:label="us-gaap_ProceedsFromConvertibleDebt_638126891322896820" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems_638126891322896820" xlink:to="us-gaap_ProceedsFromConvertibleDebt_638126891322896820" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ExtinguishmentOfDebtAmount" xlink:label="us-gaap_ExtinguishmentOfDebtAmount_638126891322896820" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems_638126891322896820" xlink:to="us-gaap_ExtinguishmentOfDebtAmount_638126891322896820" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_DebtInstrumentCarryingAmountDebtExtinguished" xlink:label="veco_DebtInstrumentCarryingAmountDebtExtinguished_638126891322896820" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems_638126891322896820" xlink:to="veco_DebtInstrumentCarryingAmountDebtExtinguished_638126891322896820" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_RepaymentsOfUnsecuredDebt" xlink:label="us-gaap_RepaymentsOfUnsecuredDebt_638126891322896820" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems_638126891322896820" xlink:to="us-gaap_RepaymentsOfUnsecuredDebt_638126891322896820" order="6" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_GainsLossesOnExtinguishmentOfDebt" xlink:label="us-gaap_GainsLossesOnExtinguishmentOfDebt_638126891322896820" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems_638126891322896820" xlink:to="us-gaap_GainsLossesOnExtinguishmentOfDebt_638126891322896820" order="7" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PaymentsForDerivativeInstrumentFinancingActivities" xlink:label="us-gaap_PaymentsForDerivativeInstrumentFinancingActivities_638126891322896820" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems_638126891322896820" xlink:to="us-gaap_PaymentsForDerivativeInstrumentFinancingActivities_638126891322896820" order="8" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_AdjustmentsToAdditionalPaidInCapitalExtinguishmentEquityComponentOfNotesRepurchased" xlink:label="veco_AdjustmentsToAdditionalPaidInCapitalExtinguishmentEquityComponentOfNotesRepurchased_638126891322906824" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems_638126891322896820" xlink:to="veco_AdjustmentsToAdditionalPaidInCapitalExtinguishmentEquityComponentOfNotesRepurchased_638126891322906824" order="9" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="6" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_InterestPayableCurrentAndNoncurrent" xlink:label="us-gaap_InterestPayableCurrentAndNoncurrent_638126891322906824" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems_638126891322896820" xlink:to="us-gaap_InterestPayableCurrentAndNoncurrent_638126891322906824" order="10" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureDebtConvertibleSeniorNotesDetails" xlink:type="extended" xlink:title="41002 - Disclosure - Debt - Convertible Senior Notes (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtDisclosureAbstract" xlink:label="us-gaap_DebtDisclosureAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentTable" xlink:label="us-gaap_DebtInstrumentTable_638126891322906824" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtDisclosureAbstract" xlink:to="us-gaap_DebtInstrumentTable_638126891322906824" order="1" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentAxis" xlink:label="us-gaap_DebtInstrumentAxis_638126891322906824" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentTable_638126891322906824" xlink:to="us-gaap_DebtInstrumentAxis_638126891322906824" order="1" use="optional" priority="6" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentNameDomain" xlink:label="us-gaap_DebtInstrumentNameDomain_638126891322906824" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentAxis_638126891322906824" xlink:to="us-gaap_DebtInstrumentNameDomain_638126891322906824" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ConvertibleDebtMember" xlink:label="us-gaap_ConvertibleDebtMember_638126891322906824" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentNameDomain_638126891322906824" xlink:to="us-gaap_ConvertibleDebtMember_638126891322906824" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_ConvertibleSeniorUnsecuredNotesDue2023Member" xlink:label="veco_ConvertibleSeniorUnsecuredNotesDue2023Member_638126891322906824" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ConvertibleDebtMember_638126891322906824" xlink:to="veco_ConvertibleSeniorUnsecuredNotesDue2023Member_638126891322906824" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_ConvertibleSeniorUnsecuredNotesDue2025Member" xlink:label="veco_ConvertibleSeniorUnsecuredNotesDue2025Member_638126891322906824" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ConvertibleDebtMember_638126891322906824" xlink:to="veco_ConvertibleSeniorUnsecuredNotesDue2025Member_638126891322906824" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_ConvertibleSeniorUnsecuredNotesDue2027Member" xlink:label="veco_ConvertibleSeniorUnsecuredNotesDue2027Member_638126891322916810" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ConvertibleDebtMember_638126891322906824" xlink:to="veco_ConvertibleSeniorUnsecuredNotesDue2027Member_638126891322916810" order="3" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_RangeAxis" xlink:label="srt_RangeAxis_638126891322916810" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentTable_638126891322906824" xlink:to="srt_RangeAxis_638126891322916810" order="2" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_RangeMember" xlink:label="srt_RangeMember_638126891322916810" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RangeAxis_638126891322916810" xlink:to="srt_RangeMember_638126891322916810" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_MinimumMember" xlink:label="srt_MinimumMember_638126891322916810" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RangeMember_638126891322916810" xlink:to="srt_MinimumMember_638126891322916810" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentLineItems" xlink:label="us-gaap_DebtInstrumentLineItems_638126891322916810" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentTable_638126891322906824" xlink:to="us-gaap_DebtInstrumentLineItems_638126891322916810" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentConvertibleConversionRatio1" xlink:label="us-gaap_DebtInstrumentConvertibleConversionRatio1_638126891322916810" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems_638126891322916810" xlink:to="us-gaap_DebtInstrumentConvertibleConversionRatio1_638126891322916810" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_DebtInstrumentPrincipalAmountDenominationForConversionIntoCommonStock" xlink:label="veco_DebtInstrumentPrincipalAmountDenominationForConversionIntoCommonStock_638126891322916810" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems_638126891322916810" xlink:to="veco_DebtInstrumentPrincipalAmountDenominationForConversionIntoCommonStock_638126891322916810" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="6" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentConvertibleConversionPrice1" xlink:label="us-gaap_DebtInstrumentConvertibleConversionPrice1_638126891322916810" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems_638126891322916810" xlink:to="us-gaap_DebtInstrumentConvertibleConversionPrice1_638126891322916810" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentConvertibleThresholdTradingDays" xlink:label="us-gaap_DebtInstrumentConvertibleThresholdTradingDays_638126891322916810" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems_638126891322916810" xlink:to="us-gaap_DebtInstrumentConvertibleThresholdTradingDays_638126891322916810" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentConvertibleThresholdConsecutiveTradingDays1" xlink:label="us-gaap_DebtInstrumentConvertibleThresholdConsecutiveTradingDays1_638126891322916810" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems_638126891322916810" xlink:to="us-gaap_DebtInstrumentConvertibleThresholdConsecutiveTradingDays1_638126891322916810" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="5" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentConvertibleThresholdPercentageOfStockPriceTrigger" xlink:label="us-gaap_DebtInstrumentConvertibleThresholdPercentageOfStockPriceTrigger_638126891322926823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems_638126891322916810" xlink:to="us-gaap_DebtInstrumentConvertibleThresholdPercentageOfStockPriceTrigger_638126891322926823" order="6" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="5" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_DebtInstrumentNumberOfConsecutiveBusinessDays" xlink:label="veco_DebtInstrumentNumberOfConsecutiveBusinessDays_638126891322926823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems_638126891322916810" xlink:to="veco_DebtInstrumentNumberOfConsecutiveBusinessDays_638126891322926823" order="7" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_DebtInstrumentsConvertibleFeaturesMaximumPercentageOfCommonStockCouldBeConverted" xlink:label="veco_DebtInstrumentsConvertibleFeaturesMaximumPercentageOfCommonStockCouldBeConverted_638126891322939235" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems_638126891322916810" xlink:to="veco_DebtInstrumentsConvertibleFeaturesMaximumPercentageOfCommonStockCouldBeConverted_638126891322939235" order="8" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PaymentsOfDebtIssuanceCosts" xlink:label="us-gaap_PaymentsOfDebtIssuanceCosts_638126891322939235" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems_638126891322916810" xlink:to="us-gaap_PaymentsOfDebtIssuanceCosts_638126891322939235" order="9" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LongTermDebtMeasurementInput" xlink:label="us-gaap_LongTermDebtMeasurementInput_638126891322939235" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems_638126891322916810" xlink:to="us-gaap_LongTermDebtMeasurementInput_638126891322939235" order="10" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="5" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LongTermDebtMeasurementInputExtensibleList" xlink:label="us-gaap_LongTermDebtMeasurementInputExtensibleList_638126891322939235" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems_638126891322916810" xlink:to="us-gaap_LongTermDebtMeasurementInputExtensibleList_638126891322939235" order="11" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentUnamortizedDiscount" xlink:label="us-gaap_DebtInstrumentUnamortizedDiscount_638126891322939235" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems_638126891322916810" xlink:to="us-gaap_DebtInstrumentUnamortizedDiscount_638126891322939235" order="12" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="6" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_DebtIssuanceCostsTransactionCostsAllocatedToEquityComponent" xlink:label="veco_DebtIssuanceCostsTransactionCostsAllocatedToEquityComponent_638126891322939235" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems_638126891322916810" xlink:to="veco_DebtIssuanceCostsTransactionCostsAllocatedToEquityComponent_638126891322939235" order="13" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureDebtCarryingValueDetails" xlink:type="extended" xlink:title="41003 - Disclosure - Debt - Carrying Value (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtDisclosureAbstract" xlink:label="us-gaap_DebtDisclosureAbstract_636800389237748519" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentTable" xlink:label="us-gaap_DebtInstrumentTable_638126891322946823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtDisclosureAbstract_636800389237748519" xlink:to="us-gaap_DebtInstrumentTable_638126891322946823" order="1" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentAxis" xlink:label="us-gaap_DebtInstrumentAxis_638126891322946823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentTable_638126891322946823" xlink:to="us-gaap_DebtInstrumentAxis_638126891322946823" order="1" use="optional" priority="5" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentNameDomain" xlink:label="us-gaap_DebtInstrumentNameDomain_638126891322946823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentAxis_638126891322946823" xlink:to="us-gaap_DebtInstrumentNameDomain_638126891322946823" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_ConvertibleSeniorUnsecuredNotesDue2023Member" xlink:label="veco_ConvertibleSeniorUnsecuredNotesDue2023Member_638126891322946823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentNameDomain_638126891322946823" xlink:to="veco_ConvertibleSeniorUnsecuredNotesDue2023Member_638126891322946823" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_ConvertibleSeniorUnsecuredNotesDue2025Member" xlink:label="veco_ConvertibleSeniorUnsecuredNotesDue2025Member_638126891322946823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentNameDomain_638126891322946823" xlink:to="veco_ConvertibleSeniorUnsecuredNotesDue2025Member_638126891322946823" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_ConvertibleSeniorUnsecuredNotesDue2027Member" xlink:label="veco_ConvertibleSeniorUnsecuredNotesDue2027Member_638126891322946823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentNameDomain_638126891322946823" xlink:to="veco_ConvertibleSeniorUnsecuredNotesDue2027Member_638126891322946823" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentLineItems" xlink:label="us-gaap_DebtInstrumentLineItems_638126891322946823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentTable_638126891322946823" xlink:to="us-gaap_DebtInstrumentLineItems_638126891322946823" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentFaceAmount" xlink:label="us-gaap_DebtInstrumentFaceAmount_638126891322956845" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems_638126891322946823" xlink:to="us-gaap_DebtInstrumentFaceAmount_638126891322956845" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentUnamortizedDiscountPremiumAndDebtIssuanceCostsNet" xlink:label="us-gaap_DebtInstrumentUnamortizedDiscountPremiumAndDebtIssuanceCostsNet_638126891322956845" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems_638126891322946823" xlink:to="us-gaap_DebtInstrumentUnamortizedDiscountPremiumAndDebtIssuanceCostsNet_638126891322956845" order="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LongTermDebt" xlink:label="us-gaap_LongTermDebt_638126891322956845" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems_638126891322946823" xlink:to="us-gaap_LongTermDebt_638126891322956845" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" priority="4" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureDebtInterestExpenseDetails" xlink:type="extended" xlink:title="41004 - Disclosure - Debt - Interest Expense (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtDisclosureAbstract" xlink:label="us-gaap_DebtDisclosureAbstract_636794469269900441" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentTable" xlink:label="us-gaap_DebtInstrumentTable_638126891322956845" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtDisclosureAbstract_636794469269900441" xlink:to="us-gaap_DebtInstrumentTable_638126891322956845" order="1" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentAxis" xlink:label="us-gaap_DebtInstrumentAxis_638126891322956845" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentTable_638126891322956845" xlink:to="us-gaap_DebtInstrumentAxis_638126891322956845" order="1" use="optional" priority="6" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentNameDomain" xlink:label="us-gaap_DebtInstrumentNameDomain_638126891322956845" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentAxis_638126891322956845" xlink:to="us-gaap_DebtInstrumentNameDomain_638126891322956845" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_ConvertibleSeniorUnsecuredNotesDue2023Member" xlink:label="veco_ConvertibleSeniorUnsecuredNotesDue2023Member_638126891322956845" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentNameDomain_638126891322956845" xlink:to="veco_ConvertibleSeniorUnsecuredNotesDue2023Member_638126891322956845" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_ConvertibleSeniorUnsecuredNotesDue2025Member" xlink:label="veco_ConvertibleSeniorUnsecuredNotesDue2025Member_638126891322956845" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentNameDomain_638126891322956845" xlink:to="veco_ConvertibleSeniorUnsecuredNotesDue2025Member_638126891322956845" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_ConvertibleSeniorUnsecuredNotesDue2027Member" xlink:label="veco_ConvertibleSeniorUnsecuredNotesDue2027Member_638126891322966815" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentNameDomain_638126891322956845" xlink:to="veco_ConvertibleSeniorUnsecuredNotesDue2027Member_638126891322966815" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentLineItems" xlink:label="us-gaap_DebtInstrumentLineItems_638126891322966815" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentTable_638126891322956845" xlink:to="us-gaap_DebtInstrumentLineItems_638126891322966815" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_CashInterestExpenseAbstract" xlink:label="veco_CashInterestExpenseAbstract_638126891322966815" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems_638126891322966815" xlink:to="veco_CashInterestExpenseAbstract_638126891322966815" order="1" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_InterestExpenseDebtExcludingAmortization" xlink:label="us-gaap_InterestExpenseDebtExcludingAmortization_638126891322966815" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="veco_CashInterestExpenseAbstract_638126891322966815" xlink:to="us-gaap_InterestExpenseDebtExcludingAmortization_638126891322966815" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_NonCashInterestExpenseAbstract" xlink:label="veco_NonCashInterestExpenseAbstract_638126891322966815" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems_638126891322966815" xlink:to="veco_NonCashInterestExpenseAbstract_638126891322966815" order="2" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AmortizationOfFinancingCostsAndDiscounts" xlink:label="us-gaap_AmortizationOfFinancingCostsAndDiscounts_638126891322966815" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="veco_NonCashInterestExpenseAbstract_638126891322966815" xlink:to="us-gaap_AmortizationOfFinancingCostsAndDiscounts_638126891322966815" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_InterestExpenseDebt" xlink:label="us-gaap_InterestExpenseDebt_638126891322966815" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="veco_NonCashInterestExpenseAbstract_638126891322966815" xlink:to="us-gaap_InterestExpenseDebt_638126891322966815" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" priority="3" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ConvertibleDebtFairValueDisclosures" xlink:label="us-gaap_ConvertibleDebtFairValueDisclosures_638126891322966815" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="veco_NonCashInterestExpenseAbstract_638126891322966815" xlink:to="us-gaap_ConvertibleDebtFairValueDisclosures_638126891322966815" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ConvertibleDebtFairValueByFairValueHierarchyLevelExtensibleList" xlink:label="us-gaap_ConvertibleDebtFairValueByFairValueHierarchyLevelExtensibleList_638126891322966815" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="veco_NonCashInterestExpenseAbstract_638126891322966815" xlink:to="us-gaap_ConvertibleDebtFairValueByFairValueHierarchyLevelExtensibleList_638126891322966815" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureDebtCappedCallTransactionsDetails" xlink:type="extended" xlink:title="41005 - Disclosure - Debt - Capped Call Transactions (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtDisclosureAbstract" xlink:label="us-gaap_DebtDisclosureAbstract_2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentTable" xlink:label="us-gaap_DebtInstrumentTable_638126891322976817" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtDisclosureAbstract_2" xlink:to="us-gaap_DebtInstrumentTable_638126891322976817" order="1" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DerivativeInstrumentRiskAxis" xlink:label="us-gaap_DerivativeInstrumentRiskAxis_638126891322976817" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentTable_638126891322976817" xlink:to="us-gaap_DerivativeInstrumentRiskAxis_638126891322976817" order="1" use="optional" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DerivativeContractTypeDomain" xlink:label="us-gaap_DerivativeContractTypeDomain_638126891322976817" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DerivativeInstrumentRiskAxis_638126891322976817" xlink:to="us-gaap_DerivativeContractTypeDomain_638126891322976817" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_DerivativeContractCappedCallMember" xlink:label="veco_DerivativeContractCappedCallMember_638126891322976817" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DerivativeContractTypeDomain_638126891322976817" xlink:to="veco_DerivativeContractCappedCallMember_638126891322976817" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentLineItems" xlink:label="us-gaap_DebtInstrumentLineItems_638126891322976817" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentTable_638126891322976817" xlink:to="us-gaap_DebtInstrumentLineItems_638126891322976817" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="2" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_CappedCallTransactionsPrice" xlink:label="veco_CappedCallTransactionsPrice_638126891322976817" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems_638126891322976817" xlink:to="veco_CappedCallTransactionsPrice_638126891322976817" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_CappedCallTransactionsCapPrice" xlink:label="veco_CappedCallTransactionsCapPrice_638126891322976817" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems_638126891322976817" xlink:to="veco_CappedCallTransactionsCapPrice_638126891322976817" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureDebtRevolvingCreditFacilityDetails" xlink:type="extended" xlink:title="41006 - Disclosure - Debt - Revolving Credit Facility (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtDisclosureAbstract" xlink:label="us-gaap_DebtDisclosureAbstract_1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentTable" xlink:label="us-gaap_DebtInstrumentTable_638126891322986817" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtDisclosureAbstract_1" xlink:to="us-gaap_DebtInstrumentTable_638126891322986817" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentAxis" xlink:label="us-gaap_DebtInstrumentAxis_638126891322986817" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentTable_638126891322986817" xlink:to="us-gaap_DebtInstrumentAxis_638126891322986817" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentNameDomain" xlink:label="us-gaap_DebtInstrumentNameDomain_638126891322986817" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentAxis_638126891322986817" xlink:to="us-gaap_DebtInstrumentNameDomain_638126891322986817" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_RevolvingCreditFacilityDecember2021Member" xlink:label="veco_RevolvingCreditFacilityDecember2021Member_638126891322986817" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentNameDomain_638126891322986817" xlink:to="veco_RevolvingCreditFacilityDecember2021Member_638126891322986817" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_RevolvingCreditFacilityDecember2021LetterOfCreditMember" xlink:label="veco_RevolvingCreditFacilityDecember2021LetterOfCreditMember_638126891322986817" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="veco_RevolvingCreditFacilityDecember2021Member_638126891322986817" xlink:to="veco_RevolvingCreditFacilityDecember2021LetterOfCreditMember_638126891322986817" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_VariableRateAxis" xlink:label="us-gaap_VariableRateAxis_638126891322986817" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentTable_638126891322986817" xlink:to="us-gaap_VariableRateAxis_638126891322986817" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_VariableRateDomain" xlink:label="us-gaap_VariableRateDomain_638126891322986817" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_VariableRateAxis_638126891322986817" xlink:to="us-gaap_VariableRateDomain_638126891322986817" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_BaseRateMember" xlink:label="us-gaap_BaseRateMember_638126891322986817" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_VariableRateDomain_638126891322986817" xlink:to="us-gaap_BaseRateMember_638126891322986817" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SecuredOvernightFinancingRateSofrOvernightIndexSwapRateMember" xlink:label="us-gaap_SecuredOvernightFinancingRateSofrOvernightIndexSwapRateMember_638126891322986817" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_VariableRateDomain_638126891322986817" xlink:to="us-gaap_SecuredOvernightFinancingRateSofrOvernightIndexSwapRateMember_638126891322986817" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_RangeAxis" xlink:label="srt_RangeAxis_638126891322986817" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentTable_638126891322986817" xlink:to="srt_RangeAxis_638126891322986817" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_RangeMember" xlink:label="srt_RangeMember_638126891322986817" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RangeAxis_638126891322986817" xlink:to="srt_RangeMember_638126891322986817" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_MinimumMember" xlink:label="srt_MinimumMember_638126891322986817" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RangeMember_638126891322986817" xlink:to="srt_MinimumMember_638126891322986817" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_MaximumMember" xlink:label="srt_MaximumMember_638126891322996820" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RangeMember_638126891322986817" xlink:to="srt_MaximumMember_638126891322996820" order="2" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentLineItems" xlink:label="us-gaap_DebtInstrumentLineItems_638126891322996820" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentTable_638126891322986817" xlink:to="us-gaap_DebtInstrumentLineItems_638126891322996820" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity" xlink:label="us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity_638126891322996820" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems_638126891322996820" xlink:to="us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity_638126891322996820" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentTerm" xlink:label="us-gaap_DebtInstrumentTerm_638126891322996820" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems_638126891322996820" xlink:to="us-gaap_DebtInstrumentTerm_638126891322996820" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_LineOfCreditFacilityContingentIncreaseAdditionalBorrowingCapacity" xlink:label="veco_LineOfCreditFacilityContingentIncreaseAdditionalBorrowingCapacity_638126891322996820" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems_638126891322996820" xlink:to="veco_LineOfCreditFacilityContingentIncreaseAdditionalBorrowingCapacity_638126891322996820" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DebtInstrumentBasisSpreadOnVariableRate1" xlink:label="us-gaap_DebtInstrumentBasisSpreadOnVariableRate1_638126891322996820" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems_638126891322996820" xlink:to="us-gaap_DebtInstrumentBasisSpreadOnVariableRate1_638126891322996820" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_DebtInstrumentFloorRate" xlink:label="veco_DebtInstrumentFloorRate_638126891322996820" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems_638126891322996820" xlink:to="veco_DebtInstrumentFloorRate_638126891322996820" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LineOfCreditFacilityUnusedCapacityCommitmentFeePercentage" xlink:label="us-gaap_LineOfCreditFacilityUnusedCapacityCommitmentFeePercentage_638126891322996820" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems_638126891322996820" xlink:to="us-gaap_LineOfCreditFacilityUnusedCapacityCommitmentFeePercentage_638126891322996820" order="6" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_DebtInstrumentInterestCoverageRatio" xlink:label="veco_DebtInstrumentInterestCoverageRatio_638126891323006812" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems_638126891322996820" xlink:to="veco_DebtInstrumentInterestCoverageRatio_638126891323006812" order="7" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_DebtInstrumentTotalNetLeverageRatio" xlink:label="veco_DebtInstrumentTotalNetLeverageRatio_638126891323006812" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems_638126891322996820" xlink:to="veco_DebtInstrumentTotalNetLeverageRatio_638126891323006812" order="8" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_DebtInstrumentSecuredNetLeverageRatio" xlink:label="veco_DebtInstrumentSecuredNetLeverageRatio_638126891323006812" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems_638126891322996820" xlink:to="veco_DebtInstrumentSecuredNetLeverageRatio_638126891323006812" order="9" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_LineOfCreditFacilityMaximumAmountOutstandingDuringPeriod" xlink:label="us-gaap_LineOfCreditFacilityMaximumAmountOutstandingDuringPeriod_638126891323006812" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems_638126891322996820" xlink:to="us-gaap_LineOfCreditFacilityMaximumAmountOutstandingDuringPeriod_638126891323006812" order="10" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureStockholdersEquityAociRollforwardDetails" xlink:type="extended" xlink:title="41101 - Disclosure - Stockholders' Equity - AOCI Rollforward (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_StockholdersEquityNoteAbstract" xlink:label="us-gaap_StockholdersEquityNoteAbstract_636814353074428294" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeLossTable" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossTable_638126891323006812" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StockholdersEquityNoteAbstract_636814353074428294" xlink:to="us-gaap_AccumulatedOtherComprehensiveIncomeLossTable_638126891323006812" order="1" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_StatementEquityComponentsAxis" xlink:label="us-gaap_StatementEquityComponentsAxis_638126891323006812" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AccumulatedOtherComprehensiveIncomeLossTable_638126891323006812" xlink:to="us-gaap_StatementEquityComponentsAxis_638126891323006812" order="1" use="optional" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_EquityComponentDomain" xlink:label="us-gaap_EquityComponentDomain_638126891323016819" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementEquityComponentsAxis_638126891323006812" xlink:to="us-gaap_EquityComponentDomain_638126891323016819" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeMember" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeMember_638126891323016819" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EquityComponentDomain_638126891323016819" xlink:to="us-gaap_AccumulatedOtherComprehensiveIncomeMember_638126891323016819" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AccumulatedTranslationAdjustmentMember" xlink:label="us-gaap_AccumulatedTranslationAdjustmentMember_638126891323016819" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EquityComponentDomain_638126891323016819" xlink:to="us-gaap_AccumulatedTranslationAdjustmentMember_638126891323016819" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AccumulatedNetUnrealizedInvestmentGainLossMember" xlink:label="us-gaap_AccumulatedNetUnrealizedInvestmentGainLossMember_638126891323016819" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EquityComponentDomain_638126891323016819" xlink:to="us-gaap_AccumulatedNetUnrealizedInvestmentGainLossMember_638126891323016819" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeLossLineItems" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossLineItems_638126891323016819" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AccumulatedOtherComprehensiveIncomeLossTable_638126891323006812" xlink:to="us-gaap_AccumulatedOtherComprehensiveIncomeLossLineItems_638126891323016819" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AOCIAttributableToParentNetOfTaxRollForward" xlink:label="us-gaap_AOCIAttributableToParentNetOfTaxRollForward_638126891323016819" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AccumulatedOtherComprehensiveIncomeLossLineItems_638126891323016819" xlink:to="us-gaap_AOCIAttributableToParentNetOfTaxRollForward_638126891323016819" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_StockholdersEquity" xlink:label="us-gaap_StockholdersEquity_638126891323016819" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AOCIAttributableToParentNetOfTaxRollForward_638126891323016819" xlink:to="us-gaap_StockholdersEquity_638126891323016819" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodStartLabel" priority="5" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent" xlink:label="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent_638126891323016819" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AOCIAttributableToParentNetOfTaxRollForward_638126891323016819" xlink:to="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent_638126891323016819" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="6" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_StockholdersEquity" xlink:label="us-gaap_StockholdersEquity_638126891323076829" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AOCIAttributableToParentNetOfTaxRollForward_638126891323016819" xlink:to="us-gaap_StockholdersEquity_638126891323076829" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel" priority="5" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureStockholdersEquityPreferredStockDetails" xlink:type="extended" xlink:title="41102 - Disclosure - Stockholders' Equity - Preferred Stock (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_StockholdersEquityNoteAbstract" xlink:label="us-gaap_StockholdersEquityNoteAbstract_636226001903162204" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PreferredStockParOrStatedValuePerShare" xlink:label="us-gaap_PreferredStockParOrStatedValuePerShare_638126891323076829" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StockholdersEquityNoteAbstract_636226001903162204" xlink:to="us-gaap_PreferredStockParOrStatedValuePerShare_638126891323076829" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PreferredStockSharesIssued" xlink:label="us-gaap_PreferredStockSharesIssued_638126891323076829" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StockholdersEquityNoteAbstract_636226001903162204" xlink:to="us-gaap_PreferredStockSharesIssued_638126891323076829" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureStockPlans2019PlanDetails" xlink:type="extended" xlink:title="41201 - Disclosure - Stock Plans - 2019 Plan (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xlink:label="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:label="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_638126891323086823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xlink:to="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_638126891323086823" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AwardTypeAxis" xlink:label="us-gaap_AwardTypeAxis_638126891323086823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_638126891323086823" xlink:to="us-gaap_AwardTypeAxis_638126891323086823" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xlink:label="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_638126891323086823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AwardTypeAxis_638126891323086823" xlink:to="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_638126891323086823" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_EmployeeStockOptionMember" xlink:label="us-gaap_EmployeeStockOptionMember_638126891323086823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_638126891323086823" xlink:to="us-gaap_EmployeeStockOptionMember_638126891323086823" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_RestrictedStockAwardsAndRestrictedStockUnitsMember" xlink:label="veco_RestrictedStockAwardsAndRestrictedStockUnitsMember_638126891323086823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_638126891323086823" xlink:to="veco_RestrictedStockAwardsAndRestrictedStockUnitsMember_638126891323086823" order="2" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_RestrictedStockUnitsRSUMember" xlink:label="us-gaap_RestrictedStockUnitsRSUMember_638126891323086823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="veco_RestrictedStockAwardsAndRestrictedStockUnitsMember_638126891323086823" xlink:to="us-gaap_RestrictedStockUnitsRSUMember_638126891323086823" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_RsuAndPsuAwardsMember" xlink:label="veco_RsuAndPsuAwardsMember_638126891323086823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_638126891323086823" xlink:to="veco_RsuAndPsuAwardsMember_638126891323086823" order="3" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PlanNameAxis" xlink:label="us-gaap_PlanNameAxis_638126891323086823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_638126891323086823" xlink:to="us-gaap_PlanNameAxis_638126891323086823" order="2" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PlanNameDomain" xlink:label="us-gaap_PlanNameDomain_638126891323086823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PlanNameAxis_638126891323086823" xlink:to="us-gaap_PlanNameDomain_638126891323086823" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_InducementStockIncentivePlan2013Member" xlink:label="veco_InducementStockIncentivePlan2013Member_638126891323086823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PlanNameDomain_638126891323086823" xlink:to="veco_InducementStockIncentivePlan2013Member_638126891323086823" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_StockIncentivePlan2010Member" xlink:label="veco_StockIncentivePlan2010Member_638126891323096816" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PlanNameDomain_638126891323086823" xlink:to="veco_StockIncentivePlan2010Member_638126891323096816" order="2" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_RangeAxis" xlink:label="srt_RangeAxis_638126891323096816" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_638126891323086823" xlink:to="srt_RangeAxis_638126891323096816" order="3" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_RangeMember" xlink:label="srt_RangeMember_638126891323096816" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RangeAxis_638126891323096816" xlink:to="srt_RangeMember_638126891323096816" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_MinimumMember" xlink:label="srt_MinimumMember_638126891323096816" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RangeMember_638126891323096816" xlink:to="srt_MinimumMember_638126891323096816" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_MaximumMember" xlink:label="srt_MaximumMember_638126891323096816" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RangeMember_638126891323096816" xlink:to="srt_MaximumMember_638126891323096816" order="2" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_638126891323096816" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_638126891323086823" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_638126891323096816" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriod" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriod_638126891323096816" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_638126891323096816" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriod_638126891323096816" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod_638126891323096816" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_638126891323096816" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod_638126891323096816" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1_638126891323096816" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_638126891323096816" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1_638126891323096816" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod_638126891323096816" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_638126891323096816" xlink:to="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod_638126891323096816" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant_638126891323106824" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_638126891323096816" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant_638126891323106824" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber_638126891323106824" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_638126891323096816" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber_638126891323106824" order="6" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNonOptionEquityInstrumentsOutstandingNumber" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNonOptionEquityInstrumentsOutstandingNumber_638126891323106824" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_638126891323096816" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNonOptionEquityInstrumentsOutstandingNumber_638126891323106824" order="7" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="5" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized_638126891323106824" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_638126891323096816" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized_638126891323106824" order="8" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureStockPlansEsppDetails" xlink:type="extended" xlink:title="41202 - Disclosure - Stock Plans - ESPP (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xlink:label="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract_636797890073605922" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:label="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_638126891323106824" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract_636797890073605922" xlink:to="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_638126891323106824" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PlanNameAxis" xlink:label="us-gaap_PlanNameAxis_638126891323116814" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_638126891323106824" xlink:to="us-gaap_PlanNameAxis_638126891323116814" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PlanNameDomain" xlink:label="us-gaap_PlanNameDomain_638126891323116814" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PlanNameAxis_638126891323116814" xlink:to="us-gaap_PlanNameDomain_638126891323116814" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_EmployeeStockPurchasePlan2016Member" xlink:label="veco_EmployeeStockPurchasePlan2016Member_638126891323116814" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PlanNameDomain_638126891323116814" xlink:to="veco_EmployeeStockPurchasePlan2016Member_638126891323116814" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_638126891323116814" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_638126891323106824" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_638126891323116814" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized_638126891323116814" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_638126891323116814" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized_638126891323116814" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardPurchasePriceOfCommonStockPercent" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardPurchasePriceOfCommonStockPercent_638126891323116814" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_638126891323116814" xlink:to="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardPurchasePriceOfCommonStockPercent_638126891323116814" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferPeriod" xlink:label="veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferPeriod_638126891323116814" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_638126891323116814" xlink:to="veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferPeriod_638126891323116814" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureStockPlansSharesReservedForFutureIssuanceDetails" xlink:type="extended" xlink:title="41203 - Disclosure - Stock Plans - Shares Reserved for Future Issuance (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xlink:label="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract_636797903670175302" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:label="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_638126891323116814" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract_636797903670175302" xlink:to="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_638126891323116814" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PlanNameAxis" xlink:label="us-gaap_PlanNameAxis_638126891323116814" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_638126891323116814" xlink:to="us-gaap_PlanNameAxis_638126891323116814" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PlanNameDomain" xlink:label="us-gaap_PlanNameDomain_638126891323126821" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PlanNameAxis_638126891323116814" xlink:to="us-gaap_PlanNameDomain_638126891323126821" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_StockIncentivePlan2010Member" xlink:label="veco_StockIncentivePlan2010Member_638126891323126821" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PlanNameDomain_638126891323126821" xlink:to="veco_StockIncentivePlan2010Member_638126891323126821" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_EmployeeStockPurchasePlan2016Member" xlink:label="veco_EmployeeStockPurchasePlan2016Member_638126891323126821" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PlanNameDomain_638126891323126821" xlink:to="veco_EmployeeStockPurchasePlan2016Member_638126891323126821" order="2" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_638126891323126821" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_638126891323116814" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_638126891323126821" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_SharesReservedForFutureIssuanceAbstract" xlink:label="veco_SharesReservedForFutureIssuanceAbstract_638126891323126821" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_638126891323126821" xlink:to="veco_SharesReservedForFutureIssuanceAbstract_638126891323126821" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CommonStockCapitalSharesReservedForFutureIssuance" xlink:label="us-gaap_CommonStockCapitalSharesReservedForFutureIssuance_638126891323126821" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="veco_SharesReservedForFutureIssuanceAbstract_638126891323126821" xlink:to="us-gaap_CommonStockCapitalSharesReservedForFutureIssuance_638126891323126821" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="4" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureStockPlansRecognizedShareBasedCompensationDetails" xlink:type="extended" xlink:title="41204 - Disclosure - Stock Plans - Recognized Share-based Compensation (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xlink:label="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:label="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_638126891323136836" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xlink:to="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_638126891323136836" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeStatementLocationAxis" xlink:label="us-gaap_IncomeStatementLocationAxis_638126891323136836" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_638126891323136836" xlink:to="us-gaap_IncomeStatementLocationAxis_638126891323136836" order="1" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeStatementLocationDomain" xlink:label="us-gaap_IncomeStatementLocationDomain_638126891323136836" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeStatementLocationAxis_638126891323136836" xlink:to="us-gaap_IncomeStatementLocationDomain_638126891323136836" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CostOfSalesMember" xlink:label="us-gaap_CostOfSalesMember_638126891323136836" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeStatementLocationDomain_638126891323136836" xlink:to="us-gaap_CostOfSalesMember_638126891323136836" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ResearchAndDevelopmentExpenseMember" xlink:label="us-gaap_ResearchAndDevelopmentExpenseMember_638126891323136836" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeStatementLocationDomain_638126891323136836" xlink:to="us-gaap_ResearchAndDevelopmentExpenseMember_638126891323136836" order="2" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SellingGeneralAndAdministrativeExpensesMember" xlink:label="us-gaap_SellingGeneralAndAdministrativeExpensesMember_638126891323136836" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeStatementLocationDomain_638126891323136836" xlink:to="us-gaap_SellingGeneralAndAdministrativeExpensesMember_638126891323136836" order="3" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_638126891323136836" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_638126891323136836" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_638126891323136836" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract_638126891323136836" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_638126891323136836" xlink:to="us-gaap_EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract_638126891323136836" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AllocatedShareBasedCompensationExpense" xlink:label="us-gaap_AllocatedShareBasedCompensationExpense_638126891323136836" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract_638126891323136836" xlink:to="us-gaap_AllocatedShareBasedCompensationExpense_638126891323136836" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense_638126891323146822" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract_638126891323136836" xlink:to="us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense_638126891323146822" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureStockPlansUnrecognizedShareBasedCompensationCostsDetails" xlink:type="extended" xlink:title="41205 - Disclosure - Stock Plans - Unrecognized Share-based Compensation Costs (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xlink:label="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:label="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_638126891323146822" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xlink:to="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_638126891323146822" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AwardTypeAxis" xlink:label="us-gaap_AwardTypeAxis_638126891323146822" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_638126891323146822" xlink:to="us-gaap_AwardTypeAxis_638126891323146822" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xlink:label="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_638126891323146822" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AwardTypeAxis_638126891323146822" xlink:to="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_638126891323146822" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_RestrictedStockAwardsAndRestrictedStockUnitsMember" xlink:label="veco_RestrictedStockAwardsAndRestrictedStockUnitsMember_638126891323146822" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_638126891323146822" xlink:to="veco_RestrictedStockAwardsAndRestrictedStockUnitsMember_638126891323146822" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_RestrictedStockUnitsRSUMember" xlink:label="us-gaap_RestrictedStockUnitsRSUMember_638126891323146822" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="veco_RestrictedStockAwardsAndRestrictedStockUnitsMember_638126891323146822" xlink:to="us-gaap_RestrictedStockUnitsRSUMember_638126891323146822" order="1" use="optional" priority="1" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_RestrictedStockAwardMember" xlink:label="veco_RestrictedStockAwardMember_638126891323146822" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="veco_RestrictedStockAwardsAndRestrictedStockUnitsMember_638126891323146822" xlink:to="veco_RestrictedStockAwardMember_638126891323146822" order="2" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_PerformanceShareUnitsMember" xlink:label="veco_PerformanceShareUnitsMember_638126891323146822" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_638126891323146822" xlink:to="veco_PerformanceShareUnitsMember_638126891323146822" order="2" use="optional" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_638126891323156822" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_638126891323146822" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_638126891323156822" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedAbstract" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedAbstract_638126891323156822" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_638126891323156822" xlink:to="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedAbstract_638126891323156822" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized_638126891323156822" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedAbstract_638126891323156822" xlink:to="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized_638126891323156822" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="6" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1_638126891323156822" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedAbstract_638126891323156822" xlink:to="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1_638126891323156822" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="4" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureStockPlansStockOptionActivityDetails" xlink:type="extended" xlink:title="41206 - Disclosure - Stock Plans - Stock Option Activity (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xlink:label="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward_638126891323156822" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward_638126891323156822" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber_638126891323156822" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward_638126891323156822" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber_638126891323156822" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodStartLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised" xlink:label="us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised_638126891323156822" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward_638126891323156822" xlink:to="us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised_638126891323156822" order="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresAndExpirationsInPeriod" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresAndExpirationsInPeriod_638126891323156822" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward_638126891323156822" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresAndExpirationsInPeriod_638126891323156822" order="3" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber_638126891323166845" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward_638126891323156822" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber_638126891323166845" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAdditionalDisclosuresAbstract" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAdditionalDisclosuresAbstract_638126891323166845" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAdditionalDisclosuresAbstract_638126891323166845" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice_638126891323166845" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAdditionalDisclosuresAbstract_638126891323166845" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice_638126891323166845" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodStartLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice" xlink:label="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice_638126891323166845" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAdditionalDisclosuresAbstract_638126891323166845" xlink:to="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice_638126891323166845" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresAndExpirationsInPeriodWeightedAverageExercisePrice" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresAndExpirationsInPeriodWeightedAverageExercisePrice_638126891323166845" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAdditionalDisclosuresAbstract_638126891323166845" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresAndExpirationsInPeriodWeightedAverageExercisePrice_638126891323166845" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice_6381268913231668451" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAdditionalDisclosuresAbstract_638126891323166845" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice_6381268913231668451" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureStockPlansOptionExerciseRangesDetails" xlink:type="extended" xlink:title="41207 - Disclosure - Stock Plans - Option Exercise Ranges (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xlink:label="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeTable" xlink:label="us-gaap_ScheduleOfShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeTable_638126891323166845" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xlink:to="us-gaap_ScheduleOfShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeTable_638126891323166845" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis" xlink:label="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis_638126891323166845" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeTable_638126891323166845" xlink:to="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis_638126891323166845" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeDomain" xlink:label="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeDomain_638126891323176823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis_638126891323166845" xlink:to="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeDomain_638126891323176823" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_RangeOfExercisePricesRangeOneMember" xlink:label="veco_RangeOfExercisePricesRangeOneMember_638126891323176823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeDomain_638126891323176823" xlink:to="veco_RangeOfExercisePricesRangeOneMember_638126891323176823" order="1" use="optional" priority="1" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_RangeOfExercisePricesRangeTwoMember" xlink:label="veco_RangeOfExercisePricesRangeTwoMember_638126891323176823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeDomain_638126891323176823" xlink:to="veco_RangeOfExercisePricesRangeTwoMember_638126891323176823" order="2" use="optional" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLineItems" xlink:label="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLineItems_638126891323176823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeTable_638126891323166845" xlink:to="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLineItems_638126891323176823" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLowerRangeLimit" xlink:label="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLowerRangeLimit_638126891323176823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLineItems_638126891323176823" xlink:to="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLowerRangeLimit_638126891323176823" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeUpperRangeLimit" xlink:label="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeUpperRangeLimit_638126891323176823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLineItems_638126891323176823" xlink:to="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeUpperRangeLimit_638126891323176823" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsAbstract" xlink:label="veco_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsAbstract_638126891323176823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLineItems_638126891323176823" xlink:to="veco_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsAbstract_638126891323176823" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="3" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfOutstandingOptions" xlink:label="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfOutstandingOptions_638126891323176823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="veco_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsAbstract_638126891323176823" xlink:to="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfOutstandingOptions_638126891323176823" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageRemainingContractualTerm2" xlink:label="us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageRemainingContractualTerm2_638126891323176823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="veco_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsAbstract_638126891323176823" xlink:to="us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageRemainingContractualTerm2_638126891323176823" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageExercisePriceBeginningBalance1" xlink:label="us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageExercisePriceBeginningBalance1_638126891323176823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="veco_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsAbstract_638126891323176823" xlink:to="us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageExercisePriceBeginningBalance1_638126891323176823" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsAbstract" xlink:label="veco_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsAbstract_638126891323176823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLineItems_638126891323176823" xlink:to="veco_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsAbstract_638126891323176823" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfExercisableOptions" xlink:label="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfExercisableOptions_638126891323186818" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="veco_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsAbstract_638126891323176823" xlink:to="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfExercisableOptions_638126891323186818" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageRemainingContractualTerm2" xlink:label="us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageRemainingContractualTerm2_638126891323186818" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="veco_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsAbstract_638126891323176823" xlink:to="us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageRemainingContractualTerm2_638126891323186818" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageExercisePrice1" xlink:label="us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageExercisePrice1_638126891323186818" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="veco_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsAbstract_638126891323176823" xlink:to="us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageExercisePrice1_638126891323186818" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsNonvestedNumberOfShares" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsNonvestedNumberOfShares_638126891323186818" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLineItems_638126891323176823" xlink:to="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsNonvestedNumberOfShares_638126891323186818" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureStockPlansStockOptionsExercisedDetails" xlink:type="extended" xlink:title="41208 - Disclosure - Stock Plans - Stock options exercised (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xlink:label="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract_1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ProceedsFromStockOptionsExercised" xlink:label="us-gaap_ProceedsFromStockOptionsExercised_638126891323196823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract_1" xlink:to="us-gaap_ProceedsFromStockOptionsExercised_638126891323196823" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue_638126891323196823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract_1" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue_638126891323196823" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureShareBasedCompensationRestrictedSharesAndPerformanceSharesDetails" xlink:type="extended" xlink:title="41209 - Disclosure - Share-based Compensation - Restricted shares and performance shares (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xlink:label="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:label="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_638126891323196823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xlink:to="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_638126891323196823" order="1" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AwardTypeAxis" xlink:label="us-gaap_AwardTypeAxis_638126891323196823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_638126891323196823" xlink:to="us-gaap_AwardTypeAxis_638126891323196823" order="1" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xlink:label="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_638126891323196823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AwardTypeAxis_638126891323196823" xlink:to="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_638126891323196823" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember" xlink:label="veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_638126891323196823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_638126891323196823" xlink:to="veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_638126891323196823" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_RestrictedStockAwardsAndRestrictedStockUnitsMember" xlink:label="veco_RestrictedStockAwardsAndRestrictedStockUnitsMember_638126891323196823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_638126891323196823" xlink:to="veco_RestrictedStockAwardsAndRestrictedStockUnitsMember_638126891323196823" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_RestrictedStockUnitsRSUMember" xlink:label="us-gaap_RestrictedStockUnitsRSUMember_638126891323196823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="veco_RestrictedStockAwardsAndRestrictedStockUnitsMember_638126891323196823" xlink:to="us-gaap_RestrictedStockUnitsRSUMember_638126891323196823" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_RangeAxis" xlink:label="srt_RangeAxis_638126891323196823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_638126891323196823" xlink:to="srt_RangeAxis_638126891323196823" order="2" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_RangeMember" xlink:label="srt_RangeMember_638126891323206814" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RangeAxis_638126891323196823" xlink:to="srt_RangeMember_638126891323206814" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_MinimumMember" xlink:label="srt_MinimumMember_638126891323206814" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RangeMember_638126891323206814" xlink:to="srt_MinimumMember_638126891323206814" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_MaximumMember" xlink:label="srt_MaximumMember_638126891323206814" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RangeMember_638126891323206814" xlink:to="srt_MaximumMember_638126891323206814" order="2" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_638126891323206814" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_638126891323196823" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_638126891323206814" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward_638126891323206814" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_638126891323206814" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward_638126891323206814" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber_638126891323206814" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward_638126891323206814" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber_638126891323206814" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodStartLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod_638126891323206814" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward_638126891323206814" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod_638126891323206814" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsPerformanceAwardAdjustmentsInPeriod" xlink:label="veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsPerformanceAwardAdjustmentsInPeriod_638126891323206814" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward_638126891323206814" xlink:to="veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsPerformanceAwardAdjustmentsInPeriod_638126891323206814" order="3" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" priority="6" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod_638126891323206814" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward_638126891323206814" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod_638126891323206814" order="4" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeitedInPeriod" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeitedInPeriod_638126891323206814" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward_638126891323206814" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeitedInPeriod_638126891323206814" order="5" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber_638126891323216833" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward_638126891323206814" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber_638126891323216833" order="6" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsAdditionalDisclosuresAbstract" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsAdditionalDisclosuresAbstract_638126891323216833" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_638126891323206814" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsAdditionalDisclosuresAbstract_638126891323216833" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue_638126891323216833" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsAdditionalDisclosuresAbstract_638126891323216833" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue_638126891323216833" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodStartLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue_638126891323216833" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsAdditionalDisclosuresAbstract_638126891323216833" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue_638126891323216833" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsPerformanceAwardAdjustmentsWeightedAverageGrantDateFairValue" xlink:label="veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsPerformanceAwardAdjustmentsWeightedAverageGrantDateFairValue_638126891323216833" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsAdditionalDisclosuresAbstract_638126891323216833" xlink:to="veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsPerformanceAwardAdjustmentsWeightedAverageGrantDateFairValue_638126891323216833" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue_638126891323216833" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsAdditionalDisclosuresAbstract_638126891323216833" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue_638126891323216833" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue_638126891323216833" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsAdditionalDisclosuresAbstract_638126891323216833" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue_638126891323216833" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue_6381268913232168331" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsAdditionalDisclosuresAbstract_638126891323216833" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue_6381268913232168331" order="6" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1_638126891323226820" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_638126891323206814" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1_638126891323226820" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodTotalFairValue" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodTotalFairValue_638126891323226820" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_638126891323206814" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodTotalFairValue_638126891323226820" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureStockPlansPerformanceAwardsAssumptionsDetails" xlink:type="extended" xlink:title="41210 - Disclosure - Stock Plans - Performance Awards Assumptions (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xlink:label="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract_636849820801986236" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:label="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_638126891323226820" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract_636849820801986236" xlink:to="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_638126891323226820" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AwardTypeAxis" xlink:label="us-gaap_AwardTypeAxis_638126891323226820" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_638126891323226820" xlink:to="us-gaap_AwardTypeAxis_638126891323226820" order="1" use="optional" priority="3" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xlink:label="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_638126891323226820" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AwardTypeAxis_638126891323226820" xlink:to="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_638126891323226820" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_PerformanceShareUnitsMarketConditionsMember" xlink:label="veco_PerformanceShareUnitsMarketConditionsMember_638126891323236833" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_638126891323226820" xlink:to="veco_PerformanceShareUnitsMarketConditionsMember_638126891323236833" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_638126891323236833" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_638126891323226820" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_638126891323236833" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract_638126891323236833" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_638126891323236833" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract_638126891323236833" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue_638126891323236833" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract_638126891323236833" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue_638126891323236833" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate_638126891323236833" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract_638126891323236833" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate_638126891323236833" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsWeightedAverageVolatilityRate" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsWeightedAverageVolatilityRate_638126891323236833" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract_638126891323236833" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsWeightedAverageVolatilityRate_638126891323236833" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate_638126891323236833" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract_638126891323236833" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate_638126891323236833" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1_638126891323236833" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract_638126891323236833" xlink:to="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1_638126891323236833" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureStockPlansEsppFvAssumptionsDetails" xlink:type="extended" xlink:title="41211 - Disclosure - Stock Plans - ESPP FV Assumptions (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xlink:label="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract_636797928149292969" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:label="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_638126891323246827" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract_636797928149292969" xlink:to="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_638126891323246827" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PlanNameAxis" xlink:label="us-gaap_PlanNameAxis_638126891323246827" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_638126891323246827" xlink:to="us-gaap_PlanNameAxis_638126891323246827" order="1" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PlanNameDomain" xlink:label="us-gaap_PlanNameDomain_638126891323246827" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PlanNameAxis_638126891323246827" xlink:to="us-gaap_PlanNameDomain_638126891323246827" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_EmployeeStockPurchasePlan2016Member" xlink:label="veco_EmployeeStockPurchasePlan2016Member_638126891323246827" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PlanNameDomain_638126891323246827" xlink:to="veco_EmployeeStockPurchasePlan2016Member_638126891323246827" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_638126891323246827" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_638126891323246827" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_638126891323246827" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ProceedsFromIssuanceOfSharesUnderIncentiveAndShareBasedCompensationPlans" xlink:label="us-gaap_ProceedsFromIssuanceOfSharesUnderIncentiveAndShareBasedCompensationPlans_638126891323246827" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_638126891323246827" xlink:to="us-gaap_ProceedsFromIssuanceOfSharesUnderIncentiveAndShareBasedCompensationPlans_638126891323246827" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans" xlink:label="us-gaap_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans_638126891323246827" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_638126891323246827" xlink:to="us-gaap_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans_638126891323246827" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="6" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract_638126891323246827" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_638126891323246827" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract_638126891323246827" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue_638126891323246827" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract_638126891323246827" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue_638126891323246827" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate_638126891323246827" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract_638126891323246827" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate_638126891323246827" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsWeightedAverageVolatilityRate" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsWeightedAverageVolatilityRate_638126891323246827" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract_638126891323246827" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsWeightedAverageVolatilityRate_638126891323246827" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate_638126891323256814" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract_638126891323246827" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate_638126891323256814" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1_638126891323256814" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract_638126891323246827" xlink:to="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1_638126891323256814" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureRetirementPlansDefinedContributionPlanDetails" xlink:type="extended" xlink:title="41301 - Disclosure - Retirement Plans - Defined Contribution Plan (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CompensationAndRetirementDisclosureAbstract" xlink:label="us-gaap_CompensationAndRetirementDisclosureAbstract_636077277926119378" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DefinedContributionPlanTable" xlink:label="us-gaap_DefinedContributionPlanTable_638126891323256814" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CompensationAndRetirementDisclosureAbstract_636077277926119378" xlink:to="us-gaap_DefinedContributionPlanTable_638126891323256814" order="1" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_RangeAxis" xlink:label="srt_RangeAxis_638126891323256814" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DefinedContributionPlanTable_638126891323256814" xlink:to="srt_RangeAxis_638126891323256814" order="1" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_RangeMember" xlink:label="srt_RangeMember_638126891323256814" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RangeAxis_638126891323256814" xlink:to="srt_RangeMember_638126891323256814" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_MaximumMember" xlink:label="srt_MaximumMember_638126891323256814" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RangeMember_638126891323256814" xlink:to="srt_MaximumMember_638126891323256814" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DefinedContributionPlanDisclosureLineItems" xlink:label="us-gaap_DefinedContributionPlanDisclosureLineItems_638126891323266818" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DefinedContributionPlanTable_638126891323256814" xlink:to="us-gaap_DefinedContributionPlanDisclosureLineItems_638126891323266818" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DefinedContributionPlanEmployerMatchingContributionPercentOfMatch" xlink:label="us-gaap_DefinedContributionPlanEmployerMatchingContributionPercentOfMatch_638126891323266818" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DefinedContributionPlanDisclosureLineItems_638126891323266818" xlink:to="us-gaap_DefinedContributionPlanEmployerMatchingContributionPercentOfMatch_638126891323266818" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DefinedContributionPlanEmployerMatchingContributionPercent" xlink:label="us-gaap_DefinedContributionPlanEmployerMatchingContributionPercent_638126891323266818" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DefinedContributionPlanDisclosureLineItems_638126891323266818" xlink:to="us-gaap_DefinedContributionPlanEmployerMatchingContributionPercent_638126891323266818" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_DefinedContributionPlanEmployerMatchingContributionVestingPeriod" xlink:label="veco_DefinedContributionPlanEmployerMatchingContributionVestingPeriod_638126891323266818" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DefinedContributionPlanDisclosureLineItems_638126891323266818" xlink:to="veco_DefinedContributionPlanEmployerMatchingContributionVestingPeriod_638126891323266818" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DefinedContributionPlanCostRecognized" xlink:label="us-gaap_DefinedContributionPlanCostRecognized_638126891323266818" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DefinedContributionPlanDisclosureLineItems_638126891323266818" xlink:to="us-gaap_DefinedContributionPlanCostRecognized_638126891323266818" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureDispositionsDetails" xlink:type="extended" xlink:title="41401 - Disclosure - Dispositions (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DiscontinuedOperationsAndDisposalGroupsAbstract" xlink:label="us-gaap_DiscontinuedOperationsAndDisposalGroupsAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsTable" xlink:label="us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsTable_638126891323266818" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DiscontinuedOperationsAndDisposalGroupsAbstract" xlink:to="us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsTable_638126891323266818" order="1" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsAxis" xlink:label="us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsAxis_638126891323266818" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsTable_638126891323266818" xlink:to="us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsAxis_638126891323266818" order="1" use="optional" priority="3" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DisposalGroupsIncludingDiscontinuedOperationsNameDomain" xlink:label="us-gaap_DisposalGroupsIncludingDiscontinuedOperationsNameDomain_638126891323266818" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsAxis_638126891323266818" xlink:to="us-gaap_DisposalGroupsIncludingDiscontinuedOperationsNameDomain_638126891323266818" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_OneNonCoreProductLineMember" xlink:label="veco_OneNonCoreProductLineMember_638126891323266818" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DisposalGroupsIncludingDiscontinuedOperationsNameDomain_638126891323266818" xlink:to="veco_OneNonCoreProductLineMember_638126891323266818" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DisposalGroupClassificationAxis" xlink:label="us-gaap_DisposalGroupClassificationAxis_638126891323276823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsTable_638126891323266818" xlink:to="us-gaap_DisposalGroupClassificationAxis_638126891323276823" order="2" use="optional" priority="3" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DisposalGroupClassificationDomain" xlink:label="us-gaap_DisposalGroupClassificationDomain_638126891323276823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DisposalGroupClassificationAxis_638126891323276823" xlink:to="us-gaap_DisposalGroupClassificationDomain_638126891323276823" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DisposalGroupDisposedOfBySaleNotDiscontinuedOperationsMember" xlink:label="us-gaap_DisposalGroupDisposedOfBySaleNotDiscontinuedOperationsMember_638126891323276823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DisposalGroupClassificationDomain_638126891323276823" xlink:to="us-gaap_DisposalGroupDisposedOfBySaleNotDiscontinuedOperationsMember_638126891323276823" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsLineItems" xlink:label="us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsLineItems_638126891323276823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsTable_638126891323266818" xlink:to="us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsLineItems_638126891323276823" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DisposalGroupIncludingDiscontinuedOperationConsideration" xlink:label="us-gaap_DisposalGroupIncludingDiscontinuedOperationConsideration_638126891323276823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsLineItems_638126891323276823" xlink:to="us-gaap_DisposalGroupIncludingDiscontinuedOperationConsideration_638126891323276823" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_PercentageOfTransactionPrice" xlink:label="veco_PercentageOfTransactionPrice_638126891323276823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsLineItems_638126891323276823" xlink:to="veco_PercentageOfTransactionPrice_638126891323276823" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_PercentageOfAmountHeldInEscrow" xlink:label="veco_PercentageOfAmountHeldInEscrow_638126891323276823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsLineItems_638126891323276823" xlink:to="veco_PercentageOfAmountHeldInEscrow_638126891323276823" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_TermOfAmountToBeHeldInEscrow" xlink:label="veco_TermOfAmountToBeHeldInEscrow_638126891323276823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsLineItems_638126891323276823" xlink:to="veco_TermOfAmountToBeHeldInEscrow_638126891323276823" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AssetImpairmentCharges" xlink:label="us-gaap_AssetImpairmentCharges_638126891323276823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsLineItems_638126891323276823" xlink:to="us-gaap_AssetImpairmentCharges_638126891323276823" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureIncomeTaxesIncomeAttributableToDomesticAndForeignOperationsDetails" xlink:type="extended" xlink:title="41501 - Disclosure - Income Taxes - Income Attributable to Domestic and Foreign Operations (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeTaxDisclosureAbstract" xlink:label="us-gaap_IncomeTaxDisclosureAbstract_636077277926119378" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestmentsAbstract" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestmentsAbstract_638126891323286823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxDisclosureAbstract_636077277926119378" xlink:to="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestmentsAbstract_638126891323286823" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic_638126891323286823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestmentsAbstract_638126891323286823" xlink:to="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic_638126891323286823" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign_638126891323286823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestmentsAbstract_638126891323286823" xlink:to="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign_638126891323286823" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest_638126891323286823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestmentsAbstract_638126891323286823" xlink:to="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest_638126891323286823" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" priority="4" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureIncomeTaxesComponentsOfExpenseBenefitDetails" xlink:type="extended" xlink:title="41502 - Disclosure - Income Taxes - Components of Expense (Benefit) (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeTaxDisclosureAbstract" xlink:label="us-gaap_IncomeTaxDisclosureAbstract_636077277926119378" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CurrentIncomeTaxExpenseBenefitContinuingOperationsAbstract" xlink:label="us-gaap_CurrentIncomeTaxExpenseBenefitContinuingOperationsAbstract_638126891323286823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxDisclosureAbstract_636077277926119378" xlink:to="us-gaap_CurrentIncomeTaxExpenseBenefitContinuingOperationsAbstract_638126891323286823" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CurrentForeignTaxExpenseBenefit" xlink:label="us-gaap_CurrentForeignTaxExpenseBenefit_638126891323286823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CurrentIncomeTaxExpenseBenefitContinuingOperationsAbstract_638126891323286823" xlink:to="us-gaap_CurrentForeignTaxExpenseBenefit_638126891323286823" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CurrentStateAndLocalTaxExpenseBenefit" xlink:label="us-gaap_CurrentStateAndLocalTaxExpenseBenefit_638126891323286823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CurrentIncomeTaxExpenseBenefitContinuingOperationsAbstract_638126891323286823" xlink:to="us-gaap_CurrentStateAndLocalTaxExpenseBenefit_638126891323286823" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CurrentIncomeTaxExpenseBenefit" xlink:label="us-gaap_CurrentIncomeTaxExpenseBenefit_638126891323296816" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CurrentIncomeTaxExpenseBenefitContinuingOperationsAbstract_638126891323286823" xlink:to="us-gaap_CurrentIncomeTaxExpenseBenefit_638126891323296816" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredIncomeTaxExpenseBenefitContinuingOperationsAbstract" xlink:label="us-gaap_DeferredIncomeTaxExpenseBenefitContinuingOperationsAbstract_638126891323296816" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxDisclosureAbstract_636077277926119378" xlink:to="us-gaap_DeferredIncomeTaxExpenseBenefitContinuingOperationsAbstract_638126891323296816" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredFederalIncomeTaxExpenseBenefit" xlink:label="us-gaap_DeferredFederalIncomeTaxExpenseBenefit_638126891323296816" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DeferredIncomeTaxExpenseBenefitContinuingOperationsAbstract_638126891323296816" xlink:to="us-gaap_DeferredFederalIncomeTaxExpenseBenefit_638126891323296816" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredForeignIncomeTaxExpenseBenefit" xlink:label="us-gaap_DeferredForeignIncomeTaxExpenseBenefit_638126891323296816" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DeferredIncomeTaxExpenseBenefitContinuingOperationsAbstract_638126891323296816" xlink:to="us-gaap_DeferredForeignIncomeTaxExpenseBenefit_638126891323296816" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredStateAndLocalIncomeTaxExpenseBenefit" xlink:label="us-gaap_DeferredStateAndLocalIncomeTaxExpenseBenefit_638126891323296816" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DeferredIncomeTaxExpenseBenefitContinuingOperationsAbstract_638126891323296816" xlink:to="us-gaap_DeferredStateAndLocalIncomeTaxExpenseBenefit_638126891323296816" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredIncomeTaxExpenseBenefit" xlink:label="us-gaap_DeferredIncomeTaxExpenseBenefit_638126891323296816" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DeferredIncomeTaxExpenseBenefitContinuingOperationsAbstract_638126891323296816" xlink:to="us-gaap_DeferredIncomeTaxExpenseBenefit_638126891323296816" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeTaxExpenseBenefit" xlink:label="us-gaap_IncomeTaxExpenseBenefit_638126891323296816" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DeferredIncomeTaxExpenseBenefitContinuingOperationsAbstract_638126891323296816" xlink:to="us-gaap_IncomeTaxExpenseBenefit_638126891323296816" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" priority="4" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureIncomeTaxesReconciliationToStatutoryTaxExpenseDetails" xlink:type="extended" xlink:title="41503 - Disclosure - Income Taxes - Reconciliation to Statutory Tax Expense (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeTaxDisclosureAbstract" xlink:label="us-gaap_IncomeTaxDisclosureAbstract_636077277926275381" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate" xlink:label="us-gaap_IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate_638126891323296816" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxDisclosureAbstract_636077277926275381" xlink:to="us-gaap_IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate_638126891323296816" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeTaxReconciliationStateAndLocalIncomeTaxes" xlink:label="us-gaap_IncomeTaxReconciliationStateAndLocalIncomeTaxes_638126891323306822" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxDisclosureAbstract_636077277926275381" xlink:to="us-gaap_IncomeTaxReconciliationStateAndLocalIncomeTaxes_638126891323306822" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeTaxReconciliationForeignIncomeTaxRateDifferential" xlink:label="us-gaap_IncomeTaxReconciliationForeignIncomeTaxRateDifferential_638126891323306822" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxDisclosureAbstract_636077277926275381" xlink:to="us-gaap_IncomeTaxReconciliationForeignIncomeTaxRateDifferential_638126891323306822" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeTaxReconciliationTaxCreditsResearch" xlink:label="us-gaap_IncomeTaxReconciliationTaxCreditsResearch_638126891323306822" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxDisclosureAbstract_636077277926275381" xlink:to="us-gaap_IncomeTaxReconciliationTaxCreditsResearch_638126891323306822" order="4" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance" xlink:label="us-gaap_IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance_638126891323306822" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxDisclosureAbstract_636077277926275381" xlink:to="us-gaap_IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance_638126891323306822" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_IncomeTaxReconciliationChangeInAccrualForUnrecognizedTaxBenefits" xlink:label="veco_IncomeTaxReconciliationChangeInAccrualForUnrecognizedTaxBenefits_638126891323306822" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxDisclosureAbstract_636077277926275381" xlink:to="veco_IncomeTaxReconciliationChangeInAccrualForUnrecognizedTaxBenefits_638126891323306822" order="6" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost" xlink:label="us-gaap_IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost_638126891323306822" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxDisclosureAbstract_636077277926275381" xlink:to="us-gaap_IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost_638126891323306822" order="7" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeTaxReconciliationNondeductibleExpenseImpairmentLosses" xlink:label="us-gaap_IncomeTaxReconciliationNondeductibleExpenseImpairmentLosses_638126891323306822" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxDisclosureAbstract_636077277926275381" xlink:to="us-gaap_IncomeTaxReconciliationNondeductibleExpenseImpairmentLosses_638126891323306822" order="8" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_EffectiveIncomeTaxRateReconciliationPartialExtinguishmentOfDebtAmount" xlink:label="veco_EffectiveIncomeTaxRateReconciliationPartialExtinguishmentOfDebtAmount_638126891323306822" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxDisclosureAbstract_636077277926275381" xlink:to="veco_EffectiveIncomeTaxRateReconciliationPartialExtinguishmentOfDebtAmount_638126891323306822" order="9" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeTaxEffectsAllocatedDirectlyToEquityCumulativeEffectOfChangeInAccountingPrinciple" xlink:label="us-gaap_IncomeTaxEffectsAllocatedDirectlyToEquityCumulativeEffectOfChangeInAccountingPrinciple_638126891323306822" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxDisclosureAbstract_636077277926275381" xlink:to="us-gaap_IncomeTaxEffectsAllocatedDirectlyToEquityCumulativeEffectOfChangeInAccountingPrinciple_638126891323306822" order="10" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeTaxReconciliationOtherAdjustments" xlink:label="us-gaap_IncomeTaxReconciliationOtherAdjustments_638126891323306822" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxDisclosureAbstract_636077277926275381" xlink:to="us-gaap_IncomeTaxReconciliationOtherAdjustments_638126891323306822" order="11" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeTaxExpenseBenefit" xlink:label="us-gaap_IncomeTaxExpenseBenefit_638126891323306822" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxDisclosureAbstract_636077277926275381" xlink:to="us-gaap_IncomeTaxExpenseBenefit_638126891323306822" order="12" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureIncomeTaxesDeferredTaxesDetails" xlink:type="extended" xlink:title="41504 - Disclosure - Income Taxes - Deferred Taxes (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeTaxDisclosureAbstract" xlink:label="us-gaap_IncomeTaxDisclosureAbstract_636106773953116890" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ComponentsOfDeferredTaxAssetsAndLiabilitiesAbstract" xlink:label="us-gaap_ComponentsOfDeferredTaxAssetsAndLiabilitiesAbstract_638126891323316814" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxDisclosureAbstract_636106773953116890" xlink:to="us-gaap_ComponentsOfDeferredTaxAssetsAndLiabilitiesAbstract_638126891323316814" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ComponentsOfDeferredTaxAssetsAbstract" xlink:label="us-gaap_ComponentsOfDeferredTaxAssetsAbstract_638126891323316814" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ComponentsOfDeferredTaxAssetsAndLiabilitiesAbstract_638126891323316814" xlink:to="us-gaap_ComponentsOfDeferredTaxAssetsAbstract_638126891323316814" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredTaxAssetsInventory" xlink:label="us-gaap_DeferredTaxAssetsInventory_638126891323316814" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ComponentsOfDeferredTaxAssetsAbstract_638126891323316814" xlink:to="us-gaap_DeferredTaxAssetsInventory_638126891323316814" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredTaxAssetsOperatingLossCarryforwards" xlink:label="us-gaap_DeferredTaxAssetsOperatingLossCarryforwards_638126891323316814" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ComponentsOfDeferredTaxAssetsAbstract_638126891323316814" xlink:to="us-gaap_DeferredTaxAssetsOperatingLossCarryforwards_638126891323316814" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredTaxAssetsTaxCreditCarryforwards" xlink:label="us-gaap_DeferredTaxAssetsTaxCreditCarryforwards_638126891323316814" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ComponentsOfDeferredTaxAssetsAbstract_638126891323316814" xlink:to="us-gaap_DeferredTaxAssetsTaxCreditCarryforwards_638126891323316814" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="3" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReserves" xlink:label="us-gaap_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReserves_638126891323316814" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ComponentsOfDeferredTaxAssetsAbstract_638126891323316814" xlink:to="us-gaap_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReserves_638126891323316814" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost" xlink:label="us-gaap_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost_638126891323316814" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ComponentsOfDeferredTaxAssetsAbstract_638126891323316814" xlink:to="us-gaap_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost_638126891323316814" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredTaxAssetsDeferredIncome" xlink:label="us-gaap_DeferredTaxAssetsDeferredIncome_638126891323316814" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ComponentsOfDeferredTaxAssetsAbstract_638126891323316814" xlink:to="us-gaap_DeferredTaxAssetsDeferredIncome_638126891323316814" order="6" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_DeferredTaxAssetsOperatingLeases" xlink:label="veco_DeferredTaxAssetsOperatingLeases_638126891323316814" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ComponentsOfDeferredTaxAssetsAbstract_638126891323316814" xlink:to="veco_DeferredTaxAssetsOperatingLeases_638126891323316814" order="7" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredTaxAssetsInProcessResearchAndDevelopment" xlink:label="us-gaap_DeferredTaxAssetsInProcessResearchAndDevelopment_638126891323326823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ComponentsOfDeferredTaxAssetsAbstract_638126891323316814" xlink:to="us-gaap_DeferredTaxAssetsInProcessResearchAndDevelopment_638126891323326823" order="8" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredTaxAssetsOther" xlink:label="us-gaap_DeferredTaxAssetsOther_638126891323326823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ComponentsOfDeferredTaxAssetsAbstract_638126891323316814" xlink:to="us-gaap_DeferredTaxAssetsOther_638126891323326823" order="9" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredTaxAssetsGross" xlink:label="us-gaap_DeferredTaxAssetsGross_638126891323326823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ComponentsOfDeferredTaxAssetsAbstract_638126891323316814" xlink:to="us-gaap_DeferredTaxAssetsGross_638126891323326823" order="10" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredTaxAssetsValuationAllowance" xlink:label="us-gaap_DeferredTaxAssetsValuationAllowance_638126891323326823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ComponentsOfDeferredTaxAssetsAbstract_638126891323316814" xlink:to="us-gaap_DeferredTaxAssetsValuationAllowance_638126891323326823" order="11" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredTaxAssetsNet" xlink:label="us-gaap_DeferredTaxAssetsNet_638126891323326823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ComponentsOfDeferredTaxAssetsAbstract_638126891323316814" xlink:to="us-gaap_DeferredTaxAssetsNet_638126891323326823" order="12" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ComponentsOfDeferredTaxLiabilitiesAbstract" xlink:label="us-gaap_ComponentsOfDeferredTaxLiabilitiesAbstract_638126891323326823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ComponentsOfDeferredTaxAssetsAndLiabilitiesAbstract_638126891323316814" xlink:to="us-gaap_ComponentsOfDeferredTaxLiabilitiesAbstract_638126891323326823" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredTaxLiabilitiesGoodwillAndIntangibleAssetsIntangibleAssets" xlink:label="us-gaap_DeferredTaxLiabilitiesGoodwillAndIntangibleAssetsIntangibleAssets_638126891323326823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ComponentsOfDeferredTaxLiabilitiesAbstract_638126891323326823" xlink:to="us-gaap_DeferredTaxLiabilitiesGoodwillAndIntangibleAssetsIntangibleAssets_638126891323326823" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_DeferredTaxLiabilitiesFinancingArrangementsNet" xlink:label="veco_DeferredTaxLiabilitiesFinancingArrangementsNet_638126891323326823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ComponentsOfDeferredTaxLiabilitiesAbstract_638126891323326823" xlink:to="veco_DeferredTaxLiabilitiesFinancingArrangementsNet_638126891323326823" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredTaxLiabilitiesLeasingArrangements" xlink:label="us-gaap_DeferredTaxLiabilitiesLeasingArrangements_638126891323336836" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ComponentsOfDeferredTaxLiabilitiesAbstract_638126891323326823" xlink:to="us-gaap_DeferredTaxLiabilitiesLeasingArrangements_638126891323336836" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredTaxLiabilitiesPropertyPlantAndEquipment" xlink:label="us-gaap_DeferredTaxLiabilitiesPropertyPlantAndEquipment_638126891323336836" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ComponentsOfDeferredTaxLiabilitiesAbstract_638126891323326823" xlink:to="us-gaap_DeferredTaxLiabilitiesPropertyPlantAndEquipment_638126891323336836" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredIncomeTaxLiabilities" xlink:label="us-gaap_DeferredIncomeTaxLiabilities_638126891323336836" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ComponentsOfDeferredTaxLiabilitiesAbstract_638126891323326823" xlink:to="us-gaap_DeferredIncomeTaxLiabilities_638126891323336836" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredTaxAssetsLiabilitiesNet" xlink:label="us-gaap_DeferredTaxAssetsLiabilitiesNet_638126891323336836" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ComponentsOfDeferredTaxLiabilitiesAbstract_638126891323326823" xlink:to="us-gaap_DeferredTaxAssetsLiabilitiesNet_638126891323336836" order="6" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredTaxLiabilities" xlink:label="us-gaap_DeferredTaxLiabilities_638126891323336836" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ComponentsOfDeferredTaxLiabilitiesAbstract_638126891323326823" xlink:to="us-gaap_DeferredTaxLiabilities_638126891323336836" order="7" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedTotalLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredTaxLiabilitiesUndistributedForeignEarnings" xlink:label="us-gaap_DeferredTaxLiabilitiesUndistributedForeignEarnings_638126891323336836" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ComponentsOfDeferredTaxAssetsAndLiabilitiesAbstract_638126891323316814" xlink:to="us-gaap_DeferredTaxLiabilitiesUndistributedForeignEarnings_638126891323336836" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ValuationAllowanceAbstract" xlink:label="us-gaap_ValuationAllowanceAbstract_638126891323336836" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ComponentsOfDeferredTaxAssetsAndLiabilitiesAbstract_638126891323316814" xlink:to="us-gaap_ValuationAllowanceAbstract_638126891323336836" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ValuationAllowanceDeferredTaxAssetChangeInAmount" xlink:label="us-gaap_ValuationAllowanceDeferredTaxAssetChangeInAmount_638126891323336836" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ValuationAllowanceAbstract_638126891323336836" xlink:to="us-gaap_ValuationAllowanceDeferredTaxAssetChangeInAmount_638126891323336836" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureIncomeTaxesOperatingLossCarryforwardsDetails" xlink:type="extended" xlink:title="41505 - Disclosure - Income Taxes - Operating Loss Carryforwards (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeTaxDisclosureAbstract" xlink:label="us-gaap_IncomeTaxDisclosureAbstract_636088453732693457" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OperatingLossCarryforwardsTable" xlink:label="us-gaap_OperatingLossCarryforwardsTable_638126891323346825" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxDisclosureAbstract_636088453732693457" xlink:to="us-gaap_OperatingLossCarryforwardsTable_638126891323346825" order="1" use="optional" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeTaxAuthorityAxis" xlink:label="us-gaap_IncomeTaxAuthorityAxis_638126891323346825" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OperatingLossCarryforwardsTable_638126891323346825" xlink:to="us-gaap_IncomeTaxAuthorityAxis_638126891323346825" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeTaxAuthorityDomain" xlink:label="us-gaap_IncomeTaxAuthorityDomain_638126891323346825" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxAuthorityAxis_638126891323346825" xlink:to="us-gaap_IncomeTaxAuthorityDomain_638126891323346825" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_StateAndLocalJurisdictionMember" xlink:label="us-gaap_StateAndLocalJurisdictionMember_638126891323346825" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxAuthorityDomain_638126891323346825" xlink:to="us-gaap_StateAndLocalJurisdictionMember_638126891323346825" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OperatingLossCarryforwardsLineItems" xlink:label="us-gaap_OperatingLossCarryforwardsLineItems_638126891323346825" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OperatingLossCarryforwardsTable_638126891323346825" xlink:to="us-gaap_OperatingLossCarryforwardsLineItems_638126891323346825" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_OperatingLossCarryforwards" xlink:label="us-gaap_OperatingLossCarryforwards_638126891323346825" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OperatingLossCarryforwardsLineItems_638126891323346825" xlink:to="us-gaap_OperatingLossCarryforwards_638126891323346825" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DeferredTaxAssetsOperatingLossCarryforwards" xlink:label="us-gaap_DeferredTaxAssetsOperatingLossCarryforwards_638126891323346825" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OperatingLossCarryforwardsLineItems_638126891323346825" xlink:to="us-gaap_DeferredTaxAssetsOperatingLossCarryforwards_638126891323346825" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="4" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureIncomeTaxesTaxCreditCarryforwardsDetails" xlink:type="extended" xlink:title="41506 - Disclosure - Income Taxes - Tax Credit Carryforwards (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeTaxDisclosureAbstract" xlink:label="us-gaap_IncomeTaxDisclosureAbstract_636800315884899590" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_TaxCreditCarryforwardTable" xlink:label="us-gaap_TaxCreditCarryforwardTable_638126891323356815" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxDisclosureAbstract_636800315884899590" xlink:to="us-gaap_TaxCreditCarryforwardTable_638126891323356815" order="1" use="optional" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeTaxAuthorityAxis" xlink:label="us-gaap_IncomeTaxAuthorityAxis_638126891323356815" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_TaxCreditCarryforwardTable_638126891323356815" xlink:to="us-gaap_IncomeTaxAuthorityAxis_638126891323356815" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeTaxAuthorityDomain" xlink:label="us-gaap_IncomeTaxAuthorityDomain_638126891323356815" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxAuthorityAxis_638126891323356815" xlink:to="us-gaap_IncomeTaxAuthorityDomain_638126891323356815" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_DomesticCountryMember" xlink:label="us-gaap_DomesticCountryMember_638126891323356815" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxAuthorityDomain_638126891323356815" xlink:to="us-gaap_DomesticCountryMember_638126891323356815" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_StateAndLocalJurisdictionMember" xlink:label="us-gaap_StateAndLocalJurisdictionMember_638126891323356815" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxAuthorityDomain_638126891323356815" xlink:to="us-gaap_StateAndLocalJurisdictionMember_638126891323356815" order="2" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ForeignCountryMember" xlink:label="us-gaap_ForeignCountryMember_638126891323356815" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxAuthorityDomain_638126891323356815" xlink:to="us-gaap_ForeignCountryMember_638126891323356815" order="3" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_TaxCreditCarryforwardAxis" xlink:label="us-gaap_TaxCreditCarryforwardAxis_638126891323356815" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_TaxCreditCarryforwardTable_638126891323356815" xlink:to="us-gaap_TaxCreditCarryforwardAxis_638126891323356815" order="2" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_TaxCreditCarryforwardNameDomain" xlink:label="us-gaap_TaxCreditCarryforwardNameDomain_638126891323356815" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_TaxCreditCarryforwardAxis_638126891323356815" xlink:to="us-gaap_TaxCreditCarryforwardNameDomain_638126891323356815" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ResearchMember" xlink:label="us-gaap_ResearchMember_638126891323356815" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_TaxCreditCarryforwardNameDomain_638126891323356815" xlink:to="us-gaap_ResearchMember_638126891323356815" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_TaxCreditCarryforwardLineItems" xlink:label="us-gaap_TaxCreditCarryforwardLineItems_638126891323366840" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_TaxCreditCarryforwardTable_638126891323356815" xlink:to="us-gaap_TaxCreditCarryforwardLineItems_638126891323366840" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="6" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_TaxCreditCarryforwardAmount" xlink:label="us-gaap_TaxCreditCarryforwardAmount_638126891323366840" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_TaxCreditCarryforwardLineItems_638126891323366840" xlink:to="us-gaap_TaxCreditCarryforwardAmount_638126891323366840" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureIncomeTaxesUncertainTaxPositionsDetails" xlink:type="extended" xlink:title="41507 - Disclosure - Income Taxes - Uncertain Tax Positions (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_IncomeTaxDisclosureAbstract" xlink:label="us-gaap_IncomeTaxDisclosureAbstract_636077277926275381" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ReconciliationOfUnrecognizedTaxBenefitsExcludingAmountsPertainingToExaminedTaxReturnsRollForward" xlink:label="us-gaap_ReconciliationOfUnrecognizedTaxBenefitsExcludingAmountsPertainingToExaminedTaxReturnsRollForward_638126891323366840" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxDisclosureAbstract_636077277926275381" xlink:to="us-gaap_ReconciliationOfUnrecognizedTaxBenefitsExcludingAmountsPertainingToExaminedTaxReturnsRollForward_638126891323366840" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_UnrecognizedTaxBenefits" xlink:label="us-gaap_UnrecognizedTaxBenefits_638126891323366840" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ReconciliationOfUnrecognizedTaxBenefitsExcludingAmountsPertainingToExaminedTaxReturnsRollForward_638126891323366840" xlink:to="us-gaap_UnrecognizedTaxBenefits_638126891323366840" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodStartLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromCurrentPeriodTaxPositions" xlink:label="us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromCurrentPeriodTaxPositions_638126891323366840" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ReconciliationOfUnrecognizedTaxBenefitsExcludingAmountsPertainingToExaminedTaxReturnsRollForward_638126891323366840" xlink:to="us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromCurrentPeriodTaxPositions_638126891323366840" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromPriorPeriodTaxPositions" xlink:label="us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromPriorPeriodTaxPositions_638126891323366840" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ReconciliationOfUnrecognizedTaxBenefitsExcludingAmountsPertainingToExaminedTaxReturnsRollForward_638126891323366840" xlink:to="us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromPriorPeriodTaxPositions_638126891323366840" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_UnrecognizedTaxBenefitsDecreasesResultingFromPriorPeriodTaxPositions" xlink:label="us-gaap_UnrecognizedTaxBenefitsDecreasesResultingFromPriorPeriodTaxPositions_638126891323366840" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ReconciliationOfUnrecognizedTaxBenefitsExcludingAmountsPertainingToExaminedTaxReturnsRollForward_638126891323366840" xlink:to="us-gaap_UnrecognizedTaxBenefitsDecreasesResultingFromPriorPeriodTaxPositions_638126891323366840" order="4" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_UnrecognizedTaxBenefitsDecreasesResultingFromSettlementsWithTaxingAuthorities" xlink:label="us-gaap_UnrecognizedTaxBenefitsDecreasesResultingFromSettlementsWithTaxingAuthorities_638126891323376823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ReconciliationOfUnrecognizedTaxBenefitsExcludingAmountsPertainingToExaminedTaxReturnsRollForward_638126891323366840" xlink:to="us-gaap_UnrecognizedTaxBenefitsDecreasesResultingFromSettlementsWithTaxingAuthorities_638126891323376823" order="5" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_UnrecognizedTaxBenefits" xlink:label="us-gaap_UnrecognizedTaxBenefits_638126891323376823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ReconciliationOfUnrecognizedTaxBenefitsExcludingAmountsPertainingToExaminedTaxReturnsRollForward_638126891323366840" xlink:to="us-gaap_UnrecognizedTaxBenefits_638126891323376823" order="6" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_UnrecognizedTaxBenefitsThatWouldImpactEffectiveTaxRate" xlink:label="us-gaap_UnrecognizedTaxBenefitsThatWouldImpactEffectiveTaxRate_638126891323376823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ReconciliationOfUnrecognizedTaxBenefitsExcludingAmountsPertainingToExaminedTaxReturnsRollForward_638126891323366840" xlink:to="us-gaap_UnrecognizedTaxBenefitsThatWouldImpactEffectiveTaxRate_638126891323376823" order="7" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued" xlink:label="us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued_638126891323376823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ReconciliationOfUnrecognizedTaxBenefitsExcludingAmountsPertainingToExaminedTaxReturnsRollForward_638126891323366840" xlink:to="us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued_638126891323376823" order="8" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformationSegmentDetails" xlink:type="extended" xlink:title="41601 - Disclosure - Segment Reporting and Geographic Information - Segment (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SegmentReportingAbstract" xlink:label="us-gaap_SegmentReportingAbstract_636106583331962489" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" xlink:label="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_638126891323376823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingAbstract_636106583331962489" xlink:to="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_638126891323376823" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_ProductOrServiceAxis" xlink:label="srt_ProductOrServiceAxis_638126891323376823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_638126891323376823" xlink:to="srt_ProductOrServiceAxis_638126891323376823" order="1" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_ProductsAndServicesDomain" xlink:label="srt_ProductsAndServicesDomain_638126891323376823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_ProductOrServiceAxis_638126891323376823" xlink:to="srt_ProductsAndServicesDomain_638126891323376823" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_SemiconductorMember" xlink:label="veco_SemiconductorMember_638126891323376823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_ProductsAndServicesDomain_638126891323376823" xlink:to="veco_SemiconductorMember_638126891323376823" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_CompoundSemiconductorMember" xlink:label="veco_CompoundSemiconductorMember_638126891323386818" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_ProductsAndServicesDomain_638126891323376823" xlink:to="veco_CompoundSemiconductorMember_638126891323386818" order="2" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_DataStorageMember" xlink:label="veco_DataStorageMember_638126891323386818" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_ProductsAndServicesDomain_638126891323376823" xlink:to="veco_DataStorageMember_638126891323386818" order="3" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_ScientificAndOtherMember" xlink:label="veco_ScientificAndOtherMember_638126891323386818" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_ProductsAndServicesDomain_638126891323376823" xlink:to="veco_ScientificAndOtherMember_638126891323386818" order="4" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SegmentReportingInformationLineItems" xlink:label="us-gaap_SegmentReportingInformationLineItems_638126891323386818" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_638126891323376823" xlink:to="us-gaap_SegmentReportingInformationLineItems_638126891323386818" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_NumberOfOperatingSegments" xlink:label="us-gaap_NumberOfOperatingSegments_638126891323386818" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingInformationLineItems_638126891323386818" xlink:to="us-gaap_NumberOfOperatingSegments_638126891323386818" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_NumberOfReportableSegments" xlink:label="us-gaap_NumberOfReportableSegments_638126891323386818" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingInformationLineItems_638126891323386818" xlink:to="us-gaap_NumberOfReportableSegments_638126891323386818" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_RevenueFromContractWithCustomerIncludingAssessedTax" xlink:label="us-gaap_RevenueFromContractWithCustomerIncludingAssessedTax_638126891323386818" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingInformationLineItems_638126891323386818" xlink:to="us-gaap_RevenueFromContractWithCustomerIncludingAssessedTax_638126891323386818" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformationGeographicDetails" xlink:type="extended" xlink:title="41602 - Disclosure - Segment Reporting and Geographic Information - Geographic (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SegmentReportingAbstract" xlink:label="us-gaap_SegmentReportingAbstract_636850753323397697" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" xlink:label="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_638126891323386818" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingAbstract_636850753323397697" xlink:to="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_638126891323386818" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_StatementGeographicalAxis" xlink:label="srt_StatementGeographicalAxis_638126891323396824" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_638126891323386818" xlink:to="srt_StatementGeographicalAxis_638126891323396824" order="1" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_SegmentGeographicalDomain" xlink:label="srt_SegmentGeographicalDomain_638126891323396824" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_StatementGeographicalAxis_638126891323396824" xlink:to="srt_SegmentGeographicalDomain_638126891323396824" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/country/2022/country-2022.xsd#country_US" xlink:label="country_US_638126891323396824" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_SegmentGeographicalDomain_638126891323396824" xlink:to="country_US_638126891323396824" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_EMEAMember" xlink:label="us-gaap_EMEAMember_638126891323396824" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_SegmentGeographicalDomain_638126891323396824" xlink:to="us-gaap_EMEAMember_638126891323396824" order="2" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/country/2022/country-2022.xsd#country_CN" xlink:label="country_CN_638126891323396824" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_SegmentGeographicalDomain_638126891323396824" xlink:to="country_CN_638126891323396824" order="3" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_AsiaPacificExcludingChinaMember" xlink:label="veco_AsiaPacificExcludingChinaMember_638126891323396824" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_SegmentGeographicalDomain_638126891323396824" xlink:to="veco_AsiaPacificExcludingChinaMember_638126891323396824" order="4" use="optional" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_RestOfWorldMember" xlink:label="veco_RestOfWorldMember_638126891323396824" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_SegmentGeographicalDomain_638126891323396824" xlink:to="veco_RestOfWorldMember_638126891323396824" order="5" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SegmentReportingInformationLineItems" xlink:label="us-gaap_SegmentReportingInformationLineItems_638126891323396824" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_638126891323386818" xlink:to="us-gaap_SegmentReportingInformationLineItems_638126891323396824" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_RevenueFromContractWithCustomerIncludingAssessedTax" xlink:label="us-gaap_RevenueFromContractWithCustomerIncludingAssessedTax_638126891323396824" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingInformationLineItems_638126891323396824" xlink:to="us-gaap_RevenueFromContractWithCustomerIncludingAssessedTax_638126891323396824" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PropertyPlantAndEquipmentNet" xlink:label="us-gaap_PropertyPlantAndEquipmentNet_638126891323396824" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingInformationLineItems_638126891323396824" xlink:to="us-gaap_PropertyPlantAndEquipmentNet_638126891323396824" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="4" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureSubsequentEventsDetails" xlink:type="extended" xlink:title="41701 - Disclosure - Subsequent Events (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SubsequentEventsAbstract" xlink:label="us-gaap_SubsequentEventsAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SubsequentEventTable" xlink:label="us-gaap_SubsequentEventTable_638126891323406817" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SubsequentEventsAbstract" xlink:to="us-gaap_SubsequentEventTable_638126891323406817" order="1" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SubsequentEventTypeAxis" xlink:label="us-gaap_SubsequentEventTypeAxis_638126891323406817" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SubsequentEventTable_638126891323406817" xlink:to="us-gaap_SubsequentEventTypeAxis_638126891323406817" order="1" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SubsequentEventTypeDomain" xlink:label="us-gaap_SubsequentEventTypeDomain_638126891323406817" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SubsequentEventTypeAxis_638126891323406817" xlink:to="us-gaap_SubsequentEventTypeDomain_638126891323406817" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SubsequentEventMember" xlink:label="us-gaap_SubsequentEventMember_638126891323406817" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SubsequentEventTypeDomain_638126891323406817" xlink:to="us-gaap_SubsequentEventMember_638126891323406817" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_BusinessAcquisitionAxis" xlink:label="us-gaap_BusinessAcquisitionAxis_638126891323406817" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SubsequentEventTable_638126891323406817" xlink:to="us-gaap_BusinessAcquisitionAxis_638126891323406817" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_BusinessAcquisitionAcquireeDomain" xlink:label="us-gaap_BusinessAcquisitionAcquireeDomain_638126891323406817" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_BusinessAcquisitionAxis_638126891323406817" xlink:to="us-gaap_BusinessAcquisitionAcquireeDomain_638126891323406817" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_EpiluvacAbMember" xlink:label="veco_EpiluvacAbMember_638126891323406817" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_BusinessAcquisitionAcquireeDomain_638126891323406817" xlink:to="veco_EpiluvacAbMember_638126891323406817" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_LegalEntityAxis" xlink:label="dei_LegalEntityAxis_638126891323406817" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SubsequentEventTable_638126891323406817" xlink:to="dei_LegalEntityAxis_638126891323406817" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_EntityDomain" xlink:label="dei_EntityDomain_638126891323406817" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_LegalEntityAxis_638126891323406817" xlink:to="dei_EntityDomain_638126891323406817" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label" />
    <loc xlink:type="locator" xlink:href="veco-20221231.xsd#veco_EpiluvacAbMember" xlink:label="veco_EpiluvacAbMember_638126891323416823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_EntityDomain_638126891323406817" xlink:to="veco_EpiluvacAbMember_638126891323416823" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SubsequentEventLineItems" xlink:label="us-gaap_SubsequentEventLineItems_638126891323416823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SubsequentEventTable_638126891323406817" xlink:to="us-gaap_SubsequentEventLineItems_638126891323416823" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2022/dei-2022.xsd#dei_EntityNumberOfEmployees" xlink:label="dei_EntityNumberOfEmployees_638126891323416823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SubsequentEventLineItems_638126891323416823" xlink:to="dei_EntityNumberOfEmployees_638126891323416823" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_PaymentsToAcquireBusinessesGross" xlink:label="us-gaap_PaymentsToAcquireBusinessesGross_638126891323416823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SubsequentEventLineItems_638126891323416823" xlink:to="us-gaap_PaymentsToAcquireBusinessesGross_638126891323416823" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_BusinessCombinationContingentConsiderationArrangementsRangeOfOutcomesValueHigh" xlink:label="us-gaap_BusinessCombinationContingentConsiderationArrangementsRangeOfOutcomesValueHigh_638126891323416823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SubsequentEventLineItems_638126891323416823" xlink:to="us-gaap_BusinessCombinationContingentConsiderationArrangementsRangeOfOutcomesValueHigh_638126891323416823" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
  </presentationLink>
  <presentationLink xlink:role="http://www.veeco.com/role/DisclosureScheduleIiValuationAndQualifyingAccountsDetails" xlink:type="extended" xlink:title="41801 - Disclosure - Schedule II - Valuation and Qualifying Accounts (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_ValuationAndQualifyingAccountsAbstract" xlink:label="srt_ValuationAndQualifyingAccountsAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_ValuationAndQualifyingAccountsDisclosureTable" xlink:label="srt_ValuationAndQualifyingAccountsDisclosureTable_638126891323416823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_ValuationAndQualifyingAccountsAbstract" xlink:to="srt_ValuationAndQualifyingAccountsDisclosureTable_638126891323416823" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ValuationAllowancesAndReservesTypeAxis" xlink:label="us-gaap_ValuationAllowancesAndReservesTypeAxis_638126891323416823" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_ValuationAndQualifyingAccountsDisclosureTable_638126891323416823" xlink:to="us-gaap_ValuationAllowancesAndReservesTypeAxis_638126891323416823" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ValuationAllowancesAndReservesDomain" xlink:label="us-gaap_ValuationAllowancesAndReservesDomain_638126891323426819" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ValuationAllowancesAndReservesTypeAxis_638126891323416823" xlink:to="us-gaap_ValuationAllowancesAndReservesDomain_638126891323426819" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_AllowanceForCreditLossMember" xlink:label="us-gaap_AllowanceForCreditLossMember_638126891323426819" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ValuationAllowancesAndReservesDomain_638126891323426819" xlink:to="us-gaap_AllowanceForCreditLossMember_638126891323426819" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember" xlink:label="us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_638126891323426819" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ValuationAllowancesAndReservesDomain_638126891323426819" xlink:to="us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_638126891323426819" order="2" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_ValuationAndQualifyingAccountsDisclosureLineItems" xlink:label="srt_ValuationAndQualifyingAccountsDisclosureLineItems_638126891323426819" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_ValuationAndQualifyingAccountsDisclosureTable_638126891323416823" xlink:to="srt_ValuationAndQualifyingAccountsDisclosureLineItems_638126891323426819" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ValuationAllowancesAndReservesBalance" xlink:label="us-gaap_ValuationAllowancesAndReservesBalance_638126891323426819" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_ValuationAndQualifyingAccountsDisclosureLineItems_638126891323426819" xlink:to="us-gaap_ValuationAllowancesAndReservesBalance_638126891323426819" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodStartLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ValuationAllowancesAndReservesChargedToCostAndExpense" xlink:label="us-gaap_ValuationAllowancesAndReservesChargedToCostAndExpense_638126891323426819" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_ValuationAndQualifyingAccountsDisclosureLineItems_638126891323426819" xlink:to="us-gaap_ValuationAllowancesAndReservesChargedToCostAndExpense_638126891323426819" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ValuationAllowancesAndReservesDeductions" xlink:label="us-gaap_ValuationAllowancesAndReservesDeductions_638126891323426819" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_ValuationAndQualifyingAccountsDisclosureLineItems_638126891323426819" xlink:to="us-gaap_ValuationAllowancesAndReservesDeductions_638126891323426819" order="3" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ValuationAllowancesAndReservesBalance" xlink:label="us-gaap_ValuationAllowancesAndReservesBalance_6381268913234268191" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_ValuationAndQualifyingAccountsDisclosureLineItems_638126891323426819" xlink:to="us-gaap_ValuationAllowancesAndReservesBalance_6381268913234268191" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel" />
  </presentationLink>
</link:linkbase>
</XBRL>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>14
<FILENAME>R1.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575600414032">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Document and Entity Information - USD ($)<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
<th class="th" colspan="1"></th>
<th class="th" colspan="1"></th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Feb. 13, 2023</div></th>
<th class="th"><div>Jul. 01, 2022</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_CoverAbstract', window );"><strong>Cover [Abstract]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_DocumentType', window );">Document Type</a></td>
<td class="text">10-K<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_DocumentAnnualReport', window );">Document Annual Report</a></td>
<td class="text">true<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_DocumentPeriodEndDate', window );">Document Period End Date</a></td>
<td class="text">Dec. 31,  2022<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_DocumentTransitionReport', window );">Document Transition Report</a></td>
<td class="text">false<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_EntityFileNumber', window );">Entity File Number</a></td>
<td class="text">0-16244<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_EntityRegistrantName', window );">Entity Registrant Name</a></td>
<td class="text">VEECO INSTRUMENTS&#160;INC<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_EntityIncorporationStateCountryCode', window );">Entity Incorporation, State or Country Code</a></td>
<td class="text">DE<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_EntityTaxIdentificationNumber', window );">Entity Tax Identification Number</a></td>
<td class="text">11-2989601<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_EntityAddressAddressLine1', window );">Entity Address, Address Line One</a></td>
<td class="text">Terminal Drive<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_EntityAddressCityOrTown', window );">Entity Address, City or Town</a></td>
<td class="text">Plainview<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_EntityAddressStateOrProvince', window );">Entity Address, State or Province</a></td>
<td class="text">NY<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_EntityAddressPostalZipCode', window );">Entity Address, Postal Zip Code</a></td>
<td class="text">11803<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_CityAreaCode', window );">City Area Code</a></td>
<td class="text">516<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_LocalPhoneNumber', window );">Local Phone Number</a></td>
<td class="text">677-0200<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_Security12bTitle', window );">Title of 12(b) Security</a></td>
<td class="text">Common Stock<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_TradingSymbol', window );">Trading Symbol</a></td>
<td class="text">VECO<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_SecurityExchangeName', window );">Security Exchange Name</a></td>
<td class="text">NASDAQ<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_EntityWellKnownSeasonedIssuer', window );">Entity Well-known Seasoned Issuer</a></td>
<td class="text">Yes<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_EntityVoluntaryFilers', window );">Entity Voluntary Filers</a></td>
<td class="text">No<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_EntityCurrentReportingStatus', window );">Entity Current Reporting Status</a></td>
<td class="text">Yes<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_EntityInteractiveDataCurrent', window );">Entity Interactive Data Current</a></td>
<td class="text">Yes<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_EntityFilerCategory', window );">Entity Filer Category</a></td>
<td class="text">Large Accelerated Filer<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_EntitySmallBusiness', window );">Entity Small Business</a></td>
<td class="text">false<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_EntityEmergingGrowthCompany', window );">Entity Emerging Growth Company</a></td>
<td class="text">false<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_EntityShellCompany', window );">Entity Shell Company</a></td>
<td class="text">false<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_IcfrAuditorAttestationFlag', window );">ICFR Auditor Attestation Flag</a></td>
<td class="text">true<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_EntityPublicFloat', window );">Entity Public Float</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 906,413,355<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_EntityCommonStockSharesOutstanding', window );">Entity Common Stock, Shares Outstanding</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">51,661,429<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_AuditorName', window );">Auditor Name</a></td>
<td class="text">KPMG LLP<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_AuditorFirmId', window );">Auditor Firm ID</a></td>
<td class="text">185<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_AuditorLocation', window );">Auditor Location</a></td>
<td class="text">Santa Clara, California<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_EntityCentralIndexKey', window );">Entity Central Index Key</a></td>
<td class="text">0000103145<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_CurrentFiscalYearEndDate', window );">Current Fiscal Year End Date</a></td>
<td class="text">--12-31<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_DocumentFiscalYearFocus', window );">Document Fiscal Year Focus</a></td>
<td class="text">2022<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_DocumentFiscalPeriodFocus', window );">Document Fiscal Period Focus</a></td>
<td class="text">FY<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_AmendmentFlag', window );">Amendment Flag</a></td>
<td class="text">false<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_AmendmentFlag">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Boolean flag that is true when the XBRL content amends previously-filed or accepted submission.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_AmendmentFlag</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:booleanItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_AuditorFirmId">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>PCAOB issued Audit Firm Identifier</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Form 10-K<br> -Number 249<br> -Section 310<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Form 20-F<br> -Number 249<br> -Section 220<br> -Subsection f<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Form 40-F<br> -Number 249<br> -Section 240<br> -Subsection f<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_AuditorFirmId</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:nonemptySequenceNumberItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_AuditorLocation">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Form 10-K<br> -Number 249<br> -Section 310<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Form 20-F<br> -Number 249<br> -Section 220<br> -Subsection f<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Form 40-F<br> -Number 249<br> -Section 240<br> -Subsection f<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_AuditorLocation</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:internationalNameItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_AuditorName">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Form 10-K<br> -Number 249<br> -Section 310<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Form 20-F<br> -Number 249<br> -Section 220<br> -Subsection f<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Form 40-F<br> -Number 249<br> -Section 240<br> -Subsection f<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_AuditorName</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:internationalNameItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_CityAreaCode">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Area code of city</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_CityAreaCode</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:normalizedStringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_CoverAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Cover page.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_CoverAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_CurrentFiscalYearEndDate">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>End date of current fiscal year in the format --MM-DD.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_CurrentFiscalYearEndDate</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:gMonthDayItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_DocumentAnnualReport">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Boolean flag that is true only for a form used as an annual report.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Form 10-K<br> -Number 249<br> -Section 310<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Form 20-F<br> -Number 249<br> -Section 220<br> -Subsection f<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Form 40-F<br> -Number 249<br> -Section 240<br> -Subsection f<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_DocumentAnnualReport</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:booleanItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_DocumentFiscalPeriodFocus">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Fiscal period values are FY, Q1, Q2, and Q3.  1st, 2nd and 3rd quarter 10-Q or 10-QT statements have value Q1, Q2, and Q3 respectively, with 10-K, 10-KT or other fiscal year statements having FY.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_DocumentFiscalPeriodFocus</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:fiscalPeriodItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_DocumentFiscalYearFocus">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>This is focus fiscal year of the document report in YYYY format. For a 2006 annual report, which may also provide financial information from prior periods, fiscal 2006 should be given as the fiscal year focus. Example: 2006.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_DocumentFiscalYearFocus</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:gYearItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_DocumentPeriodEndDate">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>For the EDGAR submission types of Form 8-K: the date of the report, the date of the earliest event reported; for the EDGAR submission types of Form N-1A: the filing date; for all other submission types: the end of the reporting or transition period.  The format of the date is YYYY-MM-DD.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_DocumentPeriodEndDate</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:dateItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_DocumentTransitionReport">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Boolean flag that is true only for a form used as a transition report.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Forms 10-K, 10-Q, 20-F<br> -Number 240<br> -Section 13<br> -Subsection a-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_DocumentTransitionReport</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:booleanItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_DocumentType">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The type of document being provided (such as 10-K, 10-Q, 485BPOS, etc). The document type is limited to the same value as the supporting SEC submission type, or the word 'Other'.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_DocumentType</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:submissionTypeItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityAddressAddressLine1">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Address Line 1 such as Attn, Building Name, Street Name</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityAddressAddressLine1</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:normalizedStringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityAddressCityOrTown">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Name of the City or Town</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityAddressCityOrTown</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:normalizedStringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityAddressPostalZipCode">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Code for the postal or zip code</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityAddressPostalZipCode</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:normalizedStringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityAddressStateOrProvince">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Name of the state or province.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityAddressStateOrProvince</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:stateOrProvinceItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityCentralIndexKey">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>A unique 10-digit SEC-issued value to identify entities that have filed disclosures with the SEC. It is commonly abbreviated as CIK.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Exchange Act<br> -Number 240<br> -Section 12<br> -Subsection b-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityCentralIndexKey</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:centralIndexKeyItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityCommonStockSharesOutstanding">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Indicate number of shares or other units outstanding of each of registrant's classes of capital or common stock or other ownership interests, if and as stated on cover of related periodic report. Where multiple classes or units exist define each class/interest by adding class of stock items such as Common Class A [Member], Common Class B [Member] or Partnership Interest [Member] onto the Instrument [Domain] of the Entity Listings, Instrument.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityCommonStockSharesOutstanding</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityCurrentReportingStatus">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Indicate 'Yes' or 'No' whether registrants (1) have filed all reports required to be filed by Section 13 or 15(d) of the Securities Exchange Act of 1934 during the preceding 12 months (or for such shorter period that registrants were required to file such reports), and (2) have been subject to such filing requirements for the past 90 days. This information should be based on the registrant's current or most recent filing containing the related disclosure.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityCurrentReportingStatus</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:yesNoItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityEmergingGrowthCompany">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Indicate if registrant meets the emerging growth company criteria.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Exchange Act<br> -Number 240<br> -Section 12<br> -Subsection b-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityEmergingGrowthCompany</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:booleanItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityFileNumber">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Commission file number. The field allows up to 17 characters. The prefix may contain 1-3 digits, the sequence number may contain 1-8 digits, the optional suffix may contain 1-4 characters, and the fields are separated with a hyphen.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityFileNumber</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:fileNumberItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityFilerCategory">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Indicate whether the registrant is one of the following: Large Accelerated Filer, Accelerated Filer, Non-accelerated Filer. Definitions of these categories are stated in Rule 12b-2 of the Exchange Act. This information should be based on the registrant's current or most recent filing containing the related disclosure.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Exchange Act<br> -Number 240<br> -Section 12<br> -Subsection b-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityFilerCategory</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:filerCategoryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityIncorporationStateCountryCode">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Two-character EDGAR code representing the state or country of incorporation.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityIncorporationStateCountryCode</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:edgarStateCountryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityInteractiveDataCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Boolean flag that is true when the registrant has submitted electronically every Interactive Data File required to be submitted pursuant to Rule 405 of Regulation S-T during the preceding 12 months (or for such shorter period that the registrant was required to submit such files).</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation S-T<br> -Number 232<br> -Section 405<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityInteractiveDataCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:yesNoItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityPublicFloat">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The aggregate market value of the voting and non-voting common equity held by non-affiliates computed by reference to the price at which the common equity was last sold, or the average bid and asked price of such common equity, as of the last business day of the registrant's most recently completed second fiscal quarter.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityPublicFloat</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityRegistrantName">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The exact name of the entity filing the report as specified in its charter, which is required by forms filed with the SEC.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Exchange Act<br> -Number 240<br> -Section 12<br> -Subsection b-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityRegistrantName</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:normalizedStringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityShellCompany">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Boolean flag that is true when the registrant is a shell company as defined in Rule 12b-2 of the Exchange Act.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Exchange Act<br> -Number 240<br> -Section 12<br> -Subsection b-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityShellCompany</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:booleanItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntitySmallBusiness">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Indicates that the company is a Smaller Reporting Company (SRC).</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Exchange Act<br> -Number 240<br> -Section 12<br> -Subsection b-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntitySmallBusiness</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:booleanItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityTaxIdentificationNumber">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The Tax Identification Number (TIN), also known as an Employer Identification Number (EIN), is a unique 9-digit value assigned by the IRS.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Exchange Act<br> -Number 240<br> -Section 12<br> -Subsection b-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityTaxIdentificationNumber</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:employerIdItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityVoluntaryFilers">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Indicate 'Yes' or 'No' if the registrant is not required to file reports pursuant to Section 13 or Section 15(d) of the Act.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityVoluntaryFilers</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:yesNoItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityWellKnownSeasonedIssuer">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Indicate 'Yes' or 'No' if the registrant is a well-known seasoned issuer, as defined in Rule 405 of the Securities Act. Is used on Form Type: 10-K, 10-Q, 8-K, 20-F, 6-K, 10-K/A, 10-Q/A, 20-F/A, 6-K/A, N-CSR, N-Q, N-1A.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Securities Act<br> -Number 230<br> -Section 405<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityWellKnownSeasonedIssuer</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:yesNoItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_IcfrAuditorAttestationFlag">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Form 10-K<br> -Number 249<br> -Section 310<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Form 20-F<br> -Number 249<br> -Section 220<br> -Subsection f<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Form 40-F<br> -Number 249<br> -Section 240<br> -Subsection f<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_IcfrAuditorAttestationFlag</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:booleanItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_LocalPhoneNumber">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Local phone number for entity.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_LocalPhoneNumber</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:normalizedStringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_Security12bTitle">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Title of a 12(b) registered security.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Exchange Act<br> -Number 240<br> -Section 12<br> -Subsection b<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_Security12bTitle</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:securityTitleItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_SecurityExchangeName">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Name of the Exchange on which a security is registered.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Exchange Act<br> -Number 240<br> -Section 12<br> -Subsection d1-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_SecurityExchangeName</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:edgarExchangeCodeItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_TradingSymbol">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Trading symbol of an instrument as listed on an exchange.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_TradingSymbol</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:tradingSymbolItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>15
<FILENAME>R2.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575599082624">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Consolidated Balance Sheets - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AssetsCurrentAbstract', window );"><strong>Current assets:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_CashAndCashEquivalentsAtCarryingValue', window );">Cash and cash equivalents</a></td>
<td class="nump">$ 154,925<span></span>
</td>
<td class="nump">$ 119,747<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue', window );">Restricted cash</a></td>
<td class="nump">547<span></span>
</td>
<td class="nump">725<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AvailableForSaleSecuritiesDebtSecuritiesCurrent', window );">Short-term investments</a></td>
<td class="nump">147,488<span></span>
</td>
<td class="nump">104,181<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AccountsReceivableNetCurrent', window );">Accounts receivable, net</a></td>
<td class="nump">124,221<span></span>
</td>
<td class="nump">109,609<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_UnbilledContractsReceivable', window );">Contract assets</a></td>
<td class="nump">16,507<span></span>
</td>
<td class="nump">18,293<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_InventoryNet', window );">Inventories</a></td>
<td class="nump">206,908<span></span>
</td>
<td class="nump">170,858<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PrepaidExpenseAndOtherAssetsCurrent', window );">Prepaid expenses and other current assets</a></td>
<td class="nump">18,305<span></span>
</td>
<td class="nump">25,974<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AssetsCurrent', window );">Total current assets</a></td>
<td class="nump">668,901<span></span>
</td>
<td class="nump">549,387<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentNet', window );">Property, plant, and equipment, net</a></td>
<td class="nump">107,281<span></span>
</td>
<td class="nump">99,743<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OperatingLeaseRightOfUseAsset', window );">Operating lease right-of-use assets</a></td>
<td class="nump">26,467<span></span>
</td>
<td class="nump">28,813<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsNet', window );">Intangible assets, net</a></td>
<td class="nump">23,887<span></span>
</td>
<td class="nump">33,905<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_Goodwill', window );">Goodwill</a></td>
<td class="nump">181,943<span></span>
</td>
<td class="nump">181,943<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DeferredIncomeTaxAssetsNet', window );">Deferred income taxes</a></td>
<td class="nump">116,349<span></span>
</td>
<td class="nump">1,639<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OtherAssetsNoncurrent', window );">Other assets</a></td>
<td class="nump">3,355<span></span>
</td>
<td class="nump">3,546<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_Assets', window );">Total assets</a></td>
<td class="nump">1,128,183<span></span>
</td>
<td class="nump">898,976<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LiabilitiesCurrentAbstract', window );"><strong>Current liabilities:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AccountsPayableCurrent', window );">Accounts payable</a></td>
<td class="nump">52,049<span></span>
</td>
<td class="nump">44,456<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_AccruedAndOtherLiabilitiesCurrent', window );">Accrued expenses and other current liabilities</a></td>
<td class="nump">56,031<span></span>
</td>
<td class="nump">79,752<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_ContractWithCustomerLiabilityAndRefundLiabilityCurrent', window );">Customer deposits and deferred revenue</a></td>
<td class="nump">127,223<span></span>
</td>
<td class="nump">63,136<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AccruedIncomeTaxesCurrent', window );">Income taxes payable</a></td>
<td class="nump">2,432<span></span>
</td>
<td class="nump">1,860<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LongTermDebtCurrent', window );">Current portion of long-term debt</a></td>
<td class="nump">20,169<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LiabilitiesCurrent', window );">Total current liabilities</a></td>
<td class="nump">257,904<span></span>
</td>
<td class="nump">189,204<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DeferredIncomeTaxLiabilitiesNet', window );">Deferred income taxes</a></td>
<td class="nump">1,285<span></span>
</td>
<td class="nump">4,792<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LongTermDebtNoncurrent', window );">Long-term debt</a></td>
<td class="nump">254,491<span></span>
</td>
<td class="nump">229,438<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OperatingLeaseLiabilityNoncurrent', window );">Long-term operating lease liabilities</a></td>
<td class="nump">33,581<span></span>
</td>
<td class="nump">32,834<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OtherLiabilitiesNoncurrent', window );">Other liabilities</a></td>
<td class="nump">3,098<span></span>
</td>
<td class="nump">5,080<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_Liabilities', window );">Total liabilities</a></td>
<td class="nump">550,359<span></span>
</td>
<td class="nump">461,348<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_StockholdersEquityAbstract', window );"><strong>Stockholders' equity:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PreferredStockValue', window );">Preferred stock, $0.01 par value; 500,000 shares authorized; no shares issued and outstanding.</a></td>
<td class="text"> <span></span>
</td>
<td class="text"> <span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_CommonStockValue', window );">Common stock, $0.01 par value; 120,000,000 shares authorized; 51,660,409 shares issued and outstanding at December 31, 2022 and 50,652,864 shares issued and outstanding at December 31, 2021</a></td>
<td class="nump">517<span></span>
</td>
<td class="nump">507<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AdditionalPaidInCapitalCommonStock', window );">Additional paid-in capital</a></td>
<td class="nump">1,078,180<span></span>
</td>
<td class="nump">1,116,921<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_RetainedEarningsAccumulatedDeficit', window );">Accumulated deficit</a></td>
<td class="num">(501,801)<span></span>
</td>
<td class="num">(681,283)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax', window );">Accumulated other comprehensive income</a></td>
<td class="nump">928<span></span>
</td>
<td class="nump">1,483<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_StockholdersEquity', window );">Total stockholders' equity</a></td>
<td class="nump">577,824<span></span>
</td>
<td class="nump">437,628<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LiabilitiesAndStockholdersEquity', window );">Total liabilities and stockholders' equity</a></td>
<td class="nump">$ 1,128,183<span></span>
</td>
<td class="nump">$ 898,976<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AccountsPayableCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Carrying value as of the balance sheet date of liabilities incurred (and for which invoices have typically been received) and payable to vendors for goods and services received that are used in an entity's business. Used to reflect the current portion of the liabilities (due within one year or within the normal operating cycle if longer).</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.19(a))<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 2: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 852<br> -SubTopic 10<br> -Section 55<br> -Paragraph 10<br> -URI https://asc.fasb.org/extlink&amp;oid=84165509&amp;loc=d3e56426-112766<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AccountsPayableCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AccountsReceivableNetCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount, after allowance for credit loss, of right to consideration from customer for product sold and service rendered in normal course of business, classified as current.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 310<br> -SubTopic 10<br> -Section 45<br> -Paragraph 2<br> -URI https://asc.fasb.org/extlink&amp;oid=124259787&amp;loc=d3e4428-111522<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 310<br> -SubTopic 10<br> -Section 45<br> -Paragraph 9<br> -URI https://asc.fasb.org/extlink&amp;oid=124259787&amp;loc=d3e4531-111522<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AccountsReceivableNetCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AccruedIncomeTaxesCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Carrying amount as of the balance sheet date of the unpaid sum of the known and estimated amounts payable to satisfy all currently due domestic and foreign income tax obligations.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 210<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-03(a)(15)(b)(1))<br> -URI https://asc.fasb.org/extlink&amp;oid=126734703&amp;loc=d3e572229-122910<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 210<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-03(15)(1))<br> -URI https://asc.fasb.org/extlink&amp;oid=126897435&amp;loc=d3e534808-122878<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(20))<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AccruedIncomeTaxesCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Accumulated change in equity from transactions and other events and circumstances from non-owner sources, net of tax effect, at period end. Excludes Net Income (Loss), and accumulated changes in equity from transactions resulting from investments by owners and distributions to owners. Includes foreign currency translation items, certain pension adjustments, unrealized gains and losses on certain investments in debt and equity securities, other than temporary impairment (OTTI) losses related to factors other than credit losses on available-for-sale and held-to-maturity debt securities that an entity does not intend to sell and it is not more likely than not that the entity will be required to sell before recovery of the amortized cost basis, as well as changes in the fair value of derivatives related to the effective portion of a designated cash flow hedge.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(30)(a)(4))<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 45<br> -Paragraph 11<br> -URI https://asc.fasb.org/extlink&amp;oid=126968391&amp;loc=d3e637-108580<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 210<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-03(a)(23)(a)(3))<br> -URI https://asc.fasb.org/extlink&amp;oid=126734703&amp;loc=d3e572229-122910<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 45<br> -Paragraph 14A<br> -URI https://asc.fasb.org/extlink&amp;oid=126968391&amp;loc=SL7669686-108580<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 40<br> -Section 65<br> -Paragraph 2<br> -Subparagraph (h)(2)<br> -URI https://asc.fasb.org/extlink&amp;oid=124501264&amp;loc=SL117420844-207641<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 40<br> -Section 65<br> -Paragraph 2<br> -Subparagraph (g)(2)(ii)<br> -URI https://asc.fasb.org/extlink&amp;oid=124501264&amp;loc=SL117420844-207641<br><br>Reference 7: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 45<br> -Paragraph 14<br> -URI https://asc.fasb.org/extlink&amp;oid=126968391&amp;loc=d3e681-108580<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AdditionalPaidInCapitalCommonStock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Value received from shareholders in common stock-related transactions that are in excess of par value or stated value and amounts received from other stock-related transactions. Includes only common stock transactions (excludes preferred stock transactions). May be called contributed capital, capital in excess of par, capital surplus, or paid-in capital.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(30)(a)(1))<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AdditionalPaidInCapitalCommonStock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_Assets">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Sum of the carrying amounts as of the balance sheet date of all assets that are recognized. Assets are probable future economic benefits obtained or controlled by an entity as a result of past transactions or events.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 210<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-03(11))<br> -URI https://asc.fasb.org/extlink&amp;oid=126897435&amp;loc=d3e534808-122878<br><br>Reference 2: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 852<br> -SubTopic 10<br> -Section 55<br> -Paragraph 10<br> -URI https://asc.fasb.org/extlink&amp;oid=84165509&amp;loc=d3e56426-112766<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(iii)(A))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442552-122756<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 22<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8736-108599<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(iv))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442526-122756<br><br>Reference 6: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 210<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-03(a)(12))<br> -URI https://asc.fasb.org/extlink&amp;oid=126734703&amp;loc=d3e572229-122910<br><br>Reference 7: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 852<br> -SubTopic 10<br> -Section 50<br> -Paragraph 7<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=124433192&amp;loc=SL2890621-112765<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(i))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442552-122756<br><br>Reference 9: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(ii))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442526-122756<br><br>Reference 10: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(5))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442526-122756<br><br>Reference 11: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(iii)(A))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442526-122756<br><br>Reference 12: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(i))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442526-122756<br><br>Reference 13: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(g)(1)(ii))<br> -URI https://asc.fasb.org/extlink&amp;oid=120395691&amp;loc=d3e23780-122690<br><br>Reference 14: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(iii))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442526-122756<br><br>Reference 15: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 825<br> -SubTopic 10<br> -Section 50<br> -Paragraph 28<br> -Subparagraph (f)<br> -URI https://asc.fasb.org/extlink&amp;oid=123596393&amp;loc=d3e14064-108612<br><br>Reference 16: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(iii)(B))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442552-122756<br><br>Reference 17: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (bb)<br> -URI https://asc.fasb.org/extlink&amp;oid=123419778&amp;loc=d3e5710-111685<br><br>Reference 18: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(5))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442552-122756<br><br>Reference 19: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (d)<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8933-108599<br><br>Reference 20: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 45<br> -Paragraph 25<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=116870748&amp;loc=SL6758485-165988<br><br>Reference 21: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(iv))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442552-122756<br><br>Reference 22: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(18))<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 23: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 323<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (c)<br> -URI https://asc.fasb.org/extlink&amp;oid=114001798&amp;loc=d3e33918-111571<br><br>Reference 24: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 30<br> -Subparagraph (c)<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8906-108599<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_Assets</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AssetsCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Sum of the carrying amounts as of the balance sheet date of all assets that are expected to be realized in cash, sold, or consumed within one year (or the normal operating cycle, if longer). Assets are probable future economic benefits obtained or controlled by an entity as a result of past transactions or events.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section 45<br> -Paragraph 1<br> -URI https://asc.fasb.org/extlink&amp;oid=124098289&amp;loc=d3e6676-107765<br><br>Reference 2: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 852<br> -SubTopic 10<br> -Section 55<br> -Paragraph 10<br> -URI https://asc.fasb.org/extlink&amp;oid=84165509&amp;loc=d3e56426-112766<br><br>Reference 3: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 852<br> -SubTopic 10<br> -Section 50<br> -Paragraph 7<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=124433192&amp;loc=SL2890621-112765<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(i))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442526-122756<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(iii)(A))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442552-122756<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(iii)(A))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442526-122756<br><br>Reference 7: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(iii))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442526-122756<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 825<br> -SubTopic 10<br> -Section 50<br> -Paragraph 28<br> -Subparagraph (f)<br> -URI https://asc.fasb.org/extlink&amp;oid=123596393&amp;loc=d3e14064-108612<br><br>Reference 9: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(5))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442526-122756<br><br>Reference 10: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(iv))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442552-122756<br><br>Reference 11: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 45<br> -Paragraph 25<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=116870748&amp;loc=SL6758485-165988<br><br>Reference 12: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(iii)(B))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442552-122756<br><br>Reference 13: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 323<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (c)<br> -URI https://asc.fasb.org/extlink&amp;oid=114001798&amp;loc=d3e33918-111571<br><br>Reference 14: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(ii))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442526-122756<br><br>Reference 15: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(5))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442552-122756<br><br>Reference 16: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (bb)<br> -URI https://asc.fasb.org/extlink&amp;oid=123419778&amp;loc=d3e5710-111685<br><br>Reference 17: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(iv))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442526-122756<br><br>Reference 18: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(9))<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 19: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(g)(1)(ii))<br> -URI https://asc.fasb.org/extlink&amp;oid=120395691&amp;loc=d3e23780-122690<br><br>Reference 20: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(i))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442552-122756<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AssetsCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AssetsCurrentAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AssetsCurrentAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AvailableForSaleSecuritiesDebtSecuritiesCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of investment in debt security measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale), classified as current.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 326<br> -SubTopic 30<br> -Section 45<br> -Paragraph 1<br> -URI https://asc.fasb.org/extlink&amp;oid=124258926&amp;loc=SL82898722-210454<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 320<br> -SubTopic 10<br> -Section 45<br> -Paragraph 2<br> -URI https://asc.fasb.org/extlink&amp;oid=124260329&amp;loc=d3e26626-111562<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AvailableForSaleSecuritiesDebtSecuritiesCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CashAndCashEquivalentsAtCarryingValue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of currency on hand as well as demand deposits with banks or financial institutions. Includes other kinds of accounts that have the general characteristics of demand deposits. Also includes short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates. Excludes cash and cash equivalents within disposal group and discontinued operation.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 4<br> -URI https://asc.fasb.org/extlink&amp;oid=126954810&amp;loc=d3e3044-108585<br><br>Reference 2: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section 45<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=124098289&amp;loc=d3e6676-107765<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(1))<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CashAndCashEquivalentsAtCarryingValue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CommonStockValue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Aggregate par or stated value of issued nonredeemable common stock (or common stock redeemable solely at the option of the issuer). This item includes treasury stock repurchased by the entity. Note: elements for number of nonredeemable common shares, par value and other disclosure concepts are in another section within stockholders' equity.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 852<br> -SubTopic 10<br> -Section 55<br> -Paragraph 10<br> -URI https://asc.fasb.org/extlink&amp;oid=84165509&amp;loc=d3e56426-112766<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(29))<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CommonStockValue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredIncomeTaxAssetsNet">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount, after allocation of valuation allowances and deferred tax liability, of deferred tax asset attributable to deductible differences and carryforwards, with jurisdictional netting.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 45<br> -Paragraph 6<br> -URI https://asc.fasb.org/extlink&amp;oid=123427490&amp;loc=d3e31931-109318<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 45<br> -Paragraph 4<br> -URI https://asc.fasb.org/extlink&amp;oid=123427490&amp;loc=d3e31917-109318<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredIncomeTaxAssetsNet</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredIncomeTaxLiabilitiesNet">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount, after deferred tax asset, of deferred tax liability attributable to taxable differences with jurisdictional netting.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 45<br> -Paragraph 6<br> -URI https://asc.fasb.org/extlink&amp;oid=123427490&amp;loc=d3e31931-109318<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 45<br> -Paragraph 4<br> -URI https://asc.fasb.org/extlink&amp;oid=123427490&amp;loc=d3e31917-109318<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredIncomeTaxLiabilitiesNet</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FiniteLivedIntangibleAssetsNet">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount after amortization of assets, excluding financial assets and goodwill, lacking physical substance with a finite life.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 926<br> -SubTopic 20<br> -Section 50<br> -Paragraph 5<br> -URI https://asc.fasb.org/extlink&amp;oid=120154696&amp;loc=d3e54445-107959<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 30<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (a)(1)<br> -URI https://asc.fasb.org/extlink&amp;oid=66006027&amp;loc=d3e16323-109275<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FiniteLivedIntangibleAssetsNet</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_Goodwill">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount after accumulated impairment loss of an asset representing future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=121556970&amp;loc=d3e13816-109267<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 210<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-03(10)(1))<br> -URI https://asc.fasb.org/extlink&amp;oid=126897435&amp;loc=d3e534808-122878<br><br>Reference 3: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (h)<br> -URI https://asc.fasb.org/extlink&amp;oid=121556970&amp;loc=d3e13816-109267<br><br>Reference 4: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 20<br> -Section 55<br> -Paragraph 24<br> -URI https://asc.fasb.org/extlink&amp;oid=122137925&amp;loc=d3e14258-109268<br><br>Reference 5: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 852<br> -SubTopic 10<br> -Section 55<br> -Paragraph 10<br> -URI https://asc.fasb.org/extlink&amp;oid=84165509&amp;loc=d3e56426-112766<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 20<br> -Section 45<br> -Paragraph 1<br> -URI https://asc.fasb.org/extlink&amp;oid=99380562&amp;loc=d3e13770-109266<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(15))<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_Goodwill</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InventoryNet">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount after valuation and LIFO reserves of inventory expected to be sold, or consumed within one year or operating cycle, if longer.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(6))<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 2: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section 45<br> -Paragraph 1<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=124098289&amp;loc=d3e6676-107765<br><br>Reference 3: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 852<br> -SubTopic 10<br> -Section 55<br> -Paragraph 10<br> -URI https://asc.fasb.org/extlink&amp;oid=84165509&amp;loc=d3e56426-112766<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InventoryNet</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_Liabilities">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Sum of the carrying amounts as of the balance sheet date of all liabilities that are recognized. Liabilities are probable future sacrifices of economic benefits arising from present obligations of an entity to transfer assets or provide services to other entities in the future.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.19-26)<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 2: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 852<br> -SubTopic 10<br> -Section 50<br> -Paragraph 7<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=124433192&amp;loc=SL2890621-112765<br><br>Reference 3: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 30<br> -Subparagraph (d)<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8906-108599<br><br>Reference 4: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 852<br> -SubTopic 10<br> -Section 50<br> -Paragraph 7<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=124433192&amp;loc=SL2890621-112765<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 45<br> -Paragraph 25<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=116870748&amp;loc=SL6758485-165988<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(5))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442552-122756<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 825<br> -SubTopic 10<br> -Section 50<br> -Paragraph 28<br> -Subparagraph (f)<br> -URI https://asc.fasb.org/extlink&amp;oid=123596393&amp;loc=d3e14064-108612<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(iv))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442552-122756<br><br>Reference 9: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (bb)<br> -URI https://asc.fasb.org/extlink&amp;oid=123419778&amp;loc=d3e5710-111685<br><br>Reference 10: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(iii)(B))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442552-122756<br><br>Reference 11: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(iv))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442526-122756<br><br>Reference 12: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (c)<br> -URI https://asc.fasb.org/extlink&amp;oid=123419778&amp;loc=d3e5710-111685<br><br>Reference 13: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 323<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (c)<br> -URI https://asc.fasb.org/extlink&amp;oid=114001798&amp;loc=d3e33918-111571<br><br>Reference 14: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(5))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442526-122756<br><br>Reference 15: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(iii)(A))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442526-122756<br><br>Reference 16: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(i))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442552-122756<br><br>Reference 17: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(i))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442526-122756<br><br>Reference 18: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(g)(1)(ii))<br> -URI https://asc.fasb.org/extlink&amp;oid=120395691&amp;loc=d3e23780-122690<br><br>Reference 19: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(iii)(A))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442552-122756<br><br>Reference 20: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(ii))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442526-122756<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_Liabilities</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LiabilitiesAndStockholdersEquity">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of liabilities and equity items, including the portion of equity attributable to noncontrolling interests, if any.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 323<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (c)<br> -URI https://asc.fasb.org/extlink&amp;oid=114001798&amp;loc=d3e33918-111571<br><br>Reference 2: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 852<br> -SubTopic 10<br> -Section 55<br> -Paragraph 10<br> -URI https://asc.fasb.org/extlink&amp;oid=84165509&amp;loc=d3e56426-112766<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 210<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-03(23))<br> -URI https://asc.fasb.org/extlink&amp;oid=126897435&amp;loc=d3e534808-122878<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 210<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-03(a)(25))<br> -URI https://asc.fasb.org/extlink&amp;oid=126734703&amp;loc=d3e572229-122910<br><br>Reference 5: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(g)(1)(ii))<br> -URI https://asc.fasb.org/extlink&amp;oid=120395691&amp;loc=d3e23780-122690<br><br>Reference 6: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(32))<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 7: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 825<br> -SubTopic 10<br> -Section 50<br> -Paragraph 28<br> -Subparagraph (f)<br> -URI https://asc.fasb.org/extlink&amp;oid=123596393&amp;loc=d3e14064-108612<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LiabilitiesAndStockholdersEquity</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LiabilitiesCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Total obligations incurred as part of normal operations that are expected to be paid during the following twelve months or within one business cycle, if longer.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 852<br> -SubTopic 10<br> -Section 55<br> -Paragraph 10<br> -URI https://asc.fasb.org/extlink&amp;oid=84165509&amp;loc=d3e56426-112766<br><br>Reference 2: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 852<br> -SubTopic 10<br> -Section 50<br> -Paragraph 7<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=124433192&amp;loc=SL2890621-112765<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(iii)(A))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442552-122756<br><br>Reference 4: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 852<br> -SubTopic 10<br> -Section 50<br> -Paragraph 7<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=124433192&amp;loc=SL2890621-112765<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 45<br> -Paragraph 25<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=116870748&amp;loc=SL6758485-165988<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(g)(1)(ii))<br> -URI https://asc.fasb.org/extlink&amp;oid=120395691&amp;loc=d3e23780-122690<br><br>Reference 7: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(ii))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442526-122756<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(iv))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442552-122756<br><br>Reference 9: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(i))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442552-122756<br><br>Reference 10: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (c)<br> -URI https://asc.fasb.org/extlink&amp;oid=123419778&amp;loc=d3e5710-111685<br><br>Reference 11: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 323<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (c)<br> -URI https://asc.fasb.org/extlink&amp;oid=114001798&amp;loc=d3e33918-111571<br><br>Reference 12: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(iii)(B))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442552-122756<br><br>Reference 13: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(5))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442526-122756<br><br>Reference 14: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (bb)<br> -URI https://asc.fasb.org/extlink&amp;oid=123419778&amp;loc=d3e5710-111685<br><br>Reference 15: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(5))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442552-122756<br><br>Reference 16: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(iii)(A))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442526-122756<br><br>Reference 17: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(i))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442526-122756<br><br>Reference 18: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(iv))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442526-122756<br><br>Reference 19: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 825<br> -SubTopic 10<br> -Section 50<br> -Paragraph 28<br> -Subparagraph (f)<br> -URI https://asc.fasb.org/extlink&amp;oid=123596393&amp;loc=d3e14064-108612<br><br>Reference 20: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section 45<br> -Paragraph 5<br> -URI https://asc.fasb.org/extlink&amp;oid=124098289&amp;loc=d3e6904-107765<br><br>Reference 21: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.21)<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LiabilitiesCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LiabilitiesCurrentAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LiabilitiesCurrentAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LongTermDebtCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount, after unamortized (discount) premium and debt issuance costs, of long-term debt, classified as current. Includes, but not limited to, notes payable, bonds payable, debentures, mortgage loans and commercial paper. Excludes capital lease obligations.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.19,20)<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LongTermDebtCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LongTermDebtNoncurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount, excluding unamortized premium (discount) and debt issuance cost, of long-term debt classified as noncurrent. Excludes lease obligation.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(22))<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LongTermDebtNoncurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OperatingLeaseLiabilityNoncurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Present value of lessee's discounted obligation for lease payments from operating lease, classified as noncurrent.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 45<br> -Paragraph 1<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=123391704&amp;loc=SL77918627-209977<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingLeaseLiabilityNoncurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OperatingLeaseRightOfUseAsset">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of lessee's right to use underlying asset under operating lease.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 45<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=123391704&amp;loc=SL77918627-209977<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingLeaseRightOfUseAsset</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OtherAssetsNoncurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of noncurrent assets classified as other.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(17))<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OtherAssetsNoncurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OtherLiabilitiesNoncurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of liabilities classified as other, due after one year or the normal operating cycle, if longer.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.24)<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OtherLiabilitiesNoncurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PreferredStockValue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Aggregate par or stated value of issued nonredeemable preferred stock (or preferred stock redeemable solely at the option of the issuer). This item includes treasury stock repurchased by the entity. Note: elements for number of nonredeemable preferred shares, par value and other disclosure concepts are in another section within stockholders' equity.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(28))<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 2: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 852<br> -SubTopic 10<br> -Section 55<br> -Paragraph 10<br> -URI https://asc.fasb.org/extlink&amp;oid=84165509&amp;loc=d3e56426-112766<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PreferredStockValue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PrepaidExpenseAndOtherAssetsCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of asset related to consideration paid in advance for costs that provide economic benefits in future periods, and amount of other assets that are expected to be realized or consumed within one year or the normal operating cycle, if longer.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(9))<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PrepaidExpenseAndOtherAssetsCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PropertyPlantAndEquipmentNet">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount after accumulated depreciation, depletion and amortization of physical assets used in the normal conduct of business to produce goods and services and not intended for resale. Examples include, but are not limited to, land, buildings, machinery and equipment, office equipment, and furniture and fixtures.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 360<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -URI https://asc.fasb.org/extlink&amp;oid=6391035&amp;loc=d3e2868-110229<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 210<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-03(a)(8))<br> -URI https://asc.fasb.org/extlink&amp;oid=126734703&amp;loc=d3e572229-122910<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 360<br> -Section 50<br> -Paragraph 1<br> -URI https://asc.fasb.org/extlink&amp;oid=124429447&amp;loc=SL124453093-239630<br><br>Reference 4: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 852<br> -SubTopic 10<br> -Section 55<br> -Paragraph 10<br> -URI https://asc.fasb.org/extlink&amp;oid=84165509&amp;loc=d3e56426-112766<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentNet</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of cash and cash equivalents restricted as to withdrawal or usage, classified as current. Cash includes, but is not limited to, currency on hand, demand deposits with banks or financial institutions, and other accounts with general characteristics of demand deposits. Cash equivalents include, but are not limited to, short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 4<br> -URI https://asc.fasb.org/extlink&amp;oid=126954810&amp;loc=d3e3044-108585<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -URI https://asc.fasb.org/extlink&amp;oid=126999549&amp;loc=SL98516268-108586<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(1))<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RetainedEarningsAccumulatedDeficit">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The cumulative amount of the reporting entity's undistributed earnings or deficit.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(30)(a)(3))<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 2: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 852<br> -SubTopic 10<br> -Section 55<br> -Paragraph 10<br> -URI https://asc.fasb.org/extlink&amp;oid=84165509&amp;loc=d3e56426-112766<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 210<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-03(a)(23)(a)(4))<br> -URI https://asc.fasb.org/extlink&amp;oid=126734703&amp;loc=d3e572229-122910<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 40<br> -Section 65<br> -Paragraph 2<br> -Subparagraph (h)(2)<br> -URI https://asc.fasb.org/extlink&amp;oid=124501264&amp;loc=SL117420844-207641<br><br>Reference 5: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.3-04)<br> -URI https://asc.fasb.org/extlink&amp;oid=120397183&amp;loc=d3e187085-122770<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 40<br> -Section 65<br> -Paragraph 2<br> -Subparagraph (g)(2)(i)<br> -URI https://asc.fasb.org/extlink&amp;oid=124501264&amp;loc=SL117420844-207641<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RetainedEarningsAccumulatedDeficit</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StockholdersEquity">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Total of all stockholders' equity (deficit) items, net of receivables from officers, directors, owners, and affiliates of the entity which are attributable to the parent. The amount of the economic entity's stockholders' equity attributable to the parent excludes the amount of stockholders' equity which is allocable to that ownership interest in subsidiary equity which is not attributable to the parent (noncontrolling interest, minority interest). This excludes temporary equity and is sometimes called permanent equity.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(g)(1)(ii))<br> -URI https://asc.fasb.org/extlink&amp;oid=120395691&amp;loc=d3e23780-122690<br><br>Reference 2: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 852<br> -SubTopic 10<br> -Section 55<br> -Paragraph 10<br> -URI https://asc.fasb.org/extlink&amp;oid=84165509&amp;loc=d3e56426-112766<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 310<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SAB Topic 4.E)<br> -URI https://asc.fasb.org/extlink&amp;oid=122038336&amp;loc=d3e74512-122707<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(31))<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 5: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(29))<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 6: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(30))<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 7: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 825<br> -SubTopic 10<br> -Section 50<br> -Paragraph 28<br> -Subparagraph (f)<br> -URI https://asc.fasb.org/extlink&amp;oid=123596393&amp;loc=d3e14064-108612<br><br>Reference 8: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 323<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (c)<br> -URI https://asc.fasb.org/extlink&amp;oid=114001798&amp;loc=d3e33918-111571<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StockholdersEquity</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StockholdersEquityAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StockholdersEquityAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_UnbilledContractsReceivable">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Unbilled amounts due for services rendered or to be rendered, actions taken or to be taken, or a promise to refrain from taking certain actions in accordance with the terms of a legally binding agreement between the entity and, at a minimum, one other party. An example would be amounts associated with contracts or programs where the recognized revenue for performance thereunder exceeds the amounts billed under the terms thereof as of the date of the balance sheet.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 912<br> -SubTopic 310<br> -Section 45<br> -Paragraph 2<br> -URI https://asc.fasb.org/extlink&amp;oid=126938201&amp;loc=d3e55302-109406<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_UnbilledContractsReceivable</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_AccruedAndOtherLiabilitiesCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Carrying value as of the balance sheet date of obligations incurred and payable, pertaining to costs that are statutory in nature, are incurred on contractual obligations, or accumulate over time and for which invoices have not yet been received or will not be rendered. Examples include taxes, interest, rent and utilities. Used to reflect the current portion of the liabilities (due within one year or within the normal operating cycle if longer). Also includes amount of liabilities classified as other, due within one year or the normal operating cycle, if longer.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_AccruedAndOtherLiabilitiesCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_ContractWithCustomerLiabilityAndRefundLiabilityCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of obligation to transfer good or service to customer for which consideration has been received or is receivable. Also includes amount of liability for consideration received or receivable from customer which is not included in transaction price, when consideration is expected to be refunded to customer, classified as current.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_ContractWithCustomerLiabilityAndRefundLiabilityCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>16
<FILENAME>R3.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575600384720">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Consolidated Balance Sheets (Parenthetical) - $ / shares<br></strong></div></th>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_StatementOfFinancialPositionAbstract', window );"><strong>Consolidated Balance Sheets</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PreferredStockParOrStatedValuePerShare', window );">Preferred stock, par value (in dollars per share)</a></td>
<td class="nump">$ 0.01<span></span>
</td>
<td class="nump">$ 0.01<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PreferredStockSharesAuthorized', window );">Preferred stock, shares authorized</a></td>
<td class="nump">500,000<span></span>
</td>
<td class="nump">500,000<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PreferredStockSharesIssued', window );">Preferred stock, shares issued</a></td>
<td class="nump">0<span></span>
</td>
<td class="nump">0<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PreferredStockSharesOutstanding', window );">Preferred stock, shares outstanding</a></td>
<td class="nump">0<span></span>
</td>
<td class="nump">0<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_CommonStockParOrStatedValuePerShare', window );">Common stock, par value (in dollars per share)</a></td>
<td class="nump">$ 0.01<span></span>
</td>
<td class="nump">$ 0.01<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_CommonStockSharesAuthorized', window );">Common stock, authorized shares</a></td>
<td class="nump">120,000,000<span></span>
</td>
<td class="nump">120,000,000<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_CommonStockSharesIssued', window );">Common stock, shares issued</a></td>
<td class="nump">51,660,409<span></span>
</td>
<td class="nump">50,652,864<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_CommonStockSharesOutstanding', window );">Common stock, shares outstanding</a></td>
<td class="nump">51,660,409<span></span>
</td>
<td class="nump">50,652,864<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CommonStockParOrStatedValuePerShare">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Face amount or stated value per share of common stock.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(29))<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CommonStockParOrStatedValuePerShare</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CommonStockSharesAuthorized">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The maximum number of common shares permitted to be issued by an entity's charter and bylaws.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(29))<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CommonStockSharesAuthorized</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CommonStockSharesIssued">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Total number of common shares of an entity that have been sold or granted to shareholders (includes common shares that were issued, repurchased and remain in the treasury). These shares represent capital invested by the firm's shareholders and owners, and may be all or only a portion of the number of shares authorized. Shares issued include shares outstanding and shares held in the treasury.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(29))<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CommonStockSharesIssued</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CommonStockSharesOutstanding">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Number of shares of common stock outstanding. Common stock represent the ownership interest in a corporation.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -URI https://asc.fasb.org/extlink&amp;oid=126973232&amp;loc=d3e21463-112644<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(29))<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CommonStockSharesOutstanding</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PreferredStockParOrStatedValuePerShare">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Face amount or stated value per share of preferred stock nonredeemable or redeemable solely at the option of the issuer.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(28))<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section 50<br> -Paragraph 13<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=126973232&amp;loc=SL123496158-112644<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PreferredStockParOrStatedValuePerShare</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PreferredStockSharesAuthorized">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The maximum number of nonredeemable preferred shares (or preferred stock redeemable solely at the option of the issuer) permitted to be issued by an entity's charter and bylaws.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(28))<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PreferredStockSharesAuthorized</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PreferredStockSharesIssued">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Total number of nonredeemable preferred shares (or preferred stock redeemable solely at the option of the issuer) issued to shareholders (includes related preferred shares that were issued, repurchased, and remain in the treasury). May be all or portion of the number of preferred shares authorized. Excludes preferred shares that are classified as debt.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(28))<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section 50<br> -Paragraph 13<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=126973232&amp;loc=SL123496158-112644<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PreferredStockSharesIssued</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PreferredStockSharesOutstanding">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Aggregate share number for all nonredeemable preferred stock (or preferred stock redeemable solely at the option of the issuer) held by stockholders. Does not include preferred shares that have been repurchased.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(28))<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PreferredStockSharesOutstanding</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StatementOfFinancialPositionAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StatementOfFinancialPositionAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>17
<FILENAME>R4.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575600671040">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Consolidated Statements of Operations - USD ($)<br> shares in Thousands, $ in Thousands</strong></div></th>
<th class="th" colspan="3">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncomeStatementAbstract', window );"><strong>Consolidated Statements of Operations</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_RevenueFromContractWithCustomerIncludingAssessedTax', window );">Net sales</a></td>
<td class="nump">$ 646,137<span></span>
</td>
<td class="nump">$ 583,277<span></span>
</td>
<td class="nump">$ 454,163<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_CostOfGoodsAndServicesSold', window );">Cost of sales</a></td>
<td class="nump">382,989<span></span>
</td>
<td class="nump">341,003<span></span>
</td>
<td class="nump">259,863<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_GrossProfit', window );">Gross profit</a></td>
<td class="nump">263,148<span></span>
</td>
<td class="nump">242,274<span></span>
</td>
<td class="nump">194,300<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OperatingExpensesAbstract', window );"><strong>Operating expenses, net:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ResearchAndDevelopmentExpense', window );">Research and development</a></td>
<td class="nump">103,565<span></span>
</td>
<td class="nump">88,680<span></span>
</td>
<td class="nump">78,994<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_SellingGeneralAndAdministrativeExpense', window );">Selling, general, and administrative</a></td>
<td class="nump">88,952<span></span>
</td>
<td class="nump">84,536<span></span>
</td>
<td class="nump">76,251<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AmortizationOfIntangibleAssets', window );">Amortization of intangible assets</a></td>
<td class="nump">10,018<span></span>
</td>
<td class="nump">12,280<span></span>
</td>
<td class="nump">15,333<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_RestructuringCharges', window );">Restructuring</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">1,097<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AssetImpairmentCharges', window );">Asset impairment</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">281<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OtherOperatingIncomeExpenseNet', window );">Other operating expense (income), net</a></td>
<td class="nump">317<span></span>
</td>
<td class="nump">68<span></span>
</td>
<td class="num">(221)<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OperatingExpenses', window );">Total operating expenses, net</a></td>
<td class="nump">202,852<span></span>
</td>
<td class="nump">185,564<span></span>
</td>
<td class="nump">171,735<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OperatingIncomeLoss', window );">Operating income</a></td>
<td class="nump">60,296<span></span>
</td>
<td class="nump">56,710<span></span>
</td>
<td class="nump">22,565<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_InvestmentIncomeInterest', window );">Interest income</a></td>
<td class="nump">2,199<span></span>
</td>
<td class="nump">2,340<span></span>
</td>
<td class="nump">1,551<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_InterestExpense', window );">Interest expense</a></td>
<td class="num">(11,510)<span></span>
</td>
<td class="num">(28,360)<span></span>
</td>
<td class="num">(24,739)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OtherNonoperatingIncomeExpense', window );">Other income (expense), net</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(5,010)<span></span>
</td>
<td class="num">(7,841)<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest', window );">Income before income taxes</a></td>
<td class="nump">50,985<span></span>
</td>
<td class="nump">25,680<span></span>
</td>
<td class="num">(8,464)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncomeTaxExpenseBenefit', window );">Income tax expense (benefit)</a></td>
<td class="num">(115,957)<span></span>
</td>
<td class="num">(358)<span></span>
</td>
<td class="num">(73)<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_NetIncomeLoss', window );">Net income</a></td>
<td class="nump">$ 166,942<span></span>
</td>
<td class="nump">$ 26,038<span></span>
</td>
<td class="num">$ (8,391)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_EarningsPerShareAbstract', window );"><strong>Income per common share:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_EarningsPerShareBasic', window );">Basic (in dollars per share)</a></td>
<td class="nump">$ 3.35<span></span>
</td>
<td class="nump">$ 0.53<span></span>
</td>
<td class="num">$ (0.17)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_EarningsPerShareDiluted', window );">Diluted (in dollars per share)</a></td>
<td class="nump">$ 2.71<span></span>
</td>
<td class="nump">$ 0.49<span></span>
</td>
<td class="num">$ (0.17)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract', window );"><strong>Weighted average number of shares:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_WeightedAverageNumberOfSharesOutstandingBasic', window );">Basic (in shares)</a></td>
<td class="nump">49,906<span></span>
</td>
<td class="nump">49,073<span></span>
</td>
<td class="nump">48,362<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding', window );">Diluted (in shares)</a></td>
<td class="nump">65,607<span></span>
</td>
<td class="nump">53,643<span></span>
</td>
<td class="nump">48,362<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AmortizationOfIntangibleAssets">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The aggregate expense charged against earnings to allocate the cost of intangible assets (nonphysical assets not used in production) in a systematic and rational manner to the periods expected to benefit from such assets. As a noncash expense, this element is added back to net income when calculating cash provided by or used in operations using the indirect method.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=126954810&amp;loc=d3e3602-108585<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 30<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (a)(2)<br> -URI https://asc.fasb.org/extlink&amp;oid=66006027&amp;loc=d3e16323-109275<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 30<br> -Section 45<br> -Paragraph 2<br> -URI https://asc.fasb.org/extlink&amp;oid=6388964&amp;loc=d3e16225-109274<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AmortizationOfIntangibleAssets</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AssetImpairmentCharges">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of write-down of assets recognized in the income statement. Includes, but is not limited to, losses from tangible assets, intangible assets and goodwill.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=126954810&amp;loc=d3e3602-108585<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 360<br> -SubTopic 10<br> -Section 45<br> -Paragraph 4<br> -URI https://asc.fasb.org/extlink&amp;oid=126905981&amp;loc=d3e2420-110228<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AssetImpairmentCharges</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CostOfGoodsAndServicesSold">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The aggregate costs related to goods produced and sold and services rendered by an entity during the reporting period. This excludes costs incurred during the reporting period related to financial services rendered and other revenue generating activities.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 924<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB Topic 11.L)<br> -URI https://asc.fasb.org/extlink&amp;oid=6472922&amp;loc=d3e499488-122856<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03.2(a),(d))<br> -URI https://asc.fasb.org/extlink&amp;oid=126953954&amp;loc=SL114868664-224227<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CostOfGoodsAndServicesSold</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EarningsPerShareAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EarningsPerShareAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EarningsPerShareBasic">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The amount of net income (loss) for the period per each share of common stock or unit outstanding during the reporting period.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 815<br> -SubTopic 40<br> -Section 65<br> -Paragraph 1<br> -Subparagraph (e)(4)<br> -URI https://asc.fasb.org/extlink&amp;oid=126732423&amp;loc=SL123482106-238011<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -URI https://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22583-107794<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 11<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22694-107794<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 10<br> -URI https://asc.fasb.org/extlink&amp;oid=126958026&amp;loc=d3e1448-109256<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 4<br> -URI https://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22595-107794<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 11<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22694-107794<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 7<br> -URI https://asc.fasb.org/extlink&amp;oid=126958026&amp;loc=d3e1337-109256<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 815<br> -SubTopic 40<br> -Section 65<br> -Paragraph 1<br> -Subparagraph (f)<br> -URI https://asc.fasb.org/extlink&amp;oid=126732423&amp;loc=SL123482106-238011<br><br>Reference 9: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 55<br> -Paragraph 52<br> -URI https://asc.fasb.org/extlink&amp;oid=128363288&amp;loc=d3e4984-109258<br><br>Reference 10: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 220<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-04(23))<br> -URI https://asc.fasb.org/extlink&amp;oid=120400993&amp;loc=SL114874131-224263<br><br>Reference 11: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 55<br> -Paragraph 15<br> -URI https://asc.fasb.org/extlink&amp;oid=128363288&amp;loc=d3e3842-109258<br><br>Reference 12: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 7<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22644-107794<br><br>Reference 13: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=124432515&amp;loc=d3e3550-109257<br><br>Reference 14: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03(25))<br> -URI https://asc.fasb.org/extlink&amp;oid=126953954&amp;loc=SL114868664-224227<br><br>Reference 15: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 2<br> -URI https://asc.fasb.org/extlink&amp;oid=126958026&amp;loc=d3e1252-109256<br><br>Reference 16: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 60B<br> -Subparagraph (d)<br> -URI https://asc.fasb.org/extlink&amp;oid=126958026&amp;loc=SL5780133-109256<br><br>Reference 17: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 220<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-04(27))<br> -URI https://asc.fasb.org/extlink&amp;oid=120399700&amp;loc=SL114874048-224260<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EarningsPerShareBasic</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EarningsPerShareDiluted">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The amount of net income (loss) for the period available to each share of common stock or common unit outstanding during the reporting period and to each share or unit that would have been outstanding assuming the issuance of common shares or units for all dilutive potential common shares or units outstanding during the reporting period.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 55<br> -Paragraph 52<br> -URI https://asc.fasb.org/extlink&amp;oid=128363288&amp;loc=d3e4984-109258<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 7<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22644-107794<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 55<br> -Paragraph 15<br> -URI https://asc.fasb.org/extlink&amp;oid=128363288&amp;loc=d3e3842-109258<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 2<br> -URI https://asc.fasb.org/extlink&amp;oid=126958026&amp;loc=d3e1252-109256<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 11<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22694-107794<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 4<br> -URI https://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22595-107794<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -URI https://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22583-107794<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 60B<br> -Subparagraph (d)<br> -URI https://asc.fasb.org/extlink&amp;oid=126958026&amp;loc=SL5780133-109256<br><br>Reference 9: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 815<br> -SubTopic 40<br> -Section 65<br> -Paragraph 1<br> -Subparagraph (f)<br> -URI https://asc.fasb.org/extlink&amp;oid=126732423&amp;loc=SL123482106-238011<br><br>Reference 10: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 220<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-04(27))<br> -URI https://asc.fasb.org/extlink&amp;oid=120399700&amp;loc=SL114874048-224260<br><br>Reference 11: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=124432515&amp;loc=d3e3550-109257<br><br>Reference 12: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 220<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-04(23))<br> -URI https://asc.fasb.org/extlink&amp;oid=120400993&amp;loc=SL114874131-224263<br><br>Reference 13: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 11<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22694-107794<br><br>Reference 14: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 7<br> -URI https://asc.fasb.org/extlink&amp;oid=126958026&amp;loc=d3e1337-109256<br><br>Reference 15: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 815<br> -SubTopic 40<br> -Section 65<br> -Paragraph 1<br> -Subparagraph (e)(4)<br> -URI https://asc.fasb.org/extlink&amp;oid=126732423&amp;loc=SL123482106-238011<br><br>Reference 16: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03(25))<br> -URI https://asc.fasb.org/extlink&amp;oid=126953954&amp;loc=SL114868664-224227<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EarningsPerShareDiluted</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_GrossProfit">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Aggregate revenue less cost of goods and services sold or operating expenses directly attributable to the revenue generation activity.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 31<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8924-108599<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 30<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8906-108599<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 22<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8736-108599<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (f)<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8933-108599<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(iv))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442526-122756<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 323<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (c)<br> -URI https://asc.fasb.org/extlink&amp;oid=114001798&amp;loc=d3e33918-111571<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(iii)(A))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442552-122756<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(iii)(B))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442552-122756<br><br>Reference 9: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(ii))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442526-122756<br><br>Reference 10: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(g)(1)(ii))<br> -URI https://asc.fasb.org/extlink&amp;oid=120395691&amp;loc=d3e23780-122690<br><br>Reference 11: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(i))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442526-122756<br><br>Reference 12: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(i))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442552-122756<br><br>Reference 13: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(iii)(A))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442526-122756<br><br>Reference 14: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 825<br> -SubTopic 10<br> -Section 50<br> -Paragraph 28<br> -Subparagraph (f)<br> -URI https://asc.fasb.org/extlink&amp;oid=123596393&amp;loc=d3e14064-108612<br><br>Reference 15: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(5))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442526-122756<br><br>Reference 16: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(iv))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442552-122756<br><br>Reference 17: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(5))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442552-122756<br><br>Reference 18: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03.1,2)<br> -URI https://asc.fasb.org/extlink&amp;oid=126953954&amp;loc=SL114868664-224227<br><br>Reference 19: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (c)<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8933-108599<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_GrossProfit</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of income (loss) from continuing operations, including income (loss) from equity method investments, before deduction of income tax expense (benefit), and income (loss) attributable to noncontrolling interest.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (c)<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8933-108599<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 30<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8906-108599<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (f)<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8933-108599<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 940<br> -SubTopic 20<br> -Section 25<br> -Paragraph 1<br> -URI https://asc.fasb.org/extlink&amp;oid=126941158&amp;loc=d3e41242-110953<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 22<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8736-108599<br><br>Reference 6: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03(10))<br> -URI https://asc.fasb.org/extlink&amp;oid=126953954&amp;loc=SL114868664-224227<br><br>Reference 7: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 220<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-04(8))<br> -URI https://asc.fasb.org/extlink&amp;oid=120400993&amp;loc=SL114874131-224263<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 235<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-05(b)(2))<br> -URI https://asc.fasb.org/extlink&amp;oid=120399901&amp;loc=d3e537907-122884<br><br>Reference 9: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 31<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8924-108599<br><br>Reference 10: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 220<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-04(15))<br> -URI https://asc.fasb.org/extlink&amp;oid=120399700&amp;loc=SL114874048-224260<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeStatementAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeStatementAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxExpenseBenefit">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of current income tax expense (benefit) and deferred income tax expense (benefit) pertaining to continuing operations.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB TOPIC 6.I.7)<br> -URI https://asc.fasb.org/extlink&amp;oid=122134291&amp;loc=d3e330036-122817<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 10<br> -URI https://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32672-109319<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 22<br> -Subparagraph (h)<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8736-108599<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(h))<br> -URI https://asc.fasb.org/extlink&amp;oid=120395691&amp;loc=d3e23780-122690<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 9<br> -URI https://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22663-107794<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 20<br> -Section 45<br> -Paragraph 2<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=123586238&amp;loc=d3e38679-109324<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 220<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-04(9))<br> -URI https://asc.fasb.org/extlink&amp;oid=120400993&amp;loc=SL114874131-224263<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -URI https://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22658-107794<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeTaxExpenseBenefit</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InterestExpense">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of the cost of borrowed funds accounted for as interest expense.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 835<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=6450988&amp;loc=d3e26243-108391<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 835<br> -SubTopic 30<br> -Section 45<br> -Paragraph 3<br> -URI https://asc.fasb.org/extlink&amp;oid=124435984&amp;loc=d3e28555-108399<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 22<br> -Subparagraph (d)<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8736-108599<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (210.5-03(11))<br> -URI https://asc.fasb.org/extlink&amp;oid=126953954&amp;loc=SL114868664-224227<br><br>Reference 5: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 220<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-04.9)<br> -URI https://asc.fasb.org/extlink&amp;oid=120399700&amp;loc=SL114874048-224260<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InterestExpense</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InvestmentIncomeInterest">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount before accretion (amortization) of purchase discount (premium) of interest income on nonoperating securities.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03.7(b))<br> -URI https://asc.fasb.org/extlink&amp;oid=126953954&amp;loc=SL114868664-224227<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 22<br> -Subparagraph (c)<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8736-108599<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InvestmentIncomeInterest</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NetIncomeLoss">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The portion of profit or loss for the period, net of income taxes, which is attributable to the parent.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 220<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-04(22))<br> -URI https://asc.fasb.org/extlink&amp;oid=120399700&amp;loc=SL114874048-224260<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (f)<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8933-108599<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 4<br> -URI https://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22595-107794<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 220<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-04(18))<br> -URI https://asc.fasb.org/extlink&amp;oid=120400993&amp;loc=SL114874131-224263<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 815<br> -SubTopic 40<br> -Section 65<br> -Paragraph 1<br> -Subparagraph (f)<br> -URI https://asc.fasb.org/extlink&amp;oid=126732423&amp;loc=SL123482106-238011<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 50<br> -Paragraph 6<br> -URI https://asc.fasb.org/extlink&amp;oid=124431353&amp;loc=SL124452729-227067<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(5))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442552-122756<br><br>Reference 8: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03(20))<br> -URI https://asc.fasb.org/extlink&amp;oid=126953954&amp;loc=SL114868664-224227<br><br>Reference 9: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28<br> -URI https://asc.fasb.org/extlink&amp;oid=126954810&amp;loc=d3e3602-108585<br><br>Reference 10: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (b)(2)<br> -URI https://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22499-107794<br><br>Reference 11: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(iv))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442526-122756<br><br>Reference 12: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(iii)(A))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442526-122756<br><br>Reference 13: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(i))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442552-122756<br><br>Reference 14: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(i))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442526-122756<br><br>Reference 15: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 9<br> -URI https://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22663-107794<br><br>Reference 16: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(iv))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442552-122756<br><br>Reference 17: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(ii))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442526-122756<br><br>Reference 18: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 825<br> -SubTopic 10<br> -Section 50<br> -Paragraph 28<br> -Subparagraph (f)<br> -URI https://asc.fasb.org/extlink&amp;oid=123596393&amp;loc=d3e14064-108612<br><br>Reference 19: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -URI https://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22583-107794<br><br>Reference 20: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(g)(1)(ii))<br> -URI https://asc.fasb.org/extlink&amp;oid=120395691&amp;loc=d3e23780-122690<br><br>Reference 21: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 60B<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=126958026&amp;loc=SL5780133-109256<br><br>Reference 22: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 323<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (c)<br> -URI https://asc.fasb.org/extlink&amp;oid=114001798&amp;loc=d3e33918-111571<br><br>Reference 23: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -URI https://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22658-107794<br><br>Reference 24: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 45<br> -Paragraph 1A<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=126968391&amp;loc=SL7669619-108580<br><br>Reference 25: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 31<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8924-108599<br><br>Reference 26: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 11<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22694-107794<br><br>Reference 27: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 11<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22694-107794<br><br>Reference 28: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 205<br> -SubTopic 20<br> -Section 50<br> -Paragraph 7<br> -URI https://asc.fasb.org/extlink&amp;oid=109222650&amp;loc=SL51721683-107760<br><br>Reference 29: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 45<br> -Paragraph 1B<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=126968391&amp;loc=SL7669625-108580<br><br>Reference 30: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 22<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8736-108599<br><br>Reference 31: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(5))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442526-122756<br><br>Reference 32: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(iii)(B))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442552-122756<br><br>Reference 33: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(iii)(A))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442552-122756<br><br>Reference 34: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 30<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8906-108599<br><br>Reference 35: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (c)<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8933-108599<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NetIncomeLoss</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OperatingExpenses">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Generally recurring costs associated with normal operations except for the portion of these expenses which can be clearly related to production and included in cost of sales or services. Includes selling, general and administrative expense.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingExpenses</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OperatingExpensesAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingExpensesAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OperatingIncomeLoss">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The net result for the period of deducting operating expenses from operating revenues.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 31<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8924-108599<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 30<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8906-108599<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (c)<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8933-108599<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (f)<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8933-108599<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 22<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8736-108599<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingIncomeLoss</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OtherNonoperatingIncomeExpense">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of income (expense) related to nonoperating activities, classified as other.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03.9)<br> -URI https://asc.fasb.org/extlink&amp;oid=126953954&amp;loc=SL114868664-224227<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OtherNonoperatingIncomeExpense</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OtherOperatingIncomeExpenseNet">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The net amount of other operating income and expenses, the components of which are not separately disclosed on the income statement, from items that are associated with the entity's normal revenue producing operations.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OtherOperatingIncomeExpenseNet</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ResearchAndDevelopmentExpense">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The aggregate costs incurred (1) in a planned search or critical investigation aimed at discovery of new knowledge with the hope that such knowledge will be useful in developing a new product or service, a new process or technique, or in bringing about a significant improvement to an existing product or process; or (2) to translate research findings or other knowledge into a plan or design for a new product or process or for a significant improvement to an existing product or process whether intended for sale or the entity's use, during the reporting period charged to research and development projects, including the costs of developing computer software up to the point in time of achieving technological feasibility, and costs allocated in accounting for a business combination to in-process projects deemed to have no alternative future use.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 912<br> -SubTopic 730<br> -Section 25<br> -Paragraph 1<br> -URI https://asc.fasb.org/extlink&amp;oid=6472174&amp;loc=d3e58812-109433<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 985<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1<br> -URI https://asc.fasb.org/extlink&amp;oid=6501960&amp;loc=d3e128462-111756<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 730<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -URI https://asc.fasb.org/extlink&amp;oid=6420194&amp;loc=d3e21568-108373<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ResearchAndDevelopmentExpense</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RestructuringCharges">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of expenses associated with exit or disposal activities pursuant to an authorized plan. Excludes expenses related to a discontinued operation or an asset retirement obligation.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 420<br> -SubTopic 10<br> -Section 45<br> -Paragraph 3<br> -URI https://asc.fasb.org/extlink&amp;oid=109237686&amp;loc=d3e17752-110868<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 420<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB Topic 5.P.3)<br> -URI https://asc.fasb.org/extlink&amp;oid=115931487&amp;loc=d3e140864-122747<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=126954810&amp;loc=d3e3602-108585<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 420<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SAB Topic 5.P.4(b)(1))<br> -URI https://asc.fasb.org/extlink&amp;oid=115931487&amp;loc=d3e140904-122747<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RestructuringCharges</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RevenueFromContractWithCustomerIncludingAssessedTax">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount, including tax collected from customer, of revenue from satisfaction of performance obligation by transferring promised good or service to customer. Tax collected from customer is tax assessed by governmental authority that is both imposed on and concurrent with specific revenue-producing transaction, including, but not limited to, sales, use, value-added and excise.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 41<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e9038-108599<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 50<br> -Paragraph 5<br> -URI https://asc.fasb.org/extlink&amp;oid=126920106&amp;loc=SL49130545-203045<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8933-108599<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8933-108599<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 30<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8906-108599<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 22<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8736-108599<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 22<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8736-108599<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 50<br> -Paragraph 4<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=126920106&amp;loc=SL49130543-203045<br><br>Reference 9: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 42<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e9054-108599<br><br>Reference 10: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 40<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e9031-108599<br><br>Reference 11: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 924<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB Topic 11.L)<br> -URI https://asc.fasb.org/extlink&amp;oid=6472922&amp;loc=d3e499488-122856<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RevenueFromContractWithCustomerIncludingAssessedTax</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SellingGeneralAndAdministrativeExpense">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The aggregate total costs related to selling a firm's product and services, as well as all other general and administrative expenses. Direct selling expenses (for example, credit, warranty, and advertising) are expenses that can be directly linked to the sale of specific products. Indirect selling expenses are expenses that cannot be directly linked to the sale of specific products, for example telephone expenses, Internet, and postal charges. General and administrative expenses include salaries of non-sales personnel, rent, utilities, communication, etc.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03.4)<br> -URI https://asc.fasb.org/extlink&amp;oid=126953954&amp;loc=SL114868664-224227<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SellingGeneralAndAdministrativeExpense</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The average number of shares or units issued and outstanding that are used in calculating diluted EPS or earnings per unit (EPU), determined based on the timing of issuance of shares or units in the period.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=124432515&amp;loc=d3e3550-109257<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 16<br> -URI https://asc.fasb.org/extlink&amp;oid=126958026&amp;loc=d3e1505-109256<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_WeightedAverageNumberOfSharesOutstandingBasic">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Number of [basic] shares or units, after adjustment for contingently issuable shares or units and other shares or units not deemed outstanding, determined by relating the portion of time within a reporting period that common shares or units have been outstanding to the total time in that period.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=124432515&amp;loc=d3e3550-109257<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 10<br> -URI https://asc.fasb.org/extlink&amp;oid=126958026&amp;loc=d3e1448-109256<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_WeightedAverageNumberOfSharesOutstandingBasic</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>18
<FILENAME>R5.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575600298160">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Consolidated Statements of Comprehensive Income (Loss) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="3">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract', window );"><strong>Consolidated Statements of Comprehensive Income</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_NetIncomeLoss', window );">Net income</a></td>
<td class="nump">$ 166,942<span></span>
</td>
<td class="nump">$ 26,038<span></span>
</td>
<td class="num">$ (8,391)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OtherComprehensiveIncomeAvailableforsaleSecuritiesAdjustmentNetOfTaxPortionAttributableToParentAbstract', window );"><strong>Available-for-sale securities:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OtherComprehensiveIncomeUnrealizedHoldingGainLossOnSecuritiesArisingDuringPeriodNetOfTax', window );">Change in net unrealized gains or losses</a></td>
<td class="num">(514)<span></span>
</td>
<td class="num">(311)<span></span>
</td>
<td class="num">(53)<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OtherComprehensiveIncomeAvailableforsaleSecuritiesAdjustmentNetOfTaxPortionAttributableToParent', window );">Unrealized gain (loss) on available-for-sale securities</a></td>
<td class="num">(514)<span></span>
</td>
<td class="num">(311)<span></span>
</td>
<td class="num">(53)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParentAbstract', window );"><strong>Currency translation adjustments:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationGainLossArisingDuringPeriodNetOfTax', window );">Change in currency translation adjustments</a></td>
<td class="nump">41<span></span>
</td>
<td class="nump">52<span></span>
</td>
<td class="num">(5)<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent', window );">Net changes related to currency translation adjustments</a></td>
<td class="num">(41)<span></span>
</td>
<td class="num">(52)<span></span>
</td>
<td class="nump">5<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent', window );">Total other comprehensive income (loss), net of tax</a></td>
<td class="num">(555)<span></span>
</td>
<td class="num">(363)<span></span>
</td>
<td class="num">(48)<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ComprehensiveIncomeNetOfTax', window );">Total comprehensive income</a></td>
<td class="nump">$ 166,387<span></span>
</td>
<td class="nump">$ 25,675<span></span>
</td>
<td class="num">$ (8,439)<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ComprehensiveIncomeNetOfTax">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount after tax of increase (decrease) in equity from transactions and other events and circumstances from net income and other comprehensive income, attributable to parent entity. Excludes changes in equity resulting from investments by owners and distributions to owners.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 220<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-04(22))<br> -URI https://asc.fasb.org/extlink&amp;oid=120400993&amp;loc=SL114874131-224263<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03(24))<br> -URI https://asc.fasb.org/extlink&amp;oid=126953954&amp;loc=SL114868664-224227<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 45<br> -Paragraph 5<br> -URI https://asc.fasb.org/extlink&amp;oid=126968391&amp;loc=d3e557-108580<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 220<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-04(26))<br> -URI https://asc.fasb.org/extlink&amp;oid=120399700&amp;loc=SL114874048-224260<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 45<br> -Paragraph 1B<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=126968391&amp;loc=SL7669625-108580<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 45<br> -Paragraph 1A<br> -Subparagraph (c)<br> -URI https://asc.fasb.org/extlink&amp;oid=126968391&amp;loc=SL7669619-108580<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ComprehensiveIncomeNetOfTax</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NetIncomeLoss">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The portion of profit or loss for the period, net of income taxes, which is attributable to the parent.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 220<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-04(22))<br> -URI https://asc.fasb.org/extlink&amp;oid=120399700&amp;loc=SL114874048-224260<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (f)<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8933-108599<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 4<br> -URI https://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22595-107794<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 220<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-04(18))<br> -URI https://asc.fasb.org/extlink&amp;oid=120400993&amp;loc=SL114874131-224263<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 815<br> -SubTopic 40<br> -Section 65<br> -Paragraph 1<br> -Subparagraph (f)<br> -URI https://asc.fasb.org/extlink&amp;oid=126732423&amp;loc=SL123482106-238011<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 50<br> -Paragraph 6<br> -URI https://asc.fasb.org/extlink&amp;oid=124431353&amp;loc=SL124452729-227067<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(5))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442552-122756<br><br>Reference 8: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03(20))<br> -URI https://asc.fasb.org/extlink&amp;oid=126953954&amp;loc=SL114868664-224227<br><br>Reference 9: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28<br> -URI https://asc.fasb.org/extlink&amp;oid=126954810&amp;loc=d3e3602-108585<br><br>Reference 10: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (b)(2)<br> -URI https://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22499-107794<br><br>Reference 11: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(iv))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442526-122756<br><br>Reference 12: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(iii)(A))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442526-122756<br><br>Reference 13: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(i))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442552-122756<br><br>Reference 14: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(i))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442526-122756<br><br>Reference 15: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 9<br> -URI https://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22663-107794<br><br>Reference 16: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(iv))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442552-122756<br><br>Reference 17: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(ii))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442526-122756<br><br>Reference 18: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 825<br> -SubTopic 10<br> -Section 50<br> -Paragraph 28<br> -Subparagraph (f)<br> -URI https://asc.fasb.org/extlink&amp;oid=123596393&amp;loc=d3e14064-108612<br><br>Reference 19: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -URI https://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22583-107794<br><br>Reference 20: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(g)(1)(ii))<br> -URI https://asc.fasb.org/extlink&amp;oid=120395691&amp;loc=d3e23780-122690<br><br>Reference 21: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 60B<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=126958026&amp;loc=SL5780133-109256<br><br>Reference 22: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 323<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (c)<br> -URI https://asc.fasb.org/extlink&amp;oid=114001798&amp;loc=d3e33918-111571<br><br>Reference 23: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -URI https://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22658-107794<br><br>Reference 24: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 45<br> -Paragraph 1A<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=126968391&amp;loc=SL7669619-108580<br><br>Reference 25: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 31<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8924-108599<br><br>Reference 26: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 11<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22694-107794<br><br>Reference 27: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 11<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22694-107794<br><br>Reference 28: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 205<br> -SubTopic 20<br> -Section 50<br> -Paragraph 7<br> -URI https://asc.fasb.org/extlink&amp;oid=109222650&amp;loc=SL51721683-107760<br><br>Reference 29: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 45<br> -Paragraph 1B<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=126968391&amp;loc=SL7669625-108580<br><br>Reference 30: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 22<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8736-108599<br><br>Reference 31: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(5))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442526-122756<br><br>Reference 32: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(iii)(B))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442552-122756<br><br>Reference 33: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(iii)(A))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442552-122756<br><br>Reference 34: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 30<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8906-108599<br><br>Reference 35: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (c)<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8933-108599<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NetIncomeLoss</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OtherComprehensiveIncomeAvailableforsaleSecuritiesAdjustmentNetOfTaxPortionAttributableToParent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount after tax and reclassification adjustments, of appreciation (loss) in value of unsold available-for-sale securities, attributable to parent entity. Excludes amounts related to other than temporary impairment (OTTI) loss.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1A<br> -Subparagraph (c)(3)<br> -URI https://asc.fasb.org/extlink&amp;oid=109239629&amp;loc=SL4573702-111684<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 45<br> -Paragraph 19<br> -URI https://asc.fasb.org/extlink&amp;oid=126929396&amp;loc=SL4569616-111683<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 45<br> -Paragraph 20<br> -URI https://asc.fasb.org/extlink&amp;oid=126929396&amp;loc=SL4569643-111683<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OtherComprehensiveIncomeAvailableforsaleSecuritiesAdjustmentNetOfTaxPortionAttributableToParent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OtherComprehensiveIncomeAvailableforsaleSecuritiesAdjustmentNetOfTaxPortionAttributableToParentAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OtherComprehensiveIncomeAvailableforsaleSecuritiesAdjustmentNetOfTaxPortionAttributableToParentAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount after tax and reclassification adjustments of gain (loss) on foreign currency translation adjustments, foreign currency transactions designated and effective as economic hedges of a net investment in a foreign entity and intra-entity foreign currency transactions that are of a long-term-investment nature, attributable to parent entity.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 45<br> -Paragraph 20<br> -URI https://asc.fasb.org/extlink&amp;oid=126929396&amp;loc=SL4569643-111683<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1A<br> -Subparagraph (c)(3)<br> -URI https://asc.fasb.org/extlink&amp;oid=109239629&amp;loc=SL4573702-111684<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 45<br> -Paragraph 19<br> -URI https://asc.fasb.org/extlink&amp;oid=126929396&amp;loc=SL4569616-111683<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParentAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParentAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationGainLossArisingDuringPeriodNetOfTax">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount after tax, before reclassification adjustments of gain (loss) on foreign currency translation adjustments, foreign currency transactions designated and effective as economic hedges of a net investment in a foreign entity and intra-entity foreign currency transactions that are of a long-term-investment nature.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 830<br> -SubTopic 20<br> -Section 35<br> -Paragraph 3<br> -URI https://asc.fasb.org/extlink&amp;oid=123602790&amp;loc=d3e30304-110892<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 830<br> -SubTopic 10<br> -Section 45<br> -Paragraph 9<br> -URI https://asc.fasb.org/extlink&amp;oid=126980362&amp;loc=d3e28129-110885<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 830<br> -SubTopic 30<br> -Section 45<br> -Paragraph 12<br> -URI https://asc.fasb.org/extlink&amp;oid=118261656&amp;loc=d3e32022-110900<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 45<br> -Paragraph 10A<br> -Subparagraph (a-c)<br> -URI https://asc.fasb.org/extlink&amp;oid=126968391&amp;loc=SL7669646-108580<br><br>Reference 5: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 45<br> -Paragraph 11<br> -URI https://asc.fasb.org/extlink&amp;oid=126968391&amp;loc=d3e637-108580<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationGainLossArisingDuringPeriodNetOfTax</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount after tax of other comprehensive income (loss) attributable to parent entity.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 45<br> -Paragraph 1B<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=126968391&amp;loc=SL7669625-108580<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1A<br> -Subparagraph (c)(3)<br> -URI https://asc.fasb.org/extlink&amp;oid=109239629&amp;loc=SL4573702-111684<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 45<br> -Paragraph 20<br> -URI https://asc.fasb.org/extlink&amp;oid=126929396&amp;loc=SL4569643-111683<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 45<br> -Paragraph 1A<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=126968391&amp;loc=SL7669619-108580<br><br>Reference 5: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 45<br> -Paragraph 19<br> -URI https://asc.fasb.org/extlink&amp;oid=126929396&amp;loc=SL4569616-111683<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OtherComprehensiveIncomeUnrealizedHoldingGainLossOnSecuritiesArisingDuringPeriodNetOfTax">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount, after tax and before adjustment, of unrealized holding gain (loss) on investment in debt security measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale). Excludes unrealized gain (loss) on investment in debt security measured at amortized cost (held-to-maturity) from transfer to available-for-sale.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 45<br> -Paragraph 10A<br> -Subparagraph (e)<br> -URI https://asc.fasb.org/extlink&amp;oid=126968391&amp;loc=SL7669646-108580<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 45<br> -Paragraph 11<br> -URI https://asc.fasb.org/extlink&amp;oid=126968391&amp;loc=d3e637-108580<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OtherComprehensiveIncomeUnrealizedHoldingGainLossOnSecuritiesArisingDuringPeriodNetOfTax</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>19
<FILENAME>R6.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575595776544">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Consolidated Statements of Stockholders' Equity - USD ($)<br> shares in Thousands, $ in Thousands</strong></div></th>
<th class="th"><div>Common Stock</div></th>
<th class="th">
<div>Additional Paid-in Capital </div>
<div>2025 Notes</div>
</th>
<th class="th">
<div>Additional Paid-in Capital </div>
<div>2027 Notes</div>
</th>
<th class="th">
<div>Additional Paid-in Capital </div>
<div>Cumulative Effect, Period of Adoption, Adjustment</div>
</th>
<th class="th"><div>Additional Paid-in Capital</div></th>
<th class="th">
<div>Accumulated Deficit </div>
<div>Cumulative Effect, Period of Adoption, Adjustment</div>
</th>
<th class="th"><div>Accumulated Deficit</div></th>
<th class="th"><div>Accumulated Other Comprehensive Income</div></th>
<th class="th"><div>2025 Notes</div></th>
<th class="th"><div>2027 Notes</div></th>
<th class="th"><div>Cumulative Effect, Period of Adoption, Adjustment</div></th>
<th class="th"><div>Total</div></th>
</tr>
<tr class="rc">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_StockholdersEquity', window );">Balance at the beginning of the period at Dec. 31, 2019</a></td>
<td class="nump">$ 490<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 1,071,058<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">$ (698,930)<span></span>
</td>
<td class="nump">$ 1,894<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 374,512<span></span>
</td>
</tr>
<tr class="rc">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_SharesOutstanding', window );">Balance (in shares) at Dec. 31, 2019</a></td>
<td class="nump">48,994<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncreaseDecreaseInStockholdersEquityRollForward', window );"><strong>Increase (Decrease) in Stockholders' Equity</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_NetIncomeLoss', window );">Net income (loss)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(8,391)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(8,391)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_OtherComprehensiveIncomeLossIncludingForeignCurrencyGainsLossesOnTransactionsIncludedInOperatingResultsNetOfTax', window );">Other comprehensive income (loss), net of tax</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(48)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(48)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue', window );">Share-based compensation expense</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">12,703<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">12,703<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_StockIssuedDuringPeriodValueShareBasedCompensation', window );">Net issuance under employee stock plans</a></td>
<td class="nump">$ 7<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">549<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">556<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_StockIssuedDuringPeriodSharesShareBasedCompensation', window );">Net issuance under employee stock plans (in shares)</a></td>
<td class="nump">730<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_AdjustmentsToAdditionalPaidInCapitalExtinguishmentEquityComponentOfNotesRepurchased', window );">Extinguishment of equity component of repurchased/exchanged 2023 Notes</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(14,714)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(14,714)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AdjustmentsToAdditionalPaidInCapitalEquityComponentOfConvertibleDebt', window );">Equity component of Notes</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 20,706<span></span>
</td>
<td class="nump">$ 33,363<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 20,706<span></span>
</td>
<td class="nump">$ 33,363<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_AdjustmentsToAdditionalPaidInCapitalPurchaseOfDerivativeInstrument', window );">Purchase of capped calls</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(10,313)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(10,313)<span></span>
</td>
</tr>
<tr class="rc">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_StockholdersEquity', window );">Balance at the end of the period at Dec. 31, 2020</a></td>
<td class="nump">$ 497<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">1,113,352<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(707,321)<span></span>
</td>
<td class="nump">1,846<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">408,374<span></span>
</td>
</tr>
<tr class="rc">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_SharesOutstanding', window );">Balance (in shares) at Dec. 31, 2020</a></td>
<td class="nump">49,724<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncreaseDecreaseInStockholdersEquityRollForward', window );"><strong>Increase (Decrease) in Stockholders' Equity</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_NetIncomeLoss', window );">Net income (loss)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">26,038<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">26,038<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_OtherComprehensiveIncomeLossIncludingForeignCurrencyGainsLossesOnTransactionsIncludedInOperatingResultsNetOfTax', window );">Other comprehensive income (loss), net of tax</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(363)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(363)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue', window );">Share-based compensation expense</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">15,249<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">15,249<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_StockIssuedDuringPeriodValueShareBasedCompensation', window );">Net issuance under employee stock plans</a></td>
<td class="nump">$ 10<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(5,600)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(5,590)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_StockIssuedDuringPeriodSharesShareBasedCompensation', window );">Net issuance under employee stock plans (in shares)</a></td>
<td class="nump">929<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_AdjustmentsToAdditionalPaidInCapitalExtinguishmentEquityComponentOfNotesRepurchased', window );">Extinguishment of equity component of repurchased/exchanged 2023 Notes</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(6,080)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(6,080)<span></span>
</td>
</tr>
<tr class="rc">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_StockholdersEquity', window );">Balance at the end of the period at Dec. 31, 2021</a></td>
<td class="nump">$ 507<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">$ (56,800)<span></span>
</td>
<td class="nump">1,116,921<span></span>
</td>
<td class="nump">$ 12,540<span></span>
</td>
<td class="num">(681,283)<span></span>
</td>
<td class="nump">1,483<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">$ (44,260)<span></span>
</td>
<td class="nump">437,628<span></span>
</td>
</tr>
<tr class="rc">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_SharesOutstanding', window );">Balance (in shares) at Dec. 31, 2021</a></td>
<td class="nump">50,653<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncreaseDecreaseInStockholdersEquityRollForward', window );"><strong>Increase (Decrease) in Stockholders' Equity</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_NetIncomeLoss', window );">Net income (loss)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">166,942<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">166,942<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_OtherComprehensiveIncomeLossIncludingForeignCurrencyGainsLossesOnTransactionsIncludedInOperatingResultsNetOfTax', window );">Other comprehensive income (loss), net of tax</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(555)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(555)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue', window );">Share-based compensation expense</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">22,994<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">22,994<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_StockIssuedDuringPeriodValueShareBasedCompensation', window );">Net issuance under employee stock plans</a></td>
<td class="nump">$ 10<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(4,935)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(4,925)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_StockIssuedDuringPeriodSharesShareBasedCompensation', window );">Net issuance under employee stock plans (in shares)</a></td>
<td class="nump">1,007<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rc">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_StockholdersEquity', window );">Balance at the end of the period at Dec. 31, 2022</a></td>
<td class="nump">$ 517<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 1,078,180<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">$ (501,801)<span></span>
</td>
<td class="nump">$ 928<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 577,824<span></span>
</td>
</tr>
<tr class="rc">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_SharesOutstanding', window );">Balance (in shares) at Dec. 31, 2022</a></td>
<td class="nump">51,660<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AdjustmentsToAdditionalPaidInCapitalEquityComponentOfConvertibleDebt">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Adjustment to additional paid in capital resulting from the recognition of convertible debt instruments as two separate components - a debt component and an equity component. This bifurcation may result in a basis difference associated with the liability component that represents a temporary difference for purposes of applying accounting for income taxes. The initial recognition of deferred taxes for the tax effect of that temporary difference is as an adjustment to additional paid in capital.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 25<br> -Paragraph 22<br> -URI https://asc.fasb.org/extlink&amp;oid=123466103&amp;loc=SL6014347-161799<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AdjustmentsToAdditionalPaidInCapitalEquityComponentOfConvertibleDebt</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of increase to additional paid-in capital (APIC) for recognition of cost for award under share-based payment arrangement.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 20<br> -Section 55<br> -Paragraph 12<br> -URI https://asc.fasb.org/extlink&amp;oid=126964447&amp;loc=d3e11149-113907<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 20<br> -Section 55<br> -Paragraph 13<br> -URI https://asc.fasb.org/extlink&amp;oid=126964447&amp;loc=d3e11178-113907<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 35<br> -Paragraph 2<br> -URI https://asc.fasb.org/extlink&amp;oid=126961718&amp;loc=d3e4534-113899<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncreaseDecreaseInStockholdersEquityRollForward">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>A roll forward is a reconciliation of a concept from the beginning of a period to the end of a period.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncreaseDecreaseInStockholdersEquityRollForward</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NetIncomeLoss">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The portion of profit or loss for the period, net of income taxes, which is attributable to the parent.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 220<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-04(22))<br> -URI https://asc.fasb.org/extlink&amp;oid=120399700&amp;loc=SL114874048-224260<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (f)<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8933-108599<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 4<br> -URI https://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22595-107794<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 220<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-04(18))<br> -URI https://asc.fasb.org/extlink&amp;oid=120400993&amp;loc=SL114874131-224263<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 815<br> -SubTopic 40<br> -Section 65<br> -Paragraph 1<br> -Subparagraph (f)<br> -URI https://asc.fasb.org/extlink&amp;oid=126732423&amp;loc=SL123482106-238011<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 50<br> -Paragraph 6<br> -URI https://asc.fasb.org/extlink&amp;oid=124431353&amp;loc=SL124452729-227067<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(5))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442552-122756<br><br>Reference 8: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03(20))<br> -URI https://asc.fasb.org/extlink&amp;oid=126953954&amp;loc=SL114868664-224227<br><br>Reference 9: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28<br> -URI https://asc.fasb.org/extlink&amp;oid=126954810&amp;loc=d3e3602-108585<br><br>Reference 10: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (b)(2)<br> -URI https://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22499-107794<br><br>Reference 11: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(iv))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442526-122756<br><br>Reference 12: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(iii)(A))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442526-122756<br><br>Reference 13: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(i))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442552-122756<br><br>Reference 14: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(i))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442526-122756<br><br>Reference 15: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 9<br> -URI https://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22663-107794<br><br>Reference 16: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(iv))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442552-122756<br><br>Reference 17: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(ii))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442526-122756<br><br>Reference 18: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 825<br> -SubTopic 10<br> -Section 50<br> -Paragraph 28<br> -Subparagraph (f)<br> -URI https://asc.fasb.org/extlink&amp;oid=123596393&amp;loc=d3e14064-108612<br><br>Reference 19: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -URI https://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22583-107794<br><br>Reference 20: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(g)(1)(ii))<br> -URI https://asc.fasb.org/extlink&amp;oid=120395691&amp;loc=d3e23780-122690<br><br>Reference 21: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 60B<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=126958026&amp;loc=SL5780133-109256<br><br>Reference 22: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 323<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (c)<br> -URI https://asc.fasb.org/extlink&amp;oid=114001798&amp;loc=d3e33918-111571<br><br>Reference 23: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -URI https://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22658-107794<br><br>Reference 24: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 45<br> -Paragraph 1A<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=126968391&amp;loc=SL7669619-108580<br><br>Reference 25: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 31<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8924-108599<br><br>Reference 26: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 11<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22694-107794<br><br>Reference 27: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 11<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22694-107794<br><br>Reference 28: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 205<br> -SubTopic 20<br> -Section 50<br> -Paragraph 7<br> -URI https://asc.fasb.org/extlink&amp;oid=109222650&amp;loc=SL51721683-107760<br><br>Reference 29: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 45<br> -Paragraph 1B<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=126968391&amp;loc=SL7669625-108580<br><br>Reference 30: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 22<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8736-108599<br><br>Reference 31: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(5))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442526-122756<br><br>Reference 32: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(iii)(B))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442552-122756<br><br>Reference 33: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(iii)(A))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442552-122756<br><br>Reference 34: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 30<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8906-108599<br><br>Reference 35: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (c)<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8933-108599<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NetIncomeLoss</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SharesOutstanding">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Number of shares issued which are neither cancelled nor held in the treasury.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SharesOutstanding</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StockIssuedDuringPeriodSharesShareBasedCompensation">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Number, after forfeiture, of shares or units issued under share-based payment arrangement. Excludes shares or units issued under employee stock ownership plan (ESOP).</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -URI https://asc.fasb.org/extlink&amp;oid=126973232&amp;loc=d3e21463-112644<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.3-04)<br> -URI https://asc.fasb.org/extlink&amp;oid=120397183&amp;loc=d3e187085-122770<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(28))<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(29))<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StockIssuedDuringPeriodSharesShareBasedCompensation</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StockIssuedDuringPeriodValueShareBasedCompensation">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Value, after forfeiture, of shares issued under share-based payment arrangement. Excludes employee stock ownership plan (ESOP).</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.3-04)<br> -URI https://asc.fasb.org/extlink&amp;oid=120397183&amp;loc=d3e187085-122770<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(28))<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(29))<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (d)(1)<br> -URI https://asc.fasb.org/extlink&amp;oid=128089324&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StockIssuedDuringPeriodValueShareBasedCompensation</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StockholdersEquity">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Total of all stockholders' equity (deficit) items, net of receivables from officers, directors, owners, and affiliates of the entity which are attributable to the parent. The amount of the economic entity's stockholders' equity attributable to the parent excludes the amount of stockholders' equity which is allocable to that ownership interest in subsidiary equity which is not attributable to the parent (noncontrolling interest, minority interest). This excludes temporary equity and is sometimes called permanent equity.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(g)(1)(ii))<br> -URI https://asc.fasb.org/extlink&amp;oid=120395691&amp;loc=d3e23780-122690<br><br>Reference 2: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 852<br> -SubTopic 10<br> -Section 55<br> -Paragraph 10<br> -URI https://asc.fasb.org/extlink&amp;oid=84165509&amp;loc=d3e56426-112766<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 310<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SAB Topic 4.E)<br> -URI https://asc.fasb.org/extlink&amp;oid=122038336&amp;loc=d3e74512-122707<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(31))<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 5: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(29))<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 6: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(30))<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 7: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 825<br> -SubTopic 10<br> -Section 50<br> -Paragraph 28<br> -Subparagraph (f)<br> -URI https://asc.fasb.org/extlink&amp;oid=123596393&amp;loc=d3e14064-108612<br><br>Reference 8: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 323<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (c)<br> -URI https://asc.fasb.org/extlink&amp;oid=114001798&amp;loc=d3e33918-111571<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StockholdersEquity</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_AdjustmentsToAdditionalPaidInCapitalExtinguishmentEquityComponentOfNotesRepurchased">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of adjustment to additional paid in capital (APIC) resulting from extinguishment of equity component of repurchased or exchanged notes.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_AdjustmentsToAdditionalPaidInCapitalExtinguishmentEquityComponentOfNotesRepurchased</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_AdjustmentsToAdditionalPaidInCapitalPurchaseOfDerivativeInstrument">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of adjustment to additional paid in capital (APIC) resulting from purchase of derivative instruments.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_AdjustmentsToAdditionalPaidInCapitalPurchaseOfDerivativeInstrument</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_OtherComprehensiveIncomeLossIncludingForeignCurrencyGainsLossesOnTransactionsIncludedInOperatingResultsNetOfTax">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount after tax and reclassification adjustments of other comprehensive income (loss). Includes foreign currency gains (losses) on transactions included in operating results.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_OtherComprehensiveIncomeLossIncludingForeignCurrencyGainsLossesOnTransactionsIncludedInOperatingResultsNetOfTax</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>20
<FILENAME>R7.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575599138368">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Consolidated Statements of Cash Flows - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="3">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_NetCashProvidedByUsedInOperatingActivitiesContinuingOperationsAbstract', window );"><strong>Cash Flows from Operating Activities</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ProfitLoss', window );">Net income</a></td>
<td class="nump">$ 166,942<span></span>
</td>
<td class="nump">$ 26,038<span></span>
</td>
<td class="num">$ (8,391)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract', window );"><strong>Adjustments to reconcile net income to net cash provided by (used in) operating activities:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DepreciationDepletionAndAmortization', window );">Depreciation and amortization</a></td>
<td class="nump">25,645<span></span>
</td>
<td class="nump">26,058<span></span>
</td>
<td class="nump">30,697<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AmortizationOfFinancingCostsAndDiscounts', window );">Non-cash interest expense</a></td>
<td class="nump">962<span></span>
</td>
<td class="nump">13,819<span></span>
</td>
<td class="nump">13,792<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DeferredIncomeTaxExpenseBenefit', window );">Deferred income taxes</a></td>
<td class="num">(118,040)<span></span>
</td>
<td class="num">(651)<span></span>
</td>
<td class="num">(299)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensation', window );">Share-based compensation expense</a></td>
<td class="nump">22,994<span></span>
</td>
<td class="nump">15,249<span></span>
</td>
<td class="nump">12,703<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_GainsLossesOnExtinguishmentOfDebt', window );">Loss on extinguishment of debt</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">4,029<span></span>
</td>
<td class="nump">7,841<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AssetImpairmentCharges', window );">Asset impairment</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">281<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_ImpairmentLossesInvestmentsNonCash', window );">Impairment of equity investments</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">980<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ProvisionForDoubtfulAccounts', window );">Provision for bad debts</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">140<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncreaseDecreaseInOperatingCapitalAbstract', window );"><strong>Changes in operating assets and liabilities:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_IncreaseDecreaseInAccountsReceivableAndContractAssets', window );">Accounts receivable and contract assets</a></td>
<td class="num">(12,826)<span></span>
</td>
<td class="num">(26,664)<span></span>
</td>
<td class="num">(30,361)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncreaseDecreaseInInventories', window );">Inventories</a></td>
<td class="num">(37,288)<span></span>
</td>
<td class="num">(24,803)<span></span>
</td>
<td class="num">(11,528)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets', window );">Prepaid expenses and other current assets</a></td>
<td class="nump">7,668<span></span>
</td>
<td class="nump">7,621<span></span>
</td>
<td class="num">(2,610)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncreaseDecreaseInAccountsPayableAndAccruedLiabilities', window );">Accounts payable and accrued expenses</a></td>
<td class="num">(13,115)<span></span>
</td>
<td class="nump">20,225<span></span>
</td>
<td class="nump">15,959<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_IncreaseDecreaseInCustomerDepositsAndDeferredRevenue', window );">Customer deposits and deferred revenue</a></td>
<td class="nump">64,087<span></span>
</td>
<td class="num">(4,099)<span></span>
</td>
<td class="nump">12,424<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncreaseDecreaseInIncomeTaxesPayableNetOfIncomeTaxesReceivable', window );">Income taxes receivable and payable, net</a></td>
<td class="nump">557<span></span>
</td>
<td class="nump">947<span></span>
</td>
<td class="nump">86<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncreaseDecreaseInOtherOperatingCapitalNet', window );">Other, net</a></td>
<td class="nump">897<span></span>
</td>
<td class="nump">8,993<span></span>
</td>
<td class="nump">2,287<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_NetCashProvidedByUsedInOperatingActivities', window );">Net cash provided by (used in) operating activities</a></td>
<td class="nump">108,483<span></span>
</td>
<td class="nump">67,742<span></span>
</td>
<td class="nump">43,021<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_NetCashProvidedByUsedInInvestingActivitiesContinuingOperationsAbstract', window );"><strong>Cash Flows from Investing Activities</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PaymentsToAcquirePropertyPlantAndEquipment', window );">Capital expenditures</a></td>
<td class="num">(24,604)<span></span>
</td>
<td class="num">(40,643)<span></span>
</td>
<td class="num">(6,802)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ProceedsFromSaleAndMaturityOfAvailableForSaleSecurities', window );">Proceeds from the sale of investments</a></td>
<td class="nump">59,738<span></span>
</td>
<td class="nump">330,702<span></span>
</td>
<td class="nump">173,530<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PaymentsToAcquireAvailableForSaleSecuritiesDebt', window );">Payments for purchases of investments</a></td>
<td class="num">(104,014)<span></span>
</td>
<td class="num">(247,256)<span></span>
</td>
<td class="num">(248,023)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ProceedsFromSaleOfPropertyPlantAndEquipment', window );">Proceeds from held for sale assets, net of costs to sell</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">1,725<span></span>
</td>
<td class="nump">9,503<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_NetCashProvidedByUsedInInvestingActivities', window );">Net cash provided by (used in) investing activities</a></td>
<td class="num">(68,880)<span></span>
</td>
<td class="nump">44,528<span></span>
</td>
<td class="num">(71,792)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_NetCashProvidedByUsedInFinancingActivitiesContinuingOperationsAbstract', window );"><strong>Cash Flows from Financing Activities</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ProceedsFromConvertibleDebt', window );">Proceeds from issuance of 2027 Notes, net of issuance costs</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">120,095<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PaymentsForDerivativeInstrumentFinancingActivities', window );">Purchase of capped calls</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(10,313)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_RepaymentsOfUnsecuredDebt', window );">Repurchase of 2023 Notes</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(115,604)<span></span>
</td>
<td class="num">(81,240)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PaymentsOfDebtIssuanceCosts', window );">Debt issuance costs</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(835)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ProceedsFromIssuanceOrSaleOfEquity', window );">Proceeds (net of tax withholdings) from option exercises and employee stock purchase plan</a></td>
<td class="nump">3,698<span></span>
</td>
<td class="nump">3,402<span></span>
</td>
<td class="nump">2,878<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PaymentsRelatedToTaxWithholdingForShareBasedCompensation', window );">Restricted stock tax withholdings</a></td>
<td class="num">(8,248)<span></span>
</td>
<td class="num">(8,992)<span></span>
</td>
<td class="num">(2,322)<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_NetCashProvidedByUsedInFinancingActivities', window );">Net cash provided by (used in) financing activities</a></td>
<td class="num">(4,550)<span></span>
</td>
<td class="num">(122,029)<span></span>
</td>
<td class="nump">29,098<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations', window );">Effect of exchange rate changes on cash and cash equivalents</a></td>
<td class="num">(53)<span></span>
</td>
<td class="num">(52)<span></span>
</td>
<td class="nump">5<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect', window );">Net increase (decrease) in cash, cash equivalents, and restricted cash</a></td>
<td class="nump">35,000<span></span>
</td>
<td class="num">(9,811)<span></span>
</td>
<td class="nump">332<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents', window );">Cash, cash equivalents, and restricted cash - beginning of period</a></td>
<td class="nump">120,472<span></span>
</td>
<td class="nump">130,283<span></span>
</td>
<td class="nump">129,951<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents', window );">Cash, cash equivalents, and restricted cash - end of period</a></td>
<td class="nump">155,472<span></span>
</td>
<td class="nump">120,472<span></span>
</td>
<td class="nump">130,283<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_SupplementalCashFlowInformationAbstract', window );"><strong>Supplemental Disclosure of Cash Flow Information</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_InterestPaidNet', window );">Interest paid</a></td>
<td class="nump">10,139<span></span>
</td>
<td class="nump">12,551<span></span>
</td>
<td class="nump">12,700<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncomeTaxesPaidNet', window );">Income taxes paid (refunds received)</a></td>
<td class="nump">1,434<span></span>
</td>
<td class="num">(139)<span></span>
</td>
<td class="nump">329<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_NonCashOperatingAndFinancingActivitiesAbstract', window );"><strong>Non-cash activities</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_CapitalExpendituresIncurredButNotYetPaid', window );">Capital expenditures included in accounts payable and accrued expenses</a></td>
<td class="nump">2,285<span></span>
</td>
<td class="nump">9,096<span></span>
</td>
<td class="nump">687<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_TransferFromInventories', window );">Net transfer of inventory to property, plant and equipment</a></td>
<td class="nump">1,235<span></span>
</td>
<td class="num">(63)<span></span>
</td>
<td class="num">(1,624)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability', window );">Right-of-use assets obtained in exchange for lease obligations</a></td>
<td class="nump">$ 2,938<span></span>
</td>
<td class="nump">$ 23,777<span></span>
</td>
<td class="nump">$ 1,741<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AmortizationOfFinancingCostsAndDiscounts">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of amortization expense attributable to debt discount (premium) and debt issuance costs.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=126954810&amp;loc=d3e3602-108585<br><br>Reference 2: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 55<br> -Paragraph 69E<br> -URI https://asc.fasb.org/extlink&amp;oid=123466577&amp;loc=SL123495743-112612<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 835<br> -SubTopic 30<br> -Section 45<br> -Paragraph 3<br> -URI https://asc.fasb.org/extlink&amp;oid=124435984&amp;loc=d3e28555-108399<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1F<br> -Subparagraph (b)(2)<br> -URI https://asc.fasb.org/extlink&amp;oid=123466505&amp;loc=SL123495355-112611<br><br>Reference 5: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 55<br> -Paragraph 69F<br> -URI https://asc.fasb.org/extlink&amp;oid=123466577&amp;loc=SL123495745-112612<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AmortizationOfFinancingCostsAndDiscounts</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AssetImpairmentCharges">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of write-down of assets recognized in the income statement. Includes, but is not limited to, losses from tangible assets, intangible assets and goodwill.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=126954810&amp;loc=d3e3602-108585<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 360<br> -SubTopic 10<br> -Section 45<br> -Paragraph 4<br> -URI https://asc.fasb.org/extlink&amp;oid=126905981&amp;loc=d3e2420-110228<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AssetImpairmentCharges</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CapitalExpendituresIncurredButNotYetPaid">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Future cash outflow to pay for purchases of fixed assets that have occurred.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 50<br> -Paragraph 5<br> -URI https://asc.fasb.org/extlink&amp;oid=126999549&amp;loc=d3e4332-108586<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 50<br> -Paragraph 4<br> -URI https://asc.fasb.org/extlink&amp;oid=126999549&amp;loc=d3e4313-108586<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -URI https://asc.fasb.org/extlink&amp;oid=126999549&amp;loc=d3e4304-108586<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CapitalExpendituresIncurredButNotYetPaid</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of cash and cash equivalents, and cash and cash equivalents restricted to withdrawal or usage. Excludes amount for disposal group and discontinued operations. Cash includes, but is not limited to, currency on hand, demand deposits with banks or financial institutions, and other accounts with general characteristics of demand deposits. Cash equivalents include, but are not limited to, short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 24<br> -URI https://asc.fasb.org/extlink&amp;oid=126954810&amp;loc=d3e3521-108585<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 4<br> -URI https://asc.fasb.org/extlink&amp;oid=126954810&amp;loc=d3e3044-108585<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -URI https://asc.fasb.org/extlink&amp;oid=126999549&amp;loc=SL98516268-108586<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of increase (decrease) in cash, cash equivalents, and cash and cash equivalents restricted to withdrawal or usage; including effect from exchange rate change. Cash includes, but is not limited to, currency on hand, demand deposits with banks or financial institutions, and other accounts with general characteristics of demand deposits. Cash equivalents include, but are not limited to, short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 830<br> -SubTopic 230<br> -Section 45<br> -Paragraph 1<br> -URI https://asc.fasb.org/extlink&amp;oid=123444420&amp;loc=d3e33268-110906<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 24<br> -URI https://asc.fasb.org/extlink&amp;oid=126954810&amp;loc=d3e3521-108585<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredIncomeTaxExpenseBenefit">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of deferred income tax expense (benefit) pertaining to income (loss) from continuing operations.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB Topic 6.I.7)<br> -URI https://asc.fasb.org/extlink&amp;oid=122134291&amp;loc=d3e330036-122817<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB Topic 6.I.Fact.1)<br> -URI https://asc.fasb.org/extlink&amp;oid=122134291&amp;loc=d3e330036-122817<br><br>Reference 3: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(h)(1)(Note 1))<br> -URI https://asc.fasb.org/extlink&amp;oid=120395691&amp;loc=d3e23780-122690<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB Topic 6.I.Fact.2)<br> -URI https://asc.fasb.org/extlink&amp;oid=122134291&amp;loc=d3e330036-122817<br><br>Reference 5: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=126954810&amp;loc=d3e3602-108585<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 9<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32639-109319<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredIncomeTaxExpenseBenefit</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DepreciationDepletionAndAmortization">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The aggregate expense recognized in the current period that allocates the cost of tangible assets, intangible assets, or depleting assets to periods that benefit from use of the assets.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 22<br> -Subparagraph (e)<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8736-108599<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=126954810&amp;loc=d3e3602-108585<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DepreciationDepletionAndAmortization</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of increase (decrease) from effect of exchange rate changes on cash and cash equivalents, and cash and cash equivalents restricted to withdrawal or usage; held in foreign currencies; including, but not limited to, disposal group and discontinued operations. Cash includes, but is not limited to, currency on hand, demand deposits with banks or financial institutions, and other accounts with general characteristics of demand deposits. Cash equivalents include, but are not limited to, short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 830<br> -SubTopic 230<br> -Section 45<br> -Paragraph 1<br> -URI https://asc.fasb.org/extlink&amp;oid=123444420&amp;loc=d3e33268-110906<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_GainsLossesOnExtinguishmentOfDebt">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Difference between the fair value of payments made and the carrying amount of debt which is extinguished prior to maturity.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 50<br> -Section 40<br> -Paragraph 4<br> -URI https://asc.fasb.org/extlink&amp;oid=126972273&amp;loc=d3e12355-112629<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 50<br> -Section 40<br> -Paragraph 2<br> -URI https://asc.fasb.org/extlink&amp;oid=126972273&amp;loc=d3e12317-112629<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=126954810&amp;loc=d3e3602-108585<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_GainsLossesOnExtinguishmentOfDebt</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxesPaidNet">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The amount of cash paid during the current period to foreign, federal, state, and local authorities as taxes on income, net of any cash received during the current period as refunds for the overpayment of taxes.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -URI https://asc.fasb.org/extlink&amp;oid=126999549&amp;loc=d3e4297-108586<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeTaxesPaidNet</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncreaseDecreaseInAccountsPayableAndAccruedLiabilities">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The increase (decrease) during the reporting period in the amounts payable to vendors for goods and services received and the amount of obligations and expenses incurred but not paid.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=126954810&amp;loc=d3e3602-108585<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncreaseDecreaseInAccountsPayableAndAccruedLiabilities</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncreaseDecreaseInIncomeTaxesPayableNetOfIncomeTaxesReceivable">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The increase (decrease) during the reporting period in the amounts payable to taxing authorities for taxes that are based on the reporting entity's earnings, net of amounts receivable from taxing authorities for refunds of overpayments or recoveries of income taxes.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=126954810&amp;loc=d3e3602-108585<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncreaseDecreaseInIncomeTaxesPayableNetOfIncomeTaxesReceivable</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncreaseDecreaseInInventories">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The increase (decrease) during the reporting period in the aggregate value of all inventory held by the reporting entity, associated with underlying transactions that are classified as operating activities.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=126954810&amp;loc=d3e3602-108585<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncreaseDecreaseInInventories</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncreaseDecreaseInOperatingCapitalAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncreaseDecreaseInOperatingCapitalAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncreaseDecreaseInOtherOperatingCapitalNet">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of increase (decrease) in operating assets after deduction of operating liabilities classified as other.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=126954810&amp;loc=d3e3602-108585<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncreaseDecreaseInOtherOperatingCapitalNet</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of increase (decrease) in prepaid expenses, and assets classified as other.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=126954810&amp;loc=d3e3602-108585<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InterestPaidNet">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of cash paid for interest, excluding capitalized interest, classified as operating activity. Includes, but is not limited to, payment to settle zero-coupon bond for accreted interest of debt discount and debt instrument with insignificant coupon interest rate in relation to effective interest rate of borrowing attributable to accreted interest of debt discount.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -URI https://asc.fasb.org/extlink&amp;oid=126999549&amp;loc=d3e4297-108586<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 17<br> -Subparagraph (d)<br> -URI https://asc.fasb.org/extlink&amp;oid=126954810&amp;loc=d3e3367-108585<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 25<br> -Subparagraph (e)<br> -URI https://asc.fasb.org/extlink&amp;oid=126954810&amp;loc=d3e3536-108585<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InterestPaidNet</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NetCashProvidedByUsedInFinancingActivities">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of cash inflow (outflow) from financing activities, including discontinued operations. Financing activity cash flows include obtaining resources from owners and providing them with a return on, and a return of, their investment; borrowing money and repaying amounts borrowed, or settling the obligation; and obtaining and paying for other resources obtained from creditors on long-term credit.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 24<br> -URI https://asc.fasb.org/extlink&amp;oid=126954810&amp;loc=d3e3521-108585<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NetCashProvidedByUsedInFinancingActivities</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NetCashProvidedByUsedInFinancingActivitiesContinuingOperationsAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NetCashProvidedByUsedInFinancingActivitiesContinuingOperationsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NetCashProvidedByUsedInInvestingActivities">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of cash inflow (outflow) from investing activities, including discontinued operations. Investing activity cash flows include making and collecting loans and acquiring and disposing of debt or equity instruments and property, plant, and equipment and other productive assets.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 24<br> -URI https://asc.fasb.org/extlink&amp;oid=126954810&amp;loc=d3e3521-108585<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NetCashProvidedByUsedInInvestingActivities</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NetCashProvidedByUsedInInvestingActivitiesContinuingOperationsAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NetCashProvidedByUsedInInvestingActivitiesContinuingOperationsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NetCashProvidedByUsedInOperatingActivities">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of cash inflow (outflow) from operating activities, including discontinued operations. Operating activity cash flows include transactions, adjustments, and changes in value not defined as investing or financing activities.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 25<br> -URI https://asc.fasb.org/extlink&amp;oid=126954810&amp;loc=d3e3536-108585<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 24<br> -URI https://asc.fasb.org/extlink&amp;oid=126954810&amp;loc=d3e3521-108585<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28<br> -URI https://asc.fasb.org/extlink&amp;oid=126954810&amp;loc=d3e3602-108585<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NetCashProvidedByUsedInOperatingActivities</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NetCashProvidedByUsedInOperatingActivitiesContinuingOperationsAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NetCashProvidedByUsedInOperatingActivitiesContinuingOperationsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PaymentsForDerivativeInstrumentFinancingActivities">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The cash outflow for derivative instruments during the period, which are classified as financing activities, excluding those designated as hedging instruments.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 15<br> -Subparagraph (d)<br> -URI https://asc.fasb.org/extlink&amp;oid=126954810&amp;loc=d3e3291-108585<br><br>Reference 2: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 23<br> -URI https://asc.fasb.org/extlink&amp;oid=126954810&amp;loc=d3e3505-108585<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PaymentsForDerivativeInstrumentFinancingActivities</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PaymentsOfDebtIssuanceCosts">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The cash outflow paid to third parties in connection with debt origination, which will be amortized over the remaining maturity period of the associated long-term debt.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 15<br> -Subparagraph (e)<br> -URI https://asc.fasb.org/extlink&amp;oid=126954810&amp;loc=d3e3291-108585<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PaymentsOfDebtIssuanceCosts</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PaymentsRelatedToTaxWithholdingForShareBasedCompensation">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of cash outflow to satisfy grantee's tax withholding obligation for award under share-based payment arrangement.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 15<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=126954810&amp;loc=d3e3291-108585<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PaymentsRelatedToTaxWithholdingForShareBasedCompensation</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PaymentsToAcquireAvailableForSaleSecuritiesDebt">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of cash outflow to acquire investment in debt security measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale).</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 13<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=126954810&amp;loc=d3e3213-108585<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 11<br> -URI https://asc.fasb.org/extlink&amp;oid=126954810&amp;loc=d3e3151-108585<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 320<br> -SubTopic 10<br> -Section 45<br> -Paragraph 11<br> -URI https://asc.fasb.org/extlink&amp;oid=124260329&amp;loc=d3e26853-111562<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PaymentsToAcquireAvailableForSaleSecuritiesDebt</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PaymentsToAcquirePropertyPlantAndEquipment">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The cash outflow associated with the acquisition of long-lived, physical assets that are used in the normal conduct of business to produce goods and services and not intended for resale; includes cash outflows to pay for construction of self-constructed assets.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 13<br> -Subparagraph (c)<br> -URI https://asc.fasb.org/extlink&amp;oid=126954810&amp;loc=d3e3213-108585<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PaymentsToAcquirePropertyPlantAndEquipment</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProceedsFromConvertibleDebt">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The cash inflow from the issuance of a long-term debt instrument which can be exchanged for a specified amount of another security, typically the entity's common stock, at the option of the issuer or the holder.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 14<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=126954810&amp;loc=d3e3255-108585<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProceedsFromConvertibleDebt</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProceedsFromIssuanceOrSaleOfEquity">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The cash inflow from the issuance of common stock, preferred stock, treasury stock, stock options, and other types of equity.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 14<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=126954810&amp;loc=d3e3255-108585<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProceedsFromIssuanceOrSaleOfEquity</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProceedsFromSaleAndMaturityOfAvailableForSaleSecurities">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of cash inflow from sale, maturity, prepayment and call of investment in debt security measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale).</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 11<br> -URI https://asc.fasb.org/extlink&amp;oid=126954810&amp;loc=d3e3151-108585<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 12<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=126954810&amp;loc=d3e3179-108585<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 320<br> -SubTopic 10<br> -Section 45<br> -Paragraph 11<br> -URI https://asc.fasb.org/extlink&amp;oid=124260329&amp;loc=d3e26853-111562<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProceedsFromSaleAndMaturityOfAvailableForSaleSecurities</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProceedsFromSaleOfPropertyPlantAndEquipment">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The cash inflow from the sale of long-lived, physical assets that are used in the normal conduct of business to produce goods and services and not intended for resale.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 12<br> -Subparagraph (c)<br> -URI https://asc.fasb.org/extlink&amp;oid=126954810&amp;loc=d3e3179-108585<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProceedsFromSaleOfPropertyPlantAndEquipment</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProfitLoss">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The consolidated profit or loss for the period, net of income taxes, including the portion attributable to the noncontrolling interest.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(g)(1)(ii))<br> -URI https://asc.fasb.org/extlink&amp;oid=120395691&amp;loc=d3e23780-122690<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 45<br> -Paragraph 1A<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=126968391&amp;loc=SL7669619-108580<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1A<br> -Subparagraph (a)(1)<br> -URI https://asc.fasb.org/extlink&amp;oid=109239629&amp;loc=SL4573702-111684<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 9<br> -URI https://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22663-107794<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(i))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442526-122756<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(i))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442552-122756<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 22<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8736-108599<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (c)<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8933-108599<br><br>Reference 9: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 815<br> -SubTopic 40<br> -Section 65<br> -Paragraph 1<br> -Subparagraph (f)<br> -URI https://asc.fasb.org/extlink&amp;oid=126732423&amp;loc=SL123482106-238011<br><br>Reference 10: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(5))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442526-122756<br><br>Reference 11: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(iv))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442552-122756<br><br>Reference 12: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 50<br> -Paragraph 6<br> -URI https://asc.fasb.org/extlink&amp;oid=124431353&amp;loc=SL124452729-227067<br><br>Reference 13: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 30<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8906-108599<br><br>Reference 14: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 2<br> -URI https://asc.fasb.org/extlink&amp;oid=126954810&amp;loc=d3e3000-108585<br><br>Reference 15: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 45<br> -Paragraph 19<br> -URI https://asc.fasb.org/extlink&amp;oid=126929396&amp;loc=SL4569616-111683<br><br>Reference 16: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 323<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (c)<br> -URI https://asc.fasb.org/extlink&amp;oid=114001798&amp;loc=d3e33918-111571<br><br>Reference 17: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (f)<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8933-108599<br><br>Reference 18: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(iii)(A))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442552-122756<br><br>Reference 19: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 205<br> -SubTopic 20<br> -Section 50<br> -Paragraph 7<br> -URI https://asc.fasb.org/extlink&amp;oid=109222650&amp;loc=SL51721683-107760<br><br>Reference 20: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (b)(2)<br> -URI https://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22499-107794<br><br>Reference 21: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 825<br> -SubTopic 10<br> -Section 50<br> -Paragraph 28<br> -Subparagraph (f)<br> -URI https://asc.fasb.org/extlink&amp;oid=123596393&amp;loc=d3e14064-108612<br><br>Reference 22: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 235<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-05(b)(2))<br> -URI https://asc.fasb.org/extlink&amp;oid=120399901&amp;loc=d3e537907-122884<br><br>Reference 23: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 31<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8924-108599<br><br>Reference 24: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 45<br> -Paragraph 1B<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=126968391&amp;loc=SL7669625-108580<br><br>Reference 25: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(iv))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442526-122756<br><br>Reference 26: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(iii)(A))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442526-122756<br><br>Reference 27: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(5))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442552-122756<br><br>Reference 28: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(iii)(B))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442552-122756<br><br>Reference 29: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(ii))<br> -URI https://asc.fasb.org/extlink&amp;oid=126975872&amp;loc=SL124442526-122756<br><br>Reference 30: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1A<br> -Subparagraph (c)(1)<br> -URI https://asc.fasb.org/extlink&amp;oid=109239629&amp;loc=SL4573702-111684<br><br>Reference 31: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 55<br> -Paragraph 4J<br> -URI https://asc.fasb.org/extlink&amp;oid=120409616&amp;loc=SL4591551-111686<br><br>Reference 32: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 55<br> -Paragraph 4K<br> -URI https://asc.fasb.org/extlink&amp;oid=120409616&amp;loc=SL4591552-111686<br><br>Reference 33: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -URI https://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22658-107794<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProfitLoss</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProvisionForDoubtfulAccounts">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of expense (reversal of expense) for expected credit loss on accounts receivable.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 326<br> -SubTopic 20<br> -Section 50<br> -Paragraph 13<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=124255953&amp;loc=SL82919249-210447<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03(5))<br> -URI https://asc.fasb.org/extlink&amp;oid=126953954&amp;loc=SL114868664-224227<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProvisionForDoubtfulAccounts</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RepaymentsOfUnsecuredDebt">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The cash outflow to repay long-term debt that is not secured by collateral. Excludes repayments of tax exempt unsecured debt.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 15<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=126954810&amp;loc=d3e3291-108585<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RepaymentsOfUnsecuredDebt</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of increase in right-of-use asset obtained in exchange for operating lease liability.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 55<br> -Paragraph 53<br> -URI https://asc.fasb.org/extlink&amp;oid=123414884&amp;loc=SL77918982-209971<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 50<br> -Paragraph 4<br> -Subparagraph (g)(2)<br> -URI https://asc.fasb.org/extlink&amp;oid=128292326&amp;loc=SL77918686-209980<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensation">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of noncash expense for share-based payment arrangement.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=126954810&amp;loc=d3e3602-108585<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensation</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SupplementalCashFlowInformationAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SupplementalCashFlowInformationAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_ImpairmentLossesInvestmentsNonCash">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The amount of non-cash impairment charge on investments.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_ImpairmentLossesInvestmentsNonCash</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_IncreaseDecreaseInAccountsReceivableAndContractAssets">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The increase (decrease) during the reporting period in amount due within one year (or one business cycle) from customers for the credit sale of goods and services and contract assets.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_IncreaseDecreaseInAccountsReceivableAndContractAssets</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_IncreaseDecreaseInCustomerDepositsAndDeferredRevenue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of increase decrease in customer deposits and deferred revenue.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_IncreaseDecreaseInCustomerDepositsAndDeferredRevenue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_NonCashOperatingAndFinancingActivitiesAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_NonCashOperatingAndFinancingActivitiesAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_TransferFromInventories">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Net transfer of inventory to property, plant and equipment  in non-cash transactions.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_TransferFromInventories</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>21
<FILENAME>R8.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575598043232">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Significant Accounting Policies<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2022</div></th></tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract', window );"><strong>Significant Accounting Policies</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OrganizationConsolidationBasisOfPresentationBusinessDescriptionAndAccountingPoliciesTextBlock', window );">Significant Accounting Policies</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 1 &#8212; Significant Accounting Policies</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(a) Description of Business</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">Veeco Instruments Inc. (together with its consolidated subsidiaries, &#8220;Veeco,&#8221; or the &#8220;Company&#8221;) operates in a </span><span style="-sec-ix-hidden:Hidden_Q4WTJDpvMEebo8fh1Cmpvw;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">single</span></span><span style="font-size:10pt;"> segment: the development, manufacture, sales, and support of semiconductor and thin film process equipment primarily sold to make electronic devices.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(b) Basis of Presentation</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">The accompanying audited Consolidated Financial Statements of the Company have been prepared in accordance with United States generally accepted accounting principles (&#8220;GAAP&#8221;). The Company reports interim quarters on a </span><span style="font-size:10pt;">13</span><span style="font-size:10pt;">-week basis ending on the last Sunday of each period, which is determined at the start of each year. The Company&#8217;s fourth quarter always ends on the last day of the calendar year, December 31. During 2022 the interim quarters ended on April 3, July 3, and October 2, and during 2021 the interim quarters ended on April 4, July 4, and October 3. The Company reports these interim quarters as March 31, June 30, and September 30 in its interim consolidated financial statements.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(c) Use of Estimates</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The preparation of financial statements in conformity with GAAP requires management to make estimates and assumptions that affect the amounts reported in the financial statements and accompanying notes. Although these estimates are based on management&#8217;s knowledge of current events and actions it may undertake in the future, these estimates may ultimately differ from actual results. Significant items subject to such estimates and assumptions include: (i) stand-alone selling prices for the Company&#8217;s products and services; (ii) allowances for doubtful accounts; (iii) inventory obsolescence; (iv) the useful lives and expected future cash flows of property, plant, and equipment and identifiable intangible assets; (v) the fair value of the Company&#8217;s reporting unit and related goodwill; (vi) investment valuations and the valuation of derivatives, deferred tax assets, and assets acquired in business combinations; (vii) the recoverability of long-lived assets; (viii) liabilities for product warranty and legal contingencies; (ix) share-based compensation; (x) lease term and incremental borrowing rates used in determining operating lease assets and liabilities; and (xi) income tax uncertainties.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(d) Principles of Consolidation</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Consolidated Financial Statements include the accounts of the Company and its subsidiaries. Intercompany balances and transactions have been eliminated in consolidation. Companies acquired during each reporting period are reflected in the results of the Company effective from their respective dates of acquisition through the end of the reporting period.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(e) Foreign Currencies</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Assets and liabilities of the Company&#8217;s foreign subsidiaries that operate using functional currencies other than the U.S. dollar are translated using the exchange rates in effect at the balance sheet date. Results of operations are translated using monthly average exchange rates. Adjustments arising from the translation of the foreign currency financial statements of the Company&#8217;s subsidiaries into U.S. dollars, including intercompany transactions of a long-term nature, are reported as currency translation adjustments in &#8220;Accumulated other comprehensive income&#8221; in the Consolidated Balance Sheets. Foreign currency transaction gains or losses are included in &#8220;Other operating expense (income), net&#8221; in the Consolidated Statements of Operations.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(f) Revenue Recognition</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Revenue is recognized upon the transfer of control of the promised product or service to the customer in an amount that reflects the consideration the Company expects to receive in exchange for such product or service. The Company&#8217;s contracts with customers generally do not contain variable consideration. In the rare instances where variable consideration is included, the Company estimates the amount of variable consideration and determines what portion of </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">that, if any, has a high probability of significant subsequent revenue reversal, and if so, that amount is excluded from the transaction price. The Company&#8217;s contracts with customers frequently contain multiple deliverables, such as systems, upgrades, components, spare parts, installation, maintenance, and service plans. Judgment is required to properly identify the performance obligations within a contract and to determine how the revenue should be allocated among the performance obligations. The Company also evaluates whether multiple transactions with the same customer or related parties should be considered part of a single contract based on an assessment of whether the contracts or agreements are negotiated or executed within a short time frame of each other or if there are indicators that the contracts are negotiated in contemplation of one another. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160; </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">When there are separate units of accounting, the Company allocates revenue to each performance obligation on a relative stand-alone selling price basis. The stand-alone selling prices are determined based on the prices at which the Company separately sells the systems, upgrades, components, spare parts, installation, maintenance, and service plans. For items that are not sold separately, the Company estimates stand-alone selling prices generally using an expected cost plus margin approach. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160; </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Most of the Company&#8217;s revenue is recognized at a point in time when the performance obligation is satisfied. The Company considers many facts when evaluating each of its sales arrangements to determine the timing of revenue recognition, including its contractual obligations and the nature of the customer&#8217;s post-delivery acceptance provisions. The Company&#8217;s system sales arrangements, including certain upgrades, generally include field acceptance provisions that may include functional or mechanical test procedures. For many of these arrangements, a customer source inspection of the system is performed in the Company&#8217;s facility, test data is sent to the customer documenting that the system is functioning to the agreed upon specifications prior to delivery, or other quality assurance testing is performed internally to ensure system functionality prior to shipment. Historically, such source inspection or test data replicates the field acceptance provisions that are performed at the customer&#8217;s site prior to final acceptance of the system. When the Company objectively demonstrates that the criteria specified in the contractual acceptance provisions are achieved prior to delivery either through customer testing or the Company&#8217;s historical experience of its tools meeting specifications, transfer of control of the product to the customer is considered to have occurred and revenue is recognized upon system delivery since there is no substantive contingency remaining related to the acceptance provisions at that date. For new products, new applications of existing products, or for products with substantive customer acceptance provisions where the Company cannot objectively demonstrate that the criteria specified in the contractual acceptance provisions have been achieved prior to delivery, revenue and the associated costs are deferred. The Company recognizes such revenue and costs upon obtaining objective evidence that the acceptance provisions can be achieved, assuming all other revenue recognition criteria have been met. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160; </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">In certain cases, the Company&#8217;s contracts with customers contain a billing retention, which is billed by the Company and payable by the customer when field acceptance provisions are completed. Revenue recognized in advance of the amount that has been billed is recorded as a contract asset on the Consolidated Balance Sheets. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160; </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company recognizes revenue related to maintenance and service contracts over time based upon the respective contract term. Installation revenue is recognized over time as the installation services are performed. The Company recognizes revenue from the sales of components, spare parts, and specified service engagements at a point in time, which is typically consistent with the time of delivery in accordance with the terms of the applicable sales arrangement. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160; </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">The Company may receive customer deposits on system transactions. The timing of the transfer of goods or services related to the deposits is either at the discretion of the customer or expected to be within one year from the deposit receipt. As such, the Company does not adjust transaction prices for the time value of money. Incremental direct costs incurred related to the acquisition of a customer contract, such as sales commissions, are expensed as incurred since the expected performance period is </span><span style="font-size:10pt;">one</span><span style="font-size:10pt;"> year or less. </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160; </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company has elected to treat shipping and handling costs, including those costs incurred to move, package, and prepare the Company&#8217;s products for shipment and to move the products to a customer&#8217;s designated location, as a </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">fulfillment activity, and the Company includes such costs in &#8220;Cost of sales&#8221; in the Consolidated Statements of Operations as incurred. These costs are generally comprised of payments to third-party shippers. Taxes assessed by governmental authorities that are collected by the Company from a customer are excluded from revenue. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(g) Warranty Costs</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">The Company typically provides standard warranty coverage on its systems for </span><span style="font-size:10pt;">one year</span><span style="font-size:10pt;"> from the date of final acceptance by providing labor and parts necessary to repair the systems during the warranty period. The Company records the estimated warranty cost when revenue is recognized on the related system. Warranty cost is included in &#8220;Cost of sales&#8221; in the Consolidated Statements of Operations. The estimated warranty cost is based on the Company&#8217;s historical experience with its systems and regional labor costs. The Company calculates the average service hours by region and parts expense per system utilizing actual service records to determine the estimated warranty charge. The Company updates its warranty estimates on a quarterly basis when the actual product performance or field expense differs from original estimates.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(h) Research and Development Costs</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Research and development costs are expensed as incurred and include charges for the development of new technology and the transition of existing technology into new products or services.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(i) Advertising Expense</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The cost of advertising is expensed as incurred and totaled $0.3 million, $0.3 million, and $0.4 million for the years ended December 31, 2022, 2021, and 2020, respectively.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(j) Accounting for Share-based Compensation</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Share-based awards exchanged for employee services are accounted for under the fair value method. Accordingly, share-based compensation cost is measured at the grant date based on the estimated fair value of the award. The expense for awards is recognized over the employee&#8217;s requisite service period (generally the vesting period of the award). The Company has elected to treat awards with only service conditions and with graded vesting as one award. Consequently, the total compensation expense is recognized straight-line over the entire vesting period, so long as the compensation cost recognized at any date at least equals the portion of the grant date fair value of the award that is vested at that date.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">In addition to stock options, restricted share awards (&#8220;RSAs&#8221;) and restricted stock units (&#8220;RSUs&#8221;) with time-based vesting, the Company grants performance share units and awards (&#8220;PSUs&#8221; and &#8220;PSAs&#8221;) that have either performance or market conditions. Compensation cost for PSUs and PSAs with performance conditions is recognized over the requisite service period based on the timing and expected level of achievement of the performance targets. A change in the assessment of performance attainment prior to the conclusion of the performance period is recognized in the period of the change in estimate. Compensation cost for PSUs and PSAs with market conditions is recognized over the requisite service period regardless of the expected level of achievement. For all PSUs and PSAs, the number of shares issued to the employee at the conclusion of the service period may vary from the original target based upon the level of attainment of the performance or market conditions.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company uses the Black-Scholes option-pricing model to compute the estimated fair value of option awards and purchase rights under the Employee Stock Purchase Plan. The Company uses a Monte Carlo simulation to compute the estimated fair value of awards with market conditions. The Black-Scholes model and Monte Carlo simulation include assumptions regarding dividend yields, expected volatility, expected option term, and risk-free interest rates. See Note 12, &#8220;Stock Plans,&#8221; for additional information. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(k) Income Taxes</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Income taxes are accounted for under the asset and liability method. Deferred tax assets and liabilities are recognized for the future tax consequences attributable to differences between the financial statement carrying amounts of existing assets and liabilities and their respective tax bases and operating loss and tax credit carryforwards. Deferred tax assets and liabilities are measured using enacted tax rates expected to apply to taxable income in the years in which those temporary differences are expected to be recovered or settled. The effect on deferred tax assets and liabilities from a change in tax rate is recognized in income in the period that includes the enactment date. A valuation allowance is provided for deferred tax assets if it is more likely than not that these items will not be realized, which is dependent upon the generation of future taxable income.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(l) Concentration of Credit Risk</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Financial instruments that potentially subject the Company to concentrations of credit risk consist primarily of cash and cash equivalents, investments, derivative financial instruments used in hedging activities, and accounts receivable. The Company invests in a variety of financial instruments and, by policy, limits the amount of credit exposure with any one financial institution or commercial issuer. Historically, the Company has not experienced any material credit losses on its investments. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company maintains an allowance reserve for potentially uncollectible accounts for estimated losses resulting from the inability of its customers to make required payments. The Company evaluates its allowance for doubtful accounts based on a combination of factors. In circumstances where specific invoices are deemed to be uncollectible, the Company provides a specific allowance for bad debt against the amount due to reduce the net recognized receivable to the amount reasonably expected to be collected. The Company also provides allowances based on its write-off history. Finally, the Company also considers its current expectations of future economic conditions, including the impact of COVID-19, when estimating its allowance for doubtful accounts. The allowance for doubtful accounts totaled $0.7 million at both December 31, 2022 and 2021.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">To further mitigate the Company&#8217;s exposure to uncollectable accounts, the Company may request certain customers provide a negotiable irrevocable letter of credit drawn on a reputable financial institution. These irrevocable letters of credit are typically issued to mature between </span><span style="-sec-ix-hidden:Hidden_X77IvS7lk0evd8U-l6qM4w;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">zero</span></span><span style="font-size:10pt;"> and </span><span style="font-size:10pt;">90 days</span><span style="font-size:10pt;"> from the date the documentation requirements are met, typically when a system ships or upon receipt of final acceptance from the customer. The Company, at its discretion, may monetize these letters of credit on a non-recourse basis after they become negotiable but before maturity. The fees associated with the monetization are included in &#8220;Selling, general, and administrative&#8221; in the Consolidated Statements of Operations and were immaterial for the years ended December 31, 2022, 2021, and 2020.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(m) Fair Value of Financial Instruments</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The carrying amounts of financial instruments, including cash equivalents, accounts receivable, accounts payable, and accrued expenses reflected in the consolidated financial statements approximate fair value due to their short-term maturities. The fair value of debt for footnote disclosure purposes, including current maturities, if any, is estimated using recently quoted market prices of the instrument, or if not available, a discounted cash flow analysis based on the estimated current incremental borrowing rates for similar types of instruments.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(n) Cash, Cash Equivalents, and Short-term Investments</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">All financial instruments purchased with an original maturity of three months or less at the time of purchase are considered cash equivalents. Such items may include liquid money market funds, certificate of deposit and time deposit accounts, U.S. treasuries, government agency securities, and corporate debt. Investments that are classified as cash equivalents are carried at cost, which approximates fair value. The Company&#8217;s cash and cash equivalents includes $61.5 million and $41.7 million of cash equivalents at December 31, 2022 and 2021, respectively.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">A portion of the Company&#8217;s cash and cash equivalents is held by its subsidiaries throughout the world, frequently in each subsidiary&#8217;s respective functional currency, which is typically the U.S. dollar. Approximately 18% and 32% of cash and cash equivalents were maintained outside the United States at December 31, 2022 and 2021, respectively.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Short-term investments consist of marketable debt securities, and are generally classified as available-for-sale for use in current operations, if required, and are reported at fair value, with unrealized gains and losses, net of tax, presented as a separate component of stockholders&#8217; equity under the caption &#8220;Accumulated other comprehensive income&#8221; on the Consolidated Balance Sheets. These securities can include U.S. treasuries, government agency securities, corporate debt, and commercial paper, all with maturities of greater than three months when purchased. All realized gains and losses and unrealized losses resulting from declines in fair value that are other than temporary are included in &#8220;Other operating expense (income), net&#8221; in the Consolidated Statements of Operations. The specific identification method is used to determine the realized gains and losses on investments. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Non-marketable equity securities are equity securities without readily observable market prices and are included in &#8220;Other assets&#8221; in the Consolidated Balance Sheets. Non-marketable securities are measured at cost, adjusted for changes in observable prices minus impairment. Changes in fair value and impairment charges are included in &#8220;Other income (expense), net&#8221; in the Consolidated Statements of Operations.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(o) Inventories</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Inventories are stated at the lower of cost or net realizable value, with cost determined on a first-in, first-out basis. Each quarter the Company assesses the valuation and recoverability of all inventories: materials (raw materials, spare parts, and service inventory); work-in-process; and finished goods. Obsolete inventory or inventory in excess of management&#8217;s estimated usage requirement is written down to its estimated net realizable value if less than cost. The Company evaluates usage requirements by analyzing historical usage, anticipated demand, alternative uses of materials, and other qualitative factors. Unanticipated changes in demand for the Company&#8217;s products may require a write down of inventory, which would be reflected in cost of sales in the period the revision is made. Inventory acquired as part of a business combination is recorded at fair value on the date of acquisition.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(p) Business Combinations</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company allocates the fair value of the purchase consideration of the Company&#8217;s acquisitions to the tangible assets, intangible assets, including in-process research and development (&#8220;IPR&amp;D&#8221;), if any, and liabilities assumed, based on estimated fair values. The excess of the fair value of purchase consideration over the fair values of these identifiable assets and liabilities is recorded as goodwill. Acquisition-related expenses are recognized separately from the business combination and are expensed as incurred. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(q) Goodwill and Indefinite-Lived Intangible Assets</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Goodwill is an asset representing the future economic benefits arising from assets acquired in a business combination that are not individually identified and separately recognized. Goodwill is measured as the excess of the consideration transferred over the net fair value of identifiable assets acquired and liabilities assumed. Intangible assets with indefinite useful lives are measured at their respective fair values on the acquisition date. Intangible assets related to IPR&amp;D projects are considered to be indefinite-lived until the completion or abandonment of the associated research and development (&#8220;R&amp;D&#8221;) efforts. If and when development is complete, the associated assets would be deemed long-lived and would then be amortized based on their respective estimated useful lives at that point in time. Goodwill and indefinite-lived intangibles are not amortized into results of operations but instead are evaluated for impairment. The Company performs the evaluation in the beginning of the fourth quarter of each year or more frequently if impairment indicators arise.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">In testing goodwill for impairment, the Company may first perform a qualitative assessment of whether it is more likely than not that the reporting unit&#8217;s fair value is less than its carrying amount, and, if so, the Company then quantitatively compares the fair value of the reporting unit to its carrying amount. If the fair value exceeds the carrying amount, goodwill is not impaired. If the carrying amount exceeds fair value, the Company then records an impairment loss equal to the difference, up to the carrying value of goodwill.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">The Company determines the fair value of its reporting unit based on a reconciliation of the fair value of the reporting unit to the Company&#8217;s adjusted market capitalization. The adjusted market capitalization is calculated by multiplying the average share price of the Company&#8217;s common stock for the last </span><span style="-sec-ix-hidden:Hidden_lu4ZbA0J8kKBzBR2b7i9TA;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">ten</span></span><span style="font-size:10pt;"> trading days prior to the measurement date by the number of outstanding common shares and adding a control premium. The control premium is estimated using historical transactions in similar industries.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">In testing indefinite-lived intangible assets for impairment, the Company may first perform a qualitative assessment of whether it is more likely than not that the fair value of the indefinite-lived intangible asset is less than its carrying amount, and, if so, the Company then quantitatively compares the fair value of the indefinite-lived intangible asset to its carrying amount. The Company determines the fair value of its indefinite-lived intangible assets using a discounted cash flow method.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(r) Long-lived Assets</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Long-lived intangible assets consist of purchased technology, customer relationships, patents, trademarks and tradenames, and backlog and are initially recorded at fair value. Long-lived intangible assets are amortized over their estimated useful lives in a method reflecting the pattern in which the economic benefits are consumed or straight-lined if such pattern cannot be reliably determined.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Property, plant, and equipment are recorded at cost. Depreciation expense is calculated based on the estimated useful lives of the assets by using the straight-line method. Amortization of leasehold improvements is recognized using the straight-line method over the shorter of the remaining lease term or the estimated useful lives of the improvements.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Long-lived assets are reviewed for impairment whenever events or changes in circumstances indicate that the carrying amount of an asset may not be recoverable. If circumstances require a long-lived asset or asset group be tested for possible impairment, a recoverability test is performed utilizing undiscounted cash flows expected to be generated by that asset or asset group compared to its carrying amount. If the carrying amount of the long-lived asset or asset group is not recoverable on an undiscounted cash flow basis, impairment is recognized to the extent the carrying amount exceeds its fair value. Fair value is determined through various valuation techniques including discounted cash flow models or, when available, quoted market values and third-party appraisals.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(s) Leases</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company determines at contract inception if an arrangement is a lease, or contains a lease, of an identified asset for which the Company has the right to obtain substantially all of the economic benefits from its use and the right to direct its use. Right-of-use (&#8220;ROU&#8221;) assets represent the Company&#8217;s right to use an underlying asset for the lease term, while lease liabilities represent the Company&#8217;s obligation to make lease payments arising from the lease. Operating lease ROU assets and liabilities are recognized at lease commencement date based on the present value of lease payments over the lease term. The implicit discount rate in the Company&#8217;s leases generally cannot readily be determined, and therefore the Company uses its incremental borrowing rate based on information available at lease commencement date in determining the present value of future payments. The Company has options to renew or terminate certain leases. These options are included in the determination of lease term when it is reasonably certain that the Company will exercise such options. The Company does not separate lease and non-lease components in determining ROU assets or lease liabilities for real estate leases. Additionally, the Company does not recognize ROU assets or lease liabilities for leases with original terms or renewals of one year or less.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(t) Recently Adopted Accounting Standards</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">The Company </span><span style="font-size:10pt;">adopted</span><span style="font-size:10pt;"> ASU 2019-12:&#160;</span><i style="font-size:10pt;font-style:italic;">Income Taxes (Topic 740): Simplifying the Accounting for Income Taxes </i><span style="font-size:10pt;">in the second quarter of 2020, effective as of the beginning of fiscal year 2020. This ASU simplifies the accounting for income taxes by eliminating certain exceptions to the general principles and simplifying several aspects of ASC 740,&#160;</span><i style="font-size:10pt;font-style:italic;">Income Taxes,&#160;</i><span style="font-size:10pt;">including, but not limited to, requirements related to the following: a) exception to the incremental approach for intraperiod tax allocation; b) the tax basis step-up in goodwill obtained in a transaction that is not a business combination; c) ownership changes in investments - changes from a subsidiary to an equity method investment; d) separate financial statements of entities not subject to tax; e) interim-period accounting for enacted changes in tax law; and f) the year-to-date loss limitation in interim-period tax accounting. The adoption did not have a material impact on the Company&#8217;s consolidated financial statements as of the date of adoption.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">The Company </span><span style="font-size:10pt;">adopted</span><span style="font-size:10pt;"> ASU 2020-06: </span><i style="font-size:10pt;font-style:italic;">Debt &#8211; Debt with Conversion and Other Options (Subtopic 470-20) and Derivatives and Hedging &#8211; Contracts in Entity&#8217;s Own Equity (Subtopic 815-40): Accounting for Convertible Instruments and Contracts in an Entity&#8217;s Own Equity</i><span style="font-size:10pt;"> on January 1, 2022, using the </span><span style="-sec-ix-hidden:Hidden_kuYE2HfeWkSfBndNPXMkng;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">modified retrospective method</span></span><span style="font-size:10pt;"> for all financial instruments that were outstanding as of the adoption date. This standard simplifies the accounting for convertible debt instruments by removing the separation models for convertible debt with a cash conversion feature, as well as convertible instruments with a beneficial conversion feature. As a result, entities will account for a convertible debt instrument wholly as debt, unless certain other conditions are met. The elimination of these models reduces non-cash interest expense for entities that have issued a convertible instrument that was within the scope of those models before the adoption of ASU 2020-06, such as the Company&#8217;s 2023 Notes, 2025 Notes, and 2027 Notes. Additionally, ASU 2020-06 requires the application of the if-converted method for calculating diluted earnings per share, and precludes the use of the treasury stock method for certain debt instruments, such as the Company&#8217;s 2023 Notes, 2025 Notes, and 2027 Notes.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The adoption of ASU 2020-06 resulted in the following adjustments to the Consolidated Balance Sheets:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:61.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:1.44%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:12.04%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.11%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:10.13%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:61.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.33%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, 2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:10.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Adoption of </b><b style="font-weight:bold;"><br/></b><b style="font-weight:bold;">ASU 2020-06</b></p></td><td style="vertical-align:bottom;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">January 1, 2022</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="10" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:61.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:36.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">&#160;(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:61.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Balance Sheet line item:</b></p></td><td style="vertical-align:bottom;width:1.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:61.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Long-term debt</p></td><td style="vertical-align:bottom;width:1.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 229,438</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 44,260</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 273,698</p></td></tr><tr><td style="vertical-align:bottom;width:61.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Additional paid-in capital</p></td><td style="vertical-align:bottom;width:1.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,116,921</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (56,800)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,060,121</p></td></tr><tr><td style="vertical-align:bottom;width:61.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Accumulated deficit</p></td><td style="vertical-align:bottom;width:1.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (681,283)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 12,540</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (668,743)</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The adoption of ASU 2020-06 resulted in the following adjustments to the Company&#8217;s calculations of basic and diluted income per share for the year ended December 31, 2022:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:63.07%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.22%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.32%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.65%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:10.85%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.12%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:63.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:36.92%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended December&#160;31, 2022</b></p></td></tr><tr><td style="vertical-align:bottom;width:63.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Under</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Under</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.55%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">ASU 2020-06</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">legacy accounting</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Difference</b></p></td></tr><tr><td style="vertical-align:bottom;width:63.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Income per common share:</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.65%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.85%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Basic income per common share</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 3.35</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.85%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 3.15</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 0.20</p></td></tr><tr><td style="vertical-align:bottom;width:63.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Diluted income per common share</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 2.71</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.65%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.85%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 2.91</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (0.20)</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(u) Recent Accounting Pronouncements Not Yet Adopted</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company is evaluating other pronouncements recently issued but not yet adopted. The adoption of these pronouncements is not expected to have a material impact on our consolidated financial statements.</p><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
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<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OrganizationConsolidationBasisOfPresentationBusinessDescriptionAndAccountingPoliciesTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
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<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -URI https://asc.fasb.org/topic&amp;trid=2197479<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 275<br> -URI https://asc.fasb.org/topic&amp;trid=2134479<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -URI https://asc.fasb.org/topic&amp;trid=2122394<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -URI https://asc.fasb.org/topic&amp;trid=2122369<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
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<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OrganizationConsolidationBasisOfPresentationBusinessDescriptionAndAccountingPoliciesTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>22
<FILENAME>R9.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
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							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
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<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575678483904">
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<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Income Per Common Share<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2022</div></th></tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_EarningsPerShareAbstract', window );"><strong>Income Per Common Share</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
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<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_EarningsPerShareTextBlock', window );">Income Per Common Share</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 2 &#8212; Income (Loss) Per Share</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Basic income (loss) per share is calculated by dividing net income (loss) by the weighted average number of shares outstanding during the period. Diluted income per share is calculated by dividing net income by the weighted average number of shares used to calculate basic income per share plus the weighted average number of common share equivalents outstanding during the period. The dilutive effect of outstanding options to purchase common stock and non-participating share-based awards is considered in diluted income per share by application of the treasury stock method. The dilutive effect of performance share units is included in diluted income per common share in the periods the performance targets have been achieved, or would have been achieved if the reporting date was the end of the contingency period. Upon the adoption of ASU 2020-06 on January 1, 2022, the Company includes the dilutive effect of shares issuable upon conversion of its Notes in the calculation of diluted income per share using the if-converted method. Prior to the adoption of ASU 2020-06, based on the Company&#8217;s ability and intent to settle the principal amount of its convertible senior notes in cash, and the excess of the principal portion in shares of its common stock, the Company accounted for the conversion spread using the treasury stock method, and the shares issuable upon conversion of the Notes were not included in the calculation of diluted earnings per share except to the extent that the conversion value of the Notes exceeds their principal amount and if the effect would be dilutive. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The computations of basic and diluted income (loss) per share for the years ended December 31, 2022, 2021, and 2020 are as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:61.69%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:61.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:33.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">For the year ended December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:61.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.54%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.54%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.54%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="11" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:61.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:33.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands, except per share amounts)</i></p></td></tr><tr><td style="vertical-align:bottom;width:61.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Numerator: </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:61.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Net income</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 166,942</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 26,038</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (8,391)</p></td></tr><tr><td style="vertical-align:bottom;width:61.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Interest expense associated with convertible notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 10,832</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;width:61.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Net income available to common shareholders</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 177,774</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 26,038</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (8,391)</p></td></tr><tr><td style="vertical-align:bottom;width:61.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:61.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Denominator:</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:61.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Basic weighted average shares outstanding</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 49,906</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 49,073</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 48,362</p></td></tr><tr><td style="vertical-align:bottom;width:61.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Effect of potentially dilutive share-based awards</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 734</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 1,090</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;width:61.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Dilutive effect of convertible notes </p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 14,967</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 3,480</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;width:61.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Diluted weighted average shares outstanding</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 65,607</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 53,643</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 48,362</p></td></tr><tr><td style="vertical-align:bottom;width:61.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:61.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Net income per common share:</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:61.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Basic</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 3.35</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 0.53</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (0.17)</p></td></tr><tr><td style="vertical-align:bottom;width:61.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Diluted</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 2.71</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 0.49</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (0.17)</p></td></tr><tr><td style="vertical-align:bottom;width:61.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:61.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Unvested participating shares excluded from basic weighted average shares outstanding since the securityholders are not obligated to fund losses</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 6</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 20</p></td></tr><tr><td style="vertical-align:middle;width:61.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Common share equivalents excluded from the diluted weighted average shares outstanding since the Company incurred a net loss and their effect would be antidilutive</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 947</p></td></tr><tr><td style="vertical-align:bottom;width:61.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Potentially dilutive shares excluded from the diluted calculation as their effect would be antidilutive</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 815</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 456</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 923</p></td></tr><tr><td style="vertical-align:middle;width:61.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Maximum potential shares to be issued for settlement of the convertible notes excluded from the diluted calculation as their effect would be antidilutive </p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 8,421</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 17,753</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EarningsPerShareAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EarningsPerShareAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EarningsPerShareTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for earnings per share.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -URI https://asc.fasb.org/extlink&amp;oid=109243012&amp;loc=SL65017193-207537<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (c)<br> -URI https://asc.fasb.org/extlink&amp;oid=124432515&amp;loc=d3e3550-109257<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -URI https://asc.fasb.org/topic&amp;trid=2144383<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -URI https://asc.fasb.org/extlink&amp;oid=124432515&amp;loc=d3e3630-109257<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EarningsPerShareTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>23
<FILENAME>R10.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575678483904">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Fair Value Measurements<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2022</div></th></tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FairValueDisclosuresAbstract', window );"><strong>Fair Value Measurements</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FairValueDisclosuresTextBlock', window );">Fair Value Measurements</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 3 &#8212; Fair Value Measurements</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Fair value is the price that would be received for an asset or the amount paid to transfer a liability in an orderly transaction between market participants. The Company is required to classify certain assets and liabilities based on the following fair value hierarchy:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"/><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Level 1: Quoted prices in active markets that are unadjusted and accessible at the measurement date for identical, unrestricted assets or liabilities;</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"/><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Level 2: Quoted prices for identical assets and liabilities in markets that are not active, quoted prices for similar assets and liabilities in active markets or financial instruments for which significant inputs are observable, either directly or indirectly; and</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"/><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Level 3: Prices or valuations that require inputs that are both significant to the fair value measurement and unobservable.</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">A financial instrument&#8217;s level within the fair value hierarchy is based on the lowest level of any input that is significant to the fair value measurement. The Company has evaluated the estimated fair value of financial instruments using available market information and valuations as provided by third-party sources. The use of different market assumptions or estimation methodologies could have a significant effect on the estimated fair value amounts.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The following table presents the Company&#8217;s assets that were measured at fair value on a recurring basis at December 31, 2022 and 2021:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:57.19%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.56%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.56%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.2%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.84%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:57.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;width:8.88%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Level&#160;1</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.11%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Level&#160;2</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.88%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Level&#160;3</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.17%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Total</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="13" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:57.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:40.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:57.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">December&#160;31, 2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.56%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.56%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:57.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"><b style="font-weight:bold;">Cash equivalents</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:57.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Certificate of deposits and time deposits</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.56%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 61,135</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.56%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 61,135</p></td></tr><tr><td style="vertical-align:bottom;width:57.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Money market cash</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 405</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 405</p></td></tr><tr><td style="vertical-align:bottom;width:57.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.56%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 61,540</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.56%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.84%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 61,540</p></td></tr><tr><td style="vertical-align:bottom;width:57.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"><b style="font-weight:bold;">Short-term investments</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:57.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">U.S. treasuries</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.56%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 62,849</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.56%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 62,849</p></td></tr><tr><td style="vertical-align:bottom;width:57.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Government agency securities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 27,366</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 27,366</p></td></tr><tr><td style="vertical-align:bottom;width:57.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Corporate debt</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.56%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 41,591</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.56%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 41,591</p></td></tr><tr><td style="vertical-align:bottom;width:57.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Commercial paper</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 15,682</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 15,682</p></td></tr><tr><td style="vertical-align:bottom;width:57.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.56%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 62,849</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 84,639</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.56%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.84%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 147,488</p></td></tr><tr><td style="vertical-align:bottom;width:57.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 18pt;"><span style="font-size:10pt;font-weight:bold;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:57.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">December&#160;31, 2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.56%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.56%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:57.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"><b style="font-weight:bold;">Cash equivalents</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:57.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Certificate of deposits and time deposits</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.56%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 41,544</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.56%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 41,544</p></td></tr><tr><td style="vertical-align:bottom;width:57.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Money market cash</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 121</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 121</p></td></tr><tr><td style="vertical-align:bottom;width:57.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.56%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 41,665</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.56%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.84%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 41,665</p></td></tr><tr><td style="vertical-align:bottom;width:57.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"><b style="font-weight:bold;">Short-term investments</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:57.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">U.S. treasuries</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.56%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 51,095</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.56%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 51,095</p></td></tr><tr><td style="vertical-align:bottom;width:57.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Government agency securities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 12,052</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 12,052</p></td></tr><tr><td style="vertical-align:bottom;width:57.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Corporate debt</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.56%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 40,035</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.56%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 40,035</p></td></tr><tr><td style="vertical-align:bottom;width:57.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Commercial paper</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 999</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 999</p></td></tr><tr><td style="vertical-align:bottom;width:57.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.56%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 51,095</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 53,086</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.56%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.84%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 104,181</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company&#8217;s investments classified as Level 1 are based on quoted prices that are available in active markets, as well as certificates of deposits and time deposits that are classified as Level 1 due to their short-term nature. The Company&#8217;s investments classified as Level 2 are valued using observable inputs to quoted market prices, benchmark yields, reported trades, broker/dealer quotes, or alternative pricing sources with reasonable levels of price transparency.</p><span></span>
</td>
</tr>
</table>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FairValueDisclosuresAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
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<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FairValueDisclosuresAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FairValueDisclosuresTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for the fair value of financial instruments (as defined), including financial assets and financial liabilities (collectively, as defined), and the measurements of those instruments as well as disclosures related to the fair value of non-financial assets and liabilities. Such disclosures about the financial instruments, assets, and liabilities would include: (1) the fair value of the required items together with their carrying amounts (as appropriate); (2) for items for which it is not practicable to estimate fair value, disclosure would include: (a) information pertinent to estimating fair value (including, carrying amount, effective interest rate, and maturity, and (b) the reasons why it is not practicable to estimate fair value; (3) significant concentrations of credit risk including: (a) information about the activity, region, or economic characteristics identifying a concentration, (b) the maximum amount of loss the entity is exposed to based on the gross fair value of the related item, (c) policy for requiring collateral or other security and information as to accessing such collateral or security, and (d) the nature and brief description of such collateral or security; (4) quantitative information about market risks and how such risks are managed; (5) for items measured on both a recurring and nonrecurring basis information regarding the inputs used to develop the fair value measurement; and (6) for items presented in the financial statement for which fair value measurement is elected: (a) information necessary to understand the reasons for the election, (b) discussion of the effect of fair value changes on earnings, (c) a description of [similar groups] items for which the election is made and the relation thereof to the balance sheet, the aggregate carrying value of items included in the balance sheet that are not eligible for the election; (7) all other required (as defined) and desired information.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 820<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -URI https://asc.fasb.org/extlink&amp;oid=126976982&amp;loc=d3e19207-110258<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FairValueDisclosuresTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>24
<FILENAME>R11.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
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							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
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</head>
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<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575678483904">
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<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Investments<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2022</div></th></tr>
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<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_InvestmentsDebtAndEquitySecuritiesAbstract', window );"><strong>Investments</strong></a></td>
<td class="text">&#160;<span></span>
</td>
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<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_InvestmentsInDebtAndMarketableEquitySecuritiesAndCertainTradingAssetsDisclosureTextBlock', window );">Investments</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 4 &#8212; Investments</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">At December 31, 2022 and 2021 the amortized cost and fair value of marketable securities, which are included in &#8220;Short-term investments&#8221; on the Consolidated Balance Sheets, were as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Gross</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Gross</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amortized</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Unrealized</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Unrealized</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Estimated</b></p></td></tr><tr><td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Cost</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Gains</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Losses</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Fair&#160;Value</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="13" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:41.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:55.91%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">December&#160;31, 2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">U.S. treasuries</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 63,331</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (482)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 62,849</p></td></tr><tr><td style="vertical-align:bottom;width:55.91%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Government agency securities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 27,464</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (98)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 27,366</p></td></tr><tr><td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Corporate debt</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 42,006</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (415)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 41,591</p></td></tr><tr><td style="vertical-align:bottom;width:55.91%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Commercial paper</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 15,682</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 15,682</p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:55.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 148,483</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (995)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 147,488</p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:55.91%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 12pt;"><span style="font-size:10pt;font-weight:bold;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">December&#160;31, 2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:55.91%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">U.S. treasuries</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 51,269</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (174)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 51,095</p></td></tr><tr><td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Government agency securities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 12,075</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (23)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 12,052</p></td></tr><tr><td style="vertical-align:bottom;width:55.91%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Corporate debt</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 40,169</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (134)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 40,035</p></td></tr><tr><td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Commercial paper</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 999</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 999</p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:55.91%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 104,512</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (331)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 104,181</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Available-for-sale securities in a loss position at December 31, 2022 and 2021 were as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:39.84%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.69%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.71%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.71%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:39.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:37.77%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, 2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:19.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, 2021</b></p></td></tr><tr><td style="vertical-align:bottom;width:39.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:18.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Continuous Loss Position </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:18.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Continuous Loss Position </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:19.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Continuous Loss Position </b></p></td></tr><tr><td style="vertical-align:bottom;width:39.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:18.05%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">for Less than 12 Months</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:18.07%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">for 12 Months or More</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:19.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">for Less than 12 Months</b></p></td></tr><tr><td style="vertical-align:bottom;width:39.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Gross</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Gross</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Gross</b></p></td></tr><tr><td style="vertical-align:bottom;width:39.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Estimated</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Unrealized</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Estimated</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Unrealized</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Estimated</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Unrealized</b></p></td></tr><tr><td style="vertical-align:bottom;width:39.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Fair&#160;Value</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.91%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Losses</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Fair&#160;Value</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Losses</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Fair Value</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Losses</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="19" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:39.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="16" style="vertical-align:bottom;white-space:nowrap;width:57.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:39.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">U.S. treasuries</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 39,791</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (84)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 23,057</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (398)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 51,095</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (174)</p></td></tr><tr><td style="vertical-align:bottom;width:39.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Government agency securities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 22,528</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (86)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 4,838</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (12)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 12,052</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (23)</p></td></tr><tr><td style="vertical-align:bottom;width:39.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Corporate debt</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 19,693</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.69%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (138)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 21,898</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.71%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (277)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 40,035</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.71%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (134)</p></td></tr><tr><td style="vertical-align:bottom;width:39.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 82,012</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.69%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (308)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 49,793</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.71%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (687)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 103,182</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.71%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (331)</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">At December 31, 2021, there were no short-term investments that had been in a continuous loss position for more than 12 months.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;background:#ffff00;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="background:#ffffff;">The contractual maturities of securities classified as available-for-sale at December 31, 2022 were as follows:</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;background:#ffffff;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:72.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.41%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.39%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:72.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:25.01%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, 2022</b></p></td></tr><tr><td style="vertical-align:bottom;width:72.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amortized</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Estimated</b></p></td></tr><tr><td style="vertical-align:bottom;width:72.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.11%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Cost</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Fair&#160;Value</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="7" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:72.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="4" style="vertical-align:bottom;white-space:nowrap;width:23.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:72.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Due in one year or less</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.41%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 145,885</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.39%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 144,959</p></td></tr><tr><td style="vertical-align:bottom;width:72.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Due after one year through two years</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.41%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 2,598</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.39%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 2,529</p></td></tr><tr><td style="vertical-align:bottom;width:72.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.41%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 148,483</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.39%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 147,488</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;background:#ffffff;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Actual maturities may differ from contractual maturities because borrowers may have the right to call or prepay obligations with or without call or prepayment penalties. The realized gains or losses for the years ended December 31, 2022, 2021, and 2020 were immaterial.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Other Investments</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Veeco has an ownership interest of less than 20% in a non-marketable investment in a separate entity, with a carrying value of $2.0 million at December 31, 2022 and 2021. The Company does not exert significant influence over this entity. This equity investment does not have a readily observable market price, and therefore the Company has elected to measure this investment at cost, adjusted for changes in observable market prices minus impairment. The investment is included in &#8220;Other assets&#8221; on the Consolidated Balance Sheets. The investment is subject to periodic impairment reviews which require judgment. The analyses include assessments of the companies&#8217; financial condition, the business outlooks for their products and technologies, their projected results and cash flows, business valuation indications from recent rounds of financing, the likelihood of obtaining subsequent rounds of financing, and the impact of equity preferences held by Veeco relative to other investors. During the year ended December 31, 2021, the Company identified impairment indicators on the Company&#8217;s investment, and recorded a non-cash impairment charge of $1.0 million. This impairment charge was included in &#8220;Other income (expense), net&#8221; in the Consolidated Statement of Operations. </p><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InvestmentsDebtAndEquitySecuritiesAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InvestmentsDebtAndEquitySecuritiesAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InvestmentsInDebtAndMarketableEquitySecuritiesAndCertainTradingAssetsDisclosureTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for investments in certain debt and equity securities.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 320<br> -URI https://asc.fasb.org/subtopic&amp;trid=2209399<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 946<br> -SubTopic 320<br> -URI https://asc.fasb.org/subtopic&amp;trid=2324412<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 320<br> -URI https://asc.fasb.org/topic&amp;trid=2196928<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 940<br> -SubTopic 320<br> -URI https://asc.fasb.org/subtopic&amp;trid=2176304<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher SEC<br> -Name Regulation S-K (SK)<br> -Number 229<br> -Section 1403<br> -Paragraph (b)<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InvestmentsInDebtAndMarketableEquitySecuritiesAndCertainTradingAssetsDisclosureTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>25
<FILENAME>R12.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
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<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575678391904">
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<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Inventories<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
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<tr><th class="th"><div>Dec. 31, 2022</div></th></tr>
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<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_InventoryDisclosureAbstract', window );"><strong>Inventories</strong></a></td>
<td class="text">&#160;<span></span>
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<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_InventoryDisclosureTextBlock', window );">Inventories</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 5 &#8212; Inventories</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Inventories are stated at the lower of cost or net realizable value, with cost determined on a first-in, first-out basis. Inventories consist of the following:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:82%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:65.09%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.56%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:13.34%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.56%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:13.31%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:65.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.87%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:65.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.87%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="7" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:65.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:32.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:65.09%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Materials</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.56%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 134,940</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.56%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 96,027</p></td></tr><tr><td style="vertical-align:bottom;width:65.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Work-in-process</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 68,765</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 54,128</p></td></tr><tr><td style="vertical-align:bottom;width:65.09%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Finished goods</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.56%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.34%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 3,203</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.56%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.31%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 20,703</p></td></tr><tr><td style="vertical-align:bottom;width:65.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.34%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 206,908</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.31%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 170,858</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InventoryDisclosureAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InventoryDisclosureAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InventoryDisclosureTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for inventory. Includes, but is not limited to, the basis of stating inventory, the method of determining inventory cost, the classes of inventory, and the nature of the cost elements included in inventory.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 330<br> -URI https://asc.fasb.org/topic&amp;trid=2126998<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InventoryDisclosureTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>26
<FILENAME>R13.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
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							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
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							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575678483904">
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<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Property, Plant, and Equipment<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2022</div></th></tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentAbstract', window );"><strong>Property, Plant, and Equipment</strong></a></td>
<td class="text">&#160;<span></span>
</td>
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<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentDisclosureTextBlock', window );">Property, Plant, and Equipment</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 6 &#8212; Property, Plant, and Equipment</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Property, plant, and equipment, net, consist of the following:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:55.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.17%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:middle;width:14.02%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:50%;transform:translate(0,-50%);width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:55.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.36%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.4%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:55.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.36%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.4%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.02%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Average&#160;Useful&#160;Life</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="9" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:55.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:26.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:55.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Land</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 5,061</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 5,061</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:14.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">N/A</p></td></tr><tr><td style="vertical-align:bottom;width:55.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Building and improvements</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 64,198</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 63,946</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:14.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;">10</span><span style="font-size:10pt;"> &#8211; </span><span style="font-size:10pt;">40 years</span></p></td></tr><tr><td style="vertical-align:bottom;width:55.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Machinery and equipment <sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;">(1)</sup></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 155,533</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 145,656</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:14.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;">3</span><span style="font-size:10pt;"> &#8211; </span><span style="font-size:10pt;">10 years</span></p></td></tr><tr><td style="vertical-align:bottom;width:55.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Leasehold improvements</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.17%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 54,764</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 45,979</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:14.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;">3</span><span style="font-size:10pt;"> &#8211; </span><span style="font-size:10pt;">17 years</span></p></td></tr><tr><td style="vertical-align:bottom;width:55.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Gross property, plant, and equipment</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 279,556</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 260,642</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:55.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Less: accumulated depreciation and amortization</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.17%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 172,275</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 160,899</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:55.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"><b style="font-weight:bold;">Net property, plant, and equipment</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.17%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 107,281</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 99,743</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr></table><div style="font-family:'Times New Roman','Times','serif';font-size:9.0pt;margin-bottom:0pt;margin-top:0pt;min-height:1.19em;position:relative;width:100%;"><div style="background-color:#000000;height:1pt;position:relative;top:0.6em;width:25.0%;border:none;margin:0 auto 0 0;"/></div><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:9pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(1)</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:9pt;font-style:normal;font-weight:normal;">Machinery and equipment also includes software, furniture, and fixtures</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Depreciation expense was $15.6 million, $13.8 million, and $15.4 million for the years ended December 31, 2022, 2021, and 2020, respectively. </p><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PropertyPlantAndEquipmentAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PropertyPlantAndEquipmentDisclosureTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for long-lived, physical asset used in normal conduct of business and not intended for resale. Includes, but is not limited to, work of art, historical treasure, and similar asset classified as collections.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 958<br> -SubTopic 360<br> -Section 50<br> -Paragraph 6<br> -URI https://asc.fasb.org/extlink&amp;oid=126982197&amp;loc=d3e99893-112916<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 360<br> -URI https://asc.fasb.org/topic&amp;trid=2155823<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 958<br> -SubTopic 360<br> -Section 50<br> -Paragraph 7<br> -URI https://asc.fasb.org/extlink&amp;oid=126982197&amp;loc=SL120174063-112916<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 958<br> -SubTopic 360<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (d)<br> -URI https://asc.fasb.org/extlink&amp;oid=126982197&amp;loc=d3e99779-112916<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentDisclosureTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>27
<FILENAME>R14.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
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<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575598029808">
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<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Goodwill and Intangible Assets<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
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<tr><th class="th"><div>Dec. 31, 2022</div></th></tr>
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<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_GoodwillAndIntangibleAssetsDisclosureAbstract', window );"><strong>Goodwill and Intangible Assets</strong></a></td>
<td class="text">&#160;<span></span>
</td>
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<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_GoodwillAndIntangibleAssetsDisclosureTextBlock', window );">Goodwill and Intangible Assets</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 7 &#8212; Goodwill and Intangible Assets</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Goodwill represents the future economic benefits arising from assets acquired in a business combination that are not individually identified and separately recognized. There were no changes in goodwill balances during the years ended December 31, 2022 or 2021, while the below table reflects the gross carrying amounts and accumulated impairments as of the respective periods:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:52.19%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:2.43%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.96%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:2.44%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.96%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:2.44%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:12.11%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:52.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Gross&#160;carrying</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;width:13.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Accumulated</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;width:13.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:52.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">amount</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">impairment</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.59%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Net amount</b></p></td></tr><tr><td style="vertical-align:bottom;width:52.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:45.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:52.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Balance at December&#160;31, 2022 and 2021</p></td><td style="vertical-align:bottom;width:2.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 430,331</p></td><td style="vertical-align:bottom;width:2.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 248,388</p></td><td style="vertical-align:bottom;width:2.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 181,943</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company performs its annual goodwill impairment test at the beginning of the fourth quarter each year. As the Company maintains a single goodwill reporting unit, it determines the fair value of its reporting unit based upon the Company&#8217;s adjusted market capitalization. The annual test performed at the beginning of the fourth quarter of fiscal 2022, 2021, and 2020 did not result in any potential impairment as the fair value of the reporting unit was determined to exceed the carrying amount of the reporting unit.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The valuation of goodwill will continue to be subject to changes in the Company&#8217;s market capitalization and observable market control premiums. This analysis is sensitive to changes in the Company&#8217;s stock price and absent other qualitative factors, the Company may be required to record goodwill impairment charges in future periods if the stock price declines and remains depressed for an extended period of time.&#160; </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The components of purchased intangible assets were as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:26.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:26.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:29.42%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, 2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:29.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, 2021</b></p></td></tr><tr><td style="vertical-align:bottom;width:26.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Average</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Accumulated</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Accumulated</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:26.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Remaining</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Gross</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amortization</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Gross</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amortization</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:26.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amortization</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Carrying</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">and</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Net </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Carrying</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">and</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Net</b></p></td></tr><tr><td style="vertical-align:bottom;width:26.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:9.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Period</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.86%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amount</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:9.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Impairment</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.83%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amount</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.86%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amount</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:9.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Impairment</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amount</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="21" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:26.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in years)</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="17" style="vertical-align:bottom;white-space:nowrap;width:60.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:26.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Technology</p></td><td style="vertical-align:middle;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;white-space:nowrap;width:9.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;"> 2.6</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 327,908</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 316,918</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 10,990</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 327,908</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 310,551</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.86%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 17,357</p></td></tr><tr><td style="vertical-align:bottom;width:26.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Customer relationships</p></td><td style="vertical-align:bottom;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;"> 6.3</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 146,465</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 135,415</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 11,050</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 146,465</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 132,970</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 13,495</p></td></tr><tr><td style="vertical-align:bottom;width:26.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Trademarks and tradenames</p></td><td style="vertical-align:bottom;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;white-space:nowrap;width:9.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;"> 1.5</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 30,910</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 29,063</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 1,847</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 30,910</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 27,857</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.86%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 3,053</p></td></tr><tr><td style="vertical-align:bottom;width:26.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Other</p></td><td style="vertical-align:bottom;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"> -</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 3,686</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.34%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.08%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 3,686</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 3,686</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.34%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.08%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 3,686</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.86%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;width:26.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 12pt;"><span style="font-size:10pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;white-space:nowrap;width:9.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;"> 4.2</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 508,969</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.34%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.08%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 485,082</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 23,887</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 508,969</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.34%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.08%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 475,064</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.86%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 33,905</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Other intangible assets primarily consist of patents, licenses, and backlog.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Based on the intangible assets recorded at December 31, 2022, and assuming no subsequent additions to or impairment of the underlying assets, the remaining estimated annual amortization expense, is expected to be as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:46%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:75.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:17.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:75.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:20.82%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amortization</b></p></td></tr><tr><td style="vertical-align:bottom;width:75.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:20.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:75.58%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2023</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.58%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.67%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:17.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 8,347</p></td></tr><tr><td style="vertical-align:bottom;width:75.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2024</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:17.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 6,708</p></td></tr><tr><td style="vertical-align:bottom;width:75.58%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2025</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.58%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.67%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:17.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 3,136</p></td></tr><tr><td style="vertical-align:bottom;width:75.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2026</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:17.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 2,134</p></td></tr><tr><td style="vertical-align:bottom;width:75.58%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2027</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.58%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.67%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:17.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 1,550</p></td></tr><tr><td style="vertical-align:bottom;width:75.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Thereafter</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.67%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:17.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 2,012</p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:75.58%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Total</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.58%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.67%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:17.15%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 23,887</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_GoodwillAndIntangibleAssetsDisclosureAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_GoodwillAndIntangibleAssetsDisclosureAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_GoodwillAndIntangibleAssetsDisclosureTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for goodwill and intangible assets.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -URI https://asc.fasb.org/topic&amp;trid=2144416<br></p></div>
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<tr>
<td><strong> Name:</strong></td>
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</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>28
<FILENAME>R15.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
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							if (e.nextSibling.style.display=='none') {
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<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575678077104">
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<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Accrued Expenses and Other Liabilities<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2022</div></th></tr>
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<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PayablesAndAccrualsAbstract', window );"><strong>Accrued Expenses and Other Liabilities</strong></a></td>
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<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AccountsPayableAndAccruedLiabilitiesDisclosureTextBlock', window );">Accrued Expenses and Other Liabilities</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 8 &#8212; Accrued Expenses and Other Liabilities</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The components of accrued expenses and other current liabilities were as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:70.71%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:70.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.51%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.51%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:70.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.51%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.51%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="7" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:70.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:27.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:70.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Payroll and related benefits</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 30,044</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 35,712</p></td></tr><tr><td style="vertical-align:bottom;width:70.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Warranty</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 8,601</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 7,878</p></td></tr><tr><td style="vertical-align:bottom;width:70.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="-sec-ix-hidden:Hidden_EGVCh5E7LkOiByzYXsbm8w;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Operating lease liabilities</span></span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 3,333</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 4,437</p></td></tr><tr><td style="vertical-align:bottom;width:70.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Interest</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 2,853</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 2,757</p></td></tr><tr><td style="vertical-align:bottom;width:70.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Professional fees</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 2,102</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 1,467</p></td></tr><tr><td style="vertical-align:bottom;width:70.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Legal settlement</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 15,000</p></td></tr><tr><td style="vertical-align:bottom;width:70.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Sales, use, and other taxes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 2,027</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 4,889</p></td></tr><tr><td style="vertical-align:bottom;width:70.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Other</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 7,071</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 7,612</p></td></tr><tr><td style="vertical-align:bottom;width:70.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 56,031</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 79,752</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Customer deposits and deferred revenue</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Customer deposits totaled $110.2 million and $46.9 million at December 31, 2022 and 2021, respectively, which are included in &#8220;Customer deposits and deferred revenue&#8221; in the Consolidated Balance Sheets. Deferred revenue represents amounts billed, other than deposits, in excess of the revenue that can be recognized on a particular contract at the balance sheet date. Changes in deferred revenue were as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:80.44%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.55%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.55%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:14.44%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:80.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:16.99%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:80.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Balance - December&#160;31, 2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.55%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.55%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 16,276</p></td></tr><tr><td style="vertical-align:bottom;width:80.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Deferral of revenue</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 8,081</p></td></tr><tr><td style="vertical-align:bottom;width:80.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Recognition of unearned revenue</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.55%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.55%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.44%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (7,367)</p></td></tr><tr><td style="vertical-align:bottom;width:80.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Balance - December&#160;31, 2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.55%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.44%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 16,990</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">As of December&#160;31, 2022, the Company has approximately </span><span style="font-size:10pt;">$192.0</span><span style="font-size:10pt;"> million of remaining performance obligations on contracts with an original estimated duration of </span><span style="font-size:10pt;">one year</span><span style="font-size:10pt;"> or more, of which approximately </span><span style="font-size:10pt;">37%</span><span style="font-size:10pt;"> is expected to be recognized within </span><span style="font-size:10pt;">one year</span><span style="font-size:10pt;">, with the remaining amounts expected to be recognized between </span><span style="-sec-ix-hidden:Hidden_lMHLKbK2aECnPZnMvM5qZg;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">one</span></span><span style="font-size:10pt;"> to </span><span style="font-size:10pt;">three years</span><span style="font-size:10pt;">. The Company has elected to exclude disclosures regarding remaining performance obligations that have an original expected duration of </span><span style="font-size:10pt;">one</span><span style="font-size:10pt;"> year</span><span style="font-size:10pt;"> or less.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Other liabilities</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">At December 31, 2022 and 2021, other liabilities included (i) asset retirement obligations of $0.7 million and $2.8 million, respectively; (ii) income tax payables of $0.4 million for both periods, and (iii) medical and dental benefits for former executives of $2.0 million and $1.8 million, respectively. </p><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AccountsPayableAndAccruedLiabilitiesDisclosureTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for accounts payable and accrued liabilities at the end of the reporting period.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.19(a),20,24)<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AccountsPayableAndAccruedLiabilitiesDisclosureTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PayablesAndAccrualsAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PayablesAndAccrualsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>29
<FILENAME>R16.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
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							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
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							}</script>
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<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575678477264">
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<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Commitments and Contingencies<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
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<tr><th class="th"><div>Dec. 31, 2022</div></th></tr>
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<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_CommitmentsAndContingenciesDisclosureAbstract', window );"><strong>Commitments and Contingencies</strong></a></td>
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<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_CommitmentsAndContingenciesDisclosureTextBlock', window );">Commitments and Contingencies</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 9 &#8212; Commitments and Contingencies</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Warranty</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Changes in the Company&#8217;s product warranty reserves were as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:61.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:61.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:36.36%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:61.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.71%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="10" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:61.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="7" style="vertical-align:bottom;white-space:nowrap;width:35.08%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:61.57%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Balance - beginning of the year</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 7,878</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 5,058</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 7,067</p></td></tr><tr><td style="vertical-align:bottom;width:61.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Warranties issued</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 8,304</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 7,102</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 4,626</p></td></tr><tr><td style="vertical-align:bottom;width:61.57%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Consumption of reserves</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (7,527)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (5,784)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (6,691)</p></td></tr><tr><td style="vertical-align:bottom;width:61.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Changes in estimate</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.42%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (54)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,502</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 56</p></td></tr><tr><td style="vertical-align:bottom;width:61.57%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Balance - end of the year</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.42%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 8,601</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 7,878</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 5,058</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Minimum Lease Commitments</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">The Company&#8217;s operating leases primarily include real estate leases for properties used for manufacturing, R&amp;D activities, sales and service, and administration, as well as certain equipment leases. Some leases may include options to renew for a period of up to&#160;</span><span style="font-size:10pt;">5 years</span><span style="font-size:10pt;">, while others may include options to terminate the lease. The weighted average remaining lease term of the Company&#8217;s operating leases as of December 31, 2022 was&#160;</span><span style="font-size:10pt;">12 years</span><span style="font-size:10pt;">, and the weighted average discount rate used in determining the present value of future lease payments was&#160;</span><span style="font-size:10pt;">5.6%</span><span style="font-size:10pt;">.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The following table provides the maturities of lease liabilities at December 31, 2022: </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Operating</b></p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Leases</b></p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Payments due by period:</b></p></td><td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2023</p></td><td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 3,757</p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2024</p></td><td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 4,347</p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2025</p></td><td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 3,812</p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2026</p></td><td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 4,012</p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2027</p></td><td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 3,620</p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Thereafter</p></td><td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 34,244</p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Total future minimum lease payments</p></td><td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 53,792</p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Less: Imputed interest</p></td><td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (16,878)</p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Total</p></td><td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 36,914</p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:82.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Reported as of December&#160;31, 2022</b></p></td><td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="-sec-ix-hidden:Hidden_eoIrvRLA5kWv8kXlN_7lSg;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Accrued expenses and other current liabilities</span></span></p></td><td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 3,333</p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Long-term operating lease liabilities</p></td><td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 33,581</p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 12pt;"><span style="-sec-ix-hidden:Hidden_sGkRBjQQs0yUxZ2hF_23sA;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Total</span></span></p></td><td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 36,914</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Operating lease cost for the years ended December 31, 2022, 2021, and 2020 was $7.4 million, $6.6 million, and $5.4 million, respectively. Variable lease cost was $2.0 million for the year ended December 31, 2022, and $1.7 million for the years ended December 31, 2021, and 2020. Additionally, the Company has an immaterial amount of short-term leases. Lease expense, which includes operating lease costs and variable lease costs, was $9.4&#160;million, $8.4&#160;million, and $7.1&#160;million for the years ended December 31, 2022, 2021, and 2020, respectively. In addition, the Company is obligated under such leases for certain other expenses, including real estate taxes and insurance. Operating cash outflows from operating leases for the year ended December 31, 2022, 2021, and 2020 were $7.5&#160;million, $6.6 million (excluding landlord reimbursements for leasehold improvements of $6.1 million included within &#8220;Other, net&#8221; in the Consolidated Statements of Cash Flows), and $6.9 million, respectively.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Legal Proceedings</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">On June 8, 2018, an Ultratech shareholder who received Veeco stock as part of the consideration for the Ultratech acquisition filed a purported class action complaint in the Superior Court of the State of California, County of Santa Clara, captioned Wolther v. Maheshwari et al., Case No. 18CV329690, on behalf of himself and others who purchased or acquired shares of Veeco pursuant to the registration statement and prospectus which Veeco filed with the SEC in connection with the Ultratech acquisition (the &#8220;Wolther Action&#8221;). On August 2 and August 8, 2018, two purported class action complaints substantially similar to the Wolther Action were filed on behalf of different plaintiffs in the same court as the Wolther Action. These cases were consolidated with the Wolther Action, and a consolidated complaint was filed on December 11, 2018. The consolidated complaint sought to recover damages and fees under Sections 11, 12, and 15 of the Securities Act of 1933 for, among other things, alleged false/misleading statements in the registration statement and prospectus relating to the Ultratech acquisition, relating primarily to the alleged failure to disclose delays in the advanced packaging business, increased MOCVD competition in China, and an intellectual property dispute. In October 2021, Veeco and the court-appointed class representatives signed an agreement to settle the Wolther Action on a class-wide basis for $15.0 million, subject to court approval and class members&#8217; opportunity to object and opt-out. On June 27, 2022, the court granted final approval to the class action settlement. The settlement amount was funded by insurance carriers. The corresponding receivable and liability had been included within &#8220;Prepaid expenses and other current assets&#8221; and &#8220;Accrued expenses and other current liabilities&#8221;, respectively, in the Consolidated Balance Sheets as of December 31, 2021.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">On December 21, 2018, a purported Veeco stockholder filed a derivative action in the Superior Court of the State of California, County of Santa Clara, captioned Vladimir Gusinsky Revocable Trust v. Peeler, et al., Case No. 18CV339925, on behalf of nominal defendant Veeco (the &#8220;Derivative Action&#8221;). The complaint seeks to assert claims for breach of fiduciary duty, waste of corporate assets, and unjust enrichment against current and former Veeco directors premised on purported misstatements and omissions in the registration statement relating to the Ultratech acquisition. On January 25, 2021, the court granted the defendants&#8217; demurrer without leave to amend effecting the dismissal of the case. On March 26, 2021, plaintiff filed its notice of appeal of the trial court&#8217;s order granting defendants&#8217; demurrer without leave to amend. In April 2022, Veeco and plaintiff reached an agreement to settle the Derivative Action subject to court approval. As part of the settlement and subject to court approval, Veeco agreed to make certain revisions to its internal Disclosure Committee Charter and its director education program. After the court gave final approval in November 2022 to the Derivative Action settlement and the request for fees and costs made by plaintiff&#8217;s counsel, $0.3<span style="white-space:pre-wrap;"> million was paid to plaintiff&#8217;s counsel for fees and expenses. The amount was funded by insurance that Veeco maintains in the normal course of its business.  </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company is involved in various other legal proceedings arising in the normal course of business. The Company does not believe that the ultimate resolution of these matters will have a material adverse effect on its consolidated financial position, results of operations, or cash flows.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Concentrations of Credit Risk</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company depends on purchases from its ten largest customers, which accounted for 63% and 65% of net accounts receivable at December 31, 2022 and 2021, respectively.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Customers who accounted for more than 10% of net accounts receivable or net sales are as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:40.97%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.53%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.61%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.53%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.63%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.61%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.62%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:40.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="3" style="vertical-align:bottom;white-space:nowrap;width:19.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Accounts&#160;Receivable</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:31.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Net&#160;Sales&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:40.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="3" style="vertical-align:bottom;white-space:nowrap;width:19.78%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:31.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">For the Year Ended December&#160;31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:40.97%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Customer</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.61%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.63%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.61%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.62%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:40.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Customer A</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.63%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 14</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 15</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:40.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Customer B</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 10</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:40.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Customer C</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.63%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 12</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:40.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Customer D</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 10</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:40.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Customer E</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.63%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 13</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td></tr><tr><td style="vertical-align:bottom;width:40.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Customer F</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 10</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr></table><div style="font-family:'Times New Roman','Times','serif';font-size:9.0pt;margin-bottom:0pt;margin-top:0pt;min-height:1.19em;position:relative;width:100%;"><div style="background-color:#000000;height:1pt;position:relative;top:0.6em;width:25.0%;border:none;margin:0 auto 0 0;"/></div><table style="border-collapse:collapse;border:0;"><tr><td style="vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;"><span style="font-size:10pt;">*</span></p></td><td style="padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;"><span style="font-size:9pt;">Less than 10% of aggregate accounts receivable or net sales</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">The Company manufactures and sells its products to companies in different geographic locations. Refer to Note 16, &#8220;Segment Reporting and Geographic Information,&#8221; for additional information. In certain instances, the Company requires deposits from its customers for a portion of the sales price in advance of shipment and performs periodic credit evaluations on its customers. Where appropriate, the Company requires letters of credit on certain non-U.S. sales arrangements. Receivables generally are due within </span><span style="font-size:10pt;">30</span><span style="font-size:10pt;"> to </span><span style="font-size:10pt;">90 days</span><span style="font-size:10pt;"> from the date of invoice.</span><span style="font-size:10pt;"> </span><span style="font-size:10pt;">In some geographies, receivables may be payable up to </span><span style="font-size:10pt;">150 days</span><span style="font-size:10pt;"> from the date of the invoice.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Receivable Purchase Agreement</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">In December&#160;2020, the Company entered into a receivable purchase agreement with a financial institution to sell certain of its trade receivables from customers without recourse, up to $15.0 million at any point in time. Pursuant to this agreement, the Company sold $13.2&#160;million of receivables during the year ended December&#160;31, 2022, of which $5.4 million remained outstanding as of December 31, 2022 as defined in the receivable purchase agreement, and $9.6 million was available under the agreement for additional sales of receivables. There were no sales of receivables under this agreement during 2021. The net sale of accounts receivable under the agreement is reflected as a reduction of </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">accounts receivable in the Company&#8217;s Consolidated Balance Sheet at the time of sale and any fees for the sale of trade receivables were not material for the periods presented.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Suppliers</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company outsources certain functions to third parties, including the manufacture of several of its systems. While the Company relies on its outsourcing partners to perform their contracted functions, the Company maintains some level of internal manufacturing capability for these systems. In addition, certain of the components and sub-assemblies included in the Company&#8217;s products are obtained from a single source or a limited group of suppliers. The failure of the Company&#8217;s present outsourcing partners and suppliers to meet their contractual obligations and the Company&#8217;s inability to make alternative arrangements or resume the manufacture of these systems could have a material adverse effect on the Company&#8217;s revenues, profitability, cash flows, and relationships with its customers.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company had deposits with its suppliers of $9.4 million and $3.9 million at December 31, 2022 and 2021, respectively, that were included in &#8220;Prepaid expenses and other current assets&#8221; on the Consolidated Balance Sheets.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Purchase Commitments</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company had purchase commitments of $289.2 million at December 31, 2022, the majority of which will come due within one year. Purchase commitments are primarily for inventory used in manufacturing products, as well as equipment and project materials used to support research and development activities, and are partially offset by existing deposits with suppliers. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Bank Guarantees</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company has bank guarantees and letters of credit issued by a financial institution on its behalf as needed. At December 31, 2022, outstanding bank guarantees and letters of credit totaled $8.2&#160;million and unused bank guarantees and letters of credit of $14.1<span style="font-size:12pt;"> </span>million were available to be drawn upon.</p><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CommitmentsAndContingenciesDisclosureAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CommitmentsAndContingenciesDisclosureAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CommitmentsAndContingenciesDisclosureTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for commitments and contingencies.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 440<br> -URI https://asc.fasb.org/topic&amp;trid=2144648<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 954<br> -SubTopic 440<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=6491277&amp;loc=d3e6429-115629<br><br>Reference 3: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 450<br> -URI https://asc.fasb.org/topic&amp;trid=2127136<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 440<br> -SubTopic 10<br> -Section 50<br> -Paragraph 4<br> -Subparagraph (c)<br> -URI https://asc.fasb.org/extlink&amp;oid=123406679&amp;loc=d3e25336-109308<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 440<br> -SubTopic 10<br> -Section 50<br> -Paragraph 4<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=123406679&amp;loc=d3e25336-109308<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CommitmentsAndContingenciesDisclosureTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>30
<FILENAME>R17.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575597799792">
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<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Debt<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2022</div></th></tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtDisclosureAbstract', window );"><strong>Debt</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtDisclosureTextBlock', window );">Debt</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 10 &#8212; Debt</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Convertible Senior Notes</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">2023 Notes</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">On January 10, 2017, the Company issued $345.0 million of 2.70% convertible senior unsecured notes due 2023 (the &#8220;2023 Notes&#8221;). The Company received net proceeds, after deducting underwriting discounts and fees and expenses payable by the Company, of approximately $335.8 million. The 2023 Notes bear interest at a rate of 2.70% per year, payable semiannually in arrears on January 15 and July 15 of each year, commencing on July 15, 2017. The 2023 Notes mature on January 15, 2023, unless earlier purchased by the Company, redeemed, or converted.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;">On May 18, 2020, in connection with the completion of a private offering of $125.0&#160;million aggregate principal amount of&#160;3.75% convertible senior notes due 2027 described below, the Company repurchased and retired approximately $88.3&#160;million in aggregate principal amount of its outstanding 2023 Notes, with a carrying amount of $78.1&#160;million, for approximately $81.2&#160;million of cash. The Company accounted for the partial settlement of the 2023 Notes as an extinguishment, and as such, recorded a loss on extinguishment of approximately $3.0&#160;million for the year ended December 31, 2020, which is included in &#8220;Other income (expense), net&#8221; in the Consolidated Statements of Operations, as well as a reduction of additional paid-in capital of $0.1 million for the repurchase of the conversion feature.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;">Additionally, on November 11, 2020, the Company entered into a privately negotiated exchange agreement with a holder of its outstanding 2023 Notes, under which the Company agreed to retire $125.0 million in aggregate original principal </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;">amount of the 2023 Notes, with a carrying amount of $113.1 million, in exchange for the issuance of $132.5 million in aggregate principal amount of new 3.50% convertible senior notes due 2025 described below, which had a fair value that approximated the principal amount of notes issued. The Company accounted for the partial settlement of the 2023 Notes as an extinguishment, and as such, recorded a loss on extinguishment of approximately $4.8&#160;million for the year ended December 31, 2020, which is included in &#8220;Other income (expense), net&#8221; in the Consolidated Statements of Operations, as well as a reduction of additional paid-in capital of $14.6 million for the exchange of the conversion feature.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;background:#ffffff;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;">Finally, on November 5, 2021, the Company entered into a privately negotiated note purchase agreement with a holder of its outstanding 2023 Notes, under which the Company agreed to repurchase and retire approximately $111.5 million in aggregate original principal amount of the 2023 Notes, with a carrying amount of $105.5 million, for cash consideration of approximately $115.6 million, and approximately $1.0 million of accrued and unpaid interest. The Company accounted for the partial settlement of the 2023 Notes as an extinguishment, and as such, recorded a loss on extinguishment of approximately $4.0&#160;million for the year ended December 31, 2021, which is included in &#8220;Other income (expense), net&#8221; in the Consolidated Statements of Operations, as well as a reduction of additional paid-in capital of $6.1 million for the repurchase of the conversion feature.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;background:#ffffff;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;">The 2023 Notes matured on January 15, 2023 and were paid in cash and settled by the Company at that time.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">2025 Notes</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;">On November 17, 2020, as part of the privately negotiated exchange agreement described above, the Company issued $132.5 million of 3.50% convertible senior notes due 2025 (the &#8220;2025 Notes&#8221;). The 2025 Notes bear interest at a rate of&#160;3.50% per year, payable semiannually in arrears on January 15 and July 15 of each year, commencing on July 15, 2021. The 2025 Notes mature on January 15, 2025, unless earlier purchased by the Company, redeemed, or converted.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;"><i style="font-style:italic;">2027 Notes</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;background:#ffffff;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;">On May 18, 2020, the Company completed a private offering of $125.0&#160;million of&#160;3.75% convertible senior notes due 2027 (the &#8220;2027 Notes&#8221;). The Company received net proceeds of approximately $121.9&#160;million, after deducting underwriting discounts and fees and expenses payable by the Company. Additionally, the Company used approximately $10.3&#160;million of cash to purchase capped calls, discussed below. The 2027 Notes bear interest at a rate of&#160;3.75% per year, payable semiannually in arrears on June 1 and December 1 of each year, commencing on December 1, 2020. The 2027 Notes mature on June 1, 2027, unless earlier purchased by the Company, redeemed, or converted.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The 2023 Notes, 2025 Notes, and 2027 Notes (collectively, the &#8220;Notes&#8221;) are unsecured obligations of Veeco and rank senior in right of payment to any of Veeco&#8217;s subordinated indebtedness; equal in right of payment to all of Veeco&#8217;s unsecured indebtedness that is not subordinated; effectively subordinated in right of payment to any of Veeco&#8217;s secured indebtedness to the extent of the value of the assets securing such indebtedness; and structurally subordinated to all indebtedness and other liabilities (including trade payables) of Veeco&#8217;s subsidiaries.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Notes are convertible into cash, shares of the Company&#8217;s common stock, or a combination thereof, at the Company&#8217;s election, upon the satisfaction of specified conditions and during certain periods as described below. The initial conversion rates are 24.9800, 41.6667, and 71.5372 shares of the Company&#8217;s common stock per $1,000 principal amount of the 2023 Notes, 2025 Notes, and 2027 Notes, respectively, representing initial effective conversion prices of $40.03, $24.00, and $13.98 per share of common stock, respectively. The conversion rates may be subject to adjustment upon the occurrence of certain specified events.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Holders may convert all or any portion of their notes, in multiples of one thousand dollar principal amount, at their option at any time prior to the close of business on the business day immediately preceding October 15, 2022 with </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">respect to the 2023 Notes, October 15, 2024 with respect to the 2025 Notes, and October 1, 2027 with respect to the 2027 Notes, only under the following circumstances: </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:36pt;"/><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:25.2pt;padding:0pt;">(i)</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">During any calendar quarter (and only during such calendar quarter), if the last reported sale price of the common stock for at least </span><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">20</span><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"> trading days (whether or not consecutive) during a period of </span><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">30</span><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"> consecutive trading days ending on the last trading day of the immediately preceding calendar quarter is greater than or equal to </span><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">130%</span><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"> of the conversion price on each applicable trading day;</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:25.2pt;text-indent:-25.2pt;margin:0pt 0pt 0pt 36pt;"><span style="font-size:10pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:36pt;"/><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:25.2pt;padding:0pt;">(ii)</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">During the </span><span style="-sec-ix-hidden:Hidden_ni2iafIMQEWlcjh9n4sB8Q;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">five</span></span><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"> consecutive business day period after any </span><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">five</span><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"> consecutive trading day period (the &#8220;measurement period&#8221;) in which the trading price per </span><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">one</span><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"> thousand dollar principal amount of Notes for each trading day of the measurement period was less than </span><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">98%</span><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"> of the product of the last reported sale price of Veeco&#8217;s common stock and the conversion rate on each such trading day;</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:25.2pt;text-indent:-25.2pt;margin:0pt 0pt 0pt 36pt;"><span style="font-size:10pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:36pt;"/><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:25.2pt;padding:0pt;">(iii)</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">If the Company calls any or all of applicable series of the Notes for redemption at any time prior to the close of business on the scheduled trading day immediately preceding the redemption date; or</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:25.2pt;text-indent:-25.2pt;margin:0pt 0pt 0pt 36pt;"><span style="font-size:10pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:36pt;"/><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:25.2pt;padding:0pt;">(iv)</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Upon the occurrence of specified corporate events. </span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">For the calendar quarter ended December 31, 2022, the last reported sales price of common stock during the 30 consecutive trading days, based on the criteria outlined in (i) above, was greater than 130% of the conversion price of the 2027 Notes, and as such the 2027 Notes are convertible by the holders until March 31, 2023.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Holders may convert their notes at any time, regardless of the foregoing circumstances, on or after October 15, 2022 with respect to the 2023 Notes, October 15, 2024 with respect to the 2025 Notes, and October 1, 2026 with respect to the 2027 Notes, until the close of business on the business day immediately preceding the respective maturity date. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Accounting for the Notes after the adoption of ASU 2020-06</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company adopted ASU 2020-06 on January 1, 2022 as further described in Note 1, &#8220;Basis of Presentation&#8221;. Following the adoption of ASU 2020-06, the Notes are recorded as a single unit within liabilities in the consolidated balance sheets as the conversion features within the Notes are not derivatives that require bifurcation and the Notes do not involve a substantial premium. Transaction costs of $9.2 million, $1.9 million, and $3.1 million incurred in connection with the issuance of the 2023 Notes, 2025 Notes, and 2027 Notes, respectively, were recorded as direct deductions from the related debt liabilities and recognized as non-cash interest expense using the effective interest method over the expected terms of the Notes.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Accounting for the Notes prior to the adoption of ASU 2020-06</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">Upon conversion by the holders, the Company may elect to settle such conversion in shares of its common stock, cash, or a combination thereof. As a result of its cash conversion options, prior to the adoption of ASU 2020-06, the Company segregated the liability component of the instruments from the equity components. The liability components were measured by estimating the fair value of a non-convertible debt instrument that is similar in its terms to the Notes. The calculation of the fair value of the debt components required the use of Level 3 inputs, including utilization of convertible investors&#8217; credit assumptions and high yield bond indices. Fair value was estimated through discounting future interest and principal payments, an income approach, due under the Notes at a discount rate equal to the estimated borrowing rate for similar non-convertible debt, or </span><span style="font-size:10pt;">7.0%</span><span style="font-size:10pt;">, </span><span style="font-size:10pt;">8.0%</span><span style="font-size:10pt;">, and </span><span style="font-size:10pt;">9.1%</span><span style="font-size:10pt;"> with respect to the </span><span style="-sec-ix-hidden:Hidden_oLp6BWq4j0SmMOsjNERVHg;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">2023</span></span><span style="font-size:10pt;"> Notes, </span><span style="-sec-ix-hidden:Hidden_JIHuoDj1xk2Lu7ABrLHNxA;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">2025</span></span><span style="font-size:10pt;"> Notes, and </span><span style="-sec-ix-hidden:Hidden_Zok5uByMkkuRQp9J7Ofx9g;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">2027</span></span><span style="font-size:10pt;"> Notes, respectively. The excess of the aggregate face values of the Notes over the estimated fair values of the liability components of </span><span style="font-size:10pt;">$72.5</span><span style="font-size:10pt;"> million, </span><span style="font-size:10pt;">$21.0</span><span style="font-size:10pt;"> million, and </span><span style="font-size:10pt;">$34.2</span><span style="font-size:10pt;"> million with respect to the 2023 Notes, 2025 Notes, and 2027 Notes, respectively, were recognized as debt discounts and recorded as an increase to additional paid-in capital and were to be amortized over the expected lives of the Notes using the effective interest rate method. Amortization of the debt discounts were recognized as non-cash interest expense.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The transaction costs of $9.2 million, $1.9 million, and $3.1 million incurred in connection with the issuance of the 2023 Notes, 2025 Notes, and 2027 Notes, respectively, were allocated to the liability and equity components based on their relative values. Transaction costs allocated to the liability component were being amortized using the effective interest rate method and recognized as non-cash interest expense over the expected terms of the Notes. Transaction costs allocated to the equity component of $1.9 million, $0.3 million, and $0.8 million with respect to the 2023 Notes, 2025 Notes, and 2027 Notes, respectively, reduced the value of the equity components recognized in stockholders' equity.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The carrying values of the Notes are as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:21.23%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:1.15%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:1.07%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:10.78%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div 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style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:10.85%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><div 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style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:10.85%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:10.85%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:10.83%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:21.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.07%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="7" style="vertical-align:bottom;white-space:nowrap;width:37.16%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, 2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="7" style="vertical-align:bottom;white-space:nowrap;width:37.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, 2021</b></p></td></tr><tr><td style="vertical-align:bottom;width:21.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-family:'Calibri','Helvetica','sans-serif';font-weight:bold;">&#160;&#160;</b></p></td><td style="vertical-align:bottom;width:1.07%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:10.78%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Principal Amount</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:10.85%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Unamortized </b><b style="font-weight:bold;"><br/></b><b style="font-weight:bold;">transaction costs</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:10.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Net carrying value</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:10.85%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Principal Amount</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:10.85%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Unamortized </b><b style="font-weight:bold;"><br/></b><b style="font-weight:bold;">debt discount/</b><b style="font-weight:bold;"><br/></b><b style="font-weight:bold;">transaction costs</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:10.83%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Net carrying value</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="19" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:21.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="16" style="vertical-align:bottom;white-space:nowrap;width:76.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:21.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2023 Notes</p></td><td style="vertical-align:bottom;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 20,173</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.85%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (4)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 20,169</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.85%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 20,173</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.85%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (967)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 19,206</p></td></tr><tr><td style="vertical-align:bottom;width:21.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2025 Notes</p></td><td style="vertical-align:bottom;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 132,500</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.85%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (990)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 131,510</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.85%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 132,500</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.85%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (17,302)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 115,198</p></td></tr><tr><td style="vertical-align:bottom;width:21.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2027 Notes</p></td><td style="vertical-align:bottom;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.78%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 125,000</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.85%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (2,019)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.94%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 122,981</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.85%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 125,000</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.85%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (29,966)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.83%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 95,034</p></td></tr><tr><td style="vertical-align:bottom;width:21.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Net carrying value</b></p></td><td style="vertical-align:bottom;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 12pt;"><span style="font-size:10pt;font-weight:bold;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.78%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 277,673</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.85%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (3,013)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.94%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 274,660</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.85%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 277,673</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.85%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (48,235)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.83%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 229,438</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Total interest expense related to the Notes is as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:53.82%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.57%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:12.89%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:12.89%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:12.83%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:53.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:44.6%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">For&#160;the year ended&#160;December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:53.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.87%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="10" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:53.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:44.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:53.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Cash Interest Expense</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.57%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.89%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.89%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:53.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Coupon interest expense - 2023 Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 545</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 3,138</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 7,390</p></td></tr><tr><td style="vertical-align:bottom;width:53.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Coupon interest expense - 2025 Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.57%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.89%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 4,637</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.89%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 4,637</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 554</p></td></tr><tr><td style="vertical-align:bottom;width:53.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Coupon interest expense - 2027 Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 4,688</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 4,688</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 2,904</p></td></tr><tr><td style="vertical-align:bottom;width:53.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Non-cash Interest Expense</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.57%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.89%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.89%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:53.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Amortization of debt discount/transaction costs- 2023 Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 97</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 4,932</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 10,887</p></td></tr><tr><td style="vertical-align:bottom;width:53.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Amortization of debt discount/transaction costs- 2025 Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.57%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.89%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 457</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.89%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 4,795</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 546</p></td></tr><tr><td style="vertical-align:bottom;width:53.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Amortization of debt discount/transaction costs- 2027 Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 408</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 4,092</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.83%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 2,359</p></td></tr><tr><td style="vertical-align:bottom;width:53.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total Interest Expense</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.57%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.89%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 10,832</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.89%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 26,282</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.83%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 24,640</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">The Company determined the Notes are Level 2 liabilities in the fair value hierarchy and estimated their fair values as </span><span style="font-size:10pt;">$19.5</span><span style="font-size:10pt;"> million, </span><span style="font-size:10pt;">$143.6</span><span style="font-size:10pt;"> million, and </span><span style="font-size:10pt;">$192.0</span><span style="font-size:10pt;"> million at December 31, 2022 for the </span><span style="-sec-ix-hidden:Hidden_6pZXc4yN8UGzliGoc7Xcfw;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">2023</span></span><span style="font-size:10pt;"> Notes, </span><span style="-sec-ix-hidden:Hidden_j8h4rOm8lUqa-Aq9yQNl0g;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">2025</span></span><span style="font-size:10pt;"> Notes, and </span><span style="-sec-ix-hidden:Hidden_7AsSvO4WhUmmbzAO1MAR1w;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">2027</span></span><span style="font-size:10pt;"> Notes, respectively.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;"><i style="font-style:italic;">Capped Call Transactions</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;background:#ffffff;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;">In connection with the offering of the 2027 Notes, on May&#160;13, 2020, the Company entered into privately negotiated capped call transactions (the &#8220;Capped Call Transactions&#8221;), pursuant to capped call confirmations, covering the total principal amount of the 2027 Notes for an aggregate premium of $10.3&#160;million. The Capped Call Transactions are expected generally to reduce the potential dilution to the Company&#8217;s common stock upon any conversion of the 2027 Notes and/or offset any cash payments the Company is required to make in excess of the aggregate principal amount of converted 2027 Notes, as the case may be, with such reduction and/or offset subject to a cap based on the capped price of the Capped Call Transactions. The Capped Call Transactions exercise price is equal to the initial conversion price of the 2027 Notes, and the capped price of the Capped Call Transactions is approximately $18.46&#160;per share and is subject to certain adjustments under the terms of the capped call confirmations.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;background:#ffffff;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;">The Capped Call Transactions are separate transactions entered into by the Company with the capped call counterparties, are not part of the terms of the 2027 Notes and do not change the holders&#8217; rights under the 2027 Notes. Holders of the 2027 Notes do not have any rights with respect to the Capped Call Transactions. The cost of the Capped Call Transactions is not expected to be tax-deductible as the Company did not elect to integrate the Capped Call Transactions into the 2027 Notes for tax purposes. The Company used a portion of the net proceeds from the offering of the 2027 Notes to pay for the Capped Call Transactions, and the cost of the Capped Call Transactions was recorded as a reduction of the Company&#8217;s additional paid-in capital in the accompanying consolidated financial statements.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Revolving Credit Facility</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">On December 16, 2021, the Company entered into a loan and security agreement providing for a senior secured revolving credit facility in an aggregate principal amount of </span><span style="font-size:10pt;">$150</span><span style="font-size:10pt;"> million (the &#8220;Credit Facility&#8221;), including a </span><span style="font-size:10pt;">$15</span><span style="font-size:10pt;"> million letter of credit sublimit. The Credit Facility is guaranteed by the Company&#8217;s direct material U.S. subsidiaries, subject to customary exceptions. Borrowings under the Credit Facility are secured by a first-priority lien on substantially all of the assets of the Company, subject to customary exceptions. </span><span style="font-size:10pt;">The Credit Facility has a term of </span><span style="font-size:10pt;">five years</span><span style="font-size:10pt;">, maturing on December 16, 2026, or earlier if certain liquidity measures are not met prior to the 2025 Notes maturing. </span><span style="font-size:10pt;">Subject to certain conditions and the receipt of commitments from the lenders, the Loan and Security Agreement allows for revolving commitments under the Credit Facility to be increased by up to </span><span style="font-size:10pt;">$75</span><span style="font-size:10pt;"> million. The existing lenders under the Credit Facility are entitled, but not obligated, to provide such incremental commitments.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Borrowings will bear interest at a floating rate which can be, at the Company&#8217;s option, either (a) an alternate base rate plus an applicable rate ranging from 0.50% to 1.25% or (b) a SOFR rate (with a floor of 0.00%) for the specified interest period plus an applicable rate ranging from 1.50% to 2.25%, in each case, depending on the Company&#8217;s Secured Net Leverage Ratio (as defined in the Loan and Security Agreement). The Company will pay an unused commitment fee ranging from 0.25% to 0.35% based on unused capacity under the Credit Facility and the Company&#8217;s Secured Net Leverage Ratio. The Company may use the proceeds of borrowings under the Credit Facility to pay transaction fees and expenses, provide for its working capital needs and reimburse drawings under letters of credit and for other general corporate purposes.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Loan and Security Agreement contains customary affirmative covenants for transactions of this type, including, among others, the provision of financial and other information to the administrative agent, notice to the administrative agent upon the occurrence of certain material events, preservation of existence, maintenance of properties and insurance, compliance with laws, including environmental laws, the provision of additional guarantees, and an affiliate transactions covenant, subject to certain exceptions. The Loan and Security Agreement contains customary negative covenants, including, among others, restrictions on the ability to merge and consolidate with other companies, incur indebtedness, refinance our existing convertible notes, grant liens or security interests on assets, make investments, acquisitions, loans, or advances, pay dividends, and sell or otherwise transfer assets.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Loan and Security Agreement contains financial maintenance covenants that require the Borrower to maintain an Interest Coverage Ratio (as defined in the Loan and Security Agreement) of not less than 3.00 to 1.00, a Total Net Leverage Ratio (as defined in the Loan and Security Agreement) of not more than 4.50 to 1.00, and a Secured Net Leverage Ratio (as defined in the Loan and Security Agreement) of not more than 2.50 to 1.00, in each case, tested at the end of each fiscal quarter commencing with the fiscal quarter ending March 31, 2022. The Loan and Security Agreement also provides for a number of customary events of default, including, among others: payment defaults to the lenders&#894; voluntary and involuntary bankruptcy proceedings&#894; covenant defaults&#894; material inaccuracies of representations and warranties&#894; certain change of control events&#894; material money judgments&#894; and other customary events of default. The occurrence of an event of default could result in the acceleration of obligations and the termination of lending commitments under the Loan and Security Agreement.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">No amounts were outstanding under the Credit Facility as of December 31, 2022 or December 31, 2021.</p><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtDisclosureAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtDisclosureAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtDisclosureTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for information about short-term and long-term debt arrangements, which includes amounts of borrowings under each line of credit, note payable, commercial paper issue, bonds indenture, debenture issue, own-share lending arrangements and any other contractual agreement to repay funds, and about the underlying arrangements, rationale for a classification as long-term, including repayment terms, interest rates, collateral provided, restrictions on use of assets and activities, whether or not in compliance with debt covenants, and other matters important to users of the financial statements, such as the effects of refinancing and noncompliance with debt covenants.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -URI https://asc.fasb.org/topic&amp;trid=2208564<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1B<br> -Subparagraph (h)<br> -URI https://asc.fasb.org/extlink&amp;oid=123466505&amp;loc=SL123495323-112611<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1C<br> -Subparagraph (c)<br> -URI https://asc.fasb.org/extlink&amp;oid=123466505&amp;loc=SL123495334-112611<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1I<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=123466505&amp;loc=SL123495371-112611<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1I<br> -Subparagraph (d)<br> -URI https://asc.fasb.org/extlink&amp;oid=123466505&amp;loc=SL123495371-112611<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(c))<br> -URI https://asc.fasb.org/extlink&amp;oid=120395691&amp;loc=d3e23780-122690<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1B<br> -Subparagraph (g)<br> -URI https://asc.fasb.org/extlink&amp;oid=123466505&amp;loc=SL123495323-112611<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1C<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=123466505&amp;loc=SL123495334-112611<br><br>Reference 9: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1C<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=123466505&amp;loc=SL123495334-112611<br><br>Reference 10: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1E<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=123466505&amp;loc=SL123495348-112611<br><br>Reference 11: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1B<br> -URI https://asc.fasb.org/extlink&amp;oid=123466505&amp;loc=SL123495323-112611<br><br>Reference 12: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1I<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=123466505&amp;loc=SL123495371-112611<br><br>Reference 13: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1B<br> -Subparagraph (i)<br> -URI https://asc.fasb.org/extlink&amp;oid=123466505&amp;loc=SL123495323-112611<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtDisclosureTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>31
<FILENAME>R18.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575598029808">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Stockholders' Equity<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2022</div></th></tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_StockholdersEquityNoteAbstract', window );"><strong>Stockholders' Equity</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_StockholdersEquityNoteDisclosureTextBlock', window );">Stockholders' Equity</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 11 &#8212; Stockholders&#8217; Equity</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Accumulated Other Comprehensive Income (&#8220;AOCI&#8221;)</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The following table presents the changes in the balances of each component of AOCI, net of tax:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:62.69%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.01%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:62.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Unrealized</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:62.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Gains&#160;(Losses)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:62.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Foreign</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">on Available</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:62.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Currency</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">for&#160;Sale&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:62.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.7%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Translation</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.51%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Securities</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.7%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Total</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="10" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:62.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:34.85%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:62.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Balance - December&#160;31, 2019</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 1,861</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 33</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 1,894</p></td></tr><tr><td style="vertical-align:bottom;width:62.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Other comprehensive income (loss)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 5</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.01%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (53)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (48)</p></td></tr><tr><td style="vertical-align:bottom;width:62.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Balance - December&#160;31, 2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 1,866</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (20)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 1,846</p></td></tr><tr><td style="vertical-align:bottom;width:62.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Other comprehensive income (loss)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (52)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.01%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (311)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (363)</p></td></tr><tr><td style="vertical-align:bottom;width:62.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Balance - December&#160;31, 2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 1,814</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (331)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 1,483</p></td></tr><tr><td style="vertical-align:bottom;width:62.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Other comprehensive income (loss)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (41)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.01%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (514)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (555)</p></td></tr><tr><td style="vertical-align:bottom;width:62.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Balance - December&#160;31, 2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 1,773</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.01%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (845)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 928</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company did not allocate additional tax expense (benefit) to other comprehensive income (loss) for the years ended December 31, 2021 and 2020, as the Company was in a full valuation allowance position such that a deferred tax asset related to amounts recognized in other comprehensive income was not regarded as realizable on a more-likely-than-not basis. The Company allocated an immaterial amount of additional tax benefit to other comprehensive income (loss) for the year ended December 31, 2022, as the Company is no longer in a full valuation allowance position.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Preferred Stock</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Board of Directors has authority under the Company&#8217;s Certificate of Incorporation to issue shares of preferred stock, par value $0.01, with voting and economic rights to be determined by the Board of Directors. As of December 31, 2022, no preferred shares have been issued.</p><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StockholdersEquityNoteAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StockholdersEquityNoteAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StockholdersEquityNoteDisclosureTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for shareholders' equity comprised of portions attributable to the parent entity and noncontrolling interest, including other comprehensive income. Includes, but is not limited to, balances of common stock, preferred stock, additional paid-in capital, other capital and retained earnings, accumulated balance for each classification of other comprehensive income and amount of comprehensive income.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -URI https://asc.fasb.org/topic&amp;trid=2208762<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section 50<br> -Paragraph 13<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=126973232&amp;loc=SL123496158-112644<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section 50<br> -Paragraph 13<br> -URI https://asc.fasb.org/extlink&amp;oid=126973232&amp;loc=SL123496158-112644<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section 50<br> -Paragraph 14<br> -Subparagraph (c)<br> -URI https://asc.fasb.org/extlink&amp;oid=126973232&amp;loc=SL123496171-112644<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section 50<br> -Paragraph 14<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=126973232&amp;loc=SL123496171-112644<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.3-04)<br> -URI https://asc.fasb.org/extlink&amp;oid=120397183&amp;loc=d3e187085-122770<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section 50<br> -Paragraph 18<br> -Subparagraph (d)<br> -URI https://asc.fasb.org/extlink&amp;oid=126973232&amp;loc=SL123496189-112644<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section 50<br> -Paragraph 13<br> -Subparagraph (g)<br> -URI https://asc.fasb.org/extlink&amp;oid=126973232&amp;loc=SL123496158-112644<br><br>Reference 9: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section 50<br> -Paragraph 18<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=126973232&amp;loc=SL123496189-112644<br><br>Reference 10: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section 50<br> -Paragraph 13<br> -Subparagraph (h)<br> -URI https://asc.fasb.org/extlink&amp;oid=126973232&amp;loc=SL123496158-112644<br><br>Reference 11: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section 50<br> -Paragraph 14<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=126973232&amp;loc=SL123496171-112644<br><br>Reference 12: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section 50<br> -Paragraph 18<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=126973232&amp;loc=SL123496189-112644<br><br>Reference 13: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section 50<br> -Paragraph 16<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=126973232&amp;loc=SL123496180-112644<br><br>Reference 14: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section 50<br> -Paragraph 13<br> -Subparagraph (i)<br> -URI https://asc.fasb.org/extlink&amp;oid=126973232&amp;loc=SL123496158-112644<br><br>Reference 15: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(e)(1))<br> -URI https://asc.fasb.org/extlink&amp;oid=120395691&amp;loc=d3e23780-122690<br><br>Reference 16: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 815<br> -SubTopic 40<br> -Section 50<br> -Paragraph 6<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=126731327&amp;loc=SL126733271-114008<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StockholdersEquityNoteDisclosureTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>32
<FILENAME>R19.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575600214432">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Stock Plans<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2022</div></th></tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract', window );"><strong>Stock Plans</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock', window );">Stock Plans</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 12 &#8212; Stock Plans</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Share-based incentive awards are provided to employees under the terms of the Company&#8217;s equity incentive compensation plans (the &#8220;Plans&#8221;), which are administered by the Compensation Committee of the Board of Directors. The 2019 Plan originated as the 2010 Stock Incentive Plan and was originally approved by the Company&#8217;s shareholders in May 2010. This Plan was subsequently amended, as approved by shareholders, in 2013, 2016, 2019 (at which time the Plan was renamed the 2019 Stock Incentive Plan), and 2022 (as amended to date, the &#8220;2019 Plan&#8221;). The Company&#8217;s employees, non-employee directors, and consultants are eligible to receive awards under the 2019 Plan, which can include non-qualified stock options, incentive stock options, RSAs, RSUs, PSAs, PSUs, share appreciation rights, dividend equivalent rights, or any combination thereof. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">In 2013, the Board of Directors granted equity awards to certain employees under the Company&#8217;s 2013 Inducement Stock Incentive Plan (the &#8220;Inducement Plan&#8221;). The Company issued </span><span style="font-size:10pt;">124,500</span><span style="font-size:10pt;"> stock option shares and </span><span style="font-size:10pt;">87,000</span><span style="font-size:10pt;"> RSUs under this plan. Stock options under this plan vest over a </span><span style="font-size:10pt;">three year</span><span style="font-size:10pt;"> period and have a </span><span style="font-size:10pt;">10-year</span><span style="font-size:10pt;"> term, and RSUs under this plan vest over a </span><span style="-sec-ix-hidden:Hidden_GYTb4cpfHkKMyAjEn-joig;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">two</span></span><span style="font-size:10pt;"> or </span><span style="font-size:10pt;">four year</span><span style="font-size:10pt;"> period. At December 31, 2013, the Inducement Plan was merged into the 2019 Plan and is considered an inactive plan with </span><span style="font-size:10pt;">no</span><span style="font-size:10pt;"> further shares available for grant. At December 31, 2022, there are </span><span style="font-size:10pt;">2,000</span><span style="font-size:10pt;"> option shares and </span><span style="font-size:10pt;">no</span><span style="font-size:10pt;"> RSUs outstanding under the Inducement Plan.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">The Company is authorized to issue up to </span><span style="font-size:10pt;">17.8</span><span style="font-size:10pt;"> million shares under the 2019 Plan. Option awards are granted with an exercise price equal to the closing price of the Company&#8217;s common stock on the trading day prior to the date of grant; option awards generally vest over a </span><span style="font-size:10pt;">three year</span><span style="font-size:10pt;"> period and have a </span><span style="-sec-ix-hidden:Hidden_geqmoAoR4E-cxxENNB5XWw;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">seven</span></span><span style="font-size:10pt;"> or </span><span style="font-size:10pt;">ten year</span><span style="font-size:10pt;"> term. RSAs and RSUs generally vest over </span><span style="-sec-ix-hidden:Hidden_lv-KmzIXvUmFz5KZwCediA;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">one</span></span><span style="font-size:10pt;"> to </span><span style="font-size:10pt;">five years</span><span style="font-size:10pt;">. Certain option and share awards provide for accelerated vesting if there is a change in control, as defined in the 2019 Plan. At December 31, 2022, there are </span><span style="font-size:10pt;">0.2</span><span style="font-size:10pt;"> million option shares and </span><span style="font-size:10pt;">0.8</span><span style="font-size:10pt;"> million RSUs and PSUs outstanding under the 2019 Plan.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">The Company is authorized to issue up to </span><span style="font-size:10pt;">2.25</span><span style="font-size:10pt;"> million shares under the approved 2016 employee stock purchase plan (&#8220;ESPP&#8221;), including additional shares authorized under plan amendments approved by shareholders in 2019 and 2021. Under the ESPP, substantially all employees in the U.S. may purchase the Company&#8217;s common stock through payroll deductions at a price equal to </span><span style="font-size:10pt;">85</span><span style="font-size:10pt;"> percent of the lower of the fair market value of the Company&#8217;s common stock at the beginning or end of each </span><span style="font-size:10pt;">six-month</span><span style="font-size:10pt;"> offer period, as defined in the ESPP, and subject to certain limits. The ESPP was approved by the Company&#8217;s shareholders. </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Shares Reserved for Future Issuance</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">At December 31, 2022, the Company has 6.1 million shares reserved to cover exercises of outstanding stock options, vesting of RSUs, and additional grants under the 2019 Plan.<span style="font-size:12pt;"> </span>At December 31, 2022, the Company has 0.6 million shares reserved to cover future issuances under the ESPP Plan.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Share-Based Compensation</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company recognized share-based compensation in the following line items in the Consolidated Statements of Operations for the periods indicated:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:64.43%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.52%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:64.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:33.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">For the year ended December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:64.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.78%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.78%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.81%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="10" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:64.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:33.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:64.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Cost of sales</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 4,551</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 2,373</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 1,870</p></td></tr><tr><td style="vertical-align:bottom;width:64.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Research and development</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 6,682</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 3,850</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 2,900</p></td></tr><tr><td style="vertical-align:bottom;width:64.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Selling, general, and administrative</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 11,761</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 9,026</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.52%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 7,933</p></td></tr><tr><td style="vertical-align:bottom;width:64.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 22,994</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 15,249</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.52%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 12,703</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company did not realize any tax benefits associated with share-based compensation for the years ended December 31, 2021 and 2020 due to the full valuation allowance on its U.S. deferred tax assets. See Note 15, &#8220;Income Taxes&#8221; for additional information. The Company recognized a tax benefit of approximately $4.5 million associated with share-based compensation for the year ended December 31, 2022. The Company capitalized an immaterial amount of share-based compensation into inventory for the years ended December 31, 2022, 2021, and 2020.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Unrecognized share-based compensation costs at December 31, 2022 are summarized below:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.3%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:13.67%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Unrecognized</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Weighted</b></p></td></tr><tr><td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Share-Based</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Average&#160;Period</b></p></td></tr><tr><td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Compensation</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Expected&#160;to&#160;be</b></p></td></tr><tr><td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.71%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Costs</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.67%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Recognized</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="6" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="3" style="vertical-align:bottom;white-space:nowrap;width:14.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in years)</i></p></td></tr><tr><td style="vertical-align:bottom;width:69.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Restricted stock units</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 9,468</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.67%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"><span style="font-size:10pt;"> 1.9</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Restricted stock awards</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 24,610</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"><span style="font-size:10pt;"> 1.9</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Performance share units</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.3%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 3,310</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.67%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"><span style="font-size:10pt;"> 2.0</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Total unrecognized share-based compensation cost</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.3%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 37,388</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"><span style="font-size:10pt;"> 1.9</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Stock Option Awards</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Stock options are awards issued to employees that entitle the holder to purchase shares of the Company&#8217;s stock at a fixed price. The following table summarizes the equity activity related to stock options:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:71.48%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:10.93%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:71.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Weighted&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:71.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Number&#160;of</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Average</b></p></td></tr><tr><td style="vertical-align:bottom;width:71.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Shares</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.54%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Exercise&#160;Price</b></p></td></tr><tr><td style="vertical-align:bottom;width:71.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:71.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;">Balance -  December&#160;31, 2019</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,119</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 34.88</p></td></tr><tr><td style="vertical-align:bottom;width:71.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Expired</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (389)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 34.15</p></td></tr><tr><td style="vertical-align:bottom;width:71.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;">Balance -  December&#160;31, 2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 730</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 35.26</p></td></tr><tr><td style="vertical-align:bottom;width:71.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Exercised</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (2)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 23.36</p></td></tr><tr><td style="vertical-align:bottom;width:71.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Expired</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (285)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 40.16</p></td></tr><tr><td style="vertical-align:bottom;width:71.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;">Balance -  December&#160;31, 2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 443</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 32.15</p></td></tr><tr><td style="vertical-align:bottom;width:71.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Expired</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (266)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 32.95</p></td></tr><tr><td style="vertical-align:bottom;width:71.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;">Balance -  December&#160;31, 2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 177</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 30.94</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The following table summarizes stock option information at December 31, 2022:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:25.48%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:14.13%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:12.79%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:16.7%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:13.4%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:25.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="9" style="vertical-align:bottom;white-space:nowrap;width:71.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Options&#160;Outstanding and Exercisable</b></p></td></tr><tr><td style="vertical-align:bottom;width:25.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:16.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Weighted</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:25.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Aggregate</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:16.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Average</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Weighted</b></p></td></tr><tr><td style="vertical-align:bottom;width:25.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Intrinsic</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:16.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Remaining</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Average</b></p></td></tr><tr><td style="vertical-align:bottom;width:25.48%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;margin:0pt;"><b style="font-weight:bold;">Range&#160;of&#160;Exercise&#160;Prices</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Shares</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.87%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Value</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:16.7%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Contractual&#160;Life</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.48%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Exercise&#160;Price</b></p></td></tr><tr><td style="vertical-align:bottom;width:25.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:16.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;years)</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:25.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$20.00 - $30.00</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 10</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.79%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:16.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"><span style="font-size:8pt;"> 0.8</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 29.21</p></td></tr><tr><td style="vertical-align:bottom;width:25.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$30.01 - $40.00</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 167</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.79%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:16.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"><span style="font-size:8pt;"> 0.8</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 31.02</p></td></tr><tr><td style="vertical-align:bottom;width:25.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.13%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 177</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.79%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:16.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"><span style="font-size:8pt;"> 0.8</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 30.94</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="background:#ffffff;">There were&#160;</span><span style="background:#ffffff;">no</span><span style="background:#ffffff;">&#160;unvested options outstanding as of December 31, 2022.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;background:#ffffff;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The following table summarizes information on options exercised for the periods indicated:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:69.29%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:69.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:28.64%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:69.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="10" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:69.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:28.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:69.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Cash received from options exercised</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 37</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;width:69.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Intrinsic value of options exercised</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 6</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">RSAs, RSUs, PSAs, PSUs</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">RSAs are stock awards issued to employees and directors that are subject to specified restrictions and a risk of forfeiture. RSUs are stock awards issued to employees that entitle the holder to receive shares of common stock as the awards vest. PSAs and PSUs are awards that result in an issuance of shares of common stock to employees if certain performance or market conditions are achieved. All of these awards typically vest over </span><span style="-sec-ix-hidden:Hidden_mYtq0YB12kmZB5r9hVizow;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">one</span></span><span style="font-size:10pt;"> to </span><span style="font-size:10pt;">four years</span><span style="font-size:10pt;"> and vesting is subject to the employee's continued service with the Company and, in the case of performance awards, meeting certain performance or market conditions. The fair value of the awards is determined and fixed based on the closing price of the Company&#8217;s common stock on the trading day prior to the date of grant, or, in the case of performance awards with market conditions, fair value is determined using a Monte Carlo simulation. </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The following table summarizes the equity activity of non-vested restricted shares and performance shares:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:73.98%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.74%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:73.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Weighted</b></p></td></tr><tr><td style="vertical-align:bottom;width:73.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Average</b></p></td></tr><tr><td style="vertical-align:bottom;width:73.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Number&#160;of</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Grant&#160;Date</b></p></td></tr><tr><td style="vertical-align:bottom;width:73.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Shares</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.04%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Fair&#160;Value</b></p></td></tr><tr><td style="vertical-align:bottom;width:73.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;">Balance -  December&#160;31, 2019</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 2,257</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 16.20</p></td></tr><tr><td style="vertical-align:bottom;width:73.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Granted</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,054</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 9.53</p></td></tr><tr><td style="vertical-align:bottom;width:73.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Performance award adjustments</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (51)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 30.94</p></td></tr><tr><td style="vertical-align:bottom;width:73.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Vested</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (798)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 16.01</p></td></tr><tr><td style="vertical-align:bottom;width:73.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Forfeited</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (422)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 14.87</p></td></tr><tr><td style="vertical-align:bottom;width:73.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;">Balance -  December&#160;31, 2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 2,040</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 12.73</p></td></tr><tr><td style="vertical-align:bottom;width:73.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Granted</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,031</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 24.26</p></td></tr><tr><td style="vertical-align:bottom;width:73.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Performance award adjustments</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 159</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 18.38</p></td></tr><tr><td style="vertical-align:bottom;width:73.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Vested</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (1,014)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 15.50</p></td></tr><tr><td style="vertical-align:bottom;width:73.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Forfeited</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (133)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 15.08</p></td></tr><tr><td style="vertical-align:bottom;width:73.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;">Balance -  December&#160;31, 2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 2,083</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 17.33</p></td></tr><tr><td style="vertical-align:bottom;width:73.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Granted</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,253</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 29.12</p></td></tr><tr><td style="vertical-align:bottom;width:73.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Performance award adjustments</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 85</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 14.03</p></td></tr><tr><td style="vertical-align:bottom;width:73.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Vested</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (844)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 15.00</p></td></tr><tr><td style="vertical-align:bottom;width:73.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Forfeited</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (81)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 20.18</p></td></tr><tr><td style="vertical-align:bottom;width:73.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;">Balance -  December&#160;31, 2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 2,496</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 23.83</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The total fair value of shares that vested during the years ended December 31, 2022, 2021, and 2020 was $22.1 million, $22.8 million, and $9.0 million, respectively. For performance awards, the final number of shares earned will vary depending on the achievement of the actual results relative to the performance or market conditions. Each performance award is included in the table above at the grant date target share amount until the end of the performance period if not previously forfeited. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The fair value of performance awards with market conditions is estimated on the date of grant using a Monte Carlo simulation. Estimates of fair value are not intended to predict actual future events or the value ultimately realized by employees who receive these awards. The weighted average fair value and the assumptions used in calculating such values during fiscal years 2022, 2021, and 2020 for performance awards with market conditions were based on estimates at the date of grant as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:67.07%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.71%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:6.33%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:6.33%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:6.48%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:67.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:28.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended December&#160;31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:7.36%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;width:7.37%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;width:8.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Weighted average fair value</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;width:6.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 45.28</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;width:6.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 27.81</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;width:6.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 10.59</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Dividend yield</p></td><td style="vertical-align:bottom;width:1.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 0</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 0</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 0</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td></tr><tr><td style="vertical-align:bottom;width:67.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Expected volatility factor<sup style="font-family:'Calibri','Helvetica','sans-serif';font-size:8.25pt;line-height:100%;top:0pt;vertical-align:top;">(1)</sup></p></td><td style="vertical-align:bottom;width:1.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 58</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 63</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;width:1.72%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 60</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td></tr><tr><td style="vertical-align:bottom;width:67.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Risk-free interest rate<sup style="font-family:'Calibri','Helvetica','sans-serif';font-size:8.25pt;line-height:100%;top:0pt;vertical-align:top;">(2)</sup></p></td><td style="vertical-align:bottom;width:1.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 2.13</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 0.34</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 0.54</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td></tr><tr><td style="vertical-align:bottom;width:67.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Expected life (in years)<sup style="font-family:'Calibri','Helvetica','sans-serif';font-size:8.25pt;line-height:100%;top:0pt;vertical-align:top;">(3)</sup></p></td><td style="vertical-align:bottom;width:1.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="font-size:10pt;"> 3.0</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="font-size:10pt;"> 3.0</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;width:1.72%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="font-size:10pt;"> 3.0</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr></table><div style="font-family:'Times New Roman','Times','serif';font-size:9.0pt;margin-bottom:0pt;margin-top:0pt;min-height:1.19em;position:relative;width:100%;"><div style="background-color:#000000;height:1pt;position:relative;top:0.6em;width:25.0%;border:none;margin:0 auto 0 0;"/></div><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:9pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(1)</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:9pt;font-style:normal;font-weight:normal;">Expected volatility is measured using historical daily price changes of the Company&#8217;s stock over the respective expected term.</span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:9pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(2)</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:9pt;font-style:normal;font-weight:normal;">The risk-free rate for periods within the contractual term is based on the U.S. Treasury yield curve in effect at the time of grant.</span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:9pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(3)</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:9pt;font-style:normal;font-weight:normal;">The expected life is the number of years the Company estimates that the awards will be outstanding prior to exercise. </span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Employee Stock Purchase Plan</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">For the years ended December 31, 2022, 2021, and 2020 the Company received cash proceeds of $3.7 million, $3.4 million, and $2.9 million, and issued shares of 208,140, 196,024, and 254,703, respectively, under the ESPP Plan. The </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">weighted average estimated values of employee purchase rights as well as the weighted average assumptions that were used in calculating such values during fiscal years 2022, 2021, and 2020 were based on estimates at the date of grant as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;min-height:0.0pt;margin:0pt;"><span style="font-size:0pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:67.21%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.35%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:6.14%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:6.15%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:6.15%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:67.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:29.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended December&#160;31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:67.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:7.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;width:7.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;width:7.53%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:67.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Weighted average fair value</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.35%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;width:6.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 6.00</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;width:6.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 5.90</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;width:6.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 4.81</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Dividend yield</p></td><td style="vertical-align:bottom;width:1.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 0</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 0</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 0</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%</p></td></tr><tr><td style="vertical-align:bottom;width:67.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Expected volatility factor<sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;">(1)</sup></p></td><td style="vertical-align:bottom;width:1.35%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 43</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 52</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;width:1.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 70</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%</p></td></tr><tr><td style="vertical-align:bottom;width:67.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Risk-free interest rate<sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;">(2)</sup></p></td><td style="vertical-align:bottom;width:1.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1.73</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 0.07</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 0.95</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%</p></td></tr><tr><td style="vertical-align:bottom;width:67.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Expected life (in years)<sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;">(3)</sup></p></td><td style="vertical-align:bottom;width:1.35%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="font-size:10pt;"> 0.5</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="font-size:10pt;"> 0.5</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;width:1.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="font-size:10pt;"> 0.5</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr></table><div style="font-family:'Times New Roman','Times','serif';font-size:9.0pt;margin-bottom:0pt;margin-top:0pt;min-height:1.19em;position:relative;width:100%;"><div style="background-color:#000000;height:1pt;position:relative;top:0.6em;width:25.0%;border:none;margin:0 auto 0 0;"/></div><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:9pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(1)</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:9pt;font-style:normal;font-weight:normal;">Expected volatility is measured using historical daily price changes of the Company&#8217;s stock over the respective expected term.</span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:9pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(2)</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:9pt;font-style:normal;font-weight:normal;">The risk-free rate for periods within the contractual term is based on the U.S. Treasury yield curve in effect at the time of grant.</span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:9pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(3)</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:9pt;font-style:normal;font-weight:normal;">The expected life is the number of years the Company estimates that the purchase rights will be outstanding prior to exercise. </span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 18pt;"><span style="font-size:3pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for share-based payment arrangement.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=128089324&amp;loc=d3e5070-113901<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -URI https://asc.fasb.org/topic&amp;trid=2228938<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (l)<br> -URI https://asc.fasb.org/extlink&amp;oid=128089324&amp;loc=d3e5070-113901<br><br>Reference 4: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (a)(1)<br> -URI https://asc.fasb.org/extlink&amp;oid=128089324&amp;loc=d3e5070-113901<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (h)(2)(i)<br> -URI https://asc.fasb.org/extlink&amp;oid=128089324&amp;loc=d3e5070-113901<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (h)(2)<br> -URI https://asc.fasb.org/extlink&amp;oid=128089324&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>33
<FILENAME>R20.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575598029808">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Retirement Plans<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2022</div></th></tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_CompensationAndRetirementDisclosureAbstract', window );"><strong>Retirement Plans</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PensionAndOtherPostretirementBenefitsDisclosureTextBlock', window );">Retirement Plans</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 13 &#8212; Retirement Plans</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">The Company maintains a defined contribution plan for the benefit of its U.S. employees. The plan is intended to be tax qualified and contains a qualified cash or deferred arrangement as described under Section 401(k) of the Internal Revenue Code. Eligible participants may elect to contribute a percentage of their base compensation, and the Company may make matching contributions, generally equal to </span><span style="font-size:10pt;">fifty</span><span style="font-size:10pt;"> </span><span style="font-size:10pt;">cents for every dollar employees contribute, up to </span><span style="font-size:10pt;">three</span><span style="font-size:10pt;"> percent of the employee&#8217;s eligible compensation, as limited by current Internal Revenue Code regulations. Generally, the plan calls for vesting in the Company contributions over the initial </span><span style="font-size:10pt;">five years</span><span style="font-size:10pt;"> of a participant&#8217;s employment. The Company provided employer contributions associated with this plan of approximately </span><span style="font-size:10pt;">$3.0</span><span style="font-size:10pt;"> million, </span><span style="font-size:10pt;">$2.6</span><span style="font-size:10pt;"> million, and </span><span style="font-size:10pt;">$2.4</span><span style="font-size:10pt;">&#160;million for the years ended December 31, 2022, 2021, and 2020, respectively.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CompensationAndRetirementDisclosureAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CompensationAndRetirementDisclosureAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PensionAndOtherPostretirementBenefitsDisclosureTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for retirement benefits.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 715<br> -SubTopic 20<br> -Section 55<br> -Paragraph 17<br> -URI https://asc.fasb.org/extlink&amp;oid=123450688&amp;loc=d3e4179-114921<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 715<br> -SubTopic 20<br> -Section S99<br> -Paragraph 2<br> -URI https://asc.fasb.org/extlink&amp;oid=21916913&amp;loc=d3e273930-122802<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 715<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (d)(i)<br> -URI https://asc.fasb.org/extlink&amp;oid=123447040&amp;loc=d3e1928-114920<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 715<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (o)<br> -URI https://asc.fasb.org/extlink&amp;oid=123447040&amp;loc=d3e1928-114920<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 715<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (p)<br> -URI https://asc.fasb.org/extlink&amp;oid=123447040&amp;loc=d3e1928-114920<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 715<br> -SubTopic 70<br> -Section 50<br> -Paragraph 1<br> -URI https://asc.fasb.org/extlink&amp;oid=49170846&amp;loc=d3e28014-114942<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 715<br> -URI https://asc.fasb.org/topic&amp;trid=2235017<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 715<br> -SubTopic 60<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (c)<br> -URI https://asc.fasb.org/extlink&amp;oid=6414203&amp;loc=d3e39689-114964<br><br>Reference 9: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 715<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (d)(iv)(03)<br> -URI https://asc.fasb.org/extlink&amp;oid=123447040&amp;loc=d3e1928-114920<br><br>Reference 10: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 715<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (q)<br> -URI https://asc.fasb.org/extlink&amp;oid=123447040&amp;loc=d3e1928-114920<br><br>Reference 11: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 715<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (r)(1)<br> -URI https://asc.fasb.org/extlink&amp;oid=123447040&amp;loc=d3e1928-114920<br><br>Reference 12: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 715<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (d)(iii)<br> -URI https://asc.fasb.org/extlink&amp;oid=123447040&amp;loc=d3e1928-114920<br><br>Reference 13: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 715<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (l)<br> -URI https://asc.fasb.org/extlink&amp;oid=123447040&amp;loc=d3e1928-114920<br><br>Reference 14: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 715<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (r)(2)<br> -URI https://asc.fasb.org/extlink&amp;oid=123447040&amp;loc=d3e1928-114920<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PensionAndOtherPostretirementBenefitsDisclosureTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>34
<FILENAME>R21.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
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<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575713317440">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Dispositions<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2022</div></th></tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DiscontinuedOperationsAndDisposalGroupsAbstract', window );"><strong>Dispositions</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DisposalGroupsIncludingDiscontinuedOperationsDisclosureTextBlock', window );">Dispositions</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 14 &#8212; Dispositions</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">In 2019, the Company determined that one of its non-core product lines (the &#8220;disposal group&#8221;) met the held for sale criteria. During 2020, the Company completed the sale of this product line for approximately </span><span style="font-size:10pt;">$11.4</span><span style="font-size:10pt;"> million, with approximately </span><span style="font-size:10pt;">85%</span><span style="font-size:10pt;"> of the transaction price received upon closing, and </span><span style="font-size:10pt;">15%</span><span style="font-size:10pt;"> held in escrow for a period of </span><span style="font-size:10pt;">18 months</span><span style="font-size:10pt;"> and subsequently collected in 2021. Long-lived assets and definite-lived intangible assets were not depreciated or amortized while classified as held for sale. The sale of this disposal group did not represent a strategic shift that will have a material effect on the Company&#8217;s operations and financial results, nor is it considered a component of the Company, and as such it did not meet the criteria to be reported as discontinued operations. During 2020, the Company recorded additional impairment charges of </span><span style="font-size:10pt;">$0.3</span><span style="font-size:10pt;">&#160;million related to the finalization of the sale of this disposal group.&#160;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p><span></span>
</td>
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<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DiscontinuedOperationsAndDisposalGroupsAbstract">
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<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DiscontinuedOperationsAndDisposalGroupsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DisposalGroupsIncludingDiscontinuedOperationsDisclosureTextBlock">
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<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure related to a disposal group. Includes, but is not limited to, a discontinued operation, disposal classified as held-for-sale or disposed of by means other than sale or disposal of an individually significant component.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 360<br> -URI https://asc.fasb.org/topic&amp;trid=2155823<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 205<br> -SubTopic 20<br> -URI https://asc.fasb.org/subtopic&amp;trid=2122178<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DisposalGroupsIncludingDiscontinuedOperationsDisclosureTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
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</DOCUMENT>
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<TYPE>XML
<SEQUENCE>35
<FILENAME>R22.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
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<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575597663952">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Income Taxes<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2022</div></th></tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncomeTaxDisclosureAbstract', window );"><strong>Income Taxes</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncomeTaxDisclosureTextBlock', window );">Income Taxes</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 15 &#8212; Income Taxes </b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The amounts of income (loss) before income taxes attributable to domestic and foreign operations were as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:63.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:34.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:63.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.78%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.78%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="10" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:63.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:34.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:63.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Domestic</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 47,368</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 23,561</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (10,292)</p></td></tr><tr><td style="vertical-align:bottom;width:63.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Foreign</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 3,617</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 2,119</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 1,828</p></td></tr><tr><td style="vertical-align:bottom;width:63.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Total</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 50,985</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 25,680</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.46%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (8,464)</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Significant components of the expense (benefit) for income taxes consisted of the following:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:66.7%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.23%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.27%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:66.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:31.22%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:66.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.02%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.55%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="10" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:66.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:31.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:66.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Current:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:66.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Federal</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;width:66.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Foreign</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 1,506</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 183</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 22</p></td></tr><tr><td style="vertical-align:bottom;width:66.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">State and local</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 577</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 110</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.27%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 204</p></td></tr><tr><td style="vertical-align:bottom;width:66.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;">Total current expense (benefit) for income taxes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 2,083</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 293</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.27%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 226</p></td></tr><tr><td style="vertical-align:bottom;width:66.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Deferred:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:66.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Federal</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (96,811)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 119</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 136</p></td></tr><tr><td style="vertical-align:bottom;width:66.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Foreign</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (484)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (507)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (320)</p></td></tr><tr><td style="vertical-align:bottom;width:66.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">State and local</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (20,745)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (263)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.27%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (115)</p></td></tr><tr><td style="vertical-align:bottom;width:66.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;">Total deferred expense (benefit) for income taxes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (118,040)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (651)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.27%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (299)</p></td></tr><tr><td style="vertical-align:bottom;width:66.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Total expense (benefit) for income taxes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (115,957)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (358)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.27%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (73)</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The income tax expense (benefit) was reconciled to the tax expense computed at the U.S. federal statutory tax rate as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;min-height:0.0pt;margin:0pt;"><span style="font-size:0pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:middle;width:62.87%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:50%;transform:translate(0,-50%);width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.17%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:62.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:35.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:62.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.02%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="10" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:62.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:35.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:middle;width:62.87%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Income tax expense (benefit) at U.S. statutory rates</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 10,706</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 5,393</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (1,777)</p></td></tr><tr><td style="vertical-align:middle;width:62.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">State taxes, net of U.S. federal impact</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 1,101</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (607)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (121)</p></td></tr><tr><td style="vertical-align:middle;width:62.87%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Effect of international operations</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (11,149)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 609</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (131)</p></td></tr><tr><td style="vertical-align:middle;width:62.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Research and development tax credit</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (6,470)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (3,964)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 726</p></td></tr><tr><td style="vertical-align:middle;width:62.87%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Net change in valuation allowance</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (104,972)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (2,389)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 388</p></td></tr><tr><td style="vertical-align:middle;width:62.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Change in accrual for unrecognized tax benefits</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 3,349</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 398</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (6)</p></td></tr><tr><td style="vertical-align:middle;width:62.87%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Share-based compensation</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 606</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 1,208</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 2,248</p></td></tr><tr><td style="vertical-align:middle;width:62.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Asset impairment</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 728</p></td></tr><tr><td style="vertical-align:middle;width:62.87%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Partial extinguishment of 2023 Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (1,090)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (2,292)</p></td></tr><tr><td style="vertical-align:middle;width:62.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Adoption of new accounting standard</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (9,295)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:middle;width:62.87%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Other</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 167</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 84</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.17%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 164</p></td></tr><tr><td style="vertical-align:middle;width:62.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Total expense (benefit) for income taxes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (115,957)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (358)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.17%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (73)</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Deferred income taxes reflect the effect of temporary differences between the carrying amounts of assets and liabilities recognized for financial reporting purposes and the amounts recognized for tax purposes. The tax effects of the temporary differences were as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;min-height:0.0pt;margin:0pt;"><span style="font-size:0pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:middle;width:72.6%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:50%;transform:translate(0,-50%);width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:72.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:25.33%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:72.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.24%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.02%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="7" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:72.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:25.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:middle;width:72.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Deferred tax assets:&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:middle;width:72.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Inventory valuation</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 11,931</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 11,822</p></td></tr><tr><td style="vertical-align:middle;width:72.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Net operating losses</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 5,647</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 38,816</p></td></tr><tr><td style="vertical-align:middle;width:72.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Credit carry forwards</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 59,988</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 57,810</p></td></tr><tr><td style="vertical-align:middle;width:72.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Warranty and installation accruals</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,862</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,730</p></td></tr><tr><td style="vertical-align:middle;width:72.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Share-based compensation</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 5,267</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 4,033</p></td></tr><tr><td style="vertical-align:middle;width:72.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Customer deposits and deferred revenue</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 24,504</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 9,908</p></td></tr><tr><td style="vertical-align:middle;width:72.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Operating leases</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 8,349</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 8,464</p></td></tr><tr><td style="vertical-align:middle;width:72.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Research and experimental ("R&amp;E") capitalization</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 19,071</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:middle;width:72.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Other</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 6,553</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 5,880</p></td></tr><tr><td style="vertical-align:middle;width:72.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Total deferred tax assets</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 143,172</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 138,463</p></td></tr><tr><td style="vertical-align:middle;width:72.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Valuation allowance</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (11,083)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (116,054)</p></td></tr><tr><td style="vertical-align:middle;width:72.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Net deferred tax assets</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 132,089</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 22,409</p></td></tr><tr><td style="vertical-align:middle;width:72.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:middle;width:72.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Deferred tax liabilities:&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:middle;width:72.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Purchased intangible assets</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 8,724</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 6,633</p></td></tr><tr><td style="vertical-align:middle;width:72.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Convertible Senior Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (39)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 10,018</p></td></tr><tr><td style="vertical-align:middle;width:72.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Operating leases</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 5,994</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 6,539</p></td></tr><tr><td style="vertical-align:middle;width:72.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Depreciation</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 2,346</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 2,372</p></td></tr><tr><td style="vertical-align:middle;width:72.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Total deferred tax liabilities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 17,025</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 25,562</p></td></tr><tr><td style="vertical-align:middle;width:72.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Net deferred taxes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 115,064</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (3,153)</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company does not permanently reinvest its earnings from certain foreign jurisdictions and has accrued for foreign tax withholdings of $0.9 million on its unremitted earnings as of December 31, 2022.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">During the year ended December 31, 2022, the Company recognized a net decrease of $104.9 million of its valuation allowance. This decrease was primarily related to the reversal of valuation allowances on domestic deferred tax assets. After considering recent significant positive evidence, including a consistent pattern of earnings in the past three years, as well as forecasted future earnings, it was determined that a valuation allowance was no longer required for certain deferred tax assets primarily recorded on tax credits and net operating losses in U.S. jurisdictions. The Company&#8217;s remaining valuation allowance of approximately $11.1 million relates primarily to state and local, and certain foreign jurisdiction tax attributes for which the Company could not conclude were realizable on a more-likely-than-not basis.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">At December 31, 2022, the Company had U.S. federal research and development credits of $36.5 million that will expire between 2023 and 2042. The Company also has $8.7 million of foreign tax credits that expire in 2027. Additionally, the Company has state and local NOL carryforwards of approximately $59.3 million (a net deferred tax asset of $4.1 million, net of federal tax benefits and before the valuation allowance) that will expire between 2023 and 2041. Finally, the Company has state credits of $32.6 million, some of which are indefinite and others that will expire between 2024 and 2037.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">A roll-forward of the Company&#8217;s uncertain tax positions for all U.S. federal, state, and foreign tax jurisdictions was as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;min-height:0.0pt;margin:0pt;"><span style="font-size:0pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:64.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:64.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:33.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:64.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.78%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.78%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.81%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="10" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:64.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:33.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:64.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Balance at beginning of year</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 12,761</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 12,363</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 12,369</p></td></tr><tr><td style="vertical-align:bottom;width:64.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Additions for tax positions related to current year</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 4,180</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 2,642</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 1,217</p></td></tr><tr><td style="vertical-align:bottom;width:64.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Additions for tax positions related to prior years</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 50</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 47</p></td></tr><tr><td style="vertical-align:bottom;width:64.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Reductions for tax positions related to prior years</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (731)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (1,196)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (1,166)</p></td></tr><tr><td style="vertical-align:bottom;width:64.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Reductions due to the lapse of the statute of limitations</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;width:64.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Settlements</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (100)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (1,098)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (104)</p></td></tr><tr><td style="vertical-align:bottom;width:64.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Balance at end of year</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 16,110</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 12,761</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.52%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 12,363</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">If the amount of unrecognized tax benefits at December 31, 2022 were recognized, the Company&#8217;s income tax provision would decrease by $13.5 million. The gross amount of interest and penalties accrued in income tax payable in the Consolidated Balance Sheets was approximately $0.5 million and $0.4 million at December 31, 2022 and 2021, respectively.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company, or one of its subsidiaries, files income tax returns in the United States federal jurisdiction, and various state, local, and foreign jurisdictions. All material consolidated federal income tax matters have been concluded for years through 2017 subject to subsequent utilization of NOLs generated in such years. All material state and local income tax matters have been reviewed through 2012. The majority of the Company&#8217;s foreign jurisdictions have been reviewed through 2015. The Company&#8217;s major foreign jurisdictions&#8217; statutes of limitation remain open with respect to the tax years 2015 through 2021 for Germany, 2017 through 2021 for China, 2021 for Taiwan, and 2020 and 2021 for Singapore. The Company does not anticipate that its uncertain tax position will change significantly within the next twelve months subject to the completion of the ongoing tax audits and any resultant settlement. </p><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxDisclosureAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeTaxDisclosureAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxDisclosureTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for income taxes. Disclosures may include net deferred tax liability or asset recognized in an enterprise's statement of financial position, net change during the year in the total valuation allowance, approximate tax effect of each type of temporary difference and carryforward that gives rise to a significant portion of deferred tax liabilities and deferred tax assets, utilization of a tax carryback, and tax uncertainties information.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 21<br> -URI https://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32857-109319<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SAB Topic 11.C)<br> -URI https://asc.fasb.org/extlink&amp;oid=122134291&amp;loc=d3e330215-122817<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 17<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32809-109319<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB TOPIC 6.I.5.Q1)<br> -URI https://asc.fasb.org/extlink&amp;oid=122134291&amp;loc=d3e330036-122817<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 14<br> -URI https://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32705-109319<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 270<br> -Section 50<br> -Paragraph 1<br> -URI https://asc.fasb.org/extlink&amp;oid=6424409&amp;loc=d3e44925-109338<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -URI https://asc.fasb.org/topic&amp;trid=2144680<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 30<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=6424122&amp;loc=d3e41874-109331<br><br>Reference 9: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(h)(2))<br> -URI https://asc.fasb.org/extlink&amp;oid=120395691&amp;loc=d3e23780-122690<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeTaxDisclosureTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>36
<FILENAME>R23.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575602083888">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Segment Reporting and Geographic Information<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2022</div></th></tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_SegmentReportingAbstract', window );"><strong>Segment Reporting and Geographic Information</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_SegmentReportingDisclosureTextBlock', window );">Segment Reporting and Geographic Information</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 16 &#8212; Segment Reporting and Geographic Information</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company operates and measures its results in one operating segment and therefore has one reportable segment: the development, manufacture, sales, and support of semiconductor and thin film process equipment primarily sold to make electronic devices. The Company&#8217;s Chief Operating Decision Maker, the Chief Executive Officer, evaluates performance of the Company and makes decisions regarding the allocation of resources based on total Company results.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Sales by end-market is as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;min-height:0.0pt;margin:0pt;"><span style="font-size:0pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80.72%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:60.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:60.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:37.01%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">For&#160;the year ended December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:60.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.97%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.97%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.97%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="10" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:60.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:37.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:60.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Sales by end-market</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:60.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Semiconductor</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 369,369</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 247,051</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 165,909</p></td></tr><tr><td style="vertical-align:bottom;width:60.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Compound Semiconductor</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 121,194</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 106,972</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 107,922</p></td></tr><tr><td style="vertical-align:bottom;width:60.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Data Storage</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 87,544</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 168,760</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 123,288</p></td></tr><tr><td style="vertical-align:bottom;width:60.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Scientific &amp; Other</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.7%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 68,030</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.7%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 60,494</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.7%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 57,044</p></td></tr><tr><td style="vertical-align:bottom;width:60.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.7%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 646,137</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.7%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 583,277</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.7%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 454,163</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company&#8217;s significant operations outside the United States include sales and service offices in China, Europe, and Rest of APAC. For geographic reporting, sales are attributed to the location in which the customer facility is located. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Sales and long-lived tangible assets by geographic region are as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:38.26%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.97%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:38.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:30.19%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Net&#160;Sales&#160;to&#160;Unaffiliated Customers</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:28.24%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Long-lived&#160;Tangible&#160;Assets</b></p></td></tr><tr><td style="vertical-align:bottom;width:38.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.97%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.98%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.01%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="19" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:38.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="17" style="vertical-align:bottom;white-space:nowrap;width:60.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:38.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">United States</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 197,433</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 217,209</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 145,353</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 106,550</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 99,220</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 64,967</p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:38.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">EMEA<sup style="font-family:'Calibri','Helvetica','sans-serif';font-size:8.25pt;line-height:100%;top:0pt;vertical-align:top;">(1)</sup></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 87,837</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 55,129</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 73,124</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 60</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 94</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 120</p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:38.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">China</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 123,703</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 105,998</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 57,589</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 70</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 67</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 84</p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:38.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Rest of APAC</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 235,735</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 204,633</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 177,569</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 601</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 362</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 100</p></td></tr><tr><td style="vertical-align:bottom;width:38.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Rest of World</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,429</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 308</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 528</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.97%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;width:38.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Total </p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 646,137</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 583,277</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 454,163</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 107,281</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 99,743</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.97%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 65,271</p></td></tr></table><div style="font-family:'Times New Roman','Times','serif';font-size:9.0pt;margin-bottom:0pt;margin-top:0pt;min-height:1.19em;position:relative;width:100%;"><div style="background-color:#000000;height:1pt;position:relative;top:0.6em;width:25.0%;border:none;margin:0 auto 0 0;"/></div><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:9pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(1)</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:9pt;font-style:normal;font-weight:normal;">EMEA consists of Europe, the Middle East, and Africa</span></td></tr></table><span></span>
</td>
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</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SegmentReportingAbstract">
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<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
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<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SegmentReportingAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
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<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
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<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
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<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for reporting segments including data and tables. Reportable segments include those that meet any of the following quantitative thresholds a) it's reported revenue, including sales to external customers and intersegment sales or transfers is 10 percent or more of the combined revenue, internal and external, of all operating segments b) the absolute amount of its reported profit or loss is 10 percent or more of the greater, in absolute amount of 1) the combined reported profit of all operating segments that did not report a loss or 2) the combined reported loss of all operating segments that did report a loss c) its assets are 10 percent or more of the combined assets of all operating segments.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 31<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8924-108599<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 34<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8981-108599<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 21<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8721-108599<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 40<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e9031-108599<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (f)<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8933-108599<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (e)<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8933-108599<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 26<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8844-108599<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 41<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e9038-108599<br><br>Reference 9: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (d)<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8933-108599<br><br>Reference 10: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 22<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8736-108599<br><br>Reference 11: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 42<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e9054-108599<br><br>Reference 12: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 15<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8657-108599<br><br>Reference 13: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 21<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8721-108599<br><br>Reference 14: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -URI https://asc.fasb.org/topic&amp;trid=2134510<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SegmentReportingDisclosureTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>37
<FILENAME>R24.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575597782720">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Subsequent Events<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2022</div></th></tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_SubsequentEventsAbstract', window );"><strong>Subsequent Events</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_SubsequentEventsTextBlock', window );">Subsequent Events</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 17 &#8212; Subseqent Events</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">On January 31, 2023, the Company acquired Epiluvac AB, a privately held manufacturer of chemical vapor deposition  epitaxy systems that enable advanced silicon carbide applications in the electric vehicle market.</span><span style="font-size:11pt;"> </span>Epiluvac is an early-stage revenue company with 11<span style="white-space:pre-wrap;"> employees.  The purchase price for the transaction, all payable in cash, was </span>$30 million paid at the time of closing with a potential additional $35<span style="white-space:pre-wrap;"> million in performance based earn-outs.  </span></p><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SubsequentEventsAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SubsequentEventsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SubsequentEventsTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for significant events or transactions that occurred after the balance sheet date through the date the financial statements were issued or the date the financial statements were available to be issued. Examples include: the sale of a capital stock issue, purchase of a business, settlement of litigation, catastrophic loss, significant foreign exchange rate changes, loans to insiders or affiliates, and transactions not in the ordinary course of business.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 855<br> -URI https://asc.fasb.org/topic&amp;trid=2122774<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 855<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=6842918&amp;loc=SL6314017-165662<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SubsequentEventsTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>38
<FILENAME>R25.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575597693408">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Schedule II - Valuation and Qualifying Accounts<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2022</div></th></tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_srt_ValuationAndQualifyingAccountsAbstract', window );"><strong>Schedule II - Valuation and Qualifying Accounts</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_srt_ScheduleOfValuationAndQualifyingAccountsDisclosureTextBlock', window );">Schedule II - Valuation and Qualifying Accounts</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Schedule II &#8212; Valuation and Qualifying Accounts</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:45.27%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.93%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.6%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.73%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.62%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.99%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:45.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:19.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Additions</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:45.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Charged </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.73%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:45.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Balance&#160;at</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(Credited)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Charged&#160;to</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Balance&#160;at</b></p></td></tr><tr><td style="vertical-align:bottom;width:45.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Beginning</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;to&#160;Costs&#160;and</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Other</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">End&#160;of</b></p></td></tr><tr><td style="vertical-align:bottom;width:45.27%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Deducted from asset accounts:</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.14%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">of&#160;Period</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.78%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Expenses</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.97%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Accounts</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.8%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Deductions</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.17%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Period</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="16" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:45.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="14" style="vertical-align:bottom;white-space:nowrap;width:52.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:45.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Year ended December&#160;31, 2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.73%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:45.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Allowance for doubtful accounts</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 736</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.73%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 736</p></td></tr><tr><td style="vertical-align:bottom;width:45.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Valuation allowance in net deferred tax assets</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 116,054</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.6%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (104,971)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.73%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.62%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.99%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 11,083</p></td></tr><tr><td style="vertical-align:bottom;width:45.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 116,790</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.6%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (104,971)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.73%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.62%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.99%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 11,819</p></td></tr><tr><td style="vertical-align:bottom;width:45.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.73%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:45.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Year ended December&#160;31, 2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.73%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:45.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Allowance for doubtful accounts</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 736</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.73%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 736</p></td></tr><tr><td style="vertical-align:bottom;width:45.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Valuation allowance in net deferred tax assets</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 118,443</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.73%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.62%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (2,389)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.99%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 116,054</p></td></tr><tr><td style="vertical-align:bottom;width:45.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 119,179</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.6%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.73%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.62%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (2,389)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.99%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 116,790</p></td></tr><tr><td style="vertical-align:bottom;width:45.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.73%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:45.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Year ended December&#160;31, 2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.73%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:45.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Allowance for doubtful accounts</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 602</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 140</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.73%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (6)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 736</p></td></tr><tr><td style="vertical-align:bottom;width:45.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Valuation allowance in net deferred tax assets</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 130,053</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.6%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 513</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.73%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.62%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (12,123)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.99%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 118,443</p></td></tr><tr><td style="vertical-align:bottom;width:45.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.96%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 130,655</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.6%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 653</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.73%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.62%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (12,129)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.99%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 119,179</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_ScheduleOfValuationAndQualifyingAccountsDisclosureTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for valuation and qualifying accounts and reserves.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher SEC<br> -Name Regulation S-X (SX)<br> -Number 210<br> -Section 12<br> -Subsection 09<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 4<br> -Subparagraph (SX 210.12-09)<br> -URI https://asc.fasb.org/extlink&amp;oid=120395691&amp;loc=d3e24092-122690<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_ScheduleOfValuationAndQualifyingAccountsDisclosureTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>srt_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_ValuationAndQualifyingAccountsAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
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<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_ValuationAndQualifyingAccountsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>srt_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>39
<FILENAME>R26.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
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							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
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							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575595690848">
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<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Significant Accounting Policies (Policies)<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
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<tr><th class="th"><div>Dec. 31, 2022</div></th></tr>
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<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract', window );"><strong>Significant Accounting Policies</strong></a></td>
<td class="text">&#160;<span></span>
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<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FiscalPeriod', window );">Basis of Presentation</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(b) Basis of Presentation</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">The accompanying audited Consolidated Financial Statements of the Company have been prepared in accordance with United States generally accepted accounting principles (&#8220;GAAP&#8221;). The Company reports interim quarters on a </span><span style="font-size:10pt;">13</span><span style="font-size:10pt;">-week basis ending on the last Sunday of each period, which is determined at the start of each year. The Company&#8217;s fourth quarter always ends on the last day of the calendar year, December 31. During 2022 the interim quarters ended on April 3, July 3, and October 2, and during 2021 the interim quarters ended on April 4, July 4, and October 3. The Company reports these interim quarters as March 31, June 30, and September 30 in its interim consolidated financial statements.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><span></span>
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<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_UseOfEstimates', window );">Use of Estimates</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(c) Use of Estimates</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The preparation of financial statements in conformity with GAAP requires management to make estimates and assumptions that affect the amounts reported in the financial statements and accompanying notes. Although these estimates are based on management&#8217;s knowledge of current events and actions it may undertake in the future, these estimates may ultimately differ from actual results. Significant items subject to such estimates and assumptions include: (i) stand-alone selling prices for the Company&#8217;s products and services; (ii) allowances for doubtful accounts; (iii) inventory obsolescence; (iv) the useful lives and expected future cash flows of property, plant, and equipment and identifiable intangible assets; (v) the fair value of the Company&#8217;s reporting unit and related goodwill; (vi) investment valuations and the valuation of derivatives, deferred tax assets, and assets acquired in business combinations; (vii) the recoverability of long-lived assets; (viii) liabilities for product warranty and legal contingencies; (ix) share-based compensation; (x) lease term and incremental borrowing rates used in determining operating lease assets and liabilities; and (xi) income tax uncertainties.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><span></span>
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<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ConsolidationPolicyTextBlock', window );">Principles of Consolidation</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(d) Principles of Consolidation</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Consolidated Financial Statements include the accounts of the Company and its subsidiaries. Intercompany balances and transactions have been eliminated in consolidation. Companies acquired during each reporting period are reflected in the results of the Company effective from their respective dates of acquisition through the end of the reporting period.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><span></span>
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<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ForeignCurrencyTransactionsAndTranslationsPolicyTextBlock', window );">Foreign Currencies</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(e) Foreign Currencies</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Assets and liabilities of the Company&#8217;s foreign subsidiaries that operate using functional currencies other than the U.S. dollar are translated using the exchange rates in effect at the balance sheet date. Results of operations are translated using monthly average exchange rates. Adjustments arising from the translation of the foreign currency financial statements of the Company&#8217;s subsidiaries into U.S. dollars, including intercompany transactions of a long-term nature, are reported as currency translation adjustments in &#8220;Accumulated other comprehensive income&#8221; in the Consolidated Balance Sheets. Foreign currency transaction gains or losses are included in &#8220;Other operating expense (income), net&#8221; in the Consolidated Statements of Operations.</p><span></span>
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<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_RevenueFromContractWithCustomerPolicyTextBlock', window );">Revenue Recognition</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(f) Revenue Recognition</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Revenue is recognized upon the transfer of control of the promised product or service to the customer in an amount that reflects the consideration the Company expects to receive in exchange for such product or service. The Company&#8217;s contracts with customers generally do not contain variable consideration. In the rare instances where variable consideration is included, the Company estimates the amount of variable consideration and determines what portion of </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">that, if any, has a high probability of significant subsequent revenue reversal, and if so, that amount is excluded from the transaction price. The Company&#8217;s contracts with customers frequently contain multiple deliverables, such as systems, upgrades, components, spare parts, installation, maintenance, and service plans. Judgment is required to properly identify the performance obligations within a contract and to determine how the revenue should be allocated among the performance obligations. The Company also evaluates whether multiple transactions with the same customer or related parties should be considered part of a single contract based on an assessment of whether the contracts or agreements are negotiated or executed within a short time frame of each other or if there are indicators that the contracts are negotiated in contemplation of one another. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160; </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">When there are separate units of accounting, the Company allocates revenue to each performance obligation on a relative stand-alone selling price basis. The stand-alone selling prices are determined based on the prices at which the Company separately sells the systems, upgrades, components, spare parts, installation, maintenance, and service plans. For items that are not sold separately, the Company estimates stand-alone selling prices generally using an expected cost plus margin approach. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160; </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Most of the Company&#8217;s revenue is recognized at a point in time when the performance obligation is satisfied. The Company considers many facts when evaluating each of its sales arrangements to determine the timing of revenue recognition, including its contractual obligations and the nature of the customer&#8217;s post-delivery acceptance provisions. The Company&#8217;s system sales arrangements, including certain upgrades, generally include field acceptance provisions that may include functional or mechanical test procedures. For many of these arrangements, a customer source inspection of the system is performed in the Company&#8217;s facility, test data is sent to the customer documenting that the system is functioning to the agreed upon specifications prior to delivery, or other quality assurance testing is performed internally to ensure system functionality prior to shipment. Historically, such source inspection or test data replicates the field acceptance provisions that are performed at the customer&#8217;s site prior to final acceptance of the system. When the Company objectively demonstrates that the criteria specified in the contractual acceptance provisions are achieved prior to delivery either through customer testing or the Company&#8217;s historical experience of its tools meeting specifications, transfer of control of the product to the customer is considered to have occurred and revenue is recognized upon system delivery since there is no substantive contingency remaining related to the acceptance provisions at that date. For new products, new applications of existing products, or for products with substantive customer acceptance provisions where the Company cannot objectively demonstrate that the criteria specified in the contractual acceptance provisions have been achieved prior to delivery, revenue and the associated costs are deferred. The Company recognizes such revenue and costs upon obtaining objective evidence that the acceptance provisions can be achieved, assuming all other revenue recognition criteria have been met. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160; </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">In certain cases, the Company&#8217;s contracts with customers contain a billing retention, which is billed by the Company and payable by the customer when field acceptance provisions are completed. Revenue recognized in advance of the amount that has been billed is recorded as a contract asset on the Consolidated Balance Sheets. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160; </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company recognizes revenue related to maintenance and service contracts over time based upon the respective contract term. Installation revenue is recognized over time as the installation services are performed. The Company recognizes revenue from the sales of components, spare parts, and specified service engagements at a point in time, which is typically consistent with the time of delivery in accordance with the terms of the applicable sales arrangement. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160; </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">The Company may receive customer deposits on system transactions. The timing of the transfer of goods or services related to the deposits is either at the discretion of the customer or expected to be within one year from the deposit receipt. As such, the Company does not adjust transaction prices for the time value of money. Incremental direct costs incurred related to the acquisition of a customer contract, such as sales commissions, are expensed as incurred since the expected performance period is </span><span style="font-size:10pt;">one</span><span style="font-size:10pt;"> year or less. </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160; </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company has elected to treat shipping and handling costs, including those costs incurred to move, package, and prepare the Company&#8217;s products for shipment and to move the products to a customer&#8217;s designated location, as a </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">fulfillment activity, and the Company includes such costs in &#8220;Cost of sales&#8221; in the Consolidated Statements of Operations as incurred. These costs are generally comprised of payments to third-party shippers. Taxes assessed by governmental authorities that are collected by the Company from a customer are excluded from revenue. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><span></span>
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<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_StandardProductWarrantyPolicy', window );">Warranty Costs</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(g) Warranty Costs</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">The Company typically provides standard warranty coverage on its systems for </span><span style="font-size:10pt;">one year</span><span style="font-size:10pt;"> from the date of final acceptance by providing labor and parts necessary to repair the systems during the warranty period. The Company records the estimated warranty cost when revenue is recognized on the related system. Warranty cost is included in &#8220;Cost of sales&#8221; in the Consolidated Statements of Operations. The estimated warranty cost is based on the Company&#8217;s historical experience with its systems and regional labor costs. The Company calculates the average service hours by region and parts expense per system utilizing actual service records to determine the estimated warranty charge. The Company updates its warranty estimates on a quarterly basis when the actual product performance or field expense differs from original estimates.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><span></span>
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<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ResearchAndDevelopmentExpensePolicy', window );">Research and Development Costs</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(h) Research and Development Costs</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Research and development costs are expensed as incurred and include charges for the development of new technology and the transition of existing technology into new products or services.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><span></span>
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<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AdvertisingCostsPolicyTextBlock', window );">Advertising Expense</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(i) Advertising Expense</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The cost of advertising is expensed as incurred and totaled $0.3 million, $0.3 million, and $0.4 million for the years ended December 31, 2022, 2021, and 2020, respectively.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><span></span>
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<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationOptionAndIncentivePlansPolicy', window );">Accounting for Share-Based Compensation</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(j) Accounting for Share-based Compensation</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Share-based awards exchanged for employee services are accounted for under the fair value method. Accordingly, share-based compensation cost is measured at the grant date based on the estimated fair value of the award. The expense for awards is recognized over the employee&#8217;s requisite service period (generally the vesting period of the award). The Company has elected to treat awards with only service conditions and with graded vesting as one award. Consequently, the total compensation expense is recognized straight-line over the entire vesting period, so long as the compensation cost recognized at any date at least equals the portion of the grant date fair value of the award that is vested at that date.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">In addition to stock options, restricted share awards (&#8220;RSAs&#8221;) and restricted stock units (&#8220;RSUs&#8221;) with time-based vesting, the Company grants performance share units and awards (&#8220;PSUs&#8221; and &#8220;PSAs&#8221;) that have either performance or market conditions. Compensation cost for PSUs and PSAs with performance conditions is recognized over the requisite service period based on the timing and expected level of achievement of the performance targets. A change in the assessment of performance attainment prior to the conclusion of the performance period is recognized in the period of the change in estimate. Compensation cost for PSUs and PSAs with market conditions is recognized over the requisite service period regardless of the expected level of achievement. For all PSUs and PSAs, the number of shares issued to the employee at the conclusion of the service period may vary from the original target based upon the level of attainment of the performance or market conditions.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company uses the Black-Scholes option-pricing model to compute the estimated fair value of option awards and purchase rights under the Employee Stock Purchase Plan. The Company uses a Monte Carlo simulation to compute the estimated fair value of awards with market conditions. The Black-Scholes model and Monte Carlo simulation include assumptions regarding dividend yields, expected volatility, expected option term, and risk-free interest rates. See Note 12, &#8220;Stock Plans,&#8221; for additional information. </p><span></span>
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<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncomeTaxPolicyTextBlock', window );">Income Taxes</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(k) Income Taxes</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Income taxes are accounted for under the asset and liability method. Deferred tax assets and liabilities are recognized for the future tax consequences attributable to differences between the financial statement carrying amounts of existing assets and liabilities and their respective tax bases and operating loss and tax credit carryforwards. Deferred tax assets and liabilities are measured using enacted tax rates expected to apply to taxable income in the years in which those temporary differences are expected to be recovered or settled. The effect on deferred tax assets and liabilities from a change in tax rate is recognized in income in the period that includes the enactment date. A valuation allowance is provided for deferred tax assets if it is more likely than not that these items will not be realized, which is dependent upon the generation of future taxable income.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><span></span>
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<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ConcentrationRiskCreditRisk', window );">Concentration of Credit Risk</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(l) Concentration of Credit Risk</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Financial instruments that potentially subject the Company to concentrations of credit risk consist primarily of cash and cash equivalents, investments, derivative financial instruments used in hedging activities, and accounts receivable. The Company invests in a variety of financial instruments and, by policy, limits the amount of credit exposure with any one financial institution or commercial issuer. Historically, the Company has not experienced any material credit losses on its investments. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company maintains an allowance reserve for potentially uncollectible accounts for estimated losses resulting from the inability of its customers to make required payments. The Company evaluates its allowance for doubtful accounts based on a combination of factors. In circumstances where specific invoices are deemed to be uncollectible, the Company provides a specific allowance for bad debt against the amount due to reduce the net recognized receivable to the amount reasonably expected to be collected. The Company also provides allowances based on its write-off history. Finally, the Company also considers its current expectations of future economic conditions, including the impact of COVID-19, when estimating its allowance for doubtful accounts. The allowance for doubtful accounts totaled $0.7 million at both December 31, 2022 and 2021.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">To further mitigate the Company&#8217;s exposure to uncollectable accounts, the Company may request certain customers provide a negotiable irrevocable letter of credit drawn on a reputable financial institution. These irrevocable letters of credit are typically issued to mature between </span><span style="-sec-ix-hidden:Hidden_X77IvS7lk0evd8U-l6qM4w;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">zero</span></span><span style="font-size:10pt;"> and </span><span style="font-size:10pt;">90 days</span><span style="font-size:10pt;"> from the date the documentation requirements are met, typically when a system ships or upon receipt of final acceptance from the customer. The Company, at its discretion, may monetize these letters of credit on a non-recourse basis after they become negotiable but before maturity. The fees associated with the monetization are included in &#8220;Selling, general, and administrative&#8221; in the Consolidated Statements of Operations and were immaterial for the years ended December 31, 2022, 2021, and 2020.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><span></span>
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<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FairValueOfFinancialInstrumentsPolicy', window );">Fair Value of Financial Instruments</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(m) Fair Value of Financial Instruments</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The carrying amounts of financial instruments, including cash equivalents, accounts receivable, accounts payable, and accrued expenses reflected in the consolidated financial statements approximate fair value due to their short-term maturities. The fair value of debt for footnote disclosure purposes, including current maturities, if any, is estimated using recently quoted market prices of the instrument, or if not available, a discounted cash flow analysis based on the estimated current incremental borrowing rates for similar types of instruments.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p><span></span>
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<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_CashCashEquivalentsAndShortTermInvestmentsPolicyTextBlock', window );">Cash, Cash Equivalents, and Short-term Investments</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(n) Cash, Cash Equivalents, and Short-term Investments</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">All financial instruments purchased with an original maturity of three months or less at the time of purchase are considered cash equivalents. Such items may include liquid money market funds, certificate of deposit and time deposit accounts, U.S. treasuries, government agency securities, and corporate debt. Investments that are classified as cash equivalents are carried at cost, which approximates fair value. The Company&#8217;s cash and cash equivalents includes $61.5 million and $41.7 million of cash equivalents at December 31, 2022 and 2021, respectively.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">A portion of the Company&#8217;s cash and cash equivalents is held by its subsidiaries throughout the world, frequently in each subsidiary&#8217;s respective functional currency, which is typically the U.S. dollar. Approximately 18% and 32% of cash and cash equivalents were maintained outside the United States at December 31, 2022 and 2021, respectively.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Short-term investments consist of marketable debt securities, and are generally classified as available-for-sale for use in current operations, if required, and are reported at fair value, with unrealized gains and losses, net of tax, presented as a separate component of stockholders&#8217; equity under the caption &#8220;Accumulated other comprehensive income&#8221; on the Consolidated Balance Sheets. These securities can include U.S. treasuries, government agency securities, corporate debt, and commercial paper, all with maturities of greater than three months when purchased. All realized gains and losses and unrealized losses resulting from declines in fair value that are other than temporary are included in &#8220;Other operating expense (income), net&#8221; in the Consolidated Statements of Operations. The specific identification method is used to determine the realized gains and losses on investments. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Non-marketable equity securities are equity securities without readily observable market prices and are included in &#8220;Other assets&#8221; in the Consolidated Balance Sheets. Non-marketable securities are measured at cost, adjusted for changes in observable prices minus impairment. Changes in fair value and impairment charges are included in &#8220;Other income (expense), net&#8221; in the Consolidated Statements of Operations.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><span></span>
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<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_InventoryPolicyTextBlock', window );">Inventories</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(o) Inventories</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Inventories are stated at the lower of cost or net realizable value, with cost determined on a first-in, first-out basis. Each quarter the Company assesses the valuation and recoverability of all inventories: materials (raw materials, spare parts, and service inventory); work-in-process; and finished goods. Obsolete inventory or inventory in excess of management&#8217;s estimated usage requirement is written down to its estimated net realizable value if less than cost. The Company evaluates usage requirements by analyzing historical usage, anticipated demand, alternative uses of materials, and other qualitative factors. Unanticipated changes in demand for the Company&#8217;s products may require a write down of inventory, which would be reflected in cost of sales in the period the revision is made. Inventory acquired as part of a business combination is recorded at fair value on the date of acquisition.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><span></span>
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<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_BusinessCombinationsPolicy', window );">Business Combinations</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(p) Business Combinations</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company allocates the fair value of the purchase consideration of the Company&#8217;s acquisitions to the tangible assets, intangible assets, including in-process research and development (&#8220;IPR&amp;D&#8221;), if any, and liabilities assumed, based on estimated fair values. The excess of the fair value of purchase consideration over the fair values of these identifiable assets and liabilities is recorded as goodwill. Acquisition-related expenses are recognized separately from the business combination and are expensed as incurred. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><span></span>
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<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_GoodwillAndIntangibleAssetsIntangibleAssetsIndefiniteLivedPolicy', window );">Goodwill and Indefinite-Lived Intangible Assets</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(q) Goodwill and Indefinite-Lived Intangible Assets</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Goodwill is an asset representing the future economic benefits arising from assets acquired in a business combination that are not individually identified and separately recognized. Goodwill is measured as the excess of the consideration transferred over the net fair value of identifiable assets acquired and liabilities assumed. Intangible assets with indefinite useful lives are measured at their respective fair values on the acquisition date. Intangible assets related to IPR&amp;D projects are considered to be indefinite-lived until the completion or abandonment of the associated research and development (&#8220;R&amp;D&#8221;) efforts. If and when development is complete, the associated assets would be deemed long-lived and would then be amortized based on their respective estimated useful lives at that point in time. Goodwill and indefinite-lived intangibles are not amortized into results of operations but instead are evaluated for impairment. The Company performs the evaluation in the beginning of the fourth quarter of each year or more frequently if impairment indicators arise.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">In testing goodwill for impairment, the Company may first perform a qualitative assessment of whether it is more likely than not that the reporting unit&#8217;s fair value is less than its carrying amount, and, if so, the Company then quantitatively compares the fair value of the reporting unit to its carrying amount. If the fair value exceeds the carrying amount, goodwill is not impaired. If the carrying amount exceeds fair value, the Company then records an impairment loss equal to the difference, up to the carrying value of goodwill.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">The Company determines the fair value of its reporting unit based on a reconciliation of the fair value of the reporting unit to the Company&#8217;s adjusted market capitalization. The adjusted market capitalization is calculated by multiplying the average share price of the Company&#8217;s common stock for the last </span><span style="-sec-ix-hidden:Hidden_lu4ZbA0J8kKBzBR2b7i9TA;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">ten</span></span><span style="font-size:10pt;"> trading days prior to the measurement date by the number of outstanding common shares and adding a control premium. The control premium is estimated using historical transactions in similar industries.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">In testing indefinite-lived intangible assets for impairment, the Company may first perform a qualitative assessment of whether it is more likely than not that the fair value of the indefinite-lived intangible asset is less than its carrying amount, and, if so, the Company then quantitatively compares the fair value of the indefinite-lived intangible asset to its carrying amount. The Company determines the fair value of its indefinite-lived intangible assets using a discounted cash flow method.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><span></span>
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<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_LongLivedAssetsAndCostMethodInvestmentsPolicyTextBlock', window );">Long-lived Assets</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(r) Long-lived Assets</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Long-lived intangible assets consist of purchased technology, customer relationships, patents, trademarks and tradenames, and backlog and are initially recorded at fair value. Long-lived intangible assets are amortized over their estimated useful lives in a method reflecting the pattern in which the economic benefits are consumed or straight-lined if such pattern cannot be reliably determined.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Property, plant, and equipment are recorded at cost. Depreciation expense is calculated based on the estimated useful lives of the assets by using the straight-line method. Amortization of leasehold improvements is recognized using the straight-line method over the shorter of the remaining lease term or the estimated useful lives of the improvements.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Long-lived assets are reviewed for impairment whenever events or changes in circumstances indicate that the carrying amount of an asset may not be recoverable. If circumstances require a long-lived asset or asset group be tested for possible impairment, a recoverability test is performed utilizing undiscounted cash flows expected to be generated by that asset or asset group compared to its carrying amount. If the carrying amount of the long-lived asset or asset group is not recoverable on an undiscounted cash flow basis, impairment is recognized to the extent the carrying amount exceeds its fair value. Fair value is determined through various valuation techniques including discounted cash flow models or, when available, quoted market values and third-party appraisals.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><span></span>
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<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LesseeLeasesPolicyTextBlock', window );">Leases</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(s) Leases</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company determines at contract inception if an arrangement is a lease, or contains a lease, of an identified asset for which the Company has the right to obtain substantially all of the economic benefits from its use and the right to direct its use. Right-of-use (&#8220;ROU&#8221;) assets represent the Company&#8217;s right to use an underlying asset for the lease term, while lease liabilities represent the Company&#8217;s obligation to make lease payments arising from the lease. Operating lease ROU assets and liabilities are recognized at lease commencement date based on the present value of lease payments over the lease term. The implicit discount rate in the Company&#8217;s leases generally cannot readily be determined, and therefore the Company uses its incremental borrowing rate based on information available at lease commencement date in determining the present value of future payments. The Company has options to renew or terminate certain leases. These options are included in the determination of lease term when it is reasonably certain that the Company will exercise such options. The Company does not separate lease and non-lease components in determining ROU assets or lease liabilities for real estate leases. Additionally, the Company does not recognize ROU assets or lease liabilities for leases with original terms or renewals of one year or less.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><span></span>
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<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_NewAccountingPronouncementsPolicyPolicyTextBlock', window );">Recently Adopted Accounting Standards and Recent Accounting Pronouncements Not Yet Adopted</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(t) Recently Adopted Accounting Standards</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">The Company </span><span style="font-size:10pt;">adopted</span><span style="font-size:10pt;"> ASU 2019-12:&#160;</span><i style="font-size:10pt;font-style:italic;">Income Taxes (Topic 740): Simplifying the Accounting for Income Taxes </i><span style="font-size:10pt;">in the second quarter of 2020, effective as of the beginning of fiscal year 2020. This ASU simplifies the accounting for income taxes by eliminating certain exceptions to the general principles and simplifying several aspects of ASC 740,&#160;</span><i style="font-size:10pt;font-style:italic;">Income Taxes,&#160;</i><span style="font-size:10pt;">including, but not limited to, requirements related to the following: a) exception to the incremental approach for intraperiod tax allocation; b) the tax basis step-up in goodwill obtained in a transaction that is not a business combination; c) ownership changes in investments - changes from a subsidiary to an equity method investment; d) separate financial statements of entities not subject to tax; e) interim-period accounting for enacted changes in tax law; and f) the year-to-date loss limitation in interim-period tax accounting. The adoption did not have a material impact on the Company&#8217;s consolidated financial statements as of the date of adoption.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;">The Company </span><span style="font-size:10pt;">adopted</span><span style="font-size:10pt;"> ASU 2020-06: </span><i style="font-size:10pt;font-style:italic;">Debt &#8211; Debt with Conversion and Other Options (Subtopic 470-20) and Derivatives and Hedging &#8211; Contracts in Entity&#8217;s Own Equity (Subtopic 815-40): Accounting for Convertible Instruments and Contracts in an Entity&#8217;s Own Equity</i><span style="font-size:10pt;"> on January 1, 2022, using the </span><span style="-sec-ix-hidden:Hidden_kuYE2HfeWkSfBndNPXMkng;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">modified retrospective method</span></span><span style="font-size:10pt;"> for all financial instruments that were outstanding as of the adoption date. This standard simplifies the accounting for convertible debt instruments by removing the separation models for convertible debt with a cash conversion feature, as well as convertible instruments with a beneficial conversion feature. As a result, entities will account for a convertible debt instrument wholly as debt, unless certain other conditions are met. The elimination of these models reduces non-cash interest expense for entities that have issued a convertible instrument that was within the scope of those models before the adoption of ASU 2020-06, such as the Company&#8217;s 2023 Notes, 2025 Notes, and 2027 Notes. Additionally, ASU 2020-06 requires the application of the if-converted method for calculating diluted earnings per share, and precludes the use of the treasury stock method for certain debt instruments, such as the Company&#8217;s 2023 Notes, 2025 Notes, and 2027 Notes.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The adoption of ASU 2020-06 resulted in the following adjustments to the Consolidated Balance Sheets:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:61.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:1.44%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:12.04%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.11%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:10.13%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:61.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.33%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, 2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:10.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Adoption of </b><b style="font-weight:bold;"><br/></b><b style="font-weight:bold;">ASU 2020-06</b></p></td><td style="vertical-align:bottom;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">January 1, 2022</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="10" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:61.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:36.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">&#160;(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:61.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Balance Sheet line item:</b></p></td><td style="vertical-align:bottom;width:1.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:61.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Long-term debt</p></td><td style="vertical-align:bottom;width:1.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 229,438</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 44,260</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 273,698</p></td></tr><tr><td style="vertical-align:bottom;width:61.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Additional paid-in capital</p></td><td style="vertical-align:bottom;width:1.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,116,921</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (56,800)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,060,121</p></td></tr><tr><td style="vertical-align:bottom;width:61.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Accumulated deficit</p></td><td style="vertical-align:bottom;width:1.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (681,283)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 12,540</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (668,743)</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The adoption of ASU 2020-06 resulted in the following adjustments to the Company&#8217;s calculations of basic and diluted income per share for the year ended December 31, 2022:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:63.07%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.22%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.32%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.65%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:10.85%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.12%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:63.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:36.92%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended December&#160;31, 2022</b></p></td></tr><tr><td style="vertical-align:bottom;width:63.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Under</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Under</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.55%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">ASU 2020-06</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">legacy accounting</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Difference</b></p></td></tr><tr><td style="vertical-align:bottom;width:63.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Income per common share:</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.65%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.85%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Basic income per common share</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 3.35</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.85%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 3.15</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 0.20</p></td></tr><tr><td style="vertical-align:bottom;width:63.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Diluted income per common share</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 2.71</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.65%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.85%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 2.91</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (0.20)</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">(u) Recent Accounting Pronouncements Not Yet Adopted</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The Company is evaluating other pronouncements recently issued but not yet adopted. The adoption of these pronouncements is not expected to have a material impact on our consolidated financial statements.</p><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AdvertisingCostsPolicyTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for advertising cost.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 720<br> -SubTopic 35<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=6420018&amp;loc=d3e36677-107848<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AdvertisingCostsPolicyTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_BusinessCombinationsPolicy">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for completed business combinations (purchase method, acquisition method or combination of entities under common control). This accounting policy may include a general discussion of the purchase method or acquisition method of accounting (including for example, the treatment accorded contingent consideration, the identification of assets and liabilities, the purchase price allocation process, how the fair values of acquired assets and liabilities are determined) and the entity's specific application thereof. An entity that acquires another entity in a leveraged buyout transaction generally discloses the accounting policy followed by the acquiring entity in determining the basis used to value its interest in the acquired entity, and the rationale for that accounting policy.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 805<br> -SubTopic 10<br> -Section 05<br> -Paragraph 4<br> -Subparagraph (a)-(d)<br> -URI https://asc.fasb.org/extlink&amp;oid=6909625&amp;loc=d3e227-128457<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_BusinessCombinationsPolicy</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ConcentrationRiskCreditRisk">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for credit risk.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 275<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (d)<br> -URI https://asc.fasb.org/extlink&amp;oid=99393423&amp;loc=d3e5967-108592<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 825<br> -Section 50<br> -Paragraph 1<br> -URI https://asc.fasb.org/extlink&amp;oid=126941378&amp;loc=d3e61044-112788<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ConcentrationRiskCreditRisk</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ConsolidationPolicyTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy regarding (1) the principles it follows in consolidating or combining the separate financial statements, including the principles followed in determining the inclusion or exclusion of subsidiaries or other entities in the consolidated or combined financial statements and (2) its treatment of interests (for example, common stock, a partnership interest or other means of exerting influence) in other entities, for example consolidation or use of the equity or cost methods of accounting. The accounting policy may also address the accounting treatment for intercompany accounts and transactions, noncontrolling interest, and the income statement treatment in consolidation for issuances of stock by a subsidiary.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section 50<br> -Paragraph 4<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=126899994&amp;loc=d3e18823-107790<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -URI https://asc.fasb.org/extlink&amp;oid=109239629&amp;loc=d3e5614-111684<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ConsolidationPolicyTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FairValueOfFinancialInstrumentsPolicy">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for determining the fair value of financial instruments.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 820<br> -SubTopic 10<br> -Section 60<br> -Paragraph 1<br> -URI https://asc.fasb.org/extlink&amp;oid=7493716&amp;loc=d3e21868-110260<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 825<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -URI https://asc.fasb.org/extlink&amp;oid=123594938&amp;loc=d3e13279-108611<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FairValueOfFinancialInstrumentsPolicy</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FiscalPeriod">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for determining an entity's fiscal year or other fiscal period. This disclosure may include identification of the fiscal period end-date, the length of the fiscal period, any reporting period lag between the entity and its subsidiaries, or equity investees. If a reporting lag exists, the closing date of the entity having a different period end is generally noted, along with an explanation of the necessity for using different closing dates. Any intervening events that materially affect the entity's financial position or results of operations are generally also disclosed.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 45<br> -Paragraph 12<br> -URI https://asc.fasb.org/extlink&amp;oid=126929396&amp;loc=d3e5291-111683<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FiscalPeriod</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ForeignCurrencyTransactionsAndTranslationsPolicyTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for (1) transactions denominated in a currency other than the reporting enterprise's functional currency, (2) translating foreign currency financial statements that are incorporated into the financial statements of the reporting enterprise by consolidation, combination, or the equity method of accounting, and (3) remeasurement of the financial statements of a foreign reporting enterprise in a hyperinflationary economy.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 830<br> -URI https://asc.fasb.org/topic&amp;trid=2175825<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ForeignCurrencyTransactionsAndTranslationsPolicyTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_GoodwillAndIntangibleAssetsIntangibleAssetsIndefiniteLivedPolicy">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for indefinite-lived intangible assets (that is, those intangible assets not subject to amortization). This accounting policy also may address how the entity assesses whether events and circumstances continue to support an indefinite useful life and how the entity assesses and measures impairment of such assets.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 30<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=66006027&amp;loc=d3e16323-109275<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_GoodwillAndIntangibleAssetsIntangibleAssetsIndefiniteLivedPolicy</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxPolicyTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for income taxes, which may include its accounting policies for recognizing and measuring deferred tax assets and liabilities and related valuation allowances, recognizing investment tax credits, operating loss carryforwards, tax credit carryforwards, and other carryforwards, methodologies for determining its effective income tax rate and the characterization of interest and penalties in the financial statements.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 45<br> -Paragraph 25<br> -URI https://asc.fasb.org/extlink&amp;oid=123427490&amp;loc=d3e32247-109318<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 20<br> -URI https://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32847-109319<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 19<br> -URI https://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32840-109319<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -URI https://asc.fasb.org/extlink&amp;oid=124431353&amp;loc=SL116659661-227067<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 9<br> -URI https://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32639-109319<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28<br> -URI https://asc.fasb.org/extlink&amp;oid=123427490&amp;loc=d3e32280-109318<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 17<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32809-109319<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeTaxPolicyTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InventoryPolicyTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Disclosure of inventory accounting policy for inventory classes, including, but not limited to, basis for determining inventory amounts, methods by which amounts are added and removed from inventory classes, loss recognition on impairment of inventories, and situations in which inventories are stated above cost.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 330<br> -SubTopic 10<br> -Section 50<br> -Paragraph 4<br> -URI https://asc.fasb.org/extlink&amp;oid=116847112&amp;loc=d3e4556-108314<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 330<br> -URI https://asc.fasb.org/topic&amp;trid=2126998<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(6)(b))<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 912<br> -SubTopic 330<br> -Section 50<br> -Paragraph 1<br> -URI https://asc.fasb.org/extlink&amp;oid=6471895&amp;loc=d3e55923-109411<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 330<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -URI https://asc.fasb.org/extlink&amp;oid=116847112&amp;loc=d3e4492-108314<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 270<br> -SubTopic 10<br> -Section 45<br> -Paragraph 6<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=126900757&amp;loc=d3e543-108305<br><br>Reference 7: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section 50<br> -Paragraph 4<br> -Subparagraph (d)<br> -URI https://asc.fasb.org/extlink&amp;oid=126899994&amp;loc=d3e18823-107790<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -URI https://asc.fasb.org/extlink&amp;oid=6361739&amp;loc=d3e7789-107766<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InventoryPolicyTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LesseeLeasesPolicyTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for leasing arrangement entered into by lessee.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=128292326&amp;loc=SL77918666-209980<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LesseeLeasesPolicyTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NewAccountingPronouncementsPolicyPolicyTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy pertaining to new accounting pronouncements that may impact the entity's financial reporting. Includes, but is not limited to, quantification of the expected or actual impact.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NewAccountingPronouncementsPolicyPolicyTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ResearchAndDevelopmentExpensePolicy">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for costs it has incurred (1) in a planned search or critical investigation aimed at discovery of new knowledge with the hope that such knowledge will be useful in developing a new product or service, a new process or technique, or in bringing about a significant improvement to an existing product or process; or (2) to translate research findings or other knowledge into a plan or design for a new product or process or for a significant improvement to an existing product or process.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 730<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -URI https://asc.fasb.org/extlink&amp;oid=6420194&amp;loc=d3e21568-108373<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ResearchAndDevelopmentExpensePolicy</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RevenueFromContractWithCustomerPolicyTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for revenue from contract with customer.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 50<br> -Paragraph 17<br> -URI https://asc.fasb.org/extlink&amp;oid=126920106&amp;loc=SL49130561-203045<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 50<br> -Paragraph 20<br> -Subparagraph (d)<br> -URI https://asc.fasb.org/extlink&amp;oid=126920106&amp;loc=SL49130566-203045<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 50<br> -Paragraph 18<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=126920106&amp;loc=SL49130563-203045<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -URI https://asc.fasb.org/topic&amp;trid=49130388<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 50<br> -Paragraph 20<br> -Subparagraph (c)<br> -URI https://asc.fasb.org/extlink&amp;oid=126920106&amp;loc=SL49130566-203045<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 50<br> -Paragraph 18<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=126920106&amp;loc=SL49130563-203045<br><br>Reference 7: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section 50<br> -Paragraph 4<br> -Subparagraph (e)<br> -URI https://asc.fasb.org/extlink&amp;oid=126899994&amp;loc=d3e18823-107790<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 50<br> -Paragraph 20<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=126920106&amp;loc=SL49130566-203045<br><br>Reference 9: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 50<br> -Paragraph 19<br> -URI https://asc.fasb.org/extlink&amp;oid=126920106&amp;loc=SL49130564-203045<br><br>Reference 10: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 50<br> -Paragraph 20<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=126920106&amp;loc=SL49130566-203045<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RevenueFromContractWithCustomerPolicyTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationOptionAndIncentivePlansPolicy">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for award under share-based payment arrangement. Includes, but is not limited to, methodology and assumption used in measuring cost.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (f)(2)(ii)<br> -URI https://asc.fasb.org/extlink&amp;oid=128089324&amp;loc=d3e5070-113901<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (f)(1)<br> -URI https://asc.fasb.org/extlink&amp;oid=128089324&amp;loc=d3e5070-113901<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=128089324&amp;loc=d3e5070-113901<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (f)(2)(v)<br> -URI https://asc.fasb.org/extlink&amp;oid=128089324&amp;loc=d3e5070-113901<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -URI https://asc.fasb.org/topic&amp;trid=2228938<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB Topic 14.D.2.Q6)<br> -URI https://asc.fasb.org/extlink&amp;oid=122041274&amp;loc=d3e301413-122809<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (f)(2)<br> -URI https://asc.fasb.org/extlink&amp;oid=128089324&amp;loc=d3e5070-113901<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (f)(2)(i)<br> -URI https://asc.fasb.org/extlink&amp;oid=128089324&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationOptionAndIncentivePlansPolicy</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StandardProductWarrantyPolicy">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for standard warranties including the methodology for measuring the liability.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 460<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=126907703&amp;loc=d3e12565-110249<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StandardProductWarrantyPolicy</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_UseOfEstimates">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for the use of estimates in the preparation of financial statements in conformity with generally accepted accounting principles.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 275<br> -SubTopic 10<br> -Section 50<br> -Paragraph 12<br> -URI https://asc.fasb.org/extlink&amp;oid=99393423&amp;loc=d3e6191-108592<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 275<br> -SubTopic 10<br> -Section 50<br> -Paragraph 11<br> -URI https://asc.fasb.org/extlink&amp;oid=99393423&amp;loc=d3e6161-108592<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 275<br> -SubTopic 10<br> -Section 50<br> -Paragraph 9<br> -URI https://asc.fasb.org/extlink&amp;oid=99393423&amp;loc=d3e6143-108592<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 275<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=99393423&amp;loc=d3e5967-108592<br><br>Reference 5: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 275<br> -SubTopic 10<br> -Section 50<br> -Paragraph 4<br> -URI https://asc.fasb.org/extlink&amp;oid=99393423&amp;loc=d3e6061-108592<br><br>Reference 6: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 275<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -URI https://asc.fasb.org/extlink&amp;oid=99393423&amp;loc=d3e6132-108592<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 275<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (c)<br> -URI https://asc.fasb.org/extlink&amp;oid=99393423&amp;loc=d3e5967-108592<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_UseOfEstimates</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_CashCashEquivalentsAndShortTermInvestmentsPolicyTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for cash and cash equivalents, including the policy for determining which items are treated as cash equivalents. Other information that may be disclosed includes (1) the nature of any restrictions on the entity's use of its cash and cash equivalents, (2) whether the entity's cash and cash equivalents are insured or expose the entity to credit risk, (3) the classification of any negative balance accounts (overdrafts), and (4) the carrying basis of cash equivalents (for example, at cost) and whether the carrying amount of cash equivalents approximates fair value. Disclosure of accounting policy for investments in debt and equity securities that are classified as available-for-sale. This policy also may describe the entity's accounting treatment for transfers between investment categories, how the entity determines whether impairments of available-for-sale securities are other than temporary, and how the fair values of such securities are determined.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_CashCashEquivalentsAndShortTermInvestmentsPolicyTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_LongLivedAssetsAndCostMethodInvestmentsPolicyTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Disclosure of the accounting policy for long-lived assets (those subject to amortization or depreciation) and cost method investments.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_LongLivedAssetsAndCostMethodInvestmentsPolicyTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>40
<FILENAME>R27.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575597662720">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Significant Accounting Policies (Tables)<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2022</div></th></tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract', window );"><strong>Significant Accounting Policies</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ScheduleOfNewAccountingPronouncementsAndChangesInAccountingPrinciplesTextBlock', window );">Schedule of adjustments to Consolidated Balance Sheets and adjustments to calculations of basic and diluted income per share</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The adoption of ASU 2020-06 resulted in the following adjustments to the Consolidated Balance Sheets:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:61.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:1.44%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:12.04%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.11%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:10.13%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:61.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.33%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, 2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:10.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Adoption of </b><b style="font-weight:bold;"><br/></b><b style="font-weight:bold;">ASU 2020-06</b></p></td><td style="vertical-align:bottom;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">January 1, 2022</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="10" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:61.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:36.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">&#160;(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:61.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Balance Sheet line item:</b></p></td><td style="vertical-align:bottom;width:1.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:61.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Long-term debt</p></td><td style="vertical-align:bottom;width:1.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 229,438</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 44,260</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 273,698</p></td></tr><tr><td style="vertical-align:bottom;width:61.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Additional paid-in capital</p></td><td style="vertical-align:bottom;width:1.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,116,921</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (56,800)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,060,121</p></td></tr><tr><td style="vertical-align:bottom;width:61.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Accumulated deficit</p></td><td style="vertical-align:bottom;width:1.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (681,283)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 12,540</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (668,743)</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The adoption of ASU 2020-06 resulted in the following adjustments to the Company&#8217;s calculations of basic and diluted income per share for the year ended December 31, 2022:</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:63.07%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.22%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.32%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.65%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:10.85%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.12%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:63.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:36.92%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended December&#160;31, 2022</b></p></td></tr><tr><td style="vertical-align:bottom;width:63.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Under</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Under</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.55%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">ASU 2020-06</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">legacy accounting</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Difference</b></p></td></tr><tr><td style="vertical-align:bottom;width:63.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Income per common share:</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.65%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.85%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Basic income per common share</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 3.35</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.85%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 3.15</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 0.20</p></td></tr><tr><td style="vertical-align:bottom;width:63.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Diluted income per common share</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 2.71</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.65%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.85%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 2.91</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (0.20)</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfNewAccountingPronouncementsAndChangesInAccountingPrinciplesTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of changes in accounting principles, including adoption of new accounting pronouncements, that describes the new methods, amount and effects on financial statement line items.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -URI https://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22499-107794<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 270<br> -SubTopic 10<br> -Section 45<br> -Paragraph 13<br> -URI https://asc.fasb.org/extlink&amp;oid=126900757&amp;loc=d3e765-108305<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 270<br> -SubTopic 10<br> -Section 45<br> -Paragraph 12<br> -URI https://asc.fasb.org/extlink&amp;oid=126900757&amp;loc=d3e725-108305<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -URI https://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22583-107794<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfNewAccountingPronouncementsAndChangesInAccountingPrinciplesTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>41
<FILENAME>R28.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575597857568">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Income Per Common Share (Tables)<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2022</div></th></tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_EarningsPerShareAbstract', window );"><strong>Income Per Common Share</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock', window );">Schedule of computations of basic and diluted income per share</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:61.69%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:61.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:33.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">For the year ended December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:61.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.54%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.54%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.54%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="11" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:61.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:33.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands, except per share amounts)</i></p></td></tr><tr><td style="vertical-align:bottom;width:61.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Numerator: </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:61.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Net income</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 166,942</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 26,038</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (8,391)</p></td></tr><tr><td style="vertical-align:bottom;width:61.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Interest expense associated with convertible notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 10,832</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;width:61.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Net income available to common shareholders</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 177,774</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 26,038</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (8,391)</p></td></tr><tr><td style="vertical-align:bottom;width:61.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:61.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Denominator:</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:61.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Basic weighted average shares outstanding</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 49,906</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 49,073</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 48,362</p></td></tr><tr><td style="vertical-align:bottom;width:61.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Effect of potentially dilutive share-based awards</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 734</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 1,090</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;width:61.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Dilutive effect of convertible notes </p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 14,967</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 3,480</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;width:61.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Diluted weighted average shares outstanding</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 65,607</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 53,643</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 48,362</p></td></tr><tr><td style="vertical-align:bottom;width:61.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:61.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Net income per common share:</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:61.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Basic</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 3.35</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 0.53</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (0.17)</p></td></tr><tr><td style="vertical-align:bottom;width:61.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Diluted</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 2.71</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 0.49</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (0.17)</p></td></tr><tr><td style="vertical-align:bottom;width:61.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:61.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Unvested participating shares excluded from basic weighted average shares outstanding since the securityholders are not obligated to fund losses</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 6</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 20</p></td></tr><tr><td style="vertical-align:middle;width:61.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Common share equivalents excluded from the diluted weighted average shares outstanding since the Company incurred a net loss and their effect would be antidilutive</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 947</p></td></tr><tr><td style="vertical-align:bottom;width:61.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Potentially dilutive shares excluded from the diluted calculation as their effect would be antidilutive</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 815</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 456</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 923</p></td></tr><tr><td style="vertical-align:middle;width:61.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Maximum potential shares to be issued for settlement of the convertible notes excluded from the diluted calculation as their effect would be antidilutive </p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 8,421</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 17,753</p></td></tr></table><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EarningsPerShareAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EarningsPerShareAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of an entity's basic and diluted earnings per share calculations, including a reconciliation of numerators and denominators of the basic and diluted per-share computations for income from continuing operations.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=124432515&amp;loc=d3e3550-109257<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>42
<FILENAME>R29.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575597663952">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Fair Value Measurements (Tables)<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2022</div></th></tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FairValueDisclosuresAbstract', window );"><strong>Fair Value Measurements</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FairValueAssetsMeasuredOnRecurringBasisTextBlock', window );">Schedule of assets measured on a recurring basis at fair value</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:57.19%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.56%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.56%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.2%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.84%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:57.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;width:8.88%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Level&#160;1</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.11%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Level&#160;2</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.88%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Level&#160;3</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.17%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Total</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="13" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:57.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:40.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:57.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">December&#160;31, 2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.56%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.56%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:57.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"><b style="font-weight:bold;">Cash equivalents</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:57.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Certificate of deposits and time deposits</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.56%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 61,135</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.56%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 61,135</p></td></tr><tr><td style="vertical-align:bottom;width:57.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Money market cash</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 405</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 405</p></td></tr><tr><td style="vertical-align:bottom;width:57.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.56%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 61,540</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.56%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.84%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 61,540</p></td></tr><tr><td style="vertical-align:bottom;width:57.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"><b style="font-weight:bold;">Short-term investments</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:57.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">U.S. treasuries</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.56%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 62,849</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.56%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 62,849</p></td></tr><tr><td style="vertical-align:bottom;width:57.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Government agency securities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 27,366</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 27,366</p></td></tr><tr><td style="vertical-align:bottom;width:57.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Corporate debt</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.56%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 41,591</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.56%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 41,591</p></td></tr><tr><td style="vertical-align:bottom;width:57.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Commercial paper</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 15,682</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 15,682</p></td></tr><tr><td style="vertical-align:bottom;width:57.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.56%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 62,849</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 84,639</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.56%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.84%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 147,488</p></td></tr><tr><td style="vertical-align:bottom;width:57.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 18pt;"><span style="font-size:10pt;font-weight:bold;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:57.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">December&#160;31, 2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.56%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.56%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:57.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"><b style="font-weight:bold;">Cash equivalents</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:57.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Certificate of deposits and time deposits</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.56%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 41,544</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.56%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 41,544</p></td></tr><tr><td style="vertical-align:bottom;width:57.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Money market cash</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 121</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 121</p></td></tr><tr><td style="vertical-align:bottom;width:57.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.56%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 41,665</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.56%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.84%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 41,665</p></td></tr><tr><td style="vertical-align:bottom;width:57.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"><b style="font-weight:bold;">Short-term investments</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:57.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">U.S. treasuries</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.56%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 51,095</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.56%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 51,095</p></td></tr><tr><td style="vertical-align:bottom;width:57.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Government agency securities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 12,052</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 12,052</p></td></tr><tr><td style="vertical-align:bottom;width:57.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Corporate debt</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.56%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 40,035</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.56%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 40,035</p></td></tr><tr><td style="vertical-align:bottom;width:57.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Commercial paper</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 999</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 999</p></td></tr><tr><td style="vertical-align:bottom;width:57.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.56%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 51,095</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 53,086</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.56%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.84%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 104,181</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FairValueAssetsMeasuredOnRecurringBasisTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of assets, including [financial] instruments measured at fair value that are classified in stockholders' equity, if any, by class that are measured at fair value on a recurring basis. The disclosures contemplated herein include the fair value measurements at the reporting date by the level within the fair value hierarchy in which the fair value measurements in their entirety fall, segregating fair value measurements using quoted prices in active markets for identical assets (Level 1), significant other observable inputs (Level 2), and significant unobservable inputs (Level 3).</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 820<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=126976982&amp;loc=d3e19207-110258<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 820<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=126976982&amp;loc=d3e19207-110258<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FairValueAssetsMeasuredOnRecurringBasisTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FairValueDisclosuresAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FairValueDisclosuresAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>43
<FILENAME>R30.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
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							if (e.nextSibling.style.display=='none') {
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<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575594293200">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Investments (Tables)<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
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<tr><th class="th"><div>Dec. 31, 2022</div></th></tr>
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<td class="text">&#160;<span></span>
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</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ScheduleOfAvailableForSaleSecuritiesReconciliationTableTextBlock', window );">Schedule of amortized cost and fair value of available-for-sale securities</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New 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style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Gross</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Gross</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amortized</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Unrealized</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Unrealized</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Estimated</b></p></td></tr><tr><td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Cost</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Gains</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Losses</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Fair&#160;Value</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="13" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:41.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:55.91%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">December&#160;31, 2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">U.S. treasuries</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 63,331</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (482)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 62,849</p></td></tr><tr><td style="vertical-align:bottom;width:55.91%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Government agency securities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 27,464</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (98)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 27,366</p></td></tr><tr><td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Corporate debt</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 42,006</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (415)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 41,591</p></td></tr><tr><td style="vertical-align:bottom;width:55.91%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Commercial paper</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 15,682</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 15,682</p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:55.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 148,483</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (995)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 147,488</p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:55.91%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 12pt;"><span style="font-size:10pt;font-weight:bold;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">December&#160;31, 2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:55.91%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">U.S. treasuries</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 51,269</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (174)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 51,095</p></td></tr><tr><td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Government agency securities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 12,075</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (23)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 12,052</p></td></tr><tr><td style="vertical-align:bottom;width:55.91%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Corporate debt</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 40,169</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (134)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 40,035</p></td></tr><tr><td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Commercial paper</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 999</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 999</p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:55.91%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 104,512</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (331)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 104,181</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtSecuritiesAvailableForSaleUnrealizedLossPositionFairValueTableTextBlock', window );">Schedule of fair value and unrealized losses of available-for-sale securities in a loss position</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:39.84%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.69%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.71%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.71%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:39.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:37.77%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, 2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:19.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, 2021</b></p></td></tr><tr><td style="vertical-align:bottom;width:39.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:18.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Continuous Loss Position </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:18.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Continuous Loss Position </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:19.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Continuous Loss Position </b></p></td></tr><tr><td style="vertical-align:bottom;width:39.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:18.05%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">for Less than 12 Months</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:18.07%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">for 12 Months or More</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:19.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">for Less than 12 Months</b></p></td></tr><tr><td style="vertical-align:bottom;width:39.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Gross</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Gross</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Gross</b></p></td></tr><tr><td style="vertical-align:bottom;width:39.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Estimated</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Unrealized</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Estimated</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Unrealized</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Estimated</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Unrealized</b></p></td></tr><tr><td style="vertical-align:bottom;width:39.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Fair&#160;Value</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.91%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Losses</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Fair&#160;Value</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Losses</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Fair Value</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Losses</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="19" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:39.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="16" style="vertical-align:bottom;white-space:nowrap;width:57.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:39.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">U.S. treasuries</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 39,791</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (84)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 23,057</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (398)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 51,095</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (174)</p></td></tr><tr><td style="vertical-align:bottom;width:39.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Government agency securities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 22,528</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (86)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 4,838</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (12)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 12,052</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (23)</p></td></tr><tr><td style="vertical-align:bottom;width:39.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Corporate debt</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 19,693</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.69%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (138)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 21,898</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.71%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (277)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 40,035</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.71%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (134)</p></td></tr><tr><td style="vertical-align:bottom;width:39.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 82,012</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.69%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (308)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 49,793</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.71%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (687)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 103,182</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.71%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (331)</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_InvestmentsClassifiedByContractualMaturityDateTableTextBlock', window );">Schedule of contractual maturities of securities classified as available-for-sale</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;background:#ffffff;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:72.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.41%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.39%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:72.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:25.01%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, 2022</b></p></td></tr><tr><td style="vertical-align:bottom;width:72.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amortized</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Estimated</b></p></td></tr><tr><td style="vertical-align:bottom;width:72.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.11%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Cost</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Fair&#160;Value</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="7" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:72.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="4" style="vertical-align:bottom;white-space:nowrap;width:23.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:72.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Due in one year or less</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.41%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 145,885</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.39%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 144,959</p></td></tr><tr><td style="vertical-align:bottom;width:72.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Due after one year through two years</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.41%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 2,598</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.39%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 2,529</p></td></tr><tr><td style="vertical-align:bottom;width:72.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.41%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 148,483</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.39%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 147,488</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;background:#ffffff;">&#8203;</span></p><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtSecuritiesAvailableForSaleUnrealizedLossPositionFairValueTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of fair value of investment in debt security measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale), in unrealized loss position, without allowance for credit loss. Includes beneficial interest in securitized financial asset.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 326<br> -SubTopic 30<br> -Section 55<br> -Paragraph 8<br> -URI https://asc.fasb.org/extlink&amp;oid=121590138&amp;loc=SL82922954-210456<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 320<br> -SubTopic 10<br> -Section 50<br> -Paragraph 6<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=126970911&amp;loc=d3e27290-111563<br><br>Reference 3: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 326<br> -SubTopic 30<br> -Section 50<br> -Paragraph 4<br> -URI https://asc.fasb.org/extlink&amp;oid=124269663&amp;loc=SL82922888-210455<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtSecuritiesAvailableForSaleUnrealizedLossPositionFairValueTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InvestmentsClassifiedByContractualMaturityDateTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of maturities of an entity's investments as well as any other information pertinent to the investments.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InvestmentsClassifiedByContractualMaturityDateTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InvestmentsDebtAndEquitySecuritiesAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InvestmentsDebtAndEquitySecuritiesAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfAvailableForSaleSecuritiesReconciliationTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of the reconciliation of available-for-sale securities from cost basis to fair value.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfAvailableForSaleSecuritiesReconciliationTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>44
<FILENAME>R31.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575597879872">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Inventories (Tables)<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2022</div></th></tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_InventoryDisclosureAbstract', window );"><strong>Inventories</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ScheduleOfInventoryCurrentTableTextBlock', window );">Schedule of inventories</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:82%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:65.09%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.56%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:13.34%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.56%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:13.31%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:65.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.87%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:65.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.87%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="7" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:65.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:32.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:65.09%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Materials</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.56%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 134,940</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.56%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 96,027</p></td></tr><tr><td style="vertical-align:bottom;width:65.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Work-in-process</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 68,765</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 54,128</p></td></tr><tr><td style="vertical-align:bottom;width:65.09%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Finished goods</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.56%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.34%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 3,203</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.56%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.31%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 20,703</p></td></tr><tr><td style="vertical-align:bottom;width:65.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.34%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 206,908</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.31%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 170,858</p></td></tr></table><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InventoryDisclosureAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InventoryDisclosureAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfInventoryCurrentTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of the carrying amount as of the balance sheet date of merchandise, goods, commodities, or supplies held for future sale or to be used in manufacturing, servicing or production process.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(6)(c))<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(6)(b))<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(6)(a))<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -URI https://asc.fasb.org/extlink&amp;oid=6361739&amp;loc=d3e7789-107766<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfInventoryCurrentTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>45
<FILENAME>R32.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575597701696">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Property, Plant, and Equipment (Tables)<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2022</div></th></tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentAbstract', window );"><strong>Property, Plant, and Equipment</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentTextBlock', window );">Schedule of property, plant, and equipment</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:55.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.17%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:middle;width:14.02%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:50%;transform:translate(0,-50%);width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:55.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.36%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.4%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:55.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.36%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.4%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.02%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Average&#160;Useful&#160;Life</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="9" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:55.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:26.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:55.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Land</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 5,061</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 5,061</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:14.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">N/A</p></td></tr><tr><td style="vertical-align:bottom;width:55.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Building and improvements</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 64,198</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 63,946</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:14.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;">10</span><span style="font-size:10pt;"> &#8211; </span><span style="font-size:10pt;">40 years</span></p></td></tr><tr><td style="vertical-align:bottom;width:55.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Machinery and equipment <sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;">(1)</sup></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 155,533</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 145,656</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:14.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;">3</span><span style="font-size:10pt;"> &#8211; </span><span style="font-size:10pt;">10 years</span></p></td></tr><tr><td style="vertical-align:bottom;width:55.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Leasehold improvements</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.17%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 54,764</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 45,979</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:14.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;">3</span><span style="font-size:10pt;"> &#8211; </span><span style="font-size:10pt;">17 years</span></p></td></tr><tr><td style="vertical-align:bottom;width:55.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Gross property, plant, and equipment</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 279,556</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 260,642</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:55.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Less: accumulated depreciation and amortization</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.17%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 172,275</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 160,899</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:55.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"><b style="font-weight:bold;">Net property, plant, and equipment</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.17%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 107,281</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 99,743</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr></table><div style="font-family:'Times New Roman','Times','serif';font-size:9.0pt;margin-bottom:0pt;margin-top:0pt;min-height:1.19em;position:relative;width:100%;"><div style="background-color:#000000;height:1pt;position:relative;top:0.6em;width:25.0%;border:none;margin:0 auto 0 0;"/></div><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:9pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(1)</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:9pt;font-style:normal;font-weight:normal;">Machinery and equipment also includes software, furniture, and fixtures</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PropertyPlantAndEquipmentAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PropertyPlantAndEquipmentTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of physical assets used in the normal conduct of business and not intended for resale. Includes, but is not limited to, balances by class of assets, depreciation and depletion expense and method used, including composite depreciation, and accumulated deprecation.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 360<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -URI https://asc.fasb.org/extlink&amp;oid=6391035&amp;loc=d3e2868-110229<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>46
<FILENAME>R33.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575594293072">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Goodwill and Intangible Assets (Tables)<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2022</div></th></tr>
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<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_GoodwillAndIntangibleAssetsDisclosureAbstract', window );"><strong>Goodwill and Intangible Assets</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ScheduleOfGoodwillTextBlock', window );">Schedule of changes in goodwill</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:52.19%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:2.43%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.96%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:2.44%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.96%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:2.44%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:12.11%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:52.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Gross&#160;carrying</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;width:13.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Accumulated</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;width:13.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:52.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">amount</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">impairment</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.59%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Net amount</b></p></td></tr><tr><td style="vertical-align:bottom;width:52.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:45.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:52.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Balance at December&#160;31, 2022 and 2021</p></td><td style="vertical-align:bottom;width:2.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 430,331</p></td><td style="vertical-align:bottom;width:2.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 248,388</p></td><td style="vertical-align:bottom;width:2.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 181,943</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_ScheduleOfIntangibleAssetsExcludingGoodwillTableTextBlock', window );">Schedule of intangible assets excluding goodwill</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:26.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:26.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:29.42%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, 2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:29.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, 2021</b></p></td></tr><tr><td style="vertical-align:bottom;width:26.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Average</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Accumulated</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Accumulated</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:26.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Remaining</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Gross</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amortization</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Gross</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amortization</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:26.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amortization</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Carrying</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">and</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Net </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Carrying</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">and</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Net</b></p></td></tr><tr><td style="vertical-align:bottom;width:26.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:9.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Period</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.86%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amount</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:9.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Impairment</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.83%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amount</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.86%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amount</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:9.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Impairment</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amount</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="21" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:26.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in years)</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="17" style="vertical-align:bottom;white-space:nowrap;width:60.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:26.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Technology</p></td><td style="vertical-align:middle;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;white-space:nowrap;width:9.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;"> 2.6</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 327,908</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 316,918</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 10,990</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 327,908</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 310,551</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.86%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 17,357</p></td></tr><tr><td style="vertical-align:bottom;width:26.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Customer relationships</p></td><td style="vertical-align:bottom;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;"> 6.3</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 146,465</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 135,415</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 11,050</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 146,465</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 132,970</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 13,495</p></td></tr><tr><td style="vertical-align:bottom;width:26.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Trademarks and tradenames</p></td><td style="vertical-align:bottom;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;white-space:nowrap;width:9.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;"> 1.5</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 30,910</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 29,063</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 1,847</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 30,910</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 27,857</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.86%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 3,053</p></td></tr><tr><td style="vertical-align:bottom;width:26.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Other</p></td><td style="vertical-align:bottom;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"> -</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 3,686</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.34%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.08%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 3,686</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 3,686</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.34%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.08%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 3,686</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.86%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;width:26.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 12pt;"><span style="font-size:10pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;white-space:nowrap;width:9.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;"> 4.2</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 508,969</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.34%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.08%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 485,082</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 23,887</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 508,969</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.34%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.08%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 475,064</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.86%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 33,905</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ScheduleofFiniteLivedIntangibleAssetsFutureAmortizationExpenseTableTextBlock', window );">Schedule of estimated annual amortization expense, excluding in-process R&amp;D for intangible assets with definite useful lives</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:46%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:75.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:17.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:75.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:20.82%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amortization</b></p></td></tr><tr><td style="vertical-align:bottom;width:75.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:20.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:75.58%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2023</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.58%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.67%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:17.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 8,347</p></td></tr><tr><td style="vertical-align:bottom;width:75.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2024</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:17.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 6,708</p></td></tr><tr><td style="vertical-align:bottom;width:75.58%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2025</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.58%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.67%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:17.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 3,136</p></td></tr><tr><td style="vertical-align:bottom;width:75.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2026</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:17.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 2,134</p></td></tr><tr><td style="vertical-align:bottom;width:75.58%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2027</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.58%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.67%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:17.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 1,550</p></td></tr><tr><td style="vertical-align:bottom;width:75.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Thereafter</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.67%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:17.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 2,012</p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:75.58%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Total</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.58%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.67%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:17.15%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 23,887</p></td></tr></table><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_GoodwillAndIntangibleAssetsDisclosureAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_GoodwillAndIntangibleAssetsDisclosureAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfGoodwillTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of goodwill by reportable segment and in total which includes a rollforward schedule.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (h)<br> -URI https://asc.fasb.org/extlink&amp;oid=121556970&amp;loc=d3e13816-109267<br><br>Reference 2: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (c)<br> -URI https://asc.fasb.org/extlink&amp;oid=121556970&amp;loc=d3e13816-109267<br><br>Reference 3: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (g)<br> -URI https://asc.fasb.org/extlink&amp;oid=121556970&amp;loc=d3e13816-109267<br><br>Reference 4: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1<br> -URI https://asc.fasb.org/extlink&amp;oid=121556970&amp;loc=d3e13816-109267<br><br>Reference 5: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (e)<br> -URI https://asc.fasb.org/extlink&amp;oid=121556970&amp;loc=d3e13816-109267<br><br>Reference 6: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (d)<br> -URI https://asc.fasb.org/extlink&amp;oid=121556970&amp;loc=d3e13816-109267<br><br>Reference 7: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1A<br> -URI https://asc.fasb.org/extlink&amp;oid=121556970&amp;loc=SL108378252-109267<br><br>Reference 8: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (f)<br> -URI https://asc.fasb.org/extlink&amp;oid=121556970&amp;loc=d3e13816-109267<br><br>Reference 9: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=121556970&amp;loc=d3e13816-109267<br><br>Reference 10: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 20<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=121556970&amp;loc=d3e13854-109267<br><br>Reference 11: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 20<br> -Section 55<br> -Paragraph 24<br> -URI https://asc.fasb.org/extlink&amp;oid=122137925&amp;loc=d3e14258-109268<br><br>Reference 12: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=121556970&amp;loc=d3e13816-109267<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfGoodwillTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleofFiniteLivedIntangibleAssetsFutureAmortizationExpenseTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of the amount of amortization expense expected to be recorded in succeeding fiscal years for finite-lived intangible assets.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 30<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=66006027&amp;loc=d3e16323-109275<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleofFiniteLivedIntangibleAssetsFutureAmortizationExpenseTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_ScheduleOfIntangibleAssetsExcludingGoodwillTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of assets, excluding financial assets and goodwill, which lack physical substance with a finite life or exist in perpetuity, by major class.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_ScheduleOfIntangibleAssetsExcludingGoodwillTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>47
<FILENAME>R34.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575678366784">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Accrued Expenses and Other Liabilities (Tables)<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2022</div></th></tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PayablesAndAccrualsAbstract', window );"><strong>Accrued Expenses and Other Liabilities</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ScheduleOfAccruedLiabilitiesTableTextBlock', window );">Schedule of accrued expenses and other current liabilities</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:70.71%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:70.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.51%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.51%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:70.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.51%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.51%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="7" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:70.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:27.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:70.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Payroll and related benefits</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 30,044</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 35,712</p></td></tr><tr><td style="vertical-align:bottom;width:70.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Warranty</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 8,601</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 7,878</p></td></tr><tr><td style="vertical-align:bottom;width:70.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="-sec-ix-hidden:Hidden_EGVCh5E7LkOiByzYXsbm8w;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Operating lease liabilities</span></span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 3,333</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 4,437</p></td></tr><tr><td style="vertical-align:bottom;width:70.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Interest</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 2,853</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 2,757</p></td></tr><tr><td style="vertical-align:bottom;width:70.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Professional fees</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 2,102</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 1,467</p></td></tr><tr><td style="vertical-align:bottom;width:70.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Legal settlement</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 15,000</p></td></tr><tr><td style="vertical-align:bottom;width:70.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Sales, use, and other taxes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 2,027</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 4,889</p></td></tr><tr><td style="vertical-align:bottom;width:70.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Other</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 7,071</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 7,612</p></td></tr><tr><td style="vertical-align:bottom;width:70.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 56,031</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 79,752</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_ScheduleOfDeferredRevenueTableTextBlock', window );">Schedule of changes in deferred revenue</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:80.44%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.55%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.55%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:14.44%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:80.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:16.99%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:80.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Balance - December&#160;31, 2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.55%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.55%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 16,276</p></td></tr><tr><td style="vertical-align:bottom;width:80.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Deferral of revenue</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 8,081</p></td></tr><tr><td style="vertical-align:bottom;width:80.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Recognition of unearned revenue</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.55%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.55%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.44%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (7,367)</p></td></tr><tr><td style="vertical-align:bottom;width:80.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Balance - December&#160;31, 2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.55%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.44%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 16,990</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PayablesAndAccrualsAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PayablesAndAccrualsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfAccruedLiabilitiesTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of the components of accrued liabilities.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfAccruedLiabilitiesTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_ScheduleOfDeferredRevenueTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The Tabular disclosure for deferred revenues at the end of the reporting period, and description and amounts of significant changes that occurred during the reporting period. Deferred revenue is a liability as of the balance sheet date related to a revenue producing activity for which revenue has not yet been recognized. Generally, an entity records deferred revenue when it receives consideration from a customer before achieving certain criteria that must be met for revenue to be recognized in conformity with GAAP.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_ScheduleOfDeferredRevenueTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>48
<FILENAME>R35.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
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							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
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</head>
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<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575597665280">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Commitments and Contingencies (Tables)<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2022</div></th></tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_CommitmentsAndContingenciesDisclosureAbstract', window );"><strong>Commitments and Contingencies</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock', window );">Schedule of changes in product warranty reserves</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:61.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:61.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:36.36%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:61.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.71%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="10" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:61.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="7" style="vertical-align:bottom;white-space:nowrap;width:35.08%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:61.57%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Balance - beginning of the year</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 7,878</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 5,058</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 7,067</p></td></tr><tr><td style="vertical-align:bottom;width:61.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Warranties issued</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 8,304</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 7,102</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 4,626</p></td></tr><tr><td style="vertical-align:bottom;width:61.57%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Consumption of reserves</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (7,527)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (5,784)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (6,691)</p></td></tr><tr><td style="vertical-align:bottom;width:61.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Changes in estimate</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.42%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (54)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,502</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 56</p></td></tr><tr><td style="vertical-align:bottom;width:61.57%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Balance - end of the year</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.42%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 8,601</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 7,878</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.47%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 5,058</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p><span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LesseeOperatingLeaseLiabilityMaturityTableTextBlock', window );">Schedule of maturities of lease liabilities 2020</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Operating</b></p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Leases</b></p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Payments due by period:</b></p></td><td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2023</p></td><td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 3,757</p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2024</p></td><td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 4,347</p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2025</p></td><td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 3,812</p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2026</p></td><td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 4,012</p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2027</p></td><td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 3,620</p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Thereafter</p></td><td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 34,244</p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Total future minimum lease payments</p></td><td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 53,792</p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Less: Imputed interest</p></td><td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (16,878)</p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Total</p></td><td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 36,914</p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:82.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Reported as of December&#160;31, 2022</b></p></td><td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="-sec-ix-hidden:Hidden_eoIrvRLA5kWv8kXlN_7lSg;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Accrued expenses and other current liabilities</span></span></p></td><td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 3,333</p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Long-term operating lease liabilities</p></td><td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 33,581</p></td></tr><tr><td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 12pt;"><span style="-sec-ix-hidden:Hidden_sGkRBjQQs0yUxZ2hF_23sA;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Total</span></span></p></td><td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 36,914</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ScheduleOfRevenueByMajorCustomersByReportingSegmentsTableTextBlock', window );">Schedule of customers who accounted for more than 10% of our aggregate accounts receivable or net sales</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:40.97%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.53%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.61%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.53%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.63%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.61%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.62%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:40.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="3" style="vertical-align:bottom;white-space:nowrap;width:19.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Accounts&#160;Receivable</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:31.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Net&#160;Sales&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:40.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="3" style="vertical-align:bottom;white-space:nowrap;width:19.78%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:31.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">For the Year Ended December&#160;31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:40.97%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Customer</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.61%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.63%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.61%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.62%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:40.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Customer A</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.63%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 14</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 15</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:40.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Customer B</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 10</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:40.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Customer C</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.63%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 12</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:40.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Customer D</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 10</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:40.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Customer E</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.63%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 13</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td></tr><tr><td style="vertical-align:bottom;width:40.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Customer F</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 10</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;">*</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr></table><div style="font-family:'Times New Roman','Times','serif';font-size:9.0pt;margin-bottom:0pt;margin-top:0pt;min-height:1.19em;position:relative;width:100%;"><div style="background-color:#000000;height:1pt;position:relative;top:0.6em;width:25.0%;border:none;margin:0 auto 0 0;"/></div><table style="border-collapse:collapse;border:0;"><tr><td style="vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;"><span style="font-size:10pt;">*</span></p></td><td style="padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;"><span style="font-size:9pt;">Less than 10% of aggregate accounts receivable or net sales</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CommitmentsAndContingenciesDisclosureAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CommitmentsAndContingenciesDisclosureAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LesseeOperatingLeaseLiabilityMaturityTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of undiscounted cash flows of lessee's operating lease liability. Includes, but is not limited to, reconciliation of undiscounted cash flows to operating lease liability recognized in statement of financial position.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 50<br> -Paragraph 6<br> -URI https://asc.fasb.org/extlink&amp;oid=128292326&amp;loc=SL77918701-209980<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LesseeOperatingLeaseLiabilityMaturityTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of the changes in the guarantor's aggregate product warranty liability, including the beginning balance of the aggregate product warranty liability, the aggregate reductions in that liability for payments made (in cash or in kind) under the warranty, the aggregate changes in the liability for accruals related to product warranties issued during the reporting period, the aggregate changes in the liability for accruals related to preexisting warranties (including adjustments related to changes in estimates), and the ending balance of the aggregate product warranty liability.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 460<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -URI https://asc.fasb.org/extlink&amp;oid=126907703&amp;loc=d3e12565-110249<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfRevenueByMajorCustomersByReportingSegmentsTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of the extent of the entity's reliance on its major customers, if revenues from transactions with a single external customer amount to 10 percent or more of entity revenues, including the disclosure of that fact, the total amount of revenues from each such customer, and the identity of the reportable segment or segments reporting the revenues. The entity need not disclose the identity of a major customer or the amount of revenues that each segment reports from that customer. For these purposes, a group of companies known to the entity to be under common control is considered a single customer, and the federal government, a state government, a local government such as a county or municipality, or a foreign government is each considered a single customer.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfRevenueByMajorCustomersByReportingSegmentsTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>49
<FILENAME>R36.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575600678352">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Debt (Tables)<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2022</div></th></tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtDisclosureAbstract', window );"><strong>Debt</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ConvertibleDebtTableTextBlock', window );">Schedule of carrying value of Convertible Senior Notes</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:21.23%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:1.15%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:1.07%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:10.78%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:10.85%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:10.94%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:10.85%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:10.85%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:10.83%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:21.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.07%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="7" style="vertical-align:bottom;white-space:nowrap;width:37.16%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, 2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="7" style="vertical-align:bottom;white-space:nowrap;width:37.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, 2021</b></p></td></tr><tr><td style="vertical-align:bottom;width:21.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-family:'Calibri','Helvetica','sans-serif';font-weight:bold;">&#160;&#160;</b></p></td><td style="vertical-align:bottom;width:1.07%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:10.78%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Principal Amount</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:10.85%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Unamortized </b><b style="font-weight:bold;"><br/></b><b style="font-weight:bold;">transaction costs</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:10.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Net carrying value</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:10.85%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Principal Amount</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:10.85%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Unamortized </b><b style="font-weight:bold;"><br/></b><b style="font-weight:bold;">debt discount/</b><b style="font-weight:bold;"><br/></b><b style="font-weight:bold;">transaction costs</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:10.83%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Net carrying value</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="19" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:21.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="16" style="vertical-align:bottom;white-space:nowrap;width:76.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:21.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2023 Notes</p></td><td style="vertical-align:bottom;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 20,173</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.85%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (4)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 20,169</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.85%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 20,173</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.85%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (967)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 19,206</p></td></tr><tr><td style="vertical-align:bottom;width:21.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2025 Notes</p></td><td style="vertical-align:bottom;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 132,500</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.85%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (990)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 131,510</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.85%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 132,500</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.85%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (17,302)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 115,198</p></td></tr><tr><td style="vertical-align:bottom;width:21.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2027 Notes</p></td><td style="vertical-align:bottom;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.78%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 125,000</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.85%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (2,019)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.94%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 122,981</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.85%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 125,000</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.85%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (29,966)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.83%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 95,034</p></td></tr><tr><td style="vertical-align:bottom;width:21.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Net carrying value</b></p></td><td style="vertical-align:bottom;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 12pt;"><span style="font-size:10pt;font-weight:bold;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.78%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 277,673</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.85%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (3,013)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.94%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 274,660</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.85%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 277,673</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.85%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (48,235)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.83%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 229,438</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_InterestIncomeAndInterestExpenseDisclosureTableTextBlock', window );">Schedule of interest expense related to Convertible Senior Notes</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:53.82%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.57%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:12.89%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:12.89%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:12.83%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:53.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:44.6%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">For&#160;the year ended&#160;December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:53.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.87%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="10" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:53.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:44.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:53.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Cash Interest Expense</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.57%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.89%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.89%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:53.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Coupon interest expense - 2023 Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 545</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 3,138</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 7,390</p></td></tr><tr><td style="vertical-align:bottom;width:53.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Coupon interest expense - 2025 Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.57%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.89%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 4,637</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.89%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 4,637</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 554</p></td></tr><tr><td style="vertical-align:bottom;width:53.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Coupon interest expense - 2027 Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 4,688</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 4,688</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 2,904</p></td></tr><tr><td style="vertical-align:bottom;width:53.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Non-cash Interest Expense</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.57%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.89%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.89%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:53.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Amortization of debt discount/transaction costs- 2023 Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 97</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 4,932</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 10,887</p></td></tr><tr><td style="vertical-align:bottom;width:53.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Amortization of debt discount/transaction costs- 2025 Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.57%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.89%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 457</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.89%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 4,795</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.83%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 546</p></td></tr><tr><td style="vertical-align:bottom;width:53.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Amortization of debt discount/transaction costs- 2027 Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 408</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 4,092</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.83%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 2,359</p></td></tr><tr><td style="vertical-align:bottom;width:53.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total Interest Expense</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.57%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.89%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 10,832</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.89%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 26,282</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.83%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 24,640</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><span></span>
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<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of convertible debt instrument. Includes, but is not limited to, principal amount and amortized premium or discount.</p></div>
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</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtDisclosureAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtDisclosureAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InterestIncomeAndInterestExpenseDisclosureTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of interest income and expense, including, but not limited to, interest income and expense from investments, loans, and securities.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InterestIncomeAndInterestExpenseDisclosureTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>50
<FILENAME>R37.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575597665952">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Stockholders' Equity (Tables)<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2022</div></th></tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_StockholdersEquityNoteAbstract', window );"><strong>Stockholders' Equity</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock', window );">Schedule of the changes in the balances of each component of AOCI, net of tax</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:62.69%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.01%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:62.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Unrealized</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:62.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Gains&#160;(Losses)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:62.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Foreign</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">on Available</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:62.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Currency</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">for&#160;Sale&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:62.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.7%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Translation</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.51%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Securities</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.7%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Total</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="10" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:62.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:34.85%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:62.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Balance - December&#160;31, 2019</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 1,861</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 33</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 1,894</p></td></tr><tr><td style="vertical-align:bottom;width:62.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Other comprehensive income (loss)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 5</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.01%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (53)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (48)</p></td></tr><tr><td style="vertical-align:bottom;width:62.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Balance - December&#160;31, 2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 1,866</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (20)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 1,846</p></td></tr><tr><td style="vertical-align:bottom;width:62.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Other comprehensive income (loss)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (52)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.01%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (311)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (363)</p></td></tr><tr><td style="vertical-align:bottom;width:62.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Balance - December&#160;31, 2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 1,814</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (331)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 1,483</p></td></tr><tr><td style="vertical-align:bottom;width:62.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Other comprehensive income (loss)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (41)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.01%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (514)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (555)</p></td></tr><tr><td style="vertical-align:bottom;width:62.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Balance - December&#160;31, 2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 1,773</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.01%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (845)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.2%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 928</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of the components of accumulated other comprehensive income (loss).</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 830<br> -SubTopic 30<br> -Section 50<br> -Paragraph 1<br> -URI https://asc.fasb.org/extlink&amp;oid=6450520&amp;loc=d3e32583-110901<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 45<br> -Paragraph 14A<br> -URI https://asc.fasb.org/extlink&amp;oid=126968391&amp;loc=SL7669686-108580<br><br>Reference 3: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 830<br> -SubTopic 30<br> -Section 45<br> -Paragraph 20<br> -URI https://asc.fasb.org/extlink&amp;oid=118261656&amp;loc=d3e32211-110900<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StockholdersEquityNoteAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StockholdersEquityNoteAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>51
<FILENAME>R38.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575600688800">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Stock Plans (Tables)<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2022</div></th></tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract', window );"><strong>Stock Plans</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ScheduleOfEmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsTextBlock', window );">Schedule of share-based compensation expense</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:64.43%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.52%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:64.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:33.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">For the year ended December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:64.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.78%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.78%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.81%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="10" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:64.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:33.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:64.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Cost of sales</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 4,551</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 2,373</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 1,870</p></td></tr><tr><td style="vertical-align:bottom;width:64.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Research and development</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 6,682</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 3,850</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 2,900</p></td></tr><tr><td style="vertical-align:bottom;width:64.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Selling, general, and administrative</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 11,761</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 9,026</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.52%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 7,933</p></td></tr><tr><td style="vertical-align:bottom;width:64.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 22,994</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 15,249</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.52%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 12,703</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ScheduleOfUnrecognizedCompensationCostNonvestedAwardsTableTextBlock', window );">Summary of unrecognized share-based compensation costs</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.3%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:13.67%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Unrecognized</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Weighted</b></p></td></tr><tr><td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Share-Based</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Average&#160;Period</b></p></td></tr><tr><td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Compensation</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Expected&#160;to&#160;be</b></p></td></tr><tr><td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.71%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Costs</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.67%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Recognized</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="6" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="3" style="vertical-align:bottom;white-space:nowrap;width:14.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in years)</i></p></td></tr><tr><td style="vertical-align:bottom;width:69.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Restricted stock units</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 9,468</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.67%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"><span style="font-size:10pt;"> 1.9</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Restricted stock awards</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 24,610</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"><span style="font-size:10pt;"> 1.9</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Performance share units</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.3%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 3,310</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.67%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"><span style="font-size:10pt;"> 2.0</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Total unrecognized share-based compensation cost</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.3%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 37,388</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"><span style="font-size:10pt;"> 1.9</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock', window );">Summary of stock option activity</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:71.48%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:10.93%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:71.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Weighted&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:71.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Number&#160;of</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Average</b></p></td></tr><tr><td style="vertical-align:bottom;width:71.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Shares</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.54%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Exercise&#160;Price</b></p></td></tr><tr><td style="vertical-align:bottom;width:71.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:71.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;">Balance -  December&#160;31, 2019</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,119</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 34.88</p></td></tr><tr><td style="vertical-align:bottom;width:71.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Expired</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (389)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 34.15</p></td></tr><tr><td style="vertical-align:bottom;width:71.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;">Balance -  December&#160;31, 2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 730</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 35.26</p></td></tr><tr><td style="vertical-align:bottom;width:71.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Exercised</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (2)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 23.36</p></td></tr><tr><td style="vertical-align:bottom;width:71.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Expired</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (285)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 40.16</p></td></tr><tr><td style="vertical-align:bottom;width:71.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;">Balance -  December&#160;31, 2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 443</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 32.15</p></td></tr><tr><td style="vertical-align:bottom;width:71.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Expired</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (266)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 32.95</p></td></tr><tr><td style="vertical-align:bottom;width:71.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;">Balance -  December&#160;31, 2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 177</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 30.94</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ScheduleOfShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeTextBlock', window );">Summary of information about stock option information</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:25.48%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:14.13%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:12.79%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:16.7%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:13.4%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:25.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="9" style="vertical-align:bottom;white-space:nowrap;width:71.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Options&#160;Outstanding and Exercisable</b></p></td></tr><tr><td style="vertical-align:bottom;width:25.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:16.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Weighted</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:25.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Aggregate</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:16.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Average</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Weighted</b></p></td></tr><tr><td style="vertical-align:bottom;width:25.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Intrinsic</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:16.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Remaining</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Average</b></p></td></tr><tr><td style="vertical-align:bottom;width:25.48%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;margin:0pt;"><b style="font-weight:bold;">Range&#160;of&#160;Exercise&#160;Prices</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Shares</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.87%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Value</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:16.7%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Contractual&#160;Life</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.48%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Exercise&#160;Price</b></p></td></tr><tr><td style="vertical-align:bottom;width:25.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:16.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;years)</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:7pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:7pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:25.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$20.00 - $30.00</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 10</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.79%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:16.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"><span style="font-size:8pt;"> 0.8</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 29.21</p></td></tr><tr><td style="vertical-align:bottom;width:25.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$30.01 - $40.00</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 167</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.79%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:16.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"><span style="font-size:8pt;"> 0.8</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 31.02</p></td></tr><tr><td style="vertical-align:bottom;width:25.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.13%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 177</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:12.79%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:16.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"><span style="font-size:8pt;"> 0.8</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:13.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 30.94</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_ScheduleOfStockOptionExercisedTableTextBlock', window );">Summary of stock options exercised</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:69.29%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:69.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:28.64%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:69.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="10" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:69.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:28.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:69.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Cash received from options exercised</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 37</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;width:69.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Intrinsic value of options exercised</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 6</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock', window );">Summary of non-vested restricted and performance shares activity</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:73.98%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.74%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:73.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Weighted</b></p></td></tr><tr><td style="vertical-align:bottom;width:73.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Average</b></p></td></tr><tr><td style="vertical-align:bottom;width:73.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Number&#160;of</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Grant&#160;Date</b></p></td></tr><tr><td style="vertical-align:bottom;width:73.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Shares</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.04%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Fair&#160;Value</b></p></td></tr><tr><td style="vertical-align:bottom;width:73.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;">Balance -  December&#160;31, 2019</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 2,257</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 16.20</p></td></tr><tr><td style="vertical-align:bottom;width:73.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Granted</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,054</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 9.53</p></td></tr><tr><td style="vertical-align:bottom;width:73.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Performance award adjustments</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (51)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 30.94</p></td></tr><tr><td style="vertical-align:bottom;width:73.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Vested</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (798)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 16.01</p></td></tr><tr><td style="vertical-align:bottom;width:73.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Forfeited</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (422)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 14.87</p></td></tr><tr><td style="vertical-align:bottom;width:73.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;">Balance -  December&#160;31, 2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 2,040</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 12.73</p></td></tr><tr><td style="vertical-align:bottom;width:73.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Granted</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,031</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 24.26</p></td></tr><tr><td style="vertical-align:bottom;width:73.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Performance award adjustments</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 159</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 18.38</p></td></tr><tr><td style="vertical-align:bottom;width:73.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Vested</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (1,014)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 15.50</p></td></tr><tr><td style="vertical-align:bottom;width:73.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Forfeited</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (133)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 15.08</p></td></tr><tr><td style="vertical-align:bottom;width:73.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;">Balance -  December&#160;31, 2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 2,083</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 17.33</p></td></tr><tr><td style="vertical-align:bottom;width:73.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Granted</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,253</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 29.12</p></td></tr><tr><td style="vertical-align:bottom;width:73.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Performance award adjustments</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 85</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 14.03</p></td></tr><tr><td style="vertical-align:bottom;width:73.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Vested</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (844)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 15.00</p></td></tr><tr><td style="vertical-align:bottom;width:73.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Forfeited</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (81)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 20.18</p></td></tr><tr><td style="vertical-align:bottom;width:73.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;">Balance -  December&#160;31, 2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.84%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 2,496</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 23.83</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><span></span>
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<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_ScheduleOfShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsValuationAssumptionsTableTextBlock', window );">Summary of valuation assumptions for performance awards</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:67.07%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.71%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:6.33%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:6.33%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:6.48%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:67.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:28.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended December&#160;31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:7.36%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;width:7.37%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;width:8.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Weighted average fair value</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;width:6.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 45.28</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;width:6.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 27.81</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;width:6.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 10.59</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Dividend yield</p></td><td style="vertical-align:bottom;width:1.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 0</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 0</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 0</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td></tr><tr><td style="vertical-align:bottom;width:67.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Expected volatility factor<sup style="font-family:'Calibri','Helvetica','sans-serif';font-size:8.25pt;line-height:100%;top:0pt;vertical-align:top;">(1)</sup></p></td><td style="vertical-align:bottom;width:1.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 58</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 63</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;width:1.72%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 60</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td></tr><tr><td style="vertical-align:bottom;width:67.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Risk-free interest rate<sup style="font-family:'Calibri','Helvetica','sans-serif';font-size:8.25pt;line-height:100%;top:0pt;vertical-align:top;">(2)</sup></p></td><td style="vertical-align:bottom;width:1.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 2.13</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 0.34</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 0.54</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td></tr><tr><td style="vertical-align:bottom;width:67.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Expected life (in years)<sup style="font-family:'Calibri','Helvetica','sans-serif';font-size:8.25pt;line-height:100%;top:0pt;vertical-align:top;">(3)</sup></p></td><td style="vertical-align:bottom;width:1.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="font-size:10pt;"> 3.0</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="font-size:10pt;"> 3.0</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;width:1.72%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.48%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="font-size:10pt;"> 3.0</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr></table><div style="font-family:'Times New Roman','Times','serif';font-size:9.0pt;margin-bottom:0pt;margin-top:0pt;min-height:1.19em;position:relative;width:100%;"><div style="background-color:#000000;height:1pt;position:relative;top:0.6em;width:25.0%;border:none;margin:0 auto 0 0;"/></div><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:9pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(1)</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:9pt;font-style:normal;font-weight:normal;">Expected volatility is measured using historical daily price changes of the Company&#8217;s stock over the respective expected term.</span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:9pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(2)</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:9pt;font-style:normal;font-weight:normal;">The risk-free rate for periods within the contractual term is based on the U.S. Treasury yield curve in effect at the time of grant.</span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:9pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(3)</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:9pt;font-style:normal;font-weight:normal;">The expected life is the number of years the Company estimates that the awards will be outstanding prior to exercise. </span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;visibility:hidden;">&#8203;</span></p><span></span>
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<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ScheduleOfShareBasedPaymentAwardEmployeeStockPurchasePlanValuationAssumptionsTableTextBlock', window );">Summary of valuation assumptions for employee stock purchase plan</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;min-height:0.0pt;margin:0pt;"><span style="font-size:0pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:67.21%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.35%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:6.14%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:6.15%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:6.15%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:67.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:29.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended December&#160;31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:67.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:7.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;width:7.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;width:7.53%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:67.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Weighted average fair value</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.35%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;width:6.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 6.00</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;width:6.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 5.90</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;width:6.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 4.81</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Dividend yield</p></td><td style="vertical-align:bottom;width:1.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 0</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 0</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 0</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%</p></td></tr><tr><td style="vertical-align:bottom;width:67.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Expected volatility factor<sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;">(1)</sup></p></td><td style="vertical-align:bottom;width:1.35%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 43</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 52</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;width:1.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 70</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%</p></td></tr><tr><td style="vertical-align:bottom;width:67.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Risk-free interest rate<sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;">(2)</sup></p></td><td style="vertical-align:bottom;width:1.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1.73</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 0.07</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%&#160;&#160;</p></td><td style="vertical-align:bottom;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 0.95</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">%</p></td></tr><tr><td style="vertical-align:bottom;width:67.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Expected life (in years)<sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;">(3)</sup></p></td><td style="vertical-align:bottom;width:1.35%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="font-size:10pt;"> 0.5</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="font-size:10pt;"> 0.5</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;width:1.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:6.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><span style="font-size:10pt;"> 0.5</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr></table><div style="font-family:'Times New Roman','Times','serif';font-size:9.0pt;margin-bottom:0pt;margin-top:0pt;min-height:1.19em;position:relative;width:100%;"><div style="background-color:#000000;height:1pt;position:relative;top:0.6em;width:25.0%;border:none;margin:0 auto 0 0;"/></div><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:9pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(1)</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:9pt;font-style:normal;font-weight:normal;">Expected volatility is measured using historical daily price changes of the Company&#8217;s stock over the respective expected term.</span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:9pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(2)</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:9pt;font-style:normal;font-weight:normal;">The risk-free rate for periods within the contractual term is based on the U.S. Treasury yield curve in effect at the time of grant.</span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:9pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(3)</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:9pt;font-style:normal;font-weight:normal;">The expected life is the number of years the Company estimates that the purchase rights will be outstanding prior to exercise. </span></td></tr></table><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfEmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of allocation of amount expensed and capitalized for award under share-based payment arrangement to statement of income or comprehensive income and statement of financial position. Includes, but is not limited to, corresponding line item in financial statement.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (h)(1)<br> -URI https://asc.fasb.org/extlink&amp;oid=128089324&amp;loc=d3e5070-113901<br></p></div>
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<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfEmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of option exercise prices, by grouped ranges, including the upper and lower limits of the price range, the number of shares under option, weighted average exercise price and remaining contractual option terms.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -URI https://asc.fasb.org/extlink&amp;oid=128089324&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure for stock option plans. Includes, but is not limited to, outstanding awards at beginning and end of year, grants, exercises, forfeitures, and weighted-average grant date fair value.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (d)<br> -URI https://asc.fasb.org/extlink&amp;oid=128089324&amp;loc=d3e5070-113901<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (e)<br> -URI https://asc.fasb.org/extlink&amp;oid=128089324&amp;loc=d3e5070-113901<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(1)<br> -URI https://asc.fasb.org/extlink&amp;oid=128089324&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfShareBasedPaymentAwardEmployeeStockPurchasePlanValuationAssumptionsTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of the significant assumptions used during the year to estimate the fair value of employee stock purchase plans, including, but not limited to: (a) expected term, (b) expected volatility of the entity's shares, (c) expected dividends, (d) risk-free rate(s), and (e) discount for post-vesting restrictions.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (f)(2)<br> -URI https://asc.fasb.org/extlink&amp;oid=128089324&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfShareBasedPaymentAwardEmployeeStockPurchasePlanValuationAssumptionsTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Disclosure of the number and weighted-average grant date fair value for restricted stock and restricted stock units that were outstanding at the beginning and end of the year, and the number of restricted stock and restricted stock units that were granted, vested, or forfeited during the year.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfUnrecognizedCompensationCostNonvestedAwardsTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of cost not yet recognized and weighted-average period over which cost is expected to be recognized for nonvested award under share-based payment arrangement.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (i)<br> -URI https://asc.fasb.org/extlink&amp;oid=128089324&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfUnrecognizedCompensationCostNonvestedAwardsTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_ScheduleOfShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsValuationAssumptionsTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of the significant assumptions used during the year to estimate the fair value of equity instruments other than options, including, but not limited to: (a) expected term, (b) expected volatility of the entity's shares, (c) expected dividends, (d) risk-free rate(s), and (e) discount for post-vesting restrictions.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_ScheduleOfShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsValuationAssumptionsTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_ScheduleOfStockOptionExercisedTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of stock option exercised.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_ScheduleOfStockOptionExercisedTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>52
<FILENAME>R39.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575594291744">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Income Taxes (Tables)<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2022</div></th></tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncomeTaxDisclosureAbstract', window );"><strong>Income Taxes</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ScheduleOfIncomeBeforeIncomeTaxDomesticAndForeignTableTextBlock', window );">Schedule of income (loss) from continuing operations before income taxes</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:63.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:63.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:34.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:63.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.78%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.78%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="10" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:63.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:34.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:63.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Domestic</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 47,368</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 23,561</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (10,292)</p></td></tr><tr><td style="vertical-align:bottom;width:63.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Foreign</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 3,617</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 2,119</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 1,828</p></td></tr><tr><td style="vertical-align:bottom;width:63.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Total</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 50,985</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 25,680</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.46%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (8,464)</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock', window );">Schedule of components of the expense (benefit) for income taxes</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:66.7%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.23%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.27%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:66.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:31.22%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:66.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.02%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.55%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="10" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:66.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:31.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:66.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Current:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:66.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Federal</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;width:66.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Foreign</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 1,506</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 183</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 22</p></td></tr><tr><td style="vertical-align:bottom;width:66.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">State and local</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 577</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 110</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.27%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 204</p></td></tr><tr><td style="vertical-align:bottom;width:66.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;">Total current expense (benefit) for income taxes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 2,083</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 293</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.27%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 226</p></td></tr><tr><td style="vertical-align:bottom;width:66.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Deferred:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:66.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Federal</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (96,811)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 119</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 136</p></td></tr><tr><td style="vertical-align:bottom;width:66.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Foreign</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (484)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (507)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (320)</p></td></tr><tr><td style="vertical-align:bottom;width:66.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">State and local</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (20,745)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (263)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.27%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (115)</p></td></tr><tr><td style="vertical-align:bottom;width:66.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;">Total deferred expense (benefit) for income taxes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (118,040)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (651)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.27%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (299)</p></td></tr><tr><td style="vertical-align:bottom;width:66.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Total expense (benefit) for income taxes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (115,957)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (358)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.27%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (73)</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ScheduleOfEffectiveIncomeTaxRateReconciliationTableTextBlock', window );">Schedule of reconciliation of the income tax expense computed using the Federal statutory rate to actual income tax provision</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;min-height:0.0pt;margin:0pt;"><span style="font-size:0pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:middle;width:62.87%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:50%;transform:translate(0,-50%);width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.17%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:62.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:35.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:62.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.02%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="10" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:62.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:35.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:middle;width:62.87%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Income tax expense (benefit) at U.S. statutory rates</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 10,706</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 5,393</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (1,777)</p></td></tr><tr><td style="vertical-align:middle;width:62.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">State taxes, net of U.S. federal impact</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 1,101</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (607)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (121)</p></td></tr><tr><td style="vertical-align:middle;width:62.87%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Effect of international operations</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (11,149)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 609</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (131)</p></td></tr><tr><td style="vertical-align:middle;width:62.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Research and development tax credit</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (6,470)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (3,964)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 726</p></td></tr><tr><td style="vertical-align:middle;width:62.87%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Net change in valuation allowance</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (104,972)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (2,389)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 388</p></td></tr><tr><td style="vertical-align:middle;width:62.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Change in accrual for unrecognized tax benefits</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 3,349</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 398</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (6)</p></td></tr><tr><td style="vertical-align:middle;width:62.87%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Share-based compensation</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 606</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 1,208</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 2,248</p></td></tr><tr><td style="vertical-align:middle;width:62.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Asset impairment</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 728</p></td></tr><tr><td style="vertical-align:middle;width:62.87%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Partial extinguishment of 2023 Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (1,090)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (2,292)</p></td></tr><tr><td style="vertical-align:middle;width:62.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Adoption of new accounting standard</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (9,295)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:middle;width:62.87%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Other</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 167</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 84</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.17%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 164</p></td></tr><tr><td style="vertical-align:middle;width:62.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Total expense (benefit) for income taxes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (115,957)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.16%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (358)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.17%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (73)</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock', window );">Schedule of deferred tax assets and liabilities</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;min-height:0.0pt;margin:0pt;"><span style="font-size:0pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:middle;width:72.6%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:50%;transform:translate(0,-50%);width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:72.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:25.33%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:72.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.24%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.02%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="7" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:72.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:25.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in thousands)</i></p></td></tr><tr><td style="vertical-align:middle;width:72.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Deferred tax assets:&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:middle;width:72.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Inventory valuation</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 11,931</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 11,822</p></td></tr><tr><td style="vertical-align:middle;width:72.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Net operating losses</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 5,647</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 38,816</p></td></tr><tr><td style="vertical-align:middle;width:72.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Credit carry forwards</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 59,988</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 57,810</p></td></tr><tr><td style="vertical-align:middle;width:72.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Warranty and installation accruals</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,862</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 1,730</p></td></tr><tr><td style="vertical-align:middle;width:72.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Share-based compensation</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 5,267</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 4,033</p></td></tr><tr><td style="vertical-align:middle;width:72.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Customer deposits and deferred revenue</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 24,504</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 9,908</p></td></tr><tr><td style="vertical-align:middle;width:72.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Operating leases</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 8,349</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 8,464</p></td></tr><tr><td style="vertical-align:middle;width:72.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Research and experimental ("R&amp;E") capitalization</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 19,071</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:middle;width:72.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Other</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 6,553</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 5,880</p></td></tr><tr><td style="vertical-align:middle;width:72.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Total deferred tax assets</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 143,172</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 138,463</p></td></tr><tr><td style="vertical-align:middle;width:72.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Valuation allowance</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (11,083)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (116,054)</p></td></tr><tr><td style="vertical-align:middle;width:72.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Net deferred tax assets</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 132,089</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 22,409</p></td></tr><tr><td style="vertical-align:middle;width:72.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:middle;width:72.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Deferred tax liabilities:&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:middle;width:72.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Purchased intangible assets</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 8,724</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 6,633</p></td></tr><tr><td style="vertical-align:middle;width:72.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Convertible Senior Notes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (39)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 10,018</p></td></tr><tr><td style="vertical-align:middle;width:72.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Operating leases</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 5,994</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 6,539</p></td></tr><tr><td style="vertical-align:middle;width:72.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Depreciation</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 2,346</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 2,372</p></td></tr><tr><td style="vertical-align:middle;width:72.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Total deferred tax liabilities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 17,025</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 25,562</p></td></tr><tr><td style="vertical-align:middle;width:72.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Net deferred taxes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.95%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"> 115,064</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.74%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (3,153)</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_SummaryOfIncomeTaxContingenciesTextBlock', window );">Schedule of reconciliation of beginning and ending amount of uncertain tax positions</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;min-height:0.0pt;margin:0pt;"><span style="font-size:0pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:64.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:64.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:33.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:64.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.78%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.78%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.81%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="10" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:64.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:33.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:64.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Balance at beginning of year</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 12,761</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 12,363</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 12,369</p></td></tr><tr><td style="vertical-align:bottom;width:64.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Additions for tax positions related to current year</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 4,180</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 2,642</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 1,217</p></td></tr><tr><td style="vertical-align:bottom;width:64.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Additions for tax positions related to prior years</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 50</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 47</p></td></tr><tr><td style="vertical-align:bottom;width:64.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Reductions for tax positions related to prior years</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (731)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (1,196)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (1,166)</p></td></tr><tr><td style="vertical-align:bottom;width:64.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Reductions due to the lapse of the statute of limitations</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;width:64.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Settlements</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (100)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (1,098)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (104)</p></td></tr><tr><td style="vertical-align:bottom;width:64.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Balance at end of year</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 16,110</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 12,761</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.52%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 12,363</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxDisclosureAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeTaxDisclosureAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of the components of income tax expense attributable to continuing operations for each year presented including, but not limited to: current tax expense (benefit), deferred tax expense (benefit), investment tax credits, government grants, the benefits of operating loss carryforwards, tax expense that results from allocating certain tax benefits either directly to contributed capital or to reduce goodwill or other noncurrent intangible assets of an acquired entity, adjustments of a deferred tax liability or asset for enacted changes in tax laws or rates or a change in the tax status of the entity, and adjustments of the beginning-of-the-year balances of a valuation allowance because of a change in circumstances that causes a change in judgment about the realizability of the related deferred tax asset in future years.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 9<br> -URI https://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32639-109319<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of the components of net deferred tax asset or liability recognized in an entity's statement of financial position, including the following: the total of all deferred tax liabilities, the total of all deferred tax assets, the total valuation allowance recognized for deferred tax assets.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -URI https://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32537-109319<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfEffectiveIncomeTaxRateReconciliationTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of the reconciliation using percentage or dollar amounts of the reported amount of income tax expense attributable to continuing operations for the year to the amount of income tax expense that would result from applying domestic federal statutory tax rates to pretax income from continuing operations.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 12<br> -URI https://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32687-109319<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfEffectiveIncomeTaxRateReconciliationTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfIncomeBeforeIncomeTaxDomesticAndForeignTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of income before income tax between domestic and foreign jurisdictions.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(h)(1)(Note 1))<br> -URI https://asc.fasb.org/extlink&amp;oid=120395691&amp;loc=d3e23780-122690<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfIncomeBeforeIncomeTaxDomesticAndForeignTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SummaryOfIncomeTaxContingenciesTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure for tax positions taken in the tax returns filed or to be filed for which it is more likely than not that the tax position will not be sustained upon examination by taxing authorities and other income tax contingencies. Includes, but is not limited to, interest and penalties, reconciliation of unrecognized tax benefits, unrecognized tax benefits that would affect the effective tax rate, tax years that remain subject to examination by tax jurisdictions, and information about positions for which it is reasonably possible that amounts unrecognized will significantly change within 12 months.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 15A<br> -URI https://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=SL6600010-109319<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 15<br> -Subparagraph (d)<br> -URI https://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32718-109319<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 19<br> -URI https://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32840-109319<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SummaryOfIncomeTaxContingenciesTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
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<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575678261936">
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<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Segment Reporting and Geographic Information (Tables)<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2022</div></th></tr>
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<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_SegmentReportingAbstract', window );"><strong>Segment Reporting and Geographic Information</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ScheduleOfEntityWideInformationRevenueFromExternalCustomersByProductsAndServicesTextBlock', window );">Schedule of sales by end-market</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;min-height:0.0pt;margin:0pt;"><span style="font-size:0pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80.72%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:60.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:60.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:37.01%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">For&#160;the year ended December&#160;31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:60.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.97%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.97%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.97%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="10" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:60.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:37.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:60.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Sales by end-market</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"><span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:60.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Semiconductor</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 369,369</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 247,051</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 165,909</p></td></tr><tr><td style="vertical-align:bottom;width:60.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Compound Semiconductor</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 121,194</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 106,972</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 107,922</p></td></tr><tr><td style="vertical-align:bottom;width:60.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Data Storage</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 87,544</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 168,760</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 123,288</p></td></tr><tr><td style="vertical-align:bottom;width:60.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;">Scientific &amp; Other</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.7%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 68,030</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.7%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 60,494</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.7%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 57,044</p></td></tr><tr><td style="vertical-align:bottom;width:60.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.7%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 646,137</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.7%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 583,277</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.7%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 454,163</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><span></span>
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<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsByGeographicalAreasTableTextBlock', window );">Schedule of sales by geographic region</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:38.26%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.97%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:38.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:30.19%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Net&#160;Sales&#160;to&#160;Unaffiliated Customers</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:28.24%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Long-lived&#160;Tangible&#160;Assets</b></p></td></tr><tr><td style="vertical-align:bottom;width:38.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.97%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.98%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.01%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="19" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:38.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="17" style="vertical-align:bottom;white-space:nowrap;width:60.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><i style="font-style:italic;">(in&#160;thousands)</i></p></td></tr><tr><td style="vertical-align:bottom;width:38.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">United States</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 197,433</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 217,209</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 145,353</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 106,550</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 99,220</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 64,967</p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:38.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">EMEA<sup style="font-family:'Calibri','Helvetica','sans-serif';font-size:8.25pt;line-height:100%;top:0pt;vertical-align:top;">(1)</sup></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 87,837</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 55,129</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 73,124</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 60</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 94</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 120</p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:38.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">China</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 123,703</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 105,998</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 57,589</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 70</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 67</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.97%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 84</p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:38.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Rest of APAC</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 235,735</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 204,633</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 177,569</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 601</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 362</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 100</p></td></tr><tr><td style="vertical-align:bottom;width:38.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Rest of World</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,429</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 308</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 528</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.97%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;width:38.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Total </p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 646,137</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 583,277</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 454,163</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 107,281</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.9%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 99,743</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"><span style="font-size:10pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.97%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 65,271</p></td></tr></table><div style="font-family:'Times New Roman','Times','serif';font-size:9.0pt;margin-bottom:0pt;margin-top:0pt;min-height:1.19em;position:relative;width:100%;"><div style="background-color:#000000;height:1pt;position:relative;top:0.6em;width:25.0%;border:none;margin:0 auto 0 0;"/></div><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:9pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(1)</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:9pt;font-style:normal;font-weight:normal;">EMEA consists of Europe, the Middle East, and Africa</span></td></tr></table><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfEntityWideInformationRevenueFromExternalCustomersByProductsAndServicesTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of entity-wide revenues from external customers for each product or service or each group of similar products or services if the information is not provided as part of the reportable operating segment information.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 40<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e9031-108599<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfEntityWideInformationRevenueFromExternalCustomersByProductsAndServicesTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsByGeographicalAreasTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of information concerning material long-lived assets (excluding financial instruments, customer relationships with financial institutions, mortgage and other servicing rights, deferred policy acquisition costs, and deferred taxes assets) located in identified geographic areas and/or the amount of revenue from external customers attributed to that country from which revenue is material. An entity may also provide subtotals of geographic information about groups of countries.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 41<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e9038-108599<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03.1)<br> -URI https://asc.fasb.org/extlink&amp;oid=126953954&amp;loc=SL114868664-224227<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsByGeographicalAreasTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SegmentReportingAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SegmentReportingAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>54
<FILENAME>R41.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575597031728">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Significant Accounting Policies - Description of Business and Basis of Presentation (Details) - segment<br></strong></div></th>
<th class="th" colspan="4">3 Months Ended</th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Sep. 30, 2022</div></th>
<th class="th"><div>Jun. 30, 2022</div></th>
<th class="th"><div>Mar. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2022</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract', window );"><strong>Significant Accounting Policies</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_NumberOfOperatingSegments', window );">Number of operating segments</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">1<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FiscalPeriodDuration', window );">Fiscal period duration (in days)</a></td>
<td class="text">91 days<span></span>
</td>
<td class="text">91 days<span></span>
</td>
<td class="text">91 days<span></span>
</td>
<td class="text">91 days<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FiscalPeriodDuration">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Duration of a fiscal period, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days. Includes, but not limited to, weeks in a year or quarter.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FiscalPeriodDuration</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NumberOfOperatingSegments">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Number of operating segments. An operating segment is a component of an enterprise: (a) that engages in business activities from which it may earn revenues and incur expenses (including revenues and expenses relating to transactions with other components of the same enterprise), (b) whose operating results are regularly reviewed by the enterprise's chief operating decision maker to make decisions about resources to be allocated to the segment and assess its performance, and (c) for which discrete financial information is available. An operating segment may engage in business activities for which it has yet to earn revenues, for example, start-up operations may be operating segments before earning revenues.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 18<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8672-108599<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NumberOfOperatingSegments</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:integerItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>55
<FILENAME>R42.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575597672128">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Significant Accounting Policies - Revenue Recognition (Details)<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2022</div></th></tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract', window );"><strong>Significant Accounting Policies</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_RevenuePracticalExpedientIncrementalCostOfObtainingContract', window );">Revenue, practical expedient, incremental cost of obtaining contract</a></td>
<td class="text">true<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RevenuePracticalExpedientIncrementalCostOfObtainingContract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Indicates (true false) whether practical expedient was elected to recognize incremental cost of obtaining contract as expense when incurred if amortization period would have been one year or less.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 340<br> -SubTopic 40<br> -Section 50<br> -Paragraph 5<br> -URI https://asc.fasb.org/extlink&amp;oid=126905575&amp;loc=SL51790836-203054<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 50<br> -Paragraph 22<br> -URI https://asc.fasb.org/extlink&amp;oid=126920106&amp;loc=SL49130569-203045<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RevenuePracticalExpedientIncrementalCostOfObtainingContract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:booleanItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>56
<FILENAME>R43.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575597595456">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Significant Accounting Policies - Warranty Costs (Details)<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2022</div></th></tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract', window );"><strong>Significant Accounting Policies</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_ProductWarrantyPeriod', window );">Warranty period</a></td>
<td class="text">1 year<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_ProductWarrantyPeriod">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Represents the warranty period from the date of final acceptance on the products purchased by customers.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_ProductWarrantyPeriod</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>57
<FILENAME>R44.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575597804032">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Significant Accounting Policies - Advertising Expense (Details) - USD ($)<br> $ in Millions</strong></div></th>
<th class="th" colspan="3">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract', window );"><strong>Significant Accounting Policies</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AdvertisingExpense', window );">Advertising expense</a></td>
<td class="nump">$ 0.3<span></span>
</td>
<td class="nump">$ 0.3<span></span>
</td>
<td class="nump">$ 0.4<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AdvertisingExpense">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount charged to advertising expense for the period, which are expenses incurred with the objective of increasing revenue for a specified brand, product or product line.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 720<br> -SubTopic 35<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=6420018&amp;loc=d3e36677-107848<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AdvertisingExpense</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>58
<FILENAME>R45.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575597717632">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Significant Accounting Policies - Accounting for Share-Based Compensation (Details)<br></strong></div></th>
<th class="th">
<div>Dec. 31, 2022 </div>
<div>item</div>
</th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract', window );"><strong>Significant Accounting Policies</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardServiceConditionsAndGradedVestingNumberOfAwards', window );">Number of awards with which entity has elected to treat awards with only service conditions and with graded vesting</a></td>
<td class="nump">1<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardServiceConditionsAndGradedVestingNumberOfAwards">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Number of awards with which entity has elected to treat awards with only service conditions and with graded vesting.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardServiceConditionsAndGradedVestingNumberOfAwards</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:integerItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>59
<FILENAME>R46.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575594152576">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Significant Accounting Policies - Concentration of Credit Risk (Details) - USD ($)<br> $ in Millions</strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
<th class="th" colspan="1"></th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract', window );"><strong>Significant Accounting Policies</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent', window );">Allowance for doubtful accounts receivable</a></td>
<td class="nump">$ 0.7<span></span>
</td>
<td class="nump">$ 0.7<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_IrrevocableLettersOfCreditMaturityPeriodMinimum', window );">Maturity period of irrevocable letters of credit, minimum</a></td>
<td class="text">0 days<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_IrrevocableLettersOfCreditMaturityPeriodMaximum', window );">Maturity period of irrevocable letters of credit, maximum</a></td>
<td class="text">90 days<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of allowance for credit loss on accounts receivable, classified as current.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 310<br> -SubTopic 10<br> -Section 50<br> -Paragraph 4<br> -URI https://asc.fasb.org/extlink&amp;oid=123577603&amp;loc=d3e5074-111524<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 326<br> -SubTopic 20<br> -Section 45<br> -Paragraph 1<br> -URI https://asc.fasb.org/extlink&amp;oid=124255206&amp;loc=SL82895884-210446<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(4))<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_IrrevocableLettersOfCreditMaturityPeriodMaximum">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Represents the maximum period over which irrevocable letters of credit mature.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_IrrevocableLettersOfCreditMaturityPeriodMaximum</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_IrrevocableLettersOfCreditMaturityPeriodMinimum">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Represents the minimum period over which irrevocable letters of credit mature.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_IrrevocableLettersOfCreditMaturityPeriodMinimum</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>60
<FILENAME>R47.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575599591696">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Significant Accounting Policies - Cash, Cash Equivalents, and Short-term Investments (Details) - USD ($)<br> $ in Millions</strong></div></th>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract', window );"><strong>Significant Accounting Policies</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_CashEquivalentsAtCarryingValue', window );">Cash equivalents</a></td>
<td class="nump">$ 61.5<span></span>
</td>
<td class="nump">$ 41.7<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_CashAndCashEquivalentsMaintainedOutsideBySubsidiariesAsPercent', window );">Cash and cash equivalents maintained outside the United States (as a percent)</a></td>
<td class="nump">18.00%<span></span>
</td>
<td class="nump">32.00%<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CashEquivalentsAtCarryingValue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates. Excludes cash and cash equivalents within disposal group and discontinued operation.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(1))<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CashEquivalentsAtCarryingValue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_CashAndCashEquivalentsMaintainedOutsideBySubsidiariesAsPercent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Represents the percentage of cash and cash equivalents maintained outside of the United States by subsidiaries.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_CashAndCashEquivalentsMaintainedOutsideBySubsidiariesAsPercent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>61
<FILENAME>R48.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575597890288">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Significant Accounting Policies - Goodwill and Indefinite-Lived Intangibles (Details)<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2022</div></th></tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract', window );"><strong>Significant Accounting Policies</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_NumberOfTradingDaysConsideredToCalculateMarketCapitalization', window );">Number of trading days used in adjusted market capitalization calculation</a></td>
<td class="text">10 days<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_NumberOfTradingDaysConsideredToCalculateMarketCapitalization">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Number of trading days for calculating the average share price of the Company's common stock prior to the measurement date used in adjusted market capitalization calculation.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_NumberOfTradingDaysConsideredToCalculateMarketCapitalization</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>62
<FILENAME>R49.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575596314800">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Significant Accounting Policies - Recently Adopted Accounting Standards (Details) - USD ($)<br> $ / shares in Units, $ in Thousands</strong></div></th>
<th class="th" colspan="1"></th>
<th class="th" colspan="3">12 Months Ended</th>
<th class="th" colspan="1"></th>
</tr>
<tr>
<th class="th"><div>Jan. 01, 2022</div></th>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
<th class="th"><div>Apr. 01, 2020</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_BalanceSheetLineItemAbstract', window );"><strong>Balance Sheet line item:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LongTermDebtNoncurrent', window );">Long-term debt</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 254,491<span></span>
</td>
<td class="nump">$ 229,438<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AdditionalPaidInCapitalCommonStock', window );">Additional paid-in capital</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">1,078,180<span></span>
</td>
<td class="nump">1,116,921<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_RetainedEarningsAccumulatedDeficit', window );">Accumulated deficit</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="num">$ (501,801)<span></span>
</td>
<td class="num">$ (681,283)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_EarningsPerShareDisclosureAbstract', window );"><strong>Income per common share:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_EarningsPerShareBasic', window );">Basic income per common share (in dollars per share)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 3.35<span></span>
</td>
<td class="nump">$ 0.53<span></span>
</td>
<td class="num">$ (0.17)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_EarningsPerShareDiluted', window );">Diluted earnings per share (in dollars per share)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">2.71<span></span>
</td>
<td class="nump">$ 0.49<span></span>
</td>
<td class="num">$ (0.17)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AdjustmentsForNewAccountingPronouncementsAxis=us-gaap_AccountingStandardsUpdate201912Member', window );">ASU 2019-12, Simplifying the Accounting for Income Taxes</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_NewAccountingPronouncementsOrChangeInAccountingPrincipleLineItems', window );"><strong>Accounting Changes</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ChangeInAccountingPrincipleAccountingStandardsUpdateAdopted', window );">Change in Accounting Principle, Accounting Standards Update, Adopted</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">true<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AdjustmentsForNewAccountingPronouncementsAxis=us-gaap_AccountingStandardsUpdate202006Member', window );">ASU 2020-06: Debt</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_NewAccountingPronouncementsOrChangeInAccountingPrincipleLineItems', window );"><strong>Accounting Changes</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ChangeInAccountingPrincipleAccountingStandardsUpdateAdopted', window );">Change in Accounting Principle, Accounting Standards Update, Adopted</a></td>
<td class="text">true<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ChangeInAccountingPrincipleAccountingStandardsUpdateTransitionOptionElectedExtensibleList', window );">Change in Accounting Principle, Accounting Standards Update, Transition Option Elected</a></td>
<td class="text">us-gaap:AccountingStandardsUpdate201602CumulativeEffectPeriodOfAdoptionMember<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AdjustmentsForNewAccountingPronouncementsAxis=us-gaap_AccountingStandardsUpdate202006Member', window );">ASU 2020-06: Debt | Cumulative Effect, Period of Adoption, Adjustment</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_BalanceSheetLineItemAbstract', window );"><strong>Balance Sheet line item:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LongTermDebtNoncurrent', window );">Long-term debt</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 44,260<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AdditionalPaidInCapitalCommonStock', window );">Additional paid-in capital</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(56,800)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_RetainedEarningsAccumulatedDeficit', window );">Accumulated deficit</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">12,540<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AdjustmentsForNewAccountingPronouncementsAxis=us-gaap_AccountingStandardsUpdate202006Member', window );">ASU 2020-06: Debt | Cumulative Effect, Period of Adoption, Adjusted Balance</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_BalanceSheetLineItemAbstract', window );"><strong>Balance Sheet line item:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LongTermDebtNoncurrent', window );">Long-term debt</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">273,698<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AdditionalPaidInCapitalCommonStock', window );">Additional paid-in capital</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">1,060,121<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_RetainedEarningsAccumulatedDeficit', window );">Accumulated deficit</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">$ (668,743)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_EarningsPerShareDisclosureAbstract', window );"><strong>Income per common share:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_EarningsPerShareBasic', window );">Basic income per common share (in dollars per share)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">3.35<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_EarningsPerShareDiluted', window );">Diluted earnings per share (in dollars per share)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">2.71<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_srt_StatementScenarioAxis=veco_CalculatedUnderGuidanceInEffectBeforeAdoptionOfAccountingStandardsUpdate202006Member', window );">Under legacy accounting</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_EarningsPerShareDisclosureAbstract', window );"><strong>Income per common share:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_EarningsPerShareBasic', window );">Basic income per common share (in dollars per share)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">3.15<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_EarningsPerShareDiluted', window );">Diluted earnings per share (in dollars per share)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">2.91<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_srt_StatementScenarioAxis=veco_DifferenceBetweenGuidanceInEffectBeforeAndAfterAccountingStandardsUpdate202006Member', window );">Difference between adoption of ASU 2020-06 and legacy accounting | ASU 2020-06: Debt</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_EarningsPerShareDisclosureAbstract', window );"><strong>Income per common share:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_EarningsPerShareBasic', window );">Basic income per common share (in dollars per share)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">0.20<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_EarningsPerShareDiluted', window );">Diluted earnings per share (in dollars per share)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="num">$ (0.20)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AdditionalPaidInCapitalCommonStock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Value received from shareholders in common stock-related transactions that are in excess of par value or stated value and amounts received from other stock-related transactions. Includes only common stock transactions (excludes preferred stock transactions). May be called contributed capital, capital in excess of par, capital surplus, or paid-in capital.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(30)(a)(1))<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AdditionalPaidInCapitalCommonStock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ChangeInAccountingPrincipleAccountingStandardsUpdateAdopted">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Indicates (true false) whether accounting standards update was adopted.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22499-107794<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 10<br> -Section 65<br> -Paragraph 5<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=128293352&amp;loc=SL126838806-209984<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 815<br> -SubTopic 20<br> -Section 65<br> -Paragraph 5<br> -URI https://asc.fasb.org/extlink&amp;oid=121483254&amp;loc=SL120254523-199619<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 10<br> -Section 65<br> -Paragraph 5<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=128293352&amp;loc=SL126838806-209984<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 326<br> -SubTopic 10<br> -Section 65<br> -Paragraph 4<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=122640432&amp;loc=SL121648383-210437<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 10<br> -Section 65<br> -Paragraph 5<br> -Subparagraph (c)<br> -URI https://asc.fasb.org/extlink&amp;oid=128293352&amp;loc=SL126838806-209984<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 310<br> -SubTopic 20<br> -Section 65<br> -Paragraph 2<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=126986314&amp;loc=SL124402458-218513<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 65<br> -Paragraph 8<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=126983759&amp;loc=SL121830611-158277<br><br>Reference 9: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 326<br> -SubTopic 10<br> -Section 65<br> -Paragraph 4<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=122640432&amp;loc=SL121648383-210437<br><br>Reference 10: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 926<br> -SubTopic 20<br> -Section 65<br> -Paragraph 2<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=120154821&amp;loc=SL120154904-197079<br><br>Reference 11: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 926<br> -SubTopic 20<br> -Section 65<br> -Paragraph 2<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=120154821&amp;loc=SL120154904-197079<br><br>Reference 12: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 825<br> -SubTopic 10<br> -Section 65<br> -Paragraph 7<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=126983955&amp;loc=SL122642865-165497<br><br>Reference 13: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 825<br> -SubTopic 10<br> -Section 65<br> -Paragraph 7<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=126983955&amp;loc=SL122642865-165497<br><br>Reference 14: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 825<br> -SubTopic 10<br> -Section 65<br> -Paragraph 5<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=126983955&amp;loc=SL120254526-165497<br><br>Reference 15: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 825<br> -SubTopic 10<br> -Section 65<br> -Paragraph 5<br> -URI https://asc.fasb.org/extlink&amp;oid=126983955&amp;loc=SL120254526-165497<br><br>Reference 16: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 326<br> -SubTopic 10<br> -Section 65<br> -Paragraph 2<br> -URI https://asc.fasb.org/extlink&amp;oid=122640432&amp;loc=SL120254519-210437<br><br>Reference 17: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 10<br> -Section 65<br> -Paragraph 4<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=128293352&amp;loc=SL120154346-209984<br><br>Reference 18: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 848<br> -SubTopic 10<br> -Section 65<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=125980421&amp;loc=SL122150809-237846<br><br>Reference 19: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 310<br> -SubTopic 20<br> -Section 65<br> -Paragraph 2<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=126986314&amp;loc=SL124402458-218513<br><br>Reference 20: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 805<br> -SubTopic 20<br> -Section 65<br> -Paragraph 3<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=128092918&amp;loc=SL128093175-196984<br><br>Reference 21: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 40<br> -Section 65<br> -Paragraph 2<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=124501264&amp;loc=SL117420844-207641<br><br>Reference 22: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 805<br> -SubTopic 20<br> -Section 65<br> -Paragraph 3<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=128092918&amp;loc=SL128093175-196984<br><br>Reference 23: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 815<br> -SubTopic 40<br> -Section 65<br> -Paragraph 2<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=126732423&amp;loc=SL126732908-238011<br><br>Reference 24: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 815<br> -SubTopic 40<br> -Section 65<br> -Paragraph 1<br> -Subparagraph (a)(1)<br> -URI https://asc.fasb.org/extlink&amp;oid=126732423&amp;loc=SL123482106-238011<br><br>Reference 25: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 825<br> -SubTopic 10<br> -Section 65<br> -Paragraph 6<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=126983955&amp;loc=SL121967933-165497<br><br>Reference 26: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 326<br> -SubTopic 10<br> -Section 65<br> -Paragraph 3<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=122640432&amp;loc=SL120320025-210437<br><br>Reference 27: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 105<br> -SubTopic 10<br> -Section 65<br> -Paragraph 6<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=126987489&amp;loc=SL124442142-165695<br><br>Reference 28: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 848<br> -SubTopic 10<br> -Section 65<br> -Paragraph 2<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=125980421&amp;loc=SL125981372-237846<br><br>Reference 29: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 825<br> -SubTopic 10<br> -Section 65<br> -Paragraph 6<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=126983955&amp;loc=SL121967933-165497<br><br>Reference 30: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 326<br> -SubTopic 10<br> -Section 65<br> -Paragraph 3<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=122640432&amp;loc=SL120320025-210437<br><br>Reference 31: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 105<br> -SubTopic 10<br> -Section 65<br> -Paragraph 6<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=126987489&amp;loc=SL124442142-165695<br><br>Reference 32: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 40<br> -Section 65<br> -Paragraph 2<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=124501264&amp;loc=SL117420844-207641<br><br>Reference 33: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 815<br> -SubTopic 40<br> -Section 65<br> -Paragraph 1<br> -Subparagraph (a)(2)<br> -URI https://asc.fasb.org/extlink&amp;oid=126732423&amp;loc=SL123482106-238011<br><br>Reference 34: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 832<br> -SubTopic 10<br> -Section 65<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=128342835&amp;loc=SL128342857-244232<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ChangeInAccountingPrincipleAccountingStandardsUpdateAdopted</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:booleanItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ChangeInAccountingPrincipleAccountingStandardsUpdateTransitionOptionElectedExtensibleList">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Indicates transition method applied for adoption of amendment to accounting standards.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 65<br> -Paragraph 8<br> -Subparagraph (d)(3)<br> -URI https://asc.fasb.org/extlink&amp;oid=126983759&amp;loc=SL121830611-158277<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 848<br> -SubTopic 10<br> -Section 65<br> -Paragraph 2<br> -Subparagraph (a)(1)<br> -URI https://asc.fasb.org/extlink&amp;oid=125980421&amp;loc=SL125981372-237846<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 10<br> -Section 65<br> -Paragraph 5<br> -Subparagraph (f)(2)<br> -URI https://asc.fasb.org/extlink&amp;oid=128293352&amp;loc=SL126838806-209984<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 105<br> -SubTopic 10<br> -Section 65<br> -Paragraph 6<br> -Subparagraph (c)<br> -URI https://asc.fasb.org/extlink&amp;oid=126987489&amp;loc=SL124442142-165695<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 832<br> -SubTopic 10<br> -Section 65<br> -Paragraph 1<br> -Subparagraph (c)<br> -URI https://asc.fasb.org/extlink&amp;oid=128342835&amp;loc=SL128342857-244232<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 10<br> -Section 65<br> -Paragraph 5<br> -Subparagraph (d)(1)<br> -URI https://asc.fasb.org/extlink&amp;oid=128293352&amp;loc=SL126838806-209984<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 10<br> -Section 65<br> -Paragraph 5<br> -Subparagraph (d)(2)<br> -URI https://asc.fasb.org/extlink&amp;oid=128293352&amp;loc=SL126838806-209984<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 105<br> -SubTopic 10<br> -Section 65<br> -Paragraph 6<br> -Subparagraph (d)<br> -URI https://asc.fasb.org/extlink&amp;oid=126987489&amp;loc=SL124442142-165695<br><br>Reference 9: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 40<br> -Section 65<br> -Paragraph 2<br> -Subparagraph (e)<br> -URI https://asc.fasb.org/extlink&amp;oid=124501264&amp;loc=SL117420844-207641<br><br>Reference 10: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 40<br> -Section 65<br> -Paragraph 3<br> -Subparagraph (d)(2)<br> -URI https://asc.fasb.org/extlink&amp;oid=120431994&amp;loc=SL118172731-207502<br><br>Reference 11: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 10<br> -Section 65<br> -Paragraph 4<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=128293352&amp;loc=SL120154346-209984<br><br>Reference 12: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 40<br> -Section 65<br> -Paragraph 3<br> -Subparagraph (d)(1)<br> -URI https://asc.fasb.org/extlink&amp;oid=120431994&amp;loc=SL118172731-207502<br><br>Reference 13: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 10<br> -Section 65<br> -Paragraph 1<br> -Subparagraph (c)(1)<br> -URI https://asc.fasb.org/extlink&amp;oid=128293352&amp;loc=SL77916155-209984<br><br>Reference 14: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 10<br> -Section 65<br> -Paragraph 3<br> -Subparagraph (c)(2)<br> -URI https://asc.fasb.org/extlink&amp;oid=128293352&amp;loc=SL119206272-209984<br><br>Reference 15: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 10<br> -Section 65<br> -Paragraph 1<br> -Subparagraph (c)(2)<br> -URI https://asc.fasb.org/extlink&amp;oid=128293352&amp;loc=SL77916155-209984<br><br>Reference 16: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 10<br> -Section 65<br> -Paragraph 3<br> -Subparagraph (c)(1)<br> -URI https://asc.fasb.org/extlink&amp;oid=128293352&amp;loc=SL119206272-209984<br><br>Reference 17: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 40<br> -Section 65<br> -Paragraph 2<br> -Subparagraph (k)<br> -URI https://asc.fasb.org/extlink&amp;oid=124501264&amp;loc=SL117420844-207641<br><br>Reference 18: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 815<br> -SubTopic 40<br> -Section 65<br> -Paragraph 1<br> -Subparagraph (e)(2)<br> -URI https://asc.fasb.org/extlink&amp;oid=126732423&amp;loc=SL123482106-238011<br><br>Reference 19: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 815<br> -SubTopic 40<br> -Section 65<br> -Paragraph 1<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=126732423&amp;loc=SL123482106-238011<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ChangeInAccountingPrincipleAccountingStandardsUpdateTransitionOptionElectedExtensibleList</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>enum2:enumerationSetItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EarningsPerShareBasic">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The amount of net income (loss) for the period per each share of common stock or unit outstanding during the reporting period.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 815<br> -SubTopic 40<br> -Section 65<br> -Paragraph 1<br> -Subparagraph (e)(4)<br> -URI https://asc.fasb.org/extlink&amp;oid=126732423&amp;loc=SL123482106-238011<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -URI https://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22583-107794<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 11<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22694-107794<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 10<br> -URI https://asc.fasb.org/extlink&amp;oid=126958026&amp;loc=d3e1448-109256<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 4<br> -URI https://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22595-107794<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 11<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22694-107794<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 7<br> -URI https://asc.fasb.org/extlink&amp;oid=126958026&amp;loc=d3e1337-109256<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 815<br> -SubTopic 40<br> -Section 65<br> -Paragraph 1<br> -Subparagraph (f)<br> -URI https://asc.fasb.org/extlink&amp;oid=126732423&amp;loc=SL123482106-238011<br><br>Reference 9: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 55<br> -Paragraph 52<br> -URI https://asc.fasb.org/extlink&amp;oid=128363288&amp;loc=d3e4984-109258<br><br>Reference 10: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 220<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-04(23))<br> -URI https://asc.fasb.org/extlink&amp;oid=120400993&amp;loc=SL114874131-224263<br><br>Reference 11: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 55<br> -Paragraph 15<br> -URI https://asc.fasb.org/extlink&amp;oid=128363288&amp;loc=d3e3842-109258<br><br>Reference 12: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 7<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22644-107794<br><br>Reference 13: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=124432515&amp;loc=d3e3550-109257<br><br>Reference 14: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03(25))<br> -URI https://asc.fasb.org/extlink&amp;oid=126953954&amp;loc=SL114868664-224227<br><br>Reference 15: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 2<br> -URI https://asc.fasb.org/extlink&amp;oid=126958026&amp;loc=d3e1252-109256<br><br>Reference 16: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 60B<br> -Subparagraph (d)<br> -URI https://asc.fasb.org/extlink&amp;oid=126958026&amp;loc=SL5780133-109256<br><br>Reference 17: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 220<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-04(27))<br> -URI https://asc.fasb.org/extlink&amp;oid=120399700&amp;loc=SL114874048-224260<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EarningsPerShareBasic</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EarningsPerShareDiluted">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The amount of net income (loss) for the period available to each share of common stock or common unit outstanding during the reporting period and to each share or unit that would have been outstanding assuming the issuance of common shares or units for all dilutive potential common shares or units outstanding during the reporting period.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 55<br> -Paragraph 52<br> -URI https://asc.fasb.org/extlink&amp;oid=128363288&amp;loc=d3e4984-109258<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 7<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22644-107794<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 55<br> -Paragraph 15<br> -URI https://asc.fasb.org/extlink&amp;oid=128363288&amp;loc=d3e3842-109258<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 2<br> -URI https://asc.fasb.org/extlink&amp;oid=126958026&amp;loc=d3e1252-109256<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 11<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22694-107794<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 4<br> -URI https://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22595-107794<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -URI https://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22583-107794<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 60B<br> -Subparagraph (d)<br> -URI https://asc.fasb.org/extlink&amp;oid=126958026&amp;loc=SL5780133-109256<br><br>Reference 9: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 815<br> -SubTopic 40<br> -Section 65<br> -Paragraph 1<br> -Subparagraph (f)<br> -URI https://asc.fasb.org/extlink&amp;oid=126732423&amp;loc=SL123482106-238011<br><br>Reference 10: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 220<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-04(27))<br> -URI https://asc.fasb.org/extlink&amp;oid=120399700&amp;loc=SL114874048-224260<br><br>Reference 11: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=124432515&amp;loc=d3e3550-109257<br><br>Reference 12: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 220<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-04(23))<br> -URI https://asc.fasb.org/extlink&amp;oid=120400993&amp;loc=SL114874131-224263<br><br>Reference 13: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 11<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22694-107794<br><br>Reference 14: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 7<br> -URI https://asc.fasb.org/extlink&amp;oid=126958026&amp;loc=d3e1337-109256<br><br>Reference 15: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 815<br> -SubTopic 40<br> -Section 65<br> -Paragraph 1<br> -Subparagraph (e)(4)<br> -URI https://asc.fasb.org/extlink&amp;oid=126732423&amp;loc=SL123482106-238011<br><br>Reference 16: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03(25))<br> -URI https://asc.fasb.org/extlink&amp;oid=126953954&amp;loc=SL114868664-224227<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EarningsPerShareDiluted</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LongTermDebtNoncurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount, excluding unamortized premium (discount) and debt issuance cost, of long-term debt classified as noncurrent. Excludes lease obligation.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(22))<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LongTermDebtNoncurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NewAccountingPronouncementsOrChangeInAccountingPrincipleLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NewAccountingPronouncementsOrChangeInAccountingPrincipleLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RetainedEarningsAccumulatedDeficit">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The cumulative amount of the reporting entity's undistributed earnings or deficit.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(30)(a)(3))<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 2: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 852<br> -SubTopic 10<br> -Section 55<br> -Paragraph 10<br> -URI https://asc.fasb.org/extlink&amp;oid=84165509&amp;loc=d3e56426-112766<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 210<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-03(a)(23)(a)(4))<br> -URI https://asc.fasb.org/extlink&amp;oid=126734703&amp;loc=d3e572229-122910<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 40<br> -Section 65<br> -Paragraph 2<br> -Subparagraph (h)(2)<br> -URI https://asc.fasb.org/extlink&amp;oid=124501264&amp;loc=SL117420844-207641<br><br>Reference 5: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.3-04)<br> -URI https://asc.fasb.org/extlink&amp;oid=120397183&amp;loc=d3e187085-122770<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 40<br> -Section 65<br> -Paragraph 2<br> -Subparagraph (g)(2)(i)<br> -URI https://asc.fasb.org/extlink&amp;oid=124501264&amp;loc=SL117420844-207641<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RetainedEarningsAccumulatedDeficit</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_BalanceSheetLineItemAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_BalanceSheetLineItemAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_EarningsPerShareDisclosureAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_EarningsPerShareDisclosureAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AdjustmentsForNewAccountingPronouncementsAxis=us-gaap_AccountingStandardsUpdate201912Member">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AdjustmentsForNewAccountingPronouncementsAxis=us-gaap_AccountingStandardsUpdate201912Member</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AdjustmentsForNewAccountingPronouncementsAxis=us-gaap_AccountingStandardsUpdate202006Member">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AdjustmentsForNewAccountingPronouncementsAxis=us-gaap_AccountingStandardsUpdate202006Member</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_CumulativeEffectPeriodOfAdoptionAxis=srt_CumulativeEffectPeriodOfAdoptionAdjustmentMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_CumulativeEffectPeriodOfAdoptionAxis=srt_CumulativeEffectPeriodOfAdoptionAdjustmentMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_CumulativeEffectPeriodOfAdoptionAxis=srt_CumulativeEffectPeriodOfAdoptionAdjustedBalanceMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_CumulativeEffectPeriodOfAdoptionAxis=srt_CumulativeEffectPeriodOfAdoptionAdjustedBalanceMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_StatementScenarioAxis=veco_CalculatedUnderGuidanceInEffectBeforeAdoptionOfAccountingStandardsUpdate202006Member">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_StatementScenarioAxis=veco_CalculatedUnderGuidanceInEffectBeforeAdoptionOfAccountingStandardsUpdate202006Member</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_StatementScenarioAxis=veco_DifferenceBetweenGuidanceInEffectBeforeAndAfterAccountingStandardsUpdate202006Member">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_StatementScenarioAxis=veco_DifferenceBetweenGuidanceInEffectBeforeAndAfterAccountingStandardsUpdate202006Member</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>63
<FILENAME>R50.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575600239616">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Income Per Common Share - Basic and Diluted (Details) - USD ($)<br> $ / shares in Units, shares in Thousands, $ in Thousands</strong></div></th>
<th class="th" colspan="3">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_NetIncomeLossAvailableToCommonStockholdersAbstract', window );"><strong>Numerator:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic', window );">Net income</a></td>
<td class="nump">$ 166,942<span></span>
</td>
<td class="nump">$ 26,038<span></span>
</td>
<td class="num">$ (8,391)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_InterestOnConvertibleDebtNetOfTax', window );">Interest expense associated with convertible notes</a></td>
<td class="nump">10,832<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_NetIncomeLossAvailableToCommonStockholdersDiluted', window );">Net income available to common shareholders</a></td>
<td class="nump">$ 177,774<span></span>
</td>
<td class="nump">$ 26,038<span></span>
</td>
<td class="num">$ (8,391)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_WeightedAverageNumberOfSharesOutstandingDilutedDisclosureItemsAbstract', window );"><strong>Denominator:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_WeightedAverageNumberOfSharesOutstandingBasic', window );">Basic weighted average shares outstanding</a></td>
<td class="nump">49,906<span></span>
</td>
<td class="nump">49,073<span></span>
</td>
<td class="nump">48,362<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_WeightedAverageNumberDilutedSharesOutstandingAdjustment', window );">Effect of potentially dilutive share-based awards</a></td>
<td class="nump">734<span></span>
</td>
<td class="nump">1,090<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncrementalCommonSharesAttributableToConversionOfDebtSecurities', window );">Dilutive effect of convertible notes</a></td>
<td class="nump">14,967<span></span>
</td>
<td class="nump">3,480<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding', window );">Diluted weighted average shares outstanding</a></td>
<td class="nump">65,607<span></span>
</td>
<td class="nump">53,643<span></span>
</td>
<td class="nump">48,362<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_EarningsPerShareDisclosureAbstract', window );"><strong>Net income (loss) per common share:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_EarningsPerShareBasic', window );">Basic (in dollars per share)</a></td>
<td class="nump">$ 3.35<span></span>
</td>
<td class="nump">$ 0.53<span></span>
</td>
<td class="num">$ (0.17)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_EarningsPerShareDiluted', window );">Diluted (in dollars per share)</a></td>
<td class="nump">$ 2.71<span></span>
</td>
<td class="nump">$ 0.49<span></span>
</td>
<td class="num">$ (0.17)<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EarningsPerShareBasic">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The amount of net income (loss) for the period per each share of common stock or unit outstanding during the reporting period.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 815<br> -SubTopic 40<br> -Section 65<br> -Paragraph 1<br> -Subparagraph (e)(4)<br> -URI https://asc.fasb.org/extlink&amp;oid=126732423&amp;loc=SL123482106-238011<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -URI https://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22583-107794<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 11<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22694-107794<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 10<br> -URI https://asc.fasb.org/extlink&amp;oid=126958026&amp;loc=d3e1448-109256<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 4<br> -URI https://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22595-107794<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 11<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22694-107794<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 7<br> -URI https://asc.fasb.org/extlink&amp;oid=126958026&amp;loc=d3e1337-109256<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 815<br> -SubTopic 40<br> -Section 65<br> -Paragraph 1<br> -Subparagraph (f)<br> -URI https://asc.fasb.org/extlink&amp;oid=126732423&amp;loc=SL123482106-238011<br><br>Reference 9: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 55<br> -Paragraph 52<br> -URI https://asc.fasb.org/extlink&amp;oid=128363288&amp;loc=d3e4984-109258<br><br>Reference 10: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 220<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-04(23))<br> -URI https://asc.fasb.org/extlink&amp;oid=120400993&amp;loc=SL114874131-224263<br><br>Reference 11: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 55<br> -Paragraph 15<br> -URI https://asc.fasb.org/extlink&amp;oid=128363288&amp;loc=d3e3842-109258<br><br>Reference 12: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 7<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22644-107794<br><br>Reference 13: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=124432515&amp;loc=d3e3550-109257<br><br>Reference 14: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03(25))<br> -URI https://asc.fasb.org/extlink&amp;oid=126953954&amp;loc=SL114868664-224227<br><br>Reference 15: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 2<br> -URI https://asc.fasb.org/extlink&amp;oid=126958026&amp;loc=d3e1252-109256<br><br>Reference 16: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 60B<br> -Subparagraph (d)<br> -URI https://asc.fasb.org/extlink&amp;oid=126958026&amp;loc=SL5780133-109256<br><br>Reference 17: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 220<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-04(27))<br> -URI https://asc.fasb.org/extlink&amp;oid=120399700&amp;loc=SL114874048-224260<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EarningsPerShareBasic</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EarningsPerShareDiluted">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The amount of net income (loss) for the period available to each share of common stock or common unit outstanding during the reporting period and to each share or unit that would have been outstanding assuming the issuance of common shares or units for all dilutive potential common shares or units outstanding during the reporting period.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 55<br> -Paragraph 52<br> -URI https://asc.fasb.org/extlink&amp;oid=128363288&amp;loc=d3e4984-109258<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 7<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22644-107794<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 55<br> -Paragraph 15<br> -URI https://asc.fasb.org/extlink&amp;oid=128363288&amp;loc=d3e3842-109258<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 2<br> -URI https://asc.fasb.org/extlink&amp;oid=126958026&amp;loc=d3e1252-109256<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 11<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22694-107794<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 4<br> -URI https://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22595-107794<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -URI https://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22583-107794<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 60B<br> -Subparagraph (d)<br> -URI https://asc.fasb.org/extlink&amp;oid=126958026&amp;loc=SL5780133-109256<br><br>Reference 9: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 815<br> -SubTopic 40<br> -Section 65<br> -Paragraph 1<br> -Subparagraph (f)<br> -URI https://asc.fasb.org/extlink&amp;oid=126732423&amp;loc=SL123482106-238011<br><br>Reference 10: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 220<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-04(27))<br> -URI https://asc.fasb.org/extlink&amp;oid=120399700&amp;loc=SL114874048-224260<br><br>Reference 11: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=124432515&amp;loc=d3e3550-109257<br><br>Reference 12: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 220<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-04(23))<br> -URI https://asc.fasb.org/extlink&amp;oid=120400993&amp;loc=SL114874131-224263<br><br>Reference 13: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 11<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22694-107794<br><br>Reference 14: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 7<br> -URI https://asc.fasb.org/extlink&amp;oid=126958026&amp;loc=d3e1337-109256<br><br>Reference 15: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 815<br> -SubTopic 40<br> -Section 65<br> -Paragraph 1<br> -Subparagraph (e)(4)<br> -URI https://asc.fasb.org/extlink&amp;oid=126732423&amp;loc=SL123482106-238011<br><br>Reference 16: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03(25))<br> -URI https://asc.fasb.org/extlink&amp;oid=126953954&amp;loc=SL114868664-224227<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EarningsPerShareDiluted</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncrementalCommonSharesAttributableToConversionOfDebtSecurities">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Additional shares included in the calculation of diluted EPS as a result of the potentially dilutive effect of convertible debt securities using the if-converted method.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 40<br> -Subparagraph (c)<br> -URI https://asc.fasb.org/extlink&amp;oid=126958026&amp;loc=d3e1930-109256<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 42<br> -URI https://asc.fasb.org/extlink&amp;oid=126958026&amp;loc=d3e2029-109256<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=124432515&amp;loc=d3e3550-109257<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncrementalCommonSharesAttributableToConversionOfDebtSecurities</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InterestOnConvertibleDebtNetOfTax">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount, after tax, of interest recognized on convertible debt instrument excluding interest on principal required to be paid in cash.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=124432515&amp;loc=d3e3550-109257<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 16<br> -URI https://asc.fasb.org/extlink&amp;oid=126958026&amp;loc=d3e1505-109256<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 40<br> -Subparagraph (b)(1)<br> -URI https://asc.fasb.org/extlink&amp;oid=126958026&amp;loc=d3e1930-109256<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InterestOnConvertibleDebtNetOfTax</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount, after deduction of tax, noncontrolling interests, dividends on preferred stock and participating securities; of income (loss) available to common shareholders.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 4<br> -URI https://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22595-107794<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 10<br> -URI https://asc.fasb.org/extlink&amp;oid=126958026&amp;loc=d3e1448-109256<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 11<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22694-107794<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 11<br> -URI https://asc.fasb.org/extlink&amp;oid=126958026&amp;loc=d3e1377-109256<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=124432515&amp;loc=d3e3550-109257<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 22<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8736-108599<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 11<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22694-107794<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 60B<br> -Subparagraph (c)<br> -URI https://asc.fasb.org/extlink&amp;oid=126958026&amp;loc=SL5780133-109256<br><br>Reference 9: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (f)<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8933-108599<br><br>Reference 10: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 31<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8924-108599<br><br>Reference 11: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 30<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8906-108599<br><br>Reference 12: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -URI https://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22583-107794<br><br>Reference 13: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (c)<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8933-108599<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NetIncomeLossAvailableToCommonStockholdersDiluted">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount, after deduction of tax, noncontrolling interests, dividends on preferred stock and participating securities, and addition from assumption of issuance of common shares for dilutive potential common shares; of income (loss) available to common shareholders.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 40<br> -Subparagraph (b)(2)<br> -URI https://asc.fasb.org/extlink&amp;oid=126958026&amp;loc=d3e1930-109256<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 40<br> -Subparagraph (b)(3)<br> -URI https://asc.fasb.org/extlink&amp;oid=126958026&amp;loc=d3e1930-109256<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 60B<br> -Subparagraph (c)<br> -URI https://asc.fasb.org/extlink&amp;oid=126958026&amp;loc=SL5780133-109256<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=124432515&amp;loc=d3e3550-109257<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 40<br> -Subparagraph (b)(1)<br> -URI https://asc.fasb.org/extlink&amp;oid=126958026&amp;loc=d3e1930-109256<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 16<br> -URI https://asc.fasb.org/extlink&amp;oid=126958026&amp;loc=d3e1505-109256<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 40<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=126958026&amp;loc=d3e1930-109256<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NetIncomeLossAvailableToCommonStockholdersDiluted</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_WeightedAverageNumberDilutedSharesOutstandingAdjustment">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The sum of dilutive potential common shares or units used in the calculation of the diluted per-share or per-unit computation.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=124432515&amp;loc=d3e3550-109257<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_WeightedAverageNumberDilutedSharesOutstandingAdjustment</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The average number of shares or units issued and outstanding that are used in calculating diluted EPS or earnings per unit (EPU), determined based on the timing of issuance of shares or units in the period.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=124432515&amp;loc=d3e3550-109257<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 16<br> -URI https://asc.fasb.org/extlink&amp;oid=126958026&amp;loc=d3e1505-109256<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_WeightedAverageNumberOfSharesOutstandingBasic">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Number of [basic] shares or units, after adjustment for contingently issuable shares or units and other shares or units not deemed outstanding, determined by relating the portion of time within a reporting period that common shares or units have been outstanding to the total time in that period.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=124432515&amp;loc=d3e3550-109257<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 10<br> -URI https://asc.fasb.org/extlink&amp;oid=126958026&amp;loc=d3e1448-109256<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_WeightedAverageNumberOfSharesOutstandingBasic</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_WeightedAverageNumberOfSharesOutstandingDilutedDisclosureItemsAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_WeightedAverageNumberOfSharesOutstandingDilutedDisclosureItemsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_EarningsPerShareDisclosureAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_EarningsPerShareDisclosureAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_NetIncomeLossAvailableToCommonStockholdersAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_NetIncomeLossAvailableToCommonStockholdersAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>64
<FILENAME>R51.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575591321952">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Income Per Common Share - Shares Excluded from EPS (Details) - shares<br> shares in Thousands</strong></div></th>
<th class="th" colspan="3">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_EarningsPerShareBasicOtherDisclosuresAbstract', window );"><strong>Basic income (loss) per share</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_SecuritiesExcludedFromComputationOfBasicEarningsPerShareAmount', window );">Unvested participating shares excluded from basic weighted average shares outstanding since the securityholders are not obligated to fund losses</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">6<span></span>
</td>
<td class="nump">20<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis=veco_CommonStockEquivalentsMember', window );">Common share equivalents</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_EarningsPerShareDilutedOtherDisclosuresAbstract', window );"><strong>Diluted income (loss) per share</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount', window );">Securities excluded from the diluted calculation as their effect would be antidilutive</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">947<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis=veco_PotentiallyDilutiveSharesMember', window );">Potentially dilutive shares</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_EarningsPerShareDilutedOtherDisclosuresAbstract', window );"><strong>Diluted income (loss) per share</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount', window );">Securities excluded from the diluted calculation as their effect would be antidilutive</a></td>
<td class="nump">815<span></span>
</td>
<td class="nump">456<span></span>
</td>
<td class="nump">923<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis=us-gaap_ConvertibleDebtMember', window );">Convertible Notes</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_EarningsPerShareDilutedOtherDisclosuresAbstract', window );"><strong>Diluted income (loss) per share</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount', window );">Securities excluded from the diluted calculation as their effect would be antidilutive</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">8,421<span></span>
</td>
<td class="nump">17,753<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Securities (including those issuable pursuant to contingent stock agreements) that could potentially dilute basic earnings per share (EPS) or earnings per unit (EPU) in the future that were not included in the computation of diluted EPS or EPU because to do so would increase EPS or EPU amounts or decrease loss per share or unit amounts for the period presented.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (c)<br> -URI https://asc.fasb.org/extlink&amp;oid=124432515&amp;loc=d3e3550-109257<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EarningsPerShareBasicOtherDisclosuresAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EarningsPerShareBasicOtherDisclosuresAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EarningsPerShareDilutedOtherDisclosuresAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EarningsPerShareDilutedOtherDisclosuresAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_SecuritiesExcludedFromComputationOfBasicEarningsPerShareAmount">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Securities excluded from the computation of basic net loss per share since securities' holders are not obligated to fund those losses.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_SecuritiesExcludedFromComputationOfBasicEarningsPerShareAmount</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis=veco_CommonStockEquivalentsMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis=veco_CommonStockEquivalentsMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis=veco_PotentiallyDilutiveSharesMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis=veco_PotentiallyDilutiveSharesMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis=us-gaap_ConvertibleDebtMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis=us-gaap_ConvertibleDebtMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>65
<FILENAME>R52.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575596195440">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Fair Value Measurements (Details) - Measured on a recurring basis - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_CashAndCashEquivalentsAbstract', window );"><strong>Cash equivalents</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_CashEquivalentsFairValueDisclosure', window );">Total Cash equivalents</a></td>
<td class="nump">$ 61,540<span></span>
</td>
<td class="nump">$ 41,665<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShortTermInvestmentsAbstract', window );"><strong>Short-term investments</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_InvestmentsFairValueDisclosure', window );">Total Short-term investments</a></td>
<td class="nump">147,488<span></span>
</td>
<td class="nump">104,181<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FairValueByMeasurementFrequencyAxis=us-gaap_FairValueMeasurementsRecurringMember', window );">U.S. treasuries</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShortTermInvestmentsAbstract', window );"><strong>Short-term investments</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_InvestmentsFairValueDisclosure', window );">Total Short-term investments</a></td>
<td class="nump">62,849<span></span>
</td>
<td class="nump">51,095<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FairValueByMeasurementFrequencyAxis=us-gaap_FairValueMeasurementsRecurringMember', window );">Government agency securities, Short-term investments</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShortTermInvestmentsAbstract', window );"><strong>Short-term investments</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_InvestmentsFairValueDisclosure', window );">Total Short-term investments</a></td>
<td class="nump">27,366<span></span>
</td>
<td class="nump">12,052<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FairValueByMeasurementFrequencyAxis=us-gaap_FairValueMeasurementsRecurringMember', window );">Corporate debt</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShortTermInvestmentsAbstract', window );"><strong>Short-term investments</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_InvestmentsFairValueDisclosure', window );">Total Short-term investments</a></td>
<td class="nump">41,591<span></span>
</td>
<td class="nump">40,035<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FairValueByMeasurementFrequencyAxis=us-gaap_FairValueMeasurementsRecurringMember', window );">Commercial paper</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShortTermInvestmentsAbstract', window );"><strong>Short-term investments</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_InvestmentsFairValueDisclosure', window );">Total Short-term investments</a></td>
<td class="nump">15,682<span></span>
</td>
<td class="nump">999<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FairValueByMeasurementFrequencyAxis=us-gaap_FairValueMeasurementsRecurringMember', window );">Certificate of deposits and time deposits</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_CashAndCashEquivalentsAbstract', window );"><strong>Cash equivalents</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_CashEquivalentsFairValueDisclosure', window );">Total Cash equivalents</a></td>
<td class="nump">61,135<span></span>
</td>
<td class="nump">41,544<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FairValueByMeasurementFrequencyAxis=us-gaap_FairValueMeasurementsRecurringMember', window );">Money market cash</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_CashAndCashEquivalentsAbstract', window );"><strong>Cash equivalents</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_CashEquivalentsFairValueDisclosure', window );">Total Cash equivalents</a></td>
<td class="nump">405<span></span>
</td>
<td class="nump">121<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FairValueByMeasurementFrequencyAxis=us-gaap_FairValueMeasurementsRecurringMember', window );">Level 1</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_CashAndCashEquivalentsAbstract', window );"><strong>Cash equivalents</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_CashEquivalentsFairValueDisclosure', window );">Total Cash equivalents</a></td>
<td class="nump">61,540<span></span>
</td>
<td class="nump">41,665<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShortTermInvestmentsAbstract', window );"><strong>Short-term investments</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_InvestmentsFairValueDisclosure', window );">Total Short-term investments</a></td>
<td class="nump">62,849<span></span>
</td>
<td class="nump">51,095<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FairValueByMeasurementFrequencyAxis=us-gaap_FairValueMeasurementsRecurringMember', window );">Level 1 | U.S. treasuries</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShortTermInvestmentsAbstract', window );"><strong>Short-term investments</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_InvestmentsFairValueDisclosure', window );">Total Short-term investments</a></td>
<td class="nump">62,849<span></span>
</td>
<td class="nump">51,095<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FairValueByMeasurementFrequencyAxis=us-gaap_FairValueMeasurementsRecurringMember', window );">Level 1 | Certificate of deposits and time deposits</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_CashAndCashEquivalentsAbstract', window );"><strong>Cash equivalents</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_CashEquivalentsFairValueDisclosure', window );">Total Cash equivalents</a></td>
<td class="nump">61,135<span></span>
</td>
<td class="nump">41,544<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FairValueByMeasurementFrequencyAxis=us-gaap_FairValueMeasurementsRecurringMember', window );">Level 1 | Money market cash</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_CashAndCashEquivalentsAbstract', window );"><strong>Cash equivalents</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_CashEquivalentsFairValueDisclosure', window );">Total Cash equivalents</a></td>
<td class="nump">405<span></span>
</td>
<td class="nump">121<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FairValueByMeasurementFrequencyAxis=us-gaap_FairValueMeasurementsRecurringMember', window );">Level 2</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShortTermInvestmentsAbstract', window );"><strong>Short-term investments</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_InvestmentsFairValueDisclosure', window );">Total Short-term investments</a></td>
<td class="nump">84,639<span></span>
</td>
<td class="nump">53,086<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FairValueByMeasurementFrequencyAxis=us-gaap_FairValueMeasurementsRecurringMember', window );">Level 2 | Government agency securities, Short-term investments</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShortTermInvestmentsAbstract', window );"><strong>Short-term investments</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_InvestmentsFairValueDisclosure', window );">Total Short-term investments</a></td>
<td class="nump">27,366<span></span>
</td>
<td class="nump">12,052<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FairValueByMeasurementFrequencyAxis=us-gaap_FairValueMeasurementsRecurringMember', window );">Level 2 | Corporate debt</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShortTermInvestmentsAbstract', window );"><strong>Short-term investments</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_InvestmentsFairValueDisclosure', window );">Total Short-term investments</a></td>
<td class="nump">41,591<span></span>
</td>
<td class="nump">40,035<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FairValueByMeasurementFrequencyAxis=us-gaap_FairValueMeasurementsRecurringMember', window );">Level 2 | Commercial paper</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShortTermInvestmentsAbstract', window );"><strong>Short-term investments</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_InvestmentsFairValueDisclosure', window );">Total Short-term investments</a></td>
<td class="nump">$ 15,682<span></span>
</td>
<td class="nump">$ 999<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CashAndCashEquivalentsAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CashAndCashEquivalentsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InvestmentsFairValueDisclosure">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Fair value portion of investment securities, including, but not limited to, marketable securities, derivative financial instruments, and investments accounted for under the equity method.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 820<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=126976982&amp;loc=d3e19207-110258<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InvestmentsFairValueDisclosure</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShortTermInvestmentsAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShortTermInvestmentsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_CashEquivalentsFairValueDisclosure">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Fair value portion of short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_CashEquivalentsFairValueDisclosure</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FairValueByMeasurementFrequencyAxis=us-gaap_FairValueMeasurementsRecurringMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FairValueByMeasurementFrequencyAxis=us-gaap_FairValueMeasurementsRecurringMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FinancialInstrumentAxis=us-gaap_USTreasurySecuritiesMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FinancialInstrumentAxis=us-gaap_USTreasurySecuritiesMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FinancialInstrumentAxis=us-gaap_USGovernmentAgenciesDebtSecuritiesMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FinancialInstrumentAxis=us-gaap_USGovernmentAgenciesDebtSecuritiesMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FinancialInstrumentAxis=us-gaap_CorporateDebtSecuritiesMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FinancialInstrumentAxis=us-gaap_CorporateDebtSecuritiesMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FinancialInstrumentAxis=us-gaap_CommercialPaperMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FinancialInstrumentAxis=us-gaap_CommercialPaperMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CashAndCashEquivalentsAxis=veco_CertificateOfDepositsAndTimeDepositsMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CashAndCashEquivalentsAxis=veco_CertificateOfDepositsAndTimeDepositsMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CashAndCashEquivalentsAxis=veco_MoneyMarketFundsExcludingGovernmentFundsMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CashAndCashEquivalentsAxis=veco_MoneyMarketFundsExcludingGovernmentFundsMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FairValueByFairValueHierarchyLevelAxis=us-gaap_FairValueInputsLevel1Member">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FairValueByFairValueHierarchyLevelAxis=us-gaap_FairValueInputsLevel1Member</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FairValueByFairValueHierarchyLevelAxis=us-gaap_FairValueInputsLevel2Member">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FairValueByFairValueHierarchyLevelAxis=us-gaap_FairValueInputsLevel2Member</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>66
<FILENAME>R53.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575596153616">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Investments - Available-For-Sale Securities (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ScheduleOfAvailableForSaleSecuritiesLineItems', window );"><strong>Total available-for-sale securities</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AvailableForSaleDebtSecuritiesAmortizedCostBasis', window );">Amortized Cost</a></td>
<td class="nump">$ 148,483<span></span>
</td>
<td class="nump">$ 104,512<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AvailableForSaleDebtSecuritiesAccumulatedGrossUnrealizedLossBeforeTax', window );">Gross Unrealized Losses</a></td>
<td class="num">(995)<span></span>
</td>
<td class="num">(331)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AvailableForSaleSecuritiesDebtSecurities', window );">Estimated Fair Value</a></td>
<td class="nump">147,488<span></span>
</td>
<td class="nump">104,181<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtSecuritiesAvailableforSaleUnrealizedLossPositionAbstract', window );"><strong>Debt Securities, Available-for-Sale, Unrealized Loss Position [Abstract]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12Months', window );">Investments, Continuous loss position for less than 12 months, Estimated Fair Value</a></td>
<td class="nump">82,012<span></span>
</td>
<td class="nump">103,182<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12MonthsAccumulatedLoss', window );">Investments, Continuous loss position for less than 12 months, Gross Unrealized Losses</a></td>
<td class="num">(308)<span></span>
</td>
<td class="num">(331)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLonger', window );">Investments, Continuous loss position for 12 months or more, Estimated Fair Value</a></td>
<td class="nump">49,793<span></span>
</td>
<td class="nump">0<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLongerAccumulatedLoss', window );">Investments, Continuous loss position for 12 months or more, Gross Unrealized Losses</a></td>
<td class="num">(687)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AvailableForSaleSecuritiesDebtMaturitiesSingleMaturityDateAmortizedCostBasisRollingMaturityAbstract', window );"><strong>Contractual maturities - Amortized Cost</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AvailableForSaleSecuritiesDebtMaturitiesNextRollingTwelveMonthsAmortizedCostBasis', window );">Amortized Cost, Due in one year or less</a></td>
<td class="nump">145,885<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterOneThroughTwoYearsAmortizedCost', window );">Amortized Cost, Due after one year through two years</a></td>
<td class="nump">2,598<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AvailableForSaleDebtSecuritiesAmortizedCostBasis', window );">Amortized Cost</a></td>
<td class="nump">148,483<span></span>
</td>
<td class="nump">104,512<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AvailableForSaleSecuritiesDebtMaturitiesSingleMaturityDateRollingMaturityAbstract', window );"><strong>Contractual maturities - Estimated Fair Value</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AvailableForSaleSecuritiesDebtMaturitiesNextRollingTwelveMonthsFairValue', window );">Estimated Fair Value, Due in one year or less</a></td>
<td class="nump">144,959<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterOneThroughTwoYearsFairValue', window );">Estimated Fair Value, Due after one year through two years</a></td>
<td class="nump">2,529<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AvailableForSaleSecuritiesDebtSecurities', window );">Available-for-sale Securities, Debt Securities, Total</a></td>
<td class="nump">147,488<span></span>
</td>
<td class="nump">104,181<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FinancialInstrumentAxis=us-gaap_USTreasurySecuritiesMember', window );">U.S. treasuries</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ScheduleOfAvailableForSaleSecuritiesLineItems', window );"><strong>Total available-for-sale securities</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AvailableForSaleDebtSecuritiesAmortizedCostBasis', window );">Amortized Cost</a></td>
<td class="nump">63,331<span></span>
</td>
<td class="nump">51,269<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AvailableForSaleDebtSecuritiesAccumulatedGrossUnrealizedLossBeforeTax', window );">Gross Unrealized Losses</a></td>
<td class="num">(482)<span></span>
</td>
<td class="num">(174)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AvailableForSaleSecuritiesDebtSecurities', window );">Estimated Fair Value</a></td>
<td class="nump">62,849<span></span>
</td>
<td class="nump">51,095<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtSecuritiesAvailableforSaleUnrealizedLossPositionAbstract', window );"><strong>Debt Securities, Available-for-Sale, Unrealized Loss Position [Abstract]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12Months', window );">Investments, Continuous loss position for less than 12 months, Estimated Fair Value</a></td>
<td class="nump">39,791<span></span>
</td>
<td class="nump">51,095<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12MonthsAccumulatedLoss', window );">Investments, Continuous loss position for less than 12 months, Gross Unrealized Losses</a></td>
<td class="num">(84)<span></span>
</td>
<td class="num">(174)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLonger', window );">Investments, Continuous loss position for 12 months or more, Estimated Fair Value</a></td>
<td class="nump">23,057<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLongerAccumulatedLoss', window );">Investments, Continuous loss position for 12 months or more, Gross Unrealized Losses</a></td>
<td class="num">(398)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AvailableForSaleSecuritiesDebtMaturitiesSingleMaturityDateAmortizedCostBasisRollingMaturityAbstract', window );"><strong>Contractual maturities - Amortized Cost</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AvailableForSaleDebtSecuritiesAmortizedCostBasis', window );">Amortized Cost</a></td>
<td class="nump">63,331<span></span>
</td>
<td class="nump">51,269<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AvailableForSaleSecuritiesDebtMaturitiesSingleMaturityDateRollingMaturityAbstract', window );"><strong>Contractual maturities - Estimated Fair Value</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AvailableForSaleSecuritiesDebtSecurities', window );">Available-for-sale Securities, Debt Securities, Total</a></td>
<td class="nump">62,849<span></span>
</td>
<td class="nump">51,095<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FinancialInstrumentAxis=us-gaap_USGovernmentAgenciesDebtSecuritiesMember', window );">Government agency securities, Short-term investments</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ScheduleOfAvailableForSaleSecuritiesLineItems', window );"><strong>Total available-for-sale securities</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AvailableForSaleDebtSecuritiesAmortizedCostBasis', window );">Amortized Cost</a></td>
<td class="nump">27,464<span></span>
</td>
<td class="nump">12,075<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AvailableForSaleDebtSecuritiesAccumulatedGrossUnrealizedLossBeforeTax', window );">Gross Unrealized Losses</a></td>
<td class="num">(98)<span></span>
</td>
<td class="num">(23)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AvailableForSaleSecuritiesDebtSecurities', window );">Estimated Fair Value</a></td>
<td class="nump">27,366<span></span>
</td>
<td class="nump">12,052<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtSecuritiesAvailableforSaleUnrealizedLossPositionAbstract', window );"><strong>Debt Securities, Available-for-Sale, Unrealized Loss Position [Abstract]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12Months', window );">Investments, Continuous loss position for less than 12 months, Estimated Fair Value</a></td>
<td class="nump">22,528<span></span>
</td>
<td class="nump">12,052<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12MonthsAccumulatedLoss', window );">Investments, Continuous loss position for less than 12 months, Gross Unrealized Losses</a></td>
<td class="num">(86)<span></span>
</td>
<td class="num">(23)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLonger', window );">Investments, Continuous loss position for 12 months or more, Estimated Fair Value</a></td>
<td class="nump">4,838<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLongerAccumulatedLoss', window );">Investments, Continuous loss position for 12 months or more, Gross Unrealized Losses</a></td>
<td class="num">(12)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AvailableForSaleSecuritiesDebtMaturitiesSingleMaturityDateAmortizedCostBasisRollingMaturityAbstract', window );"><strong>Contractual maturities - Amortized Cost</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AvailableForSaleDebtSecuritiesAmortizedCostBasis', window );">Amortized Cost</a></td>
<td class="nump">27,464<span></span>
</td>
<td class="nump">12,075<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AvailableForSaleSecuritiesDebtMaturitiesSingleMaturityDateRollingMaturityAbstract', window );"><strong>Contractual maturities - Estimated Fair Value</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AvailableForSaleSecuritiesDebtSecurities', window );">Available-for-sale Securities, Debt Securities, Total</a></td>
<td class="nump">27,366<span></span>
</td>
<td class="nump">12,052<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FinancialInstrumentAxis=us-gaap_CorporateDebtSecuritiesMember', window );">Corporate debt</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ScheduleOfAvailableForSaleSecuritiesLineItems', window );"><strong>Total available-for-sale securities</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AvailableForSaleDebtSecuritiesAmortizedCostBasis', window );">Amortized Cost</a></td>
<td class="nump">42,006<span></span>
</td>
<td class="nump">40,169<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AvailableForSaleDebtSecuritiesAccumulatedGrossUnrealizedLossBeforeTax', window );">Gross Unrealized Losses</a></td>
<td class="num">(415)<span></span>
</td>
<td class="num">(134)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AvailableForSaleSecuritiesDebtSecurities', window );">Estimated Fair Value</a></td>
<td class="nump">41,591<span></span>
</td>
<td class="nump">40,035<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtSecuritiesAvailableforSaleUnrealizedLossPositionAbstract', window );"><strong>Debt Securities, Available-for-Sale, Unrealized Loss Position [Abstract]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12Months', window );">Investments, Continuous loss position for less than 12 months, Estimated Fair Value</a></td>
<td class="nump">19,693<span></span>
</td>
<td class="nump">40,035<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12MonthsAccumulatedLoss', window );">Investments, Continuous loss position for less than 12 months, Gross Unrealized Losses</a></td>
<td class="num">(138)<span></span>
</td>
<td class="num">(134)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLonger', window );">Investments, Continuous loss position for 12 months or more, Estimated Fair Value</a></td>
<td class="nump">21,898<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLongerAccumulatedLoss', window );">Investments, Continuous loss position for 12 months or more, Gross Unrealized Losses</a></td>
<td class="num">(277)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AvailableForSaleSecuritiesDebtMaturitiesSingleMaturityDateAmortizedCostBasisRollingMaturityAbstract', window );"><strong>Contractual maturities - Amortized Cost</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AvailableForSaleDebtSecuritiesAmortizedCostBasis', window );">Amortized Cost</a></td>
<td class="nump">42,006<span></span>
</td>
<td class="nump">40,169<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AvailableForSaleSecuritiesDebtMaturitiesSingleMaturityDateRollingMaturityAbstract', window );"><strong>Contractual maturities - Estimated Fair Value</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AvailableForSaleSecuritiesDebtSecurities', window );">Available-for-sale Securities, Debt Securities, Total</a></td>
<td class="nump">41,591<span></span>
</td>
<td class="nump">40,035<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FinancialInstrumentAxis=us-gaap_CommercialPaperMember', window );">Commercial paper</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ScheduleOfAvailableForSaleSecuritiesLineItems', window );"><strong>Total available-for-sale securities</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AvailableForSaleDebtSecuritiesAmortizedCostBasis', window );">Amortized Cost</a></td>
<td class="nump">15,682<span></span>
</td>
<td class="nump">999<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AvailableForSaleSecuritiesDebtSecurities', window );">Estimated Fair Value</a></td>
<td class="nump">15,682<span></span>
</td>
<td class="nump">999<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AvailableForSaleSecuritiesDebtMaturitiesSingleMaturityDateAmortizedCostBasisRollingMaturityAbstract', window );"><strong>Contractual maturities - Amortized Cost</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AvailableForSaleDebtSecuritiesAmortizedCostBasis', window );">Amortized Cost</a></td>
<td class="nump">15,682<span></span>
</td>
<td class="nump">999<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AvailableForSaleSecuritiesDebtMaturitiesSingleMaturityDateRollingMaturityAbstract', window );"><strong>Contractual maturities - Estimated Fair Value</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AvailableForSaleSecuritiesDebtSecurities', window );">Available-for-sale Securities, Debt Securities, Total</a></td>
<td class="nump">$ 15,682<span></span>
</td>
<td class="nump">$ 999<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AvailableForSaleDebtSecuritiesAccumulatedGrossUnrealizedLossBeforeTax">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount, before tax, of unrealized loss in accumulated other comprehensive income (AOCI) on investment in debt security measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale).</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 320<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)<br> -URI https://asc.fasb.org/extlink&amp;oid=126970911&amp;loc=d3e27161-111563<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AvailableForSaleDebtSecuritiesAccumulatedGrossUnrealizedLossBeforeTax</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AvailableForSaleDebtSecuritiesAmortizedCostBasis">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amortized cost of investment in debt security measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale).</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 320<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=126970911&amp;loc=d3e27161-111563<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 326<br> -SubTopic 30<br> -Section 45<br> -Paragraph 1<br> -URI https://asc.fasb.org/extlink&amp;oid=124258926&amp;loc=SL82898722-210454<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AvailableForSaleDebtSecuritiesAmortizedCostBasis</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AvailableForSaleSecuritiesDebtMaturitiesNextRollingTwelveMonthsAmortizedCostBasis">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amortized cost of investment in debt security measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale), with single maturity date and allocated without single maturity date, maturing in next rolling fiscal year following latest fiscal year. For interim and annual periods when interim period is reported on rolling approach, from latest statement of financial position date.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AvailableForSaleSecuritiesDebtMaturitiesNextRollingTwelveMonthsAmortizedCostBasis</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AvailableForSaleSecuritiesDebtMaturitiesNextRollingTwelveMonthsFairValue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Fair value of investment in debt security measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale), with single maturity date and allocated without single maturity date, maturing in next rolling fiscal year following latest fiscal year. For interim and annual periods when interim period is reported on rolling approach, from latest statement of financial position date.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AvailableForSaleSecuritiesDebtMaturitiesNextRollingTwelveMonthsFairValue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AvailableForSaleSecuritiesDebtMaturitiesSingleMaturityDateAmortizedCostBasisRollingMaturityAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AvailableForSaleSecuritiesDebtMaturitiesSingleMaturityDateAmortizedCostBasisRollingMaturityAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AvailableForSaleSecuritiesDebtMaturitiesSingleMaturityDateRollingMaturityAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AvailableForSaleSecuritiesDebtMaturitiesSingleMaturityDateRollingMaturityAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AvailableForSaleSecuritiesDebtSecurities">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of investment in debt security measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale).</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 210<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-03(6))<br> -URI https://asc.fasb.org/extlink&amp;oid=126897435&amp;loc=d3e534808-122878<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 326<br> -SubTopic 30<br> -Section 45<br> -Paragraph 1<br> -URI https://asc.fasb.org/extlink&amp;oid=124258926&amp;loc=SL82898722-210454<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 320<br> -SubTopic 10<br> -Section 45<br> -Paragraph 1<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=124260329&amp;loc=d3e26610-111562<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 320<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (aa)<br> -URI https://asc.fasb.org/extlink&amp;oid=126970911&amp;loc=d3e27161-111563<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AvailableForSaleSecuritiesDebtSecurities</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLonger">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of investment in debt security measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale), in continuous unrealized loss position for more than 12 months, without allowance for credit loss. Includes beneficial interest in securitized financial asset.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 326<br> -SubTopic 30<br> -Section 50<br> -Paragraph 5<br> -URI https://asc.fasb.org/extlink&amp;oid=124269663&amp;loc=SL82922890-210455<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 320<br> -SubTopic 10<br> -Section 50<br> -Paragraph 7<br> -URI https://asc.fasb.org/extlink&amp;oid=126970911&amp;loc=d3e27337-111563<br><br>Reference 3: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 326<br> -SubTopic 30<br> -Section 55<br> -Paragraph 8<br> -URI https://asc.fasb.org/extlink&amp;oid=121590138&amp;loc=SL82922954-210456<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLonger</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLongerAccumulatedLoss">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of accumulated unrealized loss on investment in debt security measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale), in continuous unrealized loss position for 12 months or longer, without allowance for credit loss. Includes beneficial interest in securitized financial asset.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 320<br> -SubTopic 10<br> -Section 50<br> -Paragraph 7<br> -URI https://asc.fasb.org/extlink&amp;oid=126970911&amp;loc=d3e27337-111563<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 326<br> -SubTopic 30<br> -Section 50<br> -Paragraph 5<br> -URI https://asc.fasb.org/extlink&amp;oid=124269663&amp;loc=SL82922890-210455<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLongerAccumulatedLoss</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12Months">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of investment in debt security measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale), in continuous unrealized loss position for less than 12 months, without allowance for credit loss. Includes beneficial interest in securitized financial asset.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 320<br> -SubTopic 10<br> -Section 50<br> -Paragraph 7<br> -URI https://asc.fasb.org/extlink&amp;oid=126970911&amp;loc=d3e27337-111563<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 326<br> -SubTopic 30<br> -Section 50<br> -Paragraph 5<br> -URI https://asc.fasb.org/extlink&amp;oid=124269663&amp;loc=SL82922890-210455<br><br>Reference 3: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 326<br> -SubTopic 30<br> -Section 55<br> -Paragraph 8<br> -URI https://asc.fasb.org/extlink&amp;oid=121590138&amp;loc=SL82922954-210456<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12Months</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12MonthsAccumulatedLoss">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of accumulated unrealized loss on investment in debt security measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale), in continuous unrealized loss position for less than 12 months, without allowance for credit loss. Includes beneficial interest in securitized financial asset.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 326<br> -SubTopic 30<br> -Section 50<br> -Paragraph 5<br> -URI https://asc.fasb.org/extlink&amp;oid=124269663&amp;loc=SL82922890-210455<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 320<br> -SubTopic 10<br> -Section 50<br> -Paragraph 7<br> -URI https://asc.fasb.org/extlink&amp;oid=126970911&amp;loc=d3e27337-111563<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12MonthsAccumulatedLoss</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtSecuritiesAvailableforSaleUnrealizedLossPositionAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtSecuritiesAvailableforSaleUnrealizedLossPositionAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfAvailableForSaleSecuritiesLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfAvailableForSaleSecuritiesLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterOneThroughTwoYearsAmortizedCost">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amortized cost of investment in debt security measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale), with single maturity date and allocated without single maturity date, maturing in next rolling fiscal year through second year following latest fiscal year. For interim and annual periods when interim period is reported on rolling approach, from latest statement of financial position date.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterOneThroughTwoYearsAmortizedCost</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterOneThroughTwoYearsFairValue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Fair value of investment in debt security, measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale), with single maturity date and allocated without single maturity date, maturing in rolling second through third year following latest fiscal year. For interim and annual periods when interim period is reported on rolling approach, from latest statement of financial position date.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterOneThroughTwoYearsFairValue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FinancialInstrumentAxis=us-gaap_USTreasurySecuritiesMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FinancialInstrumentAxis=us-gaap_USTreasurySecuritiesMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FinancialInstrumentAxis=us-gaap_USGovernmentAgenciesDebtSecuritiesMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FinancialInstrumentAxis=us-gaap_USGovernmentAgenciesDebtSecuritiesMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FinancialInstrumentAxis=us-gaap_CorporateDebtSecuritiesMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FinancialInstrumentAxis=us-gaap_CorporateDebtSecuritiesMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FinancialInstrumentAxis=us-gaap_CommercialPaperMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FinancialInstrumentAxis=us-gaap_CommercialPaperMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>67
<FILENAME>R54.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575590932880">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Investments - Other Investment (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
<th class="th" colspan="1"></th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2022</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_EquitySecuritiesWithoutReadilyDeterminableFairValueLineItems', window );"><strong>Other Investment</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_ImpairmentLossesInvestmentsNonCash', window );">Impairment of equity investments</a></td>
<td class="nump">$ 980<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_srt_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis=veco_OtherNonMarketableInvestmentMember', window );">Separate non-marketable investment</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_EquitySecuritiesWithoutReadilyDeterminableFairValueLineItems', window );"><strong>Other Investment</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_EquitySecuritiesWithoutReadilyDeterminableFairValueAmount', window );">Carrying value of investment</a></td>
<td class="nump">2,000<span></span>
</td>
<td class="nump">$ 2,000<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_srt_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis=veco_OtherNonMarketableInvestmentMember', window );">Separate non-marketable investment | Other income (expense), net</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_EquitySecuritiesWithoutReadilyDeterminableFairValueLineItems', window );"><strong>Other Investment</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_ImpairmentLossesInvestmentsNonCash', window );">Impairment of equity investments</a></td>
<td class="nump">$ 1,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_srt_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis=veco_OtherNonMarketableInvestmentMember', window );">Separate non-marketable investment | Maximum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_EquitySecuritiesWithoutReadilyDeterminableFairValueLineItems', window );"><strong>Other Investment</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_CostMethodInvestmentsOwnershipPercentage', window );">Percentage ownership of cost method investee</a></td>
<td class="nump">20.00%<span></span>
</td>
<td class="nump">20.00%<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EquitySecuritiesWithoutReadilyDeterminableFairValueAmount">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of investment in equity security without readily determinable fair value.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 321<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=126980263&amp;loc=SL75117539-209714<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EquitySecuritiesWithoutReadilyDeterminableFairValueAmount</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EquitySecuritiesWithoutReadilyDeterminableFairValueLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EquitySecuritiesWithoutReadilyDeterminableFairValueLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_CostMethodInvestmentsOwnershipPercentage">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The percentage of ownership in the investee accounted for under the cost method of accounting.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_CostMethodInvestmentsOwnershipPercentage</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_ImpairmentLossesInvestmentsNonCash">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The amount of non-cash impairment charge on investments.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_ImpairmentLossesInvestmentsNonCash</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis=veco_OtherNonMarketableInvestmentMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis=veco_OtherNonMarketableInvestmentMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeStatementLocationAxis=us-gaap_OtherNonoperatingIncomeExpenseMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeStatementLocationAxis=us-gaap_OtherNonoperatingIncomeExpenseMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_RangeAxis=srt_MaximumMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_RangeAxis=srt_MaximumMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>68
<FILENAME>R55.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575593904800">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Inventories (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_InventoryNetAbstract', window );"><strong>Inventories</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_InventoryRawMaterialsNetOfReserves', window );">Materials</a></td>
<td class="nump">$ 134,940<span></span>
</td>
<td class="nump">$ 96,027<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_InventoryWorkInProcessNetOfReserves', window );">Work-in-process</a></td>
<td class="nump">68,765<span></span>
</td>
<td class="nump">54,128<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_InventoryFinishedGoodsNetOfReserves', window );">Finished goods</a></td>
<td class="nump">3,203<span></span>
</td>
<td class="nump">20,703<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_InventoryNet', window );">Total</a></td>
<td class="nump">$ 206,908<span></span>
</td>
<td class="nump">$ 170,858<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InventoryFinishedGoodsNetOfReserves">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Carrying amount, net of valuation reserves and adjustments, as of the balance sheet date of merchandise or goods held by the company that are readily available for sale.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 330<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SAB Topic 5.BB)<br> -URI https://asc.fasb.org/extlink&amp;oid=27011343&amp;loc=d3e100047-122729<br><br>Reference 2: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(6)(a)(1))<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InventoryFinishedGoodsNetOfReserves</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InventoryNet">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount after valuation and LIFO reserves of inventory expected to be sold, or consumed within one year or operating cycle, if longer.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(6))<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 2: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section 45<br> -Paragraph 1<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=124098289&amp;loc=d3e6676-107765<br><br>Reference 3: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 852<br> -SubTopic 10<br> -Section 55<br> -Paragraph 10<br> -URI https://asc.fasb.org/extlink&amp;oid=84165509&amp;loc=d3e56426-112766<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InventoryNet</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InventoryNetAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InventoryNetAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InventoryRawMaterialsNetOfReserves">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Carrying amount, net of valuation reserves and adjustments, as of the balance sheet date of unprocessed items to be consumed in the manufacturing or production process.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 330<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SAB Topic 5.BB)<br> -URI https://asc.fasb.org/extlink&amp;oid=27011343&amp;loc=d3e100047-122729<br><br>Reference 2: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(6)(a)(4))<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InventoryRawMaterialsNetOfReserves</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InventoryWorkInProcessNetOfReserves">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Carrying amount, net of reserves and adjustments, as of the balance sheet date of merchandise or goods which are partially completed. This inventory is generally comprised of raw materials, labor and factory overhead costs, which require further materials, labor and overhead to be converted into finished goods, and which generally require the use of estimates to determine percentage complete and pricing.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 330<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SAB Topic 5.BB)<br> -URI https://asc.fasb.org/extlink&amp;oid=27011343&amp;loc=d3e100047-122729<br><br>Reference 2: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(6)(a)(3))<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InventoryWorkInProcessNetOfReserves</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>69
<FILENAME>R56.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575591384592">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Property, Plant, and Equipment - Property and Equipment (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="3">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentLineItems', window );"><strong>Property, plant, and equipment</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentGross', window );">Gross property, plant and equipment</a></td>
<td class="nump">$ 279,556<span></span>
</td>
<td class="nump">$ 260,642<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment', window );">Less: accumulated depreciation and amortization</a></td>
<td class="nump">172,275<span></span>
</td>
<td class="nump">160,899<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentNet', window );">Net property, plant, and equipment</a></td>
<td class="nump">107,281<span></span>
</td>
<td class="nump">99,743<span></span>
</td>
<td class="nump">$ 65,271<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_Depreciation', window );">Depreciation expense</a></td>
<td class="nump">15,600<span></span>
</td>
<td class="nump">13,800<span></span>
</td>
<td class="nump">$ 15,400<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_LandMember', window );">Land</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentLineItems', window );"><strong>Property, plant, and equipment</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentGross', window );">Gross property, plant and equipment</a></td>
<td class="nump">5,061<span></span>
</td>
<td class="nump">5,061<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_BuildingAndBuildingImprovementsMember', window );">Building and improvements</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentLineItems', window );"><strong>Property, plant, and equipment</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentGross', window );">Gross property, plant and equipment</a></td>
<td class="nump">$ 64,198<span></span>
</td>
<td class="nump">$ 63,946<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_BuildingAndBuildingImprovementsMember', window );">Building and improvements | Minimum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentLineItems', window );"><strong>Property, plant, and equipment</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentUsefulLife', window );">Average Useful Life</a></td>
<td class="text">10 years<span></span>
</td>
<td class="text">10 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_BuildingAndBuildingImprovementsMember', window );">Building and improvements | Maximum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentLineItems', window );"><strong>Property, plant, and equipment</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentUsefulLife', window );">Average Useful Life</a></td>
<td class="text">40 years<span></span>
</td>
<td class="text">40 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_MachineryAndEquipmentMember', window );">Machinery and equipment</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentLineItems', window );"><strong>Property, plant, and equipment</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentGross', window );">Gross property, plant and equipment</a></td>
<td class="nump">$ 155,533<span></span>
</td>
<td class="nump">$ 145,656<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_MachineryAndEquipmentMember', window );">Machinery and equipment | Minimum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentLineItems', window );"><strong>Property, plant, and equipment</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentUsefulLife', window );">Average Useful Life</a></td>
<td class="text">3 years<span></span>
</td>
<td class="text">3 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_MachineryAndEquipmentMember', window );">Machinery and equipment | Maximum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentLineItems', window );"><strong>Property, plant, and equipment</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentUsefulLife', window );">Average Useful Life</a></td>
<td class="text">10 years<span></span>
</td>
<td class="text">10 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_LeaseholdImprovementsMember', window );">Leaseholds improvements</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentLineItems', window );"><strong>Property, plant, and equipment</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentGross', window );">Gross property, plant and equipment</a></td>
<td class="nump">$ 54,764<span></span>
</td>
<td class="nump">$ 45,979<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_LeaseholdImprovementsMember', window );">Leaseholds improvements | Minimum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentLineItems', window );"><strong>Property, plant, and equipment</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentUsefulLife', window );">Average Useful Life</a></td>
<td class="text">3 years<span></span>
</td>
<td class="text">3 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_LeaseholdImprovementsMember', window );">Leaseholds improvements | Maximum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentLineItems', window );"><strong>Property, plant, and equipment</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentUsefulLife', window );">Average Useful Life</a></td>
<td class="text">17 years<span></span>
</td>
<td class="text">17 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of accumulated depreciation, depletion and amortization for physical assets used in the normal conduct of business to produce goods and services.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 360<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (c)<br> -URI https://asc.fasb.org/extlink&amp;oid=6391035&amp;loc=d3e2868-110229<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(14))<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_Depreciation">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The amount of expense recognized in the current period that reflects the allocation of the cost of tangible assets over the assets' useful lives. Includes production and non-production related depreciation.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 360<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=6391035&amp;loc=d3e2868-110229<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=126954810&amp;loc=d3e3602-108585<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_Depreciation</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PropertyPlantAndEquipmentGross">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount before accumulated depreciation, depletion and amortization of physical assets used in the normal conduct of business and not intended for resale. Examples include, but are not limited to, land, buildings, machinery and equipment, office equipment, and furniture and fixtures.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(13))<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 360<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=6391035&amp;loc=d3e2868-110229<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentGross</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PropertyPlantAndEquipmentLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PropertyPlantAndEquipmentNet">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount after accumulated depreciation, depletion and amortization of physical assets used in the normal conduct of business to produce goods and services and not intended for resale. Examples include, but are not limited to, land, buildings, machinery and equipment, office equipment, and furniture and fixtures.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 360<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -URI https://asc.fasb.org/extlink&amp;oid=6391035&amp;loc=d3e2868-110229<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 210<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-03(a)(8))<br> -URI https://asc.fasb.org/extlink&amp;oid=126734703&amp;loc=d3e572229-122910<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 360<br> -Section 50<br> -Paragraph 1<br> -URI https://asc.fasb.org/extlink&amp;oid=124429447&amp;loc=SL124453093-239630<br><br>Reference 4: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 852<br> -SubTopic 10<br> -Section 55<br> -Paragraph 10<br> -URI https://asc.fasb.org/extlink&amp;oid=84165509&amp;loc=d3e56426-112766<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentNet</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PropertyPlantAndEquipmentUsefulLife">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Useful life of long lived, physical assets used in the normal conduct of business and not intended for resale, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days. Examples include, but not limited to, land, buildings, machinery and equipment, office equipment, furniture and fixtures, and computer equipment.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentUsefulLife</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_LandMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_LandMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_BuildingAndBuildingImprovementsMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_BuildingAndBuildingImprovementsMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_RangeAxis=srt_MinimumMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_RangeAxis=srt_MinimumMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_RangeAxis=srt_MaximumMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_RangeAxis=srt_MaximumMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_MachineryAndEquipmentMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_MachineryAndEquipmentMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_LeaseholdImprovementsMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_LeaseholdImprovementsMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>70
<FILENAME>R57.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575595703392">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Goodwill and Intangible Assets - Goodwill (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="2">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_GoodwillRollForward', window );"><strong>Goodwill</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_GoodwillPeriodIncreaseDecrease', window );">Change in goodwill</a></td>
<td class="nump">$ 0<span></span>
</td>
<td class="nump">$ 0<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_GoodwillGross', window );">Gross carrying amount</a></td>
<td class="nump">430,331<span></span>
</td>
<td class="nump">430,331<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_GoodwillImpairedAccumulatedImpairmentLoss', window );">Accumulated impairment</a></td>
<td class="nump">248,388<span></span>
</td>
<td class="nump">248,388<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_Goodwill', window );">Net amount</a></td>
<td class="nump">$ 181,943<span></span>
</td>
<td class="nump">$ 181,943<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_Goodwill">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount after accumulated impairment loss of an asset representing future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=121556970&amp;loc=d3e13816-109267<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 210<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-03(10)(1))<br> -URI https://asc.fasb.org/extlink&amp;oid=126897435&amp;loc=d3e534808-122878<br><br>Reference 3: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (h)<br> -URI https://asc.fasb.org/extlink&amp;oid=121556970&amp;loc=d3e13816-109267<br><br>Reference 4: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 20<br> -Section 55<br> -Paragraph 24<br> -URI https://asc.fasb.org/extlink&amp;oid=122137925&amp;loc=d3e14258-109268<br><br>Reference 5: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 852<br> -SubTopic 10<br> -Section 55<br> -Paragraph 10<br> -URI https://asc.fasb.org/extlink&amp;oid=84165509&amp;loc=d3e56426-112766<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 20<br> -Section 45<br> -Paragraph 1<br> -URI https://asc.fasb.org/extlink&amp;oid=99380562&amp;loc=d3e13770-109266<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(15))<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_Goodwill</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_GoodwillGross">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount before accumulated impairment loss of an asset representing future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=121556970&amp;loc=d3e13816-109267<br><br>Reference 2: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 20<br> -Section 55<br> -Paragraph 24<br> -URI https://asc.fasb.org/extlink&amp;oid=122137925&amp;loc=d3e14258-109268<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (h)<br> -URI https://asc.fasb.org/extlink&amp;oid=121556970&amp;loc=d3e13816-109267<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_GoodwillGross</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_GoodwillImpairedAccumulatedImpairmentLoss">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of accumulated impairment loss for an asset representing future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (h)<br> -URI https://asc.fasb.org/extlink&amp;oid=121556970&amp;loc=d3e13816-109267<br><br>Reference 2: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 20<br> -Section 55<br> -Paragraph 24<br> -URI https://asc.fasb.org/extlink&amp;oid=122137925&amp;loc=d3e14258-109268<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=121556970&amp;loc=d3e13816-109267<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_GoodwillImpairedAccumulatedImpairmentLoss</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_GoodwillPeriodIncreaseDecrease">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of increase (decrease) of an asset representing future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1<br> -URI https://asc.fasb.org/extlink&amp;oid=121556970&amp;loc=d3e13816-109267<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_GoodwillPeriodIncreaseDecrease</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_GoodwillRollForward">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>A roll forward is a reconciliation of a concept from the beginning of a period to the end of a period.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_GoodwillRollForward</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>71
<FILENAME>R58.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575596022096">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Goodwill and Intangible Assets - Intangible Assets (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
<th class="th" colspan="1"></th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassLineItems', window );"><strong>Intangible assets</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsRemainingAmortizationPeriod1', window );">Average Remaining Amortization Period</a></td>
<td class="text">4 years 2 months 12 days<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsGross', window );">Gross Carrying Amount, Intangible assets</a></td>
<td class="nump">$ 508,969<span></span>
</td>
<td class="nump">$ 508,969<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment', window );">Accumulated Amortization and Impairment, Intangible assets</a></td>
<td class="nump">485,082<span></span>
</td>
<td class="nump">475,064<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsNet', window );">Total Net Intangible Assets</a></td>
<td class="nump">$ 23,887<span></span>
</td>
<td class="nump">33,905<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_TechnologyBasedIntangibleAssetsMember', window );">Technology</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassLineItems', window );"><strong>Intangible assets</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsRemainingAmortizationPeriod1', window );">Average Remaining Amortization Period</a></td>
<td class="text">2 years 7 months 6 days<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsGross', window );">Gross Carrying Amount, Intangible assets</a></td>
<td class="nump">$ 327,908<span></span>
</td>
<td class="nump">327,908<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment', window );">Accumulated Amortization and Impairment, Intangible assets</a></td>
<td class="nump">316,918<span></span>
</td>
<td class="nump">310,551<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsNet', window );">Total Net Intangible Assets</a></td>
<td class="nump">$ 10,990<span></span>
</td>
<td class="nump">17,357<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_CustomerRelationshipsMember', window );">Customer relationship</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassLineItems', window );"><strong>Intangible assets</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsRemainingAmortizationPeriod1', window );">Average Remaining Amortization Period</a></td>
<td class="text">6 years 3 months 18 days<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsGross', window );">Gross Carrying Amount, Intangible assets</a></td>
<td class="nump">$ 146,465<span></span>
</td>
<td class="nump">146,465<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment', window );">Accumulated Amortization and Impairment, Intangible assets</a></td>
<td class="nump">135,415<span></span>
</td>
<td class="nump">132,970<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsNet', window );">Total Net Intangible Assets</a></td>
<td class="nump">$ 11,050<span></span>
</td>
<td class="nump">13,495<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_TrademarksAndTradeNamesMember', window );">Trademarks and tradenames</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassLineItems', window );"><strong>Intangible assets</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsRemainingAmortizationPeriod1', window );">Average Remaining Amortization Period</a></td>
<td class="text">1 year 6 months<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsGross', window );">Gross Carrying Amount, Intangible assets</a></td>
<td class="nump">$ 30,910<span></span>
</td>
<td class="nump">30,910<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment', window );">Accumulated Amortization and Impairment, Intangible assets</a></td>
<td class="nump">29,063<span></span>
</td>
<td class="nump">27,857<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsNet', window );">Total Net Intangible Assets</a></td>
<td class="nump">1,847<span></span>
</td>
<td class="nump">3,053<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_OtherIntangibleAssetsMember', window );">Other Intangible Assets</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassLineItems', window );"><strong>Intangible assets</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsGross', window );">Gross Carrying Amount, Intangible assets</a></td>
<td class="nump">3,686<span></span>
</td>
<td class="nump">3,686<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment', window );">Accumulated Amortization and Impairment, Intangible assets</a></td>
<td class="nump">$ 3,686<span></span>
</td>
<td class="nump">$ 3,686<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FiniteLivedIntangibleAssetsGross">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount before amortization of assets, excluding financial assets and goodwill, lacking physical substance with a finite life.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 928<br> -SubTopic 340<br> -Section 50<br> -Paragraph 1<br> -URI https://asc.fasb.org/extlink&amp;oid=6473545&amp;loc=d3e61844-108004<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 30<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (a)(1)<br> -URI https://asc.fasb.org/extlink&amp;oid=66006027&amp;loc=d3e16323-109275<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FiniteLivedIntangibleAssetsGross</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FiniteLivedIntangibleAssetsNet">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount after amortization of assets, excluding financial assets and goodwill, lacking physical substance with a finite life.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 926<br> -SubTopic 20<br> -Section 50<br> -Paragraph 5<br> -URI https://asc.fasb.org/extlink&amp;oid=120154696&amp;loc=d3e54445-107959<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 30<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (a)(1)<br> -URI https://asc.fasb.org/extlink&amp;oid=66006027&amp;loc=d3e16323-109275<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FiniteLivedIntangibleAssetsNet</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FiniteLivedIntangibleAssetsRemainingAmortizationPeriod1">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Remaining amortization period of finite-lived intangible assets, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 926<br> -SubTopic 20<br> -Section 50<br> -Paragraph 5<br> -URI https://asc.fasb.org/extlink&amp;oid=120154696&amp;loc=d3e54445-107959<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FiniteLivedIntangibleAssetsRemainingAmortizationPeriod1</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Accumulated amount of amortization and impairment of assets, excluding financial assets and goodwill, lacking physical substance with a finite life.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_TechnologyBasedIntangibleAssetsMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_TechnologyBasedIntangibleAssetsMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_CustomerRelationshipsMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_CustomerRelationshipsMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_TrademarksAndTradeNamesMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_TrademarksAndTradeNamesMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_OtherIntangibleAssetsMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_OtherIntangibleAssetsMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>72
<FILENAME>R59.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575599005344">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Goodwill and Intangible Assets - Amortization (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsFutureAmortizationExpenseAbstract', window );"><strong>Estimated aggregate amortization expense</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseNextTwelveMonths', window );">2023</a></td>
<td class="nump">$ 8,347<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearTwo', window );">2024</a></td>
<td class="nump">6,708<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearThree', window );">2025</a></td>
<td class="nump">3,136<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFour', window );">2026</a></td>
<td class="nump">2,134<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFive', window );">2027</a></td>
<td class="nump">1,550<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseAfterYearFive', window );">Thereafter</a></td>
<td class="nump">2,012<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsNet', window );">Total Net Intangible Assets</a></td>
<td class="nump">$ 23,887<span></span>
</td>
<td class="nump">$ 33,905<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseAfterYearFive">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of amortization for asset, excluding financial asset and goodwill, lacking physical substance with finite life expected to be recognized after fifth fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseAfterYearFive</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseNextTwelveMonths">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of amortization for assets, excluding financial assets and goodwill, lacking physical substance with finite life expected to be recognized in next fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 30<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (a)(3)<br> -URI https://asc.fasb.org/extlink&amp;oid=66006027&amp;loc=d3e16323-109275<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseNextTwelveMonths</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFive">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of amortization for assets, excluding financial assets and goodwill, lacking physical substance with finite life expected to be recognized in fifth fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 30<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (a)(3)<br> -URI https://asc.fasb.org/extlink&amp;oid=66006027&amp;loc=d3e16323-109275<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFive</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFour">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of amortization for assets, excluding financial assets and goodwill, lacking physical substance with finite life expected to be recognized in fourth fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 30<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (a)(3)<br> -URI https://asc.fasb.org/extlink&amp;oid=66006027&amp;loc=d3e16323-109275<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFour</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearThree">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of amortization for assets, excluding financial assets and goodwill, lacking physical substance with finite life expected to be recognized in third fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 30<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (a)(3)<br> -URI https://asc.fasb.org/extlink&amp;oid=66006027&amp;loc=d3e16323-109275<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearThree</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearTwo">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of amortization for assets, excluding financial assets and goodwill, lacking physical substance with finite life expected to be recognized in second fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 30<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (a)(3)<br> -URI https://asc.fasb.org/extlink&amp;oid=66006027&amp;loc=d3e16323-109275<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearTwo</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FiniteLivedIntangibleAssetsFutureAmortizationExpenseAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FiniteLivedIntangibleAssetsFutureAmortizationExpenseAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FiniteLivedIntangibleAssetsNet">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount after amortization of assets, excluding financial assets and goodwill, lacking physical substance with a finite life.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 926<br> -SubTopic 20<br> -Section 50<br> -Paragraph 5<br> -URI https://asc.fasb.org/extlink&amp;oid=120154696&amp;loc=d3e54445-107959<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 30<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (a)(1)<br> -URI https://asc.fasb.org/extlink&amp;oid=66006027&amp;loc=d3e16323-109275<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FiniteLivedIntangibleAssetsNet</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>73
<FILENAME>R60.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575596172400">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Accrued Expenses and Other Liabilities - Components (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AccruedLiabilitiesCurrentAbstract', window );"><strong>Accrued expenses and other current liabilities</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_EmployeeRelatedLiabilitiesCurrent', window );">Payroll and related benefits</a></td>
<td class="nump">$ 30,044<span></span>
</td>
<td class="nump">$ 35,712<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ProductWarrantyAccrualClassifiedCurrent', window );">Warranty</a></td>
<td class="nump">8,601<span></span>
</td>
<td class="nump">7,878<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OperatingLeaseLiabilityCurrent', window );">Operating lease liabilities</a></td>
<td class="nump">3,333<span></span>
</td>
<td class="nump">4,437<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_InterestPayableCurrent', window );">Interest</a></td>
<td class="nump">2,853<span></span>
</td>
<td class="nump">2,757<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AccruedProfessionalFeesCurrent', window );">Professional fees</a></td>
<td class="nump">2,102<span></span>
</td>
<td class="nump">1,467<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LossContingencyAccrualCarryingValueCurrent', window );">Legal settlement</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">15,000<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_TaxesPayableCurrent', window );">Sales, use, and other taxes</a></td>
<td class="nump">2,027<span></span>
</td>
<td class="nump">4,889<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OtherAccruedLiabilitiesCurrent', window );">Other</a></td>
<td class="nump">7,071<span></span>
</td>
<td class="nump">7,612<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_AccruedAndOtherLiabilitiesCurrent', window );">Total Accrued and Other Liabilities, Current</a></td>
<td class="nump">$ 56,031<span></span>
</td>
<td class="nump">$ 79,752<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList', window );">Operating Lease, Liability, Current, Statement of Financial Position</a></td>
<td class="text">Total Accrued and Other Liabilities, Current<span></span>
</td>
<td class="text">Total Accrued and Other Liabilities, Current<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AccruedLiabilitiesCurrentAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AccruedLiabilitiesCurrentAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AccruedProfessionalFeesCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Carrying value as of the balance sheet date of obligations incurred through that date and payable for professional fees, such as for legal and accounting services received. Used to reflect the current portion of the liabilities (due within one year or within the normal operating cycle if longer).</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.20)<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AccruedProfessionalFeesCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EmployeeRelatedLiabilitiesCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Total of the carrying values as of the balance sheet date of obligations incurred through that date and payable for obligations related to services received from employees, such as accrued salaries and bonuses, payroll taxes and fringe benefits. Used to reflect the current portion of the liabilities (due within one year or within the normal operating cycle if longer).</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.20)<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EmployeeRelatedLiabilitiesCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InterestPayableCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Carrying value as of the balance sheet date of [accrued] interest payable on all forms of debt, including trade payables, that has been incurred and is unpaid. Used to reflect the current portion of the liabilities (due within one year or within the normal operating cycle if longer).</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.20)<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InterestPayableCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LossContingencyAccrualCarryingValueCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of loss contingency liability expected to be resolved within one year or the normal operating cycle, if longer.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 450<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1<br> -URI https://asc.fasb.org/extlink&amp;oid=121557415&amp;loc=d3e14326-108349<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LossContingencyAccrualCarryingValueCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OperatingLeaseLiabilityCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Present value of lessee's discounted obligation for lease payments from operating lease, classified as current.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 45<br> -Paragraph 1<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=123391704&amp;loc=SL77918627-209977<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingLeaseLiabilityCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Indicates line item in statement of financial position that includes current operating lease liability.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 45<br> -Paragraph 2<br> -URI https://asc.fasb.org/extlink&amp;oid=123391704&amp;loc=SL77918631-209977<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>enum2:enumerationSetItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OtherAccruedLiabilitiesCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of expenses incurred but not yet paid classified as other, due within one year or the normal operating cycle, if longer.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.20)<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OtherAccruedLiabilitiesCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProductWarrantyAccrualClassifiedCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Carrying value as of the balance sheet date of obligations incurred through that date and payable for estimated claims under standard and extended warranty protection rights granted to customers. For classified balance sheets, represents the current portion of the liabilities (due within one year or within the normal operating cycle if longer).</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 460<br> -SubTopic 10<br> -Section 50<br> -Paragraph 7<br> -URI https://asc.fasb.org/extlink&amp;oid=126907703&amp;loc=d3e12524-110249<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.20)<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 460<br> -SubTopic 10<br> -Section 25<br> -Paragraph 5<br> -URI https://asc.fasb.org/extlink&amp;oid=126907644&amp;loc=d3e11281-110244<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProductWarrantyAccrualClassifiedCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_TaxesPayableCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Carrying value as of the balance sheet date of obligations incurred and payable for statutory income, sales, use, payroll, excise, real, property and other taxes. Used to reflect the current portion of the liabilities (due within one year or within the normal operating cycle if longer).</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.19,20)<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_TaxesPayableCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_AccruedAndOtherLiabilitiesCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Carrying value as of the balance sheet date of obligations incurred and payable, pertaining to costs that are statutory in nature, are incurred on contractual obligations, or accumulate over time and for which invoices have not yet been received or will not be rendered. Examples include taxes, interest, rent and utilities. Used to reflect the current portion of the liabilities (due within one year or within the normal operating cycle if longer). Also includes amount of liabilities classified as other, due within one year or the normal operating cycle, if longer.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_AccruedAndOtherLiabilitiesCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>74
<FILENAME>R61.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575601446304">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Accrued Expenses and Other Liabilities - Customer deposits and deferred revenue (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
<th class="th" colspan="1"></th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ContractWithCustomerRefundLiabilityAbstract', window );"><strong>Customer deposits and deferred revenue</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ContractWithCustomerRefundLiabilityCurrent', window );">Customer deposits and deferred revenue</a></td>
<td class="nump">$ 110,200<span></span>
</td>
<td class="nump">$ 46,900<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_MovementInDeferredRevenueRollForward', window );"><strong>Changes in deferred revenue</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ContractWithCustomerLiability', window );">Beginning balance</a></td>
<td class="nump">16,276<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncreaseDecreaseInContractWithCustomerLiability', window );">Deferral of revenue</a></td>
<td class="nump">8,081<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ContractWithCustomerLiabilityRevenueRecognized', window );">Recognition of previously deferred revenue</a></td>
<td class="num">(7,367)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ContractWithCustomerLiability', window );">Ending balance</a></td>
<td class="nump">$ 16,990<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ContractWithCustomerLiability">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of obligation to transfer good or service to customer for which consideration has been received or is receivable.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 45<br> -Paragraph 1<br> -URI https://asc.fasb.org/extlink&amp;oid=126919976&amp;loc=SL49130531-203044<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=126920106&amp;loc=SL49130549-203045<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 45<br> -Paragraph 2<br> -URI https://asc.fasb.org/extlink&amp;oid=126919976&amp;loc=SL49130532-203044<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ContractWithCustomerLiability</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ContractWithCustomerLiabilityRevenueRecognized">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of revenue recognized that was previously included in balance of obligation to transfer good or service to customer for which consideration from customer has been received or is due.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=126920106&amp;loc=SL49130549-203045<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ContractWithCustomerLiabilityRevenueRecognized</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ContractWithCustomerRefundLiabilityAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ContractWithCustomerRefundLiabilityAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ContractWithCustomerRefundLiabilityCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of liability for consideration received or receivable from customer which is not included in transaction price, when consideration is expected to be refunded to customer, classified as current.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 55<br> -Paragraph 27<br> -URI https://asc.fasb.org/extlink&amp;oid=126920602&amp;loc=SL49130611-203046-203046<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ContractWithCustomerRefundLiabilityCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncreaseDecreaseInContractWithCustomerLiability">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of increase (decrease) in obligation to transfer good or service to customer for which consideration has been received or is receivable.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=126954810&amp;loc=d3e3602-108585<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 912<br> -SubTopic 310<br> -Section 45<br> -Paragraph 11<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=126938201&amp;loc=d3e55415-109406<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncreaseDecreaseInContractWithCustomerLiability</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_MovementInDeferredRevenueRollForward">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>A roll forward is a reconciliation of a concept from the beginning of a period to the end of a period.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_MovementInDeferredRevenueRollForward</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>75
<FILENAME>R62.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575598865472">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Accrued Expenses and Other Liabilities - Performance Obligation Amount (Details)<br> $ in Millions</strong></div></th>
<th class="th">
<div>Dec. 31, 2022 </div>
<div>USD ($)</div>
</th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PayablesAndAccrualsAbstract', window );"><strong>Accrued Expenses and Other Liabilities</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_RevenueRemainingPerformanceObligation', window );">Remaining performance obligations</a></td>
<td class="nump">$ 192.0<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionStartDateAxis=2023-01-01', window );">Revenue, Remaining Performance Obligation, Expected Timing of Satisfaction, Start Date [Axis]: 2023-01-01</a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionLineItems', window );"><strong>Performance obligations</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_RevenueRemainingPerformanceObligationExpectedTimingPercentage', window );">Percentage of remaining performance obligation expected to be recognized</a></td>
<td class="nump">37.00%<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PayablesAndAccrualsAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PayablesAndAccrualsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RevenueRemainingPerformanceObligation">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of transaction price allocated to performance obligation that has not been recognized as revenue.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 50<br> -Paragraph 13<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=126920106&amp;loc=SL49130556-203045<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RevenueRemainingPerformanceObligation</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_RevenueRemainingPerformanceObligationExpectedTimingPercentage">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Percentage of remaining performance obligation expected to be recognized.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_RevenueRemainingPerformanceObligationExpectedTimingPercentage</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionStartDateAxis=2023-01-01">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionStartDateAxis=2023-01-01</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>76
<FILENAME>R63.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575594109072">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Accrued Expenses and Other Liabilities - Performance Obligation Timing (Details)<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2022</div></th></tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PayablesAndAccrualsAbstract', window );"><strong>Accrued Expenses and Other Liabilities</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_RevenuePracticalExpedientRemainingPerformanceObligation', window );">Revenue, Practical Expedient, Remaining Performance Obligation</a></td>
<td class="text">true<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_srt_RangeAxis=srt_MinimumMember', window );">Minimum</a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionLineItems', window );"><strong>Performance obligations</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionPeriod1', window );">Remaining performance obligations, expected timing of satisfaction</a></td>
<td class="text">1 year<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionStartDateAxis=2023-01-01', window );">Revenue, Remaining Performance Obligation, Expected Timing of Satisfaction, Start Date [Axis]: 2023-01-01</a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionLineItems', window );"><strong>Performance obligations</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionPeriod1', window );">Remaining performance obligations, expected timing of satisfaction</a></td>
<td class="text">1 year<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionStartDateAxis=2024-01-01', window );">Revenue, Remaining Performance Obligation, Expected Timing of Satisfaction, Start Date [Axis]: 2024-01-01 | Minimum</a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionLineItems', window );"><strong>Performance obligations</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionPeriod1', window );">Remaining performance obligations, expected timing of satisfaction</a></td>
<td class="text">1 year<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionStartDateAxis=2024-01-01', window );">Revenue, Remaining Performance Obligation, Expected Timing of Satisfaction, Start Date [Axis]: 2024-01-01 | Maximum</a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionLineItems', window );"><strong>Performance obligations</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionPeriod1', window );">Remaining performance obligations, expected timing of satisfaction</a></td>
<td class="text">3 years<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PayablesAndAccrualsAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PayablesAndAccrualsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RevenuePracticalExpedientRemainingPerformanceObligation">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Indicates (true false) whether optional exemption was applied not to disclose amount of transaction price allocated to and explanation of expected timing of revenue recognition for remaining performance obligation, when contract has expected duration of one year or less or right to consideration corresponds directly to performance completed.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 50<br> -Paragraph 15<br> -URI https://asc.fasb.org/extlink&amp;oid=126920106&amp;loc=SL49130558-203045<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RevenuePracticalExpedientRemainingPerformanceObligation</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:booleanItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionPeriod1">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Period in which remaining performance obligation is expected to be recognized as revenue, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 50<br> -Paragraph 13<br> -Subparagraph (b)(1)<br> -URI https://asc.fasb.org/extlink&amp;oid=126920106&amp;loc=SL49130556-203045<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionPeriod1</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_RangeAxis=srt_MinimumMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_RangeAxis=srt_MinimumMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionStartDateAxis=2023-01-01">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionStartDateAxis=2023-01-01</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionStartDateAxis=2024-01-01">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionStartDateAxis=2024-01-01</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_RangeAxis=srt_MaximumMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_RangeAxis=srt_MaximumMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>77
<FILENAME>R64.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575600345024">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Accrued Expenses and Other Liabilities - Other liabilities (Details) - Other Liabilities - USD ($)<br> $ in Millions</strong></div></th>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OtherLiabilitiesAbstract', window );"><strong>Other liabilities</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AssetRetirementObligationsNoncurrent', window );">Asset retirement obligations</a></td>
<td class="nump">$ 0.7<span></span>
</td>
<td class="nump">$ 2.8<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AccruedIncomeTaxesNoncurrent', window );">Income taxes payable</a></td>
<td class="nump">0.4<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_MedicalAndDentalBenefitLiabilitiesNoncurrent', window );">Medical and dental benefits</a></td>
<td class="nump">$ 2.0<span></span>
</td>
<td class="nump">$ 1.8<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AccruedIncomeTaxesNoncurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Carrying amount as of the balance sheet date of the unpaid sum of the known and estimated amounts payable to satisfy all domestic and foreign income tax obligations due beyond one year or the operating cycle, whichever is longer. Alternate captions include income taxes payable, noncurrent.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 210<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-03(a)(15)(b)(1))<br> -URI https://asc.fasb.org/extlink&amp;oid=126734703&amp;loc=d3e572229-122910<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 210<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-03(15)(1))<br> -URI https://asc.fasb.org/extlink&amp;oid=126897435&amp;loc=d3e534808-122878<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(24))<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AccruedIncomeTaxesNoncurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AssetRetirementObligationsNoncurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Noncurrent portion of the carrying amount of a liability for an asset retirement obligation. An asset retirement obligation is a legal obligation associated with the disposal or retirement of a tangible long-lived asset that results from the acquisition, construction or development, or the normal operations of a long-lived asset, except for certain obligations of lessees.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 410<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (c)<br> -URI https://asc.fasb.org/extlink&amp;oid=6392692&amp;loc=d3e7535-110849<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AssetRetirementObligationsNoncurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OtherLiabilitiesAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OtherLiabilitiesAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_MedicalAndDentalBenefitLiabilitiesNoncurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of liabilities for medical and dental benefits classified as other, due after one year or the normal operating cycle, if longer</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_MedicalAndDentalBenefitLiabilitiesNoncurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_BalanceSheetLocationAxis=us-gaap_OtherLiabilitiesMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_BalanceSheetLocationAxis=us-gaap_OtherLiabilitiesMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>78
<FILENAME>R65.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575594107408">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Commitments and Contingencies - Warranty (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="3">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ProductWarrantiesDisclosuresAbstract', window );"><strong>Warranty</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ProductWarrantyAccrual', window );">Balance, beginning of the period</a></td>
<td class="nump">$ 7,878<span></span>
</td>
<td class="nump">$ 5,058<span></span>
</td>
<td class="nump">$ 7,067<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ProductWarrantyAccrualWarrantiesIssued', window );">Warranties issued</a></td>
<td class="nump">8,304<span></span>
</td>
<td class="nump">7,102<span></span>
</td>
<td class="nump">4,626<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ProductWarrantyAccrualPayments', window );">Consumption of reserves</a></td>
<td class="num">(7,527)<span></span>
</td>
<td class="num">(5,784)<span></span>
</td>
<td class="num">(6,691)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ProductWarrantyAccrualPreexistingIncreaseDecrease', window );">Changes in estimate</a></td>
<td class="num">(54)<span></span>
</td>
<td class="nump">1,502<span></span>
</td>
<td class="nump">56<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ProductWarrantyAccrual', window );">Balance, end of the period</a></td>
<td class="nump">$ 8,601<span></span>
</td>
<td class="nump">$ 7,878<span></span>
</td>
<td class="nump">$ 5,058<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProductWarrantiesDisclosuresAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProductWarrantiesDisclosuresAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProductWarrantyAccrual">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Carrying value as of the balance sheet date of obligations incurred through that date and payable for estimated claims under standard and extended warranty protection rights granted to customers.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 210<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-03.15(5))<br> -URI https://asc.fasb.org/extlink&amp;oid=126897435&amp;loc=d3e534808-122878<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 460<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -Subparagraph (c)(1)<br> -URI https://asc.fasb.org/extlink&amp;oid=126907703&amp;loc=d3e12565-110249<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 460<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -Subparagraph (c)(5)<br> -URI https://asc.fasb.org/extlink&amp;oid=126907703&amp;loc=d3e12565-110249<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProductWarrantyAccrual</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProductWarrantyAccrualPayments">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of decrease in the standard and extended product warranty accrual from payments made in cash or in kind to satisfy claims under the terms of the standard and extended product warranty.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 460<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -Subparagraph ((c)(2))<br> -URI https://asc.fasb.org/extlink&amp;oid=126907703&amp;loc=d3e12565-110249<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProductWarrantyAccrualPayments</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProductWarrantyAccrualPreexistingIncreaseDecrease">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of increase (decrease) in the standard and extended product warranty accrual from changes in estimates attributable to preexisting product warranties.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 460<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -Subparagraph ((c)(4))<br> -URI https://asc.fasb.org/extlink&amp;oid=126907703&amp;loc=d3e12565-110249<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProductWarrantyAccrualPreexistingIncreaseDecrease</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProductWarrantyAccrualWarrantiesIssued">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of increase in the standard and extended product warranty accrual from warranties issued.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 460<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -Subparagraph ((c)(3))<br> -URI https://asc.fasb.org/extlink&amp;oid=126907703&amp;loc=d3e12565-110249<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProductWarrantyAccrualWarrantiesIssued</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>79
<FILENAME>R66.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575597809600">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Commitments and Contingencies - Lease terms (Details)<br></strong></div></th>
<th class="th"><div>Dec. 31, 2022</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LesseeOperatingLeaseDescriptionAbstract', window );"><strong>Leases</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LesseeOperatingLeaseRenewalTerm', window );">Lease renewal term</a></td>
<td class="text">5 years<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OperatingLeaseWeightedAverageRemainingLeaseTerm1', window );">Remaining lease term</a></td>
<td class="text">12 years<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LesseeOperatingLeaseDiscountRate', window );">Weighted average discount rate (as a percent)</a></td>
<td class="nump">5.60%<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LesseeOperatingLeaseDescriptionAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LesseeOperatingLeaseDescriptionAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LesseeOperatingLeaseDiscountRate">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Discount rate used by lessee to determine present value of operating lease payments.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (c)(3)<br> -URI https://asc.fasb.org/extlink&amp;oid=128292326&amp;loc=SL77918673-209980<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LesseeOperatingLeaseDiscountRate</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LesseeOperatingLeaseRenewalTerm">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Term of lessee's operating lease renewal, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (a)(3)<br> -URI https://asc.fasb.org/extlink&amp;oid=128292326&amp;loc=SL77918673-209980<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LesseeOperatingLeaseRenewalTerm</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OperatingLeaseWeightedAverageRemainingLeaseTerm1">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Weighted average remaining lease term for operating lease, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 55<br> -Paragraph 53<br> -URI https://asc.fasb.org/extlink&amp;oid=123414884&amp;loc=SL77918982-209971<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 50<br> -Paragraph 4<br> -Subparagraph (g)(3)<br> -URI https://asc.fasb.org/extlink&amp;oid=128292326&amp;loc=SL77918686-209980<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingLeaseWeightedAverageRemainingLeaseTerm1</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>80
<FILENAME>R67.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575599436240">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Commitments and Contingencies - Minimum lease commitments (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract', window );"><strong>Minimum lease commitments, Payments due by period:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths', window );">2023</a></td>
<td class="nump">$ 3,757<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo', window );">2024</a></td>
<td class="nump">4,347<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree', window );">2025</a></td>
<td class="nump">3,812<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour', window );">2026</a></td>
<td class="nump">4,012<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFive', window );">2027</a></td>
<td class="nump">3,620<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive', window );">Thereafter</a></td>
<td class="nump">34,244<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue', window );">Total future minimum lease payments</a></td>
<td class="nump">53,792<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount', window );">Less: Imputed interest</a></td>
<td class="num">(16,878)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OperatingLeaseLiability', window );">Total operating lease liabilities</a></td>
<td class="nump">36,914<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OperatingLeaseLiabilityCurrent', window );">Operating lease liability, current</a></td>
<td class="nump">$ 3,333<span></span>
</td>
<td class="nump">$ 4,437<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList', window );">Operating Lease, Liability, Current, Statement of Financial Position</a></td>
<td class="text">Accrued expenses and other current liabilities<span></span>
</td>
<td class="text">Accrued expenses and other current liabilities<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OperatingLeaseLiabilityNoncurrent', window );">Long-term operating lease liabilities</a></td>
<td class="nump">$ 33,581<span></span>
</td>
<td class="nump">$ 32,834<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OperatingLeaseLiability', window );">Total operating lease liabilities</a></td>
<td class="nump">$ 36,914<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OperatingLeaseLiabilityStatementOfFinancialPositionExtensibleList', window );">Operating Lease, Liability, Statement of Financial Position</a></td>
<td class="text">Long-term operating lease liabilities, Accrued expenses and other current liabilities<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of lessee's undiscounted obligation for lease payment for operating lease.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 50<br> -Paragraph 6<br> -URI https://asc.fasb.org/extlink&amp;oid=128292326&amp;loc=SL77918701-209980<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of lessee's undiscounted obligation for lease payment for operating lease due after fifth fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 50<br> -Paragraph 6<br> -URI https://asc.fasb.org/extlink&amp;oid=128292326&amp;loc=SL77918701-209980<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of lessee's undiscounted obligation for lease payment for operating lease to be paid in next fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 50<br> -Paragraph 6<br> -URI https://asc.fasb.org/extlink&amp;oid=128292326&amp;loc=SL77918701-209980<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFive">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of lessee's undiscounted obligation for lease payment for operating lease to be paid in fifth fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 50<br> -Paragraph 6<br> -URI https://asc.fasb.org/extlink&amp;oid=128292326&amp;loc=SL77918701-209980<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFive</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of lessee's undiscounted obligation for lease payment for operating lease to be paid in fourth fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 50<br> -Paragraph 6<br> -URI https://asc.fasb.org/extlink&amp;oid=128292326&amp;loc=SL77918701-209980<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of lessee's undiscounted obligation for lease payment for operating lease to be paid in third fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 50<br> -Paragraph 6<br> -URI https://asc.fasb.org/extlink&amp;oid=128292326&amp;loc=SL77918701-209980<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of lessee's undiscounted obligation for lease payment for operating lease to be paid in second fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 50<br> -Paragraph 6<br> -URI https://asc.fasb.org/extlink&amp;oid=128292326&amp;loc=SL77918701-209980<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of lessee's undiscounted obligation for lease payments in excess of discounted obligation for lease payments for operating lease.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 50<br> -Paragraph 6<br> -URI https://asc.fasb.org/extlink&amp;oid=128292326&amp;loc=SL77918701-209980<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OperatingLeaseLiability">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Present value of lessee's discounted obligation for lease payments from operating lease.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 45<br> -Paragraph 1<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=123391704&amp;loc=SL77918627-209977<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingLeaseLiability</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OperatingLeaseLiabilityCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Present value of lessee's discounted obligation for lease payments from operating lease, classified as current.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 45<br> -Paragraph 1<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=123391704&amp;loc=SL77918627-209977<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingLeaseLiabilityCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Indicates line item in statement of financial position that includes current operating lease liability.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 45<br> -Paragraph 2<br> -URI https://asc.fasb.org/extlink&amp;oid=123391704&amp;loc=SL77918631-209977<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>enum2:enumerationSetItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OperatingLeaseLiabilityNoncurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Present value of lessee's discounted obligation for lease payments from operating lease, classified as noncurrent.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 45<br> -Paragraph 1<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=123391704&amp;loc=SL77918627-209977<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingLeaseLiabilityNoncurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OperatingLeaseLiabilityStatementOfFinancialPositionExtensibleList">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Indicates line item in statement of financial position that includes operating lease liability.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 45<br> -Paragraph 2<br> -URI https://asc.fasb.org/extlink&amp;oid=123391704&amp;loc=SL77918631-209977<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingLeaseLiabilityStatementOfFinancialPositionExtensibleList</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>enum2:enumerationSetItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>81
<FILENAME>R68.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575601446720">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Commitments and Contingencies - Lease costs (Details) - USD ($)<br> $ in Millions</strong></div></th>
<th class="th" colspan="3">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LeaseCostAbstract', window );"><strong>Lease cost</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OperatingLeaseCost', window );">Operating lease cost</a></td>
<td class="nump">$ 7.4<span></span>
</td>
<td class="nump">$ 6.6<span></span>
</td>
<td class="nump">$ 5.4<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_VariableLeaseCost', window );">Variable lease cost</a></td>
<td class="nump">2.0<span></span>
</td>
<td class="nump">1.7<span></span>
</td>
<td class="nump">1.7<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LeaseCost', window );">Lease expense</a></td>
<td class="nump">9.4<span></span>
</td>
<td class="nump">8.4<span></span>
</td>
<td class="nump">7.1<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OperatingLeasePayments', window );">Operating cash flows from operating leases</a></td>
<td class="nump">$ 7.5<span></span>
</td>
<td class="nump">6.6<span></span>
</td>
<td class="nump">$ 6.9<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_ReimbursementForLeaseholdImprovements', window );">Amount of reimbursement for leasehold improvements</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 6.1<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LeaseCost">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of lease cost recognized by lessee for lease contract.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 50<br> -Paragraph 4<br> -URI https://asc.fasb.org/extlink&amp;oid=128292326&amp;loc=SL77918686-209980<br><br>Reference 2: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 55<br> -Paragraph 53<br> -URI https://asc.fasb.org/extlink&amp;oid=123414884&amp;loc=SL77918982-209971<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LeaseCost</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LeaseCostAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LeaseCostAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OperatingLeaseCost">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of single lease cost, calculated by allocation of remaining cost of lease over remaining lease term. Includes, but is not limited to, single lease cost, after impairment of right-of-use asset, calculated by amortization of remaining right-of-use asset and accretion of lease liability.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 55<br> -Paragraph 53<br> -URI https://asc.fasb.org/extlink&amp;oid=123414884&amp;loc=SL77918982-209971<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 50<br> -Paragraph 4<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=128292326&amp;loc=SL77918686-209980<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingLeaseCost</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OperatingLeasePayments">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of cash outflow from operating lease, excluding payments to bring another asset to condition and location necessary for its intended use.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 45<br> -Paragraph 5<br> -Subparagraph (c)<br> -URI https://asc.fasb.org/extlink&amp;oid=123391704&amp;loc=SL77918643-209977<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 50<br> -Paragraph 4<br> -Subparagraph (g)(1)<br> -URI https://asc.fasb.org/extlink&amp;oid=128292326&amp;loc=SL77918686-209980<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingLeasePayments</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_VariableLeaseCost">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of variable lease cost, excluded from lease liability, recognized when obligation for payment is incurred for finance and operating leases.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 50<br> -Paragraph 4<br> -Subparagraph (d)<br> -URI https://asc.fasb.org/extlink&amp;oid=128292326&amp;loc=SL77918686-209980<br><br>Reference 2: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 55<br> -Paragraph 53<br> -URI https://asc.fasb.org/extlink&amp;oid=123414884&amp;loc=SL77918982-209971<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_VariableLeaseCost</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_ReimbursementForLeaseholdImprovements">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of reimbursement from landlord for leasehold improvements as a reduction to cash outflow,</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_ReimbursementForLeaseholdImprovements</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>82
<FILENAME>R69.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575594182368">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Commitments and Contingencies - Legal Proceedings (Details)<br> $ in Millions</strong></div></th>
<th class="th" colspan="3">1 Months Ended</th>
</tr>
<tr>
<th class="th">
<div>Nov. 30, 2022 </div>
<div>USD ($)</div>
</th>
<th class="th">
<div>Oct. 31, 2021 </div>
<div>USD ($)</div>
</th>
<th class="th">
<div>Aug. 31, 2018 </div>
<div>case</div>
</th>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_srt_LitigationCaseAxis=veco_UltratechAcquisitionLitigationMember', window );">Ultratech acquisition litigation</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LossContingenciesLineItems', window );"><strong>Legal Proceedings</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LossContingencyNewClaimsFiledNumber', window );">Number of purported class action complaints filed | case</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">2<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_srt_LitigationCaseAxis=veco_WoltherActionMember', window );">Wolther Action</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LossContingenciesLineItems', window );"><strong>Legal Proceedings</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LitigationSettlementAmountAwardedToOtherParty', window );">Settlement amount</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 15.0<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_srt_LitigationCaseAxis=veco_DerivativeActionMember', window );">Derivative Action</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LossContingenciesLineItems', window );"><strong>Legal Proceedings</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LitigationSettlementAmountAwardedToOtherParty', window );">Settlement amount</a></td>
<td class="nump">$ 0.3<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LitigationSettlementAmountAwardedToOtherParty">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount awarded to other party in judgment or settlement of litigation.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LitigationSettlementAmountAwardedToOtherParty</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LossContingenciesLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LossContingenciesLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LossContingencyNewClaimsFiledNumber">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The total number of new claims filed pertaining to a loss contingency during the period.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 450<br> -SubTopic 20<br> -Section 50<br> -Paragraph 4<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=121557415&amp;loc=d3e14435-108349<br><br>Reference 2: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 450<br> -SubTopic 20<br> -Section 50<br> -Paragraph 9<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=121557415&amp;loc=d3e14557-108349<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LossContingencyNewClaimsFiledNumber</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:integerItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_LitigationCaseAxis=veco_UltratechAcquisitionLitigationMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_LitigationCaseAxis=veco_UltratechAcquisitionLitigationMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_LitigationCaseAxis=veco_WoltherActionMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_LitigationCaseAxis=veco_WoltherActionMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_LitigationCaseAxis=veco_DerivativeActionMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_LitigationCaseAxis=veco_DerivativeActionMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>83
<FILENAME>R70.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575591325008">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Commitments and Contingencies - Concentration of Credit Risk (Details) - customer<br></strong></div></th>
<th class="th" colspan="3">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_AccountsReceivableMember', window );">Accounts Receivable | Credit Concentration Risk | Top Ten Customers</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ConcentrationRiskLineItems', window );"><strong>Concentration of Credit Risk</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_NumberOfCustomers', window );">Number of customers</a></td>
<td class="nump">10<span></span>
</td>
<td class="nump">10<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ConcentrationRiskPercentage1', window );">Concentration Risk (as a percent)</a></td>
<td class="nump">63.00%<span></span>
</td>
<td class="nump">65.00%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_AccountsReceivableMember', window );">Accounts Receivable | Credit Concentration Risk | Customer A</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ConcentrationRiskLineItems', window );"><strong>Concentration of Credit Risk</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ConcentrationRiskPercentage1', window );">Concentration Risk (as a percent)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">14.00%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_AccountsReceivableMember', window );">Accounts Receivable | Credit Concentration Risk | Customer C</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ConcentrationRiskLineItems', window );"><strong>Concentration of Credit Risk</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ConcentrationRiskPercentage1', window );">Concentration Risk (as a percent)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">12.00%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_AccountsReceivableMember', window );">Accounts Receivable | Credit Concentration Risk | Customer D</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ConcentrationRiskLineItems', window );"><strong>Concentration of Credit Risk</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ConcentrationRiskPercentage1', window );">Concentration Risk (as a percent)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">10.00%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_AccountsReceivableMember', window );">Accounts Receivable | Credit Concentration Risk | Customer F</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ConcentrationRiskLineItems', window );"><strong>Concentration of Credit Risk</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ConcentrationRiskPercentage1', window );">Concentration Risk (as a percent)</a></td>
<td class="nump">10.00%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_SalesMember', window );">Net Sales | Customer Concentration Risk | Customer A</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ConcentrationRiskLineItems', window );"><strong>Concentration of Credit Risk</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ConcentrationRiskPercentage1', window );">Concentration Risk (as a percent)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">15.00%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_SalesMember', window );">Net Sales | Customer Concentration Risk | Customer B</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ConcentrationRiskLineItems', window );"><strong>Concentration of Credit Risk</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ConcentrationRiskPercentage1', window );">Concentration Risk (as a percent)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">10.00%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_SalesMember', window );">Net Sales | Customer Concentration Risk | Customer E</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ConcentrationRiskLineItems', window );"><strong>Concentration of Credit Risk</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ConcentrationRiskPercentage1', window );">Concentration Risk (as a percent)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">13.00%<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ConcentrationRiskLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ConcentrationRiskLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ConcentrationRiskPercentage1">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>For an entity that discloses a concentration risk in relation to quantitative amount, which serves as the "benchmark" (or denominator) in the equation, this concept represents the concentration percentage derived from the division.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 42<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e9054-108599<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 275<br> -SubTopic 10<br> -Section 50<br> -Paragraph 18<br> -URI https://asc.fasb.org/extlink&amp;oid=99393423&amp;loc=d3e6351-108592<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 825<br> -SubTopic 10<br> -Section 50<br> -Paragraph 20<br> -URI https://asc.fasb.org/extlink&amp;oid=123594938&amp;loc=d3e13531-108611<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 825<br> -SubTopic 10<br> -Section 50<br> -Paragraph 21<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=123594938&amp;loc=d3e13537-108611<br><br>Reference 5: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 275<br> -SubTopic 10<br> -Section 50<br> -Paragraph 20<br> -URI https://asc.fasb.org/extlink&amp;oid=99393423&amp;loc=d3e6404-108592<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ConcentrationRiskPercentage1</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_NumberOfCustomers">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Number of customers.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_NumberOfCustomers</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:integerItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_AccountsReceivableMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_AccountsReceivableMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ConcentrationRiskByTypeAxis=us-gaap_CreditConcentrationRiskMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ConcentrationRiskByTypeAxis=us-gaap_CreditConcentrationRiskMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_MajorCustomersAxis=veco_TopTenCustomersMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_MajorCustomersAxis=veco_TopTenCustomersMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_MajorCustomersAxis=veco_CustomerAMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_MajorCustomersAxis=veco_CustomerAMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_MajorCustomersAxis=veco_CustomerCMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_MajorCustomersAxis=veco_CustomerCMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_MajorCustomersAxis=veco_CustomerDMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_MajorCustomersAxis=veco_CustomerDMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_MajorCustomersAxis=veco_CustomerFMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_MajorCustomersAxis=veco_CustomerFMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_SalesMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_SalesMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ConcentrationRiskByTypeAxis=us-gaap_CustomerConcentrationRiskMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ConcentrationRiskByTypeAxis=us-gaap_CustomerConcentrationRiskMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_MajorCustomersAxis=veco_CustomerBMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_MajorCustomersAxis=veco_CustomerBMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_MajorCustomersAxis=veco_CustomerEMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_MajorCustomersAxis=veco_CustomerEMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>84
<FILENAME>R71.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575601849840">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Commitments and Contingencies - Receivables (Details)<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2022</div></th></tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_srt_RangeAxis=srt_MinimumMember', window );">Minimum | Geographic location, One</a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ConcentrationRiskLineItems', window );"><strong>Concentration of Credit Risk</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_AccountsReceivableCreditPeriod', window );">Credit period for accounts receivable</a></td>
<td class="text">30 days<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_srt_RangeAxis=srt_MaximumMember', window );">Maximum | Geographic location, One</a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ConcentrationRiskLineItems', window );"><strong>Concentration of Credit Risk</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_AccountsReceivableCreditPeriod', window );">Credit period for accounts receivable</a></td>
<td class="text">90 days<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_srt_RangeAxis=srt_MaximumMember', window );">Maximum | Geographic location, Two</a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ConcentrationRiskLineItems', window );"><strong>Concentration of Credit Risk</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_AccountsReceivableCreditPeriod', window );">Credit period for accounts receivable</a></td>
<td class="text">150 days<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ConcentrationRiskLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ConcentrationRiskLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_AccountsReceivableCreditPeriod">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The credit period for accounts receivable.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_AccountsReceivableCreditPeriod</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_RangeAxis=srt_MinimumMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_RangeAxis=srt_MinimumMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_StatementGeographicalAxis=veco_GeographicLocationOneMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_StatementGeographicalAxis=veco_GeographicLocationOneMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_RangeAxis=srt_MaximumMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_RangeAxis=srt_MaximumMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_StatementGeographicalAxis=veco_GeographicLocationTwoMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_StatementGeographicalAxis=veco_GeographicLocationTwoMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>85
<FILENAME>R72.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575602125552">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Commitments and Contingencies - Receivable Purchase Agreement (Details) - USD ($)<br> $ in Millions</strong></div></th>
<th class="th" colspan="2">12 Months Ended</th>
<th class="th" colspan="1"></th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_CommitmentsAndContingenciesDisclosureAbstract', window );"><strong>Commitments and Contingencies</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_ReceivablePurchaseAgreementMaximumAmount', window );">Maximum amount of trade receivables to be sold under agreement</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 15.0<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_TradeReceivablesSoldUnderReceivablePurchaseAgreement', window );">Receivables sold</a></td>
<td class="nump">$ 13.2<span></span>
</td>
<td class="nump">$ 0.0<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_TradeReceivablesUnderReceivablePurchaseAgreementOutstanding', window );">Receivables sold remaining outstanding</a></td>
<td class="nump">5.4<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_ReceivablePurchaseAgreementAmountAvailable', window );">Amount of trade receivables available to be sold under agreement</a></td>
<td class="nump">$ 9.6<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CommitmentsAndContingenciesDisclosureAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CommitmentsAndContingenciesDisclosureAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_ReceivablePurchaseAgreementAmountAvailable">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of trade receivables available to be sold from customers without recourse under the terms of the receivable purchase agreement.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_ReceivablePurchaseAgreementAmountAvailable</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_ReceivablePurchaseAgreementMaximumAmount">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Maximum amount of trade receivables from customers to be sold without recourse under the terms of the receivable purchase agreement.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_ReceivablePurchaseAgreementMaximumAmount</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_TradeReceivablesSoldUnderReceivablePurchaseAgreement">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of accounts receivable that has been sold to other entities.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_TradeReceivablesSoldUnderReceivablePurchaseAgreement</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_TradeReceivablesUnderReceivablePurchaseAgreementOutstanding">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of accounts receivable sold under receivable purchase agreement that remains outstanding.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_TradeReceivablesUnderReceivablePurchaseAgreementOutstanding</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>86
<FILENAME>R73.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575599530400">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Commitments and Contingencies - Suppliers (Details) - USD ($)<br> $ in Millions</strong></div></th>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PurchaseObligationFiscalYearMaturityAbstract', window );"><strong>Purchase Commitments</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DepositAssets', window );">Deposits with suppliers</a></td>
<td class="nump">$ 9.4<span></span>
</td>
<td class="nump">$ 3.9<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DepositAssets">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The carrying amount of the asset transferred to a third party to serve as a deposit, which typically serves as security against failure by the transferor to perform under terms of an agreement.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(17))<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DepositAssets</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PurchaseObligationFiscalYearMaturityAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PurchaseObligationFiscalYearMaturityAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>87
<FILENAME>R74.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575599462464">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Commitments and Contingencies - Purchase Commitments and Bank Guarantees (Details)<br> $ in Millions</strong></div></th>
<th class="th">
<div>Dec. 31, 2022 </div>
<div>USD ($)</div>
</th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PurchaseObligationFiscalYearMaturityAbstract', window );"><strong>Purchase commitments</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_UnrecordedUnconditionalPurchaseObligationDueInNextRollingTwelveMonths', window );">Purchase commitments due within one year</a></td>
<td class="nump">$ 289.2<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_GuaranteesAbstract', window );"><strong>Bank guarantees</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_GuaranteeObligationsCurrentCarryingValue', window );">Bank guarantees and letters of credit outstanding</a></td>
<td class="nump">8.2<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LineOfCreditFacilityRemainingBorrowingCapacity', window );">Unused bank guarantees and letters of credit</a></td>
<td class="nump">$ 14.1<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_GuaranteeObligationsCurrentCarryingValue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The current carrying amount of the liability for the freestanding or embedded guarantor's obligations under the guarantee or each group of similar guarantees.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 460<br> -SubTopic 10<br> -Section 50<br> -Paragraph 4<br> -Subparagraph (c)<br> -URI https://asc.fasb.org/extlink&amp;oid=124440162&amp;loc=d3e12069-110248<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_GuaranteeObligationsCurrentCarryingValue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_GuaranteesAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_GuaranteesAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LineOfCreditFacilityRemainingBorrowingCapacity">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of borrowing capacity currently available under the credit facility (current borrowing capacity less the amount of borrowings outstanding).</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.19(b),22(b))<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LineOfCreditFacilityRemainingBorrowingCapacity</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PurchaseObligationFiscalYearMaturityAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PurchaseObligationFiscalYearMaturityAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_UnrecordedUnconditionalPurchaseObligationDueInNextRollingTwelveMonths">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of the fixed and determinable portion of the unrecorded unconditional purchase obligation maturing in the next rolling twelve months following the latest balance sheet. For interim and annual periods when interim periods are reported on a rolling approach, from latest balance sheet date.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_UnrecordedUnconditionalPurchaseObligationDueInNextRollingTwelveMonths</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>88
<FILENAME>R75.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575595864576">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Debt - 2023. 2025 and 2027 Notes (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="1"></th>
<th class="th" colspan="1"></th>
<th class="th" colspan="1"></th>
<th class="th" colspan="1"></th>
<th class="th" colspan="2">12 Months Ended</th>
<th class="th" colspan="1"></th>
<th class="th" colspan="1"></th>
</tr>
<tr>
<th class="th"><div>Nov. 05, 2021</div></th>
<th class="th"><div>Nov. 11, 2020</div></th>
<th class="th"><div>May 18, 2020</div></th>
<th class="th"><div>Jan. 10, 2017</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Nov. 17, 2020</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentLineItems', window );"><strong>Debt</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentFaceAmount', window );">Principal amount</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 277,673<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 277,673<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ProceedsFromConvertibleDebt', window );">Proceeds, net of issuance costs</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 120,095<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_RepaymentsOfUnsecuredDebt', window );">Cash paid for repurchase of notes</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">115,604<span></span>
</td>
<td class="nump">81,240<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_GainsLossesOnExtinguishmentOfDebt', window );">Loss on extinguishment of debt</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(4,029)<span></span>
</td>
<td class="num">(7,841)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PaymentsForDerivativeInstrumentFinancingActivities', window );">Purchase of capped calls</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 10,300<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">10,313<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_AdjustmentsToAdditionalPaidInCapitalExtinguishmentEquityComponentOfNotesRepurchased', window );">Reduction of additional paid-in capital for extinguishment of equity component of note repurchased/exchanged</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">6,080<span></span>
</td>
<td class="nump">$ 14,714<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentAxis=veco_ConvertibleSeniorUnsecuredNotesDue2023Member', window );">2023 Notes</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentLineItems', window );"><strong>Debt</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentFaceAmount', window );">Principal amount</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 345,000<span></span>
</td>
<td class="nump">20,173<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">20,173<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentInterestRateStatedPercentage', window );">Interest rate (as a percent)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">2.70%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ProceedsFromConvertibleDebt', window );">Proceeds, net of issuance costs</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 335,800<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ExtinguishmentOfDebtAmount', window );">Repurchased and retired amount</a></td>
<td class="nump">$ 111,500<span></span>
</td>
<td class="nump">$ 125,000<span></span>
</td>
<td class="nump">88,300<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_DebtInstrumentCarryingAmountDebtExtinguished', window );">Carrying amount of debt extinguished</a></td>
<td class="nump">105,500<span></span>
</td>
<td class="nump">113,100<span></span>
</td>
<td class="nump">78,100<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_RepaymentsOfUnsecuredDebt', window );">Cash paid for repurchase of notes</a></td>
<td class="nump">115,600<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">81,200<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_AdjustmentsToAdditionalPaidInCapitalExtinguishmentEquityComponentOfNotesRepurchased', window );">Reduction of additional paid-in capital for extinguishment of equity component of note repurchased/exchanged</a></td>
<td class="nump">6,100<span></span>
</td>
<td class="nump">14,600<span></span>
</td>
<td class="nump">100<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_InterestPayableCurrentAndNoncurrent', window );">Accrued and unpaid interest</a></td>
<td class="nump">$ 1,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentAxis=veco_ConvertibleSeniorUnsecuredNotesDue2023Member', window );">2023 Notes | Other income (expense), net</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentLineItems', window );"><strong>Debt</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_GainsLossesOnExtinguishmentOfDebt', window );">Loss on extinguishment of debt</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 4,800<span></span>
</td>
<td class="nump">3,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">4,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentAxis=veco_ConvertibleSeniorUnsecuredNotesDue2025Member', window );">2025 Notes</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentLineItems', window );"><strong>Debt</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentFaceAmount', window );">Principal amount</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">132,500<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">132,500<span></span>
</td>
<td class="nump">$ 132,500<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentInterestRateStatedPercentage', window );">Interest rate (as a percent)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">3.50%<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentAxis=veco_ConvertibleSeniorUnsecuredNotesDue2027Member', window );">2027 Notes</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentLineItems', window );"><strong>Debt</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentFaceAmount', window );">Principal amount</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 125,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 125,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 125,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentInterestRateStatedPercentage', window );">Interest rate (as a percent)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">3.75%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ProceedsFromConvertibleDebt', window );">Proceeds, net of issuance costs</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 121,900<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtInstrumentFaceAmount">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Face (par) amount of debt instrument at time of issuance.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1B<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=123466505&amp;loc=SL123495323-112611<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 835<br> -SubTopic 30<br> -Section 45<br> -Paragraph 2<br> -URI https://asc.fasb.org/extlink&amp;oid=124435984&amp;loc=d3e28551-108399<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 835<br> -SubTopic 30<br> -Section 55<br> -Paragraph 8<br> -URI https://asc.fasb.org/extlink&amp;oid=114775985&amp;loc=d3e28878-108400<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 835<br> -SubTopic 30<br> -Section 50<br> -Paragraph 1<br> -URI https://asc.fasb.org/extlink&amp;oid=124429444&amp;loc=SL124452920-239629<br><br>Reference 5: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 55<br> -Paragraph 69C<br> -URI https://asc.fasb.org/extlink&amp;oid=123466577&amp;loc=SL123495737-112612<br><br>Reference 6: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 55<br> -Paragraph 69B<br> -URI https://asc.fasb.org/extlink&amp;oid=123466577&amp;loc=SL123495735-112612<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtInstrumentFaceAmount</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtInstrumentInterestRateStatedPercentage">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Contractual interest rate for funds borrowed, under the debt agreement.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1B<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=123466505&amp;loc=SL123495323-112611<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.22(a)(1))<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtInstrumentInterestRateStatedPercentage</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtInstrumentLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtInstrumentLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ExtinguishmentOfDebtAmount">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Gross amount of debt extinguished.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ExtinguishmentOfDebtAmount</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_GainsLossesOnExtinguishmentOfDebt">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Difference between the fair value of payments made and the carrying amount of debt which is extinguished prior to maturity.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 50<br> -Section 40<br> -Paragraph 4<br> -URI https://asc.fasb.org/extlink&amp;oid=126972273&amp;loc=d3e12355-112629<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 50<br> -Section 40<br> -Paragraph 2<br> -URI https://asc.fasb.org/extlink&amp;oid=126972273&amp;loc=d3e12317-112629<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=126954810&amp;loc=d3e3602-108585<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_GainsLossesOnExtinguishmentOfDebt</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InterestPayableCurrentAndNoncurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of interest payable on debt, including, but not limited to, trade payables.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 210<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-03.15(5))<br> -URI https://asc.fasb.org/extlink&amp;oid=126897435&amp;loc=d3e534808-122878<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 210<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-03.15(a))<br> -URI https://asc.fasb.org/extlink&amp;oid=126734703&amp;loc=d3e572229-122910<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InterestPayableCurrentAndNoncurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PaymentsForDerivativeInstrumentFinancingActivities">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The cash outflow for derivative instruments during the period, which are classified as financing activities, excluding those designated as hedging instruments.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 15<br> -Subparagraph (d)<br> -URI https://asc.fasb.org/extlink&amp;oid=126954810&amp;loc=d3e3291-108585<br><br>Reference 2: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 23<br> -URI https://asc.fasb.org/extlink&amp;oid=126954810&amp;loc=d3e3505-108585<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PaymentsForDerivativeInstrumentFinancingActivities</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProceedsFromConvertibleDebt">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The cash inflow from the issuance of a long-term debt instrument which can be exchanged for a specified amount of another security, typically the entity's common stock, at the option of the issuer or the holder.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 14<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=126954810&amp;loc=d3e3255-108585<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProceedsFromConvertibleDebt</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RepaymentsOfUnsecuredDebt">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The cash outflow to repay long-term debt that is not secured by collateral. Excludes repayments of tax exempt unsecured debt.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 15<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=126954810&amp;loc=d3e3291-108585<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RepaymentsOfUnsecuredDebt</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_AdjustmentsToAdditionalPaidInCapitalExtinguishmentEquityComponentOfNotesRepurchased">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of adjustment to additional paid in capital (APIC) resulting from extinguishment of equity component of repurchased or exchanged notes.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_AdjustmentsToAdditionalPaidInCapitalExtinguishmentEquityComponentOfNotesRepurchased</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_DebtInstrumentCarryingAmountDebtExtinguished">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Carrying amount of debt extinguished (decrease in carrying amount of debt).</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_DebtInstrumentCarryingAmountDebtExtinguished</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtInstrumentAxis=veco_ConvertibleSeniorUnsecuredNotesDue2023Member">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtInstrumentAxis=veco_ConvertibleSeniorUnsecuredNotesDue2023Member</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeStatementLocationAxis=us-gaap_OtherNonoperatingIncomeExpenseMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeStatementLocationAxis=us-gaap_OtherNonoperatingIncomeExpenseMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtInstrumentAxis=veco_ConvertibleSeniorUnsecuredNotesDue2025Member">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtInstrumentAxis=veco_ConvertibleSeniorUnsecuredNotesDue2025Member</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtInstrumentAxis=veco_ConvertibleSeniorUnsecuredNotesDue2027Member">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtInstrumentAxis=veco_ConvertibleSeniorUnsecuredNotesDue2027Member</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>89
<FILENAME>R76.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575591191120">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Debt - Convertible Senior Notes (Details)<br></strong></div></th>
<th class="th" colspan="1"></th>
<th class="th" colspan="1"></th>
<th class="th" colspan="1"></th>
<th class="th" colspan="2">12 Months Ended</th>
</tr>
<tr>
<th class="th">
<div>Nov. 17, 2020 </div>
<div>USD ($) </div>
<div>$ / shares</div>
</th>
<th class="th">
<div>May 18, 2020 </div>
<div>USD ($) </div>
<div>$ / shares</div>
</th>
<th class="th">
<div>Jan. 10, 2017 </div>
<div>USD ($) </div>
<div>$ / shares</div>
</th>
<th class="th">
<div>Dec. 31, 2022 </div>
<div>USD ($) </div>
<div>D</div>
</th>
<th class="th">
<div>Dec. 31, 2021 </div>
<div>USD ($)</div>
</th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentLineItems', window );"><strong>Debt</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PaymentsOfDebtIssuanceCosts', window );">Transaction costs</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 835,000<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LongTermDebtMeasurementInputExtensibleList', window );">Long-term Debt, Measurement Input</a></td>
<td class="text">us-gaap:MeasurementInputDiscountRateMember<span></span>
</td>
<td class="text">us-gaap:MeasurementInputDiscountRateMember<span></span>
</td>
<td class="text">us-gaap:MeasurementInputDiscountRateMember<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentAxis=us-gaap_ConvertibleDebtMember', window );">Convertible Notes</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentLineItems', window );"><strong>Debt</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_DebtInstrumentPrincipalAmountDenominationForConversionIntoCommonStock', window );">Multiples of principal holders may convert</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">1,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentConvertibleThresholdTradingDays', window );">Trading days</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">5<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentConvertibleThresholdConsecutiveTradingDays1', window );">Consecutive trading days | D</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">30<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentConvertibleThresholdPercentageOfStockPriceTrigger', window );">Stock price trigger (as a percent)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">130.00%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_DebtInstrumentNumberOfConsecutiveBusinessDays', window );">Number of consecutive business days</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">5 days<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_DebtInstrumentsConvertibleFeaturesMaximumPercentageOfCommonStockCouldBeConverted', window );">Maximum percentage of common stock conversion</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">98.00%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentAxis=us-gaap_ConvertibleDebtMember', window );">Convertible Notes | Minimum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentLineItems', window );"><strong>Debt</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentConvertibleThresholdTradingDays', window );">Trading days | D</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">20<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentAxis=veco_ConvertibleSeniorUnsecuredNotesDue2023Member', window );">2023 Notes</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentLineItems', window );"><strong>Debt</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentConvertibleConversionRatio1', window );">Conversion rate</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">0.0249800<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentConvertibleConversionPrice1', window );">Conversion price (in dollars per share) | $ / shares</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 40.03<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PaymentsOfDebtIssuanceCosts', window );">Transaction costs</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 9,200,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LongTermDebtMeasurementInput', window );">Measurement input</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">7.0<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentUnamortizedDiscount', window );">Debt discount</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 72,500,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_DebtIssuanceCostsTransactionCostsAllocatedToEquityComponent', window );">Transaction costs allocated to the equity component</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 1,900,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentAxis=veco_ConvertibleSeniorUnsecuredNotesDue2025Member', window );">2025 Notes</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentLineItems', window );"><strong>Debt</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentConvertibleConversionRatio1', window );">Conversion rate</a></td>
<td class="nump">0.0416667<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentConvertibleConversionPrice1', window );">Conversion price (in dollars per share) | $ / shares</a></td>
<td class="nump">$ 24.00<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PaymentsOfDebtIssuanceCosts', window );">Transaction costs</a></td>
<td class="nump">$ 1,900,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LongTermDebtMeasurementInput', window );">Measurement input</a></td>
<td class="nump">8.0<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentUnamortizedDiscount', window );">Debt discount</a></td>
<td class="nump">$ 21,000,000.0<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_DebtIssuanceCostsTransactionCostsAllocatedToEquityComponent', window );">Transaction costs allocated to the equity component</a></td>
<td class="nump">$ 300,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentAxis=veco_ConvertibleSeniorUnsecuredNotesDue2027Member', window );">2027 Notes</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentLineItems', window );"><strong>Debt</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentConvertibleConversionRatio1', window );">Conversion rate</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">0.0715372<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentConvertibleConversionPrice1', window );">Conversion price (in dollars per share) | $ / shares</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 13.98<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PaymentsOfDebtIssuanceCosts', window );">Transaction costs</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 3,100,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LongTermDebtMeasurementInput', window );">Measurement input</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">9.1<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentUnamortizedDiscount', window );">Debt discount</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 34,200,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_DebtIssuanceCostsTransactionCostsAllocatedToEquityComponent', window );">Transaction costs allocated to the equity component</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 800,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtInstrumentConvertibleConversionPrice1">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The price per share of the conversion feature embedded in the debt instrument.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 50<br> -Paragraph 5<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=123466204&amp;loc=SL6031898-161870<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1B<br> -Subparagraph (c)<br> -URI https://asc.fasb.org/extlink&amp;oid=123466505&amp;loc=SL123495323-112611<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtInstrumentConvertibleConversionPrice1</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtInstrumentConvertibleConversionRatio1">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Ratio applied to the conversion of debt instrument into equity with equity shares divided by debt principal amount.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1B<br> -Subparagraph (c)<br> -URI https://asc.fasb.org/extlink&amp;oid=123466505&amp;loc=SL123495323-112611<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section 50<br> -Paragraph 7<br> -URI https://asc.fasb.org/extlink&amp;oid=126973232&amp;loc=d3e21521-112644<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section 50<br> -Paragraph 6<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=126973232&amp;loc=d3e21506-112644<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.22(a)(5))<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 5: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -URI https://asc.fasb.org/extlink&amp;oid=126973232&amp;loc=d3e21475-112644<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtInstrumentConvertibleConversionRatio1</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:pureItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtInstrumentConvertibleThresholdConsecutiveTradingDays1">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Threshold period of specified consecutive trading days within which common stock price to conversion price of convertible debt instrument must exceed threshold percentage for specified number of trading days to trigger conversion feature.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtInstrumentConvertibleThresholdConsecutiveTradingDays1</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:integerItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtInstrumentConvertibleThresholdPercentageOfStockPriceTrigger">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Minimum percentage of common stock price to conversion price of convertible debt instruments to determine eligibility of conversion.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtInstrumentConvertibleThresholdPercentageOfStockPriceTrigger</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtInstrumentConvertibleThresholdTradingDays">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Threshold number of specified trading days that common stock price to conversion price of convertible debt instruments must exceed threshold percentage within a specified consecutive trading period to trigger conversion feature.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtInstrumentConvertibleThresholdTradingDays</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:integerItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtInstrumentLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtInstrumentLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtInstrumentUnamortizedDiscount">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount, after accumulated amortization, of debt discount.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 835<br> -SubTopic 30<br> -Section 45<br> -Paragraph 1A<br> -URI https://asc.fasb.org/extlink&amp;oid=124435984&amp;loc=d3e28541-108399<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 835<br> -SubTopic 30<br> -Section 55<br> -Paragraph 8<br> -URI https://asc.fasb.org/extlink&amp;oid=114775985&amp;loc=d3e28878-108400<br><br>Reference 3: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1D<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=123466505&amp;loc=SL123495340-112611<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtInstrumentUnamortizedDiscount</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LongTermDebtMeasurementInput">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Value of input used to measure long-term debt.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 820<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (bbb)(2)<br> -URI https://asc.fasb.org/extlink&amp;oid=126976982&amp;loc=d3e19207-110258<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LongTermDebtMeasurementInput</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:decimalItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LongTermDebtMeasurementInputExtensibleList">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Indicates measurement input for long-term debt.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 820<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (bbb)(1)<br> -URI https://asc.fasb.org/extlink&amp;oid=126976982&amp;loc=d3e19207-110258<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LongTermDebtMeasurementInputExtensibleList</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>enum2:enumerationSetItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PaymentsOfDebtIssuanceCosts">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The cash outflow paid to third parties in connection with debt origination, which will be amortized over the remaining maturity period of the associated long-term debt.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 15<br> -Subparagraph (e)<br> -URI https://asc.fasb.org/extlink&amp;oid=126954810&amp;loc=d3e3291-108585<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PaymentsOfDebtIssuanceCosts</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_DebtInstrumentNumberOfConsecutiveBusinessDays">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Period of time between issuance and maturity of debt instrument, in PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_DebtInstrumentNumberOfConsecutiveBusinessDays</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_DebtInstrumentPrincipalAmountDenominationForConversionIntoCommonStock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Represents the multiples of the principal amount of debt that holders may convert at their option under circumstances specified under the agreement.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_DebtInstrumentPrincipalAmountDenominationForConversionIntoCommonStock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:decimalItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_DebtInstrumentsConvertibleFeaturesMaximumPercentageOfCommonStockCouldBeConverted">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Maximum percentage of common stock converted.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_DebtInstrumentsConvertibleFeaturesMaximumPercentageOfCommonStockCouldBeConverted</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_DebtIssuanceCostsTransactionCostsAllocatedToEquityComponent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The amount of Transaction costs allocated to the equity component .</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_DebtIssuanceCostsTransactionCostsAllocatedToEquityComponent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtInstrumentAxis=us-gaap_ConvertibleDebtMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtInstrumentAxis=us-gaap_ConvertibleDebtMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_RangeAxis=srt_MinimumMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_RangeAxis=srt_MinimumMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtInstrumentAxis=veco_ConvertibleSeniorUnsecuredNotesDue2023Member">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtInstrumentAxis=veco_ConvertibleSeniorUnsecuredNotesDue2023Member</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtInstrumentAxis=veco_ConvertibleSeniorUnsecuredNotesDue2025Member">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtInstrumentAxis=veco_ConvertibleSeniorUnsecuredNotesDue2025Member</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtInstrumentAxis=veco_ConvertibleSeniorUnsecuredNotesDue2027Member">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtInstrumentAxis=veco_ConvertibleSeniorUnsecuredNotesDue2027Member</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>90
<FILENAME>R77.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575591531648">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Debt - Carrying Value (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Nov. 17, 2020</div></th>
<th class="th"><div>May 18, 2020</div></th>
<th class="th"><div>Jan. 10, 2017</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentLineItems', window );"><strong>Debt</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentFaceAmount', window );">Principal amount</a></td>
<td class="nump">$ 277,673<span></span>
</td>
<td class="nump">$ 277,673<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentUnamortizedDiscountPremiumAndDebtIssuanceCostsNet', window );">Unamortized debt discount/transaction costs</a></td>
<td class="num">(3,013)<span></span>
</td>
<td class="num">(48,235)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LongTermDebt', window );">Net carrying value</a></td>
<td class="nump">274,660<span></span>
</td>
<td class="nump">229,438<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentAxis=veco_ConvertibleSeniorUnsecuredNotesDue2023Member', window );">2023 Notes</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentLineItems', window );"><strong>Debt</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentFaceAmount', window );">Principal amount</a></td>
<td class="nump">20,173<span></span>
</td>
<td class="nump">20,173<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 345,000<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentUnamortizedDiscountPremiumAndDebtIssuanceCostsNet', window );">Unamortized debt discount/transaction costs</a></td>
<td class="num">(4)<span></span>
</td>
<td class="num">(967)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LongTermDebt', window );">Net carrying value</a></td>
<td class="nump">20,169<span></span>
</td>
<td class="nump">19,206<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentAxis=veco_ConvertibleSeniorUnsecuredNotesDue2025Member', window );">2025 Notes</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentLineItems', window );"><strong>Debt</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentFaceAmount', window );">Principal amount</a></td>
<td class="nump">132,500<span></span>
</td>
<td class="nump">132,500<span></span>
</td>
<td class="nump">$ 132,500<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentUnamortizedDiscountPremiumAndDebtIssuanceCostsNet', window );">Unamortized debt discount/transaction costs</a></td>
<td class="num">(990)<span></span>
</td>
<td class="num">(17,302)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LongTermDebt', window );">Net carrying value</a></td>
<td class="nump">131,510<span></span>
</td>
<td class="nump">115,198<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentAxis=veco_ConvertibleSeniorUnsecuredNotesDue2027Member', window );">2027 Notes</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentLineItems', window );"><strong>Debt</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentFaceAmount', window );">Principal amount</a></td>
<td class="nump">125,000<span></span>
</td>
<td class="nump">125,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 125,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentUnamortizedDiscountPremiumAndDebtIssuanceCostsNet', window );">Unamortized debt discount/transaction costs</a></td>
<td class="num">(2,019)<span></span>
</td>
<td class="num">(29,966)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LongTermDebt', window );">Net carrying value</a></td>
<td class="nump">$ 122,981<span></span>
</td>
<td class="nump">$ 95,034<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtInstrumentFaceAmount">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Face (par) amount of debt instrument at time of issuance.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1B<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=123466505&amp;loc=SL123495323-112611<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 835<br> -SubTopic 30<br> -Section 45<br> -Paragraph 2<br> -URI https://asc.fasb.org/extlink&amp;oid=124435984&amp;loc=d3e28551-108399<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 835<br> -SubTopic 30<br> -Section 55<br> -Paragraph 8<br> -URI https://asc.fasb.org/extlink&amp;oid=114775985&amp;loc=d3e28878-108400<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 835<br> -SubTopic 30<br> -Section 50<br> -Paragraph 1<br> -URI https://asc.fasb.org/extlink&amp;oid=124429444&amp;loc=SL124452920-239629<br><br>Reference 5: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 55<br> -Paragraph 69C<br> -URI https://asc.fasb.org/extlink&amp;oid=123466577&amp;loc=SL123495737-112612<br><br>Reference 6: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 55<br> -Paragraph 69B<br> -URI https://asc.fasb.org/extlink&amp;oid=123466577&amp;loc=SL123495735-112612<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtInstrumentFaceAmount</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtInstrumentLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtInstrumentLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtInstrumentUnamortizedDiscountPremiumAndDebtIssuanceCostsNet">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of unamortized debt discount (premium) and debt issuance costs.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 55<br> -Paragraph 69C<br> -URI https://asc.fasb.org/extlink&amp;oid=123466577&amp;loc=SL123495737-112612<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 50<br> -Paragraph 4<br> -Subparagraph (b)(2)<br> -URI https://asc.fasb.org/extlink&amp;oid=123466204&amp;loc=SL6031897-161870<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1D<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=123466505&amp;loc=SL123495340-112611<br><br>Reference 4: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 55<br> -Paragraph 69B<br> -URI https://asc.fasb.org/extlink&amp;oid=123466577&amp;loc=SL123495735-112612<br><br>Reference 5: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 835<br> -SubTopic 30<br> -Section 45<br> -Paragraph 3<br> -URI https://asc.fasb.org/extlink&amp;oid=124435984&amp;loc=d3e28555-108399<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtInstrumentUnamortizedDiscountPremiumAndDebtIssuanceCostsNet</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LongTermDebt">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount, excluding unamortized premium (discount) and debt issuance cost, of long-term debt. Excludes lease obligation.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 50<br> -Paragraph 4<br> -Subparagraph (b)(3)<br> -URI https://asc.fasb.org/extlink&amp;oid=123466204&amp;loc=SL6031897-161870<br><br>Reference 2: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 55<br> -Paragraph 69C<br> -URI https://asc.fasb.org/extlink&amp;oid=123466577&amp;loc=SL123495737-112612<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 210<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-03(a)(16))<br> -URI https://asc.fasb.org/extlink&amp;oid=126734703&amp;loc=d3e572229-122910<br><br>Reference 4: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 55<br> -Paragraph 69B<br> -URI https://asc.fasb.org/extlink&amp;oid=123466577&amp;loc=SL123495735-112612<br><br>Reference 5: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 210<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-03(16))<br> -URI https://asc.fasb.org/extlink&amp;oid=126897435&amp;loc=d3e534808-122878<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1D<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=123466505&amp;loc=SL123495340-112611<br><br>Reference 7: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(22))<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LongTermDebt</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtInstrumentAxis=veco_ConvertibleSeniorUnsecuredNotesDue2023Member">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtInstrumentAxis=veco_ConvertibleSeniorUnsecuredNotesDue2023Member</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtInstrumentAxis=veco_ConvertibleSeniorUnsecuredNotesDue2025Member">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtInstrumentAxis=veco_ConvertibleSeniorUnsecuredNotesDue2025Member</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtInstrumentAxis=veco_ConvertibleSeniorUnsecuredNotesDue2027Member">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
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<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtInstrumentAxis=veco_ConvertibleSeniorUnsecuredNotesDue2027Member</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>91
<FILENAME>R78.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575596036016">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Debt - Interest Expense (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="3">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_NonCashInterestExpenseAbstract', window );"><strong>Non-Cash Interest Expense</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AmortizationOfFinancingCostsAndDiscounts', window );">Amortization of debt discount/transaction costs</a></td>
<td class="nump">$ 962<span></span>
</td>
<td class="nump">$ 13,819<span></span>
</td>
<td class="nump">$ 13,792<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_InterestExpenseDebt', window );">Total Interest Expense</a></td>
<td class="nump">10,832<span></span>
</td>
<td class="nump">26,282<span></span>
</td>
<td class="nump">24,640<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentAxis=veco_ConvertibleSeniorUnsecuredNotesDue2023Member', window );">2023 Notes</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_CashInterestExpenseAbstract', window );"><strong>Cash Interest Expense</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_InterestExpenseDebtExcludingAmortization', window );">Coupon interest expense</a></td>
<td class="nump">545<span></span>
</td>
<td class="nump">3,138<span></span>
</td>
<td class="nump">7,390<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_NonCashInterestExpenseAbstract', window );"><strong>Non-Cash Interest Expense</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AmortizationOfFinancingCostsAndDiscounts', window );">Amortization of debt discount/transaction costs</a></td>
<td class="nump">97<span></span>
</td>
<td class="nump">4,932<span></span>
</td>
<td class="nump">10,887<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ConvertibleDebtFairValueDisclosures', window );">Estimated fair value</a></td>
<td class="nump">$ 19,500<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ConvertibleDebtFairValueByFairValueHierarchyLevelExtensibleList', window );">Convertible Debt, Fair Value by Fair Value Hierarchy Level</a></td>
<td class="text">Level 2<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentAxis=veco_ConvertibleSeniorUnsecuredNotesDue2025Member', window );">2025 Notes</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_CashInterestExpenseAbstract', window );"><strong>Cash Interest Expense</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_InterestExpenseDebtExcludingAmortization', window );">Coupon interest expense</a></td>
<td class="nump">$ 4,637<span></span>
</td>
<td class="nump">4,637<span></span>
</td>
<td class="nump">554<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_NonCashInterestExpenseAbstract', window );"><strong>Non-Cash Interest Expense</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AmortizationOfFinancingCostsAndDiscounts', window );">Amortization of debt discount/transaction costs</a></td>
<td class="nump">457<span></span>
</td>
<td class="nump">4,795<span></span>
</td>
<td class="nump">546<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ConvertibleDebtFairValueDisclosures', window );">Estimated fair value</a></td>
<td class="nump">$ 143,600<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ConvertibleDebtFairValueByFairValueHierarchyLevelExtensibleList', window );">Convertible Debt, Fair Value by Fair Value Hierarchy Level</a></td>
<td class="text">Level 2<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentAxis=veco_ConvertibleSeniorUnsecuredNotesDue2027Member', window );">2027 Notes</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_CashInterestExpenseAbstract', window );"><strong>Cash Interest Expense</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_InterestExpenseDebtExcludingAmortization', window );">Coupon interest expense</a></td>
<td class="nump">$ 4,688<span></span>
</td>
<td class="nump">4,688<span></span>
</td>
<td class="nump">2,904<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_NonCashInterestExpenseAbstract', window );"><strong>Non-Cash Interest Expense</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AmortizationOfFinancingCostsAndDiscounts', window );">Amortization of debt discount/transaction costs</a></td>
<td class="nump">408<span></span>
</td>
<td class="nump">$ 4,092<span></span>
</td>
<td class="nump">$ 2,359<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ConvertibleDebtFairValueDisclosures', window );">Estimated fair value</a></td>
<td class="nump">$ 192,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ConvertibleDebtFairValueByFairValueHierarchyLevelExtensibleList', window );">Convertible Debt, Fair Value by Fair Value Hierarchy Level</a></td>
<td class="text">Level 2<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AmortizationOfFinancingCostsAndDiscounts">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of amortization expense attributable to debt discount (premium) and debt issuance costs.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=126954810&amp;loc=d3e3602-108585<br><br>Reference 2: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 55<br> -Paragraph 69E<br> -URI https://asc.fasb.org/extlink&amp;oid=123466577&amp;loc=SL123495743-112612<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 835<br> -SubTopic 30<br> -Section 45<br> -Paragraph 3<br> -URI https://asc.fasb.org/extlink&amp;oid=124435984&amp;loc=d3e28555-108399<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1F<br> -Subparagraph (b)(2)<br> -URI https://asc.fasb.org/extlink&amp;oid=123466505&amp;loc=SL123495355-112611<br><br>Reference 5: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 55<br> -Paragraph 69F<br> -URI https://asc.fasb.org/extlink&amp;oid=123466577&amp;loc=SL123495745-112612<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AmortizationOfFinancingCostsAndDiscounts</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ConvertibleDebtFairValueByFairValueHierarchyLevelExtensibleList">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Indicates level within fair value hierarchy of convertible debt.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 820<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=126976982&amp;loc=d3e19207-110258<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1D<br> -Subparagraph (c)<br> -URI https://asc.fasb.org/extlink&amp;oid=123466505&amp;loc=SL123495340-112611<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ConvertibleDebtFairValueByFairValueHierarchyLevelExtensibleList</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>enum2:enumerationSetItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ConvertibleDebtFairValueDisclosures">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Fair value portion of borrowing which can be exchanged for a specified number of another security at the option of the issuer or the holder, for example, but not limited to, the entity's common stock.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ConvertibleDebtFairValueDisclosures</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InterestExpenseDebt">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of the cost of borrowed funds accounted for as interest expense for debt.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 50<br> -Paragraph 6<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=123466204&amp;loc=SL6036836-161870<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03.8)<br> -URI https://asc.fasb.org/extlink&amp;oid=126953954&amp;loc=SL114868664-224227<br><br>Reference 3: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 55<br> -Paragraph 69F<br> -URI https://asc.fasb.org/extlink&amp;oid=123466577&amp;loc=SL123495745-112612<br><br>Reference 4: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 55<br> -Paragraph 69E<br> -URI https://asc.fasb.org/extlink&amp;oid=123466577&amp;loc=SL123495743-112612<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1F<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=123466505&amp;loc=SL123495355-112611<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InterestExpenseDebt</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InterestExpenseDebtExcludingAmortization">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Represents the portion of interest incurred in the period on debt arrangements that was charged against earnings, excluding amortization of debt discount (premium) and financing costs.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 55<br> -Paragraph 69E<br> -URI https://asc.fasb.org/extlink&amp;oid=123466577&amp;loc=SL123495743-112612<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1F<br> -Subparagraph (b)(1)<br> -URI https://asc.fasb.org/extlink&amp;oid=123466505&amp;loc=SL123495355-112611<br><br>Reference 3: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -SubTopic 20<br> -Section 55<br> -Paragraph 69F<br> -URI https://asc.fasb.org/extlink&amp;oid=123466577&amp;loc=SL123495745-112612<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph 8<br> -URI https://asc.fasb.org/extlink&amp;oid=126953954&amp;loc=SL114868664-224227<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InterestExpenseDebtExcludingAmortization</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_CashInterestExpenseAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_CashInterestExpenseAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_NonCashInterestExpenseAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_NonCashInterestExpenseAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtInstrumentAxis=veco_ConvertibleSeniorUnsecuredNotesDue2023Member">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtInstrumentAxis=veco_ConvertibleSeniorUnsecuredNotesDue2023Member</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtInstrumentAxis=veco_ConvertibleSeniorUnsecuredNotesDue2025Member">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtInstrumentAxis=veco_ConvertibleSeniorUnsecuredNotesDue2025Member</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtInstrumentAxis=veco_ConvertibleSeniorUnsecuredNotesDue2027Member">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtInstrumentAxis=veco_ConvertibleSeniorUnsecuredNotesDue2027Member</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>92
<FILENAME>R79.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575601914032">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Debt - Capped Call Transactions (Details) - Capped Call Transactions<br> $ / shares in Units, $ in Millions</strong></div></th>
<th class="th">
<div>May 13, 2020 </div>
<div>USD ($) </div>
<div>$ / shares</div>
</th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentLineItems', window );"><strong>Debt</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_CappedCallTransactionsPrice', window );">Aggregate price of capped call transaction | $</a></td>
<td class="nump">$ 10.3<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_CappedCallTransactionsCapPrice', window );">Cap price of the capped call transactions (in dollars per share) | $ / shares</a></td>
<td class="nump">$ 18.46<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtInstrumentLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtInstrumentLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_CappedCallTransactionsCapPrice">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Cap price of the capped call transactions.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_CappedCallTransactionsCapPrice</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_CappedCallTransactionsPrice">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Aggregate price of capped call transaction.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_CappedCallTransactionsPrice</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DerivativeInstrumentRiskAxis=veco_DerivativeContractCappedCallMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DerivativeInstrumentRiskAxis=veco_DerivativeContractCappedCallMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>93
<FILENAME>R80.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
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</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575594048944">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Debt - Revolving Credit Facility (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="1"></th>
<th class="th" colspan="2">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 16, 2021</div></th>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentAxis=veco_RevolvingCreditFacilityDecember2021Member', window );">Credit Facility</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentLineItems', window );"><strong>Debt</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity', window );">Borrowing capacity</a></td>
<td class="nump">$ 150,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentTerm', window );">Debt instrument term</a></td>
<td class="text">5 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_LineOfCreditFacilityContingentIncreaseAdditionalBorrowingCapacity', window );">Additional increase in borrowing subject to certain conditions</a></td>
<td class="nump">$ 75,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LineOfCreditFacilityMaximumAmountOutstandingDuringPeriod', window );">Outstanding amount</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 0<span></span>
</td>
<td class="nump">$ 0<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentAxis=veco_RevolvingCreditFacilityDecember2021Member', window );">Credit Facility | Minimum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentLineItems', window );"><strong>Debt</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LineOfCreditFacilityUnusedCapacityCommitmentFeePercentage', window );">Unused commitment fee percentage (as a percent)</a></td>
<td class="nump">0.25%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_DebtInstrumentInterestCoverageRatio', window );">Interest coverage ratio</a></td>
<td class="nump">3.00<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentAxis=veco_RevolvingCreditFacilityDecember2021Member', window );">Credit Facility | Maximum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentLineItems', window );"><strong>Debt</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LineOfCreditFacilityUnusedCapacityCommitmentFeePercentage', window );">Unused commitment fee percentage (as a percent)</a></td>
<td class="nump">0.35%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_DebtInstrumentTotalNetLeverageRatio', window );">Total net leverage ratio</a></td>
<td class="nump">4.50<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_DebtInstrumentSecuredNetLeverageRatio', window );">Secured net leverage ratio</a></td>
<td class="nump">2.50<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentAxis=veco_RevolvingCreditFacilityDecember2021Member', window );">Credit Facility | Base rate | Minimum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentLineItems', window );"><strong>Debt</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentBasisSpreadOnVariableRate1', window );">Basis spread on base rate (as a percent)</a></td>
<td class="nump">0.50%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentAxis=veco_RevolvingCreditFacilityDecember2021Member', window );">Credit Facility | Base rate | Maximum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentLineItems', window );"><strong>Debt</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentBasisSpreadOnVariableRate1', window );">Basis spread on base rate (as a percent)</a></td>
<td class="nump">1.25%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentAxis=veco_RevolvingCreditFacilityDecember2021Member', window );">Credit Facility | SOFR</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentLineItems', window );"><strong>Debt</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_DebtInstrumentFloorRate', window );">Floor rate on debt instrument (as a percent)</a></td>
<td class="nump">0.00%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentAxis=veco_RevolvingCreditFacilityDecember2021Member', window );">Credit Facility | SOFR | Minimum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentLineItems', window );"><strong>Debt</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentBasisSpreadOnVariableRate1', window );">Basis spread on base rate (as a percent)</a></td>
<td class="nump">1.50%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentAxis=veco_RevolvingCreditFacilityDecember2021Member', window );">Credit Facility | SOFR | Maximum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentLineItems', window );"><strong>Debt</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentBasisSpreadOnVariableRate1', window );">Basis spread on base rate (as a percent)</a></td>
<td class="nump">2.25%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentAxis=veco_RevolvingCreditFacilityDecember2021LetterOfCreditMember', window );">Credit Facility, Letter of Credit</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentLineItems', window );"><strong>Debt</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity', window );">Borrowing capacity</a></td>
<td class="nump">$ 15,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtInstrumentBasisSpreadOnVariableRate1">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Percentage points added to the reference rate to compute the variable rate on the debt instrument.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtInstrumentBasisSpreadOnVariableRate1</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtInstrumentLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtInstrumentLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtInstrumentTerm">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Period of time between issuance and maturity of debt instrument, in PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtInstrumentTerm</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LineOfCreditFacilityMaximumAmountOutstandingDuringPeriod">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Maximum amount borrowed under the credit facility at any time during the period.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LineOfCreditFacilityMaximumAmountOutstandingDuringPeriod</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Maximum borrowing capacity under the credit facility without consideration of any current restrictions on the amount that could be borrowed or the amounts currently outstanding under the facility.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.19(b),22(b))<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LineOfCreditFacilityUnusedCapacityCommitmentFeePercentage">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The fee, expressed as a percentage of the line of credit facility, for available but unused credit capacity under the credit facility.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LineOfCreditFacilityUnusedCapacityCommitmentFeePercentage</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_DebtInstrumentFloorRate">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Floor rate on debt instrument.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_DebtInstrumentFloorRate</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_DebtInstrumentInterestCoverageRatio">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Interest coverage ratio, as defined by the agreement.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_DebtInstrumentInterestCoverageRatio</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:pureItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_DebtInstrumentSecuredNetLeverageRatio">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Secured net leverage ratio, as defined by the agreement.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_DebtInstrumentSecuredNetLeverageRatio</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:pureItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_DebtInstrumentTotalNetLeverageRatio">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Total net leverage ratio, as defined by the agreement.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_DebtInstrumentTotalNetLeverageRatio</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:pureItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_LineOfCreditFacilityContingentIncreaseAdditionalBorrowingCapacity">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The contingent increase above the maximum borrowing capacity under the credit facility, if any one or more of the existing banks or new banks agree to provide such increased commitment amount.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_LineOfCreditFacilityContingentIncreaseAdditionalBorrowingCapacity</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtInstrumentAxis=veco_RevolvingCreditFacilityDecember2021Member">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtInstrumentAxis=veco_RevolvingCreditFacilityDecember2021Member</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_RangeAxis=srt_MinimumMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_RangeAxis=srt_MinimumMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_RangeAxis=srt_MaximumMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_RangeAxis=srt_MaximumMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_VariableRateAxis=us-gaap_BaseRateMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_VariableRateAxis=us-gaap_BaseRateMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_VariableRateAxis=us-gaap_SecuredOvernightFinancingRateSofrOvernightIndexSwapRateMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_VariableRateAxis=us-gaap_SecuredOvernightFinancingRateSofrOvernightIndexSwapRateMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtInstrumentAxis=veco_RevolvingCreditFacilityDecember2021LetterOfCreditMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtInstrumentAxis=veco_RevolvingCreditFacilityDecember2021LetterOfCreditMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>94
<FILENAME>R81.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575594224080">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Stockholders' Equity - AOCI Rollforward (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="3">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AOCIAttributableToParentNetOfTaxRollForward', window );"><strong>Changes in the balances of each component of AOCI</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_StockholdersEquity', window );">Balance at the beginning of the period</a></td>
<td class="nump">$ 437,628<span></span>
</td>
<td class="nump">$ 408,374<span></span>
</td>
<td class="nump">$ 374,512<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent', window );">Other comprehensive income (loss)</a></td>
<td class="num">(555)<span></span>
</td>
<td class="num">(363)<span></span>
</td>
<td class="num">(48)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_StockholdersEquity', window );">Balance at the end of the period</a></td>
<td class="nump">577,824<span></span>
</td>
<td class="nump">437,628<span></span>
</td>
<td class="nump">408,374<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_StatementEquityComponentsAxis=us-gaap_AccumulatedOtherComprehensiveIncomeMember', window );">Accumulated Other Comprehensive Income</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AOCIAttributableToParentNetOfTaxRollForward', window );"><strong>Changes in the balances of each component of AOCI</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_StockholdersEquity', window );">Balance at the beginning of the period</a></td>
<td class="nump">1,483<span></span>
</td>
<td class="nump">1,846<span></span>
</td>
<td class="nump">1,894<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent', window );">Other comprehensive income (loss)</a></td>
<td class="num">(555)<span></span>
</td>
<td class="num">(363)<span></span>
</td>
<td class="num">(48)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_StockholdersEquity', window );">Balance at the end of the period</a></td>
<td class="nump">928<span></span>
</td>
<td class="nump">1,483<span></span>
</td>
<td class="nump">1,846<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_StatementEquityComponentsAxis=us-gaap_AccumulatedTranslationAdjustmentMember', window );">Foreign Currency Translation</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AOCIAttributableToParentNetOfTaxRollForward', window );"><strong>Changes in the balances of each component of AOCI</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_StockholdersEquity', window );">Balance at the beginning of the period</a></td>
<td class="nump">1,814<span></span>
</td>
<td class="nump">1,866<span></span>
</td>
<td class="nump">1,861<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent', window );">Other comprehensive income (loss)</a></td>
<td class="num">(41)<span></span>
</td>
<td class="num">(52)<span></span>
</td>
<td class="nump">5<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_StockholdersEquity', window );">Balance at the end of the period</a></td>
<td class="nump">1,773<span></span>
</td>
<td class="nump">1,814<span></span>
</td>
<td class="nump">1,866<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_StatementEquityComponentsAxis=us-gaap_AccumulatedNetUnrealizedInvestmentGainLossMember', window );">Unrealized Gains (Losses) on Available for Sale Securities</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AOCIAttributableToParentNetOfTaxRollForward', window );"><strong>Changes in the balances of each component of AOCI</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_StockholdersEquity', window );">Balance at the beginning of the period</a></td>
<td class="num">(331)<span></span>
</td>
<td class="num">(20)<span></span>
</td>
<td class="nump">33<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent', window );">Other comprehensive income (loss)</a></td>
<td class="num">(514)<span></span>
</td>
<td class="num">(311)<span></span>
</td>
<td class="num">(53)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_StockholdersEquity', window );">Balance at the end of the period</a></td>
<td class="num">$ (845)<span></span>
</td>
<td class="num">$ (331)<span></span>
</td>
<td class="num">$ (20)<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AOCIAttributableToParentNetOfTaxRollForward">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>A roll forward is a reconciliation of a concept from the beginning of a period to the end of a period.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AOCIAttributableToParentNetOfTaxRollForward</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount after tax of other comprehensive income (loss) attributable to parent entity.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 45<br> -Paragraph 1B<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=126968391&amp;loc=SL7669625-108580<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1A<br> -Subparagraph (c)(3)<br> -URI https://asc.fasb.org/extlink&amp;oid=109239629&amp;loc=SL4573702-111684<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 45<br> -Paragraph 20<br> -URI https://asc.fasb.org/extlink&amp;oid=126929396&amp;loc=SL4569643-111683<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 45<br> -Paragraph 1A<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=126968391&amp;loc=SL7669619-108580<br><br>Reference 5: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 45<br> -Paragraph 19<br> -URI https://asc.fasb.org/extlink&amp;oid=126929396&amp;loc=SL4569616-111683<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StockholdersEquity">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Total of all stockholders' equity (deficit) items, net of receivables from officers, directors, owners, and affiliates of the entity which are attributable to the parent. The amount of the economic entity's stockholders' equity attributable to the parent excludes the amount of stockholders' equity which is allocable to that ownership interest in subsidiary equity which is not attributable to the parent (noncontrolling interest, minority interest). This excludes temporary equity and is sometimes called permanent equity.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(g)(1)(ii))<br> -URI https://asc.fasb.org/extlink&amp;oid=120395691&amp;loc=d3e23780-122690<br><br>Reference 2: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 852<br> -SubTopic 10<br> -Section 55<br> -Paragraph 10<br> -URI https://asc.fasb.org/extlink&amp;oid=84165509&amp;loc=d3e56426-112766<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 310<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SAB Topic 4.E)<br> -URI https://asc.fasb.org/extlink&amp;oid=122038336&amp;loc=d3e74512-122707<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(31))<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 5: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(29))<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 6: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(30))<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 7: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 825<br> -SubTopic 10<br> -Section 50<br> -Paragraph 28<br> -Subparagraph (f)<br> -URI https://asc.fasb.org/extlink&amp;oid=123596393&amp;loc=d3e14064-108612<br><br>Reference 8: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 323<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (c)<br> -URI https://asc.fasb.org/extlink&amp;oid=114001798&amp;loc=d3e33918-111571<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StockholdersEquity</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StatementEquityComponentsAxis=us-gaap_AccumulatedOtherComprehensiveIncomeMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StatementEquityComponentsAxis=us-gaap_AccumulatedOtherComprehensiveIncomeMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StatementEquityComponentsAxis=us-gaap_AccumulatedTranslationAdjustmentMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StatementEquityComponentsAxis=us-gaap_AccumulatedTranslationAdjustmentMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StatementEquityComponentsAxis=us-gaap_AccumulatedNetUnrealizedInvestmentGainLossMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StatementEquityComponentsAxis=us-gaap_AccumulatedNetUnrealizedInvestmentGainLossMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>95
<FILENAME>R82.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575600378752">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Stockholders' Equity - Preferred Stock (Details) - $ / shares<br></strong></div></th>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_StockholdersEquityNoteAbstract', window );"><strong>Stockholders' Equity</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PreferredStockParOrStatedValuePerShare', window );">Preferred stock, par value (in dollars per share)</a></td>
<td class="nump">$ 0.01<span></span>
</td>
<td class="nump">$ 0.01<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PreferredStockSharesIssued', window );">Preferred stock, shares issued</a></td>
<td class="nump">0<span></span>
</td>
<td class="nump">0<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PreferredStockParOrStatedValuePerShare">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Face amount or stated value per share of preferred stock nonredeemable or redeemable solely at the option of the issuer.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(28))<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section 50<br> -Paragraph 13<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=126973232&amp;loc=SL123496158-112644<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PreferredStockParOrStatedValuePerShare</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PreferredStockSharesIssued">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Total number of nonredeemable preferred shares (or preferred stock redeemable solely at the option of the issuer) issued to shareholders (includes related preferred shares that were issued, repurchased, and remain in the treasury). May be all or portion of the number of preferred shares authorized. Excludes preferred shares that are classified as debt.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(28))<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section 50<br> -Paragraph 13<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=126973232&amp;loc=SL123496158-112644<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PreferredStockSharesIssued</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StockholdersEquityNoteAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StockholdersEquityNoteAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>96
<FILENAME>R83.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575595588192">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Stock Plans - 2019 Plan (Details) - shares<br></strong></div></th>
<th class="th" colspan="2">12 Months Ended</th>
<th class="th" colspan="1"></th>
<th class="th" colspan="1"></th>
<th class="th" colspan="1"></th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2013</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
<th class="th"><div>Dec. 31, 2019</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems', window );"><strong>Share-based compensation</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber', window );">Number of options outstanding (in shares)</a></td>
<td class="nump">177,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">443,000<span></span>
</td>
<td class="nump">730,000<span></span>
</td>
<td class="nump">1,119,000<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PlanNameAxis=veco_InducementStockIncentivePlan2013Member', window );">Inducement Plan</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems', window );"><strong>Share-based compensation</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant', window );">Awards available for grant (in shares)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">0<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PlanNameAxis=veco_StockIncentivePlan2010Member', window );">2019 Plan</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems', window );"><strong>Share-based compensation</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized', window );">Number of shares authorized</a></td>
<td class="nump">17,800,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AwardTypeAxis=us-gaap_EmployeeStockOptionMember', window );">Stock options | Inducement Plan</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems', window );"><strong>Share-based compensation</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriod', window );">Awards granted (in shares)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">124,500<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1', window );">Vesting period</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">3 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod', window );">Expiration term</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">10 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber', window );">Number of options outstanding (in shares)</a></td>
<td class="nump">2,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AwardTypeAxis=us-gaap_EmployeeStockOptionMember', window );">Stock options | 2019 Plan</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems', window );"><strong>Share-based compensation</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1', window );">Vesting period</a></td>
<td class="text">3 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber', window );">Number of options outstanding (in shares)</a></td>
<td class="nump">200,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AwardTypeAxis=us-gaap_EmployeeStockOptionMember', window );">Stock options | 2019 Plan | Minimum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems', window );"><strong>Share-based compensation</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod', window );">Expiration term</a></td>
<td class="text">7 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AwardTypeAxis=us-gaap_EmployeeStockOptionMember', window );">Stock options | 2019 Plan | Maximum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems', window );"><strong>Share-based compensation</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod', window );">Expiration term</a></td>
<td class="text">10 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AwardTypeAxis=veco_RestrictedStockAwardsAndRestrictedStockUnitsMember', window );">Restricted Stock Awards and Restricted Stock Units | 2019 Plan | Minimum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems', window );"><strong>Share-based compensation</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1', window );">Vesting period</a></td>
<td class="text">1 year<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AwardTypeAxis=veco_RestrictedStockAwardsAndRestrictedStockUnitsMember', window );">Restricted Stock Awards and Restricted Stock Units | 2019 Plan | Maximum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems', window );"><strong>Share-based compensation</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1', window );">Vesting period</a></td>
<td class="text">5 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AwardTypeAxis=us-gaap_RestrictedStockUnitsRSUMember', window );">Restricted stock units | Inducement Plan</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems', window );"><strong>Share-based compensation</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod', window );">Awards granted (in shares)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">87,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNonOptionEquityInstrumentsOutstandingNumber', window );">Number of awards outstanding (in shares)</a></td>
<td class="nump">0<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AwardTypeAxis=us-gaap_RestrictedStockUnitsRSUMember', window );">Restricted stock units | Inducement Plan | Minimum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems', window );"><strong>Share-based compensation</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1', window );">Vesting period</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">2 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AwardTypeAxis=us-gaap_RestrictedStockUnitsRSUMember', window );">Restricted stock units | Inducement Plan | Maximum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems', window );"><strong>Share-based compensation</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1', window );">Vesting period</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">4 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AwardTypeAxis=veco_RsuAndPsuAwardsMember', window );">RSUs and PSUs | 2019 Plan</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems', window );"><strong>Share-based compensation</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNonOptionEquityInstrumentsOutstandingNumber', window );">Number of awards outstanding (in shares)</a></td>
<td class="nump">800,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Period over which grantee's right to exercise award under share-based payment arrangement is no longer contingent on satisfaction of service or performance condition, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days. Includes, but is not limited to, combination of market, performance or service condition.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (a)(1)<br> -URI https://asc.fasb.org/extlink&amp;oid=128089324&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The number of grants made during the period on other than stock (or unit) option plans (for example, phantom stock or unit plan, stock or unit appreciation rights plan, performance target plan).</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(2)(iii)(01)<br> -URI https://asc.fasb.org/extlink&amp;oid=128089324&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNonOptionEquityInstrumentsOutstandingNumber">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Number of equity instruments other than options outstanding, including both vested and non-vested instruments.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(1)(ii)<br> -URI https://asc.fasb.org/extlink&amp;oid=128089324&amp;loc=d3e5070-113901<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(1)(i)<br> -URI https://asc.fasb.org/extlink&amp;oid=128089324&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNonOptionEquityInstrumentsOutstandingNumber</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Number of shares authorized for issuance under share-based payment arrangement.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (a)(3)<br> -URI https://asc.fasb.org/extlink&amp;oid=128089324&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The difference between the maximum number of shares (or other type of equity) authorized for issuance under the plan (including the effects of amendments and adjustments), and the sum of: 1) the number of shares (or other type of equity) already issued upon exercise of options or other equity-based awards under the plan; and 2) shares (or other type of equity) reserved for issuance on granting of outstanding awards, net of cancellations and forfeitures, if applicable.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -URI https://asc.fasb.org/extlink&amp;oid=128089324&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriod">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Net number of share options (or share units) granted during the period.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(1)(iv)(01)<br> -URI https://asc.fasb.org/extlink&amp;oid=128089324&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriod</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Number of options outstanding, including both vested and non-vested options.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(1)(ii)<br> -URI https://asc.fasb.org/extlink&amp;oid=128089324&amp;loc=d3e5070-113901<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(1)(i)<br> -URI https://asc.fasb.org/extlink&amp;oid=128089324&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Period from grant date that an equity-based award expires, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (a)(2)<br> -URI https://asc.fasb.org/extlink&amp;oid=128089324&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PlanNameAxis=veco_InducementStockIncentivePlan2013Member">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PlanNameAxis=veco_InducementStockIncentivePlan2013Member</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PlanNameAxis=veco_StockIncentivePlan2010Member">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PlanNameAxis=veco_StockIncentivePlan2010Member</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AwardTypeAxis=us-gaap_EmployeeStockOptionMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AwardTypeAxis=us-gaap_EmployeeStockOptionMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_RangeAxis=srt_MinimumMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_RangeAxis=srt_MinimumMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_RangeAxis=srt_MaximumMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_RangeAxis=srt_MaximumMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AwardTypeAxis=veco_RestrictedStockAwardsAndRestrictedStockUnitsMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AwardTypeAxis=veco_RestrictedStockAwardsAndRestrictedStockUnitsMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AwardTypeAxis=us-gaap_RestrictedStockUnitsRSUMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AwardTypeAxis=us-gaap_RestrictedStockUnitsRSUMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AwardTypeAxis=veco_RsuAndPsuAwardsMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AwardTypeAxis=veco_RsuAndPsuAwardsMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>97
<FILENAME>R84.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575600229184">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Stock Plans - ESPP (Details) - ESPP<br> shares in Thousands</strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th">
<div>Dec. 31, 2016 </div>
<div>shares</div>
</th></tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems', window );"><strong>Share-based compensation</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized', window );">Number of shares authorized</a></td>
<td class="nump">2,250<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardPurchasePriceOfCommonStockPercent', window );">Share price (as a percent)</a></td>
<td class="nump">85.00%<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferPeriod', window );">Offer period</a></td>
<td class="text">6 months<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Number of shares authorized for issuance under share-based payment arrangement.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (a)(3)<br> -URI https://asc.fasb.org/extlink&amp;oid=128089324&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardPurchasePriceOfCommonStockPercent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Purchase price of common stock expressed as a percentage of its fair value.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardPurchasePriceOfCommonStockPercent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferPeriod">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Duration of offer period under the plan, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days. Includes, but not limited to, weeks in a year or quarter.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferPeriod</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PlanNameAxis=veco_EmployeeStockPurchasePlan2016Member">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PlanNameAxis=veco_EmployeeStockPurchasePlan2016Member</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>98
<FILENAME>R85.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575597565584">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Stock Plans - Shares Reserved for Future Issuance (Details)<br> shares in Millions</strong></div></th>
<th class="th">
<div>Dec. 31, 2022 </div>
<div>shares</div>
</th>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PlanNameAxis=veco_StockIncentivePlan2010Member', window );">2019 Plan</a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_SharesReservedForFutureIssuanceAbstract', window );"><strong>Shares reserved for future issuance</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_CommonStockCapitalSharesReservedForFutureIssuance', window );">Total shares reserved</a></td>
<td class="nump">6.1<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PlanNameAxis=veco_EmployeeStockPurchasePlan2016Member', window );">ESPP</a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_SharesReservedForFutureIssuanceAbstract', window );"><strong>Shares reserved for future issuance</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_CommonStockCapitalSharesReservedForFutureIssuance', window );">Total shares reserved</a></td>
<td class="nump">0.6<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CommonStockCapitalSharesReservedForFutureIssuance">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Aggregate number of common shares reserved for future issuance.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.29)<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CommonStockCapitalSharesReservedForFutureIssuance</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_SharesReservedForFutureIssuanceAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Shares Reserved For Future Issuance</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_SharesReservedForFutureIssuanceAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PlanNameAxis=veco_StockIncentivePlan2010Member">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PlanNameAxis=veco_StockIncentivePlan2010Member</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PlanNameAxis=veco_EmployeeStockPurchasePlan2016Member">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PlanNameAxis=veco_EmployeeStockPurchasePlan2016Member</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>99
<FILENAME>R86.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575594192480">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Stock Plans - Recognized Share-based Compensation (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="3">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract', window );"><strong>Recognized share-based compensation</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AllocatedShareBasedCompensationExpense', window );">Total share-based compensation expense</a></td>
<td class="nump">$ 22,994<span></span>
</td>
<td class="nump">$ 15,249<span></span>
</td>
<td class="nump">$ 12,703<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense', window );">Share-based compensation tax benefit</a></td>
<td class="nump">4,500<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncomeStatementLocationAxis=us-gaap_CostOfSalesMember', window );">Cost of sales</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract', window );"><strong>Recognized share-based compensation</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AllocatedShareBasedCompensationExpense', window );">Total share-based compensation expense</a></td>
<td class="nump">4,551<span></span>
</td>
<td class="nump">2,373<span></span>
</td>
<td class="nump">1,870<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncomeStatementLocationAxis=us-gaap_ResearchAndDevelopmentExpenseMember', window );">Research and development</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract', window );"><strong>Recognized share-based compensation</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AllocatedShareBasedCompensationExpense', window );">Total share-based compensation expense</a></td>
<td class="nump">6,682<span></span>
</td>
<td class="nump">3,850<span></span>
</td>
<td class="nump">2,900<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncomeStatementLocationAxis=us-gaap_SellingGeneralAndAdministrativeExpensesMember', window );">Selling, general and administrative</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract', window );"><strong>Recognized share-based compensation</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AllocatedShareBasedCompensationExpense', window );">Total share-based compensation expense</a></td>
<td class="nump">$ 11,761<span></span>
</td>
<td class="nump">$ 9,026<span></span>
</td>
<td class="nump">$ 7,933<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AllocatedShareBasedCompensationExpense">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of expense for award under share-based payment arrangement. Excludes amount capitalized.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (h)(1)(i)<br> -URI https://asc.fasb.org/extlink&amp;oid=128089324&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AllocatedShareBasedCompensationExpense</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of tax benefit for recognition of expense of award under share-based payment arrangement.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (h)(1)(i)<br> -URI https://asc.fasb.org/extlink&amp;oid=128089324&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeStatementLocationAxis=us-gaap_CostOfSalesMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeStatementLocationAxis=us-gaap_CostOfSalesMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeStatementLocationAxis=us-gaap_ResearchAndDevelopmentExpenseMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeStatementLocationAxis=us-gaap_ResearchAndDevelopmentExpenseMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeStatementLocationAxis=us-gaap_SellingGeneralAndAdministrativeExpensesMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeStatementLocationAxis=us-gaap_SellingGeneralAndAdministrativeExpensesMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>100
<FILENAME>R87.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575599439472">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Stock Plans - Unrecognized Share-based Compensation Costs (Details)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th">
<div>Dec. 31, 2022 </div>
<div>USD ($)</div>
</th></tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedAbstract', window );"><strong>Unrecognized share-based compensation costs</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized', window );">Unrecognized Share-Based Compensation Costs</a></td>
<td class="nump">$ 37,388<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1', window );">Weighted Average Period Expected to be Recognized</a></td>
<td class="text">1 year 10 months 24 days<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AwardTypeAxis=us-gaap_RestrictedStockUnitsRSUMember', window );">Restricted stock units</a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedAbstract', window );"><strong>Unrecognized share-based compensation costs</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized', window );">Unrecognized Share-Based Compensation Costs</a></td>
<td class="nump">$ 9,468<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1', window );">Weighted Average Period Expected to be Recognized</a></td>
<td class="text">1 year 10 months 24 days<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AwardTypeAxis=veco_RestrictedStockAwardMember', window );">Restricted Stock Awards</a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedAbstract', window );"><strong>Unrecognized share-based compensation costs</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized', window );">Unrecognized Share-Based Compensation Costs</a></td>
<td class="nump">$ 24,610<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1', window );">Weighted Average Period Expected to be Recognized</a></td>
<td class="text">1 year 10 months 24 days<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AwardTypeAxis=veco_PerformanceShareUnitsMember', window );">Performance Share Units</a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedAbstract', window );"><strong>Unrecognized share-based compensation costs</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized', window );">Unrecognized Share-Based Compensation Costs</a></td>
<td class="nump">$ 3,310<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1', window );">Weighted Average Period Expected to be Recognized</a></td>
<td class="text">2 years<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of cost not yet recognized for nonvested award under share-based payment arrangement.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (i)<br> -URI https://asc.fasb.org/extlink&amp;oid=128089324&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Weighted-average period over which cost not yet recognized is expected to be recognized for award under share-based payment arrangement, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (i)<br> -URI https://asc.fasb.org/extlink&amp;oid=128089324&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AwardTypeAxis=us-gaap_RestrictedStockUnitsRSUMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AwardTypeAxis=us-gaap_RestrictedStockUnitsRSUMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AwardTypeAxis=veco_RestrictedStockAwardMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AwardTypeAxis=veco_RestrictedStockAwardMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AwardTypeAxis=veco_PerformanceShareUnitsMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AwardTypeAxis=veco_PerformanceShareUnitsMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>101
<FILENAME>R88.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575591383600">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Stock Plans - Stock Option Activity (Details) - $ / shares<br> shares in Thousands</strong></div></th>
<th class="th" colspan="3">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward', window );"><strong>Number of Shares</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber', window );">Outstanding at the beginning of the period (in shares)</a></td>
<td class="nump">443<span></span>
</td>
<td class="nump">730<span></span>
</td>
<td class="nump">1,119<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised', window );">Exercised (in shares)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(2)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresAndExpirationsInPeriod', window );">Expired (in shares)</a></td>
<td class="num">(266)<span></span>
</td>
<td class="num">(285)<span></span>
</td>
<td class="num">(389)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber', window );">Outstanding at the end of the period (in shares)</a></td>
<td class="nump">177<span></span>
</td>
<td class="nump">443<span></span>
</td>
<td class="nump">730<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAdditionalDisclosuresAbstract', window );"><strong>Weighted Average Exercise Price</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice', window );">Outstanding at the beginning of the period (in dollars per share)</a></td>
<td class="nump">$ 32.15<span></span>
</td>
<td class="nump">$ 35.26<span></span>
</td>
<td class="nump">$ 34.88<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice', window );">Exercised (in dollars per share)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">23.36<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresAndExpirationsInPeriodWeightedAverageExercisePrice', window );">Expired (in dollars per share)</a></td>
<td class="nump">32.95<span></span>
</td>
<td class="nump">40.16<span></span>
</td>
<td class="nump">34.15<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice', window );">Outstanding at the end of the period (in dollars per share)</a></td>
<td class="nump">$ 30.94<span></span>
</td>
<td class="nump">$ 32.15<span></span>
</td>
<td class="nump">$ 35.26<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAdditionalDisclosuresAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAdditionalDisclosuresAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresAndExpirationsInPeriod">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>For presentations that combine terminations, the number of shares under options that were cancelled during the reporting period as a result of occurrence of a terminating event specified in contractual agreements pertaining to the stock option plan or that expired.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(1)(iv)<br> -URI https://asc.fasb.org/extlink&amp;oid=128089324&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresAndExpirationsInPeriod</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresAndExpirationsInPeriodWeightedAverageExercisePrice">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Weighted average price of options that were either forfeited or expired.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(1)(iv)<br> -URI https://asc.fasb.org/extlink&amp;oid=128089324&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresAndExpirationsInPeriodWeightedAverageExercisePrice</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Number of options outstanding, including both vested and non-vested options.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(1)(ii)<br> -URI https://asc.fasb.org/extlink&amp;oid=128089324&amp;loc=d3e5070-113901<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(1)(i)<br> -URI https://asc.fasb.org/extlink&amp;oid=128089324&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>A roll forward is a reconciliation of a concept from the beginning of a period to the end of a period.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Weighted average price at which grantees can acquire the shares reserved for issuance under the stock option plan.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(1)(ii)<br> -URI https://asc.fasb.org/extlink&amp;oid=128089324&amp;loc=d3e5070-113901<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(1)(i)<br> -URI https://asc.fasb.org/extlink&amp;oid=128089324&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Weighted average price at which option holders acquired shares when converting their stock options into shares.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(1)(iv)(02)<br> -URI https://asc.fasb.org/extlink&amp;oid=128089324&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Number of share options (or share units) exercised during the current period.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(1)(iv)(02)<br> -URI https://asc.fasb.org/extlink&amp;oid=128089324&amp;loc=d3e5070-113901<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.3-04)<br> -URI https://asc.fasb.org/extlink&amp;oid=120397183&amp;loc=d3e187085-122770<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(28))<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(29))<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 5: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -URI https://asc.fasb.org/extlink&amp;oid=126973232&amp;loc=d3e21463-112644<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>102
<FILENAME>R89.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575596024688">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Stock Plans - Option Exercise Ranges (Details)<br> shares in Thousands</strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th">
<div>Dec. 31, 2022 </div>
<div>$ / shares </div>
<div>shares</div>
</th></tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsAbstract', window );"><strong>Options Outstanding</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfOutstandingOptions', window );">Outstanding (in shares) | shares</a></td>
<td class="nump">177<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageRemainingContractualTerm2', window );">Weighted Average Remaining Contractual Life</a></td>
<td class="text">9 months 18 days<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageExercisePriceBeginningBalance1', window );">Weighted-Average Exercise Price (in dollars per share)</a></td>
<td class="nump">$ 30.94<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsAbstract', window );"><strong>Options Exercisable</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfExercisableOptions', window );">Outstanding (in shares) | shares</a></td>
<td class="nump">177<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageRemainingContractualTerm2', window );">Weighted Average Remaining Contractual life</a></td>
<td class="text">9 months 18 days<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageExercisePrice1', window );">Weighted Average Exercise Price (in dollars per share)</a></td>
<td class="nump">$ 30.94<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsNonvestedNumberOfShares', window );">Unvested options outstanding (in shares) | shares</a></td>
<td class="nump">0<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis=veco_RangeOfExercisePricesRangeOneMember', window );">$20.00 - $30.00</a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLineItems', window );"><strong>Stock plans</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLowerRangeLimit', window );">Exercise price, low end of range (in dollars per share)</a></td>
<td class="nump">$ 20.00<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeUpperRangeLimit', window );">Exercise price, high end of range (in dollars per share)</a></td>
<td class="nump">$ 30.00<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsAbstract', window );"><strong>Options Outstanding</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfOutstandingOptions', window );">Outstanding (in shares) | shares</a></td>
<td class="nump">10<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageRemainingContractualTerm2', window );">Weighted Average Remaining Contractual Life</a></td>
<td class="text">9 months 18 days<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageExercisePriceBeginningBalance1', window );">Weighted-Average Exercise Price (in dollars per share)</a></td>
<td class="nump">$ 29.21<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsAbstract', window );"><strong>Options Exercisable</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfExercisableOptions', window );">Outstanding (in shares) | shares</a></td>
<td class="nump">10<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageRemainingContractualTerm2', window );">Weighted Average Remaining Contractual life</a></td>
<td class="text">9 months 18 days<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageExercisePrice1', window );">Weighted Average Exercise Price (in dollars per share)</a></td>
<td class="nump">$ 29.21<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis=veco_RangeOfExercisePricesRangeTwoMember', window );">$30.01 - $40.00</a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLineItems', window );"><strong>Stock plans</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLowerRangeLimit', window );">Exercise price, low end of range (in dollars per share)</a></td>
<td class="nump">30.01<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeUpperRangeLimit', window );">Exercise price, high end of range (in dollars per share)</a></td>
<td class="nump">$ 40.00<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsAbstract', window );"><strong>Options Outstanding</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfOutstandingOptions', window );">Outstanding (in shares) | shares</a></td>
<td class="nump">167<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageRemainingContractualTerm2', window );">Weighted Average Remaining Contractual Life</a></td>
<td class="text">9 months 18 days<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageExercisePriceBeginningBalance1', window );">Weighted-Average Exercise Price (in dollars per share)</a></td>
<td class="nump">$ 31.02<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsAbstract', window );"><strong>Options Exercisable</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfExercisableOptions', window );">Outstanding (in shares) | shares</a></td>
<td class="nump">167<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageRemainingContractualTerm2', window );">Weighted Average Remaining Contractual life</a></td>
<td class="text">9 months 18 days<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageExercisePrice1', window );">Weighted Average Exercise Price (in dollars per share)</a></td>
<td class="nump">$ 31.02<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLowerRangeLimit">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The floor of a customized range of exercise prices for purposes of disclosing shares potentially issuable under outstanding stock option awards on all stock option plans and other required information pertaining to awards in the customized range.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (g)<br> -URI https://asc.fasb.org/extlink&amp;oid=128089324&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLowerRangeLimit</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfExercisableOptions">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The number of shares reserved for issuance pertaining to the outstanding exercisable stock options as of the balance sheet date in the customized range of exercise prices for which the market and performance vesting condition has been satisfied.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(iii)<br> -URI https://asc.fasb.org/extlink&amp;oid=128089324&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfExercisableOptions</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfOutstandingOptions">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The number of shares reserved for issuance pertaining to the outstanding stock options as of the balance sheet date for all option plans in the customized range of exercise prices.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(1)(i)-(ii)<br> -URI https://asc.fasb.org/extlink&amp;oid=128089324&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfOutstandingOptions</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeUpperRangeLimit">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The ceiling of a customized range of exercise prices for purposes of disclosing shares potentially issuable under outstanding stock option awards on all stock option plans and other required information pertaining to awards in the customized range.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (g)<br> -URI https://asc.fasb.org/extlink&amp;oid=128089324&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeUpperRangeLimit</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsNonvestedNumberOfShares">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Number of non-vested options outstanding.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsNonvestedNumberOfShares</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageExercisePrice1">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Weighted average exercise price as of the balance sheet date for those equity-based payment arrangements exercisable and outstanding.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(1)(iii)<br> -URI https://asc.fasb.org/extlink&amp;oid=128089324&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageExercisePrice1</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageRemainingContractualTerm2">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Weighted average remaining contractual term of exercisable stock options, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (e)(2)<br> -URI https://asc.fasb.org/extlink&amp;oid=128089324&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageRemainingContractualTerm2</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageExercisePriceBeginningBalance1">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The weighted average price as of the balance sheet date at which grantees could acquire the underlying shares with respect to all outstanding stock options which are in the customized range of exercise prices.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(1)(i)-(ii)<br> -URI https://asc.fasb.org/extlink&amp;oid=128089324&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageExercisePriceBeginningBalance1</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageRemainingContractualTerm2">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Weighted average remaining contractual term of outstanding stock options, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (e)(1)<br> -URI https://asc.fasb.org/extlink&amp;oid=128089324&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageRemainingContractualTerm2</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis=veco_RangeOfExercisePricesRangeOneMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis=veco_RangeOfExercisePricesRangeOneMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis=veco_RangeOfExercisePricesRangeTwoMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis=veco_RangeOfExercisePricesRangeTwoMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>103
<FILENAME>R90.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575597672128">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Stock Plans - Stock options exercised (Details)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th">
<div>Dec. 31, 2021 </div>
<div>USD ($)</div>
</th></tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract', window );"><strong>Stock Plans</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ProceedsFromStockOptionsExercised', window );">Cash received from options exercised</a></td>
<td class="nump">$ 37<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue', window );">Intrinsic value of options exercised</a></td>
<td class="nump">$ 6<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProceedsFromStockOptionsExercised">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of cash inflow from exercise of option under share-based payment arrangement.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2A<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=128089324&amp;loc=SL79508275-113901<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 14<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=126954810&amp;loc=d3e3255-108585<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProceedsFromStockOptionsExercised</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of accumulated difference between fair value of underlying shares on dates of exercise and exercise price on options exercised (or share units converted) into shares.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (d)(2)<br> -URI https://asc.fasb.org/extlink&amp;oid=128089324&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>104
<FILENAME>R91.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575596075168">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Share-based Compensation - Restricted shares and performance shares (Details) - RSAs, RSUs, PSAs and PSUs - USD ($)<br> $ / shares in Units, shares in Thousands, $ in Millions</strong></div></th>
<th class="th" colspan="3">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward', window );"><strong>Number of Shares</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber', window );">Outstanding at the beginning of the period (in shares)</a></td>
<td class="nump">2,083<span></span>
</td>
<td class="nump">2,040<span></span>
</td>
<td class="nump">2,257<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod', window );">Granted (in shares)</a></td>
<td class="nump">1,253<span></span>
</td>
<td class="nump">1,031<span></span>
</td>
<td class="nump">1,054<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsPerformanceAwardAdjustmentsInPeriod', window );">Performance award adjustments (in shares)</a></td>
<td class="nump">85<span></span>
</td>
<td class="nump">159<span></span>
</td>
<td class="num">(51)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod', window );">Vested (in shares)</a></td>
<td class="num">(844)<span></span>
</td>
<td class="num">(1,014)<span></span>
</td>
<td class="num">(798)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeitedInPeriod', window );">Forfeited (in shares)</a></td>
<td class="num">(81)<span></span>
</td>
<td class="num">(133)<span></span>
</td>
<td class="num">(422)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber', window );">Outstanding at the end of the period (in shares)</a></td>
<td class="nump">2,496<span></span>
</td>
<td class="nump">2,083<span></span>
</td>
<td class="nump">2,040<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsAdditionalDisclosuresAbstract', window );"><strong>Weighted Average Grant Date Fair Value</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue', window );">Outstanding at the beginning of the period (in dollars per share)</a></td>
<td class="nump">$ 17.33<span></span>
</td>
<td class="nump">$ 12.73<span></span>
</td>
<td class="nump">$ 16.20<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue', window );">Granted (in dollars per share)</a></td>
<td class="nump">29.12<span></span>
</td>
<td class="nump">24.26<span></span>
</td>
<td class="nump">9.53<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsPerformanceAwardAdjustmentsWeightedAverageGrantDateFairValue', window );">Performance award adjustments (in dollars per share)</a></td>
<td class="nump">14.03<span></span>
</td>
<td class="nump">18.38<span></span>
</td>
<td class="nump">30.94<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue', window );">Vested (in dollars per share)</a></td>
<td class="nump">15.00<span></span>
</td>
<td class="nump">15.50<span></span>
</td>
<td class="nump">16.01<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue', window );">Forfeited (in dollars per share)</a></td>
<td class="nump">20.18<span></span>
</td>
<td class="nump">15.08<span></span>
</td>
<td class="nump">14.87<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue', window );">Outstanding at the end of the period (in dollars per share)</a></td>
<td class="nump">$ 23.83<span></span>
</td>
<td class="nump">$ 17.33<span></span>
</td>
<td class="nump">$ 12.73<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodTotalFairValue', window );">Total fair value of shares vested</a></td>
<td class="nump">$ 22.1<span></span>
</td>
<td class="nump">$ 22.8<span></span>
</td>
<td class="nump">$ 9.0<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AwardTypeAxis=veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember', window );">Minimum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsAdditionalDisclosuresAbstract', window );"><strong>Weighted Average Grant Date Fair Value</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1', window );">Vesting period</a></td>
<td class="text">1 year<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AwardTypeAxis=veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember', window );">Maximum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsAdditionalDisclosuresAbstract', window );"><strong>Weighted Average Grant Date Fair Value</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1', window );">Vesting period</a></td>
<td class="text">4 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Period over which grantee's right to exercise award under share-based payment arrangement is no longer contingent on satisfaction of service or performance condition, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days. Includes, but is not limited to, combination of market, performance or service condition.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (a)(1)<br> -URI https://asc.fasb.org/extlink&amp;oid=128089324&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsAdditionalDisclosuresAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsAdditionalDisclosuresAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeitedInPeriod">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The number of equity-based payment instruments, excluding stock (or unit) options, that were forfeited during the reporting period.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(2)(iii)(03)<br> -URI https://asc.fasb.org/extlink&amp;oid=128089324&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeitedInPeriod</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Weighted average fair value as of the grant date of equity-based award plans other than stock (unit) option plans that were not exercised or put into effect as a result of the occurrence of a terminating event.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(2)(iii)(03)<br> -URI https://asc.fasb.org/extlink&amp;oid=128089324&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The number of grants made during the period on other than stock (or unit) option plans (for example, phantom stock or unit plan, stock or unit appreciation rights plan, performance target plan).</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(2)(iii)(01)<br> -URI https://asc.fasb.org/extlink&amp;oid=128089324&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The weighted average fair value at grant date for nonvested equity-based awards issued during the period on other than stock (or unit) option plans (for example, phantom stock or unit plan, stock or unit appreciation rights plan, performance target plan).</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(2)(iii)(01)<br> -URI https://asc.fasb.org/extlink&amp;oid=128089324&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The number of non-vested equity-based payment instruments, excluding stock (or unit) options, that validly exist and are outstanding as of the balance sheet date.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(2)(ii)<br> -URI https://asc.fasb.org/extlink&amp;oid=128089324&amp;loc=d3e5070-113901<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(2)(i)<br> -URI https://asc.fasb.org/extlink&amp;oid=128089324&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>A roll forward is a reconciliation of a concept from the beginning of a period to the end of a period.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Per share or unit weighted-average fair value of nonvested award under share-based payment arrangement. Excludes share and unit options.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(2)(i)<br> -URI https://asc.fasb.org/extlink&amp;oid=128089324&amp;loc=d3e5070-113901<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(2)(ii)<br> -URI https://asc.fasb.org/extlink&amp;oid=128089324&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The number of equity-based payment instruments, excluding stock (or unit) options, that vested during the reporting period.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(2)(iii)(02)<br> -URI https://asc.fasb.org/extlink&amp;oid=128089324&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodTotalFairValue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Fair value of share-based awards for which the grantee gained the right by satisfying service and performance requirements, to receive or retain shares or units, other instruments, or cash.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (d)(2)<br> -URI https://asc.fasb.org/extlink&amp;oid=128089324&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodTotalFairValue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The weighted average fair value as of grant date pertaining to an equity-based award plan other than a stock (or unit) option plan for which the grantee gained the right during the reporting period, by satisfying service and performance requirements, to receive or retain shares or units, other instruments, or cash in accordance with the terms of the arrangement.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(2)(iii)(02)<br> -URI https://asc.fasb.org/extlink&amp;oid=128089324&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsPerformanceAwardAdjustmentsInPeriod">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The number of performance award adjustments made during the period on other than stock (or unit) option plans resulting in decrease in awards outstanding.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsPerformanceAwardAdjustmentsInPeriod</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsPerformanceAwardAdjustmentsWeightedAverageGrantDateFairValue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The weighted average fair value of performance award adjustments during the period for nonvested equity-based awards other than stock (or unit) option plans.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsPerformanceAwardAdjustmentsWeightedAverageGrantDateFairValue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AwardTypeAxis=veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AwardTypeAxis=veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_RangeAxis=srt_MinimumMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_RangeAxis=srt_MinimumMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_RangeAxis=srt_MaximumMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_RangeAxis=srt_MaximumMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>105
<FILENAME>R92.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575599001808">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Stock Plans - Performance Awards Assumptions (Details) - Performance awards with market conditions - $ / shares<br></strong></div></th>
<th class="th" colspan="3">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract', window );"><strong>Assumptions</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue', window );">Weighted average fair value (in dollars per share)</a></td>
<td class="nump">$ 45.28<span></span>
</td>
<td class="nump">$ 27.81<span></span>
</td>
<td class="nump">$ 10.59<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate', window );">Dividend yield (as a percent)</a></td>
<td class="nump">0.00%<span></span>
</td>
<td class="nump">0.00%<span></span>
</td>
<td class="nump">0.00%<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsWeightedAverageVolatilityRate', window );">Expected volatility factor (as a percent)</a></td>
<td class="nump">58.00%<span></span>
</td>
<td class="nump">63.00%<span></span>
</td>
<td class="nump">60.00%<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate', window );">Risk-free interest rate (as a percent)</a></td>
<td class="nump">2.13%<span></span>
</td>
<td class="nump">0.34%<span></span>
</td>
<td class="nump">0.54%<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1', window );">Expected life (in years)</a></td>
<td class="text">3 years<span></span>
</td>
<td class="text">3 years<span></span>
</td>
<td class="text">3 years<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The weighted average fair value at grant date for nonvested equity-based awards issued during the period on other than stock (or unit) option plans (for example, phantom stock or unit plan, stock or unit appreciation rights plan, performance target plan).</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(2)(iii)(01)<br> -URI https://asc.fasb.org/extlink&amp;oid=128089324&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The estimated dividend rate (a percentage of the share price) to be paid (expected dividends) to holders of the underlying shares over the option's term.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (f)(2)(iii)<br> -URI https://asc.fasb.org/extlink&amp;oid=128089324&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The risk-free interest rate assumption that is used in valuing an option on its own shares.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (f)(2)(iv)<br> -URI https://asc.fasb.org/extlink&amp;oid=128089324&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsWeightedAverageVolatilityRate">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Rate of weighted-average expected volatility for award under share-based payment arrangement.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (f)(2)(ii)<br> -URI https://asc.fasb.org/extlink&amp;oid=128089324&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsWeightedAverageVolatilityRate</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Expected term of award under share-based payment arrangement, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (f)(2)(i)<br> -URI https://asc.fasb.org/extlink&amp;oid=128089324&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AwardTypeAxis=veco_PerformanceShareUnitsMarketConditionsMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AwardTypeAxis=veco_PerformanceShareUnitsMarketConditionsMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>106
<FILENAME>R93.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575596027264">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Stock Plans - ESPP FV Assumptions (Details) - ESPP - USD ($)<br> $ / shares in Units, $ in Millions</strong></div></th>
<th class="th" colspan="3">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems', window );"><strong>Share-based compensation</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ProceedsFromIssuanceOfSharesUnderIncentiveAndShareBasedCompensationPlans', window );">Cash proceeds</a></td>
<td class="nump">$ 3.7<span></span>
</td>
<td class="nump">$ 3.4<span></span>
</td>
<td class="nump">$ 2.9<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans', window );">Number of shares issued</a></td>
<td class="nump">208,140<span></span>
</td>
<td class="nump">196,024<span></span>
</td>
<td class="nump">254,703<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract', window );"><strong>Assumptions</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue', window );">Weighted average fair value (in dollars per share)</a></td>
<td class="nump">$ 6.00<span></span>
</td>
<td class="nump">$ 5.90<span></span>
</td>
<td class="nump">$ 4.81<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate', window );">Dividend yield (as a percent)</a></td>
<td class="nump">0.00%<span></span>
</td>
<td class="nump">0.00%<span></span>
</td>
<td class="nump">0.00%<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsWeightedAverageVolatilityRate', window );">Expected volatility factor (as a percent)</a></td>
<td class="nump">43.00%<span></span>
</td>
<td class="nump">52.00%<span></span>
</td>
<td class="nump">70.00%<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate', window );">Risk-free interest rate (as a percent)</a></td>
<td class="nump">1.73%<span></span>
</td>
<td class="nump">0.07%<span></span>
</td>
<td class="nump">0.95%<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1', window );">Expected life (in years)</a></td>
<td class="text">6 months<span></span>
</td>
<td class="text">6 months<span></span>
</td>
<td class="text">6 months<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProceedsFromIssuanceOfSharesUnderIncentiveAndShareBasedCompensationPlans">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of cash inflow from issuance of shares under share-based payment arrangement. Excludes option exercised.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 14<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=126954810&amp;loc=d3e3255-108585<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2A<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=128089324&amp;loc=SL79508275-113901<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProceedsFromIssuanceOfSharesUnderIncentiveAndShareBasedCompensationPlans</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The weighted average fair value at grant date for nonvested equity-based awards issued during the period on other than stock (or unit) option plans (for example, phantom stock or unit plan, stock or unit appreciation rights plan, performance target plan).</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(2)(iii)(01)<br> -URI https://asc.fasb.org/extlink&amp;oid=128089324&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The estimated dividend rate (a percentage of the share price) to be paid (expected dividends) to holders of the underlying shares over the option's term.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (f)(2)(iii)<br> -URI https://asc.fasb.org/extlink&amp;oid=128089324&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The risk-free interest rate assumption that is used in valuing an option on its own shares.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (f)(2)(iv)<br> -URI https://asc.fasb.org/extlink&amp;oid=128089324&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsWeightedAverageVolatilityRate">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Rate of weighted-average expected volatility for award under share-based payment arrangement.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (f)(2)(ii)<br> -URI https://asc.fasb.org/extlink&amp;oid=128089324&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsWeightedAverageVolatilityRate</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Expected term of award under share-based payment arrangement, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (f)(2)(i)<br> -URI https://asc.fasb.org/extlink&amp;oid=128089324&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Number of shares issued during the period as a result of an employee stock purchase plan.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -URI https://asc.fasb.org/extlink&amp;oid=126973232&amp;loc=d3e21463-112644<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.3-04)<br> -URI https://asc.fasb.org/extlink&amp;oid=120397183&amp;loc=d3e187085-122770<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(28))<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(29))<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PlanNameAxis=veco_EmployeeStockPurchasePlan2016Member">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PlanNameAxis=veco_EmployeeStockPurchasePlan2016Member</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>107
<FILENAME>R94.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575601716064">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Retirement Plans - Defined Contribution Plan (Details) - USD ($)<br> $ in Millions</strong></div></th>
<th class="th" colspan="3">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DefinedContributionPlanDisclosureLineItems', window );"><strong>Defined contribution plan disclosures</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DefinedContributionPlanEmployerMatchingContributionPercentOfMatch', window );">Employer's matching contribution for every dollar the employees contribute (as a percent)</a></td>
<td class="nump">50.00%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_DefinedContributionPlanEmployerMatchingContributionVestingPeriod', window );">Employer's matching contribution, vesting period (in years)</a></td>
<td class="text">5 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DefinedContributionPlanCostRecognized', window );">Aggregate employer's contribution to pension plans</a></td>
<td class="nump">$ 3.0<span></span>
</td>
<td class="nump">$ 2.6<span></span>
</td>
<td class="nump">$ 2.4<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_srt_RangeAxis=srt_MaximumMember', window );">Maximum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DefinedContributionPlanDisclosureLineItems', window );"><strong>Defined contribution plan disclosures</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DefinedContributionPlanEmployerMatchingContributionPercent', window );">Employer's contribution as a percentage of employee's eligible compensation</a></td>
<td class="nump">3.00%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DefinedContributionPlanCostRecognized">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of cost for defined contribution plan.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 715<br> -SubTopic 70<br> -Section 50<br> -Paragraph 1<br> -URI https://asc.fasb.org/extlink&amp;oid=49170846&amp;loc=d3e28014-114942<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DefinedContributionPlanCostRecognized</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DefinedContributionPlanDisclosureLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DefinedContributionPlanDisclosureLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DefinedContributionPlanEmployerMatchingContributionPercent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Percentage of employees' gross pay for which the employer contributes a matching contribution to a defined contribution plan.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DefinedContributionPlanEmployerMatchingContributionPercent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DefinedContributionPlanEmployerMatchingContributionPercentOfMatch">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Percentage employer matches of the employee's percentage contribution matched.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DefinedContributionPlanEmployerMatchingContributionPercentOfMatch</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_DefinedContributionPlanEmployerMatchingContributionVestingPeriod">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Represents the vesting period for employer's matching contribution.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_DefinedContributionPlanEmployerMatchingContributionVestingPeriod</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_RangeAxis=srt_MaximumMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_RangeAxis=srt_MaximumMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>108
<FILENAME>R95.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575600298656">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Dispositions (Details)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th">
<div>Dec. 31, 2020 </div>
<div>USD ($)</div>
</th></tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsLineItems', window );"><strong>Dispositions</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AssetImpairmentCharges', window );">Asset impairment</a></td>
<td class="nump">$ 281<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsAxis=veco_OneNonCoreProductLineMember', window );">One non-core product line | Assets sold</a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsLineItems', window );"><strong>Dispositions</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DisposalGroupIncludingDiscontinuedOperationConsideration', window );">Consideration</a></td>
<td class="nump">$ 11,400<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_PercentageOfTransactionPrice', window );">Transaction price due upon closing (as a percent)</a></td>
<td class="nump">85.00%<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_PercentageOfAmountHeldInEscrow', window );">Amount held in escrow (as a percent)</a></td>
<td class="nump">15.00%<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_TermOfAmountToBeHeldInEscrow', window );">Period over which portion of transaction price is held in escrow</a></td>
<td class="text">18 months<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AssetImpairmentCharges', window );">Asset impairment</a></td>
<td class="nump">$ 300<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AssetImpairmentCharges">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of write-down of assets recognized in the income statement. Includes, but is not limited to, losses from tangible assets, intangible assets and goodwill.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=126954810&amp;loc=d3e3602-108585<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 360<br> -SubTopic 10<br> -Section 45<br> -Paragraph 4<br> -URI https://asc.fasb.org/extlink&amp;oid=126905981&amp;loc=d3e2420-110228<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AssetImpairmentCharges</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DisposalGroupIncludingDiscontinuedOperationConsideration">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of consideration received or receivable for the disposal of assets and liabilities, including discontinued operation.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DisposalGroupIncludingDiscontinuedOperationConsideration</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_PercentageOfAmountHeldInEscrow">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Percentage of amount held in escrow.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_PercentageOfAmountHeldInEscrow</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_PercentageOfTransactionPrice">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Percentage of transaction price due upon closing.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_PercentageOfTransactionPrice</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_TermOfAmountToBeHeldInEscrow">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Period over which portion of transaction price is held in escrow.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_TermOfAmountToBeHeldInEscrow</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsAxis=veco_OneNonCoreProductLineMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsAxis=veco_OneNonCoreProductLineMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DisposalGroupClassificationAxis=us-gaap_DisposalGroupDisposedOfBySaleNotDiscontinuedOperationsMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DisposalGroupClassificationAxis=us-gaap_DisposalGroupDisposedOfBySaleNotDiscontinuedOperationsMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>109
<FILENAME>R96.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575601378304">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Income Taxes - Income Attributable to Domestic and Foreign Operations (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="3">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestmentsAbstract', window );"><strong>Income (loss) from continuing operations before income taxes</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic', window );">Domestic</a></td>
<td class="nump">$ 47,368<span></span>
</td>
<td class="nump">$ 23,561<span></span>
</td>
<td class="num">$ (10,292)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign', window );">Foreign</a></td>
<td class="nump">3,617<span></span>
</td>
<td class="nump">2,119<span></span>
</td>
<td class="nump">1,828<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest', window );">Income before income taxes</a></td>
<td class="nump">$ 50,985<span></span>
</td>
<td class="nump">$ 25,680<span></span>
</td>
<td class="num">$ (8,464)<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The portion of earnings or loss from continuing operations before income taxes that is attributable to domestic operations.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(h)(1))<br> -URI https://asc.fasb.org/extlink&amp;oid=120395691&amp;loc=d3e23780-122690<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB Topic 6.I.Fact.3)<br> -URI https://asc.fasb.org/extlink&amp;oid=122134291&amp;loc=d3e330036-122817<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of income (loss) from continuing operations, including income (loss) from equity method investments, before deduction of income tax expense (benefit), and income (loss) attributable to noncontrolling interest.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (c)<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8933-108599<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 30<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8906-108599<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (f)<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8933-108599<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 940<br> -SubTopic 20<br> -Section 25<br> -Paragraph 1<br> -URI https://asc.fasb.org/extlink&amp;oid=126941158&amp;loc=d3e41242-110953<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 22<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8736-108599<br><br>Reference 6: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03(10))<br> -URI https://asc.fasb.org/extlink&amp;oid=126953954&amp;loc=SL114868664-224227<br><br>Reference 7: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 220<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-04(8))<br> -URI https://asc.fasb.org/extlink&amp;oid=120400993&amp;loc=SL114874131-224263<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 235<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-05(b)(2))<br> -URI https://asc.fasb.org/extlink&amp;oid=120399901&amp;loc=d3e537907-122884<br><br>Reference 9: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 31<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8924-108599<br><br>Reference 10: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 220<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-04(15))<br> -URI https://asc.fasb.org/extlink&amp;oid=120399700&amp;loc=SL114874048-224260<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The portion of earnings or loss from continuing operations before income taxes that is attributable to foreign operations, which is defined as Income or Loss generated from operations located outside the entity's country of domicile.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(h)(1))<br> -URI https://asc.fasb.org/extlink&amp;oid=120395691&amp;loc=d3e23780-122690<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB Topic 6.I.Fact.3)<br> -URI https://asc.fasb.org/extlink&amp;oid=122134291&amp;loc=d3e330036-122817<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestmentsAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestmentsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>110
<FILENAME>R97.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575591390704">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Income Taxes - Components of Expense (Benefit) (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="3">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_CurrentIncomeTaxExpenseBenefitContinuingOperationsAbstract', window );"><strong>Current:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_CurrentForeignTaxExpenseBenefit', window );">Foreign</a></td>
<td class="nump">$ 1,506<span></span>
</td>
<td class="nump">$ 183<span></span>
</td>
<td class="nump">$ 22<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_CurrentStateAndLocalTaxExpenseBenefit', window );">State and local</a></td>
<td class="nump">577<span></span>
</td>
<td class="nump">110<span></span>
</td>
<td class="nump">204<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_CurrentIncomeTaxExpenseBenefit', window );">Total current expense (benefit) for income taxes</a></td>
<td class="nump">2,083<span></span>
</td>
<td class="nump">293<span></span>
</td>
<td class="nump">226<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DeferredIncomeTaxExpenseBenefitContinuingOperationsAbstract', window );"><strong>Deferred:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DeferredFederalIncomeTaxExpenseBenefit', window );">Federal</a></td>
<td class="num">(96,811)<span></span>
</td>
<td class="nump">119<span></span>
</td>
<td class="nump">136<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DeferredForeignIncomeTaxExpenseBenefit', window );">Foreign</a></td>
<td class="num">(484)<span></span>
</td>
<td class="num">(507)<span></span>
</td>
<td class="num">(320)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DeferredStateAndLocalIncomeTaxExpenseBenefit', window );">State and local</a></td>
<td class="num">(20,745)<span></span>
</td>
<td class="num">(263)<span></span>
</td>
<td class="num">(115)<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DeferredIncomeTaxExpenseBenefit', window );">Total deferred expense (benefit) for income taxes</a></td>
<td class="num">(118,040)<span></span>
</td>
<td class="num">(651)<span></span>
</td>
<td class="num">(299)<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncomeTaxExpenseBenefit', window );">Total expense (benefit) for income taxes</a></td>
<td class="num">$ (115,957)<span></span>
</td>
<td class="num">$ (358)<span></span>
</td>
<td class="num">$ (73)<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CurrentForeignTaxExpenseBenefit">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of current foreign income tax expense (benefit) pertaining to income (loss) from continuing operations.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(h)(1)(Note 1))<br> -URI https://asc.fasb.org/extlink&amp;oid=120395691&amp;loc=d3e23780-122690<br><br>Reference 2: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 9<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32639-109319<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CurrentForeignTaxExpenseBenefit</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CurrentIncomeTaxExpenseBenefit">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of current income tax expense (benefit) pertaining to taxable income (loss) from continuing operations.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB Topic 6.I.7)<br> -URI https://asc.fasb.org/extlink&amp;oid=122134291&amp;loc=d3e330036-122817<br><br>Reference 2: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(h)(1)(Note 1))<br> -URI https://asc.fasb.org/extlink&amp;oid=120395691&amp;loc=d3e23780-122690<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 9<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32639-109319<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB Topic 6.I.Fact.2)<br> -URI https://asc.fasb.org/extlink&amp;oid=122134291&amp;loc=d3e330036-122817<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CurrentIncomeTaxExpenseBenefit</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CurrentIncomeTaxExpenseBenefitContinuingOperationsAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CurrentIncomeTaxExpenseBenefitContinuingOperationsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CurrentStateAndLocalTaxExpenseBenefit">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of current state and local tax expense (benefit) attributable to income (loss) from continuing operations. Includes, but is not limited to, current regional, territorial, and provincial tax expense (benefit) for non-US (United States of America) jurisdiction.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(h)(1)(Note 1))<br> -URI https://asc.fasb.org/extlink&amp;oid=120395691&amp;loc=d3e23780-122690<br><br>Reference 2: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 9<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32639-109319<br><br>Reference 3: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB Topic 6.I.7)<br> -URI https://asc.fasb.org/extlink&amp;oid=122134291&amp;loc=d3e330036-122817<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CurrentStateAndLocalTaxExpenseBenefit</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredFederalIncomeTaxExpenseBenefit">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of deferred federal tax expense (benefit) attributable to income (loss) from continuing operations. Includes, but is not limited to, deferred national tax expense (benefit) for non-US (United States of America) jurisdiction.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB Topic 6.I.7)<br> -URI https://asc.fasb.org/extlink&amp;oid=122134291&amp;loc=d3e330036-122817<br><br>Reference 2: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(h)(1)(Note 1))<br> -URI https://asc.fasb.org/extlink&amp;oid=120395691&amp;loc=d3e23780-122690<br><br>Reference 3: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 9<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32639-109319<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredFederalIncomeTaxExpenseBenefit</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredForeignIncomeTaxExpenseBenefit">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of deferred foreign income tax expense (benefit) pertaining to income (loss) from continuing operations.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB Topic 6.I.7)<br> -URI https://asc.fasb.org/extlink&amp;oid=122134291&amp;loc=d3e330036-122817<br><br>Reference 2: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(h)(1)(Note 1))<br> -URI https://asc.fasb.org/extlink&amp;oid=120395691&amp;loc=d3e23780-122690<br><br>Reference 3: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 9<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32639-109319<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredForeignIncomeTaxExpenseBenefit</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredIncomeTaxExpenseBenefit">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of deferred income tax expense (benefit) pertaining to income (loss) from continuing operations.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB Topic 6.I.7)<br> -URI https://asc.fasb.org/extlink&amp;oid=122134291&amp;loc=d3e330036-122817<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB Topic 6.I.Fact.1)<br> -URI https://asc.fasb.org/extlink&amp;oid=122134291&amp;loc=d3e330036-122817<br><br>Reference 3: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(h)(1)(Note 1))<br> -URI https://asc.fasb.org/extlink&amp;oid=120395691&amp;loc=d3e23780-122690<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB Topic 6.I.Fact.2)<br> -URI https://asc.fasb.org/extlink&amp;oid=122134291&amp;loc=d3e330036-122817<br><br>Reference 5: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=126954810&amp;loc=d3e3602-108585<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 9<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32639-109319<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredIncomeTaxExpenseBenefit</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredIncomeTaxExpenseBenefitContinuingOperationsAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredIncomeTaxExpenseBenefitContinuingOperationsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredStateAndLocalIncomeTaxExpenseBenefit">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of deferred state and local tax expense (benefit) attributable to income (loss) from continuing operations. Includes, but is not limited to, deferred regional, territorial, and provincial tax expense (benefit) for non-US (United States of America) jurisdiction.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 9<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32639-109319<br><br>Reference 2: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB Topic 6.I.7)<br> -URI https://asc.fasb.org/extlink&amp;oid=122134291&amp;loc=d3e330036-122817<br><br>Reference 3: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(h)(1)(Note 1))<br> -URI https://asc.fasb.org/extlink&amp;oid=120395691&amp;loc=d3e23780-122690<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredStateAndLocalIncomeTaxExpenseBenefit</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxExpenseBenefit">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of current income tax expense (benefit) and deferred income tax expense (benefit) pertaining to continuing operations.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB TOPIC 6.I.7)<br> -URI https://asc.fasb.org/extlink&amp;oid=122134291&amp;loc=d3e330036-122817<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 10<br> -URI https://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32672-109319<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 22<br> -Subparagraph (h)<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8736-108599<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(h))<br> -URI https://asc.fasb.org/extlink&amp;oid=120395691&amp;loc=d3e23780-122690<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 9<br> -URI https://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22663-107794<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 20<br> -Section 45<br> -Paragraph 2<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=123586238&amp;loc=d3e38679-109324<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 220<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-04(9))<br> -URI https://asc.fasb.org/extlink&amp;oid=120400993&amp;loc=SL114874131-224263<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -URI https://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22658-107794<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeTaxExpenseBenefit</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>111
<FILENAME>R98.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575595836608">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Income Taxes - Reconciliation to Statutory Tax Expense (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="3">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncomeTaxDisclosureAbstract', window );"><strong>Income Taxes</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate', window );">Income tax expense (benefit) at U.S. statutory rates</a></td>
<td class="nump">$ 10,706<span></span>
</td>
<td class="nump">$ 5,393<span></span>
</td>
<td class="num">$ (1,777)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncomeTaxReconciliationStateAndLocalIncomeTaxes', window );">State taxes, net of U.S. federal impact</a></td>
<td class="nump">1,101<span></span>
</td>
<td class="num">(607)<span></span>
</td>
<td class="num">(121)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncomeTaxReconciliationForeignIncomeTaxRateDifferential', window );">Effect of international operations</a></td>
<td class="num">(11,149)<span></span>
</td>
<td class="nump">609<span></span>
</td>
<td class="num">(131)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncomeTaxReconciliationTaxCreditsResearch', window );">Research and development tax credit</a></td>
<td class="num">(6,470)<span></span>
</td>
<td class="num">(3,964)<span></span>
</td>
<td class="nump">726<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance', window );">Net change in valuation allowance</a></td>
<td class="num">(104,972)<span></span>
</td>
<td class="num">(2,389)<span></span>
</td>
<td class="nump">388<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_IncomeTaxReconciliationChangeInAccrualForUnrecognizedTaxBenefits', window );">Change in accrual for unrecognized tax benefits</a></td>
<td class="nump">3,349<span></span>
</td>
<td class="nump">398<span></span>
</td>
<td class="num">(6)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost', window );">Share-based compensation</a></td>
<td class="nump">606<span></span>
</td>
<td class="nump">1,208<span></span>
</td>
<td class="nump">2,248<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncomeTaxReconciliationNondeductibleExpenseImpairmentLosses', window );">Asset impairment</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">728<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_EffectiveIncomeTaxRateReconciliationPartialExtinguishmentOfDebtAmount', window );">Partial extinguishment of 2023 Notes</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(1,090)<span></span>
</td>
<td class="num">(2,292)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncomeTaxEffectsAllocatedDirectlyToEquityCumulativeEffectOfChangeInAccountingPrinciple', window );">Adoption of new accounting standard</a></td>
<td class="num">(9,295)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncomeTaxReconciliationOtherAdjustments', window );">Other</a></td>
<td class="nump">167<span></span>
</td>
<td class="nump">84<span></span>
</td>
<td class="nump">164<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncomeTaxExpenseBenefit', window );">Total expense (benefit) for income taxes</a></td>
<td class="num">$ (115,957)<span></span>
</td>
<td class="num">$ (358)<span></span>
</td>
<td class="num">$ (73)<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxDisclosureAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeTaxDisclosureAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxEffectsAllocatedDirectlyToEquityCumulativeEffectOfChangeInAccountingPrinciple">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of cumulative tax effect on beginning retained earnings from change in accounting principle.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB TOPIC 6.I.7)<br> -URI https://asc.fasb.org/extlink&amp;oid=122134291&amp;loc=d3e330036-122817<br><br>Reference 2: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 20<br> -Section 45<br> -Paragraph 11<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=123586238&amp;loc=d3e39076-109324<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeTaxEffectsAllocatedDirectlyToEquityCumulativeEffectOfChangeInAccountingPrinciple</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxExpenseBenefit">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of current income tax expense (benefit) and deferred income tax expense (benefit) pertaining to continuing operations.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB TOPIC 6.I.7)<br> -URI https://asc.fasb.org/extlink&amp;oid=122134291&amp;loc=d3e330036-122817<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 10<br> -URI https://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32672-109319<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 22<br> -Subparagraph (h)<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8736-108599<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(h))<br> -URI https://asc.fasb.org/extlink&amp;oid=120395691&amp;loc=d3e23780-122690<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 9<br> -URI https://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22663-107794<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 20<br> -Section 45<br> -Paragraph 2<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=123586238&amp;loc=d3e38679-109324<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 220<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-04(9))<br> -URI https://asc.fasb.org/extlink&amp;oid=120400993&amp;loc=SL114874131-224263<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -URI https://asc.fasb.org/extlink&amp;oid=124431687&amp;loc=d3e22658-107794<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeTaxExpenseBenefit</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of the difference between reported income tax expense (benefit) and expected income tax expense (benefit) computed by applying the domestic federal statutory income tax rates to pretax income (loss) from continuing operations attributable to increase (decrease) in the valuation allowance for deferred tax assets.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 12<br> -URI https://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32687-109319<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxReconciliationForeignIncomeTaxRateDifferential">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of the difference between reported income tax expense (benefit) and expected income tax expense (benefit) computed by applying the domestic federal statutory income tax rates to pretax income (loss) from continuing operations attributable to foreign income tax expense (benefit).</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 12<br> -URI https://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32687-109319<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeTaxReconciliationForeignIncomeTaxRateDifferential</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The amount of income tax expense or benefit for the period computed by applying the domestic federal statutory tax rates to pretax income from continuing operations.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 12<br> -URI https://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32687-109319<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxReconciliationNondeductibleExpenseImpairmentLosses">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of the difference between reported income tax expense (benefit) and expected income tax expense (benefit) computed by applying the domestic federal statutory income tax rates to pretax income (loss) from continuing operations attributable to nondeductible impairment loss.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 12<br> -URI https://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32687-109319<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeTaxReconciliationNondeductibleExpenseImpairmentLosses</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of reported income tax expense (benefit) in excess of (less than) expected income tax expense (benefit) computed by applying domestic federal statutory income tax rate to pretax income (loss) from continuing operation, attributable to nondeductible expense for award under share-based payment arrangement. Includes, but is not limited to, expense determined to be nondeductible upon grant or after for award under share-based payment arrangement.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 12<br> -URI https://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32687-109319<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxReconciliationOtherAdjustments">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of the difference between reported income tax expense (benefit) and expected income tax expense (benefit) computed by applying the domestic federal statutory income tax rates to pretax income (loss) from continuing operations attributable to other adjustments.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 12<br> -URI https://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32687-109319<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeTaxReconciliationOtherAdjustments</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxReconciliationStateAndLocalIncomeTaxes">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of the difference between reported income tax expense (benefit) and expected income tax expense (benefit) computed by applying the domestic federal statutory income tax rates to pretax income (loss) from continuing operations attributable to state and local income tax expense (benefit).</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 12<br> -URI https://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32687-109319<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeTaxReconciliationStateAndLocalIncomeTaxes</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxReconciliationTaxCreditsResearch">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of the difference between reported income tax expense (benefit) and expected income tax expense (benefit) computed by applying the domestic federal statutory income tax rates to pretax income (loss) from continuing operations attributable to research tax credit.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 12<br> -URI https://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32687-109319<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeTaxReconciliationTaxCreditsResearch</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_EffectiveIncomeTaxRateReconciliationPartialExtinguishmentOfDebtAmount">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of the difference between reported income tax expense (benefit) and expected income tax expense (benefit) computed by applying the domestic federal statutory income tax rates to pretax income (loss) from continuing operations attributable to partial extinguishment of debt.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_EffectiveIncomeTaxRateReconciliationPartialExtinguishmentOfDebtAmount</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_IncomeTaxReconciliationChangeInAccrualForUnrecognizedTaxBenefits">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Represents the change in accrual for unrecognized tax benefits.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_IncomeTaxReconciliationChangeInAccrualForUnrecognizedTaxBenefits</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>112
<FILENAME>R99.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575596087728">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Income Taxes - Deferred Taxes (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
<th class="th" colspan="1"></th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ComponentsOfDeferredTaxAssetsAbstract', window );"><strong>Deferred tax assets:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DeferredTaxAssetsInventory', window );">Inventory valuation</a></td>
<td class="nump">$ 11,931<span></span>
</td>
<td class="nump">$ 11,822<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DeferredTaxAssetsOperatingLossCarryforwards', window );">Net operating losses</a></td>
<td class="nump">5,647<span></span>
</td>
<td class="nump">38,816<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DeferredTaxAssetsTaxCreditCarryforwards', window );">Credit carry forwards</a></td>
<td class="nump">59,988<span></span>
</td>
<td class="nump">57,810<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReserves', window );">Warranty and installation accruals</a></td>
<td class="nump">1,862<span></span>
</td>
<td class="nump">1,730<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost', window );">Share-based compensation</a></td>
<td class="nump">5,267<span></span>
</td>
<td class="nump">4,033<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DeferredTaxAssetsDeferredIncome', window );">Customer deposits and deferred revenue</a></td>
<td class="nump">24,504<span></span>
</td>
<td class="nump">9,908<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_DeferredTaxAssetsOperatingLeases', window );">Operating leases</a></td>
<td class="nump">8,349<span></span>
</td>
<td class="nump">8,464<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DeferredTaxAssetsInProcessResearchAndDevelopment', window );">Research and experimental ("R&amp;E") capitalization</a></td>
<td class="nump">19,071<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DeferredTaxAssetsOther', window );">Other</a></td>
<td class="nump">6,553<span></span>
</td>
<td class="nump">5,880<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DeferredTaxAssetsGross', window );">Total deferred tax assets</a></td>
<td class="nump">143,172<span></span>
</td>
<td class="nump">138,463<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DeferredTaxAssetsValuationAllowance', window );">Valuation allowance</a></td>
<td class="num">(11,083)<span></span>
</td>
<td class="num">(116,054)<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DeferredTaxAssetsNet', window );">Net deferred tax assets</a></td>
<td class="nump">132,089<span></span>
</td>
<td class="nump">22,409<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ComponentsOfDeferredTaxLiabilitiesAbstract', window );"><strong>Deferred tax liabilities:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DeferredTaxLiabilitiesGoodwillAndIntangibleAssetsIntangibleAssets', window );">Purchased intangible assets</a></td>
<td class="nump">8,724<span></span>
</td>
<td class="nump">6,633<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_veco_DeferredTaxLiabilitiesFinancingArrangementsNet', window );">Convertible Senior Notes</a></td>
<td class="num">(39)<span></span>
</td>
<td class="nump">10,018<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DeferredTaxLiabilitiesLeasingArrangements', window );">Operating leases</a></td>
<td class="nump">5,994<span></span>
</td>
<td class="nump">6,539<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DeferredTaxLiabilitiesPropertyPlantAndEquipment', window );">Depreciation</a></td>
<td class="nump">2,346<span></span>
</td>
<td class="nump">2,372<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DeferredIncomeTaxLiabilities', window );">Total deferred tax liabilities</a></td>
<td class="nump">17,025<span></span>
</td>
<td class="nump">25,562<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DeferredTaxAssetsLiabilitiesNet', window );">Net deferred taxes, asset</a></td>
<td class="nump">115,064<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DeferredTaxLiabilities', window );">Net deferred taxes, liability</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="num">$ (3,153)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DeferredTaxLiabilitiesUndistributedForeignEarnings', window );">Accrual for foreign tax withholdings on unremitted earnings</a></td>
<td class="nump">900<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ValuationAllowanceAbstract', window );"><strong>Valuation allowance</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ValuationAllowanceDeferredTaxAssetChangeInAmount', window );">Increase (decrease) in valuation allowance</a></td>
<td class="num">$ (104,900)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ComponentsOfDeferredTaxAssetsAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ComponentsOfDeferredTaxAssetsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ComponentsOfDeferredTaxLiabilitiesAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ComponentsOfDeferredTaxLiabilitiesAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredIncomeTaxLiabilities">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of deferred tax liability attributable to taxable temporary differences.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(26)(b))<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32537-109319<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 210<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-03(15)(b)(2))<br> -URI https://asc.fasb.org/extlink&amp;oid=126734703&amp;loc=d3e572229-122910<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 210<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-03(15)(2))<br> -URI https://asc.fasb.org/extlink&amp;oid=126897435&amp;loc=d3e534808-122878<br><br>Reference 5: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(26)(a))<br> -URI https://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredIncomeTaxLiabilities</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredTaxAssetsDeferredIncome">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount before allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences from deferred income.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -URI https://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32632-109319<br><br>Reference 2: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 6<br> -URI https://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32621-109319<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredTaxAssetsDeferredIncome</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredTaxAssetsGross">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount before allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences and carryforwards.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32537-109319<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredTaxAssetsGross</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredTaxAssetsInProcessResearchAndDevelopment">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount before allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences from in-process research and development costs expensed in connection with a business combination.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 6<br> -URI https://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32621-109319<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -URI https://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32632-109319<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredTaxAssetsInProcessResearchAndDevelopment</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredTaxAssetsInventory">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount before allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences from inventory.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -URI https://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32632-109319<br><br>Reference 2: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 6<br> -URI https://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32621-109319<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredTaxAssetsInventory</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredTaxAssetsLiabilitiesNet">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount, after allocation of valuation allowances and deferred tax liability, of deferred tax asset attributable to deductible differences and carryforwards, without jurisdictional netting.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -URI https://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32537-109319<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredTaxAssetsLiabilitiesNet</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredTaxAssetsNet">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount after allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences and carryforwards.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -URI https://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32537-109319<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredTaxAssetsNet</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredTaxAssetsOperatingLossCarryforwards">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount before allocation of valuation allowances of deferred tax asset attributable to deductible operating loss carryforwards.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -URI https://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32632-109319<br><br>Reference 2: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 6<br> -URI https://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32621-109319<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredTaxAssetsOperatingLossCarryforwards</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredTaxAssetsOther">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount, before allocation of valuation allowance, of deferred tax asset attributable to deductible temporary differences, classified as other.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 6<br> -URI https://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32621-109319<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -URI https://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32632-109319<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredTaxAssetsOther</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredTaxAssetsTaxCreditCarryforwards">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount, before allocation of a valuation allowances, of deferred tax assets attributable to deductible tax credit carryforwards including, but not limited to, research, foreign, general business, alternative minimum tax, and other deductible tax credit carryforwards.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -URI https://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32632-109319<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32559-109319<br><br>Reference 3: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 6<br> -URI https://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32621-109319<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredTaxAssetsTaxCreditCarryforwards</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount before allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences from share-based compensation.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 6<br> -URI https://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32621-109319<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -URI https://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32632-109319<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReserves">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount before allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences from warranty reserves.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -URI https://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32632-109319<br><br>Reference 2: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 6<br> -URI https://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32621-109319<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReserves</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredTaxAssetsValuationAllowance">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of deferred tax assets for which it is more likely than not that a tax benefit will not be realized.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)<br> -URI https://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32537-109319<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredTaxAssetsValuationAllowance</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredTaxLiabilities">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount, after deferred tax asset, of deferred tax liability attributable to taxable differences without jurisdictional netting.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 45<br> -Paragraph 6<br> -URI https://asc.fasb.org/extlink&amp;oid=123427490&amp;loc=d3e31931-109318<br><br>Reference 2: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -URI https://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32537-109319<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredTaxLiabilities</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredTaxLiabilitiesGoodwillAndIntangibleAssetsIntangibleAssets">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of deferred tax liability attributable to taxable temporary differences from intangible assets other than goodwill.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 6<br> -URI https://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32621-109319<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -URI https://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32632-109319<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredTaxLiabilitiesGoodwillAndIntangibleAssetsIntangibleAssets</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredTaxLiabilitiesLeasingArrangements">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of deferred tax liability attributable to taxable temporary differences from leasing arrangements.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -URI https://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32632-109319<br><br>Reference 2: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 6<br> -URI https://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32621-109319<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredTaxLiabilitiesLeasingArrangements</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredTaxLiabilitiesPropertyPlantAndEquipment">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of deferred tax liability attributable to taxable temporary differences from property, plant, and equipment.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 6<br> -URI https://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32621-109319<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -URI https://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32632-109319<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredTaxLiabilitiesPropertyPlantAndEquipment</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredTaxLiabilitiesUndistributedForeignEarnings">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of deferred tax liability attributable to taxable temporary differences from undistributed earnings of subsidiary and other recognized entity not within country of domicile. Includes, but is not limited to, other basis differences.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 6<br> -URI https://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32621-109319<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredTaxLiabilitiesUndistributedForeignEarnings</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ValuationAllowanceAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ValuationAllowanceAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ValuationAllowanceDeferredTaxAssetChangeInAmount">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of increase (decrease) in the valuation allowance for a specified deferred tax asset.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -URI https://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32537-109319<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ValuationAllowanceDeferredTaxAssetChangeInAmount</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_DeferredTaxAssetsOperatingLeases">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>a</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_DeferredTaxAssetsOperatingLeases</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_veco_DeferredTaxLiabilitiesFinancingArrangementsNet">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Net amount of deferred tax liability attributable to taxable temporary differences from financing arrangements.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">veco_DeferredTaxLiabilitiesFinancingArrangementsNet</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>veco_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>113
<FILENAME>R100.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575600703744">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Income Taxes - Operating Loss Carryforwards (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OperatingLossCarryforwardsLineItems', window );"><strong>Operating loss carryforwards disclosures</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DeferredTaxAssetsOperatingLossCarryforwards', window );">Net deferred tax asset</a></td>
<td class="nump">$ 5,647<span></span>
</td>
<td class="nump">$ 38,816<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncomeTaxAuthorityAxis=us-gaap_StateAndLocalJurisdictionMember', window );">State and local</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OperatingLossCarryforwardsLineItems', window );"><strong>Operating loss carryforwards disclosures</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OperatingLossCarryforwards', window );">Net operating loss carryforwards</a></td>
<td class="nump">59,300<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DeferredTaxAssetsOperatingLossCarryforwards', window );">Net deferred tax asset</a></td>
<td class="nump">$ 4,100<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredTaxAssetsOperatingLossCarryforwards">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount before allocation of valuation allowances of deferred tax asset attributable to deductible operating loss carryforwards.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -URI https://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32632-109319<br><br>Reference 2: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 6<br> -URI https://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32621-109319<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredTaxAssetsOperatingLossCarryforwards</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OperatingLossCarryforwards">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of operating loss carryforward, before tax effects, available to reduce future taxable income under enacted tax laws.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32559-109319<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingLossCarryforwards</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OperatingLossCarryforwardsLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingLossCarryforwardsLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxAuthorityAxis=us-gaap_StateAndLocalJurisdictionMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeTaxAuthorityAxis=us-gaap_StateAndLocalJurisdictionMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>114
<FILENAME>R101.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575594105824">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Income Taxes - Tax Credit Carryforwards (Details)<br> $ in Millions</strong></div></th>
<th class="th">
<div>Dec. 31, 2022 </div>
<div>USD ($)</div>
</th>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncomeTaxAuthorityAxis=us-gaap_DomesticCountryMember', window );">Federal | Research and development tax credit carryforward</a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_TaxCreditCarryforwardLineItems', window );"><strong>Tax credit carryforward</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_TaxCreditCarryforwardAmount', window );">Tax credit carry forwards</a></td>
<td class="nump">$ 36.5<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncomeTaxAuthorityAxis=us-gaap_StateAndLocalJurisdictionMember', window );">State and local</a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_TaxCreditCarryforwardLineItems', window );"><strong>Tax credit carryforward</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_TaxCreditCarryforwardAmount', window );">Tax credit carry forwards</a></td>
<td class="nump">32.6<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncomeTaxAuthorityAxis=us-gaap_ForeignCountryMember', window );">Foreign tax</a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_TaxCreditCarryforwardLineItems', window );"><strong>Tax credit carryforward</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_TaxCreditCarryforwardAmount', window );">Tax credit carry forwards</a></td>
<td class="nump">$ 8.7<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_TaxCreditCarryforwardAmount">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The amount of the tax credit carryforward, before tax effects, available to reduce future taxable income under enacted tax laws.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32559-109319<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_TaxCreditCarryforwardAmount</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_TaxCreditCarryforwardLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_TaxCreditCarryforwardLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxAuthorityAxis=us-gaap_DomesticCountryMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeTaxAuthorityAxis=us-gaap_DomesticCountryMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_TaxCreditCarryforwardAxis=us-gaap_ResearchMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_TaxCreditCarryforwardAxis=us-gaap_ResearchMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxAuthorityAxis=us-gaap_StateAndLocalJurisdictionMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeTaxAuthorityAxis=us-gaap_StateAndLocalJurisdictionMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxAuthorityAxis=us-gaap_ForeignCountryMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeTaxAuthorityAxis=us-gaap_ForeignCountryMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>115
<FILENAME>R102.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575601446144">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Income Taxes - Uncertain Tax Positions (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="3">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ReconciliationOfUnrecognizedTaxBenefitsExcludingAmountsPertainingToExaminedTaxReturnsRollForward', window );"><strong>Change in unrecognized tax benefits</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_UnrecognizedTaxBenefits', window );">Balance at beginning of year</a></td>
<td class="nump">$ 12,761<span></span>
</td>
<td class="nump">$ 12,363<span></span>
</td>
<td class="nump">$ 12,369<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromCurrentPeriodTaxPositions', window );">Additions for tax positions related to current year</a></td>
<td class="nump">4,180<span></span>
</td>
<td class="nump">2,642<span></span>
</td>
<td class="nump">1,217<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromPriorPeriodTaxPositions', window );">Additions for tax positions relating to prior years</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">50<span></span>
</td>
<td class="nump">47<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_UnrecognizedTaxBenefitsDecreasesResultingFromPriorPeriodTaxPositions', window );">Reductions for tax positions relating to prior years</a></td>
<td class="num">(731)<span></span>
</td>
<td class="num">(1,196)<span></span>
</td>
<td class="num">(1,166)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_UnrecognizedTaxBenefitsDecreasesResultingFromSettlementsWithTaxingAuthorities', window );">Settlements</a></td>
<td class="num">(100)<span></span>
</td>
<td class="num">(1,098)<span></span>
</td>
<td class="num">(104)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_UnrecognizedTaxBenefits', window );">Balance at end of year</a></td>
<td class="nump">16,110<span></span>
</td>
<td class="nump">12,761<span></span>
</td>
<td class="nump">$ 12,363<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_UnrecognizedTaxBenefitsThatWouldImpactEffectiveTaxRate', window );">Unrecognized tax benefits that would impact effective tax rate if recognized</a></td>
<td class="nump">13,500<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued', window );">Accrued interest and penalties</a></td>
<td class="nump">$ 500<span></span>
</td>
<td class="nump">$ 400<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ReconciliationOfUnrecognizedTaxBenefitsExcludingAmountsPertainingToExaminedTaxReturnsRollForward">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>A roll forward is a reconciliation of a concept from the beginning of a period to the end of a period.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ReconciliationOfUnrecognizedTaxBenefitsExcludingAmountsPertainingToExaminedTaxReturnsRollForward</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_UnrecognizedTaxBenefits">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of unrecognized tax benefits.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 45<br> -Paragraph 10B<br> -URI https://asc.fasb.org/extlink&amp;oid=123427490&amp;loc=SL37586934-109318<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 15A<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=SL6600010-109319<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_UnrecognizedTaxBenefits</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_UnrecognizedTaxBenefitsDecreasesResultingFromPriorPeriodTaxPositions">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of decrease in unrecognized tax benefits resulting from tax positions taken in prior period tax returns.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 15A<br> -Subparagraph (a)(1)<br> -URI https://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=SL6600010-109319<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_UnrecognizedTaxBenefitsDecreasesResultingFromPriorPeriodTaxPositions</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_UnrecognizedTaxBenefitsDecreasesResultingFromSettlementsWithTaxingAuthorities">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of decrease in unrecognized tax benefits resulting from settlements with taxing authorities.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 15A<br> -Subparagraph (a)(3)<br> -URI https://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=SL6600010-109319<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_UnrecognizedTaxBenefitsDecreasesResultingFromSettlementsWithTaxingAuthorities</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount accrued for interest on an underpayment of income taxes and penalties related to a tax position claimed or expected to be claimed in the tax return.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 15<br> -Subparagraph (c)<br> -URI https://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=d3e32718-109319<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromCurrentPeriodTaxPositions">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of increase in unrecognized tax benefits resulting from tax positions that have been or will be taken in current period tax return.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 15A<br> -Subparagraph (a)(2)<br> -URI https://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=SL6600010-109319<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromCurrentPeriodTaxPositions</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromPriorPeriodTaxPositions">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of increase in unrecognized tax benefits resulting from tax positions taken in prior period tax returns.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 15A<br> -Subparagraph (a)(1)<br> -URI https://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=SL6600010-109319<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromPriorPeriodTaxPositions</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_UnrecognizedTaxBenefitsThatWouldImpactEffectiveTaxRate">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The total amount of unrecognized tax benefits that, if recognized, would affect the effective tax rate.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 15A<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=121826272&amp;loc=SL6600010-109319<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_UnrecognizedTaxBenefitsThatWouldImpactEffectiveTaxRate</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>116
<FILENAME>R103.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575594279616">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Segment Reporting and Geographic Information - Segment (Details)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="3">12 Months Ended</th>
</tr>
<tr>
<th class="th">
<div>Dec. 31, 2022 </div>
<div>USD ($) </div>
<div>segment</div>
</th>
<th class="th">
<div>Dec. 31, 2021 </div>
<div>USD ($)</div>
</th>
<th class="th">
<div>Dec. 31, 2020 </div>
<div>USD ($)</div>
</th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_SegmentReportingInformationLineItems', window );"><strong>Revenue reporting by end-market and geographic region</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_NumberOfOperatingSegments', window );">Number of operating segments | segment</a></td>
<td class="nump">1<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_NumberOfReportableSegments', window );">Number of reportable segments | segment</a></td>
<td class="nump">1<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_RevenueFromContractWithCustomerIncludingAssessedTax', window );">Net sales</a></td>
<td class="nump">$ 646,137<span></span>
</td>
<td class="nump">$ 583,277<span></span>
</td>
<td class="nump">$ 454,163<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_srt_ProductOrServiceAxis=veco_SemiconductorMember', window );">Semiconductor</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_SegmentReportingInformationLineItems', window );"><strong>Revenue reporting by end-market and geographic region</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_RevenueFromContractWithCustomerIncludingAssessedTax', window );">Net sales</a></td>
<td class="nump">369,369<span></span>
</td>
<td class="nump">247,051<span></span>
</td>
<td class="nump">165,909<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_srt_ProductOrServiceAxis=veco_CompoundSemiconductorMember', window );">Compound Semiconductor</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_SegmentReportingInformationLineItems', window );"><strong>Revenue reporting by end-market and geographic region</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_RevenueFromContractWithCustomerIncludingAssessedTax', window );">Net sales</a></td>
<td class="nump">121,194<span></span>
</td>
<td class="nump">106,972<span></span>
</td>
<td class="nump">107,922<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_srt_ProductOrServiceAxis=veco_DataStorageMember', window );">Data Storage</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_SegmentReportingInformationLineItems', window );"><strong>Revenue reporting by end-market and geographic region</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_RevenueFromContractWithCustomerIncludingAssessedTax', window );">Net sales</a></td>
<td class="nump">87,544<span></span>
</td>
<td class="nump">168,760<span></span>
</td>
<td class="nump">123,288<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_srt_ProductOrServiceAxis=veco_ScientificAndOtherMember', window );">Scientific &amp; Other</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_SegmentReportingInformationLineItems', window );"><strong>Revenue reporting by end-market and geographic region</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_RevenueFromContractWithCustomerIncludingAssessedTax', window );">Net sales</a></td>
<td class="nump">$ 68,030<span></span>
</td>
<td class="nump">$ 60,494<span></span>
</td>
<td class="nump">$ 57,044<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NumberOfOperatingSegments">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Number of operating segments. An operating segment is a component of an enterprise: (a) that engages in business activities from which it may earn revenues and incur expenses (including revenues and expenses relating to transactions with other components of the same enterprise), (b) whose operating results are regularly reviewed by the enterprise's chief operating decision maker to make decisions about resources to be allocated to the segment and assess its performance, and (c) for which discrete financial information is available. An operating segment may engage in business activities for which it has yet to earn revenues, for example, start-up operations may be operating segments before earning revenues.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 18<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8672-108599<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NumberOfOperatingSegments</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:integerItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NumberOfReportableSegments">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Number of segments reported by the entity. A reportable segment is a component of an entity for which there is an accounting requirement to report separate financial information on that component in the entity's financial statements.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 18<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8672-108599<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NumberOfReportableSegments</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:integerItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RevenueFromContractWithCustomerIncludingAssessedTax">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount, including tax collected from customer, of revenue from satisfaction of performance obligation by transferring promised good or service to customer. Tax collected from customer is tax assessed by governmental authority that is both imposed on and concurrent with specific revenue-producing transaction, including, but not limited to, sales, use, value-added and excise.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 41<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e9038-108599<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 50<br> -Paragraph 5<br> -URI https://asc.fasb.org/extlink&amp;oid=126920106&amp;loc=SL49130545-203045<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8933-108599<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8933-108599<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 30<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8906-108599<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 22<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8736-108599<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 22<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8736-108599<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 50<br> -Paragraph 4<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=126920106&amp;loc=SL49130543-203045<br><br>Reference 9: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 42<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e9054-108599<br><br>Reference 10: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 40<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e9031-108599<br><br>Reference 11: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 924<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB Topic 11.L)<br> -URI https://asc.fasb.org/extlink&amp;oid=6472922&amp;loc=d3e499488-122856<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RevenueFromContractWithCustomerIncludingAssessedTax</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SegmentReportingInformationLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SegmentReportingInformationLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_ProductOrServiceAxis=veco_SemiconductorMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_ProductOrServiceAxis=veco_SemiconductorMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_ProductOrServiceAxis=veco_CompoundSemiconductorMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_ProductOrServiceAxis=veco_CompoundSemiconductorMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_ProductOrServiceAxis=veco_DataStorageMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_ProductOrServiceAxis=veco_DataStorageMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_ProductOrServiceAxis=veco_ScientificAndOtherMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_ProductOrServiceAxis=veco_ScientificAndOtherMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>117
<FILENAME>R104.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575595513600">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Segment Reporting and Geographic Information - Geographic (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="3">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_SegmentReportingInformationLineItems', window );"><strong>Revenue reporting by end-market and geographic region</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_RevenueFromContractWithCustomerIncludingAssessedTax', window );">Net sales</a></td>
<td class="nump">$ 646,137<span></span>
</td>
<td class="nump">$ 583,277<span></span>
</td>
<td class="nump">$ 454,163<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentNet', window );">Long-lived tangible assets</a></td>
<td class="nump">107,281<span></span>
</td>
<td class="nump">99,743<span></span>
</td>
<td class="nump">65,271<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_srt_StatementGeographicalAxis=country_US', window );">United States</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_SegmentReportingInformationLineItems', window );"><strong>Revenue reporting by end-market and geographic region</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_RevenueFromContractWithCustomerIncludingAssessedTax', window );">Net sales</a></td>
<td class="nump">197,433<span></span>
</td>
<td class="nump">217,209<span></span>
</td>
<td class="nump">145,353<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentNet', window );">Long-lived tangible assets</a></td>
<td class="nump">106,550<span></span>
</td>
<td class="nump">99,220<span></span>
</td>
<td class="nump">64,967<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_srt_StatementGeographicalAxis=us-gaap_EMEAMember', window );">EMEA</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_SegmentReportingInformationLineItems', window );"><strong>Revenue reporting by end-market and geographic region</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_RevenueFromContractWithCustomerIncludingAssessedTax', window );">Net sales</a></td>
<td class="nump">87,837<span></span>
</td>
<td class="nump">55,129<span></span>
</td>
<td class="nump">73,124<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentNet', window );">Long-lived tangible assets</a></td>
<td class="nump">60<span></span>
</td>
<td class="nump">94<span></span>
</td>
<td class="nump">120<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_srt_StatementGeographicalAxis=country_CN', window );">China</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_SegmentReportingInformationLineItems', window );"><strong>Revenue reporting by end-market and geographic region</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_RevenueFromContractWithCustomerIncludingAssessedTax', window );">Net sales</a></td>
<td class="nump">123,703<span></span>
</td>
<td class="nump">105,998<span></span>
</td>
<td class="nump">57,589<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentNet', window );">Long-lived tangible assets</a></td>
<td class="nump">70<span></span>
</td>
<td class="nump">67<span></span>
</td>
<td class="nump">84<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_srt_StatementGeographicalAxis=veco_AsiaPacificExcludingChinaMember', window );">Rest of APAC</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_SegmentReportingInformationLineItems', window );"><strong>Revenue reporting by end-market and geographic region</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_RevenueFromContractWithCustomerIncludingAssessedTax', window );">Net sales</a></td>
<td class="nump">235,735<span></span>
</td>
<td class="nump">204,633<span></span>
</td>
<td class="nump">177,569<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentNet', window );">Long-lived tangible assets</a></td>
<td class="nump">601<span></span>
</td>
<td class="nump">362<span></span>
</td>
<td class="nump">100<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_srt_StatementGeographicalAxis=veco_RestOfWorldMember', window );">Rest Of World</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_SegmentReportingInformationLineItems', window );"><strong>Revenue reporting by end-market and geographic region</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_RevenueFromContractWithCustomerIncludingAssessedTax', window );">Net sales</a></td>
<td class="nump">$ 1,429<span></span>
</td>
<td class="nump">$ 308<span></span>
</td>
<td class="nump">$ 528<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PropertyPlantAndEquipmentNet">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount after accumulated depreciation, depletion and amortization of physical assets used in the normal conduct of business to produce goods and services and not intended for resale. Examples include, but are not limited to, land, buildings, machinery and equipment, office equipment, and furniture and fixtures.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 360<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -URI https://asc.fasb.org/extlink&amp;oid=6391035&amp;loc=d3e2868-110229<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 210<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-03(a)(8))<br> -URI https://asc.fasb.org/extlink&amp;oid=126734703&amp;loc=d3e572229-122910<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 360<br> -Section 50<br> -Paragraph 1<br> -URI https://asc.fasb.org/extlink&amp;oid=124429447&amp;loc=SL124453093-239630<br><br>Reference 4: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 852<br> -SubTopic 10<br> -Section 55<br> -Paragraph 10<br> -URI https://asc.fasb.org/extlink&amp;oid=84165509&amp;loc=d3e56426-112766<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentNet</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RevenueFromContractWithCustomerIncludingAssessedTax">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount, including tax collected from customer, of revenue from satisfaction of performance obligation by transferring promised good or service to customer. Tax collected from customer is tax assessed by governmental authority that is both imposed on and concurrent with specific revenue-producing transaction, including, but not limited to, sales, use, value-added and excise.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 41<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e9038-108599<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 50<br> -Paragraph 5<br> -URI https://asc.fasb.org/extlink&amp;oid=126920106&amp;loc=SL49130545-203045<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8933-108599<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8933-108599<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 30<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8906-108599<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 22<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8736-108599<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 22<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e8736-108599<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 50<br> -Paragraph 4<br> -Subparagraph (a)<br> -URI https://asc.fasb.org/extlink&amp;oid=126920106&amp;loc=SL49130543-203045<br><br>Reference 9: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 42<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e9054-108599<br><br>Reference 10: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 40<br> -URI https://asc.fasb.org/extlink&amp;oid=126901519&amp;loc=d3e9031-108599<br><br>Reference 11: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 924<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB Topic 11.L)<br> -URI https://asc.fasb.org/extlink&amp;oid=6472922&amp;loc=d3e499488-122856<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RevenueFromContractWithCustomerIncludingAssessedTax</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SegmentReportingInformationLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SegmentReportingInformationLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_StatementGeographicalAxis=country_US">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_StatementGeographicalAxis=country_US</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_StatementGeographicalAxis=us-gaap_EMEAMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_StatementGeographicalAxis=us-gaap_EMEAMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_StatementGeographicalAxis=country_CN">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_StatementGeographicalAxis=country_CN</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_StatementGeographicalAxis=veco_AsiaPacificExcludingChinaMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_StatementGeographicalAxis=veco_AsiaPacificExcludingChinaMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_StatementGeographicalAxis=veco_RestOfWorldMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_StatementGeographicalAxis=veco_RestOfWorldMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>118
<FILENAME>R105.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
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</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575599551024">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Subsequent Events (Details) - Subsequent event<br> $ in Millions</strong></div></th>
<th class="th">
<div>Jan. 31, 2023 </div>
<div>USD ($) </div>
<div>employee</div>
</th>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_SubsequentEventTypeAxis=us-gaap_SubsequentEventMember', window );">Epiluvac AB</a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_SubsequentEventLineItems', window );"><strong>Subsequent Events</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_EntityNumberOfEmployees', window );">Number of employees | employee</a></td>
<td class="nump">11<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_SubsequentEventTypeAxis=us-gaap_SubsequentEventMember', window );">Epiluvac AB</a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_SubsequentEventLineItems', window );"><strong>Subsequent Events</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PaymentsToAcquireBusinessesGross', window );">Payment to acquire business gross</a></td>
<td class="nump">$ 30<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_BusinessCombinationContingentConsiderationArrangementsRangeOfOutcomesValueHigh', window );">Potential additional performance based earn-outs</a></td>
<td class="nump">$ 35<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityNumberOfEmployees">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Number of persons employed by the Entity</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityNumberOfEmployees</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:decimalItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_BusinessCombinationContingentConsiderationArrangementsRangeOfOutcomesValueHigh">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>For contingent consideration arrangements recognized in connection with a business combination, this element represents an estimate of the high-end of the potential range (undiscounted) of the consideration which may be paid.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 805<br> -SubTopic 30<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (c)(3)<br> -URI https://asc.fasb.org/extlink&amp;oid=126975305&amp;loc=d3e6927-128479<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_BusinessCombinationContingentConsiderationArrangementsRangeOfOutcomesValueHigh</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PaymentsToAcquireBusinessesGross">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The cash outflow associated with the acquisition of business during the period. The cash portion only of the acquisition price.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 805<br> -SubTopic 30<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (b)(1)<br> -URI https://asc.fasb.org/extlink&amp;oid=126975305&amp;loc=d3e6927-128479<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 13<br> -Subparagraph (b)<br> -URI https://asc.fasb.org/extlink&amp;oid=126954810&amp;loc=d3e3213-108585<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PaymentsToAcquireBusinessesGross</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SubsequentEventLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Detail information of subsequent event by type. User is expected to use existing line items from elsewhere in the taxonomy as the primary line items for this disclosure, which is further associated with dimension and member elements pertaining to a subsequent event.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SubsequentEventLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SubsequentEventTypeAxis=us-gaap_SubsequentEventMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SubsequentEventTypeAxis=us-gaap_SubsequentEventMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_LegalEntityAxis=veco_EpiluvacAbMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_LegalEntityAxis=veco_EpiluvacAbMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_BusinessAcquisitionAxis=veco_EpiluvacAbMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_BusinessAcquisitionAxis=veco_EpiluvacAbMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>119
<FILENAME>R106.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.22.4</span><table class="report" border="0" cellspacing="2" id="idm140575594010256">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Schedule II - Valuation and Qualifying Accounts (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="3">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_srt_ValuationAndQualifyingAccountsDisclosureLineItems', window );"><strong>Valuation and Qualifying Accounts</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ValuationAllowancesAndReservesBalance', window );">Balance at Beginning of Period</a></td>
<td class="nump">$ 116,790<span></span>
</td>
<td class="nump">$ 119,179<span></span>
</td>
<td class="nump">$ 130,655<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ValuationAllowancesAndReservesChargedToCostAndExpense', window );">Charged (Credited) to Costs and Expenses</a></td>
<td class="num">(104,971)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">653<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ValuationAllowancesAndReservesDeductions', window );">Deductions</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(2,389)<span></span>
</td>
<td class="num">(12,129)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ValuationAllowancesAndReservesBalance', window );">Balance at End of Period</a></td>
<td class="nump">11,819<span></span>
</td>
<td class="nump">116,790<span></span>
</td>
<td class="nump">119,179<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ValuationAllowancesAndReservesTypeAxis=us-gaap_AllowanceForCreditLossMember', window );">Allowance for doubtful accounts</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_srt_ValuationAndQualifyingAccountsDisclosureLineItems', window );"><strong>Valuation and Qualifying Accounts</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ValuationAllowancesAndReservesBalance', window );">Balance at Beginning of Period</a></td>
<td class="nump">736<span></span>
</td>
<td class="nump">736<span></span>
</td>
<td class="nump">602<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ValuationAllowancesAndReservesChargedToCostAndExpense', window );">Charged (Credited) to Costs and Expenses</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">140<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ValuationAllowancesAndReservesDeductions', window );">Deductions</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(6)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ValuationAllowancesAndReservesBalance', window );">Balance at End of Period</a></td>
<td class="nump">736<span></span>
</td>
<td class="nump">736<span></span>
</td>
<td class="nump">736<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ValuationAllowancesAndReservesTypeAxis=us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember', window );">Valuation allowance in net deferred tax assets</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_srt_ValuationAndQualifyingAccountsDisclosureLineItems', window );"><strong>Valuation and Qualifying Accounts</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ValuationAllowancesAndReservesBalance', window );">Balance at Beginning of Period</a></td>
<td class="nump">116,054<span></span>
</td>
<td class="nump">118,443<span></span>
</td>
<td class="nump">130,053<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ValuationAllowancesAndReservesChargedToCostAndExpense', window );">Charged (Credited) to Costs and Expenses</a></td>
<td class="num">(104,971)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">513<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ValuationAllowancesAndReservesDeductions', window );">Deductions</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(2,389)<span></span>
</td>
<td class="num">(12,123)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ValuationAllowancesAndReservesBalance', window );">Balance at End of Period</a></td>
<td class="nump">$ 11,083<span></span>
</td>
<td class="nump">$ 116,054<span></span>
</td>
<td class="nump">$ 118,443<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_ValuationAndQualifyingAccountsDisclosureLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_ValuationAndQualifyingAccountsDisclosureLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>srt_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ValuationAllowancesAndReservesBalance">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of valuation and qualifying accounts and reserves.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 4<br> -Subparagraph (SX 210.12-09(Column B))<br> -URI https://asc.fasb.org/extlink&amp;oid=120395691&amp;loc=d3e24092-122690<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 4<br> -Subparagraph (SX 210.12-09(Column E))<br> -URI https://asc.fasb.org/extlink&amp;oid=120395691&amp;loc=d3e24092-122690<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ValuationAllowancesAndReservesBalance</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ValuationAllowancesAndReservesChargedToCostAndExpense">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of increase in valuation and qualifying accounts and reserves from charge to cost and expense.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 4<br> -Subparagraph (SX 210.12-09(Column C)(1))<br> -URI https://asc.fasb.org/extlink&amp;oid=120395691&amp;loc=d3e24092-122690<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ValuationAllowancesAndReservesChargedToCostAndExpense</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ValuationAllowancesAndReservesDeductions">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of decrease in valuation and qualifying accounts and reserves.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 4<br> -Subparagraph (SX 210.12-09(Column D))<br> -URI https://asc.fasb.org/extlink&amp;oid=120395691&amp;loc=d3e24092-122690<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ValuationAllowancesAndReservesDeductions</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ValuationAllowancesAndReservesTypeAxis=us-gaap_AllowanceForCreditLossMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ValuationAllowancesAndReservesTypeAxis=us-gaap_AllowanceForCreditLossMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ValuationAllowancesAndReservesTypeAxis=us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ValuationAllowancesAndReservesTypeAxis=us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>120
<FILENAME>veco-20221231x10k_htm.xml
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<XML>
<?xml version="1.0" encoding="utf-8"?>
<xbrl
  xmlns="http://www.xbrl.org/2003/instance"
  xmlns:country="http://xbrl.sec.gov/country/2022"
  xmlns:dei="http://xbrl.sec.gov/dei/2022"
  xmlns:iso4217="http://www.xbrl.org/2003/iso4217"
  xmlns:link="http://www.xbrl.org/2003/linkbase"
  xmlns:srt="http://fasb.org/srt/2022"
  xmlns:us-gaap="http://fasb.org/us-gaap/2022"
  xmlns:veco="http://www.veeco.com/20221231"
  xmlns:xbrldi="http://xbrl.org/2006/xbrldi"
  xmlns:xlink="http://www.w3.org/1999/xlink"
  xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance">
    <link:schemaRef xlink:href="veco-20221231.xsd" xlink:type="simple"/>
    <context id="Duration_1_1_2021_To_12_31_2021_srt_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_veco_OtherNonMarketableInvestmentMember_us-gaap_IncomeStatementLocationAxis_us-gaap_OtherNonoperatingIncomeExpenseMember_tTSp4c_SCkqj73Uc-NYwIQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis">veco:OtherNonMarketableInvestmentMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:OtherNonoperatingIncomeExpenseMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-12-31</endDate>
        </period>
    </context>
    <context id="As_Of_12_16_2021_srt_RangeAxis_srt_MaximumMember_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021Member_RxUGPsRTL0ajQ-_tTuLXIg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:RangeAxis">srt:MaximumMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:RevolvingCreditFacilityDecember2021Member</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-12-16</instant>
        </period>
    </context>
    <context id="As_Of_12_16_2021_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021Member_us-gaap_VariableRateAxis_us-gaap_SecuredOvernightFinancingRateSofrOvernightIndexSwapRateMember_yH5_YTWqjEuoxhZjlqLJyw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:RevolvingCreditFacilityDecember2021Member</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:VariableRateAxis">us-gaap:SecuredOvernightFinancingRateSofrOvernightIndexSwapRateMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-12-16</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_srt_RangeAxis_srt_MaximumMember_srt_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_veco_OtherNonMarketableInvestmentMember_rtkF_4iUZ0eg_uHUJbylvA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:RangeAxis">srt:MaximumMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="srt:ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis">veco:OtherNonMarketableInvestmentMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2021_srt_RangeAxis_srt_MaximumMember_srt_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_veco_OtherNonMarketableInvestmentMember_H7Pvmz13_kqx4gfV2pbg4g">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:RangeAxis">srt:MaximumMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="srt:ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis">veco:OtherNonMarketableInvestmentMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_CashAndCashEquivalentsAxis_veco_MoneyMarketFundsExcludingGovernmentFundsMember_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_zBQP3bFx00C_j5nPe2GU_g">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:CashAndCashEquivalentsAxis">veco:MoneyMarketFundsExcludingGovernmentFundsMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByFairValueHierarchyLevelAxis">us-gaap:FairValueInputsLevel1Member</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_CashAndCashEquivalentsAxis_veco_CertificateOfDepositsAndTimeDepositsMember_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_kb7en8Al0UeyY-BwVRymSQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:CashAndCashEquivalentsAxis">veco:CertificateOfDepositsAndTimeDepositsMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByFairValueHierarchyLevelAxis">us-gaap:FairValueInputsLevel1Member</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_CashAndCashEquivalentsAxis_veco_MoneyMarketFundsExcludingGovernmentFundsMember_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_1N68aHrwUEeEnGG3xkF-PA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:CashAndCashEquivalentsAxis">veco:MoneyMarketFundsExcludingGovernmentFundsMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_CashAndCashEquivalentsAxis_veco_CertificateOfDepositsAndTimeDepositsMember_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_Tl2Z9QaK_katKWTLd_NfjQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:CashAndCashEquivalentsAxis">veco:CertificateOfDepositsAndTimeDepositsMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2021_us-gaap_CashAndCashEquivalentsAxis_veco_MoneyMarketFundsExcludingGovernmentFundsMember_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_BYRwCfp1Q0WYuXQEj6V_jg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:CashAndCashEquivalentsAxis">veco:MoneyMarketFundsExcludingGovernmentFundsMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByFairValueHierarchyLevelAxis">us-gaap:FairValueInputsLevel1Member</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2021_us-gaap_CashAndCashEquivalentsAxis_veco_CertificateOfDepositsAndTimeDepositsMember_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_JiqTPtimWUGvvaKkaAWYdQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:CashAndCashEquivalentsAxis">veco:CertificateOfDepositsAndTimeDepositsMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByFairValueHierarchyLevelAxis">us-gaap:FairValueInputsLevel1Member</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2021_us-gaap_CashAndCashEquivalentsAxis_veco_MoneyMarketFundsExcludingGovernmentFundsMember_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_suw4EE81r06AU6N-K20ykg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:CashAndCashEquivalentsAxis">veco:MoneyMarketFundsExcludingGovernmentFundsMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2021_us-gaap_CashAndCashEquivalentsAxis_veco_CertificateOfDepositsAndTimeDepositsMember_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_ytqgmgI0iU2Mff9bwHjo2A">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:CashAndCashEquivalentsAxis">veco:CertificateOfDepositsAndTimeDepositsMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-12-31</instant>
        </period>
    </context>
    <context id="As_Of_5_13_2020_us-gaap_DerivativeInstrumentRiskAxis_veco_DerivativeContractCappedCallMember_AmsPhVzUq0WxhxYxtgccOg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:DerivativeInstrumentRiskAxis">veco:DerivativeContractCappedCallMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2020-05-13</instant>
        </period>
    </context>
    <context id="Duration_5_13_2020_To_5_13_2020_us-gaap_DerivativeInstrumentRiskAxis_veco_DerivativeContractCappedCallMember_oCl303Xdc0ax8mKHo-S8gQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:DerivativeInstrumentRiskAxis">veco:DerivativeContractCappedCallMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-05-13</startDate>
            <endDate>2020-05-13</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_srt_RangeAxis_srt_MinimumMember_srt_StatementGeographicalAxis_veco_GeographicLocationOneMember_urfkXneJaEms9Cl65M7_dg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:RangeAxis">srt:MinimumMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">veco:GeographicLocationOneMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_srt_RangeAxis_srt_MaximumMember_srt_StatementGeographicalAxis_veco_GeographicLocationTwoMember_qfHak3I2j02E3uJNzquhHA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:RangeAxis">srt:MaximumMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">veco:GeographicLocationTwoMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_srt_RangeAxis_srt_MaximumMember_srt_StatementGeographicalAxis_veco_GeographicLocationOneMember_g1TJdhFHIkaAVeEKqXBbew">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:RangeAxis">srt:MaximumMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">veco:GeographicLocationOneMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_12_31_2021_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_BWpjmM2iLkSahHEVu-gtSg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:ValuationAllowancesAndReservesTypeAxis">us-gaap:ValuationAllowanceOfDeferredTaxAssetsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_ubkTZuWsAkO4w1IFkEt5FQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:ValuationAllowancesAndReservesTypeAxis">us-gaap:ValuationAllowanceOfDeferredTaxAssetsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2020_To_12_31_2020_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_-SPpBK_xNkmb5q-qwksjxA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:ValuationAllowancesAndReservesTypeAxis">us-gaap:ValuationAllowanceOfDeferredTaxAssetsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-01-01</startDate>
            <endDate>2020-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2020_To_12_31_2020_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_AllowanceForCreditLossMember_SWG0SSmFeEqQkQieCJR1-A">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:ValuationAllowancesAndReservesTypeAxis">us-gaap:AllowanceForCreditLossMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-01-01</startDate>
            <endDate>2020-12-31</endDate>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_ruzo5a8GZk2xJncEnDVyGA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:ValuationAllowancesAndReservesTypeAxis">us-gaap:ValuationAllowanceOfDeferredTaxAssetsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_AllowanceForCreditLossMember_9CuZ9qQkQkyZhNVg12vbmA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:ValuationAllowancesAndReservesTypeAxis">us-gaap:AllowanceForCreditLossMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2021_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_ubRsuDLW0kKOOU1kwiqmyQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:ValuationAllowancesAndReservesTypeAxis">us-gaap:ValuationAllowanceOfDeferredTaxAssetsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2021_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_AllowanceForCreditLossMember_3P4puSHlZ0-MKV1ZgEpVLw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:ValuationAllowancesAndReservesTypeAxis">us-gaap:AllowanceForCreditLossMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2020_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_cKBh7RwrYkiyqOF1CpqALQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:ValuationAllowancesAndReservesTypeAxis">us-gaap:ValuationAllowanceOfDeferredTaxAssetsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2020-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2020_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_AllowanceForCreditLossMember_QQ0VBL7qRE2YRwey-lG_eg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:ValuationAllowancesAndReservesTypeAxis">us-gaap:AllowanceForCreditLossMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2020-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2019_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_kWzc0bkOvES0Cb3erCEi_A">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:ValuationAllowancesAndReservesTypeAxis">us-gaap:ValuationAllowanceOfDeferredTaxAssetsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2019-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2019_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_AllowanceForCreditLossMember_b9cISaouPUKueqwRlspRcw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:ValuationAllowancesAndReservesTypeAxis">us-gaap:AllowanceForCreditLossMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2019-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_IncomeTaxAuthorityAxis_us-gaap_DomesticCountryMember_us-gaap_TaxCreditCarryforwardAxis_us-gaap_ResearchMember_JSK4sVm52Uad8MbRS3Hinw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:IncomeTaxAuthorityAxis">us-gaap:DomesticCountryMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:TaxCreditCarryforwardAxis">us-gaap:ResearchMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_IncomeTaxAuthorityAxis_us-gaap_ForeignCountryMember_LZNCNc3oqkaYk0GD8cCD-Q">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:IncomeTaxAuthorityAxis">us-gaap:ForeignCountryMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_lH4wNtbzakqPcd6ckinJqQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:CommonStockMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_EsdRKrqD4k-3NlElNbOJzw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:CommonStockMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2020_To_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_b3_MyPjPJEuMPgmth1uxkg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:CommonStockMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-01-01</startDate>
            <endDate>2020-12-31</endDate>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_AjFsWLZVwUSPAFzzrfVXXA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:RetainedEarningsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_c49gXsTVI0-hQUvNBpS1BA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AdditionalPaidInCapitalMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedTranslationAdjustmentMember_0I3e07cQjke7GCQzAtl5VA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedTranslationAdjustmentMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_W3Ea7PTEU0qeOccl5h-Srw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedOtherComprehensiveIncomeMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedNetUnrealizedInvestmentGainLossMember_zDMfp5ATokeUuBj2WfXGIw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedNetUnrealizedInvestmentGainLossMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2021_srt_CumulativeEffectPeriodOfAdoptionAxis_srt_CumulativeEffectPeriodOfAdoptionAdjustmentMember_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_yZM7DSF3z0K-i64XpySzBw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:CumulativeEffectPeriodOfAdoptionAxis">srt:CumulativeEffectPeriodOfAdoptionAdjustmentMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:RetainedEarningsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2021_srt_CumulativeEffectPeriodOfAdoptionAxis_srt_CumulativeEffectPeriodOfAdoptionAdjustmentMember_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_kNjVzlQSg0uzfUcwSQuPow">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:CumulativeEffectPeriodOfAdoptionAxis">srt:CumulativeEffectPeriodOfAdoptionAdjustmentMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AdditionalPaidInCapitalMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_AAuYcTUfMEqGriZQdvFnlA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:RetainedEarningsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_R2aUd4k_kkmjiEC4UStAuQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AdditionalPaidInCapitalMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedTranslationAdjustmentMember_M2qUOBZtoUGAvnzy-b8yrg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedTranslationAdjustmentMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_XMi8hyEBWUaztLhyei_Ajw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedOtherComprehensiveIncomeMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedNetUnrealizedInvestmentGainLossMember_owXYuMxjnkaLDITLeHQMFw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedNetUnrealizedInvestmentGainLossMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2021_srt_CumulativeEffectPeriodOfAdoptionAxis_srt_CumulativeEffectPeriodOfAdoptionAdjustmentMember_olZlxpGXwkeNK-H39adOaQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:CumulativeEffectPeriodOfAdoptionAxis">srt:CumulativeEffectPeriodOfAdoptionAdjustmentMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_0x6mjJDzwkeVrCrlQkEmCQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:RetainedEarningsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2020-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_S2MHmP-MGkydd4GudaNU8w">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AdditionalPaidInCapitalMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2020-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedTranslationAdjustmentMember_Gkvk-v_CWEK1-pmx4K0LPQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedTranslationAdjustmentMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2020-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_gKPjwCmvOEeoy03lBe0YKg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedOtherComprehensiveIncomeMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2020-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedNetUnrealizedInvestmentGainLossMember_pEhKOgUXxEqXMO3PxGIyPg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedNetUnrealizedInvestmentGainLossMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2020-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2019_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_xa9r4bxjU0e7LxknEMtNmw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:RetainedEarningsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2019-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2019_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_hM4dV8KvL0uccrphKnYC9g">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AdditionalPaidInCapitalMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2019-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2019_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedTranslationAdjustmentMember_GAP5ncKi9kmzPvjWaKXagA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedTranslationAdjustmentMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2019-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2019_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_ZFKrEu3jd0CjuFXPNSSC8w">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedOtherComprehensiveIncomeMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2019-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2019_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedNetUnrealizedInvestmentGainLossMember_sFc0HafvrE2TNhcLUDaltg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedNetUnrealizedInvestmentGainLossMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2019-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_PCxiZFdafEavDRCUIhislQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:CommonStockMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_d0Nvoz2UTkSF8oUdDQFNnA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:CommonStockMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_df8hXeatnEeovE4A6pJyuw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:CommonStockMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2020-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2019_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_FsmAawc2DEOmzDOqP6upWw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:CommonStockMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2019-12-31</instant>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis_veco_RangeOfExercisePricesRangeTwoMember_kUyaaMwSLUahJa3avR2z4g">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis">veco:RangeOfExercisePricesRangeTwoMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis_veco_RangeOfExercisePricesRangeOneMember_tsyWffx4okuNJ8gZKbNjkA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis">veco:RangeOfExercisePricesRangeOneMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis_veco_RangeOfExercisePricesRangeTwoMember_tOsQF6qFH0-wtgbEWVpMWA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis">veco:RangeOfExercisePricesRangeTwoMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis_veco_RangeOfExercisePricesRangeOneMember_Z8mabksjVk62od0X5bnV1A">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis">veco:RangeOfExercisePricesRangeOneMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="Duration_1_1_2016_To_12_31_2016_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_M491c-YOEUaCGZ8wIQXStA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:PlanNameAxis">veco:EmployeeStockPurchasePlan2016Member</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2016-01-01</startDate>
            <endDate>2016-12-31</endDate>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember_us-gaap_PlanNameAxis_veco_StockIncentivePlan2010Member_umNhgs6SGESOzePloVCePA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:EmployeeStockOptionMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:PlanNameAxis">veco:StockIncentivePlan2010Member</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember_us-gaap_PlanNameAxis_veco_InducementStockIncentivePlan2013Member_Dy-7OenGQEq3eD3mafXOSg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:EmployeeStockOptionMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:PlanNameAxis">veco:InducementStockIncentivePlan2013Member</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2013_us-gaap_PlanNameAxis_veco_InducementStockIncentivePlan2013Member_3P6TBIDpNUGgRvFNIHqw5A">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:PlanNameAxis">veco:InducementStockIncentivePlan2013Member</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2013-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2016_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_aYWHgq11KEuoBBNEV64pyQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:PlanNameAxis">veco:EmployeeStockPurchasePlan2016Member</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2016-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_AwardTypeAxis_veco_RsuAndPsuAwardsMember_us-gaap_PlanNameAxis_veco_StockIncentivePlan2010Member_d6-JRODi8Ee6TSSKS1-eFQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">veco:RsuAndPsuAwardsMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:PlanNameAxis">veco:StockIncentivePlan2010Member</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_us-gaap_PlanNameAxis_veco_InducementStockIncentivePlan2013Member_wX7fHqCCNUmtAt7fofhKzQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:RestrictedStockUnitsRSUMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:PlanNameAxis">veco:InducementStockIncentivePlan2013Member</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_srt_RangeAxis_srt_MinimumMember_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember_us-gaap_PlanNameAxis_veco_StockIncentivePlan2010Member_xoqmI5-NBU2aLrJgxZ3q3g">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:RangeAxis">srt:MinimumMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:EmployeeStockOptionMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:PlanNameAxis">veco:StockIncentivePlan2010Member</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_srt_RangeAxis_srt_MaximumMember_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember_us-gaap_PlanNameAxis_veco_StockIncentivePlan2010Member_7iPX9cDEzUW57ygkUGNNOA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:RangeAxis">srt:MaximumMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:EmployeeStockOptionMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:PlanNameAxis">veco:StockIncentivePlan2010Member</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_ZGrU6273SEWauTYHKq94ow">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">veco:RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2021_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_90kQ0UAU_kCEBzwtbQLOCw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">veco:RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2020_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_043gFp_PqUWzlpLJIf2xsg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">veco:RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2020-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2019_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_BAc3dgLAJEiIVBNN2-jYYA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">veco:RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2019-12-31</instant>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_us-gaap_AwardTypeAxis_veco_PerformanceShareUnitsMarketConditionsMember_2WTDqDHGgEGxwUPxh_rK1w">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">veco:PerformanceShareUnitsMarketConditionsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_12_31_2021_us-gaap_AwardTypeAxis_veco_PerformanceShareUnitsMarketConditionsMember_31uAlkHF1UGSOQxqujb7zQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">veco:PerformanceShareUnitsMarketConditionsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2020_To_12_31_2020_us-gaap_AwardTypeAxis_veco_PerformanceShareUnitsMarketConditionsMember_VTNsOTcWBEmsOsvPaWiQTg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">veco:PerformanceShareUnitsMarketConditionsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-01-01</startDate>
            <endDate>2020-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2013_To_12_31_2013_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_us-gaap_PlanNameAxis_veco_InducementStockIncentivePlan2013Member_UacULr7ikES2tUIYrk0hFQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:RestrictedStockUnitsRSUMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:PlanNameAxis">veco:InducementStockIncentivePlan2013Member</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2013-01-01</startDate>
            <endDate>2013-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_4KQ7EGE5pECpx0QANzsn2w">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">veco:RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_12_31_2021_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_eoq0ExuN80uwK4EJucyneQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">veco:RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2020_To_12_31_2020_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_5_DVb1GcQUG45VQebdvm7w">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">veco:RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-01-01</startDate>
            <endDate>2020-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_srt_RangeAxis_srt_MinimumMember_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsAndRestrictedStockUnitsMember_us-gaap_PlanNameAxis_veco_StockIncentivePlan2010Member_8EaDxBLlOEKvfMX15uUWaw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:RangeAxis">srt:MinimumMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">veco:RestrictedStockAwardsAndRestrictedStockUnitsMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:PlanNameAxis">veco:StockIncentivePlan2010Member</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_srt_RangeAxis_srt_MaximumMember_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsAndRestrictedStockUnitsMember_us-gaap_PlanNameAxis_veco_StockIncentivePlan2010Member_ZhJJnDp8d0OLVtHUE1soLw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:RangeAxis">srt:MaximumMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">veco:RestrictedStockAwardsAndRestrictedStockUnitsMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:PlanNameAxis">veco:StockIncentivePlan2010Member</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember_us-gaap_PlanNameAxis_veco_StockIncentivePlan2010Member_EIavdaQ05k2CdP7S8ASlEQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:EmployeeStockOptionMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:PlanNameAxis">veco:StockIncentivePlan2010Member</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_srt_RangeAxis_srt_MinimumMember_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_C24Z8a4FqkeFDK2d2d9hYg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:RangeAxis">srt:MinimumMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">veco:RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_srt_RangeAxis_srt_MaximumMember_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_03Onf4LpQEe7Cc3IYJdxLg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:RangeAxis">srt:MaximumMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">veco:RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2013_To_12_31_2013_srt_RangeAxis_srt_MinimumMember_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_us-gaap_PlanNameAxis_veco_InducementStockIncentivePlan2013Member_PEuA9XZyfU-Z-u_scIxdGQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:RangeAxis">srt:MinimumMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:RestrictedStockUnitsRSUMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:PlanNameAxis">veco:InducementStockIncentivePlan2013Member</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2013-01-01</startDate>
            <endDate>2013-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2013_To_12_31_2013_srt_RangeAxis_srt_MaximumMember_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_us-gaap_PlanNameAxis_veco_InducementStockIncentivePlan2013Member_QVXVwOJ3fUqZMdTJZ0TtAg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:RangeAxis">srt:MaximumMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:RestrictedStockUnitsRSUMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:PlanNameAxis">veco:InducementStockIncentivePlan2013Member</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2013-01-01</startDate>
            <endDate>2013-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2013_To_12_31_2013_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember_us-gaap_PlanNameAxis_veco_InducementStockIncentivePlan2013Member_sLxW-wtGPkeJVSB0u2dLjg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:EmployeeStockOptionMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:PlanNameAxis">veco:InducementStockIncentivePlan2013Member</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2013-01-01</startDate>
            <endDate>2013-12-31</endDate>
        </period>
    </context>
    <context id="As_Of_12_31_2022_srt_RangeAxis_srt_MinimumMember_us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionStartDateAxis_veco_cnst_2024-01-01_3OL-sQzaTEOOG3d6jcbkGg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:RangeAxis">srt:MinimumMember</xbrldi:explicitMember>
                <xbrldi:typedMember dimension="us-gaap:RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionStartDateAxis">
                    <us-gaap:RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionStartDateAxis.domain>2024-01-01</us-gaap:RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionStartDateAxis.domain>
                </xbrldi:typedMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_srt_RangeAxis_srt_MaximumMember_us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionStartDateAxis_veco_cnst_2024-01-01_BZqaswuaTU6Gg2uzA8NeVw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:RangeAxis">srt:MaximumMember</xbrldi:explicitMember>
                <xbrldi:typedMember dimension="us-gaap:RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionStartDateAxis">
                    <us-gaap:RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionStartDateAxis.domain>2024-01-01</us-gaap:RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionStartDateAxis.domain>
                </xbrldi:typedMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionStartDateAxis_veco_cnst_2023-01-01_x-uik2mTUUOaGbc3btd01g">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:typedMember dimension="us-gaap:RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionStartDateAxis">
                    <us-gaap:RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionStartDateAxis.domain>2023-01-01</us-gaap:RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionStartDateAxis.domain>
                </xbrldi:typedMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_srt_RangeAxis_srt_MinimumMember_iF5wa-z6u0mt0pln3ZRKEw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:RangeAxis">srt:MinimumMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_srt_ProductOrServiceAxis_veco_SemiconductorMember_9PJiZcYx8keIpEVWmTevwA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">veco:SemiconductorMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_srt_ProductOrServiceAxis_veco_ScientificAndOtherMember_R82epki4m0O2R4lYzbFB9A">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">veco:ScientificAndOtherMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_srt_StatementGeographicalAxis_veco_RestOfWorldMember_VAzisHSCx0-DlDvmloB2xw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">veco:RestOfWorldMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_srt_ProductOrServiceAxis_veco_DataStorageMember_ohlZC8GlDkOKwTiD8wpwUw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">veco:DataStorageMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_srt_ProductOrServiceAxis_veco_CompoundSemiconductorMember_LdTGFm08V0K1-4URhxYb-w">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">veco:CompoundSemiconductorMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_srt_StatementGeographicalAxis_veco_AsiaPacificExcludingChinaMember_7p5vq41yVkK3tUpkfkCrQA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">veco:AsiaPacificExcludingChinaMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_srt_StatementGeographicalAxis_us-gaap_EMEAMember_Xd-c8lKXMkGwam6POJvgSQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">us-gaap:EMEAMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_srt_StatementGeographicalAxis_country_US_Iqq-3Yh3o0KOcOsQuuWFnw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">country:US</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_srt_StatementGeographicalAxis_country_CN_QBoqba6p3E65LEV6R7MTsQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">country:CN</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_12_31_2021_srt_ProductOrServiceAxis_veco_SemiconductorMember_YkhDbPkawEiyjB3fK4wRQw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">veco:SemiconductorMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_12_31_2021_srt_ProductOrServiceAxis_veco_ScientificAndOtherMember_Dooe7CVpc0a8KYAWnA2ecw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">veco:ScientificAndOtherMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_12_31_2021_srt_StatementGeographicalAxis_veco_RestOfWorldMember_z2CDDUi9cEmCQUu5NwxCRg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">veco:RestOfWorldMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_12_31_2021_srt_ProductOrServiceAxis_veco_DataStorageMember_WuQRBW8HokiCULZhKHrZDg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">veco:DataStorageMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_12_31_2021_srt_ProductOrServiceAxis_veco_CompoundSemiconductorMember_IAiei5YbJEyH8DppQEM5_w">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">veco:CompoundSemiconductorMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_12_31_2021_srt_StatementGeographicalAxis_veco_AsiaPacificExcludingChinaMember_W3DfwYqTJUid6go4WOTUwQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">veco:AsiaPacificExcludingChinaMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_12_31_2021_srt_StatementGeographicalAxis_us-gaap_EMEAMember_VfxBGC5wCkm5_qWrjZmgPA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">us-gaap:EMEAMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_12_31_2021_srt_StatementGeographicalAxis_country_US_Qk0pMUh3A0imrH2rqxssEg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">country:US</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_12_31_2021_srt_StatementGeographicalAxis_country_CN_ZvsRp4BDo06Ko490CiqQIg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">country:CN</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2020_To_12_31_2020_srt_ProductOrServiceAxis_veco_SemiconductorMember_GKacZn4rvEyU0M6kjYWAOA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">veco:SemiconductorMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-01-01</startDate>
            <endDate>2020-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2020_To_12_31_2020_srt_ProductOrServiceAxis_veco_ScientificAndOtherMember_-7m243SMR0udkXGnjcwNSg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">veco:ScientificAndOtherMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-01-01</startDate>
            <endDate>2020-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2020_To_12_31_2020_srt_StatementGeographicalAxis_veco_RestOfWorldMember_igromS0r10qJ0F2D-OutxA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">veco:RestOfWorldMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-01-01</startDate>
            <endDate>2020-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2020_To_12_31_2020_srt_ProductOrServiceAxis_veco_DataStorageMember_drFJLf9L9kq6PLGRMBLwHQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">veco:DataStorageMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-01-01</startDate>
            <endDate>2020-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2020_To_12_31_2020_srt_ProductOrServiceAxis_veco_CompoundSemiconductorMember_19iFaF75yECz3rBkCfAGpg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">veco:CompoundSemiconductorMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-01-01</startDate>
            <endDate>2020-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2020_To_12_31_2020_srt_StatementGeographicalAxis_veco_AsiaPacificExcludingChinaMember_Jr8Bxw0HLkeseR2GeImE0A">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">veco:AsiaPacificExcludingChinaMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-01-01</startDate>
            <endDate>2020-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2020_To_12_31_2020_srt_StatementGeographicalAxis_us-gaap_EMEAMember_cNbtUrMBU02kQ3oY3LZf_Q">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">us-gaap:EMEAMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-01-01</startDate>
            <endDate>2020-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2020_To_12_31_2020_srt_StatementGeographicalAxis_country_US_nlfJOecro0qR-ydQH9T88Q">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">country:US</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-01-01</startDate>
            <endDate>2020-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2020_To_12_31_2020_srt_StatementGeographicalAxis_country_CN_mjQ--ouO8Eq8LXzJRXoKMA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">country:CN</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-01-01</startDate>
            <endDate>2020-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_srt_RangeAxis_srt_MinimumMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_MachineryAndEquipmentMember_kMBqjcmbAUWhgDS4eqCZSg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:RangeAxis">srt:MinimumMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:MachineryAndEquipmentMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_srt_RangeAxis_srt_MinimumMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_LeaseholdImprovementsMember_-_qnf0UG4EOBjZTK_lw7vg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:RangeAxis">srt:MinimumMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:LeaseholdImprovementsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_srt_RangeAxis_srt_MinimumMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_BuildingAndBuildingImprovementsMember_sH6SXLqfs0K0vPSkiEYXcw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:RangeAxis">srt:MinimumMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:BuildingAndBuildingImprovementsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_srt_RangeAxis_srt_MaximumMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_MachineryAndEquipmentMember_r-HNrvY-bUGV71aKV5fymw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:RangeAxis">srt:MaximumMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:MachineryAndEquipmentMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_srt_RangeAxis_srt_MaximumMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_LeaseholdImprovementsMember_IfXaVPWhgUKzN7Eq2Wfp1A">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:RangeAxis">srt:MaximumMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:LeaseholdImprovementsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_srt_RangeAxis_srt_MaximumMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_BuildingAndBuildingImprovementsMember_qBmASH3-q0uEyi5qE_Tsqw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:RangeAxis">srt:MaximumMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:BuildingAndBuildingImprovementsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_12_31_2021_srt_RangeAxis_srt_MinimumMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_MachineryAndEquipmentMember_G3uFA259L0mcqn0fc993rQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:RangeAxis">srt:MinimumMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:MachineryAndEquipmentMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_12_31_2021_srt_RangeAxis_srt_MinimumMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_LeaseholdImprovementsMember_9k5QUqwNeE2-rhO-SIBHOg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:RangeAxis">srt:MinimumMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:LeaseholdImprovementsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_12_31_2021_srt_RangeAxis_srt_MinimumMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_BuildingAndBuildingImprovementsMember_Gidmj6LUsky3lImrGRLu6Q">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:RangeAxis">srt:MinimumMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:BuildingAndBuildingImprovementsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_12_31_2021_srt_RangeAxis_srt_MaximumMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_MachineryAndEquipmentMember_nLISzPEN7Ey7mFYy9KVbUA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:RangeAxis">srt:MaximumMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:MachineryAndEquipmentMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_12_31_2021_srt_RangeAxis_srt_MaximumMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_LeaseholdImprovementsMember_AMkmoruyOku0FoWmUcFIog">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:RangeAxis">srt:MaximumMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:LeaseholdImprovementsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_12_31_2021_srt_RangeAxis_srt_MaximumMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_BuildingAndBuildingImprovementsMember_MElevU13P0uYWw7IL8VnOA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:RangeAxis">srt:MaximumMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:BuildingAndBuildingImprovementsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-12-31</endDate>
        </period>
    </context>
    <context id="As_Of_12_31_2022_srt_StatementGeographicalAxis_veco_AsiaPacificExcludingChinaMember_UvfACFZGrUypPpEdHOipMQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">veco:AsiaPacificExcludingChinaMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_srt_StatementGeographicalAxis_us-gaap_EMEAMember_haoOD1W3VEefYffMIxwz_w">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">us-gaap:EMEAMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_srt_StatementGeographicalAxis_country_US_9rx8lXGp-UePPYpikE4BwQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">country:US</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_srt_StatementGeographicalAxis_country_CN_qymy7_UBkEC6VBQbt2XEbw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">country:CN</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2021_srt_StatementGeographicalAxis_veco_AsiaPacificExcludingChinaMember_HXJxHtMkW0aGxszM6SJ1uw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">veco:AsiaPacificExcludingChinaMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2021_srt_StatementGeographicalAxis_us-gaap_EMEAMember_-2eMs00UmU-xtabNFZCl8Q">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">us-gaap:EMEAMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2021_srt_StatementGeographicalAxis_country_US_T55RSt3DbUW94GG58r4txw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">country:US</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2021_srt_StatementGeographicalAxis_country_CN_tdldCDp8U0SPe2xlhi8Pdg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">country:CN</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2020_srt_StatementGeographicalAxis_veco_AsiaPacificExcludingChinaMember_aAB8ukG5VEimziKhX1v34w">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">veco:AsiaPacificExcludingChinaMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2020-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2020_srt_StatementGeographicalAxis_us-gaap_EMEAMember_GvpCorI590OKQRjAeF3GNg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">us-gaap:EMEAMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2020-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2020_srt_StatementGeographicalAxis_country_US_IFBHHJD4ZEekIQ5l9IjVqw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">country:US</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2020-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2020_srt_StatementGeographicalAxis_country_CN_YpEyHYcZokyQEdtnzsqn2g">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">country:CN</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2020-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_MachineryAndEquipmentMember_gBku79yeSkSj40YSYM5HsA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:MachineryAndEquipmentMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_LeaseholdImprovementsMember_l9lhAAr_XU-dsDhEzU-wsg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:LeaseholdImprovementsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_LandMember_aU5K4QzUQU6kgnHxkhVOVg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:LandMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_BuildingAndBuildingImprovementsMember_fnnxFZqggEeKD96T_6ie3w">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:BuildingAndBuildingImprovementsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2021_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_MachineryAndEquipmentMember_0wMvYMJgs0WxqMD1vbmumg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:MachineryAndEquipmentMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2021_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_LeaseholdImprovementsMember_A0KFx0NQCUamYDFD5ZwOIA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:LeaseholdImprovementsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2021_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_LandMember_A8AKF2WQ9kC4PFl5qoLOBQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:LandMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2021_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_BuildingAndBuildingImprovementsMember_7HTS-zmtz06SZpVZiNT4Aw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:BuildingAndBuildingImprovementsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-12-31</instant>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_36M02lVMMkqklha7FYtN3w">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:PlanNameAxis">veco:EmployeeStockPurchasePlan2016Member</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_12_31_2021_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_RBotXgElPUCGCmWLRr8SCg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:PlanNameAxis">veco:EmployeeStockPurchasePlan2016Member</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2020_To_12_31_2020_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_vYzL5bBxa0O1wNbTJcZO6Q">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:PlanNameAxis">veco:EmployeeStockPurchasePlan2016Member</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-01-01</startDate>
            <endDate>2020-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_31_2023_To_1_31_2023_us-gaap_BusinessAcquisitionAxis_veco_EpiluvacAbMember_us-gaap_SubsequentEventTypeAxis_us-gaap_SubsequentEventMember_azBhPTo7jkCpUE7FbJTfEg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:BusinessAcquisitionAxis">veco:EpiluvacAbMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:SubsequentEventTypeAxis">us-gaap:SubsequentEventMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2023-01-31</startDate>
            <endDate>2023-01-31</endDate>
        </period>
    </context>
    <context id="Duration_5_18_2020_To_5_18_2020_82r_aymnikqSCiP3vs1ZlA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
        </entity>
        <period>
            <startDate>2020-05-18</startDate>
            <endDate>2020-05-18</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedTranslationAdjustmentMember_lCvs1WPXXECT-J60wmaSsw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedTranslationAdjustmentMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_6zlsan7E70SaZfNDKUZFwQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedOtherComprehensiveIncomeMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedNetUnrealizedInvestmentGainLossMember_xCEQi8wJlEmZsaR5Kh6uTA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedNetUnrealizedInvestmentGainLossMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedTranslationAdjustmentMember_EalXQOx570OxsR04zKZb-A">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedTranslationAdjustmentMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_WIAntBTv5kumJYPuwFnHEA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedOtherComprehensiveIncomeMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedNetUnrealizedInvestmentGainLossMember_ZWPV2F-CdUyFpf6zSDJ9Rg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedNetUnrealizedInvestmentGainLossMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2020_To_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedTranslationAdjustmentMember_stjnN33fGU-wMsLEDFoL4w">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedTranslationAdjustmentMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-01-01</startDate>
            <endDate>2020-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2020_To_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_iUgMnC3EVk2SSaJC7ml4hA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedOtherComprehensiveIncomeMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-01-01</startDate>
            <endDate>2020-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2020_To_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedNetUnrealizedInvestmentGainLossMember_EwwqNhH-8km-3wAI-bkLQA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedNetUnrealizedInvestmentGainLossMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-01-01</startDate>
            <endDate>2020-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_-AC2PNT3C02sUwYL2KHt_A">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:RetainedEarningsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_NlKiDl7K_kWxshosVGTXvQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:RetainedEarningsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2020_To_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_JAI5BnxJn0yyDx_dSs8J2A">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:RetainedEarningsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-01-01</startDate>
            <endDate>2020-12-31</endDate>
        </period>
    </context>
    <context id="Duration_8_1_2018_To_8_31_2018_srt_LitigationCaseAxis_veco_UltratechAcquisitionLitigationMember_dwYL9J2gC0Oab_FWaninlw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:LitigationCaseAxis">veco:UltratechAcquisitionLitigationMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2018-08-01</startDate>
            <endDate>2018-08-31</endDate>
        </period>
    </context>
    <context id="As_Of_11_17_2020_jAUfBON7oEmWBbqJUWrC9A">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
        </entity>
        <period>
            <instant>2020-11-17</instant>
        </period>
    </context>
    <context id="As_Of_5_18_2020_QRmcZr2GXU2znfxw1ngsUg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
        </entity>
        <period>
            <instant>2020-05-18</instant>
        </period>
    </context>
    <context id="As_Of_1_10_2017_mE_NZqLn50uO237u-S13xA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
        </entity>
        <period>
            <instant>2017-01-10</instant>
        </period>
    </context>
    <context id="Duration_11_1_2022_To_11_30_2022_srt_LitigationCaseAxis_veco_DerivativeActionMember_dS7_yQ62XkKzCXHyd6iZNQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:LitigationCaseAxis">veco:DerivativeActionMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-11-01</startDate>
            <endDate>2022-11-30</endDate>
        </period>
    </context>
    <context id="Duration_10_1_2021_To_10_31_2021_srt_LitigationCaseAxis_veco_WoltherActionMember_G9mmKKuHJUKEDOgkWSO47Q">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:LitigationCaseAxis">veco:WoltherActionMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-10-01</startDate>
            <endDate>2021-10-31</endDate>
        </period>
    </context>
    <context id="Duration_12_16_2021_To_12_16_2021_srt_RangeAxis_srt_MinimumMember_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021Member_Sn3H0cYnKEqQh6tKahzz0A">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:RangeAxis">srt:MinimumMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:RevolvingCreditFacilityDecember2021Member</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-12-16</startDate>
            <endDate>2021-12-16</endDate>
        </period>
    </context>
    <context id="Duration_12_16_2021_To_12_16_2021_srt_RangeAxis_srt_MaximumMember_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021Member_UhYqivVxpkm2yqOX6N-eQw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:RangeAxis">srt:MaximumMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:RevolvingCreditFacilityDecember2021Member</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-12-16</startDate>
            <endDate>2021-12-16</endDate>
        </period>
    </context>
    <context id="As_Of_12_16_2021_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021Member_ddwT9iX1z0adI_mlFlsfeg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:RevolvingCreditFacilityDecember2021Member</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-12-16</instant>
        </period>
    </context>
    <context id="As_Of_12_16_2021_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021LetterOfCreditMember_QSDuY2Ej4keYjyFiaLxdzA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:RevolvingCreditFacilityDecember2021LetterOfCreditMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-12-16</instant>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021Member_D1zUCvzuukuCwXIz58-u7A">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:RevolvingCreditFacilityDecember2021Member</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_12_31_2021_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021Member_zEz5_eyHg06Zrt2D76rTpw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:RevolvingCreditFacilityDecember2021Member</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-12-31</endDate>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel2Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_USGovernmentAgenciesDebtSecuritiesMember_xxaAnx1Ji0KImuzsRiQSeQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByFairValueHierarchyLevelAxis">us-gaap:FairValueInputsLevel2Member</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:FinancialInstrumentAxis">us-gaap:USGovernmentAgenciesDebtSecuritiesMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel2Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_CorporateDebtSecuritiesMember_pCHXtSXunUCFoLNO295FNQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByFairValueHierarchyLevelAxis">us-gaap:FairValueInputsLevel2Member</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:FinancialInstrumentAxis">us-gaap:CorporateDebtSecuritiesMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel2Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_CommercialPaperMember_E2AAQ-0KTE6yl5sLci37yw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByFairValueHierarchyLevelAxis">us-gaap:FairValueInputsLevel2Member</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:FinancialInstrumentAxis">us-gaap:CommercialPaperMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_USTreasurySecuritiesMember_gqJUY0xQBEKj-8bR__2AhA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByFairValueHierarchyLevelAxis">us-gaap:FairValueInputsLevel1Member</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:FinancialInstrumentAxis">us-gaap:USTreasurySecuritiesMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_USTreasurySecuritiesMember_9ZKAp20askai2yy7kwBjQA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:FinancialInstrumentAxis">us-gaap:USTreasurySecuritiesMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_USGovernmentAgenciesDebtSecuritiesMember_UBRtR4MHAE6IwJXU-LOpsg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:FinancialInstrumentAxis">us-gaap:USGovernmentAgenciesDebtSecuritiesMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_CorporateDebtSecuritiesMember_tOjwouEBSkebr7L2IwFAlg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:FinancialInstrumentAxis">us-gaap:CorporateDebtSecuritiesMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_CommercialPaperMember_aCCI2RshmE-lyrQdT3Mkkw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:FinancialInstrumentAxis">us-gaap:CommercialPaperMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel2Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_MpQSvERYmk2F8LCAdvsJeQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByFairValueHierarchyLevelAxis">us-gaap:FairValueInputsLevel2Member</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_slQOe3zyMUymTHQU819sJQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByFairValueHierarchyLevelAxis">us-gaap:FairValueInputsLevel1Member</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_S6bYObjavkCTbU5xddLx7g">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2021_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel2Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_USGovernmentAgenciesDebtSecuritiesMember_0qo4lngQLE67OuHA6y1wdw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByFairValueHierarchyLevelAxis">us-gaap:FairValueInputsLevel2Member</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:FinancialInstrumentAxis">us-gaap:USGovernmentAgenciesDebtSecuritiesMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2021_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel2Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_CorporateDebtSecuritiesMember_GL57sZXyr0aGVeV1asM5mg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByFairValueHierarchyLevelAxis">us-gaap:FairValueInputsLevel2Member</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:FinancialInstrumentAxis">us-gaap:CorporateDebtSecuritiesMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2021_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel2Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_CommercialPaperMember_E29zWH3490-7kJgvF-1hDg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByFairValueHierarchyLevelAxis">us-gaap:FairValueInputsLevel2Member</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:FinancialInstrumentAxis">us-gaap:CommercialPaperMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2021_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_USTreasurySecuritiesMember_Gjv_stk2ZEqEp1eNGnsQ3w">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByFairValueHierarchyLevelAxis">us-gaap:FairValueInputsLevel1Member</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:FinancialInstrumentAxis">us-gaap:USTreasurySecuritiesMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2021_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_USTreasurySecuritiesMember_YW8DFld3rUeEJWklgEoDkQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:FinancialInstrumentAxis">us-gaap:USTreasurySecuritiesMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2021_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_USGovernmentAgenciesDebtSecuritiesMember_6yQv3e_ka0i1bTkFTYicJg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:FinancialInstrumentAxis">us-gaap:USGovernmentAgenciesDebtSecuritiesMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2021_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_CorporateDebtSecuritiesMember_eczwLoIqY06OGH6ptbktWg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:FinancialInstrumentAxis">us-gaap:CorporateDebtSecuritiesMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2021_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_CommercialPaperMember_i5JJkpgtSk6kLg_SGNah8A">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:FinancialInstrumentAxis">us-gaap:CommercialPaperMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2021_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel2Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_Fx3H_ZpdrUmlZhkBxxb4ow">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByFairValueHierarchyLevelAxis">us-gaap:FairValueInputsLevel2Member</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2021_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_XRUs_X2KUEOrNQc5SrQvag">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByFairValueHierarchyLevelAxis">us-gaap:FairValueInputsLevel1Member</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2021_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_8Y4uZzPOeUWzAGMaSM_zrg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-12-31</instant>
        </period>
    </context>
    <context id="As_Of_11_5_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_ovfhrTec7EC_2sSmeCBK7w">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:ConvertibleSeniorUnsecuredNotesDue2023Member</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-11-05</instant>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_12_31_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_us-gaap_IncomeStatementLocationAxis_us-gaap_OtherNonoperatingIncomeExpenseMember_aatANL4WzE-Jl_REorgp7g">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:ConvertibleSeniorUnsecuredNotesDue2023Member</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:OtherNonoperatingIncomeExpenseMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-12-31</endDate>
        </period>
    </context>
    <context id="Duration_11_11_2020_To_11_11_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_us-gaap_IncomeStatementLocationAxis_us-gaap_OtherNonoperatingIncomeExpenseMember_DYB3CDbyX0u3Uq0DQh2dDg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:ConvertibleSeniorUnsecuredNotesDue2023Member</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:OtherNonoperatingIncomeExpenseMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-11-11</startDate>
            <endDate>2020-11-11</endDate>
        </period>
    </context>
    <context id="Duration_5_18_2020_To_5_18_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_us-gaap_IncomeStatementLocationAxis_us-gaap_OtherNonoperatingIncomeExpenseMember_00m-x6_WfkKT5olXftmhcQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:ConvertibleSeniorUnsecuredNotesDue2023Member</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:OtherNonoperatingIncomeExpenseMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-05-18</startDate>
            <endDate>2020-05-18</endDate>
        </period>
    </context>
    <context id="Duration_10_1_2022_To_12_31_2022_uExZe-pG7kOQct7OU2J4Dg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
        </entity>
        <period>
            <startDate>2022-10-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_7_1_2022_To_9_30_2022__p_V5234s0incEWW09mArQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
        </entity>
        <period>
            <startDate>2022-07-01</startDate>
            <endDate>2022-09-30</endDate>
        </period>
    </context>
    <context id="Duration_4_1_2022_To_6_30_2022_4jkIrP3p20amdiLLzhoJbQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
        </entity>
        <period>
            <startDate>2022-04-01</startDate>
            <endDate>2022-06-30</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_3_31_2022_0YPX1UiA70qTsEBum79vEw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-03-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TrademarksAndTradeNamesMember_GGXDJQsEwUWFPkGXDENgHA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:FiniteLivedIntangibleAssetsByMajorClassAxis">us-gaap:TrademarksAndTradeNamesMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TechnologyBasedIntangibleAssetsMember_c_0gAxKnfECDwazop899FQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:FiniteLivedIntangibleAssetsByMajorClassAxis">us-gaap:TechnologyBasedIntangibleAssetsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_CustomerRelationshipsMember_yVD0ya2vVk2nYytNKf5htQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:FiniteLivedIntangibleAssetsByMajorClassAxis">us-gaap:CustomerRelationshipsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TrademarksAndTradeNamesMember_K82mRsCyb0GBUN-LnYfN8Q">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:FiniteLivedIntangibleAssetsByMajorClassAxis">us-gaap:TrademarksAndTradeNamesMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TechnologyBasedIntangibleAssetsMember_PHfPLb4yx0-K74vdVH6uRg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:FiniteLivedIntangibleAssetsByMajorClassAxis">us-gaap:TechnologyBasedIntangibleAssetsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_OtherIntangibleAssetsMember_OSD-9IgK00iI_MRgFr83eg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:FiniteLivedIntangibleAssetsByMajorClassAxis">us-gaap:OtherIntangibleAssetsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_CustomerRelationshipsMember_dwE4sMbj40KrNc4QqruMbQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:FiniteLivedIntangibleAssetsByMajorClassAxis">us-gaap:CustomerRelationshipsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2021_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TrademarksAndTradeNamesMember_as4jILWK1k2E1dfNQhh-Hw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:FiniteLivedIntangibleAssetsByMajorClassAxis">us-gaap:TrademarksAndTradeNamesMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2021_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TechnologyBasedIntangibleAssetsMember_lmu-TREvc0aWZRgdlyu2XA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:FiniteLivedIntangibleAssetsByMajorClassAxis">us-gaap:TechnologyBasedIntangibleAssetsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2021_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_OtherIntangibleAssetsMember_Wq5eHdCnDUSHppKmNim6Mg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:FiniteLivedIntangibleAssetsByMajorClassAxis">us-gaap:OtherIntangibleAssetsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2021_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_CustomerRelationshipsMember_h7b9anFZuE2SoSFkMvCcXQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:FiniteLivedIntangibleAssetsByMajorClassAxis">us-gaap:CustomerRelationshipsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-12-31</instant>
        </period>
    </context>
    <context id="Duration_11_5_2021_To_11_5_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_gRCscxrjLkmeVdBuAV6ddA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:ConvertibleSeniorUnsecuredNotesDue2023Member</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-11-05</startDate>
            <endDate>2021-11-05</endDate>
        </period>
    </context>
    <context id="Duration_11_11_2020_To_11_11_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_YDagF4J520ede_9zdqDMmg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:ConvertibleSeniorUnsecuredNotesDue2023Member</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-11-11</startDate>
            <endDate>2020-11-11</endDate>
        </period>
    </context>
    <context id="Duration_5_18_2020_To_5_18_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_5zzHqMvYcEu0fv8z6RanBg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:ConvertibleSeniorUnsecuredNotesDue2023Member</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-05-18</startDate>
            <endDate>2020-05-18</endDate>
        </period>
    </context>
    <context id="As_Of_12_31_2022_srt_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_veco_OtherNonMarketableInvestmentMember_2yVI4D-Nv0Oahbko0Rcd7w">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis">veco:OtherNonMarketableInvestmentMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2021_srt_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_veco_OtherNonMarketableInvestmentMember_x1RDLI5eNkKRCAhimMtNXg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis">veco:OtherNonMarketableInvestmentMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-12-31</instant>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardMember_bM7k1MJbA06-xsn2pQgBrA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">veco:RestrictedStockAwardMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_us-gaap_AwardTypeAxis_veco_PerformanceShareUnitsMember_nrpb8S7W7E6vrWAnnBvCPQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">veco:PerformanceShareUnitsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_g4-6bRHU_UGEBnDrz3qD9A">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:RestrictedStockUnitsRSUMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardMember_sMXHOamcIkWEmJhAjaFhWw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">veco:RestrictedStockAwardMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_AwardTypeAxis_veco_PerformanceShareUnitsMember_efDAc13uhkKFYLYN7MeLnw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">veco:PerformanceShareUnitsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_q9Ip_ln4dEC9Vz5OiwByQg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:RestrictedStockUnitsRSUMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_srt_StatementScenarioAxis_veco_DifferenceBetweenGuidanceInEffectBeforeAndAfterAccountingStandardsUpdate202006Member_us-gaap_AdjustmentsForNewAccountingPronouncementsAxis_us-gaap_AccountingStandardsUpdate202006Member_QPnJy7taY0e2YR7TvUMS8g">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:StatementScenarioAxis">veco:DifferenceBetweenGuidanceInEffectBeforeAndAfterAccountingStandardsUpdate202006Member</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:AdjustmentsForNewAccountingPronouncementsAxis">us-gaap:AccountingStandardsUpdate202006Member</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_srt_CumulativeEffectPeriodOfAdoptionAxis_srt_CumulativeEffectPeriodOfAdoptionAdjustedBalanceMember_us-gaap_AdjustmentsForNewAccountingPronouncementsAxis_us-gaap_AccountingStandardsUpdate202006Member_2gUZyYVNDkWsrP9u9uAsPg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:CumulativeEffectPeriodOfAdoptionAxis">srt:CumulativeEffectPeriodOfAdoptionAdjustedBalanceMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:AdjustmentsForNewAccountingPronouncementsAxis">us-gaap:AccountingStandardsUpdate202006Member</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_srt_StatementScenarioAxis_veco_CalculatedUnderGuidanceInEffectBeforeAdoptionOfAccountingStandardsUpdate202006Member_7ScKuEZlbkunzacsANYvKA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:StatementScenarioAxis">veco:CalculatedUnderGuidanceInEffectBeforeAdoptionOfAccountingStandardsUpdate202006Member</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="As_Of_12_31_2020_us-gaap_DisposalGroupClassificationAxis_us-gaap_DisposalGroupDisposedOfBySaleNotDiscontinuedOperationsMember_us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsAxis_veco_OneNonCoreProductLineMember_ImUrGQxTIkCP31DP-sVs-Q">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:DisposalGroupClassificationAxis">us-gaap:DisposalGroupDisposedOfBySaleNotDiscontinuedOperationsMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsAxis">veco:OneNonCoreProductLineMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2020-12-31</instant>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_srt_RangeAxis_srt_MaximumMember_-IcZsPRCskCthhwH_ZdlKw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:RangeAxis">srt:MaximumMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_IncomeTaxAuthorityAxis_us-gaap_StateAndLocalJurisdictionMember_FJTorzE9E0O2-5w2lG7XTQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:IncomeTaxAuthorityAxis">us-gaap:StateAndLocalJurisdictionMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="Duration_12_16_2021_To_12_16_2021_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021Member_-KOL_4BIDE-MqJoWpDzBfg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:RevolvingCreditFacilityDecember2021Member</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-12-16</startDate>
            <endDate>2021-12-16</endDate>
        </period>
    </context>
    <context id="As_Of_12_31_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_e6zIPCidbESUll-ecgx8RA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:ConvertibleSeniorUnsecuredNotesDue2027Member</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_tIX8Lasv8E2B1ACI65359Q">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:ConvertibleSeniorUnsecuredNotesDue2025Member</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_R6ZH9u7Tf0ijR-shdVpjow">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:ConvertibleSeniorUnsecuredNotesDue2023Member</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-12-31</instant>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_srt_RangeAxis_srt_MinimumMember_us-gaap_DebtInstrumentAxis_us-gaap_ConvertibleDebtMember_ABdcmH9T60iabiMQNHpnMw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:RangeAxis">srt:MinimumMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">us-gaap:ConvertibleDebtMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_us-gaap_DebtInstrumentAxis_us-gaap_ConvertibleDebtMember_XQJwNQGip0-4rSyYMzx-Zw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">us-gaap:ConvertibleDebtMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_11_17_2020_To_11_17_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_40oKyNrK80KsJh3vH1tMzQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:ConvertibleSeniorUnsecuredNotesDue2025Member</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-11-17</startDate>
            <endDate>2020-11-17</endDate>
        </period>
    </context>
    <context id="Duration_5_18_2020_To_5_18_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_5Ecfm1aP80Ow_u3X86TuUQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:ConvertibleSeniorUnsecuredNotesDue2027Member</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-05-18</startDate>
            <endDate>2020-05-18</endDate>
        </period>
    </context>
    <context id="Duration_1_10_2017_To_1_10_2017_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_uuco5aSWq0uhuvDldQHNrg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:ConvertibleSeniorUnsecuredNotesDue2023Member</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2017-01-10</startDate>
            <endDate>2017-01-10</endDate>
        </period>
    </context>
    <context id="As_Of_11_17_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_zF8UnsN0JEqzHyuktvH1rA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:ConvertibleSeniorUnsecuredNotesDue2025Member</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2020-11-17</instant>
        </period>
    </context>
    <context id="As_Of_5_18_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_u4UJ5lnrc0eivAfoRYyQng">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:ConvertibleSeniorUnsecuredNotesDue2027Member</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2020-05-18</instant>
        </period>
    </context>
    <context id="As_Of_1_10_2017_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_IWFhTEer-0CSeVpfpU13Ng">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:ConvertibleSeniorUnsecuredNotesDue2023Member</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2017-01-10</instant>
        </period>
    </context>
    <context id="Duration_12_16_2021_To_12_16_2021_srt_RangeAxis_srt_MinimumMember_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021Member_us-gaap_VariableRateAxis_us-gaap_SecuredOvernightFinancingRateSofrOvernightIndexSwapRateMember_W06gA2KxG0SepRz9gRIbeA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:RangeAxis">srt:MinimumMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:RevolvingCreditFacilityDecember2021Member</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:VariableRateAxis">us-gaap:SecuredOvernightFinancingRateSofrOvernightIndexSwapRateMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-12-16</startDate>
            <endDate>2021-12-16</endDate>
        </period>
    </context>
    <context id="Duration_12_16_2021_To_12_16_2021_srt_RangeAxis_srt_MinimumMember_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021Member_us-gaap_VariableRateAxis_us-gaap_BaseRateMember_9l_m7cLDiECMDSisLkqkyg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:RangeAxis">srt:MinimumMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:RevolvingCreditFacilityDecember2021Member</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:VariableRateAxis">us-gaap:BaseRateMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-12-16</startDate>
            <endDate>2021-12-16</endDate>
        </period>
    </context>
    <context id="Duration_12_16_2021_To_12_16_2021_srt_RangeAxis_srt_MaximumMember_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021Member_us-gaap_VariableRateAxis_us-gaap_SecuredOvernightFinancingRateSofrOvernightIndexSwapRateMember_R5S-gMQe8keYrNuq6wDVag">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:RangeAxis">srt:MaximumMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:RevolvingCreditFacilityDecember2021Member</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:VariableRateAxis">us-gaap:SecuredOvernightFinancingRateSofrOvernightIndexSwapRateMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-12-16</startDate>
            <endDate>2021-12-16</endDate>
        </period>
    </context>
    <context id="Duration_12_16_2021_To_12_16_2021_srt_RangeAxis_srt_MaximumMember_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021Member_us-gaap_VariableRateAxis_us-gaap_BaseRateMember_5s2HMN4pxUOnshOrqA3jAw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:RangeAxis">srt:MaximumMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:RevolvingCreditFacilityDecember2021Member</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:VariableRateAxis">us-gaap:BaseRateMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-12-16</startDate>
            <endDate>2021-12-16</endDate>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_rMWc7QQ050epRT-cmk3YDQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:ConvertibleSeniorUnsecuredNotesDue2027Member</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_ZetZSnUIu0SKEy9vSz2DrA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:ConvertibleSeniorUnsecuredNotesDue2025Member</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_wzCRDkFhQEa0Q4hGaj9ADA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:ConvertibleSeniorUnsecuredNotesDue2023Member</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_srt_MajorCustomersAxis_veco_TopTenCustomersMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_S-7J6nBA20enuSmeS4u47A">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:MajorCustomersAxis">veco:TopTenCustomersMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:AccountsReceivableMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CreditConcentrationRiskMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_srt_MajorCustomersAxis_veco_CustomerFMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_4dGT7A_R9UydroMwKOR-uA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:MajorCustomersAxis">veco:CustomerFMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:AccountsReceivableMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CreditConcentrationRiskMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_12_31_2021_srt_MajorCustomersAxis_veco_TopTenCustomersMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_STb5nYXm7USe8k9Ls-HfDg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:MajorCustomersAxis">veco:TopTenCustomersMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:AccountsReceivableMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CreditConcentrationRiskMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_12_31_2021_srt_MajorCustomersAxis_veco_CustomerDMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_yP78NPy8K0O09X8fBKRsyQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:MajorCustomersAxis">veco:CustomerDMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:AccountsReceivableMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CreditConcentrationRiskMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_12_31_2021_srt_MajorCustomersAxis_veco_CustomerCMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_NXdZ-M0690aCSuYO9gmOnw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:MajorCustomersAxis">veco:CustomerCMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:AccountsReceivableMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CreditConcentrationRiskMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_12_31_2021_srt_MajorCustomersAxis_veco_CustomerBMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_Hivl-4H1CUSQ5oS73bRBSg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:MajorCustomersAxis">veco:CustomerBMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CustomerConcentrationRiskMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_12_31_2021_srt_MajorCustomersAxis_veco_CustomerAMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_xncv0g_nvkqEqtTOvac8gA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:MajorCustomersAxis">veco:CustomerAMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CustomerConcentrationRiskMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_12_31_2021_srt_MajorCustomersAxis_veco_CustomerAMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_KB9uqMrKw0yowdxGLskIdw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:MajorCustomersAxis">veco:CustomerAMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:AccountsReceivableMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CreditConcentrationRiskMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2020_To_12_31_2020_srt_MajorCustomersAxis_veco_CustomerEMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_8a3DkbfigE-Y0KZYUOHMMA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:MajorCustomersAxis">veco:CustomerEMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CustomerConcentrationRiskMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-01-01</startDate>
            <endDate>2020-12-31</endDate>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_PlanNameAxis_veco_StockIncentivePlan2010Member_kkhgLAR_vUO7juC-JnEbpw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:PlanNameAxis">veco:StockIncentivePlan2010Member</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_9spIHk5Lj0mk0Fhq0uyLew">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:PlanNameAxis">veco:EmployeeStockPurchasePlan2016Member</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_1_1_2022_us-gaap_AdjustmentsForNewAccountingPronouncementsAxis_us-gaap_AccountingStandardsUpdate202006Member_kuhpVblHeESHna3s4yVELw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:AdjustmentsForNewAccountingPronouncementsAxis">us-gaap:AccountingStandardsUpdate202006Member</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-01-01</endDate>
        </period>
    </context>
    <context id="As_Of_1_1_2022_us-gaap_AdjustmentsForNewAccountingPronouncementsAxis_us-gaap_AccountingStandardsUpdate202006Member_YriApdcwvUG3B-95OCDPfg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:AdjustmentsForNewAccountingPronouncementsAxis">us-gaap:AccountingStandardsUpdate202006Member</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-01-01</instant>
        </period>
    </context>
    <context id="As_Of_4_1_2020_us-gaap_AdjustmentsForNewAccountingPronouncementsAxis_us-gaap_AccountingStandardsUpdate201912Member_pNbALjFiLEiNFwxB8zN-cA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:AdjustmentsForNewAccountingPronouncementsAxis">us-gaap:AccountingStandardsUpdate201912Member</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2020-04-01</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2020_JUGLvBeldEeSTj1WqQBVdQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
        </entity>
        <period>
            <instant>2020-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2019_dyqJ8hTIuEW6V2L_RveF0A">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
        </entity>
        <period>
            <instant>2019-12-31</instant>
        </period>
    </context>
    <context id="As_Of_1_31_2023_us-gaap_BusinessAcquisitionAxis_veco_EpiluvacAbMember_us-gaap_SubsequentEventTypeAxis_us-gaap_SubsequentEventMember_bd9hW5CYR0a5e-Lpq61haA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:BusinessAcquisitionAxis">veco:EpiluvacAbMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:SubsequentEventTypeAxis">us-gaap:SubsequentEventMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2023-01-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_FinancialInstrumentAxis_us-gaap_CommercialPaperMember_v9BAMIwwwk2Oy_ebY3ejrw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:FinancialInstrumentAxis">us-gaap:CommercialPaperMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2021_us-gaap_FinancialInstrumentAxis_us-gaap_CommercialPaperMember_Q4aGVM4lLEKYgbV0sPLsVg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:FinancialInstrumentAxis">us-gaap:CommercialPaperMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_FinancialInstrumentAxis_us-gaap_USTreasurySecuritiesMember_LradD4ylt0uzAESlET9k1A">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:FinancialInstrumentAxis">us-gaap:USTreasurySecuritiesMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_FinancialInstrumentAxis_us-gaap_USGovernmentAgenciesDebtSecuritiesMember_nuwqJ_OpWE6z8iWOh2BzFg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:FinancialInstrumentAxis">us-gaap:USGovernmentAgenciesDebtSecuritiesMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_FinancialInstrumentAxis_us-gaap_CorporateDebtSecuritiesMember_W6dvtbJBXEa50pS4c58icg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:FinancialInstrumentAxis">us-gaap:CorporateDebtSecuritiesMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2021_us-gaap_FinancialInstrumentAxis_us-gaap_USTreasurySecuritiesMember_gJhgKG5MIk-r_VdVxod5_g">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:FinancialInstrumentAxis">us-gaap:USTreasurySecuritiesMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2021_us-gaap_FinancialInstrumentAxis_us-gaap_USGovernmentAgenciesDebtSecuritiesMember_qSaUfSjFAk-Go6t8v7C5Vg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:FinancialInstrumentAxis">us-gaap:USGovernmentAgenciesDebtSecuritiesMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2021_us-gaap_FinancialInstrumentAxis_us-gaap_CorporateDebtSecuritiesMember_IXDRtarETEeWv9xq-DPEYw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:FinancialInstrumentAxis">us-gaap:CorporateDebtSecuritiesMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2021_us-gaap_BalanceSheetLocationAxis_us-gaap_OtherLiabilitiesMember_8L6qodKhvEqd88yeBiGHBg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:BalanceSheetLocationAxis">us-gaap:OtherLiabilitiesMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-12-31</instant>
        </period>
    </context>
    <context id="Duration_1_1_2020_To_12_31_2020_us-gaap_DisposalGroupClassificationAxis_us-gaap_DisposalGroupDisposedOfBySaleNotDiscontinuedOperationsMember_us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsAxis_veco_OneNonCoreProductLineMember_juSBtzD8xUGaHzoP0bEdzA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:DisposalGroupClassificationAxis">us-gaap:DisposalGroupDisposedOfBySaleNotDiscontinuedOperationsMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsAxis">veco:OneNonCoreProductLineMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-01-01</startDate>
            <endDate>2020-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_veco_PotentiallyDilutiveSharesMember_Xh0mJGtCjkizBLR7chyGyg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis">veco:PotentiallyDilutiveSharesMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_12_31_2021_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_veco_PotentiallyDilutiveSharesMember_TpPdreQLc0uaUnxJXzBvZA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis">veco:PotentiallyDilutiveSharesMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_12_31_2021_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_us-gaap_ConvertibleDebtMember_B4QzNEW5AEKairiU-IKfGw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis">us-gaap:ConvertibleDebtMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2020_To_12_31_2020_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_veco_PotentiallyDilutiveSharesMember_rTgo9ZGu6EWujc23LmjRcw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis">veco:PotentiallyDilutiveSharesMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-01-01</startDate>
            <endDate>2020-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2020_To_12_31_2020_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_veco_CommonStockEquivalentsMember_GgBN3cvDTE-byDYqs9wG7A">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis">veco:CommonStockEquivalentsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-01-01</startDate>
            <endDate>2020-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2020_To_12_31_2020_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_us-gaap_ConvertibleDebtMember_MuNBTSuoqkKGYpc0H0iPXw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis">us-gaap:ConvertibleDebtMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-01-01</startDate>
            <endDate>2020-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_x6bwc1aoykiu0j_LFZBhYg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:ConvertibleSeniorUnsecuredNotesDue2027Member</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_hWxJVXpeukyYZRjXd7vFsw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:ConvertibleSeniorUnsecuredNotesDue2025Member</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_IlL1-aoOz0muNy23d_GMOw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:ConvertibleSeniorUnsecuredNotesDue2023Member</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_12_31_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_oRqSXBIKh0eX4ExySYWF8w">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:ConvertibleSeniorUnsecuredNotesDue2027Member</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_12_31_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_Fq2asOdn_kqiVzufwpVwKw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:ConvertibleSeniorUnsecuredNotesDue2025Member</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_12_31_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_sUmtKlw7GU2Z1jCoNlH0mQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:ConvertibleSeniorUnsecuredNotesDue2023Member</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2020_To_12_31_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_EG9sy8Hb-0ezbGiM3IJ64w">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:ConvertibleSeniorUnsecuredNotesDue2023Member</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-01-01</startDate>
            <endDate>2020-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_us-gaap_IncomeStatementLocationAxis_us-gaap_SellingGeneralAndAdministrativeExpensesMember_9myQ9Uv9wE6pMR5CtJ_ICQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:SellingGeneralAndAdministrativeExpensesMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_us-gaap_IncomeStatementLocationAxis_us-gaap_ResearchAndDevelopmentExpenseMember_xC5nU-WYOkm4dMh6YP-Ebw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:ResearchAndDevelopmentExpenseMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_us-gaap_IncomeStatementLocationAxis_us-gaap_CostOfSalesMember_6jlqOW9pV0m43w7beGI5eQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:CostOfSalesMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_12_31_2021_us-gaap_IncomeStatementLocationAxis_us-gaap_SellingGeneralAndAdministrativeExpensesMember_rhJjBZUOoUWCeAi4MtyMAA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:SellingGeneralAndAdministrativeExpensesMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_12_31_2021_us-gaap_IncomeStatementLocationAxis_us-gaap_ResearchAndDevelopmentExpenseMember_0YA8SwGFkkuMLELC1j-hSA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:ResearchAndDevelopmentExpenseMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_12_31_2021_us-gaap_IncomeStatementLocationAxis_us-gaap_CostOfSalesMember_6abGMq9QDEeOCipvBcXctA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:CostOfSalesMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2020_To_12_31_2020_us-gaap_IncomeStatementLocationAxis_us-gaap_SellingGeneralAndAdministrativeExpensesMember_fLK1Qhy09Ee_xMlMC5PRcg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:SellingGeneralAndAdministrativeExpensesMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-01-01</startDate>
            <endDate>2020-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2020_To_12_31_2020_us-gaap_IncomeStatementLocationAxis_us-gaap_ResearchAndDevelopmentExpenseMember_h4OfLfI-aUWU3289IhriMQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:ResearchAndDevelopmentExpenseMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-01-01</startDate>
            <endDate>2020-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2020_To_12_31_2020_us-gaap_IncomeStatementLocationAxis_us-gaap_CostOfSalesMember_ygktSsgTfUyjEVIS_GKOzA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:CostOfSalesMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-01-01</startDate>
            <endDate>2020-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_QZRsqkKY70-vQJ-kuKgfnA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AdditionalPaidInCapitalMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_9gz_RG3i3EuWCc_uyao52w">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AdditionalPaidInCapitalMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2020_To_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_31RxRwAXMUOBUYXDlssrkQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AdditionalPaidInCapitalMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-01-01</startDate>
            <endDate>2020-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
        </entity>
        <period>
            <startDate>2020-01-01</startDate>
            <endDate>2020-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2020_To_12_31_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_DEAAn-NWvkmZVHFd6j4MOg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:ConvertibleSeniorUnsecuredNotesDue2027Member</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AdditionalPaidInCapitalMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-01-01</startDate>
            <endDate>2020-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2020_To_12_31_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_8j1zlyr4AU2z9_9awGfNwQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:ConvertibleSeniorUnsecuredNotesDue2025Member</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AdditionalPaidInCapitalMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-01-01</startDate>
            <endDate>2020-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2020_To_12_31_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_NdHMAvtl7EiuDr6tIOXilw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:ConvertibleSeniorUnsecuredNotesDue2027Member</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-01-01</startDate>
            <endDate>2020-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2020_To_12_31_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_B52uU2Mlw0iaAElsoUnx3Q">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:DebtInstrumentAxis">veco:ConvertibleSeniorUnsecuredNotesDue2025Member</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-01-01</startDate>
            <endDate>2020-12-31</endDate>
        </period>
    </context>
    <context id="As_Of_12_31_2021_srt_CumulativeEffectPeriodOfAdoptionAxis_srt_CumulativeEffectPeriodOfAdoptionAdjustmentMember_us-gaap_AdjustmentsForNewAccountingPronouncementsAxis_us-gaap_AccountingStandardsUpdate202006Member_uQc4nJTxR0OEJlucArTKOA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:CumulativeEffectPeriodOfAdoptionAxis">srt:CumulativeEffectPeriodOfAdoptionAdjustmentMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:AdjustmentsForNewAccountingPronouncementsAxis">us-gaap:AccountingStandardsUpdate202006Member</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2021_srt_CumulativeEffectPeriodOfAdoptionAxis_srt_CumulativeEffectPeriodOfAdoptionAdjustedBalanceMember_us-gaap_AdjustmentsForNewAccountingPronouncementsAxis_us-gaap_AccountingStandardsUpdate202006Member_LzmwhGpHdUa1ilaCnrJETw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:CumulativeEffectPeriodOfAdoptionAxis">srt:CumulativeEffectPeriodOfAdoptionAdjustedBalanceMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:AdjustmentsForNewAccountingPronouncementsAxis">us-gaap:AccountingStandardsUpdate202006Member</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_BalanceSheetLocationAxis_us-gaap_OtherLiabilitiesMember_79zlpumRSUyxTgOHdVLA_Q">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:BalanceSheetLocationAxis">us-gaap:OtherLiabilitiesMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
        </entity>
        <period>
            <instant>2021-12-31</instant>
        </period>
    </context>
    <context id="As_Of_7_1_2022_QpEKXeY9BUGD8AT7Wk8OMQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
        </entity>
        <period>
            <instant>2022-07-01</instant>
        </period>
    </context>
    <context id="As_Of_1_31_2023_dei_LegalEntityAxis_veco_EpiluvacAbMember_us-gaap_SubsequentEventTypeAxis_us-gaap_SubsequentEventMember_bGwG6YtVWESCjdQzt4z_DA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:SubsequentEventTypeAxis">us-gaap:SubsequentEventMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="dei:LegalEntityAxis">veco:EpiluvacAbMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2023-01-31</instant>
        </period>
    </context>
    <context id="As_Of_2_13_2023_k6obUYDuoUWdkjMxZbrZsw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
        </entity>
        <period>
            <instant>2023-02-13</instant>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000103145</identifier>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <unit id="Unit_Standard_item_aj1ZEHofC0agSXOi_C6c5A">
        <measure>veco:item</measure>
    </unit>
    <unit id="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">
        <measure>shares</measure>
    </unit>
    <unit id="Unit_Standard_employee_W_mzWhkhIEKoXUFE8oNQVg">
        <measure>veco:employee</measure>
    </unit>
    <unit id="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">
        <measure>iso4217:USD</measure>
    </unit>
    <unit id="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg">
        <divide>
            <unitNumerator>
                <measure>iso4217:USD</measure>
            </unitNumerator>
            <unitDenominator>
                <measure>shares</measure>
            </unitDenominator>
        </divide>
    </unit>
    <unit id="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w">
        <measure>pure</measure>
    </unit>
    <unit id="Unit_Standard_D_LRKZsttWxECdvF14i5EoQg">
        <measure>veco:D</measure>
    </unit>
    <unit id="Unit_Standard_case_gtF5dJF030CdqF2FGWQ9yA">
        <measure>veco:case</measure>
    </unit>
    <unit id="Unit_Standard_segment_RlYNACzID0m6O5VHI3M3nA">
        <measure>veco:segment</measure>
    </unit>
    <unit id="Unit_Standard_customer_ewo2DglECUO5n4nvx82_SQ">
        <measure>veco:customer</measure>
    </unit>
    <us-gaap:PreferredStockValue
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      id="Hidden_rvjYzexRXUOQR20Zl1nBWw"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA"
      xsi:nil="true"/>
    <us-gaap:PreferredStockValue
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      id="Hidden_9P31eLujM0aTyQUmYP2zmw"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA"
      xsi:nil="true"/>
    <veco:IrrevocableLettersOfCreditMaturityPeriodMinimum
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Hidden_X77IvS7lk0evd8U-l6qM4w">P0D</veco:IrrevocableLettersOfCreditMaturityPeriodMinimum>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1
      contextRef="Duration_1_1_2022_To_12_31_2022_srt_RangeAxis_srt_MinimumMember_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_C24Z8a4FqkeFDK2d2d9hYg"
      id="Hidden_mYtq0YB12kmZB5r9hVizow">P1Y</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1
      contextRef="Duration_1_1_2013_To_12_31_2013_srt_RangeAxis_srt_MinimumMember_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_us-gaap_PlanNameAxis_veco_InducementStockIncentivePlan2013Member_PEuA9XZyfU-Z-u_scIxdGQ"
      id="Hidden_GYTb4cpfHkKMyAjEn-joig">P2Y</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1
      contextRef="Duration_1_1_2022_To_12_31_2022_srt_RangeAxis_srt_MinimumMember_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsAndRestrictedStockUnitsMember_us-gaap_PlanNameAxis_veco_StockIncentivePlan2010Member_8EaDxBLlOEKvfMX15uUWaw"
      id="Hidden_lv-KmzIXvUmFz5KZwCediA">P1Y</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1>
    <veco:NumberOfTradingDaysConsideredToCalculateMarketCapitalization
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Hidden_lu4ZbA0J8kKBzBR2b7i9TA">P10D</veco:NumberOfTradingDaysConsideredToCalculateMarketCapitalization>
    <us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod
      contextRef="Duration_1_1_2022_To_12_31_2022_srt_RangeAxis_srt_MinimumMember_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember_us-gaap_PlanNameAxis_veco_StockIncentivePlan2010Member_xoqmI5-NBU2aLrJgxZ3q3g"
      id="Hidden_geqmoAoR4E-cxxENNB5XWw">P7Y</us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod>
    <veco:DebtInstrumentNumberOfConsecutiveBusinessDays
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_DebtInstrumentAxis_us-gaap_ConvertibleDebtMember_XQJwNQGip0-4rSyYMzx-Zw"
      id="Hidden_ni2iafIMQEWlcjh9n4sB8Q">P5D</veco:DebtInstrumentNumberOfConsecutiveBusinessDays>
    <us-gaap:NumberOfOperatingSegments
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="INF"
      id="Hidden_Q4WTJDpvMEebo8fh1Cmpvw"
      unitRef="Unit_Standard_segment_RlYNACzID0m6O5VHI3M3nA">1</us-gaap:NumberOfOperatingSegments>
    <us-gaap:RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionPeriod1
      contextRef="As_Of_12_31_2022_srt_RangeAxis_srt_MinimumMember_us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionStartDateAxis_veco_cnst_2024-01-01_3OL-sQzaTEOOG3d6jcbkGg"
      id="Hidden_lMHLKbK2aECnPZnMvM5qZg">P1Y</us-gaap:RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionPeriod1>
    <us-gaap:OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      id="Hidden_eoIrvRLA5kWv8kXlN_7lSg">http://www.veeco.com/20221231#AccruedAndOtherLiabilitiesCurrent</us-gaap:OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList>
    <us-gaap:OperatingLeaseLiabilityStatementOfFinancialPositionExtensibleList
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      id="Hidden_sGkRBjQQs0yUxZ2hF_23sA">http://fasb.org/us-gaap/2022#OperatingLeaseLiabilityNoncurrent http://www.veeco.com/20221231#AccruedAndOtherLiabilitiesCurrent</us-gaap:OperatingLeaseLiabilityStatementOfFinancialPositionExtensibleList>
    <us-gaap:OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      id="Hidden_EGVCh5E7LkOiByzYXsbm8w">http://www.veeco.com/20221231#AccruedAndOtherLiabilitiesCurrent</us-gaap:OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList>
    <us-gaap:OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      id="Hidden_Hgo4tMDiIkiIx-7JwDKL-Q">http://www.veeco.com/20221231#AccruedAndOtherLiabilitiesCurrent</us-gaap:OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList>
    <dei:EntityCentralIndexKey
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tc_KESy8eqBJEisTMGf4adqBA_2_1">0000103145</dei:EntityCentralIndexKey>
    <dei:DocumentFiscalYearFocus
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tc_VFO3OMGIukOxOF7pvA5ERA_4_1">2022</dei:DocumentFiscalYearFocus>
    <dei:DocumentFiscalPeriodFocus
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tc_rP_W-_sBZU6iMZNxmnUrnw_5_1">FY</dei:DocumentFiscalPeriodFocus>
    <dei:AmendmentFlag
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tc_sMxbz_WpaUKtHgWmgdnSug_6_1">false</dei:AmendmentFlag>
    <us-gaap:ConvertibleDebtFairValueByFairValueHierarchyLevelExtensibleList
      contextRef="As_Of_12_31_2022_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_wzCRDkFhQEa0Q4hGaj9ADA"
      id="Hidden_6pZXc4yN8UGzliGoc7Xcfw">http://fasb.org/us-gaap/2022#FairValueInputsLevel2Member</us-gaap:ConvertibleDebtFairValueByFairValueHierarchyLevelExtensibleList>
    <us-gaap:ConvertibleDebtFairValueByFairValueHierarchyLevelExtensibleList
      contextRef="As_Of_12_31_2022_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_ZetZSnUIu0SKEy9vSz2DrA"
      id="Hidden_j8h4rOm8lUqa-Aq9yQNl0g">http://fasb.org/us-gaap/2022#FairValueInputsLevel2Member</us-gaap:ConvertibleDebtFairValueByFairValueHierarchyLevelExtensibleList>
    <us-gaap:ConvertibleDebtFairValueByFairValueHierarchyLevelExtensibleList
      contextRef="As_Of_12_31_2022_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_rMWc7QQ050epRT-cmk3YDQ"
      id="Hidden_7AsSvO4WhUmmbzAO1MAR1w">http://fasb.org/us-gaap/2022#FairValueInputsLevel2Member</us-gaap:ConvertibleDebtFairValueByFairValueHierarchyLevelExtensibleList>
    <us-gaap:LongTermDebtMeasurementInputExtensibleList
      contextRef="As_Of_1_10_2017_mE_NZqLn50uO237u-S13xA"
      id="Hidden_oLp6BWq4j0SmMOsjNERVHg">http://fasb.org/us-gaap/2022#MeasurementInputDiscountRateMember</us-gaap:LongTermDebtMeasurementInputExtensibleList>
    <us-gaap:LongTermDebtMeasurementInputExtensibleList
      contextRef="As_Of_11_17_2020_jAUfBON7oEmWBbqJUWrC9A"
      id="Hidden_JIHuoDj1xk2Lu7ABrLHNxA">http://fasb.org/us-gaap/2022#MeasurementInputDiscountRateMember</us-gaap:LongTermDebtMeasurementInputExtensibleList>
    <us-gaap:LongTermDebtMeasurementInputExtensibleList
      contextRef="As_Of_5_18_2020_QRmcZr2GXU2znfxw1ngsUg"
      id="Hidden_Zok5uByMkkuRQp9J7Ofx9g">http://fasb.org/us-gaap/2022#MeasurementInputDiscountRateMember</us-gaap:LongTermDebtMeasurementInputExtensibleList>
    <us-gaap:ChangeInAccountingPrincipleAccountingStandardsUpdateTransitionOptionElectedExtensibleList
      contextRef="Duration_1_1_2022_To_1_1_2022_us-gaap_AdjustmentsForNewAccountingPronouncementsAxis_us-gaap_AccountingStandardsUpdate202006Member_kuhpVblHeESHna3s4yVELw"
      id="Hidden_kuYE2HfeWkSfBndNPXMkng">http://fasb.org/us-gaap/2022#AccountingStandardsUpdate201602CumulativeEffectPeriodOfAdoptionMember</us-gaap:ChangeInAccountingPrincipleAccountingStandardsUpdateTransitionOptionElectedExtensibleList>
    <dei:DocumentType
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Narr_yMU5W-g8gkOowHrtHa2lVw">10-K</dei:DocumentType>
    <dei:DocumentAnnualReport
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tc_Q13lE8U41UKL3wzENbD4OQ_1_0">true</dei:DocumentAnnualReport>
    <dei:DocumentPeriodEndDate
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Narr_sQyOG1MDcUqsnYrMDL3Syw">2022-12-31</dei:DocumentPeriodEndDate>
    <dei:CurrentFiscalYearEndDate
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Narr_Z-TSr1hrMkKdFEtMFFGcPw">--12-31</dei:CurrentFiscalYearEndDate>
    <dei:DocumentTransitionReport
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tc_ksy8BK_ZG0eR7zJPntNDbg_1_0">false</dei:DocumentTransitionReport>
    <dei:EntityFileNumber
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Narr_Kq0tR7H3A0iIsHWThnR56A">0-16244</dei:EntityFileNumber>
    <dei:EntityRegistrantName
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Narr_WgJfJXMHeEKHIsDw5jIEng">VEECO INSTRUMENTS&#160;INC</dei:EntityRegistrantName>
    <dei:EntityIncorporationStateCountryCode
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tc_YiDORqBw502pYCfPf9EAuw_1_0">DE</dei:EntityIncorporationStateCountryCode>
    <dei:EntityTaxIdentificationNumber
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tc_4W1_qqluUEiCtFnTnf1mCw_1_1">11-2989601</dei:EntityTaxIdentificationNumber>
    <dei:EntityAddressAddressLine1
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tc_dMX9RZJEs0iXIQmcH_t0hg_1_0">Terminal Drive</dei:EntityAddressAddressLine1>
    <dei:EntityAddressCityOrTown
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Narr_2FFBcbN7tky0FbUsGDkg_w">Plainview</dei:EntityAddressCityOrTown>
    <dei:EntityAddressStateOrProvince
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Narr_xA4qiscu7Eq2jgHzZIo3KA">NY</dei:EntityAddressStateOrProvince>
    <dei:EntityAddressPostalZipCode
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tc_MdcFpHsrL0S3R85KBjARxA_2_1">11803</dei:EntityAddressPostalZipCode>
    <dei:CityAreaCode
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Narr_SHZCk4hOmUihl0REzz7Cfg">516</dei:CityAreaCode>
    <dei:LocalPhoneNumber
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Narr_xbQ-0KoMAE6RERMiL1LJBw">677-0200</dei:LocalPhoneNumber>
    <dei:Security12bTitle
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Narr_jLkWgxR1JUOu-iCwlp8Qcg">Common Stock</dei:Security12bTitle>
    <dei:TradingSymbol
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tc_srtrAWxKTUCMvVNAwR2D0A_1_1">VECO</dei:TradingSymbol>
    <dei:SecurityExchangeName
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Narr_fZ1jyIBxCEOJIW2KzmcAMA">NASDAQ</dei:SecurityExchangeName>
    <dei:EntityWellKnownSeasonedIssuer
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Narr_xLqxJprSuEKtNb8hAXJzCA">Yes</dei:EntityWellKnownSeasonedIssuer>
    <dei:EntityVoluntaryFilers
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Narr_avbE4GTFKEmEVlPLARWWlA">No</dei:EntityVoluntaryFilers>
    <dei:EntityCurrentReportingStatus
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Narr_1JJ0ZiI6LkClAkIJex2nqg">Yes</dei:EntityCurrentReportingStatus>
    <dei:EntityInteractiveDataCurrent
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Narr_MwpptUmZv02IOjP-BFeBlA">Yes</dei:EntityInteractiveDataCurrent>
    <dei:EntityFilerCategory
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Narr_voocYeij9UacxPZ-PtG9IA">Large Accelerated Filer</dei:EntityFilerCategory>
    <dei:EntityEmergingGrowthCompany
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Narr_SzIJUL0bOk6kphYPvlimKg">false</dei:EntityEmergingGrowthCompany>
    <dei:EntitySmallBusiness
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Narr_ywNPiNTsx0yInCwxesLkFg">false</dei:EntitySmallBusiness>
    <dei:EntityShellCompany
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Narr_8bsFApSOQEO3XQrCnydUyw">false</dei:EntityShellCompany>
    <dei:IcfrAuditorAttestationFlag
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Narr_WuFHBwQKvU2HEcIxqT3WWA">true</dei:IcfrAuditorAttestationFlag>
    <dei:EntityPublicFloat
      contextRef="As_Of_7_1_2022_QpEKXeY9BUGD8AT7Wk8OMQ"
      decimals="0"
      id="Narr_veWoouotWUaYwL_v7FklOQ"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">906413355</dei:EntityPublicFloat>
    <dei:EntityCommonStockSharesOutstanding
      contextRef="As_Of_2_13_2023_k6obUYDuoUWdkjMxZbrZsw"
      decimals="INF"
      id="Narr_f-nu3RhPkUCx73XujBDWPg"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">51661429</dei:EntityCommonStockSharesOutstanding>
    <dei:AuditorFirmId
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Narr_PPtrbdjtY0Kx4WA1ojtL4A">185</dei:AuditorFirmId>
    <dei:AuditorName
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Narr_ubP-CNJIdEiechOdqkJm0A">KPMG LLP</dei:AuditorName>
    <dei:AuditorLocation
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Narr_HrcdDJRTQ0Cv71GvTkRh4Q">Santa Clara, California</dei:AuditorLocation>
    <us-gaap:CashAndCashEquivalentsAtCarryingValue
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_eX_mOG7s7kydIv2jYjEo2g_5_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">154925000</us-gaap:CashAndCashEquivalentsAtCarryingValue>
    <us-gaap:CashAndCashEquivalentsAtCarryingValue
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_gcIQcsUwcUG5JCD70RI-0Q_5_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">119747000</us-gaap:CashAndCashEquivalentsAtCarryingValue>
    <us-gaap:RestrictedCashAndCashEquivalentsAtCarryingValue
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_bcNozRIU6UCTDDe5TfLF6Q_6_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">547000</us-gaap:RestrictedCashAndCashEquivalentsAtCarryingValue>
    <us-gaap:RestrictedCashAndCashEquivalentsAtCarryingValue
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_IYVRPdasX0GDR0W6lA1hJQ_6_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">725000</us-gaap:RestrictedCashAndCashEquivalentsAtCarryingValue>
    <us-gaap:AvailableForSaleSecuritiesDebtSecuritiesCurrent
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_6RWNSqZWmEyHw8mVRnTtVA_7_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">147488000</us-gaap:AvailableForSaleSecuritiesDebtSecuritiesCurrent>
    <us-gaap:AvailableForSaleSecuritiesDebtSecuritiesCurrent
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc__WATZVEOcU6tS3gf5AC8RA_7_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">104181000</us-gaap:AvailableForSaleSecuritiesDebtSecuritiesCurrent>
    <us-gaap:AccountsReceivableNetCurrent
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_R1uC6O0_YU-0qOX1gROFSQ_8_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">124221000</us-gaap:AccountsReceivableNetCurrent>
    <us-gaap:AccountsReceivableNetCurrent
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_2FWqhRlG40aH4cg8iwbwYQ_8_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">109609000</us-gaap:AccountsReceivableNetCurrent>
    <us-gaap:UnbilledContractsReceivable
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_diHt74WANUqPmfyh5MJbTw_9_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">16507000</us-gaap:UnbilledContractsReceivable>
    <us-gaap:UnbilledContractsReceivable
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_vXtvFJ5Bakq1z0-bL5MuFg_9_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">18293000</us-gaap:UnbilledContractsReceivable>
    <us-gaap:InventoryNet
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_Jg2YgeyRHEOGHiN6jETZAg_10_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">206908000</us-gaap:InventoryNet>
    <us-gaap:InventoryNet
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_R9JNLKMEbEOBPeZ5Ne0XdA_10_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">170858000</us-gaap:InventoryNet>
    <us-gaap:PrepaidExpenseAndOtherAssetsCurrent
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_amol9U51EUe8CulMbbcOVA_11_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">18305000</us-gaap:PrepaidExpenseAndOtherAssetsCurrent>
    <us-gaap:PrepaidExpenseAndOtherAssetsCurrent
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_LFDI4S6GukeM02QcT16IJQ_11_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">25974000</us-gaap:PrepaidExpenseAndOtherAssetsCurrent>
    <us-gaap:AssetsCurrent
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_SU6g0pGwTEuGs6coFZM4VQ_12_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">668901000</us-gaap:AssetsCurrent>
    <us-gaap:AssetsCurrent
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_RCrf6Y_0YkGGpE9pN_hU3A_12_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">549387000</us-gaap:AssetsCurrent>
    <us-gaap:PropertyPlantAndEquipmentNet
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_X8BpAiwN506pZcqYD-u8Vg_13_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">107281000</us-gaap:PropertyPlantAndEquipmentNet>
    <us-gaap:PropertyPlantAndEquipmentNet
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_eCL1GiO7G0upd0U3NvDUsQ_13_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">99743000</us-gaap:PropertyPlantAndEquipmentNet>
    <us-gaap:OperatingLeaseRightOfUseAsset
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_Id6TdEryQEme6CJFsXEY4A_14_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">26467000</us-gaap:OperatingLeaseRightOfUseAsset>
    <us-gaap:OperatingLeaseRightOfUseAsset
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_TRPOOof9lkqDOi6uPoJWEQ_14_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">28813000</us-gaap:OperatingLeaseRightOfUseAsset>
    <us-gaap:FiniteLivedIntangibleAssetsNet
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_fjBGhe40RECB6R6jwatKUw_15_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">23887000</us-gaap:FiniteLivedIntangibleAssetsNet>
    <us-gaap:FiniteLivedIntangibleAssetsNet
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_gdXhLv6PK02HEuHfqk2fHw_15_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">33905000</us-gaap:FiniteLivedIntangibleAssetsNet>
    <us-gaap:Goodwill
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_oMzvkaw6D0CApwOK75LCHw_16_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">181943000</us-gaap:Goodwill>
    <us-gaap:Goodwill
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_zj5alwVNv0asZ9GBez9hGg_16_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">181943000</us-gaap:Goodwill>
    <us-gaap:DeferredIncomeTaxAssetsNet
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_5qHd_wmzRUSSk7QD2GN1yA_17_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">116349000</us-gaap:DeferredIncomeTaxAssetsNet>
    <us-gaap:DeferredIncomeTaxAssetsNet
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_Lo3WyGF5sU2b8q3rcKP3Nw_17_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">1639000</us-gaap:DeferredIncomeTaxAssetsNet>
    <us-gaap:OtherAssetsNoncurrent
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_AG17VqxF2kS0c2c-tOKFDQ_18_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">3355000</us-gaap:OtherAssetsNoncurrent>
    <us-gaap:OtherAssetsNoncurrent
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_hfuPKmzCEkebMofXmCdQxQ_18_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">3546000</us-gaap:OtherAssetsNoncurrent>
    <us-gaap:Assets
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_5IM3NqG-OEeZyUp_Sl3GTQ_19_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">1128183000</us-gaap:Assets>
    <us-gaap:Assets
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_9QQ2eAUIV0qFfYw6-m-NgA_19_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">898976000</us-gaap:Assets>
    <us-gaap:AccountsPayableCurrent
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_tR2IzBa2CU-pR_ecbK8w-w_23_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">52049000</us-gaap:AccountsPayableCurrent>
    <us-gaap:AccountsPayableCurrent
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_Mb51UPyFEEClS05XQ3GI_Q_23_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">44456000</us-gaap:AccountsPayableCurrent>
    <veco:AccruedAndOtherLiabilitiesCurrent
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_dBx6zWR_GkaeD7p_QDHgPA_24_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">56031000</veco:AccruedAndOtherLiabilitiesCurrent>
    <veco:AccruedAndOtherLiabilitiesCurrent
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_vXjGUH5gdUKySL8SZzZ1Hg_24_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">79752000</veco:AccruedAndOtherLiabilitiesCurrent>
    <veco:ContractWithCustomerLiabilityAndRefundLiabilityCurrent
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_4j_os5IlJ0Sjmpnw1kJGpg_25_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">127223000</veco:ContractWithCustomerLiabilityAndRefundLiabilityCurrent>
    <veco:ContractWithCustomerLiabilityAndRefundLiabilityCurrent
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_NtKMamwCF0aJe5w0XRK19Q_25_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">63136000</veco:ContractWithCustomerLiabilityAndRefundLiabilityCurrent>
    <us-gaap:AccruedIncomeTaxesCurrent
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_AXWicZ1_7k663mbHcvcwNw_26_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">2432000</us-gaap:AccruedIncomeTaxesCurrent>
    <us-gaap:AccruedIncomeTaxesCurrent
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_SGNO55WtZUeq8zdZQdMyKg_26_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">1860000</us-gaap:AccruedIncomeTaxesCurrent>
    <us-gaap:LongTermDebtCurrent
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_10wukoszGEW3D0DRMo_AOw_27_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">20169000</us-gaap:LongTermDebtCurrent>
    <us-gaap:LiabilitiesCurrent
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_Hbf2l0OlmEqG39c6kvf1Mg_28_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">257904000</us-gaap:LiabilitiesCurrent>
    <us-gaap:LiabilitiesCurrent
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_VcY4y8bbrki2Twl2l8KdGA_28_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">189204000</us-gaap:LiabilitiesCurrent>
    <us-gaap:DeferredIncomeTaxLiabilitiesNet
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_n6s5wQr-qEObvQjxX-AdMw_29_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">1285000</us-gaap:DeferredIncomeTaxLiabilitiesNet>
    <us-gaap:DeferredIncomeTaxLiabilitiesNet
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_1lok153u_UiDfmvd-xvVVw_29_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">4792000</us-gaap:DeferredIncomeTaxLiabilitiesNet>
    <us-gaap:LongTermDebtNoncurrent
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_jJAknrM61kyLZbWvecpNEQ_30_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">254491000</us-gaap:LongTermDebtNoncurrent>
    <us-gaap:LongTermDebtNoncurrent
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_yiH-NXLSHUyzzmSlm7zrWw_30_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">229438000</us-gaap:LongTermDebtNoncurrent>
    <us-gaap:OperatingLeaseLiabilityNoncurrent
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_90tVmzQBTkmWmdZ4PODNlw_31_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">33581000</us-gaap:OperatingLeaseLiabilityNoncurrent>
    <us-gaap:OperatingLeaseLiabilityNoncurrent
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_MbkU_xjiBUCPoZZ5-mKtgA_31_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">32834000</us-gaap:OperatingLeaseLiabilityNoncurrent>
    <us-gaap:OtherLiabilitiesNoncurrent
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_phc96gRq2k6mjQyMfUKNSg_32_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">3098000</us-gaap:OtherLiabilitiesNoncurrent>
    <us-gaap:OtherLiabilitiesNoncurrent
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_x8OcWr6zVUSlPT3axkrLvA_32_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">5080000</us-gaap:OtherLiabilitiesNoncurrent>
    <us-gaap:Liabilities
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_r1sj_qQG6UuRI0uprGXryA_33_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">550359000</us-gaap:Liabilities>
    <us-gaap:Liabilities
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_hCTCjy9V7UG2_t4bEKCvjQ_33_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">461348000</us-gaap:Liabilities>
    <us-gaap:PreferredStockParOrStatedValuePerShare
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="INF"
      id="Narr_dBxijIApNE-ICeVXed8ZWw"
      unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg">0.01</us-gaap:PreferredStockParOrStatedValuePerShare>
    <us-gaap:PreferredStockParOrStatedValuePerShare
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="INF"
      id="Narr_CZOQoC32dkOSITspGyy-2w"
      unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg">0.01</us-gaap:PreferredStockParOrStatedValuePerShare>
    <us-gaap:PreferredStockSharesAuthorized
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="INF"
      id="Narr_h2OkAakHfkmSVXqqc6WTLA"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">500000</us-gaap:PreferredStockSharesAuthorized>
    <us-gaap:PreferredStockSharesAuthorized
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="INF"
      id="Narr_EOE3t9ndpkaAHPPWYXuNGg"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">500000</us-gaap:PreferredStockSharesAuthorized>
    <us-gaap:PreferredStockSharesOutstanding
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="INF"
      id="Narr_Huoq4Js_c0GcCEtPsnReUA"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">0</us-gaap:PreferredStockSharesOutstanding>
    <us-gaap:PreferredStockSharesOutstanding
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="INF"
      id="Narr_EAioLvn9n0GWq43znLdxbw"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">0</us-gaap:PreferredStockSharesOutstanding>
    <us-gaap:PreferredStockSharesIssued
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="INF"
      id="Narr_9J3wRFMvakyTnWfyuAjYUA"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">0</us-gaap:PreferredStockSharesIssued>
    <us-gaap:PreferredStockSharesIssued
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="INF"
      id="Narr_4TEpFVdpN027pa8F-VyiZQ"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">0</us-gaap:PreferredStockSharesIssued>
    <us-gaap:CommonStockParOrStatedValuePerShare
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="INF"
      id="Narr_ebvtvTrDSku4gNZ8MJojTg"
      unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg">0.01</us-gaap:CommonStockParOrStatedValuePerShare>
    <us-gaap:CommonStockParOrStatedValuePerShare
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="INF"
      id="Narr_g1oxDZ-jR0CHUO8SNVjIlQ"
      unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg">0.01</us-gaap:CommonStockParOrStatedValuePerShare>
    <us-gaap:CommonStockSharesAuthorized
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="INF"
      id="Narr_E63OecbntUSmjQu6xDoZOA"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">120000000</us-gaap:CommonStockSharesAuthorized>
    <us-gaap:CommonStockSharesAuthorized
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="INF"
      id="Narr_2bd-kqVNikCalKZviQRaVg"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">120000000</us-gaap:CommonStockSharesAuthorized>
    <us-gaap:CommonStockSharesOutstanding
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="INF"
      id="Narr_1W6gmoPMy0y_UVhBoG_kaw"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">51660409</us-gaap:CommonStockSharesOutstanding>
    <us-gaap:CommonStockSharesIssued
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="INF"
      id="Narr_Z1WLyTI-v0utL_GI3zasyA"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">51660409</us-gaap:CommonStockSharesIssued>
    <us-gaap:CommonStockSharesOutstanding
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="INF"
      id="Narr_8zAItXFmAEqu9GwHc4HBoA"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">50652864</us-gaap:CommonStockSharesOutstanding>
    <us-gaap:CommonStockSharesIssued
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="INF"
      id="Narr_CXCkEHMFhkyF0ge-8bGv3A"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">50652864</us-gaap:CommonStockSharesIssued>
    <us-gaap:CommonStockValue
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_fAvy3WJ9ek-ZUQaHQ2VY0w_36_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">517000</us-gaap:CommonStockValue>
    <us-gaap:CommonStockValue
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_N-y6A4g-6U-mrIWh2oF3Zw_36_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">507000</us-gaap:CommonStockValue>
    <us-gaap:AdditionalPaidInCapitalCommonStock
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_Q0IgV6_F_ky_ZvnQX3oMXA_37_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">1078180000</us-gaap:AdditionalPaidInCapitalCommonStock>
    <us-gaap:AdditionalPaidInCapitalCommonStock
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_Rh8ZfOa69E6bB2NkfKxsXg_37_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">1116921000</us-gaap:AdditionalPaidInCapitalCommonStock>
    <us-gaap:RetainedEarningsAccumulatedDeficit
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_hWn4zc_HZUSTDgL0FSYhOw_38_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-501801000</us-gaap:RetainedEarningsAccumulatedDeficit>
    <us-gaap:RetainedEarningsAccumulatedDeficit
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_qdDOJf4ZAUSE5A10dxhrtg_38_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-681283000</us-gaap:RetainedEarningsAccumulatedDeficit>
    <us-gaap:AccumulatedOtherComprehensiveIncomeLossNetOfTax
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_3chdTZWRPEOOHBhPleVY8Q_39_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">928000</us-gaap:AccumulatedOtherComprehensiveIncomeLossNetOfTax>
    <us-gaap:AccumulatedOtherComprehensiveIncomeLossNetOfTax
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_uk-wTpZTMU2_iVOqDXMHWA_39_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">1483000</us-gaap:AccumulatedOtherComprehensiveIncomeLossNetOfTax>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_x4M9MKAzd0airFa25fX2iA_40_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">577824000</us-gaap:StockholdersEquity>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_77ChyG0kJU2e0HWOvykVaw_40_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">437628000</us-gaap:StockholdersEquity>
    <us-gaap:LiabilitiesAndStockholdersEquity
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_mCe-IwSbeU23MVNopdu8RQ_41_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">1128183000</us-gaap:LiabilitiesAndStockholdersEquity>
    <us-gaap:LiabilitiesAndStockholdersEquity
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_jUTTvgD0jUO19r2s7OBkKg_41_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">898976000</us-gaap:LiabilitiesAndStockholdersEquity>
    <us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_6uRSw3L4UUyUBns-m1Y0KA_3_4"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">646137000</us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax>
    <us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_BPKHITTyfku62Q7FiJpoeQ_3_7"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">583277000</us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax>
    <us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_SwhT_jPBMkqkMNUQ13vquA_3_10"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">454163000</us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax>
    <us-gaap:CostOfGoodsAndServicesSold
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_wOgz7UsUREKgjI_hP3RmgA_4_4"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">382989000</us-gaap:CostOfGoodsAndServicesSold>
    <us-gaap:CostOfGoodsAndServicesSold
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_NxC-GFVWdE2uyffw2ReQkA_4_7"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">341003000</us-gaap:CostOfGoodsAndServicesSold>
    <us-gaap:CostOfGoodsAndServicesSold
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_Sy5JrPdsWEaI1rbL8IQ7dg_4_10"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">259863000</us-gaap:CostOfGoodsAndServicesSold>
    <us-gaap:GrossProfit
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_gpdsEuuXrEC3WcbxUxenrw_5_4"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">263148000</us-gaap:GrossProfit>
    <us-gaap:GrossProfit
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_kIjhpc8Hm0Kuy7sUPncWwg_5_7"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">242274000</us-gaap:GrossProfit>
    <us-gaap:GrossProfit
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_7W3rsGFvJEq0aP6TCmJWhA_5_10"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">194300000</us-gaap:GrossProfit>
    <us-gaap:ResearchAndDevelopmentExpense
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_9TmEQM9d0UaXaUJyX97B5Q_7_4"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">103565000</us-gaap:ResearchAndDevelopmentExpense>
    <us-gaap:ResearchAndDevelopmentExpense
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_iRhmuowoOEyhQJ02z6ocyQ_7_7"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">88680000</us-gaap:ResearchAndDevelopmentExpense>
    <us-gaap:ResearchAndDevelopmentExpense
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_ZTwNefcZVUiHI1oCAQCL6Q_7_10"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">78994000</us-gaap:ResearchAndDevelopmentExpense>
    <us-gaap:SellingGeneralAndAdministrativeExpense
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_j3UfeKTcbEWfgr9j06hR9g_8_4"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">88952000</us-gaap:SellingGeneralAndAdministrativeExpense>
    <us-gaap:SellingGeneralAndAdministrativeExpense
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_dMK6wy0PPUucMSbWeTUKDw_8_7"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">84536000</us-gaap:SellingGeneralAndAdministrativeExpense>
    <us-gaap:SellingGeneralAndAdministrativeExpense
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_v7rZOrnx2EisM-tlxDeGfw_8_10"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">76251000</us-gaap:SellingGeneralAndAdministrativeExpense>
    <us-gaap:AmortizationOfIntangibleAssets
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_omP5jAQGrEWQyUGTv3JtyA_9_4"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">10018000</us-gaap:AmortizationOfIntangibleAssets>
    <us-gaap:AmortizationOfIntangibleAssets
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_OAScWGdTg0KGjJigK-7cdA_9_7"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">12280000</us-gaap:AmortizationOfIntangibleAssets>
    <us-gaap:AmortizationOfIntangibleAssets
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_dnS2grQFy02_c_zlZZin5w_9_10"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">15333000</us-gaap:AmortizationOfIntangibleAssets>
    <us-gaap:RestructuringCharges
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_ei1rOBh6Kk-ooRQ0Byvf9g_10_10"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">1097000</us-gaap:RestructuringCharges>
    <us-gaap:AssetImpairmentCharges
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_pRHrxMzm8kiwX67VTfmLZQ_11_10"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">281000</us-gaap:AssetImpairmentCharges>
    <us-gaap:OtherOperatingIncomeExpenseNet
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_43KX_Y9TcEibJIkNyeWg-g_12_4"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-317000</us-gaap:OtherOperatingIncomeExpenseNet>
    <us-gaap:OtherOperatingIncomeExpenseNet
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_UM72Mq9AiUm6BZgWA7dc0A_12_7"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-68000</us-gaap:OtherOperatingIncomeExpenseNet>
    <us-gaap:OtherOperatingIncomeExpenseNet
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_2QIz5wRykkeoIws0348T2A_12_10"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">221000</us-gaap:OtherOperatingIncomeExpenseNet>
    <us-gaap:OperatingExpenses
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_qCyj3-gyGEyVu5y957yQ2A_13_4"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">202852000</us-gaap:OperatingExpenses>
    <us-gaap:OperatingExpenses
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_n1bNP1_lL0Svr30UBrVrdQ_13_7"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">185564000</us-gaap:OperatingExpenses>
    <us-gaap:OperatingExpenses
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_PLPi6VrfQE-rKm05TzuZlg_13_10"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">171735000</us-gaap:OperatingExpenses>
    <us-gaap:OperatingIncomeLoss
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_UfKr5JkXIUGzihpVez0IQw_14_4"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">60296000</us-gaap:OperatingIncomeLoss>
    <us-gaap:OperatingIncomeLoss
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_mn_orAb_c0mIRBJJMYKfEg_14_7"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">56710000</us-gaap:OperatingIncomeLoss>
    <us-gaap:OperatingIncomeLoss
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_Z2OpwO9UxEWoUbvbD7Z-9Q_14_10"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">22565000</us-gaap:OperatingIncomeLoss>
    <us-gaap:InvestmentIncomeInterest
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_ZvB_Ax4ae06jxQfVJblCmQ_15_4"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">2199000</us-gaap:InvestmentIncomeInterest>
    <us-gaap:InvestmentIncomeInterest
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_D_UDnJpyl023NVSCAu_OZw_15_7"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">2340000</us-gaap:InvestmentIncomeInterest>
    <us-gaap:InvestmentIncomeInterest
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_lOcIji5iU0adA6yNk4SW_w_15_10"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">1551000</us-gaap:InvestmentIncomeInterest>
    <us-gaap:InterestExpense
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_7EoC8WHvLkmWBzpctRrDdQ_16_4"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">11510000</us-gaap:InterestExpense>
    <us-gaap:InterestExpense
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_DxH37CwwU0-gAIABgmxZsg_16_7"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">28360000</us-gaap:InterestExpense>
    <us-gaap:InterestExpense
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_v7jFnO4qB0ySOHVDfSx14w_16_10"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">24739000</us-gaap:InterestExpense>
    <us-gaap:OtherNonoperatingIncomeExpense
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_msSLhGNwC0aWBwzYDD7H_Q_17_7"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-5010000</us-gaap:OtherNonoperatingIncomeExpense>
    <us-gaap:OtherNonoperatingIncomeExpense
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_ZyMk4xrLj0Gyk-k8L4Vb0Q_17_10"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-7841000</us-gaap:OtherNonoperatingIncomeExpense>
    <us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_YKZ2eQh_KkicgF8FLjVm1g_18_4"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">50985000</us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest>
    <us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_ssj5iTNkOEynt5mt2sFbVA_18_7"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">25680000</us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest>
    <us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_dG1Gxosv7UOJuMgH1qYluw_18_10"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-8464000</us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest>
    <us-gaap:IncomeTaxExpenseBenefit
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_xCpcM5uB1k2p9hEBJ1JtkA_19_4"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-115957000</us-gaap:IncomeTaxExpenseBenefit>
    <us-gaap:IncomeTaxExpenseBenefit
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_q89TnMu83kmGOSps2j9XsQ_19_7"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-358000</us-gaap:IncomeTaxExpenseBenefit>
    <us-gaap:IncomeTaxExpenseBenefit
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_sYyXlzf_XkKTu_8qx9v77Q_19_10"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-73000</us-gaap:IncomeTaxExpenseBenefit>
    <us-gaap:NetIncomeLoss
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_rXpbYdrnMk28ya1MoUCYjg_20_4"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">166942000</us-gaap:NetIncomeLoss>
    <us-gaap:NetIncomeLoss
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_MgVyPYqW20Wc79IlGCHHqw_20_7"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">26038000</us-gaap:NetIncomeLoss>
    <us-gaap:NetIncomeLoss
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_2BFqpqni0Empt5hik7biaQ_20_10"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-8391000</us-gaap:NetIncomeLoss>
    <us-gaap:EarningsPerShareBasic
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="2"
      id="Tc_B9retRyK8kqJhFGKStNuZg_23_4"
      unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg">3.35</us-gaap:EarningsPerShareBasic>
    <us-gaap:EarningsPerShareBasic
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="2"
      id="Tc_r7Hf75Jez02gUpw26P7Vlw_23_7"
      unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg">0.53</us-gaap:EarningsPerShareBasic>
    <us-gaap:EarningsPerShareBasic
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="2"
      id="Tc_KNrMFq83xkSx_kz9F4anKQ_23_10"
      unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg">-0.17</us-gaap:EarningsPerShareBasic>
    <us-gaap:EarningsPerShareDiluted
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="2"
      id="Tc_W6nWqGT3TE-1wsGU-aQluw_24_4"
      unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg">2.71</us-gaap:EarningsPerShareDiluted>
    <us-gaap:EarningsPerShareDiluted
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="2"
      id="Tc_MEC-COUA9E-khBoOqK5R-Q_24_7"
      unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg">0.49</us-gaap:EarningsPerShareDiluted>
    <us-gaap:EarningsPerShareDiluted
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="2"
      id="Tc_qtpSbqEGl06JRju5z1C4wA_24_10"
      unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg">-0.17</us-gaap:EarningsPerShareDiluted>
    <us-gaap:WeightedAverageNumberOfSharesOutstandingBasic
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_qF02g65knUy_VJsPPYihqQ_27_4"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">49906000</us-gaap:WeightedAverageNumberOfSharesOutstandingBasic>
    <us-gaap:WeightedAverageNumberOfSharesOutstandingBasic
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_OMs-ErZ1H0mnUuTblj5_HA_27_7"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">49073000</us-gaap:WeightedAverageNumberOfSharesOutstandingBasic>
    <us-gaap:WeightedAverageNumberOfSharesOutstandingBasic
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_yD5-MVoncEWOW67pz7tM7A_27_10"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">48362000</us-gaap:WeightedAverageNumberOfSharesOutstandingBasic>
    <us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_3yA5nEadqk-0mHbHViSkaQ_28_4"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">65607000</us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding>
    <us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_4EUH7brcHEK5leGWp94GDA_28_7"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">53643000</us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding>
    <us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_7d_mcvhWdUymN4IywBqwwg_28_10"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">48362000</us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding>
    <us-gaap:NetIncomeLoss
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_QQwy1wr-h0ynwJswgT5ABw_3_4"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">166942000</us-gaap:NetIncomeLoss>
    <us-gaap:NetIncomeLoss
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_38539_WInkOXgrvw-wvK4A_3_7"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">26038000</us-gaap:NetIncomeLoss>
    <us-gaap:NetIncomeLoss
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_ocre_a3ojU6a9lUemvVHng_3_10"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-8391000</us-gaap:NetIncomeLoss>
    <us-gaap:OtherComprehensiveIncomeUnrealizedHoldingGainLossOnSecuritiesArisingDuringPeriodNetOfTax
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_rfo_-sYzo0WKu993zmEDdA_6_4"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-514000</us-gaap:OtherComprehensiveIncomeUnrealizedHoldingGainLossOnSecuritiesArisingDuringPeriodNetOfTax>
    <us-gaap:OtherComprehensiveIncomeUnrealizedHoldingGainLossOnSecuritiesArisingDuringPeriodNetOfTax
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_0ZstLTRMDE-8HpOfE7uZbg_6_7"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-311000</us-gaap:OtherComprehensiveIncomeUnrealizedHoldingGainLossOnSecuritiesArisingDuringPeriodNetOfTax>
    <us-gaap:OtherComprehensiveIncomeUnrealizedHoldingGainLossOnSecuritiesArisingDuringPeriodNetOfTax
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_lcNrTbGmrU2OYPbfI3sBPQ_6_10"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-53000</us-gaap:OtherComprehensiveIncomeUnrealizedHoldingGainLossOnSecuritiesArisingDuringPeriodNetOfTax>
    <us-gaap:OtherComprehensiveIncomeAvailableforsaleSecuritiesAdjustmentNetOfTaxPortionAttributableToParent
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_2VDVu0KoeEmv_rdNF0cy8Q_7_4"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-514000</us-gaap:OtherComprehensiveIncomeAvailableforsaleSecuritiesAdjustmentNetOfTaxPortionAttributableToParent>
    <us-gaap:OtherComprehensiveIncomeAvailableforsaleSecuritiesAdjustmentNetOfTaxPortionAttributableToParent
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_DCQniDJSqk-RuKRQgcVGTg_7_7"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-311000</us-gaap:OtherComprehensiveIncomeAvailableforsaleSecuritiesAdjustmentNetOfTaxPortionAttributableToParent>
    <us-gaap:OtherComprehensiveIncomeAvailableforsaleSecuritiesAdjustmentNetOfTaxPortionAttributableToParent
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_A4f3xg8JT0e0Wx1WhKxXrA_7_10"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-53000</us-gaap:OtherComprehensiveIncomeAvailableforsaleSecuritiesAdjustmentNetOfTaxPortionAttributableToParent>
    <us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationGainLossArisingDuringPeriodNetOfTax
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_o0cMErfrEkOgxsKPkhlPMA_9_4"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-41000</us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationGainLossArisingDuringPeriodNetOfTax>
    <us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationGainLossArisingDuringPeriodNetOfTax
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_x9zm3-L4U06a9noOjhemMw_9_7"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-52000</us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationGainLossArisingDuringPeriodNetOfTax>
    <us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationGainLossArisingDuringPeriodNetOfTax
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_KS9mL5kCikeDMiofbc3dkw_9_10"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">5000</us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationGainLossArisingDuringPeriodNetOfTax>
    <us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_pwiVhFKGEEKXyo4V5WNy5g_10_4"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-41000</us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent>
    <us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_fhlZBDv5akO-U4u2qQhXig_10_7"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-52000</us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent>
    <us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_Nr00zFhJZk6ozbVfpVzUzA_10_10"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">5000</us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent>
    <us-gaap:OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_r0IcWSbScUCziSWGOtL3gQ_12_4"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-555000</us-gaap:OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent>
    <us-gaap:OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_TXMQMwSmp06K78GqiCsO2g_12_7"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-363000</us-gaap:OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent>
    <us-gaap:OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_Bx4z-35akk6sXCf7fIioCA_12_10"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-48000</us-gaap:OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent>
    <us-gaap:ComprehensiveIncomeNetOfTax
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_onUymihwb0eJh6OBtyhVAw_14_4"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">166387000</us-gaap:ComprehensiveIncomeNetOfTax>
    <us-gaap:ComprehensiveIncomeNetOfTax
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_xnAXwYFNKkulF89XccIYyw_14_7"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">25675000</us-gaap:ComprehensiveIncomeNetOfTax>
    <us-gaap:ComprehensiveIncomeNetOfTax
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_aD7Lb4qn6UayvNFq0TZzeQ_14_10"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-8439000</us-gaap:ComprehensiveIncomeNetOfTax>
    <us-gaap:SharesOutstanding
      contextRef="As_Of_12_31_2019_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_FsmAawc2DEOmzDOqP6upWw"
      decimals="-3"
      id="Tc_aenQfPgX10yTPpOaExoCQw_5_2"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">48994000</us-gaap:SharesOutstanding>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_12_31_2019_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_FsmAawc2DEOmzDOqP6upWw"
      decimals="-3"
      id="Tc_P8u0_4J9pkGKCN4-czFZbg_5_5"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">490000</us-gaap:StockholdersEquity>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_12_31_2019_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_hM4dV8KvL0uccrphKnYC9g"
      decimals="-3"
      id="Tc_HCuemZ1haUCpxEGz4yLM8g_5_8"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">1071058000</us-gaap:StockholdersEquity>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_12_31_2019_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_xa9r4bxjU0e7LxknEMtNmw"
      decimals="-3"
      id="Tc_9ZCq-fgmEEieaRh956FP3w_5_11"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-698930000</us-gaap:StockholdersEquity>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_12_31_2019_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_ZFKrEu3jd0CjuFXPNSSC8w"
      decimals="-3"
      id="Tc_itENZDA_5U6bn8i-74qF8g_5_14"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">1894000</us-gaap:StockholdersEquity>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_12_31_2019_dyqJ8hTIuEW6V2L_RveF0A"
      decimals="-3"
      id="Tc_O4wONq1eBUGEIboub078-g_5_17"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">374512000</us-gaap:StockholdersEquity>
    <us-gaap:NetIncomeLoss
      contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_JAI5BnxJn0yyDx_dSs8J2A"
      decimals="-3"
      id="Tc_Ze2yGhAyL0ejC2I333ZCZw_6_11"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-8391000</us-gaap:NetIncomeLoss>
    <us-gaap:NetIncomeLoss
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_ruhdZqYazkeAy-wg-kEwIw_6_17"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-8391000</us-gaap:NetIncomeLoss>
    <veco:OtherComprehensiveIncomeLossIncludingForeignCurrencyGainsLossesOnTransactionsIncludedInOperatingResultsNetOfTax
      contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_iUgMnC3EVk2SSaJC7ml4hA"
      decimals="-3"
      id="Tc_mCs266vZVkOQtJOQqffnrg_7_14"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-48000</veco:OtherComprehensiveIncomeLossIncludingForeignCurrencyGainsLossesOnTransactionsIncludedInOperatingResultsNetOfTax>
    <veco:OtherComprehensiveIncomeLossIncludingForeignCurrencyGainsLossesOnTransactionsIncludedInOperatingResultsNetOfTax
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_H4mKZW2fREOiL4nNKMWwaQ_7_17"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-48000</veco:OtherComprehensiveIncomeLossIncludingForeignCurrencyGainsLossesOnTransactionsIncludedInOperatingResultsNetOfTax>
    <us-gaap:AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue
      contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_31RxRwAXMUOBUYXDlssrkQ"
      decimals="-3"
      id="Tc_J9miJz_ah06LfktnFk0raA_8_8"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">12703000</us-gaap:AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue>
    <us-gaap:AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_jK4QWPZ0Fkq1BxUDjfQwpA_8_17"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">12703000</us-gaap:AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue>
    <us-gaap:StockIssuedDuringPeriodSharesShareBasedCompensation
      contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_b3_MyPjPJEuMPgmth1uxkg"
      decimals="-3"
      id="Tc_Gm36HFHqk0SWDYOb7XA7CA_9_2"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">730000</us-gaap:StockIssuedDuringPeriodSharesShareBasedCompensation>
    <us-gaap:StockIssuedDuringPeriodValueShareBasedCompensation
      contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_b3_MyPjPJEuMPgmth1uxkg"
      decimals="-3"
      id="Tc_XG0O13CGu0u_lVMATDYdGA_9_5"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">7000</us-gaap:StockIssuedDuringPeriodValueShareBasedCompensation>
    <us-gaap:StockIssuedDuringPeriodValueShareBasedCompensation
      contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_31RxRwAXMUOBUYXDlssrkQ"
      decimals="-3"
      id="Tc_PUvXQU9Uf0ipLv-IeySgMA_9_8"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">549000</us-gaap:StockIssuedDuringPeriodValueShareBasedCompensation>
    <us-gaap:StockIssuedDuringPeriodValueShareBasedCompensation
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_ffF14QUoMku9N6DgePcvvA_9_17"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">556000</us-gaap:StockIssuedDuringPeriodValueShareBasedCompensation>
    <veco:AdjustmentsToAdditionalPaidInCapitalExtinguishmentEquityComponentOfNotesRepurchased
      contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_31RxRwAXMUOBUYXDlssrkQ"
      decimals="-3"
      id="Tc_FfltlUIdb0CAjbWDKvKrRA_10_8"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">14714000</veco:AdjustmentsToAdditionalPaidInCapitalExtinguishmentEquityComponentOfNotesRepurchased>
    <veco:AdjustmentsToAdditionalPaidInCapitalExtinguishmentEquityComponentOfNotesRepurchased
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_ovdA2vNfK06l8_DorFsn7A_10_17"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">14714000</veco:AdjustmentsToAdditionalPaidInCapitalExtinguishmentEquityComponentOfNotesRepurchased>
    <us-gaap:AdjustmentsToAdditionalPaidInCapitalEquityComponentOfConvertibleDebt
      contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_8j1zlyr4AU2z9_9awGfNwQ"
      decimals="-3"
      id="Tc_aRgdkj24KEKWLRRhkfMF_A_11_8"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">20706000</us-gaap:AdjustmentsToAdditionalPaidInCapitalEquityComponentOfConvertibleDebt>
    <us-gaap:AdjustmentsToAdditionalPaidInCapitalEquityComponentOfConvertibleDebt
      contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_B52uU2Mlw0iaAElsoUnx3Q"
      decimals="-3"
      id="Tc_Db6dZXA5QE2ls1dG4EydQQ_11_17"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">20706000</us-gaap:AdjustmentsToAdditionalPaidInCapitalEquityComponentOfConvertibleDebt>
    <us-gaap:AdjustmentsToAdditionalPaidInCapitalEquityComponentOfConvertibleDebt
      contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_DEAAn-NWvkmZVHFd6j4MOg"
      decimals="-3"
      id="Tc_wxgGA17_TkS3xsoh6yG-UQ_12_8"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">33363000</us-gaap:AdjustmentsToAdditionalPaidInCapitalEquityComponentOfConvertibleDebt>
    <us-gaap:AdjustmentsToAdditionalPaidInCapitalEquityComponentOfConvertibleDebt
      contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_NdHMAvtl7EiuDr6tIOXilw"
      decimals="-3"
      id="Tc_hvx3db7p10a6xkUHRXPI4A_12_17"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">33363000</us-gaap:AdjustmentsToAdditionalPaidInCapitalEquityComponentOfConvertibleDebt>
    <veco:AdjustmentsToAdditionalPaidInCapitalPurchaseOfDerivativeInstrument
      contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_31RxRwAXMUOBUYXDlssrkQ"
      decimals="-3"
      id="Tc_tH01PTd590Ogap7JTJ99Aw_13_8"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">10313000</veco:AdjustmentsToAdditionalPaidInCapitalPurchaseOfDerivativeInstrument>
    <veco:AdjustmentsToAdditionalPaidInCapitalPurchaseOfDerivativeInstrument
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_QUAGn7ICoE2wtN5YNpHyFQ_13_17"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">10313000</veco:AdjustmentsToAdditionalPaidInCapitalPurchaseOfDerivativeInstrument>
    <us-gaap:SharesOutstanding
      contextRef="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_df8hXeatnEeovE4A6pJyuw"
      decimals="-3"
      id="Tc_ipuyhvveiEGBsfb7HGmNag_14_2"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">49724000</us-gaap:SharesOutstanding>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_df8hXeatnEeovE4A6pJyuw"
      decimals="-3"
      id="Tc_c52PBePsfkWkkYSM7zxzWA_14_5"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">497000</us-gaap:StockholdersEquity>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_S2MHmP-MGkydd4GudaNU8w"
      decimals="-3"
      id="Tc_ZPpNz4DvI0imXNdZm79kog_14_8"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">1113352000</us-gaap:StockholdersEquity>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_0x6mjJDzwkeVrCrlQkEmCQ"
      decimals="-3"
      id="Tc_cozyh6If1Uq4pcm62kNkqA_14_11"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-707321000</us-gaap:StockholdersEquity>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_gKPjwCmvOEeoy03lBe0YKg"
      decimals="-3"
      id="Tc_TMfb7yOFeEaYdzFKy533jQ_14_14"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">1846000</us-gaap:StockholdersEquity>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_12_31_2020_JUGLvBeldEeSTj1WqQBVdQ"
      decimals="-3"
      id="Tc_rJtQyV1U1E-xy3jxVzHkbg_14_17"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">408374000</us-gaap:StockholdersEquity>
    <us-gaap:NetIncomeLoss
      contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_NlKiDl7K_kWxshosVGTXvQ"
      decimals="-3"
      id="Tc_GvnF_2D4_UacNIyiCoJk-g_15_11"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">26038000</us-gaap:NetIncomeLoss>
    <us-gaap:NetIncomeLoss
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_oDYSIYAQs06WYu68HAKxRA_15_17"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">26038000</us-gaap:NetIncomeLoss>
    <veco:OtherComprehensiveIncomeLossIncludingForeignCurrencyGainsLossesOnTransactionsIncludedInOperatingResultsNetOfTax
      contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_WIAntBTv5kumJYPuwFnHEA"
      decimals="-3"
      id="Tc_WGwwx5mM7Ui4-bX2IzlOgw_16_14"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-363000</veco:OtherComprehensiveIncomeLossIncludingForeignCurrencyGainsLossesOnTransactionsIncludedInOperatingResultsNetOfTax>
    <veco:OtherComprehensiveIncomeLossIncludingForeignCurrencyGainsLossesOnTransactionsIncludedInOperatingResultsNetOfTax
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_Mbi1ts4wR0awoiTGuQ5jug_16_17"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-363000</veco:OtherComprehensiveIncomeLossIncludingForeignCurrencyGainsLossesOnTransactionsIncludedInOperatingResultsNetOfTax>
    <us-gaap:AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue
      contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_9gz_RG3i3EuWCc_uyao52w"
      decimals="-3"
      id="Tc_0KYl-PmJlkudkLrf_kmhsQ_17_8"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">15249000</us-gaap:AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue>
    <us-gaap:AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_WMDqQWNHHEKkHGJKOmIaJQ_17_17"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">15249000</us-gaap:AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue>
    <us-gaap:StockIssuedDuringPeriodSharesShareBasedCompensation
      contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_EsdRKrqD4k-3NlElNbOJzw"
      decimals="-3"
      id="Tc_upx-W9KNhkKcQhgAGdgRrg_18_2"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">929000</us-gaap:StockIssuedDuringPeriodSharesShareBasedCompensation>
    <us-gaap:StockIssuedDuringPeriodValueShareBasedCompensation
      contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_EsdRKrqD4k-3NlElNbOJzw"
      decimals="-3"
      id="Tc_zTIDk4kInUmlFAVuxwvQgQ_18_5"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">10000</us-gaap:StockIssuedDuringPeriodValueShareBasedCompensation>
    <us-gaap:StockIssuedDuringPeriodValueShareBasedCompensation
      contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_9gz_RG3i3EuWCc_uyao52w"
      decimals="-3"
      id="Tc_tJz0wO-LOES3khT6DGD_WQ_18_8"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-5600000</us-gaap:StockIssuedDuringPeriodValueShareBasedCompensation>
    <us-gaap:StockIssuedDuringPeriodValueShareBasedCompensation
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_9gqFPjPwX02segOxEj-yPg_18_17"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-5590000</us-gaap:StockIssuedDuringPeriodValueShareBasedCompensation>
    <veco:AdjustmentsToAdditionalPaidInCapitalExtinguishmentEquityComponentOfNotesRepurchased
      contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_9gz_RG3i3EuWCc_uyao52w"
      decimals="-3"
      id="Tc_kf0KAIdC-0uBss52axgtpg_19_8"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">6080000</veco:AdjustmentsToAdditionalPaidInCapitalExtinguishmentEquityComponentOfNotesRepurchased>
    <veco:AdjustmentsToAdditionalPaidInCapitalExtinguishmentEquityComponentOfNotesRepurchased
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_9a57zv4mz02sNTsziIFlkQ_19_17"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">6080000</veco:AdjustmentsToAdditionalPaidInCapitalExtinguishmentEquityComponentOfNotesRepurchased>
    <us-gaap:SharesOutstanding
      contextRef="As_Of_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_d0Nvoz2UTkSF8oUdDQFNnA"
      decimals="-3"
      id="Tc_xCNJyQrhdkaoB_FF2iJ-VA_20_2"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">50653000</us-gaap:SharesOutstanding>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_d0Nvoz2UTkSF8oUdDQFNnA"
      decimals="-3"
      id="Tc_ZSKU3pcQi0OFgWi86YzMzA_20_5"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">507000</us-gaap:StockholdersEquity>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_R2aUd4k_kkmjiEC4UStAuQ"
      decimals="-3"
      id="Tc_DOhD73E_p0OGkSGizjVSVg_20_8"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">1116921000</us-gaap:StockholdersEquity>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_AAuYcTUfMEqGriZQdvFnlA"
      decimals="-3"
      id="Tc_jRbs2HXyAkq4MP21ZKD4Fw_20_11"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-681283000</us-gaap:StockholdersEquity>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_XMi8hyEBWUaztLhyei_Ajw"
      decimals="-3"
      id="Tc_XEamWbU8Y0SNyzIlSMp-CQ_20_14"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">1483000</us-gaap:StockholdersEquity>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_o2lGsU3_KEq1cJsKwbgJ2g_20_17"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">437628000</us-gaap:StockholdersEquity>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_12_31_2021_srt_CumulativeEffectPeriodOfAdoptionAxis_srt_CumulativeEffectPeriodOfAdoptionAdjustmentMember_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_kNjVzlQSg0uzfUcwSQuPow"
      decimals="-3"
      id="Tc_LTqfbOcqhUmzlm9GX3BcHQ_21_8"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-56800000</us-gaap:StockholdersEquity>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_12_31_2021_srt_CumulativeEffectPeriodOfAdoptionAxis_srt_CumulativeEffectPeriodOfAdoptionAdjustmentMember_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_yZM7DSF3z0K-i64XpySzBw"
      decimals="-3"
      id="Tc_R1wgWt1M-UiNR6O_hQm3hA_21_11"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">12540000</us-gaap:StockholdersEquity>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_12_31_2021_srt_CumulativeEffectPeriodOfAdoptionAxis_srt_CumulativeEffectPeriodOfAdoptionAdjustmentMember_olZlxpGXwkeNK-H39adOaQ"
      decimals="-3"
      id="Tc_oync29q3d02UGkxGtfMnPQ_21_17"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-44260000</us-gaap:StockholdersEquity>
    <us-gaap:NetIncomeLoss
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_-AC2PNT3C02sUwYL2KHt_A"
      decimals="-3"
      id="Tc_IgwXHUZcTEuVOkHDNtiJlQ_22_11"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">166942000</us-gaap:NetIncomeLoss>
    <us-gaap:NetIncomeLoss
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_uxXrp1KkUkq9_tknuUvi0Q_22_17"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">166942000</us-gaap:NetIncomeLoss>
    <veco:OtherComprehensiveIncomeLossIncludingForeignCurrencyGainsLossesOnTransactionsIncludedInOperatingResultsNetOfTax
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_6zlsan7E70SaZfNDKUZFwQ"
      decimals="-3"
      id="Tc_KWIIyyUwFEityTlM0VK0qg_23_14"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-555000</veco:OtherComprehensiveIncomeLossIncludingForeignCurrencyGainsLossesOnTransactionsIncludedInOperatingResultsNetOfTax>
    <veco:OtherComprehensiveIncomeLossIncludingForeignCurrencyGainsLossesOnTransactionsIncludedInOperatingResultsNetOfTax
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_fWWd5EuDQkWl2haH7G0vmg_23_17"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-555000</veco:OtherComprehensiveIncomeLossIncludingForeignCurrencyGainsLossesOnTransactionsIncludedInOperatingResultsNetOfTax>
    <us-gaap:AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_QZRsqkKY70-vQJ-kuKgfnA"
      decimals="-3"
      id="Tc_V9s7AgrIaUaj-6FsGBsPIg_24_8"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">22994000</us-gaap:AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue>
    <us-gaap:AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_II9-Ue7Zl0SQ7H9pvqbOng_24_17"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">22994000</us-gaap:AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue>
    <us-gaap:StockIssuedDuringPeriodSharesShareBasedCompensation
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_lH4wNtbzakqPcd6ckinJqQ"
      decimals="-3"
      id="Tc_f4qsQvQuW0GlOOLmGEUR7g_25_2"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">1007000</us-gaap:StockIssuedDuringPeriodSharesShareBasedCompensation>
    <us-gaap:StockIssuedDuringPeriodValueShareBasedCompensation
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_lH4wNtbzakqPcd6ckinJqQ"
      decimals="-3"
      id="Tc_dEA8ZltwkU2W3r8R1BUnbA_25_5"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">10000</us-gaap:StockIssuedDuringPeriodValueShareBasedCompensation>
    <us-gaap:StockIssuedDuringPeriodValueShareBasedCompensation
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_QZRsqkKY70-vQJ-kuKgfnA"
      decimals="-3"
      id="Tc_AYu7OXmsU0yJgTEM1zD2EQ_25_8"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-4935000</us-gaap:StockIssuedDuringPeriodValueShareBasedCompensation>
    <us-gaap:StockIssuedDuringPeriodValueShareBasedCompensation
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_1sE9EWeayES75nN4SF4fDQ_25_17"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-4925000</us-gaap:StockIssuedDuringPeriodValueShareBasedCompensation>
    <us-gaap:SharesOutstanding
      contextRef="As_Of_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_PCxiZFdafEavDRCUIhislQ"
      decimals="-3"
      id="Tc_Bb83UlSYn0-jSwZUyDRrnQ_26_2"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">51660000</us-gaap:SharesOutstanding>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_PCxiZFdafEavDRCUIhislQ"
      decimals="-3"
      id="Tc_crQPJny5WkOjzc5n9R8gwg_26_5"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">517000</us-gaap:StockholdersEquity>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_c49gXsTVI0-hQUvNBpS1BA"
      decimals="-3"
      id="Tc_IEDQqLcmW06HcWVSknShuQ_26_8"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">1078180000</us-gaap:StockholdersEquity>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_AjFsWLZVwUSPAFzzrfVXXA"
      decimals="-3"
      id="Tc_lct2Zb5CR0OyGgCsVB1R4Q_26_11"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-501801000</us-gaap:StockholdersEquity>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_W3Ea7PTEU0qeOccl5h-Srw"
      decimals="-3"
      id="Tc_ctrRXx-IJEy08lJfxQ3Tkw_26_14"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">928000</us-gaap:StockholdersEquity>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_Mf43BxEaXkq81nj9usHXYA_26_17"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">577824000</us-gaap:StockholdersEquity>
    <us-gaap:ProfitLoss
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_JBVatNrvsUmAw8XhvOUdkg_4_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">166942000</us-gaap:ProfitLoss>
    <us-gaap:ProfitLoss
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_YA7daoiHak-7rWEQaAVUSQ_4_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">26038000</us-gaap:ProfitLoss>
    <us-gaap:ProfitLoss
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_qDS3K-35OEqjJknyGxLjqw_4_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-8391000</us-gaap:ProfitLoss>
    <us-gaap:DepreciationDepletionAndAmortization
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_EHoaBPgEYE-DgxbmS8v0Qw_6_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">25645000</us-gaap:DepreciationDepletionAndAmortization>
    <us-gaap:DepreciationDepletionAndAmortization
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_Na5TuCwinEC84Phx7uDVnw_6_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">26058000</us-gaap:DepreciationDepletionAndAmortization>
    <us-gaap:DepreciationDepletionAndAmortization
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_xn6E-EPRiEqMiCB05W4i6g_6_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">30697000</us-gaap:DepreciationDepletionAndAmortization>
    <us-gaap:AmortizationOfFinancingCostsAndDiscounts
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_US58gnt09Uqh9mEkiRZVbg_7_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">962000</us-gaap:AmortizationOfFinancingCostsAndDiscounts>
    <us-gaap:AmortizationOfFinancingCostsAndDiscounts
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_r2ZGqYqcyUOyw-k3iZcDvg_7_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">13819000</us-gaap:AmortizationOfFinancingCostsAndDiscounts>
    <us-gaap:AmortizationOfFinancingCostsAndDiscounts
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_mCd0dwkRWEKqpesU-lMXdg_7_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">13792000</us-gaap:AmortizationOfFinancingCostsAndDiscounts>
    <us-gaap:DeferredIncomeTaxExpenseBenefit
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_LL9_1wHWR0uaeirzH5H-Ng_8_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-118040000</us-gaap:DeferredIncomeTaxExpenseBenefit>
    <us-gaap:DeferredIncomeTaxExpenseBenefit
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_1n4utm6wP0ii3zxn3hpyBg_8_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-651000</us-gaap:DeferredIncomeTaxExpenseBenefit>
    <us-gaap:DeferredIncomeTaxExpenseBenefit
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_xlGAVTsvq0uaalWTK4r-hg_8_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-299000</us-gaap:DeferredIncomeTaxExpenseBenefit>
    <us-gaap:ShareBasedCompensation
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_BrYTISq7MkWHJ8ifliWtNQ_9_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">22994000</us-gaap:ShareBasedCompensation>
    <us-gaap:ShareBasedCompensation
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_3cwhfhm5gEad5UOgOnJuRw_9_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">15249000</us-gaap:ShareBasedCompensation>
    <us-gaap:ShareBasedCompensation
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_x5H5RIKwQ02B4diEdjnbQw_9_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">12703000</us-gaap:ShareBasedCompensation>
    <us-gaap:GainsLossesOnExtinguishmentOfDebt
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_GzOUCAQDxE24jKq5VBEhfw_10_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-4029000</us-gaap:GainsLossesOnExtinguishmentOfDebt>
    <us-gaap:GainsLossesOnExtinguishmentOfDebt
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_A09BIovhh0-RibryTAdMtw_10_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-7841000</us-gaap:GainsLossesOnExtinguishmentOfDebt>
    <us-gaap:AssetImpairmentCharges
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_SirzM4Ii9Ea6Z7aIo9mOtw_11_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">281000</us-gaap:AssetImpairmentCharges>
    <veco:ImpairmentLossesInvestmentsNonCash
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_HbZPknHx90Kz68uz7s77Qg_12_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">980000</veco:ImpairmentLossesInvestmentsNonCash>
    <us-gaap:ProvisionForDoubtfulAccounts
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_Gg8Ifce2lEmVq-gV41vYNA_13_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">140000</us-gaap:ProvisionForDoubtfulAccounts>
    <veco:IncreaseDecreaseInAccountsReceivableAndContractAssets
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_hlom21610E6KrRGG8i1l6w_15_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">12826000</veco:IncreaseDecreaseInAccountsReceivableAndContractAssets>
    <veco:IncreaseDecreaseInAccountsReceivableAndContractAssets
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_7dUy7vlk_0WvINDIbs3j0g_15_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">26664000</veco:IncreaseDecreaseInAccountsReceivableAndContractAssets>
    <veco:IncreaseDecreaseInAccountsReceivableAndContractAssets
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_-No4RtsCQUmPZBlFiDG1Aw_15_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">30361000</veco:IncreaseDecreaseInAccountsReceivableAndContractAssets>
    <us-gaap:IncreaseDecreaseInInventories
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_n_sBUxM2eUKy1bPJoqi_ag_16_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">37288000</us-gaap:IncreaseDecreaseInInventories>
    <us-gaap:IncreaseDecreaseInInventories
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_3V3AljZGaEegQc9tv1Hwig_16_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">24803000</us-gaap:IncreaseDecreaseInInventories>
    <us-gaap:IncreaseDecreaseInInventories
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_WDGP9eaJi0iNCcDPyHXI7g_16_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">11528000</us-gaap:IncreaseDecreaseInInventories>
    <us-gaap:IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_AKT37xpZW0qzhA5HhZIWZg_17_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-7668000</us-gaap:IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets>
    <us-gaap:IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_4FSwbq7-xEeI2fEo1arOJA_17_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-7621000</us-gaap:IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets>
    <us-gaap:IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_d4ueYSsiqECeJSOEm74Mkg_17_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">2610000</us-gaap:IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets>
    <us-gaap:IncreaseDecreaseInAccountsPayableAndAccruedLiabilities
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_VIZG1OHaSEKdMJ05EokDoA_18_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-13115000</us-gaap:IncreaseDecreaseInAccountsPayableAndAccruedLiabilities>
    <us-gaap:IncreaseDecreaseInAccountsPayableAndAccruedLiabilities
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_W9DOQLKH4EOfophHE947-w_18_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">20225000</us-gaap:IncreaseDecreaseInAccountsPayableAndAccruedLiabilities>
    <us-gaap:IncreaseDecreaseInAccountsPayableAndAccruedLiabilities
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_WbbNy2ovQ0-DuE09z_iLRg_18_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">15959000</us-gaap:IncreaseDecreaseInAccountsPayableAndAccruedLiabilities>
    <veco:IncreaseDecreaseInCustomerDepositsAndDeferredRevenue
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_SXD7z9fs-0656JImxo70zw_19_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">64087000</veco:IncreaseDecreaseInCustomerDepositsAndDeferredRevenue>
    <veco:IncreaseDecreaseInCustomerDepositsAndDeferredRevenue
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_1wOgB4ZOq0m1wpO0sJ9lJg_19_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-4099000</veco:IncreaseDecreaseInCustomerDepositsAndDeferredRevenue>
    <veco:IncreaseDecreaseInCustomerDepositsAndDeferredRevenue
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_myDBYtJIkUaV196LSxXdkA_19_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">12424000</veco:IncreaseDecreaseInCustomerDepositsAndDeferredRevenue>
    <us-gaap:IncreaseDecreaseInIncomeTaxesPayableNetOfIncomeTaxesReceivable
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_Aerhuiz2vU-d-cN9h2rStw_20_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">557000</us-gaap:IncreaseDecreaseInIncomeTaxesPayableNetOfIncomeTaxesReceivable>
    <us-gaap:IncreaseDecreaseInIncomeTaxesPayableNetOfIncomeTaxesReceivable
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_IyiCZwvMrESXLZYgQJQU1A_20_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">947000</us-gaap:IncreaseDecreaseInIncomeTaxesPayableNetOfIncomeTaxesReceivable>
    <us-gaap:IncreaseDecreaseInIncomeTaxesPayableNetOfIncomeTaxesReceivable
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_GTR_-cZFXU2e1OMQAYd-Lg_20_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">86000</us-gaap:IncreaseDecreaseInIncomeTaxesPayableNetOfIncomeTaxesReceivable>
    <us-gaap:IncreaseDecreaseInOtherOperatingCapitalNet
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_Cg7niJZnOE-Z6Jf8-6ZAig_21_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-897000</us-gaap:IncreaseDecreaseInOtherOperatingCapitalNet>
    <us-gaap:IncreaseDecreaseInOtherOperatingCapitalNet
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_ILXrjT7Umk-r8QrzwuQ5rw_21_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-8993000</us-gaap:IncreaseDecreaseInOtherOperatingCapitalNet>
    <us-gaap:IncreaseDecreaseInOtherOperatingCapitalNet
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_lc3t-60wiUC4FujW8fWqeQ_21_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-2287000</us-gaap:IncreaseDecreaseInOtherOperatingCapitalNet>
    <us-gaap:NetCashProvidedByUsedInOperatingActivities
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_XRIpErDVd0C4L98U9Kvr2g_22_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">108483000</us-gaap:NetCashProvidedByUsedInOperatingActivities>
    <us-gaap:NetCashProvidedByUsedInOperatingActivities
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_bjR0E-6G9UOfjc2O0NhJYQ_22_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">67742000</us-gaap:NetCashProvidedByUsedInOperatingActivities>
    <us-gaap:NetCashProvidedByUsedInOperatingActivities
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_ZMZahfl3OUy8zu_F0XM1Wg_22_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">43021000</us-gaap:NetCashProvidedByUsedInOperatingActivities>
    <us-gaap:PaymentsToAcquirePropertyPlantAndEquipment
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_wLef7Rad7UmbQQDiQB8KEw_25_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">24604000</us-gaap:PaymentsToAcquirePropertyPlantAndEquipment>
    <us-gaap:PaymentsToAcquirePropertyPlantAndEquipment
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_IRUbS3N5OEa3Mc-7U0tSNQ_25_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">40643000</us-gaap:PaymentsToAcquirePropertyPlantAndEquipment>
    <us-gaap:PaymentsToAcquirePropertyPlantAndEquipment
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_h8ZWy8MbkEeP5d_kKKqO_Q_25_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">6802000</us-gaap:PaymentsToAcquirePropertyPlantAndEquipment>
    <us-gaap:ProceedsFromSaleAndMaturityOfAvailableForSaleSecurities
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_pyjDqmbVEE6EuDG3w4UQCQ_26_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">59738000</us-gaap:ProceedsFromSaleAndMaturityOfAvailableForSaleSecurities>
    <us-gaap:ProceedsFromSaleAndMaturityOfAvailableForSaleSecurities
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_QLkSqDKJhE287zBPd-PAyg_26_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">330702000</us-gaap:ProceedsFromSaleAndMaturityOfAvailableForSaleSecurities>
    <us-gaap:ProceedsFromSaleAndMaturityOfAvailableForSaleSecurities
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_bR2KyjXrYUuhaWPk85p3AQ_26_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">173530000</us-gaap:ProceedsFromSaleAndMaturityOfAvailableForSaleSecurities>
    <us-gaap:PaymentsToAcquireAvailableForSaleSecuritiesDebt
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_sXQAXCFbaUyNJzpGXZU8og_27_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">104014000</us-gaap:PaymentsToAcquireAvailableForSaleSecuritiesDebt>
    <us-gaap:PaymentsToAcquireAvailableForSaleSecuritiesDebt
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_m__YC2Y_3USN8W7Gu8XCow_27_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">247256000</us-gaap:PaymentsToAcquireAvailableForSaleSecuritiesDebt>
    <us-gaap:PaymentsToAcquireAvailableForSaleSecuritiesDebt
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_GaCnSIVXaket71ouppToNQ_27_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">248023000</us-gaap:PaymentsToAcquireAvailableForSaleSecuritiesDebt>
    <us-gaap:ProceedsFromSaleOfPropertyPlantAndEquipment
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_HfuNyT3CP0irDemtiXpzkg_28_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">1725000</us-gaap:ProceedsFromSaleOfPropertyPlantAndEquipment>
    <us-gaap:ProceedsFromSaleOfPropertyPlantAndEquipment
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_Lor-6twi1UGWmGCBZETxQg_28_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">9503000</us-gaap:ProceedsFromSaleOfPropertyPlantAndEquipment>
    <us-gaap:NetCashProvidedByUsedInInvestingActivities
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_e5mjTK9cPUCDPyqHStGLUA_29_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-68880000</us-gaap:NetCashProvidedByUsedInInvestingActivities>
    <us-gaap:NetCashProvidedByUsedInInvestingActivities
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_HKV_jJxf_EOj-8YYRvisgA_29_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">44528000</us-gaap:NetCashProvidedByUsedInInvestingActivities>
    <us-gaap:NetCashProvidedByUsedInInvestingActivities
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_vJJoX7_m-02F7_MayecrZg_29_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-71792000</us-gaap:NetCashProvidedByUsedInInvestingActivities>
    <us-gaap:ProceedsFromConvertibleDebt
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_gyKyp5YDq02OlYlOxci4og_32_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">120095000</us-gaap:ProceedsFromConvertibleDebt>
    <us-gaap:PaymentsForDerivativeInstrumentFinancingActivities
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_xp7iRPKR5UCu1AMGFfwG6A_33_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">10313000</us-gaap:PaymentsForDerivativeInstrumentFinancingActivities>
    <us-gaap:RepaymentsOfUnsecuredDebt
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_n7fo-RfvS0KKY1FnjBlRHQ_34_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">115604000</us-gaap:RepaymentsOfUnsecuredDebt>
    <us-gaap:RepaymentsOfUnsecuredDebt
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_catOzoD4B0O7e1Is0bCOMg_34_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">81240000</us-gaap:RepaymentsOfUnsecuredDebt>
    <us-gaap:PaymentsOfDebtIssuanceCosts
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_9qQw7lcKtUSAeawZC95Nlw_35_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">835000</us-gaap:PaymentsOfDebtIssuanceCosts>
    <us-gaap:ProceedsFromIssuanceOrSaleOfEquity
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_ui4QFiLMYkuSFBmOSPwJeQ_36_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">3698000</us-gaap:ProceedsFromIssuanceOrSaleOfEquity>
    <us-gaap:ProceedsFromIssuanceOrSaleOfEquity
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_Mg1DcUEfrk6B_ZBcQdzkbQ_36_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">3402000</us-gaap:ProceedsFromIssuanceOrSaleOfEquity>
    <us-gaap:ProceedsFromIssuanceOrSaleOfEquity
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_oYLPbIdB8kSuQTkDZM_qIg_36_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">2878000</us-gaap:ProceedsFromIssuanceOrSaleOfEquity>
    <us-gaap:PaymentsRelatedToTaxWithholdingForShareBasedCompensation
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_4HEwar3fI0alZUU4Q2rXgA_37_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">8248000</us-gaap:PaymentsRelatedToTaxWithholdingForShareBasedCompensation>
    <us-gaap:PaymentsRelatedToTaxWithholdingForShareBasedCompensation
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_9IchV-TsgUmH2JWSqSiFVA_37_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">8992000</us-gaap:PaymentsRelatedToTaxWithholdingForShareBasedCompensation>
    <us-gaap:PaymentsRelatedToTaxWithholdingForShareBasedCompensation
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_90e2Q4xeNEGePE5UiJ6MYQ_37_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">2322000</us-gaap:PaymentsRelatedToTaxWithholdingForShareBasedCompensation>
    <us-gaap:NetCashProvidedByUsedInFinancingActivities
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_lz9FG3E6v0abw4BRBR3seg_38_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-4550000</us-gaap:NetCashProvidedByUsedInFinancingActivities>
    <us-gaap:NetCashProvidedByUsedInFinancingActivities
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_Yg6-L44mk0WwXJ7YhjmTfQ_38_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-122029000</us-gaap:NetCashProvidedByUsedInFinancingActivities>
    <us-gaap:NetCashProvidedByUsedInFinancingActivities
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_iyauxQPUTEu1Npd7Pkx2Xg_38_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">29098000</us-gaap:NetCashProvidedByUsedInFinancingActivities>
    <us-gaap:EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_tABMCnNlRk-wgryzXRcBsA_39_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-53000</us-gaap:EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations>
    <us-gaap:EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_6eGwJwMGA0Ggb0S9Sb3rjA_39_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-52000</us-gaap:EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations>
    <us-gaap:EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_mOrtPHU_V0CWHZiNq0AB6A_39_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">5000</us-gaap:EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations>
    <us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_T8k3P50bf06GdV3EaENlMg_40_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">35000000</us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect>
    <us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_6M0gq36YlEaIEl2AM_bcBw_40_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-9811000</us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect>
    <us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_aqhP-jg1tE2dQpM_IBQDcg_40_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">332000</us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect>
    <us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_0X2VKT3MNEyc9zC3F-2Guw_41_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">120472000</us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents>
    <us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents
      contextRef="As_Of_12_31_2020_JUGLvBeldEeSTj1WqQBVdQ"
      decimals="-3"
      id="Tc_OurPsPtmIUqyiyeX6s2yDQ_41_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">130283000</us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents>
    <us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents
      contextRef="As_Of_12_31_2019_dyqJ8hTIuEW6V2L_RveF0A"
      decimals="-3"
      id="Tc_zOqTTpUjo0SNRLLipeooZw_41_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">129951000</us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents>
    <us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_EUDxg7yr_kGWihUlX89jng_42_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">155472000</us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents>
    <us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_rVXm5L-iI0iLrbwK25lpyQ_42_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">120472000</us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents>
    <us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents
      contextRef="As_Of_12_31_2020_JUGLvBeldEeSTj1WqQBVdQ"
      decimals="-3"
      id="Tc_QBJVqWD4_UaeOkPUHHqNzw_42_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">130283000</us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents>
    <us-gaap:InterestPaidNet
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_6Nd3vGBoIkSnbN-WJTSIWA_45_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">10139000</us-gaap:InterestPaidNet>
    <us-gaap:InterestPaidNet
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_mLrlsGuidUSeBmtP4kb-tQ_45_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">12551000</us-gaap:InterestPaidNet>
    <us-gaap:InterestPaidNet
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_8seG9G2ymUCenfvI9v8pVA_45_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">12700000</us-gaap:InterestPaidNet>
    <us-gaap:IncomeTaxesPaidNet
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_s0HPq19luUWKE_fFjewQhQ_46_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">1434000</us-gaap:IncomeTaxesPaidNet>
    <us-gaap:IncomeTaxesPaidNet
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_Xu5FBzCRzUi6plTKbQ61VQ_46_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-139000</us-gaap:IncomeTaxesPaidNet>
    <us-gaap:IncomeTaxesPaidNet
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_sGHvzyUxw0GTJrYQ7xO6rA_46_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">329000</us-gaap:IncomeTaxesPaidNet>
    <us-gaap:CapitalExpendituresIncurredButNotYetPaid
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_ZMOZAmoRY0mY0H27OtvzyQ_48_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">2285000</us-gaap:CapitalExpendituresIncurredButNotYetPaid>
    <us-gaap:CapitalExpendituresIncurredButNotYetPaid
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_KMh9-PpynkyC0ptTG2u-Zw_48_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">9096000</us-gaap:CapitalExpendituresIncurredButNotYetPaid>
    <us-gaap:CapitalExpendituresIncurredButNotYetPaid
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_tjAbRN0GvkaYBJDdEGVzkw_48_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">687000</us-gaap:CapitalExpendituresIncurredButNotYetPaid>
    <veco:TransferFromInventories
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_IxyVKra7UE-OoI4U_JzGBw_49_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">1235000</veco:TransferFromInventories>
    <veco:TransferFromInventories
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc__XnfF4xK1kOgEY94A1S5Ug_49_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-63000</veco:TransferFromInventories>
    <veco:TransferFromInventories
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_2rhHrGUAI0i-t-vZ6yuItg_49_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-1624000</veco:TransferFromInventories>
    <us-gaap:RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_lCeDWhRaRUCgWgR__IgqLw_50_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">2938000</us-gaap:RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability>
    <us-gaap:RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_C2ssZjkCHkKPB1e9VroAlw_50_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">23777000</us-gaap:RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability>
    <us-gaap:RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_Z48Xkgm1Q0Cscn5GpA-11g_50_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">1741000</us-gaap:RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability>
    <us-gaap:OrganizationConsolidationBasisOfPresentationBusinessDescriptionAndAccountingPoliciesTextBlock
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tb_5PVCQs_i1EyV_1wkOc5PVQ">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Note 1 &#x2014; Significant Accounting Policies&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(a) Description of Business&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;"&gt;Veeco Instruments Inc. (together with its consolidated subsidiaries, &#x201c;Veeco,&#x201d; or the &#x201c;Company&#x201d;) operates in a &lt;/span&gt;&lt;span style="-sec-ix-hidden:Hidden_Q4WTJDpvMEebo8fh1Cmpvw;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;single&lt;/span&gt;&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; segment: the development, manufacture, sales, and support of semiconductor and thin film process equipment primarily sold to make electronic devices.&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(b) Basis of Presentation&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;"&gt;The accompanying audited Consolidated Financial Statements of the Company have been prepared in accordance with United States generally accepted accounting principles (&#x201c;GAAP&#x201d;). The Company reports interim quarters on a &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;13&lt;/span&gt;&lt;span style="font-size:10pt;"&gt;-week basis ending on the last Sunday of each period, which is determined at the start of each year. The Company&#x2019;s fourth quarter always ends on the last day of the calendar year, December 31. During 2022 the interim quarters ended on April 3, July 3, and October 2, and during 2021 the interim quarters ended on April 4, July 4, and October 3. The Company reports these interim quarters as March 31, June 30, and September 30 in its interim consolidated financial statements.&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(c) Use of Estimates&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The preparation of financial statements in conformity with GAAP requires management to make estimates and assumptions that affect the amounts reported in the financial statements and accompanying notes. Although these estimates are based on management&#x2019;s knowledge of current events and actions it may undertake in the future, these estimates may ultimately differ from actual results. Significant items subject to such estimates and assumptions include: (i) stand-alone selling prices for the Company&#x2019;s products and services; (ii) allowances for doubtful accounts; (iii) inventory obsolescence; (iv) the useful lives and expected future cash flows of property, plant, and equipment and identifiable intangible assets; (v) the fair value of the Company&#x2019;s reporting unit and related goodwill; (vi) investment valuations and the valuation of derivatives, deferred tax assets, and assets acquired in business combinations; (vii) the recoverability of long-lived assets; (viii) liabilities for product warranty and legal contingencies; (ix) share-based compensation; (x) lease term and incremental borrowing rates used in determining operating lease assets and liabilities; and (xi) income tax uncertainties.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(d) Principles of Consolidation&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The Consolidated Financial Statements include the accounts of the Company and its subsidiaries. Intercompany balances and transactions have been eliminated in consolidation. Companies acquired during each reporting period are reflected in the results of the Company effective from their respective dates of acquisition through the end of the reporting period.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(e) Foreign Currencies&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Assets and liabilities of the Company&#x2019;s foreign subsidiaries that operate using functional currencies other than the U.S. dollar are translated using the exchange rates in effect at the balance sheet date. Results of operations are translated using monthly average exchange rates. Adjustments arising from the translation of the foreign currency financial statements of the Company&#x2019;s subsidiaries into U.S. dollars, including intercompany transactions of a long-term nature, are reported as currency translation adjustments in &#x201c;Accumulated other comprehensive income&#x201d; in the Consolidated Balance Sheets. Foreign currency transaction gains or losses are included in &#x201c;Other operating expense (income), net&#x201d; in the Consolidated Statements of Operations.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(f) Revenue Recognition&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Revenue is recognized upon the transfer of control of the promised product or service to the customer in an amount that reflects the consideration the Company expects to receive in exchange for such product or service. The Company&#x2019;s contracts with customers generally do not contain variable consideration. In the rare instances where variable consideration is included, the Company estimates the amount of variable consideration and determines what portion of &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;that, if any, has a high probability of significant subsequent revenue reversal, and if so, that amount is excluded from the transaction price. The Company&#x2019;s contracts with customers frequently contain multiple deliverables, such as systems, upgrades, components, spare parts, installation, maintenance, and service plans. Judgment is required to properly identify the performance obligations within a contract and to determine how the revenue should be allocated among the performance obligations. The Company also evaluates whether multiple transactions with the same customer or related parties should be considered part of a single contract based on an assessment of whether the contracts or agreements are negotiated or executed within a short time frame of each other or if there are indicators that the contracts are negotiated in contemplation of one another. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160; &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;When there are separate units of accounting, the Company allocates revenue to each performance obligation on a relative stand-alone selling price basis. The stand-alone selling prices are determined based on the prices at which the Company separately sells the systems, upgrades, components, spare parts, installation, maintenance, and service plans. For items that are not sold separately, the Company estimates stand-alone selling prices generally using an expected cost plus margin approach. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160; &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Most of the Company&#x2019;s revenue is recognized at a point in time when the performance obligation is satisfied. The Company considers many facts when evaluating each of its sales arrangements to determine the timing of revenue recognition, including its contractual obligations and the nature of the customer&#x2019;s post-delivery acceptance provisions. The Company&#x2019;s system sales arrangements, including certain upgrades, generally include field acceptance provisions that may include functional or mechanical test procedures. For many of these arrangements, a customer source inspection of the system is performed in the Company&#x2019;s facility, test data is sent to the customer documenting that the system is functioning to the agreed upon specifications prior to delivery, or other quality assurance testing is performed internally to ensure system functionality prior to shipment. Historically, such source inspection or test data replicates the field acceptance provisions that are performed at the customer&#x2019;s site prior to final acceptance of the system. When the Company objectively demonstrates that the criteria specified in the contractual acceptance provisions are achieved prior to delivery either through customer testing or the Company&#x2019;s historical experience of its tools meeting specifications, transfer of control of the product to the customer is considered to have occurred and revenue is recognized upon system delivery since there is no substantive contingency remaining related to the acceptance provisions at that date. For new products, new applications of existing products, or for products with substantive customer acceptance provisions where the Company cannot objectively demonstrate that the criteria specified in the contractual acceptance provisions have been achieved prior to delivery, revenue and the associated costs are deferred. The Company recognizes such revenue and costs upon obtaining objective evidence that the acceptance provisions can be achieved, assuming all other revenue recognition criteria have been met. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160; &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;In certain cases, the Company&#x2019;s contracts with customers contain a billing retention, which is billed by the Company and payable by the customer when field acceptance provisions are completed. Revenue recognized in advance of the amount that has been billed is recorded as a contract asset on the Consolidated Balance Sheets. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160; &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The Company recognizes revenue related to maintenance and service contracts over time based upon the respective contract term. Installation revenue is recognized over time as the installation services are performed. The Company recognizes revenue from the sales of components, spare parts, and specified service engagements at a point in time, which is typically consistent with the time of delivery in accordance with the terms of the applicable sales arrangement. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160; &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;"&gt;The Company may receive customer deposits on system transactions. The timing of the transfer of goods or services related to the deposits is either at the discretion of the customer or expected to be within one year from the deposit receipt. As such, the Company does not adjust transaction prices for the time value of money. Incremental direct costs incurred related to the acquisition of a customer contract, such as sales commissions, are expensed as incurred since the expected performance period is &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;one&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; year or less. &lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160; &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The Company has elected to treat shipping and handling costs, including those costs incurred to move, package, and prepare the Company&#x2019;s products for shipment and to move the products to a customer&#x2019;s designated location, as a &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;fulfillment activity, and the Company includes such costs in &#x201c;Cost of sales&#x201d; in the Consolidated Statements of Operations as incurred. These costs are generally comprised of payments to third-party shippers. Taxes assessed by governmental authorities that are collected by the Company from a customer are excluded from revenue. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(g) Warranty Costs&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;"&gt;The Company typically provides standard warranty coverage on its systems for &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;one year&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; from the date of final acceptance by providing labor and parts necessary to repair the systems during the warranty period. The Company records the estimated warranty cost when revenue is recognized on the related system. Warranty cost is included in &#x201c;Cost of sales&#x201d; in the Consolidated Statements of Operations. The estimated warranty cost is based on the Company&#x2019;s historical experience with its systems and regional labor costs. The Company calculates the average service hours by region and parts expense per system utilizing actual service records to determine the estimated warranty charge. The Company updates its warranty estimates on a quarterly basis when the actual product performance or field expense differs from original estimates.&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(h) Research and Development Costs&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Research and development costs are expensed as incurred and include charges for the development of new technology and the transition of existing technology into new products or services.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(i) Advertising Expense&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The cost of advertising is expensed as incurred and totaled $0.3 million, $0.3 million, and $0.4 million for the years ended December 31, 2022, 2021, and 2020, respectively.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(j) Accounting for Share-based Compensation&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Share-based awards exchanged for employee services are accounted for under the fair value method. Accordingly, share-based compensation cost is measured at the grant date based on the estimated fair value of the award. The expense for awards is recognized over the employee&#x2019;s requisite service period (generally the vesting period of the award). The Company has elected to treat awards with only service conditions and with graded vesting as one award. Consequently, the total compensation expense is recognized straight-line over the entire vesting period, so long as the compensation cost recognized at any date at least equals the portion of the grant date fair value of the award that is vested at that date.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;In addition to stock options, restricted share awards (&#x201c;RSAs&#x201d;) and restricted stock units (&#x201c;RSUs&#x201d;) with time-based vesting, the Company grants performance share units and awards (&#x201c;PSUs&#x201d; and &#x201c;PSAs&#x201d;) that have either performance or market conditions. Compensation cost for PSUs and PSAs with performance conditions is recognized over the requisite service period based on the timing and expected level of achievement of the performance targets. A change in the assessment of performance attainment prior to the conclusion of the performance period is recognized in the period of the change in estimate. Compensation cost for PSUs and PSAs with market conditions is recognized over the requisite service period regardless of the expected level of achievement. For all PSUs and PSAs, the number of shares issued to the employee at the conclusion of the service period may vary from the original target based upon the level of attainment of the performance or market conditions.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The Company uses the Black-Scholes option-pricing model to compute the estimated fair value of option awards and purchase rights under the Employee Stock Purchase Plan. The Company uses a Monte Carlo simulation to compute the estimated fair value of awards with market conditions. The Black-Scholes model and Monte Carlo simulation include assumptions regarding dividend yields, expected volatility, expected option term, and risk-free interest rates. See Note 12, &#x201c;Stock Plans,&#x201d; for additional information. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(k) Income Taxes&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Income taxes are accounted for under the asset and liability method. Deferred tax assets and liabilities are recognized for the future tax consequences attributable to differences between the financial statement carrying amounts of existing assets and liabilities and their respective tax bases and operating loss and tax credit carryforwards. Deferred tax assets and liabilities are measured using enacted tax rates expected to apply to taxable income in the years in which those temporary differences are expected to be recovered or settled. The effect on deferred tax assets and liabilities from a change in tax rate is recognized in income in the period that includes the enactment date. A valuation allowance is provided for deferred tax assets if it is more likely than not that these items will not be realized, which is dependent upon the generation of future taxable income.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(l) Concentration of Credit Risk&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Financial instruments that potentially subject the Company to concentrations of credit risk consist primarily of cash and cash equivalents, investments, derivative financial instruments used in hedging activities, and accounts receivable. The Company invests in a variety of financial instruments and, by policy, limits the amount of credit exposure with any one financial institution or commercial issuer. Historically, the Company has not experienced any material credit losses on its investments. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The Company maintains an allowance reserve for potentially uncollectible accounts for estimated losses resulting from the inability of its customers to make required payments. The Company evaluates its allowance for doubtful accounts based on a combination of factors. In circumstances where specific invoices are deemed to be uncollectible, the Company provides a specific allowance for bad debt against the amount due to reduce the net recognized receivable to the amount reasonably expected to be collected. The Company also provides allowances based on its write-off history. Finally, the Company also considers its current expectations of future economic conditions, including the impact of COVID-19, when estimating its allowance for doubtful accounts. The allowance for doubtful accounts totaled $0.7 million at both December 31, 2022 and 2021.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;"&gt;To further mitigate the Company&#x2019;s exposure to uncollectable accounts, the Company may request certain customers provide a negotiable irrevocable letter of credit drawn on a reputable financial institution. These irrevocable letters of credit are typically issued to mature between &lt;/span&gt;&lt;span style="-sec-ix-hidden:Hidden_X77IvS7lk0evd8U-l6qM4w;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;zero&lt;/span&gt;&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; and &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;90 days&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; from the date the documentation requirements are met, typically when a system ships or upon receipt of final acceptance from the customer. The Company, at its discretion, may monetize these letters of credit on a non-recourse basis after they become negotiable but before maturity. The fees associated with the monetization are included in &#x201c;Selling, general, and administrative&#x201d; in the Consolidated Statements of Operations and were immaterial for the years ended December 31, 2022, 2021, and 2020.&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(m) Fair Value of Financial Instruments&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The carrying amounts of financial instruments, including cash equivalents, accounts receivable, accounts payable, and accrued expenses reflected in the consolidated financial statements approximate fair value due to their short-term maturities. The fair value of debt for footnote disclosure purposes, including current maturities, if any, is estimated using recently quoted market prices of the instrument, or if not available, a discounted cash flow analysis based on the estimated current incremental borrowing rates for similar types of instruments.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(n) Cash, Cash Equivalents, and Short-term Investments&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;All financial instruments purchased with an original maturity of three months or less at the time of purchase are considered cash equivalents. Such items may include liquid money market funds, certificate of deposit and time deposit accounts, U.S. treasuries, government agency securities, and corporate debt. Investments that are classified as cash equivalents are carried at cost, which approximates fair value. The Company&#x2019;s cash and cash equivalents includes $61.5 million and $41.7 million of cash equivalents at December 31, 2022 and 2021, respectively.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;A portion of the Company&#x2019;s cash and cash equivalents is held by its subsidiaries throughout the world, frequently in each subsidiary&#x2019;s respective functional currency, which is typically the U.S. dollar. Approximately 18% and 32% of cash and cash equivalents were maintained outside the United States at December 31, 2022 and 2021, respectively.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Short-term investments consist of marketable debt securities, and are generally classified as available-for-sale for use in current operations, if required, and are reported at fair value, with unrealized gains and losses, net of tax, presented as a separate component of stockholders&#x2019; equity under the caption &#x201c;Accumulated other comprehensive income&#x201d; on the Consolidated Balance Sheets. These securities can include U.S. treasuries, government agency securities, corporate debt, and commercial paper, all with maturities of greater than three months when purchased. All realized gains and losses and unrealized losses resulting from declines in fair value that are other than temporary are included in &#x201c;Other operating expense (income), net&#x201d; in the Consolidated Statements of Operations. The specific identification method is used to determine the realized gains and losses on investments. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Non-marketable equity securities are equity securities without readily observable market prices and are included in &#x201c;Other assets&#x201d; in the Consolidated Balance Sheets. Non-marketable securities are measured at cost, adjusted for changes in observable prices minus impairment. Changes in fair value and impairment charges are included in &#x201c;Other income (expense), net&#x201d; in the Consolidated Statements of Operations.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(o) Inventories&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Inventories are stated at the lower of cost or net realizable value, with cost determined on a first-in, first-out basis. Each quarter the Company assesses the valuation and recoverability of all inventories: materials (raw materials, spare parts, and service inventory); work-in-process; and finished goods. Obsolete inventory or inventory in excess of management&#x2019;s estimated usage requirement is written down to its estimated net realizable value if less than cost. The Company evaluates usage requirements by analyzing historical usage, anticipated demand, alternative uses of materials, and other qualitative factors. Unanticipated changes in demand for the Company&#x2019;s products may require a write down of inventory, which would be reflected in cost of sales in the period the revision is made. Inventory acquired as part of a business combination is recorded at fair value on the date of acquisition.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(p) Business Combinations&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The Company allocates the fair value of the purchase consideration of the Company&#x2019;s acquisitions to the tangible assets, intangible assets, including in-process research and development (&#x201c;IPR&amp;amp;D&#x201d;), if any, and liabilities assumed, based on estimated fair values. The excess of the fair value of purchase consideration over the fair values of these identifiable assets and liabilities is recorded as goodwill. Acquisition-related expenses are recognized separately from the business combination and are expensed as incurred. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(q) Goodwill and Indefinite-Lived Intangible Assets&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Goodwill is an asset representing the future economic benefits arising from assets acquired in a business combination that are not individually identified and separately recognized. Goodwill is measured as the excess of the consideration transferred over the net fair value of identifiable assets acquired and liabilities assumed. Intangible assets with indefinite useful lives are measured at their respective fair values on the acquisition date. Intangible assets related to IPR&amp;amp;D projects are considered to be indefinite-lived until the completion or abandonment of the associated research and development (&#x201c;R&amp;amp;D&#x201d;) efforts. If and when development is complete, the associated assets would be deemed long-lived and would then be amortized based on their respective estimated useful lives at that point in time. Goodwill and indefinite-lived intangibles are not amortized into results of operations but instead are evaluated for impairment. The Company performs the evaluation in the beginning of the fourth quarter of each year or more frequently if impairment indicators arise.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;In testing goodwill for impairment, the Company may first perform a qualitative assessment of whether it is more likely than not that the reporting unit&#x2019;s fair value is less than its carrying amount, and, if so, the Company then quantitatively compares the fair value of the reporting unit to its carrying amount. If the fair value exceeds the carrying amount, goodwill is not impaired. If the carrying amount exceeds fair value, the Company then records an impairment loss equal to the difference, up to the carrying value of goodwill.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;"&gt;The Company determines the fair value of its reporting unit based on a reconciliation of the fair value of the reporting unit to the Company&#x2019;s adjusted market capitalization. The adjusted market capitalization is calculated by multiplying the average share price of the Company&#x2019;s common stock for the last &lt;/span&gt;&lt;span style="-sec-ix-hidden:Hidden_lu4ZbA0J8kKBzBR2b7i9TA;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;ten&lt;/span&gt;&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; trading days prior to the measurement date by the number of outstanding common shares and adding a control premium. The control premium is estimated using historical transactions in similar industries.&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;In testing indefinite-lived intangible assets for impairment, the Company may first perform a qualitative assessment of whether it is more likely than not that the fair value of the indefinite-lived intangible asset is less than its carrying amount, and, if so, the Company then quantitatively compares the fair value of the indefinite-lived intangible asset to its carrying amount. The Company determines the fair value of its indefinite-lived intangible assets using a discounted cash flow method.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(r) Long-lived Assets&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Long-lived intangible assets consist of purchased technology, customer relationships, patents, trademarks and tradenames, and backlog and are initially recorded at fair value. Long-lived intangible assets are amortized over their estimated useful lives in a method reflecting the pattern in which the economic benefits are consumed or straight-lined if such pattern cannot be reliably determined.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Property, plant, and equipment are recorded at cost. Depreciation expense is calculated based on the estimated useful lives of the assets by using the straight-line method. Amortization of leasehold improvements is recognized using the straight-line method over the shorter of the remaining lease term or the estimated useful lives of the improvements.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Long-lived assets are reviewed for impairment whenever events or changes in circumstances indicate that the carrying amount of an asset may not be recoverable. If circumstances require a long-lived asset or asset group be tested for possible impairment, a recoverability test is performed utilizing undiscounted cash flows expected to be generated by that asset or asset group compared to its carrying amount. If the carrying amount of the long-lived asset or asset group is not recoverable on an undiscounted cash flow basis, impairment is recognized to the extent the carrying amount exceeds its fair value. Fair value is determined through various valuation techniques including discounted cash flow models or, when available, quoted market values and third-party appraisals.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(s) Leases&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The Company determines at contract inception if an arrangement is a lease, or contains a lease, of an identified asset for which the Company has the right to obtain substantially all of the economic benefits from its use and the right to direct its use. Right-of-use (&#x201c;ROU&#x201d;) assets represent the Company&#x2019;s right to use an underlying asset for the lease term, while lease liabilities represent the Company&#x2019;s obligation to make lease payments arising from the lease. Operating lease ROU assets and liabilities are recognized at lease commencement date based on the present value of lease payments over the lease term. The implicit discount rate in the Company&#x2019;s leases generally cannot readily be determined, and therefore the Company uses its incremental borrowing rate based on information available at lease commencement date in determining the present value of future payments. The Company has options to renew or terminate certain leases. These options are included in the determination of lease term when it is reasonably certain that the Company will exercise such options. The Company does not separate lease and non-lease components in determining ROU assets or lease liabilities for real estate leases. Additionally, the Company does not recognize ROU assets or lease liabilities for leases with original terms or renewals of one year or less.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(t) Recently Adopted Accounting Standards&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;"&gt;The Company &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;adopted&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; ASU 2019-12:&#160;&lt;/span&gt;&lt;i style="font-size:10pt;font-style:italic;"&gt;Income Taxes (Topic 740): Simplifying the Accounting for Income Taxes &lt;/i&gt;&lt;span style="font-size:10pt;"&gt;in the second quarter of 2020, effective as of the beginning of fiscal year 2020. This ASU simplifies the accounting for income taxes by eliminating certain exceptions to the general principles and simplifying several aspects of ASC 740,&#160;&lt;/span&gt;&lt;i style="font-size:10pt;font-style:italic;"&gt;Income Taxes,&#160;&lt;/i&gt;&lt;span style="font-size:10pt;"&gt;including, but not limited to, requirements related to the following: a) exception to the incremental approach for intraperiod tax allocation; b) the tax basis step-up in goodwill obtained in a transaction that is not a business combination; c) ownership changes in investments - changes from a subsidiary to an equity method investment; d) separate financial statements of entities not subject to tax; e) interim-period accounting for enacted changes in tax law; and f) the year-to-date loss limitation in interim-period tax accounting. The adoption did not have a material impact on the Company&#x2019;s consolidated financial statements as of the date of adoption.&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;"&gt;The Company &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;adopted&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; ASU 2020-06: &lt;/span&gt;&lt;i style="font-size:10pt;font-style:italic;"&gt;Debt &#x2013; Debt with Conversion and Other Options (Subtopic 470-20) and Derivatives and Hedging &#x2013; Contracts in Entity&#x2019;s Own Equity (Subtopic 815-40): Accounting for Convertible Instruments and Contracts in an Entity&#x2019;s Own Equity&lt;/i&gt;&lt;span style="font-size:10pt;"&gt; on January 1, 2022, using the &lt;/span&gt;&lt;span style="-sec-ix-hidden:Hidden_kuYE2HfeWkSfBndNPXMkng;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;modified retrospective method&lt;/span&gt;&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; for all financial instruments that were outstanding as of the adoption date. This standard simplifies the accounting for convertible debt instruments by removing the separation models for convertible debt with a cash conversion feature, as well as convertible instruments with a beneficial conversion feature. As a result, entities will account for a convertible debt instrument wholly as debt, unless certain other conditions are met. The elimination of these models reduces non-cash interest expense for entities that have issued a convertible instrument that was within the scope of those models before the adoption of ASU 2020-06, such as the Company&#x2019;s 2023 Notes, 2025 Notes, and 2027 Notes. Additionally, ASU 2020-06 requires the application of the if-converted method for calculating diluted earnings per share, and precludes the use of the treasury stock method for certain debt instruments, such as the Company&#x2019;s 2023 Notes, 2025 Notes, and 2027 Notes.&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The adoption of ASU 2020-06 resulted in the following adjustments to the Consolidated Balance Sheets:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:61.76%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.44%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.04%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.11%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.13%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.33%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December 31, 2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:10.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Adoption of &lt;/b&gt;&lt;b style="font-weight:bold;"&gt;&lt;br/&gt;&lt;/b&gt;&lt;b style="font-weight:bold;"&gt;ASU 2020-06&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;January 1, 2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="10" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:36.79%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;&#160;(in thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Balance Sheet line item:&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.44%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.11%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.13%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Long-term debt&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 229,438&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.11%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 44,260&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 273,698&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Additional paid-in capital&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.44%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 1,116,921&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.11%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (56,800)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.13%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 1,060,121&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Accumulated deficit&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (681,283)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.11%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 12,540&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (668,743)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The adoption of ASU 2020-06 resulted in the following adjustments to the Company&#x2019;s calculations of basic and diluted income per share for the year ended December 31, 2022:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:63.07%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.22%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.32%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.65%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.85%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.12%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:63.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:36.92%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Year ended December&#160;31, 2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:63.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.55%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Under&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.65%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Under&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:63.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.55%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;ASU 2020-06&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.65%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;legacy accounting&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Difference&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:63.07%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Income per common share:&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.22%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.32%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.65%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.85%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:63.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Basic income per common share&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.22%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 3.35&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.65%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.85%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 3.15&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 0.20&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:63.07%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Diluted income per common share&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.22%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.32%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 2.71&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.65%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.85%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 2.91&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (0.20)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(u) Recent Accounting Pronouncements Not Yet Adopted&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The Company is evaluating other pronouncements recently issued but not yet adopted. The adoption of these pronouncements is not expected to have a material impact on our consolidated financial statements.&lt;/p&gt;</us-gaap:OrganizationConsolidationBasisOfPresentationBusinessDescriptionAndAccountingPoliciesTextBlock>
    <us-gaap:FiscalPeriod
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tb_EuF29X1WMUa8sYQ5HVV5bg">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(b) Basis of Presentation&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;"&gt;The accompanying audited Consolidated Financial Statements of the Company have been prepared in accordance with United States generally accepted accounting principles (&#x201c;GAAP&#x201d;). The Company reports interim quarters on a &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;13&lt;/span&gt;&lt;span style="font-size:10pt;"&gt;-week basis ending on the last Sunday of each period, which is determined at the start of each year. The Company&#x2019;s fourth quarter always ends on the last day of the calendar year, December 31. During 2022 the interim quarters ended on April 3, July 3, and October 2, and during 2021 the interim quarters ended on April 4, July 4, and October 3. The Company reports these interim quarters as March 31, June 30, and September 30 in its interim consolidated financial statements.&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</us-gaap:FiscalPeriod>
    <us-gaap:FiscalPeriodDuration
      contextRef="Duration_1_1_2022_To_3_31_2022_0YPX1UiA70qTsEBum79vEw"
      id="Narr_whb30qtGw0KyySS6KqUPig">P91D</us-gaap:FiscalPeriodDuration>
    <us-gaap:FiscalPeriodDuration
      contextRef="Duration_4_1_2022_To_6_30_2022_4jkIrP3p20amdiLLzhoJbQ"
      id="Narr_VMgcZto4fU6BrNwMFJ6htw">P91D</us-gaap:FiscalPeriodDuration>
    <us-gaap:FiscalPeriodDuration
      contextRef="Duration_7_1_2022_To_9_30_2022__p_V5234s0incEWW09mArQ"
      id="Narr_rn0QF3LM-0-mKgSeeEbTHw">P91D</us-gaap:FiscalPeriodDuration>
    <us-gaap:FiscalPeriodDuration
      contextRef="Duration_10_1_2022_To_12_31_2022_uExZe-pG7kOQct7OU2J4Dg"
      id="Narr_I4sLxjrd4E2vqp8E59ddnQ">P91D</us-gaap:FiscalPeriodDuration>
    <us-gaap:UseOfEstimates
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tb_c_K4iyUXL0OENVMl7f04Ug">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(c) Use of Estimates&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The preparation of financial statements in conformity with GAAP requires management to make estimates and assumptions that affect the amounts reported in the financial statements and accompanying notes. Although these estimates are based on management&#x2019;s knowledge of current events and actions it may undertake in the future, these estimates may ultimately differ from actual results. Significant items subject to such estimates and assumptions include: (i) stand-alone selling prices for the Company&#x2019;s products and services; (ii) allowances for doubtful accounts; (iii) inventory obsolescence; (iv) the useful lives and expected future cash flows of property, plant, and equipment and identifiable intangible assets; (v) the fair value of the Company&#x2019;s reporting unit and related goodwill; (vi) investment valuations and the valuation of derivatives, deferred tax assets, and assets acquired in business combinations; (vii) the recoverability of long-lived assets; (viii) liabilities for product warranty and legal contingencies; (ix) share-based compensation; (x) lease term and incremental borrowing rates used in determining operating lease assets and liabilities; and (xi) income tax uncertainties.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</us-gaap:UseOfEstimates>
    <us-gaap:ConsolidationPolicyTextBlock
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tb_3IaUCzpF_E-ZptCXD2LYDQ">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(d) Principles of Consolidation&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The Consolidated Financial Statements include the accounts of the Company and its subsidiaries. Intercompany balances and transactions have been eliminated in consolidation. Companies acquired during each reporting period are reflected in the results of the Company effective from their respective dates of acquisition through the end of the reporting period.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</us-gaap:ConsolidationPolicyTextBlock>
    <us-gaap:ForeignCurrencyTransactionsAndTranslationsPolicyTextBlock
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tb_rn8M8MnSrEyRibLvPEPudg">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(e) Foreign Currencies&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Assets and liabilities of the Company&#x2019;s foreign subsidiaries that operate using functional currencies other than the U.S. dollar are translated using the exchange rates in effect at the balance sheet date. Results of operations are translated using monthly average exchange rates. Adjustments arising from the translation of the foreign currency financial statements of the Company&#x2019;s subsidiaries into U.S. dollars, including intercompany transactions of a long-term nature, are reported as currency translation adjustments in &#x201c;Accumulated other comprehensive income&#x201d; in the Consolidated Balance Sheets. Foreign currency transaction gains or losses are included in &#x201c;Other operating expense (income), net&#x201d; in the Consolidated Statements of Operations.&lt;/p&gt;</us-gaap:ForeignCurrencyTransactionsAndTranslationsPolicyTextBlock>
    <us-gaap:RevenueFromContractWithCustomerPolicyTextBlock
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tb_kTCO7ywdPke62MmitI6A4g">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(f) Revenue Recognition&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Revenue is recognized upon the transfer of control of the promised product or service to the customer in an amount that reflects the consideration the Company expects to receive in exchange for such product or service. The Company&#x2019;s contracts with customers generally do not contain variable consideration. In the rare instances where variable consideration is included, the Company estimates the amount of variable consideration and determines what portion of &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;that, if any, has a high probability of significant subsequent revenue reversal, and if so, that amount is excluded from the transaction price. The Company&#x2019;s contracts with customers frequently contain multiple deliverables, such as systems, upgrades, components, spare parts, installation, maintenance, and service plans. Judgment is required to properly identify the performance obligations within a contract and to determine how the revenue should be allocated among the performance obligations. The Company also evaluates whether multiple transactions with the same customer or related parties should be considered part of a single contract based on an assessment of whether the contracts or agreements are negotiated or executed within a short time frame of each other or if there are indicators that the contracts are negotiated in contemplation of one another. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160; &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;When there are separate units of accounting, the Company allocates revenue to each performance obligation on a relative stand-alone selling price basis. The stand-alone selling prices are determined based on the prices at which the Company separately sells the systems, upgrades, components, spare parts, installation, maintenance, and service plans. For items that are not sold separately, the Company estimates stand-alone selling prices generally using an expected cost plus margin approach. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160; &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Most of the Company&#x2019;s revenue is recognized at a point in time when the performance obligation is satisfied. The Company considers many facts when evaluating each of its sales arrangements to determine the timing of revenue recognition, including its contractual obligations and the nature of the customer&#x2019;s post-delivery acceptance provisions. The Company&#x2019;s system sales arrangements, including certain upgrades, generally include field acceptance provisions that may include functional or mechanical test procedures. For many of these arrangements, a customer source inspection of the system is performed in the Company&#x2019;s facility, test data is sent to the customer documenting that the system is functioning to the agreed upon specifications prior to delivery, or other quality assurance testing is performed internally to ensure system functionality prior to shipment. Historically, such source inspection or test data replicates the field acceptance provisions that are performed at the customer&#x2019;s site prior to final acceptance of the system. When the Company objectively demonstrates that the criteria specified in the contractual acceptance provisions are achieved prior to delivery either through customer testing or the Company&#x2019;s historical experience of its tools meeting specifications, transfer of control of the product to the customer is considered to have occurred and revenue is recognized upon system delivery since there is no substantive contingency remaining related to the acceptance provisions at that date. For new products, new applications of existing products, or for products with substantive customer acceptance provisions where the Company cannot objectively demonstrate that the criteria specified in the contractual acceptance provisions have been achieved prior to delivery, revenue and the associated costs are deferred. The Company recognizes such revenue and costs upon obtaining objective evidence that the acceptance provisions can be achieved, assuming all other revenue recognition criteria have been met. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160; &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;In certain cases, the Company&#x2019;s contracts with customers contain a billing retention, which is billed by the Company and payable by the customer when field acceptance provisions are completed. Revenue recognized in advance of the amount that has been billed is recorded as a contract asset on the Consolidated Balance Sheets. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160; &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The Company recognizes revenue related to maintenance and service contracts over time based upon the respective contract term. Installation revenue is recognized over time as the installation services are performed. The Company recognizes revenue from the sales of components, spare parts, and specified service engagements at a point in time, which is typically consistent with the time of delivery in accordance with the terms of the applicable sales arrangement. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160; &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;"&gt;The Company may receive customer deposits on system transactions. The timing of the transfer of goods or services related to the deposits is either at the discretion of the customer or expected to be within one year from the deposit receipt. As such, the Company does not adjust transaction prices for the time value of money. Incremental direct costs incurred related to the acquisition of a customer contract, such as sales commissions, are expensed as incurred since the expected performance period is &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;one&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; year or less. &lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160; &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The Company has elected to treat shipping and handling costs, including those costs incurred to move, package, and prepare the Company&#x2019;s products for shipment and to move the products to a customer&#x2019;s designated location, as a &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;fulfillment activity, and the Company includes such costs in &#x201c;Cost of sales&#x201d; in the Consolidated Statements of Operations as incurred. These costs are generally comprised of payments to third-party shippers. Taxes assessed by governmental authorities that are collected by the Company from a customer are excluded from revenue. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</us-gaap:RevenueFromContractWithCustomerPolicyTextBlock>
    <us-gaap:RevenuePracticalExpedientIncrementalCostOfObtainingContract
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Narr_fgJS1jRFjECK9sOKsiF2ig">true</us-gaap:RevenuePracticalExpedientIncrementalCostOfObtainingContract>
    <us-gaap:StandardProductWarrantyPolicy
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tb_E6a-pGzjBEyeLoyUtz-lAg">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(g) Warranty Costs&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;"&gt;The Company typically provides standard warranty coverage on its systems for &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;one year&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; from the date of final acceptance by providing labor and parts necessary to repair the systems during the warranty period. The Company records the estimated warranty cost when revenue is recognized on the related system. Warranty cost is included in &#x201c;Cost of sales&#x201d; in the Consolidated Statements of Operations. The estimated warranty cost is based on the Company&#x2019;s historical experience with its systems and regional labor costs. The Company calculates the average service hours by region and parts expense per system utilizing actual service records to determine the estimated warranty charge. The Company updates its warranty estimates on a quarterly basis when the actual product performance or field expense differs from original estimates.&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</us-gaap:StandardProductWarrantyPolicy>
    <veco:ProductWarrantyPeriod
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Narr_q3jajAIXEkOIb0p6YNLVQA">P1Y</veco:ProductWarrantyPeriod>
    <us-gaap:ResearchAndDevelopmentExpensePolicy
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tb_neLegiqu906FDsvTLe_RCQ">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(h) Research and Development Costs&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Research and development costs are expensed as incurred and include charges for the development of new technology and the transition of existing technology into new products or services.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</us-gaap:ResearchAndDevelopmentExpensePolicy>
    <us-gaap:AdvertisingCostsPolicyTextBlock
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tb_n1tCniTHUkyfTQt30jYaQA">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(i) Advertising Expense&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The cost of advertising is expensed as incurred and totaled $0.3 million, $0.3 million, and $0.4 million for the years ended December 31, 2022, 2021, and 2020, respectively.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</us-gaap:AdvertisingCostsPolicyTextBlock>
    <us-gaap:AdvertisingExpense
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-5"
      id="Narr_W7MCsC1QgUaZ-3YPoYevDw"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">300000</us-gaap:AdvertisingExpense>
    <us-gaap:AdvertisingExpense
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-5"
      id="Narr_vUacBBCfIU-n8rzAsUiR6w"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">300000</us-gaap:AdvertisingExpense>
    <us-gaap:AdvertisingExpense
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-5"
      id="Narr_32QD8RPZukm3us2DE-BIyQ"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">400000</us-gaap:AdvertisingExpense>
    <us-gaap:ShareBasedCompensationOptionAndIncentivePlansPolicy
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tb_Md0g_N4rwka5UClTp3gZKA">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(j) Accounting for Share-based Compensation&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Share-based awards exchanged for employee services are accounted for under the fair value method. Accordingly, share-based compensation cost is measured at the grant date based on the estimated fair value of the award. The expense for awards is recognized over the employee&#x2019;s requisite service period (generally the vesting period of the award). The Company has elected to treat awards with only service conditions and with graded vesting as one award. Consequently, the total compensation expense is recognized straight-line over the entire vesting period, so long as the compensation cost recognized at any date at least equals the portion of the grant date fair value of the award that is vested at that date.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;In addition to stock options, restricted share awards (&#x201c;RSAs&#x201d;) and restricted stock units (&#x201c;RSUs&#x201d;) with time-based vesting, the Company grants performance share units and awards (&#x201c;PSUs&#x201d; and &#x201c;PSAs&#x201d;) that have either performance or market conditions. Compensation cost for PSUs and PSAs with performance conditions is recognized over the requisite service period based on the timing and expected level of achievement of the performance targets. A change in the assessment of performance attainment prior to the conclusion of the performance period is recognized in the period of the change in estimate. Compensation cost for PSUs and PSAs with market conditions is recognized over the requisite service period regardless of the expected level of achievement. For all PSUs and PSAs, the number of shares issued to the employee at the conclusion of the service period may vary from the original target based upon the level of attainment of the performance or market conditions.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The Company uses the Black-Scholes option-pricing model to compute the estimated fair value of option awards and purchase rights under the Employee Stock Purchase Plan. The Company uses a Monte Carlo simulation to compute the estimated fair value of awards with market conditions. The Black-Scholes model and Monte Carlo simulation include assumptions regarding dividend yields, expected volatility, expected option term, and risk-free interest rates. See Note 12, &#x201c;Stock Plans,&#x201d; for additional information. &lt;/p&gt;</us-gaap:ShareBasedCompensationOptionAndIncentivePlansPolicy>
    <veco:ShareBasedCompensationArrangementByShareBasedPaymentAwardServiceConditionsAndGradedVestingNumberOfAwards
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="INF"
      id="Narr_Dop9sRHEGU6s47_W3v7Dmw"
      unitRef="Unit_Standard_item_aj1ZEHofC0agSXOi_C6c5A">1</veco:ShareBasedCompensationArrangementByShareBasedPaymentAwardServiceConditionsAndGradedVestingNumberOfAwards>
    <us-gaap:IncomeTaxPolicyTextBlock
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tb_bg71ARZAcUGigGBow0ySVA">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(k) Income Taxes&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Income taxes are accounted for under the asset and liability method. Deferred tax assets and liabilities are recognized for the future tax consequences attributable to differences between the financial statement carrying amounts of existing assets and liabilities and their respective tax bases and operating loss and tax credit carryforwards. Deferred tax assets and liabilities are measured using enacted tax rates expected to apply to taxable income in the years in which those temporary differences are expected to be recovered or settled. The effect on deferred tax assets and liabilities from a change in tax rate is recognized in income in the period that includes the enactment date. A valuation allowance is provided for deferred tax assets if it is more likely than not that these items will not be realized, which is dependent upon the generation of future taxable income.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</us-gaap:IncomeTaxPolicyTextBlock>
    <us-gaap:ConcentrationRiskCreditRisk
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tb_st5Rna0Tv06B1zmUwItAYg">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(l) Concentration of Credit Risk&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Financial instruments that potentially subject the Company to concentrations of credit risk consist primarily of cash and cash equivalents, investments, derivative financial instruments used in hedging activities, and accounts receivable. The Company invests in a variety of financial instruments and, by policy, limits the amount of credit exposure with any one financial institution or commercial issuer. Historically, the Company has not experienced any material credit losses on its investments. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The Company maintains an allowance reserve for potentially uncollectible accounts for estimated losses resulting from the inability of its customers to make required payments. The Company evaluates its allowance for doubtful accounts based on a combination of factors. In circumstances where specific invoices are deemed to be uncollectible, the Company provides a specific allowance for bad debt against the amount due to reduce the net recognized receivable to the amount reasonably expected to be collected. The Company also provides allowances based on its write-off history. Finally, the Company also considers its current expectations of future economic conditions, including the impact of COVID-19, when estimating its allowance for doubtful accounts. The allowance for doubtful accounts totaled $0.7 million at both December 31, 2022 and 2021.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;"&gt;To further mitigate the Company&#x2019;s exposure to uncollectable accounts, the Company may request certain customers provide a negotiable irrevocable letter of credit drawn on a reputable financial institution. These irrevocable letters of credit are typically issued to mature between &lt;/span&gt;&lt;span style="-sec-ix-hidden:Hidden_X77IvS7lk0evd8U-l6qM4w;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;zero&lt;/span&gt;&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; and &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;90 days&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; from the date the documentation requirements are met, typically when a system ships or upon receipt of final acceptance from the customer. The Company, at its discretion, may monetize these letters of credit on a non-recourse basis after they become negotiable but before maturity. The fees associated with the monetization are included in &#x201c;Selling, general, and administrative&#x201d; in the Consolidated Statements of Operations and were immaterial for the years ended December 31, 2022, 2021, and 2020.&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</us-gaap:ConcentrationRiskCreditRisk>
    <us-gaap:AllowanceForDoubtfulAccountsReceivableCurrent
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-5"
      id="Narr_f5VvQiKbXEi0bL3OQYqn6g"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">700000</us-gaap:AllowanceForDoubtfulAccountsReceivableCurrent>
    <us-gaap:AllowanceForDoubtfulAccountsReceivableCurrent
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-5"
      id="Narr_8mCi4OjlGkSwlCZf7N_hTA"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">700000</us-gaap:AllowanceForDoubtfulAccountsReceivableCurrent>
    <veco:IrrevocableLettersOfCreditMaturityPeriodMaximum
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Narr_9HHScDwOuUKW0jC7y5pSgg">P90D</veco:IrrevocableLettersOfCreditMaturityPeriodMaximum>
    <us-gaap:FairValueOfFinancialInstrumentsPolicy
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tb_hGOnRvqZ7kmX6E81qtU3PA">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(m) Fair Value of Financial Instruments&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The carrying amounts of financial instruments, including cash equivalents, accounts receivable, accounts payable, and accrued expenses reflected in the consolidated financial statements approximate fair value due to their short-term maturities. The fair value of debt for footnote disclosure purposes, including current maturities, if any, is estimated using recently quoted market prices of the instrument, or if not available, a discounted cash flow analysis based on the estimated current incremental borrowing rates for similar types of instruments.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</us-gaap:FairValueOfFinancialInstrumentsPolicy>
    <veco:CashCashEquivalentsAndShortTermInvestmentsPolicyTextBlock
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tb_oHHjapgke0K4AT5E6orrHA">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(n) Cash, Cash Equivalents, and Short-term Investments&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;All financial instruments purchased with an original maturity of three months or less at the time of purchase are considered cash equivalents. Such items may include liquid money market funds, certificate of deposit and time deposit accounts, U.S. treasuries, government agency securities, and corporate debt. Investments that are classified as cash equivalents are carried at cost, which approximates fair value. The Company&#x2019;s cash and cash equivalents includes $61.5 million and $41.7 million of cash equivalents at December 31, 2022 and 2021, respectively.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;A portion of the Company&#x2019;s cash and cash equivalents is held by its subsidiaries throughout the world, frequently in each subsidiary&#x2019;s respective functional currency, which is typically the U.S. dollar. Approximately 18% and 32% of cash and cash equivalents were maintained outside the United States at December 31, 2022 and 2021, respectively.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Short-term investments consist of marketable debt securities, and are generally classified as available-for-sale for use in current operations, if required, and are reported at fair value, with unrealized gains and losses, net of tax, presented as a separate component of stockholders&#x2019; equity under the caption &#x201c;Accumulated other comprehensive income&#x201d; on the Consolidated Balance Sheets. These securities can include U.S. treasuries, government agency securities, corporate debt, and commercial paper, all with maturities of greater than three months when purchased. All realized gains and losses and unrealized losses resulting from declines in fair value that are other than temporary are included in &#x201c;Other operating expense (income), net&#x201d; in the Consolidated Statements of Operations. The specific identification method is used to determine the realized gains and losses on investments. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Non-marketable equity securities are equity securities without readily observable market prices and are included in &#x201c;Other assets&#x201d; in the Consolidated Balance Sheets. Non-marketable securities are measured at cost, adjusted for changes in observable prices minus impairment. Changes in fair value and impairment charges are included in &#x201c;Other income (expense), net&#x201d; in the Consolidated Statements of Operations.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</veco:CashCashEquivalentsAndShortTermInvestmentsPolicyTextBlock>
    <us-gaap:CashEquivalentsAtCarryingValue
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-5"
      id="Narr_LCmpXcK5BUi0ebMtvjXxpg"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">61500000</us-gaap:CashEquivalentsAtCarryingValue>
    <us-gaap:CashEquivalentsAtCarryingValue
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-5"
      id="Narr_LA3B974vPUOCqLkwrgY4sw"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">41700000</us-gaap:CashEquivalentsAtCarryingValue>
    <veco:CashAndCashEquivalentsMaintainedOutsideBySubsidiariesAsPercent
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="2"
      id="Narr_3Orn6IzIlk-a-iyUkEgalQ"
      unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w">0.18</veco:CashAndCashEquivalentsMaintainedOutsideBySubsidiariesAsPercent>
    <veco:CashAndCashEquivalentsMaintainedOutsideBySubsidiariesAsPercent
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="2"
      id="Narr_ghlvh9im2UuDKT8kbC4orw"
      unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w">0.32</veco:CashAndCashEquivalentsMaintainedOutsideBySubsidiariesAsPercent>
    <us-gaap:InventoryPolicyTextBlock
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tb_RpT2fxhtGk63JPOO_r8f0Q">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(o) Inventories&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Inventories are stated at the lower of cost or net realizable value, with cost determined on a first-in, first-out basis. Each quarter the Company assesses the valuation and recoverability of all inventories: materials (raw materials, spare parts, and service inventory); work-in-process; and finished goods. Obsolete inventory or inventory in excess of management&#x2019;s estimated usage requirement is written down to its estimated net realizable value if less than cost. The Company evaluates usage requirements by analyzing historical usage, anticipated demand, alternative uses of materials, and other qualitative factors. Unanticipated changes in demand for the Company&#x2019;s products may require a write down of inventory, which would be reflected in cost of sales in the period the revision is made. Inventory acquired as part of a business combination is recorded at fair value on the date of acquisition.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</us-gaap:InventoryPolicyTextBlock>
    <us-gaap:BusinessCombinationsPolicy
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tb_pErflwA9G0WS8ZeHT5sliQ">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(p) Business Combinations&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The Company allocates the fair value of the purchase consideration of the Company&#x2019;s acquisitions to the tangible assets, intangible assets, including in-process research and development (&#x201c;IPR&amp;amp;D&#x201d;), if any, and liabilities assumed, based on estimated fair values. The excess of the fair value of purchase consideration over the fair values of these identifiable assets and liabilities is recorded as goodwill. Acquisition-related expenses are recognized separately from the business combination and are expensed as incurred. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</us-gaap:BusinessCombinationsPolicy>
    <us-gaap:GoodwillAndIntangibleAssetsIntangibleAssetsIndefiniteLivedPolicy
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tb_UuHw7PoEoEGwf4Dwngg2Rw">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(q) Goodwill and Indefinite-Lived Intangible Assets&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Goodwill is an asset representing the future economic benefits arising from assets acquired in a business combination that are not individually identified and separately recognized. Goodwill is measured as the excess of the consideration transferred over the net fair value of identifiable assets acquired and liabilities assumed. Intangible assets with indefinite useful lives are measured at their respective fair values on the acquisition date. Intangible assets related to IPR&amp;amp;D projects are considered to be indefinite-lived until the completion or abandonment of the associated research and development (&#x201c;R&amp;amp;D&#x201d;) efforts. If and when development is complete, the associated assets would be deemed long-lived and would then be amortized based on their respective estimated useful lives at that point in time. Goodwill and indefinite-lived intangibles are not amortized into results of operations but instead are evaluated for impairment. The Company performs the evaluation in the beginning of the fourth quarter of each year or more frequently if impairment indicators arise.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;In testing goodwill for impairment, the Company may first perform a qualitative assessment of whether it is more likely than not that the reporting unit&#x2019;s fair value is less than its carrying amount, and, if so, the Company then quantitatively compares the fair value of the reporting unit to its carrying amount. If the fair value exceeds the carrying amount, goodwill is not impaired. If the carrying amount exceeds fair value, the Company then records an impairment loss equal to the difference, up to the carrying value of goodwill.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;"&gt;The Company determines the fair value of its reporting unit based on a reconciliation of the fair value of the reporting unit to the Company&#x2019;s adjusted market capitalization. The adjusted market capitalization is calculated by multiplying the average share price of the Company&#x2019;s common stock for the last &lt;/span&gt;&lt;span style="-sec-ix-hidden:Hidden_lu4ZbA0J8kKBzBR2b7i9TA;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;ten&lt;/span&gt;&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; trading days prior to the measurement date by the number of outstanding common shares and adding a control premium. The control premium is estimated using historical transactions in similar industries.&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;In testing indefinite-lived intangible assets for impairment, the Company may first perform a qualitative assessment of whether it is more likely than not that the fair value of the indefinite-lived intangible asset is less than its carrying amount, and, if so, the Company then quantitatively compares the fair value of the indefinite-lived intangible asset to its carrying amount. The Company determines the fair value of its indefinite-lived intangible assets using a discounted cash flow method.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</us-gaap:GoodwillAndIntangibleAssetsIntangibleAssetsIndefiniteLivedPolicy>
    <veco:LongLivedAssetsAndCostMethodInvestmentsPolicyTextBlock
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tb_rbFI7ZnyQ0maZCTvLYVR5g">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(r) Long-lived Assets&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Long-lived intangible assets consist of purchased technology, customer relationships, patents, trademarks and tradenames, and backlog and are initially recorded at fair value. Long-lived intangible assets are amortized over their estimated useful lives in a method reflecting the pattern in which the economic benefits are consumed or straight-lined if such pattern cannot be reliably determined.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Property, plant, and equipment are recorded at cost. Depreciation expense is calculated based on the estimated useful lives of the assets by using the straight-line method. Amortization of leasehold improvements is recognized using the straight-line method over the shorter of the remaining lease term or the estimated useful lives of the improvements.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Long-lived assets are reviewed for impairment whenever events or changes in circumstances indicate that the carrying amount of an asset may not be recoverable. If circumstances require a long-lived asset or asset group be tested for possible impairment, a recoverability test is performed utilizing undiscounted cash flows expected to be generated by that asset or asset group compared to its carrying amount. If the carrying amount of the long-lived asset or asset group is not recoverable on an undiscounted cash flow basis, impairment is recognized to the extent the carrying amount exceeds its fair value. Fair value is determined through various valuation techniques including discounted cash flow models or, when available, quoted market values and third-party appraisals.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</veco:LongLivedAssetsAndCostMethodInvestmentsPolicyTextBlock>
    <us-gaap:LesseeLeasesPolicyTextBlock
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tb_GvpqQS9lrEuXKwWMgguhvQ">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(s) Leases&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The Company determines at contract inception if an arrangement is a lease, or contains a lease, of an identified asset for which the Company has the right to obtain substantially all of the economic benefits from its use and the right to direct its use. Right-of-use (&#x201c;ROU&#x201d;) assets represent the Company&#x2019;s right to use an underlying asset for the lease term, while lease liabilities represent the Company&#x2019;s obligation to make lease payments arising from the lease. Operating lease ROU assets and liabilities are recognized at lease commencement date based on the present value of lease payments over the lease term. The implicit discount rate in the Company&#x2019;s leases generally cannot readily be determined, and therefore the Company uses its incremental borrowing rate based on information available at lease commencement date in determining the present value of future payments. The Company has options to renew or terminate certain leases. These options are included in the determination of lease term when it is reasonably certain that the Company will exercise such options. The Company does not separate lease and non-lease components in determining ROU assets or lease liabilities for real estate leases. Additionally, the Company does not recognize ROU assets or lease liabilities for leases with original terms or renewals of one year or less.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</us-gaap:LesseeLeasesPolicyTextBlock>
    <us-gaap:NewAccountingPronouncementsPolicyPolicyTextBlock
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tb_O26VRqkueE-HiRRQwqFU4Q">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(t) Recently Adopted Accounting Standards&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;"&gt;The Company &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;adopted&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; ASU 2019-12:&#160;&lt;/span&gt;&lt;i style="font-size:10pt;font-style:italic;"&gt;Income Taxes (Topic 740): Simplifying the Accounting for Income Taxes &lt;/i&gt;&lt;span style="font-size:10pt;"&gt;in the second quarter of 2020, effective as of the beginning of fiscal year 2020. This ASU simplifies the accounting for income taxes by eliminating certain exceptions to the general principles and simplifying several aspects of ASC 740,&#160;&lt;/span&gt;&lt;i style="font-size:10pt;font-style:italic;"&gt;Income Taxes,&#160;&lt;/i&gt;&lt;span style="font-size:10pt;"&gt;including, but not limited to, requirements related to the following: a) exception to the incremental approach for intraperiod tax allocation; b) the tax basis step-up in goodwill obtained in a transaction that is not a business combination; c) ownership changes in investments - changes from a subsidiary to an equity method investment; d) separate financial statements of entities not subject to tax; e) interim-period accounting for enacted changes in tax law; and f) the year-to-date loss limitation in interim-period tax accounting. The adoption did not have a material impact on the Company&#x2019;s consolidated financial statements as of the date of adoption.&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;"&gt;The Company &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;adopted&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; ASU 2020-06: &lt;/span&gt;&lt;i style="font-size:10pt;font-style:italic;"&gt;Debt &#x2013; Debt with Conversion and Other Options (Subtopic 470-20) and Derivatives and Hedging &#x2013; Contracts in Entity&#x2019;s Own Equity (Subtopic 815-40): Accounting for Convertible Instruments and Contracts in an Entity&#x2019;s Own Equity&lt;/i&gt;&lt;span style="font-size:10pt;"&gt; on January 1, 2022, using the &lt;/span&gt;&lt;span style="-sec-ix-hidden:Hidden_kuYE2HfeWkSfBndNPXMkng;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;modified retrospective method&lt;/span&gt;&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; for all financial instruments that were outstanding as of the adoption date. This standard simplifies the accounting for convertible debt instruments by removing the separation models for convertible debt with a cash conversion feature, as well as convertible instruments with a beneficial conversion feature. As a result, entities will account for a convertible debt instrument wholly as debt, unless certain other conditions are met. The elimination of these models reduces non-cash interest expense for entities that have issued a convertible instrument that was within the scope of those models before the adoption of ASU 2020-06, such as the Company&#x2019;s 2023 Notes, 2025 Notes, and 2027 Notes. Additionally, ASU 2020-06 requires the application of the if-converted method for calculating diluted earnings per share, and precludes the use of the treasury stock method for certain debt instruments, such as the Company&#x2019;s 2023 Notes, 2025 Notes, and 2027 Notes.&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The adoption of ASU 2020-06 resulted in the following adjustments to the Consolidated Balance Sheets:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:61.76%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.44%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.04%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.11%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.13%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.33%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December 31, 2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:10.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Adoption of &lt;/b&gt;&lt;b style="font-weight:bold;"&gt;&lt;br/&gt;&lt;/b&gt;&lt;b style="font-weight:bold;"&gt;ASU 2020-06&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;January 1, 2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="10" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:36.79%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;&#160;(in thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Balance Sheet line item:&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.44%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.11%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.13%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Long-term debt&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 229,438&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.11%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 44,260&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 273,698&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Additional paid-in capital&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.44%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 1,116,921&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.11%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (56,800)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.13%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 1,060,121&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Accumulated deficit&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (681,283)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.11%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 12,540&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (668,743)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The adoption of ASU 2020-06 resulted in the following adjustments to the Company&#x2019;s calculations of basic and diluted income per share for the year ended December 31, 2022:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:63.07%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.22%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.32%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.65%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.85%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.12%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:63.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:36.92%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Year ended December&#160;31, 2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:63.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.55%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Under&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.65%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Under&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:63.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.55%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;ASU 2020-06&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.65%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;legacy accounting&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Difference&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:63.07%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Income per common share:&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.22%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.32%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.65%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.85%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:63.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Basic income per common share&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.22%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 3.35&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.65%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.85%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 3.15&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 0.20&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:63.07%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Diluted income per common share&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.22%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.32%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 2.71&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.65%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.85%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 2.91&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (0.20)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(u) Recent Accounting Pronouncements Not Yet Adopted&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The Company is evaluating other pronouncements recently issued but not yet adopted. The adoption of these pronouncements is not expected to have a material impact on our consolidated financial statements.&lt;/p&gt;</us-gaap:NewAccountingPronouncementsPolicyPolicyTextBlock>
    <us-gaap:ChangeInAccountingPrincipleAccountingStandardsUpdateAdopted
      contextRef="As_Of_4_1_2020_us-gaap_AdjustmentsForNewAccountingPronouncementsAxis_us-gaap_AccountingStandardsUpdate201912Member_pNbALjFiLEiNFwxB8zN-cA"
      id="Narr_19yUcShxj0GzpGBhaJw24g">true</us-gaap:ChangeInAccountingPrincipleAccountingStandardsUpdateAdopted>
    <us-gaap:ChangeInAccountingPrincipleAccountingStandardsUpdateAdopted
      contextRef="As_Of_1_1_2022_us-gaap_AdjustmentsForNewAccountingPronouncementsAxis_us-gaap_AccountingStandardsUpdate202006Member_YriApdcwvUG3B-95OCDPfg"
      id="Narr_F5cFL8Pw0EW3FaIzX9Fe1A">true</us-gaap:ChangeInAccountingPrincipleAccountingStandardsUpdateAdopted>
    <us-gaap:ScheduleOfNewAccountingPronouncementsAndChangesInAccountingPrinciplesTextBlock
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tb_HUByP5em4UGlAH1HcT7eJQ">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The adoption of ASU 2020-06 resulted in the following adjustments to the Consolidated Balance Sheets:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:61.76%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.44%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.04%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.11%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.13%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.33%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December 31, 2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:10.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Adoption of &lt;/b&gt;&lt;b style="font-weight:bold;"&gt;&lt;br/&gt;&lt;/b&gt;&lt;b style="font-weight:bold;"&gt;ASU 2020-06&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;January 1, 2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="10" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:36.79%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;&#160;(in thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Balance Sheet line item:&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.44%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.11%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.13%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Long-term debt&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 229,438&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.11%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 44,260&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 273,698&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Additional paid-in capital&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.44%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 1,116,921&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.11%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (56,800)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.13%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 1,060,121&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Accumulated deficit&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (681,283)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.11%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 12,540&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (668,743)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The adoption of ASU 2020-06 resulted in the following adjustments to the Company&#x2019;s calculations of basic and diluted income per share for the year ended December 31, 2022:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:63.07%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.22%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.32%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.65%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.85%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.12%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:63.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:36.92%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Year ended December&#160;31, 2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:63.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.55%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Under&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.65%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Under&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:63.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.55%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;ASU 2020-06&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.65%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;legacy accounting&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Difference&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:63.07%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Income per common share:&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.22%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.32%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.65%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.85%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:63.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Basic income per common share&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.22%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 3.35&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.65%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.85%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 3.15&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 0.20&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:63.07%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Diluted income per common share&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.22%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.32%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 2.71&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.65%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.85%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 2.91&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (0.20)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</us-gaap:ScheduleOfNewAccountingPronouncementsAndChangesInAccountingPrinciplesTextBlock>
    <us-gaap:LongTermDebtNoncurrent
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_qCsZJez2HkeN1BZTHwRgRw_4_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">229438000</us-gaap:LongTermDebtNoncurrent>
    <us-gaap:LongTermDebtNoncurrent
      contextRef="As_Of_12_31_2021_srt_CumulativeEffectPeriodOfAdoptionAxis_srt_CumulativeEffectPeriodOfAdoptionAdjustmentMember_us-gaap_AdjustmentsForNewAccountingPronouncementsAxis_us-gaap_AccountingStandardsUpdate202006Member_uQc4nJTxR0OEJlucArTKOA"
      decimals="-3"
      id="Tc_EYDoZ_CvAUCteT1f3HgRbw_4_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">44260000</us-gaap:LongTermDebtNoncurrent>
    <us-gaap:LongTermDebtNoncurrent
      contextRef="As_Of_12_31_2021_srt_CumulativeEffectPeriodOfAdoptionAxis_srt_CumulativeEffectPeriodOfAdoptionAdjustedBalanceMember_us-gaap_AdjustmentsForNewAccountingPronouncementsAxis_us-gaap_AccountingStandardsUpdate202006Member_LzmwhGpHdUa1ilaCnrJETw"
      decimals="-3"
      id="Tc_gZGO_q6LEk6aRXjKIuzySw_4_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">273698000</us-gaap:LongTermDebtNoncurrent>
    <us-gaap:AdditionalPaidInCapitalCommonStock
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_IlZcNPshpkyDCrdranspNA_5_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">1116921000</us-gaap:AdditionalPaidInCapitalCommonStock>
    <us-gaap:AdditionalPaidInCapitalCommonStock
      contextRef="As_Of_12_31_2021_srt_CumulativeEffectPeriodOfAdoptionAxis_srt_CumulativeEffectPeriodOfAdoptionAdjustmentMember_us-gaap_AdjustmentsForNewAccountingPronouncementsAxis_us-gaap_AccountingStandardsUpdate202006Member_uQc4nJTxR0OEJlucArTKOA"
      decimals="-3"
      id="Tc_aAaT1Qq66UqFlpPCGZQe6Q_5_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-56800000</us-gaap:AdditionalPaidInCapitalCommonStock>
    <us-gaap:AdditionalPaidInCapitalCommonStock
      contextRef="As_Of_12_31_2021_srt_CumulativeEffectPeriodOfAdoptionAxis_srt_CumulativeEffectPeriodOfAdoptionAdjustedBalanceMember_us-gaap_AdjustmentsForNewAccountingPronouncementsAxis_us-gaap_AccountingStandardsUpdate202006Member_LzmwhGpHdUa1ilaCnrJETw"
      decimals="-3"
      id="Tc_3TZVE_i7Y0OGHh2_cN2zIA_5_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">1060121000</us-gaap:AdditionalPaidInCapitalCommonStock>
    <us-gaap:RetainedEarningsAccumulatedDeficit
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_oWmpWhr-YE2XsiZ_10nJ5Q_6_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-681283000</us-gaap:RetainedEarningsAccumulatedDeficit>
    <us-gaap:RetainedEarningsAccumulatedDeficit
      contextRef="As_Of_12_31_2021_srt_CumulativeEffectPeriodOfAdoptionAxis_srt_CumulativeEffectPeriodOfAdoptionAdjustmentMember_us-gaap_AdjustmentsForNewAccountingPronouncementsAxis_us-gaap_AccountingStandardsUpdate202006Member_uQc4nJTxR0OEJlucArTKOA"
      decimals="-3"
      id="Tc_0901heCH6EumfpCIDMP-ZA_6_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">12540000</us-gaap:RetainedEarningsAccumulatedDeficit>
    <us-gaap:RetainedEarningsAccumulatedDeficit
      contextRef="As_Of_12_31_2021_srt_CumulativeEffectPeriodOfAdoptionAxis_srt_CumulativeEffectPeriodOfAdoptionAdjustedBalanceMember_us-gaap_AdjustmentsForNewAccountingPronouncementsAxis_us-gaap_AccountingStandardsUpdate202006Member_LzmwhGpHdUa1ilaCnrJETw"
      decimals="-3"
      id="Tc_B18wAxOxY06aT1vlPUQzwg_6_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-668743000</us-gaap:RetainedEarningsAccumulatedDeficit>
    <us-gaap:EarningsPerShareBasic
      contextRef="Duration_1_1_2022_To_12_31_2022_srt_CumulativeEffectPeriodOfAdoptionAxis_srt_CumulativeEffectPeriodOfAdoptionAdjustedBalanceMember_us-gaap_AdjustmentsForNewAccountingPronouncementsAxis_us-gaap_AccountingStandardsUpdate202006Member_2gUZyYVNDkWsrP9u9uAsPg"
      decimals="2"
      id="Tc_9I6egmGsXUW2Inpmv36OIA_5_2"
      unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg">3.35</us-gaap:EarningsPerShareBasic>
    <us-gaap:EarningsPerShareBasic
      contextRef="Duration_1_1_2022_To_12_31_2022_srt_StatementScenarioAxis_veco_CalculatedUnderGuidanceInEffectBeforeAdoptionOfAccountingStandardsUpdate202006Member_7ScKuEZlbkunzacsANYvKA"
      decimals="2"
      id="Tc_24Hn5gwa40mayv4YC4Kb_g_5_5"
      unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg">3.15</us-gaap:EarningsPerShareBasic>
    <us-gaap:EarningsPerShareBasic
      contextRef="Duration_1_1_2022_To_12_31_2022_srt_StatementScenarioAxis_veco_DifferenceBetweenGuidanceInEffectBeforeAndAfterAccountingStandardsUpdate202006Member_us-gaap_AdjustmentsForNewAccountingPronouncementsAxis_us-gaap_AccountingStandardsUpdate202006Member_QPnJy7taY0e2YR7TvUMS8g"
      decimals="2"
      id="Tc_J806UkIMCkmKJEjMHtwJiA_5_8"
      unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg">0.20</us-gaap:EarningsPerShareBasic>
    <us-gaap:EarningsPerShareDiluted
      contextRef="Duration_1_1_2022_To_12_31_2022_srt_CumulativeEffectPeriodOfAdoptionAxis_srt_CumulativeEffectPeriodOfAdoptionAdjustedBalanceMember_us-gaap_AdjustmentsForNewAccountingPronouncementsAxis_us-gaap_AccountingStandardsUpdate202006Member_2gUZyYVNDkWsrP9u9uAsPg"
      decimals="2"
      id="Tc_aFonCwiF90mm6tScAswWrg_6_2"
      unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg">2.71</us-gaap:EarningsPerShareDiluted>
    <us-gaap:EarningsPerShareDiluted
      contextRef="Duration_1_1_2022_To_12_31_2022_srt_StatementScenarioAxis_veco_CalculatedUnderGuidanceInEffectBeforeAdoptionOfAccountingStandardsUpdate202006Member_7ScKuEZlbkunzacsANYvKA"
      decimals="2"
      id="Tc_HoTb5PFlvk6JaA7e1UwH7Q_6_5"
      unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg">2.91</us-gaap:EarningsPerShareDiluted>
    <us-gaap:EarningsPerShareDiluted
      contextRef="Duration_1_1_2022_To_12_31_2022_srt_StatementScenarioAxis_veco_DifferenceBetweenGuidanceInEffectBeforeAndAfterAccountingStandardsUpdate202006Member_us-gaap_AdjustmentsForNewAccountingPronouncementsAxis_us-gaap_AccountingStandardsUpdate202006Member_QPnJy7taY0e2YR7TvUMS8g"
      decimals="2"
      id="Tc_GsWFsZ7Z8EKBUfhiJUcoKg_6_8"
      unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg">-0.20</us-gaap:EarningsPerShareDiluted>
    <us-gaap:EarningsPerShareTextBlock
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tb_9zGW_6YnRky2K8mnjHp5vg">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Note 2 &#x2014; Income (Loss) Per Share&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Basic income (loss) per share is calculated by dividing net income (loss) by the weighted average number of shares outstanding during the period. Diluted income per share is calculated by dividing net income by the weighted average number of shares used to calculate basic income per share plus the weighted average number of common share equivalents outstanding during the period. The dilutive effect of outstanding options to purchase common stock and non-participating share-based awards is considered in diluted income per share by application of the treasury stock method. The dilutive effect of performance share units is included in diluted income per common share in the periods the performance targets have been achieved, or would have been achieved if the reporting date was the end of the contingency period. Upon the adoption of ASU 2020-06 on January 1, 2022, the Company includes the dilutive effect of shares issuable upon conversion of its Notes in the calculation of diluted income per share using the if-converted method. Prior to the adoption of ASU 2020-06, based on the Company&#x2019;s ability and intent to settle the principal amount of its convertible senior notes in cash, and the excess of the principal portion in shares of its common stock, the Company accounted for the conversion spread using the treasury stock method, and the shares issuable upon conversion of the Notes were not included in the calculation of diluted earnings per share except to the extent that the conversion value of the Notes exceeds their principal amount and if the effect would be dilutive. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The computations of basic and diluted income (loss) per share for the years ended December 31, 2022, 2021, and 2020 are as follows:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:61.69%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:33.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;For the year ended December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.54%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.54%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.54%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="11" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:33.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in thousands, except per share amounts)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Numerator: &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Net income&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 166,942&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 26,038&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (8,391)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Interest expense associated with convertible notes&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 10,832&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Net income available to common shareholders&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 177,774&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 26,038&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (8,391)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Denominator:&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Basic weighted average shares outstanding&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 49,906&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 49,073&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 48,362&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Effect of potentially dilutive share-based awards&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 734&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 1,090&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Dilutive effect of convertible notes &lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 14,967&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 3,480&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Diluted weighted average shares outstanding&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 65,607&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 53,643&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 48,362&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Net income per common share:&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Basic&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 3.35&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 0.53&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (0.17)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Diluted&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 2.71&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 0.49&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (0.17)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Unvested participating shares excluded from basic weighted average shares outstanding since the securityholders are not obligated to fund losses&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 6&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 20&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:61.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Common share equivalents excluded from the diluted weighted average shares outstanding since the Company incurred a net loss and their effect would be antidilutive&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 947&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Potentially dilutive shares excluded from the diluted calculation as their effect would be antidilutive&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 815&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 456&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 923&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:61.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Maximum potential shares to be issued for settlement of the convertible notes excluded from the diluted calculation as their effect would be antidilutive &lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 8,421&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 17,753&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</us-gaap:EarningsPerShareTextBlock>
    <us-gaap:ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tb_oW41jNDYR0WCkb5kev8Cuw">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:61.69%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:33.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;For the year ended December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.54%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.54%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.54%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="11" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:33.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in thousands, except per share amounts)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Numerator: &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Net income&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 166,942&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 26,038&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (8,391)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Interest expense associated with convertible notes&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 10,832&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Net income available to common shareholders&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 177,774&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 26,038&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (8,391)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Denominator:&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Basic weighted average shares outstanding&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 49,906&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 49,073&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 48,362&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Effect of potentially dilutive share-based awards&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 734&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 1,090&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Dilutive effect of convertible notes &lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 14,967&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 3,480&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Diluted weighted average shares outstanding&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 65,607&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 53,643&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 48,362&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Net income per common share:&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Basic&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 3.35&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 0.53&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (0.17)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Diluted&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 2.71&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 0.49&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (0.17)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Unvested participating shares excluded from basic weighted average shares outstanding since the securityholders are not obligated to fund losses&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 6&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 20&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:61.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Common share equivalents excluded from the diluted weighted average shares outstanding since the Company incurred a net loss and their effect would be antidilutive&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 947&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Potentially dilutive shares excluded from the diluted calculation as their effect would be antidilutive&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 815&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 456&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 923&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:61.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Maximum potential shares to be issued for settlement of the convertible notes excluded from the diluted calculation as their effect would be antidilutive &lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 8,421&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 17,753&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;</us-gaap:ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock>
    <us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_KxJZ60pjjUyjbP7OSHoLrw_5_4"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">166942000</us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic>
    <us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_eP6JURry4UescdG3wxwAHA_5_7"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">26038000</us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic>
    <us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_ayRy7wTmokem1VwMesdbQQ_5_10"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-8391000</us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic>
    <us-gaap:InterestOnConvertibleDebtNetOfTax
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_U4eGKWgjwEKUN4q6_GWoBQ_6_4"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">10832000</us-gaap:InterestOnConvertibleDebtNetOfTax>
    <us-gaap:NetIncomeLossAvailableToCommonStockholdersDiluted
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc__9lLVynr2UOYOORO_r37EA_7_4"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">177774000</us-gaap:NetIncomeLossAvailableToCommonStockholdersDiluted>
    <us-gaap:NetIncomeLossAvailableToCommonStockholdersDiluted
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_OYtxWLSjf0uqm49Yd0W9iA_7_7"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">26038000</us-gaap:NetIncomeLossAvailableToCommonStockholdersDiluted>
    <us-gaap:NetIncomeLossAvailableToCommonStockholdersDiluted
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_1CSzqFTaQ0OwRIlrRI4z4w_7_10"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-8391000</us-gaap:NetIncomeLossAvailableToCommonStockholdersDiluted>
    <us-gaap:WeightedAverageNumberOfSharesOutstandingBasic
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_-c5hgI8cp0KbYWIQ3YJIYQ_10_4"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">49906000</us-gaap:WeightedAverageNumberOfSharesOutstandingBasic>
    <us-gaap:WeightedAverageNumberOfSharesOutstandingBasic
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_a6OwfCH6GEqwRo2tBSk_7w_10_7"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">49073000</us-gaap:WeightedAverageNumberOfSharesOutstandingBasic>
    <us-gaap:WeightedAverageNumberOfSharesOutstandingBasic
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_NbzaG2vf10KiQadMcy_CuA_10_10"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">48362000</us-gaap:WeightedAverageNumberOfSharesOutstandingBasic>
    <us-gaap:WeightedAverageNumberDilutedSharesOutstandingAdjustment
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_JRDcJX00AEWhy5gOz4aydA_11_4"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">734000</us-gaap:WeightedAverageNumberDilutedSharesOutstandingAdjustment>
    <us-gaap:WeightedAverageNumberDilutedSharesOutstandingAdjustment
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_I60jGTQ8FU2eBwZKjGTxng_11_7"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">1090000</us-gaap:WeightedAverageNumberDilutedSharesOutstandingAdjustment>
    <us-gaap:IncrementalCommonSharesAttributableToConversionOfDebtSecurities
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_tRQ1vxqZa0mwdj1JZSdB3Q_12_4"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">14967000</us-gaap:IncrementalCommonSharesAttributableToConversionOfDebtSecurities>
    <us-gaap:IncrementalCommonSharesAttributableToConversionOfDebtSecurities
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_ZJtgFpUTXEqyGIOvLA-J9Q_12_7"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">3480000</us-gaap:IncrementalCommonSharesAttributableToConversionOfDebtSecurities>
    <us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_WNaVogVaNUqKWLqvvvpwbg_13_4"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">65607000</us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding>
    <us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_koXO92L580Oh-tPFEvPkbg_13_7"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">53643000</us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding>
    <us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_Ii1X4TZg3UiNKGbGz07Fyw_13_10"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">48362000</us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding>
    <us-gaap:EarningsPerShareBasic
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="2"
      id="Tc_P1w5NkcF0kORYx0E4l2yHw_16_4"
      unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg">3.35</us-gaap:EarningsPerShareBasic>
    <us-gaap:EarningsPerShareBasic
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="2"
      id="Tc_JzzRGPixGkyZM78bZas7qg_16_7"
      unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg">0.53</us-gaap:EarningsPerShareBasic>
    <us-gaap:EarningsPerShareBasic
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="2"
      id="Tc_uunGbfCZt02_MO7aSUe_yQ_16_10"
      unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg">-0.17</us-gaap:EarningsPerShareBasic>
    <us-gaap:EarningsPerShareDiluted
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="2"
      id="Tc_t1m4Nfot4EWtXroW1YiGYQ_17_4"
      unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg">2.71</us-gaap:EarningsPerShareDiluted>
    <us-gaap:EarningsPerShareDiluted
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="2"
      id="Tc_QigCxvTatUWlfqMgSefktQ_17_7"
      unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg">0.49</us-gaap:EarningsPerShareDiluted>
    <us-gaap:EarningsPerShareDiluted
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="2"
      id="Tc_40o_1ViWIkm8GF1Y8lrvoA_17_10"
      unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg">-0.17</us-gaap:EarningsPerShareDiluted>
    <veco:SecuritiesExcludedFromComputationOfBasicEarningsPerShareAmount
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_Qw-aanRFukykIHcj7sNtqg_19_7"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">6000</veco:SecuritiesExcludedFromComputationOfBasicEarningsPerShareAmount>
    <veco:SecuritiesExcludedFromComputationOfBasicEarningsPerShareAmount
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_Pe5cozVrgEmKqHIkKTuvCg_19_10"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">20000</veco:SecuritiesExcludedFromComputationOfBasicEarningsPerShareAmount>
    <us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount
      contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_veco_CommonStockEquivalentsMember_GgBN3cvDTE-byDYqs9wG7A"
      decimals="-3"
      id="Tc_FArN-J3zlEuU6r3_Q-_QSg_20_10"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">947000</us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount>
    <us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_veco_PotentiallyDilutiveSharesMember_Xh0mJGtCjkizBLR7chyGyg"
      decimals="-3"
      id="Tc_Mi9p7nLWoEiAffng4bquBw_21_4"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">815000</us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount>
    <us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount
      contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_veco_PotentiallyDilutiveSharesMember_TpPdreQLc0uaUnxJXzBvZA"
      decimals="-3"
      id="Tc_w5sRqScseEWgcPFIxnwRZA_21_7"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">456000</us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount>
    <us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount
      contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_veco_PotentiallyDilutiveSharesMember_rTgo9ZGu6EWujc23LmjRcw"
      decimals="-3"
      id="Tc_9GVanpUHH0SSrYxQmGww2Q_21_10"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">923000</us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount>
    <us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount
      contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_us-gaap_ConvertibleDebtMember_B4QzNEW5AEKairiU-IKfGw"
      decimals="-3"
      id="Tc_OGX2d2ALlUS6SVKCWdCeag_22_7"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">8421000</us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount>
    <us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount
      contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_us-gaap_ConvertibleDebtMember_MuNBTSuoqkKGYpc0H0iPXw"
      decimals="-3"
      id="Tc_eux-LrEl9kWGyDy70CMjfA_22_10"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">17753000</us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount>
    <us-gaap:FairValueDisclosuresTextBlock
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tb_t15Q6w-RSkOctWUc-YL4sw">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Note 3 &#x2014; Fair Value Measurements&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Fair value is the price that would be received for an asset or the amount paid to transfer a liability in an orderly transaction between market participants. The Company is required to classify certain assets and liabilities based on the following fair value hierarchy:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"&gt;&lt;tr&gt;&lt;td style="width:18pt;"/&gt;&lt;td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;"&gt;&#x25cf;&lt;/td&gt;&lt;td style="padding:0pt;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;Level 1: Quoted prices in active markets that are unadjusted and accessible at the measurement date for identical, unrestricted assets or liabilities;&lt;/span&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"&gt;&lt;tr&gt;&lt;td style="width:18pt;"/&gt;&lt;td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;"&gt;&#x25cf;&lt;/td&gt;&lt;td style="padding:0pt;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;Level 2: Quoted prices for identical assets and liabilities in markets that are not active, quoted prices for similar assets and liabilities in active markets or financial instruments for which significant inputs are observable, either directly or indirectly; and&lt;/span&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"&gt;&lt;tr&gt;&lt;td style="width:18pt;"/&gt;&lt;td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;"&gt;&#x25cf;&lt;/td&gt;&lt;td style="padding:0pt;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;Level 3: Prices or valuations that require inputs that are both significant to the fair value measurement and unobservable.&lt;/span&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;A financial instrument&#x2019;s level within the fair value hierarchy is based on the lowest level of any input that is significant to the fair value measurement. The Company has evaluated the estimated fair value of financial instruments using available market information and valuations as provided by third-party sources. The use of different market assumptions or estimation methodologies could have a significant effect on the estimated fair value amounts.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The following table presents the Company&#x2019;s assets that were measured at fair value on a recurring basis at December 31, 2022 and 2021:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:57.19%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.17%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.56%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.79%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.56%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.2%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.84%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:8.88%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Level&#160;1&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.11%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Level&#160;2&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.88%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Level&#160;3&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.17%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="13" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:40.63%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.19%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, 2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.56%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.56%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.84%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;&lt;b style="font-weight:bold;"&gt;Cash equivalents&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.79%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.19%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Certificate of deposits and time deposits&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.56%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 61,135&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.56%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.84%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 61,135&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Money market cash&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 405&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.79%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 405&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.19%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.56%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 61,540&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.56%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.84%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 61,540&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;&lt;b style="font-weight:bold;"&gt;Short-term investments&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.79%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.19%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;U.S. treasuries&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.56%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 62,849&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.56%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.84%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 62,849&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Government agency securities&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.79%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 27,366&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 27,366&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.19%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Corporate debt&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.56%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 41,591&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.56%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.84%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 41,591&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Commercial paper&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.79%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 15,682&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 15,682&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.19%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.56%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 62,849&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 84,639&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.56%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.84%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 147,488&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 18pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;margin-left:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.79%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.19%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, 2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.56%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.56%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.84%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;&lt;b style="font-weight:bold;"&gt;Cash equivalents&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.79%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.19%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Certificate of deposits and time deposits&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.56%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 41,544&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.56%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.84%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 41,544&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Money market cash&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 121&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.79%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 121&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.19%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.56%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 41,665&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.56%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.84%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 41,665&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;&lt;b style="font-weight:bold;"&gt;Short-term investments&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.79%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.19%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;U.S. treasuries&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.56%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 51,095&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.56%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.84%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 51,095&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Government agency securities&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.79%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 12,052&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 12,052&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.19%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Corporate debt&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.56%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 40,035&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.56%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.84%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 40,035&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Commercial paper&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.79%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 999&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 999&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.19%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.56%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 51,095&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 53,086&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.56%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.84%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 104,181&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The Company&#x2019;s investments classified as Level 1 are based on quoted prices that are available in active markets, as well as certificates of deposits and time deposits that are classified as Level 1 due to their short-term nature. The Company&#x2019;s investments classified as Level 2 are valued using observable inputs to quoted market prices, benchmark yields, reported trades, broker/dealer quotes, or alternative pricing sources with reasonable levels of price transparency.&lt;/p&gt;</us-gaap:FairValueDisclosuresTextBlock>
    <us-gaap:FairValueAssetsMeasuredOnRecurringBasisTextBlock
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tb_nNC4AERNpEK0fG4Ujm4qcg">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:57.19%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.17%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.56%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.79%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.56%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.2%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.84%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:8.88%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Level&#160;1&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.11%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Level&#160;2&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.88%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Level&#160;3&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.17%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="13" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:40.63%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.19%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, 2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.56%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.56%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.84%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;&lt;b style="font-weight:bold;"&gt;Cash equivalents&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.79%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.19%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Certificate of deposits and time deposits&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.56%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 61,135&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.56%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.84%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 61,135&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Money market cash&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 405&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.79%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 405&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.19%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.56%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 61,540&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.56%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.84%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 61,540&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;&lt;b style="font-weight:bold;"&gt;Short-term investments&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.79%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.19%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;U.S. treasuries&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.56%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 62,849&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.56%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.84%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 62,849&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Government agency securities&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.79%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 27,366&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 27,366&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.19%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Corporate debt&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.56%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 41,591&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.56%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.84%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 41,591&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Commercial paper&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.79%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 15,682&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 15,682&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.19%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.56%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 62,849&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 84,639&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.56%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.84%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 147,488&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 18pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;margin-left:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.79%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.19%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, 2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.56%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.56%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.84%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;&lt;b style="font-weight:bold;"&gt;Cash equivalents&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.79%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.19%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Certificate of deposits and time deposits&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.56%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 41,544&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.56%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.84%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 41,544&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Money market cash&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 121&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.79%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 121&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.19%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.56%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 41,665&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.56%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.84%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 41,665&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;&lt;b style="font-weight:bold;"&gt;Short-term investments&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.79%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.19%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;U.S. treasuries&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.56%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 51,095&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.56%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.84%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 51,095&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Government agency securities&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.79%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 12,052&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 12,052&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.19%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Corporate debt&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.56%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 40,035&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.56%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.84%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 40,035&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Commercial paper&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.79%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 999&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 999&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.19%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.56%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 51,095&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 53,086&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.56%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.84%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 104,181&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</us-gaap:FairValueAssetsMeasuredOnRecurringBasisTextBlock>
    <veco:CashEquivalentsFairValueDisclosure
      contextRef="As_Of_12_31_2022_us-gaap_CashAndCashEquivalentsAxis_veco_CertificateOfDepositsAndTimeDepositsMember_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_kb7en8Al0UeyY-BwVRymSQ"
      decimals="-3"
      id="Tc_DsJ3-eKTM0mbEw69wS9mKQ_5_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">61135000</veco:CashEquivalentsFairValueDisclosure>
    <veco:CashEquivalentsFairValueDisclosure
      contextRef="As_Of_12_31_2022_us-gaap_CashAndCashEquivalentsAxis_veco_CertificateOfDepositsAndTimeDepositsMember_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_Tl2Z9QaK_katKWTLd_NfjQ"
      decimals="-3"
      id="Tc_zCgFUmoXrkWWMGHANDF17w_5_12"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">61135000</veco:CashEquivalentsFairValueDisclosure>
    <veco:CashEquivalentsFairValueDisclosure
      contextRef="As_Of_12_31_2022_us-gaap_CashAndCashEquivalentsAxis_veco_MoneyMarketFundsExcludingGovernmentFundsMember_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_zBQP3bFx00C_j5nPe2GU_g"
      decimals="-3"
      id="Tc_ehZYYa0JT0eTOfNL-i-RNA_6_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">405000</veco:CashEquivalentsFairValueDisclosure>
    <veco:CashEquivalentsFairValueDisclosure
      contextRef="As_Of_12_31_2022_us-gaap_CashAndCashEquivalentsAxis_veco_MoneyMarketFundsExcludingGovernmentFundsMember_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_1N68aHrwUEeEnGG3xkF-PA"
      decimals="-3"
      id="Tc_ZCJzf55c9kek4TIWNS9XKw_6_12"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">405000</veco:CashEquivalentsFairValueDisclosure>
    <veco:CashEquivalentsFairValueDisclosure
      contextRef="As_Of_12_31_2022_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_slQOe3zyMUymTHQU819sJQ"
      decimals="-3"
      id="Tc_hYJHoFqL1UONPIumXC_25w_7_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">61540000</veco:CashEquivalentsFairValueDisclosure>
    <veco:CashEquivalentsFairValueDisclosure
      contextRef="As_Of_12_31_2022_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_S6bYObjavkCTbU5xddLx7g"
      decimals="-3"
      id="Tc_K9fc2iAYe06IVeVlaSQOOQ_7_12"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">61540000</veco:CashEquivalentsFairValueDisclosure>
    <us-gaap:InvestmentsFairValueDisclosure
      contextRef="As_Of_12_31_2022_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_USTreasurySecuritiesMember_gqJUY0xQBEKj-8bR__2AhA"
      decimals="-3"
      id="Tc_QGBEozWv5kqhXjlEo4-MMQ_9_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">62849000</us-gaap:InvestmentsFairValueDisclosure>
    <us-gaap:InvestmentsFairValueDisclosure
      contextRef="As_Of_12_31_2022_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_USTreasurySecuritiesMember_9ZKAp20askai2yy7kwBjQA"
      decimals="-3"
      id="Tc_OBdtIupn0U6kh7wI1-iC7w_9_12"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">62849000</us-gaap:InvestmentsFairValueDisclosure>
    <us-gaap:InvestmentsFairValueDisclosure
      contextRef="As_Of_12_31_2022_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel2Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_USGovernmentAgenciesDebtSecuritiesMember_xxaAnx1Ji0KImuzsRiQSeQ"
      decimals="-3"
      id="Tc_IyZv3VoR4kWO17Kj_cbWMQ_10_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">27366000</us-gaap:InvestmentsFairValueDisclosure>
    <us-gaap:InvestmentsFairValueDisclosure
      contextRef="As_Of_12_31_2022_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_USGovernmentAgenciesDebtSecuritiesMember_UBRtR4MHAE6IwJXU-LOpsg"
      decimals="-3"
      id="Tc_axCO32FUAEyaHc_AfJ8JxA_10_12"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">27366000</us-gaap:InvestmentsFairValueDisclosure>
    <us-gaap:InvestmentsFairValueDisclosure
      contextRef="As_Of_12_31_2022_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel2Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_CorporateDebtSecuritiesMember_pCHXtSXunUCFoLNO295FNQ"
      decimals="-3"
      id="Tc_Ngvp3820okev1PCgjXHM-A_11_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">41591000</us-gaap:InvestmentsFairValueDisclosure>
    <us-gaap:InvestmentsFairValueDisclosure
      contextRef="As_Of_12_31_2022_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_CorporateDebtSecuritiesMember_tOjwouEBSkebr7L2IwFAlg"
      decimals="-3"
      id="Tc_SXoB4jOKXEmGSlMnlxVk6g_11_12"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">41591000</us-gaap:InvestmentsFairValueDisclosure>
    <us-gaap:InvestmentsFairValueDisclosure
      contextRef="As_Of_12_31_2022_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel2Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_CommercialPaperMember_E2AAQ-0KTE6yl5sLci37yw"
      decimals="-3"
      id="Tc_S4uP_Iy-tUKou4bMOiCj7A_12_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">15682000</us-gaap:InvestmentsFairValueDisclosure>
    <us-gaap:InvestmentsFairValueDisclosure
      contextRef="As_Of_12_31_2022_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_CommercialPaperMember_aCCI2RshmE-lyrQdT3Mkkw"
      decimals="-3"
      id="Tc_Bu9egti_9E-T7eDZk8dn1g_12_12"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">15682000</us-gaap:InvestmentsFairValueDisclosure>
    <us-gaap:InvestmentsFairValueDisclosure
      contextRef="As_Of_12_31_2022_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_slQOe3zyMUymTHQU819sJQ"
      decimals="-3"
      id="Tc_j7oOWraTrk--TImPJQk-Dw_13_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">62849000</us-gaap:InvestmentsFairValueDisclosure>
    <us-gaap:InvestmentsFairValueDisclosure
      contextRef="As_Of_12_31_2022_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel2Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_MpQSvERYmk2F8LCAdvsJeQ"
      decimals="-3"
      id="Tc_Ipkv0XLY3kCd4bGlpKczLQ_13_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">84639000</us-gaap:InvestmentsFairValueDisclosure>
    <us-gaap:InvestmentsFairValueDisclosure
      contextRef="As_Of_12_31_2022_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_S6bYObjavkCTbU5xddLx7g"
      decimals="-3"
      id="Tc_zg_Z4kJkzEmoc1hwMjfXrQ_13_12"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">147488000</us-gaap:InvestmentsFairValueDisclosure>
    <veco:CashEquivalentsFairValueDisclosure
      contextRef="As_Of_12_31_2021_us-gaap_CashAndCashEquivalentsAxis_veco_CertificateOfDepositsAndTimeDepositsMember_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_JiqTPtimWUGvvaKkaAWYdQ"
      decimals="-3"
      id="Tc_XkAw3VqtZUCi6dX1bfesOg_17_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">41544000</veco:CashEquivalentsFairValueDisclosure>
    <veco:CashEquivalentsFairValueDisclosure
      contextRef="As_Of_12_31_2021_us-gaap_CashAndCashEquivalentsAxis_veco_CertificateOfDepositsAndTimeDepositsMember_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_ytqgmgI0iU2Mff9bwHjo2A"
      decimals="-3"
      id="Tc_gCUTK4SsgkmI1JWFgM92Kw_17_12"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">41544000</veco:CashEquivalentsFairValueDisclosure>
    <veco:CashEquivalentsFairValueDisclosure
      contextRef="As_Of_12_31_2021_us-gaap_CashAndCashEquivalentsAxis_veco_MoneyMarketFundsExcludingGovernmentFundsMember_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_BYRwCfp1Q0WYuXQEj6V_jg"
      decimals="-3"
      id="Tc_co8OsxDgPU6Qvcel4tbxXw_18_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">121000</veco:CashEquivalentsFairValueDisclosure>
    <veco:CashEquivalentsFairValueDisclosure
      contextRef="As_Of_12_31_2021_us-gaap_CashAndCashEquivalentsAxis_veco_MoneyMarketFundsExcludingGovernmentFundsMember_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_suw4EE81r06AU6N-K20ykg"
      decimals="-3"
      id="Tc_wxD8T3Qs9UeiEZxFQMYEvA_18_12"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">121000</veco:CashEquivalentsFairValueDisclosure>
    <veco:CashEquivalentsFairValueDisclosure
      contextRef="As_Of_12_31_2021_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_XRUs_X2KUEOrNQc5SrQvag"
      decimals="-3"
      id="Tc_6DxBDFpb_EeO1n4ptCCQlQ_19_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">41665000</veco:CashEquivalentsFairValueDisclosure>
    <veco:CashEquivalentsFairValueDisclosure
      contextRef="As_Of_12_31_2021_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_8Y4uZzPOeUWzAGMaSM_zrg"
      decimals="-3"
      id="Tc_eKsKyfXeuECMWLJ3Hk87XQ_19_12"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">41665000</veco:CashEquivalentsFairValueDisclosure>
    <us-gaap:InvestmentsFairValueDisclosure
      contextRef="As_Of_12_31_2021_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_USTreasurySecuritiesMember_Gjv_stk2ZEqEp1eNGnsQ3w"
      decimals="-3"
      id="Tc_4nC4X-mK8U-C6fK09uEx6w_21_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">51095000</us-gaap:InvestmentsFairValueDisclosure>
    <us-gaap:InvestmentsFairValueDisclosure
      contextRef="As_Of_12_31_2021_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_USTreasurySecuritiesMember_YW8DFld3rUeEJWklgEoDkQ"
      decimals="-3"
      id="Tc_qW0PlOcMlE2gyLB9EcPG9A_21_12"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">51095000</us-gaap:InvestmentsFairValueDisclosure>
    <us-gaap:InvestmentsFairValueDisclosure
      contextRef="As_Of_12_31_2021_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel2Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_USGovernmentAgenciesDebtSecuritiesMember_0qo4lngQLE67OuHA6y1wdw"
      decimals="-3"
      id="Tc__ppnGYYxKk2kSmAGYp7upg_22_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">12052000</us-gaap:InvestmentsFairValueDisclosure>
    <us-gaap:InvestmentsFairValueDisclosure
      contextRef="As_Of_12_31_2021_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_USGovernmentAgenciesDebtSecuritiesMember_6yQv3e_ka0i1bTkFTYicJg"
      decimals="-3"
      id="Tc_zAcBk5VX8EaxrkUhb65cWg_22_12"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">12052000</us-gaap:InvestmentsFairValueDisclosure>
    <us-gaap:InvestmentsFairValueDisclosure
      contextRef="As_Of_12_31_2021_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel2Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_CorporateDebtSecuritiesMember_GL57sZXyr0aGVeV1asM5mg"
      decimals="-3"
      id="Tc_KuHix0u1qUu1lIvsj1F6JQ_23_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">40035000</us-gaap:InvestmentsFairValueDisclosure>
    <us-gaap:InvestmentsFairValueDisclosure
      contextRef="As_Of_12_31_2021_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_CorporateDebtSecuritiesMember_eczwLoIqY06OGH6ptbktWg"
      decimals="-3"
      id="Tc_c0oF52EcMUC8JtNZZV3aGQ_23_12"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">40035000</us-gaap:InvestmentsFairValueDisclosure>
    <us-gaap:InvestmentsFairValueDisclosure
      contextRef="As_Of_12_31_2021_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel2Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_CommercialPaperMember_E29zWH3490-7kJgvF-1hDg"
      decimals="-3"
      id="Tc_W--o8k86pk2dZm9DOY91zw_24_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">999000</us-gaap:InvestmentsFairValueDisclosure>
    <us-gaap:InvestmentsFairValueDisclosure
      contextRef="As_Of_12_31_2021_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_us-gaap_FinancialInstrumentAxis_us-gaap_CommercialPaperMember_i5JJkpgtSk6kLg_SGNah8A"
      decimals="-3"
      id="Tc_fcxTzI_m_EuV89mgBiNtZQ_24_12"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">999000</us-gaap:InvestmentsFairValueDisclosure>
    <us-gaap:InvestmentsFairValueDisclosure
      contextRef="As_Of_12_31_2021_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_XRUs_X2KUEOrNQc5SrQvag"
      decimals="-3"
      id="Tc_5IAXIxWWskiMKybia-OVgw_25_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">51095000</us-gaap:InvestmentsFairValueDisclosure>
    <us-gaap:InvestmentsFairValueDisclosure
      contextRef="As_Of_12_31_2021_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel2Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_Fx3H_ZpdrUmlZhkBxxb4ow"
      decimals="-3"
      id="Tc_dtaD-kxHdUu-R-d7itrMtg_25_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">53086000</us-gaap:InvestmentsFairValueDisclosure>
    <us-gaap:InvestmentsFairValueDisclosure
      contextRef="As_Of_12_31_2021_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_8Y4uZzPOeUWzAGMaSM_zrg"
      decimals="-3"
      id="Tc_t_yoQaOvGEmWsEsILHTjvA_25_12"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">104181000</us-gaap:InvestmentsFairValueDisclosure>
    <us-gaap:InvestmentsInDebtAndMarketableEquitySecuritiesAndCertainTradingAssetsDisclosureTextBlock
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tb_vS98dDZ_vU28KmzY-2ArGQ">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Note 4 &#x2014; Investments&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;At December 31, 2022 and 2021 the amortized cost and fair value of marketable securities, which are included in &#x201c;Short-term investments&#x201d; on the Consolidated Balance Sheets, were as follows:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.03%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.52%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Gross&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.52%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Gross&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Amortized&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.52%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Unrealized&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.52%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Unrealized&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Estimated&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Cost&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Gains&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Losses&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Fair&#160;Value&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="13" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:41.96%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.91%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, 2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;U.S. treasuries&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 63,331&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (482)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 62,849&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.91%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Government agency securities&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 27,464&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (98)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 27,366&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Corporate debt&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 42,006&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (415)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 41,591&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.91%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Commercial paper&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 15,682&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.03%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 15,682&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:55.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 148,483&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (995)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 147,488&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:55.91%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 12pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;margin-left:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, 2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.91%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;U.S. treasuries&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 51,269&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (174)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 51,095&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Government agency securities&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 12,075&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (23)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 12,052&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.91%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Corporate debt&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 40,169&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (134)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 40,035&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Commercial paper&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 999&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 999&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:55.91%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 104,512&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (331)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 104,181&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Available-for-sale securities in a loss position at December 31, 2022 and 2021 were as follows:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:39.84%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.69%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.71%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.71%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:39.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:37.77%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, 2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:19.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, 2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:39.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:18.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Continuous Loss Position &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:18.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Continuous Loss Position &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:19.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Continuous Loss Position &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:39.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:18.05%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;for Less than 12 Months&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:18.07%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;for 12 Months or More&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:19.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;for Less than 12 Months&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:39.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Gross&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Gross&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Gross&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:39.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Estimated&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Unrealized&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Estimated&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Unrealized&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Estimated&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Unrealized&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:39.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Fair&#160;Value&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.91%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Losses&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Fair&#160;Value&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Losses&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Fair Value&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Losses&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="19" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:39.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="16" style="vertical-align:bottom;white-space:nowrap;width:57.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:39.84%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;U.S. treasuries&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.92%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 39,791&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (84)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.92%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 23,057&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.71%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (398)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 51,095&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.71%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (174)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:39.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Government agency securities&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 22,528&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (86)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 4,838&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (12)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 12,052&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (23)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:39.84%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Corporate debt&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.92%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 19,693&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.69%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (138)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.92%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 21,898&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.71%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (277)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 40,035&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.71%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (134)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:39.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.92%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 82,012&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.69%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (308)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.92%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 49,793&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.71%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (687)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 103,182&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.71%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (331)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;At December 31, 2021, there were no short-term investments that had been in a continuous loss position for more than 12 months.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;background:#ffff00;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="background:#ffffff;"&gt;The contractual maturities of securities classified as available-for-sale at December 31, 2022 were as follows:&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;background:#ffffff;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:72.18%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.41%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.39%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:72.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:25.01%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, 2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:72.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.11%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Amortized&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Estimated&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:72.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.11%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Cost&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Fair&#160;Value&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="7" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:72.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="4" style="vertical-align:bottom;white-space:nowrap;width:23.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:72.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Due in one year or less&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.8%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.41%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 145,885&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.8%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.39%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 144,959&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:72.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Due after one year through two years&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.41%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 2,598&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.39%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 2,529&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:72.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.8%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.41%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 148,483&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.8%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.39%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 147,488&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;background:#ffffff;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Actual maturities may differ from contractual maturities because borrowers may have the right to call or prepay obligations with or without call or prepayment penalties. The realized gains or losses for the years ended December 31, 2022, 2021, and 2020 were immaterial.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;Other Investments&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Veeco has an ownership interest of less than 20% in a non-marketable investment in a separate entity, with a carrying value of $2.0 million at December 31, 2022 and 2021. The Company does not exert significant influence over this entity. This equity investment does not have a readily observable market price, and therefore the Company has elected to measure this investment at cost, adjusted for changes in observable market prices minus impairment. The investment is included in &#x201c;Other assets&#x201d; on the Consolidated Balance Sheets. The investment is subject to periodic impairment reviews which require judgment. The analyses include assessments of the companies&#x2019; financial condition, the business outlooks for their products and technologies, their projected results and cash flows, business valuation indications from recent rounds of financing, the likelihood of obtaining subsequent rounds of financing, and the impact of equity preferences held by Veeco relative to other investors. During the year ended December 31, 2021, the Company identified impairment indicators on the Company&#x2019;s investment, and recorded a non-cash impairment charge of $1.0 million. This impairment charge was included in &#x201c;Other income (expense), net&#x201d; in the Consolidated Statement of Operations. &lt;/p&gt;</us-gaap:InvestmentsInDebtAndMarketableEquitySecuritiesAndCertainTradingAssetsDisclosureTextBlock>
    <us-gaap:ScheduleOfAvailableForSaleSecuritiesReconciliationTableTextBlock
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tb_qplgaLQswU6NMFrHfplUBQ">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.03%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.52%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Gross&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.52%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Gross&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Amortized&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.52%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Unrealized&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.52%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Unrealized&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Estimated&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Cost&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Gains&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Losses&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Fair&#160;Value&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="13" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:41.96%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.91%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, 2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;U.S. treasuries&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 63,331&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (482)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 62,849&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.91%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Government agency securities&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 27,464&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (98)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 27,366&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Corporate debt&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 42,006&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (415)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 41,591&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.91%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Commercial paper&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 15,682&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.03%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 15,682&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:55.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 148,483&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (995)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 147,488&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:55.91%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 12pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;margin-left:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, 2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.91%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;U.S. treasuries&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 51,269&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (174)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 51,095&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Government agency securities&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 12,075&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (23)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 12,052&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.91%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Corporate debt&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 40,169&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (134)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 40,035&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Commercial paper&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 999&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 999&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:55.91%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 104,512&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.26%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (331)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 104,181&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</us-gaap:ScheduleOfAvailableForSaleSecuritiesReconciliationTableTextBlock>
    <us-gaap:AvailableForSaleDebtSecuritiesAmortizedCostBasis
      contextRef="As_Of_12_31_2022_us-gaap_FinancialInstrumentAxis_us-gaap_USTreasurySecuritiesMember_LradD4ylt0uzAESlET9k1A"
      decimals="-3"
      id="Tc_2z-9eESlAEO_Yz6iMzC3Gw_6_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">63331000</us-gaap:AvailableForSaleDebtSecuritiesAmortizedCostBasis>
    <us-gaap:AvailableForSaleDebtSecuritiesAccumulatedGrossUnrealizedLossBeforeTax
      contextRef="As_Of_12_31_2022_us-gaap_FinancialInstrumentAxis_us-gaap_USTreasurySecuritiesMember_LradD4ylt0uzAESlET9k1A"
      decimals="-3"
      id="Tc_KN1oex8jTUyC1wNLC8AbKw_6_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">482000</us-gaap:AvailableForSaleDebtSecuritiesAccumulatedGrossUnrealizedLossBeforeTax>
    <us-gaap:AvailableForSaleSecuritiesDebtSecurities
      contextRef="As_Of_12_31_2022_us-gaap_FinancialInstrumentAxis_us-gaap_USTreasurySecuritiesMember_LradD4ylt0uzAESlET9k1A"
      decimals="-3"
      id="Tc_mestZeVKF0qc9klXmy1I9A_6_12"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">62849000</us-gaap:AvailableForSaleSecuritiesDebtSecurities>
    <us-gaap:AvailableForSaleDebtSecuritiesAmortizedCostBasis
      contextRef="As_Of_12_31_2022_us-gaap_FinancialInstrumentAxis_us-gaap_USGovernmentAgenciesDebtSecuritiesMember_nuwqJ_OpWE6z8iWOh2BzFg"
      decimals="-3"
      id="Tc_zMQCY8xtMUSV90zrK0Ehdw_7_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">27464000</us-gaap:AvailableForSaleDebtSecuritiesAmortizedCostBasis>
    <us-gaap:AvailableForSaleDebtSecuritiesAccumulatedGrossUnrealizedLossBeforeTax
      contextRef="As_Of_12_31_2022_us-gaap_FinancialInstrumentAxis_us-gaap_USGovernmentAgenciesDebtSecuritiesMember_nuwqJ_OpWE6z8iWOh2BzFg"
      decimals="-3"
      id="Tc_-cuGD-sSWkKiaVktBc-5Nw_7_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">98000</us-gaap:AvailableForSaleDebtSecuritiesAccumulatedGrossUnrealizedLossBeforeTax>
    <us-gaap:AvailableForSaleSecuritiesDebtSecurities
      contextRef="As_Of_12_31_2022_us-gaap_FinancialInstrumentAxis_us-gaap_USGovernmentAgenciesDebtSecuritiesMember_nuwqJ_OpWE6z8iWOh2BzFg"
      decimals="-3"
      id="Tc_0cAn9x7owU2CBmf76ridbg_7_12"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">27366000</us-gaap:AvailableForSaleSecuritiesDebtSecurities>
    <us-gaap:AvailableForSaleDebtSecuritiesAmortizedCostBasis
      contextRef="As_Of_12_31_2022_us-gaap_FinancialInstrumentAxis_us-gaap_CorporateDebtSecuritiesMember_W6dvtbJBXEa50pS4c58icg"
      decimals="-3"
      id="Tc_McNzooOTPUS5wkrOvQIKwA_8_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">42006000</us-gaap:AvailableForSaleDebtSecuritiesAmortizedCostBasis>
    <us-gaap:AvailableForSaleDebtSecuritiesAccumulatedGrossUnrealizedLossBeforeTax
      contextRef="As_Of_12_31_2022_us-gaap_FinancialInstrumentAxis_us-gaap_CorporateDebtSecuritiesMember_W6dvtbJBXEa50pS4c58icg"
      decimals="-3"
      id="Tc_xoKaOuoXS02n-1B5VFAhRg_8_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">415000</us-gaap:AvailableForSaleDebtSecuritiesAccumulatedGrossUnrealizedLossBeforeTax>
    <us-gaap:AvailableForSaleSecuritiesDebtSecurities
      contextRef="As_Of_12_31_2022_us-gaap_FinancialInstrumentAxis_us-gaap_CorporateDebtSecuritiesMember_W6dvtbJBXEa50pS4c58icg"
      decimals="-3"
      id="Tc_OG4zQTnOHUWJR126wufP8A_8_12"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">41591000</us-gaap:AvailableForSaleSecuritiesDebtSecurities>
    <us-gaap:AvailableForSaleDebtSecuritiesAmortizedCostBasis
      contextRef="As_Of_12_31_2022_us-gaap_FinancialInstrumentAxis_us-gaap_CommercialPaperMember_v9BAMIwwwk2Oy_ebY3ejrw"
      decimals="-3"
      id="Tc_LgGOpNRyAkStM3Te_4bzjQ_9_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">15682000</us-gaap:AvailableForSaleDebtSecuritiesAmortizedCostBasis>
    <us-gaap:AvailableForSaleSecuritiesDebtSecurities
      contextRef="As_Of_12_31_2022_us-gaap_FinancialInstrumentAxis_us-gaap_CommercialPaperMember_v9BAMIwwwk2Oy_ebY3ejrw"
      decimals="-3"
      id="Tc_mHQdVTy29Uaw9vK_Rklu6Q_9_12"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">15682000</us-gaap:AvailableForSaleSecuritiesDebtSecurities>
    <us-gaap:AvailableForSaleDebtSecuritiesAmortizedCostBasis
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_BxVcIVvc2UaMBzSplpQI2A_10_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">148483000</us-gaap:AvailableForSaleDebtSecuritiesAmortizedCostBasis>
    <us-gaap:AvailableForSaleDebtSecuritiesAccumulatedGrossUnrealizedLossBeforeTax
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_9rZU9Lcf0kC4QQRSs3uhsQ_10_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">995000</us-gaap:AvailableForSaleDebtSecuritiesAccumulatedGrossUnrealizedLossBeforeTax>
    <us-gaap:AvailableForSaleSecuritiesDebtSecurities
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_arEfRKgZgEeHY33MezkJBA_10_12"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">147488000</us-gaap:AvailableForSaleSecuritiesDebtSecurities>
    <us-gaap:AvailableForSaleDebtSecuritiesAmortizedCostBasis
      contextRef="As_Of_12_31_2021_us-gaap_FinancialInstrumentAxis_us-gaap_USTreasurySecuritiesMember_gJhgKG5MIk-r_VdVxod5_g"
      decimals="-3"
      id="Tc_e3bidCjdCUyIJQHPJ0wuvA_13_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">51269000</us-gaap:AvailableForSaleDebtSecuritiesAmortizedCostBasis>
    <us-gaap:AvailableForSaleDebtSecuritiesAccumulatedGrossUnrealizedLossBeforeTax
      contextRef="As_Of_12_31_2021_us-gaap_FinancialInstrumentAxis_us-gaap_USTreasurySecuritiesMember_gJhgKG5MIk-r_VdVxod5_g"
      decimals="-3"
      id="Tc_mbmR_Pw1qkeWIZRTh7kBfA_13_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">174000</us-gaap:AvailableForSaleDebtSecuritiesAccumulatedGrossUnrealizedLossBeforeTax>
    <us-gaap:AvailableForSaleSecuritiesDebtSecurities
      contextRef="As_Of_12_31_2021_us-gaap_FinancialInstrumentAxis_us-gaap_USTreasurySecuritiesMember_gJhgKG5MIk-r_VdVxod5_g"
      decimals="-3"
      id="Tc_m42o3dMnBkantpqbNEzQRQ_13_12"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">51095000</us-gaap:AvailableForSaleSecuritiesDebtSecurities>
    <us-gaap:AvailableForSaleDebtSecuritiesAmortizedCostBasis
      contextRef="As_Of_12_31_2021_us-gaap_FinancialInstrumentAxis_us-gaap_USGovernmentAgenciesDebtSecuritiesMember_qSaUfSjFAk-Go6t8v7C5Vg"
      decimals="-3"
      id="Tc_csqwbVLYEEuHLnrSEGQ_6Q_14_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">12075000</us-gaap:AvailableForSaleDebtSecuritiesAmortizedCostBasis>
    <us-gaap:AvailableForSaleDebtSecuritiesAccumulatedGrossUnrealizedLossBeforeTax
      contextRef="As_Of_12_31_2021_us-gaap_FinancialInstrumentAxis_us-gaap_USGovernmentAgenciesDebtSecuritiesMember_qSaUfSjFAk-Go6t8v7C5Vg"
      decimals="-3"
      id="Tc_xdASMSjXOUugqKkxovHtRQ_14_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">23000</us-gaap:AvailableForSaleDebtSecuritiesAccumulatedGrossUnrealizedLossBeforeTax>
    <us-gaap:AvailableForSaleSecuritiesDebtSecurities
      contextRef="As_Of_12_31_2021_us-gaap_FinancialInstrumentAxis_us-gaap_USGovernmentAgenciesDebtSecuritiesMember_qSaUfSjFAk-Go6t8v7C5Vg"
      decimals="-3"
      id="Tc__Zp4uqJ3j0iQ_igGt_n85A_14_12"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">12052000</us-gaap:AvailableForSaleSecuritiesDebtSecurities>
    <us-gaap:AvailableForSaleDebtSecuritiesAmortizedCostBasis
      contextRef="As_Of_12_31_2021_us-gaap_FinancialInstrumentAxis_us-gaap_CorporateDebtSecuritiesMember_IXDRtarETEeWv9xq-DPEYw"
      decimals="-3"
      id="Tc_wFsMOGZPHEyJ4oi8nD1Ukg_15_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">40169000</us-gaap:AvailableForSaleDebtSecuritiesAmortizedCostBasis>
    <us-gaap:AvailableForSaleDebtSecuritiesAccumulatedGrossUnrealizedLossBeforeTax
      contextRef="As_Of_12_31_2021_us-gaap_FinancialInstrumentAxis_us-gaap_CorporateDebtSecuritiesMember_IXDRtarETEeWv9xq-DPEYw"
      decimals="-3"
      id="Tc_2cqE2-8ugkObGzhWzJUZKQ_15_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">134000</us-gaap:AvailableForSaleDebtSecuritiesAccumulatedGrossUnrealizedLossBeforeTax>
    <us-gaap:AvailableForSaleSecuritiesDebtSecurities
      contextRef="As_Of_12_31_2021_us-gaap_FinancialInstrumentAxis_us-gaap_CorporateDebtSecuritiesMember_IXDRtarETEeWv9xq-DPEYw"
      decimals="-3"
      id="Tc_LWnQgBex9k2LvqVMCzUdrg_15_12"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">40035000</us-gaap:AvailableForSaleSecuritiesDebtSecurities>
    <us-gaap:AvailableForSaleDebtSecuritiesAmortizedCostBasis
      contextRef="As_Of_12_31_2021_us-gaap_FinancialInstrumentAxis_us-gaap_CommercialPaperMember_Q4aGVM4lLEKYgbV0sPLsVg"
      decimals="-3"
      id="Tc_0q1niAWsmUm4bEc9yC3Qww_16_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">999000</us-gaap:AvailableForSaleDebtSecuritiesAmortizedCostBasis>
    <us-gaap:AvailableForSaleSecuritiesDebtSecurities
      contextRef="As_Of_12_31_2021_us-gaap_FinancialInstrumentAxis_us-gaap_CommercialPaperMember_Q4aGVM4lLEKYgbV0sPLsVg"
      decimals="-3"
      id="Tc_lc4SBe_w-k6V5pwYB6uhHg_16_12"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">999000</us-gaap:AvailableForSaleSecuritiesDebtSecurities>
    <us-gaap:AvailableForSaleDebtSecuritiesAmortizedCostBasis
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_uLTitWyFxU2epjrXcnJw8g_17_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">104512000</us-gaap:AvailableForSaleDebtSecuritiesAmortizedCostBasis>
    <us-gaap:AvailableForSaleDebtSecuritiesAccumulatedGrossUnrealizedLossBeforeTax
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_QFB_8xheKka2_cp4pBPhHQ_17_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">331000</us-gaap:AvailableForSaleDebtSecuritiesAccumulatedGrossUnrealizedLossBeforeTax>
    <us-gaap:AvailableForSaleSecuritiesDebtSecurities
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_9vUg_OdQyk-Zv0Y_Mkai1w_17_12"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">104181000</us-gaap:AvailableForSaleSecuritiesDebtSecurities>
    <us-gaap:DebtSecuritiesAvailableForSaleUnrealizedLossPositionFairValueTableTextBlock
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tb_wnqG3QewE0ifpYTMV5Dh8g">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:39.84%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.69%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.71%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.71%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:39.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:37.77%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, 2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:19.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, 2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:39.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:18.05%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Continuous Loss Position &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:18.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Continuous Loss Position &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:19.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Continuous Loss Position &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:39.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:18.05%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;for Less than 12 Months&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:18.07%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;for 12 Months or More&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:19.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;for Less than 12 Months&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:39.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Gross&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Gross&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Gross&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:39.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Estimated&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Unrealized&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Estimated&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Unrealized&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Estimated&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Unrealized&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:39.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Fair&#160;Value&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.91%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Losses&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Fair&#160;Value&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Losses&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Fair Value&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Losses&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="19" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:39.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="16" style="vertical-align:bottom;white-space:nowrap;width:57.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:39.84%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;U.S. treasuries&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.92%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 39,791&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (84)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.92%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 23,057&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.71%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (398)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 51,095&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.71%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (174)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:39.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Government agency securities&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 22,528&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (86)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 4,838&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (12)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 12,052&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (23)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:39.84%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Corporate debt&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.92%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 19,693&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.69%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (138)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.92%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 21,898&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.71%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (277)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 40,035&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.71%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (134)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:39.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.92%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 82,012&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.69%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (308)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.92%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 49,793&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.71%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (687)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 103,182&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.71%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (331)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</us-gaap:DebtSecuritiesAvailableForSaleUnrealizedLossPositionFairValueTableTextBlock>
    <us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12Months
      contextRef="As_Of_12_31_2022_us-gaap_FinancialInstrumentAxis_us-gaap_USTreasurySecuritiesMember_LradD4ylt0uzAESlET9k1A"
      decimals="-3"
      id="Tc_QKivdgVbk0KQV1GN-jCz6Q_8_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">39791000</us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12Months>
    <us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12MonthsAccumulatedLoss
      contextRef="As_Of_12_31_2022_us-gaap_FinancialInstrumentAxis_us-gaap_USTreasurySecuritiesMember_LradD4ylt0uzAESlET9k1A"
      decimals="-3"
      id="Tc_byw-baNeo064gwOYE9VItg_8_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">84000</us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12MonthsAccumulatedLoss>
    <us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLonger
      contextRef="As_Of_12_31_2022_us-gaap_FinancialInstrumentAxis_us-gaap_USTreasurySecuritiesMember_LradD4ylt0uzAESlET9k1A"
      decimals="-3"
      id="Tc_w7DePxcVMUuXjFAldJcWXQ_8_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">23057000</us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLonger>
    <us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLongerAccumulatedLoss
      contextRef="As_Of_12_31_2022_us-gaap_FinancialInstrumentAxis_us-gaap_USTreasurySecuritiesMember_LradD4ylt0uzAESlET9k1A"
      decimals="-3"
      id="Tc_KmgcV0ww_UyZpNb_I9F08A_8_12"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">398000</us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLongerAccumulatedLoss>
    <us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12Months
      contextRef="As_Of_12_31_2021_us-gaap_FinancialInstrumentAxis_us-gaap_USTreasurySecuritiesMember_gJhgKG5MIk-r_VdVxod5_g"
      decimals="-3"
      id="Tc_2arw5SpZokK-5Qs1kxw-lg_8_15"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">51095000</us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12Months>
    <us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12MonthsAccumulatedLoss
      contextRef="As_Of_12_31_2021_us-gaap_FinancialInstrumentAxis_us-gaap_USTreasurySecuritiesMember_gJhgKG5MIk-r_VdVxod5_g"
      decimals="-3"
      id="Tc_MFAoDoSi9Ey-XfNrqwcEng_8_18"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">174000</us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12MonthsAccumulatedLoss>
    <us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12Months
      contextRef="As_Of_12_31_2022_us-gaap_FinancialInstrumentAxis_us-gaap_USGovernmentAgenciesDebtSecuritiesMember_nuwqJ_OpWE6z8iWOh2BzFg"
      decimals="-3"
      id="Tc_8w2ZnGFTFEeLszL44m9fQA_9_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">22528000</us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12Months>
    <us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12MonthsAccumulatedLoss
      contextRef="As_Of_12_31_2022_us-gaap_FinancialInstrumentAxis_us-gaap_USGovernmentAgenciesDebtSecuritiesMember_nuwqJ_OpWE6z8iWOh2BzFg"
      decimals="-3"
      id="Tc_uFnlcR_JD0W9pNk-yX91eQ_9_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">86000</us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12MonthsAccumulatedLoss>
    <us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLonger
      contextRef="As_Of_12_31_2022_us-gaap_FinancialInstrumentAxis_us-gaap_USGovernmentAgenciesDebtSecuritiesMember_nuwqJ_OpWE6z8iWOh2BzFg"
      decimals="-3"
      id="Tc_jBYousu3ekmzenGuhkJvVA_9_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">4838000</us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLonger>
    <us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLongerAccumulatedLoss
      contextRef="As_Of_12_31_2022_us-gaap_FinancialInstrumentAxis_us-gaap_USGovernmentAgenciesDebtSecuritiesMember_nuwqJ_OpWE6z8iWOh2BzFg"
      decimals="-3"
      id="Tc_YxMUlJYEvEi-7AYtweDRlQ_9_12"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">12000</us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLongerAccumulatedLoss>
    <us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12Months
      contextRef="As_Of_12_31_2021_us-gaap_FinancialInstrumentAxis_us-gaap_USGovernmentAgenciesDebtSecuritiesMember_qSaUfSjFAk-Go6t8v7C5Vg"
      decimals="-3"
      id="Tc_BDcILCm_PEuVlUBOkeqY_g_9_15"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">12052000</us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12Months>
    <us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12MonthsAccumulatedLoss
      contextRef="As_Of_12_31_2021_us-gaap_FinancialInstrumentAxis_us-gaap_USGovernmentAgenciesDebtSecuritiesMember_qSaUfSjFAk-Go6t8v7C5Vg"
      decimals="-3"
      id="Tc_uEgj74LzSkewkUNKZH63fQ_9_18"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">23000</us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12MonthsAccumulatedLoss>
    <us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12Months
      contextRef="As_Of_12_31_2022_us-gaap_FinancialInstrumentAxis_us-gaap_CorporateDebtSecuritiesMember_W6dvtbJBXEa50pS4c58icg"
      decimals="-3"
      id="Tc_VFHPXxILXUSvTHAuLGfB3g_10_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">19693000</us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12Months>
    <us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12MonthsAccumulatedLoss
      contextRef="As_Of_12_31_2022_us-gaap_FinancialInstrumentAxis_us-gaap_CorporateDebtSecuritiesMember_W6dvtbJBXEa50pS4c58icg"
      decimals="-3"
      id="Tc_VixDEwNYf0uIUUJcxFvCUw_10_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">138000</us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12MonthsAccumulatedLoss>
    <us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLonger
      contextRef="As_Of_12_31_2022_us-gaap_FinancialInstrumentAxis_us-gaap_CorporateDebtSecuritiesMember_W6dvtbJBXEa50pS4c58icg"
      decimals="-3"
      id="Tc_pPO19TVB70-N90cUVEFZnA_10_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">21898000</us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLonger>
    <us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLongerAccumulatedLoss
      contextRef="As_Of_12_31_2022_us-gaap_FinancialInstrumentAxis_us-gaap_CorporateDebtSecuritiesMember_W6dvtbJBXEa50pS4c58icg"
      decimals="-3"
      id="Tc_1hGBZ5tfwEOt_lPQlVy5Ow_10_12"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">277000</us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLongerAccumulatedLoss>
    <us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12Months
      contextRef="As_Of_12_31_2021_us-gaap_FinancialInstrumentAxis_us-gaap_CorporateDebtSecuritiesMember_IXDRtarETEeWv9xq-DPEYw"
      decimals="-3"
      id="Tc_kOUq21XzzE-bK7Uy3hJUTg_10_15"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">40035000</us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12Months>
    <us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12MonthsAccumulatedLoss
      contextRef="As_Of_12_31_2021_us-gaap_FinancialInstrumentAxis_us-gaap_CorporateDebtSecuritiesMember_IXDRtarETEeWv9xq-DPEYw"
      decimals="-3"
      id="Tc_u9yDIWaMoUObJCzvbzRmJw_10_18"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">134000</us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12MonthsAccumulatedLoss>
    <us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12Months
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_PagYlVhNSEufNWMzGu8Rxg_11_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">82012000</us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12Months>
    <us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12MonthsAccumulatedLoss
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_bCs3gKXGBkC7TJKJufFcoQ_11_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">308000</us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12MonthsAccumulatedLoss>
    <us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLonger
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_lXK_ZchjsEKuOyqkzsZ9UA_11_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">49793000</us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLonger>
    <us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLongerAccumulatedLoss
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_ThHATprVHke5aonySQilIA_11_12"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">687000</us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLongerAccumulatedLoss>
    <us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12Months
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_xVPQJXEF1k67-Sn4uYta2A_11_15"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">103182000</us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12Months>
    <us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12MonthsAccumulatedLoss
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_RufUGueb0k6l3X9l2Qn7ow_11_18"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">331000</us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12MonthsAccumulatedLoss>
    <us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLonger
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-5"
      id="Narr_oA891pEWYEiW7PgUtpgDIQ"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">0</us-gaap:DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLonger>
    <us-gaap:InvestmentsClassifiedByContractualMaturityDateTableTextBlock
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tb_LnpcD-NWj06RiOUvwBL4UA">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;background:#ffffff;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:72.18%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.41%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.39%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:72.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:25.01%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, 2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:72.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.11%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Amortized&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Estimated&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:72.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.11%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Cost&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Fair&#160;Value&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="7" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:72.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="4" style="vertical-align:bottom;white-space:nowrap;width:23.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:72.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Due in one year or less&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.8%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.41%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 145,885&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.8%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.39%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 144,959&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:72.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Due after one year through two years&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.41%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 2,598&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.39%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 2,529&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:72.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.8%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.41%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 148,483&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.8%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.39%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 147,488&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;background:#ffffff;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</us-gaap:InvestmentsClassifiedByContractualMaturityDateTableTextBlock>
    <us-gaap:AvailableForSaleSecuritiesDebtMaturitiesNextRollingTwelveMonthsAmortizedCostBasis
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_wUrZJAQnD0qth5EiX0fj2A_5_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">145885000</us-gaap:AvailableForSaleSecuritiesDebtMaturitiesNextRollingTwelveMonthsAmortizedCostBasis>
    <us-gaap:AvailableForSaleSecuritiesDebtMaturitiesNextRollingTwelveMonthsFairValue
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_cf6RuEm3R0yy7k2fMFcJ_Q_5_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">144959000</us-gaap:AvailableForSaleSecuritiesDebtMaturitiesNextRollingTwelveMonthsFairValue>
    <veco:DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterOneThroughTwoYearsAmortizedCost
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_noi_44UOFEekKtr8rVQPZg_6_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">2598000</veco:DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterOneThroughTwoYearsAmortizedCost>
    <veco:DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterOneThroughTwoYearsFairValue
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_SFkXmRrPREypR7jeC8-6UQ_6_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">2529000</veco:DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterOneThroughTwoYearsFairValue>
    <us-gaap:AvailableForSaleDebtSecuritiesAmortizedCostBasis
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_43MeKXDVT0u-KJu2-kewPg_7_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">148483000</us-gaap:AvailableForSaleDebtSecuritiesAmortizedCostBasis>
    <us-gaap:AvailableForSaleSecuritiesDebtSecurities
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_FWQwSpJk30S9VFHfhxOz9Q_7_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">147488000</us-gaap:AvailableForSaleSecuritiesDebtSecurities>
    <veco:CostMethodInvestmentsOwnershipPercentage
      contextRef="As_Of_12_31_2021_srt_RangeAxis_srt_MaximumMember_srt_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_veco_OtherNonMarketableInvestmentMember_H7Pvmz13_kqx4gfV2pbg4g"
      decimals="2"
      id="Narr_oplRonmAYU2esu4hn3EKow"
      unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w">0.20</veco:CostMethodInvestmentsOwnershipPercentage>
    <veco:CostMethodInvestmentsOwnershipPercentage
      contextRef="As_Of_12_31_2022_srt_RangeAxis_srt_MaximumMember_srt_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_veco_OtherNonMarketableInvestmentMember_rtkF_4iUZ0eg_uHUJbylvA"
      decimals="2"
      id="Narr_UEC1vWj0CUmTBqqZP6rfZg"
      unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w">0.20</veco:CostMethodInvestmentsOwnershipPercentage>
    <us-gaap:EquitySecuritiesWithoutReadilyDeterminableFairValueAmount
      contextRef="As_Of_12_31_2021_srt_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_veco_OtherNonMarketableInvestmentMember_x1RDLI5eNkKRCAhimMtNXg"
      decimals="-5"
      id="Narr_Ra_oU1JJH024nA1Y8VwTug"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">2000000.0</us-gaap:EquitySecuritiesWithoutReadilyDeterminableFairValueAmount>
    <us-gaap:EquitySecuritiesWithoutReadilyDeterminableFairValueAmount
      contextRef="As_Of_12_31_2022_srt_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_veco_OtherNonMarketableInvestmentMember_2yVI4D-Nv0Oahbko0Rcd7w"
      decimals="-5"
      id="Narr_iybSVjvX2Uu8JKt8pYdi2Q"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">2000000.0</us-gaap:EquitySecuritiesWithoutReadilyDeterminableFairValueAmount>
    <veco:ImpairmentLossesInvestmentsNonCash
      contextRef="Duration_1_1_2021_To_12_31_2021_srt_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_veco_OtherNonMarketableInvestmentMember_us-gaap_IncomeStatementLocationAxis_us-gaap_OtherNonoperatingIncomeExpenseMember_tTSp4c_SCkqj73Uc-NYwIQ"
      decimals="-5"
      id="Narr_NaGj8ucwHUe7za6bGZeIEA"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">1000000.0</veco:ImpairmentLossesInvestmentsNonCash>
    <us-gaap:InventoryDisclosureTextBlock
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tb_Q5MHCVBvw0W7H1gw2fET5g">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Note 5 &#x2014; Inventories&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Inventories are stated at the lower of cost or net realizable value, with cost determined on a first-in, first-out basis. Inventories consist of the following:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:82%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:65.09%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.56%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.55%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.34%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.56%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.55%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.31%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.87%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.87%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="7" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:32.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.09%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Materials&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.56%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.55%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 134,940&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.56%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.55%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.31%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 96,027&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Work-in-process&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.55%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 68,765&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.55%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 54,128&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.09%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Finished goods&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.56%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.55%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.34%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 3,203&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.56%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.55%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.31%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 20,703&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.55%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.34%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 206,908&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.55%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.31%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 170,858&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</us-gaap:InventoryDisclosureTextBlock>
    <us-gaap:ScheduleOfInventoryCurrentTableTextBlock
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tb_VE-mqmo4nU-iaTmwqmY6pg">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:82%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:65.09%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.56%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.55%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.34%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.56%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.55%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.31%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.87%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.87%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="7" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:32.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.09%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Materials&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.56%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.55%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 134,940&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.56%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.55%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.31%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 96,027&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Work-in-process&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.55%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 68,765&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.55%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 54,128&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.09%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Finished goods&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.56%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.55%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.34%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 3,203&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.56%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.55%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.31%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 20,703&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.55%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.34%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 206,908&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.55%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.31%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 170,858&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;</us-gaap:ScheduleOfInventoryCurrentTableTextBlock>
    <us-gaap:InventoryRawMaterialsNetOfReserves
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_U8ry-I4kKEG8VsgeRstp8g_4_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">134940000</us-gaap:InventoryRawMaterialsNetOfReserves>
    <us-gaap:InventoryRawMaterialsNetOfReserves
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_qA5tDYV5wkmw3a4iglWRtg_4_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">96027000</us-gaap:InventoryRawMaterialsNetOfReserves>
    <us-gaap:InventoryWorkInProcessNetOfReserves
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_JXyBbITkbEiQQAI9aFFUlQ_5_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">68765000</us-gaap:InventoryWorkInProcessNetOfReserves>
    <us-gaap:InventoryWorkInProcessNetOfReserves
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_sTbrcJjmSU2vIPVurLgvMg_5_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">54128000</us-gaap:InventoryWorkInProcessNetOfReserves>
    <us-gaap:InventoryFinishedGoodsNetOfReserves
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_Jruq3lwwDEiHlThwtIxC7Q_6_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">3203000</us-gaap:InventoryFinishedGoodsNetOfReserves>
    <us-gaap:InventoryFinishedGoodsNetOfReserves
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_JN7XD9BBMEehd1BxUDAp8g_6_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">20703000</us-gaap:InventoryFinishedGoodsNetOfReserves>
    <us-gaap:InventoryNet
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_4gCPCLfHzEmS84ivmqe25A_7_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">206908000</us-gaap:InventoryNet>
    <us-gaap:InventoryNet
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_mOTXvJY4AESmS_IDuas5Dg_7_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">170858000</us-gaap:InventoryNet>
    <us-gaap:PropertyPlantAndEquipmentDisclosureTextBlock
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tb_v0Ovxq2XwE6N_tENG0NgwA">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Note 6 &#x2014; Property, Plant, and Equipment&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Property, plant, and equipment, net, consist of the following:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:55.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.17%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:middle;width:14.02%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="position:absolute;top:50%;transform:translate(0,-50%);width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.36%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.4%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.36%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.4%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.02%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Average&#160;Useful&#160;Life&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="9" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:26.82%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Land&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 5,061&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 5,061&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:middle;width:14.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;N/A&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Building and improvements&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 64,198&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 63,946&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:middle;width:14.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;"&gt;10&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; &#x2013; &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;40 years&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Machinery and equipment &lt;sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;"&gt;(1)&lt;/sup&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 155,533&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 145,656&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:middle;width:14.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;"&gt;3&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; &#x2013; &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;10 years&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Leasehold improvements&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.17%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 54,764&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 45,979&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:middle;width:14.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;"&gt;3&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; &#x2013; &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;17 years&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Gross property, plant, and equipment&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 279,556&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 260,642&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Less: accumulated depreciation and amortization&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.17%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 172,275&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 160,899&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;&lt;b style="font-weight:bold;"&gt;Net property, plant, and equipment&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.17%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 107,281&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 99,743&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;div style="font-family:'Times New Roman','Times','serif';font-size:9.0pt;margin-bottom:0pt;margin-top:0pt;min-height:1.19em;position:relative;width:100%;"&gt;&lt;div style="background-color:#000000;height:1pt;position:relative;top:0.6em;width:25.0%;border:none;margin:0 auto 0 0;"/&gt;&lt;/div&gt;&lt;table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"&gt;&lt;tr&gt;&lt;td style="font-family:'Times New Roman','Times','serif';font-size:9pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;"&gt;(1)&lt;/td&gt;&lt;td style="padding:0pt;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:9pt;font-style:normal;font-weight:normal;"&gt;Machinery and equipment also includes software, furniture, and fixtures&lt;/span&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Depreciation expense was $15.6 million, $13.8 million, and $15.4 million for the years ended December 31, 2022, 2021, and 2020, respectively. &lt;/p&gt;</us-gaap:PropertyPlantAndEquipmentDisclosureTextBlock>
    <us-gaap:PropertyPlantAndEquipmentTextBlock
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tb_H5olaMnAW0uMo8dwFOZ-3w">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:55.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.17%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:middle;width:14.02%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="position:absolute;top:50%;transform:translate(0,-50%);width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.36%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.4%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.36%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.4%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.02%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Average&#160;Useful&#160;Life&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="9" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:26.82%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Land&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 5,061&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 5,061&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:middle;width:14.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;N/A&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Building and improvements&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 64,198&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 63,946&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:middle;width:14.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;"&gt;10&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; &#x2013; &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;40 years&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Machinery and equipment &lt;sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;"&gt;(1)&lt;/sup&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 155,533&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 145,656&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:middle;width:14.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;"&gt;3&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; &#x2013; &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;10 years&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Leasehold improvements&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.17%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 54,764&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 45,979&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:middle;width:14.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;"&gt;3&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; &#x2013; &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;17 years&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Gross property, plant, and equipment&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 279,556&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 260,642&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Less: accumulated depreciation and amortization&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.17%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 172,275&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 160,899&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:55.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;&lt;b style="font-weight:bold;"&gt;Net property, plant, and equipment&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.17%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 107,281&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 99,743&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;div style="font-family:'Times New Roman','Times','serif';font-size:9.0pt;margin-bottom:0pt;margin-top:0pt;min-height:1.19em;position:relative;width:100%;"&gt;&lt;div style="background-color:#000000;height:1pt;position:relative;top:0.6em;width:25.0%;border:none;margin:0 auto 0 0;"/&gt;&lt;/div&gt;&lt;table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"&gt;&lt;tr&gt;&lt;td style="font-family:'Times New Roman','Times','serif';font-size:9pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;"&gt;(1)&lt;/td&gt;&lt;td style="padding:0pt;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:9pt;font-style:normal;font-weight:normal;"&gt;Machinery and equipment also includes software, furniture, and fixtures&lt;/span&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</us-gaap:PropertyPlantAndEquipmentTextBlock>
    <us-gaap:PropertyPlantAndEquipmentGross
      contextRef="As_Of_12_31_2022_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_LandMember_aU5K4QzUQU6kgnHxkhVOVg"
      decimals="-3"
      id="Tc_iXgfohB5AE24Ar6dELRIOw_4_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">5061000</us-gaap:PropertyPlantAndEquipmentGross>
    <us-gaap:PropertyPlantAndEquipmentGross
      contextRef="As_Of_12_31_2021_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_LandMember_A8AKF2WQ9kC4PFl5qoLOBQ"
      decimals="-3"
      id="Tc_FyIu57n4zEOVh4nfszGm8w_4_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">5061000</us-gaap:PropertyPlantAndEquipmentGross>
    <us-gaap:PropertyPlantAndEquipmentGross
      contextRef="As_Of_12_31_2022_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_BuildingAndBuildingImprovementsMember_fnnxFZqggEeKD96T_6ie3w"
      decimals="-3"
      id="Tc_swHpzFvI2E2KSjbVcYcg2w_5_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">64198000</us-gaap:PropertyPlantAndEquipmentGross>
    <us-gaap:PropertyPlantAndEquipmentGross
      contextRef="As_Of_12_31_2021_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_BuildingAndBuildingImprovementsMember_7HTS-zmtz06SZpVZiNT4Aw"
      decimals="-3"
      id="Tc_a0LbSPfgwE-j5olMg7sRkA_5_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">63946000</us-gaap:PropertyPlantAndEquipmentGross>
    <us-gaap:PropertyPlantAndEquipmentUsefulLife
      contextRef="Duration_1_1_2021_To_12_31_2021_srt_RangeAxis_srt_MinimumMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_BuildingAndBuildingImprovementsMember_Gidmj6LUsky3lImrGRLu6Q"
      id="Narr_PFuuuG_H5kiYJCvgP0HFfQ">P10Y</us-gaap:PropertyPlantAndEquipmentUsefulLife>
    <us-gaap:PropertyPlantAndEquipmentUsefulLife
      contextRef="Duration_1_1_2022_To_12_31_2022_srt_RangeAxis_srt_MinimumMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_BuildingAndBuildingImprovementsMember_sH6SXLqfs0K0vPSkiEYXcw"
      id="Narr_kKyk1l9ZGUuCWNQFXsA0LA">P10Y</us-gaap:PropertyPlantAndEquipmentUsefulLife>
    <us-gaap:PropertyPlantAndEquipmentUsefulLife
      contextRef="Duration_1_1_2021_To_12_31_2021_srt_RangeAxis_srt_MaximumMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_BuildingAndBuildingImprovementsMember_MElevU13P0uYWw7IL8VnOA"
      id="Narr_1wF07W0OXUSkN04uFMU1Ag">P40Y</us-gaap:PropertyPlantAndEquipmentUsefulLife>
    <us-gaap:PropertyPlantAndEquipmentUsefulLife
      contextRef="Duration_1_1_2022_To_12_31_2022_srt_RangeAxis_srt_MaximumMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_BuildingAndBuildingImprovementsMember_qBmASH3-q0uEyi5qE_Tsqw"
      id="Narr_BrWkTcs1kkaUeR14Y54iBg">P40Y</us-gaap:PropertyPlantAndEquipmentUsefulLife>
    <us-gaap:PropertyPlantAndEquipmentGross
      contextRef="As_Of_12_31_2022_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_MachineryAndEquipmentMember_gBku79yeSkSj40YSYM5HsA"
      decimals="-3"
      id="Tc_RpMQO9xswEKExneR1inI9w_6_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">155533000</us-gaap:PropertyPlantAndEquipmentGross>
    <us-gaap:PropertyPlantAndEquipmentGross
      contextRef="As_Of_12_31_2021_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_MachineryAndEquipmentMember_0wMvYMJgs0WxqMD1vbmumg"
      decimals="-3"
      id="Tc_4ADYA-s0GkG0B9jPK3J9Qw_6_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">145656000</us-gaap:PropertyPlantAndEquipmentGross>
    <us-gaap:PropertyPlantAndEquipmentUsefulLife
      contextRef="Duration_1_1_2021_To_12_31_2021_srt_RangeAxis_srt_MinimumMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_MachineryAndEquipmentMember_G3uFA259L0mcqn0fc993rQ"
      id="Narr_VqGb2HQw-0OXMKJQd9Kg3Q">P3Y</us-gaap:PropertyPlantAndEquipmentUsefulLife>
    <us-gaap:PropertyPlantAndEquipmentUsefulLife
      contextRef="Duration_1_1_2022_To_12_31_2022_srt_RangeAxis_srt_MinimumMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_MachineryAndEquipmentMember_kMBqjcmbAUWhgDS4eqCZSg"
      id="Narr_MtvJqheTVEerZw9-fwRE0Q">P3Y</us-gaap:PropertyPlantAndEquipmentUsefulLife>
    <us-gaap:PropertyPlantAndEquipmentUsefulLife
      contextRef="Duration_1_1_2021_To_12_31_2021_srt_RangeAxis_srt_MaximumMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_MachineryAndEquipmentMember_nLISzPEN7Ey7mFYy9KVbUA"
      id="Narr_tZ6iiBwayUmNKRsXj-3_aw">P10Y</us-gaap:PropertyPlantAndEquipmentUsefulLife>
    <us-gaap:PropertyPlantAndEquipmentUsefulLife
      contextRef="Duration_1_1_2022_To_12_31_2022_srt_RangeAxis_srt_MaximumMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_MachineryAndEquipmentMember_r-HNrvY-bUGV71aKV5fymw"
      id="Narr_ve6oXgLdZESbScz7tVFErg">P10Y</us-gaap:PropertyPlantAndEquipmentUsefulLife>
    <us-gaap:PropertyPlantAndEquipmentGross
      contextRef="As_Of_12_31_2022_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_LeaseholdImprovementsMember_l9lhAAr_XU-dsDhEzU-wsg"
      decimals="-3"
      id="Tc_mq03WXcqC0iSivYYpyn_8A_7_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">54764000</us-gaap:PropertyPlantAndEquipmentGross>
    <us-gaap:PropertyPlantAndEquipmentGross
      contextRef="As_Of_12_31_2021_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_LeaseholdImprovementsMember_A0KFx0NQCUamYDFD5ZwOIA"
      decimals="-3"
      id="Tc_uRWYZjeypkiS6MdK1D1PBg_7_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">45979000</us-gaap:PropertyPlantAndEquipmentGross>
    <us-gaap:PropertyPlantAndEquipmentUsefulLife
      contextRef="Duration_1_1_2021_To_12_31_2021_srt_RangeAxis_srt_MinimumMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_LeaseholdImprovementsMember_9k5QUqwNeE2-rhO-SIBHOg"
      id="Narr_G6GH64BVTEmDEDNM80mfsQ">P3Y</us-gaap:PropertyPlantAndEquipmentUsefulLife>
    <us-gaap:PropertyPlantAndEquipmentUsefulLife
      contextRef="Duration_1_1_2022_To_12_31_2022_srt_RangeAxis_srt_MinimumMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_LeaseholdImprovementsMember_-_qnf0UG4EOBjZTK_lw7vg"
      id="Narr_aIqScPyIEkiR_e_lSvel8w">P3Y</us-gaap:PropertyPlantAndEquipmentUsefulLife>
    <us-gaap:PropertyPlantAndEquipmentUsefulLife
      contextRef="Duration_1_1_2021_To_12_31_2021_srt_RangeAxis_srt_MaximumMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_LeaseholdImprovementsMember_AMkmoruyOku0FoWmUcFIog"
      id="Narr_agrH5VoCokebreFPFq1Fhw">P17Y</us-gaap:PropertyPlantAndEquipmentUsefulLife>
    <us-gaap:PropertyPlantAndEquipmentUsefulLife
      contextRef="Duration_1_1_2022_To_12_31_2022_srt_RangeAxis_srt_MaximumMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_LeaseholdImprovementsMember_IfXaVPWhgUKzN7Eq2Wfp1A"
      id="Narr_7jEvfqdceUi5i5xD-QP2EA">P17Y</us-gaap:PropertyPlantAndEquipmentUsefulLife>
    <us-gaap:PropertyPlantAndEquipmentGross
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_ymXUaVGISEGirIgTE_YFkQ_8_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">279556000</us-gaap:PropertyPlantAndEquipmentGross>
    <us-gaap:PropertyPlantAndEquipmentGross
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_t536JZB9YUKWjIImyOiFLw_8_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">260642000</us-gaap:PropertyPlantAndEquipmentGross>
    <us-gaap:AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_g5EpG0hx8EiuEmvjng0MfQ_9_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">172275000</us-gaap:AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment>
    <us-gaap:AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_bjkRlozRGEiv_cDc5np3vw_9_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">160899000</us-gaap:AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment>
    <us-gaap:PropertyPlantAndEquipmentNet
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_8SXqAoZmYk-9AhQX9CQymA_10_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">107281000</us-gaap:PropertyPlantAndEquipmentNet>
    <us-gaap:PropertyPlantAndEquipmentNet
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_ITLxrM0PmE-MqHLcfkC6IQ_10_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">99743000</us-gaap:PropertyPlantAndEquipmentNet>
    <us-gaap:Depreciation
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-5"
      id="Narr_7lwADgCSP0eUw5T-SH9ExQ"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">15600000</us-gaap:Depreciation>
    <us-gaap:Depreciation
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-5"
      id="Narr_zRjA2gqfVUSofaxpVETUuA"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">15600000</us-gaap:Depreciation>
    <us-gaap:Depreciation
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-5"
      id="Narr_38HKWWb3dEKXyqaPqsw3mA"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">13800000</us-gaap:Depreciation>
    <us-gaap:Depreciation
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-5"
      id="Narr_bVKapL9yjkK-6pzzxsh7lw"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">15400000</us-gaap:Depreciation>
    <us-gaap:GoodwillAndIntangibleAssetsDisclosureTextBlock
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tb_sMDKbsPCTkyFivDSfpixjg">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Note 7 &#x2014; Goodwill and Intangible Assets&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Goodwill represents the future economic benefits arising from assets acquired in a business combination that are not individually identified and separately recognized. There were no changes in goodwill balances during the years ended December 31, 2022 or 2021, while the below table reflects the gross carrying amounts and accumulated impairments as of the respective periods:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:52.19%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.43%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.96%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.44%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.96%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.44%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.11%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:52.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Gross&#160;carrying&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:13.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Accumulated&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:13.59%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:52.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;amount&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;impairment&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.59%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Net amount&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:52.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:45.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:52.19%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Balance at December&#160;31, 2022 and 2021&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.96%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 430,331&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.44%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.96%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 248,388&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.44%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.11%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 181,943&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The Company performs its annual goodwill impairment test at the beginning of the fourth quarter each year. As the Company maintains a single goodwill reporting unit, it determines the fair value of its reporting unit based upon the Company&#x2019;s adjusted market capitalization. The annual test performed at the beginning of the fourth quarter of fiscal 2022, 2021, and 2020 did not result in any potential impairment as the fair value of the reporting unit was determined to exceed the carrying amount of the reporting unit.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The valuation of goodwill will continue to be subject to changes in the Company&#x2019;s market capitalization and observable market control premiums. This analysis is sensitive to changes in the Company&#x2019;s stock price and absent other qualitative factors, the Company may be required to record goodwill impairment charges in future periods if the stock price declines and remains depressed for an extended period of time.&#160; &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The components of purchased intangible assets were as follows:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:26.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:middle;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:middle;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.79%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.86%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:26.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:29.42%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, 2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:29.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, 2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:26.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Average&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Accumulated&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.79%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Accumulated&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.86%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:26.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Remaining&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.86%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Gross&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Amortization&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.86%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Gross&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Amortization&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:26.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Amortization&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.86%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Carrying&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;and&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Net &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.86%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Carrying&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;and&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Net&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:26.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:9.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Period&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.86%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Amount&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:9.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Impairment&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.83%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Amount&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.86%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Amount&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:9.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Impairment&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Amount&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="21" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:26.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in years)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="17" style="vertical-align:bottom;white-space:nowrap;width:60.57%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:26.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Technology&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:middle;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:middle;white-space:nowrap;width:9.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;"&gt; 2.6&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 327,908&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.08%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 316,918&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 10,990&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 327,908&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.08%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 310,551&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.86%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 17,357&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:26.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Customer relationships&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:middle;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;"&gt; 6.3&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 146,465&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 135,415&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.79%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 11,050&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 146,465&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 132,970&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.86%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 13,495&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:26.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Trademarks and tradenames&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:middle;white-space:nowrap;width:9.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;"&gt; 1.5&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 30,910&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.08%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 29,063&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 1,847&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 30,910&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.08%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 27,857&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.86%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 3,053&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:26.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Other&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:middle;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt; -&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.83%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 3,686&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.34%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.08%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 3,686&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.79%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.83%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 3,686&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.34%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.08%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 3,686&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.86%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:26.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 12pt;"&gt;&lt;span style="font-size:10pt;margin-left:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:middle;white-space:nowrap;width:9.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;"&gt; 4.2&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 508,969&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.34%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.08%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 485,082&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 23,887&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 508,969&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.34%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.08%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 475,064&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.86%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 33,905&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Other intangible assets primarily consist of patents, licenses, and backlog.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Based on the intangible assets recorded at December 31, 2022, and assuming no subsequent additions to or impairment of the underlying assets, the remaining estimated annual amortization expense, is expected to be as follows:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:46%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:75.58%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.58%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.67%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:17.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.58%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.58%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:20.82%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Amortization&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.58%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.58%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&#160;&#160;&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:20.82%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.58%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;2023&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.58%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.67%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:17.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 8,347&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.58%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;2024&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.58%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.67%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:17.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 6,708&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.58%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;2025&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.58%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.67%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:17.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 3,136&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.58%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;2026&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.58%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.67%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:17.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 2,134&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.58%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;2027&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.58%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.67%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:17.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 1,550&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.58%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Thereafter&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.58%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.67%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:17.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 2,012&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:75.58%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Total&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.58%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.67%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:17.15%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 23,887&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</us-gaap:GoodwillAndIntangibleAssetsDisclosureTextBlock>
    <us-gaap:GoodwillPeriodIncreaseDecrease
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-5"
      id="Narr_tozg1weZG0W1c3R-B-VNiw"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">0</us-gaap:GoodwillPeriodIncreaseDecrease>
    <us-gaap:GoodwillPeriodIncreaseDecrease
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-5"
      id="Narr_vjTWs5BLxEaFXwOPU9wvTw"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">0</us-gaap:GoodwillPeriodIncreaseDecrease>
    <us-gaap:ScheduleOfGoodwillTextBlock
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tb_iOCRUorcZ0SS4IV8_U8otw">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:52.19%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.43%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.96%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.44%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.96%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.44%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.11%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:52.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Gross&#160;carrying&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:13.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Accumulated&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:13.59%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:52.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;amount&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;impairment&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.59%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Net amount&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:52.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:45.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:52.19%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Balance at December&#160;31, 2022 and 2021&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.96%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 430,331&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.44%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.96%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 248,388&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.44%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.11%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 181,943&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</us-gaap:ScheduleOfGoodwillTextBlock>
    <us-gaap:GoodwillGross
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_zyh1sKv2nECw4N-ObapGOg_4_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">430331000</us-gaap:GoodwillGross>
    <us-gaap:GoodwillGross
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_zyh1sKv2nECw4N-ObapGOg_4_3_2"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">430331000</us-gaap:GoodwillGross>
    <us-gaap:GoodwillImpairedAccumulatedImpairmentLoss
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_1y1OJXRJa02q2kORbjUoCg_4_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">248388000</us-gaap:GoodwillImpairedAccumulatedImpairmentLoss>
    <us-gaap:GoodwillImpairedAccumulatedImpairmentLoss
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_1y1OJXRJa02q2kORbjUoCg_4_6_2"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">248388000</us-gaap:GoodwillImpairedAccumulatedImpairmentLoss>
    <us-gaap:Goodwill
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_pGRQKHAxv0O_waMhnfTKVA_4_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">181943000</us-gaap:Goodwill>
    <us-gaap:Goodwill
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_pGRQKHAxv0O_waMhnfTKVA_4_9_2"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">181943000</us-gaap:Goodwill>
    <veco:ScheduleOfIntangibleAssetsExcludingGoodwillTableTextBlock
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tb_zzqIUxyLUEmb3xiu_SuVow">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:26.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:middle;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:middle;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.79%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.86%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:26.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:29.42%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, 2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:29.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, 2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:26.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Average&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Accumulated&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.79%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Accumulated&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.86%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:26.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Remaining&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.86%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Gross&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Amortization&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.86%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Gross&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Amortization&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:26.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Amortization&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.86%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Carrying&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;and&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Net &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.86%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Carrying&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;and&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Net&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:26.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:9.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Period&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.86%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Amount&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:9.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Impairment&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.83%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Amount&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.86%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Amount&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:9.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Impairment&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Amount&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="21" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:26.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in years)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="17" style="vertical-align:bottom;white-space:nowrap;width:60.57%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:26.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Technology&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:middle;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:middle;white-space:nowrap;width:9.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;"&gt; 2.6&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 327,908&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.08%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 316,918&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 10,990&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 327,908&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.08%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 310,551&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.86%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 17,357&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:26.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Customer relationships&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:middle;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;"&gt; 6.3&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 146,465&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 135,415&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.79%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 11,050&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.83%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 146,465&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 132,970&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.86%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 13,495&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:26.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Trademarks and tradenames&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:middle;white-space:nowrap;width:9.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;"&gt; 1.5&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 30,910&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.08%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 29,063&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 1,847&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 30,910&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.08%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 27,857&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.86%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 3,053&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:26.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Other&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:middle;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt; -&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.83%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 3,686&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.34%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.08%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 3,686&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.79%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.83%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 3,686&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.34%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.08%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 3,686&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.86%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:26.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 12pt;"&gt;&lt;span style="font-size:10pt;margin-left:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:middle;white-space:nowrap;width:9.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;"&gt; 4.2&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 508,969&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.34%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.08%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 485,082&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.79%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 23,887&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.83%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 508,969&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.34%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.08%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 475,064&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.86%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 33,905&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</veco:ScheduleOfIntangibleAssetsExcludingGoodwillTableTextBlock>
    <us-gaap:FiniteLivedIntangibleAssetsRemainingAmortizationPeriod1
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TechnologyBasedIntangibleAssetsMember_c_0gAxKnfECDwazop899FQ"
      id="Tc_-ut4gvFTZkyjzskXQIQjcA_7_2">P2Y7M6D</us-gaap:FiniteLivedIntangibleAssetsRemainingAmortizationPeriod1>
    <us-gaap:FiniteLivedIntangibleAssetsGross
      contextRef="As_Of_12_31_2022_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TechnologyBasedIntangibleAssetsMember_PHfPLb4yx0-K74vdVH6uRg"
      decimals="-3"
      id="Tc_26S_uQYjp0K4CyKX76xdYA_7_5"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">327908000</us-gaap:FiniteLivedIntangibleAssetsGross>
    <veco:FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment
      contextRef="As_Of_12_31_2022_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TechnologyBasedIntangibleAssetsMember_PHfPLb4yx0-K74vdVH6uRg"
      decimals="-3"
      id="Tc_t-cERPjOxEyJOkiVScZtKQ_7_8"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">316918000</veco:FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment>
    <us-gaap:FiniteLivedIntangibleAssetsNet
      contextRef="As_Of_12_31_2022_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TechnologyBasedIntangibleAssetsMember_PHfPLb4yx0-K74vdVH6uRg"
      decimals="-3"
      id="Tc_mQw5kouuv0-HVLwcocyi4Q_7_11"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">10990000</us-gaap:FiniteLivedIntangibleAssetsNet>
    <us-gaap:FiniteLivedIntangibleAssetsGross
      contextRef="As_Of_12_31_2021_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TechnologyBasedIntangibleAssetsMember_lmu-TREvc0aWZRgdlyu2XA"
      decimals="-3"
      id="Tc_McEAQAaUH06bDZDbzVpe-g_7_14"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">327908000</us-gaap:FiniteLivedIntangibleAssetsGross>
    <veco:FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment
      contextRef="As_Of_12_31_2021_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TechnologyBasedIntangibleAssetsMember_lmu-TREvc0aWZRgdlyu2XA"
      decimals="-3"
      id="Tc_BGWYf5qf-EmBpVXRVwAbsw_7_17"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">310551000</veco:FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment>
    <us-gaap:FiniteLivedIntangibleAssetsNet
      contextRef="As_Of_12_31_2021_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TechnologyBasedIntangibleAssetsMember_lmu-TREvc0aWZRgdlyu2XA"
      decimals="-3"
      id="Tc_9R8wN_GcQkaqX0g7KUqbew_7_20"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">17357000</us-gaap:FiniteLivedIntangibleAssetsNet>
    <us-gaap:FiniteLivedIntangibleAssetsRemainingAmortizationPeriod1
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_CustomerRelationshipsMember_yVD0ya2vVk2nYytNKf5htQ"
      id="Tc_PEcUkl3cUEqDUzg9858x5Q_8_2">P6Y3M18D</us-gaap:FiniteLivedIntangibleAssetsRemainingAmortizationPeriod1>
    <us-gaap:FiniteLivedIntangibleAssetsGross
      contextRef="As_Of_12_31_2022_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_CustomerRelationshipsMember_dwE4sMbj40KrNc4QqruMbQ"
      decimals="-3"
      id="Tc_GaWssk2RXE66DbUVMVjEbA_8_5"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">146465000</us-gaap:FiniteLivedIntangibleAssetsGross>
    <veco:FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment
      contextRef="As_Of_12_31_2022_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_CustomerRelationshipsMember_dwE4sMbj40KrNc4QqruMbQ"
      decimals="-3"
      id="Tc_ddAiVEBXYkGiUoQHF7RT6A_8_8"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">135415000</veco:FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment>
    <us-gaap:FiniteLivedIntangibleAssetsNet
      contextRef="As_Of_12_31_2022_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_CustomerRelationshipsMember_dwE4sMbj40KrNc4QqruMbQ"
      decimals="-3"
      id="Tc_qCoXvNuj7EqsXVyfDxOa5g_8_11"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">11050000</us-gaap:FiniteLivedIntangibleAssetsNet>
    <us-gaap:FiniteLivedIntangibleAssetsGross
      contextRef="As_Of_12_31_2021_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_CustomerRelationshipsMember_h7b9anFZuE2SoSFkMvCcXQ"
      decimals="-3"
      id="Tc_aH3wMCNF4EWJSSQ4DeBLWg_8_14"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">146465000</us-gaap:FiniteLivedIntangibleAssetsGross>
    <veco:FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment
      contextRef="As_Of_12_31_2021_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_CustomerRelationshipsMember_h7b9anFZuE2SoSFkMvCcXQ"
      decimals="-3"
      id="Tc_lGXs2o4Y3E6VokTwX6NOZA_8_17"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">132970000</veco:FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment>
    <us-gaap:FiniteLivedIntangibleAssetsNet
      contextRef="As_Of_12_31_2021_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_CustomerRelationshipsMember_h7b9anFZuE2SoSFkMvCcXQ"
      decimals="-3"
      id="Tc_cdUjr8LCNkSDeZofOvCg-Q_8_20"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">13495000</us-gaap:FiniteLivedIntangibleAssetsNet>
    <us-gaap:FiniteLivedIntangibleAssetsRemainingAmortizationPeriod1
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TrademarksAndTradeNamesMember_GGXDJQsEwUWFPkGXDENgHA"
      id="Tc_qZ7Oi-5RVEOFMcOa50GpDw_9_2">P1Y6M</us-gaap:FiniteLivedIntangibleAssetsRemainingAmortizationPeriod1>
    <us-gaap:FiniteLivedIntangibleAssetsGross
      contextRef="As_Of_12_31_2022_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TrademarksAndTradeNamesMember_K82mRsCyb0GBUN-LnYfN8Q"
      decimals="-3"
      id="Tc_1ITfxtah80yF4LCbcES0hw_9_5"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">30910000</us-gaap:FiniteLivedIntangibleAssetsGross>
    <veco:FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment
      contextRef="As_Of_12_31_2022_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TrademarksAndTradeNamesMember_K82mRsCyb0GBUN-LnYfN8Q"
      decimals="-3"
      id="Tc_YXRhgjvrmE6W38Nvr9NTZg_9_8"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">29063000</veco:FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment>
    <us-gaap:FiniteLivedIntangibleAssetsNet
      contextRef="As_Of_12_31_2022_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TrademarksAndTradeNamesMember_K82mRsCyb0GBUN-LnYfN8Q"
      decimals="-3"
      id="Tc_hXh4QVKTVE2lkPgI_Ibm1A_9_11"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">1847000</us-gaap:FiniteLivedIntangibleAssetsNet>
    <us-gaap:FiniteLivedIntangibleAssetsGross
      contextRef="As_Of_12_31_2021_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TrademarksAndTradeNamesMember_as4jILWK1k2E1dfNQhh-Hw"
      decimals="-3"
      id="Tc_tljlhhIoJE2wIAt_nEvpiw_9_14"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">30910000</us-gaap:FiniteLivedIntangibleAssetsGross>
    <veco:FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment
      contextRef="As_Of_12_31_2021_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TrademarksAndTradeNamesMember_as4jILWK1k2E1dfNQhh-Hw"
      decimals="-3"
      id="Tc_427KZQyjnkuFT46CeWVt7w_9_17"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">27857000</veco:FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment>
    <us-gaap:FiniteLivedIntangibleAssetsNet
      contextRef="As_Of_12_31_2021_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TrademarksAndTradeNamesMember_as4jILWK1k2E1dfNQhh-Hw"
      decimals="-3"
      id="Tc_ncQCyR1juUukJC5n2KIj4A_9_20"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">3053000</us-gaap:FiniteLivedIntangibleAssetsNet>
    <us-gaap:FiniteLivedIntangibleAssetsGross
      contextRef="As_Of_12_31_2022_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_OtherIntangibleAssetsMember_OSD-9IgK00iI_MRgFr83eg"
      decimals="-3"
      id="Tc_fRgOMHtN4USEfKy8U81ZSw_10_5"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">3686000</us-gaap:FiniteLivedIntangibleAssetsGross>
    <veco:FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment
      contextRef="As_Of_12_31_2022_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_OtherIntangibleAssetsMember_OSD-9IgK00iI_MRgFr83eg"
      decimals="-3"
      id="Tc_403Vg561gEWzdRmWHyAWzw_10_8"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">3686000</veco:FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment>
    <us-gaap:FiniteLivedIntangibleAssetsGross
      contextRef="As_Of_12_31_2021_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_OtherIntangibleAssetsMember_Wq5eHdCnDUSHppKmNim6Mg"
      decimals="-3"
      id="Tc_2nRtYdqCY0qbUtmrDbPagg_10_14"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">3686000</us-gaap:FiniteLivedIntangibleAssetsGross>
    <veco:FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment
      contextRef="As_Of_12_31_2021_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_OtherIntangibleAssetsMember_Wq5eHdCnDUSHppKmNim6Mg"
      decimals="-3"
      id="Tc_845OBOniX0GfxNQdfswZBA_10_17"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">3686000</veco:FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment>
    <us-gaap:FiniteLivedIntangibleAssetsRemainingAmortizationPeriod1
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tc_rw81Mwibz0uel2CLldR7kQ_11_2">P4Y2M12D</us-gaap:FiniteLivedIntangibleAssetsRemainingAmortizationPeriod1>
    <us-gaap:FiniteLivedIntangibleAssetsGross
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_PpFTgvb95USq_ZiDGGizKw_11_5"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">508969000</us-gaap:FiniteLivedIntangibleAssetsGross>
    <veco:FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_AHNiAPFWR0O9kwCcTlE4iw_11_8"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">485082000</veco:FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment>
    <us-gaap:FiniteLivedIntangibleAssetsNet
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_q8bph2Gig0aq0iJa1sUeqQ_11_11"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">23887000</us-gaap:FiniteLivedIntangibleAssetsNet>
    <us-gaap:FiniteLivedIntangibleAssetsGross
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_0Av7DglC6UmgpInfKvqjUg_11_14"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">508969000</us-gaap:FiniteLivedIntangibleAssetsGross>
    <veco:FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_5vrAL-QKQEaaolv_tzN8Iw_11_17"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">475064000</veco:FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment>
    <us-gaap:FiniteLivedIntangibleAssetsNet
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_OxAcsgi4zkuQxjp3_y0YTg_11_20"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">33905000</us-gaap:FiniteLivedIntangibleAssetsNet>
    <us-gaap:ScheduleofFiniteLivedIntangibleAssetsFutureAmortizationExpenseTableTextBlock
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tb_FJ_bgedPrk27HlBseZqJVg">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:46%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:75.58%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.58%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.67%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:17.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.58%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.58%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:20.82%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Amortization&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.58%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.58%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&#160;&#160;&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:20.82%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.58%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;2023&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.58%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.67%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:17.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 8,347&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.58%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;2024&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.58%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.67%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:17.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 6,708&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.58%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;2025&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.58%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.67%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:17.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 3,136&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.58%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;2026&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.58%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.67%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:17.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 2,134&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.58%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;2027&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.58%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.67%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:17.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 1,550&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.58%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Thereafter&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.58%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.67%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:17.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 2,012&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:75.58%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Total&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.58%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.67%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:17.15%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 23,887&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;</us-gaap:ScheduleofFiniteLivedIntangibleAssetsFutureAmortizationExpenseTableTextBlock>
    <us-gaap:FiniteLivedIntangibleAssetsAmortizationExpenseNextTwelveMonths
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_HcTu_QeF_UKiG_Y1_GGC6Q_3_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">8347000</us-gaap:FiniteLivedIntangibleAssetsAmortizationExpenseNextTwelveMonths>
    <us-gaap:FiniteLivedIntangibleAssetsAmortizationExpenseYearTwo
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_vc-g976A80qIuNMB4nRT3Q_4_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">6708000</us-gaap:FiniteLivedIntangibleAssetsAmortizationExpenseYearTwo>
    <us-gaap:FiniteLivedIntangibleAssetsAmortizationExpenseYearThree
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_4XRg1UMAEEy6AtGVGhMmig_5_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">3136000</us-gaap:FiniteLivedIntangibleAssetsAmortizationExpenseYearThree>
    <us-gaap:FiniteLivedIntangibleAssetsAmortizationExpenseYearFour
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_72Aye-LIs0SYcXrR5o1mcg_6_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">2134000</us-gaap:FiniteLivedIntangibleAssetsAmortizationExpenseYearFour>
    <us-gaap:FiniteLivedIntangibleAssetsAmortizationExpenseYearFive
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_DVlHrzZbA0yEUj_BI9dm2A_7_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">1550000</us-gaap:FiniteLivedIntangibleAssetsAmortizationExpenseYearFive>
    <us-gaap:FiniteLivedIntangibleAssetsAmortizationExpenseAfterYearFive
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_SUUaNKU8_02sDBjRDOEzBw_8_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">2012000</us-gaap:FiniteLivedIntangibleAssetsAmortizationExpenseAfterYearFive>
    <us-gaap:FiniteLivedIntangibleAssetsNet
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_elqwu6Py60G3rzSxeJfL2g_9_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">23887000</us-gaap:FiniteLivedIntangibleAssetsNet>
    <us-gaap:AccountsPayableAndAccruedLiabilitiesDisclosureTextBlock
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tb_RU_-FXs4-Uy38OcD_7npbA">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Note 8 &#x2014; Accrued Expenses and Other Liabilities&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The components of accrued expenses and other current liabilities were as follows:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:70.71%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:70.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.51%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.51%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:70.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.51%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.51%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="7" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:70.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:27.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:70.71%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Payroll and related benefits&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 30,044&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 35,712&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:70.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Warranty&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 8,601&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 7,878&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:70.71%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="-sec-ix-hidden:Hidden_EGVCh5E7LkOiByzYXsbm8w;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;Operating lease liabilities&lt;/span&gt;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 3,333&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 4,437&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:70.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Interest&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 2,853&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 2,757&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:70.71%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Professional fees&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 2,102&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 1,467&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:70.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Legal settlement&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 15,000&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:70.71%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Sales, use, and other taxes&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 2,027&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 4,889&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:70.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Other&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 7,071&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 7,612&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:70.71%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 56,031&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 79,752&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;Customer deposits and deferred revenue&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Customer deposits totaled $110.2 million and $46.9 million at December 31, 2022 and 2021, respectively, which are included in &#x201c;Customer deposits and deferred revenue&#x201d; in the Consolidated Balance Sheets. Deferred revenue represents amounts billed, other than deposits, in excess of the revenue that can be recognized on a particular contract at the balance sheet date. Changes in deferred revenue were as follows:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:80.44%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.55%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.55%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.44%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:80.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.55%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:16.99%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:80.44%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Balance - December&#160;31, 2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.55%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.55%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.44%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 16,276&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:80.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Deferral of revenue&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.55%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.55%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 8,081&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:80.44%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Recognition of unearned revenue&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.55%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.55%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.44%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (7,367)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:80.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Balance - December&#160;31, 2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.55%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.55%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.44%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 16,990&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;"&gt;As of December&#160;31, 2022, the Company has approximately &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;$192.0&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; million of remaining performance obligations on contracts with an original estimated duration of &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;one year&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; or more, of which approximately &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;37%&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; is expected to be recognized within &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;one year&lt;/span&gt;&lt;span style="font-size:10pt;"&gt;, with the remaining amounts expected to be recognized between &lt;/span&gt;&lt;span style="-sec-ix-hidden:Hidden_lMHLKbK2aECnPZnMvM5qZg;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;one&lt;/span&gt;&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; to &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;three years&lt;/span&gt;&lt;span style="font-size:10pt;"&gt;. The Company has elected to exclude disclosures regarding remaining performance obligations that have an original expected duration of &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;one&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; year&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; or less.&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;Other liabilities&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;At December 31, 2022 and 2021, other liabilities included (i) asset retirement obligations of $0.7 million and $2.8 million, respectively; (ii) income tax payables of $0.4 million for both periods, and (iii) medical and dental benefits for former executives of $2.0 million and $1.8 million, respectively. &lt;/p&gt;</us-gaap:AccountsPayableAndAccruedLiabilitiesDisclosureTextBlock>
    <us-gaap:ScheduleOfAccruedLiabilitiesTableTextBlock
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tb_PkTcv213Ykayxm-darKYaA">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:70.71%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:70.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.51%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.51%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:70.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.51%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.51%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="7" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:70.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:27.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:70.71%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Payroll and related benefits&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 30,044&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 35,712&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:70.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Warranty&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 8,601&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 7,878&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:70.71%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="-sec-ix-hidden:Hidden_EGVCh5E7LkOiByzYXsbm8w;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;Operating lease liabilities&lt;/span&gt;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 3,333&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 4,437&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:70.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Interest&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 2,853&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 2,757&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:70.71%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Professional fees&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 2,102&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 1,467&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:70.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Legal settlement&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 15,000&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:70.71%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Sales, use, and other taxes&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 2,027&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 4,889&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:70.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Other&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 7,071&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 7,612&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:70.71%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 56,031&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.21%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 79,752&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</us-gaap:ScheduleOfAccruedLiabilitiesTableTextBlock>
    <us-gaap:EmployeeRelatedLiabilitiesCurrent
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_5FoleVUvXEaPE966TACHJw_4_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">30044000</us-gaap:EmployeeRelatedLiabilitiesCurrent>
    <us-gaap:EmployeeRelatedLiabilitiesCurrent
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_h6geJRjLKECamXrK9fDCkQ_4_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">35712000</us-gaap:EmployeeRelatedLiabilitiesCurrent>
    <us-gaap:ProductWarrantyAccrualClassifiedCurrent
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_rbAFSomWfEiPovsPUgXicQ_5_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">8601000</us-gaap:ProductWarrantyAccrualClassifiedCurrent>
    <us-gaap:ProductWarrantyAccrualClassifiedCurrent
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_TaW8N3yUj0Kqp61frSfJ9g_5_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">7878000</us-gaap:ProductWarrantyAccrualClassifiedCurrent>
    <us-gaap:OperatingLeaseLiabilityCurrent
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_CnZgp5sW5Em0OfmMR_UKLQ_6_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">3333000</us-gaap:OperatingLeaseLiabilityCurrent>
    <us-gaap:OperatingLeaseLiabilityCurrent
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_qnvCejdEt0K-vKBmCKAB9A_6_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">4437000</us-gaap:OperatingLeaseLiabilityCurrent>
    <us-gaap:InterestPayableCurrent
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_vVki01XhXkCxPKzou4C5pg_7_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">2853000</us-gaap:InterestPayableCurrent>
    <us-gaap:InterestPayableCurrent
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_PInBoTmXcU2ts5X-YAxCEw_7_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">2757000</us-gaap:InterestPayableCurrent>
    <us-gaap:AccruedProfessionalFeesCurrent
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_Uvj0pU2aXECUS-ENikzflA_8_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">2102000</us-gaap:AccruedProfessionalFeesCurrent>
    <us-gaap:AccruedProfessionalFeesCurrent
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_74zEXYfgCUCiglAOx4r4eA_8_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">1467000</us-gaap:AccruedProfessionalFeesCurrent>
    <us-gaap:LossContingencyAccrualCarryingValueCurrent
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_IVWcJu4dV0CpXaX0IvUwBw_9_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">15000000</us-gaap:LossContingencyAccrualCarryingValueCurrent>
    <us-gaap:TaxesPayableCurrent
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_LshXSubE0ka2FAggEF9DEQ_10_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">2027000</us-gaap:TaxesPayableCurrent>
    <us-gaap:TaxesPayableCurrent
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_nGVjPfGQl0yRlo2Gp9cRew_10_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">4889000</us-gaap:TaxesPayableCurrent>
    <us-gaap:OtherAccruedLiabilitiesCurrent
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_KY8xQW65e0qwrH5nEeVXTQ_11_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">7071000</us-gaap:OtherAccruedLiabilitiesCurrent>
    <us-gaap:OtherAccruedLiabilitiesCurrent
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_Aa6tV17C8kmaDW8uco2eLA_11_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">7612000</us-gaap:OtherAccruedLiabilitiesCurrent>
    <veco:AccruedAndOtherLiabilitiesCurrent
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_3jXSd88d-ESapH7UHZIIbg_12_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">56031000</veco:AccruedAndOtherLiabilitiesCurrent>
    <veco:AccruedAndOtherLiabilitiesCurrent
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_-zrcaf4rx0e05oj8Q8GLuQ_12_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">79752000</veco:AccruedAndOtherLiabilitiesCurrent>
    <us-gaap:ContractWithCustomerRefundLiabilityCurrent
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-5"
      id="Narr_3izLVVaSVUyUAx2KHE1mcw"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">110200000</us-gaap:ContractWithCustomerRefundLiabilityCurrent>
    <us-gaap:ContractWithCustomerRefundLiabilityCurrent
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-5"
      id="Narr_kA4mSw82Xk2fkjLHuhWbRw"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">46900000</us-gaap:ContractWithCustomerRefundLiabilityCurrent>
    <veco:ScheduleOfDeferredRevenueTableTextBlock
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tb_WFrDnXupAEKs1kVrVyY7kw">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:80.44%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.55%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.55%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.44%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:80.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.55%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:16.99%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:80.44%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Balance - December&#160;31, 2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.55%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.55%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.44%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 16,276&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:80.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Deferral of revenue&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.55%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.55%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 8,081&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:80.44%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Recognition of unearned revenue&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.55%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.55%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.44%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (7,367)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:80.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Balance - December&#160;31, 2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.55%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.55%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.44%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 16,990&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</veco:ScheduleOfDeferredRevenueTableTextBlock>
    <us-gaap:ContractWithCustomerLiability
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_tiS-_E_goU68m8_pCdow4g_2_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">16276000</us-gaap:ContractWithCustomerLiability>
    <us-gaap:IncreaseDecreaseInContractWithCustomerLiability
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_koRWNEgMaECrNTvJ2SXscQ_3_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-8081000</us-gaap:IncreaseDecreaseInContractWithCustomerLiability>
    <us-gaap:ContractWithCustomerLiabilityRevenueRecognized
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_0ZyMWhetWUyku4OZYSHqFw_4_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-7367000</us-gaap:ContractWithCustomerLiabilityRevenueRecognized>
    <us-gaap:ContractWithCustomerLiability
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_5Lcds9lo50mPYw_NyMfckg_5_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">16990000</us-gaap:ContractWithCustomerLiability>
    <us-gaap:RevenueRemainingPerformanceObligation
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-5"
      id="Narr_RdRVoXGNyU2vjDST4QTCEg"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">192000000.0</us-gaap:RevenueRemainingPerformanceObligation>
    <us-gaap:RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionPeriod1
      contextRef="As_Of_12_31_2022_srt_RangeAxis_srt_MinimumMember_iF5wa-z6u0mt0pln3ZRKEw"
      id="Narr_fkvWRU0qyEqN1-9hHE6CpA">P1Y</us-gaap:RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionPeriod1>
    <veco:RevenueRemainingPerformanceObligationExpectedTimingPercentage
      contextRef="As_Of_12_31_2022_us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionStartDateAxis_veco_cnst_2023-01-01_x-uik2mTUUOaGbc3btd01g"
      decimals="2"
      id="Narr_PpArc0jqYUaalzSKpyldNw"
      unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w">0.37</veco:RevenueRemainingPerformanceObligationExpectedTimingPercentage>
    <us-gaap:RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionPeriod1
      contextRef="As_Of_12_31_2022_us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionStartDateAxis_veco_cnst_2023-01-01_x-uik2mTUUOaGbc3btd01g"
      id="Narr_0_N32A_LiUW_2Upg6hrEQQ">P1Y</us-gaap:RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionPeriod1>
    <us-gaap:RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionPeriod1
      contextRef="As_Of_12_31_2022_srt_RangeAxis_srt_MaximumMember_us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionStartDateAxis_veco_cnst_2024-01-01_BZqaswuaTU6Gg2uzA8NeVw"
      id="Narr_obrpUxm3yk6atNpo6pwPvQ">P3Y</us-gaap:RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionPeriod1>
    <us-gaap:RevenuePracticalExpedientRemainingPerformanceObligation
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Narr_8JwCFR4qbka-IbdNRlZVDg">true</us-gaap:RevenuePracticalExpedientRemainingPerformanceObligation>
    <us-gaap:RevenuePracticalExpedientRemainingPerformanceObligation
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Narr_fky0Sq01Hk-llWBR4oaGTQ">true</us-gaap:RevenuePracticalExpedientRemainingPerformanceObligation>
    <us-gaap:AssetRetirementObligationsNoncurrent
      contextRef="As_Of_12_31_2022_us-gaap_BalanceSheetLocationAxis_us-gaap_OtherLiabilitiesMember_79zlpumRSUyxTgOHdVLA_Q"
      decimals="-5"
      id="Narr_voiuh1LTOkaORl2UkaSj3Q"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">700000</us-gaap:AssetRetirementObligationsNoncurrent>
    <us-gaap:AssetRetirementObligationsNoncurrent
      contextRef="As_Of_12_31_2021_us-gaap_BalanceSheetLocationAxis_us-gaap_OtherLiabilitiesMember_8L6qodKhvEqd88yeBiGHBg"
      decimals="-5"
      id="Narr_7lGYA7AtB0iYWmP_SN9yJA"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">2800000</us-gaap:AssetRetirementObligationsNoncurrent>
    <us-gaap:AccruedIncomeTaxesNoncurrent
      contextRef="As_Of_12_31_2022_us-gaap_BalanceSheetLocationAxis_us-gaap_OtherLiabilitiesMember_79zlpumRSUyxTgOHdVLA_Q"
      decimals="-5"
      id="Narr_KzhVOm9IZUSTe5_1In3Ohw"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">400000</us-gaap:AccruedIncomeTaxesNoncurrent>
    <veco:MedicalAndDentalBenefitLiabilitiesNoncurrent
      contextRef="As_Of_12_31_2022_us-gaap_BalanceSheetLocationAxis_us-gaap_OtherLiabilitiesMember_79zlpumRSUyxTgOHdVLA_Q"
      decimals="-5"
      id="Narr_vyu8RDUMtUKN5f8tnhNaLQ"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">2000000.0</veco:MedicalAndDentalBenefitLiabilitiesNoncurrent>
    <veco:MedicalAndDentalBenefitLiabilitiesNoncurrent
      contextRef="As_Of_12_31_2021_us-gaap_BalanceSheetLocationAxis_us-gaap_OtherLiabilitiesMember_8L6qodKhvEqd88yeBiGHBg"
      decimals="-5"
      id="Narr_gPd1B6cOIUGXURMFW2ovcg"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">1800000</veco:MedicalAndDentalBenefitLiabilitiesNoncurrent>
    <veco:MedicalAndDentalBenefitLiabilitiesNoncurrent
      contextRef="As_Of_12_31_2021_us-gaap_BalanceSheetLocationAxis_us-gaap_OtherLiabilitiesMember_8L6qodKhvEqd88yeBiGHBg"
      decimals="-5"
      id="Narr_-7W2jCTmF0ae72C_QTn-Gw"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">1800000</veco:MedicalAndDentalBenefitLiabilitiesNoncurrent>
    <us-gaap:CommitmentsAndContingenciesDisclosureTextBlock
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tb_HeAfaC_D2UaSxgZNSmm1nA">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Note 9 &#x2014; Commitments and Contingencies&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;Warranty&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Changes in the Company&#x2019;s product warranty reserves were as follows:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:61.57%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.57%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:36.36%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.57%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.71%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="10" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.57%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;white-space:nowrap;width:35.08%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.57%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Balance - beginning of the year&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 7,878&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.47%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 5,058&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.47%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 7,067&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.57%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Warranties issued&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 8,304&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 7,102&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 4,626&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.57%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Consumption of reserves&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (7,527)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.47%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (5,784)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.47%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (6,691)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.57%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Changes in estimate&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.42%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (54)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.47%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 1,502&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.47%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 56&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.57%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Balance - end of the year&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.42%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 8,601&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.47%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 7,878&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.47%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 5,058&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;Minimum Lease Commitments&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;"&gt;The Company&#x2019;s operating leases primarily include real estate leases for properties used for manufacturing, R&amp;amp;D activities, sales and service, and administration, as well as certain equipment leases. Some leases may include options to renew for a period of up to&#160;&lt;/span&gt;&lt;span style="font-size:10pt;"&gt;5 years&lt;/span&gt;&lt;span style="font-size:10pt;"&gt;, while others may include options to terminate the lease. The weighted average remaining lease term of the Company&#x2019;s operating leases as of December 31, 2022 was&#160;&lt;/span&gt;&lt;span style="font-size:10pt;"&gt;12 years&lt;/span&gt;&lt;span style="font-size:10pt;"&gt;, and the weighted average discount rate used in determining the present value of future lease payments was&#160;&lt;/span&gt;&lt;span style="font-size:10pt;"&gt;5.6%&lt;/span&gt;&lt;span style="font-size:10pt;"&gt;.&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The following table provides the maturities of lease liabilities at December 31, 2022: &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Operating&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Leases&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Payments due by period:&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;2023&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 3,757&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;2024&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 4,347&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;2025&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 3,812&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;2026&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 4,012&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;2027&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 3,620&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Thereafter&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 34,244&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Total future minimum lease payments&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 53,792&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Less: Imputed interest&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (16,878)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Total&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.3%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 36,914&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:82.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Reported as of December&#160;31, 2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="-sec-ix-hidden:Hidden_eoIrvRLA5kWv8kXlN_7lSg;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;Accrued expenses and other current liabilities&lt;/span&gt;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 3,333&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Long-term operating lease liabilities&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 33,581&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 12pt;"&gt;&lt;span style="-sec-ix-hidden:Hidden_sGkRBjQQs0yUxZ2hF_23sA;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;Total&lt;/span&gt;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 36,914&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Operating lease cost for the years ended December 31, 2022, 2021, and 2020 was $7.4 million, $6.6 million, and $5.4 million, respectively. Variable lease cost was $2.0 million for the year ended December 31, 2022, and $1.7 million for the years ended December 31, 2021, and 2020. Additionally, the Company has an immaterial amount of short-term leases. Lease expense, which includes operating lease costs and variable lease costs, was $9.4&#160;million, $8.4&#160;million, and $7.1&#160;million for the years ended December 31, 2022, 2021, and 2020, respectively. In addition, the Company is obligated under such leases for certain other expenses, including real estate taxes and insurance. Operating cash outflows from operating leases for the year ended December 31, 2022, 2021, and 2020 were $7.5&#160;million, $6.6 million (excluding landlord reimbursements for leasehold improvements of $6.1 million included within &#x201c;Other, net&#x201d; in the Consolidated Statements of Cash Flows), and $6.9 million, respectively.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;Legal Proceedings&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;On June 8, 2018, an Ultratech shareholder who received Veeco stock as part of the consideration for the Ultratech acquisition filed a purported class action complaint in the Superior Court of the State of California, County of Santa Clara, captioned Wolther v. Maheshwari et al., Case No. 18CV329690, on behalf of himself and others who purchased or acquired shares of Veeco pursuant to the registration statement and prospectus which Veeco filed with the SEC in connection with the Ultratech acquisition (the &#x201c;Wolther Action&#x201d;). On August 2 and August 8, 2018, two purported class action complaints substantially similar to the Wolther Action were filed on behalf of different plaintiffs in the same court as the Wolther Action. These cases were consolidated with the Wolther Action, and a consolidated complaint was filed on December 11, 2018. The consolidated complaint sought to recover damages and fees under Sections 11, 12, and 15 of the Securities Act of 1933 for, among other things, alleged false/misleading statements in the registration statement and prospectus relating to the Ultratech acquisition, relating primarily to the alleged failure to disclose delays in the advanced packaging business, increased MOCVD competition in China, and an intellectual property dispute. In October 2021, Veeco and the court-appointed class representatives signed an agreement to settle the Wolther Action on a class-wide basis for $15.0 million, subject to court approval and class members&#x2019; opportunity to object and opt-out. On June 27, 2022, the court granted final approval to the class action settlement. The settlement amount was funded by insurance carriers. The corresponding receivable and liability had been included within &#x201c;Prepaid expenses and other current assets&#x201d; and &#x201c;Accrued expenses and other current liabilities&#x201d;, respectively, in the Consolidated Balance Sheets as of December 31, 2021.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;On December 21, 2018, a purported Veeco stockholder filed a derivative action in the Superior Court of the State of California, County of Santa Clara, captioned Vladimir Gusinsky Revocable Trust v. Peeler, et al., Case No. 18CV339925, on behalf of nominal defendant Veeco (the &#x201c;Derivative Action&#x201d;). The complaint seeks to assert claims for breach of fiduciary duty, waste of corporate assets, and unjust enrichment against current and former Veeco directors premised on purported misstatements and omissions in the registration statement relating to the Ultratech acquisition. On January 25, 2021, the court granted the defendants&#x2019; demurrer without leave to amend effecting the dismissal of the case. On March 26, 2021, plaintiff filed its notice of appeal of the trial court&#x2019;s order granting defendants&#x2019; demurrer without leave to amend. In April 2022, Veeco and plaintiff reached an agreement to settle the Derivative Action subject to court approval. As part of the settlement and subject to court approval, Veeco agreed to make certain revisions to its internal Disclosure Committee Charter and its director education program. After the court gave final approval in November 2022 to the Derivative Action settlement and the request for fees and costs made by plaintiff&#x2019;s counsel, $0.3&lt;span style="white-space:pre-wrap;"&gt; million was paid to plaintiff&#x2019;s counsel for fees and expenses. The amount was funded by insurance that Veeco maintains in the normal course of its business.  &lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The Company is involved in various other legal proceedings arising in the normal course of business. The Company does not believe that the ultimate resolution of these matters will have a material adverse effect on its consolidated financial position, results of operations, or cash flows.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;Concentrations of Credit Risk&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The Company depends on purchases from its ten largest customers, which accounted for 63% and 65% of net accounts receivable at December 31, 2022 and 2021, respectively.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Customers who accounted for more than 10% of net accounts receivable or net sales are as follows:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:40.97%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.53%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.61%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.53%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.63%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.61%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.62%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.66%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:40.97%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;white-space:nowrap;width:19.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Accounts&#160;Receivable&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:31.2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Net&#160;Sales&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:40.97%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;white-space:nowrap;width:19.78%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:31.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;For the Year Ended December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:40.97%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Customer&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.61%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.63%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.61%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.62%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.66%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:40.97%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Customer A&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.53%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.61%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.53%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.63%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 14&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.61%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.54%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.62%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 15&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:40.97%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Customer B&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.63%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 10&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:40.97%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Customer C&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.53%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.61%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.53%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.63%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 12&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.61%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.54%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.62%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:40.97%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Customer D&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.63%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 10&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:40.97%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Customer E&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.53%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.61%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.53%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.63%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.61%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.54%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.62%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 13&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:40.97%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Customer F&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 10&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.63%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;div style="font-family:'Times New Roman','Times','serif';font-size:9.0pt;margin-bottom:0pt;margin-top:0pt;min-height:1.19em;position:relative;width:100%;"&gt;&lt;div style="background-color:#000000;height:1pt;position:relative;top:0.6em;width:25.0%;border:none;margin:0 auto 0 0;"/&gt;&lt;/div&gt;&lt;table style="border-collapse:collapse;border:0;"&gt;&lt;tr&gt;&lt;td style="vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;"&gt;&lt;span style="font-size:10pt;"&gt;*&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;"&gt;&lt;span style="font-size:9pt;"&gt;Less than 10% of aggregate accounts receivable or net sales&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;"&gt;The Company manufactures and sells its products to companies in different geographic locations. Refer to Note 16, &#x201c;Segment Reporting and Geographic Information,&#x201d; for additional information. In certain instances, the Company requires deposits from its customers for a portion of the sales price in advance of shipment and performs periodic credit evaluations on its customers. Where appropriate, the Company requires letters of credit on certain non-U.S. sales arrangements. Receivables generally are due within &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;30&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; to &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;90 days&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; from the date of invoice.&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;In some geographies, receivables may be payable up to &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;150 days&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; from the date of the invoice.&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;Receivable Purchase Agreement&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;In December&#160;2020, the Company entered into a receivable purchase agreement with a financial institution to sell certain of its trade receivables from customers without recourse, up to $15.0 million at any point in time. Pursuant to this agreement, the Company sold $13.2&#160;million of receivables during the year ended December&#160;31, 2022, of which $5.4 million remained outstanding as of December 31, 2022 as defined in the receivable purchase agreement, and $9.6 million was available under the agreement for additional sales of receivables. There were no sales of receivables under this agreement during 2021. The net sale of accounts receivable under the agreement is reflected as a reduction of &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;accounts receivable in the Company&#x2019;s Consolidated Balance Sheet at the time of sale and any fees for the sale of trade receivables were not material for the periods presented.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;Suppliers&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The Company outsources certain functions to third parties, including the manufacture of several of its systems. While the Company relies on its outsourcing partners to perform their contracted functions, the Company maintains some level of internal manufacturing capability for these systems. In addition, certain of the components and sub-assemblies included in the Company&#x2019;s products are obtained from a single source or a limited group of suppliers. The failure of the Company&#x2019;s present outsourcing partners and suppliers to meet their contractual obligations and the Company&#x2019;s inability to make alternative arrangements or resume the manufacture of these systems could have a material adverse effect on the Company&#x2019;s revenues, profitability, cash flows, and relationships with its customers.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The Company had deposits with its suppliers of $9.4 million and $3.9 million at December 31, 2022 and 2021, respectively, that were included in &#x201c;Prepaid expenses and other current assets&#x201d; on the Consolidated Balance Sheets.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;Purchase Commitments&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The Company had purchase commitments of $289.2 million at December 31, 2022, the majority of which will come due within one year. Purchase commitments are primarily for inventory used in manufacturing products, as well as equipment and project materials used to support research and development activities, and are partially offset by existing deposits with suppliers. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;Bank Guarantees&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The Company has bank guarantees and letters of credit issued by a financial institution on its behalf as needed. At December 31, 2022, outstanding bank guarantees and letters of credit totaled $8.2&#160;million and unused bank guarantees and letters of credit of $14.1&lt;span style="font-size:12pt;"&gt; &lt;/span&gt;million were available to be drawn upon.&lt;/p&gt;</us-gaap:CommitmentsAndContingenciesDisclosureTextBlock>
    <us-gaap:ScheduleOfProductWarrantyLiabilityTableTextBlock
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tb_DB66krn77ES2RjFYTc0-mQ">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:61.57%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.57%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:36.36%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.57%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.71%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="10" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.57%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;white-space:nowrap;width:35.08%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.57%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Balance - beginning of the year&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 7,878&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.47%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 5,058&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.47%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 7,067&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.57%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Warranties issued&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 8,304&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 7,102&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 4,626&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.57%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Consumption of reserves&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (7,527)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.47%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (5,784)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.47%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (6,691)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.57%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Changes in estimate&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.42%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (54)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.47%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 1,502&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.47%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 56&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.57%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Balance - end of the year&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.42%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 8,601&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.47%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 7,878&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.47%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 5,058&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</us-gaap:ScheduleOfProductWarrantyLiabilityTableTextBlock>
    <us-gaap:ProductWarrantyAccrual
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_e21FuWQjBUmVlVTAyKyl8w_4_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">7878000</us-gaap:ProductWarrantyAccrual>
    <us-gaap:ProductWarrantyAccrual
      contextRef="As_Of_12_31_2020_JUGLvBeldEeSTj1WqQBVdQ"
      decimals="-3"
      id="Tc_AZYGXPgUakiGHA-KskK6IQ_4_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">5058000</us-gaap:ProductWarrantyAccrual>
    <us-gaap:ProductWarrantyAccrual
      contextRef="As_Of_12_31_2019_dyqJ8hTIuEW6V2L_RveF0A"
      decimals="-3"
      id="Tc_enR72LC0xEKbv8GLrozSAw_4_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">7067000</us-gaap:ProductWarrantyAccrual>
    <us-gaap:ProductWarrantyAccrualWarrantiesIssued
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_GCdw-ERKuU2NIvc2LtxDeg_5_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">8304000</us-gaap:ProductWarrantyAccrualWarrantiesIssued>
    <us-gaap:ProductWarrantyAccrualWarrantiesIssued
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_7culDbiQxUiobuGe6JAoGw_5_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">7102000</us-gaap:ProductWarrantyAccrualWarrantiesIssued>
    <us-gaap:ProductWarrantyAccrualWarrantiesIssued
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_t6UA93JLdUGytiKd-rGFig_5_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">4626000</us-gaap:ProductWarrantyAccrualWarrantiesIssued>
    <us-gaap:ProductWarrantyAccrualPayments
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_p4alXKl0MkypyZ4EIdBLog_6_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">7527000</us-gaap:ProductWarrantyAccrualPayments>
    <us-gaap:ProductWarrantyAccrualPayments
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_U7nJQC3cG0mYAMfEPd5QiA_6_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">5784000</us-gaap:ProductWarrantyAccrualPayments>
    <us-gaap:ProductWarrantyAccrualPayments
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_61ivf8G6SECRS3w4X3ZwTA_6_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">6691000</us-gaap:ProductWarrantyAccrualPayments>
    <us-gaap:ProductWarrantyAccrualPreexistingIncreaseDecrease
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_kJemgHGlxkiIazI9RukIPQ_7_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-54000</us-gaap:ProductWarrantyAccrualPreexistingIncreaseDecrease>
    <us-gaap:ProductWarrantyAccrualPreexistingIncreaseDecrease
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_djsLLbaX7kCISVVenQ45BQ_7_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">1502000</us-gaap:ProductWarrantyAccrualPreexistingIncreaseDecrease>
    <us-gaap:ProductWarrantyAccrualPreexistingIncreaseDecrease
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_aJgcm_eaK0yPS6kuDgQQzA_7_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">56000</us-gaap:ProductWarrantyAccrualPreexistingIncreaseDecrease>
    <us-gaap:ProductWarrantyAccrual
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_KpEATuXtWkyAPblQmSI8jw_8_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">8601000</us-gaap:ProductWarrantyAccrual>
    <us-gaap:ProductWarrantyAccrual
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_tKPxLGfyrk-mcITlclU0XA_8_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">7878000</us-gaap:ProductWarrantyAccrual>
    <us-gaap:ProductWarrantyAccrual
      contextRef="As_Of_12_31_2020_JUGLvBeldEeSTj1WqQBVdQ"
      decimals="-3"
      id="Tc_65JlomEtBUKtwvruJNT5MA_8_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">5058000</us-gaap:ProductWarrantyAccrual>
    <us-gaap:LesseeOperatingLeaseRenewalTerm
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      id="Narr_zIZLm5Mke0qFMyAl-rDrqw">P5Y</us-gaap:LesseeOperatingLeaseRenewalTerm>
    <us-gaap:OperatingLeaseWeightedAverageRemainingLeaseTerm1
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      id="Narr_33GUqPkPIkKKdto-eWqgGw">P12Y</us-gaap:OperatingLeaseWeightedAverageRemainingLeaseTerm1>
    <us-gaap:LesseeOperatingLeaseDiscountRate
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="3"
      id="Narr_LWkanpevcUuPMWaj3PQxgw"
      unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w">0.056</us-gaap:LesseeOperatingLeaseDiscountRate>
    <us-gaap:LesseeOperatingLeaseLiabilityMaturityTableTextBlock
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tb_B2f6K5Oz20Gd09zBjJxH7Q">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Operating&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Leases&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Payments due by period:&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;2023&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 3,757&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;2024&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 4,347&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;2025&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 3,812&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;2026&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 4,012&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;2027&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 3,620&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Thereafter&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 34,244&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Total future minimum lease payments&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 53,792&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Less: Imputed interest&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (16,878)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Total&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.3%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 36,914&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:82.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Reported as of December&#160;31, 2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="-sec-ix-hidden:Hidden_eoIrvRLA5kWv8kXlN_7lSg;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;Accrued expenses and other current liabilities&lt;/span&gt;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 3,333&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:82.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Long-term operating lease liabilities&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 33,581&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:82.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 12pt;"&gt;&lt;span style="-sec-ix-hidden:Hidden_sGkRBjQQs0yUxZ2hF_23sA;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;Total&lt;/span&gt;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.3%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 36,914&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</us-gaap:LesseeOperatingLeaseLiabilityMaturityTableTextBlock>
    <us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_FnYIHjgcQUOcBVd1e6h88w_5_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">3757000</us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths>
    <us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueYearTwo
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_WK7sybLVPE2FhE3esY3eeg_6_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">4347000</us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueYearTwo>
    <us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueYearThree
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_zwBNyVH3REC3d8FwbBJoAA_7_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">3812000</us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueYearThree>
    <us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueYearFour
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_mpH3GNzOw0qFoNQ_sZGkiA_8_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">4012000</us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueYearFour>
    <us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueYearFive
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_iiEqiq5aZU6_ill8DXyQ7Q_9_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">3620000</us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueYearFive>
    <us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_InsDzXKARUSIM6Wl2loQoA_10_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">34244000</us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive>
    <us-gaap:LesseeOperatingLeaseLiabilityPaymentsDue
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_HU1kK2i9U0uxFenv9mMDvA_11_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">53792000</us-gaap:LesseeOperatingLeaseLiabilityPaymentsDue>
    <us-gaap:LesseeOperatingLeaseLiabilityUndiscountedExcessAmount
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_hKaVf2p2G0ewYHCRmS3T8Q_12_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">16878000</us-gaap:LesseeOperatingLeaseLiabilityUndiscountedExcessAmount>
    <us-gaap:OperatingLeaseLiability
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_uBQRUci_-kSyRspR7J1dSw_13_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">36914000</us-gaap:OperatingLeaseLiability>
    <us-gaap:OperatingLeaseLiabilityCurrent
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_nc0LzQ7410mdyrmKNNHstw_16_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">3333000</us-gaap:OperatingLeaseLiabilityCurrent>
    <us-gaap:OperatingLeaseLiabilityNoncurrent
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_3dDu3zIk706S9RF4KiKlWQ_17_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">33581000</us-gaap:OperatingLeaseLiabilityNoncurrent>
    <us-gaap:OperatingLeaseLiability
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_MYzWRNmGc0uX7lCCX3NNig_18_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">36914000</us-gaap:OperatingLeaseLiability>
    <us-gaap:OperatingLeaseCost
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-5"
      id="Narr_x_lRAVJMP0-L6cw4ZthGMQ"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">7400000</us-gaap:OperatingLeaseCost>
    <us-gaap:OperatingLeaseCost
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-5"
      id="Narr_R8dgHV8ANkiTHMLity5yZw"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">6600000</us-gaap:OperatingLeaseCost>
    <us-gaap:OperatingLeaseCost
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-5"
      id="Narr_dPx5YAvpSkOWTYL4gcaQvw"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">5400000</us-gaap:OperatingLeaseCost>
    <us-gaap:VariableLeaseCost
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-5"
      id="Narr_7dQFtUE8ykOY-nT5bOKmUw"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">2000000.0</us-gaap:VariableLeaseCost>
    <us-gaap:VariableLeaseCost
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-5"
      id="Narr__86TFpvvckq6DP1Z-FUhGw"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">1700000</us-gaap:VariableLeaseCost>
    <us-gaap:VariableLeaseCost
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-5"
      id="Narr_VsfUTFPpfUKbF87fJ3kvGw"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">1700000</us-gaap:VariableLeaseCost>
    <us-gaap:LeaseCost
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-5"
      id="Narr_Qa64130ZRUyBZWvfTVmjgg"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">9400000</us-gaap:LeaseCost>
    <us-gaap:LeaseCost
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-5"
      id="Narr_ylzP_tWR00SPaFAUpoe85w"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">8400000</us-gaap:LeaseCost>
    <us-gaap:LeaseCost
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-5"
      id="Narr_Pp0X8fMjREyipHbz-G1Dxg"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">7100000</us-gaap:LeaseCost>
    <us-gaap:OperatingLeasePayments
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-5"
      id="Narr_0u8AOjTMV0OFQ6eY11uhqw"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">7500000</us-gaap:OperatingLeasePayments>
    <us-gaap:OperatingLeasePayments
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-5"
      id="Narr_1MUAf766u061lQI-1QMA5g"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">6600000</us-gaap:OperatingLeasePayments>
    <veco:ReimbursementForLeaseholdImprovements
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-5"
      id="Narr_tq0xwVmqIUK5CpWx92pOow"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">6100000</veco:ReimbursementForLeaseholdImprovements>
    <us-gaap:OperatingLeasePayments
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-5"
      id="Narr_K3ThZl1mAUSjB4Sn4Nge3g"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">6900000</us-gaap:OperatingLeasePayments>
    <us-gaap:LossContingencyNewClaimsFiledNumber
      contextRef="Duration_8_1_2018_To_8_31_2018_srt_LitigationCaseAxis_veco_UltratechAcquisitionLitigationMember_dwYL9J2gC0Oab_FWaninlw"
      decimals="INF"
      id="Narr_GStgOZ9wbkyrostufC3x9A"
      unitRef="Unit_Standard_case_gtF5dJF030CdqF2FGWQ9yA">2</us-gaap:LossContingencyNewClaimsFiledNumber>
    <us-gaap:LitigationSettlementAmountAwardedToOtherParty
      contextRef="Duration_10_1_2021_To_10_31_2021_srt_LitigationCaseAxis_veco_WoltherActionMember_G9mmKKuHJUKEDOgkWSO47Q"
      decimals="-5"
      id="Narr_tPNh_5dI90ytCt-i4pbOuA"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">15000000.0</us-gaap:LitigationSettlementAmountAwardedToOtherParty>
    <us-gaap:LitigationSettlementAmountAwardedToOtherParty
      contextRef="Duration_11_1_2022_To_11_30_2022_srt_LitigationCaseAxis_veco_DerivativeActionMember_dS7_yQ62XkKzCXHyd6iZNQ"
      decimals="-5"
      id="Narr_8NiHt5kAmkO4bsmGuwvgIA"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">300000</us-gaap:LitigationSettlementAmountAwardedToOtherParty>
    <veco:NumberOfCustomers
      contextRef="Duration_1_1_2021_To_12_31_2021_srt_MajorCustomersAxis_veco_TopTenCustomersMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_STb5nYXm7USe8k9Ls-HfDg"
      decimals="INF"
      id="Narr_XVnftxzMMkqCv9ewSAq4Iw"
      unitRef="Unit_Standard_customer_ewo2DglECUO5n4nvx82_SQ">10</veco:NumberOfCustomers>
    <veco:NumberOfCustomers
      contextRef="Duration_1_1_2022_To_12_31_2022_srt_MajorCustomersAxis_veco_TopTenCustomersMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_S-7J6nBA20enuSmeS4u47A"
      decimals="INF"
      id="Narr_BbHn2NcEEEixeas7_rL4uQ"
      unitRef="Unit_Standard_customer_ewo2DglECUO5n4nvx82_SQ">10</veco:NumberOfCustomers>
    <us-gaap:ConcentrationRiskPercentage1
      contextRef="Duration_1_1_2022_To_12_31_2022_srt_MajorCustomersAxis_veco_TopTenCustomersMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_S-7J6nBA20enuSmeS4u47A"
      decimals="2"
      id="Narr_vJGrlVw4YUW85aFLqMVeyg"
      unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w">0.63</us-gaap:ConcentrationRiskPercentage1>
    <us-gaap:ConcentrationRiskPercentage1
      contextRef="Duration_1_1_2021_To_12_31_2021_srt_MajorCustomersAxis_veco_TopTenCustomersMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_STb5nYXm7USe8k9Ls-HfDg"
      decimals="2"
      id="Narr_JbKcQheT5kmOzD5wBX0Rdg"
      unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w">0.65</us-gaap:ConcentrationRiskPercentage1>
    <us-gaap:ScheduleOfRevenueByMajorCustomersByReportingSegmentsTableTextBlock
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tb_N_tm0Aeb_02uMcGcdC21Nw">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:40.97%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.53%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.61%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.53%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.63%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.61%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.62%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.66%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:40.97%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;white-space:nowrap;width:19.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Accounts&#160;Receivable&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:31.2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Net&#160;Sales&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:40.97%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;white-space:nowrap;width:19.78%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:31.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;For the Year Ended December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:40.97%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Customer&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.61%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.63%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.61%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.62%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.66%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:40.97%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Customer A&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.53%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.61%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.53%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.63%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 14&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.61%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.54%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.62%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 15&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:40.97%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Customer B&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.63%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 10&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:40.97%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Customer C&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.53%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.61%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.53%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.63%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 12&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.61%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.54%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.62%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:40.97%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Customer D&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.63%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 10&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:40.97%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Customer E&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.53%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.61%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.53%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.63%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.61%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.54%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.62%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.66%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 13&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:40.97%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Customer F&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 10&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.63%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;div style="font-family:'Times New Roman','Times','serif';font-size:9.0pt;margin-bottom:0pt;margin-top:0pt;min-height:1.19em;position:relative;width:100%;"&gt;&lt;div style="background-color:#000000;height:1pt;position:relative;top:0.6em;width:25.0%;border:none;margin:0 auto 0 0;"/&gt;&lt;/div&gt;&lt;table style="border-collapse:collapse;border:0;"&gt;&lt;tr&gt;&lt;td style="vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;"&gt;&lt;span style="font-size:10pt;"&gt;*&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;"&gt;&lt;span style="font-size:9pt;"&gt;Less than 10% of aggregate accounts receivable or net sales&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</us-gaap:ScheduleOfRevenueByMajorCustomersByReportingSegmentsTableTextBlock>
    <us-gaap:ConcentrationRiskPercentage1
      contextRef="Duration_1_1_2021_To_12_31_2021_srt_MajorCustomersAxis_veco_CustomerAMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_KB9uqMrKw0yowdxGLskIdw"
      decimals="2"
      id="Tc_EEQiiblPJEKFHIoYTSlvTg_4_4"
      unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w">0.14</us-gaap:ConcentrationRiskPercentage1>
    <us-gaap:ConcentrationRiskPercentage1
      contextRef="Duration_1_1_2021_To_12_31_2021_srt_MajorCustomersAxis_veco_CustomerAMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_xncv0g_nvkqEqtTOvac8gA"
      decimals="2"
      id="Tc_rQXNQbT5uEazaMcNr0_RsQ_4_8"
      unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w">0.15</us-gaap:ConcentrationRiskPercentage1>
    <us-gaap:ConcentrationRiskPercentage1
      contextRef="Duration_1_1_2021_To_12_31_2021_srt_MajorCustomersAxis_veco_CustomerBMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_Hivl-4H1CUSQ5oS73bRBSg"
      decimals="2"
      id="Tc__UjwFKA-IUSnyNjRFT-EBg_5_8"
      unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w">0.10</us-gaap:ConcentrationRiskPercentage1>
    <us-gaap:ConcentrationRiskPercentage1
      contextRef="Duration_1_1_2021_To_12_31_2021_srt_MajorCustomersAxis_veco_CustomerCMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_NXdZ-M0690aCSuYO9gmOnw"
      decimals="2"
      id="Tc_MdFjow1WE0eJWnPyhDDNBw_6_4"
      unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w">0.12</us-gaap:ConcentrationRiskPercentage1>
    <us-gaap:ConcentrationRiskPercentage1
      contextRef="Duration_1_1_2021_To_12_31_2021_srt_MajorCustomersAxis_veco_CustomerDMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_yP78NPy8K0O09X8fBKRsyQ"
      decimals="2"
      id="Tc_w6ggeya1A0SPvOei6BVO2w_7_4"
      unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w">0.10</us-gaap:ConcentrationRiskPercentage1>
    <us-gaap:ConcentrationRiskPercentage1
      contextRef="Duration_1_1_2020_To_12_31_2020_srt_MajorCustomersAxis_veco_CustomerEMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_8a3DkbfigE-Y0KZYUOHMMA"
      decimals="2"
      id="Tc_j7KeQL5e5kCMdH8yXf6JHQ_8_10"
      unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w">0.13</us-gaap:ConcentrationRiskPercentage1>
    <us-gaap:ConcentrationRiskPercentage1
      contextRef="Duration_1_1_2022_To_12_31_2022_srt_MajorCustomersAxis_veco_CustomerFMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_4dGT7A_R9UydroMwKOR-uA"
      decimals="2"
      id="Tc_OTNLhHTDAUKtym9Z-2t_wA_9_2"
      unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w">0.10</us-gaap:ConcentrationRiskPercentage1>
    <veco:AccountsReceivableCreditPeriod
      contextRef="Duration_1_1_2022_To_12_31_2022_srt_RangeAxis_srt_MinimumMember_srt_StatementGeographicalAxis_veco_GeographicLocationOneMember_urfkXneJaEms9Cl65M7_dg"
      id="Narr_u5DHfVPDokCSKKPAj9uqNQ">P30D</veco:AccountsReceivableCreditPeriod>
    <veco:AccountsReceivableCreditPeriod
      contextRef="Duration_1_1_2022_To_12_31_2022_srt_RangeAxis_srt_MaximumMember_srt_StatementGeographicalAxis_veco_GeographicLocationOneMember_g1TJdhFHIkaAVeEKqXBbew"
      id="Narr_X5sos-hbtkuSDfuM6XT1SQ">P90D</veco:AccountsReceivableCreditPeriod>
    <veco:AccountsReceivableCreditPeriod
      contextRef="Duration_1_1_2022_To_12_31_2022_srt_RangeAxis_srt_MaximumMember_srt_StatementGeographicalAxis_veco_GeographicLocationTwoMember_qfHak3I2j02E3uJNzquhHA"
      id="Narr_wbYr8Wt1YkuLou72NXEwkQ">P150D</veco:AccountsReceivableCreditPeriod>
    <veco:ReceivablePurchaseAgreementMaximumAmount
      contextRef="As_Of_12_31_2020_JUGLvBeldEeSTj1WqQBVdQ"
      decimals="-5"
      id="Narr__Sz-7KD3sk25vsgMLwDnVg"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">15000000.0</veco:ReceivablePurchaseAgreementMaximumAmount>
    <veco:TradeReceivablesSoldUnderReceivablePurchaseAgreement
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-5"
      id="Narr_NgkfnUAnkky-EhbVcK4Q2Q"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">13200000</veco:TradeReceivablesSoldUnderReceivablePurchaseAgreement>
    <veco:TradeReceivablesUnderReceivablePurchaseAgreementOutstanding
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-5"
      id="Narr_3eLh9WK_fE6XrG2HyZA7aw"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">5400000</veco:TradeReceivablesUnderReceivablePurchaseAgreementOutstanding>
    <veco:ReceivablePurchaseAgreementAmountAvailable
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-5"
      id="Narr_4rFN6JBRPEaABswUX13Kew"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">9600000</veco:ReceivablePurchaseAgreementAmountAvailable>
    <veco:TradeReceivablesSoldUnderReceivablePurchaseAgreement
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-5"
      id="Narr_j5EJnWyJ0UGMTuqmDwQ9Fg"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">0</veco:TradeReceivablesSoldUnderReceivablePurchaseAgreement>
    <us-gaap:DepositAssets
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-5"
      id="Narr_zpho64SabUGJvezOuhwIWw"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">9400000</us-gaap:DepositAssets>
    <us-gaap:DepositAssets
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-5"
      id="Narr_8y0z7meCGkyhVu75Z3A-Yg"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">3900000</us-gaap:DepositAssets>
    <us-gaap:UnrecordedUnconditionalPurchaseObligationDueInNextRollingTwelveMonths
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-5"
      id="Narr_JG1iiBYm-0i6jdFmaL33DQ"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">289200000</us-gaap:UnrecordedUnconditionalPurchaseObligationDueInNextRollingTwelveMonths>
    <us-gaap:GuaranteeObligationsCurrentCarryingValue
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-5"
      id="Narr_cZxt9FBrbESyIsvJ-ivxcg"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">8200000</us-gaap:GuaranteeObligationsCurrentCarryingValue>
    <us-gaap:LineOfCreditFacilityRemainingBorrowingCapacity
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-5"
      id="Narr_hDKzmDWW5E2E9Stko0X2-g"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">14100000</us-gaap:LineOfCreditFacilityRemainingBorrowingCapacity>
    <us-gaap:DebtDisclosureTextBlock
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tb_Ko6sZltk-02gqeZhfdSDwg">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Note 10 &#x2014; Debt&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;Convertible Senior Notes&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;2023 Notes&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;On January 10, 2017, the Company issued $345.0 million of 2.70% convertible senior unsecured notes due 2023 (the &#x201c;2023 Notes&#x201d;). The Company received net proceeds, after deducting underwriting discounts and fees and expenses payable by the Company, of approximately $335.8 million. The 2023 Notes bear interest at a rate of 2.70% per year, payable semiannually in arrears on January 15 and July 15 of each year, commencing on July 15, 2017. The 2023 Notes mature on January 15, 2023, unless earlier purchased by the Company, redeemed, or converted.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;"&gt;On May 18, 2020, in connection with the completion of a private offering of $125.0&#160;million aggregate principal amount of&#160;3.75% convertible senior notes due 2027 described below, the Company repurchased and retired approximately $88.3&#160;million in aggregate principal amount of its outstanding 2023 Notes, with a carrying amount of $78.1&#160;million, for approximately $81.2&#160;million of cash. The Company accounted for the partial settlement of the 2023 Notes as an extinguishment, and as such, recorded a loss on extinguishment of approximately $3.0&#160;million for the year ended December 31, 2020, which is included in &#x201c;Other income (expense), net&#x201d; in the Consolidated Statements of Operations, as well as a reduction of additional paid-in capital of $0.1 million for the repurchase of the conversion feature.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;"&gt;Additionally, on November 11, 2020, the Company entered into a privately negotiated exchange agreement with a holder of its outstanding 2023 Notes, under which the Company agreed to retire $125.0 million in aggregate original principal &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;"&gt;amount of the 2023 Notes, with a carrying amount of $113.1 million, in exchange for the issuance of $132.5 million in aggregate principal amount of new 3.50% convertible senior notes due 2025 described below, which had a fair value that approximated the principal amount of notes issued. The Company accounted for the partial settlement of the 2023 Notes as an extinguishment, and as such, recorded a loss on extinguishment of approximately $4.8&#160;million for the year ended December 31, 2020, which is included in &#x201c;Other income (expense), net&#x201d; in the Consolidated Statements of Operations, as well as a reduction of additional paid-in capital of $14.6 million for the exchange of the conversion feature.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;background:#ffffff;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;"&gt;Finally, on November 5, 2021, the Company entered into a privately negotiated note purchase agreement with a holder of its outstanding 2023 Notes, under which the Company agreed to repurchase and retire approximately $111.5 million in aggregate original principal amount of the 2023 Notes, with a carrying amount of $105.5 million, for cash consideration of approximately $115.6 million, and approximately $1.0 million of accrued and unpaid interest. The Company accounted for the partial settlement of the 2023 Notes as an extinguishment, and as such, recorded a loss on extinguishment of approximately $4.0&#160;million for the year ended December 31, 2021, which is included in &#x201c;Other income (expense), net&#x201d; in the Consolidated Statements of Operations, as well as a reduction of additional paid-in capital of $6.1 million for the repurchase of the conversion feature.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;background:#ffffff;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;"&gt;The 2023 Notes matured on January 15, 2023 and were paid in cash and settled by the Company at that time.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;2025 Notes&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;"&gt;On November 17, 2020, as part of the privately negotiated exchange agreement described above, the Company issued $132.5 million of 3.50% convertible senior notes due 2025 (the &#x201c;2025 Notes&#x201d;). The 2025 Notes bear interest at a rate of&#160;3.50% per year, payable semiannually in arrears on January 15 and July 15 of each year, commencing on July 15, 2021. The 2025 Notes mature on January 15, 2025, unless earlier purchased by the Company, redeemed, or converted.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;2027 Notes&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;background:#ffffff;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;"&gt;On May 18, 2020, the Company completed a private offering of $125.0&#160;million of&#160;3.75% convertible senior notes due 2027 (the &#x201c;2027 Notes&#x201d;). The Company received net proceeds of approximately $121.9&#160;million, after deducting underwriting discounts and fees and expenses payable by the Company. Additionally, the Company used approximately $10.3&#160;million of cash to purchase capped calls, discussed below. The 2027 Notes bear interest at a rate of&#160;3.75% per year, payable semiannually in arrears on June 1 and December 1 of each year, commencing on December 1, 2020. The 2027 Notes mature on June 1, 2027, unless earlier purchased by the Company, redeemed, or converted.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The 2023 Notes, 2025 Notes, and 2027 Notes (collectively, the &#x201c;Notes&#x201d;) are unsecured obligations of Veeco and rank senior in right of payment to any of Veeco&#x2019;s subordinated indebtedness; equal in right of payment to all of Veeco&#x2019;s unsecured indebtedness that is not subordinated; effectively subordinated in right of payment to any of Veeco&#x2019;s secured indebtedness to the extent of the value of the assets securing such indebtedness; and structurally subordinated to all indebtedness and other liabilities (including trade payables) of Veeco&#x2019;s subsidiaries.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The Notes are convertible into cash, shares of the Company&#x2019;s common stock, or a combination thereof, at the Company&#x2019;s election, upon the satisfaction of specified conditions and during certain periods as described below. The initial conversion rates are 24.9800, 41.6667, and 71.5372 shares of the Company&#x2019;s common stock per $1,000 principal amount of the 2023 Notes, 2025 Notes, and 2027 Notes, respectively, representing initial effective conversion prices of $40.03, $24.00, and $13.98 per share of common stock, respectively. The conversion rates may be subject to adjustment upon the occurrence of certain specified events.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Holders may convert all or any portion of their notes, in multiples of one thousand dollar principal amount, at their option at any time prior to the close of business on the business day immediately preceding October 15, 2022 with &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;respect to the 2023 Notes, October 15, 2024 with respect to the 2025 Notes, and October 1, 2027 with respect to the 2027 Notes, only under the following circumstances: &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"&gt;&lt;tr&gt;&lt;td style="width:36pt;"/&gt;&lt;td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:25.2pt;padding:0pt;"&gt;(i)&lt;/td&gt;&lt;td style="padding:0pt;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;During any calendar quarter (and only during such calendar quarter), if the last reported sale price of the common stock for at least &lt;/span&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;20&lt;/span&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt; trading days (whether or not consecutive) during a period of &lt;/span&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;30&lt;/span&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt; consecutive trading days ending on the last trading day of the immediately preceding calendar quarter is greater than or equal to &lt;/span&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;130%&lt;/span&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt; of the conversion price on each applicable trading day;&lt;/span&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:25.2pt;text-indent:-25.2pt;margin:0pt 0pt 0pt 36pt;"&gt;&lt;span style="font-size:10pt;margin-left:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"&gt;&lt;tr&gt;&lt;td style="width:36pt;"/&gt;&lt;td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:25.2pt;padding:0pt;"&gt;(ii)&lt;/td&gt;&lt;td style="padding:0pt;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;During the &lt;/span&gt;&lt;span style="-sec-ix-hidden:Hidden_ni2iafIMQEWlcjh9n4sB8Q;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;five&lt;/span&gt;&lt;/span&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt; consecutive business day period after any &lt;/span&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;five&lt;/span&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt; consecutive trading day period (the &#x201c;measurement period&#x201d;) in which the trading price per &lt;/span&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;one&lt;/span&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt; thousand dollar principal amount of Notes for each trading day of the measurement period was less than &lt;/span&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;98%&lt;/span&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt; of the product of the last reported sale price of Veeco&#x2019;s common stock and the conversion rate on each such trading day;&lt;/span&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:25.2pt;text-indent:-25.2pt;margin:0pt 0pt 0pt 36pt;"&gt;&lt;span style="font-size:10pt;margin-left:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"&gt;&lt;tr&gt;&lt;td style="width:36pt;"/&gt;&lt;td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:25.2pt;padding:0pt;"&gt;(iii)&lt;/td&gt;&lt;td style="padding:0pt;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;If the Company calls any or all of applicable series of the Notes for redemption at any time prior to the close of business on the scheduled trading day immediately preceding the redemption date; or&lt;/span&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;padding-left:25.2pt;text-indent:-25.2pt;margin:0pt 0pt 0pt 36pt;"&gt;&lt;span style="font-size:10pt;margin-left:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"&gt;&lt;tr&gt;&lt;td style="width:36pt;"/&gt;&lt;td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:25.2pt;padding:0pt;"&gt;(iv)&lt;/td&gt;&lt;td style="padding:0pt;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;Upon the occurrence of specified corporate events. &lt;/span&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;For the calendar quarter ended December 31, 2022, the last reported sales price of common stock during the 30 consecutive trading days, based on the criteria outlined in (i) above, was greater than 130% of the conversion price of the 2027 Notes, and as such the 2027 Notes are convertible by the holders until March 31, 2023.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Holders may convert their notes at any time, regardless of the foregoing circumstances, on or after October 15, 2022 with respect to the 2023 Notes, October 15, 2024 with respect to the 2025 Notes, and October 1, 2026 with respect to the 2027 Notes, until the close of business on the business day immediately preceding the respective maturity date. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;Accounting for the Notes after the adoption of ASU 2020-06&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The Company adopted ASU 2020-06 on January 1, 2022 as further described in Note 1, &#x201c;Basis of Presentation&#x201d;. Following the adoption of ASU 2020-06, the Notes are recorded as a single unit within liabilities in the consolidated balance sheets as the conversion features within the Notes are not derivatives that require bifurcation and the Notes do not involve a substantial premium. Transaction costs of $9.2 million, $1.9 million, and $3.1 million incurred in connection with the issuance of the 2023 Notes, 2025 Notes, and 2027 Notes, respectively, were recorded as direct deductions from the related debt liabilities and recognized as non-cash interest expense using the effective interest method over the expected terms of the Notes.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;Accounting for the Notes prior to the adoption of ASU 2020-06&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;"&gt;Upon conversion by the holders, the Company may elect to settle such conversion in shares of its common stock, cash, or a combination thereof. As a result of its cash conversion options, prior to the adoption of ASU 2020-06, the Company segregated the liability component of the instruments from the equity components. The liability components were measured by estimating the fair value of a non-convertible debt instrument that is similar in its terms to the Notes. The calculation of the fair value of the debt components required the use of Level 3 inputs, including utilization of convertible investors&#x2019; credit assumptions and high yield bond indices. Fair value was estimated through discounting future interest and principal payments, an income approach, due under the Notes at a discount rate equal to the estimated borrowing rate for similar non-convertible debt, or &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;7.0%&lt;/span&gt;&lt;span style="font-size:10pt;"&gt;, &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;8.0%&lt;/span&gt;&lt;span style="font-size:10pt;"&gt;, and &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;9.1%&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; with respect to the &lt;/span&gt;&lt;span style="-sec-ix-hidden:Hidden_oLp6BWq4j0SmMOsjNERVHg;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;2023&lt;/span&gt;&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; Notes, &lt;/span&gt;&lt;span style="-sec-ix-hidden:Hidden_JIHuoDj1xk2Lu7ABrLHNxA;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;2025&lt;/span&gt;&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; Notes, and &lt;/span&gt;&lt;span style="-sec-ix-hidden:Hidden_Zok5uByMkkuRQp9J7Ofx9g;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;2027&lt;/span&gt;&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; Notes, respectively. The excess of the aggregate face values of the Notes over the estimated fair values of the liability components of &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;$72.5&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; million, &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;$21.0&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; million, and &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;$34.2&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; million with respect to the 2023 Notes, 2025 Notes, and 2027 Notes, respectively, were recognized as debt discounts and recorded as an increase to additional paid-in capital and were to be amortized over the expected lives of the Notes using the effective interest rate method. Amortization of the debt discounts were recognized as non-cash interest expense.&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The transaction costs of $9.2 million, $1.9 million, and $3.1 million incurred in connection with the issuance of the 2023 Notes, 2025 Notes, and 2027 Notes, respectively, were allocated to the liability and equity components based on their relative values. Transaction costs allocated to the liability component were being amortized using the effective interest rate method and recognized as non-cash interest expense over the expected terms of the Notes. Transaction costs allocated to the equity component of $1.9 million, $0.3 million, and $0.8 million with respect to the 2023 Notes, 2025 Notes, and 2027 Notes, respectively, reduced the value of the equity components recognized in stockholders' equity.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The carrying values of the Notes are as follows:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:21.23%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.07%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:10.78%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:10.85%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:10.94%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:10.85%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:10.85%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:10.83%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:21.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.07%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;white-space:nowrap;width:37.16%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, 2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;white-space:nowrap;width:37.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, 2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:21.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-family:'Calibri','Helvetica','sans-serif';font-weight:bold;"&gt;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.07%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:10.78%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Principal Amount&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:10.85%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Unamortized &lt;/b&gt;&lt;b style="font-weight:bold;"&gt;&lt;br/&gt;&lt;/b&gt;&lt;b style="font-weight:bold;"&gt;transaction costs&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:10.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Net carrying value&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:10.85%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Principal Amount&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:10.85%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Unamortized &lt;/b&gt;&lt;b style="font-weight:bold;"&gt;&lt;br/&gt;&lt;/b&gt;&lt;b style="font-weight:bold;"&gt;debt discount/&lt;/b&gt;&lt;b style="font-weight:bold;"&gt;&lt;br/&gt;&lt;/b&gt;&lt;b style="font-weight:bold;"&gt;transaction costs&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:10.83%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Net carrying value&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="19" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:21.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="16" style="vertical-align:bottom;white-space:nowrap;width:76.54%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:21.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;2023 Notes&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 20,173&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.85%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (4)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 20,169&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.85%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 20,173&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.85%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (967)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.83%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 19,206&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:21.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;2025 Notes&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 132,500&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.85%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (990)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 131,510&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.85%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 132,500&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.85%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (17,302)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.83%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 115,198&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:21.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;2027 Notes&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.78%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 125,000&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.85%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (2,019)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.94%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 122,981&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.85%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 125,000&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.85%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (29,966)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.83%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 95,034&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:21.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;&lt;b style="font-weight:bold;"&gt;Net carrying value&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 12pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;margin-left:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.78%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 277,673&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.85%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (3,013)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.94%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 274,660&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.85%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 277,673&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.85%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (48,235)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.83%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 229,438&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Total interest expense related to the Notes is as follows:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:53.82%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.57%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.89%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.89%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.83%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:53.82%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.57%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:44.6%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;For&#160;the year ended&#160;December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:53.82%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.57%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.87%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="10" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:53.82%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.57%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:44.6%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:53.82%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Cash Interest Expense&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.57%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.89%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.89%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.83%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:53.82%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Coupon interest expense - 2023 Notes&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.57%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 545&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 3,138&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.83%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 7,390&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:53.82%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Coupon interest expense - 2025 Notes&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.57%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.89%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 4,637&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.89%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 4,637&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.83%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 554&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:53.82%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Coupon interest expense - 2027 Notes&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.57%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 4,688&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 4,688&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.83%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 2,904&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:53.82%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Non-cash Interest Expense&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.57%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.89%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.89%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.83%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:53.82%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Amortization of debt discount/transaction costs- 2023 Notes&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.57%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 97&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 4,932&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.83%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 10,887&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:53.82%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Amortization of debt discount/transaction costs- 2025 Notes&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.57%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.89%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 457&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.89%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 4,795&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.83%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 546&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:53.82%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Amortization of debt discount/transaction costs- 2027 Notes&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.57%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 408&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 4,092&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.83%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 2,359&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:53.82%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total Interest Expense&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.57%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.89%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 10,832&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.89%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 26,282&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.83%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 24,640&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;"&gt;The Company determined the Notes are Level 2 liabilities in the fair value hierarchy and estimated their fair values as &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;$19.5&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; million, &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;$143.6&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; million, and &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;$192.0&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; million at December 31, 2022 for the &lt;/span&gt;&lt;span style="-sec-ix-hidden:Hidden_6pZXc4yN8UGzliGoc7Xcfw;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;2023&lt;/span&gt;&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; Notes, &lt;/span&gt;&lt;span style="-sec-ix-hidden:Hidden_j8h4rOm8lUqa-Aq9yQNl0g;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;2025&lt;/span&gt;&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; Notes, and &lt;/span&gt;&lt;span style="-sec-ix-hidden:Hidden_7AsSvO4WhUmmbzAO1MAR1w;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;2027&lt;/span&gt;&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; Notes, respectively.&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;Capped Call Transactions&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;background:#ffffff;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;"&gt;In connection with the offering of the 2027 Notes, on May&#160;13, 2020, the Company entered into privately negotiated capped call transactions (the &#x201c;Capped Call Transactions&#x201d;), pursuant to capped call confirmations, covering the total principal amount of the 2027 Notes for an aggregate premium of $10.3&#160;million. The Capped Call Transactions are expected generally to reduce the potential dilution to the Company&#x2019;s common stock upon any conversion of the 2027 Notes and/or offset any cash payments the Company is required to make in excess of the aggregate principal amount of converted 2027 Notes, as the case may be, with such reduction and/or offset subject to a cap based on the capped price of the Capped Call Transactions. The Capped Call Transactions exercise price is equal to the initial conversion price of the 2027 Notes, and the capped price of the Capped Call Transactions is approximately $18.46&#160;per share and is subject to certain adjustments under the terms of the capped call confirmations.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;background:#ffffff;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;"&gt;The Capped Call Transactions are separate transactions entered into by the Company with the capped call counterparties, are not part of the terms of the 2027 Notes and do not change the holders&#x2019; rights under the 2027 Notes. Holders of the 2027 Notes do not have any rights with respect to the Capped Call Transactions. The cost of the Capped Call Transactions is not expected to be tax-deductible as the Company did not elect to integrate the Capped Call Transactions into the 2027 Notes for tax purposes. The Company used a portion of the net proceeds from the offering of the 2027 Notes to pay for the Capped Call Transactions, and the cost of the Capped Call Transactions was recorded as a reduction of the Company&#x2019;s additional paid-in capital in the accompanying consolidated financial statements.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;Revolving Credit Facility&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;"&gt;On December 16, 2021, the Company entered into a loan and security agreement providing for a senior secured revolving credit facility in an aggregate principal amount of &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;$150&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; million (the &#x201c;Credit Facility&#x201d;), including a &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;$15&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; million letter of credit sublimit. The Credit Facility is guaranteed by the Company&#x2019;s direct material U.S. subsidiaries, subject to customary exceptions. Borrowings under the Credit Facility are secured by a first-priority lien on substantially all of the assets of the Company, subject to customary exceptions. &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;The Credit Facility has a term of &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;five years&lt;/span&gt;&lt;span style="font-size:10pt;"&gt;, maturing on December 16, 2026, or earlier if certain liquidity measures are not met prior to the 2025 Notes maturing. &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;Subject to certain conditions and the receipt of commitments from the lenders, the Loan and Security Agreement allows for revolving commitments under the Credit Facility to be increased by up to &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;$75&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; million. The existing lenders under the Credit Facility are entitled, but not obligated, to provide such incremental commitments.&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Borrowings will bear interest at a floating rate which can be, at the Company&#x2019;s option, either (a) an alternate base rate plus an applicable rate ranging from 0.50% to 1.25% or (b) a SOFR rate (with a floor of 0.00%) for the specified interest period plus an applicable rate ranging from 1.50% to 2.25%, in each case, depending on the Company&#x2019;s Secured Net Leverage Ratio (as defined in the Loan and Security Agreement). The Company will pay an unused commitment fee ranging from 0.25% to 0.35% based on unused capacity under the Credit Facility and the Company&#x2019;s Secured Net Leverage Ratio. The Company may use the proceeds of borrowings under the Credit Facility to pay transaction fees and expenses, provide for its working capital needs and reimburse drawings under letters of credit and for other general corporate purposes.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The Loan and Security Agreement contains customary affirmative covenants for transactions of this type, including, among others, the provision of financial and other information to the administrative agent, notice to the administrative agent upon the occurrence of certain material events, preservation of existence, maintenance of properties and insurance, compliance with laws, including environmental laws, the provision of additional guarantees, and an affiliate transactions covenant, subject to certain exceptions. The Loan and Security Agreement contains customary negative covenants, including, among others, restrictions on the ability to merge and consolidate with other companies, incur indebtedness, refinance our existing convertible notes, grant liens or security interests on assets, make investments, acquisitions, loans, or advances, pay dividends, and sell or otherwise transfer assets.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The Loan and Security Agreement contains financial maintenance covenants that require the Borrower to maintain an Interest Coverage Ratio (as defined in the Loan and Security Agreement) of not less than 3.00 to 1.00, a Total Net Leverage Ratio (as defined in the Loan and Security Agreement) of not more than 4.50 to 1.00, and a Secured Net Leverage Ratio (as defined in the Loan and Security Agreement) of not more than 2.50 to 1.00, in each case, tested at the end of each fiscal quarter commencing with the fiscal quarter ending March 31, 2022. The Loan and Security Agreement also provides for a number of customary events of default, including, among others: payment defaults to the lenders&#x37e; voluntary and involuntary bankruptcy proceedings&#x37e; covenant defaults&#x37e; material inaccuracies of representations and warranties&#x37e; certain change of control events&#x37e; material money judgments&#x37e; and other customary events of default. The occurrence of an event of default could result in the acceleration of obligations and the termination of lending commitments under the Loan and Security Agreement.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;No amounts were outstanding under the Credit Facility as of December 31, 2022 or December 31, 2021.&lt;/p&gt;</us-gaap:DebtDisclosureTextBlock>
    <us-gaap:DebtInstrumentFaceAmount
      contextRef="As_Of_1_10_2017_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_IWFhTEer-0CSeVpfpU13Ng"
      decimals="-5"
      id="Narr_9TQ-u4-yoU6sY1t2pi6Yig"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">345000000.0</us-gaap:DebtInstrumentFaceAmount>
    <us-gaap:DebtInstrumentInterestRateStatedPercentage
      contextRef="As_Of_1_10_2017_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_IWFhTEer-0CSeVpfpU13Ng"
      decimals="INF"
      id="Narr_4exPvFAcMEeEqpySPj4aBA"
      unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w">0.0270</us-gaap:DebtInstrumentInterestRateStatedPercentage>
    <us-gaap:ProceedsFromConvertibleDebt
      contextRef="Duration_1_10_2017_To_1_10_2017_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_uuco5aSWq0uhuvDldQHNrg"
      decimals="-5"
      id="Narr_Ukb36PN9HkOsBJ8XJocE0A"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">335800000</us-gaap:ProceedsFromConvertibleDebt>
    <us-gaap:DebtInstrumentInterestRateStatedPercentage
      contextRef="As_Of_1_10_2017_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_IWFhTEer-0CSeVpfpU13Ng"
      decimals="INF"
      id="Narr_NTmYw2LGjE2crrSL490Nrw"
      unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w">0.0270</us-gaap:DebtInstrumentInterestRateStatedPercentage>
    <us-gaap:DebtInstrumentFaceAmount
      contextRef="As_Of_5_18_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_u4UJ5lnrc0eivAfoRYyQng"
      decimals="-5"
      id="Narr_VSAHh87L3kaxHoxnXDlItw"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">125000000.0</us-gaap:DebtInstrumentFaceAmount>
    <us-gaap:DebtInstrumentInterestRateStatedPercentage
      contextRef="As_Of_5_18_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_u4UJ5lnrc0eivAfoRYyQng"
      decimals="INF"
      id="Narr_161UKrfAe0GC5v1__JLfww"
      unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w">0.0375</us-gaap:DebtInstrumentInterestRateStatedPercentage>
    <us-gaap:ExtinguishmentOfDebtAmount
      contextRef="Duration_5_18_2020_To_5_18_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_5zzHqMvYcEu0fv8z6RanBg"
      decimals="-5"
      id="Narr_dpZV93e70UqZmdwJbuwE1A"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">88300000</us-gaap:ExtinguishmentOfDebtAmount>
    <veco:DebtInstrumentCarryingAmountDebtExtinguished
      contextRef="Duration_5_18_2020_To_5_18_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_5zzHqMvYcEu0fv8z6RanBg"
      decimals="-5"
      id="Narr_kmhD5Kog5EiMOAf6XIeLRg"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">78100000</veco:DebtInstrumentCarryingAmountDebtExtinguished>
    <us-gaap:RepaymentsOfUnsecuredDebt
      contextRef="Duration_5_18_2020_To_5_18_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_5zzHqMvYcEu0fv8z6RanBg"
      decimals="-5"
      id="Narr_A8qrhR7Vp0GSuNauEIaeNg"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">81200000</us-gaap:RepaymentsOfUnsecuredDebt>
    <us-gaap:GainsLossesOnExtinguishmentOfDebt
      contextRef="Duration_5_18_2020_To_5_18_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_us-gaap_IncomeStatementLocationAxis_us-gaap_OtherNonoperatingIncomeExpenseMember_00m-x6_WfkKT5olXftmhcQ"
      decimals="-5"
      id="Narr_UJX3yJkpYEmnxNgyO1Csvg"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">3000000.0</us-gaap:GainsLossesOnExtinguishmentOfDebt>
    <veco:AdjustmentsToAdditionalPaidInCapitalExtinguishmentEquityComponentOfNotesRepurchased
      contextRef="Duration_5_18_2020_To_5_18_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_5zzHqMvYcEu0fv8z6RanBg"
      decimals="-5"
      id="Narr_NWBXYGDSNU2_MOc1Iv_QAg"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">100000</veco:AdjustmentsToAdditionalPaidInCapitalExtinguishmentEquityComponentOfNotesRepurchased>
    <us-gaap:ExtinguishmentOfDebtAmount
      contextRef="Duration_11_11_2020_To_11_11_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_YDagF4J520ede_9zdqDMmg"
      decimals="-5"
      id="Narr_xhqYHv0xukyTxgSAhcnNSA"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">125000000.0</us-gaap:ExtinguishmentOfDebtAmount>
    <veco:DebtInstrumentCarryingAmountDebtExtinguished
      contextRef="Duration_11_11_2020_To_11_11_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_YDagF4J520ede_9zdqDMmg"
      decimals="-5"
      id="Narr_bBxsRCrNPESM9n1nXOSgzg"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">113100000</veco:DebtInstrumentCarryingAmountDebtExtinguished>
    <us-gaap:DebtInstrumentFaceAmount
      contextRef="As_Of_11_17_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_zF8UnsN0JEqzHyuktvH1rA"
      decimals="-5"
      id="Narr_oNLw5WTdqUy3xls3uOBpvA"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">132500000</us-gaap:DebtInstrumentFaceAmount>
    <us-gaap:DebtInstrumentInterestRateStatedPercentage
      contextRef="As_Of_11_17_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_zF8UnsN0JEqzHyuktvH1rA"
      decimals="INF"
      id="Narr_rdSM_XALgUuIUsNcO2qUew"
      unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w">0.0350</us-gaap:DebtInstrumentInterestRateStatedPercentage>
    <us-gaap:GainsLossesOnExtinguishmentOfDebt
      contextRef="Duration_11_11_2020_To_11_11_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_us-gaap_IncomeStatementLocationAxis_us-gaap_OtherNonoperatingIncomeExpenseMember_DYB3CDbyX0u3Uq0DQh2dDg"
      decimals="-5"
      id="Narr_tNWBGWGXoESe9ekeK4rxFw"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">4800000</us-gaap:GainsLossesOnExtinguishmentOfDebt>
    <veco:AdjustmentsToAdditionalPaidInCapitalExtinguishmentEquityComponentOfNotesRepurchased
      contextRef="Duration_11_11_2020_To_11_11_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_YDagF4J520ede_9zdqDMmg"
      decimals="-5"
      id="Narr_EvzHqOiBqEe_31Pwg_PCUw"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">14600000</veco:AdjustmentsToAdditionalPaidInCapitalExtinguishmentEquityComponentOfNotesRepurchased>
    <us-gaap:ExtinguishmentOfDebtAmount
      contextRef="Duration_11_5_2021_To_11_5_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_gRCscxrjLkmeVdBuAV6ddA"
      decimals="-5"
      id="Narr_Et2FHKd7bk-vmCKIkKMY7Q"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">111500000</us-gaap:ExtinguishmentOfDebtAmount>
    <veco:DebtInstrumentCarryingAmountDebtExtinguished
      contextRef="Duration_11_5_2021_To_11_5_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_gRCscxrjLkmeVdBuAV6ddA"
      decimals="-5"
      id="Narr_CqX6DUCIsUedK4TMEA61_A"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">105500000</veco:DebtInstrumentCarryingAmountDebtExtinguished>
    <us-gaap:RepaymentsOfUnsecuredDebt
      contextRef="Duration_11_5_2021_To_11_5_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_gRCscxrjLkmeVdBuAV6ddA"
      decimals="-5"
      id="Narr_wYLIgjzQckqWUvBjNuWdlQ"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">115600000</us-gaap:RepaymentsOfUnsecuredDebt>
    <us-gaap:InterestPayableCurrentAndNoncurrent
      contextRef="As_Of_11_5_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_ovfhrTec7EC_2sSmeCBK7w"
      decimals="-5"
      id="Narr_Nk7Hxn5aVkW06Kr85EEP4g"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">1000000.0</us-gaap:InterestPayableCurrentAndNoncurrent>
    <us-gaap:GainsLossesOnExtinguishmentOfDebt
      contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_us-gaap_IncomeStatementLocationAxis_us-gaap_OtherNonoperatingIncomeExpenseMember_aatANL4WzE-Jl_REorgp7g"
      decimals="-5"
      id="Narr_xUnkPFp-f0OoFFaQ2vsI8w"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">4000000.0</us-gaap:GainsLossesOnExtinguishmentOfDebt>
    <veco:AdjustmentsToAdditionalPaidInCapitalExtinguishmentEquityComponentOfNotesRepurchased
      contextRef="Duration_11_5_2021_To_11_5_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_gRCscxrjLkmeVdBuAV6ddA"
      decimals="-5"
      id="Narr_gUyE3EZ3MkClvC7MdJH1AQ"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">6100000</veco:AdjustmentsToAdditionalPaidInCapitalExtinguishmentEquityComponentOfNotesRepurchased>
    <us-gaap:DebtInstrumentFaceAmount
      contextRef="As_Of_11_17_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_zF8UnsN0JEqzHyuktvH1rA"
      decimals="-5"
      id="Narr_2pl5iiquLEiEak6lJH6hRA"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">132500000</us-gaap:DebtInstrumentFaceAmount>
    <us-gaap:DebtInstrumentInterestRateStatedPercentage
      contextRef="As_Of_11_17_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_zF8UnsN0JEqzHyuktvH1rA"
      decimals="INF"
      id="Narr_54MtMYTO_kKe_xoMJ88THQ"
      unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w">0.0350</us-gaap:DebtInstrumentInterestRateStatedPercentage>
    <us-gaap:DebtInstrumentInterestRateStatedPercentage
      contextRef="As_Of_11_17_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_zF8UnsN0JEqzHyuktvH1rA"
      decimals="INF"
      id="Narr_n95qV7xjFkK8r0jHuLD8eA"
      unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w">0.0350</us-gaap:DebtInstrumentInterestRateStatedPercentage>
    <us-gaap:DebtInstrumentFaceAmount
      contextRef="As_Of_5_18_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_u4UJ5lnrc0eivAfoRYyQng"
      decimals="-5"
      id="Narr_eEsarZLjpEmqjrgKqQy4dA"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">125000000.0</us-gaap:DebtInstrumentFaceAmount>
    <us-gaap:DebtInstrumentInterestRateStatedPercentage
      contextRef="As_Of_5_18_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_u4UJ5lnrc0eivAfoRYyQng"
      decimals="INF"
      id="Narr_IpV_kURREEG27DAm8G6UmQ"
      unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w">0.0375</us-gaap:DebtInstrumentInterestRateStatedPercentage>
    <us-gaap:ProceedsFromConvertibleDebt
      contextRef="Duration_5_18_2020_To_5_18_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_5Ecfm1aP80Ow_u3X86TuUQ"
      decimals="-5"
      id="Narr_FkMervw4MUSkyRQXzj1t6A"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">121900000</us-gaap:ProceedsFromConvertibleDebt>
    <us-gaap:PaymentsForDerivativeInstrumentFinancingActivities
      contextRef="Duration_5_18_2020_To_5_18_2020_82r_aymnikqSCiP3vs1ZlA"
      decimals="-5"
      id="Narr_-Gp-qCNxKUKB_onp0EYf7g"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">10300000</us-gaap:PaymentsForDerivativeInstrumentFinancingActivities>
    <us-gaap:DebtInstrumentInterestRateStatedPercentage
      contextRef="As_Of_5_18_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_u4UJ5lnrc0eivAfoRYyQng"
      decimals="INF"
      id="Narr_7vjJwnEKRUCthzsq9IPDkg"
      unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w">0.0375</us-gaap:DebtInstrumentInterestRateStatedPercentage>
    <us-gaap:DebtInstrumentConvertibleConversionRatio1
      contextRef="Duration_1_10_2017_To_1_10_2017_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_uuco5aSWq0uhuvDldQHNrg"
      decimals="7"
      id="Narr_MbVxxEjP3EeVYyBy6Xvxmw"
      unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w">0.0249800</us-gaap:DebtInstrumentConvertibleConversionRatio1>
    <us-gaap:DebtInstrumentConvertibleConversionRatio1
      contextRef="Duration_11_17_2020_To_11_17_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_40oKyNrK80KsJh3vH1tMzQ"
      decimals="7"
      id="Narr_e2B1zX2jmUqHoXW7KX47Gw"
      unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w">0.0416667</us-gaap:DebtInstrumentConvertibleConversionRatio1>
    <us-gaap:DebtInstrumentConvertibleConversionRatio1
      contextRef="Duration_5_18_2020_To_5_18_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_5Ecfm1aP80Ow_u3X86TuUQ"
      decimals="7"
      id="Narr_1mKVE0bgAEuZn0pkm3bLLw"
      unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w">0.0715372</us-gaap:DebtInstrumentConvertibleConversionRatio1>
    <veco:DebtInstrumentPrincipalAmountDenominationForConversionIntoCommonStock
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_DebtInstrumentAxis_us-gaap_ConvertibleDebtMember_XQJwNQGip0-4rSyYMzx-Zw"
      decimals="-3"
      id="Narr_67N4bD6gek-iLffjyOK7Gw"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">1000</veco:DebtInstrumentPrincipalAmountDenominationForConversionIntoCommonStock>
    <us-gaap:DebtInstrumentConvertibleConversionPrice1
      contextRef="As_Of_1_10_2017_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_IWFhTEer-0CSeVpfpU13Ng"
      decimals="2"
      id="Narr_Zt3eOUddg06k7ycKcBnt6w"
      unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg">40.03</us-gaap:DebtInstrumentConvertibleConversionPrice1>
    <us-gaap:DebtInstrumentConvertibleConversionPrice1
      contextRef="As_Of_11_17_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_zF8UnsN0JEqzHyuktvH1rA"
      decimals="2"
      id="Narr_Fv7agAjL1U26Szi4qnUnPg"
      unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg">24.00</us-gaap:DebtInstrumentConvertibleConversionPrice1>
    <us-gaap:DebtInstrumentConvertibleConversionPrice1
      contextRef="As_Of_5_18_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_u4UJ5lnrc0eivAfoRYyQng"
      decimals="2"
      id="Narr_jCxKD6maD0ycDAsUNHUdXQ"
      unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg">13.98</us-gaap:DebtInstrumentConvertibleConversionPrice1>
    <veco:DebtInstrumentPrincipalAmountDenominationForConversionIntoCommonStock
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_DebtInstrumentAxis_us-gaap_ConvertibleDebtMember_XQJwNQGip0-4rSyYMzx-Zw"
      decimals="-3"
      id="Narr_A8EbOZYOKEufnJ0sg3JWtw"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">1000</veco:DebtInstrumentPrincipalAmountDenominationForConversionIntoCommonStock>
    <us-gaap:DebtInstrumentConvertibleThresholdTradingDays
      contextRef="Duration_1_1_2022_To_12_31_2022_srt_RangeAxis_srt_MinimumMember_us-gaap_DebtInstrumentAxis_us-gaap_ConvertibleDebtMember_ABdcmH9T60iabiMQNHpnMw"
      decimals="INF"
      id="Narr_kFaYQ3nmuE6ud5DDn9YnKw"
      unitRef="Unit_Standard_D_LRKZsttWxECdvF14i5EoQg">20</us-gaap:DebtInstrumentConvertibleThresholdTradingDays>
    <us-gaap:DebtInstrumentConvertibleThresholdConsecutiveTradingDays1
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_DebtInstrumentAxis_us-gaap_ConvertibleDebtMember_XQJwNQGip0-4rSyYMzx-Zw"
      decimals="INF"
      id="Narr_u-FVaQCwA0SgwA6_miDU9w"
      unitRef="Unit_Standard_D_LRKZsttWxECdvF14i5EoQg">30</us-gaap:DebtInstrumentConvertibleThresholdConsecutiveTradingDays1>
    <us-gaap:DebtInstrumentConvertibleThresholdPercentageOfStockPriceTrigger
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_DebtInstrumentAxis_us-gaap_ConvertibleDebtMember_XQJwNQGip0-4rSyYMzx-Zw"
      decimals="2"
      id="Narr_PYYzPoXZdkanN895q1rovA"
      unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w">1.30</us-gaap:DebtInstrumentConvertibleThresholdPercentageOfStockPriceTrigger>
    <us-gaap:DebtInstrumentConvertibleThresholdTradingDays
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_DebtInstrumentAxis_us-gaap_ConvertibleDebtMember_XQJwNQGip0-4rSyYMzx-Zw"
      decimals="INF"
      id="Narr_vJMqDT0oP0av9yGK4nwGCg"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">5</us-gaap:DebtInstrumentConvertibleThresholdTradingDays>
    <veco:DebtInstrumentPrincipalAmountDenominationForConversionIntoCommonStock
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_DebtInstrumentAxis_us-gaap_ConvertibleDebtMember_XQJwNQGip0-4rSyYMzx-Zw"
      decimals="-3"
      id="Narr_4v7-s3SbH02tMi_00FVG3g"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">1000</veco:DebtInstrumentPrincipalAmountDenominationForConversionIntoCommonStock>
    <veco:DebtInstrumentsConvertibleFeaturesMaximumPercentageOfCommonStockCouldBeConverted
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_DebtInstrumentAxis_us-gaap_ConvertibleDebtMember_XQJwNQGip0-4rSyYMzx-Zw"
      decimals="2"
      id="Narr_amygPt2lzUm14KLSUe3hpA"
      unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w">0.98</veco:DebtInstrumentsConvertibleFeaturesMaximumPercentageOfCommonStockCouldBeConverted>
    <us-gaap:DebtInstrumentConvertibleThresholdConsecutiveTradingDays1
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_DebtInstrumentAxis_us-gaap_ConvertibleDebtMember_XQJwNQGip0-4rSyYMzx-Zw"
      decimals="INF"
      id="Narr_n50KYA3XLkKdpeM_9tHK7g"
      unitRef="Unit_Standard_D_LRKZsttWxECdvF14i5EoQg">30</us-gaap:DebtInstrumentConvertibleThresholdConsecutiveTradingDays1>
    <us-gaap:DebtInstrumentConvertibleThresholdPercentageOfStockPriceTrigger
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_DebtInstrumentAxis_us-gaap_ConvertibleDebtMember_XQJwNQGip0-4rSyYMzx-Zw"
      decimals="2"
      id="Narr_OLpiN0eXb0GPICk55Ez-8Q"
      unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w">1.30</us-gaap:DebtInstrumentConvertibleThresholdPercentageOfStockPriceTrigger>
    <us-gaap:PaymentsOfDebtIssuanceCosts
      contextRef="Duration_1_10_2017_To_1_10_2017_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_uuco5aSWq0uhuvDldQHNrg"
      decimals="-5"
      id="Narr_02URXEV4UkukuCNQhVdYSQ"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">9200000</us-gaap:PaymentsOfDebtIssuanceCosts>
    <us-gaap:PaymentsOfDebtIssuanceCosts
      contextRef="Duration_11_17_2020_To_11_17_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_40oKyNrK80KsJh3vH1tMzQ"
      decimals="-5"
      id="Narr_tbfMghcIgUiZjKcwO-xqhw"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">1900000</us-gaap:PaymentsOfDebtIssuanceCosts>
    <us-gaap:PaymentsOfDebtIssuanceCosts
      contextRef="Duration_5_18_2020_To_5_18_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_5Ecfm1aP80Ow_u3X86TuUQ"
      decimals="-5"
      id="Narr_50TI-UE7R0ugYtebbqruXA"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">3100000</us-gaap:PaymentsOfDebtIssuanceCosts>
    <us-gaap:LongTermDebtMeasurementInput
      contextRef="As_Of_1_10_2017_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_IWFhTEer-0CSeVpfpU13Ng"
      decimals="1"
      id="Narr_UpJj3ddLI06qEFE5QBCKWg"
      unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w">7.0</us-gaap:LongTermDebtMeasurementInput>
    <us-gaap:LongTermDebtMeasurementInput
      contextRef="As_Of_11_17_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_zF8UnsN0JEqzHyuktvH1rA"
      decimals="1"
      id="Narr_S6Q83VKjy0KnwHMk9YNB5w"
      unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w">8.0</us-gaap:LongTermDebtMeasurementInput>
    <us-gaap:LongTermDebtMeasurementInput
      contextRef="As_Of_5_18_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_u4UJ5lnrc0eivAfoRYyQng"
      decimals="1"
      id="Narr_TacIJ05iWk-WzZ45UflRMQ"
      unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w">9.1</us-gaap:LongTermDebtMeasurementInput>
    <us-gaap:DebtInstrumentUnamortizedDiscount
      contextRef="As_Of_1_10_2017_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_IWFhTEer-0CSeVpfpU13Ng"
      decimals="-5"
      id="Narr_xlwGB_Yp-kSF72mLzPMOxw"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">72500000</us-gaap:DebtInstrumentUnamortizedDiscount>
    <us-gaap:DebtInstrumentUnamortizedDiscount
      contextRef="As_Of_11_17_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_zF8UnsN0JEqzHyuktvH1rA"
      decimals="-5"
      id="Narr_NbexTZOYYE6LuRJX6OBG1A"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">21000000.0</us-gaap:DebtInstrumentUnamortizedDiscount>
    <us-gaap:DebtInstrumentUnamortizedDiscount
      contextRef="As_Of_5_18_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_u4UJ5lnrc0eivAfoRYyQng"
      decimals="-5"
      id="Narr_SlgE8vSY202oDdv3RreHtw"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">34200000</us-gaap:DebtInstrumentUnamortizedDiscount>
    <us-gaap:PaymentsOfDebtIssuanceCosts
      contextRef="Duration_1_10_2017_To_1_10_2017_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_uuco5aSWq0uhuvDldQHNrg"
      decimals="-5"
      id="Narr__aKCRHeRUkynDBnanjAsuw"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">9200000</us-gaap:PaymentsOfDebtIssuanceCosts>
    <us-gaap:PaymentsOfDebtIssuanceCosts
      contextRef="Duration_11_17_2020_To_11_17_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_40oKyNrK80KsJh3vH1tMzQ"
      decimals="-5"
      id="Narr_jiTZZRKVt0uYHUhyA8USWQ"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">1900000</us-gaap:PaymentsOfDebtIssuanceCosts>
    <us-gaap:PaymentsOfDebtIssuanceCosts
      contextRef="Duration_5_18_2020_To_5_18_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_5Ecfm1aP80Ow_u3X86TuUQ"
      decimals="-5"
      id="Narr_pu92ZQsJA0uKFJU2UviZsQ"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">3100000</us-gaap:PaymentsOfDebtIssuanceCosts>
    <veco:DebtIssuanceCostsTransactionCostsAllocatedToEquityComponent
      contextRef="Duration_1_10_2017_To_1_10_2017_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_uuco5aSWq0uhuvDldQHNrg"
      decimals="-5"
      id="Narr_sS9XkppTlkeWaci70EgM-A"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">1900000</veco:DebtIssuanceCostsTransactionCostsAllocatedToEquityComponent>
    <veco:DebtIssuanceCostsTransactionCostsAllocatedToEquityComponent
      contextRef="Duration_11_17_2020_To_11_17_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_40oKyNrK80KsJh3vH1tMzQ"
      decimals="-5"
      id="Narr_DQ3au84-AUK8zUru4fZj4g"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">300000</veco:DebtIssuanceCostsTransactionCostsAllocatedToEquityComponent>
    <veco:DebtIssuanceCostsTransactionCostsAllocatedToEquityComponent
      contextRef="Duration_5_18_2020_To_5_18_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_5Ecfm1aP80Ow_u3X86TuUQ"
      decimals="-5"
      id="Narr__7J2BJE3J0CDHcUXENAgog"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">800000</veco:DebtIssuanceCostsTransactionCostsAllocatedToEquityComponent>
    <us-gaap:ConvertibleDebtTableTextBlock
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tb_bAVuTEXo4k2St1xT5XtRPQ">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:21.23%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.07%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:10.78%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:10.85%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:10.94%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:10.85%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:10.85%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:10.83%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:21.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.07%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;white-space:nowrap;width:37.16%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, 2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;white-space:nowrap;width:37.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, 2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:21.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-family:'Calibri','Helvetica','sans-serif';font-weight:bold;"&gt;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.07%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:10.78%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Principal Amount&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:10.85%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Unamortized &lt;/b&gt;&lt;b style="font-weight:bold;"&gt;&lt;br/&gt;&lt;/b&gt;&lt;b style="font-weight:bold;"&gt;transaction costs&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:10.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Net carrying value&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:10.85%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Principal Amount&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:10.85%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Unamortized &lt;/b&gt;&lt;b style="font-weight:bold;"&gt;&lt;br/&gt;&lt;/b&gt;&lt;b style="font-weight:bold;"&gt;debt discount/&lt;/b&gt;&lt;b style="font-weight:bold;"&gt;&lt;br/&gt;&lt;/b&gt;&lt;b style="font-weight:bold;"&gt;transaction costs&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:10.83%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Net carrying value&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="19" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:21.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="16" style="vertical-align:bottom;white-space:nowrap;width:76.54%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:21.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;2023 Notes&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 20,173&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.85%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (4)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 20,169&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.85%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 20,173&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.85%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (967)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.83%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 19,206&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:21.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;2025 Notes&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 132,500&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.85%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (990)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 131,510&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.85%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 132,500&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.85%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (17,302)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.83%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 115,198&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:21.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;2027 Notes&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.78%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 125,000&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.85%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (2,019)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.94%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 122,981&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.85%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 125,000&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.85%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (29,966)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.83%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 95,034&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:21.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;&lt;b style="font-weight:bold;"&gt;Net carrying value&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 12pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;margin-left:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.78%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 277,673&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.85%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (3,013)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.94%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 274,660&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.85%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 277,673&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.85%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (48,235)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.83%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 229,438&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</us-gaap:ConvertibleDebtTableTextBlock>
    <us-gaap:DebtInstrumentFaceAmount
      contextRef="As_Of_12_31_2022_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_wzCRDkFhQEa0Q4hGaj9ADA"
      decimals="-3"
      id="Tc_8_TK98ssC0ae3wyhMzKEug_4_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">20173000</us-gaap:DebtInstrumentFaceAmount>
    <us-gaap:DebtInstrumentUnamortizedDiscountPremiumAndDebtIssuanceCostsNet
      contextRef="As_Of_12_31_2022_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_wzCRDkFhQEa0Q4hGaj9ADA"
      decimals="-3"
      id="Tc_4I5Az0AcnkmX9HiFjNr0mA_4_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">4000</us-gaap:DebtInstrumentUnamortizedDiscountPremiumAndDebtIssuanceCostsNet>
    <us-gaap:LongTermDebt
      contextRef="As_Of_12_31_2022_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_wzCRDkFhQEa0Q4hGaj9ADA"
      decimals="-3"
      id="Tc_Ecd81vnboUGDDQbSqqpiqQ_4_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">20169000</us-gaap:LongTermDebt>
    <us-gaap:DebtInstrumentFaceAmount
      contextRef="As_Of_12_31_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_R6ZH9u7Tf0ijR-shdVpjow"
      decimals="-3"
      id="Tc_dErBP_I1iECgh2ePKGcVXA_4_12"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">20173000</us-gaap:DebtInstrumentFaceAmount>
    <us-gaap:DebtInstrumentUnamortizedDiscountPremiumAndDebtIssuanceCostsNet
      contextRef="As_Of_12_31_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_R6ZH9u7Tf0ijR-shdVpjow"
      decimals="-3"
      id="Tc_Ln48ag2HVkWblzTInA6sFQ_4_15"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">967000</us-gaap:DebtInstrumentUnamortizedDiscountPremiumAndDebtIssuanceCostsNet>
    <us-gaap:LongTermDebt
      contextRef="As_Of_12_31_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_R6ZH9u7Tf0ijR-shdVpjow"
      decimals="-3"
      id="Tc_H3LNVEVa9k-YJFdZiYcfMg_4_18"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">19206000</us-gaap:LongTermDebt>
    <us-gaap:DebtInstrumentFaceAmount
      contextRef="As_Of_12_31_2022_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_ZetZSnUIu0SKEy9vSz2DrA"
      decimals="-3"
      id="Tc_5O_B6H2iC0GE0j5yfCUM5g_5_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">132500000</us-gaap:DebtInstrumentFaceAmount>
    <us-gaap:DebtInstrumentUnamortizedDiscountPremiumAndDebtIssuanceCostsNet
      contextRef="As_Of_12_31_2022_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_ZetZSnUIu0SKEy9vSz2DrA"
      decimals="-3"
      id="Tc_2UJbwl7ifEuAmGIvIgLIfA_5_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">990000</us-gaap:DebtInstrumentUnamortizedDiscountPremiumAndDebtIssuanceCostsNet>
    <us-gaap:LongTermDebt
      contextRef="As_Of_12_31_2022_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_ZetZSnUIu0SKEy9vSz2DrA"
      decimals="-3"
      id="Tc_A7teuNinxECbMnYDUtidVw_5_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">131510000</us-gaap:LongTermDebt>
    <us-gaap:DebtInstrumentFaceAmount
      contextRef="As_Of_12_31_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_tIX8Lasv8E2B1ACI65359Q"
      decimals="-3"
      id="Tc_DhaILqRhJkaZUm3tpsx-rg_5_12"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">132500000</us-gaap:DebtInstrumentFaceAmount>
    <us-gaap:DebtInstrumentUnamortizedDiscountPremiumAndDebtIssuanceCostsNet
      contextRef="As_Of_12_31_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_tIX8Lasv8E2B1ACI65359Q"
      decimals="-3"
      id="Tc_0seZB3cnQEyIfugYQjSDNQ_5_15"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">17302000</us-gaap:DebtInstrumentUnamortizedDiscountPremiumAndDebtIssuanceCostsNet>
    <us-gaap:LongTermDebt
      contextRef="As_Of_12_31_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_tIX8Lasv8E2B1ACI65359Q"
      decimals="-3"
      id="Tc_f_BqlIgWxkySzBf5pGRCEA_5_18"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">115198000</us-gaap:LongTermDebt>
    <us-gaap:DebtInstrumentFaceAmount
      contextRef="As_Of_12_31_2022_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_rMWc7QQ050epRT-cmk3YDQ"
      decimals="-3"
      id="Tc_eRrztvoRjEWTGOMzRhOqnA_6_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">125000000</us-gaap:DebtInstrumentFaceAmount>
    <us-gaap:DebtInstrumentUnamortizedDiscountPremiumAndDebtIssuanceCostsNet
      contextRef="As_Of_12_31_2022_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_rMWc7QQ050epRT-cmk3YDQ"
      decimals="-3"
      id="Tc_t9ZUO7YHMUO3DmIHqzisKA_6_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">2019000</us-gaap:DebtInstrumentUnamortizedDiscountPremiumAndDebtIssuanceCostsNet>
    <us-gaap:LongTermDebt
      contextRef="As_Of_12_31_2022_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_rMWc7QQ050epRT-cmk3YDQ"
      decimals="-3"
      id="Tc_uPepqdEwpkyGV5kgDWrEBw_6_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">122981000</us-gaap:LongTermDebt>
    <us-gaap:DebtInstrumentFaceAmount
      contextRef="As_Of_12_31_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_e6zIPCidbESUll-ecgx8RA"
      decimals="-3"
      id="Tc_t9whUzIMQkiPhRorDkHgPQ_6_12"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">125000000</us-gaap:DebtInstrumentFaceAmount>
    <us-gaap:DebtInstrumentUnamortizedDiscountPremiumAndDebtIssuanceCostsNet
      contextRef="As_Of_12_31_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_e6zIPCidbESUll-ecgx8RA"
      decimals="-3"
      id="Tc_XxD6OfxkWkWFG75X2ipRaw_6_15"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">29966000</us-gaap:DebtInstrumentUnamortizedDiscountPremiumAndDebtIssuanceCostsNet>
    <us-gaap:LongTermDebt
      contextRef="As_Of_12_31_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_e6zIPCidbESUll-ecgx8RA"
      decimals="-3"
      id="Tc_tYzTgmTJiEmSdaMw9iSRSQ_6_18"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">95034000</us-gaap:LongTermDebt>
    <us-gaap:DebtInstrumentFaceAmount
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_1gMieIzkl0-F7-FVGe2s8A_7_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">277673000</us-gaap:DebtInstrumentFaceAmount>
    <us-gaap:DebtInstrumentUnamortizedDiscountPremiumAndDebtIssuanceCostsNet
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_Gyt4sF8Ex0qqbbwxcI_-RA_7_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">3013000</us-gaap:DebtInstrumentUnamortizedDiscountPremiumAndDebtIssuanceCostsNet>
    <us-gaap:LongTermDebt
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_MUin1mbgUUmgNLazOOczTQ_7_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">274660000</us-gaap:LongTermDebt>
    <us-gaap:DebtInstrumentFaceAmount
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_YuFoV_GsTkShQMC4rukc0Q_7_12"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">277673000</us-gaap:DebtInstrumentFaceAmount>
    <us-gaap:DebtInstrumentUnamortizedDiscountPremiumAndDebtIssuanceCostsNet
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_Ki8klreATUamZyaabBYwlw_7_15"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">48235000</us-gaap:DebtInstrumentUnamortizedDiscountPremiumAndDebtIssuanceCostsNet>
    <us-gaap:LongTermDebt
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_8y3KKURrzkushJLG1ohP4Q_7_18"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">229438000</us-gaap:LongTermDebt>
    <us-gaap:InterestIncomeAndInterestExpenseDisclosureTableTextBlock
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tb_g3cxqOCYt0q53T2hWijmlw">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:53.82%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.57%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.89%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.89%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.83%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:53.82%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.57%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:44.6%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;For&#160;the year ended&#160;December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:53.82%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.57%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.87%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="10" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:53.82%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.57%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:44.6%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:53.82%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Cash Interest Expense&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.57%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.89%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.89%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.83%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:53.82%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Coupon interest expense - 2023 Notes&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.57%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 545&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 3,138&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.83%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 7,390&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:53.82%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Coupon interest expense - 2025 Notes&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.57%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.89%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 4,637&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.89%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 4,637&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.83%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 554&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:53.82%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Coupon interest expense - 2027 Notes&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.57%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 4,688&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 4,688&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.83%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 2,904&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:53.82%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Non-cash Interest Expense&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.57%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.89%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.89%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.83%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:53.82%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Amortization of debt discount/transaction costs- 2023 Notes&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.57%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 97&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 4,932&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.83%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 10,887&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:53.82%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Amortization of debt discount/transaction costs- 2025 Notes&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.57%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.89%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 457&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.89%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 4,795&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.83%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 546&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:53.82%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Amortization of debt discount/transaction costs- 2027 Notes&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.57%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 408&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 4,092&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.83%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 2,359&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:53.82%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total Interest Expense&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.57%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.89%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 10,832&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.89%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 26,282&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.83%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 24,640&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</us-gaap:InterestIncomeAndInterestExpenseDisclosureTableTextBlock>
    <us-gaap:InterestExpenseDebtExcludingAmortization
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_IlL1-aoOz0muNy23d_GMOw"
      decimals="-3"
      id="Tc_tSGtL1zBR0uRJ9ey2p3png_5_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">545000</us-gaap:InterestExpenseDebtExcludingAmortization>
    <us-gaap:InterestExpenseDebtExcludingAmortization
      contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_sUmtKlw7GU2Z1jCoNlH0mQ"
      decimals="-3"
      id="Tc_AhXELX1ElEa0aGFZShZBcQ_5_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">3138000</us-gaap:InterestExpenseDebtExcludingAmortization>
    <us-gaap:InterestExpenseDebtExcludingAmortization
      contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_EG9sy8Hb-0ezbGiM3IJ64w"
      decimals="-3"
      id="Tc_-SjUH34B0k2C2nrbgMmesA_5_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">7390000</us-gaap:InterestExpenseDebtExcludingAmortization>
    <us-gaap:InterestExpenseDebtExcludingAmortization
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_hWxJVXpeukyYZRjXd7vFsw"
      decimals="-3"
      id="Tc_JOoN_jP-FE28xl80RN6JKw_6_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">4637000</us-gaap:InterestExpenseDebtExcludingAmortization>
    <us-gaap:InterestExpenseDebtExcludingAmortization
      contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_Fq2asOdn_kqiVzufwpVwKw"
      decimals="-3"
      id="Tc_egPThiM9kUmKCbO0zQ-Ycg_6_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">4637000</us-gaap:InterestExpenseDebtExcludingAmortization>
    <us-gaap:InterestExpenseDebtExcludingAmortization
      contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_B52uU2Mlw0iaAElsoUnx3Q"
      decimals="-3"
      id="Tc_C5YKtgp1d0uWK97pnf8QWw_6_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">554000</us-gaap:InterestExpenseDebtExcludingAmortization>
    <us-gaap:InterestExpenseDebtExcludingAmortization
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_x6bwc1aoykiu0j_LFZBhYg"
      decimals="-3"
      id="Tc_5c5zWGFLo0e1amBdWcPCqw_7_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">4688000</us-gaap:InterestExpenseDebtExcludingAmortization>
    <us-gaap:InterestExpenseDebtExcludingAmortization
      contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_oRqSXBIKh0eX4ExySYWF8w"
      decimals="-3"
      id="Tc_gN-ZZ1Zb-02EzLnSG56PsA_7_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">4688000</us-gaap:InterestExpenseDebtExcludingAmortization>
    <us-gaap:InterestExpenseDebtExcludingAmortization
      contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_NdHMAvtl7EiuDr6tIOXilw"
      decimals="-3"
      id="Tc_Bmtd_Izd30S-udiIB5Vzgg_7_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">2904000</us-gaap:InterestExpenseDebtExcludingAmortization>
    <us-gaap:AmortizationOfFinancingCostsAndDiscounts
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_IlL1-aoOz0muNy23d_GMOw"
      decimals="-3"
      id="Tc_wt1h6O-2a0KB7Vhx68dSSQ_9_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">97000</us-gaap:AmortizationOfFinancingCostsAndDiscounts>
    <us-gaap:AmortizationOfFinancingCostsAndDiscounts
      contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_sUmtKlw7GU2Z1jCoNlH0mQ"
      decimals="-3"
      id="Tc_SENP5zR0nU2Ef0NtAdlXVA_9_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">4932000</us-gaap:AmortizationOfFinancingCostsAndDiscounts>
    <us-gaap:AmortizationOfFinancingCostsAndDiscounts
      contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_EG9sy8Hb-0ezbGiM3IJ64w"
      decimals="-3"
      id="Tc_sZs9wU45okqI5qhM6n42Vg_9_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">10887000</us-gaap:AmortizationOfFinancingCostsAndDiscounts>
    <us-gaap:AmortizationOfFinancingCostsAndDiscounts
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_hWxJVXpeukyYZRjXd7vFsw"
      decimals="-3"
      id="Tc_j7kNfOCQX0G08MqRLFQsog_10_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">457000</us-gaap:AmortizationOfFinancingCostsAndDiscounts>
    <us-gaap:AmortizationOfFinancingCostsAndDiscounts
      contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_Fq2asOdn_kqiVzufwpVwKw"
      decimals="-3"
      id="Tc_icoAmA14BEGrxkAYBNOSlg_10_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">4795000</us-gaap:AmortizationOfFinancingCostsAndDiscounts>
    <us-gaap:AmortizationOfFinancingCostsAndDiscounts
      contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_B52uU2Mlw0iaAElsoUnx3Q"
      decimals="-3"
      id="Tc_ZRVX4bxF806MEmae3j4hyg_10_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">546000</us-gaap:AmortizationOfFinancingCostsAndDiscounts>
    <us-gaap:AmortizationOfFinancingCostsAndDiscounts
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_x6bwc1aoykiu0j_LFZBhYg"
      decimals="-3"
      id="Tc_nHm-0zZYnkG69-DjAFdD5g_11_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">408000</us-gaap:AmortizationOfFinancingCostsAndDiscounts>
    <us-gaap:AmortizationOfFinancingCostsAndDiscounts
      contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_oRqSXBIKh0eX4ExySYWF8w"
      decimals="-3"
      id="Tc_T9C-aa5pfk6Ln1PxN7id-A_11_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">4092000</us-gaap:AmortizationOfFinancingCostsAndDiscounts>
    <us-gaap:AmortizationOfFinancingCostsAndDiscounts
      contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_NdHMAvtl7EiuDr6tIOXilw"
      decimals="-3"
      id="Tc_5Oi4C_eh_Uir_Elfo9VRkw_11_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">2359000</us-gaap:AmortizationOfFinancingCostsAndDiscounts>
    <us-gaap:InterestExpenseDebt
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_7iqFdRQekkqlCwPEkSLQuA_12_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">10832000</us-gaap:InterestExpenseDebt>
    <us-gaap:InterestExpenseDebt
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_uMlqmmJsiUyslc96wqcF_w_12_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">26282000</us-gaap:InterestExpenseDebt>
    <us-gaap:InterestExpenseDebt
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_1UgROWMI5k-am1JUjKFrDA_12_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">24640000</us-gaap:InterestExpenseDebt>
    <us-gaap:ConvertibleDebtFairValueDisclosures
      contextRef="As_Of_12_31_2022_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2023Member_wzCRDkFhQEa0Q4hGaj9ADA"
      decimals="-5"
      id="Narr_vyJ8qmOJ7kOVu9o_pz0GuA"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">19500000</us-gaap:ConvertibleDebtFairValueDisclosures>
    <us-gaap:ConvertibleDebtFairValueDisclosures
      contextRef="As_Of_12_31_2022_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2025Member_ZetZSnUIu0SKEy9vSz2DrA"
      decimals="-5"
      id="Narr_W-k8KUCBI0ms1ErkcVMtWg"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">143600000</us-gaap:ConvertibleDebtFairValueDisclosures>
    <us-gaap:ConvertibleDebtFairValueDisclosures
      contextRef="As_Of_12_31_2022_us-gaap_DebtInstrumentAxis_veco_ConvertibleSeniorUnsecuredNotesDue2027Member_rMWc7QQ050epRT-cmk3YDQ"
      decimals="-5"
      id="Narr_udhE6jB5pEiHdiQov3LGpQ"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">192000000.0</us-gaap:ConvertibleDebtFairValueDisclosures>
    <veco:CappedCallTransactionsPrice
      contextRef="As_Of_5_13_2020_us-gaap_DerivativeInstrumentRiskAxis_veco_DerivativeContractCappedCallMember_AmsPhVzUq0WxhxYxtgccOg"
      decimals="-5"
      id="Narr_O4fZZQBFAka2vywMDfv65g"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">10300000</veco:CappedCallTransactionsPrice>
    <veco:CappedCallTransactionsCapPrice
      contextRef="Duration_5_13_2020_To_5_13_2020_us-gaap_DerivativeInstrumentRiskAxis_veco_DerivativeContractCappedCallMember_oCl303Xdc0ax8mKHo-S8gQ"
      decimals="2"
      id="Narr_eXELh0csu0KLrskaA_uiuQ"
      unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg">18.46</veco:CappedCallTransactionsCapPrice>
    <us-gaap:LineOfCreditFacilityMaximumBorrowingCapacity
      contextRef="As_Of_12_16_2021_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021Member_ddwT9iX1z0adI_mlFlsfeg"
      decimals="-6"
      id="Narr_I4wX7sGyEESB5-5lRfxmeQ"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">150000000</us-gaap:LineOfCreditFacilityMaximumBorrowingCapacity>
    <us-gaap:LineOfCreditFacilityMaximumBorrowingCapacity
      contextRef="As_Of_12_16_2021_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021LetterOfCreditMember_QSDuY2Ej4keYjyFiaLxdzA"
      decimals="-6"
      id="Narr_qpSR5CYwKEynYNNjhKwyRg"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">15000000</us-gaap:LineOfCreditFacilityMaximumBorrowingCapacity>
    <us-gaap:DebtInstrumentTerm
      contextRef="Duration_12_16_2021_To_12_16_2021_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021Member_-KOL_4BIDE-MqJoWpDzBfg"
      id="Narr_hzOMeT_TMEeYiFO9gTreVg">P5Y</us-gaap:DebtInstrumentTerm>
    <veco:LineOfCreditFacilityContingentIncreaseAdditionalBorrowingCapacity
      contextRef="Duration_12_16_2021_To_12_16_2021_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021Member_-KOL_4BIDE-MqJoWpDzBfg"
      decimals="-6"
      id="Narr_0TAYsab7pUi-rHnWPuVHMA"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">75000000</veco:LineOfCreditFacilityContingentIncreaseAdditionalBorrowingCapacity>
    <us-gaap:DebtInstrumentBasisSpreadOnVariableRate1
      contextRef="Duration_12_16_2021_To_12_16_2021_srt_RangeAxis_srt_MinimumMember_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021Member_us-gaap_VariableRateAxis_us-gaap_BaseRateMember_9l_m7cLDiECMDSisLkqkyg"
      decimals="4"
      id="Narr_xfGSQgOYq06Sf8DgA5gJ6g"
      unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w">0.0050</us-gaap:DebtInstrumentBasisSpreadOnVariableRate1>
    <us-gaap:DebtInstrumentBasisSpreadOnVariableRate1
      contextRef="Duration_12_16_2021_To_12_16_2021_srt_RangeAxis_srt_MaximumMember_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021Member_us-gaap_VariableRateAxis_us-gaap_BaseRateMember_5s2HMN4pxUOnshOrqA3jAw"
      decimals="4"
      id="Narr_POd53agzXUaWbPfKFgLM5Q"
      unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w">0.0125</us-gaap:DebtInstrumentBasisSpreadOnVariableRate1>
    <veco:DebtInstrumentFloorRate
      contextRef="As_Of_12_16_2021_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021Member_us-gaap_VariableRateAxis_us-gaap_SecuredOvernightFinancingRateSofrOvernightIndexSwapRateMember_yH5_YTWqjEuoxhZjlqLJyw"
      decimals="4"
      id="Narr_YSnChEdorkaQT-g7sh9yAQ"
      unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w">0.0000</veco:DebtInstrumentFloorRate>
    <us-gaap:DebtInstrumentBasisSpreadOnVariableRate1
      contextRef="Duration_12_16_2021_To_12_16_2021_srt_RangeAxis_srt_MinimumMember_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021Member_us-gaap_VariableRateAxis_us-gaap_SecuredOvernightFinancingRateSofrOvernightIndexSwapRateMember_W06gA2KxG0SepRz9gRIbeA"
      decimals="4"
      id="Narr_ycuzrYYglUCwOUR1kwV-xw"
      unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w">0.0150</us-gaap:DebtInstrumentBasisSpreadOnVariableRate1>
    <us-gaap:DebtInstrumentBasisSpreadOnVariableRate1
      contextRef="Duration_12_16_2021_To_12_16_2021_srt_RangeAxis_srt_MaximumMember_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021Member_us-gaap_VariableRateAxis_us-gaap_SecuredOvernightFinancingRateSofrOvernightIndexSwapRateMember_R5S-gMQe8keYrNuq6wDVag"
      decimals="4"
      id="Narr_2MAIp5CsPkyga2eTwMXnFg"
      unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w">0.0225</us-gaap:DebtInstrumentBasisSpreadOnVariableRate1>
    <us-gaap:LineOfCreditFacilityUnusedCapacityCommitmentFeePercentage
      contextRef="Duration_12_16_2021_To_12_16_2021_srt_RangeAxis_srt_MinimumMember_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021Member_Sn3H0cYnKEqQh6tKahzz0A"
      decimals="4"
      id="Narr_R8XkxHl4vEu3WEXNIZwq4A"
      unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w">0.0025</us-gaap:LineOfCreditFacilityUnusedCapacityCommitmentFeePercentage>
    <us-gaap:LineOfCreditFacilityUnusedCapacityCommitmentFeePercentage
      contextRef="Duration_12_16_2021_To_12_16_2021_srt_RangeAxis_srt_MaximumMember_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021Member_UhYqivVxpkm2yqOX6N-eQw"
      decimals="4"
      id="Narr_sQDTHP8sAUqyz_YWZWfBrw"
      unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w">0.0035</us-gaap:LineOfCreditFacilityUnusedCapacityCommitmentFeePercentage>
    <veco:DebtInstrumentInterestCoverageRatio
      contextRef="Duration_12_16_2021_To_12_16_2021_srt_RangeAxis_srt_MinimumMember_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021Member_Sn3H0cYnKEqQh6tKahzz0A"
      decimals="INF"
      id="Narr_qe3pxZ-2cUSY3yFKbW9a8w"
      unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w">3.00</veco:DebtInstrumentInterestCoverageRatio>
    <veco:DebtInstrumentTotalNetLeverageRatio
      contextRef="As_Of_12_16_2021_srt_RangeAxis_srt_MaximumMember_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021Member_RxUGPsRTL0ajQ-_tTuLXIg"
      decimals="INF"
      id="Narr_ozc73APWNUe52CBMiKrf4A"
      unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w">4.50</veco:DebtInstrumentTotalNetLeverageRatio>
    <veco:DebtInstrumentSecuredNetLeverageRatio
      contextRef="As_Of_12_16_2021_srt_RangeAxis_srt_MaximumMember_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021Member_RxUGPsRTL0ajQ-_tTuLXIg"
      decimals="INF"
      id="Narr_ZR-SX2Hg8kmfoUp_cmBVSg"
      unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w">2.50</veco:DebtInstrumentSecuredNetLeverageRatio>
    <us-gaap:LineOfCreditFacilityMaximumAmountOutstandingDuringPeriod
      contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021Member_zEz5_eyHg06Zrt2D76rTpw"
      decimals="-3"
      id="Narr_ZPpgYM0950-GyD6-clcrqw"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">0</us-gaap:LineOfCreditFacilityMaximumAmountOutstandingDuringPeriod>
    <us-gaap:LineOfCreditFacilityMaximumAmountOutstandingDuringPeriod
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021Member_D1zUCvzuukuCwXIz58-u7A"
      decimals="-3"
      id="Narr_et7ho_Hjc0yG7O08H3lD6Q"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">0</us-gaap:LineOfCreditFacilityMaximumAmountOutstandingDuringPeriod>
    <us-gaap:StockholdersEquityNoteDisclosureTextBlock
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tb_R-2Yze0AGEaWwokKNATh9g">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Note 11 &#x2014; Stockholders&#x2019; Equity&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;Accumulated Other Comprehensive Income (&#x201c;AOCI&#x201d;)&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The following table presents the changes in the balances of each component of AOCI, net of tax:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:62.69%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.2%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.01%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.2%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:62.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.7%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.51%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Unrealized&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:62.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.7%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.51%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Gains&#160;(Losses)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:62.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.7%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Foreign&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.51%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;on Available&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:62.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.7%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Currency&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.51%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;for&#160;Sale&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:62.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.7%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Translation&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.51%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Securities&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.7%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="10" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:62.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:34.85%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:62.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Balance - December&#160;31, 2019&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.45%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 1,861&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.01%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 33&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 1,894&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:62.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Other comprehensive income (loss)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 5&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.01%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (53)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (48)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:62.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Balance - December&#160;31, 2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.45%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 1,866&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.01%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (20)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 1,846&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:62.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Other comprehensive income (loss)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (52)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.01%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (311)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (363)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:62.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Balance - December&#160;31, 2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.45%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 1,814&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.01%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (331)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 1,483&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:62.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Other comprehensive income (loss)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (41)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.01%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (514)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (555)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:62.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Balance - December&#160;31, 2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.45%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.2%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 1,773&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.01%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (845)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.2%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 928&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The Company did not allocate additional tax expense (benefit) to other comprehensive income (loss) for the years ended December 31, 2021 and 2020, as the Company was in a full valuation allowance position such that a deferred tax asset related to amounts recognized in other comprehensive income was not regarded as realizable on a more-likely-than-not basis. The Company allocated an immaterial amount of additional tax benefit to other comprehensive income (loss) for the year ended December 31, 2022, as the Company is no longer in a full valuation allowance position.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;Preferred Stock&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The Board of Directors has authority under the Company&#x2019;s Certificate of Incorporation to issue shares of preferred stock, par value $0.01, with voting and economic rights to be determined by the Board of Directors. As of December 31, 2022, no preferred shares have been issued.&lt;/p&gt;</us-gaap:StockholdersEquityNoteDisclosureTextBlock>
    <us-gaap:ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tb_Gvu-BxipnUudwa1jKmtLmw">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:62.69%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.2%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.01%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.2%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:62.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.7%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.51%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Unrealized&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:62.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.7%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.51%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Gains&#160;(Losses)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:62.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.7%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Foreign&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.51%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;on Available&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:62.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.7%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Currency&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.51%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;for&#160;Sale&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:62.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.7%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Translation&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.51%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Securities&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.7%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="10" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:62.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:34.85%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:62.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Balance - December&#160;31, 2019&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.45%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 1,861&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.01%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 33&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 1,894&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:62.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Other comprehensive income (loss)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 5&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.01%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (53)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (48)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:62.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Balance - December&#160;31, 2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.45%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 1,866&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.01%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (20)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 1,846&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:62.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Other comprehensive income (loss)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (52)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.01%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (311)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (363)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:62.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Balance - December&#160;31, 2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.45%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 1,814&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.01%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (331)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 1,483&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:62.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Other comprehensive income (loss)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (41)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.01%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (514)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (555)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:62.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Balance - December&#160;31, 2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.45%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.2%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 1,773&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.01%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (845)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.46%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.5%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.2%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 928&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</us-gaap:ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_12_31_2019_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedTranslationAdjustmentMember_GAP5ncKi9kmzPvjWaKXagA"
      decimals="-3"
      id="Tc_8PGTyLmSZESLG32nKHbVOQ_7_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">1861000</us-gaap:StockholdersEquity>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_12_31_2019_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedNetUnrealizedInvestmentGainLossMember_sFc0HafvrE2TNhcLUDaltg"
      decimals="-3"
      id="Tc_divwMkymikulEAP_LzOsfg_7_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">33000</us-gaap:StockholdersEquity>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_12_31_2019_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_ZFKrEu3jd0CjuFXPNSSC8w"
      decimals="-3"
      id="Tc_66t_mT1ky0iqq39ioenAfw_7_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">1894000</us-gaap:StockholdersEquity>
    <us-gaap:OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent
      contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedTranslationAdjustmentMember_stjnN33fGU-wMsLEDFoL4w"
      decimals="-3"
      id="Tc_rFjzhUorn0eHiTlxTCql-Q_8_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">5000</us-gaap:OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent>
    <us-gaap:OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent
      contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedNetUnrealizedInvestmentGainLossMember_EwwqNhH-8km-3wAI-bkLQA"
      decimals="-3"
      id="Tc_oLLP_rWz10m6iYqFP0EFiw_8_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-53000</us-gaap:OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent>
    <us-gaap:OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent
      contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_iUgMnC3EVk2SSaJC7ml4hA"
      decimals="-3"
      id="Tc_L5zGsenGskO5ONf3gsPing_8_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-48000</us-gaap:OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedTranslationAdjustmentMember_Gkvk-v_CWEK1-pmx4K0LPQ"
      decimals="-3"
      id="Tc_iP6oGGMcTEClrykJU6j3Fw_9_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">1866000</us-gaap:StockholdersEquity>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedNetUnrealizedInvestmentGainLossMember_pEhKOgUXxEqXMO3PxGIyPg"
      decimals="-3"
      id="Tc_UOJcODjn_k-bQLTP2Q4lKA_9_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-20000</us-gaap:StockholdersEquity>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_gKPjwCmvOEeoy03lBe0YKg"
      decimals="-3"
      id="Tc_csOxy7Ekmk-spLGdGMPthA_9_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">1846000</us-gaap:StockholdersEquity>
    <us-gaap:OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent
      contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedTranslationAdjustmentMember_EalXQOx570OxsR04zKZb-A"
      decimals="-3"
      id="Tc_qWhxQKlWDUmNbTPpzJmbMQ_10_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-52000</us-gaap:OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent>
    <us-gaap:OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent
      contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedNetUnrealizedInvestmentGainLossMember_ZWPV2F-CdUyFpf6zSDJ9Rg"
      decimals="-3"
      id="Tc_P7ECvKgNE0K7SY4AU90kxg_10_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-311000</us-gaap:OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent>
    <us-gaap:OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent
      contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_WIAntBTv5kumJYPuwFnHEA"
      decimals="-3"
      id="Tc_VuQDZHOJLUqvIUuQ911BZw_10_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-363000</us-gaap:OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedTranslationAdjustmentMember_M2qUOBZtoUGAvnzy-b8yrg"
      decimals="-3"
      id="Tc_gSiWuqBdtkqDmhV-r0XQGA_11_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">1814000</us-gaap:StockholdersEquity>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedNetUnrealizedInvestmentGainLossMember_owXYuMxjnkaLDITLeHQMFw"
      decimals="-3"
      id="Tc_RV36k7wG3EK50ska-hxG4g_11_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-331000</us-gaap:StockholdersEquity>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_XMi8hyEBWUaztLhyei_Ajw"
      decimals="-3"
      id="Tc_oDvVOooq4EiRX3-JNOEw_A_11_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">1483000</us-gaap:StockholdersEquity>
    <us-gaap:OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedTranslationAdjustmentMember_lCvs1WPXXECT-J60wmaSsw"
      decimals="-3"
      id="Tc_usZ4n3fIyEeqB6YuCzRIIw_12_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-41000</us-gaap:OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent>
    <us-gaap:OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedNetUnrealizedInvestmentGainLossMember_xCEQi8wJlEmZsaR5Kh6uTA"
      decimals="-3"
      id="Tc_9ys6XG8T_USdCrkfe25q_A_12_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-514000</us-gaap:OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent>
    <us-gaap:OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_6zlsan7E70SaZfNDKUZFwQ"
      decimals="-3"
      id="Tc_A77UdDg2XUKpV-KJTZmaDg_12_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-555000</us-gaap:OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedTranslationAdjustmentMember_0I3e07cQjke7GCQzAtl5VA"
      decimals="-3"
      id="Tc_oPkx2pyfy0OED5wSVdQEiw_13_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">1773000</us-gaap:StockholdersEquity>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedNetUnrealizedInvestmentGainLossMember_zDMfp5ATokeUuBj2WfXGIw"
      decimals="-3"
      id="Tc_4r60RUgLKUuVNmUVUR3Tbw_13_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-845000</us-gaap:StockholdersEquity>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_W3Ea7PTEU0qeOccl5h-Srw"
      decimals="-3"
      id="Tc_TfUHZH6N8kGy0e-2ayOSEQ_13_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">928000</us-gaap:StockholdersEquity>
    <us-gaap:PreferredStockParOrStatedValuePerShare
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="INF"
      id="Narr_al5bvZXfUE6GojsnXrDbmA"
      unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg">0.01</us-gaap:PreferredStockParOrStatedValuePerShare>
    <us-gaap:PreferredStockSharesIssued
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="INF"
      id="Narr_R1_eDJirOkWIAgAp-hVJIA"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">0</us-gaap:PreferredStockSharesIssued>
    <us-gaap:DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tb_19aSJXmUvUyNwHXvJ3tAIw">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Note 12 &#x2014; Stock Plans&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Share-based incentive awards are provided to employees under the terms of the Company&#x2019;s equity incentive compensation plans (the &#x201c;Plans&#x201d;), which are administered by the Compensation Committee of the Board of Directors. The 2019 Plan originated as the 2010 Stock Incentive Plan and was originally approved by the Company&#x2019;s shareholders in May 2010. This Plan was subsequently amended, as approved by shareholders, in 2013, 2016, 2019 (at which time the Plan was renamed the 2019 Stock Incentive Plan), and 2022 (as amended to date, the &#x201c;2019 Plan&#x201d;). The Company&#x2019;s employees, non-employee directors, and consultants are eligible to receive awards under the 2019 Plan, which can include non-qualified stock options, incentive stock options, RSAs, RSUs, PSAs, PSUs, share appreciation rights, dividend equivalent rights, or any combination thereof. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;"&gt;In 2013, the Board of Directors granted equity awards to certain employees under the Company&#x2019;s 2013 Inducement Stock Incentive Plan (the &#x201c;Inducement Plan&#x201d;). The Company issued &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;124,500&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; stock option shares and &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;87,000&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; RSUs under this plan. Stock options under this plan vest over a &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;three year&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; period and have a &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;10-year&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; term, and RSUs under this plan vest over a &lt;/span&gt;&lt;span style="-sec-ix-hidden:Hidden_GYTb4cpfHkKMyAjEn-joig;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;two&lt;/span&gt;&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; or &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;four year&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; period. At December 31, 2013, the Inducement Plan was merged into the 2019 Plan and is considered an inactive plan with &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;no&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; further shares available for grant. At December 31, 2022, there are &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;2,000&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; option shares and &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;no&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; RSUs outstanding under the Inducement Plan.&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;"&gt;The Company is authorized to issue up to &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;17.8&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; million shares under the 2019 Plan. Option awards are granted with an exercise price equal to the closing price of the Company&#x2019;s common stock on the trading day prior to the date of grant; option awards generally vest over a &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;three year&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; period and have a &lt;/span&gt;&lt;span style="-sec-ix-hidden:Hidden_geqmoAoR4E-cxxENNB5XWw;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;seven&lt;/span&gt;&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; or &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;ten year&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; term. RSAs and RSUs generally vest over &lt;/span&gt;&lt;span style="-sec-ix-hidden:Hidden_lv-KmzIXvUmFz5KZwCediA;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;one&lt;/span&gt;&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; to &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;five years&lt;/span&gt;&lt;span style="font-size:10pt;"&gt;. Certain option and share awards provide for accelerated vesting if there is a change in control, as defined in the 2019 Plan. At December 31, 2022, there are &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;0.2&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; million option shares and &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;0.8&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; million RSUs and PSUs outstanding under the 2019 Plan.&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;"&gt;The Company is authorized to issue up to &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;2.25&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; million shares under the approved 2016 employee stock purchase plan (&#x201c;ESPP&#x201d;), including additional shares authorized under plan amendments approved by shareholders in 2019 and 2021. Under the ESPP, substantially all employees in the U.S. may purchase the Company&#x2019;s common stock through payroll deductions at a price equal to &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;85&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; percent of the lower of the fair market value of the Company&#x2019;s common stock at the beginning or end of each &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;six-month&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; offer period, as defined in the ESPP, and subject to certain limits. The ESPP was approved by the Company&#x2019;s shareholders. &lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;Shares Reserved for Future Issuance&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;At December 31, 2022, the Company has 6.1 million shares reserved to cover exercises of outstanding stock options, vesting of RSUs, and additional grants under the 2019 Plan.&lt;span style="font-size:12pt;"&gt; &lt;/span&gt;At December 31, 2022, the Company has 0.6 million shares reserved to cover future issuances under the ESPP Plan.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;Share-Based Compensation&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The Company recognized share-based compensation in the following line items in the Consolidated Statements of Operations for the periods indicated:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:64.43%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.49%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.49%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.52%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:33.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;For the year ended December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.78%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.78%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.81%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="10" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:33.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Cost of sales&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 4,551&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 2,373&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.52%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 1,870&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Research and development&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 6,682&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 3,850&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.52%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 2,900&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Selling, general, and administrative&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 11,761&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 9,026&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.52%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 7,933&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.49%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 22,994&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.49%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 15,249&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.52%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 12,703&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The Company did not realize any tax benefits associated with share-based compensation for the years ended December 31, 2021 and 2020 due to the full valuation allowance on its U.S. deferred tax assets. See Note 15, &#x201c;Income Taxes&#x201d; for additional information. The Company recognized a tax benefit of approximately $4.5 million associated with share-based compensation for the year ended December 31, 2022. The Company capitalized an immaterial amount of share-based compensation into inventory for the years ended December 31, 2022, 2021, and 2020.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Unrecognized share-based compensation costs at December 31, 2022 are summarized below:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.3%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.67%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Unrecognized&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.67%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Weighted&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Share-Based&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.67%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Average&#160;Period&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Compensation&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.67%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Expected&#160;to&#160;be&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.71%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Costs&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.67%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Recognized&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="6" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;white-space:nowrap;width:14.77%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.67%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in years)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.49%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Restricted stock units&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 9,468&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.67%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt;&lt;span style="font-size:10pt;"&gt; 1.9&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Restricted stock awards&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 24,610&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.67%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt;&lt;span style="font-size:10pt;"&gt; 1.9&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.49%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Performance share units&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.3%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 3,310&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.67%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt;&lt;span style="font-size:10pt;"&gt; 2.0&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Total unrecognized share-based compensation cost&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.3%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 37,388&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.67%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt;&lt;span style="font-size:10pt;"&gt; 1.9&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;Stock Option Awards&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Stock options are awards issued to employees that entitle the holder to purchase shares of the Company&#x2019;s stock at a fixed price. The following table summarizes the equity activity related to stock options:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:71.48%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.93%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:71.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.54%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Weighted&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:71.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Number&#160;of&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.54%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Average&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:71.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&#160;&#160;&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Shares&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&#160;&#160;&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.54%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Exercise&#160;Price&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:71.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:71.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;white-space:pre-wrap;"&gt;Balance -  December&#160;31, 2019&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,119&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.6%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.93%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 34.88&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:71.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Expired&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (389)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 34.15&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:71.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;white-space:pre-wrap;"&gt;Balance -  December&#160;31, 2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 730&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.6%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.93%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 35.26&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:71.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Exercised&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (2)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 23.36&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:71.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Expired&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (285)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.6%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.93%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 40.16&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:71.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;white-space:pre-wrap;"&gt;Balance -  December&#160;31, 2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 443&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 32.15&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:71.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Expired&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (266)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.6%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.93%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 32.95&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:71.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;white-space:pre-wrap;"&gt;Balance -  December&#160;31, 2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 177&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 30.94&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The following table summarizes stock option information at December 31, 2022:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:25.48%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.13%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.79%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:16.7%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.4%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:25.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="9" style="vertical-align:bottom;white-space:nowrap;width:71.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Options&#160;Outstanding and Exercisable&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:25.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.79%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:16.7%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Weighted&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:25.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Aggregate&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:16.7%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Average&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Weighted&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:25.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Intrinsic&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:16.7%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Remaining&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Average&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:25.48%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Range&#160;of&#160;Exercise&#160;Prices&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Shares&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.87%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Value&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:16.7%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Contractual&#160;Life&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.48%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Exercise&#160;Price&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:25.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:16.7%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;years)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:25.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$20.00 - $30.00&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.13%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 10&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.79%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:16.7%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt;&lt;span style="font-size:8pt;"&gt; 0.8&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 29.21&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:25.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$30.01 - $40.00&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 167&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.79%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:16.7%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt;&lt;span style="font-size:8pt;"&gt; 0.8&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 31.02&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:25.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.13%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 177&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.79%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:16.7%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt;&lt;span style="font-size:8pt;"&gt; 0.8&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 30.94&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="background:#ffffff;"&gt;There were&#160;&lt;/span&gt;&lt;span style="background:#ffffff;"&gt;no&lt;/span&gt;&lt;span style="background:#ffffff;"&gt;&#160;unvested options outstanding as of December 31, 2022.&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;background:#ffffff;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The following table summarizes information on options exercised for the periods indicated:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:69.29%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:28.64%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Year ended December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="10" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:28.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Cash received from options exercised&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.92%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.92%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 37&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Intrinsic value of options exercised&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 6&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;RSAs, RSUs, PSAs, PSUs&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;"&gt;RSAs are stock awards issued to employees and directors that are subject to specified restrictions and a risk of forfeiture. RSUs are stock awards issued to employees that entitle the holder to receive shares of common stock as the awards vest. PSAs and PSUs are awards that result in an issuance of shares of common stock to employees if certain performance or market conditions are achieved. All of these awards typically vest over &lt;/span&gt;&lt;span style="-sec-ix-hidden:Hidden_mYtq0YB12kmZB5r9hVizow;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;one&lt;/span&gt;&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; to &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;four years&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; and vesting is subject to the employee's continued service with the Company and, in the case of performance awards, meeting certain performance or market conditions. The fair value of the awards is determined and fixed based on the closing price of the Company&#x2019;s common stock on the trading day prior to the date of grant, or, in the case of performance awards with market conditions, fair value is determined using a Monte Carlo simulation. &lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The following table summarizes the equity activity of non-vested restricted shares and performance shares:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:73.98%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.74%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:73.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&#160;&#160;&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&#160;&#160;&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Weighted&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:73.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Average&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:73.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Number&#160;of&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Grant&#160;Date&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:73.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Shares&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.04%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Fair&#160;Value&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:73.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:73.98%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;white-space:pre-wrap;"&gt;Balance -  December&#160;31, 2019&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 2,257&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 16.20&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:73.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Granted&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,054&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 9.53&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:73.98%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Performance award adjustments&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (51)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 30.94&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:73.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Vested&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (798)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 16.01&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:73.98%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Forfeited&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (422)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 14.87&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:73.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;white-space:pre-wrap;"&gt;Balance -  December&#160;31, 2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 2,040&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 12.73&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:73.98%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Granted&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,031&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 24.26&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:73.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Performance award adjustments&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 159&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 18.38&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:73.98%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Vested&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (1,014)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 15.50&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:73.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Forfeited&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (133)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 15.08&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:73.98%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;white-space:pre-wrap;"&gt;Balance -  December&#160;31, 2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 2,083&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 17.33&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:73.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Granted&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,253&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 29.12&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:73.98%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Performance award adjustments&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 85&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 14.03&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:73.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Vested&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (844)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 15.00&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:73.98%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Forfeited&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (81)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 20.18&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:73.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;white-space:pre-wrap;"&gt;Balance -  December&#160;31, 2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 2,496&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 23.83&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The total fair value of shares that vested during the years ended December 31, 2022, 2021, and 2020 was $22.1 million, $22.8 million, and $9.0 million, respectively. For performance awards, the final number of shares earned will vary depending on the achievement of the actual results relative to the performance or market conditions. Each performance award is included in the table above at the grant date target share amount until the end of the performance period if not previously forfeited. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The fair value of performance awards with market conditions is estimated on the date of grant using a Monte Carlo simulation. Estimates of fair value are not intended to predict actual future events or the value ultimately realized by employees who receive these awards. The weighted average fair value and the assumptions used in calculating such values during fiscal years 2022, 2021, and 2020 for performance awards with market conditions were based on estimates at the date of grant as follows:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:67.07%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.71%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.33%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.33%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.48%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:28.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Year ended December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:7.36%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:7.37%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:8.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.07%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Weighted average fair value&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.71%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.33%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 45.28&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.33%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 27.81&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.72%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 10.59&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Dividend yield&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 0&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 0&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.72%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 0&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.07%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Expected volatility factor&lt;sup style="font-family:'Calibri','Helvetica','sans-serif';font-size:8.25pt;line-height:100%;top:0pt;vertical-align:top;"&gt;(1)&lt;/sup&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.71%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.33%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 58&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.33%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 63&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.72%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 60&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Risk-free interest rate&lt;sup style="font-family:'Calibri','Helvetica','sans-serif';font-size:8.25pt;line-height:100%;top:0pt;vertical-align:top;"&gt;(2)&lt;/sup&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 2.13&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 0.34&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.72%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 0.54&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.07%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Expected life (in years)&lt;sup style="font-family:'Calibri','Helvetica','sans-serif';font-size:8.25pt;line-height:100%;top:0pt;vertical-align:top;"&gt;(3)&lt;/sup&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.71%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.33%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt;&lt;span style="font-size:10pt;"&gt; 3.0&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.33%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt;&lt;span style="font-size:10pt;"&gt; 3.0&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.72%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt;&lt;span style="font-size:10pt;"&gt; 3.0&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;div style="font-family:'Times New Roman','Times','serif';font-size:9.0pt;margin-bottom:0pt;margin-top:0pt;min-height:1.19em;position:relative;width:100%;"&gt;&lt;div style="background-color:#000000;height:1pt;position:relative;top:0.6em;width:25.0%;border:none;margin:0 auto 0 0;"/&gt;&lt;/div&gt;&lt;table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"&gt;&lt;tr&gt;&lt;td style="font-family:'Times New Roman','Times','serif';font-size:9pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;"&gt;(1)&lt;/td&gt;&lt;td style="padding:0pt;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:9pt;font-style:normal;font-weight:normal;"&gt;Expected volatility is measured using historical daily price changes of the Company&#x2019;s stock over the respective expected term.&lt;/span&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"&gt;&lt;tr&gt;&lt;td style="font-family:'Times New Roman','Times','serif';font-size:9pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;"&gt;(2)&lt;/td&gt;&lt;td style="padding:0pt;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:9pt;font-style:normal;font-weight:normal;"&gt;The risk-free rate for periods within the contractual term is based on the U.S. Treasury yield curve in effect at the time of grant.&lt;/span&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"&gt;&lt;tr&gt;&lt;td style="font-family:'Times New Roman','Times','serif';font-size:9pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;"&gt;(3)&lt;/td&gt;&lt;td style="padding:0pt;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:9pt;font-style:normal;font-weight:normal;"&gt;The expected life is the number of years the Company estimates that the awards will be outstanding prior to exercise. &lt;/span&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;Employee Stock Purchase Plan&lt;/i&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;For the years ended December 31, 2022, 2021, and 2020 the Company received cash proceeds of $3.7 million, $3.4 million, and $2.9 million, and issued shares of 208,140, 196,024, and 254,703, respectively, under the ESPP Plan. The &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;weighted average estimated values of employee purchase rights as well as the weighted average assumptions that were used in calculating such values during fiscal years 2022, 2021, and 2020 were based on estimates at the date of grant as follows:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;min-height:0.0pt;margin:0pt;"&gt;&lt;span style="font-size:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:67.21%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.35%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.14%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.15%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.15%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.35%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:29.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Year ended December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.35%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:7.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:7.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:7.53%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Weighted average fair value&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.35%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 6.00&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 5.90&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.37%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 4.81&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Dividend yield&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.35%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 0&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 0&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 0&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Expected volatility factor&lt;sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;"&gt;(1)&lt;/sup&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.35%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 43&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 52&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.37%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 70&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Risk-free interest rate&lt;sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;"&gt;(2)&lt;/sup&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.35%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1.73&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 0.07&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 0.95&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Expected life (in years)&lt;sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;"&gt;(3)&lt;/sup&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.35%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt;&lt;span style="font-size:10pt;"&gt; 0.5&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt;&lt;span style="font-size:10pt;"&gt; 0.5&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.37%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt;&lt;span style="font-size:10pt;"&gt; 0.5&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;div style="font-family:'Times New Roman','Times','serif';font-size:9.0pt;margin-bottom:0pt;margin-top:0pt;min-height:1.19em;position:relative;width:100%;"&gt;&lt;div style="background-color:#000000;height:1pt;position:relative;top:0.6em;width:25.0%;border:none;margin:0 auto 0 0;"/&gt;&lt;/div&gt;&lt;table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"&gt;&lt;tr&gt;&lt;td style="font-family:'Times New Roman','Times','serif';font-size:9pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;"&gt;(1)&lt;/td&gt;&lt;td style="padding:0pt;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:9pt;font-style:normal;font-weight:normal;"&gt;Expected volatility is measured using historical daily price changes of the Company&#x2019;s stock over the respective expected term.&lt;/span&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"&gt;&lt;tr&gt;&lt;td style="font-family:'Times New Roman','Times','serif';font-size:9pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;"&gt;(2)&lt;/td&gt;&lt;td style="padding:0pt;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:9pt;font-style:normal;font-weight:normal;"&gt;The risk-free rate for periods within the contractual term is based on the U.S. Treasury yield curve in effect at the time of grant.&lt;/span&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"&gt;&lt;tr&gt;&lt;td style="font-family:'Times New Roman','Times','serif';font-size:9pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;"&gt;(3)&lt;/td&gt;&lt;td style="padding:0pt;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:9pt;font-style:normal;font-weight:normal;"&gt;The expected life is the number of years the Company estimates that the purchase rights will be outstanding prior to exercise. &lt;/span&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 18pt;"&gt;&lt;span style="font-size:3pt;margin-left:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</us-gaap:DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriod
      contextRef="Duration_1_1_2013_To_12_31_2013_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember_us-gaap_PlanNameAxis_veco_InducementStockIncentivePlan2013Member_sLxW-wtGPkeJVSB0u2dLjg"
      decimals="INF"
      id="Narr_iPa6j6nLL0yT545XT0bEfw"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">124500</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriod>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod
      contextRef="Duration_1_1_2013_To_12_31_2013_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_us-gaap_PlanNameAxis_veco_InducementStockIncentivePlan2013Member_UacULr7ikES2tUIYrk0hFQ"
      decimals="INF"
      id="Narr_Mp4lKsfrtEubDRn66gkRFw"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">87000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1
      contextRef="Duration_1_1_2013_To_12_31_2013_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember_us-gaap_PlanNameAxis_veco_InducementStockIncentivePlan2013Member_sLxW-wtGPkeJVSB0u2dLjg"
      id="Narr_2B6EL4zgMUGZzWzATI-9Rw">P3Y</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1>
    <us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod
      contextRef="Duration_1_1_2013_To_12_31_2013_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember_us-gaap_PlanNameAxis_veco_InducementStockIncentivePlan2013Member_sLxW-wtGPkeJVSB0u2dLjg"
      id="Narr_Z4KFNXndR0-HnW_kg6vhzg">P10Y</us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1
      contextRef="Duration_1_1_2013_To_12_31_2013_srt_RangeAxis_srt_MaximumMember_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_us-gaap_PlanNameAxis_veco_InducementStockIncentivePlan2013Member_QVXVwOJ3fUqZMdTJZ0TtAg"
      id="Narr_SJam0Dc4ZUGwsDX5WVUvhQ">P4Y</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant
      contextRef="As_Of_12_31_2013_us-gaap_PlanNameAxis_veco_InducementStockIncentivePlan2013Member_3P6TBIDpNUGgRvFNIHqw5A"
      decimals="INF"
      id="Narr_RABg_CsLQEKKCs4JdhBeUQ"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">0</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber
      contextRef="As_Of_12_31_2022_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember_us-gaap_PlanNameAxis_veco_InducementStockIncentivePlan2013Member_Dy-7OenGQEq3eD3mafXOSg"
      decimals="INF"
      id="Narr_hIYZF1CNBU2H4FkxSTD3GA"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">2000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardNonOptionEquityInstrumentsOutstandingNumber
      contextRef="As_Of_12_31_2022_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_us-gaap_PlanNameAxis_veco_InducementStockIncentivePlan2013Member_wX7fHqCCNUmtAt7fofhKzQ"
      decimals="INF"
      id="Narr_JHjloMgSYUmbtOC3nswuug"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">0</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardNonOptionEquityInstrumentsOutstandingNumber>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized
      contextRef="As_Of_12_31_2022_us-gaap_PlanNameAxis_veco_StockIncentivePlan2010Member_kkhgLAR_vUO7juC-JnEbpw"
      decimals="-5"
      id="Narr_mXw9enfgvka-Mkcylz9LnQ"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">17800000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember_us-gaap_PlanNameAxis_veco_StockIncentivePlan2010Member_EIavdaQ05k2CdP7S8ASlEQ"
      id="Narr_UGSPg8u_60W6TIAcOVgg1g">P3Y</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1>
    <us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod
      contextRef="Duration_1_1_2022_To_12_31_2022_srt_RangeAxis_srt_MaximumMember_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember_us-gaap_PlanNameAxis_veco_StockIncentivePlan2010Member_7iPX9cDEzUW57ygkUGNNOA"
      id="Narr_cPlqqWInaUuDNJqrsbz2XA">P10Y</us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1
      contextRef="Duration_1_1_2022_To_12_31_2022_srt_RangeAxis_srt_MaximumMember_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsAndRestrictedStockUnitsMember_us-gaap_PlanNameAxis_veco_StockIncentivePlan2010Member_ZhJJnDp8d0OLVtHUE1soLw"
      id="Narr_rI-QIfthcEeg6dCq35FCaQ">P5Y</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber
      contextRef="As_Of_12_31_2022_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember_us-gaap_PlanNameAxis_veco_StockIncentivePlan2010Member_umNhgs6SGESOzePloVCePA"
      decimals="-5"
      id="Narr_LofjvLxT2U-2zgwyuT8XDw"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">200000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardNonOptionEquityInstrumentsOutstandingNumber
      contextRef="As_Of_12_31_2022_us-gaap_AwardTypeAxis_veco_RsuAndPsuAwardsMember_us-gaap_PlanNameAxis_veco_StockIncentivePlan2010Member_d6-JRODi8Ee6TSSKS1-eFQ"
      decimals="-5"
      id="Narr_J3Irmwyz0kOyn7byxwh6vA"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">800000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardNonOptionEquityInstrumentsOutstandingNumber>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized
      contextRef="As_Of_12_31_2016_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_aYWHgq11KEuoBBNEV64pyQ"
      decimals="-4"
      id="Narr_1sZMIx7A7kW0Du-Dp0Bnwg"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">2250000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized>
    <us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardPurchasePriceOfCommonStockPercent
      contextRef="Duration_1_1_2016_To_12_31_2016_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_M491c-YOEUaCGZ8wIQXStA"
      decimals="INF"
      id="Narr_hcVuWoVZ9U2Hl5uwwXKiWQ"
      unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w">0.85</us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardPurchasePriceOfCommonStockPercent>
    <veco:ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferPeriod
      contextRef="Duration_1_1_2016_To_12_31_2016_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_M491c-YOEUaCGZ8wIQXStA"
      id="Narr_CoTUV38jn0ytwYGt3L_tGw">P6M</veco:ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferPeriod>
    <us-gaap:CommonStockCapitalSharesReservedForFutureIssuance
      contextRef="As_Of_12_31_2022_us-gaap_PlanNameAxis_veco_StockIncentivePlan2010Member_kkhgLAR_vUO7juC-JnEbpw"
      decimals="-5"
      id="Narr_Tflf5uglPUODN1uRmvtf6g"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">6100000</us-gaap:CommonStockCapitalSharesReservedForFutureIssuance>
    <us-gaap:CommonStockCapitalSharesReservedForFutureIssuance
      contextRef="As_Of_12_31_2022_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_9spIHk5Lj0mk0Fhq0uyLew"
      decimals="-5"
      id="Narr_Cn1bz6yeA0KpVkZXwynJ9Q"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">600000</us-gaap:CommonStockCapitalSharesReservedForFutureIssuance>
    <us-gaap:ScheduleOfEmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsTextBlock
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tb_6sQbZMov4Uirc6qG3XRD5g">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:64.43%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.49%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.49%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.52%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:33.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;For the year ended December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.78%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.78%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.81%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="10" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:33.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Cost of sales&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 4,551&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 2,373&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.52%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 1,870&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Research and development&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 6,682&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 3,850&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.52%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 2,900&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Selling, general, and administrative&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 11,761&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 9,026&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.52%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 7,933&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.49%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 22,994&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.49%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 15,249&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.52%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 12,703&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</us-gaap:ScheduleOfEmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsTextBlock>
    <us-gaap:AllocatedShareBasedCompensationExpense
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_IncomeStatementLocationAxis_us-gaap_CostOfSalesMember_6jlqOW9pV0m43w7beGI5eQ"
      decimals="-3"
      id="Tc_yafD_TrPcE6wPmkacSu7Gg_4_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">4551000</us-gaap:AllocatedShareBasedCompensationExpense>
    <us-gaap:AllocatedShareBasedCompensationExpense
      contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_IncomeStatementLocationAxis_us-gaap_CostOfSalesMember_6abGMq9QDEeOCipvBcXctA"
      decimals="-3"
      id="Tc_KKnCajKW3UaPjFXZTl0wjA_4_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">2373000</us-gaap:AllocatedShareBasedCompensationExpense>
    <us-gaap:AllocatedShareBasedCompensationExpense
      contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_IncomeStatementLocationAxis_us-gaap_CostOfSalesMember_ygktSsgTfUyjEVIS_GKOzA"
      decimals="-3"
      id="Tc_3R7Z8XB0MEqm1EnFS-8jaw_4_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">1870000</us-gaap:AllocatedShareBasedCompensationExpense>
    <us-gaap:AllocatedShareBasedCompensationExpense
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_IncomeStatementLocationAxis_us-gaap_ResearchAndDevelopmentExpenseMember_xC5nU-WYOkm4dMh6YP-Ebw"
      decimals="-3"
      id="Tc_PePEZ87cIky26lPDLbEsYA_5_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">6682000</us-gaap:AllocatedShareBasedCompensationExpense>
    <us-gaap:AllocatedShareBasedCompensationExpense
      contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_IncomeStatementLocationAxis_us-gaap_ResearchAndDevelopmentExpenseMember_0YA8SwGFkkuMLELC1j-hSA"
      decimals="-3"
      id="Tc_wkfVuIzO60yrXxpu0e3-rQ_5_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">3850000</us-gaap:AllocatedShareBasedCompensationExpense>
    <us-gaap:AllocatedShareBasedCompensationExpense
      contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_IncomeStatementLocationAxis_us-gaap_ResearchAndDevelopmentExpenseMember_h4OfLfI-aUWU3289IhriMQ"
      decimals="-3"
      id="Tc_wiLxqNlHXESKw92pwYZL6A_5_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">2900000</us-gaap:AllocatedShareBasedCompensationExpense>
    <us-gaap:AllocatedShareBasedCompensationExpense
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_IncomeStatementLocationAxis_us-gaap_SellingGeneralAndAdministrativeExpensesMember_9myQ9Uv9wE6pMR5CtJ_ICQ"
      decimals="-3"
      id="Tc_i3DRlBtPKk2jkFgOQ5TIbg_6_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">11761000</us-gaap:AllocatedShareBasedCompensationExpense>
    <us-gaap:AllocatedShareBasedCompensationExpense
      contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_IncomeStatementLocationAxis_us-gaap_SellingGeneralAndAdministrativeExpensesMember_rhJjBZUOoUWCeAi4MtyMAA"
      decimals="-3"
      id="Tc_DCEmGjweOECtAZwVNNACZw_6_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">9026000</us-gaap:AllocatedShareBasedCompensationExpense>
    <us-gaap:AllocatedShareBasedCompensationExpense
      contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_IncomeStatementLocationAxis_us-gaap_SellingGeneralAndAdministrativeExpensesMember_fLK1Qhy09Ee_xMlMC5PRcg"
      decimals="-3"
      id="Tc_Rhn5gDSZsEyfIhaGCIk6sw_6_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">7933000</us-gaap:AllocatedShareBasedCompensationExpense>
    <us-gaap:AllocatedShareBasedCompensationExpense
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_Ny-s76we2kGT35DgnP1pwA_7_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">22994000</us-gaap:AllocatedShareBasedCompensationExpense>
    <us-gaap:AllocatedShareBasedCompensationExpense
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_3g4y8DZn9028gNRUptUv0w_7_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">15249000</us-gaap:AllocatedShareBasedCompensationExpense>
    <us-gaap:AllocatedShareBasedCompensationExpense
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_-BONQhFjEUiySKmUmTNa8A_7_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">12703000</us-gaap:AllocatedShareBasedCompensationExpense>
    <us-gaap:EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-5"
      id="Narr_kT3GQbaGY0ezjAtkePhNxg"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">4500000</us-gaap:EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense>
    <us-gaap:ScheduleOfUnrecognizedCompensationCostNonvestedAwardsTableTextBlock
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tb_L1Mp5tlXbEiFJBvbBxikmA">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.3%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.67%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Unrecognized&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.67%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Weighted&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Share-Based&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.67%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Average&#160;Period&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Compensation&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.67%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Expected&#160;to&#160;be&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.71%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Costs&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.67%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Recognized&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="6" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;white-space:nowrap;width:14.77%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.67%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in years)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.49%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Restricted stock units&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 9,468&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.67%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt;&lt;span style="font-size:10pt;"&gt; 1.9&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Restricted stock awards&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 24,610&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.67%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt;&lt;span style="font-size:10pt;"&gt; 1.9&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.49%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Performance share units&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.3%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 3,310&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.67%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt;&lt;span style="font-size:10pt;"&gt; 2.0&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Total unrecognized share-based compensation cost&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.3%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 37,388&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.67%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt;&lt;span style="font-size:10pt;"&gt; 1.9&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</us-gaap:ScheduleOfUnrecognizedCompensationCostNonvestedAwardsTableTextBlock>
    <us-gaap:EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized
      contextRef="As_Of_12_31_2022_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_q9Ip_ln4dEC9Vz5OiwByQg"
      decimals="-3"
      id="Tc_IUYg1CBiSUu99kEZXsTQlw_6_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">9468000</us-gaap:EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized>
    <us-gaap:EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_g4-6bRHU_UGEBnDrz3qD9A"
      id="Tc_jMFdVkzt-E2Fn0wVG1zI3A_6_5">P1Y10M24D</us-gaap:EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1>
    <us-gaap:EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized
      contextRef="As_Of_12_31_2022_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardMember_sMXHOamcIkWEmJhAjaFhWw"
      decimals="-3"
      id="Tc_F8kWgs01P0-JdlBljz1pjQ_7_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">24610000</us-gaap:EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized>
    <us-gaap:EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardMember_bM7k1MJbA06-xsn2pQgBrA"
      id="Tc_PvMX89zG4UeAMZrMe1RZsA_7_5">P1Y10M24D</us-gaap:EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1>
    <us-gaap:EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized
      contextRef="As_Of_12_31_2022_us-gaap_AwardTypeAxis_veco_PerformanceShareUnitsMember_efDAc13uhkKFYLYN7MeLnw"
      decimals="-3"
      id="Tc_D88mUtTjTUWXoUIDyXCg5g_8_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">3310000</us-gaap:EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized>
    <us-gaap:EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_AwardTypeAxis_veco_PerformanceShareUnitsMember_nrpb8S7W7E6vrWAnnBvCPQ"
      id="Tc_NQ7QS9tz40yfoIHfKIpJMA_8_5">P2Y</us-gaap:EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1>
    <us-gaap:EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_8sw4o-nAOk6bcibY8APgug_9_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">37388000</us-gaap:EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized>
    <us-gaap:EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tc_PofGZkomUUqFmvvEbft5IA_9_5">P1Y10M24D</us-gaap:EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1>
    <us-gaap:ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tb_zygM0R49U0yl74jFkN95Vw">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:71.48%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.93%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:71.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.54%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Weighted&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:71.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Number&#160;of&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.54%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Average&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:71.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&#160;&#160;&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Shares&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&#160;&#160;&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.54%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Exercise&#160;Price&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:71.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:71.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;white-space:pre-wrap;"&gt;Balance -  December&#160;31, 2019&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,119&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.6%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.93%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 34.88&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:71.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Expired&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (389)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 34.15&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:71.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;white-space:pre-wrap;"&gt;Balance -  December&#160;31, 2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 730&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.6%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.93%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 35.26&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:71.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Exercised&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (2)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 23.36&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:71.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Expired&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (285)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.6%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.93%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 40.16&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:71.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;white-space:pre-wrap;"&gt;Balance -  December&#160;31, 2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 443&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 32.15&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:71.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Expired&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (266)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.6%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.93%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 32.95&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:71.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;white-space:pre-wrap;"&gt;Balance -  December&#160;31, 2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 177&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 30.94&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</us-gaap:ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber
      contextRef="As_Of_12_31_2019_dyqJ8hTIuEW6V2L_RveF0A"
      decimals="-3"
      id="Tc_1eSJuvvFskO3PBo_PePxyA_5_2"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">1119000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice
      contextRef="As_Of_12_31_2019_dyqJ8hTIuEW6V2L_RveF0A"
      decimals="2"
      id="Tc_vUK6ZN_nk0eGxxjmD8VQbQ_5_5"
      unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg">34.88</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresAndExpirationsInPeriod
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_uhiRzt_35k2WPI5UavD_pg_6_2"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">389000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresAndExpirationsInPeriod>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresAndExpirationsInPeriodWeightedAverageExercisePrice
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="2"
      id="Tc_k2X2clBA20a8DJuoTn8gaA_6_5"
      unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg">34.15</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresAndExpirationsInPeriodWeightedAverageExercisePrice>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber
      contextRef="As_Of_12_31_2020_JUGLvBeldEeSTj1WqQBVdQ"
      decimals="-3"
      id="Tc_NCnWsnB7T0W87h9x6zdUVg_7_2"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">730000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice
      contextRef="As_Of_12_31_2020_JUGLvBeldEeSTj1WqQBVdQ"
      decimals="2"
      id="Tc_B4onplxHqkW6N9hZq-yDSw_7_5"
      unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg">35.26</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice>
    <us-gaap:StockIssuedDuringPeriodSharesStockOptionsExercised
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_etfWJQShaEKZFrHcmKaIkg_8_2"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">2000</us-gaap:StockIssuedDuringPeriodSharesStockOptionsExercised>
    <us-gaap:ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="2"
      id="Tc_jyxXcRT9YkmWmNtxnU55CQ_8_5"
      unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg">23.36</us-gaap:ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresAndExpirationsInPeriod
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_A5BhGWIJVk-ZeNfmVyy0rw_9_2"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">285000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresAndExpirationsInPeriod>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresAndExpirationsInPeriodWeightedAverageExercisePrice
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="2"
      id="Tc_j-XqSdz7hUyug1SZ0Q1PhA_9_5"
      unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg">40.16</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresAndExpirationsInPeriodWeightedAverageExercisePrice>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_eHEgipVV9UG8WFLsL0qqQw_10_2"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">443000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="2"
      id="Tc_PwGIFcb_uEGLfFG5eMiOBA_10_5"
      unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg">32.15</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresAndExpirationsInPeriod
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_UQEYuLgDbkauFDwREAuI4w_11_2"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">266000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresAndExpirationsInPeriod>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresAndExpirationsInPeriodWeightedAverageExercisePrice
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="2"
      id="Tc_hQK4OvATh0e32MU4_jqIiw_11_5"
      unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg">32.95</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresAndExpirationsInPeriodWeightedAverageExercisePrice>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_RWQLRD1bGEaw6ycU5CWbbQ_12_2"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">177000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="2"
      id="Tc_5wrq2yTsIUGOLUttyMSqhw_12_5"
      unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg">30.94</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice>
    <us-gaap:ScheduleOfShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeTextBlock
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tb_DeIZLVyqvU6eYgvArLJTSQ">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:25.48%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.13%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.79%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:16.7%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.4%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:25.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="9" style="vertical-align:bottom;white-space:nowrap;width:71.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Options&#160;Outstanding and Exercisable&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:25.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.79%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:16.7%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Weighted&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:25.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Aggregate&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:16.7%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Average&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Weighted&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:25.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Intrinsic&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:16.7%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Remaining&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Average&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:25.48%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Range&#160;of&#160;Exercise&#160;Prices&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Shares&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.87%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Value&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:16.7%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Contractual&#160;Life&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.48%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Exercise&#160;Price&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:25.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:16.7%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:7pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;years)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:7pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:25.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$20.00 - $30.00&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.13%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 10&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.79%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:16.7%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt;&lt;span style="font-size:8pt;"&gt; 0.8&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 29.21&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:25.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$30.01 - $40.00&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 167&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.79%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:16.7%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt;&lt;span style="font-size:8pt;"&gt; 0.8&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 31.02&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:25.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.13%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 177&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:12.79%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:16.7%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt;&lt;span style="font-size:8pt;"&gt; 0.8&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.08%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:13.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 30.94&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</us-gaap:ScheduleOfShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeTextBlock>
    <us-gaap:ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLowerRangeLimit
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis_veco_RangeOfExercisePricesRangeOneMember_tsyWffx4okuNJ8gZKbNjkA"
      decimals="2"
      id="Narr_c1qpVftSBUWfavh6OTwaCA"
      unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg">20.00</us-gaap:ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLowerRangeLimit>
    <us-gaap:ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeUpperRangeLimit
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis_veco_RangeOfExercisePricesRangeOneMember_tsyWffx4okuNJ8gZKbNjkA"
      decimals="2"
      id="Narr_Hj7YW0zt_EK3XUnAkhOaqg"
      unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg">30.00</us-gaap:ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeUpperRangeLimit>
    <us-gaap:ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfOutstandingOptions
      contextRef="As_Of_12_31_2022_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis_veco_RangeOfExercisePricesRangeOneMember_Z8mabksjVk62od0X5bnV1A"
      decimals="-3"
      id="Tc_AtX8flrvvEaI5cNovCPZxQ_7_2"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">10000</us-gaap:ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfOutstandingOptions>
    <us-gaap:ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfExercisableOptions
      contextRef="As_Of_12_31_2022_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis_veco_RangeOfExercisePricesRangeOneMember_Z8mabksjVk62od0X5bnV1A"
      decimals="-3"
      id="Tc_AtX8flrvvEaI5cNovCPZxQ_7_2_2"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">10000</us-gaap:ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfExercisableOptions>
    <us-gaap:SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageRemainingContractualTerm2
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis_veco_RangeOfExercisePricesRangeOneMember_tsyWffx4okuNJ8gZKbNjkA"
      id="Tc_qmKx1jg-BUmupPMVFCwQtQ_7_7">P0Y9M18D</us-gaap:SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageRemainingContractualTerm2>
    <us-gaap:SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageRemainingContractualTerm2
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis_veco_RangeOfExercisePricesRangeOneMember_tsyWffx4okuNJ8gZKbNjkA"
      id="Tc_qmKx1jg-BUmupPMVFCwQtQ_7_7_2">P0Y9M18D</us-gaap:SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageRemainingContractualTerm2>
    <us-gaap:SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageExercisePriceBeginningBalance1
      contextRef="As_Of_12_31_2022_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis_veco_RangeOfExercisePricesRangeOneMember_Z8mabksjVk62od0X5bnV1A"
      decimals="2"
      id="Tc_PEpkPstNVECLIOjFfXyS-w_7_10"
      unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg">29.21</us-gaap:SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageExercisePriceBeginningBalance1>
    <us-gaap:SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageExercisePrice1
      contextRef="As_Of_12_31_2022_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis_veco_RangeOfExercisePricesRangeOneMember_Z8mabksjVk62od0X5bnV1A"
      decimals="2"
      id="Tc_PEpkPstNVECLIOjFfXyS-w_7_10_2"
      unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg">29.21</us-gaap:SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageExercisePrice1>
    <us-gaap:ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLowerRangeLimit
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis_veco_RangeOfExercisePricesRangeTwoMember_kUyaaMwSLUahJa3avR2z4g"
      decimals="2"
      id="Narr_hBvvbHwXiUSZbbR5JK0O9Q"
      unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg">30.01</us-gaap:ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLowerRangeLimit>
    <us-gaap:ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeUpperRangeLimit
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis_veco_RangeOfExercisePricesRangeTwoMember_kUyaaMwSLUahJa3avR2z4g"
      decimals="2"
      id="Narr_cxufJWYHvkSS3pe2xfl1sQ"
      unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg">40.00</us-gaap:ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeUpperRangeLimit>
    <us-gaap:ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfOutstandingOptions
      contextRef="As_Of_12_31_2022_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis_veco_RangeOfExercisePricesRangeTwoMember_tOsQF6qFH0-wtgbEWVpMWA"
      decimals="-3"
      id="Tc_H8GhTfE03EmlHcRfNhAvsg_8_2"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">167000</us-gaap:ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfOutstandingOptions>
    <us-gaap:ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfExercisableOptions
      contextRef="As_Of_12_31_2022_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis_veco_RangeOfExercisePricesRangeTwoMember_tOsQF6qFH0-wtgbEWVpMWA"
      decimals="-3"
      id="Tc_H8GhTfE03EmlHcRfNhAvsg_8_2_2"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">167000</us-gaap:ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfExercisableOptions>
    <us-gaap:SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageRemainingContractualTerm2
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis_veco_RangeOfExercisePricesRangeTwoMember_kUyaaMwSLUahJa3avR2z4g"
      id="Tc_PTMNvD1c6U6zGh9gn5OLsA_8_7">P0Y9M18D</us-gaap:SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageRemainingContractualTerm2>
    <us-gaap:SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageRemainingContractualTerm2
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis_veco_RangeOfExercisePricesRangeTwoMember_kUyaaMwSLUahJa3avR2z4g"
      id="Tc_PTMNvD1c6U6zGh9gn5OLsA_8_7_2">P0Y9M18D</us-gaap:SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageRemainingContractualTerm2>
    <us-gaap:SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageExercisePriceBeginningBalance1
      contextRef="As_Of_12_31_2022_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis_veco_RangeOfExercisePricesRangeTwoMember_tOsQF6qFH0-wtgbEWVpMWA"
      decimals="2"
      id="Tc_hfkE8Ufeyk-fQ3gIHMPiBg_8_10"
      unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg">31.02</us-gaap:SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageExercisePriceBeginningBalance1>
    <us-gaap:SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageExercisePrice1
      contextRef="As_Of_12_31_2022_us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis_veco_RangeOfExercisePricesRangeTwoMember_tOsQF6qFH0-wtgbEWVpMWA"
      decimals="2"
      id="Tc_hfkE8Ufeyk-fQ3gIHMPiBg_8_10_2"
      unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg">31.02</us-gaap:SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageExercisePrice1>
    <us-gaap:ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfOutstandingOptions
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_GrAflLj9JkyEuMer7mYj6Q_9_2"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">177000</us-gaap:ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfOutstandingOptions>
    <us-gaap:ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfExercisableOptions
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_GrAflLj9JkyEuMer7mYj6Q_9_2_2"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">177000</us-gaap:ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfExercisableOptions>
    <us-gaap:SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageRemainingContractualTerm2
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tc_700Vwn7Wgk6nZfOyyS7yNw_9_7">P0Y9M18D</us-gaap:SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageRemainingContractualTerm2>
    <us-gaap:SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageRemainingContractualTerm2
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tc_700Vwn7Wgk6nZfOyyS7yNw_9_7_2">P0Y9M18D</us-gaap:SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageRemainingContractualTerm2>
    <us-gaap:SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageExercisePriceBeginningBalance1
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="2"
      id="Tc_Ai-VnI4QAkqt2JP10uIN5Q_9_10"
      unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg">30.94</us-gaap:SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageExercisePriceBeginningBalance1>
    <us-gaap:SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageExercisePrice1
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="2"
      id="Tc_Ai-VnI4QAkqt2JP10uIN5Q_9_10_2"
      unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg">30.94</us-gaap:SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageExercisePrice1>
    <us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsNonvestedNumberOfShares
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Narr_36gs7znkkk2z2aqV50ILZg"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">0</us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsNonvestedNumberOfShares>
    <veco:ScheduleOfStockOptionExercisedTableTextBlock
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tb_3ijJCXpDTk2cKAWBUZ5BdA">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:69.29%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:28.64%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Year ended December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="10" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:28.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Cash received from options exercised&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.92%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.92%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 37&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Intrinsic value of options exercised&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.92%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 6&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</veco:ScheduleOfStockOptionExercisedTableTextBlock>
    <us-gaap:ProceedsFromStockOptionsExercised
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_wZhmMUEZik6Vm-Xrq_fV4Q_4_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">37000</us-gaap:ProceedsFromStockOptionsExercised>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_p-5NO_cdkkOgi8RAkybLBg_5_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">6000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1
      contextRef="Duration_1_1_2022_To_12_31_2022_srt_RangeAxis_srt_MaximumMember_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_03Onf4LpQEe7Cc3IYJdxLg"
      id="Narr_2yPYAFTgw0G08IhWmyXmMQ">P4Y</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1>
    <us-gaap:ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tb_jBue5NjnrkmObKOT5PhK3w">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:73.98%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.74%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:73.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&#160;&#160;&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&#160;&#160;&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Weighted&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:73.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Average&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:73.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Number&#160;of&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Grant&#160;Date&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:73.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Shares&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.04%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Fair&#160;Value&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:73.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:73.98%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;white-space:pre-wrap;"&gt;Balance -  December&#160;31, 2019&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 2,257&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 16.20&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:73.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Granted&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,054&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 9.53&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:73.98%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Performance award adjustments&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (51)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 30.94&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:73.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Vested&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (798)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 16.01&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:73.98%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Forfeited&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (422)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 14.87&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:73.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;white-space:pre-wrap;"&gt;Balance -  December&#160;31, 2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 2,040&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 12.73&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:73.98%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Granted&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,031&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 24.26&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:73.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Performance award adjustments&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 159&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 18.38&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:73.98%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Vested&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (1,014)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 15.50&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:73.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Forfeited&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (133)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 15.08&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:73.98%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;white-space:pre-wrap;"&gt;Balance -  December&#160;31, 2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 2,083&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 17.33&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:73.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Granted&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,253&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 29.12&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:73.98%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Performance award adjustments&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 85&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 14.03&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:73.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Vested&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (844)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 15.00&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:73.98%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Forfeited&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (81)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 20.18&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:73.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;white-space:pre-wrap;"&gt;Balance -  December&#160;31, 2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.84%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 2,496&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 23.83&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</us-gaap:ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber
      contextRef="As_Of_12_31_2019_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_BAc3dgLAJEiIVBNN2-jYYA"
      decimals="-3"
      id="Tc_IevISva5x02QSfH_tpHLSA_6_2"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">2257000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue
      contextRef="As_Of_12_31_2019_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_BAc3dgLAJEiIVBNN2-jYYA"
      decimals="2"
      id="Tc_HJ587JRYhUqo8WGEHiSShw_6_5"
      unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg">16.20</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod
      contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_5_DVb1GcQUG45VQebdvm7w"
      decimals="-3"
      id="Tc_mt-Nb34SN0WneqJFWJepWg_7_2"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">1054000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue
      contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_5_DVb1GcQUG45VQebdvm7w"
      decimals="2"
      id="Tc_JARou2UsRka5f5LicIsb0g_7_5"
      unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg">9.53</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue>
    <veco:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsPerformanceAwardAdjustmentsInPeriod
      contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_5_DVb1GcQUG45VQebdvm7w"
      decimals="-3"
      id="Tc_QPOqBAjNFEqeLYEw97EFWQ_8_2"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">51000</veco:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsPerformanceAwardAdjustmentsInPeriod>
    <veco:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsPerformanceAwardAdjustmentsWeightedAverageGrantDateFairValue
      contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_5_DVb1GcQUG45VQebdvm7w"
      decimals="2"
      id="Tc_3x5CUQYT10u0fv-14djhUA_8_5"
      unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg">30.94</veco:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsPerformanceAwardAdjustmentsWeightedAverageGrantDateFairValue>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod
      contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_5_DVb1GcQUG45VQebdvm7w"
      decimals="-3"
      id="Tc_FRleTejVmUudHwonX5hkFg_9_2"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">798000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue
      contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_5_DVb1GcQUG45VQebdvm7w"
      decimals="2"
      id="Tc_ALkMgYInsUmVpRbqKza5oQ_9_5"
      unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg">16.01</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeitedInPeriod
      contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_5_DVb1GcQUG45VQebdvm7w"
      decimals="-3"
      id="Tc_7SI-bSagZEuCP2oKV4ZSEg_10_2"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">422000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeitedInPeriod>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue
      contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_5_DVb1GcQUG45VQebdvm7w"
      decimals="2"
      id="Tc_SL5WQQCYAE2vqsO7I1BCaQ_10_5"
      unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg">14.87</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber
      contextRef="As_Of_12_31_2020_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_043gFp_PqUWzlpLJIf2xsg"
      decimals="-3"
      id="Tc_LnxQbmYDaEa5oKH3OzPMCw_11_2"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">2040000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue
      contextRef="As_Of_12_31_2020_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_043gFp_PqUWzlpLJIf2xsg"
      decimals="2"
      id="Tc_ZmqY9Jzbc0yJ3bBP5lGN5A_11_5"
      unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg">12.73</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod
      contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_eoq0ExuN80uwK4EJucyneQ"
      decimals="-3"
      id="Tc_9pshHAYI0EeE2Eg4ob8_dw_12_2"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">1031000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue
      contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_eoq0ExuN80uwK4EJucyneQ"
      decimals="2"
      id="Tc_CV6Fyhy1LkGOsE8EEl9hAQ_12_5"
      unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg">24.26</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue>
    <veco:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsPerformanceAwardAdjustmentsInPeriod
      contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_eoq0ExuN80uwK4EJucyneQ"
      decimals="-3"
      id="Tc_XHuwzwh_U0Wvv9eOSFzleQ_13_2"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">-159000</veco:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsPerformanceAwardAdjustmentsInPeriod>
    <veco:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsPerformanceAwardAdjustmentsWeightedAverageGrantDateFairValue
      contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_eoq0ExuN80uwK4EJucyneQ"
      decimals="2"
      id="Tc_brwo-WEvJ0aQrObf-WaQ1A_13_5"
      unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg">18.38</veco:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsPerformanceAwardAdjustmentsWeightedAverageGrantDateFairValue>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod
      contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_eoq0ExuN80uwK4EJucyneQ"
      decimals="-3"
      id="Tc_XxJceQl8qEWfuqmLiG5ydA_14_2"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">1014000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue
      contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_eoq0ExuN80uwK4EJucyneQ"
      decimals="2"
      id="Tc_nOlH1OD__ki6F6qggoMj7A_14_5"
      unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg">15.50</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeitedInPeriod
      contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_eoq0ExuN80uwK4EJucyneQ"
      decimals="-3"
      id="Tc_3YYkkUS8Mk69FUZRf0MNYw_15_2"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">133000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeitedInPeriod>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue
      contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_eoq0ExuN80uwK4EJucyneQ"
      decimals="2"
      id="Tc_fOlstYohM0CfhziF3Ik7Wg_15_5"
      unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg">15.08</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber
      contextRef="As_Of_12_31_2021_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_90kQ0UAU_kCEBzwtbQLOCw"
      decimals="-3"
      id="Tc_IE6uAQt0OUWLwrOUU6ejvw_16_2"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">2083000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue
      contextRef="As_Of_12_31_2021_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_90kQ0UAU_kCEBzwtbQLOCw"
      decimals="2"
      id="Tc_P1G9vyFkK0Ki4Gf-0e6zqg_16_5"
      unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg">17.33</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_4KQ7EGE5pECpx0QANzsn2w"
      decimals="-3"
      id="Tc_nY7OYWZTjkKmQ_boDZsfbA_17_2"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">1253000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_4KQ7EGE5pECpx0QANzsn2w"
      decimals="2"
      id="Tc_hXXGYbTxbEujG01lcgdblA_17_5"
      unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg">29.12</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue>
    <veco:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsPerformanceAwardAdjustmentsInPeriod
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_4KQ7EGE5pECpx0QANzsn2w"
      decimals="-3"
      id="Tc_WweU4-mcz0eFqw5m7eUUTQ_18_2"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">-85000</veco:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsPerformanceAwardAdjustmentsInPeriod>
    <veco:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsPerformanceAwardAdjustmentsWeightedAverageGrantDateFairValue
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_4KQ7EGE5pECpx0QANzsn2w"
      decimals="2"
      id="Tc_ssimc5aD2kGgBFw9RiCWYw_18_5"
      unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg">14.03</veco:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsPerformanceAwardAdjustmentsWeightedAverageGrantDateFairValue>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_4KQ7EGE5pECpx0QANzsn2w"
      decimals="-3"
      id="Tc_-YafJUOMLkCH5TmvLgbGgg_19_2"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">844000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_4KQ7EGE5pECpx0QANzsn2w"
      decimals="2"
      id="Tc_NBk836igrkiw5Ey22r6Yzg_19_5"
      unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg">15.00</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeitedInPeriod
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_4KQ7EGE5pECpx0QANzsn2w"
      decimals="-3"
      id="Tc_eAXrgQUD3ke2sO1XWXgHvA_20_2"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">81000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeitedInPeriod>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_4KQ7EGE5pECpx0QANzsn2w"
      decimals="2"
      id="Tc_koSbigQfjUOauxwlEdxWmA_20_5"
      unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg">20.18</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber
      contextRef="As_Of_12_31_2022_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_ZGrU6273SEWauTYHKq94ow"
      decimals="-3"
      id="Tc_MHqL65NW6U-8KG9WeZ16vQ_21_2"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">2496000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue
      contextRef="As_Of_12_31_2022_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_ZGrU6273SEWauTYHKq94ow"
      decimals="2"
      id="Tc_G2rmdRVCe0GTPfaNsdfOQQ_21_5"
      unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg">23.83</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodTotalFairValue
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_4KQ7EGE5pECpx0QANzsn2w"
      decimals="-5"
      id="Narr_JGp7Tzn85ES4PCxcu4icMQ"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">22100000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodTotalFairValue>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodTotalFairValue
      contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_eoq0ExuN80uwK4EJucyneQ"
      decimals="-5"
      id="Narr_vJdPs8qmXUCrtVgtPnD2ng"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">22800000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodTotalFairValue>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodTotalFairValue
      contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_5_DVb1GcQUG45VQebdvm7w"
      decimals="-5"
      id="Narr_N_Qp_6baxESKbDfiAlK3yQ"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">9000000.0</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodTotalFairValue>
    <veco:ScheduleOfShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsValuationAssumptionsTableTextBlock
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tb_KqiKRAk2v0e42rZycq1jpw">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:67.07%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.71%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.33%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.33%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.48%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:28.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Year ended December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:7.36%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:7.37%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:8.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.07%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Weighted average fair value&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.71%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.33%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 45.28&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.33%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 27.81&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.72%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 10.59&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Dividend yield&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 0&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 0&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.72%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 0&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.07%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Expected volatility factor&lt;sup style="font-family:'Calibri','Helvetica','sans-serif';font-size:8.25pt;line-height:100%;top:0pt;vertical-align:top;"&gt;(1)&lt;/sup&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.71%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.33%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 58&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.33%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 63&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.72%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 60&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Risk-free interest rate&lt;sup style="font-family:'Calibri','Helvetica','sans-serif';font-size:8.25pt;line-height:100%;top:0pt;vertical-align:top;"&gt;(2)&lt;/sup&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 2.13&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 0.34&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.72%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.48%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 0.54&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.07%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Expected life (in years)&lt;sup style="font-family:'Calibri','Helvetica','sans-serif';font-size:8.25pt;line-height:100%;top:0pt;vertical-align:top;"&gt;(3)&lt;/sup&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.71%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.33%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt;&lt;span style="font-size:10pt;"&gt; 3.0&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.33%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt;&lt;span style="font-size:10pt;"&gt; 3.0&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.72%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.48%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt;&lt;span style="font-size:10pt;"&gt; 3.0&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;div style="font-family:'Times New Roman','Times','serif';font-size:9.0pt;margin-bottom:0pt;margin-top:0pt;min-height:1.19em;position:relative;width:100%;"&gt;&lt;div style="background-color:#000000;height:1pt;position:relative;top:0.6em;width:25.0%;border:none;margin:0 auto 0 0;"/&gt;&lt;/div&gt;&lt;table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"&gt;&lt;tr&gt;&lt;td style="font-family:'Times New Roman','Times','serif';font-size:9pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;"&gt;(1)&lt;/td&gt;&lt;td style="padding:0pt;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:9pt;font-style:normal;font-weight:normal;"&gt;Expected volatility is measured using historical daily price changes of the Company&#x2019;s stock over the respective expected term.&lt;/span&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"&gt;&lt;tr&gt;&lt;td style="font-family:'Times New Roman','Times','serif';font-size:9pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;"&gt;(2)&lt;/td&gt;&lt;td style="padding:0pt;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:9pt;font-style:normal;font-weight:normal;"&gt;The risk-free rate for periods within the contractual term is based on the U.S. Treasury yield curve in effect at the time of grant.&lt;/span&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"&gt;&lt;tr&gt;&lt;td style="font-family:'Times New Roman','Times','serif';font-size:9pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;"&gt;(3)&lt;/td&gt;&lt;td style="padding:0pt;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:9pt;font-style:normal;font-weight:normal;"&gt;The expected life is the number of years the Company estimates that the awards will be outstanding prior to exercise. &lt;/span&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</veco:ScheduleOfShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsValuationAssumptionsTableTextBlock>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_AwardTypeAxis_veco_PerformanceShareUnitsMarketConditionsMember_2WTDqDHGgEGxwUPxh_rK1w"
      decimals="2"
      id="Tc_6kA0xayFUk-xO9VUtZlJXQ_3_3"
      unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg">45.28</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue
      contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_AwardTypeAxis_veco_PerformanceShareUnitsMarketConditionsMember_31uAlkHF1UGSOQxqujb7zQ"
      decimals="2"
      id="Tc_GRLyORMGmUyMWmHk77AsSQ_3_6"
      unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg">27.81</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue
      contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_AwardTypeAxis_veco_PerformanceShareUnitsMarketConditionsMember_VTNsOTcWBEmsOsvPaWiQTg"
      decimals="2"
      id="Tc_Z_0Ss-3EC0eN_5Wz7PFapQ_3_9"
      unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg">10.59</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_AwardTypeAxis_veco_PerformanceShareUnitsMarketConditionsMember_2WTDqDHGgEGxwUPxh_rK1w"
      decimals="2"
      id="Tc__iD_tn5IMUWvU5c6kNL0lQ_4_3"
      unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w">0</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate
      contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_AwardTypeAxis_veco_PerformanceShareUnitsMarketConditionsMember_31uAlkHF1UGSOQxqujb7zQ"
      decimals="2"
      id="Tc_TJJrQbXp60WB2w9298v2Kw_4_6"
      unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w">0</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate
      contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_AwardTypeAxis_veco_PerformanceShareUnitsMarketConditionsMember_VTNsOTcWBEmsOsvPaWiQTg"
      decimals="2"
      id="Tc_v05Nq0KRz0upQZy2WnD0LA_4_9"
      unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w">0</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsWeightedAverageVolatilityRate
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_AwardTypeAxis_veco_PerformanceShareUnitsMarketConditionsMember_2WTDqDHGgEGxwUPxh_rK1w"
      decimals="2"
      id="Tc_FcxQfO-FJ0qXjG6uKg-siA_5_3"
      unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w">0.58</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsWeightedAverageVolatilityRate>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsWeightedAverageVolatilityRate
      contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_AwardTypeAxis_veco_PerformanceShareUnitsMarketConditionsMember_31uAlkHF1UGSOQxqujb7zQ"
      decimals="2"
      id="Tc_yYjzttpsxkirfwYhpFBVqg_5_6"
      unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w">0.63</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsWeightedAverageVolatilityRate>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsWeightedAverageVolatilityRate
      contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_AwardTypeAxis_veco_PerformanceShareUnitsMarketConditionsMember_VTNsOTcWBEmsOsvPaWiQTg"
      decimals="2"
      id="Tc_XfRhm76sFkinpPkyI3sXUw_5_9"
      unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w">0.60</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsWeightedAverageVolatilityRate>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_AwardTypeAxis_veco_PerformanceShareUnitsMarketConditionsMember_2WTDqDHGgEGxwUPxh_rK1w"
      decimals="4"
      id="Tc_IiXqD7OElkGiqRj0ILGVyQ_6_3"
      unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w">0.0213</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate
      contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_AwardTypeAxis_veco_PerformanceShareUnitsMarketConditionsMember_31uAlkHF1UGSOQxqujb7zQ"
      decimals="4"
      id="Tc_3Ei5poBJWU6Z8sk-dJj84g_6_6"
      unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w">0.0034</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate
      contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_AwardTypeAxis_veco_PerformanceShareUnitsMarketConditionsMember_VTNsOTcWBEmsOsvPaWiQTg"
      decimals="4"
      id="Tc_zuEdPxGcIEqlrJdpjj2oBg_6_9"
      unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w">0.0054</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate>
    <us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_AwardTypeAxis_veco_PerformanceShareUnitsMarketConditionsMember_2WTDqDHGgEGxwUPxh_rK1w"
      id="Tc_rVr20_7MvECFleA32wbs1g_7_3">P3Y</us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1>
    <us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1
      contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_AwardTypeAxis_veco_PerformanceShareUnitsMarketConditionsMember_31uAlkHF1UGSOQxqujb7zQ"
      id="Tc_C03hMbVHo02n1XU2_o3D9Q_7_6">P3Y</us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1>
    <us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1
      contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_AwardTypeAxis_veco_PerformanceShareUnitsMarketConditionsMember_VTNsOTcWBEmsOsvPaWiQTg"
      id="Tc_uVuw5U10Ekq16y8pMMDB-A_7_9">P3Y</us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1>
    <us-gaap:ProceedsFromIssuanceOfSharesUnderIncentiveAndShareBasedCompensationPlans
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_36M02lVMMkqklha7FYtN3w"
      decimals="-5"
      id="Narr_IW8ozUlf2kK8oQh_H2gIsw"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">3700000</us-gaap:ProceedsFromIssuanceOfSharesUnderIncentiveAndShareBasedCompensationPlans>
    <us-gaap:ProceedsFromIssuanceOfSharesUnderIncentiveAndShareBasedCompensationPlans
      contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_RBotXgElPUCGCmWLRr8SCg"
      decimals="-5"
      id="Narr_34eRBUTd102lLPtsDws92A"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">3400000</us-gaap:ProceedsFromIssuanceOfSharesUnderIncentiveAndShareBasedCompensationPlans>
    <us-gaap:ProceedsFromIssuanceOfSharesUnderIncentiveAndShareBasedCompensationPlans
      contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_vYzL5bBxa0O1wNbTJcZO6Q"
      decimals="-5"
      id="Narr_wyYQHVXSPES9YYTuaX596Q"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">2900000</us-gaap:ProceedsFromIssuanceOfSharesUnderIncentiveAndShareBasedCompensationPlans>
    <us-gaap:StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_36M02lVMMkqklha7FYtN3w"
      decimals="INF"
      id="Narr_mbVwjjU3XE2TgPelZhFdeQ"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">208140</us-gaap:StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans>
    <us-gaap:StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans
      contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_RBotXgElPUCGCmWLRr8SCg"
      decimals="INF"
      id="Narr_qGjiay1GE0CdP9ZAr8jlxg"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">196024</us-gaap:StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans>
    <us-gaap:StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans
      contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_vYzL5bBxa0O1wNbTJcZO6Q"
      decimals="INF"
      id="Narr_WIgy7FIKIEKQM7hI9l1vtQ"
      unitRef="Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ">254703</us-gaap:StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans>
    <us-gaap:ScheduleOfShareBasedPaymentAwardEmployeeStockPurchasePlanValuationAssumptionsTableTextBlock
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tb_Ccu8TiIyS0GfR84HNvN8IA">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;min-height:0.0pt;margin:0pt;"&gt;&lt;span style="font-size:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:67.21%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.35%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.14%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.15%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.15%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.35%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:29.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Year ended December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.35%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:7.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:7.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:7.53%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Weighted average fair value&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.35%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 6.00&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 5.90&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.37%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 4.81&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Dividend yield&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.35%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 0&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 0&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 0&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Expected volatility factor&lt;sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;"&gt;(1)&lt;/sup&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.35%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 43&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 52&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.37%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 70&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Risk-free interest rate&lt;sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;"&gt;(2)&lt;/sup&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.35%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1.73&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 0.07&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 0.95&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;%&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Expected life (in years)&lt;sup style="font-size:7.5pt;line-height:100%;top:0pt;vertical-align:top;"&gt;(3)&lt;/sup&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.35%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt;&lt;span style="font-size:10pt;"&gt; 0.5&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt;&lt;span style="font-size:10pt;"&gt; 0.5&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.37%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:6.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt;&lt;span style="font-size:10pt;"&gt; 0.5&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;div style="font-family:'Times New Roman','Times','serif';font-size:9.0pt;margin-bottom:0pt;margin-top:0pt;min-height:1.19em;position:relative;width:100%;"&gt;&lt;div style="background-color:#000000;height:1pt;position:relative;top:0.6em;width:25.0%;border:none;margin:0 auto 0 0;"/&gt;&lt;/div&gt;&lt;table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"&gt;&lt;tr&gt;&lt;td style="font-family:'Times New Roman','Times','serif';font-size:9pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;"&gt;(1)&lt;/td&gt;&lt;td style="padding:0pt;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:9pt;font-style:normal;font-weight:normal;"&gt;Expected volatility is measured using historical daily price changes of the Company&#x2019;s stock over the respective expected term.&lt;/span&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"&gt;&lt;tr&gt;&lt;td style="font-family:'Times New Roman','Times','serif';font-size:9pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;"&gt;(2)&lt;/td&gt;&lt;td style="padding:0pt;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:9pt;font-style:normal;font-weight:normal;"&gt;The risk-free rate for periods within the contractual term is based on the U.S. Treasury yield curve in effect at the time of grant.&lt;/span&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"&gt;&lt;tr&gt;&lt;td style="font-family:'Times New Roman','Times','serif';font-size:9pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;"&gt;(3)&lt;/td&gt;&lt;td style="padding:0pt;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:9pt;font-style:normal;font-weight:normal;"&gt;The expected life is the number of years the Company estimates that the purchase rights will be outstanding prior to exercise. &lt;/span&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;</us-gaap:ScheduleOfShareBasedPaymentAwardEmployeeStockPurchasePlanValuationAssumptionsTableTextBlock>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_36M02lVMMkqklha7FYtN3w"
      decimals="2"
      id="Tc_6IMkeXcEk0iZHFSB70FlgA_3_3"
      unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg">6.00</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue
      contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_RBotXgElPUCGCmWLRr8SCg"
      decimals="2"
      id="Tc_tmo-b77ZoEey18GvGIn5Yw_3_6"
      unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg">5.90</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue
      contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_vYzL5bBxa0O1wNbTJcZO6Q"
      decimals="2"
      id="Tc_dhb0mI7djU2AuGz97YQ2OA_3_9"
      unitRef="Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg">4.81</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_36M02lVMMkqklha7FYtN3w"
      decimals="2"
      id="Tc_USMjr-IAN0-8rjthBZYI5Q_4_3"
      unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w">0</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate
      contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_RBotXgElPUCGCmWLRr8SCg"
      decimals="2"
      id="Tc_1I-V4Zi8xE6GXhvxVYRhBg_4_6"
      unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w">0</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate
      contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_vYzL5bBxa0O1wNbTJcZO6Q"
      decimals="2"
      id="Tc_NYYmnHerkUaXMvfPEL0IxA_4_9"
      unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w">0</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsWeightedAverageVolatilityRate
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_36M02lVMMkqklha7FYtN3w"
      decimals="2"
      id="Tc_4XRbGcB6TUGhdnkq5SWM1w_5_3"
      unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w">0.43</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsWeightedAverageVolatilityRate>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsWeightedAverageVolatilityRate
      contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_RBotXgElPUCGCmWLRr8SCg"
      decimals="2"
      id="Tc_Rr8x1IKBZ0S19MgjEJz10A_5_6"
      unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w">0.52</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsWeightedAverageVolatilityRate>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsWeightedAverageVolatilityRate
      contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_vYzL5bBxa0O1wNbTJcZO6Q"
      decimals="2"
      id="Tc_kSxADYfsPkKPoCK9S5THmg_5_9"
      unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w">0.70</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsWeightedAverageVolatilityRate>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_36M02lVMMkqklha7FYtN3w"
      decimals="4"
      id="Tc_yIZCFpRRBUi-tkwGmcAmug_6_3"
      unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w">0.0173</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate
      contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_RBotXgElPUCGCmWLRr8SCg"
      decimals="4"
      id="Tc_3VQqMNTX10aK-JBXrKjxrg_6_6"
      unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w">0.0007</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate
      contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_vYzL5bBxa0O1wNbTJcZO6Q"
      decimals="4"
      id="Tc_0tdlQs2rJk2l4Xff4mGeLw_6_9"
      unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w">0.0095</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate>
    <us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_36M02lVMMkqklha7FYtN3w"
      id="Tc_vcN4hAhF6EuL1UK3dv2HNQ_7_3">P0Y6M</us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1>
    <us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1
      contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_RBotXgElPUCGCmWLRr8SCg"
      id="Tc_NOTJ5EhXZEeu3PdoPop6Ew_7_6">P0Y6M</us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1>
    <us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1
      contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_vYzL5bBxa0O1wNbTJcZO6Q"
      id="Tc_fXq11P57wUilO-pIrwHyDA_7_9">P0Y6M</us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1>
    <us-gaap:PensionAndOtherPostretirementBenefitsDisclosureTextBlock
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tb_W3Kg-gEwe0-p0D9EDUQ0Xg">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Note 13 &#x2014; Retirement Plans&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;"&gt;The Company maintains a defined contribution plan for the benefit of its U.S. employees. The plan is intended to be tax qualified and contains a qualified cash or deferred arrangement as described under Section 401(k) of the Internal Revenue Code. Eligible participants may elect to contribute a percentage of their base compensation, and the Company may make matching contributions, generally equal to &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;fifty&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;cents for every dollar employees contribute, up to &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;three&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; percent of the employee&#x2019;s eligible compensation, as limited by current Internal Revenue Code regulations. Generally, the plan calls for vesting in the Company contributions over the initial &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;five years&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; of a participant&#x2019;s employment. The Company provided employer contributions associated with this plan of approximately &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;$3.0&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; million, &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;$2.6&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; million, and &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;$2.4&lt;/span&gt;&lt;span style="font-size:10pt;"&gt;&#160;million for the years ended December 31, 2022, 2021, and 2020, respectively.&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</us-gaap:PensionAndOtherPostretirementBenefitsDisclosureTextBlock>
    <us-gaap:DefinedContributionPlanEmployerMatchingContributionPercentOfMatch
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="2"
      id="Narr_gu4xyh9NTEq5zaSnBWQCeg"
      unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w">0.50</us-gaap:DefinedContributionPlanEmployerMatchingContributionPercentOfMatch>
    <us-gaap:DefinedContributionPlanEmployerMatchingContributionPercent
      contextRef="Duration_1_1_2022_To_12_31_2022_srt_RangeAxis_srt_MaximumMember_-IcZsPRCskCthhwH_ZdlKw"
      decimals="2"
      id="Narr_xj14GNGQgE-196ojBFdYtw"
      unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w">0.03</us-gaap:DefinedContributionPlanEmployerMatchingContributionPercent>
    <veco:DefinedContributionPlanEmployerMatchingContributionVestingPeriod
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Narr_xnqL9i0yQkmJJXj0G_0fKQ">P5Y</veco:DefinedContributionPlanEmployerMatchingContributionVestingPeriod>
    <us-gaap:DefinedContributionPlanCostRecognized
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-5"
      id="Narr_xWhIOj9CKEulwvdJ7C87wQ"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">3000000.0</us-gaap:DefinedContributionPlanCostRecognized>
    <us-gaap:DefinedContributionPlanCostRecognized
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-5"
      id="Narr_3O5c609FzUSmrcbS-3dE8w"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">2600000</us-gaap:DefinedContributionPlanCostRecognized>
    <us-gaap:DefinedContributionPlanCostRecognized
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-5"
      id="Narr_Jnn9I0bfhEuEEPuKXVm-3g"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">2400000</us-gaap:DefinedContributionPlanCostRecognized>
    <us-gaap:DisposalGroupsIncludingDiscontinuedOperationsDisclosureTextBlock
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tb_VaE5HeCzYUeXmyz_3MI20g">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Note 14 &#x2014; Dispositions&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;"&gt;In 2019, the Company determined that one of its non-core product lines (the &#x201c;disposal group&#x201d;) met the held for sale criteria. During 2020, the Company completed the sale of this product line for approximately &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;$11.4&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; million, with approximately &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;85%&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; of the transaction price received upon closing, and &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;15%&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; held in escrow for a period of &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;18 months&lt;/span&gt;&lt;span style="font-size:10pt;"&gt; and subsequently collected in 2021. Long-lived assets and definite-lived intangible assets were not depreciated or amortized while classified as held for sale. The sale of this disposal group did not represent a strategic shift that will have a material effect on the Company&#x2019;s operations and financial results, nor is it considered a component of the Company, and as such it did not meet the criteria to be reported as discontinued operations. During 2020, the Company recorded additional impairment charges of &lt;/span&gt;&lt;span style="font-size:10pt;"&gt;$0.3&lt;/span&gt;&lt;span style="font-size:10pt;"&gt;&#160;million related to the finalization of the sale of this disposal group.&#160;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</us-gaap:DisposalGroupsIncludingDiscontinuedOperationsDisclosureTextBlock>
    <us-gaap:DisposalGroupIncludingDiscontinuedOperationConsideration
      contextRef="As_Of_12_31_2020_us-gaap_DisposalGroupClassificationAxis_us-gaap_DisposalGroupDisposedOfBySaleNotDiscontinuedOperationsMember_us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsAxis_veco_OneNonCoreProductLineMember_ImUrGQxTIkCP31DP-sVs-Q"
      decimals="-5"
      id="Narr_JevurXcHUEC-4F4fNd6gxQ"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">11400000</us-gaap:DisposalGroupIncludingDiscontinuedOperationConsideration>
    <veco:PercentageOfTransactionPrice
      contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_DisposalGroupClassificationAxis_us-gaap_DisposalGroupDisposedOfBySaleNotDiscontinuedOperationsMember_us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsAxis_veco_OneNonCoreProductLineMember_juSBtzD8xUGaHzoP0bEdzA"
      decimals="2"
      id="Narr_N3dp7GJcY06cAO779wtKGA"
      unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w">0.85</veco:PercentageOfTransactionPrice>
    <veco:PercentageOfAmountHeldInEscrow
      contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_DisposalGroupClassificationAxis_us-gaap_DisposalGroupDisposedOfBySaleNotDiscontinuedOperationsMember_us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsAxis_veco_OneNonCoreProductLineMember_juSBtzD8xUGaHzoP0bEdzA"
      decimals="2"
      id="Narr_Oc03hmfdck-tbmFO076XpQ"
      unitRef="Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w">0.15</veco:PercentageOfAmountHeldInEscrow>
    <veco:TermOfAmountToBeHeldInEscrow
      contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_DisposalGroupClassificationAxis_us-gaap_DisposalGroupDisposedOfBySaleNotDiscontinuedOperationsMember_us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsAxis_veco_OneNonCoreProductLineMember_juSBtzD8xUGaHzoP0bEdzA"
      id="Narr_hKCN0KSD3kep1v_9cEOgSw">P18M</veco:TermOfAmountToBeHeldInEscrow>
    <us-gaap:AssetImpairmentCharges
      contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_DisposalGroupClassificationAxis_us-gaap_DisposalGroupDisposedOfBySaleNotDiscontinuedOperationsMember_us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsAxis_veco_OneNonCoreProductLineMember_juSBtzD8xUGaHzoP0bEdzA"
      decimals="-5"
      id="Narr_dzFFmQ37qEeaiVc8t0nKMA"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">300000</us-gaap:AssetImpairmentCharges>
    <us-gaap:IncomeTaxDisclosureTextBlock
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tb_OdvTaPQWBke6Dlk5WtcDSw">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Note 15 &#x2014; Income Taxes &lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The amounts of income (loss) before income taxes attributable to domestic and foreign operations were as follows:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:63.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:63.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:34.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Year ended December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:63.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.78%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.78%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="10" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:63.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:34.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:63.49%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Domestic&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 47,368&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 23,561&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.46%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (10,292)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:63.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Foreign&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 3,617&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 2,119&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 1,828&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:63.49%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Total&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 50,985&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 25,680&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.46%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (8,464)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Significant components of the expense (benefit) for income taxes consisted of the following:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:66.7%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.23%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.27%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:66.7%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:31.22%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Year ended December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:66.7%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.02%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.55%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="10" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:66.7%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:31.22%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:66.7%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Current:&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.27%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:66.7%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Federal&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:66.7%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Foreign&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 1,506&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 183&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.27%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 22&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:66.7%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;State and local&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 577&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 110&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.27%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 204&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:66.7%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"&gt;Total current expense (benefit) for income taxes&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 2,083&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 293&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.27%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 226&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:66.7%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Deferred:&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:66.7%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Federal&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (96,811)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 119&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.27%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 136&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:66.7%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Foreign&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (484)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (507)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (320)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:66.7%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;State and local&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (20,745)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (263)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.27%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (115)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:66.7%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"&gt;Total deferred expense (benefit) for income taxes&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (118,040)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (651)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.27%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (299)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:66.7%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Total expense (benefit) for income taxes&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (115,957)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (358)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.27%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (73)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The income tax expense (benefit) was reconciled to the tax expense computed at the U.S. federal statutory tax rate as follows:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;min-height:0.0pt;margin:0pt;"&gt;&lt;span style="font-size:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:middle;width:62.87%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="position:absolute;top:50%;transform:translate(0,-50%);width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.16%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.17%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:62.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:35.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Year ended December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:62.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.02%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="10" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:62.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:35.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:62.87%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Income tax expense (benefit) at U.S. statutory rates&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 10,706&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 5,393&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (1,777)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:62.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;State taxes, net of U.S. federal impact&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 1,101&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (607)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (121)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:62.87%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Effect of international operations&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (11,149)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 609&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (131)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:62.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Research and development tax credit&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (6,470)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (3,964)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 726&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:62.87%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Net change in valuation allowance&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (104,972)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (2,389)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 388&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:62.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Change in accrual for unrecognized tax benefits&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 3,349&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 398&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (6)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:62.87%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Share-based compensation&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 606&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 1,208&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 2,248&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:62.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Asset impairment&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 728&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:62.87%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Partial extinguishment of 2023 Notes&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (1,090)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (2,292)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:62.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Adoption of new accounting standard&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (9,295)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:62.87%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Other&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 167&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 84&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.17%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 164&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:62.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Total expense (benefit) for income taxes&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (115,957)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.16%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (358)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.17%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (73)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Deferred income taxes reflect the effect of temporary differences between the carrying amounts of assets and liabilities recognized for financial reporting purposes and the amounts recognized for tax purposes. The tax effects of the temporary differences were as follows:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;min-height:0.0pt;margin:0pt;"&gt;&lt;span style="font-size:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:middle;width:72.6%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="position:absolute;top:50%;transform:translate(0,-50%);width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.95%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:72.6%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:25.33%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:72.6%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&#160;&#160;&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.24%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&#160;&#160;&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.02%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="7" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:72.6%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:25.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:72.6%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Deferred tax assets:&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:72.6%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Inventory valuation&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 11,931&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 11,822&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:72.6%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Net operating losses&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 5,647&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 38,816&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:72.6%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Credit carry forwards&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 59,988&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 57,810&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:72.6%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Warranty and installation accruals&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 1,862&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 1,730&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:72.6%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Share-based compensation&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 5,267&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 4,033&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:72.6%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Customer deposits and deferred revenue&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 24,504&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 9,908&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:72.6%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Operating leases&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 8,349&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 8,464&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:72.6%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Research and experimental ("R&amp;amp;E") capitalization&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 19,071&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:72.6%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Other&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.95%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 6,553&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 5,880&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:72.6%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Total deferred tax assets&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 143,172&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 138,463&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:72.6%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Valuation allowance&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.95%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (11,083)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (116,054)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:72.6%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Net deferred tax assets&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.95%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 132,089&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 22,409&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:72.6%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:72.6%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Deferred tax liabilities:&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:72.6%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Purchased intangible assets&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 8,724&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 6,633&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:72.6%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Convertible Senior Notes&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (39)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 10,018&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:72.6%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Operating leases&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 5,994&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 6,539&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:72.6%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Depreciation&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.95%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 2,346&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 2,372&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:72.6%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Total deferred tax liabilities&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.95%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 17,025&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 25,562&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:72.6%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Net deferred taxes&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.95%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 115,064&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (3,153)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The Company does not permanently reinvest its earnings from certain foreign jurisdictions and has accrued for foreign tax withholdings of $0.9 million on its unremitted earnings as of December 31, 2022.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;During the year ended December 31, 2022, the Company recognized a net decrease of $104.9 million of its valuation allowance. This decrease was primarily related to the reversal of valuation allowances on domestic deferred tax assets. After considering recent significant positive evidence, including a consistent pattern of earnings in the past three years, as well as forecasted future earnings, it was determined that a valuation allowance was no longer required for certain deferred tax assets primarily recorded on tax credits and net operating losses in U.S. jurisdictions. The Company&#x2019;s remaining valuation allowance of approximately $11.1 million relates primarily to state and local, and certain foreign jurisdiction tax attributes for which the Company could not conclude were realizable on a more-likely-than-not basis.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;At December 31, 2022, the Company had U.S. federal research and development credits of $36.5 million that will expire between 2023 and 2042. The Company also has $8.7 million of foreign tax credits that expire in 2027. Additionally, the Company has state and local NOL carryforwards of approximately $59.3 million (a net deferred tax asset of $4.1 million, net of federal tax benefits and before the valuation allowance) that will expire between 2023 and 2041. Finally, the Company has state credits of $32.6 million, some of which are indefinite and others that will expire between 2024 and 2037.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;A roll-forward of the Company&#x2019;s uncertain tax positions for all U.S. federal, state, and foreign tax jurisdictions was as follows:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;min-height:0.0pt;margin:0pt;"&gt;&lt;span style="font-size:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:64.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.52%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:33.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.78%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.78%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.81%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="10" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:33.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Balance at beginning of year&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 12,761&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 12,363&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.52%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 12,369&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Additions for tax positions related to current year&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 4,180&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 2,642&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.52%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 1,217&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Additions for tax positions related to prior years&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 50&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.52%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 47&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Reductions for tax positions related to prior years&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (731)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (1,196)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.52%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (1,166)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Reductions due to the lapse of the statute of limitations&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.52%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Settlements&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (100)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (1,098)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (104)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Balance at end of year&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 16,110&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 12,761&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.52%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 12,363&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;If the amount of unrecognized tax benefits at December 31, 2022 were recognized, the Company&#x2019;s income tax provision would decrease by $13.5 million. The gross amount of interest and penalties accrued in income tax payable in the Consolidated Balance Sheets was approximately $0.5 million and $0.4 million at December 31, 2022 and 2021, respectively.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The Company, or one of its subsidiaries, files income tax returns in the United States federal jurisdiction, and various state, local, and foreign jurisdictions. All material consolidated federal income tax matters have been concluded for years through 2017 subject to subsequent utilization of NOLs generated in such years. All material state and local income tax matters have been reviewed through 2012. The majority of the Company&#x2019;s foreign jurisdictions have been reviewed through 2015. The Company&#x2019;s major foreign jurisdictions&#x2019; statutes of limitation remain open with respect to the tax years 2015 through 2021 for Germany, 2017 through 2021 for China, 2021 for Taiwan, and 2020 and 2021 for Singapore. The Company does not anticipate that its uncertain tax position will change significantly within the next twelve months subject to the completion of the ongoing tax audits and any resultant settlement. &lt;/p&gt;</us-gaap:IncomeTaxDisclosureTextBlock>
    <us-gaap:ScheduleOfIncomeBeforeIncomeTaxDomesticAndForeignTableTextBlock
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tb_kSxAlfY7yUyh_S-S_M5q2A">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:63.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:63.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:34.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Year ended December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:63.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.78%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.78%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="10" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:63.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:34.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:63.49%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Domestic&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 47,368&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 23,561&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.46%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (10,292)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:63.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Foreign&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 3,617&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 2,119&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 1,828&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:63.49%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Total&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 50,985&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 25,680&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.46%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (8,464)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</us-gaap:ScheduleOfIncomeBeforeIncomeTaxDomesticAndForeignTableTextBlock>
    <us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_OuVbLIEEA0mlJPk0A7B3jw_4_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">47368000</us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic>
    <us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_x30xl6qip0CI1VMrsOFzvQ_4_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">23561000</us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic>
    <us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_X_qxEOeqq02G8bLqihGBwg_4_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-10292000</us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic>
    <us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_xXj2wv7o9kO3VRC3DLe5WQ_5_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">3617000</us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign>
    <us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_wpzD9fkUHU6IVBhd28m7dw_5_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">2119000</us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign>
    <us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_PwrmOkNVfECPXyA58x9t9g_5_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">1828000</us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign>
    <us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_VBciEcIjeEyawA4y9OwMfw_6_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">50985000</us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest>
    <us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_hCX0mX8SLUqNAPpKADBECQ_6_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">25680000</us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest>
    <us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc__G2Bx1pDk027x8zesnhW3w_6_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-8464000</us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest>
    <us-gaap:ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tb_V0Wf08AwHkiiyxqNcoo4Xw">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:66.7%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.23%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.27%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:66.7%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:31.22%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Year ended December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:66.7%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.02%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.55%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="10" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:66.7%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:31.22%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:66.7%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Current:&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.27%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:66.7%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Federal&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:66.7%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Foreign&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 1,506&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 183&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.27%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 22&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:66.7%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;State and local&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 577&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 110&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.27%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 204&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:66.7%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"&gt;Total current expense (benefit) for income taxes&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 2,083&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 293&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.27%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 226&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:66.7%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Deferred:&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:66.7%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Federal&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (96,811)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 119&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.27%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 136&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:66.7%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Foreign&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (484)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (507)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (320)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:66.7%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;State and local&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (20,745)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (263)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.27%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (115)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:66.7%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"&gt;Total deferred expense (benefit) for income taxes&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (118,040)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (651)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.27%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (299)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:66.7%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Total expense (benefit) for income taxes&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (115,957)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (358)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.27%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (73)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</us-gaap:ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock>
    <us-gaap:CurrentForeignTaxExpenseBenefit
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_jB6uPuNRaUaFHZd-ZDcUoA_6_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">1506000</us-gaap:CurrentForeignTaxExpenseBenefit>
    <us-gaap:CurrentForeignTaxExpenseBenefit
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_y_yVPkrdT02Wk6fpjq82iQ_6_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">183000</us-gaap:CurrentForeignTaxExpenseBenefit>
    <us-gaap:CurrentForeignTaxExpenseBenefit
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_fawm3vTSo0C18f6KztNUXw_6_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">22000</us-gaap:CurrentForeignTaxExpenseBenefit>
    <us-gaap:CurrentStateAndLocalTaxExpenseBenefit
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_4m8NSUL3HkmcOZ4dLGeYWw_7_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">577000</us-gaap:CurrentStateAndLocalTaxExpenseBenefit>
    <us-gaap:CurrentStateAndLocalTaxExpenseBenefit
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_9ctiZ_D7mUu2aoRVLmMlCQ_7_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">110000</us-gaap:CurrentStateAndLocalTaxExpenseBenefit>
    <us-gaap:CurrentStateAndLocalTaxExpenseBenefit
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_JTiSUqJ-v0qqGsKa86MLpA_7_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">204000</us-gaap:CurrentStateAndLocalTaxExpenseBenefit>
    <us-gaap:CurrentIncomeTaxExpenseBenefit
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_JSO0M63RDEaCuKueigonCQ_8_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">2083000</us-gaap:CurrentIncomeTaxExpenseBenefit>
    <us-gaap:CurrentIncomeTaxExpenseBenefit
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_II_r1TQNSUSeFV5TSnMlJA_8_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">293000</us-gaap:CurrentIncomeTaxExpenseBenefit>
    <us-gaap:CurrentIncomeTaxExpenseBenefit
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_yuws42OofE274niE3GcN-A_8_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">226000</us-gaap:CurrentIncomeTaxExpenseBenefit>
    <us-gaap:DeferredFederalIncomeTaxExpenseBenefit
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_1I_LXF4dV0eUHd4EwFSZBQ_10_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-96811000</us-gaap:DeferredFederalIncomeTaxExpenseBenefit>
    <us-gaap:DeferredFederalIncomeTaxExpenseBenefit
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_YIvetz3dF0et9_j7RcDbXw_10_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">119000</us-gaap:DeferredFederalIncomeTaxExpenseBenefit>
    <us-gaap:DeferredFederalIncomeTaxExpenseBenefit
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_dx1UFrlbt0uVueIOEihRQA_10_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">136000</us-gaap:DeferredFederalIncomeTaxExpenseBenefit>
    <us-gaap:DeferredForeignIncomeTaxExpenseBenefit
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_kR9Tj_as7EKpWNsOasSKHw_11_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-484000</us-gaap:DeferredForeignIncomeTaxExpenseBenefit>
    <us-gaap:DeferredForeignIncomeTaxExpenseBenefit
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_d9264UWlzUu3f5s5MgeU9A_11_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-507000</us-gaap:DeferredForeignIncomeTaxExpenseBenefit>
    <us-gaap:DeferredForeignIncomeTaxExpenseBenefit
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_vkSfwvJapkehUJNKPuKqnA_11_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-320000</us-gaap:DeferredForeignIncomeTaxExpenseBenefit>
    <us-gaap:DeferredStateAndLocalIncomeTaxExpenseBenefit
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_oCY1ZuK7xkup9BUqP4g1Gg_12_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-20745000</us-gaap:DeferredStateAndLocalIncomeTaxExpenseBenefit>
    <us-gaap:DeferredStateAndLocalIncomeTaxExpenseBenefit
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_HMPBdaqvBEaLxyyGjoUvmA_12_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-263000</us-gaap:DeferredStateAndLocalIncomeTaxExpenseBenefit>
    <us-gaap:DeferredStateAndLocalIncomeTaxExpenseBenefit
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_Afk1adjKckK1Fl6dwMEBaQ_12_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-115000</us-gaap:DeferredStateAndLocalIncomeTaxExpenseBenefit>
    <us-gaap:DeferredIncomeTaxExpenseBenefit
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_Sqyj0MNMkkWvGj_hLcPoVw_13_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-118040000</us-gaap:DeferredIncomeTaxExpenseBenefit>
    <us-gaap:DeferredIncomeTaxExpenseBenefit
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_khTgl5NaE06jWnlLaM-wDw_13_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-651000</us-gaap:DeferredIncomeTaxExpenseBenefit>
    <us-gaap:DeferredIncomeTaxExpenseBenefit
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_9W0rt3Wp-EyBraT85QgiJg_13_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-299000</us-gaap:DeferredIncomeTaxExpenseBenefit>
    <us-gaap:IncomeTaxExpenseBenefit
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_3FaGSgRoiEacAlgYMv2rIw_14_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-115957000</us-gaap:IncomeTaxExpenseBenefit>
    <us-gaap:IncomeTaxExpenseBenefit
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_NFZP7IPYIEKH4QugC1CQOw_14_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-358000</us-gaap:IncomeTaxExpenseBenefit>
    <us-gaap:IncomeTaxExpenseBenefit
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_zwdw64vj5km12P3IMr_moA_14_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-73000</us-gaap:IncomeTaxExpenseBenefit>
    <us-gaap:ScheduleOfEffectiveIncomeTaxRateReconciliationTableTextBlock
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tb_BX2gbqE5c06VZFAn8xvpkA">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;min-height:0.0pt;margin:0pt;"&gt;&lt;span style="font-size:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:middle;width:62.87%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="position:absolute;top:50%;transform:translate(0,-50%);width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.16%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.17%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:62.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:35.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Year ended December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:62.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.02%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="10" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:62.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:35.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:62.87%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Income tax expense (benefit) at U.S. statutory rates&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 10,706&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 5,393&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (1,777)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:62.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;State taxes, net of U.S. federal impact&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 1,101&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (607)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (121)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:62.87%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Effect of international operations&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (11,149)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 609&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (131)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:62.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Research and development tax credit&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (6,470)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (3,964)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 726&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:62.87%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Net change in valuation allowance&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (104,972)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (2,389)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 388&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:62.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Change in accrual for unrecognized tax benefits&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 3,349&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 398&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (6)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:62.87%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Share-based compensation&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 606&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 1,208&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 2,248&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:62.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Asset impairment&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 728&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:62.87%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Partial extinguishment of 2023 Notes&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (1,090)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (2,292)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:62.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Adoption of new accounting standard&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (9,295)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:62.87%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Other&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 167&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.16%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 84&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.17%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 164&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:62.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Total expense (benefit) for income taxes&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (115,957)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.16%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (358)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.17%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (73)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</us-gaap:ScheduleOfEffectiveIncomeTaxRateReconciliationTableTextBlock>
    <us-gaap:IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_LdTxggY5j0iUBoRCFnn9cQ_4_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">10706000</us-gaap:IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate>
    <us-gaap:IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_YPwqgEPfXkSfZGc8uy0lUw_4_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">5393000</us-gaap:IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate>
    <us-gaap:IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_q4ut5_MEkEaW6FnvSFGCsw_4_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-1777000</us-gaap:IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate>
    <us-gaap:IncomeTaxReconciliationStateAndLocalIncomeTaxes
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_0huHYzfXjkCBZ1odP0zbyg_5_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">1101000</us-gaap:IncomeTaxReconciliationStateAndLocalIncomeTaxes>
    <us-gaap:IncomeTaxReconciliationStateAndLocalIncomeTaxes
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_T4Ztoe0f8EylewHrSaVwKA_5_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-607000</us-gaap:IncomeTaxReconciliationStateAndLocalIncomeTaxes>
    <us-gaap:IncomeTaxReconciliationStateAndLocalIncomeTaxes
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_WXmfPIDur0CJrHOaIQYBbw_5_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-121000</us-gaap:IncomeTaxReconciliationStateAndLocalIncomeTaxes>
    <us-gaap:IncomeTaxReconciliationForeignIncomeTaxRateDifferential
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_hwzF_LiY20SCDKOxPpu6Yw_6_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-11149000</us-gaap:IncomeTaxReconciliationForeignIncomeTaxRateDifferential>
    <us-gaap:IncomeTaxReconciliationForeignIncomeTaxRateDifferential
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_zBi8JpOV80avJ13yL1jP0w_6_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">609000</us-gaap:IncomeTaxReconciliationForeignIncomeTaxRateDifferential>
    <us-gaap:IncomeTaxReconciliationForeignIncomeTaxRateDifferential
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_t8AkvYV_RUOk4BeXiG3Log_6_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-131000</us-gaap:IncomeTaxReconciliationForeignIncomeTaxRateDifferential>
    <us-gaap:IncomeTaxReconciliationTaxCreditsResearch
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_4UMdq-1k5Ei5AmfvIXpVvA_7_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">6470000</us-gaap:IncomeTaxReconciliationTaxCreditsResearch>
    <us-gaap:IncomeTaxReconciliationTaxCreditsResearch
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_gkEt_vfrf0ygWrVFoupYLg_7_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">3964000</us-gaap:IncomeTaxReconciliationTaxCreditsResearch>
    <us-gaap:IncomeTaxReconciliationTaxCreditsResearch
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_BT50y-kuqUKhw5TJZ-SAbA_7_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-726000</us-gaap:IncomeTaxReconciliationTaxCreditsResearch>
    <us-gaap:IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_70PUWCmVlE6YYmFIbigwOg_8_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-104972000</us-gaap:IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance>
    <us-gaap:IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_6H64PVHti0W3FK1ZovNGlw_8_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-2389000</us-gaap:IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance>
    <us-gaap:IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_s7QqyBchM0qk-B8hHz5sGw_8_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">388000</us-gaap:IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance>
    <veco:IncomeTaxReconciliationChangeInAccrualForUnrecognizedTaxBenefits
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_zFwHjvTdmUKtRrUqVh5-2Q_9_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-3349000</veco:IncomeTaxReconciliationChangeInAccrualForUnrecognizedTaxBenefits>
    <veco:IncomeTaxReconciliationChangeInAccrualForUnrecognizedTaxBenefits
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_vyG3J-fALEWr-5KCM9UO_w_9_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-398000</veco:IncomeTaxReconciliationChangeInAccrualForUnrecognizedTaxBenefits>
    <veco:IncomeTaxReconciliationChangeInAccrualForUnrecognizedTaxBenefits
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_yISPmyS6x0u5LpJWEul3pw_9_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">6000</veco:IncomeTaxReconciliationChangeInAccrualForUnrecognizedTaxBenefits>
    <us-gaap:IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_aLmUyb0WG0-4tpr69F2_mg_10_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">606000</us-gaap:IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost>
    <us-gaap:IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_sHr5cgHAzUKXPGKtbnd8oQ_10_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">1208000</us-gaap:IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost>
    <us-gaap:IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_gykbgx_tdE2idaoDO76Ytg_10_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">2248000</us-gaap:IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost>
    <us-gaap:IncomeTaxReconciliationNondeductibleExpenseImpairmentLosses
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_Pq8UoKW400KWU4Mn-sRR9g_11_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">728000</us-gaap:IncomeTaxReconciliationNondeductibleExpenseImpairmentLosses>
    <veco:EffectiveIncomeTaxRateReconciliationPartialExtinguishmentOfDebtAmount
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_7i__MFtpd0ybNlHqrMt2uQ_12_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-1090000</veco:EffectiveIncomeTaxRateReconciliationPartialExtinguishmentOfDebtAmount>
    <veco:EffectiveIncomeTaxRateReconciliationPartialExtinguishmentOfDebtAmount
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_2MaNvoLvxEaBFOMtcumULQ_12_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-2292000</veco:EffectiveIncomeTaxRateReconciliationPartialExtinguishmentOfDebtAmount>
    <us-gaap:IncomeTaxEffectsAllocatedDirectlyToEquityCumulativeEffectOfChangeInAccountingPrinciple
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_VisWig_gr0609gnh_-Feyg_13_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-9295000</us-gaap:IncomeTaxEffectsAllocatedDirectlyToEquityCumulativeEffectOfChangeInAccountingPrinciple>
    <us-gaap:IncomeTaxReconciliationOtherAdjustments
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_PdCPG0sWZ0aMcZqdiLEQiw_14_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">167000</us-gaap:IncomeTaxReconciliationOtherAdjustments>
    <us-gaap:IncomeTaxReconciliationOtherAdjustments
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_zkLuafNz8E-E0RiCBBpr9w_14_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">84000</us-gaap:IncomeTaxReconciliationOtherAdjustments>
    <us-gaap:IncomeTaxReconciliationOtherAdjustments
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_gTePZpVfN0iu4nswZcotOA_14_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">164000</us-gaap:IncomeTaxReconciliationOtherAdjustments>
    <us-gaap:IncomeTaxExpenseBenefit
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_rpMBL-kUrECqBsEiQ-HwEg_15_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-115957000</us-gaap:IncomeTaxExpenseBenefit>
    <us-gaap:IncomeTaxExpenseBenefit
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_s5MwWxKNnU26JDdbr2bDIw_15_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-358000</us-gaap:IncomeTaxExpenseBenefit>
    <us-gaap:IncomeTaxExpenseBenefit
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_yD2rsSSDCkOUFOyrEz7-Bg_15_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-73000</us-gaap:IncomeTaxExpenseBenefit>
    <us-gaap:ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tb__JgilsfYu0OdoiJy_YpUQA">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;min-height:0.0pt;margin:0pt;"&gt;&lt;span style="font-size:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:middle;width:72.6%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="position:absolute;top:50%;transform:translate(0,-50%);width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.95%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:72.6%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:25.33%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:72.6%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&#160;&#160;&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.24%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&#160;&#160;&#160;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.02%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="7" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:72.6%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:25.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:72.6%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Deferred tax assets:&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:72.6%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Inventory valuation&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 11,931&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 11,822&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:72.6%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Net operating losses&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 5,647&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 38,816&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:72.6%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Credit carry forwards&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 59,988&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 57,810&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:72.6%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Warranty and installation accruals&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 1,862&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 1,730&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:72.6%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Share-based compensation&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 5,267&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 4,033&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:72.6%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Customer deposits and deferred revenue&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 24,504&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 9,908&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:72.6%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Operating leases&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 8,349&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 8,464&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:72.6%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Research and experimental ("R&amp;amp;E") capitalization&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 19,071&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:72.6%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Other&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.95%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 6,553&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 5,880&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:72.6%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Total deferred tax assets&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 143,172&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 138,463&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:72.6%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Valuation allowance&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.95%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (11,083)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (116,054)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:72.6%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Net deferred tax assets&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.95%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 132,089&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 22,409&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:72.6%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:72.6%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Deferred tax liabilities:&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:72.6%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Purchased intangible assets&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 8,724&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 6,633&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:72.6%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Convertible Senior Notes&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (39)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 10,018&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:72.6%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Operating leases&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 5,994&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 6,539&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:72.6%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Depreciation&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.95%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 2,346&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 2,372&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:72.6%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Total deferred tax liabilities&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.95%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 17,025&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 25,562&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:middle;width:72.6%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Net deferred taxes&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.95%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 115,064&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.74%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (3,153)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</us-gaap:ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock>
    <us-gaap:DeferredTaxAssetsInventory
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_0w0sbAujOEeF7UrIwKsmzA_5_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">11931000</us-gaap:DeferredTaxAssetsInventory>
    <us-gaap:DeferredTaxAssetsInventory
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_eIyU2ghwzkGsYPHrSJISTg_5_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">11822000</us-gaap:DeferredTaxAssetsInventory>
    <us-gaap:DeferredTaxAssetsOperatingLossCarryforwards
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_ut3BlgukYEO710zIw5QHXg_6_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">5647000</us-gaap:DeferredTaxAssetsOperatingLossCarryforwards>
    <us-gaap:DeferredTaxAssetsOperatingLossCarryforwards
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_M7q6YsDXz0eKa1lY4urz1Q_6_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">38816000</us-gaap:DeferredTaxAssetsOperatingLossCarryforwards>
    <us-gaap:DeferredTaxAssetsTaxCreditCarryforwards
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_JHST9nFQAU-GeCcS3EUk7Q_7_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">59988000</us-gaap:DeferredTaxAssetsTaxCreditCarryforwards>
    <us-gaap:DeferredTaxAssetsTaxCreditCarryforwards
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_mSk-FsPhCEazRI8p6yeB_A_7_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">57810000</us-gaap:DeferredTaxAssetsTaxCreditCarryforwards>
    <us-gaap:DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReserves
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_mXasVrpTOECkW5IeV4SpDg_8_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">1862000</us-gaap:DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReserves>
    <us-gaap:DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReserves
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_Jq9sQA1dp0yxw3t73g2WqQ_8_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">1730000</us-gaap:DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReserves>
    <us-gaap:DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_B_QviyE_iE-wuBFx_VLrpQ_9_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">5267000</us-gaap:DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost>
    <us-gaap:DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_kS_MR7tHPkO9wKSMenxfMQ_9_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">4033000</us-gaap:DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost>
    <us-gaap:DeferredTaxAssetsDeferredIncome
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_eq0JVDnN6k-8L56SQx2z1g_10_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">24504000</us-gaap:DeferredTaxAssetsDeferredIncome>
    <us-gaap:DeferredTaxAssetsDeferredIncome
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_0tqAwM7_rkut37T14-GZNA_10_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">9908000</us-gaap:DeferredTaxAssetsDeferredIncome>
    <veco:DeferredTaxAssetsOperatingLeases
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_FyKLwRa9LEumsCIa9SjnYQ_11_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">8349000</veco:DeferredTaxAssetsOperatingLeases>
    <veco:DeferredTaxAssetsOperatingLeases
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_RIy5u3fLX0OivffPk9PB4A_11_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">8464000</veco:DeferredTaxAssetsOperatingLeases>
    <us-gaap:DeferredTaxAssetsInProcessResearchAndDevelopment
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_rrxNMMD3aUihOkfcDau3SA_12_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">19071000</us-gaap:DeferredTaxAssetsInProcessResearchAndDevelopment>
    <us-gaap:DeferredTaxAssetsOther
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_6ZLJFEoHdEW9C4z54iBKpQ_13_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">6553000</us-gaap:DeferredTaxAssetsOther>
    <us-gaap:DeferredTaxAssetsOther
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_lW-OcviRqkWK-llefKPcDw_13_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">5880000</us-gaap:DeferredTaxAssetsOther>
    <us-gaap:DeferredTaxAssetsGross
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_v7tgKxUcVEa-DU5uQieULQ_14_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">143172000</us-gaap:DeferredTaxAssetsGross>
    <us-gaap:DeferredTaxAssetsGross
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_ggaQeXO4C0yclGe8j-WEtw_14_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">138463000</us-gaap:DeferredTaxAssetsGross>
    <us-gaap:DeferredTaxAssetsValuationAllowance
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_j7G6-b7AaEynTojZMFNpJg_15_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">11083000</us-gaap:DeferredTaxAssetsValuationAllowance>
    <us-gaap:DeferredTaxAssetsValuationAllowance
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_wgjM0MjrXE6ZJ4Dqfja0kQ_15_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">116054000</us-gaap:DeferredTaxAssetsValuationAllowance>
    <us-gaap:DeferredTaxAssetsNet
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_r9rmEGQjQkGaWCMqsvqCTQ_16_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">132089000</us-gaap:DeferredTaxAssetsNet>
    <us-gaap:DeferredTaxAssetsNet
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_C55HEWCNpkGD9XQ7FjW7UA_16_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">22409000</us-gaap:DeferredTaxAssetsNet>
    <us-gaap:DeferredTaxLiabilitiesGoodwillAndIntangibleAssetsIntangibleAssets
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_624MhxQDiUiO5AVX6kghYA_19_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">8724000</us-gaap:DeferredTaxLiabilitiesGoodwillAndIntangibleAssetsIntangibleAssets>
    <us-gaap:DeferredTaxLiabilitiesGoodwillAndIntangibleAssetsIntangibleAssets
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_G4-YPT3snE-eegsc58mRuA_19_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">6633000</us-gaap:DeferredTaxLiabilitiesGoodwillAndIntangibleAssetsIntangibleAssets>
    <veco:DeferredTaxLiabilitiesFinancingArrangementsNet
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_aypzeqf1zUq4llTCgQuBfA_20_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-39000</veco:DeferredTaxLiabilitiesFinancingArrangementsNet>
    <veco:DeferredTaxLiabilitiesFinancingArrangementsNet
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_ku-jaq0dh0G4u1r61_7kIw_20_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">10018000</veco:DeferredTaxLiabilitiesFinancingArrangementsNet>
    <us-gaap:DeferredTaxLiabilitiesLeasingArrangements
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_IeDYk4Eak0a0wF3EbcII3Q_21_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">5994000</us-gaap:DeferredTaxLiabilitiesLeasingArrangements>
    <us-gaap:DeferredTaxLiabilitiesLeasingArrangements
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_rCs9iLMCukKfA2MdEpnZpw_21_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">6539000</us-gaap:DeferredTaxLiabilitiesLeasingArrangements>
    <us-gaap:DeferredTaxLiabilitiesPropertyPlantAndEquipment
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_yyYsF0pB1EON177sIuyQcQ_22_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">2346000</us-gaap:DeferredTaxLiabilitiesPropertyPlantAndEquipment>
    <us-gaap:DeferredTaxLiabilitiesPropertyPlantAndEquipment
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_ZUVguzTLW0KLYWmw82pRkQ_22_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">2372000</us-gaap:DeferredTaxLiabilitiesPropertyPlantAndEquipment>
    <us-gaap:DeferredIncomeTaxLiabilities
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_Rh1xvIZqO0Sl5dHxAOzgFQ_23_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">17025000</us-gaap:DeferredIncomeTaxLiabilities>
    <us-gaap:DeferredIncomeTaxLiabilities
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_P49HCu6aUEeDD5jC_b5hsQ_23_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">25562000</us-gaap:DeferredIncomeTaxLiabilities>
    <us-gaap:DeferredTaxAssetsLiabilitiesNet
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_hxRAZpjdEkmevioa_l2B9g_24_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">115064000</us-gaap:DeferredTaxAssetsLiabilitiesNet>
    <us-gaap:DeferredTaxLiabilities
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_Nga6gpNWik-n2aYYx7Xb4g_24_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">3153000</us-gaap:DeferredTaxLiabilities>
    <us-gaap:DeferredTaxLiabilitiesUndistributedForeignEarnings
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-5"
      id="Narr_Cx7P2v7NcEOye5_8_S46jw"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">900000</us-gaap:DeferredTaxLiabilitiesUndistributedForeignEarnings>
    <us-gaap:ValuationAllowanceDeferredTaxAssetChangeInAmount
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-5"
      id="Narr_48NruU64q0WkcPTc66JAkA"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-104900000</us-gaap:ValuationAllowanceDeferredTaxAssetChangeInAmount>
    <us-gaap:DeferredTaxAssetsValuationAllowance
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-5"
      id="Narr_KFBFkQSJOkCkjaYp5GgEqA"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">11100000</us-gaap:DeferredTaxAssetsValuationAllowance>
    <us-gaap:TaxCreditCarryforwardAmount
      contextRef="As_Of_12_31_2022_us-gaap_IncomeTaxAuthorityAxis_us-gaap_DomesticCountryMember_us-gaap_TaxCreditCarryforwardAxis_us-gaap_ResearchMember_JSK4sVm52Uad8MbRS3Hinw"
      decimals="-5"
      id="Narr_gOjFPIAueEu35nUeRzC8Jw"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">36500000</us-gaap:TaxCreditCarryforwardAmount>
    <us-gaap:TaxCreditCarryforwardAmount
      contextRef="As_Of_12_31_2022_us-gaap_IncomeTaxAuthorityAxis_us-gaap_ForeignCountryMember_LZNCNc3oqkaYk0GD8cCD-Q"
      decimals="-5"
      id="Narr_gSXfDKeDLkud4t2bQEt0qw"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">8700000</us-gaap:TaxCreditCarryforwardAmount>
    <us-gaap:OperatingLossCarryforwards
      contextRef="As_Of_12_31_2022_us-gaap_IncomeTaxAuthorityAxis_us-gaap_StateAndLocalJurisdictionMember_FJTorzE9E0O2-5w2lG7XTQ"
      decimals="-5"
      id="Narr_xqqklKfb5025PmJo813iCQ"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">59300000</us-gaap:OperatingLossCarryforwards>
    <us-gaap:DeferredTaxAssetsOperatingLossCarryforwards
      contextRef="As_Of_12_31_2022_us-gaap_IncomeTaxAuthorityAxis_us-gaap_StateAndLocalJurisdictionMember_FJTorzE9E0O2-5w2lG7XTQ"
      decimals="-5"
      id="Narr_HjHERth7vEaC_hkgnpjeVQ"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">4100000</us-gaap:DeferredTaxAssetsOperatingLossCarryforwards>
    <us-gaap:TaxCreditCarryforwardAmount
      contextRef="As_Of_12_31_2022_us-gaap_IncomeTaxAuthorityAxis_us-gaap_StateAndLocalJurisdictionMember_FJTorzE9E0O2-5w2lG7XTQ"
      decimals="-5"
      id="Narr_uAZlvLq0Y0GUM_9o-bqECQ"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">32600000</us-gaap:TaxCreditCarryforwardAmount>
    <us-gaap:SummaryOfIncomeTaxContingenciesTextBlock
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tb_DQ5d26FAlk28480CAyBXWg">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;min-height:0.0pt;margin:0pt;"&gt;&lt;span style="font-size:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:64.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.52%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:33.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.78%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.78%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.81%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="10" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:33.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Balance at beginning of year&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 12,761&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 12,363&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.52%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 12,369&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Additions for tax positions related to current year&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 4,180&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 2,642&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.52%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 1,217&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Additions for tax positions related to prior years&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 50&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.52%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 47&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Reductions for tax positions related to prior years&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (731)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (1,196)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.52%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (1,166)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Reductions due to the lapse of the statute of limitations&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.52%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Settlements&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (100)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (1,098)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (104)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Balance at end of year&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 16,110&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.49%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 12,761&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.52%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 12,363&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</us-gaap:SummaryOfIncomeTaxContingenciesTextBlock>
    <us-gaap:UnrecognizedTaxBenefits
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_8BiYf0YajUSayv3Ic6TkvQ_4_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">12761000</us-gaap:UnrecognizedTaxBenefits>
    <us-gaap:UnrecognizedTaxBenefits
      contextRef="As_Of_12_31_2020_JUGLvBeldEeSTj1WqQBVdQ"
      decimals="-3"
      id="Tc_6bWHVXzA3kuaxbK7SVxwpA_4_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">12363000</us-gaap:UnrecognizedTaxBenefits>
    <us-gaap:UnrecognizedTaxBenefits
      contextRef="As_Of_12_31_2019_dyqJ8hTIuEW6V2L_RveF0A"
      decimals="-3"
      id="Tc_S6DcnN6O9Ue1wm1h4FdHpA_4_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">12369000</us-gaap:UnrecognizedTaxBenefits>
    <us-gaap:UnrecognizedTaxBenefitsIncreasesResultingFromCurrentPeriodTaxPositions
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_NzwyNH2ENke-RxfpwYxZeQ_5_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">4180000</us-gaap:UnrecognizedTaxBenefitsIncreasesResultingFromCurrentPeriodTaxPositions>
    <us-gaap:UnrecognizedTaxBenefitsIncreasesResultingFromCurrentPeriodTaxPositions
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_NgiXAM9lO0yAi6Hvzo8O6A_5_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">2642000</us-gaap:UnrecognizedTaxBenefitsIncreasesResultingFromCurrentPeriodTaxPositions>
    <us-gaap:UnrecognizedTaxBenefitsIncreasesResultingFromCurrentPeriodTaxPositions
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_S4QWPPiwcEyQNnRCP-nw9A_5_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">1217000</us-gaap:UnrecognizedTaxBenefitsIncreasesResultingFromCurrentPeriodTaxPositions>
    <us-gaap:UnrecognizedTaxBenefitsIncreasesResultingFromPriorPeriodTaxPositions
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_0MOQLDbDJEWHJsZB_fpsOw_6_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">50000</us-gaap:UnrecognizedTaxBenefitsIncreasesResultingFromPriorPeriodTaxPositions>
    <us-gaap:UnrecognizedTaxBenefitsIncreasesResultingFromPriorPeriodTaxPositions
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_60XCoevLekG3fwsb89v7JQ_6_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">47000</us-gaap:UnrecognizedTaxBenefitsIncreasesResultingFromPriorPeriodTaxPositions>
    <us-gaap:UnrecognizedTaxBenefitsDecreasesResultingFromPriorPeriodTaxPositions
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_4zLOr-FFZkCdP0gR7WIiiA_7_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">731000</us-gaap:UnrecognizedTaxBenefitsDecreasesResultingFromPriorPeriodTaxPositions>
    <us-gaap:UnrecognizedTaxBenefitsDecreasesResultingFromPriorPeriodTaxPositions
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_iyjMQw33SEareHSci1t4Nw_7_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">1196000</us-gaap:UnrecognizedTaxBenefitsDecreasesResultingFromPriorPeriodTaxPositions>
    <us-gaap:UnrecognizedTaxBenefitsDecreasesResultingFromPriorPeriodTaxPositions
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_jpqU9Dq73EG_MhVXx9mw1w_7_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">1166000</us-gaap:UnrecognizedTaxBenefitsDecreasesResultingFromPriorPeriodTaxPositions>
    <us-gaap:UnrecognizedTaxBenefitsDecreasesResultingFromSettlementsWithTaxingAuthorities
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_paqGaxu3yUGFPApWklBgzg_9_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">100000</us-gaap:UnrecognizedTaxBenefitsDecreasesResultingFromSettlementsWithTaxingAuthorities>
    <us-gaap:UnrecognizedTaxBenefitsDecreasesResultingFromSettlementsWithTaxingAuthorities
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_yegIrqhEcEuW_ibGm9NLCA_9_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">1098000</us-gaap:UnrecognizedTaxBenefitsDecreasesResultingFromSettlementsWithTaxingAuthorities>
    <us-gaap:UnrecognizedTaxBenefitsDecreasesResultingFromSettlementsWithTaxingAuthorities
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_I2LF3IOyZUOi20EdGj_lbA_9_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">104000</us-gaap:UnrecognizedTaxBenefitsDecreasesResultingFromSettlementsWithTaxingAuthorities>
    <us-gaap:UnrecognizedTaxBenefits
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_KDYh8WtUgkmstfzA1MwkRg_10_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">16110000</us-gaap:UnrecognizedTaxBenefits>
    <us-gaap:UnrecognizedTaxBenefits
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_p6DV_Fp7j02yQuKWvC9kPw_10_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">12761000</us-gaap:UnrecognizedTaxBenefits>
    <us-gaap:UnrecognizedTaxBenefits
      contextRef="As_Of_12_31_2020_JUGLvBeldEeSTj1WqQBVdQ"
      decimals="-3"
      id="Tc_8Nyei4Vv_kOxl56YPAaYLQ_10_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">12363000</us-gaap:UnrecognizedTaxBenefits>
    <us-gaap:UnrecognizedTaxBenefitsThatWouldImpactEffectiveTaxRate
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-5"
      id="Narr_vxFotMnehUm5rnOTKw77NQ"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">13500000</us-gaap:UnrecognizedTaxBenefitsThatWouldImpactEffectiveTaxRate>
    <us-gaap:UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-5"
      id="Narr_M4MLsvGR20K0tf33DuL5yg"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">500000</us-gaap:UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued>
    <us-gaap:UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-5"
      id="Narr_MHG4NKjsKE2bxX0EboxFEA"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">400000</us-gaap:UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued>
    <us-gaap:SegmentReportingDisclosureTextBlock
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tb_nDImJV-SBUGFUEIT8psggA">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Note 16 &#x2014; Segment Reporting and Geographic Information&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The Company operates and measures its results in one operating segment and therefore has one reportable segment: the development, manufacture, sales, and support of semiconductor and thin film process equipment primarily sold to make electronic devices. The Company&#x2019;s Chief Operating Decision Maker, the Chief Executive Officer, evaluates performance of the Company and makes decisions regarding the allocation of resources based on total Company results.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Sales by end-market is as follows:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;min-height:0.0pt;margin:0pt;"&gt;&lt;span style="font-size:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80.72%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:60.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.7%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.7%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.7%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:60.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:37.01%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;For&#160;the year ended December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:60.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.97%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.97%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.97%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="10" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:60.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:37.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:60.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Sales by end-market&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.7%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.7%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.7%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:60.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Semiconductor&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.7%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 369,369&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.7%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 247,051&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.7%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 165,909&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:60.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Compound Semiconductor&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.7%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 121,194&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.7%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 106,972&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.7%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 107,922&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:60.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Data Storage&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.7%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 87,544&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.7%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 168,760&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.7%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 123,288&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:60.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Scientific &amp;amp; Other&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.7%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 68,030&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.7%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 60,494&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.7%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 57,044&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:60.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.7%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 646,137&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.7%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 583,277&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.7%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 454,163&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The Company&#x2019;s significant operations outside the United States include sales and service offices in China, Europe, and Rest of APAC. For geographic reporting, sales are attributed to the location in which the customer facility is located. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Sales and long-lived tangible assets by geographic region are as follows:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:38.26%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.97%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:38.26%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:30.19%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Net&#160;Sales&#160;to&#160;Unaffiliated Customers&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:28.24%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Long-lived&#160;Tangible&#160;Assets&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:38.26%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.97%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.98%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.01%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="19" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:38.26%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="17" style="vertical-align:bottom;white-space:nowrap;width:60.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:38.26%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;United States&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 197,433&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 217,209&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 145,353&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 106,550&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 99,220&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.97%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 64,967&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:38.26%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;EMEA&lt;sup style="font-family:'Calibri','Helvetica','sans-serif';font-size:8.25pt;line-height:100%;top:0pt;vertical-align:top;"&gt;(1)&lt;/sup&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 87,837&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 55,129&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 73,124&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 60&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 94&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.97%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 120&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:38.26%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;China&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 123,703&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 105,998&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 57,589&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 70&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 67&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.97%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 84&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:38.26%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Rest of APAC&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 235,735&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 204,633&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 177,569&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 601&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 362&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.97%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 100&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:38.26%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Rest of World&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,429&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 308&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 528&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.97%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:38.26%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Total &lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 646,137&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 583,277&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 454,163&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 107,281&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 99,743&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.97%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 65,271&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;div style="font-family:'Times New Roman','Times','serif';font-size:9.0pt;margin-bottom:0pt;margin-top:0pt;min-height:1.19em;position:relative;width:100%;"&gt;&lt;div style="background-color:#000000;height:1pt;position:relative;top:0.6em;width:25.0%;border:none;margin:0 auto 0 0;"/&gt;&lt;/div&gt;&lt;table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"&gt;&lt;tr&gt;&lt;td style="font-family:'Times New Roman','Times','serif';font-size:9pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;"&gt;(1)&lt;/td&gt;&lt;td style="padding:0pt;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:9pt;font-style:normal;font-weight:normal;"&gt;EMEA consists of Europe, the Middle East, and Africa&lt;/span&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;</us-gaap:SegmentReportingDisclosureTextBlock>
    <us-gaap:NumberOfOperatingSegments
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="INF"
      id="Narr_LKnzheuMtEGOZZhi8w7fgw"
      unitRef="Unit_Standard_segment_RlYNACzID0m6O5VHI3M3nA">1</us-gaap:NumberOfOperatingSegments>
    <us-gaap:NumberOfReportableSegments
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="INF"
      id="Narr_339CvcWHS0y2SUQUv2m9-A"
      unitRef="Unit_Standard_segment_RlYNACzID0m6O5VHI3M3nA">1</us-gaap:NumberOfReportableSegments>
    <us-gaap:ScheduleOfEntityWideInformationRevenueFromExternalCustomersByProductsAndServicesTextBlock
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tb_aKI39jwhsk6fz4jUTIMcsQ">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;min-height:0.0pt;margin:0pt;"&gt;&lt;span style="font-size:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:80.72%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:60.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.7%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.7%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.7%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:60.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:37.01%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;For&#160;the year ended December&#160;31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:60.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.97%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.97%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.97%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="10" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:60.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:37.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:60.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Sales by end-market&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.7%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.7%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.7%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-style:italic;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:60.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Semiconductor&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.7%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 369,369&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.7%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 247,051&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.7%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 165,909&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:60.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Compound Semiconductor&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.7%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 121,194&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.7%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 106,972&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.7%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 107,922&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:60.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Data Storage&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.7%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 87,544&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.7%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 168,760&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.7%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 123,288&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:60.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Scientific &amp;amp; Other&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.7%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 68,030&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.7%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 60,494&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.7%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 57,044&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:60.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.7%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 646,137&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.7%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 583,277&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.27%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.7%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 454,163&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</us-gaap:ScheduleOfEntityWideInformationRevenueFromExternalCustomersByProductsAndServicesTextBlock>
    <us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax
      contextRef="Duration_1_1_2022_To_12_31_2022_srt_ProductOrServiceAxis_veco_SemiconductorMember_9PJiZcYx8keIpEVWmTevwA"
      decimals="-3"
      id="Tc_Or1CyYIQeUOy-LQs7CUV2w_5_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">369369000</us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax>
    <us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax
      contextRef="Duration_1_1_2021_To_12_31_2021_srt_ProductOrServiceAxis_veco_SemiconductorMember_YkhDbPkawEiyjB3fK4wRQw"
      decimals="-3"
      id="Tc_WFcH0iAGgkiC-rAnTU_EFw_5_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">247051000</us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax>
    <us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax
      contextRef="Duration_1_1_2020_To_12_31_2020_srt_ProductOrServiceAxis_veco_SemiconductorMember_GKacZn4rvEyU0M6kjYWAOA"
      decimals="-3"
      id="Tc_Xog3AgOOxU2U_g2ew4OF9w_5_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">165909000</us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax>
    <us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax
      contextRef="Duration_1_1_2022_To_12_31_2022_srt_ProductOrServiceAxis_veco_CompoundSemiconductorMember_LdTGFm08V0K1-4URhxYb-w"
      decimals="-3"
      id="Tc_TywcgrQOjEOSwRd0LnWKng_6_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">121194000</us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax>
    <us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax
      contextRef="Duration_1_1_2021_To_12_31_2021_srt_ProductOrServiceAxis_veco_CompoundSemiconductorMember_IAiei5YbJEyH8DppQEM5_w"
      decimals="-3"
      id="Tc_vvX5wbvcOU2jHDxO9mS1xg_6_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">106972000</us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax>
    <us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax
      contextRef="Duration_1_1_2020_To_12_31_2020_srt_ProductOrServiceAxis_veco_CompoundSemiconductorMember_19iFaF75yECz3rBkCfAGpg"
      decimals="-3"
      id="Tc_ETw0RyT3IkOKd-R-CLFoiA_6_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">107922000</us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax>
    <us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax
      contextRef="Duration_1_1_2022_To_12_31_2022_srt_ProductOrServiceAxis_veco_DataStorageMember_ohlZC8GlDkOKwTiD8wpwUw"
      decimals="-3"
      id="Tc_HuaaYjRxfk-_aUnax4Caew_7_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">87544000</us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax>
    <us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax
      contextRef="Duration_1_1_2021_To_12_31_2021_srt_ProductOrServiceAxis_veco_DataStorageMember_WuQRBW8HokiCULZhKHrZDg"
      decimals="-3"
      id="Tc_-CY-I_97D0iy2PPVCAlFNA_7_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">168760000</us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax>
    <us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax
      contextRef="Duration_1_1_2020_To_12_31_2020_srt_ProductOrServiceAxis_veco_DataStorageMember_drFJLf9L9kq6PLGRMBLwHQ"
      decimals="-3"
      id="Tc_uY_kZiWoKEGhT_VqJv1VuQ_7_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">123288000</us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax>
    <us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax
      contextRef="Duration_1_1_2022_To_12_31_2022_srt_ProductOrServiceAxis_veco_ScientificAndOtherMember_R82epki4m0O2R4lYzbFB9A"
      decimals="-3"
      id="Tc_v6EbWSLJjkWNbLJaDU3dZw_8_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">68030000</us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax>
    <us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax
      contextRef="Duration_1_1_2021_To_12_31_2021_srt_ProductOrServiceAxis_veco_ScientificAndOtherMember_Dooe7CVpc0a8KYAWnA2ecw"
      decimals="-3"
      id="Tc_ovd9WM4mGUS-mXsGYwmiUA_8_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">60494000</us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax>
    <us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax
      contextRef="Duration_1_1_2020_To_12_31_2020_srt_ProductOrServiceAxis_veco_ScientificAndOtherMember_-7m243SMR0udkXGnjcwNSg"
      decimals="-3"
      id="Tc_F3QFGIWrJEKznb0-NgjL9A_8_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">57044000</us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax>
    <us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_L6Ax6_IYVEaLMXdxpWcF6Q_9_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">646137000</us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax>
    <us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_b9ajbjO8uEG2l3owQUXP9Q_9_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">583277000</us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax>
    <us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_Hirmv9SNeE2702cmfnPCHg_9_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">454163000</us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax>
    <us-gaap:ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsByGeographicalAreasTableTextBlock
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tb_0LZe1v6rbk-Yq0y4qcvy1g">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:38.26%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.97%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:38.26%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:30.19%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Net&#160;Sales&#160;to&#160;Unaffiliated Customers&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:28.24%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Long-lived&#160;Tangible&#160;Assets&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:38.26%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.97%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.98%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.01%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="19" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:38.26%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="17" style="vertical-align:bottom;white-space:nowrap;width:60.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:38.26%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;United States&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 197,433&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 217,209&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 145,353&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 106,550&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 99,220&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.97%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 64,967&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:38.26%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;EMEA&lt;sup style="font-family:'Calibri','Helvetica','sans-serif';font-size:8.25pt;line-height:100%;top:0pt;vertical-align:top;"&gt;(1)&lt;/sup&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 87,837&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 55,129&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 73,124&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 60&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 94&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.97%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 120&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:38.26%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;China&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 123,703&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 105,998&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 57,589&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 70&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 67&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.97%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 84&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:38.26%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Rest of APAC&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 235,735&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 204,633&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 177,569&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 601&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 362&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.97%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 100&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:38.26%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Rest of World&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,429&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 308&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 528&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.97%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:38.26%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Total &lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 646,137&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 583,277&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 454,163&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 107,281&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.9%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 99,743&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.04%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.97%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 65,271&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;div style="font-family:'Times New Roman','Times','serif';font-size:9.0pt;margin-bottom:0pt;margin-top:0pt;min-height:1.19em;position:relative;width:100%;"&gt;&lt;div style="background-color:#000000;height:1pt;position:relative;top:0.6em;width:25.0%;border:none;margin:0 auto 0 0;"/&gt;&lt;/div&gt;&lt;table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"&gt;&lt;tr&gt;&lt;td style="font-family:'Times New Roman','Times','serif';font-size:9pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;"&gt;(1)&lt;/td&gt;&lt;td style="padding:0pt;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:9pt;font-style:normal;font-weight:normal;"&gt;EMEA consists of Europe, the Middle East, and Africa&lt;/span&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;</us-gaap:ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsByGeographicalAreasTableTextBlock>
    <us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax
      contextRef="Duration_1_1_2022_To_12_31_2022_srt_StatementGeographicalAxis_country_US_Iqq-3Yh3o0KOcOsQuuWFnw"
      decimals="-3"
      id="Tc_k1WCfwIvVEmaEuCeGBnbhQ_4_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">197433000</us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax>
    <us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax
      contextRef="Duration_1_1_2021_To_12_31_2021_srt_StatementGeographicalAxis_country_US_Qk0pMUh3A0imrH2rqxssEg"
      decimals="-3"
      id="Tc_zTLCqvW0-Ee6-zz-JQW4KA_4_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">217209000</us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax>
    <us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax
      contextRef="Duration_1_1_2020_To_12_31_2020_srt_StatementGeographicalAxis_country_US_nlfJOecro0qR-ydQH9T88Q"
      decimals="-3"
      id="Tc_33wyehVLF0CWY0eR0n4mgw_4_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">145353000</us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax>
    <us-gaap:PropertyPlantAndEquipmentNet
      contextRef="As_Of_12_31_2022_srt_StatementGeographicalAxis_country_US_9rx8lXGp-UePPYpikE4BwQ"
      decimals="-3"
      id="Tc_c13JSmcAQEWTUT2b2XQWXg_4_12"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">106550000</us-gaap:PropertyPlantAndEquipmentNet>
    <us-gaap:PropertyPlantAndEquipmentNet
      contextRef="As_Of_12_31_2021_srt_StatementGeographicalAxis_country_US_T55RSt3DbUW94GG58r4txw"
      decimals="-3"
      id="Tc_2tY0DSEcp0SmMWn8t5-IAQ_4_15"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">99220000</us-gaap:PropertyPlantAndEquipmentNet>
    <us-gaap:PropertyPlantAndEquipmentNet
      contextRef="As_Of_12_31_2020_srt_StatementGeographicalAxis_country_US_IFBHHJD4ZEekIQ5l9IjVqw"
      decimals="-3"
      id="Tc_elZ6cfKj8EyXIEkz99vflQ_4_18"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">64967000</us-gaap:PropertyPlantAndEquipmentNet>
    <us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax
      contextRef="Duration_1_1_2022_To_12_31_2022_srt_StatementGeographicalAxis_us-gaap_EMEAMember_Xd-c8lKXMkGwam6POJvgSQ"
      decimals="-3"
      id="Tc_OfAE3F64zU2vG1Lkq0vT_w_5_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">87837000</us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax>
    <us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax
      contextRef="Duration_1_1_2021_To_12_31_2021_srt_StatementGeographicalAxis_us-gaap_EMEAMember_VfxBGC5wCkm5_qWrjZmgPA"
      decimals="-3"
      id="Tc_x3gNETyVmEGe3VMLx6yyVQ_5_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">55129000</us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax>
    <us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax
      contextRef="Duration_1_1_2020_To_12_31_2020_srt_StatementGeographicalAxis_us-gaap_EMEAMember_cNbtUrMBU02kQ3oY3LZf_Q"
      decimals="-3"
      id="Tc_5iORdqI_R0iCf9a94RSgAA_5_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">73124000</us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax>
    <us-gaap:PropertyPlantAndEquipmentNet
      contextRef="As_Of_12_31_2022_srt_StatementGeographicalAxis_us-gaap_EMEAMember_haoOD1W3VEefYffMIxwz_w"
      decimals="-3"
      id="Tc_a42lbhFKKEi_gLNz2nHhbA_5_12"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">60000</us-gaap:PropertyPlantAndEquipmentNet>
    <us-gaap:PropertyPlantAndEquipmentNet
      contextRef="As_Of_12_31_2021_srt_StatementGeographicalAxis_us-gaap_EMEAMember_-2eMs00UmU-xtabNFZCl8Q"
      decimals="-3"
      id="Tc_fWhqtXTbmUSYOxsNmyp5PQ_5_15"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">94000</us-gaap:PropertyPlantAndEquipmentNet>
    <us-gaap:PropertyPlantAndEquipmentNet
      contextRef="As_Of_12_31_2020_srt_StatementGeographicalAxis_us-gaap_EMEAMember_GvpCorI590OKQRjAeF3GNg"
      decimals="-3"
      id="Tc_f6RuSAW-dkeOJdTZWwx0bg_5_18"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">120000</us-gaap:PropertyPlantAndEquipmentNet>
    <us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax
      contextRef="Duration_1_1_2022_To_12_31_2022_srt_StatementGeographicalAxis_country_CN_QBoqba6p3E65LEV6R7MTsQ"
      decimals="-3"
      id="Tc_2HdMt9jO6EOMpF3zVFvm6Q_6_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">123703000</us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax>
    <us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax
      contextRef="Duration_1_1_2021_To_12_31_2021_srt_StatementGeographicalAxis_country_CN_ZvsRp4BDo06Ko490CiqQIg"
      decimals="-3"
      id="Tc_rtQtXvut7UWcHbj59Z_yhQ_6_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">105998000</us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax>
    <us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax
      contextRef="Duration_1_1_2020_To_12_31_2020_srt_StatementGeographicalAxis_country_CN_mjQ--ouO8Eq8LXzJRXoKMA"
      decimals="-3"
      id="Tc_locqquIpTUOG-N1cX_4Vtg_6_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">57589000</us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax>
    <us-gaap:PropertyPlantAndEquipmentNet
      contextRef="As_Of_12_31_2022_srt_StatementGeographicalAxis_country_CN_qymy7_UBkEC6VBQbt2XEbw"
      decimals="-3"
      id="Tc_Vz-OzZfV8kuLqUfu7f8ROg_6_12"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">70000</us-gaap:PropertyPlantAndEquipmentNet>
    <us-gaap:PropertyPlantAndEquipmentNet
      contextRef="As_Of_12_31_2021_srt_StatementGeographicalAxis_country_CN_tdldCDp8U0SPe2xlhi8Pdg"
      decimals="-3"
      id="Tc_BVFrAZGnLUKolpABdIhwnQ_6_15"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">67000</us-gaap:PropertyPlantAndEquipmentNet>
    <us-gaap:PropertyPlantAndEquipmentNet
      contextRef="As_Of_12_31_2020_srt_StatementGeographicalAxis_country_CN_YpEyHYcZokyQEdtnzsqn2g"
      decimals="-3"
      id="Tc_2VbaEgdRD0mWnsLNBTaOGA_6_18"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">84000</us-gaap:PropertyPlantAndEquipmentNet>
    <us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax
      contextRef="Duration_1_1_2022_To_12_31_2022_srt_StatementGeographicalAxis_veco_AsiaPacificExcludingChinaMember_7p5vq41yVkK3tUpkfkCrQA"
      decimals="-3"
      id="Tc_y5tszcsnaUK5AbI9dNrMVg_7_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">235735000</us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax>
    <us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax
      contextRef="Duration_1_1_2021_To_12_31_2021_srt_StatementGeographicalAxis_veco_AsiaPacificExcludingChinaMember_W3DfwYqTJUid6go4WOTUwQ"
      decimals="-3"
      id="Tc_9JGWMAT2N0CjGW_mi9rrig_7_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">204633000</us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax>
    <us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax
      contextRef="Duration_1_1_2020_To_12_31_2020_srt_StatementGeographicalAxis_veco_AsiaPacificExcludingChinaMember_Jr8Bxw0HLkeseR2GeImE0A"
      decimals="-3"
      id="Tc_zwpHnPT3hEeW1_a-0RZ4aQ_7_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">177569000</us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax>
    <us-gaap:PropertyPlantAndEquipmentNet
      contextRef="As_Of_12_31_2022_srt_StatementGeographicalAxis_veco_AsiaPacificExcludingChinaMember_UvfACFZGrUypPpEdHOipMQ"
      decimals="-3"
      id="Tc_rFCJBCqS4Uu4-H3ZvYu20w_7_12"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">601000</us-gaap:PropertyPlantAndEquipmentNet>
    <us-gaap:PropertyPlantAndEquipmentNet
      contextRef="As_Of_12_31_2021_srt_StatementGeographicalAxis_veco_AsiaPacificExcludingChinaMember_HXJxHtMkW0aGxszM6SJ1uw"
      decimals="-3"
      id="Tc_VRnOERKkzk2Yd81smWWojg_7_15"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">362000</us-gaap:PropertyPlantAndEquipmentNet>
    <us-gaap:PropertyPlantAndEquipmentNet
      contextRef="As_Of_12_31_2020_srt_StatementGeographicalAxis_veco_AsiaPacificExcludingChinaMember_aAB8ukG5VEimziKhX1v34w"
      decimals="-3"
      id="Tc_sCKhmH3zMES8mdrbg88z3w_7_18"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">100000</us-gaap:PropertyPlantAndEquipmentNet>
    <us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax
      contextRef="Duration_1_1_2022_To_12_31_2022_srt_StatementGeographicalAxis_veco_RestOfWorldMember_VAzisHSCx0-DlDvmloB2xw"
      decimals="-3"
      id="Tc_Hb1z5FQqOUmaJPcZVk9yYg_8_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">1429000</us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax>
    <us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax
      contextRef="Duration_1_1_2021_To_12_31_2021_srt_StatementGeographicalAxis_veco_RestOfWorldMember_z2CDDUi9cEmCQUu5NwxCRg"
      decimals="-3"
      id="Tc__HsP38JJT0WkceI1ndfqPA_8_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">308000</us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax>
    <us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax
      contextRef="Duration_1_1_2020_To_12_31_2020_srt_StatementGeographicalAxis_veco_RestOfWorldMember_igromS0r10qJ0F2D-OutxA"
      decimals="-3"
      id="Tc_fLIfJ6NUmEymHGDEhi3FvQ_8_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">528000</us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax>
    <us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_hzWpg6XVIkOs13kbtyT8LQ_9_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">646137000</us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax>
    <us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_rNHr0vlp4kigKdNgj6HCBw_9_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">583277000</us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax>
    <us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_h75Y4bnhR06KDDs-9V9TXQ_9_9"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">454163000</us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax>
    <us-gaap:PropertyPlantAndEquipmentNet
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_HL9Gop_6ykKFILy2TxhN1A_9_12"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">107281000</us-gaap:PropertyPlantAndEquipmentNet>
    <us-gaap:PropertyPlantAndEquipmentNet
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_Tf5hijKZlUueQ3YC8l3B7w_9_15"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">99743000</us-gaap:PropertyPlantAndEquipmentNet>
    <us-gaap:PropertyPlantAndEquipmentNet
      contextRef="As_Of_12_31_2020_JUGLvBeldEeSTj1WqQBVdQ"
      decimals="-3"
      id="Tc_o30j6pLBLkC9C-7xXOUJHw_9_18"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">65271000</us-gaap:PropertyPlantAndEquipmentNet>
    <us-gaap:SubsequentEventsTextBlock
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tb_t2i9X32PlUWBWPAA0vLwXg">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Note 17 &#x2014; Subseqent Events&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="white-space:pre-wrap;"&gt;On January 31, 2023, the Company acquired Epiluvac AB, a privately held manufacturer of chemical vapor deposition  epitaxy systems that enable advanced silicon carbide applications in the electric vehicle market.&lt;/span&gt;&lt;span style="font-size:11pt;"&gt; &lt;/span&gt;Epiluvac is an early-stage revenue company with 11&lt;span style="white-space:pre-wrap;"&gt; employees.  The purchase price for the transaction, all payable in cash, was &lt;/span&gt;$30 million paid at the time of closing with a potential additional $35&lt;span style="white-space:pre-wrap;"&gt; million in performance based earn-outs.  &lt;/span&gt;&lt;/p&gt;</us-gaap:SubsequentEventsTextBlock>
    <dei:EntityNumberOfEmployees
      contextRef="As_Of_1_31_2023_dei_LegalEntityAxis_veco_EpiluvacAbMember_us-gaap_SubsequentEventTypeAxis_us-gaap_SubsequentEventMember_bGwG6YtVWESCjdQzt4z_DA"
      decimals="INF"
      id="Narr_0Skz92wVQUC_Ey19PtFFxw"
      unitRef="Unit_Standard_employee_W_mzWhkhIEKoXUFE8oNQVg">11</dei:EntityNumberOfEmployees>
    <us-gaap:PaymentsToAcquireBusinessesGross
      contextRef="Duration_1_31_2023_To_1_31_2023_us-gaap_BusinessAcquisitionAxis_veco_EpiluvacAbMember_us-gaap_SubsequentEventTypeAxis_us-gaap_SubsequentEventMember_azBhPTo7jkCpUE7FbJTfEg"
      decimals="-6"
      id="Narr_q2AGYc4YU0Od9tzL2k8VFw"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">30000000</us-gaap:PaymentsToAcquireBusinessesGross>
    <us-gaap:BusinessCombinationContingentConsiderationArrangementsRangeOfOutcomesValueHigh
      contextRef="As_Of_1_31_2023_us-gaap_BusinessAcquisitionAxis_veco_EpiluvacAbMember_us-gaap_SubsequentEventTypeAxis_us-gaap_SubsequentEventMember_bd9hW5CYR0a5e-Lpq61haA"
      decimals="-6"
      id="Narr_9ifjGOQMoU2RNrkVJ9kg4w"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">35000000</us-gaap:BusinessCombinationContingentConsiderationArrangementsRangeOfOutcomesValueHigh>
    <srt:ScheduleOfValuationAndQualifyingAccountsDisclosureTextBlock
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      id="Tb_v6bXovipEUG2DxDDBYre_w">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Schedule II &#x2014; Valuation and Qualifying Accounts&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:10pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:45.27%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.93%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.6%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.73%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.62%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.99%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:45.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:19.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Additions&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:45.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Charged &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.73%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:45.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Balance&#160;at&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(Credited)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.97%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Charged&#160;to&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Balance&#160;at&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:45.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Beginning&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;to&#160;Costs&#160;and&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.97%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Other&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;End&#160;of&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:45.27%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Deducted from asset accounts:&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.14%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;of&#160;Period&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.78%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Expenses&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.97%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Accounts&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.8%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Deductions&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.17%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Period&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="16" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:45.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="14" style="vertical-align:bottom;white-space:nowrap;width:52.79%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;i style="font-style:italic;"&gt;(in&#160;thousands)&lt;/i&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:45.27%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Year ended December&#160;31, 2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.93%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.6%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.73%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.62%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.99%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:45.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Allowance for doubtful accounts&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 736&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.6%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.73%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 736&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:45.27%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Valuation allowance in net deferred tax assets&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.93%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 116,054&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.6%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (104,971)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.73%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.62%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.99%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 11,083&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:45.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.96%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 116,790&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.6%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (104,971)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.73%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.62%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.99%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 11,819&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:45.27%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.93%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.6%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.73%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.62%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.99%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:45.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Year ended December&#160;31, 2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.6%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.73%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:45.27%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Allowance for doubtful accounts&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.93%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 736&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.6%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.73%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.62%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.99%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 736&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:45.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Valuation allowance in net deferred tax assets&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 118,443&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.6%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.73%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.62%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (2,389)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.99%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 116,054&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:45.27%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.93%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 119,179&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.6%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.73%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.62%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (2,389)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.99%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 116,790&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:45.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.6%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.73%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:45.27%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Year ended December&#160;31, 2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.93%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.6%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.73%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.62%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.99%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:45.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Allowance for doubtful accounts&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.96%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 602&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.6%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 140&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.73%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (6)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 736&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:45.27%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 6pt;"&gt;Valuation allowance in net deferred tax assets&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.93%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.96%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 130,053&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.6%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 513&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.73%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.62%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (12,123)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.97%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.99%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 118,443&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:45.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.96%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 130,655&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.6%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 653&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.73%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.62%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (12,129)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.97%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.99%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.6pt 0pt 0pt;"&gt; 119,179&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</srt:ScheduleOfValuationAndQualifyingAccountsDisclosureTextBlock>
    <us-gaap:ValuationAllowancesAndReservesBalance
      contextRef="As_Of_12_31_2021_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_AllowanceForCreditLossMember_3P4puSHlZ0-MKV1ZgEpVLw"
      decimals="-3"
      id="Tc_4lFCc6zSe0OqvQVUMUtJKw_8_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">736000</us-gaap:ValuationAllowancesAndReservesBalance>
    <us-gaap:ValuationAllowancesAndReservesBalance
      contextRef="As_Of_12_31_2022_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_AllowanceForCreditLossMember_9CuZ9qQkQkyZhNVg12vbmA"
      decimals="-3"
      id="Tc_2Jiy9uK9DkSq6lRNfT48dA_8_15"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">736000</us-gaap:ValuationAllowancesAndReservesBalance>
    <us-gaap:ValuationAllowancesAndReservesBalance
      contextRef="As_Of_12_31_2021_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_ubRsuDLW0kKOOU1kwiqmyQ"
      decimals="-3"
      id="Tc__GjWqmJAhUe6yrPeTJ2MUQ_9_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">116054000</us-gaap:ValuationAllowancesAndReservesBalance>
    <us-gaap:ValuationAllowancesAndReservesChargedToCostAndExpense
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_ubkTZuWsAkO4w1IFkEt5FQ"
      decimals="-3"
      id="Tc_-_S4R38xNUiAK2Skz_4tDw_9_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-104971000</us-gaap:ValuationAllowancesAndReservesChargedToCostAndExpense>
    <us-gaap:ValuationAllowancesAndReservesBalance
      contextRef="As_Of_12_31_2022_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_ruzo5a8GZk2xJncEnDVyGA"
      decimals="-3"
      id="Tc__2okkcR72UOnXWKJ64k6WQ_9_15"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">11083000</us-gaap:ValuationAllowancesAndReservesBalance>
    <us-gaap:ValuationAllowancesAndReservesBalance
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_Wib_ICOEoUysgFGHmuaX4Q_10_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">116790000</us-gaap:ValuationAllowancesAndReservesBalance>
    <us-gaap:ValuationAllowancesAndReservesChargedToCostAndExpense
      contextRef="Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw"
      decimals="-3"
      id="Tc_Jg40DJ8uC0GZcZ_XJ7vIKg_10_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">-104971000</us-gaap:ValuationAllowancesAndReservesChargedToCostAndExpense>
    <us-gaap:ValuationAllowancesAndReservesBalance
      contextRef="As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w"
      decimals="-3"
      id="Tc_jMjU6cIshUWEopsjKWGBkQ_10_15"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">11819000</us-gaap:ValuationAllowancesAndReservesBalance>
    <us-gaap:ValuationAllowancesAndReservesBalance
      contextRef="As_Of_12_31_2020_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_AllowanceForCreditLossMember_QQ0VBL7qRE2YRwey-lG_eg"
      decimals="-3"
      id="Tc_qOtZA00ttEaf1BL_WLFesA_13_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">736000</us-gaap:ValuationAllowancesAndReservesBalance>
    <us-gaap:ValuationAllowancesAndReservesBalance
      contextRef="As_Of_12_31_2021_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_AllowanceForCreditLossMember_3P4puSHlZ0-MKV1ZgEpVLw"
      decimals="-3"
      id="Tc_hkDdQjIIdEiWAqXaLY64EQ_13_15"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">736000</us-gaap:ValuationAllowancesAndReservesBalance>
    <us-gaap:ValuationAllowancesAndReservesBalance
      contextRef="As_Of_12_31_2020_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_cKBh7RwrYkiyqOF1CpqALQ"
      decimals="-3"
      id="Tc_2WvmUo2Dy0mKw-j0VhBxNw_14_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">118443000</us-gaap:ValuationAllowancesAndReservesBalance>
    <us-gaap:ValuationAllowancesAndReservesDeductions
      contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_BWpjmM2iLkSahHEVu-gtSg"
      decimals="-3"
      id="Tc_aJXooF9dKE-vKizLoNfsiA_14_12"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">2389000</us-gaap:ValuationAllowancesAndReservesDeductions>
    <us-gaap:ValuationAllowancesAndReservesBalance
      contextRef="As_Of_12_31_2021_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_ubRsuDLW0kKOOU1kwiqmyQ"
      decimals="-3"
      id="Tc_fMA-yUI26UmwZYJS1gQ1fQ_14_15"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">116054000</us-gaap:ValuationAllowancesAndReservesBalance>
    <us-gaap:ValuationAllowancesAndReservesBalance
      contextRef="As_Of_12_31_2020_JUGLvBeldEeSTj1WqQBVdQ"
      decimals="-3"
      id="Tc_AqLGf-Wh6E2l4Lnx35Omvw_15_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">119179000</us-gaap:ValuationAllowancesAndReservesBalance>
    <us-gaap:ValuationAllowancesAndReservesDeductions
      contextRef="Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw"
      decimals="-3"
      id="Tc_PQuoktLkAEm7zChLXqTpDg_15_12"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">2389000</us-gaap:ValuationAllowancesAndReservesDeductions>
    <us-gaap:ValuationAllowancesAndReservesBalance
      contextRef="As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ"
      decimals="-3"
      id="Tc_iAgcH3YxwUeYHntNaBmC8Q_15_15"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">116790000</us-gaap:ValuationAllowancesAndReservesBalance>
    <us-gaap:ValuationAllowancesAndReservesBalance
      contextRef="As_Of_12_31_2019_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_AllowanceForCreditLossMember_b9cISaouPUKueqwRlspRcw"
      decimals="-3"
      id="Tc_8btBerVWX0GkYZcYXDcBKw_18_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">602000</us-gaap:ValuationAllowancesAndReservesBalance>
    <us-gaap:ValuationAllowancesAndReservesChargedToCostAndExpense
      contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_AllowanceForCreditLossMember_SWG0SSmFeEqQkQieCJR1-A"
      decimals="-3"
      id="Tc_sur6OfyDxUSf0Urhv80L1g_18_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">140000</us-gaap:ValuationAllowancesAndReservesChargedToCostAndExpense>
    <us-gaap:ValuationAllowancesAndReservesDeductions
      contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_AllowanceForCreditLossMember_SWG0SSmFeEqQkQieCJR1-A"
      decimals="-3"
      id="Tc_rbGCjs1_8UC5y9bc4Uc2oQ_18_12"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">6000</us-gaap:ValuationAllowancesAndReservesDeductions>
    <us-gaap:ValuationAllowancesAndReservesBalance
      contextRef="As_Of_12_31_2020_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_AllowanceForCreditLossMember_QQ0VBL7qRE2YRwey-lG_eg"
      decimals="-3"
      id="Tc_DlvkkPx7ckiEWPmZa0ml4w_18_15"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">736000</us-gaap:ValuationAllowancesAndReservesBalance>
    <us-gaap:ValuationAllowancesAndReservesBalance
      contextRef="As_Of_12_31_2019_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_kWzc0bkOvES0Cb3erCEi_A"
      decimals="-3"
      id="Tc_2YzsuM2PakGU1o_KDy1r5A_19_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">130053000</us-gaap:ValuationAllowancesAndReservesBalance>
    <us-gaap:ValuationAllowancesAndReservesChargedToCostAndExpense
      contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_-SPpBK_xNkmb5q-qwksjxA"
      decimals="-3"
      id="Tc_CdKZmGtle0y3fSL5mrg5ow_19_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">513000</us-gaap:ValuationAllowancesAndReservesChargedToCostAndExpense>
    <us-gaap:ValuationAllowancesAndReservesDeductions
      contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_-SPpBK_xNkmb5q-qwksjxA"
      decimals="-3"
      id="Tc_dChJXKtseESMXMH34-PDjw_19_12"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">12123000</us-gaap:ValuationAllowancesAndReservesDeductions>
    <us-gaap:ValuationAllowancesAndReservesBalance
      contextRef="As_Of_12_31_2020_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_cKBh7RwrYkiyqOF1CpqALQ"
      decimals="-3"
      id="Tc_5ptQMRQb70m7q8Ww5OqZKg_19_15"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">118443000</us-gaap:ValuationAllowancesAndReservesBalance>
    <us-gaap:ValuationAllowancesAndReservesBalance
      contextRef="As_Of_12_31_2019_dyqJ8hTIuEW6V2L_RveF0A"
      decimals="-3"
      id="Tc_azTbXUP9BEyG5FydUsznMg_20_3"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">130655000</us-gaap:ValuationAllowancesAndReservesBalance>
    <us-gaap:ValuationAllowancesAndReservesChargedToCostAndExpense
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_uqvbdCavaU2iys2h6-7PUg_20_6"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">653000</us-gaap:ValuationAllowancesAndReservesChargedToCostAndExpense>
    <us-gaap:ValuationAllowancesAndReservesDeductions
      contextRef="Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA"
      decimals="-3"
      id="Tc_NHU0l6SgwkuS9TcloY0i6g_20_12"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">12129000</us-gaap:ValuationAllowancesAndReservesDeductions>
    <us-gaap:ValuationAllowancesAndReservesBalance
      contextRef="As_Of_12_31_2020_JUGLvBeldEeSTj1WqQBVdQ"
      decimals="-3"
      id="Tc_tcSv2-is7kCApAYRTwHn-g_20_15"
      unitRef="Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA">119179000</us-gaap:ValuationAllowancesAndReservesBalance>
</xbrl>
</XML>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EXCEL
<SEQUENCE>121
<FILENAME>Financial_Report.xlsx
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
begin 644 Financial_Report.xlsx
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M?!^2!F.,6_0T7X\48JVFL:W&VC$,>8!8\PRA9CC?AT6:&C/5BZPYC0IO0=5
MY3_;U UH]@TT')$%7C&9MC:CY$X*/-S^[PVPPL2.X>V+OP%02P,$%     @
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M\K'J=0N.O 7_K?YBK6G1HQ8P6P:J0[DTXG/3?H-UE[Y7#+VZ]"_I+;N4M_.
M]O()^^537_I-_-R588N>,$WA4 DZ83"V*MX!T_($C]1&KZ&P7T.=5KR/C"U[
M2$2@M3;9L"@@H47&AKG(S$[V(DHFMO6>CM1-^U"IYOM]=[?;-WI?[Y8,[M^A
MFZS9_>G=-)M1'ZC8YI4$!=MHEW :Z\(2S?Y.<Z'XOM[Q6'*E>%F?[AA=,V$
M^O\-Y^KEPCR@VV5;_ M02P,$%     @ ?8!65JA:AUB] P  ? X  !@   !X
M;"]W;W)K<VAE971S+W-H965T-2YX;6RM5VUOVS80_BN$5@PI4$?OLIW9!A)K
M10NL0] TVV=&.EMJ*=(E*3OMKQ])*8HMT:XQ^(LERO<\O.=X/!YG.\:_B0)
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MM%A%DR-"@U>AP1E";1*M>@+;<1Y.QGU%0[L@3L9Q7]+0;#2)PFE/E+O7EE?
MU^9Z(Y33-95-.]M][:Y0M^;BT/M^IZ]6IMU_I6GN99\P7^M3BL!*47K78^43
M;ZXZS4"RC6G^GYA45PGS6JCK(7!MH/Y?,29?!GJ"[L*Y^ ]02P,$%     @
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MI<67V[XN\U?N,-(O\Q91=RNWES58N:0Q-J>R(>OURWG6<IBB*+KP&&E#R^9
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M0FD1E!:W-SWMNK6>K5/T_[*.%6VZ1XC<?(L#-5)!:3:4YD!I+I3F06D^E!9
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MTWGN;=V%DQX:P?=]8_D$^[SL?B<O?2!.&B!_H@'N&V"] 9UH0/H&Y*T-:-^
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M?=^G^@P$[(A+_*D,-"(=LC/=G4PVI>#UQ&X*F=BU) $.0UT'8(=I>+)H]CH
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MF3V!X#, 9'7\7 *U #0=33H#ABCM=@E#+\\7Q9NA0]!13-&[!_NU*!%QYFO
M7U-<SHH?!D#P)5/?.R UG.J"/U9QMO//FNU*9KO*9[N</@N8T4_,:7SQH^D
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MH+Y^ L$/9D(FR<*SVI->@,?_1KK:B2U-FT*K RT;(+/.->'@015L:Q3+02?
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MU,MF/Q;%,98\4?^8H$UM2!%S%$W#/.[<K5825=PO2'X<T"C-ENJO^("ESXO
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MRI5ST[O@^.HL,\,S<@UM"Y_H1H3[C#_<C)97WV<VL8KUANMVL"K3#5Y%;4G
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M'&T8#TA2:2.+FADD*+AP__2QMD./8>;O80AKAM#*[2ZR4EY30R_.E%P1A=2
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MFVQ5X1XS0.,U">#WN4*;ZQ>:H+UNGOX-4$L#!!0    ( 'V 5E;1+$:+Q0<
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M]?!]=#%BI9#RV;V5=QAN-E>\PH J=%*E+(//H"TS8EEA/6?<:;! YG330.T
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M:(+^<4/H)X8)<+[2F(O;!2OH/LI=_@M02P,$%     @ ?8!65MY<M:E0!0
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M"E;"/5;FC"5A$(['_85)D.*>^<:-X<KMCL+,@FEX'#P-9NF,?:[ <"?4FDG
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M#,X"@V]G#U)\I[*)F*>)F$UGLP?HS:/ <Z8W_U\)[,@=C9,CG_G>[F2F7A_
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MKI/O;NAR9A015ZDK;HK0?D-@6"VB-_O7"L@!P**6@L[;3,L:8- VMYQZ.W7
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M09S:<.;TF/6..7)W/!>/X(K"LA?[LV?K0B0-U^Y<L^L4;!2%KAW\6A3&A3/
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M3,>1V-2R D7+&E#@8@M[9;*ZKQ2]R91.RZ:H=22*+-I(R2_D9S!:&MX<Q(-
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MRU%B-XDC\*P]*I+1Q%>\5.A=J"PB)=S# 7 Z'O0@@#E G99UG8,<>:\Z!(I
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MVG3^ =;W:8CNP=CG)A@HHM72\14"4HR [=M3B L=98 ])+GNVS\G),+Y,?&
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M 6;B*:I'@9RQ?N>BR?8*E!H["#F>HR*PM52X6HQ6H"A4KB/F,$ ,#PQ ?N$
M(&URX65SG1WQ$]K#H]D8 69.PV;_KQ!BY-$4]CLT-:6"MB("?C]7_W1;A+4-
M,"QU66D3]$$( !ZAQM)-PZ$/*\].;7?1@Y(Y<*@LJ!*$B348UI96C X,[XBR
MJFQ@DJVS$OH;J@ZV!4Q8J8U_316*+(*]T:%RJL"K)BP<MWG:C\ZMNPTX''69
M!<' 4;,NJXKM/XU"-;3R&9(G 7\Q@N FCI;\!VE=C9+O'G7[YYHV%K_\G'J!
M2'L;N1&IJ:9UHN#6]+C#M7AQ8P>13DTX$_]R\G+BW2E:$S_SNG"^U6$].][:
M8$)U6(</7"ZA ,)-P#=558Y>O[G;,!BVEIA(@2QQD[Z=SLF3!AP]:? )+FSU
MP>;QPH&R=@XQ<,RCKB8L/M:_)X<,&5N9VAIM"#BZ1>G:WR#/4!5[:F0TPW8H
M'#FQ1>L$B)BU-%?P1NKG"O1)8<%Y+O^,8W1YP]=HOF OO4LC(^:QUZKR[722
MKK>-%PG\35]^'IN4B1%,Y/$_9K1U9Z8C8LAV85"+X3P%XUY1[??VMY>=/SHB
MZ8WXR?F]-USW<7%>T2*Y;Q/LJ!]EW>'UTU8.S-;UEVW4_?N,,A@N;^FKH2;L
M2_@P3A93[X-GLZO.US>KD^-7-PM_1K**)Q E#W0R)--)/!^/6_)6J_&5]VT2
MSY/Q\=')(IZ.)]X$R..3U7+H"MT-F<SIMJ/'F$D\3E97 ^,G\6K9Q\;Q=5;Q
MZN:FO] *QD]GIV0%G%PLXIN0E5,@:QJP?S&+;V[&IV?-EO%D.@^F 5VSZ;)U
M9V5-]YH=$VK3,S\(QDCY/V$2WC_2>=0='VAYH-"8OSRF"N_0I?Q@^?$GPX\O
MI?U=2==*/?X^'U:Y^6SNO9O&B2>IRPA0OAJ?7K*K6/8O8&6Z.//3^7QV>I-C
M.@7++9=G?@K:- 8ML#[\JQG>C?="H]FSF8/\7RT\HE?3%D3).%XN%U^TQU&!
MS(?$L5C-^^*8W7S1SD>E-!Z2T7C5]XR3>#I?&0MQ5$"7Q!V/66!C;N+),O@
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M06[T<B<%' T'P/>;$CR">8,;N!\V?/TO4$L#!!0    ( 'V 5E82^S/[M 0
M -8,   9    >&PO=V]R:W-H965T<R]S:&5E=#$X+GAM;+U7;6_;-A#^*P>W
MZ!P@L?5B)T[L&$C2;@NPKD&3;I]IZ6P1H4B7I.)DOWYWE*W*<^*E'; OEH[B
M/7SNX?%XGJR,O7<%HH?'4FEWWBF\7Y[U^RXKL!2N9Y:HZ<O<V%)X,NVB[Y86
M11Z<2M5/HNBX7PJI.]-)&+NQTXFIO)(:;RRXJBR%?;I$95;GG;BS&?@L%X7G
M@?YTLA0+O$7_97ECR>HW*+DL43MI-%B<GW<NXK/+ <\/$_Z0N'*M=^!(9L;<
MLW&=GW<B)H0*,\\(@AX/>(5*,1#1^+K&[#1+LF/[?8/^<XB=8ID)AU=&_2ES
M7YQW1AW(<2XJY3^;U:^XCF?(>)E1+OS"JIZ;T(I9Y;PIU\YDEU+73_&XUJ'E
M,(I><$C6#DG@72\46+X77DPGUJS \FQ"XY<0:O F<E+SIMQZ2U\E^?GIK3?9
M?6%4CM;]!!^^5M(_3?J>D/E[/UNC7-8HR0LH<0(?C?:%@P\ZQWP;H$^4&E[)
MAM=ELA?Q/68]2.-#2*(DV8.7-G&F 2_]CW'6*(/G4?B$G+FER/"\0T? H7W
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MGPNN2T\HK /D:^P952F]0WH<@JBKVH;52H3*)F!>*04/0E7UR6&6JZ#&TKA
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M!X?7@OYXH.4)]'UNJ-=9&[Q \U=F^C=02P,$%     @ ?8!65A\F2/! #P
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MEC58AWZDI9-%E")=DJK3?[^C9,ERG#@IVB(;T"^22-T]]QSOH:B;;)3^9'(
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MMJ\ )\R32&I[HC#\K2S@)\"96E7$V:K>E/@CH$838++S6I5-=JNJ3O?TA$<
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M@9X#;/E8I @[I,&!L9:>' TM%]$)QHH&$Y%<)R_$8S^55P@6:S] A0DP&X6
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MJU_GNZ&(ZEJD=%X_&3CUFY =<7+D07K''NL9B3/(>B%1WR?C7EU:0J]> ,]
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M8']\8/_%^XZ^K)B!.R7^Y*7=3(-Q0$JH6"OL![7]%?;^#!U?H83Q7[+=8^.
M%*VQJMX+HP4UE[L_^[*/PW\1H'L!ZNW>*?)6WC/+9A.MMD0[-+*Y@7?52Z-Q
M7+I#65J-NQSE[&S)UY)7O&#2DGE1J%9:+M?D00E><##DXB-;"3"7D\BB-B<3
M%7OFQ8Z9OL*<4/)>2;LQY&=90OF<($(S.UOIP=8%/<MX#\6 I$E(:$SI&;ZT
M\SWU?.FW^7[*Y1UA=IK0%="-:5@!TP KQ(#^#,'L[9LDCV_/F)MUYF;GV&=+
M+,BR%4!415CY-^8&%H<UQ"IRIZ1!JTMFH20+)I@L@"Q=4AC"9/D27C!1M(*Y
MLC".#=.:%QY8<M$Z#BX+50-I .MWPS2<BL5Y:S]N -6JQM<>ZI@O']VYQ5=Q
MCL5LL&B\&F(15RF!EX.+_0M#W>89WV[(VS=C&J>W/_R/J0?U"J.Q3[^DVYF_
MXN-A_S<F6[SMR#YMCY@O? Q4:S#\YO*Y@\0%E7 +]??S]'<EUU<6=(UWU\IV
MRS\12J_#+!WW5K(LI'G<AXS2,+\>H\\E=SXS01K&RRMTH6 -MSA_J2X)DR0/
MKWL!NQCFX3B.+WN0.(_#!"%8A&WM$A-/&F]6K$)['*]\G(1TG/;D:3C,XAX@
M'X>CK ?XCJE8-TP^.=YD=&N^H8Z07WNJ)V":@+L8CW*+_KBT_NN,U@[TB/OZ
ME=G+?S^4 M:L>,)WMKM)[WE5@0:7S^^^!@('-1Z$C\?_=W7A8\Y/TV/.IH-T
MV$OA=)#TI_& QFCFT6$](SG Z6"4'.FG@^OCQ0O'VR7@J;L_ZCW9->BU;TPP
MHUSH=J]WM]KU/O/=D_\5OFN<WC.]YIB  BH4C0>C84#TKAG93:QJ? .P4A;;
M"3_<8/\&V@%POU+*'B9.0=<1SOX%4$L#!!0    ( 'V 5E8-3!UO;00  '8.
M   9    >&PO=V]R:W-H965T<R]S:&5E=#(X+GAM;+U76V_;-A3^*X0Z% F@
M65=+=FH;:)(.RT.*H%FW9UHZMHA2I$I2=O+O=RC9LEK97K,M?9'$(Y[+=V[D
MF6VE^J(+ $.>2B[TW"F,J:X\3V<%E%2/9 4"_ZRD*JG!I5I[NE) \X:IY%[H
M^XE74B:<Q:RA/:C%3-:&,P$/BNBZ+*EZO@8NMW,G</:$3VQ=&$OP%K.*KN$1
MS.?J0>'*ZZ3DK 2AF11$P6KNO ^NKF.[O]GP)X.M[GT3BV0IY1>[N,OGCF\-
M @Z9L1(HOC9P YQ;06C&UYU,IU-I&?O?>^F_-=@1RY)JN)'\+Y:;8NY,')+#
MBM;<?)+;WV&'9VSE99+KYDFV[=XD<DA6:R/+'3-:4#+1ONG3S@\]AHE_@B'<
M,82-W:VBQLI;:NABIN26*+L;I=F/!FK#C<8Q88/R:!3^9<AG%G<BDR60!U#D
M1I8E^NFQH K(Q1]TR4%?SCR#6NQ>+]M)O&XEAB<D!B&YE\(4FGP0.>3?"O#0
MO,[&<&_C=7A6XBUD(Q(%+@G],#PC+^HP1XV\Z&68CT%M!<7'!=F"N=(5S6#N
M8$5H4!MP%F_?!(G_[HR9<6=F?$[ZXA$+,*\Y$+DB:'!5&VH36=LU)B++"!4Y
MR1FO#>2$M: J!*5/H3FO[^V;2>A'[\C/?F-U$5, >0:J"-B<(1AQ*)<(Q49]
MO\]&WSX"^_!/BKM@ L7)6J-WM$O@*8/*'/Q":"EK8?0E^5B7H*B1ZNI_A_01
MN^DN(-__^H4$2>).X[!'"1/7CR8]PL7$C:;!);D3!C"Q#*+ +JS1>*UEQJ@-
M^):9 O-";$ 9AK5*A#2@3YH4^.XD"H_^#L+C2"R]AX1N*..V*Q C;4+:PFE<
M6DB>@QJJ1JAIZJ9I_"-07RN[;D%([)NO$^?KI@RW3>O'D%",!9YDK5>P3FNC
M#68A$^L!9SQUIW[27_II=%BB4Y*0?%BM\/"R]5YA;(5AE//GMN+Q*&O5_&K/
M)%2]I2H?AB"-X@$M</WI\?*Q ;_=2X=.^3\G61"[TR3MEI$;3_SCDFWB_@MW
M)6,W\0\*QI&;Q -WO58*]6K MI%^ZK]62@U+*1I%X][2'XVCWO+"'P7I9>?B
M(7LX2H-OV./ID/VU'/@9\T=;NRJ*:92Q"@\R#/(N[MBA>6V[_DK)<G>R_4B.
M:(P)-">'AJQ6S#SO&Y%M\YBH1"XY6S?-$CO6JL;3DDNMSS3)4]TP&5#P +KI
MY0&!KS7;4(Y%^CT@:V#^@M0_P$(%%17/-O=JI2P7$9B*%D-S].,>IO9UNI4U
MS\D2VS3VB:Y%O!3H*?HT3LG#R1YT#G)&>59SVE[!]7^Q>1*,![1X/ S--(S(
M/7UB95T>^N;>4$P$U,>TKJVQ>//08 P''#.:5F<M'[:[GX'NE.<G;AP& VJ
MY^HX.G;)]'JS -YOULW$HQ$47GK:L:"C=D/5^W:6.&QO)[)[JM8,[YL<5LCJ
MC]*Q0U0[Y;0+(ZMFLEA*@W-*\UG@8 C*;L#_*XGNVRVL@F[47/P-4$L#!!0
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M!<-\/N9J"Q0>!S(%<ZXJFL+4PHI0(#=@S5Z^\&+WX@3-L*<9GD*?+;  L[H
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MP.%YSW[C<[>YK*B&*\F?66FJ19 %J(0U;;EYD-MOL,MGXO@*R;5?T;:+)6F
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M5@]O; ?1F%S4K1N#4D)1^T/E;*U:OG@4'%CEA;$=QM$A/8CLT.NA>[8;N6^
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MW-_[M<%5U%LI10W*"JV(@>TBN(FO5U-_OCWP1<#!#KZ)9[+1^IM?O"\7 ?6
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MNWC]N<*?'Y"& ?<7 N.V6Q@%[>_4]&]02P,$%     @ ?8!65N\KB7L6 P
MR0@  !D   !X;"]W;W)K<VAE971S+W-H965T,S<N>&ULO59M3]LP$/XK5IA8
M)C'R7@JTE5I@&](0B,+VV4VN381C%]NAL%^_L]-FJ5HJX,.^)'[.=X^?<WR^
M]!9"/J@<0)/GDG'5=W*MYR>>I](<2JH.Q1PXSDR%+*E&*&>>FDN@F0TJF1?Z
M?L<K:<&=0<_:;N2@)RK-"@XWDJBJ+*E\&0$3B[X3."O#;3'+M3%X@]Z<SF ,
M^GY^(Q%Y#4M6E,!5(3B1,.T[P^!D%!M_Z_"K@(5JC8G)9"+$@P&76=_QC2!@
MD&K#0/'U!&? F"%"&8]+3J=9T@2VQROV;S9WS&5"%9P)]KO(=-YWN@[)8$HK
MIF_%X@<L\TD,7RJ8LD^RJ'V/T#FME!;E,A@5E 6OW_1YN0^M@*[_2D"X# BM
M[GHAJ_*<:CKH2;$@TG@CFQG85&TTBBNX^2AC+7&VP#@]&&N1/N2"92#59W+Q
M6!7ZA;AW=,) ?>EY&I<PCEZZI!O5=.$K=$%(K@37N2(7/(-LG<!#;8W <"5P
M%.YD/(?TD$3! 0G],-S!%S4)1Y8O>D?"V_*L6>+M+*943M2<IM!WL!84R"=P
M!OM[0<<_W:$Q;C3&N]@'8RR]K&) Q)3H'$B:4SX#10INX80RRE/$. TTS4DJ
MRKG@P+6Q#*_/+@\(!PLT?=Z6W.[E]_>ZH1^=DO_]ON=XK;#B#V0?IOB.UY B
M[D^A%)[?-X=A@6/Y\@;C=3%\H@4S9?!FDK-*2N#I2V/ *Y.,Z1L8[B3EBE%[
M38TAK62A"_R\=T)3MN'LVE,@*D5YABF.ZL- OA*L%"@G()?5$APW(9](<-#M
M!"T<1>N3QS&YQJ,E[5&2D)M;]PGPP"$&XC+<S\W=3#:U)=&FFQMW=\@,_8T
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MUPB(("6W@#4;0 [5XQXY44)ZH[Z3A'U)B#/W//0(>)&5*P>M6,D$S1VS!EU
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M@'EJP7/C>V%,*2KW.F[4@I ]G4B6^F,2[D$!4N,0"&+LO^UY$16'\GGA?1J
MRKUV'T!:Y-KJ_BO!,#M\8WG;?UH8'^\_T/S(-0"V!59<P5)RGD0SI/N/'OW
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M8_MOT)W'&)BP4IA?M._6.A9*&B%9U<'*@HK0]HL?.C\< 4IG&/ ZP'L.3$X
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M.E>?U %X6V2U'<EJ4Q1LF50EAFD6JBX%KA>H^8PQ>>CH#?I*-_P'4$L#!!0
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MYK,/D&=Y#HJP>\J1LJFCL_SH+(^D\_]S]IS*D?#C\X1A/!:^%Q*7"?>_1W?
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MJ-UM]E.IYO9H!D96O@&OI+'MW#]N[(6+RA78]X649C]P"W17>/H;4$L#!!0
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M    >&PO=V]R:W-H965T<R]S:&5E=#0Y+GAM;+V<_V^C-AC&_Q4KFZ8[J4G
M)"3IVDAMP=JFG59=K]O/+C@)&U\R(.V=M#]^YDL#)L17=,_V2TN(W\]K_!@;
M'ARN7I+TKVPG1$X^1V&<78]V>;Z_G$XS;R<BGDV2O8CE-YLDC7@N/Z;;:;9/
M!??+H"B<4L.PIQ$/XM'ZJMQWGZZODD,>!K&X3TEVB"*>?KD58?)R/3)'KSL^
M!MM=7NR8KJ_V?"L>1/ZXOT_EI^F1X@>1B+,@B4DJ-M>C&_.268LBH"SQ>R!>
MLM8V*0[E*4G^*C[\[%^/C*)&(A1>7B"X_/<L[D08%B19C[]KZ.B8LPAL;[_2
M67GP\F">>";NDO"/P,]WUZ/EB/ABPP]A_C%Y^4G4!S0O>%X29N5?\E*7-4;$
M.V1Y$M7!L@91$%?_^>>Z(5H!B^69 %H'T$Z :9\)L.H JQLP.Q,PJP-F;PV8
MUP'SMP;8=8!=MGW56&5+.SSGZZLT>2%I45K2BHU2KC):-G 0%SWK(4_EMX&,
MR]</P38.-H''XYS<>%YRB/,@WI+[) R\0&1D3#X*3\1Y^(7<^,D^%WZ[V$/.
M8Y^G?D;>.2+G09B]EQ&/#PYY]_U[\CV9DFS'4XD)8O(8!WEV(7?*[4^[Y)#)
MT.QJFLN#**HR]>H*WU45IF<J;%+R(8GS74;<V!>^"IC*HS\V 7UM@ENJ)?["
MXPDQS M"#4K[*J0/=X0W(=;Y<.?MX69/N/OV<*,GG.G#;_;I\=@-35M:Q^YD
ME3SK#.^6ASSV!'DH1\7B6Q+D(KKLJ=EM19KUDXH1]3+;<T]<C^20F8GT68S6
M/WQGVL:/?1HA80X2YB)A# 13M)T=M9WIZ.M?DW@[SD4:R9'[*>]35!L_5-$*
M-B]AQ?SXO*;SV6PESY'GME8]Q>AJ9BW58BZR:@P$4U28'U68:U6X\?V@F)-Y
M2/8\\,=R-/7X/LAYV*>(EC54D0IFMYK:-!9+<VET).DI9YKVBG:D<Y&58R"8
MHHE]U,36:^)YA^@0\F)VE%<U<N;L/3VTD*%BV"?]?CPWI!;=\Z.GG+TTZ=+J
MB(&L' /!%#$61S$6VBGHY]A+(D'V(B5R(Y)7K^4U2.\4M$ J@H0Y2)B+A#$0
M3-%V>=1VJ3W1;GD6>/("LE=A\DZ.A7X2ACS-RB_+O>_[=-=F&:I[!5NTSC!K
M8LT[I^%I(6,R[YZ#IX7&QL1<J*48J/** *NC "NM $X0'HI13O TEC< K78>
MT/K:%$-;OX*91OL"8++HCH*KGN:?K3K-?UJHK_E!M5>:WS2:VS5#/]4\/,IK
M=7,U-ND%>0BB?1ALOA2W8OE.M._,-DE*ZI'P$_\L^FZT;O6IA@H!I3E0F@NE
M,11-[0*M.W93.\&U5+[;\7A[1EP3*BZ2YD!I+I3&4#157-J(2[7G=Z5HX9&T
MW9A43GG!/A07_>;+X]Z7UYX7KPY-;W?0IAW<'9 T!TISH33V%;GR]"!TNC>^
MB:F]=:_'=6J,#?N2.&?NK_6,P2)"/1,HS872&(JF:MOX)N8,,6!#W1,HS8'2
M7"B-H6BJN(T=8^K]F/]LP-:G/1UX:MV1IHH#I;E0&D/15-T;R\?4>S[?I/NG
ME,=9:>.1W_;E/[=XU':F)^@K<LC&6\[WETW"8[XJG;Q=L UZ5SE4P;-P-QN9
MZUZD0>+_MBF[H*S!!Q$]B;2W2R&M(0=*<Z$TAJ*I7:HQKDRM=W)Z#4#^(8UL
MI-+M@E3*D61#7K4K!I(_#UD>B;C_N@'J<T%I#I3F0FD,15/[0V-VF4O8PS03
M:FE!:0Z4YD)I#$53)6[L-%/OIWW]F9H>,%A8),VI:>V'"[,9M3O/@UQH4H:B
MJ6L%&@..?L6 &_3\30\;JAZ4YM2T]G.Z\=Q>&EWYH%D9BJ;*UYAG5.O?O/51
MG9XR6#>H>U;3E.>K=#X[D0UJBZ%HJFR-+4;U/LLW7QI)N>OIM%=NJ#L&I3E0
MF@NE,11-[16-:49QJXTHU#N#TAPHS872&(JF2MQX9_1;%QWI 8.%A?IF-:T]
M5-.%9:^ZJY.@61F*IDK6.&(4N4))#QLL']3^HGTKGFS#/%G)!$W+4#15O\;9
MHI#53'K*8.&@)A/M6_5D+Q>S[HH+:%J&HJG"-?X1Q:U\HE!+"$ISH#072F,H
MFBIQ8PG1_V<!E#[-8/F7IXMP>M9 09.Z4!I#T51=&Q^(_@_KJO0Y!HOZMI55
MT*0NE,90-/6G$(U59.FMHL?8EWJ%8LN]+X0?'\_T2:<G#?XQ!-0G@M)<*(VA
M:*K"C9MDZ9=B#9EQ+:BE!*4Y4)H+I3$4396X<9XLO?.$FG'U:0;+3_MF7+,[
MXT*3NE :0]%475L_5-,ON(+,N/H<@T6U^F;<DU\\09.Z4!I#T511&[?(TKM%
M3K#9B%04GN"3R%^$B FOC>#2%&Y<9,)C_W1J)O^0-RW$TU=CL.Y0SPE*<Z$T
MAJ*IW:-QIJPY;KJ&^E)0F@.EN5 :0]%4B1OSRM*;5[#I&NINU31E9#<FM#NP
M0Y=&06D,15-E;:PM2[\T"C-;0SVOFM;YN=")IE O"TIC*%JEZ;3U$HI(I-OR
M=2$9*:?6ZF4,Q[W'5Y+<E"_BZ.R_,R_=ZL4B#:9ZS\D'GFZ#.)/S]D8BC<E"
MCC5I]>J0ZD.>[,M773PE>9Y$Y>9.<'D77A20WV^2)'_]4"0XOL!E_2]02P,$
M%     @ ?8!65B!O? -#!   R!   !D   !X;"]W;W)K<VAE971S+W-H965T
M-3 N>&ULK5AM<^(V$/XK&C?3268N^!4;4F#FB*_3?+B;S*5I/RNVP)JS)2H)
MR/W[KF1CC&U<FB$?@B7O/NSS:+5:,=MS\4-FA"CT7N1,SJU,J<V#;<LD(P66
M([XA#-ZLN"BP@J%8VW(C"$Z-4Y';GN.$=H$ILQ8S,_<L%C.^53EEY%D@N2T*
M+'XN2<[W<\NU#A/?Z3I3>L)>S#9X35Z(>MT\"QC9-4I*"\(DY0P)LII;G]V'
MV VT@['XBY*];#PC3>6-\Q]Z\)3.+4='1'*2* V!X6-''DF>:R2(XY\*U*J_
M4SLVGP_HOQOR0.8-2_+(\[]IJK*Y-;%02E9XFZOO?/\'J0B--5["<VG^HWUE
MZU@HV4K%B\H9(B@H*S_Q>R5$P\$-SSAXE8/7=@C../B5@W^I0U Y&*GMDHK1
M(<8*+V:"[Y'0UH"F'XR8QAOH4Z;7_44)>$O!3RV>6,(+@IZ)0(^\*& E7C(L
M"+I'2RQI@C!+44SSK2(INHV)PC27=_#V]25&MS=WZ ;92&H/B2A#KXPJ^:DQ
M\6?&MQ(P8/+F9#RS%42O8["3*M)E&:EW)E+70U\Y4YE$7UA*TE, &VC7W+T#
M]Z4WB!B39(1\]Q/R',_K">CQ<G>WQSV^W-T98./7*^D;//\,WK=M00167#ST
M:5OZ!OV^NK@\R U.R-R"ZB&)V!%K\>LO;NC\UJ?+-<'B*X&=:!;4F@5#Z(MO
M4%BIV0%]FI6^8^.KZ^=NX8;A-(!4V375Z)IYH>-/3JWBKM7]Q)^ZM=5)_.,Z
M_O%@_$],$5!%(?(.!X$D"$O)$XKU;MU3E:&$LQT1BK[E!#&N2.^^*[\C;/)T
M)GZ;YF D_W?1KP1V(EI8BQ9>N.@([Z">82V.XJ"5J7^F>&4\3XGH52OL9D4$
M?T%+KJY97U9TK0:R(JH)1H.5(":,PU%QMA9$UZP%UP2+KP1VHMJD5FTRF!;E
M>;<WC0)L'PS[!AJ?PUD&+9-4<'!1MNZ3=-+90L%TZH2MG.BS<B*_E1,]5A,_
M]/IS8EJSFPZR^[):0:>%^ IMH PP17&>_T2I/MFA[RI9WNL&"ICOL>@_H*>=
MR"*_G?==&]>9.BV*@[%^<)U=Y]CR.(-:Q ?6I!;EHCI9P9YP"Z9AU%*@Q\P/
M)FT)AF/\J :-ML_];PWT*?&Q?*_0FQS#<>ATI.B:C?TP:&=\C]E RKO>D:0W
MW!(=*_UMSB4TKAOH<YMUOK<^5JA7*I!718NOA7:JZ+''= ?;L:I(WD(GG_(\
MQT(:18V4=[U2EG!1<R^,_'$[3;I6SFC<R9*NU;TS<J,S67+L =WA)K"^WES.
M*NA$XHTBM\VJ:^6,@FF;5=>JCY7=N.)!G[\V5V4)N;QEJKSQU+/U=?RSN82V
MYI?ZFFZNCD>8\H[_%8LU91+E9 60SBB"MD24U^9RH/C&7"3?N()KJ7G,"(8^
M21O ^Q6'RED-]!?4/UXL_@502P,$%     @ ?8!65AG",F[L P  AA(  !D
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M&M"H'=!&)B74*7NYTM:.@68O:F>O >N1R4-DQOPN3P!BF'BSOI&KL8G:L>F
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MY#;/U$J2C]E<S&W 4 ?61$>?H[NF()&)V7OBN1>$.I1V#.CF='>WPYV=[NX
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M=#4X+GAM;+U9VW+;-A3\%0R;Z20SB4F =U?2C"TW:1[2>&RG?89)6.*8)%0
MLN)^?<&+>2=D271?)%X.EKM'Q'(IS':4/?(U(0+\3.*4S[6U$)MS7>?!FB28
MG]$-2>69!\H2+.0N6^E\PP@.\T%)K"/#</0$1ZFVF.7'KMEB1K<BCE)RS0#?
M)@EFSY<DIKNY!K67 S?1:BVR _IBML$K<DO$C\TUDWMZA1)&"4EY1%/ R,-<
MNX#G2^1G _**OR*RXXUMD$FYI_0QV_D:SC4C8T1B$H@, LNO)[(D<9PA21[_
ME*!:=<UL8'/[!?US+EZ*N<><+&G\=Q2*]5SS-!"2![R-Q0W=_4%*07:&%]"8
MYY]@5]8:&@BV7-"D'"P9)%%:?..?92,: Y ],@"5 U!G +1&!ICE #,76C#+
M95UA@1<S1G> 9=42+=O(>Y./EFJB-/L9;P639R,Y3BR^4!KNHC@&. W!UU3@
M=!7=QP1<<$X$!Y\&CKV_(@)',?\@S_ZXO0+OWWT [T"4@KLUW7*)PV>ZD-2R
M"^A!2>.RH(%&:$ $OM%4K#GX/0U)V ;0I:9*&'H1=HF4B%<D. ,F_ B0@=
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M\3G7\4V\5OK9% #(-J6LS,0K$.M+WS=9 24W U5#12MSI4N.--4+W]0:>.Y
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M=(!$HIMVV$Q0U:ZCI JI/[EA07\0T#:!UN=*X>O$-JGNGY3\!5!+ P04
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MX,#Z!32_,P8O'5]T_9-9_@502P,$%     @ ?8!65CF_&;?4 P  8A   !D
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MR/U7;7+,DP.@.GU_PVQ'<B[1M]*]=1W*-63U@;:^$;2HSH0;*N0)L[K< TZ
MJ0'R^RVEXNE&'3/;GQ6B_P!02P,$%     @ ?8!65E'DHEL4 P  % H  !D
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M-% >;CA+N+0/F/LK(?3AQ#;0[ .:_0=02P,$%     @ ?8!65M%60JNC @
MA D  !D   !X;"]W;W)K<VAE971S+W-H965T-S$N>&ULM99;;]L@%,>_"O*D
M:9.V^I);VR66FG2WAVI5NLLSP2<V*A</2-U*^_ #[-!,2ERI:UYL;N=_?G"
MP[21ZE97  ;=<R;T+*J,J<_C6),*.-8GL@9A>]92<6QL596QKA7@PAMQ%F=)
M,HXYIB+*I[[M6N53N3&,"KA62&\XQ^IA#DPVLRB-M@U+6E;&-<3YM,8EW(#Y
M45\K6XN#2D$Y"$VE0 K6L^@B/9^GWL"/^$FAT3MEY*:RDO+65;X6LRAQ1,"
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M:E-^6S&R]FEV)8U-VKY8V6<2*#? ]J^E--N*<Q >7OE?4$L#!!0    ( 'V
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M6^VP%\*RP&D%QCO@^4YK=S1\0_3S+_T#4$L#!!0    ( 'V 5E;<U06P= (
M #0&   9    >&PO=V]R:W-H965T<R]S:&5E=#<T+GAM;+65;T_;,!#&OXJ5
MH0FDK?G3TA661EI;C>T%4@5B>VV2:V/AV)E]:>';[^R$K+!0[<WZHK'CN\>_
MYYQ<TKTV#[8$0/98267G08E87X:AS4NHN!WI&A2M;+2I.-+4;$-;&^"%3ZID
MF$31-*RX4$&6^GMKDZ6Z02D4K VS355Q\[0 J??S( Z>;]R(;8GN1IBE-=_"
M+>!=O38T"WN50E2@K-"*&=C,@R_QY6+JXGW #P%[>S!FSLF]U@]N\KV8!Y$#
M @DY.@5.EQTL04HG1!B_.LV@W](E'HZ?U;]Z[^3EGEM8:OE3%%C.@UG "MCP
M1N*-WG^#SL^YT\NUM/Z?[;O8*&!Y8U%773(15$*U5_[8U>$@(4G>2$BZA,1S
MMQMYRA5'GJ5&[YEQT:3F!MZJSR8XH=RAW**A54%YF"UU50FD*J-E7!5LJ14*
MM065"[#L(ULW)B_)-7L=N.#J@5TUW'"%0*&G*T NI#UC)TPH=BVDI*K;-$2B
M='N%>4>T:(F2-XA6D(_8./[ DBA)V-WMBIV>G+V4"<ED[S3IG29>=_R&;N\D
M_^-DB*Y5F0RKN'?DTM8\AWE +X$%LX,@>_\NGD:?CS".>\;Q,?5!1E8T0 \%
MEE15K8 ] 3=#W*WRS"N[5W&7);.+49*&NP&@20\T.5HT?\K;_I2']IW\AWJ=
M]WCG1^OU"L\_F!(0P5BF-RPW4 ADU(LLTA(]UT,&VBWB^*!RLU%\\>(W7,5I
MCSD]BGFG&@L%=8]_H!TBG/YUM/%D%+]B"@^:@.NGU]QLA;*TPX;2HM$G\FG:
M'M5.4->^+]QKI"[CAR6U=3 N@-8W6N/SQ+6:_D.1_0902P,$%     @ ?8!6
M5M2/ :X5"   _%$  !D   !X;"]W;W)K<VAE971S+W-H965T-S4N>&ULQ9QM
M;]LX%H7_"N$=+%I@&HN4;=G=Q$ ;O7$QG2G:Z>QGU6)BH;;DD>0D!>;'+R6K
MEBG1C)4YP'R))9OWN91]PK<C\?HQR[\5:R%*\K3=I,7-:%V6N[?C<;%:BVU4
M7&4[D<I/[K)\&Y7R-+\?%[M<1'$=M-V,F67-QMLH24?+Z_J]C_GR.MN7FR05
M'W-2[+?;*/_^7FRRQYL1'?UXXU-RORZK-\;+ZUUT+SZ+\LON8R[/QD=*G&Q%
M6B192G)Q=S-Z1]]RNPZH2_R1B,?BY)A4E_(UR[Y5)SR^&5E5C<1&K,H*$<F7
M!W$K-IN*).OQ9P,='7-6@:?'/^A^??'R8KY&A;C--O]+XG)],YJ/2"SNHOVF
M_)0]AJ*YH&G%6V6;HOY+'INRUHBL]D69;9M@68-MDAY>HZ?FBS@)H),S :P)
M8)<&V$V W0VPSP1,FH#)I1FF3<"T&S [$S!K F:79G": .?2@'D3,+\T8-$$
M+&HY''Z_^L=WHS):7N?9(\FKTI)6'=0*JJ/E;YZDE=@_E[G\-)%QY=(57TOR
MAC"+V5?5WRF)TK@Z<,BO62D*\LH5991LBM>RU)?/+GGUTVOR$TE2\OLZVQ>R
M<'$]+F5%*MQXU23U#TG9F:24D0]96JX+XJ6QB%7 6%[!\3+8C\MXSXS$7[.'
M*V)-?ZYJ3C45NKT@G-(ZW-*$N^;P#]%W0N=GHSUS]'^C5":WJG#JZ+Y,<[@K
M5E?$IF<O/;@\7%?Y\/)PI@GGEWSQCBZ[H@/[*&>[YMD&.6MJ\?X0-=%'51W*
MVV(7K<3-2/88A<@?Q&CY[W_1F?4?G9:0,!<)\Y P'PD+D+ 0">,@F"+7R5&N
M$Q-]^3%/TE6RBS8DVF;[5"M=(V&H=)$P%PGSD##_ )O6L&JX][!DCC-S[.OQ
MPZDHD3G#RW)R4$Y%;M.CW*;/R"U;"1$7/Y-4#J.S.Y(4Q3Y*5X*LLJ+4=>3O
MC<"AZD/"7"3,0\)\)"R8]F1%Y41F,55E%2)S<A!,T>CLJ-&94:.W4;$FNRB)
MB9S)R>G4;I^OUG(V4\DUK4:D.I4:D4-5BH2Y2)B'A/D'V.Q46'0ZLR:=-K)?
M;$[9Q.K(#UDS#H(I\G..\G.,\OLE*PHB)^'BJ4S2^WU2K.7,OFXKXS-#2R-O
MJ/:0,!<)\Y PW^F)ZLW$8HN.]#2EG/F$=J2'K!@'P13IS8_2FYM[YY.6;A7M
M=B*6+YN-ML$SDH:*#@ESY_W^RK*M3GOA(5/Z2%@P[S>+EDT[H[@0F9*#8(KH
M%D?1+8RB^R3B_6'94:HNBN.D.I;SD:H'?I.DE1"34IY7G7&_311_[I/RNQP]
M;G=9VKQ7==(G_78\%D_R(+WOKO,<A&RLW5 A(V$N$N8A8?ZB)]&9->_\AP6+
M_O_AQ*&=WCU$UHN#8(J.J=4N9%I&)5=+F(<U2YW.S,%#A0:EN5":!Z7Y4%H
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MY5J*I<R*+YC/'Y2I3.N-(L'N$4FS_P!02P,$%     @ ?8!65G-L@IRX!
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M5<'+'=CR1+)=L2>Y9%*RM#C<4K*F/#=0]S=,"8OJ) ]0[X//_P=02P,$%
M  @ ?8!65NO;S%1% @  %@4  !D   !X;"]W;W)K<VAE971S+W-H965T-SDN
M>&UL?9113]LP$,>_RLE#$TBL3M-2$$LC4:II>T!"=&S/;G)-+)PXL]T6)#[\
MSDX:NJGM2^RS[_[W.SOG9*O-BRT1';Q6JK935CK7W')NLQ(K80>ZP9IV5MI4
MPI%I"FX;@R(/097B<11->"5DS=(DK#V:--%KIV2-CP;LNJJ$>9NATMLI&[+=
MPI,L2N<7>)HTHL %NN?FT9#%>Y5<5EA;J6LPN)JRN^'M;.S]@\,OB5N[-P=?
MR5+K%V_\R*<L\D"H,'->0="PP7M4R@L1QI].D_4I?>#^?*?^+=1.M2R%Q7NM
M?LO<E5-VPR#'E5@K]Z2WW[&KY\KK95K9\(5MYQLQR-;6Z:H+)H)*UNTH7KMS
MV L8Q4<"XBX@#MQMHD Y%TZDB=%;,-Z;U/PDE!JB"4[6_E(6SM"NI#B7SG'I
MX O<BZ;!G :EX*<1M17AT"R<S]$)J>S%*:<SX&!+8=""K.&YELY>TB+-'Z12
MWB7ACF!]2IYU8+,6+#X"]B#>8#BZA#B*(WA>S.'\[&(OT;^"G*KN2X_[TN.0
M872B]$-<;=3X<)1ODEO;B RGC+K HMD@2S]_&DZBKR>81CW3Z)1Z>E<4!@OA
M$!HC,P2]@JP]]<R?NOLX=7B'LT/TK?Y-T/<=N4F'T6"4\,T!JG%/-3Y)11?_
MP>-*/,9$OPO=>:Z5$L9"@Z:]K O/>N3F6N@V_?4^],U@//F/FN_]YO[%>!"F
MD)14X8KBHL'U%0/3=F%K.-V$/W^I'?51F);T<*'Q#K2_TMKM#-],_5.8_@50
M2P,$%     @ ?8!65O ]QP71!0  +RP  !D   !X;"]W;W)K<VAE971S+W-H
M965T.# N>&ULM9IM;^(X$,>_BL6M3EUIKQ"'A[8'2(5<M2M=M56[O7MM$@.Y
M36+.=J"5[L.?\] 8D^ V=+HOMDG(_&/_\(QGR(QWC/\4:THE>HJC1$PZ:RDW
M5]VN\-<T)N*<;6BB/EDR'A.I3OFJ*S:<DB WBJ,N[O6&W9B$26<ZSJ_=\>F8
MI3(*$WK'D4CCF/#G&8W8;M)Q.B\7[L/56F87NM/QAJSH Y6/FSNNSKJ52A#&
M-!$A2Q"GRTGGVKGRW$%FD-_Q5TAW8N\895-9,/8S._D63#J];$0THK[,)(CZ
MLZ5S&D69DAK'OZ5HIWIF9KA__*)^DT]>369!!)VSZ.\PD.M)YZ*# KHD:23O
MV>XK+2>4#]!GD<C_1[OBWJ&ZV4^%9'%IK$80ATGQESR5(/8,G/X1 UP:X$.#
MX1$#MS1PW_J$?FG0S\D44\DY>$22Z9BS'>+9W4HM.\AAYM9J^F&2?>\/DJM/
M0V4GIQY=2/0;NJ=;%FW#9(7FG :A1#?$#Z-0/J,SCTH21N*SNNOQP4-GGSZC
M3RA,T(\U2P5) C'N2C603*[KEP^=%P_%1Q[J8'3+$KD6Z(\DH($IT%4SJ*:!
M7Z8QPU9%C_KGR!E^0;B'G:8!O<'<=7)SW&#NO=W<L<S&K;X4-]?K']$[^ X:
M!C2S"F3!XDILB$\G'14-!.5;VIG^^HLS[/W>! =2S ,2,\#U*W#]7-VUK.8F
M6GU(6I!B'I"806M0T1I8E]F,<661.;U/U$..K+1"8Y!K9+O(=NH,>NK?N+O=
MIV)]5%LJ0&(&E6%%96BEDD?$,!&2IVI_DTA2'C=QL:L,T#,EO#$V6@W;D@(2
M,TB-*E(CZQRO Q6EU.9-(L7+5UF'H-G&L*B6E4@7_ZC]'4F&?,K5-I(@GR6%
M41.:V:BVUD:#^E*SCJHM0" Q ^!%!?#""O![*H546VC&BL0L31J#EU6C;?"Z
MJ!$^H.O9[C!F>5G-\K+-;H;^0[=A$L9IHU=9I=I.%E+, Q(S$#H]G:;U3MK9
M2C,@8*!J'I2:B6POLW6LZ^XQ204-5,2)XU#FH7Q)*=I0[JMC5=.@,R(0>;GP
MN9%NF3SC?6\X[_7PX" DV8?2&AR0F@D.:W#8"NY;HO8\*J1"MZ4\(\6)"MF-
M@ JEX1X?]Q"-]6&MT0"IF6AT8NZTRLRS6$:>CL4RNU9KWP3-TJ'43(XZ3W=.
M2]0=T$P=5,V#4C.1Z63=L6?K$.%LT!S.W%HX \WFH=1,<#J?=^RI^ \F58::
M4(DB^FH\*Z2RG:LBU#^OX0%-X:'43#PZB7?L6?P#]5,5U=X*:%0'A.N 0%-T
M*#43D$[2'7N67H_YLZS248BH/9>UZ[8.9I!J'I2:R527!,[E:?$?-/\'5?.@
MU,P?.'4%@*WI\E0MNE"@XM=]Q)+\U^YB$;X>^$OI6N _]%O[$-H"@U(S@>G\
M']OS_U?\]GC>9M=MNPA!U3PH-9.I+@TP/LEO,622/P=5\Z#43&2Z9,#VDN%=
M?NLV^JU3JS_M8VA-[".* ZR+ VS-I!L<]^'[S7TC']!R 53-@U(S(>IR 0].
M\U3(U'X.JN9!J9G(=*& [87"3<08+UQ3^6EP\![@#=Y:R%\>_W%U;A]!:UX?
M43E@73E@>^70[*?VG-@NV7KY@=894&HF3EUGX(O3/!:TC !5\Z#43&2ZC,#V
M5POOVELOF_?6VM8*6D1 J9E]!;J(<.U%Q'&7/9X.VR5;]QJ EAA0:B9.76*X
MSDDNZX)6$*!J'I2:B4Q7$*[]Y<)[7+:4/G197$N'[6-H3>PC"@AWKQFHU3N'
M+^A/*B7EB"W+9JU&5+ -0K =0A]17KBZO'!/>_?@@A83H&H>E)J)3!<3+D2G
MD'ND5>C0.4%K!BBU@DQWKY,RIGR5=Z0*Y&>]&44W8G6UZGJ]SGL]#Z[/G2NO
MZ%W5,D4K[2WA*U56H(@NE63O?*0FP(ONU.)$LDW>K[E@4K(X/URK8$EY=H/Z
M?,F8?#G)'E#U"$__!U!+ P04    " !]@%967_5\":,$   B&   &0   'AL
M+W=O<FMS:&5E=',O<VAE970X,2YX;6R]66%OHS@0_2L6M[IKI6N)@9"TET1J
MP^Y=I5MMU6SO/KLP":A@9VTGV=ZO/QLH!'"RK43V2X/AS<-O!@\/=[)C_%G$
M !)]SU(JIE8LY?K:MD480T;$)5L#55>6C&=$JB%?V6+-@41Y4);:SF#@VQE)
MJ#6;Y.?N^6S"-C)-*-QS)#991OC++:1L-[6P]7KB(5G%4I^P9Y,U6<$"Y./Z
MGJN17;%$2094)(PB#LNI=8.O R</R!'_)+ 3>\=(2WEB[%D/[J*I-= S@A1"
MJ2F(^MG"'-)4,ZEY?"M)K>J>.G#_^)7]4RY>B7DB N8L_3>)9#RUQA:*8$DV
MJ7Q@N[^@%#34?"%+1?X7[0KL:&BA<",DR\I@-8,LH<4O^5XF8B\ ^P<"G#+
M:0=X!P+<,L!]:X!7!GAY9@HI>1X"(LELPMD.<8U6;/H@3V8>K>0G5-=](;FZ
MFJ@X.5M(%C['+(V B]_0QV^;1+Z@"W3S97Z''EBJGZP=X1$Z"T"2)!7GZN+C
M(D!G'\[1!Y10]#5F&T%H)":V5//1K'98WONVN+=SX-[809\9E;% 'VD$49/
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M!<),T-\7G*M=QRQ0/>.B/U!+ P04    " !]@%96YH92*9H#  "B#@  &0
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MUB3:+M9.%*_MO3[C2G<).RQTXP=A O3[.>=J/3$;]'\EDO]02P,$%     @
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M_=9/C?YL1W].9*:7EP)ZA3;,@WYF<QLO9(4S&#GZNDD0*W#2MV_\R/O0)_M
M9#M)"+LDA/O8TZ_ZXZ%O @@!.5)XC;"4H/HD-SQ#RV.^%ZMT& WBQ%UM2WEJ
M%)Z=^5%GM1/CH(MQL#?&F<(*D*XY?5 9IGW![25X[7D<B&Q'Z[#3.OQO13D\
M9!(.1+:3A*A+0O37HN1[$M$GOF&,MLOS//2\/^ISK]]_5!5WJN(#7;7XR2T:
M^$^D['7V6BGN5E<Q'?T+%@O")*(PU_3>::R#$4V7;":*5[;1W'.EVY8=%OK'
M H0QT/MSSM5F8GI7]ZN2_@)02P,$%     @ ?8!65G?C*963 @  D@@  !H
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M=V]R:W-H965T<R]S:&5E=#$P,BYX;6RM5UUOXS80_"N$>BCN@%[T85FV4]M
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MQ=AC>?,YGAE6.2-((9(E@JJ/)[B#-"U):A[_-E"C';-T/+T^T'^M@E?!K*B
M.Y;^D\1R.S," \6PIKM4/K#][] $Y):\B*6B^H_VC:UEH&@G),L:9S6#+,GK
M3_JM$>+$P;[D0!H'TG,@Y(*#W3C8+W5P&@>G4J8.I=(AI)+.IYSM$2^M%:V\
MJ,2LO%7X25ZN^U)R]6VB_.1\"1NUBA(]0,&X3/(-HGF,?@.VX;38)A'ZG->;
MJURD#^A@_BX$29-4O$=O4)*CO[9L)Y2CF)I23:I$FU$S@44] 7)A IB@+RR7
M6X%^R6.(NP!31=.&1 XA+<@H,83H!MGX9T0L0M#798C>O7F/1#WS@0G>O1R'
M#[@!3/ARC#6,Z41KMPMH5US[ O<!GB#?@<K!PP*NOB/(XP\JC1_5N5$NY^:X
MG!PV:B6'EJD>QAD>ICQ^;D5!(Y@9ZGP1P)_ F+_]"7O6QR%)=<)"3;".O$XK
MKS-&G_^QRU; $5LC==1R6@G<;"6!_AO958N:ZU7<\O1]FN.I^70JTNC(UXJD
M"=81R6U%<E\H4KT+Z2J%%ZKD/JO2Z-#7JJ0)UE'):U7RQE52V2AH"H.'9.WJ
MGNC@.1ZV_9X8YV9N8!._9Q:>FSFN@SV[->L$X+<!^*,!+"%+(I;'NT@R/A3$
MJ/NU1XA.6*@)UI$M:&4+7N>$#G3*JQ,6:H)UY)VT\DY^/*TF9\>+[4W47R^M
MSLV(XUMN[R@*S\VPYTZLR7!:8>M8@UFC(=RQK& [M0V>S;!QT+5[0"LMU$7K
MBGA2R.+72;-F'%T:ZZ2%NFA=C<E18_+CN=;X=M*#8#QQ>LDV9&=Y$Y_TLFW0
MSI\0<B'=CA4S'JT8Y^6+$EJJ#%,OMH.!:"V%M=)"7;2N=,=J&#NOE&0ZB]\[
MK;10%ZVK\;&8QL]4TZ-)=EXP![[KG.780%WM!;YG]7-LP([8) @NY-BQUL7C
MQ>XR2E3%GZS5)GA+L^(C^E-N8?@G;11T]4[020MUT;HB'NMM[+]2MFFMS+72
M0EVTKL;'XAR/%J?/9%MP_EH66+;5S[8!,\OI__"% V:N;YWD;AV">=+-RX!O
MJJZH0)&J$&7=!6N?MIW73U6_L?=\479DJR[A$5.W<[]0ODER@5)8*Z1UXZLY
M\;I#6M](5E0]PQ63DF75Y19H#+PT4-^O&9.'FW* MD\]_Q]02P,$%     @
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M9040]]>4\M>3Z@'=3MSB/U!+ P04    " !]@%96 E29KWX"   C!P  &@
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M>>NF)3>&595O@S-EJ:GZX9)N,=1N ZW/%8&WANNLW;V8_0)02P,$%     @
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MJ=X.H+=3O1U ;Z=Z.X#>3O5V +V=ZNT >GO5VP/T]JJW!^CM56\/T-LW#TL
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MV>'Z_9_+KXOM_?Z)=7^;,3[^!5!+ P04    " !]@%96H4#6(VT"  #_.P
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M+\]XJ+OQ-3]9_O=[\Q-02P$"% ,4    " !]@%96!T%-8H$   "Q    $
M            @ $     9&]C4')O<',O87!P+GAM;%!+ 0(4 Q0    ( 'V
M5E8X96Z][0   "L"   1              "  :\   !D;V-0<F]P<R]C;W)E
M+GAM;%!+ 0(4 Q0    ( 'V 5E:97)PC$ 8  )PG   3              "
M <L!  !X;"]T:&5M92]T:&5M93$N>&UL4$L! A0#%     @ ?8!65NT%P(E6
M!P  E#   !@              ("!# @  'AL+W=O<FMS:&5E=',O<VAE970Q
M+GAM;%!+ 0(4 Q0    ( 'V 5E;LMP_:V@8  )@=   8              "
M@9@/  !X;"]W;W)K<VAE971S+W-H965T,BYX;6Q02P$"% ,4    " !]@%96
M'"=-N]("  #X"0  &               @(&H%@  >&PO=V]R:W-H965T<R]S
M:&5E=#,N>&UL4$L! A0#%     @ ?8!65@%>_N7Y!0  <1L  !@
M     ("!L!D  'AL+W=O<FMS:&5E=',O<VAE970T+GAM;%!+ 0(4 Q0    (
M 'V 5E:H6H=8O0,  'P.   8              " @=\?  !X;"]W;W)K<VAE
M971S+W-H965T-2YX;6Q02P$"% ,4    " !]@%96OZ: GDP*  "P>   &
M            @('2(P  >&PO=V]R:W-H965T<R]S:&5E=#8N>&UL4$L! A0#
M%     @ ?8!65H+ 6.'E"0  =C$  !@              ("!5"X  'AL+W=O
M<FMS:&5E=',O<VAE970W+GAM;%!+ 0(4 Q0    ( 'V 5E;7  L.[B4  /][
M   8              " @6\X  !X;"]W;W)K<VAE971S+W-H965T."YX;6Q0
M2P$"% ,4    " !]@%96"1$)[E<&  !'%0  &               @(&37@
M>&PO=V]R:W-H965T<R]S:&5E=#DN>&UL4$L! A0#%     @ ?8!65O%BZ?U5
M!@  >A8  !D              ("!(&4  'AL+W=O<FMS:&5E=',O<VAE970Q
M,"YX;6Q02P$"% ,4    " !]@%96T2Q&B\4'   '&@  &0
M@(&L:P  >&PO=V]R:W-H965T<R]S:&5E=#$Q+GAM;%!+ 0(4 Q0    ( 'V
M5E:*H-C"Q (  (X&   9              " @:AS  !X;"]W;W)K<VAE971S
M+W-H965T,3(N>&UL4$L! A0#%     @ ?8!65D970-.* P  ,PD  !D
M         ("!HW8  'AL+W=O<FMS:&5E=',O<VAE970Q,RYX;6Q02P$"% ,4
M    " !]@%96_J-&,:\&  "@$P  &0              @(%D>@  >&PO=V]R
M:W-H965T<R]S:&5E=#$T+GAM;%!+ 0(4 Q0    ( 'V 5E;>7+6I4 4  /X-
M   9              " @4J!  !X;"]W;W)K<VAE971S+W-H965T,34N>&UL
M4$L! A0#%     @ ?8!65NHE2CJ,$   H#   !D              ("!T88
M 'AL+W=O<FMS:&5E=',O<VAE970Q-BYX;6Q02P$"% ,4    " !]@%96XRJ[
M#OD5  #D4   &0              @(&4EP  >&PO=V]R:W-H965T<R]S:&5E
M=#$W+GAM;%!+ 0(4 Q0    ( 'V 5E82^S/[M 0  -8,   9
M  " @<2M  !X;"]W;W)K<VAE971S+W-H965T,3@N>&UL4$L! A0#%     @
M?8!65A\F2/! #P  4#8  !D              ("!K[(  'AL+W=O<FMS:&5E
M=',O<VAE970Q.2YX;6Q02P$"% ,4    " !]@%966Y\M(:<#   ^"   &0
M            @($FP@  >&PO=V]R:W-H965T<R]S:&5E=#(P+GAM;%!+ 0(4
M Q0    ( 'V 5E9G?:,ER@,  %8(   9              " @03&  !X;"]W
M;W)K<VAE971S+W-H965T,C$N>&UL4$L! A0#%     @ ?8!65E-NH8O9"P
MU"4  !D              ("!!<H  'AL+W=O<FMS:&5E=',O<VAE970R,BYX
M;6Q02P$"% ,4    " !]@%96TY=_0G8%   (#P  &0              @($5
MU@  >&PO=V]R:W-H965T<R]S:&5E=#(S+GAM;%!+ 0(4 Q0    ( 'V 5E8Y
M)[2VQP(   @&   9              " @<+;  !X;"]W;W)K<VAE971S+W-H
M965T,C0N>&UL4$L! A0#%     @ ?8!65GTP^=UY P  8@X  !D
M     ("!P-X  'AL+W=O<FMS:&5E=',O<VAE970R-2YX;6Q02P$"% ,4
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M+GAM;%!+ 0(4 Q0    ( 'V 5E:!1,WXT@0  #T3   9              "
M@:45 0!X;"]W;W)K<VAE971S+W-H965T,S N>&UL4$L! A0#%     @ ?8!6
M5L7;_]=Q @  V 4  !D              ("!KAH! 'AL+W=O<FMS:&5E=',O
M<VAE970S,2YX;6Q02P$"% ,4    " !]@%96#/I/TS4#   O"   &0
M        @(%6'0$ >&PO=V]R:W-H965T<R]S:&5E=#,R+GAM;%!+ 0(4 Q0
M   ( 'V 5E8YRC9F4 0  $0.   9              " @<(@ 0!X;"]W;W)K
M<VAE971S+W-H965T,S,N>&UL4$L! A0#%     @ ?8!65M\//)EF P  _P@
M !D              ("!224! 'AL+W=O<FMS:&5E=',O<VAE970S-"YX;6Q0
M2P$"% ,4    " !]@%9627-EH&@$  #"#0  &0              @('F* $
M>&PO=V]R:W-H965T<R]S:&5E=#,U+GAM;%!+ 0(4 Q0    ( 'V 5E9\C6=(
MW0,  %H-   9              " @84M 0!X;"]W;W)K<VAE971S+W-H965T
M,S8N>&UL4$L! A0#%     @ ?8!65N\KB7L6 P  R0@  !D
M ("!F3$! 'AL+W=O<FMS:&5E=',O<VAE970S-RYX;6Q02P$"% ,4    " !]
M@%96A1NJJ,D'  #&'P  &0              @('F- $ >&PO=V]R:W-H965T
M<R]S:&5E=#,X+GAM;%!+ 0(4 Q0    ( 'V 5E9DQ+?-@0<  (4:   9
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M970T,RYX;6Q02P$"% ,4    " !]@%96+NUUMF4"  "D!@  &0
M    @(&[4 $ >&PO=V]R:W-H965T<R]S:&5E=#0T+GAM;%!+ 0(4 Q0    (
M 'V 5E:\PG/!-@(  )P$   9              " @5=3 0!X;"]W;W)K<VAE
M971S+W-H965T-#4N>&UL4$L! A0#%     @ ?8!65B',=H:T @  S@<  !D
M             ("!Q%4! 'AL+W=O<FMS:&5E=',O<VAE970T-BYX;6Q02P$"
M% ,4    " !]@%96TLRX%7<"   6!@  &0              @(&O6 $ >&PO
M=V]R:W-H965T<R]S:&5E=#0W+GAM;%!+ 0(4 Q0    ( 'V 5E86<),(3 (
M !,%   9              " @5U; 0!X;"]W;W)K<VAE971S+W-H965T-#@N
M>&UL4$L! A0#%     @ ?8!65K:C*7S)!P  S$4  !D              ("!
MX%T! 'AL+W=O<FMS:&5E=',O<VAE970T.2YX;6Q02P$"% ,4    " !]@%96
M(&]\ T,$  #($   &0              @('@90$ >&PO=V]R:W-H965T<R]S
M:&5E=#4P+GAM;%!+ 0(4 Q0    ( 'V 5E89PC)N[ ,  (82   9
M      " @5IJ 0!X;"]W;W)K<VAE971S+W-H965T-3$N>&UL4$L! A0#%
M  @ ?8!65I0P_R7^!0  ZBP  !D              ("!?6X! 'AL+W=O<FMS
M:&5E=',O<VAE970U,BYX;6Q02P$"% ,4    " !]@%96$*%G-#@(  ")/@
M&0              @(&R= $ >&PO=V]R:W-H965T<R]S:&5E=#4S+GAM;%!+
M 0(4 Q0    ( 'V 5E8/LQNU1P,  .X-   9              " @2%] 0!X
M;"]W;W)K<VAE971S+W-H965T-30N>&UL4$L! A0#%     @ ?8!65HN5$4=O
M @  K 8  !D              ("!GX ! 'AL+W=O<FMS:&5E=',O<VAE970U
M-2YX;6Q02P$"% ,4    " !]@%96$II%[M(%   K+@  &0
M@(%%@P$ >&PO=V]R:W-H965T<R]S:&5E=#4V+GAM;%!+ 0(4 Q0    ( 'V
M5E;W ]/PK@(  (0'   9              " @4Z) 0!X;"]W;W)K<VAE971S
M+W-H965T-3<N>&UL4$L! A0#%     @ ?8!65N4Z#=3I!   Z1H  !D
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M=#8R+GAM;%!+ 0(4 Q0    ( 'V 5E;9X"#3,P,  $0.   9
M  " @?^= 0!X;"]W;W)K<VAE971S+W-H965T-C,N>&UL4$L! A0#%     @
M?8!65NBSD1IV @  GP8  !D              ("!::$! 'AL+W=O<FMS:&5E
M=',O<VAE970V-"YX;6Q02P$"% ,4    " !]@%96GZT<A!<#  "N"0  &0
M            @($6I $ >&PO=V]R:W-H965T<R]S:&5E=#8U+GAM;%!+ 0(4
M Q0    ( 'V 5E8.#80=- (  #X%   9              " @62G 0!X;"]W
M;W)K<VAE971S+W-H965T-C8N>&UL4$L! A0#%     @ ?8!65CF_&;?4 P
M8A   !D              ("!SZD! 'AL+W=O<FMS:&5E=',O<VAE970V-RYX
M;6Q02P$"% ,4    " !]@%964>2B6Q0#   4"@  &0              @(':
MK0$ >&PO=V]R:W-H965T<R]S:&5E=#8X+GAM;%!+ 0(4 Q0    ( 'V 5E;.
ME5#^80,  '(/   9              " @26Q 0!X;"]W;W)K<VAE971S+W-H
M965T-CDN>&UL4$L! A0#%     @ ?8!65O2>I &&!   $R0  !D
M     ("!O;0! 'AL+W=O<FMS:&5E=',O<VAE970W,"YX;6Q02P$"% ,4
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M+GAM;%!+ 0(4 Q0    ( 'V 5E;4CP&N%0@  /Q1   9              "
M@9;$ 0!X;"]W;W)K<VAE971S+W-H965T-S4N>&UL4$L! A0#%     @ ?8!6
M5LGQ5B?-!P  +DD  !D              ("!XLP! 'AL+W=O<FMS:&5E=',O
M<VAE970W-BYX;6Q02P$"% ,4    " !]@%96<VR"G+@$  #?(P  &0
M        @('FU $ >&PO=V]R:W-H965T<R]S:&5E=#<W+GAM;%!+ 0(4 Q0
M   ( 'V 5E8B/D8<[@0  !,?   9              " @=79 0!X;"]W;W)K
M<VAE971S+W-H965T-S@N>&UL4$L! A0#%     @ ?8!65NO;S%1% @  %@4
M !D              ("!^MX! 'AL+W=O<FMS:&5E=',O<VAE970W.2YX;6Q0
M2P$"% ,4    " !]@%96\#W'!=$%   O+   &0              @(%VX0$
M>&PO=V]R:W-H965T<R]S:&5E=#@P+GAM;%!+ 0(4 Q0    ( 'V 5E9?]7P)
MHP0  "(8   9              " @7[G 0!X;"]W;W)K<VAE971S+W-H965T
M.#$N>&UL4$L! A0#%     @ ?8!65A5NXB(Y @  O@4  !D
M ("!6.P! 'AL+W=O<FMS:&5E=',O<VAE970X,BYX;6Q02P$"% ,4    " !]
M@%96?25MPF@'  !T5   &0              @('([@$ >&PO=V]R:W-H965T
M<R]S:&5E=#@S+GAM;%!+ 0(4 Q0    ( 'V 5E8(L G"; (  +X%   9
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M970X."YX;6Q02P$"% ,4    " !]@%96KQNT>7P$  !%&   &0
M    @(&^!@( >&PO=V]R:W-H965T<R]S:&5E=#@Y+GAM;%!+ 0(4 Q0    (
M 'V 5E:76RY\1 (  #X%   9              " @7$+ @!X;"]W;W)K<VAE
M971S+W-H965T.3 N>&UL4$L! A0#%     @ ?8!65@E'DI ^!0  (QH  !D
M             ("![ T" 'AL+W=O<FMS:&5E=',O<VAE970Y,2YX;6Q02P$"
M% ,4    " !]@%967VK<"3@#  !4"@  &0              @(%A$P( >&PO
M=V]R:W-H965T<R]S:&5E=#DR+GAM;%!+ 0(4 Q0    ( 'V 5E;4A&UXO0,
M !@-   9              " @= 6 @!X;"]W;W)K<VAE971S+W-H965T.3,N
M>&UL4$L! A0#%     @ ?8!65LP[VSI< P  -@T  !D              ("!
MQ!H" 'AL+W=O<FMS:&5E=',O<VAE970Y-"YX;6Q02P$"% ,4    " !]@%96
M&#(Y\NX"  "T"   &0              @(%7'@( >&PO=V]R:W-H965T<R]S
M:&5E=#DU+GAM;%!+ 0(4 Q0    ( 'V 5E9KFX78X (  %8(   9
M      " @7PA @!X;"]W;W)K<VAE971S+W-H965T.38N>&UL4$L! A0#%
M  @ ?8!65BA@W$2' P  4PT  !D              ("!DR0" 'AL+W=O<FMS
M:&5E=',O<VAE970Y-RYX;6Q02P$"% ,4    " !]@%96F-((P(<$  "?$
M&0              @(%1* ( >&PO=V]R:W-H965T<R]S:&5E=#DX+GAM;%!+
M 0(4 Q0    ( 'V 5E:#WN=\3 4  +D5   9              " @0\M @!X
M;"]W;W)K<VAE971S+W-H965T.3DN>&UL4$L! A0#%     @ ?8!65B9W^:*7
M @  M@@  !H              ("!DC(" 'AL+W=O<FMS:&5E=',O<VAE970Q
M,# N>&UL4$L! A0#%     @ ?8!65G?C*963 @  D@@  !H
M ("!834" 'AL+W=O<FMS:&5E=',O<VAE970Q,#$N>&UL4$L! A0#%     @
M?8!65J&5"^BP P  6 T  !H              ("!+#@" 'AL+W=O<FMS:&5E
M=',O<VAE970Q,#(N>&UL4$L! A0#%     @ ?8!65HLK8L<Z!   LQ8  !H
M             ("!%#P" 'AL+W=O<FMS:&5E=',O<VAE970Q,#,N>&UL4$L!
M A0#%     @ ?8!65BXAP.[.!   E1L  !H              ("!AD " 'AL
M+W=O<FMS:&5E=',O<VAE970Q,#0N>&UL4$L! A0#%     @ ?8!65@)4F:]^
M @  (P<  !H              ("!C$4" 'AL+W=O<FMS:&5E=',O<VAE970Q
M,#4N>&UL4$L! A0#%     @ ?8!65HXG($-3!   ,!8  !H
M ("!0D@" 'AL+W=O<FMS:&5E=',O<VAE970Q,#8N>&UL4$L! A0#%     @
M?8!65EN-+&9* P  LA0   T              ( !S4P" 'AL+W-T>6QE<RYX
M;6Q02P$"% ,4    " !]@%96EXJ[',     3 @  "P              @ %"
M4 ( 7W)E;',O+G)E;'-02P$"% ,4    " !]@%96TABQ?*T'  "C10  #P
M            @ $K40( >&PO=V]R:V)O;VLN>&UL4$L! A0#%     @ ?8!6
M5N,-K,?_ @  13X  !H              ( !!5D" 'AL+U]R96QS+W=O<FMB
M;V]K+GAM;"YR96QS4$L! A0#%     @ ?8!65J% UB-M @  _SL  !,
M         ( !/%P" %M#;VYT96YT7U1Y<&5S72YX;6Q02P4&     '( <@!<
)'P  VEX"

end
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>122
<FILENAME>Show.js
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
// Edgar(tm) Renderer was created by staff of the U.S. Securities and Exchange Commission.  Data and content created by government employees within the scope of their employment are not subject to domestic copyright protection. 17 U.S.C. 105.
var Show={};Show.LastAR=null,Show.showAR=function(a,r,w){if(Show.LastAR)Show.hideAR();var e=a;while(e&&e.nodeName!='TABLE')e=e.nextSibling;if(!e||e.nodeName!='TABLE'){var ref=((window)?w.document:document).getElementById(r);if(ref){e=ref.cloneNode(!0);
e.removeAttribute('id');a.parentNode.appendChild(e)}}
if(e)e.style.display='block';Show.LastAR=e};Show.hideAR=function(){Show.LastAR.style.display='none'};Show.toggleNext=function(a){var e=a;while(e.nodeName!='DIV')e=e.nextSibling;if(!e.style){}else if(!e.style.display){}else{var d,p_;if(e.style.display=='none'){d='block';p='-'}else{d='none';p='+'}
e.style.display=d;if(a.textContent){a.textContent=p+a.textContent.substring(1)}else{a.innerText=p+a.innerText.substring(1)}}}
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>123
<FILENAME>report.css
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
/* Updated 2009-11-04 */
/* v2.2.0.24 */

/* DefRef Styles */
..report table.authRefData{
	background-color: #def;
	border: 2px solid #2F4497;
	font-size: 1em;
	position: absolute;
}

..report table.authRefData a {
	display: block;
	font-weight: bold;
}

..report table.authRefData p {
	margin-top: 0px;
}

..report table.authRefData .hide {
	background-color: #2F4497;
	padding: 1px 3px 0px 0px;
	text-align: right;
}

..report table.authRefData .hide a:hover {
	background-color: #2F4497;
}

..report table.authRefData .body {
	height: 150px;
	overflow: auto;
	width: 400px;
}

..report table.authRefData table{
	font-size: 1em;
}

/* Report Styles */
..pl a, .pl a:visited {
	color: black;
	text-decoration: none;
}

/* table */
..report {
	background-color: white;
	border: 2px solid #acf;
	clear: both;
	color: black;
	font: normal 8pt Helvetica, Arial, san-serif;
	margin-bottom: 2em;
}

..report hr {
	border: 1px solid #acf;
}

/* Top labels */
..report th {
	background-color: #acf;
	color: black;
	font-weight: bold;
	text-align: center;
}

..report th.void	{
	background-color: transparent;
	color: #000000;
	font: bold 10pt Helvetica, Arial, san-serif;
	text-align: left;
}

..report .pl {
	text-align: left;
	vertical-align: top;
	white-space: normal;
	width: 200px;
	white-space: normal; /* word-wrap: break-word; */
}

..report td.pl a.a {
	cursor: pointer;
	display: block;
	width: 200px;
	overflow: hidden;
}

..report td.pl div.a {
	width: 200px;
}

..report td.pl a:hover {
	background-color: #ffc;
}

/* Header rows... */
..report tr.rh {
	background-color: #acf;
	color: black;
	font-weight: bold;
}

/* Calendars... */
..report .rc {
	background-color: #f0f0f0;
}

/* Even rows... */
..report .re, .report .reu {
	background-color: #def;
}

..report .reu td {
	border-bottom: 1px solid black;
}

/* Odd rows... */
..report .ro, .report .rou {
	background-color: white;
}

..report .rou td {
	border-bottom: 1px solid black;
}

..report .rou table td, .report .reu table td {
	border-bottom: 0px solid black;
}

/* styles for footnote marker */
..report .fn {
	white-space: nowrap;
}

/* styles for numeric types */
..report .num, .report .nump {
	text-align: right;
	white-space: nowrap;
}

..report .nump {
	padding-left: 2em;
}

..report .nump {
	padding: 0px 0.4em 0px 2em;
}

/* styles for text types */
..report .text {
	text-align: left;
	white-space: normal;
}

..report .text .big {
	margin-bottom: 1em;
	width: 17em;
}

..report .text .more {
	display: none;
}

..report .text .note {
	font-style: italic;
	font-weight: bold;
}

..report .text .small {
	width: 10em;
}

..report sup {
	font-style: italic;
}

..report .outerFootnotes {
	font-size: 1em;
}
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>124
<FILENAME>FilingSummary.xml
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<XML>
<?xml version='1.0' encoding='utf-8'?>
<FilingSummary>
  <Version>3.22.4</Version>
  <ProcessingTime/>
  <ReportFormat>html</ReportFormat>
  <ContextCount>330</ContextCount>
  <ElementCount>475</ElementCount>
  <EntityCount>1</EntityCount>
  <FootnotesReported>false</FootnotesReported>
  <SegmentCount>99</SegmentCount>
  <ScenarioCount>0</ScenarioCount>
  <TuplesReported>false</TuplesReported>
  <UnitCount>10</UnitCount>
  <MyReports>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R1.htm</HtmlFileName>
      <LongName>00090 - Document - Document and Entity Information</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DocumentDocumentAndEntityInformation</Role>
      <ShortName>Document and Entity Information</ShortName>
      <MenuCategory>Cover</MenuCategory>
      <Position>1</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R2.htm</HtmlFileName>
      <LongName>00100 - Statement - Consolidated Balance Sheets</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/StatementConsolidatedBalanceSheets</Role>
      <ShortName>Consolidated Balance Sheets</ShortName>
      <MenuCategory>Statements</MenuCategory>
      <Position>2</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R3.htm</HtmlFileName>
      <LongName>00105 - Statement - Consolidated Balance Sheets (Parenthetical)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/StatementConsolidatedBalanceSheetsParenthetical</Role>
      <ShortName>Consolidated Balance Sheets (Parenthetical)</ShortName>
      <MenuCategory>Statements</MenuCategory>
      <Position>3</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R4.htm</HtmlFileName>
      <LongName>00200 - Statement - Consolidated Statements of Operations</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations</Role>
      <ShortName>Consolidated Statements of Operations</ShortName>
      <MenuCategory>Statements</MenuCategory>
      <Position>4</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R5.htm</HtmlFileName>
      <LongName>00300 - Statement - Consolidated Statements of Comprehensive Income (Loss)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/StatementConsolidatedStatementsOfComprehensiveIncomeLoss</Role>
      <ShortName>Consolidated Statements of Comprehensive Income (Loss)</ShortName>
      <MenuCategory>Statements</MenuCategory>
      <Position>5</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R6.htm</HtmlFileName>
      <LongName>00400 - Statement - Consolidated Statements of Stockholders' Equity</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/StatementConsolidatedStatementsOfStockholdersEquity</Role>
      <ShortName>Consolidated Statements of Stockholders' Equity</ShortName>
      <MenuCategory>Statements</MenuCategory>
      <Position>6</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R7.htm</HtmlFileName>
      <LongName>00500 - Statement - Consolidated Statements of Cash Flows</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows</Role>
      <ShortName>Consolidated Statements of Cash Flows</ShortName>
      <MenuCategory>Statements</MenuCategory>
      <Position>7</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R8.htm</HtmlFileName>
      <LongName>10101 - Disclosure - Significant Accounting Policies</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureSignificantAccountingPolicies</Role>
      <ShortName>Significant Accounting Policies</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>8</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R9.htm</HtmlFileName>
      <LongName>10201 - Disclosure - Income Per Common Share</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureIncomePerCommonShare</Role>
      <ShortName>Income Per Common Share</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>9</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R10.htm</HtmlFileName>
      <LongName>10301 - Disclosure - Fair Value Measurements</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureFairValueMeasurements</Role>
      <ShortName>Fair Value Measurements</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>10</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R11.htm</HtmlFileName>
      <LongName>10401 - Disclosure - Investments</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureInvestments</Role>
      <ShortName>Investments</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>11</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R12.htm</HtmlFileName>
      <LongName>10501 - Disclosure - Inventories</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureInventories</Role>
      <ShortName>Inventories</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>12</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R13.htm</HtmlFileName>
      <LongName>10601 - Disclosure - Property, Plant, and Equipment</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosurePropertyPlantAndEquipment</Role>
      <ShortName>Property, Plant, and Equipment</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>13</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R14.htm</HtmlFileName>
      <LongName>10701 - Disclosure - Goodwill and Intangible Assets</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssets</Role>
      <ShortName>Goodwill and Intangible Assets</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>14</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R15.htm</HtmlFileName>
      <LongName>10801 - Disclosure - Accrued Expenses and Other Liabilities</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilities</Role>
      <ShortName>Accrued Expenses and Other Liabilities</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>15</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R16.htm</HtmlFileName>
      <LongName>10901 - Disclosure - Commitments and Contingencies</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureCommitmentsAndContingencies</Role>
      <ShortName>Commitments and Contingencies</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>16</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R17.htm</HtmlFileName>
      <LongName>11001 - Disclosure - Debt</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureDebt</Role>
      <ShortName>Debt</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>17</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R18.htm</HtmlFileName>
      <LongName>11101 - Disclosure - Stockholders' Equity</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureStockholdersEquity</Role>
      <ShortName>Stockholders' Equity</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>18</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R19.htm</HtmlFileName>
      <LongName>11201 - Disclosure - Stock Plans</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureStockPlans</Role>
      <ShortName>Stock Plans</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>19</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R20.htm</HtmlFileName>
      <LongName>11301 - Disclosure - Retirement Plans</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureRetirementPlans</Role>
      <ShortName>Retirement Plans</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>20</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R21.htm</HtmlFileName>
      <LongName>11401 - Disclosure - Dispositions</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureDispositions</Role>
      <ShortName>Dispositions</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>21</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R22.htm</HtmlFileName>
      <LongName>11501 - Disclosure - Income Taxes</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureIncomeTaxes</Role>
      <ShortName>Income Taxes</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>22</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R23.htm</HtmlFileName>
      <LongName>11601 - Disclosure - Segment Reporting and Geographic Information</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformation</Role>
      <ShortName>Segment Reporting and Geographic Information</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>23</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R24.htm</HtmlFileName>
      <LongName>11701 - Disclosure - Subsequent Events</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureSubsequentEvents</Role>
      <ShortName>Subsequent Events</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>24</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R25.htm</HtmlFileName>
      <LongName>11801 - Disclosure - Schedule II - Valuation and Qualifying Accounts</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureScheduleIiValuationAndQualifyingAccounts</Role>
      <ShortName>Schedule II - Valuation and Qualifying Accounts</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>25</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R26.htm</HtmlFileName>
      <LongName>20102 - Disclosure - Significant Accounting Policies (Policies)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesPolicies</Role>
      <ShortName>Significant Accounting Policies (Policies)</ShortName>
      <MenuCategory>Policies</MenuCategory>
      <ParentRole>http://www.veeco.com/role/DisclosureSignificantAccountingPolicies</ParentRole>
      <Position>26</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R27.htm</HtmlFileName>
      <LongName>30103 - Disclosure - Significant Accounting Policies (Tables)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesTables</Role>
      <ShortName>Significant Accounting Policies (Tables)</ShortName>
      <MenuCategory>Tables</MenuCategory>
      <ParentRole>http://www.veeco.com/role/DisclosureSignificantAccountingPolicies</ParentRole>
      <Position>27</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R28.htm</HtmlFileName>
      <LongName>30203 - Disclosure - Income Per Common Share (Tables)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureIncomePerCommonShareTables</Role>
      <ShortName>Income Per Common Share (Tables)</ShortName>
      <MenuCategory>Tables</MenuCategory>
      <ParentRole>http://www.veeco.com/role/DisclosureIncomePerCommonShare</ParentRole>
      <Position>28</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R29.htm</HtmlFileName>
      <LongName>30303 - Disclosure - Fair Value Measurements (Tables)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureFairValueMeasurementsTables</Role>
      <ShortName>Fair Value Measurements (Tables)</ShortName>
      <MenuCategory>Tables</MenuCategory>
      <ParentRole>http://www.veeco.com/role/DisclosureFairValueMeasurements</ParentRole>
      <Position>29</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R30.htm</HtmlFileName>
      <LongName>30403 - Disclosure - Investments (Tables)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureInvestmentsTables</Role>
      <ShortName>Investments (Tables)</ShortName>
      <MenuCategory>Tables</MenuCategory>
      <ParentRole>http://www.veeco.com/role/DisclosureInvestments</ParentRole>
      <Position>30</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R31.htm</HtmlFileName>
      <LongName>30503 - Disclosure - Inventories (Tables)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureInventoriesTables</Role>
      <ShortName>Inventories (Tables)</ShortName>
      <MenuCategory>Tables</MenuCategory>
      <ParentRole>http://www.veeco.com/role/DisclosureInventories</ParentRole>
      <Position>31</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R32.htm</HtmlFileName>
      <LongName>30603 - Disclosure - Property, Plant, and Equipment (Tables)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosurePropertyPlantAndEquipmentTables</Role>
      <ShortName>Property, Plant, and Equipment (Tables)</ShortName>
      <MenuCategory>Tables</MenuCategory>
      <ParentRole>http://www.veeco.com/role/DisclosurePropertyPlantAndEquipment</ParentRole>
      <Position>32</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R33.htm</HtmlFileName>
      <LongName>30703 - Disclosure - Goodwill and Intangible Assets (Tables)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssetsTables</Role>
      <ShortName>Goodwill and Intangible Assets (Tables)</ShortName>
      <MenuCategory>Tables</MenuCategory>
      <ParentRole>http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssets</ParentRole>
      <Position>33</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R34.htm</HtmlFileName>
      <LongName>30803 - Disclosure - Accrued Expenses and Other Liabilities (Tables)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesTables</Role>
      <ShortName>Accrued Expenses and Other Liabilities (Tables)</ShortName>
      <MenuCategory>Tables</MenuCategory>
      <ParentRole>http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilities</ParentRole>
      <Position>34</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R35.htm</HtmlFileName>
      <LongName>30903 - Disclosure - Commitments and Contingencies (Tables)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesTables</Role>
      <ShortName>Commitments and Contingencies (Tables)</ShortName>
      <MenuCategory>Tables</MenuCategory>
      <ParentRole>http://www.veeco.com/role/DisclosureCommitmentsAndContingencies</ParentRole>
      <Position>35</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R36.htm</HtmlFileName>
      <LongName>31003 - Disclosure - Debt (Tables)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureDebtTables</Role>
      <ShortName>Debt (Tables)</ShortName>
      <MenuCategory>Tables</MenuCategory>
      <ParentRole>http://www.veeco.com/role/DisclosureDebt</ParentRole>
      <Position>36</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R37.htm</HtmlFileName>
      <LongName>31103 - Disclosure - Stockholders' Equity (Tables)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureStockholdersEquityTables</Role>
      <ShortName>Stockholders' Equity (Tables)</ShortName>
      <MenuCategory>Tables</MenuCategory>
      <ParentRole>http://www.veeco.com/role/DisclosureStockholdersEquity</ParentRole>
      <Position>37</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R38.htm</HtmlFileName>
      <LongName>31203 - Disclosure - Stock Plans (Tables)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureStockPlansTables</Role>
      <ShortName>Stock Plans (Tables)</ShortName>
      <MenuCategory>Tables</MenuCategory>
      <ParentRole>http://www.veeco.com/role/DisclosureStockPlans</ParentRole>
      <Position>38</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R39.htm</HtmlFileName>
      <LongName>31503 - Disclosure - Income Taxes (Tables)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureIncomeTaxesTables</Role>
      <ShortName>Income Taxes (Tables)</ShortName>
      <MenuCategory>Tables</MenuCategory>
      <ParentRole>http://www.veeco.com/role/DisclosureIncomeTaxes</ParentRole>
      <Position>39</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R40.htm</HtmlFileName>
      <LongName>31603 - Disclosure - Segment Reporting and Geographic Information (Tables)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformationTables</Role>
      <ShortName>Segment Reporting and Geographic Information (Tables)</ShortName>
      <MenuCategory>Tables</MenuCategory>
      <ParentRole>http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformation</ParentRole>
      <Position>40</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R41.htm</HtmlFileName>
      <LongName>40101 - Disclosure - Significant Accounting Policies - Description of Business and Basis of Presentation (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesDescriptionOfBusinessAndBasisOfPresentationDetails</Role>
      <ShortName>Significant Accounting Policies - Description of Business and Basis of Presentation (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>41</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R42.htm</HtmlFileName>
      <LongName>40102 - Disclosure - Significant Accounting Policies - Revenue Recognition (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesRevenueRecognitionDetails</Role>
      <ShortName>Significant Accounting Policies - Revenue Recognition (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>42</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R43.htm</HtmlFileName>
      <LongName>40103 - Disclosure - Significant Accounting Policies - Warranty Costs (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesWarrantyCostsDetails</Role>
      <ShortName>Significant Accounting Policies - Warranty Costs (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>43</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R44.htm</HtmlFileName>
      <LongName>40104 - Disclosure - Significant Accounting Policies - Advertising Expense (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesAdvertisingExpenseDetails</Role>
      <ShortName>Significant Accounting Policies - Advertising Expense (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>44</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R45.htm</HtmlFileName>
      <LongName>40105 - Disclosure - Significant Accounting Policies - Accounting for Share-Based Compensation (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesAccountingForShareBasedCompensationDetails</Role>
      <ShortName>Significant Accounting Policies - Accounting for Share-Based Compensation (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>45</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R46.htm</HtmlFileName>
      <LongName>40106 - Disclosure - Significant Accounting Policies - Concentration of Credit Risk (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesConcentrationOfCreditRiskDetails</Role>
      <ShortName>Significant Accounting Policies - Concentration of Credit Risk (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>46</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R47.htm</HtmlFileName>
      <LongName>40107 - Disclosure - Significant Accounting Policies - Cash, Cash Equivalents, and Short-term Investments (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesCashCashEquivalentsAndShortTermInvestmentsDetails</Role>
      <ShortName>Significant Accounting Policies - Cash, Cash Equivalents, and Short-term Investments (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>47</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R48.htm</HtmlFileName>
      <LongName>40108 - Disclosure - Significant Accounting Policies - Goodwill and Indefinite-Lived Intangibles (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesGoodwillAndIndefiniteLivedIntangiblesDetails</Role>
      <ShortName>Significant Accounting Policies - Goodwill and Indefinite-Lived Intangibles (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>48</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R49.htm</HtmlFileName>
      <LongName>40109 - Disclosure - Significant Accounting Policies - Recently Adopted Accounting Standards (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesRecentlyAdoptedAccountingStandardsDetails</Role>
      <ShortName>Significant Accounting Policies - Recently Adopted Accounting Standards (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>49</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R50.htm</HtmlFileName>
      <LongName>40201 - Disclosure - Income Per Common Share - Basic and Diluted (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureIncomePerCommonShareBasicAndDilutedDetails</Role>
      <ShortName>Income Per Common Share - Basic and Diluted (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>50</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R51.htm</HtmlFileName>
      <LongName>40202 - Disclosure - Income Per Common Share - Shares Excluded from EPS (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureIncomePerCommonShareSharesExcludedFromEpsDetails</Role>
      <ShortName>Income Per Common Share - Shares Excluded from EPS (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>51</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R52.htm</HtmlFileName>
      <LongName>40301 - Disclosure - Fair Value Measurements (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureFairValueMeasurementsDetails</Role>
      <ShortName>Fair Value Measurements (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <ParentRole>http://www.veeco.com/role/DisclosureFairValueMeasurementsTables</ParentRole>
      <Position>52</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R53.htm</HtmlFileName>
      <LongName>40401 - Disclosure - Investments - Available-For-Sale Securities (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureInvestmentsAvailableForSaleSecuritiesDetails</Role>
      <ShortName>Investments - Available-For-Sale Securities (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>53</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R54.htm</HtmlFileName>
      <LongName>40402 - Disclosure - Investments - Other Investment (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureInvestmentsOtherInvestmentDetails</Role>
      <ShortName>Investments - Other Investment (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>54</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R55.htm</HtmlFileName>
      <LongName>40501 - Disclosure - Inventories (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureInventoriesDetails</Role>
      <ShortName>Inventories (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <ParentRole>http://www.veeco.com/role/DisclosureInventoriesTables</ParentRole>
      <Position>55</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R56.htm</HtmlFileName>
      <LongName>40601 - Disclosure - Property, Plant, and Equipment - Property and Equipment (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosurePropertyPlantAndEquipmentPropertyAndEquipmentDetails</Role>
      <ShortName>Property, Plant, and Equipment - Property and Equipment (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>56</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R57.htm</HtmlFileName>
      <LongName>40701 - Disclosure - Goodwill and Intangible Assets - Goodwill (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssetsGoodwillDetails</Role>
      <ShortName>Goodwill and Intangible Assets - Goodwill (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>57</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R58.htm</HtmlFileName>
      <LongName>40702 - Disclosure - Goodwill and Intangible Assets - Intangible Assets (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssetsIntangibleAssetsDetails</Role>
      <ShortName>Goodwill and Intangible Assets - Intangible Assets (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>58</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R59.htm</HtmlFileName>
      <LongName>40703 - Disclosure - Goodwill and Intangible Assets - Amortization (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssetsAmortizationDetails</Role>
      <ShortName>Goodwill and Intangible Assets - Amortization (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>59</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R60.htm</HtmlFileName>
      <LongName>40801 - Disclosure - Accrued Expenses and Other Liabilities - Components (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesComponentsDetails</Role>
      <ShortName>Accrued Expenses and Other Liabilities - Components (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>60</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R61.htm</HtmlFileName>
      <LongName>40802 - Disclosure - Accrued Expenses and Other Liabilities - Customer deposits and deferred revenue (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesCustomerDepositsAndDeferredRevenueDetails</Role>
      <ShortName>Accrued Expenses and Other Liabilities - Customer deposits and deferred revenue (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>61</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R62.htm</HtmlFileName>
      <LongName>40803 - Disclosure - Accrued Expenses and Other Liabilities - Performance Obligation Amount (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesPerformanceObligationAmountDetails</Role>
      <ShortName>Accrued Expenses and Other Liabilities - Performance Obligation Amount (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>62</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R63.htm</HtmlFileName>
      <LongName>40804 - Disclosure - Accrued Expenses and Other Liabilities - Performance Obligation Timing (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesPerformanceObligationTimingDetails</Role>
      <ShortName>Accrued Expenses and Other Liabilities - Performance Obligation Timing (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>63</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R64.htm</HtmlFileName>
      <LongName>40805 - Disclosure - Accrued Expenses and Other Liabilities - Other liabilities (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesOtherLiabilitiesDetails</Role>
      <ShortName>Accrued Expenses and Other Liabilities - Other liabilities (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>64</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R65.htm</HtmlFileName>
      <LongName>40901 - Disclosure - Commitments and Contingencies - Warranty (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesWarrantyDetails</Role>
      <ShortName>Commitments and Contingencies - Warranty (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>65</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R66.htm</HtmlFileName>
      <LongName>40902 - Disclosure - Commitments and Contingencies - Lease terms (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesLeaseTermsDetails</Role>
      <ShortName>Commitments and Contingencies - Lease terms (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>66</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R67.htm</HtmlFileName>
      <LongName>40903 - Disclosure - Commitments and Contingencies - Minimum lease commitments (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesMinimumLeaseCommitmentsDetails</Role>
      <ShortName>Commitments and Contingencies - Minimum lease commitments (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>67</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R68.htm</HtmlFileName>
      <LongName>40904 - Disclosure - Commitments and Contingencies - Lease costs (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesLeaseCostsDetails</Role>
      <ShortName>Commitments and Contingencies - Lease costs (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>68</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R69.htm</HtmlFileName>
      <LongName>40905 - Disclosure - Commitments and Contingencies - Legal Proceedings (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesLegalProceedingsDetails</Role>
      <ShortName>Commitments and Contingencies - Legal Proceedings (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>69</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R70.htm</HtmlFileName>
      <LongName>40906 - Disclosure - Commitments and Contingencies - Concentration of Credit Risk (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesConcentrationOfCreditRiskDetails</Role>
      <ShortName>Commitments and Contingencies - Concentration of Credit Risk (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>70</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R71.htm</HtmlFileName>
      <LongName>40907 - Disclosure - Commitments and Contingencies - Receivables (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesReceivablesDetails</Role>
      <ShortName>Commitments and Contingencies - Receivables (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>71</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R72.htm</HtmlFileName>
      <LongName>40908 - Disclosure - Commitments and Contingencies - Receivable Purchase Agreement (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesReceivablePurchaseAgreementDetails</Role>
      <ShortName>Commitments and Contingencies - Receivable Purchase Agreement (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>72</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R73.htm</HtmlFileName>
      <LongName>40909 - Disclosure - Commitments and Contingencies - Suppliers (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesSuppliersDetails</Role>
      <ShortName>Commitments and Contingencies - Suppliers (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>73</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R74.htm</HtmlFileName>
      <LongName>40910 - Disclosure - Commitments and Contingencies - Purchase Commitments and Bank Guarantees (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesPurchaseCommitmentsAndBankGuaranteesDetails</Role>
      <ShortName>Commitments and Contingencies - Purchase Commitments and Bank Guarantees (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>74</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R75.htm</HtmlFileName>
      <LongName>41001 - Disclosure - Debt - 2023. 2025 and 2027 Notes (Details)</LongName>
      <ReportType>Notes</ReportType>
      <Role>http://www.veeco.com/role/DisclosureDebt20232025And2027NotesDetails</Role>
      <ShortName>Debt - 2023. 2025 and 2027 Notes (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>75</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R76.htm</HtmlFileName>
      <LongName>41002 - Disclosure - Debt - Convertible Senior Notes (Details)</LongName>
      <ReportType>Notes</ReportType>
      <Role>http://www.veeco.com/role/DisclosureDebtConvertibleSeniorNotesDetails</Role>
      <ShortName>Debt - Convertible Senior Notes (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>76</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R77.htm</HtmlFileName>
      <LongName>41003 - Disclosure - Debt - Carrying Value (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureDebtCarryingValueDetails</Role>
      <ShortName>Debt - Carrying Value (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>77</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R78.htm</HtmlFileName>
      <LongName>41004 - Disclosure - Debt - Interest Expense (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureDebtInterestExpenseDetails</Role>
      <ShortName>Debt - Interest Expense (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>78</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R79.htm</HtmlFileName>
      <LongName>41005 - Disclosure - Debt - Capped Call Transactions (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureDebtCappedCallTransactionsDetails</Role>
      <ShortName>Debt - Capped Call Transactions (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>79</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R80.htm</HtmlFileName>
      <LongName>41006 - Disclosure - Debt - Revolving Credit Facility (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureDebtRevolvingCreditFacilityDetails</Role>
      <ShortName>Debt - Revolving Credit Facility (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>80</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R81.htm</HtmlFileName>
      <LongName>41101 - Disclosure - Stockholders' Equity - AOCI Rollforward (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureStockholdersEquityAociRollforwardDetails</Role>
      <ShortName>Stockholders' Equity - AOCI Rollforward (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>81</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R82.htm</HtmlFileName>
      <LongName>41102 - Disclosure - Stockholders' Equity - Preferred Stock (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureStockholdersEquityPreferredStockDetails</Role>
      <ShortName>Stockholders' Equity - Preferred Stock (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>82</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R83.htm</HtmlFileName>
      <LongName>41201 - Disclosure - Stock Plans - 2019 Plan (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureStockPlans2019PlanDetails</Role>
      <ShortName>Stock Plans - 2019 Plan (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>83</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R84.htm</HtmlFileName>
      <LongName>41202 - Disclosure - Stock Plans - ESPP (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureStockPlansEsppDetails</Role>
      <ShortName>Stock Plans - ESPP (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>84</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R85.htm</HtmlFileName>
      <LongName>41203 - Disclosure - Stock Plans - Shares Reserved for Future Issuance (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureStockPlansSharesReservedForFutureIssuanceDetails</Role>
      <ShortName>Stock Plans - Shares Reserved for Future Issuance (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>85</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R86.htm</HtmlFileName>
      <LongName>41204 - Disclosure - Stock Plans - Recognized Share-based Compensation (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureStockPlansRecognizedShareBasedCompensationDetails</Role>
      <ShortName>Stock Plans - Recognized Share-based Compensation (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>86</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R87.htm</HtmlFileName>
      <LongName>41205 - Disclosure - Stock Plans - Unrecognized Share-based Compensation Costs (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureStockPlansUnrecognizedShareBasedCompensationCostsDetails</Role>
      <ShortName>Stock Plans - Unrecognized Share-based Compensation Costs (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>87</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R88.htm</HtmlFileName>
      <LongName>41206 - Disclosure - Stock Plans - Stock Option Activity (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureStockPlansStockOptionActivityDetails</Role>
      <ShortName>Stock Plans - Stock Option Activity (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>88</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R89.htm</HtmlFileName>
      <LongName>41207 - Disclosure - Stock Plans - Option Exercise Ranges (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureStockPlansOptionExerciseRangesDetails</Role>
      <ShortName>Stock Plans - Option Exercise Ranges (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>89</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R90.htm</HtmlFileName>
      <LongName>41208 - Disclosure - Stock Plans - Stock options exercised (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureStockPlansStockOptionsExercisedDetails</Role>
      <ShortName>Stock Plans - Stock options exercised (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>90</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R91.htm</HtmlFileName>
      <LongName>41209 - Disclosure - Share-based Compensation - Restricted shares and performance shares (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureShareBasedCompensationRestrictedSharesAndPerformanceSharesDetails</Role>
      <ShortName>Share-based Compensation - Restricted shares and performance shares (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>91</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R92.htm</HtmlFileName>
      <LongName>41210 - Disclosure - Stock Plans - Performance Awards Assumptions (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureStockPlansPerformanceAwardsAssumptionsDetails</Role>
      <ShortName>Stock Plans - Performance Awards Assumptions (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>92</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R93.htm</HtmlFileName>
      <LongName>41211 - Disclosure - Stock Plans - ESPP FV Assumptions (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureStockPlansEsppFvAssumptionsDetails</Role>
      <ShortName>Stock Plans - ESPP FV Assumptions (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>93</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R94.htm</HtmlFileName>
      <LongName>41301 - Disclosure - Retirement Plans - Defined Contribution Plan (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureRetirementPlansDefinedContributionPlanDetails</Role>
      <ShortName>Retirement Plans - Defined Contribution Plan (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>94</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R95.htm</HtmlFileName>
      <LongName>41401 - Disclosure - Dispositions (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureDispositionsDetails</Role>
      <ShortName>Dispositions (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <ParentRole>http://www.veeco.com/role/DisclosureDispositions</ParentRole>
      <Position>95</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R96.htm</HtmlFileName>
      <LongName>41501 - Disclosure - Income Taxes - Income Attributable to Domestic and Foreign Operations (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureIncomeTaxesIncomeAttributableToDomesticAndForeignOperationsDetails</Role>
      <ShortName>Income Taxes - Income Attributable to Domestic and Foreign Operations (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>96</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R97.htm</HtmlFileName>
      <LongName>41502 - Disclosure - Income Taxes - Components of Expense (Benefit) (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureIncomeTaxesComponentsOfExpenseBenefitDetails</Role>
      <ShortName>Income Taxes - Components of Expense (Benefit) (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>97</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R98.htm</HtmlFileName>
      <LongName>41503 - Disclosure - Income Taxes - Reconciliation to Statutory Tax Expense (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureIncomeTaxesReconciliationToStatutoryTaxExpenseDetails</Role>
      <ShortName>Income Taxes - Reconciliation to Statutory Tax Expense (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>98</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R99.htm</HtmlFileName>
      <LongName>41504 - Disclosure - Income Taxes - Deferred Taxes (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureIncomeTaxesDeferredTaxesDetails</Role>
      <ShortName>Income Taxes - Deferred Taxes (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>99</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R100.htm</HtmlFileName>
      <LongName>41505 - Disclosure - Income Taxes - Operating Loss Carryforwards (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureIncomeTaxesOperatingLossCarryforwardsDetails</Role>
      <ShortName>Income Taxes - Operating Loss Carryforwards (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>100</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R101.htm</HtmlFileName>
      <LongName>41506 - Disclosure - Income Taxes - Tax Credit Carryforwards (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureIncomeTaxesTaxCreditCarryforwardsDetails</Role>
      <ShortName>Income Taxes - Tax Credit Carryforwards (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>101</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R102.htm</HtmlFileName>
      <LongName>41507 - Disclosure - Income Taxes - Uncertain Tax Positions (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureIncomeTaxesUncertainTaxPositionsDetails</Role>
      <ShortName>Income Taxes - Uncertain Tax Positions (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>102</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R103.htm</HtmlFileName>
      <LongName>41601 - Disclosure - Segment Reporting and Geographic Information - Segment (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformationSegmentDetails</Role>
      <ShortName>Segment Reporting and Geographic Information - Segment (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <ParentRole>http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformationTables</ParentRole>
      <Position>103</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R104.htm</HtmlFileName>
      <LongName>41602 - Disclosure - Segment Reporting and Geographic Information - Geographic (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformationGeographicDetails</Role>
      <ShortName>Segment Reporting and Geographic Information - Geographic (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>104</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R105.htm</HtmlFileName>
      <LongName>41701 - Disclosure - Subsequent Events (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureSubsequentEventsDetails</Role>
      <ShortName>Subsequent Events (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <ParentRole>http://www.veeco.com/role/DisclosureSubsequentEvents</ParentRole>
      <Position>105</Position>
    </Report>
    <Report instance="veco-20221231x10k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R106.htm</HtmlFileName>
      <LongName>41801 - Disclosure - Schedule II - Valuation and Qualifying Accounts (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.veeco.com/role/DisclosureScheduleIiValuationAndQualifyingAccountsDetails</Role>
      <ShortName>Schedule II - Valuation and Qualifying Accounts (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <ParentRole>http://www.veeco.com/role/DisclosureScheduleIiValuationAndQualifyingAccounts</ParentRole>
      <Position>106</Position>
    </Report>
    <Report>
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <LongName>All Reports</LongName>
      <ReportType>Book</ReportType>
      <ShortName>All Reports</ShortName>
    </Report>
  </MyReports>
  <Logs>
    <Log type="Warning">[ix-0514-Hidden-Fact-Eligible-For-Transform] WARN: 9 fact(s) appearing in ix:hidden were eligible for transformation: us-gaap:NumberOfOperatingSegments, us-gaap:RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionPeriod1, us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1, us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod, veco:DebtInstrumentNumberOfConsecutiveBusinessDays, veco:IrrevocableLettersOfCreditMaturityPeriodMinimum, veco:NumberOfTradingDaysConsideredToCalculateMarketCapitalization -  veco-20221231x10k.htm 9</Log>
    <Log type="Warning">[ix-0514-Hidden-Fact-Not-Referenced] WARN: 1 fact(s) appearing in ix:hidden were not referenced by any -sec-ix-hidden style property: us-gaap:OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList -  veco-20221231x10k.htm 9</Log>
  </Logs>
  <InputFiles>
    <File doctype="10-K" original="veco-20221231x10k.htm">veco-20221231x10k.htm</File>
    <File>veco-20221231.xsd</File>
    <File>veco-20221231_cal.xml</File>
    <File>veco-20221231_def.xml</File>
    <File>veco-20221231_lab.xml</File>
    <File>veco-20221231_pre.xml</File>
    <File>veco-20221231xex21d1.htm</File>
    <File>veco-20221231xex23d1.htm</File>
    <File>veco-20221231xex31d1.htm</File>
    <File>veco-20221231xex31d2.htm</File>
    <File>veco-20221231xex32d1.htm</File>
    <File>veco-20221231xex32d2.htm</File>
  </InputFiles>
  <SupplementalFiles>
    <File>veco-20221231x10k004.jpg</File>
  </SupplementalFiles>
  <BaseTaxonomies>
    <BaseTaxonomy items="1">http://fasb.org/srt/2022</BaseTaxonomy>
    <BaseTaxonomy items="1166">http://fasb.org/us-gaap/2022</BaseTaxonomy>
    <BaseTaxonomy items="37">http://xbrl.sec.gov/dei/2022</BaseTaxonomy>
  </BaseTaxonomies>
  <HasPresentationLinkbase>true</HasPresentationLinkbase>
  <HasCalculationLinkbase>true</HasCalculationLinkbase>
</FilingSummary>
</XML>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>JSON
<SEQUENCE>127
<FILENAME>MetaLinks.json
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
{
 "instance": {
  "veco-20221231x10k.htm": {
   "axisCustom": 0,
   "axisStandard": 36,
   "baseTaxonomies": {
    "http://fasb.org/srt/2022": 1,
    "http://fasb.org/us-gaap/2022": 1166,
    "http://xbrl.sec.gov/dei/2022": 37
   },
   "contextCount": 330,
   "dts": {
    "calculationLink": {
     "local": [
      "veco-20221231_cal.xml"
     ]
    },
    "definitionLink": {
     "local": [
      "veco-20221231_def.xml"
     ]
    },
    "inline": {
     "local": [
      "veco-20221231x10k.htm"
     ]
    },
    "labelLink": {
     "local": [
      "veco-20221231_lab.xml"
     ]
    },
    "presentationLink": {
     "local": [
      "veco-20221231_pre.xml"
     ]
    },
    "schema": {
     "local": [
      "veco-20221231.xsd"
     ],
     "remote": [
      "http://www.xbrl.org/2003/xbrl-instance-2003-12-31.xsd",
      "http://www.xbrl.org/2003/xbrl-linkbase-2003-12-31.xsd",
      "http://www.xbrl.org/2003/xl-2003-12-31.xsd",
      "http://www.xbrl.org/2003/xlink-2003-12-31.xsd",
      "http://www.xbrl.org/2005/xbrldt-2005.xsd",
      "http://www.xbrl.org/2006/ref-2006-02-27.xsd",
      "http://www.xbrl.org/lrr/arcrole/esma-arcrole-2018-11-21.xsd",
      "http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd",
      "http://www.xbrl.org/lrr/role/reference-2009-12-16.xsd",
      "https://www.xbrl.org/2020/extensible-enumerations-2.0.xsd",
      "https://www.xbrl.org/dtr/type/2020-01-21/types.xsd",
      "https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd",
      "https://xbrl.fasb.org/srt/2022/elts/srt-roles-2022.xsd",
      "https://xbrl.fasb.org/srt/2022/elts/srt-types-2022.xsd",
      "https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd",
      "https://xbrl.fasb.org/us-gaap/2022/elts/us-roles-2022.xsd",
      "https://xbrl.fasb.org/us-gaap/2022/elts/us-types-2022.xsd",
      "https://xbrl.sec.gov/country/2022/country-2022.xsd",
      "https://xbrl.sec.gov/dei/2022/dei-2022.xsd"
     ]
    }
   },
   "elementCount": 775,
   "entityCount": 1,
   "hidden": {
    "http://fasb.org/us-gaap/2022": 19,
    "http://www.veeco.com/20221231": 3,
    "http://xbrl.sec.gov/dei/2022": 4,
    "total": 26
   },
   "keyCustom": 59,
   "keyStandard": 416,
   "memberCustom": 44,
   "memberStandard": 53,
   "nsprefix": "veco",
   "nsuri": "http://www.veeco.com/20221231",
   "report": {
    "R1": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "dei:DocumentType",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "document",
     "isDefault": "true",
     "longName": "00090 - Document - Document and Entity Information",
     "menuCat": "Cover",
     "order": "1",
     "role": "http://www.veeco.com/role/DocumentDocumentAndEntityInformation",
     "shortName": "Document and Entity Information",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "dei:DocumentType",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R10": {
     "firstAnchor": {
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:FairValueDisclosuresTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "10301 - Disclosure - Fair Value Measurements",
     "menuCat": "Notes",
     "order": "10",
     "role": "http://www.veeco.com/role/DisclosureFairValueMeasurements",
     "shortName": "Fair Value Measurements",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:FairValueDisclosuresTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R100": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:DeferredTaxAssetsOperatingLossCarryforwards",
      "reportCount": 1,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "41505 - Disclosure - Income Taxes - Operating Loss Carryforwards (Details)",
     "menuCat": "Details",
     "order": "100",
     "role": "http://www.veeco.com/role/DisclosureIncomeTaxesOperatingLossCarryforwardsDetails",
     "shortName": "Income Taxes - Operating Loss Carryforwards (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_12_31_2022_us-gaap_IncomeTaxAuthorityAxis_us-gaap_StateAndLocalJurisdictionMember_FJTorzE9E0O2-5w2lG7XTQ",
      "decimals": "-5",
      "lang": null,
      "name": "us-gaap:OperatingLossCarryforwards",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     }
    },
    "R101": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_12_31_2022_us-gaap_IncomeTaxAuthorityAxis_us-gaap_DomesticCountryMember_us-gaap_TaxCreditCarryforwardAxis_us-gaap_ResearchMember_JSK4sVm52Uad8MbRS3Hinw",
      "decimals": "-5",
      "first": true,
      "lang": null,
      "name": "us-gaap:TaxCreditCarryforwardAmount",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "41506 - Disclosure - Income Taxes - Tax Credit Carryforwards (Details)",
     "menuCat": "Details",
     "order": "101",
     "role": "http://www.veeco.com/role/DisclosureIncomeTaxesTaxCreditCarryforwardsDetails",
     "shortName": "Income Taxes - Tax Credit Carryforwards (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_12_31_2022_us-gaap_IncomeTaxAuthorityAxis_us-gaap_DomesticCountryMember_us-gaap_TaxCreditCarryforwardAxis_us-gaap_ResearchMember_JSK4sVm52Uad8MbRS3Hinw",
      "decimals": "-5",
      "first": true,
      "lang": null,
      "name": "us-gaap:TaxCreditCarryforwardAmount",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     }
    },
    "R102": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:SummaryOfIncomeTaxContingenciesTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:UnrecognizedTaxBenefits",
      "reportCount": 1,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "41507 - Disclosure - Income Taxes - Uncertain Tax Positions (Details)",
     "menuCat": "Details",
     "order": "102",
     "role": "http://www.veeco.com/role/DisclosureIncomeTaxesUncertainTaxPositionsDetails",
     "shortName": "Income Taxes - Uncertain Tax Positions (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:SummaryOfIncomeTaxContingenciesTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_12_31_2019_dyqJ8hTIuEW6V2L_RveF0A",
      "decimals": "-3",
      "lang": null,
      "name": "us-gaap:UnrecognizedTaxBenefits",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     }
    },
    "R103": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "us-gaap:SegmentReportingDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": "INF",
      "first": true,
      "lang": null,
      "name": "us-gaap:NumberOfReportableSegments",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_segment_RlYNACzID0m6O5VHI3M3nA",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "41601 - Disclosure - Segment Reporting and Geographic Information - Segment (Details)",
     "menuCat": "Details",
     "order": "103",
     "role": "http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformationSegmentDetails",
     "shortName": "Segment Reporting and Geographic Information - Segment (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "us-gaap:SegmentReportingDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": "INF",
      "first": true,
      "lang": null,
      "name": "us-gaap:NumberOfReportableSegments",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_segment_RlYNACzID0m6O5VHI3M3nA",
      "xsiNil": "false"
     }
    },
    "R104": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax",
      "reportCount": 1,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "41602 - Disclosure - Segment Reporting and Geographic Information - Geographic (Details)",
     "menuCat": "Details",
     "order": "104",
     "role": "http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformationGeographicDetails",
     "shortName": "Segment Reporting and Geographic Information - Geographic (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsByGeographicalAreasTableTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_srt_StatementGeographicalAxis_country_US_Iqq-3Yh3o0KOcOsQuuWFnw",
      "decimals": "-3",
      "lang": null,
      "name": "us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     }
    },
    "R105": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "us-gaap:SubsequentEventsTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_1_31_2023_dei_LegalEntityAxis_veco_EpiluvacAbMember_us-gaap_SubsequentEventTypeAxis_us-gaap_SubsequentEventMember_bGwG6YtVWESCjdQzt4z_DA",
      "decimals": "INF",
      "first": true,
      "lang": null,
      "name": "dei:EntityNumberOfEmployees",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_employee_W_mzWhkhIEKoXUFE8oNQVg",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "41701 - Disclosure - Subsequent Events (Details)",
     "menuCat": "Details",
     "order": "105",
     "role": "http://www.veeco.com/role/DisclosureSubsequentEventsDetails",
     "shortName": "Subsequent Events (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "us-gaap:SubsequentEventsTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_1_31_2023_dei_LegalEntityAxis_veco_EpiluvacAbMember_us-gaap_SubsequentEventTypeAxis_us-gaap_SubsequentEventMember_bGwG6YtVWESCjdQzt4z_DA",
      "decimals": "INF",
      "first": true,
      "lang": null,
      "name": "dei:EntityNumberOfEmployees",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_employee_W_mzWhkhIEKoXUFE8oNQVg",
      "xsiNil": "false"
     }
    },
    "R106": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "srt:ScheduleOfValuationAndQualifyingAccountsDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:ValuationAllowancesAndReservesBalance",
      "reportCount": 1,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "41801 - Disclosure - Schedule II - Valuation and Qualifying Accounts (Details)",
     "menuCat": "Details",
     "order": "106",
     "role": "http://www.veeco.com/role/DisclosureScheduleIiValuationAndQualifyingAccountsDetails",
     "shortName": "Schedule II - Valuation and Qualifying Accounts (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "srt:ScheduleOfValuationAndQualifyingAccountsDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_12_31_2019_dyqJ8hTIuEW6V2L_RveF0A",
      "decimals": "-3",
      "lang": null,
      "name": "us-gaap:ValuationAllowancesAndReservesBalance",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     }
    },
    "R11": {
     "firstAnchor": {
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:InvestmentsInDebtAndMarketableEquitySecuritiesAndCertainTradingAssetsDisclosureTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "10401 - Disclosure - Investments",
     "menuCat": "Notes",
     "order": "11",
     "role": "http://www.veeco.com/role/DisclosureInvestments",
     "shortName": "Investments",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:InvestmentsInDebtAndMarketableEquitySecuritiesAndCertainTradingAssetsDisclosureTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R12": {
     "firstAnchor": {
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:InventoryDisclosureTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "10501 - Disclosure - Inventories",
     "menuCat": "Notes",
     "order": "12",
     "role": "http://www.veeco.com/role/DisclosureInventories",
     "shortName": "Inventories",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:InventoryDisclosureTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R13": {
     "firstAnchor": {
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:PropertyPlantAndEquipmentDisclosureTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "10601 - Disclosure - Property, Plant, and Equipment",
     "menuCat": "Notes",
     "order": "13",
     "role": "http://www.veeco.com/role/DisclosurePropertyPlantAndEquipment",
     "shortName": "Property, Plant, and Equipment",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:PropertyPlantAndEquipmentDisclosureTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R14": {
     "firstAnchor": {
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:GoodwillAndIntangibleAssetsDisclosureTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "10701 - Disclosure - Goodwill and Intangible Assets",
     "menuCat": "Notes",
     "order": "14",
     "role": "http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssets",
     "shortName": "Goodwill and Intangible Assets",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:GoodwillAndIntangibleAssetsDisclosureTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R15": {
     "firstAnchor": {
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:AccountsPayableAndAccruedLiabilitiesDisclosureTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "10801 - Disclosure - Accrued Expenses and Other Liabilities",
     "menuCat": "Notes",
     "order": "15",
     "role": "http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilities",
     "shortName": "Accrued Expenses and Other Liabilities",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:AccountsPayableAndAccruedLiabilitiesDisclosureTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R16": {
     "firstAnchor": {
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:CommitmentsAndContingenciesDisclosureTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "10901 - Disclosure - Commitments and Contingencies",
     "menuCat": "Notes",
     "order": "16",
     "role": "http://www.veeco.com/role/DisclosureCommitmentsAndContingencies",
     "shortName": "Commitments and Contingencies",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:CommitmentsAndContingenciesDisclosureTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R17": {
     "firstAnchor": {
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:DebtDisclosureTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "11001 - Disclosure - Debt",
     "menuCat": "Notes",
     "order": "17",
     "role": "http://www.veeco.com/role/DisclosureDebt",
     "shortName": "Debt",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:DebtDisclosureTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R18": {
     "firstAnchor": {
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:StockholdersEquityNoteDisclosureTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "11101 - Disclosure - Stockholders' Equity",
     "menuCat": "Notes",
     "order": "18",
     "role": "http://www.veeco.com/role/DisclosureStockholdersEquity",
     "shortName": "Stockholders' Equity",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:StockholdersEquityNoteDisclosureTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R19": {
     "firstAnchor": {
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "11201 - Disclosure - Stock Plans",
     "menuCat": "Notes",
     "order": "19",
     "role": "http://www.veeco.com/role/DisclosureStockPlans",
     "shortName": "Stock Plans",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R2": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:CashAndCashEquivalentsAtCarryingValue",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     },
     "groupType": "statement",
     "isDefault": "false",
     "longName": "00100 - Statement - Consolidated Balance Sheets",
     "menuCat": "Statements",
     "order": "2",
     "role": "http://www.veeco.com/role/StatementConsolidatedBalanceSheets",
     "shortName": "Consolidated Balance Sheets",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:CashAndCashEquivalentsAtCarryingValue",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     }
    },
    "R20": {
     "firstAnchor": {
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:PensionAndOtherPostretirementBenefitsDisclosureTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "11301 - Disclosure - Retirement Plans",
     "menuCat": "Notes",
     "order": "20",
     "role": "http://www.veeco.com/role/DisclosureRetirementPlans",
     "shortName": "Retirement Plans",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:PensionAndOtherPostretirementBenefitsDisclosureTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R21": {
     "firstAnchor": {
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:DisposalGroupsIncludingDiscontinuedOperationsDisclosureTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "11401 - Disclosure - Dispositions",
     "menuCat": "Notes",
     "order": "21",
     "role": "http://www.veeco.com/role/DisclosureDispositions",
     "shortName": "Dispositions",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:DisposalGroupsIncludingDiscontinuedOperationsDisclosureTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R22": {
     "firstAnchor": {
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:IncomeTaxDisclosureTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "11501 - Disclosure - Income Taxes",
     "menuCat": "Notes",
     "order": "22",
     "role": "http://www.veeco.com/role/DisclosureIncomeTaxes",
     "shortName": "Income Taxes",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:IncomeTaxDisclosureTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R23": {
     "firstAnchor": {
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:SegmentReportingDisclosureTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "11601 - Disclosure - Segment Reporting and Geographic Information",
     "menuCat": "Notes",
     "order": "23",
     "role": "http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformation",
     "shortName": "Segment Reporting and Geographic Information",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:SegmentReportingDisclosureTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R24": {
     "firstAnchor": {
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:SubsequentEventsTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "11701 - Disclosure - Subsequent Events",
     "menuCat": "Notes",
     "order": "24",
     "role": "http://www.veeco.com/role/DisclosureSubsequentEvents",
     "shortName": "Subsequent Events",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:SubsequentEventsTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R25": {
     "firstAnchor": {
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "srt:ScheduleOfValuationAndQualifyingAccountsDisclosureTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "11801 - Disclosure - Schedule II - Valuation and Qualifying Accounts",
     "menuCat": "Notes",
     "order": "25",
     "role": "http://www.veeco.com/role/DisclosureScheduleIiValuationAndQualifyingAccounts",
     "shortName": "Schedule II - Valuation and Qualifying Accounts",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "srt:ScheduleOfValuationAndQualifyingAccountsDisclosureTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R26": {
     "firstAnchor": {
      "ancestors": [
       "us-gaap:OrganizationConsolidationBasisOfPresentationBusinessDescriptionAndAccountingPoliciesTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:FiscalPeriod",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "20102 - Disclosure - Significant Accounting Policies (Policies)",
     "menuCat": "Policies",
     "order": "26",
     "role": "http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesPolicies",
     "shortName": "Significant Accounting Policies (Policies)",
     "subGroupType": "policies",
     "uniqueAnchor": {
      "ancestors": [
       "us-gaap:OrganizationConsolidationBasisOfPresentationBusinessDescriptionAndAccountingPoliciesTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:FiscalPeriod",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R27": {
     "firstAnchor": {
      "ancestors": [
       "us-gaap:NewAccountingPronouncementsPolicyPolicyTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ScheduleOfNewAccountingPronouncementsAndChangesInAccountingPrinciplesTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "30103 - Disclosure - Significant Accounting Policies (Tables)",
     "menuCat": "Tables",
     "order": "27",
     "role": "http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesTables",
     "shortName": "Significant Accounting Policies (Tables)",
     "subGroupType": "tables",
     "uniqueAnchor": {
      "ancestors": [
       "us-gaap:NewAccountingPronouncementsPolicyPolicyTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ScheduleOfNewAccountingPronouncementsAndChangesInAccountingPrinciplesTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R28": {
     "firstAnchor": {
      "ancestors": [
       "us-gaap:EarningsPerShareTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "30203 - Disclosure - Income Per Common Share (Tables)",
     "menuCat": "Tables",
     "order": "28",
     "role": "http://www.veeco.com/role/DisclosureIncomePerCommonShareTables",
     "shortName": "Income Per Common Share (Tables)",
     "subGroupType": "tables",
     "uniqueAnchor": {
      "ancestors": [
       "us-gaap:EarningsPerShareTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R29": {
     "firstAnchor": {
      "ancestors": [
       "us-gaap:FairValueDisclosuresTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:FairValueAssetsMeasuredOnRecurringBasisTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "30303 - Disclosure - Fair Value Measurements (Tables)",
     "menuCat": "Tables",
     "order": "29",
     "role": "http://www.veeco.com/role/DisclosureFairValueMeasurementsTables",
     "shortName": "Fair Value Measurements (Tables)",
     "subGroupType": "tables",
     "uniqueAnchor": {
      "ancestors": [
       "us-gaap:FairValueDisclosuresTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:FairValueAssetsMeasuredOnRecurringBasisTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R3": {
     "firstAnchor": {
      "ancestors": [
       "us-gaap:PreferredStockParOrStatedValuePerShare",
       "p",
       "td",
       "tr",
       "table",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w",
      "decimals": "INF",
      "first": true,
      "lang": null,
      "name": "us-gaap:PreferredStockParOrStatedValuePerShare",
      "reportCount": 1,
      "unitRef": "Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg",
      "xsiNil": "false"
     },
     "groupType": "statement",
     "isDefault": "false",
     "longName": "00105 - Statement - Consolidated Balance Sheets (Parenthetical)",
     "menuCat": "Statements",
     "order": "3",
     "role": "http://www.veeco.com/role/StatementConsolidatedBalanceSheetsParenthetical",
     "shortName": "Consolidated Balance Sheets (Parenthetical)",
     "subGroupType": "parenthetical",
     "uniqueAnchor": {
      "ancestors": [
       "us-gaap:PreferredStockSharesAuthorized",
       "p",
       "td",
       "tr",
       "table",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w",
      "decimals": "INF",
      "lang": null,
      "name": "us-gaap:PreferredStockSharesAuthorized",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ",
      "xsiNil": "false"
     }
    },
    "R30": {
     "firstAnchor": {
      "ancestors": [
       "us-gaap:InvestmentsInDebtAndMarketableEquitySecuritiesAndCertainTradingAssetsDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ScheduleOfAvailableForSaleSecuritiesReconciliationTableTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "30403 - Disclosure - Investments (Tables)",
     "menuCat": "Tables",
     "order": "30",
     "role": "http://www.veeco.com/role/DisclosureInvestmentsTables",
     "shortName": "Investments (Tables)",
     "subGroupType": "tables",
     "uniqueAnchor": {
      "ancestors": [
       "us-gaap:InvestmentsInDebtAndMarketableEquitySecuritiesAndCertainTradingAssetsDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ScheduleOfAvailableForSaleSecuritiesReconciliationTableTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R31": {
     "firstAnchor": {
      "ancestors": [
       "us-gaap:InventoryDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ScheduleOfInventoryCurrentTableTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "30503 - Disclosure - Inventories (Tables)",
     "menuCat": "Tables",
     "order": "31",
     "role": "http://www.veeco.com/role/DisclosureInventoriesTables",
     "shortName": "Inventories (Tables)",
     "subGroupType": "tables",
     "uniqueAnchor": {
      "ancestors": [
       "us-gaap:InventoryDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ScheduleOfInventoryCurrentTableTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R32": {
     "firstAnchor": {
      "ancestors": [
       "us-gaap:PropertyPlantAndEquipmentDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:PropertyPlantAndEquipmentTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "30603 - Disclosure - Property, Plant, and Equipment (Tables)",
     "menuCat": "Tables",
     "order": "32",
     "role": "http://www.veeco.com/role/DisclosurePropertyPlantAndEquipmentTables",
     "shortName": "Property, Plant, and Equipment (Tables)",
     "subGroupType": "tables",
     "uniqueAnchor": {
      "ancestors": [
       "us-gaap:PropertyPlantAndEquipmentDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:PropertyPlantAndEquipmentTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R33": {
     "firstAnchor": {
      "ancestors": [
       "us-gaap:GoodwillAndIntangibleAssetsDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ScheduleOfGoodwillTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "30703 - Disclosure - Goodwill and Intangible Assets (Tables)",
     "menuCat": "Tables",
     "order": "33",
     "role": "http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssetsTables",
     "shortName": "Goodwill and Intangible Assets (Tables)",
     "subGroupType": "tables",
     "uniqueAnchor": {
      "ancestors": [
       "us-gaap:GoodwillAndIntangibleAssetsDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ScheduleOfGoodwillTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R34": {
     "firstAnchor": {
      "ancestors": [
       "us-gaap:AccountsPayableAndAccruedLiabilitiesDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ScheduleOfAccruedLiabilitiesTableTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "30803 - Disclosure - Accrued Expenses and Other Liabilities (Tables)",
     "menuCat": "Tables",
     "order": "34",
     "role": "http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesTables",
     "shortName": "Accrued Expenses and Other Liabilities (Tables)",
     "subGroupType": "tables",
     "uniqueAnchor": {
      "ancestors": [
       "us-gaap:AccountsPayableAndAccruedLiabilitiesDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ScheduleOfAccruedLiabilitiesTableTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R35": {
     "firstAnchor": {
      "ancestors": [
       "us-gaap:CommitmentsAndContingenciesDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ScheduleOfProductWarrantyLiabilityTableTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "30903 - Disclosure - Commitments and Contingencies (Tables)",
     "menuCat": "Tables",
     "order": "35",
     "role": "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesTables",
     "shortName": "Commitments and Contingencies (Tables)",
     "subGroupType": "tables",
     "uniqueAnchor": {
      "ancestors": [
       "us-gaap:CommitmentsAndContingenciesDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ScheduleOfProductWarrantyLiabilityTableTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R36": {
     "firstAnchor": {
      "ancestors": [
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ConvertibleDebtTableTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "31003 - Disclosure - Debt (Tables)",
     "menuCat": "Tables",
     "order": "36",
     "role": "http://www.veeco.com/role/DisclosureDebtTables",
     "shortName": "Debt (Tables)",
     "subGroupType": "tables",
     "uniqueAnchor": {
      "ancestors": [
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ConvertibleDebtTableTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R37": {
     "firstAnchor": {
      "ancestors": [
       "us-gaap:StockholdersEquityNoteDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "31103 - Disclosure - Stockholders' Equity (Tables)",
     "menuCat": "Tables",
     "order": "37",
     "role": "http://www.veeco.com/role/DisclosureStockholdersEquityTables",
     "shortName": "Stockholders' Equity (Tables)",
     "subGroupType": "tables",
     "uniqueAnchor": {
      "ancestors": [
       "us-gaap:StockholdersEquityNoteDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R38": {
     "firstAnchor": {
      "ancestors": [
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ScheduleOfEmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "31203 - Disclosure - Stock Plans (Tables)",
     "menuCat": "Tables",
     "order": "38",
     "role": "http://www.veeco.com/role/DisclosureStockPlansTables",
     "shortName": "Stock Plans (Tables)",
     "subGroupType": "tables",
     "uniqueAnchor": {
      "ancestors": [
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ScheduleOfEmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R39": {
     "firstAnchor": {
      "ancestors": [
       "us-gaap:IncomeTaxDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ScheduleOfIncomeBeforeIncomeTaxDomesticAndForeignTableTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "31503 - Disclosure - Income Taxes (Tables)",
     "menuCat": "Tables",
     "order": "39",
     "role": "http://www.veeco.com/role/DisclosureIncomeTaxesTables",
     "shortName": "Income Taxes (Tables)",
     "subGroupType": "tables",
     "uniqueAnchor": {
      "ancestors": [
       "us-gaap:IncomeTaxDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ScheduleOfIncomeBeforeIncomeTaxDomesticAndForeignTableTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R4": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax",
      "reportCount": 1,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     },
     "groupType": "statement",
     "isDefault": "false",
     "longName": "00200 - Statement - Consolidated Statements of Operations",
     "menuCat": "Statements",
     "order": "4",
     "role": "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations",
     "shortName": "Consolidated Statements of Operations",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": "-3",
      "lang": null,
      "name": "us-gaap:CostOfGoodsAndServicesSold",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     }
    },
    "R40": {
     "firstAnchor": {
      "ancestors": [
       "us-gaap:SegmentReportingDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ScheduleOfEntityWideInformationRevenueFromExternalCustomersByProductsAndServicesTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "31603 - Disclosure - Segment Reporting and Geographic Information (Tables)",
     "menuCat": "Tables",
     "order": "40",
     "role": "http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformationTables",
     "shortName": "Segment Reporting and Geographic Information (Tables)",
     "subGroupType": "tables",
     "uniqueAnchor": {
      "ancestors": [
       "us-gaap:SegmentReportingDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ScheduleOfEntityWideInformationRevenueFromExternalCustomersByProductsAndServicesTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R41": {
     "firstAnchor": {
      "ancestors": [
       "us-gaap:FiscalPeriodDuration",
       "us-gaap:FiscalPeriodDuration",
       "us-gaap:FiscalPeriodDuration",
       "p",
       "us-gaap:FiscalPeriod",
       "us-gaap:OrganizationConsolidationBasisOfPresentationBusinessDescriptionAndAccountingPoliciesTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_10_1_2022_To_12_31_2022_uExZe-pG7kOQct7OU2J4Dg",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:FiscalPeriodDuration",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "40101 - Disclosure - Significant Accounting Policies - Description of Business and Basis of Presentation (Details)",
     "menuCat": "Details",
     "order": "41",
     "role": "http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesDescriptionOfBusinessAndBasisOfPresentationDetails",
     "shortName": "Significant Accounting Policies - Description of Business and Basis of Presentation (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "us-gaap:FiscalPeriodDuration",
       "us-gaap:FiscalPeriodDuration",
       "us-gaap:FiscalPeriodDuration",
       "p",
       "us-gaap:FiscalPeriod",
       "us-gaap:OrganizationConsolidationBasisOfPresentationBusinessDescriptionAndAccountingPoliciesTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_10_1_2022_To_12_31_2022_uExZe-pG7kOQct7OU2J4Dg",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:FiscalPeriodDuration",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R42": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "ix:continuation",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:RevenuePracticalExpedientIncrementalCostOfObtainingContract",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "40102 - Disclosure - Significant Accounting Policies - Revenue Recognition (Details)",
     "menuCat": "Details",
     "order": "42",
     "role": "http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesRevenueRecognitionDetails",
     "shortName": "Significant Accounting Policies - Revenue Recognition (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "ix:continuation",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:RevenuePracticalExpedientIncrementalCostOfObtainingContract",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R43": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "us-gaap:StandardProductWarrantyPolicy",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "veco:ProductWarrantyPeriod",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "40103 - Disclosure - Significant Accounting Policies - Warranty Costs (Details)",
     "menuCat": "Details",
     "order": "43",
     "role": "http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesWarrantyCostsDetails",
     "shortName": "Significant Accounting Policies - Warranty Costs (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "us-gaap:StandardProductWarrantyPolicy",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "veco:ProductWarrantyPeriod",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R44": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "us-gaap:AdvertisingCostsPolicyTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": "-5",
      "first": true,
      "lang": null,
      "name": "us-gaap:AdvertisingExpense",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "40104 - Disclosure - Significant Accounting Policies - Advertising Expense (Details)",
     "menuCat": "Details",
     "order": "44",
     "role": "http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesAdvertisingExpenseDetails",
     "shortName": "Significant Accounting Policies - Advertising Expense (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "us-gaap:AdvertisingCostsPolicyTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": "-5",
      "first": true,
      "lang": null,
      "name": "us-gaap:AdvertisingExpense",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     }
    },
    "R45": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "us-gaap:ShareBasedCompensationOptionAndIncentivePlansPolicy",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w",
      "decimals": "INF",
      "first": true,
      "lang": null,
      "name": "veco:ShareBasedCompensationArrangementByShareBasedPaymentAwardServiceConditionsAndGradedVestingNumberOfAwards",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_item_aj1ZEHofC0agSXOi_C6c5A",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "40105 - Disclosure - Significant Accounting Policies - Accounting for Share-Based Compensation (Details)",
     "menuCat": "Details",
     "order": "45",
     "role": "http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesAccountingForShareBasedCompensationDetails",
     "shortName": "Significant Accounting Policies - Accounting for Share-Based Compensation (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "us-gaap:ShareBasedCompensationOptionAndIncentivePlansPolicy",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w",
      "decimals": "INF",
      "first": true,
      "lang": null,
      "name": "veco:ShareBasedCompensationArrangementByShareBasedPaymentAwardServiceConditionsAndGradedVestingNumberOfAwards",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_item_aj1ZEHofC0agSXOi_C6c5A",
      "xsiNil": "false"
     }
    },
    "R46": {
     "firstAnchor": {
      "ancestors": [
       "us-gaap:AllowanceForDoubtfulAccountsReceivableCurrent",
       "p",
       "us-gaap:ConcentrationRiskCreditRisk",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w",
      "decimals": "-5",
      "first": true,
      "lang": null,
      "name": "us-gaap:AllowanceForDoubtfulAccountsReceivableCurrent",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "40106 - Disclosure - Significant Accounting Policies - Concentration of Credit Risk (Details)",
     "menuCat": "Details",
     "order": "46",
     "role": "http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesConcentrationOfCreditRiskDetails",
     "shortName": "Significant Accounting Policies - Concentration of Credit Risk (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "us-gaap:AllowanceForDoubtfulAccountsReceivableCurrent",
       "p",
       "us-gaap:ConcentrationRiskCreditRisk",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w",
      "decimals": "-5",
      "first": true,
      "lang": null,
      "name": "us-gaap:AllowanceForDoubtfulAccountsReceivableCurrent",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     }
    },
    "R47": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "veco:CashCashEquivalentsAndShortTermInvestmentsPolicyTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w",
      "decimals": "-5",
      "first": true,
      "lang": null,
      "name": "us-gaap:CashEquivalentsAtCarryingValue",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "40107 - Disclosure - Significant Accounting Policies - Cash, Cash Equivalents, and Short-term Investments (Details)",
     "menuCat": "Details",
     "order": "47",
     "role": "http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesCashCashEquivalentsAndShortTermInvestmentsDetails",
     "shortName": "Significant Accounting Policies - Cash, Cash Equivalents, and Short-term Investments (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "veco:CashCashEquivalentsAndShortTermInvestmentsPolicyTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w",
      "decimals": "-5",
      "first": true,
      "lang": null,
      "name": "us-gaap:CashEquivalentsAtCarryingValue",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     }
    },
    "R48": {
     "firstAnchor": null,
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "40108 - Disclosure - Significant Accounting Policies - Goodwill and Indefinite-Lived Intangibles (Details)",
     "menuCat": "Details",
     "order": "48",
     "role": "http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesGoodwillAndIndefiniteLivedIntangiblesDetails",
     "shortName": "Significant Accounting Policies - Goodwill and Indefinite-Lived Intangibles (Details)",
     "subGroupType": "details",
     "uniqueAnchor": null
    },
    "R49": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:LongTermDebtNoncurrent",
      "reportCount": 1,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "40109 - Disclosure - Significant Accounting Policies - Recently Adopted Accounting Standards (Details)",
     "menuCat": "Details",
     "order": "49",
     "role": "http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesRecentlyAdoptedAccountingStandardsDetails",
     "shortName": "Significant Accounting Policies - Recently Adopted Accounting Standards (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "us-gaap:NewAccountingPronouncementsPolicyPolicyTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_4_1_2020_us-gaap_AdjustmentsForNewAccountingPronouncementsAxis_us-gaap_AccountingStandardsUpdate201912Member_pNbALjFiLEiNFwxB8zN-cA",
      "decimals": null,
      "lang": "en-US",
      "name": "us-gaap:ChangeInAccountingPrincipleAccountingStandardsUpdateAdopted",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R5": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:NetIncomeLoss",
      "reportCount": 1,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     },
     "groupType": "statement",
     "isDefault": "false",
     "longName": "00300 - Statement - Consolidated Statements of Comprehensive Income (Loss)",
     "menuCat": "Statements",
     "order": "5",
     "role": "http://www.veeco.com/role/StatementConsolidatedStatementsOfComprehensiveIncomeLoss",
     "shortName": "Consolidated Statements of Comprehensive Income (Loss)",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": "-3",
      "lang": null,
      "name": "us-gaap:OtherComprehensiveIncomeUnrealizedHoldingGainLossOnSecuritiesArisingDuringPeriodNetOfTax",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     }
    },
    "R50": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock",
       "us-gaap:EarningsPerShareTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "40201 - Disclosure - Income Per Common Share - Basic and Diluted (Details)",
     "menuCat": "Details",
     "order": "50",
     "role": "http://www.veeco.com/role/DisclosureIncomePerCommonShareBasicAndDilutedDetails",
     "shortName": "Income Per Common Share - Basic and Diluted (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock",
       "us-gaap:EarningsPerShareTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     }
    },
    "R51": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock",
       "us-gaap:EarningsPerShareTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "veco:SecuritiesExcludedFromComputationOfBasicEarningsPerShareAmount",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "40202 - Disclosure - Income Per Common Share - Shares Excluded from EPS (Details)",
     "menuCat": "Details",
     "order": "51",
     "role": "http://www.veeco.com/role/DisclosureIncomePerCommonShareSharesExcludedFromEpsDetails",
     "shortName": "Income Per Common Share - Shares Excluded from EPS (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock",
       "us-gaap:EarningsPerShareTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "veco:SecuritiesExcludedFromComputationOfBasicEarningsPerShareAmount",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ",
      "xsiNil": "false"
     }
    },
    "R52": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:FairValueAssetsMeasuredOnRecurringBasisTextBlock",
       "us-gaap:FairValueDisclosuresTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_12_31_2022_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_S6bYObjavkCTbU5xddLx7g",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "veco:CashEquivalentsFairValueDisclosure",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "40301 - Disclosure - Fair Value Measurements (Details)",
     "menuCat": "Details",
     "order": "52",
     "role": "http://www.veeco.com/role/DisclosureFairValueMeasurementsDetails",
     "shortName": "Fair Value Measurements (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:FairValueAssetsMeasuredOnRecurringBasisTextBlock",
       "us-gaap:FairValueDisclosuresTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_12_31_2022_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_S6bYObjavkCTbU5xddLx7g",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "veco:CashEquivalentsFairValueDisclosure",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     }
    },
    "R53": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfAvailableForSaleSecuritiesReconciliationTableTextBlock",
       "us-gaap:InvestmentsInDebtAndMarketableEquitySecuritiesAndCertainTradingAssetsDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:AvailableForSaleDebtSecuritiesAmortizedCostBasis",
      "reportCount": 1,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "40401 - Disclosure - Investments - Available-For-Sale Securities (Details)",
     "menuCat": "Details",
     "order": "53",
     "role": "http://www.veeco.com/role/DisclosureInvestmentsAvailableForSaleSecuritiesDetails",
     "shortName": "Investments - Available-For-Sale Securities (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfAvailableForSaleSecuritiesReconciliationTableTextBlock",
       "us-gaap:InvestmentsInDebtAndMarketableEquitySecuritiesAndCertainTradingAssetsDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w",
      "decimals": "-3",
      "lang": null,
      "name": "us-gaap:AvailableForSaleDebtSecuritiesAccumulatedGrossUnrealizedLossBeforeTax",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     }
    },
    "R54": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "veco:ImpairmentLossesInvestmentsNonCash",
      "reportCount": 1,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "40402 - Disclosure - Investments - Other Investment (Details)",
     "menuCat": "Details",
     "order": "54",
     "role": "http://www.veeco.com/role/DisclosureInvestmentsOtherInvestmentDetails",
     "shortName": "Investments - Other Investment (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_12_31_2021_srt_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_veco_OtherNonMarketableInvestmentMember_x1RDLI5eNkKRCAhimMtNXg",
      "decimals": "-5",
      "lang": null,
      "name": "us-gaap:EquitySecuritiesWithoutReadilyDeterminableFairValueAmount",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     }
    },
    "R55": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfInventoryCurrentTableTextBlock",
       "us-gaap:InventoryDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:InventoryRawMaterialsNetOfReserves",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "40501 - Disclosure - Inventories (Details)",
     "menuCat": "Details",
     "order": "55",
     "role": "http://www.veeco.com/role/DisclosureInventoriesDetails",
     "shortName": "Inventories (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfInventoryCurrentTableTextBlock",
       "us-gaap:InventoryDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:InventoryRawMaterialsNetOfReserves",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     }
    },
    "R56": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:PropertyPlantAndEquipmentTextBlock",
       "us-gaap:PropertyPlantAndEquipmentDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:PropertyPlantAndEquipmentGross",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "40601 - Disclosure - Property, Plant, and Equipment - Property and Equipment (Details)",
     "menuCat": "Details",
     "order": "56",
     "role": "http://www.veeco.com/role/DisclosurePropertyPlantAndEquipmentPropertyAndEquipmentDetails",
     "shortName": "Property, Plant, and Equipment - Property and Equipment (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:PropertyPlantAndEquipmentTextBlock",
       "us-gaap:PropertyPlantAndEquipmentDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:PropertyPlantAndEquipmentGross",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     }
    },
    "R57": {
     "firstAnchor": {
      "ancestors": [
       "us-gaap:GoodwillPeriodIncreaseDecrease",
       "p",
       "us-gaap:GoodwillAndIntangibleAssetsDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": "-5",
      "first": true,
      "lang": null,
      "name": "us-gaap:GoodwillPeriodIncreaseDecrease",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "40701 - Disclosure - Goodwill and Intangible Assets - Goodwill (Details)",
     "menuCat": "Details",
     "order": "57",
     "role": "http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssetsGoodwillDetails",
     "shortName": "Goodwill and Intangible Assets - Goodwill (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "us-gaap:GoodwillPeriodIncreaseDecrease",
       "p",
       "us-gaap:GoodwillAndIntangibleAssetsDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": "-5",
      "first": true,
      "lang": null,
      "name": "us-gaap:GoodwillPeriodIncreaseDecrease",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     }
    },
    "R58": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "veco:ScheduleOfIntangibleAssetsExcludingGoodwillTableTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:FiniteLivedIntangibleAssetsRemainingAmortizationPeriod1",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "40702 - Disclosure - Goodwill and Intangible Assets - Intangible Assets (Details)",
     "menuCat": "Details",
     "order": "58",
     "role": "http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssetsIntangibleAssetsDetails",
     "shortName": "Goodwill and Intangible Assets - Intangible Assets (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "veco:ScheduleOfIntangibleAssetsExcludingGoodwillTableTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:FiniteLivedIntangibleAssetsRemainingAmortizationPeriod1",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R59": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleofFiniteLivedIntangibleAssetsFutureAmortizationExpenseTableTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:FiniteLivedIntangibleAssetsAmortizationExpenseNextTwelveMonths",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "40703 - Disclosure - Goodwill and Intangible Assets - Amortization (Details)",
     "menuCat": "Details",
     "order": "59",
     "role": "http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssetsAmortizationDetails",
     "shortName": "Goodwill and Intangible Assets - Amortization (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleofFiniteLivedIntangibleAssetsFutureAmortizationExpenseTableTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:FiniteLivedIntangibleAssetsAmortizationExpenseNextTwelveMonths",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     }
    },
    "R6": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_12_31_2019_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_FsmAawc2DEOmzDOqP6upWw",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:StockholdersEquity",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     },
     "groupType": "statement",
     "isDefault": "false",
     "longName": "00400 - Statement - Consolidated Statements of Stockholders' Equity",
     "menuCat": "Statements",
     "order": "6",
     "role": "http://www.veeco.com/role/StatementConsolidatedStatementsOfStockholdersEquity",
     "shortName": "Consolidated Statements of Stockholders' Equity",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_12_31_2019_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_FsmAawc2DEOmzDOqP6upWw",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:StockholdersEquity",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     }
    },
    "R60": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfAccruedLiabilitiesTableTextBlock",
       "us-gaap:AccountsPayableAndAccruedLiabilitiesDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:EmployeeRelatedLiabilitiesCurrent",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "40801 - Disclosure - Accrued Expenses and Other Liabilities - Components (Details)",
     "menuCat": "Details",
     "order": "60",
     "role": "http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesComponentsDetails",
     "shortName": "Accrued Expenses and Other Liabilities - Components (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfAccruedLiabilitiesTableTextBlock",
       "us-gaap:AccountsPayableAndAccruedLiabilitiesDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:EmployeeRelatedLiabilitiesCurrent",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     }
    },
    "R61": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "us-gaap:AccountsPayableAndAccruedLiabilitiesDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w",
      "decimals": "-5",
      "first": true,
      "lang": null,
      "name": "us-gaap:ContractWithCustomerRefundLiabilityCurrent",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "40802 - Disclosure - Accrued Expenses and Other Liabilities - Customer deposits and deferred revenue (Details)",
     "menuCat": "Details",
     "order": "61",
     "role": "http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesCustomerDepositsAndDeferredRevenueDetails",
     "shortName": "Accrued Expenses and Other Liabilities - Customer deposits and deferred revenue (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "us-gaap:AccountsPayableAndAccruedLiabilitiesDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w",
      "decimals": "-5",
      "first": true,
      "lang": null,
      "name": "us-gaap:ContractWithCustomerRefundLiabilityCurrent",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     }
    },
    "R62": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "p",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w",
      "decimals": "-5",
      "first": true,
      "lang": null,
      "name": "us-gaap:RevenueRemainingPerformanceObligation",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "40803 - Disclosure - Accrued Expenses and Other Liabilities - Performance Obligation Amount (Details)",
     "menuCat": "Details",
     "order": "62",
     "role": "http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesPerformanceObligationAmountDetails",
     "shortName": "Accrued Expenses and Other Liabilities - Performance Obligation Amount (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "p",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w",
      "decimals": "-5",
      "first": true,
      "lang": null,
      "name": "us-gaap:RevenueRemainingPerformanceObligation",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     }
    },
    "R63": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:RevenuePracticalExpedientRemainingPerformanceObligation",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "40804 - Disclosure - Accrued Expenses and Other Liabilities - Performance Obligation Timing (Details)",
     "menuCat": "Details",
     "order": "63",
     "role": "http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesPerformanceObligationTimingDetails",
     "shortName": "Accrued Expenses and Other Liabilities - Performance Obligation Timing (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:RevenuePracticalExpedientRemainingPerformanceObligation",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R64": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_12_31_2022_us-gaap_BalanceSheetLocationAxis_us-gaap_OtherLiabilitiesMember_79zlpumRSUyxTgOHdVLA_Q",
      "decimals": "-5",
      "first": true,
      "lang": null,
      "name": "us-gaap:AssetRetirementObligationsNoncurrent",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "40805 - Disclosure - Accrued Expenses and Other Liabilities - Other liabilities (Details)",
     "menuCat": "Details",
     "order": "64",
     "role": "http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesOtherLiabilitiesDetails",
     "shortName": "Accrued Expenses and Other Liabilities - Other liabilities (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_12_31_2022_us-gaap_BalanceSheetLocationAxis_us-gaap_OtherLiabilitiesMember_79zlpumRSUyxTgOHdVLA_Q",
      "decimals": "-5",
      "first": true,
      "lang": null,
      "name": "us-gaap:AssetRetirementObligationsNoncurrent",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     }
    },
    "R65": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfProductWarrantyLiabilityTableTextBlock",
       "us-gaap:CommitmentsAndContingenciesDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:ProductWarrantyAccrual",
      "reportCount": 1,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "40901 - Disclosure - Commitments and Contingencies - Warranty (Details)",
     "menuCat": "Details",
     "order": "65",
     "role": "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesWarrantyDetails",
     "shortName": "Commitments and Contingencies - Warranty (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfProductWarrantyLiabilityTableTextBlock",
       "us-gaap:CommitmentsAndContingenciesDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_12_31_2019_dyqJ8hTIuEW6V2L_RveF0A",
      "decimals": "-3",
      "lang": null,
      "name": "us-gaap:ProductWarrantyAccrual",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     }
    },
    "R66": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "us-gaap:CommitmentsAndContingenciesDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:LesseeOperatingLeaseRenewalTerm",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "40902 - Disclosure - Commitments and Contingencies - Lease terms (Details)",
     "menuCat": "Details",
     "order": "66",
     "role": "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesLeaseTermsDetails",
     "shortName": "Commitments and Contingencies - Lease terms (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "us-gaap:CommitmentsAndContingenciesDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:LesseeOperatingLeaseRenewalTerm",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R67": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:LesseeOperatingLeaseLiabilityMaturityTableTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "40903 - Disclosure - Commitments and Contingencies - Minimum lease commitments (Details)",
     "menuCat": "Details",
     "order": "67",
     "role": "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesMinimumLeaseCommitmentsDetails",
     "shortName": "Commitments and Contingencies - Minimum lease commitments (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:LesseeOperatingLeaseLiabilityMaturityTableTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     }
    },
    "R68": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": "-5",
      "first": true,
      "lang": null,
      "name": "us-gaap:OperatingLeaseCost",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "40904 - Disclosure - Commitments and Contingencies - Lease costs (Details)",
     "menuCat": "Details",
     "order": "68",
     "role": "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesLeaseCostsDetails",
     "shortName": "Commitments and Contingencies - Lease costs (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": "-5",
      "first": true,
      "lang": null,
      "name": "us-gaap:OperatingLeaseCost",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     }
    },
    "R69": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_8_1_2018_To_8_31_2018_srt_LitigationCaseAxis_veco_UltratechAcquisitionLitigationMember_dwYL9J2gC0Oab_FWaninlw",
      "decimals": "INF",
      "first": true,
      "lang": null,
      "name": "us-gaap:LossContingencyNewClaimsFiledNumber",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_case_gtF5dJF030CdqF2FGWQ9yA",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "40905 - Disclosure - Commitments and Contingencies - Legal Proceedings (Details)",
     "menuCat": "Details",
     "order": "69",
     "role": "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesLegalProceedingsDetails",
     "shortName": "Commitments and Contingencies - Legal Proceedings (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_8_1_2018_To_8_31_2018_srt_LitigationCaseAxis_veco_UltratechAcquisitionLitigationMember_dwYL9J2gC0Oab_FWaninlw",
      "decimals": "INF",
      "first": true,
      "lang": null,
      "name": "us-gaap:LossContingencyNewClaimsFiledNumber",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_case_gtF5dJF030CdqF2FGWQ9yA",
      "xsiNil": "false"
     }
    },
    "R7": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:ProfitLoss",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     },
     "groupType": "statement",
     "isDefault": "false",
     "longName": "00500 - Statement - Consolidated Statements of Cash Flows",
     "menuCat": "Statements",
     "order": "7",
     "role": "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows",
     "shortName": "Consolidated Statements of Cash Flows",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:ProfitLoss",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     }
    },
    "R70": {
     "firstAnchor": {
      "ancestors": [
       "veco:NumberOfCustomers",
       "p",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_srt_MajorCustomersAxis_veco_TopTenCustomersMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_S-7J6nBA20enuSmeS4u47A",
      "decimals": "INF",
      "first": true,
      "lang": null,
      "name": "veco:NumberOfCustomers",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_customer_ewo2DglECUO5n4nvx82_SQ",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "40906 - Disclosure - Commitments and Contingencies - Concentration of Credit Risk (Details)",
     "menuCat": "Details",
     "order": "70",
     "role": "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesConcentrationOfCreditRiskDetails",
     "shortName": "Commitments and Contingencies - Concentration of Credit Risk (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "veco:NumberOfCustomers",
       "p",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_srt_MajorCustomersAxis_veco_TopTenCustomersMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_S-7J6nBA20enuSmeS4u47A",
      "decimals": "INF",
      "first": true,
      "lang": null,
      "name": "veco:NumberOfCustomers",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_customer_ewo2DglECUO5n4nvx82_SQ",
      "xsiNil": "false"
     }
    },
    "R71": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_srt_RangeAxis_srt_MinimumMember_srt_StatementGeographicalAxis_veco_GeographicLocationOneMember_urfkXneJaEms9Cl65M7_dg",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "veco:AccountsReceivableCreditPeriod",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "40907 - Disclosure - Commitments and Contingencies - Receivables (Details)",
     "menuCat": "Details",
     "order": "71",
     "role": "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesReceivablesDetails",
     "shortName": "Commitments and Contingencies - Receivables (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_srt_RangeAxis_srt_MinimumMember_srt_StatementGeographicalAxis_veco_GeographicLocationOneMember_urfkXneJaEms9Cl65M7_dg",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "veco:AccountsReceivableCreditPeriod",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R72": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_12_31_2020_JUGLvBeldEeSTj1WqQBVdQ",
      "decimals": "-5",
      "first": true,
      "lang": null,
      "name": "veco:ReceivablePurchaseAgreementMaximumAmount",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "40908 - Disclosure - Commitments and Contingencies - Receivable Purchase Agreement (Details)",
     "menuCat": "Details",
     "order": "72",
     "role": "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesReceivablePurchaseAgreementDetails",
     "shortName": "Commitments and Contingencies - Receivable Purchase Agreement (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_12_31_2020_JUGLvBeldEeSTj1WqQBVdQ",
      "decimals": "-5",
      "first": true,
      "lang": null,
      "name": "veco:ReceivablePurchaseAgreementMaximumAmount",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     }
    },
    "R73": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w",
      "decimals": "-5",
      "first": true,
      "lang": null,
      "name": "us-gaap:DepositAssets",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "40909 - Disclosure - Commitments and Contingencies - Suppliers (Details)",
     "menuCat": "Details",
     "order": "73",
     "role": "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesSuppliersDetails",
     "shortName": "Commitments and Contingencies - Suppliers (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w",
      "decimals": "-5",
      "first": true,
      "lang": null,
      "name": "us-gaap:DepositAssets",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     }
    },
    "R74": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w",
      "decimals": "-5",
      "first": true,
      "lang": null,
      "name": "us-gaap:UnrecordedUnconditionalPurchaseObligationDueInNextRollingTwelveMonths",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "40910 - Disclosure - Commitments and Contingencies - Purchase Commitments and Bank Guarantees (Details)",
     "menuCat": "Details",
     "order": "74",
     "role": "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesPurchaseCommitmentsAndBankGuaranteesDetails",
     "shortName": "Commitments and Contingencies - Purchase Commitments and Bank Guarantees (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w",
      "decimals": "-5",
      "first": true,
      "lang": null,
      "name": "us-gaap:UnrecordedUnconditionalPurchaseObligationDueInNextRollingTwelveMonths",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     }
    },
    "R75": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:ConvertibleDebtTableTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:DebtInstrumentFaceAmount",
      "reportCount": 1,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "41001 - Disclosure - Debt - 2023. 2025 and 2027 Notes (Details)",
     "menuCat": "Details",
     "order": "75",
     "role": "http://www.veeco.com/role/DisclosureDebt20232025And2027NotesDetails",
     "shortName": "Debt - 2023. 2025 and 2027 Notes (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_5_18_2020_To_5_18_2020_82r_aymnikqSCiP3vs1ZlA",
      "decimals": "-5",
      "lang": null,
      "name": "us-gaap:PaymentsForDerivativeInstrumentFinancingActivities",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     }
    },
    "R76": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:PaymentsOfDebtIssuanceCosts",
      "reportCount": 1,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "41002 - Disclosure - Debt - Convertible Senior Notes (Details)",
     "menuCat": "Details",
     "order": "76",
     "role": "http://www.veeco.com/role/DisclosureDebtConvertibleSeniorNotesDetails",
     "shortName": "Debt - Convertible Senior Notes (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_us-gaap_DebtInstrumentAxis_us-gaap_ConvertibleDebtMember_XQJwNQGip0-4rSyYMzx-Zw",
      "decimals": "-3",
      "lang": null,
      "name": "veco:DebtInstrumentPrincipalAmountDenominationForConversionIntoCommonStock",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     }
    },
    "R77": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:ConvertibleDebtTableTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:DebtInstrumentFaceAmount",
      "reportCount": 1,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "41003 - Disclosure - Debt - Carrying Value (Details)",
     "menuCat": "Details",
     "order": "77",
     "role": "http://www.veeco.com/role/DisclosureDebtCarryingValueDetails",
     "shortName": "Debt - Carrying Value (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:ConvertibleDebtTableTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w",
      "decimals": "-3",
      "lang": null,
      "name": "us-gaap:DebtInstrumentUnamortizedDiscountPremiumAndDebtIssuanceCostsNet",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     }
    },
    "R78": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:AmortizationOfFinancingCostsAndDiscounts",
      "reportCount": 1,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "41004 - Disclosure - Debt - Interest Expense (Details)",
     "menuCat": "Details",
     "order": "78",
     "role": "http://www.veeco.com/role/DisclosureDebtInterestExpenseDetails",
     "shortName": "Debt - Interest Expense (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:InterestIncomeAndInterestExpenseDisclosureTableTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": "-3",
      "lang": null,
      "name": "us-gaap:InterestExpenseDebt",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     }
    },
    "R79": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_5_13_2020_us-gaap_DerivativeInstrumentRiskAxis_veco_DerivativeContractCappedCallMember_AmsPhVzUq0WxhxYxtgccOg",
      "decimals": "-5",
      "first": true,
      "lang": null,
      "name": "veco:CappedCallTransactionsPrice",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "41005 - Disclosure - Debt - Capped Call Transactions (Details)",
     "menuCat": "Details",
     "order": "79",
     "role": "http://www.veeco.com/role/DisclosureDebtCappedCallTransactionsDetails",
     "shortName": "Debt - Capped Call Transactions (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_5_13_2020_us-gaap_DerivativeInstrumentRiskAxis_veco_DerivativeContractCappedCallMember_AmsPhVzUq0WxhxYxtgccOg",
      "decimals": "-5",
      "first": true,
      "lang": null,
      "name": "veco:CappedCallTransactionsPrice",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     }
    },
    "R8": {
     "firstAnchor": {
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:OrganizationConsolidationBasisOfPresentationBusinessDescriptionAndAccountingPoliciesTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "10101 - Disclosure - Significant Accounting Policies",
     "menuCat": "Notes",
     "order": "8",
     "role": "http://www.veeco.com/role/DisclosureSignificantAccountingPolicies",
     "shortName": "Significant Accounting Policies",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:OrganizationConsolidationBasisOfPresentationBusinessDescriptionAndAccountingPoliciesTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R80": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "p",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_12_16_2021_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021Member_ddwT9iX1z0adI_mlFlsfeg",
      "decimals": "-6",
      "first": true,
      "lang": null,
      "name": "us-gaap:LineOfCreditFacilityMaximumBorrowingCapacity",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "41006 - Disclosure - Debt - Revolving Credit Facility (Details)",
     "menuCat": "Details",
     "order": "80",
     "role": "http://www.veeco.com/role/DisclosureDebtRevolvingCreditFacilityDetails",
     "shortName": "Debt - Revolving Credit Facility (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "p",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_12_16_2021_us-gaap_DebtInstrumentAxis_veco_RevolvingCreditFacilityDecember2021Member_ddwT9iX1z0adI_mlFlsfeg",
      "decimals": "-6",
      "first": true,
      "lang": null,
      "name": "us-gaap:LineOfCreditFacilityMaximumBorrowingCapacity",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     }
    },
    "R81": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:StockholdersEquity",
      "reportCount": 1,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "41101 - Disclosure - Stockholders' Equity - AOCI Rollforward (Details)",
     "menuCat": "Details",
     "order": "81",
     "role": "http://www.veeco.com/role/DisclosureStockholdersEquityAociRollforwardDetails",
     "shortName": "Stockholders' Equity - AOCI Rollforward (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock",
       "us-gaap:StockholdersEquityNoteDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_6zlsan7E70SaZfNDKUZFwQ",
      "decimals": "-3",
      "lang": null,
      "name": "us-gaap:OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     }
    },
    "R82": {
     "firstAnchor": {
      "ancestors": [
       "us-gaap:PreferredStockParOrStatedValuePerShare",
       "p",
       "td",
       "tr",
       "table",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w",
      "decimals": "INF",
      "first": true,
      "lang": null,
      "name": "us-gaap:PreferredStockParOrStatedValuePerShare",
      "reportCount": 1,
      "unitRef": "Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "41102 - Disclosure - Stockholders' Equity - Preferred Stock (Details)",
     "menuCat": "Details",
     "order": "82",
     "role": "http://www.veeco.com/role/DisclosureStockholdersEquityPreferredStockDetails",
     "shortName": "Stockholders' Equity - Preferred Stock (Details)",
     "subGroupType": "details",
     "uniqueAnchor": null
    },
    "R83": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber",
      "reportCount": 1,
      "unitRef": "Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "41201 - Disclosure - Stock Plans - 2019 Plan (Details)",
     "menuCat": "Details",
     "order": "83",
     "role": "http://www.veeco.com/role/DisclosureStockPlans2019PlanDetails",
     "shortName": "Stock Plans - 2019 Plan (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "p",
       "us-gaap:DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_12_31_2013_us-gaap_PlanNameAxis_veco_InducementStockIncentivePlan2013Member_3P6TBIDpNUGgRvFNIHqw5A",
      "decimals": "INF",
      "lang": null,
      "name": "us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ",
      "xsiNil": "false"
     }
    },
    "R84": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "p",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_12_31_2016_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_aYWHgq11KEuoBBNEV64pyQ",
      "decimals": "-4",
      "first": true,
      "lang": null,
      "name": "us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "41202 - Disclosure - Stock Plans - ESPP (Details)",
     "menuCat": "Details",
     "order": "84",
     "role": "http://www.veeco.com/role/DisclosureStockPlansEsppDetails",
     "shortName": "Stock Plans - ESPP (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "p",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_12_31_2016_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_aYWHgq11KEuoBBNEV64pyQ",
      "decimals": "-4",
      "first": true,
      "lang": null,
      "name": "us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ",
      "xsiNil": "false"
     }
    },
    "R85": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_12_31_2022_us-gaap_PlanNameAxis_veco_StockIncentivePlan2010Member_kkhgLAR_vUO7juC-JnEbpw",
      "decimals": "-5",
      "first": true,
      "lang": null,
      "name": "us-gaap:CommonStockCapitalSharesReservedForFutureIssuance",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "41203 - Disclosure - Stock Plans - Shares Reserved for Future Issuance (Details)",
     "menuCat": "Details",
     "order": "85",
     "role": "http://www.veeco.com/role/DisclosureStockPlansSharesReservedForFutureIssuanceDetails",
     "shortName": "Stock Plans - Shares Reserved for Future Issuance (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_12_31_2022_us-gaap_PlanNameAxis_veco_StockIncentivePlan2010Member_kkhgLAR_vUO7juC-JnEbpw",
      "decimals": "-5",
      "first": true,
      "lang": null,
      "name": "us-gaap:CommonStockCapitalSharesReservedForFutureIssuance",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ",
      "xsiNil": "false"
     }
    },
    "R86": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfEmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:AllocatedShareBasedCompensationExpense",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "41204 - Disclosure - Stock Plans - Recognized Share-based Compensation (Details)",
     "menuCat": "Details",
     "order": "86",
     "role": "http://www.veeco.com/role/DisclosureStockPlansRecognizedShareBasedCompensationDetails",
     "shortName": "Stock Plans - Recognized Share-based Compensation (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfEmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:AllocatedShareBasedCompensationExpense",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     }
    },
    "R87": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfUnrecognizedCompensationCostNonvestedAwardsTableTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "41205 - Disclosure - Stock Plans - Unrecognized Share-based Compensation Costs (Details)",
     "menuCat": "Details",
     "order": "87",
     "role": "http://www.veeco.com/role/DisclosureStockPlansUnrecognizedShareBasedCompensationCostsDetails",
     "shortName": "Stock Plans - Unrecognized Share-based Compensation Costs (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfUnrecognizedCompensationCostNonvestedAwardsTableTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     }
    },
    "R88": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_12_31_2021_yIUCOmu9eUmMErMPCeQXKQ",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber",
      "reportCount": 1,
      "unitRef": "Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "41206 - Disclosure - Stock Plans - Stock Option Activity (Details)",
     "menuCat": "Details",
     "order": "88",
     "role": "http://www.veeco.com/role/DisclosureStockPlansStockOptionActivityDetails",
     "shortName": "Stock Plans - Stock Option Activity (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw",
      "decimals": "-3",
      "lang": null,
      "name": "us-gaap:StockIssuedDuringPeriodSharesStockOptionsExercised",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ",
      "xsiNil": "false"
     }
    },
    "R89": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfOutstandingOptions",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "41207 - Disclosure - Stock Plans - Option Exercise Ranges (Details)",
     "menuCat": "Details",
     "order": "89",
     "role": "http://www.veeco.com/role/DisclosureStockPlansOptionExerciseRangesDetails",
     "shortName": "Stock Plans - Option Exercise Ranges (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfOutstandingOptions",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ",
      "xsiNil": "false"
     }
    },
    "R9": {
     "firstAnchor": {
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:EarningsPerShareTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "10201 - Disclosure - Income Per Common Share",
     "menuCat": "Notes",
     "order": "9",
     "role": "http://www.veeco.com/role/DisclosureIncomePerCommonShare",
     "shortName": "Income Per Common Share",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:EarningsPerShareTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R90": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "veco:ScheduleOfStockOptionExercisedTableTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:ProceedsFromStockOptionsExercised",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "41208 - Disclosure - Stock Plans - Stock options exercised (Details)",
     "menuCat": "Details",
     "order": "90",
     "role": "http://www.veeco.com/role/DisclosureStockPlansStockOptionsExercisedDetails",
     "shortName": "Stock Plans - Stock options exercised (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "veco:ScheduleOfStockOptionExercisedTableTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2021_To_12_31_2021_kM96bokaxUS023vUPFgknw",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:ProceedsFromStockOptionsExercised",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     }
    },
    "R91": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_12_31_2021_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_90kQ0UAU_kCEBzwtbQLOCw",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber",
      "reportCount": 1,
      "unitRef": "Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "41209 - Disclosure - Share-based Compensation - Restricted shares and performance shares (Details)",
     "menuCat": "Details",
     "order": "91",
     "role": "http://www.veeco.com/role/DisclosureShareBasedCompensationRestrictedSharesAndPerformanceSharesDetails",
     "shortName": "Share-based Compensation - Restricted shares and performance shares (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_12_31_2019_us-gaap_AwardTypeAxis_veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember_BAc3dgLAJEiIVBNN2-jYYA",
      "decimals": "-3",
      "lang": null,
      "name": "us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_shares_au1_mNre_0CNySvADxi5DQ",
      "xsiNil": "false"
     }
    },
    "R92": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "veco:ScheduleOfShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsValuationAssumptionsTableTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_us-gaap_AwardTypeAxis_veco_PerformanceShareUnitsMarketConditionsMember_2WTDqDHGgEGxwUPxh_rK1w",
      "decimals": "2",
      "first": true,
      "lang": null,
      "name": "us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "41210 - Disclosure - Stock Plans - Performance Awards Assumptions (Details)",
     "menuCat": "Details",
     "order": "92",
     "role": "http://www.veeco.com/role/DisclosureStockPlansPerformanceAwardsAssumptionsDetails",
     "shortName": "Stock Plans - Performance Awards Assumptions (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "veco:ScheduleOfShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsValuationAssumptionsTableTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_us-gaap_AwardTypeAxis_veco_PerformanceShareUnitsMarketConditionsMember_2WTDqDHGgEGxwUPxh_rK1w",
      "decimals": "2",
      "first": true,
      "lang": null,
      "name": "us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Divide_USD_shares_I6sLFaT8AE6eByv0UBOJhg",
      "xsiNil": "false"
     }
    },
    "R93": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_36M02lVMMkqklha7FYtN3w",
      "decimals": "-5",
      "first": true,
      "lang": null,
      "name": "us-gaap:ProceedsFromIssuanceOfSharesUnderIncentiveAndShareBasedCompensationPlans",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "41211 - Disclosure - Stock Plans - ESPP FV Assumptions (Details)",
     "menuCat": "Details",
     "order": "93",
     "role": "http://www.veeco.com/role/DisclosureStockPlansEsppFvAssumptionsDetails",
     "shortName": "Stock Plans - ESPP FV Assumptions (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_us-gaap_PlanNameAxis_veco_EmployeeStockPurchasePlan2016Member_36M02lVMMkqklha7FYtN3w",
      "decimals": "-5",
      "first": true,
      "lang": null,
      "name": "us-gaap:ProceedsFromIssuanceOfSharesUnderIncentiveAndShareBasedCompensationPlans",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     }
    },
    "R94": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "p",
       "us-gaap:PensionAndOtherPostretirementBenefitsDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": "2",
      "first": true,
      "lang": null,
      "name": "us-gaap:DefinedContributionPlanEmployerMatchingContributionPercentOfMatch",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "41301 - Disclosure - Retirement Plans - Defined Contribution Plan (Details)",
     "menuCat": "Details",
     "order": "94",
     "role": "http://www.veeco.com/role/DisclosureRetirementPlansDefinedContributionPlanDetails",
     "shortName": "Retirement Plans - Defined Contribution Plan (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "p",
       "us-gaap:PensionAndOtherPostretirementBenefitsDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": "2",
      "first": true,
      "lang": null,
      "name": "us-gaap:DefinedContributionPlanEmployerMatchingContributionPercentOfMatch",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_pure_Rw4W2LnIYUyQyzc24HZK5w",
      "xsiNil": "false"
     }
    },
    "R95": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2020_To_12_31_2020_GaN2nXdFukupWD408E1cGA",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:AssetImpairmentCharges",
      "reportCount": 1,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "41401 - Disclosure - Dispositions (Details)",
     "menuCat": "Details",
     "order": "95",
     "role": "http://www.veeco.com/role/DisclosureDispositionsDetails",
     "shortName": "Dispositions (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "p",
       "us-gaap:DisposalGroupsIncludingDiscontinuedOperationsDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_12_31_2020_us-gaap_DisposalGroupClassificationAxis_us-gaap_DisposalGroupDisposedOfBySaleNotDiscontinuedOperationsMember_us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsAxis_veco_OneNonCoreProductLineMember_ImUrGQxTIkCP31DP-sVs-Q",
      "decimals": "-5",
      "lang": null,
      "name": "us-gaap:DisposalGroupIncludingDiscontinuedOperationConsideration",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     }
    },
    "R96": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfIncomeBeforeIncomeTaxDomesticAndForeignTableTextBlock",
       "us-gaap:IncomeTaxDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "41501 - Disclosure - Income Taxes - Income Attributable to Domestic and Foreign Operations (Details)",
     "menuCat": "Details",
     "order": "96",
     "role": "http://www.veeco.com/role/DisclosureIncomeTaxesIncomeAttributableToDomesticAndForeignOperationsDetails",
     "shortName": "Income Taxes - Income Attributable to Domestic and Foreign Operations (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfIncomeBeforeIncomeTaxDomesticAndForeignTableTextBlock",
       "us-gaap:IncomeTaxDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     }
    },
    "R97": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:CurrentForeignTaxExpenseBenefit",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "41502 - Disclosure - Income Taxes - Components of Expense (Benefit) (Details)",
     "menuCat": "Details",
     "order": "97",
     "role": "http://www.veeco.com/role/DisclosureIncomeTaxesComponentsOfExpenseBenefitDetails",
     "shortName": "Income Taxes - Components of Expense (Benefit) (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:CurrentForeignTaxExpenseBenefit",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     }
    },
    "R98": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfEffectiveIncomeTaxRateReconciliationTableTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "41503 - Disclosure - Income Taxes - Reconciliation to Statutory Tax Expense (Details)",
     "menuCat": "Details",
     "order": "98",
     "role": "http://www.veeco.com/role/DisclosureIncomeTaxesReconciliationToStatutoryTaxExpenseDetails",
     "shortName": "Income Taxes - Reconciliation to Statutory Tax Expense (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfEffectiveIncomeTaxRateReconciliationTableTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "Duration_1_1_2022_To_12_31_2022_YeRkRMrGE0CIgj3DJhndlw",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     }
    },
    "R99": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:DeferredTaxAssetsInventory",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "41504 - Disclosure - Income Taxes - Deferred Taxes (Details)",
     "menuCat": "Details",
     "order": "99",
     "role": "http://www.veeco.com/role/DisclosureIncomeTaxesDeferredTaxesDetails",
     "shortName": "Income Taxes - Deferred Taxes (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "veco-20221231x10k.htm",
      "contextRef": "As_Of_12_31_2022_5pUItaPX-EyzMncBYsUg7w",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:DeferredTaxAssetsInventory",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_yHyRrpTn6Eem-0DK6n-DhA",
      "xsiNil": "false"
     }
    }
   },
   "segmentCount": 99,
   "tag": {
    "country_CN": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "China"
       }
      }
     },
     "localname": "CN",
     "nsuri": "http://xbrl.sec.gov/country/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformationGeographicDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "country_US": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "United States"
       }
      }
     },
     "localname": "US",
     "nsuri": "http://xbrl.sec.gov/country/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformationGeographicDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "dei_AmendmentFlag": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Boolean flag that is true when the XBRL content amends previously-filed or accepted submission.",
        "label": "Amendment Flag"
       }
      }
     },
     "localname": "AmendmentFlag",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.veeco.com/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "booleanItemType"
    },
    "dei_AuditorFirmId": {
     "auth_ref": [
      "r854",
      "r855",
      "r856"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "PCAOB issued Audit Firm Identifier",
        "label": "Auditor Firm ID"
       }
      }
     },
     "localname": "AuditorFirmId",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.veeco.com/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "nonemptySequenceNumberItemType"
    },
    "dei_AuditorLocation": {
     "auth_ref": [
      "r854",
      "r855",
      "r856"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Auditor Location"
       }
      }
     },
     "localname": "AuditorLocation",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.veeco.com/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "internationalNameItemType"
    },
    "dei_AuditorName": {
     "auth_ref": [
      "r854",
      "r855",
      "r856"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Auditor Name"
       }
      }
     },
     "localname": "AuditorName",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.veeco.com/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "internationalNameItemType"
    },
    "dei_CityAreaCode": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Area code of city",
        "label": "City Area Code"
       }
      }
     },
     "localname": "CityAreaCode",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.veeco.com/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "normalizedStringItemType"
    },
    "dei_CoverAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Cover page.",
        "label": "Cover [Abstract]"
       }
      }
     },
     "localname": "CoverAbstract",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "xbrltype": "stringItemType"
    },
    "dei_CurrentFiscalYearEndDate": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "End date of current fiscal year in the format --MM-DD.",
        "label": "Current Fiscal Year End Date"
       }
      }
     },
     "localname": "CurrentFiscalYearEndDate",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.veeco.com/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "gMonthDayItemType"
    },
    "dei_DocumentAnnualReport": {
     "auth_ref": [
      "r854",
      "r855",
      "r856"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Boolean flag that is true only for a form used as an annual report.",
        "label": "Document Annual Report"
       }
      }
     },
     "localname": "DocumentAnnualReport",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.veeco.com/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "booleanItemType"
    },
    "dei_DocumentFiscalPeriodFocus": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Fiscal period values are FY, Q1, Q2, and Q3.  1st, 2nd and 3rd quarter 10-Q or 10-QT statements have value Q1, Q2, and Q3 respectively, with 10-K, 10-KT or other fiscal year statements having FY.",
        "label": "Document Fiscal Period Focus"
       }
      }
     },
     "localname": "DocumentFiscalPeriodFocus",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.veeco.com/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "fiscalPeriodItemType"
    },
    "dei_DocumentFiscalYearFocus": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "This is focus fiscal year of the document report in YYYY format. For a 2006 annual report, which may also provide financial information from prior periods, fiscal 2006 should be given as the fiscal year focus. Example: 2006.",
        "label": "Document Fiscal Year Focus"
       }
      }
     },
     "localname": "DocumentFiscalYearFocus",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.veeco.com/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "gYearItemType"
    },
    "dei_DocumentPeriodEndDate": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "For the EDGAR submission types of Form 8-K: the date of the report, the date of the earliest event reported; for the EDGAR submission types of Form N-1A: the filing date; for all other submission types: the end of the reporting or transition period.  The format of the date is YYYY-MM-DD.",
        "label": "Document Period End Date"
       }
      }
     },
     "localname": "DocumentPeriodEndDate",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.veeco.com/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "dateItemType"
    },
    "dei_DocumentTransitionReport": {
     "auth_ref": [
      "r857"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Boolean flag that is true only for a form used as a transition report.",
        "label": "Document Transition Report"
       }
      }
     },
     "localname": "DocumentTransitionReport",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.veeco.com/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "booleanItemType"
    },
    "dei_DocumentType": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The type of document being provided (such as 10-K, 10-Q, 485BPOS, etc). The document type is limited to the same value as the supporting SEC submission type, or the word 'Other'.",
        "label": "Document Type"
       }
      }
     },
     "localname": "DocumentType",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.veeco.com/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "submissionTypeItemType"
    },
    "dei_EntityAddressAddressLine1": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Address Line 1 such as Attn, Building Name, Street Name",
        "label": "Entity Address, Address Line One"
       }
      }
     },
     "localname": "EntityAddressAddressLine1",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.veeco.com/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "normalizedStringItemType"
    },
    "dei_EntityAddressCityOrTown": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Name of the City or Town",
        "label": "Entity Address, City or Town"
       }
      }
     },
     "localname": "EntityAddressCityOrTown",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.veeco.com/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "normalizedStringItemType"
    },
    "dei_EntityAddressPostalZipCode": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Code for the postal or zip code",
        "label": "Entity Address, Postal Zip Code"
       }
      }
     },
     "localname": "EntityAddressPostalZipCode",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.veeco.com/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "normalizedStringItemType"
    },
    "dei_EntityAddressStateOrProvince": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Name of the state or province.",
        "label": "Entity Address, State or Province"
       }
      }
     },
     "localname": "EntityAddressStateOrProvince",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.veeco.com/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "stateOrProvinceItemType"
    },
    "dei_EntityCentralIndexKey": {
     "auth_ref": [
      "r852"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "A unique 10-digit SEC-issued value to identify entities that have filed disclosures with the SEC. It is commonly abbreviated as CIK.",
        "label": "Entity Central Index Key"
       }
      }
     },
     "localname": "EntityCentralIndexKey",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.veeco.com/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "centralIndexKeyItemType"
    },
    "dei_EntityCommonStockSharesOutstanding": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Indicate number of shares or other units outstanding of each of registrant's classes of capital or common stock or other ownership interests, if and as stated on cover of related periodic report. Where multiple classes or units exist define each class/interest by adding class of stock items such as Common Class A [Member], Common Class B [Member] or Partnership Interest [Member] onto the Instrument [Domain] of the Entity Listings, Instrument.",
        "label": "Entity Common Stock, Shares Outstanding"
       }
      }
     },
     "localname": "EntityCommonStockSharesOutstanding",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.veeco.com/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "sharesItemType"
    },
    "dei_EntityCurrentReportingStatus": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Indicate 'Yes' or 'No' whether registrants (1) have filed all reports required to be filed by Section 13 or 15(d) of the Securities Exchange Act of 1934 during the preceding 12 months (or for such shorter period that registrants were required to file such reports), and (2) have been subject to such filing requirements for the past 90 days. This information should be based on the registrant's current or most recent filing containing the related disclosure.",
        "label": "Entity Current Reporting Status"
       }
      }
     },
     "localname": "EntityCurrentReportingStatus",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.veeco.com/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "yesNoItemType"
    },
    "dei_EntityDomain": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "All the names of the entities being reported upon in a document. Any legal structure used to conduct activities or to hold assets. Some examples of such structures are corporations, partnerships, limited liability companies, grantor trusts, and other trusts. This item does not include business and geographical segments which are included in the geographical or business segments domains.",
        "label": "Entity [Domain]"
       }
      }
     },
     "localname": "EntityDomain",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSubsequentEventsDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "dei_EntityEmergingGrowthCompany": {
     "auth_ref": [
      "r852"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Indicate if registrant meets the emerging growth company criteria.",
        "label": "Entity Emerging Growth Company"
       }
      }
     },
     "localname": "EntityEmergingGrowthCompany",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.veeco.com/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "booleanItemType"
    },
    "dei_EntityFileNumber": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Commission file number. The field allows up to 17 characters. The prefix may contain 1-3 digits, the sequence number may contain 1-8 digits, the optional suffix may contain 1-4 characters, and the fields are separated with a hyphen.",
        "label": "Entity File Number"
       }
      }
     },
     "localname": "EntityFileNumber",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.veeco.com/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "fileNumberItemType"
    },
    "dei_EntityFilerCategory": {
     "auth_ref": [
      "r852"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Indicate whether the registrant is one of the following: Large Accelerated Filer, Accelerated Filer, Non-accelerated Filer. Definitions of these categories are stated in Rule 12b-2 of the Exchange Act. This information should be based on the registrant's current or most recent filing containing the related disclosure.",
        "label": "Entity Filer Category"
       }
      }
     },
     "localname": "EntityFilerCategory",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.veeco.com/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "filerCategoryItemType"
    },
    "dei_EntityIncorporationStateCountryCode": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Two-character EDGAR code representing the state or country of incorporation.",
        "label": "Entity Incorporation, State or Country Code"
       }
      }
     },
     "localname": "EntityIncorporationStateCountryCode",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.veeco.com/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "edgarStateCountryItemType"
    },
    "dei_EntityInteractiveDataCurrent": {
     "auth_ref": [
      "r858"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Boolean flag that is true when the registrant has submitted electronically every Interactive Data File required to be submitted pursuant to Rule 405 of Regulation S-T during the preceding 12 months (or for such shorter period that the registrant was required to submit such files).",
        "label": "Entity Interactive Data Current"
       }
      }
     },
     "localname": "EntityInteractiveDataCurrent",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.veeco.com/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "yesNoItemType"
    },
    "dei_EntityNumberOfEmployees": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Number of persons employed by the Entity",
        "label": "Entity Number of Employees",
        "terseLabel": "Number of employees"
       }
      }
     },
     "localname": "EntityNumberOfEmployees",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSubsequentEventsDetails"
     ],
     "xbrltype": "decimalItemType"
    },
    "dei_EntityPublicFloat": {
     "auth_ref": [],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The aggregate market value of the voting and non-voting common equity held by non-affiliates computed by reference to the price at which the common equity was last sold, or the average bid and asked price of such common equity, as of the last business day of the registrant's most recently completed second fiscal quarter.",
        "label": "Entity Public Float"
       }
      }
     },
     "localname": "EntityPublicFloat",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.veeco.com/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "monetaryItemType"
    },
    "dei_EntityRegistrantName": {
     "auth_ref": [
      "r852"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The exact name of the entity filing the report as specified in its charter, which is required by forms filed with the SEC.",
        "label": "Entity Registrant Name"
       }
      }
     },
     "localname": "EntityRegistrantName",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.veeco.com/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "normalizedStringItemType"
    },
    "dei_EntityShellCompany": {
     "auth_ref": [
      "r852"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Boolean flag that is true when the registrant is a shell company as defined in Rule 12b-2 of the Exchange Act.",
        "label": "Entity Shell Company"
       }
      }
     },
     "localname": "EntityShellCompany",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.veeco.com/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "booleanItemType"
    },
    "dei_EntitySmallBusiness": {
     "auth_ref": [
      "r852"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Indicates that the company is a Smaller Reporting Company (SRC).",
        "label": "Entity Small Business"
       }
      }
     },
     "localname": "EntitySmallBusiness",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.veeco.com/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "booleanItemType"
    },
    "dei_EntityTaxIdentificationNumber": {
     "auth_ref": [
      "r852"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The Tax Identification Number (TIN), also known as an Employer Identification Number (EIN), is a unique 9-digit value assigned by the IRS.",
        "label": "Entity Tax Identification Number"
       }
      }
     },
     "localname": "EntityTaxIdentificationNumber",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.veeco.com/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "employerIdItemType"
    },
    "dei_EntityVoluntaryFilers": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Indicate 'Yes' or 'No' if the registrant is not required to file reports pursuant to Section 13 or Section 15(d) of the Act.",
        "label": "Entity Voluntary Filers"
       }
      }
     },
     "localname": "EntityVoluntaryFilers",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.veeco.com/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "yesNoItemType"
    },
    "dei_EntityWellKnownSeasonedIssuer": {
     "auth_ref": [
      "r859"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Indicate 'Yes' or 'No' if the registrant is a well-known seasoned issuer, as defined in Rule 405 of the Securities Act. Is used on Form Type: 10-K, 10-Q, 8-K, 20-F, 6-K, 10-K/A, 10-Q/A, 20-F/A, 6-K/A, N-CSR, N-Q, N-1A.",
        "label": "Entity Well-known Seasoned Issuer"
       }
      }
     },
     "localname": "EntityWellKnownSeasonedIssuer",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.veeco.com/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "yesNoItemType"
    },
    "dei_IcfrAuditorAttestationFlag": {
     "auth_ref": [
      "r854",
      "r855",
      "r856"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "ICFR Auditor Attestation Flag"
       }
      }
     },
     "localname": "IcfrAuditorAttestationFlag",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.veeco.com/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "booleanItemType"
    },
    "dei_LegalEntityAxis": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The set of legal entities associated with a report.",
        "label": "Legal Entity [Axis]"
       }
      }
     },
     "localname": "LegalEntityAxis",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSubsequentEventsDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "dei_LocalPhoneNumber": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Local phone number for entity.",
        "label": "Local Phone Number"
       }
      }
     },
     "localname": "LocalPhoneNumber",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.veeco.com/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "normalizedStringItemType"
    },
    "dei_Security12bTitle": {
     "auth_ref": [
      "r851"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Title of a 12(b) registered security.",
        "label": "Title of 12(b) Security"
       }
      }
     },
     "localname": "Security12bTitle",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.veeco.com/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "securityTitleItemType"
    },
    "dei_SecurityExchangeName": {
     "auth_ref": [
      "r853"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Name of the Exchange on which a security is registered.",
        "label": "Security Exchange Name"
       }
      }
     },
     "localname": "SecurityExchangeName",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.veeco.com/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "edgarExchangeCodeItemType"
    },
    "dei_TradingSymbol": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Trading symbol of an instrument as listed on an exchange.",
        "label": "Trading Symbol"
       }
      }
     },
     "localname": "TradingSymbol",
     "nsuri": "http://xbrl.sec.gov/dei/2022",
     "presentation": [
      "http://www.veeco.com/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "tradingSymbolItemType"
    },
    "srt_CumulativeEffectPeriodOfAdoptionAdjustedBalanceMember": {
     "auth_ref": [
      "r862",
      "r882",
      "r883",
      "r891",
      "r945",
      "r946",
      "r947",
      "r953",
      "r954",
      "r958",
      "r959",
      "r960",
      "r968"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents amount after cumulative-effect adjustment to financial statements in period of adoption of amendment to accounting standards.",
        "label": "Cumulative Effect, Period of Adoption, Adjusted Balance"
       }
      }
     },
     "localname": "CumulativeEffectPeriodOfAdoptionAdjustedBalanceMember",
     "nsuri": "http://fasb.org/srt/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesRecentlyAdoptedAccountingStandardsDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "srt_CumulativeEffectPeriodOfAdoptionAdjustmentMember": {
     "auth_ref": [
      "r249",
      "r313",
      "r321",
      "r327",
      "r404",
      "r574",
      "r575",
      "r576",
      "r608",
      "r609",
      "r639",
      "r642",
      "r644",
      "r645",
      "r709"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Increase (decrease) to financial statements for cumulative-effect adjustment in period of adoption of amendment to accounting standards.",
        "label": "Cumulative Effect, Period of Adoption, Adjustment"
       }
      }
     },
     "localname": "CumulativeEffectPeriodOfAdoptionAdjustmentMember",
     "nsuri": "http://fasb.org/srt/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesRecentlyAdoptedAccountingStandardsDetails",
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfStockholdersEquity"
     ],
     "xbrltype": "domainItemType"
    },
    "srt_CumulativeEffectPeriodOfAdoptionAxis": {
     "auth_ref": [
      "r249",
      "r313",
      "r321",
      "r327",
      "r404",
      "r574",
      "r575",
      "r576",
      "r608",
      "r609",
      "r639",
      "r642",
      "r644",
      "r645",
      "r709"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Information by cumulative-effect adjustment to financial statements in period of adoption of amendment to accounting standards.",
        "label": "Cumulative Effect, Period of Adoption [Axis]"
       }
      }
     },
     "localname": "CumulativeEffectPeriodOfAdoptionAxis",
     "nsuri": "http://fasb.org/srt/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesRecentlyAdoptedAccountingStandardsDetails",
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfStockholdersEquity"
     ],
     "xbrltype": "stringItemType"
    },
    "srt_CumulativeEffectPeriodOfAdoptionDomain": {
     "auth_ref": [
      "r249",
      "r313",
      "r321",
      "r327",
      "r404",
      "r574",
      "r575",
      "r576",
      "r608",
      "r609",
      "r639",
      "r642",
      "r644",
      "r645",
      "r709"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Cumulative-effect adjustment to financial statements in period of adoption of amendment to accounting standards.",
        "label": "Cumulative Effect, Period of Adoption [Domain]"
       }
      }
     },
     "localname": "CumulativeEffectPeriodOfAdoptionDomain",
     "nsuri": "http://fasb.org/srt/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesRecentlyAdoptedAccountingStandardsDetails",
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfStockholdersEquity"
     ],
     "xbrltype": "domainItemType"
    },
    "srt_EquityMethodInvesteeNameDomain": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Name of investment including named security. Excludes entity that is consolidated.",
        "label": "Investment, Name [Domain]"
       }
      }
     },
     "localname": "EquityMethodInvesteeNameDomain",
     "nsuri": "http://fasb.org/srt/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureInvestmentsOtherInvestmentDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "srt_LitigationCaseAxis": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Information by type of judicial proceeding, alternative dispute resolution or claim.",
        "label": "Litigation Case [Axis]"
       }
      }
     },
     "localname": "LitigationCaseAxis",
     "nsuri": "http://fasb.org/srt/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesLegalProceedingsDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "srt_LitigationCaseTypeDomain": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Judicial proceeding, alternative dispute resolution or claim. For example, but not limited to, name of case, category of litigation, or other differentiating information.",
        "label": "Litigation Case [Domain]"
       }
      }
     },
     "localname": "LitigationCaseTypeDomain",
     "nsuri": "http://fasb.org/srt/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesLegalProceedingsDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "srt_MajorCustomersAxis": {
     "auth_ref": [
      "r381",
      "r833",
      "r916",
      "r980"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Information by name or description of a single external customer or a group of external customers.",
        "label": "Customer [Axis]"
       }
      }
     },
     "localname": "MajorCustomersAxis",
     "nsuri": "http://fasb.org/srt/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesConcentrationOfCreditRiskDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "srt_MaximumMember": {
     "auth_ref": [
      "r439",
      "r440",
      "r441",
      "r442",
      "r533",
      "r745",
      "r765",
      "r795",
      "r796",
      "r830",
      "r839",
      "r850",
      "r914",
      "r971",
      "r972",
      "r973",
      "r974",
      "r975",
      "r976"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Upper limit of the provided range.",
        "label": "Maximum"
       }
      }
     },
     "localname": "MaximumMember",
     "nsuri": "http://fasb.org/srt/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesPerformanceObligationTimingDetails",
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesReceivablesDetails",
      "http://www.veeco.com/role/DisclosureDebtRevolvingCreditFacilityDetails",
      "http://www.veeco.com/role/DisclosureInvestmentsOtherInvestmentDetails",
      "http://www.veeco.com/role/DisclosurePropertyPlantAndEquipmentPropertyAndEquipmentDetails",
      "http://www.veeco.com/role/DisclosureRetirementPlansDefinedContributionPlanDetails",
      "http://www.veeco.com/role/DisclosureShareBasedCompensationRestrictedSharesAndPerformanceSharesDetails",
      "http://www.veeco.com/role/DisclosureStockPlans2019PlanDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "srt_MinimumMember": {
     "auth_ref": [
      "r439",
      "r440",
      "r441",
      "r442",
      "r533",
      "r745",
      "r765",
      "r795",
      "r796",
      "r830",
      "r839",
      "r850",
      "r914",
      "r971",
      "r972",
      "r973",
      "r974",
      "r975",
      "r976"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Lower limit of the provided range.",
        "label": "Minimum"
       }
      }
     },
     "localname": "MinimumMember",
     "nsuri": "http://fasb.org/srt/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesPerformanceObligationTimingDetails",
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesReceivablesDetails",
      "http://www.veeco.com/role/DisclosureDebtConvertibleSeniorNotesDetails",
      "http://www.veeco.com/role/DisclosureDebtRevolvingCreditFacilityDetails",
      "http://www.veeco.com/role/DisclosurePropertyPlantAndEquipmentPropertyAndEquipmentDetails",
      "http://www.veeco.com/role/DisclosureShareBasedCompensationRestrictedSharesAndPerformanceSharesDetails",
      "http://www.veeco.com/role/DisclosureStockPlans2019PlanDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "srt_NameOfMajorCustomerDomain": {
     "auth_ref": [
      "r381",
      "r833",
      "r916",
      "r980"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Single external customer or group of external customers.",
        "label": "Customer [Domain]"
       }
      }
     },
     "localname": "NameOfMajorCustomerDomain",
     "nsuri": "http://fasb.org/srt/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesConcentrationOfCreditRiskDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "srt_ProductOrServiceAxis": {
     "auth_ref": [
      "r377",
      "r749",
      "r831",
      "r848",
      "r909",
      "r910",
      "r916",
      "r979"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Information by product and service, or group of similar products and similar services.",
        "label": "Products and Services [Axis]"
       }
      }
     },
     "localname": "ProductOrServiceAxis",
     "nsuri": "http://fasb.org/srt/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformationSegmentDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "srt_ProductsAndServicesDomain": {
     "auth_ref": [
      "r377",
      "r749",
      "r831",
      "r848",
      "r909",
      "r910",
      "r916",
      "r979"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Product or service, or a group of similar products or similar services.",
        "label": "Products and Services [Domain]"
       }
      }
     },
     "localname": "ProductsAndServicesDomain",
     "nsuri": "http://fasb.org/srt/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformationSegmentDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "srt_RangeAxis": {
     "auth_ref": [
      "r439",
      "r440",
      "r441",
      "r442",
      "r516",
      "r533",
      "r565",
      "r566",
      "r567",
      "r721",
      "r745",
      "r765",
      "r795",
      "r796",
      "r830",
      "r839",
      "r850",
      "r905",
      "r914",
      "r972",
      "r973",
      "r974",
      "r975",
      "r976"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Information by statistical measurement. Includes, but is not limited to, minimum, maximum, weighted average, arithmetic average, and median.",
        "label": "Range [Axis]"
       }
      }
     },
     "localname": "RangeAxis",
     "nsuri": "http://fasb.org/srt/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesPerformanceObligationTimingDetails",
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesReceivablesDetails",
      "http://www.veeco.com/role/DisclosureDebtConvertibleSeniorNotesDetails",
      "http://www.veeco.com/role/DisclosureDebtRevolvingCreditFacilityDetails",
      "http://www.veeco.com/role/DisclosureInvestmentsOtherInvestmentDetails",
      "http://www.veeco.com/role/DisclosurePropertyPlantAndEquipmentPropertyAndEquipmentDetails",
      "http://www.veeco.com/role/DisclosureRetirementPlansDefinedContributionPlanDetails",
      "http://www.veeco.com/role/DisclosureShareBasedCompensationRestrictedSharesAndPerformanceSharesDetails",
      "http://www.veeco.com/role/DisclosureStockPlans2019PlanDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "srt_RangeMember": {
     "auth_ref": [
      "r439",
      "r440",
      "r441",
      "r442",
      "r516",
      "r533",
      "r565",
      "r566",
      "r567",
      "r721",
      "r745",
      "r765",
      "r795",
      "r796",
      "r830",
      "r839",
      "r850",
      "r905",
      "r914",
      "r972",
      "r973",
      "r974",
      "r975",
      "r976"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Statistical measurement. Includes, but is not limited to, minimum, maximum, weighted average, arithmetic average, and median.",
        "label": "Range [Domain]"
       }
      }
     },
     "localname": "RangeMember",
     "nsuri": "http://fasb.org/srt/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesPerformanceObligationTimingDetails",
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesReceivablesDetails",
      "http://www.veeco.com/role/DisclosureDebtConvertibleSeniorNotesDetails",
      "http://www.veeco.com/role/DisclosureDebtRevolvingCreditFacilityDetails",
      "http://www.veeco.com/role/DisclosureInvestmentsOtherInvestmentDetails",
      "http://www.veeco.com/role/DisclosurePropertyPlantAndEquipmentPropertyAndEquipmentDetails",
      "http://www.veeco.com/role/DisclosureRetirementPlansDefinedContributionPlanDetails",
      "http://www.veeco.com/role/DisclosureShareBasedCompensationRestrictedSharesAndPerformanceSharesDetails",
      "http://www.veeco.com/role/DisclosureStockPlans2019PlanDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "srt_ScenarioUnspecifiedDomain": {
     "auth_ref": [
      "r327",
      "r534",
      "r860",
      "r884"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Scenario reported, distinguishing information from actual fact. Includes, but is not limited to, pro forma and forecast. Excludes actual facts.",
        "label": "Scenario, Unspecified [Domain]"
       }
      }
     },
     "localname": "ScenarioUnspecifiedDomain",
     "nsuri": "http://fasb.org/srt/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesRecentlyAdoptedAccountingStandardsDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "srt_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis": {
     "auth_ref": [
      "r396"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Information by name of investment including named security. Excludes entity that is consolidated.",
        "label": "Investment, Name [Axis]"
       }
      }
     },
     "localname": "ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis",
     "nsuri": "http://fasb.org/srt/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureInvestmentsOtherInvestmentDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "srt_ScheduleOfValuationAndQualifyingAccountsDisclosureTextBlock": {
     "auth_ref": [
      "r309",
      "r808"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The entire disclosure for valuation and qualifying accounts and reserves.",
        "label": "Schedule of Valuation and Qualifying Accounts Disclosure [Text Block]",
        "terseLabel": "Schedule II - Valuation and Qualifying Accounts"
       }
      }
     },
     "localname": "ScheduleOfValuationAndQualifyingAccountsDisclosureTextBlock",
     "nsuri": "http://fasb.org/srt/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureScheduleIiValuationAndQualifyingAccounts"
     ],
     "xbrltype": "textBlockItemType"
    },
    "srt_SegmentGeographicalDomain": {
     "auth_ref": [
      "r378",
      "r379",
      "r786",
      "r787",
      "r788",
      "r789",
      "r790",
      "r791",
      "r792",
      "r793",
      "r794",
      "r798",
      "r800",
      "r801",
      "r802",
      "r803",
      "r804",
      "r805",
      "r806",
      "r807",
      "r832",
      "r849",
      "r916"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Geographical area.",
        "label": "Geographical [Domain]"
       }
      }
     },
     "localname": "SegmentGeographicalDomain",
     "nsuri": "http://fasb.org/srt/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesReceivablesDetails",
      "http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformationGeographicDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "srt_StatementGeographicalAxis": {
     "auth_ref": [
      "r378",
      "r379",
      "r780",
      "r786",
      "r787",
      "r788",
      "r789",
      "r790",
      "r791",
      "r792",
      "r793",
      "r794",
      "r798",
      "r799",
      "r832",
      "r849",
      "r916"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Information by geographical components.",
        "label": "Geographical [Axis]"
       }
      }
     },
     "localname": "StatementGeographicalAxis",
     "nsuri": "http://fasb.org/srt/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesReceivablesDetails",
      "http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformationGeographicDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "srt_StatementScenarioAxis": {
     "auth_ref": [
      "r327",
      "r534",
      "r860",
      "r861",
      "r884"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Information by scenario reported, distinguishing information from actual fact. Includes, but is not limited to, pro forma and forecast. Excludes actual facts.",
        "label": "Scenario [Axis]"
       }
      }
     },
     "localname": "StatementScenarioAxis",
     "nsuri": "http://fasb.org/srt/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesRecentlyAdoptedAccountingStandardsDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "srt_ValuationAndQualifyingAccountsAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Schedule II - Valuation and Qualifying Accounts"
       }
      }
     },
     "localname": "ValuationAndQualifyingAccountsAbstract",
     "nsuri": "http://fasb.org/srt/2022",
     "xbrltype": "stringItemType"
    },
    "srt_ValuationAndQualifyingAccountsDisclosureLineItems": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.",
        "label": "Valuation and Qualifying Accounts Disclosure [Line Items]",
        "terseLabel": "Valuation and Qualifying Accounts"
       }
      }
     },
     "localname": "ValuationAndQualifyingAccountsDisclosureLineItems",
     "nsuri": "http://fasb.org/srt/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureScheduleIiValuationAndQualifyingAccountsDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "srt_ValuationAndQualifyingAccountsDisclosureTable": {
     "auth_ref": [
      "r303",
      "r304",
      "r305",
      "r307",
      "r308",
      "r808"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Disclosure of valuation and qualifying accounts and reserves.",
        "label": "Valuation and Qualifying Accounts Disclosure [Table]"
       }
      }
     },
     "localname": "ValuationAndQualifyingAccountsDisclosureTable",
     "nsuri": "http://fasb.org/srt/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureScheduleIiValuationAndQualifyingAccountsDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_AOCIAttributableToParentNetOfTaxRollForward": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "A roll forward is a reconciliation of a concept from the beginning of a period to the end of a period.",
        "label": "Accumulated Other Comprehensive Income (Loss), Net of Tax [Roll Forward]",
        "terseLabel": "Changes in the balances of each component of AOCI"
       }
      }
     },
     "localname": "AOCIAttributableToParentNetOfTaxRollForward",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockholdersEquityAociRollforwardDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_AccountingStandardsUpdate201912Member": {
     "auth_ref": [
      "r606",
      "r607",
      "r608",
      "r609"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Accounting Standards Update 2019-12 Income Taxes (Topic 740): Simplifying the Accounting for Income Taxes.",
        "label": "ASU 2019-12, Simplifying the Accounting for Income Taxes"
       }
      }
     },
     "localname": "AccountingStandardsUpdate201912Member",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesRecentlyAdoptedAccountingStandardsDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_AccountingStandardsUpdate202006Member": {
     "auth_ref": [
      "r635",
      "r636",
      "r637",
      "r639",
      "r640",
      "r641",
      "r642",
      "r643",
      "r644",
      "r645",
      "r646"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Accounting Standards Update 2020-06 Debt - Debt with Conversion and Other Options (Subtopic 470-20) and Derivatives and Hedging - Contracts in Entity's Own Equity (Subtopic 815-40): Accounting for Convertible Instruments and Contracts in an Entity's Own Equity.",
        "label": "ASU 2020-06: Debt"
       }
      }
     },
     "localname": "AccountingStandardsUpdate202006Member",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesRecentlyAdoptedAccountingStandardsDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_AccountsPayableAndAccruedLiabilitiesDisclosureTextBlock": {
     "auth_ref": [
      "r30"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The entire disclosure for accounts payable and accrued liabilities at the end of the reporting period.",
        "label": "Accounts Payable and Accrued Liabilities Disclosure [Text Block]",
        "terseLabel": "Accrued Expenses and Other Liabilities"
       }
      }
     },
     "localname": "AccountsPayableAndAccruedLiabilitiesDisclosureTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilities"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_AccountsPayableCurrent": {
     "auth_ref": [
      "r29",
      "r847"
     ],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheets": {
       "order": 1.0,
       "parentTag": "us-gaap_LiabilitiesCurrent",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Carrying value as of the balance sheet date of liabilities incurred (and for which invoices have typically been received) and payable to vendors for goods and services received that are used in an entity's business. Used to reflect the current portion of the liabilities (due within one year or within the normal operating cycle if longer).",
        "label": "Accounts Payable, Current",
        "terseLabel": "Accounts payable"
       }
      }
     },
     "localname": "AccountsPayableCurrent",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_AccountsReceivableMember": {
     "auth_ref": [
      "r781"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Due from customers or clients for goods or services that have been delivered or sold.",
        "label": "Accounts Receivable"
       }
      }
     },
     "localname": "AccountsReceivableMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesConcentrationOfCreditRiskDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_AccountsReceivableNetCurrent": {
     "auth_ref": [
      "r383",
      "r384"
     ],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheets": {
       "order": 4.0,
       "parentTag": "us-gaap_AssetsCurrent",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount, after allowance for credit loss, of right to consideration from customer for product sold and service rendered in normal course of business, classified as current.",
        "label": "Accounts Receivable, Net, Current",
        "terseLabel": "Accounts receivable, net"
       }
      }
     },
     "localname": "AccountsReceivableNetCurrent",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_AccruedIncomeTaxesCurrent": {
     "auth_ref": [
      "r14",
      "r223",
      "r237"
     ],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheets": {
       "order": 4.0,
       "parentTag": "us-gaap_LiabilitiesCurrent",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Carrying amount as of the balance sheet date of the unpaid sum of the known and estimated amounts payable to satisfy all currently due domestic and foreign income tax obligations.",
        "label": "Accrued Income Taxes, Current",
        "terseLabel": "Income taxes payable"
       }
      }
     },
     "localname": "AccruedIncomeTaxesCurrent",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_AccruedIncomeTaxesNoncurrent": {
     "auth_ref": [
      "r16",
      "r223",
      "r237"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Carrying amount as of the balance sheet date of the unpaid sum of the known and estimated amounts payable to satisfy all domestic and foreign income tax obligations due beyond one year or the operating cycle, whichever is longer. Alternate captions include income taxes payable, noncurrent.",
        "label": "Accrued Income Taxes, Noncurrent",
        "terseLabel": "Income taxes payable"
       }
      }
     },
     "localname": "AccruedIncomeTaxesNoncurrent",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesOtherLiabilitiesDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_AccruedLiabilitiesCurrentAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Accrued Liabilities, Current [Abstract]",
        "terseLabel": "Accrued expenses and other current liabilities"
       }
      }
     },
     "localname": "AccruedLiabilitiesCurrentAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesComponentsDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_AccruedProfessionalFeesCurrent": {
     "auth_ref": [
      "r34"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesComponentsDetails": {
       "order": 5.0,
       "parentTag": "veco_AccruedAndOtherLiabilitiesCurrent",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Carrying value as of the balance sheet date of obligations incurred through that date and payable for professional fees, such as for legal and accounting services received. Used to reflect the current portion of the liabilities (due within one year or within the normal operating cycle if longer).",
        "label": "Accrued Professional Fees, Current",
        "terseLabel": "Professional fees"
       }
      }
     },
     "localname": "AccruedProfessionalFeesCurrent",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesComponentsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment": {
     "auth_ref": [
      "r119",
      "r259"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosurePropertyPlantAndEquipmentPropertyAndEquipmentDetails": {
       "order": 1.0,
       "parentTag": "us-gaap_PropertyPlantAndEquipmentNet",
       "weight": -1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of accumulated depreciation, depletion and amortization for physical assets used in the normal conduct of business to produce goods and services.",
        "label": "Accumulated Depreciation, Depletion and Amortization, Property, Plant, and Equipment",
        "terseLabel": "Less: accumulated depreciation and amortization"
       }
      }
     },
     "localname": "AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosurePropertyPlantAndEquipmentPropertyAndEquipmentDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_AccumulatedNetUnrealizedInvestmentGainLossMember": {
     "auth_ref": [
      "r269",
      "r270",
      "r271",
      "r273",
      "r281",
      "r282",
      "r866"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Accumulated unrealized gain (loss) on investment in debt security measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale), attributable to parent.",
        "label": "Unrealized gain on available for sale securities",
        "terseLabel": "Unrealized Gains (Losses) on Available for Sale Securities"
       }
      }
     },
     "localname": "AccumulatedNetUnrealizedInvestmentGainLossMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockholdersEquityAociRollforwardDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_AccumulatedOtherComprehensiveIncomeLossLineItems": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.",
        "label": "Accumulated Other Comprehensive Income (Loss) [Line Items]",
        "terseLabel": "Accumulated Other Comprehensive Income"
       }
      }
     },
     "localname": "AccumulatedOtherComprehensiveIncomeLossLineItems",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockholdersEquityAociRollforwardDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax": {
     "auth_ref": [
      "r45",
      "r46",
      "r47",
      "r264",
      "r761",
      "r773",
      "r777"
     ],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheets": {
       "order": 5.0,
       "parentTag": "us-gaap_StockholdersEquity",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Accumulated change in equity from transactions and other events and circumstances from non-owner sources, net of tax effect, at period end. Excludes Net Income (Loss), and accumulated changes in equity from transactions resulting from investments by owners and distributions to owners. Includes foreign currency translation items, certain pension adjustments, unrealized gains and losses on certain investments in debt and equity securities, other than temporary impairment (OTTI) losses related to factors other than credit losses on available-for-sale and held-to-maturity debt securities that an entity does not intend to sell and it is not more likely than not that the entity will be required to sell before recovery of the amortized cost basis, as well as changes in the fair value of derivatives related to the effective portion of a designated cash flow hedge.",
        "label": "Accumulated Other Comprehensive Income (Loss), Net of Tax",
        "terseLabel": "Accumulated other comprehensive income"
       }
      }
     },
     "localname": "AccumulatedOtherComprehensiveIncomeLossNetOfTax",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_AccumulatedOtherComprehensiveIncomeLossTable": {
     "auth_ref": [
      "r280",
      "r281",
      "r668",
      "r669",
      "r670",
      "r671",
      "r672",
      "r673"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Disclosure of information about components of accumulated other comprehensive income (loss).",
        "label": "Accumulated Other Comprehensive Income (Loss) [Table]"
       }
      }
     },
     "localname": "AccumulatedOtherComprehensiveIncomeLossTable",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockholdersEquityAociRollforwardDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_AccumulatedOtherComprehensiveIncomeMember": {
     "auth_ref": [
      "r44",
      "r47",
      "r197",
      "r711",
      "r768",
      "r769",
      "r866",
      "r867",
      "r868",
      "r879",
      "r880",
      "r881"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Accumulated increase (decrease) in equity from transactions and other events and circumstances from non-owner sources, attributable to the parent. Excludes net income (loss), and accumulated changes in equity from transactions resulting from investments by owners and distributions to owners.",
        "label": "Accumulated Other Comprehensive Income",
        "terseLabel": "Accumulated Other Comprehensive Income"
       }
      }
     },
     "localname": "AccumulatedOtherComprehensiveIncomeMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockholdersEquityAociRollforwardDetails",
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfStockholdersEquity"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_AccumulatedTranslationAdjustmentMember": {
     "auth_ref": [
      "r42",
      "r47",
      "r197",
      "r281",
      "r282",
      "r669",
      "r670",
      "r671",
      "r672",
      "r673",
      "r866"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Accumulated other comprehensive income (loss) resulting from foreign currency translation adjustments, foreign currency transactions designated and effective as economic hedges of a net investment in a foreign entity and intra-entity foreign currency transactions that are of a long-term-investment nature, attributable to the parent.",
        "label": "Foreign Currency Translation",
        "terseLabel": "Foreign Currency Translation"
       }
      }
     },
     "localname": "AccumulatedTranslationAdjustmentMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockholdersEquityAociRollforwardDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_AdditionalPaidInCapitalCommonStock": {
     "auth_ref": [
      "r21"
     ],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheets": {
       "order": 3.0,
       "parentTag": "us-gaap_StockholdersEquity",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Value received from shareholders in common stock-related transactions that are in excess of par value or stated value and amounts received from other stock-related transactions. Includes only common stock transactions (excludes preferred stock transactions). May be called contributed capital, capital in excess of par, capital surplus, or paid-in capital.",
        "label": "Additional Paid in Capital, Common Stock",
        "terseLabel": "Additional paid-in capital"
       }
      }
     },
     "localname": "AdditionalPaidInCapitalCommonStock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesRecentlyAdoptedAccountingStandardsDetails",
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_AdditionalPaidInCapitalMember": {
     "auth_ref": [
      "r574",
      "r575",
      "r576",
      "r879",
      "r880",
      "r881",
      "r959"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Excess of issue price over par or stated value of the entity's capital stock and amounts received from other transactions involving the entity's stock or stockholders.",
        "label": "Additional Paid-in Capital"
       }
      }
     },
     "localname": "AdditionalPaidInCapitalMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfStockholdersEquity"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_AdjustmentsForNewAccountingPronouncementsAxis": {
     "auth_ref": [
      "r247",
      "r248",
      "r249",
      "r250",
      "r251",
      "r315",
      "r316",
      "r317",
      "r318",
      "r327",
      "r386",
      "r387",
      "r401",
      "r402",
      "r403",
      "r404",
      "r405",
      "r406",
      "r574",
      "r575",
      "r576",
      "r606",
      "r607",
      "r608",
      "r609",
      "r621",
      "r622",
      "r623",
      "r635",
      "r636",
      "r637",
      "r639",
      "r640",
      "r641",
      "r642",
      "r643",
      "r644",
      "r645",
      "r646",
      "r647",
      "r656",
      "r657",
      "r659",
      "r660",
      "r661",
      "r662",
      "r663",
      "r664",
      "r676",
      "r677",
      "r688",
      "r689",
      "r690",
      "r691",
      "r706",
      "r707",
      "r708",
      "r709",
      "r710",
      "r711",
      "r751",
      "r752",
      "r753",
      "r766",
      "r767",
      "r768",
      "r769",
      "r770",
      "r771",
      "r772",
      "r773",
      "r774",
      "r775",
      "r776",
      "r777"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Information by amendment to accounting standards.",
        "label": "Adjustments for New Accounting Pronouncements [Axis]"
       }
      }
     },
     "localname": "AdjustmentsForNewAccountingPronouncementsAxis",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesRecentlyAdoptedAccountingStandardsDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_AdjustmentsToAdditionalPaidInCapitalEquityComponentOfConvertibleDebt": {
     "auth_ref": [
      "r139"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Adjustment to additional paid in capital resulting from the recognition of convertible debt instruments as two separate components - a debt component and an equity component. This bifurcation may result in a basis difference associated with the liability component that represents a temporary difference for purposes of applying accounting for income taxes. The initial recognition of deferred taxes for the tax effect of that temporary difference is as an adjustment to additional paid in capital.",
        "label": "Adjustments to Additional Paid in Capital, Equity Component of Convertible Debt",
        "verboseLabel": "Equity component of Notes"
       }
      }
     },
     "localname": "AdjustmentsToAdditionalPaidInCapitalEquityComponentOfConvertibleDebt",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfStockholdersEquity"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue": {
     "auth_ref": [
      "r170",
      "r171",
      "r537"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of increase to additional paid-in capital (APIC) for recognition of cost for award under share-based payment arrangement.",
        "label": "Adjustments to Additional Paid in Capital, Share-based Compensation, Requisite Service Period Recognition",
        "terseLabel": "Share-based compensation expense"
       }
      }
     },
     "localname": "AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfStockholdersEquity"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Adjustments to Reconcile Net Income (Loss) to Cash Provided by (Used in) Operating Activities [Abstract]",
        "terseLabel": "Adjustments to reconcile net income to net cash provided by (used in) operating activities:"
       }
      }
     },
     "localname": "AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_AdvertisingCostsPolicyTextBlock": {
     "auth_ref": [
      "r579"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Disclosure of accounting policy for advertising cost.",
        "label": "Advertising Costs, Policy [Policy Text Block]",
        "terseLabel": "Advertising Expense"
       }
      }
     },
     "localname": "AdvertisingCostsPolicyTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesPolicies"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_AdvertisingExpense": {
     "auth_ref": [
      "r580"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount charged to advertising expense for the period, which are expenses incurred with the objective of increasing revenue for a specified brand, product or product line.",
        "label": "Advertising Expense",
        "terseLabel": "Advertising expense"
       }
      }
     },
     "localname": "AdvertisingExpense",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesAdvertisingExpenseDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_AllocatedShareBasedCompensationExpense": {
     "auth_ref": [
      "r569"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of expense for award under share-based payment arrangement. Excludes amount capitalized.",
        "label": "Allocated Share-based Compensation Expense",
        "verboseLabel": "Total share-based compensation expense"
       }
      }
     },
     "localname": "AllocatedShareBasedCompensationExpense",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockPlansRecognizedShareBasedCompensationDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_AllowanceForCreditLossMember": {
     "auth_ref": [
      "r874",
      "r875",
      "r876",
      "r877",
      "r878"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Allowance for credit loss from right to consideration in exchange for good or service transferred to customer when right is conditioned on something other than passage of time.",
        "label": "Allowance for doubtful accounts"
       }
      }
     },
     "localname": "AllowanceForCreditLossMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureScheduleIiValuationAndQualifyingAccountsDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent": {
     "auth_ref": [
      "r265",
      "r385",
      "r407"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of allowance for credit loss on accounts receivable, classified as current.",
        "label": "Allowance for Doubtful Accounts Receivable, Current",
        "terseLabel": "Allowance for doubtful accounts receivable"
       }
      }
     },
     "localname": "AllowanceForDoubtfulAccountsReceivableCurrent",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesConcentrationOfCreditRiskDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_AmortizationOfFinancingCostsAndDiscounts": {
     "auth_ref": [
      "r474",
      "r680",
      "r828",
      "r829",
      "r870"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureDebtInterestExpenseDetails": {
       "order": 2.0,
       "parentTag": "us-gaap_InterestExpenseDebt",
       "weight": 1.0
      },
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "order": 3.0,
       "parentTag": "us-gaap_NetCashProvidedByUsedInOperatingActivities",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of amortization expense attributable to debt discount (premium) and debt issuance costs.",
        "label": "Amortization of Debt Issuance Costs and Discounts",
        "terseLabel": "Amortization of debt discount/transaction costs",
        "verboseLabel": "Non-cash interest expense"
       }
      }
     },
     "localname": "AmortizationOfFinancingCostsAndDiscounts",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDebtInterestExpenseDetails",
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_AmortizationOfIntangibleAssets": {
     "auth_ref": [
      "r70",
      "r107",
      "r111"
     ],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations": {
       "order": 3.0,
       "parentTag": "us-gaap_OperatingExpenses",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The aggregate expense charged against earnings to allocate the cost of intangible assets (nonphysical assets not used in production) in a systematic and rational manner to the periods expected to benefit from such assets. As a noncash expense, this element is added back to net income when calculating cash provided by or used in operations using the indirect method.",
        "label": "Amortization of Intangible Assets",
        "terseLabel": "Amortization of intangible assets"
       }
      }
     },
     "localname": "AmortizationOfIntangibleAssets",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount": {
     "auth_ref": [
      "r343"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Securities (including those issuable pursuant to contingent stock agreements) that could potentially dilute basic earnings per share (EPS) or earnings per unit (EPU) in the future that were not included in the computation of diluted EPS or EPU because to do so would increase EPS or EPU amounts or decrease loss per share or unit amounts for the period presented.",
        "label": "Antidilutive Securities Excluded from Computation of Earnings Per Share, Amount",
        "terseLabel": "Securities excluded from the diluted calculation as their effect would be antidilutive"
       }
      }
     },
     "localname": "AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomePerCommonShareSharesExcludedFromEpsDetails"
     ],
     "xbrltype": "sharesItemType"
    },
    "us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis": {
     "auth_ref": [
      "r82"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Information by type of antidilutive security.",
        "label": "Antidilutive Securities [Axis]"
       }
      }
     },
     "localname": "AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomePerCommonShareSharesExcludedFromEpsDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareLineItems": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.",
        "label": "Antidilutive Securities Excluded from Computation of Earnings Per Share [Line Items]",
        "terseLabel": "Antidilutive securities"
       }
      }
     },
     "localname": "AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareLineItems",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomePerCommonShareSharesExcludedFromEpsDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_AntidilutiveSecuritiesNameDomain": {
     "auth_ref": [
      "r82"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Incremental common shares attributable to securities that were not included in diluted earnings per share (EPS) because to do so would increase EPS amounts or decrease loss per share amounts for the period presented.",
        "label": "Antidilutive Securities, Name [Domain]"
       }
      }
     },
     "localname": "AntidilutiveSecuritiesNameDomain",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomePerCommonShareSharesExcludedFromEpsDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_AssetImpairmentCharges": {
     "auth_ref": [
      "r70",
      "r115"
     ],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "order": 7.0,
       "parentTag": "us-gaap_NetCashProvidedByUsedInOperatingActivities",
       "weight": 1.0
      },
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations": {
       "order": 5.0,
       "parentTag": "us-gaap_OperatingExpenses",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of write-down of assets recognized in the income statement. Includes, but is not limited to, losses from tangible assets, intangible assets and goodwill.",
        "label": "Asset Impairment Charges",
        "terseLabel": "Asset impairment"
       }
      }
     },
     "localname": "AssetImpairmentCharges",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDispositionsDetails",
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows",
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_AssetRetirementObligationsNoncurrent": {
     "auth_ref": [
      "r904"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Noncurrent portion of the carrying amount of a liability for an asset retirement obligation. An asset retirement obligation is a legal obligation associated with the disposal or retirement of a tangible long-lived asset that results from the acquisition, construction or development, or the normal operations of a long-lived asset, except for certain obligations of lessees.",
        "label": "Asset Retirement Obligations, Noncurrent",
        "terseLabel": "Asset retirement obligations"
       }
      }
     },
     "localname": "AssetRetirementObligationsNoncurrent",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesOtherLiabilitiesDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_Assets": {
     "auth_ref": [
      "r221",
      "r236",
      "r262",
      "r298",
      "r364",
      "r368",
      "r373",
      "r397",
      "r443",
      "r444",
      "r445",
      "r446",
      "r447",
      "r448",
      "r449",
      "r450",
      "r451",
      "r626",
      "r630",
      "r655",
      "r847",
      "r912",
      "r913",
      "r969"
     ],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheets": {
       "order": null,
       "parentTag": null,
       "root": true,
       "weight": null
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Sum of the carrying amounts as of the balance sheet date of all assets that are recognized. Assets are probable future economic benefits obtained or controlled by an entity as a result of past transactions or events.",
        "label": "Assets.",
        "totalLabel": "Total assets"
       }
      }
     },
     "localname": "Assets",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_AssetsAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Assets [ Abstract ]",
        "terseLabel": "Assets"
       }
      }
     },
     "localname": "AssetsAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheets"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_AssetsCurrent": {
     "auth_ref": [
      "r254",
      "r268",
      "r298",
      "r397",
      "r443",
      "r444",
      "r445",
      "r446",
      "r447",
      "r448",
      "r449",
      "r450",
      "r451",
      "r626",
      "r630",
      "r655",
      "r847",
      "r912",
      "r913",
      "r969"
     ],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheets": {
       "order": 1.0,
       "parentTag": "us-gaap_Assets",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Sum of the carrying amounts as of the balance sheet date of all assets that are expected to be realized in cash, sold, or consumed within one year (or the normal operating cycle, if longer). Assets are probable future economic benefits obtained or controlled by an entity as a result of past transactions or events.",
        "label": "Assets, Current",
        "totalLabel": "Total current assets"
       }
      }
     },
     "localname": "AssetsCurrent",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_AssetsCurrentAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Assets, Current [Abstract]",
        "terseLabel": "Current assets:"
       }
      }
     },
     "localname": "AssetsCurrentAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheets"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_AvailableForSaleDebtSecuritiesAccumulatedGrossUnrealizedLossBeforeTax": {
     "auth_ref": [
      "r103"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount, before tax, of unrealized loss in accumulated other comprehensive income (AOCI) on investment in debt security measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale).",
        "label": "Available-for-sale Debt Securities, Accumulated Gross Unrealized Loss, before Tax",
        "negatedLabel": "Gross Unrealized Losses"
       }
      }
     },
     "localname": "AvailableForSaleDebtSecuritiesAccumulatedGrossUnrealizedLossBeforeTax",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureInvestmentsAvailableForSaleSecuritiesDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_AvailableForSaleDebtSecuritiesAmortizedCostBasis": {
     "auth_ref": [
      "r389",
      "r414"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureInvestmentsAvailableForSaleSecuritiesDetails": {
       "order": null,
       "parentTag": null,
       "root": true,
       "weight": null
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amortized cost of investment in debt security measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale).",
        "label": "Available-for-sale Debt Securities, Amortized Cost Basis",
        "terseLabel": "Amortized Cost",
        "totalLabel": "Amortized Cost"
       }
      }
     },
     "localname": "AvailableForSaleDebtSecuritiesAmortizedCostBasis",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureInvestmentsAvailableForSaleSecuritiesDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_AvailableForSaleSecuritiesDebtMaturitiesNextRollingTwelveMonthsAmortizedCostBasis": {
     "auth_ref": [],
     "calculation": {
      "http://www.veeco.com/role/DisclosureInvestmentsAvailableForSaleSecuritiesDetails": {
       "order": 1.0,
       "parentTag": "us-gaap_AvailableForSaleDebtSecuritiesAmortizedCostBasis",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amortized cost of investment in debt security measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale), with single maturity date and allocated without single maturity date, maturing in next rolling fiscal year following latest fiscal year. For interim and annual periods when interim period is reported on rolling approach, from latest statement of financial position date.",
        "label": "Debt Securities, Available-for-sale, Maturity, Allocated and Single Maturity Date, Rolling within One Year, Amortized Cost",
        "terseLabel": "Amortized Cost, Due in one year or less"
       }
      }
     },
     "localname": "AvailableForSaleSecuritiesDebtMaturitiesNextRollingTwelveMonthsAmortizedCostBasis",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureInvestmentsAvailableForSaleSecuritiesDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_AvailableForSaleSecuritiesDebtMaturitiesNextRollingTwelveMonthsFairValue": {
     "auth_ref": [],
     "calculation": {
      "http://www.veeco.com/role/DisclosureInvestmentsAvailableForSaleSecuritiesDetails": {
       "order": 1.0,
       "parentTag": "us-gaap_AvailableForSaleSecuritiesDebtSecurities",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Fair value of investment in debt security measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale), with single maturity date and allocated without single maturity date, maturing in next rolling fiscal year following latest fiscal year. For interim and annual periods when interim period is reported on rolling approach, from latest statement of financial position date.",
        "label": "Debt Securities, Available-for-sale, Maturity, Allocated and Single Maturity Date, Rolling within One Year, Fair Value",
        "terseLabel": "Estimated Fair Value, Due in one year or less"
       }
      }
     },
     "localname": "AvailableForSaleSecuritiesDebtMaturitiesNextRollingTwelveMonthsFairValue",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureInvestmentsAvailableForSaleSecuritiesDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_AvailableForSaleSecuritiesDebtMaturitiesSingleMaturityDateAmortizedCostBasisRollingMaturityAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Debt Securities, Available-for-sale, Maturity, Allocated and Single Maturity Date, Amortized Cost, Rolling Maturity [Abstract]",
        "terseLabel": "Contractual maturities - Amortized Cost"
       }
      }
     },
     "localname": "AvailableForSaleSecuritiesDebtMaturitiesSingleMaturityDateAmortizedCostBasisRollingMaturityAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureInvestmentsAvailableForSaleSecuritiesDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_AvailableForSaleSecuritiesDebtMaturitiesSingleMaturityDateRollingMaturityAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Debt Securities, Available-for-sale, Maturity, Allocated and Single Maturity Date, Rolling Maturity, Fair Value [Abstract]",
        "terseLabel": "Contractual maturities - Estimated Fair Value"
       }
      }
     },
     "localname": "AvailableForSaleSecuritiesDebtMaturitiesSingleMaturityDateRollingMaturityAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureInvestmentsAvailableForSaleSecuritiesDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_AvailableForSaleSecuritiesDebtSecurities": {
     "auth_ref": [
      "r102",
      "r388",
      "r414",
      "r756"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureInvestmentsAvailableForSaleSecuritiesDetails": {
       "order": null,
       "parentTag": null,
       "root": true,
       "weight": null
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of investment in debt security measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale).",
        "label": "Available-for-sale Securities, Debt Securities",
        "terseLabel": "Estimated Fair Value",
        "totalLabel": "Available-for-sale Securities, Debt Securities, Total"
       }
      }
     },
     "localname": "AvailableForSaleSecuritiesDebtSecurities",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureInvestmentsAvailableForSaleSecuritiesDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_AvailableForSaleSecuritiesDebtSecuritiesCurrent": {
     "auth_ref": [
      "r101",
      "r414"
     ],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheets": {
       "order": 2.0,
       "parentTag": "us-gaap_AssetsCurrent",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of investment in debt security measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale), classified as current.",
        "label": "Available-for-sale Securities, Debt Securities, Current",
        "terseLabel": "Short-term investments"
       }
      }
     },
     "localname": "AvailableForSaleSecuritiesDebtSecuritiesCurrent",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_AwardTypeAxis": {
     "auth_ref": [
      "r540",
      "r541",
      "r542",
      "r544",
      "r545",
      "r546",
      "r547",
      "r548",
      "r549",
      "r550",
      "r551",
      "r552",
      "r553",
      "r554",
      "r555",
      "r556",
      "r557",
      "r558",
      "r559",
      "r560",
      "r561",
      "r564",
      "r565",
      "r566",
      "r567",
      "r568"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Information by type of award under share-based payment arrangement.",
        "label": "Award Type [Axis]"
       }
      }
     },
     "localname": "AwardTypeAxis",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureShareBasedCompensationRestrictedSharesAndPerformanceSharesDetails",
      "http://www.veeco.com/role/DisclosureStockPlans2019PlanDetails",
      "http://www.veeco.com/role/DisclosureStockPlansPerformanceAwardsAssumptionsDetails",
      "http://www.veeco.com/role/DisclosureStockPlansUnrecognizedShareBasedCompensationCostsDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_BalanceSheetLocationAxis": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Information by location on balance sheet (statement of financial position).",
        "label": "Balance Sheet Location [Axis]"
       }
      }
     },
     "localname": "BalanceSheetLocationAxis",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesOtherLiabilitiesDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_BalanceSheetLocationDomain": {
     "auth_ref": [
      "r199",
      "r202"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Location in the balance sheet (statement of financial position).",
        "label": "Balance Sheet Location [Domain]"
       }
      }
     },
     "localname": "BalanceSheetLocationDomain",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesOtherLiabilitiesDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_BaseRateMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Minimum rate investor will accept.",
        "label": "Base rate"
       }
      }
     },
     "localname": "BaseRateMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDebtRevolvingCreditFacilityDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_BuildingAndBuildingImprovementsMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Facility held for productive use including, but not limited to, office, production, storage and distribution facilities and any addition, improvement, or renovation to the structure, for example, but not limited to, interior masonry, interior flooring, electrical, and plumbing.",
        "label": "Building and improvements"
       }
      }
     },
     "localname": "BuildingAndBuildingImprovementsMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosurePropertyPlantAndEquipmentPropertyAndEquipmentDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_BusinessAcquisitionAcquireeDomain": {
     "auth_ref": [
      "r620",
      "r837",
      "r838"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Identification of the acquiree in a material business combination (or series of individually immaterial business combinations), which may include the name or other type of identification of the acquiree.",
        "label": "Business Acquisition, Acquiree [Domain]"
       }
      }
     },
     "localname": "BusinessAcquisitionAcquireeDomain",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSubsequentEventsDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_BusinessAcquisitionAxis": {
     "auth_ref": [
      "r186",
      "r187",
      "r620",
      "r837",
      "r838"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Information by business combination or series of individually immaterial business combinations.",
        "label": "Business Acquisition [Axis]"
       }
      }
     },
     "localname": "BusinessAcquisitionAxis",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSubsequentEventsDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_BusinessCombinationContingentConsiderationArrangementsRangeOfOutcomesValueHigh": {
     "auth_ref": [
      "r191"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "For contingent consideration arrangements recognized in connection with a business combination, this element represents an estimate of the high-end of the potential range (undiscounted) of the consideration which may be paid.",
        "label": "Business Combination, Contingent Consideration Arrangements, Range of Outcomes, Value, High",
        "terseLabel": "Potential additional performance based earn-outs"
       }
      }
     },
     "localname": "BusinessCombinationContingentConsiderationArrangementsRangeOfOutcomesValueHigh",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSubsequentEventsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_BusinessCombinationsPolicy": {
     "auth_ref": [
      "r185"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Disclosure of accounting policy for completed business combinations (purchase method, acquisition method or combination of entities under common control). This accounting policy may include a general discussion of the purchase method or acquisition method of accounting (including for example, the treatment accorded contingent consideration, the identification of assets and liabilities, the purchase price allocation process, how the fair values of acquired assets and liabilities are determined) and the entity's specific application thereof. An entity that acquires another entity in a leveraged buyout transaction generally discloses the accounting policy followed by the acquiring entity in determining the basis used to value its interest in the acquired entity, and the rationale for that accounting policy.",
        "label": "Business Combinations Policy [Policy Text Block]",
        "terseLabel": "Business Combinations"
       }
      }
     },
     "localname": "BusinessCombinationsPolicy",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesPolicies"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_CapitalExpendituresIncurredButNotYetPaid": {
     "auth_ref": [
      "r74",
      "r75",
      "r76"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Future cash outflow to pay for purchases of fixed assets that have occurred.",
        "label": "Capital Expenditures Incurred but Not yet Paid",
        "terseLabel": "Capital expenditures included in accounts payable and accrued expenses"
       }
      }
     },
     "localname": "CapitalExpendituresIncurredButNotYetPaid",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_CashAndCashEquivalentsAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Cash and Cash Equivalents [Abstract]",
        "verboseLabel": "Cash equivalents"
       }
      }
     },
     "localname": "CashAndCashEquivalentsAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureFairValueMeasurementsDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_CashAndCashEquivalentsAtCarryingValue": {
     "auth_ref": [
      "r72",
      "r257",
      "r809"
     ],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheets": {
       "order": 1.0,
       "parentTag": "us-gaap_AssetsCurrent",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of currency on hand as well as demand deposits with banks or financial institutions. Includes other kinds of accounts that have the general characteristics of demand deposits. Also includes short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates. Excludes cash and cash equivalents within disposal group and discontinued operation.",
        "label": "Cash and Cash Equivalents, at Carrying Value",
        "terseLabel": "Cash and cash equivalents"
       }
      }
     },
     "localname": "CashAndCashEquivalentsAtCarryingValue",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_CashAndCashEquivalentsAxis": {
     "auth_ref": [
      "r257"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Information by type of cash and cash equivalent balance.",
        "label": "Cash and Cash Equivalents [Axis]"
       }
      }
     },
     "localname": "CashAndCashEquivalentsAxis",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureFairValueMeasurementsDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents": {
     "auth_ref": [
      "r67",
      "r72",
      "r77"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of cash and cash equivalents, and cash and cash equivalents restricted to withdrawal or usage. Excludes amount for disposal group and discontinued operations. Cash includes, but is not limited to, currency on hand, demand deposits with banks or financial institutions, and other accounts with general characteristics of demand deposits. Cash equivalents include, but are not limited to, short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates.",
        "label": "Cash, Cash Equivalents, Restricted Cash and Restricted Cash Equivalents",
        "periodEndLabel": "Cash, cash equivalents, and restricted cash - end of period",
        "periodStartLabel": "Cash, cash equivalents, and restricted cash - beginning of period"
       }
      }
     },
     "localname": "CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect": {
     "auth_ref": [
      "r67",
      "r214"
     ],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "order": null,
       "parentTag": null,
       "root": true,
       "weight": null
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of increase (decrease) in cash, cash equivalents, and cash and cash equivalents restricted to withdrawal or usage; including effect from exchange rate change. Cash includes, but is not limited to, currency on hand, demand deposits with banks or financial institutions, and other accounts with general characteristics of demand deposits. Cash equivalents include, but are not limited to, short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates.",
        "label": "Cash, Cash Equivalents, Restricted Cash and Restricted Cash Equivalents, Period Increase (Decrease), Including Exchange Rate Effect",
        "totalLabel": "Net increase (decrease) in cash, cash equivalents, and restricted cash"
       }
      }
     },
     "localname": "CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_CashEquivalentsAtCarryingValue": {
     "auth_ref": [
      "r863"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates. Excludes cash and cash equivalents within disposal group and discontinued operation.",
        "label": "Cash Equivalents, at Carrying Value",
        "terseLabel": "Cash equivalents"
       }
      }
     },
     "localname": "CashEquivalentsAtCarryingValue",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesCashCashEquivalentsAndShortTermInvestmentsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_ChangeInAccountingPrincipleAccountingStandardsUpdateAdopted": {
     "auth_ref": [
      "r247",
      "r248",
      "r314",
      "r386",
      "r387",
      "r398",
      "r399",
      "r400",
      "r401",
      "r402",
      "r606",
      "r621",
      "r622",
      "r632",
      "r635",
      "r636",
      "r647",
      "r656",
      "r658",
      "r659",
      "r660",
      "r663",
      "r664",
      "r676",
      "r686",
      "r688",
      "r689",
      "r690",
      "r706",
      "r707",
      "r751",
      "r752",
      "r766",
      "r767"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Indicates (true false) whether accounting standards update was adopted.",
        "label": "Change in Accounting Principle, Accounting Standards Update, Adopted [true false]",
        "terseLabel": "Change in Accounting Principle, Accounting Standards Update, Adopted"
       }
      }
     },
     "localname": "ChangeInAccountingPrincipleAccountingStandardsUpdateAdopted",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesRecentlyAdoptedAccountingStandardsDetails"
     ],
     "xbrltype": "booleanItemType"
    },
    "us-gaap_ChangeInAccountingPrincipleAccountingStandardsUpdateTransitionOptionElectedExtensibleList": {
     "auth_ref": [
      "r249",
      "r250",
      "r430",
      "r431",
      "r609",
      "r638",
      "r643",
      "r678",
      "r682",
      "r683",
      "r684",
      "r685",
      "r687",
      "r691",
      "r692",
      "r693",
      "r708",
      "r768",
      "r778"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Indicates transition method applied for adoption of amendment to accounting standards.",
        "label": "Change in Accounting Principle, Accounting Standards Update, Transition Option Elected [Extensible Enumeration]",
        "terseLabel": "Change in Accounting Principle, Accounting Standards Update, Transition Option Elected"
       }
      }
     },
     "localname": "ChangeInAccountingPrincipleAccountingStandardsUpdateTransitionOptionElectedExtensibleList",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesRecentlyAdoptedAccountingStandardsDetails"
     ],
     "xbrltype": "enumerationSetItemType"
    },
    "us-gaap_CommercialPaperMember": {
     "auth_ref": [
      "r137"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Unsecured promissory note (generally negotiable) that provides institutions with short-term funds.",
        "label": "Commercial paper"
       }
      }
     },
     "localname": "CommercialPaperMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureFairValueMeasurementsDetails",
      "http://www.veeco.com/role/DisclosureInvestmentsAvailableForSaleSecuritiesDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_CommitmentsAndContingenciesDisclosureAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Commitments and Contingencies"
       }
      }
     },
     "localname": "CommitmentsAndContingenciesDisclosureAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "xbrltype": "stringItemType"
    },
    "us-gaap_CommitmentsAndContingenciesDisclosureTextBlock": {
     "auth_ref": [
      "r124",
      "r436",
      "r437",
      "r782",
      "r911"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The entire disclosure for commitments and contingencies.",
        "label": "Commitments and Contingencies Disclosure [Text Block]",
        "terseLabel": "Commitments and Contingencies"
       }
      }
     },
     "localname": "CommitmentsAndContingenciesDisclosureTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingencies"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_CommonStockCapitalSharesReservedForFutureIssuance": {
     "auth_ref": [
      "r40"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Aggregate number of common shares reserved for future issuance.",
        "label": "Common Stock, Capital Shares Reserved for Future Issuance",
        "verboseLabel": "Total shares reserved"
       }
      }
     },
     "localname": "CommonStockCapitalSharesReservedForFutureIssuance",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockPlansSharesReservedForFutureIssuanceDetails"
     ],
     "xbrltype": "sharesItemType"
    },
    "us-gaap_CommonStockMember": {
     "auth_ref": [
      "r879",
      "r880",
      "r959"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Stock that is subordinate to all other stock of the issuer.",
        "label": "Common Stock"
       }
      }
     },
     "localname": "CommonStockMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfStockholdersEquity"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_CommonStockParOrStatedValuePerShare": {
     "auth_ref": [
      "r20"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Face amount or stated value per share of common stock.",
        "label": "Common Stock, Par or Stated Value Per Share",
        "terseLabel": "Common stock, par value (in dollars per share)"
       }
      }
     },
     "localname": "CommonStockParOrStatedValuePerShare",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheetsParenthetical"
     ],
     "xbrltype": "perShareItemType"
    },
    "us-gaap_CommonStockSharesAuthorized": {
     "auth_ref": [
      "r20"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The maximum number of common shares permitted to be issued by an entity's charter and bylaws.",
        "label": "Common Stock, Shares Authorized",
        "terseLabel": "Common stock, authorized shares"
       }
      }
     },
     "localname": "CommonStockSharesAuthorized",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheetsParenthetical"
     ],
     "xbrltype": "sharesItemType"
    },
    "us-gaap_CommonStockSharesIssued": {
     "auth_ref": [
      "r20"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Total number of common shares of an entity that have been sold or granted to shareholders (includes common shares that were issued, repurchased and remain in the treasury). These shares represent capital invested by the firm's shareholders and owners, and may be all or only a portion of the number of shares authorized. Shares issued include shares outstanding and shares held in the treasury.",
        "label": "Common Stock, Shares, Issued",
        "terseLabel": "Common stock, shares issued"
       }
      }
     },
     "localname": "CommonStockSharesIssued",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheetsParenthetical"
     ],
     "xbrltype": "sharesItemType"
    },
    "us-gaap_CommonStockSharesOutstanding": {
     "auth_ref": [
      "r20",
      "r144"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Number of shares of common stock outstanding. Common stock represent the ownership interest in a corporation.",
        "label": "Common Stock, Shares, Outstanding",
        "terseLabel": "Common stock, shares outstanding"
       }
      }
     },
     "localname": "CommonStockSharesOutstanding",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheetsParenthetical"
     ],
     "xbrltype": "sharesItemType"
    },
    "us-gaap_CommonStockValue": {
     "auth_ref": [
      "r20",
      "r847"
     ],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheets": {
       "order": 2.0,
       "parentTag": "us-gaap_StockholdersEquity",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Aggregate par or stated value of issued nonredeemable common stock (or common stock redeemable solely at the option of the issuer). This item includes treasury stock repurchased by the entity. Note: elements for number of nonredeemable common shares, par value and other disclosure concepts are in another section within stockholders' equity.",
        "label": "Common Stock, Value, Issued",
        "verboseLabel": "Common stock, $0.01 par value; 120,000,000 shares authorized; 51,660,409 shares issued and outstanding at December 31, 2022 and 50,652,864 shares issued and outstanding at December 31, 2021"
       }
      }
     },
     "localname": "CommonStockValue",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_CompensationAndRetirementDisclosureAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Retirement Plans"
       }
      }
     },
     "localname": "CompensationAndRetirementDisclosureAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "xbrltype": "stringItemType"
    },
    "us-gaap_ComponentsOfDeferredTaxAssetsAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Components of Deferred Tax Assets [Abstract]",
        "terseLabel": "Deferred tax assets:"
       }
      }
     },
     "localname": "ComponentsOfDeferredTaxAssetsAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesDeferredTaxesDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_ComponentsOfDeferredTaxAssetsAndLiabilitiesAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Components of Deferred Tax Assets and Liabilities [Abstract]",
        "terseLabel": "Components of the entity's deferred tax assets and liabilities"
       }
      }
     },
     "localname": "ComponentsOfDeferredTaxAssetsAndLiabilitiesAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesDeferredTaxesDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_ComponentsOfDeferredTaxLiabilitiesAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Components of Deferred Tax Liabilities [Abstract]",
        "terseLabel": "Deferred tax liabilities:"
       }
      }
     },
     "localname": "ComponentsOfDeferredTaxLiabilitiesAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesDeferredTaxesDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_ComprehensiveIncomeNetOfTax": {
     "auth_ref": [
      "r48",
      "r276",
      "r278",
      "r284",
      "r757",
      "r762"
     ],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfComprehensiveIncomeLoss": {
       "order": null,
       "parentTag": null,
       "root": true,
       "weight": null
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount after tax of increase (decrease) in equity from transactions and other events and circumstances from net income and other comprehensive income, attributable to parent entity. Excludes changes in equity resulting from investments by owners and distributions to owners.",
        "label": "Comprehensive Income (Loss), Net of Tax, Attributable to Parent",
        "totalLabel": "Total comprehensive income"
       }
      }
     },
     "localname": "ComprehensiveIncomeNetOfTax",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfComprehensiveIncomeLoss"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_ConcentrationRiskBenchmarkDomain": {
     "auth_ref": [
      "r87",
      "r88",
      "r211",
      "r212",
      "r381",
      "r781"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The denominator in a calculation of a disclosed concentration risk percentage.",
        "label": "Concentration Risk Benchmark [Domain]"
       }
      }
     },
     "localname": "ConcentrationRiskBenchmarkDomain",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesConcentrationOfCreditRiskDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_ConcentrationRiskByBenchmarkAxis": {
     "auth_ref": [
      "r87",
      "r88",
      "r211",
      "r212",
      "r381",
      "r779",
      "r781"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Information by benchmark of concentration risk.",
        "label": "Concentration Risk Benchmark [Axis]"
       }
      }
     },
     "localname": "ConcentrationRiskByBenchmarkAxis",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesConcentrationOfCreditRiskDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_ConcentrationRiskByTypeAxis": {
     "auth_ref": [
      "r87",
      "r88",
      "r211",
      "r212",
      "r381",
      "r781",
      "r982"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Information by type of concentration risk, for example, but not limited to, asset, liability, net assets, geographic, customer, employees, supplier, lender.",
        "label": "Concentration Risk Type [Axis]"
       }
      }
     },
     "localname": "ConcentrationRiskByTypeAxis",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesConcentrationOfCreditRiskDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_ConcentrationRiskCreditRisk": {
     "auth_ref": [
      "r233",
      "r352"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Disclosure of accounting policy for credit risk.",
        "label": "Concentration Risk, Credit Risk, Policy [Policy Text Block]",
        "terseLabel": "Concentration of Credit Risk"
       }
      }
     },
     "localname": "ConcentrationRiskCreditRisk",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesPolicies"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_ConcentrationRiskLineItems": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.",
        "label": "Concentration Risk [Line Items]",
        "terseLabel": "Concentration of Credit Risk"
       }
      }
     },
     "localname": "ConcentrationRiskLineItems",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesConcentrationOfCreditRiskDetails",
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesReceivablesDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_ConcentrationRiskPercentage1": {
     "auth_ref": [
      "r87",
      "r88",
      "r211",
      "r212",
      "r381"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "For an entity that discloses a concentration risk in relation to quantitative amount, which serves as the \"benchmark\" (or denominator) in the equation, this concept represents the concentration percentage derived from the division.",
        "label": "Concentration Risk, Percentage",
        "terseLabel": "Concentration Risk (as a percent)"
       }
      }
     },
     "localname": "ConcentrationRiskPercentage1",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesConcentrationOfCreditRiskDetails"
     ],
     "xbrltype": "percentItemType"
    },
    "us-gaap_ConcentrationRiskTable": {
     "auth_ref": [
      "r85",
      "r87",
      "r88",
      "r89",
      "r211",
      "r213",
      "r781"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Describes the nature of a concentration, a benchmark to which it is compared, and the percentage that the risk is to the benchmark.",
        "label": "Concentration Risk [Table]"
       }
      }
     },
     "localname": "ConcentrationRiskTable",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesConcentrationOfCreditRiskDetails",
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesReceivablesDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_ConcentrationRiskTypeDomain": {
     "auth_ref": [
      "r87",
      "r88",
      "r211",
      "r212",
      "r381",
      "r781"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "For an entity that discloses a concentration risk as a percentage of some financial balance or benchmark, identifies the type (for example, asset, liability, net assets, geographic, customer, employees, supplier, lender) of the concentration.",
        "label": "Concentration Risk Type [Domain]"
       }
      }
     },
     "localname": "ConcentrationRiskTypeDomain",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesConcentrationOfCreditRiskDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_ConsolidationPolicyTextBlock": {
     "auth_ref": [
      "r195",
      "r816"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Disclosure of accounting policy regarding (1) the principles it follows in consolidating or combining the separate financial statements, including the principles followed in determining the inclusion or exclusion of subsidiaries or other entities in the consolidated or combined financial statements and (2) its treatment of interests (for example, common stock, a partnership interest or other means of exerting influence) in other entities, for example consolidation or use of the equity or cost methods of accounting. The accounting policy may also address the accounting treatment for intercompany accounts and transactions, noncontrolling interest, and the income statement treatment in consolidation for issuances of stock by a subsidiary.",
        "label": "Consolidation, Policy [Policy Text Block]",
        "terseLabel": "Principles of Consolidation"
       }
      }
     },
     "localname": "ConsolidationPolicyTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesPolicies"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_ContractWithCustomerLiability": {
     "auth_ref": [
      "r497",
      "r498",
      "r513"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of obligation to transfer good or service to customer for which consideration has been received or is receivable.",
        "label": "Contract with Customer, Liability",
        "periodEndLabel": "Ending balance",
        "periodStartLabel": "Beginning balance"
       }
      }
     },
     "localname": "ContractWithCustomerLiability",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesCustomerDepositsAndDeferredRevenueDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_ContractWithCustomerLiabilityRevenueRecognized": {
     "auth_ref": [
      "r514"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of revenue recognized that was previously included in balance of obligation to transfer good or service to customer for which consideration from customer has been received or is due.",
        "label": "Contract with Customer, Liability, Revenue Recognized",
        "terseLabel": "Recognition of previously deferred revenue"
       }
      }
     },
     "localname": "ContractWithCustomerLiabilityRevenueRecognized",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesCustomerDepositsAndDeferredRevenueDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_ContractWithCustomerRefundLiabilityAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Contract with Customer, Refund Liability [Abstract]",
        "terseLabel": "Customer deposits and deferred revenue"
       }
      }
     },
     "localname": "ContractWithCustomerRefundLiabilityAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesCustomerDepositsAndDeferredRevenueDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_ContractWithCustomerRefundLiabilityCurrent": {
     "auth_ref": [
      "r917"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of liability for consideration received or receivable from customer which is not included in transaction price, when consideration is expected to be refunded to customer, classified as current.",
        "label": "Contract with Customer, Refund Liability, Current",
        "terseLabel": "Customer deposits and deferred revenue"
       }
      }
     },
     "localname": "ContractWithCustomerRefundLiabilityCurrent",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesCustomerDepositsAndDeferredRevenueDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_ConvertibleDebtFairValueByFairValueHierarchyLevelExtensibleList": {
     "auth_ref": [
      "r466",
      "r649"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Indicates level within fair value hierarchy of convertible debt.",
        "label": "Debt Instrument, Convertible, Fair Value by Fair Value Hierarchy Level [Extensible Enumeration]",
        "terseLabel": "Convertible Debt, Fair Value by Fair Value Hierarchy Level"
       }
      }
     },
     "localname": "ConvertibleDebtFairValueByFairValueHierarchyLevelExtensibleList",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDebtInterestExpenseDetails"
     ],
     "xbrltype": "enumerationSetItemType"
    },
    "us-gaap_ConvertibleDebtFairValueDisclosures": {
     "auth_ref": [],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Fair value portion of borrowing which can be exchanged for a specified number of another security at the option of the issuer or the holder, for example, but not limited to, the entity's common stock.",
        "label": "Convertible Debt, Fair Value Disclosures",
        "terseLabel": "Estimated fair value"
       }
      }
     },
     "localname": "ConvertibleDebtFairValueDisclosures",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDebtInterestExpenseDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_ConvertibleDebtMember": {
     "auth_ref": [
      "r138",
      "r452",
      "r453",
      "r464",
      "r465",
      "r466",
      "r470",
      "r471",
      "r472",
      "r473",
      "r474",
      "r825",
      "r826",
      "r827",
      "r828",
      "r829"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Borrowing which can be exchanged for a specified number of another security at the option of the issuer or the holder, for example, but not limited to, the entity's common stock.",
        "label": "Convertible Notes"
       }
      }
     },
     "localname": "ConvertibleDebtMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDebt20232025And2027NotesDetails",
      "http://www.veeco.com/role/DisclosureDebtConvertibleSeniorNotesDetails",
      "http://www.veeco.com/role/DisclosureIncomePerCommonShareSharesExcludedFromEpsDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_ConvertibleDebtTableTextBlock": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of convertible debt instrument. Includes, but is not limited to, principal amount and amortized premium or discount.",
        "label": "Convertible Debt [Table Text Block]",
        "terseLabel": "Schedule of carrying value of Convertible Senior Notes"
       }
      }
     },
     "localname": "ConvertibleDebtTableTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDebtTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_CorporateDebtSecuritiesMember": {
     "auth_ref": [
      "r834",
      "r836",
      "r981"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Debt securities issued by domestic or foreign corporate business, banks and other entities with a promise of repayment.",
        "label": "Corporate debt"
       }
      }
     },
     "localname": "CorporateDebtSecuritiesMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureFairValueMeasurementsDetails",
      "http://www.veeco.com/role/DisclosureInvestmentsAvailableForSaleSecuritiesDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_CostOfGoodsAndServicesSold": {
     "auth_ref": [
      "r53",
      "r749"
     ],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations": {
       "order": 2.0,
       "parentTag": "us-gaap_GrossProfit",
       "weight": -1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The aggregate costs related to goods produced and sold and services rendered by an entity during the reporting period. This excludes costs incurred during the reporting period related to financial services rendered and other revenue generating activities.",
        "label": "Cost of Goods and Services Sold",
        "terseLabel": "Cost of sales"
       }
      }
     },
     "localname": "CostOfGoodsAndServicesSold",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_CostOfSalesMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Primary financial statement caption encompassing cost of sales.",
        "label": "Cost of sales"
       }
      }
     },
     "localname": "CostOfSalesMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockPlansRecognizedShareBasedCompensationDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_CreditConcentrationRiskMember": {
     "auth_ref": [
      "r213"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Reflects the percentage that a specified receivable or amount at risk from a counterparty under a contractual arrangement is to a specified benchmark, such as total receivables, net revenues, pretax results. Risk is the materially adverse effects of loss attributable to (a) the failure to collect a significant receivable from a major customer or group of homogeneous accounts, or (b) a failure by a counterparty to perform under terms of a contractual arrangement.",
        "label": "Credit Concentration Risk"
       }
      }
     },
     "localname": "CreditConcentrationRiskMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesConcentrationOfCreditRiskDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_CurrentForeignTaxExpenseBenefit": {
     "auth_ref": [
      "r873",
      "r951"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureIncomeTaxesComponentsOfExpenseBenefitDetails": {
       "order": 1.0,
       "parentTag": "us-gaap_CurrentIncomeTaxExpenseBenefit",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of current foreign income tax expense (benefit) pertaining to income (loss) from continuing operations.",
        "label": "Current Foreign Tax Expense (Benefit)",
        "terseLabel": "Foreign"
       }
      }
     },
     "localname": "CurrentForeignTaxExpenseBenefit",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesComponentsOfExpenseBenefitDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_CurrentIncomeTaxExpenseBenefit": {
     "auth_ref": [
      "r184",
      "r603",
      "r613",
      "r873"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureIncomeTaxesComponentsOfExpenseBenefitDetails": {
       "order": 1.0,
       "parentTag": "us-gaap_IncomeTaxExpenseBenefit",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of current income tax expense (benefit) pertaining to taxable income (loss) from continuing operations.",
        "label": "Current Income Tax Expense (Benefit)",
        "totalLabel": "Total current expense (benefit) for income taxes"
       }
      }
     },
     "localname": "CurrentIncomeTaxExpenseBenefit",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesComponentsOfExpenseBenefitDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_CurrentIncomeTaxExpenseBenefitContinuingOperationsAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Current Income Tax Expense (Benefit), Continuing Operations [Abstract]",
        "terseLabel": "Current:"
       }
      }
     },
     "localname": "CurrentIncomeTaxExpenseBenefitContinuingOperationsAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesComponentsOfExpenseBenefitDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_CurrentStateAndLocalTaxExpenseBenefit": {
     "auth_ref": [
      "r873",
      "r951",
      "r955"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureIncomeTaxesComponentsOfExpenseBenefitDetails": {
       "order": 2.0,
       "parentTag": "us-gaap_CurrentIncomeTaxExpenseBenefit",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of current state and local tax expense (benefit) attributable to income (loss) from continuing operations. Includes, but is not limited to, current regional, territorial, and provincial tax expense (benefit) for non-US (United States of America) jurisdiction.",
        "label": "Current State and Local Tax Expense (Benefit)",
        "terseLabel": "State and local"
       }
      }
     },
     "localname": "CurrentStateAndLocalTaxExpenseBenefit",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesComponentsOfExpenseBenefitDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_CustomerConcentrationRiskMember": {
     "auth_ref": [
      "r86",
      "r381"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Reflects the percentage that revenues in the period from one or more significant customers is to net revenues, as defined by the entity, such as total net revenues, product line revenues, segment revenues. The risk is the materially adverse effects of loss of a significant customer.",
        "label": "Customer Concentration Risk"
       }
      }
     },
     "localname": "CustomerConcentrationRiskMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesConcentrationOfCreditRiskDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_CustomerRelationshipsMember": {
     "auth_ref": [
      "r190"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Customer relationship that exists between an entity and its customer, for example, but not limited to, tenant relationships.",
        "label": "Customer relationship"
       }
      }
     },
     "localname": "CustomerRelationshipsMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssetsIntangibleAssetsDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_DebtDisclosureAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Debt"
       }
      }
     },
     "localname": "DebtDisclosureAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "xbrltype": "stringItemType"
    },
    "us-gaap_DebtDisclosureTextBlock": {
     "auth_ref": [
      "r143",
      "r296",
      "r457",
      "r458",
      "r459",
      "r460",
      "r461",
      "r462",
      "r463",
      "r468",
      "r475",
      "r476",
      "r478"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The entire disclosure for information about short-term and long-term debt arrangements, which includes amounts of borrowings under each line of credit, note payable, commercial paper issue, bonds indenture, debenture issue, own-share lending arrangements and any other contractual agreement to repay funds, and about the underlying arrangements, rationale for a classification as long-term, including repayment terms, interest rates, collateral provided, restrictions on use of assets and activities, whether or not in compliance with debt covenants, and other matters important to users of the financial statements, such as the effects of refinancing and noncompliance with debt covenants.",
        "label": "Debt Disclosure [Text Block]",
        "terseLabel": "Debt"
       }
      }
     },
     "localname": "DebtDisclosureTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDebt"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_DebtInstrumentAxis": {
     "auth_ref": [
      "r13",
      "r14",
      "r15",
      "r222",
      "r225",
      "r235",
      "r302",
      "r452",
      "r453",
      "r454",
      "r455",
      "r456",
      "r458",
      "r464",
      "r465",
      "r466",
      "r467",
      "r469",
      "r470",
      "r471",
      "r472",
      "r473",
      "r474",
      "r681",
      "r825",
      "r826",
      "r827",
      "r828",
      "r829",
      "r871"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Information by type of debt instrument, including, but not limited to, draws against credit facilities.",
        "label": "Debt Instrument [Axis]"
       }
      }
     },
     "localname": "DebtInstrumentAxis",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDebt20232025And2027NotesDetails",
      "http://www.veeco.com/role/DisclosureDebtCarryingValueDetails",
      "http://www.veeco.com/role/DisclosureDebtConvertibleSeniorNotesDetails",
      "http://www.veeco.com/role/DisclosureDebtInterestExpenseDetails",
      "http://www.veeco.com/role/DisclosureDebtRevolvingCreditFacilityDetails",
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfStockholdersEquity"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_DebtInstrumentBasisSpreadOnVariableRate1": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Percentage points added to the reference rate to compute the variable rate on the debt instrument.",
        "label": "Debt Instrument, Basis Spread on Variable Rate",
        "terseLabel": "Basis spread on base rate (as a percent)"
       }
      }
     },
     "localname": "DebtInstrumentBasisSpreadOnVariableRate1",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDebtRevolvingCreditFacilityDetails"
     ],
     "xbrltype": "percentItemType"
    },
    "us-gaap_DebtInstrumentConvertibleConversionPrice1": {
     "auth_ref": [
      "r140",
      "r454"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The price per share of the conversion feature embedded in the debt instrument.",
        "label": "Debt Instrument, Convertible, Conversion Price",
        "verboseLabel": "Conversion price (in dollars per share)"
       }
      }
     },
     "localname": "DebtInstrumentConvertibleConversionPrice1",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDebtConvertibleSeniorNotesDetails"
     ],
     "xbrltype": "perShareItemType"
    },
    "us-gaap_DebtInstrumentConvertibleConversionRatio1": {
     "auth_ref": [
      "r37",
      "r145",
      "r146",
      "r148",
      "r454"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Ratio applied to the conversion of debt instrument into equity with equity shares divided by debt principal amount.",
        "label": "Debt Instrument, Convertible, Conversion Ratio",
        "verboseLabel": "Conversion rate"
       }
      }
     },
     "localname": "DebtInstrumentConvertibleConversionRatio1",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDebtConvertibleSeniorNotesDetails"
     ],
     "xbrltype": "pureItemType"
    },
    "us-gaap_DebtInstrumentConvertibleThresholdConsecutiveTradingDays1": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Threshold period of specified consecutive trading days within which common stock price to conversion price of convertible debt instrument must exceed threshold percentage for specified number of trading days to trigger conversion feature.",
        "label": "Debt Instrument, Convertible, Threshold Consecutive Trading Days",
        "verboseLabel": "Consecutive trading days"
       }
      }
     },
     "localname": "DebtInstrumentConvertibleThresholdConsecutiveTradingDays1",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDebtConvertibleSeniorNotesDetails"
     ],
     "xbrltype": "integerItemType"
    },
    "us-gaap_DebtInstrumentConvertibleThresholdPercentageOfStockPriceTrigger": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Minimum percentage of common stock price to conversion price of convertible debt instruments to determine eligibility of conversion.",
        "label": "Debt Instrument, Convertible, Threshold Percentage of Stock Price Trigger",
        "terseLabel": "Stock price trigger (as a percent)"
       }
      }
     },
     "localname": "DebtInstrumentConvertibleThresholdPercentageOfStockPriceTrigger",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDebtConvertibleSeniorNotesDetails"
     ],
     "xbrltype": "percentItemType"
    },
    "us-gaap_DebtInstrumentConvertibleThresholdTradingDays": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Threshold number of specified trading days that common stock price to conversion price of convertible debt instruments must exceed threshold percentage within a specified consecutive trading period to trigger conversion feature.",
        "label": "Debt Instrument, Convertible, Threshold Trading Days",
        "verboseLabel": "Trading days"
       }
      }
     },
     "localname": "DebtInstrumentConvertibleThresholdTradingDays",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDebtConvertibleSeniorNotesDetails"
     ],
     "xbrltype": "integerItemType"
    },
    "us-gaap_DebtInstrumentFaceAmount": {
     "auth_ref": [
      "r216",
      "r218",
      "r452",
      "r681",
      "r826",
      "r827"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureDebtCarryingValueDetails": {
       "order": 1.0,
       "parentTag": "us-gaap_LongTermDebt",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Face (par) amount of debt instrument at time of issuance.",
        "label": "Debt Instrument, Face Amount",
        "terseLabel": "Principal amount"
       }
      }
     },
     "localname": "DebtInstrumentFaceAmount",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDebt20232025And2027NotesDetails",
      "http://www.veeco.com/role/DisclosureDebtCarryingValueDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DebtInstrumentInterestRateStatedPercentage": {
     "auth_ref": [
      "r36",
      "r453"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Contractual interest rate for funds borrowed, under the debt agreement.",
        "label": "Debt Instrument, Interest Rate, Stated Percentage",
        "terseLabel": "Interest rate (as a percent)"
       }
      }
     },
     "localname": "DebtInstrumentInterestRateStatedPercentage",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDebt20232025And2027NotesDetails"
     ],
     "xbrltype": "percentItemType"
    },
    "us-gaap_DebtInstrumentLineItems": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.",
        "label": "Debt Instrument [Line Items]",
        "terseLabel": "Debt"
       }
      }
     },
     "localname": "DebtInstrumentLineItems",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDebt20232025And2027NotesDetails",
      "http://www.veeco.com/role/DisclosureDebtCappedCallTransactionsDetails",
      "http://www.veeco.com/role/DisclosureDebtCarryingValueDetails",
      "http://www.veeco.com/role/DisclosureDebtConvertibleSeniorNotesDetails",
      "http://www.veeco.com/role/DisclosureDebtInterestExpenseDetails",
      "http://www.veeco.com/role/DisclosureDebtRevolvingCreditFacilityDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_DebtInstrumentNameDomain": {
     "auth_ref": [
      "r38",
      "r302",
      "r452",
      "r453",
      "r454",
      "r455",
      "r456",
      "r458",
      "r464",
      "r465",
      "r466",
      "r467",
      "r469",
      "r470",
      "r471",
      "r472",
      "r473",
      "r474",
      "r681",
      "r825",
      "r826",
      "r827",
      "r828",
      "r829",
      "r871"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The name for the particular debt instrument or borrowing that distinguishes it from other debt instruments or borrowings, including draws against credit facilities.",
        "label": "Debt Instrument, Name [Domain]"
       }
      }
     },
     "localname": "DebtInstrumentNameDomain",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDebt20232025And2027NotesDetails",
      "http://www.veeco.com/role/DisclosureDebtCarryingValueDetails",
      "http://www.veeco.com/role/DisclosureDebtConvertibleSeniorNotesDetails",
      "http://www.veeco.com/role/DisclosureDebtInterestExpenseDetails",
      "http://www.veeco.com/role/DisclosureDebtRevolvingCreditFacilityDetails",
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfStockholdersEquity"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_DebtInstrumentTable": {
     "auth_ref": [
      "r38",
      "r145",
      "r147",
      "r148",
      "r149",
      "r215",
      "r216",
      "r218",
      "r232",
      "r302",
      "r452",
      "r453",
      "r454",
      "r455",
      "r456",
      "r458",
      "r464",
      "r465",
      "r466",
      "r467",
      "r469",
      "r470",
      "r471",
      "r472",
      "r473",
      "r474",
      "r477",
      "r681",
      "r825",
      "r826",
      "r827",
      "r828",
      "r829",
      "r871"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "A table or schedule providing information pertaining to long-term debt instruments or arrangements, including identification, terms, features, collateral requirements and other information necessary to a fair presentation. These are debt arrangements that originally required repayment more than twelve months after issuance or greater than the normal operating cycle of the company, if longer.",
        "label": "Schedule of Long-term Debt Instruments [Table]"
       }
      }
     },
     "localname": "DebtInstrumentTable",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDebt20232025And2027NotesDetails",
      "http://www.veeco.com/role/DisclosureDebtCappedCallTransactionsDetails",
      "http://www.veeco.com/role/DisclosureDebtCarryingValueDetails",
      "http://www.veeco.com/role/DisclosureDebtConvertibleSeniorNotesDetails",
      "http://www.veeco.com/role/DisclosureDebtInterestExpenseDetails",
      "http://www.veeco.com/role/DisclosureDebtRevolvingCreditFacilityDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_DebtInstrumentTerm": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Period of time between issuance and maturity of debt instrument, in PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days.",
        "label": "Debt Instrument, Term",
        "terseLabel": "Debt instrument term"
       }
      }
     },
     "localname": "DebtInstrumentTerm",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDebtRevolvingCreditFacilityDetails"
     ],
     "xbrltype": "durationItemType"
    },
    "us-gaap_DebtInstrumentUnamortizedDiscount": {
     "auth_ref": [
      "r215",
      "r218",
      "r915"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount, after accumulated amortization, of debt discount.",
        "label": "Debt Instrument, Unamortized Discount",
        "verboseLabel": "Debt discount"
       }
      }
     },
     "localname": "DebtInstrumentUnamortizedDiscount",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDebtConvertibleSeniorNotesDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DebtInstrumentUnamortizedDiscountPremiumAndDebtIssuanceCostsNet": {
     "auth_ref": [
      "r217",
      "r464",
      "r479",
      "r826",
      "r827"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureDebtCarryingValueDetails": {
       "order": 2.0,
       "parentTag": "us-gaap_LongTermDebt",
       "weight": -1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of unamortized debt discount (premium) and debt issuance costs.",
        "label": "Debt Instrument, Unamortized Discount (Premium) and Debt Issuance Costs, Net",
        "negatedLabel": "Unamortized debt discount/transaction costs"
       }
      }
     },
     "localname": "DebtInstrumentUnamortizedDiscountPremiumAndDebtIssuanceCostsNet",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDebtCarryingValueDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLonger": {
     "auth_ref": [
      "r393",
      "r416",
      "r823"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of investment in debt security measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale), in continuous unrealized loss position for more than 12 months, without allowance for credit loss. Includes beneficial interest in securitized financial asset.",
        "label": "Debt Securities Available For Sale Continuous Unrealized Loss Position 12 Months Or Longer",
        "terseLabel": "Investments, Continuous loss position for 12 months or more, Estimated Fair Value"
       }
      }
     },
     "localname": "DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLonger",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureInvestmentsAvailableForSaleSecuritiesDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLongerAccumulatedLoss": {
     "auth_ref": [
      "r393",
      "r416"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of accumulated unrealized loss on investment in debt security measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale), in continuous unrealized loss position for 12 months or longer, without allowance for credit loss. Includes beneficial interest in securitized financial asset.",
        "label": "Debt Securities, Available-for-Sale, Continuous Unrealized Loss Position, 12 Months or Longer, Accumulated Loss",
        "negatedLabel": "Investments, Continuous loss position for 12 months or more, Gross Unrealized Losses"
       }
      }
     },
     "localname": "DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLongerAccumulatedLoss",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureInvestmentsAvailableForSaleSecuritiesDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12Months": {
     "auth_ref": [
      "r393",
      "r416",
      "r823"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of investment in debt security measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale), in continuous unrealized loss position for less than 12 months, without allowance for credit loss. Includes beneficial interest in securitized financial asset.",
        "label": "Debt Securities, Available-for-Sale, Continuous Unrealized Loss Position, Less than 12 Months",
        "terseLabel": "Investments, Continuous loss position for less than 12 months, Estimated Fair Value"
       }
      }
     },
     "localname": "DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12Months",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureInvestmentsAvailableForSaleSecuritiesDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12MonthsAccumulatedLoss": {
     "auth_ref": [
      "r393",
      "r416"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of accumulated unrealized loss on investment in debt security measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale), in continuous unrealized loss position for less than 12 months, without allowance for credit loss. Includes beneficial interest in securitized financial asset.",
        "label": "Debt Securities, Available-for-Sale, Continuous Unrealized Loss Position, Less than 12 Months, Accumulated Loss",
        "negatedLabel": "Investments, Continuous loss position for less than 12 months, Gross Unrealized Losses"
       }
      }
     },
     "localname": "DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12MonthsAccumulatedLoss",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureInvestmentsAvailableForSaleSecuritiesDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DebtSecuritiesAvailableForSaleTable": {
     "auth_ref": [
      "r394"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Disclosure of information about investment in debt security measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale).",
        "label": "Debt Securities, Available-for-sale [Table]"
       }
      }
     },
     "localname": "DebtSecuritiesAvailableForSaleTable",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureInvestmentsAvailableForSaleSecuritiesDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_DebtSecuritiesAvailableForSaleUnrealizedLossPositionFairValueTableTextBlock": {
     "auth_ref": [
      "r392",
      "r823",
      "r892"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of fair value of investment in debt security measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale), in unrealized loss position, without allowance for credit loss. Includes beneficial interest in securitized financial asset.",
        "label": "Debt Securities Available For Sale Unrealized Loss Position Fair Value Table Text Block",
        "terseLabel": "Schedule of fair value and unrealized losses of available-for-sale securities in a loss position"
       }
      }
     },
     "localname": "DebtSecuritiesAvailableForSaleUnrealizedLossPositionFairValueTableTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureInvestmentsTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_DebtSecuritiesAvailableforSaleUnrealizedLossPositionAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Debt Securities, Available-for-Sale, Unrealized Loss Position [Abstract]"
       }
      }
     },
     "localname": "DebtSecuritiesAvailableforSaleUnrealizedLossPositionAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureInvestmentsAvailableForSaleSecuritiesDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_DeferredFederalIncomeTaxExpenseBenefit": {
     "auth_ref": [
      "r873",
      "r952",
      "r955"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureIncomeTaxesComponentsOfExpenseBenefitDetails": {
       "order": 1.0,
       "parentTag": "us-gaap_DeferredIncomeTaxExpenseBenefit",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of deferred federal tax expense (benefit) attributable to income (loss) from continuing operations. Includes, but is not limited to, deferred national tax expense (benefit) for non-US (United States of America) jurisdiction.",
        "label": "Deferred Federal Income Tax Expense (Benefit)",
        "terseLabel": "Federal"
       }
      }
     },
     "localname": "DeferredFederalIncomeTaxExpenseBenefit",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesComponentsOfExpenseBenefitDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DeferredForeignIncomeTaxExpenseBenefit": {
     "auth_ref": [
      "r184",
      "r873",
      "r952"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureIncomeTaxesComponentsOfExpenseBenefitDetails": {
       "order": 2.0,
       "parentTag": "us-gaap_DeferredIncomeTaxExpenseBenefit",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of deferred foreign income tax expense (benefit) pertaining to income (loss) from continuing operations.",
        "label": "Deferred Foreign Income Tax Expense (Benefit)",
        "terseLabel": "Foreign"
       }
      }
     },
     "localname": "DeferredForeignIncomeTaxExpenseBenefit",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesComponentsOfExpenseBenefitDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DeferredIncomeTaxAssetsNet": {
     "auth_ref": [
      "r584",
      "r585"
     ],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheets": {
       "order": 6.0,
       "parentTag": "us-gaap_Assets",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount, after allocation of valuation allowances and deferred tax liability, of deferred tax asset attributable to deductible differences and carryforwards, with jurisdictional netting.",
        "label": "Deferred Income Tax Assets, Net",
        "terseLabel": "Deferred income taxes"
       }
      }
     },
     "localname": "DeferredIncomeTaxAssetsNet",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DeferredIncomeTaxExpenseBenefit": {
     "auth_ref": [
      "r70",
      "r184",
      "r604",
      "r612",
      "r613",
      "r873"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureIncomeTaxesComponentsOfExpenseBenefitDetails": {
       "order": 2.0,
       "parentTag": "us-gaap_IncomeTaxExpenseBenefit",
       "weight": 1.0
      },
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "order": 4.0,
       "parentTag": "us-gaap_NetCashProvidedByUsedInOperatingActivities",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of deferred income tax expense (benefit) pertaining to income (loss) from continuing operations.",
        "label": "Deferred Income Tax Expense (Benefit)",
        "totalLabel": "Total deferred expense (benefit) for income taxes",
        "verboseLabel": "Deferred income taxes"
       }
      }
     },
     "localname": "DeferredIncomeTaxExpenseBenefit",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesComponentsOfExpenseBenefitDetails",
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DeferredIncomeTaxExpenseBenefitContinuingOperationsAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Deferred Income Tax Expense (Benefit), Continuing Operations [Abstract]",
        "terseLabel": "Deferred:"
       }
      }
     },
     "localname": "DeferredIncomeTaxExpenseBenefitContinuingOperationsAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesComponentsOfExpenseBenefitDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_DeferredIncomeTaxLiabilities": {
     "auth_ref": [
      "r17",
      "r18",
      "r224",
      "r234",
      "r597"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureIncomeTaxesDeferredTaxesDetails": {
       "order": 1.0,
       "parentTag": "us-gaap_DeferredTaxLiabilities",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of deferred tax liability attributable to taxable temporary differences.",
        "label": "Deferred Tax Liabilities, Gross",
        "totalLabel": "Total deferred tax liabilities"
       }
      }
     },
     "localname": "DeferredIncomeTaxLiabilities",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesDeferredTaxesDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DeferredIncomeTaxLiabilitiesNet": {
     "auth_ref": [
      "r584",
      "r585"
     ],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheets": {
       "order": 2.0,
       "parentTag": "us-gaap_Liabilities",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount, after deferred tax asset, of deferred tax liability attributable to taxable differences with jurisdictional netting.",
        "label": "Deferred Income Tax Liabilities, Net",
        "terseLabel": "Deferred income taxes"
       }
      }
     },
     "localname": "DeferredIncomeTaxLiabilitiesNet",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DeferredStateAndLocalIncomeTaxExpenseBenefit": {
     "auth_ref": [
      "r873",
      "r952",
      "r955"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureIncomeTaxesComponentsOfExpenseBenefitDetails": {
       "order": 3.0,
       "parentTag": "us-gaap_DeferredIncomeTaxExpenseBenefit",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of deferred state and local tax expense (benefit) attributable to income (loss) from continuing operations. Includes, but is not limited to, deferred regional, territorial, and provincial tax expense (benefit) for non-US (United States of America) jurisdiction.",
        "label": "Deferred State and Local Income Tax Expense (Benefit)",
        "terseLabel": "State and local"
       }
      }
     },
     "localname": "DeferredStateAndLocalIncomeTaxExpenseBenefit",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesComponentsOfExpenseBenefitDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DeferredTaxAssetsDeferredIncome": {
     "auth_ref": [
      "r182",
      "r950"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureIncomeTaxesDeferredTaxesDetails": {
       "order": 6.0,
       "parentTag": "us-gaap_DeferredTaxAssetsGross",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount before allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences from deferred income.",
        "label": "Deferred Tax Assets, Deferred Income",
        "terseLabel": "Customer deposits and deferred revenue"
       }
      }
     },
     "localname": "DeferredTaxAssetsDeferredIncome",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesDeferredTaxesDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DeferredTaxAssetsGross": {
     "auth_ref": [
      "r598"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureIncomeTaxesDeferredTaxesDetails": {
       "order": 1.0,
       "parentTag": "us-gaap_DeferredTaxAssetsNet",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount before allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences and carryforwards.",
        "label": "Deferred Tax Assets, Gross",
        "totalLabel": "Total deferred tax assets"
       }
      }
     },
     "localname": "DeferredTaxAssetsGross",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesDeferredTaxesDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DeferredTaxAssetsInProcessResearchAndDevelopment": {
     "auth_ref": [
      "r182",
      "r950"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureIncomeTaxesDeferredTaxesDetails": {
       "order": 8.0,
       "parentTag": "us-gaap_DeferredTaxAssetsGross",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount before allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences from in-process research and development costs expensed in connection with a business combination.",
        "label": "Deferred Tax Assets, in Process Research and Development",
        "terseLabel": "Research and experimental (\"R&amp;E\") capitalization"
       }
      }
     },
     "localname": "DeferredTaxAssetsInProcessResearchAndDevelopment",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesDeferredTaxesDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DeferredTaxAssetsInventory": {
     "auth_ref": [
      "r182",
      "r950"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureIncomeTaxesDeferredTaxesDetails": {
       "order": 1.0,
       "parentTag": "us-gaap_DeferredTaxAssetsGross",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount before allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences from inventory.",
        "label": "Deferred Tax Assets, Inventory",
        "terseLabel": "Inventory valuation"
       }
      }
     },
     "localname": "DeferredTaxAssetsInventory",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesDeferredTaxesDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DeferredTaxAssetsLiabilitiesNet": {
     "auth_ref": [
      "r949"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureIncomeTaxesDeferredTaxesDetails": {
       "order": null,
       "parentTag": null,
       "root": true,
       "weight": null
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount, after allocation of valuation allowances and deferred tax liability, of deferred tax asset attributable to deductible differences and carryforwards, without jurisdictional netting.",
        "label": "Deferred Tax Assets, Net",
        "totalLabel": "Net deferred taxes, asset"
       }
      }
     },
     "localname": "DeferredTaxAssetsLiabilitiesNet",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesDeferredTaxesDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DeferredTaxAssetsNet": {
     "auth_ref": [
      "r949"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureIncomeTaxesDeferredTaxesDetails": {
       "order": 2.0,
       "parentTag": "us-gaap_DeferredTaxLiabilities",
       "weight": -1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount after allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences and carryforwards.",
        "label": "Deferred Tax Assets, Net of Valuation Allowance",
        "totalLabel": "Net deferred tax assets"
       }
      }
     },
     "localname": "DeferredTaxAssetsNet",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesDeferredTaxesDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DeferredTaxAssetsOperatingLossCarryforwards": {
     "auth_ref": [
      "r182",
      "r950"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureIncomeTaxesDeferredTaxesDetails": {
       "order": 2.0,
       "parentTag": "us-gaap_DeferredTaxAssetsGross",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount before allocation of valuation allowances of deferred tax asset attributable to deductible operating loss carryforwards.",
        "label": "Deferred Tax Assets, Operating Loss Carryforwards",
        "terseLabel": "Net operating losses",
        "verboseLabel": "Net deferred tax asset"
       }
      }
     },
     "localname": "DeferredTaxAssetsOperatingLossCarryforwards",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesDeferredTaxesDetails",
      "http://www.veeco.com/role/DisclosureIncomeTaxesOperatingLossCarryforwardsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DeferredTaxAssetsOther": {
     "auth_ref": [
      "r182",
      "r950"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureIncomeTaxesDeferredTaxesDetails": {
       "order": 9.0,
       "parentTag": "us-gaap_DeferredTaxAssetsGross",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount, before allocation of valuation allowance, of deferred tax asset attributable to deductible temporary differences, classified as other.",
        "label": "Deferred Tax Assets, Other",
        "terseLabel": "Other"
       }
      }
     },
     "localname": "DeferredTaxAssetsOther",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesDeferredTaxesDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DeferredTaxAssetsTaxCreditCarryforwards": {
     "auth_ref": [
      "r180",
      "r182",
      "r950"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureIncomeTaxesDeferredTaxesDetails": {
       "order": 3.0,
       "parentTag": "us-gaap_DeferredTaxAssetsGross",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount, before allocation of a valuation allowances, of deferred tax assets attributable to deductible tax credit carryforwards including, but not limited to, research, foreign, general business, alternative minimum tax, and other deductible tax credit carryforwards.",
        "label": "Deferred Tax Assets, Tax Credit Carryforwards",
        "terseLabel": "Credit carry forwards"
       }
      }
     },
     "localname": "DeferredTaxAssetsTaxCreditCarryforwards",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesDeferredTaxesDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost": {
     "auth_ref": [
      "r182",
      "r950"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureIncomeTaxesDeferredTaxesDetails": {
       "order": 5.0,
       "parentTag": "us-gaap_DeferredTaxAssetsGross",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount before allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences from share-based compensation.",
        "label": "Deferred Tax Assets, Tax Deferred Expense, Compensation and Benefits, Share-based Compensation Cost",
        "verboseLabel": "Share-based compensation"
       }
      }
     },
     "localname": "DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesDeferredTaxesDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReserves": {
     "auth_ref": [
      "r182",
      "r950"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureIncomeTaxesDeferredTaxesDetails": {
       "order": 4.0,
       "parentTag": "us-gaap_DeferredTaxAssetsGross",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount before allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences from warranty reserves.",
        "label": "Deferred Tax Assets, Tax Deferred Expense, Reserves and Accruals, Warranty Reserves",
        "terseLabel": "Warranty and installation accruals"
       }
      }
     },
     "localname": "DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReserves",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesDeferredTaxesDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DeferredTaxAssetsValuationAllowance": {
     "auth_ref": [
      "r599"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureIncomeTaxesDeferredTaxesDetails": {
       "order": 2.0,
       "parentTag": "us-gaap_DeferredTaxAssetsNet",
       "weight": -1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of deferred tax assets for which it is more likely than not that a tax benefit will not be realized.",
        "label": "Deferred Tax Assets, Valuation Allowance",
        "negatedLabel": "Valuation allowance"
       }
      }
     },
     "localname": "DeferredTaxAssetsValuationAllowance",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesDeferredTaxesDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DeferredTaxLiabilities": {
     "auth_ref": [
      "r173",
      "r949"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureIncomeTaxesDeferredTaxesDetails": {
       "order": null,
       "parentTag": null,
       "root": true,
       "weight": null
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount, after deferred tax asset, of deferred tax liability attributable to taxable differences without jurisdictional netting.",
        "label": "Deferred Tax Liabilities, Net",
        "negatedTotalLabel": "Net deferred taxes, liability"
       }
      }
     },
     "localname": "DeferredTaxLiabilities",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesDeferredTaxesDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DeferredTaxLiabilitiesGoodwillAndIntangibleAssetsIntangibleAssets": {
     "auth_ref": [
      "r182",
      "r950"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureIncomeTaxesDeferredTaxesDetails": {
       "order": 1.0,
       "parentTag": "us-gaap_DeferredIncomeTaxLiabilities",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of deferred tax liability attributable to taxable temporary differences from intangible assets other than goodwill.",
        "label": "Deferred Tax Liabilities, Intangible Assets",
        "terseLabel": "Purchased intangible assets"
       }
      }
     },
     "localname": "DeferredTaxLiabilitiesGoodwillAndIntangibleAssetsIntangibleAssets",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesDeferredTaxesDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DeferredTaxLiabilitiesLeasingArrangements": {
     "auth_ref": [
      "r182",
      "r950"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureIncomeTaxesDeferredTaxesDetails": {
       "order": 3.0,
       "parentTag": "us-gaap_DeferredIncomeTaxLiabilities",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of deferred tax liability attributable to taxable temporary differences from leasing arrangements.",
        "label": "Deferred Tax Liabilities, Leasing Arrangements",
        "terseLabel": "Operating leases"
       }
      }
     },
     "localname": "DeferredTaxLiabilitiesLeasingArrangements",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesDeferredTaxesDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DeferredTaxLiabilitiesPropertyPlantAndEquipment": {
     "auth_ref": [
      "r182",
      "r950"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureIncomeTaxesDeferredTaxesDetails": {
       "order": 4.0,
       "parentTag": "us-gaap_DeferredIncomeTaxLiabilities",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of deferred tax liability attributable to taxable temporary differences from property, plant, and equipment.",
        "label": "Deferred Tax Liabilities, Property, Plant and Equipment",
        "terseLabel": "Depreciation"
       }
      }
     },
     "localname": "DeferredTaxLiabilitiesPropertyPlantAndEquipment",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesDeferredTaxesDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DeferredTaxLiabilitiesUndistributedForeignEarnings": {
     "auth_ref": [
      "r950"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of deferred tax liability attributable to taxable temporary differences from undistributed earnings of subsidiary and other recognized entity not within country of domicile. Includes, but is not limited to, other basis differences.",
        "label": "Deferred Tax Liabilities, Undistributed Foreign Earnings",
        "verboseLabel": "Accrual for foreign tax withholdings on unremitted earnings"
       }
      }
     },
     "localname": "DeferredTaxLiabilitiesUndistributedForeignEarnings",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesDeferredTaxesDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DefinedContributionPlanCostRecognized": {
     "auth_ref": [
      "r532"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of cost for defined contribution plan.",
        "label": "Defined Contribution Plan, Cost Recognized",
        "terseLabel": "Aggregate employer's contribution to pension plans"
       }
      }
     },
     "localname": "DefinedContributionPlanCostRecognized",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureRetirementPlansDefinedContributionPlanDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DefinedContributionPlanDisclosureLineItems": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.",
        "label": "Defined Contribution Plan Disclosure [Line Items]",
        "terseLabel": "Defined contribution plan disclosures"
       }
      }
     },
     "localname": "DefinedContributionPlanDisclosureLineItems",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureRetirementPlansDefinedContributionPlanDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_DefinedContributionPlanEmployerMatchingContributionPercent": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Percentage of employees' gross pay for which the employer contributes a matching contribution to a defined contribution plan.",
        "label": "Defined Contribution Plan, Employer Matching Contribution, Percent of Employees' Gross Pay",
        "verboseLabel": "Employer's contribution as a percentage of employee's eligible compensation"
       }
      }
     },
     "localname": "DefinedContributionPlanEmployerMatchingContributionPercent",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureRetirementPlansDefinedContributionPlanDetails"
     ],
     "xbrltype": "percentItemType"
    },
    "us-gaap_DefinedContributionPlanEmployerMatchingContributionPercentOfMatch": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Percentage employer matches of the employee's percentage contribution matched.",
        "label": "Defined Contribution Plan, Employer Matching Contribution, Percent of Match",
        "terseLabel": "Employer's matching contribution for every dollar the employees contribute (as a percent)"
       }
      }
     },
     "localname": "DefinedContributionPlanEmployerMatchingContributionPercentOfMatch",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureRetirementPlansDefinedContributionPlanDetails"
     ],
     "xbrltype": "percentItemType"
    },
    "us-gaap_DefinedContributionPlanTable": {
     "auth_ref": [
      "r532"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Disclosure of information about defined contribution pension plans or defined contribution other postretirement plans, separately for pension plans and other postretirement benefit plans.",
        "label": "Defined Contribution Plan [Table]"
       }
      }
     },
     "localname": "DefinedContributionPlanTable",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureRetirementPlansDefinedContributionPlanDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_DepositAssets": {
     "auth_ref": [
      "r864"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The carrying amount of the asset transferred to a third party to serve as a deposit, which typically serves as security against failure by the transferor to perform under terms of an agreement.",
        "label": "Deposit Assets",
        "terseLabel": "Deposits with suppliers"
       }
      }
     },
     "localname": "DepositAssets",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesSuppliersDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_Depreciation": {
     "auth_ref": [
      "r70",
      "r117"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The amount of expense recognized in the current period that reflects the allocation of the cost of tangible assets over the assets' useful lives. Includes production and non-production related depreciation.",
        "label": "Depreciation",
        "terseLabel": "Depreciation expense"
       }
      }
     },
     "localname": "Depreciation",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosurePropertyPlantAndEquipmentPropertyAndEquipmentDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DepreciationDepletionAndAmortization": {
     "auth_ref": [
      "r70",
      "r362"
     ],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "order": 2.0,
       "parentTag": "us-gaap_NetCashProvidedByUsedInOperatingActivities",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The aggregate expense recognized in the current period that allocates the cost of tangible assets, intangible assets, or depleting assets to periods that benefit from use of the assets.",
        "label": "Depreciation, Depletion and Amortization",
        "terseLabel": "Depreciation and amortization"
       }
      }
     },
     "localname": "DepreciationDepletionAndAmortization",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DerivativeContractTypeDomain": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Financial instrument or contract with one or more underlyings, notional amount or payment provision or both, and the contract can be net settled by means outside the contract or delivery of an asset.",
        "label": "Derivative Contract [Domain]"
       }
      }
     },
     "localname": "DerivativeContractTypeDomain",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDebtCappedCallTransactionsDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_DerivativeInstrumentRiskAxis": {
     "auth_ref": [
      "r200",
      "r201",
      "r203",
      "r205",
      "r814"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Information by type of derivative contract.",
        "label": "Derivative Instrument [Axis]"
       }
      }
     },
     "localname": "DerivativeInstrumentRiskAxis",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDebtCappedCallTransactionsDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock": {
     "auth_ref": [
      "r539",
      "r570",
      "r571",
      "r573",
      "r578",
      "r840"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The entire disclosure for share-based payment arrangement.",
        "label": "Disclosure of Compensation Related Costs, Share-based Payments [Text Block]",
        "verboseLabel": "Stock Plans"
       }
      }
     },
     "localname": "DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockPlans"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Stock Plans"
       }
      }
     },
     "localname": "DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "xbrltype": "stringItemType"
    },
    "us-gaap_DiscontinuedOperationsAndDisposalGroupsAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Dispositions"
       }
      }
     },
     "localname": "DiscontinuedOperationsAndDisposalGroupsAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "xbrltype": "stringItemType"
    },
    "us-gaap_DisposalGroupClassificationAxis": {
     "auth_ref": [
      "r252"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Information by disposal group classification.",
        "label": "Disposal Group Classification [Axis]"
       }
      }
     },
     "localname": "DisposalGroupClassificationAxis",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDispositionsDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_DisposalGroupClassificationDomain": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Component or group of components disposed of, including but not limited to, disposal group held-for-sale or disposed of by sale, disposed of by means other than sale, and discontinued operations.",
        "label": "Disposal Group Classification [Domain]"
       }
      }
     },
     "localname": "DisposalGroupClassificationDomain",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDispositionsDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_DisposalGroupDisposedOfBySaleNotDiscontinuedOperationsMember": {
     "auth_ref": [
      "r116",
      "r121"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Disposal group that has been sold. Excludes disposals classified as discontinued operations.",
        "label": "Assets sold"
       }
      }
     },
     "localname": "DisposalGroupDisposedOfBySaleNotDiscontinuedOperationsMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDispositionsDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_DisposalGroupIncludingDiscontinuedOperationConsideration": {
     "auth_ref": [],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of consideration received or receivable for the disposal of assets and liabilities, including discontinued operation.",
        "label": "Disposal Group, Including Discontinued Operation, Consideration",
        "terseLabel": "Consideration"
       }
      }
     },
     "localname": "DisposalGroupIncludingDiscontinuedOperationConsideration",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDispositionsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DisposalGroupsIncludingDiscontinuedOperationsDisclosureTextBlock": {
     "auth_ref": [
      "r11",
      "r123"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The entire disclosure related to a disposal group. Includes, but is not limited to, a discontinued operation, disposal classified as held-for-sale or disposed of by means other than sale or disposal of an individually significant component.",
        "label": "Disposal Groups, Including Discontinued Operations, Disclosure [Text Block]",
        "terseLabel": "Dispositions"
       }
      }
     },
     "localname": "DisposalGroupsIncludingDiscontinuedOperationsDisclosureTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDispositions"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_DisposalGroupsIncludingDiscontinuedOperationsNameDomain": {
     "auth_ref": [
      "r837",
      "r838"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Name of disposal group.",
        "label": "Disposal Group Name [Domain]"
       }
      }
     },
     "localname": "DisposalGroupsIncludingDiscontinuedOperationsNameDomain",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDispositionsDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_DomesticCountryMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Designated tax department of the government that is entitled to levy and collect income taxes from the entity in its country of domicile.",
        "label": "Federal"
       }
      }
     },
     "localname": "DomesticCountryMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesTaxCreditCarryforwardsDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_EMEAMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Regions of Europe, Middle East and Africa.",
        "label": "EMEA"
       }
      }
     },
     "localname": "EMEAMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformationGeographicDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_EarningsPerShareAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Income Per Common Share",
        "terseLabel": "Income per common share:"
       }
      }
     },
     "localname": "EarningsPerShareAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_EarningsPerShareBasic": {
     "auth_ref": [
      "r285",
      "r319",
      "r320",
      "r321",
      "r322",
      "r323",
      "r328",
      "r331",
      "r340",
      "r341",
      "r342",
      "r346",
      "r645",
      "r646",
      "r758",
      "r763",
      "r820"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The amount of net income (loss) for the period per each share of common stock or unit outstanding during the reporting period.",
        "label": "Earnings Per Share, Basic",
        "terseLabel": "Basic (in dollars per share)",
        "verboseLabel": "Basic income per common share (in dollars per share)"
       }
      }
     },
     "localname": "EarningsPerShareBasic",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomePerCommonShareBasicAndDilutedDetails",
      "http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesRecentlyAdoptedAccountingStandardsDetails",
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "xbrltype": "perShareItemType"
    },
    "us-gaap_EarningsPerShareBasicOtherDisclosuresAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Earnings Per Share, Basic, Other Disclosures [Abstract]",
        "terseLabel": "Basic income (loss) per share"
       }
      }
     },
     "localname": "EarningsPerShareBasicOtherDisclosuresAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomePerCommonShareSharesExcludedFromEpsDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_EarningsPerShareDiluted": {
     "auth_ref": [
      "r285",
      "r319",
      "r320",
      "r321",
      "r322",
      "r323",
      "r331",
      "r340",
      "r341",
      "r342",
      "r346",
      "r645",
      "r646",
      "r758",
      "r763",
      "r820"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The amount of net income (loss) for the period available to each share of common stock or common unit outstanding during the reporting period and to each share or unit that would have been outstanding assuming the issuance of common shares or units for all dilutive potential common shares or units outstanding during the reporting period.",
        "label": "Earnings Per Share, Diluted",
        "terseLabel": "Diluted (in dollars per share)",
        "verboseLabel": "Diluted earnings per share (in dollars per share)"
       }
      }
     },
     "localname": "EarningsPerShareDiluted",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomePerCommonShareBasicAndDilutedDetails",
      "http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesRecentlyAdoptedAccountingStandardsDetails",
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "xbrltype": "perShareItemType"
    },
    "us-gaap_EarningsPerShareDilutedOtherDisclosuresAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Earnings Per Share, Diluted, Other Disclosures [Abstract]",
        "terseLabel": "Diluted income (loss) per share"
       }
      }
     },
     "localname": "EarningsPerShareDilutedOtherDisclosuresAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomePerCommonShareSharesExcludedFromEpsDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_EarningsPerShareTextBlock": {
     "auth_ref": [
      "r343",
      "r344",
      "r345",
      "r347"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The entire disclosure for earnings per share.",
        "label": "Earnings Per Share [Text Block]",
        "terseLabel": "Income Per Common Share"
       }
      }
     },
     "localname": "EarningsPerShareTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomePerCommonShare"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations": {
     "auth_ref": [
      "r963"
     ],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "order": 4.0,
       "parentTag": "us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of increase (decrease) from effect of exchange rate changes on cash and cash equivalents, and cash and cash equivalents restricted to withdrawal or usage; held in foreign currencies; including, but not limited to, disposal group and discontinued operations. Cash includes, but is not limited to, currency on hand, demand deposits with banks or financial institutions, and other accounts with general characteristics of demand deposits. Cash equivalents include, but are not limited to, short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates.",
        "label": "Effect of Exchange Rate on Cash, Cash Equivalents, Restricted Cash and Restricted Cash Equivalents, Including Disposal Group and Discontinued Operations",
        "terseLabel": "Effect of exchange rate changes on cash and cash equivalents"
       }
      }
     },
     "localname": "EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_EmployeeRelatedLiabilitiesCurrent": {
     "auth_ref": [
      "r34"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesComponentsDetails": {
       "order": 1.0,
       "parentTag": "veco_AccruedAndOtherLiabilitiesCurrent",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Total of the carrying values as of the balance sheet date of obligations incurred through that date and payable for obligations related to services received from employees, such as accrued salaries and bonuses, payroll taxes and fringe benefits. Used to reflect the current portion of the liabilities (due within one year or within the normal operating cycle if longer).",
        "label": "Employee-related Liabilities, Current",
        "terseLabel": "Payroll and related benefits"
       }
      }
     },
     "localname": "EmployeeRelatedLiabilitiesCurrent",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesComponentsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Employee Service Share-based Compensation, Aggregate Disclosures [Abstract]",
        "verboseLabel": "Recognized share-based compensation"
       }
      }
     },
     "localname": "EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockPlansRecognizedShareBasedCompensationDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized": {
     "auth_ref": [
      "r572"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of cost not yet recognized for nonvested award under share-based payment arrangement.",
        "label": "Employee Service Share-based Compensation, Nonvested Awards, Compensation Cost Not yet Recognized",
        "verboseLabel": "Unrecognized Share-Based Compensation Costs"
       }
      }
     },
     "localname": "EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockPlansUnrecognizedShareBasedCompensationCostsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Employee Service Share-based Compensation, Nonvested Awards, Compensation Cost Not yet Recognized [Abstract]",
        "terseLabel": "Unrecognized share-based compensation costs"
       }
      }
     },
     "localname": "EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockPlansUnrecognizedShareBasedCompensationCostsDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1": {
     "auth_ref": [
      "r572"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Weighted-average period over which cost not yet recognized is expected to be recognized for award under share-based payment arrangement, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days.",
        "label": "Employee Service Share-based Compensation, Nonvested Awards, Compensation Cost Not yet Recognized, Period for Recognition",
        "verboseLabel": "Weighted Average Period Expected to be Recognized"
       }
      }
     },
     "localname": "EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockPlansUnrecognizedShareBasedCompensationCostsDetails"
     ],
     "xbrltype": "durationItemType"
    },
    "us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense": {
     "auth_ref": [
      "r569"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of tax benefit for recognition of expense of award under share-based payment arrangement.",
        "label": "Share-Based Payment Arrangement, Expense, Tax Benefit",
        "terseLabel": "Share-based compensation tax benefit"
       }
      }
     },
     "localname": "EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockPlansRecognizedShareBasedCompensationDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_EmployeeStockOptionMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Share-based payment arrangement granting right, subject to vesting and other restrictions, to purchase or sell certain number of shares at predetermined price for specified period of time.",
        "label": "Stock options"
       }
      }
     },
     "localname": "EmployeeStockOptionMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockPlans2019PlanDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_EquityComponentDomain": {
     "auth_ref": [
      "r144",
      "r249",
      "r280",
      "r281",
      "r282",
      "r310",
      "r311",
      "r312",
      "r316",
      "r324",
      "r326",
      "r349",
      "r404",
      "r496",
      "r574",
      "r575",
      "r576",
      "r608",
      "r609",
      "r644",
      "r668",
      "r669",
      "r670",
      "r671",
      "r672",
      "r673",
      "r711",
      "r768",
      "r769",
      "r770"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Components of equity are the parts of the total Equity balance including that which is allocated to common, preferred, treasury stock, retained earnings, etc.",
        "label": "Equity Component [Domain]"
       }
      }
     },
     "localname": "EquityComponentDomain",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockholdersEquityAociRollforwardDetails",
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfStockholdersEquity"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_EquitySecuritiesWithoutReadilyDeterminableFairValueAmount": {
     "auth_ref": [
      "r395"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of investment in equity security without readily determinable fair value.",
        "label": "Equity Securities without Readily Determinable Fair Value, Amount",
        "terseLabel": "Carrying value of investment"
       }
      }
     },
     "localname": "EquitySecuritiesWithoutReadilyDeterminableFairValueAmount",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureInvestmentsOtherInvestmentDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_EquitySecuritiesWithoutReadilyDeterminableFairValueLineItems": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.",
        "label": "Equity Securities without Readily Determinable Fair Value [Line Items]",
        "terseLabel": "Other Investment"
       }
      }
     },
     "localname": "EquitySecuritiesWithoutReadilyDeterminableFairValueLineItems",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureInvestmentsOtherInvestmentDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_EquitySecuritiesWithoutReadilyDeterminableFairValueTable": {
     "auth_ref": [
      "r887",
      "r888",
      "r889"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Disclosure of information about investment in equity security without readily determinable fair value.",
        "label": "Equity Securities without Readily Determinable Fair Value [Table]"
       }
      }
     },
     "localname": "EquitySecuritiesWithoutReadilyDeterminableFairValueTable",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureInvestmentsOtherInvestmentDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_ExtinguishmentOfDebtAmount": {
     "auth_ref": [],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Gross amount of debt extinguished.",
        "label": "Extinguishment of Debt, Amount",
        "terseLabel": "Repurchased and retired amount"
       }
      }
     },
     "localname": "ExtinguishmentOfDebtAmount",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDebt20232025And2027NotesDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.",
        "label": "Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]",
        "terseLabel": "Major categories of assets and liabilities measured on a recurring basis, at fair value"
       }
      }
     },
     "localname": "FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureFairValueMeasurementsDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable": {
     "auth_ref": [
      "r648",
      "r649",
      "r653"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Disclosure of information about asset and liability measured at fair value on recurring and nonrecurring basis.",
        "label": "Fair Value Measurements, Recurring and Nonrecurring [Table]"
       }
      }
     },
     "localname": "FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureFairValueMeasurementsDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_FairValueAssetsMeasuredOnRecurringBasisTextBlock": {
     "auth_ref": [
      "r207",
      "r208"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of assets, including [financial] instruments measured at fair value that are classified in stockholders' equity, if any, by class that are measured at fair value on a recurring basis. The disclosures contemplated herein include the fair value measurements at the reporting date by the level within the fair value hierarchy in which the fair value measurements in their entirety fall, segregating fair value measurements using quoted prices in active markets for identical assets (Level 1), significant other observable inputs (Level 2), and significant unobservable inputs (Level 3).",
        "label": "Fair Value, Assets Measured on Recurring Basis [Table Text Block]",
        "verboseLabel": "Schedule of assets measured on a recurring basis at fair value"
       }
      }
     },
     "localname": "FairValueAssetsMeasuredOnRecurringBasisTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureFairValueMeasurementsTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_FairValueByFairValueHierarchyLevelAxis": {
     "auth_ref": [
      "r466",
      "r518",
      "r519",
      "r520",
      "r521",
      "r522",
      "r523",
      "r649",
      "r718",
      "r719",
      "r720",
      "r826",
      "r827",
      "r834",
      "r835",
      "r836"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Information by level within fair value hierarchy and fair value measured at net asset value per share as practical expedient.",
        "label": "Fair Value, Hierarchy [Axis]"
       }
      }
     },
     "localname": "FairValueByFairValueHierarchyLevelAxis",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureFairValueMeasurementsDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_FairValueByMeasurementFrequencyAxis": {
     "auth_ref": [
      "r648",
      "r649",
      "r650",
      "r651",
      "r654"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Information by measurement frequency.",
        "label": "Measurement Frequency [Axis]"
       }
      }
     },
     "localname": "FairValueByMeasurementFrequencyAxis",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureFairValueMeasurementsDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_FairValueDisclosuresAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Fair Value Measurements"
       }
      }
     },
     "localname": "FairValueDisclosuresAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "xbrltype": "stringItemType"
    },
    "us-gaap_FairValueDisclosuresTextBlock": {
     "auth_ref": [
      "r652"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The entire disclosure for the fair value of financial instruments (as defined), including financial assets and financial liabilities (collectively, as defined), and the measurements of those instruments as well as disclosures related to the fair value of non-financial assets and liabilities. Such disclosures about the financial instruments, assets, and liabilities would include: (1) the fair value of the required items together with their carrying amounts (as appropriate); (2) for items for which it is not practicable to estimate fair value, disclosure would include: (a) information pertinent to estimating fair value (including, carrying amount, effective interest rate, and maturity, and (b) the reasons why it is not practicable to estimate fair value; (3) significant concentrations of credit risk including: (a) information about the activity, region, or economic characteristics identifying a concentration, (b) the maximum amount of loss the entity is exposed to based on the gross fair value of the related item, (c) policy for requiring collateral or other security and information as to accessing such collateral or security, and (d) the nature and brief description of such collateral or security; (4) quantitative information about market risks and how such risks are managed; (5) for items measured on both a recurring and nonrecurring basis information regarding the inputs used to develop the fair value measurement; and (6) for items presented in the financial statement for which fair value measurement is elected: (a) information necessary to understand the reasons for the election, (b) discussion of the effect of fair value changes on earnings, (c) a description of [similar groups] items for which the election is made and the relation thereof to the balance sheet, the aggregate carrying value of items included in the balance sheet that are not eligible for the election; (7) all other required (as defined) and desired information.",
        "label": "Fair Value Disclosures [Text Block]",
        "terseLabel": "Fair Value Measurements"
       }
      }
     },
     "localname": "FairValueDisclosuresTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureFairValueMeasurements"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_FairValueInputsLevel1Member": {
     "auth_ref": [
      "r466",
      "r518",
      "r523",
      "r649",
      "r718",
      "r834",
      "r835",
      "r836"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Quoted prices in active markets for identical assets or liabilities that the reporting entity can access at the measurement date.",
        "label": "Level 1"
       }
      }
     },
     "localname": "FairValueInputsLevel1Member",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureFairValueMeasurementsDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_FairValueInputsLevel2Member": {
     "auth_ref": [
      "r466",
      "r518",
      "r523",
      "r649",
      "r719",
      "r826",
      "r827",
      "r834",
      "r835",
      "r836"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Inputs other than quoted prices included within level 1 that are observable for an asset or liability, either directly or indirectly, including, but not limited to, quoted prices for similar assets or liabilities in active markets, or quoted prices for identical or similar assets or liabilities in inactive markets.",
        "label": "Level 2"
       }
      }
     },
     "localname": "FairValueInputsLevel2Member",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureFairValueMeasurementsDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_FairValueMeasurementFrequencyDomain": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Measurement frequency.",
        "label": "Fair Value, Measurement Frequency [Domain]"
       }
      }
     },
     "localname": "FairValueMeasurementFrequencyDomain",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureFairValueMeasurementsDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_FairValueMeasurementsFairValueHierarchyDomain": {
     "auth_ref": [
      "r466",
      "r518",
      "r519",
      "r520",
      "r521",
      "r522",
      "r523",
      "r718",
      "r719",
      "r720",
      "r826",
      "r827",
      "r834",
      "r835",
      "r836"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Categories used to prioritize the inputs to valuation techniques to measure fair value.",
        "label": "Fair Value Hierarchy [Domain]"
       }
      }
     },
     "localname": "FairValueMeasurementsFairValueHierarchyDomain",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureFairValueMeasurementsDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_FairValueMeasurementsRecurringMember": {
     "auth_ref": [
      "r652",
      "r654"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Frequent fair value measurement. Includes, but is not limited to, fair value adjustment for impairment of asset, liability or equity, frequently measured at fair value.",
        "label": "Measured on a recurring basis"
       }
      }
     },
     "localname": "FairValueMeasurementsRecurringMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureFairValueMeasurementsDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_FairValueOfFinancialInstrumentsPolicy": {
     "auth_ref": [
      "r209",
      "r210"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Disclosure of accounting policy for determining the fair value of financial instruments.",
        "label": "Fair Value of Financial Instruments, Policy [Policy Text Block]",
        "terseLabel": "Fair Value of Financial Instruments"
       }
      }
     },
     "localname": "FairValueOfFinancialInstrumentsPolicy",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesPolicies"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_FinancialInstrumentAxis": {
     "auth_ref": [
      "r390",
      "r391",
      "r408",
      "r410",
      "r411",
      "r412",
      "r413",
      "r415",
      "r417",
      "r418",
      "r477",
      "r494",
      "r633",
      "r715",
      "r716",
      "r717",
      "r718",
      "r719",
      "r720",
      "r721",
      "r722",
      "r723",
      "r724",
      "r725",
      "r726",
      "r727",
      "r728",
      "r729",
      "r730",
      "r731",
      "r732",
      "r733",
      "r734",
      "r735",
      "r736",
      "r737",
      "r738",
      "r739",
      "r740",
      "r741",
      "r742",
      "r743",
      "r744",
      "r823",
      "r887",
      "r888",
      "r889",
      "r983",
      "r984",
      "r985",
      "r986",
      "r987",
      "r988",
      "r989"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Information by type of financial instrument.",
        "label": "Financial Instrument [Axis]"
       }
      }
     },
     "localname": "FinancialInstrumentAxis",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureFairValueMeasurementsDetails",
      "http://www.veeco.com/role/DisclosureInvestmentsAvailableForSaleSecuritiesDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseAfterYearFive": {
     "auth_ref": [],
     "calculation": {
      "http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssetsAmortizationDetails": {
       "order": 6.0,
       "parentTag": "us-gaap_FiniteLivedIntangibleAssetsNet",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of amortization for asset, excluding financial asset and goodwill, lacking physical substance with finite life expected to be recognized after fifth fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).",
        "label": "Finite-Lived Intangible Assets, Amortization Expense, after Year Five",
        "terseLabel": "Thereafter"
       }
      }
     },
     "localname": "FiniteLivedIntangibleAssetsAmortizationExpenseAfterYearFive",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssetsAmortizationDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseNextTwelveMonths": {
     "auth_ref": [
      "r112"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssetsAmortizationDetails": {
       "order": 1.0,
       "parentTag": "us-gaap_FiniteLivedIntangibleAssetsNet",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of amortization for assets, excluding financial assets and goodwill, lacking physical substance with finite life expected to be recognized in next fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).",
        "label": "Finite-Lived Intangible Assets, Amortization Expense, Next Twelve Months",
        "terseLabel": "2023"
       }
      }
     },
     "localname": "FiniteLivedIntangibleAssetsAmortizationExpenseNextTwelveMonths",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssetsAmortizationDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFive": {
     "auth_ref": [
      "r112"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssetsAmortizationDetails": {
       "order": 5.0,
       "parentTag": "us-gaap_FiniteLivedIntangibleAssetsNet",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of amortization for assets, excluding financial assets and goodwill, lacking physical substance with finite life expected to be recognized in fifth fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).",
        "label": "Finite-Lived Intangible Assets, Amortization Expense, Year Five",
        "terseLabel": "2027"
       }
      }
     },
     "localname": "FiniteLivedIntangibleAssetsAmortizationExpenseYearFive",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssetsAmortizationDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFour": {
     "auth_ref": [
      "r112"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssetsAmortizationDetails": {
       "order": 4.0,
       "parentTag": "us-gaap_FiniteLivedIntangibleAssetsNet",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of amortization for assets, excluding financial assets and goodwill, lacking physical substance with finite life expected to be recognized in fourth fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).",
        "label": "Finite-Lived Intangible Assets, Amortization Expense, Year Four",
        "terseLabel": "2026"
       }
      }
     },
     "localname": "FiniteLivedIntangibleAssetsAmortizationExpenseYearFour",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssetsAmortizationDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearThree": {
     "auth_ref": [
      "r112"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssetsAmortizationDetails": {
       "order": 3.0,
       "parentTag": "us-gaap_FiniteLivedIntangibleAssetsNet",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of amortization for assets, excluding financial assets and goodwill, lacking physical substance with finite life expected to be recognized in third fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).",
        "label": "Finite-Lived Intangible Assets, Amortization Expense, Year Three",
        "terseLabel": "2025"
       }
      }
     },
     "localname": "FiniteLivedIntangibleAssetsAmortizationExpenseYearThree",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssetsAmortizationDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearTwo": {
     "auth_ref": [
      "r112"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssetsAmortizationDetails": {
       "order": 2.0,
       "parentTag": "us-gaap_FiniteLivedIntangibleAssetsNet",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of amortization for assets, excluding financial assets and goodwill, lacking physical substance with finite life expected to be recognized in second fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).",
        "label": "Finite-Lived Intangible Assets, Amortization Expense, Year Two",
        "terseLabel": "2024"
       }
      }
     },
     "localname": "FiniteLivedIntangibleAssetsAmortizationExpenseYearTwo",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssetsAmortizationDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis": {
     "auth_ref": [
      "r426",
      "r427",
      "r428",
      "r429",
      "r750",
      "r754"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Information by major type or class of finite-lived intangible assets.",
        "label": "Finite-Lived Intangible Assets by Major Class [Axis]"
       }
      }
     },
     "localname": "FiniteLivedIntangibleAssetsByMajorClassAxis",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssetsIntangibleAssetsDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_FiniteLivedIntangibleAssetsFutureAmortizationExpenseAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Estimated annual amortization expense",
        "terseLabel": "Estimated aggregate amortization expense"
       }
      }
     },
     "localname": "FiniteLivedIntangibleAssetsFutureAmortizationExpenseAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssetsAmortizationDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_FiniteLivedIntangibleAssetsGross": {
     "auth_ref": [
      "r110",
      "r754"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssetsIntangibleAssetsDetails": {
       "order": 2.0,
       "parentTag": "us-gaap_FiniteLivedIntangibleAssetsNet",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount before amortization of assets, excluding financial assets and goodwill, lacking physical substance with a finite life.",
        "label": "Finite-Lived Intangible Assets, Gross",
        "terseLabel": "Gross Carrying Amount, Intangible assets"
       }
      }
     },
     "localname": "FiniteLivedIntangibleAssetsGross",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssetsIntangibleAssetsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain": {
     "auth_ref": [
      "r108",
      "r109"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The major class of finite-lived intangible asset (for example, patents, trademarks, copyrights, etc.) A major class is composed of intangible assets that can be grouped together because they are similar, either by their nature or by their use in the operations of a company.",
        "label": "Finite-Lived Intangible Assets, Major Class Name [Domain]"
       }
      }
     },
     "localname": "FiniteLivedIntangibleAssetsMajorClassNameDomain",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssetsIntangibleAssetsDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_FiniteLivedIntangibleAssetsNet": {
     "auth_ref": [
      "r110",
      "r750"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssetsAmortizationDetails": {
       "order": null,
       "parentTag": null,
       "root": true,
       "weight": null
      },
      "http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssetsIntangibleAssetsDetails": {
       "order": null,
       "parentTag": null,
       "root": true,
       "weight": null
      },
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheets": {
       "order": 4.0,
       "parentTag": "us-gaap_Assets",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount after amortization of assets, excluding financial assets and goodwill, lacking physical substance with a finite life.",
        "label": "Finite-Lived Intangible Assets, Net",
        "totalLabel": "Total Net Intangible Assets",
        "verboseLabel": "Intangible assets, net"
       }
      }
     },
     "localname": "FiniteLivedIntangibleAssetsNet",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssetsAmortizationDetails",
      "http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssetsIntangibleAssetsDetails",
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_FiniteLivedIntangibleAssetsRemainingAmortizationPeriod1": {
     "auth_ref": [
      "r750"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Remaining amortization period of finite-lived intangible assets, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days.",
        "label": "Finite-Lived Intangible Assets, Remaining Amortization Period",
        "terseLabel": "Average Remaining Amortization Period"
       }
      }
     },
     "localname": "FiniteLivedIntangibleAssetsRemainingAmortizationPeriod1",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssetsIntangibleAssetsDetails"
     ],
     "xbrltype": "durationItemType"
    },
    "us-gaap_FiscalPeriod": {
     "auth_ref": [
      "r192"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Disclosure of accounting policy for determining an entity's fiscal year or other fiscal period. This disclosure may include identification of the fiscal period end-date, the length of the fiscal period, any reporting period lag between the entity and its subsidiaries, or equity investees. If a reporting lag exists, the closing date of the entity having a different period end is generally noted, along with an explanation of the necessity for using different closing dates. Any intervening events that materially affect the entity's financial position or results of operations are generally also disclosed.",
        "label": "Fiscal Period, Policy [Policy Text Block]",
        "terseLabel": "Basis of Presentation"
       }
      }
     },
     "localname": "FiscalPeriod",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesPolicies"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_FiscalPeriodDuration": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Duration of a fiscal period, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days. Includes, but not limited to, weeks in a year or quarter.",
        "label": "Fiscal Period Duration",
        "terseLabel": "Fiscal period duration (in days)"
       }
      }
     },
     "localname": "FiscalPeriodDuration",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesDescriptionOfBusinessAndBasisOfPresentationDetails"
     ],
     "xbrltype": "durationItemType"
    },
    "us-gaap_ForeignCountryMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Designated tax departments of governments entitled to levy and collect income taxes from the entity outside the entity's country of domicile.",
        "label": "Foreign tax"
       }
      }
     },
     "localname": "ForeignCountryMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesTaxCreditCarryforwardsDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_ForeignCurrencyTransactionsAndTranslationsPolicyTextBlock": {
     "auth_ref": [
      "r675"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Disclosure of accounting policy for (1) transactions denominated in a currency other than the reporting enterprise's functional currency, (2) translating foreign currency financial statements that are incorporated into the financial statements of the reporting enterprise by consolidation, combination, or the equity method of accounting, and (3) remeasurement of the financial statements of a foreign reporting enterprise in a hyperinflationary economy.",
        "label": "Foreign Currency Transactions and Translations Policy [Policy Text Block]",
        "terseLabel": "Foreign Currencies"
       }
      }
     },
     "localname": "ForeignCurrencyTransactionsAndTranslationsPolicyTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesPolicies"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_GainsLossesOnExtinguishmentOfDebt": {
     "auth_ref": [
      "r70",
      "r141",
      "r142"
     ],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "order": 6.0,
       "parentTag": "us-gaap_NetCashProvidedByUsedInOperatingActivities",
       "weight": -1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Difference between the fair value of payments made and the carrying amount of debt which is extinguished prior to maturity.",
        "label": "Gain (Loss) on Extinguishment of Debt",
        "negatedLabel": "Loss on extinguishment of debt",
        "terseLabel": "Loss on extinguishment of debt"
       }
      }
     },
     "localname": "GainsLossesOnExtinguishmentOfDebt",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDebt20232025And2027NotesDetails",
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_Goodwill": {
     "auth_ref": [
      "r260",
      "r423",
      "r755",
      "r824",
      "r847",
      "r893",
      "r900"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssetsGoodwillDetails": {
       "order": null,
       "parentTag": null,
       "root": true,
       "weight": null
      },
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheets": {
       "order": 5.0,
       "parentTag": "us-gaap_Assets",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount after accumulated impairment loss of an asset representing future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized.",
        "label": "Goodwill",
        "terseLabel": "Goodwill",
        "totalLabel": "Net amount"
       }
      }
     },
     "localname": "Goodwill",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssetsGoodwillDetails",
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_GoodwillAndIntangibleAssetsDisclosureAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Goodwill and Intangible Assets"
       }
      }
     },
     "localname": "GoodwillAndIntangibleAssetsDisclosureAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "xbrltype": "stringItemType"
    },
    "us-gaap_GoodwillAndIntangibleAssetsDisclosureTextBlock": {
     "auth_ref": [
      "r114"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The entire disclosure for goodwill and intangible assets.",
        "label": "Goodwill and Intangible Assets Disclosure [Text Block]",
        "terseLabel": "Goodwill and Intangible Assets"
       }
      }
     },
     "localname": "GoodwillAndIntangibleAssetsDisclosureTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssets"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_GoodwillAndIntangibleAssetsIntangibleAssetsIndefiniteLivedPolicy": {
     "auth_ref": [
      "r113"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Disclosure of accounting policy for indefinite-lived intangible assets (that is, those intangible assets not subject to amortization). This accounting policy also may address how the entity assesses whether events and circumstances continue to support an indefinite useful life and how the entity assesses and measures impairment of such assets.",
        "label": "Goodwill and Intangible Assets, Intangible Assets, Indefinite-Lived, Policy [Policy Text Block]",
        "terseLabel": "Goodwill and Indefinite-Lived Intangible Assets"
       }
      }
     },
     "localname": "GoodwillAndIntangibleAssetsIntangibleAssetsIndefiniteLivedPolicy",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesPolicies"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_GoodwillGross": {
     "auth_ref": [
      "r424",
      "r425",
      "r824"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssetsGoodwillDetails": {
       "order": 1.0,
       "parentTag": "us-gaap_Goodwill",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount before accumulated impairment loss of an asset representing future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized.",
        "label": "Goodwill, Gross",
        "terseLabel": "Gross carrying amount"
       }
      }
     },
     "localname": "GoodwillGross",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssetsGoodwillDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_GoodwillImpairedAccumulatedImpairmentLoss": {
     "auth_ref": [
      "r424",
      "r425",
      "r824"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssetsGoodwillDetails": {
       "order": 2.0,
       "parentTag": "us-gaap_Goodwill",
       "weight": -1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of accumulated impairment loss for an asset representing future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized.",
        "label": "Goodwill, Impaired, Accumulated Impairment Loss",
        "terseLabel": "Accumulated impairment"
       }
      }
     },
     "localname": "GoodwillImpairedAccumulatedImpairmentLoss",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssetsGoodwillDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_GoodwillPeriodIncreaseDecrease": {
     "auth_ref": [
      "r901"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of increase (decrease) of an asset representing future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized.",
        "label": "Goodwill, Period Increase (Decrease)",
        "terseLabel": "Change in goodwill"
       }
      }
     },
     "localname": "GoodwillPeriodIncreaseDecrease",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssetsGoodwillDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_GoodwillRollForward": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "A roll forward is a reconciliation of a concept from the beginning of a period to the end of a period.",
        "label": "Goodwill [Roll Forward]",
        "terseLabel": "Goodwill"
       }
      }
     },
     "localname": "GoodwillRollForward",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssetsGoodwillDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_GrossProfit": {
     "auth_ref": [
      "r52",
      "r298",
      "r364",
      "r367",
      "r372",
      "r375",
      "r397",
      "r443",
      "r444",
      "r445",
      "r446",
      "r447",
      "r448",
      "r449",
      "r450",
      "r451",
      "r655",
      "r822",
      "r912"
     ],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations": {
       "order": 1.0,
       "parentTag": "us-gaap_OperatingIncomeLoss",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Aggregate revenue less cost of goods and services sold or operating expenses directly attributable to the revenue generation activity.",
        "label": "Gross Profit",
        "totalLabel": "Gross profit"
       }
      }
     },
     "localname": "GrossProfit",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_GuaranteeObligationsCurrentCarryingValue": {
     "auth_ref": [
      "r128"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The current carrying amount of the liability for the freestanding or embedded guarantor's obligations under the guarantee or each group of similar guarantees.",
        "label": "Guarantor Obligations, Current Carrying Value",
        "terseLabel": "Bank guarantees and letters of credit outstanding"
       }
      }
     },
     "localname": "GuaranteeObligationsCurrentCarryingValue",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesPurchaseCommitmentsAndBankGuaranteesDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_GuaranteesAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Guarantees [Abstract]",
        "terseLabel": "Bank guarantees"
       }
      }
     },
     "localname": "GuaranteesAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesPurchaseCommitmentsAndBankGuaranteesDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic": {
     "auth_ref": [
      "r299",
      "r614"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureIncomeTaxesIncomeAttributableToDomesticAndForeignOperationsDetails": {
       "order": 1.0,
       "parentTag": "us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The portion of earnings or loss from continuing operations before income taxes that is attributable to domestic operations.",
        "label": "Income (Loss) from Continuing Operations before Income Taxes, Domestic",
        "terseLabel": "Domestic"
       }
      }
     },
     "localname": "IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesIncomeAttributableToDomesticAndForeignOperationsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest": {
     "auth_ref": [
      "r49",
      "r219",
      "r228",
      "r244",
      "r364",
      "r367",
      "r372",
      "r375",
      "r759",
      "r822"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureIncomeTaxesIncomeAttributableToDomesticAndForeignOperationsDetails": {
       "order": null,
       "parentTag": null,
       "root": true,
       "weight": null
      },
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations": {
       "order": 1.0,
       "parentTag": "us-gaap_NetIncomeLoss",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of income (loss) from continuing operations, including income (loss) from equity method investments, before deduction of income tax expense (benefit), and income (loss) attributable to noncontrolling interest.",
        "label": "Income (Loss) from Continuing Operations before Income Taxes, Noncontrolling Interest",
        "totalLabel": "Income before income taxes"
       }
      }
     },
     "localname": "IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesIncomeAttributableToDomesticAndForeignOperationsDetails",
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign": {
     "auth_ref": [
      "r299",
      "r614"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureIncomeTaxesIncomeAttributableToDomesticAndForeignOperationsDetails": {
       "order": 2.0,
       "parentTag": "us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The portion of earnings or loss from continuing operations before income taxes that is attributable to foreign operations, which is defined as Income or Loss generated from operations located outside the entity's country of domicile.",
        "label": "Income (Loss) from Continuing Operations before Income Taxes, Foreign",
        "terseLabel": "Foreign"
       }
      }
     },
     "localname": "IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesIncomeAttributableToDomesticAndForeignOperationsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestmentsAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Income (Loss) from Continuing Operations before Equity Method Investments, Income Taxes, Extraordinary Items, Noncontrolling Interest [Abstract]",
        "terseLabel": "Income (loss) from continuing operations before income taxes"
       }
      }
     },
     "localname": "IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestmentsAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesIncomeAttributableToDomesticAndForeignOperationsDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_IncomeStatementAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Consolidated Statements of Operations"
       }
      }
     },
     "localname": "IncomeStatementAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "xbrltype": "stringItemType"
    },
    "us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsAxis": {
     "auth_ref": [
      "r837",
      "r838"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Information by name of disposal group.",
        "label": "Disposal Group Name [Axis]"
       }
      }
     },
     "localname": "IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsAxis",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDispositionsDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsLineItems": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.",
        "label": "Income Statement, Balance Sheet and Additional Disclosures by Disposal Groups, Including Discontinued Operations [Line Items]",
        "terseLabel": "Dispositions"
       }
      }
     },
     "localname": "IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsLineItems",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDispositionsDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsTable": {
     "auth_ref": [
      "r0",
      "r1",
      "r2",
      "r3",
      "r4",
      "r5",
      "r6",
      "r7",
      "r8",
      "r9",
      "r10",
      "r121",
      "r122"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Disclosure of information about a disposal group. Includes, but is not limited to, a discontinued operation, disposal classified as held-for-sale or disposed of by means other than sale or disposal of an individually significant component.",
        "label": "Disposal Groups, Including Discontinued Operations [Table]"
       }
      }
     },
     "localname": "IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsTable",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDispositionsDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_IncomeStatementLocationAxis": {
     "auth_ref": [
      "r432",
      "r433"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Information by location in the income statement.",
        "label": "Income Statement Location [Axis]"
       }
      }
     },
     "localname": "IncomeStatementLocationAxis",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDebt20232025And2027NotesDetails",
      "http://www.veeco.com/role/DisclosureInvestmentsOtherInvestmentDetails",
      "http://www.veeco.com/role/DisclosureStockPlansRecognizedShareBasedCompensationDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_IncomeStatementLocationDomain": {
     "auth_ref": [
      "r433"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Location in the income statement.",
        "label": "Income Statement Location [Domain]"
       }
      }
     },
     "localname": "IncomeStatementLocationDomain",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDebt20232025And2027NotesDetails",
      "http://www.veeco.com/role/DisclosureInvestmentsOtherInvestmentDetails",
      "http://www.veeco.com/role/DisclosureStockPlansRecognizedShareBasedCompensationDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_IncomeTaxAuthorityAxis": {
     "auth_ref": [
      "r176"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Information by tax jurisdiction.",
        "label": "Income Tax Authority [Axis]"
       }
      }
     },
     "localname": "IncomeTaxAuthorityAxis",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesOperatingLossCarryforwardsDetails",
      "http://www.veeco.com/role/DisclosureIncomeTaxesTaxCreditCarryforwardsDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_IncomeTaxAuthorityDomain": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Agency, division or body classification that levies income taxes, examines tax returns for compliance, or grants exemptions from or makes other decisions pertaining to income taxes.",
        "label": "Income Tax Authority [Domain]"
       }
      }
     },
     "localname": "IncomeTaxAuthorityDomain",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesOperatingLossCarryforwardsDetails",
      "http://www.veeco.com/role/DisclosureIncomeTaxesTaxCreditCarryforwardsDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_IncomeTaxDisclosureAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Income Taxes"
       }
      }
     },
     "localname": "IncomeTaxDisclosureAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "xbrltype": "stringItemType"
    },
    "us-gaap_IncomeTaxDisclosureTextBlock": {
     "auth_ref": [
      "r300",
      "r588",
      "r595",
      "r602",
      "r610",
      "r615",
      "r617",
      "r618",
      "r619"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The entire disclosure for income taxes. Disclosures may include net deferred tax liability or asset recognized in an enterprise's statement of financial position, net change during the year in the total valuation allowance, approximate tax effect of each type of temporary difference and carryforward that gives rise to a significant portion of deferred tax liabilities and deferred tax assets, utilization of a tax carryback, and tax uncertainties information.",
        "label": "Income Tax Disclosure [Text Block]",
        "terseLabel": "Income Taxes"
       }
      }
     },
     "localname": "IncomeTaxDisclosureTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxes"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_IncomeTaxEffectsAllocatedDirectlyToEquityCumulativeEffectOfChangeInAccountingPrinciple": {
     "auth_ref": [
      "r611",
      "r956"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureIncomeTaxesReconciliationToStatutoryTaxExpenseDetails": {
       "order": 9.0,
       "parentTag": "us-gaap_IncomeTaxExpenseBenefit",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of cumulative tax effect on beginning retained earnings from change in accounting principle.",
        "label": "Income Tax Effects Allocated Directly to Equity, Cumulative Effect of Change in Accounting Principle",
        "verboseLabel": "Adoption of new accounting standard"
       }
      }
     },
     "localname": "IncomeTaxEffectsAllocatedDirectlyToEquityCumulativeEffectOfChangeInAccountingPrinciple",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesReconciliationToStatutoryTaxExpenseDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_IncomeTaxExpenseBenefit": {
     "auth_ref": [
      "r301",
      "r325",
      "r326",
      "r363",
      "r586",
      "r611",
      "r616",
      "r764"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureIncomeTaxesComponentsOfExpenseBenefitDetails": {
       "order": null,
       "parentTag": null,
       "root": true,
       "weight": null
      },
      "http://www.veeco.com/role/DisclosureIncomeTaxesReconciliationToStatutoryTaxExpenseDetails": {
       "order": null,
       "parentTag": null,
       "root": true,
       "weight": null
      },
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations": {
       "order": 2.0,
       "parentTag": "us-gaap_NetIncomeLoss",
       "weight": -1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of current income tax expense (benefit) and deferred income tax expense (benefit) pertaining to continuing operations.",
        "label": "Income Tax Expense (Benefit)",
        "terseLabel": "Income tax expense (benefit)",
        "totalLabel": "Total expense (benefit) for income taxes"
       }
      }
     },
     "localname": "IncomeTaxExpenseBenefit",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesComponentsOfExpenseBenefitDetails",
      "http://www.veeco.com/role/DisclosureIncomeTaxesReconciliationToStatutoryTaxExpenseDetails",
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_IncomeTaxPolicyTextBlock": {
     "auth_ref": [
      "r279",
      "r582",
      "r583",
      "r595",
      "r596",
      "r601",
      "r605"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Disclosure of accounting policy for income taxes, which may include its accounting policies for recognizing and measuring deferred tax assets and liabilities and related valuation allowances, recognizing investment tax credits, operating loss carryforwards, tax credit carryforwards, and other carryforwards, methodologies for determining its effective income tax rate and the characterization of interest and penalties in the financial statements.",
        "label": "Income Tax, Policy [Policy Text Block]",
        "terseLabel": "Income Taxes"
       }
      }
     },
     "localname": "IncomeTaxPolicyTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesPolicies"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance": {
     "auth_ref": [
      "r948"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureIncomeTaxesReconciliationToStatutoryTaxExpenseDetails": {
       "order": 5.0,
       "parentTag": "us-gaap_IncomeTaxExpenseBenefit",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of the difference between reported income tax expense (benefit) and expected income tax expense (benefit) computed by applying the domestic federal statutory income tax rates to pretax income (loss) from continuing operations attributable to increase (decrease) in the valuation allowance for deferred tax assets.",
        "label": "Effective Income Tax Rate Reconciliation, Change in Deferred Tax Assets Valuation Allowance, Amount",
        "terseLabel": "Net change in valuation allowance"
       }
      }
     },
     "localname": "IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesReconciliationToStatutoryTaxExpenseDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_IncomeTaxReconciliationForeignIncomeTaxRateDifferential": {
     "auth_ref": [
      "r948"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureIncomeTaxesReconciliationToStatutoryTaxExpenseDetails": {
       "order": 3.0,
       "parentTag": "us-gaap_IncomeTaxExpenseBenefit",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of the difference between reported income tax expense (benefit) and expected income tax expense (benefit) computed by applying the domestic federal statutory income tax rates to pretax income (loss) from continuing operations attributable to foreign income tax expense (benefit).",
        "label": "Effective Income Tax Rate Reconciliation, Foreign Income Tax Rate Differential, Amount",
        "terseLabel": "Effect of international operations"
       }
      }
     },
     "localname": "IncomeTaxReconciliationForeignIncomeTaxRateDifferential",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesReconciliationToStatutoryTaxExpenseDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate": {
     "auth_ref": [
      "r587"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureIncomeTaxesReconciliationToStatutoryTaxExpenseDetails": {
       "order": 1.0,
       "parentTag": "us-gaap_IncomeTaxExpenseBenefit",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The amount of income tax expense or benefit for the period computed by applying the domestic federal statutory tax rates to pretax income from continuing operations.",
        "label": "Effective Income Tax Rate Reconciliation at Federal Statutory Income Tax Rate, Amount",
        "terseLabel": "Income tax expense (benefit) at U.S. statutory rates"
       }
      }
     },
     "localname": "IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesReconciliationToStatutoryTaxExpenseDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_IncomeTaxReconciliationNondeductibleExpenseImpairmentLosses": {
     "auth_ref": [
      "r948"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureIncomeTaxesReconciliationToStatutoryTaxExpenseDetails": {
       "order": 8.0,
       "parentTag": "us-gaap_IncomeTaxExpenseBenefit",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of the difference between reported income tax expense (benefit) and expected income tax expense (benefit) computed by applying the domestic federal statutory income tax rates to pretax income (loss) from continuing operations attributable to nondeductible impairment loss.",
        "label": "Effective Income Tax Rate Reconciliation, Nondeductible Expense, Impairment Losses, Amount",
        "terseLabel": "Asset impairment"
       }
      }
     },
     "localname": "IncomeTaxReconciliationNondeductibleExpenseImpairmentLosses",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesReconciliationToStatutoryTaxExpenseDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost": {
     "auth_ref": [
      "r948"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureIncomeTaxesReconciliationToStatutoryTaxExpenseDetails": {
       "order": 7.0,
       "parentTag": "us-gaap_IncomeTaxExpenseBenefit",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of reported income tax expense (benefit) in excess of (less than) expected income tax expense (benefit) computed by applying domestic federal statutory income tax rate to pretax income (loss) from continuing operation, attributable to nondeductible expense for award under share-based payment arrangement. Includes, but is not limited to, expense determined to be nondeductible upon grant or after for award under share-based payment arrangement.",
        "label": "Effective Income Tax Rate Reconciliation, Nondeductible Expense, Share-based Compensation Cost, Amount",
        "verboseLabel": "Share-based compensation"
       }
      }
     },
     "localname": "IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesReconciliationToStatutoryTaxExpenseDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_IncomeTaxReconciliationOtherAdjustments": {
     "auth_ref": [
      "r948"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureIncomeTaxesReconciliationToStatutoryTaxExpenseDetails": {
       "order": 11.0,
       "parentTag": "us-gaap_IncomeTaxExpenseBenefit",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of the difference between reported income tax expense (benefit) and expected income tax expense (benefit) computed by applying the domestic federal statutory income tax rates to pretax income (loss) from continuing operations attributable to other adjustments.",
        "label": "Effective Income Tax Rate Reconciliation, Other Adjustments, Amount",
        "terseLabel": "Other"
       }
      }
     },
     "localname": "IncomeTaxReconciliationOtherAdjustments",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesReconciliationToStatutoryTaxExpenseDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_IncomeTaxReconciliationStateAndLocalIncomeTaxes": {
     "auth_ref": [
      "r948"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureIncomeTaxesReconciliationToStatutoryTaxExpenseDetails": {
       "order": 2.0,
       "parentTag": "us-gaap_IncomeTaxExpenseBenefit",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of the difference between reported income tax expense (benefit) and expected income tax expense (benefit) computed by applying the domestic federal statutory income tax rates to pretax income (loss) from continuing operations attributable to state and local income tax expense (benefit).",
        "label": "Effective Income Tax Rate Reconciliation, State and Local Income Taxes, Amount",
        "terseLabel": "State taxes, net of U.S. federal impact"
       }
      }
     },
     "localname": "IncomeTaxReconciliationStateAndLocalIncomeTaxes",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesReconciliationToStatutoryTaxExpenseDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_IncomeTaxReconciliationTaxCreditsResearch": {
     "auth_ref": [
      "r948"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureIncomeTaxesReconciliationToStatutoryTaxExpenseDetails": {
       "order": 4.0,
       "parentTag": "us-gaap_IncomeTaxExpenseBenefit",
       "weight": -1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of the difference between reported income tax expense (benefit) and expected income tax expense (benefit) computed by applying the domestic federal statutory income tax rates to pretax income (loss) from continuing operations attributable to research tax credit.",
        "label": "Effective Income Tax Rate Reconciliation, Tax Credit, Research, Amount",
        "negatedLabel": "Research and development tax credit"
       }
      }
     },
     "localname": "IncomeTaxReconciliationTaxCreditsResearch",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesReconciliationToStatutoryTaxExpenseDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_IncomeTaxesPaidNet": {
     "auth_ref": [
      "r73"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The amount of cash paid during the current period to foreign, federal, state, and local authorities as taxes on income, net of any cash received during the current period as refunds for the overpayment of taxes.",
        "label": "Income Taxes Paid, Net",
        "terseLabel": "Income taxes paid (refunds received)"
       }
      }
     },
     "localname": "IncomeTaxesPaidNet",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_IncreaseDecreaseInAccountsPayableAndAccruedLiabilities": {
     "auth_ref": [
      "r69"
     ],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "order": 13.0,
       "parentTag": "us-gaap_NetCashProvidedByUsedInOperatingActivities",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The increase (decrease) during the reporting period in the amounts payable to vendors for goods and services received and the amount of obligations and expenses incurred but not paid.",
        "label": "Increase (Decrease) in Accounts Payable and Accrued Liabilities",
        "terseLabel": "Accounts payable and accrued expenses"
       }
      }
     },
     "localname": "IncreaseDecreaseInAccountsPayableAndAccruedLiabilities",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_IncreaseDecreaseInContractWithCustomerLiability": {
     "auth_ref": [
      "r746",
      "r869"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of increase (decrease) in obligation to transfer good or service to customer for which consideration has been received or is receivable.",
        "label": "Increase Decrease in Contract with Customer Liability",
        "negatedLabel": "Deferral of revenue"
       }
      }
     },
     "localname": "IncreaseDecreaseInContractWithCustomerLiability",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesCustomerDepositsAndDeferredRevenueDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_IncreaseDecreaseInIncomeTaxesPayableNetOfIncomeTaxesReceivable": {
     "auth_ref": [
      "r869"
     ],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "order": 15.0,
       "parentTag": "us-gaap_NetCashProvidedByUsedInOperatingActivities",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The increase (decrease) during the reporting period in the amounts payable to taxing authorities for taxes that are based on the reporting entity's earnings, net of amounts receivable from taxing authorities for refunds of overpayments or recoveries of income taxes.",
        "label": "Increase (Decrease) in Income Taxes Payable, Net of Income Taxes Receivable",
        "terseLabel": "Income taxes receivable and payable, net"
       }
      }
     },
     "localname": "IncreaseDecreaseInIncomeTaxesPayableNetOfIncomeTaxesReceivable",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_IncreaseDecreaseInInventories": {
     "auth_ref": [
      "r69"
     ],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "order": 11.0,
       "parentTag": "us-gaap_NetCashProvidedByUsedInOperatingActivities",
       "weight": -1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The increase (decrease) during the reporting period in the aggregate value of all inventory held by the reporting entity, associated with underlying transactions that are classified as operating activities.",
        "label": "Increase (Decrease) in Inventories",
        "negatedLabel": "Inventories"
       }
      }
     },
     "localname": "IncreaseDecreaseInInventories",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_IncreaseDecreaseInOperatingCapitalAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Increase (Decrease) in Operating Capital [Abstract]",
        "terseLabel": "Changes in operating assets and liabilities:"
       }
      }
     },
     "localname": "IncreaseDecreaseInOperatingCapitalAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_IncreaseDecreaseInOtherOperatingCapitalNet": {
     "auth_ref": [
      "r69"
     ],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "order": 16.0,
       "parentTag": "us-gaap_NetCashProvidedByUsedInOperatingActivities",
       "weight": -1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of increase (decrease) in operating assets after deduction of operating liabilities classified as other.",
        "label": "Increase (Decrease) in Other Operating Assets and Liabilities, Net",
        "negatedLabel": "Other, net"
       }
      }
     },
     "localname": "IncreaseDecreaseInOtherOperatingCapitalNet",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets": {
     "auth_ref": [
      "r69"
     ],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "order": 12.0,
       "parentTag": "us-gaap_NetCashProvidedByUsedInOperatingActivities",
       "weight": -1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of increase (decrease) in prepaid expenses, and assets classified as other.",
        "label": "Increase (Decrease) in Prepaid Expense and Other Assets",
        "negatedLabel": "Prepaid expenses and other current assets"
       }
      }
     },
     "localname": "IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_IncreaseDecreaseInStockholdersEquityRollForward": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "A roll forward is a reconciliation of a concept from the beginning of a period to the end of a period.",
        "label": "Increase (Decrease) in Stockholders' Equity [Roll Forward]",
        "terseLabel": "Increase (Decrease) in Stockholders' Equity"
       }
      }
     },
     "localname": "IncreaseDecreaseInStockholdersEquityRollForward",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfStockholdersEquity"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_IncrementalCommonSharesAttributableToConversionOfDebtSecurities": {
     "auth_ref": [
      "r336",
      "r337",
      "r342"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureIncomePerCommonShareBasicAndDilutedDetails": {
       "order": 2.0,
       "parentTag": "us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding",
       "weight": 1.0
      }
     },
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Additional shares included in the calculation of diluted EPS as a result of the potentially dilutive effect of convertible debt securities using the if-converted method.",
        "label": "Incremental Common Shares Attributable to Dilutive Effect of Conversion of Debt Securities",
        "verboseLabel": "Dilutive effect of convertible notes"
       }
      }
     },
     "localname": "IncrementalCommonSharesAttributableToConversionOfDebtSecurities",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomePerCommonShareBasicAndDilutedDetails"
     ],
     "xbrltype": "sharesItemType"
    },
    "us-gaap_InterestExpense": {
     "auth_ref": [
      "r217",
      "r230",
      "r283",
      "r361",
      "r679"
     ],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations": {
       "order": 3.0,
       "parentTag": "us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest",
       "weight": -1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of the cost of borrowed funds accounted for as interest expense.",
        "label": "Interest Expense",
        "negatedLabel": "Interest expense"
       }
      }
     },
     "localname": "InterestExpense",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_InterestExpenseDebt": {
     "auth_ref": [
      "r56",
      "r472",
      "r481",
      "r828",
      "r829"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureDebtInterestExpenseDetails": {
       "order": null,
       "parentTag": null,
       "root": true,
       "weight": null
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of the cost of borrowed funds accounted for as interest expense for debt.",
        "label": "Interest Expense, Debt",
        "totalLabel": "Total Interest Expense"
       }
      }
     },
     "localname": "InterestExpenseDebt",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDebtInterestExpenseDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_InterestExpenseDebtExcludingAmortization": {
     "auth_ref": [
      "r58",
      "r473",
      "r828",
      "r829"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureDebtInterestExpenseDetails": {
       "order": 1.0,
       "parentTag": "us-gaap_InterestExpenseDebt",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents the portion of interest incurred in the period on debt arrangements that was charged against earnings, excluding amortization of debt discount (premium) and financing costs.",
        "label": "Interest Expense, Debt, Excluding Amortization",
        "terseLabel": "Coupon interest expense"
       }
      }
     },
     "localname": "InterestExpenseDebtExcludingAmortization",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDebtInterestExpenseDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_InterestIncomeAndInterestExpenseDisclosureTableTextBlock": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of interest income and expense, including, but not limited to, interest income and expense from investments, loans, and securities.",
        "label": "Interest Income and Interest Expense Disclosure [Table Text Block]",
        "terseLabel": "Schedule of interest expense related to Convertible Senior Notes"
       }
      }
     },
     "localname": "InterestIncomeAndInterestExpenseDisclosureTableTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDebtTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_InterestOnConvertibleDebtNetOfTax": {
     "auth_ref": [
      "r330",
      "r333",
      "r342"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureIncomePerCommonShareBasicAndDilutedDetails": {
       "order": 2.0,
       "parentTag": "us-gaap_NetIncomeLossAvailableToCommonStockholdersDiluted",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount, after tax, of interest recognized on convertible debt instrument excluding interest on principal required to be paid in cash.",
        "label": "Interest on Convertible Debt, Net of Tax",
        "terseLabel": "Interest expense associated with convertible notes"
       }
      }
     },
     "localname": "InterestOnConvertibleDebtNetOfTax",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomePerCommonShareBasicAndDilutedDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_InterestPaidNet": {
     "auth_ref": [
      "r291",
      "r294",
      "r295"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of cash paid for interest, excluding capitalized interest, classified as operating activity. Includes, but is not limited to, payment to settle zero-coupon bond for accreted interest of debt discount and debt instrument with insignificant coupon interest rate in relation to effective interest rate of borrowing attributable to accreted interest of debt discount.",
        "label": "Interest Paid",
        "terseLabel": "Interest paid"
       }
      }
     },
     "localname": "InterestPaidNet",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_InterestPayableCurrent": {
     "auth_ref": [
      "r34"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesComponentsDetails": {
       "order": 4.0,
       "parentTag": "veco_AccruedAndOtherLiabilitiesCurrent",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Carrying value as of the balance sheet date of [accrued] interest payable on all forms of debt, including trade payables, that has been incurred and is unpaid. Used to reflect the current portion of the liabilities (due within one year or within the normal operating cycle if longer).",
        "label": "Interest Payable, Current",
        "terseLabel": "Interest"
       }
      }
     },
     "localname": "InterestPayableCurrent",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesComponentsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_InterestPayableCurrentAndNoncurrent": {
     "auth_ref": [
      "r227",
      "r242"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of interest payable on debt, including, but not limited to, trade payables.",
        "label": "Interest Payable",
        "terseLabel": "Accrued and unpaid interest"
       }
      }
     },
     "localname": "InterestPayableCurrentAndNoncurrent",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDebt20232025And2027NotesDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_InventoryDisclosureAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Inventories"
       }
      }
     },
     "localname": "InventoryDisclosureAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "xbrltype": "stringItemType"
    },
    "us-gaap_InventoryDisclosureTextBlock": {
     "auth_ref": [
      "r421"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The entire disclosure for inventory. Includes, but is not limited to, the basis of stating inventory, the method of determining inventory cost, the classes of inventory, and the nature of the cost elements included in inventory.",
        "label": "Inventory Disclosure [Text Block]",
        "terseLabel": "Inventories"
       }
      }
     },
     "localname": "InventoryDisclosureTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureInventories"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_InventoryFinishedGoodsNetOfReserves": {
     "auth_ref": [
      "r105",
      "r811"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureInventoriesDetails": {
       "order": 3.0,
       "parentTag": "us-gaap_InventoryNet",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Carrying amount, net of valuation reserves and adjustments, as of the balance sheet date of merchandise or goods held by the company that are readily available for sale.",
        "label": "Inventory, Finished Goods, Net of Reserves",
        "terseLabel": "Finished goods"
       }
      }
     },
     "localname": "InventoryFinishedGoodsNetOfReserves",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureInventoriesDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_InventoryNet": {
     "auth_ref": [
      "r267",
      "r810",
      "r847"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureInventoriesDetails": {
       "order": null,
       "parentTag": null,
       "root": true,
       "weight": null
      },
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheets": {
       "order": 6.0,
       "parentTag": "us-gaap_AssetsCurrent",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount after valuation and LIFO reserves of inventory expected to be sold, or consumed within one year or operating cycle, if longer.",
        "label": "Inventory, Net",
        "terseLabel": "Inventories",
        "totalLabel": "Total"
       }
      }
     },
     "localname": "InventoryNet",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureInventoriesDetails",
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_InventoryNetAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Inventory, Net [Abstract]",
        "terseLabel": "Inventories"
       }
      }
     },
     "localname": "InventoryNetAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureInventoriesDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_InventoryPolicyTextBlock": {
     "auth_ref": [
      "r256",
      "r266",
      "r348",
      "r419",
      "r420",
      "r421",
      "r748",
      "r817"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Disclosure of inventory accounting policy for inventory classes, including, but not limited to, basis for determining inventory amounts, methods by which amounts are added and removed from inventory classes, loss recognition on impairment of inventories, and situations in which inventories are stated above cost.",
        "label": "Inventory, Policy [Policy Text Block]",
        "terseLabel": "Inventories"
       }
      }
     },
     "localname": "InventoryPolicyTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesPolicies"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_InventoryRawMaterialsNetOfReserves": {
     "auth_ref": [
      "r105",
      "r813"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureInventoriesDetails": {
       "order": 1.0,
       "parentTag": "us-gaap_InventoryNet",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Carrying amount, net of valuation reserves and adjustments, as of the balance sheet date of unprocessed items to be consumed in the manufacturing or production process.",
        "label": "Inventory, Raw Materials, Net of Reserves",
        "terseLabel": "Materials"
       }
      }
     },
     "localname": "InventoryRawMaterialsNetOfReserves",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureInventoriesDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_InventoryWorkInProcessNetOfReserves": {
     "auth_ref": [
      "r105",
      "r812"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureInventoriesDetails": {
       "order": 2.0,
       "parentTag": "us-gaap_InventoryNet",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Carrying amount, net of reserves and adjustments, as of the balance sheet date of merchandise or goods which are partially completed. This inventory is generally comprised of raw materials, labor and factory overhead costs, which require further materials, labor and overhead to be converted into finished goods, and which generally require the use of estimates to determine percentage complete and pricing.",
        "label": "Inventory, Work in Process, Net of Reserves",
        "terseLabel": "Work-in-process"
       }
      }
     },
     "localname": "InventoryWorkInProcessNetOfReserves",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureInventoriesDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_InvestmentIncomeInterest": {
     "auth_ref": [
      "r55",
      "r360"
     ],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations": {
       "order": 2.0,
       "parentTag": "us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount before accretion (amortization) of purchase discount (premium) of interest income on nonoperating securities.",
        "label": "Investment Income, Interest",
        "terseLabel": "Interest income"
       }
      }
     },
     "localname": "InvestmentIncomeInterest",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_InvestmentsClassifiedByContractualMaturityDateTableTextBlock": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of maturities of an entity's investments as well as any other information pertinent to the investments.",
        "label": "Investments Classified by Contractual Maturity Date [Table Text Block]",
        "terseLabel": "Schedule of contractual maturities of securities classified as available-for-sale"
       }
      }
     },
     "localname": "InvestmentsClassifiedByContractualMaturityDateTableTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureInvestmentsTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_InvestmentsDebtAndEquitySecuritiesAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Investments"
       }
      }
     },
     "localname": "InvestmentsDebtAndEquitySecuritiesAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "xbrltype": "stringItemType"
    },
    "us-gaap_InvestmentsFairValueDisclosure": {
     "auth_ref": [
      "r648"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Fair value portion of investment securities, including, but not limited to, marketable securities, derivative financial instruments, and investments accounted for under the equity method.",
        "label": "Investments, Fair Value Disclosure",
        "terseLabel": "Total Short-term investments"
       }
      }
     },
     "localname": "InvestmentsFairValueDisclosure",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureFairValueMeasurementsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_InvestmentsInDebtAndMarketableEquitySecuritiesAndCertainTradingAssetsDisclosureTextBlock": {
     "auth_ref": [
      "r104",
      "r220",
      "r231",
      "r245",
      "r797"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The entire disclosure for investments in certain debt and equity securities.",
        "label": "Investments in Debt and Marketable Equity Securities (and Certain Trading Assets) Disclosure [Text Block]",
        "terseLabel": "Investments"
       }
      }
     },
     "localname": "InvestmentsInDebtAndMarketableEquitySecuritiesAndCertainTradingAssetsDisclosureTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureInvestments"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_LandMember": {
     "auth_ref": [
      "r918"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Part of earth's surface not covered by water.",
        "label": "Land"
       }
      }
     },
     "localname": "LandMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosurePropertyPlantAndEquipmentPropertyAndEquipmentDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_LeaseCost": {
     "auth_ref": [
      "r704",
      "r846"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of lease cost recognized by lessee for lease contract.",
        "label": "Lease, Cost",
        "terseLabel": "Lease expense"
       }
      }
     },
     "localname": "LeaseCost",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesLeaseCostsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_LeaseCostAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Lease, Cost [Abstract]",
        "terseLabel": "Lease cost"
       }
      }
     },
     "localname": "LeaseCostAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesLeaseCostsDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_LeaseholdImprovementsMember": {
     "auth_ref": [
      "r118"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Additions or improvements to assets held under a lease arrangement.",
        "label": "Leaseholds improvements"
       }
      }
     },
     "localname": "LeaseholdImprovementsMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosurePropertyPlantAndEquipmentPropertyAndEquipmentDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_LesseeLeasesPolicyTextBlock": {
     "auth_ref": [
      "r698"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Disclosure of accounting policy for leasing arrangement entered into by lessee.",
        "label": "Lessee, Leases [Policy Text Block]",
        "terseLabel": "Leases"
       }
      }
     },
     "localname": "LesseeLeasesPolicyTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesPolicies"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_LesseeOperatingLeaseDescriptionAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Lessee, Operating Lease, Description [Abstract]",
        "terseLabel": "Leases"
       }
      }
     },
     "localname": "LesseeOperatingLeaseDescriptionAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesLeaseTermsDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_LesseeOperatingLeaseDiscountRate": {
     "auth_ref": [
      "r845"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Discount rate used by lessee to determine present value of operating lease payments.",
        "label": "Lessee, Operating Lease, Discount Rate",
        "terseLabel": "Weighted average discount rate (as a percent)"
       }
      }
     },
     "localname": "LesseeOperatingLeaseDiscountRate",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesLeaseTermsDetails"
     ],
     "xbrltype": "percentItemType"
    },
    "us-gaap_LesseeOperatingLeaseLiabilityMaturityTableTextBlock": {
     "auth_ref": [
      "r967"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of undiscounted cash flows of lessee's operating lease liability. Includes, but is not limited to, reconciliation of undiscounted cash flows to operating lease liability recognized in statement of financial position.",
        "label": "Lessee, Operating Lease, Liability, Maturity [Table Text Block]",
        "terseLabel": "Schedule of maturities of lease liabilities 2020"
       }
      }
     },
     "localname": "LesseeOperatingLeaseLiabilityMaturityTableTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue": {
     "auth_ref": [
      "r705"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesMinimumLeaseCommitmentsDetails": {
       "order": null,
       "parentTag": null,
       "root": true,
       "weight": null
      },
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesMinimumLeaseCommitmentsDetailsCalc2": {
       "order": null,
       "parentTag": null,
       "root": true,
       "weight": null
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of lessee's undiscounted obligation for lease payment for operating lease.",
        "label": "Lessee, Operating Lease, Liability, Payments, Due",
        "totalLabel": "Total future minimum lease payments"
       }
      }
     },
     "localname": "LesseeOperatingLeaseLiabilityPaymentsDue",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesMinimumLeaseCommitmentsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive": {
     "auth_ref": [
      "r705"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesMinimumLeaseCommitmentsDetails": {
       "order": 6.0,
       "parentTag": "us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of lessee's undiscounted obligation for lease payment for operating lease due after fifth fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).",
        "label": "Lessee, Operating Lease, Liability, Payments, Due after Year Five",
        "terseLabel": "Thereafter"
       }
      }
     },
     "localname": "LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesMinimumLeaseCommitmentsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths": {
     "auth_ref": [
      "r705"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesMinimumLeaseCommitmentsDetails": {
       "order": 1.0,
       "parentTag": "us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of lessee's undiscounted obligation for lease payment for operating lease to be paid in next fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).",
        "label": "Lessee, Operating Lease, Liability, Payments, Due Next Twelve Months",
        "terseLabel": "2023"
       }
      }
     },
     "localname": "LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesMinimumLeaseCommitmentsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFive": {
     "auth_ref": [
      "r705"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesMinimumLeaseCommitmentsDetails": {
       "order": 5.0,
       "parentTag": "us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of lessee's undiscounted obligation for lease payment for operating lease to be paid in fifth fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).",
        "label": "Lessee, Operating Lease, Liability, Payments, Due Year Five",
        "terseLabel": "2027"
       }
      }
     },
     "localname": "LesseeOperatingLeaseLiabilityPaymentsDueYearFive",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesMinimumLeaseCommitmentsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour": {
     "auth_ref": [
      "r705"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesMinimumLeaseCommitmentsDetails": {
       "order": 4.0,
       "parentTag": "us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of lessee's undiscounted obligation for lease payment for operating lease to be paid in fourth fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).",
        "label": "Lessee, Operating Lease, Liability, Payments, Due Year Four",
        "terseLabel": "2026"
       }
      }
     },
     "localname": "LesseeOperatingLeaseLiabilityPaymentsDueYearFour",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesMinimumLeaseCommitmentsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree": {
     "auth_ref": [
      "r705"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesMinimumLeaseCommitmentsDetails": {
       "order": 3.0,
       "parentTag": "us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of lessee's undiscounted obligation for lease payment for operating lease to be paid in third fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).",
        "label": "Lessee, Operating Lease, Liability, Payments, Due Year Three",
        "terseLabel": "2025"
       }
      }
     },
     "localname": "LesseeOperatingLeaseLiabilityPaymentsDueYearThree",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesMinimumLeaseCommitmentsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo": {
     "auth_ref": [
      "r705"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesMinimumLeaseCommitmentsDetails": {
       "order": 2.0,
       "parentTag": "us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of lessee's undiscounted obligation for lease payment for operating lease to be paid in second fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).",
        "label": "Lessee, Operating Lease, Liability, Payments, Due Year Two",
        "terseLabel": "2024"
       }
      }
     },
     "localname": "LesseeOperatingLeaseLiabilityPaymentsDueYearTwo",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesMinimumLeaseCommitmentsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount": {
     "auth_ref": [
      "r705"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesMinimumLeaseCommitmentsDetailsCalc2": {
       "order": 1.0,
       "parentTag": "us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of lessee's undiscounted obligation for lease payments in excess of discounted obligation for lease payments for operating lease.",
        "label": "Lessee, Operating Lease, Liability, Undiscounted Excess Amount",
        "negatedLabel": "Less: Imputed interest"
       }
      }
     },
     "localname": "LesseeOperatingLeaseLiabilityUndiscountedExcessAmount",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesMinimumLeaseCommitmentsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_LesseeOperatingLeaseRenewalTerm": {
     "auth_ref": [
      "r966"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Term of lessee's operating lease renewal, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days.",
        "label": "Lessee, Operating Lease, Renewal Term",
        "terseLabel": "Lease renewal term"
       }
      }
     },
     "localname": "LesseeOperatingLeaseRenewalTerm",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesLeaseTermsDetails"
     ],
     "xbrltype": "durationItemType"
    },
    "us-gaap_Liabilities": {
     "auth_ref": [
      "r33",
      "r298",
      "r397",
      "r443",
      "r444",
      "r445",
      "r446",
      "r447",
      "r448",
      "r449",
      "r450",
      "r451",
      "r627",
      "r630",
      "r631",
      "r655",
      "r821",
      "r912",
      "r969",
      "r970"
     ],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheets": {
       "order": 1.0,
       "parentTag": "us-gaap_LiabilitiesAndStockholdersEquity",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Sum of the carrying amounts as of the balance sheet date of all liabilities that are recognized. Liabilities are probable future sacrifices of economic benefits arising from present obligations of an entity to transfer assets or provide services to other entities in the future.",
        "label": "Liabilities.",
        "totalLabel": "Total liabilities"
       }
      }
     },
     "localname": "Liabilities",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_LiabilitiesAndStockholdersEquity": {
     "auth_ref": [
      "r25",
      "r226",
      "r240",
      "r847",
      "r872",
      "r890",
      "r962"
     ],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheets": {
       "order": null,
       "parentTag": null,
       "root": true,
       "weight": null
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of liabilities and equity items, including the portion of equity attributable to noncontrolling interests, if any.",
        "label": "Liabilities and Equity",
        "totalLabel": "Total liabilities and stockholders' equity"
       }
      }
     },
     "localname": "LiabilitiesAndStockholdersEquity",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_LiabilitiesAndStockholdersEquityAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Liabilities and Equity [Abstract]",
        "terseLabel": "Liabilities and stockholders' equity"
       }
      }
     },
     "localname": "LiabilitiesAndStockholdersEquityAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheets"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_LiabilitiesCurrent": {
     "auth_ref": [
      "r35",
      "r255",
      "r298",
      "r397",
      "r443",
      "r444",
      "r445",
      "r446",
      "r447",
      "r448",
      "r449",
      "r450",
      "r451",
      "r627",
      "r630",
      "r631",
      "r655",
      "r847",
      "r912",
      "r969",
      "r970"
     ],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheets": {
       "order": 1.0,
       "parentTag": "us-gaap_Liabilities",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Total obligations incurred as part of normal operations that are expected to be paid during the following twelve months or within one business cycle, if longer.",
        "label": "Liabilities, Current",
        "totalLabel": "Total current liabilities"
       }
      }
     },
     "localname": "LiabilitiesCurrent",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_LiabilitiesCurrentAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Liabilities, Current [Abstract]",
        "terseLabel": "Current liabilities:"
       }
      }
     },
     "localname": "LiabilitiesCurrentAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheets"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_LineOfCreditFacilityMaximumAmountOutstandingDuringPeriod": {
     "auth_ref": [],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Maximum amount borrowed under the credit facility at any time during the period.",
        "label": "Line of Credit Facility, Maximum Amount Outstanding During Period",
        "terseLabel": "Outstanding amount"
       }
      }
     },
     "localname": "LineOfCreditFacilityMaximumAmountOutstandingDuringPeriod",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDebtRevolvingCreditFacilityDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity": {
     "auth_ref": [
      "r31"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Maximum borrowing capacity under the credit facility without consideration of any current restrictions on the amount that could be borrowed or the amounts currently outstanding under the facility.",
        "label": "Line of Credit Facility, Maximum Borrowing Capacity",
        "terseLabel": "Borrowing capacity"
       }
      }
     },
     "localname": "LineOfCreditFacilityMaximumBorrowingCapacity",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDebtRevolvingCreditFacilityDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_LineOfCreditFacilityRemainingBorrowingCapacity": {
     "auth_ref": [
      "r31"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of borrowing capacity currently available under the credit facility (current borrowing capacity less the amount of borrowings outstanding).",
        "label": "Line of Credit Facility, Remaining Borrowing Capacity",
        "verboseLabel": "Unused bank guarantees and letters of credit"
       }
      }
     },
     "localname": "LineOfCreditFacilityRemainingBorrowingCapacity",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesPurchaseCommitmentsAndBankGuaranteesDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_LineOfCreditFacilityUnusedCapacityCommitmentFeePercentage": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The fee, expressed as a percentage of the line of credit facility, for available but unused credit capacity under the credit facility.",
        "label": "Line of Credit Facility, Unused Capacity, Commitment Fee Percentage",
        "terseLabel": "Unused commitment fee percentage (as a percent)"
       }
      }
     },
     "localname": "LineOfCreditFacilityUnusedCapacityCommitmentFeePercentage",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDebtRevolvingCreditFacilityDetails"
     ],
     "xbrltype": "percentItemType"
    },
    "us-gaap_LitigationSettlementAmountAwardedToOtherParty": {
     "auth_ref": [],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount awarded to other party in judgment or settlement of litigation.",
        "label": "Litigation Settlement, Amount Awarded to Other Party",
        "terseLabel": "Settlement amount"
       }
      }
     },
     "localname": "LitigationSettlementAmountAwardedToOtherParty",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesLegalProceedingsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_LongTermDebt": {
     "auth_ref": [
      "r15",
      "r225",
      "r238",
      "r465",
      "r480",
      "r826",
      "r827"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureDebtCarryingValueDetails": {
       "order": null,
       "parentTag": null,
       "root": true,
       "weight": null
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount, excluding unamortized premium (discount) and debt issuance cost, of long-term debt. Excludes lease obligation.",
        "label": "Long-term Debt",
        "totalLabel": "Net carrying value"
       }
      }
     },
     "localname": "LongTermDebt",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDebtCarryingValueDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_LongTermDebtCurrent": {
     "auth_ref": [
      "r32"
     ],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheets": {
       "order": 5.0,
       "parentTag": "us-gaap_LiabilitiesCurrent",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount, after unamortized (discount) premium and debt issuance costs, of long-term debt, classified as current. Includes, but not limited to, notes payable, bonds payable, debentures, mortgage loans and commercial paper. Excludes capital lease obligations.",
        "label": "Long-term Debt, Current Maturities",
        "terseLabel": "Current portion of long-term debt"
       }
      }
     },
     "localname": "LongTermDebtCurrent",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_LongTermDebtMeasurementInput": {
     "auth_ref": [
      "r651"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Value of input used to measure long-term debt.",
        "label": "Long-Term Debt, Measurement Input [Extensible Enumeration]",
        "terseLabel": "Measurement input"
       }
      }
     },
     "localname": "LongTermDebtMeasurementInput",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDebtConvertibleSeniorNotesDetails"
     ],
     "xbrltype": "decimalItemType"
    },
    "us-gaap_LongTermDebtMeasurementInputExtensibleList": {
     "auth_ref": [
      "r961"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Indicates measurement input for long-term debt.",
        "label": "Long-term Debt, Measurement Input [Extensible List]",
        "terseLabel": "Long-term Debt, Measurement Input"
       }
      }
     },
     "localname": "LongTermDebtMeasurementInputExtensibleList",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDebtConvertibleSeniorNotesDetails"
     ],
     "xbrltype": "enumerationSetItemType"
    },
    "us-gaap_LongTermDebtNoncurrent": {
     "auth_ref": [
      "r263"
     ],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheets": {
       "order": 3.0,
       "parentTag": "us-gaap_Liabilities",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount, excluding unamortized premium (discount) and debt issuance cost, of long-term debt classified as noncurrent. Excludes lease obligation.",
        "label": "Long-term Debt, Excluding Current Maturities",
        "terseLabel": "Long-term debt"
       }
      }
     },
     "localname": "LongTermDebtNoncurrent",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesRecentlyAdoptedAccountingStandardsDetails",
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_LossContingenciesLineItems": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.",
        "label": "Loss Contingencies [Line Items]",
        "terseLabel": "Legal Proceedings"
       }
      }
     },
     "localname": "LossContingenciesLineItems",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesLegalProceedingsDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_LossContingenciesTable": {
     "auth_ref": [
      "r126",
      "r127",
      "r438",
      "r439",
      "r440",
      "r907",
      "r908"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Discloses the specific components (such as the nature, name, and date) of the loss contingency and gives an estimate of the possible loss or range of loss, or states that a reasonable estimate cannot be made. Excludes environmental contingencies, warranties and unconditional purchase obligations.",
        "label": "Loss Contingencies [Table]"
       }
      }
     },
     "localname": "LossContingenciesTable",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesLegalProceedingsDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_LossContingencyAccrualCarryingValueCurrent": {
     "auth_ref": [
      "r438"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesComponentsDetails": {
       "order": 6.0,
       "parentTag": "veco_AccruedAndOtherLiabilitiesCurrent",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of loss contingency liability expected to be resolved within one year or the normal operating cycle, if longer.",
        "label": "Loss Contingency, Accrual, Current",
        "terseLabel": "Legal settlement"
       }
      }
     },
     "localname": "LossContingencyAccrualCarryingValueCurrent",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesComponentsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_LossContingencyNewClaimsFiledNumber": {
     "auth_ref": [
      "r907",
      "r908"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The total number of new claims filed pertaining to a loss contingency during the period.",
        "label": "Loss Contingency, New Claims Filed, Number",
        "terseLabel": "Number of purported class action complaints filed"
       }
      }
     },
     "localname": "LossContingencyNewClaimsFiledNumber",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesLegalProceedingsDetails"
     ],
     "xbrltype": "integerItemType"
    },
    "us-gaap_MachineryAndEquipmentMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tangible personal property used to produce goods and services, including, but is not limited to, tools, dies and molds, computer and office equipment.",
        "label": "Machinery and equipment"
       }
      }
     },
     "localname": "MachineryAndEquipmentMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosurePropertyPlantAndEquipmentPropertyAndEquipmentDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_MovementInDeferredRevenueRollForward": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "A roll forward is a reconciliation of a concept from the beginning of a period to the end of a period.",
        "label": "Movement in Deferred Revenue [Roll Forward]",
        "terseLabel": "Changes in deferred revenue"
       }
      }
     },
     "localname": "MovementInDeferredRevenueRollForward",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesCustomerDepositsAndDeferredRevenueDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_NetCashProvidedByUsedInFinancingActivities": {
     "auth_ref": [
      "r293"
     ],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "order": 3.0,
       "parentTag": "us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of cash inflow (outflow) from financing activities, including discontinued operations. Financing activity cash flows include obtaining resources from owners and providing them with a return on, and a return of, their investment; borrowing money and repaying amounts borrowed, or settling the obligation; and obtaining and paying for other resources obtained from creditors on long-term credit.",
        "label": "Net Cash Provided by (Used in) Financing Activities, Continuing Operations",
        "totalLabel": "Net cash provided by (used in) financing activities"
       }
      }
     },
     "localname": "NetCashProvidedByUsedInFinancingActivities",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_NetCashProvidedByUsedInFinancingActivitiesContinuingOperationsAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Net Cash Provided by (Used in) Financing Activities, Continuing Operations [Abstract]",
        "terseLabel": "Cash Flows from Financing Activities"
       }
      }
     },
     "localname": "NetCashProvidedByUsedInFinancingActivitiesContinuingOperationsAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_NetCashProvidedByUsedInInvestingActivities": {
     "auth_ref": [
      "r293"
     ],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "order": 2.0,
       "parentTag": "us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of cash inflow (outflow) from investing activities, including discontinued operations. Investing activity cash flows include making and collecting loans and acquiring and disposing of debt or equity instruments and property, plant, and equipment and other productive assets.",
        "label": "Net Cash Provided by (Used in) Investing Activities, Continuing Operations",
        "totalLabel": "Net cash provided by (used in) investing activities"
       }
      }
     },
     "localname": "NetCashProvidedByUsedInInvestingActivities",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_NetCashProvidedByUsedInInvestingActivitiesContinuingOperationsAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Net Cash Provided by (Used in) Investing Activities, Continuing Operations [Abstract]",
        "terseLabel": "Cash Flows from Investing Activities"
       }
      }
     },
     "localname": "NetCashProvidedByUsedInInvestingActivitiesContinuingOperationsAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_NetCashProvidedByUsedInOperatingActivities": {
     "auth_ref": [
      "r67",
      "r68",
      "r71"
     ],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "order": 1.0,
       "parentTag": "us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect",
       "weight": 1.0
      }
     },
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of cash inflow (outflow) from operating activities, including discontinued operations. Operating activity cash flows include transactions, adjustments, and changes in value not defined as investing or financing activities.",
        "label": "Net Cash Provided by (Used in) Operating Activities, Continuing Operations",
        "totalLabel": "Net cash provided by (used in) operating activities"
       }
      }
     },
     "localname": "NetCashProvidedByUsedInOperatingActivities",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_NetCashProvidedByUsedInOperatingActivitiesContinuingOperationsAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Net Cash Provided by (Used in) Operating Activities, Continuing Operations [Abstract]",
        "terseLabel": "Cash Flows from Operating Activities"
       }
      }
     },
     "localname": "NetCashProvidedByUsedInOperatingActivitiesContinuingOperationsAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_NetIncomeLoss": {
     "auth_ref": [
      "r50",
      "r71",
      "r229",
      "r243",
      "r253",
      "r274",
      "r277",
      "r282",
      "r298",
      "r315",
      "r319",
      "r320",
      "r321",
      "r322",
      "r325",
      "r326",
      "r338",
      "r364",
      "r367",
      "r372",
      "r375",
      "r397",
      "r443",
      "r444",
      "r445",
      "r446",
      "r447",
      "r448",
      "r449",
      "r450",
      "r451",
      "r646",
      "r655",
      "r822",
      "r912"
     ],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfComprehensiveIncomeLoss": {
       "order": 1.0,
       "parentTag": "us-gaap_ComprehensiveIncomeNetOfTax",
       "weight": 1.0
      },
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations": {
       "order": null,
       "parentTag": null,
       "root": true,
       "weight": null
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The portion of profit or loss for the period, net of income taxes, which is attributable to the parent.",
        "label": "Net Income (Loss) Attributable to Parent",
        "terseLabel": "Net income",
        "totalLabel": "Net income",
        "verboseLabel": "Net income (loss)"
       }
      }
     },
     "localname": "NetIncomeLoss",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfComprehensiveIncomeLoss",
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations",
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfStockholdersEquity"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic": {
     "auth_ref": [
      "r319",
      "r320",
      "r321",
      "r322",
      "r328",
      "r329",
      "r339",
      "r342",
      "r364",
      "r367",
      "r372",
      "r375",
      "r822"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureIncomePerCommonShareBasicAndDilutedDetails": {
       "order": 1.0,
       "parentTag": "us-gaap_NetIncomeLossAvailableToCommonStockholdersDiluted",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount, after deduction of tax, noncontrolling interests, dividends on preferred stock and participating securities; of income (loss) available to common shareholders.",
        "label": "Net Income (Loss) Available to Common Stockholders, Basic",
        "verboseLabel": "Net income"
       }
      }
     },
     "localname": "NetIncomeLossAvailableToCommonStockholdersBasic",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomePerCommonShareBasicAndDilutedDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_NetIncomeLossAvailableToCommonStockholdersDiluted": {
     "auth_ref": [
      "r330",
      "r332",
      "r333",
      "r334",
      "r335",
      "r339",
      "r342"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureIncomePerCommonShareBasicAndDilutedDetails": {
       "order": null,
       "parentTag": null,
       "root": true,
       "weight": null
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount, after deduction of tax, noncontrolling interests, dividends on preferred stock and participating securities, and addition from assumption of issuance of common shares for dilutive potential common shares; of income (loss) available to common shareholders.",
        "label": "Net Income (Loss) Available to Common Stockholders, Diluted",
        "totalLabel": "Net income available to common shareholders"
       }
      }
     },
     "localname": "NetIncomeLossAvailableToCommonStockholdersDiluted",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomePerCommonShareBasicAndDilutedDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_NewAccountingPronouncementsOrChangeInAccountingPrincipleLineItems": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.",
        "label": "New Accounting Pronouncements or Change in Accounting Principle [Line Items]",
        "verboseLabel": "Accounting Changes"
       }
      }
     },
     "localname": "NewAccountingPronouncementsOrChangeInAccountingPrincipleLineItems",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesRecentlyAdoptedAccountingStandardsDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_NewAccountingPronouncementsOrChangeInAccountingPrincipleTable": {
     "auth_ref": [
      "r79",
      "r247",
      "r248",
      "r249",
      "r250",
      "r251",
      "r313",
      "r315",
      "r316",
      "r317",
      "r318",
      "r321",
      "r327",
      "r346",
      "r386",
      "r387",
      "r401",
      "r402",
      "r403",
      "r404",
      "r405",
      "r406",
      "r574",
      "r575",
      "r576",
      "r606",
      "r607",
      "r608",
      "r609",
      "r621",
      "r622",
      "r623",
      "r635",
      "r636",
      "r637",
      "r639",
      "r640",
      "r641",
      "r642",
      "r643",
      "r644",
      "r645",
      "r646",
      "r647",
      "r656",
      "r657",
      "r659",
      "r660",
      "r661",
      "r662",
      "r663",
      "r664",
      "r676",
      "r677",
      "r688",
      "r689",
      "r690",
      "r691",
      "r706",
      "r707",
      "r708",
      "r709",
      "r710",
      "r711",
      "r751",
      "r752",
      "r753",
      "r766",
      "r767",
      "r768",
      "r769",
      "r770",
      "r771",
      "r772",
      "r773",
      "r774",
      "r775",
      "r776",
      "r777"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Summarization of the changes in an accounting principle or a new accounting pronouncement, including the line items affected by the change and the financial effects of the change on those particular line items.",
        "label": "New Accounting Pronouncements or Change in Accounting Principle [Table]"
       }
      }
     },
     "localname": "NewAccountingPronouncementsOrChangeInAccountingPrincipleTable",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesRecentlyAdoptedAccountingStandardsDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_NewAccountingPronouncementsPolicyPolicyTextBlock": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Disclosure of accounting policy pertaining to new accounting pronouncements that may impact the entity's financial reporting. Includes, but is not limited to, quantification of the expected or actual impact.",
        "label": "New Accounting Pronouncements, Policy [Policy Text Block]",
        "terseLabel": "Recently Adopted Accounting Standards and Recent Accounting Pronouncements Not Yet Adopted"
       }
      }
     },
     "localname": "NewAccountingPronouncementsPolicyPolicyTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesPolicies"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_NumberOfOperatingSegments": {
     "auth_ref": [
      "r886"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Number of operating segments. An operating segment is a component of an enterprise: (a) that engages in business activities from which it may earn revenues and incur expenses (including revenues and expenses relating to transactions with other components of the same enterprise), (b) whose operating results are regularly reviewed by the enterprise's chief operating decision maker to make decisions about resources to be allocated to the segment and assess its performance, and (c) for which discrete financial information is available. An operating segment may engage in business activities for which it has yet to earn revenues, for example, start-up operations may be operating segments before earning revenues.",
        "label": "Number of Operating Segments",
        "terseLabel": "Number of operating segments"
       }
      }
     },
     "localname": "NumberOfOperatingSegments",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformationSegmentDetails",
      "http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesDescriptionOfBusinessAndBasisOfPresentationDetails"
     ],
     "xbrltype": "integerItemType"
    },
    "us-gaap_NumberOfReportableSegments": {
     "auth_ref": [
      "r886"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Number of segments reported by the entity. A reportable segment is a component of an entity for which there is an accounting requirement to report separate financial information on that component in the entity's financial statements.",
        "label": "Number of Reportable Segments",
        "terseLabel": "Number of reportable segments"
       }
      }
     },
     "localname": "NumberOfReportableSegments",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformationSegmentDetails"
     ],
     "xbrltype": "integerItemType"
    },
    "us-gaap_OperatingExpenses": {
     "auth_ref": [],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations": {
       "order": 2.0,
       "parentTag": "us-gaap_OperatingIncomeLoss",
       "weight": -1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Generally recurring costs associated with normal operations except for the portion of these expenses which can be clearly related to production and included in cost of sales or services. Includes selling, general and administrative expense.",
        "label": "Operating Expenses",
        "totalLabel": "Total operating expenses, net"
       }
      }
     },
     "localname": "OperatingExpenses",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_OperatingExpensesAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Operating Expenses [Abstract]",
        "terseLabel": "Operating expenses, net:"
       }
      }
     },
     "localname": "OperatingExpensesAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_OperatingIncomeLoss": {
     "auth_ref": [
      "r364",
      "r367",
      "r372",
      "r375",
      "r822"
     ],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations": {
       "order": 1.0,
       "parentTag": "us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The net result for the period of deducting operating expenses from operating revenues.",
        "label": "Operating Income (Loss)",
        "totalLabel": "Operating income"
       }
      }
     },
     "localname": "OperatingIncomeLoss",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_OperatingLeaseCost": {
     "auth_ref": [
      "r699",
      "r846"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of single lease cost, calculated by allocation of remaining cost of lease over remaining lease term. Includes, but is not limited to, single lease cost, after impairment of right-of-use asset, calculated by amortization of remaining right-of-use asset and accretion of lease liability.",
        "label": "Operating Lease, Cost",
        "terseLabel": "Operating lease cost"
       }
      }
     },
     "localname": "OperatingLeaseCost",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesLeaseCostsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Operating Lease Liabilities, Payments Due [Abstract]",
        "terseLabel": "Minimum lease commitments, Payments due by period:"
       }
      }
     },
     "localname": "OperatingLeaseLiabilitiesPaymentsDueAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesMinimumLeaseCommitmentsDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_OperatingLeaseLiability": {
     "auth_ref": [
      "r695"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesMinimumLeaseCommitmentsDetails": {
       "order": null,
       "parentTag": null,
       "root": true,
       "weight": null
      },
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesMinimumLeaseCommitmentsDetailsCalc2": {
       "order": 2.0,
       "parentTag": "us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Present value of lessee's discounted obligation for lease payments from operating lease.",
        "label": "Operating Lease, Liability",
        "totalLabel": "Total operating lease liabilities",
        "verboseLabel": "Total operating lease liabilities"
       }
      }
     },
     "localname": "OperatingLeaseLiability",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesMinimumLeaseCommitmentsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_OperatingLeaseLiabilityCurrent": {
     "auth_ref": [
      "r695"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesComponentsDetails": {
       "order": 3.0,
       "parentTag": "veco_AccruedAndOtherLiabilitiesCurrent",
       "weight": 1.0
      },
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesMinimumLeaseCommitmentsDetails": {
       "order": 1.0,
       "parentTag": "us-gaap_OperatingLeaseLiability",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Present value of lessee's discounted obligation for lease payments from operating lease, classified as current.",
        "label": "Operating Lease, Liability, Current",
        "terseLabel": "Operating lease liability, current",
        "verboseLabel": "Operating lease liabilities"
       }
      }
     },
     "localname": "OperatingLeaseLiabilityCurrent",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesComponentsDetails",
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesMinimumLeaseCommitmentsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList": {
     "auth_ref": [
      "r696"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Indicates line item in statement of financial position that includes current operating lease liability.",
        "label": "Operating Lease, Liability, Current, Statement of Financial Position [Extensible Enumeration]",
        "terseLabel": "Operating Lease, Liability, Current, Statement of Financial Position"
       }
      }
     },
     "localname": "OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesComponentsDetails",
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesMinimumLeaseCommitmentsDetails"
     ],
     "xbrltype": "enumerationSetItemType"
    },
    "us-gaap_OperatingLeaseLiabilityNoncurrent": {
     "auth_ref": [
      "r695"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesMinimumLeaseCommitmentsDetails": {
       "order": 2.0,
       "parentTag": "us-gaap_OperatingLeaseLiability",
       "weight": 1.0
      },
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheets": {
       "order": 4.0,
       "parentTag": "us-gaap_Liabilities",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Present value of lessee's discounted obligation for lease payments from operating lease, classified as noncurrent.",
        "label": "Operating Lease, Liability, Noncurrent",
        "terseLabel": "Long-term operating lease liabilities"
       }
      }
     },
     "localname": "OperatingLeaseLiabilityNoncurrent",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesMinimumLeaseCommitmentsDetails",
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_OperatingLeaseLiabilityStatementOfFinancialPositionExtensibleList": {
     "auth_ref": [
      "r696"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Indicates line item in statement of financial position that includes operating lease liability.",
        "label": "Operating Lease, Liability, Statement of Financial Position [Extensible Enumeration]",
        "terseLabel": "Operating Lease, Liability, Statement of Financial Position"
       }
      }
     },
     "localname": "OperatingLeaseLiabilityStatementOfFinancialPositionExtensibleList",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesMinimumLeaseCommitmentsDetails"
     ],
     "xbrltype": "enumerationSetItemType"
    },
    "us-gaap_OperatingLeasePayments": {
     "auth_ref": [
      "r697",
      "r701"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of cash outflow from operating lease, excluding payments to bring another asset to condition and location necessary for its intended use.",
        "label": "Operating Lease, Payments",
        "terseLabel": "Operating cash flows from operating leases"
       }
      }
     },
     "localname": "OperatingLeasePayments",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesLeaseCostsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_OperatingLeaseRightOfUseAsset": {
     "auth_ref": [
      "r694"
     ],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheets": {
       "order": 3.0,
       "parentTag": "us-gaap_Assets",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of lessee's right to use underlying asset under operating lease.",
        "label": "Operating Lease, Right-of-Use Asset",
        "terseLabel": "Operating lease right-of-use assets"
       }
      }
     },
     "localname": "OperatingLeaseRightOfUseAsset",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_OperatingLeaseWeightedAverageRemainingLeaseTerm1": {
     "auth_ref": [
      "r703",
      "r846"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Weighted average remaining lease term for operating lease, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days.",
        "label": "Operating Lease, Weighted Average Remaining Lease Term",
        "terseLabel": "Remaining lease term"
       }
      }
     },
     "localname": "OperatingLeaseWeightedAverageRemainingLeaseTerm1",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesLeaseTermsDetails"
     ],
     "xbrltype": "durationItemType"
    },
    "us-gaap_OperatingLossCarryforwards": {
     "auth_ref": [
      "r180"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of operating loss carryforward, before tax effects, available to reduce future taxable income under enacted tax laws.",
        "label": "Operating Loss Carryforwards",
        "verboseLabel": "Net operating loss carryforwards"
       }
      }
     },
     "localname": "OperatingLossCarryforwards",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesOperatingLossCarryforwardsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_OperatingLossCarryforwardsLineItems": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.",
        "label": "Operating Loss Carryforwards [Line Items]",
        "terseLabel": "Operating loss carryforwards disclosures"
       }
      }
     },
     "localname": "OperatingLossCarryforwardsLineItems",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesOperatingLossCarryforwardsDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_OperatingLossCarryforwardsTable": {
     "auth_ref": [
      "r181"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Schedule reflecting pertinent information, such as tax authority, amounts, and expiration dates, of net operating loss carryforwards, including an assessment of the likelihood of utilization.",
        "label": "Operating Loss Carryforwards [Table]"
       }
      }
     },
     "localname": "OperatingLossCarryforwardsTable",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesOperatingLossCarryforwardsDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Significant Accounting Policies"
       }
      }
     },
     "localname": "OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "xbrltype": "stringItemType"
    },
    "us-gaap_OrganizationConsolidationBasisOfPresentationBusinessDescriptionAndAccountingPoliciesTextBlock": {
     "auth_ref": [
      "r78",
      "r81",
      "r93",
      "r198"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The entire disclosure for the general note to the financial statements for the reporting entity which may include, descriptions of the basis of presentation, business description, significant accounting policies, consolidations, reclassifications, new pronouncements not yet adopted and changes in accounting principles.",
        "label": "Organization, Consolidation, Basis of Presentation, Business Description and Accounting Policies [Text Block]",
        "terseLabel": "Significant Accounting Policies"
       }
      }
     },
     "localname": "OrganizationConsolidationBasisOfPresentationBusinessDescriptionAndAccountingPoliciesTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSignificantAccountingPolicies"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_OtherAccruedLiabilitiesCurrent": {
     "auth_ref": [
      "r34"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesComponentsDetails": {
       "order": 8.0,
       "parentTag": "veco_AccruedAndOtherLiabilitiesCurrent",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of expenses incurred but not yet paid classified as other, due within one year or the normal operating cycle, if longer.",
        "label": "Other Accrued Liabilities, Current",
        "terseLabel": "Other"
       }
      }
     },
     "localname": "OtherAccruedLiabilitiesCurrent",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesComponentsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_OtherAssetsNoncurrent": {
     "auth_ref": [
      "r261"
     ],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheets": {
       "order": 7.0,
       "parentTag": "us-gaap_Assets",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of noncurrent assets classified as other.",
        "label": "Other Assets, Noncurrent",
        "terseLabel": "Other assets"
       }
      }
     },
     "localname": "OtherAssetsNoncurrent",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_OtherComprehensiveIncomeAvailableforsaleSecuritiesAdjustmentNetOfTaxPortionAttributableToParent": {
     "auth_ref": [
      "r193",
      "r194",
      "r196"
     ],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfComprehensiveIncomeLoss": {
       "order": 1.0,
       "parentTag": "us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount after tax and reclassification adjustments, of appreciation (loss) in value of unsold available-for-sale securities, attributable to parent entity. Excludes amounts related to other than temporary impairment (OTTI) loss.",
        "label": "Other Comprehensive Income (Loss), Available-for-sale Securities Adjustment, Net of Tax, Portion Attributable to Parent",
        "totalLabel": "Unrealized gain (loss) on available-for-sale securities"
       }
      }
     },
     "localname": "OtherComprehensiveIncomeAvailableforsaleSecuritiesAdjustmentNetOfTaxPortionAttributableToParent",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfComprehensiveIncomeLoss"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_OtherComprehensiveIncomeAvailableforsaleSecuritiesAdjustmentNetOfTaxPortionAttributableToParentAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Other Comprehensive Income (Loss), Available-for-sale Securities Adjustment, Net of Tax, Portion Attributable to Parent [Abstract]",
        "terseLabel": "Available-for-sale securities:"
       }
      }
     },
     "localname": "OtherComprehensiveIncomeAvailableforsaleSecuritiesAdjustmentNetOfTaxPortionAttributableToParentAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfComprehensiveIncomeLoss"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent": {
     "auth_ref": [
      "r193",
      "r194",
      "r196"
     ],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfComprehensiveIncomeLoss": {
       "order": 2.0,
       "parentTag": "us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount after tax and reclassification adjustments of gain (loss) on foreign currency translation adjustments, foreign currency transactions designated and effective as economic hedges of a net investment in a foreign entity and intra-entity foreign currency transactions that are of a long-term-investment nature, attributable to parent entity.",
        "label": "Other Comprehensive Income (Loss), Foreign Currency Transaction and Translation Adjustment, Net of Tax, Portion Attributable to Parent",
        "totalLabel": "Net changes related to currency translation adjustments"
       }
      }
     },
     "localname": "OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfComprehensiveIncomeLoss"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParentAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Other Comprehensive Income (Loss), Foreign Currency Transaction and Translation Adjustment, Net of Tax, Portion Attributable to Parent [Abstract]",
        "terseLabel": "Currency translation adjustments:"
       }
      }
     },
     "localname": "OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParentAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfComprehensiveIncomeLoss"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationGainLossArisingDuringPeriodNetOfTax": {
     "auth_ref": [
      "r43",
      "r45",
      "r665",
      "r666",
      "r667"
     ],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfComprehensiveIncomeLoss": {
       "order": 1.0,
       "parentTag": "us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount after tax, before reclassification adjustments of gain (loss) on foreign currency translation adjustments, foreign currency transactions designated and effective as economic hedges of a net investment in a foreign entity and intra-entity foreign currency transactions that are of a long-term-investment nature.",
        "label": "Other Comprehensive Income (Loss), Foreign Currency Transaction and Translation Gain (Loss) Arising During Period, Net of Tax",
        "negatedLabel": "Change in currency translation adjustments"
       }
      }
     },
     "localname": "OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationGainLossArisingDuringPeriodNetOfTax",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfComprehensiveIncomeLoss"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent": {
     "auth_ref": [
      "r193",
      "r194",
      "r196",
      "r275",
      "r278"
     ],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfComprehensiveIncomeLoss": {
       "order": 2.0,
       "parentTag": "us-gaap_ComprehensiveIncomeNetOfTax",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount after tax of other comprehensive income (loss) attributable to parent entity.",
        "label": "Other Comprehensive Income (Loss), Net of Tax, Portion Attributable to Parent",
        "terseLabel": "Other comprehensive income (loss)",
        "totalLabel": "Total other comprehensive income (loss), net of tax"
       }
      }
     },
     "localname": "OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockholdersEquityAociRollforwardDetails",
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfComprehensiveIncomeLoss"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParentAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Other Comprehensive Income (Loss), Net of Tax [Abstract]",
        "terseLabel": "Other comprehensive income (loss), net of tax:"
       }
      }
     },
     "localname": "OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParentAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfComprehensiveIncomeLoss"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_OtherComprehensiveIncomeUnrealizedHoldingGainLossOnSecuritiesArisingDuringPeriodNetOfTax": {
     "auth_ref": [
      "r269",
      "r272"
     ],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfComprehensiveIncomeLoss": {
       "order": 1.0,
       "parentTag": "us-gaap_OtherComprehensiveIncomeAvailableforsaleSecuritiesAdjustmentNetOfTaxPortionAttributableToParent",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount, after tax and before adjustment, of unrealized holding gain (loss) on investment in debt security measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale). Excludes unrealized gain (loss) on investment in debt security measured at amortized cost (held-to-maturity) from transfer to available-for-sale.",
        "label": "Other Comprehensive Income (Loss), Securities, Available-for-Sale, Unrealized Holding Gain (Loss) Arising During Period, after Tax",
        "terseLabel": "Change in net unrealized gains or losses"
       }
      }
     },
     "localname": "OtherComprehensiveIncomeUnrealizedHoldingGainLossOnSecuritiesArisingDuringPeriodNetOfTax",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfComprehensiveIncomeLoss"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_OtherIntangibleAssetsMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Intangible assets classified as other.",
        "label": "Other Intangible Assets"
       }
      }
     },
     "localname": "OtherIntangibleAssetsMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssetsIntangibleAssetsDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_OtherLiabilitiesAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Other Liabilities [Abstract]",
        "terseLabel": "Other liabilities"
       }
      }
     },
     "localname": "OtherLiabilitiesAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesOtherLiabilitiesDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_OtherLiabilitiesMember": {
     "auth_ref": [
      "r199",
      "r206"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Primary financial statement caption encompassing other liabilities.",
        "label": "Other Liabilities"
       }
      }
     },
     "localname": "OtherLiabilitiesMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesOtherLiabilitiesDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_OtherLiabilitiesNoncurrent": {
     "auth_ref": [
      "r39"
     ],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheets": {
       "order": 5.0,
       "parentTag": "us-gaap_Liabilities",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of liabilities classified as other, due after one year or the normal operating cycle, if longer.",
        "label": "Other Liabilities, Noncurrent",
        "terseLabel": "Other liabilities"
       }
      }
     },
     "localname": "OtherLiabilitiesNoncurrent",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_OtherNonoperatingIncomeExpense": {
     "auth_ref": [
      "r57"
     ],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations": {
       "order": 4.0,
       "parentTag": "us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of income (expense) related to nonoperating activities, classified as other.",
        "label": "Other Nonoperating Income (Expense)",
        "terseLabel": "Other income (expense), net"
       }
      }
     },
     "localname": "OtherNonoperatingIncomeExpense",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_OtherNonoperatingIncomeExpenseMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Primary financial statement caption encompassing other nonoperating income (expense).",
        "label": "Other income (expense), net"
       }
      }
     },
     "localname": "OtherNonoperatingIncomeExpenseMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDebt20232025And2027NotesDetails",
      "http://www.veeco.com/role/DisclosureInvestmentsOtherInvestmentDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_OtherOperatingIncomeExpenseNet": {
     "auth_ref": [],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations": {
       "order": 6.0,
       "parentTag": "us-gaap_OperatingExpenses",
       "weight": -1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The net amount of other operating income and expenses, the components of which are not separately disclosed on the income statement, from items that are associated with the entity's normal revenue producing operations.",
        "label": "Other Operating Income (Expense), Net",
        "negatedLabel": "Other operating expense (income), net"
       }
      }
     },
     "localname": "OtherOperatingIncomeExpenseNet",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_PayablesAndAccrualsAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Accrued Expenses and Other Liabilities"
       }
      }
     },
     "localname": "PayablesAndAccrualsAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "xbrltype": "stringItemType"
    },
    "us-gaap_PaymentsForDerivativeInstrumentFinancingActivities": {
     "auth_ref": [
      "r290",
      "r815"
     ],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "order": 2.0,
       "parentTag": "us-gaap_NetCashProvidedByUsedInFinancingActivities",
       "weight": -1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The cash outflow for derivative instruments during the period, which are classified as financing activities, excluding those designated as hedging instruments.",
        "label": "Payments for Derivative Instrument, Financing Activities",
        "negatedLabel": "Purchase of capped calls",
        "terseLabel": "Purchase of capped calls"
       }
      }
     },
     "localname": "PaymentsForDerivativeInstrumentFinancingActivities",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDebt20232025And2027NotesDetails",
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_PaymentsOfDebtIssuanceCosts": {
     "auth_ref": [
      "r66"
     ],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "order": 6.0,
       "parentTag": "us-gaap_NetCashProvidedByUsedInFinancingActivities",
       "weight": -1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The cash outflow paid to third parties in connection with debt origination, which will be amortized over the remaining maturity period of the associated long-term debt.",
        "label": "Payments of Debt Issuance Costs",
        "negatedLabel": "Debt issuance costs",
        "terseLabel": "Transaction costs"
       }
      }
     },
     "localname": "PaymentsOfDebtIssuanceCosts",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDebtConvertibleSeniorNotesDetails",
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_PaymentsRelatedToTaxWithholdingForShareBasedCompensation": {
     "auth_ref": [
      "r289"
     ],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "order": 5.0,
       "parentTag": "us-gaap_NetCashProvidedByUsedInFinancingActivities",
       "weight": -1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of cash outflow to satisfy grantee's tax withholding obligation for award under share-based payment arrangement.",
        "label": "Payments Related to Tax Withholding for Share-based Compensation",
        "negatedTerseLabel": "Restricted stock tax withholdings"
       }
      }
     },
     "localname": "PaymentsRelatedToTaxWithholdingForShareBasedCompensation",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_PaymentsToAcquireAvailableForSaleSecuritiesDebt": {
     "auth_ref": [
      "r60",
      "r100",
      "r287"
     ],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "order": 3.0,
       "parentTag": "us-gaap_NetCashProvidedByUsedInInvestingActivities",
       "weight": -1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of cash outflow to acquire investment in debt security measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale).",
        "label": "Payments to Acquire Available-for-sale Securities, Debt",
        "negatedLabel": "Payments for purchases of investments"
       }
      }
     },
     "localname": "PaymentsToAcquireAvailableForSaleSecuritiesDebt",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_PaymentsToAcquireBusinessesGross": {
     "auth_ref": [
      "r61",
      "r624"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The cash outflow associated with the acquisition of business during the period. The cash portion only of the acquisition price.",
        "label": "Payments to Acquire Businesses, Gross",
        "verboseLabel": "Payment to acquire business gross"
       }
      }
     },
     "localname": "PaymentsToAcquireBusinessesGross",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSubsequentEventsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_PaymentsToAcquirePropertyPlantAndEquipment": {
     "auth_ref": [
      "r62"
     ],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "order": 1.0,
       "parentTag": "us-gaap_NetCashProvidedByUsedInInvestingActivities",
       "weight": -1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The cash outflow associated with the acquisition of long-lived, physical assets that are used in the normal conduct of business to produce goods and services and not intended for resale; includes cash outflows to pay for construction of self-constructed assets.",
        "label": "Payments to Acquire Property, Plant, and Equipment",
        "negatedLabel": "Capital expenditures"
       }
      }
     },
     "localname": "PaymentsToAcquirePropertyPlantAndEquipment",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_PensionAndOtherPostretirementBenefitsDisclosureTextBlock": {
     "auth_ref": [
      "r516",
      "r517",
      "r523",
      "r524",
      "r525",
      "r526",
      "r527",
      "r528",
      "r529",
      "r530",
      "r531",
      "r532",
      "r535",
      "r836"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The entire disclosure for retirement benefits.",
        "label": "Pension and Other Postretirement Benefits Disclosure [Text Block]",
        "terseLabel": "Retirement Plans"
       }
      }
     },
     "localname": "PensionAndOtherPostretirementBenefitsDisclosureTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureRetirementPlans"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_PlanNameAxis": {
     "auth_ref": [
      "r919",
      "r920",
      "r921",
      "r922",
      "r923",
      "r924",
      "r925",
      "r926",
      "r927",
      "r928",
      "r929",
      "r930",
      "r931",
      "r932",
      "r933",
      "r934",
      "r935",
      "r936",
      "r937",
      "r938",
      "r939",
      "r940",
      "r941",
      "r942",
      "r943",
      "r944"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Information by plan name for share-based payment arrangement.",
        "label": "Plan Name [Axis]"
       }
      }
     },
     "localname": "PlanNameAxis",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockPlans2019PlanDetails",
      "http://www.veeco.com/role/DisclosureStockPlansEsppDetails",
      "http://www.veeco.com/role/DisclosureStockPlansEsppFvAssumptionsDetails",
      "http://www.veeco.com/role/DisclosureStockPlansSharesReservedForFutureIssuanceDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_PlanNameDomain": {
     "auth_ref": [
      "r919",
      "r920",
      "r921",
      "r922",
      "r923",
      "r924",
      "r925",
      "r926",
      "r927",
      "r928",
      "r929",
      "r930",
      "r931",
      "r932",
      "r933",
      "r934",
      "r935",
      "r936",
      "r937",
      "r938",
      "r939",
      "r940",
      "r941",
      "r942",
      "r943",
      "r944"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Plan name for share-based payment arrangement.",
        "label": "Plan Name [Domain]"
       }
      }
     },
     "localname": "PlanNameDomain",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockPlans2019PlanDetails",
      "http://www.veeco.com/role/DisclosureStockPlansEsppDetails",
      "http://www.veeco.com/role/DisclosureStockPlansEsppFvAssumptionsDetails",
      "http://www.veeco.com/role/DisclosureStockPlansSharesReservedForFutureIssuanceDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_PreferredStockParOrStatedValuePerShare": {
     "auth_ref": [
      "r19",
      "r482"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Face amount or stated value per share of preferred stock nonredeemable or redeemable solely at the option of the issuer.",
        "label": "Preferred Stock, Par or Stated Value Per Share",
        "terseLabel": "Preferred stock, par value (in dollars per share)"
       }
      }
     },
     "localname": "PreferredStockParOrStatedValuePerShare",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockholdersEquityPreferredStockDetails",
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheetsParenthetical"
     ],
     "xbrltype": "perShareItemType"
    },
    "us-gaap_PreferredStockSharesAuthorized": {
     "auth_ref": [
      "r19"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The maximum number of nonredeemable preferred shares (or preferred stock redeemable solely at the option of the issuer) permitted to be issued by an entity's charter and bylaws.",
        "label": "Preferred Stock, Shares Authorized",
        "terseLabel": "Preferred stock, shares authorized"
       }
      }
     },
     "localname": "PreferredStockSharesAuthorized",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheetsParenthetical"
     ],
     "xbrltype": "sharesItemType"
    },
    "us-gaap_PreferredStockSharesIssued": {
     "auth_ref": [
      "r19",
      "r482"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Total number of nonredeemable preferred shares (or preferred stock redeemable solely at the option of the issuer) issued to shareholders (includes related preferred shares that were issued, repurchased, and remain in the treasury). May be all or portion of the number of preferred shares authorized. Excludes preferred shares that are classified as debt.",
        "label": "Preferred Stock, Shares Issued",
        "terseLabel": "Preferred stock, shares issued"
       }
      }
     },
     "localname": "PreferredStockSharesIssued",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockholdersEquityPreferredStockDetails",
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheetsParenthetical"
     ],
     "xbrltype": "sharesItemType"
    },
    "us-gaap_PreferredStockSharesOutstanding": {
     "auth_ref": [
      "r19"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Aggregate share number for all nonredeemable preferred stock (or preferred stock redeemable solely at the option of the issuer) held by stockholders. Does not include preferred shares that have been repurchased.",
        "label": "Preferred Stock, Shares Outstanding",
        "terseLabel": "Preferred stock, shares outstanding"
       }
      }
     },
     "localname": "PreferredStockSharesOutstanding",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheetsParenthetical"
     ],
     "xbrltype": "sharesItemType"
    },
    "us-gaap_PreferredStockValue": {
     "auth_ref": [
      "r19",
      "r847"
     ],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheets": {
       "order": 1.0,
       "parentTag": "us-gaap_StockholdersEquity",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Aggregate par or stated value of issued nonredeemable preferred stock (or preferred stock redeemable solely at the option of the issuer). This item includes treasury stock repurchased by the entity. Note: elements for number of nonredeemable preferred shares, par value and other disclosure concepts are in another section within stockholders' equity.",
        "label": "Preferred Stock, Value, Issued",
        "verboseLabel": "Preferred stock, $0.01 par value; 500,000 shares authorized; no shares issued and outstanding."
       }
      }
     },
     "localname": "PreferredStockValue",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_PrepaidExpenseAndOtherAssetsCurrent": {
     "auth_ref": [
      "r865"
     ],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheets": {
       "order": 7.0,
       "parentTag": "us-gaap_AssetsCurrent",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of asset related to consideration paid in advance for costs that provide economic benefits in future periods, and amount of other assets that are expected to be realized or consumed within one year or the normal operating cycle, if longer.",
        "label": "Prepaid Expense and Other Assets, Current",
        "terseLabel": "Prepaid expenses and other current assets"
       }
      }
     },
     "localname": "PrepaidExpenseAndOtherAssetsCurrent",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_ProceedsFromConvertibleDebt": {
     "auth_ref": [
      "r64"
     ],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "order": 1.0,
       "parentTag": "us-gaap_NetCashProvidedByUsedInFinancingActivities",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The cash inflow from the issuance of a long-term debt instrument which can be exchanged for a specified amount of another security, typically the entity's common stock, at the option of the issuer or the holder.",
        "label": "Proceeds from Convertible Debt",
        "terseLabel": "Proceeds, net of issuance costs",
        "verboseLabel": "Proceeds from issuance of 2027 Notes, net of issuance costs"
       }
      }
     },
     "localname": "ProceedsFromConvertibleDebt",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDebt20232025And2027NotesDetails",
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_ProceedsFromIssuanceOfSharesUnderIncentiveAndShareBasedCompensationPlans": {
     "auth_ref": [
      "r63",
      "r169"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of cash inflow from issuance of shares under share-based payment arrangement. Excludes option exercised.",
        "label": "Proceeds from Issuance of Shares under Incentive and Share-based Compensation Plans, Excluding Stock Options",
        "terseLabel": "Cash proceeds"
       }
      }
     },
     "localname": "ProceedsFromIssuanceOfSharesUnderIncentiveAndShareBasedCompensationPlans",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockPlansEsppFvAssumptionsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_ProceedsFromIssuanceOrSaleOfEquity": {
     "auth_ref": [
      "r63"
     ],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "order": 4.0,
       "parentTag": "us-gaap_NetCashProvidedByUsedInFinancingActivities",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The cash inflow from the issuance of common stock, preferred stock, treasury stock, stock options, and other types of equity.",
        "label": "Proceeds from Issuance or Sale of Equity",
        "terseLabel": "Proceeds (net of tax withholdings) from option exercises and employee stock purchase plan"
       }
      }
     },
     "localname": "ProceedsFromIssuanceOrSaleOfEquity",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_ProceedsFromSaleAndMaturityOfAvailableForSaleSecurities": {
     "auth_ref": [
      "r100",
      "r287",
      "r288"
     ],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "order": 2.0,
       "parentTag": "us-gaap_NetCashProvidedByUsedInInvestingActivities",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of cash inflow from sale, maturity, prepayment and call of investment in debt security measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale).",
        "label": "Proceeds from Sale and Maturity of Available-for-sale Securities",
        "terseLabel": "Proceeds from the sale of investments"
       }
      }
     },
     "localname": "ProceedsFromSaleAndMaturityOfAvailableForSaleSecurities",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_ProceedsFromSaleOfPropertyPlantAndEquipment": {
     "auth_ref": [
      "r59"
     ],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "order": 4.0,
       "parentTag": "us-gaap_NetCashProvidedByUsedInInvestingActivities",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The cash inflow from the sale of long-lived, physical assets that are used in the normal conduct of business to produce goods and services and not intended for resale.",
        "label": "Proceeds from Sale of Property, Plant, and Equipment",
        "terseLabel": "Proceeds from held for sale assets, net of costs to sell"
       }
      }
     },
     "localname": "ProceedsFromSaleOfPropertyPlantAndEquipment",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_ProceedsFromStockOptionsExercised": {
     "auth_ref": [
      "r63",
      "r169"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of cash inflow from exercise of option under share-based payment arrangement.",
        "label": "Proceeds from Stock Options Exercised",
        "terseLabel": "Cash received from options exercised"
       }
      }
     },
     "localname": "ProceedsFromStockOptionsExercised",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockPlansStockOptionsExercisedDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_ProductWarrantiesDisclosuresAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Product Warranties Disclosures [Abstract]",
        "terseLabel": "Warranty"
       }
      }
     },
     "localname": "ProductWarrantiesDisclosuresAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesWarrantyDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_ProductWarrantyAccrual": {
     "auth_ref": [
      "r134",
      "r135",
      "r227"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Carrying value as of the balance sheet date of obligations incurred through that date and payable for estimated claims under standard and extended warranty protection rights granted to customers.",
        "label": "Product Warranty Accrual",
        "periodEndLabel": "Balance, end of the period",
        "periodStartLabel": "Balance, beginning of the period"
       }
      }
     },
     "localname": "ProductWarrantyAccrual",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesWarrantyDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_ProductWarrantyAccrualClassifiedCurrent": {
     "auth_ref": [
      "r34",
      "r125",
      "r129"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesComponentsDetails": {
       "order": 2.0,
       "parentTag": "veco_AccruedAndOtherLiabilitiesCurrent",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Carrying value as of the balance sheet date of obligations incurred through that date and payable for estimated claims under standard and extended warranty protection rights granted to customers. For classified balance sheets, represents the current portion of the liabilities (due within one year or within the normal operating cycle if longer).",
        "label": "Product Warranty Accrual, Current",
        "terseLabel": "Warranty"
       }
      }
     },
     "localname": "ProductWarrantyAccrualClassifiedCurrent",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesComponentsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_ProductWarrantyAccrualPayments": {
     "auth_ref": [
      "r130"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of decrease in the standard and extended product warranty accrual from payments made in cash or in kind to satisfy claims under the terms of the standard and extended product warranty.",
        "label": "Product Warranty Accrual, Payments",
        "negatedLabel": "Consumption of reserves"
       }
      }
     },
     "localname": "ProductWarrantyAccrualPayments",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesWarrantyDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_ProductWarrantyAccrualPreexistingIncreaseDecrease": {
     "auth_ref": [
      "r132"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of increase (decrease) in the standard and extended product warranty accrual from changes in estimates attributable to preexisting product warranties.",
        "label": "Product Warranty Accrual, Preexisting, Increase (Decrease)",
        "terseLabel": "Changes in estimate"
       }
      }
     },
     "localname": "ProductWarrantyAccrualPreexistingIncreaseDecrease",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesWarrantyDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_ProductWarrantyAccrualWarrantiesIssued": {
     "auth_ref": [
      "r131"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of increase in the standard and extended product warranty accrual from warranties issued.",
        "label": "Product Warranty Accrual, Warranties Issued",
        "terseLabel": "Warranties issued"
       }
      }
     },
     "localname": "ProductWarrantyAccrualWarrantiesIssued",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesWarrantyDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_ProfitLoss": {
     "auth_ref": [
      "r253",
      "r274",
      "r277",
      "r292",
      "r298",
      "r315",
      "r325",
      "r326",
      "r364",
      "r367",
      "r372",
      "r375",
      "r397",
      "r443",
      "r444",
      "r445",
      "r446",
      "r447",
      "r448",
      "r449",
      "r450",
      "r451",
      "r625",
      "r628",
      "r629",
      "r646",
      "r655",
      "r759",
      "r822",
      "r843",
      "r844",
      "r868",
      "r912"
     ],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "order": 1.0,
       "parentTag": "us-gaap_NetCashProvidedByUsedInOperatingActivities",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The consolidated profit or loss for the period, net of income taxes, including the portion attributable to the noncontrolling interest.",
        "label": "Net Income (Loss), Including Portion Attributable to Noncontrolling Interest",
        "verboseLabel": "Net income"
       }
      }
     },
     "localname": "ProfitLoss",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_PropertyPlantAndEquipmentAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Property, Plant, and Equipment"
       }
      }
     },
     "localname": "PropertyPlantAndEquipmentAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "xbrltype": "stringItemType"
    },
    "us-gaap_PropertyPlantAndEquipmentByTypeAxis": {
     "auth_ref": [
      "r120"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Information by type of long-lived, physical assets used to produce goods and services and not intended for resale.",
        "label": "Property, Plant and Equipment, Type [Axis]"
       }
      }
     },
     "localname": "PropertyPlantAndEquipmentByTypeAxis",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosurePropertyPlantAndEquipmentPropertyAndEquipmentDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_PropertyPlantAndEquipmentDisclosureTextBlock": {
     "auth_ref": [
      "r123",
      "r783",
      "r784",
      "r785"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The entire disclosure for long-lived, physical asset used in normal conduct of business and not intended for resale. Includes, but is not limited to, work of art, historical treasure, and similar asset classified as collections.",
        "label": "Property, Plant and Equipment Disclosure [Text Block]",
        "terseLabel": "Property, Plant, and Equipment"
       }
      }
     },
     "localname": "PropertyPlantAndEquipmentDisclosureTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosurePropertyPlantAndEquipment"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_PropertyPlantAndEquipmentGross": {
     "auth_ref": [
      "r118",
      "r258"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosurePropertyPlantAndEquipmentPropertyAndEquipmentDetails": {
       "order": 2.0,
       "parentTag": "us-gaap_PropertyPlantAndEquipmentNet",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount before accumulated depreciation, depletion and amortization of physical assets used in the normal conduct of business and not intended for resale. Examples include, but are not limited to, land, buildings, machinery and equipment, office equipment, and furniture and fixtures.",
        "label": "Property, Plant and Equipment, Gross",
        "verboseLabel": "Gross property, plant and equipment"
       }
      }
     },
     "localname": "PropertyPlantAndEquipmentGross",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosurePropertyPlantAndEquipmentPropertyAndEquipmentDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_PropertyPlantAndEquipmentLineItems": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.",
        "label": "Property, Plant and Equipment [Line Items]",
        "terseLabel": "Property, plant, and equipment"
       }
      }
     },
     "localname": "PropertyPlantAndEquipmentLineItems",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosurePropertyPlantAndEquipmentPropertyAndEquipmentDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_PropertyPlantAndEquipmentNet": {
     "auth_ref": [
      "r120",
      "r241",
      "r760",
      "r847"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosurePropertyPlantAndEquipmentPropertyAndEquipmentDetails": {
       "order": null,
       "parentTag": null,
       "root": true,
       "weight": null
      },
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheets": {
       "order": 2.0,
       "parentTag": "us-gaap_Assets",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount after accumulated depreciation, depletion and amortization of physical assets used in the normal conduct of business to produce goods and services and not intended for resale. Examples include, but are not limited to, land, buildings, machinery and equipment, office equipment, and furniture and fixtures.",
        "label": "Property, Plant and Equipment, Net",
        "terseLabel": "Property, plant, and equipment, net",
        "totalLabel": "Net property, plant, and equipment",
        "verboseLabel": "Long-lived tangible assets"
       }
      }
     },
     "localname": "PropertyPlantAndEquipmentNet",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosurePropertyPlantAndEquipmentPropertyAndEquipmentDetails",
      "http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformationGeographicDetails",
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_PropertyPlantAndEquipmentTextBlock": {
     "auth_ref": [
      "r120"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of physical assets used in the normal conduct of business and not intended for resale. Includes, but is not limited to, balances by class of assets, depreciation and depletion expense and method used, including composite depreciation, and accumulated deprecation.",
        "label": "Property, Plant and Equipment [Table Text Block]",
        "terseLabel": "Schedule of property, plant, and equipment"
       }
      }
     },
     "localname": "PropertyPlantAndEquipmentTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosurePropertyPlantAndEquipmentTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_PropertyPlantAndEquipmentTypeDomain": {
     "auth_ref": [
      "r118"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Listing of long-lived, physical assets that are used in the normal conduct of business to produce goods and services and not intended for resale. Examples include land, buildings, machinery and equipment, and other types of furniture and equipment including, but not limited to, office equipment, furniture and fixtures, and computer equipment and software.",
        "label": "Property, Plant and Equipment, Type [Domain]"
       }
      }
     },
     "localname": "PropertyPlantAndEquipmentTypeDomain",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosurePropertyPlantAndEquipmentPropertyAndEquipmentDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_PropertyPlantAndEquipmentUsefulLife": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Useful life of long lived, physical assets used in the normal conduct of business and not intended for resale, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days. Examples include, but not limited to, land, buildings, machinery and equipment, office equipment, furniture and fixtures, and computer equipment.",
        "label": "Property, Plant and Equipment, Useful Life",
        "terseLabel": "Average Useful Life"
       }
      }
     },
     "localname": "PropertyPlantAndEquipmentUsefulLife",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosurePropertyPlantAndEquipmentPropertyAndEquipmentDetails"
     ],
     "xbrltype": "durationItemType"
    },
    "us-gaap_ProvisionForDoubtfulAccounts": {
     "auth_ref": [
      "r286",
      "r409"
     ],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "order": 9.0,
       "parentTag": "us-gaap_NetCashProvidedByUsedInOperatingActivities",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of expense (reversal of expense) for expected credit loss on accounts receivable.",
        "label": "Provision for Doubtful Accounts",
        "terseLabel": "Provision for bad debts"
       }
      }
     },
     "localname": "ProvisionForDoubtfulAccounts",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_PurchaseObligationFiscalYearMaturityAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Purchase Obligation, Fiscal Year Maturity [Abstract]",
        "terseLabel": "Purchase Commitments",
        "verboseLabel": "Purchase commitments"
       }
      }
     },
     "localname": "PurchaseObligationFiscalYearMaturityAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesPurchaseCommitmentsAndBankGuaranteesDetails",
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesSuppliersDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_ReconciliationOfUnrecognizedTaxBenefitsExcludingAmountsPertainingToExaminedTaxReturnsRollForward": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "A roll forward is a reconciliation of a concept from the beginning of a period to the end of a period.",
        "label": "Reconciliation of Unrecognized Tax Benefits, Excluding Amounts Pertaining to Examined Tax Returns [Roll Forward]",
        "terseLabel": "Change in unrecognized tax benefits"
       }
      }
     },
     "localname": "ReconciliationOfUnrecognizedTaxBenefitsExcludingAmountsPertainingToExaminedTaxReturnsRollForward",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesUncertainTaxPositionsDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_RepaymentsOfUnsecuredDebt": {
     "auth_ref": [
      "r65"
     ],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "order": 3.0,
       "parentTag": "us-gaap_NetCashProvidedByUsedInFinancingActivities",
       "weight": -1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The cash outflow to repay long-term debt that is not secured by collateral. Excludes repayments of tax exempt unsecured debt.",
        "label": "Repayments of Unsecured Debt",
        "negatedLabel": "Repurchase of 2023 Notes",
        "terseLabel": "Cash paid for repurchase of notes"
       }
      }
     },
     "localname": "RepaymentsOfUnsecuredDebt",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDebt20232025And2027NotesDetails",
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_ResearchAndDevelopmentExpense": {
     "auth_ref": [
      "r172",
      "r246",
      "r977"
     ],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations": {
       "order": 1.0,
       "parentTag": "us-gaap_OperatingExpenses",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The aggregate costs incurred (1) in a planned search or critical investigation aimed at discovery of new knowledge with the hope that such knowledge will be useful in developing a new product or service, a new process or technique, or in bringing about a significant improvement to an existing product or process; or (2) to translate research findings or other knowledge into a plan or design for a new product or process or for a significant improvement to an existing product or process whether intended for sale or the entity's use, during the reporting period charged to research and development projects, including the costs of developing computer software up to the point in time of achieving technological feasibility, and costs allocated in accounting for a business combination to in-process projects deemed to have no alternative future use.",
        "label": "Research and Development Expense.",
        "terseLabel": "Research and development"
       }
      }
     },
     "localname": "ResearchAndDevelopmentExpense",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_ResearchAndDevelopmentExpenseMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Primary financial statement caption in which the reported facts about research and development expense have been included.",
        "label": "Research and development"
       }
      }
     },
     "localname": "ResearchAndDevelopmentExpenseMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockPlansRecognizedShareBasedCompensationDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_ResearchAndDevelopmentExpensePolicy": {
     "auth_ref": [
      "r172"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Disclosure of accounting policy for costs it has incurred (1) in a planned search or critical investigation aimed at discovery of new knowledge with the hope that such knowledge will be useful in developing a new product or service, a new process or technique, or in bringing about a significant improvement to an existing product or process; or (2) to translate research findings or other knowledge into a plan or design for a new product or process or for a significant improvement to an existing product or process.",
        "label": "Research and Development Expense, Policy [Policy Text Block]",
        "terseLabel": "Research and Development Costs"
       }
      }
     },
     "localname": "ResearchAndDevelopmentExpensePolicy",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesPolicies"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_ResearchMember": {
     "auth_ref": [
      "r181"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Research tax credit carryforwards arising from certain qualifying expenditures incurred to develop new products and processes.",
        "label": "Research and development tax credit carryforward"
       }
      }
     },
     "localname": "ResearchMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesTaxCreditCarryforwardsDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue": {
     "auth_ref": [
      "r72",
      "r77",
      "r257"
     ],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheets": {
       "order": 3.0,
       "parentTag": "us-gaap_AssetsCurrent",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of cash and cash equivalents restricted as to withdrawal or usage, classified as current. Cash includes, but is not limited to, currency on hand, demand deposits with banks or financial institutions, and other accounts with general characteristics of demand deposits. Cash equivalents include, but are not limited to, short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates.",
        "label": "Restricted Cash and Cash Equivalents, Current",
        "terseLabel": "Restricted cash"
       }
      }
     },
     "localname": "RestrictedCashAndCashEquivalentsAtCarryingValue",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_RestrictedCashAndCashEquivalentsCashAndCashEquivalentsMember": {
     "auth_ref": [
      "r257"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Type of cash and cash equivalent. Cash is currency on hand as well as demand deposits with banks or financial institutions. Includes other kinds of accounts that have the general characteristics of demand deposits. Also includes short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates.",
        "label": "Cash and Cash Equivalents [Domain]"
       }
      }
     },
     "localname": "RestrictedCashAndCashEquivalentsCashAndCashEquivalentsMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureFairValueMeasurementsDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_RestrictedStockUnitsRSUMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Share instrument which is convertible to stock or an equivalent amount of cash, after a specified period of time or when specified performance conditions are met.",
        "label": "Restricted stock units"
       }
      }
     },
     "localname": "RestrictedStockUnitsRSUMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureShareBasedCompensationRestrictedSharesAndPerformanceSharesDetails",
      "http://www.veeco.com/role/DisclosureStockPlans2019PlanDetails",
      "http://www.veeco.com/role/DisclosureStockPlansUnrecognizedShareBasedCompensationCostsDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_RestructuringCharges": {
     "auth_ref": [
      "r70",
      "r434",
      "r435",
      "r906"
     ],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations": {
       "order": 4.0,
       "parentTag": "us-gaap_OperatingExpenses",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of expenses associated with exit or disposal activities pursuant to an authorized plan. Excludes expenses related to a discontinued operation or an asset retirement obligation.",
        "label": "Restructuring Charges.",
        "terseLabel": "Restructuring"
       }
      }
     },
     "localname": "RestructuringCharges",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_RetainedEarningsAccumulatedDeficit": {
     "auth_ref": [
      "r22",
      "r150",
      "r239",
      "r772",
      "r777",
      "r847"
     ],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheets": {
       "order": 4.0,
       "parentTag": "us-gaap_StockholdersEquity",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The cumulative amount of the reporting entity's undistributed earnings or deficit.",
        "label": "Retained Earnings (Accumulated Deficit).",
        "terseLabel": "Accumulated deficit",
        "verboseLabel": "Accumulated deficit"
       }
      }
     },
     "localname": "RetainedEarningsAccumulatedDeficit",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesRecentlyAdoptedAccountingStandardsDetails",
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_RetainedEarningsMember": {
     "auth_ref": [
      "r249",
      "r310",
      "r311",
      "r312",
      "r316",
      "r324",
      "r326",
      "r404",
      "r574",
      "r575",
      "r576",
      "r608",
      "r609",
      "r644",
      "r768",
      "r770"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The cumulative amount of the reporting entity's undistributed earnings or deficit.",
        "label": "Accumulated Deficit"
       }
      }
     },
     "localname": "RetainedEarningsMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfStockholdersEquity"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_RevenueFromContractWithCustomerIncludingAssessedTax": {
     "auth_ref": [
      "r358",
      "r359",
      "r366",
      "r370",
      "r371",
      "r377",
      "r378",
      "r381",
      "r511",
      "r512",
      "r749"
     ],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations": {
       "order": 1.0,
       "parentTag": "us-gaap_GrossProfit",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount, including tax collected from customer, of revenue from satisfaction of performance obligation by transferring promised good or service to customer. Tax collected from customer is tax assessed by governmental authority that is both imposed on and concurrent with specific revenue-producing transaction, including, but not limited to, sales, use, value-added and excise.",
        "label": "Revenue from Contract with Customer, Including Assessed Tax",
        "terseLabel": "Net sales"
       }
      }
     },
     "localname": "RevenueFromContractWithCustomerIncludingAssessedTax",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformationGeographicDetails",
      "http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformationSegmentDetails",
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_RevenueFromContractWithCustomerPolicyTextBlock": {
     "auth_ref": [
      "r502",
      "r503",
      "r504",
      "r505",
      "r506",
      "r507",
      "r508",
      "r509",
      "r515",
      "r818"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Disclosure of accounting policy for revenue from contract with customer.",
        "label": "Revenue from Contract with Customer [Policy Text Block]",
        "terseLabel": "Revenue Recognition"
       }
      }
     },
     "localname": "RevenueFromContractWithCustomerPolicyTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesPolicies"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_RevenuePracticalExpedientIncrementalCostOfObtainingContract": {
     "auth_ref": [
      "r422",
      "r510"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Indicates (true false) whether practical expedient was elected to recognize incremental cost of obtaining contract as expense when incurred if amortization period would have been one year or less.",
        "label": "Revenue, Practical Expedient, Incremental Cost of Obtaining Contract [true false]",
        "terseLabel": "Revenue, practical expedient, incremental cost of obtaining contract"
       }
      }
     },
     "localname": "RevenuePracticalExpedientIncrementalCostOfObtainingContract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesRevenueRecognitionDetails"
     ],
     "xbrltype": "booleanItemType"
    },
    "us-gaap_RevenuePracticalExpedientRemainingPerformanceObligation": {
     "auth_ref": [
      "r501"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Indicates (true false) whether optional exemption was applied not to disclose amount of transaction price allocated to and explanation of expected timing of revenue recognition for remaining performance obligation, when contract has expected duration of one year or less or right to consideration corresponds directly to performance completed.",
        "label": "Revenue, Practical Expedient, Remaining Performance Obligation [true/false]",
        "terseLabel": "Revenue, Practical Expedient, Remaining Performance Obligation"
       }
      }
     },
     "localname": "RevenuePracticalExpedientRemainingPerformanceObligation",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesPerformanceObligationTimingDetails"
     ],
     "xbrltype": "booleanItemType"
    },
    "us-gaap_RevenueRemainingPerformanceObligation": {
     "auth_ref": [
      "r499"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of transaction price allocated to performance obligation that has not been recognized as revenue.",
        "label": "Revenue, Remaining Performance Obligation",
        "terseLabel": "Remaining performance obligations"
       }
      }
     },
     "localname": "RevenueRemainingPerformanceObligation",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesPerformanceObligationAmountDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionLineItems": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.",
        "label": "Revenue, Remaining Performance Obligation, Expected Timing of Satisfaction",
        "terseLabel": "Performance obligations"
       }
      }
     },
     "localname": "RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionLineItems",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesPerformanceObligationAmountDetails",
      "http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesPerformanceObligationTimingDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionPeriod1": {
     "auth_ref": [
      "r500"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Period in which remaining performance obligation is expected to be recognized as revenue, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days.",
        "label": "Revenue, Remaining Performance Obligation, Expected Timing of Satisfaction, Period",
        "terseLabel": "Remaining performance obligations, expected timing of satisfaction"
       }
      }
     },
     "localname": "RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionPeriod1",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesPerformanceObligationTimingDetails"
     ],
     "xbrltype": "durationItemType"
    },
    "us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionStartDateAxis": {
     "auth_ref": [
      "r500"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Start date of time band for expected timing of satisfaction of remaining performance obligation, in YYYY-MM-DD format.",
        "label": "Revenue, Remaining Performance Obligation, Expected Timing of Satisfaction, Start Date [Axis]"
       }
      }
     },
     "localname": "RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionStartDateAxis",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesPerformanceObligationAmountDetails",
      "http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesPerformanceObligationTimingDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionTable": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Disclosure of information about expected timing for satisfying remaining performance obligation.",
        "label": "Revenue, Remaining Performance Obligation, Expected Timing of Satisfaction [Table]"
       }
      }
     },
     "localname": "RevenueRemainingPerformanceObligationExpectedTimingOfSatisfactionTable",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesPerformanceObligationAmountDetails",
      "http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesPerformanceObligationTimingDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability": {
     "auth_ref": [
      "r702",
      "r846"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of increase in right-of-use asset obtained in exchange for operating lease liability.",
        "label": "Right-of-Use Asset Obtained in Exchange for Operating Lease Liability",
        "terseLabel": "Right-of-use assets obtained in exchange for lease obligations"
       }
      }
     },
     "localname": "RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_SalesMember": {
     "auth_ref": [
      "r204"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Primary financial statement caption encompassing revenue from sale of goods and services rendered in the normal course of business.",
        "label": "Net Sales"
       }
      }
     },
     "localname": "SalesMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesConcentrationOfCreditRiskDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_ScheduleOfAccruedLiabilitiesTableTextBlock": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of the components of accrued liabilities.",
        "label": "Schedule of Accrued Liabilities [Table Text Block]",
        "terseLabel": "Schedule of accrued expenses and other current liabilities"
       }
      }
     },
     "localname": "ScheduleOfAccruedLiabilitiesTableTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock": {
     "auth_ref": [
      "r47",
      "r964",
      "r965"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of the components of accumulated other comprehensive income (loss).",
        "label": "Schedule of Accumulated Other Comprehensive Income (Loss) [Table Text Block]",
        "terseLabel": "Schedule of the changes in the balances of each component of AOCI, net of tax"
       }
      }
     },
     "localname": "ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockholdersEquityTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_ScheduleOfAntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareTable": {
     "auth_ref": [
      "r82"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Schedule for securities (including those issuable pursuant to contingent stock agreements) that could potentially dilute basic earnings per share (EPS) in the future that were not included in the computation of diluted EPS because to do so would increase EPS amounts or decrease loss per share amounts for the period presented, by Antidilutive Securities.",
        "label": "Schedule of Antidilutive Securities Excluded from Computation of Earnings Per Share [Table]"
       }
      }
     },
     "localname": "ScheduleOfAntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareTable",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomePerCommonShareSharesExcludedFromEpsDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_ScheduleOfAvailableForSaleSecuritiesLineItems": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.",
        "label": "Schedule of Available-for-sale Securities [Line Items]",
        "terseLabel": "Total available-for-sale securities"
       }
      }
     },
     "localname": "ScheduleOfAvailableForSaleSecuritiesLineItems",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureInvestmentsAvailableForSaleSecuritiesDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_ScheduleOfAvailableForSaleSecuritiesReconciliationTableTextBlock": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of the reconciliation of available-for-sale securities from cost basis to fair value.",
        "label": "Schedule of Available-for-sale Securities Reconciliation [Table Text Block]",
        "terseLabel": "Schedule of amortized cost and fair value of available-for-sale securities"
       }
      }
     },
     "localname": "ScheduleOfAvailableForSaleSecuritiesReconciliationTableTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureInvestmentsTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock": {
     "auth_ref": [
      "r183"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of the components of income tax expense attributable to continuing operations for each year presented including, but not limited to: current tax expense (benefit), deferred tax expense (benefit), investment tax credits, government grants, the benefits of operating loss carryforwards, tax expense that results from allocating certain tax benefits either directly to contributed capital or to reduce goodwill or other noncurrent intangible assets of an acquired entity, adjustments of a deferred tax liability or asset for enacted changes in tax laws or rates or a change in the tax status of the entity, and adjustments of the beginning-of-the-year balances of a valuation allowance because of a change in circumstances that causes a change in judgment about the realizability of the related deferred tax asset in future years.",
        "label": "Schedule of Components of Income Tax Expense (Benefit) [Table Text Block]",
        "terseLabel": "Schedule of components of the expense (benefit) for income taxes"
       }
      }
     },
     "localname": "ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock": {
     "auth_ref": [
      "r179"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of the components of net deferred tax asset or liability recognized in an entity's statement of financial position, including the following: the total of all deferred tax liabilities, the total of all deferred tax assets, the total valuation allowance recognized for deferred tax assets.",
        "label": "Schedule of Deferred Tax Assets and Liabilities [Table Text Block]",
        "terseLabel": "Schedule of deferred tax assets and liabilities"
       }
      }
     },
     "localname": "ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock": {
     "auth_ref": [
      "r885"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of an entity's basic and diluted earnings per share calculations, including a reconciliation of numerators and denominators of the basic and diluted per-share computations for income from continuing operations.",
        "label": "Schedule of Earnings Per Share, Basic and Diluted [Table Text Block]",
        "terseLabel": "Schedule of computations of basic and diluted income per share"
       }
      }
     },
     "localname": "ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomePerCommonShareTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_ScheduleOfEffectiveIncomeTaxRateReconciliationTableTextBlock": {
     "auth_ref": [
      "r174"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of the reconciliation using percentage or dollar amounts of the reported amount of income tax expense attributable to continuing operations for the year to the amount of income tax expense that would result from applying domestic federal statutory tax rates to pretax income from continuing operations.",
        "label": "Schedule of Effective Income Tax Rate Reconciliation [Table Text Block]",
        "terseLabel": "Schedule of reconciliation of the income tax expense computed using the Federal statutory rate to actual income tax provision"
       }
      }
     },
     "localname": "ScheduleOfEffectiveIncomeTaxRateReconciliationTableTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_ScheduleOfEmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsTextBlock": {
     "auth_ref": [
      "r166"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of allocation of amount expensed and capitalized for award under share-based payment arrangement to statement of income or comprehensive income and statement of financial position. Includes, but is not limited to, corresponding line item in financial statement.",
        "label": "Schedule of Employee Service Share-based Compensation, Allocation of Recognized Period Costs [Table Text Block]",
        "terseLabel": "Schedule of share-based compensation expense"
       }
      }
     },
     "localname": "ScheduleOfEmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockPlansTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_ScheduleOfEntityWideInformationRevenueFromExternalCustomersByProductsAndServicesTextBlock": {
     "auth_ref": [
      "r97"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of entity-wide revenues from external customers for each product or service or each group of similar products or services if the information is not provided as part of the reportable operating segment information.",
        "label": "Revenue from External Customers by Products and Services [Table Text Block]",
        "verboseLabel": "Schedule of sales by end-market"
       }
      }
     },
     "localname": "ScheduleOfEntityWideInformationRevenueFromExternalCustomersByProductsAndServicesTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformationTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_ScheduleOfGoodwillTextBlock": {
     "auth_ref": [
      "r824",
      "r893",
      "r894",
      "r895",
      "r896",
      "r897",
      "r898",
      "r899",
      "r900",
      "r901",
      "r902",
      "r903"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of goodwill by reportable segment and in total which includes a rollforward schedule.",
        "label": "Schedule of Goodwill [Table Text Block]",
        "terseLabel": "Schedule of changes in goodwill"
       }
      }
     },
     "localname": "ScheduleOfGoodwillTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssetsTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_ScheduleOfIncomeBeforeIncomeTaxDomesticAndForeignTableTextBlock": {
     "auth_ref": [
      "r873"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of income before income tax between domestic and foreign jurisdictions.",
        "label": "Schedule of Income before Income Tax, Domestic and Foreign [Table Text Block]",
        "terseLabel": "Schedule of income (loss) from continuing operations before income taxes"
       }
      }
     },
     "localname": "ScheduleOfIncomeBeforeIncomeTaxDomesticAndForeignTableTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_ScheduleOfInventoryCurrentTableTextBlock": {
     "auth_ref": [
      "r12",
      "r26",
      "r27",
      "r28"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of the carrying amount as of the balance sheet date of merchandise, goods, commodities, or supplies held for future sale or to be used in manufacturing, servicing or production process.",
        "label": "Schedule of Inventory, Current [Table Text Block]",
        "terseLabel": "Schedule of inventories"
       }
      }
     },
     "localname": "ScheduleOfInventoryCurrentTableTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureInventoriesTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_ScheduleOfNewAccountingPronouncementsAndChangesInAccountingPrinciplesTextBlock": {
     "auth_ref": [
      "r79",
      "r80",
      "r83",
      "r84"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of changes in accounting principles, including adoption of new accounting pronouncements, that describes the new methods, amount and effects on financial statement line items.",
        "label": "Accounting Standards Update and Change in Accounting Principle [Table Text Block]",
        "terseLabel": "Schedule of adjustments to Consolidated Balance Sheets and adjustments to calculations of basic and diluted income per share"
       }
      }
     },
     "localname": "ScheduleOfNewAccountingPronouncementsAndChangesInAccountingPrinciplesTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock": {
     "auth_ref": [
      "r136"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of the changes in the guarantor's aggregate product warranty liability, including the beginning balance of the aggregate product warranty liability, the aggregate reductions in that liability for payments made (in cash or in kind) under the warranty, the aggregate changes in the liability for accruals related to product warranties issued during the reporting period, the aggregate changes in the liability for accruals related to preexisting warranties (including adjustments related to changes in estimates), and the ending balance of the aggregate product warranty liability.",
        "label": "Schedule of Product Warranty Liability [Table Text Block]",
        "terseLabel": "Schedule of changes in product warranty reserves"
       }
      }
     },
     "localname": "ScheduleOfProductWarrantyLiabilityTableTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_ScheduleOfPropertyPlantAndEquipmentTable": {
     "auth_ref": [
      "r120"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Disclosure of information about physical assets used in the normal conduct of business and not intended for resale. Includes, but is not limited to, balances by class of assets, depreciation and depletion expense and method used, including composite depreciation, and accumulated deprecation.",
        "label": "Property, Plant and Equipment [Table]"
       }
      }
     },
     "localname": "ScheduleOfPropertyPlantAndEquipmentTable",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosurePropertyPlantAndEquipmentPropertyAndEquipmentDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_ScheduleOfRevenueByMajorCustomersByReportingSegmentsTableTextBlock": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of the extent of the entity's reliance on its major customers, if revenues from transactions with a single external customer amount to 10 percent or more of entity revenues, including the disclosure of that fact, the total amount of revenues from each such customer, and the identity of the reportable segment or segments reporting the revenues. The entity need not disclose the identity of a major customer or the amount of revenues that each segment reports from that customer. For these purposes, a group of companies known to the entity to be under common control is considered a single customer, and the federal government, a state government, a local government such as a county or municipality, or a foreign government is each considered a single customer.",
        "label": "Schedule of Revenue by Major Customers by Reporting Segments [Table Text Block]",
        "terseLabel": "Schedule of customers who accounted for more than 10% of our aggregate accounts receivable or net sales"
       }
      }
     },
     "localname": "ScheduleOfRevenueByMajorCustomersByReportingSegmentsTableTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsByGeographicalAreasTableTextBlock": {
     "auth_ref": [
      "r51",
      "r98"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of information concerning material long-lived assets (excluding financial instruments, customer relationships with financial institutions, mortgage and other servicing rights, deferred policy acquisition costs, and deferred taxes assets) located in identified geographic areas and/or the amount of revenue from external customers attributed to that country from which revenue is material. An entity may also provide subtotals of geographic information about groups of countries.",
        "label": "Schedule of Revenue from External Customers and Long-Lived Assets, by Geographical Areas [Table Text Block]",
        "terseLabel": "Schedule of sales by geographic region"
       }
      }
     },
     "localname": "ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsByGeographicalAreasTableTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformationTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable": {
     "auth_ref": [
      "r94",
      "r95",
      "r96",
      "r106"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "A table disclosing the profit or loss and total assets for each reportable segment of the entity. An entity discloses certain information on each reportable segment if the amounts (a) are included in the measure of segment profit or loss reviewed by the chief operating decision maker or (b) are otherwise regularly provided to the chief operating decision maker, even if not included in that measure of segment profit or loss.",
        "label": "Schedule of Segment Reporting Information, by Segment [Table]"
       }
      }
     },
     "localname": "ScheduleOfSegmentReportingInformationBySegmentTable",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformationGeographicDetails",
      "http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformationSegmentDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable": {
     "auth_ref": [
      "r536",
      "r538",
      "r540",
      "r541",
      "r542",
      "r544",
      "r545",
      "r546",
      "r547",
      "r548",
      "r549",
      "r550",
      "r551",
      "r552",
      "r553",
      "r554",
      "r555",
      "r556",
      "r557",
      "r558",
      "r559",
      "r560",
      "r561",
      "r564",
      "r565",
      "r566",
      "r567",
      "r568"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Disclosure of information about share-based payment arrangement.",
        "label": "Schedule of Share-based Compensation Arrangements by Share-based Payment Award [Table]"
       }
      }
     },
     "localname": "ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureShareBasedCompensationRestrictedSharesAndPerformanceSharesDetails",
      "http://www.veeco.com/role/DisclosureStockPlans2019PlanDetails",
      "http://www.veeco.com/role/DisclosureStockPlansEsppDetails",
      "http://www.veeco.com/role/DisclosureStockPlansEsppFvAssumptionsDetails",
      "http://www.veeco.com/role/DisclosureStockPlansPerformanceAwardsAssumptionsDetails",
      "http://www.veeco.com/role/DisclosureStockPlansRecognizedShareBasedCompensationDetails",
      "http://www.veeco.com/role/DisclosureStockPlansSharesReservedForFutureIssuanceDetails",
      "http://www.veeco.com/role/DisclosureStockPlansUnrecognizedShareBasedCompensationCostsDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_ScheduleOfShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeTable": {
     "auth_ref": [
      "r168"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Details comprising a table providing supplementary information on outstanding and exercisable share awards as of the balance sheet date which stratifies outstanding options by ranges of exercise prices.",
        "label": "Schedule of Share-based Compensation, Shares Authorized under Stock Option Plans, by Exercise Price Range [Table]"
       }
      }
     },
     "localname": "ScheduleOfShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeTable",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockPlansOptionExerciseRangesDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_ScheduleOfShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeTextBlock": {
     "auth_ref": [
      "r168"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of option exercise prices, by grouped ranges, including the upper and lower limits of the price range, the number of shares under option, weighted average exercise price and remaining contractual option terms.",
        "label": "Schedule of Share-based Compensation, Shares Authorized under Stock Option Plans, by Exercise Price Range [Table Text Block]",
        "terseLabel": "Summary of information about stock option information"
       }
      }
     },
     "localname": "ScheduleOfShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockPlansTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock": {
     "auth_ref": [
      "r152",
      "r158",
      "r160"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure for stock option plans. Includes, but is not limited to, outstanding awards at beginning and end of year, grants, exercises, forfeitures, and weighted-average grant date fair value.",
        "label": "Schedule of Share-based Compensation, Stock Options, Activity [Table Text Block]",
        "terseLabel": "Summary of stock option activity"
       }
      }
     },
     "localname": "ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockPlansTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_ScheduleOfShareBasedPaymentAwardEmployeeStockPurchasePlanValuationAssumptionsTableTextBlock": {
     "auth_ref": [
      "r164"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of the significant assumptions used during the year to estimate the fair value of employee stock purchase plans, including, but not limited to: (a) expected term, (b) expected volatility of the entity's shares, (c) expected dividends, (d) risk-free rate(s), and (e) discount for post-vesting restrictions.",
        "label": "Schedule of Share-based Payment Award, Employee Stock Purchase Plan, Valuation Assumptions [Table Text Block]",
        "terseLabel": "Summary of valuation assumptions for employee stock purchase plan"
       }
      }
     },
     "localname": "ScheduleOfShareBasedPaymentAwardEmployeeStockPurchasePlanValuationAssumptionsTableTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockPlansTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Disclosure of the number and weighted-average grant date fair value for restricted stock and restricted stock units that were outstanding at the beginning and end of the year, and the number of restricted stock and restricted stock units that were granted, vested, or forfeited during the year.",
        "label": "Schedule of Share-based Compensation, Restricted Stock and Restricted Stock Units Activity [Table Text Block]",
        "terseLabel": "Summary of non-vested restricted and performance shares activity"
       }
      }
     },
     "localname": "ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockPlansTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_ScheduleOfUnrecognizedCompensationCostNonvestedAwardsTableTextBlock": {
     "auth_ref": [
      "r167"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of cost not yet recognized and weighted-average period over which cost is expected to be recognized for nonvested award under share-based payment arrangement.",
        "label": "Schedule of Unrecognized Compensation Cost, Nonvested Awards [Table Text Block]",
        "terseLabel": "Summary of unrecognized share-based compensation costs"
       }
      }
     },
     "localname": "ScheduleOfUnrecognizedCompensationCostNonvestedAwardsTableTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockPlansTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_ScheduleofFiniteLivedIntangibleAssetsFutureAmortizationExpenseTableTextBlock": {
     "auth_ref": [
      "r109"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of the amount of amortization expense expected to be recorded in succeeding fiscal years for finite-lived intangible assets.",
        "label": "Schedule of Finite-Lived Intangible Assets, Future Amortization Expense [Table Text Block]",
        "terseLabel": "Schedule of estimated annual amortization expense, excluding in-process R&amp;D for intangible assets with definite useful lives"
       }
      }
     },
     "localname": "ScheduleofFiniteLivedIntangibleAssetsFutureAmortizationExpenseTableTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssetsTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_SecuredOvernightFinancingRateSofrOvernightIndexSwapRateMember": {
     "auth_ref": [
      "r957"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Fixed rate on U.S. dollar, constant-notional interest rate swap that has its variable-rate leg referenced to Secured Overnight Financing Rate (SOFR) with no additional spread over SOFR on variable-rate leg.",
        "label": "SOFR"
       }
      }
     },
     "localname": "SecuredOvernightFinancingRateSofrOvernightIndexSwapRateMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDebtRevolvingCreditFacilityDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_SegmentReportingAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Segment Reporting and Geographic Information"
       }
      }
     },
     "localname": "SegmentReportingAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "xbrltype": "stringItemType"
    },
    "us-gaap_SegmentReportingDisclosureTextBlock": {
     "auth_ref": [
      "r355",
      "r356",
      "r357",
      "r364",
      "r365",
      "r369",
      "r373",
      "r374",
      "r375",
      "r376",
      "r377",
      "r380",
      "r381",
      "r382"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The entire disclosure for reporting segments including data and tables. Reportable segments include those that meet any of the following quantitative thresholds a) it's reported revenue, including sales to external customers and intersegment sales or transfers is 10 percent or more of the combined revenue, internal and external, of all operating segments b) the absolute amount of its reported profit or loss is 10 percent or more of the greater, in absolute amount of 1) the combined reported profit of all operating segments that did not report a loss or 2) the combined reported loss of all operating segments that did report a loss c) its assets are 10 percent or more of the combined assets of all operating segments.",
        "label": "Segment Reporting Disclosure [Text Block]",
        "terseLabel": "Segment Reporting and Geographic Information"
       }
      }
     },
     "localname": "SegmentReportingDisclosureTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformation"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_SegmentReportingInformationLineItems": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.",
        "label": "Segment Reporting Information [Line Items]",
        "verboseLabel": "Revenue reporting by end-market and geographic region"
       }
      }
     },
     "localname": "SegmentReportingInformationLineItems",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformationGeographicDetails",
      "http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformationSegmentDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_SellingGeneralAndAdministrativeExpense": {
     "auth_ref": [
      "r54"
     ],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations": {
       "order": 2.0,
       "parentTag": "us-gaap_OperatingExpenses",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The aggregate total costs related to selling a firm's product and services, as well as all other general and administrative expenses. Direct selling expenses (for example, credit, warranty, and advertising) are expenses that can be directly linked to the sale of specific products. Indirect selling expenses are expenses that cannot be directly linked to the sale of specific products, for example telephone expenses, Internet, and postal charges. General and administrative expenses include salaries of non-sales personnel, rent, utilities, communication, etc.",
        "label": "Selling, General and Administrative Expense",
        "terseLabel": "Selling, general, and administrative"
       }
      }
     },
     "localname": "SellingGeneralAndAdministrativeExpense",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_SellingGeneralAndAdministrativeExpensesMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Primary financial statement caption encompassing selling, general and administrative expense.",
        "label": "Selling, general and administrative"
       }
      }
     },
     "localname": "SellingGeneralAndAdministrativeExpensesMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockPlansRecognizedShareBasedCompensationDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_ShareBasedCompensation": {
     "auth_ref": [
      "r69"
     ],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "order": 5.0,
       "parentTag": "us-gaap_NetCashProvidedByUsedInOperatingActivities",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of noncash expense for share-based payment arrangement.",
        "label": "Share based Compensation",
        "terseLabel": "Share-based compensation expense"
       }
      }
     },
     "localname": "ShareBasedCompensation",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1": {
     "auth_ref": [
      "r840"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Period over which grantee's right to exercise award under share-based payment arrangement is no longer contingent on satisfaction of service or performance condition, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days. Includes, but is not limited to, combination of market, performance or service condition.",
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Award Vesting Period",
        "terseLabel": "Vesting period"
       }
      }
     },
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureShareBasedCompensationRestrictedSharesAndPerformanceSharesDetails",
      "http://www.veeco.com/role/DisclosureStockPlans2019PlanDetails"
     ],
     "xbrltype": "durationItemType"
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsAdditionalDisclosuresAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Additional Disclosures [Abstract]",
        "terseLabel": "Weighted Average Grant Date Fair Value"
       }
      }
     },
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsAdditionalDisclosuresAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureShareBasedCompensationRestrictedSharesAndPerformanceSharesDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeitedInPeriod": {
     "auth_ref": [
      "r557"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The number of equity-based payment instruments, excluding stock (or unit) options, that were forfeited during the reporting period.",
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Forfeited in Period",
        "negatedLabel": "Forfeited (in shares)"
       }
      }
     },
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeitedInPeriod",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureShareBasedCompensationRestrictedSharesAndPerformanceSharesDetails"
     ],
     "xbrltype": "sharesItemType"
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue": {
     "auth_ref": [
      "r557"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Weighted average fair value as of the grant date of equity-based award plans other than stock (unit) option plans that were not exercised or put into effect as a result of the occurrence of a terminating event.",
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Forfeitures, Weighted Average Grant Date Fair Value",
        "terseLabel": "Forfeited (in dollars per share)"
       }
      }
     },
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureShareBasedCompensationRestrictedSharesAndPerformanceSharesDetails"
     ],
     "xbrltype": "perShareItemType"
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod": {
     "auth_ref": [
      "r555"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The number of grants made during the period on other than stock (or unit) option plans (for example, phantom stock or unit plan, stock or unit appreciation rights plan, performance target plan).",
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Grants in Period",
        "terseLabel": "Granted (in shares)",
        "verboseLabel": "Awards granted (in shares)"
       }
      }
     },
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureShareBasedCompensationRestrictedSharesAndPerformanceSharesDetails",
      "http://www.veeco.com/role/DisclosureStockPlans2019PlanDetails"
     ],
     "xbrltype": "sharesItemType"
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue": {
     "auth_ref": [
      "r555"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The weighted average fair value at grant date for nonvested equity-based awards issued during the period on other than stock (or unit) option plans (for example, phantom stock or unit plan, stock or unit appreciation rights plan, performance target plan).",
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Grants in Period, Weighted Average Grant Date Fair Value",
        "terseLabel": "Granted (in dollars per share)",
        "verboseLabel": "Weighted average fair value (in dollars per share)"
       }
      }
     },
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureShareBasedCompensationRestrictedSharesAndPerformanceSharesDetails",
      "http://www.veeco.com/role/DisclosureStockPlansEsppFvAssumptionsDetails",
      "http://www.veeco.com/role/DisclosureStockPlansPerformanceAwardsAssumptionsDetails"
     ],
     "xbrltype": "perShareItemType"
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber": {
     "auth_ref": [
      "r552",
      "r553"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The number of non-vested equity-based payment instruments, excluding stock (or unit) options, that validly exist and are outstanding as of the balance sheet date.",
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Nonvested, Number",
        "periodEndLabel": "Outstanding at the end of the period (in shares)",
        "periodStartLabel": "Outstanding at the beginning of the period (in shares)"
       }
      }
     },
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureShareBasedCompensationRestrictedSharesAndPerformanceSharesDetails"
     ],
     "xbrltype": "sharesItemType"
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "A roll forward is a reconciliation of a concept from the beginning of a period to the end of a period.",
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Nonvested, Number of Shares [Roll Forward]",
        "terseLabel": "Number of Shares"
       }
      }
     },
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureShareBasedCompensationRestrictedSharesAndPerformanceSharesDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue": {
     "auth_ref": [
      "r552",
      "r553"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Per share or unit weighted-average fair value of nonvested award under share-based payment arrangement. Excludes share and unit options.",
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Nonvested, Weighted Average Grant Date Fair Value",
        "periodEndLabel": "Outstanding at the end of the period (in dollars per share)",
        "periodStartLabel": "Outstanding at the beginning of the period (in dollars per share)"
       }
      }
     },
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureShareBasedCompensationRestrictedSharesAndPerformanceSharesDetails"
     ],
     "xbrltype": "perShareItemType"
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod": {
     "auth_ref": [
      "r556"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The number of equity-based payment instruments, excluding stock (or unit) options, that vested during the reporting period.",
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Vested in Period",
        "negatedLabel": "Vested (in shares)"
       }
      }
     },
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureShareBasedCompensationRestrictedSharesAndPerformanceSharesDetails"
     ],
     "xbrltype": "sharesItemType"
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodTotalFairValue": {
     "auth_ref": [
      "r559"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Fair value of share-based awards for which the grantee gained the right by satisfying service and performance requirements, to receive or retain shares or units, other instruments, or cash.",
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Vested in Period, Fair Value",
        "terseLabel": "Total fair value of shares vested"
       }
      }
     },
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodTotalFairValue",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureShareBasedCompensationRestrictedSharesAndPerformanceSharesDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue": {
     "auth_ref": [
      "r556"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The weighted average fair value as of grant date pertaining to an equity-based award plan other than a stock (or unit) option plan for which the grantee gained the right during the reporting period, by satisfying service and performance requirements, to receive or retain shares or units, other instruments, or cash in accordance with the terms of the arrangement.",
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Vested in Period, Weighted Average Grant Date Fair Value",
        "terseLabel": "Vested (in dollars per share)"
       }
      }
     },
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureShareBasedCompensationRestrictedSharesAndPerformanceSharesDetails"
     ],
     "xbrltype": "perShareItemType"
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Fair Value Assumptions and Methodology [Abstract]",
        "terseLabel": "Assumptions"
       }
      }
     },
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockPlansEsppFvAssumptionsDetails",
      "http://www.veeco.com/role/DisclosureStockPlansPerformanceAwardsAssumptionsDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate": {
     "auth_ref": [
      "r566"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The estimated dividend rate (a percentage of the share price) to be paid (expected dividends) to holders of the underlying shares over the option's term.",
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Fair Value Assumptions, Expected Dividend Rate",
        "terseLabel": "Dividend yield (as a percent)"
       }
      }
     },
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockPlansEsppFvAssumptionsDetails",
      "http://www.veeco.com/role/DisclosureStockPlansPerformanceAwardsAssumptionsDetails"
     ],
     "xbrltype": "percentItemType"
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate": {
     "auth_ref": [
      "r567"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The risk-free interest rate assumption that is used in valuing an option on its own shares.",
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Fair Value Assumptions, Risk Free Interest Rate",
        "terseLabel": "Risk-free interest rate (as a percent)"
       }
      }
     },
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockPlansEsppFvAssumptionsDetails",
      "http://www.veeco.com/role/DisclosureStockPlansPerformanceAwardsAssumptionsDetails"
     ],
     "xbrltype": "percentItemType"
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsWeightedAverageVolatilityRate": {
     "auth_ref": [
      "r565"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Rate of weighted-average expected volatility for award under share-based payment arrangement.",
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Fair Value Assumptions, Weighted Average Volatility Rate",
        "terseLabel": "Expected volatility factor (as a percent)"
       }
      }
     },
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsWeightedAverageVolatilityRate",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockPlansEsppFvAssumptionsDetails",
      "http://www.veeco.com/role/DisclosureStockPlansPerformanceAwardsAssumptionsDetails"
     ],
     "xbrltype": "percentItemType"
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.",
        "label": "Share-based Compensation Arrangement by Share-based Payment Award [Line Items]",
        "terseLabel": "Share-based compensation"
       }
      }
     },
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureShareBasedCompensationRestrictedSharesAndPerformanceSharesDetails",
      "http://www.veeco.com/role/DisclosureStockPlans2019PlanDetails",
      "http://www.veeco.com/role/DisclosureStockPlansEsppDetails",
      "http://www.veeco.com/role/DisclosureStockPlansEsppFvAssumptionsDetails",
      "http://www.veeco.com/role/DisclosureStockPlansPerformanceAwardsAssumptionsDetails",
      "http://www.veeco.com/role/DisclosureStockPlansRecognizedShareBasedCompensationDetails",
      "http://www.veeco.com/role/DisclosureStockPlansSharesReservedForFutureIssuanceDetails",
      "http://www.veeco.com/role/DisclosureStockPlansUnrecognizedShareBasedCompensationCostsDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNonOptionEquityInstrumentsOutstandingNumber": {
     "auth_ref": [
      "r153",
      "r155"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Number of equity instruments other than options outstanding, including both vested and non-vested instruments.",
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Non-Option Equity Instruments, Outstanding, Number",
        "verboseLabel": "Number of awards outstanding (in shares)"
       }
      }
     },
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardNonOptionEquityInstrumentsOutstandingNumber",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockPlans2019PlanDetails"
     ],
     "xbrltype": "sharesItemType"
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized": {
     "auth_ref": [
      "r842"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Number of shares authorized for issuance under share-based payment arrangement.",
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Number of Shares Authorized",
        "terseLabel": "Number of shares authorized"
       }
      }
     },
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockPlans2019PlanDetails",
      "http://www.veeco.com/role/DisclosureStockPlansEsppDetails"
     ],
     "xbrltype": "sharesItemType"
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant": {
     "auth_ref": [
      "r168"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The difference between the maximum number of shares (or other type of equity) authorized for issuance under the plan (including the effects of amendments and adjustments), and the sum of: 1) the number of shares (or other type of equity) already issued upon exercise of options or other equity-based awards under the plan; and 2) shares (or other type of equity) reserved for issuance on granting of outstanding awards, net of cancellations and forfeitures, if applicable.",
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Number of Shares Available for Grant",
        "terseLabel": "Awards available for grant (in shares)"
       }
      }
     },
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockPlans2019PlanDetails"
     ],
     "xbrltype": "sharesItemType"
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAdditionalDisclosuresAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Options, Additional Disclosures [Abstract]",
        "terseLabel": "Weighted Average Exercise Price"
       }
      }
     },
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAdditionalDisclosuresAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockPlansStockOptionActivityDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue": {
     "auth_ref": [
      "r559"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of accumulated difference between fair value of underlying shares on dates of exercise and exercise price on options exercised (or share units converted) into shares.",
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Options, Exercises in Period, Intrinsic Value",
        "terseLabel": "Intrinsic value of options exercised"
       }
      }
     },
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockPlansStockOptionsExercisedDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresAndExpirationsInPeriod": {
     "auth_ref": [
      "r925"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "For presentations that combine terminations, the number of shares under options that were cancelled during the reporting period as a result of occurrence of a terminating event specified in contractual agreements pertaining to the stock option plan or that expired.",
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Options, Forfeitures and Expirations in Period",
        "negatedLabel": "Expired (in shares)"
       }
      }
     },
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresAndExpirationsInPeriod",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockPlansStockOptionActivityDetails"
     ],
     "xbrltype": "sharesItemType"
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresAndExpirationsInPeriodWeightedAverageExercisePrice": {
     "auth_ref": [
      "r925"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Weighted average price of options that were either forfeited or expired.",
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Options, Forfeitures and Expirations in Period, Weighted Average Exercise Price",
        "terseLabel": "Expired (in dollars per share)"
       }
      }
     },
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresAndExpirationsInPeriodWeightedAverageExercisePrice",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockPlansStockOptionActivityDetails"
     ],
     "xbrltype": "perShareItemType"
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriod": {
     "auth_ref": [
      "r926"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Net number of share options (or share units) granted during the period.",
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Options, Grants in Period, Net of Forfeitures",
        "terseLabel": "Awards granted (in shares)"
       }
      }
     },
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriod",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockPlans2019PlanDetails"
     ],
     "xbrltype": "sharesItemType"
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber": {
     "auth_ref": [
      "r544",
      "r545"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Number of options outstanding, including both vested and non-vested options.",
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Number",
        "periodEndLabel": "Outstanding at the end of the period (in shares)",
        "periodStartLabel": "Outstanding at the beginning of the period (in shares)",
        "terseLabel": "Number of options outstanding (in shares)"
       }
      }
     },
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockPlans2019PlanDetails",
      "http://www.veeco.com/role/DisclosureStockPlansStockOptionActivityDetails"
     ],
     "xbrltype": "sharesItemType"
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "A roll forward is a reconciliation of a concept from the beginning of a period to the end of a period.",
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding [Roll Forward]",
        "terseLabel": "Number of Shares"
       }
      }
     },
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockPlansStockOptionActivityDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice": {
     "auth_ref": [
      "r544",
      "r545"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Weighted average price at which grantees can acquire the shares reserved for issuance under the stock option plan.",
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Weighted Average Exercise Price",
        "periodEndLabel": "Outstanding at the end of the period (in dollars per share)",
        "periodStartLabel": "Outstanding at the beginning of the period (in dollars per share)"
       }
      }
     },
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockPlansStockOptionActivityDetails"
     ],
     "xbrltype": "perShareItemType"
    },
    "us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain": {
     "auth_ref": [
      "r540",
      "r541",
      "r542",
      "r544",
      "r545",
      "r546",
      "r547",
      "r548",
      "r549",
      "r550",
      "r551",
      "r552",
      "r553",
      "r554",
      "r555",
      "r556",
      "r557",
      "r558",
      "r559",
      "r560",
      "r561",
      "r564",
      "r565",
      "r566",
      "r567",
      "r568"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Award under share-based payment arrangement.",
        "label": "Equity Award [Domain]"
       }
      }
     },
     "localname": "ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureShareBasedCompensationRestrictedSharesAndPerformanceSharesDetails",
      "http://www.veeco.com/role/DisclosureStockPlans2019PlanDetails",
      "http://www.veeco.com/role/DisclosureStockPlansPerformanceAwardsAssumptionsDetails",
      "http://www.veeco.com/role/DisclosureStockPlansUnrecognizedShareBasedCompensationCostsDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice": {
     "auth_ref": [
      "r549"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Weighted average price at which option holders acquired shares when converting their stock options into shares.",
        "label": "Share-based Compensation Arrangements by Share-based Payment Award, Options, Exercises in Period, Weighted Average Exercise Price",
        "terseLabel": "Exercised (in dollars per share)"
       }
      }
     },
     "localname": "ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockPlansStockOptionActivityDetails"
     ],
     "xbrltype": "perShareItemType"
    },
    "us-gaap_ShareBasedCompensationOptionAndIncentivePlansPolicy": {
     "auth_ref": [
      "r543",
      "r562",
      "r563",
      "r564",
      "r565",
      "r568",
      "r577",
      "r578"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Disclosure of accounting policy for award under share-based payment arrangement. Includes, but is not limited to, methodology and assumption used in measuring cost.",
        "label": "Share-based Compensation, Option and Incentive Plans Policy [Policy Text Block]",
        "terseLabel": "Accounting for Share-Based Compensation"
       }
      }
     },
     "localname": "ShareBasedCompensationOptionAndIncentivePlansPolicy",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesPolicies"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis": {
     "auth_ref": [
      "r163"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Information by range of option prices pertaining to options granted.",
        "label": "Exercise Price Range [Axis]"
       }
      }
     },
     "localname": "ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockPlansOptionExerciseRangesDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeDomain": {
     "auth_ref": [
      "r165"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Supplementary information on outstanding and exercisable share awards as of the balance sheet date which stratifies outstanding options by ranges of exercise prices.",
        "label": "Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range [Domain]"
       }
      }
     },
     "localname": "ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeDomain",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockPlansOptionExerciseRangesDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLineItems": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.",
        "label": "Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range [Line Items]",
        "terseLabel": "Stock plans"
       }
      }
     },
     "localname": "ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLineItems",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockPlansOptionExerciseRangesDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLowerRangeLimit": {
     "auth_ref": [
      "r165"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The floor of a customized range of exercise prices for purposes of disclosing shares potentially issuable under outstanding stock option awards on all stock option plans and other required information pertaining to awards in the customized range.",
        "label": "Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range, Lower Range Limit",
        "terseLabel": "Exercise price, low end of range (in dollars per share)"
       }
      }
     },
     "localname": "ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLowerRangeLimit",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockPlansOptionExerciseRangesDetails"
     ],
     "xbrltype": "perShareItemType"
    },
    "us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfExercisableOptions": {
     "auth_ref": [
      "r157"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The number of shares reserved for issuance pertaining to the outstanding exercisable stock options as of the balance sheet date in the customized range of exercise prices for which the market and performance vesting condition has been satisfied.",
        "label": "Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range, Number of Exercisable Options",
        "terseLabel": "Outstanding (in shares)"
       }
      }
     },
     "localname": "ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfExercisableOptions",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockPlansOptionExerciseRangesDetails"
     ],
     "xbrltype": "sharesItemType"
    },
    "us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfOutstandingOptions": {
     "auth_ref": [
      "r154"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The number of shares reserved for issuance pertaining to the outstanding stock options as of the balance sheet date for all option plans in the customized range of exercise prices.",
        "label": "Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range, Number of Outstanding Options",
        "terseLabel": "Outstanding (in shares)"
       }
      }
     },
     "localname": "ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfOutstandingOptions",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockPlansOptionExerciseRangesDetails"
     ],
     "xbrltype": "sharesItemType"
    },
    "us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeUpperRangeLimit": {
     "auth_ref": [
      "r165"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The ceiling of a customized range of exercise prices for purposes of disclosing shares potentially issuable under outstanding stock option awards on all stock option plans and other required information pertaining to awards in the customized range.",
        "label": "Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range, Upper Range Limit",
        "terseLabel": "Exercise price, high end of range (in dollars per share)"
       }
      }
     },
     "localname": "ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeUpperRangeLimit",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockPlansOptionExerciseRangesDetails"
     ],
     "xbrltype": "perShareItemType"
    },
    "us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod": {
     "auth_ref": [
      "r841"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Period from grant date that an equity-based award expires, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days.",
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Expiration Period",
        "terseLabel": "Expiration term"
       }
      }
     },
     "localname": "SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockPlans2019PlanDetails"
     ],
     "xbrltype": "durationItemType"
    },
    "us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1": {
     "auth_ref": [
      "r564"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Expected term of award under share-based payment arrangement, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days.",
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Fair Value Assumptions, Expected Term",
        "terseLabel": "Expected life (in years)"
       }
      }
     },
     "localname": "SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockPlansEsppFvAssumptionsDetails",
      "http://www.veeco.com/role/DisclosureStockPlansPerformanceAwardsAssumptionsDetails"
     ],
     "xbrltype": "durationItemType"
    },
    "us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsNonvestedNumberOfShares": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Number of non-vested options outstanding.",
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Options, Nonvested, Number of Shares",
        "terseLabel": "Unvested options outstanding (in shares)"
       }
      }
     },
     "localname": "SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsNonvestedNumberOfShares",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockPlansOptionExerciseRangesDetails"
     ],
     "xbrltype": "sharesItemType"
    },
    "us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardPurchasePriceOfCommonStockPercent": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Purchase price of common stock expressed as a percentage of its fair value.",
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Purchase Price of Common Stock, Percent",
        "terseLabel": "Share price (as a percent)"
       }
      }
     },
     "localname": "SharebasedCompensationArrangementBySharebasedPaymentAwardPurchasePriceOfCommonStockPercent",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockPlansEsppDetails"
     ],
     "xbrltype": "percentItemType"
    },
    "us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageExercisePrice1": {
     "auth_ref": [
      "r156"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Weighted average exercise price as of the balance sheet date for those equity-based payment arrangements exercisable and outstanding.",
        "label": "Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range, Exercisable Options, Weighted Average Exercise Price",
        "terseLabel": "Weighted Average Exercise Price (in dollars per share)"
       }
      }
     },
     "localname": "SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageExercisePrice1",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockPlansOptionExerciseRangesDetails"
     ],
     "xbrltype": "perShareItemType"
    },
    "us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageRemainingContractualTerm2": {
     "auth_ref": [
      "r162"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Weighted average remaining contractual term of exercisable stock options, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days.",
        "label": "Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range, Exercisable Options, Weighted Average Remaining Contractual Term",
        "terseLabel": "Weighted Average Remaining Contractual life"
       }
      }
     },
     "localname": "SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsWeightedAverageRemainingContractualTerm2",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockPlansOptionExerciseRangesDetails"
     ],
     "xbrltype": "durationItemType"
    },
    "us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageExercisePriceBeginningBalance1": {
     "auth_ref": [
      "r154"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The weighted average price as of the balance sheet date at which grantees could acquire the underlying shares with respect to all outstanding stock options which are in the customized range of exercise prices.",
        "label": "Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range, Outstanding Options, Weighted Average Exercise Price",
        "terseLabel": "Weighted-Average Exercise Price (in dollars per share)"
       }
      }
     },
     "localname": "SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageExercisePriceBeginningBalance1",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockPlansOptionExerciseRangesDetails"
     ],
     "xbrltype": "perShareItemType"
    },
    "us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageRemainingContractualTerm2": {
     "auth_ref": [
      "r161"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Weighted average remaining contractual term of outstanding stock options, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days.",
        "label": "Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range, Outstanding Options, Weighted Average Remaining Contractual Term",
        "terseLabel": "Weighted Average Remaining Contractual Life"
       }
      }
     },
     "localname": "SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageRemainingContractualTerm2",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockPlansOptionExerciseRangesDetails"
     ],
     "xbrltype": "durationItemType"
    },
    "us-gaap_SharesOutstanding": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Number of shares issued which are neither cancelled nor held in the treasury.",
        "label": "Shares, Outstanding",
        "periodEndLabel": "Balance (in shares)",
        "periodStartLabel": "Balance (in shares)"
       }
      }
     },
     "localname": "SharesOutstanding",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfStockholdersEquity"
     ],
     "xbrltype": "sharesItemType"
    },
    "us-gaap_ShortTermInvestmentsAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Short-term Investments [Abstract]",
        "verboseLabel": "Short-term investments"
       }
      }
     },
     "localname": "ShortTermInvestmentsAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureFairValueMeasurementsDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_StandardProductWarrantyPolicy": {
     "auth_ref": [
      "r133"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Disclosure of accounting policy for standard warranties including the methodology for measuring the liability.",
        "label": "Standard Product Warranty, Policy [Policy Text Block]",
        "terseLabel": "Warranty Costs"
       }
      }
     },
     "localname": "StandardProductWarrantyPolicy",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesPolicies"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_StateAndLocalJurisdictionMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Designated tax department of a state or local government entitled to levy and collect income taxes from the entity.",
        "label": "State and local"
       }
      }
     },
     "localname": "StateAndLocalJurisdictionMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesOperatingLossCarryforwardsDetails",
      "http://www.veeco.com/role/DisclosureIncomeTaxesTaxCreditCarryforwardsDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_StatementEquityComponentsAxis": {
     "auth_ref": [
      "r41",
      "r144",
      "r249",
      "r280",
      "r281",
      "r282",
      "r310",
      "r311",
      "r312",
      "r316",
      "r324",
      "r326",
      "r349",
      "r404",
      "r496",
      "r574",
      "r575",
      "r576",
      "r608",
      "r609",
      "r644",
      "r668",
      "r669",
      "r670",
      "r671",
      "r672",
      "r673",
      "r711",
      "r768",
      "r769",
      "r770"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Information by component of equity.",
        "label": "Equity Components [Axis]"
       }
      }
     },
     "localname": "StatementEquityComponentsAxis",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockholdersEquityAociRollforwardDetails",
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfStockholdersEquity"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_StatementLineItems": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.",
        "label": "Statement [Line Items]",
        "terseLabel": "Statement"
       }
      }
     },
     "localname": "StatementLineItems",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfStockholdersEquity"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_StatementOfCashFlowsAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Consolidated Statements of Cash Flows"
       }
      }
     },
     "localname": "StatementOfCashFlowsAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "xbrltype": "stringItemType"
    },
    "us-gaap_StatementOfFinancialPositionAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Consolidated Balance Sheets"
       }
      }
     },
     "localname": "StatementOfFinancialPositionAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "xbrltype": "stringItemType"
    },
    "us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Consolidated Statements of Comprehensive Income"
       }
      }
     },
     "localname": "StatementOfIncomeAndComprehensiveIncomeAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "xbrltype": "stringItemType"
    },
    "us-gaap_StatementOfStockholdersEquityAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Consolidated Statements of Stockholders' Equity"
       }
      }
     },
     "localname": "StatementOfStockholdersEquityAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "xbrltype": "stringItemType"
    },
    "us-gaap_StatementTable": {
     "auth_ref": [
      "r310",
      "r311",
      "r312",
      "r349",
      "r749"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Schedule reflecting a Statement of Income, Statement of Cash Flows, Statement of Financial Position, Statement of Shareholders' Equity and Other Comprehensive Income, or other statement as needed.",
        "label": "Statement [Table]"
       }
      }
     },
     "localname": "StatementTable",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfStockholdersEquity"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans": {
     "auth_ref": [
      "r19",
      "r20",
      "r144",
      "r150"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Number of shares issued during the period as a result of an employee stock purchase plan.",
        "label": "Stock Issued During Period, Shares, Employee Stock Purchase Plans",
        "terseLabel": "Number of shares issued"
       }
      }
     },
     "localname": "StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockPlansEsppFvAssumptionsDetails"
     ],
     "xbrltype": "sharesItemType"
    },
    "us-gaap_StockIssuedDuringPeriodSharesShareBasedCompensation": {
     "auth_ref": [
      "r19",
      "r20",
      "r144",
      "r150"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Number, after forfeiture, of shares or units issued under share-based payment arrangement. Excludes shares or units issued under employee stock ownership plan (ESOP).",
        "label": "Stock Issued During Period, Shares, Share-based Compensation, Net of Forfeitures",
        "terseLabel": "Net issuance under employee stock plans (in shares)"
       }
      }
     },
     "localname": "StockIssuedDuringPeriodSharesShareBasedCompensation",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfStockholdersEquity"
     ],
     "xbrltype": "sharesItemType"
    },
    "us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised": {
     "auth_ref": [
      "r19",
      "r20",
      "r144",
      "r150",
      "r549"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Number of share options (or share units) exercised during the current period.",
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Options, Exercises in Period",
        "negatedLabel": "Exercised (in shares)"
       }
      }
     },
     "localname": "StockIssuedDuringPeriodSharesStockOptionsExercised",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockPlansStockOptionActivityDetails"
     ],
     "xbrltype": "sharesItemType"
    },
    "us-gaap_StockIssuedDuringPeriodValueShareBasedCompensation": {
     "auth_ref": [
      "r19",
      "r20",
      "r150",
      "r159"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Value, after forfeiture, of shares issued under share-based payment arrangement. Excludes employee stock ownership plan (ESOP).",
        "label": "Stock Issued During Period, Value, Share-based Compensation, Net of Forfeitures",
        "terseLabel": "Net issuance under employee stock plans"
       }
      }
     },
     "localname": "StockIssuedDuringPeriodValueShareBasedCompensation",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfStockholdersEquity"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_StockholdersEquity": {
     "auth_ref": [
      "r20",
      "r23",
      "r24",
      "r99",
      "r847",
      "r872",
      "r890",
      "r962"
     ],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheets": {
       "order": 2.0,
       "parentTag": "us-gaap_LiabilitiesAndStockholdersEquity",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Total of all stockholders' equity (deficit) items, net of receivables from officers, directors, owners, and affiliates of the entity which are attributable to the parent. The amount of the economic entity's stockholders' equity attributable to the parent excludes the amount of stockholders' equity which is allocable to that ownership interest in subsidiary equity which is not attributable to the parent (noncontrolling interest, minority interest). This excludes temporary equity and is sometimes called permanent equity.",
        "label": "Stockholders' Equity Attributable to Parent",
        "periodEndLabel": "Balance at the end of the period",
        "periodStartLabel": "Balance at the beginning of the period",
        "totalLabel": "Total stockholders' equity"
       }
      }
     },
     "localname": "StockholdersEquity",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockholdersEquityAociRollforwardDetails",
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheets",
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfStockholdersEquity"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_StockholdersEquityAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Stockholders' Equity Attributable to Parent [Abstract]",
        "terseLabel": "Stockholders' equity:"
       }
      }
     },
     "localname": "StockholdersEquityAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheets"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_StockholdersEquityNoteAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Stockholders' Equity"
       }
      }
     },
     "localname": "StockholdersEquityNoteAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "xbrltype": "stringItemType"
    },
    "us-gaap_StockholdersEquityNoteDisclosureTextBlock": {
     "auth_ref": [
      "r151",
      "r297",
      "r483",
      "r484",
      "r485",
      "r486",
      "r487",
      "r488",
      "r489",
      "r490",
      "r491",
      "r492",
      "r493",
      "r495",
      "r496",
      "r634"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The entire disclosure for shareholders' equity comprised of portions attributable to the parent entity and noncontrolling interest, including other comprehensive income. Includes, but is not limited to, balances of common stock, preferred stock, additional paid-in capital, other capital and retained earnings, accumulated balance for each classification of other comprehensive income and amount of comprehensive income.",
        "label": "Stockholders' Equity Note Disclosure [Text Block]",
        "verboseLabel": "Stockholders' Equity"
       }
      }
     },
     "localname": "StockholdersEquityNoteDisclosureTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockholdersEquity"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_SubsequentEventLineItems": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Detail information of subsequent event by type. User is expected to use existing line items from elsewhere in the taxonomy as the primary line items for this disclosure, which is further associated with dimension and member elements pertaining to a subsequent event.",
        "label": "Subsequent Event [Line Items]",
        "terseLabel": "Subsequent Events"
       }
      }
     },
     "localname": "SubsequentEventLineItems",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSubsequentEventsDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_SubsequentEventMember": {
     "auth_ref": [
      "r674",
      "r713"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Identifies event that occurred after the balance sheet date but before financial statements are issued or available to be issued.",
        "label": "Subsequent event"
       }
      }
     },
     "localname": "SubsequentEventMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSubsequentEventsDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_SubsequentEventTable": {
     "auth_ref": [
      "r674",
      "r713"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Discloses pertinent information about one or more significant events or transactions that occurred after the balance sheet date through the date the financial statements were issued or the date the financial statements were available to be issued.",
        "label": "Subsequent Event [Table]"
       }
      }
     },
     "localname": "SubsequentEventTable",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSubsequentEventsDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_SubsequentEventTypeAxis": {
     "auth_ref": [
      "r674",
      "r713"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Information by event that occurred after the balance sheet date but before financial statements are issued or available to be issued.",
        "label": "Subsequent Event Type [Axis]"
       }
      }
     },
     "localname": "SubsequentEventTypeAxis",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSubsequentEventsDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_SubsequentEventTypeDomain": {
     "auth_ref": [
      "r674",
      "r713"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Event that occurred after the balance sheet date but before financial statements are issued or available to be issued.",
        "label": "Subsequent Event Type [Domain]"
       }
      }
     },
     "localname": "SubsequentEventTypeDomain",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSubsequentEventsDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_SubsequentEventsAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Subsequent Events"
       }
      }
     },
     "localname": "SubsequentEventsAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "xbrltype": "stringItemType"
    },
    "us-gaap_SubsequentEventsTextBlock": {
     "auth_ref": [
      "r712",
      "r714"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The entire disclosure for significant events or transactions that occurred after the balance sheet date through the date the financial statements were issued or the date the financial statements were available to be issued. Examples include: the sale of a capital stock issue, purchase of a business, settlement of litigation, catastrophic loss, significant foreign exchange rate changes, loans to insiders or affiliates, and transactions not in the ordinary course of business.",
        "label": "Subsequent Events [Text Block]",
        "terseLabel": "Subsequent Events"
       }
      }
     },
     "localname": "SubsequentEventsTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSubsequentEvents"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_SummaryOfIncomeTaxContingenciesTextBlock": {
     "auth_ref": [
      "r175",
      "r177",
      "r178"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure for tax positions taken in the tax returns filed or to be filed for which it is more likely than not that the tax position will not be sustained upon examination by taxing authorities and other income tax contingencies. Includes, but is not limited to, interest and penalties, reconciliation of unrecognized tax benefits, unrecognized tax benefits that would affect the effective tax rate, tax years that remain subject to examination by tax jurisdictions, and information about positions for which it is reasonably possible that amounts unrecognized will significantly change within 12 months.",
        "label": "Summary of Income Tax Contingencies [Table Text Block]",
        "terseLabel": "Schedule of reconciliation of beginning and ending amount of uncertain tax positions"
       }
      }
     },
     "localname": "SummaryOfIncomeTaxContingenciesTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_SupplementalCashFlowInformationAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Supplemental Cash Flow Information [Abstract]",
        "terseLabel": "Supplemental Disclosure of Cash Flow Information"
       }
      }
     },
     "localname": "SupplementalCashFlowInformationAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_TaxCreditCarryforwardAmount": {
     "auth_ref": [
      "r180"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The amount of the tax credit carryforward, before tax effects, available to reduce future taxable income under enacted tax laws.",
        "label": "Tax Credit Carryforward, Amount",
        "terseLabel": "Tax credit carry forwards"
       }
      }
     },
     "localname": "TaxCreditCarryforwardAmount",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesTaxCreditCarryforwardsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_TaxCreditCarryforwardAxis": {
     "auth_ref": [
      "r181"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Information by specific tax credit related to an unused tax credit.",
        "label": "Tax Credit Carryforward [Axis]"
       }
      }
     },
     "localname": "TaxCreditCarryforwardAxis",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesTaxCreditCarryforwardsDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_TaxCreditCarryforwardLineItems": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.",
        "label": "Tax Credit Carryforward [Line Items]",
        "terseLabel": "Tax credit carryforward"
       }
      }
     },
     "localname": "TaxCreditCarryforwardLineItems",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesTaxCreditCarryforwardsDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_TaxCreditCarryforwardNameDomain": {
     "auth_ref": [
      "r181"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The name of the tax credit carryforward.",
        "label": "Tax Credit Carryforward, Name [Domain]"
       }
      }
     },
     "localname": "TaxCreditCarryforwardNameDomain",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesTaxCreditCarryforwardsDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_TaxCreditCarryforwardTable": {
     "auth_ref": [
      "r181"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "A listing of tax credit carryforwards available to reduce future taxable income including descriptions, amounts, expiration dates, limitations on use and the related deferred tax assets and valuation allowances.",
        "label": "Tax Credit Carryforward [Table]"
       }
      }
     },
     "localname": "TaxCreditCarryforwardTable",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesTaxCreditCarryforwardsDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_TaxesPayableCurrent": {
     "auth_ref": [
      "r32"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesComponentsDetails": {
       "order": 7.0,
       "parentTag": "veco_AccruedAndOtherLiabilitiesCurrent",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Carrying value as of the balance sheet date of obligations incurred and payable for statutory income, sales, use, payroll, excise, real, property and other taxes. Used to reflect the current portion of the liabilities (due within one year or within the normal operating cycle if longer).",
        "label": "Taxes Payable, Current",
        "terseLabel": "Sales, use, and other taxes"
       }
      }
     },
     "localname": "TaxesPayableCurrent",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesComponentsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_TechnologyBasedIntangibleAssetsMember": {
     "auth_ref": [
      "r188"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Technology-based intangible assets, including, but not limited to, patented technology, unpatented technology, and developed technology rights.",
        "label": "Technology"
       }
      }
     },
     "localname": "TechnologyBasedIntangibleAssetsMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssetsIntangibleAssetsDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_TrademarksAndTradeNamesMember": {
     "auth_ref": [
      "r189"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Rights acquired through registration of a trademark to gain or protect exclusive use of a business name, symbol or other device or style, or rights either acquired through registration of a business name to gain or protect exclusive use thereof.",
        "label": "Trademarks and tradenames"
       }
      }
     },
     "localname": "TrademarksAndTradeNamesMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssetsIntangibleAssetsDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_TransfersAndServicingOfFinancialInstrumentsTypesOfFinancialInstrumentsDomain": {
     "auth_ref": [
      "r390",
      "r391",
      "r477",
      "r494",
      "r633",
      "r715",
      "r716",
      "r717",
      "r718",
      "r719",
      "r720",
      "r721",
      "r722",
      "r723",
      "r724",
      "r725",
      "r726",
      "r727",
      "r728",
      "r729",
      "r730",
      "r731",
      "r732",
      "r733",
      "r734",
      "r735",
      "r736",
      "r737",
      "r738",
      "r739",
      "r740",
      "r741",
      "r742",
      "r743",
      "r744",
      "r887",
      "r888",
      "r889",
      "r983",
      "r984",
      "r985",
      "r986",
      "r987",
      "r988",
      "r989"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Instrument or contract that imposes a contractual obligation to deliver cash or another financial instrument or to exchange other financial instruments on potentially unfavorable terms and conveys a contractual right to receive cash or another financial instrument or to exchange other financial instruments on potentially favorable terms.",
        "label": "Financial Instruments [Domain]"
       }
      }
     },
     "localname": "TransfersAndServicingOfFinancialInstrumentsTypesOfFinancialInstrumentsDomain",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureFairValueMeasurementsDetails",
      "http://www.veeco.com/role/DisclosureInvestmentsAvailableForSaleSecuritiesDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_TypeOfAdoptionMember": {
     "auth_ref": [
      "r247",
      "r248",
      "r249",
      "r250",
      "r251",
      "r315",
      "r316",
      "r317",
      "r318",
      "r327",
      "r386",
      "r387",
      "r401",
      "r402",
      "r403",
      "r404",
      "r405",
      "r406",
      "r574",
      "r575",
      "r576",
      "r606",
      "r607",
      "r608",
      "r609",
      "r621",
      "r622",
      "r623",
      "r635",
      "r636",
      "r637",
      "r639",
      "r640",
      "r641",
      "r642",
      "r643",
      "r644",
      "r645",
      "r646",
      "r647",
      "r656",
      "r657",
      "r659",
      "r660",
      "r661",
      "r662",
      "r663",
      "r664",
      "r676",
      "r677",
      "r688",
      "r689",
      "r690",
      "r691",
      "r706",
      "r707",
      "r708",
      "r709",
      "r710",
      "r711",
      "r751",
      "r752",
      "r753",
      "r766",
      "r767",
      "r768",
      "r769",
      "r770",
      "r771",
      "r772",
      "r773",
      "r774",
      "r775",
      "r776",
      "r777"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amendment to accounting standards.",
        "label": "Type of Adoption [Domain]"
       }
      }
     },
     "localname": "TypeOfAdoptionMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesRecentlyAdoptedAccountingStandardsDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_USGovernmentAgenciesDebtSecuritiesMember": {
     "auth_ref": [
      "r819",
      "r834",
      "r978"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Debentures, notes, and other debt securities issued by US government agencies, for example, but not limited to, Government National Mortgage Association (GNMA or Ginnie Mae). Excludes US treasury securities and debt issued by government-sponsored Enterprises (GSEs), for example, but is not limited to, Federal Home Loan Mortgage Corporation (FHLMC or Freddie Mac), Federal National Mortgage Association (FNMA or Fannie Mae), and the Federal Home Loan Bank (FHLB).",
        "label": "Government agency securities, Short-term investments"
       }
      }
     },
     "localname": "USGovernmentAgenciesDebtSecuritiesMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureFairValueMeasurementsDetails",
      "http://www.veeco.com/role/DisclosureInvestmentsAvailableForSaleSecuritiesDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_USTreasurySecuritiesMember": {
     "auth_ref": [
      "r819",
      "r834",
      "r836",
      "r978"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "This category includes information about debt securities issued by the United States Department of the Treasury and backed by the United States government. Such securities primarily consist of treasury bills (short-term maturities - one year or less), treasury notes (intermediate term maturities - two to ten years), and treasury bonds (long-term maturities - ten to thirty years).",
        "label": "U.S. treasuries"
       }
      }
     },
     "localname": "USTreasurySecuritiesMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureFairValueMeasurementsDetails",
      "http://www.veeco.com/role/DisclosureInvestmentsAvailableForSaleSecuritiesDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_UnbilledContractsReceivable": {
     "auth_ref": [
      "r747"
     ],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheets": {
       "order": 5.0,
       "parentTag": "us-gaap_AssetsCurrent",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Unbilled amounts due for services rendered or to be rendered, actions taken or to be taken, or a promise to refrain from taking certain actions in accordance with the terms of a legally binding agreement between the entity and, at a minimum, one other party. An example would be amounts associated with contracts or programs where the recognized revenue for performance thereunder exceeds the amounts billed under the terms thereof as of the date of the balance sheet.",
        "label": "Unbilled Contracts Receivable",
        "terseLabel": "Contract assets"
       }
      }
     },
     "localname": "UnbilledContractsReceivable",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_UnrecognizedTaxBenefits": {
     "auth_ref": [
      "r581",
      "r590"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of unrecognized tax benefits.",
        "label": "Unrecognized Tax Benefits",
        "periodEndLabel": "Balance at end of year",
        "periodStartLabel": "Balance at beginning of year"
       }
      }
     },
     "localname": "UnrecognizedTaxBenefits",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesUncertainTaxPositionsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_UnrecognizedTaxBenefitsDecreasesResultingFromPriorPeriodTaxPositions": {
     "auth_ref": [
      "r591"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of decrease in unrecognized tax benefits resulting from tax positions taken in prior period tax returns.",
        "label": "Unrecognized Tax Benefits, Decrease Resulting from Prior Period Tax Positions",
        "negatedLabel": "Reductions for tax positions relating to prior years"
       }
      }
     },
     "localname": "UnrecognizedTaxBenefitsDecreasesResultingFromPriorPeriodTaxPositions",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesUncertainTaxPositionsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_UnrecognizedTaxBenefitsDecreasesResultingFromSettlementsWithTaxingAuthorities": {
     "auth_ref": [
      "r593"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of decrease in unrecognized tax benefits resulting from settlements with taxing authorities.",
        "label": "Unrecognized Tax Benefits, Decrease Resulting from Settlements with Taxing Authorities",
        "negatedLabel": "Settlements"
       }
      }
     },
     "localname": "UnrecognizedTaxBenefitsDecreasesResultingFromSettlementsWithTaxingAuthorities",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesUncertainTaxPositionsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued": {
     "auth_ref": [
      "r589"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount accrued for interest on an underpayment of income taxes and penalties related to a tax position claimed or expected to be claimed in the tax return.",
        "label": "Unrecognized Tax Benefits, Income Tax Penalties and Interest Accrued",
        "terseLabel": "Accrued interest and penalties"
       }
      }
     },
     "localname": "UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesUncertainTaxPositionsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromCurrentPeriodTaxPositions": {
     "auth_ref": [
      "r592"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of increase in unrecognized tax benefits resulting from tax positions that have been or will be taken in current period tax return.",
        "label": "Unrecognized Tax Benefits, Increase Resulting from Current Period Tax Positions",
        "terseLabel": "Additions for tax positions related to current year"
       }
      }
     },
     "localname": "UnrecognizedTaxBenefitsIncreasesResultingFromCurrentPeriodTaxPositions",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesUncertainTaxPositionsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromPriorPeriodTaxPositions": {
     "auth_ref": [
      "r591"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of increase in unrecognized tax benefits resulting from tax positions taken in prior period tax returns.",
        "label": "Unrecognized Tax Benefits, Increase Resulting from Prior Period Tax Positions",
        "terseLabel": "Additions for tax positions relating to prior years"
       }
      }
     },
     "localname": "UnrecognizedTaxBenefitsIncreasesResultingFromPriorPeriodTaxPositions",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesUncertainTaxPositionsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_UnrecognizedTaxBenefitsThatWouldImpactEffectiveTaxRate": {
     "auth_ref": [
      "r594"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The total amount of unrecognized tax benefits that, if recognized, would affect the effective tax rate.",
        "label": "Unrecognized Tax Benefits that Would Impact Effective Tax Rate",
        "terseLabel": "Unrecognized tax benefits that would impact effective tax rate if recognized"
       }
      }
     },
     "localname": "UnrecognizedTaxBenefitsThatWouldImpactEffectiveTaxRate",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesUncertainTaxPositionsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_UnrecordedUnconditionalPurchaseObligationDueInNextRollingTwelveMonths": {
     "auth_ref": [],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of the fixed and determinable portion of the unrecorded unconditional purchase obligation maturing in the next rolling twelve months following the latest balance sheet. For interim and annual periods when interim periods are reported on a rolling approach, from latest balance sheet date.",
        "label": "Unrecorded Unconditional Purchase Obligation, Due in Next Rolling Twelve Months",
        "terseLabel": "Purchase commitments due within one year"
       }
      }
     },
     "localname": "UnrecordedUnconditionalPurchaseObligationDueInNextRollingTwelveMonths",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesPurchaseCommitmentsAndBankGuaranteesDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_UseOfEstimates": {
     "auth_ref": [
      "r90",
      "r91",
      "r92",
      "r350",
      "r351",
      "r353",
      "r354"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Disclosure of accounting policy for the use of estimates in the preparation of financial statements in conformity with generally accepted accounting principles.",
        "label": "Use of Estimates, Policy [Policy Text Block]",
        "terseLabel": "Use of Estimates"
       }
      }
     },
     "localname": "UseOfEstimates",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesPolicies"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_ValuationAllowanceAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Valuation Allowance [Abstract]",
        "terseLabel": "Valuation allowance"
       }
      }
     },
     "localname": "ValuationAllowanceAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesDeferredTaxesDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_ValuationAllowanceDeferredTaxAssetChangeInAmount": {
     "auth_ref": [
      "r600"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of increase (decrease) in the valuation allowance for a specified deferred tax asset.",
        "label": "Valuation Allowance, Deferred Tax Asset, Change in Amount",
        "terseLabel": "Increase (decrease) in valuation allowance"
       }
      }
     },
     "localname": "ValuationAllowanceDeferredTaxAssetChangeInAmount",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesDeferredTaxesDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember": {
     "auth_ref": [
      "r874",
      "r875",
      "r876",
      "r877",
      "r878"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Valuation allowance of deferred tax asset attributable to deductible temporary difference and carryforward.",
        "label": "Valuation allowance in net deferred tax assets"
       }
      }
     },
     "localname": "ValuationAllowanceOfDeferredTaxAssetsMember",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureScheduleIiValuationAndQualifyingAccountsDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_ValuationAllowancesAndReservesBalance": {
     "auth_ref": [
      "r303",
      "r308"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of valuation and qualifying accounts and reserves.",
        "label": "Valuation Allowances and Reserves, Balance",
        "periodEndLabel": "Balance at End of Period",
        "periodStartLabel": "Balance at Beginning of Period"
       }
      }
     },
     "localname": "ValuationAllowancesAndReservesBalance",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureScheduleIiValuationAndQualifyingAccountsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_ValuationAllowancesAndReservesChargedToCostAndExpense": {
     "auth_ref": [
      "r306"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of increase in valuation and qualifying accounts and reserves from charge to cost and expense.",
        "label": "Valuation Allowances and Reserves, Charged to Cost and Expense",
        "terseLabel": "Charged (Credited) to Costs and Expenses"
       }
      }
     },
     "localname": "ValuationAllowancesAndReservesChargedToCostAndExpense",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureScheduleIiValuationAndQualifyingAccountsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_ValuationAllowancesAndReservesDeductions": {
     "auth_ref": [
      "r307"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of decrease in valuation and qualifying accounts and reserves.",
        "label": "Valuation Allowances and Reserves, Deductions",
        "negatedLabel": "Deductions"
       }
      }
     },
     "localname": "ValuationAllowancesAndReservesDeductions",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureScheduleIiValuationAndQualifyingAccountsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_ValuationAllowancesAndReservesDomain": {
     "auth_ref": [
      "r303",
      "r304",
      "r305",
      "r307",
      "r308"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Valuation and qualifying accounts and reserves.",
        "label": "Valuation Allowances and Reserves [Domain]"
       }
      }
     },
     "localname": "ValuationAllowancesAndReservesDomain",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureScheduleIiValuationAndQualifyingAccountsDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_ValuationAllowancesAndReservesTypeAxis": {
     "auth_ref": [
      "r303",
      "r304",
      "r305",
      "r307",
      "r308"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Information by valuation and qualifying accounts and reserves.",
        "label": "Valuation Allowances and Reserves Type [Axis]"
       }
      }
     },
     "localname": "ValuationAllowancesAndReservesTypeAxis",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureScheduleIiValuationAndQualifyingAccountsDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_VariableLeaseCost": {
     "auth_ref": [
      "r700",
      "r846"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of variable lease cost, excluded from lease liability, recognized when obligation for payment is incurred for finance and operating leases.",
        "label": "Variable Lease, Cost",
        "terseLabel": "Variable lease cost"
       }
      }
     },
     "localname": "VariableLeaseCost",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesLeaseCostsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_VariableRateAxis": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Information by type of variable rate.",
        "label": "Variable Rate [Axis]"
       }
      }
     },
     "localname": "VariableRateAxis",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDebtRevolvingCreditFacilityDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_VariableRateDomain": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Interest rate that fluctuates over time as a result of an underlying benchmark interest rate or index.",
        "label": "Variable Rate [Domain]"
       }
      }
     },
     "localname": "VariableRateDomain",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDebtRevolvingCreditFacilityDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_WeightedAverageNumberDilutedSharesOutstandingAdjustment": {
     "auth_ref": [
      "r885"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureIncomePerCommonShareBasicAndDilutedDetails": {
       "order": 3.0,
       "parentTag": "us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding",
       "weight": 1.0
      }
     },
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The sum of dilutive potential common shares or units used in the calculation of the diluted per-share or per-unit computation.",
        "label": "Weighted Average Number Diluted Shares Outstanding Adjustment",
        "terseLabel": "Effect of potentially dilutive share-based awards"
       }
      }
     },
     "localname": "WeightedAverageNumberDilutedSharesOutstandingAdjustment",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomePerCommonShareBasicAndDilutedDetails"
     ],
     "xbrltype": "sharesItemType"
    },
    "us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding": {
     "auth_ref": [
      "r330",
      "r342"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureIncomePerCommonShareBasicAndDilutedDetails": {
       "order": null,
       "parentTag": null,
       "root": true,
       "weight": null
      }
     },
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The average number of shares or units issued and outstanding that are used in calculating diluted EPS or earnings per unit (EPU), determined based on the timing of issuance of shares or units in the period.",
        "label": "Weighted Average Number of Shares Outstanding, Diluted",
        "terseLabel": "Diluted (in shares)",
        "totalLabel": "Diluted weighted average shares outstanding"
       }
      }
     },
     "localname": "WeightedAverageNumberOfDilutedSharesOutstanding",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomePerCommonShareBasicAndDilutedDetails",
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "xbrltype": "sharesItemType"
    },
    "us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Weighted Average Number of Shares Outstanding, Diluted [Abstract]",
        "terseLabel": "Weighted average number of shares:"
       }
      }
     },
     "localname": "WeightedAverageNumberOfSharesOutstandingAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_WeightedAverageNumberOfSharesOutstandingBasic": {
     "auth_ref": [
      "r328",
      "r342"
     ],
     "calculation": {
      "http://www.veeco.com/role/DisclosureIncomePerCommonShareBasicAndDilutedDetails": {
       "order": 1.0,
       "parentTag": "us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding",
       "weight": 1.0
      }
     },
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Number of [basic] shares or units, after adjustment for contingently issuable shares or units and other shares or units not deemed outstanding, determined by relating the portion of time within a reporting period that common shares or units have been outstanding to the total time in that period.",
        "label": "Weighted Average Number of Shares Outstanding, Basic",
        "terseLabel": "Basic (in shares)",
        "verboseLabel": "Basic weighted average shares outstanding"
       }
      }
     },
     "localname": "WeightedAverageNumberOfSharesOutstandingBasic",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomePerCommonShareBasicAndDilutedDetails",
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "xbrltype": "sharesItemType"
    },
    "us-gaap_WeightedAverageNumberOfSharesOutstandingDilutedDisclosureItemsAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Weighted Average Number of Shares Outstanding Reconciliation [Abstract]",
        "verboseLabel": "Denominator:"
       }
      }
     },
     "localname": "WeightedAverageNumberOfSharesOutstandingDilutedDisclosureItemsAbstract",
     "nsuri": "http://fasb.org/us-gaap/2022",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomePerCommonShareBasicAndDilutedDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "veco_AccountsReceivableCreditPeriod": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The credit period for accounts receivable.",
        "label": "Accounts Receivable Credit Period",
        "terseLabel": "Credit period for accounts receivable"
       }
      }
     },
     "localname": "AccountsReceivableCreditPeriod",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesReceivablesDetails"
     ],
     "xbrltype": "durationItemType"
    },
    "veco_AccruedAndOtherLiabilitiesCurrent": {
     "auth_ref": [],
     "calculation": {
      "http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesComponentsDetails": {
       "order": null,
       "parentTag": null,
       "root": true,
       "weight": null
      },
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheets": {
       "order": 2.0,
       "parentTag": "us-gaap_LiabilitiesCurrent",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Carrying value as of the balance sheet date of obligations incurred and payable, pertaining to costs that are statutory in nature, are incurred on contractual obligations, or accumulate over time and for which invoices have not yet been received or will not be rendered. Examples include taxes, interest, rent and utilities. Used to reflect the current portion of the liabilities (due within one year or within the normal operating cycle if longer). Also includes amount of liabilities classified as other, due within one year or the normal operating cycle, if longer.",
        "label": "Accrued and Other Liabilities, Current",
        "terseLabel": "Accrued expenses and other current liabilities",
        "totalLabel": "Total Accrued and Other Liabilities, Current"
       }
      }
     },
     "localname": "AccruedAndOtherLiabilitiesCurrent",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesComponentsDetails",
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "veco_AdjustmentsToAdditionalPaidInCapitalExtinguishmentEquityComponentOfNotesRepurchased": {
     "auth_ref": [],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of adjustment to additional paid in capital (APIC) resulting from extinguishment of equity component of repurchased or exchanged notes.",
        "label": "Adjustments To Additional Paid In Capital Extinguishment Equity Component Of Notes Repurchased",
        "negatedLabel": "Extinguishment of equity component of repurchased/exchanged 2023 Notes",
        "verboseLabel": "Reduction of additional paid-in capital for extinguishment of equity component of note repurchased/exchanged"
       }
      }
     },
     "localname": "AdjustmentsToAdditionalPaidInCapitalExtinguishmentEquityComponentOfNotesRepurchased",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDebt20232025And2027NotesDetails",
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfStockholdersEquity"
     ],
     "xbrltype": "monetaryItemType"
    },
    "veco_AdjustmentsToAdditionalPaidInCapitalPurchaseOfDerivativeInstrument": {
     "auth_ref": [],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of adjustment to additional paid in capital (APIC) resulting from purchase of derivative instruments.",
        "label": "Adjustments To Additional Paid In Capital Purchase of Derivative Instrument",
        "negatedLabel": "Purchase of capped calls"
       }
      }
     },
     "localname": "AdjustmentsToAdditionalPaidInCapitalPurchaseOfDerivativeInstrument",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfStockholdersEquity"
     ],
     "xbrltype": "monetaryItemType"
    },
    "veco_AsiaPacificExcludingChinaMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Region of Asia Pacific, excluding China.",
        "label": "Rest of APAC"
       }
      }
     },
     "localname": "AsiaPacificExcludingChinaMember",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformationGeographicDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "veco_BalanceSheetLineItemAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "No definition available.",
        "label": "Balance Sheet Line Item [Abstract]",
        "terseLabel": "Balance Sheet line item:"
       }
      }
     },
     "localname": "BalanceSheetLineItemAbstract",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesRecentlyAdoptedAccountingStandardsDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "veco_CalculatedUnderGuidanceInEffectBeforeAdoptionOfAccountingStandardsUpdate202006Member": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Calculated under guidance in effect prior to Adoption of Accounting Standards Update 2020-06.",
        "label": "Under legacy accounting"
       }
      }
     },
     "localname": "CalculatedUnderGuidanceInEffectBeforeAdoptionOfAccountingStandardsUpdate202006Member",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesRecentlyAdoptedAccountingStandardsDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "veco_CappedCallTransactionsCapPrice": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Cap price of the capped call transactions.",
        "label": "Capped Call Transactions, Cap Price",
        "terseLabel": "Cap price of the capped call transactions (in dollars per share)"
       }
      }
     },
     "localname": "CappedCallTransactionsCapPrice",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDebtCappedCallTransactionsDetails"
     ],
     "xbrltype": "perShareItemType"
    },
    "veco_CappedCallTransactionsPrice": {
     "auth_ref": [],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Aggregate price of capped call transaction.",
        "label": "Capped Call Transactions, Price",
        "terseLabel": "Aggregate price of capped call transaction"
       }
      }
     },
     "localname": "CappedCallTransactionsPrice",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDebtCappedCallTransactionsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "veco_CashAndCashEquivalentsMaintainedOutsideBySubsidiariesAsPercent": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents the percentage of cash and cash equivalents maintained outside of the United States by subsidiaries.",
        "label": "Cash and cash equivalents maintained outside by subsidiaries (as a percent)",
        "terseLabel": "Cash and cash equivalents maintained outside the United States (as a percent)"
       }
      }
     },
     "localname": "CashAndCashEquivalentsMaintainedOutsideBySubsidiariesAsPercent",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesCashCashEquivalentsAndShortTermInvestmentsDetails"
     ],
     "xbrltype": "percentItemType"
    },
    "veco_CashCashEquivalentsAndShortTermInvestmentsPolicyTextBlock": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Disclosure of accounting policy for cash and cash equivalents, including the policy for determining which items are treated as cash equivalents. Other information that may be disclosed includes (1) the nature of any restrictions on the entity's use of its cash and cash equivalents, (2) whether the entity's cash and cash equivalents are insured or expose the entity to credit risk, (3) the classification of any negative balance accounts (overdrafts), and (4) the carrying basis of cash equivalents (for example, at cost) and whether the carrying amount of cash equivalents approximates fair value. Disclosure of accounting policy for investments in debt and equity securities that are classified as available-for-sale. This policy also may describe the entity's accounting treatment for transfers between investment categories, how the entity determines whether impairments of available-for-sale securities are other than temporary, and how the fair values of such securities are determined.",
        "label": "Cash Cash Equivalents And Short Term Investments [Policy Text Block]",
        "terseLabel": "Cash, Cash Equivalents, and Short-term Investments"
       }
      }
     },
     "localname": "CashCashEquivalentsAndShortTermInvestmentsPolicyTextBlock",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesPolicies"
     ],
     "xbrltype": "textBlockItemType"
    },
    "veco_CashEquivalentsFairValueDisclosure": {
     "auth_ref": [],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Fair value portion of short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates.",
        "label": "Cash Equivalents, Fair Value Disclosure",
        "terseLabel": "Total Cash equivalents"
       }
      }
     },
     "localname": "CashEquivalentsFairValueDisclosure",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureFairValueMeasurementsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "veco_CashInterestExpenseAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "No definition available.",
        "label": "Cash Interest Expense"
       }
      }
     },
     "localname": "CashInterestExpenseAbstract",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDebtInterestExpenseDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "veco_CertificateOfDepositsAndTimeDepositsMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents the information pertaining to certificate of deposits and time deposits.",
        "label": "Certificate of deposits and time deposits"
       }
      }
     },
     "localname": "CertificateOfDepositsAndTimeDepositsMember",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureFairValueMeasurementsDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "veco_CommonStockEquivalentsMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "A security that can be converted into common stock. May include stock options, warrants, convertible bonds, preferred bonds, two-class common stock and contingent shares.",
        "label": "Common share equivalents"
       }
      }
     },
     "localname": "CommonStockEquivalentsMember",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomePerCommonShareSharesExcludedFromEpsDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "veco_CompoundSemiconductorMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents the entity's Compound Semiconductor reporting segment.",
        "label": "Compound Semiconductor"
       }
      }
     },
     "localname": "CompoundSemiconductorMember",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformationSegmentDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "veco_ContractWithCustomerLiabilityAndRefundLiabilityCurrent": {
     "auth_ref": [],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheets": {
       "order": 3.0,
       "parentTag": "us-gaap_LiabilitiesCurrent",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of obligation to transfer good or service to customer for which consideration has been received or is receivable. Also includes amount of liability for consideration received or receivable from customer which is not included in transaction price, when consideration is expected to be refunded to customer, classified as current.",
        "label": "Contract with Customer, Liability and Refund Liability, Current",
        "terseLabel": "Customer deposits and deferred revenue"
       }
      }
     },
     "localname": "ContractWithCustomerLiabilityAndRefundLiabilityCurrent",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "veco_ConvertibleSeniorUnsecuredNotesDue2023Member": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Convertible Senior Unsecured Notes, Due 2023 (2023 Notes).",
        "label": "2023 Notes"
       }
      }
     },
     "localname": "ConvertibleSeniorUnsecuredNotesDue2023Member",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDebt20232025And2027NotesDetails",
      "http://www.veeco.com/role/DisclosureDebtCarryingValueDetails",
      "http://www.veeco.com/role/DisclosureDebtConvertibleSeniorNotesDetails",
      "http://www.veeco.com/role/DisclosureDebtInterestExpenseDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "veco_ConvertibleSeniorUnsecuredNotesDue2025Member": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Convertible Senior Unsecured Notes, Due 2025 (2025 Notes).",
        "label": "2025 Notes"
       }
      }
     },
     "localname": "ConvertibleSeniorUnsecuredNotesDue2025Member",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDebt20232025And2027NotesDetails",
      "http://www.veeco.com/role/DisclosureDebtCarryingValueDetails",
      "http://www.veeco.com/role/DisclosureDebtConvertibleSeniorNotesDetails",
      "http://www.veeco.com/role/DisclosureDebtInterestExpenseDetails",
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfStockholdersEquity"
     ],
     "xbrltype": "domainItemType"
    },
    "veco_ConvertibleSeniorUnsecuredNotesDue2027Member": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Convertible Senior Unsecured Notes, Due 2027 (2027 Notes).",
        "label": "2027 Notes"
       }
      }
     },
     "localname": "ConvertibleSeniorUnsecuredNotesDue2027Member",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDebt20232025And2027NotesDetails",
      "http://www.veeco.com/role/DisclosureDebtCarryingValueDetails",
      "http://www.veeco.com/role/DisclosureDebtConvertibleSeniorNotesDetails",
      "http://www.veeco.com/role/DisclosureDebtInterestExpenseDetails",
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfStockholdersEquity"
     ],
     "xbrltype": "domainItemType"
    },
    "veco_CostMethodInvestmentsOwnershipPercentage": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The percentage of ownership in the investee accounted for under the cost method of accounting.",
        "label": "Cost Method Investments, Ownership Percentage",
        "terseLabel": "Percentage ownership of cost method investee"
       }
      }
     },
     "localname": "CostMethodInvestmentsOwnershipPercentage",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureInvestmentsOtherInvestmentDetails"
     ],
     "xbrltype": "percentItemType"
    },
    "veco_CustomerAMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents the customer A.",
        "label": "Customer A"
       }
      }
     },
     "localname": "CustomerAMember",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesConcentrationOfCreditRiskDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "veco_CustomerBMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents the customer B.",
        "label": "Customer B"
       }
      }
     },
     "localname": "CustomerBMember",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesConcentrationOfCreditRiskDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "veco_CustomerCMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents the customer C.",
        "label": "Customer C"
       }
      }
     },
     "localname": "CustomerCMember",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesConcentrationOfCreditRiskDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "veco_CustomerDMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents the customer D.",
        "label": "Customer D"
       }
      }
     },
     "localname": "CustomerDMember",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesConcentrationOfCreditRiskDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "veco_CustomerEMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents the customer E.",
        "label": "Customer E"
       }
      }
     },
     "localname": "CustomerEMember",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesConcentrationOfCreditRiskDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "veco_CustomerFMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents the customer F.",
        "label": "Customer F"
       }
      }
     },
     "localname": "CustomerFMember",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesConcentrationOfCreditRiskDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "veco_DataStorageMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents the entity's Data Storage reporting segment. Data Storage segment consists of ion beam etch, ion beam deposition, diamond-like carbon, physical vapor deposition and dicing and slicing products sold primarily to customers in the data storage industry.",
        "label": "Data Storage"
       }
      }
     },
     "localname": "DataStorageMember",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformationSegmentDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "veco_DebtInstrumentCarryingAmountDebtExtinguished": {
     "auth_ref": [],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Carrying amount of debt extinguished (decrease in carrying amount of debt).",
        "label": "Debt Instrument Carrying Amount, Debt Extinguished",
        "terseLabel": "Carrying amount of debt extinguished"
       }
      }
     },
     "localname": "DebtInstrumentCarryingAmountDebtExtinguished",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDebt20232025And2027NotesDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "veco_DebtInstrumentFloorRate": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Floor rate on debt instrument.",
        "label": "Debt Instrument Floor Rate",
        "terseLabel": "Floor rate on debt instrument (as a percent)"
       }
      }
     },
     "localname": "DebtInstrumentFloorRate",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDebtRevolvingCreditFacilityDetails"
     ],
     "xbrltype": "percentItemType"
    },
    "veco_DebtInstrumentInterestCoverageRatio": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Interest coverage ratio, as defined by the agreement.",
        "label": "Debt Instrument, Interest Coverage Ratio",
        "terseLabel": "Interest coverage ratio"
       }
      }
     },
     "localname": "DebtInstrumentInterestCoverageRatio",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDebtRevolvingCreditFacilityDetails"
     ],
     "xbrltype": "pureItemType"
    },
    "veco_DebtInstrumentNumberOfConsecutiveBusinessDays": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Period of time between issuance and maturity of debt instrument, in PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days.",
        "label": "Debt Instrument, Number of Consecutive Business Days",
        "terseLabel": "Number of consecutive business days"
       }
      }
     },
     "localname": "DebtInstrumentNumberOfConsecutiveBusinessDays",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDebtConvertibleSeniorNotesDetails"
     ],
     "xbrltype": "durationItemType"
    },
    "veco_DebtInstrumentPrincipalAmountDenominationForConversionIntoCommonStock": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents the multiples of the principal amount of debt that holders may convert at their option under circumstances specified under the agreement.",
        "label": "Debt Instrument Principal Amount Denomination For Conversion Into Common Stock",
        "terseLabel": "Multiples of principal holders may convert"
       }
      }
     },
     "localname": "DebtInstrumentPrincipalAmountDenominationForConversionIntoCommonStock",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDebtConvertibleSeniorNotesDetails"
     ],
     "xbrltype": "decimalItemType"
    },
    "veco_DebtInstrumentSecuredNetLeverageRatio": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Secured net leverage ratio, as defined by the agreement.",
        "label": "Debt Instrument, Secured Net Leverage Ratio",
        "terseLabel": "Secured net leverage ratio"
       }
      }
     },
     "localname": "DebtInstrumentSecuredNetLeverageRatio",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDebtRevolvingCreditFacilityDetails"
     ],
     "xbrltype": "pureItemType"
    },
    "veco_DebtInstrumentTotalNetLeverageRatio": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Total net leverage ratio, as defined by the agreement.",
        "label": "Debt Instrument, Total Net Leverage Ratio",
        "terseLabel": "Total net leverage ratio"
       }
      }
     },
     "localname": "DebtInstrumentTotalNetLeverageRatio",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDebtRevolvingCreditFacilityDetails"
     ],
     "xbrltype": "pureItemType"
    },
    "veco_DebtInstrumentsConvertibleFeaturesMaximumPercentageOfCommonStockCouldBeConverted": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Maximum percentage of common stock converted.",
        "label": "Debt Instruments, Convertible Features , Maximum Percentage of Common Stock could be Converted",
        "terseLabel": "Maximum percentage of common stock conversion"
       }
      }
     },
     "localname": "DebtInstrumentsConvertibleFeaturesMaximumPercentageOfCommonStockCouldBeConverted",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDebtConvertibleSeniorNotesDetails"
     ],
     "xbrltype": "percentItemType"
    },
    "veco_DebtIssuanceCostsTransactionCostsAllocatedToEquityComponent": {
     "auth_ref": [],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The amount of Transaction costs allocated to the equity component .",
        "label": "Debt Issuance Costs , Transaction Costs Allocated to The Equity Component",
        "terseLabel": "Transaction costs allocated to the equity component"
       }
      }
     },
     "localname": "DebtIssuanceCostsTransactionCostsAllocatedToEquityComponent",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDebtConvertibleSeniorNotesDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "veco_DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterOneThroughTwoYearsAmortizedCost": {
     "auth_ref": [],
     "calculation": {
      "http://www.veeco.com/role/DisclosureInvestmentsAvailableForSaleSecuritiesDetails": {
       "order": 2.0,
       "parentTag": "us-gaap_AvailableForSaleDebtSecuritiesAmortizedCostBasis",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amortized cost of investment in debt security measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale), with single maturity date and allocated without single maturity date, maturing in next rolling fiscal year through second year following latest fiscal year. For interim and annual periods when interim period is reported on rolling approach, from latest statement of financial position date.",
        "label": "Debt Securities, Available-for-sale, Maturity, Allocated and Single Maturity Date, Rolling after One Through Two Years, Amortized Cost",
        "terseLabel": "Amortized Cost, Due after one year through two years"
       }
      }
     },
     "localname": "DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterOneThroughTwoYearsAmortizedCost",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureInvestmentsAvailableForSaleSecuritiesDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "veco_DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterOneThroughTwoYearsFairValue": {
     "auth_ref": [],
     "calculation": {
      "http://www.veeco.com/role/DisclosureInvestmentsAvailableForSaleSecuritiesDetails": {
       "order": 2.0,
       "parentTag": "us-gaap_AvailableForSaleSecuritiesDebtSecurities",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Fair value of investment in debt security, measured at fair value with change in fair value recognized in other comprehensive income (available-for-sale), with single maturity date and allocated without single maturity date, maturing in rolling second through third year following latest fiscal year. For interim and annual periods when interim period is reported on rolling approach, from latest statement of financial position date.",
        "label": "Debt Securities, Available-for-sale, Maturity, Allocated and Single Maturity Date, Rolling after One Through Two Years, Fair Value",
        "terseLabel": "Estimated Fair Value, Due after one year through two years"
       }
      }
     },
     "localname": "DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateRollingAfterOneThroughTwoYearsFairValue",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureInvestmentsAvailableForSaleSecuritiesDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "veco_DeferredTaxAssetsOperatingLeases": {
     "auth_ref": [],
     "calculation": {
      "http://www.veeco.com/role/DisclosureIncomeTaxesDeferredTaxesDetails": {
       "order": 7.0,
       "parentTag": "us-gaap_DeferredTaxAssetsGross",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "a",
        "label": "Deferred Tax Assets, Operating Leases",
        "terseLabel": "Operating leases"
       }
      }
     },
     "localname": "DeferredTaxAssetsOperatingLeases",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesDeferredTaxesDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "veco_DeferredTaxLiabilitiesFinancingArrangementsNet": {
     "auth_ref": [],
     "calculation": {
      "http://www.veeco.com/role/DisclosureIncomeTaxesDeferredTaxesDetails": {
       "order": 2.0,
       "parentTag": "us-gaap_DeferredIncomeTaxLiabilities",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Net amount of deferred tax liability attributable to taxable temporary differences from financing arrangements.",
        "label": "Deferred Tax Liabilities, Financing Arrangements, Net",
        "terseLabel": "Convertible Senior Notes"
       }
      }
     },
     "localname": "DeferredTaxLiabilitiesFinancingArrangementsNet",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesDeferredTaxesDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "veco_DefinedContributionPlanEmployerMatchingContributionVestingPeriod": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents the vesting period for employer's matching contribution.",
        "label": "Defined Contribution Plan, Employer Matching Contribution, Vesting Period",
        "terseLabel": "Employer's matching contribution, vesting period (in years)"
       }
      }
     },
     "localname": "DefinedContributionPlanEmployerMatchingContributionVestingPeriod",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureRetirementPlansDefinedContributionPlanDetails"
     ],
     "xbrltype": "durationItemType"
    },
    "veco_DerivativeActionMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Litigation asserting claims for breach of fiduciary duty, waste of corporate assets, and unjust enrichment against current and former Veeco directors premised on purported misstatements and omissions in the registration statement relating to the Ultratech acquisition.",
        "label": "Derivative Action"
       }
      }
     },
     "localname": "DerivativeActionMember",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesLegalProceedingsDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "veco_DerivativeContractCappedCallMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Capped call contract.",
        "label": "Capped Call Transactions"
       }
      }
     },
     "localname": "DerivativeContractCappedCallMember",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDebtCappedCallTransactionsDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "veco_DifferenceBetweenGuidanceInEffectBeforeAndAfterAccountingStandardsUpdate202006Member": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Effect in current period from application of guidance for Accounting Standards Update 2020-06 compared with guidance prior to adoption of Accounting Standards Update 2020-06.",
        "label": "Difference between adoption of ASU 2020-06 and legacy accounting"
       }
      }
     },
     "localname": "DifferenceBetweenGuidanceInEffectBeforeAndAfterAccountingStandardsUpdate202006Member",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesRecentlyAdoptedAccountingStandardsDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "veco_EarningsPerShareDisclosureAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "No definition available.",
        "label": "Earnings Per Share, Disclosure [Abstract]",
        "terseLabel": "Net income (loss) per common share:",
        "verboseLabel": "Income per common share:"
       }
      }
     },
     "localname": "EarningsPerShareDisclosureAbstract",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomePerCommonShareBasicAndDilutedDetails",
      "http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesRecentlyAdoptedAccountingStandardsDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "veco_EffectiveIncomeTaxRateReconciliationPartialExtinguishmentOfDebtAmount": {
     "auth_ref": [],
     "calculation": {
      "http://www.veeco.com/role/DisclosureIncomeTaxesReconciliationToStatutoryTaxExpenseDetails": {
       "order": 10.0,
       "parentTag": "us-gaap_IncomeTaxExpenseBenefit",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of the difference between reported income tax expense (benefit) and expected income tax expense (benefit) computed by applying the domestic federal statutory income tax rates to pretax income (loss) from continuing operations attributable to partial extinguishment of debt.",
        "label": "Effective Income Tax Rate Reconciliation, Partial Extinguishment of Debt, Amount",
        "terseLabel": "Partial extinguishment of 2023 Notes"
       }
      }
     },
     "localname": "EffectiveIncomeTaxRateReconciliationPartialExtinguishmentOfDebtAmount",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesReconciliationToStatutoryTaxExpenseDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "veco_EmployeeStockPurchasePlan2016Member": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents the details pertaining the entity's 2016 employee stock purchase plan.",
        "label": "ESPP"
       }
      }
     },
     "localname": "EmployeeStockPurchasePlan2016Member",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockPlansEsppDetails",
      "http://www.veeco.com/role/DisclosureStockPlansEsppFvAssumptionsDetails",
      "http://www.veeco.com/role/DisclosureStockPlansSharesReservedForFutureIssuanceDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "veco_EpiluvacAbMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents the information pertaining to Epiluvac AB.",
        "label": "Epiluvac AB"
       }
      }
     },
     "localname": "EpiluvacAbMember",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSubsequentEventsDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "veco_FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassLineItems": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "No definition available.",
        "label": "Finite Lived and Indefinite Lived Intangible Assets By Major Class [Line Items]",
        "terseLabel": "Intangible assets"
       }
      }
     },
     "localname": "FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassLineItems",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssetsIntangibleAssetsDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "veco_FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassTable": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Disclosure of finite-lived and indefinite-lived intangible assets, excluding goodwill, in total and by major class.",
        "label": "Finite Lived and Indefinite Lived Intangible Assets by Major Class [Table]"
       }
      }
     },
     "localname": "FiniteLivedAndIndefiniteLivedIntangibleAssetsByMajorClassTable",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssetsIntangibleAssetsDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "veco_FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment": {
     "auth_ref": [],
     "calculation": {
      "http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssetsIntangibleAssetsDetails": {
       "order": 1.0,
       "parentTag": "us-gaap_FiniteLivedIntangibleAssetsNet",
       "weight": -1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Accumulated amount of amortization and impairment of assets, excluding financial assets and goodwill, lacking physical substance with a finite life.",
        "label": "Finite-Lived Intangible Assets, Accumulated Amortization and Impairment",
        "terseLabel": "Accumulated Amortization and Impairment, Intangible assets"
       }
      }
     },
     "localname": "FiniteLivedIntangibleAssetsAccumulatedAmortizationAndImpairment",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssetsIntangibleAssetsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "veco_GeographicLocationOneMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Geographic location with specified receivable payments periods, one.",
        "label": "Geographic location, One"
       }
      }
     },
     "localname": "GeographicLocationOneMember",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesReceivablesDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "veco_GeographicLocationTwoMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Geographic location with specified receivable payments periods, two.",
        "label": "Geographic location, Two"
       }
      }
     },
     "localname": "GeographicLocationTwoMember",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesReceivablesDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "veco_ImpairmentLossesInvestmentsNonCash": {
     "auth_ref": [],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "order": 8.0,
       "parentTag": "us-gaap_NetCashProvidedByUsedInOperatingActivities",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The amount of non-cash impairment charge on investments.",
        "label": "Impairment Losses, Investments, Non-cash",
        "terseLabel": "Impairment of equity investments"
       }
      }
     },
     "localname": "ImpairmentLossesInvestmentsNonCash",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureInvestmentsOtherInvestmentDetails",
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "veco_IncomeTaxReconciliationChangeInAccrualForUnrecognizedTaxBenefits": {
     "auth_ref": [],
     "calculation": {
      "http://www.veeco.com/role/DisclosureIncomeTaxesReconciliationToStatutoryTaxExpenseDetails": {
       "order": 6.0,
       "parentTag": "us-gaap_IncomeTaxExpenseBenefit",
       "weight": -1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents the change in accrual for unrecognized tax benefits.",
        "label": "Income Tax Reconciliation, Change in Accrual for Unrecognized Tax Benefits",
        "negatedLabel": "Change in accrual for unrecognized tax benefits"
       }
      }
     },
     "localname": "IncomeTaxReconciliationChangeInAccrualForUnrecognizedTaxBenefits",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomeTaxesReconciliationToStatutoryTaxExpenseDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "veco_IncreaseDecreaseInAccountsReceivableAndContractAssets": {
     "auth_ref": [],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "order": 10.0,
       "parentTag": "us-gaap_NetCashProvidedByUsedInOperatingActivities",
       "weight": -1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The increase (decrease) during the reporting period in amount due within one year (or one business cycle) from customers for the credit sale of goods and services and contract assets.",
        "label": "Increase Decrease in Accounts Receivable and Contract Assets",
        "negatedLabel": "Accounts receivable and contract assets"
       }
      }
     },
     "localname": "IncreaseDecreaseInAccountsReceivableAndContractAssets",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "veco_IncreaseDecreaseInCustomerDepositsAndDeferredRevenue": {
     "auth_ref": [],
     "calculation": {
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "order": 14.0,
       "parentTag": "us-gaap_NetCashProvidedByUsedInOperatingActivities",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of increase decrease in customer deposits and deferred revenue.",
        "label": "Increase Decrease In Customer Deposits And Deferred Revenue",
        "terseLabel": "Customer deposits and deferred revenue"
       }
      }
     },
     "localname": "IncreaseDecreaseInCustomerDepositsAndDeferredRevenue",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "veco_InducementStockIncentivePlan2013Member": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents the details pertaining to the entity's 2013 Inducement Stock Incentive Plan.",
        "label": "Inducement Plan"
       }
      }
     },
     "localname": "InducementStockIncentivePlan2013Member",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockPlans2019PlanDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "veco_IrrevocableLettersOfCreditMaturityPeriodMaximum": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents the maximum period over which irrevocable letters of credit mature.",
        "label": "Irrevocable Letters of Credit Maturity Period Maximum",
        "terseLabel": "Maturity period of irrevocable letters of credit, maximum"
       }
      }
     },
     "localname": "IrrevocableLettersOfCreditMaturityPeriodMaximum",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesConcentrationOfCreditRiskDetails"
     ],
     "xbrltype": "durationItemType"
    },
    "veco_IrrevocableLettersOfCreditMaturityPeriodMinimum": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents the minimum period over which irrevocable letters of credit mature.",
        "label": "Irrevocable Letters of Credit Maturity Period Minimum",
        "terseLabel": "Maturity period of irrevocable letters of credit, minimum"
       }
      }
     },
     "localname": "IrrevocableLettersOfCreditMaturityPeriodMinimum",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesConcentrationOfCreditRiskDetails"
     ],
     "xbrltype": "durationItemType"
    },
    "veco_LiabilitiesLineItems": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.",
        "label": "Liabilities [Line Items]"
       }
      }
     },
     "localname": "LiabilitiesLineItems",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesOtherLiabilitiesDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "veco_LiabilitiesTable": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Table presenting the description of liabilities.",
        "label": "Liabilities [Table]"
       }
      }
     },
     "localname": "LiabilitiesTable",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesOtherLiabilitiesDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "veco_LineOfCreditFacilityContingentIncreaseAdditionalBorrowingCapacity": {
     "auth_ref": [],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The contingent increase above the maximum borrowing capacity under the credit facility, if any one or more of the existing banks or new banks agree to provide such increased commitment amount.",
        "label": "Line of Credit Facility Contingent Increase, Additional Borrowing Capacity",
        "terseLabel": "Additional increase in borrowing subject to certain conditions"
       }
      }
     },
     "localname": "LineOfCreditFacilityContingentIncreaseAdditionalBorrowingCapacity",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDebtRevolvingCreditFacilityDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "veco_LongLivedAssetsAndCostMethodInvestmentsPolicyTextBlock": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Disclosure of the accounting policy for long-lived assets (those subject to amortization or depreciation) and cost method investments.",
        "label": "Long-Lived Assets and Cost Method Investments [Policy Text Block]",
        "terseLabel": "Long-lived Assets"
       }
      }
     },
     "localname": "LongLivedAssetsAndCostMethodInvestmentsPolicyTextBlock",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesPolicies"
     ],
     "xbrltype": "textBlockItemType"
    },
    "veco_MedicalAndDentalBenefitLiabilitiesNoncurrent": {
     "auth_ref": [],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of liabilities for medical and dental benefits classified as other, due after one year or the normal operating cycle, if longer",
        "label": "Medical and Dental Benefit Liabilities, Noncurrent",
        "terseLabel": "Medical and dental benefits"
       }
      }
     },
     "localname": "MedicalAndDentalBenefitLiabilitiesNoncurrent",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesOtherLiabilitiesDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "veco_MoneyMarketFundsExcludingGovernmentFundsMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Fund that invests in short-term money-market instruments. Excludes government funds.",
        "label": "Money market cash"
       }
      }
     },
     "localname": "MoneyMarketFundsExcludingGovernmentFundsMember",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureFairValueMeasurementsDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "veco_NetIncomeLossAvailableToCommonStockholdersAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "No definition available.",
        "label": "Net Income (Loss) Available to Common Stockholders [Abstract]",
        "terseLabel": "Numerator:"
       }
      }
     },
     "localname": "NetIncomeLossAvailableToCommonStockholdersAbstract",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomePerCommonShareBasicAndDilutedDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "veco_NonCashInterestExpenseAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "No definition available.",
        "label": "Non-Cash Interest Expense"
       }
      }
     },
     "localname": "NonCashInterestExpenseAbstract",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDebtInterestExpenseDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "veco_NonCashOperatingAndFinancingActivitiesAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "No definition available.",
        "label": "Non Cash Operating and Financing Activities [Abstract]",
        "verboseLabel": "Non-cash activities"
       }
      }
     },
     "localname": "NonCashOperatingAndFinancingActivitiesAbstract",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "stringItemType"
    },
    "veco_NumberOfCustomers": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Number of customers.",
        "label": "Number of Customers",
        "terseLabel": "Number of customers"
       }
      }
     },
     "localname": "NumberOfCustomers",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesConcentrationOfCreditRiskDetails"
     ],
     "xbrltype": "integerItemType"
    },
    "veco_NumberOfTradingDaysConsideredToCalculateMarketCapitalization": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Number of trading days for calculating the average share price of the Company's common stock prior to the measurement date used in adjusted market capitalization calculation.",
        "label": "Number of Trading Days Considered To Calculate Market Capitalization",
        "terseLabel": "Number of trading days used in adjusted market capitalization calculation"
       }
      }
     },
     "localname": "NumberOfTradingDaysConsideredToCalculateMarketCapitalization",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesGoodwillAndIndefiniteLivedIntangiblesDetails"
     ],
     "xbrltype": "durationItemType"
    },
    "veco_OneNonCoreProductLineMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "One Non-core product line of the entity.",
        "label": "One non-core product line"
       }
      }
     },
     "localname": "OneNonCoreProductLineMember",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDispositionsDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "veco_OtherComprehensiveIncomeLossIncludingForeignCurrencyGainsLossesOnTransactionsIncludedInOperatingResultsNetOfTax": {
     "auth_ref": [],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount after tax and reclassification adjustments of other comprehensive income (loss). Includes foreign currency gains (losses) on transactions included in operating results.",
        "label": "Other Comprehensive Income (Loss) Including Foreign Currency Gains (Losses) on Transactions Included in Operating Results, Net of Tax",
        "verboseLabel": "Other comprehensive income (loss), net of tax"
       }
      }
     },
     "localname": "OtherComprehensiveIncomeLossIncludingForeignCurrencyGainsLossesOnTransactionsIncludedInOperatingResultsNetOfTax",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfStockholdersEquity"
     ],
     "xbrltype": "monetaryItemType"
    },
    "veco_OtherNonMarketableInvestmentMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Other non-marketable investment.",
        "label": "Separate non-marketable investment"
       }
      }
     },
     "localname": "OtherNonMarketableInvestmentMember",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureInvestmentsOtherInvestmentDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "veco_PercentageOfAmountHeldInEscrow": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Percentage of amount held in escrow.",
        "label": "Percentage Of Amount Held In Escrow",
        "terseLabel": "Amount held in escrow (as a percent)"
       }
      }
     },
     "localname": "PercentageOfAmountHeldInEscrow",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDispositionsDetails"
     ],
     "xbrltype": "percentItemType"
    },
    "veco_PercentageOfTransactionPrice": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Percentage of transaction price due upon closing.",
        "label": "Percentage Of Transaction Price",
        "terseLabel": "Transaction price due upon closing (as a percent)"
       }
      }
     },
     "localname": "PercentageOfTransactionPrice",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDispositionsDetails"
     ],
     "xbrltype": "percentItemType"
    },
    "veco_PerformanceShareUnitsMarketConditionsMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Performance share awards with market conditions.",
        "label": "Performance awards with market conditions"
       }
      }
     },
     "localname": "PerformanceShareUnitsMarketConditionsMember",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockPlansPerformanceAwardsAssumptionsDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "veco_PerformanceShareUnitsMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents the information pertaining to performance share units member.",
        "label": "Performance Share Units"
       }
      }
     },
     "localname": "PerformanceShareUnitsMember",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockPlansUnrecognizedShareBasedCompensationCostsDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "veco_PotentiallyDilutiveSharesMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents information pertaining to potentially dilutive shares not otherwise specified.",
        "label": "Potentially dilutive shares"
       }
      }
     },
     "localname": "PotentiallyDilutiveSharesMember",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomePerCommonShareSharesExcludedFromEpsDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "veco_ProductWarrantyPeriod": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents the warranty period from the date of final acceptance on the products purchased by customers.",
        "label": "Product Warranty Period",
        "terseLabel": "Warranty period"
       }
      }
     },
     "localname": "ProductWarrantyPeriod",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesWarrantyCostsDetails"
     ],
     "xbrltype": "durationItemType"
    },
    "veco_RangeOfExercisePricesRangeOneMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents information pertaining to the first range of stock option exercise prices.",
        "label": "$20.00 - $30.00"
       }
      }
     },
     "localname": "RangeOfExercisePricesRangeOneMember",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockPlansOptionExerciseRangesDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "veco_RangeOfExercisePricesRangeTwoMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents information pertaining to the second range of stock option exercise prices.",
        "label": "$30.01 - $40.00"
       }
      }
     },
     "localname": "RangeOfExercisePricesRangeTwoMember",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockPlansOptionExerciseRangesDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "veco_ReceivablePurchaseAgreementAmountAvailable": {
     "auth_ref": [],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of trade receivables available to be sold from customers without recourse under the terms of the receivable purchase agreement.",
        "label": "Receivable Purchase Agreement, Amount Available",
        "terseLabel": "Amount of trade receivables available to be sold under agreement"
       }
      }
     },
     "localname": "ReceivablePurchaseAgreementAmountAvailable",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesReceivablePurchaseAgreementDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "veco_ReceivablePurchaseAgreementMaximumAmount": {
     "auth_ref": [],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Maximum amount of trade receivables from customers to be sold without recourse under the terms of the receivable purchase agreement.",
        "label": "Receivable Purchase Agreement, Maximum Amount",
        "terseLabel": "Maximum amount of trade receivables to be sold under agreement"
       }
      }
     },
     "localname": "ReceivablePurchaseAgreementMaximumAmount",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesReceivablePurchaseAgreementDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "veco_ReimbursementForLeaseholdImprovements": {
     "auth_ref": [],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of reimbursement from landlord for leasehold improvements as a reduction to cash outflow,",
        "label": "Reimbursement for Leasehold Improvements",
        "terseLabel": "Amount of reimbursement for leasehold improvements"
       }
      }
     },
     "localname": "ReimbursementForLeaseholdImprovements",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesLeaseCostsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "veco_RestOfWorldMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Remaining regions of the world not specifically identified.",
        "label": "Rest Of World"
       }
      }
     },
     "localname": "RestOfWorldMember",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformationGeographicDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "veco_RestrictedStockAwardMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents the information pertaining to restricted stock awards member.",
        "label": "Restricted Stock Awards"
       }
      }
     },
     "localname": "RestrictedStockAwardMember",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockPlansUnrecognizedShareBasedCompensationCostsDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "veco_RestrictedStockAwardsAndRestrictedStockUnitsMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Restricted stock awards and restricted stock units awarded by a company to their employees as a form of incentive compensation.",
        "label": "Restricted Stock Awards and Restricted Stock Units"
       }
      }
     },
     "localname": "RestrictedStockAwardsAndRestrictedStockUnitsMember",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureShareBasedCompensationRestrictedSharesAndPerformanceSharesDetails",
      "http://www.veeco.com/role/DisclosureStockPlans2019PlanDetails",
      "http://www.veeco.com/role/DisclosureStockPlansUnrecognizedShareBasedCompensationCostsDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "veco_RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Restricted stock awards, restricted stock units, performance stock awards and performance stock units awarded by a company to their employees as a form of incentive compensation.",
        "label": "RSAs, RSUs, PSAs and PSUs"
       }
      }
     },
     "localname": "RestrictedStockAwardsRestrictedStockUnitsPerformanceStockAwardsAndPerformanceStockUnitsMember",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureShareBasedCompensationRestrictedSharesAndPerformanceSharesDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "veco_RevenueRemainingPerformanceObligationExpectedTimingPercentage": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Percentage of remaining performance obligation expected to be recognized.",
        "label": "Revenue Remaining Performance Obligation Expected Timing Percentage",
        "terseLabel": "Percentage of remaining performance obligation expected to be recognized"
       }
      }
     },
     "localname": "RevenueRemainingPerformanceObligationExpectedTimingPercentage",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesPerformanceObligationAmountDetails"
     ],
     "xbrltype": "percentItemType"
    },
    "veco_RevolvingCreditFacilityDecember2021LetterOfCreditMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Revolving Credit Facility Letter of Credit, entered into December 16, 2021.",
        "label": "Credit Facility, Letter of Credit"
       }
      }
     },
     "localname": "RevolvingCreditFacilityDecember2021LetterOfCreditMember",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDebtRevolvingCreditFacilityDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "veco_RevolvingCreditFacilityDecember2021Member": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Revolving Credit Facility, entered into December 16, 2021.",
        "label": "Credit Facility"
       }
      }
     },
     "localname": "RevolvingCreditFacilityDecember2021Member",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDebtRevolvingCreditFacilityDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "veco_RsuAndPsuAwardsMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "RSU and PSU awards.",
        "label": "RSUs and PSUs"
       }
      }
     },
     "localname": "RsuAndPsuAwardsMember",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockPlans2019PlanDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "veco_ScheduleOfDeferredRevenueTableTextBlock": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The Tabular disclosure for deferred revenues at the end of the reporting period, and description and amounts of significant changes that occurred during the reporting period. Deferred revenue is a liability as of the balance sheet date related to a revenue producing activity for which revenue has not yet been recognized. Generally, an entity records deferred revenue when it receives consideration from a customer before achieving certain criteria that must be met for revenue to be recognized in conformity with GAAP.",
        "label": "Schedule Of Deferred Revenue [Table Text Block]",
        "terseLabel": "Schedule of changes in deferred revenue"
       }
      }
     },
     "localname": "ScheduleOfDeferredRevenueTableTextBlock",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureAccruedExpensesAndOtherLiabilitiesTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "veco_ScheduleOfIntangibleAssetsExcludingGoodwillTableTextBlock": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of assets, excluding financial assets and goodwill, which lack physical substance with a finite life or exist in perpetuity, by major class.",
        "label": "Schedule of Intangible Assets, Excluding Goodwill [Table Text Block]",
        "verboseLabel": "Schedule of intangible assets excluding goodwill"
       }
      }
     },
     "localname": "ScheduleOfIntangibleAssetsExcludingGoodwillTableTextBlock",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureGoodwillAndIntangibleAssetsTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "veco_ScheduleOfShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsValuationAssumptionsTableTextBlock": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of the significant assumptions used during the year to estimate the fair value of equity instruments other than options, including, but not limited to: (a) expected term, (b) expected volatility of the entity's shares, (c) expected dividends, (d) risk-free rate(s), and (e) discount for post-vesting restrictions.",
        "label": "Schedule of Share-based Payment Award, Equity Instruments Other Than Options, Valuation Assumptions [Table Text Block]",
        "terseLabel": "Summary of valuation assumptions for performance awards"
       }
      }
     },
     "localname": "ScheduleOfShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsValuationAssumptionsTableTextBlock",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockPlansTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "veco_ScheduleOfStockOptionExercisedTableTextBlock": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of stock option exercised.",
        "label": "Schedule of Stock Option Exercised [Table Text Block]",
        "terseLabel": "Summary of stock options exercised"
       }
      }
     },
     "localname": "ScheduleOfStockOptionExercisedTableTextBlock",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockPlansTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "veco_ScientificAndOtherMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents the entity's Scientific &amp; Other reporting segment.",
        "label": "Scientific &amp; Other"
       }
      }
     },
     "localname": "ScientificAndOtherMember",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformationSegmentDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "veco_SecuritiesExcludedFromComputationOfBasicEarningsPerShareAmount": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Securities excluded from the computation of basic net loss per share since securities' holders are not obligated to fund those losses.",
        "label": "Securities Excluded from Computation of Basic Earnings Per Share, Amount",
        "terseLabel": "Unvested participating shares excluded from basic weighted average shares outstanding since the securityholders are not obligated to fund losses"
       }
      }
     },
     "localname": "SecuritiesExcludedFromComputationOfBasicEarningsPerShareAmount",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureIncomePerCommonShareSharesExcludedFromEpsDetails"
     ],
     "xbrltype": "sharesItemType"
    },
    "veco_SemiconductorMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents the entity's Semiconductor reporting segment.",
        "label": "Semiconductor"
       }
      }
     },
     "localname": "SemiconductorMember",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSegmentReportingAndGeographicInformationSegmentDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsPerformanceAwardAdjustmentsInPeriod": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The number of performance award adjustments made during the period on other than stock (or unit) option plans resulting in decrease in awards outstanding.",
        "label": "Share Based Compensation Arrangement By Share Based Payment Award Equity Instruments Other Than Options Performance Award Adjustments In Period",
        "negatedLabel": "Performance award adjustments (in shares)"
       }
      }
     },
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsPerformanceAwardAdjustmentsInPeriod",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureShareBasedCompensationRestrictedSharesAndPerformanceSharesDetails"
     ],
     "xbrltype": "sharesItemType"
    },
    "veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsPerformanceAwardAdjustmentsWeightedAverageGrantDateFairValue": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The weighted average fair value of performance award adjustments during the period for nonvested equity-based awards other than stock (or unit) option plans.",
        "label": "Share Based Compensation Arrangement By Share Based Payment Award Equity Instruments Other Than Options Performance Award Adjustments Weighted Average Grant Date Fair Value",
        "terseLabel": "Performance award adjustments (in dollars per share)"
       }
      }
     },
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsPerformanceAwardAdjustmentsWeightedAverageGrantDateFairValue",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureShareBasedCompensationRestrictedSharesAndPerformanceSharesDetails"
     ],
     "xbrltype": "perShareItemType"
    },
    "veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferPeriod": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Duration of offer period under the plan, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days. Includes, but not limited to, weeks in a year or quarter.",
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Offer Period",
        "terseLabel": "Offer period"
       }
      }
     },
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferPeriod",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockPlansEsppDetails"
     ],
     "xbrltype": "durationItemType"
    },
    "veco_ShareBasedCompensationArrangementByShareBasedPaymentAwardServiceConditionsAndGradedVestingNumberOfAwards": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Number of awards with which entity has elected to treat awards with only service conditions and with graded vesting.",
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Service Conditions and Graded Vesting, Number of Awards",
        "terseLabel": "Number of awards with which entity has elected to treat awards with only service conditions and with graded vesting"
       }
      }
     },
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardServiceConditionsAndGradedVestingNumberOfAwards",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureSignificantAccountingPoliciesAccountingForShareBasedCompensationDetails"
     ],
     "xbrltype": "integerItemType"
    },
    "veco_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Share Based Compensation, Shares Authorized under Stock Option Plans Exercise, Price Range Exercisable Options [Abstract]",
        "terseLabel": "Options Exercisable"
       }
      }
     },
     "localname": "ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeExercisableOptionsAbstract",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockPlansOptionExerciseRangesDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "veco_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "No definition available.",
        "label": "Share-Based Compensation, Shares Authorized under Stock Option Plans Exercise, Price Range Outstanding Options [Abstract]",
        "terseLabel": "Options Outstanding"
       }
      }
     },
     "localname": "ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsAbstract",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockPlansOptionExerciseRangesDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "veco_SharesReservedForFutureIssuanceAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Shares Reserved For Future Issuance",
        "label": "Shares Reserved For Future Issuance Abstract",
        "terseLabel": "Shares reserved for future issuance"
       }
      }
     },
     "localname": "SharesReservedForFutureIssuanceAbstract",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockPlansSharesReservedForFutureIssuanceDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "veco_StockIncentivePlan2010Member": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents the details pertaining to the entity's 2010 stock incentive plan that replaced the 2000 stock incentive plan, as the entity's active stock plan which, following the 2019 amendment, was renamed the 2019 Stock Incentive Plan.",
        "label": "2019 Plan"
       }
      }
     },
     "localname": "StockIncentivePlan2010Member",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureStockPlans2019PlanDetails",
      "http://www.veeco.com/role/DisclosureStockPlansSharesReservedForFutureIssuanceDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "veco_TermOfAmountToBeHeldInEscrow": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Period over which portion of transaction price is held in escrow.",
        "label": "Term Of Amount To Be Held In Escrow",
        "terseLabel": "Period over which portion of transaction price is held in escrow"
       }
      }
     },
     "localname": "TermOfAmountToBeHeldInEscrow",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureDispositionsDetails"
     ],
     "xbrltype": "durationItemType"
    },
    "veco_TopTenCustomersMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents the top ten customers of the entity for that respective year in terms of percentage of total accounts receivable.",
        "label": "Top Ten Customers"
       }
      }
     },
     "localname": "TopTenCustomersMember",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesConcentrationOfCreditRiskDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "veco_TradeReceivablesSoldUnderReceivablePurchaseAgreement": {
     "auth_ref": [],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of accounts receivable that has been sold to other entities.",
        "label": "Trade Receivables Sold Under Receivable Purchase Agreement",
        "terseLabel": "Receivables sold"
       }
      }
     },
     "localname": "TradeReceivablesSoldUnderReceivablePurchaseAgreement",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesReceivablePurchaseAgreementDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "veco_TradeReceivablesUnderReceivablePurchaseAgreementOutstanding": {
     "auth_ref": [],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of accounts receivable sold under receivable purchase agreement that remains outstanding.",
        "label": "Trade Receivables Under Receivable Purchase Agreement, Outstanding",
        "terseLabel": "Receivables sold remaining outstanding"
       }
      }
     },
     "localname": "TradeReceivablesUnderReceivablePurchaseAgreementOutstanding",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesReceivablePurchaseAgreementDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "veco_TransferFromInventories": {
     "auth_ref": [],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Net transfer of inventory to property, plant and equipment  in non-cash transactions.",
        "label": "Transfer From Inventories",
        "terseLabel": "Net transfer of inventory to property, plant and equipment"
       }
      }
     },
     "localname": "TransferFromInventories",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "veco_UltratechAcquisitionLitigationMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Litigation alleging, among other things, false/misleading statements in the registration statement and prospectus relating to the Ultratech acquisition. Class action complaints substantially similar to the Wolther Action.",
        "label": "Ultratech acquisition litigation"
       }
      }
     },
     "localname": "UltratechAcquisitionLitigationMember",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesLegalProceedingsDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "veco_WoltherActionMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Litigation consolidating class action complaints alleging, among other things, false/misleading statements in the registration statement and prospectus relating to the Ultratech acquisition, relating primarily to the alleged failure to disclose delays in the advanced packaging business, increased MOCVD competition in China, and an intellectual property dispute.",
        "label": "Wolther Action"
       }
      }
     },
     "localname": "WoltherActionMember",
     "nsuri": "http://www.veeco.com/20221231",
     "presentation": [
      "http://www.veeco.com/role/DisclosureCommitmentsAndContingenciesLegalProceedingsDetails"
     ],
     "xbrltype": "domainItemType"
    }
   },
   "unitCount": 10
  }
 },
 "std_ref": {
  "r0": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "11",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "20",
   "Topic": "205",
   "URI": "https://asc.fasb.org/extlink&oid=109222160&loc=SL51721533-107759",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r1": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Topic": "205",
   "URI": "https://asc.fasb.org/extlink&oid=109222650&loc=d3e1361-107760",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r10": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "7",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Topic": "205",
   "URI": "https://asc.fasb.org/extlink&oid=109222650&loc=SL51721683-107760",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r100": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "11",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "320",
   "URI": "https://asc.fasb.org/extlink&oid=124260329&loc=d3e26853-111562",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r101": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "320",
   "URI": "https://asc.fasb.org/extlink&oid=124260329&loc=d3e26626-111562",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r102": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(aa)",
   "Topic": "320",
   "URI": "https://asc.fasb.org/extlink&oid=126970911&loc=d3e27161-111563",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r103": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)",
   "Topic": "320",
   "URI": "https://asc.fasb.org/extlink&oid=126970911&loc=d3e27161-111563",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r104": {
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "Topic": "320",
   "URI": "https://asc.fasb.org/topic&trid=2196928",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r105": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SAB Topic 5.BB)",
   "Topic": "330",
   "URI": "https://asc.fasb.org/extlink&oid=27011343&loc=d3e100047-122729",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r106": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Topic": "350",
   "URI": "https://asc.fasb.org/extlink&oid=121556970&loc=d3e13816-109267",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r107": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "30",
   "Topic": "350",
   "URI": "https://asc.fasb.org/extlink&oid=6388964&loc=d3e16225-109274",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r108": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "30",
   "Subparagraph": "(a)",
   "Topic": "350",
   "URI": "https://asc.fasb.org/extlink&oid=66006027&loc=d3e16265-109275",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r109": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "30",
   "Subparagraph": "(a)",
   "Topic": "350",
   "URI": "https://asc.fasb.org/extlink&oid=66006027&loc=d3e16323-109275",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r11": {
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "SubTopic": "20",
   "Topic": "205",
   "URI": "https://asc.fasb.org/subtopic&trid=2122178",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r110": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "30",
   "Subparagraph": "(a)(1)",
   "Topic": "350",
   "URI": "https://asc.fasb.org/extlink&oid=66006027&loc=d3e16323-109275",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r111": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "30",
   "Subparagraph": "(a)(2)",
   "Topic": "350",
   "URI": "https://asc.fasb.org/extlink&oid=66006027&loc=d3e16323-109275",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r112": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "30",
   "Subparagraph": "(a)(3)",
   "Topic": "350",
   "URI": "https://asc.fasb.org/extlink&oid=66006027&loc=d3e16323-109275",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r113": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "30",
   "Subparagraph": "(b)",
   "Topic": "350",
   "URI": "https://asc.fasb.org/extlink&oid=66006027&loc=d3e16323-109275",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r114": {
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "Topic": "350",
   "URI": "https://asc.fasb.org/topic&trid=2144416",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r115": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "360",
   "URI": "https://asc.fasb.org/extlink&oid=126905981&loc=d3e2420-110228",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r116": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "5",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "360",
   "URI": "https://asc.fasb.org/extlink&oid=126905981&loc=d3e2443-110228",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r117": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "360",
   "URI": "https://asc.fasb.org/extlink&oid=6391035&loc=d3e2868-110229",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r118": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "360",
   "URI": "https://asc.fasb.org/extlink&oid=6391035&loc=d3e2868-110229",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r119": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)",
   "Topic": "360",
   "URI": "https://asc.fasb.org/extlink&oid=6391035&loc=d3e2868-110229",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r12": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=6361739&loc=d3e7789-107766",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r120": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "360",
   "URI": "https://asc.fasb.org/extlink&oid=6391035&loc=d3e2868-110229",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r121": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "360",
   "URI": "https://asc.fasb.org/extlink&oid=109226691&loc=d3e2941-110230",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r122": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3A",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "360",
   "URI": "https://asc.fasb.org/extlink&oid=109226691&loc=SL51724579-110230",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r123": {
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "Topic": "360",
   "URI": "https://asc.fasb.org/topic&trid=2155823",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r124": {
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "Topic": "440",
   "URI": "https://asc.fasb.org/topic&trid=2144648",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r125": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "5",
   "Publisher": "FASB",
   "Section": "25",
   "SubTopic": "10",
   "Topic": "460",
   "URI": "https://asc.fasb.org/extlink&oid=126907644&loc=d3e11281-110244",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r126": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "460",
   "URI": "https://asc.fasb.org/extlink&oid=124440162&loc=d3e12021-110248",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r127": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "460",
   "URI": "https://asc.fasb.org/extlink&oid=124440162&loc=d3e12053-110248",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r128": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)",
   "Topic": "460",
   "URI": "https://asc.fasb.org/extlink&oid=124440162&loc=d3e12069-110248",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r129": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "7",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "460",
   "URI": "https://asc.fasb.org/extlink&oid=126907703&loc=d3e12524-110249",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r13": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(19))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r130": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "8",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "((c)(2))",
   "Topic": "460",
   "URI": "https://asc.fasb.org/extlink&oid=126907703&loc=d3e12565-110249",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r131": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "8",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "((c)(3))",
   "Topic": "460",
   "URI": "https://asc.fasb.org/extlink&oid=126907703&loc=d3e12565-110249",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r132": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "8",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "((c)(4))",
   "Topic": "460",
   "URI": "https://asc.fasb.org/extlink&oid=126907703&loc=d3e12565-110249",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r133": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "8",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "460",
   "URI": "https://asc.fasb.org/extlink&oid=126907703&loc=d3e12565-110249",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r134": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "8",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(1)",
   "Topic": "460",
   "URI": "https://asc.fasb.org/extlink&oid=126907703&loc=d3e12565-110249",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r135": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "8",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(5)",
   "Topic": "460",
   "URI": "https://asc.fasb.org/extlink&oid=126907703&loc=d3e12565-110249",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r136": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "8",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "460",
   "URI": "https://asc.fasb.org/extlink&oid=126907703&loc=d3e12565-110249",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r137": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "12A",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=99376301&loc=SL5988623-112600",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r138": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "10",
   "Publisher": "FASB",
   "Section": "25",
   "SubTopic": "20",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466302&loc=d3e4852-112606",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r139": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "22",
   "Publisher": "FASB",
   "Section": "25",
   "SubTopic": "20",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466103&loc=SL6014347-161799",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r14": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(20))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r140": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "5",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(b)",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466204&loc=SL6031898-161870",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r141": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "40",
   "SubTopic": "50",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=126972273&loc=d3e12317-112629",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r142": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "40",
   "SubTopic": "50",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=126972273&loc=d3e12355-112629",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r143": {
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "Topic": "470",
   "URI": "https://asc.fasb.org/topic&trid=2208564",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r144": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "505",
   "URI": "https://asc.fasb.org/extlink&oid=126973232&loc=d3e21463-112644",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r145": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "505",
   "URI": "https://asc.fasb.org/extlink&oid=126973232&loc=d3e21475-112644",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r146": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "6",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "505",
   "URI": "https://asc.fasb.org/extlink&oid=126973232&loc=d3e21506-112644",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r147": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "6",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "505",
   "URI": "https://asc.fasb.org/extlink&oid=126973232&loc=d3e21506-112644",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r148": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "7",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "505",
   "URI": "https://asc.fasb.org/extlink&oid=126973232&loc=d3e21521-112644",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r149": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "8",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "505",
   "URI": "https://asc.fasb.org/extlink&oid=126973232&loc=d3e21538-112644",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r15": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(22))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r150": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.3-04)",
   "Topic": "505",
   "URI": "https://asc.fasb.org/extlink&oid=120397183&loc=d3e187085-122770",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r151": {
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "Topic": "505",
   "URI": "https://asc.fasb.org/topic&trid=2208762",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r152": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(1)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r153": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(1)(i)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r154": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(1)(i)-(ii)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r155": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(1)(ii)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r156": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(1)(iii)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r157": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(iii)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r158": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(d)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r159": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(d)(1)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r16": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(24))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r160": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(e)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r161": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(e)(1)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r162": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(e)(2)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r163": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(f)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r164": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(f)(2)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r165": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(g)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r166": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(h)(1)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r167": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(i)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r168": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r169": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2A",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=SL79508275-113901",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r17": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(26)(a))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r170": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "12",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "20",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=126964447&loc=d3e11149-113907",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r171": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "13",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "20",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=126964447&loc=d3e11178-113907",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r172": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "730",
   "URI": "https://asc.fasb.org/extlink&oid=6420194&loc=d3e21568-108373",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r173": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "6",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=123427490&loc=d3e31931-109318",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r174": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "12",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=121826272&loc=d3e32687-109319",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r175": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "15",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(d)",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=121826272&loc=d3e32718-109319",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r176": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "15",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(e)",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=121826272&loc=d3e32718-109319",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r177": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "15A",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=121826272&loc=SL6600010-109319",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r178": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "19",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=121826272&loc=d3e32840-109319",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r179": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=121826272&loc=d3e32537-109319",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r18": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(26)(b))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r180": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=121826272&loc=d3e32559-109319",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r181": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=121826272&loc=d3e32559-109319",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r182": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "8",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=121826272&loc=d3e32632-109319",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r183": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "9",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=121826272&loc=d3e32639-109319",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r184": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SAB Topic 6.I.7)",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=122134291&loc=d3e330036-122817",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r185": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "05",
   "SubTopic": "10",
   "Subparagraph": "(a)-(d)",
   "Topic": "805",
   "URI": "https://asc.fasb.org/extlink&oid=6909625&loc=d3e227-128457",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r186": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "805",
   "URI": "https://asc.fasb.org/extlink&oid=79982066&loc=d3e1392-128463",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r187": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "805",
   "URI": "https://asc.fasb.org/extlink&oid=79982066&loc=d3e1486-128463",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r188": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "13",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "20",
   "Topic": "805",
   "URI": "https://asc.fasb.org/extlink&oid=123410050&loc=d3e5227-128473",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r189": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "14",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "20",
   "Subparagraph": "(a)",
   "Topic": "805",
   "URI": "https://asc.fasb.org/extlink&oid=123410050&loc=d3e5263-128473",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r19": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(28))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r190": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "20",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "20",
   "Subparagraph": "(c)",
   "Topic": "805",
   "URI": "https://asc.fasb.org/extlink&oid=123410050&loc=d3e5333-128473",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r191": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "30",
   "Subparagraph": "(c)(3)",
   "Topic": "805",
   "URI": "https://asc.fasb.org/extlink&oid=126975305&loc=d3e6927-128479",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r192": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "12",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "810",
   "URI": "https://asc.fasb.org/extlink&oid=126929396&loc=d3e5291-111683",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r193": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "19",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "810",
   "URI": "https://asc.fasb.org/extlink&oid=126929396&loc=SL4569616-111683",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r194": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "20",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "810",
   "URI": "https://asc.fasb.org/extlink&oid=126929396&loc=SL4569643-111683",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r195": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "810",
   "URI": "https://asc.fasb.org/extlink&oid=109239629&loc=d3e5614-111684",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r196": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1A",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(3)",
   "Topic": "810",
   "URI": "https://asc.fasb.org/extlink&oid=109239629&loc=SL4573702-111684",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r197": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1A",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c),(3)",
   "Topic": "810",
   "URI": "https://asc.fasb.org/extlink&oid=109239629&loc=SL4573702-111684",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r198": {
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "Topic": "810",
   "URI": "https://asc.fasb.org/topic&trid=2197479",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r199": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4A",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "815",
   "URI": "https://asc.fasb.org/extlink&oid=125515794&loc=SL5618551-113959",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r2": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Topic": "205",
   "URI": "https://asc.fasb.org/extlink&oid=109222650&loc=d3e1474-107760",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r20": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(29))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r200": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4A",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "815",
   "URI": "https://asc.fasb.org/extlink&oid=125515794&loc=SL5618551-113959",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r201": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4B",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(1)",
   "Topic": "815",
   "URI": "https://asc.fasb.org/extlink&oid=125515794&loc=SL5624163-113959",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r202": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4B",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(d)",
   "Topic": "815",
   "URI": "https://asc.fasb.org/extlink&oid=125515794&loc=SL5624163-113959",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r203": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4C",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "815",
   "URI": "https://asc.fasb.org/extlink&oid=125515794&loc=SL5624171-113959",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r204": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4D",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "815",
   "URI": "https://asc.fasb.org/extlink&oid=125515794&loc=SL5624177-113959",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r205": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4D",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "815",
   "URI": "https://asc.fasb.org/extlink&oid=125515794&loc=SL5624177-113959",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r206": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "182",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "10",
   "Topic": "815",
   "URI": "https://asc.fasb.org/extlink&oid=127000641&loc=SL5629052-113961",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r207": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "820",
   "URI": "https://asc.fasb.org/extlink&oid=126976982&loc=d3e19207-110258",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r208": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "820",
   "URI": "https://asc.fasb.org/extlink&oid=126976982&loc=d3e19207-110258",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r209": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "60",
   "SubTopic": "10",
   "Topic": "820",
   "URI": "https://asc.fasb.org/extlink&oid=7493716&loc=d3e21868-110260",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r21": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(30)(a)(1))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r210": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "825",
   "URI": "https://asc.fasb.org/extlink&oid=123594938&loc=d3e13279-108611",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r211": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "20",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "825",
   "URI": "https://asc.fasb.org/extlink&oid=123594938&loc=d3e13531-108611",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r212": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "21",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "825",
   "URI": "https://asc.fasb.org/extlink&oid=123594938&loc=d3e13537-108611",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r213": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "21",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "825",
   "URI": "https://asc.fasb.org/extlink&oid=123594938&loc=d3e13537-108611",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r214": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "230",
   "Topic": "830",
   "URI": "https://asc.fasb.org/extlink&oid=123444420&loc=d3e33268-110906",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r215": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1A",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "30",
   "Topic": "835",
   "URI": "https://asc.fasb.org/extlink&oid=124435984&loc=d3e28541-108399",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r216": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "30",
   "Topic": "835",
   "URI": "https://asc.fasb.org/extlink&oid=124435984&loc=d3e28551-108399",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r217": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "30",
   "Topic": "835",
   "URI": "https://asc.fasb.org/extlink&oid=124435984&loc=d3e28555-108399",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r218": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "8",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "30",
   "Topic": "835",
   "URI": "https://asc.fasb.org/extlink&oid=114775985&loc=d3e28878-108400",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r219": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "25",
   "SubTopic": "20",
   "Topic": "940",
   "URI": "https://asc.fasb.org/extlink&oid=126941158&loc=d3e41242-110953",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r22": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(30)(a)(3))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r220": {
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "SubTopic": "320",
   "Topic": "940",
   "URI": "https://asc.fasb.org/subtopic&trid=2176304",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r221": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "210",
   "Subparagraph": "(SX 210.9-03(11))",
   "Topic": "942",
   "URI": "https://asc.fasb.org/extlink&oid=126897435&loc=d3e534808-122878",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r222": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "210",
   "Subparagraph": "(SX 210.9-03(13))",
   "Topic": "942",
   "URI": "https://asc.fasb.org/extlink&oid=126897435&loc=d3e534808-122878",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r223": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "210",
   "Subparagraph": "(SX 210.9-03(15)(1))",
   "Topic": "942",
   "URI": "https://asc.fasb.org/extlink&oid=126897435&loc=d3e534808-122878",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r224": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "210",
   "Subparagraph": "(SX 210.9-03(15)(2))",
   "Topic": "942",
   "URI": "https://asc.fasb.org/extlink&oid=126897435&loc=d3e534808-122878",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r225": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "210",
   "Subparagraph": "(SX 210.9-03(16))",
   "Topic": "942",
   "URI": "https://asc.fasb.org/extlink&oid=126897435&loc=d3e534808-122878",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r226": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "210",
   "Subparagraph": "(SX 210.9-03(23))",
   "Topic": "942",
   "URI": "https://asc.fasb.org/extlink&oid=126897435&loc=d3e534808-122878",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r227": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "210",
   "Subparagraph": "(SX 210.9-03.15(5))",
   "Topic": "942",
   "URI": "https://asc.fasb.org/extlink&oid=126897435&loc=d3e534808-122878",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r228": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "220",
   "Subparagraph": "(SX 210.9-04(15))",
   "Topic": "942",
   "URI": "https://asc.fasb.org/extlink&oid=120399700&loc=SL114874048-224260",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r229": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "220",
   "Subparagraph": "(SX 210.9-04(22))",
   "Topic": "942",
   "URI": "https://asc.fasb.org/extlink&oid=120399700&loc=SL114874048-224260",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r23": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(30))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r230": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "220",
   "Subparagraph": "(SX 210.9-04.9)",
   "Topic": "942",
   "URI": "https://asc.fasb.org/extlink&oid=120399700&loc=SL114874048-224260",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r231": {
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "SubTopic": "320",
   "Topic": "942",
   "URI": "https://asc.fasb.org/subtopic&trid=2209399",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r232": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "470",
   "Topic": "942",
   "URI": "https://asc.fasb.org/extlink&oid=123599511&loc=d3e64711-112823",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r233": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "825",
   "Topic": "942",
   "URI": "https://asc.fasb.org/extlink&oid=126941378&loc=d3e61044-112788",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r234": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "210",
   "Subparagraph": "(SX 210.7-03(15)(b)(2))",
   "Topic": "944",
   "URI": "https://asc.fasb.org/extlink&oid=126734703&loc=d3e572229-122910",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r235": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "210",
   "Subparagraph": "(SX 210.7-03(16))",
   "Topic": "944",
   "URI": "https://asc.fasb.org/extlink&oid=126734703&loc=d3e572229-122910",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r236": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "210",
   "Subparagraph": "(SX 210.7-03(a)(12))",
   "Topic": "944",
   "URI": "https://asc.fasb.org/extlink&oid=126734703&loc=d3e572229-122910",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r237": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "210",
   "Subparagraph": "(SX 210.7-03(a)(15)(b)(1))",
   "Topic": "944",
   "URI": "https://asc.fasb.org/extlink&oid=126734703&loc=d3e572229-122910",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r238": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "210",
   "Subparagraph": "(SX 210.7-03(a)(16))",
   "Topic": "944",
   "URI": "https://asc.fasb.org/extlink&oid=126734703&loc=d3e572229-122910",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r239": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "210",
   "Subparagraph": "(SX 210.7-03(a)(23)(a)(4))",
   "Topic": "944",
   "URI": "https://asc.fasb.org/extlink&oid=126734703&loc=d3e572229-122910",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r24": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(31))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r240": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "210",
   "Subparagraph": "(SX 210.7-03(a)(25))",
   "Topic": "944",
   "URI": "https://asc.fasb.org/extlink&oid=126734703&loc=d3e572229-122910",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r241": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "210",
   "Subparagraph": "(SX 210.7-03(a)(8))",
   "Topic": "944",
   "URI": "https://asc.fasb.org/extlink&oid=126734703&loc=d3e572229-122910",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r242": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "210",
   "Subparagraph": "(SX 210.7-03.15(a))",
   "Topic": "944",
   "URI": "https://asc.fasb.org/extlink&oid=126734703&loc=d3e572229-122910",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r243": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "220",
   "Subparagraph": "(SX 210.7-04(18))",
   "Topic": "944",
   "URI": "https://asc.fasb.org/extlink&oid=120400993&loc=SL114874131-224263",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r244": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "220",
   "Subparagraph": "(SX 210.7-04(8))",
   "Topic": "944",
   "URI": "https://asc.fasb.org/extlink&oid=120400993&loc=SL114874131-224263",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r245": {
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "SubTopic": "320",
   "Topic": "946",
   "URI": "https://asc.fasb.org/subtopic&trid=2324412",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r246": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Topic": "985",
   "URI": "https://asc.fasb.org/extlink&oid=6501960&loc=d3e128462-111756",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r247": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "6",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "105",
   "URI": "https://asc.fasb.org/extlink&oid=126987489&loc=SL124442142-165695",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r248": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "6",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "105",
   "URI": "https://asc.fasb.org/extlink&oid=126987489&loc=SL124442142-165695",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r249": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "6",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(c)",
   "Topic": "105",
   "URI": "https://asc.fasb.org/extlink&oid=126987489&loc=SL124442142-165695",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r25": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(32))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r250": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "6",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(d)",
   "Topic": "105",
   "URI": "https://asc.fasb.org/extlink&oid=126987489&loc=SL124442142-165695",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r251": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "6",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(e)",
   "Topic": "105",
   "URI": "https://asc.fasb.org/extlink&oid=126987489&loc=SL124442142-165695",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r252": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "5C",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(a)(2)",
   "Topic": "205",
   "URI": "https://asc.fasb.org/extlink&oid=109222650&loc=SL51721675-107760",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r253": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "7",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Topic": "205",
   "URI": "https://asc.fasb.org/extlink&oid=109222650&loc=SL51721683-107760",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r254": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=124098289&loc=d3e6676-107765",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r255": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "5",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=124098289&loc=d3e6904-107765",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r256": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=6361739&loc=d3e7789-107766",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r257": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(1))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r258": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(13))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r259": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(14))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r26": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(6)(a))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r260": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(15))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r261": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(17))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r262": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(18))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r263": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(22))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r264": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(30)(a)(4))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r265": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(4))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r266": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(6)(b))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r267": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(6))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r268": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(9))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r269": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "10A",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(e)",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=126968391&loc=SL7669646-108580",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r27": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(6)(b))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r270": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "10A",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(f)",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=126968391&loc=SL7669646-108580",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r271": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "10A",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(h)",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=126968391&loc=SL7669646-108580",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r272": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "11",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=126968391&loc=d3e637-108580",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r273": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "14A",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=126968391&loc=SL7669686-108580",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r274": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1A",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=126968391&loc=SL7669619-108580",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r275": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1A",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=126968391&loc=SL7669619-108580",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r276": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1A",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(c)",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=126968391&loc=SL7669619-108580",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r277": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1B",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=126968391&loc=SL7669625-108580",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r278": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1B",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=126968391&loc=SL7669625-108580",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r279": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=124431353&loc=SL116659661-227067",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r28": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(6)(c))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r280": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=124431353&loc=SL124442407-227067",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r281": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "5",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=124431353&loc=SL124442411-227067",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r282": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "6",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=124431353&loc=SL124452729-227067",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r283": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(210.5-03(11))",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=126953954&loc=SL114868664-224227",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r284": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-03(24))",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=126953954&loc=SL114868664-224227",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r285": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-03(25))",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=126953954&loc=SL114868664-224227",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r286": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-03(5))",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=126953954&loc=SL114868664-224227",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r287": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "11",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "230",
   "URI": "https://asc.fasb.org/extlink&oid=126954810&loc=d3e3151-108585",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r288": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "12",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "230",
   "URI": "https://asc.fasb.org/extlink&oid=126954810&loc=d3e3179-108585",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r289": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "15",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "230",
   "URI": "https://asc.fasb.org/extlink&oid=126954810&loc=d3e3291-108585",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r29": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02.19(a))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r290": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "15",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(d)",
   "Topic": "230",
   "URI": "https://asc.fasb.org/extlink&oid=126954810&loc=d3e3291-108585",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r291": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "17",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(d)",
   "Topic": "230",
   "URI": "https://asc.fasb.org/extlink&oid=126954810&loc=d3e3367-108585",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r292": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "230",
   "URI": "https://asc.fasb.org/extlink&oid=126954810&loc=d3e3000-108585",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r293": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "24",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "230",
   "URI": "https://asc.fasb.org/extlink&oid=126954810&loc=d3e3521-108585",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r294": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "25",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(e)",
   "Topic": "230",
   "URI": "https://asc.fasb.org/extlink&oid=126954810&loc=d3e3536-108585",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r295": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "230",
   "URI": "https://asc.fasb.org/extlink&oid=126999549&loc=d3e4297-108586",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r296": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.4-08(c))",
   "Topic": "235",
   "URI": "https://asc.fasb.org/extlink&oid=120395691&loc=d3e23780-122690",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r297": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.4-08(e)(1))",
   "Topic": "235",
   "URI": "https://asc.fasb.org/extlink&oid=120395691&loc=d3e23780-122690",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r298": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.4-08(g)(1)(ii))",
   "Topic": "235",
   "URI": "https://asc.fasb.org/extlink&oid=120395691&loc=d3e23780-122690",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r299": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.4-08(h)(1))",
   "Topic": "235",
   "URI": "https://asc.fasb.org/extlink&oid=120395691&loc=d3e23780-122690",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r3": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3A",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Topic": "205",
   "URI": "https://asc.fasb.org/extlink&oid=109222650&loc=SL51721659-107760",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r30": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02.19(a),20,24)",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r300": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.4-08(h)(2))",
   "Topic": "235",
   "URI": "https://asc.fasb.org/extlink&oid=120395691&loc=d3e23780-122690",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r301": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.4-08(h))",
   "Topic": "235",
   "URI": "https://asc.fasb.org/extlink&oid=120395691&loc=d3e23780-122690",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r302": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.12-04(a))",
   "Topic": "235",
   "URI": "https://asc.fasb.org/extlink&oid=120395691&loc=d3e24072-122690",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r303": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.12-09(Column B))",
   "Topic": "235",
   "URI": "https://asc.fasb.org/extlink&oid=120395691&loc=d3e24092-122690",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r304": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.12-09(Column C(1)))",
   "Topic": "235",
   "URI": "https://asc.fasb.org/extlink&oid=120395691&loc=d3e24092-122690",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r305": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.12-09(Column C(2)))",
   "Topic": "235",
   "URI": "https://asc.fasb.org/extlink&oid=120395691&loc=d3e24092-122690",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r306": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.12-09(Column C)(1))",
   "Topic": "235",
   "URI": "https://asc.fasb.org/extlink&oid=120395691&loc=d3e24092-122690",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r307": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.12-09(Column D))",
   "Topic": "235",
   "URI": "https://asc.fasb.org/extlink&oid=120395691&loc=d3e24092-122690",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r308": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.12-09(Column E))",
   "Topic": "235",
   "URI": "https://asc.fasb.org/extlink&oid=120395691&loc=d3e24092-122690",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r309": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.12-09)",
   "Topic": "235",
   "URI": "https://asc.fasb.org/extlink&oid=120395691&loc=d3e24092-122690",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r31": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02.19(b),22(b))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r310": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "23",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "250",
   "URI": "https://asc.fasb.org/extlink&oid=124436220&loc=d3e21914-107793",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r311": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "24",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "250",
   "URI": "https://asc.fasb.org/extlink&oid=124436220&loc=d3e21930-107793",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r312": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "5",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "250",
   "URI": "https://asc.fasb.org/extlink&oid=124436220&loc=d3e21711-107793",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r313": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "6",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "250",
   "URI": "https://asc.fasb.org/extlink&oid=124436220&loc=d3e21728-107793",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r314": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "250",
   "URI": "https://asc.fasb.org/extlink&oid=124431687&loc=d3e22499-107794",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r315": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)(2)",
   "Topic": "250",
   "URI": "https://asc.fasb.org/extlink&oid=124431687&loc=d3e22499-107794",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r316": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)(3)",
   "Topic": "250",
   "URI": "https://asc.fasb.org/extlink&oid=124431687&loc=d3e22499-107794",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r317": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)(4)",
   "Topic": "250",
   "URI": "https://asc.fasb.org/extlink&oid=124431687&loc=d3e22499-107794",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r318": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(2)",
   "Topic": "250",
   "URI": "https://asc.fasb.org/extlink&oid=124431687&loc=d3e22499-107794",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r319": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "11",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "250",
   "URI": "https://asc.fasb.org/extlink&oid=124431687&loc=d3e22694-107794",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r32": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02.19,20)",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r320": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "11",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "250",
   "URI": "https://asc.fasb.org/extlink&oid=124431687&loc=d3e22694-107794",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r321": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "250",
   "URI": "https://asc.fasb.org/extlink&oid=124431687&loc=d3e22583-107794",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r322": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "250",
   "URI": "https://asc.fasb.org/extlink&oid=124431687&loc=d3e22595-107794",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r323": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "7",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "250",
   "URI": "https://asc.fasb.org/extlink&oid=124431687&loc=d3e22644-107794",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r324": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "7",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "250",
   "URI": "https://asc.fasb.org/extlink&oid=124431687&loc=d3e22644-107794",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r325": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "8",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "250",
   "URI": "https://asc.fasb.org/extlink&oid=124431687&loc=d3e22658-107794",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r326": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "9",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "250",
   "URI": "https://asc.fasb.org/extlink&oid=124431687&loc=d3e22663-107794",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r327": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "5",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SAB Topic 11.M.Q2)",
   "Topic": "250",
   "URI": "https://asc.fasb.org/extlink&oid=122038215&loc=d3e31137-122693",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r328": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "10",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "260",
   "URI": "https://asc.fasb.org/extlink&oid=126958026&loc=d3e1448-109256",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r329": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "11",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "260",
   "URI": "https://asc.fasb.org/extlink&oid=126958026&loc=d3e1377-109256",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r33": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02.19-26)",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r330": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "16",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "260",
   "URI": "https://asc.fasb.org/extlink&oid=126958026&loc=d3e1505-109256",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r331": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "260",
   "URI": "https://asc.fasb.org/extlink&oid=126958026&loc=d3e1252-109256",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r332": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "40",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "260",
   "URI": "https://asc.fasb.org/extlink&oid=126958026&loc=d3e1930-109256",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r333": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "40",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(b)(1)",
   "Topic": "260",
   "URI": "https://asc.fasb.org/extlink&oid=126958026&loc=d3e1930-109256",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r334": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "40",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(b)(2)",
   "Topic": "260",
   "URI": "https://asc.fasb.org/extlink&oid=126958026&loc=d3e1930-109256",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r335": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "40",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(b)(3)",
   "Topic": "260",
   "URI": "https://asc.fasb.org/extlink&oid=126958026&loc=d3e1930-109256",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r336": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "40",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(c)",
   "Topic": "260",
   "URI": "https://asc.fasb.org/extlink&oid=126958026&loc=d3e1930-109256",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r337": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "42",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "260",
   "URI": "https://asc.fasb.org/extlink&oid=126958026&loc=d3e2029-109256",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r338": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "60B",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "260",
   "URI": "https://asc.fasb.org/extlink&oid=126958026&loc=SL5780133-109256",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r339": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "60B",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(c)",
   "Topic": "260",
   "URI": "https://asc.fasb.org/extlink&oid=126958026&loc=SL5780133-109256",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r34": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02.20)",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r340": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "60B",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(d)",
   "Topic": "260",
   "URI": "https://asc.fasb.org/extlink&oid=126958026&loc=SL5780133-109256",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r341": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "7",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "260",
   "URI": "https://asc.fasb.org/extlink&oid=126958026&loc=d3e1337-109256",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r342": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "260",
   "URI": "https://asc.fasb.org/extlink&oid=124432515&loc=d3e3550-109257",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r343": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)",
   "Topic": "260",
   "URI": "https://asc.fasb.org/extlink&oid=124432515&loc=d3e3550-109257",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r344": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "260",
   "URI": "https://asc.fasb.org/extlink&oid=124432515&loc=d3e3630-109257",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r345": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "260",
   "URI": "https://asc.fasb.org/extlink&oid=109243012&loc=SL65017193-207537",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r346": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "15",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "10",
   "Topic": "260",
   "URI": "https://asc.fasb.org/extlink&oid=128363288&loc=d3e3842-109258",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r347": {
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "Topic": "260",
   "URI": "https://asc.fasb.org/topic&trid=2144383",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r348": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "6",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "270",
   "URI": "https://asc.fasb.org/extlink&oid=126900757&loc=d3e543-108305",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r349": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "272",
   "URI": "https://asc.fasb.org/extlink&oid=125520817&loc=d3e70191-108054",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r35": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02.21)",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r350": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "275",
   "URI": "https://asc.fasb.org/extlink&oid=99393423&loc=d3e5967-108592",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r351": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)",
   "Topic": "275",
   "URI": "https://asc.fasb.org/extlink&oid=99393423&loc=d3e5967-108592",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r352": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(d)",
   "Topic": "275",
   "URI": "https://asc.fasb.org/extlink&oid=99393423&loc=d3e5967-108592",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r353": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "11",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "275",
   "URI": "https://asc.fasb.org/extlink&oid=99393423&loc=d3e6161-108592",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r354": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "12",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "275",
   "URI": "https://asc.fasb.org/extlink&oid=99393423&loc=d3e6191-108592",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r355": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "15",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e8657-108599",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r356": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "21",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e8721-108599",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r357": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "21",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e8721-108599",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r358": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "22",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e8736-108599",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r359": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "22",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e8736-108599",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r36": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02.22(a)(1))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r360": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "22",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e8736-108599",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r361": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "22",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(d)",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e8736-108599",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r362": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "22",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(e)",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e8736-108599",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r363": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "22",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(h)",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e8736-108599",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r364": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "22",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e8736-108599",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r365": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "26",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e8844-108599",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r366": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "30",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e8906-108599",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r367": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "30",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e8906-108599",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r368": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "30",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e8906-108599",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r369": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "31",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e8924-108599",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r37": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02.22(a)(5))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r370": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "32",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e8933-108599",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r371": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "32",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e8933-108599",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r372": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "32",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e8933-108599",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r373": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "32",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(d)",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e8933-108599",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r374": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "32",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(e)",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e8933-108599",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r375": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "32",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(f)",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e8933-108599",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r376": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "34",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e8981-108599",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r377": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "40",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e9031-108599",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r378": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "41",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e9038-108599",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r379": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "41",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e9038-108599",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r38": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02.22)",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r380": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "41",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e9038-108599",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r381": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "42",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e9054-108599",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r382": {
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "Topic": "280",
   "URI": "https://asc.fasb.org/topic&trid=2134510",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r383": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "310",
   "URI": "https://asc.fasb.org/extlink&oid=124259787&loc=d3e4428-111522",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r384": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "9",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "310",
   "URI": "https://asc.fasb.org/extlink&oid=124259787&loc=d3e4531-111522",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r385": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "310",
   "URI": "https://asc.fasb.org/extlink&oid=123577603&loc=d3e5074-111524",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r386": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "20",
   "Subparagraph": "(a)",
   "Topic": "310",
   "URI": "https://asc.fasb.org/extlink&oid=126986314&loc=SL124402458-218513",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r387": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "20",
   "Subparagraph": "(b)",
   "Topic": "310",
   "URI": "https://asc.fasb.org/extlink&oid=126986314&loc=SL124402458-218513",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r388": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "320",
   "URI": "https://asc.fasb.org/extlink&oid=124260329&loc=d3e26610-111562",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r389": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "320",
   "URI": "https://asc.fasb.org/extlink&oid=126970911&loc=d3e27161-111563",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r39": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02.24)",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r390": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "5",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "320",
   "URI": "https://asc.fasb.org/extlink&oid=126970911&loc=d3e27232-111563",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r391": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "5A",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "320",
   "URI": "https://asc.fasb.org/extlink&oid=126970911&loc=SL120269820-111563",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r392": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "6",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "320",
   "URI": "https://asc.fasb.org/extlink&oid=126970911&loc=d3e27290-111563",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r393": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "7",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "320",
   "URI": "https://asc.fasb.org/extlink&oid=126970911&loc=d3e27337-111563",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r394": {
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "Topic": "320",
   "URI": "https://asc.fasb.org/topic&trid=2196928",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r395": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "321",
   "URI": "https://asc.fasb.org/extlink&oid=126980263&loc=SL75117539-209714",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r396": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)(1)",
   "Topic": "323",
   "URI": "https://asc.fasb.org/extlink&oid=114001798&loc=d3e33918-111571",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r397": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)",
   "Topic": "323",
   "URI": "https://asc.fasb.org/extlink&oid=114001798&loc=d3e33918-111571",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r398": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Topic": "326",
   "URI": "https://asc.fasb.org/extlink&oid=122640432&loc=SL120254519-210437",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r399": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "326",
   "URI": "https://asc.fasb.org/extlink&oid=122640432&loc=SL120320025-210437",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r4": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4A",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Topic": "205",
   "URI": "https://asc.fasb.org/extlink&oid=109222650&loc=SL51721663-107760",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r40": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02.29)",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r400": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "326",
   "URI": "https://asc.fasb.org/extlink&oid=122640432&loc=SL120320025-210437",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r401": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "326",
   "URI": "https://asc.fasb.org/extlink&oid=122640432&loc=SL121648383-210437",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r402": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "326",
   "URI": "https://asc.fasb.org/extlink&oid=122640432&loc=SL121648383-210437",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r403": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(c)",
   "Topic": "326",
   "URI": "https://asc.fasb.org/extlink&oid=122640432&loc=SL121648383-210437",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r404": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(d)",
   "Topic": "326",
   "URI": "https://asc.fasb.org/extlink&oid=122640432&loc=SL121648383-210437",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r405": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(e)(3)",
   "Topic": "326",
   "URI": "https://asc.fasb.org/extlink&oid=122640432&loc=SL121648383-210437",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r406": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(e)(4)",
   "Topic": "326",
   "URI": "https://asc.fasb.org/extlink&oid=122640432&loc=SL121648383-210437",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r407": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "20",
   "Topic": "326",
   "URI": "https://asc.fasb.org/extlink&oid=124255206&loc=SL82895884-210446",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r408": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "11",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Topic": "326",
   "URI": "https://asc.fasb.org/extlink&oid=124255953&loc=SL82919244-210447",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r409": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "13",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(b)",
   "Topic": "326",
   "URI": "https://asc.fasb.org/extlink&oid=124255953&loc=SL82919249-210447",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r41": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02.29-31)",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r410": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "13",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Topic": "326",
   "URI": "https://asc.fasb.org/extlink&oid=124255953&loc=SL82919249-210447",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r411": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "14",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Topic": "326",
   "URI": "https://asc.fasb.org/extlink&oid=124255953&loc=SL82919253-210447",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r412": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "16",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Topic": "326",
   "URI": "https://asc.fasb.org/extlink&oid=124255953&loc=SL82919258-210447",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r413": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "5",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Topic": "326",
   "URI": "https://asc.fasb.org/extlink&oid=124255953&loc=SL82919230-210447",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r414": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "30",
   "Topic": "326",
   "URI": "https://asc.fasb.org/extlink&oid=124258926&loc=SL82898722-210454",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r415": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "30",
   "Topic": "326",
   "URI": "https://asc.fasb.org/extlink&oid=124269663&loc=SL82922888-210455",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r416": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "5",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "30",
   "Topic": "326",
   "URI": "https://asc.fasb.org/extlink&oid=124269663&loc=SL82922890-210455",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r417": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "7",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "30",
   "Topic": "326",
   "URI": "https://asc.fasb.org/extlink&oid=124269663&loc=SL82922895-210455",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r418": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "9",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "30",
   "Topic": "326",
   "URI": "https://asc.fasb.org/extlink&oid=124269663&loc=SL82922900-210455",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r419": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "330",
   "URI": "https://asc.fasb.org/extlink&oid=116847112&loc=d3e4492-108314",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r42": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "10A",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(a),(b),(c)",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=126968391&loc=SL7669646-108580",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r420": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "330",
   "URI": "https://asc.fasb.org/extlink&oid=116847112&loc=d3e4556-108314",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r421": {
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "Topic": "330",
   "URI": "https://asc.fasb.org/topic&trid=2126998",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r422": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "5",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "40",
   "Topic": "340",
   "URI": "https://asc.fasb.org/extlink&oid=126905575&loc=SL51790836-203054",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r423": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "20",
   "Topic": "350",
   "URI": "https://asc.fasb.org/extlink&oid=99380562&loc=d3e13770-109266",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r424": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(a)",
   "Topic": "350",
   "URI": "https://asc.fasb.org/extlink&oid=121556970&loc=d3e13816-109267",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r425": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(h)",
   "Topic": "350",
   "URI": "https://asc.fasb.org/extlink&oid=121556970&loc=d3e13816-109267",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r426": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "30",
   "Subparagraph": "(a)",
   "Topic": "350",
   "URI": "https://asc.fasb.org/extlink&oid=66006027&loc=d3e16265-109275",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r427": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "30",
   "Subparagraph": "(d)",
   "Topic": "350",
   "URI": "https://asc.fasb.org/extlink&oid=66006027&loc=d3e16265-109275",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r428": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "30",
   "Subparagraph": "(a)(1)",
   "Topic": "350",
   "URI": "https://asc.fasb.org/extlink&oid=66006027&loc=d3e16323-109275",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r429": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "30",
   "Subparagraph": "(d)",
   "Topic": "350",
   "URI": "https://asc.fasb.org/extlink&oid=66006027&loc=d3e16323-109275",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r43": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "10A",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(a-c)",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=126968391&loc=SL7669646-108580",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r430": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "40",
   "Subparagraph": "(d)(1)",
   "Topic": "350",
   "URI": "https://asc.fasb.org/extlink&oid=120431994&loc=SL118172731-207502",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r431": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "40",
   "Subparagraph": "(d)(2)",
   "Topic": "350",
   "URI": "https://asc.fasb.org/extlink&oid=120431994&loc=SL118172731-207502",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r432": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(d)",
   "Topic": "360",
   "URI": "https://asc.fasb.org/extlink&oid=109226691&loc=d3e2941-110230",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r433": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)",
   "Topic": "420",
   "URI": "https://asc.fasb.org/extlink&oid=6394359&loc=d3e17939-110869",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r434": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SAB Topic 5.P.3)",
   "Topic": "420",
   "URI": "https://asc.fasb.org/extlink&oid=115931487&loc=d3e140864-122747",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r435": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SAB Topic 5.P.4(b)(1))",
   "Topic": "420",
   "URI": "https://asc.fasb.org/extlink&oid=115931487&loc=d3e140904-122747",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r436": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "440",
   "URI": "https://asc.fasb.org/extlink&oid=123406679&loc=d3e25336-109308",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r437": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)",
   "Topic": "440",
   "URI": "https://asc.fasb.org/extlink&oid=123406679&loc=d3e25336-109308",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r438": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Topic": "450",
   "URI": "https://asc.fasb.org/extlink&oid=121557415&loc=d3e14326-108349",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r439": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(b)",
   "Topic": "450",
   "URI": "https://asc.fasb.org/extlink&oid=121557415&loc=d3e14435-108349",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r44": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "10A",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=126968391&loc=SL7669646-108580",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r440": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "9",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(b)",
   "Topic": "450",
   "URI": "https://asc.fasb.org/extlink&oid=121557415&loc=d3e14557-108349",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r441": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "20",
   "Subparagraph": "(SAB Topic 5.Y.Q2)",
   "Topic": "450",
   "URI": "https://asc.fasb.org/extlink&oid=27011672&loc=d3e149879-122751",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r442": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "20",
   "Subparagraph": "(SAB Topic 5.Y.Q4)",
   "Topic": "450",
   "URI": "https://asc.fasb.org/extlink&oid=27011672&loc=d3e149879-122751",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r443": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1A",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.13-01(a)(4)(i))",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=126975872&loc=SL124442526-122756",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r444": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1A",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.13-01(a)(4)(iii)(A))",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=126975872&loc=SL124442526-122756",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r445": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1A",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.13-01(a)(4)(iv))",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=126975872&loc=SL124442526-122756",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r446": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1A",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.13-01(a)(5))",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=126975872&loc=SL124442526-122756",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r447": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1B",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.13-02(a)(4)(i))",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=126975872&loc=SL124442552-122756",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r448": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1B",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.13-02(a)(4)(iii)(A))",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=126975872&loc=SL124442552-122756",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r449": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1B",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.13-02(a)(4)(iii)(B))",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=126975872&loc=SL124442552-122756",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r45": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "11",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=126968391&loc=d3e637-108580",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r450": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1B",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.13-02(a)(4)(iv))",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=126975872&loc=SL124442552-122756",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r451": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1B",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.13-02(a)(5))",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=126975872&loc=SL124442552-122756",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r452": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1B",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(a)",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466505&loc=SL123495323-112611",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r453": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1B",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(b)",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466505&loc=SL123495323-112611",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r454": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1B",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(c)",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466505&loc=SL123495323-112611",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r455": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1B",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(e)",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466505&loc=SL123495323-112611",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r456": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1B",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(f)",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466505&loc=SL123495323-112611",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r457": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1B",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(g)",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466505&loc=SL123495323-112611",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r458": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1B",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(h)",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466505&loc=SL123495323-112611",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r459": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1B",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(i)",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466505&loc=SL123495323-112611",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r46": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "14",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=126968391&loc=d3e681-108580",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r460": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1B",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466505&loc=SL123495323-112611",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r461": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1C",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(a)",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466505&loc=SL123495334-112611",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r462": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1C",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(b)",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466505&loc=SL123495334-112611",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r463": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1C",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(c)",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466505&loc=SL123495334-112611",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r464": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1D",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(a)",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466505&loc=SL123495340-112611",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r465": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1D",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(b)",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466505&loc=SL123495340-112611",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r466": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1D",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(c)",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466505&loc=SL123495340-112611",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r467": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1E",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(a)",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466505&loc=SL123495348-112611",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r468": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1E",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(b)",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466505&loc=SL123495348-112611",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r469": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1E",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(c)",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466505&loc=SL123495348-112611",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r47": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "14A",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=126968391&loc=SL7669686-108580",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r470": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1E",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(d)",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466505&loc=SL123495348-112611",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r471": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1F",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(a)",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466505&loc=SL123495355-112611",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r472": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1F",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(b)",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466505&loc=SL123495355-112611",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r473": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1F",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(b)(1)",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466505&loc=SL123495355-112611",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r474": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1F",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(b)(2)",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466505&loc=SL123495355-112611",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r475": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1I",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(a)",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466505&loc=SL123495371-112611",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r476": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1I",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(b)",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466505&loc=SL123495371-112611",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r477": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1I",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(c)",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466505&loc=SL123495371-112611",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r478": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1I",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(d)",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466505&loc=SL123495371-112611",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r479": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(b)(2)",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466204&loc=SL6031897-161870",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r48": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "5",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=126968391&loc=d3e557-108580",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r480": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(b)(3)",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466204&loc=SL6031897-161870",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r481": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "6",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(b)",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466204&loc=SL6036836-161870",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r482": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "13",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "505",
   "URI": "https://asc.fasb.org/extlink&oid=126973232&loc=SL123496158-112644",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r483": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "13",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "505",
   "URI": "https://asc.fasb.org/extlink&oid=126973232&loc=SL123496158-112644",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r484": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "13",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(g)",
   "Topic": "505",
   "URI": "https://asc.fasb.org/extlink&oid=126973232&loc=SL123496158-112644",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r485": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "13",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(h)",
   "Topic": "505",
   "URI": "https://asc.fasb.org/extlink&oid=126973232&loc=SL123496158-112644",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r486": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "13",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(i)",
   "Topic": "505",
   "URI": "https://asc.fasb.org/extlink&oid=126973232&loc=SL123496158-112644",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r487": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "13",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "505",
   "URI": "https://asc.fasb.org/extlink&oid=126973232&loc=SL123496158-112644",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r488": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "14",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "505",
   "URI": "https://asc.fasb.org/extlink&oid=126973232&loc=SL123496171-112644",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r489": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "14",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "505",
   "URI": "https://asc.fasb.org/extlink&oid=126973232&loc=SL123496171-112644",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r49": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-03(10))",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=126953954&loc=SL114868664-224227",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r490": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "14",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)",
   "Topic": "505",
   "URI": "https://asc.fasb.org/extlink&oid=126973232&loc=SL123496171-112644",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r491": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "16",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "505",
   "URI": "https://asc.fasb.org/extlink&oid=126973232&loc=SL123496180-112644",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r492": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "18",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "505",
   "URI": "https://asc.fasb.org/extlink&oid=126973232&loc=SL123496189-112644",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r493": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "18",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "505",
   "URI": "https://asc.fasb.org/extlink&oid=126973232&loc=SL123496189-112644",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r494": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "18",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)",
   "Topic": "505",
   "URI": "https://asc.fasb.org/extlink&oid=126973232&loc=SL123496189-112644",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r495": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "18",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(d)",
   "Topic": "505",
   "URI": "https://asc.fasb.org/extlink&oid=126973232&loc=SL123496189-112644",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r496": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.3-04)",
   "Topic": "505",
   "URI": "https://asc.fasb.org/extlink&oid=120397183&loc=d3e187085-122770",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r497": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "606",
   "URI": "https://asc.fasb.org/extlink&oid=126919976&loc=SL49130531-203044",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r498": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "606",
   "URI": "https://asc.fasb.org/extlink&oid=126919976&loc=SL49130532-203044",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r499": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "13",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "606",
   "URI": "https://asc.fasb.org/extlink&oid=126920106&loc=SL49130556-203045",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r5": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4B",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Topic": "205",
   "URI": "https://asc.fasb.org/extlink&oid=109222650&loc=SL51721665-107760",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r50": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-03(20))",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=126953954&loc=SL114868664-224227",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r500": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "13",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)(1)",
   "Topic": "606",
   "URI": "https://asc.fasb.org/extlink&oid=126920106&loc=SL49130556-203045",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r501": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "15",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "606",
   "URI": "https://asc.fasb.org/extlink&oid=126920106&loc=SL49130558-203045",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r502": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "17",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "606",
   "URI": "https://asc.fasb.org/extlink&oid=126920106&loc=SL49130561-203045",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r503": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "18",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "606",
   "URI": "https://asc.fasb.org/extlink&oid=126920106&loc=SL49130563-203045",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r504": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "18",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "606",
   "URI": "https://asc.fasb.org/extlink&oid=126920106&loc=SL49130563-203045",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r505": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "19",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "606",
   "URI": "https://asc.fasb.org/extlink&oid=126920106&loc=SL49130564-203045",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r506": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "20",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "606",
   "URI": "https://asc.fasb.org/extlink&oid=126920106&loc=SL49130566-203045",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r507": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "20",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "606",
   "URI": "https://asc.fasb.org/extlink&oid=126920106&loc=SL49130566-203045",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r508": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "20",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)",
   "Topic": "606",
   "URI": "https://asc.fasb.org/extlink&oid=126920106&loc=SL49130566-203045",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r509": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "20",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(d)",
   "Topic": "606",
   "URI": "https://asc.fasb.org/extlink&oid=126920106&loc=SL49130566-203045",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r51": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-03.1)",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=126953954&loc=SL114868664-224227",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r510": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "22",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "606",
   "URI": "https://asc.fasb.org/extlink&oid=126920106&loc=SL49130569-203045",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r511": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "606",
   "URI": "https://asc.fasb.org/extlink&oid=126920106&loc=SL49130543-203045",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r512": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "5",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "606",
   "URI": "https://asc.fasb.org/extlink&oid=126920106&loc=SL49130545-203045",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r513": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "8",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "606",
   "URI": "https://asc.fasb.org/extlink&oid=126920106&loc=SL49130549-203045",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r514": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "8",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "606",
   "URI": "https://asc.fasb.org/extlink&oid=126920106&loc=SL49130549-203045",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r515": {
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "Topic": "606",
   "URI": "https://asc.fasb.org/topic&trid=49130388",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r516": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(d)(i)",
   "Topic": "715",
   "URI": "https://asc.fasb.org/extlink&oid=123447040&loc=d3e1928-114920",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r517": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(d)(iii)",
   "Topic": "715",
   "URI": "https://asc.fasb.org/extlink&oid=123447040&loc=d3e1928-114920",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r518": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(d)(iv)(01)",
   "Topic": "715",
   "URI": "https://asc.fasb.org/extlink&oid=123447040&loc=d3e1928-114920",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r519": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(d)(iv)(02)",
   "Topic": "715",
   "URI": "https://asc.fasb.org/extlink&oid=123447040&loc=d3e1928-114920",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r52": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-03.1,2)",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=126953954&loc=SL114868664-224227",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r520": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(d)(iv)(02)(A)",
   "Topic": "715",
   "URI": "https://asc.fasb.org/extlink&oid=123447040&loc=d3e1928-114920",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r521": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(d)(iv)(02)(B)",
   "Topic": "715",
   "URI": "https://asc.fasb.org/extlink&oid=123447040&loc=d3e1928-114920",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r522": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(d)(iv)(02)(C)",
   "Topic": "715",
   "URI": "https://asc.fasb.org/extlink&oid=123447040&loc=d3e1928-114920",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r523": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(d)(iv)(03)",
   "Topic": "715",
   "URI": "https://asc.fasb.org/extlink&oid=123447040&loc=d3e1928-114920",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r524": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(l)",
   "Topic": "715",
   "URI": "https://asc.fasb.org/extlink&oid=123447040&loc=d3e1928-114920",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r525": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(o)",
   "Topic": "715",
   "URI": "https://asc.fasb.org/extlink&oid=123447040&loc=d3e1928-114920",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r526": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(p)",
   "Topic": "715",
   "URI": "https://asc.fasb.org/extlink&oid=123447040&loc=d3e1928-114920",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r527": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(q)",
   "Topic": "715",
   "URI": "https://asc.fasb.org/extlink&oid=123447040&loc=d3e1928-114920",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r528": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(r)(1)",
   "Topic": "715",
   "URI": "https://asc.fasb.org/extlink&oid=123447040&loc=d3e1928-114920",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r529": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(r)(2)",
   "Topic": "715",
   "URI": "https://asc.fasb.org/extlink&oid=123447040&loc=d3e1928-114920",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r53": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-03.2(a),(d))",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=126953954&loc=SL114868664-224227",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r530": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "20",
   "Topic": "715",
   "URI": "https://asc.fasb.org/extlink&oid=21916913&loc=d3e273930-122802",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r531": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "60",
   "Subparagraph": "(c)",
   "Topic": "715",
   "URI": "https://asc.fasb.org/extlink&oid=6414203&loc=d3e39689-114964",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r532": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "70",
   "Topic": "715",
   "URI": "https://asc.fasb.org/extlink&oid=49170846&loc=d3e28014-114942",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r533": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "5",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "80",
   "Subparagraph": "(d)",
   "Topic": "715",
   "URI": "https://asc.fasb.org/extlink&oid=65877416&loc=SL14450657-114947",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r534": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "5",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "80",
   "Subparagraph": "(f)(3)",
   "Topic": "715",
   "URI": "https://asc.fasb.org/extlink&oid=65877416&loc=SL14450657-114947",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r535": {
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "Topic": "715",
   "URI": "https://asc.fasb.org/topic&trid=2235017",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r536": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1D",
   "Publisher": "FASB",
   "Section": "35",
   "SubTopic": "10",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=126961718&loc=SL116886442-113899",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r537": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "35",
   "SubTopic": "10",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=126961718&loc=d3e4534-113899",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r538": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "35",
   "SubTopic": "10",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=126961718&loc=d3e4549-113899",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r539": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r54": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-03.4)",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=126953954&loc=SL114868664-224227",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r540": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)(1)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r541": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)(2)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r542": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)(3)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r543": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r544": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(1)(i)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r545": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(1)(ii)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r546": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(1)(iii)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r547": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(1)(iv)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r548": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(1)(iv)(01)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r549": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(1)(iv)(02)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r55": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-03.7(b))",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=126953954&loc=SL114868664-224227",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r550": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(1)(iv)(03)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r551": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(1)(iv)(04)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r552": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(2)(i)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r553": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(2)(ii)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r554": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(2)(iii)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r555": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(2)(iii)(01)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r556": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(2)(iii)(02)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r557": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(2)(iii)(03)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r558": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(d)(1)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r559": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(d)(2)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r56": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-03.8)",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=126953954&loc=SL114868664-224227",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r560": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(e)(1)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r561": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(e)(2)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r562": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(f)(1)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r563": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(f)(2)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r564": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(f)(2)(i)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r565": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(f)(2)(ii)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r566": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(f)(2)(iii)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r567": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(f)(2)(iv)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r568": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(f)(2)(v)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r569": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(h)(1)(i)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r57": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-03.9)",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=126953954&loc=SL114868664-224227",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r570": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(h)(2)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r571": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(h)(2)(i)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r572": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(i)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r573": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(l)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r574": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "15",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(e)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128097895&loc=SL121327923-165333",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r575": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "15",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(f)(1)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128097895&loc=SL121327923-165333",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r576": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "15",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(f)(2)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128097895&loc=SL121327923-165333",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r577": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SAB Topic 14.D.2.Q6)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=122041274&loc=d3e301413-122809",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r578": {
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "Topic": "718",
   "URI": "https://asc.fasb.org/topic&trid=2228938",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r579": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "35",
   "Subparagraph": "(a)",
   "Topic": "720",
   "URI": "https://asc.fasb.org/extlink&oid=6420018&loc=d3e36677-107848",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r58": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "8",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=126953954&loc=SL114868664-224227",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r580": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "35",
   "Subparagraph": "(b)",
   "Topic": "720",
   "URI": "https://asc.fasb.org/extlink&oid=6420018&loc=d3e36677-107848",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r581": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "10B",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=123427490&loc=SL37586934-109318",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r582": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "25",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=123427490&loc=d3e32247-109318",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r583": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "28",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=123427490&loc=d3e32280-109318",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r584": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=123427490&loc=d3e31917-109318",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r585": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "6",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=123427490&loc=d3e31931-109318",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r586": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "10",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=121826272&loc=d3e32672-109319",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r587": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "12",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=121826272&loc=d3e32687-109319",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r588": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "14",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=121826272&loc=d3e32705-109319",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r589": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "15",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=121826272&loc=d3e32718-109319",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r59": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "12",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(c)",
   "Topic": "230",
   "URI": "https://asc.fasb.org/extlink&oid=126954810&loc=d3e3179-108585",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r590": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "15A",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=121826272&loc=SL6600010-109319",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r591": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "15A",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)(1)",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=121826272&loc=SL6600010-109319",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r592": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "15A",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)(2)",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=121826272&loc=SL6600010-109319",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r593": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "15A",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)(3)",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=121826272&loc=SL6600010-109319",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r594": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "15A",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=121826272&loc=SL6600010-109319",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r595": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "17",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=121826272&loc=d3e32809-109319",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r596": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "19",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=121826272&loc=d3e32840-109319",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r597": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=121826272&loc=d3e32537-109319",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r598": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=121826272&loc=d3e32537-109319",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r599": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=121826272&loc=d3e32537-109319",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r6": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "5A",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Topic": "205",
   "URI": "https://asc.fasb.org/extlink&oid=109222650&loc=SL51721671-107760",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r60": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "13",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "230",
   "URI": "https://asc.fasb.org/extlink&oid=126954810&loc=d3e3213-108585",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r600": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=121826272&loc=d3e32537-109319",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r601": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "20",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=121826272&loc=d3e32847-109319",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r602": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "21",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=121826272&loc=d3e32857-109319",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r603": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "9",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=121826272&loc=d3e32639-109319",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r604": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "9",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=121826272&loc=d3e32639-109319",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r605": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "9",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=121826272&loc=d3e32639-109319",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r606": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "8",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=126983759&loc=SL121830611-158277",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r607": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "8",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=126983759&loc=SL121830611-158277",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r608": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "8",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(d)(2)",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=126983759&loc=SL121830611-158277",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r609": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "8",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(d)(3)",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=126983759&loc=SL121830611-158277",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r61": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "13",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "230",
   "URI": "https://asc.fasb.org/extlink&oid=126954810&loc=d3e3213-108585",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r610": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SAB TOPIC 6.I.5.Q1)",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=122134291&loc=d3e330036-122817",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r611": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SAB TOPIC 6.I.7)",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=122134291&loc=d3e330036-122817",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r612": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SAB Topic 6.I.Fact.1)",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=122134291&loc=d3e330036-122817",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r613": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SAB Topic 6.I.Fact.2)",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=122134291&loc=d3e330036-122817",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r614": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SAB Topic 6.I.Fact.3)",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=122134291&loc=d3e330036-122817",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r615": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SAB Topic 11.C)",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=122134291&loc=d3e330215-122817",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r616": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "20",
   "Subparagraph": "(a)",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=123586238&loc=d3e38679-109324",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r617": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "270",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=6424409&loc=d3e44925-109338",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r618": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "30",
   "Subparagraph": "(a)",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=6424122&loc=d3e41874-109331",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r619": {
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "Topic": "740",
   "URI": "https://asc.fasb.org/topic&trid=2144680",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r62": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "13",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(c)",
   "Topic": "230",
   "URI": "https://asc.fasb.org/extlink&oid=126954810&loc=d3e3213-108585",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r620": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "5",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(a)",
   "Topic": "805",
   "URI": "https://asc.fasb.org/extlink&oid=128092470&loc=d3e4946-128472",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r621": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "20",
   "Subparagraph": "(a)",
   "Topic": "805",
   "URI": "https://asc.fasb.org/extlink&oid=128092918&loc=SL128093175-196984",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r622": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "20",
   "Subparagraph": "(b)",
   "Topic": "805",
   "URI": "https://asc.fasb.org/extlink&oid=128092918&loc=SL128093175-196984",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r623": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "20",
   "Subparagraph": "(d)",
   "Topic": "805",
   "URI": "https://asc.fasb.org/extlink&oid=128092918&loc=SL128093175-196984",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r624": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "30",
   "Subparagraph": "(b)(1)",
   "Topic": "805",
   "URI": "https://asc.fasb.org/extlink&oid=126975305&loc=d3e6927-128479",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r625": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "19",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "810",
   "URI": "https://asc.fasb.org/extlink&oid=126929396&loc=SL4569616-111683",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r626": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "25",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "810",
   "URI": "https://asc.fasb.org/extlink&oid=116870748&loc=SL6758485-165988",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r627": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "25",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "810",
   "URI": "https://asc.fasb.org/extlink&oid=116870748&loc=SL6758485-165988",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r628": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1A",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)(1)",
   "Topic": "810",
   "URI": "https://asc.fasb.org/extlink&oid=109239629&loc=SL4573702-111684",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r629": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1A",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(1)",
   "Topic": "810",
   "URI": "https://asc.fasb.org/extlink&oid=109239629&loc=SL4573702-111684",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r63": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "14",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "230",
   "URI": "https://asc.fasb.org/extlink&oid=126954810&loc=d3e3255-108585",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r630": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(bb)",
   "Topic": "810",
   "URI": "https://asc.fasb.org/extlink&oid=123419778&loc=d3e5710-111685",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r631": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)",
   "Topic": "810",
   "URI": "https://asc.fasb.org/extlink&oid=123419778&loc=d3e5710-111685",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r632": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "5",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "20",
   "Topic": "815",
   "URI": "https://asc.fasb.org/extlink&oid=121483254&loc=SL120254523-199619",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r633": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "5",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "40",
   "Subparagraph": "(f)",
   "Topic": "815",
   "URI": "https://asc.fasb.org/extlink&oid=126731327&loc=d3e90205-114008",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r634": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "6",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "40",
   "Subparagraph": "(a)",
   "Topic": "815",
   "URI": "https://asc.fasb.org/extlink&oid=126731327&loc=SL126733271-114008",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r635": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "40",
   "Subparagraph": "(a)(1)",
   "Topic": "815",
   "URI": "https://asc.fasb.org/extlink&oid=126732423&loc=SL123482106-238011",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r636": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "40",
   "Subparagraph": "(a)(2)",
   "Topic": "815",
   "URI": "https://asc.fasb.org/extlink&oid=126732423&loc=SL123482106-238011",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r637": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "40",
   "Subparagraph": "(a)(3)",
   "Topic": "815",
   "URI": "https://asc.fasb.org/extlink&oid=126732423&loc=SL123482106-238011",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r638": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "40",
   "Subparagraph": "(b)",
   "Topic": "815",
   "URI": "https://asc.fasb.org/extlink&oid=126732423&loc=SL123482106-238011",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r639": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "40",
   "Subparagraph": "(b)(1)",
   "Topic": "815",
   "URI": "https://asc.fasb.org/extlink&oid=126732423&loc=SL123482106-238011",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r64": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "14",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "230",
   "URI": "https://asc.fasb.org/extlink&oid=126954810&loc=d3e3255-108585",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r640": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "40",
   "Subparagraph": "(b)(2)",
   "Topic": "815",
   "URI": "https://asc.fasb.org/extlink&oid=126732423&loc=SL123482106-238011",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r641": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "40",
   "Subparagraph": "(c)",
   "Topic": "815",
   "URI": "https://asc.fasb.org/extlink&oid=126732423&loc=SL123482106-238011",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r642": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "40",
   "Subparagraph": "(d)",
   "Topic": "815",
   "URI": "https://asc.fasb.org/extlink&oid=126732423&loc=SL123482106-238011",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r643": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "40",
   "Subparagraph": "(e)(2)",
   "Topic": "815",
   "URI": "https://asc.fasb.org/extlink&oid=126732423&loc=SL123482106-238011",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r644": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "40",
   "Subparagraph": "(e)(3)",
   "Topic": "815",
   "URI": "https://asc.fasb.org/extlink&oid=126732423&loc=SL123482106-238011",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r645": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "40",
   "Subparagraph": "(e)(4)",
   "Topic": "815",
   "URI": "https://asc.fasb.org/extlink&oid=126732423&loc=SL123482106-238011",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r646": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "40",
   "Subparagraph": "(f)",
   "Topic": "815",
   "URI": "https://asc.fasb.org/extlink&oid=126732423&loc=SL123482106-238011",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r647": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "40",
   "Subparagraph": "(a)",
   "Topic": "815",
   "URI": "https://asc.fasb.org/extlink&oid=126732423&loc=SL126732908-238011",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r648": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "820",
   "URI": "https://asc.fasb.org/extlink&oid=126976982&loc=d3e19207-110258",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r649": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "820",
   "URI": "https://asc.fasb.org/extlink&oid=126976982&loc=d3e19207-110258",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r65": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "15",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "230",
   "URI": "https://asc.fasb.org/extlink&oid=126954810&loc=d3e3291-108585",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r650": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(bbb)(1)",
   "Topic": "820",
   "URI": "https://asc.fasb.org/extlink&oid=126976982&loc=d3e19207-110258",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r651": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(bbb)(2)",
   "Topic": "820",
   "URI": "https://asc.fasb.org/extlink&oid=126976982&loc=d3e19207-110258",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r652": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "820",
   "URI": "https://asc.fasb.org/extlink&oid=126976982&loc=d3e19207-110258",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r653": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "820",
   "URI": "https://asc.fasb.org/extlink&oid=126976982&loc=d3e19279-110258",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r654": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "6A",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "820",
   "URI": "https://asc.fasb.org/extlink&oid=126976982&loc=SL6742756-110258",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r655": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "28",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(f)",
   "Topic": "825",
   "URI": "https://asc.fasb.org/extlink&oid=123596393&loc=d3e14064-108612",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r656": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "5",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "825",
   "URI": "https://asc.fasb.org/extlink&oid=126983955&loc=SL120254526-165497",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r657": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "5",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(c)",
   "Topic": "825",
   "URI": "https://asc.fasb.org/extlink&oid=126983955&loc=SL120254526-165497",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r658": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "5",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Topic": "825",
   "URI": "https://asc.fasb.org/extlink&oid=126983955&loc=SL120254526-165497",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r659": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "6",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "825",
   "URI": "https://asc.fasb.org/extlink&oid=126983955&loc=SL121967933-165497",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r66": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "15",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(e)",
   "Topic": "230",
   "URI": "https://asc.fasb.org/extlink&oid=126954810&loc=d3e3291-108585",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r660": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "6",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "825",
   "URI": "https://asc.fasb.org/extlink&oid=126983955&loc=SL121967933-165497",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r661": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "6",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(c)(1)",
   "Topic": "825",
   "URI": "https://asc.fasb.org/extlink&oid=126983955&loc=SL121967933-165497",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r662": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "6",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(c)(2)",
   "Topic": "825",
   "URI": "https://asc.fasb.org/extlink&oid=126983955&loc=SL121967933-165497",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r663": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "7",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "825",
   "URI": "https://asc.fasb.org/extlink&oid=126983955&loc=SL122642865-165497",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r664": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "7",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "825",
   "URI": "https://asc.fasb.org/extlink&oid=126983955&loc=SL122642865-165497",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r665": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "9",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "830",
   "URI": "https://asc.fasb.org/extlink&oid=126980362&loc=d3e28129-110885",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r666": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "35",
   "SubTopic": "20",
   "Topic": "830",
   "URI": "https://asc.fasb.org/extlink&oid=123602790&loc=d3e30304-110892",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r667": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "12",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "30",
   "Topic": "830",
   "URI": "https://asc.fasb.org/extlink&oid=118261656&loc=d3e32022-110900",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r668": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "17",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "30",
   "Topic": "830",
   "URI": "https://asc.fasb.org/extlink&oid=118261656&loc=d3e32136-110900",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r669": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "20",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "30",
   "Subparagraph": "(a)",
   "Topic": "830",
   "URI": "https://asc.fasb.org/extlink&oid=118261656&loc=d3e32211-110900",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r67": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "24",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "230",
   "URI": "https://asc.fasb.org/extlink&oid=126954810&loc=d3e3521-108585",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r670": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "20",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "30",
   "Subparagraph": "(b)",
   "Topic": "830",
   "URI": "https://asc.fasb.org/extlink&oid=118261656&loc=d3e32211-110900",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r671": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "20",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "30",
   "Subparagraph": "(c)",
   "Topic": "830",
   "URI": "https://asc.fasb.org/extlink&oid=118261656&loc=d3e32211-110900",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r672": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "20",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "30",
   "Subparagraph": "(d)",
   "Topic": "830",
   "URI": "https://asc.fasb.org/extlink&oid=118261656&loc=d3e32211-110900",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r673": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "30",
   "Topic": "830",
   "URI": "https://asc.fasb.org/extlink&oid=6450520&loc=d3e32583-110901",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r674": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "30",
   "Topic": "830",
   "URI": "https://asc.fasb.org/extlink&oid=6450520&loc=d3e32618-110901",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r675": {
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "Topic": "830",
   "URI": "https://asc.fasb.org/topic&trid=2175825",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r676": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "832",
   "URI": "https://asc.fasb.org/extlink&oid=128342835&loc=SL128342857-244232",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r677": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "832",
   "URI": "https://asc.fasb.org/extlink&oid=128342835&loc=SL128342857-244232",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r678": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(c)",
   "Topic": "832",
   "URI": "https://asc.fasb.org/extlink&oid=128342835&loc=SL128342857-244232",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r679": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(a)",
   "Topic": "835",
   "URI": "https://asc.fasb.org/extlink&oid=6450988&loc=d3e26243-108391",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r68": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "25",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "230",
   "URI": "https://asc.fasb.org/extlink&oid=126954810&loc=d3e3536-108585",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r680": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "30",
   "Topic": "835",
   "URI": "https://asc.fasb.org/extlink&oid=124435984&loc=d3e28555-108399",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r681": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "30",
   "Topic": "835",
   "URI": "https://asc.fasb.org/extlink&oid=124429444&loc=SL124452920-239629",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r682": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(c)(1)",
   "Topic": "842",
   "URI": "https://asc.fasb.org/extlink&oid=128293352&loc=SL77916155-209984",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r683": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(c)(2)",
   "Topic": "842",
   "URI": "https://asc.fasb.org/extlink&oid=128293352&loc=SL77916155-209984",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r684": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(c)(1)",
   "Topic": "842",
   "URI": "https://asc.fasb.org/extlink&oid=128293352&loc=SL119206272-209984",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r685": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(c)(2)",
   "Topic": "842",
   "URI": "https://asc.fasb.org/extlink&oid=128293352&loc=SL119206272-209984",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r686": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "842",
   "URI": "https://asc.fasb.org/extlink&oid=128293352&loc=SL120154346-209984",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r687": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "842",
   "URI": "https://asc.fasb.org/extlink&oid=128293352&loc=SL120154346-209984",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r688": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "5",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "842",
   "URI": "https://asc.fasb.org/extlink&oid=128293352&loc=SL126838806-209984",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r689": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "5",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "842",
   "URI": "https://asc.fasb.org/extlink&oid=128293352&loc=SL126838806-209984",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r69": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "28",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "230",
   "URI": "https://asc.fasb.org/extlink&oid=126954810&loc=d3e3602-108585",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r690": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "5",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(c)",
   "Topic": "842",
   "URI": "https://asc.fasb.org/extlink&oid=128293352&loc=SL126838806-209984",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r691": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "5",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(d)(1)",
   "Topic": "842",
   "URI": "https://asc.fasb.org/extlink&oid=128293352&loc=SL126838806-209984",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r692": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "5",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(d)(2)",
   "Topic": "842",
   "URI": "https://asc.fasb.org/extlink&oid=128293352&loc=SL126838806-209984",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r693": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "5",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(f)(2)",
   "Topic": "842",
   "URI": "https://asc.fasb.org/extlink&oid=128293352&loc=SL126838806-209984",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r694": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "20",
   "Subparagraph": "(a)",
   "Topic": "842",
   "URI": "https://asc.fasb.org/extlink&oid=123391704&loc=SL77918627-209977",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r695": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "20",
   "Subparagraph": "(b)",
   "Topic": "842",
   "URI": "https://asc.fasb.org/extlink&oid=123391704&loc=SL77918627-209977",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r696": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "20",
   "Topic": "842",
   "URI": "https://asc.fasb.org/extlink&oid=123391704&loc=SL77918631-209977",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r697": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "5",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "20",
   "Subparagraph": "(c)",
   "Topic": "842",
   "URI": "https://asc.fasb.org/extlink&oid=123391704&loc=SL77918643-209977",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r698": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(b)",
   "Topic": "842",
   "URI": "https://asc.fasb.org/extlink&oid=128292326&loc=SL77918666-209980",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r699": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(b)",
   "Topic": "842",
   "URI": "https://asc.fasb.org/extlink&oid=128292326&loc=SL77918686-209980",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r7": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "5B",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Topic": "205",
   "URI": "https://asc.fasb.org/extlink&oid=109222650&loc=SL51721673-107760",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r70": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "28",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "230",
   "URI": "https://asc.fasb.org/extlink&oid=126954810&loc=d3e3602-108585",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r700": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(d)",
   "Topic": "842",
   "URI": "https://asc.fasb.org/extlink&oid=128292326&loc=SL77918686-209980",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r701": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(g)(1)",
   "Topic": "842",
   "URI": "https://asc.fasb.org/extlink&oid=128292326&loc=SL77918686-209980",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r702": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(g)(2)",
   "Topic": "842",
   "URI": "https://asc.fasb.org/extlink&oid=128292326&loc=SL77918686-209980",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r703": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(g)(3)",
   "Topic": "842",
   "URI": "https://asc.fasb.org/extlink&oid=128292326&loc=SL77918686-209980",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r704": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Topic": "842",
   "URI": "https://asc.fasb.org/extlink&oid=128292326&loc=SL77918686-209980",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r705": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "6",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Topic": "842",
   "URI": "https://asc.fasb.org/extlink&oid=128292326&loc=SL77918701-209980",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r706": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "848",
   "URI": "https://asc.fasb.org/extlink&oid=125980421&loc=SL122150809-237846",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r707": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "848",
   "URI": "https://asc.fasb.org/extlink&oid=125980421&loc=SL125981372-237846",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r708": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(a)(1)",
   "Topic": "848",
   "URI": "https://asc.fasb.org/extlink&oid=125980421&loc=SL125981372-237846",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r709": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(a)(2)",
   "Topic": "848",
   "URI": "https://asc.fasb.org/extlink&oid=125980421&loc=SL125981372-237846",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r71": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "28",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "230",
   "URI": "https://asc.fasb.org/extlink&oid=126954810&loc=d3e3602-108585",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r710": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(a)(3)(iii)(01)",
   "Topic": "848",
   "URI": "https://asc.fasb.org/extlink&oid=125980421&loc=SL125981372-237846",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r711": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(a)(3)(iii)(03)",
   "Topic": "848",
   "URI": "https://asc.fasb.org/extlink&oid=125980421&loc=SL125981372-237846",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r712": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "855",
   "URI": "https://asc.fasb.org/extlink&oid=6842918&loc=SL6314017-165662",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r713": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "855",
   "URI": "https://asc.fasb.org/extlink&oid=6842918&loc=SL6314017-165662",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r714": {
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "Topic": "855",
   "URI": "https://asc.fasb.org/topic&trid=2122774",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r715": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(b)(2)(i)",
   "Topic": "860",
   "URI": "https://asc.fasb.org/extlink&oid=121570589&loc=d3e107207-111719",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r716": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(b)(2)(ii)",
   "Topic": "860",
   "URI": "https://asc.fasb.org/extlink&oid=121570589&loc=d3e107207-111719",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r717": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(b)(3)",
   "Topic": "860",
   "URI": "https://asc.fasb.org/extlink&oid=121570589&loc=d3e107207-111719",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r718": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(bb)(1)",
   "Topic": "860",
   "URI": "https://asc.fasb.org/extlink&oid=121570589&loc=d3e107207-111719",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r719": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(bb)(2)",
   "Topic": "860",
   "URI": "https://asc.fasb.org/extlink&oid=121570589&loc=d3e107207-111719",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r72": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "230",
   "URI": "https://asc.fasb.org/extlink&oid=126954810&loc=d3e3044-108585",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r720": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(bb)(3)",
   "Topic": "860",
   "URI": "https://asc.fasb.org/extlink&oid=121570589&loc=d3e107207-111719",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r721": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(c)(1)",
   "Topic": "860",
   "URI": "https://asc.fasb.org/extlink&oid=121570589&loc=d3e107207-111719",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r722": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(c)(2)",
   "Topic": "860",
   "URI": "https://asc.fasb.org/extlink&oid=121570589&loc=d3e107207-111719",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r723": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(c)(3)",
   "Topic": "860",
   "URI": "https://asc.fasb.org/extlink&oid=121570589&loc=d3e107207-111719",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r724": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(b)(1)",
   "Topic": "860",
   "URI": "https://asc.fasb.org/extlink&oid=121570589&loc=d3e107314-111719",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r725": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(b)(2)",
   "Topic": "860",
   "URI": "https://asc.fasb.org/extlink&oid=121570589&loc=d3e107314-111719",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r726": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(b)(3)",
   "Topic": "860",
   "URI": "https://asc.fasb.org/extlink&oid=121570589&loc=d3e107314-111719",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r727": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(c)",
   "Topic": "860",
   "URI": "https://asc.fasb.org/extlink&oid=121570589&loc=d3e107314-111719",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r728": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "30",
   "Topic": "860",
   "URI": "https://asc.fasb.org/extlink&oid=66007379&loc=d3e113888-111728",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r729": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "7",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "30",
   "Subparagraph": "(a)",
   "Topic": "860",
   "URI": "https://asc.fasb.org/extlink&oid=109249958&loc=SL34722452-111729",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r73": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "230",
   "URI": "https://asc.fasb.org/extlink&oid=126999549&loc=d3e4297-108586",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r730": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "50",
   "Subparagraph": "(a)(1)",
   "Topic": "860",
   "URI": "https://asc.fasb.org/extlink&oid=128311188&loc=d3e122625-111746",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r731": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "50",
   "Subparagraph": "(a)(2)",
   "Topic": "860",
   "URI": "https://asc.fasb.org/extlink&oid=128311188&loc=d3e122625-111746",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r732": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "50",
   "Subparagraph": "(a)(3)",
   "Topic": "860",
   "URI": "https://asc.fasb.org/extlink&oid=128311188&loc=d3e122625-111746",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r733": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "50",
   "Subparagraph": "(a)(4)(i)",
   "Topic": "860",
   "URI": "https://asc.fasb.org/extlink&oid=128311188&loc=d3e122625-111746",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r734": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "50",
   "Subparagraph": "(a)(1)",
   "Topic": "860",
   "URI": "https://asc.fasb.org/extlink&oid=128311188&loc=d3e122739-111746",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r735": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "50",
   "Subparagraph": "(a)(2)",
   "Topic": "860",
   "URI": "https://asc.fasb.org/extlink&oid=128311188&loc=d3e122739-111746",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r736": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "50",
   "Subparagraph": "(a)(3)",
   "Topic": "860",
   "URI": "https://asc.fasb.org/extlink&oid=128311188&loc=d3e122739-111746",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r737": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "50",
   "Subparagraph": "(a)(4)",
   "Topic": "860",
   "URI": "https://asc.fasb.org/extlink&oid=128311188&loc=d3e122739-111746",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r738": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "50",
   "Subparagraph": "(a)(5)",
   "Topic": "860",
   "URI": "https://asc.fasb.org/extlink&oid=128311188&loc=d3e122739-111746",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r739": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "50",
   "Subparagraph": "(a)(6)",
   "Topic": "860",
   "URI": "https://asc.fasb.org/extlink&oid=128311188&loc=d3e122739-111746",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r74": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "230",
   "URI": "https://asc.fasb.org/extlink&oid=126999549&loc=d3e4304-108586",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r740": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "50",
   "Subparagraph": "(a)(7)",
   "Topic": "860",
   "URI": "https://asc.fasb.org/extlink&oid=128311188&loc=d3e122739-111746",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r741": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "50",
   "Subparagraph": "(b)",
   "Topic": "860",
   "URI": "https://asc.fasb.org/extlink&oid=128311188&loc=d3e122739-111746",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r742": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "50",
   "Subparagraph": "(e)(1)",
   "Topic": "860",
   "URI": "https://asc.fasb.org/extlink&oid=128311188&loc=d3e122739-111746",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r743": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "50",
   "Subparagraph": "(e)(2)",
   "Topic": "860",
   "URI": "https://asc.fasb.org/extlink&oid=128311188&loc=d3e122739-111746",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r744": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "50",
   "Subparagraph": "(e)(3)",
   "Topic": "860",
   "URI": "https://asc.fasb.org/extlink&oid=128311188&loc=d3e122739-111746",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r745": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "6",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "910",
   "URI": "https://asc.fasb.org/extlink&oid=126937589&loc=SL119991595-234733",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r746": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "11",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "310",
   "Subparagraph": "(b)",
   "Topic": "912",
   "URI": "https://asc.fasb.org/extlink&oid=126938201&loc=d3e55415-109406",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r747": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "310",
   "Topic": "912",
   "URI": "https://asc.fasb.org/extlink&oid=126938201&loc=d3e55302-109406",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r748": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "330",
   "Topic": "912",
   "URI": "https://asc.fasb.org/extlink&oid=6471895&loc=d3e55923-109411",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r749": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SAB Topic 11.L)",
   "Topic": "924",
   "URI": "https://asc.fasb.org/extlink&oid=6472922&loc=d3e499488-122856",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r75": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "230",
   "URI": "https://asc.fasb.org/extlink&oid=126999549&loc=d3e4313-108586",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r750": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "5",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Topic": "926",
   "URI": "https://asc.fasb.org/extlink&oid=120154696&loc=d3e54445-107959",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r751": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "20",
   "Subparagraph": "(a)",
   "Topic": "926",
   "URI": "https://asc.fasb.org/extlink&oid=120154821&loc=SL120154904-197079",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r752": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "20",
   "Subparagraph": "(b)",
   "Topic": "926",
   "URI": "https://asc.fasb.org/extlink&oid=120154821&loc=SL120154904-197079",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r753": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "20",
   "Subparagraph": "(c)",
   "Topic": "926",
   "URI": "https://asc.fasb.org/extlink&oid=120154821&loc=SL120154904-197079",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r754": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "340",
   "Topic": "928",
   "URI": "https://asc.fasb.org/extlink&oid=6473545&loc=d3e61844-108004",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r755": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "210",
   "Subparagraph": "(SX 210.9-03(10)(1))",
   "Topic": "942",
   "URI": "https://asc.fasb.org/extlink&oid=126897435&loc=d3e534808-122878",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r756": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "210",
   "Subparagraph": "(SX 210.9-03(6))",
   "Topic": "942",
   "URI": "https://asc.fasb.org/extlink&oid=126897435&loc=d3e534808-122878",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r757": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "220",
   "Subparagraph": "(SX 210.9-04(26))",
   "Topic": "942",
   "URI": "https://asc.fasb.org/extlink&oid=120399700&loc=SL114874048-224260",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r758": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "220",
   "Subparagraph": "(SX 210.9-04(27))",
   "Topic": "942",
   "URI": "https://asc.fasb.org/extlink&oid=120399700&loc=SL114874048-224260",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r759": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "235",
   "Subparagraph": "(SX 210.9-05(b)(2))",
   "Topic": "942",
   "URI": "https://asc.fasb.org/extlink&oid=120399901&loc=d3e537907-122884",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r76": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "5",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "230",
   "URI": "https://asc.fasb.org/extlink&oid=126999549&loc=d3e4332-108586",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r760": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "360",
   "Topic": "942",
   "URI": "https://asc.fasb.org/extlink&oid=124429447&loc=SL124453093-239630",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r761": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "210",
   "Subparagraph": "(SX 210.7-03(a)(23)(a)(3))",
   "Topic": "944",
   "URI": "https://asc.fasb.org/extlink&oid=126734703&loc=d3e572229-122910",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r762": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "220",
   "Subparagraph": "(SX 210.7-04(22))",
   "Topic": "944",
   "URI": "https://asc.fasb.org/extlink&oid=120400993&loc=SL114874131-224263",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r763": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "220",
   "Subparagraph": "(SX 210.7-04(23))",
   "Topic": "944",
   "URI": "https://asc.fasb.org/extlink&oid=120400993&loc=SL114874131-224263",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r764": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "220",
   "Subparagraph": "(SX 210.7-04(9))",
   "Topic": "944",
   "URI": "https://asc.fasb.org/extlink&oid=120400993&loc=SL114874131-224263",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r765": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "7A",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "40",
   "Subparagraph": "(d)",
   "Topic": "944",
   "URI": "https://asc.fasb.org/extlink&oid=124506351&loc=SL117782755-158439",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r766": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "40",
   "Subparagraph": "(a)",
   "Topic": "944",
   "URI": "https://asc.fasb.org/extlink&oid=124501264&loc=SL117420844-207641",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r767": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "40",
   "Subparagraph": "(b)",
   "Topic": "944",
   "URI": "https://asc.fasb.org/extlink&oid=124501264&loc=SL117420844-207641",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r768": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "40",
   "Subparagraph": "(e)",
   "Topic": "944",
   "URI": "https://asc.fasb.org/extlink&oid=124501264&loc=SL117420844-207641",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r769": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "40",
   "Subparagraph": "(f)(1)",
   "Topic": "944",
   "URI": "https://asc.fasb.org/extlink&oid=124501264&loc=SL117420844-207641",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r77": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "8",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "230",
   "URI": "https://asc.fasb.org/extlink&oid=126999549&loc=SL98516268-108586",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r770": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "40",
   "Subparagraph": "(f)(2)",
   "Topic": "944",
   "URI": "https://asc.fasb.org/extlink&oid=124501264&loc=SL117420844-207641",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r771": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "40",
   "Subparagraph": "(g)(1)",
   "Topic": "944",
   "URI": "https://asc.fasb.org/extlink&oid=124501264&loc=SL117420844-207641",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r772": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "40",
   "Subparagraph": "(g)(2)(i)",
   "Topic": "944",
   "URI": "https://asc.fasb.org/extlink&oid=124501264&loc=SL117420844-207641",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r773": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "40",
   "Subparagraph": "(g)(2)(ii)",
   "Topic": "944",
   "URI": "https://asc.fasb.org/extlink&oid=124501264&loc=SL117420844-207641",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r774": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "40",
   "Subparagraph": "(g)(2)(iii)",
   "Topic": "944",
   "URI": "https://asc.fasb.org/extlink&oid=124501264&loc=SL117420844-207641",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r775": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "40",
   "Subparagraph": "(g)(2)(iv)",
   "Topic": "944",
   "URI": "https://asc.fasb.org/extlink&oid=124501264&loc=SL117420844-207641",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r776": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "40",
   "Subparagraph": "(h)(1)",
   "Topic": "944",
   "URI": "https://asc.fasb.org/extlink&oid=124501264&loc=SL117420844-207641",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r777": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "40",
   "Subparagraph": "(h)(2)",
   "Topic": "944",
   "URI": "https://asc.fasb.org/extlink&oid=124501264&loc=SL117420844-207641",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r778": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "40",
   "Subparagraph": "(k)",
   "Topic": "944",
   "URI": "https://asc.fasb.org/extlink&oid=124501264&loc=SL117420844-207641",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r779": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1B",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "825",
   "Topic": "944",
   "URI": "https://asc.fasb.org/extlink&oid=123600520&loc=SL75241803-196195",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r78": {
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "Topic": "235",
   "URI": "https://asc.fasb.org/topic&trid=2122369",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r780": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "310",
   "Subparagraph": "(SX 210.12-29(Footnote 4))",
   "Topic": "948",
   "URI": "https://asc.fasb.org/extlink&oid=120402547&loc=d3e617274-123014",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r781": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "310",
   "Topic": "954",
   "URI": "https://asc.fasb.org/extlink&oid=126942805&loc=d3e3115-115594",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r782": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "440",
   "Subparagraph": "(a)",
   "Topic": "954",
   "URI": "https://asc.fasb.org/extlink&oid=6491277&loc=d3e6429-115629",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r783": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "360",
   "Subparagraph": "(d)",
   "Topic": "958",
   "URI": "https://asc.fasb.org/extlink&oid=126982197&loc=d3e99779-112916",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r784": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "6",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "360",
   "Topic": "958",
   "URI": "https://asc.fasb.org/extlink&oid=126982197&loc=d3e99893-112916",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r785": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "7",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "360",
   "Topic": "958",
   "URI": "https://asc.fasb.org/extlink&oid=126982197&loc=SL120174063-112916",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r786": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "360",
   "Subparagraph": "(SX 210.12-28(Column B))",
   "Topic": "970",
   "URI": "https://asc.fasb.org/extlink&oid=120402810&loc=d3e638233-123024",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r787": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "360",
   "Subparagraph": "(SX 210.12-28(Column C))",
   "Topic": "970",
   "URI": "https://asc.fasb.org/extlink&oid=120402810&loc=d3e638233-123024",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r788": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "360",
   "Subparagraph": "(SX 210.12-28(Column D))",
   "Topic": "970",
   "URI": "https://asc.fasb.org/extlink&oid=120402810&loc=d3e638233-123024",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r789": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "360",
   "Subparagraph": "(SX 210.12-28(Column E))",
   "Topic": "970",
   "URI": "https://asc.fasb.org/extlink&oid=120402810&loc=d3e638233-123024",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r79": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "250",
   "URI": "https://asc.fasb.org/extlink&oid=124431687&loc=d3e22499-107794",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r790": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "360",
   "Subparagraph": "(SX 210.12-28(Column F))",
   "Topic": "970",
   "URI": "https://asc.fasb.org/extlink&oid=120402810&loc=d3e638233-123024",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r791": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "360",
   "Subparagraph": "(SX 210.12-28(Column G))",
   "Topic": "970",
   "URI": "https://asc.fasb.org/extlink&oid=120402810&loc=d3e638233-123024",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r792": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "360",
   "Subparagraph": "(SX 210.12-28(Column H))",
   "Topic": "970",
   "URI": "https://asc.fasb.org/extlink&oid=120402810&loc=d3e638233-123024",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r793": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "360",
   "Subparagraph": "(SX 210.12-28(Column I))",
   "Topic": "970",
   "URI": "https://asc.fasb.org/extlink&oid=120402810&loc=d3e638233-123024",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r794": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "360",
   "Subparagraph": "(SX 210.12-28(Footnote 2))",
   "Topic": "970",
   "URI": "https://asc.fasb.org/extlink&oid=120402810&loc=d3e638233-123024",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r795": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "310",
   "Subparagraph": "(c)",
   "Topic": "976",
   "URI": "https://asc.fasb.org/extlink&oid=6497875&loc=d3e22274-108663",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r796": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "310",
   "Subparagraph": "(b)",
   "Topic": "978",
   "URI": "https://asc.fasb.org/extlink&oid=126945304&loc=d3e27327-108691",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r797": {
   "Name": "Regulation S-K (SK)",
   "Number": "229",
   "Paragraph": "(b)",
   "Publisher": "SEC",
   "Section": "1403",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r798": {
   "Footnote": "2",
   "Name": "Regulation S-X (SX)",
   "Number": "210",
   "Publisher": "SEC",
   "Section": "12",
   "Subsection": "28",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r799": {
   "Footnote": "4",
   "Name": "Regulation S-X (SX)",
   "Number": "210",
   "Publisher": "SEC",
   "Section": "12",
   "Subsection": "29",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r8": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "5C",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Topic": "205",
   "URI": "https://asc.fasb.org/extlink&oid=109222650&loc=SL51721675-107760",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r80": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "250",
   "URI": "https://asc.fasb.org/extlink&oid=124431687&loc=d3e22583-107794",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r800": {
   "Name": "Regulation S-X (SX)",
   "Number": "210",
   "Paragraph": "Column B",
   "Publisher": "SEC",
   "Section": "12",
   "Subsection": "28",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r801": {
   "Name": "Regulation S-X (SX)",
   "Number": "210",
   "Paragraph": "Column C",
   "Publisher": "SEC",
   "Section": "12",
   "Subsection": "28",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r802": {
   "Name": "Regulation S-X (SX)",
   "Number": "210",
   "Paragraph": "Column D",
   "Publisher": "SEC",
   "Section": "12",
   "Subsection": "28",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r803": {
   "Name": "Regulation S-X (SX)",
   "Number": "210",
   "Paragraph": "Column E",
   "Publisher": "SEC",
   "Section": "12",
   "Subsection": "28",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r804": {
   "Name": "Regulation S-X (SX)",
   "Number": "210",
   "Paragraph": "Column F",
   "Publisher": "SEC",
   "Section": "12",
   "Subsection": "28",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r805": {
   "Name": "Regulation S-X (SX)",
   "Number": "210",
   "Paragraph": "Column G",
   "Publisher": "SEC",
   "Section": "12",
   "Subsection": "28",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r806": {
   "Name": "Regulation S-X (SX)",
   "Number": "210",
   "Paragraph": "Column H",
   "Publisher": "SEC",
   "Section": "12",
   "Subsection": "28",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r807": {
   "Name": "Regulation S-X (SX)",
   "Number": "210",
   "Paragraph": "Column I",
   "Publisher": "SEC",
   "Section": "12",
   "Subsection": "28",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r808": {
   "Name": "Regulation S-X (SX)",
   "Number": "210",
   "Publisher": "SEC",
   "Section": "12",
   "Subsection": "09",
   "role": "http://www.xbrl.org/2003/role/disclosureRef"
  },
  "r809": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=124098289&loc=d3e6676-107765",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r81": {
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "Topic": "250",
   "URI": "https://asc.fasb.org/topic&trid=2122394",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r810": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=124098289&loc=d3e6676-107765",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r811": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(6)(a)(1))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r812": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(6)(a)(3))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r813": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(6)(a)(4))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r814": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "22",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "20",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=99393222&loc=SL20226052-175313",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r815": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "23",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "230",
   "URI": "https://asc.fasb.org/extlink&oid=126954810&loc=d3e3505-108585",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r816": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "235",
   "URI": "https://asc.fasb.org/extlink&oid=126899994&loc=d3e18823-107790",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r817": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(d)",
   "Topic": "235",
   "URI": "https://asc.fasb.org/extlink&oid=126899994&loc=d3e18823-107790",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r818": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(e)",
   "Topic": "235",
   "URI": "https://asc.fasb.org/extlink&oid=126899994&loc=d3e18823-107790",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r819": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.4-08(m)(1)(ii)(A))",
   "Topic": "235",
   "URI": "https://asc.fasb.org/extlink&oid=120395691&loc=d3e23780-122690",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r82": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)",
   "Topic": "260",
   "URI": "https://asc.fasb.org/extlink&oid=124432515&loc=d3e3550-109257",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r820": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "52",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "10",
   "Topic": "260",
   "URI": "https://asc.fasb.org/extlink&oid=128363288&loc=d3e4984-109258",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r821": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "30",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(d)",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e8906-108599",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r822": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "31",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e8924-108599",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r823": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "8",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "30",
   "Topic": "326",
   "URI": "https://asc.fasb.org/extlink&oid=121590138&loc=SL82922954-210456",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r824": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "24",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "20",
   "Topic": "350",
   "URI": "https://asc.fasb.org/extlink&oid=122137925&loc=d3e14258-109268",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r825": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1B",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(d)",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466505&loc=SL123495323-112611",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r826": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "69B",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "20",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466577&loc=SL123495735-112612",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r827": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "69C",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "20",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466577&loc=SL123495737-112612",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r828": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "69E",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "20",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466577&loc=SL123495743-112612",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r829": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "69F",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "20",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466577&loc=SL123495745-112612",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r83": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "12",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "270",
   "URI": "https://asc.fasb.org/extlink&oid=126900757&loc=d3e725-108305",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r830": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "13",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(d)",
   "Topic": "505",
   "URI": "https://asc.fasb.org/extlink&oid=126973232&loc=SL123496158-112644",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r831": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "91",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "606",
   "URI": "https://asc.fasb.org/extlink&oid=126920602&loc=SL49130690-203046-203046",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r832": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "91",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "606",
   "URI": "https://asc.fasb.org/extlink&oid=126920602&loc=SL49130690-203046-203046",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r833": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "91",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "10",
   "Subparagraph": "(c)",
   "Topic": "606",
   "URI": "https://asc.fasb.org/extlink&oid=126920602&loc=SL49130690-203046-203046",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r834": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(d)(ii)",
   "Topic": "715",
   "URI": "https://asc.fasb.org/extlink&oid=123447040&loc=d3e1928-114920",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r835": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(d)(iv)(01)",
   "Topic": "715",
   "URI": "https://asc.fasb.org/extlink&oid=123447040&loc=d3e1928-114920",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r836": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "17",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "20",
   "Topic": "715",
   "URI": "https://asc.fasb.org/extlink&oid=123450688&loc=d3e4179-114921",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r837": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "11",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "80",
   "Subparagraph": "(a)",
   "Topic": "715",
   "URI": "https://asc.fasb.org/extlink&oid=65877416&loc=SL14450702-114947",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r838": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "6",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "80",
   "Subparagraph": "(a)",
   "Topic": "715",
   "URI": "https://asc.fasb.org/extlink&oid=65877416&loc=SL14450673-114947",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r839": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "8",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "80",
   "Topic": "715",
   "URI": "https://asc.fasb.org/extlink&oid=35742348&loc=SL14450788-114948",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r84": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "13",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "270",
   "URI": "https://asc.fasb.org/extlink&oid=126900757&loc=d3e765-108305",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r840": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)(1)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r841": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)(2)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r842": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)(3)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r843": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4J",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "10",
   "Topic": "810",
   "URI": "https://asc.fasb.org/extlink&oid=120409616&loc=SL4591551-111686",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r844": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4K",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "10",
   "Topic": "810",
   "URI": "https://asc.fasb.org/extlink&oid=120409616&loc=SL4591552-111686",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r845": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(c)(3)",
   "Topic": "842",
   "URI": "https://asc.fasb.org/extlink&oid=128292326&loc=SL77918673-209980",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r846": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "53",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "20",
   "Topic": "842",
   "URI": "https://asc.fasb.org/extlink&oid=123414884&loc=SL77918982-209971",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r847": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "10",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "10",
   "Topic": "852",
   "URI": "https://asc.fasb.org/extlink&oid=84165509&loc=d3e56426-112766",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r848": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "13H",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "40",
   "Subparagraph": "(a)",
   "Topic": "944",
   "URI": "https://asc.fasb.org/extlink&oid=126561865&loc=SL117783719-158441",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r849": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "13H",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "40",
   "Subparagraph": "(b)",
   "Topic": "944",
   "URI": "https://asc.fasb.org/extlink&oid=126561865&loc=SL117783719-158441",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r85": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "16",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "275",
   "URI": "https://asc.fasb.org/extlink&oid=99393423&loc=d3e6327-108592",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r850": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "29F",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "40",
   "Topic": "944",
   "URI": "https://asc.fasb.org/extlink&oid=126561865&loc=SL117819544-158441",
   "role": "http://www.xbrl.org/2003/role/exampleRef"
  },
  "r851": {
   "Name": "Exchange Act",
   "Number": "240",
   "Publisher": "SEC",
   "Section": "12",
   "Subsection": "b",
   "role": "http://www.xbrl.org/2003/role/presentationRef"
  },
  "r852": {
   "Name": "Exchange Act",
   "Number": "240",
   "Publisher": "SEC",
   "Section": "12",
   "Subsection": "b-2",
   "role": "http://www.xbrl.org/2003/role/presentationRef"
  },
  "r853": {
   "Name": "Exchange Act",
   "Number": "240",
   "Publisher": "SEC",
   "Section": "12",
   "Subsection": "d1-1",
   "role": "http://www.xbrl.org/2003/role/presentationRef"
  },
  "r854": {
   "Name": "Form 10-K",
   "Number": "249",
   "Publisher": "SEC",
   "Section": "310",
   "role": "http://www.xbrl.org/2003/role/presentationRef"
  },
  "r855": {
   "Name": "Form 20-F",
   "Number": "249",
   "Publisher": "SEC",
   "Section": "220",
   "Subsection": "f",
   "role": "http://www.xbrl.org/2003/role/presentationRef"
  },
  "r856": {
   "Name": "Form 40-F",
   "Number": "249",
   "Publisher": "SEC",
   "Section": "240",
   "Subsection": "f",
   "role": "http://www.xbrl.org/2003/role/presentationRef"
  },
  "r857": {
   "Name": "Forms 10-K, 10-Q, 20-F",
   "Number": "240",
   "Publisher": "SEC",
   "Section": "13",
   "Subsection": "a-1",
   "role": "http://www.xbrl.org/2003/role/presentationRef"
  },
  "r858": {
   "Name": "Regulation S-T",
   "Number": "232",
   "Publisher": "SEC",
   "Section": "405",
   "role": "http://www.xbrl.org/2003/role/presentationRef"
  },
  "r859": {
   "Name": "Securities Act",
   "Number": "230",
   "Publisher": "SEC",
   "Section": "405",
   "role": "http://www.xbrl.org/2003/role/presentationRef"
  },
  "r86": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "18",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "275",
   "URI": "https://asc.fasb.org/extlink&oid=99393423&loc=d3e6351-108592",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r860": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "10",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Topic": "450",
   "URI": "https://asc.fasb.org/extlink&oid=121557415&loc=d3e14615-108349",
   "role": "http://www.xbrl.org/2003/role/recommendedDisclosureRef"
  },
  "r861": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "855",
   "URI": "https://asc.fasb.org/extlink&oid=6842918&loc=SL6314020-165662",
   "role": "http://www.xbrl.org/2003/role/recommendedDisclosureRef"
  },
  "r862": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "6",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(c)",
   "Topic": "105",
   "URI": "https://asc.fasb.org/extlink&oid=126987489&loc=SL124442142-165695",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r863": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(1))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r864": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(17))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r865": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(9))",
   "Topic": "210",
   "URI": "https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r866": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=124431353&loc=SL124442407-227067",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r867": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "5",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=124431353&loc=SL124442411-227067",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r868": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "6",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "220",
   "URI": "https://asc.fasb.org/extlink&oid=124431353&loc=SL124452729-227067",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r869": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "28",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "230",
   "URI": "https://asc.fasb.org/extlink&oid=126954810&loc=d3e3602-108585",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r87": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "18",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "275",
   "URI": "https://asc.fasb.org/extlink&oid=99393423&loc=d3e6351-108592",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r870": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "28",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "230",
   "URI": "https://asc.fasb.org/extlink&oid=126954810&loc=d3e3602-108585",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r871": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.4-08(f))",
   "Topic": "235",
   "URI": "https://asc.fasb.org/extlink&oid=120395691&loc=d3e23780-122690",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r872": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.4-08(g)(1)(ii))",
   "Topic": "235",
   "URI": "https://asc.fasb.org/extlink&oid=120395691&loc=d3e23780-122690",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r873": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.4-08(h)(1)(Note 1))",
   "Topic": "235",
   "URI": "https://asc.fasb.org/extlink&oid=120395691&loc=d3e23780-122690",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r874": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.12-09(Column B))",
   "Topic": "235",
   "URI": "https://asc.fasb.org/extlink&oid=120395691&loc=d3e24092-122690",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r875": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.12-09(Column C(1)))",
   "Topic": "235",
   "URI": "https://asc.fasb.org/extlink&oid=120395691&loc=d3e24092-122690",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r876": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.12-09(Column C(2)))",
   "Topic": "235",
   "URI": "https://asc.fasb.org/extlink&oid=120395691&loc=d3e24092-122690",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r877": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.12-09(Column D))",
   "Topic": "235",
   "URI": "https://asc.fasb.org/extlink&oid=120395691&loc=d3e24092-122690",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r878": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.12-09(Column E))",
   "Topic": "235",
   "URI": "https://asc.fasb.org/extlink&oid=120395691&loc=d3e24092-122690",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r879": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "23",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "250",
   "URI": "https://asc.fasb.org/extlink&oid=124436220&loc=d3e21914-107793",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r88": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "20",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "275",
   "URI": "https://asc.fasb.org/extlink&oid=99393423&loc=d3e6404-108592",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r880": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "24",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "250",
   "URI": "https://asc.fasb.org/extlink&oid=124436220&loc=d3e21930-107793",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r881": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "5",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "250",
   "URI": "https://asc.fasb.org/extlink&oid=124436220&loc=d3e21711-107793",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r882": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "6",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "250",
   "URI": "https://asc.fasb.org/extlink&oid=124436220&loc=d3e21728-107793",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r883": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "250",
   "URI": "https://asc.fasb.org/extlink&oid=124431687&loc=d3e22583-107794",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r884": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "250",
   "URI": "https://asc.fasb.org/extlink&oid=124431687&loc=d3e22595-107794",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r885": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "260",
   "URI": "https://asc.fasb.org/extlink&oid=124432515&loc=d3e3550-109257",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r886": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "18",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e8672-108599",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r887": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "321",
   "URI": "https://asc.fasb.org/extlink&oid=126980263&loc=SL75117539-209714",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r888": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "321",
   "URI": "https://asc.fasb.org/extlink&oid=126980263&loc=SL75117539-209714",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r889": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)",
   "Topic": "321",
   "URI": "https://asc.fasb.org/extlink&oid=126980263&loc=SL75117539-209714",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r89": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "21",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "275",
   "URI": "https://asc.fasb.org/extlink&oid=99393423&loc=d3e6442-108592",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r890": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)",
   "Topic": "323",
   "URI": "https://asc.fasb.org/extlink&oid=114001798&loc=d3e33918-111571",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r891": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(d)",
   "Topic": "326",
   "URI": "https://asc.fasb.org/extlink&oid=122640432&loc=SL121648383-210437",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r892": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "30",
   "Topic": "326",
   "URI": "https://asc.fasb.org/extlink&oid=124269663&loc=SL82922888-210455",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r893": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(a)",
   "Topic": "350",
   "URI": "https://asc.fasb.org/extlink&oid=121556970&loc=d3e13816-109267",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r894": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(b)",
   "Topic": "350",
   "URI": "https://asc.fasb.org/extlink&oid=121556970&loc=d3e13816-109267",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r895": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(c)",
   "Topic": "350",
   "URI": "https://asc.fasb.org/extlink&oid=121556970&loc=d3e13816-109267",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r896": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(d)",
   "Topic": "350",
   "URI": "https://asc.fasb.org/extlink&oid=121556970&loc=d3e13816-109267",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r897": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(e)",
   "Topic": "350",
   "URI": "https://asc.fasb.org/extlink&oid=121556970&loc=d3e13816-109267",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r898": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(f)",
   "Topic": "350",
   "URI": "https://asc.fasb.org/extlink&oid=121556970&loc=d3e13816-109267",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r899": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(g)",
   "Topic": "350",
   "URI": "https://asc.fasb.org/extlink&oid=121556970&loc=d3e13816-109267",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r9": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "5D",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Topic": "205",
   "URI": "https://asc.fasb.org/extlink&oid=109222650&loc=SL51721677-107760",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r90": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "275",
   "URI": "https://asc.fasb.org/extlink&oid=99393423&loc=d3e6061-108592",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r900": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(h)",
   "Topic": "350",
   "URI": "https://asc.fasb.org/extlink&oid=121556970&loc=d3e13816-109267",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r901": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Topic": "350",
   "URI": "https://asc.fasb.org/extlink&oid=121556970&loc=d3e13816-109267",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r902": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1A",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Topic": "350",
   "URI": "https://asc.fasb.org/extlink&oid=121556970&loc=SL108378252-109267",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r903": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(b)",
   "Topic": "350",
   "URI": "https://asc.fasb.org/extlink&oid=121556970&loc=d3e13854-109267",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r904": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(c)",
   "Topic": "410",
   "URI": "https://asc.fasb.org/extlink&oid=6392692&loc=d3e7535-110849",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r905": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "10",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "30",
   "Subparagraph": "(c)",
   "Topic": "410",
   "URI": "https://asc.fasb.org/extlink&oid=6393242&loc=d3e13237-110859",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r906": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "420",
   "URI": "https://asc.fasb.org/extlink&oid=109237686&loc=d3e17752-110868",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r907": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(a)",
   "Topic": "450",
   "URI": "https://asc.fasb.org/extlink&oid=121557415&loc=d3e14435-108349",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r908": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "9",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(a)",
   "Topic": "450",
   "URI": "https://asc.fasb.org/extlink&oid=121557415&loc=d3e14557-108349",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r909": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "9",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(b)",
   "Topic": "450",
   "URI": "https://asc.fasb.org/extlink&oid=121557415&loc=d3e14557-108349",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r91": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "8",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "275",
   "URI": "https://asc.fasb.org/extlink&oid=99393423&loc=d3e6132-108592",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r910": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "20",
   "Subparagraph": "(SAB Topic 5.Y.Q2)",
   "Topic": "450",
   "URI": "https://asc.fasb.org/extlink&oid=27011672&loc=d3e149879-122751",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r911": {
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "Topic": "450",
   "URI": "https://asc.fasb.org/topic&trid=2127136",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r912": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1A",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.13-01(a)(4)(ii))",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=126975872&loc=SL124442526-122756",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r913": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1A",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.13-01(a)(4)(iii))",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=126975872&loc=SL124442526-122756",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r914": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1B",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(d)",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466505&loc=SL123495323-112611",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r915": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1D",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(a)",
   "Topic": "470",
   "URI": "https://asc.fasb.org/extlink&oid=123466505&loc=SL123495340-112611",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r916": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "5",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "606",
   "URI": "https://asc.fasb.org/extlink&oid=126920106&loc=SL49130545-203045",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r917": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "27",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "10",
   "Topic": "606",
   "URI": "https://asc.fasb.org/extlink&oid=126920602&loc=SL49130611-203046-203046",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r918": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "91",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "606",
   "URI": "https://asc.fasb.org/extlink&oid=126920602&loc=SL49130690-203046-203046",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r919": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)(1)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r92": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "9",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "275",
   "URI": "https://asc.fasb.org/extlink&oid=99393423&loc=d3e6143-108592",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r920": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)(2)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r921": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)(3)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r922": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(1)(i)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r923": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(1)(ii)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r924": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(1)(iii)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r925": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(1)(iv)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r926": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(1)(iv)(01)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r927": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(1)(iv)(02)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r928": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(1)(iv)(03)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r929": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(1)(iv)(04)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r93": {
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "Topic": "275",
   "URI": "https://asc.fasb.org/topic&trid=2134479",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r930": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(2)(i)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r931": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(2)(ii)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r932": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(2)(iii)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r933": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(2)(iii)(01)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r934": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(2)(iii)(02)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r935": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(2)(iii)(03)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r936": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(d)(1)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r937": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(d)(2)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r938": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(e)(1)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r939": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(e)(2)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r94": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "22",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e8736-108599",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r940": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(f)(2)(i)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r941": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(f)(2)(ii)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r942": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(f)(2)(iii)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r943": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(f)(2)(iv)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r944": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(f)(2)(v)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128089324&loc=d3e5070-113901",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r945": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "15",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(e)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128097895&loc=SL121327923-165333",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r946": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "15",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(f)(1)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128097895&loc=SL121327923-165333",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r947": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "15",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(f)(2)",
   "Topic": "718",
   "URI": "https://asc.fasb.org/extlink&oid=128097895&loc=SL121327923-165333",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r948": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "12",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=121826272&loc=d3e32687-109319",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r949": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=121826272&loc=d3e32537-109319",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r95": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "25",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e8813-108599",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r950": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "6",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=121826272&loc=d3e32621-109319",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r951": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "9",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=121826272&loc=d3e32639-109319",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r952": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "9",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=121826272&loc=d3e32639-109319",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r953": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "8",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(d)(2)",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=126983759&loc=SL121830611-158277",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r954": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "8",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(d)(3)",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=126983759&loc=SL121830611-158277",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r955": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SAB Topic 6.I.7)",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=122134291&loc=d3e330036-122817",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r956": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "11",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "20",
   "Subparagraph": "(a)",
   "Topic": "740",
   "URI": "https://asc.fasb.org/extlink&oid=123586238&loc=d3e39076-109324",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r957": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "6A",
   "Publisher": "FASB",
   "Section": "25",
   "SubTopic": "20",
   "Topic": "815",
   "URI": "https://asc.fasb.org/extlink&oid=124256753&loc=SL5864739-113975",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r958": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "40",
   "Subparagraph": "(b)(1)",
   "Topic": "815",
   "URI": "https://asc.fasb.org/extlink&oid=126732423&loc=SL123482106-238011",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r959": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "40",
   "Subparagraph": "(e)(3)",
   "Topic": "815",
   "URI": "https://asc.fasb.org/extlink&oid=126732423&loc=SL123482106-238011",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r96": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "30",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e8906-108599",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r960": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "40",
   "Subparagraph": "(e)(4)",
   "Topic": "815",
   "URI": "https://asc.fasb.org/extlink&oid=126732423&loc=SL123482106-238011",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r961": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(bbb)(1)",
   "Topic": "820",
   "URI": "https://asc.fasb.org/extlink&oid=126976982&loc=d3e19207-110258",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r962": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "28",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(f)",
   "Topic": "825",
   "URI": "https://asc.fasb.org/extlink&oid=123596393&loc=d3e14064-108612",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r963": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "230",
   "Topic": "830",
   "URI": "https://asc.fasb.org/extlink&oid=123444420&loc=d3e33268-110906",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r964": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "20",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "30",
   "Topic": "830",
   "URI": "https://asc.fasb.org/extlink&oid=118261656&loc=d3e32211-110900",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r965": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "30",
   "Topic": "830",
   "URI": "https://asc.fasb.org/extlink&oid=6450520&loc=d3e32583-110901",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r966": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(a)(3)",
   "Topic": "842",
   "URI": "https://asc.fasb.org/extlink&oid=128292326&loc=SL77918673-209980",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r967": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "6",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Topic": "842",
   "URI": "https://asc.fasb.org/extlink&oid=128292326&loc=SL77918701-209980",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r968": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(a)(2)",
   "Topic": "848",
   "URI": "https://asc.fasb.org/extlink&oid=125980421&loc=SL125981372-237846",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r969": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "7",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "852",
   "URI": "https://asc.fasb.org/extlink&oid=124433192&loc=SL2890621-112765",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r97": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "40",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e9031-108599",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r970": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "7",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "852",
   "URI": "https://asc.fasb.org/extlink&oid=124433192&loc=SL2890621-112765",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r971": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(c)(1)",
   "Topic": "860",
   "URI": "https://asc.fasb.org/extlink&oid=121570589&loc=d3e107207-111719",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r972": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(c)(2)",
   "Topic": "860",
   "URI": "https://asc.fasb.org/extlink&oid=121570589&loc=d3e107207-111719",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r973": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(c)(3)",
   "Topic": "860",
   "URI": "https://asc.fasb.org/extlink&oid=121570589&loc=d3e107207-111719",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r974": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(b)(1)",
   "Topic": "860",
   "URI": "https://asc.fasb.org/extlink&oid=121570589&loc=d3e107314-111719",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r975": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(b)(2)",
   "Topic": "860",
   "URI": "https://asc.fasb.org/extlink&oid=121570589&loc=d3e107314-111719",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r976": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(b)(3)",
   "Topic": "860",
   "URI": "https://asc.fasb.org/extlink&oid=121570589&loc=d3e107314-111719",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r977": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "25",
   "SubTopic": "730",
   "Topic": "912",
   "URI": "https://asc.fasb.org/extlink&oid=6472174&loc=d3e58812-109433",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r978": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "320",
   "Subparagraph": "(b)",
   "Topic": "942",
   "URI": "https://asc.fasb.org/extlink&oid=126980459&loc=d3e62557-112803",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r979": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4H",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "40",
   "Topic": "944",
   "URI": "https://asc.fasb.org/extlink&oid=116884468&loc=SL65671331-158438",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r98": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "41",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "280",
   "URI": "https://asc.fasb.org/extlink&oid=126901519&loc=d3e9038-108599",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  },
  "r980": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "13H",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "40",
   "Subparagraph": "(c)",
   "Topic": "944",
   "URI": "https://asc.fasb.org/extlink&oid=126561865&loc=SL117783719-158441",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r981": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "80",
   "Subparagraph": "(e)",
   "Topic": "944",
   "URI": "https://asc.fasb.org/extlink&oid=124508989&loc=d3e19393-158473",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r982": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1B",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "825",
   "Topic": "944",
   "URI": "https://asc.fasb.org/extlink&oid=123600520&loc=SL75241803-196195",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r983": {
   "Name": "Regulation S-K (SK)",
   "Number": "229",
   "Paragraph": "(a)",
   "Publisher": "SEC",
   "Section": "1402",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r984": {
   "Name": "Regulation S-K (SK)",
   "Number": "229",
   "Paragraph": "(b)",
   "Publisher": "SEC",
   "Section": "1402",
   "Subparagraph": "(1)",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r985": {
   "Name": "Regulation S-K (SK)",
   "Number": "229",
   "Paragraph": "(b)",
   "Publisher": "SEC",
   "Section": "1402",
   "Subparagraph": "(2)",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r986": {
   "Name": "Regulation S-K (SK)",
   "Number": "229",
   "Paragraph": "(b)",
   "Publisher": "SEC",
   "Section": "1402",
   "Subparagraph": "(3)",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r987": {
   "Name": "Regulation S-K (SK)",
   "Number": "229",
   "Paragraph": "(c)",
   "Publisher": "SEC",
   "Section": "1402",
   "Subparagraph": "(2)(i)",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r988": {
   "Name": "Regulation S-K (SK)",
   "Number": "229",
   "Paragraph": "(c)",
   "Publisher": "SEC",
   "Section": "1402",
   "Subparagraph": "(2)(ii)",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r989": {
   "Name": "Regulation S-K (SK)",
   "Number": "229",
   "Paragraph": "(c)",
   "Publisher": "SEC",
   "Section": "1402",
   "Subparagraph": "(2)(iii)",
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef"
  },
  "r99": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SAB Topic 4.E)",
   "Topic": "310",
   "URI": "https://asc.fasb.org/extlink&oid=122038336&loc=d3e74512-122707",
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef"
  }
 },
 "version": "2.2"
}
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>ZIP
<SEQUENCE>128
<FILENAME>0001558370-23-001744-xbrl.zip
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
begin 644 0001558370-23-001744-xbrl.zip
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M(Y/@H BG),/BW =G^"?>*^V)L3Z?"=_:G+>"+UZ4DVSA6FP'8_L-!I4"BBN
M7W>&YK9K-A.RM;EO!=F,N<+XSC;.W0>Z=(GCCWNZP>N>@R5,2[]0OA1DLV+N
M5:!F$:A50M<V^!W&10][PU,$27XG$Z0FL[DHIR"K0&[=X*W<(/^XHR?4&9F<
MH;X9V<\9"@G6'XS^$#U)^J\(K+W8:JY5:2/38]GPYD3.R(DY68S,&+DKZD4^
MO6)X%4U\%#WP_EL]GHP7_":W2;5BUS.['M.&J^93 <[5%?S*A*A:FHM)+[VR
MB+<BGKS>GOX7'_4)0A:^%MJW!-PNE#H<)Y/)B5I:3!^,+_RI'O=1W(H-J\6J
MYX.R=T1 \HJ&#$SJ^KIL.9,>P:F:YW9\:M;YJ<3:5KU!=Q/VNG)0"]]TTA2R
MJK])T&+6XU[ +G?_&1#J_BRE1:;/U7V=[NPS8-/]LCZ+C?F*/LUE? 8<]$]Z
MVK(W/]2I>:'34/;ZISEMV?=]D+/SJYL&7'H_K6FAZO^T7H]W] QP]7X9T\(U
M^+:C_M<:&< ;_/*=!;'_+08];BTPP-;W#B*+EN8 ;=,167WYM]TL8(NY\Q%(
M\VE' P0=CZQ:2(R1>^T1>@8(],<3;<EWB[0SQ-(9,.@0+6>!Z! 'IPN ,T!@
MB'RSQ6^.E='$PQ@*W_ BH"W\'0,9AL8M&&#;,6;%PMHQ'L$4B&" J4L$@L5B
MQ[B#H0$'!NQVCS2PR [9Y!RTV=EITQ/&VPW178;GTWY*_[)[UH/@?%37=_8"
M,\FB@Q*&[0W72YB@C!E;(/ML9#?CIZ'4P]9P*TC;HW46KB&[V\UXZ4CU@!W5
M 6M]ELX"UGG+NZU:50GTX'QHJDWYJW,6D.[[X.V E GT@#2^L)VQL( ,WAQO
MAL=$K@?K8QTL_4:YQ6^''?-F!,T9]!C^7,=0OWMN,=Q]&[T9RL[Y](@.?[/.
M(CM\;[T94G,&/98G=2SUKP%8"#MLN#=C54C1@C*=U$%1-U#;LN^]"]^RN-%&
MI\>E:46CZ:IABU/GK7D-/L5T/2Z&BTPM''WN:VA?3"H2Z %IG&05SNE;1-YH
M\[*E^O3+K<>R80[6Z[RUQ7J7Q?ES*EW!U!U?MXO32+* 2ASIG1+)Y.WBKE!,
M;:=[WYB]SEL^##BTI@8WF1;X?%RJA_(JI0E^+>IB3PCOYE7W=$N#B";W/ ]U
MGG8N)A_IO<>GWEY!84Y!FO6"W;P@?;15>_ET;P8F['MO"A9>E[673;\!['-/
M/2D&;>PR6:X9@GT[%Y,#U"^?-SI 05BZQ&2]8$<OR+Y<<M'O.8(W8FORD_KU
M]&8_R;_B6Q7Q9<BG]O&"-_:=OJ\5[\;,Y"?U"^Z-?F)?+'Y'YR!RA?_'M; M
M\9.5Z8<5S!0?J5@7=K\'>4MO[B;WJ=^F;W8?4.#/ZE^GH$>\%:E4V0]!E_)&
MOW6J79RJM F9:$BOV986]B0'^5,OQB97^DM_5ZILA:8:["L5"GNCUH-VVCR[
MIC (P 9BP/O:];QZ/SBI3V]-#VPK$0XV&A;GW7'6S6=[Y37A7)O)=,/9M;/8
M77&^IRZ%?A<:QKM(N"LHU?E24*JYF'8W9B9/J+7\)D_(93JI4">3:GUC%]](
MR[-,<DJ"W[Y$!->1:.M0X8VX&KRE_F:+R5LR%ZD2HGPG5\ ZSK!WV&3Z6);V
M%6IS+BWPTUG# +'A+3:>O.A"4^[_KU#%?_#YJGNZ<%[4EQ"(/N])MM[X="_Y
MMA)T\7EO"QCOSR:SV71V-/TGF'OPLO93$N1?<HF7)^$?<+$\G$TF1[%;5$LH
M$9RR(,*M<7D^4CRF)R<GAXH*F*B(5*BIAZGR>\[AFYD%6/0UJP+?&*T"1^EK
M5=FWQFB43Y[Z&@59J/\^]OQR^"*]3V2S8<&"JV_)ER#@L<O''_$;F,9%Z 1D
M3>6&N+E<I;*D[L&2;P$!=HC&[CG27=$UN>:NXA-3RS9R_$,5T@&(2O73BRV5
MEA>*0X0 F4WV)]/]V;1= U-.]5L.U 1P.XEQ"^@2+]%MUJ.:S1>BE&L?^>Q/
M9_O3C\,5.3ID@0SQ!M]N2J@L^&L_S8=J'*$:1]/N:A3Y':M?7MA9@30#2C[N
M+G-!Y)-B$<E]+$?9Q0N+F9:$;&)7I'XH,S8]G;*1XTY:X)>A2D@1]E(@I8^%
MPZ^>@DM56RUEB=<^K4$Q2_JC607JQ[,@U.'S7GI6.Y\QQ8OU=U0P[L4#-6R&
M_VDBC%MQU(E]\J)X[?\JI&L<A( -T9,,6:B>6?LB>+1)21F0[#D!\WUD^7DO
M%!%V BIMHU@_*L8I2XTIN+AP0\,5]PI+P[?/ 15RQ3:@)VY*D"4M&-4]2VP>
MM'C[JH5#W3#M#2V,VXVPT<!,X3O!O<@-TRW[M/#C FA+K(C>":F>R&2*%YYE
MQ6&X>BSSAJZ?J$BUUU(TFI"CX?$U8=V-() JB!L.=+?,J,NF]>SXF U4EVB-
MHT3JS=<8QO=[>A'#U7I#F(@O/(TMWYV-!N$U#V!Z(UYW0#CSS#CI*;[9_O.>
MJQH ,^ZWBU\Y]$MUN*L)XT0YO?7B=E%%Y^+%]2./!<MTGT$%8S[2E_#4!Q=.
M3=V%@:%(PI3TW2OP W4CH<X9Q4I3[U+P->[[1V&RN8S!A.X%$0$8A*_OJ@ !
M<-LH=_6=N6@\/7Y?^=T+0IV[0HT%7=% 0JV-@Z^ON93P5XSG)1>4+8.S2 @:
MN*]?P&\E$E!Y&SQ"ZRS!+W$9(LZ ]3Y[%!$J1@1CB*\4JL<C>4E+[H\7^[Z-
M2E[8 UJ5[OO4:C/PM58E=V$PFBIYS8.EZC62O@+75!O&,RU%,#CW:.Q_Y)M'
M"LXN0Z@'0I;[E[;$<?8QJ9[SLA'US^-6_[19_=,?1/VS9O7/?A#USYO5/_]!
MU+]H5O]BY.HWS5NP-:U\_P9C?&F>\1ASCK,08)RFSB2IE[1@&-9@K9YDG&9=
M!3"A5M\4$E<JKA'Z3-Q2FDVF1V4+.U./T]A&I2=E$PTT(S5,30R@5E$!PQT8
M(U]&(1Z[E#)";YPG8C(;.Y/K)B-0@X/E]S&U%A,>6S2/8&@GV._4^Q9X,*_*
MMUK5#FFZW7H'30^]AVDJ3;Z@B<F6;&-1_2'BQE?42N?;1<D.&7\,:*6A[T0Z
MSLK3KOOC,^]J9I%TI&8V]<5-'7&Q&ROUVM6$KAW^&PH99]&>X\XR5?$^@CU%
M:0MPL=[X_)6*&Q*Z*ZC Q?2_0YE@&'%I>?L-^(QA)3P[[8]G+0.7^4QE.EMA
M1;D*U%T_Q(=NYUL@XM.8T(0"^2D-H #PNM]TM+$SGQ&O\!36Q'7!X_':Q>GK
M#?E?+LY\(N,;%!I6UH=QV;W;\<)/JU?<+8J>Z-5[[3[T,^X:JA&J(G<NIB*G
M\?70YR0DT$H*LJSTQTT)8VT[G\*K 'BIMZ&A1X6*OB%^O!Q^3@.^9H%B _4<
M&KXM%1+;L"#DR<6T86'%[ZV8Z5I1ZK(U\=^]$4T:_21R,(G?3*8C'\M@=R,=
M)_SI&LAE\]+(Y<C55UL."]!3\'7IR<UDB;8U^3MU3!Y]PGXI-W]!_#SFZP^8
M<=U&(6ZUXE;.'S'CTHH;7WM^+R,< L._:CA<&5NW)(ZS9GR%@1J1*VA;*0 7
M)J?NJV ;J<:'4;-_SC$B9:E(3U]SDCORBI\48O'E;GGW)-6&YR.,9A/7+$Q]
M5(:Y][]1LD=U%91G"M];B>^_2?U=2N!7RI8KC%2!D0,,K;Y@%!(,M?++U[\K
M/EVT,S06FR0:X?UW-@7Q:!YI)Q^X'[?IFL-4A5YU2-[OV^4:)LP"3_:=T_B_
M:FY;B45,SA-A"Y:^3YS-D@=E'O'4N&Y2MM-'U:MQN%!T3F%@!<R2BYW:BZ-3
MWO$Z1QY;5=':%(IE(A]-E$.'<<*/-DC(KC;#L5>\/I>VVK=//ELJ%F@(KHH^
MLG5,DL7BIHNINS$QM_6] GP'!O1>@0]NN8N:7-,0()3I)2TW),10N22,]P9L
M7$?KK![WSC:*I<^N6I.70<9FV<9@+%9*[%G*468WX*PAP75LG'PQC\)0!^0S
MCQ&<^\YEXJ/%JKT3EW&X^=<(IV.W"QR<0$4\)Z]X,Q%J#C@^\K/D2!V](>(W
M&IZ1#0N)GP0[9[.AW7B,P2?**W"I06@%=2/<44\OYT3CFI?MS)G&9ZB,5Q-#
M7$2^I%AGJ4PJ:]XDHTG9*N,9CWSOE";YJ-=<%F_"]]TK2(\22T(,U#49A7A=
M]7ON^W@$"%T]G@;AW D&7WE;L1N+\8[QOOEXEQAU5W,7M);)(=4PZ>++RT =
M:<>Y*J1FLU]!3=6"H8)Y(&[9S$Z4XS3R!CINE_AJG@$5U$_V(PL/F8!=KHI@
MSSR[9Y[Q'H=)YYF_LG"5SKQ2*UY5Z-\B"KSLRUFY& ;G'F^!5%_'R:+3Z]_'
MO!=;4+>VN]J2-KYI6?+,4,/#114_[$(X7I<K# >*0^KR#IN>9IPM:S8T3 \]
M5$?.Q00-/C"WH$LJQKM(?;M84/%&2_YE7F,8.U?F>MGZ='ZU37%R:*3\/A6Q
MR]+=4,@>J-@R'.(&'HMW+0/O"ZYZ>TF\5^KO\5;@SB[27]Z[5JY.$^XSG!;A
MW9BA6NO,UG8?V9JF/RM-7I\<XVP [WB(@>G$]U_/F:_FQO'.>.4D@I%LG.;=
M!A1WA+EZ]Q-/^N-PHC(OT)*,TZS\99OTCHM: +6>Y$<QJQ8PK2<9IUG%A97"
M^H(**BD<]='1C&3%I:AE' /W7]3WKH(+Z0K^W&1+(]5(K,%CRZF&C_R4-MEB
MH!G%X"=?T7N@ </H95SFA&']5VBUY7E$9Y/9476PWBO/..M5)R-^'F#XSV,W
MG&PV,"2#WKAX0T&I/=&3C'>F68@^>>1S+QX]$O^.,*AVR0;%Q0N.(",F5TA7
M69:]72@@[^DFB=C(YCOOPWJ\:\!=[$W#6G#X*F!2%*I+,M+-@CXE9^0TWH)J
MKBOPM4.-*E"-)1(J+_]T\3-7O1+4WX5RG$U@$N>9W<4"LZY+%@#D^#= LU5K
M:RW1H=USC6_%L5,'=CR@TSL>.>(/=,U<CN?%0RXJ1ZP;D\9IANI-HL#3F*,G
M&:=9#R[#!8(%<],E[@I$[>GC-*CY[H4X3B);U>IR74-;EG&:78X6."-"O&+;
MF)QW>@KS 5);A($QSW@' M4X8%,,<.$P2%LH<3\6HUUXOE@LJ!MF-ZCA$5H2
MTO(QVCLB<(6P/(3&X>!36+[1[JV8C=>1TDA9,"T.C\Y&'.K!E4*<DI%NM"XQ
MEXS<$1>;].Q.QK,5C*;*C:*9;+P-87[UXGQ+F-(2'Y$D/DVC*+/P(+P*#RS+
M4_"<Q#WW?6P)%R$5MP%]7(&ZR]7C,_\?2H1,;B>EZA*Y8EOZQXH=K8.]?U'4
M3MG\L2)'6_)YR/_ ,T5H8;Q5*&6TCK^93A>\IZCO?3(AMO57[J/R<[<85Y<5
M>F/JCHUAGTO"JPUGJQGW=,O]+3;C:CWODK@J=.H<!CFH-$PEIS7C>N3Y04V.
MP^RS*/L!!=#,88S%@3NDJ9ZI)=D+46%Z8"I?*#SE0O!G-)YL@#Q\+13,&_#:
MJ>$<5D#)*??N"]Q-,Z5+GW.!0]^]MOE7@6+73;(>M^EW.<Q?:[WSD_/9(U35
M9KBI?^F0;??6>B>,-8U"ZZPNB:A/9RJ%5J!KEG?VZ7:L.X\6C(40FY(-HKH5
M0RW3CU,0;/T4":F^P8!13>!6W,=7!P3?JL^R5 :=Z$?3MIGL+S=<Z='*,QX?
M';]'*:W-7 MUT?9-U&/GY'WJ>UGG1QX2_RL-KVD7"UNHW]'" :UY6>6'9(>@
MJXFM].,R\C1VZ(<5I6$:6YYO^&2VZ<EVV =ZEP'9.<.07 H*G]+PF=+@2\0\
MU/\JB!?;3NF""SRUKZ:E^<O?#[CVB!&8WS8>##/P5;+)Q]K@]7W8CW%DFYV(
MC.]_:+'3BU_$O%WT+<CW83_&@H1F(']L(^O.'XO7HF%G1X5LJ'Q#,H^M2E:?
M8\D#S!L,[D(\-@/SUY3BYU(*#V DV^P% [L0_S!#G1M0[C7>U[N, J_X)!%T
M?($:T.'W6O7OFW&,%3N/&6E9QVHC&*,Q%QOF1UOBSI]J9M23QFA 80.I<*0L
MCVG)3VK@,T5[C3M4G3*.91I67&*)7X^-WWK\Z_\!4$L#!!0    ( 'V 5E9%
M8L[;;AH  '&: 0 5    =F5C;RTR,#(R,3(S,5]C86PN>&UL[5U?;^,XDG\_
MX+Z#+O<R"VPZMI/826-Z%^ZDT]= NF,DZ9V]IX$BTS%W9-%'2?FSG_Z*%&5+
MMBB1M&S1\@"-F=@FB_Q5E8K%4K'XZ]_?9K[S@FB(2?#IJ/NA<^2@P"-C'#Q_
M.HK#8S?T,#[Z^]_^\S]^_:_CXW]^OK]UQL2+9RB('(\B-T)CYQ5'4^>1S.=N
MX'Q'E&+?=SY3/'Y&CM/M?.A]Z'PX<XZ/!8W/;@A]2.!P8KT/W<4O5X(>"3XZ
MO9,>_.OT3IW^Q_.+C^=]9_1]T? [S&^"*UOZ./CC(_O/$PSI - @_/@6XD]'
MTRB:?SPY>7U]_?!Z^H'09^C?Z9[\\_OM@S=%,_<8!V'D!AXZ$KT8D5RWMR?J
MIQU/3](QTN9O:^W%,-W+R\L3_NNB*1#"):0S,PGQQY!/[Y9X;L3E53DC1]J"
M?3I.FQVSKXZ[O>/3[H>W<'P$W'.<7RGQT3V:.'S"'Z/W.?IT%.+9W&>SX=]-
M*9I\.GI!'@$*O5ZWE_3_[X<(!,ETY(H$(?'QF,GUL^LS) ]3A*+PR&'4?]Y_
MRX%X04#J@T=F)^S7$Q4RG(U*LCG9"JK%E^'=Y&Z.*)?,!O!D]&S">45F<XJF
M* CQ"_H&YF*&;DE8$V@I<:LXX(;3&Y^\UH5Y26Z'**]QZ/DDC*E@\PA18/Z,
M! ]3ER*PT]@;!N-K[,<PW6L4N=A7PVM&N"'D+RB,N!B&+S /]\E'-X0^N#YZ
M0%Y,<811:(I=AW1CZ(.(T(TPKA)H!,F($C"6T?L(%H<(E.O+_\5XSGB?_I#]
MS@RKV1"-<.,K(>-7<,-@1M\"\!^>,>C>, QAQ4Q_,N.!#F';D*]^KIT#T@%L
MX\1P1FB$_\U=B]JY4$B\$0X,/8_&:/SE;0[.! IAKG?1%-%;[#YAGUM?YFN0
M@%EH,S88C= (+]CZB\5B%(S!#XE@AP<[/9CB=QS@63R[13!FIID91S889[_X
M<N7Z7F]7S!&#-<*A:_047;F4OL-<_^'Z,3)3##F9QE"!Y4(47#3Q^)KCDA%J
MT)=_=-]0F/PYC"**G^*(^9^/Y!J^"2/N@(,SBO!SL-QE;N+C;S9@TYQ:FNF[
MB9#B9Q2@"3;T%?5(-XW^'IJ!%?(QE\HC85O3&+SZ=_AUHX?#<(RF^7&-)HA2
M-!8?-D1>3$T;HP=K0.QS[MW";P(7&W;C$%J&:^@M0L$8C1??XH@-T.ET.QWG
MV%F0@[^S%!U!TM$.RW%P ,\G7FXB/@MR$IJ7'R,7 CU.:^*&3YQ@'!X_N^Z<
M!8%[)\B/PO0;+FHN9O'%[XF+FA*%+3GR/QVE7YXT,9>K&'0CB%:F5-CF]_[I
M1;?7O[CLGO8Z9^?]R\X@,^F,?@QI?OXN]5+Z\.>:RN0E(UJ<A/%LQJD=8Q!Y
MVG]"R6S),3$(T9DPH6-$/QUUCYPXA'F0.1O#]8^<5U@;IA'_9<>28.$WYI#!
M_]@&_L7UN8N6]U<D$E+J:X_DU.6T+EMSJ!;*O"PD]Q0M/U4\GWI4VJ$'=8 6
M&M&S2"/NP4VEV(/5;!-[H$FE'1I1!VBA$:<6:<30\T@,TP??%0$4T/@?**HP
M""5=VB%K;81"L&<6"?9G\(1]'_$0#'6]+!B)7$MZY$'W!]W3\ST4JRY (=7S
M,JG.*2:P%+QS.[]C$:=OIMY!.R4RS39IAQ K$0FI]2UZ%D<4S5V<QM#3$+K*
MYDBA9SO$:@I42'M@E;0E+U'ECVE9%WOD*]\2:\_?0M]8A&R#9_Z"XIY-XV[R
M,TQ>^4GD5MIG'P2G#T#%AVUR4;S! 3#@%K^@M=>V\N>OO-,^"-( @85.:_K.
M72*F].=]$$CI7%4\RQVS/@WA+Z+Z5<^,O$,>\F#0[7>L$X_F[%6<RB:M7L9;
M^D$"K]2G+&R[#S)3G[B%7F$F808<I(>(>'],B0_3#)FS%+VO"*NZ>7/SE^A5
MIH4]VJ3*]JR>50&Q,-2?3<<J??C7&]HC*U7^ETJL#)6%@DM#C2/WG<6AU"*O
M^<96"[!LCO+ JP+ ^F6YGCG!OOE=)$ 6)3X6"DNM4PN$M@%0E>W_!NZ41))I
MW/<W'$VOXC "QV\Q89;9?H\F<3!>?%,B7C-*>59<#+IG9WLI\QK1VQY-$.J=
MS76KLM#%[5L@>S.,%D89;DGP_(CHC.?KEGM+ZRU;)$A5=/L0K<@P02-DD>]E
MM6@596H"<<NK<:W/:V5TH[AQ&T2K@<S"1)/\FX:%<U =K:KJUP;1FH%465H;
M#TIF[8]29+*P0Q[_)>#O[Y^0]=!9N.I61BWE#>T1H$E$4!&/A6^U1U0X!!Q"
M659G04M[A*8IB'4)JJ*S,$0HZDI4R6^U68N$IP3-PH=O.![C9!8C%X-+?N7.
M<>3Z&3BR,$)EQQ9)UQ"LA3[N/3OY%J#Q%Y<&X,R%0\^+9TP.K 3,!'M8YOA4
M=\RQX+PSZ/::]G*-Y6T(UL) 4F;FW+F3U'6"???=!+;B\IBA#I46:4(=R-7=
MY%]/5LZ7UG[H5%K8+",%Z>G37OGITR5MATP<H[)INWTX0&JYTF9%JK_29N?Y
M\^G0-Z#/2:V*&"S2DKF?T83D#CI_>8NH"RJ' Y>^?P.!\%T<>Q]"?)C:<UHF
M08)WBR/F'X[NH-?M-FP6"A4@G\J_6VY8Z-LO C^5CTI!2_M$OFN)ED32*MAD
MH2Y\I3#9$243J9N8:6&?[%4YORZS*E@6RNH>O: @1JF6K[X-!Q;X,2LPS+(5
MX=]8[OT94+)/]E42+-H$U -;13>:C(%?D1"<5Y8,SJ.-B+Y@#X4/X"Q+PSBR
M#FT0NR:ZRIC.<8-+=EH2KVK!3MO9)S]SDZT&SD;QW:,0 8_8"?YKL$$^X>?4
M! RIC2[IDT?>ZU]V3FT1:ZEPBFRR+DP+5^8'Q-W&KR@ )K#BG</Q# <XC!A+
M7E"YH-4ZMT?B&^#52QII(#:7J=%Z-UD]$R<+Q95V:H_<#7!:&6X'18V]**;
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MW?==P^\4OIFO;!GXX9^_L'^>Z)03BF@8_?(2^;^]6\3QZI>/'Y^?GS\\?_J
MR9SV/SK^^%_?KQ_<!5HZ[_TPBIW01>_R7FR04K>7)Q)L.W[ZN)UCV_SEH'T^
MS?'//__\,?UUUY0.Y$N&KD+"?O7B78=BX\\?LQ]IT\C_)4HQN<:N$Z>L50(_
M$;9@G]YOF[UG7[T_/GG_Z?C#2^2]HX2>3'XE.$#W:#9)<?LEWJS0;^\B?[D*
M&.#I=PN"9K^]6R,7TQ%.3HY/LO[_\R&F/&?B=(;#" >^QT1@]V5T.WN(L?OG
M @<>%=*+OQ(_WKR;L.E^W%^5L%HC.O8'%R\_LE\_UAHWI;$6HS\VQ?O<C]P
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M1<'4Y1-I,D(F9<JZ_+;Y0<%9XC U0=R'RB7MNN)#2I?WRWP6.1.DXE2^H70
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MJ@>\A4>L22I< "E342YN9[OJ;%FN1+AS)XG6(?WNUI5)3R2+^J2/'""&<HR
MOB&TNV#59!,7#T <J=2*N'1\DJ7Y['QIDK<PU3UM&L::'-/":P </-WL_OR[
MCP@EW6)SC=8HT$J#;3RJ33]XRYS7QMEJCMYJA;PS>A0J)!4:%Q/\+$S68Z-/
MV/"3XOBC-[UU: ^KTK+'8J5^=5F7 7K89>C8=H-L8:.F(C4CCW0VA;]=U@6,
MSUTM=7P>\9#J)N>\.N/>X(F]ASJ]8'C;U7)5R")7(P5H>S*Z#N&X#GE;A/1N
M,]]U*&D^+->A!)'.G4W\V>FWAH3?]QB2LTF%B\4=\SU:XV#-7"8$>3[+2/,#
M"HGIEOF+8,N\&WZ2C3_93C#NF<<,E$;[XS$#I>O=,+P,%*&Q<E-S33L<B[?!
M!IUA[(8U(^@&>%GBR36*X[0^2=JB$8?X0UD/7!@+I@GW^#C;M7:_.\1GMIF]
M,"E9:PZ;#:90L1@%.)27KC"\AD#6%I'TB.@.XU&'4[H%9=!(7W.H-H*PE(A%
MIDCP*N1VB?V0)8'=KA$)_?EB_RA9^J8MGI'=+U?T2/+R\.RLE+QI.":$T[X>
M*QLB.E:Y#\U._F.5^['*O65;;[W*O8J4674Z,2G+O]NTM2I2EB&%Y'48XPI#
MN/O,D-R>YK;GO5RH3C$A^)F=!IT5_27>"!AI-@2$C8O)94PCY, &^=A]4CU_
M<=IP(/$,&0J=1Y%XDL'"OU0@T@)^+D'T$+-_TU:E3FT-.I#;SFVA"U;EZ!'6
MCQY6% /O-BP>E?1JO\NZ#[J\OPRQGFM#7P88$S8U/U-%T'0@A?;E2 !2&YX1
M^!%2F+RMEK/2T7[Z2O@E0ON:T@;[$<WQ!E8WOP&F/6O:-N7W#*\1H0"D3RVI
MM4[0;;C5\04(]<R-1QP[P0V*6<:T 3<$W89;N5Z 4,_<R!VDYOP0=AQ*S7D3
MG( O6/F9,"N@=9O$4>R$Z9,U":'_4LOKX^I#$LV'&US)^MJ86DI*2U^K8._/
M(!)EY9^GV/7O<1#,,'EVB&>6FG9\=%Q-32O.\&^3; [Z]?3V[&I2F&< &6I3
MUTV62<!J9=_&"T18H6R"%LSOSI+8*771-8XB6>J:V1!]!P%C"A<3\4H=\$B2
M<J#H R?3K0[S2D$^.:)V[74%)FFB@J MD%P%+1DL\D6 CN4[Y&IADX;.#?I#
MR'B0BE_I_K@^7F 8F.:0!^F5]ZGWSR1*SYJZW)-VAA HJ,,Z*5)@^$8WV#]"
M@IR %0&]"M<H@_,;Q8\9>ET.:@X#(9Y0AY>:Z('AJFSM/MB9U]M\74,(U-9%
MV=#:%K8\ PSMLC/$-(Z)_Y3$#(E'?.<0EKZ-XMO9H_/"CA>7V?%")!(F(T"P
MUZW(A0G2@+P2AV=5X:'DL"&$?5(->2T?00[1 L0>F3QN,;QC]8,HY3E$$/"R
M\:@@M+89XQO3P*9SZ2Z@N\63H^.?V1]FWJ03@3=IDHY)/[%ATP\#\!X]N OD
M)0%[WGE!V<+ROSW&4\K0;"M-",N"8ZMK=+K9M\F?*YTRX9"YEEH<O^]E/)V:
M3B#Q,U7:P/$KM<[6TDI=QMKR\EL;OST:H<>T57E=LYNI@+BXN.)>6N<[P=ZR
MAW*Y"O &94O";0J%] 0N:0]A)]>E+I2\FV(R='.[-*+;!Y<>+M()4UA98<?*
M]S\HU?D.E-JC0-BE=<W4VL2QJ[H\R.X??DC55]$'P WBNH)>U$X%EIUH:)0P
M&:/_IB!+E)#?$(*?LA\]X^,/Z+R\14"RZRTW@7.9N]--;QEI&#R2[E:![C-Y
M\L6C<Y<E1*Y"+W%3.4@MY%7(TC/]-6)ST\.[Y/D:W9X0=H,*4Z2+2A<,X,YX
M)":[O#V$79J"V'($QKO6RKO6G=CV\8;V>$-[O*$]WM"V[Z04F:R#B*FI2U)C
M8'OI!.V1I>2H;&^I&&#V06V:9GZ\Z!MM&$=7H31UONU)(.S@.A+&EBD%R%-0
M&[4L2V!_=R%*(\F/"R?L10:-IQ^$=ZI?Z32FX6N0V_2?WU$4[R[(B*Z4MSL%
MA,H"P.2/2R=H,O:D1NSI0+%>5CY)&ZN-7SOC0RAJT*%TM4,D:*)5AU8W"6-%
MOBN.IFO'#]@N]Q*3U%BW;<J4TT&HYP#,K"EI]AKD,-\A%.Z<9FAW=-;@S .A
MW 0PR1,3ZS6(W W.]Z6'^]:NI=!H:@@%-H )IA']7H6LEM> )%Y0E/Z%6C\&
MB^>!4%@$FA0*B64]B?TB6JU,$]A/Y GL%P]W=V/N^H!SUX>0Q&,C<WU,XGD]
M23RE).2[A+@+*@9Y9L47<2J)5K<!I.]HX?$:]D-C"'0,@8Y;[[<;"&VR]8;O
M[]]9;O8(Z.V,U0W%86;3LZJA;0< -"9\Y?'.CJC6>?7*^KZ]V0P1;CBIQ7%?
M7Y"R1>)8=Q)DQO,>18BLD7>)R642TP97490XH8M,_0>?Y/Z#;+;)=KK)#)-)
M-N%D.^/H7AC="Z-[870O@'4O#/B*2CV'0H=75%Z[!Z?>G:#1@S-Z<%ZG!T=V
M@!%O0J=/44P<MWKB->L*0>^[.H;HX _(7A0.R6?.RH^=0(&%P#S4&,=Z)0=#
M42]J?@UTK1\O[VF+><B\<GS9-SU?_B0_7^ZGRXZ:[U-_S:0XXWB^'/#Y,JLC
MN"NZ?LTF80"+CYO2'F_D]"FE@=VE0 ":]&RJZ /DJ*HAJAH\@E$-[0Q',95,
M)T#R.N2<=A#.MUI"5EYI#_"P7M,*4=07T] [1VL4X!5#Y.*%V0?YTPQ:/2'L
MC8V9I(69Y8,Q"NAP\V\H1,0)**!3;TGIR[9XS)62PRK7*<,Q((3HC%EIB./H
M[1B]'4/P=K17A92>[WP7"4@PGQ,TI[JV/Q=% H])B^-"6#*Z$;D6B /(US(-
MTG%%Y^_<M KD1+<SA$U>:[I2*FBM20! #->BPZ/S<DH7VYD?7U(BZ@M$6X-#
ML!Z="$Q;!++NN&.O+,E==^R0%)GZ[S[+_7?%6<4>O'3FT8\W8#_>^(3"^(3"
M^(0"Z"<4WG;)?4OO*(PE]R%P>^ E]SF FVDB!+=P"SQ0XM=Y8OX=(C-,EBP6
MGUH%A564-H=P9.K%_$FI .B@/?J!1S\P))_.#4Z?0T:9KD6/.':"ZGG]!L?_
M#\7[+)DV_,3-YAV$6>O.C]R,>("L86?8]BV:, X:O6E\+Q+[-B0UN]-WB4G^
M%6LGJ@/;-Q 0S.SKDFD!H:T[[O.::"^(N'Z$TG<0C+WT7^5>^FR*R7:.23;)
M*W#(5RL)_*#T(86W+%,"G&ZVB*=WOE/DFWCIFTX*XMA3&PE) *"3F8831FA'
M&-5>YH8$A7@(UT+I$*$: 8J&,P&)3W2HTRW)GYB$G;A0V02WL]*D4?9ER$^W
MU>\&X731H=;L':\ZQ.C< RN&XO$9U^%DH1N$/;5=3A:( >B URI-ZCEKFT\&
MS8';%OE,G+I-=T #]/2V2WS\C$C.AJ5O]HY#6U.^.B,IE^A.:?E:;>R/U:IO
M.3V8$L*]F8'*Z0$M+16\JPE^X;6 _*T+9;V)/J:&6S:O38'LEZ:OU8!N*Z$>
MXMZ'+97-;CV-JV=3T9F1E1$9FE@_=4;N?R!_OF!QFC4BSAS=(R8&].<SNJ=G
M;$B<X!&1Y8E,["% 9SVSSK9:0&#"FU6;4I=3-/=#1J!3)V Y=]*72\& :'.[
M_K842,6)86WV\V^8?ZCOS;YL:KA/K<+>[,MH"LV\M[T3/,2]S\T^;_;7M=E7
MFXK.-_L\(D,3Z[86HD-<(6WVFT#WNC;[-=0" A/>K-J4NO2RN3<&Z75MYB$K
M2)7RX+5"XP6>'--=#F_Y62@C@6]A-KAOUW<61^J"C+;2J+F4*]PAS6@8>M5+
MBL8IUC\?I%BS87C53EA5X^W\DRB=;$(/[)/5'H3MU\//P!Y+HHPE4:I&9BR)
M,I9$&5Q)%%Z)@N*B4:IG4/VA3O64]B:$FZ'<1Z&5]NC8?7+SFZS%TY_.C15Y
MQHH\+; M(G&!9?33GEWTPQ^B:W"5WRQL]D3IM%UL]BK86F(#5S\.?K6\A>(*
M38F&]H3Y.Z7',ED*Z5CYW:9-$3!]2\@*I!9(Z;S(25G^W6:4047*,J3 #W!C
MV::Q;)-E4;OX*Z'GAJN0[E22E#:W\0*1QX435OVF]S@(+C%AG=H6RYI P+WP
MTUB8>Z8DM.!,MZAG$0![0KR=?Q#>CTX,1\^ROB7XFQ#S;W2(.+H*LZI!O4MY
M=?I!&^D!"'F5WI:29-M I> GR_RKWC^3*$Z;"L09 D!PKW/V(> 0./ FS/KO
M*1>LF?7J]'#OC+X.LUZE]YN0<4KI&?)MBCD' K@7)EZ'I'-(_B:$?>IY?H:4
M_FN*UJ 9]";'DJM%0=(W(>0[\U+)#DY/+>=.C"X=G_SN!(DPRPX$:*_;4Z-E
MB7IVV6@PY4TH4/EX#T^+C.%[W?X@0*IDS)G7Z3DR51G0D YZ&]:>\H#FT9M8
MELKN"7C+DC%\K]N?!6A9,N;,F]"GW G"V )/F<R >]W^,D":9,:6UZ!&Z3_,
M@/CA/+,?TEOFK4TQZ,6A&^\7ETZO0<8,%[#T 2<H^YPJ,(,VQ9:\MG**6G]S
MJWHVB:91E"PST TOAA\?R=_>*DPUR>::%"8;;X"/-\#'&^#C#?#Q!GBO-\#Y
M3Y8[Y$\4G^$P.YL8O_LNZ#Z(J%=W[\ +J/(:-KD'>ZOQ@M%XP:@;4=MMG@M[
M1ZJ1WU&\P!X.\'S35<Z+R<R#CDIV<U(R(=]KL(EC*![D^MZ>77GU87=81O[B
M9858[8MS?^U[*/3N*=I]F'C^O(,V\)9D79^ZKU6&*^K[.P[H: %%M"]A5@ P
MZ'P00%*M(/-K%>][/_KSDB!T10\>!$5Q7U+-GW?0439 PLRG+C09?E)C^V2R
M(+'BZV8UQ]N9<- QMA:DMB.R6@^T742KU>6Z073M6!Y=NWBXNYM<_CZ&U%Y)
M2&WK8I9$U,I-WDA K8RTW85'*Q(&-(;%DR\>G;L,/ETL5P'>H-Q*)L1=4#%@
M$Y\<'7\1!YVTND%P1BG"1%IX0-MGC>&A,3S4@V4EV$7(BRXII:_HCH:%4K=/
M;*2O?US1+\+87[-H+)] Z<9(9)-;&W[0?D"I +9'(T@FC)E:A@WRSA.RRS7-
ML!+:8Z'=JCO:H/UL<K-5ER20A&2,38/UBXVQZ3$V/<:FQ]@T+",_QJ:'+NMC
M;'J,38^QZ5<LWF-L^C4*\QB;'F/38VRZ7FSZ'L4^26%/73#G;#2&7A@3_RG9
M^N_,PM2?C@["U/MI=K'J?*I)<:[TQP%$K 5DD@6AY5W>]#MM@I.R#I''I]=>
MS]-K@-\+,WQZ#=)[82*+OK/.JKBLR0#VXJ_F:!87=KFI&6#H5(!0'GLAWYW8
M7?CAO/0[M<\4_MM9^J.9,)B,"\$QU8FTF! !T.&D/C:MRP@,_XXMX>BA6&H-
MX$KEF'B)6,W'A. 'J<?TE@@ WQJ<X2B^I\C.0_]?2/2"AF9?" Z$3G2\BJBE
M(SW]:X6CK+Z$V<']I\.#>W&P 1S,KT)*$/00.W'FCW&"K/X&0O$T]+AU%D\W
M&8Y.\(W@9!71(8+$H]K)VE .^V&"O%MZ>DV=/9'LC-_;[#T;A>[QDB2X]S4Y
M',='ST)<M&Q]$=OR(F<"L#*WO_9H0"X!]*O=I76T+N6ZV!O?AN@&TS6<H#N"
MO<2-V19 ?/] VAQ"HE%#(=]M;Z6(0MJY%O$]"YPH\F>^FT5HQ*N+LI>%94'@
MM+"X+"BI!);U^I:;WP^(C=84;DV>M6)&V^5:]H$*X^QT\^ $U.3$?!GE6N1V
MA@1GM66B+&2U,=IVI:![JZ8*</0*@;T(B05"]WNR&'"TIHBF',LSBJCOY1]T
MK*#1<!!B,Y;EM#[Q.O?>YW$"9XYN9X_$"2/'35V/Q'>Y#X[)VT,(M5CBM09U
M>F7F=(F3,/X["KRK\"*B='Q6L9/7 T(8!0I#>?3IG*4LDV\[]2,^12J&RMM#
M")/89*><.H <#],H0O'5<N7XA!'I;.&0.1(^@"!HW"NWOX#BMHHTEL)H&34>
MG1<4Y0B$\VL<16<.(9M9]JB]87SM\]'G:GPMFV623D,_[F::L*DFI;D&$'X3
M$TH6-E/VLG(DI2R9)O$B%3UE>.JP,9QPDB93#@]KATA!<!44H9)Z]\3-@3CU
MY'(FYP<,%UZZ5M"UX9J.'OS?A/B1YZ>[:*F73MD+@B-.)6SE>A<*A.QR26P
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MM9B9[U+XTD+R$E,A;&LST=G07@AQ !2+EBSLJC.D7E>+KW(9H"9X=TM_US/
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M-N(0/"YE(DA=*MRF?2^F%2#H5))<;6%K0/X3"0-*2Z8(%<N;FT.PI+G9DO9
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MG)VU-[:G-46VO95O;)%W?DB\* B<.(%<1NP]O4> "USSY#S?8].R8$6G6>%
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M@[>P#R\?1ZR[K=B/(E) '-!<I=(0YN00)TA#:&5\EP9XGT6K,\9=/.E))']
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M[9T1 " 2M2D>_.3WRYAZ?@K_JM^!;>B!/#@UU#TZ(%#7''&(ZDC=XWA 09L
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M_-;.4MXS.)'RW8K+YFQW 66=4^)&2?J>4U'US2DY6V!:2<K9[>+H51RO)BO
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M\FKHM_="'/0=A#=_ 4RP6/"JHF+5)&>#)MHG,(0:Y[O<*#M@N,@K97">EO,
M>35(?^BOZH$\V#74K1[@3YHC#F\=J8=PY_PR&99PGDIQ5YQ;@O6)=<9HP)MR
M:@I2OA/X^36KU)2KUY2K]R:&-):',5)^9<Z8$O9;<_T5,XT51FX?.+&L]"4+
M2&77=*GD3E9Y:3^GN/0E(VJ1U1P+'/=WLML<$A^>%T_VRR3EI_3X0V4.$1=8
M2>"OJ"C7Y2<I!"8;:'<TA2)4"UC4V#I_ARIH,!6?^$:=O9^A/.4ZN2Z=LY\<
MR!O.,R RF5^8+'//PG/[P/Y@.5L$13CE!?%C2UWOH93>N7+M-'LQH]/ZSD L
MD(XD8QJT*HT<@OX,\LY!U1PBDJ\;BQPLB)")J$+)]V70Y;;HC$N3E->.]-CH
M'<)">.FJ.Y4OD178Z8=G;"+L0CF=A__+V>[^]2JK)'D,MWR$ER4JH.#G:A\0
MN/EL9Y5,.93BNO&>>K>^L_0#OLC?]:!8.X&90*:^,6H.?[7TG@'<=5!BD -=
M@AE1N*$#J8E-XF0FR<!&S"-$$58WVU\("D%&F:I?T15EG+SLX> N$_.VKDB1
MP,0 %9/NQG[SF6+KJ6$\H=[PPT;'DVI1I%LP)K'@S ]:BWK&GBQ;$],=#,E0
MM8;&?N2)A6=14+EX"$R4B!:[U_XZY)6LH59RMMC%ZS='+@\HUGD?RXKAQ]0_
MD*LCF0@<_\Y#\ #;X)EDLBAV E?N"+_G&-. 9Q-0-"<GL.-/ _-"UF[J/P,1
M4%ZL$,A&&T8WC%)R8*264/$Y%J]W_X,RF7ZE(8V=(."%F&6Q9V@ 5RR/C0BE
MGT,"%;ZI2R'A@)W^Q/=H]D()?S+=8>"2/9.^I$P:* ^T\>DS2.G2.'7\D# #
M,]#TG:P .FL/%="W5-2HEMR8JDNJ2 OK%XPAE$\'*7D>].OY^;VUE8MQO3N'
M\KM5X3KR!7;;0YL=2Y07F8_=TW+Z>_1.MQSC#QV38&TR2 ? OH:I3HCU:,PB
M+>ZHRA!!<_S8?9XE'ZP#"0K[**"RRTSU(DW%M*6QK<FUJ,-TM^,C;+CFI9-R
M@\C3?%H 8T8).<;T,,]I7;).9! C31]M^M8QR[F*BF:+ F@6Q:%9+)!CPU J
MZI2/Q@; 7IV0$X8&/UK.:;)\[H*9X^]1?)DE]LG%X4'.;A[IFI\X[ICE]"",
M').&,UYU)F1*%3%B#:C<$'$IYUC+ ^%BD%P.^"B7A$A1T  :,CNZN=E>-I$L
M$LRF:S#'W\+" '\*ZN./_R<T9M8@SGH=P[M@RFM@8J6!FY?U"FE*X&Z M;>,
MGRDS'A,&+I=I(5Y;'^1@IJ7RT8O&]1T00Y">W,8/4A74";]DB04QQE6[! ;R
MR;W\?KAJE$<:^BR^OT:II=B^8<@$#RN*!]/%0P3\@VRGN"AZKGF1T9@<<D3H
M:ZCR!48S6HAQI+=*YA<7!1\B.,OW0<1G\M2&4KH?"P)9,]C1F39AJ&RK5-UM
M0053I9WD_7;/I>3OREY&VUU,-TQZ_YD*8\+-]NXG,(RH(@>M@<Q6>U:C.TG$
M$#:49@.=ZI 29,\GEV208/<.Q'B/!M,P69 _=UPL;RN[RWS5B3KNAI='C$(J
M'D(^O[N\6?"9%O1V7FV7:MWN@NA Z2.-GWV7RL*1U -3,CORG>?S@(O!_@53
M7[E??,_WW>'UD0ZULH?G-QML',G4-05AAV4V"SP=2^=!BLIFLI%,.%%8]@P:
M>D25;T$*"<5J67X^0PC)WR?"N"B&V?R)8FU7$4=FI)91&,HE25NHU@*+?(UX
MW1'JG;] 8?:.&6<?RK-!UM[FJ\908[*S0,O^V@T1F*H4)1SD,+<@N21$B((0
M]RP:<K_=.O$![+A7[5B+=E!*TO;,NGI<>$R90>[XL=#D/#MLV1'J>A">#=+U
M-5XUT)E2G07.]59N")BKS_:X("23A"5_\J Q/IRS9\@"YA)NK2@[/IZQPPEH
M\&EROD\W40R@_"WT:*P8"XJ_)!>'SZ\T=OV$WL<L97Z =83>@#<$X[D#XF#&
M[P28O;G.&5"'4WYDP.6"DD)2ECMY\-*+ L2\?%3"2SA(@0F7F'"1YP/."'Z4
M KQ]?K=$9*+.,MJG93A7OA[ELIRBMU2X^2DJD_Y(@=/8%!5WY]H[S^<"70==
MABU+4_)\*EE;NVHU@1U*Z*QB;<[0.JQ:,$IU:IL4+H$AN5T>CRL/-$G96)%2
MC]OH//2./OD6^FFO>?S0+)'B\I0&;TAE!^4WGR1V'+7'35\+@3(4%:\R'WW(
MY42_F(#,_@46AU%XEBT[QX5IP=([&O,L55P?YS.)/LL0[4EKGM??.P=(:OA"
M,E2,30\W(1.-9SH)/_WPM''";"4&7MD0^VU)LM^*SSKENB.R10K%4QN^*K,>
MB^>,$O+133!L'@\'?M2Z%4[!'VI'E4I6'"CKGD9Y[2K^8?E1+\H595/A7-.L
MH@R_RQ')56(_S,I:+<B23:.A_$3@;WUQI/(7\LYYSS>V.6HQ4-XNR+NE\M%S
M!*])\_O)F0JB,L4?DPS36'M7:>\Q?/-HZ,'GWGL2^\GO9ZN84A(S+=XE[T5E
MCW?T/3<.W"SAEU!V49)R& 4#2!P%!>Q-<]!Z5]W@G\DI=C\71(A*%%FS<WL@
M;;&+D M,%(FM9P'S^3&*3. YMZ0:V=R[E4S X;N[&*9JI_:4IW(@?;IGO^6&
MM8!UO\XIPC0<D68'$YJ[;<MA(';SF::-HO780)V?]^/S,2DDWUC BL^S,+\.
M-%-I?+&FMI/&A_<OK+][!8?2+WCE+O'O)^?UBOV'94DNF^]>L\]9.MD1B$VI
MS@9L>YFM[O$L Y*S ,U^F@U3]YW?&\D*U&5_,2$61(K!9PR9( B!S[X)_>SJ
M3<"OWO#2?_#NGQ_N8385[;*B@(DT<M8^=5ZMWYV[E/==$FE(9KSLON$%#>G*
M[_K<GPG%V6";L;FJ<:TSN5E@FKE60P1CP5U!-R9 ?O/W728#QDMR=DWGEDS'
MUYJDS9;29J(0.QK\^KQ:45C3+Y#_P4DIW%8)73_P.>YV!# CDK-!,'.#U5Q>
MZTQO%AC60ZU!KJ!)]BJ @02D+ )""+-LN;ALGPS'"L3*(0W ;@\KYOM$+OI?
M4ZC?'+"IJ)/NX6%7OFC.ZTR+%YP5,KLX>O83P_-O P*@+#?,["Q>^& 9K_FS
M$UVIS0;VC,Q4C7B=2,T"[,PT&B):\V+>@&_GQ1-ON)^NL&>OO,XW0)#R)%[/
MQROZXY%8ZE.2UDL^ 5Y3AL6TO>: ?G?LB-/1$"6(T>R+&5.ZJC# VK*2(968
MX0&.R8S2F <MZ=H/0_Y"!CPJ'?*GML23'N)6JGR2@J<W4>+S-2O;\SM^V.$W
MWV/I9'[E("OI><TB[_,K,W_H!$I=SZQH.H!R5MZ@2\V3P?EA!ZRQ35TS;1R6
M&69('%UG4[B0Q7WY@K5D7J[P*_ESR) 2('@$%K]Q2Q5-H$XOF).![AD;"GZG
M*8YBYDFE92";C<(U?S]2Y+<7AU]IM(Z=W0:>6#Z/J6-8Y'Q(AK,!UK&,W5@4
M?3!NLX#6T90>LHAZ'<[R"2\3,'M^5KXYR_!"E9)P,?$DM?.P?0Z]ZYPI2XW7
MMM;MONZW2QK?K?*7-F3M^1HK-[5'CG^MJJKP5=L8,?JTRVSJP((RN&_QB(PD
M;B?:I] URG5-:G2=)$2O_83ADJAR=[6/J^Y!M#1%'IA-"JHQ6=4.<3@VBFOJ
MG8*HK.8HR=J)P3$5%.^RP@48L5ST#MZ4= [)>RLAF&44]S%<UV/BP0$(SV>(
M<!.Z,>6WDP*HV,;P: DK5@PS8$4-FM?8KA]%Y $]@+G4N.]!#C$\#*%5SX66
M!<FYDYS]@B@"\$**?-R7,A I!/F>QC"'<(*$6DKY49APEYN0%B;T%1.ZF0FC
MW(1N)L2 EWZ/'N84H'QDML:&2"&E7;G\*FQE*^R75YN%-G?.'3R-"N?FX!A)
M_EYJ-JKR>3]\P5\O9ZZY\F$!P''A5^!WTB)1C7XG5UOE+0@/9J[YVV$37\4<
MQU8G[^\*NA9N-XZCWV_E']]*_G3N\6=:X%Q3=G:T!M$K&R*%IG;EU"3FM!7B
MW*1!6%,W5$C*@\]VDH:1=>M1$[ZNGD=U+7R(ZC7/,2X.U5?MLCTDEO)X8NO\
M//1^C1V/>G\5]^KE(HJH+UT%21/R1AKE5GZ"HKS'1(RQITF3VZ'_ZJ&XUD]>
M_'1#7C:^N\GJ9!"61Q$:9/4U(I+&U$E+K:,P.) D>^K#S27GVS*\P9HK0++J
M&%,7Q)C+3U%7!HLHLD(ZVW 16[ZW<EG^$834)!-[08H?_;RREL,$N>-L?A4+
M 6(GY0V"Z 7F4M=1?!7ME^EJ'YQG+R<_Y \G7^[CF&E=EZITI(%T".UEDE(.
MW84 YO3:2 _C[%1RXU?E)#\B&9*"XX)D/"UEYA;-XDFS5+QN/F N?\-D?V;M
M&=5;FH)%[E:7,64 ]L5)][$O9_U?_-#?[K=52-^=!%)8Z&.0/$'NV!][GFNJ
MSD +A5M!5JX31FQ:FPW-?B$8"81D_((NEXUL03@Z<2(ZM:T4?N2V,(%@221/
MN36;<;60"DYMEUQSZ36K9F]92#>S@:O.:V]<S4F\"5PM&Z0[KHK^;P97C]09
M"E<%V3>&JP/9JB.N"JZ8<74@NQC@:K5M)IGO7CK)!LIO/CL!N/UY>NG$\8'-
MOJ&N6]UV3VLGI!#;36EU"MO< _&<55-P4V<'\D2AOR!.2B0+7O+0TG;1%'K3
M@OZ .1&0/@^](P6^.'X(YU"H=[=/$]^C%X?'_9+]PW=BGR;G"0,Q]W1):AB*
M2,-Y0'/E"50_<MCSJ8&T&RB]V@FRSEH4C8*0@J5@]RBVV/@HY2.1$%"68X&G
M(?C[%TXJ;F<DBMP3YU^6;7O9Q7Q'EB+OG(0X\O<X.:L[09(V)^.=.EZS^7J,
M!7(3YREVX);]E7-(+J,0I("J(=&E$[C[@(GPA=\%O71V?NH$_C]JX[\G/<SC
MP!"FRD>!/L2PCP&#Z-9_&S$5[/GM +Z4[V:,91$MA\VV86C@KU.0'7^),X-]
MV"MU0GBZPHVVVRB4-9_9?(L_ML'G[M2!]SKXMC _+\E?YO!#XGA_W_-7?L0%
M:L97U; 0(PHG'D"0_# 9>P+\22$ >8I(+@(1,I"R$!;&#20V*SES=T>S<X64
MOF2[=$SR^S@*(ZC<(I[?B"\W< #A)E1;^*'K[P+*+]G6S+KZTD0ZP QJLM)U
MU3X$$:\Z#*.7<5S2%U(0)V7^A T10@*(T5*S3(CL:OS)Y1CSJ$SB5(E(]E<1
MC>R/O_$L$H1[9/DCRVRC\U?_^%AG4SND4=.J&D1";2.$WMTNJWFE 4&,? =R
M$WI>QO=;F.RHZZ]\ZEU%,.6ITKRA+68/;%,Q]\*ZAE@]L57>OMZX( IM\EU0
M-W+.VJ7.+#T3C]3_NO<].-ES$XK:O^(IAG-//(%WMRK FD5AZ,'!PF\[R.T9
MY1]__/,7"NE8]>K"*'R0>OWHIE462X=G@GWZ/*K.YNM74BBR!ZG(.A,+<AS*
M!2MFQU(X?O"YR']R^8@0D("$9S_^>?)E5(3VY:*0@*X=]R"/&AJ>4*Z!PBN?
MJ1=3IND%35\H#6L4#[WS%9L2&T/A2'PP0^&8ILVA< PFV*%P5)U-0U5P!MQS
MQ8GCTNUI9[<+?#<O99O#)"Q :F A+_;OP&J8N*\@N^?8ZJ#&5I0_6"$460JI
MRE9\_)9;GU<H'P*$![@9#6M[?$'A.HH;ECLJIO*F-)!B;"^3E*]:=R" <%+6
M3P_S2\PY-XYBS8M?0Z\O= B9)T:;Y6M9:%=F*"U-D0= DX*JGU>U0^S.C>*:
M>BT0Y>@ND;[/ZD)_-*\?Z#[^_/%3HZ_J]D7NO)U,4$)MG8Z(W;N;_,8HS;.8
MCS^???RT((_^EF6AJX/<Z5;@&A"\>(?"TB,L)I/+KGWG&P[5D\!.'><9#@/F
M_$I2_PNYHLL!R]BW['A<[K=\T_V9BAF/./M?C&_GV:;]A1/ Q*C2U_O00>KW
MO4TC=U&,B"",A_ZZ&*_EYERSUQL7\@Z-DB\MB&1.,NZS.D-RZX?T)J7;VG+E
M ]!%&FF#FVZ(\R0Y4821.+QNULZ5@"B$RV+MH1O[5E1,(_C927(;=*W-@3CZ
MTN/ZK,-01 Y7 YBK=)_.G!QBB!I"*^.TH1%[%DV[$0N2"8&@-O3<33@;+'N*
MG5 \S7C',\K/HG(7/+S#/H?+TGY25^!J3'YO$ <[F;HO2FHQ>V,8VDUG*_!0
MB$B$C"03DGPOQ"2?P_V6BJ<S9H2_<S;_@$=XLHGXXX;25*;+Y\NDZCD1G?9(
M@5!;U?QH3%-C[$=<M&0WGD]&\ Z['PJ_=)X=/X"+!Q,?"AE5Q8PXX=1)/O\E
MWR6'B6%N:HT#T-AG]'\9$&@^.S&\1P*WGWEQV"L_<8,(;CLVP8U6+\R@HZ]V
M#CWM7; #4 <-Y@U#$R@J6<!ZNB@?O2 %&[N8-,7O3.%8)-];?L=()^_A9&1^
M@QJ8GH#4V*N24ZF>;:FWZMNG5 --!9=;9MIS&41/T27G]P@7U#=1X,%3M@T@
M;40%,VB;FZ4HQM"9!'90[Z'1O$'>AN(,];+P?W?+42_G"P>V!6>BLK8[$-@P
MD5ATB&(C/!Q@$UE7XPLG\=TCHYE300J;/<U2W@[N1 +QJJ"I)M.AQH)PSO;V
M=:<WD$@FK6#&3<A0E";I77@9A?P5+Z8M'"1C<MVMGIS7&C/I]$.."]JJJTC0
MV@EQ[.O+;CX]$!S@_4R%!S^9N"#@ZE 7R7FULR0_H?[9*WC$29+(]?E]8G[1
MS56,$D:II2,;^AAWY0?[^H,:)G20@X*Q:<S2A8P(8M PUV7*E"'C/0ZN1*D3
M#),R#&FB; 7*46VCKLED+*T S&_47V^8HN>B]* L+L=7I1(H00K[BE!F3MBC
M6*CB)^-JUG4&)XX<BH8UHHI/PU!&#%H#*V@:IE(,DLFA/)0H1"&*+/ .&7,*
M/_#%K?J1%T\TID)(K'A%PVCKA_;652KMD"E]8HSB&G$7JVI1FR->Z9NI%:#:
M2<T-D3IH-#0$9:RK<*C@;F>:9LM46<$3!LX[-C,+4]\)@@/Q@#'<(4J49W*=
MRF=N)UJP<44Q9B?(\DMNDO,TC?WE/I69)TPS$U[8"2:XC]2%IW1\6G=/J#]5
MY. TD-G*2T&]2"(&JZ$TZ['++/GGTSV!4ZH(,.&YDM%9!&\A%_P%DI%"-%NI
ME&V+YG:BN9UP+$4]NAOJ[0,HC,$05X)MH?GG5S?8>]2[9M$,U>KW8C/X;G5\
MV*&IFO;@3)"#W3A&5;%O6 Z(H7 D1<TKR@IQ^!5F12 %XH@4211J4X2"3J='
MMX:OTMVE0D8_HUX<J@DT%0L;E2-R8)C W*4:'N.Q0PP94VAM?&>X!C,LEC.K
MUO:KLZ65%=0[=)ME,)XJWAY119_9A46%Z /[]H( CU&JKA?[.^I;:_75TYO;
M(W57;56+:N8-C;&?*-62W=A#22+<\D#2C0,/&85D2>5,C#]VI&SB@0P?R!?G
M %M],'9DKW.)PC7,KU^<.';X6['J7&X9A1[[:,<\E\9083?[('V)SMS 28[>
M^N*/]47\NA_4^.6K7)._^#BFT2^5/=&17IJ]+]8+Y41;S._KL:"]"V8XT%0X
M1X26]MA!05=\4Q=5GG/UPU44;\5T;<="F@U9O+IAU+ HG<#Z#8G2#8U?_(1]
M*)\:F3B,QS;3?;T%[%2+*)\B:RSG6-<6:91KJ5BJL%#5$'$VVBRO^5A3C,-?
MK:VI]IR WK;4E!N0/'+O']J0 ZZ-W,Z@T-S@*@Z]ZM%YI?1VY+ISK7OC.$V:
MU.ZO38)W)RMH<#'C#M*AXDA2VZ'"KC20(Y>1251XZD0 ,0:9Z3'DQ7C.<4$X
M3^66O+W;D79,PZE77)OG^?N <W$-5.2B'&M_OH6B1U73FMX4D6+%@.;*)_K]
MR&%?!QA(.^/-WR)SH:7,!=X^<,O9RY*'6PB5<UBH%9%&$A^*ZA0C]A^)O*T-
MW_*%A&7@K_F5I30BJWW(_KN)$LH)3;XTB,?DC<FB0+<J^!>"6+C_;MERW]A,
MF)=5WSEL0NSZ.X=7E,L6K,K^*YSU11Y5=;*CJEG;2#F;*KP7_%VNI+=[K_!;
M%)EI=HJU9V[:3@7IB-/3+$WY:0N)&66HNIH,6[R)\YQ#ECJV>>3!^ $S5=L+
M>I6I[="TD4/.H"8<<!T/1>([XB+>0-G$0"MX=M(Q7*9LG$5X&?JYV>/AO,95
M E_YL3P[_A+M P_.+3B*/E9P\=KQX[\ZP9Z>LPPO3<Y#[]9WEG[ M?M"'1@9
MO+OP 32.X;)0Z'V-PEC^">EOTG1N?$CZR/%Q<%.J&#D8<<0X.;R.I@$.DA N
M"LGX\E=I%B3GS0_]J-RMG@'/+7=Q4.2]CNE_[FGH'AK.<NOUG$ODM:M?&5/U
MW>80+1K2F\:!0ICDE&V>=,Z5KE*Y\;"S7L^Y.'J[^I6.7M]M#HZN(7U_P%^0
M&J>W^2ATE0F2?"QJ/#6EV76&CE]G@#;//^XW,]>O%;\GR'M0<<XA14(#2\IV
MUGR5H2W_YW_W:<P<9G.XI<_,[[0RFN;.<W%Y+2/4Y#4-/>?@]GH*# 'Z.7EL
MV4UR:H'.>4X3C;E$01>3M(X =03F$!.=]!A@ JQ$!HH4Z";<[=.$H\!'O<RG
MLL=<_+Y>W4HO/VT^!Y]ND-K4@SDQ\A&-KW[J[*N?YNRKG[KYZJ=9^NJQU/U\
M]9.=&SA.LCD//?B/<G&P(;]N[(#<4]N5+5W(J6V-V$\UA#:^FL-H\G5O_@^%
MNLV<^8$F:>S#\YG5FE=_V@C&/4DBCX$A#*9&21]ZB.-H$+5&B+01:C# =;N5
MSSI0*)JVBQ*?;[X]^5LJ_VRHR-"E-]+0,#1#4:U!NROVX]D&F@QP8QN.3=3?
MVG8+F>!(BI>)P>,C97+EGTQ=<F$Z6UWJFF! 6/@2A?3PQ8E_I^GU/O2R0S;L
M-_DU>J9QR'=AX/-Z:.A, 3,\F)DCAXANW;'#A*$VQJM1X@:% R\VP)%XJ/%
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MPM,MK ;]@WJ749+R/9(:8QJ008X@IH8I57KN2 ,QCABK8ER_^3143L=AR98
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M4!)__GMPNCC&HI921PW-D6*$KJ)-(](,*A:UBCS8J&2]#M'(JMI^%H0_N/I
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M1>5,H.7(+$,0)2=Q!D!RK,E\^ &<&7Y$N%'#E'V8$_\[?K!@//OL:G31.2?
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M5_MN8[?%.'&[](:\F<4)C T1? AGQ'[#66%P[&EL(,A :%3%+JIUW@;XVD&
M,O)[HFD:\$!)G**NWYW8H]YS= _+D <G5MX%[DL#.RH,,4D-'_H0P(P4@_0P
ML :IV*WRJ@ DYPBA.^=).%-+Z#&K72H>L G44"%A%IRX!+\)\S75HY_\UI:R
MH&R,W//;E91=O+DE8E_N$'CHX*R1)4#7?,K"F%%Z<;A@$_QVY\2_-20S].BV
MM)&K4+QU#!_U6=)H5HEN<%R7#(QG2(P:X(54C5D3/;HM;H W*]X^P.M]%C7
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MCZN;,FE$7BA)X/5/"$ZB#&[),(=@+DJRT../JM#JEHQX1*"*6G)]B%,H-#-
MSF9:"2$+3J1DM2*%Y=>-A4AG@$U48TP:5&(,E</#Y)5 8%NIG3PQ=E^!6XLI
MFBPWD YFQ!UCFNJ^X0 BV)%XE$Z#HZS24QI"#7$QD3%D'D-#X3/,?<1[5OS^
MHD_G/NRV8B7.5 I$$P)L">=+6M'7 MI:L9!L&Q@G$V)IER[W60JO(\+['#KF
MZ4=N2<@ZP%!*@.U!:VDX.T2U:>!6"DI:X]CBPC@<[[#(MY+/,A;/:<E32-9
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MNOB!A9";B\.3$["9+&V.+!M#,D,DE^0> PVF])R>]);B5$/5&E%CDZ8)2:+
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MI$X0Y/<T<Y98T4[.\V<6*BX^];[H,Q&KY2/A8 /WQ,7>?):-DL/5G0$S:U>
M !(*\3IN"J%9#6*P-ZH+0R<6JC^<H6O7DUY+P[=FM5NAJMYE2:BCD-PH@!R]
M'H,DBC*L^666I(Q.3#RZCQ(_/[<N]X1B^D;#S&0EBY;M+>J<7N+3[8/46WNI
M7-Y\Z>J _5*+MOQ#1ZTS[\6,R?7IVI+G7"Q<I)A<\4K'H%%'6T?F#W'DTJ0L
MB<;"JJNJCIG^T647&:2H-=8P'8?NK326%(7HJF(4%OR0Y%S+TH)\SI88(PE5
MIC9/37VX8QC[?%H*R*=_>OP79[?_[^M_^I&XSMYGO_/_CFB)PE.2M<__\L9+
M XN:DNU']M!R28Y?%]CLK-^4K6[KQ-V(FO;R[T\4^B6.$NTCHJ+QTORNIF2K
MW_&62_*[NL!&_8Z3MO/T]$1JBB>G&U+3<?BB=G7=LRB?.[ ^[K(+X,Y1A;71
MF1O*U=HJNSV'#7XU4WO6O(]_H=J+9=%T:5XL*=CJMJS=DOQ4%M>H8WX1S]M,
M[I^#IUX3FC=G5:*Z 3;ZYNDY73@==\_T+*Z7SGRK= %72:>P2.V2F'0WU/I-
M,4G97Z+(>_>#8!UZMV'*](2"?L5^7OWG;DP=3!<YD!@SG2)H&$84,>R8T\U(
M."+) #?>"E9YF&)]]\V2B1Z83EN>U.-7)AD>NW0G $AZWO@ABP+]\'4-Z9JO
ME)?^.%T^#*. %$U&F*,I54"C^X(2!_IH,R90=\K2EU[3['PX*1G)_BK^25G<
M$#OQ0:J7F8C:DYM"8.)($L]<37)F6ZKQM61)9)Y\+6@WI6$.LUQ&X1N-14GG
M)QKZ46RQ\&.S[I#*<:1YKRFJN3]2S!ULBNY(K:'SXB*R-AW,(T/.K88+F(*O
M*:R!+>-)4O<AACO0Z>&!J9:R@!,J.FHF/&E2620H=)JE&QJ4)!8'$-V:F(>)
M@B?[%W#EZ3XE7TQX,:5Q]C%U??LI3&711DGM#ALINBP$"]H4;G+\IO8+\/)6
ML<V[-()LBTDT;LBYL%T#\.2(2]*WQ_GL2:^%^&^'VJVGMO4N"_#B+LE-G^4B
M.;0UK.WQ^2T %HK"./IS[E)G6_UY=G$S[&QSJW&_K"<[/?=P3Y,*-WEEN4N+
MR#._AIZ?B"UCZMU$,?5?PVLG#MF2OY_7=A!:I$?K&*?;V]NH+ X)M)0QCQ(U
MMB3G2PK&",H=S&4B^8GL36X&B-O?_72[C0(/F) HY"]#[_P4K$455IH%=4[S
M1SLRN%H[($>1;F5EM%"W1HP*&D*/SPLN:5M/MYI%7;MIT*<J'J]8RC>1FIX-
M'4%F<=ZL9YAV'V^GL2C/UU3%(!ZL&FKVK^1'R"P^$#2[?6Y#-X9#.?+)H^)?
M/X(-WI#@BKH0\#-DI"BLV-T+.6IHJBV#1$<7Q)B@*_GXX^?3.M_D&^=Q$AC,
M^V3>.DNW4<S6].OO?N<+><>-D0_E=B4;W[^KM40\<#L$'@')Q9MV)6$6PS+2
M6(;I5;1S_.-L1HWFBQNJ=47;!ZMHNZCA>B2RV0$KB-L9LD^IDU)X$XU1#_YO
M%ON)Y[L0SGRFNQ=E&9+N7L@'L*;:\CCNZ()X..M*/KCB)] 73]H!!V3A[YT?
MTMN4[E3A@EY/Y..YA_IZH7#9#?&X[B/]-"$Q\"&<D:4-LWE- &_?B-<@2A-X
M?N*R7V>QI026WL]C+?DUK'Z/7RWRK:L)WS.:_14KC2.M69^MJKNN%7=];GJH
MIFV#JK4#<G?M5E9V5W5KQ.ZJ(?3@;,GF)Y>L[D.QE1I-4M^]A!WE^-"Z1E*U
M13YH6U6L95\T-40\5-OE'3I*;ZC'(-;.FB=/=M 9C(JFR,=BFX+R4&QJAW@D
MMHH[>"!6V2EX9O:67?JV]LB'9:>JG=,Z\NWZ;IF-3^KV-NT;E?WB[&CKWGUW
MKR4.XE.U.X=RU65I [I!<L/#>D6 A]T-_J(.>FMX<-((^>!M5DH>J_46B(>F
M0E C9>^]JIX^SUIUX^H]UWR(XH'<KGWZSD[(QZR>TIUXNX2->4W!C0<1UK?C
M9U <M0^WIJRV]UBB]ZH345N:+\UO#:5/*D,DFTFD4RLL.ZO=!]0?*0QR/Q!5
M(NXW7\.8_>8U]/_.$V:+=T&OO[M!!K=:A!&2!QJG+'1EOWB.KK\[.P9ET/R1
MIED<)H]1$-P(K931S>1LD0/'7(:O![_3\D0,8;.I/CQ EP6$TH*RB#PUK'IU
MN!0S1\F$5()"N<%"5-XM%Y9\ W%)+J^E0 C]9Z@N,62R^6&5])(+9P6G%892
MF%G=&CDJ=J@I@YFB*6(,ZI)XZ)A5 L4D/@XOYD7>==CZ@,E4JEXX ;^0Z*2$
MAAZ@Y($ZT[Q\)O1\2ITXM:SI"WWU0P[M"GUM(E!Q_0G>:\P"R"FY81Y]F<4Q
M#=,';D/6^@&>B6:(WQ.P^A-?)KX--*(&'/:DO#ST'*J@<;"%FO#Y3<!2%%'9
M.1>&"&EXIU(>.V$8$ENN/4]0XG44(,;:%[1)3 ,H' /1K)O;;QG0]\#,%$\#
M?&K2YP1['08<#'H*NN<">5WJS0AX7)2EPMU4=NP$NWSMON?& ZQ#M=*\HI.!
M75_2RP2[00;4 +M>=)<'=L/4FP#L"D%L@9W^ZZ$H+/E(O<P].[Q[HFD:B*+^
M?_;3+6L/FY3YE5UUA4W3/,X) 75-.A@*NQB<"R9JZSDC.$HR\=IX1$A%)+$6
M@9*3VU9B@ D%G[=.^N<H"[S;W=YQT^O-AC)0?X,:"(_,P/U,VTULF;BF:20-
M .N@M#RDTE7(."21E'$FG#41O$G)7)R*,O:H5J.SFDH^SQ2F>N>F\H6I:&DJ
M:!A#&0=_0ZK^F""J+,KR0$,GX$_O\F<O*?MX*:_32E59*.,H+A.L^IA+;ZNM
MD]SR8*N75M-LK!7U@$H)>.9V(0/)A4"%8+-8+:<#K\T*2X!9]@5#.[62W"U;
M[ ;T?O-$7R&$>Z3[*(;0\39D:]\=SW6Y..1_;+O5/HP2<B :89Y:G:7^9! #
MSQAM!J\Q<IZ01I 3)B5;(O%=D9=#V<+XO?HD3B6O8C]5'L5^^)^'.(*=H_OX
MB<9OODL;[HJV-$/J"UV*P4!7M4$XBCM%'3I$<Z)BLLL))\9O@>J-0)B]"A$:
M[WQVM<4_%M4J'@W(TX:X1V6+O(:'YH@[G(JW[I_HSF>?#YA%<>/US)9F2,=<
MEV+ET_0-;;"_/]\F\O#3DSV3E6^;IEM*V#_\]/!#0FJ\V(*\F+P3,5G/_%K\
M%)K7:!KTJLMHMX\R0 4M[VIOCMG+-!0MO:VE+7:OTQ'=M/<5/)&YX92F:%;9
MH%]>.:GSQ!H[KU3MC4V-,/N@4JG2\TY:8/<WM<"FO0PXD9Q5@V_5_Y[_EK O
MDO@)(\76MG!_ZH4Z.T)3=[NJ?O1HD8&P(I[O[-AH_BGP?Z-P#_,%?KG?'A+?
M=0+RYC"N4GM1-<%W00[X9Q*(?^^+F#") @\R&79.[ <'D;2:I-&.Q@G<)0+]
M/! [R<7VF2,E:7R8&2G,?T3Y8YB,@5T?QL/&=UD@?\_,UQ8(J]MBQH@N%:N0
M6-$0.V)TRFT\."X9DG]Q=OO_)IRI]>EY,CLTZVMG"UR]B7G74;]%LRM25QYB
M@-JNMD8_A%LM@\0?OB1LV:N>OKJ+1KGF6<SP2-]HF,DAT<L!;D'^Q(*.WZ@X
M"'NET6OL[+<,$F+ZRMA;08,O&>#;_4;8 XX/<@.I,*"U W+/[U96]G=U:\1>
MKB'TX&KDG#1$[17QXNC)TFV16;2-*VT3A;:]736A[N]>HS<V:'D!6>&I^0^5
MD^:_^!\NN:Q_[0](G>Y4>'"NZK<(G:A!N.$9(SY<B>3OZMA)=;C^?+UNK1A9
M:X!T$*F5D9&Z^BO"0=4BY-#!!:1FAJ#++PI?X7] .GI.A9<AZ/(+PM'2(-SP
M^CA^Z!C<Z%DGOO/@N+"(+8O^<![J_9[N+DA'3A^%R]V?CO;8-X%TQ1^^*'K-
MRV4!)Y*S6A%:5LCBW&;>\IE>ZR3E.C^L+PTZ(Y"]W_PYB@-/[7Y-C3 [G%*I
MTL5.6F!W*K7 PP?4+J\>)[8-^#D*;*Z^ Q,21BE)]I0/:"<(#L3WQ,XC]6;V
MK"E49[YTOR&<IIW-T^PEH7_+F$6OW[H2A)N;(O4_'05KFZ$-[1"&4UKB#M[L
M+(D23M7JNU;'&C)6+4^WJ%LO;'P>J=DV1/.F"QJEQQ(;&ZA V>:#+0V*MC[5
MTM9^>0-6_3R+LO&R!JVA-%[%L+7ZUGI=V?87UA5MES5@6UY3;VJXG(%JZF2_
M&J1PZ'=2!7^687F1)7Y(DV3M_BWS11Y4R^2O;HU\:':H*0].15/$P[-+XL'5
M:7.Z1")L<^YOTA/^&=/V&$"GWP+';Z/J72.YUFEA8[I9=I.C>T4*)E/<^;G>
M^T'VYKCK%_7&6T,;I$.S5:5RV^VX ?9=-Z6\AO(8?2FI:5]_SB'G3-87,V^W
M&==94L788:-'?3%'L']44P/[X7_NZ*L37//\T(;0I;D%4I]J40<\JN'/""&\
M3<JA(XK3(X*@J1"D>V0)?HVQ1<.?$8^I)D6* 27_#>EH:A1Q,#CE@PC19L!=
M5_:TNCG20:>K:,NNP-T2,J.[1#9W0'!G^WG+V70UER/9A>Q%$NCU;A]$!WI2
MV;6])5+7TU"O#OTGS1 ZG(ZT(R>$*FVW)#VOHTVI8Z4<52DWR\3WX!QX&O1S
ME"^TBU4X37Z)HT0U 6IT0^J-?167)\2N/@C]M+?H@PNUY Q@Y9RS(!6/%>%<
M;-T4FDM[4-[)E7\IMK->FS2?=7_V,MJ]^"'?X[B,0KC$Q&2]A+O;'HWYK]=Q
M#"\P<B,]PK_N-_=9"H4%DU^=(*-_\E^W'1N#QI@@!XYIC-JT36R& V)0FDC1
MT1O0DCPK4DE$:B(16:85X5+!?%[(M2)<LA4!V>RL$)#9]R%*(7_1"8B3O\K#
M_KFG,=^ A5<7H9E'J!.'/T69R9+L':7G0$5AAM#[?YD3^)L#%)IW>09_<N4G
M;A E64R;<@2']$>*<(--492MZ]49(2X-UV&H2Y3<^#WBBA\I&)**H]6<Q,HL
M01"]@[="L;]'FM#XC28=*8K:G9$ZQC CR%.Z7D^$+C%0@?'^4/'AKE%PLI[O
MV&Z(UK0'S:Z+=@)U\H-.O\4Z@*&CD.[A;_64I!3J)HHO8\IBN#NVM&W-G.SH
M@GRLZR@LC_&V]HC'MI;8@Y\.*(CS%^F\*'M)-QE; N0!#A(0O]]<T0V-8_ZT
MPCI):-H^KOM10#[,!YBC'=F5W1$[P1 M#(3]I7?X(0EI2KR<)7\#R.%,T:V#
M[Q3'XT-I('6/42;INR:^0WRZ/DZ/>=;&=[:.XY$:!\F\*@?)%TX OQH48%=]
MD8+%(!/HKX_RC@C!89C\DZV05B1G-0D*[/F3S==AZQNG\U@BIT.<E#!YX.1!
MO"<]H=Y/J1.GJ#2_H*]^R!.VE?HC +[+K1._LB@RNHR2E/W^^ON>ALDP(%33
M6C0P=IA('R@5A!8+G%WZ3 BD.6M(:@#F_*\Y>SOGF78L59CAD]@:H=Z/A442
MV208(ZXK"H7RH;+,L%U-N?NBX>74$#VVILN^BP61!A4FQ(V*FZU7YF>S1K.J
M__M?*Z'8DN\W]LOB5WG/__/_ 5!+ P04    " !]@%96>JCN@VR    N@@D
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M(-4BA_BB=G6B^]KPUG>V^R%+UH?F:J3RQO(6MNL%$+Q:*P?M"18&6B,6"S=
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M+HV&.<P.U("+I&WT9PX@61'$)7[=ALE.?EZL+7LO^25T-X4\BGMS.4?M0A/
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MM_R177.YQ3H<X)BK-DXA]OF_ 'EG?52N/3+D'WXBR;JOS"-[T)WE+0S['\"
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ME2C7=59AA<[C18SR]E]ZIVAE;TB[+GT6J>W?D K?AO'RM'M@$*2\_;??S\E
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M_.% 8-@X ,1_NS;>\WXS+ =+\\E)<15:'OKI)O0??@:(#),1QE55=ZV9$'5
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M-NQ%&)/ZNP'_!$BM;RW?L..Q%^FW*NV=B':3SJ(N&U6Q0<;Q[:^YB<@"YJ$
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MW?F#9;Q;=C@%8O&83\X+GA80^VDZYJ/KP.0CWDEXM!LU:>UGYM>X/YYEF-6
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M)E$F+&$R*-3 !U_)PPKM!,B0P]'^J3+ADIR;:G?#5_(@XQ3 0"/\_";CQ,!
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M%(E5D$P.^3;AU)=0@9:A$,1OJ#?&E3"YBH;R%9023="<]*J]),X/Y[!2DB^
MV+4T%ATGWX]L025)[G  <RV$6E[?\E.H].Y&>!$FWMT4;7##H'K%=S?$XII+
MF2ZKW-V-&)EZF>R$1(V^%91V4J/[ J=26L_5K-+3[0O8N?8.&Z;1:"W\DL2R
M4?>BQ]LQX7B[;[X7M=]+.CB1\VVK/9RG>LSG8K:6.-].I6IJ'3QI*C@^:R)<
M'H&Q1$TDKD.2EN0@K9W4B;)C"9U!H8:.M,2E=A$> E&% ?G<S%U9<WDSQ':T
M)ZM&=3LQ\ !\/XQ?'9:HA(BBIK3!AP0!BZ.%FR.M7CI^,Z"%5],7PR_*CDDJ
MI@TTJF\0N$AKTK]>JHRI&X-\0>WDS"4MNI UW0I4%O,5.O=B^JA9Y+.%M!8O
MU]HO0%>KA?L:O0!YV@'H6*NUO_<2Q$2_NDNX_^7>,<'GZX>Q96*A4IO=@8Y\
M-NBW6LA/CJV!Q,77?#8]^KV=4I-$NT'QL850(+ R>EWO)-HZ2(#KP,1'AWZK
M*TMT408>LNC2OV=)GHVG0QWSGQ>+CDD'<;EJO_M @Y*2;;JF4ZC >[;N$%F(
MOL3:DMAC8NQ>N1"Z']A:8VS1+_X7 1(B36B.$[JT\UBI3+I2IX3&[S8!W/!=
M;:*"'4,&)X%*'11DY34L0CGVE$/@!CAMT0("PP-S$_T<CIZE..0TVA' *&2&
MTF=&32N7*\.SO%=$B6$^.6DK!%\*:7+UCN!*"ME*7P>I2;MZ9[LNQ!05.S<7
M%NV(R(5)E)3_6Q<%4:1%?SB(-#-1DSC9J^6'C '@D 568&/+U5Y'\*2&#TIS
M?:O1*<FSS6MW!R"BZP7+CJU?"JNE>3+J]]$I=-A&;%0BMX79O-_P$_U'X.-W
MM0(0**S670CPDZM7&FTN",0W5N(@(%3L+@Q$"%::-%N//4AL$8H20#P%ON<;
M#HXR=1- ]%^T7%JN*; %X6FN(]A2P@:UB;C5YS!]]=W%GVO71E1X4<[6N;NP
M7ES;7KKPPX"FV-N007]P_#8DW<._]:(^T-?SI^O[7JJ?%CP1R?,*1_-D/!6A
M5_H#9^,<7(PN1_W)Q<5P.IS5_QA[OE@$F\#&:3:>_#6 .&DO!&L<[ ._7T:@
M 0^NY]$>EX@TH9TV*2&AO%*IS $MXS"\(D&$Z>2/TCE[%#]3:AWMA%]9;@7.
M2,(,X)!]_9N/H]%3O4X+RV9)Q2G%9TU/=%'!Y(7+3ZDN+_HY$$YU,>2NKYV\
M^6552I]3J%9P$]L<:L('TG8D./.?@1>:YG@A0ZG<5;R(DJS@VK8YL*!C^@\'
M L/&Z>/NG1V(R/^&.(G745[8<#7350"5)U[!):U^JQ7FP0/#LTRT&>V@I&!?
M*H4G>L6XJ0ZWI^O[N>]#ZSWP,2O?W.=0-&@*/BW?C$]LH+B+#!0DI/&WT%:0
MT1%1 +2*+-$KN(X"LQ&WJ4@_Q%04;=%IF8MH29C8AI9<=!"$?@X9E[4C@S;I
M$HX^X\#R2+X%3"? J&*K)X Y%1Q2NC#6G[!1FM*:C*?#S@&(DVA)V_%(:=TZ
M^2S8EPW<#STG8P]_$KT>&G)>#^U[B0J<[NW0<#CN]P>S_FB _NS7OWO)BAM-
MG"<8VE'-,$3\,X"O:S29".3Q5=9.89202EY'5*"]_>;#+/$AI=Z]YP6 =(PB
M5S@%=##I568C5+MP/-N&XPT1*_ ?8DO%D.!)T O;1)]PL^&'%JP-!S*>EGC?
MB3:=(6=?0'CX#M-$A1C 8S.?C:]->"W%"$)9L=&Z=Y2+-3 #&PTV'!2.]F&F
MASV'$#^*#0=Y]74H$P]\CK=G-!\$:>UG)^ 43<!1P^Y.4M"3V;\JY94V-Y_A
M,%$'%&^%3!GM)*]63@66.R8W=)%M>7X<:'1,O'PP8VVJZ$H[I+$E7Z!%ZF*,
M+J"[W6QM]PM$>YNG<!34"TUB>>W$7YLH"SQJA)BD-LO)"T!KIK7PXVUY2!O.
MWWGT_0_'\HNOLDNV<L:#7-;I$@ZE:-@OKS^H2H-:1QN@R)167B>(\T"Q7O "
M#&?TWY!$RM0O*JB-T!J?W=S<(5K.Z[9CQ3123A#I(OI)NN8#!),9NFAFKIV_
MYGMV)K/)\E&_V29HTGO'#!8AWD+-?N_@U]W6#N"!#?N#$5FU\M745DC\6K("
MH6IE5SB</EEBM/+9X<_&T\&X;7(2)D^I[I,='E8+H=2U?+&YH'1#HB(^;*/R
M8_.S@/?LF=.N^+!Z2( RKJP,V'0T*H6RH5[;)@4F';KLH)D:F:20'QB^^]4;
MUD;^31W#%+&P_1%J2S,F,DQ[WU!!W[MWJ'$VY':B'YC5@$LBBOGYV'Y/J]),
MBER7#F%4O- K^FUM.+5@7;#[\RQHA,.2_,YV +Z[6H14*LW-\#^_ <_?QP,B
MQ8:5V<49]LJXV+& Q@<',#J_WG-JXG-KP; P6]'+:/_$(:V,A4K#*S?P:K*L
M5!X#?'2.3UK>?&=8-CXYW;DP7.]D*VU&=QE1#?KHP'9Q2FBOBZ,="SY=]>23
MBF 8<5/12377SQGN:EFI5[SK!I6\&Q]B\H<<U= 7Z/H\&VKGKJ1HX*0#:_TQ
M F0MHX&_1C3\17R )[V?,_C5LE)!T//:G@3>>MNMZ'/ XI?C^^> MZ_/S^>7
M@&4:Q2]6)[/)=-;O3T;C_N5LV$"@V58^#M1!JRF0?8%&4\H^79[W5''V'>!8
M(4TO<$JE1'8F)3)#-\&6=?;50;A,9I/E0Z%(K<-HYFG7<P 7:P2WV%%R3/8;
MY:BFK7@HO#YR'RU+I2Z3JBW^/SJ@HV[-K(B%[8]4W)'3M Z05@.QVD_3+*W:
M+FB7N5W<KSW06D2'B(WK1*M2E'Q1]HTPL\,3!WM]/%4:M%+XSICT[*CTS<H2
MT5#HU""MW=-#JEK6U>.44X.%,UIT7E![< ?,.Q?>!3XJ@$.\&<X"B!H_1W3C
M9]1;+^FNMW1A+^JPE_1XMHU6L(_-^NB?_F!R.>J?;:.<AQ,-E*$"V==F&]7L
MM'^VC=*D=,JV4?3'<*"'\4V2;32FJ*6/Z742"(6[QSM*4?*Z8;ENI:S*4GE^
MN2IX^-( '76OFXI8V+CEFF;;(!\3"6<;D:KZ(4J-A(LL%"6YT['\4RE;X+6Q
MM7S#9C"'H-V$V]$&>I41D==3<I@A"6DD;]6+&@U>+ZC$RL'W*\437-3B=4&W
M>!VZBXQ?/X='^%ZZQ[/%ZYP70-T.9C2>CAI^N-B6O  )KW0Q>43)WO;9X!]P
M)Y@XLFF+4D,[5*B581XSHKRAK'G-Y8$E$$$UBE'K: <+43%Q"YI"KRX3'FM"
M-!T,&] 3D.?*M46*%!D4;5UYJ-1%=GA#C?BSGCOF#=@!V]UBPF\_L3XK#HHH
M4+.3\BU+MS;F.6"CYE;?@ .@82,JYN;&<BR\:\&VX9@0^DP6:J.3**C. 5UB
ML+?&7*L!<NK>_"EB8>/F6GFI@@#<60M X--J!<$*S?+#28YUN*_<KGZ050.A
M/%;5L*XN$UY]6?/LL%V2'2]>. CPY*NL'0;50",/P0KLZ1S.N'C^9GQ>H1W,
MTO+OD,#X<2BG\:P@+L;3S,OH#N-4(?N4NIS7Z>'[PX&,*X_0 "MZ[W%)O_=(
M]TJ^^0A[/M]_G.\_U!T)--"&K;G_R*J^QDUJU?(BZR!YM7(JV+<QN:&+;,OS
M0[^\R#H@C2WY$D8168PY@62X.F"@-GD>^;!)8ITNJDEM,MPF@2)36H7W.8(\
MX+AB%X[U*: DQ)3!2<BR#/64DW)I1PF"%)\!7+IP@_T40T7&T.F4XMK(L6GE
M+<HC#FFW*#YOW5=OEQH K>8SB2(6GLC5VZ/K[) Z!M$L]]Y<W["/;7>/KO\/
MX!\\C65<S57I5S_(JX%@27NT=-9V[!V(,B;6/1^TFP?-P+/&::)R>I!N),?=
MF2!1P)L[%\9?X7*D[&'U#N(\E>J>2OQB4)Q[K\['8>%?45Z'^<*W=F@ HO>B
M8T8$I/!3U$4OZ>-\ ]J.&]#2T<1RJ7->7-M&<PO_*/OD2>U,.SVJX&ZT/L9U
M)!BG'&8UF<!+ R#7"#NEF*>P5Q+<M^'.XM4WH-\0Z,,8/IX7 /,F@/OTJ]'#
M^-06P+O]!'!A>>3HR<(-G6&;@:T<_E7=@,XB7#JA,Z+9YG1S,;N0%); \D.'
M2B>5E559DG3>?L_PEZFUR[&[:NC:PMG2L@FBR;9E/)Y>7)XG@&+V2DHX'6U;
M;IV60GYNFE9$./\C+J5]:C<5]#N*BO.O_;>B$G7"[\!:K;'5<P>@L0+))C),
M/:!>X=-ZUP[[]2-5Z6H@S/O.'&U+NW0<G;3V>T@5DTCJ(,YS2:IKMS01G)<B
MYOFL@06JTIC.4ZV)4WS9F2<S.4W+9EY;-X%M#7FLT72JQ'REIH(:_!<B'B2$
MOF"6"3_LGM =&&+7A:2/7M3)V8.A'1X,#-_OZ.;ED(+R!\((3%W$A""X^LK,
MI!  51YV5^M4NSU)_:^]%3!0E[=XD@FF/"17T)-VT&P 2+P+O'Q&=P#">6I+
M/'2OU%.6LY/Q=#C2<8LJ'SU2<2O$7<6/Y7'O3\O,B+SH2Z<X3"UOM2Y!14A@
M!ZA48E6=CZ&)0WS[<,N 8%_M#()JK&K1Z]J2/'PH]>*V:F?ZX;+E6S%17G?U
M-J LL]P/ &.V;2PQ_PLY7>HW(^H#H^J9P,'IKCX=*,FR']MMW?/AJ,OS?% V
M'W@XW?CZ0$M\*8L1J;N)Y,:$E3A3?==GX&>3<3;$<067MH<SPZC=JT/DW/NT
MS+.TCH6"W+LV4Z=Q]"I>001%H#0@2D/G[W=E@CVZ)G\!V,B!?KYVG5#@@6&_
M ;@9TN9:\Z,[ST7&7-141/7$V>_H7,U4N0(KR\%\OS)L',Z/%+E%IR&>9ZTN
ML[:$G)1N667==4B5:?P--K'6?8 C=ZW-'.K8 4Z0XY)\![MBT4NV['DNUGEF
MR_>>E=UT/!U,N[+B" *VIC,;IP@Z8A"7M5[GN:;3,:W\Z,[3KZ8-GV01*3VF
MU1]CMEY69ZK4<BP3'-)Y5NHR*SGDTI'G73F6YM_XI#WDTV]\]O%,DSU&) VA
MB56Y-VWFC#X7QC4Q.9X EVK7HGK#S1Y"G(F^UYKR!)R->.3U0-++^<%6F4;_
MJ-^@_ S=!0"FAW/7BL0F9-;+3JU9\V:CZJ+)JZ5R7.CB_6&%)[6Y6!!A /%[
M=&JP',]:_&;8@:JGU#Q=GP20&V-DV_-@%_(ME>$LVAXYYG$>+.%WT[/<.HR;
M*<IZ_7/OT'_/"SOK&8[9VQZ&D'Q]7J6[\*Q:T]38K5>591Y+5^,5QR,MX5R'
M3>?)U@ &:H66!PF;&UH*NCQS-$R:K0'LV# HL1&3Q9@&DF:_%*2-3>^+,CEF
MCW\HDU];5H?:(:LVE!PY0-3/Y5/([=X@H!J2*@^LQ!FH2TB.HF%+S/"N)5S$
MI95?^\1YH%3B'O13TD:?#I)&'_X@1?S)_*:-Y.K>"K.YH"*O>WE!%D[.HU\S
M9 S[X^G@HAEALIE;( @*#4U.H^^68VV"#9'_F=_UDP!E7%D9L.EH5 K&)UT*
MZ=_;+ 4F'42UI-MAG)E47/:=2?&=?9/R;\J^HXB%2A\\:&A.(G'I]E\!&O*]
M@W:#02BS)W\-X-O:<(Z].13F.2TU"/UFAAJD2IP2\OA\OE87Y:B:Y&2B_7=G
MTLC#<B,3C"*.DTE@4YJ+WU 3OK(,F(+=GZ=4LU.*0QKMBD@D@RDI(W%T%6'^
M,_#\L"AAVC0_H/-$HDTD3>6C) 7M82LX[M"J]5LH\<96K6SWY\G6[*K%(8VJ
MK] 94ZNAEWI*N!DGWFIP=N5&<)Y@S4XP/H%4?7_4Z@SJ[39>#,;34=,7O*<U
MI7C$$4^H\8EF:&?RL-;<[=5&TYWIIH^!79SA70RJIU8['3W##^U#-VAYOC,L
MJ.2!F\2A=6?.*9@*C:QUY41VMN&+F6WUF[."XSM/7$TFK@RYG>\+4N9?T:FI
M\4C/DY1KDK9-@DI]N;ID)LT:G?5;<P7'=Y[.FJRY,N36U9B[$FW96.;Z35J1
MP9UGK"8SMK+0% 1NZ\QT[:HE:G">JZTS10U._DHF_ _>H5C.*MJ@4,/V2NHB
M*PKTQ[#?TME3V^4)+Q?URE6B\3J4W9:'4>)T.=ME!W.>+!KP6\$!K)E0O,?V
M)6_N><$FXHI@),!!GQZ1-]55+^JKE^KL'/*O5-#,\6@\O9@A3$[[@]ET/!PU
MX 3<RBB .FA.!;(OT)I*V:=+:)MJL0!U (-:.>5QP>8&1RQ 71(LMS,6H ZP
M8\.@Q$9,%F/4!ED[#GT<!88RX)_ OW:=R,I!B:XF4#U+W*@%IEQ9$CRZ**W*
M,UV6F^IGGIJ"H.B M9H7-D4L5.I;VJ(@*/N#<>KPAG3!=^"O7=.UW=67*@]M
M_I[UFP-J,"D1_!69>XYQ<G;E;/=,JS@!6N.V*7?"HC[?W79[@A4)_O9S"W"\
MUQMK9YG ,5\0/^M8SHKZ/4^Q>E8[;MZ?7QF1F7BDC'YS;=2:C2BK:P91!W">
M2O5,)7$A="2YJRP&OEC>GW<0@'L'400\OZ[94]3O>=+4,VFX>=\1[]]W-M_>
M1=9MG,1=+,FXC [/LX,^.^ICNM+TR#5D;-S[9-QZV^W=KH(CQH#NB''[^OS<
MN_OM['TAXP9^,IO,AM/!Q6R(_F\\.WM?\%GO+\;3X:3MWA<YV=?F?1&S3Y?K
ML.0BD.)\D2ZB'1342BF/"B8SM$S#R.4T0;L3UD#23,Z3A46A2*V?PNUF:[M?
M(-XA!'"Q1MC#HQKV!V.R?P)'-6W%0^'UD4=!62IU49VM\230 !UUJVE%+.R8
M)\$S=!< F-X=DM4].E)@YYY80MX/=$*!]^@+Q[=VV&6HF*7AR82TH$AJ7C\T
MJT%7P0*FDH-*+_X;N$7$RPAF$C!O KA_7!4QB[C6$'5PN=9.%ZHR&:94S;8H
MUGK['+9."O$-,??\,/3LL-7NF59Q K3&84ON1NOLL%6ST]!YBC7GL%7'3K!%
M:UW;';;.4TD#ARUU^\<V3R-]';8N6YQ-1^])P\W[L\.6M@Y;Y]G1@,/6I9Q\
M4@T[;+T WX(A6T(;Y U86@[FG.-#ZSU(K.9BOENC?LYWZ]#-WH$K[JJ7[BO\
ML05N7!EDH3W[GKH#T0QSI$ +V$FG/YD,)Y/9<#P8S$:3:>VJDX +FL\5K8IV
MZJNJ./)J2)C\^KQE/.BG9(X^'>2-/OSQ@A5E@1-4YC?M)"C,[X/(V(3I)9M"
M;YFC7[61#YNY!8*@T*#4Y87!_>_&I[4)-D3^9W[73P*4<65EP*9#%\<CTGYE
MK[59#D;\#63Y,$9\F+96XTFB7JE)LGY;/H$;\8T]_&[X2!K.*O,[@-CKY&D9
M_BB&,?YVVP(]7MQP [$BBSH6SZ,\DZ0#\XQ(0=Y(4I72+CX)7MHEJ,[$[RYR
MX:[:9G>QIHX]'7.,(? (OVYZ03Q<.=9?X!A[0G6[B['J;% :)ER]A1/]M76]
M*"BCF!WS(F_'3#?6 CLE'CL2N.4$P'S: F@DYO6(#L/^!MU@R_.^5*B5FK7#
MO8/$#EX11B+[OF%'H3D!\-$@"U.]7'UEQXZ:L ,3Z=1B6FEVSIIZUT]#E<-6
M6B<UR3HM'R>J9PCE<6L]G6N'XR9!V,24( I!RTCI0J0QW_66;.T$,4M$2<'.
M4B)3U;Y!?G+ HXNVO! \0]<,%C[>1)/?'E.*:X<(F4(X.J"*LD&;NX$T2ZYM
MP_.LI;6(A$)>!1FULA1/QM-APY&2]%J^RG"/8AK39-W)$L*_PA35TPY 940F
M)'@*W5JJBN@#F@'+JZ]7PT;*SR^>&(4KAXPFVX01BG09*)'!%%T I%X+LRZR
M:QR!=O#4:PUL6A)*;?_UVT0RG*$SYAKQQC+C#SQZ6:"Y$P0]'68,[5Z5M7J%
MY" GW\(WOL8*/"W?H.%XQB*\6('6XMA<S"Q_!A@18.5XIY=W$@>"YALW</S_
M!K9Y[]QZ2$P?+ SE:YQ1Q(\B3NXI74]EX0@_4$DH>G.O  M%M/)G#-$Q),R[
M>A)MUY>FUO. ?[_9&A;$XKA>&W %B/EJ"PN?(<;<30DP3ND;-/6)W"/>OQF?
MP(O^G/N1CPH^=+VY-^@;S[<62 YW+@36RCDP5<RAXS+OT!%UV L[/WQ,#Z#G
MN[UD"#W#,7OQ('J'4;3 $V3/8^X7:I0:.KQ(BX;WX'IA1,#K:+ZAR7>0RA58
MNAEP?;><$-/)4V<$J&PK40B<Z.GIO;-#17C"KS<PDJP6F.JB/OG!0K*:-,]%
M!>=._6=&HM_D(3QI45.D-H\S*3. RN631'*\.,L#<MS@&<<J<4QCL@(SCOXP
MOOU$'$>46XX!O\)3PZ/KX$,%H@4-;96(4![.>7L\3P25$Z&2%&09JES?L)L]
M!N)P#*Z#6?ZTQ"%8' ]< 0<L+5_TP#=D'/@./?7<92_NJ_?O<6__<3[9U7^R
MNPX@GO/[468!4#2-6+%62C>HJ;*K<LZ2S(SV;S)CAL1;D!Q'Z)@BU=(..)+%
M3L25$$,Z Y[0;HQV$0^H$UL00O2Z)PND$FQI_TF!SMQ2RUN64[/Q=# ^#0")
M\$/!SKG^%]+A..7MFBJTJ!WFJF^;9'.C_;HJX<@=P'Y<MIC.XJNL'8YDHX",
MLQ*,:?]N:D]\M(DL"2EJY5.&E#ACNJ.E,MO)<L#B:>*$X56:/>T/PL]@<KD-
MU@E#J01Z*OO6-;=U%T/-&2UE."'+0Z[YJQ$<K,E96+85MO;F8K4;(%!^'1@A
M>D<R8MR19+O$_G#[3G&9PZW)"=^5#">7"';-Z8ZLC A38^['QXJ]_ [UR:E>
MI/:AG9X2%3!%#RGC3_M/=@0>%>\9B;[D@JUD>#GJCZ?#84>Q)L2!]A_J"%PX
M/N#B^71C+1%-2"X6IE $5:S63@==I3C1_E,=@1OHBVLT>LM'6S$/(/&0PGYS
MUS\=)''27O5,-XNPXX 50JJI%7JNUS@3P[V3'(]0@?"ACX<S3T4RMFWW S\^
M$H.50,.G@[>J3%'PL$K*:T\&N?/% @:&C?3V#P?N@_NBXO$>]'A_):7-#J%*
M'3]B0(T[J-D>76Q>"!:^]6Z#^,Q3G!40QYP64VYB;7<(B>KY$B-R(C4Q@;Z(
M/#RHQ7[9HB=-GA9/&WU<W(@Q-]5M6;U%9QI$S0YDCCI9HI\-B,\\MY\X T-@
M>6M,Z]/R!KS[442 HK552L,= I9BIL3XFG7@[!DQR</;U 5>\F\LM-GP[:\W
M-WJC<AUL ISF? >BDD_+U 8%,PCG"8$6XNB6$<%>=F<=@FL#C$I,OOT.KLM/
M_AK N?G/('Y6);8&']?N,LY*4)X IPN7!=(NQ#L&"PY*$QA4MO+G_"+JN.1.
MV6N <(R7"\9U=M)X_,4)WEH/^N/)9#2[' T&"#;]^I\YI)YWYDQS^!K+,MZ1
MTO,MP'S:)]Y2=KH,FL]<+2JLO&*0Q87VWS/3.5$%2[JB1Y;L15%5,XX:C4!\
M3#P.">!@UPV&9V>^0LO@(P880;+;KVUR!,>^C,X*&[^N#0B_EB[\,*!)23_.
MV\)I04>0#WK%^I4/K/W%>2E0%=<^+4 )\$!IP-\&4MD4L"+Y+CY)8F\,N -X
MOQ#?:WJ_(S89CO^5_"2 -?'&3PZ*DEBD(+"P?N!,7V,B!B7WZ\)WRRJZ.G7@
MRF&8)#>;K*U;JQ-#]C4,+T"SM4X+:QRT5W6FJ24P/V5G"XR\ P)7G4XBH3SE
MDEQ8& GJFS0W/$-W ;R]TRQ.L@UVP':W^!Z(WPA!;2;+VJ$&D8;4FB;$F:'
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MM"GRM'*J&!-C2'<N<?>>K"E>,)!45.5T8,--_?_?WI7NMHT#X5?Q$VSC)KZ
MQ0*IXW:S:)-LG&Y_!HI,VP)D*:LCF[S]DI)\R!*/D2AI)!LH4-OAH9GO(S6<
M(8?UY*]KSE%P(#_ 9Y"N=3JT@2A 5Y TESE8["/0Z^JD>*(XL12.G:;=CD^H
M6?+365A^?+'S+AOVS/ <:@["&"1JJ"WLTN"#TJ0<398V;_=/_>S+NOPE'DY^
MA1-B$U )%5C-N#ASK-W="?*\+!-%FT''+R +5&A40 .5'F#:D:N.D[3\<Q30
M8[4#R;':74\]UE4OU=<I'K*]&(^O!I<C:J5-+J\&H]IG%#[R3\8+-Q>(I%9Z
MM%Q1 W2 ^O!L!H3LA%%$8L'\T-PK9*>*ZS!81T]Q_6Y)DVND"J.#MP@X68@!
MPG*1;1S,&W=C6.*+[;/%T0$*@$(%1X&46)!,Y>;^*_0L?V&9[%E^D,T+=[^E
MI%8+<!5 DT6VB+A8 .;/4=1X(]$E[N"7[:XF.J#US,A%)>_8.5_P>7'58]&H
MB2*&&$(6J'&FPY^$(%I27YJ!3O&HK!8T33Y28M7A%\@_#@_U"0PE/@'Z?R_N
MYNP/&%-A^@.Z'AU/)H,&DF[E(BYR!? KI$?'8#CN8[$^%56?G1N PIZ& P !
MLD!<BJW]9: VCJ.&M3\"+ %0%%W[(T.2/B+Q \N<LDB#]R%<\>>6;0&& AAR
M3#!E(;% 6(/[IOVP%A&7:TW7#'"R14%EB.85[1J4RC)RMVU@L&L%A@^W/#HD
M2]L^,%$%R]OF3G;EBG!G;(C0))+4:@?2 ..HB+Q87K#;!!S"F3==J!WX2?2?
M15%!2"R@Y0HL"W>(*Z7E'0['5Q<(02T]_8KEK?34T1 '380;V 0UVD$0,;ZJ
M[VB^P)5N3:O5!?W3,8D7T.F1?GMP?8NU"?9 CR0>Z%TGD2]ZU\TI.J S-XS4
M_J)/76:SY-R;.7LW[7#!CFA&@\!_B/&C/SRYLW=C0\<7*_Y(@M!S_$?79G=P
MLD'#-1VJ[1;=M%3^HIE&5-;XD?_2!%>[;%=2&AV=&B%#EI,0=6FBTBNA+\;%
M/#"\ !6AZ #WHFR8=,$0VBQ^_94B-@T]!N5#]-"'KU08_X"-G^D*HJL.[5:P
M!PHSKQ^8=5H-JSE-GSFM@=,0W5:PZL7!Z!M2&:-!39\9#6)T>=V6/9V((9LC
M2#ES$M U>91.YY<5K&EYAEH2@>*?T-?:1QJ)4?/)LMK(\D)*+IN>!#'=RZS>
MSA0LHBY-&4OBU=O,P46GI[41_')#>W&[>37,(+X>W'J++GNFW(>Q3=+8F8P@
M,A;19J573]1_TH!OX<<>Q0="A8MR.T1Y/0FE4!!=6$5XWM<2+9[I"UV&%5-I
M!==:5!Q$FI,5,U >R:OK,;N%"OJ-N"O/>%U;YJVS=+U-U'A2#A93&E[TCV-*
M23N]78<]PUGT]EWV#OH\*(X_QI11I#C Q"O^'%]3/1A?7E[V)\//5^-)_?LT
MS359A#:Y7QX_Y0$X7SZ2/XK./11H"=U4!4(J9S^G)A54NEW%]X(#8M!O>U+0
M+\\/GKL(S>#>FQ/OS3))SI9 7C%\<&K"8X\T2'2%TRZ:=@:J8<K>;,DS^[G[
M (5ET: +PB 7.D7A- U#3D[T.=E8U#!BS^-ZN;OX>,4P(J&HTCT<(.&J12)*
MSA:RYU="1% \_?#CX;@_;BDR4"$U'4O@W1]@!,:<%C96A(]+IE!WT% 33=/1
M MY\95I4/&MIF52$Z$XWP:3%*=L=1$ 2<L,:=1O[?"OHNV03LDI5-.A69_^5
M5D?%R1#J/VER%S+:WR]W22$2U?"(Q"V/CSU%,<[2!29T/6DT:V=(K$@VR!0I
MDJUP"AQ1E+IC%_@\DC?BA"3:UN4ZD=.%Q5&GH1^X&^+=.EOGL.\3^H]Y<+D;
ME\$M=9E6NM11S\4^C?N^]S]"W=^?2[J_#_YP4A[P\>!B-+AD3)N,AI/Z$_XB
M\H CG'F$2%7@ 9>90#5X2Z.L#.SQ]B/2L#EN<&[9M%03NHZX:OE:*/.&@<N/
MQB&>2'GXT%R'.+<L&HCA0!R!")*PBJ'I$_.WE?OVR8S39\30)5_VR"4_//^<
M'\&T_P,N3$!ZW6,B$4?3\M!N9'_7[,?L6IBR8%^@$U@JBE5%5A_8H)K><0;5
M]*X30$C$J=9W?NU;QH-A,G?Q;IO3=&TY!M^%+JG2"4P*"ZK)H<Y!ZY'XP?WR
ME^O9"SX^F4+=041--.[F]2X'-3IIR)=61^>"&HB\D1@85Y07%7@C]=K 6#:0
M<V^^YM_J*ZK290:!Y6Y]^OEY^.*3?T/:QNR-A8-@CNE1SK[L78.]N,4V.)R/
ME"!S.'.+UVV=I!]$Z#[.*9IB]-4%?7./&A[)$AQ2]H2J0/7Y!4L@1[L2I$?E
ME,:.'Q\3.9PB$=N"J# =*K<\>E1%T"@!*Y 32R[-HZ<6YQ7/*]L&% 4X2'$4
M2(D%PR^A3\T_W[\VJ147)X80S+&<TNAQ!,RQ$!$U&;;-Q 'R!&4?/2*>DZ7U
MT+$! JD:(>3R-ADBXCA59Z^6';X9YO4+WZ=Z7*856,K1.'*O*DF))LBWC2(M
MB!6/:_IA/YSIE^?O9&78,R?(OS@IIP0Z6 M,V*IB:=HV5P>.L22YL^_QG]$@
MJ I#&CBI*)V</_O-'1144CIHFNQ+C]CBMX&.IAUIM(I3' W*^GT,8AG+9HL3
M!@'*N2=49]OMIO_9YM5V/T@FX9N@)';8Q=CE3<AJ(G;L=,R#\1$=\GAR$TMR
M:V,2_YOG^KS)0%:M*^PH)6_%H9_ZR;(5>NIN7BPG@H^%42UG175#/_G6(CI@
MQE#U#/IKI+-']NE^>1\&+-61_X]AA^1/:[66++'U=-(U(M:@G4J/VO2KCU<F
M&U1N+29FK IG\7=HV-;R@\7VS6@O'C"..<Z)8R8=]6YOZ;==9]$QFWUWO6U_
M344Y)7O1Q4KBQ#DA%6O83R\!>@=:7O@37!_-C )';[OCOKR\6#SX>TELV_W/
M<,PH?QZ[DLU[([XD:*I6N45XJR"7?:644$,[:"#TZ*M43<M./_0GS1H1)2"#
MXB_0 !;T=\_]U?7B6]F^4Y-<&)$556D9V@* LEB#Y<:"<58']\N;Q!QEMR;3
ME5@@AAS00I<94%8-E5X KLG.X[DR"[6!A@RZW__ZM-'^NXW$ ^R+8;.?"ED0
M2=U6LDB,.M22$&FB*W>_B34P71O>BDZS[M3UH\WC[Z_$\8OQBM/6F6<@S71]
MYKHA+,>@Q;^G2K7ZF5<R991UFV*X3:>)UV#_U'@D5(6FH'+^-3JY/O??/\5H
M)B[G/_X'4$L#!!0    ( 'V 5E9YJ57W]C\$ !KP,@ 5    =F5C;RTR,#(R
M,3(S,7@Q,&LN:'1M[+UIEZ+(UC;\_?D5/G7>^S[=:QVJF)RJ^_2S$'%65,3I
M"RN$4)%1!A5__1LXI6::F68Y)&;9ZYSN% *(V/O:8^R(^/O_+0P]-H..JUKF
M?_]-?,?_'8.F;"FJ.?KOO\56#DO]^__]\W]BZ)_5OV*QO_\OAL74;J99B2F6
M[!O0]&*R X$'E=A<]<8_8RW+MH$9JT+'474]EG%4900WCQ#X=_([_IV.8=@_
M^R_, !<];YD_M^V^$\^;L)N/A(W('R3Z'TY2L<3/>.HGA<?JU>?MUR^JJ ,'
M.,%VB#_1F_'O*1J/?R>3Z43Z^$,"=&:J#&,E:Q K9G_&8)I,I"!(8<,!K6 T
MI$@,$(,T1M,$00_BB:%,P+TWH?_\/?8071%M3?>G[V(C .S_?AM[GOWSQX\A
M< ??+6?T8W,C' CY;=-85TUMUW(^GW]?#!Q]U9K$<>I'>'N :+5M+EN^Z3G!
M[HE5:Q?*WT?6[,?FYL'[%ZYZ\/HYM7TY\:-;K0CR&!H 4TW7 Z:\^TSX6L4[
M_,KFL?B/]<UM4W7A8:@#!Q_9=D@U4?]A2.(?G@-,=V@Y!O 06]"+B#B&IS"*
MV+['=;R7%$,7#T:C+EZC%4'M?6W;W('#5VF;^('N[H]7?8,-S^FC0/4X"]"-
MPPZ[%DT2R;=>O6ZQ>> 8KXAT.OUC$0)LU]T7J#EH&M[=-IU!V3IH.8/HRG?9
M,E;]),@G#BR.?OT=I"#V'Q_<>[PG,3)Q #?U*-P2:[BIW_[Y>PR!\L_?!O1
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MCV/%&/M4.+,8XS7R;1#Y!OVN!D7R].I@\E+5P;\ Q9<51!^%8FMN;1Z?#@M
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MD&<M-\_6?[W$S:IMT91#.LRVM,2WCQFU\<A-"'E.X)?HIM5F83VR@#D@RE,
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M.9%,(T;(H_T,UR *E4JW .M;KD%:BS?$Z;P&.1)SQCPF%#,%_I$UB)YK\+N
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MV2]Q+JYVBPU#+D@>/CZ>V7[+CVA!)UPHI,>R#L+7E_#QCB/SZ/A/A>H#GF_
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ME0%3UU%D?/BYFX.,F,ICA&AE/P"CCKC>-U#):PV=< MYT66B%,'T%,N(0Z8
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MSJ[\#M[&[A+GH? NF<VG<<6.$RX82Y;- F"#R;.!)(D&.<- 9>VC]XF#$(+
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M^6BU<\]B+1"'TQ<G#U\]?[E:'@Z'VU_*20H@-BHD%W%E8SHJ*AW3=@D'RG;
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MA<>TJ;ADWY5F#Y;+(C6QP]7Q8Y\="6/N"++EQ@XKF&O]V[@@F 7%9%EGSB/
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M=[1]N+6[<WCPG01@KN$H:"55K&J#@2\;7@4RV$"07\9,;S!FF@ULN4A2%1)
MRGT0EDENC=L1#*+4N"S"AW-F%+#;1=4P=A]CY"T,1;4R]UE39T] ZFZ?!>%[
M'^35$#:T%J3V=<Z//:T%__]FJ:8[]$C;EL9*V'58HJIV2+IT7+9/GY7@UD$
M;5?2@2)(@"C8O55OWJ[(ZUN^] R7-XOATCH3;"($51[MPW%Y>[ O6:OZN8SZ
MNJ,DM_>W5$GV\G;?Y*W-$P/I:]4661GZ^LV[?;NCOH]0+[DK1*25X/?!#!@1
M;$Q)O$Q13$(:K*X4_F):V_->J'JA:@E5FG.MD.0=?"M%/HDG9>PX7NT9W8M/
M+SZ!^"P!=QS2R)!--B4#[1WG$ZL&M R<^^ *W4E6%(EX+L@&SDBLZ,]>LGK)
M<KU+%*#:("#DR\$5J%:4;1Z15BZ8$ZS<#X^=;?;-;:_Z51"U %NV#NSF(6=
MGGK$63L4Z/,;?#8S :NG;NOF)BR=]CA=Y]2O\.6'EVR2F^G27S>HNQ7X!#4
M")<]J7ZK-G]]B%@JG[0QD^8;W ^7*A?7)$W;"69+%-<-+0**S;7YMADT8S*[
M[FY8?269<K;E+.O"QT2<@CR+T#R$4,3CG$]Y+466K(BE?_SX@MPK<P7?Y)#J
MW0)H[O< S1Z@>6,!FE^FZKF$6BI68_$#C6HK.UO57TC;68X=SK_Y^AN?\;T-
MN7\?Y-P^VMO?.]S;O;Y,4$!E+DR[ZS+D&T&*7!F=$WM:M7H=2 P#I<SM3) L
M#-?[K,\$"8C(QXZY/%E;]'@ 5>0ZC\253TP/EHPW+N+BU&O2.F97Y&OT>+4-
M"0(V6A_4UI<%/J+V( 37XK93@2C4_.W<DK=?A'<DE5*BY:=^D%'D3I[7-T(+
M=4!1;8HBSCL+04Q3^UREYR(M_(\MDTQPH>669(";L+MP3B\P<B]9\[4+>M,5
MVG6 F4##  CO:J3K"GBKVWV\]4P)<TR9JBWYI-[!'HR<J'*=L2UQ05!N;4M$
MF7>@Q5X,?]9ZA0+R$)YRE06LLRK>29,KN2OCNM,RB923)T1%=(I#I:\Q$P8Y
M?X/;=%<!W18(K?@1?%HR=QXN5B\Z6^'[J#I4' GJR>6F_ +V:/X8F184BBW%
MQ%D0OJ5P4(#7*S/OTP!BEL1:XVKQ8:N74><DP,X&6I;KMLD63*LI2 #9\19@
MF>"-U@[?UGKZ;6EC\.S"I\L_U9IV^TOW6@Q:EBYR4J>A!!G2;"L&-X5R'?GW
M'ZS?X8(1:SF7+"<;&/K"H>"K'Y;;QWG&@$=I-6]JA>62"4C[EHE);-^=@#;#
M"V%P\_;9:JD %!8%;)FVT[%0*-_CIE4Y*;TC6"I6^+CAY/I6"*M487!RCTKI
M)G_1;MG'DL.P:Z&U;1?82GVSCA([W[WH8#6 O#L1#J;LQ>7"**[.XMI4+D+T
M\IH#Q$J2R-GJ!5B6S^#8<#@R7!(*W\CD9I**2+7454#HZZ@=.KB84)N%.:L5
M,:[EM=1J^U5DD2[E->@$SZQAY),5+:7:"JTXZ)CE3\$S,JPJH)"NR1,[E=7
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M)ZR]Q@0$TZ"FT5!,?LSC9*E4)B-DP(A/B_'Q^/!S*8]P'U61%B%S(UKV-YT
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MJ:)V7#&)0I3:M>1*EG*@JUQ5L7#2B833H?.1J^ZA0,GKFH;:,!EZ:>$B,]B
MG[,I9+,0++O+D2JQBVSK+)/!07!7+G+LZU0QHUNPKV%:JD%WGG^H,>0I.+NJ
M9<^*5YO"H.,B+4<[Q_A]>CZV83Z,7F9\2@K%3]TOUGZF@5:F*%VNL616>3!
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M@*8.X]_\LA)+)G@RV;_!DA;Y @<%]$*:GQBD\@J>1E>.S0WP6IMUP@$7.&M
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M_K5>]PXM\\<WYV<O?P[^\_KE^P!6^>;7G_2.[CB3/CBNZLEP ["JO4&KW?$
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MB(BF]<5 "3A4SL&UA]>119G1V, XC9**P@1!L/M6[!T06K]NR=?,XZ0U'($
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MDD4!_X8S+G!;@M$BD,##\,M/L%4B'>,GN;S D]OA_;J#XN=[(^LJMD5"C9C
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MR8EJ_04N ,UBRIWAM[M,0O=A7ES7@OH?4DBOUX=4.MKK;YM&U8/9N7/0V.^
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M(-?\U'U+?8ZD@=7=U'&T;WQQQ9/$YW--N]D=B]PB;P_#Z+#% L4&LGME3NW
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MG7HS?+C& A<_\B_N)/#]!*;._%@\%00N3F>S,$JTB,><P<SHXRZ_Y7XHO^Z
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MP)&3\7:<$K.]L5BL3S.!\=/I3&RDL*"7^*;@&9[80.>,"/A@UP-)B,0\DNK
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M;L8VIZHXHC0ZR5^KH(HD2NZJ07O<HUH/1=*G#$W"6.C<TCX^&FYP#SZA0E8
M1J-VNY+RD\M;L[7,WY5DC:JQN$A&87F*9^)7.LU1#\8XICS*7E<BL=YHKR_/
MSS[_\J:UZ)F0I5 TD!I>U%;+AGA2#D4LA'Q?D[:;D95P\V7GH=)X<278M8@O
M$VVR(S[A02SVBJ@#@=DM,.^X=&3+"RJL#PX\E:ZPHGXF^11+96NPQ%4><YP
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M>S-J/<&]F<RBH1Q;T-S$@^I2:=HCCL^9,E>F)2^9 DN!LU'9B56R/P1QY5W
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M\X+7$YW0U@'&O5@J[D7%O6PW[H4[X^&(CXSKH=&SKVV;C:X'7=N]=IP19\[
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M"DMBL8"J"HS6%XQ>M0<*BS8!BPX5%JT]%NV=8%T$HZ>@J(*BC8>B/05%59C
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MW[7?.MKO\.O[+RWM<M)YIQ2C4HQ[D,@_/=_WV)2D$7[ET>%(8\FQY24P4^?
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M_=_OGS^]4P+<;'11-SE;XE?XG44/VF\LX-H7]C - U?)W#$H3>58.(35'9&
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MV%8'!/8Z- _D.*ZX#8&"<9M Z&'O-4 3CK4]":\:.X=>X'O&+Z1Z%W"\,]F
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M8S,0/_6?.$4^$$A!W>TNVNO$%F_1)\CMI*[:?=L[3C[_49WUCBN^,>Y>;G5
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M%$\,%;% E[.Y--8NI3!X*(0!F,:Y9)I*G\#TM1O(/VD>;<WS72.NZP%U#V1
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M[OO9X[<*X?N8(7V2\CC,[UF;5J9K6GU+'5'-1JX^#V$/R?B*=)J]H YR]RA
M9(#(X%*W!?T&&=3&IBBM9T9&S#:=T8A.615?YV$/X<U!1)(ESQ]6^5!=9WLC
M(4J8.!-O?>$4IUO*9[HU->6G(^@G*6DQ53A&;R\)D[%FK:@V$2OUCBZ1Q/9N
M0HP[99 A3"-,(TQ_V-V$;\7TFFTH?9?9],3.O-DEY;7I5E<\Q#10,^@DQG[5
M0QIOOZ#PA8J";BY ^=KWG*]]8_K-,QH\0GXN[LVD9:O B$&[A 4+MS!P(T!^
MVZ*9-)8D:71> ^$?X?]F=:'3^)]FN]E9Q/728H&0?&HL5+*K60OB'R:0,'B2
MI,X?8_I0X>W\X@HF=.G$M<:NKV_,7Z@0/Y)U).OW(NLW:)R#9S;=_=&*^/;
M9.*?IS6.G+$R5"W6-[RI[&J>5&*\:E[NLKS :)EHA8F91GFJ_[':4:KGWZ%W
M/ XCWH";LMMP@6[D:VI/G@=:4W,[L+./*@FV54GJLNO"(KS&K,0OZD*JE-5Z
M TUE1_T0S/;EY^$MYM>'S4-VU&@Y69)0S4:GU/46A2A*$6 >L ?L6!C\IP\2
M"]E-K.!+_OU6G74W;W* 2U;=U20L6X\Z*SZW-NA<ZU/E)YXDCP_\J>,"V*A'
MYVM*-$Q>-HL3T^KT!LNEPO2[5?XUN3G#Z"\M-6\:O= 02)^SU84I\\5FLS\<
M!/6"#JQX#$L"(^H- K.=@(3\^)XK%9R4IREP^D)@-GJ:_9:Y:P2^!SL+J/OH
MY!4#9TF5/4G!"DI6\)N>W=;$:Q6="XQ?X VGNK(Y&ROTEQ2YL:OJ>OPJY=[.
M^I<\+_@%;K@R&;;SM95L1EV[/XD"?C;\2DM_8NA45UCD>^JBCA'IA<SF4[W(
M&+6^_;"=U]GB[7QBQ!W87F[Q)(8/R(MXTWE;'^\E_$2C)$&^\ &^6'$(R92Q
M3FW7]WLQ_D=R5[/A1ENW!V*CU2:PT1RW,_WPJ+3\1G\YT(WM3_ Y8/H 0<S_
M_3Q^M_OH>7V9G;B=UR& P(>2)K\,:+DFB6O58%;#Y&[4$JUAD]A8UPC:&_"[
M9QW+<NS;]F%LQ_!^PUT;K_Q5U\UUS(#2ZR.V5G9F7?U&'1B_.PDZ[JQSH]2L
MC66+8H/MU'NSTKQU)]Z+9Y/V-N.=(1N:,K9]L6/-6@&SSCFCQK4:(><=.C%6
M4^:R5S?,K#ROC%9&JRWW='CW1>RWN&+?Q0?,W6MV.]YG=,MIUB(LDL3>-.,4
M)%/^"+O] \9^PG =X?UJU"VE5EC@5Z5"B=S(7@3@0N-)AL&2%'8L:>5=YFE"
M]A,Y3=&LL>9N+1L23R;@P..67X&27I,M=L.7_$'>XH5EP!7"HD(5,\Y'<-('
MC/V$;&4'65,HUO)3,\ICNI9BQX45"64+2S(TD6298Z=.SB-;.(K37FF<]L+>
MCCM*<#I[@N,S;,=*Z9$LIPF_BLA^F=/,U$ALR<46T1MBH43&5V/0>!H=VD X
MO#<<GCW1\ TXK*<BAJ?T%".F++?4GQ).GAS%.(1'+;!3.+S-7 X>O  .1)X#
M>]904X:=4.2%X<MSY("]:0?LUXI^7!DUG?\:K4<8-@$*2W9VB\%GC'6$K%I8
M2>\Q4EXR(VFTLEL#TJD->(E,;ZME8FDVB9\\&X: C8"-@'W9R[A^!]CM*3N:
M-&2&$YAQAJB;D\K:&^@0V/&M7#C.)#GB5)V9&XB^\(H26,$<>NKA)>&&8J#J
MF<BF^6A^@8SRUXWI"FW-EPU;4P79M<%<><^0E-L""5 *&"QX[+'S5'V;VBA2
M<21VNCF]BN4[PVD#6#CQS1PTAB?9(\&OOQ$T$32_'C3/OMO_&327:JY1GE C
M7NP(-(]CZGKJ^CJ$)KR FX7U[\E3T+Q1#\0S1<")ZTTICK5PM:EF>\9*VUW?
M@8P6=*(;G>B^$0WE&:3C0C?9YX#>WAU0=3QX8T!CTI771ZB05*9J=]1O-X5&
MHYB9-N=:;\BV)#*^"(0C+EC$"O$#XH=K&.T5\<,E;BC_0WX(S%3878RZ-9&0
MC%YCF1O4BGT>\D/L(:&.*$JWXQWYC?I7WB]J2)RU&-9=\N 7)CW$<!?3@)[7
M=!%B)!ZKZT?5N%J%WZB8;+AYF: G \+@)2J^T(1.IY,L@2Y)16A&:/YL?>5-
M:$ZGL].H@)EED="P8K^QBLR>'$(TPT)59#K)G#1;;M!Y\Z2GL&_54Y[5Z8QS
M3C]$;T$FW=M,.A*0ANH$X[GV.83XSP\SYSYAI%?$CY>LX,G;ZIO8TLIJJ5+8
M&6LB0=9Z=6>A!FR[)5'X-G<%)V#NRBDC#G$"X@3$"=>K,_T&)\S$;G>EY["9
MV, YE_#2C8Q9T2$G  V*Y=@DEV9>TZ#^SY?!"E[@[+:B@;ESSP[BLPO2L7YV
M-"TA*S"L)ML1/-Y3=WSP?-])^%,MD77LV%2((W!YPY9MQ0"J6GR*U@)/\Q[.
MU-.+D*!JK'[\!WS9/T:9:[(+*6&Z>]<CON%3=]R'8?^Z"(I?3CY!/=.1MR/.
MIZAGW8Z__N__/._^$TVE%&?NN-_W7/1L7-.M8DW$M*1KJ;&KR69*GH!7?Y?G
MH1QY>R.!>R#WEN'W1SHC8Y4=>R#I?R6>?0\GY& V+7F=>C9G.Q9,S;6)_WWW
M9_O/8@9[_-#QXK2W[ZXVEWUCI<&GOWANO#2^L_A.X)#I_FV!'W<#H_"'-'V!
MQ7HI?_&JD$]+\Q_Y%Y+X+3%U(6/^H]O('I795XLE="$G)9P)A)H/$?4HP?);
MI/CE$AR;63FF4 GCM+%,J[)$DN18HA0-E\;:1)8F'$U3G,9J%#/^MGWKA_#.
M28.PIVF*DRC9GN\&,<UL_2$E6WF(3<-.,/8,U9#=YW<Z; ?Z1$W.9'=O%^ P
M">? )D%>S0!?\.I3EZ$</'7Z<61_W%_V#[O[EV&#[< )/##Y7C*AK14-8 -T
M='M4-"%;@)5\[^_S]?B#MM@=.,:$+%,T24GR1$Y+%*O@DLRP&OA.'5,DR2II
M>K*3'?DQ$=<K3S)>40K-5%B1O5['K,_*NA0;*2];VOW<<,E$^, ,4OAZUIG2
M>I76)>*PI3YBE;:Y""R!47!3J36UC<*TI/@REY<MF1'79%.JIPA]U^Z$826E
M#:JP)?=SR^8T-VQU2GG.S(K1K#F<544\Y"52PGYN65]P.:J;9QB3X#EL6%%&
M&UT+)?*PGTZ/MJ?3E26)@=:=Y\5"NC?+ZA)YV,]Z3AGEJDV-QBI8*S7Q(ES3
M8;KR83_Q_BID[748"G)%"]1J,.#S?"A1A_WL;.0).4[G!D*![)1T:1FVTF#F
MZ<.68V<J^CZY[F*ID-([;BEEJDI+8@Y;VO4A162*31EC.!$SVO2B)RUY*7W8
M,M^?\R.YT>X*QF"959<LG>53H<0>MDSC45-2=+DO$I5*D:M7)4UMZQ)WV#+T
M\!7/8HPE1HY+^YX[GC0U($O8D2&U1_-.M:\K@K&V+3T<ET=VO06;4C\WS0H=
MQVOTP1BB-A&D*Y%H>[FX:?I@\BEFU(XJ^16VY(C-*C,T@Q(8%(X?=J"MKLDI
M)G*X&0Q7=6=EL&1A&3<]Z #5F45CP1!\TRH76[6*I+.I2=STH /VM&SDR]UH
M;<JM.HZ5.KT^LVI!&^2@ YMRR9OEQ&71C/)J4VV6-O5\#4S6$8GFQ1S7\ 1J
M8Z;P7JJXHDW.D4'3(T*U2$F^E\\I2]' E$&YW*O*F10OX4>D:I;)=J52E*T(
M41"MQEA-#YP9:'I$K(8R7IWCV>P<RQIVLVIXZQK.@V$=D:M,D)ZTL06V%I9^
ML]]6<DU5AY.5/IS7-5;'5U5J-1.)(<_F::P=:CX8UA$9K-"$2&<G]@A+N;-I
M@7%+PW8>-#TBA-D,-5S2CE 1&EBJ4K5S1#LW"H$!>-A4&SARO4YG*V*'5WJ#
M>8VLYQD>-CV@BDFKSLXHHYP7B XGU=:+ED_:<=,#KLC,ZT5/FFEUC/'IACJ)
MYAVG&G?@@"QFJ4(S)Q(%2C!*G0JG]_BY7@+T=T1<*EU"T^=9C<>R7GN3;9BY
M=84$3STB+IF\2&/%TJR)5=+M>;%#!>6<Q\.F!\/J%.?BE'86D1BE<YD9*=5:
MPU[<]&!8+:<<]JN&8YJ=-"\MJQF\*W;CI@?#:KA*7U$6HF0:X;"8KI:82,R#
MID?D-7"<<I C5JI@3;K#],@A"#L3-SU< J4LF^RLMQ KRY4X;7BJV:/CI@=]
MG2[*DR8O%2RSP T[-=E@G;84-SU< CG-TI$I;3#&SN8#LB\59A*8UR,HT%9=
MISR<JJP0$)MA7<B-2E(7;(!'4%!)U:;8F.E41*L?KAL1J=2+).C DVC'1ORC
M2;1UTP!S:"XO/.W[_IOGF@2T(';6 ]27E:V>O;< 8W-%#GQG_\'65HD_>6'2
M///T[-H<&HV^N^_8[H7X5E%Y6]R&IAX(ZE3P]9D1\.SY#GCF9.Z$>T5G_W,*
MNKF^;PU 6''U5<-K9PS'+]XWE<= 3PU\[<(&UPEM[KWV_N[K'_J!V31:B.M8
M"!8MQ!4L!/Z0/ID7@A;B@Q:">V (M!!7L!"(FJYD(1 U7<E"(&JZDH5 U'0E
M"X&HZ4H6 E#3R</6:"'>MQ#OS$A]U;/Q<:.&H;"#"-<'W4%YVJEP)W-P<F>Z
MK3E0G#G\\+_?V&^_.1\D]\!][MF#/PT-YQTWSA2*--E-:+:JJ4>J [],V4;D
M<87DP1Y,P:E5WR[MX=>SY>9?F"8N--I'0B!^EQ!P_(%D;YH08!(Y$@,D!G%!
M>"0&?RH&U.>>WSN#&&#GV/T_NQ)17?,3GCP'#SC;9G[WQTRVN+[[:=@ZB3Y;
MP,]SF 8Z@*^M2NQ%C\KD@FVRKH1+N_-S7>?Y:;JAUC;;-;<@8-F2/B-SY:FM
MSO^DON-*LP,M[SH6S!>'@^@;_C0;>&!A-+=D*_, 3B_O>1KX3SU>(84)VIV0
MK%*B&(D9VTM9^!"KP)10ZML/AF*2.'FA2R40WA'>OQ;>\1=XQR6SQC%CQY37
M8@<CR)78S.NF_=EXSS0KQ5*W&TW,@"%:Z;Q17CA:"^ ]_>T'S9))(HWPCO#^
MUBC*7>,=>X%W3"K(=<(>J/G #!;]'(6Q JX4^$_&>R><=J59,U,SEV:M+K9P
M<K4,X/Z.8]]^4#25Q)DSUD#[ /_L@31G'<^'AZ5BD^P6W*M7R$O7$XOY<"[^
MHJ6>8FWLFFL]?253#%)08U)P'#4N8J"Y*T/1O(XS5X\P<MC0-VG1$]M"19^5
MI&F3;%LZ+U'0XB)9(LFQQ^Y\11!'$$<0_SSKZUT0KZ^SJ4*^UU<%(H@FDY!H
M:RT30AP8622%)S'L0B6+$,2_&,2OH!CE]4#\P@;7NR#>B>BRVU2]OB"7<'=<
M94NMM*H#B$.[BJ"Y)'L!N^JS'0<%U_&\Q,)U)F>ZA0O%OI!O[+I\8^?6S^[9
M079AJRMFHV9,1D<(6E^HGA $ U?(DGUEO!;7FNV&$@W-+((ADSAUH=M!$)@1
MF+\@F"]L7YT&LUF:31<*6[2P2A"E/;%I*_T0EOD!!A5!$4DB?:$*^ C,7Q+,
M*'1U44OJ-)C3?=+U"OE565AB<I/I9JUR?\H#,$/3">>H)(F=NHW\!D)2N[I]
MMI[0U@O-]C0OF; U_SN*3B&_UIF.BW[%,;]V:/SLE22/W"7[Z9. A/T^QHR$
M'0G[W8SYM3/WMR3L-^BZ?ZPNS\3/;VN>)KO*-*Z?K6HK;>XL8,UIY-)'+GWD
M.$!>P,\\T[)E)MY6<T^\)&R-Z".N!*YK":T:IV*B/)#%<C3@TAFZ)<5UDG&,
M3-(,C?R""-X(WM?AY'\OO(WVU J<T&D(T;15QH@-XR@1A'?ZVP^633+L*3\A
M0C="-_+Z?^B!E?>A>]0-Z]I$&?5$HUC"G2S?RE89B&X8!TBS28X[%=2[]C#
M3S971YO/P=N2"5VS-5>>)V/C2U8MPS8\WXTKQ:'P '(B78T3Z=)ZUOW0[H5M
MIAVS%+:\ LB7?T$JO^;?&2E.M$I7&0O]B>YR,XR9MCE=8J'Q!+0KCB90DCI"
MZ[VA]<(FT&^C5:U5F##"FDTQ4&J=<5_KBI4<O&L,VD)4DB9/W7F+T'H_:+UP
MH.6ZT'IAD^:WT;I*NZ.&:Z\)P?!J*7^^SFF%"41K;-LP28+&O];ID)_,'=YR
M0'\W\5K!P_F&#59:-^!U7;+G:?[Y#NK?O9\&N:N^J+OJWIW1%[:;GE-48U)Z
M)"@^YJ<CG.Y837K&MPJNT&]%8J&[(LM^Q$O<-MB4Q'!TH 3!&\'[2@RM=\.[
MP7>4?D'MZEBE,"L;>B655E0(;V!@X4220,$F!&\4;+H6R^S=\%;M#J&[K7R$
M$9(B;>:CD6'3(8!W?.J$3I+D+==!.\SP\]U \0,7O!.%E9#KZSY<7]?EJ(:K
M@Q/G&!H2122*2!21*** P&>KG2\4J^P4C%([IFQJ!NXV,E.F8J8<I]W",M%J
MPNE U=QJFTF,.U5E^PNX_Z$6GC"LA6RXZ&0)\O8C?\'MNP//K4,@&48RC&08
MR?"5R3#RVU[6;PLUP]*C8OAK%7K1+KKKVL9B32,<,.E>=V)51RT)Q[<55MGS
MY\]\FK;<\*>:FW!^+AJ4^,NP%<?2_HZ+!R$O+O)7O(^4/[%N]/7-"2J7_Z')
M-3&E/99!*\4\MLN6K&NP*!R8 O#(([Q/D96!-.2ZBF",RR6S'FE]/:7#KL+[
M,? +WDYV7X! )(%(XI-3='Z?),1:FJ@M.=X0+28STOM\6E4P'G8U_>T'<\$\
MO/O" ^*(&[R4 _+"7[=M)+Y*##_S =$J;>BP'9FFYI1"#R,IMDO$?! ;B\2A
ML?CW38=;P#.[CB_/#XU&[[S&XMT[N)"?[[2?#VT.;_*!7_%^\<4,SSTA[O:+
M8Z[%93::D2D]*@A1+Z CCDY'+;A;Q)?>@TXEV4L>?4=<@K@$<<E-V*=OX!(;
M']>;N#2O8IV52V)BQNVY:@MR"3PVPM))FD%7DR N^7PN.1[71%SR42;M&[BD
M66T:3,^=M(246[$PNKL)1G,=<DF<-9C&DVGR5#W3:P][_OOYS2C;V":*:B)G
MY'UD85_7@8 O8N1M78-5QSM&I^*DXM)E<U 2"QMCNNAI&ZS4"B6<@F8>@R4)
M#I5,0MB\.VQ^E-%T$IN6+3DN/Y84S"JU,^5R;5B9"#K$)C";:":9QB]XVAYA
M\X:PB4XO7< (.8G-$=%8A U.7 M]1QROQKGT*,6U(#:WP;17;E6XP7#:3_F8
M);! KN;YY[91[MY;@YQ67S1I_NH/?MRVO5.R5X".8+[\EKCW!'6,O%<9B5]3
MLH8QLW5KTBN/YUD+D/?VWOLDSG'(&XV C8!]'<;2.X"=D\2<75Y$<_#>>J^3
MY0.I,0HAL-,0V"2%RI,A8*-C;E=B:;T#V/.&4IH9M"%BLLHS4=VD.GTI!O:V
M5@1]@5+1GV]:[=(54?P'^;'NPX_UN3[FCT@*O[@1M*6.7Q?=3PM.ENT75U73
MZF<V"\5ONSF8B\/$%9H!DQYQ*O^-T(C0^!71>''+Y34TYM9%,IT-0Q%+Z7R)
MS^C6>N3I$(W08&&3)(/0B-!X!3&>+W!@ZG4TKM*SO-V@EADLZC2*O=RDL\:I
M$*(Q#NI0R31YZ!F\[4-21ZML;$,ZB;]V]L>9:VO<O:,$^8M06O)]'7% )<40
M=A!VKD?3^HB:%77'=HZ>3C]5L\+R.M5IH1YF,;F?"3?#7"Y=E%H2GHY3WI+8
M19T3B%40JWS5@T)?P'[[?58913636KO5&5:(S)3)5JG>&(M9);YI-,E2%ZA]
M\:&.ANU4),8:F$UM;[_Y\EH[WQVB]X5QY""[.0?971U0N'@<:9_[G'<=*PLZ
M8M@!F,Y=<K1C>YF8:K;MNI!HA+7ORF #-&S9C4J^9GF J^$07">^'_I$=']8
M&1%::RI53$/1\VR^.NM9N"[A+(Q)T5B28T_E4B.,(XQ_28Q?/#KUD1CWO!EM
M=.MF0XALG[9\PLN/>SS$.(QTT4GFDE>'(HS?$,91H.N/ UV7!/8OK2RU@!?6
MCK=*BXUR4-.+^'(X#T*(<&AEL4GJ2)&7+Q4\*SV:74_5Z<>:K4T,_TQ.*A0]
M0[ZZ:_;575KWN\+A?O5\PMT6L?.R9;9T=FH;6&<72HT.,KA)++BID"GC9=\$
MBAZW33"DDQQ]6)\>.?$1,2!BN#GC\5W$L&2YKET+6-*T"HW.PB-FW,!K06(
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M?U6E 6'PT-U@"U,[8O>RL9!*59E9F4\^E8D6J6B8 $YJWC%-H,O;DJ3J%KH
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MKX"12I)*A"%YHPQ)(OHDGTIX>Q\(]17 R*[HEFTZR%W#^!YR]89Y0\>3/-)
M!^BJ88JZ!63'! IV2 H.0-Z)A_6=$S=,/S$[;6OR69'=9889:5T:U]>7/5-^
MY*2&7A[-SPD?56I/E-D3RU>%:N^^W9[.QK7B$/JH#,(*63J6HE]+_A*C1JB!
MA!I(1)]0 PDUD(@^<64)-3 ZOFPNP3HB6]/6M"IE!<TR1'W#1<[_+(R2RF,_
MFV@)K&8Q2HD7MDJKA?Q/A)&^Z8!> ?OP-!Z:(JQ"PBHDRTE8A42"O\!RWF *
MFI2?/(.OEKH [E@0LED]7N^M9O/'AW)123[QM<;O%SNXD-^WWDQ*628U[,XZ
MW,8RILEM*2ZVT 2GO_W+<3$N20I6$HHBH2@2"28412+!U[Z<-^@??C9%\6LY
MB'6E7,NN;"TEJ$[!3-J51E_5UE%SZJ:K#:>,4@N&EI*;F5AN]YL5/HLF!8%Y
M;WIU5\EW;'H$4(3KR=)B@?K%2)I&F(X79SJ.#%,!9MS]_D]FL:$L0U,5ZC\T
M_E^D; _)H7T0$_(3A2)ZL_0B4Y*HSDVKSNGT,U&==S MHZLYGW$FYYK/6?N.
M6V-<@#.]@N^)>BGZ?OH)[]8NTTRSJR0R=&,B+5)WW;M,)KL>,AP^5DW'..;8
MN26=42_.E21FZSU<RNC:+;+C?QK7DJC.>[B81'5N5W6(L_Q'7,[HJLYG>,L?
M?8+]ESW<EI@MZ:E*WA#8M5U/#.J+\K;80AXN/K#^IHL;?3;F/Z.#6ZX!$@LX
M*DV!?\Q)&FZH)-E4 <@X*G'[C'%,#'$VZ7_^.[H*$L*OO;;?2^TL[^:AM9'5
M^X]HFY2UAHWQ.?N7*./TM \D6Q> L1+X;')QMW5^/_OC-D1J.+:%7@Y._@E3
MH"Z<[72U JI0REGC4:I<FM>ER9#A41LD/A-+L<>E*ZY!-:*W>7I0-O$GCG#K
MKV=$WNM)1-Z"H%M/X?8!3,L=R0D3(B?89@XTK?&L-YL-.K74;K/K99$)22 3
M<L$F1S>E+%Z(0NS'<_">F(^+X/0=ME:>-^.UTFRK*'S)4:2ZF+ZP*7EL+NH[
MOK"JT.J\7U<>YZG,S,#>"(+>8PS#Q;@$2PS*.9%V8E".8/7(6I1+H!E_:$3:
MP)94'2B"9.IP)BS/>M";Y/SIKK!;S\"#F3>UUDR8Y_^P-=ISZP%G"-[FE$=B
M[+;39&7,B$M^(<^3[*P^6V*/A&&^_9NB4S&.94AIY+-F'8@9.4HQ1-:,1-XQ
MD65G[FCP4J5A3X&)+C/!%.@61C9E8PX\,S.I-I_6^?FJ >.=+<UI.4 /JG_8
M\?4M)Z5;&X]2VT81"-) V16KVP3'/;6P=>&1EY+F+UA*Z:;TB(0\+Z5@B&D)
M3,N=6+I?Y8"F"*#3?6)ZRU;N03FSI_'<!)AW=FO[P(B,$-]LN:?-PZX\&^$X
M!250>#H=XU*OX:97R8"O YM2L?&E_M(,R[I6SM/1B_F)$5*L-_J+%SV+3(KU
MDF*]-[KHI,+9M13K)9)/*KK>:$77"Y._F /R%W,>]+2N5=6"EJH.9[V--36L
MAU*WO_K]F 9Z[BYJ<@_=]A/A3&FE%X=L@1^*DERO;-6\<3>+PW F@?%2-AFC
MN32I#DU*Y)(2N60;O7H'\I+A/REU^WP[G-4RR9$QDS9BAV:YE=@L3F;Z[[,(
MWMK)C,*@4QED6Q:=[ V<9+J<K6Y02]2$6V;VK9TL^L1FG _!56:#A,@A*!>C
M=("+S]K2YAJR#I=&XZ*D>Z2V$JD>2ZK'WK($WUIUL,A5CR4"3$J,DA*C-RS!
MI,3H%^"LGA>$?3_=K%?)ZG:NNTK,G/G=H.FLBWI9^,V3O2\]"D6V\"?-08M4
M-$P )S7OF";0Y6U)4G4+70"LAMXU)=URY]/[ E J>F,!T-SHDS:P',VV8,3<
M&'>ES6M\V5YIO=XDYK64J/+Q49^M[+3&9#UDDIC1=JJ8(^'*1M,#O#2X=5MF
MY$S@5=34O392&=OBUVU:6AMJM^2T$D_.!*M[ZDUUOTKJ&CX)'1])%JK:"M<
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M *R&WC4EW7+GT_L"4"IZ8P'0W.B3-K <S;;JP&Z,N]+F-5Y*M5>I;+?BNBC
M2>IJ-?JA2B\G0Y;#AZ<3B03AH7\I9_72:.#-VY\S88)1LQ/C7D])"$ZA->MI
M[%0JITKT:N[:B=2;=B+ZY#5<FC,^PKW&Y%#G-@ILT,_@&G(;A,L6R66)Y+Y#
MN&Q$@J]X.0F7[?,%.-IQW:MG?UN/;6LYJPY2='S5NHO/G.ID_ =5>=_3(P [
M&*/GC6';J.^I!5>\ \R5*@/W#$,;^GX3'=\%-Y4]X8X]9*Q4=F)6)%%ZBB>+
M5BEG-2O0'>/1 6*6C64R/&$8$=;A5V$=DLV2<.0(1^YF)9APY*[7;SLS1^X3
M?*U*)1,70>I1HSNM5#FS6"U'#1W[6@CZ>M/9NDK6'3[,:5D.[LL$!P%,"LP7
MFK$% #[+D&?40I-TBZ0"+ETD\ M6%OV%CD[G#0J/V[-H97Y=MT<[:;9LRDI2
MGJGZW?(/CX17H-H !8X<KH5K8]R^3_C?W'.K= IJYY=6:]5R>G1):S3NYR5!
M;*>@O4F@%E!,C+YD!Y=;U\,7J9.DZ/%[J)5?T%I]#G[U6:8*^T#OME2*D$T_
M:O9Z)K(]SDRWF9RHC[+(4B6@I2(5HDB[W,^'S*,U21$D+$086/\M(_4BA2$[
M<%*-_MP2Z>W=I"O4F%V!%5K(6J6__<O',ASA.GT"/9E8K/?0EZ-KL@B]^=/H
MS41UWD-_)JISNZI#_.0_8NY&5W6NF-E[&>>6L82,T /25NBD$GJ=[Q3Y<0$[
MM[B^9"S#7CE#]Y_1P2W#;7R^_9N3-)RID&RJ &0<B[@9/(Z)H0Y'[#__'5T%
M_^777MO/4I[EW;P4Q('*<U#E%<,9:2 ".O\1"8=G)6G_'+9KYC?J8U&1QH*T
M*K3S8F6J6MH?P';X51J.;:&7@Y-_PA3D1FE.U#H#G8X_==:/XK;0-G5H"I(H
M?Y!@8LD3E6:O03>BMW%ZV8)/5IF#*?F?\\'[7] 2_&9EZNB9@?<T<9#-5O-.
MWR9ZL\;33D[HF79ZLIX@.Y! =N""6<1;,P)'35&_@!%PP7-B RX#E,M\9M*W
MN@\5.CYMB:MZ;M%A<F=NQW[$8Q(*K>6]/._1R;+<>^C,],[4P7Y!&O,*4ND8
MDR:NP5GQ[J]F%3R .KIFX1+ P!]:@A>JTF:?BE;O_O%A+7::V>)N9XX?^OTS
MFX 7X0)-MMG'42+?IAO;TB1O/>28-H]M :I1FZ"96)IF+I@.NS%;P']%6^ A
M[M&U!9%W$=Y=?*3'"5*JV15$>@D:LJPEIO&.>>$><+)MMON;>.5.V-)I[6Z\
M:7'=V1J;"/[;OYE7^ZD3ZW#S\8.75"#686\=$@NQ8DO-?ES8[FJZG!M8XB1U
M82VNC7DNMQ&D_FR99O2GC&.5^X,LUF)4MR.5BJ79-T\O_->6X)I]I/8Q]/O5
M[\]'11]*B@PM-3"?%0@!@))D5!I$TK=02JFZ8</[VP8%+3>5-W2<&4.FG"JJ
MNJ3+JJ11P39@_3C32-FW1QJ)&;W$.O]745?__@/_\6\C:T RD2&:>L\*[ RZ
MJ[>AT/3_GF?C>%5(V) I\<Q),9X*#1O_^W__3WCX^X1K7#8TP_SIV\30>TW=
M? ^+S>,$Q$<FD&9Q:0P?_5/2UM+6\N&:S(\ BOX9F%4T$11#_^ 2_TN%?D83
M<C2;<VD3#\V99XWC&AC;/[VO^9]A4QI\:%@8Z/AI K<='[K[P7WQTMC&XB<+
MMW<D&/!7[\5XYD<J<8'%.I0_O"K<?FG^D5Z0Q&_4U$2F^S_=1OZDS**?H:6$
M%EK[.YR0\S[Z]F\764I4C3R/=@*H^8$$2^^1XL,E.#6S$K;L0RD]5B0VP0U3
M21X,>89AAAE>DH8*SX(1.Y98>CSZYC[U0^SCJWG*!P!D@ZKHEFTZV!RZB4OH
MXOZ@X*9*=9R1I2JJ9*K "K*9[HOF)6M:U(RU->33:8ZG(_-.!R9_;^CQTL,Q
M4WC0P<N<VYGYY>'^I>IPIS(<"\XW:LUXKG%]T([D2;W",8F$E*2'(R65&O(\
M+0W3M"0/N<PXE1[QM$++P),0*:AP*$T&RG9=!73G04_6"_%^^6G50A2/YU>V
M[S?E3M*R)G1O6"[5N^NLL=1AQ'-\)5_JCYS<M%D3@9%2FDG3E!P+79EX?N4\
MM5[T>6FWGC4VSE 2C*'9FD#_"V&NAU<FZ_GU8Z&=:-#Y>6E@BU+); XF0VY(
M/[_R;L[/R\G[5&FVC(^L?N7NJ=MOK(?\\95#2\]J&UX79G,CN4JET[T55YW
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M+&FVH0VTQD96>6,RY' #1(:E8W3FM?,$5XE4-KUR(_AXG[18  7^1],(BYB
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M\&>Q"^I=99N2;HV!B4Y)JOH*Z+9A;BG;H!:FL8!OLXU1"TW2;1RVH)*$"W3
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M>K T_T@OZ,XW:FHBR_^?;B-_4LO0SU!3H$77_@Z?L/(^^O9O%S-@44%>M)%
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M.$(O'[)UO2Y@8I8%"L)"I1?P"V*FI/_.+MAG[!T%:FJL/93,G7IK:CB:0HT
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M=L/OD1=,;:3/1EP82L/%$'#I>BF\#:%.NN;*346&I=[1O:,H;I,J7Z!P[C6
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MI[NE_IZV\&T<MQOX-9$^.*9@PJ.L(;0LVRW?\-2/![U^HB2.JN,Y=CKKH[_
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MW#8$H.^[?HZ8:$\Q>W7 ^_9?>5C_P=D18G/GIJUB#W&<:]PCHPO*&?><X,O
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M.1J,#*R]I5!%2^K5IEB<<(9<8]41\AQ\>V#M#7XW:VH;:8 MVZ5<I[K.K/:
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MFS^Z]L1"AVXB!>[CV)]H3/[0M=@]=DI><V+_X3DOS(?4!@/UT%%>FXZ&6G,
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ME:*56RCR/EOKI(3YKKB;A>[8J\N954JK#71&IJ=3;9:8K.VLPQ&HG7H:_T0
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M17 3F\X3Q$Y2:KWLL& .GF7X;_6>AGOVP2]!^"13S_BKM7,G*3,GS]?!,Z=
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MW/X8VQAO4&F^9#@L(S%:L4ANE4*\17^A;3S.5?;39%+(*)*2Z)4'C6YF6'6
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M1XL;L_*EI2@K98,-:R-2R8F)25%=585]K0TU%_7C[W3BB2(CS15IK@@7/TI
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MR50RFS,.3\$250A@F$@\9J'7(\6 /D6[W0-H^B,U#(@8^AZCD#=DZ"B0&)I
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M"V4?($G^]I)\E12$ZVY3GTX>X.R^P)7D$:ZGJ'J]T71BWMBIP[T+EB%P*'L
MJ?N[_/A;K^LGF:@?\+LEFQ\UBFI?Y95<+Q8K*VN]D Q,T\#QIN+ -CVL-;J
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M[=;KNG4@*=2:_X[.A2DGIA:[V:2>BK<*Q8(WRLA6'0(!\_ [AE_R4 S!P/>
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M; 9Q=_&%C&9JSACV/K"L(0HR7-XGN77/O8M:$R%<;V@P[G(&R$Z'LU"%WS1
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M^3G9&<V("X9>XA-^,9H/9470:(U>IJ/U&LF_G0 4_SD9$:_&F@9V!#8[.88
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MW^!]P$L!5#9>S+S8?O3G[B$ TBU,,V7#&X*G.M;(]25;B6 CSP8;B@=_A%\
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M=N%O>P5DQX3IJ P%O+8&X+460=G1[B+P$-LRL)FM3#5OZD!1TZ"Z2<;* 3^
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MS. .'QE0^O<E(:C(DM.&DUH-\&Q2J$1+9F]48:\:Y2#RK='2E<8LOLI0I=1
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M ;T"%#Q"0!ML@@ KAICD8FE%#K)4L!@1P: KOJ$;N-*; H3 3 MSO(&CS#U
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MA6*IOND^$XO$8C$4T4$X@'#@WLRU#^/ W%RDE,F0=_%B=%%,3E/%1))+ !P
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M&T-&$X&'780']+4%2O&%BU:\Z@"$CZD#.=S'.IH]YHUL.,')V5U=?;[VR\Z
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M1>F?)LIO=TJ!1^8WWOW['+"P[FM])Q[X[L+]A\KRCVIA[U/S3>=C![6VA.@
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M/!H$_^%2Z=>_O1D@<H8&E[@$?+0SA48&M HM IJ(A 54U2)DB(2%:8B. '^
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MH8ZFZEE ?Q_DATG+L"*SB:TXW?S4J=/#'M5]$?(9DH"XMMX'?LS^B-5$=.-
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M[%[@Q4UW&<J8#':[F1BFZ5D2>!621@%^PO")"?_9 /,A5UZIA_QG]1JAWJ"
MU Q=ZD&J]OQ^NUR-,J*_4!<JMZC,XZ)8*Y/TDBVPR78V5QU(O_Y-A?1??CZ\
M?PC]AT]%TJ>U*+DJEKIT.QWO5^<N6=77I;J2&36R$ #_IO\ 2[B)UN=AZM,Z
MFUP543U>*%?(I#Q0(H/M8R+)3=5.'9NNIPK]ZQ 5ZJ1\?6*Q45O0V<$R,2>[
M6KUIS1MLIU^2/B,BB63>2XG%1P?WS9+7G[52+CE&?DYME%C-23%9LU9J;)A/
M.FOR/6=]CB?#S_MH*$DGZ]85Q>FT%YE*JCG=9#X+MZGWG/>T8P_8" >Q@_V0
MW2DO^*U9GZ24[$W"G6*QU]5V:T.US'-5@8>[O=)4I\_2)_Y@G ,'_XCZ_$!C
M/N^K>.&#'M5U,3L>+2)*MY"*:;5MJ][<H):"8<.=7D<Q.Y_39Z+L*P[B>BW.
M&A.PZ3TV1R.6KCF=RI!N9HL4 WD[;#SL&W'V:EWC/CGEK6CKJA*;7G5'<%]&
M7ES%.R8HH090\42(M_Q-:'LQ!OL.9^+>$8C-Y^,A$D=1(FQNF@ -+,!=VIX=
MJ;J;'@F730"Q@UJ(LU#%P9^CZ^.LUQ';I9[K,4HPWH./O )/#A%RS&?]G=&C
M[B_?H.U5ZM[V"MS;7MW;7MW;7GU@VRO>:W0EC'6Y1//PKJF3Q44A.3-,*K$N
MKZ&2C1I7(6K<K9SU<UQIMLR423[9VR[&%6@I&!)2QV-/EW*-$LOP#@W8@6XP
M8Y;+&E.7&<=.'TH79[%EI1BQR8B0DYBU59871ANNI)^N[&2ZU,)(:E52B]3B
M@^FBE^F.T3,S3U?F)HO!:#";5SAM/B]4*WPZ5ERA9YYN-+]D*LGFJ#\EZ<YR
M4:RL##D9PTN33Y=.VSFH\&0[<;(8ZR15,]TNLG.\-/UT:3^KJ4U;6?382$NQ
M+>N1*I3X]CA^>OP2UXM-BX6AP-+F=EG+-D>K58$9)\;DR4K=6/>UV%IB8U A
M:B3DW#29:,.5)V<2V52I7UVN6UR$RW2'[A1((UZ"*T^.1 _BK1&]&4_92&.6
M8V1K0:H)M/+D1(ER?LO6K5R7C*C& ,P7M=A\NX8K*>KITO'2GFQ7C%0B<_FE
MV]Y65Q/611NE$D^7UD:5OI:*12JLUN^PZSD]ME<B>C^5>KK49E:.DZD,>YS;
M2:F3+2NP?'H-%=030+7ZD4=Q/>WJW-*93%NLP4YS)#.F3U<*@ZT]*=&JK,C4
M1#;BJ7)O"Z1QZG1E1H[;VTF*TMEB*V&TNJ"@N2VT\@3XDX[F@-D0J$HWF^I*
MB;$&MDVT\@3X&EU;9BI.+T("QF$'\U03L"):>0)\:K6J:_I"KI.R8]0S.7V1
MV5 ,7'D*?$"-6I%,9>JRL5:]^-A>U/0,CQYZ"OST:JKT%6<V5B+CA%FKMB.5
M<1D_]03X8!YSV?F*;BI->:4+9<E=E:I(1IP</Y/5IB6MJ";)0;^3K_#D4G8V
MB$E.5E96HSHO"DN)E+-ILBJXH)WK('8^ =1JG,@IFTVOS2TWQ6UZ9LQY15[#
ME2> $IV"KI4YI\T-ZH.T7)>GD!8ER'<G;\\5S%BQW@8&5P6M9#X[B*R;\5"^
MB].I39(>%]><L]&-<2_=DC+P1"&$M^TF(PEI,=,4GGUDRBFCWV[3:.7)V^5'
M/EED*&6@1*J;5+^4+T&#28(K3\]>I!<L<#* *]9YKI2:130'HCYY>O969%/+
M*^F21G:K.='*Y$F@I-IA9-]@VVQYP:ZK2HQ?V^ID0VI<G0DC^VI&<094,3-2
MBIWXA.49*U>?,N/TZ<IIMYCL9RJ-G-(L4K42+;!]AFJ/,Z<K60=LJ\69/5=B
MXZ5*.\4XIX\EY-(Y63K?5(UJIMUILZZ;J?':*C(?H*N).EVJ5><40YFY+5DU
M1N**V4X3/,0G%3M=VEV/UZI,<BPY&'3*CRMF.&ZS;;3T!$^U7L)IC];Y)MM5
MJU2DWZ<;C15^Z@FBEJ/DL)W/,TW625')<BO=BM@EO#3 U-L;3<;?U&@R<06-
M^%:R"T*3..U[^N!EDZK&?#77*8$.I[AZ/@L5YCEC.>M[^N U83Z7>X^/G6K?
M)IU1B9NY3)KK#MKW],'K0GWA9&*/;:O"D$ZU4.%BW$I^M-JWDS[(JZHA!&/P
MCL,P>%;LTXR@HU(LV20"2\\/YH2E6I]YQ3XM"6]F G!+R)U[\+6>OS<E,;XJ
M0?$UQW@*F_NE\+3QQ2%W'  4_\X$X.P9+ 9D+H!C*!]9W<Q062QZJ@(&O""G
M2%:J1YB7I-?]QK@:0O+M..^D$Q&&JZ:WG.DDIH_SA/3KW["!Q_?KY$-0,DY5
M8MD*&Z^0N7Q)X(9L@Y$,C)*0(3V7CR"9*.W<3ZX\2L,\O40.9+7LI\[Z";G_
M[__$,__XW[A4FGBH3B] B+GH>@G+6$ %2:@4"Q=26;_Q/CP -B#QF++PIGK@
M$>@HG;I99,E<69K'\Y69+JKKIYK%DY)@[+?OP5=D5=S4RC?B)DS?Z;%#(Z'$
MNC:UZ26'=J<%Z0] >EC IT'J!C=KGKVAQ87W;!2<\0,SR-4L>"&,XU 0>=#0
MPXL#G4;;;#-XJ_\TRN]AL>L%\:3+A!>X"QI*4-%8_#^'T'C2.>+ .7[P?*1H
M3"']!" )?H^@7A6_O< 9ZH+V8L#JH%_';BD_L0S5L<&5 U5G\/[6"(+_[W$+
MCG-@IZ)4\@[UCX<ZF;I#_<.A3D93Z3O8/Q#LSW4/@E*'OB/BCHB?AXA $*7O
MM^Z=_N^(.$ $>;^:/T,091)WL-\$_=\%T8T@XBZ([AK1]P?[71#=$7%'Q%T0
M?3K8[_1_\XBX:T2?(XCN\; +@AUW<C_NI_]'\<B/.W5Z81^5G>'2J->"X7*A
MP&]X8!2%\T/D/KU3BPV!Z\R(H"[SNP!$,%3TX?__5^K7.R^"> I?R9\(, 2'
M/ZDF# 87>+6/P?2"7;7@=166SZQ%O#Y'G=<>[DSV%B:+?S\FHXZ9['X9?_9E
MG#XY[R3TD3FXN8DIPT>4@+H":,/H<;QN10Z?>4P"'NJ]?]\H77_@S?SZU)4O
M+!5V@T8);]+H5[ET__3<?\ *Y\_\V=QQJXK(H1OO"_/+0=\C M/-N<7_.S&)
M__[[XK*3$LL[$][UV@NR',HE^,(LUP#VDXJ%.W_<^>-^)=U5N+L*=^>7VU#A
MCCHM_O>N&-XB:]\OOK!(YA=FY)<40]^;^20<2SX3K#SR$U.9G:/XR:GO?M*;
M\)/>WH'/EPY^K0/O^8!^;\ D14>39W/8/T1\G)TU]I>L>U>,/3,<B]=%Z^_=
M!+$_8/-]*^'?_R,( $RG5Z6+_X^]+VM.'5G6?3\1YS\0Z^P=T1UAO#6 @-7[
MK@@! C./8GHAA"B$D)!  T+\^EM5$A@,QA.CK7Y8;>-"JJK,_'*L+.(E7SQW
M,/B<U%YX_N<X;/]E4R%V?3+^ZQ0K\?,3EU_*EF#BQ@3;#:!IU'AZJSOW>R^I
M_^!M".^ZE/[CG8*<5:J>5C+C&B<0M<@X*TP2;'KW-@3ZTVWU,Y"$GA>_Z7)"
M_]KT$NTW"XFX::8( ="..RZM"IR-&KG22.@?R-A^]YG3^<27!X4C+'0;*'&%
M?3D72L0OC_MOH 3"A;\"8#ARWT;5N^&;U89[S92@9W0 /R*Y*+LB6%%3IIW$
MDYR9E UBBMKQ,K_^1/:@X^][E9&[P [B.FKY'-B!TTLWA1V!A?':+8$'4($3
MAW%RH0UT/IM.UP:-^7PFSU$G^81G53#[30;O&1G> ((/UE=YS_U(_7N &[=K
M<UP:-\C3XD:=Z3TE[%AS1,B3>M@<#UNSB>Y<PC,9<D:RVL^1,I>2QA2H%K)B
MJX,L"W072.":!*[)MX*)"[@F]X0,IW!-BEHD+DC44TMI#]15,Z>QC)G!U]E$
M?_U),+' .PF\DT_"QW4B\H&5<1KOY(DNEEM<2T@HX6X^,^S)77%4PI=7Q7_]
M(1,/%,$<L2QN+T][*%L3_4JVYB>F9BY*H'45RJF2,3\(>4X4%UE?"= #5J^A
M\3F;:!0X-[%HK*BT<9',2[323S)/E)PBLAPQB;JC%%^*HJO$: A"-/40)0[=
M07W[=5KW88V<>Q/.*O+'V]9\!U_EGJ3\%+X*Q><'CAJ31YS-3K.Y14XJYD;H
MMD &NBJ)?2 XG:ORXY'@>,>;&T>"XRT] ^5_45AXP^U@8Q:PR[*VY%*#DM9-
M\Y8\;*&+<!-(X9,/4?*.%?XW2('<+0A<V1RXT]C#&@2L7"=>%,Q%G*.2))O*
M,5$ZFJA=P@-(CX5<<5X?YQ6AQT]I:V8NP_@R893A"%R P 6X79F_GW3%1<3\
M%"X 88)>DA:U&N?F1K;4K4T:Z3*ZA!RE*\C8 TWLW^4;N &!!?!V^\C  K@H
M-+SA!HSZR;F:D]I+Q6VLDJ/H+%M/<2R^7Q/*.1E](!/[UTM^@_,CL>#\R#G.
MC]S#Z=,+;M.KAU.NN4\W!I\GBJ*LK_ U2FTQ5JL140+,ZLVP.%7H;OHB#A2H
M&RMKH=<G7+N9K916]7%EKK%]!J=0J.@#<4[_*:CQ>/>^!!CUOOJS&\:H^\GY
M7 263N'P68D>7XEUGTI\A4Y/<T_SE6P6$'HQT%YZ(,C]&OF@0.T*!6H!>+WO
M;,X-@U=@8'W /[6K8#8?<LY,<;.MJ"*EVP:7=" LH30513TDXN2W,JJ^0>;J
MQJ3Q)E'K_DRN.XVJK5$+,*M<-24/!UR#5]4P$*5EO'Z1RCHKX8SY5:Y44^3J
MN*X;:>5)JM8@@N&\6N 7!GYA %)WY!?>$RZ=PB_L+--,9;14VDH[DXU%.Y0\
MJPO( $.)0"KQD&#VCR<$GF%@8UU[FUX]%W7#\!786!_P#*WNJBE-FWF9FS:&
M0LE)R(UZ ]M5\5]_$M"LHO<[OMS/N:DU$X2P;)V[?_Q53EOM+?$(9NPMVGM,
M6 6CU_N=GBOMN0,@- 20H6Y# ;D8@IRMB=ZU%W9#T$CUHS,^9PG53IAS5R5-
M3'9-7HI=I-<$*95DD%LI*A'.Q,*95A909ISMQW 7O%CL@3EGKXD?;U[M]\?_
M)B*^W]3^MD3\(DF]LTKU*?RMK&M%S$R<6Q+S^6#@+,5</UQ'PL_\^D,_$.2^
MZ =EEV>\,?2;R/[^!4FW)?MWK][?<%9*O*R1TX'$\U.I7!16E8JX:M:@5*,6
M=+'( \/<\=F*[Y"SNK9L_$2%?_EPAYOC4Y6IG0#\M,09I6H*U#J%BQ0'=NV,
MWNIGS:;2&-=*J8AA*R*!  #WCPN,^L"H_YXR?I&,S%G%^A1&?4&.*ZH!V"8O
M3'NN( R274=UD/1'?_V)Q!\H.AJ8]8&&_UR*X]H+^\X:_@VS/N[2A0)?-U:*
M;8[SQ2RICZL1K-7C4*M3B8<(_>;IJ?]8 J36S6;AO,F7(10:LG@666CJEJ"&
M9'2W$3"M$%C.@&:"D %4P0+#D*6'K#'PCFN%9#,DF)!\JJH[YF\\PYT)[C!'
MVC8$M.-]LN\[?4U]VP7L@KI2+QE9CDCEI F=SH^UH>J\9(&</[&<)NI3 #%_
M_0'G310I!54W;0,T$2&;\.U)51<5GTD&?8D6E_-*JFL1\RC=I,9M>3)%KP&0
MG6;P15#/@)O-PF+F7#_"AQH1;K\P,\'O]0_;DX#R_H]_#]U46(8Q/;0-\CPG
M;-8?&)LKZ]:H1OP;37WO5CO26]+[<EE1^C%.'=-\0WEQX/DZ?.8(LM9Z2]:_
MAQ'L_AX80%#"#MR$?V:Z*2/6^HVY5%Z %\_TT1B_>#U4&)BZ:EO@Q4(O2/</
MB#U<R^;?+VK?Z-%^A@$A+D8(XFA[IH 0ER($]1A/!)2X!4H\1@(E<1N$"+#I
M-@@18-.M4"+ IELA1(!-MT$(ZHW.0@$E/D:)#]; ONE3W]<-X.=Q9^]K#S:W
MH,<_>PEZ)/*XEUJ[:$W]>^Y(/U8[G=&-]17I(.0"P0@!;0B&WF=I(.+2=N\W
MFGP([196!Q(42) O0=1G)8BD'Q-[:9R[$B$43/_@@8//6KTG3U@>7&S +F=F
M%S)@E\NQ2WSOS,J]L0MQ4.N^L/5?2VKM["-);#;RQ3J_@3[_@>K[2O;NE<5%
MWMT,]/-OV8)?$.%?_Y*UM4&KVZ:@#<V___L?^<M&Z[5[MJ8$<QQ:I]Y#?N[]
M9/Q\>YU^+E\D=?E+[F]P&[SX]VU=I_G/NCWWZ9IT8[LI:*X02$$@!8$4!%)P
M+-_P;?GC]IR=7:-OTQ^"\0Q W9[IVGZ=:#B$KF[^<#O_V_=O+BWP]U< _U:Q
MPB7JVZ-GK6]_JX3YI/>>Y]0B&1;TRHJ8VF67HH?];*GR^2.Q+^NDX12YI:C:
MB$*L=Z0&K^U0;Y]&UBJ2JV2=L.OY!'"I&3W3_-N(HY']LS+W&$J\7<T? ,'M
M P&Y P0G:N2U!@*3GUH%U8EE>:I'3E)Z67TBII\_1/,%(&#'':[8(3F5$P@A
MF^DUQKVD6/-N(J8?R*.G:P(H^*%0</7KQRX+!<0.%!"GA0(NFS#=^-,@3(#5
M("N7Z%R>B5S%)@@W)OP3'4D2"I6B-&,@E2"!6._"XM@#?>!:\KL.>7_$^XF>
MV/L)7/\@ G*S<<#OX7.M;WL<MY?Y5F<&;,7M]NJ3SC"VR)A7P==\12_W)]5P
MAJ/B2S5.U,M,ON!XUY=%'A@Z=CY3Z]N&V ( "@#H1GV]-0!EYI1@5H9:7YG+
MK94]<F8MIW 5  )2M3F62PF%GQ92@PJQJH6[HN3=0!8 4 ! /R<'=&L =!8/
M<PU R2AE\U1)=0A98#G5U'EM25\EV)2*=@N6-".'A-TN)&(S;12OM?V[QJ+1
M$W:3O^E4VL=OQ@Y2:9<,F]W@FG]>^/TL/N'Z'HTE,W!$4M!=1;:)2;^8Z27'
M7>D:B!@5HZMV-E/4"4 *T^2P+593<\?K1 ]-LG@0?@]P),"16W/MUCBBU^>-
M3C)7&!.@$^&6;J/;SL2OXMI)Y7"O1_8&88+B5D6MD8TR5=-O:A_@2( C9W':
M?A*.G,5#6^-(>?A48A>6&N-D.VTP5J[2D=6KX$AR:@W[N=60)AIA.#Z7C+96
MDN2WT7]($*?WT:Y][*6L:V$Q./KR[4)=>X0^757[56+F=Z$*@U!OP/\_F<X!
M__\0_@^.K=Q,K'W;H@WI(V@T#ZS0T+]( JY%T$S?)1#1_1'!:98[<'G/KKQ^
MDNMZ3T=:MH6Y,LK(FJ")D#CXYA=T&XPOUN8!U]6QR#%3"5,"44C&6N,E$Q\V
M&K5^ H72$V<L;?@>H!^ P<\ @WLZUO(%,&APY6IT52<TGN)&1-EBAVJGQ4(P
MP/'P!$T%>!#@01#7OJ^S+5_  [-G)AP^$M65>2XZ'Y<8+4*U)(@'B5]_2.(A
M'C]F(-QA8/L$/E)PYN4[A$%N<!N"DO,[._/R!=R=Q)3RJ)*J=8@L$2_-Z\5,
MS=2E/DG@ J=H4'$>X$^ /]_&#SS3D9<OX(\LZNR4)2-)+FLL%;:;+%<:*L8?
M[ C&$F=L=1(@4(! -Y1 NC4$NJ<S+U] H%Z]U8D,EIDXP92XJ0#H263L8@1"
MAUXBS/<Y]/(9)S,X"W,"/+U>Z_E;W!/?O+OBIMP:TM[369HO(*WV!'=DU>MJ
M2I9)A-,3-C-,1R'2DMC7)((2^ "& ACZ;B[GF8[B? &&FHE46!"BLY'"%#6R
MNBS'Y&&813"$74XB$>0> R"ZO+,9 -%=GN7Y A!%*W(DU0?C/B\;?4X=Z8E6
M77$0$.'#/'0T\4USGE@*?QV_]*JI6X)ZX,S/X#0X%"0\CX7[=L&(AF TU&TH
M71=#H[-T13V<5+CZ6F\)>5]ZHEU05^HE(\L1J9PTH=/YL38\[<'' [@8D^>9
M8;T&%&6NIIPJIS2*-9O%T_**0<Y9'18D!0*4N,6UWA)*O'04E5*"&>B*L.0;
M!$4O^&I&4K1SHX1=4N?3:=Z4>==4Q03CS,5,WT'3@FX<Q3Q0\0 E I0X%TH<
M3@]>?:VWA!(OO;BL4*:TSC!C*_:LG8X0<8X4L^R948+DI7JE7<I%E; P)?/\
MI) QTMB60#Y6Y(&)O-DU_3^6 $EXLQZ -_DR=(D-6;SX+*&C-@:AE#Z%0UQ(
M2DB3J:R!8<B"'V/O.R08(%0$"Z"&J) J"WA-,OQ<UO"@D2 ;H86@VB TEH$A
M&.+8#4'6"T':0KI;WK/@F.>!\)EF:+T)1R?WKQ/S.&OV*Z.SG=5R5JEZ6LF,
M:YQ U"+CK#!)L.E="8E^0$*VWHVFEX'[UT+;AV(2JF["23Q')1A/8LJ"8?07
M;CX^GU;R,:72LA-Z?[8BLC8+3>_$XZ%JG'>0(02Y4(6C'[X3U=:E##U@]1H:
MG[.)1H%S$XO&BDH;EZ=:.ZS$"WPJF2.F)LD9BM@J66T)4BU"/QXJ8O@0V9 \
M?B/2K6.!1JDMQFHU(DJ 6;T9%J<*W4W7+DXZ>SCFF$DR.N/DIZ%<TQ=T,3NK
M(8&C'@^IIP^0+B18H300\7)#-/F :CHHM"*,O8<>%8;;%9:784_I_'["_^LS
MLUY'C+CE.)]=J7)6%V,=<>0<5 Z?M5V\7]&#X'+ACJO_;(<%_8^@TH9XN5&
M[]D)3/?#R'-XK9/X.&)4IG&5GPMA=IYP:V65D*ZTUNAGUOJ:N!Y>;XPU&XM*
MI#WFI]/!BJV0);9.7HNVL<^L%PK6#$#I@$:&^[AM'=VFS78:6W_;_QCA_UY,
M5-Z=)=Y]V8+>@?@/NDU^-H.F54I0U5#SN?3+A'!SRJU[<Y+WLILY5!6G:<#3
M:HYLC3&"ZJ,1?)PFH7HZ]/MSR=Q#"(XK":YW^)&D,?02#WC4VEX&V(<9HC[4
M>FAFR MH[JIN2 .2;LG8]!4],HF(3%L5>F;H+_0<M!L4\<]KM,1_)O_Y^R$T
MLPW3%C0K!-^S_4BXI)&,M!L:_@!_77BK00^W< 8&SDH3Y1G\29BB1-;^0K$V
M@404),D $IPU_ Z8RO84#3V//1#MD_3+U"#>/8@ ST9!73:59\/@>014TQ::
MCK=M:-=\<X"=FM5Q:\7/B?9RO.PN+4D4*]*'S0'TNM_/#]^F2!7Z:."@#5")
MC'J]6C+#*@*U<)U2>K1@HLA\(Q[I/1/ XRE?Q3^&L OV"@]@]PNU-Q<1.TE
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MMBH<O#W(A*FXMQ(\;_SO__[/]OR?=S$LZJIN_%X'BK<6-O:,9 K'C"40'AA
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MQ'N(_M^@Y 5@])HO=[MHA!#HKWN!H/<Y=YSCS,OCIW!<F89IA\V%!TJQ]OG
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MY&K<8N8A))AX^'I6#OQ=UD)":&2K:F@AJ#:VF/$L'>STSG033S-DVN(8?E>
M2X!<-P*& 5^%9BZ8)K!"!L!LC&8M3"$\6";\2-0E#6E-](XC:T&S0'MC  D*
M'QPNH"\CA8L8*(3F$YKJ!@BKL@)4-PQGH871%P:"*9N/H>U]7N\O?(@6DJ=0
M'""=X!Y[DPKIHY<;[^_WQ[?[E=VF]C991JL+J;HFP5'OV^U'S**W*3CG"+\<
MO?NE:JS9#</6YMZ7'[,]B+^3.A0-Q+YI&<J5I4-I'T,^$VQKK!MP3E"303#?
MYCLT-S+VCQE*(34_DC'JP <@O6+,="\(BMA>-DT;A,RQ8, IP@&SS7Z;:+\?
M0C/([(A;0>A?Q_5G6E[(0X"UI_>X?HXQBQFA&6<Y!B3=!<$G*_FQ](82C<[X
MG"54.V'.794T,=DU>2FVH^QRY<P'M-V&@3#_5 6C8F#]/&RA156!T4"3W6A
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M507M^1K'JW/.I?0.IGIX@,B.["!(=F01"0Y$%ZAY#&BN&#H"?&SU@>E,U5T
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M ^?RR%<%5:X7CXDYQ:48M9HN#CBSR_:CR(]A'ICXH:8C 6@$H!& QHE]H/>
M!M%EXPTGFU$4NU3DBBER$AXWKF N.<JH9>=6%89PC<YR9A. #ANH^2[TBNB'
M>/28N12 1@ :7RIA^VZ@\16/ZCV@,8Y41L51+BSP;9ZFXHG<V)!+5XB8.G)Q
M.2^K3QVN47 2U,SI]HH,LC02*)22.'@=T'UG>1I 5>$;'M;],-='SKT;U U<
M0'FOX:+;PXU7PTQ7K"6XP6UZ-51]S6VZ+43^BN_GRWS6DWB(R^R.N/OPN(Y_
M):9N+<$O$@['S$KU:,K*]W.I*V"S3*?K:M*J%A1JHF2D2BW:S VD/H.\0))\
MB#'?)YUU>Q(9 %< 7-?W/S\&7,8X/TGV^(K.MU. E2,ERRVQ5_!$TRENFITX
MH,*E++;GM,IE-M5#5[9 3S3Q0%#[W6$"W IPZPK^[(UMTVWAUE=<X(_AUJA8
M(&MCETAPH+\LJ:54M%H7I<OC5GVL1:5THV=R[B@W%K*IG,*8"+>@,QQ[2-#'
MZ@IN/>&XN?"3F;U9+-W4+4&]EYKY&P07'X-WD(2&2#+4;=20Z%)0<JZ"JFNO
MZW8@\KU=NRX-9&4W;,88!U!*MDE'TY)6)6<.VX\ASY&B'A*)2) +"$0]$/4O
M>'%**<$,=$58\@V"HA=\-2,IVA5$G98B;CS=TQ($%9?*=7YF\0L"7;4*?2TR
M^D!%$H&H!Z+^#E?HVNNZ'5%_Z?ADA3*E=8896[%G[72$B'.DF+U"6"6<K)1K
MX\R$XV6W49CRTV99B".MCNHAJ8<8\:9_\A_<$?-FQ?-%L_HS-XH=0J]>TZV0
M 2#7K4 (?68)R]  .JTC&=W389JZ* N;ZTA?;2<[VFK%8+[HQ;!N.DVN;_4@
M0D,;K"\<'=FJBN]0\!XDH'ZTJ/DQNJD430%?YC$$(V 8J%4RG!V<%$!M]AL
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M!W)P^YC'PA4)$O"0WKNC+H"_@/5_&OSM7NP9X-^/P3^4:!2AS><!H*5[_Q^
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M+'!K^&7=V.V/P%GN@\: ]M83F/@[UN[MF6^!3X>+.UZ.[<Z:0ZI0_I ,9Z@
M[H$LJ2[C19% W8=^54O:,@^W-37<!-J#O&!>!4P,E=;)]NW[VF#P/9=.#'ZA
MFQZ'KO'8LUZZU4US$0)_F?[[W_]UE->\=Y#"6[VZ\7N7P7*PL&U"".YJVV,Q
MXJ5-<Q)X]V].=;BUN5UH/!G=-QSZO4^"@3N!8&B4(/^%'/SL)HF\W$YX8_A@
MTXXN#6^_=GQO>/?A&^G;6]I8^OPWCD7A%67 HY'MPF)8-$Y>@5K'+.F2A7BF
MS7^XU^ -F1CPK/J?3CUSDHW?/#K=>^A0C&'5)\ CSR#+75*Q_DH64E<$9R92
MU,#Q:,.3QO02MHH:'W5QL&V/3%F0.4,6S7VVTNVG7=,MJ%GJ<&?=C"]8=P#)
MR1I 2IE3D;8%/G#7@_R5V1T[?U]P ?@[%G !X#L+<\<BZI.\ \ERI7/'[5!E
M8 NJ0I!4$H,UV" W<CN?#TM(.7M1QIMHFY@LM0;J9,>D [2TV,N18[V-YN;=
MP0J5:Z:ZB37*S(H<L[A_9-F:.-TU0::4WKPWGX^YUF(U;[*$6]GL:.2BGHJ-
MC'0Y@=JU#%L6LLQ*%^!(WS,G32PCI/OE BK'8D4T)C4J+?#VF/^97&5%.NT9
M/F<R<74@-VU5=W0XTO?,%CZ:M"<2GJ87B<T::]M=V5RE6-+_S!(G4LE-N[U1
M[.&ZD(_KD5B/=5B*15^.',1P6BAO1GU%9MAJO])/% 4K!4;ZWM[HI36+2*88
MI4</,XJ2*R3L'FQ\[7OF/#N28K-$-467Z\4$FUC,FOVXPR;\(S?<.M-78UH)
M78Q)CAI65@,R#ZO*^49.>ITNG6:YKB+6^NG(="Z,M6D3EASR#9T62NJT2I3F
MJ$PY,]HB*U4JF6(QS#^T9G48=-K+IQ6.7RCMVDK*+\%,@:;OWZB,M6&JAI5!
M*6LYB.!<CIXZ8Q8C3JRJ+@_3LRK1IA>YF%Y<S(:I20M,(.8?RD1B96;8ZDR8
M3*6'%?@R-AC&P%-)_]#&NI7FK3Z;1>U^H9'=..MFDP5#3Q!U:C#+KH861TR[
M7>DE1N-%G%N#"9R@52\BEZEN+Y-CY XC6\E<9*7S8.@)8G7$36Z %3F5P7.3
M2+Y47ZY3')C "6HE<D:'*S9'/7364!K%_K0Q&1I-8#OYAPK]&6FH[3R#XO%"
M;IS.=@=*VV'QE]1B)7Y$H83 L1*>2+ Q4439$1$36(+@4"I)2)R()UX^?&8T
M&)Q?\Y:2C\<FYFI,I(U>"MIT+T=F:\H\KL1B,862:HU%DLZGIRO'JQ]\/+*P
MGJV6#H_&@607$BK9(AP9AR/)ER/S22W-"O%$15G;\<ZB69;&:04BD&^>#MZ(
MJ4IOG%<657W67A?B6KTT9D_P5@ISID(E8ECT&B,+74IU5L762:PJI(;EX1*U
M9*8\8U)QC4*SEI("(WWSW-0&24(P4$Z9364S,\2EF)AQP$C?/*TI4V$$KHC2
M]6031P>M6MHQ(%;YYLD.Z%2GU<,EI4US=#M26J'5JG,*U>:Z;O4BC>1:*;<E
MG:432V=:@B-]V)^860XX4#(J0[4%H1B9+5O9-1R)^5[?=6H3@U^B+;1N"(U-
MOSKLT   3XB5,9SJ67;1J#-U<MW#I]WX7%TUP4C?1"-ZH];N,L2*R6-VG6B:
MTUE#A\_T3521JIW8E%RS:&9!MU.3E!2/8/"9_HDFE&8ZE4N,9C0^:J5R<K4=
M7Z1.(C4V(*U-5XOUF8PR+ V&] A-B,U32$VHXEAVQK2#+HHDURJ.NZ-8<@Q&
MGMC18HP9T=.X@C,E/<[,$B+9A"/]$RU3FT)'+%,X+4NK5FD=CXFMM7, _R^,
MH%U5(RS)M4O]&;-DUC6GT%^6""M5=%@XE/CU;'.GK+=&QZX3;'BCS)3K)UC8
M0!-"8!QI"7\ &K.F:Y%M;2]C[[O9>?&@8GIH&7L?7[?LU-Y]\UQYZF0)M9?N
M)TTXY7M*;9?Z2J6J:=H6R=I4,Y19?52N=\C&I$PX8:6JTY6J$I<H5!4GHLFS
M'9O"B\UAR87'(@2&11-GKX"$E A%XK$(@4'':DB'F],A$8V'R'1!0GPPW?E-
M92F\('JQQF>G;E-_/>GLK:/]EA[R1R?IUR_'8V@4O?WEW7,!G%U-_"]5?PEA
MZ"&6'()5\ CO$^G/%BCXP1BW[?<10MQ#<WI0,>^KW.TU_O#4%UVZEWI&(<A=
MF WR,'?1XX(L9X5@]]@<_R6PN^-B7E[WHQ $KPF"=\P>.4[>GI3N5<L0).]?
M(HYNK#V02OA613:/S5\KR_9#..";+@:?C37]P!6_%=4)[I(_A^&W+N]SYLPZ
MI-'<$-T(&?C&MBDL$D%.5/+&42QY417HUOMSZ7!+T*L@7;N/*9:\W<7-=(HG
MA'$E5:+E8C==J^&1Z6"0^OZ*'+2;ZWAPX:9N342C,^&TTYU53Y3E*(K+8GO)
MD2L4;[:E FO-"Y4VO%* __J#/^%D6)?MRH?RK7'I$O4[O+/VOA'I$LW$@XU)
M'^YB?EU(>M')W/7]0:\?M&^/BP@]=S,OE,A$O-0:3)B%GNCEZ8+<;D]@ C[Y
MZP]&16$1]/.=RP-E&A_+XOZ:+^4^W]V/.RFZ=W5EYXYPY#.:S<O;!.C1;0+T
M=J!"LMGN",OS328?([M-<20L9V<[Q=\*55QIV5<D.Z'GS*Q(;43$VC6TIXF+
M4JY7$N>],1N'>@[VA)*QL 39#_,T?-^2K^]J"(2N<\<H%0S5YQBD/J/_E%(M
MW<89LZ5PI$169+YHCE"(8D#_249)XN+JSTVMDQ<:4>-E_1J$$Z:V:<V\:ABA
M57K9 &J@K#F(:7^%BM='%2\XTRL"VL$*O*IBS_)X1A5K-NJ+=&I:R]$+L3*@
MG62<SO6:; *J8B3F@["_0]&^9X=3\';A<;U5=PQW[]'@;H=VG]'EB!6989J#
M#H;:J+2,8#%A.F%2  :!+D>@T>0YB_3.?%E=U^%W%P;U3W9EA4I40+U7GGR<
M49ER+5C98]J=,;90<'2M3TZ4W)A-0I4IGDQ<46=Z+-4@=%Z%JD_@0"H8SJMC
MC/J,PI.J*-7Q +R"F77GK=&BO.%(O0E S O>H7[3[R=YKW)>O?NPY^IW>*IN
MF-X=*F%WJH3M!?2,'A9O%R.C-C<>TG:F@>OE;FS8IL>PL"E0Q&(X'CJO0N=5
MZ+P*-;A :G"Y?<>=3_FKVA6RUVQF!BD:7R[,>KR(I3.<6]09ZF^Q:.)<JFC0
M'5;72&"'V6@_[ [?M^MV=X1J7T]IOR6(H3%BG)NSC073VZCS2JDHX2MS'$ U
M[>V4]HJV:HYF@RQ' _NR7"#JFT8UX\"2\FY..QH[ER4:"FGH+@O=97<%3,'0
MKKZ4USZ<+0;)TF;$H^L2,4HW2#5?(]TN&%"WPJ/QGYW9=>E<]X>W$@.9PW6+
M3/J7O;1O!F.BOD#IE5U+H+93CM$EFU]K8C. ^M6;F?3)N3DII 9%E!9IG!['
M]%&"%=PV/%XJ/7'.CQ\*=N@$"YU@EW."W1&^!4--^WH.?J9+Y=:3-591\G63
M3M"TFIRDFI (0%?#8U&<NF,_V$U2[A\+O![#LW7'0'4_F?6 N&"Z)W2T?L%V
M-LZ$9=#><ID4Z^W<1A6;L/\AU-'(9.@ "QU@H0/L@16M^TJ5'QF.'NG1RQ+*
M-8WZ2(KTN":6@G &W6.)*.'/@/U)[K$+I\\_O/D82._8-^6%W1&.!<0A]F9R
M?G]5XL6FFEC0/<E>S"IRGEP+;@=ISR&&^6_RA&EAH4<L](B%BEKP\.TSZIE6
M5PM8/<NRBDSEJ,5XK%>G<1< H7I&1LD?5);K\FG\CP54MR_/'RIB=ZJ(O2=!
MGQ@,%(5I)ZH*E<PQPY:$5FL#A\5(5Q<C_&D4X4W)T/,5>KY^"% %0Z'Z8IZ]
M5%=-:Z!/JFA&FFSD'%%4XKTQA#!/FT)_F+/K*JGWV#W7C@\>] 728W:#!/T;
MHE\259HHDV)8)4.G-XXU:E;JF2#>HWQ'S7F:LE--"ZTSO8ICU!F&$J=+H*1M
MB\ZCB7/9KJ$HA_ZRT%]VL<S^0"-:,/2Y+V7V-[!\<KG.*66T+,?R4@05J<UB
M#+$.:G/QZ F3]&Y]8_=4LCYXD/28>6'XD76)WPZ-8N5FG,[3Y)S.S%=H,U7;
MF!H>1/WJS01];1"O#WK#SE0ISYKL2,\.36F48K%MK7O\;)GH4&1#)UCH!+MG
MF J&TO3U//M)OY\?C#JK$6U/\RBF\F-AI+HP!O/LDU',7VWGKOU@8;7[T+,5
M*F(74\2"G:#?<T0F%IGQ&U3,+1QR%A<9IM-D,;<(?H(,_5^A_ROT?X6:W<<U
MN_M*[#=-><:37!97\N-TSDFVY$P/IFLDMC7%T!_D';NC(OC!PZO;.\>^*2WL
MCN H(/ZP-_/S(P-.*C'U:D7)%,C.;%D9C_+C,8NYU?,3L6MFYS^8D(;NL%!I
M"AI*!<,=]O4D^UI:21"4/#84V2'I-8X;U&#CHM@V+>SR2?9!<H>%Y?/#\OFA
M&A9@->P]V?EBJF^,FTR64$3<K&/]7G]<6*; #KN:6-CZ,71[A6ZO4(,+I@;W
MQ:Q^16^/Y'%3FC)USEXY*BVL>C,7^F T$XUBE\_JO_,4?CRLGG_96Y8$T.,$
MW1ZI8A 4N1MD[]\0Y89Y@Z'P.-&F>YS=&13*BV1,#Z(:]W;V?K6PJ%!DK4<Q
MD40YG^R)0XQ:-EE\6UX_ECQ7_S"4XM"?%OK3[@J8@J%^?2D)/X\;,Z'5S8AH
MOM.0N)HI2/6F"UE0^2*B9R\<N<K7ORT.G)N!E3EO\@"RP>OXJ^AWG8F(6+K%
MJ8@$-AI9PIU&= GQF!ZQ)IR%> 1"!-L $@L^$I&UR!DF(FH"^'BGY"$[_<Z[
MJ/F$@'/=[9:$.)R)_.\[M0 H<.O"NF7,.QI%B[,(FBU36B0[2?T8NR="!D+R
MCEW7'<@#?EFC/%FK<8;!EO+S>&>C)4BZ'6MD5KP=D_EJ$P@:'O6[>!# FRKX
MX>GJE+^C>^SW2OEE26B8B<6LSV0,JSNV&EH6U\8NY?WF[3/E(0!<F_IWU"WP
M7JE?8YMSEAIQ*[I='F4E.:66B360^V34'YIZ)CXX/>8B^' IJNLHDM,-9/XR
M\]E\<@\32=; \:.Y=LG!T0..& T<+PYX(#B6C#782; /4&E$ !O!+W+\1!:7
M[F[ [WD?639X&/B^K5HF^%^5@U, 1YS[Y\,I@!F!DU 1+<A?@NSN312AP4/]
M,T5D$Y$U7K7A@2=[;W<U!X0;Z>#QX)"$'XVATH((0&L!?S7&X-'N6A!NIMO@
M#^ _674'@G7L9GSXKKE+$D26$$VWD+DA+F7=-M4U9!O/"1]%7,4@F.K*E=23
M8\7$ST6 1:R)GY:09H#5@7!!Y67+,BYMP%,\2MDFY"8.J4* 03*<H>J(*<]L
MU14VP S;KYOP*P?3@#2%%)+!UUP="+ 7H)8 <&3'@9(-78H(8$\@@I#7X-N]
M;P/.=)\*Z&J(P%K9@ >,UH@XFZOZ6@0O<R8Z^ LONHP[$<W=0J,(W YGJR@C
MG*<I'TT,\)4K!J9ISSQQ!XOT>!8(-N^N#"S9M &7NU\Q=VJ=)$/1WVIV)]4X
MZ:0,O[;[C@B6/X+H!/=>W._D5E2."0$41$E75=TQ?[N<=*3W?DCO&X@MI54U
M\C2:*8ZG1+8TT035.<ZBY">B8*MB7?HL@H*-\^#X>9L[$ TZ8)9I%1P,6PME
MQ)87<KF54O E*L9P8[CF%]AT#J8C@LV>@PF!5XB!-?D]A-L^8NMSY &9N+DI
M_M[]<#@)&-*?>![B&;>*N'33]K9^1!4EZ]#XC[A&NOO)UC&"HO^"4[>,W5NW
M3\.\);W/34[%HVC\G+-!D)<GG@]PW)  "^ZV9/>[Z]?^/0*BJD0<L G_S'73
MY?'?N]/EQ3.W;EGWQ;NAW,C45=L27RST&^G^ :L3K&7_[Q<=77$L)$0@"(&>
M=3F&A+@P(3P@BA+AK@>!_?%H_&R0(23$]^'0V3! 2(@0AW[ KH<X%'!" ,44
M#PGQ_3@4.YN^%.[Z]^$0&1+B<H3X8![?FPZ*[UMU OS1E]AWT8R0=SD"[FO!
MO*["#__O5^+79P4P$8U1-^V6D#A.E^%%S1*-=Z=^_OHS$#GC10+ <Y;GQ3(\
MS\/49;CFK5VX$A^%F/&8F(&_A1E>JG>4N&]\N&BB]WFKZ2)K??_*/)CS_^M;
M[<=)'K]WDE^N//]#D#P1Q>^=XNA=G?4!/MEOW:NC]WI:P452WN%A_O#W%+TX
MW*U)_;\?5<4\!W)XO?)#:<:'R8+PA5ZRH)LGD]FGR6R3!_%>)[O(%O)C.K]R
MF,9JPAIE+(#9^E^O_DHI*73%K7.,$EG5DUW&&JJE?I,E6.+7GQ@9Q<]=E_RB
M.A%D]+FN/74^'!?"T=W"T0=RWS\"1P1FIU2ED,.8?+O>7"WLZ2B^"6!'MJ_#
M4;Y56==;U?R,65=[LX(2CZ?,-H0C"FBW\>B)VA4A'%T1CF!4[@[A*':;HDJ!
M@Z,/7,;X"!QU.S6SWN%[:7IFULUE@^O)S<[X)\+1D$7;9H2@,ZA88\G>)M[(
M<7,(1\E??S T2B:O!$?D#X:CX#G:?9#C29\F(&M95#]2"2U@CO++&]+OREZ]
M^P6^E: 5N.-B?VUO;ALBVW)B/;RB%0?,NKG>\'BL,"R3SB,;TGN,/[@A0J_@
M?3A1V E["YP%^R,@@N_/ %;.LI9&%JM,;\F0/*74*JC:9&/00CY7"S*XSG8_
MX/WKV(O^83BX<BV)$ Z^&PY^MB'[%3CHE$I&<]2?4V@OC3M)/)E8XF4'P $5
MPL&[<CE_ !R<3YO\@7#PLPW)K\#!$B5K"[3<VJ#VO#E<XSTMBU92  Z2UX.#
M*P=FWPL']QE7W1$66>HP&18" R(!\NC&?TS[]/LR8#4C0P;/+XCJ4H0KA._B
M-#/B#^%'<2";_ZBR)D9VN;HP=];2Y^X$7NP0^!C,Z2_L;X!%]OR3.5E!=A5<
MR_I\K#7_A A+:*-^_!1ZX;/L[B'KM>,HQZ^:4CV2*Z&+_C1/V>4Q(&:*):&Q
M2OZ<6.XU#-@041X/41[/S/TPHJP'TXUES<V5(AN2,YC,<^GN8@P0!=B[U)4Z
MG/\ 1+E!Y/3FB'+_8=?04OX&1.E+K<DL3IDY1=;F#65=),P^XP!$ 28S=46;
M.:"(<@?QT)9L*A')$$6WPIHAFA8"N%Z\H<&,?\E@_L$H',9F?]Z9<C.[-W:K
M,P4"3@[@37$+-Z\=)46YO\C&Z[2JY.5%:XH6*_GNNLE2T-S%H]@5U=,@G!QA
M>/91$>%F=FO@$8&@97*NITL]AAHF@-8BE*:)V!@@ @S/1@E_$^*'1(0P0OO3
M$.%F=F?@$6%CTT)CE>>+]$(U2L)\.L7U-$0$&*&-DM="A#!(>XD@K2I+(O*7
MK'EUL/^^H<5)A"':,$0;M( *_L%CZ N%W*]L=!Z<(4!B^=^";4"1/WF"C-X^
M048?R?'IB,8,VY\71M< YV>\NJ0S.55,$;@S,K$Q&X<VY3F6 H<\ 3MP;+GG
M1:NHGQ(6"2.LCPH(WVQS!@<0,B@QJ8ZZ!1W%-:S/X*Q.9)--  A4" B?!X0P
M0'KO@/#-)F=P ,'NV@[)8"BM+#!JG9A7J]ET) 4 (7ES0 CXQ=$/WQ/=]0,]
MJ%;[V9DFH\_8M:ON=?#)SOJ;@9]W5F$42XJS$^5SCVOB'E;2W>\];,RC&[]W
M1<,.RO;Z'^>^.DJ).Z# R2BZJT,&643<;S#"V9:.H @*WWM8]O8#K8&^1N0S
M.^?.(:)R:]VV?DOR2A0.-VJ[G"V/''LD/DW2$]8ZQ#IHLK]>U2#A$P,W__I8
M]%[(B8^G/SE;[S?X'# I@&?JT5WJ[4>GD]1E$YF)G&D;X&.O4=I$-BW=@(M'
M! [,!IF#7T2$GT"H,W<-[2 ,<MH:BAD6_\<$J]!Y!8'%HMT_/_<%1,3=6RT
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MX$<:BU]!@=I@,-,*HJ$P7+^ZE!IT!2VN4@ %DE="@:O'34^@P+V'1$^5"98
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M&A)AT#.,500MZ'G%7N[?8QT&IX7[DJ_%)JE)CJ+M"L:4"6&)%VJP/#YQGI/
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M:\:GV5#[@QSA== [@*Z#5GEN5S[XIY>M_1Q959$1X"C;,F&P ^(C@$/ Q^#
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M+"_"XN;)@F-& '\R+<"4KA('ALMC[5"W<_54#L;<555WS-_?DI37YB>B8*O
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ME,T3JC(4\Y@@< DRS 5?\O)+Q,C@_,K3+\F \!;"JI*4'</WZ&2;9.*Y055
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M%@IT0Z;(76T0GL?>%DP*.&G3#2E"IV %)^WR>KF2]HW22* JFCBW!O,58H7
M&Y,X8N;<JC<F ^8.G$!<^^R6+UY%;TXB?P?SBVH]=<>&-HRWJ9N*Y0F6)BY\
M_6<9*S>;OILEYBE2K%7)9-(M^)N&"G6?(&,E]4@S+,YU]548XOQG3!CJ%U9E
M/@/U@=09^]MVN4N4ROWN;,51\Z810)T-H/YNHIC;<^O\?30)UHL@4&S#?>E;
M5]&;)GQO\XHJTJZ"TFOV/%;F8$*NEX7!HD:TS(267PNU[3@+23+(_4DF'PDJ
M@9U!]T4DYU>;HC?>"#'"V32I#S)"G>'S:9]5)!%D,HEI6AXF)F[ "$AM2CPF
MV)/K35=S!+W-<'$C 3EG1.@1HXV&:-1L'X4N785^_N=,KIDKC"M"-'/^A!$O
M:.;XP?MDW10&\ZDF&C.PU&U%-JD4/Y:I72Y/,O%(O%MD*<( C:RF<6T G!S8
M1STQT4+V!>+F+N1].8+AZEAAQ_-J5S?B%J7T^^MD;\@$&(;: OU('JD=\#8M
MUG\\!:Y49&&WZWW5G\'7J>=QVTQ +&W/X"LW4&SA<RS;B\T!7"H+6)ZYB3E
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MOM>Q-/X4OOIF6FFL:+HE*@[(MU2=])@J2@F$(HD>23Z<W \#^!X!?&7W_R4
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MM.?#\-T?T8GXT5K>-VC^7+7B]GGG(++%[$FX_,F;Q@ERZ80F!HO!'8H!B<4
MBP%!$4?WPS<NPI]Y-E_-(TD\3^2;<>*=-JK8NN@<G$Q/O3*B]-?3@W[_IGOP
M"RK\Z[]UZZ"(VCY4\37WKW_^H_^QQGGMR\/OTLB1,ZB3;BY1ODP4EH'K4,7.
M X1GZH..HRM,U*]HY0:F#L,1PQ'#,3)3A^&(X8CA>.JIBYZA^EH;?TY>RLYW
MN4M?A 5^*9OSHI?USWR8&#*H3G'Q_NQ'H,0\2D7LWD8FNHXG[T,':\X^<%!8
MZZZ\!*HMO\)%)3@$DOEZ41^H_35G@,)<['1G;;!<_7Z*LA=1C6G8;S1LE'WL
M$-E8".[CH41DK@O@_]"MT",7]&L.F=[T"PT@U3;Q<L--IJ4.A>ZHT _?:99_
MA/]_ICP=&.<8YQ'$^=L4HY_'>=^89(9U0UF)^F::HD<E9M5L_'[JK=/@O)M5
M\X0NY,:&GHX[@M669#&+<,X^?*>8Y".1.%<^'HQSC/,(XOQM M'/XSQ74M2!
MQ3A+<2,1%=:8]KM"[=K[><\>T\*X5EM+E"2/*;!B:ED>X1SEVV$3CSSQWGY^
M@\<#;PP2=!\']21V'LLDRD8\]F5<;AJNX:B(%G]^SAXZP/(8CY:U=BX[([@.
M42+CC-2<K/O#^+7UI?9FI8Z=1FTJUEJKID:4K6[)&LMLD,640F4YPWEP,,M@
MEL$L<T5K[#V6*0@ZT!/]85'<Y+G,?-X0*PGYVBRS7/82J^%2K4G4-)]9U_A9
MBUPCED%)4@GVD4]2F&4PRV"6B9(M^![+D+R>5;+)Q$9,;VDG9:1'0FX^OC++
MB.T5T=RTZ8)1*VGQ9CQ=SMJZ %DF*#:1?.2I]UCFQDZD,HJGQ%IP190QP ZL
M6W%@G:PXSIUYL3YGA2%L[*&QYRM[8@[27,[,0&I8M?4,MYJOI&MK17E?4?K3
MYGIDQ&5%LI0UDU8 JJ<.;2\N^9A@SFAZ8:1CI$<2Z9^SA,)([_J-9JK+Y6U#
M3TOEP:24=P:9:VLF\70_7I#Y9(;0-U2]WDD+9K8J0*0C^X?E'I/LN8K%8*AC
MJ$<5ZI\S1\)0UYQLL3SBR[RQ8.OE7+.2*J_ROU_MX310]_NR,="[=DG,3=IR
M9U%<DAT?I2,-"D'0CQ07KG[YE0ZF6JH.+ \E.([]KS*;_QVKH42&V)ES=F?.
MM0MEGI$2(SC:Z+#H)P/VGN$I6%H S3V9-CD*S V=F1$UJLF8_>TPF^*O?<J_
M9,5AMU4N3HUN=5@N*AF)U@8KF4,6$E2;"/J,:A-F&LPT41AM=)CFDR&#/V.:
MC&V#9+HS5PF%*_6%KB500+VV+\9>:GRWPLQR4BL^Z[FY_FJF2R@W/+306.*1
MP<?@F&DPTT33,OPIT\23,XJA6Y4FX6M&+V=-U56U=6U?4)9N9'.%KE,42UMK
M2,2KXVF91TP##<1$\I%XU^M[,X=4 <O\(J-!&V46OY4$.=&ES6O7_SQ/A/;5
MAQ4=-OQ\888KT%J9%=:L7.AW1*5<Z6GK>5?-LJAH#3+5&/:1I)/8Q8UQCW'_
M^_:64>'9H6TH:ZE%4/12JF?'AG5MW ]Y93J<UCA?S%$F;:\:4J_.(]Q#PRG!
MT8]4$N,>XQ[C_@^LGYQ2I:R>EO4-?][-, 0GDFKNVJ[9O.[,EGRK"D0J25#J
M;&35TWE4S@Z:,4R">21QQ?//%%)[K@GUHCSHH3 8*MID^YZK:^!(;5Q]5Y!V
M5\]J5\YJ9R#'[*!45%"!;5_Y5/0=^,Q=T:LF*LQMCV)"74@_Q;*V$QO_J&_G
M' K?/1Z>ZX"8XGF./O31N_<%29]+1\%70'BKDUV9TKTDQ4:*&LPSJI44- 7:
MO@+I;2SY?S1]^?T?^./P6-4$BH/X;+)_]S-?H;<<$I82_SH+*[W.V$(Q+ZSM
MW0QDXTC'GA_Z'?S\[_]ZV?\?3B=4",EVOAW(]<7 ]ME(J8!GQR ^=(!BQ)41
M?/<WQ5PI&W<_T"3_1!]X^]LS/].!]4\\T8E_Q5[\CF8D-)VHR-*+27M59VG_
MM=>EE@X?[NOJ?G. J:"J:.CIKYX;K(UGS[]1Y!,ZEWY1:HHAGY*),ZS6:X$,
MEH7^L3;_*#\1S8?8Q$&;P/]KU])'A1C]#J42DKOY*N7._B/((D&9*XADQ.:H
MFMZS2"O?3U@0[4]2X'8 4.U8P7(]QP\*_NU\J7"K>0JXJ/6B-O@)ZVG^:;=1
M65 7<5WZ99WP+*122T6UN0,&#L83^S>:_*#>Z5\G+@CZ!SF;/DI[[]+<:XB&
MD/<"60$Z#](>5&&F5)XFDF1"IFF5E!EJJ,B*2@VA6J-I+*MH(S41JJB;]Q:N
MEVU71@3;6FRL0:?1T57A6'7FDI?L)N)Y)BFV/+XW:FQM>BJMD!9%AIKVZ(IO
M6 HCED#-339KM8RCK8X5<M:X.$_K(\:5:HMX<U6T5Q*W$HX5<A[RLT:U8A"N
MY,OY.M,; X;KKXX5<I9ZU,0J^[..%.<RF]R:I,F)CYX9[BA7+?:;C-IM&"T&
M; I*CRL,IT%3YFU3,S[WIV3#3TNU<K%9&@_;BV)02)I,ACJPRF:+WECW)(5P
MNX"U$YO9XF@E:8,V>(.I;.923=Q69TDCW=)MX5@E:<"5_:'%3#O20LPF^_Q,
MJ2U'J&7HF:E<V733$C4U*-EJ.86!OEIU&K!E:$HIAR[.C9X^(.(;KB55":\]
MRJ$ZUJ$I77"TI,W)]I)0QBM-+UG>>I1!+<-3.HQS2XNJKFPCSFIED4DM)OHZ
M:!J:TF'#+2160RM!S.1M@FR6N3$91V,*3RDE%;,Y<U9SC45/V=1-LD.#T>I8
M(6V6]1V22Z2:8G<FD.ZFX;5FVZ.EK$EZ*'2Z;K$CY919LIGKSK9&1SA6RKKI
M;#;+03$UE2B;*FHSRRENTJMCI:R5?K:=V$KSO-1=.K8DZQMCD6[ EF1HG4;S
M89=E-I.4Z%,)4B@276;%!TU#"^4UYJG\3/*J4JDUD)AB?$-6M^C]9+B2-]>S
M:59M":+2+YLMJ625N:5PK)9VTK278WH"6 DHRY:ORI8Q[!VMI:VE%ZUBSV)+
MTJS,+&9>E]=:>N-8+>VEW)ST9NHH+>6 5',EJE<FAN,7M;2?6_873CXA=[>"
MI/>JDV2J6662W JV#$M44Z[W)]ZV[Q!4:UTJU=FZL&'0D,(2-=9:/391=@=B
M.FWEM6K?=Q<Y]/YGB8(ZY[Y6]EZ5?J^N]KY>]AF+G*+MV+21%@;9'2KZBC76
MD7ZA0%/0"_)/OS(3QJC+@7%PM5JH>WO6/5KW5+"T,AQ-&0U&"(:0VORHXZV8
M M1NW4"#"A=#)<H#0"Y99VC$^PMBPRS4Y88<GZL8ZHDW]5,5/]WKTH%.KOB>
M??A@IY 'GWRX/NI!V?ZSZJ@T]T2Q[_G^7F@R+YYOPV>.H'P>9NWP[SCR1'W;
M63FH</4OK8N]R1>\^-!4&4+]$%K&9[8JWA&-SZI[^Y]_Z)!DWW7"XH6XV$(0
M-%Z(""Q$\HG'"Q&%A<#4%)F%P-04B87 U!21A<#4%)F%P-04B85(_B)*%2\$
MIJ9[6XCWPYOP0F!JNJ^%P-04F87 U!2)A6"?>+P.$5@'S$R160C,3)%8"#8H
MV8X7XE0+\<E;G[\\(+VMBN;G8>7;FH,35'4GGDC^[36+B]XQ_TC5]W>C,8&W
M"QL- E7V]=_MW7\E2QF-X'0& 9K/P1\GNEN,1>G-W2O(+\Q-BU+Y.<!I)S[M
M?933[E^[.*'7PH,I.(*XX4)3\-ZB[Q8W_#/$$L\(H7X7(=P3S]XT0% @WJVP
M)Y:",TH!B:7@SZ4@=+WUUJ2 P%+PYU+ W;H4X!WA3Z5@=YITVU* =X0_YP*"
MO'4I((Z:1V^\>L1/?%ZOII'DG^?QS3BQX155:%W'84$F?Q=Q+/%$<&<GFU]!
M2G\]/^CW;[H'OZ#"O_Y;M_8NK8GMNXJEN7_]\Q_]CST05TT-#Y_Y*E?%R40;
M9TP-0A>OO;BG2/ZS"TN.6EF^I\35<[@_)Q=X=5T1)3U5X3QYS@:^32XL%G&Z
M/Z%MHE13:V[#][O9JZ<$,\AN>K0J+#OB3!']-,BEK.$$W?=&-87YY"-#OY<:
M"%,#I@9,#>\F7?\0-30,8EZ1)K1 Z#,G3SF+M>N*UTY^O&V7TXMEEXB+@(UO
MM_%BH\N44((%%EH59/*1(GA,#9@:/NI(N6]J.)8E_4/48)FC8@VHCDTLFO&-
MULCS;8Z[=N$LFEYMP*13SA+I;I\ 3<)B9N,5I 94.(M)/-()K#6<E1JN74@,
M4\/O4X/@RK71;UD0O+/FS%YN'I= O=Z?ZX;(I%:_SP5UE&#2\39U4[$\P=+$
MA:_/41^JP#L">I6DBZV9*C3$;EMJ4T.JU^CV@MQ,%*K9S3XF$F<I\811_\50
M'P3#WS?H/V$;M!.)9LNC,T.IRS.Y7()S&&_]^VZ#3X*>\OI$IB6J<Z(UJW0M
MSDO$"P+R#Z \8SS_2%$8\QCS'PTSOV_0?T+K+V13^7PQPPQ$8!0:"9,O3#N+
MBX$>F -6'96FG+CI%41CR_/+D1F GD,%0AYY]KTZ 1\__/AI_//Y#P9#0BY6
M1.$?US_^Y#3L]]#1X9/RP%P"-!;T5,5RX^'3I2<*)58U=0O\2+9*_.MOE.$X
M(([7<P$_1B=*Y%^0-?SYUSI1O+2WY*("<[(2<[]*]G+[//AG1RA[$I,10O?%
MXGI:7.7,4J]BY%;*C*W7BLMQZ]I.D=I($.DLRVPE:IDCR\:"6+9EE&66?OC.
M)1^Y\Q15PFC':(\VVC]W*G($[9W1.I5+)U9I8Y:0%UUG.IB-Z]>NJ;*FQU6Q
MO>G,Q!R@.Y7RFMUL.@V(=E1+*?%(4F<\',%HOR&T7Z"F9Y30_KF#CB-H5ZM#
M3W(J*8F@C 9M]^GR8"1?>V]/Z+6FMBC(34)/CWB%9YJML2! M/,/WY,T1/M9
M2D[?*=HO6@47H_V,9Q='X#U1[%J&[-(=$8SZHU&EL%YMY8MY-A2&,H>3;*DD
MZO*X7-U25GXR1#A&9QCL&5V9&,2W N)?I.KY<AC^#84\3H&*2Q#23(JO/658
MS0[2YA_$)'P2PZ/N9.'UVL.9U.K7UFYUMIDGZDCS#HXD\$:,,?S+I#9?#L2_
MH6?GEO.T[102/%$K-9I3 63I7/7W8PX_"V*VZ;>$;EPS0*VHM0?=U1K5^DD$
M1PSDNX>*)SM?N/:Y6E#H$Q^6WG3$9/2F 4=B__8EC715;J3LQ5!AY[3()LIB
MAVTF*VWWVMX'*J]5/'Y:8\5:99ZEMYWL<L8V9#:XI$'1CTD"AUMB7L&\$K6S
MC!>\,EBZS3F3RM@$6[(9GDCKBT;AVC<\'*_A]9:^EY2Z:GXX3? #>3-!O,*B
M@,[$(\]SF%<PKYR=5^XO!OPTUT,@K\RFC7C<]FN<N.#*O6VQV;-+E6N?C9JV
MNECXA7E;JN7B55+MR4S'&T->X1^^)Y*/"0Y?'/MB,:/1FX:[I)7?O%H">62Q
MF6V2LI0RQ#3;236&'M43AQ<[ENELX[7M8-3A#+^\D$9^<L0U:X@PT+%,$D>8
M8[8X\S3@*RF?,68\S=32F3DG$:TZH-;F1.?JVL5<QZE.UA$&.:LLE6QS+J2T
MPF1E(:L%G?^\&YF.R0*3!;[+<M&[+) M^G-QD^^K ]O8-$3-L[;NPJ(NQA94
M9ZB(8ZV9(69=RRU74VVEEA,06W /W[GW3HMO\QY+$[A>S![%A+J0QB??$0TX
MC=Z8[R\L_7-'1$N@VK+@ZDI=4?61KHKKO2<D.,3='ZDGYXGE@B$W':-$>]+<
M&!EIIW%M9\PFX;E;U;44J900A@5>JSJ5SEA.HL,CBDX\)ND$#IG!Q(&)XSQG
M0!\BCBZ=&:WZBW91TC5V;#/=6EOZ@\0>IR$.OICK5H0V5272TUQ7GNF\ ^<>
M$@?*_T4PC^PY4P/>%XCNE#B^>+#\GQWR?(@XB@Z76J^(?-D +FA2.5"8B<2U
M-8[M:IZWZFUZ(H(N*2MQHCE@E 8D#I0=+)E\3+#X;MS-!.E&;\Q?GS@^>8SS
M(::0EB,AG1WD'&DSK\]%+5_3YY6+Q>P[V70QE5ZT&,EGXGEZL.S[%+&"E+"[
M=T-B/L!\@"_LG.:@YD-TD.\5UWFO8G0));=VMQ6V523]RYWW-JV:V"P96X/J
M:QSISKI=>XI,"W2$0[,4I@-,!_CNSXF.8C[$!XJ0XGPCE^B(^FRKER8]<DDS
M%^,#-UV:S/+TMB*VN)GF#,<<MZ4#]0#=!B).<QLH2E=_#J<T7=LQ-7Q ??:0
MVBL6\#I[+J$(#C=*7I??..=!Z*R- FP>4A )6]W-M])K(IXQ,\N9::>H/TC"
M>AH_2WY(;A/9QJ(FS91B71UT#'[3'\M<<"WHD3EG!B+,-)AI(C'<*#'-;QP,
MA9EF2Z4S&4GG57&6;DA^HKI:IYO7OB@DY]TZS16+;:)KJ*! 6MIH41<@T[#0
M7"/P)2',,R?-H!3!X4:)9W[C'"G,,SJ<X%F+<$AB422R5"9>\[WUM4^.1N7"
MJ,A6I9FXF>5S&7&BT]EE _(,NCA$89ZY0FCOM8&'>>;G/(.D@*1.,1\8!?>(
M@I_=>KGV:#$(, @NG"LL@L/],Q3\GE_\<DMXZ'PL0,##][;M*68,G_/]B97X
M2F!I*+":[0]-<!V GK"J\+7'%27C[ZT[NP^:1K/BY$0B71A/Z4QQ8FGFM3W3
MDVUW/F9[G8)1<TG:&'J;-E=NR#SR3+,,^TCB6A@8^ACZ?^A?-BH\.[0-92VU
M"(I>2O7LV+"N#7VGFG>(I3EG#'U<TJKC*9M/IU80^J@N!D<_4DD,?0S]CSAG
MKCVN*$'_K<LWIU0IJZ=E?<.?=S,,P8FDFKNV]W:23/29H35I$FPIDW'C?(=O
M]]"NSS]\9Q+,(\GB"T.GM=&O#1$,_0L$_R?F4L%3ZKVXN-E6+#75=Z5Q\F*A
M>?DRG[/G,KLQ2ME">4.UUY,J*4!0[ZI^)Q\I#D?O8U1_P,]\[6%%"-2DO"E(
MZ=K,YX$TJXA.I9X&C5[I8M=QVJ/$1)^6!J;D@P;=3W,FG4HB)7U?U3O)X)T:
M8_HC;O-KCRM"H";DHI0K+U/ U$30:D_)[J*1ZF@7 [5-$U-V7DZ5C32?CB?7
MO9I4S >@1E6[$]#R?F^C#LX+_N,I</&^_Z/IRS]='?[IA]@=Y./%)X=JV#/X
M^Z%*]A/)@]G?<]O54=^^.<"$-M 2'("$BF@_O.K;CT.;N&J;MO/M('6')R*I
M"STN>/43"PY''U3BB3A(,IH<\"Q#,<7W[!@1(]![_P-??/@93--S+W88@#TP
ME;D+OAU^^?L$+/;.S 5]B)O*QO:];R-]#;27$[4?SAYKK\^!?GM)Y^'JY0A^
MJ(3YS_F/"T$_*';^FGS><$.(M'^SM[M_H>? 3D'4F;M/5COQV'^TJ_V.D.WJ
MKN>B:QFBCZ#W&/,F(%:!6P-<;%%QO<<89(B8,'+@##SO$"'P[#%6]:'EK*N[
M?R/:T"U?V8'NU/O<C[,T[KU-C_\A1"88>=\^L0>^&M))SB=>4UW+'[I@X4-N
M$Y?PA]N&CT^9MFKLV6TH>Y3.]VBJ;DK=5+<N",2RO.J-'V( \N </LES?'">
MW?*?X:MG[H5G:)L:_&/5]D",3![.7V.[@< AQ'8#^><_P]T,7EBW"77U@PM]
MCOE[V<V7/#%W0#Q@BH?O-2M65" ^G$V,)A]C4'+H'?K2]@Q^>Q-35+CY.4"+
MB7/=])>*&A-2$(ZQN:,O%0^8F]@$[KLQV#E_!/<VWP$. K(Z 3-$5[&E,K<=
MN!$?MH-8#,QU3UEO8N[&]<#,A6]3O!BP F97M*5BJ?!M+IPQ*.TQ57&&N@;_
M,)_##P*!=V.Z%701F$#U$"R68**K\-MP] ;PG@[3^I-5(O<ZR:[5\[!T%Y),
M#"B.N8',I8Q!S-DYYR#J=E.QTKW)1U49,)N;]@8 N2O/MMV),2F();LG947.
MKC8ZXZ/ZS!ZZM*P!72Z#L6**D+R\S8]HTD-GA>$^F/107NP-C-N;.7A5?NS-
MW_??'N96.;;O=;IB*SW5&EN/V<J95\[,0C7[ ;T)]O?;KJN0J."#:R-Q/WSW
M65TB=H1251Q')EK&EJ=6G8:4EL4-R=>];':]>OA.'M&3/B##L<-DNT^Q6!L*
MQMQWU(GB B2D*D#]#^3%<Q3+W3T72K!IQN;*)I Z'<F9.WF,K13W(!?_<S['
M\F&9$5\__^.P4BG?U2W@N@+"W0XR9UM_99N:U-MV<FJDYY*8S Z+[9'X^LH#
M^QFU6=G,@CW$%G:D<1@+<'..[?Z0!?:%+"PH(==7F;Y$U#3>VY8I@^MD5^AV
M0T@68I 33;04<T778I T@D6%?!@0C@D)QAKO0 KI"6X/4"(A 2$%!WT=_GKJ
M-7V+VVNLX5#C)]U$NM\DE 2(E^<+EIPHPF^OX:'KD/Z'NA5(;#I0H<;PE6FD
MJ4'M-OA8<""<QD'HN]M$O]5&-=^#7 G<CF+Z( ^WP*,KSNNC::[6J-@2U:PZ
M1J?(&V,&K?B1=(@?0?]!*B"*H=46C!1N(;$A)  -\;D5AXHZHH97OH4WNN*5
M-$/R]S5#W./3>)E.TZN788RCX/\BVM$;[]7UU.MH3EY(Z8^]ZE9$9B<BW;@)
M"<>]PKW"O?I9KS3=G9O*9N<N?O-2$VJN!Y_V^\Z0WQW;9PZO G_U"Y^Y:D)=
M%)WN3-ZXF&GTU->N]I,?T:A02P?.848HYH6ZMYN>;)SF7O0[^/G?__4AG_^+
M@>TGGPH\SV,0'SI ,>+*"+[[FV*NE(U["#?AG^@?OO)#O^A _22>Z,2_8B]^
M_W$(\*([,V4=?S%I>S_V3B?=?^WPF;,[D]A_&#J6>'CSW&=G/T4^L:]/2ACR
M*9DXPVH=T<3I'VOSC_(3\#S$)@ZR0_]?NY8^"K-?.N#;@?\#FL_(R-NY3?<B
MK)R2#GXJB:<[*WX7;J]%Y9@$*(%]VE(G0/--H.M+:,+NS%Q+:_BPZZ,-"L.3
M"8)F:>9A-T$1Y\H+>>)C@:L]U._H*^F_V\V=K,@$SP!RJ! RPR@\_,%3\I#E
M6)E5%9[E"4!1FK87%.6Y0&>13+#-1KD@*5X\M3)YIJ<E!)F4$V];)B;9#5UD
M6,E@9SY9S8[%%IT29"K<LM*FJ>Z2T$AB9G:*\?F6E]NML4S+U-N6:L5KD#DU
MW33BN:)9=,$*9$H";!EZ9DDWA%QQG&N*RIRC:[J=G>1[#=B2>]N2&A"=]+9)
M*%*\LIBU"_7RO&^A9Y+,VZ:SFK!H:5NS(LZ<:D=OIN5A45[)3+BCL/^^&,\(
MAI3FG>RBT<BNXTW4,M31;G7.C#.2,)5:AINO+TR;;0MCV#+4T9X3'VJU[+0M
MMF0[LS [W,8M-V#+<$?=:H-VY89J&GY5R-2YBB+9A" G9.)M2VOCR45YLR&D
M6DJ<J18H+@P'M0P/2294K@3,C52J%CDB,T[R,HE:AH;4K)+^5AB/RV)7-/W$
M.)=+YX4&;!D:DMHU$V5UDK$DJI$UN[UVMQ,WQ[ E2;YM.AC,AYWI0&2(62LW
MJ];!9I(<!$U#H_>\==DL)989,=Z=.B-'6O0[%53F+32FM#\5]37!I0PP'4TS
M$SZO]S24/3 T3VW#<A8C.E&4NDO)H$:#C1]G4!Z;4$N?S*[S#6,AB;XTYVK&
M/%?1NJAEZ.TI85U1NAXY($I.O^ M.L2LYZ*6H1GUVUYB,JM,$Q+EYTMY:ZCF
M-6N\RZ+SNN5B9:V*W697)A;.Q(AGDXWLLK:"+4-S7U].6WE+,:?$HB392\5J
M=AQ-V&7,>(//+$EF#*;CBA17*.GK^JJQ]E'+\"HYK1:7('-N4^QFP+0Q:I#;
M$@B:AD;/.F":K<;K?:+$B6)!$BVQF$)C"B\H2(ZJ.4/3*2/'I=O)X=8%9A5%
MDH8F?[FMS#-,N[0@6& ,JH8[7O'C?2#YZY:T4S8RO:9O&;FQRB;X*9TMSL;[
MZ-3733<MO=BU2]NI5)O%XX/<1&L-\V.9),)+&I<;\>5P.]@:_J(]!1V!;$[7
M#=0TM*:UV=K-$,36,$!ML$UO%)_.E8*FH:4J5=M.3Q+9MM3=KJO=7&'"]!M!
M!T+#BNN.O4XRZH+PL\5U-]NF)O.A@)J&%XLN$SFI3KLIPH?S54^HPEJ;KH*V
MH8'5V+P):J"9%A?=#DCWLGVR-=\]-[1<;('S-O/FC#) J[25P&09YZ=C=+0?
M6J_IP$_9?3V]$75QX0.0YA(# ">!#C=MY%G57//9K%C2:Z*Q+?>F\>T8-0UU
MMEASN<W"G^8@HV7:DU&K.:JE5JAI:!74;KV<RAEN3IK55^G*5)BLXD4!-0U!
M*Z-L2(8M;55C,2F80K%,>6T^Z&MHP1RYR1O;Z= 5XU)J2!F6YC'5H&EHP4IJ
MCJ2VAM62:G6AU/0U.]D>!WT-+YC)2:;53*Z6!NMXHUK;6<W+\6 *P@N6U)NI
MK)><5@BEVDBS296AU=[NN:$%*RU])4?Z"B?I26[*SWQ_Q)FPNTQX%7*$U3-Z
MA%\E%G[#=!61EG+^"C4-S5>RG:J)+MBVQ5I"6]7&\QG9'01-0Y-0ZX)TBB/4
MK;&A^T+>,3)LF8*K<&0;*FV[=:_CLA4Q+GJ<-!89K0R"IJ&U'566!7.<U =2
M6DO/2[9,<(J^0DU#?:4)M5W8=%:Z6%O2<%R$F*HF@J:AM6U1=I[+C0=0!QD#
M6RO61UQ>'J.FH6'UD_4-EUXRC!37W+6;FE=7A7KPU/#:CEK932>374ZDF3">
M<74U38^)8%SA]2)*\:)<X-V!N"GW4_791EGG%_"Y1_:MK:N3?&9,K<7%EM1-
MTZ&=^A(V/;)Q65W9D^Q-HTQ0\5R.G2;51FLY1DU#B\#'J\5:E1JDQ2Y5YYEL
M2O=YN'.1Q[8N7^!;K:ZIB+5Z 62V>0&TNT$'0C-K2NZ8S<F%G*BG[.9@9@T+
MBA,\-32S*YOL=95A'Q!I+\ZL!T1Q.A&#IN&9K4W7LK'E^G,B7G52G56.*!I.
M(V@;FEFUSY?=C+W2B>ZV2.LU9SOL(I$YLM70TD251<":8CQ+YT:RZS*+10,U
M#?6V:]"5_HA<5HU%IF;*2T\KFEFH"A_90$IV>]%N\DQ'B@_=K-"N :Z56:&F
MH9FE_4HE52OGZV)76]J"-$S/M[D&:AJ:V0Y5D;9+-:.).9YO4@UY5,MU@Z>&
M^MJS2H.2R7I3H[MU=+XES,PI5,FH8QO(H&0PT%8QAE"X%']5:JS[JUG0@^>9
M/5?XE^MXWP[&;FW4.6[LJD$M43>CN^APW7= .#ALR0Y[]E*?BU*.RJPSF53?
M ?+JZL%AAZ'%"H7G +'G00:QA#^&&3N,\\018W_@\_A=P_03T;&[ER'WUMZU
MA9PDZLX)].I\%T7B'C[8.=*"3U[YVUX$F>_;A%V:GG/HV(L8X8>/9DEA$D_4
MN\GE7WA^7CS?AL\<F?;J,&N'?P>Q ]]VWLD5G*=?>@5?1 ,_-U6&KFWZWMLP
MZ0LZ,3[K'MO__,-K%>^7'<0+<;&%(#F\$!%8B.03_VX")[P0EZ.F!%Z(2"P$
MIJ9(+ 3WA)DI"NM _J(T$EZ(BRT$A;77*"P$^Y3$"Q&%A<#4%)F%P$I3)!8B
M^<12>"$BL!"8FB*S$)B:(K$0R2?^W9++>"$^MQ"?S-7^RU.(RXV:^X-CHO,>
M -S''+Q/B/<P![]R>U_S%/6JZ'C7!WU;DJ':)OKP_QX2#[\['_Q3,I2&[:(E
M/;@/2-%[L03"/G_ C_B \VJUMR4AF#_/96;>+7]B=&!T_-+2N6ET8+,#FQV8
M&+#9@<V.7Y@=U.^:'=#J."]2_M2J2$]@4Z#%;LJHN#U4O'_:?Y^S\JNC]_N<
M%6QX8/T"F^48'1@=V"S'9GETS'(N- 7OJ=6[XN3AGR$U^Q0F!GG>FCI_:F*D
M%!,EPMU-@.*=SM(XKZ49X06/N$WY[[0#--AY[:];L2HCN];)2XS\!/Z#W01X
M]ITO.%;HL+ES4^9.9(D/:C71)KYWM1JLP4=0@[^YHX.HZ_4 -K1@CVY%H[\Y
M 8BXGG]0^G;_3=NNY^[IT-)N11&\,9F(O#U0\R; P8N/G;W8-KAUV^#&J#'R
M%H-H[=TD]N@4UL*50]D_/NX,T'S5 UILY-BSF.*ZP(LI^UQWWTZW56#C(60\
MW/!M!WNTPTH=/M@^H3:)+8R0A7'#4B*NY\!R ;X2<TYKXX;E(Y12%<O'*>6#
M>[IM^MAI)OA.W9EU\AN6D&/JQUY=/WSK1:&W8_/[:B))]GDFWXP4'QM@S?^5
MI#"_B[D$]90\;VS<1T"EOYX?]/LWW8-?4%& B&[M?<<3VW<52W/_^N<_^I];
MQ"]J'ZLJ *]K'Y]<+HA/6<%]H#@Q8&G0#LX -:B9OIL#FGR,H4SY)[6$+SP5
MYR@?=PJ_Z=U/P^Z6VA6FX04_!)GX(S8O.T_ W8L'1LF/],08),>MF;N7CMWM
MO;N?AMUU/8P2C!*\E?SJK!JC!*,$H^17U_>^+$JBY\=[[:N('?Z?#9XOF*:]
M0L',L9'MQ#3;'WHCWWP^H_]23KI+0_VB#JC_N8F\-L3[.(S13^P/$86OC.VK
M3V8=)3BLB?F6OJL]*<%?Y):G6)KB:++4RLB;_*;IS-L6*X)9G,B46"N>F0@/
MKRI6"JY<&_TH44G*OAL?*\I<_E%^\@ (5["T)H!#6 *WO9D#8:V[S\V?6V5M
M9W?CK6R[;B5P[<ETG9G[K;PY(.*54H<<C,5YI[QZB&E U6>*Z?[?0YQ^0'B;
M*=[_/>AK[YOESS3;V__]4!]S_ZYO[W=M?Q?A(>;"=8;?HA\.I3T9,YM6V6T+
M$+7%LM&1*I)7+*$ZXO3#]R3-_O.?UU/[M8(L,-;_K"S3%:"^+Y+ZI8YB+^VI
MN#DQ/'\B("R'F ZC$&>.Y1#+8122VT1,!:?.HH+S:7_ +QI&P]@,)M7.F*26
MPYEP<16<*NH;WB_Q&:.U8,UF==1F.$V *CB9^)4.?H-A$&]<"R^*W3\[&70K
M9@$/+L,(.'#-8IZRWMT*.)VGX>X=;#_U,UXQ%B],EH?L ><+<[CV<"-$LK_M
MYP@WKXTR>_"VE;400'?/N?ZPZ?J9<I<P2K6:1!HK?3';-"[.N7)NVEW,BL)$
M NS&J8-VD:I(#9E';@^29!^)!',^UP<FG_LBGY]%CUQ[M.^?=<3^?6*ZR?A.
M %69E/=*7=L^@8KW.?8QV@._ZPI&C5F1A:PA>HGLN=AGG_FJ;:/$!_#S_5TD
MR$9PQN&;CM!27&XQ39I;5R5=*%$M8RLS7F8%:8F%M$0PCWR2#-'27_CP]>R!
M/-=&ZGEXZ:<!.]<>[E4](!@%][4[_S0@Y]K#Q2C *+BD@7P\X.;:PXV0@7P1
M%=7QMW9"X7(#@UH7+56T,IU-[O).29FR#4-M)BFI9O6ZI2++&&P7&<C(*4F2
MCP1'G]PO>6\$<Z\A3Z\IA8:4@D+*3' ="CU=3-35QQ4AKB3E34%*UV8^#Z19
M170J]31H]$J7]_1U]:%<2-=$6]JXXVPN/_.5'M.02>+@ZDOR!(YRPO#^M0/O
MVL.*F+NN#YI&L^+D1")=&$_I3'%B:>:Y AA_PY=6'#-$ILCY:2(W4 =RKYA<
M%DIC!/R+.-/N#?F!Y^S:$#E3Y-G5QX5#@O >=AHWU[7'A2492_)I7%77'E>$
MC"U*3LRE@J?4>W%QLZU8:JKO2N/DY6^33"M3B54+[D3JBO;<G9:ZN901&%M[
MMQ%'\K<>SA9%H..0-GQU%F?TP;%7&"4XHP\^_,49?7!&'XP2O)7@C#X8)5&8
M!HP2G-'GVAE]T#/_)/LP^>7J\'RE6\;1&_/YLP3=Q@YXIS$@]S7FLZ?)N0U9
MO\,3MG.GTXG>F,^?BP<+>R07_AZ)_>*%9;&P1V7,]RCLY\XJ%'5S/$J)<2Z5
M<_?N'5-7\<^%G#,GO(5R^9%$*!2*.$NFL$:#Z*3*R453I/K-%=C$S9P,QA</
MKUK4O(% $)XG*B,R59:[Y2S\IDS29\_6BUGBR[#$-2(?/DT2^#K[5XAH.(O\
M7B4H 0OP]07XJQ#P5>(%L !C 3[Q!8R("W!$DV7>0E&0B9'1&M-"01/UKK#H
M*>4^RX@-9&><*R7QU=PL5\H_?)?4]U43)X62 ]QUEJ3?]L!\)DN26DI-DLV5
MTS?TS:*6)=/SA5"^?'(1JKN<23:5V1"STBH^)3J3U+JZDDEFEUR$>V28]](D
MX< 23"*XSM*7E-5P.HRO(JO'4F)$?,/#PHR)]^-9,2(ES']?(+,3^2JSTT7*
M0*2Z\^FL0NEEHZ5,\F+'CX^]UKD.U#) \X.)<X^H<$JQ9]M97BN)\65)WY;M
MZLC5!:3"D=3#=^J1YL(9"W"6*,PD'\E*$BDFN1D/V0V6DQE5A/A&*E"L-%L-
M^L46.6Z0HT9 (HF/%)2YB7"E*/()CF#Z>*KR+Y+[Z2.U=.X['10A%Z5<>9D"
MIB:"5GM*=A>-5$>[/"T*BW)N%.].6)$RF;*UIA.UV7(%.7'G'N,?R>1[Z:!P
MS!+FA3\,:KKZ2/&9>P3\<!&4B\N%15U]J!@">!.X;F#5U8<:,0>?4>'9H6TH
M:ZE%4/12JF?'AG6N,)-WO6_UAF\;7MD0Q%ERFYZ4>XOV/#-&&N(EO&^8'.Z)
M'#Y4X"I:Y'"W55MT8:SFZ?YZ)8%^WO*J2FJ6YAH!+R0^4K8E>E%H403_O4:B
MW=>8<2J>NXZ8NJ\QXU0\]WJTC%/Q8&&_DX6_1V+'J7BPL-_-F'$JGFO?D_RC
M9+G$29/E8B\ESJ"-"_O@: ^,DJBFM[D-D. #+US8!Q?VP2C!6TF4$_5@E-R*
M>&"4X,(^D<MG<ZFTP?<EX^?W088<4*>[+7,_\4LD?Y:L7$->+;04VZ]+)1\L
M5DW3G3?5RV?EXH9>"CB=;H_(&?V!VN]EU%1I)9,<NDW#$A1.-'/78(]>#IDS
M1S43KZ*:SY/XN]7-$:W6+ O$1<-HZ"!=;))QX4S03T_@9 *M;:=MUX.?B^LY
ML-QC5.#Z#EL;;3)KJ34B)&>RY(@R.494P#Y\)YGW(B/QV6.DHDK.0@7G#PSY
M-!?@%#QWN"6=/V;C%W+X]P4NUWRY;>C="SO.,)>>NJ3,2>G$AA^JC*12=@/M
M/.C"3C@Q+$Z5<V>(/W?@RK6UT'NJ-Y,QEX917R=50Q>[]=E (68F$UB<Y\H#
M':4*7%=*#7WW#N4/7DK\0HG#/I*[XIYSB?V^7^\SN<2,[E8EAD9M*;:(]) &
M3EK4Y7,I6>_DE.YO7;]"U14C)Y&V7,IL2"<AR' .4-(<FG@D$F?,*8W9Y[[8
MYV.)<^Z+?,YDX7V&B^*M^CQ5DM=58S9,+.*+E>%.U]?W.Z:UTF"6\TQ ;.A1
MJYR8.>.$O4+<Q#Y\3Y#GXB4<;?#A5$9?A9<^F,XHXL2$LQGAW?D"&8TBA8(;
M\KE&=D=^UP6KI2?%7LES@=BJ]"IYFHG7,]-@$T8N6))Z)*GP1HR3)F$..G%\
MW[6'&QW_Q%W5O$K,O4:EV1@FB5ERP757B=IB4!H'])/X2-&KZ 541I%B[C7&
M\NK9V,X4A'GU<46'+2%3:)M%D9NT"[[893M466XN09:XO*M5V;:'/:G.I\1-
M+I'=:)*[M2ICV,6#JY5-)'!4)8;WKQVHUQY6E-VE.:5*63TMZQO^O)MA"$XD
MU=SU?9G^8CG4TLI2D2A]XU(3-IZL2P'XV8?O[-G.6.Y0EPG70OP*P#]6!S'J
MR,=1F'@+^U@1Q&A)\C5\BA?=MMYU^%7S$F&RK?'*\%M\6S7M/J&SP4[U[/##
M-0HQR#]?GS!:(+_;,EF>VEI2<=U-&FEA+O2;[57>BN_PG?A(G:S H_8?3X'K
M>%%,?@*2N[Y7_1E\FQI5XL"]^L2*:OKR^S_PQ^$QJ@D4!['09/^N9Y)!3]US
M*T'\ZRQ4H@*(<N<P2(IY$<N[&W$K3K[H=O#SO__K9?=_G&_$5=NTG6\'0GPQ
MKLDN">"/Z8R;8.3!SCS1S^Z<>,!J;S[S[/EN&N;*&,2'#E",N#*"/?ZF+&U=
M.S T__1L4'PCT#SM>SNTM0W\S\2;F=__/U!+ P04    " !]@%96MQ^U2K;[
M  "<)P$ &    '9E8V\M,C R,C$R,S%X,3!K,# T+FIP9^SZ5U137?@WBH;>
M";T+2!&5)H@@+0$+1:19Z!!IT@2D!P@)17H34%!0@M*D2Q>!T)N((+U#$A I
MD40E1!+"R?L?I]R</<:W]QC?OMHS:UZM,I]GSF?^REHY6SS;!/#<,3(U M#1
M P!TM!_@; 5P$\! 3__?06N,M(.)E8F)D9&)G86%F963G9.3@YV#@XN;CX>+
MFY>;@X-'B(>77T!04) 3*"PB)"#")R H\-]#Z!AH]S RL3$QL0EP<7 )_)]N
M9[T 7E8&!89Q!CH9 #TO'0,OW=D@0(H6)Q/=_S3 _[O1T=-B9&9A96/GH%W0
MR@.@IV-@H&=D^"]JVMD8VGD (R\3WWDU0V9^:U<6F2 !];B<=ZRR-QK[!.]]
MQ\M==0N.9V,7$A81%9._H'#QTF6-:YI:U[5U;MZZ;61L8GKG_H.'-K9V]@[N
M'IZ/O;Q]?$-"P\(CH)%1"<\2DY)34M-R\UZ\S"]X];KP?6E9>47EAZKJIN:6
MUK;V3QV?^P<&AX9'1L>^3,_,SLTO+"XMHS'8K>T?.S]W]PB___P](AZ3_IW\
MEQ<=@('N_]/^_^;%2\N+GI&1@9'EO[SHZ"/^NX"7D>F\&C.?H36+:Q"_C'H<
MJ\"-G'>-?6RR5^_A!=V"O[,+R6F@Y0G_I?8_F?VO)1;_?RFS_V]B_[^\E@&<
M#'2TQ6/@!8 !I_??IUT$_#_]_[#3L?6.-:3"E:E+/7Q=KH01&Y(Q68\$-B.
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M+SSAI[+5!&[V"/Y$\E"\PFK\HB:'3=_G;PR:8T0%)E@'$-4,)#81N=^L(P(
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MJH+48;&&802;H9=FC7OE:\^9^F.-I\Z7Z+!/RR3H327^CEP;)&&)6P2MA#.
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M!NC7JFB6/]I>#78HLG&I40JN'LT\^,(V2<..4 3>%!C?*//>=UWKEG5L33T
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M29'!L56LS*W!=AO),=$E/44"\1))X&^!<;'/7H%.!40&<7>C8"?:0;OBCH9
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M:XE$&X,''[PT\/>JO.1W3-^&3CQ*]2D0]![<Q]YDT=)W=:%?A,>("$-M#F%
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M72#1B@JA9:<0UKUNPY=ZM'_?2X68*]E[YZ/4 4S>*D^P1U&[ENCDY/4O'<L
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MV\M4B5VQ4 >RO"G$&@-&WD=)Y4\!8<0'N%]T9OL^67H3+\Q.L>QD6**]%-B
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MR3$Y%\=2&4T[6TF<9!NQ#"Z?[;K^@=JJ:T=7U0,*(066&YCV+/"0#)T8XDY
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M0''GH5M585.?[0?+7A]*76ZM;M[;DH^"K[T(8$R""JSS4ZFID 2!"L)M4\#
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M,L[>GP9DB+R$K8;%H;@ZI5V8%Y;80#@_X;HI"Z9-<U7K=U=\'2QM%LO;$A.
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M1/;;_'QE*!LS,]TV?2\=%>>@6"X!LG$"(AAC%;HS(7PDT3&X7-EQ8><+&.)
M<]S=ODK?),J#I[PIBO:2RJ9MRMA\*90\M,!&LB2(+1K&--L7K30N%V&=2MWD
M9C/O6K[CI)A.S#%"NZG/]3A2YE8>M_[NH4FOXH0;,.R<%QYV4^'W30L8#/N
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MFYTS4C1CYBCL>9"%01VT/YI5Y7+Y;4PBLZW*L!NER]EHSZH@7B^ZL1:X6%:
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MYF.RJD[=]8]#M*IG;U44V0>X&R@C B%83HN7W[(LONHX#WCG*8#G!1L;YF0
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M:+?7[-$DL904'7P#78W<R4@>2!>P0_VS<\C/X!OS@=[ED)/LIIKZ[R?81??
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M4LQ(:Z_ID]?%<'$HOZ^,QK/$QOO/C.+>YSJQ<FJ*?0X>#A9->8D7.("P<<?
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MQT()<2C%..%;0R.9H]W"](>S]'(U_P ]:_3(1RN$4\Q5*=9*K-?<[1/Z4CZ
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M;R"H*.V[YDT)^M4+>_\#4$L#!!0    ( 'V 5E;KK-(S3P8  *D[   8
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M[GPHSXSE1:;2A)$GH699K?W_ 5!+ P04    " !]@%96Z6( ^VT)  #O/@
M&    '9E8V\M,C R,C$R,S%X97@S,60Q+FAT;>U;^W/;N!'^5U!E>K%G1#WM
M/"C',XXL-VJ=QSART_X(DJ"(,4CP %"R^M=W%R ERG82N6?W>#?*.)((+(#%
MX_MV%P!/_N)YDRRA6<@B\F'V\9)$,BQ2EAD2*D8-I"ZY2<A,YCG-R$>F%!>"
MO%<\FC-"WG;Z1YU>Y^TKSSL]@:K&91F9^630'<!?;S DO5?^\1M_\(9\^4@.
MKF?C0RM]_GD\^_>7B6OUR_7[R^F8M+QN]]MPW.V>S\Y=!E3?)S-%,\T-EQD5
MW>[D4XNT$F-RO]M=+I>=Y; CU;P[N^HF)A5'72&E9IW(1*W3$TR!3T:CTY.4
M&4K"A"K-S+O6]>S">P,2AAO!3D^ZU;>3#62T.CV)^()HLQ+L72NE:LXSS\C<
M'_9R,X*27<B^(W/K+7ED$K_?Z_UUE-,HXMG<$RPV_E'GZ/4F2?%YLDZ3KFN^
M8H(:OF!8=ZW64#"J_$":9'2W@8=*YE6Y6&;&BVG*Q<I_.>,IT^036Y(KF=+L
M9=NEP+=FBL<O1U9:\_\PJ!JZ9]BM\:C@<Z@<=1VY_OMEUX.M1I;,=B>0(H+,
MR6W" VY^>=%_U1L-^YW^23> P<K_3ZJA=-7.@FM017"S\A,>12P#@5]>O!GT
MAJ.3+@H^DUXAX(>I1XS9>'(UFUY,QV>SZ>=/ (:KK]=GGV9D]OGYQN[1.EY=
M7TY(?TAQ /N#4?_H@!ZZ29:*N,SCJ)[9(-T_7Y#9APGY.AE?7TUGT\E7,OG7
M^,/9I[]-R-EX1B"[_W9X],0*-VE=\@Q:,7[_S5V]IFWR#1B=TY3\O4,^PD^F
MVN1+TCGOM$G(E.'QBIB$&K])(V-H(!@)I(J8>M?JM4!3(4IR73_KG(;5<UF]
M*^&%4@B::^97/T9/T!T/*-K(U*^EH+6P4X#J>H*N9&'\F-^R:%2C<:=4-1I&
MP?_H289Y@=,74E&BQBX$4&FT3+AA'@X/\S.Y5#2OU,'E40YCJ4^_ Z8QJJNT
MG;\U>[])6_>(%8%2*J5B5 =RF00+EB1TP8AB"\Z6X&J8A&M"LZR@ A)SJ0QX
M'^0"Q!TY]7O>/T@,%&421E9@2@D#+$3DG(4L#9BJ[%2;@*\R( <HABMNT!M=
MV>KL0W]T2&1LZQC+%%RAU68]XO!T<=JZ=IZ?"B1;[H.=F3J2O?M0W@.IR4 :
M- U([ZFVGCI)5^0&M!<,7/JVPU,)I$A"PYF$6  JH#P#G*U(D1E5,- 4/'T;
M*  N*$GA27' 8$Q#2%)$IMP0(YW</8$,T*<U52L42>D-L]!:UZDA+0)EH$F!
M6E?8"[F"Z 3$(%[1H E,-X%)"!.B"_S8E%\RQ<I*L ,IU^!&XW"[>$8QG;/0
M*HCUYJ":C*";,-,P*,&J/@Q[I.^1_ABD#_\P2&<DYAE@"6&YP4X;8 [BD*UJ
M^3R+L3Z,-^%W* HTHH#/&E#:@&VNQ(KD "]D!F0,(3;0+U&G[S0-[!+90+:-
M$H4  <"[!%#:YK35)Z0Z(;&02UV1@6)SKHVBT!#%1*<W:-FN85I7RMS3=@_K
M/:P? ^NCIL%ZMH4!&WF_'ND2N&7HA@9/QC&'1XN.*:&*61P"KC@N'72-F<9Y
MX3I!<11+P=BCP<?GB.M02%U .70#E!0.D+F2(8L@69,#P%_$ - .9)/;,*'9
MG)$SL+!7A6"Z=,6'U.L?'[!RVP KZ1]'+NG0ULDQKL\<)6!+! URC2D<<E&K
MQS49WV\RAB:KL*#.)""! 8;_W.RP1_ZNR*\ALG5Z%X._.RW8C:Y&\4+$-/0&
M<&%]XI_#MXWN>D@+O7L1])L#1M8M.4]<%@HJ +N+*QBM.4BQS-:#.T@;/Z#N
M2[B]:T!TZ8IOL-@N_0S,Y. 3@"Y:"A[9$P9=!)I'G"J.'> N8+#>388U%1J=
M>$N%VGK\UO9+S4 A [X&%LHISGXA*+HLT"VKQ"88@!(NM*A'1/ K8"@(7@64
MAT6\YXD]3^S$$T&S>6)GTWN/+G8WVCNS!C#-@D=(!E3+S"Y@JH%(,.Y'AJ J
MJM *_,&I@P$&!@\UB]QE@6TQZVAG2[2V;V#=H=NR0WFA<N ,;0.9,(2U9Q6P
M.PASED%\(H Z((?ER$DH4F3&T0-P%\_!#]D3Q)X@=B.(L&D$P194%-;:(GI8
M'$/LSA>P[O4#,?@Z_MC!>W"/#X?EE@^@(%A^[8+_ ";Z^QKLXM_0M33#G8WX
MYWM^)*CV3"S%E2,!^HRP\CVD]Y#>"=)1TR!=HN4^ZG!GOPRA;<Z#T'Z$I4=_
M7X9AH1!;->?Z@5I3J0VDXZ$^U*5AS,FO!?CF4/7!=XK$0!)@@^](EXJ' %U[
M*)%MGPL>.JT2JM>1"%IO2RHLLFZ-'8_2Y5@1P6^8*$\H[LBW?_,0[8FD443R
MNW/%\9]C>]$>SJ]9IKVQHVC6ZTC?F%3$ZB.BCWO[!&O5:!%Q(Y5>._PV :I,
M4VX,8S]P6@()(07F1QSTLY4< !^ CZ#1!X%OW+&H2(S]6G!0WQ)6D87VD.)P
MOV/8&# WW"MHW(XA'M)A3,X!R;@)CAOK(6< O=)97^_<+1F]0>_;Q<36_[;1
MO#WQKP[L'@7H<I/-'4L\8'II! 4U6UO>[X*_W . (H!@6!QM%P)H\/]UD<+:
M@E&QG2D]G@>/-O=6>0_D/_"6'GKQL0*SUP98,6NI 9CV DR)X+9S@GFVD&+!
MT!/.Z+R\QZ-*X\[27,@5@]QE(IU%IUO\ 'A^DC"ATWBDV2O^#FX[8<@U_0K:
M2]S4X)5]' 88X H6]CX +8RL$MS; #9EZ\Y _1*!D[F')ENH!J86L>OY7<M=
MD;: JC0O->J70%NOV;M0D-62/X8*:R-X9VW77E&HU8Q3C;<TJE&MGCV$DA\
MQ=]X2QC"G[[VL,ZG@9:B,&Q4T4F]N\^_4&J"2!N[+1OW:DCYN<T0^]%^_M&V
M3+)M27XX["6F2PO6SV^)/6@D+WKVWP^FY1EN"KWN#.Y>%7))6Z/6U5WR;7IY
M.3W[:"_NP\_)57EQWPW*DRR[AM#P_S2K#9RU[[UJL9^QIL[8..$L)I-;%A9(
MF^1S;;?CO-PKV,]>4V?OGPQ"03+-P$$MW/GN- OW:&OL?%VP0!54K=QMO<'
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MTCEFGX$GJCS&C&7 YTI4YP,ONJW.R8J>^;*..PGP7V&[S[K/_@=02P,$%
M  @ ?8!65H %L(,Q!@  7!X  !@   !V96-O+3(P,C(Q,C,Q>&5X,S)D,2YH
M=&WM&6MOVS;PK]Q<K$T ZV&[21/9#>#:#NHMB8-86=>/E$1%1&E1H^@XWJ_?
M491<R6F[;G4 HTC@V-+Q>+SW\<C!+Y8U21.2AC2"]_[E!40B7"YHJB"4E"B$
MKIA*P!=91E*XI%(RSN&=9-$=!3BU.Z]MUSX]MJRS 9(:E7-$ZD'7Z>+'[?;
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MV:N!+>3""6Z<5"W9D<.$R(D=J[AS/M0M\$UP?#Y<$H51E&*9$_6J<QM<6J=
MH:ABY'SHU+^&-A3Q^GP8TSN4JS4CKSI++!>46TIDWL#-E \C'>C>HKFW5C16
MJ==SW5_]#,<QY0N+D41!BSTX_MPFZ2+]W"C,XCQ)&%;TCFCN#;X1(UAZH5"I
MOSW%ET9F];A$<&4E>$G9VGL1T"7)T159H1NQQ/Q%U[3 ;TXD35[X)75._R+
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M$4'7DN14ZZZ<=9Q2DJ!+"F01!?W,D@2(I%:0GJC20!=!FZ()/&2%S L,HY5
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M,C,Q7V-A;"YX;6Q02P$"% ,4    " !]@%96MK<3YD9$  #"Q00 %0
M        @ &3-P  =F5C;RTR,#(R,3(S,5]D968N>&UL4$L! A0#%     @
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M      "  89  0!V96-O+3(P,C(Q,C,Q7W!R92YX;6Q02P$"% ,4    " !]
M@%96>:E5]_8_!  :\#( %0              @ $EP0$ =F5C;RTR,#(R,3(S
M,7@Q,&LN:'1M4$L! A0#%     @ ?8!65K<?M4JV^P  G"<! !@
M     ( !3@$& '9E8V\M,C R,C$R,S%X,3!K,# T+FIP9U!+ 0(4 Q0    (
M 'V 5E;8G3_^&P<  $YB   8              "  3K]!@!V96-O+3(P,C(Q
M,C,Q>&5X,C%D,2YH=&U02P$"% ,4    " !]@%96ZZS2,T\&  "I.P  &
M            @ &+! < =F5C;RTR,#(R,3(S,7AE>#(S9#$N:'1M4$L! A0#
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M,C R,C$R,S%X97@S,60Q+FAT;5!+ 0(4 Q0    ( 'V 5E8W,Q"N8PD  *H^
M   8              "  ;,4!P!V96-O+3(P,C(Q,C,Q>&5X,S%D,BYH=&U0
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M=F5C;RTR,#(R,3(S,7AE>#,R9#$N:'1M4$L! A0#%     @ ?8!65NS%W_<B
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:+FAT;5!+!08     #0 - '@#   +*P<    !

end
</TEXT>
</DOCUMENT>
</SEC-DOCUMENT>
